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Operation and Maintenance Manual for the Gasguard® 450

1. 2 7 Panel Schematic and Component Descriptions Figure 2 4 is a flow schematic of a typical Gasguard 450 Process Process Purge Cabinet Auto Crossover System PROCESS OUT HOUSE N2 7 VENT HOUSE N2 7 VENT VENT A t ns T i EN PURGE GAS TO VMB Eph HH ay ye A OPTIONAL i ou 7 i E Pet pk t al 7 ya ae A E v a Nir Af se Afer cv cv My 15 My 14 7 Ak o a PCY 2 ner a p v6 Af p V6 A w FD Xw 13 P P T N E E f T X My 22 f HX My 22 TIY Ean Mv 18X FE EH EHH w 20X Ka H T OH T T F Ho PCY 1 y 2 X D v s PCy 1 y 2 X DNS F we HO Le 1 P ch Foy be p U 0 EH u a i v D ey KO A E i PURGE I p T I E 1 y 1 E R iw R y 4 y Z PROCESS PROCESS Figure 2 4 Process Process Purge Cabinet Auto Crossover System Schematic The function of each component is described in the table V 1 Emergency Shutoff Valve On Pigtail This pneumatic valve located on the pigtail close to the gas cylinder shuts off the process gas flow when a shutdown alarm occurs or the E Stop button is pressed High Pressure Process Isolation Valve This pneumatic valve isolates the pressure regulator and downstream components from the high pressure process gas Low Pressure Process Isolation V
2. Filters Remove filter from line if Every six months for applicable Install VCR corrosive gases plug or cap over open Yearly for non corrosive fittings Examine filter for gases signs of plugging and replace filter or filter cartridge if necessary It may desirable to measure flow through the filter with an inert gas to assure that it is not plugged Test particle performance Check valves Shut down and purge entire Every six months for Install VCR plug or cap system completely corrosive gases over each open fitting on Remove all check valves Yearly for non corrosive gas panel to prevent Test check valves to gases contamination manufacturer s specified leak rate Repair or replace any defective check valves Air Products and Chemicals Inc 5 4 Section 5 Maintenance Item Safety relief valves Install VCR plug or cap over each open fitting on gas panel to prevent contamination Pigtail cylinder connection Pressure regulators Cylinder connection Cabinet exhaust screen if installed Transducers Revision B April 1995 Task Shut down and purge entire system completely Remove all safety relief valves Test safety relief valves to assure they relieve at manufacturer s specified pressure setting Repair or replace any defective safety relief valves Examine pigtail nipple orifice if installed for evidence of plugging or corrosion Replace if there is evidence of damage Do not opera
3. It is also used to check pressures during purge cycles Air Products and Chemicals Inc 2 8 Section 2 System Description PT 2 Process Delivery Pressure Transducer This transducer measures the process gas pressure on the outlet side of the pressure regulator PT 3 Purge Cylinder Pressure Transducer This transducer measures the pressure of the purge gas at the cylinder outlet PT 4 Purge Delivery Pressure Transducer This transducer measures the pressure of the purge gas on the outlet side of the purge regulator PT 5 Vent Line Pressure Transducer This transducer measures the vacuum pressure in the vent piping created by the vacuum venturi PT 8 Purge Line Pressure Transducer Optional This transducer measures the pressure in the purge header downstream of the purge purifier It is used when one purge system is used to supply more than one process panel or VMB It is only used on process gas with a cylinder pressure over 250 PSIG MV 9 Process Line Isolation Valve This manual valve isolates the process line and downstream equipment from the low pressure process supply It is used to isolate the cabinet from the process line In crossover systems two MV 9 valves may be used in series to provide dual isolation during maintenance MV 10 High Pressure Purge Gas Isolation Valve Optional This manual valve isolates the purge regulator from the high pressure purge supply Revision B April 1995 2 9 Gasguard
4. Revision B April 1995 Pagei v Gasguard 450 System Operation Manual 5L Warranty neet austen cies E E EE EEEE ea aene 5 1 5 2 Routine Maintenance n n neninn neni n a n o a S Sia se leave ceds 5 2 5 3 Safety Interlock Maintenance seeeseeeseseeesesesesressesererresseseresresserseesreesresese 5 6 Section 6 System Specific Information eeseseeeseseesseeesesressreerssresstserssressessresreesessresees 6 1 6 1 System SpecificatlonS sssri soii aosi a s eee aaea teni 6 3 6 2 System Dra wines ieissa ineas n eaii ipi aiaiai biaia 6 5 6 3 Recommended Spare Parts 26 0 oh ieee bie i eae ee ead 6 7 6 4 Prosrant Logie Chatteris ne eles heck eed lece pecan et aera aeie ten 6 9 Air Products and Chemicals Inc Page i vi Introduction Introduction This manual contains the information needed to safely operate and maintain the Air Products Gasguard 450 Gas Cabinet System Information on installation of the system is found in a separate manual Installation Manual for the Gasguard 450 Gas Cabinet and Purge Panel Systems Note Air Products recommends that the customer develop a specific Cylinder Change Work Instruction for each gas cabinet rack system or valve manifold box The work instruction can be used as a step through check list procedure for trained operators A standard industrial work instruction would include the following e System identification number gas service basic description of system etc e Current o
5. 1994 edition The table below lists the exhaust requirement for GG450 Cabinets to meet the above requirements Static Pressure Standard Requirement Cabinet Width Duct Size Hatch Status Exhaust Requirement inches water column 1 cylinder 18 6 Open 205 CFM 0 09 Closed 175 CFM 0 42 2 cylinder 24 6 Open 335 CFM 0 23 Closed 225 CFM 0 30 3 cylinder 38 8 Open 370 CFM 0 09 Closed 356 CFM 0 30 Static Pressure Silane SiH4 Requirement Cabinet Duct Size Hatch Status Exhaust Requirement inches water column 1 cylinder 6 Open 350 CFM 0 25 Closed 325 CFM 0 31 2 cylinder 6 Open 490 CFM 0 49 Closed 475 CFM 0 55 Revision B April 1995 1 3 Gasguard 450 System Operation Manual The static pressure is measured in the exhaust duct 3 to 6 inches above the entrance to the round duct Baffles are used within the enclosure in silane service to direct the major portion of the exhaust flow across the panel piping This exhaust system must be independent of any general plant exhaust system and A MANANI must be designed for the types of gases being used Ensure that only compatible gases are fed into the exhaust system Be certain the exhaust system power and shut down interlocks comply with UFC and NFPA code requirements e Scrubber with a pollution abatement system sized for maximum potential upset flow of hazardous gas Hardhats are ALWAYS required in zones j HARD HAT ZONES WARNING defined as ONE
6. 1995 3 11 Gasguard 450 System Operation Manual 3 3 1 2 Full Purge Gas Cylinder Installation 1 Verify that the replacement cylinder is identical to the purge gas cylinder that was removed Never attempt to replace specified gas with another gas without consulting equipment A WARNING supplier Incompatible gases could cause fires explosions or extremely corrosive or toxic compounds 2 Position full cylinder in gas cabinet and strap loosely Remove valve protection cap If a valve protection cap is extremely difficult to remove do not apply excessive A WARNING force or pry the cap loose Attach a label to the cylinder identifying the problem Obtain another cylinder Do not attempt to open a frozen cap as this would damage the cylinder valve and could result in personal injury or death 3 Check that the cylinder valve is tightly closed 4 Check valve outlet area for contamination or damage Do not attempt to use gas cylinder with damaged or contaminated valve outlet Replace the cylinder and tag the defective cylinder indicating the problem 5 Position valve outlet so that it lines up properly with the pigtail cylinder connection and tighten cylinder strap Do not rotate cylinder by holding cylinder valve handle This may open the cylinder A VAAN SAM EEMNLGS valve and cause a high pressure gas leak which could result in personal injury or death 6 Remove pigtail cap plug from pigtail cylinder connecti
7. 3 6 of this manual but not reduced below the minimum Air Products and Chemicals Inc 2 20 Section 2 System Description Rough Line Evac Optional This menu option is used to purge the major quantity of hazardous gas remaining in the process line to the tool The purge evacuation capabilities of the Gasguard process panel are used to remove this gas into the cabinet vent system This sequence alone does not remove the process gas from the process line to a low enough concentration to permit operator A MAAAR maintenance or other activities on the process line or downstream components The customer must develop purge and evacuation procedures for the process line and downstream components to assure safe low concentrations of hazardous gas to permit maintenance on this equipment This normally is accomplished by flowing purge gas through the process line and tool This sequence can be initiated after completion of any other menu option The Aux Purge operation includes the Pre Purge sequence at the start of the cycle Lamp Test This option energizes all of the controller s LED lamps and audible outputs This verifies that all LED s and internal outputs are functioning Revision B April 1995 2 21 Gasguard 450 System Operation Manual Air Products and Chemicals Inc 2 22 Section 3 Operating Procedures Section 3 Operating Procedures This section will describe the operating procedures The following proce
8. Any open valves ANALOG SCALING JI cl his ti APCI SETPOINTS will close at this time TEST ANALOG IN TEST DIGITAL IN TEST DIGITAL OUT Air Products and Chemicals Inc 3 34 Section 3 Operating Procedures 3 5 2 How to Open and Close Valves There are two ways to open and close valves in Manual Mode The simplest is to press the hexagonal membrane switch located next to the valve symbol on the graphic display Pressing the switch toggles the valve from OPEN to CLOSED or CLOSED to OPEN An alternate method is to use the keypad To open a valve lt MANUAL MODE 1 Press then The OPEN VALVE screen prompts OPEN VALVE 2 Type the number of the valve you wish to open Press syjjs 3 The valve will open PROC CYL PRES 389 71 PROC DEL PRES 28 40 VAC GENERATOR 12 37 PROC CYL WGHT 31 70 Note The operator may be prompted to confirm the opening of certain valves by pressing then for yes This prompt is a reminder to check for potentially dangerous situations prior to opening these valves Revision B April 1995 3 35 Gasguard 450 System Operation Manual To close a valve lt MANUAL MODE lt 1 Press then E2 The CLOSE VALVE screen prompts CLOSE VALVE 2 Type the number of the valve you PROC CYL PRES 389 71 wish to close Press JANUS PROC DEL PRES 28 40 VAC GENERATOR 12 37 PROC CYL WGHT 31 70 3 The valve will close Cabinet must no
9. E E E E SS 2 19 Section 3 Operating Procedures cs jcs d ses jaieidanans otdegecnavegdducesats deesaenene goede pete ceantsathanesacaseeaaen 3 1 3 1 Emergency Shutdown Procedures 1 2 lt cec0scousc ae eade lass oases ad 3 3 3 2 Operation of the GG450 Controller eeeeeeececsececeeececeeeeeesteeeenteeeeneeees 3 4 5e2 Security Code renne e E hone tata eed 3 4 3 2 2 Reypad OPeratiOM sssaaa e s 3 5 3 2 3 Entering the Password to Access the Main Menu Screen 3 7 3 3 Process and Purge Cylinder Procedures eesceeeesecsececeeeeeeeseeeesneeeenaeeees 3 10 3 3 1 Inert Purge Gas Cylinder Change Procedure eeeeeeeeseeeeeteeees 3 10 3 3 1 1 Empty Purge Gas Cylinder Removal eceeeeeeeeeees 3 11 3 3 1 2 Full Purge Gas Cylinder Installation eee eeeeeeees 3 12 3 3 1 3 CGA Connection Leak Check Purge Cylinder 3 13 3 3 1 4 Putting Purge Gas Cylinder On Stream eee 3 14 3 3 2 Process Gas Cylinder Procedures eeeececessceceseceeeeeeeeeseeeeeeeeees 3 15 Air Products and Chemicals Inc Page i iv Introduction 3 3 2 1 Empty Process Gas Cylinder Removal Prior to Removal dnns ana Mondale isiel eek hoes 3 15 3 3 2 2 Empty Process Gas Cylinder Removal eecceeeeeees 3 19 3 3 2 3 Full Process Gas Cylinder Installation eee 3 21 3 3 2 4 Full Process Cylinder Purge After Installation 3 23 3 32 DP POCESS GaS PIO W secsheest oapearacetiatecasan
10. EQUIPMENT IS DESIGNED FOR USE WITH FLAMMABLE FLAMMABLE GAS GAS Acetylene Methane Disilane Methyl chloride Hydrogen Silane Hydrogen mixtures Silane mixtures The following label would be used with the gases listed below it THIS EQUIPMENT IS DESIGNED FOR USE WITH CORROSIVE CORROSIVE Silicon tetrachloride The following label would be used with the gases listed below it THIS EQUIPMENT IS DESIGNED FOR USE WITH OXIDIZER OXIDIZER Oxygen Revision B April 1995 1 25 Gasguard 450 System Operation Manual The following label would be used with the gases listed below it THIS EQUIPMENT IS DESIGNED FOR USE WITH Carbon tetrachloride The following label would be used with the gases listed below it THIS EQUIPMENT IS DESIGNED FOR USE WITH POISON GAS CORROSIVE Hydrogen fluoride Air Products and Chemicals Inc 1 26 Section 1 Safety The following label would be used with the gases listed below it THIS EQUIPMENT IS DESIGNED FOR USE WITH NON NON FLAMMABLE FLAMMABLE GAS GAS Ammonia Halocarbon 115 Argon Halocarbon 116 Carbon dioxide Helium Halocarbon 11 Krypton Halocarbon 12 Neon Halocarbon 13 Nitrogen Halocarbon 14 Nitrous oxide Halocarbon 22 Perfluoropropane Halocarbon 23 Sulfur hexafluoride Halocarbon 113 Xenon The following label would be used with the gases listed below it THIS EQUIPMENT IS DESIGNED FOR USE WITH NON FLAMMABLE XIDIZER GAS 8 Oxygen mixtures Ni
11. Nitrogen Supply The safety literature listed below follows the safety literature for Section 1 7 and must be read and understood APCI Safetygram 2 Gaseous Nitrogen APCI Safetygram 17 Dangers of Oxygen Deficient Atmospheres Nitrogen Material Safety Data Sheet Air Products and Chemicals Inc 1 30 Section 2 System Description Section 2 System Description The Gasguard 450 Automatic Hazardous Gas System consists of a gas cabinet one or two process gas panels an inert purge gas panel and a single or dual GG450 controller For inert gases and silane the process and purge panels and controllers may be mounted on an open rack Some Gasguard systems can be used to back up another system and can be switched to automatically if needed The minimum hardware requirements to operate in auto switchover mode are e Dual Gasguard 450 controller or two single GG450 controllers configured as such and e Two process gas panels sharing process outlet piping Gasguard Systems are designed and built for the safe storage and handling of high purity toxic flammable pyrophoric corrosive oxidizing and reactive cylinder gases The systems have been designed in accordance with the applicable requirements of the Uniform Fire Code UFC Copies of the UFC may be obtained from Western Fire Chiefs Association 5360 South Workman Mill Road Whittier California 90601 2 1 Gas Cabinet The function of the Gasguard Cabinet is to ensure a safe envir
12. Purpose This procedure establishes the minimum requirements for the lockout or tagout of energy isolating devices It shall be used to ensure that the machine or equipment is isolated from all potentially dangerous energy and locked out or tagged out before employees perform any servicing or maintenance activities where the unexpected energization start up or release of stored energy could cause injury Type s and Magnitude s of Energy Hazards Responsibility Appropriate employees shall be instructed in the safety significance of the lockout or tagout procedure Name s Job title s of employees authorized to lockout or tagout Each new or transferred affected employee and other employees whose work operations are or may be in the area shall be instructed in the purpose and use Air Products and Chemicals Inc 1 18 Section 1 Safety of the lockout or tagout procedure Name s Job title s of affected employees and how to notify Preparation for Lockout or Tagout Make a survey to locate and identify all isolating devices to be certain which switch s valve s or other energy isolating devices apply to the equipment to be locked or tagged out More than one energy source electrical mechanical or others may be involved Type s of energy isolating means Sequence of Lockout or Tagout System Procedure 1 Notify all affected employees that a lockout or tagout system is going to be utilized and the reason therefore Th
