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Model 8010 High Power Device Test Fixture User`s Manual

1. 1 1 Extended warranty 1 2 Organization of manual sections 1 2 General information 1 2 Welcome Thank you for choosing a Keithley Instruments product The Model 8010 High Power Device Test Fixture provides a safe low noise complete environment for testing a variety of packaged device types The replaceable socket module test boards allow for a variety of package types including the user supplied socket types The Model 8010 allows you to connect one Model 2657A High Power SourceMeter for up to 3 KV testing You can connect up to two Model 2651A High Power SourceMeters for 15 A DC testing or 50 A or 100 A pulse testing For lower power terminals you can connect up to two other SourceMeters such as Models 2611A 2612A 2635A 2636A 4200 SMU or 4210 SMU The Model 8010 includes Kelvin remote sense connections for five instruments Guarded pathways for picoampere level measurements even at 3 KV An access port for a variety of probes such as scope or temperature Integrated protection circuits to protect Models 2611A 2612A 2635A 2636A 4200 SMU and 4210 SMU from high voltage instruments Two independent test sockets one for high current and one for high voltage
2. 6 2 Connect instruments to the Model 8010 6 2 Install the device and make connections 6 6 Suppressing device oscillations optional 6 7 Set up communication 6 8 Example program code 6 9 Example program usage 6 16 Troubleshooting FAQs 7 1 Noisy low current measurements 7 1 Interlock error message 7 1 Can high current SMUs be used separately inside the fixture 7 1 The device is oscillating How do I correct this 7 2 Can I use local sense for h
3. 2 11 Internal protection circuitry 2 12 Using the access port on the Model 8010 2 12 Working with devices and instruments 3 1 Safety information 3 1 About the device test boards 3 1 Installing a device in the axial posts 3 2 Installing a device in the TO socket 3 3 Using the insulating plug 3 3 Measurement considerations 3 4 Suppressing device oscillations 3 6 Using the guard terminal 3 8 Off state
4. 4 9 Example program usage 4 12 Axial lead device high current test 5 1 Introduction 5 1 Equipment needed 5 1 Connect the instrument to the Model 8010 5 2 Install the device and make connections 5 3 Set up communication 5 3 Example program code 5 4 Example program usage 5 9 On state characterization of a power MOSFET 6 1 Introduction 6 1 Equipment required for this example
5. 1 2 Characteristics 1 3 Connecting instruments to the Model 8010 2 1 Rear panel overview 2 1 Installing the test boards 2 3 Using the interlock 2 5 Connections to the rear panel 2 5 Model 2611A and Model 2612A connections 2 6 Model 2635A and Model 2636A connections 2 7 Model 2651A connections 2 8 Model 2657A connections 2 9 Model 4200 and Model 4210 SMU connections 2 10 Model 4200 and Model 4210 SMU with preamplifier connections
6. 6 7 Set up communication 6 8 Example program code 6 9 Example program usage 6 16 Introduction This example illustrates how to connect to a MOSFET in a TO 247 package on the high current side of the Model 8010 It demonstrates how to program the two Model 2651A SourceMeter instruments and a Series 2600A instrument to measure the on resistance Rds On of a power MOSFET and generate Rds On compared to drain current Id curve for a fixed gate voltage The two Model 2651A instruments are used to supply the drain current and take measurements of drain voltage and drain current The Series 2600A instrument is used to provide the gate voltage This example also provides detail on how to connect a resistor in series with the gate to suppress possible device oscillations Section 6 On state characterization of a power MOSFET Model 8010 High Power Device Test Fixture User s Manual Equipment required for this example Equipment needed One Model 8010 High Power Test Fixture with the Model 8010 DTB or Model 8010 DTB 220 board installed on the high current side of the test fixture see Installing the test boards on page 2 3 for more information Two Model 2651A High Power System SourceMeter instruments One Series 2600A System SourceMeter instrumen
7. 1 4 4 5 4 HIGH CURRENT 2651A GUARD SLO LO HI SHI GUARD SLO LO HI SHI SLO LO 4200 2600A 1 HIGH VOLTAGE 2657A GUARD SLO LO HI SHI GUARD SLO LO HI SHI 4200 GNDU 2600A 2 DUT DUT CA 560 2 stack up banana cable CA 560 0 stack up banana cable CA 562 2 high current banana cable CA 562 0 high current banana cable Set up communication The communication setup is illustrated in the following figure GPIB is used as an example but this application can be run using any of the supported communication interfaces for the instrument Figure 25 GPIB communication example GPIB CURSOR SRC MEAS LIMIT MODE POWER AUTO O U T P U T O N O F F 2657A HIGH POWER SYSTEM SourceMeter 1 2 3 4 DISPLAY CONFIG 5 6 7 8 9 0 0000 SPEED DIGITS FILTER REL RECALL STORE MENU TRIG ENTER LOCAL EXIT RUN LOAD P U S H T O E D I T E N T E R P U S H T O E D I T E N T E R CONFIG SPPLL S LAY A 8010 900 01 Rev A February 2012 5 3 Section 5 Axial lead device high current test Model 8010 High Power Device Test Fixture User s Manual Example program code NOTE The example code is designed to be run from Test Script Builder or TSB Embedded
8. 4 10 8010 900 01 Rev A February 2012 Model 8010 High Power Device Test Fixture User s Manual Section 4 Off state characterization of a power MOSFET Run the test node 2 smua source output 1 smua source output 1 delay 1 for i 1 numSteps do smua measure iv smua nvbuffer1 smua nvbuffer2 Remove the following 4 lines if you do not want to monitor for compliance testCmpl smua source compliance if testCmpl true then break end smua source levelv voltage step voltage voltage step end Turn off the SMUs to complete the test smua source levelv 0 node 2 smua source levelv 0 node 2 smua source output 0 smua source output 0 printData end function printData if smua nvbuffer1 n 0 then print No reading in buffer else print Timestamps tVoltage tCurrent for i 1 smua nvbuffer1 n do print string format g t g t g smua nvbuffer1 timestamps i smua nvbuffer2 readings i smua nvbuffer1 readings i end end end 8010 900 01 Rev A February 2012 4 11 Section 4 Off state characterization of a power MOSFET Model 8010 High Power Device Test Fixture User s Manual 4 12 8010 900 01 Rev A February 2012 Example program usage The functions in this script allow updates to the test parameters without rewriting or re running the script To run the test call the Idss function passing in the appropriate values for test parameters Idss parameters Parameter Uni
9. HI HI Interlock cable CA 558 2 Connect ground cable CA 568 120 lugs to protective earth Adapter 2600 TRIAX Adapter 2600 TRIAX S e n s e H I L O amp s en s e L O S e n s e H I Cable assemblies 7078 TRX L O amp sen s e L O 2 6 8010 900 01 Rev A February 2012 Model 8010 High Power Device Test Fixture User s Manual Section 2 Connecting instruments to the Model 8010 Model 2635A and Model 2636A connections The Model 8010 includes internal protection circuitry for the Model 2635A and 2636A SMUs In the case of a device under test DUT failure this circuitry protects the SMUs from high voltage from the Model 2657A CAUTION Do not convert triaxial cables to BNC cables Using BNC cables will remove protection from SourceMeter Instrument voltages and may result in instrument damage You must use triaxial cables Figure 4 Model 8010 to Model 2635A and Model 2636A rear panel connections LINE FUSE SLOWBLOW LINE RATING 3 15A 250V 100 240VAC 50 60Hz 250VA MAX TSP Link RS 232 R SERIAL NO DIGITAL I O IEEE 488 CHANNEL B GUARD SENSE HI HI SENSE LO LO SENSE LO LO CHANNEL A GUARD SENSE HI HI B LO A LO MADE IN U S A LISTED SourceMeter 4ZA4 LAN NO AUTO MDIX CAUTION FOR CONTINUED PROTECTION AGAINST FIRE HAZARD REPLACE FUSE WITH SAME TYPE AND RAT
10. 2 RLEAD Measured resistance I Actual resistance I SourceMeter Instrument RLEAD VM VM VM VR VM Rs VR Rs 3 4 8010 900 01 Rev A February 2012 Model 8010 High Power Device Test Fixture User s Manual Section 3 Working with devices and instruments The 4 wire sensing method as shown in the following figure minimizes or eliminates the effects of lead resistance by measuring the voltage across the resistor under test with a second set of test leads Because of the high input impedance of the voltmeter the current through the sense leads is negligible and the measured voltage is essentially the same as the voltage across the resistor under test Figure 12 4 wire resistance sensing SourceMeter Instrument 4 wire sense HI 4 wire sense LO I HI VM VR Test current I Resistance under test Lead resistances RS RLEAD Current sourced by SourceMeter Voltage measured by SourceMeter Voltage across resistor I VM VR and measured resistance I VM Sense current pA LO RLEAD Because sense current is negligible VM VR I VM VR RS RLEAD RLEAD NOTE Four wire remote sense is recommended when device resistances are low enough less than 1k that resistance in the test leads will cause significant error in the measurement For more information in the Series 2600A or Model 2651A Reference Manual see DUT test connections for information on t
