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TURBOVAC SL 700 - Ideal Vacuum Products, LLC

1. The frequency converter is equipped with an internal fuse It can only be replaced by Oerlikon Leybold Vacuum staff Connect the power supply to the mains 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum 33 Installation 34 Pin 3 GND Shielding Pin2 OV Fig 2 16 Pin assignment of the DC connector X4 Model Hirose HS21P 3 view from the soldered side Heat sink and forced cooling required Operation possible without additional cooling Ambient temperature Motor current Parameter 5 Fig 2 17 Cooling requirements for the TURBO DRIVE 700 when fitted separately Emergency shut down By shutting down the power supply voltage Please note the information on shutting down and emergency shut down provided in Section 3 4 Shutting down 2 8 3 Mounting the frequency converter The frequency converter may be affixed with the aid of the enclosed M4 slid ing nuts The bottom side of the frequency converter must be cooled suffi ciently 130000762_002_A0 09 2008 Oerlikon Leybold Vacuum Installation STATUS POWER ERROR UNC 4 40 threads Green LED STATUS off Pump at standstill lt 3 Hz flashes slowly 1 s Start command is present about 10 s after start flashes fast 3 s Running up or running down On Normal operation Yellow LED POWER off No supply voltage fl
2. 20 130000762 002 AO 09 2008 Oerlikon Leybold Vacuum Installation 4 cylinder head screws Bracket Air cooler socket 4 flat cross headed screws Stop plate mounting aid SZ Freq converter Sliding nuts 4 flat head screws Air cooler 268 Protection cap Fig 2 8 Mounting air cooling and frequency converter beside the pump E Insert the connecting cable from the air cooler into the air cooler socket When fitting be sure not to pinch the cable Wi As the purge gas and venting valve use either valves with a M8 screw in thread or screw in the M8 DN16KF adapter and connect the valve to it See also Section 2 7 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum 21 Installation Cooling water inlet Connection thread for the vibration sensor Cooling water outlet Forevacuum connection Closure screw for the purge gas connection Power supply of the TURBO DR Connection cable to TURBO DR Fig 2 4 Connection elements Caution Warning cmn sg VE VE 2 4 Attach the pump to the vacuum chamber Do not stand below the pump while connecting or removing it Do not open the packaging until immediately before installation Do not remove the covers and blind flanges on the pump until just before attachment to the equipment to ensure that assembly
3. 184 199 227 44 Designation Motor temperature shutdown level Current reduction factor Error code memory for the last 40 error events Rotor frequency at the time of error Error operating hours memory for the last 40 error events Response delay time Max passing time Converter operating hours counter Converter date of manufacture Warnings bits 1 130000762_002_A0 09 2008 Oerlikon Leybold Vacuum Range 30 150 30 100 0 39 0 1300 0 19 years 2 19 10 2000 0 19 Years 01 01 00 31 12 99 0 65535 Unit Default Format r w C 55 U16 r 96 100 U16 rw 0 Array r 0 39 U16 Hz U16 r Array 0 39 0 01 h U32 r msec 10 U16 rw S 500 U16 r 1000 0 01h U32 r U32 r U16 r Description Max permissible motor temperature P7 P133 causes the pump to be Switched off Is used for the reduction of the maximum current drawn by the frequency converter e g for adaption of low performance power supplies Note values 100 reduce the pump performance and increase the run up time A change in the current reduction factor will onlybecome effective after writing any value to parameter 8 and when switching after this the supply voltage off and on Sequential permanent memory the individual error codes are accessed via parameter 171 with additional index no in the parameter order identifier of the interface protocol The
4. Important Safety Information Indicates procedures that must be strictly observed to prevent hazards to Warning persons Indicates procedures that must be strictly observed to prevent damage to Caution or destruction of the product The Oerlikon Leybold Vacuum TURBOVAC SL 700 has been designed for safe and efficient operation when used properly and in accordance with these Operating Instructions It is the responsibility of the user to carefully read and strictly observe all safety precautions described in this section and throughout the Operating Instructions The TURBOVAC must only be operated in the proper condition and under the conditions described in the Operating Instructions It must be operated and main tained by trained personnel only Consult local state and national agen cies regarding specific requirements and regulations Address any further safety operation and or maintenance questions to your nearest Oerlikon Leybold Vacuum office 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum 3 Safety Information Failure to observe the following precautions could result in serious personal injury Mechanical hazards Warning Danger of injury Avoid exposing any part of the human body to the vacuum Handle the equipment only while vented The pressure in the pump must not exceed 1 2 bar absolute The pump is only intended for use in a vacuum If overpressure may occur in the system you must install a pr
5. Maximum run up time 30 2000 S 720 U16 rw Max permissible time during which the pump 1500 must attain the normal operation threshold P24 x P25 with the start signal present value in brackets for water cooled pump Start delay time Q 255 0 1 min 0 U16 rw Pause time after the Start command until the pump s drive is started RS485 address 0 81 0 U16 rw Parameterizable RS485 address a change of this parameter setting will only be effective W after the power supply has been switched off and on and W if the addresses 1 2 and 3 are not connection coded via SERVICE X5 Start counter 0 65535 U16 r Counts the total number of pump starts Error counter 0 65535 U16 r Counts the total number of errors Error mode 1 2 2 U16 rw Selection of the error code table which is saved in P171 2 standard setting 1 2 compatible to T1600 Current bearing temp 0 150 C U16 r Measured bearing temperature identical to P127 Bearing temperature Exceeding the bearing temperature warning threshold 30 150 C 65 U16 r warning threshold results in a warning Current bearing temp 0 150 C U16 r Measured bearing temperature identical to P125 Bearing temperature Max permissible bearing temperature shutdown level 30 150 C 70 U16 r P125 gt P132 causes the pump to be switched off 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum 43 Interfaces No 133 139 171 174 176 180 183
6. Warning Contamination Form 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum 53 Troubleshooting Warning 5 Troubleshooting When the connector cable is attached the outputs at the frequency con verter are not free of voltage Before you start searching for the source of the problem you should carry out a few simple checks Are the connections in good working order Bl Power supply mains mM DC power supply to the frequency converter E Connector cable between the frequency converter and the pump Is the forevacuum pressure sufficient After having removed the cause for the error reset the error message at the TURBO DRIVE Bi n case of errors with error codes 1 to 7 by applying a STOP signal via the Socket REMOTE X1 or a reset sequence via the serial interface or by Switching the mains power off Wi n case of error code 8 by switching the mains power off The error codes can only be read if a serial interface is present The following table has been provided as a guide when determining the cau Ses of errors To remove possible faults staff having different qualifications is required E Operator of the system E Qualified maintenance staff of the system operator or qualified staff from the vendor erecting the system E Staff from Oerlikon Leybold Vacuum OLV In some cases also a combination of the above will be needed for example check by the operator rectification of the fault b
7. 50 52 55 56 M Magnetic field 18 Mains power failure 4 49 Media 6 18 37 49 Motor temperature 38 42 44 46 55 N Nitrogen 10 30 37 0 Overpressure 4 18 30 Oxygen 18 37 P Particles 50 PLC 33 35 36 Pressure rise 50 Purge gas and venting valve 8 11 16 19 21 30 31 50 R Radiation 18 23 51 Relay 10 36 38 43 Resonance damper 23 31 Index S Safety valve 4 18 25 Shock 48 Splinter guard 8 9 17 23 Split cage DC motor 8 Starting pressure 48 T Temperature sensor 8 46 V Venting valve 8 11 16 19 21 30 31 43 50 Vibration 20 22 23 48 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum 61 Sales and Service Germany Oerlikon Leybold Vacuum GmbH Bonner Strasse 498 D 50968 Cologne Phone 49 0 221 347 1234 Fax 49 0 221 347 1245 sales vacuum oerlikon com www oerlikon com Oerlikon Leybold Vacuum GmbH Sales Area North Northeast Branch Office Berlin Industriestrasse 10b D 12099 Berlin Phone 49 0 30 435 609 0 Fax 49 0 30 435 609 10 sales vacuum bn oerlikon com Oerlikon Leybold Vacuum GmbH Sales Area South Southwest Branch Office Munich Sendlinger Strasse 7 D 80331 Munich Phone 49 0 89 357 33 9 10 Fax 49 0 89 357 33 9 33 sales vacuum mn oerlikon com service vacuum mn oerlikon com Oerlikon Leybold Vacuum GmbH Sales Area West amp Benelux Branch Office Cologne Bonner Strasse 498 D 50968 Cologne Phone 49 0 2
8. 61 Bearing temperature warning Bearing temperature warning threshold has been exceeded P125 P126 or P127 P128 no 62 Bearing temperature warning Bearing temperature warning threshold has been exceeded P127 P126 or P125 P128 no 101 Overload warning The frequency has dropped below the normal operation frequency by high load P3 P25 24 after normal operation has been reached no 103 Power supply error No power supply during active operation of the pump no 106 Overload error Upper critical limit frequency has been exceeded by overload P3 P20 after P32 from start after run up yes 116 Permanent overload error Max overload time has been exceeded P3 lt P25 P24 for longer than P32 yes 117 Motor current error No motor current or motor current too low la gt 1 A and P5 lt 0 2 A yes 118 Motor connection error Error in the motor connection cable yes 125 High load warning Max permissible permanent current has been exceeded P5 gt P17 P21 for longer than P32 from start after run up no 126 Bearing temperature Error at the bearing temperature sensor Sensor error Resistance not in the plausible range 20 C lt T lt 150 C yes 127 Bearing temperature Error at the bearing temperature sensor sensor error Resistance not in the plausible range 20 C lt T lt 150 C yes 128 Motor temperature Error at the motor temperature sensor sensor error Resistance not in the plausible range 20 C lt T lt 150 C yes 46 13000076
