Adixen Hi Pace 300 Turbo Drag Pump User`s Manual
Contents
1. Connection cable for linking HiPace with TC 400 to power sup PM 061 352 T PM 061 352 T PM 061 352 T ply TPS DCU 310 311 400 401 24 V DC venting valve G 1 8 for connection to TC 400 1200 PM Z01 291 PM Z01 291 PM Z01 291 TTV 001 air drier for venting turbopumps PM ZOO 121 PM ZOO 121 PM ZOO 121 Venting flange DN 10 KF G1 8 PM 033 737 T PM 033 737 T PM 033 737 T Angled screw coupling for venting valve PM 143 877 T PM 143 877 T PM 143 877 T Air cooling for HiPace 300 with TC 400 plug M12 PM Z01 302 PM Z01 302 PM Z01 302 Air cooling with cable for TC 400 M12 plug for Tele TC cable PM Z01 304 PM Z01 304 PM Z01 304 400 Heating jacket for HiPace 300 with TC 400 TCP 350 230 V AC PM 061 366 T Euro style safety plug Heating jacket for HiPace 300 with TC 400 TCP 350 208 V AC PM 061 367 T UL plug Heating jacket for HiPace 300 with TC 400 TCP 350 115 V AC UL PM 061 368 T plug Backing pump relay box single phase 5 A for TC 400 1200 PM 061 374 T PM 061 374 T PM 061 374 T Backing pump relay box single phase 20 A for TC 400 1200 PM 061 375 T PM 061 375 T PM 061 375 T TCP 350 and TM 3000 TVV 001 fore vacuum safety valve 230 V AC PM Z01 205 PM Z01 205 PM Z01 205 TVV 001 fore vacuum safety valve 115 V AC PM Z01 206 PM Z01 206 PM Z01 206 Sealing gas valve for HiPace 300 400 and 700 with TC 400 PM Z01 312 PM Z01 312 PM Z01 312 Sealing gas throttle for HiPace 302. Acoustic pressure Distance 1 m to the pump 13 2 HiPace 300 24 V DC Parameter JHiPace 300 JHiPace 300 T HiPace 300 t Flange in DN 100 ISO K DN 100 CF F DN 100 ISO F Flange out DN 16 ISO KF DN 16 ISO KF DN 16 ISO KF Pumping speed for Ar 255 l s 255 l s 255 l s Pumping speed for CF4 200 l s 200 l s 200 l s Pumping speed for H3 220 l s 220 l s 220 l s Pumping speed for He 255 l s 255 l s 255 l s Pumping speed for N3 260 l s 260 l s 260 l s Compression ratio for Ar gt 1 101 gt 1 10 gt 1 10 Compression ratio for CF4 gt 1 10 gt 1 10 gt 1 10 Compression ratio for H2 9 105 9 105 9 105 Compression ratio for He gt 1 108 gt 1 108 gt 1 108 Compression ratio for N3 gt 1 10 gt 1 10 gt 1 10 Gas throughput at full rotational speed for Ar 7 mbar l s 7 mbar l s 7 mbar l s Gas throughput at full rotational speed for CF4 8 mbar l s 8 mbar l s 8 mbar l s Gas throughput at full rotational speed for He 20 mbar l s 20 mbar l s 20 mbar l s Gas throughput at full rotational speed for H2 gt 14 mbar l s gt 14 mbar l s gt 14 mbar l s Gas throughput at full rotational speed for N3 14 mbar l s 14 mbar l s 14 mbar l s Fore Vacuum max for Ar 25 mbar 25 mbar 25 mbar Fore Vacuum max for CF4 20 mbar 20 mbar 20 mbar Fore Vacuum max for H5 8 5 mbar 8 5 mbar 8 5 mbar Fore Vacuum max
3. 22 6 3 Function description o o o o o o eee 23 6 4 Monitoring of the operation conditions n saasaa aaaea 24 6 5 Switching off and venting iliis sse 24 Maintenance replacement occocooccnccnnn eee eee 25 71 Maintenance intervals and responsibilitieS oo 25 72 Replacing the operating fluid reservoir 0 0 000000 eee aee 25 73 Replacing the electronic drive unit 0 00000000 cee eee 27 Decommissioning EGRE ee Bee he Eee Ree ES ek e a mas 28 8 1 Shutting down for longer periods 0 0 eee 28 8 2 RO SkaltIFIQ n as ches ion soldi hse shadow a dos ugk Bw ob dos dnb Bw eo e a ee aoe do 28 O53 DISPOSAL iu ag ie d a dt dote od wie te ex dee om ed o ws dd e dp dis 28 Malfunctions a i eR ER AA ERROR RUE RT RA 29 9 1 Rectifying malfunctions o o o ooooooooo ee 29 Service oiga a tenn Goda Seat Send Sete Ata tw Alans cde eee 30 Spare parts HiPace 300 0 0c eee eee 31 Acesso ES ianea sions a puedes a xci kde a ed eee 32 12 1 HiPace 300 24 VDC oooccococccoc e 32 12 2 Differences at HiPace 300 48V DC iiie 33 Technical data and dimensions o occccccc eee eee e eee 34 IC GSTS leaked oe ret amp Strat haces oe Sects A ee Rete ASN Te 34 13 2 HiPace 30024 V DG syaa act dece tlc Le Re Ea ees 34 13 3 Differences at HiPace 300 48V DC iilii llle 35 13 4 DIMENSIONS 2 dx 3er oe oe Ro e et oh Ru aca o oA ab on RE e e vio 36 Declaration of conf
4. 310 HiPace 300 48 TC 400 TPS 400 401 DCU 400 PFEIFFER VACUUM 15 Installation Remote plug Accessory connection 16 PFEIFFER E VACUUM n 2 TPS DCU Electronic drive unit Doa 5 PM 061 352 T Fig 5 Conneting the TC 400 to a power supply pack using a Pfeiffer Vacuum cable 2 Switch off switch S7 on the mains pack position O 2 Insert the connection cable with the socket in the connection DC in on the elec tronic drive unit and close the bayonet lock 2 Insert the connection cable with the plug in the connection DC out on the pow er supply and close the bayonet lock The shipment includes a mating plug for the 26 pin connection with the designa tion remote on the TC 400 The mating plug bridges the following connections with the supply voltage Pin 1 allowing the turbopump to operate without an ad ditional operating unit or remote control Pin 2 Enable venting on Pin 3 Motor pump on Pin 4 Pumping station on Pin 14 Remote access request 2 Place and fix the mating plug on the connection remote on the TC 400 Automatic start After bridging the contacts Pin 1 3 4 14 on the connection remote or using the ma
5. 400 DN 100 ISO F in PM 016 456 T cluding coated centering ring splinter shield stud screws 12 2 Differences at HiPace 300 48 V DC Designation HiPace V 300 with HiPace 300 with HiPace 300 with TC 400 DN 100 ISO K TC 400 DN 100 CF F TC 400 DN 100 ISO F TPS 400 mains pack for wall standard rail fitting PM 061 343 T PM 061 343 T PM 061 343 T Wall rail fitting TPS 110 180 310 400 PM 061 392 T PM 061 392 T PM 061 392 T TPS 401 mains pack 19 rack module 3 RU PM 061 347 T PM 061 347 T PM 061 347 T Front panel kit for TPS 401 PM 061 396 T PM 061 396 T PM 061 396 T DCU 400 Display control unit incl power supply PM C01 823 PM C01 823 PM C01 823 PFEIFFE RE vacuum 33 Technical data and dimensions 13 Technical data and dimensions 13 1 General Basic principles for the Technical Data of Pfeiffer Vacuum Turbopumps e Recommendations of PNEUROP committee PN5 e ISO 21360 2007 Vacuum technology Standard methods for measuring vacu um pump performance General description e ISO 5302 2003 Vacuum technology Turbomolecular pumps Measurement of performance characteristics e Ultimate pressure using a test dome and a 48 hrs period of baking out e Gas throughput water cooling backing pump rotary vane pump 10 m h e Cooling water consumption at max gas throughput cooling water temp 25 C e Integral leack rate using a Helium concentration of 100 period 10 s
6. M Bender Dr M Wiemer CE 2010 Managing Director Managing Director PFEIFFER VACUUM wW gt A PASSION FOR PERFECTION You are looking for a perfect vacuum solution Please contact us Germany Pfeiffer Vacuum GmbH Headquarters Tel 49 0 6441 802 0 info pfeiffer vacuum de Benelux Pfeiffer Vacuum GmbH Sales amp Service Benelux Tel 800 pfeiffer benelux pfeiffer vacuum de China Pfeiffer Vacuum Shanghai Co Ltd Tel 86 21 3393 3940 info pfeiffer vacuum cn France Pfeiffer Vacuum France SAS Tel 33 169 30 92 82 info pfeiffer vacuum fr Great Britain Pfeiffer Vacuum Ltd Tel 44 1908 500600 sales pfeiffer vacuum co uk India Pfeiffer Vacuum India Ltd Tel 91 40 2775 0014 pfeiffer vsnl net Italy Pfeiffer Vacuum Italia S p A Tel 39 02 93 99 05 1 contact pfeiffer vacuum it Korea Pfeiffer Vacuum Korea Ltd Tel 82 31 266 0741 sales pfeiffer vacuum co kr Austria Pfeiffer Vacuum Austria GmbH Tel 43 1 894 17 04 office pfeitfer vacuum at Sweden Pfeiffer Vacuum Scandinavia AB Tel 46 8 590 748 10 sales pfeiffer vacuum se Switzerland Pfeiffer Vacuum Schweiz AG Tel 41 44 444 22 55 info pfeiffer vacuum ch United States Pfeiffer Vacuum Inc Tel 1 603 578 6500 contact pfeiffer vacuum com www pfeiffer vacuum net
