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Semiconductor Characterization System

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1. Input Connectors BNC BNC Absolute Maximum Input 50 Q 5V DC 5V DC Absolute Maximum Input 1 MQ 210V DC 210V DC ANALOG TO DIGITAL CONVERTER 4200 SCP2 4200 SCP2HR Resolution 8 bit 16 bit 2 5 kS s to 1 25 GS s in 10 kS s to 200 MS s in Sample Rate 1 2 5 5 steps 1 2 5 4 5 steps 2 5 GS s 1 channel interleaved 400 MS s 1 channel interleaved 1 MS channel 1 MS channel 2 MS on 1 channel interleaved 2 MS on 1 channel interleaved 50 ns to 419 seconds 250 ns to 3 355 seconds Normal Average Envelope and Normal Average Envelope and Equivalent time Equivalent time Memory Depth Acquisition Time Range Acquisition Modes TRIGGER 4200 SCP2 4200 SCP2HR Channels 1 or 2 External Pattern Channels 1 or 2 External Pattern Trigger Source Software Software Post Trigger Delay 0 to 655 seconds 0 to 655 seconds Pre Trigger Delay 0 to waveform time 0 to waveform time Trigger Hold Off Range 0 to 655 seconds 0 to 655 seconds Trigger Modes Edge or Pulse Width Edge or Pulse Width Edge Trigger Mode Rising or Falling Edge Rising or Falling Edge Pulse Width Range 20ns to 655 seconds 20ns to 655 seconds 10ns resolution 10ns resolution TTL Compatible TTL Compatible External Irigger Tnput 10 KQ input impedance 10 kQ input impedance Connector SMB SMB OPTIONAL SCOPE PROBE 4200 SCP2 ACC BANDWIDTH 70MHz 4200 SCP2 15MHz 4200 SCP2HR ATTENUATION 1x MAX DC 300V DC rated LOADING 100pF and 1MQ LENGTH 1m CONN
2. Cable Set Full support for multi level cell technology with up to 40V allows easy changeover from typing of novel pulse tests www keithley com A GREATER I V to C V to PIV KEITHLEY MEASURE OF pulsing on the gate Solid state relays with high endurance output relay HEOR capability for pin disconnect within Program Erase waveform CONFIDENCE Cc E N p aD _ i 4 E aD lt gt aD O m aD O oTo Q SEMICONDUCTOR p N aD _ UO 2 ie UO aD Y gt aD Oo UO a lt D O See 00 fo SEMICONDUCTOR 4200 SCS Semiconductor Characterization System DC LV C V and Pulse in One Test Environment OPTIONAL INSTRUMENTATION AND ACCESSORIES OPTIONAL INSTRUMENTATION 4210 CVU Integrated C V Instrument 4200 SMU Medium Power Source Measure Unit for 4200 SCS 100mA to 100fA 200V to IV 2 Watt 4210 SMU High Power Source Measure Unit for 4200 SCS 1A to 100fA 200V to 1pV 20 Watt 4200 PA Remote PreAmp Option for 4200 SMU and 4210 SMU extends SMU to 0 1fA resolution 4205 PG2 Dual Channel Pulse Generator 4200 SCP2 Dual Channel Integrated Oscilloscope 4200 SCP2HR High Resolution Dual Channel Integrated Oscilloscope 4200 SCP2 ACC Optional Scope Probe OPTIONAL APPLICATION PACKAGES 4200 PIV A Complete Pulse I V Package for leading edge CMOS 4200 PIV
3. cells or small arrays quickly and easily using four or up to eight optional independent but synchronized multi level pulse channels It includes all the code and interconnect needed to perform a standard set of FLASH memory tests for NAND and NOR technologies such as characterization endurance and disturb tests It also supplies the higher pulse voltages that are important for MLC technologies The 4200 PIV Q package is designed for quiescent point pulsing of scaled down RF transistors such as HEMT and FET devices in II V or LDMOS technologies It can be used for a variety of large signal tests on high frequency transistors as well as for investigation of dispersion phenomena and device performance at speed This package includes multiple 4205 PG2 pulse generators and the 4200 SCP2HR oscilloscope and offers capabilities such as dual channel pulsing for pulsing on both the gate and the drain simultaneously higher power pulsing than the 4200 PIV A package and pulsing from a non zero quiescent point Some of its features include 4200 FLASH takes advantage of the new patent pending Segment ARB waveform generator which makes typical FLASH program erase cycles simple to set up and run on a single pulse channel It also combines the Segment ARB waveform generator with the in line high endurance relay for Endurance tests The tight control of this output relay can shorten lifetime test times significantly 4200 FLASH provides four Or
4. data and plots results Prober Control Keithley provides integrated prober control for supported analytical probers when test sequencing is executed on a user programmable number of probe sites on a wafer Contact the factory for a list of supported analytical probers A manual prober mode prompts the operator to perform prober opera tions during the test sequence Test Sequencing KITE provides point and click test sequencing on a device a group of devices subsite module or test element group or a user programmable number of probe sites on a wafer One sequence can include DC I V C V and pulse tests Keithley User Library Tool KULT The Keithley User Library Tool is an open environment that provides you with the flexibility to cre ate your own custom routines as well as use existing Keithley and third party C language subroutine libraries User library modules are accessed in KITE through User Test Modules Factory supplied libraries provide up and running capability for supported instruments Users can edit and compile subroutines then integrate libraries of subroutines with KITE allowing the Model 4200 SCS to control an entire test rack from a single user interface KULT is derived from the Keithley 600 and Series S400 Parametric Test Systems This simplifies migration of test libraries between the Model 4200 SCS and Keithley parametric test systems A GREATER MEASURE OF CONFIDENCE 4200 SCS Semiconductor Characteriza
