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USER MANUAL OPTex 07/2005 - Frank`s Hospital Workshop

1. IV WAH A PDM S9 NPOW 7104 19 dwe7 K uoneipes 104 dwe7 16 T uoneipey Jose N N e o NO suen WIL U LL m 22 aey Z a iis YHL T Za 13 cadi 7 Zr Zr 01 yonms HH MM NAD osoei NL oog rora pos E ZH 09 08 013 0 Z SL VOS 4 ogle 216 ee 8 e M 8 Hel 0 87 Is W i i 221 uu L dy E Wadi SAH SIM fas 998 ee see god 18 616 55799 5579 Jequieu eqn Buisnoy a nyersdwaL Figure 65 Functional block diagram safety circuits User Manual OPTex 158 A05070PTex LAMBDA PHYSIK 07 2005 LIST OF FIGURES Figure 1 Figure 2 Figure 3 Figure 4 Figure 5 Figure 6 Figure 7 Figure 8 Figure 9 Figure 10 Figure 11 Figure 12 Figure 13 Figure 14 Figure 15 Figure 16 Figure 17 Figure 18 Figure 19 Figure 20 Figure 21 Figure 22 Figure 23 Figure 24 Figure 25 Figure 26 Figure 27 Figure 28 Figure 29 Figure 30 Figure 31 Laser components according to ISO 11145 12 Fundamental design of the OPTex 13 Right side and front of the OPTex 14 Left side and top of the OPTex 15 Electronics chamber with service p
2. 64 Maintenance schedule 109 Meaning of expression Siart laser 53 eoe aen Vivace gets kl 12 Start laser device 12 Measurements Gonversiomof u a Be 6 Mechanical safety features 45 N NEW FILL button 81 117 New 0 51 90 100 116 Note Signal in this manual 4 NovaTube 11 Functional description 18 O OFF PUNOM rrt as bo a E E S P rdc s au 82 Operating environment Requirements ee ERE CER RR Ene an 64 Operating modes 21 95 Energy Constant mode 22 High Voltage Constant mode 22 Operating pressure 99 Operating Screen ze exten RAE PEE xac RN afe 80 Operating temperature 99 Laser tube 3 her Ade EE 19 Operations serre E peu wea weds 89 Environmental conditions 64 Operatiolt eroOlS s eec pb ei noes seri 23 Operation modes External Trigger 2 ur onda cR ede nee 97 Repetition ies EX a
3. 2 Numbering of Chapters Pages and Instructions 2 Safety ovre Dos du Ir SL De 3 Laser Safety 3 Safety Information 3 Signal Words and Symbols in this Manual 3 Overview of 5 Conversion Tables 6 6 6 Patents and Trademarks 7 Patentsz 7 Trademarks 9 Feedback Regarding Documentation 10 LASER DEVICE FUNDAMENTALS 11 Excimer 11 The NovaTube Innovation 11 Laser Terminology According to ISO 11145 12 Fundamental Design of the OPTex 13 Overview of the 14 Laser 17 Laser 18 Ihyratron reif eR ES 20 Energy 21 Operating 21 CONTENTS TABLE OF CONTENTS 2 10 Safety Systems of the 23 2 10 1 Safety 24 2 10 2 Electronics 24 2 10 3 Tube 24 3 SAFEIN we
4. re Se Ede 118 127 Blank pages in this manual REASON AON patie cee ala ashi M AR ERE E NES 2 BURST button ur Narr eec 83 Burst counter nsere tenra EIS CENE han ale 85 aad eee eb Sn N GUS 80 C Capacitor grounding stick 120 Caution Signal word in this manual 4 Chapters OVERVIEW res D DA RIEN esi eT 5 Circulation fan 19 Class 1 laser device 30 Class IV high power laser device 30 Classification Laser safety inco epu me E E ORIS Wat me 3 Cleaning windows 136 Ela UELUT eee PD TIRE 17 Connection Beam guidance system 77 Controller where Re ied ae eed d OA as 67 Exhaust line pats 3 cpu emet eS 73 External trigger generator 71 Gas supply lines 75 Interlock plug van weed anak is gael nat Fler 66 Mains power supply line 72 Constructive safety features 42 Control and signal lines Installation 65 CONTROL button
5. Figure 1 Laser components according to ISO 11145 Definitions Laser Lasers consist of an amplifying medium capable of emitting coherent radiation with wavelengths up to 1 mm by means of stimulated emission Laser Device A laser where the radiation is generated together with essential additional facilities e g cooling power and gas supply that are necessary to operate the laser Laser Assembly Laser device together with specific normally optical mechanical and or electrical system components for beam handling and forming Laser Unit One ore more laser assemblies together with handling measurement and control systems 12 User Manual OPTex A05070PTex Fundamental Design of the OPTex 2 3 LAMBDA PHYSIK 07 2005 Fundamental Design of the OPTex The OPTex is provided with all required power supply and control units One phase mains power supply with protective earth as well as Premix and Inert gas supply are sufficient for safely and ease operation Only a few modules are to be checked and serviced within determined periods The maintenance schedule is shown in Section 8 3 on page 109 The OPTex is the most compact Lambda Physik excimer laser device To ensure fail safe operation and ease of service the laser device housing is divided into two separate chambers containing the internal components designated as the tube chamber and the electronics chamber Tiltable by 90 as indicated
6. 80 Service 88 Logbook 88 CONTENTS Ill TABLE OF CONTENTS 7 7 1 7 2 7 2 1 7 2 2 7 3 7 3 1 7 3 2 7 4 7 4 1 7 4 2 7 5 7 5 1 7 5 2 8 1 8 2 8 3 8 4 8 4 1 8 4 2 8 4 3 8 5 8 6 8 6 1 8 6 2 8 6 3 8 6 4 8 7 8 7 1 8 7 2 8 8 CONTENTS IV OPERATION 89 Check Beam Path 89 Start Up Laser 90 Turn On Gas 90 Switch On Laser Device and Controller 92 Methods of 95 Laser Operation Modes 96 Gas 100 Start and Stop Laser Operation 101 Start Laser 101 Stop Laser 103 Shut Down Laser Device 103 Switch Off Laser Device and Controller 103 Turn Off Laser 104 MAINTENANCE 107 Laser 108 Laser Device 108 Maintenance Schedule 109 Gas Line Maintenance 110 Flush Premix Gas Line External Flushing 110 Exchange Premix Gas Cylinder 112 Exchange Inert Gas Cylinder 114 New Gas
7. 84 QUIT DURON ED een ea 81 R Radiation safety features 42 Remote control interlock Specifications 55 Remote interlock 24 Remote interlock defeat plug 55 150 He passiVatlol ooo hip ive i ee eas 18 REPET RATE Counter 1 eb a ee 84 REPETITION ON button 83 Repetition On mode 96 Required laser gases 61 Routine maintenance 107 RS232 serial interface 17 INDEX 167 INDEX INDEX 168 S Safety Labels RR vade doe xe ade Reste 47 Organizational measures 26 Safety symbols in this manual 4 Safety chain Secure the working area with 38 Safety compliance 46 Safety information 3 Safety 26 Safety PUJA 3 429 tex ee Re tes ee Dus 55 150 Connecting 66 Dalely StiCK an ae EO IS 120 Safety systems x Vans OPER PIG Dre 23 Seismic anchorage
8. 22 90 95 98 Energy efficiency 19 Energy 2 21 Galibratio n e bret heb pe eda ee aos 143 P rPOSE Ne na a ci S LASER AQ es Rene 143 ENERGY VALUE counter 84 Environmental 64 Operation en 64 Transport and storage 64 Error indiCatiOri RE Bo EE 85 Exchanging halogen 140 Exchanging inert gas cylinder 114 Exchanging premix gas cylinder 112 Exchanging windows 119 Excimer laser ii 2 222 uem DID Rer ee Meets Rete 11 Excimer laser gases ce ree bp XI Yee 104 Turaing ee EHE 90 User Manual A05070PTex INDEX LAMBDA PHYSIK 07 2005 Excimerlog file RE shah ale ee RR 88 Exhaust ERIS HERMES Eus 63 Exhaust line Connecting 7 EXIT PURON 22 um aaa a Harrer 81 Exit laser control program 80 103 EXT TRIGGER Dutton 2 e s wae ead ews steeds 83 External flushing
9. 90 Gas handling safety features 44 Gas leaks Minimizing risk 90 Gas lines Installation oa NEE 74 Installation 74 Maintenance 110 Gas mixtures Requirements 62 INDEX 163 INDEX INDEX 164 Gas MOdeS sy ns a vee aed E eek ale re yaa 100 Fill laser tube with inert gas 101 Flush lasertube 26 6c seas me eae 100 Flush premix gas line 100 New Fillon ee er ERA ates 100 Gas protective equipment 39 bates tlie hc v e EXE 18 Scr is atit euh dS saca nat ido 39 Gas supply lines CONNECTING oot rco EM E ECCO cas 75 Requirements sc steed neta eee denne etes he 60 Gases Properties of compressed gases 39 Specifications 5 kaa eke Wak ale E RIVERS 61 General safety features 45 H Halogen filter 34 61 Disposal u san er een keane SEO 140 142 EXCHANGES u a een 140 SIorage uoa LUE aaa 140 Halogen gases 33 Hazardous situation lt 4 Heating volta
10. 45 SEISMIC protection 41 Service software 88 Signal words Usage in 3 Site pr paration et dnce INNO 65 Skin b Re Ed A 37 Space requirements 64 Specific safety aspects 30 Specifications Controller are urere ttis Ede aes 56 External trigger s ene Ee 57 LASER DEUM PEE exis t ee 51 Laser gases eei Rete i regie de ELE ETE 61 Power sup depo pee ERE Eoo tiene 54 Start laser control program 79 Startlaser device subunit EU E IER RI 92 Start laser operation 101 Statical 23 Stop laser operation 103 Storage Environmental conditions 64 Switching off laser 103 Switching off laser device 103 Switching on laser 101 Switching on laser device 92 Symbols this manual 4 T Temperatures GONVEFSION aud Ben a Xie IRE we ple ae 6
11. lt 59 Gas Lines tan e La LE Eis M 60 Pressure 60 Gas Cabinets 60 Gases Required 61 Optimum Gas Mixtures Single Gases 62 Air Intake and 63 Environmental Conditions 64 Space 64 INSTALLATION 65 Site 65 Transport Locks 66 Insert Safety Plug 66 Connect 67 Connecting the PC PC Powered Convertor 67 Connecting the PC Mains Powered Convertor 69 Software Installation 70 Connect External 71 Connect Power Supply Line 72 Connect Exhaust Line Option 73 Gas Lines 74 Remarks Regarding Gas Line Installation 74 Connect Gas Supply Lines 75 Connect Beam Guidance System for Fo Version 77 New Gas 78 LASER CONTROL 79 Laser Control 79 Start Laser Control Software 79 Exit Laser Control 5 80 Laser Control
12. 82 INDEX 161 INDEX INDEX 162 Controller Gonnseting ren er ine een xu He eR ue 67 Requirements are eta readers 56 Conversion table Measurements 6 Temperatures eRe eek ERES 6 Cooling air Requirements ecce remet 63 GOUNTCIS 30e wae geet L4 84 D Damage during transport 66 Danger Signal word in this manual 3 Design e EE etn dann 13 Designated use 25 DIMENSIONS sass Le Mp en EE 52 Disassembling window mounts 133 Discharge connector 120 Displays na ee a 84 E Electrical 27 Electrical safety features 43 Electricity 4 Electromagnetic compatibility 46 Electronics chamber 13 Emergency 38 EMO switch GONNEELON et eee eee 55 Energy anne 116 118 127 perir ee ERI RO ern er SS een 98 Energy Const mode 98 Energy Constant mode
13. Figure 17 Front and side views LAMBDA PHYSIK 07 2005 53 SPECIFICATIONS AND REQUIREMENTS 4 3 54 Mounting threads M8 length lt 15 mm for rigid mounting of laser device on an external frame 600 30 30 30 300 Recesses Tube mounting hole Tube adjustment screws M6 for feet M12 M6 screws inside don t remove for tube exchange Figure 18 Bottom view of the OPTex Electrical Power Supply Input voltage 10 15 one phase 230 VAC Frequency 50 or 60 Hz Apparent load 1 5 kVA nominal current at 230 V 3A Fuse rating foreach phase 6 3A Or Input voltage 10 15 96 one phase 115 VAC Frequency 50 or 60 Hz Apparent load 1 5kVA nominal current at 115 V 6A Fuse rating foreach phase 10 Type of mains plug IEC standard User Manual OPTex A05070PTex Remote Control Interlock 4 4 LAMBDA PHYSIK 07 2005 Remote Control Interlock The OPTex is provided with a remote interlock socket on the back panel This enables the laser device to be connected to an external interlock circuit Emergency Off EMO switch or warning light The number and location of external interlock switches has to be determined in accordance with safety requirements at the laser installation site Each installation has a unique configuration The necessary plug for the remote interlock circuit is a male 9 p
14. 116 Windows Maintenance 118 Windows Exchange 119 Windows 127 Disassembling Assembling Window Mounts 132 Windows 136 Halogen Filter Maintenance 140 Halogen Filter Exchange 140 Halogen Filter Disposal 142 Energy Monitor Calibration 143 User Manual OPTex A05070PTex TABLE OF CONTENTS LAMBDA PHYSIK 07 2005 9 TROUBLESHOOTING 147 9 1 Fuses v yu Fan 148 9 2 Possible Problems and Solutions 149 9 2 1 Power Up 149 9 2 2 Statical 150 9 2 3 Operation 152 10 DIAGRAM SCHEMATICS 155 10 1 Gas Flow 155 10 2 Electrics Diagram 156 10 3 Fiber Optic Light Waveguide Diagram 157 10 4 Safety Circuits Diagram 158 LIST OF 159 INDEX are X ERE EA 161 CONTENTS V TABLE OF CONTENTS CONTENTS VI User Manual OPTex A05070PTex 1 1 LAMBDA PHYSIK 07 2005 INTRODUCTION This chapter outlines the purpose as well as the necessary availability and use of the instruction manual the persons for whom the instruction manual is i
15. taser LaserorF 0 READY ON REPEI QUANTITY E4 pal uz consrot OFF Exr TRIGGER 0 Q PEMERROR QT COUNT 0 NMLKI H G F Figure 23 Buttons on laser control screen User Manual OPTex A05070PTex Laser Control Software NEW FILL B FLUSHING FLUSH EXT FLUSH INT FILL INERT EXIT C QUIT D EXIT LAMBDA PHYSIK 07 2005 Starts the new gas fill procedure The existing gas is pumped out of the laser tube and the laser tube is filled with fresh gas from a premix gas cylinder The valve currently opened is indicated by the corresponding light on the screen see Section 6 1 3 3 Requirements LASER OFF Premix gas cylinder with sufficient pressure connected to PREMIX Opens a new window enabling the gas lines or laser tube to be flushed FLUSH EXT EXIT Evacuates the premix gas supply line and refills with inert gas to enable gas line maintenance e g exchanging the premix gas cylinder Requirements LASER OFF Inert gas cylinder with sufficient pressure connected to INERT Evacuates the laser tube and refills with inert gas to enable windows exchange with leak testing Following this a new gas fill is necessary see Section 8 5 Requirements LASER OFF Inert gas cylinder with sufficient pressure connected to INERT Evacuates the laser tube and refills with inert gas up to a pressure
16. 22a 84 Warm up parod u ee ee ae 117 130 Warning Signal word in this manual 4 Watch Count mode 2 Lesser i dad ee E hho 98 WATCHCOUNT button 83 Window 2 tal Rel GRIS nho UR 39 Window mounts Assembling and disassemling 132 Windows Aligriment niet vated ORAS 127 GIG cce Yee EE Maas 118 136 Exchange au Heer ee i eb es 118 119 Maintenance Basar 118 INDEX 169 INDEX INDEX 170 User Manual OPTex
17. 7 3 1 7 3 1 1 96 Laser Operation Modes Repetition On Mode Internally triggered laser operation will be started with the selected repetition rate To change the repetition rate 1 Click the display REPET RATE see D in Figure 24 on page 84 A new window appears showing the current value The value is marked and the cursor is positioned behind the displayed value see Figure 32 OPTex ArF Exit naar vac Qui Input repetition rate E H 5 warm up cance 0 LASER L REPETITION ON REPET RATE Quantity coo Q EXT TRIGGER PEM ERROR WATCHCOUNT 0 Figure 32 Setting the repetition rate 2 Enter the desired value through the numerical keys The value for the repetition rate can be chosen from 1 Hz to 200 Hz in 1 Hz steps 3 Click OK or press ENTER to confirm or click CANCEL or press ESC to abort The entered value appears on the display Entered values above 200 Hz are automatically reduced to 200 Hz Start laser operation in accordance with Section 7 4 Laser operation continues until stopped by clicking OFF repetition rate is not reset or Laser OFF NOTE When the repetition rate is changed during operation the entered value is flushing in the display REPET RATE The laser operates with the previous repetition rate Changes don t become
18. 906134 AVOID EXPOSURE Before contact RADIATION IS EMITTED FROM Discharge THIS APERTRE Earth Short circuit 90613301 907378 Figure 15 Labels on rear right and top of the OPTex NOTE Label 907378 is attached to the protection grill inside the laser device housing LAMBDA PHYSIK 07 2005 49 SAFETY 3 4 2 50 Description of the Labels and Safety Labels LP Part no 901032 90103401 90574302 905910 90613301 906134 906484 907378 Description Safety label in accordance with CDRH Contains warning of laser radiation as well as data specific to the laser device Label guaranteeing that this laser complies with FDA radiation performance standards Laser device type plate indicating model serial number date and place of manufacture and principal electrical supply data Label showing that this laser and some of its components are protected by patents Beam output safety label informing of the presence of laser radiation when the aperture is open 2 labels Label warning of the presence of laser radiation when service panels are removed 3 labels Label indicating that the laser device has to be disconnected from the mains remove mains plug from mains wall socket before opening the device Label indicating that the discharge capacitors have to be grounded discharged before removing the protection grill and t
19. Diner MIN REPET QUANTITY common PEM ERROR 20 Figure 33 Burst mode burst counter and user counter External Trigger Mode Externally triggered laser operation will be started with the selected energy value or HV tuning rate For this operation mode an external trigger must be connected and correctly set Start laser operation in accordance with Section 7 4 1 A laser pulse is emitted whenever a trigger pulse is received 97 OPERATION 7 3 1 4 7 3 1 5 98 Watch Count Mode NOTE When operating in watch count mode laser operation cannot be stopped by the software interrupt underpressure lt 2 9 bar or by the command OFF until the preset number of pulses has been emitted HV charging failures overvoltages or exceeding charging time are interrupting laser operation immediately External trigger mode will be started for a given number of pulses For setting the number quantity of pulses up to 65635 see setting quantity in Burst mode Start laser operation in accordance with Section 7 4 1 After emission of preset pulses the control software returns to internal operation mode Laser operation can be interrupted by stopping the external trigger pulses Tuning and Operating Ranges Set High Voltage Values In the HV Const mode the high voltage level can be changed MAX top of the display characterizes the highe
20. In general the maximum permissible radiation exposure for the skin is several times greater than for the eye Safety measures with regard to the radiation hazard are therefore mainly based on dangers for the eye A potential chemical hazard originates from interaction between the laser beam and an obstruction The high irradiance could result in the liberation of hazardous fumes and gases In addition the heat generated is sufficient to ignite many materials Not only is the direct laser beam hazardous but unchecked reflections of laser light also constitute a potential hazard This risk is excluded if the laser beam is contained within a protective enclosure Protective measures must be taken therefore when personnel are working in an open beam situation use of beam shielding and beam dump 31 SAFETY 3 2 1 2 32 High Voltage Electric Energy WARNING Electrical hazards High voltages exceeding the Safety Extra Low Voltage levels SELV of 42 VAC or 60 VDC introduce the potential hazard of electric shock and might cause serious injuries by passing electricity through the body High voltages of up to 14 kV are generated in the OPTex laser device As the equipment is provided with a protective housing accidental contact with current carrying conductors during normal operation is impossible However if an appropriate protective cover is removed potentially lethal hazards exist in spite of the existence of the hous
21. 8 4 1 110 Gas Line Maintenance To ensure optimum excimer laser performance the gas lines have to be kept free of leaks and impurities In addition potentially hazardous halogen gases have to be flushed from the premix gas line when exchanging the premix gas cylinder This section describes the procedure to flush the premix gas line as well as how to exchange the gas cylinders Flush Premix Gas Line External Flushing Purpose Evacuate the premix line and fill with inert gas This is for example necessary before exchanging a premix cylinder before performing a leak test on the premix line or when the laser is not to be used for several weeks WARNING Toxic hazard Always thoroughly flush the premix line with inert gas before disconnecting the gas cylinder disconnecting the gas line or performing a leak test Tools and Materials e Inert gas cylinder with at least 5 bar abs remaining pressure Preconditions e Laser device switched on and laser control software started Preparation 1 Ensure that the gas cylinders are correctly connected 2 Close the valve on the premix gas cylinder 3 Close the pressure regulator in the premix gas line NOTE To completely flush the gas line set the pressure regulator to 5 bar abs If the pressure regulator setting is too low residues of halogen gas could remain in the line between pressure regulator and gas cylinder valve 4 Setthe pressure regulator in the premi
22. and a red colored graphical pressure display Laser tube gas pressure too low Leak test the gas supply system including solenoid valves Error message PRESSURE and a pressure drop to normal pressure the graphical pressure display turns to red If there is no leak signal error on pressure sensor or laser controller Call authorized service to check FOL links Error message FILL after performing a new gas fill Gas pressure too low Check the remaining pressure of the premix cylinder The pressure must not be below 5 bar abs Leak test the premix gas supply line Insufficient underpressure during the new gas fill Call authorized service to check vacuum pump or valve block Error message HV CHARGING Charging time of discharge capacitors exceeded Perform a new gas fill If the error message cannot be canceled call authorized service to check charging circuit Error message HV SUPPLY Heat sink of HV module too hot Check ventilation system fan air intake and exhaust Check operating environmental temperature Shorten duration of continuous operation HV module fuse blown off or line voltage too low Call authorized service to check power supply circuits and fuses Error message FOL failed Check FOL connections and HV OVERVOLTAGE switch on laser device again HV module doesn t receive Call authorized service
23. 1 square meter m 1 square meter m 1 cubic meter m 1 liter I 1 kilogram kg 1 bar 100 000 Pascal Pa Temperatures 39 37 inches in 3 28 feet ft 0 3937 inch in 1 550 square inches in 10 76 square feet ft 35 31 cubic feet 0 264 US gallons gal 2 20 US pounds Ibs 100 000 Pascal Pa 14 50 pounds force per square inch Ibf in The temperatures in this manual are primarily indicated in degrees celsius C To convert C to F multiply by 9 divide by 5 and add 32 To convert F to C subtract 32 multiply by 5 divide by 9 As a guide we have converted below some temperature values from to F 10 0 C 5 C 16 C 20 38 100 14 F 32 F 41 F 61 F 68 F 100 F 212 F User Manual OPTex A05070PTex Patents and Trademarks 1 5 1 5 1 LAMBDA PHYSIK 07 2005 Patents and Trademarks Patents Lambda Physik GmbH is owner of the following patents Germany P 32 12 928 9 US Patent 4 534 034 Germany P 33 35 690 4 Germany P 38 17145 7 Germany G 88 17 197 3 US Patent 4 860 300 Germany P 37 14 503 7 US Patent 4 916 707 US Patent 4 993 042 US Patent 4 980 894 US Patent 4 951 295 Germany G 8906 627 8 Germany P 40 03 841 6 09 US Patent 45 220 574 Japan 1 991 984 Germany P 42 06 803 7 09 US Patent 5 396 514 Germany G 92 08 936 4 Entladungsgepumpter Laser Discharge pumped
24. All service panels are to be closed No tags indicating potential hazards e g uncompleted maintenance work are to be affixed to the laser device e Beam guidance system prepared where fitted Switching On the Laser Device 1 Insert the key into the key switch and turn clockwise from the 0 to the 4 setting see Figure 29 B The POWER ON light A comes on The power circuits in the laser device are enabled P A Ber 29 o9 O o9 o o SH So 09 aF 96 50 o o 96 o g fee S 96 Figure 29 Enabling power circuits 93 OPERATION Starting the Laser Control Software 2 Switch on the laser control PC and monitor 3 After Windows has been started select the program group WINLAC and double click the WINLAC icon The laser control screen appears see Figure 30 The HV range is set to 50 of tunable range the repetition rate to 5Hz COM2 OPTex ArF vac Q LH pre inert Pond UE russ A TNNG RANGE MAX PRESSURE 3350 mbar 9 WARM UP DI 50 E REPETITION REPET RATE QUANTITY MIN wes cono EXT TRIGGER 0 Q PEMERROR WATCHCOUNT 0 Figure 30 Laser control screen warm up period Two colored flashing triangles in t
25. 1 kW Hose Diameter 160 mm at tube chamber Length lt 3m NOTE Ensure an adequate supply of cooling air Especially prevent the exhaust air from rebounding from surrounding walls and re entering into the laser device through the air intakes Location of the laser device within the prescribed maintenance area see Section 4 10 on page 64 ensures an adequate air cooling 63 SPECIFICATIONS AND REQUIREMENTS 4 9 4 10 64 Environmental Conditions This section indicates the recommended environmental conditions for the transport storage and operation of the OPTex laser device Transport and Storage Temperature range 20 to 50 Ambient air pressure 650 to 1070 mbar Humidity lt 90 RH non condensing conditions Operation Ambient temperature range 15 to 30 C for Fo version 15 to 25 C for all other versions Max temperature gradient 2 C h Max pressure gradient 10 mbar h Humidity lt 85 RH non condensing conditions Altitude max 3000 m above sea level CAUTION Impurities in the ambient air can pollute the windows Make sure that the ambient air is free of dust oil corroding substances and photochemical decompositables or depositable compounds For more information please contact Lambda Physik Space Requirements The dimensions of the laser device are indicated in Section 4 2 on page 52 Ensure that the ventilator and exhaust openings are not covered or inhibited T
26. Feet to be relocated in recesses on back panel Tube chamber Electronics chamber Figure 2 Fundamental design of the OPTex To enable space at the installation site to be optimally utilized the laser device can be installed on its back or on its bottom panel recesses for the feet are provided in both panels The installation position upright or flat and the beam exit side are set at the factory In this manual we assume that the laser device is to be installed on its bottom panel upright position The beam is to exit from the aperture on the right hand side shown in Figure 2 and in Figure 3 on page 14 The gas and power connections are situated on the left hand side see Figure 4 on page 15 13 LASER DEVICE FUNDAMENTALS 2 4 Overview of the OPTex p L o D Qe 998 ir NS FR L K I H M Figure 3 Right side and front of the OPTex Key to Figure 3 A B TO 00 lt A 14 Exhaust electronics chamber Beam exit aperture for Fa version with beam guidance system connector Recesses for feet alternative Key switch Front service panel Height adjustable feet Right hand service panel Gas connection valve Inert alternative Gas connection valve Premix alternative Trigger in Pre trigger out connector alternative Optical RS232 connector alternative Interlock connector alterna
27. Flammable items must be isolated from the laser beam and from the laser system e Paper circuit diagrams leaflets or even posters on the wall curtains that are not coated with fire retardant wooden panels or similar materials can be easily set on fire by direct or reflected laser radiation e Only beam stops made of non flammable materials not asbestos should be used e Many fluids and solvents e g cleaning agents used for maintenance are combustible The intense beam of the laser or a spark from an internal switch can ignite vapors from these materials Prevent the laser beam from contacting flammable materials used in the laser area e Move containers of flammable materials as far from the laser system as possible and shield them from the beam with opaque materials Under no circumstances should these solutions and vapors be placed in the beam path or near the system 37 SAFETY 3 2 2 2 Electrical Safety WARNING Electrical hazards If the laser device is completely shut down for maintenance and repair work it must be secured against inadvertent starting Ensure that the electrical system is locked out and tagged out prior to servicing by locking the key switch of the laser device and tagging appropriate warning signs High voltages of up to 14 kV are generated within the laser equipment The following precautions should be observed 38 Local safety regulations must always be strictly complied with Sw