13. adhere to all operational warnings in Section 3 5 when performing the Digital Out Test Extreme care must be taken when forcing a digital output either on or off When A WARNING checking a digital output signal to a solenoid valve energizing the output would also open the associated pneumatic valve on the process panel The operator must understand the consequence of opening any valve before he performs a digital out test to any solenoid valve There is no confirmation request in Digital Out Test as a reminder like that which is used in Manual Mode for critical valve operation Air Products and Chemicals Inc 3 40 Section 4 Troubleshooting Section 4 Troubleshooting This section explains how you can identify malfunctions present in the system Troubleshooting is only to be performed by A MANANE mained people who understand the hazards of the system Personal injury or death may result if proper personal protective equipment PPE is not worn when performing troubleshooting See Section 1 2 of this manual for the proper PPE A WARNING Turn off the electrical power to the system MANANE before performing controller maintenance Before attempting to service the system components close the cylinder valve s vent all pressure in the system and purge A PANAN all lines that have contained process gas Tag out and lock out the cylinder valve s following the procedure in Section 1 4 found on pages 1
14. appropriate Personal Protective Equipment PPE must be worn when performing any Process Cylinder Procedures See Section 1 2 of this manual for the appropriate PPE There are a number of system verification checks performed during the automatic cycle purge If a fault or shutdown occurs the operator must fully understand the indications Under no circumstances should the cycle be restarted or continued until it is verified to be in a safe condition 1 Confirm with operating personnel that the process gas can be shut off before initiating stop process gas 2 On the Main Menu screen of the lt STANDARD 450 GAS LCD highlight PROCESS GAS ne MAIN MENU he FLOW 3 Press Hye Revision B April 1995 RETURN TO DISPLAY PROCESS GAS FLOW PRE PURGE CYCLES CHANGE CYLINDER POST CHANGE CYCLES ROUGH LINE EVAC LAMP TEST CAB CONFIGURATION EX VERSION 15 1 ah FILE V1_4LMX0 Gasguard 450 System Operation Manual 4 Check and record the following information on the Process Gas Cylinder Change Checklist found on page 3 26 each time a cylinder is changed Pressure readings on PROCESS CYL PRESS PT 1 PROCESS DEL PRESS PT 2 PROCESS CYL WEIGHT if scale is present Observe that all valves are closed green and note any shutdown or warning light and any other comments about the condition of system Proceed to trouble shooting section for corrective action if there are any shutdown or warning
15. are located on the door of the Gasguard 450 cabinet They are identical to the labels on the process gas cylinder in the GG450 cabinet to provide verification that the correct process gas is being installed and used The signs shown below are DOT A WARNING classifications They are not to be used to classify gas hazards Refer to the appropriate MSDS sheets in Section 1 7 The following label would be used with the gases listed below it THIS EQUIPMENT IS DESIGNED FOR USE WITH POISON GAS POISON GAS Boron trifluoride Tungsten hexafluoride Chlorine Sulfur tetrafluoride Phosphorous pentafluoride Revision B April 1995 1 23 Gasguard 450 System Operation Manual The following label would be used with the gases listed below it THIS EQUIPMENT IS DESIGNED FOR USE WITH Boron trichloride Hydrogen chloride Hydrogen bromide Silicon tetrafluoride The following label would be used with the gases listed below it THIS EQUIPMENT IS DESIGNED FOR USE WITH POISON GAS FLAMMABLE GAS Arsine mixtures Germane Carbon monoxide Hydrogen selenide Diborane mixtures Hydrogen sulfide Dichlorosilane Phosphine mixtures The following label would be used with the gases listed below it THIS EQUIPMENT IS DESIGNED FOR USE WITH POISON GAS OXIDIZER Chlorine trifluoride Fluorine Air Products and Chemicals Inc 1 24 Section 1 Safety The following label would be used with the gases listed below it THIS
16. conditions Notify your supervisor immediately Air Products and Chemicals Inc PROCESS GAS STOPPED PROC CYL PRES 111 70 PROC DEL PRES 38 80 VAC GENERATOR 12 62 PROC CYL WGHT 9 15 POWER UP PROC CYL PRES PROC DEL PRES VAC GENERATOR PROC CYL WGHT 2 a PROCESS PURGE CYLINDER P lt OPEN P lt CLOSED RED GREEN Section 3 Operating Procedures lt STANDARD 450 GAS 5 On the Main Menu screen highlight PRE PURGE ee MAIN MENU ae CYCLES RETURN TO DISPLAY PROCESS GAS FLOW 6 Press FANS PRE PURGE CYCLES 7 Follow prompted manual steps on CHANGE CYLINDER a EN POST CHANGE CYCLES ROUGH LINE EVAC LAMP TEST CAB CONFIGURATION a VERSION 15 1 ua FILE V1_4LMXx0 The following valves will sequence on the display during the high pressure purge cycles First the tubing between the high pressure valve V 2 and the process cylinder valve is evacuated The valves will look like the illustration on the right PROCESS PURGE gt lt OPEN P lt CLOSED RED GREEN Revision B April 1995 3 17 Gasguard 450 System Operation Manual The high pressure tubing will then be flush purged HOUSE pq The valves will appear as illustrated to the right PROCESS PURGE CE gt lt OPEN P lt CLOSED RED GREEN The tubing will then be pressurized with purge gas The valves will appear as illustrated to the right This sequence of evacua
17. could linger even after the source has been shut off Never tie into an oxygen system for personnel breathing purposes Air Products and Chemicals Inc 1 12 Section 1 Safety A list of oxidizers used in the Gasguard 450 system follows Chlorine Nitrogen trifluoride Chlorine trifluoride Nitrous oxide Fluorine Oxygen 1 3 5 Inert Gas Hazards High concentrations of nitrogen helium or other inert gases can cause an oxygen A WARNING deficient atmosphere in a confined area which can cause DEATH All personnel must read and understand the Material Safety Data Sheet s MSDS for the specific gas es being used Oxygen concentrations of 19 5 or less can greatly increase the hazard of asphyxiation to personnel Before working in an area where nitrogen helium or other inert gases could be present check the area with an oxygen monitor to be sure the oxygen concentration is between 19 5 and 23 While working in the area the oxygen concentration needs to be monitored with a continuous oxygen monitor Always provide adequate ventilation in the work area to decrease the risk of an oxygen deficient atmosphere Read APCI Safetygram 17 Dangers of Oxygen Deficient Atmospheres included in the safety literature in Section 1 8 of this manual Any time an oxygen deficient atmosphere is suspected the proper personal protective equipment must be used See the information on personal protective equipment in Section 1 2 on page 1 6 for de
18. each alarm You may not change the delay times Air Products and Chemicals Inc 3 38 Section 3 Operating Procedures Display Analog This option displays a list of analog inputs and indicates with a Y or N whether the input is displayed on the LCD screen This option is display only Analog Scaling This option displays the following information about each analog input Input used Yor N Range 4 20 mA Minimum 0 00 Maximum 0 00 You may not change this list APCI Setpoints This option displays the Air Products configurable alarm setpoints You may not alter these setpoints Test Analog In This option displays a list of the analog inputs and their current values The current value may be used to determine if the analog device is providing accurate output controller input Test Digital In This option displays a list of the digital inputs and their current state The state may be used to determine if the digital device is operating properly This screen is very useful for system testing and troubleshooting Revision B April 1995 3 39 Gasguard 450 System Operation Manual Test Digital Out This option displays a list of the digital outputs and their current values Outputs may be forced on energized or off deenergized to determine if the output is operating properly This file operates in a similar manner to Manual Mode operation as described in Section 3 5 It is the customer s responsibility to
19. in Section 1 2 on page 1 6 A list of inert gases used in the Gasguard 450 system follows Argon Halocarbon 115 Carbon Dioxide Halocarbon 116 Halocarbon 11 Helium Halocarbon 12 Krypton Halocarbon 13 Neon Halocarbon 14 Nitrogen Halocarbon 22 Perfluoropropane Halocarbon 23 Sulfur Hexafluoride Halocarbon 113 Xenon Air Products and Chemicals Inc 1 14 Section 1 Safety Any gas in addition to those listed above used in the Gasguard 450 gas cabinet could A WARNING potentially displace the oxygen in the air and cause asphyxiation 1 3 6 Pressurized Gases Pressurized gas lines can injure personnel A WARNING and damage equipment Never tighten or loosen a fitting when it is under pressure The process and purge gas cylinders can contain pressures up to 2640 psig A leak from a loose mechanical fitting component or a ruptured failed component can expose the operator to a high pressure gas stream or projectile Read the cylinder handling warnings in Section 1 3 7 and the safety literature on cylinder handling in Section 1 7 The house nitrogen supply lines can contain pressures of 100 psig Exercise care when working around these lines Insure that pressure has been vented before breaking any connection Tag out and lock out the line before doing any work Follow Typical Minimal Lockout or Tagout System Procedures described by Occupational Safety and Health Admin Labor Para 1910 147 found in Section 1 4 of this
20. manual 1 3 7 Cylinder Handling Hazards 7 WARNING High pressure gas cylinders can be extremely hazardous when not handled properly Proper training maintenance leak testing and mechanical connection procedures can prevent operators from being exposed to high pressure gas streams Use the cylinder change out procedures in Section 3 3 2 Process Cylinder Procedures of this manual e Do not use a wrench or other device to close diaphragm type cylinder valves This could cause diaphragm rupture and valve failure which Revision B April 1995 1 15 Gasguard 450 System Operation Manual could result in personal injury or death Contact your gas supplier for the maximum torque ft Ibs allowed on diaphragm type cylinder valves Certain gases are supplied with cylinder valves without handwheels Use only the tool specified by your gas supplier to open and close diaphragm type cylinder valves to avoid over torquing these valves e Ifacylinder valve protection cap is extremely difficult to remove do not apply excessive force or pry the cap loose Attach a label to the cylinder identifying the problem and notify the personnel responsible for returning cylinders about the defective cylinder Obtain another cylinder Do not attempt to open a frozen cap as this would damage the cylinder valve and could result in personal injury or death e Do not rotate the cylinder using the cylinder valve handle This may open the cylinder val
21. manual OR OR Cylinder valve is not open Ensure cylinder valve is open 4 6 4 Low Vacuum at PT 1 Probable Cause Corrective Action Vacuum at PT 1 lt 5 PSIG due to Verify Venturi supply is 75 95 PSIG Vacuum Venturi supply pressure or and that a flow rate of 50 60 SLPM flow requirement is insufficient can be achieved OR OR PT 1 path to vent is isolated either Visually inspect the panel for a closed from a closed manual valve or an air manual valve in the path to vent and operated valve in this path not verify 75 95 PSIG of pneumatic supply actuating pressure is being supplied to the controller 4 6 5 Low Purge Pressure at PT 1 Probable Cause Corrective Action Purge pressure at PT 1 is less than 70 Increase purge delivery to 80 90 PSIG PSIG due to low purge delivery pressure Revision B April 1995 4 7 Gasguard 450 System Operation Manual 4 6 6 High Pressure at Cylinder Connection Diss CGA Keyed VCR etc Probable Cause Process cylinder valve was accidentally opened prior to starting the change cylinder sequence or the post purge sequence 4 6 7 Standby Leak Detected Probable Cause Used on Auto Crossover Systems Only This alarm monitors process gas retention while a panel is on Stand by Probable causes are V 3 V 5 or V 6 are leaking across the seat 4 6 8 CGA Leaking Probable Cause Process gas CGA connection not properly tightened Air Products and Chemicals Inc Corrective A
22. mark the cylinder FAULTY BAD CYLINDER CONNECTION Revision B April 1995 3 13 Gasguard 450 System Operation Manual 7 With suitable means helium mass spectrometer thermal conductivity detector or liquid leak detector as specified for area inspect the cylinder connection and pigtail connection for leakage Pay particular attention to the point where the nipple passes through the nut 3 3 1 4 Putting Purge Gas Cylinder On Stream 1 Open access window and open purge cylinder valve 2 Slowly open manual valve MV 13 and quickly close to remove air from pigtail 3 Slowly open manual isolation valve MV 10 to regulator 4 Adjust the purge gas regulator PCV 2 to 80 90 psig delivery pressure PI 4 or PT 4 5 Open manual valve MV 11 if present 6 Close access window 7 The inert purge gas system is now ready for use Air Products and Chemicals Inc 3 14 Section 3 Operating Procedures 3 3 2 Process Gas Cylinder Procedures 3 3 2 1 Empty Process Gas Cylinder Removal Prior to Removal This procedure assumes that a process gas cylinder and an inert purge gas cylinder are in place and operating 7 INU Before approaching a hazardous gas cabinet for a cylinder change verify that there are no alarm labels displayed on the LCD and that the exhaust system is functioning correctly Only operators trained in these procedures and the Gasguard 450 hazardous gas system are permitted to change cylinders The
23. purging requirements for use in NEC Class I Division II hazardous location Type Z purge does not meet Class I Division I NEC requirements 6 Press SNS and to initialize the controller on power up No alarms should be present If alarms are present and cannot be cleared by pressing Air Products and Chemicals Inc 3 28 Section 3 Operating Procedures and then ESI _ do not continue Follow the troubleshooting procedures i in Section 4 If needed contact your Air Products factory representative for assistance 7 Check that all automatic valves indicate closed position Green They should appear as illustrated to the right 8 Check that regulators are closed knob rotated fully counterclockwise 9 Ensure the process pigtail connection cap plug is installed and tight S PUR 10 Install an inert purge gas cylinder START POWER in the cabinet Refer to Section 3 3 1 2 Full Purge Gas Cylinder Installation gt lt OPEN P lt CLOSED RED GREEN 11 Select Menu and enter the password 12 On the Main Menu screen highlight PRE PURGE CYCLES 13 Press MN ee 14 Follow the prompts on the screen Revision B April 1995 3 29 Gasguard 450 System Operation M R miN PROCESS GAS FLOW PRE PURGE CYCLES CHANGE CYLI NDER POST CHANGE CYCLES ROUGH LI NE EVAC LAMP TEST CAB CONFI GURATI ON VERSI ON 15 1 FILE V1_4LMXO Air Products and Chemicals Inc 3 30 Section 3 Op
24. replaced by a similar part provided that Buyer gives Seller immediate written notice upon the discovery of any defective or damaged items whereupon Seller shall have the option of requiring the return of the defective material to establish the claim This warranty is expressly conditioned upon installation of the Equipment in accordance with the Equipment drawings and instructions of the Seller and upon Buyer availing itself of the services of Seller s installation and startup advisors to ensure the correct installation and successful operation of the equipment As to all apparatus and products not manufactured by Seller which are component parts of the Equipment furnished by Seller Seller s only obligation shall be to obtain for Buyer such warranties or guarantees are obtainable from the manufacturer s Such warranties or guarantees shall extend over the longest period of time obtainable in this instance without payment by Seller of additional consideration therefor and Seller shall use reasonable efforts to require its vendors to fulfill obligations of their warranties of guarantees on such apparatus or products furnished in connection with this quotation or any contract resulting therefore The replacement or repair of defective parts as aforesaid shall be Buyer s only remedy for breach of the material and workmanship warranties of Seller As to the Equipment of other manufacturers resort shall be had against such manufacturers only No al
25. valves and safety purity components such as filters and purifiers Pneumatic valves are used to shut off process gas flow to control purge gas flow into the process panel to vent process gas and purge gas from the panel and to feed inert gas to the vacuum venturi system Check valves are used as backup to prevent process gas flow into the purge gas panel and back into a house nitrogen venturi supply and to prevent contamination of the panel from the exhaust system Safety relief valves if installed are used to prevent overpressure of the process line and downstream equipment and to protect the inert gas purge system Pressure transducers and switches and excess flow sensors are used in conjunction with a controller to provide immediate shutoff if a hazardous situation is detected All components and tubing are type 316L stainless steel Hastelloy C 22 trim is used in corrosive gas regulators All components handling the process gas or purge gas are welded into the system or use Cajon VCR fittings or equivalent The panels are connected to the gas cylinder by a stainless steel pigtail and a CGA or DISS fitting that is defined specifically for each type of gas A flow restricting orifice may be installed in the cylinder valve or pigtail nipple to minimize hazardous gas flow from the cylinder in the event of a downstream catastrophic failure 2 4 Inert Gas Purge Panel This panel controls the pressure and flow of purge gas to the hazardous gas p
