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Granville Phillips 358 Controller Manual

1. 1 107 Kr _ 40 Ar E Ne z a NE No Air TT 5 CO ki O2 D2 n freon 22 F 10 freon 12 CH4 Use this data only when the Convectron Gauge axis is horizontal Do NOT use this data with any 104 transducers other than G P HH Series 275 Convectron Gauges I I Pressure units equivalence 1 mbar 100 pascal 107 10 10 107 Indicated Pressure mbar Nitrogen Equivalent Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 77 n E a K 3 1 o Chapter 5 Figure 5 10 True Pressure versus Indicated Pressure for Commonly used Gases 107 to 1000 mbar 1000 Ar freon 12 No air FH COS 100 CH T 40 E o 5 He o 9 2 A o D 1 TH Use this data only when the TH Convectron Gauge axis is horizontal Do NOT use this data with any transducers other than G P 1 Series 275 Convectron Gauges 10 Eu 9 TNT HHH pP Pressure units equivalence BE 1 mbar 100 pascal ES e pese 1 10 107 10 100 1000
2. 1 2 CO 15 DEGAS D n de 5 G 7 5 6 Bx A 3p A E 6 4 2 4 gt GAUGE i 5 gt be ON p OFF B 32 2 lsn CD S58 Micro on Controller TOPR CD Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 29 Chapter 3 3 5 Overpressure Shutdown This control is factory set so the ion gauge will shut down when the pressure Adjustment rises above the levels given in Table 3 1 Table 3 1 Pressure Range Settings Pressure Range MV HV UHV Designation Medium Vacuum High Vacuum Ultrahigh Vacuum Recommended Lower Limit Torr Less than 1 x 10 To adjust the overpressure shutoff point to a different level 1 Maintain system pressure at the desired shutoff point 2 Rotate the overpressure adjustment potentiometer fully counterclockwise Turn ON the ion gauge 4 Rotate the adjustment potentiometer clockwise slowly until the ion gauge turns OFF 3 6 Changing Display Update When ON the Slow Update switch on the electrometer module enables Rate on Electrometer pressure averaging The display will be updated approximately every 3 Module seconds When OFF the update period is approximately 0 5 seconds Refer to Figure 3 3 on page 29 3 7 Changing Units of The Series 358 Controller is shipped from the factory preset to display the Measure for Convectron units of measure Torr mbar or
3. 50 4 4 Environmental Conditions 50 4 5 Controller Installation 50 4 6 Mounting Configurations 51 4 7 line VoltaBe scu pA Rut doa Me ES ONDE CPGE 53 4 8 F s Replacement s eere mE Ce na 53 4 9 Vacuum Gauge Installation 53 4 10 Mounting Options 54 4 11 Grounding the System 55 4 12 Connecting Analog Outputs 59 4 13 Connecting a Capacitance Manometer 60 4 14 Connecting Process Control Relays 63 4 15 Connecting the RS 232 Computer Interface Handshake Lines 65 4 16 Connecting RS 485 Computer Interface 66 Chapter 5 Preparing for Operation 67 5 1 Preparing for Pressure Measurement 67 5 2 Alternate ON OFF Gauge Control 68 5 3 Micro lon Gauge Remote Input Output 68 5 4 Micro lon Analog Output Signal 69 5 5 Preparing for Convectron Gauge Operation 71 5 6 Gases other than Nitrogen or Air 71 5 7 Micro lon Gauge Auto ON OFF 80 5 8 Filament Auto ON ira leei ae ETE REA As 80 5 9 Gauge Zero and Atmospheric Pressure Adjustment 81 5 10 Convectron Gauge Analog Output Signal 82 5 11 Preparing for Capacitance Manometer Operation
4. Chapter 5 Normal Measurement Operation Pressure indication Pi 10 Torr or mbar Pi 2 10V pascal When Degassing Pressure indication Pi 10 V7 Torr or mbar Pi 10 V 11 2 pascal When the gauge is OFF V 11 volts This signal voltage is determined by the pressure indicated on the Micro lon Gauge display Figure 5 5 Micro lon Gauge Analog Output Versus Pressure 107 10 102 1 103 107 104 10 G 2 105 103 a E a n e 105 10 3 d g Aem fre 10 2 a 108 106 10 107 10710 108 10 10 0 q 2 3 4 5 6 7 8 9 10 f 11 IG Analog Output volts Gauge OFF 70 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Preparing for Operation 5 5 5 6 Preparing for Convectron Gauge Operation Gases other than Nitrogen or Air Convectron Gauge pressures are indicated on lines A and B of the Controller display WARNING Failure to use accurate pressure conversion data for N or air to other gases can cause an explosion due to overpressurization If the controller will measure any gas other than N or air before connecting the controller to system control devices adjust pressure outputs for the process gas that will be used Install suitable devices that will limit the pressure to the level that the vac
5. 84 5 12 Preparing for Process Control Operation 85 5 13 Preparing to use RS 232 Computer Interface 87 5 14 RS 232 Error Messages oe ed vet tn et 90 5 15 Preparing to Use RS 485 Computer Interface 90 5 16 RS 485 Error Messages 93 Chapter 6 Operation M m 95 6 1 Controller Operation 95 6 2 Micro lon Gauge ON OFF 97 6 3 Degas ON OFF 97 6 4 Special Considerations for Use Below 10 Torr 98 6 5 Gauge Electrometer Operation 98 6 6 Filament Selection for Electrometer Module 100 6 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Table of Contents Chapter 7 Theory of Operation 101 7 1 Micro lon Gauge Theory of Operation 101 7 2 Convectron Gauge Theory of Operation 102 7 3 Microcontrollers and Bus Structure 103 7 4 Capacitance Manometer Theory of Operation 103 7 5 Process Control Theory of Operation 103 Chapter 8 SEIVIGOT 3 Aide th ost Fododo doo pout ded Eod ee Sees 105 8 1 Service Guidelines 105 8 2 Customer servie ao bag s eere RC iad aa gt ats 106 8 3 Damage Requiring Service 106 8 4 Returning a Damaged Product 106 8 5 Troubles
6. If you want to change the units of measure the display rate or the degas timer you must remove the top cover of the Controller 3 2 Top Cover Removal 1 With power OFF remove any cables from Controller rear panel 2 Observe antistatic precautions to avoid damaging static sensitive components inside the chassis Use a grounded conductive work surface Do not handle integrated circuits IC devices more than necessary and only when wearing a high impedance ground strap A high impedance helps protect human life in case of inadvertent contact with high voltage EJ a ce 2 3 Remove the four Phillips head screws identified in Figure 3 2 If the unit is equipped with a rear bracket remove the Phillips head screw on the bracket and slide the bracket off Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 27 Chapter 3 Figure 3 2 Location of Screws for Top Cover Removal iu Do not remove the two lower front screws 3 3 Pressure Units Setup If units of measure are as desired see Figure 3 1 skip to Changing Display Update Rate on Electrometer Module on page 30 3 4 Changing Units of Your unit will have been shipped from the factory preset to display the unit Measure for Electrometer of measure Torr mbar or pascal that you requested Selection between Module Torr and mbar units is done by adjusting the Micro lon gauge tube sensitivity to th
7. K gc 1 S Chapter 5 94 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 The instructions in this chapter assume the instructions for Setup Installation and Preparing for Operation have been completed See Chapter 2 Chapter 3 and Chapter 4 For theories of operation for the Micro lon Gauge Convectron Gauge electrometer capacitance manometer and process control modules see Chapter 7 6 1 Controller Operation Turning the Controller ON 1 Press the top half of the power ON switch on the rear panel of the Controller see Figure 6 1 Figure 6 1 Power ON Switch uone1ad0 INPUT POWER 100 240 VAC 50 60 HZ 40 WATTS r i 8 w ANALOG ourPurmu 2 When the power switch is ON the Micro lon Gauge pressure is displayed on line Micro lon Gauge and Convectron Gauge pressures are displayed on lines A and B of the display on the front panel of the Controller see Figure 6 2 Display formats for the Convectron Gauge pressures are given in Table 6 1 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 95 Chapter 6 Figure 6 2 Controller Front Panel 1 DEGAS G 75 6 3 C jen OFF 3 r P A 6 4 a 2 4 entice NEA 5 ON B 3242 a 358 Micro lon Controller TORR If you have
8. Physical dimensions of Micro lon and Convectron Gauges are shown in Figure 2 9 on page 24 and Figure 2 10 on page 24 Mounting clearance dimensions for Convectron Gauges are shown in Figure 4 2 Compression Mount Quick Connect Do not use for positive pressure applications The gauge may be forcefully ejected The gauge port is designed to fit a standard 1 2 in compression quick connect mounting such as an Ultra Torr fitting Remove the caplug from the gauge tube port insert the gauge tube port into the compression fitting and finger tighten the press ring If a seal is not achieved it may be due to extreme cleanliness of the O ring A light film of vacuum grease such as Apiezon grease will ensure sealing and is normally preferable to the use of pliers or pipe wrench to further tighten the press ring You may point the electrical pins of the gauge tube anywhere you wish in a 360 horizontal circle for optimum routing of the gauge tube cable 1 8 NPT Mount Fits standard 1 8 NPT female fitting Wrap the threads of the gauge port with Teflon tape and hand tighten Do not use a wrench or tool Tighten only sufficiently to achieve a seal VCR VCO Mount Remove the plastic or metal bead protector cap from the bead When using gasket place it into the female nut where applicable Assemble components and snug finger tight While holding a backup wrench stationary tighten the female nut 1 8 turn past finger tight for 316 stainles
9. Install only those replacement parts and accessories that are recommended by Granville Phillips Substitution of parts is hazardous Disconnect the product from the wall outlet and all power sources and refer servicing to qualified service personnel under the following conditions 1 2 When any cable or plug is damaged If any liquid has been spilled onto or objects have fallen into the product If the product has been exposed to rain or water If the product does not operate normally even if you follow the operating instructions Adjust only those controls that are covered by the operation instructions Improper adjustment of other controls may result in damage and will often require extensive work by a qualified technician to restore the product to its normal operation If the product has been dropped or the enclosure has been damaged When the product exhibits a distinct change in performance This indicates a need for service WARNING Substitution or modifying parts can result in product damage or personal injury due to electrical shock or fire Install only those replacement parts that are specified by Brooks Automation Inc Granville Phillips Do not install substitute parts or perform any unauthorized modification to the controller Do not use the controller if unauthorized modifications have been made 10 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Before You Be
10. Typical 1 Series 358 Controller center mounted in a 19 inch rack Use rack mount kit 370011 Controller Catalog 358503 1 Series 358 Controller left or right mounted in a 19 inch rack Use rack mount kit 370010 Controller Catalog 358502 tI Te NN 18 3 aqu ba g 19 0 9 5 Series 358 Micro lon Gauge Controller Mounting Configurations Dimensions are in Inches Not to scale 52 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Installation 4 7 4 8 4 9 Line Voltage Fuse Replacement Vacuum Gauge Installation The controller will operate over a line voltage range of 100 to 240 VAC 50 to 60 Hz All that is required is that a line cord be selected to match your available power receptacle to the power input connector located on the rear of the Controller Fuse type 5 x 20 mm time lag T low breaking capacity 1 6 A 250 V manufacturer Schurter Part No FST034 3119 Replacement fuses are available from Brooks Automation Inc Contact information is provided in the Service section on page 3 and the back cover of this instruction manual 1 On the rear panel turn the power switch OFF and unplug the power cord 2 Use a flat tip screwdriver or similar tool to turn the fuseholder counterclockwise Pull out the fuseholder then remove and replace the fuse 4 Insert the fuseholder and turn clockwise to lock position Plug in the power cord and turn the power
11. AADS CG1 CR From controller 1 20E 03CR The DS CG1 and DS CG2 commands are used to display the pressures from the second and third display lines f the ion gauge is turned OFF or is in its first few seconds of operation the controller will return 9 90E 09 The DS IG command will return pressure if the gauge is ON and 9 90E 09 if it is OFF Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 91 Chapter 5 IG1 Definition Modifiers Response Example From computer From controller Turn the lon gauge ON or OFF ON or OFF OK is command accepted INVALID if rejected AAIG1 ON CR OKCR The IG ON command will be rejected as INVALID if the lon gauge is already ON and IG OFF will be rejected if the lon gauge is already OFF A response to the IG1 ON command of OK indicates only that a signal requesting that the lon gauge be turned ON has been sent to the electrometer The tube may fail to come on e g if the system pressure is too high or if the tube is disconnected To verify that the lon gauge is ON use the DS IG1 command If the tube is OFF or in its first few seconds of operation after being turned ON a pressure of 9 90E 9 will be returned 1G2 Identical to IG1 performs the same functions as 1G1 PCS Definition Display process control channel status Modifiers 1 or 2 or 3 or A or 5 or 6 or B or none Response Depends on modifier Single digit 1 through 6 respons
12. Normally Open Common Normally Closed 2 independent sets d oj of rel J P of relay contacts yr v Ze NO C NC a CH 1 T W e Y PROCES CONTROL FUE Se IT cH 2 5 n SES Lt 1 PE SUA ila A 4 HEKE we X P Ico POS me 7 5 6 30 O ALT A B 4 2 de AC 5O B 3 2 2 N E col E ES CO 6C Rear Panel Connector Pin Designators 000 a 262 o8 0 ga oco 069 O 0 0 0 Process Control Connector on the rear of the Controller 34 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Initial Setup Figure 3 9 6 Channel Process Control Option Card Channel 1 and Channel 2 NO C NC Note 1 SURE sek are assigned to the ie cc Micro lon Gauge CH 1 t P Ly EN Channels 3 and 4 are bs O factory assigned to Ahi Edp Convectron Gauge A 4 F c k 5s EHE Channels 5 and 6 are s v s x factory assigned to Convectron Gauge B or Rear Panel capacitance manometer Somede Pn Note 2 gauge B 3 11 Relay Polarity Setting The relays can be set to activate as pressure either rises above or falls below the setpoint
13. we ra T1 TX Data T 10 to 13 mS 10 bits with S2 1 OFF T 700 uS with 2 1 ON T1 300 pS minimum RS 485 Address The address switch on the RS 485 module on the back of the Controller see Figure 3 14 and Switch S1 see Figure 3 16 determine the RS 485 module s address This address can be any hex code from 00 to FF The address switch on the RS 485 module on the back of the Controller determines the value of the least significant digit and S1 determines the value of the most significant digit S1 switch positions are binary The weights of switches when OFF are listed in Table 3 12 44 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Initial Setup Figure 3 16 RS 485 Module Top View RS485 422 Switches Response Delay J1 i Character Framing o EN 6 8 A Baud Rate aX c 2 0 E me t Module Address J2 O To prevent data contentions no two of the controller modules should be set with the same address t is not recommended that address 00 be used because some manufacturers use this address for configuration 3 E E co oO 2 z EI Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 45 Chapter 3 Selecting Byte Format for Baud Rate for RS 485 RS 485 Module Baud rate for the RS 485 computer interface is determined by 2 6 S2 7 S2 8 Table 3 13 RS 485 Baud Rates f
14. 358013 Rev 09 21 Chapter 2 Table 2 3 Specifications Pressure Range 1 x 107 Torr to 990 Torr N equivalent Display Resolution 2 significant digits except for 1 significant digit in 1 x 107 Torr decade Gas Type Np air for direct reading Display Update Time 0 5 sec typical Switch selectable to 3 sec reading averaged Analog Output 0 7 Vdc logarithmic 1 V decade lon Gauge Turn On Range Less than or equal to 100 mTorr 1 x 107 Torr Sensor Material Gold plated tungsten Mounting Orientation Gauge axis must be horizontal to provide accurate measurement above about 1 Torr Operating Temperature 4 C to 50 C ambient noncondensing Bakeout Temperature 150 C maximum nonoperating cable disconnected Cable Bakeout Temperature 105 C maximum lon Gauge Pressure Range See Table 3 1 on page 30 22 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 System Components Table2 3 Specifications Capacitance Manometer Gauge Type Any capacitance manometer transducer that requires 15 Vdc power at lt 250 mA and outputs 0 10 Vdc proportional to pressure Accuracy 0 01 of full scale as limited by display resolution Display Resolution Highest 3 decades 2 digits lowest decade 1 digit scientific notation Maximum Pressure Scales 1 10 100 1000 Torr max heads 4 decades of pressure Display Update Time Unfiltered 0 5 sec typical Switch selectable filtering 3 sec a
15. Convectron gauge A Micro lon gauge auto ON switch via Convectron gauge Calibration sensitivity ON switch Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 15 a lt pz 2 3 oO 3 D E e 5 a Chapter 2 Figure 2 4 Controller Top View with Cover Removed MS IT P coq mesi I 1 Power supply board Process control setpoint option board Convectron or Capacitance Manometer gauge option board Electrometer board Filament grid supply board D wR WON Interface option board RS 232 or RS 485 16 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 System Components 2 1 Options Process Control Relay A 2 setpoint or 6 setpoint relay option can either be factory installed or added at any time by the user The set points are adjustable from atmosphere to 1 x 107 Torr with override switches and front panel status indication RS 232 or RS 485 422 Provides readout of pressure process control relay status and Micro lon Computer Interface gauge control Module Figure 2 5 Controller Rear Panel with RS 232 Option 2 z 1 3 S 3 E 3 a A 15 ANALOG a 1 Power switch 8 Micro lon gauge power connector 2 Power input connector 9 DB25S connector for RS 232 computer interface 3 Grounding lug to be connected to earth ground 10 DE9S connector for remote parameter selection with 12 AWG conductor inputs outputs 4 20 p
