GUI User Manual DSB6000
Contents
1. ien Warning E Restore Restrictions area 1 configures some limit to trace files Following parameters can be configured e Trace Line Max Length between 10 and 300 letters Number Of Trace Files between 1 and 256 Trace File Max Size Kbytes between 16 and 2000 Kbytes Number Of Archive Files between 1 and 256 Archive File Size Kbytes between 20 and 2000 Kbytes It is also possible to enable or disable archiving functionality by clicking on On or Off buttons Trace Monitoring area Eb allows filtering trace writing It contains three checks fields used to Page 61 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 e Enable Disable trace files writing e Enable Disable On Line datalog e Enable Disable debug level traces This area also contains functionality to disable the writing of specific trace s sources Type a trace source in the field and click on Add button to add 1t on the Switched off list Select an item in the list and click on Remove button to remove 1t from the switched off list Traces Path area EJ is used to specify the repertory in which traces will be saved To modify this path select a folder and then click on Change button Command panel gy is same as in 8 2 Equipment Tab See this section to detailed explanations 8 4 ONLINE DATALOG TAB 8 4 1 PRESENTATION Online Datalog tab allows an advan2. DSB Series Supervisor 6000 9000 Version 1 3 0 0 04 22 2010 08 54 47 Help i About Software manages NANOPLAS device Software is written by Agileo Automation Web www nanoplas eu AO Web www agileo automation com O Emai info 2nanoplas fr Emai contact agileo automation com GILEO eq Automation Specialists of dry wafer cleaning process Specialists of semiconductor equipment software and semiconductor automation Product Name DSB Series Supervisor 6000 9000 Version 1 3 0 0 Page 73 of 73
3. Logon Dialog Warning E Page 64 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 8 5 2 HMI S ACCESS RIGHT HMI Access Rights area 1 lists all parts of software When an element list 1s selected its access level is displayed in Level area E To modify the level access of selected HMI part click on an element of level list Levels go from Visibility through Level 7 Visibility level is the lowest level and Level 7 the highest Visibility level does not need to be connected to access on controls If a level 1s affected to a menu all its sub menus could not have a lower level a higher level 1s still possible for sub menus Page 65 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 8 5 3 USER MANAGEMENT 8 5 3 1 KNOW A USER ACCESS LEVEL To know a user access level click on an item of User Access Rights list Eb The Level area 2 will be updated with the user s level User Access Rights T Users A Engineer O Visibility Nanoplas Level1 O Level2 User O Level3 O Level4 User3 O Level5 User4 O Level6 User6 Level O Level7 Here Operator user has a level access of 1 Once a user is selected some buttons appears on command panel D This button will be described in following section 8 5 3 2 CHANGE A USE
4. 5 1 1 4 SET POINT VALUE Module parameters are displayed by the set point value control It indicates 30 deg C value configured in the Module and its unit This control is shown while View Set Point button is click it replaces process value but colour is changed to blue 5 1 1 5 DOOR STATE The state of door 1s also displayed Indicates the door is open Indicates the door 1s closed 5 1 1 6 WAFER DSB 9000 can perform process on one wafer or on multiple wafers cassette An option in the Setup menu allows an authorized user to change the Tool representation in one of the following Page 20 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 5 1 2 CREATE JOB When operator clicks on Create Job button the Recipe Selection dialog box appears Tool Recipe Selection Monitoring Recipes Used Module Module1 Module2 Module4 Recipel eee Recipe4 Recipe Warning Recipe area EN contains the list of existing recipes and below a filter field If this field is not empty only recipes that contain field s letters are displayed Used Module area 2 contains the list of modules used in selected recipe and a Review button If this button 1s clicked a new dialog with module parameters appears Page 21 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Refe
5. 0 a Cycle 00 00 00 la T Chamber C a MFC N2 sccm disabled Pressure mTorr iy 0 a disabled MFC Ar sccm disabled Pulse Process Option ENABLE DISABLE The Pulse Process Option is disable Warning Page 33 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 6 2 2 1 Rece Modules Editing Recipe Module Name Module RFG 1 W T Chamber C Pulse Process Option DISABLE Duty Cycle Frequency Hz Warning END POINT SYSTEM PHOTO DIODE General MFC 02 sccm MFC Gas 2 sccm v 40 ON Pressure mTorr MFC Gas 3 sccm oFF End Point System Option ENABLE pp Post Threshold 0000 00 00 00 40 w 400 EN This dialog box 1s composed of three parts that are described below General area ED is used to configure general parameters of Module Pulse Process Option area 2 allow operator to configure RF generator s pulse functionality End Point System Option area EY allow operator to configure either photodiode either spectrometer functionality These two areas are optional and may be not displayed 1f those functionalities are not installed on device Page 34 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 6 2 2 2 GENERAL General Name RFG 1 W 0 a MFC 02 sccm
6. Data Access is displayed FTP protocol is used and operator can access to process data files stored inside PLC s memory card Web browser area E displays the web interface of current navigated page Command panel 6 contains Exit Service Mode button Click this button to exit Service Mode Page 44 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 7 4 END POINT DETECTOR TAB TAB 4 1 PRESENTATION This tab depends on End point system enabled It allows an advanced user to control independently the spectrometer or the photo diode DSB Series Supervisor DSB 9000 Version 1 0 0 0 Procese Stata IDLE Recipe 07 30 2003 11 01 37 nanOplas E B m PLC Data Debug Mode Service ren PLC Interface Spectrometer Direct control of equipment is possible only in service mode To display spectrometer panel Enter Service Mode button must be clicked ED Page 45 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 7 4 2 SPECTROMETER SERVICE MODE Once Service Mode is entered information panel becomes as follow Process State IDLE zji Recipe User 25 naneplas 11 19 2009 pa 11 00 31 DSB Series Supervisor DSB 6000 Version 1 1 0 0 Service nr Tema PLC Interface Spectrometer PLC Data Debug Mode Graphic Spectrometer Data Exit S
7. SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 6 2 3 MODULE EDITION To edit an existing Module select one in Module tab and click on Edit Module button Then Editing Module dialog box is show Recipe modules Editing Recipe Module General Name Module 2 RFG 1 W wj 250 a MFC 02 sccm w 200 a Cycle 00 00 20 T Chamber C w 40 4 MFC N2 sccm w 20 a Pressure mTorr w 200 a T Substrat C disabled MFC Ar sccm disabled Pulse Process Option ENABLE DISABLE The Pulse Process Option is disabled Warning This dialog box is similar to Creating Module dialog box see 6 2 3 Module Edition but contains parameters of the edited Module You can modify Module s configuration as describe for Creating Module dialog box Change the Module name here 1 to an unused name will rename the Module When configuration of Module is done click on OK button to save it inside PLC memory or Cancel button to abort the creation Information panel will be shown with an updated Module list Page 38 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 7 SERVICE MENU 7 1 SERVICE TAB 7 1 1 PRESENTATION Service tab allows an advanced user to setup temperature tune and pressure PID tables Process State Po Recipe nanOplas a DSB Series Supervisor DSB 9000 Ve