9. Sub D type Socket on the instrument female thread UNC4 40 Note If on the controlling side an RS 232 interface in accordance with the PC standard with a 9 pin Sub D male connector is present then a straight through cable as shown in Fig 3 2 may be used Refer also to Operating Instructions GA 05 281 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum 39 Interfaces Links for activation of the bus terminator 0 5 A 24 V DC i 6 7 2 TxD RxD gt 3 TxD RxD 32 i 9 5 lt Fig 3 3 Pin assignment for the socket at the frequency converter for RS 485 interface male 3 2 2 RS 485 interface Standards ISO IEC 8482 EIA 485 Protocol acc to VDIA DE 3689 Transmission rate 19200 baud fixed Response delay default setting 10 ms parameter 180 Address range 015 Max cable length 50 m with bus termination Type of cable 2 wire twisted pair twisted pair cable Differential voltage levels logic O see also Standards transmitter 1 5 5 V receiver gt 0 3 V logic 1 transmitter 1 5 5 V receiver 0 3 V Interface connector 9 way Sub D type Socket on the instrument male thread UNC4 40 Note After having changed the bus address through the rotary switch the frequency converter must be switched off yellow power LED off and then on again so as to enable the new address setting Bus addresses over 15 can only be set via Parameter 37 Refer also to Operating Instructions GA
10. The safety valve prevents oil flowing back from the forevacuum pump into the turbomolecular pump when the system is not running To ensure that the forevacuum space at the turbomolecular pump is kept lar gely free of oil vapors during operation as well we recommend installing an adsorption trap in the forevacuum line Alternatively purge the forevacuum line with inert gas In this case the pressure in the forevacuum line must be over 10 mbar Provide a roughing line to achieve the shortest cycle times Ensure that the pump is sufficiently isolated against vibrations generated by the forevacuum pump Installation Forevacuum pump Warning Safety valve Adsorption trap 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum 25 Installation I Fig 2 7 Pump with air cooling 2 6 Connect the cooling Cooling of the pump depends on the required pumping power and the ambient temperature When the pumps are insufficiently cooled they will shut down The pump must only be operated with forced cooling Install an air or water cooling depending on the load see Section 2 3 Part Nos see Section 1 5 Air cooling When installing air cooled pumps within a system ensure that sufficient quan tities of fresh air are freely available The air cooling facility is powered via the pump 26 1300
11. U16 U16 U16 U16 U16 U16 U16 U16 U16 U16 U16 U16 U16 130000762_002_A0 09 2008 Oerlikon Leybold Vacuum r r w r w r w r w r w Description No function TURBO DRIVE 700 134 Xx yy version zz correction index The max frequency depends on the pump type Nominal value for TURBO DRIVE 700 59V Measured coil temperature for the motor A write command will cause the data to be saved The parameter value itself is not processed and saved After a reset or switching on the supply voltage with a different pump connected or without a pump all parameters will be reset to their defaults Measured internal converter temperature P12 0 default via REMOTE X1 P12 1 via serial interface P12 2 Start REMOTE X1 at Start and serial interface sends Start signal Stop REMOTE X1 at Stop or serial interface sends Stop signal Exceeding the motor temperature warning threshold results in a warning Maximum permissible motor current value in brackets for water cooled pump Highest permissible frequency Lowest permissible frequency When the pump is accelerating this frequency must be reached within the maximum passing time P183 After the end of acceleration Switch off threshold because of overload see error 106 42 SL 700 air cooled 43 SL 700 w o air cooler water cooled Nominal pump frequency If P29 0 Defines
12. blanked off as a standard with a M8 closure screw A purge gas and venting valve or a power failure venting valve or a venting valve may be either connected directly or using a M8 DN16KF adapter The power failure venting valve or venting valve vents the pump and the fore vacuum line when the pump is switched off and thus keeps oil vapor from diffusing back from the forevacuum line A choke nozzle in the vent port ensures that the pump is not vented too fast When having to decide which gases need or not need to be pumped with purge gas we are available to provide assistance Refer to Section 3 1 for suited gases When operating the pump with purge gas the pump needs to be vented via the purge gas valve after having shut down the pump see Section 3 4 Consider the additional purge gas flow when selecting a suitable backing pump We recommend a purge gas flow of 0 6 mbar l s 36 sccm with Nitrogen The pressure in the pump must not exceed 1200 mbar 0 2 bar over pressure 130000762_002_A0 09 2008 Oerlikon Leybold Vacuum Installation Turbomolecular pump Forevacuum gauge port Forevacuum pump Resonance damper Adsorption trap Forevacuum valve Purge gas and venting valve High vacuum valve Valve in the roughing pump line O Frequency converter OMANODOOKRWDND Roughing line recommend to achieve the shortest possible cycle times Fig 2 13 Schematic of a turbomolecular pum
13. clean gases These pumps are not suitable for E pumping liquids or gases containing dust or particulates E pumping corrosive or reactive gases E pumping gas mixtures with an oxygen share of gt 21 96 If reactive gases in low concentrations must be pumped operate the pump with purge gas During normal operation the pressures within the pump will be so low that many gas mixtures will be incapable of igniting But due to pressure bursts Danger of ignition during switching processes or due to malfunctions for example pressures can be attained rendering such gas mixtures ignitable During operation the pump can reach temperatures as high as 110 C 230 F Ignition sparks could occur in case of damage to the pump and these could ignite explosive mixtures We would be glad to consult with you as regards the media which can safely be handled with this unit Install a micropore filter when pumping media which contains dust Suited for venting or purging are all gases Suited gases Wi which will not cause corrosion or pitting in aluminium and steel and H which in connection with process deposits in the pump will not cause cor rosion or sticking For venting and as the purge gas we recommend inert gases like nitrogen or argon The temperature of these gases should be between 5 C and 80 C max relative humidity should not exceed 10 ppm The gas must be clean In individual cases and after consultation also dry filtered oil
14. last error code which has occurred is saved at the memory location with the index 0 the oldest is at index 39 See below for the error codes Sequential permanent memory of the last 40 rotor frequency values which have been saved at the time of an error The individual error codes are accessed via parameter 174 with additional index no in the parameter order identifier of the interface protocol The last error code which has occurred is saved at the memory location with the index 0 the oldest is at index 39 Analogous to P171 error code memory Pause time between received and trans mitted interface protocol string of the frequency converter s serial interface RS 232 and RS 485 We recommend not to change the default setting 10 ms Max permissible time during which the pump must with the start signal present have passed through the critical speed range between 60 Hz and P20 value in brackets for water cooled pump Totals the operating hours for the converter when the pump s drive is active Active warnings described bit per bit for the meaning see below No 303 312 316 Designation Range Pump status word Cat No code 0 281 4 Serial No code 1 281 4 Hardware identifier 0 100 Interfaces Unit Default Format r w Description 3 2 5 Warning codes for parameter 227 Bit a ON OO RR WO nm Bit 15 binary value Bit 0 Hexadecimal lt MSB LSB gt value 0000 0000 0000 00
15. staff Operator Maintenance staff Operator Operator Maintenance staff Disposal 6 Waste disposal The equipment may have been contaminated by the process or by environ Contamination mental influences In this case the equipment must be decontaminated in accordance with the relevant regulations We offer this service at fixed prices Further details are available on request Contaminated parts can be detrimental to health and environment Before Warning beginning with any work first find out whether any parts are contamina ted Adhere to the relevant regulations and take the necessary precauti ons when handling contaminated parts Separate clean components according to their materials and dispose of these accordingly We offer this service Further details are available on request When sending us any equipment observe the regulations given in Section 4 2 Oerlikon Leybold Vacuum service 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum 57 cerlikon leybold vacuum EC Manufacturer s Declaration in the spirit of Appendix Ilb to the 98 37 EG Machinery Guidelines We Oerlikon Leybold Vacuum GmbH herewith declare that operation of the incomplete machine defined below is not permissible until it has been determined that the machine into which this incomplete machine is to be installed meets the regulations of the EEC Directive on Machinery When using the appropriate Oerlikon Leybold Vacuum accesso
16. 0 exchange already arranged received Return only O rent O loan O for credit Calibration C DKD QO Factory calibration O Quality test certificate DIN 55350 18 4 2 1 A Description of the Leybold product Material description Catalog number Serial number Type of oil Forevacuum pumps Failure description Additional parts Application Tool Application Process B Condition of the equipment No 1 Has the equipment been used m 2 Drained Product service fluid 3 All openings sealed airtight 4 Purged If yes which cleaning agent and which method of cleaning 1 if answered with No go to D essa 1 What substances have come into contact with the equipment e g toxic inflammable corrosive radioactive Tradename C Description of processed substances Please fill in absolutely Yes No Contamination No Yes O 9 0X iC yu m u u corrosive u u u flammable u u m m explosive a a radioactive2 a a microbiological a a other harmful substances u u Trade name and or chemical term of service fluids and substances processed properties of the substances According to safety data sheet Chemical name oa S Gm d 2 Are these substances harmful 3 Dangerous decomposition products when heated If yes which No Yes m m without written evidence of decontamination 2 Comp
17. 0 pumps combination examples dimensions in mm 12 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum Description 180 _ DN 160 ISO K DN h 160 ISO K 232 160 CF 242 o a2 DN 16 KF DN 25 KF 20 15 Purge gas connection 285 20 15 A2 J Fig 1 4 Dimensional drawings for SL 700 pumps combination examples dimensions in mm 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum 13 Description 1 4 Ordering data TURBOVAC SL 700 Part No High vacuum flange DN 160 ISO K 800051V3001 High vacuum flange DN 160 CF 800051V3002 1 5 Accessories Frequency converter TURBO DRIVE 700 Basic device with RS 232 interface 800074V0001 with RS 485 interface 800074V0003 with Profibus interface 800074V0004 Connecting cable pump frequency converter 0 2 m long 800080V0020 0 4 m long 800080V0040 1 m long 800084V0100 2 5 m long 800084V0042 3 m long 800084V0300 5 m long 800084V0500 10 m long 800084V1000 Mounting kit TD 700 for TURBOVAC SL 700 Including 0 2 m long connection cable pump frequency converter For installing the frequency converter beside the pump 800110V0007 underneath the pump 800110V0010 Water cooling for SL 700 800135V0004 Consisting of 2 cooling coils with G 1 8 connections 4 gaskets for G 1 8 4 hose nozzles 4 ho