28. Terminate laser control program 80 Thyratron Description cen he Richie RR Baier tie Ud 20 Heating Voltagesics bunk ne His Rd DE 20 Toxic 25 27 39 Toxic substances 4 Trademarks se ERR Re REX ME MERECE ALES 9 User Manual OPTex A05070PTex INDEX LAMBDA PHYSIK 07 2005 Transport Environmental conditions 64 Transportatiorilll pie geek ep d 81 101 Trigger generator Goninectihig i vertu nei Tagen 71 Trigger in signal SPCCHICALIONS sain Pork ave wr qw d 57 Trigger out signal Specifications riss I Tux ERES uide ends 58 Triggering External specifications 57 Ttube chamber Gard deep 13 Turn off laser gases 104 Turn on laser gases 90 U Ultra violet light 31 Ultra violet radiation safety 35 Units of measure Conversion 6 User Counter nn sr Nee ana wane 85 User manual Intended Audience 2 V Ventilating systems 40 WARMUP indicator i
29. displayed with an additional warning light outside the door Local and national regulations governing the safe use of lasers should be adhered to all times User Manual OPTex A05070PTex Specific Safety Aspects LAMBDA PHYSIK 07 2005 Skin Safety WARNING Potential skin burns Direct and reflected laser radiation can burn exposed skin Only use the laser in accordance with its designated use Safety interlocks are only to be defeated by authorized personnel e Although the skin can withstand a considerably higher radiation intensity than the eyes tissue may be burned to a greater or lesser degree depending on the radiation time and the irradiation intensity e Avoid contact between the skin and the beam or specular reflections of the beam Reflections of the beam may be as dangerous as the beam itself Appropriate protective clothing should be worn to protect the skin whenever necessary Fire Safety WARNING Fire hazards Class IV lasers are by definition fire hazards The laser beam can cause flammable materials to ignite or explode Always keep a fire extinguisher in the laser area in case a fire occurs Because of the high output power from the class IV laser a wide range of materials can be set on fire Therefore when the beam path is open appropriate fire prevention measures should be taken e Combustible materials may be ignited by the laser beam or by electrical components inside the laser system
30. tt T yun Alddns Y J MOd SUEN Le Alddns seg e uec iu aunjesedwe Jeqweyg nr Uey Ny N 5 AO Z A SV alt Bunesy 492 MHL pieog NL un WAH Jo uL JO UUOJSUeI T L Ue JIOAJOS9 ounyesodway L eu1 u 2 EE V A00 T Siu UL A Josugg Josuas uoyesAyL Josueg KB19u3 8 T einjejeduie ue a Jequieu sqnL Figure 63 Functional block diagram electrics User Manual OPTex 156 A05070PTex Fiber Optic Light Waveguide Diagram 10 3 Fiber Optic Light Waveguide Diagram Tube Chamber H Warning Lamp RS Interlock Opti FOL No Signal 1 1 Enclosure temp Chamber Enclosure temp Tube Chamber to CLS Interlock Enclosure temperature Electronics Chamber Charge current Warning lamp High Voltage HV ON Internal trigger High Voltage module inhibitation External trigger in Pre trigger out RS 232 TXD RS 232 RXD Gas pressure Thyratron heating circuit supervision Gas supply
31. 12 13 14 15 16 I7 18 Figure 25 Lights on laser control screen NOTE The error field errors to L will automatically be opened if an error occurs A VAC The vacuum valve is open and the vacuum pump has been actuated see gasflow diagram in Figure 62 on page 155 B LH Laser tube gas valve is open 85 LASER CONTROL 86 PRE INERT TEMP READY CONTROL PEM ERROR OPERATION ERROR PRESSURE FILL HV CHARGING OVER TEMPERATURE CPU HV SUPPLY HV OVERVOLTAGE THYRATRON EEPROM The premix gas valve gas inlet is open The inert gas valve gas inlet is open Warning light for exceeding tube temperature gas reservoir more than 48 C The laser device is ready for operation High voltage can be switched on The laser is operating in the energy constant EGY Const mode NOTE The EGY Const mode is only available with energy monitor Fault in the energy monitoring system The error message vanishes by clicking on the lamp when the cause of the error has been rectified As long as the error remains the EGY Const mode cannot be selected Flashes red to indicate an error preventing laser operation After rectifying the error the laser device has to be switched off and then on again before laser operation can be restarted To ease troubleshooting one or more of the lights below OPERATION ERROR l1 to 18 are also red Gas pressure in the laser tube is out of the operating rang
32. 3 114 Finalization 23 Ensure that the pressure regulator and the gas cylinder valve in the premix line are closed 24 Open the premix gas cylinder valve 25 Set the pressure regulator in the premix gas line to 5 bar abs 26 Perform a new fill procedure see Section 8 5 on page 116 27 f necessary shut down the laser device and external controller Exchange Inert Gas Cylinder Purpose Exchange a spent inert gas cylinder with a fresh gas cylinder A gas cylinder has to be exchanged when the remaining pressure in the cylinder is less than 5 bar the gas cylinder has expired see product information provided by the gas supplier Tools and Materials CAUTION Risk of damaging laser tube Never use gas cylinders with a pressure of less than 5 bar abs Impurities that desorb from the gas cylinder walls can contaminate the laser tube and cause loss of passivation e Replacement inert gas cylinder as specified in Section 4 7 4 on page 61 e Appropriate wrench for the gas cylinder fittings e Liquid leak tester e g SNOOP e Ethanol e Cleaning paper Preconditions e None Preparation 1 Close the gas cylinder valve and pressure regulator in the inert gas line 2 Close the gas cylinder valve and pressure regulator in the premix gas line User Manual OPTex A05070PTex Gas Line Maintenance LAMBDA PHYSIK 07 2005 Exchanging the Inert Gas Cylinder 3 Unscrew the connection fitti
33. 60601 2 22 particular requirements for the safety of diagnostic and therapeutic laser equipment All laser products from Lambda Physik are also compatible with the European laser safety standard EN 60825 User Manual OPTex A05070PTex Labels 3 4 LAMBDA PHYSIK 07 2005 Labels This chapter contains information about the safety relevant labels attached to the OPTex Section 3 4 1 shows the design of the safety labels and indicates their respective part numbers and physical location on the laser device Section 3 4 2 contains a plain language description of each safety label These descriptions are grouped in label part number order Ensure that all safety labels are affixed to the laser device in accordance with the Label Location Diagrams in Section 3 4 1 of this chapter WARNING Missing labeling can cause injury If warning labeling is missing or incomplete persons are not made aware of potential exposure to specific hazards Make sure that all warning labels are affixed to the laser device according to the plans given in this chapter Do not put the laser device into operation if labeling is incomplete Immediately replace the missing warning label s or inform Lambda Physik Each label indicated on the label location diagrams has a part number that provides a cross reference to the description and reproduction of the label that is contained in the second subsection NOTE To simplify the ordering o
34. Figures 2 3 and 4 on page 13 ff The intake air for the laser is the ambient air Under normal operating conditions the exhaust air does not contain any toxic gases or by products Nevertheless certain failure scenarios may cause the exhaust air from the laser tube chamber to contain a small concentration of halogen gas or ozone and should therefore be treated accordingly Effective protection is guaranteed if the exhaust air is purified or if the optionally available exhaust hose guides the exhaust from the laser tube chamber to an appropriate ventilation system WARNING Toxic hazard Lead the exhaust from the laser device into an appropriate ventilation system Make sure that the exhaust is not connected to the ducting of systems used for the processing of breathing air e g air conditioning or ventilating systems Ozone can be generated by high power ultra violet radiation Prevent the formation of ozone with a proper air exhaust Formed ozone gas should be removed by flushing the beam path with Nitrogen NOTE To purge the beam path with Nitrogen from an external gas cylinder insert and tighten the supplied beam path pipe into the beam shutter thread on beam exit aperture or connect the purge gas line with the purge gas connection tube F gt version Connect the other end of the pipe with the external Nitrogen gas line Air flow rate Tube chamber 100 3 Electronics chamber 70 m h Heat transfer to exhaust lt
35. If the laser device automatically enters the warm up period during laser operation a watch dog failure occurred In this case immediately call authorized service C In case of repeatedly occurring error messages call authorized service The following tables give some information to ease troubleshooting 9 2 1 Power Up Error Problem Reason Solution Laser device cannot be started No power supply Check mains connection no POWER light Check main fuses and replace if necessary Check fuse of mains power supply unit and replace if necessary Insufficient power supply The laser device has to be configured for your local voltage and frequency see type plate In case of divergences immediately call Lambda Physik LAMBDA PHYSIK 07 2005 149 TROUBLESHOOTING 9 2 2 Statical Errors Statical errors except the warning lamp Temperature are interrupting the laser operation For troubleshooting or when the cause of the error has been rectified laser operation can be restarted at once Problem Reason Solution Warning lamp TEMPERATURE Tube temperature too high 48 C Allow laser tube to cool down to optimal temperature 40 C Check air intake and exhaust to be exposed Check ventilation fan Graphical pressure display turns to red Insufficient gas pressure in the laser tube Perform a leak test to check laser tube and gas valves FOL err
36. RATE and QUANTITY values set Activates the high voltage and starts laser operation at the preset repetition rate Requirements READY lamp on LASER ON REPET RATE value set Enables laser operation The HV power supply receives current but the storage capacitors are not charged and no laser pulses are emitted For emission of laser beam pulses select an operation mode after running a security period of 5 seconds REPETITION ON BURST EXT TRIGGER or WATCHCOUNT Requirements READY lamp on 83 LASER CONTROL 6 1 3 2 84 Counters and Displays There are three counters and four displays on the laser control screen Figure 24 Clicking a counter when the laser is online opens a subsequent menu enabling a new value to be entered A COM2 warmup 1 Temp LASER ON LASER OFF C READY REPET RATE QUANTITY T Figure 24 Counters and displays on laser control screen A WARMUP B PRESSURE ENERGY VALUE REPET RATE E QUANTITY Percentage indicator indicating the proceeding of the thyratron warm up period The warm up is additionally indicated by the red lamp left from the indicator Graphical and numerical display indicating the current gas pressure in the laser tube If the pressure is sufficient for laser operations the graphical display is blue If there is insufficient pressure the graphical display turns red If there is an overpressur
37. X REIR UE LS PRICE gus 103 Laser operation modes 96 External Trigger Mode 97 Repetition On 96 Watch Count mode 98 Laser radiation u re Keen msi bag wiles 31 Laser radiation 4 Laser safety classification 3 Laser Safety Officer 26 35 Laser specifications 51 Laser t b6 sects nea teal EE get 18 Fill with inert gas 101 Fl shing ie eis rete Imo td ra en 100 120 Laser unit Definition ares aan Peed o ER tb dark ale Bed 12 LASTES Di t a tha oe ast bat auntie De un DIS 88 INDEX 165 INDEX INDEX 166 Enc ECT 40 Lights RI MERE RE tik re e RUP MER e Ee 85 Lockout tagot 2 are ie VERG LR ER donato 28 LOGBOOK rero bei x epp iud 108 116 Eogbook file o rre RE Het Rott 88 M Mains power supply line Connecting 72 Maintenance ox aegis ea nk IRE a Naa gue ERE 107 GAS IMCS Ay nee Se esta n 110 Halogen flltet 2 rnm sealed b er ettet 140 New gas 116 Sr ea E Re 118 Maintenance area
38. apply the downward force 11 While applying a sideways pressure move the window in a figure eight movement for 2 to 3 minutes Figure 59 Cleaning movement 12 13 14 15 16 17 18 Rinse the window at first under flowing warm water to take away the chalk and after that under flowing distilled water Carefully dry the windows using a clean dry lens tissue Place three layers of fresh lens tissue on the glass plate Lay the window with the coated side downwards onto the prepared glass plate Place a single sheet of lens cleaning paper over the window Put a few drops of ethanol onto the lens tissue close to one edge of the window While holding the window in place very gently drag the lens tissue across the surface of the window NOTE The window cleaning can be repeated but no more than three times If dust or spots are still seen the window must be discarded 138 User Manual OPTex A05070PTex Windows Maintenance LAMBDA PHYSIK 07 2005 Cleaning the Coated Side of the Window CAUTION Risk of damaging the windows Only use ethanol to clean the coated side of the window Use gentle pressure when cleaning the coated side of the window Never use polishing powder e g Vienna Chalk to clean the coated side of the window 19 Place three layers of fresh lens tissue on the glass plate 20 Lay the window with the uncoated side downwards onto the prepared glass plate 21 Place a single sh
39. front or rear window Never turn both windows as this may disalign the laser resonator 18 Remove the mechanical beam shutter from the beam exit port by turning counter clockwise 19 Remove the adjustment laser and place the energy or power meter in front of the beam exit of the OPTex 20 If necessary connect the display unit to the energy or power meter 21 Switch on the laser device 22 Switch on the external controller and start the laser control software Allow the warm up routine to be performed 23 Set the operating parameters set repetition rate to 5 Hz HV to 100 in HV Const mode User Manual OPTex A05070PTex Windows Maintenance LAMBDA PHYSIK 07 2005 WARNING Risk of injury through laser radiation When operating the laser with an open shutter and or beam shielding all safety precautions detailed in Chapter 3 are to be strictly enforced 24 Start laser operation 25 Carefully turn the horizontal and vertical alignment screws of the front or rear window until the beam energy is at it s maximum value NOTE Either fine adjust the front or rear window Never turn both windows as this may disalign the laser resonator 26 Stop laser operation Finalization 27 Insert and tighten the screws covering the window alignment screws on the laser device s left hand and right hand side 28 Calibrate the energy monitor see Section 8 8 on page 143 29 If necessary shut down the laser device and
40. high voltage and the laser is operating with external triggering for a predefined number of pulses in a non interruptable mode The storage capacitors are supplied with high voltage and the laser is operating with external triggering The amount and frequency of pulses are determined by the external trigger generator The storage capacitors are supplied with high voltage and the laser is operating with internal triggering for a predefined number of pulses The storage capacitors are supplied with high voltage and the laser is operating with internal triggering for an indefinite number of pulses Power is applied to the HV power supply unit Laser operation can be started The laser device is in the warm up phase or laser tube flushing FLUSHING INT is in progress An indicator to the right of the lamp displays the warm up percentage see Figure 24 on page 84 Indicates that gas actions being performed 87 LASER CONTROL 6 2 6 3 88 Service Software To ease service operations and troubleshooting the service software LASTEST only available for service personnel can be installed on the external controller This service software provides additional functions The screen for error messages is continuously displayed A test mode can be started to check laser functions In the test mode the warm up period can be aborted and gas actions can be canceled The gas valve assay can be controlled directly The com
41. laser Vorrichtung zum Erzeugen von Hochleistungs Hochspannungsimpulsen hoher Wiederholfrequenz Elektrode f r gepulste Gaslaser und ihre Verwendung Elektrode f r gepulste Gaslaser Electrode for pulsed gas lasers Steuerschaltung f r einen gepulsten Gaslaser und Verfahren zum Initialisieren der Steuerschaltung Control circuit for a pulsed gas laser Device for mounting a window on a gas discharge laser Ignitor for the preionization of a gas discharge laser Preionization means for a gas discharge laser Vorrichtung zum Reinigen von Lasergas Laserresonator Excimer laser with hydrogen chloride and method for producing hydrogen chloride for an excimer laser Excimer laser with hydrogen chloride and method for producing hydrogen chloride for an excimer laser Verfahren zum Nachf llen von Halogengas in das Gasreservoir eines Excimerlasers Excimer laser comprising a gas reservoir and a collecting receptacle and a method of refilling the gas reservoir of the laser Laserresonator INTRODUCTION Germany P 42 33 634 1 US Patent 5 347 532 Japan Hei 5 262 989 93 US Patent 4 977 573 US Patent 4 611 270 Germany P 43 35 079 8 33 Germany G 93 20 768 9 Germany G 94 01 808 1 Germany 295 20 820 1 US Patent 4 611 327 US Patent 4 549 091 US Patent 4 393 505 US Patent 4 340 968 Germany P 44 00 345 5 Elektroden f r die Entladungseinheit
42. message Electronics Chamber Closed housing and laser tube temperature are monitored by one circuit and indicated by a common error message For determined service procedures the safety interlock has to be bridged by the interlock defeaters Air cooling is adequate to laser operation only with closed front panel Tube Chamber The laser device can operate only with closed housing of the tube chamber Interlock switches on the right left and top service panel and a temperature sensor near the laser tube are monitoring the operation status Interlock and temperature errors are indicated by a common error light When the tube chamber is open all power supply lines with gt 42 V DC and the mains supply line gt 100 V AC are interrupted For determined service procedures the safety interlocks are to be bridged The tube temperature is monitored by hardware components If the tube temperature exceeds 48 C an error message is generated if it reaches 60 C the current laser operation is interrupted automatically In case of this interruption the laser tube has to cool down to the optimal operating temperature 40 C before restarting any laser operation Depending on the environmental temperature this may take approx 30 minutes User Manual OPTex A05070PTex 3 1 3 1 1 se LAMBDA PHYSIK 07 2005 SAFETY Never switch on or attempt to operate or service the OPTex before reading understanding and fully familiarizi
43. no longer sufficient to initiate switching of the thyratron this can be corrected during the thyratron lifetime by increasing the heating power of the cathode Hydrogen is necessary to provide a fast current increase and a high current intensity However as hydrogen is continually lost due to diffusion and metal erosion the concentration of hydrogen has to be continually renewed For this purpose there is a reservoir structure palladium in the tube in which a large quantity of hydrogen is stored By heating the reservoir hydrogen is released from the reservoir into the main thyratron It should be noted however that too much hydrogen reduces the hold off voltage between the electrodes of the thyratron to such a level that unwanted switching of the thyratron will take place even without the trigger pulse On the other hand if the partial hydrogen pressure in the thyratron is too low the laser is unable to pulse This is because there is no discharge in the thyratron due to a lack of charged particles The values for the two heating voltages UH for the cathode heating and UR for the hydrogen reservoir voltage are critical to the correct operation of the tube The voltages are stabilized in a broad input voltage range in order to be unaffected by voltage fluctuations in the supply line spikes These values have to be altered during the total life of the thyratron to ensure proper switching of the tube User Manual OPTex A05070PTex
44. premix gas contains halogen a needle valve or cut off valve should be installed in the premix gas line The additional valve is to be located near the gas cylinder to protect the gas line and pressure regulator against corrosion and provide additional gas protection Do not solely rely on the main gas cylinder valve to provide adequate protection e Gas cylinder valves should be closed except while filling the laser or when running the laser in the constant energy mode EGY Const e The pressure regulator situated between the external gas cylinder and the laser should be checked regularly The maximum permitted value while cylinders are opened is 5 2 bar abs 40 User Manual OPTex A05070PTex Specific Safety Aspects 3 2 2 4 3 2 2 5 LAMBDA PHYSIK 07 2005 Pressure Safety Gas pressures of up to 7 5 bar absolute are permitted on the valve assembly and up to 5 2 bar abs on the gas inlet Gas pressures of up to 4 4 bar abs or for the Fa version 3 8 bar abs are permitted in the laser tube If pressure rises above that the laser device is switched off automatically The following precautions should be observed e The laser should only be operated with the housing closed e In accordance with the local pressure vessel regulations in Germany Druckbeh lterverordnung Lambda Physik recommends to have the laser tube checked by a specialist every five years Seismic Protection For installations
45. pressure regulator in the premix gas line to 5 bar abs User Manual OPTex A05070PTex New Gas Fill LAMBDA PHYSIK 07 2005 Performing a New Gas Fill 4 Click the NEW FILL button on the laser control screen The prompt Are you sure appears 5 Click YES to continue 6 The prompt Please open premix appears 7 Ensure that the premix gas cylinder valve is open and that the pressure regulator is correctly set 8 Click YES to continue 9 The new fill procedure is executed automatically When the new fill is complete the warm up period starts automatically and the elapsed time is displayed on the screen 10 Close the gas cylinder valve and the pressure regulator in the premix gas line Finalization 11 When exchanging the windows continue with step 26 on page 125 Assembling the Laser Device 12 If necessary shut down the laser device and external controller 117 MAINTENANCE 8 6 118 Windows Maintenance The OPTex laser tube windows are the rear mirror rear window and the output coupler front window Maintenance of the windows consists of the cleaning and or exchanging the windows Cleaning To enable cleaning the windows have to be removed Cleaning the windows is necessary after a specific number of pulses dependent on gas mixture wavelength laser operation at high voltages or energy ifthe pulse energy is too low ifthe beam profile is poor Ex
46. regulator board e Instruction Manual for the PC e Appropriate screwdriver for PC housing screws e Appropriate screwdriver for PC mounting bracket screws e RS 232 optical interface adapter supplied e DC regulator board with mounting bracket supplied e Y cable supplied e Setof FOL links supplied Preparation 1 Disconnect the laser device and PC from mains power supply 67 INSTALLATION 68 Connecting the PC 2 Set down the PC at the desired location Take into account the length of the FOL links NOTE The FOL links supplied with the laser device have a length of 1 5 m Longer links can however be used providing that each line is in one piece Intermediate connectors or extension pieces are not to be used as this deteriorates transmission quality For more information please contact Lambda Physik WARNING Risk of electric shock Always disconnect the PC and any connected devices e g monitor from the mains supply before opening the housing 3 Unscrew and open the PC cover For more information consult the PC s instruction manual 4 Unscrew and remove the bracket from the vacant slot intend to be used 5 Insert the DC regulator mounting bracket into the empty slot and tighten the fastening screw 6 Connect the smaller female plug of an existing Y power connection cable or of the supplied Y cable to the DC regulator board 7 Connect the bigger plug of the Y cable to the PCs 4 pin power sup
47. screws covering 130 Window mount components and special tools 132 Removing the threaded insert 133 Inserting the window into the window collar 134 Inserting the window collar into the window mount 135 Inserting the threaded insert 135 Window cleaning 1 137 Window cleaning 2 137 Cleaning 138 Halogen filter exchange 141 Energy monitor calibration window 145 Gas flow 155 Functional block diagram electrics 156 Functional block diagram FOL connections 157 Functional block diagram safety circuits 158 User Manual OPTex A05070PTex LAMBDA PHYSIK 07 2005 INDEX A Address Documentation 10 Ait Intake cee iube lad Men ns oat eR ot SERRE 63 Aligning windows 127 Arrow buttons n 82 ASDeSIOS 31 AO eget ete Pu Ae 37 45 Assembling window 134 B Beam energy ssuessslriewnisf iciqueienibx dre 116 118 127 Seting Hr S cia ERU 98 Beam exit ore E es fie Seb aia ial due Pe 13 Beam guidance system Connecting eee bade ted Sadie ele kes 77 Beam profile
48. secured against unauthorized operation Restart laser operation according to the procedures described in Sections 7 2 and 7 4 1 105 OPERATION 106 User Manual OPTex A05070PTex LAMBDA PHYSIK 07 2005 MAINTENANCE This chapter describes the routine maintenance of the OPTex Follow the recommended maintenance intervals and procedures to ensure optimum performance Unless otherwise stated the descriptions in this section assume that the OPTex is PC controlled WARNING Risk of serious injury Always switch off the laser device when performing maintenance actions When performing maintenance actions which require the laser device to be powered on or require laser operation ensure that the maintenance area is at all times adequately secured and that no unauthorized persons can access the laser device All persons in the maintenance area shall be fully familiar with the applicable safety regulations and requirements 107 MAINTENANCE 8 1 8 2 108 Laser Logbook Prepare a laser logbook to keep a continuous record of data relating to laser operation This simplifies routine maintenance scheduling as well as problem location Laser Device Design For fail safe operation ease of maintenance and lowest perturbing radiation the internal components are arranged in two separate chambers see Section 2 3 on page 13 The partition between these two chambers supports the internal components and is used as co