7. and suitability ofthe backing pump Leak gt Perform leak detection gt Check sealings and flange fastenings gt Eliminate leaks Gas throughput too high gt Reduce process gas supply Rotor runs hard bearing defective gt Check the bearing for noises gt Contact the Pfeiffer Vacuum Service Setpoint for run up time to low gt Extend the run up time via DCU HPU or PC Thermal overload Lack of air ventilation Water flow too low Fore vacuum pressure too high Ambient temperature too high gt Reduce thermal loads Ensure adequate cooling Ensure the cooling water flow Lower the fore vacuum pressure Adjust ambient conditions Pump does not attain the ultimate pres sure Pump is dirty gt Bake out the pump gt Cleaning in case of heavy contamination Contact the Pfeiffer Vacuum Service Vacuum chamber pipes or pump are leaky gt Leak detection starting from the vacuum chamber gt Eliminate leaks Unusual noises during operation Bearing damage gt Contact the Pfeiffer Vacuum Service Rotor damage gt Contact the Pfeiffer Vacuum Service Splinter shield or protective screen are loose gt Correct the seat of the splinter shield or the protective screen gt Observe the installation notes Red LED on the TC 400 is on Collective fault gt Reset by switching the mains OFF ON gt Reset via pin 13 on the REMOTE connec t
8. class C Corrosive gas version P Process M Active magnetic bearing T Temperature management system Characteristics HiPace 300 HV flange DN 100 ISO K DN 100 ISO F DN 100 CF F Flange material Aluminium Aluminium Stainless steel To correctly identify the product when communicating with Pfeiffer Vacuum al ways have the information from the rating plate available D 35614 Asslar E Mod HiPace 300 Oil DN 100 ISO K 3p 9 N5 260 l s nf 60000 1 min 1000 Hz Mod No PM P03 900 Mass 6 7 kg Ser No PFEIFFER E VACUUM IM l M EE NUI Il Made in Germany 2007 07 Fig 1 Example for a rating plate e HiPace 300 with TC 400 and 24 VDC 5 e HiPace 300 with TC 400 and 48 VDC 5 96 e Turbopump with electronic drive unit e Mating plug for the connection remote on the TC 400 Protective cover for the high vacuum and the fore vacuum flange Operating instructions The turbopump HiPace 300 forms a complete unit together with the electronic drive unit TC 400 For the voltage supply only Pfeiffer Vacuum power supplies may be used e g TPS or DCU PFEIFFER VACUUM 9 Product description Cooling Rotor bearing Drive 4 High vacuum flange 8 Electronic drive unit TC 400 14 Cooling water connection 16 Sealing gas connection 17 Venting connection 20 Fore vacuum flange Fig 2 Water cooling Air cooling optional View of HiPace 300 with TC
9. for He 20 mbar 20 mbar 20 mbar Fore Vacuum max for N2 20 mbar 20 mbar 20 mbar Run up time 1 8 min 1 8 min 1 8 min Ultimate pressure with OnTool DryPump lt 1 107 mbar lt 5 107 mbar 1 107 mbar Rotation speed 2 60000 rpm 60000 rpm 60000 rpm Rotation speed variable 20 100 20 100 20 100 Power characteristic line in gas mode 1 vertex A 250 60000 W rpm 250 60000 W rpm 250 60000 W rpm Power characteristic line in gas mode 1 vertex B 250 54000 W rpm 250 54000 W rpm 250 54000 W rpm Power characteristic line in gas mode 0 vertex C 220 60000 W rpm 220 60000 W rpm 220 60000 W rpm Power characteristic line in gas mode 0 vertex D 220 54000 W rpm 220 54000 W rpm 220 54000 W rpm Power characteristic line in gas mode 2 vertex E 250 60000 W rpm 250 60000 W rpm 250 60000 W rpm Power characteristic line in gas mode 2 vertex F 250 54000 W rpm 250 54000 W rpm 250 54000 W rpm Sound pressure level lt 50 dB A lt 50 dB A lt 50 dB A Relative humidity of air 5 85 non 5 85 non 5 85 non condensing condensing condensing Protection category IP 54 IP 54 IP 54 Connection pressure max for venting sealing gas 1 5 bar 1 5 bar 1 5 bar valve 34 PFEIFFER E VACUUM Technical data and dimensions Parameter HiPace 300 HiPace 300 HiPace 300 Operating voltage 242x596 VDC 24x596 VDC 24x596 V DC Operating voltage power supply 90 265 V AC 90 265 V AC 90 265 V AC Integral leak rate
10. into it 2 Never operate the pump with an open high vacuum flange Automatic start After bridging the contacts Pin 1 3 4 14 on the connection remote or using the mat ing plug supplied and setting up the supply voltage the turbopump will run up immedi ately 2 Switch on the mains supply on the turbo pump immediately before operation 3 For operation without the control unit the 26 pole D Sub plug must be in the remote connection on the TC 400 3 Switch on the supply voltage with switch S1 on the power supply After operating voltage is applied the TC 400 performs a self test to check the sup ply voltage Once the self test has been successfully completed on the TC 400 the turbopump and the backing pump if connected begin to operate Remote control options are provided via the 26 pole D Sub connector with the des ignation remote on the electronic drive unit 3 Consider the following manuals for the operation via remote control Operating instructions Electronic drive unit TC 400 3 Consider the following manuals for the operation via Pfeiffer Vacuum display and control units Operating instructions DCU Operating instructions HPU Operating instructions Electronic drive unit TC 400 3 Switch on the supply voltage with switch S1 on the power supply or on the DCU 310 2 Settings are possible via the RS485 by using DCU HPU or PC Integrating and operating Pfeiffer Vacuum turbopumps in the c
11. sudden blocking of the rotor an applied vibration dumper cannot compensate any of the occurring forces There is a danger of the turbopump being torn off and there by resulting severest injuries and property damages Applicable safeguards must be taken to compensate possible occurring torques 2 Definetely consult with Pfeiffer Vacuum 3 Do not exceed the max permissible temperature at the vibration dumper 100 C When using dry backing pumps Pfeiffer Vacuum HiPace pumps are designed for in stallation in any orientation 3 Support pipes in front of the vacuum pump or remove them No force from the pipe system may be exerted on the fixed pump 3 To avoid contamination via the fore vacuum line when using oil sealed backing pumps the fore vacuum flange should always point vertically downward 25 Fig 4 Recommended orientation of the fore vacuum flange The maximum axial loading capacity of the high vacuum flange is 500 N equals 50 kg A one sided load on the high vacuum flange is not permitted Installation Installing the high vacuum flange Installation of ISO K flange with ISO K flange Installation of ISO F with ISO F flange If the rotor is suddenly blocked the torques arising from the system and the high vacuum flange must be absorbed Only the components designated as accessory can be used to fasten the turbo pumps to the high vacuum flange The components for installing the turbo pumps are special de
12. 0 400 and 700 PM Z01 317 PM Z01 317 PM Z01 317 Centering ring with multifunction coating DN 100 ISO K F PM 016 210 U PM 016 210 U pumps Centering ring with multifunction coating and integrated pro PM 016 212 U PM 016 212 U tection screen DN 100 ISO K F Centering ring with multifunction coating and integrated PM 016 211 AU PM 016 211 AU splinter shield DN 100 ISO K F Protection screen for Turbopumps DN 100 CF F PM 016 336 Splinter shield for Turbopumps DN 100 CF F flange PM 016 315 Vibration damper for HiPace 300 and HiPace 400 DN 100 ISO K PM 006 459 X Vibration damper for HiPace 300 and HiPace 400 DN 100 CF F PM 006 488 X USB converter to RS 485 interface PM 061 207 T PM 061 207 T PM 061 207 T Interface cable 3 m M12 PM 061 283 T PM 061 283 T PM 061 283 T Interface cable RS 485 3 m M12 straight 90 PM 061 791 T PM 061 791 T PM 061 791 T Y Connector M12 to RS 485 P 4723 010 P 4723 010 P 4723 010 Y Connector M12 for accessories P 4723 012 P 4723 012 P 4723 012 Remote plug for TC 400 1200 with bridges PM 061 378 X PM 061 378 X PM 061 378 X Power supply plug TC 400 straight P 4723 010 P 4723 010 P 4723 010 Power supply plug TC 110 angled P 4723 101 P 4723 101 P 4723 101 Remote adapter for RS 485 PM 061 649 T PM 061 649 T PM 061 649 T 32 PFEIFFERE VACUUM Accessories aaa eee Designation HiPace 300 with HiPace 300 with HiPace 300 with TC 400 DN
13. 100 ISO TC 400 DN 100 CF F TC 400 DN 100 ISO K F Connection cable plug M12 RJ 45 PM 051 726 T PM 051 726 T PM 051 726 T Power supply plug TPS 110 180 310 400 DC out P 4723 102 P 4723 102 P 4723 102 Extension cable for accessory M12 on M12 PM 061 747 T PM 061 747 T PM 061 747 T Mounting kit for HiPace 300 DN 100 ISO K including coated PM 016 365 T centering ring bracket screws Mounting kit for HiPace 300 DN 100 ISO K including coated PM 016 367 T centering ring protection screen clamping screws Mounting kit for HiPace 300 DN 100 ISO K including coated PM 016 366 T centering ring splinter shield bracket screws Set of hexagon bolts 16 count M8 DN 100 CF PM 016 690 T Set of stud screws 16 count M8 DN 100 CF PM 016 692 T Mounting kit for HiPace 300 and HiPace 400 DN 100 ISO F in PM 016 450 T cluding coated centering ring hexagon screws Mounting kit for HiPace 300 und HiPace 400 DN 100 ISO F in PM 016 452 T cluding coated centering ring protection screen hexagon Screws Mounting kit for HiPace 300 and HiPace 400 DN 100 ISO F in PM 016 451 T cluding coated centering ring splinter shield hexagon screws Mounting kit for HiPace 300 and HiPace 400 DN 100 ISO F in PM 016 455 T cluding coated centering ring stud screws Mounting kit for HiPace 300 and HiPace 400 DN 100 ISO F in PM 016 457 T cluding coated centering ring protection screen stud screws Mounting kit for HiPace 300 and HiPace
