VP-5ZA User Manual - Newport Corporation
Contents
1. All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized Contact your electrician to check your receptacles WARNING This product is equipped with a 3 wire grounding type plug Any interruption of the grounding connection can create an electric shock hazard If you are unable to insert the plug into your wall plug receptacle contact your electrician to perform the necessary alterations to ensure that the green green yellow wire is attached to earth ground WARNING This product operates with voltages that can be lethal Pushing objects of any kind into cabinet slots or holes or spilling any liquid on the product may touch hazardous voltage points or short out parts gt Newport EDH0192En1030 12 1 5 8 Experience Solutions VP 5ZA Precision Vertical Linear Stage 6 2 Connection On each stage is represented a label which indicates its name and its serial number WARNING Always turn the controller s power OFF before connecting to a stage Stages may be connected to the rear panel motor connectors any time prior to power up with the supplied cable assemblies NOTE These stages are ESP compatible Enhanced System Performance is ESP Newport s exclusive technology that enables Newport ESP motion controllers to recognize the connected Newport ESP stage and upload the stage parameters This ensures that the user can operate the motion AMA syste2. VWP 5ZA Precision Vertical Linear Stage E EB ME ES Compliant OS USER S MANUAL Newport Experience Solutions Precision Motion Guaranteed VP 5ZA Precision Vertical Linear Stage Warranty S A CAUTION Please return equipment in the original or equivalent packing You will be responsible for damage incurred from inadequate packaging if the original packaging is not used K J EDH0192En1030 12 15 Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s discretion To exercise this warranty write or call your local Newport representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the instrument transportation prepaid to the indicated service facility Repairs will be made and the instrument returned transportation prepaid Repaired products are warranted for the balance of the original warranty period or at least 90 days Limitation of Warranty This warranty does not apply to defects resulting from modification or misuse of any product or part CAUTION Warranty does not apply to damages resulting from e Incorrect usage Load on the stage greater than maximum specified lo
3. FOR 8 32 M4 SCREW d ON 3 34 2 95 100x75 lt B gt DET A de boa Or as en 2 gt qa Y ETS S 500125 4 t 3 HOLES 8 32 M4 THD 3 94 Y g eo ica AT 120 0256 6 5 31 100 50 12 5 f 135 SS in 6 1 e eS 5 L 50 y 50 12 5 age A a ne 2x4 HOLES 4 40 M3 THD O O A IDEADA ON 1 9899 50 4 x 25 2 50 125 ei 1 FOR PRSO OR SR50 porte Ces poe e 19 a 2 s 1 00 1 00 gt 100 i o lt 95 PT 25 PK 25 gt J Y 1 699009 m4 lt ma gt A 30 7 6 gt lt MODEL SHOWN VP 5ZA 80 SUB D25M CONNECTOR 20 27 CABLE LENGTH 4 9 FT 1 5 M DIMENSIONS IN INCHES AND MILLIMETERS Components with counterbored holes for 1 4 20 M6 screws can be attached to the top plate of the VP 5ZA M VP 5ZA using 8 32 M4 and the washers supplied with each stage COUNTERBORED HOLE FOR 1 4 20 OR M6 SCREW WASHER STAGE HOLES USING MOUNTED USED SUPPLIED WASHERS RGV100BL HL 1 2 7 8 6 VP 25XA 1 2 5 6 OR 3 4 7 8 8 32 OR M4 SCREW CAUTION To reach specifications stated stages must be fixed on a plane surface with a flatness of 5 um D Newport Experience Solutions 1 1 EDH0192En1030 12 15 VP 5ZA Precision Vertical Linear Stage 8 2 VP BP Universal Base Plate A 50 165 gt gt lo l 4 HOLES 0 26 6 6 C BORED 9 44 11 2 ON SQR 3 94 100 5 31 Y 135 39 10 4
4. amp Asia Newport Corporation 1791 Deere Ave Irvine CA 92606 USA Sales Tel 800 222 6440 e mail sales newport com Technical Support Tel 800 222 6440 e mail tech newport com Service RMAs amp Returns Tel 800 222 6440 e mail service newport com Europe MICRO CONTROLE Spectra Physics S A S 9 rue du Bois Sauvage 91055 Evry CEDEX France Sales amp Technical Support Tel 33 0 1 60 91 68 68 e mail france newport com Service amp Returns Tel 33 0 2 38 40 51 55