11. 3 Tighten the screw down clamp until the resistor is held firmly to the terminal post 4 Connect an alligator clip customer supplied to the banana plug of the jumper wire coming from the force lead of the SMU to be connected 5 Clip the alligator clip to the other end of the resistor Figure 13 Model 8010 two wire test with a gate resistor installed 1 4 4 3 3 3 6 6 6 2 2 1 1 1 4 4 5 3 3 3 6 6 6 2 2 1 1 1 4 4 5 4 HIGH CURRENT 2651A GUARD SLO LO SHI GUARD SLO LO HI SHI SLO LO 4200 2600A 1 HIGH VOLTAGE 2657A GUARD SLO LO HI SHI GUARD SLO LO HI SHI 4200 GNDU 2600A 2 G D S G D S 1 4 4 SHI TO 247 CA 560 0 stacked at terminal 3 CA 560 2 stack up banana cable CA 562 2 high current banana cable CA 562 0 high current banana cable CA 563 BNC to banana cable 3 6 8010 900 01 Rev A February 2012 Model 8010 High Power Device Test Fixture User s Manual Section 3 Working with devices and instruments If you are using a four wire configuration the sense lead of the SMU will need to be connected to the same side of the resistor as the source lead To connect both the sense and source leads to the same side of the resistor stack the ends of the force and sense lead jumpers together then connect them to the customer suppl
12. The driven guard is always enabled and provides a buffered voltage that is at the same level as the HI or sense HI for remote sense voltage This allows you to monitor the output of the SourceMeter instrument SMU without disturbing the device under test For example you can monitor the SMU with an oscilloscope probe routed through the access port of the Model 8010 The purpose of guarding is to eliminate the effects of leakage current and capacitance that can exist between high and low In the absence of a driven guard leakage in the external test circuit could be high enough to adversely affect the performance of the SourceMeter Instrument Leakage current can occur through parasitic or nonparasitic leakage paths An example of parasitic resistance is the leakage path across the insulator in a coaxial or triaxial cable An example of nonparasitic resistance is the leakage path through a resistor that is connected in parallel to the device under test DUT Guard is typically used to drive the guard shields of cables and test fixtures Guard is extended to a test fixture from the cable guard shield Inside the test fixture the guard can be connected to a guard plate or shield that surrounds the device under test DUT Note that the 8010 DTB and 8010 DTB 220 device test boards do not have guard plates or shields However you can use the 8010 CTB customizable test board to build custom connections that completely guard the connections all the
13. 2 Remove loose dust on the outside and inside of the test fixture with a lint free cloth 3 Use a soft cloth or swap dampened with water to clean the test fixture Use an aqueous solution of 75 isopropyl alcohol for more efficient cleaning Avoid getting moisture inside the test fixture during cleaning Use only enough cleaning solution to dampen the cloth or swab If a board becomes contaminated and operation is affected the board should be returned to the factory for proper cleaning and servicing Section 8 Maintenance Model 8010 High Power Device Test Fixture User s Manual 8 2 8010 900 01 Rev A February 2012 Connector and socket cleaning The performance of connectors and sockets can degrade because of dirt build up or improper handling You can clean connectors and sockets with methanol dipped cotton swabs After cleaning connectors and sockets allow them to dry for at least one hour in a 50 C low humidity environment Adjusting the lid hinges You can adjust the tension on the hinges on the lid of the Model 8010 To adjust the tension tighten or loosen the center screw on each hinge See the following illustration for the screw location Figure 34 Model 8010 hinge adjustment Section 9 Next steps In this section Additional information 9 1 Additional information This manual has prepared you to start using your new Model 8010 for you
14. Instrument and returning the raw current and voltage readings from the reading buffer The script is written using Test Script Processor TSP functions rather than as a single block of inline code TSP functions are similar to functions in other programming languages such as Microsoft Visual C or Visual Basic They must be called before the code in them is executed Because of this running the script alone will not execute the test To execute the test you need to run the script to load the functions into test script memory You then call the functions Refer to the documentation for Test Script Builder or TSB Embedded for directions on how to run scripts and enter commands using the instrument console 4 6 8010 900 01 Rev A February 2012 Model 8010 High Power Device Test Fixture User s Manual Section 4 Off state characterization of a power MOSFET Example program code Title FET Drain Source Breakdown Voltage Description This script measures the drain source breakdown voltage BVdss of a FET BVdss gateV drainI measDelay igLimit vdLimit numNPLC Description This function uses the Model 2657A to force a current from drain to source The SMU also measures the resulting voltage Vds with the FET channel turned off A second System SourceMeter Instrument applies the gate to source voltage Vgs to ensure that the gate is turned off Parameters gateV Applied gate voltage Vgs drainI Test current
15. It can also be run from other programming environments such as Microsoft Visual Studio or National Instruments LabVIEWTM However you may need to make changes to the example code to use other programming environments The following script contains all the code necessary to output and capture a current or voltage pulse using the Model 2561A fast ADC The script sets up the source measure unit SMU configures the trigger model prepares the reading buffers executes the test and outputs the collected data in a format that can be copied and pasted from the instrument console to a Microsoft Excel spreadsheet The script is written using Test Script Processor TSP functions rather than as a single block of inline code TSP functions are similar to functions in other programming languages such as Microsoft Visual C or Visual Basic They must be called before the code in them is executed Because of this running the script alone will not execute the test To execute the test you need to run the script to load the functions into test script memory You then call the functions Refer to the documentation for Test Script Builder or TSB Embedded for directions on how to run scripts and enter commands using the instrument console The script contains comments that describe what is being performed by the lines of code and documentation for the functions in the script Title Fast ADC Usage Description This script is designed t
16. Please note that the lamp must be properly disposed of according to federal state and local laws The WARNING heading in the user documentation explains dangers that might result in personal injury or death Always read the associated information very carefully before performing the indicated procedure The CAUTION heading in the user documentation explains hazards that could damage the instrument Such damage may invalidate the warranty Instrumentation and accessories shall not be connected to humans Before performing any maintenance disconnect the line cord and all test cables To maintain protection from electric shock and fire replacement components in mains circuits including the power transformer test leads and input jacks must be purchased from Keithley Instruments Standard fuses with applicable national safety approvals may be used if the rating and type are the same Other components that are not safety related may be purchased from other suppliers as long as they are equivalent to the original component note that selected parts should be purchased only through Keithley Instruments to maintain accuracy and functionality of the product If you are unsure about the applicability of a replacement component call a Keithley Instruments office for information To clean an instrument use a damp cloth or mild water based cleaner Clean the exterior of the instrument only Do not apply cleaner directly to the instrument or al
17. SENSE LO HI LO GUARD SENSE HI LO 3030 VDC MAX 250 V MAX AMP AMP MADE IN U S A TSP Link R 1 2 3 26XXA INTERLOCK 4200 INTERLOCK SERIAL NO SH HI LO SL 2600A 2 210V 1 5A DC 10A PULSE MAX LO SL SH HI 2600A 1 210V 1 5A DC 10A PULSE MAX PULSE 1 DUTY CYCLE SH HI LO SL 2657A 3280V 120mA DC MAX SH HI 4200 SMU 210V 1 5A DC MAX LO 4200 GND UNIT SL CAUTION 15A DC or 100A PULSE MAX PULSE 1 DUTY CYCLE 2651A 2 40V 15A DC 50A PULSE MAX 2651A 1 40V 15A DC 50A PULSE MAX G G G G S HI G S LO LO HI INPUT SENSE GUARD G G S HI G S LO LO HI INPUT SENSE GUARD NO INTERNAL OPERATOR SERVICEABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY WARNING MADE IN U S A Interlock cable CA 558 2 Sense HI CA 554 HI CA 554 LO and sense LO CA 554 Connect ground cable CA 568 120 lugs to protective earth MODELS 2657A 2600A AND 4200 SMU CONNECTIONS LO GUARD SENSE HI HI 30V MAX SENSE LO 30V MAX T 8010 900 01 Rev A February 2012 4 5 Section 4 Off state characterization of a power MOSFET Model 8010 High Power Device Test Fixture User s Manual Install the device and make connections To install a device in the Model 8010 and connect instruments to the device 1 Ensure that the Model 8010 DTB test board is installed Refer to Installing the test boards on