26. 18 to 1 21 of this manual to prevent opening while service is being performed Once the repairs have been made follow the start up procedure in Section 3 4 of this manual Revision B April 1995 4 1 Gasguard 450 System Operation Manual This section explains how you can identify malfunctions present in the system The format of this section is the presentation of a problem possible cause and possible solutions Before performing troubleshooting review A MANANE the Safety section and read the warnings on page 4 1 If at any time during troubleshooting you are unsure what to do next DO NOT CONTINUE Contact Air Products and Chemicals 4 1 System Shut Down No Lights on Controller Possible Source of Problem Test Solution Electrical power failure Check power supply to Restore specified power system to electrical control panel Check fuses Replace as required 4 2 No or Low Purge Gas Pressure Possible Source of Problem Test Solution Closed purge gas cylinder Check position of cylinder Open cylinder valve valve valve pressure should indicate the current purge cylinder pressure Low purge gas cylinder Check cylinder pressure Change cylinder pressure following Cylinder Change Out Procedures found in Section 3 3 1 of this manual Air Products and Chemicals Inc 4 2 Section 4 Troubleshooting Possible Source of Problem Instrument nitrogen supply not adequate Purge gas pressure regulator se
27. 2 System Description 2 2 Rack Systems A Rack System is a free standing open platform for inert and silane gas handling systems Its design will accommodate process and purge panels gas cylinder and a controller No exhaust hook up is required The use of a rack system for silane distribution is the preferred alternative to gas cabinets that minimizes the potential for silane pocketing and subsequent explosion NFPA 318 and UFC 80 1 lend insight into open rack design In addition any local building codes need to be followed when considering the use of a rack system A typical rack system is shown in Figure 2 2 Controller Process and Purge Panels Figure 2 2 Typical Rack System Revision B April 1995 2 3 Gasguard 450 System Operation Manual 2 3 Hazardous Gas Panel The Hazardous Gas Panel is used to perform the following functions e Regulate cylinder pressure to the process tool working pressure e Remove hazardous process gas from the panel prior to changing the process cylinder e Provide immediate shut off in a hazardous situation using fail safe pneumatic valves optional if required for the specific gas e Maintain process tubing purity during process cylinder change The panel may include pneumatic valves manual valves pressure transducers pressure gauges pressure regulators check valves relief
28. 3 5 Inert Gas Hazards 2 602 SA eee E A AERES 1 13 1 3 6 Pressurized Gases isnisennssnnnniiinsnsiesinnnan ute 1 15 1 3 7 Cylinder Handling Hazards 2 ccc oie nencce dete aeittaaleteaees 1 15 1 3 8 Electrical Aza 224 asi d ise ecesanta is 1 17 1 4 Typical Minimal Lockout or Tagout System Procedures cee eeeeeeeeeee 1 18 L 5 Safety Signs and Labels vsccsissessetsssccessivererisassnsclsisasyansntvevaceassssteonsncoaanesebinedoss 1 22 IG Equipments alety Features 22s fou heeds ative i aed aoe aes 1 28 1 7 Safety Literature for Handling and Use of Gas Cylinders eee 1 30 1 8 Safety Literature for Handling and Use of Instrument Nitrogen Supply 1 30 SECH OM 2S VSLEM Desctiptl h reiini e ss uescaeassvqels ta ien TE aE GEG ie 2 1 Dol Gas Cabinet sssini asese ann ESE EA A abel ENa Eaa 2 1 2 2 Rack Syste MS snan e ce St ale aes eee hie Ba ewe S 2 3 2 3 Hazard s Gras Paine lic toot ace tees ge ce tin al ac ie aloes ater ct ae 2 4 2A ANGI Gas P rse PANG coi elie a ins an iadi dau Gea aaO R a eis 2 4 2 IMtercCOnMeCting Piping si jsieisiesiaievsvsdcavrsasiaaes ebededasaseadtatesd araa R 2 5 20 AULO SWiLChOVEr SysteMi earnen a ee eee eaten 2 6 2 7 Panel Schematic and Component Descriptions eecceeeseeeeeeeeeeeteeeeneeees 2 7 2 9 Grassuard 450 C OMmo ler scii sansene teaa a a eaaa siai 2 13 2 8 1 Controller Components icc sisigercsassnccseasesjaedaaveraceasdcsscanrecoaanesebanedens 2 13 2 9 Mam Ment Opi Onis msr e a a
29. 4 Low Vacuum at PT 1 oeseseeseeeseseeesesessesrersreseserssresseserssresseseresresse 4 7 4 65 Low Puree Pressure at PT linie de neee aE a E 4 7 4 6 6 High Pressure at Cylinder Connection Diss CGA Keyed VER Ete Jenera aa a a e o ca Sat aa a aeie 4 8 4 6 7 Standby Leak Detected iis lt s ccanstbetsaceadetanaceusisaceantesemdicien aaa nace 4 8 4 6 8 CGA Leaking sssrinin nat iiias e asia Si aae 4 8 O VME Le ALIN a ticle a E E E E E E 4 9 4 6 10 High Process Delivery Pressure or Very High Process Delivery Pressure donei e ee oe Gn eae a aas 4 9 4 6 11 Low Process Delivery or Very Low Process Delivery 4 4 9 46 12 Low Vacuumat PT 2 occa auger a acs vetieadssah net Sarton athe 4 10 4 6 13 Low Purge Pressure at PT 2 4 0 csscccasetesesdeasteaccevenscenswencentecdenanie 4 10 4 6 14 Low Purge Cylinder Pressure or Very Low Purge Cylinder PHOSSUNC 25 c0ees ois voles E 4 10 4 6 13 Low Purge Delivery Pressure 255 lt dssvesandendagncia cen eedouels co eveuses 4 11 4 6 16 High Purge Delivery Pressure nnssnsseessessseeeseeessseessresseesseesseee 4 11 4 6 17 High Vent Presse sainia aa i aiae iia 4 11 4 6 18 Low Vacuum Generated PT 5 oo eee eeseceseeeeeeeeseeenaeeneensees 4 12 4 6 19 High Purge Delivery PT 8 or Very High Purge Delivery PD Be possess EEEE estas Taha ath E OT 4 12 4 6 20 Low Cylinder Weight or Very Low Cylinder Weight 00 4 12 Section 5 Maintenance 105 221 hide ntintntianin isa EEEE iia eau eles 5 1
30. 450 System Operation Manual MV 11 Low Pressure Purge Gas Isolation Valve Optional This manual valve isolates the purge gas pressure regulator from the downstream components MV 12 Purge Gas Purifier Isolation Valve Optional This manual valve isolates the purge purifier from the process panel MV 13 Purge Gas Vent Valve This manual valve is used to remove air from the purge cylinder connection after purge cylinder installation MV 14 Process Purifier Isolation Valve Optional This manual valve isolates the process purifier inlet from process gas MV 15 Process Purifier Bypass Valve Optional This manual valve allows process purge or test gases to bypass the process purifier when open It is used in conjunction with MV 14 and MV 16 It should be closed during normal process gas flow MV 16 Process Purifier Isolation Valve Optional This manual valve isolates the purifier outlet from process gas MV 17 Process Purifier Inlet Valve Optional This manual valve isolates the purifier when removed from the system MV 18 Process Purifier Outlet Valve Optional This manual valve isolates the purifier when removed from the system MV 19 Purge Purifier Inlet Valve Optional This manual valve isolates the purifier when removed from the system Air Products and Chemicals Inc 2 10 Section 2 System Description MV 20 Purge Purifier Outlet Valve Optional This manual valve isolates the purifier when removed from th
31. 892 7772 5341 Industrial Oaks Boulevard Austin Texas 78735 8811 Southwest Air Products and Chemicals Inc 602 813 8430 150 E Alamo Street Suite 9 alternate 602 968 4494 Chandler Arizona 85225 West Air Products and Chemicals Inc 408 453 2432 2186 Paragon Drive San Jose California 95131 Air Products and Chemicals Inc Page i ii Introduction Technical Support Normal Operation 08 00 to 17 00 except Friday 08 00 to 16 30 European Community Air Products and Chemicals Inc 32 2 725 95 80 The Equipment Centre Leuvnesesteenweg 48C 1932 St Stevens Woluwe Belgium Fax 32 2 725 97 80 Revision B April 1995 Page i iii Gasguard 450 System Operation Manual Table of Contents Titrod ct oss ss faa Sates lo a nd Seagate peasants ope ote andes aha eters A i vii Section LS Safety ennnen e a e ESE es E EE a E 1 1 1 1 Important Safety W arin eS lt i soi ccnsatscqstenisevcata goetucs da dondoudueaedeivandseagargeaaeee es 1 1 1 2 Personal Protective Equipment iy cccssessssacassaccesiscccsieaspenaddessdccuvessocsavesdunaceans 1 2 1 3 Ha zard WW AU GS 5c heeded ie ated a a See a a 1 6 MSL Tome Gas Pazar sev c5 3 usec ccauhh ined scans eet eal eee 1 7 1 3 2 Corrosive Gas Hazards cic dicpe is ectstasneenisieeis a eeretieeciiiiwteeidel 1 8 1 3 3 Flammable and Pyrophoric Gas Hazards ceeceeeeeseeeseeeneeeeees 1 9 1 3 4 Oxygen and Other Oxidizer Hazards ccceescceesseceeeseeeesteeeeneees 1 11 1
32. ABOVE GAS LABEL IF NOT OTHER HAZARDS MAY BE PRESENT VISUALLY INSPECT CABINET AND GAS HANDLING EQUIPMENT THROUGH THE WINDOW FOR SIGNS OF LEAKAGE CORROSION OR MECHANICAL FAILURE IF PRESENT CONTACT SUPERVISOR PURGE THE EQUIPMENT WITH INERT GAS BEFORE CHANGING CYLINDER OR MAKING REPAIRS CHECK CYLINDER VALVE CONNECTION FOR LEAKS AFTER CHANGING CYLINDER CHECK GAS HANDLING EQUIPMENT FOR LEAKS AFTER MAINTENANCE OR IF THE CABINET HAS BEEN PHYSICALLY DISTURBED CLOSE CYLINDER VALVE WHEN NOT IN USE AND WHEN EMPTY IN AN EMERGENCY CONTACT YOUR SUPERVISOR IF THE CYLINDER IS LEAKING OR IF FURTHER ASSISTANCE IS REQUIRED CALL THE AIR PRODUCTS EMERGENCY RESPONSE PHONE NUMBERS 800 523 9374 Continental USA Canada Puerto Rico 610 481 7711 All other locations AIR PRODUCTS AND CHEMICALS INC SEMICONDUCTOR EQUIPMENT MANUFACTURING CENTER 1919 VULTEE STREET ALLENTOWN PA 18103 Air Products and Chemicals Inc Section 1 Safety The following sign is located on the Gasguard 450 controller This label is required if the area the cabinet is installed is Class I Division II rated ENCLOSURE SHALL NOT BE OPENED UNLESS AREA IS KNOWN TO BE NON HAZARDOUS OR UNLESS THE POWER HAS BEEN REMOVED FROM ALL DEVICES WITHIN THE ENCLOSURE POWER SHALL NOT BE RESTORED AFTER ENCLOSURE HAS BEEN OPENED UNTIL ENCLOSURE HAS BEEN PURGED FOR 10 MIN The following eleven labels are specific to the gases being used They
33. OUGH LI NE EVAC highlighted sequence LAMP TEST CAB CONFI GURATI ON VERSI ON 15 1 FILE V1_4LMXO CPU EPROM VERSION PROGRAM FILE NAME Revision B April 1995 3 9 Gasguard 450 System Operation Manual 3 3 Process and Purge Cylinder Procedures Prior to performing process or purge cylinder procedures read and understand Compressed Gas Association Technical Bulletin CGA TB 9 1993 Guidelines for the Proper Handling and Use of the CGA Series Ultra High Integrity Service Connections Only operators trained in the following A MANNIN procedures and the hazardous gas system are allowed to change cylinders High pressure gas cylinders can be extremely hazardous when not handled properly Follow the procedures in this section to prevent personal injury or death A WARNING The procedures listed in this section are intended to be used in conjunction with the A WARNING purge and cylinder change functions of the cabinet controller Do not use these procedures independently 3 3 1 Inert Purge Gas Cylinder Change Procedure This procedure will normally be done after PRE PURGE CYCLES in conjunction with a process gas cylinder change Before approaching a hazardous gas cabinet for a cylinder change verify that A AAU ADLET there are no alarm labels displayed on the LCD and that the exhaust system is functioning correctly Only operators trained in these procedures and the hazardous gas system are al
34. Operation and Maintenance Manual for the Gasguard 450 Automatic Gas Cabinet and Purge Panel System for Hazardous Cylinder Gases Commodity Number 809 602775B Revision B April 4 1995 Air Products and Chemicals Inc 1919 Vultee Street Allentown PA 18103 proouSll Operation and Maintenance Manual Matrix Sheet for the Gasguard 450 Automatic Gas Cabinet and Purge Panel Systems Commodity Number 809 602775B Revision B April 1995 Revision Reason for Manual Section Level Revision Cover and Front B General Revision Introduction B General Revision Section 1 Safety B General Revision Section 2 System Description B General Revision Section 3 Operating Procedures B General Revision Section 4 Troubleshooting B General Revision Section 5 Maintenance B General Revision Section 6 System Specific Information B General Revision Introduction Important Safety Information Read and understand the safety section found on pages 1 1 to 1 30 of this manual before working with the system Failure to do so can result in personal injury or death Warnings Warnings like the sample shown below are found throughout the manual to point out hazards which could cause personal injury or death if proper procedures are not followed The operator MUST read and understand the safety section before operating the WARNING system All operating and maintenance y p g personnel must receive training and instruction by Air Produ
35. S construction zones whether or not they appear on the following lists See the tables on the following pages for the classification of gases typically used in the Gasguard 450 system e Toxic Gases page 1 8 e Corrosive Gases page 1 9 e Pyrophoric Gases page 1 11 e Flammable Gases page 1 11 e Oxidizers page 1 13 e nerts page 1 14 If you are unsure what personal protective equipment list to follow for the gases being A WARNING used DO NOT continue Failure to understand the hazards and use the proper personal protective equipment may cause INJURY or DEATH Contact Air Products and Chemicals Inc for the gas category Air Products and Chemicals Inc 1 4 Section 1 Safety Personal Protective Equipment for the gas categories follows Personal Protective Equipment for Toxics e Toxic gas leak detection ex MDA e Self contained positive pressure breathing apparatus e Long sleeved Nomex suit e Safety glasses with side shields e Leather gloves e Safety shoes NOTE Most highly toxics diborane germane phosphine are also flammable Nomex suit is not required for non flammable toxics ex nitrogen dioxide boron trifluoride All gases in Section 1 5 using the warning sign with POISON GAS on the left and FLAMMABLE GAS on the right REQUIRE the Nomex suit Personal Protective Equipment for Corrosives e Corrosive gas leak detector ex MDA e Self contained positive pressure breathing apparatus e Level C acid s
36. aintenance is complete and equipment is ready for normal production operations check the area around the machines or equipment to ensure that no one is exposed 2 After all tools have been removed from the machine or equipment guards have been reinstalled and employees are in the clear remove all lockout or tagout devices Operate the energy isolating devices to restore energy to the machine or equipment Procedure Involving More Than One Person In the preceding steps if more than one individual is required to lockout or tagout equipment each shall place his her own personal lockout device on the energy isolating devices s When an energy isolating device cannot accept multiple locks or tags a multiple lockout or tagout device HASP may be used If lockout is used a single lock may be used to lockout the machine or equipment with the key being placed in a lockout box or cabinet which allows the use of multiple locks to secure it Each employee will then use his her own lock to secure the box or cabinet As each person no longer needs to maintain his her lockout protection that person will remove his her lock from the box or cabinet Name s Job title s of employees authorized for group lockout or tagout Basic Rules for Using Lockout or Tagout System Procedure All equipment shall be locked or tagged out to protect against accidental or inadvertent operating when such operation could cause injury to personnel Do not attempt to opera
37. alve This pneumatic valve isolates the gas cabinet piping from the facility process piping Revision B April 1995 Gasguard 450 System Operation Manual V 4 Purge Gas Inlet Valve On Pigtail This pneumatic valve controls the on off flow of purge gas to the high pressure side of the process panel and pigtail V 5 High Pressure Vent Valve This pneumatic valve permits flow from the high pressure portion of the panel to vent V 6 Low Pressure Vent Valve This pneumatic valve permits flow from the low pressure portion of the panel to vent V 7 Vacuum Venturi Supply Valve This pneumatic valve uses house nitrogen flow to create a vacuum to evacuate the process piping during purge sequences V 8 V 0 Process Cylinder Valve This valve located on the process cylinder is opened to allow process gas to flow from the cylinder to the pigtail If the valve is pneumatically operated it will automatically close on shutdown alarms Solenoid valve V 8 in the controller is used to supply the pneumatic cylinder valve if present V 9 Trickle Purge Valve On Pigtail Optional This pneumatic valve is used in series with V 4 to provide a trickle purge from an open pigtail connection during cylinder change The valve has a small orifice which allows a continuous flow of purge gas when it is closed and V 4 is open PT 1 Process Cylinder Pressure Transducer This transducer measures the process gas pressure at the cylinder outlet
