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User Manual PZ115E - Physik Instrumente

1. Piezo Nano Positioning PI GS Troubleshooting www pi ws Stage does not move Cable not connected properly gt Check the connecting cable s Stage or stage cable is defective gt If a working stage of the same type is available exchange the defective stage to test a new combination of E 621 and stage Since stage and E 621 always form a calibrated system the performance with the new stage will probably be lower than with the original stage If the new stage is to be used permanently and in normal operation a new calibration is required See Calibration on p 24 for details Incorrect control mode of the piezo channel gt The applicable control sources for the axis motion depend on the current control mode analog or computer controlled mode see Control Modes on p 18 for details In analog mode move commands received via interface or from a running macro trigger input and wave table output are ignored and may provoke an error message In computer controlled mode the axis motion can be commanded by move commands received via interface or from a running macro by trigger input and wave table output Respect the prioritization of the individual sources see the User Manual of the E 816 computer interface submodule for details Check the DIP switch setting on the front panel for the current control mode Front Panel Elements p 15 No control signal applied or signal out of range gt In ana
2. EN 61010 1 April 09 2009 Karlsruhe Germany eaer f i Dr Kari Spanner President Physik Instrumente PI GmbH amp Co KG Aut der ROmersir 1 76225 Karisruhe Germany Moving the NanoWorid WWD Phone 40 721 4840 0 Fax 49 721 48 46 200 E mail info piws I Physik Instrumente PI GmbH amp Co KG is the owner of the following company names and trademarks PI PIC PICMA PILine PIFOC PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation The following designations are protected company names or registered trademarks of third parties Microsoft Windows LabView The products described in this manual are in part protected by the following patents US Patent No 6 950 050 Copyright 1999 2009 by Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual enjoy copyright protection With regard thereto Physik Instrumente PI GmbH amp Co KG reserves all rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source First printing 2009 04 20 Document Number PZ115E Eco BRo Release 2 2 0 E 621UserPZ115E220 doc Subject to change without notice This manual is superseded by any new release The newest release is available for download at www pi ws http www pi ws About This Document Users of This Manual This manual is designed to help the reader to install and operate the E 621 LVPZT Co
3. For a thermally stable system switch on the E 621 at least one hour before you start working with it CAUTION If the piezo stage starts oscillating humming noise In closed loop operation switch off the servo immediately The load and or the dynamics of operation probably differ too much from the setup for which the system was calibrated In open loop operation stop the motion immediately Do not operate the piezo stage at its resonant frequency even though the notch filter by default is also active in open loop operation Otherwise the piezo stage could be irreparable damaged www pi ws E 621 PZ115E Release 2 2 0 Page 7 Introduction Piezo Nano Positioning PI 1 4 Unpacking According to your order the E 621 LVPZT Controller Amplifier Module comes separately or installed in an E 500 621 or E 501 621 chassis Unpack the system with care Compare the contents against the items covered by the contract and against the packing list The following items should be included with an E 621 unit m RS 232 null modem cable for PC connection C 815 34 m USB cable USB A m USB Mini B m for PC connection 000014651 R SMB BNC adapter cables E 692 SMB 1 5 m two units R 32 pin multipoint socket connector DIN 416123 for installing the E 621 module in custom electronics 588 m User Manual for E 621 PZ115E this document m User Manual for E 816 Computer Interface and Command Interpreter Submodule PZ116E
4. 3 3 Linear Variable Differential Transformer LVDT Sensor Wiring www pi ws Sensors working on the principle of LVDTs usually have a coil with a primary winding two secondary windings and a moving core If an AC current is applied to the primary winding it produces a magnetic field which is concentrated by the soft iron or ferrite core The magnetic field then passes through the two secondary windings and induces a voltage in each If the core is moved from the central position one secondary winding receives more magnetic flux than the other and the induced voltages are different proportional to the motion LVDT transducers normally operate at 3 to 5 Vrms at frequencies between 1 and 20 kHz and have a typical current consumption E 621 PZ115E Release 2 2 0 Page 48 Piezo Nano Positioning PI Technical Data between 10 and 50 mA The output signal from an LVDT can be expressed as a sensitivity in mV output voltage per volt of supply voltage and per millimeter displacement Typical LVDT output sensitivity is in the range of about 100 to 250 mV Vemm depending on the type LVDTs have to be used in conjunction with E 621 LR versions which are equipped with the E 801 2x AC sensor submodules Schirm shield rot red braun brown LEMO connector FFA 0S 304 Buchse Ansicht L tseite Solder side view blau blue gelb yellow P T Fig 12 LVDT wiring diagram ee
5. 32 52 Components and Adjustment Elemente cece 33 eE IIE ale CTT 34 522 SWICHES 22 bocce R TE marae spe et adi peas 35 523 Potentiometers esse eee ee eee 35 5 3 E 801 Sensor Processing Submodule sss eee eee 36 54 E 802 Position Servo Control Board sese 36 Troubleshooting 38 Contents Customer Service Old Equipment Disposal Technical Data 9 1 Specifications T 92 Frequency Response Diagram eee eee 93 CPIM TT Ta T 9 3 1 32 Pin Main Connector TTT 932 Strain Gauge Sensor Wiring eee eee eee ee 933 Linear Variable Differential Transformer LVDT Sensor Uo sl mena ticle toes ETE soba tas beret AA am tates ta 42 43 Introduction Piezo Nano Positioning PI 1 Introduction 1 1 Model Survey The E 621 amplifier controller is designed as a EURO board plug in module which can be mounted in a 9 5 desktop chassis E 501 621 or a 19 rack chassis E 500 621 The E 621 amplifier controller is designed to drive and control the displacement of a low voltage piezoelectric stage or actuator LVPZT The following models are described in this manual each supporting a different position sensor type E 621 LR LVPZT controller provides AC sensor processing for usage with LVDT sensors equipped with E 801 2x sensor submodule E 621 SR LVPZT controller provides DC sensor processing for usage with strain gauge sensors SGS equipped with 801 1x sensor submodule Both models come with an E 802 Servo Cont
6. 48 Depending on the E 621 model you have the submodule for either DC or AC sensor excitation is installed m The E 621 LR provides AC sensor processing it is equipped with the E 801 2x submodule and is primarily for LVDT sensors m The E 621 SR provides DC sensor processing it is equipped with the 801 1x submodule and is for SGS sensors The output from the sensor processing submodule is an analog signal that is directly proportional to the piezo s expansion and is available at SENSOR MONITOR on the front panel See the E 801 Sensor Processing Submodule section starting on p 36 for more details on the sensor submodules As seen in the block diagrams the sensor signal goes through the E 801sensor readout electronics and then branches to the E 816 computer interface submodule and the E 802 servo control submodule Since the servo control and computer interface submodules see copies of the sensor signal it is important that the zero point and gain in the sensor circuitry be properly adjusted The zero point is especially likely to need correction There are offset zero point and range adjustment potentiometers on the E 801 sensor submodule In addition to the adjustments on the analog side there are digital offset and range corrections on the E 816 computer interface submodule The A D converter on the E 816 is always precalibrated and its offset and gain values stored in EPROM are not customer modifiable
7. 60 Hz 450 x 132 x 296 mm handles E 621 PZ115E Release 2 2 0 E 501 621 100 to 240 VAC 50 60 Hz 236 x 132 x 296 mm handles Page 45 Positioning P I Nano Piezo Technical Data 9 2 Frequency Response Diagram 0 1 H Ses Sere rere TT P E E de dabe TT t t U 1 U 1 U U KKK KK NK KKK KK Ke KK NK KKK KK K K KN KK i pees 999 2 H H dees U t U 1 1 1 1 U KKK KK NK KKK KK Ke KK NK KKK KK K K KN KK l 1 U U K aK KN Kk A epnujdwy U U U i o N i i g N 3 o 3 2 C NMOus piezo th va loads Values shown are capacitance in uF E 621 open loop frequency response wi Fig 10 Page 46 E 621 PZ115E Release 2 2 0 www pl ws Piezo Nano Positioning PI Technical Data 9 3 Pin Assignments 9 3 1 32 Pin Main Connector Because the DIN 41612 connector standard includes types with more pins the 32 pins of the D version all carry even number designations and are in rows a and c pin Function Pin Function aana 2e PZT output aar ap 40 PzTGND I _60 RS 202CTS CS sa intemaluse se RS232Rx 10a RS 232 TX 10c Analog input trigger input use depends on the settings of DIP switches 1 and 4 Pot 10 kOhm Pot wiper 10 V 10 kOhm Pot 10 kOhm GND also GND Test GND 16a VCC supply 166 VCC supply 18a VCC supply 18c VCC supply 20a internal use 2