8. case and choose the find direction Clicking on Find Next button display the next trace corresponding to text to find Trace View area EJ determines if the last trace line and applied filters should be displayed When Show last Trace line is checked the list is updated in real time to display the last occurred trace Page 69 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 Cycle Counters area EH is not active in this software so Reset Cycle Counters button on command panel do nothing Page 70 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 9 2 FILTERS TAB 9 2 1 PRESENTATION Filters tab allow user to choose filters to apply on displayed traces DSB Series Supervisor DSB 9000 Version 1 0 0 0 et State IDLE HB Recipe Nanoplas m nanOplas 07 31 2003 14 13 08 ii Traces Filters Apply Filter LotlD Unselect All Source Unselect All OEC Simulator SM OHMI O HMI_Operator Level Unselect All Applied Filter ame On line Filter Alarms ErrorsAndWarnings OperatorTrackingActic RemoteControl SECSII Cancel Filter Level Source LotlD LI RT SECSII O Spectrometer O TMITech E95HMITe To apply a filter the user can choose Level 1 and Source 2 of trace to display LotID EY are not activated in this software It is also pos
9. m nanOplas 03 25 2010 10 13 13 J Tool Coherence Yalidation Monitoring Module are not synchronized with PLC Please update configuration below a Review Review A A Warning Operator has to enter a valid textual name and press the Update button If he considers that the recipe stored inside the hardware equipment is not valid he can remove it using the Delete button If the Recipe is not found on equipment the Operator has either to create the recipe either to remove the textual name using the Delete button Press the Continue button when all errors are recovered Page 16 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 4 6 2 COHERENCE VERIFICATION FOR MODULES J Tool Monitoring Coherence Yalidation Recipe are not synchronized with PLC Please update configuration below UD Review ec Review 3 Review Warning BENE Operator has to enter a valid textual name and press the Update button If he considers that the module stored inside the hardware equipment is not valid he can remove it using the Delete button If the module is not found on equipment the Operator has either to create the module either to remove the textual name using the Delete button Press the Continue button when all errors are recovered Page 17 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SO
10. to achieve the control and monitoring capability required The Command Panel is a column of command buttons on the right hand side The Command Panel only relates to the Information Panel currently being shown The Navigation Panel is used to switch between functional areas Page 9 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 4 GENERAL USER INTERFACE 4 1 ACCESS RIGHTS MANAGEMENT Operators do not have the same knowledge or authorization to use the software That 1s why there are several access levels depending on user s experience and task to be done In order to access to different screens the operator have to be connected with a user name and a password The software allows up to 8 access levels numbered from 0 to 7 Level 0 does not need to be connected and allow only visualization mode Level 7 is the highest and it is reserved to NANOPLAS GUI s elements not accessible to the user who have not the required access level are displayed in gray Their status is disabled Page 10 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 4 2 LOGON WINDOW 4 2 1 CONNECTION PROCEDURE In order to use the software and access to any screens the user must be connected Logon button is located in the title panel Once the user is connected logon button s text becomes the user name On clic
11. 26 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 Process State WAIT_ACK_END Recipe DSB Series Supervisor DSB 9000 Version 1 0 0 0 07 22 2003 14 54 07 H m nanOplas E Tool Monitoring Add Graph Chamber Temp Substrat Temp Temperature Spectrometer 14 28 50 14 29 00 14 29 10 14 29 20 14 29 30 14 29 40 14 29 50 14 30 00 14 30 10 14 30 20 14 30 30 14 30 p Time A click on Add Graph button will split the information panel and show another graph as following A click on Delete Graph button will delete the second graph and show the previous screen There is already one graph displayed even if there 1s no data Page 27 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 DSB Series Supervisor DSB 9000 Version 1 0 0 0 nk State WAIT ACK END ecipe 07 22 2003 14 54 42 Ti nan plas m Tool Monitoring Add Graph Chamber Temp Substrat Temp Temperature 34 32 gg 4 _ _ _ _ ___ MFC 28 26 Delete G 24 Graph 22 amp 20 W 18 EXETES a 14 uj Spectrometer amp 12 pe 10 Warning B 4 2 0 14 28 50 14 29 00 14 29 10 14 29 20 14 29 30 14 29 40 14 29 50 14 30 00 14 30 10 14 30 20 14 30 30 14 30 41 Time Chamb Pressure Temperat
12. 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 7 3 PLC INTERFACE TAB 7 3 1 PRESENTATION This tab provides a direct access to PLC through its web interface DSB Series Supervisor DSB 9000 Version 1 0 0 0 Hisl E Recipe Im nanOplas 07 30 2003 03 25 13 Service pr PLC Interface PLC Data Debug Mode Spectrometer Direct control of equipment is possible only in service mode To display PLC s web interface Enter Service Mode button must be clicked Bl Page 43 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 7 3 2 SERVICE MODE After entering Service Mode information panel becomes as follow 07 30 2003 03 26 42 nan plas Z PLC Data Debug Mode Service Table PLC Interface Spectrometer 4 ES IS Pisano Eats imertace Actualisez la page 6 Backward button 1 can be used to go back to previous navigated pages Forward button 2 can be used to move forward in previous navigated pages if Backward button was clicked Home button RJ navigates to the home page of PLC s web interface Protocol button 4 allows the user to switch between HTTP and FTP protocols If Web Interface is displayed the HTTP protocol is used and operator can controls the PLC directly by viewing its GUI If
13. ER MANUAL Reference Software Manual DSB6000 taken into account during execution of the Module When this option is enabled the end of process is determined by the spectrometer and the cycle duration are not taken into account its parameter field see 6 2 2 2 General 1s disabled Wavelength field 1s used to configure the wavelength to be scanned by spectrometer Its unit 1s nanometer Delta field configures the range of wavelength before and after principal wavelength that will be scanned by spectrometer It is also configured in nanometer unit Stop Post Threshold field configures an amount of time to wait before stopping process when the end of process was detected by spectrometer Format of time is HH mm ss 6 2 2 4 2 PHOTO DIODE OPTION End Point System Option ENABLE Stop Post Threshold 00 00 00 b sd Photo Diode option can be enable in the Module by clicking on DISABLE button When this button is clicked its text changes to ENABLE and other controls are enable The option will be taken into account during execution of the Module When this option 1s enabled the end of process is determined by the photo diode and the cycle duration are not taken into account its parameter field see 6 2 2 2 General 1s disabled Stop Post Threshold field configures an amount of time to wait before stopping process when the end of process was detected by photo diode Format of time is HH mm ss Page 37 of 73 nanOplas DSB