18. 123456789 MODELS 2657A 2600A AND 4200 SMU CONNECTIONS LO GUARD SENSE HI HI 30V MAX SENSE LO 30V MAX SH HI LO SL 2600A 2 210V 1 5A DC 10A PULSE MAX LO SL SH HI 2600A 1 210V 1 5A DC 10A PULSE MAX PULSE 1 DUTY CYCLE SH HI LO SL 2657A 3280V 120mA DC MAX SH HI 4200 SMU 210V 1 5A DC MAX LO 4200 GND UNIT SL CAUTION 15A DC or 100A PULSE MAX PULSE 1 DUTY CYCLE 2651A 2 40V 15A DC 50A PULSE MAX 2651A 1 40V 15A DC 50A PULSE MAX G G G G S HI G S LO LO HI INPUT SENSE GUARD G G S HI G S LO LO HI INPUT SENSE GUARD NO INTERNAL OPERATOR SERVICEABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY WARNING MADE IN U S A HI Triaxial cables 4200 TRX Connect ground cable CA 568 120 lugs to protective earth S e nse H I L O and s e n s e L O Interlock CA 558 2 4 4 8010 900 01 Rev A February 2012 Model 8010 High Power Device Test Fixture User s Manual Section 4 Off state characterization of a power MOSFET Figure 20 Model 8010 to Model 2657A rear panel connections RS 232 SERIAL NO DIGITAL I O IEEE 488 LAN LINE FUSE SLOWBLOW LINE RATING 5 0A 250V 100 240VAC 50 60Hz 350VA MAX NO INTERNAL OPERATOR SERVICEABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY REPLACE FUSE WITH SAME TYPE AND RATING WARNING INPUT OUTPUT CURRENT 120mA MAX
19. 2 40V 15A DC 50A PULSE MAX 2651A 1 40V 15A DC 50A PULSE MAX G G G G S HI G S LO LO HI INPUT SENSE GUARD G G S HI G S LO LO HI INPUT SENSE GUARD NO INTERNAL OPERATOR SERVICEABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY WARNING MADE IN U S A Interlock cable CA 558 2 Connect ground cable CA 568 120 lugs to protective earth Sense and guard CA 557 1 MODELS 2657A 2600A AND 4200 SMU CONNECTIONS LO GUARD SENSE HI HI 30V MAX SENSE LO 30V MAX LO and HI 2651A KIT 1 5 2 8010 900 01 Rev A February 2012 Model 8010 High Power Device Test Fixture User s Manual Section 5 Axial lead device high current test Install the device and make connections To install a device in the Model 8010 and connect instruments to the device 1 Ensure that the Model 8010 DTB or Model 8010 DTB 220 device test board is installed Refer to Installing the test boards on page 2 3 for information on installing the device test boards 2 Install the device in the axial posts 3 Insert the insulating plug in the 3 terminal socket Refer to Using the insulating plug on page 3 3 for more detail 4 Make the connections as shown in the graphic below Figure 24 Two terminal axial DUT with a Model 2651A connected remote sense 3 6 2 2 1 1 4 4 3 3 3 6 6 6 2 2 1 1 1 4 4 5 3 3 3 6 6 6 2 2 1 1
20. 4200 GND UNIT SL CAUTION 15A DC or 100A PULSE MAX PULSE 1 DUTY CYCLE 2651A 2 40V 15A DC 50A PULSE MAX 2651A 1 40V 15A DC 50A PULSE MAX G G G G S HI G S LO LO HI INPUT SENSE GUARD G G S HI G S LO LO HI INPUT SENSE GUARD NO INTERNAL OPERATOR SERVICEABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY WARNING MADE IN U S A HI Interlock cable CA 558 2 Adapter 2600 TRIAX S e n s e H I L O amp Se ns e L O Connect ground cable CA 568 120 lugs to protective earth Cable assemblies 7078 TRX 8010 900 01 Rev A February 2012 4 3 Section 4 Off state characterization of a power MOSFET Model 8010 High Power Device Test Fixture User s Manual Figure 19 Model 8010 to Model 2635A or 2636A rear panel connections for MOSFET application example LINE FUSE SLOWBLOW LINE RATING 3 15A 250V 100 240VAC 50 60Hz 250VA MAX TSP Link RS 232 R SERIAL NO DIGITAL I O IEEE 488 CHANNEL B GUARD SENSE HI HI SENSE LO LO SENSE LO LO CHANNEL A GUARD SENSE HI HI B LO A LO MADE IN U S A LISTED SourceMeter 4ZA4 LAN NO AUTO MDIX CAUTION FOR CONTINUED PROTECTION AGAINST FIRE HAZARD REPLACE FUSE WITH SAME TYPE AND RATING WARNING NO INTERNAL OPERATOR SERVICEABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY AMP AMP 1 2 3 26XXA INTERLOCK 4200 INTERLOCK
21. 5 1 Equipment needed 5 1 Connect the instrument to the Model 8010 5 2 Install the device and make connections 5 3 Set up communication 5 3 Example program code 5 4 Example program usage 5 9 Introduction In this example you will generate high speed current and voltage waveforms for a device with axial leads that is installed on the high current side of the Model 8010 This example illustrates how to connect to the device It also demonstrates how to program the Model 2651A to output a pulse and generate high speed current and voltage waveforms Equipment needed Equipment required One Model 8010 High Power Test Fixture with the Model 8010 DTB or Model 8010 DTB 220 board installed on the high current side of the test fixture see Installing the test boards on page 2 3 for more information One Model 2651A High Power System SourceMeter instrument One device with axial leads such as a resistor or diode Cables to connect the Model 2651A to the Model 8010 One Model 2651A KIT 1 one Model CA 557 1 Cables to connect instruments to the device in the Model 8010 One Model CA 560 0 one Model CA 562 0 one Model
22. GNDU INSTRUMENT CONNECTIONS SMU ONLY SMU AND GNDU SENSE GUARD COMMON FORCE COMMON SENSE LO SENSE LO GUARD CE SENSE FORCE CO M M ON SMU 9 SMU 5 SMU 6 SMU 7 SMU 8 SMU 4 SMU 1 SMU 2 SMU 3 4200 SMU SENSE LO 4200 SMU SENSE LO SENSE FORCE SENSE FORCE PA CNTRL PA CNTRL 4200 TM INTLK IN OUT 1 2 3 26XXA INTERLOCK 4200 INTERLOCK SERIAL NO MODELS 2657A 2600A AND 4200 SMU CONNECTIONS LO GUARD SENSE HI HI 30V MAX SENSE LO 30V MAX SH HI LO SL 2600A 2 210V 1 5A DC 10A PULSE MAX LO SL SH HI 2600A 1 210V 1 5A DC 10A PULSE MAX PULSE 1 DUTY CYCLE SH HI LO SL 2657A 3280V 120mA DC MAX SH HI 4200 SMU 210V 1 5A DC MAX LO 4200 GND UNIT SL CAUTION 15A DC or 100A PULSE MAX PULSE 1 DUTY CYCLE 2651A 2 40V 15A DC 50A PULSE MAX 2651A 1 40V 15A DC 50A PULSE MAX G G G G S HI G S LO LO HI INPUT SENSE GUARD G G S HI G S LO LO HI INPUT SENSE GUARD NO INTERNAL OPERATOR SERVICEABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY WARNING MADE IN U S A 4200 TRX LO Interlock 236 ILC 3 HI 4200 MTRX Connect ground cable CA 568 120 lugs to protective earth S e n se HI 4 20 0 M T R X S e n s e L O 2 10 8010 900 01 Rev A Februar
23. No The Model 8010 test fixture contains two connections for Model 2651A High Power SourceMeter instruments on its back panel These two connections allow you to output up to a 100 A pulse using two instruments Internally these connectors are wired in parallel and are presented as a single output This connection cannot be reconfigured Section 7 Troubleshooting FAQs Model 8010 High Power Device Test Fixture User s Manual 7 2 8010 900 01 Rev A February 2012 The device is oscillating How do I correct this During on state characterization of MOSFET and IGBT devices high current pulses that travel through the channel of the device may cause the gate of the device to oscillate The instability of the gate voltage will result in unstable measurements through the device channel To dampen these oscillations and stabilize the gate you can insert a resistor between the gate of the device and the SourceMeter Instrument SMU connected to the gate See How to insert a resistor on a device terminal on page 3 6 for detail The appropriate gate resistor value is device dependent However typical gate resistor values range from tens to hundreds of ohms If the gate remains unstable after inserting a dampening resistor enable the high capacitance mode if available on the SMU connected to the gate Can I use local sense for high current or lower power SMUs Yes All SMUs that are connected to the Model 8010 test fixture may be used in
24. a two wire local sense configuration NOTE Four wire remote sense is recommended when device resistances are low enough less than 1 k that resistance in the test leads will cause significant error in the measurement For more information in the Series 2600A or Model 2651A Reference Manual see DUT test connections for information on two wire and four wire sensing Can I operate the test fixture with the lid open The lid of the Model 8010 test fixture isolates the operator from hazardous voltages that are potentially present at the device under test and cable ports The lid also functions as a blast shield protecting the user from flying debris and fire The interlock circuitry of the Model 8010 test fixture is designed to be engaged only when the lid is closed If the lid is open the interlock is disengaged and any SourceMeter Instruments SMUs with outputs that are configured for high voltage will not turn on Low voltage SMUs may still operate with the lid open and without the interlock connected For example the Model 2651A will still operate if the output enable function is not activated Additionally the Models 2611A 2612A 2635A 2636A and 4200 SMU will operate if they are programmed to the 20 V range or lower For additional information on interlocks see Using the interlock on page 2 5 Also see the reference manuals for your SMUs WARNING Always perform tests with the Model 8010 lid closed Performing tests