8. Electronic subassemblies must always be kept and transported shipped in conductive packaging Make sure that no conductive particles of any kind metallic dust or shavings broken pencil leads loose screws contact the device circuitry Before operation is possible the E 621 must be installed in a suitable chassis Required input and output lines must be connected via the 32 pin main connector To do this you can use the included multipoint socket connector 588 For pinout see 32 Pin Main Connector on p 47 E 621 PZ115E Release 2 2 0 Page 10 Quick Start www pi ws Piezo Nano Positioning PI CAUTION E 621 is only compatible with E 50x 621 chassis but incompatible with other chassis of Pl s E 500 series NOTE All front panel connections except of the USB lines are duplicated on the 32 pin main connector For a custom or OEM installation consider the following Networked units must have the C networking lines connected to each E 621 in parallel pins 32a and 32c The network bus lines are limited to a maximum length of 1 mand a maximum capacitance of 400 pF See Networking on I C Bus on p 22 for details Each unit requires sufficient power A DC DC converter is installed on the main board of the E 621 module with an input voltage range of 12 to 30 VDC recommended supply 15 V This converter generates 25 and 125 V for the power amplifier and 15 V for the sensor and servo controller When p
9. PCB traces Discharge any static electricity you may have on your body by briefly touching a conductive grounded object before you touch any electronic assembly Pose PCBs only on conductive surfaces such as ESD safe transport containers envelopes foam Electronic subassemblies must always be kept and transported shipped in conductive packaging Make sure that no conductive particles of any kind metallic dust or shavings broken pencil leads loose screws contact the device circuitry Only the DIP switch block S1 and the Zero potentiometer are accessible without removing the E 621 from the chassis NOTE All front panel connections except of the USB lines are duplicated on the 32 pin main connector So you can use that pins instead of the front panel connections See pinout on p 47 for details 4 1 Sensor Connection and Adjustment www pi ws If you inform PI about your application your E 621s will be fully calibrated before being shipped It is usually not necessary for you to do anything more than adjust the zero point before operating the system E 621 PZ115E Release 2 2 0 Page 24 Calibration www pi ws Piezo Nano Positioning PI CAUTION Calibration should only be done after consultation with PI otherwise the internal configuration data may be destroyed by erroneous operation Position sensors are connected to the SENSOR socket on the E 621 front panel see the wiring diagrams on p 48 and p
10. m User Manual for E 802 Servo Control Submodule PZ150E m User Manual for E 801 Sensor Excitation and Readout Submodule PZ117E m CD for E 816 interface devices with software and documentation E 816 CD Inspect the contents for signs of damage If parts are missing or you notice signs of damage contact PI immediately Save all packing materials in the event the product needs to be shipped elsewhere www pi ws E 621 PZ115E Release 2 2 0 Page 8 Quick Start Piezo Nano Positioning PI e Quick Start 2 1 Line Power and Fuses This section is only relevant if the E 621 comes installed in an E 500 621 or E 501 621 chassis provided by PI The power connection and the line fuses are located on the rear panel of the E 500 621 or E 501 621 chassis The chassis is equipped with a wide range power supply and with fuses that are admissible for both 115 V and 230 V operation No settings need be changed when connecting the system to a different supply voltage The orientation of the fuse carrier is irrelevant Connect the AC power cord of the E 500 621 or E 501 621 chassis in which the E 621 is installed to the wall socket 100 to 240 VAC To disconnect the system from the supply voltage completely remove the power plug from the wall socket or remove the power cord from the chassis Install the system near the AC outlet and such that the AC power plug can be reached easily Before you open the door of the fuse carrier
11. the axis identifier E 621 PZ115E Release 2 2 0 Analog Mode Remove E 621 from the chassis and connect via P 895 00 extension connector qualified authorized personal only sw1 ON sw2 OFF sw 4 OFF Set DIP switch 3 OFF Make sure that servo is not set on with pin 28a or SVO command Apply an analog signal in the range of 0 10 V to ANALOG INPUT DC offset must be 0 or OFF J3 2 3 Put 0 V on ANALOG INPUT Read the value at the SENSOR MONITOR SMB socket on the front panel with a voltmeter If necessary adjust the zero point as described in Section 4 1 1 Increase analog input voltage slowly Page 28 Piezo Nano Positioning PI Calibration 9 Adjust sensor Adjust the sensor gain on the sensor submodule E 801xx until the gain value at the SENSOR MONITOR SMB socket on the front panel is 10 V See the User Manual of the E 801 Sensor Processing Submodule for component designation and location 10 Recheck It may be necessary to repeat the last steps until stable readings are obtained 4 1 3 Servo Control Static Gain Calibration The object of servo control static gain adjustment is to assure that the piezo moves to the nominal travel range end position when that position is commanded in servo on mode in analog mode 10 V control input You will need an external measuring device and a 32 pin extension adapter to access the potentiometers mentioned while the unit is in operation P 895
12. www pi ws E 621 PZ115E Release 2 2 0 Page 49
13. 00 not included Since the servo controller uses the sensor signal as a basis the analog sensor zero point and open loop range should be adjusted before the static servo gain is set This procedure can be carried out with the unit in either computer controlled or analog mode If done in analog mode you will also need a highly accurate voltage source and meter Procedures which require removing the E 621 module from the chassis should be carried out by authorized qualified personnel only Disconnect the chassis from power when removing modules and when resetting internal switches or jumpers When a module removed from the chassis must be operated use a 32 pin extension connector P 895 00 not included Voltages of up to 120 V can be exposed Do not touch internal conductors www pi ws E 621 PZ115E Release 2 2 0 Page 29 Calibration CLOSED LOOP SERVO STATIC GAIN f Make adjustment elements accessible Set DIP switches on the front panel for operating mode Power up Set servo ON Check for oscillation Set external gauge to 0 Command a position equal to the end of the nominal travel range Adjust sensor monitor output Adjust piezo expansion Piezo Nano Computer Controlled Mode Remove E 621 from the chassis and connect via P 895 00 extension connector qualified authorized personal only sw1 OFF sw2 ON sw 4 ON connect RS 232 or USB cable to this unit After power on e
14. 0c LVDT Sync In 200 kHz Monitor sensor GND for Sensor Test Analog In 24a Internal use 24c Sensor excitation Overflow Sensor inverting input TTL active low Servo ON OFF Sensor non inverting input select 30a GND for RS 232 30c GND for sensor excitation 32a IC SCL signal 32c IC SDA signal 0 V LOW 5 V HIGH Active LOW LOW servo ON default is HIGH Servo is on if pin 28a is connected to pin 14a or 14c GND In this case switching to open loop operation servo OFF is neither possible with DIP switch 3 on the front panel nor with the SVO command via the E 816 computer interface submodule If E 621s are networked outside a single E 50x 621 chassis the SCL and SDA bus lines are limited to a maximum length of 1 m and a maximum capacitance of 400 pF Pins 14a and 14c should be connected to a protective ground www pi ws E 621 PZ115E Release 2 2 0 Page 47 Technical Data Piezo Nano Positioning PI 9 3 2 Strain Gauge Sensor Wiring STRAIN GAUGE CONFIGURATION FOR AUGE CONFIGURATION FOR P 821 20 P 041 40 P B41 60 i 5 226 00 P A41 30 P 843 40 P 843 66 P 843 30 P 845 20 P 845 60 P 845 40 Z xateoin gouge an PZT stack 2 xstroin gauge an PZT stack 2 x resister in PZ t mausing resistar n caniraller beard STRAIN GAUGE CONFIGURATION FOR 2 xstroin gauge an PZT stack 2 x resister in PZT nausing Fig 11 Pin configurations and wiring for various different stages 9