14. Existing Modules Used Module Module 1 Module 2 Module3 Module 4 Add Remove o JL Review Warning O The name of new Recipe can be set in Name area ED Index of Recipes 1 up to 100 is calculated automatically to be compliant with hardware storage Existing area PA contains the list of all existing Modules a filter field and a button Review Review button can be used to review parameters of an existing Module as shown in 5 1 2 Create Job To configure your Recipe select an existing Module and click on Add or Delete button as you wish Modules that will be used in the Recipe are displayed in Used area EJ This area contains also three buttons Up Down and Review Up and Down buttons arrows can be used to change the sequence of used Modules Review button have the same behaviour than the one in Existing area When configuration of Recipe is done click on OK button to save it inside PLC memory or Cancel button to abort the creation Information panel will be shown with an updated Recipe list Page 30 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 6 1 3 RECIPE EDITION To edit an existing Recipe select one in Recipe tab and click on Edit Recipe button Then Editing Recipe dialog box 1s show Recipe Modules J Recipe Editing Recipe Name Recipe 2 Existing Modules Used Modu
15. FTWARE USER MANUAL Reference Software Manual DSB6000 5 MAIN MENU 5 1 TOOL TAB 5 1 1 PRESENTATION Tool tab contains a representation of the selected device that can be DSB 6000 or DSB 9000 and indicates all process values It also allows operator to start a process by clicking on Create Job button E View Set Point button 1 can be used to display all set point values DSB Series Supervisor DSB 6000 Version 1 1 00 cmm State nm nm p s 11 19 2009 21 10 30 TaskCreated Tool End point detection Throttle Value Vacuum Pump Pressure Chamber T C Substrate T C 5 1 1 1 DISPLAYED DEVICE 5 1 1 1 1 DSB 9000 Page 18 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 5 1 1 1 2 DSB 6000 DSB Series Supervisor DSB 6000 Version 1 1 0 0 O DLE FP in naneplas 11 19 2009 amooo Tool Tasca Page 19 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 5 1 1 2 ACTUATOR STATE Actuator state RFG on off valve 1s represented by a control that looks like a LED There are two representations O Indicates the actuator is ON Indicates the actuator is OFF 5 1 1 3 PROCESS VALUE Probe s values are displayed by the process value control It indicates the current measured value and its unit
16. IPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 1 DOCUMENT INTRODUCTION 1 1 SCOPE The key purpose of this document is to describe the DSB Series Equipment Controller Software and its main use 1 2 INTENDED AUDIENCE AND READING SUGGESTIONS This document is intended for users and testers Please read section 1 3 for main system definitions acronyms and abbreviations The document is divided up into chapters The second chapter introduces the tool The third chapter provides an overview of the graphical user interface The fourth chapter describes general software interface The fifth chapter describes the software User Tool interface The sixth chapter describes Recipe Module creation The seventh chapter describes Service navigation panel The eighth chapter describes the Setup navigation panel The ninth chapter describes the Datalog navigation panel The tenth chapter describes the Alarm Warning navigation panel The eleventh chapter describes the Help navigation panel 1 3 DEFINITION ACRONYMS AND ABBREVIATION Definition Description Acronyms and Abbreviations Equipment Controller Software Graphical User Interface IHMI Human Machine Interface HMI temperature pressure flow of plasma treatment OLE for Processing Control OLE means Object Linking and Embedding Page 6 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manu
17. R LEVEL ACCESS To change a user level access select an existing user in the list EY and then select the new level access in Level list PJ In order to apply changes click on Save And Apply button inside command panel 8 5 3 3 ADD A USER To add a user click on Add User button if it is not displayed select an existing user The information panel becomes as follow Page 66 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 Process constants Equipment Access Configuration HMI Access Rights Tracing Online Datalog Access Rights E Alarm ET E E EH m TT TT TT TT Tm TT TT TT EH E WU e DSB Series Supervisor DSB 9000 Version 1 0 0 0 Process State Nanoplas Add User Level 07 31 2008 12 32 07 3 nanOplas User Access Rights O Level1 O Level2 O Level3 O Level4 O Level5 O Level6 O Level7 New Name New Password Warning Confirm New Password m xu To add a user select its level access enter a name and a password and click on Apply button Cancel button allows cancelling the operation Page 67 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 8 5 3 4 EDIT A USER To edit a user first select an existing
18. S EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 8 2 EQUIPMENT TAB 8 2 1 PRESENTATION This tab allows user to configure equipment which software communicates with DSB Series Supervisor DSB 6000 Version 1 1 00 aces SUME Recipe 11 18 2009 1233 48 constants Save Equipment Photo Diode Process Equipment Tracing Online Datalog Access Rights IP Address 192 168 2 11 OPC Server ID RedLionControls ModbusTCP v End Point Detection Parameters Sampling ms 100 a Initial Delta 96 iy 03 Waiting Time s w iv iv Window definition 6 a Snap Shot Delta w 0 1 Transitional point w Save As BI PLC area 1 contains configuration for its IP address the name of OPC Server and communication HearthBeat timeout in millisecond By clicking on PLC s picture simulation mode can be enabled or disabled Area 2 allow operator to configure either photodiode either spectrometer functionality These two areas are optional and may be not displayed if those functionalities are not installed on device Command panel BJ allows user to save changes made In order to save changes Save button must be clicked To restore previous saved configuration click on Restore button Save As button can Page 57 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 be us
19. S EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 7 2 RF TUNING TAB 7 2 1 PRESENTATION RF Tuning Table tab allow an advanced user to configure values used to RF generator tuning Process State m Recipe nanoOplas m DSB Series Supervisor DSB 9000 Version 1 0 0 0 07 30 2003 03 04 54 R F Tuning Service Tabla PLC Data Debug Mode PLC Interface Spectrometer Direct control of equipment is possible only in service mode To display RF tuning table Enter Service Mode button must be clicked Bl Page 41 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 7 2 2 SERVICE MODE Once Service Mode is entered information panel becomes as follow 07 30 2009 03 10 23 nanOplas Z m 5 R F Tuning Table MFC 02 2 RF Tuning table is located inside area EM It represents table configuration used to tune the RF generator during plasma process Command panel c contains three buttons Save button will save the displayed configuration inside PLC memory when it is clicked Restore button load configuration stored inside PLC memory when it is clicked Finally click on Exit Service Mode to go out of Service Mode Page 42 of
20. a also contains a filter text box to limit displayed items to those that correspond to text typed and a selection field to determine to which column the filter is applied ID or PLCID Read area PJ contains Read button to read the selected item and some information text about the quality of reading and the reading time Write area RJ contains Write button to write the value typed in field below inside the selected item It contains also some information about the quality of write and writing time Command panel EP contains Exit Service Mode button Click on it to go out of Service Mode Page 49 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 7 6 DEBUG MODE TAB 7 6 1 PRESENTATION This tab allows an advanced user to command independently each components of DSB device DSB Series Supervisor DSB 9000 Version 1 0 0 0 ted State Recipe 07 30 2003 11 59 13 E nan plas Service TEE PLC Interface Spectrometer PLC Data Debug Mode Direct control of equipment is possible only in service mode To display debug mode Enter Service Mode button must be clicked EM Page 50 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 7 6 2 SERVICE MODE After entering Service Mode information panel becomes as follow DSB Series Supervisor DSB 9000 Version 1 0 0 0 Pys