5. into 1MQ frequencies to simulate real world Programmable Pulse width duty cycle rise time AC signals applied to clocked devices Parameters fall time amplitude offset Basic clock generation for test vectoring and failure analysis Digital triggering The pulse generator can be purchased as an upgrade to existing systems KTEI version 6 0 or above required or as an option for new systems Dual Channel Digital Oscilloscope The optional dual channel digital oscilloscopes place more than the perfor mance of a bench top oscilloscope into your 4200 SCS They also support time domain measurements of pulse waveforms and monitor the reactions of devices under test to those pulses Some of the features of these oscillo scopes include a broad selection of acquisition modes triggers measure ments calculations and up to four reference waveforms The dual channel oscilloscopes integrate directly into the Model 4200 SCS chassis Either can be purchased as an upgrade to existing systems KTEI version 6 0 or above required or as an option for new systems Oscilloscope SPECIFICATIONS 4200 SCP2HR Frequency Hz Di S 1506 6 M0E 6 250E 6 SI0E 6 S50E 6 400E 6 4506 6 S00E6 4 i 4 t I i I b 1 100 Volts ii 4200 SCP2 High Resolution Bandwidth DC to 750MHz DC to 250MHz i Channels 2 P Maximum Sample Rate 1 25GS s per channel 200MS s per channel www keithley com KEITHLEY CONFIDENCE GREATER MEASURE OF 4200 SCS SE
6. value between full scale and 10 of selected voltage range DC SMU VOLTAGE SPECIFICATIONS VOLTAGE MAX RANGE CURRENT MEASURE SOURCE 4200 SMU 4210 SMU Resolution rdg volts Resolution rdg volts 10 5 mA 200 uV 0 015 3 mV 5 mV 0 02 15 mV 20 V 105 mA 20 uV 0 01 1mV 500 uV 0 02 1 5 mV 105 mA 0 012 150 uV 105 mA 0 012 100 uV CURRENT COMPLIANCE Bipolar limits set with a single value between full scale and 10 of selected current range 0 02 300 uV 0 02 150 pV Supplemental DC SMU Information Supplemental information is not warranted but provides use REMOTE SENSE lt 10Q in series with FORCE terminal not to ful information about the Models 4200 SMU 4210 SMU and exceed a 5V difference between FORCE and SENSE terminals 4200 PA 30V maximum between COMMON and SENSE LO COMPLIANCE ACCURACY MAXIMUM LOAD CAPACITANCE 10nF Voltage compliance equals the voltage source specifications MAXIMUM GUARD OFFSET VOLTAGE 3mV from FORCE Current compliance equals the current source specifications OVERSHOOT lt 0 1 typical Voltage Full scale step resistive load and 10mA range GUARD OUTPUT IMPEDANCE 100kQ MAXIMUM GUARD CAPACITANCE 1500pF Current ImA step R 10k 20V range MAXIMUM SHIELD CAPACITANCE 3300pF RANGE CHANGE TRANSIENT 4200 SMU and 4210 SMU SHUNT RESISTANCE FORCE to Voltage Ranging lt 200mV COMMON gt 10 82 100nA IwA ranges Curren
7. 3 100 mV RMS Jitter period width 0 01 200 ps typical 0 01 200 ps typical 5 mV Period Range 20 ns to 1s 500 ns to 1 s 10 mV Accuracy 1 1 SMA Pulse Width Range 10ns to period 10ns 250ns to period 100ns 50Q Nominal Accuracy 3 200 ps 3 5ns 9 Programmable _ ary Transition Time 0 100 eee sea 1 for transition time 1 for transition time 400 mA typical Accuracy lt 100 ns lt 1 us Transition Slew Rate i eT r E 0 1 5 mV RMS typical Linearity 3 for transition time 3 for transition time 5 of amplitude 80mV lt 100 ns lt 150 ns lt 15 ns lt 150 ns Pulse Period and width are variable in 10 ns steps without any output glitches or dropouts Solid State Relay Pe Sine 100 us 100 us TRIGGER Q Not TRIGGER OUTPUT IMPEDANCE 50Q p pamura TRIGGER OUTPUT LEVEL TTL High Speed Range TRIGGER IN IMPEDANCE 10kQ Pulse Period e Operating Region TRIGGER IN LEVEL TTL gt TRIGGER IN TRANSITION TIMING MAXIMUM lt 100ns E TRIGGER IN TO PULSE OUT DELAY 560ns Le TRIGGER SYNCHRONIZATION JITTER lt 8ns Period a P z NOTES Figure 1 Permitted area of operation 1 Unless stated otherwise all specifications assume a 50Q termination 2 Maximum number of PG2 cards in the 4200 chassis is 4 3 Level specifications are valid after 50ns typical settling time after slewing for the high speed mode and after 500ns typical settling time after slewing for the high voltage mode
8. 4200 SCS Intuitive point and click Windows based environment Unique Remote PreAmps extend the resolution of SMUs to 0 1fA C V instrument makes C V measurements as easy as DC I V Pulse and pulse I V capabilities for advanced semiconductor testing Scope card provides integrated scope and pulse measure functionality Self contained PC provides fast test setup powerful data analysis graphing and printing and on board mass storage of test results Unique browser style Project Navigator organizes tests by device type allows access to multiple tests and provides test sequencing and looping control Built in stress measure looping and data analysis for point and click reliability testing including five JEDEC compliant sample tests Integrated support for a variety of LCR meters Keithley switch matrix configurations and both Keithley Series 3400 and Agilent 81110 pulse generators Includes software drivers for leading analytical probers Semiconductor Characterization System DC LV C V and Pulse in One Test Environment The easy to use Model 4200 SCS Semiconductor Characterization System performs lab grade DC LV C V and pulse device characterization real time plotting and analysis with high precision and sub femtoamp resolution The 4200 SCS offers the most advanced capabilities available in a fully integrated characterization system including a complete embedded PC with Windows operating system and mas