15. 21 front panel E 621 PZ115E Release 2 2 0 Page 18 Piezo Nano Positioning PI Operation Analog mode Activated with the following settings ON position is on the left 1 ON 2 OFF 4 OFF The output voltage depends on the input voltage applied to the ANALOG INPUT SMB socket of the E 621 Control input from the E 816 computer interface submodule is ignored i e move commands received via computer interface or from a running macro trigger input or wave table output The nominal input voltage range is 0 to 10 V for a 0 to 100 V output voltage swing For some applications where the full expansion capability of the piezo translators is needed the full output voltage range of 20 to 120 V can be used The equivalent input voltage range is then 2 to 12 V For maximum piezo lifetime excursions above 100 V and below 10 V should be kept as short and as infrequent as possible The analog control input can be a computer generated analog signal e g from a DAQ board You can use the PI LabVIEW Analog Driver set provided on the E 816 CD to generate that analog signal This driver set also includes the Hyperbit drivers which make possible position resolution higher than that of the DAQ board used New releases of the LabVIEW Analog Driver set are available from the download area at www pi ws See the E500T0011 Technical Note and the manual of the LabVIEW Analog Driver set provided on the E 816 CD for instruction
16. For details regarding networking e g channel name settings see the User Manual of the E 816 computer interface module E 621 PZ115E Release 2 2 0 Page 22 Piezo Nano Positioning PI Operation 3 4 User Electronics and Sensor Monitor Signal If you are connecting your own electronics to the sensor monitor signal make sure it has sufficient input capacitance to eliminate high frequency interference It may be necessary to add a 4 7 nF ceramic NPO or COC type to the input connector Use shielded cable if possible otherwise make sure the lead pair is tightly twisted User Electronics Sensor Monitor Output Fig 4 Electronics on Sensor Monitor line with required input capacitance www pi ws E 621 PZ115E Release 2 2 0 Page 23 Calibration Piezo Nano Positioning PI 4 Calibration If Pl had sufficient knowledge of your application and you ordered your system components together they will be preinstalled and preconfigured Do not adjust potentiometers unnecessarily and be aware that many adjustment points are interdependent and effect both computer controlled and analog operating modes Reference to the block diagram p 32 can aid in understanding the scope of the various control elements CAUTION E 621 modules are ESD sensitive electrostatic discharge sensitive devices Observe all precautions against static charge buildup before handling these devices Avoid touching circuit components pins and
17. If the hardware adjustments are exact then the Osen sensor offset digital correction factor should be set to 0 and Ksen the sensor coefficient should be set to a value equal to the travel range in um divided by 10 volts the nominal sensor readout electronics output range See the E 816 User Manual for details E 621 PZ115E Release 2 2 0 Page 25 Calibration Piezo Nano Positioning PI 4 1 1 Open Loop Zero Point Adjustment www pi ws Zero point calibration has the following goals m Make the full travel range available If the electrical zero point is adjusted properly the full output voltage range of the amplifier can be used This prevents overflow conditions from occurring m Preserve the piezo actuators in the mechanics The point of zero sensor readout should correspond to zero or a small negative output voltage This technique can reduce the average applied voltage without loss of displacement and thereby increase piezo lifetime There might be some small deviation of the electrical zero point caused by thermal drift or changes in mechanical loading Let the system warm up for several minutes before setting the zero point This procedure can be carried out either in computer controlled or in analog mode If you use analog mode you will need a voltmeter In computer controlled mode the voltmeter is helpful but not required Before starting install the positioner s with the same loads and in the same posit
18. ON OFF Ext 42a L l Ext 54 Ref 10 V E hoke 5 E L Power Amp PZT a o SS ya Ta out 2a amp c pzT Re On g1 Q Ext Wake l C Wave Table Trigger 40c gt S1 sw 2 l l Analogin SMB r WT er Sensor 22 14a amp e astel l oa ETS a N pe OFF 8c of 8 e T e e e e e e e e e e l 10a O E 30a OPSND i USB E 816 00 Computer Interface Submodule preamplifier stage Depending on the DIP switch settings the resultant signal will be used either as control input or as digital input for triggering If the signal on the SMB socket is to be used as trigger DC offset must be deactivated or set to 0 www pi ws E 621 PZ115E Release 2 2 0 Page 32 Electronics Details Piezo Nano Positioning PI 5 2 Components and Adjustment Elements See also the E 801 and E 802 User Manuals for adjustment elements on those submodules which are not described here a yes E 802 55 servo contr module J3 BIAS SL 802 l j bypass Computer Interface E 816 00 P406 ZERO Fig 6 E 621 viewed from component side with bottom edge on top component locations adjustment elements shown in default settings www pi ws E 621 PZ115E Release 2 2 0 Page 33 Piezo Nano Positioning PI Electronics Details 5 2 1 Jumpers Jumpers are also shown on the block diagram on p 32 J1 Servo mode notch filter and slew rate bypass 1 2 Factory setting the servo control mode depends on t
19. PI 3 1 Front Panel Elements NOTE All front panel connections except of the USB lines are duplicated on the 32 pin main connector PZT SERVO CONTROLLER PI Power A overtow INPUT se SENSOR Settings MONITOR K rii Zo l L I i PZT KZ lt 0 Oj e K 20 to 120V SENSOR a E 62 Fig 3 E 621 Front Panel no difference between LR and SR models www pi ws E 621 PZ115E Release 2 2 0 Page 15 Operation www pi ws Piezo Nano Positioning PI Power LED green Permanent glow indicates that the E 621 is powered on Overflow LED yellow Overflow signal indicates power amplifier is so near the end of its range that it is no longer able to follow input changes properly piezo voltage output outside of 20 V to 120 V range If this LED glows in closed loop operation servo ON a zero point adjustment is necessary Follow the instructions for zero point adjustment given in Section 4 1 1 on p 26 To avoid an overflow of the amplifier in open loop operation do not exceed the allowable control input range see ANALOG INPUT On Target LED green On target signal from E 802 servo control submodule indicates distance from target less than 0 19 of range ANALOG INPUT SMB coaxial GND on outer line Usage of this input line depends on the mode settings made with the Settings DIP switches see below Analog mode ANALOG INPUT is used as control input voltage which give
20. PI representative or write to info pi ws please have the following information about your system ready m Product codes and serial numbers of all products in the system m Current firmware version of the controller if present m Version of drivers and or host software if present m Operating system on host PC if present www pi ws E 621 PZ115E Release 2 2 0 Page 42 Old Equipment Disposal Piezo Nano Positioning PI S Old Equipment Disposal www pi ws In accordance with EU directive 2002 96 EC WEEE as of 13 August 2005 electrical and electronic equipment may not be disposed of in the member states of the EU mixed with other wastes To meet the manufacturer s product responsibility with regard to this product Physik Instrumente PI GmbH amp Co KG will ensure environmentally correct disposal of old PI equipment that was first put into circulation after 13 August 2005 free of charge If you have such old equipment from PI you can send it to the following address postage free Physik Instrumente Pl GmbH amp Co KG Auf der Romerstr 1 76228 Karlsruhe Germany E 621 PZ115E Release 2 2 0 Page 43 Technical Data Nano Positioning P I 9 Technical Data 9 1 Specifications Function Axes Sensor Servo characteristics Sensor type Sensor resolution Amplifier Control input voltage range Min output voltage Peak output power lt 5 ms Average output power Peak current lt 5 ms Av
21. Piezo Nano Positioning PI PZ115E User Manual E 621 LVPZT Controller Amplifier Module Release 2 2 0 Date 2009 04 20 This document describes the following product s E E 621 SR LVPZT Controller Amplifier Single Channel for Strain Gauge Sensors E E 621 LR LVPZT Controller Amplifier Single Channel for LVDT Sensors All models with servo control and computer interface and command interpreter submodules as standard Capacitive sensor E 621 versions are described ina separate manual PZ160E Physik Instrumente Pl GmbH amp Co KG Auf der Romerstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299 Moving the NanoWorld www pi ws info pi ws www pi ws Piezo Nano Positioning PI Declaration of Conformity ccording to DIN EN ISONEC 17050 2005 01 to DIN EN ISO IEC 17050 2005 01 lnd Ts sia eee Pl lnd Ts sia Manufacturer s Auf der R6merstrasse 1 Address D 76228 Karlsruhe Germany The manufacturer hereby declares that the product Product Name LVPZT Controller Amplifier Module Model Numbers E 621 Product Options all complies if installed in compatible chassis from PI E 500 621 or E 501 621 with the following European directives 2006 95 EC Low voltage directive LVD 2004 108 EC EMC Directive The applied standards certifying the conformity are listed below Electromagnetic Emission EN 61000 6 3 EN 55011 Electromagnetic Immunity EN 61000 6 1