25. avoid possible injury Read and follow all installation operation and maintenance information carefully before using the product Refer to the user documentation for complete product specifications If the product is used in a manner not specified the protection provided by the product warranty may be impaired The types of product users are Responsible body is the individual or group responsible for the use and maintenance of equipment for ensuring that the equipment is operated within its specifications and operating limits and for ensuring that operators are adequately trained Operators use the product for its intended function They must be trained in electrical safety procedures and proper use of the instrument They must be protected from electric shock and contact with hazardous live circuits Maintenance personnel perform routine procedures on the product to keep it operating properly for example setting the line voltage or replacing consumable materials Maintenance procedures are described in the user documentation The procedures explicitly state if the operator may perform them Otherwise they should be performed only by service personnel Service personnel are trained to work on live circuits perform safe installations and repair products Only properly trained service personnel may perform installation and service procedures Keithley Instruments products are designed for use with electrical signals that are rated Measur
26. break connections to the Model 8010 while the output from the SourceMeter Instrument SMU is on Power off the instrument from the front panel or disconnect the main power cord from the rear of the instrument before handling cables connected to the outputs Putting the instrument into standby does not guarantee that the outputs are powered off if a hardware or software fault occurs Remove power from any connected SourceMeter Instruments before making connections Make connections to the SourceMeter Instruments before making connections to the Model 8010 About the device test boards The 8010 DTB and 8010 DTB 220 Device Test Boards include sockets for three terminal and axial lead devices The connections available on the boards allow you to make 2 wire local or 4 wire remote test connections The socket has true remote sense connections to each pin with two binding posts connected to each terminal of the device One set of binding posts is intended for force connections and the other for sense connections Section 3 Working with devices and instruments Model 8010 High Power Device Test Fixture User s Manual When making connections Connect force leads to binding posts 4 5 and 6 Connect sense leads to binding posts 1 2 and 3 These pins are connected internally to each other binding post 1 to post 4 2 to 5 and 3 to 6 However posts 4 5 and 6 have a shorter path to the socket than posts 1 2 and 3 which re
27. characterization of a power MOSFET 4 1 Introduction 4 1 Equipment needed 4 2 Set up communication 4 2 Device connections 4 3 Install the device and make connections 4 6 Table of Contents Model 8010 High Power Device Test Fixture User s Manual BVdss measurement 4 6 Example program code 4 7 Example program usage 4 8 Idss measurement 4 9 Example program code
28. combination safe in case one SMU is turned off smua source rangei math max math abs dstart 2 math abs dstop 2 smua source leveli 0 Sets the DC bias level smua source limitv 9 Sets the DC bias limit SMU 2 will have a voltage limit of 10V By setting the voltage limit 10 lower than that of SMU 2 we can ensure that only one of the two SMUs will ever go into compliance and become a voltage source This is desirable because if both SMUs went into compliance there would be two voltage sources in parallel which is an unsafe condition smua measure nplc 0 005 smua measure rangev pulseLimit smua measure autozero smua AUTOZERO_ONCE smua measure delay pulseWidth 1 localnode linefreq smua measure nplc 20e 6 Set the delay so that the measurement is near the end of the pulse Prepare the reading buffers smua nvbuffer1 clear smua nvbuffer1 collecttimestamps 1 smua nvbuffer1 collectsourcevalues 1 smua nvbuffer1 fillmode smua FILL_ONCE smua nvbuffer2 clear smua nvbuffer2 collecttimestamps 1 smua nvbuffer2 collectsourcevalues 1 smua nvbuffer2 fillmode smua FILL_ONCE Configure TSP Link Trigger 1 tsplink trigger 1 clear tsplink trigger 1 mode tsplink TRIG_FALLING tsplink trigger 1 stimulus trigger timer 1 EVENT_ID TSP Link Trigger 1 signals 2651A 2 to pulse 8010 900 01 Rev A February 2012 6 11 Section 6 On state characterization of a power MOSFET Mod
29. gate oscillating even with a dampening resistor in place try enabling the high capacitance mode to help stabilize the gate 8010 900 01 Rev A February 2012 6 13 Section 6 On state characterization of a power MOSFET Model 8010 High Power Device Test Fixture User s Manual Prepare the reading buffers node 3 smua nvbuffer1 clear node 3 smua nvbuffer1 collectsourcevalues 1 if node 3 smua nvbuffer1 fillmode nil then node 3 smua nvbuffer1 fillmode node 3 smua FILL_ONCE end node 3 smua nvbuffer2 clear node 3 smua nvbuffer2 collectsourcevalues 1 if node 3 smua nvbuffer2 fillmode nil then node 3 smua nvbuffer2 fillmode node 3 smua FILL_ONCE end Ready to begin the test Outputs on node 3 smua source output node 3 smua OUTPUT_ON node 2 smua source output node 2 smua OUTPUT_ON smua source output smua OUTPUT_ON if errorqueue count gt 0 then print Errors were encountered reset return end Give the gate some time to settle before starting the sweep delay 0 001 node 3 smua measure iv node 3 smua nvbuffer1 node 3 smua nvbuffer2 Start the 2651A 2 trigger model node 2 smua trigger initiate Start the 2651A 1 trigger model smua trigger initiate Wait until test is complete waitcomplete Outputs off node 3 smua source output node 3 smua OUTPUT_OFF smua source output smua OUTPUT_OFF node 2 smua source
30. of the pulsed outputs the SMU output is turned off The resulting data from this test will be returned in a Microsoft Excel compatible format you can cut and paste the output from the console that can be used for graphing and analysis 8010 900 01 Rev A February 2012 5 9 Section 5 Axial lead device high current test Model 8010 High Power Device Test Fixture User s Manual 5 10 8010 900 01 Rev A February 2012 Another example call to this function is as follows CapturePulseI 20 1e 3 10 1 This call will output one 20 A pulse with a 1 ms pulse width The pulse will be limited to 10 V and have a 1 duty cycle At the completion of the pulsed output the SMU output is turned off The resulting data from this test will be returned in a Microsoft Excel compatible format you can cut and paste the output from the console that can be used for graphing and analysis This data was generated with a 100 m load Figure 26 Axial device test results Section 6 On state characterization of a power MOSFET In this section Introduction 6 1 Equipment required for this example 6 2 Connect instruments to the Model 8010 6 2 Install the device and make connections 6 6 Suppressing device oscillations optional
31. output node 2 smua OUTPUT_OFF Print back data PrintDualSmuRdsonData end 6 14 8010 900 01 Rev A February 2012 Model 8010 High Power Device Test Fixture User s Manual Section 6 On state characterization of a power MOSFET Function PrintDualSmuRdsonData Description This function processes the data stored in the SMU reading buffers by function DualSmuRdson and prints back the individual SMU data and the combined SMU data and Rds on readings in a format that is copy and paste compatible with Microsoft Excel function PrintDualSmuRdsonData Print the gate SMU readings print Gate SMU r nSource Value tVoltage tCurrent print string format 0 2f t g t g r n node 3 smua nvbuffer1 sourcevalues 1 node 3 smua nvbuffer2 1 node 3 smua nvbuffer1 1 Print column headers print Timestamp tSource Value tVoltage 1 tCurrent 1 tVoltage 2 tCurrent 2 tVoltage tCurrent tRds on Loop through the reading buffer printing one row at a time for i 1 smua nvbuffer1 n do Combined Source Level SMU1 source level SMU2 source level sourceLevel smua nvbuffer1 sourcevalues i node 2 smua nvbuffer1 sourcevalues i Combined Voltage Average SMU1 Voltage reading SMU2 Voltage reading combinedVoltage smua nvbuffer2 i node 2 smua nvbuffer2 i 2 Combined Current SMU1 Current reading SMU2 Current reading combinedCurrent smua nvbuffer1 i node 2 smua nvbuffer1 i Rds on Combined Vol