14. 400 In the case of excess temperature the electronic drive unit reduces the drive power automatically Depending on the application and the HiPace different cooling vari ants are selectable Hybrid bearing TurboDrag pump High vacuum side maintenance free permanent magnetic bearing e Fore vacuum side ceramic ball bearing Electronic drive unit TC 400 4 3 Range of application The pump HiPace 300 must be installed and operated under the following ambient 10 conditions Installation location weather protected indoors Protection category IP 54 Protection class Temperature 5 C to 35 C with air cooling 5 C to 40 C with water cooling Relative humidity max 80 96 at T 31 C up to max 50 at T lt 40 C Atmospheric pressure 77 kPa 106 kPa Installation altitude 2000 m max Degree of pollution 2 Permissible surr magnetic field lt 5 5 mT Overvoltage category ll Connection voltage TC depending 24VDC 5 on the variants 48 VDC 5 PFEIFFER E VACUUM Installation 5 Installation DANGER Danger from the turbopump being torn off In case of sudden blocking of the rotor torques of up to 2000 Nm can occur which can lead with incorrect attachment to tearing the turbopump off The energy released there by can hurl the entire pump or fragments from their inside around the area This can cause severest Injuries possibly resulting in d
15. CF F 18 6 DN 16 ISO KF G1 4 2 69 AN s E m LL a r o 1 s Q 2 o d mM E d A g 110 Do o Me 5x 45o INS 36 Fig 17 HiPace 300 DN 100 ISO F PFEIFFER E VACUUM DN 100 ISO K 163 131 AF A H 131 118 162 184 195 e DN 100 CF F oO Declaration of conformity according to the EC directive e Machinery 2006 42 EC Annex II no 1 A We hereby declare that the product cited below satisfies all relevant provisions of EC directive Machinery 2006 42 EC In addition the product cited below satisfies all relevant provisions of EC directive Electromagnetic Compatibility 2004 108 EC The agent responsible for compiling the technical documentation is Mr J rg Stan zel Pfeiffer Vacuum GmbH Berliner Straf e 43 35614 Al3lar HiPace 300 Guidelines harmonised standards and national standards and specifications which have been applied DIN EN ISO 12100 1 2004 DIN EN ISO 12100 2 2004 DIN EN ISO 14121 1 2007 DIN EN 1012 2 1996 DIN EN 61010 1 2002 Signatures Pfeiffer Vacuum GmbH Berliner Straf3e 43 35614 Asslar Germany l N C7 Y
16. Decontaminate affected parts before carrying out maintenance work Lubricant filling The lubricant reservoir is sufficiently filled with lubricant Do not add additional lubricant 3 Turn off the vacuum pump vent to atmospheric pressure and allow to cool if necessary 2 Remove the vacuum pump from the system if necessary 2 Close the flange openings by using the original protective covers 3 Turn the turbopump over onto the closed high vacuum flange PFEIFFERE VACUUM 25 Maintenance replacement 6 End cover 7 Operating fluid reservoir 55 Allen head screw 2 Screw out the allen head screws 3 pieces from the end cover at the bottom of the turbopump 2 Remove the end cover Pay attention to O ring 7 Operating fluid reservoir 7a Porexrod 15 Splash nut 3 Pull the operating fluid reservoir out of the bearing mounting 3 Using tweezers pull out Porex rods 9 pieces 2 Remove impurities from the turbopump and the end cover with a clean lint free cloth Do not use any cleaning fluids 2 Using tweezers insert new Porex rods 9 pieces 3 Insert the new operating fluid reservoir with its felt side towards the splash nut into the bearing mounting 3 For the HiPace turbopumps the operating fluid reservoir can be pushed up against into the bearing cartridge 2 Screw in the end cover with the new O ring Tightening torque 2 5 Nm 26 PFEIFFER E VACUUM Maintenance replacement 73 Replacing the el
17. Translation of the original instructions PT 0200 BEN C 1008 idealvac com A PASSION FOR PERFECTION Ideal acuum products lt lt 505 872 0037 idealvac com Y E HiPace 300 Turbopump W wW VACUUM Table of contents Table of contents 2 PFEIFFER E VACUUM 10 11 12 13 About this manual lt lt 000 0 eroe o eee eee ee eee ey eee oes 3 SM 0 EMI LLLI 3 1 2 CONVENTIONS eiii wd po Ee c pra ae da dw de deen a 3 Safety ZETPTPTP 5 2 1 Safety precautions 0 eee eee 5 2 2 Protective equipment liliis nn 6 2 9 OPUS sd es dea 6 2 4 Improper Se ss uc cto m doro sa ii o at RC t Rte x 7 Transport and storage oun renes e imet des Mun Edo 8 3 4 TTAnspObtus ae ute deese Tah ee hte ib edi dS aite db rd di Re ibo 8 A us us c due dot te Ue ob m obe de oe b e B la eode daB ow Rab e daas 8 Product description 5 26 is sense cee exor a a Rs 9 4 1 Product identification liiis 9 4 2 FUNCUON sur ERE UR TOR debo Rot ub CRUS eb CR Rot eden 9 4 3 Range of application iliis 10 Installation ccd ee tur RR REIR RR EET 11 AS ILU ERR RR 11 5 2 Preparatory work sisse 11 5 3 Assembly uoiilleeeele eee 11 5 4 Connections to the turbopump liiis 15 Operation edle ee a id ee RR x 22 6 1 COMMISSIONING 3 24 foc oros op wit tras o reste ee rx exce EX dura dal ag 22 0 2 Operation modes i e glide db E ES C Reg Nb LUE YS
18. afety precautions in order to pre vent danger to health through dangerous substances 3 Decontaminate affected parts before carrying out maintenance work Disclaimer of liability Pfeiffer Vacuum accepts no liability for personal injury or material damage losses or op erating malfunctions due to improperly performed maintenance The liability and war ranty entitlement expires 7 1 Maintenance intervals and responsibilities 3 Clean the turbopump externally with a lint free cloth and little industrial alcohol 2 Replace the operating fluid reservoir and electronic drive unit yourself 3 Change the operating fluid reservoir at least every 4 years 3 Change the turbopump bearing at least every 4 years Contact Pfeiffer Vacuum Service 2 Clarify shorter maintenance intervals for extreme loads or impure processes with Pfeiffer Vacuum Service 2 For all other cleaning maintenance or repair work please contact your Pfeiffer Vacuum service location 72 Replacing the operating fluid reservoir Poisoning hazard through contact with materials that damage health The operating fluid reservoir and parts of the pump may contain toxic substances from the pumped media 2 Dispose of operating fluid reservoir in accordance with the applicable regulations Safety data sheet on request or under www pfeiffervacuum net gt Prevent health hazards or environmental damage due to contamination by means of appropriate safety precautions 2
19. clamps crosswise in three steps gt Tightening torque 5 15 25 2 Nm The connection types for installation of ISO F to ISO F flange are hex screw and blind hole stud screw and blind hole as well as stud screw and through hole The following elements are required e The valid mounting kit of the Pfeiffer Vacuum accessories programme e A protection screen or splinter shield can optionally be used PFEIFFERE VACUUM 13 Installation 2M 7 MAY ARA T Installation of CF flanges 14 Hexagon screw and blind hole 2 Mind that the sealing surfaces are not damaged 2 Connect the flanges according to the drawing and with the component parts of the mounting kit 2 Use the required number of 8 hex screws with washer 2 Fora flange material with a strength of gt 270 N mm screw in the hex screw 1 5 d into the blind hole gt Tighten the hex screws crosswise in three steps gt Tightening torque DN 100 5 12 22 2 Nm Stud screw and blind hole 3 Mind that the sealing surfaces are not damaged 3 Connect the flanges according to the drawing and with the component parts of the mounting kit 2 Use the required number of 8 stud screws and nuts 3 For a flange material with a strength of 170 270 N mm screw in the hex screw 2 5 d into the blind hole gt Tighten the nuts crosswise in three steps gt Tightening torque DN 100 5 12 22 2 Nm Stud screw and through hole 3 Min