22. al conductors The dynamic calibration procedures are described in the User Manual for the E 802 55 servo control submodule execution in analog mode Using the wave table of the E 816 computer interface module it should also be possible to perform them in computer controlled mode without an external frequency generator Note that the notch filter and slew rate limiter are not deactivated by the servo off line Resetting the notch filter frequency in this mode open loop via servo off signal can cause the piezo output voltage to change by as much as 5 To deactivate the notch filter and slew rate limiter use jumper J1 in position 2 3 to remove the E 802 from the circuit entirely see block diagram below www pi ws E 621 PZ115E Release 2 2 0 Page 31 Electronics Details Piezo Nano Positioning 5 Electronics Details PI 5 1 E 621 Block Diagram Fig 5 E 621 Block Diagram NOTE Input signals on the analog input line front panel SMB connector and main connector pin 10c and the position of the external DC offset potentiometer if activated are combined in the Sensor Monitor ie Q O K SMB Con 14a8 amp Sensor Value E 802 5X Servo Conrol Submodule P Servo Controller Sensor Value OFL Sensor Excitation and Readout Submodule 26a E 801 20 LVDT or z D 801 15 SGS S S Servo E S1 sw 30FF right open Master Slave S L R g DOO TETTE 3 r O 28a S E Servo
23. anics will no longer move When the internal temperature falls below 60 C the high voltage output is reactivated automatically How to avoid overheating Keep the ambient temperature at a noncritical value Note that the difference between ambient temperature and internal temperature of the E 621 normally is about 20 Centigrade 36 Fahrenheit degrees Place the system in a location with adequate ventilation Allow at least 10 cm 4 inches clearance from the top and the rear of the unit and 5 cm 2 inches from each side If this is not possible keep the ambient temperature low When using the wave table output it is recommended to reduce the frequency and or the amplitude and or the output duration to avoid overheating E 621 PZ115E Release 2 2 0 Page 39 Troubleshooting www pi ws Piezo Nano Positioning PI Communication with controller does not work Communication cable is wrong or defective gt Check cable Does it work properly with another device For RS 232 a null modem cable must be used The interface is not configured correctly gt With the RS 232 interface check port and baud rate set via BDR command The serial port on the E 816 is preset to the following parameters 115 200 baud 8 data bits 1 stop bit no parity RTS CTS It is recommended that the host PC have a genuine RS 232 interface on board If the host PC uses a USB to serial adapter instead data loss could occur during communication espe
24. cially when transferring large amounts of data gt The first time you connect over the USB interface be sure you are logged on the PC as a user having administrator rights After the E 621 is powered on a message will appear saying that new hardware has been detected Follow the on screen instructions and insert the E 816 CD The required hardware driver is found in the USB_ Driver directory Controller was power cycled or rebooted gt With USB connections communication can not be maintained after the E 621 is power cycled or the E 816 digital operation module is reset The connection must then be closed and reopened Another program is using the interface gt Close the other program Specific software has problems gt See if the system works with some other software e g a terminal or development environment You can for example test the communication by simply starting a terminal program e g PI Terminal and entering IDN Note that multi character commands are transferred as terminated by a LF line feed character and are executed only after the LF is received E 621 PZ115E Release 2 2 0 Page 40 Piezo Nano Positioning PI Troubleshooting Unsatisfactory system performance The sensor values are not reliable and the whole system is instable gt Only thermally stable systems can have the best performance For a thermally stable system power on the E 621 at least one hour before you start working w
25. cket as trigger input To give the E 816 computer interface submodule complete control over the servo mode selection DIP switch 3 must be set to open loop operation right When installing the E 621 in a custom chassis for servo mode selection via the E 816 furthermore make sure that pin 28a on the main connector is not connected to pin 14a or 14c i e the signal on pin 28a must not be LOW 0 V Switches 1 2 and 4 determine the control mode computer controlled or analog of the E 621 and hence the applicable control sources See Control Modes on p 18 for details Switch Computer Controlled Analog Mode Mode 1 OFF ON 2 ON OFF 4 ON OFF Unpredictable behavior may result if sw 1 2 and 4 are set incompatibly Zero potentiometer Trim pot accessible with small screwdriver for sensor zero point adjustment Readjustment may become necessary with time or if the load is changed Do the adjustment with Servo OFF See Section Open Loop Zero Point Adjustment on p 26 for more details PZT 2 conductor coaxial LEMO ERA 00 250 for piezo actuator drive voltage output PZT ground is on the outer conductor tied to case PZT on the inner conductor The drive voltage output is in the range of 20 to 120 V E 621 PZ115E Release 2 2 0 Page 17 Operation Piezo Nano Positioning PI SENSOR 4 conductor LEMO EPL 0S 304 HLN for sensor input Wiring depends on sensor type See Sectio
26. ctor is not grounded i e not connected to pin 14a or 14c 4 Connect the piezo stages actuators to the proper E 621 units If your system was calibrated by PI the controllers and stages are not interchangeable Respect the assignment given by the serial numbers marked on the calibration label of the controller 5 Connect a suitable signal source to the ANALOG INPUT SMB socket Depending on the control mode selection this input signal is either used as control input in analog mode or as trigger signal for wave table output and triggered motion in computer controlled mode See Front Panel Elements on p 15 for signal details In analog mode the control input voltage can also be a computer generated analog signal e g from a DAQ board You can use the PI LabVIEW Analog Driver set provided on the included E 816 CD to generate that analog signal Install that driver set by running Setup on the E 816 CD See the driver documentation on the E 816 CD for operation 6 Optional Connect a suitable measurement device to the SENSOR MONITOR SMB socket This socket carries the filtered and processed sensor output value with 0 to 10 V representing nominal travel range See User Electronics and Sensor Monitor Signal on p 23 for further specifications 7 Switch on the E 621 8 Command motion of the connected piezo stage actuator Analog mode Change the control input signal on ANALOG INPUT in the range of 0 t
27. duct CD Updated releases are available for download from www pi ws or via email contact your Physik Instrumente Sales Engineer or write info pi ws E 801 User Manual PZ117E E 802 User Manual PZ150E E 816 User Manual PZ116E E 816 DLL Software Manual PZ120E E 816 LabVIEW Software Manual PZ121E Analog Controller LabView Driver Library Software Manual PZ181E PIMikroMove Software Manual SM148E Contents Introduction 3 Vl Model Survey srities aeaa tear alh ates acueh iE 3 12 4Prescribed USE sissandi E e E a E 4 13 Safety Precautions sss sessse eree e seer eeesee reenn neee ennenen 5 14 Unpacking TTT 8 Quick Start 9 2 1 Line Power and EUSeS sese eee eee 9 22 IAStallatlon ennan a aa 10 23 First Steps enna viene ene ana 12 Operation 14 3 1 Front Panel Eiemente sss sees sees eee eee eee eee eee 15 3 2 Modes of Operation sss sese eee 18 32 4 GontroliModeS ninta e aside ens Stee 18 322 Servo Modes ON OFF 0 ccccccceeeeeeeeeeesneeeeeeeeueeeeeenaeeeeeeeaas 20 33 Networking on lC Bus 22 34 User Electronics and Sensor Monitor Signal see eee 23 Calibration 24 41 Sensor Connection and AdIuStment sees eee eee 24 41 1 Open Loop Zero Point Adjustment sese eee eee 26 412 Open Loop Sensor Range Adjustment sese eee eee eee 27 413 Servo Control Static Gain Calibration eee eee eects 29 42 Servo Control Dynamic Characteristics sse eee eee eee 31 Electronics Details 32 D1 E 621 Block Diagra Minses ate
