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User Manual - Excalibur Engineering

1. b 100 mA Vo lt 20 V 50 mA 20 V lt Vo lt 40 V 20 mA 40 V lt Vo Vo is the output voltage Table 2 26 Current Range Resolution and Accuracy E5287A Measurement Resolution Current Force High Force Accuracy Measurement Accuracy Maximum Range Resolution High Speed Resolution A A A A Voltage ADC DE 1 pa 1 fA 100 aA 100 aA 1 8 15E 15 4 1 8 12E 5 100 V 10pA 5fA 1 fA 1 fA 0 5 40E Vox1E 1 0 5 15E 5 Vox1E 17 100V 100pA 5fA SfA 2fA 1fAP 0 5 12E7 4 Vox1E 0 5 4E Vvox1E16 100V tind 50fA 50 fA 10fA 0 25 4E 3 Vox1E 5 0 25 3E 13 Vox1E15 100V 10nA 500fA 500fA 1OfA 0 25 4E 12 Vox1E 0 25 2E 12 Vox1E 100V 100nA SpA SpA 100fA 0 12 4E l Vox1E13 0 1 2E l Vox1E13 100V EMMA S0pA SUD IpA 0 12 4E 1 Vox1E 2 0 1 2E 0 vox1E 3 100V l0pA 500pA S00pA LOpA 0 07 4E Vox1E 0 05 2E Vox1E 100V 100pHA SnA SnA 100 pA 0 07 4E8 Vox1E 0 05 2E8 Vox1E 100V 1mA 50nA 50 nA l nA 0 06 4E7 Vox1E 0 04 2E7 Vox1E 100V 10mA 500nA 500nA 10 nA 0 06 4E9 Vox1E8 0 04 2E Vox1E 100V 100mA SpA 5 pA 100 nA 0 12 4E Vox1E7 0 1 2E Vox1E a of output measured value fixed offset in A proportional offset in A Vo is the output voltage in V b Available when the
2. 3 Press the Measltem key The measurement data is changed to the calculated power value Measured Voltage x Measured Current as shown below The following data is just an example Stat Meas Value 1 Meas Value 2 Setting Parameter Shift 2 2508 13W OUT 1 300 V Av v 2 2 CPL 100 0mA Rarotd Lock Meas igge Error Integ Output Repeal M ch S ch Agilent E5260 E5270 User s Guide Edition 5 1 7 Getting Started Step 8 Stopping source output and measurement 1 Press the On Off key The SMU2 stops source output and measurement Stat Meas Value 1 Meas Value 2 Setting Parameter Shift OFF OUT 1 500 V A v 2 2 CPL 100 0mA Ferad Lock Meas rigge Error Integ Output Repeal M ch S ch 2 Press the OutCh key repeatedly until the S ch status area displays 1 The SMU1 setup information is displayed in the Setting Parameter area Stat Meas Value 1 Meas Value 2 Setting Parameter Shift OFF OUT 0 00 V AVv 2 1 CPL 100 0mA Ramtg Lock Meas fTrigge Error Integ Output Repeat M ch S ch 3 Press the MeasCh key repeatedly until the M ch status area displays 1 The SMU1 measurement da
3. Stopping measurement Press the Single key The SMU2 stops the measurement However the source output is still effective The LCD changes the display as shown below The following data is just an example Stat Meas Value 1 Meas Value 2 Setting Parameter Shift 0 00015nA OUT 0 00 Y AV 2 2 CPL 100 0mA Remad Lock Meas Tigge Error Integ Output Repeat M ch S ch Agilent E5260 E5270 User s Guide Edition 5 1 5 Getting Started Step 5 Executing a spot measurement and starting repeat measurement 1 Press the Single key to execute the spot measurement 2 Press the Repeat key to start the repeat measurement again The LCD changes the display as shown below The following data is just an example Stat Meas Value 1 Meas Value 2 Setting Parameter Shift 0 Q0025nA OUT 0 00 V Avw 2 2 CPL 100 0mA Ferad Lock Meas Trigger Error Integ Output Repeal M ch S ch Step 6 Changing source output value during repeat measurement 1 Press the OUT Value key The cursor appears on the lowest digit of the integral part of the OUT value OUT shows the source output value 2 Press the arrow keys and set the OUT value to 1 500 V The value is applied to the output immediately Then press the Enter
4. TAZA HB B EA Zimt ICD DS BGC ARAL RNC AUER O EN alt EK MERRICK VAY AREA CWSWEAIL FHA KES SIL ERAN LEO TA CITA Output 4H LT Output 4 YY 7 A DRT LEC EBT SCE HEEE HIGH VOLTAGE 4 VVar A WTU TOA IE AMES SEL YM Fe RYZ ADOBE SO CINTLK mT BiTA TL Fae NY D SMU IBERICO ATR OIE EH ANYHEUBTAIL DIEPOPREAICM LCS AREA SIERS HET SOL PRECAUTIONS POUR COMMOTION A HAUTE TENSION Une tension dangereuse max pour HPSMU 200 Vdc max pour MPSMU 100 Vdc manant du dispositif Agilent E5260 E5270 peut tre sortie aux bornes de force d appareil de protection ou de d tection Les pr cautions suivantes doivent tre obser es contre commotion lectrique accidentelle Mettre a la terre le dispositif Agilent E5260 E5270 au moyen du cable d alimentation tripolair En cas de hors service du dispositif d essai FIXTURE Agilent 16442 connecter les bornes de verrouillage INTLK de fa on a ce que soit ouverte lorsque le couvercle de la bo te de blindage est ouvert Essayer p riodiquement le fonctionnement normal de verrouillage Avant de toucher la partie connexion a partir des bornes de force d appareil de protection et de d tection mettre hors tension le dispositif Agilent E5260 E5270 Et en cas de condensateurs connect s au circuit de mesure d charger ces condensateurs Lorsque l alimentation n est pas mi
5. Stat Meas Value 1 Meas Value 2 Setting Parameter Shift OFF OUT 0 00 V A 1 CPL 100 0uA enctd Lock Meas Trigger Error Integ Output Repeal M ch S ch Setting up SMU1 forcing DC voltage and measuring DC current 1 Press the CPL Value key A cursor appears on the lowest digit of the integral part of the CPL value The CPL shows the compliance value 2 Press the Right arrow key to move the cursor on the arithmetic point 3 Press the Up arrow key to set the CPL value to 100 mA and press the Enter key to fix the value Then press the Enter key again The cursor disappears 4 Press the On Off key The SMU1 starts voltage output 5 Press the Repeat key The SMU1 starts current measurement In the following example the measured data is just an example During the repeat measurement you may not be able to read the measured data Stat Meas Value 1 I Meas Value 2 Setting Parameter Shift 0 00020nA OUT 0 00 V Avv 1 1 CPL 100 0mA Ferad Lock Meas Trigger Error Integ Output Repeat M ch S ch The Output indicator shows that DC voltage or current is applied by the channel specified by the S ch indicator The Repeat indicator shows that the repeat measurement mode is set The Meas indicator shows that the measurement channel is performing the measurement You will see the ind
6. Specify the N value shown in the following formula Available values are 1 to 100 Initial value is 1 Integration time N power line frequency The N value means the number of power line cycles a is 1 or 2 for the 2 ch mainframe 1 2 or 8 for the 8 ch mainframe Agilent E5260 E5270 User s Guide Edition 5 4 13 OutCh OUT Value CPL Value Front Panel Reference Front Panel Key Details Output key group The Output key group is used to set up the source condition and apply the source output Reset Measure Output Edit Local Meas Meas Out Out Shift Exit Ch Range Ch Range Cal Test AD SerRes Menu Meas Single OUT On Fast Item Value Off Restore IntegTime Abort AUX On Off Filter Zero Integ Repeat CPL V I Volt Value Selects the source channel effective for the data displayed in the Setup Data area Press the OutCh key repeatedly until the desired channel number appears in the S ch status area Def Enter Value Displays the source output setting OUT and the source compliance setting CPL in the Setup Data area Then the cursor appears on the last digit of the integral part of the OUT value If the Output status indicator shows the source output ON status the source channel applies the OUT value Then if you change the OUT value the source channel changes the output value too To set the source output value see To Apply DC Current Voltage on page 5 16
7. Installation Mounting Connectors Table 3 4 Dimensions of Connector Holes Kelvin Triaxial Connector in mm 14 e 11 pe 11 14 2 8 t To CIN e 23 2 A M3 x 0 5 2 611 3 Triaxial Connector in mm 11 3 uE Interlock Connector in mm 3 22 Agilent E5260 E5270 User s Guide Edition 5 Installation Mounting Connectors A To Make an Interlock Circuit The interlock circuit is designed to prevent electrical shock when a user touches the measurement terminals CAUTION You must install an interlock circuit on a shielding box to prevent hazardous voltages when the door of the shielding box is open Figure 3 7 shows the pin assignments of the interlock connector that should be mounted on a connector plate or test fixture Figure 3 7 Interlock Connector Pin Assignments Interlock Switch Plug side View Wiring Side View WARNING Potentially hazardous voltages may be present at the Force Guard and Sense terminals when the interlock terminals are shorted Agilent E5260 E5270 User s Guide Edition 5 3 23 Figure 3 8 Installation Mounting Connectors Installing the interlock circuit Install the interlock circuit as follows 1 Mount two mechanical switches on your shielding box so that the switches close when the door of the shielding box is closed and open when the door is opened For the dimensions of the switch see Fi
8. In local mode the Agilent E5260 E5270 just applies DC voltage or current and then measures DC voltage or current like the high speed spot measurement 5 2 Agilent E5260 E5270 User s Guide Edition 5 Front Panel Operations Available Functions Available Functions Table 5 1 lists the typical functions of the Agilent E5260 E5270 Table 5 1 Typical Functions Operating Condition Mode Function Local Remote To use multiple source channels Available Available To use multiple measurement channels Not available Available To apply DC voltage or DC current Available Available To apply DC voltage and measure DC current Available Available To apply DC current and measure DC voltage Available Available To apply DC voltage and measure DC voltage Available Available To apply DC current and measure DC current Available Available To display measurement source status data Available Available To calculate power and display the value Available Not available To calculate resistance and display the value Available Not available To set GPIB Address Available Not available To set power line frequency Available Not available To execute self test Available Available To execute self calibration Available Available To execute diagnostics Available Available To use trigger input output Not available Available To use digital interface Not available Available a In the remote mode and the default set
9. To Set Data Display Format This instruction selects the display format of the measurement data displayed in the Measurement Data area 1 Press the Menu key 2 Move the cursor to DSPL_FRMT then press the Enter key 3 Press the arrow keys to select the format ENGINEERING or SCIENTIFIC Display Format Description ENGINEERING Six digit numeric value with arithmetic point and unit Example 123 456pA SCIENTIFIC Four digit numeric value with arithmetic point exponential part E sign and one or two digit numeric value and unit Example 1 234E 10A 4 Press the Enter key to make the setup effective or press the Exit key to cancel changing the setup 5 Press the Exit key to close the setup menu 5 28 Agilent E5260 E5270 User s Guide Edition 5 Function Details Function Details This chapter explains the following measurement functions of the Agilent E5260 E5270 and the initial settings e Measurement Mode e Ranging Mode e Compliance SMU Pulse e Measurement Time e Atto Sense and Switch Unit Filter e Series Resistor e Interlock Function e Auto Power Off Function e Initial Settings 6 2 Agilent E5260 E5270 User s Guide Edition 5 Function Details Measurement Mode Measurement Mode The Agilent E5260 E5270 provides different measurement functions for each operation mode local and r
10. 100 mA 20 V 0 lt V lt 20 V 1 mV 100 mA 40 V 0 lt V lt 20 V 2 mV 100 mA 20 V lt V lt 40 V 2mV 50 mA 100 V 0 lt V lt 20 V 5mV 100 mA 20 V lt V lt 40 V 5mV 50 mA 40 V lt V lt 100 V 5mV 20 mA Table 2 10 HRSMU Output Current Ranges and Resolutions Range Output Value o i ee 1pA 0 lt I lt 1 15 pA 1fA 100 V 10 pA 0 lt I lt 11 5 pA 5 fA 100 V 100 pA 0 lt lt 115pA 5 fA 100 V l nA 0 lt lt 1 15 nA 50 fA 100 V 10 nA 0 lt lt 11 5 nA 500 fA 100 V 100 nA 0 lt lt 115nA 5 pA 100 V 1 pA 0 lt lt 1 15 uA 50 pA 100 V 10 uA 0 lt lt 11 5 uA 500 pA 100 V 100 uA 0 lt lt 115 uA 5 nA 100 V 1 mA 0 lt I lt 1 15 mA 50 nA 100 V 10mA 0 lt lt 11 5 mA 500 nA 100 V 100 mA 0 lt I lt 20 mA 5 pA 100 V 20 mA lt I lt 50 mA 5 uA 40 V 50 mA lt I lt 100 mA 5 uA 20 V a Available when the E5288A Atto Sense and Switch Unit ASU is used Agilent E5260 E5270 User s Guide Edition 5 2 17 Table 2 11 Table 2 12 Introduction Measurement Units HRSMU Measurement Voltage Values and Resolutions Measurement Resolutions Range ads Value High Speed ADC High Resolution ADC 0 5 V 0 lt V lt 0 55 V 25 uv 0 5 uV 2V 0 lt V lt 2 2 V 100 V 2 uV sv 0 lt V lt 5 5 V 250 uV Suv 20 V 0 lt V lt 22V 1 mV 20 uv 40 V 0 lt Vi lt 44V 2 mV 40 uV 100 V 0 lt Vi lt 100 V 5 mV 100 uV HRSMU Measurement C
11. LSTM Step delay time 0s WT Trigger delay time Os WT PT Trigger mode XE TV TI or GET TM Trigger port Ext Trig In Start Measurement TGP trigger input Ext Trig Out Measurement TGP Completion trigger output Digital I O cleared TGP Trigger condition of with trigger for first sweep step TGSI Start Step Output Setup trigger Type of output trigger Edge trigger TGXO TGSO TGMO Digital I O port Output for all port ERM Program memory cleared SCR Value of internal variable In Rn 0 VAR Data output format ASCII with header CR LF EOI FMT Data output buffer cleared BC Status byte Only bit 6 is enabled SRE Error code register cleared ERR a Program memory is not cleared by the RST command or the device clear 6 28 Agilent E5260 E5270 User s Guide Edition 5 Table 6 3 Initial Settings Function Details Initial Settings Setup Item Initial Setting Commands Measurement channel Channel assigned the lowest number MCH Measurement data to be displayed Data 1 Compliance side data MPA Data 2 none MPA Output channel Channel assigned the lowest number SCH Output data to be displayed Data 1 OUT SPA Data 2 CPL SPA Data display format ENGINEERING DFM Remote mode data display off RED Remote mode key lock unlock unlock KLC Auto calibration on CM ADC zero function for E5270B off AZ SMU output switch open CN CL ASU pat
12. command in Programming Guide to set trigger port Specify trigger output port for OSX No trigger output port was specified for the OSX command Specify the trigger output port or set the port as the trigger output port Refer to TGP command in Programming Guide to set trigger port Incorrect polarity of search step value For the linear search measurement The step value must be positive if start lt stop or negative if start gt stop Number of search steps must be 1001 or less For the linear search measurement The number of search steps between start and stop must be 1001 or less This means the step value must be stop start 1001 or more Search measurement was aborted Search measurement was aborted by the automatic abort function Search limits must be range 20000 or more For the binary search measurement The limit value for the search target must be range 20000 or more where range means the measurement range actually used for the measurement Data format must be ASCII to get time data The time stamp function is not available for the binary data output format To use the time stamp function set the data output format to ASCII Cannot connect disconnect series resistor The series resistor status cannot be changed in the high voltage state Set the output voltage or the voltage compliance to 42 V or less to connect or disconnect the series resistor Agilent E5260 E5270 User s Guide Edition 5 If
13. gt Output Voltage Compliance Agilent E5260 E5270 User s Guide Edition 5 6 9 Polarity of DV DI output Figure 6 2 Figure 6 3 Function Details Compliance DV and DI commands enable you to specify the polarity mode auto or manual Auto Sets the compliance as described above Initial setting Manual Sets the compliance as described below e Polarity of current compliance The Agilent E5260 E5270 automatically sets current compliance for both positive and negative polarity For opposite polarity as the specified compliance value the compliance value is increased by an amount that is 2 5 to 12 of the range value in the lowest range that covers the specified compliance value See Figure 6 2 e Polarity of voltage compliance If the output current is the same polarity as the specified compliance value the compliance works as the maximum voltage limiter for the same direction as the compliance polarity For opposite polarity the compliance works as the minimum voltage limiter See Figure 6 3 Relation of Compliance and Output DV Manual Mode When Compliance gt 0 When Compliance lt 0 Current Current A A Compliance ZFF Hy EPRD SS 77 Compliance Yi v lt 0 ess GY Output Voltage Output Voltage 0 VW La Compliance E Compliance Relation of Compliance and Output DI Manual Mode When Compliance gt 0 When Compliance lt 0 Voltage Voltage A A 4 Yu WY Compl
14. 15 kg E5262A 16 kg E5263A 2 5 kg E5280B E5290A 1 4 kg E5281B 1 5 kg E5287A 0 5 kg E5288A 1 6 kg E5291A Agilent E5260 E5270 User s Guide Edition 5 2 49 Introduction Accessories and Options Accessories and Options The Agilent E5260 E5270 is furnished with the following accessories e Power Cable 1 ea e Operation Summary Sheet 1 ea Software CD lea Table 2 31 lists the options and the available accessories for the Agilent E5260 E5270 2 50 Agilent E5260 E5270 User s Guide Edition 5 Introduction Accessories and Options Table 2 31 Options and Accessories Raine Option Item Description E5260A 8 Slot High Speed Measurement Mainframe E5260A 050 50 Hz power line frequency E5260A 060 60 Hz power line frequency E5260A A6J ANSI Z540 compliant calibration E5260A UK6 Commercial cal certificate w test data E5260A ABA Manual set English E5260A ABJ Manual set Japanese E5262A 2 Channel Source Monitor Unit MPSMU MPSMU E5262A 050 50 Hz power line frequency E5262A 060 60 Hz power line frequency E5262A A6J ANSI Z540 compliant calibration E5262A UK6 Commercial cal certificate w test data E5262A ABA Manual set English E5262A ABJ Manual set Japanese E5263A 2 Channel Source Monitor Unit HPSMU MPSMU E5263A 050 50 Hz power line frequency E5263A 060 60 Hz power line frequency E5263A A6J ANSI Z540 compliant calibratio
15. ALL Press the arrow key to select the slot to calibrate Then press the Enter key to start self calibration or press the Exit key to return to the previous menu without performing self calibration During self calibration the following message will be displayed Press Exit to abort Then press the Exit key to abort self calibration or wait until self calibration is completed and the following message is displayed Calibration Pass or Fail Press the Exit key to return to the previous menu e RESULT Displays the following message FRAME Pass or Fail Error No Press the arrow key to display the result of another slot as shown below Slot Pass or Fail Error No where is 1 or 2 for the 2 ch mainframe 1 2 or 8 for the 8 ch mainframe and Error No is the error number Press the Exit key to return to the previous menu To execute CAL of Agilent E5270B installed with ASU If you execute the CAL of the E5270B installed with the ASU Atto Sense and Switch Unit the E5270B executes the self calibration and the 1 pA range offset measurement for the measurement channels connected to the ASUs The offset data is temporarily memorized until the E5270B is turned off and is used for the compensation of the data measured by the 1 pA range of the channels The E5270B performs the data compensation automatically and returns the compensated data Since the E5270B is turned on if you do not execute the CAL th
16. Displays the source output setting OUT and the source compliance setting CPL in the Setup Data area Then the cursor appears on the last digit of the integral part of the CPL value The CPL value is current for voltage output or voltage for current output To set the compliance value see To Apply DC Current Voltage on page 5 16 4 14 Agilent E5260 E5270 User s Guide Edition 5 AUX On Off Shift CPL Value OutRange On Off SerRes Shift On Off Front Panel Reference Front Panel Key Details The Agilent E5260 series does not have this function This function is available for the Agilent E5270B installed with the high resolution SMU HRSMU To use the ASU Atto Sense and Switch Unit connect the ASU to the HRSMU properly The ASU adds the 1 pA range to the HRSMU Connection must be performed before the Agilent E5270B is turned on If you use other instrument such as C meter connect the instrument to the AUX input of the ASU The ASU provides the input selection function This shift key operation is available when you are setting the HRSMU connected to the ASU and switches the ASU input resource HRSMU or the instrument connected to the AUX input to be connected to the ASU output When the E5270B is turned on the SMU side is connected to the ASU output When the AUX side is connected to the ASU output the HRSMU cannot be used Then the Output indicator displays the reversed triangle mark The ASU is equ
17. If Large Current Causes High Temperature Thermal Drift If a large current is forced to a DUT the temperature of the DUT may increase which may cause characteristics to drift To solve this problem Use the pulse output mode of the SMU For large currents the SMU should be set to pulse output mode This decreases the average power output to prevent temperature rise of DUT If Measurement Takes More Time than Specified If you set many measurement channels auto ranging mode or too long integration time measurement takes a longer time To solve this problem Depending on your measurement requirements perform following e Decreases measurement channels Uses limited auto ranging mode Uses fixed range e Decreases averaging samples of the high speed A D converter e Decreases integration time of the high resolution A D converter for ES270B Disables the ADC zero function for E5270B 7 8 Agilent E5260 E5270 User s Guide Edition 5 If You Have a Problem When You Make a Measurement If Measurement Damages the Device under Test When performing breakdown measurements DUTs may be damaged When voltage is forced from an SMU the current is limited by the compliance setting which prevents the DUT from being damaged by a large current But when the current rapidly increases the current limiter in the SMU cannot follow the rapid current increase so a large amount of current may flow through the DUT for a mome
18. Local Meas Meas Out Out Ch Range Ch Range Cal Test SerRes AD Menu Meas Single Item Restore IntegTime Abort AUX On Off Filter Zero Integ Repeat CPL V I Volt Value Local key sets the Agilent E5260 E5270 to the local condition OUT On Value Off Menu key displays a setup menu See Setup Menu on page 4 18 ZeroVolt key stores the present source settings and changes the output to 0 V Measure key group is used to set up the measurement condition and start measurement See Measure key group on page 4 11 Output key group is used to set up the source condition and apply the source output See Output key group on page 4 14 Edit key group is used to move the cursor in the display make the setup effective return to the previous menu or display and so on Shift key enables use of the sub key function The sub key label has been printed on the front panel above the key The label color is blue DefValue key applies the default value to the setup item specified by the cursor in the display area Fast key is used with the arrow key Pressing the Fast key and an arrow key speeds up changing the setting value Exit key returns to the previous menu or display without making the setup effective Enter key makes the setup effective and returns to the previous menu or display For details of the front panel keys see Front Panel Key Details on page 4 10 Agilent E5260 E5270 User s Guide Edit
19. Start Step Output Setup trigger Type of output trigger Edge trigger TGXO TGSO TGMO Digital I O port Output for all port ERM Program memory cleared Not cleared by RST command or device clear SCR Value of internal variable In Rn 0 VAR Data output format ASCII with header CR LF EOI FMT Data output buffer cleared BC Status byte Only bit 6 is enabled SRE Error code register cleared ERR Agilent E5260 E5270 User s Guide Edition 5 6 29 Function Details Initial Settings 6 30 Agilent E5260 E5270 User s Guide Edition 5 If You Have a Problem NOTE If You Have a Problem This chapter explains how to solve a problem or how to read status and error codes if you encounter some problem and consists of the following sections e When You Install the E5260 E5270 This section explains how to solve the problems that may occur when installing the Agilent E5260 E5270 e When You Make a Measurement This section explains how to solve the problems that may occur when making a measurement e Channel Status Code This section lists channel status codes that may be displayed on the LCD when operating the Agilent E5260 E5270 e Error Codes This section lists codes and messages of errors that may cause when operating the Agilent E5260 E5270 Error causes if the Agilent E5260 E5270 is not operated correctly or it fails self test or calibration If
20. Stopping measurement Executing a spot measurement and starting repeat measurement Changing source output value during repeat measurement Changing measurement item during repeat measurement Stopping source output and measurement Agilent E5260 E5270 User s Guide Edition 5 Getting Started Agilent E5260 E5270 Front Panel Er an ES2708 r a Ba z HAE c 1 23456mA 1 23456mV post OR a AA EJE lt 10 ann Eo ase va O 0D X Agilent E XE Agilent Agilent gt E NOTE Front Panel Keys The Agilent E5260 E5270 has 24 front panel keys The front panel keys are located as shown below Front panel operation is available when the Agilent E5260 E5270 is in the local condition Measure Reset Output Edit Local Meas Meas Out Out Shift Exit Ch Range Ch Range Cal Test AD SerRes Menu Meas Single OUT On Fast Item Value Off IntegTime Abort AUX On Off Filter CPL V I Value Def Enter Value The Agilent E5260A E5262A E5263A do not have the AD and AUX On Off shift keys Agilent E5260 E5270 User s Guide Edition 5 1 3 NOTE Step 1 Step 2 Getting Started Turning on the Agilent E5260 E5270 Connect the power cable from the Agilent E5260 E5270 to an AC power outlet and press the Line switch After the self calibration the LCD shows the following display
21. The display area consists of the following sub areas that have the meanings described below In normal operation or when changing source output or compliance value A Meas Data 1 Meas Data 2 Setup Data 1 B Status Data Setup Data 2 When changing measurement setup or source setup A Meas Data 1 Meas Data 2 Setup Data 1 B Change Setup Setup Data 1 2 Meas Data 1 2 Status Data Change Setup 4 4 Channel status T C V X or blank See Channel Status Area on page 4 6 Shift key status on triangle mark or off blank The Shift key toggles the mark While the mark appears you can use the sub key function instead of the original key function Source output setting source compliance setting measurement range setting or error code See Setup Data Area on page 4 7 Measured value calculated power value or calculated resistance value See Measurement Data Area on page 4 8 Status information measurement channel number and source channel number See Status Data Area on page 4 9 Displays a setup menu or a setup message when you change any setup For details see Front Panel Key Details on page 4 10 and Setup Menus on page 4 18 Agilent E5260 E5270 User s Guide Edition 5 Front Panel Reference Display and Front Panel Keys Front Panel Key Locations The following 24 front panel keys are available Reset Measure Output
22. 1 Press the Shift key and the V I key 2 Press the arrow keys and select ON to connect the filter 3 Press the OutCh key if you are setting the filter for another channel and perform 2 4 Press the Enter key to make the setup effective or press the Exit key to cancel changing the setup A filter is mounted on each module It assures clean source output with no spikes or overshooting Agilent E5260 E5270 User s Guide Edition 5 5 19 NOTE Front Panel Operations Applying Source Output To Switch ASU Internal Connection The Agilent E5260 series does not have this function This function is available for the Agilent E5270B installed with the high resolution SMU HRSMU To use the ASU Atto Sense and Switch Unit connect the ASU to the HRSMU properly The ASU adds the 1 pA range to the HRSMU Connection must be done before the Agilent E5270B is turned on If you use other instrument such as C meter connect the instrument to the AUX input of the ASU The ASU provides the input selection function The following procedure switches the ASU input resource HRSMU or the instrument connected to the AUX input to be connected to the ASU output 1 Press the Shift key and the CPL Value key The input resource will be switched If you perform this key operation again the connection will be switched to the previous resource This key operation is available when you are setting the HRSMU connected to the ASU 2 Press the OutCh
23. 13 and confirm that the ASU is the correct one If it is not correct get the correct one and connect it to the HRSMU properly The CMU pot connector is for the LCR meter such as the Agilent 4284A that uses the four terminal pairs For the other instrument connect a BNC open connector or nothing to there The line will be internally connected to the CMU cur AUX in line It is unavailable to use the series resistor in the HRSMU connected to the ASU Before using 1 pA range The measurement channel connected to the ASU supports the 1 pA range To use the 1 pA range set the 1 pA fixed range or the 1 pA limited auto ranging The E5270B automatically performs the compensation of the data measured by the 1 pA range and returns the compensated data You can use either the pre stored offset data or the pre measured offset data To measure the offset data perform the self calibration before starting the measurement for a DUT This offset data is temporarily memorized until the E5270B is turned off Agilent E5260 E5270 User s Guide Edition 5 6 21 Function Details Filter Filter The filter is mounted on each source monitor unit SMU module It assures clean source output with no spikes or overshooting However using a filter may increase the SMU settling time To set the filter refer to To Use Filter on page 5 19 In remote mode use the FL command to set the filter ON or OFF 6 22 Agilent E5260 E5270 User s Guide Edition
24. 5 Front Panel Reference Front Panel Key Details Table 4 4 AD Integ and IntegTime Values AD Integ IntegTime message and description H SPEED A M ch H SPEED A N Ref pt N Specify the N value shown in the following formula Available values are 1 to 1023 Initial value is 1 Number of averaging samples N x reference where reference is the number of averaging samples automatically set by the Agilent E5260 E5270 and cannot be changed M M ch H SPEED M N pt N Specify the number of averaging samples N Available values are 1 to 1023 Initial value is 1 P M ch H SPEED P N 128 pt N Specify the N value shown in the following formula Available values are 1 to 100 Initial value is 1 Number of averaging samples N x 128 The Agilent E5260 E5270 gets 128 samples in a power line cycle Hence the N value is equal to the number of power line cycles H RESOLN A M ch H RESOLN A N Ref s N Specify the N value shown in the following formula Available values are 1 to 127 Initial value is 6 Integration time N x reference where reference is the integration time automatically set by the Agilent E5270B and cannot be changed M M ch H RESOLN M N 80 us N Specify the N value shown in the following formula Available values are 1 to 127 Initial value is 3 Integration time N x 80 usec P M ch H RESOLN P N Freq s N
25. 5V 0 lt VW lt 5V 250 nV 100 mA 20 V 0 lt V lt 20 V 1 mV 100 mA 40 V 0 lt V lt 20 V 2 mV 100 mA 20 V lt V lt 40 V 2 mV 50 mA 100 V 0 lt V lt 20 V 5mV 100 mA 20 V lt V lt 40 V 5mV 50 mA 40 V lt V lt 100 V 5mV 20 mA MPSMU Output Current Ranges and Resolutions Range Output Value e a aa LnA 0 lt lt 1 15nA 50 fA 100V 10nA 0 lt lt 11 5nA 500 fA 100 V 100 nA 0 lt lt 115nA SpA 100 V 1 uA 0 lt I lt 1 15 uA 50 pA 100 V 10 uA 0 lt lt 11 5 uA 500 pA 100 V 100 pA 0 lt lt 115 uA 5 nA 100 V 1 mA 0 lt JI lt 1 15 mA 50 nA 100 V 10 mA 0 lt I lt 11 5 mA 500 nA 100 V 100 mA 0 lt I lt 20 mA 5 uA 100 V 20 mA lt I lt 50 mA 5 uA 40 V 50 mA lt I lt 100 mA 5 uA 20 V 2 14 Agilent E5260 E5270 User s Guide Edition 5 Introduction Measurement Units Table 2 7 MPSMU Measurement Voltage Values and Resolutions ne Measure m ent Measurement Resolutions yale High Speed ADC High Resolution ADC 0 5 V 0 lt V lt 0 55 V 25 uV 0 5 pV 2V 0 lt Vis 2 2 V 100 uV 2 uV 5V 0 lt V lt 5 5 V 250 uV Suv 20 V 0 lt V lt 22 V 1 mV 20 uV 40 V 0 lt V lt 44V 2 mV 40 uV 100 V 0 lt V lt 100 V 5 mV 100 uV Table 2 8 MPSMU Measurement Current Values and Resolutions Me asurem ent Measurement Resolutions Value High Speed ADC High Resolution ADC 1nA 0 lt lt 1 15nA 50 fA 10 fA 10nA
