User s Operating Notes
Contents
1. begin i i i gt a i Ee Eo eg Compressed a Air Valve ae a MJB3 Valve marked MGB3 Valve in Open position Location of Compressed in Closed position Air Valves Turn on the mercury lamp Green indicator light on the power supply see figure 2 has to be on when the lamp is turned on If the green light is not on in 20 sec switch off the power supply wait 20 sec and switch on the power supply again Allow to warm the lamp for 20 min Figure 2 Mercury lamp power source Switch on the vacuum pump at the wall behind the old mask aligner SLEE switch on the pressure regulator box see figure 3 below All 3 gauges have to show the pressure marked by black marker notches Figure 3 Pressure regulator box move up to switch on Switch on microscope light intensity top white box see figure 1 above Turn on the mask aligner by switching on the Power switch Ensure that the Separation slider is fully back away from you and the Contact arm is in no contact position pointing toward you see figure 5 below Separation distance setting contact Oparatia To separate Contact arm is in no contact position Separation slider is fully back away from you no separation Figure 4 Contact Arm and Separation Lever Move the microscope to central position the rod to the left of the optics is used for this purpose2. make sure to depress button on rod otherwise it will not function l ma g k l pann Figure 5 Place your mask Glass side down on the mask holder when in place flit Yon the MJB3 unit Check to make sure that the vacuum is working you shouldn tpe abie to move our mask A o Figure 6 Mask Holder Figure 7 Mask Aligner Buttons Loosen the bracket that fixes mask into place then slide the mask holder into position Do not tight the screws aad do not fix the mask a he chuck g Transport vacuum button of x a White bar edge Figure 8 Rotate the sample tray until it has its edge parallel to the white bar ai Align the sample tray in the middle position in x directions there should be no gap between the sample tray edge and the white bar edge Align the sample tray in the middle position in y directions set the tray to have gap A equal to the gap B Figure 9 Place sample in the centre of the chuck covering the vacuum ring Whilst pressing the Transport vacuum button silver button located far right of table then slide sample in fully beneath the mask once in position release the button Theta Adjustment Y Adjustment X Adjustment N z Adjustment Lock Z Adjustment Figure 10 aeriteeeetteiti Slowly rotate the contact arm to the contact position Fig 4 to move the chuck with your sample up to the mask see Fig 11 As far
3. as the mask is not fixed the sample will move it up and you will able to see this looking at the mask holder corner Fig 110 Figure 11 A Drawing and B scheme not in scale of sample stage and mask holder 1 Mask holder 2 Mask 3 Wafer 4 Chuck 5 Chuck stage 6 Spindle 7 Precise ball bearing guide 8 Pneumatic brake 9 Levelling pistons D mask holder is not fixed mask holder is fixed and is lifted up chuck tilts to compensate a wedge levelling pistons are fixed with pneumatic levelling pistons are fixed with pneumatic brake brake contact arm is in contact position contact arm is in contact position contact light is on contact light is on separation lever is in separation position Figure 11 Unlock the Z adjustment knob Fig 12 and adjust the height of the stage to have the photo mask holder moving up for 0 5 mm when the contact arm is in contact position Leave the contact arm in no contact position Lock the Z adjustment knob Tighten the bracket that fixes mask into place Now slowly rotate the contact arm to the contact position Fig 4 again to move the chuck with your sample up to the mask As far as the mask is fixed now the sample will levelled with the mask and the wedge between the mask and your sample will b
4. MJB3 Mask Aligner User s Operating Notes Important This is not a comprehensive guide for use of the MJB3 Mask Aligner and not a User s Manual of the MJB3 Mask Aligner This is short reminder notices and operating tips for references only made by other users You can use the equipment without supervision if you are a Qualified Operator only Training is required before using the MJB3 Mask Aligner To obtain training check in the equipment booking calendar when the machine is going to be used and make arrangements with someone of qualified operator to observe and practice operating the machine under direct supervision Attend several sessions carried out by qualified operators to become familiar with machine layout location and operation of handles knobs switches valves etc Request the clean room manager for final training and test session No one is allowed to use the equipment without direct supervision until after final check out The mercury lamp requires a warm up of 20 min and should be left on all day If the mercury lamp is turned off it must be left to cool down for 20 min then turned on and warmed up for a further 20 min lf you are using the vacuum on another machine e g the spinner or the old mask aligner SLEE ensure that there is no mask in the MJB3 before switching the vacuum off Microscope light power source The valve on compressed air supply line has to be open before work with the mask aligner can
5. e compensated Fig 11D When the contact arm is completely moved outwards in contact position the contact light is on and levelling pistons are fixed with pneumatic brake Fig 11E Fig 12 Z knob locking switch Left Z knob is unlocked Left Z knob is locked Move the separation lever is in separation position The levelling pistons remain fixed with pneumatic brake The contact arm remains in contact position The contact light remains on The chuck is moving down for the distance which can be regulated by the slider Fig 4 The wafer surface remains to be parallel to the mask Now you can perform fine alignment using the x y and rotation micrometers When aligned move the separation lever back in no separation position Set the exposure time Remember that you will need to test how long your exposure needs to be The good starting point is 12 sec for 1 4um of AZ 5214E Made in Germany Exposure Button There are two modes of exposure in the MJB3 Mask Aligner Exposure Modes Soft contact in this mode the vacuum between the chuck and the wafer is on thus an air gap is left between the wafer and the mask This mode is selected by pressing the soft kontakt button This mode is indicated by the light in soft kontakt button on Advantage less photo resist damages less photo mask contamination Disadvantage lower resolution In its soft contact exposure mode the MJB3 ca
6. n achieve a resolution of 2 0 um The final data mainly depends on process specifications such as spectral range the distance between mask and wafer a function of wafer topography cleanliness and exposure mode as well as diffraction reduction Hard contact in this mode the vacuum between the chuck and the wafer is off and the gap between mask and wafer is further reduced by purging nitrogen underneath the wafer Thus the wafer is pushed harder against the mask and achieves a resolution in the 1 micron range This mode is selected by pressing the soft kontakt button This mode is indicated by the light in soft kontakt button off Advantage higher resolution Disadvantage more contamination of the mask may lead to photo resist damage Soft Contact Hard Contact Mask Mask Chuck F j yw av Ti Mechanical pressure Mechanical pressure Hit the green Exposure button Stand back as the microscope body will slide forward and the UV source shutter will open to expose your sample it will subsequently return to its original position Lower you sample away from the mask by rotating the contact arm to the no contact position Slide sample tray out from beneath the mask The procedure is now completed simply remove your sample If you wish to expose another sample insert it into the aligner If not follow these instructions in reverse to turn the machine off Do not switch of the mercury lamp
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