16. 5 5 11 Preparing for Capacitance Manometer Operation equation instead of 4 i e P 1057 Furthermore for the same offset if the pressure were say 1 x 107 Torr then the output voltage would be 5 V The pressure would be calculated as P 10 9 The capacitance manometer pressure is read in the third display line of the 358 Controller The accompanying Convectron gauge is read in the second display line If the cable is disconnected the capacitance manometer will read Zero pressure See Connecting a Capacitance Manometer on page 60 for additional information regarding intial installation and setup and adjustments of the capacitance manometer module Figure 5 15 Convectron Capacitance Manometer Module Panel CONV CAP MAN PA MBAR X 100 Q ATM Q VAC 3 Use the IG AUTO potentiometer to set the auto turn ON pressure for the Micro lon Gauge The IG AUTO turn on potentiometer is marked with rough pressure calibration markings To set the pressure at which the Micro lon Gauge will turn ON with falling pressure and OFF with rising pressure simply adjust the potentiometer to point to the desired pressure More precise control can be achieved by fixing the system pressure at the desired auto turn on pressure and adjusting the potentiometer slowly until the gauge comes ON To disable the auto turn on function adjust the auto turn on potentiometer completely counter clockwise OFF 84 Series 358 Micro
17. CAUTION Adjusting the overpressure shutdown to a pressure that is higher than the factory setting can damage the gauge and vacuum system Before adjusting the overpressure shutdown to a pressure that is higher than the factory setting phone a Granville Phillips application engineer at 1 303 652 4400 or 1 800 776 6543 within the USA or email co csr brooks com Table 8 2 Overpressure Shutdown Factory Settings Pressure Range MV HV UHV Designation Medium Vacuum High Vacuum Ultrahigh Vacuum Emission Current 20 pA 1 mA Recommended Lower Limit Torr Less than 1 x 10 To adjust the overpressure shutoff point to a different level 1 Maintain system pressure at the desired shutoff point 2 Rotate the overpressure adjustment potentiometer fully counterclockwise Turn ON the ion gauge 4 Rotate the adjustment potentiometer clockwise slowly until the ion gauge turns OFF Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 109 Chapter 8 8 7 Troubleshooting the Convectron Gauge Module Table 8 3 Convectron Gauge Module Troubleshooting See Figure 5 13 on page 82 Symptom Possible Cause Pressure reading grossly in error Controller out of calibration Unknown gas type Gauge not mounted horizontally see Figure 4 2 on page 55 Sensor damaged e g by reactive gas or Gauge very dirty Extremes of temperature or mechanical vibration CGA over current indicator lit Cable sho
18. Chapter 3 Character Framing for RS 232 Module Switches 3 5 control the number of characters parity and number of stop bits Table 3 7 RS 232 Character Framing Character S3 S4 Bits Parity Stop Bits On On On None 1 factory factory setting factory setting factory setting factory setting factory setting setting or 2 On Off On Off Off On On Off Off on Talk Only Mode for Switch S1 if OFF at power up puts the interface in talk only mode The RS 232 Module pressure data from all three displays will be output in a single message string separated by commas approximately every 5 seconds Table 3 8 RS 232 Talk Only Mode Command response factory setting 40 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Initial Setup Handshake Line Control Refer to Connecting the RS 232 Computer Interface Handshake Lines on Switches for RS 232 page 65 for more detailed information on the handshaking mechanism Module Table 3 9 RS 232 Handshake Line Control Switches CLEAR to SEND CTS 1 and DSR 1 When Both ON and DATA SET READY ON forces the functions factory setting When used both must be TRUE and thus assumes host TRUE in order for controller is always ready to receive to send the next byte in its message or data DATA CARRIER DETECT DCD 1 When ON forces ON Must be TRUE at the time DCD function TRUE so factory setting each character is received or co
19. Convectron Gauge capability installed and have prepared your system for automatic operation of the Micro lon Gauge per Micro lon Gauge Auto ON OFF on page 80 the Micro lon Gauge will turn ON and OFF automatically For manual operation press the front panel GAUGE momentary rocker switch See Figure 6 2 The pressure in the Micro lon gauge will be displayed on the Micro lon gauge line of the display in the chosen pressure units To degas the Micro lon Gauge the gauge must be ON and the pressure within the Micro lon Gauge must be below 5 x 10 5 Torr depress the DEGAS momentary rocker switch on the Controller When the filament is nearing the end of its useful lifetime or is badly contaminated the LED indicator next to the DEGAS switch on the front panel will blink during degassing This is an indication that the filament emission properties have deteriorated This may be due to contamination which has temporarily poisoned the filament coating or to long term permanent erosion of the coating If this condition does not disappear after a few days of operation at clean high vacuum or UHV it is an indication that the filament is approaching its end of life 96 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Operation 6 2 Micro lon Gauge ON OFF 6 3 Degas ON OFF 7 Stable pressure measurement requires that all the environmental parameters in on and around the vacuum gauge and vacuum system rema
20. Indicated Pressure mbar Nitrogen Equivalent 78 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Preparing for Operation 3 Figure 5 11 True pressTrue Pressure versus Indicated Pressure for Commonly used Gases 107 to 1000 mbar S 1000 E freon 22 Kr N 2 alr O 2 100 H A 2 10 LH Ne E o 5 2 E p A o 1 t HE Use this data only when the Convectron Gauge axis is horizontal Do NOT use this data with any transducers other than G P i Series 275 Convectron Gauges 10 iL H ET H Pressure units equivalence H 1 mbar 100 pascal 107 107 1 10 100 1000 Indicated Pressure mbar Nitrogen Equivalent Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 79 Chapter 5 5 7 5 8 Micro lon Gauge Auto ON OFF Filament Auto ON WARNING Failure to use accurate pressure conversion data for N or air to other gases can cause an explosion due to overpressurization If the controller will measure any gas other than N or air before connecting the controller to system control devices adjust pressure outputs for the process gas that will be used If a Convectron Gauge is exposed to the same pressure environment as a Micro l
21. Micro lon Gauge has been turned ON and indicated system pressure is below 5 x 10 Torr This prevents degas turn on at pressures where emission can not be established or where degas is of no practical use Micro lon Gauge pressure measurement is displayed during degas but it is not an accurate measurement during the degas cycle Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 97 uone1ad0 Chapter 6 6 4 6 5 Special Considerations for Use Below 10 Torr Gauge Electrometer Operation Displaying Sensitivity with Calibration Switch Emission Range Switch During a fast pumpdown from atmosphere thermal effects will prevent the Convectron gauge from tracking pressure accurately below 1 x 10 Torr After about 15 minutes indications in the 1 x 107 range will be valid and response will be rapid In the 1 x 107 Torr range the indication is accurate to about 0 1 milliTorr provided the instrument has been carefully zeroed at vacuum See Cauge Zero and Atmospheric Pressure Adjustment on page 81 for vacuum and atmosphere calibration procedures For accurate use in the 1 x 107 range zeroing should be repeated frequently Convectron pressure readings in the 1 x 107 Torr range may differ from those of the ion gauge since ion gauges usually lose sensitivity near their upper pressure limits Figure 6 3 Electrometer Module Front Panel The CAL switch is used for displaying pressure or gauge sensitiv
22. Number Catalog Number To mount the Controller only on the left side of a 19 inch rack 370010 358502 To mount the Controller in the center of 19 in rack 370011 358503 To mount two Controllers side by side in a 19 in rack 370021 HEREIN To mount 1 2 rack Standard 358501 4 6 Mounting Configurations Figure 4 1 illustrates the various configurations available for mounting the controller The standard mounting configuration is 1 2 rack mount 358501 Other configurations are available using the mounting hardware kits listed in Table 4 1 and shown in Figure 4 1 Contact a Brooks Automation Granville Phillips Customer Service Representative for specail mounting configurations See page 4 of this instruction manual for more information and catalog numbers The controller should be mounted in a location with free air flow and ambient temperature less than 50 C EJ D a 2 5 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 51 Chapter 4 Figure 4 1 Controller Mounting Configurations Rear View Side of Controller s TRI TER s i 2 E 3 8 32 X 25 Mount Bracket E H z Screw 2X S El E S 9 H H o inm eM Front of E E Controller Typical Mount Bracket Assembly 2 Series 358 Controllers side by side in a 1 Series 358 Controller 19 inch rack Use rack mount kit 370021 in a half rack mount Std Controller Catalog 358501 8 0 Typical 11 0 Top View Typical
23. Table 2 2 RS 485 Specifications Data Rates 19200 9600 4800 2400 1200 600 300 150 baud Character Length 8 bit or 7 bit ASCII Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 19 Chapter 2 2 4 Specifications Table 2 3 Specifications Micro lon System Pressure Range for N or air Lower Measurement Limit 1 x 10 Torr 1 3 x 107 mbar 1 3 x 107 pascal at 4 m emission Upper Measurement Limit Atmosphere Controller Typical 3 of reading at ambient temperature of 25 5 C Display Digital green LED 2 digits plus exponent Units Torr mbar pascal user selectable Update Rate 0 5 sec typical as shipped Internal switch selectable to 3 sec reading averaged Filament Control Switch selectable filament 1 filament 2 or both Electron bombardment approximately 4 W with 2 minute timer Maximum Micro lon Gauge Cable Length 15 m 50 ft with standard cable Remote I O Momentary ground controls filament selection and degas Gauge and Degas On Off Inputs Less than 0 4 Vdc 10 pA for 25 msec minimum Must be greater than 3 5 Vdc for 105 msec minimum before next low state Filament Status Relay Contact Rating Micro lon gauge status relay rated at 1 0 A 30 Vdc Environment Indoor use Altitude up to 2000 meters Temperature 0 C to 40 C Maximum relative humidity 80 for temperatures up to 31 C decreasing linearly to 50 relative humidity at 40 C Transient overvoltages acco
24. a grounded outlet box or a grounded copper water supply pipe Do not rely on small metal water lines to ground a component Later on someone may replace the metal tubing with plastic tubing thus unwittingly causing a potentially dangerous situation 2 Provide a connection to ground for other instruments with electrodes in the vacuum system possibly exposed to high voltage electrical discharges 3 Provide a connection to ground for each ungrounded metal component in on or around the vacuum system including the gauge envelopes which personnel may touch and which can potentially be exposed to high voltage electrical discharges within the vacuum system For example a metal bell jar resting on an organic O ring must be connected to ground if a Micro lon gauge is to be used or if other high voltage sources are present in the vacuum system 56 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Installation System Ground Test Physically examine the grounding of both the controller and the vacuum Procedure chamber to assure that all exposed conductors of the system are properly grounded Note that a horizontal O ring or L ring gasket without metal clamps can leave the chamber above it electrically isolated Power can be delivered to mechanical and diffusion pumps without any ground connections to the system frame or chamber Water line grounds can be lost by a plastic or rubber tube interconnection
25. atmospheric pressure 4 Read the local atmospheric pressure on a nearby accurate barometer With power ON adjust the ATM until the display on the front of the Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 81 Chapter 5 controller indicates the local atmospheric pressure in the pressure units you have selected NOTE 1 atmosphere at sea level is 7 6 x 107 Torr 1 0 x 10 mbar 1 0 x 107 pascal 6 Repeatthis procedure for Convectron Gauge B 5 10 Convectron Gauge Analog If the Convectron gauge capability is installed a voltage output signal Output Signal proportional to the common logarithm of the pressure indication is provided on the rear panel of the Convectron gauge module via a standard 1 8 in miniature phono jack See Figure 5 13 If graphed on loglinear axes the output voltage is linear with respect to the log of pressure The analog output is 1 V per decade of pressure with a factory adjusted output of 0 V at 1 0 x 107 Torr See Figure 5 14 Offset adjustments are provided on the top edge of the Convectron gauge module that allow shifting the voltage corresponding to 1 x 107 Torr between 7 V and 1 V Figure 5 13 Convectron Module and Rear Panel a WwW 9 ANALOG z BR 5 On og O 2 iu Or ow ow ow o X O yw 2u 30 O 572 a a gu 3 S gz 285 a Qa Zu 2 6 m 23 i2 QO to ce c x os a 28 8888882 0 529 34 Ve 3 a 25 2 000000 AT 200 lt
26. atmospheric pressure adjustment 81 Convectron gauge zero and atmospheric pressure adjustment 81 Convectron module display update rate 31 Customer service 106 D Damage requiring service 10 106 Dimensions controller 23 Convectron gauge with connector 24 Micro lon gauge with connector 24 Display Convectron module update rate 31 electrometer module update rate 30 E Electrometer module display update rate 30 filament selection 100 pressure units setup 28 Environmental conditions 50 EU installation requirements 49 F FCC installation requirement 49 FCC verification 12 Fuse replacement 53 G Grounding 55 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 117 Index l Installation analog outputs 59 cable 50 controller 50 controller line voltage 53 Convectron gauge 53 environmental conditions 50 FCC and EU installation requirements 49 fuse replacement 53 gauge installation tips 49 in the field 115 mounting configurations 51 mounting options 54 relays 63 RS 232 connections 65 RS 485 connections 66 system grounding 55 M Maintenance troubleshooting 107 Micro lon gauge alternate ON OFF 68 analog output 69 filament selection 100 operation 98 pressure range 22 specifications 21 theory of operation 101 with connector 24 0 Operation controller 95 electrometer module filament selection 100 Micro lon gauge 98 theory 101 Overpressure shutdown 30 P Preparing for operation 81 Conve
27. b O 2220200 Que 000 2 62 XE og 888 ove Table 4 3 Process Control Output Connector Pin Assignments Micro lon Gauge Convectron Gauge A Convectron Gauge B Process Control Channel BE orre rae eee ee CHASSIS GND PIN L NO CONNECTION PIN N A mating connector is supplied in the hardware kit HS Pr ee RC ee pow d 0 eee E a a 2 5 CAUTION Failure to check system programming before switching to automatic operation can cause measurement error To avoid measurement error due to inaccurate output signals carefully check the system programming before switching to automatic operation Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 63 Chapter 4 WALL 0 WARNING Failure to install appropriate pressure relief devices for high pressure applications can cause product damage or personal injury For automatic backfilling and other applications in which malfunction or normal process conditions can cause high pressures to occur install appropriate pressure relief devices Using Figure 4 8 and Table 4 3 and circuit schematics you have prepared make up a cable to connect the various system components which are to be controlled Unambiguous labeling of each lead will help prevent costly mistakes Ensure that the Process Control channel override switches are all set to OFF Connect the component end of the cable to the syst
28. category Il Pollution degree 2 in accordance with IEC664 The controller is designed to operate a Series 355 Micro lon Gauge This is an all metal miniature gauge with dual yttria coated iridium or dual tungsten filaments and a nominal sensitivity of 20 Torr The Micro lon Gauge electrometer module provides ion gauge pressure readout from 1 x 1079 Torr 1 3 x 1079 mbar or 1 3 x 107 pascal to 5 x 10 Torr N equivalent depending on the emission current used Adjustment is provided for gauge sensitivity See Gauge Electrometer Operation on page 98 Adjustment and an internal switch allow change to mbar or pascal pressure units and a user selectable slow update feature triggers measurement averaging resulting in a display update frequency of about once every three seconds The overpressure shutdown threshold is internally adjustable 1 Provide adequate ventilation for the Controller to dissipate 15 W 2 Do not mount the Controller above other equipment that generates excessive heat 3 This product is designed to operate over the range 0 to 50 C Ambient temperatures above 50 C may damage the product For optimum electrometer calibration stability the Controller ambient temperature should be 25 5 C 50 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Installation Table 4 1 Installation Hardware Part Numbers Mounting Hardware Series 358 Controller Adapter Hardware Description Part
29. documentation provided with your transducer for a description of this output Internal adjustments are provided for zero offset and full scale gain control Capacitance Manometer Adjust the CM Analog Output Offset potentiometer Figure 4 5 to set the Analog Output Offset analog output B at Base pressure The output can be adjusted between Adjustment 0 2 and 0 2 volts at Base pressure for the capacitance manometer Figure 4 7 Analog Output Connectors A and B 100 240 VAC 50 60 HZ 40 WATTS E 5 5 a 2 EJ Capacitance Manometer There are 4 switch selections for the maximum output range of the Analog Output Full scale capacitance manometer gauge Use the selection switch on the front panel Adjustment of the 358 Controller See Figure 5 15 on page 84 to select the maximun pressure to match the capacitance manometer transducer on your system See Table 4 2 The analog output full scale adjustment is a span or gain control with a range of 0 93 to 1 3 The factory setting is for a gain of 1 0 thus 10 volts in from the transducer maximum readable pressure 10 volts out at the factory setting Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 61 Chapter 4 Table 4 2 Capacitance Manometer Analog Output Voltage Pressure Pressure Pressure Pressure Pressure Torr Torr Torr Torr 1000 Torr 100 Torr 10 Torr 1Torr Head Head head Head 10 1000 100 10 1 1 100 10 1