28. dule described in the E 802 User Manual sw1 ON down Signal on ANALOG IN WTT line used left as analog input switch OFF up Signal on ANALOG INPUT line not used as analog input sw2 ON down Control input from E 816 computer interface submodule used OFF up Control input from E 816 computer interface submodule not used sw3 ON down Servo on OFF up Servo off can be switched on by E 816 via SVO command or by grounding pin 28a of the 32 pin main connector sw4 ON down Signal on ANALOG INPUT line used as trigger for wave table output or triggered motion OFF up Signal on ANALOG INPUT line not used as trigger for wave table output or triggered motion Unpredictable behavior may result if sw 1 2 and 4 are set incompatibly For admissible combinations see Front Panel Elements on p 15 5 2 3 Potentiometers www pi ws The calibration procedures involve setting a number of trim pots The P406 Zero potentiometer is accessible through a hole in the front panel Others are located on the main board or on submodules See also the User Manual of the respective submodule for more details E 621 PZ115E Release 2 2 0 Page 35 Piezo Nano Positioning PI Electronics Details 5 3 E 801 Sensor Processing Submodule Sensor excitation and processing is implemented on small replaceable submodules SGS versions have E 801 1x submodules which pr
29. erage current Current limitation Noise 0 to 100 kHz Ripple of Uout Voltage gain Input impedance www pi ws E 621 SR E 621 LR Piezo Amplifier Servo Controller P I analog notch filter SGS with SR LVDT with LR 20 bit 2 to 12 V 20 to 120 V 12 W 6 W 120 mA 60 mA Short circuit proof 0 8 mVrms 20 mVpp at low frequencies 40 mVpp spikes at 30 kHz 10 0 1 100 kQ E 621 PZ115E Release 2 2 0 Page 44 Technical Data www pi ws Interfaces and operation Interface communication Piezo connector Sensor connection Piezo Control input trigger input socket Sensor monitor socket Sensor monitor output Controller network Supported functionality DC Offset Miscellaneous Operating temperature range Overheat protection Dimensions Mass Operating voltage Current consumption PI Nano Positioning USB RS 232 9 pin Sub D connector 9 6 115 2 kBaud 24 bit A D and 20 bit D A resolution LEMO ERA 00 250 CTL LEMO EPL 0S 304 HLN SMB SMB 0 to 10 V for nominal expansion up to 12 channels Wave table with 256 data points external trigger 16 macros External potentiometer not included adds 0 to 10 V to the analog input 5 to 50 C 10 derated over 40 C Deactivation at 75 C 7HP 3U 0 6 kg 12 to 30 V DC stabilized 2A Chassis Model E 500 621 E 621 modules max 12 Operating voltage Dimensions 100 to 240 VAC 50
30. hassis from PI pin 28a is not connected to pin 14a or 14c and hence set to servo off open loop operation Via SVO command sent over the communications interface or received from a macro running on the E 816 To give the E 816 complete control over the servo mode selection DIP switch 3 on the E 621 front panel must be set to open loop operation right Furthermore make sure that pin 28a on the main connector is not grounded i e not connected to pin 14a or 14c the signal on pin 28a must not be LOW 0 V Using the SVO command you can check the last sent SVO setting SVO does not report the setting of DIP switch 3 and pin 28a See E 816 User Manual for command descriptions www pi ws E 621 PZ115E Release 2 2 0 Page 20 Piezo Nano Positioning PI Operation Notes Servo control is implemented on a small PCB submodule E 802 55 This submodule is included with the E 621 and comes already installed The block diagram on p 32 answers most questions about how the various elements interact with each other The usage of the E 802 submodule depends on an on board jumper J1 With J1 in position 1 2 the E 802 is connected factory default and the servo mode can then be controlled by DIP switch 3 by pin 28a of the 32 pin main connector or by the E 816 If jumper J1 is in position 2 3 the E 802 submodule is completely bypassed no matter what the other settings Slew rate limitation and notch filtering remain on even when se
31. he setting of DIP switch 3 on the E 621 front panel on pin 28a of the 32 pin main connector or on the SVO command settings The slew rate limitation and notch filter are always ON 2 3 E 802 55 submodule with servo control slew rate limitation and notch filter is completely bypassed No other combination of settings or commands can activate it J3 External DC offset potentiometer not included 1 2 activated do not activate without wiring to the 32 pin main connector p 47 2 3 deactivated J4 Type of sensor activation processing 1 2 DC strain gauge only 2 3 AC primarily LVDT Must match the type of sensor processing submodule installed E 801 2x for AC i e LVDT sensor E 801 1x for DC i e SGS sensor JP107 JP109 shift the voltage range of the sensor processing circuitry They must remain as set at the factory i e for use with an E 802 Servo Control submodule positive polarity 0 10 V JPIOZ Position of the Jurrper P 8 www pi ws E 621 PZ115E Release 2 2 0 Page 34 Electronics Details Piezo Nano Positioning PI Using with PI s position Using as a position control electronics detector Typical Application Special application Position of Jumpers JP108 and JP109 Voltage range of output Fig 7 E 621 sensor processing output settings 5 2 2 Switches DIP switch block S1 is accessible through the front panel Do not confuse with the S1 damping control on the E 802 submo
32. ions as they will have in your application OPEN LOOP SENSOR ZERO POINT 1 Set DIP switches on the front panel for operating mode 2 Power up 3 Set up for servo off operation 4 Exercise the piezo over the nominal expansion range 5 Command OV Computer Controlled Mode sw1 OFF sw2 ON sw4 ON connect RS 232 or USB cable to this unit After power on establish communications e g with PlTerminal Send SVO A 0 where A is the axis identifier Make sure that servo is not set on with DIP switch 3 or pin 28a Command voltages from 0 to 100 V e g with SVA command Command a voltage of 0 volts by sending SVA A 0 where A is the axis identifier E 621 PZ115E Release 2 2 0 Analog Mode sw1 ON sw2 OFF sw4 OFF Set DIP switch 3 OFF Make sure that servo is not set on with pin 28a or SVO command Apply an analog signal in the range of 0 10 V to ANALOG INPUT DC offset must be 0 or OFF J3 2 3 Put 0 V on ANALOG INPUT Page 26 Piezo Nano Positioning PI Calibration 6 Read sensor Send Read the value at the POS A SENSOR MONITOR SMB where A is the axis identifier socket on the front panel with a or read the value at the voltmeter SENSOR MONITOR SMB socket on the front panel with a voltmeter 7 Correctzero Adjust the Zero potentiometer on the front panel so that the sensor monitor signal is 1 V After successful zero point adjustment the Overflo
33. ith it The stage starts to oscillate or shows nonsatisfying settling behaviour gt Your system will be fully calibrated before being shipped But due to load changes in the application some calibration settings may no longer be suitable See Servo Control Dynamic Characteristics on p 31 for details Overflow LED glows The output of the amplifier is being clipped at one of its limits gt Try to adjust the sensor reading window as described in Open Loop Zero Point Adjustment on p 26 a small deviation of the electrical zero point may be caused by thermal drift or changes in mechanical loading Adjustments to the zero point should not exceed 10 of the stage travel After successful zero point adjustment the Overflow LED should no longer glow in closed loop operation To avoid an overflow of the amplifier in open loop operation do not exceed the allowable control input range Permanent glow of the Overflow LED in spite of zero point adjustment may indicate hardware failure Contact your Physik Instrumente Sales Engineer Custom software accessing PI drivers does not run Wrong combination of driver routines Vis gt Check if system runs with Terminal program If yes read the software manual and compare sample code from the E 816 CD to check the necessary driver routines www pi ws E 621 PZ115E Release 2 2 0 Page 41 Piezo Nano Positioning PI Customer Service 7 Customer Service Call your
34. last steps several times until stable results are obtained This adjustment can only be done accurately for one control mode analog mode or computer controlled mode If you use the unadjusted mode 1 error in the sensor monitor output voltage can be expected www pi ws E 621 PZ115E Release 2 2 0 Page 30 Piezo Nano Positioning PI Calibration 4 2 Servo Control Dynamic Characteristics The object of servo control dynamic calibration is to regulate behavior such as overshoot ringing and settling time The servo control submodule also has a notch filter which makes it possible to eliminate vibration at the mechanical resonant frequency of the system Dynamic calibration procedures require an oscilloscope a digital storage oscilloscope is recommended frequency generator to output square and sine functions from 1Hz to 1 kHz and an ohmmeter with a range from 0 1 to 100 k ohm and depending on the installation a 32 pin extension adapter to allow access to the trim potentiometers while the board is in operation Procedures which require removing the E 621 module from the chassis should be carried out by authorized qualified personnel only Disconnect the chassis from power when removing modules and when resetting internal switches or jumpers When a module removed from the chassis must be operated use a 32 pin extension connector P 895 00 not included Voltages of up to 120 V can be exposed Do not touch intern
