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Semiconductor Characterization System Technical Data

1. 4200 SCS Semiconductor Characterization System Technical Data 4200 SPEC Rev M 1 888 KEITHLEY us only KEITHLEY www keithley com A GREATER MEASURE OF CONFIDENCE Wel SC Ces D ka Y si CN Kap E 5 O SEMICONDUCTOR c O kd m Z O H un 4200 SCS Introduction Configuration Options Hardware Specifications KTE Interactive Software Tools 13 Microsoft Windows 14 The Keithley Interactive Test Environment CUS Keithley User Library Tool KULT System Configuration and Diagnostics KCON 23 Keithley External Control Interface KXCI Support Contracts Value Add Services Other Upgrades Embedded PC Policy Warranty Information Switch Matrix Support and Configurations Accessories and Optional Instrumentation Other Optional Accessories 1 888 KEITHLE Y v s only Semiconductor Characterization System Technical Data Introduction The Model 4200 SCS is a total system solution for electrical characterization of devices materials and semiconductor processes This advanced parameter analyzer provides intuitive and sophisticated capabilities for semiconductor device characterization by combining unprecedented measurement sensitivity and accuracy with an embedded Windows based operating system and the Keithley Interactive Test Environment It is a powerful single box so
2. Current Measure p p 0 2 of measurement range x x MAXIMUM SLEW RATE 0 2V us 189 285C xl x3 e 28 40 C x3 x5 REMOTE SENSE lt 10Q in series with FORCE terminal not to exceed a 5V dif ference between FORCE and SENSE terminals 30V maximum between COMMON and SENSE LO MAXIMUM LOAD CAPACITANCE 10nF 1 888 KEITHLEY uss only KEITHLEY CREATER MEASURE OF CON Pk GO ENG E 4200 SCS Semiconductor Characterization System Technical Data Additional DC SMU Specifications MAX OUTPUT POWER 22 watts for 4210 SMU and 2 2 watts for 4200 SMU both are four quadrant source sink operation DC FLOATING VOLTAGE COMMON can be floated 32 volts from chassis ground VOLTAGE MONITOR SMU in VMU mode Measure Voltage Measure Accuracy Range Resolution rdg volts 200 V 200 uV 0 015 3 mV 20 V 20 uV 0 01 1 mV 2 V 2 uV 0 012 110 pV 200 mV 1 uV 0 012 80 uV INPUT IMPEDANCE 10131 INPUT LEAKAGE CURRENT lt 30pA MEASUREMENT NOISE 0 02 of measurement range rms DIFFERENTIAL VOLTAGE MONITOR Differential Voltage Monitor is available by measuring with two SMUs in VMU mode or by using the low sense terminal provided with each SMU GROUND UNIT Voltage error when using the ground unit is included in the 4200 SMU 4210 SMU and 4200 PA specifications No additional errors are introduced when using the ground unit OUTPUT TERMINAL CONNECTION Dual triaxial 5 way binding po
3. CONFIDENCE 4200 SCS 1 888 KEITHLEY v s only www keithley com Semiconductor Characterization System Technical Data Configuration Examples The 4200 SCS s plug in chassis design offers exceptional configuration flexibility as the following examples illustrate A chassis can contain up to nine SMUs in any combination of high and medium powered units Any configuration can be specified without a flat panel display by substituting the 4200 SCS C for the 4200 SCS F However an external SVGA monitor is required to operate the 4200 SCS C Basic Characterization System Configuration Configuration One 1 Model 4200 SCS F Three 3 Model 4200 SMU medium power SMUs One 1 Model 4200 PA Remote PreAmp module One 1 Remote Sense Ground Unit Description A general purpose configuration for characterizing transistors and other devices Maximum DC Configuration Configuration One 1 Model 4200 SCS F includes two medium power SMUs as the standard configuration which can be substituted with two high power SMUs Seven 7 additional Model 4210 SMUs total of nine all nine can be high power SMUs Nine 9 Model 4200 PA Remote PreAmp modules Description Provides a nine SMU system with 0 1fA sensitivity on all nine SMUs and 1A capability on all nine SMUs Maximum Pulse Configuration Configuration One 1 Model 4200 SCS F Four 4 Model 4225 PMU Ultra Fast I V modules 8 channels Note More than four Model 4225
4. Data Storage Fixed disk Internal high capacity fixed disk drive stores the operating system application programs and data files DVD CD RW Drive Standard DVD CD read write drive is provided for data storage and retrieval USB Ports Four USB 2 0 ports for typical PC USB peripherals Connectivity The 4200 SCS includes two LAN Ethernet ports 10 100 1000 with software drivers installed KEITHLEY A GREATER MEAS URE OF CONFIDENCE 5 D m 2 Ges D Y to CN Kap E al CO SEMICONDUCTOR 4200 SCS Semiconductor Characterization System Technical Data The Keithley Interactive Test Environment KITE The Keithley Interactive Test Environment KITE is the Model 4200 SCS Windows device characterization application It provides advanced test definition parameter analysis and graphing and automation capabilities required for modern semiconductor characterization KITE Projects ER A project is a collection of related tests organized in a hierarchy that parallels the physical layout Cite LES of the devices on a wafer KITE operates on projects using an interface called the project navigator i The project navigator simplifies organizing test files test execution and test sequencing EE The project navigator organizes tests into a logical hierarchy presented in a browser style format M mostet_tests This structure allows users to define projects around wafer testing w e s
5. point and click test sequencing on a device a group of devices subsite module or test element group or a user programmable number of probe sites on a wafer Prober Control Keithley provides integrated prober control for supported analytical probers when test sequencing is executed on a user programmable number of probe sites on a wafer Contact the factory for a list of supported analytical probers A manual prober mode prompts the operator to perform prober operations during the test sequence Supported Probers Manual Prober Use the manual prober driver to test without utilizing automatic prober functionality Manual prober replaces all computer control of the prober with that of the operator At each prober command a dialog box appears instructing the operator what operation is required Fake Prober The Fake prober is useful when prober actions are not desired such as when debugging without having to remove prober commands from a sequence Supported Semi automatic Analytical Probers Cascade Microtech Summit 12K Series verified with Nucleus UI Karl Suss Model PA 200 verified with Wafermap for ProberBench NT NI GPIB Driver for ProberBench NT PBRS232 Interface for ProberBench NT Navigator for ProberBench NT Remote Communicator for ProberBench NT MicroManipulator 8860 Prober verified with pcBridge pcLaunch pcIndie pcWfr pcNav pcRouter Signatone CM500 driver also works with other Signatone prob
6. KEITHLEY A GREATER MEASURE OF CONFIDENCE Wel _ D m SC Ges D Y U me CN Kap E al CO SEMICONDUCTOR 65 _ 6 m c os D un U fy N Kap E a CO SEMICONDUCTOR 4200 SCS Model 4210 CVU Specifications Semiconductor Characterization System Technical Data MEASUREMENT FUNCTIONS MEASUREMENT PARAMETERS Cp G Cp D Cs Rs Cs D R jX Z theta RANGING Auto and fixed MEASUREMENT TERMINAL CONFIGURATION Four terminal pair CONNECTOR TYPE Four SMA female connectors CABLE LENGTH 0m 1 5m 3m or custom selectable INTEGRATION TIME FAST NORMAL QUIET and CUSTOM TEST SIGNAL FREQUENCY RANGE 1kHz to 10MHz MINIMUM RESOLUTION 1kHz 10kHz 100kHz 1MHz depending on frequency range SOURCE FREQUENCY ACCURACY 0 1 SIGNAL OUTPUT LEVEL RANGE 10mV rms to 100mV rms RESOLUTION 1mV rms ACCURACY 10 0 ImV rms unloaded at rear panel OUTPUT IMPEDANCE 10002 typical DC BIAS FUNCTION DC VOLTAGE BIAS Range 30V 60V differential Resolution 1 0mV Accuracy 0 5 5 0mV unloaded MAXIMUM DC CURRENT 10mA SWEEP CHARACTERISTICS AVAILABLE SWEEP PARAMETERS DC bias voltage frequency AC voltage SWEEP TYPE Linear custom SWEEP DIRECTION Up sweep down sweep NUMBER OF MEASUREMENT POINTS 4096 EXAMPLE OF INCLUDED LIBRARIES e C V C t and C f measurements and analysis of
7. Specifications are the performance standards against which the Models 4200 SMU 4210 SMU and 4200 PA MEASURE SOURCE are tested The measurement and source accuracy are CURRENT MAX ACCURACY ACCURACY specified at the termination of the supplied cables ILR RESOLUTION rdg amps RESOLUTION rdg amps e 23 C 5 C within 1 year of calibration RH 4210 1 uA 0 100 200 uA 50 uA 0 100 350 uA between 5 and 60 after 30 minutes of warm up SMU2 100 mA 210 V 0 045 3A 5 uA 0 050 15 uA e Speed set to NORMAL High 0 045 3A 0 050 15 uA e Guarded Kelvin connection Power 4200 0 037 300 nA 0 042 1 5 uA e 1 C and 24 hours from ACAL SMU SE 0 035 30 nA 0 040 150 nA Ge 0 033 3nA 0 038 15 nA SMU 0 050 600 pA 0 060 1 5 nA 4200 SMU and 4210 SMU with optional 4200 PA PreAmp 0 050 100 pA 0 050 30 pA 0 050 1 pA 0 050 100 fA 0 100 30 fA 0 500 15 fA 1 000 10 fA VOLTAGE COMPLIANCE Bipolar limits set with a single value between full scale and 10 of selected voltage range 0 060 200 pA 0 060 30 pA 0 060 3 pA 0 060 300 fA 0 100 80 fA 0 500 50 fA 1 000 40 fA VOLTAGE SPECIFICATIONS VOLTAGE MAX RANGE CURRENT 4200 SMU 4210 SMU Resolution MEASURE Accuracy rdg volts 0 015 3 0 012 150 012 100 0 0 Ol w Resolution SOURCE Accuracy rdg volts 0 02 15 0 02 1 5 0 02 3
8. 0 25 100uA 10mA 0 25 1 1 25 4225 PMU ACCESSORIES SUPPLIED SMA to SMA cable 2m 4 ea CA 404B SMA to SSMC Y cable 6 inch 15 cm 2 each 4200 PRB C 4225 RPM ACCESSORIES SUPPLIED SMA Cable 8 inch 20 cm 1 each CA 452A Triax to BNC Adapter 1 each 7078 TRX GND BNC to SMA adapter 1 each CS 1247 RPM Cable 2 1 m 1 each CA 547 2A Magnetic Base 1 each 4200 MAG BASE 1 888 KEITHLEY uss only www keithley com A GREATER 40V Range Max Output vs DUT Resistance Max Output Voltage V 100 DUT Resistance Q KEITHLEY MEASURE OF CONFI D EN C E Max Current A SEMICONDUCTOR 65 _ 6 m es D Y LU ae N Kap E a CO SEMICONDUCTOR 4200 SCS Semiconductor Characterization System Technical Data 4225 PMU and 4220 PGU Specifications PULSE LEVEL 2 NOTES 10V Range 40V Range 1 Unless stated otherwise all specifications assume a 50Q termination 2 Level specifications are valid after 50ns typical settling time after Vout 50 Q into 1 MQ 10 V to 10 V 40 V to 40 V slewing for the 10V source range and after 500ns typical settling time y POO Ta NO Gy 20 V to 20 V after slewing for the 40V source range into a 50Q load our 3 With transition time of 20ns 0 100 for the 10V source range and Accuracy 0 5 10 mV 0 2 20 mV 100ns 0 100 for the 40V source range Resolution 50 Q
9. BNC Female Adapters CS 737 Triax Tee Adapter female male female CS 1247 Three SMA Female to BNC Male Adapters 4210 MMPC 304A Grounding Bracket Assembly 4210 MMPC 305A Mini Triax 3 lug Shorting Plug shorts center pin to outer shield 1 888 KEITHLEY uss only www keithley com A CREATER ACCESSORIES SUPPLIED WITH EACH 4210 MMPC S CA 532A MMPC Prober Cable Assembly CA 534 24A Two Male Triax to Male Triax Cables 100Q 61cm CA 535 7A Prober Ground Jumper 17 8cm CS 712 Three Triax Male to BNC Female Adapters CS 737 Triax Tee Adapter female male female CS 751 Two Triax Female to Triax Female Adapters CS 1247 Three SMA Female to BNC Male Adapters CS 1546 Triax Shorting Plug shorts center pin to outer shield ACCESSORIES SUPPLIED WITH EACH 4225 PMU OR 4220 PGU 4200 PRB C Two SMA to SSMC Y Cable Assemblies 0 15m CA 404B Four SMA to SMA 50Q Cables 2m ACCESSORIES SUPPLIED WITH EACH 4225 RPM 7078 TRX GND Triax to BNC Adapter CA 452A SMA to SMA 50Q Cable 0 2m CA 547 2A RPM Cable 2 1m CS 1247 BNC to SMA Adapter OPTIONAL INSTRUMENTATION 4200 CVU PROBER KIT Optional accessory kit for connecting to popular analytical probers 4200 CVU PWR CVU Power Package for 200V CN 4200 PA Remote PreAmp Option for 4200 SMU and 4210 SMU extends SMU to 0 1fA resolution 4200 PMU PROBER KIT Optional accessory kit for connecting ultra fast I V modules to popular analytical probers 4200 SCP2 Dual Channel Integrated Oscilloscop