5. HOLES M4 THD A ON 3 94 2 95 100x75 4 2 4 HOLES 9 26 6 6 C BORED 9 44 11 2 ON 4x3 101 6x76 2 4 HOLES 9 31 8 C BORED 9 51 13 ON 4 96x3 97 126 x 100 8 CAUTION To reach specifications stated stages must be fixed on a plane surface with a flatness of 5 um A VP 5ZA stage mounted on top of an ILS linear stage with optional VP BP base plate The vertical lift approach of the VP 5ZA allows centering of the payload over the bearings and close to the position feedback system This avoids any cantilevered loads and results in more precise motion with higher load capacity D Newport Experience Solutions EDH0192En1030 12 15 12 VP 5ZA Precision Vertical Linear Stage EN Mounting a VP 5ZA Stage on its Support WARNING Stages must be disconnected from any controller before each mounting or dismounting operation of VP 5ZA stages and their support CAUTION To reach specifications stated stages must be fixed on a plane surface with a flatness of 5 pm Remove both protection plates Turn the manual knob with a slotted screwdriver to put the movable body in minus end of travel position movable body in low position Inset one of both screw guides supplied in both mounting holes located on the cable output size of the stage until the guide end is in contact with the bottom of the countersink receiving the mounting screw in the base Slip one CHC M4 screw not supplied into eac
6. Specification Definiti nS 0 ice 4 3 4 Load Characteristics and Stiffness o oonoccnicnnnonnnonononcnoncnonccnnncnoncnannonoss 5 30 Stage Wehi iii ii 5 40 Drive oa 5 50 Moto cnica aia 6 5 1 UE25CC Motor Characteristics used with the Tachometer 6 5 2 Command Signals for the DC Motor cococoncicccccnocoonccononnncononnonncnnonnoncnnnononos 6 5 3 Sensor PositiON ooinocanionicnncioianicnainotarodioda cerraran dad aho andaba i dai 6 5 4 Feedback Signal Position oooninnnoonionncnnocnnonnoonoonnoonocnncnnoo nar nao norn conan 7 Bibi PINOUTS neccen e a T 6 0 Connection to Newport Controlleys 8 6 1 Warnings on Controllers miii iii cis 8 0 2 CoOmMecilON iaa 9 63 Cables oi dti den 9 7 0 Connection to Non Newport Electronics 10 SL COMMECH OMS iii la dll lat iii 10 8 0 Dimensions 11 Bil VP 5ZA SIA E eaa EE aid 11 8 2 VP BP Universal Base Plate ses 12 iii EDH0192En1030 12 15 VP 5ZA Precision Vertical Linear Stage 9 0 Mounting a VP 5ZA Stage on its Support 13 10 0 Using Precautions 2 0 cccseseeseceeeseeeeseeneeetentees 15 11 0 Maintenance 20 ccesseseeseseeseseeneseecesseceseeseneeeenesees 17 11 1 ES e AAA a ENEA 17 11 2 REP AIL aran dit ii a Gages thie iia 17 11 3 COMA ON di di 17 Service ForMiiii dial aii 19 gt Newport EDH0192En1030 12 1 5 iv Experience Solutions VP 5Z
7. The VP 5ZA stage is equipped with a cable of 1 5 m length and a 25 pin Sub D connector for connection to our motion controllers A versatile grid of threaded holes on the top plate provides compatibility with the VP 25XA linear stages and other Newport positioning products A standard 3 point mounting interface for a wafer chuck is provided as well For mounting the VP 5ZA to optical tables or our ILS linear stages use the optional base plate VP BP 2 1 Design Details Base Material Aluminum Bearings Recirculating ball bearings double row linear ball bearings for vertical guidance Drive Mechanism Inclined plane design with transmission ratio of 5 1 Backlash free ball screw Drive Screw Pitch mm 1 Feedback Linear steel scale 20 um signal period 0 1 um resolution Limit Switches Optical Origin Optical at center of travel including mechanical zero signal Motor DC servo motor with tachometer UE25CC Cable Length m 1 5 NOTE This product complies with the RoHS directive Restriction of Hazardous Substances RoHS Compliant gt Newport EDH0192En1030 12 1 5 2 Experience Solutions VP 5ZA Precision Vertical Linear Stage EN Characteristics 3 1 Definitions Specifications of our products are established in reference to ISO 230 standard part II Determination of accuracy and repeatability of positioning numerically controlled axes This standard gives the definition of pos
8. Vertical Linear Stage EW Motor 5 1 UE25CC Motor Characteristics used with the Tachometer Motor Nominal Max RMS Max Peak Resistance Inductance Tachometer Voltage V Current A Current A Q mH Const V krpm UE25CC 48 0 5 1 8 0 83 0 52 5 2 Command Signals for the DC Motor Motor y Motor Tachometer Tachometer Motor Motor Tachometer Tachometer Displacement Direction Direction Displacement t Direction O_o In the above drawings Motor signal is referred to Motor signal Tacho Generator signal is referred to Tacho Generator signal When the stage moves in Direction the Motor voltage is higher than Motor voltage and Tacho Generator voltage is higher than Tacho Generator voltage When the stage moves in Direction the Motor voltage is lower than Motor voltage and Tacho Generator voltage is lower than Tacho Generator voltage 5 3 Sensor Position Home Position Origin i at Center of Travel Range ES ti O Mechanical Zero Index Pulse Index Pulse be Stage Travel Range i Motion Direction End of Run and Mechanical Zero are 5 V open collector type The Index Pulse provides a repeatable Home Position at 1 step CAUTION End of Run and Mechanical Zero are active signals and should not be connected to any other source gt Newport EDH0192En