38. anel during the purge sequence and cylinder change out procedure The panel is constructed using similar materials and techniques as the hazardous gas panel Air Products and Chemicals Inc 2 4 Section 2 System Description 2 5 Interconnecting Piping Exterior tubing terminates above the top of the cabinet and is prepared for butt welding to customer lines by orbital tube welding equipment The purge panel is connected to the process panel thereby avoiding any field piping work within the cabinet Vent lines and safety relief valves are joined together and terminated outside the cabinet for connection to the customer s pollution abatement system See Figure 2 3 below for a typical gas cabinet panel layout Figure 2 3 Typical Gasguard 450 Back Panel Revision B April 1995 2 5 Gasguard 450 System Operation Manual 2 6 Auto Switchover System Minimum hardware requirements for the automatic switchover system are a dual Gasguard 450 controller or two single Gasguard 450 controllers configured as such and two process gas panels sharing the process out piping Process gas switchover between right and left cylinders is initiated by either a low process gas cylinder pressure or weight on liquid cylinders This switchover setpoint is set and entered by the customer Switchover can be induced prematurely by the operator simply by stopping gas flow on the cylinder which is currentl
39. ass Valve 80 ft Ibs SS CGA to SS Valve 90 ft Ibs DISS CGA to DISS Valve 35 ft Ibs 11 Close cabinet door 12 The system is now ready for POST PURGE CYCLES Do not open cylinder valve at this time A cylinder connection leak check must be WARNING completed first followed by the Post Purge procedure 3 3 2 4 Full Process Cylinder Purge After Installation 1 On the Main Menu screen highlight POST PURGE lt STANDARD 450 GAS ee RRRA MAIN MENU ERE 2 Press Eia RETURN TO DISPLAY E PROCESS GAS FLOW 3 Follow any steps that may be PRE PURGE CYCLES prompted on the screen CHANGE CYLINDER C POST PURGE CYCLES ROUGH LINE EVAC LAMP TEST CAB CONFIGURATION oe VERSION 15 1 a FILE V1_4LMXO Revision B April 1995 3 23 Gasguard 450 System Operation Manual The following valves will sequence on the display during the high pressure cycles First the tubing between the high pressure valve V 2 and the process cylinder valve is evacuated The valves will look like the illustration on the right PROCESS PURGE CE gt lt OPEN P lt CLOSED RED GREEN Air Products and Chemicals Inc 3 24 Section 3 Operating Procedures The high pressure tubing will then be flush purged The valves will appear as illustrated to the right PROCESS PURGE P lt OPEN P lt CLOSED RED GREEN The tubing will then be pressurized with purge gas The valves will appear as illustrated to th
40. ction Ensure the process cylinder valve is closed and enter the Manual Mode file according to the steps in Section 4 of this manual and evacuate by opening V 7 V 5 and V 1 until PT 1 is less than 5 PSIG reinitiate the sequence Corrective Action Remove pneumatic line hoses from these valves and verify absence of pressure If pressure is present this indicates a solenoid failure Contact your Air Products Technical Representative Perform a pre purge sequence with the purpose of removing any debris that may be on the seat of the valves Corrective Action Personal protective equipment PPE MUST be worn when a leak is suspected Appropriate PPE is detailed in Section 1 2 of this manual Tighten pigtail cylinder connection per torque guideline Section 3 3 2 3 If leak persists advise supervisor or contact APCI Section 4 Troubleshooting 4 6 9 Cylinder Leaking Probable Cause Process cylinder valve not completely closed Corrective Action Close cylinder valve Do not overtorque Reinitiate program sequence If failed assume cylinder valve is leaking and take appropriate emergency response PT 2 Process Delivery Transducer Alarms The following are possible process delivery transducer alarms 4 6 10 High Process Delivery Pressure or Very High Process Delivery Pressure Probable Cause Process delivery pressure exceeded the high and very high setpoints Corrective Action Decrease the process pr
41. cts and Chemicals Inc System Hazards Possible hazards when working with this system are exposure to e Toxic Gas Hazards e Inert Gas Hazards e Corrosive Gas Hazards e Pressurized Gases e Flammable Gas Hazards e Cylinder Handling Hazards e Oxidizer Hazards e Electrical Hazard Do not make any changes to the equipment independently Injury or death may result A MANAN eg from unauthorized modifications If equipment needs to be modified an Air Products Representative MUST be contacted Revision B April 1995 Page i i Gasguard 450 System Operation Manual Air Products Support Systems Emergency Response 24 Hour Service If an emergency occurs that cannot be alleviated by the trained operator or his her supervisor call Air Products and Chemicals Inc on one of these telephone numbers e From anywhere in the continental United States Canada and Puerto Rico 800 523 9374 toll free e From all other locations 610 481 7711 e FAX 610 481 3772 e APCI Operator 610 481 4911 e European Community Middle East Gases 32 73 32 949 Technical Support Normal Operation 8 00 a m to 5 00 p m E S T USA Air Products and Chemicals Inc 610 481 3706 Semiconductor Equipment Manufacturing Center 1919 Vultee Street Allentown PA 18103 Regions East Air Products and Chemicals Inc 610 481 2628 A5 2 2 7201 Hamilton Boulevard Allentown PA 18195 1501 Mid America Air Products and Chemicals Inc 512
42. d you need to obtain this information Before performing troubleshooting review A MANANE the Safety section and read the warnings on page 4 1 If at any time during troubleshooting you are unsure what to do next DO NOT CONTINUE Contact Air Products and Chemicals NOTE Contact Air Products and Chemicals if the alarm displayed on the screen does not appear in this section NOTE Contact Air Products and Chemicals for the procedure for calibrating the Span transducer 4 6 1 Excess Flow Probable Cause Corrective Action High process gas flow due to Examine process gas system to locate mechanical failure or product surge cause of signal Excess flow switch stuck in the open Perform purge cycles in accordance position due to contamination or with Section 3 3 2 1 to attempt to corrosion remove any residual build up in switch 4 6 2 Low Pneumatic Pressure Probable Cause Corrective Action Pneumatic supply to the controller is Adjust pneumatic pressure to the less than 65 PSIG controller to 75 95 PSIG Air Products and Chemicals Inc 4 6 Section 4 Troubleshooting PT 1 Process Cylinder Transducer Alarms The following are possible process cylinder transducer alarms 4 6 3 Low Process Cylinder Pressure or Very Low Process Cylinder Pressure Probable Cause Corrective Action Process cylinder is below the low Follow the process cylinder change out and or very low setpoint procedure found in Section 3 3 2 of this
43. dures are included 3 1 Emergency Shutdown Procedures 3 2 Operation of the Cabinet Controller 3 3 Purge and Process Cylinder Procedures 3 4 New System Start Up Procedure 3 5 Manual Operation 3 6 Cabinet Configuration Be sure you have read and understood the safety information located in Section 1 of this manual before operating the system You should also be familiar with the location and function of all components This information is located in Section 2 System Description Prior to operating the system the proper A MANNINN e installation procedures need to be completed This information is found in the Installation Manual for the Gasguard 450 Gas Cabinet and Purge Panel Systems Revision B April 1995 3 1 Gasguard 450 System Operation Manual The gases being used in this equipment may be extremely hazardous It is the A AFA AANER customer s responsibility to assure that only experienced trained operators thoroughly familiar with this manual the equipment and operating procedures the hazards and the safety procedures are permitted to operate this system Air Products and Chemicals requires the handling of any toxic gas cylinders be performed by two trained operators utilizing self contained breathing apparatus Air Products and Chemicals Inc 3 2 Section 3 Operating Procedures 3 1 Emergency Shutdown Procedures In the event of an emergency press the EMERGENCY STOP pushbutton on
44. e right 27 Record Process Conditions cylinder weight if scale is present PI 1 PI 2 PI 3 and PI 4 on the Process Gas Cylinder Checklist Air Products and Chemicals Inc lt STANDARD 450 GAS e MAIN MENU tok RETURN TO DISPLAY PROCESS GAS FLOW PRE PURGE CYCLES CHANGE CYLINDER POST CHANGE CYCLES ROUGH LINE EVAC LAMP TEST CAB CONFIGURATION e VERSION 15 1 KR FILE V1_4LMXO PROCESS PURGE lt OPEN Pq CLOSED RED GREEN Section 3 Operating Procedures 3 5 Manual Operation Only experienced operators should operate the cabinet in Manual Mode Operating A APA PANEEM LGR valves out of their proper sequence could potentially cause damage to the product by interrupting or providing insufficient gas flow Manual operation should not be used for process gas flow as critical shutdown alarms may be disabled in Manual Mode Manual mode provides a means of flowing purge gas through the purge and process gas panels during cabinet installation and pre start up procedures It also provides a means of flowing purge gas while maintenance or repairs are being performed NOTE Access to Manual Mode is not permitted when certain digital Shutdown alarms are present 3 5 1 How to Operate in Manual Mode Operating in Manual Mode can cause the following hazards which can result in MATADE PERSONAL INJURY OR DEATH Process gas could be forced into the purge panel and or purge gas cylinder Opening purg
45. e system MV 21 Purge Gas Isolation Valve Optional This manual valve is only used when the nitrogen purge panel is external to the cabinet MV 22 Vent Isolation Valve This manual valve isolates the downstream vent system from the high pressure vent side of the process panel It is used when there is a helium leak test port in the high pressure vent downstream of V 5 The valve should be left open except when performing a helium leak test MV 23 Purge Gas Outlet Isolation Valve to Valve Manifold Box This manual valve isolates the gas cabinet purge panel from the downstream purge gas line exiting the cabinet to supply other cabinets or valve manifold boxes MV 31 Leak Test Isolation Optional This manual valve isolates a leak test port typically a VCR connection from the process panel MV 36 Fill Port Isolation Optional This manual valve isolates the fill port typically a VCR connection from the coaxial process line PCV 1 Process Gas Pressure Regulator This regulator controls the pressure of the process gas to the process equipment PCV 2 Purge Gas Pressure Regulator This regulator controls the purge gas pressure Revision B April 1995 2 11 Gasguard 450 System Operation Manual ZH Fs Flow Switch Optional This device senses an excess flow of process gas caused by downstream system failure tubing or component leak valve or regulator failure etc and sends a switch signal to the controller to
46. e authorized employee shall know the type and magnitude of energy that the machine or equipment utilizes and shall understand the hazards thereof 2 If the machine or equipment is operating shut it down by the normal stopping procedure depress stop button open toggle switch etc 3 Operate the switch valve or other energy isolating device s so that the equipment is isolated from its energy source s Stored energy such as that in springs elevated machine members rotating flywheels hydraulic systems and air gas steam or water pressure etc must be dissipated or restrained by methods such as repositioning blocking bleeding down etc Type s of stored energy methods to dissipate or restrain 4 Lockout and or tagout the energy isolating devices with assigned individual lock s or tag s Method s selected i e locks tags additional safety measures etc 5 After ensuring that no personnel are exposed and as a check on having disconnected the energy sources operate the push button or other normal operating controls to make certain the equipment will not operate Type s of equipment checked to ensure disconnections CAUTION RETURN OPERATING CONTROL S TO NEUTRAL OR OFF POSITION AFTER THE TEST 6 The equipment is now locked or tagged out Revision B April 1995 1 19 Gasguard 450 System Operation Manual Restoring Machines or Equipment to Normal Production Operations 1 After the servicing and or m
47. e other keys on the keypad are described below Revision B April 1995 3 5 Gasguard 450 System Operation Manual Acknowledge Key Press this key to silence the horn when any new shutdown or fault alarm occurs Flashing red or yellow LEDs will change to steady on Reset 92338 Key Pressing this key will clear an acknowledged alarm if the alarm condition has been corrected If it is not corrected the controller will re alarm Up Arrow and Down Arrow Keys Use these keys to highlight a menu choice a file from the configuration menu or select a parameter within a configuration file i e user setpoints For dual controllers use these keys to switch between the left and right controllers The left or right side must be selected before entering passwords to select menus A lit LED below the LCD screen indicates whether the left or right side is being displayed on the screen gt ESC MNU Menu swt 4 Keys Press the two keys in sequence and enter the password to display the Main Menu lt ESC MNU Escape smrt T Keys Pressing these two keys in sequence returns the operator to the previous screen when in a multi level screen sequence Enter 3N Key Press this key to enter passwords to select highlighted Main Menu options or configuration files or to enter new operating parameter setpoints etc into system configuration files Start RU Key This key is located below the graphic display Press
48. e panel valves when high pressure process gas is present High pressure gas could be unintentionally vented Opening vent valves when high pressure process gas is present NOTE Due to the potential hazards listed above Manual Mode operation requires a second or higher level security code Revision B April 1995 3 33 Gasguard 450 System Operation Manual NOTE Opening high pressure vent valves when high pressure gas is present could cause damage to the vent line pressure device if installed 1 On dual controllers use the lt STANDARD 450 GAS and keys to activate the left or FEER MAIN MENU kK RETURN TO DISPLAY PROCESS GAS FLOW PRE PURGE CYCLES CHANGE CYLINDER right controller The active side is indicated by an arrow on the screen and a lit yellow LED below the screen POST PURGE CYCLES ROUGH LINE EVAC 2 Press ae then to request LAMP TEST the Main Menu CAB CONFIGURATION VERSION 15 1 ae 3 Type in the password using shifted aa FILE V1 4LMYO and unshifted keys as required Press ENTER 4 From the Main Menu screen highlight CABINET CONFIGURATION 5 Press ENE 6 From the configuration menu highlight lt CAB CONFIGURATION MANUAL MODE a RETURN TO DISPLAY 7 Press NET LIQUID WEIGHT ca USER SETPOINTS 8 Operate valves referring to Section 3 5 2 PURGE PARAMETERS below MANUAL MODE ALARM CONDITION ALARM DELAYS 9 To exit MANUAL MODE press DISPLAY ANALOG then a
49. e right This sequence of evacuation and pressurization will be repeated until the configured number of cycles is completed PROCESS PURGE P lt OPEN P lt CLOSED RED GREEN Revision B April 1995 3 25 Gasguard 450 System Operation Manual 3 3 2 5 Process Gas Flow 1 On the Main Menu screen of the LCD highlight PROCESS GAS FLOW lt STANDARD 450 GAS eek MAIN MENU RAN 2 Press E RETURN TO DISPLAY 3 Follow the steps prompted on the screen PROCESS GAS FLOW eo PRE PURGE CYCLES CHANGE CYLINDER POST CGHANGE CYCLES ROUGH LINE EVAC LAMP TEST CAB CONFIGURATION e VERSION 15 1 ER FILE V1_4LMX0 4 Process gas is now flowing to the process equipment The valves on the graphic display will appear as illustrated to the right Oi t a w P lt OPEN P lt CLOSED RED GREEN PROCESS GAS CYLINDER CHANGE CHECKLIST Air Products and Chemicals Inc 3 26 Section 3 Operating Procedures Customer Cabinet No Gas Service CLOSE CYLINDER VALVE BEFORE STARTING PURGE SEQUENCE WEAR APPROPRIATE PERSONAL PROTECTIVE EQUIPMENT AS DETAILED IN SECTION 1 2 OF THIS MANUAL WHEN CHANGING OR INSTALLING A TOXIC GAS CYLINDER RECHECK THAT CYLINDER VALVE IS TIGHTLY CLOSED BEFORE LOOSENING CGA CONNECTION FROM CYLINDER VALVE Cabinet Interior OK Cabinet Leakage Exhaust Purge Gas Cylinder Corrosion Pressure Weight Operator Initials lac a FE eee Revision B Apr