21. age Transitional points define the number of acquisition ignored after the activation of the end point detection device The Waiting Time indicates how long values are not significant Snap Shot Delta and Initial Delta indicates the tolerance between current and compared measures About the Stop Post Threshold Time refer to section 6 2 2 4 End Point System option Page 60 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 8 3 TRACES TAB 8 3 1 PRESENTATION Traces tab allows an advanced user to setup traces recording Process State IDLE Recipe DSB Series Supervisor DSB 9000 Version 1 0 0 0 Process constants Equipment Tracing Configuration Restrictions Files Trace Line Max Length 200 Number Of Trace Files 50 Trace File Max Size KBytes 1000 fa Trace Monitoring Tracing Online D atalog Access Rights Archiving Number Of Archive Files M 50 Archive File Size KBytes 1000 fa Switched Off Trace Sources Enable Trace Files Writing Enable On Line Datalog Enable Traces 07 30 2003 17 32 08 Traces Path Path C NANOPLAS_EC Bin Traces 1 MSOCache NANOPLAS_EC EN svn o EN Bin Ls svn 1 Components _ Configuration 1 Resources _ SpectrometerSimulatorData Traces E XSD CANANOPLAS_EC Bin Traces Y with DEBUG Level
22. al DSB6000 2 DSB SERIES INTRODUCTION DSB Series devices were designed to perform dry etch process The operator sets the wafer to be cleaned inside the process chamber selects a recipe among those stored in PLC memory and when the door is closed the plasma treatment starts Page 7 of 73 nanoOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 3 SOFTWARE GUI OVERVIEW The human machine interface 1s compliant with SEMI standard E95 1101 DSB Series Supervisor DSB 9000 Version 1 0 0 0 Process State Recipe End point detection Throttle Value Vacuum Pump Pressure FWD Power prie RFL Power 2 DSB Series Equipment Controller Software consists of four main parts 1 Title Panel 2 Information Panel 3 Command Panel 4 Navigation Panel 07 21 2003 11 57 38 Page 8 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 The Title Panel is a horizontal area at the top of the window above the Information and Command panels It is display all the time and contains the following elements The name of device and software version Name of executing Recipe and its current state The date time Logon Logoff button NANOPLAS s logo The Information Panel displays a view or views of the graphical information and graphics for each functional area Graphics and other display objects are shown on this panel
23. al DSB6000 7 5 2 SERVICE MODE R F Tuning Service Table ID Clignotant GrafcetState IsEndOfProcess DSB Series Supervisor DSB 9000 Version 1 0 0 0 PLC Interface PLCID PLC1 400001 PLC1 400002 PLC1 400003 Spectrometer Value Process State Recipe SpectrometerV alue PLC1 400004 StartProcess AbortProcess ProcessCompleted PLC1 400005 PLC1 400006 PLC1 400007 ProcessingM oduleNumber o2MFC n2MFC PLC1 400008 PLC1 400300 PLC1 400301 arMFC chamberT emp substratT emp fwdPower PLC1 400302 PLC1 400303 PLC1 400304 PLC1 400014 flPower chamberPress cycleDuration PLC1 400015 PLC1 400305 PLC1 400017 throttleValveV alue PLC1 400018 o2MFCActive n2MFCActive PLC1 400019 PLC1 400020 arMFCActive PLC1 400021 fwdPwrActive PLC1 400022 vent ctive PLC1 400023 doorClosed PLC1 400306 spectro spec GreenLight OrangeLight PLC1 400026 PLC1 400027 Sere age ei e ei eiei ee eae SSA A A A ei ie e e e e o BM When Enter Service Mode button is clicked information panel becomes as follow 07 30 2003 11 41 21 m Exit Service Mode OK 0 ms 6338455088 ms Warning Data area Eb contains the list of used items with PLC communication The list displays the name of item used inside software PLC communication and value of the item This are
24. ate 20 5 1 1 3 Process value 20 5 1 1 4 Set point value 20 5 1 1 5 Door state 20 5 1 1 6 Wafer 20 de lada Create job 21 25155 Recipe execution 23 5 1 3 1 Title panel during execution 24 5 1 4 End of process 24 Sub Stand By Mode 25 5 1 5 1 Title Panel during Stand By mode execution 25 3 2 Monitoring tab 26 5 2 1 Presentation 26 dd Execution 28 6 Recipe Menu 20 6 1 Recipe tab 20 6 1 1 Presentation 20 6 1 2 Recipe creation 30 6 1 3 Recipe edition 3l Page 3 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 6 2 Recipe modules tab 32 6 2 1 Presentation 32 6 2 2 Module creation 33 6 2 2 1 End Point System Photo Diode 34 6 2 2 2 General 35 6 2 2 3 Pulse process option 36 6 2 2 4 End Point System Option 36 6 2 2441 SPECHOMEEr OPMON sisssncassssdcdceduesecsaisndsiaccansncssanadeddeoensnenainadiiaeeenincesanabiaaeaesiue 36 0 2 2452 EMO DOI ODO a as 37 6 2 3 Module edition 38 7 Service Menu 39 7 1 Service tab 39 7 1 1 Presentation 39 bod Service mode 40 1352 RF tuning tab 4 7 2 1 Presentation 4 Tiada Service mode 42 7 3 PLC interface tab 43 7 3 1 Presentation 43 1 3 2 Service mode 44 7 4 End Point Detector Tab tab 45 7 4 1 Presentation 45 7 4 2 Spectrometer Service mode 46 7 4 1 Photo Diode Service mode 47 229 PLC Data tab 48 7 5 1 Presentation 48 7 5 2 Service mode 49 7 6 Debug mode tab 50 7 6 1 Presenta
25. ced user to setup predefined filters for datalogs y Process State Recipe DSB Series Supervisor DSB 9000 Version 1 0 0 0 nanOplas 07 31 2003 03 53 12 Process constants Equipment Tracing Online Datalog Access Rights Online Datalog Configuration Restore LotlD Selected Filter Name ErrorsAndWarnings Filters Alarms Level Source Unselect All Unselect All Unselect All DEC Simulator SM O HMI L1 HMI_Operator O PLC ORT L RT SECSII O Spectrometer O TMITech E95HMITe O UT Config ErrorsAndWarnings OperatorTrackingActi RemoteControl SECSII Level Error Fatal Warming Source LotlD lt A ErrorsAndWarnings Warning Remove Number Of Trace Lines E 3000 a 7 mm m m o Page 62 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 Level area 1 configures level of traces to be displayed when filter is applied All levels are listed and can be selected independently by checking them Source area 2 configures source of traces to be displayed when filter is applied All sources are listed and can be selected independently by checking them If needed an advanced user can add or remove Sources LotID area EY usually configures lotID traces to be displayed when filter is applied but it 1s not used in this s
26. cess Stato inm Recipe Engineer 07 30 2008 11 59 53 m E nancCplas D n ii PLC Interface Spectrometer PLC Data Debug Mode Exit Service Mode End point detection Throttle Value Vacuum Pump Pressure Chamber T C Substrate T C EXE O FWD Power RFL Power This information panel 1 1s almost the same as Tool information panel in Main Menu See 5 1 Tool tab for details In the following section specific functionalities of debug mode will be described Command panel 2 contains Exit Service Mode button Click on it to go out of Service Mode 7 6 2 1 DISPLAYED DEVICE Synopsis 1s updated to be compliant with selected kind of tool There are 2 possibilities DSB 9000 Page 51 of 73 nanoOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Process State IDLE D Recipe I im nanOplas 07 30 2009 mesa Debug Mode Reference Software Manual DSB6000 DSB Series Supervisor DSB 9000 Version 1 0 0 0 Warning End point detection Throttle Value Vacuum Pump Pressure Chamber T C Substrate T C DSB 6000 yra e 044 Sars aperiens P IR 1010 Meon Sew pu Nowe tonem Ae lesd A TA Dates Mote FWD Power RFL Power wi o la Froqueecy Hz w o a 7 6 2 2 ACTUATOR COMMANDS Most of the actuators LED representation can be commanded by clicking on theirs representations If command 1s possible the mouse