9. and packaging micro assembly precision metrology and surface inspection systems Based on the industry proven technology used on our VP 25XA linear stages the VP 5ZA offers highly reliable motion with nanometer sensitivity high responsiveness and a perfectly straight trajectory The ultra low profile of the VP 5ZA is achieved by two 1 5 slope wedges which move past each other via inclined recirculating ball bearings To avoid any side motion the upper wedge is constrained by 2 linear bearing slides with a double row of balls vertically mounted resulting in pure vertical motion A cool running high torque DC motor with a precision preloaded long life ball screw ensures high speed motion with minimum settling time Manual movements can be accomplished using a standard screw driver A high resolution linear scale is directly attached to the horizontal moving rail of the actuator eliminating all drive train induced motion errors The compact reading head is fixed to the actuator static part to avoid any moving cables inside the stage and underlines the robustness and long lasting value of the VP 5ZA with an MTBF of 20 000 hours The VP 5ZA stage features end of run limit switches at both ends of the stage to prevent bearing damage from over travel The origin Mechanical Zero is at the center of travel with a reference on the optical scale For optimal performance we recommend the use of our ESP or MM series motion controllers
10. u fo 1 4 N C 17 End of Run a z 5 Motor 18 End of Run e O 6 Motor 19 Encoder Phase A a E 7 Motor 20 Encoder Phase B o e 8 Motor 21 Encoder Power 5 V 0 9 N C 22 0 V Encoder os IS ola 10 N C 23 Encoder Phase A 11 N C 24 Encoder Phase B 12 N C 25 Index Pulse I 13 Mechanical Zero 7 EDH0192En1030 12 15 VP 5ZA Precision Vertical Linear Stage 6 0 Connection to Newport Controllers 6 1 Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury Read the controller user s manual carefully before operating the instrument and pay attention to all written warnings and cautions WARNING Disconnect the power plug under the following circumstances e If the power cord or any attached cables are frayed or damaged in any way e If the power plug is damaged in any way e If the unit is exposed to rain excessive moisture or liquids are spilled on the unit e If the unit has been dropped or the case is damaged e If you suspect service or repair is required e Whenever you clean the electronics unit CAUTION To protect the unit from damage be sure to e Keep all air vents free of dirt and dust e Keep all liquids away from the unit e Do not expose the unit to excessive moisture 85 humidity e Read this manual before using the unit for the first time WARNING
11. 1030 12 1 5 6 Experience Solutions VP 5ZA Precision Vertical Linear Stage 5 4 5 5 gt Newport Experience Solutions Feedback Signal Position Encoder Phase A Encoder Phase A Encoder Phase B Encoder Phase B Direction Motion gt Direction The incremental sensor consists of a optical scale and an encoder head When the carriages of the stage move the encoder head generates square signals in quadrature sent to pins 19 20 23 and 24 of the SUB D25 connector Newport User Stage Encoder Phase A l Pin 19 P Encoder Phase A I Pin 23 Encoder Phase B Pin 20 CS Encoder Phase B i Pin 24 Y Index Pulse Phase _1 Pin 15 sf Index Pulse Phase Pin 25 Output Signals YYY YY Y OO Oe 0 Oe T y Pin 21 5V 5 Encoders if P 150 mA max amp Sensors A OV Power Supply Encoder and Index Pulse are differential pair type RS 422 type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 26LS31 or MC3487 Reception circuits to use are 261532 or MC3486 Pinouts The SUB D25 connection for the VP 5ZA stage is given in the following table VP 5ZA UE25CC 1 Tachometer 14 Shield Ground 2 N C 15 Index Pulse I 3 Tachometer 16 0 V logic