26. 61000 4 1 1 2004 EN 61000 4 11 2004 Voltage Dip 0 for 1 0 5 cycle 70 for 25 30 cycles Short Interruptions 0 for 250 300 cycles Canada ICES NMB 001 2004 Australia New Zealand AS NZS CISPR 11 2004 Safety EC 61010 1 2001 EN 61010 1 2001 Canada CAN CSA C22 2 No 61010 1 04 NRTL C Supplementary Information The product was tested in a typical configuration with Agilent Technologies test systems This DoC applies to above listed products placed on the EU market after Year of the CE marking 04 February 22 2013 BE 2 A Date Toshiyuki Kawaji QA Manager Agilent Technologies Hachioji Semiconductor Test Division For further information please contact your local Agilent Technologies sales office agent or distributor or Agilent Technologies Deutschland GmbH Herrenberger Stra e 130 71034 B blingen Germany DECLARATION OF CONFORMITY Agilent Technologies According to EN ISO IEC 17050 1 2004 C Manufacturer s Name Agilent Technologies Singapore International Pte Ltd Manufacturer s Address No 1 Yishun Ave 7 SINGAPORE 768923 Singapore Declares under sole responsibility that the product as originally delivered Product Name 8 Slot Precision Measurement Mainframe High Power Source Monitor Unit Module Medium Power Source Monitor Unit Module Atto Level High Resolution Source Monitor Unit Module Atto Sense and Switch Unit Model Number Agilent E5270B Agilent E5280B Agilen
27. Agilent E5288A Atto Sense and Switch Unit ASU is used c 100 V Io lt 20 mA 40 V 20 mA lt Io lt 50 mA 20 V 50 mA lt Io Io is the output current Agilent E5260 E5270 User s Guide Edition 5 2 37 Introduction Specifications E5288A Atto Sense and Switch Unit ASU AUX Path Specification e Maximum Voltage 100 V AUX input to AUX common 100 V AUX input to circuit common 42 V AUX common to circuit common Maximum Current 0 5 A AUX input to Force output ASU Supplemental Information Band width at 3 dB lt 30 MHz AUX port NOTE Connect ASU to dedicated HRSMU The specifications are satisfied and guaranteed for the exclusive combination of the ASU and the HRSMU So confirm the serial number of the ASU and connect it to the dedicated HRSMU properly 2 38 Agilent E5260 E5270 User s Guide Edition 5 E5290A HPSMU e Voltage Range Resolution and Accuracy Refer to Table 2 27 e Current Range Resolution and Accuracy Refer to Table 2 28 e Power Consumption Voltage source mode Voltage Range Power Consumption 2V Ic x 20 W 20 V Ic x 20 W 40 V Ic x 40 W 100 V Ic x 100 W 200 V Ic x 200 W a Ic is the current compliance setting Current source mode Voltage Compliance Power Consumption Ve lt 20 V lo x 20 W 20V lt Vc lt 40 V lo x 40 W 40V lt Vc lt 100 V lo x 100 W 100 V lt Ve lt 200 V Io x 200 W a Vc is the vol
28. E5260 E5270 is operating correctly the LCD displays as shown in Figure 3 1 If a problem occurs see If You Have a Problem manual 6 Press the Exit key three times to close the setup menu Press the Menu key and select CONFIG and UNIT menu Then make sure that the units displayed match the units installed LCD Display Example Stat Meas Value 1 Meas Value 2 Setting Parameter Shift OFF OUT 0 00 V A 1 1 CPL 100 0uA Farad Lock Meas Tigge Error integ Outpul Repeal M ch S ch To Execute Diagnostics and Self calibration Perform the following functions as necessary Self test See To Perform Self test on page 5 7 Self calibration See To Perform Self Calibration on page 5 8 Diagnostics See To Perform Diagnostics on page 5 9 Agilent E5260 E5270 User s Guide Edition 5 3 7 WARNING CAUTION NOTE Installation Inspection and Installation To Remove or Install Plug in Module This section provides the plug in module removal and installation instructions To prevent electrical shock turn off the mainframe and remove the power cable before starting the instruction Be careful about the interconnection connector and use clean handling and anti static procedures when unpacking or doing the following procedure to prevent damage Plug in module is shipped from the factory after the specifications are conf
29. Edition 5 223 224 225 226 227 230 231 238 239 If You Have a Problem Error Codes Compliance must be set correctly Compliance was not set or an incorrect compliance value was set in the WV WI WSV WSI WNX or BDV command Set the compliance value correctly Sweep and sync output modes must be the same The primary sweep channel and the synchronous sweep channel must be different and they must be set to the same output mode voltage or current Send WSV WSI or WNX to get sync sweep data If you enable data output of the synchronous sweep source do not forget to set the synchronous sweep source by the WSV WSI or WNX command For data output refer to FMT command in Programming Guide Set linear sweep for MM4 or MMS Only the linear sweep is available for the PWV or PWI command for the pulsed sweep measurement MM4 or the WV or WI command for the staircase sweep with pulsed bias measurement MM5 Sweep measurement was aborted Sweep measurement was aborted by the automatic sweep abort function or the power compliance Pulse source must be set To perform the pulsed spot measurement MM3 send the PV or PI command to set the pulse source Compliance must be set correctly Compliance was not set or an incorrect compliance value was set in the PV PI PWV or PWI command Set the correct compliance value effective for the pulse output Too large pulse width max 2 s The
30. Environment e Storaging Shipping Environment e Ventilation Requirements e Power Cable Power Requirements The Agilent E5260 E5270 can operate from any single phase AC power source supplying 90 to 264 V at 47 to 63 Hz The maximum power consumption is 600 VA for the Agilent E5260A E5270B and 400 VA for the Agilent E5262A E5263A For details see Specifications on page 2 26 Operating Environment The Agilent E5260 E5270 is specified to operate within the following environmental conditions Temperature 5 C to 35 C Humidity 5 to 70 RH non condensing Altitude 0 to 2 000 m 6 561 ft Storaging Shipping Environment The Agilent E5260 E5270 is specified to store ship within the following environmental conditions Temperature 20 C to 60 C Humidity lt 80 RH non condensing Altitude 0 to 15 240 m 50 000 ft Agilent E5260 E5270 User s Guide Edition 5 3 3 CAUTION WARNING Installation Requirements Ventilation Requirements The Agilent E5260 E5270 has cooling fans To ensure adequate airflow make sure that there is sufficient clearance around the cooling fans 6 inches 150 mm behind 3 inches 70 mm on the sides and 0 5 inch 12 mm above and below If the airflow is restricted the internal operating temperature will be higher This may reduce the instrument s reliability or cause the thermal protection circuits to turn the instrument off Power Cable Before
31. If some high power electric machines are operating around the E5260 E5270 turn off the machines then perform the measurements The machines affect the power line waveform Shut the lid of test fixture or shield box to prevent effects of light If these are vibrations due to nearby machines or due to air flow put cushioning material under prober cable and the E5260 E5270 install stabilizer on the prober and make the cables stable by taping Wait several minutes after connecting cables or moving probe needles Because these operations cause electromotive force If you use only Force terminal and triaxial cables connect an open cap to Sense terminal Keep constant temperature in the room when you use the E5260 E5270 Shift of 1 C may shift the measurement values Temperature change causes the following Offset current in the E5260 E5270 Thermoelectromotive force in DUT which causes low current Expansion and contraction of cables which causes noise Agilent E5260 E5270 User s Guide Edition 5 7 7 If You Have a Problem When You Make a Measurement If Measured Voltage has some Error when Forcing a Large Current Voltage measurement may have some error because of the effects of the cable resistance when forcing a large current To solve this problem Use kelvin connections between SMUs and DUT To cancel the effects of cable resistance connect the sense line as close as possible to the terminal of the DUT
32. Panel Reference Front Panel Key Details Front Panel Key Details The front panel keys are used to change the instrument settings apply DC bias measure DC current or voltage and so on Reset Measure Output Edit Local Meas Meas Out Out Shift Exit Ch Range Ch Range Cal Test AD SerRes Menu Meas Single OUT On Fast Item Value Off Restore IntegTime Abort AUX On Off Filter Def Enter Value Zero Integ Repeat CPL Vii Volt Value When the Change Setup area is displayed only the Edit keys except for the Shift key are available Sets the Agilent E5260 E5270 to the local condition Displays the following message Press the arrow key to set YES and then press the Enter key to reset the instrument Reset NO Displays the setup menu in the Change Setup area See Setup Menu on page 4 18 Displays the calibration and test menu in the Change Setup area See Calibration and Test Menu on page 4 25 Displays the following message Press the arrow key to set YES and then press the Enter key to store the present source settings and change the source output to 0 V If the message shows No enabled channel press the Exit key O V Output NO Displays the following message Press the arrow key to set YES and then press the Enter key to restore the source settings stored by the ZeroVolt key operation If the message shows No stored data press the Exit key Restore NO 4 10 Agilent E5260 E
33. SMU Figure 3 5 To Set Shorting Bar Shorting bar 3 18 Agilent E5260 E5270 User s Guide Edition 5 Installation Installing Accessories To connect 4284A Perform the following procedure to connect the Agilent 4284A See Figure 3 4 and Figure 3 5 to AUX NOTE Prepare a shorting bar furnished with the ASU The shorting bar is effective for reducing the offset capacitance caused by connecting a measurement terminal to the chuck of a wafer prober 1 Turn the instrument off 2 Prepare two ASUs 1 and 2 and two shorting bar And perform the following procedure for each ASU a Disconnect the triaxial cable from the ASU if it is connected to the ASU Force terminal b Face the concave side of the shorting bar to front c Slide the shorting bar from the right side of the connectors 3 Connect the 16048D E test leads to the 4284A 4 Connect the high potential Hp cable of the test leads to the ASU 1 CMU pot terminal 5 Connect the high current Hc cable to the ASU 1 CMU cur AUX In terminal The shorting bar is fixed to the ASU 1 by the step 5 and 6 6 Connect the triaxial cable from the HRSMU 1 Force terminal to the ASU 1 Force terminal 7 Connect the low potential Lp cable to the ASU 2 CMU pot terminal 8 Connect the low current Lc cable to the ASU 2 CMU cur AUX In terminal The shorting bar is fixed to the ASU 2 by the step 8 and 9 9 Connect the triaxial cable from the HRSMU 2 Force terminal to t
34. Source Monitor by the kelvin connection 3 14 Agilent E5260 E5270 User s Guide Edition 5 Installation Installing Accessories A Connecting the interlock terminal The Agilent E5260 E5270 provides the Interlock connector to prevent you from receiving an electrical shock from high voltage more than 42 V If the Interlock connector is open the Agilent E5260 E5270 cannot force high voltage more than 42 V When using the 16442B test fixture connect the Interlock connectors together using the 16493J interlock cable Ifyou use the 16495F G H J connector plate your own connector plate or your own test fixture make an interlock circuit as shown in To Make an Interlock Circuit on page 3 23 Then connect the Agilent E5260 E5270 Interlock connector to the external interlock connector by using the 16493J interlock cable Agilent E5260 E5270 User s Guide Edition 5 3 15 NOTE Figure 3 3 Required parts To install 16495K Installation Installing Accessories To Connect ASU The Agilent ES288A Atto Sense and Switch Unit ASU will add the 1 pA range to the high resolution SMU HRSMU when it is connected between the HRSMU and the device under test DUT And the ASU provides the input selection function when instruments are connected to the SMU input and the AUX input For the installation of the ASU and the connection to the DUT interface probe card manipulators and so on contact your favorite prober vender
35. V 1 mA 50 nA 0 12 5E7 Vpx5E8 0 1 3E7 Vpx5E 200 V 10 mA 500 nA 0 12 4E Vpx5E 0 1 2E Vpx5E 200 V 100 mA SuA 0 12 5E Vpx5E 0 1 3E Vpx5E 4 1A 50 pA 0 5 5E4 Vpx5E 0 5 3E Vpx5E a of output measured value Vp is Vo 25 For the Vp value the decimal point must be rounded out b 200 V lo lt 50 mA 100 V 50 mA lt Io lt 125 mA 40 V 125 mA lt Io lt 500 mA 20 V 500 mA lt Io lt 1 A Io is the output current 2 40 fixed offset in A proportional offset in A Vo is the output voltage in V Agilent E5260 E5270 User s Guide Edition 5 Introduction Specifications E5291A MPSMU e Voltage Range Resolution and Accuracy Refer to Table 2 29 e Current Range Resolution and Accuracy Refer to Table 2 30 e Power Consumption Voltage source mode Voltage Range Power Consumption 2V Ic x20 W 20 V Ic x 20 W 40 V Ic x 40 W 100 V Ic x 100 W a Ic is the current compliance setting Current source mode Voltage Compliance Power Consumption Ves 20V Io x 20 W 20 V lt Ve lt 40V lo x 40 W 40V lt Vc lt 100 V lo x 100 W a Vc is the voltage compliance setting b Io is the output current Output terminal connection Triaxial connector Kelvin remote sensing e Voltage Current Compliance Limiting Voltage Compliance 0Vto 100V Current Compliance 100 pA to 200 mA Complianc
36. Vpxx1E5 a of output measured value fixed offset in A proportional offset in A Vo is the output voltage in V Vp is Vo 25 Vpx is Vo 50 For the Vp and Vpx values the decimal point must be rounded out b 100 V Io lt 20 mA 40 V 20 mA lt Io lt 50 mA 20 V 50 mA lt Io Io is the output current 2 42 Agilent E5260 E5270 User s Guide Edition 5 Introduction Specifications E5280B E5281B E5287A E5290A E5291A Supplemental Information Maximum allowable cable resistance Kelvin connection Terminal Cable resistance Sense 10 Q Force 10Q I lt 100 mA 1 50 100 mA lt 1 e Voltage source output resistance Force line Non Kelvin connection 0 2 Q E5280B E5290A 0 3 Q E5281B E5287A E5291A Voltage measurement input resistance gt 101 Q e Current source output resistance gt 101 Q 1 nA range e Current compliance setting accuracy for opposite polarity Current range Accuracy 1 pA to 10 nA Setting accuracy 12 of range 2 100 nA Setting accuracy 2 5 of range e Maximum capacitive load Current range Maximum capacitive load 1pA to 10 nA 1000 pF 100 nA to 10 mA 10 nF gt 100 mA 100 uF Maximum guard capacitance 900 pF E5280B E5281B E5287A E5290A E5291A 660 pF E5287A with ASU Agilent E5260 E5270 User s Guide Edition 5 2 43 Introduction Specifications e Maximum shield capacitanc
37. You Have a Problem Error Codes 656 Series resistor must be OFF for 1 A range The series resistor cannot be set to ON for the measurement channels or the output channels that use 1 A range 657 Series resistor cannot be used with ASU The series resistor is not available for the channel connected to the Atto Sense and Switch Unit ASU 670 Specified channel does not have ASU Specify the module that can be used with the ASU Agilent E5260 E5270 User s Guide Edition 5 7 19 If You Have a Problem Error Codes Self test Calibration Error When the Agilent E5260 E5270 fails the self test or self calibration the Agilent E5260 E5270 returns the following error code and error message In the error code N indicates the slot number If the module is installed in slot 1 and it fails the function test the error code will be 1760 700 CPU failed NVRAM read write test 701 CPU failed FPGA read write test 702 CPU failed H RESOLN ADC end signal test 703 CPU failed H RESOLN ADC start signal test 704 CPU failed emergency status signal test 705 CPU failed SRQ status signal test 706 CPU failed high voltage status signal test 707 CPU failed low voltage status signal test 708 CPU failed DAC settling status signal test 709 CPU failed measure ready status signal test 710 CPU failed set ready status signal test 711 CPU failed measure end status signal test 712 CPU failed measure trigger signal test 713 CPU failed p
38. after reaching the compliance the dummy data 199 999E 99 will be returned Agilent E5260 E5270 User s Guide Edition 5 6 11 Function Details Compliance SMU output values If you specify power compliance the SMU changes the current or voltage compliance every sweep step Hence the SMU can apply voltage or current with the maximum power Figure 6 5 shows the differences between the output with power compliance and the output without power compliance for MPSMU Allowable Current in Voltage Sweep 0 V to 100 V MPSMU Figure 6 5 When power compliance is set When power compliance is not set Current mA Current mA A A 200 200 p lt For the sweep 0 V to 20 V For the sweep 0 V to 40 V For the sweep 0 V to 100 V 50L SO aiid oc 20 H 20 i i gt Voltage V i i gt Voltage V 20 40 100 ottage V 20 40 100 oltag V NOTE If you specify power compliance the measurement time increases slightly because the E5260 E5270 adjusts the compliance for every sweep step 6 12 Agilent E5260 E5270 User s Guide Edition 5 Figure 6 6 NOTE Function Details Compliance To Set Compliance The following points must be noted when setting the compliance e Ifthe current compliance value is too low the SMU will take a long settling time e The SMU will reach voltage compliance if the SMU cannot force the specified current for the following reasons Over current for test device e A
39. and how to connect cables to the connector plate If you use a wafer prober see wafer prober manuals Note that you must set the module output off when connecting or disconnecting DUTs If not the DUTs may be damaged To set the module output off press OutCh and On Off keys and confirm that the Output status indicator shows the off status for the all channels This section has the following descriptions e Using Test Fixture e Using Connector Plate Kelvin connection and non Kelvin connection To make the Kelvin connection use both Force and Sense terminals Connecting the Force and Sense lines together at the terminal of the DUT device under test minimizes the measurement error caused by the residual resistance of the connection cables The Kelvin connection is effective for the low resistance measurement and the high current measurement If you want to simplify the cable connections open the Sense terminals and use the Force terminals only This is the non Kelvin connection The Force terminals can be used to force and measure de voltage or current Agilent E5260 E5270 User s Guide Edition 5 3 29 CAUTION CAUTION Installation Connecting Measurement Devices Using Test Fixture 1 Press the OutCh and On Off keys and confirm that the Output status indicator shows the off status for the all channels 2 Select a proper socket module for your DUT then set the socket module on the test fixture 3
40. any of its associated modules are shipped from the factory they meet the specifications The supplemental information and typical entries in the following specifications are not warranted but provide useful information about the functions and performance of the instruments Never remove install modules by yourself Before the Agilent E5260 E5270 is shipped from the factory the measurement modules SMUs are installed in the mainframe and are tested to confirm that the Agilent ES260 E5270 satisfies the specifications If you remove install the module the specifications of the Agilent E5260 E5270 will not be guaranteed For verifying the specifications contact your nearest Agilent Technologies Service Center Introduction The Agilent E5260A E5270B a 8 Slot Parametric Measurement Mainframe is completely user configurable You can install up to eight single slot modules such as the medium power source monitor unit MPSMU up to four dual slot modules such as the high power source monitor unit HPSMU or any physically allowable combination thereof The Agilent E5262A and E5263A are fixed configuration dual SMU instruments The E5262A contains two MPSMUs and the E5263A contains one MPSMU and one HPSMU 2 26 Agilent E5260 E5270 User s Guide Edition 5 Introduction Specifications Basic Features Performs high speed DC parametric measurements Eight slots for plug in modules E5260A E5270B User interface allows
41. converter High speed ADC AAD Integration time High resolution High speed ADC auto AIT dd a ee rer High resolution ADC auto AIT 6 26 Agilent E5260 E5270 User s Guide Edition 5 Function Details Initial Settings Setup Item Initial Setting Commands AV command parameter number 1 mode 0 AV Current measurement range with pulse Compliance range RI without pulse auto Voltage measurement range with pulse Compliance range RV without pulse auto Sweep source parameters cleared WV WSV WI WSI Automatic sweep abort function off WM Output after sweep measurement Start value WM Pulse source parameters cleared PV PI Pulse sweep source parameters cleared PWV PWI Pulse width 0 001 s PT Pulse period 0 01 s PT Search source parameters cleared BSV BSSV BSI BSSI LSV LSSV LSI LSSV Search monitor parameters cleared BGV BGI LGV LGI Output after search measurement Start value BSM LSM Search measurement data Source output value only BSVM LSVM Quasi pulse source parameters cleared BDV Quasi pulsed spot measurement mode Voltage BDM Quasi pulse settling detection interval Short BDM Hold time Os WT PT BDT BST LSTM Agilent E5260 E5270 User s Guide Edition 5 6 27 Function Details Initial Settings Setup Item Initial Setting Commands Delay time Os WT PT BDT BST
42. current compliance When the SMU applies current you can specify voltage compliance For details about the compliance refer to Compliance on page 6 9 2 8 Agilent E5260 E5270 User s Guide Edition 5 Figure 2 2 Introduction Measurement Units GNDU Ground Unit The Agilent E5260 E5270 is equipped with the ground unit GNDU The GNDU is a 0 V constant voltage source and used for the reference of measurement ground Also the GNDU can sink up to 4 A E5260A E5270B or 2 2 A E5262A E5263A so it is effective for using the HPSMU high power SMU Figure 2 2 is a simplified circuit diagram of GNDU Simplified GNDU Circuit Diagram GNDU l Force COMMON Agilent E5260 E5270 User s Guide Edition 5 2 9 Figure 2 3 Introduction Measurement Units E5280B Precision HPSMU This section describes typical specification of the high power source monitor unit HPSMU for the Agilent E5270B The E5280B cannot be used with the E5260A Maximum voltage current output power 200 V 1 A 20 W e Minimum range 2 V 1 nA Output measurement value and resolution see Table 2 1 to Table 2 4 HPSMU Output and Measurement Ranges Current mA Voltage V 2 10 Agilent E5260 E5270 User s Guide Edition 5 Table 2 1 Table 2 2 HPSMU Output Voltage Ranges and Resolutions Introduction Measurement Units R
43. electrical shock Do not touch terminals that have this symbol when instrument is on Protective conductor terminal For protection against electrical shock in case of a fault Used with field wiring terminals to indicate the terminal which must be connected to ground before operating equipment Frame or chassis terminal A connection to the frame chassis of the equipment which normally includes all exposed metal structures Indicates earth ground terminal Alternating current Direct current ON Supply OFF Supply STANDBY Supply Means INSTALLATION CATEGORY I Measurement terminals on the rear panel comply with INSTALLATION CATEGORY I The warning sign denotes a hazard It calls attention to a procedure practice condition or the like which if not correctly performed or adhered to could result in injury or death to personal The caution sign denotes a hazard It calls attention to an operating procedure practice condition or the like which if not correctly performed or adhered to could result in damage to or destruction of part or all of the product HIGH VOLTAGE SHOCK HAZARD The Agilent E5260 E5270 can force dangerous voltages 200 V for HPSMU and 100 V for MPSMU at the force guard and sense terminals To prevent electric shock hazard the following safety precautions must be observed during the use of the Agilent E5260 E5270 Use a three conductor AC power cable to connect cabinet if used and Agilen
44. error occurs find solutions in the following sections and solve problems However if problems still remain perform self test If the E5260 E5270 fails self test contact your nearest Agilent Technologies Service Center When shipping the Agilent E5260 E5270 to the service center When you ship the Agilent E5260 E5270 to the Agilent Technologies service center do not remove the source monitor unit SMU from the mainframe and ship the mainframe with all SMU modules When you ship the Agilent E5270B used with the atto sense switch unit ASU disconnect the connection cables between the ASU and the high resolution source monitor unit HRSMU and ship the ASU connection cables and the mainframe Then do not remove any module from the mainframe The ASU can be used with the dedicated HRSMU So check the serial number and ship the proper ASU 7 2 Agilent E5260 E5270 User s Guide Edition 5 NOTE If You Have a Problem When You Install the E5260 E5270 When You Install the E5260 E5270 This section covers the following basic problems that you may encounter when you install the E5260 E5270 and the solutions e Tf the E5260 E5270 cannot be Powered on e To Simplify the Connections If the E5260 E5270 cannot be Powered on e Check that the power cable is firmly connected to the E5260 E5270 and to power outlet e Check that the front panel Line switch is on To Simplify the Connections If you want to simplify t
45. formulas Power Measured Voltage x Measured Current Resistance Measured Voltage Measured Current Measurement Data Area Display Description Example Engineering display format Six digit numeric value with 123 456pA arithmetic point and unit Example Scientific display format Four digit numeric value with 1 234E 10A arithmetic point exponential part E sign and one or two digit numeric value and unit OFF Output off status Source output is disabled To perform measurement set the output ON POR No data to display Overflow Overflow Use higher measurement range a The display format engineering or scientific can be selected by the DSPL_FRMT menu displayed by pressing the Menu key 4 8 Agilent E5260 E5270 User s Guide Edition 5 NOTE Front Panel Reference Display and Front Panel Keys Status Data Area VVWvWCvAaAavv 1 1 The Status data area shows the following statuses Label Description Remote Remote status indicator The triangle mark appears when the Agilent E5260 E5270 is in the remote condition Lock Key status indicator The triangle mark appears when the front panel keys are locked by an external computer Meas Measurement status indicator The triangle mark appears when the measurement has been performed Then you cannot change the channel setup If the time to get one measurement data item is too short the tria
46. how to install connector plates on the shielding box However you may choose to mount connectors directly on your own connector plate or test fixture To do this you will need to make connector holes and mount the connectors yourself This section contains information on connector hole dimensions To mount connectors 1 Select the appropriate parts for your application See Table 3 3 2 Make the holes and mount the connectors See Table 3 4 For Kelvin connections use the Agilent 16493K Kelvin triaxial cable The Kelvin triaxial cable requires a Kelvin triaxial connector which has two connector holes and three screw holes 3 Build the interlock circuit shown in To Make an Interlock Circuit on page 3 23 4 Attach cables from the connectors to the DUT device under test Refer to To Connect the GNDU Output on page 3 26 To Connect the SMU Output on page 3 27 Recommended Parts Usage Agilent Part No Description Making an interlock circuit 1252 1419 Interlock Connector 6 pin female 3101 0302 or 3101 3241 Switch 1450 0641 LED Vp 2 1 V Ip 10 mA 8150 5680 Wire 24 AWG 600 V 150 C Connecting GNDU 1250 2457 Triaxial Connector female to DUT 8121 1189 or 8150 2639 Coaxial Cable or Wire Connecting SMU to 1250 2457 Triaxial Connector female DUT 8121 1191 Low Noise Coaxial Cable Agilent E5260 E5270 User s Guide Edition 5 3 21
47. in Remote Condition 0 00 cee eens 6 4 Ranging Mode sici n 6 5 To Set the Ranging Mode 0 2 0 cece cette nee 6 5 Auto Range csi ii ds ade 6 6 Limited Auto Rangidg8 o ooooooooooorr rr 6 7 Fixed Range cc a cds 6 7 Agilent E5260 E5270 User s Guide Edition 5 Contents Compliance Range ooooooooocoorr tenet etn ene ene 6 7 Enhanced Auto Ranging for Current Measurement 00005 6 8 Compliance sit A et A ia 6 9 Polarity and Output Area nuunuu cette ne 6 9 Power Compliance cit he a Bee 6 11 To Set Compliance MW A wae OY Oe 6 13 SMU Pulse 2 o O eee ao E i ed o dE 6 15 To Set Pulse Output cist suet ett bea 6 15 Measurement Time a A 25 Se tte Ai 6 16 Integration Time 202 0 A cso rag ai gi ae a oe BS 6 16 Overhead TimMer ou a dt 6 18 To Specify Source Output Time 2 2 0 ee eee 6 18 Wait Time eriep ip berate dao ds 6 19 Atto Sense and Switch Unit 0 0 ects 6 20 Baten erases yee ST RS ALOE ES BEI Pees 6 22 Series Resist dd et eh hd daa ed ad lo 6 23 Interlock Function ci eiii ee 6 24 Auto Power Off Function 0 0 000 ccc eet eens 6 25 Initial Seti ke eae hae ie oe be E 6 26 If You Have a Problem When You Install the E5260 E5270 2 cette 7 3 If the E5260 E5270 cannot be Powered on 00 e eee eens 7 3 To Simplify the Connections 00 0 cece eect cette nee 7 3 When You Make a Measurement oooooooocorrr eee ees 7 4 If Leaving
48. interlock circuit The GNDU can sink current of up to 4 A E5260A E5270B or 2 2 A E5262A E5263A Use Agilent 16493L GNDU cable to connect the GNDU to a test fixture or a connector plate Do not use normal triaxial cable 16494A because the maximum current rating of the cable is 1 A Never connect the Guard terminal to any output including circuit common chassis ground or any other guard terminal Doing so will damage the SMU 3 10 Agilent E5260 E5270 User s Guide Edition 5 Installation Installing Accessories To Connect 16442B Test Fixture See this section if you use the Agilent 16442B Test Fixture This section describes how to set up the 16442B and how to connect the E5260 E5270 to the 16442B To Set up 16442B You can stabilize the 16442B as shown in the figure below A e Y Z x 2 J p x E 4 A EE a Poo BO ee F oY NWS ri E F E A O A O A SES a LOY YY va ees a ys 1 Puta stabilizer on both sides of the test fixture 2 Attach each stabilizer to the unit with a flathead screw Agilent E5260 E5270 User s Guide Edition 5 3 11 Installation Installing Accessories To Connect 16442B Use the following cables to connect from the E5260 E5270 connectors to the 16442B s relative connectors 16442B E5260 E5270 Cables Terminals Terminals Agilent 16493J Interlock Cable 3 m or 1 5 m Intlk Interlock Agilent 16493L GNDU Cable 3 m or 1 5 m GNDU GNDU For Kelvin co
49. key The cursor disappears Use the Up or Down arrow key to change the output value and use the Left or Right arrow key to change the digit the cursor specifies The LCD changes the display as shown below The following data is just an example Stat Meas Value 1 Meas Value 2 Setting Parameter Shift 0 00010nA OUT 1 500 Y Aw v 2 2 CPL 100 0mA Femtd Lock Meas fTrigge Error Integ Output Repeat M ch S ch 1 6 Agilent E5260 E5270 User s Guide Edition 5 Getting Started Step 7 Changing measurement item during repeat measurement 1 Press the Measltem key The voltage measurement data is also displayed as shown below The following data is just an example Stat Meas Value 1 Meas Value 2 Setting Parameter Shift 0 00015nA 1 50020 Y OUT 1 500 V Av v 2 2 CPL 100 0mA Renctd Lock Meas Trigger Error Integ Output Repeal M ch S ch 2 Press the Measltem key The measurement data is changed to the calculated resistance value Measured Voltage Measured Current as shown below The following data is just an example Stat Meas Value 1 Meas Value 2 Setting Parameter Shift 1 000E 130Q OUT 1 500 V Aw v 2 2 CPL 100 0mA Ramtg Lock Meas fTrigge Error Integ Output Repeat M ch S ch