27. cursor becomes a hand 1 When actuator is ON the LED is green Page 52 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 7 6 2 3 SET POINT CONFIGURATION Set point for debug process values can be configured by clicking on the corresponding display when mouse is over a configurable value the cursor changes into a hand Once a configurable value 1s clicked you can type your set point value op Validate the value by pressing the enter key or clicking on View Set Point button As in tool panel when View Set Point button 1s pushed all set point values are displayed 7 6 2 4 CHAMBER TEMPERATURES In debug mode values of the two chamber s temperature probes are displayed but there is only one set point for chamber temperature That is why only the Chamber Temp 1 display can be clicked to configure set point 7 6 2 5 CYCLE DURATION In debug mode there is no set point for cycle duration The displayed value corresponds to the elapsed time since RF generator has been turned on 7 6 2 1 THROTTLE VALVE COMMAND Command of throttle valve has a specific way of functioning It can be configured by three methods Clicking on OPEN button will open entirely the valve clicking on CLOSE button will close entirely the valve and entering a pressure set point will activate the valve regulation It is always the last sent command that is taken into account Moreover in debug mode th
28. e throttle value 1s displayed in percentage and angle degree units 7 6 2 1 PULSE OPTION Pulse option can be enable by clicking on Pulse button When pulse is enabled Duty Cycle and Frequency controls are displayed and allow operator to configure the pulse When pulse is disabled these controls are hidden Page 53 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 8 SETUP MENU 8 1 PROCESS CONSTANTS TAB 8 1 1 PRESENTATION This tab allows an advanced user to configure general process values Process State WAIT ACK END i Recipe User E m nan plas DSB Series Supervisor DSB 6000 Version 1 1 0 1 03 26 2010 09 59 10 i Process constants st Equipment Tracing Online Datalog Access Rights Process Constants Restore Gas Lines Gas Interval MFC Range Gas 2 Gas Pre Open s Gas Stabilization s Gas Pre Plasma s e wj 5o a 10 le wj 10 le wj 10 la MFC Range Gas 3 Gas Post Plasma s Gas Pre Vent s Vent Time s i fm 5 a y 19 e wj 10 a m 6o 4 Temperature Miscellaneous HOLD T End v a Warm Substrat Multiple Wafers v 300 a T Security Baratron Range Torr RFG Power W T Security v a 1 m 300 v Warning 7 process configuration has been restored from PLC It is composed of four parts Miscellaneous area Eb Gas Interval ar
29. ea E Temperature area EY and Gas lines area Ed These areas are described below Command panel ED contains three buttons Save button will save the displayed configuration inside PLC memory when it is clicked Restore button load configuration stored inside PLC memory when it 1s clicked Save As button 1s not used in this tab because process constants can only be saved inside PLC memory Page 54 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 8 1 1 1 MISCELLANEOUS Warm Substrate button enable the substrate warming when it is checked disable it elsewhere Multiple Wafers button changes the wafer representation in Tool tab main menu and Debug Mode tab service menu Display a cassette when it is checked a single wafer elsewhere Baratron Range selection field configure maximum value in Torr unit detected by the baratron It can be 1 2 or 10 and must be compliant with the physical baratron RFG Power selection field configure maximum value in Watt unit of RF generator It can be 300 600 or 1000 and must be compliant with the physical RF generator StandBy TimeOut configures the time at which the machine goes in StandBy Mode It can be O functionality deactivated up to 3600 s 8 1 1 2 GAS INTERVAL Gas Pre open configures the amount of time before opening gas valves Gas Stabilization configures the amount of time bef
30. ed to save configuration in a specific directory When this button is clicked the following window 1s shown Configuration Backup Dialog Selected Folder Content Select Folder To Save In CA 1 Autolt E Configuration xml Documents and Settings E AccessRights xml Intel JobConf MSOCache 2 NANOPLAS_EC E iz m Bin svn Components Confiquration Resources Selected File SpectrometerSimulatorData File Name 1 Traces vs XSD m Sources Warning 1 NVIDIA Program Files This panel allows saving configuration for Equipment Simulation Mode Material Processing Host Communication Database Tracing and Online Datalog The user selects a folder an existing file or types a file name and click OK to validate the backup If button Cancel is clicked the operation 1s cancelled and process constants are shown End point detection parameters Un allow operator to configure the end point detection functionality This area 1s optional and may be not displayed if Spectrometer or Photo Diode device are not installed on device Page 58 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 8 2 1 1 SPECTROMETER END POINT SYSTEM Spectrometer ci w 070838 a C2 w 0 001138 a C3 w 33486 a Spectrometer area Eb contains values used to convert CCD detector pixel into wavelength These val
31. eference Software Manual DSB6000 4 3 WARNING Most of information panels include an area Warning Bl It is used to guide the user it may contain a proposal for the next task or a warning message about a wrong action done by the operator It is normally located at the bottom of information panel Recipe Recipe Modules Recipes Recipel Recipe2 Recipe3 Recipe4 Recipe Warning Page 13 of 73 nanOplas USER MANUAL DSB SERIES EQUIPMENT CONTROLLER SOFTWARE Reference Software Manual DSB6000 4 4 SALIENCE MANAGEMENT Border around buttons is used to display the state of corresponding functional area It is a method to attract the attention of the user in an incomplete a warning or a particular state Used colours correspond to following states Red indicates an alarm Blue indicates an unfinished action Yellow indicates a warning Green indicates that user must be focus on this area DSB Series Supervisor DSB 9000 Version 1 0 0 0 Process State IDLE E Recipe Engineer E nancCplas 07 22 2009 092623 Tool Monitoring Throttle Value Vacuum Pump Pressure Chamber T C Substrate T C FWD Power E RFL Power mmm O 9 End point detection Page 14 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 4 5 LIGHT TOWER The light
32. el Devi ai Minimum V Read Recipes Setup Nanoplas Datalog Alarm Help Graphic area 1 displays results of photo diode s scan X axe s unit is Voltage measurement done during a single read or during a continuous read Area 2 configures a continuous read Start button starts reading at the Loop Delay period on Physical Channel and Stop stops it Area EY allows an advanced user to configure a range of Voltage allowed on Hardware device These parameters are taken into account only in the Service mode panel Read button read one value and displays 1t on its right Command panel EN contains Exit Service Mode button Click on it to go out of Service Mode Page 47 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 7 5 PLC DATA TAB 7 5 1 PRESENTATION This tab allows an advanced user to view and modify independently each used items with PLC communication DSB Series Supervisor DSB 9000 Version 1 0 0 0 Process State m Recipe nanOplas i 07 30 2003 11 40 56 Service pins PLC Interface Spectrometer PLC Data Debug Mode Direct control of equipment is possible only in service mode To display PLC s data Enter Service Mode button must be clicked Bl Page 48 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manu