9. ACITANCE No limit CABLE RESISTANCE FORCE lt 1Q SENSE lt 10Q2 4205 PG2 Dual Channel Pulse Generator Specifications 2 PULSE LEVEL High Speed Vour 50 Q into 50 Q 5V to 5V Vour 50 Q into 1 MQ 10V to 10V Accuracy 3 50 mV Amplitude Level 50 Q into 50 Q 1 mV Resolution 50 Q into 1 MQ 2 mV Output Connectors SMA Source Impedance 5002 Nominal Accuracy 1 Short Circuit Current 200 mA Current into 50 Load 100 mA typical at full scale Baseline Noise 0 1 5 mV RMS typical GENERAL TEMPERATURE RANGE Operating 10 to 40 C Storage 15 to 60 C HUMIDITY RANGE Operating 5 to 80 RH non condensing Storage 5 to 90 RH non condensing ALTITUDE Operating 0 to 2000m Storage 0 to 4600m POWER REQUIREMENTS 100V to 240V 50 to 60Hz MAXIMUM VA 1000VA REGULATORY COMPLIANCE Safety Low Voltage Directive 73 23 EEC EMC Directive 89 336 EEC DIMENSIONS 43 6cm wide x 22 3cm high x 56 5cm deep 17 2 in x 83 4 in x 22 in WEIGHT approx 29 7kg 65 5 lbs for typical configura tion of four SMUs I O PORTS USB SVGA Printer RS 232 GPIB Ethernet Mouse Keyboard Overshoot Pre shoot Ringing Output Limit 5 of amplitude 20mV Programmable limit to protect the DUT Typical Minimum Transition Time 10 90 TIMING High Voltage High Speed High Voltage 20V to 20V Frequency Range 1 Hz to 50 MHz 1 Hz to 2 MHz 40V to 40V Timing Resolution 10 ns 10 ns
10. ECTOR BNC NOTES 1 Inputs are referenced to 4200 chassis ground All specifications apply at 23 5 C within 1 year of calibration RH between 5 and 60 after 30 minutes of warmup www keithley com A 4200 PIV A Pulse l V Option Specifications CHANNELS 2 TYPICAL PULSE PERFORMANCE with 4205 Remote Bias Tee Measurement Accuracy lt 4 of signal 1mV Maximum Current Measure 100mA Resolution 100nA Offset lt 500nA Sample Rate 1GS s Duty Cycle lt 0 1 DC Offset 200V Minimum Transition Time 10 90 lt 15ns Pulse Source Voltage Range 0 to 5V into gate Pulse Width 40ns to 150ns SMU TYPICAL DC PERFORMANCE with 4205 Remote Bias Tee Leakage 1 10nA V gt Noise 1 10nA RMS Maximum Voltage 210V gt 40V requires safety interlock and related precautions Maximum Current 0 5A 4200 REMOTE BIAS TEE TYPICAL PERFORMANCE Band Pass 3 5kHz 300MHz 3B Power Divider Max Power Input 0 125W DC NOTES 1 Unless stated otherwise all specifications assume a 50 termination 2 When using Adaptive filtering 3 Leakage measured after a 5 second settling time 4 All typical specs apply to the AC DC output connector of the 4205 Remote Bias Tee and after system compensation All specifications apply at 23 5 C within one year of calibration RH between 5 and 60 after 30 minutes of warmup Ch 1 SCP2 Trig In O ch 2 E Trig Out 7 Trig In Ch 1 DC Sense S
11. IpF to 1nF MEASUREMENT TERMINALS Triaxial guarded RAMP RATE 0 1V s to 1V s DC VOLTAGE 200V TYPICAL CP ACCURACY 5 at 1V s ramp rate E N p aD _ i 4 E aD gt aD O m aD me oTo Q SEMICONDUCTOR KEITHLEY GREATER MEASURE OF CONFIDENCE 4200 SCS Semiconductor Characterization System DC LV C V and Pulse in One Test Environment oe E N p aD _ n lt lt aD n gt cD go U an fed Ow e76 ai SEMICONDUCTOR Dual Channel Pulse Generator TE Keithley Internal Pulse Interface mE Fie Hep The optional integr ated dual channel pulse generator adds pulsing to the peee aA Model 4200 SCS s DC source and measure capabilities It supports voltage PERE m pulses as short as 10ns or up to 20V into 509 Two pulse generators on Panerai a ail nokta one card provides you with the flexibility to apply pulses to two points on F Burst Mode Trigger Polarity Pome gt reset a DUT such as the gate and the drain simultaneously The 4200 SCS can ce e e an support up to four synchronized cards per system for eight pulse channels SourceRange iw Curentumitia 0 105 SourceRange v Curentumt ta 005 The 4205 PG2 supports two waveform generation modes in addition to D M A the standard pulse mode The Arbitrary Waveform m
12. MEASURE OF CONFIDENCE SEMICONDUCTOR 4200 SCS Ordering Information 4200 SCS F Flat Panel Display 4200 SCS C Composite Front Bezel requires an external SVGA display Accessories Supplied Reference and User Manual on CD ROM 236 ILC 3 Interlock Cable 3m Note All 4200 SCS systems and instrument options are supplied with required cables of 2m length Additional Instrumentation 4210 CVU Integrated C V Instrument 4205 PG2 Dual Channel Pulse Generator 4200 SCP2 Dual Channel Digital Oscilloscope 4200 SCP2HR High Resolution Dual Channel Integrated Oscilloscope 4200 PIV A Complete Pulse I V Package for leading edge CMOS 4200 PIV Q Pulse I V Package with Q point and dual channel pulsing 4200 FLASH Non volatile Memory Test Package 4200 SCP2 ACC Optional Scope Probe Related Products 707A Semiconductor Switching Matrix Mainframe 708A Single Slot Switching Matrix Mainframe 4200 SCP2 ACC 70MHz Scope Probe 7072 8x12 Semiconductor Matrix Card 7072 HV 8x12 High Voltage Semiconductor Matrix Card 8x12 High Speed Low Current Matrix 7174A Semiconductor Characterization System DC LV C V and Pulse in One Test Environment 3 dedah Ketiiskey irder active Test Errira The Keithley Interactive Test Environment KITE is designed to let users understand device behav ior quickly When running a test sequence users can view results and plots for completed tests while the sequence i
13. MU2 DC Force a AC Input DC Sense DC Sense AC DC DC Force IDC Force SMUT r RBT1 Interconnection for 4200 PIV A for leading edge CMOS high x and isothermal testing PIV A pulses the voltage on the gate and provides a DC bias on the drain KEITHLEY CONFIDENCE GREATER MEASURE OF Model 4200 SCS specifications O Q m Z O Ld VW N O E 1S O D a N U U fh N a D 32 G SEMICONDUCTOR 4200 SCS Semiconductor Characterization System DC LV C V and Pulse in One Test Environment 4200 PIV Q Typical Specifications CHANNELS 2 TYPICAL PULSE PERFORMANCE Measurement Accuracy Gate Current lt 50uA offset 10uA resolution Drain Current lt 100uA offset 10WA resolution Maximum Current Measure Gate 100mA into 50Q 6 Drain 760mA into 509 1 33A into 5Q 6 Sample Rate 200MS s Duty Cycle 0 001 to 99 9 Minimum Transition Time 10 90 150ns Gate Pulse Source 20V to 20V Drain Voltage Range 38V to 38V into 50Q 75V into 1kQ 6 Pulse Width 500ns to 999ms Pulse Period 510ns to 1s SMU TYPICAL DC PERFORMANCE Typical DC Leakage Gate lt 20nA offset for lt 35V Typical DC Leakage Drain lt 10nA V gt for lt 35V Typical DC Noise Gate lt 20nA RMS Gate Offset lt 20nA Typical DC Noise Drain lt 300pA RMS Maximum Voltage 210V gt 40V requires