50. key This disables the source output Press the MeasCh key repeatedly to specify the source and measurement channel The channel number displayed in the M ch status area must be same as the channel number displayed in the S ch status area Press the Measltem key repeatedly to select the measurement item See To Select Measurement Item on page 5 23 Press the MeasRange key to set the measurement range See To Select Measurement Range on page 5 24 Press the Integ key repeatedly to select the A D converter operation mode See To Set A D Converter on page 5 25 Change the source output value if necessary See To Apply DC Current Voltage on page 5 16 Press the On Off key to enable the source output The measurement channel Output status must be ON to perform the measurement Press the Single key to execute a spot measurement Or press the Repeat key to execute repeat measurements To stop the repeat measurement press the Single key To change the source output value or the compliance value during measurement see To Set Output Compliance Value on page 5 17 To stop source output and measurement of the channel specified by the S ch status press the On Off key 5 22 Agilent E5260 E5270 User s Guide Edition 5 Front Panel Operations Making Measurement To Abort Measurement This instruction aborts measurement by all measurement channels 1 Press the Shift key and the Repeat key 2 Pres
51. key if you are setting the ASU for another channel and perform 1 The ASU can be used with only the HRSMU that was connected to it when the performance verification was performed To confirm if the ASU is the correct one see To Display Module Serial Number on page 5 13 When the E5270B is turned on the SMU side is connected to the ASU output When the AUX side is connected to the ASU output the HRSMU cannot be used Then the Output indicator displays the reversed triangle mark 5 20 Agilent E5260 E5270 User s Guide Edition 5 Front Panel Operations Making Measurement Making Measurement This section describes the following tasks to measure DC current or DC voltage e To Measure DC Current Voltage e To Abort Measurement e To Select Measurement Item e To Select Measurement Range To Set A D Converter e To Set Wait Time To Set Data Display Format Agilent E5260 E5270 User s Guide Edition 5 5 21 NOTE Front Panel Operations Making Measurement To Measure DC Current Voltage The following procedure performs DC current or voltage measurement using the specified measurement and source channel 1 Press the OutCh key repeatedly to specify the source and measurement channel The channel number must appear in the S ch status area Confirm that the Output status indicator does not show the output enable status If the source output has been enabled press the On Off
52. maximum value of the pulse width is 2 s And the available value depends on the pulse period value Refer to PT command in Programming Guide Pulse width must be 0 5 ms or more Set the pulse width to 0 5 ms or more Refer to PT command in Programming Guide Agilent E5260 E5270 User s Guide Edition 5 7 15 If You Have a Problem Error Codes 253 254 255 260 270 271 273 274 275 276 Program memory is full Maximum of 2000 programs or 40000 commands can be stored in the program memory Refer to ST command in Programming Guide Invalid input for a memory program The GPIB GET command TRIGGER statement in HP BASIC and an external trigger input are not allowed in a memory program between the ST and END commands Maximum nesting level is eight Nesting one program calling another of a memory program must be eight levels or less Data output buffer is full Maximum 34034 measurement data items can be stored in the data output buffer Search source channel must be set Before triggering the search measurement or sending the LSSV LSSI BSSV or BSSI command to set the synchronous search source send the LSV LSI BSV or BSI command to set the primary search source Search monitor channel must be set Before triggering the search measurement send the LGV LGI BGV or BGI command to set the search monitor channel Search and sync output modes must be the same The
53. measurement start when the measurement range is less than the compliance value To Specify Source Output Time As shown in the discussion of the overhead time you cannot specify the measurement time However in sweep measurement mode you can specify a source output time that includes the measurement time To specify the source output time set the delay time and the step delay time The step delay time is defined as the time from the measurement trigger up to the trigger for changing the source output value See the figure below Source output time Td Tsd Step delay time Tsd Delay time Td A SS Measurement time Vstart Hold time The step delay time must cover the measurement time to keep the source output time constant These values can be set by the WT command 6 18 Agilent E5260 E5270 User s Guide Edition 5 Figure 6 9 NOTE Function Details Measurement Time Wait Time Wait time is the time after starting source output until changing the source output value or until starting measurement You can set the source wait time and the measurement wait time individually The source wait time is the time the source channel always waits after it starts output until it changes the output value The measurement wait time is the time the measurement channel always waits after the source channel starts output until the measurement channel starts measurement Refer to Figure 6 9 The w
54. output synchronized to the pulsed sweep output Staircase Sweep with Pulsed Bias Measurement Applies pulsed voltage or current and performs staircase sweep measurement The staircase sweep output is synchronized to the pulsed bias A synchronous staircase sweep source is also available Quasi pulsed Spot Measurement Applies quasi pulsed voltage or current and measures voltage or current Search Measurement linear search and binary search Applies voltage or current and measures voltage or current Repeats this for various output values until the search stop condition is satisfied Synchronous output is available To perform measurement refer to Programming Guide 6 4 Agilent E5260 E5270 User s Guide Edition 5 For measurement channels For output channels Function Details Ranging Mode Ranging Mode The Agilent E5260 E5270 provides the following operation modes for the measurement range and the output range The ranging mode must be set for each channel Auto Ranging Limited Auto Ranging Compliance Range Fixed Range To Set the Ranging Mode The following points must be noted when setting the ranging mode If you do not specify the ranging mode the auto ranging mode is set automatically For the channels that perform Vf Vm voltage force and voltage measurement or If Im current force and current measurement the measurement range is always the same as the output range For mea
55. product for more information NOTE Safety Summary The following general safety precautions must be observed during all phases of operation service and repair of this instrument Failure to comply with these precautions or with specific warnings elsewhere in this manual may impair the protections provided by the equipment In addition it violates safety standards of design manufacture and intended use of the instrument Agilent Technologies Inc assumes no liability for customer s failure to comply with these requirements Agilent ES260 E5270 complies with INSTALLATION CATEGORY II for mains input and INSTALLATION CATEGORY I for measurement input terminals and POLLUTION DEGREE 2 defined in IEC 61010 1 Agilent ES260 E5270 is an INDOOR USE product GROUND THE INSTRUMENT This is Safety Class I instrument To minimize shock hazard the instrument chassis and cabinet must be connected to an electrical ground The power terminal and the power cable must meet International Electrotechnical Commission IEC safety standards DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE Do not operate the instrument in the presence of flammable gases or fumes Operation of any electrical instrument in such an environment constitutes a definite safety hazard KEEP AWAY FROM LIVE CIRCUITS Operation personnel must not remove instrument covers Component replacement and internal adjustments must be made by qualified maintenance personnel Do not replac
56. spot measurements to be made from the front panel High resolution analog to digital converter ADC available to all installed modules E5270B High speed analog to digital converter ADC present on each installed SMU Ground unit E5260A E5270B 4 A E5262A E5263A 2 2 A SMU AUX path switching on the Atto Sense and Switch Unit ASU BNC trigger in and trigger out connectors 16 general purpose digital I Os Program memory GPIB port for instrument control Self test self calibration diagnostics Measurement Modes The Agilent E5260 E5270 supports the following measurement modes Spot Staircase Sweep Multi Channel Sweep Pulsed Spot Pulsed Sweep Staircase Sweep with Pulsed Bias Quasi pulsed Spot Linear Search Binary Search Agilent E5260 E5270 User s Guide Edition 5 2 27 Introduction Specifications Hardware e Mainframe E5280B HPSMU E5281B MPSMU e E5287A HRSMU and E5288A ASU E5290A HPSMU E5291A MPSMU E5280B E5281B E5287A E5290A E5291A Supplemental Information Specification Conditions The measurement and output accuracies are specified at the module connector terminals when referenced to the Zero Check terminal under the following conditions 1 Temperature 23 C 5 C double for 5 to 18 C and for 28 to 40 C if not noted otherwise Humidity condition for E5270B 15 to 60 double for 60 to 70 After 40 minutes war
57. start measurement because of busy condition TMI1 must be sent to use GET Send the TM1 command to use the GPIB GET command TRIGGER statement in HP BASIC Compliance must be set correctly Compliance was not set or an incorrect compliance value was set in the DV DI PV PI PWV PWI TDV TDI LSV LSI LSSV LSSI BSV BSI BSSV or BSSI command Set the compliance value correctly Cannot perform self test or calibration Self test and calibration cannot be performed in the high voltage state Set the output voltage or the voltage compliance to 42 V or less to perform the self test or calibration Send MM before measurement trigger Before sending the measurement trigger the MM command must be sent to set the measurement mode Send WV or WI to set primary sweep source Before triggering the staircase sweep measurement triggering the staircase sweep with pulsed bias measurement or sending the WSV WSI or WNX command to set the synchronous sweep source send the WV or WI command to set the primary sweep source Send PWV or PWI to set pulse sweep source Before triggering the pulsed sweep measurement or sending the WSV or WSI command to set the synchronous sweep source send the PWV or PWI command to set the pulse sweep source Send PV or PI to set pulse source Before triggering the staircase sweep with pulsed bias measurement send the PV or PI command to set the pulse source Agilent E5260 E5270 User s Guide
58. the Agilent E5260 E5270 in the local condition Chapter 6 Function Details This chapter explains the several functions and initial settings of the Agilent E5260 E5270 Chapter 7 If You Have a Problem This chapter explains how to solve a problem if you encounter any problem and describes error codes Contents Getting Started Introduction Agilent E5260 E5270 Series occ tect teen ees 2 3 Front View og Aia 2 4 A A A A 25 Rear VA To ORIO LO O Sots 2 7 Measurement Units 0o ooooocoororr e ttn E 2 8 Compliance iii ii chad seeing nig spied ae ein airis oo 2 8 GNDU Ground Units iss sng A a eas SE 2 9 E5280B Precision HPSMU 2 0 0c cee ccc teens 2 10 E5281B Precision MPSMU 00 cee cece eens 2 13 E5287A Atto Level HRSMU 2 ccc teens 2 16 E5290A High Speed HPSMU 0 0 ccc cece teen nes 2 20 E5291A High Speed MPSMU 0 0 ccc tte nes 2 23 Specifications sia illo 2 26 Introduction a 2 26 A ARS 2 28 F nctions a A a e Coen ao Paes 2 45 General Specifications o 64tbeores Aa 2 49 Accessories and Options 0 0 cece cece cee teen eens 2 50 Installation A EAE 32 Requirements ii da 3 3 Power Requirements o ooooooooo cect A 3 3 Operating Environment 00 00 cece cece teen eens 3 3 Storaging Shipping Environment 00 c eee eee eee 3 3 Agilent E5260 E5270 User s Guide Edition 5 Contents Ventilation
59. the Agilent E5270B installed with the high resolution SMU HRSMU To use the ASU connect the ASU to the HRSMU properly The ASU adds the 1 pA range to the HRSMU If you use other instrument such as C meter connect the instrument to the AUX input The ASU provides the input selection function The internal connection can be controlled by the AUX On Off shift key See Setup 1 and 2 of Figure 6 10 When the E5270B is tured on the connection will be the Setup 1 To use the HRSMU the connection must be the Setup 1 To use the instrument connected to the AUX input change the connection to the Setup 2 In this condition the Output indicator in the front panel LCD displays the reversed triangle mark and the HRSMU cannot be used The ASU is equipped with the connection status indicator LED that shows which input is internally connected to the output Internal Connection of ASU Setup 1 AUX Off SMU input to ASU output Force From SMU Setup 2 AUX On CMU AUX input to ASU output CMU cur AUX In CMU AUX CMU pot Circuit common CMU Return 6 20 Agilent E5260 E5270 User s Guide Edition 5 NOTE NOTE Function Details Atto Sense and Switch Unit Before using ASU Instrument connection must be done before the Agilent ES270B is turned on The ASU can be used with only the HRSMU that was connected to it when the performance verification was performed See To Display Module Serial Number on page 5
60. the cursor to CONFIG then press the Enter key Move the cursor to UNIT then press the Enter key The module information is displayed Press the arrow keys to display another module information item Press the Exit key three times to close the setup menu To Display Module Serial Number 4 5 Press the Menu key Move the cursor to CONFIG then press the Enter key Move the cursor to SERIAL then press the Enter key The module serial number is displayed For the HRSMU high resolution SMU calibrated with the ASU atto sense and switch unit two serial numbers will be displayed Then the HRSMU serial number is left and the ASU serial number is right They always show the correct combination regardless of the ASU connection status The HRSMU and the ASU are available only for the Agilent E5270B Press the arrow keys to display the serial number of the other module Press the Exit key three times to close the setup menu Incorrect combination of HRSMU and ASU The combination of HRSMU and ASU is important The specifications of the ASU are guaranteed while it is connected to the exclusive HRSMU If the combination is incorrect ERROR will be displayed right of the serial number If ERROR is displayed note the ASU serial number turn the Agilent E5270B off and connect the correct ASU Agilent E5260 E5270 User s Guide Edition 5 5 13 Front Panel Operations Setting Up Agilent E5260 E5270 To Set GPIB Addr
61. the message Recover Module Press the Enter key to perform this operation or press the Exit key to cancel the operation Press the Exit key twice to close the setup menu Agilent E5260 E5270 User s Guide Edition 5 5 7 NOTE NOTE Front Panel Operations Setting Up Agilent E5260 E5270 To Perform Self Calibration 1 Open the measurement terminals of the Agilent E5260 E5270 Press the Shift key and the Menu key Move the cursor to CAL then press the Enter key Move the cursor to EXECUTE then press the Enter key Woe Ww NS Press the arrow keys to select the slot to calibrate ALL or Slot n n 1 or 2 for 2 ch mainframe to 8 for 8 ch mainframe 6 Press the Enter key to start calibration or press the Exit key to cancel calibration During calibration press the Exit key to abort it 7 Press the Exit key three times to close the setup menu To display calibration results 1 Press the Shift key and the Menu key Move the cursor to CAL then press the Enter key Move the cursor to RESULT then press the Enter key P Press the arrow keys to select the calibration item FRAME or Slot n n 1 or 2 for 2 ch mainframe to 8 for 8 ch mainframe The calibration result is displayed for each calibration item 5 Press the Exit key three times to close the setup menu To use a module that failed self calibration refer to To use modules that failed self test on page 5 7 The procedure also applies to modu
62. 0 V 10 A PN 8120 2104 Plug SR 107 2 D1 250 V 10 A PN 8120 2956 AO Plug IS 1293 and IS 6538 250 V 10 A PN 8120 4211 Plug JIS C 8303 125 V 12 A PN 8121 0743 A Plug Israel SI 32 250 V 10 A PN 8120 5182 Plug IRAM 2073 10A 250 V 10 A PN 8120 6870 Q A Plug CEI 23 16 250 V 10 A PN 8120 6978 Plug GB 1002 figure 3 250 V 10 A PN 8120 8376 Plug SANS 164 1 250 V 10 A PN 8120 4211 8121 0564 Plug TISI 166 250 V 10 A PN 8121 1866 Plug NBR 14136 250 V 10 A PN 8121 1809 Plug CNS 10917 2 125 V 10 A PN 8120 6825 8121 1635 Plug CS 0017 2003 250 V 10 A PN 8120 8871 8121 1638 Agilent E5260 E5270 User s Guide Edition 5 3 5 Installation Inspection and Installation Inspection and Installation This section describes what to do when you receive the Agilent E5260 E5270 and accessories 1 Inspect the shipment See To Inspect the Agilent E5260 E5270 and Accessories Verify the Agilent E5260 E5270 operation See To Check the Agilent E5260 E5270 Operation and To Execute Diagnostics and Self calibration After the normal condition and operation are confirmed install the Agilent E5260 E5270 in the place that satisfies the requirements described in the previous section To Inspect the Agilent E5260 E5270 and Accessories Perform the following inspections when th
63. 0 lt I lt 11 5nA 500 fA 10 fA 100 nA 0 lt I lt 115nA 5 pA 100 fA 1 yA 0 lt I lt 1 15 pA 50 pA 1pA 10 pA 0 lt I lt 11 5 uA 500 pA 10 pA 100 pA 0 lt I lt 115 pA 5nA 100 pA 1 mA 0 lt I lt 1 15 mA 50 nA 1nA 10 mA 0 lt I lt 11 5 mA 500 nA 10nA 100 mA 0 lt lt 100 mA 5 pA 100 nA a This column is applied to the auto ranging or the limited auto ranging For fixed ranging maximum measurement value is Range column value Agilent E5260 E5270 User s Guide Edition 5 2 15 Introduction Measurement Units E5287A Atto Level HRSMU This section describes typical specification of the high resolution source monitor unit HRSMU for the Agilent E5270B The E5287A and the E5288A Atto Sense and Switch Unit ASU cannot be used with the E5260A Maximum voltage current output power 100 V 100 mA 2 W Minimum range 0 5 V 10 pA 1 pA when the E5288A ASU is used Output measurement value and resolution see Table 2 5 to Table 2 8 Figure 2 5 HRSMU Output and Measurement Ranges Current mA Voltage V 2 16 Agilent E5260 E5270 User s Guide Edition 5 Introduction Measurement Units Table 2 9 HRSMU Output Voltage Ranges and Resolutions Range OutputValue esotution Current 0 5 V 0 lt V lt 0 5 V 25 uV 100 mA 2V 0 lt V lt 2V 100 uV 100 mA 5V 0 lt V lt 5V 250 uV
64. 00fA 0 12 5El Vox2E1 0 143E l Vox2E 15 100V luA SOPA 50 pA 1 pA 0 12 4E7 Vox2E 0 14 2E W vox2E 2 100V 10pA 500pA 500pA 10 pA 0 12 5E Vox2E 0 143E Vox2E 100V 100A 5nA 5nA 100pA 0 12 4E8 Vox2E 1 0 1 2E8 Vox2E 100V lmA 50nA 50 nA 1 nA 0 12 5E7 Vox2E 0 1 3E7 Vox2E 100 V 10 mA 500nA 500 nA 10 nA 0 12 4E Vox2E 0 1 Fo Vox2E 3 100 V 100mA SHA 5 uA 100 nA 0 12 5E Vox2E 0 14 3E Vox2E 5 a of output measured value fixed offset in A proportional offset in A Vo is the output voltage in V b 100 V Io lt 20 mA 40 V 20 mA lt Io lt 50 mA 20 V 50 mA lt Io Io is the output current Agilent E5260 E5270 User s Guide Edition 5 2 35 Introduction Specifications E5287A HRSMU and E5288A ASU e Voltage Range Resolution and Accuracy Refer to Table 2 25 e Current Range Resolution and Accuracy Refer to Table 2 26 For the measurement resolution minimum 1 aA display resolution at 1 pA range by 6 digits Specified measurement resolution is limited by fundamental noise limits e Power Consumption Voltage source mode Power Power Voltage Range 2 ow Voltage Range og Consumption Consumption 0 5 V Ic x 20 W 20 V Ic x 20 W 2V Ic x 20 W 40 V Ic x 40 W 5V Ic x20 W 100 V Ic x 100 W a Ic is the current compliance setting Current source mode Voltag
65. 1 A 3 26 Agilent E5260 E5270 User s Guide Edition 5 Installation Mounting Connectors To Connect the SMU Output The following figures show connection examples for the SMU output Kelvin connections non Kelvin connections Use low noise coaxial cable Agilent part number 8121 1191 from the connector to the prober socket or DUT as shown To cancel the effects of cable resistance connect the Sense line and Force line as close as possible to the DUT terminal To prevent oscillations do not use cables longer than 1 5 m To make accurate measurements when applying high currents extend the guard as far as possible from the front panel connector to the DUT Physically stabilize the cables with tape J A Triaxial connector Coaxial cable The following figure is for the connection using Kelvin triaxial cable For the connection using triaxial cable connect the cable to the Force terminal only Measurement data will include residual resistance from the connection cable Use low noise coaxial cable Agilent part number 8121 1191 To make accurate measurements when applying high currents extend the guard as far as possible from the front panel connector to the DUT Triaxial connector Agilent E5260 E5270 User s Guide Edition 5 3 27 NOTE CAUTION WARNING Installation Mounting Connectors Low Noise Coaxial Cable For the extended measurement paths over the connecto
66. 10 mA and rate is 90 they are current 9 mA current2 0 9 mA 6 8 Agilent E5260 E5270 User s Guide Edition 5 Figure 6 1 Function Details Compliance Compliance Compliance is the output limiter to prevent damage to the test device from overcurrent overvoltage or overpower Voltage compliance is for the current output channels and current compliance is for the voltage output channels When a channel reaches compliance the channel acts as a constant voltage source or a constant current source The channel keeps the output value when reaching compliance Compliance can be set with the same resolution and accuracy as output current or output voltage For the values refer to Specifications on page 2 26 Polarity and Output Area e Polarity of current compliance The Agilent E5260 E5270 automatically sets current compliance for both positive and negative polarity For opposite polarity as the output voltage the compliance value is increased by an amount that is 2 5 to 12 of the range value in the lowest range that covers the specified compliance value See Figure 6 1 e Polarity of voltage compliance The Agilent E5260 E5270 automatically sets voltage compliance to the same polarity as the output current There is no compliance for opposite polarity Relation of Compliance and Output Current Voltage A A POETES A LO LALA LL JDL DL AL AO f fe LE FAZ Compliance RSE Se
67. 5 NOTE Function Details Series Resistor Series Resistor The series resistor approx 1 MQ is mounted on each source monitor unit SMU module The series resistor may be used for the device protection negative resistance measurement and so on It depends on the characteristics of test device and measurement environment If you use a series resistor the voltage you set is applied to the near side of the series resistor Thus the voltage will be divided by the series resistor and the device under test Then the measurement data is not compensated To set the series resistor refer to To Use Series Resistor on page 5 19 In remote mode use the SSR command to set the series resistor ON or OFF Restrictions The series resistor cannot be used for the measurements that use the high resolution SMU HRSMU connected to the Atto Sense and Switch Unit ASU or the measurements that use 1 A range of the high power SMU HPSMU Agilent E5260 E5270 User s Guide Edition 5 6 23 CAUTION WARNING Function Details Interlock Function Interlock Function The interlock function is designed to prevent electrical shock when a user touches the measurement terminals If the Interlock terminal is open maximum output is limited to 42 V To perform high voltage measurement more than 42 V connect the Interlock terminal to an interlock circuit of test fixture or connector plate The interlock circuit must have one LED and two
68. 5270 User s Guide Edition 5 MeasCh Measltem AD Shift Measltem Front Panel Reference Front Panel Key Details Measure key group The Measure key group is used to set up the measurement condition and start measurement Reset Measure Output Edit Local Meas Meas Out Out Shift Exit Ch Range Ch Range SerRes AD Meas Single Item IntegTime Abort AUX On Off Filter Integ Repeat CPL VII Value Selects the measurement channel effective for the data displayed in the Meas Data area Press the MeasCh key repeatedly until the desired channel number appears in the M ch status area OUT On Fast Value Off Def Enter Value Selects the measurement item DC voltage or current both DC voltage and current resistance or power Press the MeasCh key to specify the measurement channel and press the Measltem key repeatedly until the desired measurement item appears in the Meas Data area The measurement item can be specified for each measurement channel The Agilent E5260 series does not have this shift key Available only for the Agilent E5270B This shift key operation displays the following message M ch AD Type H SPEED or H RESOLN where is or 2 for the 2 ch mainframe 1 2 or 8 for the 8 ch mainframe Press the MeasCh key to specify the measurement channel and press the arrow key to select the A D converter type H SPEED or H RESOLN Then press the Enter key to make the setup
69. 70 User s Guide Edition 5 Dimensions of the Interlock Switch Agilent part number 3101 3241 3 25 Installation Mounting Connectors To Connect the GNDU Output The following figures show connection examples for the GNDU output Kelvin connections non Kelvin connections Use a low noise coaxial cable A gilent part number 8121 1189 from the connector to the prober socket or DUT as shown To cancel the effects of cable resistance connect the Sense line and Force line as close as possible to the terminal of the DUT Coaxial cable Triaxial connector Short the Sense and Force on the connector as shown below Measurement data will include the residual resistance of the connection wire Use AWG 22 single strand insulated wire A gilent part number 8150 2639 from the connector plate to the prober socket or DUT For a quick connection where measurement accuracy is not critical connect only Force to the DUT without shorting the Sense and Force With this connection the measurement data will include residual resistance from the connection cable between the GNDU and the connector plate to DUT Triaxial connector CAUTION Use Agilent 16493L GNDU cable to connect the GNDU to your connector plate or test fixture Do not use the triaxial cable The GNDU is rated for up to 4 A E5260A E5270B or 2 2 A E5262A E5263A while the maximum current rating of the triaxial cable is
70. 8 for the 8 ch mainframe xxxxxxxxxx is the serial number of the module installed in the slot If the atto sense and switch unit ASU is connected to the high resolution SMU HRSMU the following message will be displayed Slotd XXXXXXXXXX yyyyyyyyyy where xxxxxxxxxx is the serial number of the HRSMU yyyyyyyyyy is the serial number of the ASU To display the serial number of the other module press the arrow key To return to the previous menu press the Exit key If the incorrect ASU is connected to the HRSMU The ASU can be used with only the HRSMU that was connected to it when the performance verification was performed If the incorrect ASU is connected ERROR will be displayed right of the serial number If ERROR is displayed confirm the serial number of the ASU turn the Agilent E5270B off and connect the correct ASU Agilent E5260 E5270 User s Guide Edition 5 4 21 MON_ITEM DSPL_FRMT Front Panel Reference Setup Menus Displays the sub menu that provides the following functions e ITEMI Selects the item displayed in the Setup Data 1 area ITEM2 Selects the item displayed in the Setup Data 2 area Move the cursor to the function you want to set and press the Enter key Then the following message will be displayed Monitor Item Item where is 1 for ITEM1 or 2 for ITEM2 and Jtem is one of the items listed below e OUT Source output setting of the output channel e CPL Complianc
71. Agilent E5260 Series High Speed Measurement Solutions Agilent E5270 Series Precision Measurement Solutions User s Guide ee Agilent Technologies Notices O Agilent Technologies Inc 2004 2005 2007 2009 2011 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or transla tion into a foreign language without prior agreement and written consent from Agi lent Technologies Inc as governed by United States and international copyright laws Manual Part Number E5260 90000 Edition Edition 1 October 2004 Edition 2 July 2005 Edition 3 July 2007 Edition 4 September 2009 Edition 5 August 2011 Agilent Technologies Inc 5301 Stevens Creek Blvd Santa Clara CA 95051 USA Warranty The material contained in this docu ment is provided as is and is sub ject to being changed without notice in future editions Further to the max imum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limited to the implied warranties of merchantability and fitness for a par ticular purpose Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing use or perfor mance of this document or of any information contained herein Should Agilent and the user have a separate writt
72. Connections Damages Devices after Measurement 7 4 If Measured Value Oscillates when Measuring High Frequency Devices 7 5 If Measured Value Oscillates when Measuring Negative Resistance 7 6 Agilent E5260 E5270 User s Guide Edition 5 Contents If Noise Affects the Measured Values 0 0 00 cece eee ee o 7 7 If Measured Voltage has some Error when Forcing a Large Current 7 8 If Large Current Causes High Temperature Thermal Drift 7 8 If Measurement Takes More Time than Specified o ooooooo 7 8 If Measurement Damages the Device under Test 00005 7 9 Channel Status Code ine 5 202 in eels ee IDA A eS 7 10 Error Codes A eee eae BOL kee eM lad 7 11 Operation Error casas eek ese eee ea Se ee a 7 11 Self test Calibration Error 0 0 0 cece eens 7 20 Agilent E5260 E5270 User s Guide Edition 5 Getting Started Getting Started This chapter describes the basic operations of the Agilent ES260 E5270 Before learning details of the Agilent E5260 E5270 let s try to use the Agilent E5260 E5270 briefly The operations need the Agilent E5260 E5270 and power cable only During the operations open the measurement terminals Basic Operations 1 Soy Y gt a 1 2 Turning on the Agilent E5260 E5270 Setting up SMU1 forcing DC voltage and measuring DC current Setting up SMU2 forcing DC voltage and measuring DC current
73. Description 16442B Test Fixture 16442B 010 Add 1 5 m triaxial cables 4 ea 16442B 011 Add 3 0 m triaxial cables 4 ea 16442B 800 Extra blank PTFE board 16442B 801 Universal socket module 0 1 inch pitch with 10 pins 16442B 802 Universal socket module 0 075 inch pitch with 10 pins 16442B 803 Universal socket module 0 05 inch pitch with 10 pins 16442B 810 Extra pin set for universal socket module 10 pins 16442B 811 Extra wire set mini banana to pin plug 6 ea 16442B 812 Extra wire set pin plug to pin plug 6 ea 16442B 813 Extra wire set mini banana to mini clip 6 ea 16442B 814 Extra wire set mini banana to mini banana 6 ea 16442B 821 Socket module 4 pin TO package 16442B 822 Socket module 18 pin DIP package 16442B 823 Extra socket module 28 pin DIP package 16442B 890 Extra accessory case 16493G Digital I O Connection Cable 16493G 001 1 5 m length 16493G 002 3 0 m length 164935 Interlock Cable 16493J 001 1 5 m length 16493J 002 3 0 m length 16493K Kelvin Triaxial Cable E5260 E5270 Kelvin to E5260 E5270 Kelvin 16493K 001 1 5 m length 16493K 002 3 0 m length 16493L GNDU Cable for E5260 E5270 series 16493L 001 1 5 m length 16493L 002 3 0 m length Agilent E5260 E5270 User s Guide Edition 5 2 53 Introduction Accessories and Options al Option Item Description 16493M Tria
74. E Front Panel Operations Applying Source Output To Apply DC Current Voltage The following procedure applies a DC bias using a source channel To use multiple source channels perform the procedure for all source channels 1 Press the OutCh key repeatedly to specify the source channel The channel number must appear in the S ch status area 2 Confirm that the Output status indicator does not show the output enable status If the source output has been enabled press the On Off key This disables the source output 3 Press the OutRange key to select the output range See To Set Output Range on page 5 18 4 Press the Shift key and the On Off key if you are using a series resistor See To Use Series Resistor on page 5 19 5 Press the Shift key and the V I key if you are using a filter See To Use Filter on page 5 19 6 Ifyou are using the Agilent E5270B installed with the high resolution SMU HRSMU and if you want to change the internal connection of the ASU Atto Sense and Switch Unit see To Switch ASU Internal Connection on page 5 20 7 Press the OUT Value key or the CPL Value key to set the source output value or the compliance value See To Set Output Compliance Value on page 5 17 8 Press the On Off key to enable the source output To change the source output value or the compliance value during source output see To Set Output Compliance Value on page 5 17 To stop source output