18. 00762 002 A0 09 2008 Oerlikon Leybold Vacuum Installation Operation not possible Operation not possible Water cooling 40 I h 15 C Ambient temperature 40 C Water cooling 70 I h 35 C Ambient temperature 40 C Air cooling Ambient temperature 25 C Gas flow in mbar l s Air cooling Ambient temperature 35 C 6 8 10 12 Forevacuum pressure in mbar For pumps with an ISO K flange and aluminium housing For pumps with a CF flange and in the case of special applica tions please ask us for informa tion Operation not possible Gas flow in mbar l s 6 8 10 12 Forevacuum pressure in mbar Fig 2 8 Cooling requirements of the SL 700 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum 27 Installation 100 l h j p 60 z 2 S 40 D 20 O O d 0 10 15 20 25 30 35 c 40 Cooling water temperature Fig 2 9 Cooling water requirements Maximum relative humidity 2096 30 40 45 ue 50 40 60 w o o 5 70 t 35 80 E oO E 90 96 E 30 100 Minimum coolant inlet temperature at which condensation does not yet 29 7 occur as a function of maximum room temperature and maximum relative humidity Example 20 VA Max ambient temperature 25 C 5 10 15 20 25 o 30 Min coolant inlet temperature 17 C Max relative humidity 6096 Minimum coolant inlet temp
19. 01 0001 0000 0000 0000 0010 0002 0000 0000 0000 0100 0004 0000 0000 0000 1000 0008 0000 0000 0001 0000 0010 0000 0000 0010 0000 0020 0000 0000 0100 0000 0040 0000 0000 1000 0000 0080 0000 0001 0000 0000 0100 0000 0010 0000 0000 0200 0000 0100 0000 0000 0400 0000 1000 0000 0000 0800 0001 0000 0000 0000 1000 0010 0000 0000 0000 2000 0100 0000 0000 0000 4000 1000 0000 0000 0000 8000 Decimal value 1 2 4 8 a 6 32 64 128 256 512 1024 2048 4096 8192 16384 32768 x U16 r Meaning of the bits Bit O 2 1 Normal operation Bit 1 1 Ready for switch on Bit 2 1 Speed is increasing Bit 3 1 Speed is dropping Bit 4 1 Generator operation Bit5 1 Stand by n case of an error P303 has the value of O not ready to be switched on U32 r Abbreviated description of the Cat No of the pump or of the converter Examples 800072V1003 721003 830070V0101 300700101 U32 r The 9 least significant bits of the original serial No U16 r Hardware version index of the converter Designation Condition description of the warning Motor temperature warning P7 gt P16 Converter temperature warning P11 gt 70 C Bearing temperature warning P125 gt P126 or P127 gt P126 Bearing temperature warning P127 gt P126 or P125 gt P126 not used not used Overspeed warning P3 gt P24 10 Hz not used e High load warning P5 P17 P21 effective P32 seconds after the start and if
20. 05 281 3 2 3 Profibus DP The Profibus DP used has been defined in the standards EN 50170 and VDI VDE 3689 40 130000762 002 AO 09 2008 Oerlikon Leybold Vacuum Interfaces Fig 3 5 1 TURBO DRIVE 700 with additional Profibus interface For more information on the Profibus system The New Rapid Way to Profibus DP Manfred Popp Profibus Nutzerorganisation e V Haid und Neu Str 7 76131 Karlsruhe Germany P N 4 072 www profibus com Upon request we shall be pleased to provide detailed information on the hardware and the protocol used for the data Refer also to Operating Instructions GA 05 281 5V i 390 Q For longer cable runs Links for activation of the E Eu S ess 49 ee RU onnaa Bus terminator X5 for longer cable runs 150 Q TxD RxD Y e o e 8 6 120 Q iiu el a n Tk E e X5 TxD RxD t 390 Q 7 zd TURBO DRIVE X5 7 XS 8 X5 7 g5 8 TURBO TURBO e DRIVE DRIVE Master Fig 3 4 Connection of the RS 485 bus or CO ue e o qo ve e AC Nor ON Xe aM eon d NONE e KA on oe ase a Green LED BUS STS 9 a c ge que eS off Profibus not active flashing Profibus is waiting for initialisation and parameters PROFIBUS Ower on Profibus
21. 2 002 A0 09 2008 Oerlikon Leybold Vacuum Interfaces Code Type of error Condition Description of the error Pump switched off 131 Permanent high load error Max high load time has been exceeded P5 gt P17 P21 for longer than 2 P32 yes 143 Overspeed error Pumping speed has been exceeded by more than 15 96 P8 gt P18 x 1 15 yes 144 Profibus address error Wrong Profibus address set must be O 126 yes 145 Profibus error Error during cyclic exchange of data over the Profibus the watchdog timer has responded yes 201 CPU error Error in the micro computer yes 202 PLL synchronisation warning Error in the pump s speed synchronisation wiring no 203 Parameter value error Parameter value internally not valid data error yes 205 Data plausibility error nternal data error open loop yes 207 Motor blocked error Rotor blocked yes 208 PLL error PLL synchronisation error yes 212 Shut down Emergency off 213 Overvoltage error Power supply voltage too high UZK 80 V yes 214 Undervoltage error Power supply voltage too low level depends on pump yes 216 Memory test error Error in external memory yes 217 Pump identification Wrong or missing pump identification resistor yes resistor error 222 Hardware test error yes 223 Logical unit error Error in the programmed logigal unit yes 226 227 Pump model can not No set of parameters defined for the recognized pump model yes be operated 130000762 002 A0 09 2008 Oer
22. 21 347 1270 Fax 49 0 221 347 1291 sales vacuum kn oerlikon com Oerlikon Leybold Vacuum GmbH Service Competence Center Emil Hoffmann Strasse 43 D 50996 Cologne Suerth Phone 49 0 221 347 1439 Fax 49 0 221 347 1945 service vacuum kn oerlikon com Oerlikon Leybold Vacuum GmbH Mobil Customer Service Emil Hoffmann Strasse 43 D 50996 Cologne Suerth Phone 49 0 221 347 1765 Fax 49 0 221 347 1944 service vacuum kn oerlikon com Oerlikon Leybold Vacuum Dresden GmbH Zur Wetterwarte 50 Haus 304 D 01109 Dresden Service Phone 49 0 351 88 55 00 Fax 49 0 351 88 55 041 info vacuum dr oerlikon com Europe Belgium Oerlikon Leybold Vacuum Nederland B V Belgisch bijkantoor Leuvensesteenweg 542 9A B 1930 Zaventem Sales Phone 32 2 711 00 83 Fax 432 2 720 83 38 sales vacuum zv oerlikon com Service Phone 32 2 711 00 82 Fax 82 2 720 83 38 service vacuum zv oerlikon com France Oerlikon Leybold Vacuum France S A 7 Avenue du Qu bec Z A Courtaboeuf 1 B P 42 F 91942 Courtaboeuf Cedex Sales and Service Phone 33 1 69 82 48 00 Fax 438 1 69 07 57 38 sales vacuum or oerlikon com Oerlikon Leybold Vacuum France S A Valence Factory 640 Rue A Berg s B P 107 F 26501 Bourg l s Valence Cedex Phone 33 4 75 82 33 00 Fax 33 4 75 82 92 69 info vacuum vcGoerlikon com Great Britain Oerlikon Leybold Vacuum UK Ltd Unit 2 Silverglade Business Park Leatherhead R
23. Connection cable max 20m pump frequency converter max 10m Fig 2 14 Examples for connection 382 130000762 002 AO 09 2008 Oerlikon Leybold Vacuum Installation Programmable logic control PLC o 9 Og REMGTEIN o9 MAINS 826 aie 080 on 8990 898 4 20 060 0 c OO remote 269 SSS oo O50 gt 89 1 8e8s ra 8 3888 e6 9 o808 o 0502 Typ TURBO CONTROL 89 FRONT 3965 L crower our 9 REMOTE OUT TA AC 7A AC Warning GN N N O bo A o DC control cable 88 26 C 47 63 Hz Fig 2 15 Connection schematic for TURBO CONTROL 700 2 8 2 Connecting the power supply The frequency converter must only be connected to power supplies which Warning meet the requirements for functional extra low voltage with positive isola tion in accordance with IEC 364 VDE 0100 Part 410 or local regulations SELV The power supply must meet the requirements given in Section 1 3 Peak loads in the kHz range may be present on the DC side The power supply should have a current limitation or control When connecting several frequency converters to a single power supply then each frequency converter must be fused separately Connect the frequency converter to the 59 V DC power supply or to the TURBO CONTROL 700 Ensure correct polarity Caution Pin 1 59V Pin 2 OV Pin 3 GND
24. Leutschenbachstrasse 55 CH 8050 Z rich Sales Phone 41 44 308 40 50 Fax 41 44 302 43 73 sales vacuum zh oerlikon com Service Phone 41 44 308 40 62 Fax 41 44 308 40 60 service vacuum zh oerlikon com America USA Oerlikon Leybold Vacuum USA Inc 5700 Mellon Road USA Export PA 15632 Phone 1 724 327 5700 Fax 1 724 325 3577 info vacuum ex oerlikon com Sales Eastern amp Central time zones Phone 1 724 327 5700 Fax 1 724 333 1217 Pacific Mountain Alaskan amp Hawaiian time zones Phone 1 480 752 9191 Fax 1 480 752 9494 Service Phone 1 724 327 5700 Fax 1 724 325 3577 Latin America Oerlikon Leybold Vacuum USA Inc Brazilian Office Av D ria 360 cj 12 Campo Belo 04635 070 Sao Paulo SP BRAZIL Sales Phone 55 11 3554 3117 Fax 55 11 3554 3117 Nelson Batistucci oerlikon com Oerlikon Leybold Vacuum GmbH Bonner Strasse 498 D 50968 Cologne Phone 49 0 221 347 0 Fax 49 0 221 347 1250 info vacuum oerlikon com Asia PR China Oerlikon Leybold Vacuum Tianjin International Trade Co Ltd Beichen Economic Development Area BEDA No 8 Western Shuangchen Road Tianjin 300400 China Sales and Service Phone 86 22 2697 0808 Fax 86 22 2697 4061 Fax 86 22 2697 2017 sales vacuum tj oerlikon com service vacuum tj oerlikon com Oerlikon Leybold Vacuum Tianjin Co Ltd Beichen Economic Development Area BEDA No 8 Western Shuangchen Road Tian
25. P21 10096 not used z Switch off threshold exceeded P125 gt P132 or P127 gt P132 can only be reset by the Oerlikon Leybold Vacuum Service Overload warning P3 lt P25 P24 not used E not used S Power supply warning P4 P805 or P4 P806 not used 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum 45 Interfaces 3 2 6 Error codes for parameter P171 Code Type of error Condition Description of the error Pump switched off O No error no 1 Overspeed error Nominal speed of the pump P 18 has been exceeded by over 1096 no 2 Pass through time error Max time for passing through the critical frequencies of 60 Hz to P20 has been exceeded 60 Hz P3 P20 after P183 has elapsed with the start signal present yes 3 Bearing temperature error Maximum bearing temperature has been exceeded P125 P132 or P127 P132 yes 4 Short circuit error Short circuit in the pump s motor or the connecting cable yes 5 Converter temperature error Maximum temperature for the converter has been exceeded P11 gt 85 C yes 6 Run up time error Max time after which the pump must enter its normal operation mode has been exceeded P3 P24 x P25 after P32 has elapsed with the start signal present yes 7 Motor temperature error Maximum motor temperature has been exceeded P7 gt P133 yes 8 Pump error Pump could not be identified or no pump is connected yes 60 Short circuit error Short circuit in the pump s motor yes
26. Screws for the pump may be torn off or sudden twisting of the entire pump can be experienced At high pump loads for example during cyclic operation at high gas throughputs or at high ambient temperatures the aforementioned mainten ance work should be carried forward When an adsorption trap is used regenerate or renew the adsorption agent regularly refer to the operating instructions provided with the trap The frequency converter is maintenance free 4 1 Cleaning If required clean the turbomolecular pump of dust with a dry cloth 4 2 Oerlikon Leybold Vacuum Service Whenever you send us in equipment indicate whether the equipment is con taminated or is free of substances which could pose a health hazard If it is contaminated specify exactly which substances are involved You must use the form we have prepared for this purpose A copy of the form has been reproduced at the end of these Operating Instructions Declaration of Contamination for Compressors Vacuum Pumps and Components Another suitable form is available from www oerlikon com Oerlikon Leybold Vacuum Documentation Download Documents Attach the form to the equipment or enclose it with the equipment This statement detailing the type of contamination is required to satisfy legal requirements and for the protection of our employees We must return to the sender any equipment which is not accompanied by a contamination statement Maintenance