10. Fast I V Module e Two Model 4225 RPM Remote Amplifier Switches e Automated Characterization Suite ACS Standard Version 4 2 Software or later e Ultra Fast BTI Test Project Module e Cabling The Model 4200 BTI A offers the best high speed low current measurement sensitivity available in a single box integrated solution For example e Supports sub microsecond pulse characterization of drain current at reduced drain voltage minimizing drain to source fields that could otherwise skew test results e Ensures that source measure instrumentation won t be the limiting factor when making low level measurements The ACS software which is provided in the package supports building complex test sequences including up to 20 measurement sequences and full prober integration It also e Easily integrates DC I V and ultra fast I V measurements into a pre and post stress measurement sequence e Characterizes degradation and recovery behaviors using either AC or DC stress e Incorporates single pulse charge trapping SPCT measurements into longer stress measure sequences 1 888 KEITHLEY v s only www keithley com Semiconductor Characterization System Technical Data Specifications 4225 RPM REMOTE AMPLIFIER SWITCH z PULSE LEVEL Optional Accessory for the 4225 PMU d The 4225 RPM provides lower current measurement ranges to 4225 PMU with the 4225 PMU 4225 RPM e Low current measure ranges supports wide ran
11. High and low x structures MOSFETs BJTs Diodes II V compound devices Carbon nanotube CNT devices e Doping profiles Tox and carrier lifetime tests e Junction pin to pin and interconnect capacitance measure ments e Solar cells including Si organic thin film CIGS etc The C V instrument integrates directly into the Model 4200 SCS chassis It can be purchased as an upgrade to existing systems or as an option for new systems 1 888 KEITHLEY uss only www keithley com MEASUREMENT ACCURACY 4 Example of C G Measurement Accuracy Measured C G Frequency Capacitance Accuracy Accuracy 2 1 pF 0 92 260 ns 10 pF 0 32 990 ns 3 SH 100 pF 0 29 9 us 1 nF 0 35 99 us 1 pF 0 38 42 ns 10 pF 0 16 65 ns SE 100 pF 0 09 590 ns 1 nF 0 09 4 us 10 pF 0 17 15 ns 100 pF 0 18 SS as 1 nF 0 08 450 ns 10 nF 0 08 HDS 100 pF 0 26 15 ns 1 nF 0 15 66 ns Ge 10 nF 0 08 450 ns 100 nF 0 08 as BE 1 nF 0 69 40 ns 1 kHz 10 nF 025 120 ns 100 nF 0 10 500 ns 1uF 0 15 10 us NOTES 1 The capacitance and conductance measurement accuracy is specified under the following conditions Dy lt 0 1 2 Conductance accuracy is specified as the maximum conductance measured on the referenced capacitor 3 These specs are typical Typical and supplemental specs are non warranted apply at 23 C and are provided solely as useful i
12. PMUs may be configured at reduced power levels Contact Keithley for details Four 4 Model 4200 SMUs Four 4 Model 4200 PA Remote PreAmp modules Description Provides a four SMU system with four Model 4225 PMUs that provide eight channels that support traditional pulse mode arbitrary waveform mode ARB Segment ARB waveform mode Segment ARB or SARB and trigger in Each pulse channel contains an inline High Endurance Output Relay solid state relay Example Broad Use Case Configuration Configuration One 1 Model 4200 SCS F Two 2 Model 4225 PMU Ultra Fast I V modules 4 channels Two 2 Model 4225 RPM Remote Amplifier Switches Two 2 Model 4200 SMU Medium Power SMUs Two 2 Model 4210 SMU High Power SMUs Four 4 Model 4200 PA Remote PreAmp modules One 1 Model 4210 CVU Capacitance Voltage Instrument Description Provides an ultra flexible multi use system for a broad range of parametric tests including very low level DC measurements C V and ultra fast I V for pulse and transient tests KEITHLEY A GREATER MEASURE OF CONFIDENCE 5 _ m 2 Ges D Y to CN Kap E al CO SEMICONDUCTOR 65 _ 6 E D un U i N Kap E a CO SEMICONDUCTOR 4200 SCS Hardware Specifications DC SMU Hardware Specifications CURRENT SPECIFICATIONS Semiconductor Characterization System Technical Data SPECIFICATION CONDITIONS
13. The following table is provided only to offer the user a clearer idea of the Model 4225 PMU s absolute best performance as achievable under optimal conditions This should not be inter preted as a guarantee that the Model 4225 PMU will achieve this level of performance in typical use cases 10V RANGE Rise Time lt 10ns Pulse Width 10ns full width half maximum Period 20ns Overshoot Preshoot Ringing 2 20mV 40V RANGE Rise Time 50ns to 10V 100ns to 40V 40 V Range 10 mA 800 mA 0 25 3 mA 1 mA 10 mA 0 5 10 uA 4225 PMU and 4225 RPM VOLTAGE MEASUREMENT 10V PMU 40V PMU 10V RPM Accuracy DC 0 25 10 mV 0 25 40 mV 0 25 10 mV 1 888 KEITHLEY uss only www keithley com Pulse Width 50ns Period 100ns Overshoot Preshoot Ringing 0 5 40mV KEITHLEY A GREATER MEASURE OF CONFIDENCE 4200 SCS 4200 BTI A Ultra Fast NBTI PBTI Option The Model 4200 BTI A package is ideal for wafer and cassette level automation It combines Keithley s advanced DC I V and ultrafast I V measurement capabilities with automatic test executive software to provide the most advanced NBTI PBTI test platform available in the semiconductor test industry The 4200 BTI A package includes all the instruments interconnects and software needed to make the most sophisticated NBTI and PBTI measurements on leading edge silicon CMOS technology including e One Model 4225 PMU Ultra
14. any modification of Keithley hardware made by the customer or operation of the hardware outside the environmental specifications Software Warranty Keithley warrants for the Keithley produced portion of the software or firmware will conform in all material respects with the published specifications for a period of ninety 90 days provided the software is used on the product for which it is intended in accordance with the software instructions Keithley does not warrant that operation of the software will be uninterrupted or error free or that the software will be adequate for the customer s intended application The warranty does not apply upon any modification of the software made by the customer Approved Third Party Software Acronis True Image OEM Adobe Acrobat 8 0 or later Adobe Acrobat Reader 8 0 or later Diskeeper 9 0 or later Kaspersky Anti Virus 2009 or later McAfee Virus Scan Plus 2009 or later Microsoft Excel Microsoft Internet Explorer 7 0 or later Microsoft Word Norton AntiVirus 2000 6 0 or later Symantec pcAnywhere 11 0 TrendMicro Anti Virus 2008 or later Visual C net Visual Studio 2010 Professional Edition Windows XP Professional KEITHLEY MEASURE OF CONFIDENCE Wel _ D m 2 ot D Y oh N Kap E al CO SEMICONDUCTOR 4200 SCS Semiconductor Characterization System Technical Data Switch Matrix Support and Configurations Overview A number of usef
15. charge to breakdown project consists of two Opp tests on gate dielectrics V Ramp and J Ramp Those two tests follow JEDEC Standard 35 A An additional test performs an LN measurement under normal work conditions to obtain input parameters for the V Ramp and J Ramp tests KEITHLEY MEASURE OF CONFIDENCE Wel _ m 2 Ges D Y to N Kap E al CO SEMICONDUCTOR 65 _ m c os D un U ti N Kap E al CO SEMICONDUCTOR 4200 SCS Semiconductor Characterization System Technical Data Pulse Projects Chargepumping This project consists of Charge Pumping CP tests that characterize interface and charge trapping phenomena There are a variety of tests including base sweep amplitude sweep rise time linear sweep fall time linear sweep frequency linear sweep and frequency log sweep ChargeTrapping The Charge Trapping project uses a single pulse technique to look at device charge trapping and de trapping behavior within a single well configured gate pulse During the rise and fall times of the voltage ramp the corresponding drain current response is captured allowing appropriate Vgs Ip curves to be formed ivpgswitch 340x The tests in this project demonstrate automated device testing using a 4200 SCS a Keithley Model 3402 pulse generator and a switch matrix ivpgswitch The tests in this project demonstrate automated devic
16. chassis with integrated controller Two 2 Model 4200 SMU medium power SMUs One 1 Remote Sense Ground Unit LAN GPIB USB RS 232 parallel port hard disk DVD CD RW 4200 SCS C 9 slot chassis with integrated controller Composite Front Bezel i e no built in display Two 2 Model 4200 SMU medium power SMUs One 1 Remote Sense Ground Unit LAN GPIB USB RS 232 parallel port hard disk DVD CD RW Source Measure Units Each system can be configured with up to seven additional SMUs for a total of nine SMUs Two SMU models are available a medium power 100mA 2W version Model 4200 SMU and a high power 1A 20W version Model 4210 SMU The system can support up to nine high power SMUs 4200 SCS Source Measure Units MAXIMUM VOLTAGE 4200 SMU medium power 210V 4210 SMU high power 210V Remote PreAmp The low current measurement capabilities of any SMU can be extended by adding an optional Remote PreAmp Model 4200 PA The 4200 PA provides 0 1fA resolution by effectively adding five current ranges to either SMU model The PreAmp module is fully integrated with the system to the user the SMU simply appears to have additional measurement resolution available The Remote PreAmp is shipped installed on the back panel of the 4200 SCS for local operation This installation allows for standard cabling to a prober test fixture or switch matrix Users can remove the PreAmp from the back panel and place it in a re
17. is possible to deselect the test s that include the unwanted parametric measurements It is also possible to add custom tests that will be monitored between successive stresses HCI 4 DUT This is a Hot Carrier Injection HCI project on two 4 terminal N MOSFETs and two 4 terminal p MOSFETs with a switch matrix Parameters monitored between two successive stresses include Int IDon IG Vr and Gm Those parameters are measured on both forward normal operation condition and reverse reverse source and drain bias conditions If only a subset of these parameters is needed it is possible to deselect the test s that include the unwanted parametric measurements It is also possible to add custom tests that will be monitored between successive stresses Also if less than four devices are tested it is possible to deselect the unwanted device plan in the project tree or modify it for more devices HCI_ PULSE This Hot Carrier Injection HCI project tests one 4 terminal N MOSFET using AC stress It is similar to HCI_1_DUT NBTI 1 DUT This is a Negative Bias Temperature Instability NBTI project on one 4 terminal P MOSFET Parameters monitored between two successive stresses include In IDon Ig Vr and Gm If only a subset of these parameters is needed it is possible to deselect the test s that include the unwanted parametric measurements It is also possible to add custom tests that will be monitored between successive stresses Qbd This
18. on the 4200 SCS Complete Reference CD ROM Printed manual available as an option ACCESSORIES SUPPLIED WITH EACH 4200 CVU Prober Kit 237 TRX BAR Four Female Triax to Female Triax Adapters 4200 PRB C Two SSMC to SMA Cables with local ground 7078 TRX BNC Four Male Triax to Female BNC Adapters 7078 TRX GND Four Male Triax to Female BNC Adapters guards removed CA 446A Four SMA Cables 100 2 3m CS 565 Four Female BNC to Female BNC Adapters CS 1247 Four Female SMA to Male BNC Adapters CS 1391 Two SMA Tee Adapters female male female ACCESSORIES SUPPLIED WITH EACH 4200 PMU PROBER KIT CA 19 2 Four BNC Male to BNC Male Coax Cables 1 5m CA 405B SMA Male to SMA Male Coax Cable 15cm CA 451A SMA Male to SMA Male Coax Cable 11cm CA 452A Two SMA Male to SMA Male Coax Cables 20cm CS 565 Two BNC Female to BNC Female Barrels CS 712 Two BNC Female to Triax Male Adapters CS 1247 Four SMA Female to BNC Male Adapters CS 1252 Four SMA Male to BNC Female Adapters CS 1390 Two Micro Triax LEMO to SMA no guard CS 1391 Three SMA Tees female male female ACCESSORIES SUPPLIED WITH EACH 4210 CVU CA 447A Four SMA Cables male to male 100Q 1 5m CS 701 Two BNC Tee Adapters CS 1247 Four Female SMA to Male BNC Adapters ACCESSORIES SUPPLIED WITH EACH 4210 MMPC C CA 533 24A Two Mini Triax Full Triax Cables 100Q 61cm CA 535 4A Prober Ground Jumper 10cm CA 540 12A Mini Triax Mini Triax Cable 1000 35cm CS 712 Three Triax Male to