35. lifier with the piezo operating voltage proportional to the control signal input The sensor electronics works independently and outputs the current piezo position even in open loop mode provided a sensor is properly connected Since there is some variation among different piezos of the same model the voltage required to bring the piezo to its nominal expansion will differ Note Closed loop operation can be activated using a start up macro See the E 816 User Manual for more information 3 3 Networking on I C Bus www pi ws It is possible to command up to twelve E 621s over a single RS 232 or USB interface from a single host PC The E 621 connected to the RS 232 or USB link the master relays commands to the other units slaves on the network Responses from the slaves are then relayed by the master back to the PC The modules to be networked must be installed in the same chassis since networked units must have the C networking lines connected to each E 621 in parallel pins 32a and 32c of the 32 pin main connector The network bus lines are limited to a maximum length of 1 m and a maximum capacitance of 400 pF With multiple E 621 CRs networking requires also sensor synchronization via pins 20a and 24a of the 32 pin main connector see the E 621 CR User Manual PZ160E for details It may be necessary to power cycle the system for proper detection of the master unit i e the E 621 directly connected to the host PC
36. log mode apply an analog control signal to the ANALOG INPUT SMB socket to command the axis motion Unless your stage has a custom calibration the signal should always be in the range of 0 to 10 V excursions to 2 or 12 V may cause overflow especially with servo on and reduce actuator lifetime E 621 PZ115E Release 2 2 0 Page 38 Troubleshooting www pi ws Piezo Nano Positioning PI If you generate the analog signal with a DAQ board in a PC running LabVIEW and using Pl s LabVIEW Analog Driver Set check the driver and the DAQ board for proper operation Move commands or wave table commands may provoke errors and are ignored Wrong command or wrong syntax gt Check the error code with the ERR command Note that the response to this command contains only the error code of the master unit See the ERR description in the User Manual of the E 816 computer interface submodule for the complete error reference Wrong axis commanded gt Check if the correct axis identifier is used and if the commanded axis is that of the desired stage axis identifier also required with single axis systems Incorrect configuration gt Check the parameter settings on the E 816 computer interface module with the SPA command The high voltage output of the E 621 is deactivated gt If the internal temperature goes out of range 75 C or higher the high voltage output of the E 621 will be deactivated In that case the mech
37. losed loop operation switch off the servo immediately The load and or the dynamics of operation probably differ too much from the setup for which the system was calibrated In open loop operation stop the motion immediately Do not operate the piezo stage at its resonant frequency even though the notch filter by default is also active in open loop operation Otherwise the piezo stage could be irreparable damaged 1 Connect the E 621 to the supply power Depending on your system configuration consider the information in Line Power and Fuses on p 9 or Installation on p 10 Make sure the E 621 is switched off Make the DIP switch settings required for the control mode analog or computer controlled and the servo mode ON or OFF you wish to use See Front Panel Elements on p 15 and Modes of Operation on p 18 for details Notes The servo must be ON in analog mode when you want to work with a computer generated signal e g from a DAQ board and the analog LabVIEW driver set from PI see step 5 below To give the E 816 computer interface submodule complete control over the servo mode selection DIP switch 3 on the E 621 front panel must be set to open loop operation right When installing the E 621 in a custom chassis for servo mode selection via the E 816 E 621 PZ115E Release 2 2 0 Page 12 Quick Start Piezo Nano Positioning PI furthermore make sure that pin 28a on the main conne
38. n CAUTION E 621 modules are ESD sensitive electrostatic discharge sensitive devices Observe all precautions against static charge buildup before handling these devices Avoid touching circuit components pins and PCB traces Discharge any static electricity you may have on your body by briefly touching a conductive grounded object before you touch any electronic assembly Pose PCBs only on conductive surfaces such as ESD safe transport containers envelopes foam Electronic subassemblies must always be kept and transported shipped in conductive packaging Make sure that no conductive particles of any kind metallic dust or shavings broken pencil leads loose screws contact the device circuitry CAUTION The E 621 main connector pinout is not compatible with the PI EURO board modules of the E 500 series e g E 509 servo controller or E 50x amplifier CAUTION For successful operation of two or more E 621 CRs which are described in a separate manual their E 500 621 or E 501 621 chassis must have been manufactured after August 2006 Contact PI if you are not sure about the manufacturing date of your chassis www pi ws E 621 PZ115E Release 2 2 0 Page 6 Piezo Nano Positioning PI Introduction CAUTION Calibration should only be done after consultation with PI otherwise the internal configuration data may be destroyed by erroneous operation CAUTION Thermally stable systems have the best performance
39. n 9 3 2 on p 48 SR models or 9 3 3 on p 48 LR models RS 232 Serial connection to host PC Sub D 9 male industry standard RS 232 See the User Manual for E 816 Computer Interface and Command Interpreter Submodule PZ116E for more information USB socket Universal Serial Bus USB Mini B m socket for connection to host PC See the User Manual for E 816 Computer Interface and Command Interpreter Submodule PZ116E for more information 3 2 Modes of Operation Control modes The E 621 can be operated in either analog mode or computer controlled mode The active mode determines the applicable control sources for the output voltage See Control Modes below for more information Servo modes The current servo mode determines if the motion axis is driven in open loop servo OFF or closed loop servo ON operation In closed loop operation a servo loop participates in the generation of the control value for the output voltage The servo loop thus maintains the current axis position based on a given target position and the position feedback of the corresponding sensor See Servo Modes ON OFF below for more information The individual control and servo modes can be combined arbitrarily 3 2 1 Control Modes www pi ws The current control mode of the E 621 determines the applicable control sources for the output voltage and hence for the axis motion It is selected with the Settings DIP switches on the E 6
40. ntroller Amplifier Module It assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures The manual describes the physical specifications and dimensions of the E 621 LVPZT Controller Amplifier Module as well as the hardware installation procedures which are required to put the associated motion system into operation This document is available as PDF file on the product CD Updated releases are available for download from www pi ws or via email contact your Physik Instrumente Sales Engineer or write info pi ws Conventions The notes and symbols used in this manual have the following meanings Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in injury or death Indicates the presence of high voltage gt 50 V Calls attention to k a procedure practice or condition which if not correctly performed or adhered to could result in injury or death CAUTION Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in damage to equipment NOTE Provides additional information or application hints Related Documents The hardware components and the software tools which might be delivered with E 621 LVPZT Controller Amplifier Modules are described in their own manuals All documents are available as PDF files on the pro