75. E5260 E5270 User s Guide Edition 5 4 19 CONFIG Front Panel Reference Setup Menus Displays the sub menu that provides the following functions ADDRESS Displays the following message GPIB Address Address Press the arrow key to set the desired GPIB address Then press the Enter key to make the setup effective or press the Exit key to cancel changing the setup JINEFREO Displays the following message Line Frequency 50Hz or 60Hz Press the arrow key to select the power line frequency 50 Hz or 60 Hz Then press the Enter key to make the setup effective or press the Exit key to cancel changing the setup REVISION Displays the following message FW XXXXX AD YYYY where X_XX_XX shows the firmware revision and YY YY shows the revision number of the A D converter ADC controller To return to the previous menu press the Exit key UNIT Displays the following message Slot model n description where is 1 or 2 for the 2 ch mainframe 1 2 or 8 for the 8 ch mainframe model is the model number n is the revision number and description is the module description To display another message press the arrow key To return to the previous menu press the Exit key 4 20 Agilent E5260 E5270 User s Guide Edition 5 NOTE Front Panel Reference Setup Menus e SERIAL Displays the following message Slot XXXXXXXXXX where is 1 or 2 for the 2 ch mainframe 1 2 or
76. If Measurement Takes More Time than Specified e If Measurement Damages the Device under Test If Leaving Connections Damages Devices after Measurement After the measurements open the measurement terminals or disconnect the device under test from the measurement terminals If you leave the connection with the device the device may be damaged by unexpected operations Do not leave the connection over 30 minutes after the measurement if the auto calibration is set to ON Then the E5260 E5270 performs the self calibration automatically every 30 minutes after the measurement The calibration requires to open the measurement terminals 7 4 Agilent E5260 E5270 User s Guide Edition 5 If You Have a Problem When You Make a Measurement If Measured Value Oscillates when Measuring High Frequency Devices When measuring parameters of high frequency devices such as GaAs MESFETs or high frequency bipolar transistors oscillation may cause measurement problems Normal measurement cannot be performed because of oscillation To solve this problem For FETs add resistive ferrite beads as close as possible to the gate e For bipolar transistors add resistive ferrite beads as close as possible to the base or emitter e Make connection cables as short as possible Long wires cause oscillation because of their large inductance Test Device To unit TN i i B To Unit ASAS q ECON MMM UNA I Agilent E5260 E5270 Use
77. Model Option Item Connectors 16495F 16495F 001 Triax f f x12 GNDU f x1 Interlock f x1 16495F 002 Triax f x12 GNDU f x1 Interlock f x1 16495G 16495G 001 Triax f f x24 GNDU f f x1 Interlock f x1 16495G 002 Triax f x24 GNDU f x1 Interlock f x1 16495H 16495H 001 Triax f f x6 Coax f f x6 GNDU f f x1 Interlock f x1 16495H 002 Triax f x6 Coax f x6 GNDU f x1 Interlock f x1 16495J 16495J 001 Triax f f x8 Coax f f x4 GNDU f f x1 Interlock f x1 16495J 002 Triax f x8 Coax f x4 GNDU f x1 Interlock f x1 16495K 16495K 001 Connector plate for ASU Option 001 provides the through connectors except for the Interlock connector that provides the soldering patterns at the back side For the option 002 the back of each connector is designed for soldering Making non Kelvin connection The Force terminals can be used to force and measure DC voltage or current If you want to simplify the cable connections open the Sense terminals and connect the Force terminals only to the connector plate by using the triaxial cables If you make the kelvin connection use both Force and Sense terminals Connecting the Force and Sense lines together at the terminal of the device under test minimizes the measurement error caused by the residual resistance of the connection cables The kelvin connection is effective for th
78. Mount your DUT on the socket module 4 Connect between the socket module and the test fixture by using the proper test leads 5 Close the lid of the test fixture To force more than 42 V close the lid of the test fixture Otherwise the interlock function will stop the Agilent E5260 E5270 output To connect between the socket module and the test fixture you can use test leads that have the following terminals e Miniature banana to miniature banana e Miniature banana to pin plug e Miniature banana to miniature clip Do not connect or disconnect your DUT while the Agilent E5260 E5270 is forcing voltage or current Otherwise your DUT may be damaged Do not touch the terminals of the test leads Oil perspiration and dirt prevent good electrical contact deteriorate insulation and degrade measurement accuracy 3 30 Agilent E5260 E5270 User s Guide Edition 5 Installation Connecting Measurement Devices Connections for High Current Measurements When you force or measure a large current you may want to use a Kelvin 4 wire connection to eliminate the residual resistance effects of test leads and contacts For example you can use the following connections as Kelvin connections on the test fixture Examples Kelvin Connection SMU 200V 1A Max 1 2 3 Selected AN DN Force Q Sense Q Sense Q Y A pd Gua rdO To cancel the effect
79. Press the Enter key to make the setup effective or press the Exit key to cancel changing the setup 6 Move the cursor to MEASURE to set the measurement wait time then press the Enter key 7 Press the arrow keys to set the N value shown in the formula below 8 Press the Enter key to make the setup effective or press the Exit key to cancel changing the setup 9 Press the Exit key twice to close the setup menu The measurement wait time is the time the measurement channel always waits before starting measurement The source wait time is the time the source channel always waits before changing the output value Each wait time is given by the following formula wait time N x reference where reference is the wait time the Agilent E5260 E5270 automatically sets this wait time cannot be changed Available N values are 0 0 to 10 0 The initial value is 1 0 It is not easy to determine the best wait time If you specify it too short the measurement may start before device characteristics stable If too long time will be wasted The initial wait time may be too short for measurements of high capacitance or slow response devices Then set the wait time longer For measurements of low capacitance or fast response devices if measurement speed has top priority or is more important than reliability and accuracy set the wait time shorter Agilent E5260 E5270 User s Guide Edition 5 5 27 Front Panel Operations Making Measurement
80. Requirements ooo ooooooooooroor ttt eens 3 4 Power Cable a A oa aes ce ee 3 4 Inspection and Installation 00 0 ccc teens 3 6 To Inspect the Agilent E5260 E5270 and Accessories 02045 3 6 To Check the Agilent E5260 E5270 Operation 000 0 eee eee 3 7 To Execute Diagnostics and Self calibration 0 0 00 eee eee 3 7 To Remove or Install Plug in Module 2 0 0 cece cece eee 3 8 Installing Accessorie Senee e A AS 3 10 To Connect 16442B Test Fixture o ooooooocoocoorr ee ene 3 11 To Connect Connector Plate 00 0 eee 3 13 A da hs in va Dans or 3 15 To Connect ASUS ceed Saeed da Ua ae ati Seas Salus eres be 3 16 To Connect GNDU Adapter 0 0 00 ccc eee eens 3 20 Mounting Connectors 20 0 cect een par Aas 3 21 To Make an Interlock Circuit 0 20 0 cece 3 23 To Connect the GNDU Output 20 00 00 eee 3 26 To Connect the SMU Output 0 0 eee eee eee 3 27 Connecting Measurement Devices nuunuu ccc eee eee eee ee eens 3 29 Using Test Fixte ssd ires be RS 7 A A TES Re eee 3 30 Using Connector Plate oinera ee tenn eens 3 32 Maintenance seinri resna Ahead oie ee nid eed EEE a 3 36 Calibracion 3 36 CA A A a GetPos 3 36 Self test and Diagnostics 0 ccc rr 3 37 4 Front Panel Reference Display and Front Panel Keys 00 0 eee eee eee eee nee 4 3 Display Images is yds seh bbe US Ais ee lea ge 4 3 Front Panel Key Locat
81. The measurement wait time is the time the measurement channel always waits after the source channel starts the output until the measurement channel starts the measurement Refer to Figure 4 1 The wait time is given by the following formula wait time N x reference where reference is the wait time the Agilent E5260 E5270 automatically sets according to the present settings this wait time cannot be changed Available N values are 0 to 10 0 1 step The initial value is 1 If you specify it too short the measurement may start before device characteristics stable if too long time will be wasted Press the arrow key to set the N value Then press the Enter key to make the setup effective or press the Exit key to cancel changing the setup The settings are effective for all modules Source Measurement Wait Time 1 Local mode 2 Remote mode Measurement wait time Source wait time hee Source wait time mu Measurement Delay time Measurement wait time Hold time Step delay time ss A AIIIIMIMIZIPIAI gt Time In the local mode you cannot set the hold time delay time and step delay time They are automatically set to 0 s In the remote mode if the delay time is longer than the wait time the wait time can be ignored Agilent E5260 E5270 User s Guide Edition 5 4 23 ERROR RMT_DSPL BEEP Front Panel Reference Setup Menus Displays the sub menu that provides the following functions e DISPLAY Displays
82. The prober vender will have the solutions Dimensions of the ASU are 132 mm W x 88 5 mm H x 50 mm D excluding the connectors Image of ASU Installation Shielding box CMU Return CMU Reta DUT interface 16495K 16495K Prober To E5270B 4284A e Agilent 16495K Connector plate Agilent 16493M ASU cable Agilent 16048D E test leads e Agilent N1254A 108 Magnet stand BNC cable coaxial cable manipulator wire and so on Fix the 16495K plate to the shielding box or something that will cover the DUT interface See Agilent 16495 Installation Guide The 16495K is the plate that has the mechanism to block the light from the cable hole used to pass the cables in the shielding box 3 16 Agilent E5260 E5270 User s Guide Edition 5 To install ASU To connect E5270B NOTE To connect other instrument to AUX 1 2 3 Installation Installing Accessories Fix the ASU in the shielding box The ASU must be fixed to the best position for accessing its connectors The Agilent N1254A 108 Magnetic Stand will be useful for fixing the ASU Pass the 16493M D sub cable triaxial cable 16048D E test leads BNC cable and so on through the cable hole of the 16495K They will be connected between the ASU and the instruments Connect the D sub cable to the ASU D sub connector Connect the triaxial cable to the ASU Force terminal Connect the cable to the ASU CMU cur AUX In terminal See Figure 3 4 For the Agile
83. Trig In and Out connectors Then press the Enter key to start diagnostics or the Exit key to return to the previous menu Connect In to Out then press Enter Press Exit to abort For the next message press any front panel key DIAG KEY Press any key OK Enter twice or NG Exit twice Then the message will be changed as shown below DIAG KEY label OK Enter twice or NG Exit twice where label must be the name of the key you pressed Press another key to continue the key diagnostics Press the Enter key twice if all responses were good or press the Exit key twice if any response was bad HV LED For the next message press the Enter key ifthe High Voltage LED is blinking or press the Exit key if the LED does not blink DIAG HV LED Is the LED blinking YES Enter or NO Exit DGTL I O For the next message disconnect any cable from the digital I O port Then press the Enter key to start the diagnostics or press the Exit key to return to the previous menu Open DGTL I 0 then press Enter Press Exit to abort BEEPER For the next message press the Enter key to hear two types of beep sounds every second or press the Exit key for no beep sounds DIAG BEEP Is beeper making 2 sounds YES Enter or NO Exit 4 30 Agilent E5260 E5270 User s Guide Edition 5 V_RANGE IRANGE NOTE Front Panel Reference Setup Menus Measurement Range Setup Menu Press th
84. U a high speed MPSMU and a GNDU Agilent E5260 E5270 User s Guide Edition 5 2 3 Introduction Front View Front View This section describes the front view of the Agilent ES260 E5270 series XE Agent Technologies ES2708 CA AA C 1 23456mA 1 23456mV OUT 1 234mV 1 CPL 1 234mA US XE Agilent XE Agilent 52808 52818 e Line switch Use the Line switch to turn the E5260 E5270 on and off e LCD Displays the status information measurement data source output data and so on For details refer to Chapter 4 Front Panel Reference Front panel keys Use the front panel keys to set the source output to perform measurement and so on For details refer to Chapter 4 Front Panel Reference HIGH VOLTAGE indicator This indicator lights when a channel applies more than 42 V GNDU terminal 0 V constant voltage source Used for the reference of measurement ground Triaxial connector Refer to GNDU Ground Unit on page 2 9 2 4 Agilent E5260 E5270 User s Guide Edition 5 CAUTION CAUTION WARNING WARNING Introduction Front View e Zero Check terminal Ground reference point of the E5260 E5270 The Zero Check terminal can be used for the service purpose only For the normal operation leave this terminal open and do not connect anything to this terminal Connecting anything can damage the E5260 E5270 e Circuit Common Y and Frame ground rh term
85. V 50 mA lt I lt 115 mA SuA 20 V 200 mA 0 lt I lt 20 mA 10 pA 100 V 20 mA lt I lt 50 mA 10 uA 40 V 50 mA lt I lt 200 mA 10 pA 20V 2 24 Agilent E5260 E5270 User s Guide Edition 5 Table 2 19 Table 2 20 MPSMU Measurement Voltage Values and Resolutions Introduction Measurement Units Range Measurement Value Measurement Resolutions 2V 0 lt V lt 2 2 V 100 uV 20 V 0 lt V lt 22V 1 mV 40 V 0 lt V lt 44V 2 mV 100 V 0 lt V lt 100 V 5mV MPSMU Measurement Current Values and Resolutions Range Measurement Value Measurement Resolutions 100 nA 0 lt I lt 115 nA 5pA 1 uA 0 lt I lt 1 15 uA 50 pA 10 pA 0 lt I lt 11 5 uA 500 pA 100 uA 0 lt I lt 115 uA 5nA 1 mA 0 lt I lt 1 15 mA 50 nA 10 mA 0 lt I lt 11 5 mA 500 nA 100 mA 0 lt I lt 115 mA 5 uA 200 mA 0 lt I lt 200 mA 10 pA a This column is applied to the auto ranging or the limited auto ranging For fixed ranging maximum measurement value is Range column value Agilent E5260 E5270 User s Guide Edition 5 2 25 NOTE Introduction Specifications Specifications This chapter lists specifications and supplemental information for the Agilent E5260 E5270 and its associated modules The specifications are the standards against which the E5260 E5270 and its associated modules are tested When the E5260 E5270 or
86. ait time is given by the following formula wait time N x reference where reference is the wait time the Agilent E5260 E5270 automatically sets according to the present settings this wait time cannot changed Available N values are 0 to 10 0 1 step Initial value is 1 It is not easy to determine the best wait time If you specify it too short the measurement may start before device characteristics stable If too long time will be wasted For measurements of low capacitance or fast response devices if measurement speed has top priority or is more important than reliability and accuracy set the wait time shorter The initial wait time may be too short for measurements of high capacitance or slow response devices Then set the wait time longer Source Measurement Wait Time 1 Local mode 2 Remote mode Measurement wait time Source wait time Source wait time m Measurement Delay time Measurement wait time Hold time Step delay time gt gt Time In the local mode you cannot set the hold time delay time and step delay time They are automatically set to 0s In the remote mode if the delay time is longer than the wait time the wait time can be ignored Agilent E5260 E5270 User s Guide Edition 5 6 19 Figure 6 10 Function Details Atto Sense and Switch Unit Atto Sense and Switch Unit The Agilent E5260 series cannot use the Atto Sense and Switch Unit ASU The ASU is available for
87. ange Output Value nea i a 2V 0 lt V lt 2V 100 uV 1000 mA 20 V 0 lt V lt 20V 1 mV 1000 mA 40 V 0 lt V lt 40V 2 mV 500 mA 100 V 0 lt V lt 100 V 5 mV 125 mA 200 V 0 lt V lt 200 V 10 mV 50 mA HPSMU Output Current Ranges and Resolutions Range Output Value ana i pea 1 nA 0 lt I lt 1 15 nA 50 fA 200 V 10 nA 0 lt I lt 11 5 nA 500 fA 200 V 100 nA 0 lt I lt 115 nA 5pA 200 V 1 yA 0 lt JI lt 1 15 pA 50 pA 200 V 10 pA 0 lt I lt 11 5 uA 500 pA 200 V 100 uA 0 lt I lt 115 uA 5nA 200 V 1 mA 0 lt I lt 1 15 mA 50 nA 200 V 10 mA 0 lt lt 11 5 mA 500 nA 200 V 100 mA 0 lt I lt 50 mA 5 uA 200 V 50 mA lt I lt 115 mA 5 uA 100 V 1A 0 lt I lt 50 mA 50 uA 200 V 50 mA lt I lt 125 mA 50 pA 100 V 125 mA lt I lt 500 mA 50 uA 40 V 500 mA lt I lt 1A 50 pA 20 V Agilent E5260 E5270 User s Guide Edition 5 Introduction Measurement Units Table 2 3 HPSMU Measurement Voltage Values and Resolutions T Me asurem ent Measurement Resolutions Value High Speed ADC High Resolution ADC 2V 0 lt V lt 2 2 V 100 uV 2 uV 20 V 0 lt V lt 22V 1 mV 20 uV 40 V 0 lt V lt 44V 2 mV 40 nV 100 V 0 lt V lt 110 V 5mV 100 uV 200 V 0 lt V lt 200 V 10mV 200 uV Table 2 4 HPSMU Measurement Current Values and Resolutions Measurement Resolutions Range Measurement Value High Sp
88. applying AC line power to the Agilent E5260 E5270 ensure that the correct power cable is used In accordance with international safety standards this instrument is equipped with a three prong power cable When connected to an appropriate AC power outlet this cable grounds the instrument frame The type of power cable shipped with each instrument depends on the country of destination Refer to the following table for the Agilent part numbers of the power cables available If the plug on the cable does not fit the power outlet or the cable is to be attached to a terminal block cut the cable at the plug end and re wire it This work should be performed by a qualified electrician observing all local electrical codes The color coding used in the cable will depend on the cable supplied If a new plug is to be connected it must meet local safety requirements and include the following features e adequate load carrying capacity see Specifications on page 2 26 e ground connection e cable clamp For protection from electrical shock do not interrupt the power cable ground 3 4 Agilent E5260 E5270 User s Guide Edition 5 Installation Requirements Plug BS 1363 A 250 V 10 A PN 8120 4420 Plug AS 3112 250 V 10 A PN 8120 4419 Plug CEE 7 sheet VII 250 V 10 A PN 8120 4519 Plug NEMA 5 15P 125 V 10 A PN 8120 6825 Plug NEMA 6 15P 250 V 10 A PN 8120 3996 8120 0698 Plug SEV 1011 25
89. at you specified For example if you select 10 mA limited auto ranging the measurement unit does not use the 1 mA range or less Consequently the measurement time for limited auto ranging is less than for auto ranging Fixed Range The channel uses the specified range only For the current measurement channel if you specify a range higher than the compliance range the measurement channel uses the compliance range See Compliance Range on page 6 7 Compliance Range The compliance range is effective for the Vf Im voltage output and current measurement or If Vm current output and voltage measurement channel The measurement channel automatically selects and uses the lowest range that covers the specified compliance value For the measurement channel that performs source output set by the DI or DV command you can set the compliance ranging type If you set it to limited auto ranging the channel does not use a range less than the specified range For the measurement channel that performs sweep output you can set the power compliance value If you set the power compliance value the channel uses the lowest range that covers the lower value of either the specified compliance value or the compliance value given by the following formula Current compliance Specified power compliance value Step voltage Voltage compliance Specified power compliance value Step current For details about setting compliance refer to Complia
90. bration For the service purpose execute the RCV command to enable the module No module for the specified channel Module is not installed in the slot specified by the channel number Incorrect ST execution The internal memory programming can be started by the ST command and completed by the END command Do not enter the ST command between the ST command and the END command Incorrect END execution The internal memory programming can be started by the ST command and completed by the END command Do not send the END command before starting the programming Incorrect command for program memory Specified command cannot be stored in the program memory For the incorrect commands refer to Table 2 1 in Programming Guide Agilent E5260 E5270 User s Guide Edition 5 170 171 200 201 202 203 204 205 If You Have a Problem Error Codes Incorrect usage of internal variable The internal variable must be ln for integer data or Ru for real data where n is an integer 0 to 99 Use ln for the integer type command parameters and use Rn for the real type command parameters For the internal variables refer to VAR command in Programming Guide Internal variable is not allowed The internal variables In and kRhn are not available for the ACH VAR and VAR commands Do not use the internal variables for the commands Channel output switch must be ON To enter the specified command set the channe
91. ches were set to OFF Unsupported module This module is not supported by this firmware version Until you update the firmware use the Agilent E5260 E5270 with this module removed Interlock open operation error Initialized Initialization was automatically performed because the E5260 E5270 failed to set its output to 0 V when the interlock circuit was opened in the high voltage condition Any module may be defective Perform self test ASU control cable was connected disconnected The E5270B must be turned off when the Atto Sense and Switch Unit ASU is connected disconnected Sweep and pulse channels must be different Set the sweep source and the pulse source to different channels for the staircase sweep with pulsed bias measurement MMS Quasi pulse source channel must be set Before triggering the quasi pulsed spot measurement send the BDV command to set the quasi pulse source Agilent E5260 E5270 User s Guide Edition 5 7 17 If You Have a Problem Error Codes 620 621 622 630 631 632 640 650 655 TGP specified incorrect I O port Specify trigger input for the Ext Trig In port or trigger output for the Ext Trig Out port by the TGP command Refer to TGP command in Programming Guide Specify trigger input port for PAX WSX No trigger input port was specified for the PAX or WSX command Specify the trigger input port or set the port as the trigger input port Refer to TGP
92. column value 2 22 Agilent E5260 E5270 User s Guide Edition 5 Introduction Measurement Units E5291A High Speed MPSMU This section describes typical specification of the medium power source monitor unit MPSMU for the Agilent ES260A The E5291A cannot be used with the E5270B Maximum voltage current output power 100 V 200 mA 4 W e Minimum range 2 V 100 nA Output measurement value and resolution see Table 2 5 to Table 2 8 Figure 2 7 MPSMU Output and Measurement Ranges Current mA Voltage V Agilent E5260 E5270 User s Guide Edition 5 2 23 Introduction Measurement Units Table 2 17 MPSMU Output Voltage Ranges and Resolutions Range Gupit Valis paar omar 2V 0 lt VW lt 2V 100 uV 200 mA 20 V 0 lt V lt 20 V 1 mV 200 mA 40 V 0 lt V lt 20 V 2 mV 200 mA 20 V lt V lt 40 V 2 mV 50 mA 100 V 0 lt V lt 20 V 5 mV 200 mA 20 V lt V lt 40 V 5mV 50 mA 40 V lt V lt 100 V 5mV 20 mA Table 2 18 MPSMU Output Current Ranges and Resolutions Range Output Value aa n e 100 nA 0 lt Jl lt 115 nA 5pA 100 V 1 yA 0 lt lt 1 15 uA 50 pA 100 V 10 pA 0 lt I lt 11 5 pA 500 pA 100 V 100 uA 0 lt lt 115 uA 5nA 100 V 1 mA 0 lt I lt 1 15 mA 50 nA 100 V 10 mA 0 lt lt 11 5 mA 500 nA 100 V 100 mA 0 lt I lt 20 mA 5 uA 100 V 20 mA lt I lt 50 mA 5 uA 40
93. ctive for the low voltage measurement Disable the function in cases where measurement speed is more important than measurement accuracy This approximately halves the integration time Agilent E5260 E5270 User s Guide Edition 5 5 11 Front Panel Operations Setting Up Agilent E5260 E5270 To Read Error Message 1 Press the Menu key 2 Move the cursor to ERROR then press the Enter key 3 Move the cursor to DISPLAY then press the Enter key to display the message 4 Press the arrow keys to read another error message A maximum of four error messages can be stored 5 Press the Exit key three times to close the setup menu To clear error buffer Uk E O a Press the Menu key Move the cursor to ERROR then press the Enter key Move the cursor to CLEAR then press the Enter key Press the arrow key to select YES for the message Clear Error Buffer Press the Enter key to clear the error buffer or press the Exit key to cancel operation Press the Exit key twice to close the setup menu To Display Firmware Revision Press the Menu key Move the cursor to CONFIG then press the Enter key Move the cursor to REVISION then press the Enter key The firmware revision is displayed Press the Exit key three times to close the setup menu 5 12 Agilent E5260 E5270 User s Guide Edition 5 NOTE Front Panel Operations Setting Up Agilent E5260 E5270 To Display Module Information Press the Menu key Move
94. e 5000 pF E5280B E5281B E5287A E5290A E5291A 3500 pF E5287A with ASU e Maximum guard offset voltage 1 mV E5280B E5290A E5291A 3 mV E5281B E5287A 4 2 mV E5287A with ASU Tout lt 100 uA e Noise characteristics filter ON Voltage source 0 01 of V range rms Current source 0 1 of I range rms e Overshoot filter ON Voltage source 0 03 of V range Current source 1 of I range e Range switching transient noise filter ON Voltage ranging 250 mV Current ranging 10 mV e Slew rate 0 2 V us maximum SMU pulse setting accuracy fixed measurement range Width 0 5 50 us Period 0 5 100 us Trigger output delay pulsed measurements 0 to 32 7 ms with 100 us resolution Trigger output delay must be less than pulse width 2 44 Agilent E5260 E5270 User s Guide Edition 5 Introduction Specifications Functions Front Panel Operations Display e Display error messages e Display spot measurement set value Display spot measurement result Keypad Operations Set GPIB address Set local remote mode e Select measurement channel Set spot measurement set value ASU input SMU AUX switching E5270B e Start calibration diagnostics MPSMU and HPSMU Measurement Mode Details Spot Measurement Applies voltage or current then measures voltage or current A maximum of eight measurement channels can be used Staircase Sweep Measurement Applies staircase sweep voltage or cur
95. e 2 ch mainframe 1 2 or 8 for the 8 ch mainframe and Mode is the output ranging mode AUTO FIX xA or LIM xA Then x indicates the range value Available values depend on the module AUTO means auto ranging FIX means fixed range and LIM means limited auto ranging Also uA means uA Press the arrow key to select the output ranging mode Then press the Enter key to make the setup effective or press the Exit key to cancel changing the setup 4 32 Agilent E5260 E5270 User s Guide Edition 5 Front Panel Operations NOTE NOTE Front Panel Operations This chapter explains how to use the Agilent E5260 E5270 in the local mode e Available Functions e Setting Up Agilent E5260 E5270 Applying Source Output e Making Measurement Local Key Front panel operation is available when the Agilent E5260 E5270 is being set to local mode Press the Local key to change the condition to local Measurement Mode The Agilent E5260 E5270 supports the following measurement mode e High Speed Spot Measurement Spot Measurement e Staircase Sweep Measurement e Multi Channel Sweep Measurement e 1 Channel Pulsed Spot Measurement e Pulsed Sweep Measurement e Staircase Sweep with Pulsed Bias Measurement e Quasi pulsed Spot Measurement Linear Search Measurement Binary Search Measurement The measurement modes are available when the Agilent E5260 E5270 is being set to GPIB remote condition
96. e Accuracy Same as the current or voltage set accuracy Agilent E5260 E5270 User s Guide Edition 5 2 41 Introduction Specifications Table 2 29 Voltage Range Resolution and Accuracy E5291A Force Measurement Force Accuracy Measurement Accuracy Maximum Voltage Range E Resolution mv t mV Current 2V 100 uV 0 03 0 9 0 03 0 7 200 mA 20V 1 mV 0 03 4 0 03 4 200 mA 40 V 2mV 0 03 7 0 03 8 b 100 V 5mV 0 04 15 0 03 20 a of output measured value offset value in mV b 200 mA Vo lt 20 V 50 mA 20 V lt Vo lt 40 V 20 mA 40 V lt Vo Vo is the output voltage Table 2 30 Current Range Resolution and Accuracy E5291A Current Force Measurement Force Accuracy Measurement Accuracy Maximum Range Resolution A A A A Voltage 100 nA 5 pA 0 12 5E Vpx5E 0 1 3E Vpx5E 1 100 V 1 pA 50 pA 0 12 4E Vpx5SE 0 1428 Vpx5E 100 V 10 uA 500 pA 0 12 5E Vpx5E 9 0 14 3E Vpx5E 9 100 V 100 pA 5 nA 0 12 4E8 Vpx5E 0 14 2E Vpx5E 100 V 1mA 50 nA 0 12 5E7 Vpx5E 0 1 3E7 Vpx5E 100 V 10 mA 500 nA 0 12 4E9 Vpx5E 0 14 2E Vpx5E 100 V 100 mA 5 pA 0 12 5E Vpx5E 0 1 3E Vpx5E b 200 mA 10 pA 0 12 1E4 Vpxx1E gt 0 1 6E
97. e Agilent E5260 E5270 and accessories arrive at your site 1 Before unpacking any components inspect all boxes for any signs of damage that might have occurred during shipment such as e dents e scratches e cuts water marks If you suspect any damage notify your local Agilent Technologies sales or service office When you open the boxes that contain the Agilent E5260 E5270 and accessories check the components against the contents lists attached to the boxes If anything is missing notify your local Agilent Technologies sales or service office 3 6 Agilent E5260 E5270 User s Guide Edition 5 WARNING Figure 3 1 Installation Inspection and Installation To Check the Agilent E5260 E5270 Operation 1 Make sure that the Line switch is set to off 2 On the Agilent E5260 E5270 front panel connect the Circuit Common terminal to the frame ground terminal by using a shorting bar If the Circuit Common terminal is not connected to the frame ground terminal for floating measurement a potential shock hazard may present Do not touch any of measurement circuit at any time while a floating measurement is in progress 3 Connect the power cable from the Agilent E5260 E5270 to an AC power outlet 4 Press the Line switch to turn on the Agilent E5260 E5270 The initialization screen will appear on the display of the Agilent E5260 E5270 And the power on self test is automatically executed If the Agilent
98. e Compliance Power Consumption Ve lt 20V lo x 20 W 20V lt Vcx lt 40 V lo x 40 W 40V lt Vc lt 100 V lo x 100 W a Vc is the voltage compliance setting b Io is the output current e Output terminal connection Triaxial connector Kelvin remote sensing e Voltage Current Compliance Limiting Voltage Compliance 0Vto 100V Current Compliance 10 fA to 100 mA with ASU 100 fA to 100 mA without ASU Compliance Accuracy Same as the current or voltage set accuracy 2 36 Agilent E5260 E5270 User s Guide Edition 5 Introduction Specifications Table 2 25 Voltage Range Resolution and Accuracy E5287A Measurement Resolution PAEAS UT EMEN ACCURACY t mV Voltage Force Force Accuracy Maximum Range Resolution Hish Speed id mV High Speed High Resolution C rrent ADC ADC ADC ADC 05V 25uV 25 uv 0 5uV 0 02 0 15 0 01 0 25 0 01 0 15 100 mA 2V 100u4V 1004V 2 uV 0 02 0 4 0 01 0 7 0 01 0 2 100mA 5V 250 uV 250 uV Suv 0 02 0 75 0 01 2 0 01 0 25 100 mA 20V 1mV 1mV 20 uV 0 02 3 0 01 4 0 01 1 100 mA 40 V 2mV 2mV 40 uV 0 025 6 0 015 8 0 015 2 b 100 V 5mV 5mV 100 uV 0 03 15 0 02 20 0 02 5 a of output measured value offset value in mV
99. e E5270B performs the data compensation by using the pre stored offset data Agilent E5260 E5270 User s Guide Edition 5 4 27 SELFTEST Front Panel Reference Setup Menus Displays the sub menu that provides the following functions EXECUTE Displays the following message Selftest ALL Press the arrow key to select the test item Then press the Enter key to start the self test or press the Exit key to return to the previous menu without performing the self test During the self test the following message will be displayed Press Exit to abort Then press the Exit key to abort the self test Or wait until the self test is completed and the following message is displayed Selftest Pass or Fail Press the Exit key to return to the previous menu e RESULT Displays the following message FRAME Pass or Fail Error No Press the arrow key to display the result of another slot as shown below Slot Pass or Fail Error No where is 1 or 2 for the 2 ch mainframe 1 2 or 8 for the 8 ch mainframe and Error No is the error number Press the Exit key to return to the previous menu e RECOVER Displays the following message Recover Module YES Then press the Enter key to use the failed modules or press the Exit key to cancel this operation 4 28 Agilent E5260 E5270 User s Guide Edition 5 DIAG Front Panel Reference Setup Menus Displays the sub men