30. explosion or fire use flammable solvents such as acetone and toluene only in a well ventilated area that exhausts to the outdoors Do not use such solvents near an open flame or energized electrical equipment The Convectron Gauge can be baked to 150 C nonoperating while under vacuum with the Connector removed All materials were chosen for ultra high vacuum service corrosion resistance and bakeability The envelope is type 304 stainless steel All metallic joints in the envelope are welded No solder is used within the envelope The following materials are exposed to the vacuum Type 304 stainless steel Carpenter Alloy 52 Kovar Kapton gold plated tungsten borosilicate glass and Dow Corning 9015 glass The blue trim cover is rated at 150 C When the small sensor wire is contaminated with oil or other films its emissivity or its diameter may be appreciably altered and a change of calibration will result Cleaning with trichloroethylene perchloroethylene toluene or acetone is possible but it must be done very carefully so as not to damage the sensor Hold the gauge with the main body horizontal and the port projecting upward at an angle of 45degrees Slowly fill it with solvent using a standard wash bottle with the spout inserted in the port to where it touches the screen Let the solvent stand in the gauge for at least ten minutes Do not shake the gauge Shaking the gauge with liquid inside can damage the sensor wire To dr
31. lon Gauge pressure reads Collector unplugged extremely low Bad collector cable Faulty electrometer Collector is coated with material Micro lon Gauge pressure readout very Micro lon Gauge badly contaminated erratic Improper Micro lon Gauge or Controller grounding Bad collector cable Excessive electrical noise source causing offset Interference from other charged particle source in chamber Faulty electrometer 108 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Service 8 6 Overpressure Shutdown As pressure increases the ion current to the collector increases until the high density of gas molecules begins to interfere with the ionization process When some electrons cannot acquire sufficient energy to ionize the gas molecules the collector current no longer increases with increasing pressure This pressure is called the turn around pressure Further pressure increases will result in a decreasing ion current The Controller is factory set so the ion gauge will shut down when the pressure rises above the overpressure setpoint pressures shown in Table 8 2 For reliable operation in general applications the overpressure shutdown point is factory set below the Micro lon Gauge turn around point at both emission currents Although we recommend that you do not change the factory settings the overpressure shutdown can be readjusted for specific applications according to the following procedure
32. pascal that you requested To change the Gauge units of measure for the Convectron Gauge 1 Turn OFF power to the Controller 2 Remove the top cover as described in Top Cover Removal on page 27 3 Locate the Convectron gauge module See Figure 2 4 and Figure 3 5 4 Locate the mbar and pascal units switches 5 Leave both switches OFF for Torr units Turn ON the switch for either mbar or pascal units 6 Modify the units of measure of the electrometer module to be consistent with the Convectron gauge See Changing Units of Measure for Electrometer Module on page 28 7 Slip the label card out of the top of the front panel and apply the appropriate pressure units label See Figure 3 4 8 Replace the top cover as described on page 47 30 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Initial Setup Figure 3 5 Convectron Gauge Module Top View Units of measure switch ON and OFF positions 3 8 Display Update Rate When ON this the Slow Update switch on the Convectron module Switch on Convectron enables pressure averaging The display will be updated approximately Module every 3 seconds When OFF the update period is approximately 0 5 seconds Refer to Figure 3 5 3 9 Changing Units of The Series 358 Controller is shipped from the factory preset to display the Measure for a units of measure Torr mbar or pascal that you requested If you want to Capacitance Manometer change units
33. switch ON The following information pertains to the the proper installation of a Micro lon Gauge a Convectron Gauge and a capacitance manometer gauge The gauges are illustrated in Figure 2 1 on page 13 and the cable connectors are illustrated in Figure 2 5 on page 17 The Series 358 Micro lon Vacuum Gauge Controller is capable of operating a Micro lon gauge located up to 50 feet away and Convectron Gauge located up to 200 feet away by using standard cables provided by Brooks Automation Inc Granville Phillips After the gauges are installed on the chamber be sure the system is properly grounded as outlined in Section 4 11 on page 55 and Figure 4 3 on page 58 Cleanliness pays Keep the port cover in place until moments before installation Do not mount a vacuum gauge in a manner such that deposition of process vapors upon the internal surfaces can occur through line of sight access to its interior If condensates may be present orient the port downward to help liquids drain out For proper operation above about 1 Torr install Convectron gauges with the gauge axis horizontal To minimize pressure indication errors avoid installing the Convectron gauge where it will vibrate Vibration causes convection cooling of the sensor and will cause the pressure indication to be high Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 53 EJ D a CD 2 5 Chapter 4 4 10 Mounting Options
34. transmitting the terminator the controller will negate RTS and wait for the next incoming message Figure 4 10 Controller Rear Panel with RS 232 Option RS232 13 e 25 71 IQ e Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 65 EJ a N 2 5 Chapter 4 4 16 RS 232 Handshake Line Summary Reversing RTS Polarity Connecting RS 485 Computer Interface CTS DSR Set the computer to indicate that controller may output the next byte in its message As shipped from the factory these lines are forced TRUE by the switch settings of the controller RS 232 printed circuit board Thus the controller will automatically assume the host is ready to receive See Figure 3 12 on page 39 for the location of these switches DCD Tested by controller when a character is received The character will be ignored unless DCD is TRUE As shipped from the factory this line is forced TRUE by the switch settings DTR Always asserted by the controller A power ON indication RTS Negated by the controller on power up Asserted by the controller upon receipt of a message terminator Negated after transmitting the terminator of the controller s response to that message If switch 2 is open on power up the controller will apply the opposite polarity to RTS from that described above When used in this mode RTS may be connected to the CTS input of the host computer This violates the
35. which can be determined by turning the equipment OFF and ON the user is encouraged to try to correct the interference by one or more of the following measures Reorient or relocate the receiving antenna Increase the separation between the equipment and the receiver Connect the equipment into an outlet on a circuit different from that to which the receiver is connected Consult the dealer or an experienced radio or television technician for help For information about FCC and EU compliance see FCC and EU Installation Requirements on page 49 12 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 The Series 358 Micro lon Vacuum Measurement System can operate one Micro lon gauge along with two Convectron Gauges simultaneously or one Micro lon gauge along with one Convectron Gauge and one Capacitance Manometer Gauge simultaneously Pressure readout is via three front panel displays analog output and available computer interface The Series 358 Micro lon Vacuum Measurement Controller is a modular instrument that can easily be customized to fit most user s exact needs Infrequently used controls are housed behind a hinged front panel reducing front panel clutter and allowing the Controller to reside in a half rack space Figure 2 1 Micro lon Vacuum Measurement System N lt o 2 3 o 3 D E 5 a 1 358 Controller 2 3 4 Micro lon Gauge Convectron Gauges C
36. 3 7 in Not applicable 15 mm port diameter 9 4 cm 3 7 in Not applicable 18 mm port diameter 9 4 cm 3 7 in Not applicable 1 4 inch VCR type Not applicable 8 1 cm 3 2 in 1 2 inch VCR type 8 6 cm 3 4 in 8 1 cm 3 1 in NW16KF flange 7 3 cm 2 9 in 6 9 cm 2 7 in NW25KF flange 7 3 cm 2 9 in 6 9 cm 2 7 in NWAOKF flange 7 3 cm 2 9 in Not applicable a lt pz 2 3 o 3 D E e 5 a 1 33 inch ConFlat 7 3 cm 2 9 in 6 4 cm 2 5 in 2 75 inch ConFlat 7 3 cm 2 9 in 6 4 cm 2 5 in VCR is a registered trademark of Swagelok Company ConFlat of Varian Inc 2 6 Mounting Options The controller can be ordered with a variety of mounting options to fit your needs This includes half rack standard full rack or two units in a full rack See Controller Installation on page 50 and Figure 4 1 on page 52 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 25 Chapter 2 26 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 3 1 Controller Setup Now is a convenient time to make any required switch changes before mounting the Controller in its desired location If the pressure display units of measure are correct see Figure 3 1 and you do not want to change the degas power timer from the factory setting of 10 minutes skip to Process Control Setup on page 32 Figure 3 1 Units of Measure Label 358 MICHRO ION Controller
37. A DIP switch is provided for each channel Refer to the numbers on the printed circuit board not on the switch body for the channel number Use Table 3 3 to assign relay polarity settings The switches are factory preset as shown below for relay activation below the pressure setpoint This is most commonly desired when you want the relay to be de energized under a high pressure condition Figure 3 10Process Control Relay Polarity Switches 5 E ce 2 EJ ON OFF gt Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 35 Chapter 3 Table 3 3 Relay Polarity Switch Settings Switch Channel Pressure Indication Switch Channel Pressure Indication Settings Activated Relative to Setpoint Settings Activated Relative to Setpoint jm m e m 5 5 4 Ei cme Process Control Tips 1 gt ON lt OFF gt ON lt OFF gt ON lt Below factory setting OFF Below factory setting OFF gt Below factory setting Below factory setting Below factory setting O lt gt Below factory setting 1 a N N N O lt 1 Above O lt The process control override switches can be used to hold relays ON or OFF during initial setup or during non typical process conditions When the Micro lon gauge is OFF channels 1 and 2 are inoperative When Convectron gauges are disconnected channels 3 th
38. CTS DSR forced true The interface protocol is set using 8 switches Internal switches are read upon controller power up Changes in settings will take effect upon next power up cycle Connector Pinouts for This factory or field installed option has pin functions as shown in RS 232 Computer Table 3 5 Interface A mating DB 25S connector is supplied in the hardware kit Use shielded cable to minimize electromagnetic radiation or susceptibility Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 37 EJ a a 2 5 Chapter 3 Figure 3 11 RS 232 Connector RS232 43 13 25 9960860 6966688 14 Oe DB 25S connector Table 3 5 RS 232 Connector Pin Assignments Protective Ground Request to Send RTS Clear to Send CTS Data Set Ready DSR Signal Ground common return Ler Data Carrier Detect DCD 38 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Initial Setup Selecting Byte Format for Baud Rate for RS 232 Module RS 232 Module Dip switches 6 8 are used to control the baud rate The settings are listed in Table 3 6 Figure 3 12 RS 232 Module Top View Talk Onl Invert RTS Byte Format Baud Rate E uP Failure Table 3 6 RS 232 Baud Rates On factory setting 9600 factory setting EJ a a 2 5 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 39
39. E 2 10 1 4 01 01 1 1 01 001 Pressure Volts multiplied by Scaling P V x 100 1000 Torr Head P V x 10 100 Torr Head P V x 1 10 Torr Head P Vx 1 1 Torr Head Capacitance Manometer Full scale Adjustment The full scale adjustment potentiometer Figure 4 5 controls the full scale readout of the capacitance manometer display The control is adjusted at the factory for a full scale display with an input of 10 0 volts After zeroing the Controller as described above the Controller can be calibrated to the transducer by adjusting the full scale adjust potentiometer so the Controller display corresponds to the pressure of the manometer at or near the maximum pressure This reference pressure may be determined by a certified standard gauge a dead weight calibration system or a standard voltage reference The full scale adjust potentiometer and the CM analog out full scale potentiometer do not interact and can be adjusted independently 62 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Installation 4 14 Connecting Process For instructions for setting up this module see Process Control Setup on Control Relays page 32 The process control connector is embossed with letters identifying corner pins Table 4 3 shows the letters designating the 3 pins assigned to each of the 6 setpoint channels Figure 4 8 Process Control Output Connector PROCESS CONTROL B tor S
40. RS 232 standard but is a commonly used implementation For instructions for setting up this interface see RS 485 Computer Interface Setup on page 42 Connectors J1 and J2 on the rear panel of the controller Figure 3 16 are wired in parallel and are interchangeable Connection can easily be made by daisy chaining gauge Controllers together with the signal from the host computer going into one connector then out the other to another gauge Controller and so on The maximum total cable length is 4000 ft The maximum number of devices connected is 32 The control of data over the RS 485 interface is handled by a Half duplex Command Response mechanism 66 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 5 1 Preparing for Pressure Measurement Figure 5 1 Power ON OFF Switch INPUT POWER 100 240 VAC 50 60 HZ 40 WATTS Before preparing to operate the controller make sure that the controller has been properly set up and installed per the instructions in Chapter 3 and Chapter 4 e the gas in your vacuum system is air or N5 For other gases you must follow the instructions in Preparing for Convectron Gauge Operation on page 71 for using Convectron gauges and you are reasonably familiar with the general theory of operation of hot cathode Micro lon gauges and thermal conductivity gauges 1 Turn ON the controller by pressing the power switch labeled ON See Figure 5 1 2 Convectron gauge e
41. Series 358 Granville Phillips Series 358 Micro lon Vacuum Gauge Controller ee EE ee ee RS SEM RES D EM BROOKS AUTOMATION Instruction Manual Instruction manual part number 358013 Revision 09 June 2008 Series 358 Granville Phillips Series 358 Micro lon Vacuum Gauge Controller This Instruction Manual is for use with all Granville Phillips Series 358 Micro lon Vacuum Gauge Controllers A list of applicable catalog numbers is provided on the following page FEE ES EM RES D GN L lle ll D EM a AM BROOKS AUTOMATION To order products online visit www brooks com For customer service 24 hours per day 7 days per week every day of the year including holidays toll free within the USA phone 1 800 367 4887 For customer service within the USA 8 AM to 5 PM weekdays excluding holidays Toll free phone 1 800 776 6543 Phone 1 303 652 4400 e FAX 1 303 652 2844 Email co csr brooks com Web www brooks com Instruction Manual 2007 2008 Brooks Automation All rights reserved Granville Phillips Micro lon and Convectron are registered trademarks of Brooks Automation All other trademarks and registered trademarks are the properties of their respective owners Granville Phillips Series 358 Micro lon Vacuum Gauge Controller Catalog numbers for Series 358 Micro lon Controllers Controller for a Micro lon gauge with 3 line display electron bombardent degas and remot
42. What was once a carefully grounded vacuum system can by innocent failure to reconnect all ground connections become a very dangerous device Procedure for Testing Use the following procedure to test each of your vacuum systems that Grounding of Systems incorporate an Micro lon gauge This procedure uses a conventional volt ohm meter VOM and a resistor 10 Q 10 W 1 With the Controller turned OFF test for both DC and AC voltages between the metal parts of the vacuum chamber and the power supply chassis 2 If no voltages exist measure resistance The resistance should not exceed 2 Q Two ohms or less implies commonality of these grounds that should prevent the plasma from creating a dangerous voltage between them This test does not prove that either connection is earth ground only that they are the same If more than 2 Q is indicated check with your electrician 3 If AC or DC voltages exist and are less than 10 V shunt the meter with a 10 Q 10 W resistor Repeat the voltage measurement With the shunt in place across the meter if the voltage remains at 8396 or more of the unshunted value commonality of the grounds is implied Repeat the measurements several times to be sure that the voltage ratio is not changing with time If the condition in the following equation exists this should prevent the plasma from creating a dangerous voltage between these grounds If more than 10 V exists between grounds check with your electricia
43. actory setting SEN EN ae eee Character Framing for the RS 485 Computer Interface Character framing for the RS 485 computer interface is determined by 2 3 2 4 2 5 Table 3 14 RS 485 Character Framing Response Delay for the RS 485 Computer Interface Switch 2 1 Figure 3 16 on page 45 enables a delay in the response from the module of 13 MS 10 bits when OFF When 82 1 is ON the delay is 700 uS Default is ON 46 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Initial Setup 3 14 Replacing the Controller Assuming you have completed the above instructions the Controller setup Cover is now complete Replace the top cover Make sure the door hinge pin is seated correctly Replace the four top cover Phillips head screws and the side by side clamp if used Figure 3 17 Location of Screws forReplacing the Top Cover CA a 2 gt Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 47 Chapter 3 48 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 CAUTION Failure to check system programming before switching to automatic operation can cause measurement error To avoid measurement error due to inaccurate output signals carefully check the system programming before switching to automatic operation WARNING Failure to install appropriate pressure relief devices for high pressure applica