41. o 10 V Computer controlled mode Follow the instructions in First Steps in the E 816 Computer Interface Submodule User Manual If at the yellow Overflow LED glows in closed loop operation servo ON then a zero point adjustment is necessary Follow the instructions for zero point adjustment given in Section 4 1 1 on p 26 To avoid an overflow of the amplifier in open loop operation do not exceed the allowable control input range 2 to 12 V www pi ws E 621 PZ115E Release 2 2 0 Page 13 Operation Piezo Nano Positioning PI Operation www pi ws The E 621 amplifier controller is a EURO board plug in module designed to drive and control the displacement of a low voltage piezoelectric stage or actuator LVPZT in a system with sensor position feedback LVDT or SGS sensors depending on model type Operation involves the user commanding a motion and the E 621 supplying the required voltage on the piezo output line for the piezo to execute the commanded motion E 621s can be used for both static and dynamic applications High output stability and low noise assures stable nanopositioning Because LVPZT translators have high capacitances the amplifier is designed to supply appropriately high peak currents for dynamic applications Excellent linearity and stability allows the use of E 621s in precision measurement and control systems E 621 PZ115E Release 2 2 0 Page 14 Operation Piezo Nano Positioning
42. ovide DC sensor excitation and readout LVDT versions have E 801 2x submodules which provide AC sensor excitation They can also be connected to SGS sensors if necessary Fig 8 E 801 sensor excitation and readout submodule Note and respect component side orientation On multi channel systems the LVDT excitation frequencies are synchronized by the appropriate use of master and slave E 801 2x versions or jumper settings Should you ever need to make any adjustments on the sensor submodules refer to the E 801 User Manual for more details 5 4 E 802 Position Servo Control Board The E 802 is a small plug in PCB that processes the control signal for the amplifier driving the piezoelectric translators Slew rate limitation notch filter and servo control loop are all implemented on the E 802 The servo loop logic compares the control voltage input and the sensor signal to generate the amplifier control signal using an analog proportional integral P I algorithm www pi ws E 621 PZ115E Release 2 2 0 Page 36 Piezo Nano Positioning PI Electronics Details Fig 9 E 802 servo control submodule location on E 621 Note and respect component side orientation For calibration procedures see Servo Control Static Gain Calibration p 29 and Servo Control Dynamic Characteristics p 31 The E 802 submodule is described in detail in a separate user manual www pi ws E 621 PZ115E Release 2 2 0 Page 37 Troubleshooting
43. owering up the module the DC DC converter needs a peak current of about 1 5 A to start oscillating The power supply should have a buffer capacitor or should be able to supply the 1 5 A per E 621 for at least 1 second The inputs and outputs of the DC DC converter are not connected internally Using a unipolar power supply we recommend connecting the negative supply at pin 18a and 18c with the Test GND at pin 14a and 14c This provides a defined GND level and helps to minimize noise Be sure to connect pin 14a and 14c to a protective ground If a DC offset potentiometer is to be used connect the wiper to pin 12c the zero offset contact presumably CCW to pin 22c 14a or 14c GND and the other contact CW to pin 12a Make sure the external pot is activated with J3 in position 1 2 By connecting pin 28a on the main connector to pin 14a or 14c GND the E 621 is set to closed loop operation servo ON In this case switching to open loop operation servo OFF is neither possible with DIP switch 3 on the front panel nor with the SVO command via the E 816 computer interface submodule E 621 PZ115E Release 2 2 0 Page 11 Quick Start Piezo Nano Positioning PI 2 3 First Steps www pi ws CAUTION Thermally stable systems have the best performance For a thermally stable system switch on the E 621 at least one hour before you start working with it CAUTION If the piezo stage starts oscillating humming noise In c
44. rated use a 32 pin extension connector P 895 00 not www pi ws E 621 PZ115E Release 2 2 0 Page 27 Calibration Piezo Nano Positioning PI included Voltages of up to 120 V can be exposed Do not touch internal conductors OPEN LOOP SENSOR RANGE 1 Make adjustment elements accessible 2 Set DIP switches on the front panel for operating mode 3 Power up 4 Set up for servo off operation 5 Exercise the piezo over the nominal expansion range 6 Command OV 7 Check adjust zero point 8 Expand the piezo to its nominal expansion as indicated by external gauge www pi ws Computer Controlled Mode Remove E 621 from the chassis and connect via P 895 00 extension connector qualified authorized personal only sw1 OFF sw2 ON sw4 ON connect RS 232 or USB cable to this unit After power on establish communications e g with PITerminal Send SVO AO where A is the axis identifier Make sure that servo is not set on with DIP switch 3 or pin 28a Command voltages from 0 to 100 V e g with SVA command Command a voltage of 0 volts by sending SVA A 0 where A is the axis identifier Send POS A where A is the axis identifier or read the value at the SENSOR MONITOR SMB socket on the front panel with a voltmeter If necessary adjust the zero point as described in Section 4 1 1 Use a series of commands like SVA A 90 followed by repeated SVRA 1 A is
45. remove the power plug from the wall socket to disconnect the system from the power supply completely CAUTION Both fuses are active and have to be replaced if there is a fault To access the line power fuses proceed as follows 1 Switch the system off and remove the power cord 2 Wait one minute to be sure that all electric circuits are discharged completely www pi ws E 621 PZ115E Release 2 2 0 Page 9 Quick Start Piezo Nano Positioning PI 3 Pry open the door that covers the fuse carrier see Fig 2 and pry out the fuse carrier 4 Be sure to replace both fuses with IEC 4 AT slow blow Note that IEC standard fuses are designed to carry the nominal current indefinitely Other fuse rating standards differ 5 Reinstall the carrier and close the door Fig 2 Fuse location on the rear panel and in the carrier 1 of 2 fuses visible 2 2 Installation www pi ws This section is only relevant if the E 621 modules come without chassis CAUTION E 621 modules are ESD sensitive electrostatic discharge sensitive devices Observe all precautions against static charge buildup before handling these devices Avoid touching circuit components pins and PCB traces Discharge any static electricity you may have on your body by briefly touching a conductive grounded object before you touch any electronic assembly Pose PCBs only on conductive surfaces such as ESD safe transport containers envelopes foam
46. roller and an E 816 Computer Interface and Command Interpreter installed as standard Networking of E 621 s with each other allows controlling up to 12 devices over a single RS 232 or USB computer interface The modules to be networked must be installed in the same chassis E 621 CRs for use with capacitive sensors are described in detail in their own manual PZ160 aa eh ee sb zz MME yyy l MM S R ff AAAA Smee T pra Fig 1 E 621s installed in compatible PI chassis E 500 621 in this example are automatically networked www pi ws E 621 PZ115E Release 2 2 0 Page 3 Piezo Nano Positioning PI Introduction 1 2 Prescribed Use The E 621 LVPZT Controller Amplifier Module is designed for installation in a suitable chassis e g the E 500 621 or E 501 621 provided by PI Based on its design and realization the E 621 LVPZT Controller Amplifier Module is intended to drive capacitive loads in the present case piezoceramic actuators The E 621 must not be used for applications other than stated in this manual especially not for driving ohmic resistive or inductive loads E 621s can be operated in closed loop mode using position sensors The type of position sensor used must be compatible with the E 621 model to which it is attached in particular linear variable differential transformers LVDT require the AC excitation provided by the E 621 LR and strain gauge sensors SGS require DC exitation p
47. rovided by the E 621 SR Appropriate sensors are provided by PI and integrated in the mechanics according to the mechanics product specifications Other sensors may be used as position sensors only with permission of PI Observe the safety precautions given in this User Manual E 621s meet the following minimum specifications for operation m Indoor use only m Altitude up to 2000 m m Ambient temperature from 5 C to 40 C m Relative humidity up to 80 for temperatures up to 31 C decreasing linearly to 50 relative humidity at 40 C m Line voltage fluctuations of up to 10 of the line voltage R Transient overvoltages as typical for public power supply Note The nominal level of the transient overvoltage is the standing surge voltage according to the overvoltage category II IEC 60364 4 443 m Degree of pollution 2 Any more stringent specifications in the Technical Data table are of course also met www pi ws E 621 PZ115E Release 2 2 0 Page 4 Piezo Nano Positioning PI Introduction 1 3 Safety Precautions 4 High Voltage Read This Before Operation E 621 LVPZT Controller Amplifier Modules generate voltages up to 120 V for driving LVPZTs The output power may cause serious injury When working with these devices or using PZT products from other manufacturers we strongly advise you to follow general accident prevention regulations All work done with and on the equipment described here requires adeq
