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1. Figure 2 50 Image Processing Module e Select the desired acquisition channel and direction for the image to be processed The raw image data will not resemble the image in the scan image window as some basic real time image processing was applied as it was being acquired e Click to apply a plane correction Revision 1 1 26 Nano R AFM User Manual Z range 337 43 nm Select Correction Model Plane Correction 9 Scan Data Z SEN rev Z range 159 37 nm Image tit 0 000 deg toward 0 0 deg 3 Point Plane Correction Average data inthe proximity of f pixels Polynomial surface leveling Polynomial surface X leveling Polynomial surface X leveling C Polynomial surface Y leveling f Polynomial X line leveling Polynomial line leveling Polynomial order f4 Figure 2 51 Plane Leveling Tool e Under Select Correction Model select Polynomial X line leveling Polynomial order 1 e Under Select Area to Analyze select Exclude Area Area Marker Rectangle Revision 1 1 Select Area to Analyze Entire Scan Area Area marker Exclude Area Include Area Rectangle hd Correction Scope Correct All c Keep original data in excluded area c Assign mean value to excluded area rA Offset Do not change Z offset Subtract plane offset Set Minimum Z to zero To exclude the features on the PNI AFM reference use the mouse t2. when sere e by moving the focus down Click Click Next to bring the tip close to the sample done 1 Next when done Focus ge Focus t PA Figure 2 35 Coarse Approach Wizard Screens First focus on Probe then focus on Sample and click Next Revision 1 1 20 Nano R AFM User Manual Locating Features of the Interest After Coarse Approach Features of the Interest can be located by using the X Y steps to facilitate both coarse and fine movements AFM Stage Controls Seles em zoom X Y Motors meneere Focus Zoom is 505 m n gt hl Ad Al Motor Positions Coarse Approach x RiT pm Focus Step Z Motors oo um j a7 E Z Tripod 4 11 982 77 pm E all to limits g ay oy _ EE Trackball Figure 2 36 X Y Stage Controls Figure 2 37 Positioning the Probe over the Scan Area 10um squares 20um pitch If necessary you can orient the Sample by simply rotating the Puck by hand Focus on the Cantilever Click Tip Approach button Frequency i i gt Image p Tip Sweep Processin Retract Figure 2 38 EZMode Toolbar CAUTION Once the Tip Approach is complete and the tip is in contact with the sample surface do not exit the SPM Cockpit software or turn off the Controller without first retracting the tip Doing SO may cause damage to the tip scanner and sample Revision 1 1 Chapter 2 Tutorial Contact EZMode Light Lever 21 Tip Appro
3. Figure 2 10 Red Dot Window Controls Adjust iia If you cannot find the probe on the monitor Screws e The probe may not have been installed properly Repeat the probe screws installation procedure to make sure the probe is seated squarely in the L mount e The objective s field of view may need to be adjusted in X Y using the adjust screws This is usually necessary when switching between a contact and close contact probe due to the difference in size You can confirm that you have installed a contact cantilever by noting the difference in length between contact and close contact cantilevers as shown in Figure 2 12 A k l Figure 2 11 Probe Installation Close Contact Cantilever Contact Cantilever Figure 2 12 Contact vs Close Contact Probes Revision 1 1 12 Nano R AFM User Manual The red dot alignment procedure has 3 goals e position the laser spot on the back of the cantilever e position the photodetector in the center of the reflected laser beam e achieve a maximum minimum overall measured signal strength Watch the video monitor as you adjust the laser alignment knobs on the scanner head to bring the laser spot onto the back of the cantilever The laser spot should be centered on the cantilever not too close to the end as shown in Figure 2 13 i r Figure 2 13 Centering the Laser Spot on the Cantilever Watch the red dot in the Red Dot Alignment window shown in Figure 2 14 as you tu