12. 30 12 15 VP 5ZA Precision Vertical Linear Stage CAUTION Take care that any object does not get into the internal mechanism of the stage through interface mounting holes located on the top of the movable body this may damage stage specifications CAUTION Protection plates of the movable body must be removed only for mounting a VP 5ZA stage on its support Without these protection plates objects can get into the internal mechanism of the stage through mounting holes located in the movable body this may damage stage specifications CAUTION Take care that any object does not inhibit the displacement of the movable body this may damage stage specifications gt Newport EDH0192En1030 12 15 16 Experience Solutions VP 5ZA Precision Vertical Linear Stage i Lo Maintenance 11 2 11 3 gt Newport Experience Solutions RECOMMENDATION It is recommended to contact our After Sales Service which will know to define the appropriate maintenance for your application Maintenance The VP 5ZA stage requires no particular maintenance Nevertheless this is a precision mechanical device that must be kept and operated with caution PRECAUTIONS The VP 5ZA stage must be used or stocked in a clean environment without dust humidity solvents or other substances RECOMMENDATION It is recommended to return your VP 5ZA stage to Newport s After Sales Service after every 2000 hours of use
13. A Precision Vertical Linear Stage EC Declaration of Conformity LR PSO Go ONG A Ie 4 NS SS eS 6S SS CS SS ES PAS ES OND a AS OS Se OS AS Ie ONG x NACO LN NS gt Newport Experience Solutions AOS SOP SOW SOR SO VP 5ZA EC Declaration of Conformity following Annex IT 1A of Directive 2006 42 EC on machinery The manufacturer MICRO CONTROLE Spectra Physics 9 rue du Bois Sauvage F 91055 Evry FRANCE Hereby declares that the machinery Description VP 5ZA e Function Precision Vertical Linear Stage e Models M VP 5ZA the technical file of which was compiled by Mr Dominique DEVIDAL Quality Director MICRO CONTROLE Spectra Physics Zone Industrielle B P 29 F 45340 Beaune La Rolande France complies with all the relevant provisions of the Directive 2006 42 EC on machinery complies with all the relevant provisions of the Directive 2014 30 EU relating to electro magnetic compatibility was designed and built in accordance with the following harmonised standards e NF EN 61326 1 2013 Electrical equipment for measurement control and laboratory use EMC requirements Part 1 General requirements NF EN 55011 2010 A1 2011 Class A was designed and built in accordance with the following other standards NF EN 61000 4 2 NF EN 61000 4 3 NF EN 61000 4 4 NF EN 61000 4 5 NF EN 61000 4 6 ORIGINA
14. L DECLARATION Done in Beaune La Rolande on 26 June 2015 Dominique DEVIDAL Quality Director v EDH0192En1030 12 15 VP 5ZA Precision Vertical Linear Stage Definitions and Symbols The following terms and symbols are used in this documentation and also appear on the product where safety related issues occur A The exclamation symbol may appear in warning and caution tables in this document This symbol designates an area where personal injury or damage to the equipment is possible General Warning or Caution The following are definitions of the Warnings Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety safety and preservation of the equipment or important tips WARNING Warning indicates a potentially dangerous situation which can result in bodily harm or death CAUTION Caution indicates a potentially hazardous situation which can result in damage to product or equipment NOTE Note indicates additional information that must be considered by the user or operator European Union CE Mark CE The presence of the CE Mark on Newport Corporation equipment means that it has been designed tested and certified as complying with all applicable European Union CE regulations and recommendations Warnings and Cautions ATTENTION This stage is a Class A device In a residential environment this device can cause electromagnetic interference I
15. a points on the travel and 4 cycles in each direction gives a total of 164 points Guaranteed Specifications Guaranteed maximum performance values are verified per Newport s A167 metrology test procedure For more information please consult the metrology tutorial section in the Newport catalog or at www newport com D Newport Experience Solutions 3 EDH0192En1030 12 15 VP 5ZA Precision Vertical Linear Stage EDH0192En1030 12 15 3 2 3 3 Mechanical Specifications Travel Range 4 8 mm inimum Incremental Motion 0 06 jm Uni directional Repeatability 0 3 um Bi directional Repeatability 0 5 um or 0 25 um On Axis Accuracy 3 um or 1 5 um aximum Speed 5 mm s Pitch 1112 100 prad or 50 prad Roll 1112 100 prad or 50 prad TBF h 20 000 1 Shown are peak to peak guaranteed specifications or half the value as sometimes shown For the definition of typical specifications which are about 2X better than the guaranteed values visit www newport com for the Motion Control Metrology Primer 2 To obtain arcsec units divide urad value by 4 8 CAUTION To reach specifications stated stages must be fixed on a plane surface with a flatness of 5 um The MTBF value indicated above is given to use the stage with the following parameters Centered load 50 N Displacements 1 back and forth of 2 mm 200 backs and forth of 0 1 mm Speed 5 mm s Acceleration 40 mm