49. secured against inadvertent starting Ensure that the electrical system is locked out and tagged out prior to servicing by locking the key switch of the laser device and tagging appropriate warning signs WARNING Potential eye and skin burns If the laser device is completely shut down for maintenance and repair work it must be secured against inadvertent starting Ensure that the radiation system is locked out and tagged out prior to servicing by locking the key switch of the laser device and tagging appropriate warning signs User Manual OPTex A05070PTex General Safety Aspects LAMBDA PHYSIK 07 2005 CAUTION Risk of gas leaks Switching off the laser device automatically closes the solenoid valves in the laser device s gas circuit This interrupts the gas flow in the laser device but does not evacuate the circuits in the laser device Also operating pressure remains in the external gas supply lines For additional safety close the corresponding external gas shut off valves when locking out the laser device Always tighten any screwed connections that have been loosened during maintenance and repair Any safety devices removed for set up maintenance or repair purposes must be refitted and checked immediately upon completion of the maintenance and repair work Ensure that all consumables and replacement parts are disposed of safely with minimum environmental impact and in accordance with the valid national and loc
50. trigger converter to check that a battery is inserted and that the battery is sufficiently charged Connecting the External Trigger Device 3 Insertthe FOL links into their respective sockets on the laser device see below 9 Trigger In socket Trigger Out socket 4 Connect the trigger in and or trigger out interconnect s into the BNC socket s on the trigger generator 5 Connect the trigger in and or trigger out interconnect s to the respective connection on the external trigger device s 71 INSTALLATION 5 7 72 Connect Power Supply Line Purpose Connect the laser device to the mains power supply Tools and Materials e Mains line with appropriate plug for local mains power supply provided Preparation CAUTION Incorrect power connection can damage the laser device Ensure that the laser device is configured for your local voltage and frequency 1 Check that the electrical requirements for the laser device indicated on the laser device type plate correspond with your local voltage and frequency The location of the type plate is shown in Figure 14 on page 48 2 Ensure that the key switch on the laser device is set to OFF Connecting the Mains Power Supply Line 3 Insert the female plug of the mains power supply line into the mains Socket located on the left hand side of the laser device 4 Insert the mains power supply line into the mains socket of the facility User Manual OPTex A0
51. 100 110 External interlock devices Gonnectirig Aso sie dice ic cet ie ares DU ie 66 External trigger generator Connecting emet ecu eere a tana 71 External Trigger mode 97 External triggering Sp cifications c ees ders See Mee ng 57 F Feet LOCALIOM u ea us en reist EA UE RANGE UT 13 Fiber optic light waveguides 17 157 Fiber optics convertor 67 FILL INERT 81 Fine wire 148 Fire safety en ede ede nn 37 Fire safety features 44 Flammable materials 37 Flammable substances symbol 4 FLUSH EXT button 81 111 113 FLUSH INT button 81 120 Flushing oo rr an Seen era 100 120 Premix gas line 100 110 FLUSHING button 81 59 ice BIN ge pares 17 157 Fundamental design 13 FUSES estare dub eee 38 148 G Gas cabinets 1 22 oll eh a hee Pe Te 60 Gas cylinder Pressure checking 91 Safety precautions
52. 2 1 4 34 The possibility of over pressure of the gas mixture containing fluorine or hydrogen chlorine creates potential hazards with the risk of leakage from the laser tube and gas pipes Under normal operating conditions the overpressure is less than 2 4 bar 3 4 bar abs respectively 2 0 bar 3 0 bar abs for the Fo version of the OPTex laser device In the event of a leak occurring the release of halogen gas constitutes the greatest hazard To remain even in a worst case under the MAK value of 0 1 ppm for Fluorine non ventilated rooms must have an air volume of at least 100 m3 For the installation in smaller rooms a sufficient air suction is necessary Further potential chemical hazards exist due to the formation of hydrofluoric acid if fluorine gas comes into contact with water Hydrofluoric acid can also be formed in the halogen filters used in the system due to Fluorine coming into contact with the hygroscopic components of the filter Ozone The formation of ozone due to the interaction of ultra violet light in particular at 193 nm with oxygen and high voltage discharge constitutes a potential hazard The MAK maximum acceptable concentration level value according to the German publication Technische Regel TRGS 900 des AusschuB f r Gefahrstoffe des Bundesministeriums f r Arbeit und Soziales and the PEL permissible exposure limit set by the American government agency Occupational Safety and Health Admi
53. 5 116 New Gas Fill Purpose Replace gases of insufficient quality in the laser tube with fresh gases We recommend a new gas fill when the beam energy is too low the static or dynamic gas lifetime has been exceeded the windows have been cleaned or replaced the laser device has been transported the laser tube has been re passivated The lifetime and energy yield of the laser gases is heavily dependent upon the conditions under which the laser is operated We therefore recommend to record the frequency of performing new gas fills in the laser logbook This enables to prepare a specific maintenance schedule Take into account however that the following situations reduce the lifetime and energy yield of the laser gases the laser tube has just been passivated the first fill has been made after several weeks without operation the wavelength has been changed the windows are contaminated the laser is operated at high energy or voltage values The composition and partial pressures of the gas mixture to be filled is specified in Section 4 7 4 on page 61 Take account of the remaining premix gas pressure Tools and Materials e Premix gas oylinder with a minimum of 10 bar remaining pressure Preconditions e Laser device switched on and laser control program started Preparation 1 Flush the premix gas line see Section 8 4 1 on page 110 2 Open the premix gas cylinder valve 3 Setthe
54. 5070PTex Connect Exhaust Line Option 5 8 LAMBDA PHYSIK 07 2005 Connect Exhaust Line Option Purpose Connect the optional exhaust line between the laser device exhaust port and the building ventilation system Tools and Materials e Mounting flange with 4 locating screws e Exhaust line e Additional blower not equipped for exhaust lines of more than 3 m length e Appropriate screwdriver or allen key to tighten locating screws e Connections to the ventilation system e Appropriate tool s for connections to the ventilation system Preparation 1 Ensure that the proposed exhaust line corresponds with the requirements indicated in Section 4 8 on page 63 Connecting the Exhaust Line 2 Place the mounting flange onto the exhaust port by aligning the locating holes in the flange with the threaded bore holes on the exhaust side of the laser device 3 Secure the mounting flange to the laser device by inserting and tightening the four locating screws Attach the exhaust hose to the mounting flange Check that the air intake filter is not obstructed Switch on the laser device according to Section 7 2 on page 90 Check that the exhaust fan and blower are working and sucking air out of the laser device 8 Switch off the laser device according to Section 7 5 on page 103 noon WARNING Toxic hazard Lead the exhaust hose from the laser device to an appropriate ventilation system Do not connect the exhaust h
55. 81 The laser tube is evacuated and filled with inert gas three times At the end of the third cycle a message appears to indicate that the windows can be exchanged The procedure can be aborted e g before exchanging the windows by clicking QUIT Following the laser tube flushing a new gas fill is necessary User Manual OPTex A05070PTex Start and Stop Laser Operation 7 3 2 4 7 4 7 4 1 LAMBDA PHYSIK 07 2005 Fill Laser Tube with Inert Gas This procedure is to be performed before dispatching the laser tube or laser device by clicking the FILL INERT button in the Flushing window see page 81 The laser tube is evacuated and refilled with inert gas Helium up to a pressure of 1500 mbar Following the laser tube flushing a new gas fill is necessary before restarting laser operation see Section 8 5 on page 116 Start and Stop Laser Operation This section describes how to start and stop the laser For more information about changing operation modes and entering operating parameters please refer to Section 7 3 Start Laser Operation Purpose Start the laser for designated use To enable generating the laser beam the high voltage circuit is to be activated Tools and Materials e Protective eyewear suitable for the OPTex laser wavelength Preconditions e Beam path checked see Section 7 1 e Excimer laser gases and purge gas turned on as required see Section 7 2 1 e Laser and PC swit
56. A LAMBDA PHYSIK USER MANUAL OPTex 07 2005 LP Part Number 263 292 Document Code A0507OPTex U S A Lambda Physik USA Inc 3201 West Commerical Blvd Ft Lauderdale FL 33309 USA Tel 1 954 486 1500 1 800 EXCIMER Fax 1 954 486 1501 eMail marketingusa lambdaphysik com Internet http www lambdaphysik com optex GERMANY Lambda Physik AG Hans B ckler Strasse 12 D 37079 G ttingen Germany Tel 49 551 6938 0 Fax 49 551 68691 eMail salesgermany lambdaphysik com JAPAN Lambda Physik Japan Co Ltd German Industry Center 1 18 2 Hakusan Midori ku Yokohama 226 0006 Japan Tel 81 45 939 7848 Fax 81 45 939 7849 Marubun Corp Marubun Daiya Bldg 8 1 Nihonbashi Odenmacho Chuo ku Tokyo 103 8577 Japan Tel 481 3 3639 9811 Fax 481 3 3662 1349 CONTENTS INTRODUCTION LASER DEVICE FUNDAMENTALS SAFETY SPECIFICATIONS AND REQUIREMENTS INSTALLATION LASER CONTROL OPERATION MAINTENANCE TROUBLESHOOTING DIAGRAM SCHEMATICS LIST OF FIGURES INDEX A05070PTex LAMBDA PHYSIK 07 2005 TABLE OF CONTENTS 1 1 1 2 1 3 1 4 1 5 a 1 6 2 1 2 2 2 3 2 4 2 5 2 6 2 7 2 8 2 9 1 1 1 2 1 3 2 1 2 2 2 3 4 1 4 2 5 1 5 2 INTRODUCTION 1 About this 1 Purpose Availability and Use 1 Intended
57. Energy Monitor 2 8 2 9 LAMBDA PHYSIK 07 2005 Energy Monitor An energy monitor where fitted continually determines the beam energy by sliding averaging of each of 16 pulses The transient effect takes less than 100 pulses The energy monitor converts the determined value into a digital value for transmission through an FOL link to the laser control unit As the energy monitor does not supply absolute measured values it has to be calibrated by means of a calibrated energy meter or power meter Apart from the additional energy and power detector no further measures are necessary The necessary calibration procedure is described in the maintenance section Chapter 8 Operating Modes The pulse energy output energy of an excimer laser is dependent upon the charging voltage high voltage and condition age of the excimer laser gas If the pulse energy E is considered as a function of the charging voltage U the result is approximately the function shown in Figure 8 E mJ U kV Figure 8 Pulse energy as a function of charging voltage As excimer laser gases age the pulse energy obtained from a given charging voltage will decrease 21 LASER DEVICE FUNDAMENTALS The laser can therefore run either in the Energy Constant mode EGY CONST or in the High Voltage Constant mode HV CONST lf the Energy Constant mode is selected the laser control continuously adjusts the high voltage to achi
58. F Xenon Chloride and Xenon Fluoride XeF These produce intense UV light Ultra Violet on distinct spectral lines between 157nm and 351nm The NovaTube Innovation All Lambda Physik excimer lasers use the NovaTube technology The NovaTube has been conceived to virtually eliminate the effects of corrosion and contamination To ensure strict adherence to these design objectives all laser tube components are assembled in a clean room Optimized electrode materials combined with an improved preionization scheme minimizes electrode erosion These major improvements in laser tube technology lead to an increased laser tube lifetime 11 LASER DEVICE FUNDAMENTALS 2 2 Laser Terminology According to ISO 11145 ISO 11145 Optics and Optical Instruments Lasers and Laser Related Equipment Vocabulary and Symbols contains a list of laser terminology To prevent misunderstandings this manual strictly differentiates between laser and laser device see Figure 1 Thus Start laser device means that the power is off and shall be turned on To start the laser means to switch on the laser beam and start lasing Laser Unit Laser Assembly Device Laser Telescope Mirrors Lenses Focussing A Supply Units Power Cooling Measuring and Control Unit Handling Systems ary Robotics Workpiece MOT Positioning
59. F 0 106 96 Fo and 1 515 96 Kr in Ne 0 114 0 023 H and 1 061 Xe in Ne Purity 99 995 for Fo He premix 99 9 for all other premix gases Inlet pressure range 4 5 to 5 2 bar abs Flow 0 05 to 0 5 I s Recommended cylinder 101 size Helium inert gas Purity 99 995 Inlet pressure range 4 5 to 5 2 bar abs Flow 0 8 to 3 0 l s Recommended cylinder 101 200 bar 2800 psi size 61 SPECIFICATIONS AND REQUIREMENTS 4 7 5 62 Optimum Gas Mixtures Single Gases The gas mixtures detailed in this section are current as at the indicated date of release As the optimum correlation of gases for excimer lasers is continuously being researched the values in this section are subject to variation CAUTION Risk of tube contamination Only use gas cylinders which have at least 5 bar 70 psi remaining pressure At lower pressures impurities can be carried from the gas cylinder walls into the laser tube Gas type Gases Pressure wavelength Fa 157 nm Fa 0 133 He 99 867 ArF 193 nm Fa 0 106 Ar 3 333 Ne 96 561 KrF 248 nm Fa 0 106 Kr 1 515 Ne 98 379 XeCl 308 nm HCl 0 110 Ho 0 020 1 060 98 810 User Manual A05070PTex Air Intake and Exhaust 4 8 LAMBDA PHYSIK 07 2005 Air Intake and Exhaust The OPTex has one air intake and one air outlet exhaust for each chamber electronics chamber and laser tube chamber see
60. Filter Disposal Used halogen filters may contain an small amount of halogen gas that has not yet reacted Unused filters as well as filters used in accordance with their intended use must be disposed of in accordance with all relevant local regulations as well as the disposal procedure contained in Section 8 7 2 Halogen Filter Exchange Purpose Exchange the halogen filter connected to the vacuum pump Tools and Materials e Halogen filter replacement kit NOTE Keep the protective caps provided with the kit for the disposal of the used halogen filter e Plastic gloves e Safety glasses e Set of wrenches Preconditions e Laser device switched on and laser control program started no laser radiation being emitted User Manual OPTex A05070PTex Halogen Filter Maintenance LAMBDA PHYSIK 07 2005 Preparation 1 Flush the premix line see Section 8 4 1 on page 110 2 Switch off the laser device 3 Remove the front service panel Removing the Used Halogen Filter WARNING Toxic hazard The halogen filter is hygroscopic and contains oxidizing agents Always wear safety glasses and gloves when changing the halogen filter Ensure adequate ventilation Be aware of the hazards described in Section 3 2 1 3 4 Turnthe laser control unit to the left side out of the laser device see Figure 60 C Figure 60 Halogen filter exchange 5 Unscrew and remove the nut situated at the top of the halogen filter cartr
61. IGURES 159 LIST OF FIGURES FIGURES 160 Figure 32 Figure 33 Figure 34 Figure 35 Figure 36 Figure 37 Figure 38 Figure 39 Figure 40 Figure 41 Figure 42 Figure 43 Figure 44 Figure 45 Figure 46 Figure 47 Figure 48 Figure 49 Figure 50 Figure 51 Figure 52 Figure 53 Figure 54 Figure 55 Figure 56 Figure 57 Figure 58 Figure 59 Figure 60 Figure 61 Figure 62 Figure 63 Figure 64 Figure 65 Setting the repetition rate 96 Burst mode burst counter and user counter 97 Setting the energy value for the EGY Const mode 99 Beam shutter on laser device 102 Disabling power 104 Turning off gases 105 Sealing plate 119 Safety stick and discharge connector 121 Discharging the capacitors 121 Clamping ring of the beam path shielding 122 Beam path shielding accessory 122 Beam path adapter 123 Removing the energy monitor 123 Energy monitor rear side 124 Exchanging the window mounts 124 O ring and contact pressure ring 126 Adjustment apertures 127 Light spots on adjustment laser housing 129 Window alignment screws 129 Window alignment
62. L ERROR appears in case of the following conditions or failures Remote external safety interlock cover interlocks tube chamber or exceeding tube temperature coverinterlock electronics chamber or exceeding temperature in the electronics chamber These signals are interrupting laser operation All power supply lines with more than 42 V DC and the mains supply line except the housing circulation power supply are interrupted the triggering is blocked Laser operation can be restarted when the cause of the error has been rectified Operation Errors The error message OPERATION ERROR qualifies the deviation of laser operation parameters from limiting values concerning data transfer and processing HV charging time and HV value leak rate HV module temperature Thyratron power supply Overpressure in the laser tube more than 4 5 or 4 1 bar These Operation Errors are stopping laser operation After rectifying the error the laser device has to be switched off by turning the key switch and then on before laser operation can be restarted NOTE In case of overpressure in the laser tube the solenoid valves of the valve assembly are closed automatically 23 LASER DEVICE FUNDAMENTALS 2 10 1 2 10 2 2 10 3 24 Safety Interlock The Remote interlock circuit is supplied with 20 mA by an own power supply unit Interruption of the power supply line leads to an interlock
63. OPTex laser device is to be inspected and checked at regular intervals Defects such as loose connections or scorched cables must be rectified immediately User Manual OPTex A05070PTex Specific Safety Aspects 3 2 2 3 LAMBDA PHYSIK 07 2005 Gas Safety WARNING Toxic hazards The gas system of an excimer laser contains a mixture of fluorine or hydrogen chloride gas Inhalation of or skin contact with halogens should be avoided The properties of compressed gases such as pressure diffusibility make the handling of compressed gases hazardous Laser gas mixtures invariably contain components which are corrosive toxic and oxidizing Therefore extreme care must be taken when handling these mixtures As a general guide to safe working practices the following precautions should be observed when working with gas equipment Always follow these guidelines and take additional precautions if necessary e Gas protective equipment such as masks must be available at the entrance to the area where the laser is located Ensure that a protective mask with a protective gas filter or a complete breathing apparatus set is placed in a clearly displayed and accessible part of the operating area e ltis recommended that personnel work in pairs and within sight and sound of each other although not necessarily in the same working area Only trained and competent personnel should be permitted to handle premix gas cylinders and regula
64. Operating system Windows 3 x Windows 95 or Windows NT Options 25 pin to 9 pin interface adapter when the only free RS232 interface COM port is 9 pin Step down transformer line voltage to 6 VDC As the laser control software runs under Windows and the mouse is connected to COM1 we recommend plugging the convertor into 2 As standard the convertor draws its current from the PC For this vacant slot is required in the PC An additional mains socket is therefore required near to the PC As an option the convertor can draw its current from the mains A suitable transformer is provided User Manual OPTex A05070PTex External Trigger In and Pre Trigger Out 4 6 4 6 1 LAMBDA PHYSIK 07 2005 External Trigger In and Pre Trigger Out The laser device can be connected to an external trigger generator and or a device requiring a pre trigger impulse To convert electrical signals from external devices to optical signals required by the laser device and vice versa use the TWE trigger convertor The trigger light pulses are transferred to the laser device by using FOL s TWE Trigger Converter Option The TWE trigger converter is a battery operated device which is optically connected to the dedicated trigger in sockets on the laser device and electrically connected to the external device s The specifications of the TWE trigger converter are Weight approx 150g Electrical connectors 50
65. Optical connectors approx 1 5 m HP Battery Alkaline 9 V 9 0 F22 gt 6 months lifetime Operating temperature 15 to 65 External Trigger In Signal The external trigger in signal triggers the OPTex from an external trigger generator The specifications for the electrical input and optical output on the TWE trigger converter are Electrical input Voltage 4210 5 Impedance 500 Pulse width 2 300 ps Optical output Power 50 uW 665 nm Pulse width gt 4us Repetition rate lt 200 Hz Delay typ 30 ns 57 SPECIFICATIONS AND REQUIREMENTS Pre Trigger Out Signal This signal is a pre trigger impulse that is sent from the OPTex to an external device The specifications for the optical input and the electrical output on the TWE trigger converter are Optical input Power 1 uW 665 nm Repetition rate lt 200 Hz Delay typ 25 ns Synchronization Electrical pre trigger pulse occurs approx 100 ns before the laser pulse Electrical output Voltage gt 3 5 V Impedance 500 Pulse width gt 1us 58 User Manual OPTex A05070PTex Gas Requirements 4 7 LAMBDA PHYSIK 07 2005 Gas Requirements The active medium in an excimer laser is a mixture of a rare gas a halogen gas and a buffer gas This gas mixture is to be supplied to the OPTex from a premix gas cylinder The gas mixture needed depends upon the wavelength in which the laser is to be operated Gas Mixture Wav
66. Software 3 Insert the control software floppy disk into the PC s disk drive 4 Select and execute the install exe file on drive a For instance with Windows 958 you can use the Execute and Search functions 5 Follow the instructions on the screen 6 When INSTALLATION COMPLETE appears click QUIT The program group WINLAC appears on the screen The laser control software can be started by clicking the icon 7 Click the WINLAC icon The WINLAC screen appears 8 Select OPTIONS from the SYSTEM menu 9 Click the COM port corresponding with the port to which the laser device is connected and confirm the selected port by clicking OK The software is completely installed on the PC Close the laser control screen and terminate the software by clicking Exit User Manual OPTex A05070PTex Connect External Trigger 5 6 LAMBDA PHYSIK 07 2005 Connect External Trigger Purpose Connect the laser device to an external trigger generator trigger in Socket and or device requiring a pre trigger impulse trigger out socket Tools and Materials e TWE Trigger Convertor with battery optional e External trigger generator when required e Interconnecting cable s for trigger in and or trigger out fitted with BNO B plugs for connection to the TWE Trigger Convertor Preparation 1 Ensure that the laser device is not connected to the mains power supply 2 Press the BAT button on the
67. TY are correctly set see Section 7 3 1 1 on page 96 and Section 7 3 1 2 on page 97 7 Ensure that the intended operating mode EGY Const or HV Const is selected and that the energy or high voltage values are correctly set see Section 7 3 1 5 on page 98 NOTE The CONTROL light on the laser control screen is yellow and the CONTROL button turns to red when the EGY Const mode is selected 8 Click REPETITION ON BURST EXT TRIGGER or WATCHCOUNT see Figure 23 on page 80 to start laser operation Laser pulses are emitted at the given repetition rate This can be recognized by an audible clicking User Manual OPTex A05070PTex Shut Down Laser Device 7 4 2 7 5 7 5 1 LAMBDA PHYSIK 07 2005 Stop Laser Operation Purpose Switch off the laser and disable the high voltage circuit Tools and Materials e Protective eyewear suitable for the OPTex laser wavelength Preconditions e Laser operates laser radiation being emitted Stopping Laser Operation 1 Click OFF on the laser control screen see H in Figure 23 on page 80 to stop the currently active laser operation and enter stand by mode 2 Click LASER OFF on the laser control screen see G in Figure 23 on page 80 or press space bar on keyboard to disable the power supply of the HV module The laser radiation indicator light on the laser device goes out 3 Close the beam shutter by inserting the beam dump into the beam exit aperture and turning it cl
68. adjustment laser beam from beam exit see C in Figure 49 and the reflected light spots from the front B and rear A window A B Figure 49 Light spots on adjustment laser housing NOTE Due to an extreme inclination of the rear window the laser beam can be additionally reflected within the laser tube In such cases there will be two light spots from the rear window 12 Use the 1 8 allen key to turn the rear window alignment screws until the reflected light spot is congruent with the emitted adjustment laser beam Figure 50 Window alignment screws 129 MAINTENANCE 130 13 Use the 1 8 allen key to turn the front window alignment screws until the reflected light spot is congruent with the emitted adjustment laser beam 14 Switch off the adjustment laser 15 Replace the energy monitor and or beam path shielding where fitted see page 125 16 Insert and tighten the right hand and left hand service panel using the 3 mm allen key Fine adjusting the Windows NOTE In the following description we assume that the laser is to be adjusted for max beam energy When adjusting to the best beam profile the steps are nearly identical to those listed below 17 Use the 5 mm allen key to loosen and remove the two screws covering the window alignment screws on the laser device s left hand or right hand side see Figure 51 A Figure 51 Window alignment screws covering NOTE Either fine adjust the
69. al regulations for waste disposal 29 SAFETY 3 2 30 Specific Safety Aspects Specific safety aspects are the physical hazards related to the system the protection of the operators or users of the system against these hazards the constructive protective measures against these hazards Lasers and laser systems are classified according to their relative hazards These classifications can be found in the American National Standard for the Safe Use of Lasers ANSI Z 136 1 1968 FDA 21 CFR 1040 10 and 1040 11 IEC 825 and in the European Standard EN 60625 Within this classification the OPTex is a Class IV high power laser device when operated with open covers during servicing conditions and must therefore be regarded as a potential hazard to the human operator The laser beam must also be regarded as a potential fire hazard A Class IV laser system is not enclosed and therefore requires several safety precautions Class IV is the most powerful and potentially hazardous category of lasers Direct and scattered radiation from Class IV products are considered acute hazards to the eyes and skin Precautions include eye and skin protection remote interlocks and warning labels NOTE OPTex is a class IV laser device However when connected to an OEM device or with housing closed it becomes a Class laser device A Class laser device is defined as a laser system which is supplied with a special enc