19. pulse pattern generators ki590ulib The ki590ulib user library performs conductance measurements and 100kHz or 1MH capacitance measurements C V sweeps C V pulse sweeps C t sweeps and cable compensation for the Keithley Model 590 C V Analyzer Ri595ulib The ki595ulib user library performs Q t sweeps and C V sweeps using the Keithley Model 595 Quasistatic C V Meter kipulseulib The kipulseulib UTMs control the Model 4205 PG2 4220 PGU or 4225 PMU pulse card kiscopeulib The kiscopeulib UTMs control either the Model 4200 SCP2HR or 4200 SCP2 oscilloscope matrixulib The matrixulib user library connects instrument terminals to output pins using a Keithley 707B or 708B switch system when configured as a general purpose Model 4200 GP RS XX low current Model 4200 LC LS XX or ultra low current Model 4200 UL RS XX or Model 4200 UL LS XX matrix parlib The parlib user library is used for extracting device parameters on bipolar and MOSFET transistors Extracted parameters include Beta resistance threshold voltage and Vps Ip sweeps and Vgs Ip sweeps for MOSFETs prbgen The prbgen user library provides test modules to initialize the prober driver move to the next site or subsite in the prober s wafer map make or break contact between the probes and the wafer and obtain the X position and Y position of the prober Contact the factory for supported probers winulib The winulib user library provides user interfac
20. 00 0 02 150 CURRENT COMPLIANCE Bipolar limits set with a single value between full scale and 10 of selected current range Supplemental Information MAXIMUM GUARD OFFSET VOLTAGE Am from FORCE GUARD OUTPUT IMPEDANCE 100kQ MAXIMUM GUARD CAPACITANCE 1500pF MAXIMUM SHIELD CAPACITANCE 3300pF 4200 SMU and 4210 SMU SHUNT RESISTANCE FORCE to COMMON gt 102Q 100nA 12A ranges 4200 PA SHUNT RESISTANCE FORCE to COMMON gt 10 Q 1pA and 10pA ranges 71002 LO0pA 100nA ranges OUTPUT TERMINAL CONNECTION Dual triaxial connectors for 4200 PA dual mini triaxial connectors for 4200 SMU and 4210 SMU NOISE CHARACTERISTICS typical Voltage Source rms 0 01 of output range Current Source rms 0 1 of output range Voltage Measure p p 0 02 of measurement range Supplemental information is not warranted but provides useful information about the Models 4200 SMU 4210 SMU and 4200 PA COMPLIANCE ACCURACY Voltage compliance equals the voltage source specifications Current compliance equals the current source specifications OVERSHOOT lt 0 1 typical Voltage Full scale step resistive load and 10mA range Current 1mA step R 10kQ 20V range RANGE CHANGE TRANSIENT Voltage Ranging lt 200mV Current Ranging lt 200mvV ACCURACY SPECIFICATIONS Accuracy specifications are multiplied by one of the following factors depending upon the ambient temperature and humidity Relative Humidity a
21. 00 5Y CAL Pulse Generator Option 4220 PGU 3Y EW 1 year factory warranty on the 4220 PGU Dual Channel Pulse Generator extended to 3 years from date of shipment Includes calibration and return shipping Requires purchase of 4200 3Y EW 1 year factory warranty on the 4220 PGU Dual Channel Pulse Generator extended to 5 years from date of shipment Includes calibration and return shipping Requires purchase of 4200 5Y EW 4220 PGU 5Y EW 4220 PGU 3Y CAL 3 calibrations within 3 years of purchase of the 4220 PGU Dual Channel Pulse Generator Requires purchase of 4200 3Y CAL 5 calibrations within 5 years of purchase of the 4220 PGU Dual Channel Pulse Generator Requires purchase of 4200 5Y CAL Ultra Fast I V Module Option 4225 PMU 3Y EW 1 year factory warranty on both the 4225 PMU Ultra Fast I V Module and the 4225 RPM Remote Amplifier Switch extended to 3 years from date of shipment Includes calibration and return shipping Requires purchase of 4200 3Y EW 1 year factory warranty on both the 4225 PMU Ultra Fast I V Module and the 4225 RPM Remote Amplifier Switch extended to 5 years from date of shipment Includes calibration and return shipping Requires purchase of 4200 5Y EW 3 calibrations within 3 years of purchase of both the 4225 PMU Ultra Fast I V Module and the 4225 RPM Remote Amplifier Switch Requires purchase of 4200 3Y CAL 5 calibrations within 5 years of purchase of both the 4225 PMU Ultra Fast I V Mo
22. 2 Resolution 8 bit 16 bit Bandwidth 50 DC to 750 MHz DC to 250 MHz typical 2 5 kS s to 1 25 GS s in 10 kS s to 200 MS s in Bandwidth 1MQ DC to 350 MHz DC to 125 MHz typical Sample Rate 1 2 5 5 steps 1 2 5 4 5 steps NO 0 28 05 L25 TE 0L 02 05 25 2 5 GS s 1 channel interleaved 400 MS s 1 channel interleaved Full Scale Input Range 50 Q i 10 vi bha 10 vi See 1 MS channel 1 MS channel Vp p Vp p Memory Depth 0 1 0 2 0 5 1 2 5 5 10 20 0 25 0 5 1 25 2 5 5 10 25 2 MS on 1 channel interleaved 2 MS on 1 channel interleaved Ag Hull Seale Taput Range LMN 50 100 Vp p 50 Vp p Acquisition Time Range 50 ns to 419 seconds 250 ns to 3 355 seconds A DC Gain Accuracy lt 1 of full scale lt 0 25 of full scale Acquisition Modes Normal Average Envelope and Normal Average Envelope and SE Impedance 1 MQ 12 pF or 50 Q 1 MQ 12 pF or 50 Q o 0 Egd ivalghtime SS Equivalenttime WG Impedance Accuracy 1 1 c Coupling DC or AC DC or AC SE Offset Adjust full scale range 2 full scale range 2 TRIGGER 0 Offset Accuracy 1 offset 1 full scale 1 4200 SCP2 4200 SCP2HR oa Input Connectors BNC BNC Trigger Source Channels 1 or 2 External Channels 1 or 2 External LG Absolute Maximum Input 50 Q 25 DC 25V DC Pattern Software Pattern Software Li Absolute Maximum Input 1 MQ 210V DC 210V DC Post Trigger Delay 0 to 655 seconds 0 to 655 seconds Pre Trigger Delay 0 to waveform time 0 to waveform time
23. 2 and Version 3 chassis and upgrade them to the latest instrument backplanes displays power supplies etc It does not include a new CPU board Not compatible with Version 1 Windows NT systems 4200 Complete Refurb This upgrade service will bring any 4200 SCS chassis including Version 1 Windows NT systems up to the latest CPU and instrument capability Note 4200 Chassis Refurb and 4200 Complete Refurb restores the 4200 SCS to factory conditions including re formatting the hard drive All existing data and programs will be lost Be sure to create a backup of all data and projects prior to ordering either of these upgrades KEITHLEY MEASURE OF CONFIDENCE 4200 SCS Semiconductor Characterization System Technical Data Embedded PC Policy Caution Keithley Instruments warrants the performance of the Model 4200 SCS only with the factory approved Windows Operating System and applications software pre installed on the 4200 SCS by Keithley Instruments Systems that have been modified by the addition of un approved third party application software software that is not explicitly approved and supported by Keithley Instruments are not covered under the product warranty Model 4200 SCS systems with unapproved software may need to be restored to factory approved condition before any warranty service can be performed eg calibration upgrade technical support Services provided by Keithley Instruments to restore systems to factory
24. 36 B 48 B 60 B 72 B 1 707B Switch Mainframe 1 7072 Matrix Switch Card for each 12 pins 12 4200 TRX 3 Cable for each 12 pins 1 7007 1 IEEE 488 Cable 2 7078 TRX BNC Adapter Connector Type 3 lug triax Maximum Signal Level 200V 1A Offset Current lt 1pA Rows A B Maximum Leakage 0 1pA V 3dB Bandwidth 5MHz typical Rows G H KEITHLEY MEASURE OF CONFIDENCE Wel _ m SC Ges D Y Se CN Kap E al CO SEMICONDUCTOR 65 _ m D un U i N Gar E a CO SEMICONDUCTOR 4200 SCS Semiconductor Characterization System Technical Data Accessories and Optional Instrumentation ACCESSORIES SUPPLIED WITH EVERY CHASSIS 263 ILC 3 Interlock Cable Gm 4200 KTEI x x System Software and Manuals CD TL 22 General Tool Kit TL 24 SMA Torque Wrench ACCESSORIES SUPPLIED WITH DC SMUs 4200 MTRX 2 Ultra Low Noise SMU Triax Cable Two supplied for each SMU 2m 6 6 ft Not included with SMUs configured with a 4200 PA Remote PreAmp 4200 RPC 2 Remote PreAmp Cable One supplied for each PreAmp 2m 6 6 ft 4200 TRX 2 Ultra Low Noise PreAmp Triax Cable 2m 6 6 ft Two supplied for Ground Unit Two supplied in replacement of 4200 MTRX 2 cables for each SMU configured with a 4200 PA Line Cord NEMA 5 15P for 100 115VAC or CEE 7 7 Continental European for 240VAC User Manual User Manual and Reference Manual supplied
25. EQUENCES 6 512 0 01 200 ps typical MAX NUMBER OF SEQUENCE LOOPS 10 Period Range 20 ns to1s 120 ns to 1s 100 ns to 1s 280 ns to Is TIME PER SEGMENT 20ns to 40s Pulse Width Range 10 ns to Period 10 ns 60 ns to Period 10 ns 50 ns to Period 10 ns 140 ns to Period 10 ns bhaoi PARAMETERS FOR EACH SEGMENT tart Accuracy 1 200 ps 1 200 ps 1 5 ns 1 5 ns Se y Programmable Duration ae 10 ns to 33 ms 20 ns to 33 ms 30 ns to 33 ms 100 ns to 33 ms Transition Time 0 100 Measurement window PMU or PMU RPM only Transition Slew Rate 1 1 1 1 Measurement type PMU or PMU RPM only Accuracy transitions gt 100 ns transitions gt 100 ns Solid State Relay Open Close Time 25 us 25 us CURRENT MEASUREMENT 4225 PMU Only 10 V Range Current Measure Ranges 10 mA 200 mA 100 uA Accuracy DC 0 25 100 uA 0 25 250 uA 0 25 1 uA 4225 RPM CURRENT MEASUREMENT 10 V Range Current Measure Ranges 100 nA 1 uA 10 uA 100 uA Accuracy DC 0 5 1nA 0 5 1nA 0 5 30nA 0 5 100 nA 0 5 1 uA transitions gt 1 us 25 us 0 5 100 uA t iti gt 100 ee nS RMS JITTER SEGMENT 0 01 200 ps typical 25 us VOLTAGE SOURCE ABSOLUTE BEST PERFORMANCE When used only as a voltage source that is without measure ments of voltage or current the Model 4225 PMU can actually exceed the level of performance listed in these specifications
26. GREATER MEASURE OF CONFIDENCE Wel _ 6 m cles D un U Sc N Kap E a CO 4200 SCS Semiconductor Characterization System Technical Data Specifications are subject to change without notice All Keithley trademarks and trade names are the property of Keithley Instruments Inc All other trademarks and trade names are the property of their respective companies KEITAHLEY A GREATER MEASURE OF CONFIDENCE KEITHLEY INSTRUMENTS INC IM 28775 AURORA RD BR CLEVELAND OH 44139 1891 M 440 248 0400 BR Fax 440 248 6168 Ml 1 888 KEITHLEY BR www keithley com BELGIUM Sint Pieters Leeuw Ph 02 3630040 Fax 02 3630064 info keithley nl Ph 65 6747 9077 Fax 65 6747 299 sea keithley com www keithley com CHINA Beijing Ph 86 10 8447 5556 Fax 86 10 8225 5018 china keithley com Ph 044 8219444 Fax 044 820308 1 info keithley ch www keithley ch Copyright 2011 Keithley Instruments Inc FRANCE Saint Aubin Ph 01 64532020 Fax 01 60117726 info keithley fr Ph 886 3 572 9077 Fax 886 3 572 903 1 info_tw keithley com www keithley com tw Printed in the U S A GERMANY Germering Ph 089 84930740 Fax 089 84930734 info keithley de Ph 0118 9297500 Fax 0118 9297519 info keithley co uk www keithley co uk No 2199 INDIA Bangalore Ph 080 26771071 72 73 Fax 080 26771076 support_india keithley com www keithley nl www keithley com cn www keithley
27. KEITHLEY us only www keithley com A CREATER C V Projects CVU BJT Measures capacitance at OV bias between terminals including Che Che and Cec CVU_Capacitor Performs both a C V sweep and a C f sweep on a Metal Insulator Metal MIM capacitor and calculates standard deviation CVU _highV Performs C V and CT sweeps using the Model 4200 CVU PWR C V Power Package up to 400V CVU_InterconnectCap Measures C V of small interconnect capacitance on wafer CVU_ivcvswitch Demonstrates using DC SMUs 4210 CVU and 707B 708B switch matrix in one project Switches back and forth between DC and C V tests and connections to the DUT CVU_Lifetime Determines generation velocity and lifetime testing Zerbst plot of MOS capacitors CVU MobilelIon Determines mobile charge using the bias temperature stress method Extracts flatband voltage Includes built in control of a hot chuck to test a sample at room temperature heated then tested again at room temperature to determine flatband shift CVU_MOScap Measures C V on a MOS capacitor Extracted parameters include oxide capacitance oxide thickness doping density depletion depth Debye length flatband capacitance flatband voltage bulk potential threshold voltage metal semiconductor work function difference and effective oxide charge CVU_MOSFET Makes a C V sweep on a MOSFET device Extracted calculated parameters include oxide thickness oxide capacitance flatband