20. cuum flange in stainless steel design The heating duration depends on the de gree of contamination as well as the final pressure to be reached and should be at least 4 hours Dangerous excess temperatures Process related high temperatures can result in impermissible excess temperatures and thus damage to the turbopump 3 Always use water cooling when a casing heating is used or when the pump is con nected to a heated vacuum chamber Danger of burns High temperatures arise when the turbopump or vacuum chamber are baked out As a result there is a danger of burns from touching hot parts even after the casing heating is switched off 2 Thermally insulate heating jacket pump housing and vacuum chamber if possible during installation 3 Do not touch heating jacket pump casing and vacuum chamber during bake out e When using a casing heating and a water cooling unit the temperature of the connected flange of the vacuum chamber must not exceed 120 C e The maximum permissible rotor temperature for the turbopump is 90 C If high temperatures arise for process reasons the radiated heat input must not exceed 2 4 W Install suitable screening sheets if necessary design information on re quest Fig 9 Connecting the heating jacket 4 Pump casing 4b Fixing screw 4d Warning sticker 4a Heating jacket 4c Heating relay box gt Bend open the outer heating jacket on the tensioning strap and place it sidewards on to the cyl
21. d that the sealing surfaces are not damaged 3 Connect the flanges according to the drawing and with the component parts of the mounting kit 3 Use the required number of 8 stud screws and nuts gt Tighten the nuts crosswise in three steps gt Tightening torque DN 100 5 12 22 2 Nm PFEIFFER E VACUUM Preservation of sealing capacity Observe the following to preserve sealing capacity 3 Touch seals only with gloves gt Make sure sealing lips are undamaged The connection types for installation of CF to CF flange are stud screw and blind hole as well as hex screw and through hole The following elements are re quired The valid mounting kit of the Pfeiffer Vacuum accessories programme e Acopper seal e A protection screen or splinter shield can optionally be used Installation Stud screw and blind hole 3 If used Insert protective screen or splinter shield with the clamping lugs down ward into the high vacuum flange of the turbopump 2 Place the seal exactly in the hollow 3 Connect the flange using 16 stud screws M8 with washers and nuts and tighten circularly with a torque of 22 2 Nm After this check the torque since flowing of the sealing material may make it necessary to tighten the screws Hexagon screw and through hole 3 If used Insert protective screen or splinter shield with the clamping lugs down ward into the high vacuum flange of the turbopump 3 Place the seal exactly i
22. e The backing pump must generate a vacuum pressure of lt 5 mbar Damage to health due to poisonous gases Process gases can damage health and contaminate the environment gt Safely lead away the gas emission from the backing pump 3 Observe all safety recommendations of the gas producer Fig 6 Connecting the backing pump 20 Fore vacuum connection 20b Backing pump relay box 20 2 Clamping ring 20a Backing pump 20 1 Centering ring Design of the fore vacuum connection regarding sudden twisting of the pump If the rotor suddenly blocks the connection of high vacuum flanges of types ISO KF or ISO K can lead to twisting despite proper installation gt Keep masses small which can be installed directly to the pump 2 First connect flexible line elements directly to the turbopump if necessary gt With rigid pipe connections Install bellows for attenuation of vibrations in the connection line 2 Connect the fore vacuum line with small flange components or threaded hose couplings Do not narrow the free cross section of the fore vacuum flange gt The backing pump is connected electrically via a relay box 2 Plug in and fix the accessory s control lead to the corresponding accessory con nection port on the TC 400 3 Default for the backing pump is accessory A2 2 Establish the mains supply for the relay box according to the accessory operat ing instructions Observe the valid supply voltage of the backing
23. eath and large property damage 2 Precisely follow installation instructions 3 Only use Pfeiffer Vacuum original components accessories for installation O Installation and operation of accessories Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories The in stallation operation and maintenance of connected devices are described in detail in the operating instructions of the individual components 2 For information on order numbers of components see Accessories 3 Use original accessory parts only 5 1 Set up When installing the pump observe the following conditions The ambient conditions specified for the area of use e When using a casing heating and a water cooling unit the temperature of the connected flange of the vacuum chamber must not exceed 120 C e The pump may be fastened to the floor only after consultation with Pfeiffer Vac uum e tis not allowed to operate the device in systems where impact like stresses and vibrations or periodically forces occur 5 2 Preparatory work 3 Ensure sufficient cooling for the turbopump 2 Where magnetic fields gt 5 5 mT are involved a suitable shielding must be used Check installation location and consult Pfeiffer Vacuum if needed 2 The maximum permissible rotor temperature for the turbopump is 90 C If high temperatures arise for process reasons the radiated heat input must not exceed 2 4 W Install suitable screening sheets if necessa
24. ectronic drive unit Damages to the pump and drive Even after the mains power is switched off the subsequently running pump delivers electric power to the electronic drive unit There is a danger of electric body contact by premature separating the pump from the electronic drive unit 2 Never separate the electronic drive unit from the pump when the mains power is connected or the rotor is running Operating parameters of the electronic drive unit The factory operating parameters are always preset with replacement shipments 2 The use of a HPU enables the storing and the reuse of an existing parameter record 2 Reset any individually changed application parameters 2 Refer to the manual Electronic drive unit Rotation speed set value 8 Electronic drive unit 57 Allen head screw Fig 14 Assembly disassembly of the TC 400 2 Do not exercise any mechanical load on the electronic drive unit 2 Turn off the vacuum pump vent to atmospheric pressure and allow to cool if necessary 2 Only seperate the pump and the electronic drive unit from each other after dis connecting the supply voltage and the complete standstill of the pump 2 Remove the vacuum pump from the system if necessary 2 Unscrew Allen head screws 3 pieces from the electronic drive unit 2 Pull the electronic drive unit off the pump 3 Screw on and connect new electronic drive unit to the turbopump Tightening torque 2 5 Nm The typical
25. er 8 mm Internal diameter 6 mm Cooling water quality filtrated mechanically clean optically clear no turbidity no sediments chemically neutral Oxygen content max 4 mg kg Chloride content max 100 mg kg Water hardness max 10 dH 12 53 e 178 4H 178 ppm CaC03 Consumption of potassium perman 10 mg kg ganate max Carbon dioxide content max undetectable Ammonia content max undetectable pH value 7 9 Fore line overpressure max 6 bar Cooling water temperature gt dew point max 25 C Cooling water consumption at max 50 l h gas throughput Connecting to a cooling water system Fig 12 Connecting the cooling water 14 Cooling water connection 14a Fore line 14b Return line 14c Dirt trap 3 Insert hoses for the water cooling fore and return line as far as they will go in one cooling water connection each 2 Recommendation install dirt trap in the fore line 3 Torque of the banjo fitting 3 3 5 Nm PFEIFFER VACUUM 21 Operation 6 Operation 6 1 Commissioning The following important settings are programmed in the electronic drive unit ex factory e Parameter P 700 Set value run up time 8 min Parameter P 027 Gas mode 0 heavy gases e Parameter P 701 Rotation speed switchpoint 8096 of the nominal roation speed e Parameter P 720 Venting rotation speed at delayed venting 50 of the nomi