70. alls can contaminate the laser tube and cause loss of passivation e Replacement premix gas cylinder as specified in Section 4 7 4 on page 61 e Appropriate wrench for the gas cylinder fittings e Stainless steel cap to seal gas line e Liquid leak tester e g SNOOP e Ethanol e Cleaning paper Preconditions e Laser device switched on and laser control software started Preparation WARNING Toxic hazard Always thoroughly flush gas lines leading to a premix gas cylinder before disconnecting the gas cylinder 1 Close the gas cylinder valve and pressure regulator in the premix gas line Open the premix gas cylinder valve Set the pressure regulator in the premix gas line to 5 bar abs Close the gas cylinder valve and the pressure regulator in the inert gas line 5 Open the valve on the inert gas cylinder 6 Set the pressure regulator in the inert gas line to 5 bar abs PORN User Manual OPTex A05070PTex Gas Line Maintenance LAMBDA PHYSIK 07 2005 Flushing the Premix Gas Line 7 Perform the flushing procedure described in Section 8 4 1 on page 110 at least twice Exchanging the Premix Gas Cylinder 8 Unscrew the corresponding premix gas line connection NOTE Depending on the manufacturers instructions the pressure regulator may to be exchanged too 9 Sealthe premix line with the stainless steel cap to prevent corrosion 10 Exchange the premix gas cylinder 11 Remove the stainless st
71. am guidance system 3 Connect the beam guidance system with the purge gas connection tube using the second clamping ring 4 Connect the purge gas line see Figure 21 C with the purge gas connection tube Finalization 5 Evacuate the beam path shielding and where fitted refill with purge gas to prepare starting laser operation see Section 7 2 on page 90 5 11 New Gas Fill CAUTION Risk of damaging the laser tube For transportation the laser tube is filled with helium at a pressure of 1500 mbar Never attempt to start laser operation with this filling Always perform a new gas fill before starting laser operation see Section 8 5 on page 116 78 User Manual OPTex A05070PTex 6 1 1 LAMBDA PHYSIK 07 2005 LASER CONTROL This chapter describes the laser control software simulated on an PC PC Controller The information in this chapter is not sufficient to enable you to fully perform the operation and maintenance procedures initiated through the respective software commands These procedures are described in the operating and servicing sections of this manual see Chapters 7 and 8 Laser Control Software NOTE To enable control through a PC the laser control software WINLAC provided on floppy disk has to be installed on a PC complying with the specifications in Section 4 5 The necessary connections and the software installation procedure are described in Chapter 5 Start Laser Control Software Se
72. anel removed 16 OPTex controlled through aLaptop 17 Cross section of the laser tube 18 Pulse energy as a function of charging voltage 21 Voltage increase in the Energy Constant mode 22 Energy decrease in the HV Constant mode 22 LASER ON indicator lamp and interlock connector 42 Shutter on laser device s beam exit 43 Key switch 45 Labels on front left and top of the OPTex 48 Labels on rear right and top of the OPTex 49 Dimensions of laser device 52 Front and side views 53 Bottom view of the 54 Remote interlock socket 55 Beam exit flange 77 Purge gas connection tube for beam guidance system 78 Laser control screen 79 Buttons on laser control screen 80 Counters and displays on laser control screen 84 Lights on laser control screen 85 Checking gas cylinder pressure closing pressure regulator 91 Opening gas cylinder valve 91 Setting pressure regulator to required pressure 92 Enabling power circuits 93 Laser control screen warm up period 94 Laser control screen options window 94 F
73. aser device 3 2 3 6 General Safety Features The OPTex incorporates the following general safety features e Key switch controlled laser operation see Figure 13 A The laser device can only be switched on with the key switch This prevents inadvertent or unauthorized starting of the laser It cannot be operated with the key in the OFF position and the key cannot be removed in the ON position Figure 13 Key switch e No polychlorinated biphenyl PCB is used e No asbestos is used LAMBDA PHYSIK 07 2005 45 SAFETY 3 3 46 Safety Compliance List The equipment has been tested and found to comply with the limits of the European Council Directives about bringing the laws of the member states into line relating to electromagnetic compatibility 89 336 EEC and low voltage 73 23 EEC The OPTex complies with the following standards EN 50082 1 electromagnetic immunity EN 50081 1 and EN 55011 electromagnetic emission and radio disturbances EN 61000 4 2 electrostatic discharge ENV 50140 and ENV 50141 radiated susceptibility EN 61000 4 4 fast transient bursts EN 61010 1 safety requirements for electrical equipment for measurement control and laboratory use from the EN 60601 series safety requirements for medical electrical equipment if applicable EN 60601 1 general requirements for safety EN 60601 1 4 collateral standard programmable electrical medical systems EN
74. avoid injury caused by the laser beam Always follow these guidelines and take additional precautions if necessary 36 When eyewear is necessary make sure it has the proper optical density for the laser wavelength All other personnel in the vicinity of the laser should also be ordered to wear protective eyewear Only qualified personnel should be permitted to operate the laser Never intentionally look directly into any laser beam Avoid indirect viewing of direct or reflected laser radiation Specular reflections from reflective surfaces can be as dangerous as the direct laser beam Do not view the beam through optical instruments unless the optics are designed to filter the laser wavelength Precautions must be taken to ensure that there are no reflecting objects in the path of the laser beam Do not deviate from standard operating procedures when working with class IV laser equipment Use lasers only in approved applications and locations Take adequate precautions to prevent unauthorized personnel from entering the area where a class IV laser is operating Do not use lasers around untrained personnel who may injure themselves inadvertently Ensure that all personnel in the area observed proper safety precautions Do not assume the laser system is aligned Misaligned optics can cause unintended exposure Report all incidents of exposure to your supervisor Warning signs indicating the laser enclosed area should be clearly
75. change Exchange is the removal and disposal of damaged or spent windows and the insertion of new or undamaged windows Exchanging the windows is necessary if the windows are damaged e g scratched if the windows are unable to be cleaned e g burned in deposits after a specific number of pulses dependent on gas mixture wavelength laser operation at high voltages or energy NOTE Spare premounts for the windows are optionally available To maximize uptime keep a set of ready to use windows mounted in spare premounts This enables contaminated windows to be cleaned at convenience while the laser is running User Manual OPTex A05070PTex Windows Maintenance 8 6 1 LAMBDA PHYSIK 07 2005 Windows Exchange Purpose Remove contaminated or damaged windows rear mirror and output coupler from the laser device and insert new or clean windows Prior to removing the window mounts the laser tube has to be flushed With this procedure the gas mixture is pumped out of the laser tube and the tube is refilled with the gas connected to the inert connection Tools and Materials e Setof allen keys service box e Premounted windows or sealing plates see Figure 38 in service box Figure 38 Sealing plate e Disposable skin tight plastic gloves e Cylinder of inert gas with sufficient remaining pressure NOTE During the flushing procedure approx 25 liters of inert gas at 4bar abs are required T
76. ched on laser control software started see Section 7 2 2 Preparation 1 Take off your watch ring or any other jewelry which could cause reflections that divert the laser beam from the intended path 101 OPERATION 102 Starting Laser Operation WARNING Risk of serious injury through laser radiation When laser operation is started laser radiation is emitted from the beam exit aperture Strictly adhere to the safety precautions detailed in Chapter 3 2 For Fo version Ensure that the beam guidance system is prepared for laser operation depending on current configuration vacuum pump switched on or purge gas supply turned on 3 Open the beam shutter Figure 35 A by turning the beam dump counter clockwise and removing it from the beam exit aperture Figure 35 Beam shutter on laser device 4 Wait until the warm up indicator disappears and the READY lamp on the laser control screen lights This indicates that the laser device has warmed up NOTE The laser cannot be started during the warm up period When attempting to start the laser during this period a warning message appears on the screen 5 Click LASER ON see N in Figure 23 on page 80 The laser radiation indicator light on the laser device flashes The storage capacitors are supplied with high voltage Laser operation can be started after approx 5 seconds 6 Ensure that the repetition rate REPET RATE and number of pulses QUANTI
77. ching on 101 Laser assembly Has 12 Laser control i a eve Pied ates are RU ES 17 Laser control program BUttOUlS ee nee Mates atout 80 Counters and displays 84 Description a ecu he biggie ation Ne RI RR einge 79 EXITING bote s rapi A eei eot bs Fut 103 installing a dre ped eae Des 70 HODIS debe etuer eR x xe eet aes bag Den YR 85 Starting ete testes Rog einen aot apace stan miele Sai ee ite 79 Terminating eset seed CAR 80 Laser control screen 80 Laser control unit iis epus Eher a ne NER E e 17 Laser device DIMENSIONS ade else kan Ped bles 52 SLAMING Piste er re 92 Switching x xx sat soda Te Tagen 92 Laser gases Specifactions 61 TUNING OT RE LER eben 104 90 Laser logbook 89 108 116 EASER OEF DUttOI 2 422 248 ue REESE REX AERE Ed 82 LASER ON button 83 Laser on indicator lamp 42 Laser operation die athena ale Rx ER E 89 Pressure and temperature 99 SIAHING Se ea ia A E 101 SUOPPING x eui pale
78. cted to the 24 V DC power supply line and FOL The power supply line A does not need to be disconnected providing that care is taken not to damage or break the wire and or links Figure 45 Energy monitor rear side Exchanging the Window Mounts CAUTION Risk of damaging window mount and window There is significant overpressure in the laser tube Press the window mount against the laser tube while loosening Loosen the holding screws crosswise in even steps 19 While pressing the window mount see Figure 46 A against the laser tube carefully loosen the four allen screws fixing the window mount and remove the window mount Figure 46 Exchanging the window mounts User Manual OPTex A05070PTex Windows Maintenance LAMBDA PHYSIK 07 2005 20 21 A short hissing sound caused by the over pressure in the laser tube indicates that the tube is now open The message optic open appears on the laser control screen The inert gas valve opens to compensate for the pressure drop with inert gas This prevents air from entering If the laser tube is not closed this will happen about every two seconds Immediately mount the sealing plate see Figure 38 on page 119 or replace pre mounted windows For description of disassembling and assembling the window mounts see Section 8 6 3 on page 132 Carefully tighten the allen screws on the window mount crosswise and in even stages After replacing the window the
79. d where fitted the purge gas for the beam guidance system to enable laser operation WARNING Health hazard through halogen gas leakage To minimize the risk of gas leaks keep the gas cylinder valves closed except when running the laser in the energy constant mode EGY Const or when performing a new gas fill NOTE The purge gas for the beam guidance system is to be turned on at least 5 minutes before starting laser operation Tools and Materials e Gas cylinders with gases as specified in Section 4 7 on page 59 and with a remaining pressure of at least 5 bar abs Preconditions e Gas cylinders for the respective laser gases connected to the corresponding connections on the laser device e Gas cylinder valves closed User Manual OPTex A05070PTex Start Up Laser Device Turning On the Laser Gases 1 Check the pressure gauge see Figure 26 A indicating the pressure in the premix gas cylinder to ensure that there is a remaining cylinder pressure of at least 5 bar abs S asse gt 3 Figure 26 Checking gas cylinder pressure closing pressure regulator CAUTION Incorrect operation can damage the pressure regulator Never close or attempt to reset the pressure regulator when the gas cylinder valve is open 2 the valve on the premix pressure regulator see Figure 26 B counter clockwise to its stop according to the manufacturers instructions to ensure that the pressure regulator
80. e Calibrating the Energy Monitor WARNING Risk of injury through laser radiation When operating the laser with an open shutter all safety precautions concerning laser class IV operation detailed in Chapter 3 are to be strictly enforced 5 Setthe operating parameters set repetition rate to 5 Hz HV to 100 96 in HV Const mode 6 Select System and Adjust energy from the menu bar A new window appears 7 Click on Calibration Laser operation is starting in Burst mode 150 laser pulses are being emitted The energy value is measured by the external energy or power meter 8 Read external energy meter NOTE When using an power meter the value of the reading in W has to be converted into mJ Multiply a W reading by 100 and divide by the repetition rate User Manual OPTex A05070PTex Energy Monitor Calibration LAMBDA PHYSIK 07 2005 9 Enter the measured beam energy through the numerical keys into the new window see Figure 61 that automatically appears after 150 pulses have been emitted coM2 orrume OPTex Exit RU uM EMERGE Calibrate Energy a VALUE EHE O a HV TUNING RANGE INPUT REFERENCE VALUE ap 50 OK CANCEL vi em 4 A PEM ERROR WATCHCOUNT 0 Figure 61 Energy monitor calibration window 10 Confirm the e
81. e This indicates a leak or a defective valve or pressure sensor Fault in the gas supply line evacuating or filling time exceeded time out error Discharge capacitor s charging time exceeded Warning light for exceeding temperature tube outside more than 60 CPU or communication failed The temperature of the HV power supply unit is too high the fuse is blown off orthe line voltage is too low Overvoltage in the HV power supply circuit The thyratron is not receiving power or heating circuit failed The lamp flashes if the memory check failed Laser operating data and status information are saved on the EEPROM approx every two minutes User Manual OPTex A05070PTex Laser Control Software LAMBDA PHYSIK 07 2005 L1 L2 L3 STATICAL ERROR INTERLOCK LASERHEAD CHAMB ELECTRONIC CHAMB WATCHCOUNT EXT TRIGGER BURST REPETITION ON LASER ON WARM UP Gas mode Flashes red to indicate an error interrupting laser operation Laser operation is automatically restarted when the cause of the error has been rectified To ease troubleshooting one or more of the lights below STATICAL ERROR L1 to L3 are also red External safety interlock remote circuit is open The right hand left hand or top service panel is open or the tube temperature is too high The front panel is open or the electronics chamber temperature is too high The storage capacitors are supplied with
82. e the graphical display turns yellow Counter indicating the current pulse energy for laser operations in the EGY Const mode Counter indicating the current repetition rate for internally triggered laser operations Counter indicating the current amount of laser pulses to be generated in Burst or internally set Watchcount mode User Manual OPTex A05070PTex Laser Control Software 6 1 3 3 LAMBDA PHYSIK 07 2005 F Counters During laser operation the number quantity of pulses are displayed as burst counter counts down and user counter counts up HIGH VOLTAGE Graphical and numerical display indicating the current high voltage level within the tuning range in percent for operations in the HV Const mode Lights In Figure 25 each light is denoted with a letter or letter and digit combination This denotation serves as a cross reference to the corresponding description in this section A B C D COM2 OPTex ArF Exit vac LH PRE INERT VALUE J T 3 NEw FILL FLUSHING HV TUNING RANGE MAX PRESSURE 3350 mbar A E Ge inane Diae 5 WARM UP i m usmon pem REPET RATE QUANTITY MIN pd Hz Qju mmur G DEM EDDND L 8 sTATICAL ERROR L1 D INTERLOCK LASERHEAD FILL gt OVERVOLTAGE L2 ELECTRONIC CHAMB CHARGING THYRATRON L3 1
83. e to moisture when it contains halogen or traces of halogen as this will corrode immediately e Avoid long and complicated line routings These can cause impurities to enter the system Use the shortest possible pipe lengths e All fittings used throughout the gas line must be clean oil free and leak proof Avoid complicated fittings e Carefully check for leaks e Never use gas lines that have been used for other gases User Manual OPTex A05070PTex Gas Lines Installation 5 9 2 LAMBDA PHYSIK 07 2005 Connect Gas Supply Lines Purpose Connect the gas supply lines to the laser device Tools and Materials e Appropriate gas cylinder s and pressure regulator s NOTE Use only gas cylinders with a remaining pressure of at least 5 bar abs e Gas supply lines pipes NOTE The copper pipes provided for the connection of the laser device to the gas supply are only intended for initial commissioning For the permanently installed laser device use stainless steel pipes as specified in Section 4 7 1 on page 60 e 6mm Gyrolok gas connector s one for each gas line e 9 16 wrench provided e Tools for shaping and cutting stainless steel tubing e Appropriate tools for gas cylinder and pressure regulator connections Preparation CAUTION Gas connectors can be easily damaged Always use an appropriate tool to cut stainless steel pipes Do not use a saw Do not use lubricants 1 Ensure that the app
84. eam Path Shielding Fa version only 12 Open the clamping ring see Figure 41 A to disassemble the beam path shielding Figure 41 Clamping ring of the beam path shielding 13 Remove the beam path tube centering ring and clamping ring from the flexible tube see Figure 42 A B C D E Figure 42 Beam path shielding accessory Key to Figure 42 A Beam path adapter B Flexible tube C Clamping ring D Centering ring with O ring E Beam path tube 122 User Manual OPTex A05070PTex Windows Maintenance LAMBDA PHYSIK 07 2005 14 Loosen and remove the flexible tube from the beam path adapter The flexible tube is secured through four allen screws Figure 43 Figure 43 Beam path adapter Key to Figure 43 A Pressure reducing valve B Beam path adapter C Fixing screws D Flexible tube 15 Remove the O ring and contact pressure ring located between the beam path adapter and the window mount Removing the Energy Monitor where fitted 16 Disconnect the FOL from the connection on the top of the energy monitor see Figure 44 A Figure 44 Removing the energy monitor 17 Loosen and remove the screws attaching the energy monitor see Figure 44 B 123 MAINTENANCE 124 18 Carefully pull the energy monitor out of the locating bores in the laser tube frame and lay it down NOTE The energy monitor is fixed at the front of the laser tube by two locating pins see Figure 45 It is conne
85. earing of personal protective equipment WARNING Risk of serious injury through incorrect operation Personnel entrusted with work on the OPTex must have read the instruction manual and in particular the safety instructions before beginning work Reading the instructions after work has begun is too late The necessity of reading the instruction manual applies especially to persons working only occasionally on the OPTex e g during setting up service or maintenance Use protective equipment e g protective eyewear wherever required by the circumstances or by law User Manual OPTex A05070PTex General Safety Aspects LAMBDA PHYSIK 07 2005 Ensure that all safety relevant labels are attached to the laser device in accordance with the label location diagrams in Section 3 4 1 on page 48 and local regulations Make sure that these labels are always complete and perfectly legible If any labels are missing immediately inform Lambda Physik In the event of safety relevant modifications or changes in the behaviour of the OPTex during operation stop the laser device immediately and report the malfunction to the competent authority person e g Lambda Physik Service Never make any modifications additions or conversions which might affect safety without the suppliers approval This also applies to the installation and adjustment of safety devices and valves Spare parts must comply with the technical requirements spec
86. ecific Operational Phases Take the necessary precautions to ensure that the OPTex is used only when in a Safe and reliable state Operate the laser device only if all protective and safety oriented devices such as removable safety devices emergency shut off equipment and exhausters are in place and fully functional In the event of malfunctions stop the laser device immediately and lock it Have any defects rectified immediately Before starting the OPTex laser device ensure that nobody is at risk Never switch off or remove suction and ventilation devices when the laser device is in operation Observe the adjusting maintenance and inspection activities and intervals set out in the instruction manual including information on the replacement of parts and equipment These activities may be executed by skilled personnel only Brief operating personnel before beginning special operations and maintenance work and appoint a person to supervise the activities In any work concerning the operation conversion or adjustment of the OPTex and its safety oriented devices or any work related to maintenance inspection and repair always observe the start up and shut down procedures set out in the instruction manual and the information on maintenance work Ensure that the maintenance area is adequately secured WARNING Potential electrical hazards If the laser device is completely shut down for maintenance and repair work it must be
87. ed from a squeeze bottle containing ammonium hydroxide may be used to detect leaks at suspected points Filter paper moistened with potassium iodide solution is a very sensitive means of detecting fluorine in concentrations as low as approximately 25 ppm The potassium iodide paper should be held with the aid of a long tongs or forceps and will darken and turn black when fluorine is present Fluorine odor is sufficiently strong to be detectable in very low concentrations at 0 14 ppm Fluorine will also fume readily in air e Adequate ventilation is essential See the corresponding Installation Conditions manual for the specifications of the required air flow WARNING Toxic hazard Ensure that the laser is ventilated into an appropriate exhaust 02 Make sure that the exhaust of the laser is not connected the duct system of systems used for the processing of breathing air e g air conditioning or ventilating systems e Ozone be generated by high power ultra violet radiation in particular with ArF at 193 nm This gas should be removed with a proper air exhaust or by flushing the beam path with Nitrogen or Argon e Adequate ventilation is essential There should be at least 10 air changes per hour when the laser device is installed in a confined space e g housing of additional devices e Always wear protective gloves when changing halogen filters as they are hygroscopic and contain oxidizing agents e Asthe
88. ed in the OPTex excimer laser supplied with 115 V AC 50 or 60 Hz Quantity Value Protection 2 10 000 AT main fuses F1 BR 195 or 19195 only 1 8 000 AT HV module F2 2 6 300 AT mains power supply board F4 F5 2 5 000 mains power supply board F1 F2 1 1 600AT power distribution unit F2 1 0 800 AT power distribution unit F1 1 0 500 AT mains power supply board 1 0 100 module F1 The secondary power supply circuits are secured by the following fuses 230 V and 115 V power supply Quantity Value Protection 1 1 600 AT trigger board ZGP 1 1 000 AT gas supply board 1 0 400 AT power distribution unit F3 148 User Manual OPTex A05070PTex Possible Problems and Solutions 9 2 Possible Problems and Solutions WARNING Risk of electric shock Measurements and work on the electrical system and equipment of the system must be carried out only by a skilled electrician or by instructed person under guidance of a skilled electrician and in accordance with electrical engineering rules and regulations Personnel should never open the power module housing since the danger of electrocution threatens The energy storage capacitors and the high voltage power supply hold several joules at up to 14 kV Work on gas equipment must be carried out by specially trained personnel only NOTE A For troubleshooting see also Sections 2 10 Safety Systems and 6 1 3 3 Lights B
89. ee Section 8 7 1 on page 140 Storing the Halogen Filter WARNING Toxic hazard The used filter may contain a small amount of halogen gas that has not yet reacted It must be stored for a period in a well ventilated area before final disposal 1 Store the used halogen filter in a well ventilated area Disposing of the Halogen Filter 2 Place the used filter in the delivery bag and close the bag 3 Dispose of the filter in accordance with local regulations User Manual OPTex A05070PTex Energy Monitor Calibration 8 8 LAMBDA PHYSIK 07 2005 Energy Monitor Calibration NOTE The procedure described in this section is not valid for the Fo version of the OPTex laser device The energy monitor is built into the beam output path within the laser device It checks ifany laser pulses are being emitted the energy of the laser pulses The energy monitor is to be calibrated if it has been disassembled whenever the windows have been maintained Factory setted the energy monitor checks the energy value with an absolutely precision of 15 This measuring accuracy can be improved by software calibration Failures caused by different spectral beam properties and contaminations are being corrected at once Deviations of up to 50 between beam energy and energy monitor measurement can be leveled out by calibration In case of impossible adjustment the energy monitor has to be exchanged A calibrat