28. MINIMUM TRANSITION TIME 5 6 20ns NOISE 5 7 Im SETTLING TIME Sp 100ns NOTES 1 Performance at the triax output connectors of the 4225 RPM when using a 2m RPM interconnect cable between the 4225 PMU and 4225 RPM Remote Pulse Measure unit 100mV to 10V Typical with transition time of 100ns 0 100 Recommended minimum pulse width Settling time 0 75 Typical values into an open Recommended rise fall time to minimize overshoot RMS noise measured over the Recommended Minimum Measure Window for the given voltage or current range typical Time necessary for the signal to settle to the DC accuracy level Example the 10mA measurement range s settling time refers to the period required for the signal to settle to within 0 35 of the final value Calculated as Accuracy 0 25 10uA 0 25 10WA 10mA 0 25 0 1 0 35 O AE bh Lu bo All specifications apply at 23 5 C within one year of calibration RH between 5 and 60 after 30 minutes of warmup KEITHLEY A GREATER MEASURE OF CONFIDENCE 5 _ ar SC Ges D Y U oh N Kap E al CO SEMICONDUCTOR 11 4200 SCS Semiconductor Characterization System Technical Data 4200 SCP2 1 25GS Dual Channel Oscilloscope Card and 4200 SCP2HR 200MS Dual Channel Oscilloscope Card Specifications ANALOG INPUT ANALOG TO DIGITAL CONVERTER 4200 SCP2 4200 SCP2HR 4200 SCP2 4200 SCP2HR No of Channels 2
29. POS First Position FIRSTPOS Last Position LASTPOS Sub Array SUBARRAY return a specified number of points INDEX Formulator Constants The Formulator supports user supplied constants for use in parameter extractions These constants are factory installed PI 3 14159 rad T K 1 38065 x 10 3 J K Boltmann s constant Q 1 60218 x 10 C Charge of electron Mo 9 10938 x 10 kg Electron mass Ey 1 60218 x 10 J Electron voltage Uy 1 25664 x 10 6 N A Permeability Eo 8 85419 x 10 F m Permittivity of a vacuum H 6 62607 x 10 4 J s Planck s constant C 2 99792 x 10 8 m s Speed of light KT Q 0 02568 V Thermal voltage KEITHLEY A GREATER MEASURE OF CONFIDENCE 4200 SCS Semiconductor Characterization System Technical Data Sheet Tab Data Viewing and Analysis The Sheet Tab of a test module captures data from a test execution and allows calculations in a spreadsheet The Sheet Tab operates like an Excel workbook with the following spreadsheets Data Calc Settings and Append eum E E e SC ez 8 1 1 i oi Ze Care LBE Tie SE G MIKEN 3 Gan SS aoe WER TER ane mg a Orue ie one oe Ge Z Kin J E 3 i i E a WA Vi T d t id it o 9 H Ei CG AN Ta Wel _ D GC S Ges D Y UO me N Kap E 5 CO D Data Sheet The Data sheet displays test results in real time It is read only so t
30. SMUs and PAs Before and after data reports compliant with ANSI NCSL Z540 1 Does not cover Scope or Pulse Generator Cards 4200 5Y CAL 5 calibrations within 5 years of purchase of the base 4200 SCS including all SMUs and PAs Before and after data reports compliant with ANSI NCSL Z540 1 Does not cover Scope or Pulse Generator Cards Oscilliscope Option 4200 SCP2 3Y EW 1 year factory warranty on the 4200 SCS Scope Card Standard or HR version extended to 3 years from date of shipment Includes calibration and return shipping Requires purchase of 4200 3Y EW 4200 SCP2 5Y EW 1 year factory warranty on the 4200 SCS Scope Card Standard or HR version extended to 5 years from date of shipment Includes calibration and return shipping Requires purchase of 4200 5Y EW KEITHLEY MEASURE OF CONFIDENCE Wel _ m Ges D Y U th N Kap E al CO SEMICONDUCTOR 65 _ 6 en c os D da U a N Kap E a CO SEMICONDUCTOR 4200 SCS Semiconductor Characterization System Technical Data Support Contracts Off Site Services Oscilliscope Option continued 4200 SCP2 3Y CAL 3 calibrations within 3 years of purchase of the 4200 SCS Scope Card Standard or HR version Requires purchase of 4200 3Y CAL 4200 SCP2 5Y CAL 5 calibrations within 5 years of purchase of the 4200 SCS Scope Card Standard or HR version Requires purchase of 42
31. TYPICAL PERFORMANCE CHARACTERISTICS MEASUREMENT PARAMETERS Cp Gp DCV timestamp RANGING IpF to InF MEASUREMENT TERMINALS 2 wire SMA with BNC adapters TEST SIGNAL 100kHz to 10MHz 10mV to 100mV DC VOLTAGE SOURCE 200V with 5mV resolution DC CURRENT 100mA or 300mA maximum TYPICAL CP ACCURACY 1MHz 1 0 DC CURRENT SENSITIVITY 10nA V SMU BIAS TERMINALS SUPPORTED 4 KEITHLEY A GREATER MEASURE OF CONFIDENCE 4200 SCS Semiconductor Characterization System Technical Data 4225 PMU 4225 RPM and 4220 PGU Specifications TYPICAL PERFORMANCE WINDOW The 4225 PMU represents a new generation of ultra fast LN measurement capability Because measurement speed is integrally linked to settling time accuracy resolution and noise the fol lowing chart was created to illustrate the typical measurement performance that can be achieved TYPICAL MAXIMUM VOLTAGE AND CURRENT 4225 PMU and 4220 PGU 10V Range 40V Range mone EE Resistance Maximum Maximum Maximum Maximum This chart is neither the maximum best performance nor a guaranteed specification it is simply intended to offer users an indication of the performance achievable with this new module The 1 Q 0 196 V 196 mA 0 784 V 784 mA timing parameters below are the suggested minimums for the measurement type These suggested 5 Q 0 909 V 182 mA 3 64 V 727 mA values do not include settling time for the interconnect or the device unde
32. Test Module The Definition Tab of an ITM provides a point and click interface for setting test input parameters that control the 4200 SCS SMUs and defining parameter extractions Two modes are available 65 _ Ar es D Y U ti CN Kap E a CO Sweep Mode Forcing Common Voltage Bias Current Bias VMU Voltage Sweep Current Sweep Functions Voltage Step Current Step Voltage List Sweep Current List Sweep Open C V Differential Bias C V Frequency Sweep Pulsed I V Waveform Measuring Precision DC I V SMU Measure voltage current and timestamp up to 4096 Functions points per SMU C V AC Impedance Cp Gp Cs Rs Cp D Cs D R jX Z theta DCV frequency timestamp up to 4096 points per sweep Ultra Fast I V Voltage and current spot mean simultaneously in Pulsed I V mode voltage current and time digitized simultaneously in Waveform Capture mode up to 1 million digitized points SEMICONDUCTOR 1 888 KEITHLEY us only KEITHLEY www keithley com A GREATER MEASURE OF CONFIDENCE 4200 SCS Interactive Test Modules ITM are built from three different major functions Definition Sheet and Graph The Definition Tab allows the operator to define a sweep or sampling mode test using a graphical approach The Sheet Tab stores acquired data and provides an Excel like workbook for viewing and analyzing test results The Graph Tab provides a full featured data plotting tool capab
33. The waveforms can be predefined or custom These projects also offer three types of DUT setups NAND NOR and switch based Flash NOR Flash NAND Flash Switch These projects provide the ability to send n pulses to the DUT then perform a Vr sweep The tests in these projects support four and eight terminal testing and allow investigation into program and erase state dependencies on pulse parameters using three types of waveforms program erase and fast program erase Flash Switch also includes automatic control of Keithley s Model 707B or Model 708B Switch Matrix FlashDisturb NOR FlashDisturb NAND FlashDisturb Switch The Disturb tests pulse stress a device in an array test structure then perform a measurement such as Vy on a device adjacent to the pulsed device The goal is to measure the amount of Vy shift in adjacent cells either in the programmed or erased states when a nearby device is pulsed with either program erase or program erase waveforms FlashDisturb Switch also includes automatic control of Keithley s Model 707B or Model 708B Switch Matrix FlashEndurance NOR FlashEndurance NAND FlashEndurance Switch These projects pulse stress the DUT with a number of Program Erase waveform cycles then periodically measure the Vr The purpose of these projects is to determine the lifetime of the DUT based on the number of program erase cycles withstood by the device before a certain amount of shift or degradation in the
34. Trigger Hold Off Range 0 to 655 seconds 0 to 655 seconds Trigger Modes Edge or Pulse Width Edge or Pulse Width En Edge Trigger Mode Rising or Falling Edge Rising or Falling Edge I Pulse Width Range 20ns to 655 seconds 20ns to 655 seconds 10ns resolution 10ns resolution E TTL Compatible TTL Compatible 10 kQ input impedance 10 kQ input impedance Connector SMB SMB OPTIONAL SCOPE PROBE 4200 SCP2 ACC BANDWIDTH 70MHz 4200 SCP2 15MHz 4200 SCP2HR ATTENUATION 1x MAX DC 300V DC rated LOADING 100pF and 1MQ LENGTH 1m CONNECTOR BNC NOTES 1 Inputs are referenced to 4200 chassis ground All specifications apply at 23 5 C within 1 year of calibration RH between 5 and 60 after 30 minutes of warmup c O ken e m Z O H un 1 888 KEITHLE Y us only KEITHLEY www keithley com A GREATER MEASURE OF CONFIDENCE 4200 SCS 1 888 KEITHLEY uss only www keithley com Semiconductor Characterization System Technical Data KTE Interactive Software Tools KTE Interactive includes a variety of software tools for operating and maintaining the 4200 SCS e Keithley Interactive Test Environment KITE The 4200 SCS device characterization application e Keithley User Library Tool KULT Allows test engineers to integrate custom algorithms into KITE using 4200 SCS or external instruments Requires optional Model 4200 COMPILER Keithley Configuration Utility KCON Allows test engineers to d
35. VS This project uses the Keithley System 82 to perform an STVS Simultaneous Triangular Voltage Sweep measurement at high temperature Mobile ion density is extracted Miscellaneous Projects FourPtProbe This project enables users to make four point collinear probe measurements on semiconductor materials ivswitch The ivswitch project integrates control of a Keithley Model 707B or Model 708B external switch matrix with device testing probesites The probesites project illustrates how KITE controls semi automatic probe stations for automated probing of one subsite per site on a single wafer probesubsites The probesubsites project illustrates how KITE controls semi automatic probe stations when testing multiple subsites per site on a single wafer vdp_ resistivity This project enables users to make Van der Pauw measurements on semiconductor materials LowCurrent This project demonstrates sub 10fA performance on four SMUs Demonstration Projects Demo Default The tests in this project demonstrate the most common DC tests on an FET Also new features that were recently introduced are demonstrated including pulse SMU dual sweep and selecting Engineering labels for the axes Demo ALL This project collects more than 400 different test libraries in one convenient location 1 888 KEITHLEY v s only www keithley com A GREATER Automation Test Sequencing The Keithley Interactive Test Environment KITE provides
36. Vy or other measurement They also control in line solid state relays for the erase waveform cycle FlashEndurance Switch also includes automatic control of Keithley s Model 707B or Model 708B Switch Matrix PMU Flash NAND Demonstrates the FLASH memory testing capabilities of the Model 4225 PMU PRAM Tests a Phase Change Random Access Memory PRAM or PCRAM device using the Model 4225 PMU Includes set reset I V and RI tests RRAM Tests Resistive Random Access Memory RRAM Memristor devices using the Model 4225 PMU Includes conditioning set reset I V and other tests 1 888 KEITHLEY v s only www keithley com A GREATER CMOS Project CMOS default The tests in this project include the most common CMOS device tests that a typical user might perform on a daily basis BJT Project BJT default The tests in this project represent the most common BJT tests that a typical user might perform on a daily basis Reliability Projects EM_const_I Tests electromigration using constant current It also controls a hot chuck HCI 1 DUT This is a Hot Carrier Injection HCI project on one 4 terminal N MOSFET No switch matrix is involved in the measurement Parameters monitored between two successive stresses include Ipoft Ipon IG Vr and Gm Those parameters are measured on both forward normal operation condition and reverse reverse source and drain bias conditions If only a subset of these parameters is needed it