50. ecbelelieat a vote danas 3 25 3 4 New System Startup Procedures 3s5 scse4 cs ca038 9 ccaesasecedeasdondodasanqads dade consatiawean tee 3 27 3 9 Mantial Operation sesiis tirsir eani a S E aS e e E 3 31 3 5 1 How to Operate in Manual Mode sssssessseeesseeesseesseesserssesssseerssees 3 31 3 5 2 How to Open and Close Valves ss sssnssesssessssseesseesseessersseresseesssees 3 33 3 5 3 General Principles of Manual Operation 0 00 0 eeeeeeeeceeesteeeeeteeees 3 34 3 6 Cabinet Conti Surati Om sesccsaciieassscccazcieasedes se csadecassd cates sdeaesaededadassshadevansdentestebes 3 35 SECHONA TOUTES MO OUTS ear n psa teettiaau tenses E E sat A aol Meena sa easier 4 4 1 System Shut Down No Lights on Controller eee eeeceeeseceeeneeeenteeeeaees 4 2 4 2 No or Low Purge Gas Pressures sc s sca saceto ol onecsiasqiaeeucisaceasdeseeiscione anes 4 2 4 3 No or Low Purge Gas FlOW vics ccvscsasessacaiinicaccstsasasncsgvenccesnaceetenedoaedeawesaceasneoes 4 3 4 4 No or Low Process Gas Pressure eseeeeeseessesersseeesesressrerrssresseeeresressessresees 4 4 4 5 No or Low Process Gas FIOW sssesesesseseesesssesseeseesserersseesrserssresseseresressesseesees 4 4 AAG A eTO Dae IANS goose EE EEEE E EE E EE 4 6 46 1 Excess FIOW s 2ec ehuenindieumalad is aisa 4 6 4 6 2 Low Pneumatic Pressure c g tacts cisest ean uence danese een 4 6 4 6 3 Low Process Cylinder Pressure or Very Low Process Cylinder Pressure senise n e a E EE ENE meats 4 7 4 6
51. ed to prevent your password from being displayed to others Press WSNS POWER UP PASSWORD XXXX PROC DEL PRES 38 80 VAC GENERATOR 12 71 PROC CYL WGHT 61 64 POWER UP Example PROC CY PRES To enter the password A2J7 PROC DEL PRES Press Seer a2 ee ean Note Using numbers only for passwords eliminates the need to use the and keys to enter passwords If an improper password is entered the POVER HN screen will display ACCESS DENI ED PROC DEL PRES 38 80 Note the left arrow in the top left corner VAC GENERATOR 12 71 of the screen If using a dual controller PROC CYL WGHT 61 64 the left arrow would show up if the left side of the controller has keypad access POWER UP or control If the right side has keypad access or control the right arrow on the PROC CYL PRES bottom half of the screen is displayed PROC DEL PRES ESC MNU VAC GENERATOR To change sides use the up PROC CYL WGHT arrow and down arrow keys Air Products and Chemicals Inc 3 8 Section 3 Operating Procedures The right or left side must be selected before requesting the Main Menu and entering your password If the password is correct the lt STANDARD 450 GAS screen will display the main menu k kkk MAI N MENU A eoe Use the PR ana keys PROCESS GAS FLOW to highlight a menu choice PRE PURGE CYCLES i i CHANGE CYLI NDER Press LB to begin the POST CHANGE CYCLES MER R
52. erating Procedures 15 When the screen indicates PRE PURGE CYCLES is complete lt STANDARD 450 GAS highlight CHANGE KAA MAIN MENU kK CYLINDER RETURN TO DISPLAY passa PROCESS GAS FLOW 16 Press FANS PRE PURGE CYCLES 17 Follow the prompts on the screen CHANGE CYLINDER POST CHANGE CYCLES 18 Refer to Section 3 3 2 3 Full ROUGH LINE EVAC Process Gas Cylinder Installation LAMP TEST CAB CONFIGURATION ae VERSION 15 1 me FILE V1_4LMXx0 19 Select Menu and enter the password lt STANDARD 450 GAS 20 Select POST PURGE CYCLES kKkKKK MAIN MENU KKK from the Main Menu RETURN TO DISPLAY SERERE PROCESS GAS FLOW 21 Press BANu PRE PURGE CYCLES 22 Follow any prompts that may be E A on the screen ROUGH LINE EVAC LAMP TEST CAB CONFIGURATION EA VERSION 15 1 FA FILE V1_4LMXO Before proceeding further verify that A MANNINN e process equipment and facility piping is ready to receive process gas Revision B April 1995 3 31 Gasguard 450 System Operation Manual 23 When the screen indicates POST PURGE CYCLES is completed re enter the Main Menu and select PROCESS GAS FLOW 24 Press RINE 25 Adjust the process gas regulator through the access window to the desired delivery pressure 26 Process gas is now flowing to the process equipment NOTE Operator prompts are Flashed on the LCD screen With process gas flowing the valves on the graphic display will appear as illustrated to th
53. essure regulator Observe regulator for proper operation If regulator will not maintain the setpoint it may be creeping Contact your APCI Technical Representative 4 6 11 Low Process Delivery or Very Low Process Delivery Probable Cause Process delivery pressure is below the low and or very low setpoint Revision B April 1995 Corrective Action Adjust process pressure regulator to the desired delivery pressure Gasguard 450 System Operation Manual 4 6 12 Low Vacuum at PT 2 Probable Cause Corrective Action Vacuum at PT 2 is lt 10 PSIG due to Verify Venturi supply is 70 90 PSIG at Vacuum Venturi supply pressure or a deliverable flow rate of 50 60 SLPM flow requirement is insufficient OR OR An air operated valve in the PT 2 path Ensure that 75 95 PSIG of pneumatic to vent is not actuating supply pressure is being supplied to the controller 4 6 13 Low Purge Pressure at PT 2 Probable Cause Corrective Action Purge pressure at PT 2 is lt 10 PSIG Increase purge delivery to 80 90 PSIG due to low purge delivery pressure OR OR Process regulator set to deliver less Increase process regulator to deliver than 10 PSIG more than 10 PSIG PT 3 Purge Cylinder Transducer Alarms The following is a possible purge cylinder transducer alarm 4 6 14 Low Purge Cylinder Pressure or Very Low Purge Cylinder Pressure Probable Cause Corrective Action Purge cylinder pressure is below user Change purge cylinder fo
54. event the danger of a hazardous atmosphere WARNING Before using the system review your company s requirements for use of toxic corrosive flammable pyrophoric MANAN e oxidizers and inert gas cylinders and electrically powered equipment You must be thoroughly trained in your company s safety procedures and safety equipment self contained breathing apparatus emergency shutdown systems plant alarm locations etc Revision B April 1995 1 1 Gasguard 450 System Operation Manual Do not make any changes to the equipment independently INJURY or A VVPANeaNNte g DEATH may result from unauthorized modifications All modifications to equipment MUST be approved in writing by an Air Products and Chemicals Representative 1 2 Personal Protective Equipment Personal protective equipment as defined A WARNING in this section must be worn when working with this system Personal protective equipment is designed to protect personnel from inadvertent risk The listed personal protective equipment must be worn regardless of operator or technician level of training and qualifications The minimum personal protective equipment required for operating and maintaining the Gasguard 450 system is dependent on the hazard category of the gas es being used When a gas meets more than one hazard category the PPE for the most hazardous category must be used Refer to the hazard warnings in Section 1 3 pages 1 6 to 1 17
55. for the hazards of the gas es being used In addition to the personal protective equipment the following safety equipment is highly recommended and is required when APCI personnel operate this equipment This equipment should be supplied by the customer prior to operating the Gasguard 450 system e Safety shower e Emergency phones e Eye wash e Gas leak detection system for gases to be used ex MDA The gas leak detection system needs to warn personnel through visible and audible alarms located near the gas cabinet of a hazardous atmosphere The gas sensor s need to be set up Air Products and Chemicals Inc 1 2 Section 1 Safety to alarm at the lowest level of hazard of exposure Upon activation of an alarm follow the established shutdown procedures for your system e Adequate ventilation as described below The gas cabinet must be connected to an exhaust system that is capable of meeting the following criteria 1 A minimum of 200 feet per minute air velocity must be achieved across an opened access hatch to prevent operator exposure to hazardous gas This velocity must be achieved as an average with 150 feet per minute minimum at any point of the opening 2 A minimum volume of air must flow through the cabinet to prevent a leak of hazardous gas from escaping the cabinet 3 In silane service an air velocity of 200 feet per minute must be achieved across all unwelded fittings per UFC Article 80 Section 8004 1 18
56. from your gas supplier to operate these valves 9 Loosen and remove the pigtail cylinder connection from the gas cylinder using appropriate tools to support the connection and pigtail tubing Note proper direction of rotation fittings with left hand threads have notched hex corners Observe and listen for any sound of gas leakage Close door immediately if the process gas cylinder valve is leaking and evacuate the area Note Portable leak detectors are available for many of the hazardous gases used by the electronics industry It is recommended that these are provided to the operator to detect very small leaks from the cylinder valve at this step 10 Install cylinder valve outlet plug cap securely into onto process cylinder valve outlet This valve outlet cap must be used on all A WARNING toxic corrosive and pyrophoric gases Consult your supplier if there is no cap on these gas cylinders Air Products and Chemicals Inc 3 20 Section 3 Operating Procedures 11 Install pigtail cap plug onto pigtail cylinder connection This step is not necessary if the new cylinder is going to be installed immediately Ne Open gas cabinet door W Loosen cylinder holding strap but do not unbuckle aa Install cylinder valve protection cap 15 Unbuckle cylinder strap and remove cylinder from cabinet 16 Place cylinder in appropriate cart and strap in place Place EMPTY tag on cylinder and return cylinder t
57. he cylinder valve or in the CGA nipple This flow restricting orifice significantly reduces the flow of gas in the event of a failure in the downstream equipment e An ultraviolet infrared UVIR detector is required for pyrophoric gas systems e A temperature switch is a required option for flammable gases e Pressure relief valves may be incorporated into the design to prevent overpressurization of the process line and downstream equipment and to protect the inert purge system Air Products and Chemicals Inc 1 28 Section 1 Safety e Manual operation access is denied during the presence of a digital shutdown alarm e An EMERGENCY STOP pushbutton is located on the controller panel e A password security system prevents unauthorized personnel to operate or modify the Gasguard 450 controller menu Revision B April 1995 1 29 Gasguard 450 System Operation Manual 1 7 Safety Literature for Handling and Use of Gas Cylinders The following safety literature located directly after this page must be read and understood APCI Safetygram 10 Handling Storage and Use of Compressed Gas Cylinders APCI Safetygram 11 Emergency Action in Handling Leaking Compressed Gas Cylinders APCI Safetygram 14 Don t Turn a Cylinder into a Rocket APCI Safetygram 15 Cylinder Safety Devices APCI Safetygram 23 Cylinder Valves Material Safety Data Sheets for all gases used in system 1 8 Safety Literature for Handling and Use of Instrument
58. he key not the key on the keypad Air Products and Chemicals Inc 2 14 Section 2 System Description The Keypad The keypad is located in the center of the controller below the LCD screen The twenty membrane key switches provide a means of selecting controller functions and entering various alarm setpoints When a key is pressed the system responds with a short beep This beep is an acknowledgment to the key press and occurs regardless of the effect of the key press on the system Refer to Section 3 2 Operation of the Cabinet Controller of this manual for information on how to use the keypad Figure 2 7 below shows the keypad Figure 2 7 Gasguard Controller Keypad Revision B April 1995 2 15 Gasguard 450 System Operation Manual Graphic Display The graphic display located on the left side of the cabinet controller provides through a lighted display visual indication of pneumatic valve positions Open valves are shown in red Closed valves are shown in green The valve condition colors conform to ISA standards C CYLINDER Figure 2 8 Gasguard 450 Controller Graphic Additionally LEDs and membrane switches which control the cabinet functions are located below the graphic display The table on the next page describes these switches and their functions Air Products and Chemicals Inc 2 16 Section 2 System Description Switch LED Function SHTDWN This LED flashes red on power up and for an
59. il 1995 3 27 Gasguard 450 System Operation Manual 3 4 New System Startup Procedure If the system is installed in a NEC Class I Division II hazardous location do not A WARNING apply power to the cabinet controller until the controller enclosure has been purged for at least 10 minutes at approximately 6 SCFH Refer to steps 4 and 5 below This complies with NFPA 496 regarding electrical equipment enclosures Failure to do so could result in the ignition of any flammable gas which may be present 1 Verify that the system is ready for startup by completing the startup checklist in the installation manual Check that the Gasguard 450 system and all plant piping have been leak checked with a helium mass spectrometer in accordance with the customer s specified procedure Check that the Gasguard 450 system has been functionally checked after installation 2 Check that the cabinet exhaust system and hazardous gas disposal system pollution abatement are operating 3 Verify that house nitrogen pressure is between 75 95 psig 4 In Class I Division II hazardous locations turn on and adjust purge gas flow to the cabinet controller The flow indicator should indicate approximately 6 SCFH hazardous locations only 5 After purging the controller for at least 10 minutes turn on electrical power to the controller The Gasguard 450 system is supplied with an internal controller purging means that A APA PANTING meets NFPA 496 Type Z
60. l circuits for the system use 115 220 VAC 50 60 Hz Do not attempt to work on the system without first turning the power off and tagging out and locking out the electrical supply disconnect switch per plant lock out procedures Follow the Typical Minimal Lockout or Tagout System Procedures described by Occupational Safety and Health Admin Labor Para 1910 147 found in Section 1 4 of this manual Revision B April 1995 1 17 Gasguard 450 System Operation Manual 1 4 Typical Minimal Lockout or Tagout System Procedures NOTE The following OSHA document is included to help you develop a lockout tagout procedure for the Gasguard 450 System A written procedure is required for any work performed under lockout tagout It must be reviewed approved and understood by all participants who are trained to perform the work Occupational Safety and Health Admin Labor Para 1910 147 General Lockout is the preferred method of isolating machines or equipment from energy sources To assist employers in developing a procedure which meets the requirements of the standard the following simple procedure is provided for use in both lockout and tagout programs This procedure may be used when there are limited number of types of machines or equipment or there is a single power source For a more complex system a more comprehensive procedure will need to be developed documented and utilized Lockout or Tagout Procedure for Name of Company
61. llowing purge setpoint gas cylinder procedures in Section 3 3 1 of this manual Air Products and Chemicals Inc 4 10 Section 4 Troubleshooting PT 4 Purge Delivery Transducer Alarms The following are possible purge delivery transducer alarms 4 6 15 Low Purge Delivery Pressure Probable Cause Purge delivery pressure is below user setpoint Corrective Action Adjust purge gas pressure regulator to the desired pressure Change purge cylinder as required following procedures in Section 3 3 1 in this manual 4 6 16 High Purge Delivery Pressure Probable Cause Purge gas delivery pressure is too high Corrective Action Adjust purge pressure regulator to the desired pressure Observe regulator for proper operation Advise supervisor or contact APCI if regulator will not maintain setpoint PT 5 Vent Line Transducer Alarms The following are possible vent line transducer alarms 4 6 17 High Vent Pressure Probable Cause Vent line pressure is above user setpoint Revision B April 1995 Corrective Action Check pollution abatement equipment for obstruction Gasguard 450 System Operation Manual 4 6 18 Low Vacuum Generated PT 5 Probable Cause Vacuum Venturi supply pressure or flow requirement is insufficient Corrective Action Verify a Venturi supply of 75 95 PSIG at 50 60 SLPM is obtainable PT 8 Purge Header Transducer Alarms The following are possible purge header transduce
62. lowance will be made for repairs or alterations made without the written consent of Seller in which event all Seller s warranties hereunder shall be Revision B April 1995 5 1 Gasguard 450 System Operation Manual void and of no effect Buyer agrees to assume responsibility and pay for such defects which are attributable to it and for damages which may occur to the Equipment after delivery to it Seller shall not be responsible for any defects due to or caused by normal wear and tear corrosion erosion or disregard of Seller s operating and maintenance instructions or improper use of equipment 5 2 Routine Maintenance The following maintenance needs to be done at the indicated times Maintenance is only to be performed by A MANANI mained personnel who understand the hazards of the system Personal injury or death may result if fN MANNINN eg proper personal protective equipment PPE is not worn when performing troubleshooting See Section 1 2 of this manual for the proper PPE Before attempting to service the system components all pressure in the system A AVFANSIMEINIGS should be relieved Close the cylinder valve s and then vent all pressure in the system Purge out all process gas lines and seal them The process gas cylinder must be removed from the gas cabinet following the process cylinder procedures in Section 3 3 2 of this manual Tag out and lock out the cylinder valve s see Section 1 4 of this manual to p