14. Noise lt 300pA RMS Maximum Voltage 200V gt 40V requires safety interlock and related precautions Maximum Current 1A NOTES 1 Unless stated otherwise all specifications assume a 50Q termination 2 Leakage measured after a 5 second settling time 3 For the high power 4210 SMU For the medium power 4200 SMU the maximum current is 100 mA Venta de Instrumentos de Prueba y Medici n Calle del Ebano 16625 Jardines de Chapultepec Tijuana B C Mexico Tel 664 681 1130 Fax 664 681 1150 Tel 01800 027 4848 www finaltest com mx 1 888 KEITHLEY v s only www keithley com KEITHLEY GREATER MEASURE OF CONFIDENCE
15. Q Pulse I V Package with Q point and dual channel pulsing 4200 FLASH Non volatile Memory Test Package OPTIONAL SWITCHING SYSTEMS AND CARDS SYSTEMS 707A 6 Slot Switching Matrix Mainframe 708A Single Slot Switching Matrix Mainframe CARDS 7071 8x12 General Purpose Matrix Card 7071 4 Dual 4x12 General Purpose Matrix Card 7072 8x12 Semiconductor Matrix Card 7072 HV 8x12 High Voltage Semiconductor Matrix Card 7075 Eight 1x12 Two Pole Multiplexer Card 7173 50 4x12 Two Pole High Frequency Matrix Card 7174A 8x12 High Speed Low Leakage Current Matrix Card 1 888 KEITHLEY uss only www keithley com OPTIONAL ACCESSORIES CONNECTORS AND ADAPTERS CS 565 Female BNC to Female BNC Adapter CS 701 BNC Tee Adapter female male female CS 719 CS 1247 CS 1249 CS 1251 CS 1252 CS 1281 CS 1382 CS 1390 3 lug Triax Jack Receptacle SMA Female to BNC Male Adapter SMA Female to SMB Plug Adapter BNC Female to SMB Plug Adapter SMA Male to BNC Female Adapter SMA Female to SMA Female Adapter Female MMBX Jack to Male SMA Plug Adapter Male LEMO Triax to Female SMA Adapter CS 1391 SMA Tee Adapter female male female CS 1479 SMA Male to BNC Male Adapter 237 BAN 3A Triax Cable Center Conductor terminated in a safety banana plug Male BNC to 3 lug Female Triax Adapter 3 lug Triax Barrel Adapter female to female 237 BNC TRX 237 TRX BAR 237 TRX T 3 slot Male to Dual 3 lug Female Triax Tee Adapter 7078 TRX BNC 3 S
16. RVICES AVAILABLE 4200 3Y EW 4200 3Y CAL 4200 FLASH 3Y EW 4200 FLASH 3Y CAL 4200 PA 3Y EW 4200 PIV A 3Y EW 4200 PIV A 3Y CAL 4200 PIV Q 3Y EW 4200 PIV Q 3Y CAL 4200 SCP2 3Y EW 4200 SCP2 3Y CAL 4205 PG2 3Y EW 4205 PG2 3Y CAL IMPL 4200 TRN 4200 1 C 1 year factory warranty extended to 3 years from date of shipment 3 2540 1 compliant calibrations within 3 years of purchase for Model 4200 SCS 1 year factory warranty extended to 3 years from date of shipment 3 2540 1 compliant calibrations within 3 years of purchase for Model 4200 FLASH 1 year factory warranty extended to 3 years from date of shipment 1 year factory warranty extended to 3 years from date of shipment 3 2540 1 compliant calibrations within 3 years of purchase for Model 4200 PIV A 1 year factory warranty extended to 3 years from date of shipment 3 2540 1 compliant calibrations within 3 years of purchase for Model 4200 PIV Q 1 year factory warranty extended to 3 years from date of shipment 3 Z540 1 compliant calibrations within 3 years of purchase for Model 4200 SCP2 1 year factory warranty extended to 3 years from date of shipment 3 Z540 1 compliant calibrations within 3 years of purchase for Model 4205 PG2 1 day on site implementation of TRN 4200 1 C Course Optimizing the 4200 SCS for Your Application Not available in all countries www keithley com Semiconductor Characterization System DC LV C V and Pulse in One Test Environmen
17. bles for each SMU configured with a 4200 PA 4200 RPC 2 Remote PreAmp Cable 2m 6 6 ft One supplied for each PreAmp 236 ILC 3 Interlock Cable 3m 10 ft Line Cord NEMA 5 15P for 100 115VAC or CEE 7 7 Continental European for 240VAC KEITHLEY A GREATER MEASURE OF CONFIDENCE 4200 SCS Semiconductor Characterization System DC LV C V and Pulse in One Test Environment DC SMU CURRENT SPECIFICATIONS CURRENT MAX RANGE VOLTAGE MEASURE SOURCE Accuracy Accuracy Resolution rdg amps Resolution rdg amps 4210 SMU2 1A 21V O 1 uA 0 100 200 uA 50 uA 0 100 350 uA High 100 mA 210 V 100 nA 0 045 3uA 5 uA 0 050 15 uA Power 100 mA 21V 100 nA 0 045 3uA 5 uA 0 050 15 uA SMU 4200 SMU2 10mA 210 V 10 nA 0 037 300 nA 500 nA 0 042 1 5 uA Medium 1 mA 210V 1 nA 0 035 30 nA 50 nA 0 040 150 nA Power 100 uA 210V 100p 0 033 3nA 5 nA 0 038 15 nA SMU 10 uA 210V 10pA 0 050 600 pA 500 pA 0 060 1 5 nA a 1 pA 0 050 100 pA 50 pA 0 060 200 pA 100 nA z20v 100f 0 050 30 pA 5 pA 0 060 30 pA 10nA 20V 10 fA 0 050 1pA 500 fA 0 060 3 pA Ca rk Ina 20v 3f 0 050 100 fA 50 fA 0 060 300 fA optional 100 pA 20v 1 fA 0 100 30 fA 15 fA 0 100 80 fA 4200 PA PreAmp 10 p 210V 03 fA 0 500 15 fA 5 fA 0 500 50 fA 1pA 210V 100 aA 1 000 10 fA 1 5 fA 1 000 40 fA VOLTAGE COMPLIANCE Bipolar limits set with a single
18. e channel per DUT pin integrated High Endurance Output Relay supports endurance testing of NAND and NOR CONFIDENCE Cc E N p aD ur O i E aD 1O 5 aD O m aD O oTo Q SEMICONDUCTOR _ N aD ur oO x Ie 1S aB 2 gt aD O U m aD O 00 at 49 SEMICONDUCTOR 4200 SCS High Gate Stack Upper Interfacial Region Lower Interfacial Region Pulse I V measurement capabilities are increasingly critical for high gate stack characterization and isothermal testing of new devices To minimize the signal reflections due to poor impedance matching that often plague do it yourself pulse testing systems Keithley s Pulse I V package includes a system inter connect setup that provides AC DC coupling to connect the pulse generator and the DC instrumentation Semiconductor Characterization System DC LV C V and Pulse in One Test Environment 4200 PIV A Pulse I V Solution Package The 4200 PIV A Pulse I V package provides a turnkey pulse I V solution It is a comprehensive package of hardware and software designed to integrate seamlessly with the Model 4200 SCS workstation It combines the dual channel pulse generator dual channel digital oscilloscope specialized intercon nect and patented Pulse I V software The Pulse I V software controls sourcing from th