32. page 2 3 2 Remove the insulating plug if installed 3 Install the device in the socket so that the gate terminal is connected to pins 1 and 4 of the device test board 4 Make the connections as shown in the graphic below Figure 21 Three terminal DUT with a Model 2657A and a Series 2600A connected local sense 3 6 2 2 1 1 4 4 3 3 3 6 6 6 2 2 1 1 1 4 4 5 3 3 3 6 6 6 2 2 1 1 1 4 4 5 4 HIGH CURRENT 2651A GUARD SLO LO HI SHI GUARD SLO LO HI SHI SLO LO 4200 2600A 1 HIGH VOLTAGE 2657A GUARD SLO LO HI SHI GUARD SLO LO HI SHI 4200 GNDU 2600A 2 G D S G D S TO 247 CA 560 0 stacked at terminal 6 CA 563 BNC to banana cable BVdss measurement NOTE The example code is designed to be run from Test Script Builder or TSB Embedded It can also be run from other programming environments such as Microsoft Visual Studio or National Instruments LabVIEWTM However you may need to make changes to the example code to use other programming environments This example performs the BVdss measurement The Model 2657A forces a current from the drain to source terminals and measures the resulting Vds This example uses a TSP script to perform the measurement The script includes two separate functions for configuring the System SourceMeter
33. to perform BVdss and Idss measurements For a BVdss measurement a test current is applied to the drain of the device while it is in the off state and a voltage is measured that corresponds to the drain to source breakdown voltage For Idss measurements a drain voltage Vds versus drain current Id curve is generated while applying a gate voltage Vgs that ensures that the device is in the off state The Model 2657A is used to supply the drain voltage and make measurements of drain voltage and drain current The Series 2600A is used to provide the gate voltage NOTE You can also use this example to test an IGBT in a TO 247 package You will need to make two substitutions Substitute the collector terminal of the IGBT for the drain terminal of the FET Substitute the emitter terminal of the IGBT for the source terminal of the FET Section 4 Off state characterization of a power MOSFET Model 8010 High Power Device Test Fixture User s Manual Equipment needed Equipment required One Model 8010 High Power Test Fixture with the Model 8010 DTB board installed on the high voltage side of the test fixture see Installing the test boards on page 2 3 for more information One Model 2657A High Power System SourceMeter instrument One Series 2600A System SourceMeter instrument One power MOSFET in a TO 247 package Cables to connect the Model 2657A to the Model 8010 Three Model CA 554 cable assemblies Cables to connec
34. way to the device terminals WARNING To prevent injury or death a safety shield must be used to prevent physical contact with a guard plate or guard shield that is at a hazardous potential gt 30 V RMS or 42 4 V peak This safety shield must completely enclose the guard plate or shield and must be connected to safety earth ground The graphic below shows the metal case of a test fixture being used as a safety shield The lid of the Model 8010 serves as the safety shield 3 8 8010 900 01 Rev A February 2012 Model 8010 High Power Device Test Fixture User s Manual Section 3 Working with devices and instruments 8010 900 01 Rev A February 2012 3 9 The figures below show how a cable guard can eliminate leakage current through the insulators in a test fixture In these figures leakage current IL flows through the insulators RL1 and RL2 to LO adversely affecting the low current or high resistance measurement of the DUT Also in the figures below the driven guard is connected to the cable shield and extended to the metal guard plate for the insulators Since the voltage on either end of RL1 is the same 0 Vdrop no current will flow through the leakage resistance path Thus the SourceMeter instrument only measures the current through the DUT Note that the Model 8010 is a safety shield Figure 15 Unguarded measurements Insulator IDUT DUT Metal mounting plate IL RL1 RL2 Insulator IM Measured curr
35. you can purchase the 8010 DTB 220 Device Test Board for use with three terminal TO 220 or TO 247 devices This board is limited to 1000 V You can also purchase replacement 8010 DTB boards and 8010 CTB boards The following instructions explain how to replace a pre installed test board with another test board WARNING Before installing or replacing test boards make sure you remove all electrical connections to the test fixture Failure to disconnect power may result in personal injury or death due to electric shock 8010 900 01 Rev A February 2012 2 3 Section 2 Connecting instruments to the Model 8010 Model 8010 High Power Device Test Fixture User s Manual Tool required Medium Phillips head screwdriver Assembly instructions NOTE If you are customizing the 8010 CTB Customizable Test Board make customizations before installing it in the Model 8010 1 Remove any external power that is connected to the test fixture through connected devices or devices under test DUTs 2 In the test fixture remove the four Phillips flat head screws that secure the board you want to replace 3 Set the replacement board in the test fixture with the yellow connectors connectors 3 and 6 oriented toward the rear of the fixture Line up the pre drilled screw holes in the board with the screw holes in the fixture 4 Thread four of the Phillips flat head screws through the replacement board 5 Tighten the screws Figure 2 Model 801
36. 0 01 Rev A February 2012 6 3 Section 6 On state characterization of a power MOSFET Model 8010 High Power Device Test Fixture User s Manual Figure 28 Model 8010 to Model 2635A or 2636A rear panel connections for MOSFET application example LINE FUSE SLOWBLOW LINE RATING 3 15A 250V 100 240VAC 50 60Hz 250VA MAX TSP Link RS 232 R SERIAL NO DIGITAL I O IEEE 488 CHANNEL B GUARD SENSE HI HI SENSE LO LO SENSE LO LO CHANNEL A GUARD SENSE HI HI B LO A LO MADE IN U S A LISTED SourceMeter 4ZA4 LAN NO AUTO MDIX CAUTION FOR CONTINUED PROTECTION AGAINST FIRE HAZARD REPLACE FUSE WITH SAME TYPE AND RATING WARNING NO INTERNAL OPERATOR SERVICEABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY AMP AMP 1 2 3 26XXA INTERLOCK 4200 INTERLOCK 123456789 MODELS 2657A 2600A AND 4200 SMU CONNECTIONS LO GUARD SENSE HI HI 30V MAX SENSE LO 30V MAX SH HI LO SL 2600A 2 210V 1 5A DC 10A PULSE MAX LO SL SH HI 2600A 1 210V 1 5A DC 10A PULSE MAX PULSE 1 DUTY CYCLE SH HI LO SL 2657A 3280V 120mA DC MAX SH HI 4200 SMU 210V 1 5A DC MAX LO 4200 GND UNIT SL CAUTION 15A DC or 100A PULSE MAX PULSE 1 DUTY CYCLE 2651A 2 40V 15A DC 50A PULSE MAX 2651A 1 40V 15A DC 50A PULSE MAX G G G G S HI G S LO LO HI INPUT SENSE GUARD G G S HI G S LO LO HI INPUT SENSE GUAR
37. 0 device test board installation 2 4 8010 900 01 Rev A February 2012 Model 8010 High Power Device Test Fixture User s Manual Section 2 Connecting instruments to the Model 8010 Using the interlock The Model 8010 can be connected to instruments that can output hazardous live voltages To ensure operator safety the Model 8010 provides a built in interlock switch The interlock switch is engaged when the Model 8010 lid is closed and latched When the interlock switch is engaged the light on the lower left of the Model 8010 enclosure is illuminated You can turn on a SMU output only when the interlock switch is engaged If the lid is open the interlock switch will not engage and any SMUs with outputs that are configured for high voltage will not turn on If the lid of the Model 8010 test fixture opens The interlock switch opens and the interlock is disengaged The interlock pin is pulled low The output of the SMU turns off If the interlock switch is disengaged the outputs of any instruments with interlock connections to the test fixture are turned off The outputs cannot be turned back on until the interlock switch is engaged The output is not automatically turned on when the interlock switch is engaged For detailed information on the interlock requirements for a specific SMU see the reference manual for that SMU Connections to the rear panel This section describes the connections you can make to the rea
38. 1A or 2612A rear panel connections LINE FUSE SLOWBLOW LINE RATING 3 15A 250V 100 240VAC 50 60Hz 250VA MAX TSP Link RS 232 R SERIAL NO DIGITAL I O IEEE 488 LISTED SourceMeter 4ZA4 LAN NO AUTO MDIX CAUTION FOR CONTINUED PROTECTION AGAINST FIRE HAZARD REPLACE FUSE WITH SAME TYPE AND RATING WARNING NO INTERNAL OPERATOR SERVICEABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY AMP AMP S HI HI G S LO LO G G G CAT LO G G G S HI HI G S LO CHANNEL A CAT MADE IN U S A CHANNEL B 1 2 3 26XXA INTERLOCK 4200 INTERLOCK SERIAL NO MODELS 2657A 2600A AND 4200 SMU CONNECTIONS LO GUARD SENSE HI HI 30V MAX SENSE LO 30V MAX SH HI LO SL 2600A 2 210V 1 5A DC 10A PULSE MAX LO SL SH HI 2600A 1 210V 1 5A DC 10A PULSE MAX PULSE 1 DUTY CYCLE SH HI LO SL 2657A 3280V 120mA DC MAX SH HI 4200 SMU 210V 1 5A DC MAX LO 4200 GND UNIT SL CAUTION 15A DC or 100A PULSE MAX PULSE 1 DUTY CYCLE 2651A 2 40V 15A DC 50A PULSE MAX 2651A 1 40V 15A DC 50A PULSE MAX G G G G S HI G S LO LO HI INPUT SENSE GUARD G G S HI G S LO LO HI INPUT SENSE GUARD NO INTERNAL OPERATOR SERVICEABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY WARNING MADE IN U S A WARNING MAX FLOATING VOLTAGE LO TO CHASSIS 42 Vpk 2600 TRIAX SENSE LO HI SENSE HI LO