37. able effects like parasitic capacitance and leakage currents which provides more accurate low level measurements An optional vacuum Model 4200 VAC BASE or magnetic Model The Model 4225 RPM Remote Amplifier Switch can be mounted close 4200 MAG BASE platen mounting base allows the PreAmp to to the probe needles to reduce the cable effects when performing be located next to manipulators on the chuck platen eliminating pulse or other ultra fast I V measurements measurement problems caused by long cable lengths when performing ultra low current measurements If platen space is not available the triax mounting bracket Model 4200 TMB allows users to locate the DC PreAmp on dual triaxial connectors that may already be installed for HP4156 Kelvin triax cables This mounting option reduces problems caused by long cables without occupying platen space 1 888 KEITHLEY us only KEITHLEY www keithley com A GREATER MEASURE OF CONFIDENCE 4200 SCS Semiconductor Characterization System Technical Data 4200 SCS Accessories Model 4200 CASE Transport case Model 4200 CAB XXX Model 4200 CART Cabinet Roll around cart Model 4200 KEY RM Keyboard rack mount Each Model 4220 SCS chassis can accommodate up to four Model 4225 PMU modules to provide up to eight ultra fast source and measure channels Pictured are four 4225 RPM modules connected to a 4 pin prober c O Q el Z O H un 1 888 KEITHLE Y uss only A
38. approved condition will be treated as out of warranty services with associated time and material charges Approved software is listed in the Reference Manual and under Approved Third Party Software on page 25 of this document CAUTION DO NOT reinstall or upgrade the Windows operating system OS on any Model 4200 SCS This action should only be performed at an authorized Keithley service facility Violation of this precaution will void the Model 4200 SCS warranty and may render the Model 4200 SCS unusable Any attempt to reinstall or upgrade the Windows operating system will require a return to factory repair and will be treated as an out of warranty service including time and material charges 1 888 KEITHLEY uss only www keithley com GREATER Warranty Information Warranty Summary This section summarizes the warranties of the 4200 SCS For complete warranty information refer to the 4200 SCS Reference Manual Any portion of the product that is not manufactured by Keithley is not covered by this warranty and Keithley will have no duty to enforce any other manufacturer s warranties Hardware Warranty Keithley Instruments Inc warrants the Keithley manufactured portion of the hardware for a period of one year from defects in materials or workmanship provided that such defect has not been caused by use of the Keithley hardware which is not in accordance with the hardware instructions The warranty does not apply upon
39. ator The Model 4220 PGU Dual Channel Pulse Generator provides dual channel pulsing with voltage pulses as high as 40V and down to 20ns pulse width In addition to the pulse capability the 4200 PGU offers linear arbitrary waveform ARB and segment ARB patent pending sweeps Remote Amplifier Switch The low current measurement capability of the Model 4225 PMU can be extended by adding the optional Model 4225 RPM Remote Amplifier Switch The RPM effectively adds three lower current ranges to any channel of the 4225 PMU Ultra Fast I V module The RPM is fully integrated into the system software so to the user it simply looks like three additional low current ranges Additionally the RPM acts as a multiplexer switch allowing users to automatically switch between precision DC SMUs the CVU or the Ultra Fast I V modules Oscilloscope The system supports two dual channel integrated digital oscilloscope options the Model 4200 SCP2 offers 8 bit resolution with a sample rate up to 2 5 gigasamples second while the Model 4200 SCP2HR provides 16 bit resolution and a sample rate up to 400 megasamples second Both can be programmed for automated measurement and data acquisition or used with the stand alone GUI application provided to perform traditional oscilloscope tasks They provide measurements in both the time frequency rise fall time and voltage domains amplitude peak peak etc KEITHLEY A GREATER MEASURE OF
40. capacitance flatband voltage threshold voltage and doping concentration as a function of depletion depth CVU_nanowire Makes a C V sweep on a two terminal nanowire device CVU_PNjunction Measures the capacitance of a p n junction or Schottky diode as a function of the DC bias voltage across the device CVU_PVcell Measures both forward and reverse biased DC characteristics of an illuminated solar cell and extracts parameters such as max power max current max voltage short circuit current open circuit voltage and efficiency Also performs characteristic C V and C f sweeps default Standard C V sweeps for generic MOSFETs diodes and capacitors ivcvswitch The tests in this project demonstrate the 4200 SCS s integrated I V C V switching and probing capabilities lifetime The lifetime project performs high frequency C t measurements using the Keithley System 82 on MOS capacitors The minority carrier recombination lifetime and surface velocity are extracted using a Zerbst Plot OSCV Performs Quasistatic C V using the 4200 s SMUs and PAs using the Ramp Rate method KEITHLEY MEASURE OF CONFIDENCE 4200 SCS Semiconductor Characterization System Technical Data SIMCV This project provides routines for simultaneous C V measurement using the Keithley System 82 Typical MOS device parameters such as doping profile flat band voltage threshold voltage interface trap density and band bending are extracted ST
41. dule and the 4225 RPM Remote Amplifier Switch Requires purchase of 4200 5Y CAL 4220 PGU 5Y CAL 4225 PMU 5Y EW 4225 PMU 3Y CAL 4225 PMU 5Y CAL 1 888 KEITHLEY uss only www keithley com A CREATER Value Add Services APPS SERVICE Customized applications assistance Examples include e Software services KULT UTM development and customization e Applications assistance test plan development test process optimization measurement troubleshooting e System development integration of a 4200 SCS with other elements of a test system such as a switch matrix or a C V meter Training services are available Please contact Keithley for information Visit Keithley s Technical Support Web Forums to get answers to your product support and applications questions 24 7 Other Upgrades Besides adding the instrument modules listed on page 28 there are other upgrades available for the 4200 SCS x 4200 KTEI x x 4200 SCS Keithley Test Environment Interactive KTEI complete software test suite latest version Includes installation CD and instructions Not available for Version 1 Windows NT chassis 4200 Upgrade Required installation and calibration service when any instrument module is added to any 4200 SCS chassis Only one 4200 Upgrade required per instrument module upgrade order Not required for 4200 Chassis Refurb or the 4200 Complete Refurb 4200 Chassis Refurb This upgrade service will take Version
42. e 4200 SCP2HR High Resolution Dual Channel Integrated Oscilloscope 4200 SCP2 ACC Optional Scope Probe 4200 SMU Medium Power Source Measure Unit for 4200 SCS 100mA to 100fA 200V to 14V 2 Watt 4210 CVU Integrated C V Instrument 4210 MMPC C Multi Measurement I V CN Pulse Prober Cable Kit for the Cascade MicroTech 12000 prober series 4210 MMPC S Multi Measurement I V CN Pulse Prober Cable Kit for the Suss MicroTec PA300 prober series 4210 SMU High Power Source Measure Unit for 4200 SCS 1A to 100fA 200V to LuN 20 Watt 4220 PGU Dual Channel Pulse Generator 40V 10ns 4225 PMU Ultra Fast I V Module 40V 60ns 800mA 4225 RPM Remote Amplifier Switch for Model 4225 PMU APPLICATION PACKAGES 4200 BTI A Hardware and Software Ultra Fast Package for complete NBTI PBTI Testing KEITHLEY MEASURE OF CONFIDENCE 4200 SCS Other Optional Accessories COMPUTER OPTIONS 4200 MOUSE Microsoft Ambidextrous 2 Button Mouse Note a pointing device is integrated with the 4200 SCS keyboard REMOTE PREAMP MOUNTING ACCESSORIES 4200 MAG BASE Magnetic base for mounting 4200 PA or 4225 RPM on a prober platen 4200 TMB Triaxial mounting bracket for mounting 4200 PA on a triaxial mounting panel 4200 VAC BASE Vacuum base for mounting 4200 PA or 4225 RPM on a prober platen CABINETS AND MOUNTING ACCESSORIES 4200 CAB 25UX 25U Cabinet 44 in 4200 KEY RM 4200 RM Slide Rack Mounting Kit for standard keyboard and pointing devic
43. e Slide Rack Mounting Kit for 4200 SCS F and 4200 SCS C CONNECTORS ADAPTERS AND FIXTURES 237 BAN 3A Triax Cable Center Conductor terminated in a safety banana plug 237 BNC TRX Male BNC to 3 lug Female Triax Adapter 237 TRX BAR 3 lug Triax Barrel for use with triax interconnect 237 TRX T 3 slot Male to Dual 3 Lug Female Triax Tee Adapter 237 TRX TBC 3 lug Female Triax Bulkhead Connector 7078 TRX BNC Coaxial Connector for connecting coax instruments to a triax matrix 7078 TRX GND Male Triax to Female BNC Connector guards removed 8101 4TRX 4 pin Transistor Fixture 8101 PIV Pulse I V Demo Fixture CA 404B SMA Plug to SMA Plug RG188 2m CA 405B SMA Plug to SMA Plug RG188 6in CA 406B SMA Plug to SMA Plug RG188 13in CA 451A SMA SMA Plug RG188 4 25in CA 452A SMA SMA Plug RG188 8in CS 565 Female BNC to Female BNC Adapter CS 633 Adapter TRIAX to BNC CS 701 BNC Tee Adapter CS 1247 SMA Female to BNC Male CS 1249 SMA Female to SMB Plug CS 1251 BNC Female to SMB Plug CS 1252 SMA Male to BNC Female CS 1281 SMA Female to SMA Female CS 1382 MMBX to SMA Adapter CS 1390 TRIAX to SMA Adapter no guard CS 1391 SMA TEE Adapter female male female 1 888 KEITHLEY v s only Semiconductor Characterization System Technical Data ADDITIONAL CABLES 236 ILC 3 Interlock Cable 3m one included with each 4200 SCS 237 ALG 2 Low Noise Triax Cable 2m terminated with a 3 slot male triax connector on one end and 3 alligat
44. e testing using a 4200 SCS an HP8110A 81110A pulse generator and a switch matrix PMU DUT Examples Contains example test modules to test a MOSFET using the Model 4225 PMU PMU MOSFET Contains test modules for performing measurements on a MOSFET including generating DC and pulsed I V drain families of curves and gate voltage vs drain current measurements PMU Switch Provides examples for switching between the Model 4225 PMU 4200 SMU and 4200 CVU to the DUT PulseIV Complete This project provides PIV pulse IV tests including tests that generate Ip vs Vp graphs and Ip vs Vg graphs as well as tests that show the effect of self heating on devices due to DC voltages This is the primary sample project included in the 4200 PIV A package QPulseIV Complete This project includes PIV Q tests that generate Ip vs Vp and Ic vs Vp graphs for a FET as well as calibration routines This project is used to run characterization curves on II V and LDMOS high power devices using the pulse technique and a non zero quiescent point Solar Cell Project SolarCell This project is designed for photovoltaic cells of all types including crystalline amorphous and thin film I V CN and resistivity tests are included Nanotechnology Project NanoDevices This project is designed specifically for Nanotechnology applications and includes the most common tests for nanowires nanotubes molecular and CNT transistors and biocomponents 1 888