16. ad Carriage speed higher than specified speed Improper grounding Connectors must be properly secured When the load on the stage represents an electrical risk it must be connected to ground Excessive or improper cantilever loads e Modification of the stage or any part thereof This warranty is in lieu of all other warranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or consequential damages No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation This manual has been provided for information only and product specifications are subject to change without notice Any changes will be reflected in future printings D Newport ii Experience Solutions VP 5ZA Precision Vertical Linear Stage Table of Contents D Newport Warranty teen mrssmn leds das ness aa teens cap decors tresse eee a stades ii EC Declaration Of Conor id v Definitions and Symbols ii sigsssieiiesies oacelaedisaieaeieenegsvedesateveneansesvlava tana uavevedeideaee vi WAPI GS nresnani ee E ea a axed due cuatectientead eee tree a tee En vii Cations ii aida viii 1 0 Introduction 1 2 0 Description it 2 2 1 Design Detalls viii aia 2 3 0 Chiaracieristlos conoscan 3 Sil D finitions incisi n 3 3 2 Mechanical Specifications ss 4 3 3 Load
17. for lubrication If your stage is mounted on a workstation and cannot be easily removed please contact Newport s After Sales Service for further instructions Repair CAUTION Never attempt to disassemble a component of the stage that has not been covered in this manual To disassemble a non specified component can cause a malfunction of the stage If you observe a malfunction in your stage please contact us immediately to arrange for a repair CAUTION Any attempt to disassemble or repair a stage without prior authorization will void your warranty Calibration CAUTION It is recommended to return your VP 5ZA stage to Newport once a year for recalibration to its original specifications 17 EDH0192En1030 12 15 VP 5ZA Precision Vertical Linear Stage D Newport EDH0192En1030 12 15 18 Experience Solutions Service Form Your Local Representative Tel Fax Name Return authorization Please obtain prior to return of item Company Address Date Country Phone Number P O Number Fax Number Item s Being Returned Model Serial Description Reasons of return of goods please list any specific problems D Newport Experience Solutions 19 EDH0192En1030 12 15 Newport Experience Solutions Visit Newport Online at WWw newport com North America
18. gic 13 Mechanical Zero 19 Encoder Phase A 23 La Encoder Phase A 20 Encoder Phase B 24 0 m Encoder Phase B 15 m gt Index Pulse 25 f L Index Pulse I 17 a End of Run 2 18 End of Run 2 21 i r 5 V Encoder 2i FF wa 0V Encoder Connector f Fo Re Connector Cap Cap 1 The Mechanical Zero logic signal is open collector type It supports until 30 V and 10 mA 2 Open collector type with a 5 6 V protective Zener diode Newport Stage A Mechanical Zero End of Run l max 10 mA lin Max 16 MA V max 30 V V max 5 6 V If the Mechanical Zero output is not used a 1 kQ 0 25 W resistor must be connected rs between pins 13 and 21 Encoder and Index Pulse are differential pair type RS 422 type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 26LS31 or MC3487 Reception circuits to use are 26LS32 or MC3486 gt Newport EDH0192En1030 12 15 10 Experience Solutions VP 5ZA Precision Vertical Linear Stage Dimensions 8 1 VP 5ZA Stage Le 6 50 165 gt lt 394 100 gt I I 4 HOLES C BORED