27. Yokohama shi 222 0033 Sales Phone 81 45 471 3330 Fax 81 45 471 3323 info vacuum yh oerlikon com sales vacuum yh oerlikon com Oerlikon Leybold Vacuum Japan Co Ltd Osaka Sales Office 5 13 Kawagishi machi Suita chi Osaka 564 0037 Phone 81 6 6393 5211 Fax 81 6 6393 5215 info vacuum os oerlikon com sales vacuum os oerlikon com Oerlikon Leybold Vacuum Japan Co Ltd Tsukuba Technical Service Center Kogyo Danchi 21 Kasuminosato Ami machi Inashiki gun Ibaraki ken 300 0315 Service Phone 81 298 89 2841 Fax 481 298 89 2838 info vacuum iik oerlikon com sales vacuum iik oerlikon com Korea Oerlikon Leybold Vacuum Korea Ltd SF Jellzone 2 Tower 159 4 Jeongja Dong Bundang Gu Sungnam Si Gyeonggi Do Korea 463 384 Sales Phone 82 81 785 1367 Fax 482 31 785 1359 623 7 Upsung Dong Cheonan Si Chungcheongnam Do Korea 330 290 Service Phone 82 41 589 3035 Fax 82 41 588 0166 Singapore Oerlikon Leybold Vacuum Singapore Pte Ltd 1 Science Park Road Singapore Science Park 2 3102 12 Capricorn Building Singapore 117528 Sales and Service Phone 65 6303 7000 Fax 465 6773 0039 sales vacuum sg oerlikon com service vacuum sg oerlikon com Taiwan Oerlikon Leybold Vacuum Taiwan Ltd No 416 1 Sec 3 Chung Hsin Rd Chu Tung Hsin Chu Taiwan R O C Sales and Service Phone 886 3 500 1688 Fax 4886 3 583 3999 sales vacuum hc oerlikon com service va
28. a Start Pump Normal Error is Motor Relay Relay LED Stop rotating frequency present drive NORMAL ERROR STATUS signal 90 of OPERATION setpoint frequency Stop no no no off passive passive off Stop yes no no off passive passive flashes Stop yes yes no off passive passive flashes Start no no no on passive passive off Start yes no no on passive passive flashes Start yes yes no on active passive green Stop no no yes off passive active off Stop yes no yes off passive active flashes Stop yes yes yes off passive active flashes Start no no yes off passive active off Start yes no yes off passive active flashes Start yes yes yes off passive active flashes 36 130000762 002 AO 09 2008 Oerlikon Leybold Vacuum 6 e gt TURBO DRIVE 700 Operating mode ES Other modes are not possible they indicate a failure affecting the TURBO DRIVE off Pump not operating off Pump is decelerating off Just after stop pump was in the nor mal operating mode before that of Just after start off Pump is accelerating off Pump is in the normal operating mode red Error is present pump is at standstill red Error is present pump is decelerating red Error has just occurred red Error is present pump is at standstill red Error is present pump is decelerating red Error has just occurred Operation 3 Operation 3 1 Media compatibility purge gas The TURBOVAC SL 700 is suitable for pumping air and
29. ashes Supply voltage too low or too high on Supply voltage is present Red LED ERROR off No error no warning flashes Warning is present pump can be operated possibly with some restrictions On Fault is present pump stopped or can not be operated Fig 2 18 View of the TURBO DRIVE 700 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum 35 Installation Pin assignment of the connector 5 43 2 1 00 00 0 0 0 0 0 9 8 7 6 Relay functions r n c 5 mO 3 com 4 r N C o5 oO NO 9 com 4 TURBO DRIVE Pin assignment for the Start Stop input TURBO DRIVE 700 Relay Error E No error 1 connected to 2 as shown passive W Error is present 1 connected to 9 active Start Stop operation Example 1 Operation via a PLC Switching threshold for the Start Stop control input Low level lt 5V High level gt 15V Relay Normal operation standard setting E While deceleration acceleration Stop 4 connected to 5 as shown passive W During normal operation f gt 0 9 f 4 connected to 3 active nom 0 V STOP 6 y 24V START 8 Example 2 Operation via contacts Contact open STOP TURBO DRIVE 700 Contact closed START 7 8 Fig 2 19 Pin assignment of the REMOTE X1 connector 2 8 4 Relay status Input data status Output dat
30. ay time proceed as follows With the aid of a Windows PC and the PC software TURBO DRIVE Server change the setting for the parameter 36 Start delay time So as to retain the value saved for parameter 36 when switching the pump off the parameter value needs to be saved permanently For this enter any value for example 1 for parameter 8 Thereafter changed parameters will be saved permanently After replacing the pump or when switching on the supply voltage without a connected pump all changed parameter values will be reset to factory defaults 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum 51 Operation 52 Hazardous gases Deposits Desiccant For special applications further parameters can be changed Please ask us 3 8 Removing the pump from the system Shut down the pump and vent as described in Sections 3 4 and 3 5 If the pump has previously handled hazardous gases implement the pro per precautionary measures before opening the intake or exhaust connec tion If necessary use gloves a respirator and or protective clothing and work under an exhaust hood Disconnect the pump only when it has come to a full stop The green LED at the frequency converter must have gone out Then switch the mains power off and wait until the yellow power LED is off Then only disconnect any cable connections The pumps may be contaminated with process gases These gases may be toxic and hazardous to heal
31. by an external power supply The TURBO DRIVE may be installed beside or underneath the pump or up to 10 m away Purge gas connection The pumps are equipped with a purge gas facility The purge gas and venting connection is blanked off by default with a M8 closure screw A purge gas and venting valve may be connected either directly or by using a M8 DN16KF adapter 1 2 Standard equipment The pumps are shipped sealed in a PE bag with a desiccant to absorb moi sture The maximum useful life of the desiccant is one year The high and forevacuum flanges are covered with protection caps The connection elements and the splinter guard are not part of the standard equipment A suitable DC coupling for the power supply is included In the case of pumps with integrated frequency converter it is supplied with the pump in the case of pumps with a separate frequency converter it is supplied with the frequency converter PE Polyethylene FPM Fluororubber resistant to temperatures up to 150 C 302 F 8 130000762_002_A0 09 2008 Oerlikon Leybold Vacuum 1 3 Technical data TURBOVAC High vacuum connection Pumping speed without splinter guard for No Ar He Ho Max gas throughput with water cooling No Ar He Ho Ultimate pressure with two stage oil sealed rotary vane pump Max permissible forevacuum pressure see Fig 2 8 Weight Pump with ISO K flange with TURBO DRIVE 700 with TURBO DRIVE 700 and air cooler w
32. cerlikon leybold vacuum TURBOVAC SL 700 Wide Range Turbomolecular Pump with Integrated or External Frequency Converter Operating Instructions 130000762 002 A0 Part Nos 800051V3001 800051V3002 Contents 2 8 1 2 8 2 2 8 3 2 8 4 3 1 3 2 3 2 1 3 2 2 3 2 3 3 2 4 3 2 5 3 2 6 3 3 3 4 3 5 3 6 3 7 3 8 Important Safety Information Description Design Standard equipment Technical data Ordering data Accessories Installation Conforming utilization Operating environment Fitting accessories Attach the pump to the vacuum chamber Forevacuum connection Connect the cooling Connecting the purge gas venting valve Electrical connection Connecting pump and frequency converter Connecting the power supply Mounting the frequency converter Relay status Operation Media compatibility purge gas Interfaces RS 232 C interface SERVICE X5 HS 485 interface Profibus DP Parameter list Warning codes for parameter 227 Error codes for parameter P171 Switching on Shutting down Venting Bakeout Changing the start delay time Removing the pump from the system 2 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum 37 37 38 39 40 40 42 45 46 48 49 50 51 51 52 Safety Information 4 Maintenance 53 4 1 Cleaning 53 4 2 Oerlikon Leybold Vacuum Service 53 5 Troubleshooting 54 6 Waste disposal 57 EC Manufacturer s Declaration 58 EC Conformance Declaration 59 Index 61
33. cuum hc oerlikon com cerlikon leybold vacuum www oerlikon com
34. cuum pump and use a different forevacuum pump if necessary Seal leak install a higher capacity vacuum pump if necessary Reduce the number of consumers or use a stronger power supply or switch on the consumers one after the other Repair the pump Check the forevacuum pump and use a different forevacuum pump if necessary Seal leak install a higher capacity vacuum pump if necessary Replace the fan Feed cooler air to the pump or install water cooling Repair the pump Repair the pump Check to see if the connecting cable is undamaged exchange it if required See error code 3 7 Improve the cooling situation E g avoid exposure to the heat generated by other equipment Check connecting cable Use power supply recommended by Oerlikon Leybold Vacuum Reduce the number of consumers when switching on or use a stronger power supply Responsible Operator maintenance staff Operator Maintenance staff OLV service Operator maintenance staff Maintenance staff Operator maintenance staff OLV service Operator maintenance staff Maintenance staff OLV service Maintenance staff OLV service OLV service Operator maintenance staff Maintenance staff Operator Maintenance staff Operator maintenance staff 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum 55 Troubleshooting Malfunction Yellow power LED is not on Red LED flashes Yellow LED flashes T
35. data is being ERROR HIGH LOW BUS STATUS S TES transmitted BUS ERROR oO O a 4 N E Q kas Sas Red LED BUS ERR p TUPAO DRIVE off No error 3E 7 1 O 99999 rg 00009 flashes 1x Profibus error eer ca ao flashes 2x Incorrect address setting SERVICE X5 must be in the range Cd awe EN 24 59v A 0 126 0 7E hex 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum 41 Interfaces 3 2 4 Parameter list No Designation Range 0 Dummy parameter 1 Type of frequency 132 134 converter 2 Software version XX yy Zz 3 Actual rotor frequency 0 1300 4 Actual converter supply voltage 24 59 5 Setpoint for the motor current 0 80 y Actual motor temperature 0 150 8 Permanently save the changed parameter data in the EEPROM 11 Actual converter temperature 0 150 12 Operating mode for 0 2 16 Motor temperature warning threshold 30 150 17 Mak value setting for motor current Ores LD 18 Nominal pump frequency 750 1200 19 Minimum setpoint frequency for the pump P20 P18 20 Minimum frequency O P19 level 23 Pump type 00 55 24 Setpoint frequency P19 P18 25 Frequency dependent normal operation level 0 100 27 Motor current dependent normal operation level 5 75 42 Unit Hz 0 1A C C C 0 1A Hz Hz Hz Hz 96 0 1 A Default Format r w 1 14 00 54 75 45 800 600 575 42 or 43 800 90 20 U16 U16 U16