44. ain the gauge position it horizontally with the port facing downward Slightly warming the gauge will help dry the gauge Then allow the gauge to dry overnight with the port open and vertically downward Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 111 Chapter 8 8 8 Capacitance Manometer Refer to Figure 4 5 on page 60 to locate the LEDs on the capacitance Troubleshooting manometer printed circuit board Table 8 4 Capacitance Manometer Troubleshooting Guide See Figure 4 5 on page 60 A D Failure LED ON A D failure Defective Normally Open converter circuit 15V Overcurrent LED is ON 15 V overcurrent Defective cable transducer or circuit board Convectron Bridge Out LED Defective PC board Convectron bridge circuit is ON CG Overcurrent LED is ON Convectron overcurrent Defective gauge or cable UP Failure LED is ON Microprocessor failure 8 9 Process Control If the uP FAILURE LED is illuminated or flashing there is a probable circuit Troubleshooting failure Return this product for repair at a service facility designated by Brooks Automation Inc The setpoints are read from non volatile memory into RAM when the unit powers up On power up a checksum is computed and stored in RAM and is updated whenever a setpoint is changed It is then periodically re computed from the existing setpoints and checked against the pre existing value If for any reason such as a power fluctuation or electrical t
45. anville Phillips provides an eighteen 18 month warranty from the date of shipment for new Granville Phillips products The Brooks Automation Inc Granville Phillips general terms and conditions of sale provide the complete and exclusive warranty for Brooks Automation Inc Granville Phillips products This document is located on our web site at www brooks com or may be obtained by a contacting Brooks Automation Inc Granville Phillips customer service representative Some minor problems are readily corrected on site If the product requires service please contact our Customer Service Department for troubleshooting help over the phone For customer service Phone 1 303 652 4400 or 1 800 776 6543 within the USA Phone 1 800 367 4887 24 hours per day 7 days per week within the USA Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 11 wo o lt wo o 3 Chapter 1 1 8 FCC Verification Email co csr amp brooks com For Global Customer Support go to www brooks com click on Contact Us then click on Global Offices to locate the Brooks Automation office nearest you If a product must be returned for service request a Return Authorization RA from Brooks Automation Inc Granville Phillips Do not return products without first obtaining an RA In some cases a hazardous materials document may be required The Brooks Automation Granville Phillips Customer Ser
46. apacitance Manometer Gauge Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 13 Chapter 2 Figure 2 2 Controller Front Panel G gt GRANVILLE PHILLIPS IG AR 358 MICRO ION Controller are CALA TES FOR ma 1 Micro lon display 6 Degas momentary ON OFF switch 2 Convectron Gauge A display 7 Degas LED 3 Convectron Gauge B or Capacitance 8 Process control channel labels Manometer display 4 Unit of measure label Torr mbar or pascal 9 Process control channel indicator lights user selectable 5 Micro lon Gauge momentary ON OFF switch 14 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 System Components Figure 2 3 Controller Front Panel with Door Open DES M ae NU 10 11 12 13 14 Filament select switch filament 1 filament 2 or both Pressure range selector Sensitivity adjustment Atmosphere adjustment Convectron or Capacitance Manometer gauge B Vacuum zero adjustment Convectron or Capacitance Manometer gauge B Process control setpoint 3 position manual override switches Center relay is controlled automatically Left relay is deactivated Right relay is activated Process control channel indicator Process control channel selector thumbwheel Down process control setpoint pressure set pushbutton Up process control setpoint pressure set pushbutton Vacuum zero adjustment Convectron gauge A Atmosphere adjustment
47. aracter is not received properly the controller may not interpret it as a start character and the controller will not respond The Host software must be prepared to re send a command if a response is not generated within a reasonable period of time OVERRUN ERROR message Stop bit s incorrect host software failure SYNTAX ERROR message Message to controller not in accord with specified syntax 114 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Service 8 12 Field Installation of a 1 Turn OFF power to the Controller Module 2 With power OFF remove any cables from the Controller rear panel 3 Observe antistatic precautions to avoid damaging static sensitive components inside the chassis Use a grounded conductive work surface Do not handle MOS devices more than absolutely necessary and only when wearing a high impedance ground strap Use conductive envelopes to store or ship MOS devices or printed circuit boards Do not operate the Controller with MOS devices removed from the printed circuit boards 4 See Top Cover Removal on page 27 for how to remove the top cover Locate correct position for module 6 Carefully remove the bus ribbon cable from all modules located to the right as you face the front panel of the position where the module is to be installed Remove connectors slowly using pull tabs 7 Lift out the filler module at the position where the module is to be installed 8 Install th
48. ation in this section applies only when the Convectron Gauge has been calibrated for N and when the Convectron Gauge is mounted with its axis horizontal At pressures below a few Torr there is no danger in measuring pressure of gases other than N and air merely inaccurate indications A danger arises if the N calibration is used without correction to measure higher pressures of some other gases For example N or air at 24 Torr causes the same heat Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 71 5 E D EJ ec gc Sd Chapter 5 loss from the Convectron sensor as will argon at atmospheric pressure Thus if the pressure indication of the Convectron gauge is not properly corrected for argon an operator attempting to fill a vacuum system with 1 2 atmosphere of argon would observe an indication of only 12 Torr when the actual pressure had risen to the desired 380 Torr Continuing to fill the system with argon to 760 Torr would result in only a 24 Torr indication Depending on the pressure of the argon gas source the chamber could be dangerously pressurized while the display continued to read about 30 Torr of N equivalent pressure The same type of danger likely exists with other thermal conductivity gauges using convection to extend the range to high pressures and with Convectron gauges calibrated for gas type Y when used with gas type X Understand that wi
49. ctron gauge 71 Micro lon gauge alternate ON OFF 68 Micro lon gauge analog output 69 pressure measurement 67 process control 84 85 RS 232 protocol 87 RS 485 protocol 90 Pressure overpressure shutdown 109 true versus indicated 74 79 units setup 28 Pressure relief devices 11 Process control preparing for operation 84 85 theory of operation 103 troubleshooting 112 R Reading and following instructions 9 Relays installation 63 polarity setting 35 RS 232 protocol command set DG 88 DGS 88 DS 88 IG1 89 PCS 89 connecting 65 interface setup 37 preparing for operation 87 specifications 18 troubleshooting 113 RS 485 protocol command set DG 91 DGS 91 DS 91 IG1 89 92 PCS 92 connecting 66 interface setup 42 preparing for operation 90 specifications 19 troubleshooting 114 118 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Index S Convectron gauge module 110 Service process control module 112 damage requiring 106 RS 232 protocol 113 field installation 115 RS 485 protocol 114 guidelines 11 105 True versus indicated pressure 74 79 overpressure shutdown 109 troubleshooting Convectron gauge 110 W troubleshooting process control module 112 Warranty 11 troubleshooting RS 232 protocol 113 troubleshooting RS 485 protocol 114 Setup controller 27 Convectron gauge pressure units 30 Convectron module update rate 31 electrometer module 28 overpressure shutdown 30 pressure units 28 process contr
50. ctron gauge module is shutting OFF the Micro lon Gauge Emission current setting wrong for pressure in gauge Improper Micro lon Gauge connector hookup Badly contaminated Micro lon Gauge Damaged or contaminated cathode coating will not sustain emission Short in Micro lon Gauge cable Short between Micro lon Gauge electrodes Open cathode in Micro lon Gauge Micro lon gauge display shows a CAL switch is not in the OFF position steady number when the Micro lon gauge is OFF Convectron Gauge display reads a Micro lon Gauge IG AUTO switch is left in the set position or the Convectron fixed non changing pressure option Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 107 Chapter 8 Table 8 1 Symptoms and Possible Causes Symptom Possible Cause Pressure reading is higher than Micro lon Gauge contaminated expected UHV pressure range is not selected appropriately pressure is below 1 x 1077 Torr Interference from other ion source Poor conductance in gauge s vacuum connection to chamber Gas source in plumbing to gauge such as leak or contamination Chamber pressure high because of leak contamination or pump failure Poor location selected for gauge Faulty gauge or power cable Faulty electrometer Degas will not turn ON System pressure above 5 x 10 Torr Micro lon Gauge not turned ON Micro lon Gauge shuts OFF when Degas fuse blown degas is initiated Badly contaminated Micro lon gauge Micro
51. dge control circuit senses the null voltage and decreases the voltage across the bridge until the null voltage is again zero When the bridge voltage is decreased the power dissipated in the sensor wire is decreased causing the resistance of R1 to decrease to its previous value The opposite events happen for a pressure increase The bridge voltage is a nonlinear function of pressure All materials have been chosen for ultra high vacuum service corrosion resistance and bakeability to 150 C The gauge tube envelope is type 304 stainless steel All metallic joints in the envelope are TIG welded No solder is used within the envelope The following materials are exposed to the vacuum Type 304 stainless steel Carpenter Alloy 52 Kovar Kapton gold plated tungsten borosilicate glass and Dow Corning 9015 glass The blue trim cover is molded of Ultem polyetherimide resin suitable for service to 150 C 102 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Theory of Operation 7 3 7 4 7 5 Microcontrollers and Bus Structure Capacitance Manometer Theory of Operation Process Control Theory of Operation The electrometer module in the controller has a dedicated microcontroller with internal ROM RAM timing and interrupt management functions This architecture provides high performance at low cost with greater reliability and noise immunity than more complicated microprocessor systems using externa
52. e single ASCII digit O if the corresponding relay is inactive 1 if active B response a byte of data with bit O through 5 set clear according to whether the corresponding relay is active inactive Bit 6 will always be set to guarantee that the returned byte will not appear as a terminator byte None or Absent response will be a string of 6 ASCII zeroes and ones separated by commas giving the status of all six channels 92 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Preparing for Operation 5 16 RS 485 Error Messages Examples Assume that channels 1through 3 are active and 4 through 6 are inactive From computer AAPCS 1 CR From controller 1CR From computer AAPCS B CR From controller GCR The ASCII G corresponds to the bit pattern 01000111 and represents the status of the PC channels From computer AAPCS CR From controller 1 1 1 0 0 0CR If an error is found in the incoming message the following messages will be returned in place of the normal response OVERRUN ERROR Returned if the incoming message overflows the buffer This may indicate a flaw in the host software PARITY ERROR Returned if the parity of a byte in the incoming message does not match that programmed by the switches SYNTAX ERROR Returned if the message fails to parse as a valid command Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 93 5 E D
53. e appropriate units For example a tube has a sensitivity of 20 Torr or 15 mbar Thus for this tube adjusting the sensitivity for a display reading of 2 0 1 will result in display of pressure in Torr see Sensitivity Adjustment on page 99 Adjusting to 1 541 will result in display in mbar If you want to change pascal units change the switch on the electrometer module as follows 1 Shut OFF power to the Controller 2 Remove the top cover as described in Top Cover Removal on page 27 Locate the Micro lon gauge electrometer module See Figure 2 4 and Figure 3 3 4 Locate the Unit of Measure display units control switch 28 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Initial Setup Figure 3 3 lon Gauge Electrometer Module TopView Unit of Measure Slow Update Overpressure Shutdown Potentiometer Units of measure switch ON and OFF positions 5 Setthe switch to the desired position Off 2 Torr mbar units On pascal units You must also change the setting of the unit of measure switch on the Dual Convectron gauge as described in Changing Units of Measure for Convectron Cauge on page 30 6 To change the units of measure label on the front of the Controller open the door and lift the label card from its slot in the top of the front panel Units of measure labels are included in the mounting hardware kit Figure 3 4 Removing the Units of Measure Label Card
54. e input output interface CE Marked Half rack mount 358501 2 2 2 Left mount for 19 inch rack 358502 Center mount for 19 inch rack 358503 Black Case amp Half rack mount 358504 d Black Case amp Left mount for 19 inch rack 358505 Interface options Slot X None RS 232 RS 485 422 gt Gauge options Slot Y None 0 Dual Convectron 1 Capacitance Manometer Convectron 1 2 Setpoint options Slot Z None 2 setpoint relays for Micro lon gauge 6 setpoint relays 2 per channel gt Display options Measurement units Torr mbar Pascal v Powercord options North America 115 V North America 240 V Universal Europe 220 V United Kingdom 240 V RWNo NOTE The Capacitance Manometer Convectron Gauge option is not CE Marked Chapter 1 Before You Begin vs dacseuds cadabads tase ee tes 1 1 Caution and Warning Statements 1 2 Reading and Following Instructions 1 3 Damage Requiring Service 1 4 Pressure Relief Devices 1 5 Certification Lo e oed ees et ASN sedet 1 6 Warranty Information 1 7 Service Guidelines 1 8 FCC V rification coget est reader pog Chapter 2 System Components n eoo ener eed cosa 2 1 Option Spg ote see edet dee LM G e dea 2 2 RS 232 Specificat
55. e module in its proper position making sure all ends lock together 9 Carefully reconnect the bus ribbon connectors 10 Select appropriate switch settings See Chapter 2 11 Replace the top cover as instructed in Replacing the Controller Cover on page 47 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 115 Chapter 8 116 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 A Analog outputs connecting 59 Convectron gauge 82 Micro lon gauge 69 Before you begin caution and warning statements 9 certification 11 FCC verification 12 pressure relief devices 11 reading and following instructions 9 service guidelines 11 warranty 11 C Capacitance Manometer Analog Output Signal 61 Initial Transducer Calibration 85 Capacitance manometer specifications 23 theory of operation 103 Caution and warning statements 9 Certification product 11 Chapters Before You Begin 9 Initial Setup 27 Installation 49 Operation 95 Preparing for Operation 67 Service 105 System Components 13 Controller dimensions 23 installation 50 line voltage 53 mounting configurations 51 operation 95 options 21 removing top cover 27 replacing top cover 47 setup 27 specifications 20 Convectron gauge analog output 1 82 installation 53 mounting options 54 preparing for operation 71 pressure units setup 30 specifications 22 theory of operation 102 troubleshooting 110 with connector 24 zero and
56. e versus Indicated Pressure for Commonly used Gases 107 to 107 Torr 1 107 Kr 102 Ar 5 Ne No Air 1 2 He 5 COz B D O2 D2 A o NI freon 22 10 freon 12 CH4 Use this data only when the T Convectron Gauge axis is horizontal Do NOT use this data with any 104 transducers other than G P EM Series 275 Convectron Gauges pp is EE E Pressure units equivalence 1 um Hg 1 mTorr 1 x 10 Torr 1000 um Hg 1 Torr 104 10 10 107 Indicated Pressure Torr Nitrogen Equivalent 74 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Preparing for Operation 3 Figure 5 7 True Pressure versus Indicated Pressure for Commonly used Gases 10 to 1000 Torr S 1000 S Ar Ej freon 12 No air CO 100 FH CH 5 10 Oo E H o He 2 o o g a o Use this data only when the D 4 Convectron Gauge axis is horizontal Do NOT use this data with any transducer
57. ed Liquid has been spilled onto or objects have fallen into the product The product has been exposed to rain or water The product does not operate normally even if you have followed the Operation Instructions Adjust only those controls that are covered in the instruction manual Improper adjustment of other controls may result in damage and require extensive work by a qualified technician to restore the product to its normal operation The product has been dropped or the enclosure has been damaged The product exhibits a distinct change in performance This may indicate a need for service WARNING Failure to perform a safety check after the controller has been repaired can result in product damage or personal injury due to electrical shock or fire If the controller has been repaired before putting it back into operation make sure qualified service personnel perform a safety check If a product must be returned for service request a Return Authorization RA from Brooks Automation Granville Phillips Do not return products without first obtaining an RA In some cases a hazardous materials document may be required The Brooks Automation Granville Phillips Customer Service Representative will advise you if the hazardous materials document is required When returning equipment to Brooks Automation Granville Phillips be sure to package the products to prevent shipping damage Circuit boards and modules s