39. 3 2 8010 900 01 Rev A February 2012 Model 8010 High Power Device Test Fixture User s Manual Section 3 Working with devices and instruments Installing a device in the TO socket This section explains how to install a device in the TO socket of the 8010 DTB or 8010 DTB 220 board To install a device in the TO socket 1 Remove the insulating plug if used from the three pin socket 2 Verify that the four axial terminal posts are not connected to anything 3 Place the TO 220 or TO 247 device into the pins of the three pin socket If you are installing a two terminal device place the device into the outer pins See Off state characterization of a power MOSFET on page 4 1 and On state characterization of a power MOSFET on page 6 1 for examples NOTE The two terminal interconnection diagrams that are shown in the Model 8010 Interconnection Reference Guide are intended for axial lead devices However you can adapt the setups so that you can test two terminal TO 220 and TO 247 devices Using the insulating plug The Model 8010 comes with insulating plugs These plugs can be installed in the TO sockets of the 8010 DTB and 8010 DTB 220 boards when you are testing two terminal devices that are installed in the axial lead terminal posts In general You will use the insulating plug when measuring lower resistance devices Do not use the insulating plug when measuring devices with resistances greater than 1 M The th
40. 32 R SERIAL NO DIGITAL I O IEEE 488 LISTED SourceMeter 4ZA4 LAN NO AUTO MDIX CAUTION FOR CONTINUED PROTECTION AGAINST FIRE HAZARD REPLACE FUSE WITH SAME TYPE AND RATING WARNING NO INTERNAL OPERATOR SERVICEABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY AMP AMP S HI HI G S LO LO G G G CAT LO G G G S HI HI G S LO CHANNEL A CAT MADE IN U S A CHANNEL B 1 2 3 26XXA INTERLOCK 4200 INTERLOCK 123456789 MODELS 2657A 2600A AND 4200 SMU CONNECTIONS LO GUARD SENSE HI HI 30V MAX SENSE LO 30V MAX SH HI LO SL 2600A 2 210V 1 5A DC 10A PULSE MAX LO SL SH HI 2600A 1 210V 1 5A DC 10A PULSE MAX PULSE 1 DUTY CYCLE SH HI LO SL 2657A 3280V 120mA DC MAX SH HI 4200 SMU 210V 1 5A DC MAX LO 4200 GND UNIT SL CAUTION 15A DC or 100A PULSE MAX PULSE 1 DUTY CYCLE 2651A 2 40V 15A DC 50A PULSE MAX 2651A 1 40V 15A DC 50A PULSE MAX G G G G S HI G S LO LO HI INPUT SENSE GUARD G G S HI G S LO LO HI INPUT SENSE GUARD NO INTERNAL OPERATOR SERVICEABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY WARNING MADE IN U S A HI Interlock cable CA 558 2 Adapter 2600 TRIAX S e n s e H I L O amp Se ns e L O Connect ground cable CA 568 120 lugs to protective earth Cable assemblies 7078 TRX 8010 90
41. 600A AND 4200 SMU CONNECTIONS LO GUARD SENSE HI HI 30V MAX SENSE LO 30V MAX SH HI LO SL 2600A 2 210V 1 5A DC 10A PULSE MAX LO SL SH HI 2600A 1 210V 1 5A DC 10A PULSE MAX PULSE 1 DUTY CYCLE SH HI LO SL 2657A 3280V 120mA DC MAX SH HI 4200 SMU 210V 1 5A DC MAX LO 4200 GND UNIT SL CAUTION 15A DC or 100A PULSE MAX PULSE 1 DUTY CYCLE 2651A 2 40V 15A DC 50A PULSE MAX 2651A 1 40V 15A DC 50A PULSE MAX G G G G S HI G S LO LO HI INPUT SENSE GUARD G G S HI G S LO LO HI INPUT SENSE GUARD NO INTERNAL OPERATOR SERVICEABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY WARNING MADE IN U S A 4200 TRX LO HI 4200 TRX 4200 PA REMOTE PREAMP FORCE SENSE PREAMP CONTROL Connect ground cable CA 568 120 lugs to protective earth Sense HI 4200 TRX S e n se L O Remote preamplifier 4200 PA 8010 900 01 Rev A February 2012 2 11 Section 2 Connecting instruments to the Model 8010 Model 8010 High Power Device Test Fixture User s Manual 2 12 8010 900 01 Rev A February 2012 Internal protection circuitry The Model 8010 includes internal protection circuitry that protects instruments in applications where a device breakdown or other potential failure could connect the high voltage output of a Model 2657A high voltage SMU to a lower voltage SMU The Model 8010 includ
42. A PULSE MAX PULSE 1 DUTY CYCLE SH HI LO SL 2657A 3280V 120mA DC MAX SH HI 4200 SMU 210V 1 5A DC MAX LO 4200 GND UNIT SL CAUTION 15A DC or 100A PULSE MAX PULSE 1 DUTY CYCLE 2651A 2 40V 15A DC 50A PULSE MAX 2651A 1 40V 15A DC 50A PULSE MAX G G G G S HI G S LO LO HI INPUT SENSE GUARD G G S HI G S LO LO HI INPUT SENSE GUARD NO INTERNAL OPERATOR SERVICEABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY WARNING RS 232 LISTED SourceMeter 4ZA4 123456789 DIGITAL I O IEEE 488 LAN LINE FUSE SLOWBLOW LINE RATING 5 0A 250V 100 240VAC 50 60Hz 550VA MAX NO INTERNAL OPERATOR SERVICEABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY REPLACE FUSE WITH SAME TYPE AND RATING WARNING G G G S HI G S LO CHANNEL A 40V 20A DC 50A PULSE MAX LO HI OUTPUT SENSE GUARD AMP AMP MADE IN U S A TSP Link R MADE IN U S A MADE IN U S A LO and HI 2651A KIT 1 Connect ground cable CA 568 120 lugs to protective earth Sense and guard CA 557 1 Sense and guard CA 557 1 8010 900 01 Rev A February 2012 6 5 Section 6 On state characterization of a power MOSFET Model 8010 High Power Device Test Fixture User s Manual Install the device and make connections To install a device in the Model 8010 and connect instruments to the device 1 Ensure that the Model 8010 DTB or Model 8010 DTB 220
43. A SMUs to perform a pulsed Rds on sweep with currents up to 100A Parameters gateLevel The gate level to be used during the sweep dstart The starting current level of the drain sweep dstop The ending current level of the drain sweep dsteps The number of steps in the drain sweep pulseWidth The width of the drain pulse in seconds pulsePeriod The time from the start of one drain pulse to the next in seconds pulseLimit The voltage limit of the drain pulse in volts Note Actual pulse limit will be 10 lower than setting to protect SMUs in a compliance condition Example Usage DualSmuRdson 10 1 100 100 500e 6 50e 3 10 6 10 8010 900 01 Rev A February 2012 Model 8010 High Power Device Test Fixture User s Manual Section 6 On state characterization of a power MOSFET function DualSmuRdson gateLevel dstart dstop dsteps pulseWidth pulsePeriod pulseLimit tsplink reset 3 Verify that at least three nodes are present reset Configure 2651A 1 Drain SMU 1 smua reset smua source func smua OUTPUT_DCAMPS smua sense smua SENSE_REMOTE smua source offmode smua OUTPUT_NORMAL smua source offfunc smua OUTPUT_DCVOLTS smua source offlimiti 1e 3 Set off limit SMU 1 will be a 0 V voltage source with 1mA limit when its output is turned off SMU 2 will be a 0 A current source with a 10 V limit when the output is turned off These settings keep the parallel
44. CA 562 2 and one Model 560 2 cable One GPIB cable or Ethernet cable Section 5 Axial lead device high current test Model 8010 High Power Device Test Fixture User s Manual Connect the instrument to the Model 8010 Connect the Model 8010 to the Model 2651A as shown in the graphic below NOTE This example does not use the interlock although the connections for the interlock are shown in the following graphic If you want to use the test fixture interlock and output enable see the Model 2651A Reference Manual and the section Using output enable Figure 23 Model 8010 to Model 2651A wiring diagram RS 232 LISTED SourceMeter 4ZA4 123456789 DIGITAL I O IEEE 488 LAN LINE FUSE SLOWBLOW LINE RATING 5 0A 250V 100 240VAC 50 60Hz 550VA MAX NO INTERNAL OPERATOR SERVICEABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY REPLACE FUSE WITH SAME TYPE AND RATING WARNING G G G S HI G S LO CHANNEL A 40V 20A DC 50A PULSE MAX LO HI OUTPUT SENSE GUARD AMP AMP MADE IN U S A TSP Link R 1 2 3 26XXA INTERLOCK 4200 INTERLOCK 123456789 SH HI LO SL 2600A 2 210V 1 5A DC 10A PULSE MAX LO SL SH HI 2600A 1 210V 1 5A DC 10A PULSE MAX PULSE 1 DUTY CYCLE SH HI LO SL 2657A 3280V 120mA DC MAX SH HI 4200 SMU 210V 1 5A DC MAX LO 4200 GND UNIT SL CAUTION 15A DC or 100A PULSE MAX PULSE 1 DUTY CYCLE 2651A
45. D 1 1 Model Model CONFIG NF P U S H T O E D I T E N T E R P U S H T O E D I T E N T E R ARM el 2651A SMU 2 TSP Link Node CURSOR SRC MEAS LIMIT MODE POWER AUTO O U T P U T O N O F F 2651A HIGH POWER SYSTEM SourceMeter 1 2 3 4 DISPLAY CONFIG 5 6 7 8 9 0 0000 SPEED DIGITS FILTER REL RECALL STORE MENU TRIG ENTER LOCAL EXIT RUN LOAD e 2 Mode CONFIG NF P U S H T O E D I T E N T E R P U S H T O E D I T E N T E R Model 2611A Model 2612A Model 2635A or Model 2636A TSP Link Node 3 To set the TSP Link node number using the front panel interface 1 Press the MENU key 2 Select TSPLink 3 Select NODE 4 Use the navigation wheel to adjust the node number 5 Press the ENTER key to save the TSP Link node number On the Model 2651A SMU 1 TSP Link node 1 perform a TSP Link reset to update it with the linked instruments 1 Press the MENU key 2 Select TSPLink 3 Select RESET 6 8 8010 900 01 Rev A February 2012 Model 8010 High Power Device Test Fixture User s Manual Section 6 On state characterization of a power MOSFET NOTE If error code 1205 TSP Link initialization failed no remote node