45. e Model 707B or 708B Switch Matrix which is designed for semiconductor research development and production applications requiring high quality high performance switching of I V and C V signals This configuration provides eight instrument inputs with up to 72 output pins at only 10fA typical offset current 4200 UL LS 12 B or 12 707B 1 708B or 707B Switch Mainframe 1 7174A Switch Card 12 4200 TRX 3 Cable for each 12 pins 1 7007 1 IEEE 488 Cable 2 7078 TRX BNC Adapter 4200 UL LS 24B 36B 48B 60B 72B 1 707B Switch Mainframe 1 7174A Switch Card for each 12 pins 12 4200 TRX 3 Cable for each 12 pins 1 7007 1 IEEE 488 Cable 2 7078 TRX BNC Adapter Connector Type 3 lug triax Maximum Signal Level 200V 2A Offset Current 100fA max 10fA typical Maximum Leakage 0 01pA V 3dB Bandwidth 30MHz typical 1 888 KEITHLEY uss only www keithley com A GREATER Low Current Local Sense Configuration 4200 LC LS XX The Low Current Local Sense switch configuration is built using the Keithley Model 7072 Semiconductor Matrix Card which is designed for semiconductor applications requiring good quality I V and C V signals The configuration provides eight instrument inputs with up to 72 output pins with less than 1pA offset current 4200 LC LS 12 B or 12 707B 1 708B or 707B Switch Mainframe 1 7072 Matrix Switch Card 12 4200 TRX 3 Cable 1 7007 1 IEEE 488 Cable 2 7078 TRX BNC Adapter 4200 LC LS 24 B
46. e rack mounted It has the same dimensions and occupies the same rack space as semiconducor parametric analyzers that may already be in use RS 232 port deen Ethernet ports Standard parallel printer port Pi sear E Low noise 4200 SCP2 Digital Oscilloscope for to network files and printers ground unit with measuring pulses and monitoring waveforms remote sense 4210 CVU Card for multi frequency C V testing Configurable with from two to nine SMUs and optional sub femtoamp Remote PreAmps Adding high power SMUs won t restrict SMU capacity c ie YW Dual channel ultra fast LV module supports SVGA monitor port pulse I V testing and other pulse applications 5 Additional USB port Use the GPIB interface to control external instruments Te or to allow external control of the 4200 SCS 1 888 KEITHLE Y us only KEITHLEY www keithley com A GREATER MEASURE OF CONFIDENCE 65 _ 6 en c os D da LU i l N Gar E a CO SEMICONDUCTOR 4200 SCS Configuration Options Semiconductor Characterization System Technical Data The 4200 SCS supports many instrument configurations that can include SMUs C V measurement units ultra fast I V modules pulse generators and oscilloscopes The standard configuration includes two medium power Source Measure Units SMUs and a Ground Unit Standard 4200 SCS Models 4200 SCS F 12 1 flat panel display 9 slot
47. e routines for Operator inputs and prompts such as the abort retry and ignore decision prompts wlrlib The wlrlib user library includes routines for performing linear regression and charge to breakdown tests Qgp on gate dielectrics Included modules are qbd_rmpv V Ramp method and gbd rmpj J Ramp method KEITHLEY MEASURE OF CONFIDENCE 4200 SCS Semiconductor Characterization System Technical Data C language Microsoft Visual Studio Professional optional Model 4200 COMPILER provides the compiler for the Keithley User Library Tool KULT Users can develop test subroutine libraries using the full capabilities of C language programming LPTLIB Control The LPTLIB provides an application programming interface for developing C language test routines that control integrated test hardware and supported external instruments and switches This simple connect source measure approach eliminates the need for low level programming and allows the user to focus on creating new test routines quickly System Configuration and Diagnostics KCON The Keithley Configuration Utility KCON simplifies programming and maintaining a fully integrated test station KCON provides a single interface for configuring external instruments switch matrices and analytical probers and for executing system diagnostics External Instrument Configuration KCON allows lab managers to integrate external instruments with the 4200 SCS and a support
48. ed switch matrix After the user configures the GPIB addresses for supported instruments Keithley supplied libraries will function and test modules can be transferred between 4200 SCS systems without any user modification In addition to the standard supported instruments the General Purpose Instrument allows users to develop subroutines and control switches for a generic two terminal or four terminal instrument For the widest possible system extensibility users can develop their own test libraries for general purpose instruments Switch Matrix Configuration Users define the connection of 4200 SCS instruments and external instruments to device under test DUT pins through a supported switch matrix configuration See Switch Matrix Support and Configurations Once connections are defined users need only enter the instrument terminal name and pin number to establish connections The 4200 SCS applications and standard user libraries manage the routing of test signals between instrument terminals and DUT pins The user doesn t need to remember and program row and column closures Test modules can transfer between 4200 SCS systems without re entering connection information 4200 SCS Instrument Diagnostics Users can confirm system integrity of SMUs C V measurement unit pulse generator oscilloscopes and Remote PreAmps by running a system self test For more complex problems the system s configuration analysis tool can generate report
49. efine the configuration of GPIB instruments switch matrices and analytical probers connected to the 4200 SCS It also provides system diagnostics functions Keithley External Control Interface KXCI The 4200 SCS application for controlling the 4200 SCS from an external computer via the GPIB bus or Ethernet KPulse A graphical user interface GUI that is a non programming alternative to configure and control the installed Model 4225 PMU or 4220 PGU pulse generator cards It is used for quick tests requiring minimal interaction with other Model 4200 SCS test resources KScope A graphical user interface GUI that provides a non programming alternative to control the system s scope card either Model 4200 SCP2HR or Model 4200 SCP2 Microsoft Windows Windows Operating System The operating system is a standard distribution of Microsoft Windows Upgrades are available for older systems Contact the Keithley factory for supported versions and service packs Data Security and Recovery Data security and recovery are handled by the included software package Acronis True Image This utility can be used to create exact hard disk images including all operating systems applications and configuration files software updates personal settings and data If failures occur that block access to information or affect system operation or if files are accidentally deleted the user can easily restore the system and lost data with the Acronis tool
50. ers with interlock controller such as the WL250 and S460SE Optional Software Automated Characterization Suite ACS for reliability testing general characterization and lab automation For more information on these capabilities refer to the ACS Systems data sheet KEITHLEY MEASURE OF CONFIDENCE Wel SC Ges D Y th CN Kap E al CO SEMICONDUCTOR 6 _ m c os D da U a N Kap E a CO SEMICONDUCTOR 4200 SCS Semiconductor Characterization System Technical Data Keithley User Library Tool KULT Requires optional Model 4200 COMPILER The Keithley User Library Tool supports creating and integrating C language subroutine libraries with the test environment User library modules are accessed in KITE through User Test Modules Factory supplied libraries provide up and running capability for supported instruments Users can edit and compile subroutines then integrate libraries of subroutines with KITE allowing the 4200 SCS to control an entire test rack from a single user interface Standard User Libraries The 4200 SCS includes the following subroutine libraries which provide out of the box integration and control of Keithley switch matrix systems and other common device characterization equipment Users access these libraries with the UTM definition tab described on page 15 chargepumping This library ca
51. fr www keithley de www keithley com 5 ITALY JAPAN KOREA MALAYSIA NETHERLANDS gt Peschiera Borromeo Mi Tokyo Seoul Penang Gorinchem Q Ph 02 5538421 Ph 81 3 5733 7555 Ph 82 2 574 7778 Ph 60 4 643 9679 Ph 0183 635333 Z Fax 02 55384228 Fax 81 3 5733 7556 Fax 82 2 574 7838 Fax 60 4 643 3794 Fax 0183 630821 e info keithley it info jp keithley com keithley keithley co kr sea keithley com info keithley nl Ie www keithley it www keithley jp www keithley co kr www keithley com www keithley nl SINGAPORE SWITZERLAND TAIWAN UNITED KINGDOM V Singapore Zurich Hsinchu Theale ES
52. ge of meas Vour 10 V to 10 V urements from nanotechnology to BTI Bias Temperature Accuracy into open load 0 5 10 mV Instability on leading edge CMOS devices Resolution lt 0 5 mV This is a single channel accessory order two Model 4225 RPMs to support the two channels of the Model 4225 PMU e Supports switching to the Model 4200 SCS s SMUs or 4210 CVU allowing for a wide range of tests without re cabling Triaxes source and sense 0 39 1 mV RMS typical 2 of amplitude 20 mV Output Connectors Baseline Noise Overshoot Pre shoot Ringing Built in bypass mode allows access to the Model 4225 PMU s higher current measurement ranges 4225 RPM REMOTE AMPLIFIER SWITCH must be used in conjunction with 4225 PMU TYPICAL MINIMUM TIMING PARAMETER FOR CURRENT MEASUREMENT Range 100 nA 1 pA 10 pA 100 pA 1 mA 10 mA Recommended Minimum Pulse Width 4 5 134 us 20 4 us 8 36 us 1 04 us 370 ns 160 ns Recommended Minimin 10 us 1 64 us 1 us 130 ns 40 ns 20 ns Measure Window 5 Accuracy DC 0 5 1nA 0 5 1nA 0 5 30nA 0 5 100nA 0 5 uA 0 5 10uA Recommended Minimum EE 1 us 360 ns 360 ns 40 ns 30 ns 20 ns Noise gt 200 pA 2nA 5 nA 50 nA 300 nA 1 5 uA Settling Time gt 8 100 us 15 us 6 us 750 ns 250 ns 100 ns VOLTAGE MEASURE MAX VOLTAGE 10V RECOMMENDED MINIMUM PULSE WIDTH gt 160ns RECOMMENDED MINIMUM MEASURE WINDOW 20ns ACCURACY DC 0 25 10mvV RECOMMENDED
53. hat results cannot be modified Calc Sheet A spreadsheet that operates much like a standard Microsoft Excel spreadsheet is available for computation with each test The spreadsheet tool supports these functions Functions in the KITE Calc sheet ABS ACOS ACOSH ASIN ASINH ATAN ATAN2 ATANH AVERAGE COS COSH EXP FIXED IF LN LOG LOGIO LOOKUP MATCH MAX MIN NOW PI PRODUCT ROUND SIGN SIN SINH SQRT STDEVP SUM SUMSQ TAN TANH VARP Settings Sheet The Settings sheet stores the test setup so that when the Sheet tab is exported as a workbook users can refer to the test configuration The test setups for multiple appends are also stored SEMICONDUCTOR 1 888 KEITHLEY us only KEITHLEY www keithley com A GREATER MEASURE OF CONFIDENCE 4200 SCS Semiconductor Characterization System Technical Data Append Sheet Append sheets store test results when the Append button is clicked Data in Append sheets can be automatically plotted on the graph Test modules support up to 40 Append sheets Graph Tab Plotting The Graph Tab is a full featured plotting tool for creating report ready graphs It allows real time X Y plotting of acquired and extracted data with one or two Y axes T V ic KA oO ba e a e Dual graphs per tab e Linear Semilog and Log Log graphs e Real time auto scaling end of test auto scaling or manual scaling Six cursors with X Y readout 0 0E 00 Graphical line fitting Plot overlay of mu