36. e connector cables Route all cables so as to protect them from damage Do not expose the pump the frequency converter or the connections to dripping water Disconnect and connect the cable connections only while the pump is turning no longer green status LED off and with the mains power swit ched off yellow power LED off Otherwise there is the risk of damaging the frequency converter After replacing the pump or when switching on the supply voltage without a connected pump all changed parameter values will be reset to factory defaults The pump must only be opened by such persons who have been author ised by Oerlikon Leybold Vacuum to do so The references to diagrams e g 1 2 consist of the Fig No and the Item No in that order We reserve the right to alter the design or any data given in these Operating Instructions The illustrations are not binding Retain the Operating Instructions for further use 6 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum Description with air cooler and with air cooler and frequency purge gas connection converter mounted to the pump with frequency converter With water cooling and mounted under the pump frequency converter mounted under the pump Fig 1 1 Examples of SL 700 1 Description The TURBOVAC SL 700 is a wide range turbomolecular pump designed to Use evacuate vacuum chambers down to pressure levels in the high vacuum ra
37. e rotor section are excluded from gua rantee coverage Insert the splinter guard so that the surface curvature is at the top and apply some pressure lightly at the rim so that the splinter guard engages If dust could pass from the vacuum chamber into the pump then a micropo re filter must be installed between the vacuum chamber and the pump The rotor must not be exposed to hot surfaces above 100 C Install an opti Radiation shield cal radiation shield if required The pump is precision balanced and is generally operated without a reson Vibrations ance damper To decouple extremely sensitive equipment and to prevent transfer of external vibrations to the pump a special resonance damper is available for mounting at the high vacuum flange If several pumps are to be mounted to a system you must consult our Applications Dept in order to prevent that the pumps will be excited by vibra tions by each other Besides the forevacuum connection it is possible to connect a vibration sen Sor thread M3 9 3 mm deep 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum 23 Installation Warning Centering ring O ring FPM ISO K flange Outer centering ring Clamp Fig 2 6 Using type ISO K flanges Detach the shipping flange from the high vacuum flange and remove the desiccant Pay attention to scrupulous cleanliness when making the connec tion During operation the pump can become so hot that
38. eded The standard version is resistant to radiation up to 109 Gy Places of installation up to 1000 m above sea level 3300 ft are possible without restrictions At altitudes over 1000 m heat dissipation by the ambient air is impaired For higher places of installation please ask Oerlikon Leybold Vacuum The frequency converter must not be operated in explosive gas atmo spheres 1 mT milliTesla 10 G GauB 1 Gy Gray 100 rad 18 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum Installation Screws G1 8 threads Hose nozzles Hac x uy Hose clamps Hose min 220 mm long Cooling water Inlet j Cooling water Outlet Fig 2 1 Pump with mounted water cooling 2 3 Fitting accessories Either a water or air cooling facility and a purge gas and venting valve can be fitted to the pump Moreover the frequency converter may be fitted beside or underneath the pump See Fig 2 1 to 2 3 When fitting the accessories note the following E For fitting place the pump with the protection cap in place on its high vacuum flange E Fitting the water cooling The cooling coils may be turned in any position provided flanges and plugs are not in the way Unscrew the four screws carefully bend the cooling coils open somewhat and fit them to the pump Install the cooling coils in the uppermost and lowermost groove of the housing Retighten the four screws Retighten the screws several times T
39. eral pump to a single power supply The pump can continue to run as long as operation limits are only exceeded for a short time In case of longer exceeding send pump and frequency converter to the OLV Service The pump can continue to run Check the reason for wrong voltage and eliminate the fault Change parameter 12 Use USS protocol Connect bus as shown in Section 3 2 Connect as shown in Fig 2 19 Set address between O and 126 Balance the rotor Replace the bearing Inspect the measurement sensor Clean or replace the sensors Check for leaks Clean the pump Check the ultimate pressure of the forevacuum pump and install a higher capacity vacuum pump if necessary Check parameters Wait for pump standstill several minutes then switch off the power supply for 5 seconds and switch it on again Disconnect the DC supply or connect serial interface and stop via bus Check parameter 12 56 130000762_002_A0 09 2008 Oerlikon Leybold Vacuum Responsible Operator maintenance staff Maintenance staff Maintenance staff OLV service Operator OLV service Operator maintenance staff Operator Maintenance sta Operator Maintenance sta F Maintenance sta Maintenance sta Operator Maintenance sta F OLV service OLV service Operator Maintenance staff Maintenance staff Maintenance staff OLV service Operator maintenance
40. erature Fig 2 10 Dewpoint diagram 28 130000762 002 AO 09 2008 Oerlikon Leybold Vacuum Installation Cooling water inlet G1 8 threads or hose nozzle Cooling water outlet G1 8 threads or hose nozzle Fig 2 11 Pump with water cooling Cooling water specifications Feed temperature 15 35 C non condensing Feed pressure 3 to 7 bar absolute Cooling water requirement See Fig 2 9 Appearance colourless clear free of oils and greases Sediments lt 250 mg l Particle size lt 150 um pH value 7 to 8 5 Overall hardness total alkaline earths max 20 German hardness scale 3 57 mmol l Connecting the cooling water Screw on the cooling water lines Cooling water connection G 1 8 Adjust the cooling water temperature so that the formation of condensate is avoided When switching the cooling water supply on and off by means of an electric ally actuated valve connect the valve so that it will be switched on and off together with the pump 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum 29 Installation Clamping ring DN 16 KF Adapter M8 DN 10 16 KF cy a sil Ww oa p 1 0 bar absolute Purge gas and venting valve Connection gas side Fig 2 12 Connecting the purge gas and venting valve 30 2 7 Connecting the purge gas venting valve The pumps are equipped with a purge gas facility The purge gas and venting connection has been
41. essure gauges Normal operating mode is attained faster processes can be started faster 38 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum How to do it With Field Bus systems like RS485 or Profibus For example by a control computer Monitoring of E Motor current P5 W Ball bearing temperature P125 or P127 li Motor temperature P7 E Frequency converter temperature P1 1 Reading of error memories P171 P174 and P176 With P36 delay Monitor motor current P5 second function for Normal Operation relay relay switches as soon as the motor current threshold is tripped Adjust second function P29 Set motor current threshold P27 Reduce frequency threshold through P25 Interfaces 1 cig 1 4 and 6 9 are TxD 2 0 internally connec O17 ted and must not dd ols be used 4 o GND 5 o 9 Fig 3 1 Pin assignment for the socket at the frequency converter female SERVICE X5 1 4 and 6 9 are 2 ye 2 internally connected TxD T 6 RxD and must not be i used RxD 6 q TxD 3 5 01 6 GND 4 E A GND 3 TURBO DRIVE 4 7 Shield SERVICE X5 9 pin IBM PC RS 232 interface Fig 3 2 Providing a RS 232 connection 3 2 1 RS 232 C interface SERVICE X5 Standards DIN 66020 Protocol acc to VDI VDE 3689 Transmission rate 19200 baud Response delay default setting 10 ms parameter 180 Address range non adaressable Max cable length 5m Interface connector 9 way
42. essure protection Ambient temperature Magnetic field Radiation Places of installation 2 Installation 2 1 Conforming utilization The TURBOVAC SL 700 is a wide range turbomolecular pump designed to evacuate vacuum chambers down to pressure levels in the high vacuum range It is suitable for pumping air and clean gases The TURBO DRIVE 700 frequency converter and a forevacuum pump are required for its operation These pumps are not suitable for E pumping liquids or gases containing dust or particulates E pumping corrosive or reactive gases E pumping gas mixtures with an oxygen share of gt 21 96 E operation without a forevacuum pump f reactive gases in low concentrations must be pumped operate the pump with purge gas Install a micropore filter when pumping media which contains dust The pressure in the pump must not exceed 1 2 bar absolute The pump is only intended for use in a vacuum If overpressure may occur in the system you must install a protection device e g an overpressure safety valve 2 2 Operating environment The maximum permissible ambient temperature is 45 C 113 F Do not expose the pump or the frequency converter to dripping or spraying water If the pump is used within a magnetic field the magnetic induction at the sur face of the pump housing may not exceed B 5 mT if impinging radially and B 15 mT if impinging axially Install shielding equipment as appropriate if these values are exce
43. free air or filte red ambient air may be used filter mesh lt 1m Change the filters after some time at least annually 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum 37 Interfaces 3 2 Interfaces The frequency converter has a RS 232 interface as standard SERVICE X5 and is optionally equipped with serial interfaces B RS 485 B Profibus DP The TURBO DRIVE 700 is configured through the parameters according to the parameter list Pxxx denotes parameter value xxx The PC software TURBO DRIVE Server allows convenient access by the user to the parameters of the frequency converter Applications which can be implemented with the aid of the serial interface Application Networking of several pumps and other equipment Automation Avoidance or warnings before overload operation or process changes Troubleshooting Starting the pump with a delay if a Several consumers are connected to the same PSU Frequency converter as a simple pressure gauge since motor current is dependent on the vacuum conditions Lowering the normal operation threshold Benefits to the customer Savings relating to the costs for signalling cables Savings related to repetitive manual work E Maintenance can be scheduled E Improved reliability of sensitive production processes in a vacuum Quick analysis of problems Cost savings through smaller power supply units if peak loads can be reduced Dispensing with pr
44. gs The slower the pump is vented the longer the service life of the bearings will be The pump must not be vented to pressures above atmospheric pressure 50 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum Operation 108 mbar 102 Forevacuum pressure o e o 10 15 20 25 30 Time Fig 3 7 Maximum rise in pressure 3 6 Bakeout For TURBOVAOSs with CF flange If pressures in the range of 10 8 mbar or below are to be developed the vacuum chamber and the components installed therein will have to be baked out In addition the TURBOVAC can be baked out using the flange heater provided for this purpose Protect the rotor against intensive direct heat radiation The high vacuum flange must not be heated to more than 100 C 212 F When baking out at the forevacuum side at a sorption trap for example ensure that the com ponents attached direct are not heated to more than 100 C 212 F The forevacuum pump must be in operation so as to eliminate the vapors liberated at the sorption trap 3 7 Changing the start delay time Generally it will make sense to let the turbomolecular pump run up immedia tely after applying the start command However when operating two or more turbomolecular pumps off a single power supply unit it may make sense to start the pumps one after the other One way of achieving this is to enter a start delay time differing from O To set up the start del