26. es or severe property damages can occur Possible danger Injuries or property damages can occur Command or note Command to perform an action or information about properties the disregarding of which may result in damage to the product PFEIFFERE VACUUM 3 About this manual Pictograph definitions Instructions in the text Abbreviations used Symbols used 4 PFEIFFER E VACUUM Prohibition of an action or activity in connection with a source of danger the disregarding of which may result in serious accidents I Warning of a displayed source of danger in connection with operation of the unit or equipment Command to perform an action or task associated with a source of danger the disregarding of which may resultin serious accidents 2 Work instruction here you have to do something DCU Display and operating unit HPU Handheld programming unit TC Electronic drive unit for turbopump TPS Mains pack The following symbols are used consistently throughout the diagrams Q High vacuum flange 9 Fore vacuum flange O Electric connection 4 Cooling water connection Q Venting connection Sealing gas connection Satety 2 Safety 2 1 Safety precautions Pbbo O O Duty to inform Each person involved in the installation operation or maintenance of the vacuum pump must read and observe the safety related parts of these operating instructions 3 The operator is obligated to make operating per
27. he sealing gas flow rate amounts 12 15 sccm for the HiPace 300 Sealing gas supply without control valve Fig 10 Connecting the sealing gas throttle 18 Seal ring 16 Locking screw 16b Sealing gas throttle 3 Unscrew the locking screw with seal ring out of the sealing gas connection 3 Screw the sealing gas throttle with sealing ring into the sealing gas connection Sealing gas supply with control valve Fig 11 Connecting the sealing gas valve 18 Seal ring 16 Locking screw 16a Sealing gas valve 3 Unscrew the locking screw with seal ring out of the sealing gas connection 2 Screw the sealing gas valve with seal ring into the sealing gas connection 2 Insert the control cable of the accessory into a free accessory connector on the TC 400 and tighten gt Make the settings and control via the interfaces of the electronic drive unit Installation Water cooling 3 Install the sealing gas supply e g inert gas via a connection adapter or on the inlet side G 1 8 of the control valve The turbopumps HiPace 300 with TC 400 have water cooling as standard equip ment e Incase of increased backing pressure gt 0 1 mbar and or operation with gas throughputs either air or water cooling may be used e Generally use water cooling if the ambient temperature is gt 35 C Cooling water requirements Cooling water connection Swiveling screw fitting with plug and socket connection Hose lines External diamet
28. idges 1 Please also specify model number of the the rating plate when ordering accesso ries or spare parts 14 PFEIFFER E VACUUM 31 Accessories 12 Accessories 12 1 HiPace 300 24 V DC Designation HiPace 300 with HiPace 300 with HiPace 300 with TC 400 DN 100 ISO TC 400 DN 100 CF F TC 400 DN 100 ISO K F TPS 310 mains pack for wall standard rail fitting PM 061342 T PM061342T PM061342T Wall rail fitting TPS 110 180 310 400 PM 061 392 T PM 061 392 T PM 061 392 T TPS 311 mains pack 19 rack module 3 RU PM 061 346 T PM 061 346 T PM 061 346 T Front panel kit for TPS 311 PM 061 395 T PM 061 395 T PM 061 395 T DCU 310 Display control unit incl power supply PM C01 822 PM C01 822 PM C01 822 DCU 002 Display control unit PM 061 348 T PM 061 348 T PM 061 348 T HPU 001 handheld programming unit PM 051 510 T PM 051 510 T PM 051 510 T Accessories package for HPU Power supply software and PC PM 061 005 T PM 061 005 T PM 061 005 T cable 230 V AC mains cable with Euro style safety plug IEC power socket straight 3 m P 4564 309 ZA P 4564 309 ZA P 4564 309 ZA 115 V AC mains cable with UL plug IEC power socket straight 3m P 4564 309 ZE P 4564 309 ZE P 4564 309 ZE 208 V AC mains cable with UL plug 3 m P 4564 309 ZF P 4564 309 ZF P 4564 309 ZF
29. indrical segment of the pump casing Do not bend the heating straps The heating jacket must seat completely on the casing segment 2 Fix the heating jacket with the fixing screw on the casing Observe the tightening torque for the fixing screw Fixing screw Tightening torque Tightening torque Singular retightening af in cold condition during the heating up ter the cooling down M5 6Nm 7 Nm 7 Nm M6 11 Nm 12 Nm 12Nm Tightening torques for fixing screws of heating jackets 3 Plug in and fix the accessory s control lead to the corresponding accessory con nection port on the TC 400 PFEIFFER VACUUM 19 Installation Sealing gas connec tion 20 PFEIFFER E VACUUM 3 Default for the casing heating is accessory B2 3 Establish the mains supply for the relay box according to the accessory operat ing instructions The turbopump must be operated with sealing gas to protect it such as in the case of unclean processes or high gas throughput The supply is made via a sealing gas valve or alternatively via a sealing gas throttle without control The activation of the control valve for the sealing gas connection is not pre installed in the electronic drive unit and has to be configured via their interfaces The permissible connection pressure is max 1 5 bar absolute e When operating the pump with more than 50 of the maximum gas through put sealing gas must be used to ensure rotor cooling e T
30. ion gt Differentiated malfunction display is possi ble via DCU or HPU gt Contact the Pfeiffer Vacuum Service 1 vice If no Pfeiffer Vacuum display and control unit is available please contact the Pfeiffer Vacuum Ser PFEIFFERE VACUUM 29 Service 10 Service 30 PFEIFFERE VACUUM Pfeiffer Vacuum offers first class service Operating fluid and bearing change on the spot by Pfeiffer Vacuum FieldService Maintenance repair in the nearby ServiceCenter or ServicePoint e Fast replacement with exchange products in mint condition Advice on the most cost efficient and quickest solution Detailed information addresses and forms at www pfeiffer vacuum net Service Maintenance and repair in the Pfeiffer Vacuum ServiceCenter The following steps are necessary to ensure a fast smooth servicing process 2 Download the forms Service Request and Declaration on Contamination 2 Fill out the Service Request form and send it by fax or e mail to your 2 Pfeiffer Vacuum service address 2 Include the confirmation on the service request from Pfeiffer Vacuum with your shipment 2 Fill out the declaration on contamination and include it in the shipment re quired gt Dismantle all accessories 2 Drain the operating fluid applies for turbopumps with pumping speed gt 800 l s 2 Leave electronic drive on the pump 2 Close the flange openings by using the original protective covers 3 If possible send pum
31. lt 1 107 mbar l s lt 1 107 mbar l s lt 1 107 mbar l s Power consumption max 300W 300W 300W Current consumption max 12 5 A 12 5A 12 5A Venting connection G 1 8 G 1 8 G 1 8 Weight 6 7 kg 8 7 kg 7 kg Cooling method standard Water Water Water Cooling method optional Air Air Air Cooling water temperature 15 35 C 15 35 C 15 35 C Cooling water consumption 50 l h 50 l h 50 l h Permissible magnetic field max 5 5 mT 5 5 mT 5 5 mT Interfaces RS 485 Remote RS 485 Remote RS 485 Remote 13 3 Differences at HiPace 300 48 V DC Parameter HiPace V 300 HiPace V 300 HiPace V 300 Flange in DN 100 ISO K DN 100 CF F DN 100 ISO F Run up time 1 2 min 1 2 min 1 2 min Operating voltage 48 X596 V DC 48 X596 V DC 48 X596 V DC Power consumption max 400 W 400 W 400W Current consumption max 8 4A 8 4 A 8 4 A PFEIFFERE VACUUM 35 Technical data and dimensions 13 4 Dimensions 18 6 DN 16 ISO KF G1 4 2 8 J Ne E Pp cn 07 a e L8 6 S O Q Q 2 3 S s e a O o O AICA 45o NO Fig 15 HiPace 300 DN 100 ISO K 186 DN 16 ISO KF G1 4 2 6 AN o D8 P m T i e a e 1 8 O Q p o e mM O 170 Mg t o Oo Ex 45o Noy Fig 16 HiPace 300 DN 100