90. eel cap from the premix line 12 Screw the line fittings to the pressure regulator Leak Testing 13 Ensure that the gas cylinder valve and pressure regulator in the premix gas line are closed 14 Ensure that the gas cylinder valve in the inert gas line is open and that the pressure regulator is set to 5 bar abs 15 Flush the premix gas line by clicking the FLUSH EXT button in the Flushing window of the laser control software see Section 8 4 1 on page 110 16 When the window LEAKTEST appears visually check the pressure gauge on the pressure regulator If there is no pressure drop within 10 minutes finish the leaktest by clicking LEAKTEST OK and continue with step 22 If there is a pressure drop a detailed leaktest using leak tester e g SNOOP is to be performed CAUTION Risk of contaminating gas lines Do not switch on the vacuum pump when SNOOP is applied to gas line connectors as this may penetrate the gas lines 17 Spray SNOOP on the connectors in the premix gas line If there is a leak small bubbles will appear within seconds 18 Tighten any leaky connections 19 Re check for leaks If the leak cannot be rectified call authorized service 20 Carefully clean the leak tested connectors with cleaning paper 21 Wipe the leak tested connectors with ethanol and dry with cleaning paper 22 Close the gas cylinder valve and pressure regulator in the inert gas line 113 MAINTENANCE 8 4
91. eet of lens cleaning paper over the window 22 Put a few drops of ethanol onto the lens tissue close to one edge of the window 23 While holding the window in place very gently drag the lens tissue across the surface of the window to clean the coated side 24 Inspect the window in transmission and grazing incidence for surface spots and dust NOTE The window cleaning can be repeated but no more than three times If dust or spots are still seen the window must be discarded Finalization 25 Insert the window into the window mount see Section 8 6 3 on page 132 139 MAINTENANCE 8 7 8 7 1 140 Halogen Filter Maintenance Lambda Physik excimer lasers utilize a halogen filter to remove atomic and molecular species of halogen from laser gas mixtures exhausted from the discharge reservoir Maintenance of the halogen filter consists of the replacement of the filter when full NOTE When the maximum halogen filter filling level is reached a window appears on the laser control screen requesting for filter exchange Halogen Filter Storage Halogen filters must be stored in unopened packaging in accordance with all relevant regulations The filter shelf life is indicated on the packaging Filters shall always be stored in dry rooms in their unopened packaging so that they are protected against damage Filters with visible signs of damage e g dents must be disposed of irrespective of the indicated shelf life Halogen
92. effective until laser operation is stopped by clicking OFF and started again User Manual OPTex A05070PTex Methods of Operation 7 3 1 2 7 3 1 3 LAMBDA PHYSIK 07 2005 Burst Mode Internally triggered laser operation will be started for the selected amount of pulses with the current repetition rate To change repetition rate see above To change number of pulses 1 Click the counter QUANTITY see E in Figure 24 on page 84 A new window appears 2 Enter the intended number of pulses through the numerical keys Any value between 1 and 99999 can be entered In this mode the laser is able to emit up to 65635 pulses 3 Click OK to confirm The entered amount of pulses appears on the counter QUANTITY If the input is out of range it is automatically reduced to 65635 Start laser operation in accordance with Section 7 4 1 When operating the numbers quantity of pulses are displayed as burst counter counts down and user counter counts up on laser control screen at the position below the QUANTITY counter see F in Figure 24 on page 84 The Burst mode can be interrupted by clicking OFF quantity and repetition rate are not reset or LASER OFF quantity and repetition rate are reset COM2 OPTex ArF Exit vac Q LH pre inert VALS VALUE J e ewr our HV TUNING RANGE peat MAX PRESSURE 3350 mbar warmup Temp B 50
93. eines Excimerlasers Laser having at least one anode and one cathode for preionization and or discharge Laser having at least one anode and one cathode for preionization and or discharge Excimer laser output control device Method and means of controlling the output of a pulsed laser Elektroden in einer Fluor enthaltenden Entladungseinheit eines gepulsten Gasentladungslasers Elektroden in einer Fluor enthaltenden Entladungseinheit eines gepulsten Gasentladungslasers Vorrichtung zum Regeln der Temperatur von Lasergas insbesondere eines Excimerlasers Laserr hre f r halogenhaltige Gasentladungslaser Gas transport laser system Electrical excitation circuit for gas laser Gas discharge laser having a buffer gas of neon Rare gas hydrogen halide excimer laser with hydrogen additive Vorrichtung f r die Reinigung von Lasergas User Manual OPTex A05070PTex Patents and Trademarks 1 5 2 LAMBDA PHYSIK 07 2005 Trademarks LAMBDA PHYSIK OPTex NovaTube Gyrolok Microsoft MS Windows Windows 95 and Windows NT IBM is a registered trademark of Lambda Physik AG the Lambda Physik logo is a registered trademark of Lambda Physik AG is a trademark of Lambda Physik AG is a registered trademark of Lambda Physik AG is a registered trademark of Hoke Inc NJ USA are registered trademarks of Microsoft Corporatio
94. elength Fo and He 157 nm Ar Fo and Ne 193 nm Kr Fo and Ne 248 nm Xe P Ne 308 Xe He and Ne 351 nm a Lambda Physik is owner of US Patent 4 393 505 This patent covers the use of neon as a buffer gas to enhance excimer laser performance b Lambda Physik is the exclusive licensee under US Patent 34 340 968 This patent covers the use of hydrogen as an additive to improve Xenon Chloride laser performance The OPTex is prepared for operation at a single wavelength It can however be subsequently modified at the factory to operate at a different wavelength Ensure that the appropriate gas mixture is available In addition to the cylinder of premix gas a cylinder of inert gas Helium is required for flushing 59 SPECIFICATIONS AND REQUIREMENTS 4 7 1 4 7 2 4 7 3 60 Gas Lines The copper pipes length 2 4 meters provided to connect the laser device to the gas supply are only intended for initial commissioning For the permanently installed laser device use internally electropolished stainless steel pipes as specified below instead of the copper pipes CAUTION Contaminated gas tubing can pollute the laser tube Keep all gas tubing especially the tubing for premix gases containing halogen free of dust humidity oil or other pollutants Gas connections 6 mm Gyrolok Max permitted pressure on the gas inlet 5 2 bar abs Gas tubing stainless steel recomme
95. em and remove the purge gas connection tube by opening the corresponding clamping rings where fitted see Section 5 10 on page 77 8 Use the 3 mm allen key to carefully remove the right hand and left hand service panels WARNING Risk of electrocution To avoid risk of electrocution the capacitors must be discharged to ground for each service or maintenance procedure carried out within the tube chamber 9 To discharge the capacitors pull the capacitor grounding stick safety stick out of the mounting see Figure 39 on page 121 lead it through the protection grill and plug its metallic side into the discharge connector see Figure 40 User Manual OPTex A05070PTex Windows Maintenance LAMBDA PHYSIK 07 2005 A B EEE cle II TIE i ua circuit D Figure 39 Safety stick and discharge connector Key to Figure 39 A Safety stick B Discharge connector C Safety stick insertion point D Protective grid A B C Figure 40 Discharging the capacitors Key to Figure 40 A Safety stick B Discharge connector C Protective grid NOTE The fan is attached to the left hand service panel When removing this side panel take care not to damage the connection 10 Disconnect the fan connection on the left hand service panel 11 Continue with Removing the Energy Monitor step 16 on page 123 if not maintaining a Fo version of the OPTex 121 MAINTENANCE Removing the B
96. emitting radiation the LASER ON indicator lamp see Figure 11 A is illuminated A B Figure 11 LASER ON indicator lamp and interlock connector e OPTex series lasers are provided with a connector Interlock on the left hand side see Figure 11 B This enables connection to external electrical circuits for a warning light and an interlock or Emergency Off EMO switch The external warning light signals that the laser is operating and therefore warns of the risk of laser radiation The external interlock or EMO switch shuts down the laser for instance in case of emergency or if a door connected with the switch is opened User Manual OPTex A05070PTex Specific Safety Aspects 3 2 3 2 LAMBDA PHYSIK 07 2005 The beam exit from the laser housing can be closed by a manually operated beam shutter see Figure 12 A Figure 12 Shutter on laser device s beam exit All service panels at the laser are equipped with interlock switches which will shut off high voltage more than 42 VDC and more than 100 if a panel is opened during laser operation This stops the laser radiation immediately Electrical Safety Features The following safety features protect the user from the potentially lethal hazards associated with high voltage power sources All potentially lethal voltages are contained in fully protected and grounded enclosures Additionally a chassis cover interlock disables the high voltage power suppl
97. equiring laser operation e g new gas fill can however be performed Methods of Operation The OPTex excimer laser device can be operated in the operation modes for emission of laser radiation or in the gas modes to perform gas actions like flushing the laser tube and premix line or filling the laser tube with fresh premix gas In the operation modes the laser device can be operated with constant energy EGY Const mode or at constant HV values HV Const mode For more information see also Section 2 9 on page 21 Generally all operation modes can be interrupted by clicking OFF LASER OFF or EXIT The OFF command interrupts laser operation by switching off the HV power supply but the HV module remains receiving mains power LASER OFF switches off the HV module s power supply it takes at least 5 sec to restart laser operation Clicking EXIT terminates the laser control software To restart laser operation without any time delay after interrupting the current operating mode we recommend to interrupt laser operation by pressing OFF NOTE A When operating in internally triggered modes the connected external trigger generator must be switched off In case of non connected external trigger generator the interconnecting inputs must be sealed Otherwise even low light can trigger laser pulses B The energy constant EGY Const mode is only available if an energy monitor is installed 95 OPERATION
98. er prepares jobs for production and other purposes and monitors production quantity and quality Any reader who wishes to acquire general knowledge of the OPTex excimer laser Numbering of Chapters Pages and Instructions The pages of this manual are numbered continuously The page number appears in the lower outside corner of every page The chapters are numbered continuously The name of the chapter appears in the upper outside corner of every even page the name of the main section appears in the upper outside corner of the corresponding odd page Each chapter ends with an even page number Consequently certain even pages at the ends of chapters will be intentionally left blank Each step within a procedure is sequentially numbered User Manual OPTex A05070PTex Safety 1 2 1 2 1 1 2 2 1 2 3 1 2 3 1 LAMBDA PHYSIK 07 2005 Safety Laser Safety Classification Lasers and laser systems are classified according to their relative hazards These classifications are found in the American National Standards for the Safe Use of Lasers ANSI Z 136 1 1986 FDA 21 CFR 1040 10 and 1040 11 and IEC 825 Within this classification the OPTex excimer laser is a class IV high power laser It must be regarded as a potential hazard to the human operator When connected to a correspondingly configured beam guidance system the OPTex becomes a class laser device The laser beam must also be regarded as a potentia
99. eve laser operation at a preset energy level See Figure 9 Energy aT I High Voltage Energy gt ne nm Figure 9 Voltage increase in the Energy Constant mode lf the High Voltage Constant mode is selected the pulse energy decreases with time as excimer laser gases have a limited lifetime see Figure 10 T High Voltage Energy Time Figure 10 Energy decrease in the HV Constant mode Most applications require the energy constant mode whereas the high voltage constant mode is primarily used for diagnostic purposes NOTE The energy constant mode is only available if an energy monitor is installed 22 User Manual OPTex A05070PTex Safety Systems of the OPTex 2 10 LAMBDA PHYSIK 07 2005 Safety Systems of the OPTex The laser device is provided with three safety circuits Watch dogs are monitoring laser operation In case of faults they are not reset automatically laser operation will be interrupted and the warm up period will start again Faults are detected by hard and software and classified into two groups The error messages are stored in the flagbytes of the laser control software or indicated by the user shell WINLAC see Section 6 1 3 3 on page 85 Pop up text fields are giving some information about potential reasons for these error messages Statical Errors The error message STATICA
100. external controller 131 MAINTENANCE 8 6 3 132 Disassembling Assembling Window Mounts Purpose Remove contaminated or damaged windows from the window mounts and insert new or clean windows The components of the window mount together with the special tools required for windows exchange are shown in Figure 52 F E D Figure 52 Window mount components and special tools Key to Figure 43 A Optics wrench B Sealing plate C Threaded insert D Window E Window collar with sealing ring F Window mount with O ring Tools and Materials e Window mount with contaminated window e Optics wrench special tool in service case e Lint free cotton based lens tissue service case e Optics grade Ethanol or Isopropanol e Disposable skin tight plastic gloves e Pencil User Manual OPTex A05070PTex Windows Maintenance LAMBDA PHYSIK 07 2005 Preparation 1 Remove the window mount with the contaminated or damaged window from the laser device and insert a new pre mounted window or the sealing plate see Section 8 6 1 on page 119 Disassembling the Window Mounts CAUTION Incorrect handling can seriously damage the windows Always wear skin tight plastic gloves when handling the windows Avoid touching the surfaces of the windows 2 Use the optics wrench to unscrew counterclockwise and remove the threaded insert Figure 53 Figure 53 Removing the threaded insert 3 Remove the window collar
101. f labels the appropriate Lamdba Physik part number is indicated together with the label description 47 SAFETY 3 4 1 DANGER Visible And Invisible Laser Radiation When Open And Interlock Defeated Or Failed AVOID EYE OR SKIN EXPOSURE TO DIRECT OR SCATTERED RADIATION Label Location Diagrams This product complies with FDA THIS LASER OR ITS COMPONENTS ARE Lanbda Physik GmbH SE C y Hans aoar ia 12 radiation performance standards PROTECTED BY ONE OR MORE PATENTS UNTIIDA PHYEK Game 21 CFR Chapter 1 Subchapter J OTHER PATENTS ARE PENDING Model OPTex Serien Nr ow 90103401 115 230 905910 906134 Oo AVOID EXPOSURE VISIBLE AND INVISIBLE LASER RADIATION IS EMITTED FROM THIS APERTRE gt 90613301 50 60 90574302 SESSESESSEEPESPESSO DANGER VISIBLE AND INVISIBLE LASER RADIATION AVOID EYE OR SKIN EXPOSURE TO DIRECT OR SCATTERED RADIATION 906484 Max Average Power 8 Output 0 05 J pulse Duration 5 to 50 ns Wavelength 157 to 800 nm CLASS IV LASER PRODUCT 901032 Figure 14 Labels on front left and top of the OPTex 48 User Manual OPTex Labels A05070PTex DANGER Visible And Invisible Laser Radiation When Open And Interlock Defeated Or Failed AVOID EYE OR SKIN EXPOSURE TO DIRECT OR SCATTERED RADIATION
102. f not avoided may result in minor or moderate injury It is also used to alert against unsafe practices that may result in property damage Use of the signal word NOTE NOTE Used to define sections where particular attention should be paid to ensure efficient operation or servicing of the laser device Symbols The signal words DANGER WARNING and CAUTION are always emphasized with a safety symbol These safety symbols are used to indicate special hazards They are used regardless of the hazard level This symbol is combined with one of the signal words DANGER WARNING or CAUTION to indicate a hazardous situation caused by laser radiation This symbol is combined with one of the signal words DANGER WARNING or CAUTION to indicate a hazardous situation caused by electricity This symbol is combined with one of the signal words DANGER WARNING or CAUTION to indicate a hazardous situation caused by toxic substances This symbol is combined with one of the signal words DANGER WARNING or CAUTION to indicate a hazardous situation caused by flammable substances This symbol is combined with one of the signal words DANGER WARNING or CAUTION to indicate a hazardous situation caused by circumstances other than those described above User Manual OPTex A05070PTex Overview of Chapters 1 3 LAMBDA PHYSIK 07 2005 Overview of Chapters e Chapter 1 this chapter e Chapter 2 provides the reader with a short overview
103. g power circuits 3 Remove the key from the key switch and keep in a safe place 4 Terminate WINDOWS on the external controller and switch off the controller The procedure varies depending on the WINDOWS version For more information please consult the controller s user manual Turn Off Laser Gases Purpose Turn off laser gases when the laser is not to be operated in the energy constant mode no new fill is to be performed or the laser device is shut down Preconditions e None User Manual OPTex A05070PTex Shut Down Laser Device LAMBDA PHYSIK 07 2005 Turning Off Laser Gases CAUTION Incorrect operation can cause unnecessary downtime and spoilage Never close the pressure regulator when the gas cylinder valve is open 1 Close the valve on the premix gas cylinder see Figure 37 A by turning clockwise to its stop N gt B Figure 37 Turning off gases 2 Turnthe valve on the premix pressure regulator see Figure 37 B counter clockwise to its stop This ensures that the pressure regulator is closed 3 Repeat steps 1 and 2 to turn off the inert laser gas supply 4 For Fo version Repeat steps 1 and 2 to turn off the beam guidance system s purge gas supply NOTE Depending on current configuration the beam guidance system s vacuum pump is to be switched off instead of turning off the purge gas supply The laser device is now fully shut down and
104. ge Thyratron A os va us bate Yee 20 High Voltage SEUNG i uc rer er iex Sete Brad oe BUR EG aka 98 High voltage electric 32 High Voltage Constant mode 22 95 98 HIGH VOLTAGE display 85 High voltage discharge 19 Hydrofluoric acid 34 Inert gas cylinder Exchange ucc cerea agitate ein RE De RUE 114 Installation III 65 Laser control software 70 Installation position 13 Instruction manual Intended audience 2 Interlock 5 43 Internal flushing 100 120 lonizing radiation Radiation IiE 32 a a PISA das LEVE 12 Key Sswitch 3 wed eds ze Bra ne rd 45 93 104 KF 40 Tlange are Ih heo ERN One P EE DES 77 User Manual OPTex A05070PTex INDEX LAMBDA PHYSIK 07 2005 L Eab ls 25255 ved bee e Tuv S SR 47 Ordering esto ore Ree STER RE QUEE 47 LAMPS E D Cee T ee oe ieee 85 Laser Definition iss BES eee ehe 12 Switching off 103 Swit
105. hapter and throughout this manual Depending upon the wavelength in which the laser is to be operated the halogen is either Fluorine or Hydrogen Chloride Fluorine is in the form of a premix gas ratio lt 5 Fluorine in premix and diluted further with other gases in the laser Fluorine is characterized by an extremely stinging smell in very low concentrations 0 1ppm Hydrogen Chloride HCI is in the form of a premix gas ratio lt 0 5 96 HCI in premix Both gases are still present in sufficient quantities in the gas supply to cause serious injury if not correctly handled and used The attention of the user is drawn therefore to the following maximum permitted exposure limits for Fluorine and Hydrogen Chloride The permitted periods of time in respect of these limits will depend on local safety regulations The MAK maximum acceptable concentration level values according to the German publication Technische Regel des Ausschu f r Gefahrstoffe des Bundesministeriums f r Arbeit und Soziales TRGS 900 and the PEL permissible exposure limit set by the American government agency Occupational Safety and Health Administration OSHA are as follows Fs limit 0 1 ppm 0 2 mg m HCL limit 5 0 ppm 7 5 mg m NOTE Refer to the International Chemical Safety Cards for Fluorine ICSC 0046 or Hydrogen Chloride ICSC 0163 respectively for more precise health hazard information 33 SAFETY 3
106. he pressure in the inert gas cylinder is not to drop below 5 bar abs during the flushing procedure Preconditions e Laser device switched on and laser control software started Preparation 1 Open the valve on the inert gas cylinder 2 Setthe pressure regulator in the inert line to 5 bar abs 119 MAINTENANCE 120 Open the Laser Device Housing CAUTION Risk of damaging the laser tube The FLUSH INT procedure fills the laser tube with inert gas Never operate the laser in this condition Flushing the laser tube is always to be followed by a new gas fill before restarting laser operation CAUTION Incorrect handling can seriously damage the windows Never touch the surfaces of the windows Wear skin tight plastic gloves when handling the windows 3 Click the FLUSH INT button on the laser control screen The prompt Are you sure appears 4 Click YES to continue The prompt Please open inert gt 3 bar appears 5 Ensure that the inert gas cylinder is open and that the pressure is correctly set 6 Click YES to continue The flushing procedure consisting of three automatic cycles is started At the end of the third cycle the message Please change optics or quit appears The procedure is aborted by clicking QUIT Following this NEW FILL must be selected to re enable laser operation 7 When Please change optics or quit appears disconnect the beam guidance syst
107. he upper left corner of the control screen are indicating the communication between laser controller and PC If the communication failed the message NO CONNECTION is blinking next to the port number display When this occurs select System and Options from the menu The Options window appears see Figure 31 Select the new port by mouse click or using the tabulator key and cursor keys and close the window by clicking OK or abort by clicking CANCEL COM2 NO CONNECTION Exit t CMC sows vac mom rx System v ShowHints WARM UP v AutoSaveOptions CANCEL e uso m C coM1 km eos Q vw C EXI TRIGGER WATCHCOUNT Figure 31 Laser control screen options window 94 User Manual OPTex A05070PTex Methods of Operation 7 3 LAMBDA PHYSIK 07 2005 WARNING Risk of exposure to laser radiation Once the laser device has been started laser standby is established i e laser operation can be started at any time Never leave the laser device unsecured or unattended in this condition NOTE After switching on the laser device the thyratron needs approx 4 min to reach its operating temperature The warm up period is denoted by the WARM UP lamp and a percentage indicator Laser operation or actions requiring laser operation cannot be started during this period Actions not r
108. he window collar User Manual OPTex A05070PTex Windows Maintenance 12 Insert the window collar top side down into the window mount as shown in Figure 55 The coated side of the window points in the same direction as the heads of the allen screws Figure 55 Inserting the window collar into the window mount CAUTION Risk of damaging the window mount Do not overtighten the threaded insert 13 Insert the threaded insert into the window mount and tighten using the optics wrench Figure 56 iz Figure 56 Inserting the threaded insert 14 Store the premounted window in a clean and dry place for future use LAMBDA PHYSIK 07 2005 135 MAINTENANCE 8 6 4 136 Windows Cleaning Purpose Clean contaminated windows Tools and Materials e Glass plate or similar clean flat and smooth surface for working on e Lint free cotton based lens tissue e Pressurized air or inert gas that is particulate and oil free e Polishing powder e g vienna chalk from service case e Distilled water e Optics grade Ethanol or Isopropanol e Disposable skin tight plastic gloves Preparation 1 Remove the window from the window mount see Section 8 6 3 on page 132 2 Place three layers of lens tissue on a clean dry and smooth surface glass plate Cleaning the Windows CAUTION Incorrect handling can seriously damage the windows Always wear skin tight plastic gloves when handling the windows Avoid touc
109. hing the surfaces of the windows NOTE Any action performed on an window can potentially scratch it Always begin with the simplest cleaning approach and the one least likely to scratch the window 3 Remove all dust particles from the window surface with a duster oil free compressed air or nitrogen as these may scratch the surface during the polishing procedure User Manual OPTex A05070PTex Windows Maintenance LAMBDA PHYSIK 07 2005 Cleaning the Uncoated Side of the Window 4 5 6 Lay the window with the coated side downwards onto the prepared glass plate Place a single sheet of lens cleaning paper over the window Put a few drops of ethanol onto the lens tissue close to one edge of the window Figure 57 Figure 57 Window cleaning 1 7 While holding the window in place very gently drag the lens tissue across the surface of the window Figure 58 Window cleaning 2 10 If the first cleaning approach did not result clean surface place three fresh sheets of lens cleaning tissue onto the glass plate Mix 2 teaspoons of distilled water or ethanol with one teaspoon of Vienna Chalk on the uppermost tissue Holding the window between your index finger and thumb place the uncoated side of the window onto the Vienna Chalk slurry 137 MAINTENANCE CAUTION Risk of damaging the Windows Excessive downward pressure can scratch the window surface Let the weight of the window
110. idge Figure 60 A 6 Carefully pull the halogen filter towards you so that it is released from the retaining clip Figure 60 B NOTE A number of FOL links are situated near to the halogen filter Ensure that they do not become disconnected or damaged when removing the halogen filter 7 Disconnect the flexible tube from the connection at the bottom of the halogen filter cartridge Figure 60 D 141 MAINTENANCE 8 7 2 142 8 Remove the protective caps from the tube ends of the replacement halogen filter 9 Attach the protective caps to the tube ends of the used filter cartridge Inserting the Replacement Halogen Filter 10 Attach the flexible tube to the connection at the bottom of the replacement halogen filter cartridge 11 Carefully push the halogen filter into the retaining clip until it is correctly located 12 Tighten the nut at the top of the halogen filter cartridge 13 Turn the laser control unit into the laser device 14 Insert and tighten the front service panel Halogen Filter Disposal Purpose Safely dispose of a used halogen filter cartridge NOTE The used halogen filter must be disposed of in accordance with valid local waste disposal regulations Tools and materials e Plastic gloves e Plastic bag e g bag that contained the new halogen filter e Supplied tie rap Reconditions e Used halogen filter removed from the laser device and tube ends sealed with protective caps s