45. haust connec tion If necessary use gloves a respirator and or protective clothing and work under an exhaust hood Contaminated parts can be detrimental to health and environment Before beginning to work find out whether any parts are contaminated Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts 130000762_002_A0 09 2008 Oerlikon Leybold Vacuum 5 Safety Information Caution Figures Failure to observe the following precautions could result in damage to the pump The pumps are not suitable for pumping aggressive or corrosive media or those which contain dust Install a micropore filter when pumping media which contain dust Observe the information on media compatibility in Section 3 1 of these operating instructions Be careful not to damage the sockets and coolant connections during transportation For the pumps with stainless steel housing self protection of the pump is not ensured in case of unsufficient cooling Make sure to avoid dripping water or humidity The water cooled pumps need cooling air for the frequency converter Ensure correct polarity when connecting the TURBO DRIVE A wrong polarity may cause an internal fuse to blow The fuse can only be changed by the Oerlikon Oerlikon Leybold Vacuum Service The interface connectors have UNC 4 40 threads Do not use connectors with M3 treads The pump may be operated only with suitabl
46. he expansion of the screws and the tubes as well as the frictional resistance at the housing must be compen sated Connect the two cooling coils using hose nozzles hose and hose clamps When doing so right and left in the figure may be selected freely The cooling water inlet is at the top and the outlet at the bottom 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum 19 Installation Frequency converter Sliding nuts i 4 cylinder head screws Qe ee Mounting panel 4 flat head screws Connection thread for the vibration sensor Closure screw for the purge gas connection Protection cap Fig 2 2 Mounting the frequency converter underneath the pump Wi The stop plate serves as a mounting aid With it the sliding nuts can be moved to their correct position W The attached parts may provided flanges and plugs are not in the way be fitted in 90 increments as required W When fitting as shown in the figures the 0 2 m long cable will do for the frequency converter When the power supply connector shall point in the other direction then the 0 4 m long cable will be needed
47. is carried out under the cleanest possible conditions Never touch the rotor Touching the rotor may cause injury and damage the rotor bearing The high vacuum flange must be solidly mounted to the vacuum cham ber If the mounting is not sturdy enough pump blockage could cause the pump to break loose internal pump Components could be thrown in all directions Never operate the pump in bench testing for example without proper flanging to the vacuum chamber If the pump should suddenly seize an ensuing deceleration torque of up to 1930 Nm will have to be absorbed by the system To accomplish this the following is required ISO K flange 10 steel clamps strength at least 8 8 torque 30 Nm CF flange stainless steel screws strength at least A2 70 torque 20 Nm 22 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum Installation Correct Wrong Fig 2 5 Installing the splinter guard In most applications the pump is flanged to the high vacuum flange at the apparatus The pump can be mounted and operated in any desired attitude No support is required If nonetheless an additional fastening is requested you can use the 4 boreholes in the pump s bottom If foreign objects could pass from the vacuum chamber into the pump Caution install a wire mesh splinter guard Foreign objects which enter the pump through the intake would cause serious damage to the rotor Damage resulting from foreign objects in th
48. ith TURBO DRIVE 700 and water cooling Pump with CF flange Operating speed Run up time Power consumption at run up at ultimate pressure Forevacuum connection Purge gas connection Type of protection Noise level with air cooling with water cooling Ambient temperature during operation storage see Fig 2 8 for cooling requirements Max rel air humidity Description SL 700 DN 160 ISO K DN 160 CF 690 Is 630 ls 580 Is 360 1 57 5 6 mbar s 4 6 mbar l s 2 0 mbar s 0 9 mbar l s 10 mbar 15 mbar 18 9 kg 14 8 kg 16 0 kg 15 1 kg 17 8 kg 48 000 min approx 5 min 270 W 60 W DN 25 KF M8 or DN 16 KF IP 20 47 dB A 44 dB A 10 45 C 15 60 C 5 to 85 96 non condensing 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum 9 Description Purge gas flow Purge gas Option water cooling Cooling water connections Cooling water data Option air cooling Power consumption Volume flow TURBO DRIVE 700 Nominal supply voltage Residual ripple Power consumption maximum at ultimate pressure Max DC current DC supply voltage Max length of the DC cable at 3 x 1 5 mm at 3 x 2 5 mm Load rating relay output Ambient temperature during operation at standstill Relative air humidity Overvoltage category Contamination grade Type of protection Weight approx 10 130000762_002_A0 09 2008 Oerlikon Leybold Vacuum 36 sccm 5 sccm 86 scc
49. jin 300400 China Sales and Service Phone 86 22 2697 0808 Fax 86 22 2697 4061 Fax 86 22 2697 2017 info vacuum tjQoerlikon com service vacuum tj oerlikon com Oerlikon Leybold Vacuum Tianjin International Trade Co Ltd Shanghai Branch Add No 33 76 Futedong San Rd Waigaoqiao FTZ Shanghai 200131 China Sales and Service Phone 86 21 5064 4666 Fax 86 21 5064 4668 info vacuum sh oerlikon com service vacuum tj oerlikon com Oerlikon Leybold Vacuum Tianjin International Trade Co Ltd Guangzhou Office and Service Center 1st F Main Building Science City Plaza No 111 Science Revenue Guangzhou Science City GZSC 510663 Guangzhou China Sales Phone 86 20 8723 7873 Phone 86 20 8723 7597 Fax 486 20 8723 7875 info vacuum gz oerlikon com service vacuum tj oerlikon com Oerlikon Leybold Vacuum Tianjin International Trade Co Ltd Beijing Branch 1 908 Beijing Landmark Towers 8 North Dongsanhuan Road Chaoyang District Beijing 100004 China Sales Phone 86 10 6590 7622 Fax 86 10 6590 7607 sales vacuum bj oerlikon com ndia Oerlikon Leybold Vacuum India Pvt Ltd EL 22 J Block IDC Bhosari Pune 411026 ndia Sales and Service Phone 91 20 3061 60000 Fax 91 20 2712 1571 sales vacuum pu oerlikon com service vacuum pu oerlikon com Japan Oerlikon Leybold Vacuum Japan Co Ltd Headquarter 23 8 Shin Yokohama 3 chome Tobu A K Bldg 4th Floor Kohoku ku
50. likon Leybold Vacuum 47 Operation mbar 10 Starting pressure 10 Sv Pumping speed of the forevacuum pump m h V Volume of the vacuum chamber m3 10 0 25 50 75 100 Sv V 125 Fig 3 6 Determining the starting pressure of a turbomolecular pump when evacuating large volumes 3 3 Switching on Switch on the 59 V DC power supply The yellow LED at the frequency con verter lights up Starting pressure The maximum starting pressure for the turbomolecular pump can be read from the graph in Fig 3 6 Switch on the turbomolecular pump at the frequency converter E via pins 7 and 8 of the socket REMOTE X1 see Fig 2 19 For example via a remote control or with the aid of the plug with integrated ON OFF Switch see Section 1 5 Accessories E by a start command via the interface see Section 3 2 E For the power supply units offered or recommended by Oerlikon Leybold Vacuum If the contacts 7 and 8 at the REMOTE X1 connector are closed the pump starts automatically when the DC voltage is switched on provided parameter 12 is set to O The turbomolecular pump accelerates The green LED flashes When the pump reaches normal operation the green LED lights up permanently Avoid the influences of shock and vibration when the pump is running Caution Exposure of the pump to accelerating forces must be avoided or reduced to such an extent that the rotor unit will not be excited by vib
51. m 0 6 mbar I s Nitrogen Argon or similar G 1 8 see Section 2 6 6 0 W 160 m h 59 V 296 480 W 150 W 8A 258V 60V 5m 20m 42V 0 5 A 10 45 C 15 60 C 5 to 85 non condensing II 2 IP 20 0 7 kg Description O oO D EL N D l Q E gt Oo 104 103 High vacuum pressure Fig 1 2 Pumping speed curves of the SL 700 Purge gas and venting valve Part No 800152V0012 800152V0040 Gas flow rate at 1 bar 0 6 mbar I s 86 sccm Solenoid valves 2 normally closed Mains supply 24 V DC 230 100 V AC Power consumption 4W 6W Connection to pump DN 10 KF Needed for this Adapter M8 DN10 16KF P N 800110V001 1 Including O ring 9 25 x 1 78 and Adapter centering ring DN 10 16 KF with sinter filter Gas connection G1 4 in Recommended for this Adapter with filter including O ring and gasket 800110V0012 Dimensions 60 x 65 x 45 mm 61x65 x 45 mm 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum 11 Description 203 Air cooler connection DN 160 ISO K 232 160CF 242 180 283 e 9 e CN a e e f S NEP 149 8s SE Fig 1 3 Dimensional drawings for SL 70
52. n ing media can enter the pump If a failure occurs the turbomolecular pump will be shut down automatically The red LED at the frequency converter lights up In the case of an emergency shut down the pump is switched off as Emergency shut down described above The rotor of the turbomolecular pump may be stopped faster by venting the pump Under vacuum conditions the pump may take up to one hour to run Warning down when venting to atmospheric pressure it may take up to one minute During the time the pump is running down the green LED at the frequency converter will flash indicating that the rotor has not yet arrived at standstill When shutting down by switching off the power supply voltage there will be only enough power for the LEDs down to a speed of the pump of approximately 200 Hz Thus the pump may still turn without a LED being on For this reason when switching off without venting wait for approxi mately 15 minutes after the LEDs have turned off until the pump has arrived at standstill 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum 49 Operation Warning Speed Pressure rise curve Particles Unplug any connectors only when the mains voltage is switched off and the pump does no longer turn the green LED is off 3 5 Venting Refer to Section 3 1 for suited gases Venting Methods There are three different methods of venting the turbomolecular pump In the case processes requiring a