63. lowed to change cylinders Air Products and Chemicals Inc 3 10 Section 3 Operating Procedures 3 3 1 1 Empty Purge Gas Cylinder Removal 1 Check and record the required information on the Process Gas Cylinder Change Checklist found on page 3 26 each time a cylinder is changed Do not proceed if there are any alarm labels displayed on the LCD the exhaust WARNING system is not working or pressures appear abnormal 2 Open access window 3 Close purge gas cylinder valve fully clockwise 4 Close manual valve MV 10 5 Slowly open manual valve MV 13 to vent purge gas within pigtail Close MV 13 6 Through the access window loosen the pigtail cylinder connection from the cylinder valve using the proper wrench Be sure to support the connection and pigtail tubing 7 Close access window 8 Don the required Personal Protective Equipment PPE prior to opening cabinet door 9 Reverify that exhaust system is working 10 Open gas cabinet door 11 Recheck that cylinder valve and manual valve MV 10 are closed 12 Fully remove pigtail cylinder connection from cylinder valve 13 Install cylinder valve protection cap 14 Install pigtail cylinder cap plug onto pigtail connection 15 Unbuckle cylinder strap and remove cylinder from cabinet 16 Place cylinder in appropriate cart and strap in place Place EMPTY tag on cylinder and return cylinder to the appropriate cylinder storage area Revision B April
64. n such as system specifications drawings recommended spare parts and the program logic chart The table below provides a quick reference as to the applicability of the manual s sections Manual Section Supervisory Maintenance Operations 1 Safety e e 2 General Description e 3 Operating Procedures e 4 Troubleshooting e 5 Maintenance e 6 System Specific e Information The information and data contained herein are proprietary to Air Products and Chemicals Inc and are not to be copied reproduced duplicated or disclosed to others in whole or in part without prior written consent of Air Products and Chemicals Inc This restriction shall not apply to any safety information contained in the manual The safety information is intended for your use and we encourage you to copy it so that anyone using this equipment knows how to use it safely Air Products and Chemicals Inc i viii Section 1 Safety Section 1 Safety 1 1 Important Safety Warnings Failure to read understand and follow the A WARNING safety information found in this section can result in personal injury and death The operator must read and understand this safety section before operating the system All operating and maintenance personnel must receive training and instruction by Air Products and Chemicals Inc WARNING All cylinder storage areas must be continually monitored with an air quality monitor to pr
65. ndling Hazards e Electrical Hazard Not all of the gas related hazards may apply to your system For example you may not be using any gases in the oxidizer class Some gases have more than one hazard A WARNING For example fluorine is toxic corrosive and also an oxidizer The Pressurized Gases Cylinder Handling Hazards and Electrical Hazard warnings apply to all Gasguard 450 systems The following is general information on WARNING typical gas hazards Itis not a substitute for training and Material Safety Data Sheets for all operators 1 3 1 Toxic Gas Hazards Many of the gases used in the Gasguard 450 system can cause personal INJURY OR DEATH at very low concentrations 5 2 5 Many of these gases provide no physical warning signs i e coughing throat irritation burning sensations shortness of breath to alert personnel of exposure to toxic levels Personal protective equipment required for use with toxic gases is detailed in Section 1 2 on page 1 5 of this manual Revision B April 1995 1 7 Gasguard 450 System Operation Manual A list of the toxic gases used in the Gasguard 450 system follows Ammonia Arsine Boron trichloride Boron trifluoride Carbon monoxide Chlorine Chlorine trifluoride Diborane Diborane mixtures Dichlorosilane Disilane Fluorine Germane Hydrogen bromide Hydrogen chloride 1 3 2 Corrosive Gas Hazards 7 WARNING Hydrogen fluoride Hydrogen sulfide Me
66. ng descriptions of system A WARNING sequences are not intended as a guide to operation Use specific operating procedures provided in Section 3 to operate the system The main menu provides access to the controllers sequences It is password protected Section 3 2 explains how to enter a password Some options are only available after completing another sequence For example a cylinder change must be preceded by pre purge The following options are available from the main menu Return to Display This option is highlighted when the Main Menu is displayed If you press a ypare the default screen for the active process will display If you do not select an option within 2 minutes the controller will drop out of the Main Menu automatically and display the active process screen Process Gas Flow This option starts and stops the process gas flow The start sequence tests the process panel for adequate process pressures If problems are found process gas flow is not started and an alarm is displayed Details of these alarms are located in Section 6 System Specific Information of this manual If no problems are found the process gas flow is started Flow continues until a process stop or until an alarm condition causes a shutdown Pre Purge This option starts the pre purge sequence prior to cylinder change Revision B April 1995 2 19 Gasguard 450 System Operation Manual It tests for a gross leak at the cylinde
67. o a flammable or explosive atmosphere in the area NOTE The installation of a hydride detector is strongly recommended for silane and other pyrophoric gases to detect leaks or pockets of gas that may not spontaneously ignite Air Products and Chemicals strongly recommends installation of a hydride detector to detect gas pocketing of pyrophoric gases Guidelines to avoid forming combustible mixtures Avoid forming combustible mixtures by adhering to the following e Do not admit flammable gases into an area that contains oxygen air Do not admit oxygen air into an area that contains flammable gases e Maintain a small positive pressure in systems to prevent air from leaking into them when the equipment is shut down e Avoid venting of flammable gases through vents that do not contain an inert atmosphere Personal protective equipment required for use with pyrophoric and flammable gases is listed in Section 1 2 on page 1 6 Note that the personal protective equipment PPE for pyrophorics differs from the flammables Be sure to use the proper PPE Air Products and Chemicals Inc 1 10 Section 1 Safety A list of pyrophoric gases used in the Gasguard 450 system follows Diborane Phosphine Disilane Silane A list of flammable gases used in the Gasguard 450 system follows Acetylene Germane Ammonia Hydrogen Arsine Hydrogen mixtures Carbon monoxide Hydrogen sulfide Diborane Methane Diborane mixtures Methyl chloride Dichloro
68. o the appropriate cylinder storage area 3 3 2 3 Full Process Gas Cylinder Installation The required Personal Protective Equipment PPE must be worn when WARNING performing any process cylinder procedures Refer to Section 1 2 of this manual for the required PPE 1 Verify that the cylinder contains the same gas as the label on the gas cabinet and process panel Never attempt to replace a specified gas with another gas without consulting WARNING equipment supplier Incompatible gases could cause fires explosions or extremely corrosive or toxic compounds 2 Position full cylinder in gas cabinet and strap loosely Remove valve protection cap If a valve protection cap is extremely difficult to remove do not apply excessive WARNING force or pry the cap loose Attach a label to the cylinder identifying the problem Obtain another cylinder Do not attempt to open a frozen cap as this would damage the cylinder valve and could result in personal injury or death Revision B April 1995 3 21 Gasguard 450 System Operation Manual 3 Check that the cylinder valve is tightly closed 4 Slowly remove valve outlet plug cap on the cylinder Listen and observe for any sign of leakage If you notice leakage immediately retighten cap close the cabinet door and evacuate the area Follow established emergency response procedures Cylinders with valve leaks are defective and should be returned to supplier Note Por
69. of moles of silane per fixed volume of air percent before spontaneous ignition occurs They will ignite in the presence of oxygen Flammable mixtures can burn or explode Fire and explosion hazards can be controlled by preventing the formation of combustible fuel oxidant mixtures and by eliminating sources of ignition such as sparks open flames or other heat sources Flammable mixtures will burn when ignited and can explode when the concentration is above the lower explosive limit LEL and below the upper explosive limit UEL for that specific gas Some flammable gases may accumulate as pockets in enclosed areas and subsequently explode if an ignition source is present A flammable gas also presents an asphyxiating hazard in sufficient quantities to reduce oxygen concentration below 19 5 however fire explosion is typically the primary hazard Revision B April 1995 1 9 Gasguard 450 System Operation Manual Adequate ventilation is necessary Adequate ventilation helps reduce the possible formation of flammable mixtures in the event of a flammable gas leak See table of page 1 3 which lists the exhaust requirements per enclosure size for all gases NOTE To avoid any possible hazardous reactions i e fire explosion extremely corrosive or toxic mixtures never vent incompatible gases out the same duct Continually monitor the atmosphere Continually monitoring the atmosphere with a gas leak detector will alert the operator t
70. on 7 Thread cylinder nut hand tight into onto clean undamaged cylinder valve outlet Be careful not to cross thread connections Air Products and Chemicals Inc 3 12 Section 3 Operating Procedures 8 Tighten nut using appropriate tools to support pigtail Do not apply excessive torque Recommended torque SS CGA to Brass Valve 80 ft Ibs SS CGA to SS Valve 90 ft Ibs DISS CGA to DISS Valve 35 ft Ibs 9 Close cabinet door 3 3 1 3 CGA Connection Leak Check Purge Cylinder 1 Open access window 2 Slowly open purge cylinder valve to fill pigtail and purge panel with purge gas If the system is equipped with a purge cylinder transducer PURGE CYL PRESS on the LCD screen should show full cylinder pressure 3 Close cylinder valve 4 Observe PURGE CYL PRESS for any pressure decay for five 5 minutes 5 If there is no decay the CGA connection is not leaking at a detectable level Proceed to step 7 6 If there is a pressure drop a leak is indicated a Slowly open manual valve MV 13 to completely vent purge gas pressure in pigtail b Close valve MV 13 c Remove purge cylinder from the pigtail d Reinstall the purge cylinder reference Section 3 3 1 2 Full Purge Gas Cylinder Installation on pages 3 12 and 3 13 e Retest following steps 1 through 5 in Section 3 3 1 3 f If leak persists remove cylinder reference Section 3 3 1 1 Purge Gas Cylinder Removal Procedure on page 3 11 g Remember to
71. on of this manual Item Task Frequency EFS 1 Excess flow Verify that process flow Every six months rate above the setpoint shuts the system down PT 2 Very high process Verify that process delivery Every six months delivery pressure pressure above the setpoint shuts the system down Air Products and Chemicals Inc 5 6 Section 6 System Specific Information Section 6 System Specific Information This section contains the information specific to the system Included in this section are the system specifications drawings recommended spare parts and program logic chart Revision B April 1995 6 1 Gasguard 450 System Operation Manual Air Products and Chemicals Inc 6 2 Section 6 System Specific Information 6 1 System Specifications The specifications for the system follow this page Revision B April 1995 6 3 Gasguard 450 System Operation Manual Air Products and Chemicals Inc 6 4 Section 6 System Specific Information 6 2 System Drawings The drawings for the system follow this page Revision B April 1995 6 5 Gasguard 450 System Operation Manual Air Products and Chemicals Inc 6 6 Section 6 System Specific Information 6 3 Recommended Spare Parts The recommended spare parts for this system follow this page Revision B April 1995 6 7 Gasguard 450 System Operation Manual Air Products and Chemicals Inc 6 8 Section 6 System Specific Information 6 4 P
72. onfiguration Menu It permits the user to change certain operating parameters to view other menu selections and restricts access to other files The third security level allows access to additional files in the Configuration Menu for changing parameters or viewing only The fourth security level is restricted to Air Products personnel only Air Products and Chemicals Inc 3 4 Section 3 Operating Procedures 3 2 2 Keypad Operation Fifteen of the keys on the keypad have a combination of three letters numbers or symbols on them as shown below A B c B ESC MNU z TJ Ue Each key has three possible entries inputs to the controller Pressing the key by itself will enter the bottom center symbol into the controller ie 1 2 T J respectively The and are used to enable activate the keypad to input the upper left or upper right symbols The shift keys only enable the keypad for the next key press therefore the proper shift key must be pressed each time an upper left or upper right symbol is to be input to the controller The value on the upper left of the key 1 e A C Esc is entered by pressing the left shift key and then pressing the desired key The value on the upper right of the key i e B D Mnu is entered by pressing the right shift key and then pressing the desired key Note that you will have to use the right shift key each time you want to ESC MNU obtain amenu 4 The function of th
73. onment for personnel during cylinder changes or in the unlikely event of a leak of hazardous gas The cabinet must be connected to a properly designed exhaust system that is continuously operated and monitored in order to provide a safe environment The cabinet provides the secondary containment for any leak from the hazardous gas cylinder cylinder connection and pigtail and the process panel The exhaust system continuously removes any leaking hazardous gas from the cabinet to a safe disposal system Revision B April 1995 2 1 Gasguard 450 System Operation Manual The Gasguard 450 Cabinet is constructed of 12 gage steel with fully welded seams and protected with corrosion resistant polyurethane paint Cabinet sizes are available to hold from one to three cylinders One or more exhaust stacks are provided for connection to the customer s exhaust system The Cabinet has 12 gage steel doors with windows constructed of 1 4 thick wire reinforced safety glass A temperature activated 165 F sprinkler head is provided in accordance with Article 51 of the UFC Formed brackets are mounted inside of the cabinet to securely hold each cylinder There is a weight scale option for use with cylinders containing liquefied gases Controller _ Process and Purge _ Panels Cabinet i Figure 2 1 Gasguard 450 cabinet Air Products and Chemicals Inc 2 2 Section
74. ontroller face Its 16 line by 20 character display presents prompts menu selections process and purge gas pressures and alarms The display has a backlight feature for easy viewing which is activated whenever a key is pressed To extend the life of the LCD the backlighting is automatically turned off after 2 minutes without a key press The LCD shown below is for a dual controller The left arrow at the top left corner of the screen indicates that the left side of a dual controller can be accessed or controlled from the keypad The information on the bottom half of the screen pertains to the right controller If the right arrow would be highlighted at the right side in the middle of the screen the keypad would allow access or control to the Revision B April 1995 2 13 Gasguard 450 System Operation Manual right side To switch sides on a dual controller use the and keys on the keypad POWER UP PROC CYL PRES PROC DEL PRES VAC GENERATOR PROC CYL WGHT POWER UP PROC CYL PRES PROC DEL PRES VAC GENERATOR PROC CYL WGHT Figure 2 6 Gasguard 450 Power Up Screen Press the Press ae keys on the keypad to display all the analog readings on the LCD screen Any alarms will appear on this screen First data will appear then shutdown alarms will appear on the top line with fault alarms underneath If more than one is present they will scroll on the screen In the event of an incoming alarm press t