100. e MeasRange key to display the measurement range setup menu The measurement range setup menu is displayed in the Change Setup area as shown below The menu is used to set the voltage measurement ranging mode V_RANGE or the current measurement ranging mode I_ RANGE 123 456mA 1 23456mV OUT 123 4mV V_RANGE I RANGE Press the arrow key to move the cursor to the desired function name Then press the Enter key Displays the following message M ch Meas Range Mode where is or 2 for the 2 ch mainframe 1 2 or 8 for the 8 ch mainframe and Mode is the measurement ranging mode AUTO FIX xV or LIM xV Then x indicates the range value Available values depend on the module AUTO means auto ranging FIX means fixed range and LIM means limited auto ranging Press the arrow key to select the measurement ranging mode Then press the Enter key to make the setup effective or press the Exit key to cancel changing the setup Displays the following message M ch Meas Range Mode where is 1 or 2 for the 2 ch mainframe 1 2 or 8 for the 8 ch mainframe and Mode is the measurement ranging mode AUTO FIX xA or LIM xA Then x indicates the range value Available values depend on the module AUTO means auto ranging FIX means fixed range and LIM means limited auto ranging Also uA means pA Press the arrow key to select the measurement ranging mode Then press the Enter key to make the setup ef
101. e components with power cable connected Under certain conditions dangerous voltages may exist even with the power cable removed To avoid injuries always disconnect power and discharge circuits before touching them DO NOT SERVICE OR ADJUST ALONE Do not attempt internal service or adjustment unless another person capable of rendering first aid and resuscitation is present e DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Because of the danger of introducing additional hazards do not install substitute parts or perform any unauthorized modification to the instrument Return the instrument to a Agilent Technologies Sales and Service Office for services and repair to ensure that safety features are maintained e DANGEROUS PROCEDURE WARNINGS Warnings such as example below precede potentially dangerous procedures throughout this manual Instructions contained in the warnings must be followed WARNING Dangerous Voltage capable of causing death are present in this instrument Use extreme caution when handling testing and adjusting WARNING CAUTION A A y O O CAT 1 Safety Symbols The general definitions of safety symbols used on equipment or in manuals are listed below Instruction manual symbol the product will be marked with this symbol when it is necessary for the user to refer to the instruction manual in order to protect against damage to the instrument Indicates dangerous voltage and potential for
102. e low resistance measurement and the high current measurement Agilent E5260 E5270 User s Guide Edition 5 3 13 Installation Installing Accessories Use the following cables to connect from the E5260 E5270 connectors to the connector plate s relative connectors Cables Connector E5260 E5270 Plate Terminals Agilent 16493J Interlock Cable 3 m or 1 5 m Intlk Interlock Agilent 16493L GNDU Cable 3 m or 1 5 m GNDU GNDU For Kelvin connection 1 SMU Force Agilent 16493K Kelvin Triaxial Cable 3 m 2 Sense or 1 5m 3 SMU Force Up to 4 SMUs can be connected to the 16495J by the Kelvin connection 4 Sense Up to 6 SMUs can be connected to the 5 SMU Force 16495F by the Kelvin connection 6 Sense Up to 3 SMUs can be connected to the 16495H by the Kelvin connection 7 SMU Force Connectors 7 and 8 are not triaxial 8 Sense For non Kelvin connection 1 SMU Force Agilent 16494A Triaxial Cable 3 m or 1 5 m 2 SMU Force Up to 8 SMUs can be connected to the 3 SMU Force 16495J by the non Kelvin connection Up to 6 SMUs can be connected to the MO totes 16495H by the non Kelvin connection 5 SMU Force Connectors 7 and 8 are not triaxial 6 SMU Force 7 SMU Force 8 SMU Force NOTE Use the Agilent 16494B Kelvin Triaxial Cable to connect to the Agilent E5250A Low Leakage Switch Mainframe or the connector plate for the Agilent 4142B Modular DC
103. e setting of the output channel VMR Range value for the voltage measurement e IMR Range value for the current measurement ERR Error code Press the arrow key to select the item you want to display Then press the Enter key to make the setup effective or press the Exit key to cancel changing the setup Displays the following message Display Format ENGINEERING or SCIENTIFIC Press the arrow key to select the data display format ENGINEERING or SCIENTIFIC Then press the Enter key to make the setup effective or press the Exit key to cancel changing the setup Display Format Description ENGINEERING Six digit numeric value with arithmetic point and unit Example 123 456pA SCIENTIFIC Four digit numeric value with arithmetic point exponential part E sign and one or two digit numeric value and unit Example 1 234E 10A 4 22 Agilent E5260 E5270 User s Guide Edition 5 WAIT_TIME Figure 4 1 NOTE Front Panel Reference Setup Menus Displays the sub menu that provides the following functions SOURCE Sets the source wait time e MEASURE Sets the measurement wait time Move the cursor to the function you want to set and press the Enter key Then the following message will be displayed Wait Time N Ref s N The source wait time is the time the source channel always waits after it starts the output and until it changes the output value
104. e setup menu 5 6 Agilent E5260 E5270 User s Guide Edition 5 Front Panel Operations Setting Up Agilent E5260 E5270 To Perform Self test ii Ae py Open the measurement terminals of the Agilent E5260 E5270 Press the Shift key and the Menu key Move the cursor to SELFTEST then press the Enter key Move the cursor to EXECUTE then press the Enter key Press the arrow keys to select the self test item ALL FRAME or Slot n n 1 or 2 for 2 ch mainframe 1 to 8 for 8 ch mainframe Press the Enter key to start the self test or press the Exit key to cancel it During the self test press the Exit key to abort the self test Press the Exit key three times to close the setup menu To display test results 1 2 24 Press the Shift key and the Menu key Move the cursor to SELFTEST then press the Enter key Move the cursor to RESULT then press the Enter key Press the arrow keys to select the self test item FRAME or Slot n n 1 or 2 for 2 ch mainframe 1 to 8 for 8 ch mainframe The test result is displayed for each item Press the Exit key three times to close the setup menu To use modules that failed self test The following procedure enables you to use a module that failed self test or self calibration l ME pa NS Press the Shift key and the Menu key Move the cursor to SELFTEST then press the Enter key Move the cursor to RECOVER then press the Enter key Press the arrow keys to select YES for
105. ecify the N value shown above Available values are 1 to 1023 Initial value is 1 Manual Specify the number of averaging samples N Available values are 1 to 1023 Initial value is 1 PLC Number of averaging samples N x 128 Specify the N value shown above Available values are 1 to 100 Initial value is 1 The Agilent E5260 E5270 gets 128 samples in a power line cycle Hence the N value is equal to the number of power line cycles High Auto Integration time N x reference Resolution ADC where reference is the integration time automatically set by the Agilent E5270B it cannot be changed Specify the N value shown above Available values are 1 to 127 Initial value is 6 Manual Integration time N x 80 usec Specify the N value shown above Available values are 1 to 127 Initial value is 3 PLC Integration time N power line frequency Specify the N value shown above Available values are 1 to 100 Initial value is 1 The N value means the number of power line cycles Agilent E5260 E5270 User s Guide Edition 5 6 17 Function Details Measurement Time Overhead Time The overhead time is the time required for range changing and so on This time depends on the measurement condition and cannot be specified Major elements of the overhead time are Range changing time during measurement when measurement ranging mode is set to auto or limited auto e Range changing time at
106. eed ADC High Resolution ADC 1nA 0 lt lt 1 15 nA 50 fA 10 fA 10nA 0 lt I lt 11 5nA 500 fA 10 fA 100 nA 0 lt lt 115nA 5 pA 100 fA 1 yA 0 lt I lt 1 15 pA 50 pA 1 pA 10 pA 0 lt I lt 11 5 uA 500 pA 10 pA 100 pA 0 lt lt 115 pA 5nA 100 pA 1 mA 0 lt I lt 1 15 mA 50 nA 1 nA 10 mA 0 lt I lt 11 5 mA 500 nA 10 nA 100 mA 0 lt lt 115 mA 5 HA 100 nA 1A O lt I lt 1A 50 uA 1 pA a This column is applied to the auto ranging or the limited auto ranging For fixed ranging maximum measurement value is Range column value 2 12 Agilent E5260 E5270 User s Guide Edition 5 Introduction Measurement Units E5281B Precision MPSMU This section describes typical specification of the medium power source monitor unit MPSMU for the Agilent E5270B The E5281B cannot be used with the E5260A Maximum voltage current output power 100 V 100 mA 2 W e Minimum range 0 5 V 1 nA Output measurement value and resolution see Table 2 5 to Table 2 8 Figure 2 4 MPSMU Output and Measurement Ranges Current mA Voltage V Agilent E5260 E5270 User s Guide Edition 5 2 13 Table 2 5 Table 2 6 Introduction Measurement Units MPSMU Output Voltage Ranges and Resolutions Range pa a Cuvee 0 5 V 0 lt V lt 0 5 V 25 uV 100 mA 2V 0 lt V lt 2V 100 uV 100 mA
107. effective or press the Exit key to cancel changing the setup H SPEED Selects the high speed A D converter that is mounted on each module For high speed measurement H RESOLN Selects the high resolution A D converter that will be shared by multiple measurement modules For reliable and accurate measurement The AD type can be specified for each measurement channel Agilent E5260 E5270 User s Guide Edition 5 4 11 Integ IntegTime Shift Integ MeasRange Single Repeat Abort Shift Repeat NOTE Front Panel Reference Front Panel Key Details Selects the A D converter ADC operation mode A auto M manual or P PLC Refer to Table 4 4 For the Agilent E5260 see the description of the H SPEED Press the MeasCh key to specify the measurement channel and press the Integ key repeatedly until the desired mode appears in the Integ status area The setup value is effective for the channels that use the same AD type Displays one of the messages shown in Table 4 4 The message depends on the AD and Integ settings For the Agilent E5260 see the description of the H SPEED This function sets the number of averaging samples of the high speed A D converter or the integration time of the high resolution A D converter The value should be increased for reliable and accurate measurement or decreased for high speed measurement The meaning of the setting value depends on the settings of the A D converter type and the ADC o
108. emote Measurement Mode in Local Condition You can select one from the following measurement items e Current when applying voltage or voltage when applying current e Current and voltage e Power voltagexcurrent e Resistance voltage current Press the Single key to perform one point measurement or the Repeat key to perform repeat measurement Agilent E5260 E5270 User s Guide Edition 5 6 3 Function Details Measurement Mode Measurement Mode in Remote Condition You can select one of the following measurement modes Spot Measurement Applies voltage or current then measures voltage or current A maximum of eight measurement channels can be used Staircase Sweep Measurement Applies staircase sweep voltage or current and measures voltage or current at each sweep step A maximum of eight measurement channels can be used and an extra sweep source forces the staircase sweep output synchronized to the primary sweep output Multi Channel Sweep Measurement Applies staircase sweep voltage or current using multiple sweep sources and performs staircase sweep measurement A maximum of eight sweep sources and eight measurement channels can be used Pulsed Spot Measurement Applies pulsed voltage or current and measures voltage or current Pulsed Sweep Measurement Applies pulsed sweep voltage or current and measures voltage or current at each sweep step An extra sweep source can be used to force the staircase sweep
109. en agreement with warranty terms covering the material in this document that conflict with these terms the warranty terms in the sep arate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or sub contract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regu lation or contract clause Use duplication or disclosure of Software is subject to Agi lent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data DECLARATION OF CONFORMITY y Agilent Technologies According to EN ISO IEC 17050 1 2004 C Manufacturer s Name Agilent Technologies Singapore International Pte Ltd Manufactur
110. entially hazardous voltages 200 V for HPSMU and 100 V for MPSMU present at the Force Guard and Sense terminals of the Agilent E5260 E5270 To prevent electrical shock the following safety precautions must be observed during the use of the Agilent E5260 E5270 3 2 Use a three conductor AC power cable to connect the cabinet if used and the Agilent ES260 E5270 to an electrical ground safety ground If you do not use the 16442B test fixture you must install and connect an interlock circuit that opens the Interlock terminal when the shielding box access door is opened Confirm periodically that the interlock function works normally Before touching the connections on the Force Guard and Sense terminals turn the Agilent E5260 E5270 off and discharge any capacitors If you do not turn the Agilent E5260 E5270 off complete all of the following items regardless of the Agilent E5260 E5270 settings e Press the OutCh and On Off keys and confirm that the Output status indicator is not lit for all source channels e Confirm that the HIGH VOLTAGE indicator is not lit e Open the shielding box access door open the Interlock terminal e Discharge any capacitors connected to an SMU Warn persons working around the Agilent E5260 E5270 about dangerous conditions Agilent E5260 E5270 User s Guide Edition 5 Installation Requirements Requirements This section contains information on e Power Requirements e Operating
111. er s Address No 1 Yishun Ave 7 SINGAPORE 768923 Singapore Declares under sole responsibility that the product as originally delivered Product Name 8 Slot High Speed Measurement Mainframe High Speed High Power SMU Module Plug in Module High Speed Medium Power SMU Module Plug in Module 2 Channel Medium Power Medium Power Source Monitor Unit 2 Channel High Power Medium Power Source Monitor Unit 8 Slot High Speed Measurement Mainframe Shared Source Measure Unit Mainframe Model Number Agilent E5260A Agilent E5290A Agilent E5291A Agilent E5262A Agilent E5263A Agilent N9200 61010 N9200 61013 Agilent P9002 61102 Product Options This declaration covers all related options of the above product s complies with the essential requirements of the following applicable European Directives and carries the CE marking accordingly Low Voltage Directive 2006 95 EC EMC Directive 2004 108 EC and conforms with the following product standards EMC Standard Limit IEC 61326 1 2005 EN 61326 1 2006 CISPR 11 2003 EN55011 1998 A1 1999 A2 2002 Group 1 Class A IEC 61000 4 2 2001 EN 61000 4 2 1995 A1 1998 A2 2001 4kV CD 8kV AD 2002 A1 2002 EN 61000 4 3 2002 A1 2002 3 V m 80 MHz 1 GHz 1 4 2 GHz 1 V m 2 2 7 GHz IEC 61000 4 4 2004 EN 61000 4 4 2004 0 5 kV signal lines 1 kV power lines IEC 61000 4 5 2001 EN 61000 4 5 1995 A1 2001 0 5 kV line line 1 kV line ground IEC 61000 4 6 2003 EN 61000 4 6 1996 A1 2001 3 V 0 15 80 MHz IEC
112. er of averaging samples instead of the integration time For high speed measurement Installed in each measurement module e High resolution ADC Available only for the Agilent E5270B You can adjust the integration time directly For high accuracy and high resolution measurement This ADC is mounted on the mainframe and used by the multiple modules alternately To set the integration time or the number of averaging samples select the mode and set the value as shown in Table 6 1 For the Agilent E5260 see the description of High Speed ADC Available only for the E5270B The ADC zero function is available for the high resolution A D converter ADC and not available for the high speed ADC This function measures the internal offset of the high resolution ADC and compensates it automatically The measurement data displayed on the LCD will be the data after compensation This function is especially effective for the low voltage measurement Disable the function in cases where measurement speed is more important than measurement accuracy This approximately halves integration time 6 16 Agilent E5260 E5270 User s Guide Edition 5 Function Details Measurement Time Table 6 1 Integration Time and Number of Samples ADC Mode Description High Speed Auto Number of averaging samples N x reference ie where reference is the number of averaging samples automatically set by the Agilent E5260 E5270 this cannot be changed Sp
113. ess 1 A A oe Press the Menu key Move the cursor to CONFIG then press the Enter key Move the cursor to ADDRESS then press the Enter key Press the arrow keys to set the GPIB address Press the Enter key to make the setup effective or press the Exit key to cancel changing the setup Press the Exit key twice to close the setup menu To Set Remote Display Mode This instruction enables or disables the data display in the GPIB remote condition See RMT_DSPL on page 4 24 1 E o Press the Menu key Move the cursor to RMT_DSPL then press the Enter key Press the arrow keys to set the remote display mode ON or OFF Press the Enter key to make the setup effective or press the Exit key to cancel changing the setup Press the Exit key to close the setup menu To Return to Local Mode Press the Local key If the front panel keys are locked send the KLC command from an external computer then press the Local key 5 14 Agilent E5260 E5270 User s Guide Edition 5 Front Panel Operations Applying Source Output Applying Source Output This section describes the following tasks to apply DC current or DC voltage To Apply DC Current Voltage e To Set Output Compliance Value e To Set Source Output to Zero To Set Output Range To Use Series Resistor To Use Filter e To Switch ASU Internal Connection Agilent E5260 E5270 User s Guide Edition 5 5 15 NOT
114. etting Four digit numeric value with arithmetic point and unit VMR 2V Range value used for the voltage measurement Available range values depend on the module IMR 10uA Range value used for the current measurement Available range values depend on the module where uA means uA ERR No Err Error code a A pulse source is available for the pulsed spot measurement pulsed sweep measurement staircase sweep with pulsed bias measurement or quasi pulsed spot measurement when the E5260 E5270 is in the remote condition If you press the OUT Value or CPL Value key this area displays the following items Setup Data 1 OUT source output setting e Setup Data 2 CPL source compliance setting Then press the Exit or Enter key to return to the previous items Agilent E5260 E5270 User s Guide Edition 5 4 7 Table 4 3 Front Panel Reference Display and Front Panel Keys Measurement Data Area The Meas Data 1 and Meas Data 2 areas can display the following items The display item can be selected by pressing the Measltem key Table 4 3 shows the display format in the measurement data area For Voltage Output Channel For Current Output Channel Meas Data 1 Meas Data 2 Meas Data 1 Meas Data 2 Case Current Voltage Case 2 Current Voltage Voltage Current Case 3 Power Power Case 4 Resistance Resistance where power and resistance are given by the following
115. fective or press the Exit key to cancel changing the setup Before using pA range only for E5270B The measurement channel connected to the ASU Atto Sense and Switch Unit supports the 1 pA range To use the 1 pA range set the 1 pA fixed range or the 1 pA limited auto ranging Agilent E5260 E5270 User s Guide Edition 5 4 31 V_RANGE IRANGE Front Panel Reference Setup Menus Output Range Setup Menu Press the OutRange key to display the output range setup menu The output range setup menu is displayed in the Change Setup area as shown below The menu is used to set the voltage output ranging mode V_RANGE or the current output ranging mode I RANGE 123 456 mA 1 23456mV OUT 123 4mV V_ RANGE I RANGE Press the arrow key to move the cursor to the desired function name Then press the Enter key Displays the following message S ch Output Range Mode where is 1 or 2 for the 2 ch mainframe 1 2 or 8 for the 8 ch mainframe and Mode is the output ranging mode AUTO FIX xV or LIM xV Then x indicates the range value Available values depend on the module AUTO means auto ranging FIX means fixed range and LIM means limited auto ranging Press the arrow key to select the output ranging mode Then press the Enter key to make the setup effective or press the Exit key to cancel changing the setup Displays the following message S ch Output Range Mode where is 1 or 2 for th
116. g Measurement To set integration time This procedure sets the number of averaging samples of the high speed A D converter or the integration time of the high resolution A D converter The meaning of the setting value depends on the ADC type and ADC operation mode settings The value should be increased for reliable and accurate measurement or decreased for high speed measurement Refer to Table 4 4 on page 4 13 The setup is effective for all channels that use the same ADC type 1 Press the Shift key and the Integ key The setup message shown in Table 4 4 is displayed The message depends on the Integ and AD settings 2 Press the arrow keys to set the N value for the message 3 Press the MeasCh key if you are setting the value for measurement channels that use another ADC type and perform 2 4 Press the Enter key to make the setup effective or press the Exit key to cancel changing the setup 5 26 Agilent E5260 E5270 User s Guide Edition 5 Wait Time NOTE Front Panel Operations Making Measurement To Set Wait Time This instruction sets the source wait time and the measurement wait time The wait time settings are effective for all modules Refer to WAIT_TIME on page 4 23 1 Press the Menu key 2 Move the cursor to WAIT_TIME then press the Enter key 3 Move the cursor to SOURCE to set the source wait time then press the Enter key 4 Press the arrow keys to set the N value shown in the formula below 5
117. ge or current The Agilent E5260 E5270 also provides several functions such as sweep output pulse output and trigger functions in the GPIB remote condition For these functions refer to Programming Guide The Agilent E5260 E5270 series distributes the following products Agilent E5270B 8 Slot Precision Measurement Mainframe Equipped with a ground unit GNDU and eight empty slots for the following modules e Agilent E5280B Precision High Power Source Monitor Unit Module High power SMU module for the E5270B Occupies two slots Agilent E5281B Precision Medium Power Source Monitor Unit Module Medium power SMU module for the E5270B Occupies one slot e Agilent E5287A Atto Level High Resolution Source Monitor Unit Module High resolution SMU module for the E5270B Occupies one slot Needs Agilent E5288A Atto Sense and Switch Unit ASU to perform atto level current measurement Agilent E5260A 8 Slot High Speed Measurement Mainframe Equipped with a GNDU and eight empty slots for the following modules e Agilent E5290A High Speed High Power Source Monitor Unit Module High power SMU module for the E5260A Occupies two slots Agilent E5291A High Speed Medium Power Source Monitor Unit Module Medium power SMU module for the E5260A Occupies one slot e Agilent E5262A 2 Channel MP MP Source Monitor Unit Equipped with two high speed MPSMUs and a GNDU e Agilent E5263A 2 Channel HP MP Source Monitor Unit Equipped with a high speed HPSM
118. gure 3 9 and Figure 3 10 below 2 Mount an LED on your shielding box For the dimensions of the LED see Figure 3 8 3 Use wire to connect the two switches in series between pin number 1 and 2 or 3 of the interlock connector See Figure 3 7 4 Use wire to connect the LED between pin number 4 and 5 or 6 of the interlock connector See Figure 3 7 If the Agilent E5260 E5270 Interlock connector is connected to the interlock circuit the Agilent E5260 E5270 SMU cannot force more than 42 V when the door is open When the door is closed it can force more than 42 V When more than 42 V is forced from an SMU the LED lights to indicate high voltage output Dimensions of the LED Agilent part number 1450 0641 Anode 5 Cathode Units mm UGI01013 50x50 3 24 Agilent E5260 E5270 User s Guide Edition 5 Installation Mounting Connectors Figure 3 9 Dimensions of the Interlock Switch Agilent part number 3101 0302 z 10 3 2 59 4 7 Spo sl 8 1 28 8 34 4 a e dl c N AN o S A QD 5 2 a l ic oO A o nr pl R co Y o 2 Y O T D wl D d l 3 1 22 I 27 8 to Units mm i 37 8 UGI01011 85x60 Figure 3 10 3 2 Switch off OTS SES A Switch on SA y 2 0 Units mm UGI01012 85x60 Agilent E5260 E52
119. h l pA auto range indicator SMU side disabled enabled SAP SAR SAL Filter Series resistor off off FL SSR A D converter High speed ADC AAD Integration time High resolution High speed ADC auto AIT ADC is available for E5270B High resolution ADC auto AIT AV command parameter number 1 mode 0 AV Current measurement range with pulse Compliance range RI without pulse auto Voltage measurement range with pulse Compliance range RV without pulse auto Sweep source parameters cleared WV WSV WI WSI Automatic sweep abort function off WM Output after sweep measurement Start value WM Pulse source parameters cleared PV PI Pulse sweep source parameters cleared PWV PWI Pulse width 0 001 s PT Pulse period 0 01 s PT Search source parameters cleared BSV BSSV BSI BSSI LSV LSSV LSI LSSV Search monitor parameters cleared BGV BGI LGV LGI Output after search measurement Start value BSM LSM Search measurement data Source output value only BSVM LSVM Quasi pulse source parameters cleared BDV Quasi pulsed spot measurement mode Voltage BDM Quasi pulse settling detection interval Short BDM Hold time Os WT PT BDT BST LSTM Delay time Os WT PT BDT BST LSTM Step delay time Os WT Trigger delay time Os WT PT Trigger mode XE TV TI or GET TM Trigger port Ext Trig In Start Measurement trigger input TGP Ext Trig Out Measurement Completion trigger output TGP Digital 1 O cleared TGP Trigger condition of with trigger for first sweep step TGSI
120. he ASU 2 Force terminal 10 Prepare the connection wire both pin terminals furnished with the ASU and connect it between the CMU Return terminals of the ASU 1 and ASU 2 together About ASU output cables To perform capacitance measurements accurately the cable length between DUT and the ASU output must be as short as possible Agilent E5260 E5270 User s Guide Edition 5 3 19 Installation Installing Accessories To Connect GNDU Adapter The ground unit GNDU output is the single triaxial connector The Agilent N1254A 100 GNDU to Kelvin Adapter enables to change it to the dual triaxial connector Connect the adapter to the GNDU connector on the front panel then connect a Kelvin triaxial cable to extend the GNDU terminal Maximum current is restricted when the Kelvin triaxial cable is used See Table 3 2 Figure 3 6 Agilent N1254A 100 GNDU to Kelvin Adapter Agilent N1254A 100 GNDU to Kelvin Adapter To GNDU connector To 16493K Kelvin triaxial cable Table 3 2 Kelvin Triaxial Cable and Maximum Current Model No or Description Maximum Option Item Current 16493K 001 1 5 m Kelvin Triaxial Cable 3 0 A 16493K 002 3 m Kelvin Triaxial Cable 2 6 A 3 20 Agilent E5260 E5270 User s Guide Edition 5 Table 3 3 Mounting Connectors Installation Mounting Connectors Previous sections described how to install the available accessories and Agilent 16495 Installation Guide provides the information on
121. he extractor at the left and right on the module front panel 3 Gently push the module into the slot until you feel it contacts the connector of the slot 4 Set the module extractor to the lock position 5 Replace the plate by using the screws 6 Check the operation of the mainframe with the modules as follows a Connect the power cable and turn on the mainframe b After the self test is completed check the front panel LCD No mark must be set to the Error indicator Plug in Module Removal and Installation Power cable Sl o Agilent E5260 E5270 User s Guide Edition 5 3 9 WARNING WARNING CAUTION CAUTION Installation Installing Accessories Installing Accessories This section describes how to install the Agilent E5260 E5270 and accessories Additional information regarding airflow can be found in the Ventilation Requirements on page 3 4 This section describes how to e To Connect 16442B Test Fixture e To Connect Connector Plate To Connect ASU To Connect GNDU Adapter There are potentially hazardous voltages of up to 100 V MPSMU or 200 V HPSMU at the Force Sense and Guard terminals To prevent electrical shock do not expose these lines To prevent electrical shock during use install and connect an interlock circuit that opens the Interlock terminal when the shielding box access door is opened Use the Agilent 16493J Interlock cable to connect the
122. he guard terminal is equal to the output voltage 3 32 Agilent E5260 E5270 User s Guide Edition 5 CAUTION Installation Connecting Measurement Devices Never connect the guard terminal to any other output including circuit common frame ground or the terminals of any other unit Doing so may damage the unit Guarding Guarding reduces the leakage current between the measurement points and instrument This is important when you measure low current The following figure shows the theory of guarding The buffer amplifier x1 keeps the potential of the guard conductor at the same potential as the force conductor so current does not flow between the force and guard conductors Therefore the current measured by SMU is same as current at measurement point because no current is leaked Guard LES Buffer Fo ce DUT 2 Fl UGTOIOSZ 90Wx40H Agilent E5260 E5270 User s Guide Edition 5 3 33 Installation Connecting Measurement Devices To Measure Low Resistance When you measure a low resistance high current flows through the DUT This high current increases the measurement error caused by the residual resistance of cables To cancel the effect of this resistance you can use Kelvin connections 4 wire which means the force and sense lines are extended separately to the DUT Connect the probing needles to the terminals of the connector plate by using test leads or coaxial cables Follo
123. he measurement channel uses the present range if the following formula is satisfied otherwise the channel changes the range Next lower range value lt Measurement value lt Range x X 100 where X 110 or 100 at the maximum range The output channel automatically searches for and forces at the lowest range that covers the output value as follows For staircase sweep output the output channel uses the lowest range that covers the start and stop values However it uses the lowest range that covers the step output value for the logarithmic current sweep For the voltage sweep that sets the power compliance the channel uses the lowest range 20 V range or more that covers the step output value For pulsed bias output the output channel uses the lowest range that covers the base and peak values For pulsed sweep output the output channel uses the lowest range that covers the base start and stop values For quasi pulsed output and search source output the output channel uses the lowest range that covers the start and stop values The maximum output value is as follows Maximum current output value Range x X 100 where X 115 or 100 at the maximum range Maximum voltage output value Range value 6 6 Agilent E5260 E5270 User s Guide Edition 5 NOTE Function Details Ranging Mode Limited Auto Ranging Limited auto ranging is similar to auto ranging However limited auto ranging does not use the range s less than wh