4. Tutorial Contact EZMode Light Lever 23 Line 124 Line 124 Figure 2 44 Line Scan Settings select the Z SEN and Z ERR channels from the drop down menus of the two corresponding line scan displays Pacific Nanotechnology SPM Cockpit BEE File Device Settings Tools Process Display Window Help Select Align Frequency D Tip gt Image Tip stat Mode gt Sweep stage Approach gt Sn Processin Retract Scanned Image Scanned Image Scanned Image Scanner Controls Scan Size um 76 351 aa Scan Rate Hz fi Resolution 256 Scan Angle lo oj z 38 18 pm Acq Channels fa Zoom Extra Zoom i S m nm fi Topography Gain dx 2x Repeat Scan E 2 SEN Forward Reverse ZERRI x Forward F Reverse 73 la M Histogram correction M Auto leveling 30 hh ca Histogram correction Iw Auto leweling faa E Shading fiz hs Shading Line 124 Line 124 Setpoint o Gain 5 Proportional j4q Integral D Derivative zz Figure 2 45 Taking a Scan Click Scan button to take a scan The images of the selected channels will build up line by line in the displays If no data is generated the detector may be out of alignment In this case click Tip Retract from the toolbar re align the red dot Page 12 and try another scan To adjust the Z scale of the images left click and drag the bar to the left of each display to select a Z height range To
5. 146 55 nm 78 59 nm a Auta Done Cancel Figure 2 53 Histogram Tool The Z Diff measurement on the vertical bar confirms the 70 nm height of the PNI AFM reference features e To save any of your processed images select File Save Image s e To view 3 D images of the topography select 3D button sp JD View 11 Scan Data 7 SEN rev Color Correction Pacific Nanotechnology r we Color Gradient bel a l a 17 92 um C Gray Diffuse f None Scale Caen E E DT e m aspect ratio Light Intensity wh Figure 2 54 3D View CAUTION To prevent damage to your scanner probe and sample be sure to retract the tip before exiting SPM Cockpit software or turning off the Controller e Click Tip Retract It is now safe to exit SPM Cockpit software Revision 1 1
6. LLCrg s01165 contTA LLCFg My Recent e cell26 s0189 retune LLCFg Documents ly rect673 stateck cc LLCfg E cca Lica test1 LLCFg ES closeContact LLcfg E CloseContactTA LLcfg E cm408 LLcfg E Contact LLecfg E Contact TA LLefg Ej cross osc LLChg E noise LLC E osc tria s0189 LLCFa E pfizer s0189 LLCFg E s0165 cc FfTA LLCFg hy Documents Hy Computer MyNetwork Fle name s0165 co genTA LLCtg aces Files of type Light Lever Sensor Configuration Cancel AA Figure 2 4 Loading a Configuration File 5 Click Linearize check both boxes and click OK 3t Linearize Calibrate Check Connection confirms communication between controller and user PC Scanner Auto Linesrit checks X amp Y full scale linearity Figure 2 5 Initiate Connection Confirm and Calibration Routines 6 Click OK when the communication between the Master Computer and the Controller is confirmed If there is no connection you need to exit the SPM Cockpit software and restart both the Master Computer and the Controller Ping the Controller PING Waiting for Controller s response Figure 2 6 Connection Confirmed Revision 1 1 10 Nano R AFM User Manual 7 Click Start to proceed with the linearization procedure Automatic Linearizer Range w Automatic Linearizer Range Acquired sensor values Current range This procedure wall mowe the scanner to find the maxi mum range for Postion 1 linearized Scanner
7. magnetic mounting surface and it will prevent the substrate from Snapping down too forcefully which may damage the probe t Emitted le ananiif Figure 2 28 Mounted Probe To Install a new probe e Use tweezers to nudge a probe so that the substrate extends over the edge of the magnetic strip in the probe box Figure 2 29 Figure 2 27 Probe Exchange Position To remove a probe Use tweezers to grasp the metal substrate as indicated in Figure 2 28 Carefully rotate the tweezers so the cantilever side of the substrate lifts up off the magnetic mount first set the probe down onto the magnetic strip in the probe box so that the side of the substrate opposite the cantilever makes contact first Carefully rotate the tweezers so the cantilever