33. ervice Mode 700 750 Wavelengths Commands Scan Configuration Integration Time ms Start Of Scan nm Refresh Time ms v 100 a End Of Scan nm Stop Scan Single Scan Continuous Scan HI Graphic area 1 displays results of spectrometer s scan X axe s unit can be Wavelength during a single scan or Time during a continuous scan Command area BJ contains some buttons to command spectrometer s scan Scan button start a scan and Stop Scan stop a scan only for continuous scan Scan Configuration area EY allows an advanced user to configure a scan When Single Scan is checked Graphic area displays result of wavelength scan in the range Start Of Scan End Of Scan When Continuous Scan is checked spectrometer performs multiple scan at the Refresh Rate period until Stop Scan is clicked In Continuous Scan mode only the Start Of Scan wavelength is scanned Page 46 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 7 4 1 PHOTO DIODE SERVICE MODE Once Service Mode is entered information panel becomes as follow DSB Series Supervisor DSB 6000 Version 1 1 0 0 Fracoss State IDLE Recipe User a nancCplas 11 18 2009 12 34 15 Service RE Tema PLCinterface PhotoDiode PLE Data Debug Mode Graphic Exit Service Voltage mV Maxi Loop Delay monem US Physical Chann
34. k on Logon button the following dialog box appears User Name Nanoplas Password Change Current User Name User Status The user needs to select a user name enter a password and click on Log on button If a user is already logged field Current User Name displays his name To be logged off click on Log off button Status field displays some information about current operation and its result Change Password button appears once the user is logged and allows password to be changed OK button allows closing the Logon dialog box Shut Down allows user to close the software Page 11 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 4 2 2 CHANGE USER S PASSWORD On Change Password button s click the dialog box becomes as follow User Name Nanoplas w Password New Password Confirm Password Warning m To change password the user must enter his current password inside Password field and the new password inside New Password field Confirm Password field is used to confirm the new password so it must be the same as New Password field In case of errors Warning field displays a message that indicates the wrong action or the procedure to be done to resolve the issue To save new password click on OK button To cancel the operation click on Cancel button Page 12 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL R
35. le Module 1 Module 1 Module 2 Module3 Modules Module 4 Module 4 Add gt gt lt lt Remove Warning This dialog box is similar to Creating recipe dialog box see 6 1 2 Recipe creation but contains parameters of the edited Recipe You can modify Recipe s configuration as describe for Creating Recipe dialog box Change the Recipe name to an unused name will rename the Recipe When configuration of Recipe is done click on OK button to save it inside PLC memory or Cancel button to abort the creation Information panel will be shown with an updated Recipe list Page 31 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 6 2 RECIPE MODULES TAB 6 2 1 PRESENTATION Modules tab lists all existing Modules inside Module area EN Command Panel 2 allow to Create Delete or Edit a Module reate errar nnns near anna nnn narra cnn nnno le e e Recipe Modules Module 1 Module 2 Module 4 Module3 C H Edit Module D ea odul elet Modul 2 Warning Page 32 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 6 2 2 MODULE CREATION To create a new Module Create Module button must be clicked Then Creating Module dialog box 1s show Recipe Modules Creating Recipe Module General Name RFG 1 W iv MFC 02 scem w
36. lows the operator to abort current Recipe Page 23 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 dl TITLE PANEL DURING EXECUTION Process State VACUUM WARM Recipe Recipe O Gas Pre Stab Gas Stabilization Pre Plasma Plasma Post Plasma Pre Yentilation During process title panel displays the state of PLC in Process State field the name of processing Recipe in Recipe field and the list of Module to be processed The current processing Module and its current state are highlighted here current Module is Modulel and its state is Gas Pre Stab 5 1 4 END OF PROCESS At the end of process the software waits for operator to acknowledge this end Command Panel is updated and Completed button is show Process State WAIT_ACK_END a Recipe User m I nancCplas DSB Series Supervisor DSB 6000 Version 1 1 0 1 03 25 2010 3 33 38 Tool Monitoring End point detection Throttle Value Vacuum Pump Pressure Er Chamber T C B deac Substrate T C ES C FWD Power di RFL Power EXE o 1 Gas 2 n2 View Set Point Page 24 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 5 1 5 STAND BY MODE If the tool is in IDLE since a long time Time Out has to be configured in Process Constant panel the equipme
37. nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 Reference lt TMI TD MAN 09 088 001 001 1300 docx Version lt V 1 3 Date 20 04 2010 nanOplas GUI USER MANUAL Approbation Table Agileo Automation Name E IO LLL EE Page 1 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 REVISION TABLE 31 07 2009 19 11 2010 Photo Diode integration 20 04 2010 DSB 6000 amp 9000 merged into same software Page 2 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 TABLE OF CONTENTS Revision Table 2 Table of contents 3 1 Document Introduction 6 1 1 Scope 6 1 25 Intended audience and reading suggestions 6 Le Definition acronyms and abbreviation 6 2 DSB Senes Introduction 7 3 Software GUI Overview 8 4 General User Interface 10 4 1 Access rights management 10 4 2 Logon window 11 4 2 1 Connection procedure 11 4 2 2 Change user s password 12 4 3 Warning 13 4 4 Salience management 14 4 5 Light tower 15 4 6 Start up of application 15 4 6 1 Coherence Verification panel for Recipes 16 4 6 2 Coherence Verification for Modules 17 5 Main Menu 18 5 1 Tool tab 18 a Presentation 18 5 1 1 1 Displayed Device 18 lll DoE OO titi diia 18 SNmEMMEP VIO 19 5 1 1 2 Actuator st
38. nsfer PLC1 400069 End 31 07 2009 09 55 52 812 5 ms 31 07 PLC Item Changed PLC1 400068 0 31 07 PLC Recipe7 has been loaded successfully 31 07 PLC Write Completed received ManualEvent seted 31 07 PLC InitDictionary Index 7 End 31 07 2009 09 55 52 812 5 ms 31 07 PLC InitDictionary End 31 07 2009 09 55 52 5656 25 ms 31 07 PLC Recipe list update done 31 07 PLC Update of recipes and modules lists finished 31 07 TMITech E95HMITempl Button Log on has been pressed on logon dialog 31 07 TMITech E95HMITempl Button Ok has been pressed on logon dialog 31 07 TMITech E95HMITempl User Nanoplas has been logged on 31 07 TMITech E95HMITempl Command button Save has been pressed navigation area Setup information p HMI_Operator Configuration file has been changed TMITech E95HMITempl Command button Add User has been pressed navigation area Setup informat Search Trace View cle Counters T Completed Show Last Trace Line Reset Cycle Direction Stopped Counters Down Find Next 3 Show Applied Filter Traces are displayed in real time inside List area ED It is possible to pause displaying traces by clicking on Pause button To resume trace display click on Resume button Traces can be cleared by clicking on Clear button Search area 2 allows user to easily find a trace Type the text to find in Text To Find field select 1f results should match searched text
39. nt goes automatically in StandB y mode In this mode operator has to activate the equipment first before starting a new recipe using the Vent button DSB Series Supervisor DSB 6000 Version 1 1 0 1 aaa STANDBY MODE ACTIVATED E Recipe User ia ET nanOplas 03 25 2010 10 06 32 mi Monitoring Vent Tool End point detection Throttle Value Vacuum Pump Pressure o EUR MA Chamber TC Substrate T C C FWD Power ES RFL Power ow 5 1 5 1 TITLE PANEL DURING STAND BY MODE EXECUTION During this mode title panel displays the state of tool as shown below Page 25 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Process State Recipe 1 Tool goes to Stand By mode Process State STANDE T MODE ACTIVATED Recipe 2 Tool is in Hibernating state Stand By mode Process State Recipe 3 Tool goes to Production mode 5 2 MONITORING TAB 5 2 1 PRESENTATION This tab is used to trace process values in function of time Graphic area ED displays the curves with automatic axes and legend of point colours Data area E displays some button allowing to show curves on graph depending on their kind temperature pressure and a warning box Only two kinds of data can be displayed on one graph scales of each data are in a side of graph left or right Command Panel EY is updated and displays Add Graph button and Delete Graph button Page