75. perating data pressure cylinder weight etc date time operator e Tools supplies required for cylinder change PPE required for the gas leak testing equipment torque wrench gaskets etc e Step through procedural check list to include specific customer PPE protocol communications customer leak test procedures cylinder handling and storage procedures Consult your local Air Products technical representative if you need assistance in preparation of standard work instruction Section 1 Safety This section provides the safety information needed to safely operate the system Material Safety Data sheets for the cylinder gases and the instrument nitrogen supply are included The safety section is to be carefully read and understood before work is performed on the system Section 2 General Description This section provides an overview of the system Revision B April 1995 i vii Gasguard 450 System Operation Manual Section 3 Operating Procedures This section contains the procedures to prepare the system for operation and to operate it Section 4 Troubleshooting This section provides guidelines for solving operating system alarm problems It is a general guide reference to manufacturers literature will be required in some cases Section 5 Maintenance This section provides a guide to routine maintenance operations Section 6 System Specific Information This section provides system specific informatio
76. r alarms This transducer is located downstream of the purge panel and purge purifier if installed 4 6 19 High Purge Delivery PT 8 or Very High Purge Delivery PT 8 Probable Cause V 4 Purge Gas Inlet Valve and check valve failure resulting in process gas entering the common purge header Scale Alarms The following is a possible scale alarm Corrective Action Verify alarm was not caused by high purge gas delivery pressure If not assume V 4 is leaking and purge panel purge purifier and purge cylinder are contaminated with process gas Take appropriate action Contact an Air Products Representative for assistance 4 6 20 Low Cylinder Weight or Very Low Cylinder Weight Probable Cause Process cylinder weight is below setpoint Air Products and Chemicals Inc Corrective Action Change cylinder following procedure found in process cylinder change procedures in Section 3 3 2 of this manual Section 5 Maintenance Section 5 Maintenance 5 1 Warranty Seller warrants the Equipment manufactured by it to be free from defects in material and workmanship at the time of shipment from Seller s factory for a period of twelve 12 months from the date of shipment herein referred to as the warranty period If during the warranty period any part of such Equipment is found to have been defective or damaged at the time it was shipped at Seller s option it will either be repaired at Seller s factory or it will be
77. r valve The primary purpose of this test is to provide operator safety and protect purity of the system The pre purge sequence tests for adequate vacuum then initiates a series of purges of the process piping to remove all process gas to a safe level before changing the process gas cylinder The number of purge cycles depends on the type of process gas Minimum values are built into the sequence Cycles may be increased See Cabinet Configuration in Section 3 6 of this manual but not reduced below the minimum Change Cylinder This option is used when changing the process cylinder It must be preceded by a pre purge sequence This sequence tests for high pressure which is an indication of a process cylinder valve leak and then establishes a trickle purge flow through the pigtail for cylinder removal and replacement If a safe condition is detected you are prompted to remove the spent cylinder and replace it Cylinder change procedures are located in h WARNING Section 3 3 Do not attempt to change a cylinder without following appropriate procedures Post Purge This option starts the post cylinder change purge sequence The post cylinder change purge sequence purges the process panel after a process cylinder change It tests for gross leaks at the pigtail cylinder connection As with the pre purge the number of purge cycles is determined by the process gas type Cycles may be increased See Cabinet Configuration in Section
78. ressure Check setting on pressure regulator Check input to controller Check connections and signal from pressure transducers Check logs for previous pressure readings 4 5 No or Low Process Gas Flow Possible Source of Problem No or low process gas pressure Process gas manual isolation valve s closed or partially closed Are any vent valves open Test See Section 4 4 above Check position of process gas isolation valve s Check position of all vent valves Air Products and Chemicals Inc Solution Open cylinder valve pressure should indicate process cylinder pressure Change cylinder following Cylinder Change Out Procedures found in Section 3 3 2 of this manual Adjust instrument nitrogen to 75 95 psig Set pressure regulator to correct metering pressure Repair connections repair or replace transducer s as necessary Solution Open fully Close any vent valves if open Section 4 Troubleshooting Possible Source of Problem Test Solution Are process gas Check if instrument supply Adjust to 75 95 psig if pneumatic valves is adequate necessary receiving sufficient pressure to open Revision B April 1995 Gasguard 450 System Operation Manual 4 6 Typical Alarms This section assumes that all devices are calibrated and functioning according to the manufacturer s specification Contact your Air Products Technical Representative or the manufacturer shoul
79. revent opening while service is being performed Once the maintenance is complete helium leak test the system using a mass spectrometer Follow the start up procedure in Section 3 4 of this manual Air Products and Chemicals Inc 5 2 Section 5 Maintenance Turn off electrical power to the system fN MANNINI before performing controller maintenance Item Task Frequenc System Visually inspect for Daily damage leaks or malfunctioning components Check process and purge Daily pressures for readings that are outside of the specification range found in Section 6 of this manual or dramatic changes from previous values Observe the interior of gas Daily cabinet for any signs of corrosion or gas leakage Pressure gauges and Check pressure gauge Daily transducers readings against cylinder change check list pressure readings If process gas pressure must be adjusted observe delivery transducer or gauge for smooth pressure increase or decrease All valves and regulators Examine each valve and Every six months regulator for external leaks Replace as required Revision B April 1995 5 3 Gasguard 450 System Operation Manual Item Task Frequency 1 4 turn diaphragm valves Observe 1 4 turn Every six months for diaphragm valves in closed corrosive gases position If the needle is Yearly for noncorrosive not in the green zone gases follow manufacturer s adjustment or repair procedure
80. rogram Logic Chart The program logic chart for the system follows this page Revision B April 1995 6 9 Gasguard 450 System Operation Manual Air Products and Chemicals Inc 6 10
81. shutdown the system Filter This device removes particles from the gas stream cv Check Valve This safety device is used to prevent backflow of gas into another section of the system een Safety Relief Valve This device is used to relieve an over pressure condition caused by failure of another device primarily pressure regulators ae Vacuum Venturi This device is used to pull a vacuum on the process panel during purge cycles It uses a flow of nitrogen past an orifice to create a vacuum as low as 26 Hg Air Products and Chemicals Inc 2 12 Section 2 System Description 2 8 Gasguard 450 Controller The Gasguard 450 controller is a microprocessor based unit housed in a custom designed metal enclosure It continuously monitors system inputs and automatically performs purging operations by sequencing valve actuation Adequate purging is ensured by checking pressure and vacuum at each step within the purge cycles The controller also has the capability of shutting down the system if an unsafe condition arises The controller utilizes a color coded graphics panel that allows the operator to easily understand the operation and to quickly identify operating problems The process gas flow path is red inert gas flow is green and vented gas flow is yellow Figure 2 5 Gasguard 450 Controller 2 8 1 Controller Components The LCD Screen The LCD screen is located in the center of the c
82. silane Methyl fluoride Disilane Trichlorosilane 1 3 4 Oxygen and Other Oxidizer Hazards Systems using oxygen or other oxidizers A WARNING i e nitrogen dioxide fluorine have specific guidelines for specifying equipment materials of construction and system cleanliness Follow safe practices when using oxygen or oxidizers chlorine and fluorine Oxygen concentrations in excess of 23 significantly increase the hazard exposure to personnel and equipment Those materials which burn in air will burn more violently and explosively in oxygen oxidizer enriched atmospheres Guidelines for oxygen systems are found in CGA Pamphlet G 4 4 Contact your gas supplier or the Compressed Gas Association to order CGA Pamphlets Only those personnel who have read and understand the hazards of oxygen or oxidizers and safe practices for these systems should be permitted to operate and maintain the system Revision B April 1995 1 11 Gasguard 450 System Operation Manual Use only equipment specifically designed for oxygen or oxidizer service Inappropriate materials of construction increase the danger of ignition of pipelines and controls Pipe sizing is just as important to ensure all velocity restrictions for oxygen or oxidizers are met Do not substitute components or equipment without considering these hazards Refer to CGA Pamphlet G 4 4 for guidelines and specifications of oxygen systems Contact your gas supplier or the Compressed Gas A
83. ssociation to order CGA Pamphlets Maintain oxygen cleanliness at all times All equipment and piping in contact with oxygen or oxidizers must be cleaned to specifications outlined in CGA Pamphlet G 4 1 Contact your gas supplier or the Compressed Gas Association to order CGA Pamphlets Failure to clean components and piping increases the danger of ignition and fire Note that the cleaning solvent must be thoroughly removed before the equipment can be placed into service Maintain cleanliness during assembly installation and repair No open flames smoking or sparks permitted near oxygen equipment Since many materials will burn in oxygen oxidizer enriched atmospheres the best method in preventing fires is to eliminate sources of ignition Where this control equipment is being used or where concentrations of oxygen are greater than 23 avoid open flames sparks or sources of heat Never weld on a pressurized line flowing oxygen or an oxidizer Make sure signs are posted warning personnel that oxygen or oxidizers are in use Do not substitute oxygen for compressed air Substituting oxygen for compressed air is dangerous Explosions can occur when oxygen is substituted for air Chances are the instrument air equipment is not compatible or cleaned for oxygen service Oxygen used to clean off equipment or clothing could come in contact with a source of ignition spark flame or other and ignite In some cases the elevated oxygen levels
84. t be left unattended in A MNHN e Manual Mode as access to the system in Manual Mode is open to anyone 3 5 3 General Principles of Manual Operation Open valves in sequence starting at the first valve downstream of the pressure source and continuing to the next valve in sequence For vacuum operation open the valve closest to the vacuum source and continue to open the next valve in sequence Close valves in reverse order Monitor pressures on the LCD frequently Consider all possible results before opening or closing a valve Air Products and Chemicals Inc 3 36 Section 3 Operating Procedures 3 6 Cabinet Configuration Certain Gasguard 450 controller files may be modified using a second or higher level security code These modifications are referred to as the cabinet configuration The cabinet configuration may be accessed from the CAB CONFIGURATION option on the Main Menu From the CAB CONFIGURATION menu you may display some configurable parameters and change user configurable parameters For safety considerations most configuration parameters may be changed only by Air Products technical personnel The paragraphs below describe the parameters that you may view and or change Net Liquid Weight This option displays the net weight of liquid cylinders You may enter or change this value A value of 0 zero in this file will cause the scale to display gross cylinder weight User Setpoints This option displa
85. t incorrectly Purge gas pressure transducer s malfunctioning Test Check instrument nitrogen pressure Check setting on pressure regulator Check input to controller Check connections and signal from pressure transducers 4 3 No or Low Purge Gas Flow Possible Source of Problem No or low purge gas pressure Purge gas manual isolation valve s closed or partially closed Are any purge vent valves open Are purge gas pneumatic valves receiving sufficient pressure to open Revision B April 1995 Test See Section 4 2 above Check position of purge gas manual isolation valve s Check position of all purge vent valves Check if instrument supply is adequate Solution Adjust instrument nitrogen to 75 95 psig Set pressure regulator to correct delivery pressure 80 90 psig Repair connections repair or replace transducer s as necessary Solution Open fully Close any purge vent valves if open Adjust to 75 95 psig if necessary Gasguard 450 System Operation Manual 4 4 No or Low Process Gas Pressure Possible Source of Problem Closed process gas cylinder valve Low process gas cylinder pressure Instrument nitrogen supply not adequate Process gas pressure regulator set incorrectly Process gas pressure transducer s malfunctioning Test Check position of process gas cylinder valve Check process gas cylinder pressure Check instrument nitrogen p
86. table leak detectors are available for many of the hazardous gases used by the electronics industry It is recommended that these are provided to the operator to detect very small leaks from the cylinder valve at this step 5 Check valve outlet area for contamination and damage Do not attempt to use a gas cylinder with a damaged or contaminated valve outlet Tag the cylinder as FAULTY and obtain another cylinder Verify that the proper restrictive flow A MANAN e orifice is installed in the cylinder valve outlet as indicated on the cylinder tag Use a wire gauge of appropriate size 6 Position cylinder so that the valve outlet lines up with the pigtail cylinder connection and tighten cylinder strap Do not rotate cylinder by holding cylinder valve handle This may open the cylinder A AAN ANER valve and cause a high pressure gas leak which could result in personal injury or death 7 Remove pigtail cap plug from pigtail connection 8 Install new washer gasket on those cylinder connections that require washers gaskets 9 Thread pigtail cylinder nut hand tight into onto clean undamaged cylinder valve outlet noting proper direction of rotation Be careful not to cross thread connections 10 Tighten nut using proper wrench Be sure to support pigtail Do not apply excessive torque Recommended torque CGA with Gasket 35 ft lbs Air Products and Chemicals Inc 3 22 Section 3 Operating Procedures SS CGA to Br
87. tails Personnel in an oxygen deficient atmosphere will not realize they are being asphyxiated Breathing of pure inert gases will cause immediate unconsciousness Symptoms of asphyxia include e Rapid breathing e Nausea e Vomiting e Inability to move e Convulsive movements Revision B April 1995 1 13 Gasguard 450 System Operation Manual e Collapse e Abnormal pulse e Rapid fatigue e Faulty judgment e Insensitivity to pain e Abnormal emotions Remove any personnel in an oxygen deficient atmosphere to fresh air Get medical attention immediately Use cardiopulmonary resuscitation if the victim is not breathing Positive pressure breathing apparatus must be worn by any rescuers entering a suspected oxygen deficient atmosphere Nitrogen gas may accumulate in low or confined areas All requirements of OSHA 1910 146 Confined Space Guidelines must be met when inert gases in confined spaces Self contained breathing apparatus is required cartridge or filter type gas masks cannot be used See the information on personal protective equipment in this section for details When entering a confined area or area which may contain high inert gas concentrations a Buddy System must be used One person should remain outside the suspect area but within view of the other person This method ensures that the other person can respond in the event of an emergency Personal protective equipment required for use with inerts is listed