side of the substrate comes down onto the magnetic surface as gently as possible Figure 2 29 Nudge the Probe into Position Revision 1 1 18 Nano R AFM User Manual e Grasp the metal substrate and carefully rotate the tweezers so the cantilever side of the substrate lifts up off the magnetic strip first as shown in Figure 2 30 e Place the probe onto the magnetic mount so the side of the substrate opposite the cantilever fits into the L Figure 2 31 Push the probe substrate flush against the L mount e Use tweezers to push the substrate flush against the L as shown in Figure 2 31 e Hold the scanner head by the handles and rotate it b
8. view a single line scan hold down the SHIFT key and left click in either image display to define a horizontal line across the image Make sure the line includes the square features The line scan profile for the Z SEN channel should resemble the shape and size of the 10 m PU RARES ERANU features Revision 1 1 24 Nano R AFM User Manual e To take additional scans click Scan again or check Repeat Scan to take continuous scans of the Same region e To zoom to a new scan region Left click and drag in the image display to define a scan area 3 Pacific L SPM Cockpit ettings ess Display Window Help Align Frequency Laser Sweep Scanned Image Device Pr Select Mode Scanned Image Scanned Image 2533 52 Zoom In x offset 2000m Y offset 3804mV Zoom 23 g SEN 3 Forward Reverse rm id v Histogram correction eg Auuto leweling 35 E Hh Shading Line 253 Line 253 Figure 2 47 Zooming to a new scan region Right click OK to confirm the new scan region t Pacific Nanotechnology SPM Cockpit File Device Settings Tools process Display Window Help Z ERR 49 Fo M Histogram correction W Auto leveling 5 ri Shading Line 52 Line 52 Figure 2 48 Confirming the new scan region Revision 1 1 ward Rewer r M Histogram correction V Ago leweling 17 52 um 0 00 pm aog Scanner Controls Sean Size um 76 351 Iz Reso
9. 8 Nano R AFM User Manual Chapter 2 Tutorial Contact EZMode Light Lever T BEFORE YOU BEGIN This tutorial details the steps for taking a contact AFM image of the PNI AFM reference in EZMode WARNING Before operating the Nano R AFM make sure you are familiar with the safety information on page iv POWERING UP THE SYSTEM 1 Turn onthe Master Computer 2 Turn on the Controller 3 Launch the SPM Cockpit software 4 Turn onthe video monitor SOFTWARE SETUP F Pacific Nanotechnology SPM Cockpit File Device Settings Tools Process Display Window Help 1 Select Settings Toolbar Mode EZMode 3 Toolbar Mode bly E2mode Expert Input Selects to ADC Shift F 1 Figure 2 1 SPM Cockpit 2 Click the Start button from the EZMode toolbar acral Sample Processin Retract Figure 2 2 EZMode Toolbar 3 Click Retract Tip and click OK when complete ul Start Eg Tip Retract ripkts D Pe Complete Configuration Figure 2 3 Retracting the Tip Revision 1 1 Chapter 2 Tutorial Contact EZMode Light Lever 9 4 Click Load Configuration select the PNl supplied contact mode configuration file and click Open This file should be located in the ConfigFiles folder in the SPM Cockpit directory It has the format xxxxcontact LLcfg where xxxx is the serial number of your Light Lever Nano R system r pen Configuration File Look ir oS ConfigFiles t amp s0165 cc genT4
10. ach The PID indicator at the bottom of the window will r turn green to indicate that the probe tip is in contact with the sample surface and the instrument is now ready to perform a scan Tip Approach Eg Complete Figure 2 39 Tip Approach SCAN THE SAMPLE e Click the Scan Sample button on the toolbar eee Align Frequency gt Tip i l Image Tip oF start mi Mode gt a Sweep ai Approach Processin Retract Pacific Nanotechnology SPM Cockpit Scanned Image E File Device Settings Tools Process Display Window Help ska Align gi Frequency gt Tip n b 5 Image Tip Pror start m Mode oe m Sweep 2an Approach ple Processin Retract ge Scanned Image Scanner Controls 39 67 um 73 33 pm 79 33 um Sean Size um 73333 4 0 00 pm 0 00 pm Sean Rate Hz fa Resolution 256 kd Scan Angle Jo fer o o a _33 67 pm Acq Channels Ja oa Zoom Extra Zoom Topography Gain f 4x C 2x 79 33 pm 79 33 pm Rapsa cow ztsEn f Forward Reverse z ERR ra f Forward F Reverse 400 a M Histogram correction V Autoteveling E Histogram correction I fanto Aat Jeveling fao o I Shading I Shading Proportional 40 Integral Derivative Status i M Channel z SeN Half Range 3 mv Full Channel 2 ERR Half Range j4 autotevel oe Offset 4885 my IY Auto autotevel Offset lasez mY Time Remaining Lines Remaining Device Directory C ipscan pci Free