40. oftware Filters area Eh displays the list of predefined filters already configured To add a new filter type a name in the field above buttons and click on Add To remove a filter select an existing filter in the list and click on Remove button To edit a filter select an existing filter and modify its Level and or Source Selected Filter area E reminds the configuration of selected filter Number of Trace 6 configures the number of trace displayed inside software Only last traces are displayed Command panel 74 is same as in 8 2 Equipment Tab See this section to detailed explanations Page 63 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 8 5 ACCESS RIGHTS TAB 8 5 1 PRESENTATION Access Rights tab allows user to choose the level needed to access all different HMI parts It 1s also used to manage the list of users and theirs level access DSB Series Supervisor DSB 9000 Version 1 0 0 0 Process State Recipe Nanoplas 07 31 2003 11 25 41 nanOplas Process constants Access Configuration Restore HMI Access Rights User Access Rights s Alarm T Users A Engineer Equipment Tracing Online Datalog Access Rights Level Datalog t Help O Visibility O Level1 O Level2 O Level4 O Level5 O Level6 O Level Nanoplas Main Operator User2 User3 User4 User6 Nanoplas Service Setup
41. ore attempting to reach the pressure set point Gas Pre Plasma configures the amount of time before activating the RF generator Gas Post Plasma configures the amount of time before closing the gas valves Gas Pre Vent configures the amount of time before closing the vacuum valve Vent Time configures the amount of time before considering that atmospheric pressure is reached and asking for operator acknowledge at the end of process 8 1 1 3 TEMPERATURE HOLD T Temp button determines if temperature should be maintained at the end of recipe When this button is checked T End Recipe field is enabled and its value configures the chamber temperature at the end of recipe T Security button determines if temperature could generate an alarm When this button is checked T Security field is enabled and configures the maximum chamber temperature before generating an alarm Page 55 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 8 1 1 4 GAS LINE Gas 2 selection field determine the secondary gas kind It could be N2 Ar ArH2 CF4 SF6 and HeH2 The maximum range of Mass Flow Controller for this gas line is configured in MFC Gas 2 Range field Gas 3 selection field determine the third gas kind It could be N2 Ar ArH2 CF4 SF6 and HeH2 The maximum range of Mass Flow Controller for this gas line is configured in MFC Gas 3 Range field Page 56 of 73 nanOplas DSB SERIE
42. rence Software Manual DSB6000 Review Recipe Module General Name RFG 1 W y a MFC 02 sccm Y a Cycle T Chamber C Ww MFC N2 sccm Y OFF Pressure mTorr Y E T Substrat C disabled ON MFC Ar sccm disabled ON OFF Pulse Process Option ENABLE DISABLE The Pulse Process Option is disabled Warning This dialog box is describe inside 6 2 2 Module creation When a module is reviewed all parameters are displayed but none can be changed To close this dialog box click on button OK or Cancel To start the recipe click on button Start or click on button Cancel to abort the start of recipe Page 22 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 5 1 3 RECIPE EXECUTION Once the Start button of Recipe Selection dialog box has been clicked and selected recipe contains no error the Tool panel 1s show PLC will start the recipe only if the door is closed When recipe starts title panel is updated DSB Series Supervisor DSB 9000 Version 1 0 0 0 Process State VADUUM WARM y Recipe Recipe3 Engineer a i Qn22 2009 El 142048 Tool Monitoring End point detection Throttle Value Vacuum Pump Pressure Chamber T C Substrate T C During Recipe execution Command Panel see 3 Software GUI Overview is updated and Abort button appears This button al
43. rsion 1 0 0 0 07 23 2003 17 25 21 PLC Data Service Debug Mode Tn PLC Interface Spectrometer Direct control of equipment is possible only in service mode In order to go in Service Mode Enter Service Mode button must be clicked EN Page 39 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 7 1 2 SERVICE MODE After entering Service Mode the information panel becomes as follow Process State IDLE B Recipe nanOplas Ei p x 07 29 2009 17 36 57 eries Supervisor DSB 9000 Version 1 0 0 0 Spectrometer PLC Data Debug Mode Service TEE PLC Interface PID T amp Tune table Chamber Fine tune Paral Fine tune Para2 PID Pressure table Pressure Gain amp 0 PID T amp Tune Table area 1 allows an advanced user to configure temperature and RF generator tune regulation PID Pressure Table area 2 can be used to configure the pressure regulation This configuration 1s not used when a throttle valve 1s installed on device Command panel EY contains three buttons Save button will save the displayed configuration inside PLC memory when it is clicked Restore button load configuration stored inside PLC memory when it 1s clicked Finally click on Exit Service Mode to go out of Service Mode Page 40 of 73 nanOplas DSB SERIE
44. sible to choose a predefined filter D Predefined filter configuration is explained in 5 4 Online datalog tab Applied filter is reminded in Applied Filter area ED To apply a filter click on Apply Filter button To clear all applied filter click on Cancel Filter button in command panel I Page 71 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 10 ALARM MENU 10 1 ACTIVE ALARMS TAB 10 1 1 PRESENTATION Active Alarms tab list all alarms that occurred during software execution DSB Series Supervisor DSB 9000 Version 1 0 0 0 07 31 2003 14 37 14 Active Q Alarms Acknowledg e Alarm Date Time ALID Alarm Source State Alarm Text 07 31 2009 1 PLC Alarmist Set O2 gas in defaut Process State Ij Recipe Nanoplas E El nanOplas Zz If an alarm is set its text color is red and Alarm button in navigation panel has a red salience To acknowledge active alarms click on Acknowledge Alarm button All alarm s text colour will come back to black Page 72 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 11 HELP MENU 11 1 HELP TAB 11 1 1 PRESENTATION Help tab displays this help file 11 2 ABOUT TAB 11 2 1 PRESENTATION About tab gives some information about NANOPLAS and Agileo Automation Process State Po Recipe User no nanOplas E p m
45. tion 50 7 6 2 Service mode 51 7 6 2 1 Displayed device 51 7 6 2 2 Actuator commands 52 7 6 2 3 Set point configuration 53 7 6 2 4 Chamber temperatures 53 7 6 2 5 Cycle duration 53 7 6 2 Throttle valve command 53 7 6 2 1 Pulse option 53 8 Setup Menu 54 8 1 Process constants tab 54 8 1 1 Presentation 54 8 1 1 1 Miscellaneous 55 8 1 1 2 Gas interval 55 5 1 1 3 Temperature 55 8 1 1 4 Gas line 56 8 2 Equipment tab 57 8 2 1 Presentation 57 Page 4 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 8 2 1 1 Spectrometer End Point System 50 8 2 1 2 Photo Diode End Point System 59 5 2 1 3 End Point Detection Parameters 60 8 3 Traces tab 61 8 3 1 Presentation 61 8 4 Online datalog tab 62 8 4 1 Presentation 62 8 5 Access rights tab 64 8 5 1 Presentation 64 8 5 2 HMPs access right 65 8 5 3 User management 66 8 5 3 1 Know a user access level 66 8 5 3 2 Change a user level access 66 8 5 3 3 Add a user 66 8 5 3 4 Edita user 68 8 5 3 5 Delete a user 68 8 5 3 6 Save and restore 68 9 Datalog Menu 69 9 1 Traces tab 69 9 1 1 Presentation 69 9 2 Filters tab 71 9 2 1 Presentation 71 10 Alarm Menu 72 10 1 Active alarms tab 72 10 1 1 Presentation 72 11 Help Menu 73 11 1 Help tab 73 11 1 1 Presentation 73 11 2 About tab 73 11 2 1 Presentation 73 Page 5 of 73 nanOplas DSB SERIES EQU