46. D NO INTERNAL OPERATOR SERVICEABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY WARNING MADE IN U S A HI Interlock cable CA 558 2 Connect ground cable CA 568 120 lugs to protective earth S e n s e H I LO an d s e n s e LO Triaxial cables 7078 TRX 6 4 8010 900 01 Rev A February 2012 Model 8010 High Power Device Test Fixture User s Manual Section 6 On state characterization of a power MOSFET NOTE If you want to use the test fixture interlock and output enable see the Model 2651A Reference Manual and the section Using output enable Figure 29 Model 8010 to Model 2651A rear panel connections for the MOSFET application example RS 232 LISTED SourceMeter 4ZA4 123456789 DIGITAL I O IEEE 488 LAN LINE FUSE SLOWBLOW LINE RATING 5 0A 250V 100 240VAC 50 60Hz 550VA MAX NO INTERNAL OPERATOR SERVICEABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY REPLACE FUSE WITH SAME TYPE AND RATING WARNING G G G S HI G S LO CHANNEL A 40V 20A DC 50A PULSE MAX LO HI OUTPUT SENSE GUARD AMP AMP MADE IN U S A TSP Link R 1 2 3 26XXA INTERLOCK 4200 INTERLOCK 123456789 MODELS 2657A 2600A AND 4200 SMU CONNECTIONS LO GUARD SENSE HI HI 30V MAX SENSE LO 30V MAX SH HI LO SL 2600A 2 210V 1 5A DC 10A PULSE MAX LO SL SH HI 2600A 1 210V 1 5A DC 10
47. G MODELS 2657A 2600A AND 4200 SMU CONNECTIONS LO GUARD SENSE HI HI 30V MAX SENSE LO 30V MAX The rear panel options are described on the following pages Section 2 Connecting instruments to the Model 8010 Model 8010 High Power Device Test Fixture User s Manual The access port on the lid can be used to bring in connections for external instrumentation SH HI LO SL The Model 2657A connectors provide sense HI HI LO and sense LO input connections for the Model 2657A instruments Connections are as follows SH Sense HI HI HI LO SL LO sense LO SH HI LO SL The Model 2600A 2 connectors provide sense HI HI LO and sense LO input connections for Model 2600A instruments Connections are as follows SH Sense HI HI HI LO SL LO sense LO LO SL SH HI The Model 2600A 1 connectors provide sense HI HI LO and sense LO input connections for Model 2600A instruments Connections are as follows SH Sense HI HI HI LO SL LO sense LO SH HI The 4200 SMU connectors provide sense HI and HI input connections for Model 4200 SMU instruments Connections are as follows SH Sense HI HI HI LO SL The 4200 GND UNIT connectors provide LO and sense LO input connections for Model 4200 SMU instruments Connections are as follows LO LO SL Sense LO G G G S HI G S LO The 2651A 2 SE
48. HI SLO LO 4200 2600A 1 HIGH VOLTAGE 2657A GUARD SLO LO HI SHI GUARD SLO LO HI SHI 4200 GNDU 2600A 2 G D S G D S 1 4 4 SHI TO 247 CA 560 0 stacked at terminal 3 CA 560 2 stack up banana cable CA 562 2 high current banana cable CA 562 0 high current banana cable CA 563 BNC to banana cable 8010 900 01 Rev A February 2012 6 7 Section 6 On state characterization of a power MOSFET Model 8010 High Power Device Test Fixture User s Manual Set up communication The communication setup is illustrated in the following diagram GPIB is used as an example but this application can be run using any of the supported communication interfaces for the instruments A TSP Link connection enables communication between two instruments Commands for the Model 2651A SMU 2 node 2 and the Series 2600A SMU 3 node 3 are sent over the TSP Link interface Figure 32 GPIB communication example for Rds on sweep GPIB Model 2651A SMU 1 TSP Link Node 1 Model 2651A SMU 2 TSP Link Node 2 TSP Link l 2651A SMU 1 TSP Link Node CURSOR SRC MEAS LIMIT MODE POWER AUTO O U T P U T O N O F F 2651A HIGH POWER SYSTEM SourceMeter 1 2 3 4 DISPLAY CONFIG 5 6 7 8 9 0 0000 SPEED DIGITS FILTER REL RECALL STORE MENU TRIG ENTER LOCAL EXIT RUN LOA
49. ING WARNING NO INTERNAL OPERATOR SERVICEABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY AMP AMP 1 2 3 26XXA INTERLOCK 4200 INTERLOCK 123456789 MODELS 2657A 2600A AND 4200 SMU CONNECTIONS LO GUARD SENSE HI HI 30V MAX SENSE LO 30V MAX SH HI LO SL 2600A 2 210V 1 5A DC 10A PULSE MAX LO SL SH HI 2600A 1 210V 1 5A DC 10A PULSE MAX PULSE 1 DUTY CYCLE SH HI LO SL 2657A 3280V 120mA DC MAX SH HI 4200 SMU 210V 1 5A DC MAX LO 4200 GND UNIT SL CAUTION 15A DC or 100A PULSE MAX PULSE 1 DUTY CYCLE 2651A 2 40V 15A DC 50A PULSE MAX 2651A 1 40V 15A DC 50A PULSE MAX G G G G S HI G S LO LO HI INPUT SENSE GUARD G G S HI G S LO LO HI INPUT SENSE GUARD NO INTERNAL OPERATOR SERVICEABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY WARNING MADE IN U S A HI HI Triaxial cables 4200 TRX S e ns e H I L O a n d s e n s e LO Connect ground cable CA 568 120 lugs to protective earth S e nse H I L O and s e n s e L O Interlock CA 558 2 8010 900 01 Rev A February 2012 2 7 Section 2 Connecting instruments to the Model 8010 Model 8010 High Power Device Test Fixture User s Manual Model 2651A connections NOTE There is no safety interlock on the Model 2651A the safety interlock is not ne
50. MAX G G G G S HI G S LO LO HI INPUT SENSE GUARD G G S HI G S LO LO HI INPUT SENSE GUARD NO INTERNAL OPERATOR SERVICEABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY WARNING MADE IN U S A Interlock cable CA 558 2 Sense HI CA 554 HI CA 554 LO and sense LO CA 554 Connect ground cable CA 568 120 lugs to protective earth MODELS 2657A 2600A AND 4200 SMU CONNECTIONS LO GUARD SENSE HI HI 30V MAX SENSE LO 30V MAX T 8010 900 01 Rev A February 2012 2 9 Section 2 Connecting instruments to the Model 8010 Model 8010 High Power Device Test Fixture User s Manual Model 4200 and Model 4210 SMU connections The Model 8010 includes internal protection circuitry for the Models 4200 and 4210 SMU In the case of a device under test DUT failure this circuitry protects the SMUs from high voltage from the Model 2657A NOTE The LO terminal is connected to chassis ground once you connect the Model 4200 or 4210 SMU to the Model 8010 CAUTION Do not convert triaxial cables to BNC cables Using BNC cables will remove protection from SourceMeter Instrument voltages and may result in instrument damage You must use triaxial cables Figure 7 Model 8010 to Model 4200 and Model 4210 SMU wiring diagram LINE RATING 50 60 HZ 1 KVA MAX AC ONLY LINE FUSE SLOW BLOW 15A 250V MC 1012 COM1 LPT1 28775 AURORA RD CLEVELAND OH 44139 MADE IN U S A
51. NSE GUARD connector provides Model 2651A input connections for sense HI sense LO and guard Connections are as follows S LO Sense LO G Guard S HI Sense HI 2 2 8010 900 01 Rev A February 2012 Model 8010 High Power Device Test Fixture User s Manual Section 2 Connecting instruments to the Model 8010 LO HI The 2651A 2 INPUT connector provides Model 2651A input connections for LO and HI The 2651A 1 SENSE GUARD connector provides Model 2651A input connections for sense HI sense LO and guard Connections are as follows S LO Sense LO G Guard S HI Sense HI G G G S HI G S LO LO HI INPUT The 2651A 1 INPUT connector provides Model 2651A input connections for LO and HI Ground screws for connections to protective earth safety ground The 4200 Interlock provides an interlock connection for the Model 4200 SMU and 4210 SMU instruments The Model 26XXA Interlock provides interlock connections for the Model 2611A 2612A 2635A 2636A 2651A and 2657A instruments You can have multiple interlocks connected You can use any one of the interlock connectors Installing the test boards The Model 8010 is shipped with two 8010 DTB Device Test Boards installed The boards include connections for TO 247 and axial lead devices The Model 8010 is also shipped with an 8010 CTB Customizable Test Board which allows you to add your own connections In addition
52. OURCE_IDLE smua trigger count numPulses smua trigger arm stimulus 0 smua trigger source stimulus trigger timer 1 EVENT_ID smua trigger measure stimulus trigger timer 1 EVENT_ID smua trigger endpulse stimulus trigger timer 2 EVENT_ID smua trigger source action smua ENABLE smua source output smua OUTPUT_ON smua trigger initiate waitcomplete smua source output smua OUTPUT_OFF PrintPulseData end Name PrintPulseData Description This function prints the data contained in smua nvbuffer1 and smua nvbuffer2 in a format that is copy and paste compatible with Microsoft Excel function PrintPulseData print Timestamp tVoltage tCurrent for i 1 smua nvbuffer1 n do print string format g t g t g smua nvbuffer1 timestamps i smua nvbuffer2 i smua nvbuffer1 i end end 5 8 8010 900 01 Rev A February 2012 Model 8010 High Power Device Test Fixture User s Manual Section 5 Axial lead device high current test Example program usage The functions in this script allow the parameters of the test to be adjusted without rewriting and rerunning the script To execute the test either call CapturePulseV to capture a voltage pulse or CapturePulseI to a capture current pulse passing in the appropriate values as parameters Both of these functions capture both current and voltage The difference between the functions is what they are sourcing one sources voltage and the other sources current The
53. RTS SERVICE BY QUALIFIED PERSONNEL ONLY WARNING MADE IN U S A Interlock cable CA 558 2 Connect ground cable CA 568 120 lugs to protective earth Sense and guard CA 557 1 MODELS 2657A 2600A AND 4200 SMU CONNECTIONS LO GUARD SENSE HI HI 30V MAX SENSE LO 30V MAX LO and HI 2651A KIT 1 2 8 8010 900 01 Rev A February 2012 Model 8010 High Power Device Test Fixture User s Manual Section 2 Connecting instruments to the Model 8010 Model 2657A connections Figure 6 Model 8010 to Model 2657A rear panel connections RS 232 SERIAL NO DIGITAL I O IEEE 488 LAN LINE FUSE SLOWBLOW LINE RATING 5 0A 250V 100 240VAC 50 60Hz 350VA MAX NO INTERNAL OPERATOR SERVICEABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY REPLACE FUSE WITH SAME TYPE AND RATING WARNING INPUT OUTPUT CURRENT 120mA MAX SENSE LO HI LO GUARD SENSE HI LO 3030 VDC MAX 250 V MAX AMP AMP MADE IN U S A TSP Link R 1 2 3 26XXA INTERLOCK 4200 INTERLOCK SERIAL NO SH HI LO SL 2600A 2 210V 1 5A DC 10A PULSE MAX LO SL SH HI 2600A 1 210V 1 5A DC 10A PULSE MAX PULSE 1 DUTY CYCLE SH HI LO SL 2657A 3280V 120mA DC MAX SH HI 4200 SMU 210V 1 5A DC MAX LO 4200 GND UNIT SL CAUTION 15A DC or 100A PULSE MAX PULSE 1 DUTY CYCLE 2651A 2 40V 15A DC 50A PULSE MAX 2651A 1 40V 15A DC 50A PULSE