48. rvo mode is switched off They will only be deactivated if the E 802 servo controller submodule is bypassed with J1 in position 2 3 Normally you do not need to change jumper J1 Access to J1 requires removing the E 621 module from the chassis See Components and Adjustment Elements on p 33 for more information Closed loop operation Any control input control voltage on ANALOG INPUT E 816 input like move commands and wave table output is interpreted as target position Based on this target position and on the position feedback of the corresponding sensor channel the servo loop on the E 802 submodule generates the control value for the piezo output voltage The servo loop thus maintains the axis position Closed loop operation offers both drift free and hysteresis free positioning as well as immunity to load variations DIS standard calibration procedure assures that the piezo actuator reaches its nominal expansion when that position is commanded www pi ws E 621 PZ115E Release 2 2 0 Page 21 Operation Piezo Nano Positioning PI Open loop operation Any control input is interpreted as piezo voltage target Open loop operation omits the servo loop on the E 802 submodule and the control input directly controls the piezo output voltage The slew rate limitation and notch filter remain active unless of course jumper J1 is in position 2 3 When servo mode is OFF the system works like a linear amp
49. s For the Hyperbit extension contact your PI Sales Engineer Computer controlled mode Activated with the following settings ON position is on the left 1 OFF 2 ON 4 ON The E 816 computer interface module installed in the E 621 controls the generation of the output voltage Target values for the axis motion can be given by move commands received via computer interface or from a running macro trigger input or wave table output The analog control input voltage on the ANALOG INPUT socket is ignored www pi ws E 621 PZ115E Release 2 2 0 Page 19 Piezo Nano Positioning PI Operation Notes In analog mode the E 816 accepts all commands just as in computer controlled mode The only difference between the modes is the control source selection 3 2 2 Servo Modes ON OFF The current servo mode determines if a motion axis is driven in open loop servo OFF or closed loop servo ON operation The servo mode can be set as follows Using DIP switch 3 on the E 621 front panel OFF right servo off open loop operation ON left servo on closed loop operation Using pin 28a on the 32 pin main connector Servo is on if pin 28a is connected to pin 14a or 14c GND In this case switching to open loop operation servo OFF is neither possible with DIP switch 3 on the front panel nor with the SVO command via the E 816 computer interface submodule By default and when installed in an E 50x 621 c
50. s the target either as voltage or position depending on the servo mode see below The input signal should always be in the range of 0 to 10 V excursions to 2 or 12 V may cause overflow especially with servo on and reduce actuator lifetime The control input voltage can also be a computer generated analog signal e g from a DAQ board You can use the PI LabVIEW Analog Driver set provided on the E 816 CD to generate that analog signal See Control Modes on p 18 for details Computer controlled mode ANALOG INPUT is used as trigger input signal for wave table operation and triggered motion Active HIGH LOW 0 to 0 5 V HIGH 3 0 to 5 0 V maximum 10 V max freq 400 Hz min width 5 us See the User Manual for E 816 Computer Interface and Command Interpreter Submodule PZ116E for more information SENSOR MONITOR SMB coaxial GND on outer line 0 to 10 V on inner line Filtered and processed sensor output value 0 to 10 V representing nominal travel range E 621 PZ115E Release 2 2 0 Page 16 Operation www pi ws Piezo Nano Positioning PI Settings DIP switch block The ON position is on the left Switch Function 1 Usage of ANALOG INPUT socket as control input 2 Control input given by the E 816 computer interface submodule installed in E 621 3 Servo mode selection OFF right servo off open loop operation ON left servo on closed loop operation 4 Usage of ANALOG INPUT so
51. stablish communications e g with PlTerminal Send SVOA1 where A is the axis identifier Positioning PI Analog Mode Remove E 621 from the chassis and connect via P 895 00 extension connector qualified authorized personal only sw1 ON sw2 OFF sw4 OFF Set DIP switch 3 ON or connect pin 28a to pin 14a or 14c If the piezo goes into oscillation you will have to perform the dynamic adjustments especially notch filter first Send MOV AO where A is the axis identifier and set external gauge to 0 e g send MOV A 100 where A is the axis identifier The piezo should expand to the nominal expansion and the output on the SENSOR MONITOR SMB socket should be exactly 10 V Verify this with the external gauge and meter Put 0 V analog input on the ANALOG INPUT SMB socket DC offset must be to 0 or OFF J3 2 3 and set external gauge to 0 Using an appropriately accurate source apply 10 0000 V to the analog input The piezo should expand to the nominal expansion and the output on the SENSOR MONITOR SMB socket should be exactly 10 V Verify this with the external gauge and meter To adjust the SENSOR MONITOR output to exactly 10 000 V use the GAIN Fine Adjust potentiometer on the servo submodule E 802 55 To adjust the expansion without changing the SENSOR MONITOR output servo control is on use the gain adjustment potentiometer on the E 801 x sensor module 10 Repeat the
52. uate knowledge and training in handling High Voltages Any cabling or connectors used with the system must meet the local safety requirements for the voltages and currents carried Procedures which require removing the E 621 module from the chassis should be carried out by authorized qualified personnel only Disconnect the chassis from power when removing modules and when resetting internal switches or jumpers When a module removed from the chassis must be operated use a 32 pin extension connector P 895 00 not included Voltages of up to 120 V can be exposed Do not touch internal conductors Be sure to connect pin 14a and 14c to a Protective Ground Connect the AC power cord of the E 500 621 or E 501 621 chassis in which the E 621 is installed to the wall socket 100 to 240 VAC To disconnect the system from the supply voltage completely remove the power plug from the wall socket or remove the power cord from the chassis Install the system near the AC outlet and such that the AC power plug can be reached easily www pi ws E 621 PZ115E Release 2 2 0 Page 5 Piezo Nano Positioning PI Introduction CAUTION Place the chassis with the E 621 s in a location with adequate ventilation to prevent internal heat build up Allow at least 10 cm 4 inches clearance from the top and the rear of the unit and 5 cm 2 inches from each side Never cover the ventilation slots of the chassis as this will impede ventilatio
53. w LED should no longer glow in closed loop operation Permanent glow of this LED in spite of zero point adjustment may indicate hardware failure To avoid an overflow of the amplifier in open loop operation do not exceed the allowable control input range 4 1 2 Open Loop Sensor Range Adjustment The object of open loop sensor range calibration is to assure that when the piezo is at nominal expansion the sensor will report the nominal expansion position Note that the voltage required to cause the piezo to expand to its nominal value will not be exactly 100 V but somewhere in the 85 105 V range All piezo positioning systems ordered together with a piezo translator are delivered with performance test documents to verify the system performance The system ordered is calibrated in our labs prior to shipment Normally there is no need for the customer to perform a full calibration Only if the piezo the sensor extension cable or the mechanical setup is changed may new calibration be necessary Open loop sensor range adjustment requires an external measuring device with 0 1 um resolution and a 32 pin extension connector P 895 00 not included Procedures which require removing the E 621 module from the chassis should be carried out by authorized qualified personnel only Disconnect the chassis from power when removing modules and when resetting internal switches or jumpers When a module removed from the chassis must be ope

User Manual PZ115E - Physik Instrumente

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