19. h screw guide and screw it until the headscrew is in contact with the bottom of the countersink GO Newport Experience Solutions 1 3 EDH0192En1030 12 15 VP 5ZA Precision Vertical Linear Stage CAUTION Any screw which the head is not in contact with the bottom of the countersink mounting hole may damage the internal mechanism when the stage is in motion Remove both screw guides CAUTION Never turn the manual knob when a screw guide is still in place in the stage this may cause damage on the internal mechanism and damage stage specifications Turn the manual knob with a slotted screwdriver to put the movable body in plus end of travel position movable body in high position Repeat step for both mounting holes located on the manual knob size of the stage Tighten both mounting screws at the nominal torque GO Newport EDH0192En1030 12 15 14 Experience Solutions VP 5ZA Precision Vertical Linear Stage Remove both screw guides Repeat steps and Y and tighten both mounting screws located on the cable output size of the stage at the nominal torque Re mount both protection plates 10 0 Using Precautions CAUTION Take care that any object does not get into the internal mechanism of the stage through open spaces e between the base and the movable body this may damage stage specifications D Newport Experience Solutions 15 EDH0192En10
20. ition uncertainty which depends on the 3 following parameters Absolute Accuracy Difference between ideal position and real position On Axis Accuracy Difference between ideal position and real position after the compensation of linear errors Linear errors include cosine errors inaccuracy of screw or linear scale pitch angular deviation at the measuring point Abbe error and thermal expansion effects All Newport motion electronics can compensate for linear errors The relation between absolute accuracy and on axis accuracy is as follows Absolute Accuracy On Axis Accuracy Correction Factor x Travel Repeatability Ability of a system to achieve a commanded position over many attempts Reversal Value Hysteresis Difference between actual position values obtained for a given target position when approached from opposite directions Minimum Incremental Motion MIM or Sensitivity The smallest increment of motion a device is capable of delivering consistently and reliably Resolution The smallest increment that a motion device can theoretically move and or detect Resolution is not achievable whereas MIM is the real output of a motion system Yaw Pitch Rotation of carriage around the Z axis Yaw or Y axis Pitch when it moves The testing of on axis accuracy repeatability and reversal error are made systematically with test equipment in an air conditioned room 20 C A linear cycle with 21 dat
21. m quickly and safely 6 3 Cables Our VP 5ZA stage is delivered equipped with a 1 5 meter cable with a SUB D25M connector so it can be directly connected to our controllers drivers WARNING This cable is shielded correctly For a correct operation make sure to lock connectors ground continuity provided by the cable WARNING Keep the motor cable at a safe distance from other electrical cables in your environment to avoid potential cross talk D Newport Experience Solutions 9 EDH0192En1030 12 15 VP 5ZA Precision Vertical Linear Stage 7 0 Connection to Non Newport Electronics 7 1 Connections WARNING Newport is not responsible for malfunction or damage to a VP 5ZA stage when it is used with non Newport controllers WARNING Newport guarantees CE compliance of the VP 5ZA only if they are used with Newport cables and controllers Nevertheless the figure below shows the wiring when a VP 5ZA stage is used with non Newport controllers SUB D25M Connection Connector UE25CC g A 2 1 NC 10 1 N C WW N C 12 i la 1 N C 1 a Tachometer 2 pr TERR NC 3 a m P Tachometer 4 gt 1 N C a oli Pr 5 gt Motor 6 m i m 1 Motor 1 i Motor 8 un ar gt Motor Y H E Y 14 4 n Ground 1 hi Pa 4 16 ay OV lo
22. mage the cable and cause an electrical shock CAUTION Be careful that the stage is not bumped when it is being carried This may cause it to malfunction CAUTION When handling this stage always unplug the equipment from the power source for safety CAUTION When the carriage is in its end of run position it is strongly recommended not to go beyond this point as this may damage the stage mechanism CAUTION Contact your Newport service facility to request cleaning and specification control every year D Newport EDH0192En1030 12 15 viii Experience Solutions VP 5ZA Precision Vertical Linear Stage Precision Vertical Linear Stage VP 5ZA 1 0 Introduction This manual provides operating instructions for the VP 5ZA precision vertical linear stage VP 5ZA vertical linear stage RECOMMENDATION We recommend you read carefully the chapter Connection to electronics before using the VP 5ZA stage Ultra low profile precision XYZ system consisting of two VP 25XA linear stages and one VP 5ZA vertical translation stage Compared to traditional stacks of stages this solution offers a lower profile alternative with easy access to the load from any side D Newport Experience Solutions 1 EDH0192En1030 12 15 VP 5ZA Precision Vertical Linear Stage EN Description The VP 5ZA is an ultra low profile precision vertical translation stage ideally suited for semiconductor wafer inspection photonics test