32. m valve 3 Switch off the turbopump on the control unit or via remote control 3 Venting possibilities see below 3 For water cooling Shut off the water supply Manually Venting 3 Open the venting screw included in the venting connection of the turbopump about one turn Venting with Pfeiffer Vacuum Venting Valve 3 Enable venting via the functions of the electronic drive unit 2 Settings are possible via the RS485 by using DCU HPU or PC Venting rotation speed Switch off the pumping station Mains power failure 50 of the nominal rotation Venting valve opens for 3600 s 1 h Venting valve opens for speed works setting 3600 s 1 h works setting When mains power is restored the venting procedure is aborted Basic information for the rapid venting Venting of the vacuum chamber in two steps Ask for details on individual solutions from Pfeiffer Vacuum 3 Vent for 20 seconds at a rate of pressure rise of max 15 mbar s The valve cross section for the venting rate of 15 mbar s must be adapted to the size of the vacuum chamber For small vacuum chambers use the Pfeiffer Vacuum venting valve 3 Then vent with an additional venting valve of any desired size Maintenance replacement 7 Maintenance replacement Contamination of parts and operating fluid by pumped media is possible Poisoning hazard through contact with materials that damage health 2 In the case of contamination carry out appropriate s
33. m pumps components or operating fluids can be con taminated by toxic reatcive or radioactive substances gt Wear adequate protective equipment during maintenance and repairs or in case of reinstallation Risk of injury through falling objects When transporting vacuum pumps by hand there is a danger through loads slipping and falling down 2 Carry small and mid size vacuum pumps two handed 3 Carry vacuum pumps gt 20 kg by a suitable lifting device gt Wear safety shoes with steel toe cap according to directive EN 347 Risk of injury through hot surfaces Vacuum pumps can become hot during operation 2 Allow the pump to cool before maintenance and repairs 3 f necessary wear protective gloves according to directive EN 420 Risk of injury through sharp edges Rotor and stator disks of turbopumps have very sharp edges 2 Before any working wait for the complete standstill of the pump 2 Do not reach in the high vacuum flange 3 f necessary wear protective gloves according directive EN 420 OP OP GP OP 2 3 Proper use CE conformity The manufacturer s declaration of conformity becomes invalid if the operator modifies the original product or installs additional components e 2 Following installation into a plant and before commissioning the operator must check the entire system for compliance with the valid EU directives and reassess it accordingly e The vacuum pump may only be used to generate a vac
34. n the hollow 3 Connect the flange using 16 hex screws M8 with washers and nuts and tighten circularly with a torque of 22 2 Nm After this check the torque since flowing of the sealing material may make it necessary to tighten the screws 5 4 Connections to the turbopump Electronic drive unit Connecting the power supply Turbopumps with integrated electronic drive unit are designed for various applica tions Therefore different connection panels are available for the TC 1200 e TC 400 in standard version e TC 400 PB for Profibus linking e TC 400 E74 in dependence on specification SEMI E74 e TC 400 DN for DeviceNet linking Detailed description for function configuration and operation with the respective connection panel are given in the specific operating instructions for the electronic drive unit For voltage supply of the electronic drive unit TC 400 only use original power sup plies e g TPS 310 or DCU 310 Use of other power supplies only after consultation with Pfeiffer Vacuum Connecting cables are available from the Pfeiffer Vacuum ac cessory programme Danger of electric shock In case of defect the parts connected to the power supply are under voltage 3 Always keep the mains connection freely accessible so you can disconnect it at any time 2 Make sure that the turbopump has the correct supply voltage HiPace VDC Drive unit Power supply Power supply with DCU HiPace 300 24 TC 400 TPS 310 311 DCU
35. nal rotation speed Parameter P 721 Venting time 3600 s Parameter P 708 Set value power consumption 100 96 2 When water cooling is used Open cooling water supply and check the flow 2 When sealing gas is used Open the sealing gas supply and check the flow 2 Establish the mains for the power supply Danger of the pump being destroyed Pumping of gases with a higher molecular mass in the wrong gas mode can lead to de struction of the pump 2 Ensure the gas mode is correctly set 2 Contact Pfeiffer Vacuum before using gases with a greater molecular mass 80 O 3 O O S1 Switch ON OFF PFEIFFER E VACUUM AC in Mains connection DC out Connection TC 400 S el amp 7 1 DCout O O O O Fig 13 Front and rear view of a TPS mains pack 6 2 Operation modes 22 PFEIFFER E VACUUM The following operation modes are available Operation without operating unit Operation via remote connection Operation via RS485 and Pfeiffer Vacuum display and control units or PC Operation via field bus Operation 6 3 Function description Operation without operating unit Operation via remote connection Operation with DCU or HPU Operation via field bus Danger due to open high vacuum flange The rotor of the turbopump turns at high speed If the high vacuum flange is open there is a danger of cut injuries and that the pump can be destroyed by objects falling
36. nge openings by using the original protective covers 2 Close further connection ports by using the corresponding protective covers 3 Place pump upright on rubber feet 2 Store the pump only indoors at temperatures between 25 C and 55 C 3 In rooms with moist or aggressive atmospheres the pump must be airproof shrink wrapped in a plastic bag together with a bag of desiccant Re starting The serviceability of the operating fluid of the turbopump without operation is a maxi mum of 4 years Before restarting after a shut down of 4 years or longer carry out the following work 2 Replace the operating fluid reservoir 3 Replace bearings 2 Follow the maintenance instructions and inform Pfeiffer Vacuum 3 Check turbopump for contamination and moisture 3 Clean the turbopump externally with a lint free cloth and little industrial alcohol 3 If necessary have Pfeiffer Vacuum Service clean the turbopump completely 3 If necessary have the bearings replaced Take into account the total running time 3 Change the operating fluid reservoir 3 Installation and commissioning in accordance with the operating instructions Products or parts thereof mechanical and electrical components operating fluids etc may cause environmental burden 3 Safely dispose of the materials according to the locally applicable regulations 28 PFEIFFER E VACUUM Malfunctions 9 Malfunctions If malfunctions on the pump occur you will find pos
37. nominal rotation speed of a turbopump is factory set in the electronic drive unit If the electronic drive unit is replaced or a different pump type is used the reference set value of the nominal rotation speed must be confirmed This pro cedure is part of a redundant safety system for avoiding excess rotation speeds HiPace Nominal rotation speed confirmation P 777 300 1000 Hz 400 700 800 820 Hz 2 Adjust the parameter P 777 according to the pump type 2 Alternatively If no display and control unit is available please use the Speed Configurator of the spare parts delivery PFEIFFER VACUUM 27 Decommissioning 8 Decommissioning 8 1 Shutting down for longer periods 8 2 Re starting o 8 3 Disposal Contamination of parts and operating fluid by pumped media is possible Poisoning hazard through contact with materials that damage health 2 In the case of contamination carry out appropriate safety precautions in order to pre vent danger to health through dangerous substances 2 Decontaminate affected parts before carrying out maintenance work If the turbopump should be shut down for longer than a year 2 Remove the vacuum pump from the system if necessary 2 Change the operating fluid reservoir 2 Close the high vacuum flange of the turbopump 2 Evacuate turbopump via the fore vacuum flange gt Vent turbopump via the venting connection with oil free dry air or inert gas 2 Close the fla