19. e pulse generator and data acquisition from the oscilloscope to automate a variety of Pulse I V tests Running in the Model 4200 SCS s proven inter face the Pulse I V software provides instrument setup and control data storage and presentation The innovative software includes both cable compensation and a solution to the load line effect producing pulsed based I V transistor curves such as the V I family of curves and V I for voltage threshold extraction The Pulse I V bundle allows the Model 4200 SCS to support a wide range of applications such as charge trapping for high dielectric characterization isothermal testing of devices and materials subject to self heating effects charge pumping AC stress testing clock generation and mixed signal device testing The specialized interconnect solves most of the problems encountered in high speed pulse testing such as DC Source e Combining pulse and DC sources to a single DUT pin to permit both DC and pulse characterization with out recabling or switching DC Source e Impedance matching for pulse integrity to minimize reflection e Straightforward cabling and connection to the DUT for easy setup NEW 4200 MMPC X Multi Measurement Cable Dual Channel Digital Oscilloscope for Measurement Trigger i Dual Channel Pulse Generator Set allows easy changeover from l V to C V to PIV AC DC Out p eveseveeeseeoe ee eeaeee eo
20. egrates directly into the Model 4200 SCS chassis It can be purchased as an upgrade to existing systems or as an option for new systems www keithley com A 4210 CVU Selected C V Specifications MEASUREMENT FUNCTIONS MEASUREMENT PARAMETERS Cp G Cp D Cs Rs Cs D R jX Z theta RANGING Auto and fixed TEST SIGNAL FREQUENCY RANGE 1kHz to 10MHz SOURCE FREQUENCY ACCURACY 0 1 SIGNAL OUTPUT LEVEL RANGE 10mV rms to 100mV rms RESOLUTION 1mV rms ACCURACY 10 0 ImV rms unloaded at rear panel DC BIAS FUNCTION DC VOLTAGE BIAS RANGE 30V on both C V HI and C V LO 60V differential RESOLUTION 1 0mV ACCURACY 0 5 5 0mV unloaded MAXIMUM DC CURRENT 10mA SWEEP CHARACTERISTICS AVAILABLE SWEEP PARAMETERS DC bias voltage frequency AC drive level SWEEP TYPE Linear Custom SWEEP DIRECTION Up sweep Down sweep NUMBER OF MEASUREMENT POINTS 4096 points C V POWER PACKAGE TYPICAL PERFORMANCE CHARACTERISTICS MEASUREMENT PARAMETERS Cp Gp DCV timestamp RANGING IpF to 1nF MEASUREMENT TERMINALS 2 wire SMA with BNC adapters TEST SIGNAL 100kHz to 10MHz 10mV to 100mV DC VOLTAGE SOURCE 200V with 5mV resolution 400V differential DC CURRENT 100mA or 300mA maximum TYPICAL CP ACCURACY 1MHz 1 0 DC CURRENT SENSITIVITY 10nA V SMU BIAS TERMINALS SUPPORTED 4 RAMP RATE QUASISTATIC C V TYPICAL PERFORMANCE CHARACTERISTICS MEASUREMENT PARAMETERS Cp DCY timestamp RANGING
21. ge tests floating gate FLASH and embedded NVM memory Extended Measurement Resolution An optional Remote PreAmp the Model 4200 PA extends the system s measurement resolution from 100fA to 0 1fA by effectively adding five current ranges to either SMU model The PreAmp module is fully integrated with the system to the user the SMU simply appears to have additional measure ment resolution available The Remote PreAmp is shipped installed on the back panel of the Model 4200 SCS for local operation This installation allows for standard cabling to a prober test fixture or switch matrix Users can remove the PreAmp from the back panel and place it in a remote location such as in a light tight enclosure or on the prober platen to eliminate measurement problems due to long cables Platen mounts and triax panel mount accessories are available KTE Interactive Software Tools KTE Interactive includes four software tools for operating and maintaining the Model 4200 SCS in addition to the Windows operating system e The Keithley Interactive Test Environment KITE is the Model 4200 SCS Windows device charac terization application It provides advanced test definition parameter analysis and graphing and automation capabilities required for modern semiconductor characterization Built in looping stress measure capabilities and data management enable many types of reliability testing 2 J m Z O Lid V A GREATER
22. into a 50Q load 4 Specifications apply to a 10 90 transition typical Minimum slew rate for high speed range 724mV ms For high voltage range 2 71V ms which applies to both the standard pulse and Segment ARB mode 5 For multiple 4205 PG2 cards when using appropriate cabling and the trigger per waveform trigger mode All specifications apply at 23 5 C within one year of calibration RH between 5 and 60 after 30 minutes of warmup SEMICONDUCTOR KEITHLEY MEASURE OF www keithley com GREATER CONFIDENCE 4200 SCS Semiconductor Characterization System DC LV C V and Pulse in One Test Environment 4200 SCP2 1 25GS Dual Channel Oscilloscope Card and 4200 SCP2HR 200MS Dual Channel Oscilloscope Card Specifications ANALOG INPUT 4200 SCP2 4200 SCP2HR No of Channels 2 2 Bandwidth 509 DC to 750 MHz DC to 250 MHz typical Bandwidth 1MQ DC to 350 MHz DC to 125 MHz typical 0 05 0 1 0 25 0 5 1 2 5 0 05 0 1 0 25 0 5 1 2 5 Full Scale Input Range 50 Q iia i eS ie Et EE 10 Vp p 10 Vp p 0 1 0 2 0 5 1 2 5 5 10 20 0 25 0 5 1 25 2 5 5 10 25 Full Scale Input Range 1 MQ 50 100 Vp p 50 Vp p lt 0 25 of full scale DC Gain Accuracy lt 1 of full scale Impedance 1 MQ 12 pF or 50 Q 1 MQ 12 pF or 50 Q Impedance Accuracy 1 1 Coupling DC or AC DC or AC Offset Adjust full scale range 2 full scale range 2 Offset Accuracy 1 offset 1 full scale 1