54. inimum 134 20 4 8 36 1 04 70 160 Pulse Width EE e SE E i 10V Range Max Output vs DUT Resistance Recommended Minimum 0 20 Measure Window 10us 1 64 us 1 us 130 ns 40 ns 20 ns I 0 18 Re commende o Minimum lus 360ns 360 ns 40 ns 30 ns 20 ns Transition Time 0 16 Noise 4 200 pA 2nA 5 nA 50nA 300nA 15uA bs pe Ah Settling Time gt 100 us 15 us 6us 750 ns 250 ns 100 ns 7 Ss S 0 12 E TYPICAL MINIMUM TIMING PARAMETERS FOR VOLTAGE MEASUREMENT 5 G10 4225 PMU and 4225 RPM geet 4225 PMU 4225 RPM Oo Voltage Measure Ranges 10 V 40 V 10 VY x 0 06 Recommended Minimum 50 ns 150 ns 160 ns 0 04 Pulse Width SR 0 02 Recommended Minimum 20 ns 20 ns 20 ns Measure Window 0 00 ini 1 100 10000 Recommended ie 20 ns 100 ns 20 ns Transition Time DUT Resistance Q Noise 4 2 mV 8 mV 1 mV Settling Time 5 30 ns 30 ns 100 ns NOTES FOR THE TYPICAL PERFORMANCE WINDOW SECTION 1 All typical values measured with an open circuit 2 Using default measure window of 75 to 90 of pulse top Recommended minimum pulse width Settling Time 75 3 Recommended rise fall time to minimize overshoot 4 RMS noise measured over the Recommended Minimum Measure Window for the given voltage or current range typical 5 Time necessary for the signal to settle to the DC accuracy level Example 10mA settling time on the PMU 10V range is defined when the signal is within 1 25 of the final value This calculation Accuracy 0 25 100A
55. into 50 Q lt 250 uV lt 750 uV 4 40V Range minimum programmable transition time source only is l 30ns for voltage lt 10V and 100ns for voltages gt 10V 50 Q into 1 MQ lt 0 5 mV lt 15 mV 5 For multiple 4225 PMU or 4220 PGU cards in a single 4200 SCS chassis 50 Q into 50 Q 3 20 mV 3 80 mV 6 Per channel Overshoot Pre shoot All specifications apply at 23 5 C within one year of calibration RH Ringing 50 2 into 50 2 typical between 5 and 60 after 30 minutes of warmup best case 2 20 mV 0 8 40 mV i i Baseline Noise 0 3 1 mV RMS typical 0 1 5 mV RMS typical TRIGGER Source Impedance 50 Q Nominal 50 Q Nominal TRIGGER OUTPUT IMPEDANCE 50Q eis Load 100 mA typical 400 mA typical TRIGGER OUTPUT LEVEL TTL Short Circuit Current 200 mA 800 mA eee ee aaa R SMA SMA TRIGGER IN LEVEL TTL utpu RAE S TRIGGER IN TRANSITION TIMING MAXIMUM lt 100ns Output Limit Programmable limit to protect the device under test TRIGGER IN TO PULSE OUTPUT DELAY 400 400ns TRIGGER SYNCHRONIZATION JITTER gt lt 2ns TIMING 10 V Range 10 V Range 40 V Range 40 V Range SEGMENT ARB AND TIMING Source Only with Meas Source Only with Meas Frequency Range 1 Hz to 50 MHz 1 Hz to 8 3 MHz 1 Hz to 10 MHz 1 Hz to 3 5 MHz 4220 PGU 4225 PMU w w o 4225 RPM Timing Resolution 10 ns 10 ns 10 ns 10 ns MAX NUMBER OF SEGMENTS E RMS Jitter period width 0 01 200 ps 0 01 200 ps 0 01 200 ps MAX NUMBER OF S
56. ipulator 4210 MMPC S Multi measurement cable set for SUSS MicroTec probers Requires one set per manipulator 7007 1 Double Shielded IEEE 488 Cable 1m 7007 2 Double Shielded IEEE 488 Cable 2m CA 19 2 RG 58 Coax Cable 50Q 1 5m CA 426B TRIAX to SSMC Cable Assembly CA 446A SMA Cable 100Q 3m CA 447A SMA Cable male to male 100Q 1 5m OTHER ACCESSORIES 4200 CART Roll around Cart for 4200 SCS 4200 CASE Transport Case for 4200 SCS 4200 MAN Printed Manual Set for 4200 SCS Manual on CD ROM is included in Base Unit 4200 Q STBL KIT Stabilization Kit for 4200 PIV Q NOTES 1 4200 MAG BASE is included with 4225 RPM 2 All 4200 SCS systems and instrument options are supplied with required cables 2m length www keithley com GREATER KEITHLEY MEASURE OF CONFIDENCE 5 _ m 2 Ges D Y to N Kap E al CO SEMICONDUCTOR 65 6 m E D un U i N Gar E a CO SEMICONDUCTOR 4200 SCS Semiconductor Characterization System Technical Data PreAmp Mounting and Cabling y It s easy to connect the Model DC PreAmps can be mounted on the probe station with either a platen base 4200 SCS to a probe station or a or a triax mounting bracket By reducing the signal path between the DUT and switch matrix with standard triax the PreAmp from several feet to a fraction of an inch the Model 4200 SCS can cables eliminate c
57. le of producing report ready graphs The Status Tab reports any errors that would interfere with test execution Semiconductor Characterization System Technical Data Sampling Mode Precision DC I V or C V Linear sampling at fixed voltage current or frequency Up to 4096 points Programmable hold time and interval time from 1ms to 1000s Ultra Fast I V Simultaneous 14 bit Sans to 1ms sampling of voltage and current on up to 8 channels with lt 3ns synchronization 4096 data points on every channel Up to 1 million data points per channel in UTM mode Definition Sheet Graph Status i Timing Exit Conditions Output Values Speed Normal v Mode E Dram SMU2 e FORCE MEASURE Sweep VM Master Measure YES Type Linear Ltd uto 12 0104 Start OV Measure V YES Stop DV Range V Best Fixed Step DIV Compl 0 14 Points 51 SMU3 e FORCE MEASURE Step V Master Measure NO Stark 2V Measure V YES Stop DV Range Best Fixed Step 1 Compl 0 14 Points 4 Measure Y NA LE vds id 1 1 Definition Tab User Test Module The Definition Tab of a UTM presents users a tabular fill in the blank interface for entering input parameters to call a C language subroutine UTMs provide the ability to control internal SMUs and GPIB and RS 232 devices This screen allows the user to select a user library a subroutine module and then enter the desired input parameters Test results are returned to the Sheet Tab f
58. ltiple test executions Drain Yoltage CV Four data variable readouts User formatted comment box title and axis labels 65 _ 6 Ca c os D N U a N Kap E 5 CO Choice of engineering units on axes V volts A amps s seconds Output S Siemens F farads Hz Hertz Files Choice of engineering symbols on axes m x n etc e Sheet tab test results can be saved as a Microsoft Excel Workbook or a delimited ASCII text file s Plots can be saved as bit map image bmp JPEG jpg or TIFF tif files Display e Flat Panel 1024 X 768 resolution e External SVGA Up to 1920 X 1200 resolution Printers Windows printer drivers are used to support a wide variety of print and plot devices SEMICONDUCTOR 1 888 KEITHLEY us only KEITHLEY www keithley com A GREATER MEASURE OF CONFIDENCE 4200 SCS Semiconductor Characterization System Technical Data Example Projects The 4200 SCS includes the following KITE projects to facilitate rapid startup and provide examples for common semiconductor lab applications Default Project Default The default project includes standard tests for MOSFETs BIPOLAR transistors resistors and diodes This project helps users get started quickly Memory Projects These projects test floating gate FLASH and embedded NVM memory They test up to four independent multi level pulse channels with up to 40V pulsing on the gate
59. lution To get a complete picture of any device or material three fundamental electrical measurement techniques are required The Model 4200 SCS offers all three e Precision DC Current Voltage I V measurements are the foundation of a full characterization plan e AC Impedance including the well known Capacitance Voltage C V technique provides information beyond what DC alone can provide e Pulsed and transient testing adds a time domain dimension and allows for dynamic characteristics to be explored The 4200 SCS is modular configurable and upgradeable This allows it to precisely meet today s measurement needs and to expand to meet tomorrow s Four core measurement modules can be mixed and matched in the nine instrument slots Up to nine precision DC Source Measure units can supply voltage or current and measure voltage or current from 0 1fA to 1A and from 1 to 210V AC Impedance testing is easy with the Model 4210 CVU Multi Frequency C V Module at test frequencies from 1kHz to 10MHz Capacitance from aF to uF can be measured Pulse and transient measurements can be performed with the Model 4225 PMU Ultra Fast I V module This module has two independent voltage sources that can slew the voltage at 1V ns while simultaneously measuring both the voltage and the current When multiple modules are installed they are internally synchronized to less than 3ns A choice of two different digital oscilloscope modules makes digi
60. mote location such as in a light tight enclosure or on the prober platen to eliminate measurement problems due to long cables Platen mounts and triax panel mount accessories are available 1 888 KEITHLEY us only www keithley com MAXIMUM MAXIMUM CURRENT POWER 100mA 2W 1A 20W Remote PreAmps are installed at the factory in numerical order i e SMU1 SMU2 SMU3 up to the number of PreAmps specified Capacitance Voltage Instrument C V measurements are now as easy to perform as I V measurements with the integrated C V instrument the Model 4210 CVU This optional capacitance voltage instrument performs capacitance measurements from femtofarads fF to microfarads uF at frequencies from 1kHz to 10MHz It also supplies diagnostic tools that ensure the validity of your C V test results With this system you can configure linear or custom CN CL and C t sweeps with up to 4096 data points In addition through the open environment of the 4200 SCS you can modify any of the included tests Ultra Fast I V Module Perform ultra fast transient I V measurements with the Model 4225 PMU It provides ultra fast voltage waveform generation and signal observation on its two channels of integrated sourcing and measurement Each channel combines high speed voltage outputs including pulse widths from 60ns to DC with simultaneous current and voltage measurements at a sample rate of up to 200 megasamples second Pulse Gener
61. n be used to study charge trapping and new charge creation on a high Si interface and within high x film hotchuck temptronics 3010b This user library controls the temperature of Temptronics 3010b hotchucks This library sets the target temperature and waits until the target is reached before exiting hotchuck_triotek The hotchuck_triotek user library controls the temperature of TrioTek hot chucks This library sets the target temperature and waits until the target is reached before exiting hp4284ulib The hp4284ulib user library performs capacitance measurements and C V sweeps using the Agilent 4284A or 4980 LCR meter hp4294ulib The hp4294ulib user library performs capacitance measurements C V sweeps and frequency sweeps using the Agilent 4294 LCR meter This library also includes calibration routines to perform phase open short and load calibrations bp8110ulib The hp8110ulib user library performs initialization setup and triggering for the Agilent HP8110A or 81110A pulse generator ki42xxulib The ki42xxulib user library provides an example subroutine for performing a MOSFET ON resistance Ron test routine using the 4200 SCS LPTLIB interface Ri82ulib The ki82ulib user library performs simultaneous CN C t and Q t measurements and cable compensation for the Keithley System 82 Simultaneous C V System 1 888 KEITHLEY uss only www keithley com A CREATER ki340xulib For use with Keithley Series 3400
62. nformation 4 Integration time 1s or 10s below 10kHz Test signal level 30mV rms At the rear panel of the 4210 CVU All specifications apply at 23 C 5 C within one year of calibration RH between 5 and 60 after 30 minutes of warmup SUPPLEMENTAL CABLE SPECIFICATION 5 4210 CVU Typical C Accuracy with 1 5m Cables supplemental Measured Capacitance 1kHz 10kHz 100kHz 1MHz 10MHz 1 pF NA 8 38 1 95 0 43 NA 10 pF N A 0 94 0 21 0 18 1 100 pF NA 0 29 0 20 0 15 1 1 nF 0 72 0 17 0 12 0 16 2 10 nF 0 28 0 12 0 13 0 25 2 100 nF 0 12 0 13 0 22 1 14 MA 1 uF 0 17 0 21 N A N A N A 4210 CVU Typical C Accuracy with 3m Cables supplemental Measured Capacitance 1kHz 10kHz 100kHz 1MHz 10MHz 1 pF NA 8 5 2 05 0 57 N A 10 pF N A 0 96 0 23 0 21 1 100 pF NA 0 29 0 20 0 17 1 1 nF SE e 10 nF 0 28 30 12 0 13 0 27 42 100 nF 0 12 0 13 0 22 1 16 N A 1 uF 0 17 0 21 NA N A N A CVU CONFIDENCE CHECK The 4210 CVU includes a diagnostic tool called Confidence Check It allows users to check the integrity of open and short connections and connections to a device under test DUT When the Model 4210 CVU is connected to a DUT Confidence Check displays the measured readings in real time This also allows Confidence Check to be used as a C V meter to perform quick and accurate measurements Model 4200 CVU Power Specifications C V POWER PACKAGE