11. ack to the level position e Gently slide the scanner back towards the stage until you feel some resistance e Turn the probe exchange knobs up 1 4 turn to lock the scanner head into place Now you can replace the Sample Puck as described on page 14 Once the probe is replaced click the Restore button It will restore Focus and Z motor positions to their initial settings Figure 2 32 SPM Cockpit Revision 1 1 Chapter 2 Tutorial Contact EZMode Light Lever 19 COARSE APPROACH Optical Assistance Coarse approach is very helpful to bring the probe into close proximity of the sample surface AFM Stage Controls Focus Zoom X Y Motors eo taaa Semele e Click Coarse Approach on Stage Control v 4 Motor Positions Window Z Motors 5 ae pant E Tipon Y 14 982 77 pm zjm agr F z 633 75 pm Set D ugu Al we Trackball J Fd Pacific Nanotechnology SPM Cockpit Y 77 AFM Stage Controls Focus e Click Next on Coarse Approach Wizard and DP the focus first for the tip and then for the sample With th z ica ne follow instructions as shown below IE Click Next to begin Si in preparation for tip approach this Wizard will guide you in adjusting his z n ile pel el 30165 comTA LLCig Figure 2 34 Coarse Approach Wizard Coarse Approach Wizard Coarse Approach Wizard Please use the controls below to Now please focus on the sample focus on the tip Click Next
12. cate the features of the interest to Image with AFM e Click the Up button to raise the Z motor until there is at least a few millimeters of clearance between the probe and the sample surface or puck if no sample is loaded monitor by eye AFM Stage Controls Focus X Y Motors Pe oad Sample Focus Zoom Motor Positions 7777 pra Focus Step on 7 o_o Hmi 1 3 7 pa Z Tripod Y 14 582 77 Hmi all to limits g A 1 F 4 688 75 ym is Set Wy unu E 4 203 94 um Goto 0 Trackball Figure 2 16 Raise the Probe Tip away from the Sample CAUTION To prevent damage to your scanner probe and sample be sure you have retracted the tip and raised the Z scanner as described in the preceding steps before moving the puck Click Start to begin the sample load procedure e Click Load sample and then Start button The motorized X Y stage will move the puck towards you to the limit of its range Figure 2 17 Load Sample Revision 1 1 14 Nano R AFM User Manual Being careful not to touch the probe slide the Sample puck towards you and then lift it up out of the groove Figure 2 18 Figure 2 18 Remove Puck Use tweezers to mount the PNI AFM reference on the center of the puck The sample disk is held in place magnetically Figure 2 19 Figure 2 19 Mounting the Sample Replace the puck on the stage by setting it down so the protruding piece on the bottom fits into the wide part of th
13. e groove and then slide it into position Rotate the puck so that the PNI reference sample is square with the scanner head Figure 2 20 Figure 2 20 Fit the Sample Puck into the groove on the X Y Stage w Load Sample When the motors stop you can load the neve sample Click Restore when you re ready ta Click Restorex Y button on Load sample window sd F The motorized X Y stage will return the puck to its original position Figure 2 21 Figure 2 21 Return Sample Puck to initial X Y Position Revision 1 1 CHANGE A PROBE Chapter 2 Tutorial Contact EZMode Light Lever 15 To operate in contact mode you need to use a contact probe Probes should be stored in the supplied boxes marked Contact and Close contact as the difference between the two types of probes is not easily visible to the naked eye First remove the sample puck as described in the section above Click Stage from the EZMode toolbar and click Change Tip in the AFM Stage Controls dialog AFM Stage Controls X Y Motors x Y Step feos yee Fi AlN bY oo Toad Sample Motor Positions w ATTA FT pra eer es Z Motors a a7 I Z Tripod y 1 882 797 pm all to limits g Al M F 41 685 75 um Set g ngm Go to 0 V Trackball Figure 2 22 Change Tip will put the scanner head into appro priate position to replace the tip S Pacific Nanotechnology SPM Cockpit File Device Settings Tools Pr