23. n this case suitable measures must be taken by the user gt Newport EDH0192En1030 12 1 5 vi Experience Solutions VP 5ZA Precision Vertical Linear Stage Warnings WARNING The motion of objects of all types carries potential risks for operators Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved WARNING Do not use this stage when its motor is emitting smoke or is unusually hot to the touch or is emitting any unusual odor or noise or is in any other abnormal state Stop using the stage immediately switch off the motor power and then disconnect the electronics power supply After checking that smoke is no longer being emitted contact your Newport service facility and request repairs Never attempt to repair the stage yourself as this can be dangerous WARNING Make sure that this stage is not exposed to moisture and that liquid does not get into the stage Nevertheless if any liquid has entered the stage switch off the motor power and then disconnect the electronics from power supply Contact your Newport service facility and request repairs WARNING Do not insert or drop objects into this stage this may cause an electric shock or lock the drive Do not use this stage if any foreign objects have entered the stage Switch off the motor power and then disconnect the electronics power supply Contact your Newp
24. ort service facility for repairs WARNING Do not place this stage in unstable locations such as on a wobbly table or sloping surface where it may fall or tip over and cause injury If this stage has been dropped or the case has been damaged switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility and request repairs WARNING Do not attempt to modify this stage this may cause an electric shock or downgrade its performance WARNING Do not exceed the usable depth indicated on the mounting holes see section Dimensions Longer screws can damage the mechanics or cause a short circuit D Newport Experience Solutions vii EDH0192En1030 12 15 VP 5ZA Precision Vertical Linear Stage Cautions CAUTION Do not place this stage in a hostile environment such as X Rays hard UV or in any vacuum environment CAUTION Do not place this stage in a location affected by dust oil fumes steam or high humidity This may cause an electric shock CAUTION Do not leave this stage in places subject to extremely high temperatures or low temperatures This may cause an electric shock e Operating temperature 10 to 35 C e Storage temperature 10 to 40 C in its original packaging CAUTION Do not move this stage if its motor power is on Make sure that the cable to the electronics is disconnected before moving the stage Failure to do so may da
25. s Operating rate on the cycle 50 Load Specification Definitions Normal Load Capacity Cz Maximum load a stage can move while maintaining specifications This value is given with speed and acceleration specified for each stage and with a load perpendicular to bearings Max Speed mm s 5 Max Acceleration mm s 40 Axial Load Capacity Cx Maximum load along the direction of the drive train Off Centered Load Q Maximum cantilever load a stage can move Q lt Cz 1 D a D Cantilever distance a Construction parameter D Newport 4 Experience Solutions VP 5ZA Precision Vertical Linear Stage 3 4 Load Characteristics and Stiffness Cz Normal centered load capacity 50 N Kax Compliance in roll 50 urad Nm Kay Compliance in pitch 45 prad Nm Kaz Compliance in yaw 10 prad Nm Q Off center load N Q lt Cz 1 D 30 Where D Cantilever distance mm 3 5 Stage Weight The stage weight below includes the cable Weight Ib kg VP 5ZA 5 28 2 4 4 0 Drive The VP 5ZA stage is equipped with DC motor and a linear steel scale e Signal period 20 pm e Resolution 0 1 pm Specifications Resolution Maximum Speed Motor um mm s VP 5ZA 0 02 5 UE25CC D Nominal resolution The real resolution is specified on a control report supplied with each VP 5ZA stage gt Newport Experience Solutions 5 EDH0192En1030 12 15 VP 5ZA Precision
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