58. em component to be controlled Plug the connector into the back of the Controller Refer to Preparing for Process Control Operation on page 85 for instructions for setting setpoints Figure 4 9 Override Switches Process Control Off SP On 41 4 u XXX Sa U m v ov 64 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Installation 4 15 Connecting the RS 232 Computer Interface Handshake Lines For instructions for setting up this interface see RS 232 Computer Interface Setup on page 37 The DTR line is set true on power up to indicate it is on line When the controller receives a start biton the received data line it will input and buffer a character The DCD line must be true at the time each character is received or that character will be ignored The controller will continue to receive and buffer characters until the terminator LF is received Upon receiving the terminator the controller will assert the RTS line as a holdoff to prevent the host computer from attempting to transmit further data until the message just received has been decoded and a reply has been output During output of the reply the incoming handshake lines CTS and DSR are tested prior to beginning transmission of each character The controller will wait until both are true before beginning transmission of a character and will not test them again until ready to begin transmitting the next character After
59. eparated from the controller chassis must be handled using 106 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Service proper anti static protection methods and must be packaged in anti static packaging Brooks Automation Granville Phillips will supply return packaging materials at no charge upon request Shipping damage on returned products as a result of inadequate packaging is the Buyer s responsibility Before you return the module obtain an RA number by contacting Granville Phillips customer service Phone 1 303 652 4400 or 1 800 776 6543 within the USA Phone 1 800 367 4887 24 hours per day seven days per week within the USA Email co csr amp brooks com For Global Customer Support go to www brooks com click on Contact Us then click on Global Offices to locate the Brooks Automation office nearest you 8 5 Troubleshooting If any of the conditions described above have occurred troubleshooting is required to determine the repairs that are necessary Table 8 1 Symptoms and Possible Causes Symptom Possible Cause Unit will not power up no response to Power fuse blown power switch Wrong line voltage selection see Line Voltage on page 53 Power fuse blows repeatedly Wrong fuse rating Wrong line voltage selection see Line Voltage on page 53 Micro lon gauge will not turn ON or Micro lon gauge at too high pressure turns on briefly then shuts OFF Auto turn ON OFF circuit in Conve
60. er 4 4 13 Connecting a Capacitance If you have a Capacitance Manometer capability installed signal voltages Manometer are provided on the back of the Convectron Gauge module via a standard 1 8 in miniature phone jack the Analog Output B port shown in Figure 4 4 Two mating connectors are supplied with this capability The wires provided for the capacitance manometer are terminaed as bare wires Refer to the documentation provided with the capacitance manometer for connection instructions Be sure to protect all unused leads from shorting Figure 4 5Capacitance Manometer PCB pascal mbar slow update a a z Lr lt lt i amp guo be co bu 40023 0 ow ac AUD 35 50 oc DLLD s oou wow LOOL wi T25 or EEEE X F wet afs 2222 w Y Baza I2 ul 0000 a z LE ost soz E x o D gt cL X ogogo o Zu 2 ooo ooa da OOOO0 Edu a O4 O0 5U gzgdq d 22 lt z822 2222 2 88 d oO ozoz gt Z F zitoz oooo o x 1 4 a cocaicagg Er Figure 4 6 Capacitance Manometer Wiring Diagram P1 Capacitance Manometer Wiring Diagram po aNWweuave 15V PWR GND 15V SIG SIG GND 60 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Installation Capacitance Manometer The analog output for the capacitance manometer is a dc voltage Analog Output Signal proportional to the pressure with a range of 0 to 10 volts proportional to the transducer output Refer to the
61. ge Theory of Operation The functional parts of a typical Micro lon Gauge are the filament cathode grid anode and ion collector which are shown schematically in Figure 7 1 These electrodes are maintained by the gauge Controller at 30 180 and 0 V relative to ground respectively The filament is heated to such a temperature that electrons are emitted and accelerated toward the grid by the potential difference between the grid and filament Most of the electrons eventually collide with the grid but many first traverse the region inside the grid one or more times Figure 7 1 Micro lon Gauge Schematic L Q Mo d Fm gt 3 X5 m D D Filament gt lon Collector Grid When an energetic electron collides with a gas molecule an electron may be dislodged from the molecule leaving it with a positive charge Most ions are then accelerated to the collector The rate at which electron collisions with molecules occur is proportional to the density of gas molecules and hence the ion current is proportional to the gas density or pressure at constant temperature The amount of ion current for a given emission current and pressure depends on the Micro lon Gauge design This gives rise to the definition of Micro lon Gauge sensitivity frequently denoted by K _ lon current Emission current x Pressure The Series 355 Micro lon Gauge has a sensitivity of 20 Torr when used wi
62. gh accuracy is to be obtained Refer to the manual for your transducer for instructions The process control module contains a dedicated microcontroller and a non volatile memory chip for storage of the setpoints The microcontroller compares the setpoints with the pressure display data on the display bus and makes a decision as to whether or not to activate a channel s relay Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 103 DD 3 gc 1 S i 2 104 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 8 1 Service Guidelines Some minor difficulties are readily corrected in the field Each module in the controller has fault indicator LEDs which help localize failures If a qualified service person makes repairs at the component level repairs properly made with equivalent electronic parts and rosin core solder do not void the warranty Because the controller contains static sensitive electronic parts the following precautions must be followed when troubleshooting Use a grounded conductive work surface Wear a high impedance ground strap for personal protection Use conductive or static dissipative envelopes to store or ship static sensitive devices or printed circuit boards Do not operate the product with static sensitive devices or other components removed from the product Do not handle static sensitive devices more than absolutely neces
63. gin 1 4 1 5 1 6 1 7 Pressure Relief Devices Certification Warranty Information Service Guidelines WARNING Failure to install appropriate pressure relief devices for high pressure applications can cause product damage or personal injury For automatic backfilling and other applications in which malfunction or normal process conditions can cause high pressures to occur install appropriate pressure relief devices Suppliers of pressure relief valves and pressure relief disks are listed in the Thomas Register under Valves Relief and Discs Rupture Confirm that these safety devices are properly installed before installing the product In addition check that 1 The proper gas cylinders are installed 2 Gas cylinder valve positions are correct on manual systems and 3 The automation is correct on automated gas delivery systems Vacuum gauges with compression fittings may be forcefully ejected if the vacuum system is pressurized Brooks Automation Inc Granville Phillips certifies that this product met its published specifications at the time of shipment from the factory Brooks Automation Inc Granville Phillips further certifies that its calibration measurements are traceable to the National Institute of Standards and Technology to the extent allowed by the Institute s calibration facility See also CE Declaration of Conformity inside envelope for CE tests performed Brooks Automation Inc Gr
64. hooting 107 8 6 Overpressure Shutdown 109 8 7 Troubleshooting the Convectron Gauge Module 110 8 8 Capacitance Manometer Troubleshooting 112 8 9 Process Control Troubleshooting 112 8 10 RS 232 Troubleshooting 113 8 11 RS 485 Troubleshooting 114 8 12 Field Installation of a Module 115 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 7 Table of Contents 8 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 1 1 1 2 Caution and Warning Statements Reading and Following Instructions This manual contains caution and warning statements with which you must comply to prevent inaccurate measurement property damage or personal injury CAUTION Caution statements alert you to hazards or unsafe practices that could result in minor personal injury or property damage Each caution statement explains what you must do to prevent or avoid the potential result of the specified hazard or unsafe practice WARNING Warning statements alert you to hazards or unsafe practices that could result in severe property damage or personal injury due to electrical shock fire or explosion Each warning statement explains what you must do to prevent or avoid the potential result of the specified hazard or
65. i OO EE u se ANALOG OUTPUT B N ene H Switches seid Potentiometers 82 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Preparing for Operation Figure 5 14 Convectron Gauge Analog Output versus Pressure 10 3 5 1 E D gc 1 Sd 10 factory adjustment 10 Pressure Torr Pressure pascal 10 10 2 lower adjust limit upper adjust limit 10 3 10 4 The voltage signal is smooth and continuous throughout all the decades of pressure measurement This format is useful for computerized data acquisition because a simple equation finding the common antilogarithm may be programmed to calculate pressure from the voltage output The equation is Pi 10 Torr mbar or Pi 10V pascal where Pi pressure indication V analog output voltage and the offset is factory adjusted for O V at 1 x 107 Torr 1 x 10 pascal If the offset has been adjusted to other than OV at 107 Torr 107 pascal then the exponent value must be forced to 4 2 for Pa when the pressure is at 1 0 x 107 Torr 1 x 10 pascal by adding or subtracting a number other than 4 from the value of V For example if the offset has been adjusted so that the output voltage is 7 V at 1 x 10 Torr 1 x 107 pascal then 3 5 for pascal must be used in the Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 83 Chapter
66. ill appear for 2 seconds in the corresponding display 86 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Preparing for Operation 5 13 Preparing to use RS 232 Computer Interface To Modify a Setpoint 1 Set the selector switch to the number of the channel you wish to modify see Figure 5 16 2 Press and hold one of the setpoint Set pushbuttons for the direction you wish the setpoint to change 3 Thesetpoint will scroll until the switch is released It will scroll slowly until a decade boundary is crossed and then will speed up to facilitate rapid changes across many decades Release the switch when you have entered the desired decade and then re depress it to scroll slowly within the decade to reach the exact setpoint needed After the setpoint switch is released the display will return to pressure data after two seconds At this time the new setpoint will be deposited in non volatile memory If the ion gauge is OFF PC relays 1 and 2 will deactivate Consult the user s manual for the host computer to be sure the protocol used is in accord with that established via the switch configuration you have chosen for the controller RS 232 module Communication with the controller VGC is via ASCII strings A message to the controller consists of a command and a command modifier followed by a terminator The message may contain leading spaces and the command and modifier may optionally be separated b
67. in connector for process control relay 11 Collector connector for Micro lon gauge contacts 5 Connector for analog output voltage from 12 Connector for analog output voltage from Convectron or Capacitance Manometer gauge B Convectron gauge A 6 DA15P connector for Dual Convectron or 13 Fuse holder Capacitance Manometer gauge cable 7 Connector for analog output voltage from Micro lon gauge Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 17 Chapter 2 2 2 RS 232 Specifications Figure 2 6 RS 232 Wiring Connector RS232 43 5 DE 13 lire DB 258S connector Table 2 1 RS 232 Specifications 1 or 2 8 character bits plus parity allows only 1 stop bit Handshake Outputs DTR RTS RTS polarity selectable Inputs DSR CTS DCD May be forced to logic TRUE with switches Logic levels Inputs Logic 1 2 0 Vdc minimum 15 Vdc maximum logic 0 15 Vdc minimum 0 75 VDC maximum Input Current 4 0 mA max Vin 15 Vdc 4 0 mA max Vin 15 Vdc 18 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 System Components 2 3 RS 485 Specifications Figure 2 7 RS 485 Wiring Connector RS485 42 1 J1 DE9P Pare e Connector for 5 9 ea RS 485 422 e e J1 computer interface e e e a B 2 Address dial e Jee R e e E 3 J 2 DE9P J2 Connector for CES TE RS 485 422 computer interface a lt o 2 3 o 3 D E e 3 a
68. in unchanged during measurement Therefore never attempt meaningful measurements immediately after turning on the Micro lon Gauge or immediately after degassing the gauge Permit sufficient time for the environmental parameters to stabilize Table 6 1 Convectron Gauge Display Formats Display Format scientific P floating point scientific LES The Micro lon Gauge can be turned ON or OFF by the front panel GAUGE momentary rocker switch or by the remote input the Convectron Gauge set point or the computer interface command 1 Torr gt 1 Torr lt 1 mbar scientific gt 1 mbar gt 999 mbar p 7 scientific scientific scientific p scientific lt 1 pascal gt 1 pascal gt 999 pascal To turn ON the Micro lon Gauge from the front panel press the GAUGE momentary rocker switch See Figure 6 2 To turn it OFF press the GAUGE rocker switch again After a 3 second delay the Micro lon Gauge pressure will be displayed The EB electron bombardment degas may be turned ON or OFF by the front panel DEGAS momentary rocker switch see Figure 6 2 or the remote input To turn degas ON press the DEGAS momentary rocker switch To turn it OFF press the DEGAS momentary rocker switch again Degas automatically turns OFF and returns to normal emission in 2 minutes Degas ON indication is by the degas LED adjacent to the DEGAS rocker switch on the front panel see Figure 6 2 Degas cannot be activated unless the
69. ing See Figure 3 12 on page 39 No response or garbled output Baud rate incorrect Character length incorrect or stop bit s incorrect Bad cable OVERRUN ERROR message Stop bit s incorrect host software failure SYNTAX ERROR message Message to controller not in accord with specified syntax or failure to assert DCD handshake line Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 113 Chapter 8 8 11 RS 485 Troubleshooting The first thing to do if trouble arises is check the following configuration options 1 Check switching settings Be sure the baud rate character format and framing and interface protocol are matched to your host computer or terminal s requirements Note that there may be several mismatched parameters 2 Check the command format Be sure the strings you output to the controller are in accord with the syntax defined in Preparing to Use RS 485 Computer Interface on page 90 Table 8 6 RS 485 Troubleshooting Guide Symptom Possible Cause LL Cause Ep reset LED CRI lit or i failure flashing No response or garbled output Baud rate incorrect Character length incorrect or stop bit s incorrect Bad cable Responds intermittently Poor cable connections ground fluctuations the maximum common mode potential across the system is 7V and EMI from other sources The terminating resistor circuit is not installed or is improperly installed If the start ch
70. installed in your unit 2 Even if the control logic is simple and obvious we recommend that you develop a logic diagram of the process control function 3 Prepare a specification table which lists the proposed pressure setting system measurement point and relay status for each process control channel EJ p ce DD 2 z 4 Draw a circuit schematic which specifies exactly how each piece of system hardware will be connected to the process control relays Do not exceed the relay ratings Table 3 2 Relay Ratings Relay Configuration SPDT single pole double throw Relay Contact Rating 5 A 120 VAG or 4A 240 VAC or 5A 30 Vdc Relay Contact Type 1 Form C type gold plated for low level switching Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 33 Chapter 3 If the relay contacts are used to switch high currents the gold plating may be consumed This may make the contacts unsuitable for low level signal switching in the future 5 Attach a copy of the process control circuit diagram to this manual for future reference and troubleshooting 6 Therequired process control connections may be made later See Connecting Process Control Relays on page 63 7 If application assistance is desired contact a Brooks Automation Inc Granville Phillips application engineer Figure 3 8 2 Channel Process Control Option Card Channel 1 and Channel 2 are assigned to the Micro lon gauge
71. ions 2 3 RS 485 Specifications 2 4 Specific ti ns es 28 pu ce do beste de REE deb 2 5 DIMENSIONS z edusti ea na e Y ger odo Ne es 2 6 Mounting Options Chapter 3 Iii setup sua ssn os Desc rait A es gd 3 1 ControllerSetup actore th Re Dre kem ees 3 2 Top Cover Removal 3 3 Pressure Units Setup 25 5 2 fes eh phe ea Er 3 4 Changing Units of Measure for Electrometer Module 3 5 Overpressure Shutdown Adjustment 3 6 Changing Display Update Rate on Electrometer Module 3 7 Changing Units of Measure for Convectron Gauge 3 8 Display Update Rate Switch on Convectron Module 3 9 Changing Units of Measure for a Capacitance Manometer 3 10 Process Control Setup 3 11 Relay Polarity Setting 3 12 RS 232 Computer Interface Setup 3 13 RS 485 Computer Interface Setup 3 14 Replacing the Controller Cover 10 11 11 11 11 12 17 18 19 23 25 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Table of Contents Chapter 4 Installation deep RE ues NEU d ROS Pete d 49 4 1 Gauge Installation Tips 49 4 2 FCC and EU Installation Requirements 49 4 3 Cable Installation