23. lot Male Triax to BNC Adapter 7078 TRX GND 3 Slot Male Triax to Female BNC Connector guards removed CABLES AND CABLE SETS NOTE All 4200 SCS systems and instrument options are supplied with required cables 2m 6 5 ft length CA 19 2 BNC to BNC Cable 1 5m CA 404B SMA to SMA Coaxial Cable 2m CA 405B SMA to SMA Coaxial Cable 15cm CA 406B SMA to SMA Coaxial Cable 33cm CA 446A SMA to SMA Coaxial Cable 3m CA 447A SMA to SMA Coaxial Cable 1 5m CA 451A SMA to SMA Coaxial Cable 10 8cm CA 452A SMA to SMA Coaxial Cable 20 4cm 236 ILC 3 Safety Interlock Cable 3m 237 ALG 2 Low Noise Triax Input Cable terminated with 3 alligator clips 2m 4210 MMPC C Multi Measurement I V C V Pulse Prober Cable Kit for Cascade Microtech 12000 prober series 4210 MMPC S Multi Measurement l V C V Pulse Prober Cable Kit for SUSS MicroTec PA200 300 prober series 4200 MTRX Ultra Low Noise SMU Triax Cable 1m 2m and 3m options 4200 PRB C SMA to SSMC Y Cable with local ground 4200 RPC Remote PreAmp Cable 0 3m 2m 3m 6m options 4200 TRX Ultra Low Noise PreAmp Triax Cable 0 3m 2m 3m options 7007 1 Double Shielded Premium GPIB Cable 1m 7007 2 Double Shielded Premium GPIB Cable 2m FIXTURES 8101 4TRX 4 Pin Transistor Fixture 8101 PIV LR8028 Pulse I V Demo Fixture Component Test Fixture CABINET MOUNTING ACCESSORIES 4200 RM Fixed Cabinet Mount Kit REMOTE PREAMP MOUNTING ACCESSORIES 4200 MAG BASE Magnetic Base for mou
24. mbined I V C V and pulse measurements The exceptional low current performance of the Model 4200 SCS makes it the perfect solution for research studies of single electron transistors SETs molecular electronic devices and other nanoelec tronic devices that require I V characterization The Model 4200 SCS can be used to make four probe van der Pauw resistivity and Hall voltage measurements eliminating the need for a switch matrix and user written code With remote preamps added resistances well above 10 7Q can be measured The Model 4200 SCS is modular and configurable The system supports up to nine Source Measure Units SMUs in any combination of medium and high power SMUs A high power SMU provides 1A 20W capability Also available are the C V option and the pulse and scope pulse measure modules The C V option includes the C V Power package which supports high power C V measurements up to 400V and 300mA up to 60V of differential DC bias and quasistatic C V measurements Applications Packages By combining specific sets of hardware with Keithley developed code and interconnect a variety of application packages are offered that expand the Model 4200 SCS s pulsed testing capabilities The 4200 PIV A package performs charge trapping and isothermal testing for leading edge CMOS research The 4200 PIV Q package is designed for higher power pulse testing in I V LDMOS and other higher frequency and higher power FET devices The 4200 FLASH packa
25. nting 4200 PA on a probe platen 4200 TMB Triaxial Mounting Bracket for mounting 4200 PA on a triaxial mounting panel 4200 VAC BASE Vacuum Base for mounting 4200 PA on a prober platen COMPUTER ACCESSORIES 4200 MOUSE Microsoft Ambidextrous 2 Button Mouse Note A pointing device is integrated with the 4200 SCS keyboard SOFTWARE ACS BASIC Component Characterization Software DRIVERS 4200ICCAP 6 0 IC CAP Driver and Source Code for 4200 SCS UNIX Windows OTHER ACCESSORIES EM 50A Modified Power Splitter TL 24 SMA Torque Wrench 4200 CART Roll Around Cart for 4200 SCS 4200 CASE Transport Case for 4200 SCS 4200 MAN Printed Manual Set ADAPTER CABLE AND STABILIZER KITS 4200 CVU PWR CVU Power Package for 200V C V 4200 CVU PROBER KIT Accessory Kit for connection to popular analytical probers 4200 Q STBL KIT Addresses oscillation when performing pulse I V tests on RF transistors SUPPLIED ACCESSORIES ACCESSORIES SUPPLIED WITH EACH MODEL 4210 CVU CA 447A SMA Cables male to male 100 1 5m 5 ft 4 CS 1247 Female SMA to Male BNC Adapters 4 CS 701 BNC Tee Adapters 2 TL 24 SMA Torque Wrench ACCESSORIES SUPPLIED WITH EACH MODEL 4200 SMU OR 4210 SMU 4200 MTRX 2 Two Ultra Low Noise SMU Triax Cables 2m 6 6 ft Not included with SMUs configured with a 4200 PA Remote PreAmp 4200 TRX 2 Ultra Low Noise PreAmp Triax Cable 2m 6 6 ft Two supplied for Ground Unit Two supplied in replacement of 4200 MTRX 2 ca
26. ock must be engaged to use the 200V range KEITHLEY www keithley com A GREATER MEASURE OF CONFIDENCE WV O E O QO D a N WV U 2 N a D SEMICONDUCTOR N S O QO QO D a N U U th N a D 32 O 4200 SCS Additional DC SMU Specifications Semiconductor Characterization System DC LV C V and Pulse in One Test Environment MAX OUTPUT POWER 22 watts for 4210 SMU and 2 2 watts for 4200 SMU both are four quadrant source sink operation DC FLOATING VOLTAGE COMMON can be floated 32 volts from chassis ground VOLTAGE MONITOR SMU in VMU mode Measure Measure Accuracy Voltage Range Resolution rdg volts 200 V 200 uV 0 015 3 mV 20 V 20 uV 0 01 1mV 2 V 2 uV 0 012 110 uV 200 mV Luv 0 012 80 uV INPUT IMPEDANCE gt 10 Q2 INPUT LEAKAGE CURRENT lt 30pA MEASUREMENT NOISE 0 02 of measurement range rms DIFFERENTIAL VOLTAGE MONITOR Differential Voltage Monitor is available by measuring with two SMUs in VMU mode or by using the low sense terminal provided with each SMU GROUND UNIT Voltage error when using the ground unit is included in the 4200 SMU 4210 SMU and 4200 PA specifications No additional errors are introduced when using the ground unit OUTPUT TERMINAL CONNECTION Dual triaxial 5 way bind ing post MAXIMUM CURRENT 2 6A using dual triaxial connection 8 5A using 5 way binding posts LOAD CAP
27. ode can generate Rise Time a FelTime is 1e 007 Rive Time x ie007 FadTime a 10007 complex waveforms made up of up to 256K data points at clock speeds up Pulse width x 2007 PuseDelay a 0 Pulse width i Se 007 Pulse Delay 0 to 25MHz The Segment ARB mode patent pending simplifies creating Pisetoad 50 PueComt O Pseto 0 O eat OO storing and generating complex waveforms made from up to 1024 user defined line segments Each segment can have a different duration allow ing exceptional waveform generation flexibility w a Ee a Py eS aT i Using a supplied User Test Module it is simple to incorporate pulse gen eration into KITE test sequences The pulse generator can also be used as Sirriam a I a oe a stand alone pulse generator using the pulse generator s Window s GUI F Complement Mose E oe F erabe channel 2 This GUI can control a wide range of variables including pulse frequency duty cycle rise fall time amplitude offset and the ability to trigger single pulses and or pulse chains The dual channel pulse generator has a Pulse Generator SPECIFICATIONS wide range of uses Typical applications Frequency Range 1Hz 50MHz include Pulse Width Programmable from 10ns to near DC e Charge pumping to characterize inter Channels Dual independent channels face state densities in MOSFET devices Pulse Amplitude 100mV 20V into 509 e Using AC stress pulses of varying Range 100mV 40V