53. n adapter with filter Including O ring and gasket Venting valve 24 V DC Power failure venting valve 24 V DC Spare filter 16 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum Part No 800100V0001 800093V0100 800093V0300 800093V0500 800093V 1000 800093V2000 800102V0002 800102V1002 800102V0003 152 48 800152V0012 800152V0040 800110V001 1 800110V0012 800120V001 1 800120V0021 200 18 517 o START NORMAL POWER ERROR TURBO CONTROL 700 o START STOP o o on off Part No PC software Turbo Drive Server for Windows 95 and higher CD ROM E Display change save and compare parameter lists W Integration of customer s software E Record parameter data 800110V0102 The software can also be downloaded from www oerlikon com in the menu Oerlikon Leybold Vacuum Documentation Download Software Adapter RS232 RS485 with world voltage power supply 800110V0101 GSD file for Profibus DP Can be downloaded from www oerlikon com in the menu Oerlikon Leybold Vacuum Documentation Download Software Splinter guard DN 160 ISO K 200 00 307 Splinter guard DN 160 CF 200 17 247 Flange heater DN 160 CF only for pumps with CF flange 230 V 854 37 110V 854 38 Description 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum 17 Installation Overpr
54. nge It is suitable for pumping air and clean gases The TURBO DRIVE 700 frequency converter and a forevacuum pump are required for its operation 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum 7 Description 1 1 Design The pumps comprise essentially the pump housing a multi stage rotor with the stator group and the drive The first section of the rotor is a turbomolecular pump rotor while the second tile represents a Holweck stage The Holweck pumping stage increases the permissible forevacuum pressure level markedly when compared with the classic turbomolecular pump Bearings The rotor shaft runs in two ceramic ball bearings lubricated with grease Motor The pump is driven by a split cage DC motor In this motor the rotor and stator windings are separated by a vacuum tight can Consequently the rotor runs inside the vacuum while the stator is outside the vacuum This eli minates any need of vacuum feedthroughs The pump is equipped with a temperature sensor and a resistor code Cooling Water cooling or an air cooling fan is available as optional equipment The intake flange should be fitted with a wire mesh splinter guard to protect the pump against mechanical damage caused by foreign objects Frequency converter The pump is driven by an electronic frequency converter TURBO DRIVE All functions like for example speed control pump sensing or temperature monitoring are monitored by the TURBO DRIVE This unit is powered
55. oad UK Chessington Surrey KT9 2QL Sales Phone 44 13 7273 7300 Fax 44 18 7273 7301 sales vacuum In oerlikon com Service Phone 44 20 8971 7030 Fax 44 20 8971 7003 service vacuum In oerlikon com Italy Oerlikon Leybold Vacuum Italia S p A 8 Via Trasimeno 1 20128 Milano Sales Phone 39 02 27 22 31 Fax 89 02 27 20 96 41 sales vacuum mi oerlikon com Service Phone 89 02 27 22 31 Fax 39 02 27 22 32 17 service vacuum mi oerlikon com Netherlands Oerlikon Leybold Vacuum Nederland B V Proostwetering 24N NL 3543 AE Utrecht Sales and Service Phone 31 30 242 6330 Fax 31 30 242 6331 sales vacuum ut oerlikon com service vacuum ut oerlikon com oo o 8 Oerlikon eo Leybold Vacuum USA Inc 5700 Mellon Road g USA Export PA 15632 5 Phone 1 724 327 5700 e Fax 1 724 325 8577 3 info vacuum ex oerlikon com Spain Oerlikon Leybold Vacuum Spain S A C Huelva 7 E 08940 Cornella de Llobregat Barcelona Sales Phone 34 93 666 46 16 Fax 434 93 666 43 70 sales vacuum ba oerlikon com Service Phone 34 93 666 49 51 Fax 34 93 685 40 10 service vacuum ba oerlikon com Sweden Oerlikon Leybold Vacuum Scandinavia AB Box 9084 SE 40092 Goteborg Sales and Service Phone 46 31 68 84 70 Fax 46 31 68 39 39 info vacuum gtGoerlikon com Visiting delivery address Datav gen 57B SE 43632 Askim Switzerland Oerlikon Leybold Vacuum Schweiz AG
56. ollow the installation instructions as given in this manual After a mains power failure the pump can run up automatically once more 4 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum Safety Information Electrical hazards The pump must only be connected to power supplies which meet the requirements for functional extra low voltages with positive isolation in accordance with IEC 364 or local regulations SELV The OEM power supply unit must only be connected by qualified electrical personnel Unplug any connectors only when the mains voltage is switched off and the pump does no longer turn the green LED is off When the connector cable is attached the outputs at the frequency con verter are not free of voltage Qualified personnel Qualified electrical personnel in this instruction manual means a person who has received electrical engineering instruction or is an electrical expert in accordance with EN 60204 Part 1 3 30 respectivly 3 55 Thermal hazards During operation the pump can become so hot that there is a danger of burns 2 70 C 158 F Provide protection against contact with the hot components Hazards caused by materials and substances The forevacuum line must be tight Hazardous gases can escape at leaks or the gases being pumped can react with air or humidity If the pump has previously handled hazardous gases implement the pro per precautionary measures before opening the intake or ex
57. onents contaminated by microbiological explosive or radioactive products substances will not be accepted D Legally binding declaration we hereby declare that the information supplied on this form is accurate and sufficient to judge any contamination level Name of authorised person block letters Date Signatur of authorised person 17200001 002 00 Oerlikon Leybold Vacuum firm stamp 60 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum Index A Adapter 8 11 16 17 21 30 Adsorption trap 25 31 53 Air cooler 7 9 12 14 21 32 42 Air cooling 8 10 19 21 26 27 Ambient temperature 9 10 18 26 28 34 55 Anti suckback valve 25 49 B Bakeout 51 Bearing change 61 Cc Contamination 10 53 57 60 Cooling 6 10 14 19 21 22 26 29 32 34 35 55 Cooling water 10 19 22 28 29 D Danger of burns 5 24 49 Danger of ignition 37 Deposits 37 52 Desiccant 8 24 52 Dimensional drawings 12 13 Dripping or spraying water 18 Dust 6 18 23 37 50 53 E Emergency shut down 34 49 F Forevacuum connection 9 22 23 25 Forevacuum pressure 8 9 25 27 51 54 55 Forevacuum pump 7 18 25 31 48 49 51 55 56 Fuse 6 33 G Generator 45 49 H Hazardous gases 5 25 52 Heat sink 34 High vacuum flange 4 14 22 24 Holweck stage 8 Humidity 5 6 9 10 25 28 37 l Interface 6 14 35 38 49 54 56 L LED 5 6 31 35 36 40 41 48
58. otection device e g an overpressure safety valve Danger of explosion The standard version of the equipment is not suited for operation in explosion hazard areas Contact us before planning to use the pump under such circumstances The high vacuum flange must be firmly mounted to the vacuum chamber If the mounting is not sturdy enough pump blockage could cause the pump to break loose internal pump components could be thrown in all directions Never operate the pump in bench testing for example with out proper flanging to the vacuum chamber The rotor has to be changed after 50 000 hours of operation or after 10 000 starts stops or cycles at the latest Due to high speed and tem perature the service life of the rotor is limited If the rotor is changed too late it may be destroyed Thus in the flange mounts high forces and torque conditions can occur The mounting screws for the pump may be torn off or sudden twisting of the entire pump can be experienced Turbopumps as described in the following operation manual contain a high portion of kinetic energy due to their high rotational speed in combi nation with the specific rotor mass In case of a malfunction of the System for example rotor stator contact or even a rotor crash the rotatio nal energy is released To avoid the destruction of the equipment and to prevent injuries of the operating staff the leading European manufacturers of vacuum pumps strictly recommend to f
59. p system 2 8 Electrical connection The TURBO DRIVE 700 frequency converter needed to operate the TURBO VAC SL 700 has either been integrated in the pump or is a separate unit For connection examples see Fig 2 14 and 2 15 The pump may be operated only with a suitable frequency converter and Warning suitable connector cables Route all cables so as to protect them from damage Do not expose the pump the frequency converter or the connections to water Disconnect and connect the cable connections only while the pump is Caution turning no longer green status LED off and with the mains power switched off yellow power LED off Otherwise there is the risk of damaging the TURBO DRIVE 2 8 1 Connecting pump and frequency converter Connect the pump to the frequency converter using a suitable connecting cable Make sure that the frequency converter is adequately cooled for this see Section 2 8 3 and also Fig 2 17 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum 31 Installation TURBOVAC with integrated frequency converter TURBO DRIVE 700 with air cooler Mains Power supply DC cable a max 20m TURBOVAC with integrated frequency converter TURBO DRIVE 700 without forced cooling Mains Power supply DC cable max 20m TURBOVAC without integrated frequency converter without forced cooling Frequency converter TURBO DRIVE 700 Mains Power supply DC cable with shielding
60. purge gas the pump must be vented via the purge gas and venting valve when shutting the pump down When additionally venting the vacuum chamber the venting function of the purge gas and venting valve must be opened before opening the chamber valve This will ensure the presence of a higher pressure in the area of the ball bearings compared to the remaining vacuum area This will prevent particles dust or aggressive gases from being forced through the bearings into the not yet vented motor chamber of the pump Cautious venting of the pump is possible from the high vacuum side since here the bearing forces will be lowest When doing so no free jet of gas must be allowed to form on the rotor so as to avoid exposing the rotor to additio nal forces When venting the pump through its foreline connection neither oil nor par ticles may be entrained in the gas flow from the forevacuum side into the pump Speed of the Pressure Rise All turbomolecular pumps may be vented at full speed However the pres sure must not increase faster than specified through the pressure rise curve The pump must be vented significantly slower when there is the risk of par ticles entering into the pump from the process During venting the flow must be of the laminar type in both the vacuum chamber and the turbomolecular pump The speed of the pressure rise during venting of the running pump will greatly influence the load on the rotor stator pack and the bearin
61. rations In the case of critical applications you must consult our Applications Dept first 48 130000762 002 AO 09 2008 Oerlikon Leybold Vacuum Operation During operation the pump can become so hot that there is a danger of burns up to approx 80 C 176 F Warning After a mains power failure the pump can run up automatically once more 3 4 Shutting down Switch off the pump at the frequency converter Wi via contacts 7 and 8 of the socket REMOTE X1 if parameter 12 0 E apply a stop command via the interface if parameter 12 1 or 2 Wi for the power supply units offered or recommended by Oerlikon Leybold Vacuum switch off the DC voltage After switching off the green status LED will flash until the rotor of the turbo molecular pump is at standstill This may take several minutes With the DC power supply off the turbomolecular pump will act as a generator supplying Generator operation the frequency converter with energy as indicated by the yellow power LED Switch off the forevacuum pump When using oil sealed forevacuum pumps vent the turbomolecular pump Venting before it comes to a stop refer to Section 3 5 When using TRIVAC pumps the built in anti suckback valve will close auto matically shutting off the forevacuum line In forevacuum pumps without a vacuum retention valve close the valve in the forevacuum line When the system is not operating ensure that neither ambient air nor clea