72. is found in the incoming message the following messages will be returned in place of the normal response OVERRUN ERROR Returned if the incoming message overflows the controller s buffer This may indicate a flaw in the host software PARITY ERROR Returned if the parity of a byte in the incoming message does not match that programmed by the switches SYNTAX ERROR Returned if the message fails to parse as a valid controller command Could also result from failure to assert DCD during transmission to the controller Consult the user s manual for the host computer to be sure the protocol used is in accord with that established via the switch configuration you have chosen for the RS 485 module Communication is via ASCII strings A message to consists of a start character an address a command and a command modifier followed by a terminator The message may contain leading spaces and the command and modifier may optionally be separated by spaces or commas No spaces may appear within the command or the modifier only between them The address expected is programmed via the switch settings on the rear of the module and the internal switches The syntax is AA where AA is an ASCII representation of the hex address of the VGC The terminator expected is an ASCII carriage return denoted here by CR Note that the terminator is sometimes appended automatically by the host computer s interface software to the message string
73. ity It is activated by setting to the ON position The data displayed will depend on the state of the Micro lon Gauge tube If the Micro lon Gauge is OFF setting the switch ON displays the Micro lon Gauge sensitivity in the display This will be in scientific notation If the Micro lon Gauge is ON the switch has no effect and pressure will be displayed NOTE Do NOT leave the calibration switch in the ON position after viewing the sensitivity otherwise the displayed reading might be mistaken for the actual pressure reading The emission range switch selects between three emission ranges 20 microamperes MV 1 milliampere HV or 4 milliamperes UHV 98 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Operation In general higher emissions are used at lower pressures If you are measuring very low pressures the 4 mA range is best Lower emissions will increase tube life The overpressure shutdown point will change inversely proportional to the emission range See Table 3 1 on page 30 Sensitivity Adjustment The sensitivity adjustment see Figure 6 3 on the electrometer module is used to match gauges of different sensitivities The Calibration switch on the electrometer module must be ON with the Micro lon Gauge OFF to view sensitivity during the adjustment The controller is preset for a tube sensitivity of 20 Torr which is typical for the Micro lon Gauge The approximate range of the adjustmen
74. l allowing control of the Micro lon gauge and degas The function of the front panel keys is reproduced by either a contact closure or an asserted low 0V logic state on these inputs This low state must be held continuously at lt 0 4V 10pA LOW for at least 25 milliseconds After this the input must be allowed to pull high to 23 5 V HIGH for at least 105 milliseconds before another low will be accepted These inputs have passive pull ups to 5 V internal supply A single pole double throw relay is provided to indicate Micro lon gauge status normally open contact is open when the Micro lon gauge is OFF 68 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Preparing for Operation Figure 5 3 Input Output Wiring Connector See Figure 2 5 Item 10 Table 5 1 Remote Input Output Pin Functions mee rnn meme uem o Lo LE s ooo Eo wem po je po pee po pee Gauge Status Common Es n Gauge Status N O Normally Open Gauge Status N C Normally Closed Active low inputs 5 4 Micro lon Analog Output A signal voltage proportional to the logarithm of the Micro lon pressure Signal indication is provided on the back of the electrometer module via a standard 1 8 in miniature phono jack Figure 5 4 Electrometer Analog Output Jack ANALOG xi Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 69 5 1 E D EJ ec gc 1 Sd
75. l buses and memory hardware The microcontroller is equipped with a watchdog timer which automatically generates a reset if the processor fails to fulfill timing checkpoints within its code Interprocessor communication is accomplished via the display bus These lines carry BCD format pressure data that is used to generate the controller display Within the capacitance manometer a diaphragm is distorted by the pressure of the gas in the system under measurement This diaphragm forms part of a capacitor and its deflection causes changes in capacitance Thus the electrically measured capacitance is a measure of pressure The device is very sensitive to the elastic properties of the metal of the diaphragm For this reason large pressure excursions such as occur when the system is raised to atmospheric pressure can cause offsets to the pressure reading The diaphragm is also extremely sensitive to temperature effects and although it may be held in a temperature controlled chamber this temperature control is never perfect resulting in further perturbations to the devices theoretical accuracy Note that these perturbations are inherent in the capacitance manometer design and are not a property of the electronic module used to operate the transducer Capacitance manometers are capable of exceptional accuracy and read pressure independent of gas type but are also subject to zero point drift and must be calibrated at vacuum frequently if hi
76. le if the setpoint is programmed to 6 6 x 1079 Torr the relay will activate at 6 5 x 10 Torr on falling pressure and will deactivate when the pressure rises to 6 6 x 10 0 7 x 106 0 1 x 10 or 7 4 x 10 Torr Since the process control and computer interface modules derive their pressure data directly from the display bus they will be unable to update their pressure data while setpoints are being displayed They will not mistakenly interpret setpoint data as pressure data but will simply retain the last displayed pressure data until the SET key is released The 3 position switches on the front of the process control module allow override of the programmed setpoints at any time When moved to the right the relay is activated When moved to the left the relay is deactivated When left in the center position the relay is controlled automatically Figure 5 16 Process Control Module Front Panel Setpoint Manual Override Switches Procdss Control Off SP On Up Set Button m Down Set Button Aa XXXI u Selector s Switch on di 5 To Display a Setpoint 1 Be sure the CAL switch of the electrometer module is in its OFF position or the calibration data in display line 1 will conflict with the display of setpoints 1 and 2 2 Setselector switch 1 to the number of the channel you wish to display 3 Press the setpoint display set button either the Up or Down button and release The setpoint w
77. lon Controller Instruction Manual 358013 Rev 09 Preparing for Operation Initial Transducer Calibration Set The Controller Zero Initial Controller Setup Zero the Controller with the Transducer 5 12 Preparing for Process Control Operation Setpoint Display and Adjustment When first installed the transducer zero adjust should be set using a voltmeter to read Zero when at a system pressure below the minimum pressure range of the transducer Refer to the documentation accompanying your capacitance manometer transducer for instructions on this procedure You should also at this time adjust the VAC on the 358 controller with the gauge not attached to the controller per the instructions below After this initial setup has been performed the routine fine tuning of the transducer zero can be performed with the module front panel VAC zero adjust potentiometer The zero can be adjusted to 0 200 mV 1 Disconnectthe capacitance manometer cable either at the gauge head or at the controller 2 Adjust the vacuum potentiometer Figure 5 15 until the third display line shows a single 0 If the adjustment is turned too far a minus sign will appear in the display This proper calibration is achieved when only the 0 appears 1 Besure the transducer was zeroed properly on initial installation see your transducer documentation Connect the cable from the 358 Controller to the capacitance manometer transducer 2 Evacuate
78. m line per transmit data until the RS 232 standard message just received has been parsed and a reply has been output De asserted after transmitting the terminator of controller s response to that message If your Controller does not have this capability skip to Replacing the Controller Cover on page 47 RS 485 capability permits data output to and gauge control by a host computer Output is by a command response mechanism If you have this module in your unit configure it to your system requirements by setting the switches as instructed in Selecting Byte Format for RS 485 Module on page 46 A variety of baud rates and byte framing options are available as well as switches to force the handshake lines to an always true condition The controller RS 485 factory defaults are 19 2Kbd 8 character bits no parity 1 stop bit address 01 Internal switches are read upon controller power up Changes in settings will take effect upon next power up cycle Connectors J1 and J2 on the rear panel are wired in parallel and are interchangeable Connection can easily be made by daisy chaining gauge Controllers together with the signal from the host computer going into one connector then out the other to another gauge Controller and so on The maximum total cable length is 4 000 ft No more than 32 devices can be connected to one RS 485 communications line When an RS 485 network is in an idle state all nodes are in lis
79. n EJ a a D 2 5 Voltage shunted Sga orior Voltage unshunted 4 If the voltage calculation in Step 3 is less than 0 83 due to the placement of the shunt it complicates the measurement The commonality of the grounds may be satisfactory and the coupling poor or the commonality could be poor Your electrician should be asked to check the electrical continuity between these two ground systems Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 57 Chapter 4 NOTE The placement of a second ground wire dashed line in Figure 4 3 between the vacuum chamber and the controller chassis is not a safe grounding procedure Large currents could flow through it Figure 4 3 System Grounding Do NOT Make a Direct Chassis to Vacuum System Connection 358 Vacuum Gauge Controller Vacuum System Power Distribution an Breaker Box if KE NOTE Other Power Leads Are Not Shown fe CE Power Common or Install a High Current Capac E Safety Ground eed kon S Earth Ground one the Controller Chassis to Lg ANG 2 05 mima Earth Ground Minimum Size 12 AWG 2 05 mm Min Grounding Connections on gauges 58 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Installation 4 12 Connecting Analog Outputs Electrometer Module This voltage is propo
80. n I O connector Connect the shield to ground at your equipment Failure to install the controller as described above can result in failure of the controller to the requirements for radiated emissions and susceptibility 3 a 2 S a 5 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 49 Chapter 4 4 3 4 4 4 5 Cable Installation Environmental Conditions Controller Installation It is intended that all wiring either to or from the controller whether supplied by Brooks Automation Inc or not be installed in accordance with the safety requirements of NEC NFPA 70 Cables provided by Brooks Automation for connection to sensors or transducers is at a minimum designed for use as appliance wiring material UL category AVLV2 and is constructed of appropriate material and dimensions for the voltages and currents provided by the controller It is emphasized that it is the user s responsibility to install cables to from the controller whether provided by Brooks Automation Inc or not in accordance with the applicable local state and national safety requirements Raceway and or conduit may be needed for certain installations Indoor Use Altitude up to 2000 meters Temperature 0 C to 50 C Maximum relative humidity 80 for temperatures up to 31 C decreasing linearly to 50 relative humidity at 50 C Transient overvoltages according to installation category overvoltage
81. ntroller will receive all that character will be characters sent to it as long ignored by controller as RTS is in de asserted state Invert RTS Switch for As shipped from the factory the request to send RTS control line is set to RS 232 Module operate as a modem line per the RS 232 standard In some implementations it is necessary to invert this line and hook it directly to the clear to send CTS line of the host computer Switching S2 to OFF tells the RS 232 interface to invert the polarity of the RTS line when the controller goes through its power up sequence See Connecting the RS 232 Computer Interface Handshake Lines on page 65 for more details When the controller receives a start bit on the received data line it will input and buffer a character The controller will continue to receive and buffer characters until the terminator LF is received EJ a a 2 5 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 41 Chapter 3 Table 3 10 RS 232 Controller Outputs RS 485 Computer Interface Setup Connector Pinouts for RS 485 Computer Interface REQUEST TO SEND INVERT RTS When OFF De asserted by controller on inverts the polarity of the power up Asserted by RTS line allowing controller upon receipt of a nonstandard connection message terminator as a directly to host computer holdoff to prevent the host CTS line When ON set to computer from attempting to operate as a mode
82. ol 32 relay polarity 35 removing top cover 27 replacing controller top cover 47 RS 232 protocol 37 RS 485 protocol 42 Specifications capacitance manometer 23 controller 20 controller options 21 Convectron gauge 22 Micro lon gauge 21 Micro lon gauge pressure range 22 Micro lon system 20 RS 232 protocol 18 RS 485 protocol 19 System components computer interface module options 17 process control relay options 17 T Theory of operation capacitance manometer 103 Convectron gauge 102 Micro lon gauge 101 process control 103 Troubleshooting Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 119 120 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Series 358 Granville Phillips Series 358 Micro lon Vacuum Gauge Controller C RE EM ll GN RS SEM ll GN a BROOKS AUTOMATION 6450 Dry Creek Parkway Longmont CO 80503 USA Phone 1 303 652 4400 15 Elizabeth Drive Chelmsford MA 01824 USA Phone 1 978 262 2400 Worldwide Customer Service Support 24 7 Phone 1 800 367 4887 To obtain a copy of this instruction manual online visit our website at www brooks com Adobe Reader version 5 0 or higher required 2007 2008 Brooks Automation Inc Instruction Manual Instruction manual part number 358013 Revision 09 June 2008
83. on Gauge then the Convectron Gauge may be used to automatically turn ON the Micro lon Gauge Convectron Gauge A can turn ON the Micro lon Gauge Micro lon Gauge automatic turn on occurs when the Convectron Gauge pressure drops below the auto turn on setpoint defined by the auto turn on setting The Micro lon Gauge will also be turned OFF automatically when the pressure rises slightly above the auto turn on setpoint if the electrometer overpressure setpoint does not trip first The automatic ON OFF function will execute only once per setpoint crossing For example if the Micro lon Gauge is turned OFF manually when below the setpoint the auto on function will not turn it back ON until the Convectron Gauge pressure has risen above the setpoint and then dropped below it again 1 Place the IG Auto switch Figure 5 12 on the ConvectronGauge module in the set position The Convectron pressure should at a higher pressure than the setpoint pressure when setting the Turn ON setpoint 2 The existing turn ON pressure is displayed on the A display Set the desired turn ON pressure with the auto set adjustment 4 To deactivate this capability place the IG AUTO switch in the OFF position NOTE Do not leave the IG AUTO switch in the set position as this prevents pressure from being displayed 80 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Preparing for Operation P 3 2 Figure 5 12 IG Auto Switch for Convec
84. proceed as follows 1 Turn OFF power to the Controller 2 Remove the top cover as described in Top Cover Removal on page 27 3 Locatethe Capacitance Manometer gauge module See Figure 2 4 and Figure 3 6 Figure 3 6 Capacitance Manometer Gauge Module Top View E pascal 5 mbar slow update z HL P 6V EN 2 I Ww 5 z fi 5 Ot o ua i gulug oc E 200 N ul 2a ju ui 5 gt 50 Oc DLLD s enr wow TOOL Ir r35 Ora EEEE X E uad on 2222 w u E 02 gz E Sooo 245 9 Zoo oor l do 8888 9 2u 3 982 88 r so 2293 32 33 Units of measure switch lt c z2 2222 2 18S ON and OFF positions 2 996 ozoz 72 Y 2anz OOOO o E o oo So 23 amp 4 Locate the mbar and pascal units switches 5 Leave both switches OFF for Torr units Turn ON the switch for either Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 31 Chapter 3 3 10 Process Control Setup Process Control Channel Identification Windows mbar or pascal units Modify the units of measure of the electrometer module to be consistent with the Capcitance Manometer gauge See Changing Units of Measure for Electrometer Module on page 28 Slip the label card out of the top of the front panel and apply the appropriate pressure units label see Figure 3 4 on page 29 Replace the top cover as described in Replacing the Controller Cover on page 47 CAUTION Failure to check system programming before switching to automa
85. quivalent N pressures will be displayed whenever power is applied if the gauges and cables are installed See Preparing for Convectron Gauge Operation on page 71 for information on Convectron gauge pressure measurement 3 The N equivalent pressure within the Micro lon Gauge will be displayed in the pressure units you have specified Torr mbar or pascal See Pressure Units Setup on page 28 to change pressure units Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 67 n GJ gt 2 eQ i gt a 3 Chapter 5 5 2 5 3 Alternate ON OFF Gauge Control Micro lon Gauge Remote Input Output The Micro lon Gauge can be turned ON and OFF in the following ways Use the front panel Micro lon Gauge momentary GAUGE ON OFF switch See Figure 5 2 Automatically via the Auto ON function of the Convectron gauge module See Filament Auto ON on page 80 Use the RS 232 or RS 485 Computer Interface modules See Command Syntax for RS 232 Computer Interface on page 88 or Command Syntax for RS 485 Computer Interface on page 91 The ON OFF toggle from the Remote Input Output Connector See Micro lon Gauge Remote Input Output on page 68 In addition the Micro lon Gauge will be automatically turned OFF by excessive pressure Figure 5 2 Micro lon Gauge Momentary ON OFF Switch DEGAS Two TTL compatible inputs are provided through the rear pane