124. he measurement connections use the triaxial cables instead of the kelvin triaxial cables and connect the triaxial cables between the Force terminals and the test fixture or the connector plate Then the Sense terminals must be opened The Agilent E5260 E5270 has the Force and Sense terminals to make the kelvin connection And the kelvin triaxial cables are effective to extend the measurement terminals near by the device under test Connecting the Force and Sense lines together at the device terminals can minimize the measurement error caused by the residual resistance of the connection cables The kelvin connection is effective for the low resistance measurement and the high current measurement Also it is one of the conditions to satisfy the measurement specifications of the Agilent E5260 E5270 Agilent E5260 E5270 User s Guide Edition 5 7 3 If You Have a Problem When You Make a Measurement When You Make a Measurement This section covers the following basic problems that you may encounter when you making a measurement and the solutions e If Leaving Connections Damages Devices after Measurement e If Measured Value Oscillates when Measuring High Frequency Devices e If Measured Value Oscillates when Measuring Negative Resistance e If Noise Affects the Measured Values e If Measured Voltage has some Error when Forcing a Large Current e If Large Current Causes High Temperature Thermal Drift e
125. i QA Manager Agilent Technologies Hachioji Semiconductor Test Division For further information please contact your local Agilent Technologies sales office agent or distributor or Agilent Technologies Deutschland GmbH Herrenberger StraBe 130 71034 B blingen Germany NOTE e Herstellerbescheinigung GERAUSCHEMISSION Lpa lt 70 dB am Arbeitsplatz normaler Betrieb nach DIN 45635 T 19 e Manufacturer s Declaration ACOUSTIC NOISE EMISSION Lpa lt 70dB operator position normal operation per ISO 7779 This ISM device complies with Canadian ICES 001 Cet appareil ISM est conforme a la norme NMB 001 du Canada South Korean Class A EMC declaration This equipment is Class A suitable for professional use and is for use in electromagnetic environments outside of the home Aw 717 ATE DEEA 9 1713 AFSAR 444447174 H A Ez ASAE q AS FAHA whe 3 1399 AAAA ALIE AS EN lo Hud Korea s safety and EMC mark This product complies with the WEEE Directive 2002 96 EC marking requirements The affixed label indicates that you must not discard this electrical electronic product in domestic household waste Product Category With reference to the equipment types in the WEEE Directive Annex l this product is classed as a Monitoring and Control instrumentation product Do not dispose in domestic household waste To return unwanted products contact your local Agilent office or see www agilent com environment
126. iance yy lt 0 Output Current Lu Output Current 0 y Z f Compliance Yi LY 6 10 Agilent E5260 E5270 User s Guide Edition 5 Figure 6 4 Available values Conditions after compliance Function Details Compliance Power Compliance In addition to V compliance or I compliance you can set power compliance for the staircase sweep source Power compliance is set by the WI WV WSL WSV or WNX command If you specify power compliance the source monitor unit SMU changes the current or voltage compliance value every sweep step The value is the lower value of either the specified compliance value or the compliance value given by the following formula See Figure 6 4 Current compliance Specified power compliance value Step voltage Voltage compliance Specified power compliance value Step current Power Compliance Output Area For voltage sweep For current sweep Current Voltage A A i lt Specified power compliance lt Specified power compliance lt Specified current compliance value lt Specified voltage compliance value Actual current compliance Actual voltage compliance gt Voltage gt Current The following values are available for the power compliance MPSMU 1 mW to 4 W HPSMU 1 mW to 20 W When a channel reaches compliance the staircase sweep source automatically stops the sweep and forces the start value For the measurement data
127. icator if the measurement time is long enough to display the indicator Even if the channel performs repeat measurement you will not see the indicator if the time to measure one data item is too short to display the indicator 1 4 Agilent E5260 E5270 User s Guide Edition 5 Getting Started Step 3 Setting up SMU2 forcing DC voltage and measuring DC current Step 4 L 6 Press the OutCh key until the S ch status area displays 2 The SMU2 setup information is displayed in the Setting Parameter area Press the MeasCh key until the M ch status area displays 2 The Meas Value area displays no data to display status Press the CPL Value key The cursor appears on the lowest digit of the integral part of the CPL value The CPL shows the compliance value Press the Right arrow key to move the cursor on the arithmetic point Press the Up arrow key to set the CPL value to 100 mA and press the Enter key to fix the value Then press the Enter key again The cursor disappears Press the On Off key The SMU2 starts voltage output and current measurement In the following example the measured data is just an example During the repeat measurement you may not be able to read the measured data Stat Meas Value 1 Meas Value 2 Setting Parameter Shift 0 00010nA OUT 0 00 V Aw v 2 2 CPL 100 0mA Ramotd Lock Meas igge Error Integ Output Repeat M ch S ch
128. ics perform the following or press the Exit key to abort the diagnostics For KEY press any front panel key then the LCD displays the key name Repeat this for all front panel keys If all responses were good press the Enter key twice to stop If any response was bad press the Exit key twice to stop For HV LED confirm that the LED blinks If the LED is blinking press the Enter key to stop If the LED does not blink press the Exit key to stop For BEEPER confirm that the beeper makes two sounds every second If you hear it press the Enter key to stop If you do not hear it press the Exit key to stop For other diagnostics no action is required 6 Press the Exit key three times to close the setup menu Agilent E5260 E5270 User s Guide Edition 5 5 9 Front Panel Operations Setting Up Agilent E5260 E5270 To display diagnostics results 1 Press the Shift key and the Menu key Move the cursor to DIAG then press the Enter key Move the cursor to RESULT then press the Enter key Press the arrow keys to select the diagnostics item GPIB TRIGGER BNO KEY HV LED DGTL I O or BEEPER The diagnostics result is displayed for each diagnostics item gt es 5 Press the Exit key three times to close the setup menu 5 10 Agilent E5260 E5270 User s Guide Edition 5 NOTE NOTE Front Panel Operations Setting Up Agilent E5260 E5270 To Set Auto Calibration 1 Press the Shift key and the Menu key 2 Mo
129. inals Normally connect the terminals together by using the shorting bar Agilent part number 5000 4206 For floating measurement remove the shorting bar For floating measurement do not apply voltage more than 42 V to the Circuit Common terminal Failure to heed this caution may result in damage to the Agilent E5260 E5270 If the Circuit Common terminal is not connected to the frame ground terminal for floating measurement a potential shock hazard may present Do not touch any of measurement circuit at any time while a floating measurement is in progress e Interlock terminal Used in conjunction with the interlock function of the E5260 E5270 If the Interlock terminal is open maximum SMU output is limited to 42 V Be sure to connect this terminal to the 16442B test fixture or connector plate before performing measurement If you use a connector plate you must install an interlock circuit For details on how to install the interlock circuit see To Make an Interlock Circuit on page 3 23 Dangerous voltage of up to the maximum voltage of SMUs may be present at force guard and sense terminals if the Interlock terminal is closed SMU terminals The source monitor unit SMU has two triaxial connectors force and sense for the Kelvin connections When you use the 16442B test fixture and Kelvin connections up to 3 SMUs can be connected to the 16442B test fixture Agilent E5260 E5270 User s Guide Edition 5 2 5 I
130. ion failed calibration bus test failed IM offset calibration failed IM gain calibration failed IF offset calibration failed IF gain calibration failed IDAC filter offset calibration failed oscillation detector test failed I bias test failed common mode rejection test Agilent E5260 E5270 User s Guide Edition 5 7 21 If You Have a Problem Error Codes N789 SMU failed high voltage detector test N790 SMU failed zero voltage detector test N791 SMU failed V hold test N792 SMU failed V switch test 7 22 Agilent E5260 E5270 User s Guide Edition 5
131. ion 5 4 5 Front Panel Reference Display and Front Panel Keys Channel Status Area This area displays one of the following status codes that indicate the status of the measurement channels If some status errors are detected the most serious status code is displayed in this area Table 4 1 Channel Status Code Display Description a Blank means no status error occurred T Another channel reached its compliance setting 1 low C This channel reached its compliance setting 2 V Measurement data is over the measurement range 3 X One or more channels are oscillating 4 high 4 6 Agilent E5260 E5270 User s Guide Edition 5 Table 4 2 NOTE Front Panel Reference Display and Front Panel Keys Setup Data Area The Setup Data 1 and Setup Data 2 areas display the source output setting the source compliance setting the measurement range setting or the error code The display item can be selected by the MON_ITEM menu displayed by pressing the Menu key The item for the Setup Data area can be specified by the ITEM1 parameter and the item for the Setup Data 2 area can be specified by the ITEM2 parameter Table 4 2 shows the display format in the setup data area Setup Data Area Display Example Description OUT 123 4mV Source output setting Four digit numeric value with arithmetic point and unit Pulse base value will be displayed for the pulse source CPL 12 34mA Source compliance s
132. ions ener coser enn Vonn n E ce ee eee eee ai 4 5 Agilent E5260 E5270 User s Guide Edition 5 Contents Channel Status Area 2 ccc enn enna 4 6 Setup DataArea 3a AAN teenie be lts 4 7 Measurement Data Area 0 cece eee nent eens 4 8 Status Data ATC coin id Pi di dea dt 4 9 Front Panel Key DetallS ooooooooooorrrorrr eens 4 10 Measure key BOU 2 A di de 4 11 Output key group ie 4 14 Edit key orou fs cond AS ES AAA Ai 4 17 Sep MEUS A A see Oh etd go EEN eae Minas 4 18 Setup Menu csiaao idaho id a td la A 4 18 Calibration and Test Menu 0 0 2 0 ce cee ce eet teens 4 25 Measurement Range Setup Menu 0 cece cece eee eens 4 31 Output Range Setup Menu 0 eee eens 4 32 Front Panel Operations Available Functions a 5 3 Setting Up Agilent E5260 E5270 2 00 teens 5 4 To Set Line Frequency sissie core e e vidi were ee ele 5 5 To Initialize Agilent E5260 E5270 1 0 ee eens 5 5 TO SE Beeper SEn A a goles a hag ieee ag ied de A 5 5 To Apply Default Value 0 0 cnet 5 5 To Select Monitor Items 2 2 teens 5 6 To P rform Self test rcsr Sana ek eid Soe eee do daca a ob a gees 5 7 To Perform Self Calibration 0 000 cee ccc eens 5 8 To Perform Diagnostics 0 0c teen teenies 5 9 To Set Auto Calibration ceteri cette eens 5 11 To Set ADC Zero Function 0 00 5 11 To Read Error Message 000 cece eee cece nee n ene 5 12 To Display Fir
133. ipped with two LEDs that show which input is internally connected to the output Displays the output range setup menu in the Change Setup area See Output Range Setup Menu on page 4 32 Enables or disables the source output of the channel specified by the S ch status indicator Then the Output status indicator shows the source output ON or OFF status Displays the following message S ch Series Resistor ON or OFF where is or 2 for the 2 ch mainframe 1 2 or 8 for the 8 ch mainframe Press the OutCh key to specify the source channel and press the arrow key to connect the series resistor ON to the channel or to disconnect it OFF Then press the Enter key to make the setup effective or press the Exit key to cancel changing the setup A series resistor 1 MQ is mounted on each module If you use a series resistor the voltage you set is applied to the near side of the series resistor Consequently the voltage will be divided by the series resistor and the device under test The series resistor cannot be used for the measurements that use the high resolution SMU HRSMU connected to the Atto Sense and Switch Unit ASU or the measurements that use 1 A range of the high power SMU HPSMU Agilent E5260 E5270 User s Guide Edition 5 4 15 vil Filter Shift V 1 Front Panel Reference Front Panel Key Details Switches the source output mode voltage output or current output Pressing the V I key changes
134. irmed Agilent can guarantee that the modules will function and that the module performance is designed to meet its specifications However if you have any trouble contact your nearest Agilent Technologies service center If you require that the modules be guaranteed to their specifications for ISO compliance etc then you must perform a calibration on the instrument modules and mainframe together This requirement arises because the mainframes contain both a Ground Unit and an A D converter which define the specification Therefore to guarantee the specifications it is necessary to take compensation data for the combination of mainframe and modules For calibration you need the dedicated equipment and accessories Prepare the all required items or contact your nearest Agilent Technologies service center Removal 1 Turn off the mainframe then wait at least 10 seconds See Figure 3 2 2 Disconnect the power cable from rear panel UY Disconnect all cables from the modules 4 Loosen the screws on the plate 5 Remove the plate 6 Set the module extractor to the knob position The extractors are located at the left and right on the module front panel 7 Hold the module extractor and gently pull out the module 3 8 Agilent E5260 E5270 User s Guide Edition 5 Figure 3 2 Installation Inspection and Installation Installation 1 Align the module with the left and right slot guide rails in the mainframe 2 Hold t
135. ive or positive edge trigger or TTL level negative or positive gate trigger An external trigger input signal can be used to do any of the following 1 Start a measurement 2 Start a measurement at each sweep step for a staircase sweep or multi channel sweep measurement 3 Start the source output at each sweep step for a staircase sweep pulsed sweep staircase sweep with pulsed bias or multi channel sweep measurement 4 Start the pulsed output for a pulsed spot measurement 5 Recover from a wait state Agilent E5260 E5270 User s Guide Edition 5 2 47 NOTE Introduction Specifications Output Output Level TTL level negative or positive edge trigger or TTL level negative or positive gate trigger An output trigger signal can be sent when one of the following events occurs 1 The end of a measurement is reached 2 The end of a measurement at each sweep step for a staircase sweep or multi channel sweep measurement is reached 3 Completion of the source output setup at each sweep step for a staircase sweep pulsed sweep staircase sweep with pulsed bias or multi channel sweep measurement 4 Completion of the pulsed output setup for a pulsed spot measurement 5 A trigger command is issued Trigger Terminals Ext Trig In Out BNC and Digital I O port can be used for trigger I O e General Purpose Digital I O 16 general purpose digital I O signals are available via a 25 pin DIN connector These pin
136. ixed range or the 1 pA limited auto ranging The E5270B automatically performs the compensation of the data measured by the 1 pA range and returns the compensated data You can use either the pre stored offset data or the pre measured offset data To measure the offset data perform the self calibration before starting the measurement for a DUT This offset data is temporarily memorized until the E5270B is turned off See To Perform Self Calibration on page 5 8 Agilent E5260 E5270 User s Guide Edition 5 2 19 Figure 2 6 Introduction Measurement Units E5290A High Speed HPSMU This section describes typical specification of the high power source monitor unit HPSMU for the Agilent E5260A The E5290A cannot be used with the E5270B Maximum voltage current output power 200 V 1 A 20 W e Minimum range 2 V 100 nA Output measurement value and resolution see Table 2 1 to Table 2 4 HPSMU Output and Measurement Ranges Current mA Voltage V 2 20 Agilent E5260 E5270 User s Guide Edition 5 Table 2 13 Table 2 14 HPSMU Output Voltage Ranges and Resolutions Introduction Measurement Units Range Output Value nea i a 2V 0 lt V lt 2V 100 uV 1000 mA 20 V 0 lt V lt 20V 1 mV 1000 mA 40 V 0 lt V lt 40V 2 mV 500 mA 100 V 0 lt V lt 100 V 5 mV 125 mA 200 V 0 lt V lt 200 V 10 mV 50 mA HPSMU Ou
137. l Reference This chapter provides the reference information of the Agilent E5260 E5270 front panel keys and display e Display and Front Panel Keys Front Panel Key Details Setup Menus 4 2 Agilent E5260 E5270 User s Guide Edition 5 Front Panel Reference Display and Front Panel Keys Display and Front Panel Keys The Agilent E5260 E5270 provides an LCD and 24 front panel keys for front panel operation This section explains the user interface Display Images Front Panel Key Locations Channel Status Area Setup Data Area Measurement Data Area Status Data Area Display Images The LCD displays the measurement data the setup information and the status information as shown in the following example Stat Meas Value 1 Meas Value 2 Setting Parameter Shift C 1 23456mA 1 23456mV OUT 1 234mV Aw v 1 1 CPL 1 234mA Ferdd Lock Meas Triggej Error Integ Output Repeal M ch S ch This example notifies you that channel 1 applies 1 234 mV with 1 234 mA compliance setting and executes repeat measurement with the integration time auto mode It also shows the measurement results 1 23456 mA and 1 23456 mV and notifies you that channel 1 reaches its compliance setting Agilent E5260 E5270 User s Guide Edition 5 4 3 Front Panel Reference Display and Front Panel Keys
138. l output switch to ON Compliance must be set To change the source output mode voltage or current set the compliance value Interlock circuit must be closed To set the output voltage or the voltage compliance to more than 42 V high voltage state close the interlock circuit If the interlock circuit is opened in the high voltage state outputs of all units will be set to 0 V Cannot enable channel The channel output switch cannot be set to ON in the high voltage state Set the output voltage or the voltage compliance to 42 V or less to set the switch to ON Cannot disable channel The channel output switch cannot be set to OFF in the high voltage state Set the output voltage or the voltage compliance to 42 V or less to set the switch to OFF Or send the CL command with no parameter to set switches of all channels to OFF immediately DZ must be sent before RZ The RZ command is effective for the channels set to 0 V output by the DZ command Agilent E5260 E5270 User s Guide Edition 5 7 13 If You Have a Problem Error Codes 206 210 211 212 213 214 220 221 222 Do not specify the channel recovered by RZ Specify the channels that have not been recovered yet by the RZ command after the DZ command The RZ command cannot be executed if the specified channels include a channel that has already been recovered by the RZ command Ext trigger could not start measurement External trigger cannot
139. les that failed self calibration If you execute the CAL of the E5270B installed with the ASU Atto Sense and Switch Unit the E5270B executes the self calibration and the 1 pA range offset measurement for the measurement channels connected to the ASUs The offset data is temporarily memorized until the E5270B is turned off and is used for the compensation of the data measured by the 1 pA range of the channels The E5270B performs the data compensation automatically and returns the compensated data Since the E5270B is turned on if you do not execute the CAL the E5270B performs the data compensation by using the pre stored offset data 5 8 Agilent E5260 E5270 User s Guide Edition 5 Front Panel Operations Setting Up Agilent E5260 E5270 To Perform Diagnostics 1 Press the Shift key and the Menu key 2 Move the cursor to DIAG then press the Enter key 3 Move the cursor to EXECUTE then press the Enter key 4 Press the arrow keys to select the diagnostics item GPIB TRIGGER BNO KEY HV LED DGTL I O or BEEPER Before starting the diagnostics perform the following For GPIB disconnect the GPIB cable For TRIGGER BNC connect a BNC cable between the Ext Trig In and Out connectors For DGTL I O disconnect any cable from the digital I O port e For other diagnostics no action is required 5 Press the Enter key to start diagnostics or press the Exit key to cancel diagnostics After starting the diagnost
140. m up Ambient temperature changes less than 1 C after auto calibration execution Measurement made within one hour after auto calibration execution Averaging high speed ADC 128 samples in 1 PLC aw gt amp Y Integration time high resolution ADC condition for E5270B 1 PLC 1 nA to 1 A range 10 PLC 100 pA range 50 PLC 1 pA to 10 pA range 7 Filter ON 8 Kelvin connection 9 Calibration period 1 year 2 28 Agilent E5260 E5270 User s Guide Edition 5 Introduction Specifications Mainframe E5260A The E5260A supports eight slots for plug in modules Module Slots Range of operation ide occupied resolution E5290A HPSMU 2 200 V to 200 V 100 uV 5 pA IAtolA E5291A MPSMU 1 100 V to 100 V 100 uV 5 pA 200 mA to 200 mA e E5262A The E5262A supports two high speed medium power SMUs MPSMUs Module Range of operation cdi resolution E5291A MPSMU 100 V to 100 V 100 uV 5 pA 200 mA to 200 mA E5263A The E5263A supports one high speed medium power SMU MPSMU and one high speed high power SMU HPSMU Module Range of operation ie resolution E5290A HPSMU 200 V to 200 V 100 pV 5 pA IAtolA E5291A MPSMU 100 V to 100 V 100 uV 5 pA 200 mA to 200 mA Agilent E5260 E5270 User s Guide Edition 5 2 29 Introduction Specifications ES5270B The E5270B supports eight slots for plug in modules Module Blots Range of o
141. mechanical switches placed near the shielding box opening doors And they must be connected together For details on how to install the interlock circuit see To Make an Interlock Circuit on page 3 23 The interlock function works as shown below e When the interlock circuit is open maximum output is limited to 42 V e When the interlock circuit is close source channel can force its maximum output value e When the interlock circuit is opened in the high voltage condition more than 42 V output voltage is set to 0 V immediately If the actual output value is not set to 0 V within 120 msec the Agilent E5260 E5270 automatically performs the initialization Then perform self test Any module may be defective Dangerous voltage of up to the maximum voltage of SMUs may be present at force guard and sense terminals if the Interlock terminal is closed 6 24 Agilent E5260 E5270 User s Guide Edition 5 Function Details Auto Power Off Function Auto Power Off Function If an abnormal voltage or current is detected in the Agilent E5260 E5270 the Agilent E5260 E5270 automatically turns off to prevent damage If this function is activated the Agilent E5260 E5270 is turned off but the Line switch is left ON Perform the following steps to turn the Agilent E5260 E5270 on again 1 Press the Line switch to set it to the OFF position 2 Wait for 10 seconds or more 3 Press the Line switch to set it to the ON position Abn
142. mote condition e Digital I O terminal DSUB 25 pin connector Can be used for the trigger input output terminals or an interface to control an external relay circuit and so on For details refer to Programming Guide The Digital I O terminal can be used when the Agilent E5260 E5270 is in the GPIB remote condition GPIB interface Use an Agilent 82357A USB GPIB interface or Agilent 10833A B C D GPIB cable to connect to an external computer or equipment LINE input receptacle AC power cable is connected to this receptacle Serial number You need this serial number when using the Agilent Technologies telephone assistance program Agilent E5260 E5270 User s Guide Edition 5 2 7 NOTE Figure 2 1 Introduction Measurement Units Measurement Units The source monitor unit SMU can force a constant voltage or current and can measure a DC current or voltage Figure 2 1 is a simplified SMU circuit diagram The SMU can perform the following operations e Apply voltage and measures current Apply current and measures voltage e Apply voltage and measures voltage Apply current and measures current To select the SMU operation mode in the GPIB remote condition enter the CMM command Simplified SMU Circuit Diagram SMU Force COMMON Compliance The SMU has a compliance feature that limits output voltage or current to prevent damage to the device under test When the SMU applies voltage you can specify
143. move the cursor to I RANGE then press the Enter key 3 Press the arrow keys to select the output range 4 Press the OutCh key if you are setting the output range of the same output mode voltage or current channels and perform 3 5 Press the Enter key to make the setup effective or press the Exit key to cancel changing the setup 6 Press the Exit key to close the setup menu 5 18 Agilent E5260 E5270 User s Guide Edition 5 NOTE NOTE Front Panel Operations Applying Source Output To Use Series Resistor This instruction connects the series resistor to the specified channel internally 1 Press the Shift key and the On Off key 2 Press the arrow keys and select ON to connect the series resistor 3 Press the OutCh key if you are setting the resistor for another channel and perform 2 4 Press the Enter key to make the setup effective or press the Exit key to cancel changing the setup A series resistor is mounted on each module If you use a series resistor the voltage you set is applied to the near side of the series resistor Thus the voltage will be divided by the series resistor and the device under test The series resistor cannot be used for the measurements that use the high resolution SMU HRSMU connected to the Atto Sense and Switch Unit ASU or the measurements that use 1 A range of the high power SMU HPSMU To Use Filter This procedure connects the filter to the specified channel internally
144. ms e period gt width 10 ms for pulse width gt 100 ms To Set Pulse Output The following points must be noted when setting the pulse output The 1 nA range cannot be used e Multiple measurement channels cannot be used The measurement channel uses the compliance range or the specified fixed range The channel cannot perform the auto ranging operation or the limited auto ranging operation Ifthe measurement range differs from the compliance range the SMU might not perform the pulsed output specified Agilent E5260 E5270 User s Guide Edition 5 6 15 ADC Zero Function NOTE Function Details Measurement Time Measurement Time Measurement time depends on integration time measurement range and other measurement conditions and can be expressed by the following formula Measurement time Integration time Overhead time Integration time is the time required for measurement and does not include such factors as range changing or data compensation which would be the overhead time Integration Time Integration time is the time required to get measurement data For accurate and reliable measurement integration time should be increased Integration time can be set for each type of A D converter ADC used by the measurement channel For the Agilent E5260 see the description of the high speed ADC The high resolution ADC is equipped with the Agilent E5270B only e High speed ADC You can adjust the numb
145. mware Revision 0 00 e cece teen eens 5 12 To Display Module Information 0 00 cece eee eee nee 5 13 Agilent E5260 E5270 User s Guide Edition 5 Contents To Display Module Serial Number o oooooooooooororo eee 5 13 To Set GPIB Address iii A A A 5 14 To Set Remote Display Mode o ooooooocoocorrr eens 5 14 To Return to Local Mode 1 0 eee cent nee 5 14 Applying Source Output 02 nunnana 5 15 To Apply DC Current Voltage 0 0 eee eens 5 16 To Set Output Compliance Value 0 cece 5 17 To Set Source Output to Zero 6 cee e eens 5 18 To Set Output Range 0 cc ee eee cette eee nee 5 18 To Use S ries Resistor 2 2c eek eis ane Mae PA Bee ee 5 19 To Use A aot eae Noa folate pipi 5 19 To Switch ASU Internal Connection 0 0 cece eee eee 5 20 Making Measurement 000 c cece ete e eens 5 21 To Measure DC Current Voltage 0 ccc cee eee ene 5 22 To Abort Measurement 20 0 cece eee tee eee 5 23 To Select Measurement Item 0 ccc ee ete 5 23 To Select Measurement Range 0 0 cece eee eee eee 5 24 To Set A D Convertet si E a RR 5 25 TOS EE Walt Time A ina 5 27 To Set Data Display Format 2 0 0 cee cect eens 5 28 6 Function Details Measurement Mode nnn 0 000 ccc cece ett e nett n enn 6 3 Measurement Mode in Local Condition 0 0 0 0 ce eee ee eee 6 3 Measurement Mode
146. n E5263A UK6 Commercial cal certificate w test data E5263A ABA Manual set English E5263A ABJ Manual set Japanese Agilent E5260 E5270 User s Guide Edition 5 2 51 Introduction Accessories and Options aie Option Item Description E5270B 8 Slot Precision Measurement Mainframe E5270B 050 50 Hz power line frequency E5270B 060 60 Hz power line frequency E5270B A6J ANSI Z540 compliant calibration E5270B UK6 Commercial cal certificate w test data E5270B ABA Manual set English E5270B ABJ Manual set Japanese E5280B Precision High Power Source Monitor Unit Module for Agilent E5270B E5281B Precision Medium Power Source Monitor Unit Module for Agilent E5270B E5287A Atto Level High Resolution Source Monitor Unit Module for Agilent E5270B E5288A Atto Sense and Switch Unit for Agilent E5287A E5290A High Speed High Power Source Monitor Unit Module for Agilent E5260A E5291A High Speed Medium Power Source Monitor Unit Module for Agilent E5260A N1253A Digital I O accessories N1253A 100 Digital I O T cable N1253A 200 Digital I O BNC Box N1254A Accessories N1254A 100 GNDU to Kelvin Adapter N1254A 107 Triax m Triax f Adapter N1254A 108 ASU Magnetic Stand 2 52 Agilent E5260 E5270 User s Guide Edition 5 Introduction Accessories and Options o Option Item
147. n Ger teeinstellungen folgende Schritt durch Beenden Sie die gegenw rtige Messung durch Dr cken der Output Taste die Output Leuchtdiode erlischt e Vergewissern Sie sich da die Hochspannungswarnlampe erloschen ist e ffnen Sie den Deckel der MeBfassung Agilent 16442 die Verriegelungsklemme INTLK ffnen Entladen Sie alle an SMUs angeschlossenen Kondensatoren falls vorhanden Informieren Sie Personen in unmittelbarer N he der Ger te Agilent E5260 E5270 ber die Gef hrlichkeit der bestehenden Hochspannung und sichern Sie den Zugang zum Pr fplatz zum Schutz Dritter In This Manual This manual describes the front panel operation installation and functions of the Agilent Technologies E5270B E5260A E5262A E5263A Agilent E5260 E5270 series This manual consists of the following chapters Chapter 1 Getting Started This chapter briefly explains how to use the Agilent E5260 E5270 by the front panel operation Chapter 2 Introduction This chapter describes overview specifications accessories and options of the Agilent E5260 E5270 Chapter 3 Installation This chapter explains how to install the Agilent E5260 E5270 and how to connect the device under test to a test fixture Chapter 4 Front Panel Reference This chapter provides the reference information of the Agilent E5260 E5270 front panel keys Chapter 5 Front Panel Operations This chapter explains how to use
148. nce on page 6 9 Range change is performed when the compliance value is set not when the measurement is performed Agilent E5260 E5270 User s Guide Edition 5 6 7 Function Details Ranging Mode Enhanced Auto Ranging for Current Measurement Expanded functions are available for the auto ranging operation of the current measurement channel To use the functions execute the RM command The RM command selects the following operation mode and the rate value The rate value defines the boundary of ranging Mode 1 Performs normal auto ranging operation If a condition shown below is satisfied the range changes immediately even during measurement Measurement value gt Range x X 100 Measurement value lt Range x 0 1 where X 115 or 100 at the maximum range Mode 2 If the following condition is satisfied the range changes up after measurement Measurement value gt current 1 Mode 3 If the following condition is satisfied the range changes down immediately even during measurement Measurement value lt current2 If the following condition is satisfied the range changes up after measurement Measurement value gt current where current and current2 are given by the following formula Then rate must be an integer 11 to 100 current Range x rate 100 current2 Range x rate 1000 For 200 mA they must be current 200 mA x rate 100 current2 100 mA x rate 100 For example if the range value is