111. ified by the manufacturer Spare parts from original equipment manufacturers can be relied upon to do so Never modify the software of programmable control systems Adhere to prescribed intervals or those specified in the instruction manual for routine checks and inspections For the execution of maintenance work tools and workshop equipment adapted to the task on hand are absolutely indispensable Selection and Qualification of Personnel Basic Responsibilities Make sure that only authorized personnel works on or with the OPTex laser device Statutory minimum age limits must be observed Employ only trained or instructed staff and set out clearly the individual responsibilities of the personnel for operation set up maintenance and repair Do not allow persons to be trained or instructed or persons taking part in a general training course to work on or with the OPTex laser device without being permanently supervised by an experienced person WARNING Potential electrical hazards Work on the electrical system and equipment of the OPTex laser device must be carried out only by a skilled electrician or by instructed persons under the supervision and guidance of a skilled electrician and in accordance with electrical engineering rules and regulations WARNING Toxic hazards Work on gas fuelled equipment may be carried out by specially trained personnel only 27 SAFETY 3 1 4 28 Safety Instructions Governing Sp
112. in areas that are susceptible to seismic activity the end user is responsible for appropriately securing the laser device within their facility or the OEM is responsible if the laser device should be installed within an OEM device alternatively For the exact configuration of the protective devices local regulatory requirements are to be followed and the site vulnerability of the facility or OEM device e g soil conditions and design is to be taken into account Provision is to be made for the following e Anchors to prevent movement or overturning of the laser device during a seismic event e Suitable strain relief devices for all supply lines to control the risks through leakage or escape of gases liquids and electricity etc during a seismic event Specific information regarding the position of the mounting holes and laser device feet is contained in Section 4 2 on page 52 41 SAFETY 3 2 3 3 2 3 1 42 Constructive Safety Features The laser device is equipped with the following constructional safety features Radiation Safety Features e Appropriate Class IV label affixed to laser device enclosure see Section 3 4 of this manual e All parts of the laser where laser radiation may possibly escape are marked with the appropriate adhesive danger signs according to IEC 825 e Red LASER ON indicator lamp on the left hand side of the laser device When the laser is ready for the emission of radiation or if it is
113. in sub D plug Pins 1 and 2 serve as power supply for the external laser radiation warning lamp max 3 VAC 50 mA Pins 3 5 serve as connection for the remote interlock circuit Remote interlock e g door switch External laser radiation oV warning lamp Figure 19 Remote interlock socket To enable laser operation it is necessary to short circuit pin 3 and 5 through a bridge the appropriate plug is enclosed in your tool case or an external switch If not laser high voltage is disabled immediately with an interlock message 55 SPECIFICATIONS AND REQUIREMENTS 4 5 56 Controller Requirements An RS 232 optical interface adapter is required to convert the electrical signals from the PC into light signals for the OPTex and vice versa This convertor is supplied as standard with laser devices which are to be PC controlled Specifications of the convertor Connector to PC 25 pin sub D male Connector to laser device 2 pin FOL plug Length of FOL links 1 5 m longer on request Power supply max 7 5 VDC max 400 mA The RS 232 optical interface adapter is to be plugged into a free RS232 serial interface on the PC When using a PC to control the OPTex the minimum requirements for the PC are Hardware IBM compatible 386 or higher 4 MB RAM 1 MB available hard disk memory Mouse Free 25 pin RS232 serial interface COM port Vacant slot in PC housing for internal mains supply 3 5 floppy disk drive
114. ing interlocks With a protective cover removed there is the risk of an electric shock whenever the mains supply is connected and the high voltage capacitors are charged The capacitors in the laser device hold some of joules at peaking voltages of up to 30 kV WARNING Risk of electrocution Personnel should never open the laser device before the main power supply cable has been disconnected and the high voltage capacitors are completely discharged An electrical safety overview is given in Section 3 2 2 2 of this chapter page 38 but reference should also be made to Section 3 2 3 page 42 for an overall description of the system safeguards In addition to the above mentioned hazards the HV switch used thyratron generates ionizing radiation Radiation limit 0 2 mSievert h at 10cm distance User Manual OPTex A05070PTex Specific Safety Aspects 3 2 1 3 LAMBDA PHYSIK 07 2005 Halogen Gases WARNING Toxic hazards The gas system of an excimer laser contains a mixture of up to 5 Fluorine gas or 0 5 Hydrogen Chloride Inhalation of or Skin contact with halogen gases should be avoided Halogen gases can cause severe chemical and thermal burns and in sufficient concentrations can cause death due to respiratory damage and pulmonary edema It is essential therefore that local safety regulations concerning the emission of chemical vapors must be strictly observed along with the recommendations made in this c
115. ion factor used for energy measurement is denoted in the laser control software In case of different EPROM CLS control numbers the software prompts the operator for calibration The true energy value is calculated by multiplication of the beam energy measured through the energy monitor with the calibration factor determined during the calibration procedure Purpose Calibrate the internal energy monitor in accordance with an external power or energy meter Energy monitor calibration is performed with the help of a dedicated software routine which starts the laser and enables input of a reference power value Tools and Materials e Protective eyewear suitable for the OPTex laser wavelength e External power or energy meter with display unit Preconditions e Laserdevice switched on and laser control software started no laser radiation being emitted 143 MAINTENANCE 144 Preparation NOTE When the light for PEM ERROR is flashing after starting the laser control software see Figure 25 on page 85 click the light with the cursor The error message will be cancelled and the energy monitor is activated again 1 Perform a new gas fill see Section 8 5 on page 116 to ensure optimum calibration conditions 2 Place the energy or power meter in front of the mechanical shutter 3 If necessary connect the display unit to the energy or power meter 4 Open the beam shutter on the beam exit aperture by turning counter clockwis
116. is closed 3 Open the valve on the premix gas cylinder see Figure 27 A by turning counter clockwise Figure 27 Opening gas cylinder valve LAMBDA PHYSIK 07 2005 91 OPERATION 7 2 2 92 4 Turn the valve on the premix pressure regulator see Figure 28 clockwise according to the manufacturers instructions until the pressure gauge B indicates the required pressure see Section 4 7 4 on page 61 9 Figure 28 Setting pressure regulator to required pressure 5 Repeat steps 1 to 4 to turn on the inert gas 6 For Fo version Repeat steps 1 to 4 to turn on the purge gas for the beam guidance system NOTE Depending on current configuration the beam guidance system s vacuum pump is to be switched on instead of turning on the purge gas supply Switch On Laser Device and Controller CAUTION Incorrect operation can cause damage downtime and spoilage Only authorized and properly instructed personnel are to operate the laser device Purpose Power up the laser device and PC and start the laser control software to enable laser operation Tools and Materials e Key to key switch e Protective eyewear suitable for the corresponding laser wavelength User Manual OPTex A05070PTex Start Up Laser Device LAMBDA PHYSIK 07 2005 Preconditions e Beam path checked see Section 7 1 on page 89 e Laser device ready to operate NOTE
117. itch off the OPTex immediately with an interlock switch or Emergency Off EMO switch in case of an emergency i e to prevent injury or serious material damage or if trouble occurs in the electrical system see Section 3 2 3 1 on page 42 Contact after use of the interlock or EMO switch appropriate maintenance personnel e g safety officer Work on the electrical system or equipment may only be carried out by a skilled electrician himself or by specially instructed personnel under the control and supervision of such electrician and in accordance with the applicable electrical engineering rules Fault finding and troubleshooting in high voltage circuits must only be performed by trained personnel Necessary work on live parts and elements must be carried out only in the presence of a second person who can cut off the power supply in case of danger by actuating the emergency shut off or key switch Secure the working area with a red and white safety chain and a warning sign Use insulated tools only If provided for in the regulations the power supply to parts of the OPTex laser device on which inspection maintenance and repair work is to be carried out must be cut off Before starting any work check the de energized parts for the presence of power and ground or short circuit them in addition to insulating adjacent live parts and elements Use only original fuses with the specified current rating The electrical equipment of the
118. ixtures The material surfaces become coated with a layer of halogen metal complex This process resulting from a reaction between halogen laser gas and metal material within tube is called passivation Passivation renders the material surfaces within the tube chemically inert to halogen A repetition of this process known as re passivation is always required ifthe surface passivation has been damaged as a result of air entering the laser tube with multigas version only if a change from a Fluorine to a Chloride gas mixture is necessary when the laser device or laser tube has been transported or stored for longer periods 18 User Manual OPTex A05070PTex Laser Tube LAMBDA PHYSIK 07 2005 A high voltage discharge between the electrodes A transfers the energy to the excimer gas mixture e g fluorine or krypton premix In order to obtain a controlled spark free discharge the laser gas has to be preionized i e a sufficiently high density of free charged molecules has to be created between the electrodes This is achieved with preionization pins B arranged along the main electrodes The result is a homogeneous preionization of the laser gas The switching of preionization and main discharge in series ensures a perfect synchronization between preionization and main discharge After the high voltage discharge thermal inhomogenities in the laser gas arise in the discharge area Therefore the gas vol
119. l fire hazard Safety Information Chapter 3 Safety describes the physical hazards related to the laser device the means of protection against these hazards and the safety features incorporated in the design of the laser device The Safety Chapter must be read by all persons entrusted with any sort of work on the OPTex excimer laser device Never start to follow the procedures detailed in this manual unless you have read and fully understood the information given in the Safety Chapter Signal Words and Symbols in this Manual Contained within this manual are sections in which particular hazards are defined or special attention is drawn to particular conditions These are indicated with signal words in accordance with ANSI Z 535 2 1991 and safety symbols pictorial hazard alerts in accordance with ANSI Z535 3 1991 The signal words are defined in section 1 2 3 1 of this manual and the safety symbols in section 1 2 3 2 Signal Words Four signal words are used in this manual DANGER WARNING CAUTION and NOTE The signal words DANGER WARNING and CAUTION designate the degree or level of hazard DANGER Indicates an imminently hazardous situation which if not avoided will result in death or serious injury INTRODUCTION 1 2 3 2 gt gt gt WARNING Indicates a potentially hazardous situation which if not avoided could result in death or serious injury CAUTION Indicates a potentially hazardous situation which i
120. laser tube is filled with inert gas up to a pressure of 2000 mbar The tightness is automatically checked for 5 minutes In case of a pressure drop of more than 200 mbar a message appears requesting to check the replaced window Otherwise pressure drop less than 200mbar a message appears indicating the successful exchange After confirming the message successful or leakage error by pressing the ENTER key the pressure within the laser tube will be reduced to low overpressure A message appears prompting for a new window exchange or exiting window exchange mode CAUTION Air penetration will damage the laser tube Never leave the laser tube open Always completely exchange one window before starting to exchange the other window 22 23 24 25 Repeat the steps 19 to 21 to exchange the other window After completition of the second window exchange press the ENTER key to confirm the windows exchange mode to be terminated The warm up routine is started automatically In case of using pre mounted windows continue with step 25 otherwise repeat the internal flushing steps 3 to 6 on page 120 and the windows exchange steps 19 to 23 on page 124 to exchange the sealing plates for new or cleaned pre mounted windows Perform a new gas fill see Section 8 5 on page 116 Assembling the Laser Device 26 27 28 29 Shut down the laser device Carefully slide the energy monitor s locating pins into the appropriate b
121. lect the program group WINLAC and double click the WINLAC icon The laser control screen shown in Figure 22 appears WINLAC 5 7 System COM2 OPTex ArF Q vac Q LH Q pre inert NEW FILI FLUSHING PRESSURE mbar mu m HV TUNING RANGE MAX warmup LASER ON l 0 REPET RATE QUANTITY Hz OFF EXT TRIGGER WATCHCOUNT PEM ERROR Figure 22 Laser control screen 79 LASER CONTROL 6 1 3 1 80 Exit Laser Control Software To terminate the laser control software click EXIT on the WINLAC screen Only on this way the laser control files are updated Laser Control Screen The laser control screen consists of various buttons lamps counters and displays The purpose of the buttons is described in Section 6 1 3 1 The purpose of the counters and displays is described in Section 6 1 3 2 The purpose of the lamps is described in Section 6 1 3 3 Buttons All buttons that can be selected at any particular time are highlighted black colored In Figure 23 each button is denoted with a letter or letter and digit combination This denotation serves as a cross reference to the corresponding description in this section A B D ArF Exit Q iu pre inert ENERGY my NEW FILL FLUSHING QUIT TUNNG RANGE MAX A E1 th PRESSURE 3350 mbar Al warmup item uU
122. losure which does not allow access to hazardous levels of laser light during normal operation This class of laser does not require special precautions for eye safety during normal operations as long as the protective enclosure is in place WARNING Risk of serious injury A Class I laser system becomes a Class IV when the enclosure is open The laser itself is a class IV device User Manual OPTex A05070PTex Specific Safety Aspects 3 2 1 3 2 1 1 LAMBDA PHYSIK 07 2005 Physical Hazards Ultra Violet Light WARNING The laser beam is very dangerous to the eyes and skin The following are hazardous 1 Direct radiation light as it leaves the laser 2 Reflected radiation light which has hit a surface and bounced off 3 Diffuse radiation light which has hit a surface bounced off and scattered Laser radiation is emitted as a narrow beam of almost parallel rays the intensity of which will remain high even at some distance of the laser Although the radiation is nonionizing damage can still occur to living tissue if exposed for to long as a result of heat produced during radiation absorption The radiation of an excimer laser lies outside the visible range Possible wavelengths of the high intensity ultraviolet radiation are 157 nm 193 nm 248 nm 308 nm or 351 nm Operating the laser at 157 nm causes additional spontaneous and stimulated emission of radiation in the range of 635 nm to 755 nm visible red
123. munication between PC and laser device as well as between PC and DLL can be checked The data transfer can be interrupted without error message Logbook file For documentation and diagnosis a logbook file eximer log containing Excel readable entries is created in the directory Excimer by the DLL interface Every laser status change is recorded in this logbook file Under normal operating conditions without status changes the status of the laser device is continuously recorded all 30 minutes Error codes are noted by date and time and entered together with the laser status If the file size reaches 1 4 MB a new file will be created We recommend to erase old versions of the logbook file periodically to ensure adequate free memory on the hard disk of the laser controller User Manual OPTex A05070PTex 7 1 LAMBDA PHYSIK 07 2005 OPERATION This chapter describes the operation of the OPTex NOTE A Before attempting to operate the OPTex familiarize yourself with the layout and operation of the laser control interface as described in Section 6 1 on page 79 ff B Prepare a laser logbook to keep a continuous record of data relating to laser operation This simplifies routine maintenance scheduling as well as problem location Unless otherwise stated the descriptions in this section assume that the OPTex is PC controlled To ease understanding the information in this section keep in mind the difference betwee
124. n be sent by pressing the space bar on the PCs keyboard Requirements LASER ON Laser operates REPETITION ON BURST or EXT TRIGGER active Interrupts the laser operation REPETITION ON BURST or EXT TRIGGER by switching off the HV power supply The repetition rate and quantity are not reset Laser operation can be continued by starting any operation mode Requirements LASER ON Laser operates REPETITION ON BURST or EXT TRIGGER active User Manual OPTex A05070PTex Laser Control Software LAMBDA PHYSIK 07 2005 WATCHCOUNT EXT TRIGGER L BURST M REPETITION ON N LASER ON Activates the high voltage and starts laser operation in accordance with signals received from an external trigger generator for a internally or externally given number of pulses Laser operation cannot be stopped by all software interrupts Requirements READY lamp on LASER ON External trigger generator connected and correctly set QUANTITY number of pulses set Activates the high voltage and starts laser operation in accordance with the signals received from an external trigger generator A laser pulse is emitted whenever a trigger pulse is received Requirements READY lamp on LASER ON External trigger generator connected and correctly set Activates the high voltage and starts laser operation at the preset repetition rate for the preset number quantity of pulses Requirements READY lamp on LASER ON REPET
125. n in USA and other countries is a registered trademark of International Business Machines Inc INTRODUCTION 1 6 10 Feedback Regarding Documentation If you have any comments regarding the documentation provided to you please contact us When you contact us please provide us with The document code The date of issue The page number section number and where applicable the procedure step number A description of any errors A proposal for improvements Feedback Address E mail documentation lambdaphysik com Post Lambda Physik AG Documentation Comments Hans B ckler Stra e 12 D 37079 G ttingen Germany Telefax 49 551 68691 User Manual OPTex A05070PTex 2 1 LAMBDA PHYSIK 07 2005 LASER DEVICE FUNDAMENTALS This chapter briefly describes the most important features functions and subassemblies of a Lambda Physik excimer laser This background information will ease your understanding of the information contained in the subsequent chapters The information in this chapter does not enable you to operate or service the OPTex excimer laser Never switch on or attempt to operate or service the OPTex before reading understanding and fully familiarizing yourself with Chapter 3 of this manual Safety Excimer Laser Excimer lasers take their name from the exci ted state dimers from which lasing occurs The most important excimers are rare gas halides such as Argon Fluoride ArF Krypton Fluoride Kr
126. n laser device and laser see Section 2 2 on page 12 Check Beam Path Purpose Ensure that the laser beam will be safely guided to the intended target WARNING Risk of serious injury through laser radiation Ensure that there are no reflective objects or particles in the path of the laser beam to avoid uncontrolled direct or diffuse reflection of the laser beam CAUTION Risk of fire or release of fumes Ensure that there are no materials in the path of the laser beam which may ignite or emit fumes when subject to laser radiation NOTE Utmost safety is provided by completely shielding the beam path e g through a protective enclosure or protective tubes When the beam path is not to be shielded keep the beam wherever possible in a single plane Avoid directing the beam at head height Tools and Materials e None 89 OPERATION 7 2 7 2 1 90 Checking the Beam Path 1 Shielded beam path Ensure that all shields are correctly installed i e there is no risk of unwanted beam emission 2 Unshielded beam path Ensure that there are no persons reflective objects or objects in the beam path which can reflect the laser beam ignite and or emit fumes 3 Secure the beam path and vicinity of the beam path against entry of persons Start Up Laser Device This chapter describes the procedures required to start up the OPTex laser device Turn On Gas Supply Purpose Turn on the excimer laser gases an
127. nded ALT ASTM A 269 material 1 4404 316L surface RA lt 0 4 degreased and internally electropolished 6 mm outer diameter Pressure Regulators Pressure regulators are supplied by gas manufacturers Lambda Physik recommends pressure regulators which are designed to operate within the pressure range of the respective gas The back pressure has to be 5 bar 70 psi The joints for the gas pipes have to be provided with Gyrolok fittings for a pipe diameter of 6 mm CAUTION Halogen gas corrodes most metals Always use stainless steel pressure regulators with gas mixtures containing halogens Gas Cabinets The risk of leakage from gas cylinders particularly those containing fluorine and hydrogen chloride gas mixtures is a potential safety hazard To minimize this hazard safety gas cabinets are available Please contact the gas manufacturers for further information User Manual OPTex A05070PTex Gas Requirements 4 7 4 LAMBDA PHYSIK 07 2005 Gases Required Premix The performance of the excimer laser depends on quality of the gases used tightness of the gas installation cleanness of the gas equipment Gas purity and gas mixture have a decisive influence on pulse energy and pulse to pulse stability laser power gas lifetime A halogen filter is placed between the tube and the vacuum pump of the OPTex Premix Fa 0 133 96 Fa He ArF 0 106 Fo and 3 333 Ar in Ne Kr
128. ng yourself with the contents of this chapter This chapter is divided into three sections General Safety Aspects which explains aspects relating to the safe operation of the laser device Special Safety Aspects which outlines the risks specific to working procedures with and on this laser device Overview of safety relevant labels which shows the design of and describes the safety labels General Safety Aspects Basic Operation and Designated Use The OPTex laser device has been built in accordance with state of the art standards and the recognized safety rules Nevertheless its use may constitute a risk to life and limb of the user or of third parties or cause damage to other material property WARNING Potential eye and skin burns Only use the laser in accordance with its designated use Safety interlocks are only to be defeated by authorized personnel WARNING Electrical hazard Safety interlocks are only to be defeated by authorized personnel WARNING Toxic hazards The gas system of an excimer laser contains a mixture of halogen gases fluorine or hydrogen chloride Inhalation of or skin contact with halogen gases should be avoided 25 SAFETY 3 1 2 26 The OPTex must only be used in technically perfect condition and in accordance with its designated use and the instructions set out in this manual and only by safety conscious persons who are fully aware of the risks involved in
129. ngs in the inert gas line NOTE Depending on the manufacturers instructions the pressure regulator may to be exchanged too 4 Exchange the inert gas cylinder 5 Screw the line fittings to the pressure regulator Leak Testing 6 Ensure that the gas cylinder valve and pressure regulator in the inert gas line are closed 7 Openthe inert gas cylinder valve 8 Setthe pressure regulator in the inert line to 5 bar abs The inert gas line is now filled with inert gas at a pressure of 5 bar abs Close the gas cylinder valve in the inert gas line 10 Visually check the pressure gauge on the pressure regulator If there is no pressure drop within 10 minutes continue with step 16 If there is a pressure drop a detailed leaktest using leak tester e g SNOOP has to be performed CAUTION Risk of contaminating gas lines Do not switch on the vacuum pump when SNOOP is applied to gas line connectors as this may penetrate the gas lines 11 Spray SNOOP on the connectors in the premix gas line If there is a leak small bubbles will appear within seconds 12 Tighten any leaky connections 13 Re check for leaks If the leak cannot be rectified call authorized service 14 Carefully clean the leak tested connectors with cleaning paper 15 Wipe the leak tested connectors with ethanol and dry with cleaning paper 16 Close the gas cylinder valve and pressure regulator in the inert gas line 115 MAINTENANCE 8
130. nistration OSHA are as follows limit 0 1 ppm 0 2 mg m NOTE Refer to the International Chemical Safety Card for Ozone ICSC 0068 for more precise health hazard information User Manual OPTex A05070PTex Specific Safety Aspects 3 2 2 3 2 2 1 LAMBDA PHYSIK 07 2005 Personnel Safety Ultra violet Radiation Safety An excimer laser emits high intensity pulsed ultraviolet radiation which constitutes a hazard to personnel during periods of operation and servicing In addition the Fo version of the OPTex emits visible red radiation in the range from 635 nm to 755 nm which represents a particular danger WARNING Risk of serious injury A Class I laser system becomes a Class IV when the enclosure is open The laser itself is a class IV device If alignment or maintenance work on Class IV laser equipment is necessary everyone in the laser area must wear appropriate protective goggles or other appropriate protective eyewear The mandatory protective goggles provide protection against direct radiation reflected radiation and standard radiation normal operating conditions within the respective wavelength range WARNING Risk of serious injury Always wear goggles when there is a chance of exposure to radiation from the laser Before putting on the protective goggles check them for any obvious defects As the filter in the goggles provides protection for only a narrow band of wavelengths make sure you a