86. ransient in the system a setpoint becomes corrupted this method will trap the error If a setpoint is found to contain garbled data which cannot be interpreted as a valid setpoint the setpoint presure will be set to 0 112 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Service 8 10 RS 232 Troubleshooting Because the RS 232 standard is found in an array of configurations the first thing to do if trouble arises is check the following configuration options 1 Check switch settings Be sure the baud rate character format and framing and interface protocol are matched to your host computer or terminal s requirements Note that there may be several mismatched parameters Check to see if your computer requires the reversed polarity RTS convention 2 Checkthe interface wiring The pin designations for the RS 232 connector are listed in Table 3 5 on page 38 Note that the received and transmitted data lines are defined as seen by the controller Many companies supply null modems or switch boxes for the purpose of reconfiguring the control and communications lines for particular applications 3 Check the command format Be sure the strings you output to the controller are in accord with the syntax defined in Preparing to use RS 232 Computer Interface on page 87 Table 8 5 RS 232 Troubleshooting Guide Symptom S Possible Cause LL Cause FEE reset LED lit or uu n failure flash
87. rding to installation category overvoltage category II Pollution degree 2 in accordance with IEC 664 0 C to 40 C ambient noncondensing 0 02 mA MV 1 mA HV 4 mA UHV Measurement limits are determined by the controller emission current setting and X ray limit of the gauge 20 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 System Components Table 2 3 Specifications Controller Options Process Control Relay Configuration SPDT Form C Contact Rating 5A 120 VAC 4A 240 VAC resistive or 5A 30 Vdc Channels 6 maximum 2 per operating gauge maximum Hysteresis 10 Setpoint adjustment Digital 2 significant digits plus exponent Digital Interfaces RS 232 or RS 485 422 Dual Convectron Gauge Pressure Range 999 to 1 x 107 Torr for N or air Display Units Torr mbar pascal user selectable Maximum Cable Length 150 m 500 ft Analog Output 0 to 7 V logarithmic 1 V decade adjustable offset of 1 to 7 Vdc Display Resolution 2 significant digits except for lowest two decades Weight 0 1 kg 4 oz with 1 5 16 in Conflat type flange sjuauodwo waysis Tungsten filaments are for applications involving gases containing fluorine chlorine or other gas species that poison yttria coated iridium filaments Tungsten filaments are not recommended for general vacuum applications because they may burnout when exposed to high pressures Series 358 Micro lon Controller Instruction Manual
88. ressure is too high or if the tube is disconnected If the tube is OFF or in its first few seconds of operation after being turned ON a pressure of 9 99E 9 will be returned 1G2 Identical to IG1 performs the same functions as 1G1 PCS Definition Display process control channel status Modifiers 1 or 2 or 3 or 4 or 5 or 6 or B or none Response Depends on modifier Single digit 1 through 6 response single ASCII digit O if the corresponding relay is inactive 1 if active See Example 1 B response a byte of data with bits 0 through 5 set clear according to whether the corresponding relay is active inactive Bit 6 will always be set to guarantee that the returned byte will not appear as a terminator byte See Example 2 None or Absent response will be a string of 6 ASCII zeroes and ones separated by commas giving the status of all six channels See Example 3 Examples Assume that channels 1 3 are active and 4 6 are inactive 1 From computer PCS 1 CRLF From controller 1CRLF Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 89 Chapter 5 5 14 9 15 RS 232 Error Messages Preparing to Use RS 485 Computer Interface 2 From computer PCS B CRLF From controller GCRLF Note that ASCII G corresponds to the bit pattern 01000111 and represents the status of the PC channels in bits 0 through 5 3 From computer PCS CRLF From controller 1 1 1 0 0 0 CRLF If an error
89. rough 6 are inoperative The status of relays 1 and 2 will not change during degas The controller pressure will remain at the reading when degas began Relay actuation occurs when the pressure indication differs from the setpoint value by one display unit A 10 hysteresis is automatically programmed into each setpoint for returning pressures Table 3 4 exemplifies this using a setpoint pressure of 6 3 x 107 and assuming the polarity is set for falling pressure activation 36 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Initial Setup Table 3 4 Setpoint Hysteresis Setpoint Pressure Pressure Change Relay Actuation Pressure 6 3 x 107 Falling 6 2 x 107 3 12 RS 232 Computer If your Controller does not have this capability skip to RS 485 Computer Interface Setup Interface Setup on page 42 This available capability permits data output to and gauge control by a host computer Output is either by a command response mechanism or by a talk only mode which is invoked via a switch on the RS 232 board If you have this module in your unit configure it to your system requirements by setting the switches as instructed in Selecting Byte Format for RS 232 Module on page 39 A variety of baud rates and byte framing options are available as well as switches to force the handshake lines to an always true condition Controller RS 232 factory defaults are 9600 BAUD 8 data bits no parity 1 stop bit DCD
90. rounding can cause product damage or personal injury Follow ground network requirements for the facility Maintain all exposed conductors at earth ground Connect the power cord to a properly grounded outlet Make sure the vacuum port to which the gauge is mounted is properly grounded Connect the gauge envelope to a facility ground If necessary use a ground lug on the flange bolt Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 55 EJ a a 2 5 Chapter 4 High voltage can couple through a gas to the internal electrodes of a gauge Do not touch the exposed pins on any gauge installed on a vacuum system where high voltage is present WARNING Touching the pins on the gauge in a high voltage environment can cause an electrical discharge through a gas or plasma resulting in property damage or personal injury due to electrical shock Vent the vacuum chamber to atmospheric pressure and shut OFF power to the controller before you touch the pins on the gauge 1 Connecta heavy duty ground wire 12 AWG or larger from the ground lug on the back of the Controller to your facility grounding electrode system see item 3 on Figure 2 5 on page 17 This will provide an earth ground for the Controller in the event the interconnect cables are not in place Do not connect the ground lug to the vacuum system or other component Connect it directly to the facility grounding system such as
91. rt pins 1 3 Convectron Gauge Test The small diameter sensor wire can be damaged by small voltages Do not Procedure perform electrical continuity tests with instruments applying in excess of 1 volt when the gauge is at vacuum or 5 V when at atmospheric pressure The Convectron gauge should show the following resistances pin numbers are embossed on the gauge connector Figure 8 1 Convectron Gauge Connector Pins 1 to 2 19 to 22 ohms Pins 2 to 3 50 to 60 ohms Pins 1 to 5 180 to 185 ohms If the resistance from pins 1 to 2 reads about 800 ohms the sensor wire in the gauge is broken Replace the gauge tube Note If the resistance values shown here are correct but you still think the gauge is not reading correctly the gold plating on the sensor wire may be eroded and the gauge will have to be replaced 110 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Service Cleaning Contaminated Convectron Gauges WARNING Exposure to fumes from solvents in an improperly ventilated area can cause personal injury To avoid personal injury from inhaling fumes from solvents such as trichloroethylene perchloroethylene toluene and acetone use these solvents only in a well ventilated area that exhausts to the outdoors WARNING Use of flammable solvents near open flame or energized electrical equipment can cause an explosion or fire To avoid product damage or personal injury due to
92. rtional to the logarithm of the pressure scaled to 1 V Analog Output Signal per decade with 0 V at 1 x 10711 Torr When the Micro lon gauge is turned OFF the output will switch to slightly over 10 V See Figure 5 5 on page 70 A standard 1 8 miniature phono jack connector is supplied Figure 4 4 Convectron Gauge Analog Output Connector INPUT 100 240 VAC 50 60 HZ 40 WATTS Convectron Gauge Analog If you have Convectron gauge capability installed signal voltages Output Signal proportional to the logarithm of the Convectron gauge display indications are provided on the back of the Convectron gauge module via a standard 1 8 miniature phono jack See Figure 4 4 Two mating connectors are supplied with this capability See Convectron Gauge Analog Output Signal on page 82 pertaining to the characteristics of these signals An analog output jack is provided on the rear panel This is a DC voltage proportional to the logarithm of the pressure scaled to 1 V per decade 0V 1x10 or less Torr or mbar 1 V 1 x 10 etc For pascal units the analog output will be scaled to 0 V 1 x 10 pascal Internal offset adjustments are provided that allow a shift in the analog output at 1 x 107 Torr away from 0 V to anywhere in the range 7 to 1 V This adjustment does not affect the slope of the analog output vs pressure curve Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 59 5 a a 2 TD Chapt
93. ruction Manual 358013 Rev 09 Preparing for Operation pressure vary widely from gas to gas because the thermal losses at higher pressures are greatly different for different gases n E D ec gc 1 Sd If you must measure the pressure of gases other than N or air use Figure 5 6 through Figure 5 11 to determine the maximum safe indicated pressure for the other gas as explained below Examples Maximum safe indicated pressure Assume a certain system will withstand an internal pressure of 2000 Torr or 38 7 psia For safety you want to limit the maximum internal pressure to 760 Torr during backfilling Assume you want to measure the pressure of Freon 22 In Figure 5 8 on page 76 locate 760 Torr on the left hand scale travel to the right to the intersection with the Freon 22 curve and then down to an indicated pressure of 11 Torr N equivalent Thus in this hypothetical situation the maximum safe indicated pressure for Freon 22 is 11 Torr For the sake of safety it is prudent to place a warning label on the instrument face which under the assumed conditions would read DO NOT EXCEED 11 TORR FOR FREON 22 If the Convectron gauge calibration is for a gas type other than N2 or air we suggest placing a label near the second and third lines of the display indicating the gas type or types used for calibration to prevent mix ups Indicated to true pressure conversion Assume yo
94. s other than G P Series 275 Convectron Gauges TI HHH ff tt Pressure units equivalence 10 1 um Hg 1 mTorr 1 x 10 Torr 1000 um Hg 1 Torr H _ cH 10 107 1 10 100 1000 Indicated Pressure Torr Nitrogen Equivalent Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 75 Chapter 5 Figure 5 8 True Pressure versus Indicated Pressure for Commonly used Gases 10 to 1000 Torr 1000 freon 22 Kr No air H O 2 100 H 6 EX o a 10 Ne o p Aa D S 2 Use this data only when the 1 Convectron Gauge axis is horizontal Do NOT use this data with any transducers other than G P Series 275 Convectron Gauges t tt t TE EEA EE j Pressure units equivalence 10 1 um Hg 1 mTorr 1 x 10 Torr j Hi 1000 um Hg 1 Torr i EN HE 10 107 1 10 100 1000 Indicated Pressure Torr Nitrogen Equivalent 76 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Preparing for Operation Figure 5 9 True Pressure versus Indicated Pressure for Commonly used Gases 107 to 107 mbar
95. s steel and nickel gaskets or 1 4 turn past finger tight for copper and aluminum gaskets NWT10KF NW16KF NW25KF and NW40KF Flange Mount The KF mounting system requires an O ring and centering ring to be placed between the mating flanges The flanges are then held together with the aluminum flange clamp by tightening the wing nut Maximum pressure for this style mounting system is 1000 Torr absolute ConFlat Flange Mount To minimize possibility of leaks with ConFlat flanges use high strength stainless steel bolts and a new clean OFHC copper gasket Avoid scratching the seal surfaces To avoid contamination do not use nonmetal gaskets After finger tightening all bolts continue tightening about 1 8 turn in crisscross order e g 1 4 2 5 3 6 4 until flanges are in contact After contact further tighten each bolt about 1 16 turn 54 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Installation Figure 4 2 Convectron Gauge Installation 4 11 Grounding the System x When high voltages are used within the vacuum system and the gauge envelope is not reliably grounded through its vacuum connection either a separate ground wire must be added or the envelope must be shielded to positively prevent human contact The gauge envelope may be grounded byusing a metal hose clamp on the gauge connected by a 12 awg copper wire to the grounded vacuum chamber See Figure 4 3 WARNING Improper g
96. sary and only when wearing a ground strap Do not use an ohmmeter for troubleshooting MOS circuits Rely on voltage measurements Use a grounded electrostatic discharge safe soldering iron This product was designed and tested to offer reasonably safe service provided it is installed operated and serviced in strict accordance with these safety instructions WARNING Substitution or modifying parts can result in product damage or personal injury due to electrical shock or fire Install only those replacement parts that are specified by Granville Phillips Do not install substitute parts or perform any unauthorized modification to the controller Do not use the controller if unauthorized modifications have been made Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 105 Chapter 8 8 2 8 3 8 4 Customer service Damage Requiring Service Returning a Damaged Product For customer service Phone 1 303 652 4400 or 1 800 776 6543 within the USA Phone 1 800 367 4887 24 hours per day 7 days per week within the USA Email co csr amp brooks com For Global Customer Support go to www brooks com click on Contact Us then click on Global Offices to locate the Brooks Automation office nearest you Disconnect this product from the power source and refer servicing to qualified service personnel if any the following conditions exist A gauge cable or plug is damag
97. supplied by the user If extra characters are found in the message after it has been successfully interpreted but before the terminator they will be ignored All messages will receive a reply consisting of an ASCII string terminated with CR Numbers will be returned in the format X XXExXX Messages may use upper or lower case alpha characters The VGC will always respond with upper case characters 90 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Preparing for Operation P S El Command Syntax for S RS 485 Computer S Interface E DG Definition Turn degas ON or OFF H Modifiers ON or OFF Response OK if command accepted or INVALID if rejected Example From computer AADG ON CR From controller OKCR e Command is INVALID if the lon gauge is OFF A response to the DG ON command of OK indicates only that a signal requesting degas has been sent to the electrometer Degas may fail to activate e g if the pressure is above 5 x 10 Torr Use the DGS command see below to verify that degas has been successfully initiated DGS Definition Display degas status Modifiers None Response ASCII 1 if degas is ON 0 if degas is OFF Example From computer AADGSCR Spaces may be omitted From controller 1CR Indicating degas is ON DS Definition Display pressure reading Modifiers IG or CG1 or CG2 Response ASCII string representing the pressure for the selected gauge Example From computer
98. t is 3 to 50 Torr Relative Gas Sensitivities Sensitivity depends on the gas being measured as well as the type of Micro lon Gauge tube Table 6 2 on page 99 lists the relative gauge sensitivities for common gases These values are from NASA Technical Note TND 5285 Micro lon Gauge Sensitivities as Reported in the Literature by Robert L Summers Lewis Research Center National Aeronautics and Space Administration Refer to this technical note for further definition of these average values and for the gauge sensitivities of other gases uone1ad0 To adjust the controller to direct reading for gases other than air or N during Micro lon Gauge operation calculate the sensitivity K for gas type x as follows K R KN Where KN is the gauge sensitivity for N and R is found from Table 6 2 on page 99 Table 6 2 Relative Gas Sensitivities Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 99 Chapter 6 6 6 Filament Selection for The Filament Select switch see Figure 6 4 is used to operate each filament Electrometer Module individually or both in series Normally only one filament should be selected During degas selecting the BOTH position will clean up the tube more satisfactorily allowing for a lower ultimate pressure reading Figure 6 4 Filament Select Switch Qu FILAMENT SELECT 100 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 7 1 Micro lon Gau