88. te any switch valve or other energy isolating device where it is locked or tagged See following page Air Products and Chemicals Inc 1 20 Section 1 Safety Entry No Description l Name of Company om Type s and Magnitude s of energy and hazards 3 Name s Job title s of employees authorized to lockout or tagout 4 Name s Job title s of affected employees and how to notify 5 Type s and Location of energy isolating means Type s of stored energy P Method s selected i e locks tags additional safety measure etc 8 Type s of equipment checked to ensure disconnections 9 Name s Job title s of employees authorized for group lockout or tagout 1910 147 29 CFR Ch XVII 7 1 90 Revision B April 1995 1 21 Gasguard 450 System Operation Manual 1 5 Safety Signs and Labels The following sign is located on the door of the Gasguard 450 cabinet als Ds wo ol Ni R GASES USED IN THIS CABINET DANGER MAY BE HAZARDOUS TO HEALTH SAFETY AND THE ENVIRONMENT THIS CABINET AND GAS HANDLING EQUIPMENT SHOULD ONLY BE USED BY TRAINED AUTHORIZED OPERATORS Before using read and understand the user manual for this equipment and the Air Products Material Safety Data Sheet s for the gas es in use Copies can be obtained from your supervisor WHEN USING THIS EQUIPMENT MAKE SURE EXHAUST SYSTEM IS ON AND WORKING MAKE SURE GAS IN CYLINDER IS THE SAME AS IDENTIFIED ON THE
89. te system without restrictive flow orifice in cylinder valve or CGA nipple if required Observe operation of regulators during pressure adjustment If pressure changes are not smooth remove regulator and replace it Examine cylinder connection for damage Check for clogging Replace or clean as required Check calibration of all transducers Frequency Every six months for corrosive gases Yearly for non corrosive gases Every cylinder change or every six months whichever occurs first Every cylinder change Every cylinder change Every cylinder change Yearly Gasguard 450 System Operation Manual Item Task Frequency Purifiers Remove and replace As required process and or purge gas purifiers All components and parts have been selected by Air Products to be compatible A MAAN SIMIC with the gas or gases to which they may be exposed This is particularly critical for the softgoods i e o rings valves seats and seals etc It is critical that replacement components and parts be identical to the original item to avoid hazardous malfunctions or leaks Consult Air Products if there is any question about the part to be used and its compatibility with a particular gas 5 3 Safety Interlock Maintenance The following maintenance should be performed to verify functioning of the process alarm safety interlocks Setpoints for the safety interlocks are located in Section 6 System Specific Informati
90. the controller panel and evacuate the area See Figure 3 1 below This will close all valves any process or purge program is aborted the alarm horn will sound and the shutdown alarm light will flash EMERGENCY STOP PUSHBUTTON Figure 3 1 Emergency Stop Pushbutton Location Pressing the Emergency Stop button does not disconnect power to the controller The 120 VAC 240 VAC power is still active within the controller Do not perform maintenance on the controller without disconnecting or switching off power externally and following the required Lockout or Tagout procedures If it is necessary to reenter the area while a hazardous atmosphere is suspected the proper Personal Protective Equipment PPE must be worn See Section 1 2 of this manual for the proper PPE Revision B April 1995 3 3 Gasguard 450 System Operation Manual 3 2 Operation of the GG450 Controller 3 2 1 Security Code Four levels of password security are used in the controller to prevent unauthorized operation by untrained personnel Each trained operator is assigned a 4 8 character first level password A first level password allows the operator to start and stop process flow and initiate purge and change cylinder procedures Access to Manual Mode and the Configuration Menu is not permitted Trained supervisory personnel are assigned a second or third level security password The second security level allows access to Manual Mode and the C
91. this key to start a menu operation highlighted on the Main Menu i e Process Gas Flow Stop BY Key This key is located below the graphic display Press this key to stop an operation highlighted on the Main Menu Air Products and Chemicals Inc 3 6 Section 3 Operating Procedures 3 2 3 Entering a Password to Access the Main Menu Screen This is the screen that is displayed whenever the controller is powered up not receiving input from the keyboard or is not running a programmed procedure The controller will switch to this screen after 2 minutes of inactivity except when it is waiting for input during a programmed sequence All operations on the system must be started from a Main Menu screen on the controller A valid password must be entered to obtain a menu on the LCD screen Press the and then the key to request the main menu The controller will request your password on the LCD screen The screen will change to Revision B April 1995 POWER UP PROC CYL PRES PROC DEL PRES VAC GENERATOR PROC CYL WGHT POWER UP PROC CYL PRES PROC DEL PRES VAC GENERATOR PROC CYL WGHT POWER UP PASSWORD PROC DEL PRES VAC GENERATOR PROC CYL WGHT POWER UP PROG CYL PRES PROC DEL PRES VAC GENERATOR PROC CYL WGHT Gasguard 450 System Operation Manual Enter the password using the keys as required and the number letter keys An X will appear as each number is enter
92. thyl chloride Nitrogen dioxide Nitrogen trifluoride Phosphine Phosphine mixtures Phosphorous pentafluoride Silane Silicon tetrachloride Silicon tetrafluoride Sulfur tetrafluoride Trichlorosilane Tungsten hexafluoride Corrosives such as chlorine fluorine and ammonia can irritate and burn human tissue They can cause personal INJURY and DEATH Exposure to very small concentrations of corrosive gases can cause severe irritation of the eyes and respiratory system At higher concentrations they can cause severe personal injury or death Section 1 2 of this manual page 1 5 lists the personal protective equipment required for use with corrosive gases Air Products and Chemicals Inc Section 1 Safety A list of the corrosive gases used in the Gasguard 450 system follows Ammonia Hydrogen chloride Boron trichloride Hydrogen fluoride Boron trifluoride Hydrogen sulfide Chlorine Nitrogen dioxide Chlorine trifluoride Phosphorous pentafluoride Dichlorosilane Silicon tetrachloride Fluorine Silicon tetrafluoride Hydrogen bromide Tungsten hexafluoride 1 3 3 Flammable and Pyrophoric Gas Hazards Flammable and pyrophoric gases can cause MAN ANIN e fire or explosions Pyrophoric gases will spontaneously ignite in air Pyrophoric gases do not need a source of ignition to burn However low concentrations may accumulate without pyrophoric ignition i e silane can accumulate up to a concentration of 2 molar number
93. tion and pressurization will be repeated until the configured number of cycles is completed Air Products and Chemicals Inc 3 18 3 3 2 2 Empty Process Gas Cylinder Removal 1 Verify that the pre purge is eh RD 4 O complete a a a 2 On the Main Menu screen str power s ET highlight CHANGE RETURN LO DLSPLA ae PROCESS G toy PRE PUR LLES lt P ASAP EHAN GEC YE LEDSED 4 Follow prompted information on ROU EDLINE EVAC GREEN the screen LAMP TEST CAB CONFIGURATION oe VERSION 15 1 EK FILE V1_4LMX0 On the majority of systems a trickle purge of the high pressure tubing will begin and continue until you press aNd indicating the cylinder change is complete The valves will appear as illustrated to the right 5 Don the self contained breathing apparatus and all other Personal Protective Equipment PPE required if not done already See Section 1 2 for details on the required PPE 6 Reverify that exhaust system is working 7 Open access window Revision B April 1995 3 19 Gasguard 450 System Operation Manual 8 Recheck that process cylinder valve is closed PROCESS PURGE ECE P lt OPEN P lt CLOSED RED GREEN Do not use a wrench or other devices to close diaphragm type cylinder valves This A MAATAAN could cause valve failure The maximum torque on diaphragm type cylinder valves is 12 foot pounds Certain gases are supplied with cylinder valves without handwheels Use the proper tool
94. trogen trifluoride mixtures Nitrogen trifluoride Revision B April 1995 1 27 Gasguard 450 System Operation Manual 1 6 Equipment Safety Features Dependent on the design of your specific system the following safety features may be incorporated into the Gasguard 450 system e Warning labels and gas identification labels are placed on the outside door of each cabinet see Section 1 5 e The gas cabinet has a self closing cabinet door with locking mechanism e A sprinkler head is installed in the cabinet unless water is a hazard with the specific gas used in the cabinet e Cabinet doors have self closing 1 4 thick wire reinforced safety glass windows e Fault and Shutdown alarms notify the operator through the alarm horn light and alarm label on the controller of a problem with the system In addition the Shutdown alarms close all pneumatic valves and abort the controller program e Excess flow sensors are installed when required to shut off the flow of gas in the event of downstream equipment failure e An exhaust monitor verifies adequate ventilation for the cabinet e The system may utilize a tied diaphragm regulator This type of regulator is designed to close tightly if the pressure builds above the setpoint because the diaphragm is mechanically connected to the valve poppet Be aware that the regulator may leak if the regulator seat is damaged corroded or soiled e A flow restricting orifice may be installed in t
95. uit jacket with bib overalls e Safety glasses with side shields e Leather gloves e Safety shoes NOTE Either air quality monitoring or self contained breathing apparatus is required for corrosive gases Air Products recommends the use of both It is not required to use both however at least one MUST be used at all times Revision B April 1995 1 5 Gasguard 450 System Operation Manual Personal Protective Equipment for Pyrophorics e Pyrophoric gas leak detection ex MDA e Hard hat fire hat with brim recommended e Long sleeved Nomex suit e Face shield e Safety glasses with side shields e Leather gloves e Safety shoes Personal Protective Equipment for Flammables e Hard hat fire hat with brim recommended e Long sleeved Nomex suit e Face shield e Safety glasses with side shields e Leather gloves e Safety shoes Personal Protective Equipment for Inerts e Oxygen depletion monitor e Safety glasses with side shields e Leather gloves e Safety shoes 1 3 Hazard Warnings The following hazard warnings detail system hazards Follow the warnings to avoid personal injury or death Do not work on the system before reading and understanding the following warnings The hazard warnings include e Toxic Gases Hazards e Corrosive Gases Hazards Air Products and Chemicals Inc 1 6 Section 1 Safety e Flammable and Pyrophoric Gases Hazards e Oxidizer Hazards e Inert Gas Hazards e Pressurized Gases e Cylinder Ha
96. un acknowledged shutdown alarm Once acknowledged the LED stops flashing but remains red until it is reset START When pressed this switch will start the sequence which is highlighted on the LCD screen POWER This LED is lighted in green under normal operating conditions It is red if a communications board has failed in a networked system STOP When pressed this switch will stop the sequence which is highlighted on the LCD screen FAULT This LED flashes yellow on power up and for a fault alarm Once acknowledged the LED stops flashing but remains yellow until it is reset Revision B April 1995 2 17 Gasguard 450 System Operation Manual Flowmeter The flowmeter located on the right side of the cabinet controller indicates the flow of purge gas to the interior of the controller enclosure Its use is required only in Class I Division II or greater designated areas The flow rate should be approximately 6 SCFH of nitrogen Emergency Stop The red mushroom head push pull emergency stop button located on the right side of the cabinet controller shuts off power to the pilot solenoids closing all of the pneumatic valves Power is maintained to the controller but it cannot open the valves until the button is pulled out to its normal position FLOW RATE Figure 2 9 Emergency Stop Pushbutton and Flowmeter Air Products and Chemicals Inc 2 18 Section 2 System Description 2 9 Main Menu Options The followi
97. ve and cause a high pressure gas leak e NEVER replace the gas specified for use in the cabinet with another type of gas cylinder Incompatible gases could cause fires explosions or extremely corrosive or toxic mixtures which can cause personal injury or death If another type of gas is required for use in the gas cabinet contact Air Products and Chemicals Inc immediately e A valve outlet sealing cap must be supplied on all toxic corrosive and pyrophoric gases Consult your gas supplier if there is no sealing cap on any of the above types of gas cylinders e Cylinder valves are available with removable flow restrictor orifices in the valve outlet for use with gas cylinders This flow restrictor orifice significantly limits the rate of release of gas from the valve outlet during transportation storage and use due to a valve or system failure Verify that your gases are supplied in cylinders with valves that have the appropriate flow restrictor orifice Note that there are different size flow restrictor orifices available Verify that the correct size is being used for your specific situation A quality control program should be established to assure that your supplier has installed the correct flow restrictor orifice in the valve outlet after the filling operation has been completed Air Products and Chemicals Inc 1 16 Section 1 Safety 1 3 8 Electrical Hazards Electric shock can cause personnel injury A warninc in The contro
98. y flowing The adjacent cylinder will begin flowing gas immediately For automatic switchover to occur both cylinders must be placed into a PROCESS GAS FLOW mode Whichever cylinder is started first will begin flow the other cylinder will wait in a standby state until the cylinder flowing gas is stopped by either a LOW alarm or the operator If a global related shutdown alarm arises both cylinders will return to the IDLE mode and all pneumatic valves will close After an automatic switchover has occurred the low process cylinder can be purged for a cylinder change while the other cylinder is flowing gas This cycle is called PRE PURGE When the automated pre purge cycles are completed the CHANGE CYLINDER mode must be selected The cylinder can physically be removed and replaced during this time During a cylinder change out procedure sufficient Personal Protective Equipment PPE must be worn assuming hazardous process gas is still present in the pigtail line See Section 1 2 of this manual for details on PPE With a new cylinder in place the next step would be POST PURGE Any air which may have entered the pigtail and valve connection during changeout is removed during these purging cycles When post purge is complete the cylinder can be put into the PROCESS GAS FLOW mode again which will now place it into standby until the other cylinder is stopped Air Products and Chemicals Inc 2 6 Section 2 System Description
99. ys the alarm setpoints that you may change and their current values These setpoints typically include e Low Process Cyl e Low Process Cyl e Regulator Creeping may also serve as a high pressure delivery alarm e Low Process Del e Low Cyl Weight e Low Cyl Weight Revision B April 1995 3 37 Gasguard 450 System Operation Manual Purge Parameters This option displays the current values for the purge parameters You may increase these values but may not decrease them below their pre programmed minimum The values displayed below are the Air Products and Chemicals Inc minimums e High Pressure Cycles 20 e Low Pressure Cycles 20 e Subcycle 3 10 e Subcycle 4 10 e Helium Leak Inboard 1 e Helium Leak Outboard 1 Manual Mode This option allows you to operate the cabinet valves independently during installation pre startup and maintenance activities See Section 3 5 for more information on Manual Mode Only experienced operators should operate A MANANE the cabinet in Manual Mode Operating valves out of their proper sequence could potentially cause damage to the product by interrupting or providing insufficient gas flow Manual operation should not be used for process gas flow as critical shutdown alarms may be disabled in Manual Mode Alarm Condition This option displays a list of alarms and the condition when an alarm will occur You may not change this list Alarm Delays This option displays the delay time for

Operation and Maintenance Manual for the Gasguard® 450

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Operation and Maintenance Manual for the Gasguard&reg; 450

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Operation and Maintenance Manual for the Gasguard® 450