131. ns 25 3 1 General Safety Aspects 25 3 1 1 Basic Operation and Designated Use 25 3 1 2 Organizational 26 3 1 3 Selection and Qualification of Personnel Basic Responsibilities 27 3 1 4 Safety Instructions Governing Specific Operational Phases 28 3 2 Specific Safety Aspects 30 3 2 1 Physical Hazards 31 3 2 2 Personnel Safety 35 3 2 3 Constructive Safety Features 42 3 3 Safety Compliance List 46 3 4 Labels ellc 47 3 4 1 Label Location Diagrams 48 3 4 2 Description of the Labels and Safety Labels 50 4 SPECIFICATIONS AND REQUIREMENTS 51 4 1 Specifications 51 4 2 Physical Dimensions 52 4 3 Electrical Power 54 4 4 Remote Control Interlock 55 4 5 Controller Requirements 56 4 6 External Trigger In and Pre Trigger Out 57 4 6 1 TWE Trigger Converter Option 57 CONTENTS Il User Manual OPTex A05070PTex TABLE OF CONTENTS LAMBDA PHYSIK 07 2005 4 7 4 7 1 4 7 2 4 7 3 4 7 4 4 7 5 4 8 4 9 4 10 5 1 5 2 5 3 5 4 5 4 1 5 4 2 5 5 5 6 5 7 5 8 5 9 5 9 1 5 9 2 5 10 5 11 6 1 6 1 1 6 1 2 6 1 3 6 2 6 3 Gas
132. ntended how the instruction manual is organized the use of signal words and safety signs in the instruction manual the contents of each chapter About this Manual Purpose Availability and Use This instruction manual is intended to familiarize the user with the OPTex and its designated use The instruction manual contains important information to installing and operate the OPTex safely properly and most efficiently Observing these instructions helps to avoid danger reduce repair costs and downtimes and increase the reliability and lifetime of the OPTex The instruction manual must always be available wherever the OPTex is in use The instruction manual must be read and applied by any person in charge of carrying out work with and on the OPTex e g operation including setting up troubleshooting in the course of work removal of production waste care and disposal of consumables maintenance servicing inspection repair and or transport The instruction manual is to be supplemented by the respective national rules and regulations for accident prevention and environmental protection INTRODUCTION Intended Audience This manual is intended for Operators who have completed the OPTex Basic Operations course An operator operates the OPTex excimer laser in normal day to day operations Process engineers who have completed the OPTex Advanced Operations course A process engine
133. ntered value and close the adjustment window by clicking OK Checking the Energy Monitor Calibration 11 12 13 14 15 Set QUANTITY to at least 100 The repetition rate HV value and HV Const mode are to remain unchanged Click on BURST to start laser operation in Burst mode Measure the beam energy with the external power or energy meter and compare these values with those displayed on the laser control screen They should differ no more than 5 96 After emitting the selected number or pulses laser operation will be stopped automatically Repeat the calibration procedure if necessary Terminate the laser control software Finalization 16 17 18 19 20 Insert the beam dump into the beam exit aperture and close the mechanical beam shutter by turning clockwise If necessary disconnect the display unit from the energy or power meter Remove the energy or power meter from the beam path Close the beam shutter by inserting the beam dump and turning clockwise until it reaches it s final position If necessary shut down laser device and external controller 145 MAINTENANCE 146 User Manual OPTex A05070PTex LAMBDA PHYSIK 07 2005 TROUBLESHOOTING This chapter is intended to assist solving common problems with the OPTex It presupposes that you have read this manual so far especially the safety instructions in Chapter 3 WARNING Risk of serious injury Tasks that can onl
134. o enable maintaining and servicing the OPTex from the side e g for servicing the windows a space of at least 50 cm is required to the left and right of the laser device Also keep the area above and in front of the laser device free to allow access from the top or front for servicing and repairs User Manual OPTex A05070PTex 5 1 LAMBDA PHYSIK 07 2005 INSTALLATION This chapter describes the installation of the OPTex laser device It is to be read prior to initial installation after transportation prior to re installation after storing the laser device CAUTION Improper installation can cause serious line damage All control and signal lines as well as the mains power supply line and gas supply lines must be installed with strain relief in a cable channel Site Preparation Purpose Prepare for the installation of the laser device Tools and Materials e Packing lists e Cutting pliers e Sharp knife Preparation 1 Ensure that the installation site has been prepared and all necessary utilities are available in accordance with the specifications see Chapter 4 on page 51 ff NOTE Particularly ensure that the ventilator openings are not covered or obstructed and that the service panels are accessible Checking the Delivery 2 Setdown the laser device at the installation site 3 Carefully remove all packaging 4 Ensure that the shipment is complete and undamaged The intended content
135. o ensure an optimum beam energy or beam profile Windows alignment is necessary after exchanging the windows ifthe pulse energy is too low ifthe beam profile is poor Tools and Materials e 5mm allen key e 1 8 allen key NOTE Former versions of the OPTex may need a 5 mm allen key e Adjustment laser emitting light in the visible spectral range e g He Ne laser e 2adjustment apertures see Figure 48 Figure 48 Adjustment apertures e External power or energy meter with display unit or plain surface depending on the adjustment demands beam energy or profile e Protective eyewear suitable for the OPTex laser wavelength Preconditions e Laser device switched off e Window mounts accessable left hand and right hand service panels removed see page 120 beam path shielding removed for F2 version only see page 122 energy monitor removed where fitted see page 123 127 MAINTENANCE 128 Preparation 1 Set the laser device down in front of a smooth surface e g facility wall The beam exit aperture has to point into the direction reflecting from the wall Position the adjustment laser in front of the beam exit aperture of the laser device Installing the Adjustment Setup WARNING Risk of injury through laser radiation When operating the adjustment laser all safety precautions concerning laser operation are to be strictly enforced see instruction manual of the adju
136. occurs through fiber optic light waveguides FOLs As the FOLs do not pick up or transmit electromagnetic interference EMI they provide a secure noise free communication link This is of considerable importance as the fast high voltage HV discharges required with excimer lasers create a high level of EMI The laser control software is stored on a flash prom mounted on the laser control unit This is interfaced to the operator through either the optical RS232 in case of an OEM subassembly or through an operating panel simulated on an PC the software is provided In the following description PC also means Laptop Figure 6 OPTex controlled through a Laptop The OEM device s controller unit or the existing PC is connected to the laser control unit in the laser device through an optical RS232 interface To convert the electrical signals emitted by the PC into the optical signals required by the laser control unit and vice versa a RS232 optical interface adapter is connected to a serial port on the PC This adapter is supplied as standard when operation through a PC is specified 17 LASER DEVICE FUNDAMENTALS 2 6 Laser Tube The NovaTube can be considered as the motor of the laser Figure 7 shows a cross section of the longitudinally symmetrical laser tube Figure 7 Cross section of the laser tube The laser tube C is the reservoir for the laser gas The materials chosen allow the problem free use of excimer gas m
137. ockwise until it reaches it s final position The laser standby condition is established i e laser operation can be restarted at any time or the laser device can be switched off Shut Down Laser Device This Section describes the procedures required to shut down the OPTex laser device Switch Off Laser Device and Controller Purpose Exit the laser control program switch off laser device and controller and secure the laser device against unauthorized use WARNING Misuse or improper operation can cause serious injury To prevent unauthorized persons from starting the laser always switch off lock and remove the key from the laser device when not in service 103 OPERATION 7 5 2 104 Tools and Materials e None Preconditions e Laser switched off no laser radiation being emitted Exiting the Laser Control Program 1 Click EXIT on the laser control screen see D in Figure 23 on page 80 to terminate the laser control software Switching off Laser Device and Controller 2 Turn the key in the key switch counter clockwise from the I to the O setting see Figure 36 B The POWER ON light A goes out gt O O O Q f POWERON w Io o9 o9 o9 o 96 o se 9150 pe ee E of Figure 36 Disablin
138. ods of Operation LAMBDA PHYSIK 07 2005 Input energy Exit vac 10 0 P Q KENI ax DANCE B SET pay en Figure 34 Setting the energy value for the EGY Const mode 9 50 usse on gt ENERGY REPETITION ON ENERGY Len A NOTE Exceeding values are automatically reduced to the maximum permissible value If the input is out of range it will not be accepted the current value remains Do not operate the laser with the maximum permissible stabilized energy value over longer periods as this reduces the gas and windows lifetimes Laser Tube Pressure and Temperature The laser device operates with a maximal tube pressure of approx 3 4 bar 4 4 bar abs or 3 0 bar 4 0 bar abs for the F version Displayed operating values lower than 3000 mbar or 2800 mbar respectively are indicating a gas leak or fill error Pressure drops to less than 2600 mbar are activating the safety facilities The optimal operating temperature of the laser tube is 40 Temperatures above 48 C are indicated by the temperature warning light The safety facilities are activated when the temperatures are considerably exceeded tube temperature more than 60 or thyratron temperature more than 80 99 OPERATION 7 3 2 7 3 2 1 7 3 2 2 7 3 2 3 100 Gas Modes Maintenance o
139. of 1500 mbar to enable laser tube transport transportation fill Following this a new gas fill is necessary see Section 8 5 to restart laser operation Requirements LASER OFF Inert gas cylinder with sufficient pressure connected to INERT Closes the window without performing a gas action Aborts gas actions Terminates the laser control program Requirements LASER OFF 81 LASER CONTROL E1 Large HV increment E2 Small HV increment E3 Small HV decrement E4 Large HV decrement F CONTROL LASER OFF H OFF 82 Increases the high voltage setting by 10 Requirements READY lamp on Laser in HV Const mode Increases the high voltage setting by 1 96 Requirements READY lamp on Laser in HV Const mode Decreases the high voltage setting by 1 Requirements READY lamp on Laser in HV Const mode Decreases the high voltage setting by 10 Requirements READY lamp on Laser in HV Const mode Toggles between the high voltage constant mode HV CONST and the energy constant mode EGY CONST When the energy constant mode is active the red lamp next to the CONTROL button is on Requirements READY lamp on NOTE The EGY Const mode is only available with energy monitor Switches off the HV power supply to disable laser operation All currently active laser operations e g BURST or REPETITION are immediately aborted and the repetition rate and quantity are reset A corresponding signal ca
140. of system elements and a description of different subsystems It introduces fundamental operational concepts such as running modes as well as familiarizing the reader with organization and function of the system e Chapter 3 explains safety and provides an overview of safety signs and identification labels Described are the main physical hazards as well as personal and constructional precautions It is essential that you read this chapter before performing any task on the OPTex e Chapter 4 describes the specifications installation requirements conditions of transport and operation and the accessories delivered with the OPTex e Chapter 5 describes the installation of the OPTex e Chapter 6 describes the laser control and service software and its application in the operation of the OPTex e Chapter 7 contains instructions on how to start and operate the OPTex e Chapter 8 describes fundamental maintenance routines which can be performed by instructed operators e Chapter 9 explains what action the operator can take when errors occur and how to trace errors e Chapter 10 gives an overview of wiring diagrams and schematics e The last pages of this manual include a list of figures and a index INTRODUCTION 1 4 1 4 1 1 4 2 Conversion Tables Measurements Listed below are the units of measure used in this manual and their equivalents according to the SI standard 1 meter m 1 meter m 1 centimeter cm
141. oling surface The two chambers of the laser device are cooled separately see Figures 3 and 4 in Section 2 4 on page 14 The cooling air is guided through apertures and honeycomb filters The housing made of galvanized steel sheet ensures an adequate contact voltage proof and HF attenuation when completely screwed down The mains supply line is connected with a mains filter Communication between RS 232 optical interface adapter laser control unit and decentralized modules occurs through fiber optic light waveguides FOLs The electrical lines and FOLs are numbered to facilitate the pursuit of signals and the exchange of modules Internal solenoid valves are used to fill and evacuate the laser tube The pressure sensor is located opposite of the gas circulation motor For fundamental diagrams of electrical connections and FOL system see Chapter 10 on page 155 User Manual OPTex A05070PTex Maintenance Schedule 8 3 Maintenance Schedule For proper and safe operation of the OPTex follow the maintenance schedule shown below pump Procedure Lifetime F2 version Lifetime other versions Other conditions Comments Dynamic Static Dynamic Static Flush premix line before exchanging a premix Section 8 4 1 cylinder performing a leak test new gas fill or transportation fill after several weeks without operating New gas fill 2 0 E 06 iflaser 8 0 E 06 iflaser if beam
142. on 4 2 on page 52 The entire beam path of Class IV lasers for Fo lasers including the target area should be hermetically sealed by an enclosure beam guidance system equipped with interlocks to prevent operation of the laser system unless the enclosure is properly secured The beam path shall insofar as possible be free of specularly reflective surfaces and materials which would be combustible if irradiated by the beam The OEM should ensure after installation of the beam guidance system that no laser radiation exceeding maximum permitted exposure MPE values arises at the connection between the laser device and the beam guidance system The measurements in accordance with statutory requirements must be carried out by an authorized body Purpose Connect the beam guidance system of the OEM device to the KF 40 flange on the laser device s beam exit see Figure 20 A Figure 20 Beam exit flange Tools and Materials e Purge gas connection tube provided e 2clamping rings 1 ring provided Preconditions e Beam guidance system equipped with a KF 40 flange on laser device side 77 INSTALLATION Preparation 1 Equip the purge gas line with a quick acting connector Connecting the Beam Guidance System 2 Connect the purge gas connection tube see Figure 21 B with the connection flange on the laser device s right hand side using the provided clamping ring A Figure 21 Purge gas connection tube for be
143. operating the laser device Any functional disorders especially those affecting the safety of the laser device should therefore be rectified immediately The OPTex is primarily designed for use in low duty cycle operation in medical and scientific applications Using the laser device for purposes other than those mentioned above is considered contrary to its designated use The manufacturer supplier cannot be held liable for any damage resulting from such use The risk of such misuse lies entirely with the user Operating the OPTex within the limits of its designated use also involves observing the instructions set out in this manual and complying with the inspection and maintenance directives Organizational Measures In accordance with the valid national regulations for prevention of accidents in Germany VBG 93 In the USA ANSI Z 136 1 a responsible person should be designated as the Laser Safety Officer LSO with the responsibility to effect the knowledgeable evaluation of laser hazards and to monitor and enforce their control The instruction manual must always be at hand at the place of use of the OPTex laser device In addition to the operating instructions observe and instruct the user in all other generally applicable legal and other mandatory regulations relevant to accident prevention and environmental protection These compulsory regulations may also deal with the handling of hazardous substances and the issuing and or w
144. or Call authorized service Error message INTERLOCK External safety circuit open CAUTION The remote interlock circuit can be configured by the customer the location of the circuit components being dependent on the layout of the system see Section 4 4 After any remote interlock the system does not automatically return to operational conditions Contact appropriate maintenance personnel after having used remote interlock Don t restart laser operation until all hazardous situations are eliminated Check your external remote circuit Check safety circuit by using the safety plug service case For several service operations the safety plug must be inserted into the remote interlock socket Check the connection 150 User Manual OPTex A05070PTex Possible Problems and Solutions Problem Reason Solution Error message LASERHEAD CHAMBER One or more of the three Service panel s removed or interlock switch es not closed Check the service panels and interlock switches to be closed Temperature switch near by the thyratron open 80 or tube temperature exceeds 60 Allow laser tube to cool down to optimal temperature 40 Check air intake and exhaust to be exposed Check ventilation fan If the error message cannot be canceled thermostat failed Don t start laser operation Call authorized service Mains power supply uni
145. ores on the laser tube where fitted The white plastics tube is to be fitted into the window mount Tighten the two holding screws to mount the energy monitor onto the laser tube frame where fitted Re connect the FOL removed in step 16 to the connection on the top of the energy monitor where fitted 125 MAINTENANCE 126 30 For F version only Insert the contact pressure ring see Figure 47 B and O ring A into the right hand window mount drill hole on the laser tube The O ring has to point into the direction of the beam path adapter LJ A Figure 47 O ring and contact pressure ring 31 For Fa version only Replace and tighten the flexible tube to the beam path adapter see Figure 43 on page 123 32 For Fa version only Attach the clamping ring centering ring and beam path tube to the flexible tube see Figure 42 on page 122 and close the clamping ring to assemble the beam path shielding 33 Connect the ventilator connections 34 Insert and tighten the right hand and left hand service panel using the 3 mm allen key Finalization 35 Align the windows see Section 8 6 2 36 Calibrate the energy monitor see Section 8 8 on page 143 37 If necessary shut down the laser device and external controller User Manual OPTex A05070PTex Windows Maintenance 8 6 2 LAMBDA PHYSIK 07 2005 Windows Alignment Purpose Align the windows using an external adjustment laser beam t
146. ose to breathing air systems i e air conditioning or ventilating systems 9 Connect the other end of the exhaust hose to a suitable ventilation exhaust system 10 Check that there are no leaks from any exhaust hose connections Any contamination within the laser device will now be directed into the ventilation exhaust system 73 INSTALLATION 5 9 5 9 1 74 Gas Lines Installation The exact gas line installation procedure varies according to the configuration of the gas supply The laser device is supplied with the necessary excimer laser gases from a premix gas cylinder To enable flushing an inert gas usually helium is necessary Remarks Regarding Gas Line Installation The quality of the gas line installation greatly influences laser performance Deficiencies in the gas line installation can cause impurities to enter the system thereby detrimentally affecting laser operation and output To ensure optimum laser performance observe the following instructions e Only use the gases specified in Sections 4 7 4 and 4 7 5 e Only use the materials specified in Section 4 7 1 on page 60 This minimizes the number of points at which impurities may enter the system and surfaces where they may be produced Never use any material other than stainless steel for tubings or fittings Other materials are sources of impurities e Store gas cylinders in a dry cabinet to avoid corrosion e Never expose the halogen lin
147. ouching components behind User Manual OPTex A05070PTex 4 SPECIFICATIONS AND REQUIREMENTS To continuously optimize the laser devices all data contained in this chapter are subjects to changes Should information on separate sheets e g laser data sheets attached to or provided together with this instruction manual contradict the information in this chapter the information on the separate data sheets has priority 4 1 Specifications All indicated data has been measured with an energy monitor and optimized gas mixtures Parameter Fa ArF KrF XeF Units Wavelength 157 193 248 308 351 nm CDRH Class IV IV IV IV IV Max pulse energy 1 5 13 22 10 8 mJ Max repetition rate 200 200 200 200 200 Hz Average power 0 24 2 4 1 8 1 6 W Pulse duration 5 10 8 8 8 8 ns FWHM nominal Pulse to pulse lt 2 lt 2 lt 2 lt 2 lt 2 energy stability d Beam dimensions 7 3 5 7x4 available available available mm v x h Beam divergence 9 3x 1 2x1 SETS SEN DIETSQLSSE rOn TEGNES mrad x h a all values in column are preliminary and not yet verified through tests permitted tolerance 15 b measured at low repetition rate 5 Hz at 100 HV for Fa includes lt 4 emission of red light measured at max repetition rate for Fa includes lt 4 emission of red light d sigma 100 HV at 100 Hz e typical value FWHM f typical
148. output energy is too low Section 8 5 pulses device has pulses device has for application been been if windows have been cleaned switched switched _ replaced off for off for if laser device has been 1 day 5 days transported if laser tube has been re passivated Exchange gas x if pressure less than 5 bar cylinder Sections 8 4 2 and 8 4 3 Clean windows 10 0 E 06 not intended if beam output energy is too low Sections 8 6 3 pulses and or beam profile is poor in and 8 6 4 spite of a new gas fill Exchange 50 0 E 06 10 0 E 06 windows pulses pulses Section 8 6 1 Exchange halogen every 250 2 years every 250 2 years filter new fills new fills Calibrate energy not available 5 0 E 06 3 month after it has been disassembled monitor pulses after windows maintenance Exchange energy not available 100 0 E 06 1 year if calibration failed monitor pulses Exchange laser available on request 5 years guaranteed lifetime tube OPTex2 500 E 06 pulses or 1 year and ArF Exchange available on request 5 years guaranteed lifetime thyratron OPTex2 years and ArF Check vacuum 3 years after about 1000 new fills Clean filter of the aspirating ventilator depending on environmental conditions Check pressure regulators according to valid national regulations technical rules and manufacturers data sheet LAMBDA PHYSIK 07 2005 109 MAINTENANCE 8 4
149. perations such as gas exchange and maintenance of resonator and gaslines are supported by the gas modes Gas actions are executable even in the warm up period New Gas Fill The static and dynamic lifetime and energy yield of the laser gas is restricted Gases of insufficient quality are exchanged automatically by clicking the NEW FILL button see A in Figure 23 on page 80 The used gas is pumped out of the laser tube and the tube is refilled with fresh premix gas For detailed information see Section 8 5 on page 116 Flush Premix Gas Supply Line NOTE For flushing procedures the premix gas cylinder is to be closed This procedure is always to be performed after installing the laser device and exchanging gas cylinders It is started by clicking FLUSH EXT in the Flushing window see page 81 The premix gas supply line is pumped out of laser gas and filled with inert gas To ensure that the gas line is thoroughly flushed it is evacuated and refilled twice At the end of the first cycle the procedure is interrupted to perform a leak test At the end of the procedure a corresponding message appears After confirming to exit the laser device is starting a warm up period again For detailed information see Section 8 4 1 on page 110 Flush Laser Tube This procedure is to be performed before maintaining the windows see Section 8 6 1 on page 119 by clicking the FLUSH INT button in the Flushing window see page
150. ply socket 12 VDC NOTE The jumpers on the regulator board are already set for 7 5 VDC operation 8 Close the PC cover and tighten the screws 9 Insert the RS 232 optical interface adapter into the free serial interface port on the PC 2 10 Insert the cable from the DC regulator board into the power inlet port on the RS 232 optical interface adapter 11 Insert the FOL links into the socket on the RS 232 optical interface adapter 12 Insert the FOL links into the optical RS232 socket on the laser device 13 Reconnect the PC to the mains power supply User Manual OPTex A05070PTex Connect Controller 5 4 2 LAMBDA PHYSIK 07 2005 Connecting the PC Mains Powered Convertor Purpose Establish the data link between the laser device and the PC and plug the fiber optics convertor into the mains optional Tools and Materials e PC as specified in Section 4 5 e RS 232 optical interface adapter supplied e Mains lead with integral transformer optional e Setof FOL links supplied Preparation 1 Disconnect the laser device and PC from mains power supply Connecting the PC 2 Setdown the PC at the desired location Take into account the length of the FOL links NOTE The FOL links supplied with the laser device have a length of 1 5 m Longer links can however be used providing that each line is in one piece Intermediate connectors or extension pieces are not to be used as this deteriora