28. s still running As shown here multiple plots can be viewed at the same time to get a complete picture of device performance e Keithley User Library Tool KULT Allows test engineers to integrate custom algorithms into KITE using Model 4200 SCS or external instruments e Keithley Configuration Utility KCON Allows test engineers to define the configuration of GPIB instruments switch matrices and analytical probers connected to the Model 4200 SCS It also provides system diagnostics functions Keithley External Control Interface KXCI The Model 4200 SCS application for controlling the Model 4200 SCS from an external computer via the GPIB bus KITE Projects A project is a collection of related tests organized in a hierarchy that parallels the physical layout of the devices on a wafer KITE operates on projects using an interface called the project navigator The project navigator simplifies organizing test files test execution and test sequencing The project navigator organizes tests into a logical hierarchy presented in a browser style format This structure allows users to define projects around wafer testing e The project level organizes subsites and controls wafer looping execution e The subsite level organizes devices and controls subsite test sequencing e The device level organizes test modules manages test module libraries and controls device test sequencing e The test module level performs tests analyzes
29. s storage Its self documenting point and click interface speeds and simplifies the process of taking data so users can begin analyzing their results sooner Additional features enable stress measure capa bilities suitable for a variety of reliability tests The powerful test library management tools included allow standardizing test methods and extrac tions to ensure consistent test results The Model 4200 SCS offers tremendous flexibility with hard ware options that include four different switch matrix configurations and a variety of LCR meters and pulse generators Customer support packages are also available including applications support calibration repair and training A Total System Solution The Model 4200 SCS provides a total system solution for DC I V C V and pulse characterization and reliability testing of semiconductor devices test structures and materials This advanced parameter analyzer provides intuitive and sophisticated capabilities for a wide variety of semiconductor tests The Model 4200 SCS combines unprecedented measurement speed and accuracy with an embedded Windows based PC and the Keithley Interactive Test Environment KITE to provide a powerful single box solution KITE allows users to gain familiarity quickly with tasks such as managing tests and results and generating reports Sophisticated and simple test sequencing and external instrument drivers sim plify performing automated device and wafer testing with co
30. safety interlock and related precautions Maximum Current 145 NOTES 1 Unless stated otherwise all specifications assume a 50Q termination 2 Offset and resolution specified when using adaptive filtering after system cable compensation and offset correction 3 Leakage measured after a 5 second settling time 4 All typical specs apply to the AC DC output cable from the SMU Force connected to the SMA tee attached to Triax to SMA adapter after system compensation 5 For the high power 4210 SMU For the medium power 4200 SMU the maximum current is 100mA 6 Drain Pulse Source is a voltage pulser with 55Q output impedance To calculate the approximate maximum Drain current for any DUT resistance Idmax 80V 55 Rog To calculate approximate maximum Drain voltage input the Imax calculated above Vdmax Idmax x Rp All specifications apply at 23 5C within 1 year of calibration RH between 5 and 60 after 30 minutes of warmup FINA 4200 FLASH Typical Specifications CHANNELS 4 channels optional 8 channels max TYPICAL PULSE PERFORMANCE Number of Voltage Levels Waveform 25 Minimum Transition Time 150ns Pulse Source Voltage Range 0 to 20V into 50Q 0 to 40V into high impedance Pulse Width 250ns to 1s Trigger Synchronization Jitter 8ns Switching Time for DUT Pin Isolation 100s HEOR Off Capacitance 250pF SMU TYPICAL DC PERFORMANCE Typical DC Leakage lt 10nA V for lt 35V Typical DC
31. steeeeeererer The Pulse I V package includes everything needed to imple ment a turnkey system for pulsed I V testing of leading edge devices and materials Pieces included in the package are Integrated dual channel pulse generator Dual channel digital oscilloscope Pulse I V control software patent pending Interconnect designed to minimize the signal reflections common to pulse I V testing patent pending All required connectors and cables Sample projects for Pulse I V isothermal testing of FinFETs SOI devices and other devices with self heating problems Charge trap testing for high gate stack characterization Pulse testing can characterize a device with little to no isothermal degradation www keithley com KEITHLEY MEASURE OF A GREATER CONFIDENCE 4200 SCS Semiconductor Characterization System DC LV C V and Pulse in One Test Environment 4200 PIV Q Pulsed I V Q Point Dual Channel Pulsing Package 4200 FLASH Non Volatile Memory Test Package Start V Stop V Time s Trig 1 0 SSR 1 0 1 1 2006 08 1 1 1 1 00E 07 1 0 0370172007 22 33 39 700 0E 3 2 cote 600_0E 3 400 0E 37 200 0E 3 7 a 200 0E 3 100_0 3 E 0 0E 04 2 0E07 4 0E 07 Time s eet Fee EA VORE RF IMOG tee ent EAN Se Meg AY Cees EA Mae AT TAR Typical NOR FLASH gate program erase cycle The optional 4200 FLASH application package tests single FLASH memory