149. nchronized to the pulsed bias A synchronous staircase sweep source is also available Quasi pulsed Spot Measurement Applies quasi pulsed voltage or current and measures voltage or current Search Measurement linear search and binary search Applies voltage or current and measures voltage or current Repeats this for various output values until the search stop condition is satisfied Synchronous output is available Agilent E5260 E5270 User s Guide Edition 5 Introduction Specifications Time Stamp The E5260 E5270 supports a time stamp function utilizing an internal quartz clock Resolution 100 us e Program Memory The E5260 E5270 mainframe contains volatile memory that can be used to increase test measurement throughput Program memory allows the storage of program code in the E5260 E5270 eliminating the need to communicate over the GPIB interface In addition input data can be passed to code sequences stored in program memory Maximum lines of Storable Code 40 000 Maximum number of program sequences 2 000 Output Data Buffer The number of data points that can be stored in the data buffer varies with the choice of the output data format Minimum number of Storable Data Points 34 034 e Trigger I O Trigger in out synchronization pulses before and after setting and measuring DC voltage and current Arbitrary trigger events can be masked or activated independently Input Input Level TTL level negat
150. nformation Sense lt 100 Force lt 1Q s lt 1 6 A lt 0 7Q 1 6A lt Is lt 2 0 A lt 0 35 Q 2 0 A lt Is Is is the current being sunk by the GNDU Agilent E5260 E5270 User s Guide Edition 5 2 31 Introduction Specifications E5280B HPSMU Voltage Range Resolution and Accuracy Refer to Table 2 21 Current Range Resolution and Accuracy Refer to Table 2 22 Power Consumption Voltage source mode Voltage Range Power Consumption 2V Ic x 20 W 20 V Ic x 20 W 40 V Ic x 40 W 100 V Ic x 100 W 200 V Ic x 200 W a Ic is the current compliance setting Current source mode Voltage Compliance Power Consumption Ve lt 20V lo x 20 W 20V lt Vc lt 40V lo x 40 W 40V lt Vc lt 100 V lo x 100 W 100 V lt Vc lt 200 V lo x 200 W a Vc is the voltage compliance setting b Io is the output current Output terminal connection Triaxial connector Kelvin remote sensing e Voltage Current Compliance Limiting Voltage Compliance Current Compliance Compliance Accuracy 2 32 0 V to 200 V pAto 1A Same as the current or voltage set accuracy Agilent E5260 E5270 User s Guide Edition 5 Introduction S
151. ngle mark is not displayed Trigger Trigger wait mode C GPIB command S Step source start or M Step measurement start The trigger function is available for the GPIB remote condition See Programming Guide Error Error status indicator The triangle mark appears when any error has occurred Integ A D converter operation mode A Auto M Manual or P PLC For details see Measure key group on page 4 11 Output Output status indicator The triangle mark appears while the source output is being applied by the channel specified by S ch For the Agilent E5270B if ASU Atto Sense and Switch Unit connects to the AUX side not SMU side the reversed triangle mark appears Repeat Repeat measurement status indicator The triangle mark appears when the repeat measurement mode is selected M ch Measurement channel number effective for the data displayed in the Meas Data area 1 or 2 for 2 ch one of 1 to 8 for 8 ch mainframe S ch Source channel number effective for the data displayed in the Setup Data area 1 or 2 for 2 ch one of 1 to 8 for 8 ch mainframe In the remote mode and the default setting the statuses of Output Repeat M ch and S ch are not displayed To display all information set the RMT _DSPL function ON Refer to RMT _DSPL on page 4 24 Agilent E5260 E5270 User s Guide Edition 5 4 9 Local Reset Shift Local Menu Cal Test Shift Menu ZeroVolt Restore Shift ZeroVolt Front
152. nnection SMU1 SMU Force Agilent 16493K Kelvin Triaxial Cable 3 m SMU2 Sense or 1 5m SMU3 SMU Force Up to 3 SMUs can be connected to the 16442B by the Kelvin connection SMU4 Sense SMUS SMU Force SMU6 Sense For non Kelvin connection SMU1 SMU Force Agilent 16494A Triaxial Cable 3 m or 1 5 m SMU2 SMU Force Up to 6 SMUs can be connected to the SMU3 SMU Force 16442B by the non Kelvin connection SMU4 SMU Force SMUS SMU Force SMU6 SMU Force NOTE Making non Kelvin connection The Force terminals can be used to force and measure DC voltage or current If you want to simplify the cable connections open the Sense terminals and connect the Force terminals only to the test fixture by using the triaxial cables If you make the kelvin connection use both Force and Sense terminals Connecting the Force and Sense lines together at the terminal of the device under test minimizes the measurement error caused by the residual resistance of the connection cables The kelvin connection is effective for the low resistance measurement and the high current measurement 3 12 Agilent E5260 E5270 User s Guide Edition 5 Table 3 1 NOTE Installation Installing Accessories To Connect Connector Plate The connector plates available are listed in Table 3 1 For connector plate installation information refer to Agilent 16495 Installation Guide Connector Plates
153. nother channel has reached compliance Current measurement data of another channel has reached the limit for the present measurement range Ifyou set the manual mode for compliance polarity of the DI command set the voltage compliance value as shown below See Figure 6 6 Ifthe output current is a positive value or zero Iset gt 0 Set the compliance value to more than Vref Ifthe output current is a negative value Iset lt 0 Set the compliance value to less than Vref In Figure 6 6 Al is 2 5 to 12 of the range value in the current output range Allowable Voltage Compliance DI Manual Mode When Iset gt 0 When Iset lt 0 Output Voltage Output Voltage Characteristics of DUT A Characteristics of DUT Vrey ponte r Iset i gt Output Current gt Output Current Iset i Irev Al If you set the manual mode for compliance polarity of the DI command and if you do not set the allowable compliance value the SMU may force Irev not Iset Refer to Operation of SMU in Current Output on page 6 14 Agilent E5260 E5270 User s Guide Edition 5 6 13 Function Details Compliance Operation of SMU in Current Output The I V characteristics of the SMU in current output is determined by the current output value sef and the voltage compliance value Refer to Figure 6 7 The SMU output depends on the SMU I V characteristics and the characteristics of the test device DUT The ou
154. nt which may damage the DUT To solve this problem Insert a protecting resistor as close as possible to DUT You can also use a series resistor built into the SMU Agilent E5260 E5270 User s Guide Edition 5 7 9 If You Have a Problem Channel Status Code Channel Status Code The channel status code indicates the following statuses of the measurement channel and is displayed in the channel status area on the LCD No status code is displayed if the Agilent E5260 E5270 is in the normal condition x One or more channels are oscillating Vv Measurement data exceeds the measurement range C This channel reached its compliance setting T Another channel reached its compliance setting The status priority is X gt V gt C gt T 7 10 Agilent E5260 E5270 User s Guide Edition 5 If You Have a Problem Error Codes Error Codes If errors occur error codes are stored in the error buffer To read the error code execute the ERR command To read the error message execute the EMG command The output of the error codes is in the order that they occurred and the first four error codes are stored in the buffer If no errors occurred 0 0 0 0 is returned Operation Error 100 Undefined GPIB command Send the correct command 102 Incorrect numeric data syntax Correct the data syntax 103 Incorrect terminator position Correct the command syntax The number of parameters will be incorrect 120 Inc
155. nt 4284A LCR meter connect the Agilent 16048D E test leads For the instrument other than the 4284A connect the BNC cable to the CMU cur AUX In terminal And open the CMU pot terminal or cover it by using the BNC open cap Adjust the cable length in the shielding box and catch in the cables by using the cover of the 16495K Connect the cable extended from the DUT interface to the ASU output terminal For the non Kelvin connection open the Sense terminal or cover it by using the triaxial open cap Turn the Agilent E5270B off Connect the D sub cable from the ASU to the HRSMU D sub connector Connect the triaxial cable from the ASU to the HRSMU Force terminal The specifications of the ASU are guaranteed while it is connected to the exclusive HRSMU Confirm the serial number of the HRSMU and the ASU and connect them properly See To Display Module Serial Number on page 5 13 1 Turn the instrument off 2 Connect the BNC cable from the ASU CMU cur AUX In terminal to the instrument Prepare an adapter if the instrument s input output connector is not BNC Agilent E5260 E5270 User s Guide Edition 5 3 17 Installation Installing Accessories Figure 3 4 To Connect ASU ASU 1 To CMU CMU cur AUX In Hp CMU pot Force CMU AUX To DUT Force Force Sense ig aM D sub From SMU CMU Return AUX Common sai CMU cur AUX In CMU Return AUX Common pla Lp CMU pot Force CMU AUX To DUT Force Force Sense ig Me D sub From
156. nteg Repeat CPL Vii Value Enables the sub key function The sub key label has been printed on the front panel above the key The label color is blue Def Enter Value Applies the default value to the setup item specified by the cursor in the display area Used with the arrow key Pressing the Fast key and an arrow key speeds up changing the setting value Returns the display to the previous menu or display without making the setup effective Makes the setup effective and returns the display to the previous menu or display Increases the value of the digit specified by the cursor displays another selection for a setup message or moves the cursor to the left on a setup menu Decreases the value of the digit specified by the cursor displays another selection for a setup message or moves the cursor to the right on a setup menu Moves the cursor to the left or displays another selection for a setup message Moves the cursor to the right or displays another selection for a setup message Agilent E5260 E5270 User s Guide Edition 5 4 17 Front Panel Reference Setup Menus Setup Menus This section explains the following setup menus displayed in the Change Setup area Setup Menu e Calibration and Test Menu e Measurement Range Setup Menu e Output Range Setup Menu Setup Menu Press the Menu key The setup menu is displayed in the Change Setup area as shown in the following example The setup me
157. ntroduction Front View The medium power source monitor unit MPSMU and the high resolution source monitor unit HRSMU occupy one slot Hence the MPSMU and HRSMU can be installed in any slot Also the channel number is same as the slot number The high power source monitor unit HPSMU occupies two slots Thus the HPSMU can be installed in slots 1 to 2 2 to 3 3 to 4 5 to 6 6 to 7 or 7 to 8 The channel number is the larger slot number for the slots the HPSMU occupies For example if a HPSMU occupies slots 5 and 6 the channel number for the module must be 6 Channel numbers 1 and 5 are not available for the HPSMU NOTE The Agilent E5270B shown above installs two HPSMUs in slots 1 to 4 and two MPSMwUs in slots 5 to 6 Then the available channel numbers are 2 and 4 for the HPSMUs and 5 and 6 for the MPSMUs aE ET ES2708 EJ ala Fig AAA c A rl pel ree I ja E lt I gt AA EAA E ave LE Agilent u XE Agilent a 2 6 Agilent E5260 E5270 User s Guide Edition 5 Introduction Rear View Rear View This section describes the rear view of the Agilent E5260 E5270 series Line Serial Number E E In Out A Ext Trig Digital I O GPIB Ext Trig terminals Two BNC connectors one for trigger input and one for trigger output For details about the trigger function refer to Programming Guide The trigger function is available for the Agilent E5260 E5270 in the GPIB re
158. nu is used to change the GPIB address power line frequency monitor items data display format and so on 123 456 mA 1 23456mV OUT 123 4mV CONFIG MON ITEM DSPL FRMT gt 123 456 mA 1 23456mV OUT 123 4mV lt WAIT TIME ERROR RMT DSPL BEEP Press the arrow key to move the cursor to the desired function name Then press the Enter key The setup message or the sub menu will be displayed To return to the previous menu press the Exit key 4 18 Agilent E5260 E5270 User s Guide Edition 5 Front Panel Reference Setup Menus Function Tree The setup menu provides the following functions e CONFIG e ADDRESS Sets the GPIB address LINEFREO Sets the power line frequency REVISION Displays the firmware revision UNIT Displays the module information of each slot SERIAL Displays the serial number of each module ITEM1 Selects the item displayed in the Setup Data 1 area ITEM2 Selects the item displayed in the Setup Data 2 area DSPL FRMT Selects the data display format engineering or scientific m e WAIT TIMI SOURCI Sets the source wait time El e MEASURE Sets the measurement wait time ERROR DISPLAY Displays the error code and error message e CLEAR Clears the error buffer e RMT_DSPL Selects on or off for the remote display mode BEEP Selects on or off for the beeper Agilent
159. oduction Specifications Table 2 23 Voltage Range Resolution and Accuracy E5281B Measurement Accuracy Measurement Resolution mV Voltage Force Force Accuracy Maximum a Range Resolution a Speed e t mV HighSpeed High Resolution Ten ADC ADE ADC ADC 05V 25uV 25 uV 0 5uV 0 03 0 35 0 03 0 25 0 02 0 25 100 mA 2V 100u4V 1004V 2 uV 0 03 0 9 0 03 0 7 0 02 0 7 100mA 5V 250u4V 250uV Suv 0 03 2 0 03 2 0 02 1 100 mA 20 V 1 mV 1 mV 20 uV 0 03 4 0 03 4 0 02 2 100 mA 40V 2mV 2 mV 40 uV 0 03 7 0 03 8 0 02 3 b 100V 5mV 5 mV 100 uV 0 04 15 0 03 20 0 03 5 a of output measured value offset value in mV b 100 mA Vo lt 20 V 50 mA 20 V lt Vo lt 40 V 20 mA 40 V lt Vo Vo is the output voltage Table 2 24 Current Range Resolution and Accuracy E5281B Measurement Resolution Current Force High Force Accuracy Measurement Accuracy Maximum Range Resolution High Speed A A J A A Voltage ADC Resolution ADC 1nA SOfA 50 fA 10 fA 0 5 3E7 2 Vox2E 5 0 5 3E Vox2E7 5 100V 10nA 500fA 500 fA 10 fA 0 5 7E Vox2E 4 0 5 5E 2 Vox2E 4 100 V 100nA SpA SpA 1
160. of the channel specified by the S ch status press the On Off key 5 16 Agilent E5260 E5270 User s Guide Edition 5 Front Panel Operations Applying Source Output To Set Output Compliance Value This instruction sets the source output or compliance value of the specified source channel 1 Press the OUT Value key to set the output OUT value Or press the CPL Value key to set the compliance CPL value 2 Press the V I key to select the output mode V voltage output or I current output 3 Press the Left or Right arrow key to move the cursor to the digit whose value you want to change 4 Press the Up or Down arrow key to change the value Pressing the Fast key and the arrow key speeds up changing the value If the source output has been enabled Output ON status the new value will be applied to the output immediately 5 Repeat 3 and 4 until the required OUT or CPL value is displayed on the LCD 6 To set the value of another channel press the OutCh key to select the channel and perform 2 to 5 7 Press the Enter key or the Exit key to end the output compliance setup operation To multiply the value by 10 or 0 1 Move the cursor to the arithmetic point and press the Up or Down arrow key The Up arrow key will multiply the value by 10 The Down arrow key will multiply the value by 0 1 Pressing the Up or Down arrow key changes the cursor condition from blink to inversion This means the value is not effective
161. on function automatically starts calibration for all modules every 30 minutes if the output switches of all modules are off for 30 minutes To perform calibration correctly the measurement terminals should be opened before starting calibration If auto calibration is enabled open the measurement terminals or disconnect the device under test from the measurement terminals after measurement This function is not available for the Agilent E5260 Available only for the Agilent E5270B Displays the following message ADC Zero ON or OFF Press the arrow key to set the ADC zero function ON or OFF Then press the Enter key to make the setup effective or press the Exit key to cancel changing the setup The ADC zero function is available for the high resolution A D converter ADC and not available for the high speed ADC This function measures the internal offset of the high resolution ADC and compensates it automatically The measurement data displayed on the LCD will be the data after compensation This function is especially effective for low voltage measurements Disable the function in cases where measurement speed is more important than measurement accuracy This approximately halves integration time 4 26 Agilent E5260 E5270 User s Guide Edition 5 CAL NOTE Front Panel Reference Setup Menus Displays the sub menu that provides the following functions EXECUTE Displays the following message Calibration
162. ormal voltage or current can be caused by incorrect connections of the Agilent E5260 E5270 to the test device excess voltage or current input momentary power loss defects of the instrument and so on If no cable is connected to the measurement terminals of the Agilent E5260 E5270 and the line voltage is correct the Agilent E5260 E5270 may have a defect Contact the nearest Agilent Technologies Service Center for assistance Agilent E5260 E5270 User s Guide Edition 5 6 25 Function Details Initial Settings SEE Initial Settings Agilent E5260 E5270 is initialized by turning the E5260 E5270 on the RST command or the device clear Initial settings of the Agilent E5260 E5270 are shown in Table 6 2 and Table 6 3 Table 6 3 fits into one page and lists all initial settings Table 6 2 Initial Settings Setup Item Initial Setting Commands Measurement channel Channel assigned the lowest number MCH Measurement data to be displayed Data 1 Compliance side data MPA Data 2 none MPA Output channel Channel assigned the lowest number SCH Output data to be displayed Data 1 OUT SPA Data 2 CPL SPA Data display format ENGINEERING DFM Remote mode data display off RED Remote mode key lock unlock unlock KLC Auto calibration on CM ADC zero function for E5270B off AZ SMU output switch open CN CL ASU path 1 pA auto range indicator SMU side disabled enabled SAP SAR SAL Filter off FL Series resistor off SSR A D
163. orrect parameter value Correct the parameter value 121 Channel number must be 1 to 2 or 1 to 8 Correct the channel number The channel number must be 1 to 2 for the Agilent ES262A E5263A or 1 to 8 for the Agilent ES260A E5270B 122 Number of channels must be corrected Check the MM FL CN CL IN DZ or RZ command and correct the number of channels 123 Compliance must be set correctly Incorrect compliance value was set Set the compliance value correctly 124 Incorrect range value for this channel Check the range value available for the channel and correct the range value Agilent E5260 E5270 User s Guide Edition 5 7 11 If You Have a Problem Error Codes 126 130 150 152 153 160 161 162 Pulse base and peak must be same polarity The polarity of the base and peak values must be the same in the PI command Also the polarity of the base start and stop values must be the same in the PWI command Start and stop must be same polarity For a log sweep the polarity of the start and stop values must be the same in the WV WI WSV WSI or WNX command Also 0 is not allowed for the start and stop values Command input buffer is full The Agilent E5260 E5270 can receive 256 characters maximum including the terminator at one time Cannot use failed module The channel number specifying the module failed the self test or calibration Specify another module that passed the self test or cali
164. pA 5 pA 100 nA 0 12 5E Vox2E 0 1 3E Vox2E 7 b lA 50pA 50 pA l pA 0 5 5E Vox2E 0 5 3E Vox2E 7 a of output measured value fixed offset in A proportional offset in A Vo is the output voltage in V b 200 V lo lt 50 mA 100 V 50 mA lt lo lt 125 mA 40 V 125 mA lt Io lt 500 mA 20 V 500 mA lt Io lt 1 A Io is the output current Agilent E5260 E5270 User s Guide Edition 5 2 33 Introduction Specifications E5281B MPSMU e Voltage Range Resolution and Accuracy Refer to Table 2 23 e Current Range Resolution and Accuracy Refer to Table 2 24 e Power Consumption Voltage source mode Voltage Range Power Consumption 0 5 V Ic x 20 W 2V Ic x 20 W 5V Ic x 20 W 20 V Ic x 20 W 40 V Ic x 40 W 100 V Ic x 100 W a Ic is the current compliance setting Current source mode Voltage Compliance Power Consumption p Ve lt 20V Io x 20 W 20V lt Vc lt 40V lo x 40 W 40V lt Vc lt 100 V Io x 100 W a Vc is the voltage compliance setting b Io is the output current e Output terminal connection Triaxial connector Kelvin remote sensing e Voltage Current Compliance Limiting Voltage Compliance Current Compliance Compliance Accuracy 0Vto 100V 1 pA to 100 mA Same as the current or voltage set accuracy 2 34 Agilent E5260 E5270 User s Guide Edition 5 Intr
165. pecifications Table 2 21 Voltage Range Resolution and Accuracy E5280B Measurement Resolution Measurement Aecuracy mV Voltage Force Force Accuracy Maximum Range Resolution a Speed a mV HighSpeed High Resolution Ten ADC ADG ADC ADC 2V 100uV 100V 2 uV 0 03 0 9 0 03 0 7 0 02 0 7 1A 20 V 1 mV 1 mV 20 uV 0 03 4 0 03 4 0 02 2 1A 40V 2mV 2mV 40 uV 0 03 7 0 03 8 0 02 3 500mA 100V 5mV 5 mV 100 uV 0 04 15 0 03 20 0 03 5 125mA 200V 10mV 10 mV 200 uV 0 045 30 0 035 40 0 035 10 SOmA a of output measured value offset value in mV Table 2 22 Current Range Resolution and Accuracy E5280B Measurement Resolution Current Force High Force Accuracy Measurement Accuracy Maximunl Range Resolution A Resolution A A At A Voltage ADC ZIMA SEA UA 1OfA 0 5 3E 2 Vox2E 15 0 5 3E v0x2E 5 200V 10nA 500fA 500fA 10 fA 0 5 7E 2 Vox2E4 0 5 5E 2 Vox2E 4 200V 100nA 5 pA 5 pA 100 fA 0 12 5EUl Vox2E13 0 1 3El Vox2E3 200V t 1pA SOPA 50 pA 1 pA 0 12 4E7 9 Vox2E 0 14 2E7 9 Vox2E 7 200 V 10pA 500pA 500pA 10 pA 0 12 5E Vox2E 0 143E Vox2E 200V 100A 5nA 5nA 100pA 0 12 4E8 Vox2E 1 0 1 2E8 Vox2E 200V lmA 50nA 50 nA l nA 0 12 5E7 Vox2E 0 1 3E7 Vox2E 200 V 10mA 500nA 500nA 10nA 0 12 4E Vox2E 0 1 2E Vox2E 200V 100mA S
166. peration aie occupied resolution E5280B HPSMU 2 200 V to 200 V 2 pV 10 fA IAtolA E5281B MPSMU 1 100 V to 100 V 0 5 uV 10 fA 100 mA to 100 mA E5287A HRSMU 1 100 V to 100 V 0 5 uV 1 fA 100 mA to 100 mA E5288A ASU 100 V to 100 V 0 5 pV 0 1 fA 100 mA to 100 mA a The E5288A Atto Sense and Switch Unit ASU is connected to the E5287A Atto Level High Resolution SMU HRSMU Maximum Output Power e E5260A E5270A The total module power consumption cannot exceed 80 W Note Using the HPSMU MPSMU and HRSMU it is impossible to create a combination that exceeds the 80 Watt limit e E5262A E5263A There are no power restrictions Both mainframes support having both of their modules simultaneously output maximum voltage or current e Maximum Voltage between Common and Ground lt 42V Pulse Measurement Width 500 us to 2 s Period 5 ms to 5s Period gt Width 2 ms when Width lt 100 ms Period gt Width 10 ms when Width gt 100 ms Resolution 100 us 2 30 Agilent E5260 E5270 User s Guide Edition 5 Ground Unit GNDU Introduction Specifications The GNDU is furnished with the mainframe Output voltage Maximum sink current Output terminal connection Load capacitance Cable resistance 0V 100 uV E5260A E5270B 4 A E5262A E5263A 2 2 A Triaxial connector Kelvin remote sensing 1 uF supplemental information Terminal Cable resistance supplemental i
167. peration mode Refer to Table 4 4 Press the MeasCh key to specify the measurement channel and press the arrow key to set the integration time or the number of averaging samples Then press the Enter key to make the setup effective or press the Exit key to cancel changing the setup The setup value is effective for the channels that use the same settings of the AD type and the ADC operation mode Displays the measurement range setup menu in the Change Setup area See Measurement Range Setup Menu on page 4 31 Selects the spot measurement mode and performs measurement using the channel specified by the channel number displayed in the M ch status area If measurement is in progress stops measurement and performs spot measurement Note that the channel can perform measurement when its Output status is ON Selects the repeat measurement mode and performs measurement using the channel specified by the channel number displayed in the M ch status area If measurement is in progress stops measurement and starts repeat measurement Note that the channel can perform measurement when its Output status is ON Displays the following message Press the arrow key to set YES and then press the Enter key to stop measurement Abort NO Perform the Abort operation if the Agilent E5260 E5270 still continues the previous operation even though the condition was changed from remote to local 4 12 Agilent E5260 E5270 User s Guide Edition
168. primary search source channel and the synchronous source channel must be different and they must be set to the same output mode voltage or current Search sync source is overflow Set the search sources so that the same output range is set to both primary and synchronous search sources Search target must be compliance value or less The search target value must be less than or equal to the compliance value of the search monitor channel Correct the search target value or the compliance value Start and stop must be different Set different values for the search start and stop values Agilent E5260 E5270 User s Guide Edition 5 277 278 279 303 305 307 310 311 603 610 If You Have a Problem Error Codes Step must be output resolution or more Set the search step value to the output resolution or more Search and sync channels must be different Set the search source and the synchronous source to different channels Search monitor mode must be compliance side Send the LGI BGI command to set the voltage source search monitor channel or send the LGV BGV command to set the current source search monitor channel Excess voltage in MPSMU Voltage that exceeds maximum voltage at the present current range was detected by a MPSMU All output switches were set to OFF Excess current in HPSMU Current that exceeds maximum current at the present voltage range was detected by a HPSMU All output swit
169. r s Guide Edition 5 7 5 If You Have a Problem When You Make a Measurement If Measured Value Oscillates when Measuring Negative Resistance If the DUT has negative resistance characteristics SMUs may oscillate Because SMUs operate as negative feedback amplifier To solve this problem e For voltage controlled negative resistance device e Connect G in parallel with your DUT to cancel negative resistance To obtain an output I V curve use the following equation IY I GxV V V gt UGTOG003 110x50 For current controlled negative resistance device e Connect R in series with your DUT to cancel negative resistance To obtain an output I V curve use the following equation VZ V RxI e Ifthe resistance of the DUT is less than 1 MQ you can use a series resistor built into the SMU Vz UGTO6004 1050 7 6 Agilent E5260 E5270 User s Guide Edition 5 If You Have a Problem When You Make a Measurement If Noise Affects the Measured Values When you measure low current of a DUT the measured values may not be stable To solve this problem Set the power line frequency correctly The value affects the integration time So the wrong value causes the measurement error by the power line noise Use guarding to reduce the leakage current between your prober and the E5260 E5270 Note that long wires cause oscillation because of their large inductance
170. r plate use low noise coaxial cable Agilent part number 8121 1191 This cable can maximize the guard effects and minimize the impression of the external noise Following figure shows the cutting example of this cable Key point is the isolation between the conductive layer and the center conductor So cut and trim the end of the cable as shown in this figure by using a cutter and so on Cover here using sleeve Insulator black min 2 mm Center conductor for Force Sense signal RRS RA RREI ete 29 meee OO approx 10 to 15 mm Outer conductor i Insulator clear for Guard signal L Conductive layer black Never connect the Guard terminal to any output including circuit common chassis ground or any other guard terminal Doing so will damage the SMU Potentially hazardous voltages up to 100 V MPSMU or 200 V HPSMU are present at the Force Sense and Guard terminals To prevent electrical shock do not expose these lines Before turning the Agilent E5260 E5270 on connect the Interlock terminal to an interlock circuit Before you touch any connections to these terminals turn the Agilent E5260 E5270 off disconnect the power cable and discharge any capacitors 3 28 Agilent E5260 E5270 User s Guide Edition 5 NOTE Installation Connecting Measurement Devices Connecting Measurement Devices This section describes how to connect device under test DUT to the 16442B test fixture
171. rent and measures voltage or current at each sweep step A maximum of eight measurement channels can be used and an extra sweep source forces the staircase sweep output synchronized to the primary sweep output Number of Steps 1 to 1 001 Hold Time 0 to 655 35s 1 ms resolution Delay Time 0 to 65 5350s 100 us resolution Agilent E5260 E5270 User s Guide Edition 5 2 45 Introduction Specifications 2 46 Multi Channel Sweep Measurement Applies staircase sweep voltage or current using multiple sweep sources and performs staircase sweep measurement A maximum of eight sweep sources and eight measurement channels can be used Number of Steps 1 to 1 001 Hold Time 0 to 655 35s 1 ms resolution Delay Time 0 to 65 5350s 100 us resolution Pulsed Spot Measurement Applies pulsed voltage or current and measures voltage or current Pulse Width 500 us to 2 s 100 us resolution Pulse Period 5 ms to 5 s 100 us resolution e Period gt Width 2 ms when Width lt 100 ms e Period gt Width 10 ms when Width gt 100 ms Maximum Pulse Duty 50 Pulsed Sweep Measurement Applies pulsed sweep voltage or current and measures voltage or current at each sweep step An extra sweep source can be used to force the staircase sweep output synchronized to the pulsed sweep output Staircase Sweep with Pulsed Bias Measurement Applies pulsed voltage or current and performs staircase sweep measurement The staircase sweep output is sy
172. s can be used as an alternative to the BNC trigger in and trigger out lines to synchronize the E5260 E5270 with other instruments They can also be used as output and input ports for digital signals The user can selectively assign pins to trigger mode or digital I O mode Furnished Software e VXIplug amp play driver e TIS library only for E5270B Supported operating systems Microsoft Windows 7 Professional and Windows XP Professional For the latest system requirements go to www agilent com and type in E5270B or E5260A in the Search field at the top of the page 2 48 Agilent E5260 E5270 User s Guide Edition 5 Introduction Specifications General Specifications Temperature Range Operating 5 C to 40 C Storage 20 C to 60 C Humidity Operating 15 to 80 RH E5260 15 to 70 RH E5270B non condensing Storage 5 to 90 RH E5260 5 to 80 RH E5270B at 50 C non condensing Altitude Operating 0 to 2 000 m 6 561 ft Storage 0 to 4 600 m 15 092 ft Power Requirement 90 to 264 V 47 to 63 Hz Maximum Volt Amps VA 600 VA E5260A E5270B 400 VA E5262A E5263A Regulatory Compliance EMC IEC 61326 1 EN 61326 1 AS NZS CISPR 11 Safety IEC 61010 1 EN 61010 1 CAN CSA C22 2 No 61010 1 04 NRTL C Certification CE cCSAus C Tick Dimensions E5260A E5270B 426 mm W x 235 mm H x 575 mm D E5262A E5263A 426 mm W x 150 mm H x 575 mm D Weight 17 kg E5260A E5270B mainframe