14. lution 256 Scan Rate Hz Scan Angle of ad mallet k Zoom Extra Zoom Acq Channels S Topography Gain 2 ix 2x Repeat Scan Feedback Controls zz Gain p Proportional fio I Integral fo lo im Setpoint Derivative Scanner Controls Scan Size um 17 919 m Resolution 256 kd Scan Rate Hz Sean Angle Hf silt T Zoom Extra Zoom Acq Channels e opm E ix 2x Topography Gain Repeat Scan Proportional 40 Integral _ bp Deri wative Chapter 2 Tutorial Contact EZMode Light Lever 25 IMAGE PROCESSING e Click Image Processing on the EZMode toolbar Figure 2 49 EZMode Toolbar e Click Select Source to open an image for processing g Pacific Nanotechnology SPM Cockpit Fie Device Settings Tools Process Scanned Image Scanned Image Scanned Image Scanner Controls Sean Size um 417 913 Scan Rate Hz fa Resolution 256 k Scan Angle o asl o 90 120 270 Ag Channels ja Zoom Extra Zoom Select Source Image for Proce fx E E Acquisition Direction poole Qh gee f Forward Repeat Scan E 2 5EN taal oryyrare e Reverse ieiti e TSEN Forvard f i Acquisition Channel zen gt Sor 66 Iw Histogram correction Iw Auto eweling fa Be TP shading Z Sensor Cancel Feedback Controls Setpoint jo a Gain E Proportional 40 Integral fio i Derivative lo Line 256
15. memory coreleft 2236288666 farcoreleft 56064 10 55 42 AM Me PLP Tip Exchange 50165 contTA LLCfg Figure 2 40 Scan Image Window Revision 1 1 22 Nano R AFM User Manual Set the scanner controls as follows Scan Size Leave as is the default size which is entered by the system when the calibration routine is performed is the maximum scan area for our scanner Scan Range 1 Hz Resolution 256 Scan Angle O Acq Channels 4 Topography Gain 1x e Set the feedback controls as follows Setpoint O Gain e2 Proportional 5 Integral 5 Derivative O Scanner Controls Scan Size um 79 333 Scan Rate Hz q Resolution 256 T Scan Angle 5 H Eg a Ee Acq Channels Zoom Extra Zoom D Spi Topography Gain 2 1x 2x Repeat Scan Gain 5 Proportional fi g a Integral Deriwatiwe o Figure 2 42 Feedback Controls Select the Z SEN and Z ERR channels from the drop down menus beneath the two image displays and for each display select Forward Histogram Correction and Auto Leveling Scanned Image 76 35 um 0 00 pm 35 18 um 2 SEN ia f Forward Reverse E m Histogram correction M Auto leweling E n Shading Figure 2 43 Image Display Settings Revision 1 1 TESS pm 0 00 pm 36 15 um a Sj I eR oy e Forward c Reyerse Z aah Iw Histogram correctian fw Auto leweling hy Shading J E Ee Chapter 2
16. o left click and drag in the image display so that every feature both whole and partial is completely covered Click Apply and the leveled image appears in the right hand display Chapter 2 Tutorial Contact EZMode Light Lever Zi To do Line Profile measurements select button as shown Profile Mode Dif 2 4 Marker 1 Marker 2 Protiles Horizontal E ari dj 622 2 202 g 824 Hrm l Eaj Vertical z j68 031 2 940 70 970 nm Oblique Polygonal Circular Average Diff4 3 Marker 3 Marker 4 Display Mode Apa lv Fit vertical Scale 7 Fit Horizontal Scale Invert Z data Z range 159 37 nm Line Roughness 1792 um Figure 2 52 Line Profile Tool e Under Profile Mode select Horizontal e Under Display Mode Check Fit Vertical Scale e Left click in the image display to select a line e Left click in the line display to make measurement markers In the example above measurements are made between the edges of two consecutive features on the PNI AFM reference The measurements displayed to the right confirm a pitch of 20 xm and a Z height of approximately 70 nm NOTE These measurements should not be used to calibrate your instrument select histogram tool and use the slider bars to mark the middle of the two ranges where the Z data points are clustered i mA Revision 1 1 28 Nano R AFM User Manual rr Histogram 11 Scan Data 7 SEN rev Color Correction