38. ns Regularly check the proper observance off all safety measures Power supply The turbopump power supply must apply to the requirements of double insulation between mains input voltage and operating voltage according to the regulations of IEC 61010 and IEC 60950 Therefore Pfeiffer Vacuum recom mends to use exclusively original power packs and accessories Only in this case Pfeiffer Vacuum is able to guarantee the compliance of the European and North American guidelines Asafe connection to the protective earthing conductor PE is recommended protection class Ill e Do not loosen any plug connection during operations Wait for the rotor to reach standstill before peforming work on the high vacuum flange PFEIFFERE vacuum 5 Satety e Keep leads and cables well away from hot surfaces gt 70 C e Never fill or operate turbopump with cleaning agent Do not operate the turbopump with open high vacuum flange Do notcarry out any unauthorized modifications or conversions to the pump When returning the turbopump observe the shipping instructions 2 2 Protective equipment Determined situations concerning the handling of vacuum pumps require wearing of personal protective equipment The owner respectively the employer are obli gated to provide adequate equipment to any operating persons Danger to health by hazardous substances during maintenance or installation Depending on the process vacuu
39. ormity 000 cee ee 37 About this manual 1 About this manual 1 1 Validity Applicable docu ments 1 2 Conventions Safety instructions This operating manual is for customers of Pfeiffer Vacuum It describes the func tioning of the designated product and provides the most important information for safe use of the unit The description follows applicable EU guidelines All informa tion provided in this operating manual refer to the current state of the product s de velopment The documentation remains valid as long as the customer does not make any changes to the product Up to date operating instructions can also be downloaded from www pfeiffer vacuum net HiPace 300 Operating instructions Operating instructions Electronic drive unit TC 400 PT 0203 BN Declaration of conformity Part of this document also available via www pfeiffervacuum net For information about other certifications if applicable please see the signet on the product or e www tuvdotcom com e TUVdotCOM ID 0000021320 The safety instructions in Pfeiffer Vacuum operating manuals are the result of risk evaluations and hazard analyses and are oriented on international certification standards as specified by UL CSA ANSI Z 535 SEMI S1 ISO 3864 and DIN 4844 In this document the following hazard levels and information are considered DANGER Immediate danger Death or very severe injuries can occur Possible danger Injuri
40. p or unit in the original packaging Sending of contaminated pumps or devices No units will be accepted if they are contaminated with micro biological explosive or radioactive substances Hazardous substances are substances and com pounds in accordance with the hazardous goods directive current version If pumps are contaminated or the declaration on contamination is missing Pfeiffer Vacuum performs decontamination at the shipper s expense 2 Neutralise the pump by flushing it with nitrogen or dry air 3 Close all openings airtight 2 Seal the pump or unit in suitable protective film 3 Return the pump unit only in a suitable and sturdy transport container and send it in while following applicable transport conditions Exchange unit The factory operating parameters are always preset with exchange units If you use changed parameters for your application you have to set these again Service orders All service orders are carried out exclusively according to our repair conditions for vacuum units and components Forms under www pfeiffer vacuum net Spare parts HiPace 300 Spare parts HiPace 300 Item Designation Size Order number Notes Pieces Order qty 7 Operating fluid reservoir PM 143 451 T incl Porex rods 1 8 Electronic drive unit TC 400 according to the rating plate depends on the connection panel 1 14 Swiveling screw fitting P 4131 007 D water cooling 2 93 Mating plug remote PM 061 378 X with br
41. pump PFEIFFERE vacUUM 17 Installation Air cooling Venting valve 18 PFEIFFER E VACUUM As an option turbopumps with the electronic drive unit TC 400 may be operated with air cooling up to an ambient temperature of 35 C Fig 7 Connecting the air cooling 3 Pump lower part 3b Allen head screw 3a Air cooling unit 3c Counter sunk screw 2 Fix the Pfeiffer Vacuum air cooling unit to the holes of the turbopump using two screws 3 Plug in and fix the accessory s control lead to the corresponding accessory con nection port on the TC 400 3 Default for air cooling is accessory A1 The Pfeiffer Vacuum venting valve is used for automatic venting in case of shut down or power failure The permissible connection pressure is max 1 5 bar absolute Fig 8 Connecting the venting valve 18 Seal ring 17 Venting screw 17a Venting valve 3 Unscrew the venting screw with seal ring from the venting connection 3 Screw in the venting valve with seal ring 3 Plug in and fix the accessory s control lead to the corresponding accessory con nection port on the TC 400 3 Default for the venting valve is accessory B1 3 If neccessary install a venting gas supply e g inert gas to the intake G 1 8 of the solenoid valve Heating jacket Installation The turbopump and vacuum chamber can be heated to reach the final pressure more quickly Use of a heating jacket is only permissible for pumps with the high va
42. ry design information on re quest 5 3 Assembly e Ensure the greatest possible cleanliness when installing any high vacuum parts Unclean components prolong the pump down time e All flange components must be grease free dust free and dry at installation The operating fluid reservoir is already installed and filled for the turbopump HiPace 300 Earthquake safety An earthquake can result in contact with the safety bearings All forces occuring hereby are safely absorbed by the properly installed flange connections 3 The vacuum chamber must be secured by the customer against shifting and tip ping PFEIFFERE VACUUM 1 Installation Use of a splinter shield or protection screen Vibration damper Mounting orientation PFEIFFER E VACUUM it Rt TTA RTT PITT TI TI TI TATI TI TT FT TT 77 SC Safety Connection SC Y SC Fig 3 Example How to secure against shifting and tipping by external tremors The installation of a Pfeiffer Vacuum centering ring with splinter shield or protec tion screen in the high vacuum flange protects the turbopump against foreign bod ies coming from the chamber The volume flow rate is reduced Reduced pumping speed in H2 He N3 Ar Splinter shield DN 100 5 7 24 24 Protection screen DN 100 2 2 10 8 Danger from the turbopump and vibration dumper being torn off In case of
43. sible causes and instructions for repair in the following table 9 1 Rectifying malfunctions Problem Pump will not start none of the built in LEDs on the TC 400 lights up Possible causes Electrical supply interrupted Remedy gt Check plug contacts on the power supply gt Check supply lines on the power supply gt Check the output voltage 24 48 VDC on the connection DC out of the power supply gt Check the plug contacts on the TC Operating voltage incorrect gt Apply correct operating voltage gt Observe the rating plate No operating voltage applied gt Apply operating voltage TC 400 defective gt Exchange the TC 400 gt Contact the Pfeiffer Vacuum Service Pump will not start green LED on the TC 400 is flashing At operation without control panel Pins 1 3 1 4 or 1 14 are not connected on the remote connection gt Connect the pins 1 3 1 4 or 1 14 on the re mote connection gt Install the mating plug scope of delivery to the remote connection At operation via RS485 Bridge at Pin 1 14 prevents control commands gt Remove the bridge betwenn pins 1 and 14 from the remote connection gt Remove the mating plug from the remote connection Voltage drop in the cable too high gt Use a suitable cable Pump does not attain the final rotation al speed within the specified run up time Fore vacuum pressure too high gt Ensure function