46. tower s display 1s located inside title panel as indicates on the screenshot below Process State IDLE DSB Series Supervisor DSB 9000 Version 1 000 Recipe nanoOplas 07 21 2009 11 57 38 Tool Monitoring Light Tower Vent FWD Power RFL Power 4 LP Light tower s control represents the command send by PLC to the real DSB light tower It is used to identify the state of the device with colour signification as below Green On N A Off Not powered e Blinking Idle state Yellow e On N A e Off N A e Blinking Performing a process Red On N A Off No active alarms e Blinking At least one active alarm Blue e On N A Off N A Blinking Wait for an user entry 4 6 START UP OF APPLICATION Hardware equipment stores Module and Recipe using an index Operator manipulates these using a textual name stored inside the PC Software At start up a coherence verification 1s done to ensure that the hardware Module and recipe lists are compliant with PC software lists If differences are found the operator has to correct errors using a panel specific to the recipes another one for Modules Page 15 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 4 6 1 COHERENCE VERIFICATION PANEL FOR RECIPES DSB Series Supervisor DSB 6000 Version 1 1 0 1 Hesso disi E Recipe User m
47. ues must corresponds to those wrote on the spectrometer By clicking on spectrometer s picture simulation mode can be enabled or disabled 8 2 1 2 PHOTO DIODE END POINT SYSTEM Photo Diode Physical Channel w 0 a Page 59 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 Photo Diode area 2 contains values used to select hardware input to read intensity values By clicking on photodiode s picture simulation mode can be enabled or disabled 8 2 1 3 END POINT DETECTION PARAMETERS End Point Detection Parameters Sampling ms hd 100 a Initial Delta 96 O 0 3 A Waiting Time s hA 27 P Window definition AA 6 a Snap Shot Delta 0 1 a Transitional point DA 1 a This area allows to configure the algorithm of end point detection independently of device used spectrometer or photo diode Device performs data acquisition at the Sampling period Below an acquisition done using a photo diode device Snap Shot Delta Previous Acquisition window 5099509050505605040560000400090490290 X AOS gt E M cml RAE A A S Transition EMO ott Detection Points gt Set point Stop Post Waiting Time gt Threshold time oq e 1 4 7 TO 13 16 19 22 25 28 31 34 3 40 43 46 49 52 55 The Window definition indicates how many acquisitions shall be taken into account to perform the aver
48. ure 16 15 4 _ _ _ A _ _ _ _ A 3 __ _ 3 _ 3h _ _ h_ gt 14 MFC 13 12 A 5 10 E 8 g Ht 7 6 Spectrometer 5 4 5 1 Warning 2 1 0 14 28 50 14 28 00 14 29 10 14 29 20 14 29 30 14 29 40 14 29 50 14 30 00 14 30 10 14 30 20 14 30 30 14 30 41 Time 5 2 2 EXECUTION During the execution data are shown with a time window of I min30s When the process is finished Process State in WAIT ACK END time scale is refreshed in order to show the entire process period When end of process is acknowledged Process State in IDLE all graph are cleared Page 28 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 6 RECIPE MENU 6 1 RECIPE TAB 6 1 1 PRESENTATION Recipe tab lists all existing Recipes inside Recipe area EN Command Panel 2 allow to Create Edit or Delete a Recipe Recipe Recipe Modules Create Recipe ator Delete Recipe 2 Recipes Recipe 1 Recipe 2 Recipe 3 Recipe 4 Warning Page 29 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 6 1 2 RECIPE CREATION To create a new Recipe Create Recipe button must be clicked Then Creating Recipe dialog box 1s show J Recipe Recipe Modules Creating Recipe
49. ured in Cycle field Format of time is HH mm ss If spectrometer option is enabled this field is disabled and grayed the end of process will be determined by spectrometer Pressure inside process chamber can be set in Pressure field Its unit is milliTorr configuration s range is 0 up to the maximum baratron range configured in Setup menu see 8 1 Process constants tab Page 35 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 6 2 2 3 PULSE PROCESS OPTION Pulse Process Option DISABLE Duty Cycle 7 vi o ja Frequency Hz y o fa Pulse Process option can be enable in the Module by clicking on DISABLE button When this button is clicked its text changes to ENABLE and other controls are enable The option will be taken into account during execution of the Module Duty Cycle field is used to configure the duty cycle of the pulse It is configured in percent Frequency field configure the frequency in Hertz of the pulse 6 2 2 4 END POINT SYSTEM OPTION 6 2 2 4 1 SPECTROMETER OPTION Spectrometer Option DISABLE Wavelength nm y 7705 P petaca a otop Post Threshold 00 00 00 Spectrometer option can be enable in the Module by clicking on DISABLE button When this button is clicked its text changes to ENABLE and other controls are enable The option will be Page 36 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE US
50. user and then click on Edit User button Information panel becomes as in previous section see 8 5 3 3 Add a user Modify user configuration as you wish and click on Apply button to validate changes or Cancel to abort the operation 8 5 3 5 DELETE A USER To delete a user select an existing user and click on Remove User button Be careful there is no warning message before removing a user 8 5 3 6 SAVE AND RESTORE After any changes on Access Rights tab it is possible to Restore last saved configuration or to Save And Apply the new parameters Those buttons are located inside command panel Page 68 of 73 nanOplas DSB SERIES EQUIPMENT CONTROLLER SOFTWARE USER MANUAL Reference Software Manual DSB6000 9 DATALOG MENU 9 1 TRACES TAB 9 1 1 PRESENTATION Traces tab displays traces that were generated during software execution Process State Po E nanOplas m DSB Series Supervisor DSB 9000 Version 1 0 0 0 07 31 2003 13 50 28 Traces Filters i Apply Filter Att Date Source Text 31 07 PLC Item Changed PLC1 400068 31 07 PLC Item Changed PLC1 400071 Aere Ud 31 07 PLC Item Changed PLC1 400072 31 01 PLC Item Changed PLC1 400073 31 07 PLC Item Changed PLC1 400074 31 07 PLC Item Changed PLC1 400075 SLOT PLC Item Changed PLC1 400076 31 01 PLC Item Changed PLC1 400070 7 31 07 PLC DataTranster PLC1 400070 Value 7 ManualEvent seted 31 07 PLC DataTra
51. w 0 a Cycle 00 00 00 g T Chamber C w 0 a MFC N2 sccm disabled Pressure mTorr w 0 a T Substrat C disabled MFC Ar sccm disabled This area contains the most principal Module s parameters The name of new Module can be set in Name field Indexes of Module 1 up to 100 are fixed and defined automatically by the system To create new Module enter an unused name Power of RF generator can be set in RFG 1 field Its unit is Watt and it could be set from 0 to the max power generator configured in Setup menu Process Constant tab see 8 1 Process constants tab Chamber s temperature is configured in T Chamber field The unit is Celsius degree Substrate s temperature is configured in T Substrate field The unit is Celsius degree This parameter can be enabled or disabled by clicking on right side button When substrate warm is disabled the value 1s forced to 0 Oxygen gas flow can be set in MFC 02 field Its unit is Standard Cubic Centimeters per Minute Secondary gas flow is configured in MFC Gas 2 field It has the same unit than oxygen gas flow This parameter also can be enabled or disabled by clicking on right side button When disabled the value is forced to 0 The secondary gas used during process is configured in Setup menu see 8 1 Process constants tab Third gas flow is configured in MFC Gas 3 field Its configuration behaviour is same as secondary gas flow Plasma duration is config
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