173. s of the residual resistance test leads must be connected as close as possible to the DUT Agilent E5260 E5270 User s Guide Edition 5 3 31 WARNING Installation Connecting Measurement Devices Using Connector Plate This section provides the information useful for connecting cables and probing needles to a connector plate e To Reduce Leakage Current e To Measure Low Resistance To Reduce Leakage Current To reduce the leakage current caused by connection cables the guard technique is effective Connect the probing needles to the terminals of the connector plate by using coaxial cables as shown below 1 Atend of cable connect coaxial center conductor to force terminal of connector plate and connect coaxial outer conductor to guard terminal of connector plate 2 At another end connect coaxial center conductor to tail of the probing needle Never connect the outer conductor at this cable end Extend the outer conductor as close as possible to the probing needle Example The following example connection can be used to reduce the leakage current Extend the outer conductor as close as possible to the probing needle This also reduces the induced noise Center Conductor Outer Conductor Ny Needle aN Coaxial Cable Connector Plate UGTOIO3O GAL120Wx50H Contact Pad E NE Do not touch the guard terminal with bare hands because you may be shocked by high voltage The potential of t
174. s the Enter key for the message Abort YES to abort measurement or press the Exit key to cancel the abort operation To Select Measurement Item 1 Press the MeasCh key repeatedly to specify the measurement channel The channel number must appear in the M ch status area 2 Press the Measltem key repeatedly to select the measurement item voltage V or current A both voltage and current resistance Q or power W Agilent E5260 E5270 User s Guide Edition 5 5 23 NOTE Front Panel Operations Making Measurement To Select Measurement Range This procedure sets the measurement range of the specified measurement channel 1 Press the MeasRange key 2 For voltage measurement move the cursor to V_RANGE then press Enter For current measurement move the cursor to I RANGE then press Enter 3 Press the arrow keys to select the measurement range 4 If you set the measurement range of the same measurement mode voltage or current channels press the MeasCh key to select the channel and perform 3 5 Press the Enter key to make the setup effective or press the Exit key to cancel changing the setup 6 Press the Exit key to close the setup menu Before using 1 pA range only for E5270B The measurement channel connected to the ASU Atto Sense and Switch Unit supports the 1 pA range To use the 1 pA range set the 1 pA fixed range or the 1 pA limited auto ranging The E5270B automatically performs the compensation of
175. se hors tension les 4 instructions suivantes doivent tre ex cut es Finir la m sure en appuyant sur la touche Output verifier que l indicateur Output n est pas allum e S assurer que soit allum l indicateur d alarme de la haute tension e Ouvrir le convercle de la bo te de blindage Ouvrir les bornes de verrouillage En cas de condensateurs connect s SMU d charger les condensateurs Alerter d autres personnes autour de vous contre le danger de haute tension Achtung Gefahrliche Spannung Von den Ger ten Agilent E5260 E5270 k nnen Spannungen an den Anschliissen Force Guard und Sense von bis zu 200 V ausgehen Um elektrischem Schlag vor zubeugen ist bei der Ben tzung der Ger te Agilent E5260 E5270 folgendes zu beachten Erden Sie das Kabinett falls verwendet sowie die Ger te Agilent E5260 E5270 mittels dreiadriger Netzleitungen Wenn die Meffassung Agilent 16442 zwar angeschlossen jedoch nicht verwendet wird schlie en Sie die Verriegelungsklemme INTLK so an da bel gedffnetem Deckel die Stromzuf hrung zu Agilent 16442 auf jeden Fall unterbrochen wird Vergewissern Sie sich regelm ig da die Verriegelungsfunktion korrekt arbeitet Schalten Sie die Ger te Agilent E5260 E5270 aus und entladen Sie alle Kapazit ten bevor Sie die Anschl sse Force Guard und Sense ber hren Falls Sie die Ger te Agilent E5260 E5270 nicht ausschalten f hren Sie unabh ngig von de
176. surement with pulse output the measurement channel uses the compliance range or the specified fixed range The channel cannot perform the auto ranging operation or the limited auto ranging operation If the voltage output range is changed when the DV DI XE or CL command is executed the voltage measurement range is automatically set to the voltage output range or the compliance range If the current output range is changed when the DV DI XE DZ or CL command is executed the current measurement range is automatically set to the current output range or the compliance range The auto ranging mode and the limited auto ranging mode are available for the output channels When the voltage output range or the voltage compliance range is changed the channel forces 0 V at that moment Agilent E5260 E5270 User s Guide Edition 5 6 5 For measurement channels For output channels Function Details Ranging Mode Auto Ranging Range changing is performed as below The measurement channel automatically searches for and measures at the range that provides the best resolution as follows For current measurement the measurement channel uses the present range if the following formula is satisfied otherwise the channel changes the range Range x 0 1 lt Measurement value lt Range x X 100 where X 115 or 100 at the maximum range See also Enhanced Auto Ranging for Current Measurement on page 6 8 For voltage measurement t
177. t E5260 E5270 to an electric ground safety ground If you do not use Agilent 16442 Test Fixture make sure to connect the INTLK terminal to a switch that turns off when the shielding box access door is opened Confirm periodically that INTLK function works normally Before touching the connections of the force guard and sense terminals turn the Agilent E5260 E5270 off and discharge any capacitors whenever possible If you do not turn the Agilent E5260 E5270 off complete all of the following items regardless of any Agilent E5260 E5270 settings Terminate measurement by pressing Output key confirm that the Output status indicator is not lit Confirm that the HIGH VOLTAGE indicator is not lit Open the shielding box access door open the INTLK terminal e Discharge any capacitors if the capacitance is connected to an SMU Warn workers in the vicinity of the Agilent E5260 E5270 about dangerous conditions AEREA Agilent E5260 E5270 D7 7 3 AF EV AMAIA EIRBERBMASNS ZiEBGHO EF HPSMU DAIIRA E 200 Vde MPSMU OWFIIRK 100 Vdc IRAE EBTIEDO KD LPL ROR Fo T AV 3 AL TV AEA UT Agilent ES260 E5270 ZTA Z Agilent 16442 7Ah 74 7AFYUMOT AY AFH DANI tE 40 y 7 ln IFA YM RE RY ZAI SAA y Y EETA E Belk VSNL RF By 7 ADOBE MRC Agilent E5260 E5270 D INTLK mT BAIS ST SO ERTZEKO NET Y AZO y TERED IER COAT REM MESA
178. t E5281B Agilent E5287A Agilent E5288A Product Options This declaration covers all related options of the above product s complies with the essential requirements of the following applicable European Directives and carries the CE marking accordingly Low Voltage Directive 2006 95 EC EMC Directive 2004 108 EC and conforms with the following product standards EMC Standard Limit IEC 61326 1 2005 EN 61326 1 2006 CISPR 11 2003 EN55011 1998 A1 1999 A2 2002 Group 1 Class A IEC 61000 4 2 2001 EN 61000 4 2 1995 A1 1998 A2 2001 4kV CD 8kV AD IEC 61000 4 3 2002 A1 2002 EN 61000 4 3 2002 A1 2002 3 V m 80 MHz 1 GHz 1 4 2 GHz 1 V m 2 2 7 GHz IEC 61000 4 4 2004 EN 61000 4 4 2004 0 5 kV signal lines 1 kV power lines IEC 61000 4 5 2001 EN 61000 4 5 1995 A1 2001 0 5 kV line line 1 kV line ground IEC 61000 4 6 2003 EN 61000 4 6 1996 A1 2001 3 V 0 15 80 MHz IEC 61000 4 11 2004 EN 61000 4 11 2004 Voltage Dip 0 for 1 0 5 cycle 70 for 25 30 cycles Short Interruptions 0 for 250 300 cycles Canada ICES NMB 001 2004 Australia New Zealand AS NZS CISPR 11 2004 Safety IEC 61010 1 2001 EN 61010 1 2001 Canada CAN CSA C22 2 No 61010 1 04 NRTL C Supplementary Information The product was tested in a typical configuration with Agilent Technologies test systems This DoC applies to above listed products placed on the EU market after Year of the CE marking 04 February 22 2013 m Fe Fl RF Date Toshiyuki Kawaj
179. t key and the Local key Press the Enter key for the message Reset YES to initialize the Agilent E5260 E5270 or press the Exit key to cancel initialization To Set Beeper 2 9 Press the Menu key Move the cursor to BEEP then press the Enter key Press the arrow keys to select the beep ON or OFF Press the Enter key to make the setup effective or press the Exit key to cancel changing the setup Press the Exit key to close the setup menu To Apply Default Value Specify a setup item by using the cursor then press the DefValue key to apply the default value to the setup item Agilent E5260 E5270 User s Guide Edition 5 5 5 Front Panel Operations Setting Up Agilent E5260 E5270 To Select Monitor Items The following procedure selects the items displayed in the Setup Data area 1 Press the Menu key Move the cursor to MON_ITEM then press the Enter key Move the cursor to ITEM1 for the Setup Data 1 area then press the Enter key 9 me Press the arrow keys to select the monitor item OUT source output value CPL compliance value VMR voltage measurement range setting IMR current measurement range setting or ERR error number 5 Press the Enter key to make the setup effective or press the Exit key to cancel changing the setup 6 Move the cursor to ITEM2 for the Setup Data 2 area then press the Enter key 7 Perform 4 and 5 to set the item for ITEM2 8 Press the Exit key twice to close th
180. ta is displayed in the Meas Value area The LCD changes the display as shown below The following data is just an example Stat Meas Value 1 Meas Value 2 Setting Parameter Shift 0 00030nA OUT 0 00 V Avv 1 1 CPL 100 0mA Rarotg Lock Meas Trigger Error Integ Output Repeat M ch S ch 4 Press the On Off key The SMU1 stops source output and measurement Stat Meas Value 1 Meas Value 2 Setting Parameter Shift OFF OUT 0 00 Y A v 1 1 CPL 100 0mA Remtg Lock Meas Trigge Error Integ Output Repeat M ch S ch 1 8 Agilent E5260 E5270 User s Guide Edition 5 Introduction Introduction This chapter describes the basic functions and features of the Agilent E5270B E5260A E5262A E5263A Agilent E5260 E5270 series and consists of the following sections 2 2 Agilent E5260 E5270 Series Front View Rear View Measurement Units Specifications Accessories and Options Agilent E5260 E5270 User s Guide Edition 5 Introduction Agilent E5260 E5270 Series Agilent E5260 E5270 Series The Agilent E5260 E5270 series is an electronic instrument for the semiconductor DC parametric measurement The Agilent E5260 E5270 provides the LCD and front panel keys for applying measuring DC volta
181. tage compliance setting b Io is the output current Introduction Specifications Output terminal connection Triaxial connector Kelvin remote sensing e Voltage Current Compliance Limiting Voltage Compliance Current Compliance Compliance Accuracy 0 V to 200 V E 100pAto 1 A Same as the current or voltage set accuracy Agilent E5260 E5270 User s Guide Edition 5 2 39 Introduction Specifications Table 2 27 Voltage Range Resolution and Accuracy E5290A Voltage Range Force Measurement Force Accuracy Measurement Accuracy Maximum Resolution 1 mV t mV Current 2V 100 pV 0 03 0 9 0 03 0 7 1A 20V 1 mV 0 03 4 0 03 4 1A 40V 2mV 0 03 7 0 03 8 500 mA 100 V 5mV 0 04 15 0 03 20 125 mA 200 V 10mV 0 045 30 0 035 40 50 mA a of output measured value offset value in mV Table 2 28 Current Range Resolution and Accuracy E5290A Current Force Measurement Force Accuracy Measurement Accuracy Maximum Range Resolution A A A A Voltage 100nA SpA 0 12 5E Vpx5E 0 1 3E Vpx5E 2 200 V lA 50 pA 0 12 4E Vpx5E 0 1 2E 0 Vpx5E 200 V 10 pA 500 pA 0 12 5E Vpx5E 0 1 3E Vpx5E 0 200 V 100 pA 5 nA 0 12 4E8 Vpx5E 0 1 2E Vpx5E 200
182. tage drop of resistance Rpur only The impedance of the voltmeter is very high so the voltage drop of resistances rg and rg can be ignored R pur Rout A AMA e y e lol VV V oy N lt V V V a non Kelvin connection b Kelvin connection The Kelvin connection is effective even when forcing voltage The voltage drop due to the residual resistance of the force line wiring is fed back to the voltage source via a comparator in the sense line The input impedance of comparator is high and current flow into the sense line is very low So output error is not significant if the sense line wiring has a residual resistance of 10 Q or less Therefore the specified voltage appears at the sense point point where sense line contacts force line Agilent E5260 E5270 User s Guide Edition 5 3 35 NOTE Installation Maintenance Maintenance Maintenance should be performed periodically to keep the Agilent E5260 E5270 in good condition Calibration Calibration and adjustments must be performed periodically so that the instruments satisfy the specifications and keep a good condition It is recommended to perform the calibration once a year at least For the calibration and adjustments contact your nearest Agilent Technologies Service Center Trained service personnel will perform the calibration and adjustments When shipping the Agilent E5260 E5270 to the service center When
183. the data measured by the 1 pA range and returns the compensated data You can use either the pre stored offset data or the pre measured offset data To measure the offset data perform the self calibration before starting the measurement for a DUT This offset data is temporarily memorized until the E5270B is turned off 5 24 Agilent E5260 E5270 User s Guide Edition 5 Front Panel Operations Making Measurement To Set A D Converter The A D converter ADC is set by the procedures below To select A D converter This function is not available for the Agilent E5260 Available only for the Agilent E5270B This procedure selects the ADC type used by the specified measurement channel 1 Press the Shift key and the Measltem key 2 Press the arrow keys to select the ADC type H SPEED high speed ADC or H RESOLN high resolution ADC only for E5270B 3 Press the MeasCh key if you are setting the ADC type of another channel and perform 2 4 Press the Enter key to make the setup effective or press the Exit key to cancel changing the setup To select ADC operation mode Press the Integ key repeatedly to select the ADC operation mode There are three modes as below The Integ status area shows the present setting The setup is effective for all channels that use the same ADC type A auto mode M manual mode e P PLC power line cycle mode Agilent E5260 E5270 User s Guide Edition 5 5 25 Front Panel Operations Makin
184. the error code and error message or No Error A maximum of four error messages can be stored To return to the previous menu press the Exit key CLEAR Displays the following message Then press the Enter key to clear the error buffer or press the Exit key to cancel this operation Clear Error Buffer YES Displays the following message Display in Remote Mode OFF or ON Press the arrow key to set the remote display mode ON or OFF Then press the Enter key to make the setup effective or press the Exit key to cancel changing the setup This function changes the display items in the remote mode If it is ON the LCD displays the measured data setup data and all status information If it is OFF default setting the LCD displays only a part of the status information See Display Images on page 4 3 and Status Data Area on page 4 9 Note that setting this function ON may adversely affect the performance such as the measurement speed Displays the following message BEEP ON or OFF Press the arrow key to set the beeper ON or OFF Then press the Enter key to make the setup effective or press the Exit key to cancel changing the setup 4 24 Agilent E5260 E5270 User s Guide Edition 5 Function Tree Front Panel Reference Setup Menus Calibration and Test Menu Press the Shift key and the Menu key The calibration and test menu is displayed in the Change Setup area as shown below The men
185. the output mode immediately It also changes the measurement item as shown below Source Output Mode OUT CPL Meas Data 1 Meas Data 2 V voltage output Voltage Current Current Current Voltage Power Resistance I current output Current Voltage Voltage Voltage Current Power Resistance Displays the following message S ch Filter ON or OFF where is 1 or 2 for the 2 ch mainframe 1 2 or 8 for the 8 ch mainframe Press the OutCh key to specify the source channel and press the arrow key to connect the filter ON to the channel or disconnect it OFF Then press the Enter key to make the setup effective or press the Exit key to cancel changing the setup A filter is mounted on each module It assures clean source output with no spikes or overshooting 4 16 Agilent E5260 E5270 User s Guide Edition 5 Shift DefValue Fast Exit Enter Up arrow Down arrow Left arrow Right arrow Front Panel Reference Front Panel Key Details Edit key group The Edit key group is used to move the cursor in the display area make the setup value effective return to the previous menu or display and so on Reset Measure Output Edit Local Meas Meas Out Out Shift Exit Ch Range Ch Range Cal Test AD SerRes Menu Meas Single OUT On Fast Item Value Off Restore IntegTime Abort AUX On Off Filter I
186. ting only a part of the status information is displayed See Status Data Area on page 4 9 Agilent E5260 E5270 User s Guide Edition 5 5 3 Front Panel Operations Setting Up Agilent E5260 E5270 Setting Up Agilent E5260 E5270 This section describes the following tasks of setting up the Agilent E5260 E5270 To Set Line Frequency e To Initialize Agilent E5260 E5270 To Set Beeper To Apply Default Value e To Select Monitor Items e To Perform Self test e To Perform Self Calibration e To Perform Diagnostics e To Set Auto Calibration To Set ADC Zero Function To Read Error Message e To Display Firmware Revision e To Display Module Information e To Display Module Serial Number To Set GPIB Address e To Set Remote Display Mode To Return to Local Mode 5 4 Agilent E5260 E5270 User s Guide Edition 5 Front Panel Operations Setting Up Agilent E5260 E5270 To Set Line Frequency Gy ee uN Press the Menu key Move the cursor to CONFIG then press the Enter key Move the cursor to LINEFREQ then press the Enter key Press the arrow keys to select the line frequency 50 Hz or 60 Hz Press the Enter key to make the setup effective or press the Exit key to cancel changing the setup Press the Exit key twice to close the setup menu To Initialize Agilent E5260 E5270 1 2 Press the Shif
187. tput Current Ranges and Resolutions Range Output Value a 3 pea 100 nA 0 lt I lt 115nA 5 pA 200 V 1pA 0 lt I lt 1 15 pA 50 pA 200 V 10 pA 0 lt I lt 11 5 uA 500 pA 200 V 100 pA 0 lt JI lt 115 uA 5 nA 200 V 1 mA 0 lt I lt 1 15 mA 50 nA 200 V 10 mA 0 lt lt 11 5 mA 500 nA 200 V 100 mA 0 lt I lt 50 mA 5 uA 200 V 50 mA lt I lt 115 mA 5 pA 100 V 1A 0 lt I lt 50 mA 50 uA 200 V 50 mA lt I lt 125 mA 50 pA 100 V 125 mA lt I lt 500 mA 50 uA 40 V 500 mA lt I lt 1A 50 pA 20V Agilent E5260 E5270 User s Guide Edition 5 2 21 Introduction Measurement Units Table 2 15 HPSMU Measurement Voltage Values and Resolutions Range Measurement Value Measurement Resolutions 2V 0 lt V lt 22V 100 uV 20 V 0 lt VW lt 22V 1mV 40 V 0 lt V lt 44 V 2mV 100 V 0 lt V lt 110 V 5mV 200 V 0 lt V lt 200 V 10 mV Table 2 16 HPSMU Measurement Current Values and Resolutions Range Measurement Value Measurement Resolutions 100 nA 0 lt I lt 115nA 5 pA 1 pA 0 lt lt 1 15 pA 50 pA 10 pA 0 lt I lt 11 5 pA 500 pA 100 pA 0 lt lt 115 pA 5nA 1 mA 0 lt I lt 1 15 mA 50 nA 10 mA 0 lt I lt 11 5 mA 500 nA 100 mA 0 lt I lt 115 mA 5 uA 1A O lt I lt 1A 50 uA a This column is applied to the auto ranging or the limited auto ranging For fixed ranging maximum measurement value is Range
188. tput value will be set Vcomp or Irev To force the Iset value the voltage compliance must be set to the allowable value shown in Figure 6 6 If you do not set the allowable compliance value the SMU forces the Irev value as shown in Figure 6 8 In Figure 6 7 AI is 2 5 to 12 of the range value in the current output range SMU I V Characteristics When Iset gt 0 When Iset lt 0 Voltage A Vcomp Al ba iset Output Iset Output gt Current gt Current Irev Iset 0 SMU Output Transition Iset gt 0 resistance load When Vcomp gt Vrev Voltage Voltage A A Characteristics of DUT Characteristics of DUT Vcomp Qutputciset Output Vcomp Iset Output Iset Output gt Current gt Current When Vcomp lt Vrev Voltage A Characteristics of DUT Output gt Current Vrev al Agilent E5260 E5270 User s Guide Edition 5 Function Details SMU Pulse SMU Pulse The source monitor unit SMU can apply voltage or current pulse The PL PV PWI or PWV command is used to set the pulse output The PT command is used to set the pulse timing parameters The following values are available for the pulse width and pulse period Pulse width 0 5 ms to 2 s 0 1 ms resolution Pulse period 5 ms to 5 s 0 1 ms resolution where the parameters must satisfy the following conditions e period gt width 2 ms for pulse width lt 100
189. u is used to set the auto calibration to execute the self calibration self test and diagnostics and so on 123 456mA 1 23456mV OUT 123 4mV AUTO CAL ADC ZERO CAL SELFTEST gt 123 456mA 1 23456mV OUT 123 4mV lt ADC Z ERO CAL SELFTEST DIAG Press the arrow key to move the cursor to the desired function name Then press the Enter key The setup message or the sub menu will be displayed To return to the previous menu press the Exit key This menu provides the following functions AUTO_CAL ADC_ZERO CAL EXECUTE RESULT SELFTEST EXECUTE RESULT RECOVER DIAG EXECUTE RESULT Sets auto calibration on or off Only for the E5270B Sets the ADC zero function on or off Executes self calibration Displays the self calibration result message Executes self test Displays the self test result message Enables or disables use of the failed module Executes diagnostics Displays the diagnostics result message Agilent E5260 E5270 User s Guide Edition 5 4 25 AUTO_CAL NOTE ADC_ZERO NOTE Front Panel Reference Setup Menus Displays the following message Auto Calibration ON or OFF Press the arrow key to set auto calibration ON or OFF Then press the Enter key to make the setup effective or press the Exit key to cancel changing the setup The auto calibrati
190. u that provides the following functions EXECUTE Displays the following message DIAG Item where tem is one of the following GPIB GPIB diagnostics TRIGGER BNC Trigger In Out diagnostics KEY Front panel key diagnostics HV LED High voltage LED diagnostics e DGTL I O Digital I O diagnostics BEEPER Beeper diagnostics Press the arrow key and the Enter key to select the diagnostics item and refer to Table 4 5 to perform the diagnostics or press the Exit key to return to the previous menu without performing diagnostics After the diagnostics the following message is displayed DIAG Pass or Fail or Aborted Press the Exit key to return to the previous menu RESULT Displays the following message DIAG Item Pass or Fail Error No or Not performed yet where tem is the diagnostics item and Error No is the error number Press the arrow key to display the result of another item Press the Exit key to return to the previous menu Agilent E5260 E5270 User s Guide Edition 5 4 29 Table 4 5 Front Panel Reference Setup Menus To Perform Diagnostics Ttem Description GPIB For the next message disconnect the GPIB cable from the GPIB connector Then press the Enter key to start diagnostics or the Exit key to return to the previous menu Open GPIB then press Enter Press Exit to abort TRIGGER BNC For the next message connect the BNC cable between the Ext
191. ulse trigger signal test 714 CPU failed abort trigger signal test 715 CPU failed DAC set trigger signal test 716 CPU failed LCD read write test 720 H RESOLN ADC is not installed 721 H RESOLN ADC failed ROM RAM test 722 H RESOLN ADC failed B COM offset DAC test 723 H RESOLN ADC failed sampling ADC test 724 H RESOLN ADC failed integrating ADC test 725 H RESOLN ADC failed bus function test 740 GNDU failed calibration 7 20 Agilent E5260 E5270 User s Guide Edition 5 N760 N761 N762 N763 N764 N765 N766 N767 N768 N769 N770 N771 N772 N773 N774 N775 N776 N777 N778 N779 N780 N781 N782 N783 N784 N785 N786 N787 SMU SMU SMU SMU SMU SMU SMU SMU SMU SMU SMU SMU SMU SMU SMU SMU SMU SMU SMU SMU SMU SMU SMU SMU SMU SMU SMU SMU If You Have a Problem Error Codes failed function test failed VF VM function test failed IF IM function test failed loop status test failed temperature sensor test failed CMR amplifier calibration failed CMR amplifier adjustment failed CMR 100 V range full output test failed VF VM calibration failed VM offset calibration failed VM gain calibration failed VF offset calibration failed VF gain calibration failed VF gain calibration at 20 V range failed VF filter offset calibration failed H SPEED ADC self calibration failed H SPEED ADC VM offset calibration failed H SPEED ADC VM gain calibration failed IF IM calibrat
192. urrent Values and Resolutions Measurement Measurement Resolutions Range Value High Speed ADC High Resolution ADC Ipa 0 lt I lt 1 15 pA 100 aA 100 aA 10 pA 0 lt lt 11 5 pA 1 fA 1 fA 100pA O lt I lt 115pA 5 fA 2fA 1fA l nA 0 lt I lt 1 15 nA 50 fA 10 fA 10 nA 0 lt I lt 11 5 nA 500 fA 10 fA 100nA 0 lt I lt 115 nA 5 pA 100 fA 1 uA 0 lt lt 1 15 LA 50 pA 1 pA 10pA 0 lt I lt 11 5 pA 500 pA 10 pA 100pA O lt lt 115 pA SnA 100 pA 1 mA 0 lt I lt 1 15 mA 50 nA l nA l0mA 0 lt lt 11 5 mA 500 nA 10 nA 100mA 0 lt IJ lt 100mA 5 uA 100 nA a This column is applied to the auto ranging or the limited auto ranging For fixed ranging maximum measurement value is Range column value b Available when the E5288A Atto Sense and Switch Unit ASU is used 2 18 Agilent E5260 E5270 User s Guide Edition 5 NOTE NOTE Introduction Measurement Units To connect ASU The specifications are satisfied and guaranteed for the exclusive combination of the ASU and the HRSMU So confirm the serial number of the ASU and connect it to the dedicated HRSMU properly To connect the ASU see To Connect ASU on page 3 16 To confirm the serial number see To Display Module Serial Number on page 5 13 Before using 1 pA range The measurement channel connected to the ASU supports the 1 pA range To use the 1 pA range set the 1 pA f
193. ve the cursor to AUTO_CAL then press the Enter key 3 Press the arrow keys to select the auto calibration ON or OFF 4 Press the Enter key to make the setup effective or press the Exit key to cancel changing the setup 5 Press the Exit key to close the setup menu The auto calibration function automatically starts calibration for all modules every 30 minutes if the output switches of all modules are off for 30 minutes If auto calibration is enabled open the measurement terminals or disconnect the device under test from the measurement terminals after measurement To perform calibration properly the measurement terminals should be opened before starting calibration To Set ADC Zero Function This function is not available for the Agilent E5260 Available only for the Agilent E5270B 1 Press the Shift key and the Menu key Move the cursor to ADC_ZERO then press the Enter key Press the arrow keys to select the ADC zero function ON or OFF Pe y Press the Enter key to make the setup effective or press the Exit key to cancel changing the setup 5 Press the Exit key to close the setup menu The ADC zero function is available for the high resolution A D converter ADC but not available for the high speed ADC This function measures the internal offset of the high resolution ADC and compensates it automatically The measurement data displayed on the LCD will be the data after compensation This function is especially effe
194. wing instruction uses the coaxial cables 1 Atend of cable connect coaxial center conductor to force terminal of connector plate and connect coaxial outer conductor to guard terminal of connector plate 2 At another end connect coaxial center conductor to tail of the probing needle Never connect the outer conductor at this cable end Extend the outer conductor as close as possible to the probing needle 3 Repeat 1 and 2 for the sense terminal of connector plate 4 Contact the probing needles from force and sense terminals as close as possible to the DUT Example The following example connection can be used to measure low resistance The sense line is extended to the probing pad and contacts the force line through the pad so the voltage drop due to the residual resistance caused by cables and test leads is canceled Probing Needle A X UGTOIESL GAL ID WSH XS Contact Ped gt F This example uses test leads To reduce the leakage current use coaxial cables 3 34 Agilent E5260 E5270 User s Guide Edition 5 Installation Connecting Measurement Devices Kelvin Connection Kelvin connections give good measurement results when you force high current The following figure shows the equivalent circuits for Kelvin and non Kelvin connections For the non Kelvin connection the voltmeter measures the voltage drop of resistances rp Rpyy and rpp e For the Kelvin connection the voltmeter measures the vol
195. xial and D sub Cable for ASU 16493M 001 1 5 m length 16493M 002 3 0 m length 16494A Triaxial Cable 16494A 001 1 5 m length 16494A 002 3 m length 16494A 003 80 cm length 16494B Kelvin Triaxial Cable E5260 E5270 to E5250 input 16494B 001 1 5 m length 16494B 002 3 m length 16494B 003 80 cm length 16495F Connector plate w 12xtriax Interlock GNDU 16495F 001 Bulkhead feedthrough connectors female to female 16495F 002 Connectors to contacts for soldering 16495G Connector plate w 24xtriax Interlock GNDU 16495G 001 Bulkhead feedthrough connectors female to female 16495G 002 Connectors to contacts for soldering 16495H Connector plate w 6xtriax 6xcoax Interlock GNDU 16495H 001 Bulkhead feedthrough connectors female to female 16495H 002 Connectors to contacts for soldering 16495J Connector plate w 8xtriax 4xcoax Interlock GNDU 16495J 001 Bulkhead feedthrough connectors female to female 16495J 002 Connectors to contacts for soldering 16495K Connector Plate with Universal Cable Holder 16495K 001 Connector Plate with Rubber Holder 2 54 Agilent E5260 E5270 User s Guide Edition 5 Installation WARNING A Installation This chapter describes how to install Agilent E5260 E5270 and accessories Requirements Inspection and Installation Installing Accessories Mounting Connectors Connecting Measurement Devices Maintenance There are pot
196. yet Then press the Enter key to make the value effective or press the Exit key to cancel multiplication This function is not effective for 0 0 To set the digit over the highest digit Move the cursor to the or sign and press the Up or Down arrow key The Up Down arrow key will add subtract the value given by setting 1 instead of the sign and setting 0 to the other digits to from the present value For example if the present value is 0 100 the Up arrow key will set 10 10 0 100 10 000 and the Down arrow key will set 9 900 0 100 10 000 Agilent E5260 E5270 User s Guide Edition 5 5 17 Front Panel Operations Applying Source Output To Set Source Output to Zero This instruction stores the present source setup of all channels and changes the output value to 0 V 1 Press the ZeroVolt key 2 Press the Enter key for the message 0 V Output YES to perform this operation or press the Exit key to cancel operation To restore the source setup This instruction restores the source setup stored by the ZeroVolt key function 1 Press the Shift key and the ZeroVolt key 2 Press the Enter key for the message Restore YES to perform this operation or press the Exit key to cancel operation To Set Output Range This instruction sets the output range of the specified source channel 1 Press the OutRange key 2 For voltage output move the cursor to V_ RANGE then press the Enter key For current output
197. you ship the Agilent E5260 E5270 to the Agilent Technologies service center do not remove the source monitor unit SMU from the mainframe and ship the mainframe with all SMU modules When you ship the Agilent E5270B used with the atto sense switch unit ASU disconnect the connection cables between the ASU and the high resolution source monitor unit HRSMU and ship the ASU connection cables and the mainframe Then do not remove any module from the mainframe The ASU can be used with the dedicated HRSMU So check the serial number and ship the proper ASU Cleaning Before performing cleaning turn off the instrument and disconnect power cable from the rear panel Use a dry cloth to clean the external case parts To prevent electrical shock do not perform cleaning when the instrument is turned on and do not use a wet cloth 3 36 Agilent E5260 E5270 User s Guide Edition 5 Installation Maintenance Self test and Diagnostics Agilent E5260 E5270 provides the following functions to check the operation Perform the following functions as necessary e Self test Refer to To Perform Self test on page 5 7 e Self calibration Refer to To Perform Self Calibration on page 5 8 Diagnostics Refer to To Perform Diagnostics on page 5 9 Agilent E5260 E5270 User s Guide Edition 5 3 37 Installation Maintenance 3 38 Agilent E5260 E5270 User s Guide Edition 5 Front Panel Reference Front Pane

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