44. signs of Pfeiffer Vacuum Observe the minimum strength of 170 N mm for the flange material Danger to life impermissible fastening Twisting or tearing off is possible in case the rotor is suddenly blocked due to the fas tening of pumps on a vacuum chamber with different flange variants 3 The combination of different flange types is impermissible in any case 2 Pfeiffer Vacuum will not accept any liability for all damages resulting from impermis sible fastening Observe shape tolerances for the counter flange Unevennesses of the customer supplied counter flange can lead to warping of the pump casing despite proper fastening Leakiness and negative running characteristics can be the result 3 Do not exceed an evenness of max 0 05 mm for the whole surface Mounting of ISO flanges If the rotor suddenly blocks the connection of high vacuum flanges of types ISO KF or ISO K can lead to twisting despite proper installation e The tighness of the high vacuum flange is not at risk thereby For the installation of the flange connections the following components are avail able e The valid mounting kit of the Pfeiffer Vacuum accessories programme e A protection screen or splinter shield can optionally be used 3 Mind that the sealing surfaces are not damaged 3 Connect the flanges according to the drawing and with the component parts of the mounting kit 3 Use the required number of 6 claw clamps gt Tighten the claw
45. sonnel aware of dangers originating from the vacuum pump the pumped medium and the entire system Installation and operation of accessories Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories The in stallation operation and maintenance of connected devices are described in detail in the operating instructions of the individual components 3 For information on order numbers of components see Accessories 3 Use original accessory parts only Checking the safety system against excess rotation speed To provide the functioning of the integrated safety system for avoiding excess rotation speed the pump must run up from the standstill at least once a year gt Switch off the pump and await the complete standstill rotation speed 0 Hz 3 Run up the pump according to this operating instructions Danger Electrical installation Safe operation after installation is the responsibility of the operator 2 Do not independently modify or change the pump and electrical equipment gt Make sure that the system is integrated in an emergency off safety circuit 3 Consult Pfeiffer Vacuum for special requirements Danger of electric shock In case of defect the parts connected to the power supply are under voltage 3 Always keep the mains connection freely accessible so you can disconnect it at any time Do not expose any body parts to the vacuum Observe all safety and accident prevention regulatio
46. sport and storage 3 1 Transport 3 2 Storage 8 PFEIFFER E VACUUM gt Reuse the transport container Vacuum pumps should be transported or shipped in the original packing only 3 Only remove the protective covers from the high vacuum and the fore vacuum side immediately before connection gt Keep the original protective covers 2 Always transport the turbopump in an upright position 2 Close the flange openings by using the original protective covers 2 Close further connection ports by using the corresponding protective covers 2 Store the pump only indoors at temperatures between 25 C and 55 C 3 In rooms with moist or aggressive atmospheres the pump must be airproof shrink wrapped in a plastic bag together with a bag of desiccant Product description 4 Product description 4 1 Product identification Pump types HiPace 3002 Pump features Variants Scope of delivery 4 2 Function The product designations of Pfeiffer vacuum turbomolecular pumps are self ex planatory and permit conclusions about the different versions The product desig nation consists of a family designation 1 the size 2 which is oriented on the pumping speed and if applicable the additional properties 3 of the pump 1 Family designation 2 Model designation 3 Property designation HiPace 300 Model designation of none Standard version the pump related to its U Upside down installation orientation pumping speed
47. t ing plug supplied and setting up the supply voltage the turbopump will run up immedi ately 3 Switch on the mains supply on the turbo pump immediately before operation Up to 4 accessories can be connected to the electronic drive unit TC 400 M12 sock ets with the designation accessory are available for this purpose The accessory connections have been preconfigured at the factory If the units listed below are connected with the preconfigured connection they are immediately ready for op eration according to the factory settings It is possible to connect other accessories to do so settings must be made on the electronic drive unit 3 To connect two units to one accessory connection use the appropriate Y Con nector from the Pfeiffer Vacuum range of accessories 3 Connect the adapter to the appropriate red coded connection on the TC 400 2 Settings can be made via the interfaces of the TC 400 remote RS485 Profibus or DeviceNet Accessory connection Connection with Y connector Preset accessory Accessory A1 Acc A to Y 1 Air cooling unit Accessory A2 Acc A to Y 2 Backing pump Accessory B1 Acc B to Y 1 Venting valve Accessory B2 Acc B to Y 2 Casing heating unit Overview of factory preset accessory connections on the TC 400 Installation Connecting the fore vacuum side Recommendation As backing pump use a dry compressing vacuum pump or a rotary vane pump from the Pfeiffer Vacuum programm
48. ustomer s field bus system is possible for electronic drive units with a corresponding field bus panel 2 Consider the following manuals for the operation via field bus Operating instructions for the electronic drive unit with the respective con nection panel PFEIFFERE VACUUM 23 Operation 6 4 Monitoring of the operation conditions Operating mode dis play via LED Temperature monitor ing LEDs in the front panel of the electronic drive unit show basic operating conditions of the turbopump A differentiated malfunction and warning display is possible only for operation with DCU or HPU LED Symbol Steady OFF Flashing Blinking Steady ON 1 12 s active 1 2 s active Green insufficient Pumping station Pumping station OFF Pumping sta power supply OFF Rotation speed 1 Hz tion ON Rotation speed lt 1Hz Yellow i no warning Warning Red L no malfunc Malfunction tion The drive power is reduced in case of impermissible motor temperature or imper missibly high housing temperature This can cause falling below the rotation speed switchpoint and so result in turning off the turbopump 6 5 Switching off and venting Switching off Venting 24 PFEIFFER E VACUUM After the turbopump is switched off it must be vented to avoid contamination due to particles streaming back from the fore vacuum area 3 Close the fore vacuum line Switch off the backing pump or close a fore vacuu
49. uum e Only operate the turbopump with an approved backing pump 6 PFEIFFER E VACUUM Satety 2 4 Improper use warranty seal PFEIFFER E VACUUM Improper use will cause all claims for liability and warranties to be forfeited Im proper use is deemed to be all use for purposes deviating from those mentioned above especially e Pumping of corrosive or explosive media e Pumping of condensing vapors e Pumping of liquids e Pumping of dusts e Operation with improper high gas throughput Operation with improper high fore vacuum pressures Operation with improper gas mode Operation with improper high levels of insulated heat input e Venting with improper high venting rates Use of the vacuum pump to generate pressure The operation of the devices in potentially radioactive areas Operation in potentially explosive areas The operation of the devices in systems where the turbopumps are subjected to impact like stress and vibrations or the effect of periodically occurring forces The use of accessories which are not named in this manual Closure seal The product is sealed at the factory Damaging or removal of a closure seal leads to the loss of liability and warranty entitlements 2 Do not open the product within its warranty period gt For process related shorter maintenance intervals please contact the Pfeiffer Vacu um Service PFEIFFERE VACUUM 7 Transport and storage 3 Tran
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