151. power or HV module failed 152 User Manual OPTex A05070PTex Possible Problems and Solutions Problem Reason Solution Error message THYRATR Heating circuit of Thyratron cathode and hydrogen generator failed Check FOL connections and switch on laser device again Call authorized service to check transformer module fuse power distribution board and voltage on heater terminal 6 3 to 6 6 V HV supply failed Call authorized service Error message CPU EPROM or CPU failed Check EPROM socket and switch on laser device again If the error message cannot be canceled call authorized service LAMBDA PHYSIK 07 2005 153 TROUBLESHOOTING 154 User Manual OPTex A05070PTex 10 10 1 DIAGRAM SCHEMATICS Gas Flow Diagram Am ilw Vacuum Pressure Laser Tube sensor lt gt Exhaust Halogen Vacuum Filter Pump Inert Premix Figure 62 Gas flow diagram LAMBDA PHYSIK 07 2005 155 DIAGRAM SCHEMATICS Electrics Diagram 10 2 Jaquieyy s2iuoJ129 3 dwe yun 1 Jose 519 ZH 09 09 NOEZ ASIL A ddns a npoyy u NOEZ BAAR dN EDD SUEN 2 dN
152. re wearing the appropriate goggles for the laser device in question Check with your Laser Safety Officer or other safety personnel for guidance in selecting the appropriate goggles Contact a manufacturer of protective eyewear for information about appropriate protective eyewear Specifications needed to select appropriate eyewear are wavelength power beam diameter repetition rate and max pulse duration The ANSI American National Standards Institute standard for safe use of lasers requires that protective goggles which block the appropriate laser wavelength should be worn while operating or servicing class IV lasers The goggles should be clearly labeled with an optical density and the specified wavelength To avoid confusion these goggles should be kept separate from other safety glasses and personal protective equipment Using the wrong type of goggles is dangerous It can be worse to have improper eyewear and a false sense of security than to have no eyewear and take precautions based on the absence of protection Even if you re wearing protective goggles never looked directly into the beam intense laser radiation is capable of destroying the protective filter 35 SAFETY Optical Safety Guidelines WARNING Potential eye burns Only use the laser in accordance with its designated use Safety interlocks are only to be defeated by authorized personnel The following guidelines describe some of the actions necessary to
153. rocedure by clicking OK If there still is a sensible pressure drop a detailed leaktest has to be performed For these service operation call your authorized and instructed service After appearing the message extern flushing finished continue with step 20 Open the inert gas cylinder valve Click OK to continue the flushing procedure The message extern flushing 2 appears The premix line is evacuated and filled with inert a second time When the cycle is completed the message extern flushing finished appears Finalization 20 21 22 23 LAMBDA PHYSIK 07 2005 Close the pressure regulator in the premix gas line Close the gas cylinder valve and pressure regulator in the inert gas line When performing a new gas fill or when exchanging the windows continue with step 2 New gas fill Preparation on page 116 If necessary shut down the laser device and external controller 111 MAINTENANCE 8 4 2 112 Exchange Premix Gas Cylinder Purpose Remove a spent premix gas cylinder and replace with a fresh premix gas cylinder A gas cylinder has to be exchanged when the remaining pressure in the cylinder is less than 5 bar the gas cylinder has expired see product information provided by the gas supplier Tools and Materials CAUTION Risk of damaging laser tube Never use gas cylinders with a pressure of less than 5 bar abs as impurities that desorb from the gas cylinder w
154. ropriate pressure regulators are connected to the gas cylinders 2 Ensure that the gas supply lines are connected to the pressure regulators Connecting the Gas Lines 3 Fit each line with a 6 mm Gyrolok fitting 4 Check that all gas supply valves are closed 5 Remove the blanking plug from the appropriate gas connector on the laser device NOTE Keep the blanking plug in the service case for future use 75 INSTALLATION 76 6 Fit the gas line to the appropriate Gyrolok connector CAUTION Risk of damaging gas lines Excessive overtightening will damage the sealing beads and may cause leakage from the system Tighten in accordance with the gas fitting manufacturer s instructions 7 Tighten the Gyrolok nut using the 9 16 wrench 8 Repeat steps 5 to 7 to connect the second gas line 9 Check that all connections are properly matched and sealed tightly Finalization 10 Perform a leak test on all newly fitted lines according to Section 8 4 1 on page 110 premix gas supply line and Section 8 4 3 on page 114 inert gas supply line User Manual OPTex A05070PTex Connect Beam Guidance System for F2 Version 5 10 LAMBDA PHYSIK 07 2005 Connect Beam Guidance System for F Version The beam exit of the OPTex laser device is situated at the right side of the laser device 182 mm 5 mm adjustable above the floor and 103 mm measured from the rear of the laser device housing see Secti
155. s are listed in the packing list NOTE If any components are missing immediately inform Lambda Physik 65 INSTALLATION 5 2 5 3 66 Damaged Deliveries If the initial inspection of the delivery indicates mishandling of the laser device during transport proceed as follows e Do not refuse the shipment e Make corresponding notation on the delivery receipt document and inspect for visible signs of damage to the rigid transport packaging e If there are visible signs of damage leave the laser device in the original transport packaging and request immediate inspection from the carrier within three days of delivery e Remove the packaging and check for visible signs of damage to the laser device e f there is any visible damage to the laser device immediately contact Lambda Physik for further inspection and rectification Transport Locks The OPTex is delivered without any transport locks Insert Safety Plug Purpose Insert the safety plug to close the interlock circuit When the interlock circuit is open the HV supply cannot be switched on Tools and Materials e Female 9 pin sub D safety plug NOTE External devices can be wired into the interlock circuit by being connected to the corresponding pins of a female 9 pin sub D plug see Section 4 4 on page 55 When no external devices are required use the short circuit plug provided in the service case e Corresponding screwdriver for the screws on
156. sing is fully interlocked All gas fittings are 6 mm Gyrolok A powerful ventilation system causes continuous underpressure in the tube chamber during laser operation This prevents toxic gas from escaping into the ambient air in case of a leak The exhaust enclosure is designed to ensure ventilation of all components 3 2 3 4 Fire Safety Features The fire safety features designed into Lambda lasers eliminate the use of materials which are combustible or produce toxic vapors as well as preventing flames from spreading or burning materials from dripping The design incorporates the following specific fire safety features 44 Polyvinyl chloride PVC is not used No ventilation holes in fire break enclosures are in excess of 5 mm 0 20 in diameter Hole arrays are used as required Material meeting or exceeding UL 94 V1 is used User Manual OPTex A05070PTex Specific Safety Aspects 3 2 3 5 Mechanical Safety Features Mechanical safety design provides protection against any hazards which could cause physical injury or burns Specific mechanical safety features are listed below Exposed corners are radiused Air fans have grill guards with less than 6 4 mm 0 25 in No high temperature components are accessible to touch The laser center of gravity is centrally located within the enclosure to minimize tipping hazard Threaded holes are provided in the base of the housing to allow suitable seismic anchorage of the l
157. st adjustable high voltage power supply value 100 MIN the lowest adjustable high voltage power supply value 0 After starting laser device the current level is 50 of the tunable range To change between Energy Constant mode and HV Constant mode HV CONST press the CONTROL button see F in Figure 23 on page 80 When the HV Constant mode is selected the lamp next to the CONTROL button is off The HV value can also be changed by pressing the buttons for large 10 or small 1 increment decrement see E1 to E4 in Figure 23 on page 80 Set Energy Values In the Energy Constant mode the average power of the laser beam can be set to a constant value To select the EGY Const mode click the CONTROL button When the EGY Const mode is active the lamp next to the CONTROL button is on Clicking the energy value display selects the window ENERGY that enables the energy value to be changed in 0 5 mJ steps by clicking the or buttons see Figure 34 A Alternatively clicking the display on this subsequent window opens a further window enabling the desired value to be directly entered B Any value between the minimum and the maximum permissible stabilized energy value can be entered with a precision of 0 1 mJ After clicking OK to confirm laser operation can be started with the entered energy value The new value appears on the display User Manual OPTex A05070PTex Meth
158. stment laser device for more information Never look directly into the alignment laser beam 3 4 Switch on the adjustment laser Fix the adjustment laser device in a horizontal and vertical position ensuring that the adjustment laser beam hits the centre of the beam exit aperture of the OPTex Turn the adjustment laser device and or the OPTex until the adjustment laser beam hits the wall The adjustment laser beam should centrically pass both beam exit apertures of the OPTex The light spot is to be fully visible Switch off the adjustment laser Screw the adjustment apertures see Figure 48 into the window mounts of the OPTex by turning 1 to 2 rotations clockwise Repeat steps 3 to 5 to install the adjustment setup Switch off the adjustment laser Remove the adjustment apertures from the window mounts by turning counter clockwise User Manual OPTex A05070PTex Windows Maintenance LAMBDA PHYSIK 07 2005 Rough adjusting the Windows WARNING Risk of injury through laser radiation When operating the adjustment laser all safety precautions concerning laser operation are to be strictly enforced see instruction manual of the adjustment laser device for more information Never look directly into the alignment laser beam 11 Switch on the adjustment laser The adjustment laser beam will be reflected from the front and rear window back to the adjustment laser housing There should be three light spots visible the
159. t error or FOL error Call authorized service Error message ELECTRONIC CHAMBER Front service panel removed or interlock switch not closed Check front service panel and interlock switch to be closed Temperature switch on internal partition open more than 50 Allow laser device to cool down Check environmental air temperature Check air intake and exhaust to be exposed Check ventilation fan Mains power supply unit error or FOL error Call authorized service Error message PEM ERROR Byroelectric Energy Measurement Minimal energy value 2 mJ remained Check laser gas fill perform a new fill if required Check windows and clear or exchange if necessary Thyratron error When calibrating energy monitor click on error message light PEM ERROR to activate energy monitor again If the error message cannot be canceled call authorized service Triggering charging cycle and light pulse are not coordinated Call authorized service to check triggering a The laser device continues laser operation in the HV Const mode LAMBDA PHYSIK 07 2005 151 TROUBLESHOOTING 9 2 3 Operation Errors These errors are stopping the laser operation PEM error only in EGY Const mode For troubleshooting the key switch has to be switched off and on before laser operation can be restarted Problem Reason Solution Error message PRESSURE
160. te ee en eye 96 Watch Count mode 98 Optical interface adapter 17 User Manual OPTex A05070PTex INDEX LAMBDA PHYSIK 07 2005 Optical safely oss EE aed EE ak leans p Ede 36 Overview of Chapters 5 920 cusan iret e WES Or HD Ue de UT ds 34 40 P Passivation Reeds EE deeds Eae 18 aee ut dates buses fretta de 7 Power meter Use with energy monitor calibration 144 Power supply Requirements 54 Power supply line 1 1 LL Na Ri di 72 Preionization 19 Premix gas cylinder Exchange en ee 112 Handling 3 caer ser ee 39 Premix gas line Flushing eet e m eee Be ame 100 110 PRESSURE display 1 84 Pressure regulators Operation Ru et eius 91 Requirements 60 Protection grill 120 Protective equipment GaS i dE eves Rep e a eee ids 39 Protective gloves 40 Protective goggles 35 Pulse energy v ese LAY ed ooh LEE 21 Q QUANTITY counter
161. tes transmission quality For more information please contact Lambda Physik 3 Insert the RS 232 optical interface adapter into the free serial interface port on the PC e g 2 4 Insert the FOL link into the socket on the RS 232 optical interface adapter 5 Insert the FOL link into the respective socket on the laser device 6 Plug the RS 232 optical interface adapter into the mains power supply 7 Reconnect the PC to the mains power supply 69 INSTALLATION 5 5 70 Software Installation Purpose Install the laser control software on the PC To simplify installation an installation file is provided on the software floppy disk This generates the directory WINLAC as well as the program group and program icon WINLAC The laser control software can be integrated into other applications using a DLL interface for more information see separate manuals The installation software installs the files for energy monitor calibration maintenance monitoring and service procedures itselfs Tools and Materials e PC as specified in Section 4 5 e 1 2 laser control software floppy disk provided Preconditions e connected to the laser device see Section 5 4 on page 67 Preparation 1 Switch on the PC and allow the operating system Windows to start up 2 Ensure that a directory and or program group called WINLAC does not already exist on your hard disk drive intended to be used Installing the
162. the short circuit plug Inserting the Safety Plug 1 Insert the 9 pin sub D plug into the interlock socket located on the left hand side of the laser device 2 Fasten the screws on the plug User Manual OPTex A05070PTex Connect Controller 5 4 5 4 1 LAMBDA PHYSIK 07 2005 Connect Controller The OPTex can be controlled through an existing PC complying with the specifications in Section 4 5 on page 56 Installation consists of connecting the PC to the laser device and installing the control software on the PC Connection to the PC differs depending on whether the fiber optics convertor converts electrical signals to optical signals and vice versa is to be connected to the mains or draw its current from the PC vacant slot in PC required Connecting the PC PC Powered Convertor Purpose Establish the data link between the laser device and the PC and connect the fiber optics convertor to the PC power supply standard To enable connection of the fiber optics convertor to the PC power supply a DC regulator board has to be installed in the PC This converts the PC s 12 V power supply to 7 5 VDC required by the fiber optics convertor Tools and Materials e PC as specified in Section 4 5 with free slot NOTE Before opening the PC consult your PC supplier to ensure that opening the PC or inserting additional boards will not invalidate the warranty In case of doubt ask your PC supplier to install the DC
163. tive User Manual OPTex A05070PTex Overview of the OPTex Figure 4 Left side and top of the OPTex Key to Figure 4 gt Do 22 FA LAMBDA PHYSIK 07 2005 Exhaust tube chamber Air intake tube chamber Key switch Power ON light Air intake electronics chamber Laser tube Top service panel Laser radiation warning lamp Interlock connector Optical RS232 connector Trigger in Pre trigger out connector Mains socket with main fuses Left hand service panel Gas connection valve Inert Gas connection valve Premix 15 LASER DEVICE FUNDAMENTALS K E A T B T D Y 1 2 E D B Figure 5 Electronics chamber with service panel removed 16 Key to Figure 5 TA gt Trigger board Thyratron supply board High voltage power supply module Gas supply unit Laser control unit Vacuum pump Halogen filter Mains filter Mains power supply unit Transformer Power distribution unit User Manual OPTex A05070PTex Laser Control 2 5 LAMBDA PHYSIK 07 2005 Laser Control The OPTex is controlled through an integral control device known as the laser control unit CLS This communicates with decentralized submodules that perform dedicated functions e g laser pulse triggering Communication between the laser control unit and the decentralized modules
164. tors e Any equipment to be used for halogen gas servicing should be thoroughly cleaned degreased and dried before use then treated with increasing concentrations of halogen gas so that any impurities can be burned off without the risk of the equipment catching fire e Any equipment that has contained fluorine must be thoroughly purged with helium or argon and evacuated prior to opening or refilling e Dueto the possibility of over pressure of the gas mixture containing halogens potential hazards exist due to the risk of leakage of the laser cavity and gas pipes The most vulnerable part is the window Under normal operating conditions the pressure is 3 4 bar 4 4 bar abs or for the Fo version 2 8 bar 3 8 bar abs The equipment must be used such that the beam exit is not directed at personnel In the event of a leak occurring the release of halogen gas constitutes the greatest hazard e Avoid repeated bending and excessive vibration of gas piping and equipment as this can result in flaking of the protective halogen film and rupturing of the metal This could lead to the occurrence of a fluorine metal fire Flaking of the protective film can also cause dust to foul the valves e All areas containing pressurized halogen gas mixtures should be inspected for leaks periodically weekly 39 SAFETY e All leaks should be repaired immediately but not while the system contains halogen gases For Fluorine Ammonia vapor expell
165. ume in the discharge area has to be completely exchanged between two laser pulses A transverse circulation fan D positioned within the laser tube causes the gas volume between the main electrodes to be completely replaced between two successive laser pulses The circulation fan is driven externally via a magnetic coupling by a single phase motor The energy efficiency of the excimer laser is to the order of 296 i e the main part of the energy supplied has to be carried away in the form of heat The gas heated up by the discharge is recooled to the correct operating temperature approx 40 or 104 F using environmental air The maintenance operations required during the lifetime of the NovaTube are new gas fills and the exchange of the windows To minimize downtimes the windows should be stored as premounted units 19 LASER DEVICE FUNDAMENTALS 2 7 20 Thyratron The laser uses a simple hydrogen thyratron a thermionic tube It is used as an active switch to discharge the storage capacitors The anode of the thyratron is connected to the charging voltage The cathode is connected to ground Between these two main electrodes is the control grid which initiates the discharge switching of the thyratron As is also the case with conventional thermionic tubes the cathode structure has to be heated in order to ensure sufficient emission of starting electrons If the electron emission after a longer operating period is
166. unit enable Vaccum pump ON Valve Laserhead ON Valve Premix ON Energy control PWM Energy measurement Valve Inert ON Laser gas circulation Reservoir temperature HV too high Figure 64 Functional block diagram FOL connections LAMBDA PHYSIK 07 2005 mI 232 ical Interface Pre Trigger Ext Trigger Electronics Chamber Modules HVS HV Sensor RTS Reservoir Temperature Sensor Th Thyratron PS Pressure Sensor PEM Energy Sensor ZGP Trigger Board Thyratron Heating Circuit HVM High Voltage Module NPU Mains Power Supply Unit GVU Gas Supply Unit CLS Laser Control Unit 157 DIAGRAM SCHEMATICS its Diagram Ircul Safety C 10 4 Jaquieyy soiuoJ129 3 9 al 13 p eog 4097 Inpo U IH 0o4U0OJ Jase 610 4 MHL yun Alddns sey HUN JeuuoJsueJ nL yun Ajddns je og SUEN Joy Iq Sule AN Josuss Bjeu3 N3d 105095 AH SAH Josuas eJjnjeJeduje eJoAJeseM SLY yun yoo7 jeJsoweyl NIL JOSU JNSS Jd JIONESEY Od
167. value FW 1 e at beam exit g FWHM best focus LAMBDA PHYSIK 07 2005 51 SPECIFICATIONS AND REQUIREMENTS 4 2 52 Physical Dimensions Figure 16 shows an overview of the dimensions and beam exit position of the OPTex laser device Detailed information is given in Figures 17 and 18 on the following pages Figure 16 Dimensions of laser device Size Ix h x w approx 600 mm x 400 mm x 300 mm Weight 60 kg for Fa version and OPTex2 55 kg for all other versions Beam exit position vertical b P 160 mm 1 mm horizontal c 103 mm 1 mm Laser device feet height 23 mm 4 5 mm diameter 45 mm Distance between feet 2 upright position I x w 540 mm x 233 mm on side I x h 540 mm x 340 mm a not including feet beam guidance system key switch earning lamp etc b from lower edge of laser device housing c The laser device is tiltable by 90 to the side In upright position the bottom side is provided with location holes M8 see Figure 18 User Manual OPTex Physical Dimensions A05070PTex 50 600 A i 1 29 o o lo o 9o o lo 99 o lo o 30 os o9 90 o9 90 o9 90 09 90 ol 9 o 59 26 o9 90 90 09 9 lo oll o o o o o o o o9 95 29 o o o o o o o 96 LASEREMSSION NOICATOR
168. with window from the window mount 4 Take the contaminated or damaged window out of the window collar NOTE A The coated side of the window is usually marked with a parallel line along the edge that has the coating see Figure 54 B To verify for yourself which side of the window has the coating hold the window at an angle while looking at reflected light from a fluorescent bulb The reflected light will have a greenish to pink tint across the entire surface whereas the backside has no tint 5 Using a pencil make or enhance the mark indicating the coated surface of an window to be cleaned 6 Lay acontaminated window aside for cleaning see Section 8 6 4 on page 136 or dispose of a damaged window 133 MAINTENANCE 134 Assembling the Window Mounts 7 Remove the O rings from the window mount 8 Using lens tissue and a solvent ethanol isopropanol wipe the O rings until they are clean and free of any debris 9 Check the O rings and window mount for damage Renew the window mount if the O ring grooves have dents or scratches Renew the O rings if there are any indentations or scratches in the O ring material NOTE A less than perfect O ring will most certainly cause a leak If in doubt replace the O ring 10 Insert the O rings into the window mount 11 Carefully insert the cleaned or new window with the coated side down into the window collar as shown in Figure 54 Figure 54 Inserting the window into t
169. x gas line to 5 bar abs The premix gas line is now open but no gas will enter from the premix gas cylinder Close the valve on the inert gas cylinder Close the pressure regulator in the inert gas line Open the valve on the inert gas cylinder Set the pressure regulator in the inert line to 5 bar abs User Manual OPTex A05070PTex Gas Line Maintenance Flushing the Premix Gas Line 15 16 18 19 Click the FLUSH EXT button in the Flushing window of the laser control software The prompt Please close PREMIX bottle appears Ensure that the premix gas cylinder is closed Click YES to continue The prompt Please open inert gt 3 bar appears Ensure that the inert gas cylinder is correctly connected and open and that the pressure regulators in the premix and inert lines are set to 5 bar abs Click YES to continue The message extern flushing 1 appears The premix line is evacuated and filled with inert gas The currently active operation is indicated by the lamps above gas action buttons At the end of the cycle the prompt Leak test appears Immediately close the inert gas cylinder valve Visually check whether the pressure gauge on the pressure regulator drops within 3 minutes If there is no sensible drop continue with step 18 In case of a leak check the gas connections and tighten if necessary Open the inert gas cylinder valve and continue the flushing p
170. y be performed by authorized service personnel can endanger the health and life of untrained person so do not try to service the OPTex yourself Lambda Physik Service U S A Lambda Physik USA Inc 3201 West Commerical Blvd Ft Lauderdale FL 33309 USA Tel 1 954 486 1500 Fax 1 954 486 1501 eMail marketingusa lambdaphysik com GERMANY Lambda Physik AG Hans B ckler Strasse 12 D 37079 G ttingen Germany Tel 49 551 6938 0 Fax 49 551 68691 eMail salesgermany lambdaphysik com JAPAN Lambda Physik Japan Co Ltd German Industry Center 1 18 2 Hakusan Midori ku Yokohama 226 0006 Japan Tel 81 45 939 7848 Fax 81 45 939 7849 Marubun Corp Marubun Daiya Bldg 8 1 Nihonbashi Odenmacho Chuo ku Tokyo 103 8577 Japan Tel 81 3 3639 9811 Fax 81 3 3662 1349 OEM Service 147 TROUBLESHOOTING 9 1 Fuses The following fine wire fuses 5x20 are located in the OPTex excimer laser supplied with 230 V AC 50 or 60 Hz Quantity Value Protection 2 6 300 AT main fuses F1 1 4 000 AT HV module F2 4 3 150 AT mains power supply board F1 F2 F4 F5 1 0 800 AT power distribution unit F2 1 0 400 AT power distribution unit F1 1 0 500 AT mains power supply board 1 0 050 AT HV module F1 The following fine wire fuses 5x20 are locat
171. y when the cover is removed Opening a service panel triggers an interlock switch that shuts off the high voltage and consequently the laser radiation For servicing the capacitors shall be discharged to ground through a safety stick The safety stick and the discharge connector are located behind the right hand service panel beam exit side All AC power wiring is UL recognized and rated at 1500 V Black is used for line phases yellow green is used for ground and black for neutral Each AC power module has a yellow green grounding conductor 43 SAFETY The Power Module shielding encloses the HV parts of the laser to protect the surroundings against ionizing radiation and electromagnetic interference limits see Section 3 2 1 2 on page 32 A fully enclosed laser housing shields the surroundings from the ionizing radiation All AC power connectors are labeled for identification AC power and signal lines are never combined in the same connector 3 2 3 3 Pressure and Gas Handling Safety Features The Lambda Physik Excimer Laser incorporates the following pressure and gas handling features The pressure chamber is designed in accordance with the official German pressure vessel regulations the Druckbeh lterverordnung Allgemeine Vorschrift DruckbehV edited by the Bundesministerium f r Arbeit und Soziales Germany Every chamber is tested up to 4 5 bar abs Gas valves are electrically operated The tube hou

USER MANUAL OPTex 07/2005 - Frank`s Hospital Workshop

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