62. ries e g connector lines and when powering the pump with the specified frequency converters the protection level prescribed in the EMC Guidelines will be attained Designation of the products Turbomolecular pump with integrated or external frequency converter Model TURBOVAC SL 700 Part Nos 800051V3xxx Related harmonized standards WH EN 1012 2 1996 Compressors and vacuum pumps Safety requirements Part 2 Vacuum pumps Cologne 0 COS Cologne 45 Y oF Harald Udelhoven Head of Quality Management Dr Ulrich Jung Vice President Head of Product Develobment Oerlikon Leybold Vacuum GmbH Bonner Strasse 498 D 50968 Cologne Phone 49 221 347 0 Fax 49 221 347 1250 documentation vacuum oerlikon com 58 130000762 002 AO 09 2008 Oerlikon Leybold Vacuum cerlikon leybold vacuum C C EC Conformance Declaration We the Oerlikon Leybold Vacuum GmbH declare herewith that the products listed below in the embodiment which we have placed on the market comply with the applicable EC guidelines This declaration becomes invalid if modifications are made to the product without consultation with us Maintaining the EMC guideline assumes an EMC adapted installation of component within the plant or machine Designation of the products Turbomolecular pump with integrated or external frequency converter Model TURBOVAC SL 700 Part Nos 800051V3xxx The products comply to the following guidelines B ECLow Voltage Eq
63. se clamps 1 hose 10x3 up to 12 bar Air cooler 800136V0003 is powered by the pump 14 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum Description POWER ERROR 6 U RBO DRIVE D 90000 90090 oooo o e 0000 SERVICE X5 REMOTE X1 HEATSINK E HEATSINK 4 100 120 5 1 z i Ll Fig 1 5 Dimensional drawing for the frequency converter dimensions in mm 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum 15 Description Power supply and control unit TURBO CONTROL 700 E supplies the TURBO DRIVE 700 with 59 V DC WB plug amp play cables W desktop unit or rack mountable W with power switch W with start stop switch for the turbomolecular pump W remote control W status LEDs and status relays 59 V DC control cable TURBO DRIVE 700 TURBO CONTROL 700 1 m long 3 m long 5 m long 10 m long 20 m long Mains cable for TURBO CONTROL 700 3 m long with EURO plug with US plug 6 15P with UK plug Mechanical accessories Plug for connector REMOTE with integrated ON OFF switch for the pump Sub D plug 9 way Purge gas and venting valve 0 6 mbar l s at 1 bar 24 V DC 230 100 V AC DN 10 KF G Pump connection Adapter M8 DN 16 KF incl O ring 9 25 x 1 78 and Adapter centering ring DN 10 16 KF with sinter filter Gas side connection G1 4 i
64. th In addition deposits with similarly dangerous properties may have formed Many of these gases and deposits form acids when they come into contact with humid air This will result in serious corro sion damage to the pump To avoid health hazards and corrosion damage when the pumps are detached from the system fasten a container of desiccant under the trans port cover of the high vacuum connection and then close the pump imme diately at all flange connections Store the pump with a desiccant in an air tight PE bag Corrosion damage due to faulty packing will nullify the guarantee Pack the pump so that it cannot be damaged during shipping and storage Pay particular attention to protection for the flanges and the electrical plug Observe the instructions in Section 4 2 if you forward the pump to Oerlikon Leybold Vacuum 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum 4 Maintenance After 20 000 operating hours at the latest a standard bearing exchange will be required This can only be done by Oerlikon Leybold Vacuum Service The rotor has to be changed at the latest W after 50 000 hours of operation or Wi after 10 000 starts stops or cycles This can only be done by Oerlikon Leybold Vacuum Service Due to high speed and temperature the service life of the rotor is limited If the rotor is changed too late it may be destroyed Thus in the flange mounts high forces and torque conditions can occur The mounting
65. the normal operation level Normal operation if P3 gt P24 x P25 If P29 1 Defines the normal operation level Normal operation if P5 lt P27 Interfaces Designation Range Unit Default Format r w Description Selection of the relay 0 4 0 U16 rw The normal operation and error relays functions can be set to special functions if required P29 0 means the normal operation relay is active when the normal operation frequency is exceeded P3 2 P24 P25 the error relay is active in case of an error P29 z 1 means the normal operation relay is active when the current falls below the normal operation threshold P5 lt P27 the error relay is active in case of an error P29 2 means the normal operation relay controls e g a venting valve activated via the field bus interface Bit 12 in the control word of the data transfer protocol the error relay controls e g a purge gas valve activated via the field bus interface Bit 11 in the control word of the data transfer protocol makes only sense at interface operation P29 3 means the normal operation relay is active when the normal operation frequency is exceeded P3 gt P24 P25 the error relay is active when no error exists P29 4 means the normal operation relay is active when the current drops below the normal operation threshold P5 lt P27 the error relay is active when no error exists 32 36 37 38 40 90 125 126 127 132
66. there is a danger of burns up to approx 80 C 176 F Provide protection against contact with the hot components Design with ISO K clamp flange Lay the O ring on the centering ring The O ring must be positioned so as to be smooth and flat it must not be twisted Then position the outer ring A collar flange with circlip and the appropriate gasket may be used to connect the pump A collar flange is required when using ultra vacuum sealing gaskets The order numbers for the flange components are given in the Oerlikon Leybold Vacuum Catalog 24 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum 2 5 Forevacuum connection The high vacuum pressure level which can be achieved is a function of the volume of gas flow Q to be pumped and the forevacuum pressure We recommend using the dry running SCROLLVAC SC 15 or SC 30 pumps or TRIVAC rotary vane pump for this purpose Connect the clean forevacuum line The connecting flanges must be clean an undamaged The cross section of this line must be so wide that safe opera tion of the pump can be ensured The forevacuum line must be tight Hazardous gases can escape at leaks or the gases being pumped can react with air or humidity Fig 2 13 is a schematic diagram of a pump system incorporating a turbo molecular pump and a TRIVAC forevacuum pump with an anti suckback valve A separate safety valve must be provided for oil sealed forevacuum pumps without an anti suckback valve
67. uipment Guidelines 2006 95 EG EC Directive on Electromagnetic Compatibility 2004 108 EG Related harmonized standards M EN 61010 1 2001 Safety requirements for electrical equipment for measurement control and laboratory use Part 1 General requirements M EN 61326 1 2006 Electrical equipment for measurement control and laboratory use EMC requirements Cologne Cologne A 068 gi Dr Ulrich Jung Vice President Head of Product Development Harald Udelhoven Head of Quality Management Oerlikon Leybold Vacuum GmbH Bonner Strasse 498 D 50968 Cologne Phone 49 221 347 0 Fax 49 221 347 1250 documentation vacuum oerlikon com 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum 59 cerlikon leybold vacuum Declaration of Contamination of Compressors Vacuum Pumps and Components The repair and or servicing of compressors vacuum pumps and components will be carried out only if a correctly completed declaration has been sub mitted Non completion will result in delay The manufacturer can refuse to accept any equipment without a declaration A separate declaration has to be completed for each single component This declaration may be completed and signed only by authorised and qualified staff Customer Dep Institute Address Person to contact Phone Fax End user Reason for return applicable please mark C Repair D chargeable D warranty L Exchange DO chargeable DO warranty
68. urbomolecular pump does not start ERROR LED does not light Turbomolecular pump pro duces loud running noises and vibrations Turbomolecular pump does not reach ultimate pressure Green LED blinks yellow LED lights up weakly Running pump can not be stopped via X1 Possible cause No DC power DC power miswired Frequency converter defective Warning message See Section 3 2 5 Warning codes for the possible reasons of the warning Warning message Supply voltage too low or too high Operation mode set wrongly e g with TURBO DRIVE Server Interface protocol error No communication via the serial interface REMOTE connector X1 connected wrongly Wrong Profibus address set Rotor out of balance Bearing defective Measurement instrument defective Measurement sensors soiled Leaks at the equipment lines or the pump Pump soiled Forevacuum pump provides insufficient pumping speed or ultimate pressure which is too high Frequency parameters programmed wrongly Frequency converter defective Pump has been started via theserial interface the interface controls the pump Corrective action Check cables and power supply Ensure correct polarity of the DC cable Replace frequency converter The following may damage the frequency converter Disconnection of the DC cable while the pump was still rotating E Non compliance with the note related to connecting sev
69. y maintenance staff 54 130000762 002 A0 09 2008 Oerlikon Leybold Vacuum Malfunction Red ERROR LED is on Error code1 Overspeed error Red ERROR LED is on Error code 2 6 pass through timer error and run up time error W Pump runs up too slowly W Pump looses its speed Red ERROR LED is on Error code 3 7 bearing temperature error and motor temperature error Red ERROR LED is on Error code 4 Short circuit error Red ERROR LED is on Error code 5 converter tem perature error Red ERROR LED is on Error code 8 pump error TURBO DRIVE can not detect the type of connec ted pump Possible cause EMC influence TURBO DRIVE faulty Forevacuum or high vacuum pressure too high Gas volume too great Power supply overloaded Bearing defective Forevacuum pressure too high Gas volume too great or leak in the system Fan defective Ambient temperature too high Bearing defective Short circuit in the pump s motor Short circuit in the connecting cable Inadequate cooling of the pump operation at too high loads Ambient temperatures too high Inadequate cooling of the TURBO DRIVE Pump not connected to TURBO DRIVE Power supply builds up the DC too slowly Power supply overloaded Troubleshooting Corrective action Check connecting cable insert it properly Switch the power supply voltage off and then on again Replace frequency converter Check the foreva

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