99. ten receive mode Under this condition there are no active drivers on the network To maintain the proper idle voltage state bias resistors must be applied to force the data lines to the idle condition Figure 3 16 illustrates the placement of bias resistors on a host computer 2 wire configuration for the typical 5 volt and 24 volt systems 42 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Initial Setup Figure 3 13 RS 485 Bias Resistors 5 volts 24 volts Host 4JkQ Host 23k Q Computer Computer B B e 5 9k Q A m A ns 4 7kQ 4 7kQ Figure 3 14 RS 485 Wiring Connector Host Computer RS 485 Option Card RS 485 Connector 41 or J2 Connector E Table 3 11 RS 485 Connector Pins EJ a a 2 5 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 43 Chapter 3 Connect TX on the gauge Controller to RX on the host computer and connect RX on the gauge Controller to TX on the host computer Connect TX to TX and RX to RX on all controllers If the computer sends and receives data on 2 wires connect TX to RX and connect TX to RX The polarity may have to be reversed on the computer and other instruments you may have to try it both ways No damage will result if connections are wrong The timing of the data transfer is shown in Figure 3 15 Figure 3 15 RS 485 Data Timing RX Data Data
100. th a Convectron Gauge calibrated for N to measure the pressure of gases other than N and air you must use the conversion curves specifically for the Convectron Gauge to translate between indicated pressure and true pressure Do not use other data Never use conversion curves for the Convectron Gauge with gauges of other manufacturers Their geometry is very likely different and dangerously high pressures may be produced even at relatively low pressure indications Also you must ensure that the atmosphere adjustments for Convectron Gauges A and B are correctly set See Gauge Zero and Atmospheric Pressure Adjustment on page 81 Figure 5 6 through Figure 5 11 show the true pressure verses indicated pressure for eleven commonly used gases The following list will help to locate the proper graph Table 5 2 True Pressure vs Indicated N Pressure Figure 5 6 on page 74 All Figure 5 9 on page 77 107 to 107 mbar All Figure 5 10 on page 78 107 to 1000 mbar Ar CO CH Freon 12 He Figure 5 11 on page 79 107 to 1000 mbar D Freon 22 Kr He O Note that 1 mbar 100 pascal so the mbar charts may be used for pascal units by multiplying the values on the axes by 100 A useful interpretation of these curves is for example that at a true pressure of 2 x 10 Torr of CH the heat loss from the sensor is the same as at a true pressure of 3 x 10 of Np See Figure 5 6 on page 74 The curves at higher 72 Series 358 Micro lon Controller Inst
101. th nitrogen or air Sensitivities for other gases are given in Relative Gas Sensitivities on page 99 The Micro lon Gauge Controller varies the heating current to the filament to maintain a constant electron emission and measures the ion current to the collector The pressure is then calculated from these data Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 101 DD 3 i cs 1 S i 2 Chapter 7 1 2 Convectron Gauge Theory of Operation The Convectron Gauge transducer is represented in Figure 7 2 as R1 R2 R3 and R4 These four resistances form the legs of a bridge circuit with R1 designating the sensor wire of the transducer R2 is a resistive network in the tube that compensates for changes in the ambient temperature At bridge null R1 R2xR3 R4 If there are no changes in ambient temperature the value of R1 is a constant and the bridge is balanced Figure 7 2 Convectron Gauge Schematic CONVECTRON SV NULL GAUGE bo NS TRANSDUCER a AMP B BRIDGE R L R CONTROL el M Ver v As the vacuum system pressure is decreased there are fewer molecules in the system to conduct the heat away from the sensor wire causing the temperature and resistance of R1 to increase The increased resistance of R1 causes the bridge to unbalance and a voltage is developed across the null terminals The bri
102. tic operation can cause measurement error To avoid measurement error due to inaccurate output signals carefully check the system programming before switching to automatic operation WARNING Failure to install appropriate pressure relief devices for high pressure applications can cause product damage or personal injury For automatic backfilling and other applications in which malfunction or normal process conditions can cause high pressures to occur install appropriate pressure relief devices A process control module provides the controller with single pole double throw relays that may be controlled either by digital setpoints or by the built in manual override switches A channel identification label is included in the accessory kit to enable you to customize your controller for your application see Figure 3 7 32 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Initial Setup Figure 3 7 Process Control Identification Windows 358 MICRO ION Controller Developing a Logic Prior to connecting the process controls to the system it is recommended Diagram of Control Logic that the following steps be followed If application assistance is desired contact a Brooks Automation Inc Granville Phillips application engineer 1 Use the catalog number on the front of the process control module together with Figure 3 8 and Figure 3 9 to identify the process control capability
103. tions can cause product damage or personal injury For automatic backfilling and other applications in which malfunction or normal process conditions can cause high pressures to occur install appropriate pressure relief devices 41 Gauge Installation Tips For best results locate pressure gauges close to the point where pressure needs to be measured Gas sources long tubulation or other constrictions can cause large errors in indication Note that if placed near the pump the pressure in the gauge may be considerably lower than in the rest of the system If placed near a gas inlet or source of contamination the pressure in the gauge may be much higher See Section 4 9 on page 53 for detailed gauge mounting instructions To minimize temperature effects locate pressure gauges away from internal and external heat sources in a region where the ambient temperature is reasonably constant Parts of the gauge can get quite hot during degassing especially if there is poor ventilation This will not damage the gauge However care should be taken to prevent low temperature rated materials such as plastic wire insulation from touching hot parts of the gauge 4 2 FCC and EU Installation To maintain compliance with FCC Part 15 rules and European Union s Requirements electromagnetic interference EMI directives install shielded cable with a braided shield and metal or metallized plastic backshells that connect directly to the cable shield at the 15 pi
104. tron Gauge S S Convectron 2 IG Auto m D 2 a e IG AUTO A Gam Switch e vac Convectron Gauge A amp B ATM atmosphere and VAC vacuum adjustment potentiometers B am y d vac 5 9 Gauge Zero and Atmospheric Pressure Adjustment WARNING Failure to use accurate pressure conversion data for N or air to other gases can cause an explosion due to overpressurization If the controller will measure any gas other than N or air before connecting the controller to system control devices adjust pressure outputs for the process gas that will be used Each Convectron gauge is individually computer calibrated for N Adjustment of the zero should not be necessary unless readout accuracy is required below 1 x 10 Torr Adjustment of the atmospheric indication should not be necessary unless compensating for long cables or variations in mounting orientation The Convectron gauge has a stable temperature compensated design and each Controller is also calibrated to provide accurate readout of N2 pressure with any gauge when properly installed with the gauge axis horizontal 1 Evacuate Convectron gauge A to a pressure known to be less than 1 x 107 Torr 2 With power ON and at vacuum less than 1 x 107 Torr for at least 15 minutes adjust VAC for gauge A see Figure 5 12 until display A indicates 0 0 0 Torr mbar or 0 0 0 pascal not 1 0 4 1 0 2 or 0 0 0 3 Letthe pressure in the gauge increase to the local
105. u wantto determine the true pressure of helium in a system when the Convectron Gauge is indicating 10 Torr In Figure 5 7 on page 75 read up from 10 Torr N equivalent indicated pressure to the Helium curve and then horizontally to the left to a true pressure of 4 5 Torr Thus 4 5 Torr Helium pressure produces an indication of 10 Torr N equivalent True to indicated pressure conversion Assume you want to set a process control setpoint at a true pressure of 20 Torr of CO In Figure 5 7 on page 75 locate 20 Torr on the true pressure scale travel horizontally to the right to the CO curve and then down to an indicated pressure of 6 4 Torr N equivalent Thus the correct process control setting for 20 Torr of CO is 6 4 Torr N equivalent True to indicated pressure conversion Assume you want to obtain a helium pressure of 100 Torr in the system In Figure 5 7 on page 75 locate 100 Torr on the left hand scale travel horizontally to the right to attempt to intersect the He curve Because the intersection is off scale it is apparent that this true pressure measurement requirement for helium exceeds the capability of the instrument For gases other than those listed the user must provide accurate conversion data for safe operation The Convectron gauge is not intended for use above approximately 1000 Torr true pressure Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 73 Chapter 5 Figure 5 6 True Pressur
106. unsafe practice Caution and warning statements comply with American Institute of Standards Z535 1 2002 through Z535 5 2002 which set forth voluntary practices regarding the content and appearance of safety signs symbols and labels Each caution or warning statement explains a The specific hazard that you must prevent or unsafe practice that you must avoid b The potential result of your failure to prevent the specified hazard or avoid the unsafe practice and c What you must do to prevent the specified hazardous result You must comply with all instructions while you are installing operating or maintaining the module Failure to comply with the instructions violates standards of design manufacture and intended use of the module Brooks Automation Inc Granville Phillips disclaim all liability for the customer s failure to comply with the instructions Read instructions Read all instructions before installing or operating the product Retain instructions Retain the instructions for future reference Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 wo o lt wo 3 Chapter 1 1 3 Damage Requiring Service Follow instructions Follow all installation operating and maintenance instructions Heed warnings and cautions Adhere to all warnings and caution statements on the product and in these instructions Parts and accessories
107. uum system can safely withstand In addition install suitable pressure relief valves or rupture disks that will release pressure at a level considerably below that pressure which the system can safely withstand Suppliers of pressure relief valves and pressure relief disks are listed in the Thomas Register under Valves Relief and Discs Rupture Confirm that these safety devices are properly installed before installing the product In addition check that 1 the proper gas cylinders are installed 2 gas cylinder valve positions are correct on manual systems and 3 the automation is correct on automated systems Vacuum gauges with compression fittings may be forcefully ejected if the vacuum system is pressurized Convectron Gauges are thermal conductivity gauges of the Pirani type These gauges transduce gas pressure by measuring the heat loss from a heated sensor wire maintained at constant temperature For different gases the heat loss is different at any given true pressure and thus the pressure indication can be very different It is important to understand that the indicated pressure of a Convectron gauge depends on the type of gas the orientation of the gauge axis and on the gas density in the gauge Convectron gauges are normally supplied calibrated for N air has approximately the same calibration With proper precautions the Convectron gauge may be used to measure pressure of certain other gases The following inform
108. verage of 6 readings Output to Head 15 V 2 at 250 mA 2 5 Dimensions The dimensions of the controller in a half rack standard mounting are shown in Figure 2 8 Dimensions are in centimeters inches EE 30 3 184 0 Figure 2 8 Controller Dimensions 22 58 80 TS Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 23 N lt o 2 3 o 3 D E e 5 a Chapter 2 The dimensions of the Micro lon gauge are shown in Figure 2 9 Dimensions are in cm in H dimensions are given in Table 2 4 Figure 2 9 Micro lon Gauge with Connector E H gt 1 3 minimum for Y 0 5 connector Shown with removal ConFlat type 0 7 Vacuum Connection 1 9 Dimensions are in cm inch 0 7 The dimensions of the Convectron gauge are shown Figure 2 10 Dimensions are in cm in J dimensions are given in Table 2 4 Figure 2 10 Convectron Gauge with Connector FA 13 2 19 minimum for 5 2 75 connector removal 94 lt 37 gt 43 dz A LLIk 38 1 8 NPT 1 2 inch quick H 2 3 connect or welded fitting I Dimensions are in cm inch 24 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 System Components Table 2 4 Fittings 0 75 inch port diameter 9 4 cm 3 7 in Not applicable 1 0 inch port diameter 9 4 cm
109. vice Representative will advise you if the hazardous materials document is required When returning equipment to Brooks Automation Inc Granville Phillips be sure to package the products to prevent shipping damage Circuit boards and modules separated from the controller chassis must be handled using proper anti static protection methods and must be packaged in anti static packaging Brooks Automation Inc Granville Phillips will supply return packaging materials at no charge upon request Shipping damage on returned products as a result of inadequate packaging is the Buyer s responsibility This equipment has been tested and found to comply with the limits for a Class A digital device pursuant to Part 15 of the U S Federal Communications Commission FCC Rules These limits are designed to provide reasonable protection against harmful interference when the equipment is operated in a commercial environment This equipment uses and can radiate radio frequency energy and if not installed and used in accordance with this instruction manual may cause harmful interference to radio communications However there is no guarantee that interference will not occur in a particular installation Operation of this equipment in a residential area is likely to cause harmful interference in which case the user will be required to correct the interference at his own expense If this equipment does cause harmful interference to radio or television reception
110. y fail to activate if the pressure is above 5 x 107 Torr Use the DGS command see below to verify that degas has been successfully initiated DGS Definition Display degas status Modifiers None Response ASCII 1 if degas is ON 0 if degas is OFF Example From computer DGS CRLF From controller 1CRLF Indicating degas is ON DS Definition Display pressure reading Modifiers IG or CG1 or CG2 Response ASCII string representing the pressure for the selected gauge Example From computer DS IG CRLF From controller 1 20E 07CRLF The DS IG command will return pressure from the top display if either filament is ON and 9 90E 09 if the gauge is OFF The DS CG1 command will return pressure from the middle display The DS CG2 command will return pressure from the bottom display 88 Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 Preparing for Operation P S Ej E s 1G1 Definition Turn the lon gauge ON or OFF 3 Modifiers ON or OFF 3 Response OK if command accepted INVALID if rejected Example From computer IG1 ON CRLF From controller OKCRLF The IG1 ON command will be rejected as INVALID if the lon gauge is already ON and IG1 OFF will be rejected if the lon gauge is already OFF A response to the IG1 ON command of OK indicates only that a signal requesting that the ion gauge be turned ON has been sent to the electrometer The tube may fail to come on e g if the system p
111. y spaces or commas No spaces may appear within the command or the modifier only between them The terminator expected by the controller is an ASCII carriage return and line feed denoted here by CRLF A carriage return code CR is hex OD or decimal 13 A line feed code LF is hex OA or decimal 10 The carriage return is optional and messages terminated with only the line feed will be accepted Note that the CRLF terminator is in general appended automatically by the host computer s interface software to the message string supplied by the user If extra characters are found in the message after it has been successfully interpreted but before the terminator they will be ignored All characters should be upper case All messages to the controller will receive a reply consisting of an ASCII string terminated with CRLF Numbers will be returned in the format X XXExXX Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 87 TT E D K gc 1 Sd Chapter 5 Command Syntax for RS 232 Computer Interface DG Definition Turn degas ON or OFF Modifiers ON or OFF Response OK if command accepted or INVALID if rejected Example From computer DG ON CRLF From controller OKCRLF Command is INVALID if the lon gauge is OFF A response to the DG ON command of OK indicates only that a signal requesting degas has been sent to the electrometer Degas ma
112. your system to one decade below the minimum rated pressure of your transducer 3 Adjust the vacuum potentiometer Figure 5 15 until the third display line shows a single 0 If the adjustment is turned too far a minus sign will appear in the display This proper calibration is achieved when only the 0 appears Setpoints are stored in non volatile memory and are specified by a 2 digit mantissa and 2 digit exponent They may be set anywhere in the range 1 x 107 to 9 x 10 This allows for the entire pressure range of all supported transducer types and systems of units The setpoint is compared directly to the display data so units of measure are implicit Changing the units switch on the gauge control modules will not change the stored setpoints They must be reprogrammed in the new system of units There is a programmed 10 hysteresis on each process control setpoint For example with a pressure setpoint of 6 3 x 10 Torr the relay will activate when the display reaches 6 2 x 10 Torr for falling pressure and will deactivate when the pressure rises to one significant digit above the setpoint plus 10 i e 6 3 x 106 0 6 x 10 0 1 x 10 or 7 0 x 10 Torr For setpoints where the 2nd digit is 0 5 or greater the 1096 value is rounded up Series 358 Micro lon Controller Instruction Manual 358013 Rev 09 85 U E D K gc 1 Sd Chapter 5 Manual Override For examp

Granville Phillips 358 Controller Manual

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