17. ocess Display Window Help aor Select Align Frequency 3 Tip s Scan gt Image Tip erot stant m Mode mp in m Sweep Approach Sam Processin Retract AFM Stage Controls Focus Zoom Tip Exchange Click Start to begin the tip exchange procedure Fi Al NX lt a F Device Directory C pscan pci 27 i Tip Exchange Figure 2 23 Start Button will raise the probe tip away from the Sample Revision 1 1 16 Nano R AFM User Manual Turn the probe exchange knobs on the side of the scanner head down away from you 1 4 turn Figure 2 24 The scanner head will slide out about an inch Figure 2 24 Turn the knobs to disengage the scanner head Grasp the handles on the front of the scanner head Figure 2 25 and gently slide the scanner head all the way towards you Figure 2 25 Slide the scanner head toward you Carefully rotate the scanner head up about 90 degrees as shown in Figure 2 26 Jt A 3 N Figure 2 26 Rotate the Scanner Head Revision 1 1 Chapter 2 Tutorial Contact EZMode Light Lever i CAUTION Handle AFM probes with care The cantilever can break off easily if it touches anything or snaps down too forcefully on the magnetic mounting surface on either the scanner or in the probe box Probe handling When loading or removing a probe pivot the substrate on the edge opposite the cantilever as shown below This will protect the cantilever from striking the
18. operation Minimum X Offset 863 mY 599 1 mv Minimum Y Offset 2000 m s Yi 7763 5 mY Maximum Zoom 102 Postion 2 New range 4 5487 1 mY Yi 7698 5 mY Mini mum X Offset 1255 mY Mini mum Y Offset 2392 m Postion 3 Maximum Zoom 100 4 5638 2 mY Y 2099 6 mi Check New Range Discard Accept Postion 4 xi 967 1 my Yi 2074 6 my Cancel E ma Figure 2 7 Automatic Linearizer Range Click Accept when the calibration process is complete and then click Check New Range if desired sensor readings will be recorded while the scanner is moved Straight diagonal lines in both graphs indicate a good range Linearizer Range Check X SEN 4917 8 mY Acquiring 954 9 mY oO 82 41 um x Offset 22 Y Offset 34 Zoom 102 Figure 2 8 Checking Linear Range 9 Click Select Mode on the toolbar select Contact in the dialog and click OK Frequency Sweep Select Mode Contact Close Contact i Cancel Adwanced gt Figure 2 9 Select Mode Revision 1 1 Chapter 2 Tutorial Contact EZMode Light Lever 11 ALIGN THE DETECTOR ki Frequency Sweep Red Dot Alignment Laser and Detector Focus Zoom ra PT P 4 i a aN i j i ar ae Z Tripod all to limits et en fat i h mMm Pi Focus Step Lamp 2 SUM Scale F 4x 2 3x C 4x TASEN _ lt __ cm Sea i ON OFF Z T B 2 53 Z L R 0 07
19. rn the detector alignment knobs to bring the red dot into the top of the green crosshatched box The red dot should be positioned just below the upper border of the box and be centered along the vertical axis Please Note If when adjusting the detector alignment knobs the red dot moves toward the center but the Z SUM value is going down you are moving in the wrong direction Make sure the Z SUM value signal intensity is above the minimum If it is not you need to re seat or replace the probe Red Dot Alignment Laser and Detector ar ae Z Tripod all to limits Focus Step Lamp z SUM Fa MS z Scale f qx 2x 3x 4x a Vy go on LASER 2 SUMI 2 99 i On OFF 2 T B 2 53 Y Z L R 0 07 Figure 2 14 Aligning the Detector Revision 1 1 Chapter 2 Tutorial Contact EZMode Light Lever 13 LOAD A SAMPLE e Click Stage from the EZMode toolbar Figure 2 15 EZMode Toolbar Start Select Align Frequency i gt Tip i d Image Tip PpO Mode Laser Sweep Approach i Processin Retract CAUTION Whenever you engage the motorized X Y stage be sure the probe is a safe distance above the sample puck e Use the focus controls to bring the sample surface into focus on the video monitor e Use the XY stage controls to navigate to the largest of the four patterns on the PNI AFM reference 10 um squares 20 um pitch e Before approaching the same you need load the sample and lo
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