32. t Application Packages Optional application packages combine specific sets of hardware interconnect and Keithley developed code They are described in the following pages Application packages designed for specific needs Description Device Technology Source Method Measure Method Measurements Pulse Width Range Unique Capability 4200 PIV A For charge trapping and isothermal testing in lower technologies such as CMOS FET Advanced CMOS Pulse gate DC bias on drain Pulse I V and DC Gate voltage Drain voltage and current 40ns to 150ns 8 bit 1 gigasample s measure rate good for advanced CMOS Pulse I V testing and high speed single pulse charge trapping 1 Full Width Half Maximum FWHM A 4200 PIV Q For higher power pulse testing in II V LDMOS and other higher frequency and higher power FET devices HEMT FET II V LDMOS Dual pulse for gate and drain with quiescent point testing Pulse I V and DC Gate voltage and current Drain voltage and current 500ns to 999ms Dual channel quiescent point pulsing for scaled down RF transistors KEITHLEY MEASURE OF GREATER 4200 FLASH For testing FLASH memory devices NOR and NAND including MIC technologies Floating gate FET NAND NOR nonvolatile memory Pulse gate drain source and substrate DC only Gate voltage and current Drain voltage and current 250ns to 1s One multi level puls
33. t Ranging lt 200mV 4200 PA SHUNT RESISTANCE FORCE to COMMON gt 10 Q ACCURACY SPECIFICATIONS Accuracy specifications are mul 1pA and 10pA ranges gt 10 2 100pA 100nA ranges tiplied by one of the following factors depending upon the OUTPUT TERMINAL CONNECTION Dual triaxial connectors ambient temperature and humidity for 4200 PA dual mini triaxial connectors for 4200 SMU and Relative Humidity 4210 SMU Temperature 5 60 60 80 NOISE CHARACTERISTICS typical 10 18 C x3 x3 Voltage Source rms 0 01 of output range 18 28 C x1 LB Current Source rms 0 1 of output range Voltage Measure p p 0 02 of measurement range 28 40 C x3 2 Current Measure p p 0 2 of measurement range MAXIMUM SLEW RATE 0 2V us SPECIFICATION CONDITIONS Specifications are the performance standards against which the Models 4200 SMU 4210 SMU and 4200 PA are tested The measurement and source accuracy are specified at the termination of the supplied cables e 23 C 5 C within 1 year of calibration RH between 5 and 60 after 30 minutes of warm up Speed set to NORMAL Guarded Kelvin connection 1 C and 24 hours from ACAL NOTES 1 All ranges extend to 105 of full scale 2 Specifications apply on these ranges with or without a 4200 PA 3 Specified resolution is limited by fundamental noise limits Measured resolution is 6 digits on each range Source resolution is 4 digits on each range Interl
34. tion System DC LV C V and Pulse in One Test Environment 4210 CVU C V Instrument C V measurements are as easy to perform as I V measurements with the integrated C V instrument This optional capacitance voltage instrument performs capacitance measurements from femtoFarads fF to nanoFards nF at frequencies from 1kHz to 10MHz The C V option includes a new Power package that supports e High power C V measurements up to 400V 200V per device termi nal for testing high power devices such as MEMs LDMOS devices displays etc e DC currents up to 300mA for measuring capacitance when a transistor is On The innovative design of the 4200 SCS has eight patents pending and is complemented by the broadest C V test and analysis library available in any commercial C V measurement solution It also supplies diagnostic tools that ensure the validity of your C V test results With this system you can configure linear or custom C V and C f sweeps with up to 4096 data points In addition through the open environment of the 4200 SCS you can modify any of the included tests such as e C V C t and C f measurements and analysis of New Complete solar cell libraries including DLCP High and low x structures MOSFETs BJTs Diodes II V compound devices Carbon nanotube CNT devices e Doping profiles Toy and carrier lifetime tests e Junction pin to pin and interconnect capacitance measurements The C V instrument int
35. up to Other 4200 FLASH features eight optional channels of multi include level pulse that support e Elimination or characterization of thermal issues e Dual channel pulse I V testing for II V and LDMOS Ability to compare DC vs Pulse for dispersion effects Pulse voltage on gate and drain Code for performing tests on floating gate FLASH and embed ded NVM memory Performs linear or log based DC e 40V pulsing into a high impe dance pin 20V into 509 e High endurance output relay Software and interconnect for Quiescent point testing Measure gate current drain voltage and current Test code for typical character ization tests Pulse widths adjustable from 500ns to near DC 999ms Ability to use the same setup for performing true DC tests with 20V pulses for the gate 38V pulses for the drain Some of the specific tests are Vbs Ip Both pulse and DC e V I Both pulse and DC which provides fast open close for pin isolation during an erase pulse Pulse widths from 200ns to 1s Up to 25 pulse levels 100 pulse segments measurements for Disturb and Endurance tests based on the number of program erase cycles Controls switching between program erase and DC charac terization without using a switch matrix out re cabling the system e Single pulse scope view which is useful for setup validation pulse width optimization and proto NEW 4200 MMPC X Multi Measurement

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