63. or clips on the other 4200 MTRX 1 Ultra Low Noise SMU Triax Cable 1m Mini Triax Triax connects 4200 SMUs to a test fixture 4200 MTRX 2 Ultra Low Noise SMU Triax Cable 2m Mini Triax Triax connects 4200 SMUs to a test fixture two included with each 4200 SMU that is not configured with a Remote PreAmp 4200 MTRX 3 Ultra Low Noise SMU Triax Cable 3m Mini Triax Triax connects 4200 SMUs to a test fixture 4200 PRB C SSMC to SMA Cable with local ground 4200 PRB C SMA SMA to SMA Y cable 6 in 15 cm 4200 PRB C SMB SMA to SMB Y cable 6 in 15 cm 4200 RPC 0 3 Remote PreAmp Cable 0 4m for use inside prober shield 4200 RPC 2 Remote PreAmp Cable 2m for remote location of 4200 PA one included with each 4200 PA 4200 RPC 3 Remote PreAmp Cable 3m for remote location of 4200 PA 4200 RPC 6 Remote PreAmp Cable 6m for remote location of 4200 PA 4200 TRX 0 3 Ultra Low Noise PreAmp Triax Cable 0 4m Triax Triax connects 4200 PA to a test fixture recommended for remote location of the 4200 PA 4200 TRX 1 Ultra Low Noise PreAmp Triax Cable 1m Triax Triax connects 4200 PA to a test fixture 4200 TRX 2 Ultra Low Noise PreAmp Triax Cable 2m Triax Triax connects 4200 PA to a test fixture two included with each 4200 PA 4200 TRX 3 Ultra Low Noise PreAmp Triax Cable 3m Triax Triax connects 4200 PA to a test fixture 4210 MMPC C Multi measurement cable set for Cascade Microtech probers Requires one set per man
64. or viewing and analysis Select UTMs have a GUI interface to simplify operation Sarkan iji Goats Stem i FES Cuas Ven ie baken bz pen Les T mM W w a i i Si be pega mi s aert RTE es rafe Ara man Ua Moon barm ib mmi limi im ugg do bim imda ng eet Fee op The User Test Module UTM has virtually identical functionality as the f Ke e ni ie kt a tie te id S313 4 e ci ig cis am Pine ie fy Se i le ms H KSC Par Ao GUI to control switch matrix UTMs ITM However users enter input parameters in a tabular interface in the UTM s Definition Tab 1 888 KEITHLEY uss only www keithley com KEITHLEY A GREATER MEASURE OF CONFIDENCE 5 _ D e 2 Ges D un LU Se CN Kap E al CO SEMICONDUCTOR 65 _ e c os D Y U SR N Kap E a CO SEMICONDUCTOR 4200 SCS 1 888 KEITHLEY v s only www keithley com Semiconductor Characterization System Technical Data Data Analysis Two methods of parameter extraction are available The Formulator provides automated line fits and parameter extraction A spreadsheet offers standard spreadsheet analysis tools Many of the sample libraries include parameter extraction examples Formulator functions The Formulator performs data transformations for performing
65. parameter analysis and line fits The Formulator supports the following functions Mathematical Functions Addition subtraction division multiplication exponent absolute value ABS value at an index position AT Average AVG moving average MAVG conditional computation COND derivative DELTA differential coefficient DIFF exponential EXP square root SQRT natural logarithm LN logarithm LOG integral INTEG standard deviation STDEV moving summation SUMMV arc cosine ACOS arc sine ASIN arc tangent ATAN cosine COS sine SIN tangent TAN Conversion Functions Radians to degrees DEG degrees to radians RAD Line Fits and Parameter Extraction Functions Exponential line fit EXPFIT coefficient a EXPFITA coefficient b EXPFITB Linear Fit LINFIT linear slope LINFITSLP x intercept LINFITXINT y intercept LINFITYINT Logarithmic line fit LOGFIT coefficient a LOGFITA coefficient b LOGFITB Linear Regression line fit REGFIT slope REGFITSLP x intercept REGFITXINT y intercept REGFITYINT Tangent line fit TANFIT slope TANFITSLP x intercept TANFITXINT y intercept TANFITYINT Polynomial line fit including POLYFIT2 POLY2COEFF and POLYNFIT Maximum value MAX minimum value MIN midpoint MEDIAN Search Functions Find Down FINDD Find Up FINDU Find using linear interpolation FINDLIN Maximum position MAXPOS minimum position MIN
66. r test 10 Q 1 67 V 167 mA 6 67 V 667 mA EE 25 Q Do N 133 mA Do W 533 mA TYPICAL MINIMUM TIMING PARAMETERS FOR CURRENT MEASUREMENT 50 Q 5 00 V 100 mA 20 0 V 400 mA 4225 PMU ULTRA FAST I V MODULE with or without optional 4225 RPM Remote Amplifier Switch 100 Q Ginn 66 7 mA XF Vy 267 mA 10V Range 40V Range 250 Q 8 33 V 33 3 mA 333 V 133 mA m Current Measure Ranges 10 mA 200 mA 100 uA 10 mA 800 mA 1 KQ 952V 9 5 mA 38 1 V 38 1 mA e ee L e Minimum 160 ns 50 ns SE 570 ns 770 ns 10 kQ 995 V 995 uA 398 V 3 98 mA Recommended Minimum 6 To calculate the approximate maximum current and voltage for any resistance SE Measure Window 20 ns 20 ns 1 us 100 ns 100 ns Imax V range 50Q Resistance di E EH Oe 20 ns ie 100 ns 100 ns Vax Imax Resistance Ki Se where Resistance is the total resistance connected to the PMU or PGU channel and V range is A Noise 15 uA 50 uA 75 nA 5 uA 200 uA either 10 or 40 ch aE EE Es SE Ze 300 ns 309 ns Example 10V range using R 10Q for DUT interconnect Imax V range 50 R 10 50 10 10 60 0 167A sr TYPICAL MINIMUM TIMING PARAMETERS FOR CURRENT MEASUREMENT 8 erte um TF 4225 RPM REMOTE AMPLIFIER SWITCH RPM optional to 4225 PMU Vmax Imax R 0 167 10 1 67V 10V Range 7 Typical maximum at pulse output connector Resistance is the total resistance connected to the Current Measure Ranges 100 nA 1uA 10uA 100uA 1 mA 10 mA pulse output connector including device and interconnect Recommended M
67. s that assist Keithley s Technical Support staff in diagnosing problems 1 888 KEITHLEY v s only www keithley com A GREATER Keithley External Control Interface KXCI With KXCI you can use an external computer to control the SMUs and CVU modules in the Model 4200 SCS directly KXCI also provides you with indirect control of the Ultra fast I V and Oscilloscope modules using UTMs via either the built in GPIB or Ethernet For the SMUs the KXCI command set includes an HP 4145 compatibility mode allowing many programs already developed for the HP4145 to use the 4200 SCS instead Support Contracts Note ISO 17025 2540 3 accredited calibrations are also available for the base system Call Keithley for more information On Site Services Our field service engineers can perform some calibrations and repair services at your facility Call Keithley to ask about on site services for the 4200 SCS Off Site Services Base System 4200 3Y EW 1 year factory warranty on the base 4200 SCS including all SMUs and PAs extended to 3 years from date of shipment Includes calibration reports compliant to ANSI Z540 1 and return shipping 4200 5Y EW 1 year factory warranty on the base 4200 SCS including all SMUs and PAs extended to 5 years from date of shipment Includes calibration reports compliant to ANSI Z540 1 and return shipping 4200 3Y CAL 3 calibrations within 3 years of purchase of the base 4200 SCS including all
68. st MAXIMUM CURRENT 2 6A using dual triaxial connection 9 5A using 5 way binding posts LOAD CAPACITANCE No limit CABLE RESISTANCE FORCE lt 1Q SENSE lt 10Q RAMP RATE QUASISTATIC C V TYPICAL PERFORMANCE CHARACTERISTICS MEASUREMENT PARAMETERS Cp DCY timestamp RANGING IpF to 1nF Measurement Terminals Triaxial guarded Ramp Rate 0 1V s to 1V s DC Voltage 200V TYPICAL CP ACCURACY 5 at 1v s ramp rate 1 888 KEITHLEY us only www keithley com GENERAL TEMPERATURE RANGE Operating 10 to 40 C Storage 15 to 60 C HUMIDITY RANGE Operating 5 to 80 RH non condensing Storage 5 to 90 RH non condensing ALTITUDE Operating Storage 0 to 2000m 0 to 4600m POWER REQUIREMENTS 100V to 240V 50 to 60Hz MAXIMUM VA 1000VA REGULATORY COMPLIANCE Safety European Low Voltage Directive EMC European EMC Directive DIMENSIONS 43 6cm wide x 22 3cm high x 56 5cm deep 17 2 in x 8 in X 22 in WEIGHT approx 29 7kg 65 5 lbs for typical configuration of four SMUs I O PORTS USB SVGA Printer RS 232 GPIB Ethernet Mouse Keyboard NOTES 1 2 3 4 All ranges extend to 105 of full scale Specifications apply on these ranges with or without a 4200 PA Specified resolution is limited by fundamental noise limits Measured resolution is 67 digits on each range Source resolution is 47 digits on each range Interlock must be engaged to use the 200V range
69. tizing waveforms easy and efficient The Keithley Interactive Test Environment KITE supplies a complete graphical user interface that allows nearly any type of characterization test to be performed with no programming required Over 400 standard characterization tests are provided including those for MOSFETs BJT transistors diodes resistors capacitors solar cells carbon nanotubes and NVM memory technologies such as Flash RRAM PCRAM and others Data is stored in industry standard spreadsheet formats Any measured or calculated data can be graphed in KITE s sophisticated report ready graphing tool A GREATER MEASURE OF CONFIDENCE 4200 SCS Semiconductor Characterization System Technical Data Integrated industrial controller and additional RAM ensure high test throughput plus system robustness stability and security Store test setups and results right on the system with the high capacity fixed disk drive No sorting through disks to find the desired test Industry standard Windows based GUI minimizes set up and integration time The integrated DVD CD RW drive allows high capacity High speed high backup and data transfer precision ADC per channel eliminates performance tradeoffs Communicate quickly with a wide range of PC accessories with the built in USB interface 5 _ D 2 Ges D Y to N Kap E al CO The 4200 SCS can b
70. ubsite 0 IRE dterminal n fet 1 The project level organizes subsites and controls wafer looping execution AF iowa 1 ZE subwt L desc The device level organizes test modules manages test module libraries and controls device amp vos id test sequencing OJE win The test module level performs tests analyzes data and plots results The subsite level organizes devices and controls subsite test sequencing and stress measure looping Selectable checkboxes allow enabling disabling individual tests plans Test Modules Within KITE two types of test modules are provided to capture the test input parameters data EA analysis and plot setting for data Interactive Test Modules provide a point and click interface for G Projectview defining test input parameters and controlling the 4200 SCS SMUs User Test Modules provide a fill in the blank interface to either factory provided or user written C language subroutines These subroutines can control internal 4200 SCS instruments and or external instruments and systems through the RS 232 or GPIB interface This dual approach provides an extendable test environment that gives the users the same capabilities for data analysis plotting output and automation whether the instrument used is part of the base system or an external instrument It also offers users the flexibility to write complex test algorithms for control of either internal or external instruments Definition Tab Interactive
71. ul standard switch matrix configurations are available for the 4200 SCS Up to Each standard configuration includes all components cabling and instructions for the Optional Optional user to assemble the switch matrix and add Card 1 Card 2 Card 6 the matrix configuration to the 4200 SCS test environment Once a supported configuration 4200 Various is added to the test environment the 4200 SCS integrated standard user library matrixulib connects instruments instrument terminals to output pins through a SMU SMU w PA simple fill in the blank interface 4200 SCP2 etc 7174A or 7072 Card External C V Meter Additional Card optional Additional Card optional 4210 CVU or 4y L 65 _ m c os D N U a N Kap E al CO All switch matrix cards in a system must be Pins 1 12 Pins 13 24 Pins 61 72 of the same type i mm Model 708B Chassis 1 Card 8x12 Pins mm Model 707B Chassis 1 6 Cards Up to 8x72 Pins Basic block diagram of 4200 SCS configurations SEMICONDUCTOR 1 888 KEITHLEY us only KEITHLEY www keithley com A GREATER MEASURE OF CONFIDENCE 4200 SCS Semiconductor Characterization System Technical Data Ultra Low Current Local Sense Configuration 4200 UL LS XX The Ultra Low Current Local Sense switch configuration is built using the Keithley Model 7174A Low Current Matrix Card with th

Semiconductor Characterization System Technical Data

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