54. The test fixture is fully interlocked providing safe operation for up to six different instruments It is declared safe through CE marking and certified through nationally recognized testing laboratories The Model 8010 is shipped with two 8010 DTB high power socket module test boards installed The boards include sockets for TO 247 and axial lead devices The high current side of the test fixture can be used with up to 100 amps pulsed 15 amps DC 200 VDC Up to four measurement resources can be connected two high current two low power The high voltage side of the test fixture can be used with up to 3030 VDC at 120 mA 200 VDC up to 10 A pulsed Connections are provided for up to three measurement resources one high voltage two low power Additional socket module test boards are available The 8010 CTB Customizable Test Board allows you to add your own socket The 8010 DTB 220 Test Board is for use with three terminal TO 220 or TO 247 devices and is limited to 1000 V and the maximum rated current of the test fixture Section 1 Welcome Model 8010 High Power Device Test Fixture User s Manual Extended warranty Additional years of warranty coverage are available on many products These valuable contracts protect you from unbudgeted service expenses and provide additional years of protection at a fraction of the price of a repair Extended warranties are available on new and existing products Contact your local Keithley Instruments repr
55. amps pulseWidth The width of the pulse in seconds 100e 6 lt pulseWidth lt 4e 3 pulseLimit The voltage limit of the pulse in volts numPulses The number of pulses to output Example Usage CapturePulseI 50 300e 6 10 5 function CapturePulseI pulseLevel pulseWidth pulseLimit numPulses if numPulses nil then numPulses 1 end 5 6 8010 900 01 Rev A February 2012 Model 8010 High Power Device Test Fixture User s Manual Section 5 Axial lead device high current test Configure the SMU reset smua reset smua source func smua OUTPUT_DCAMPS smua sense smua SENSE_REMOTE smua source rangei pulseLevel smua source leveli 0 The bias level smua source limitv 10 The DC limit Use a measure range that is as large as the biggest possible pulse smua measure rangev pulseLimit smua measure rangei pulseLevel Select the fast ADC for measurements smua measure adc smua ADC_FAST Set the measure count to be 1 25 times the width of the pulse to ensure we capture the entire pulse plus falling edge smua measure count pulseWidth smua measure interval 1 25 Prepare the reading buffers smua nvbuffer1 clear smua nvbuffer1 collecttimestamps 1 smua nvbuffer1 collectsourcevalues 0 smua nvbuffer1 fillmode smua FILL_ONCE smua nvbuffer2 clear smua nvbuffer2 collecttimestamps 1 smua nvbuffer2 collectsourcevalues 0 smua nvbuffer2 fillmode smua FILL_ONCE Cannot use source values wi
56. and stop to the same value and the number of points in the sweep to 2 smua trigger source linearv pulseLevel pulseLevel 2 smua trigger source limiti pulseLimit smua trigger measure action smua ASYNC We want to start the measurements before the source action takes place so we must configure the ADC to operate asynchronously of the rest of the SMU trigger model actions Measure I and V during the pulse smua trigger measure iv smua nvbuffer1 smua nvbuffer2 Return the output to the bias level at the end of the pulse sweep smua trigger endpulse action smua SOURCE_IDLE smua trigger endsweep action smua SOURCE_IDLE smua trigger count numPulses smua trigger arm stimulus 0 smua trigger source stimulus trigger timer 1 EVENT_ID smua trigger measure stimulus trigger timer 1 EVENT_ID smua trigger endpulse stimulus trigger timer 2 EVENT_ID smua trigger source action smua ENABLE smua source output smua OUTPUT_ON smua trigger initiate waitcomplete smua source output smua OUTPUT_OFF PrintPulseData end Name CapturePulseI pulseLevel pulseWidth pulseLimit numPulses Description This function outputs current pulses with a 1 duty cycle and performs measurements using the fast ADC to capture each pulse in its entirety At the conclusion of the pulse train the data is returned to the instrument console in a Microsoft Excel compatible format Parameters pulseLevel The current level of the pulse in
57. applied by the Model 2657A from drain to source Id measDelay Measurement delay before making the drain voltage measurement Vgs igLimit Current limit compliance for the SMU connected to the FET gate terminal vdLimit Voltage limit compliance for the SMU connected to the FET drain terminal numNPLC Integration time for the drain voltage measurement in number of power line cycles Example usage BVdss 0 0 001 0 01 0 01 2000 1 function BVdss gateV drainI measDelay igLimit vdLimit numNPLC Initialize SMU reset errorqueue clear status reset tsplink reset Configure source function node 2 smua source func node 2 smua OUTPUT_DCVOLTS node 2 smua source levelv gateV node 2 smua source limiti igLimit smua source func smua OUTPUT_DCAMPS smua source rangei drainI smua source leveli drainI smua source limitv vdLimit 8010 900 01 Rev A February 2012 4 7 Section 4 Off state characterization of a power MOSFET Model 8010 High Power Device Test Fixture User s Manual Configure measurement parameters smua measure rangev vdLimit smua measure nplc numNPLC smua measure delay measDelay Run the test node 2 smua source output 1 smua source output 1 I V smua measure iv smua source output 0 node 2 smua source output 0 print Test current I print Measured voltage V end Example program usage The function in this script allows updates to the test param
58. ate the test fixture with the lid open 7 2 Noisy low current measurements I m not getting the low current performance I expected My current measurements are noisy What is wrong Several factors can contribute to poor low current performance in the Model 8010 High Power Device Test Fixture The device test boards in the Model 8010 are not guarded Therefore the typical leakage current of the fixture is about 10 pA These boards are subject to contamination which will result in larger leakage currents If you are using the boards for low leakage measurements inspect and clean the device test boards regularly See How to clean the Model 8010 Test Fixture on page 8 1 for detail Interlock error message The SourceMeter Instrument SMU output will not turn on and I get an error message about the interlock on the SMU front panel What is wrong The lid of the Model 8010 test fixture contains a switch that controls the interlock of the Model 2657A and Series 2600A SourceMeter instruments Closing the lid closes the switch and engages the interlock Make sure the interlock cables part number CA 558 2 are properly connected between the instruments and the test fixture and that the lid of the test fixture is fully closed For additional information on interlocks see Using the interlock on page 2 5 Also see the reference manuals for your SMUs Can high current SMUs be used separately inside the fixture
59. ccordance with its specifications and operating instructions or the safety of the equipment may be impaired 11 07 11 07 Do not exceed the maximum signal levels of the instruments and accessories as defined in the specifications and operating information and as shown on the instrument or test fixture panels or switching card When fuses are used in a product replace with the same type and rating for continued protection against fire hazard Chassis connections must only be used as shield connections for measuring circuits NOT as safety earth ground connections If you are using a test fixture keep the lid closed while power is applied to the device under test Safe operation requires the use of a lid interlock If a screw is present connect it to safety earth ground using the wire recommended in the user documentation The symbol on an instrument means caution risk of danger The user should refer to the operating instructions located in the user documentation in all cases where the symbol is marked on the instrument The symbol on an instrument means caution risk of electric shock Use standard safety precautions to avoid personal contact with these voltages The symbol on an instrument shows that the surface may be hot Avoid personal contact to prevent burns The symbol indicates a connection terminal to the equipment frame If this Hg symbol is on a product it indicates that mercury is present in the display lamp
60. cessary because output voltage of the Model 2651A is below hazardous levels The CA 558 2 cable is shown here in case you want to use Output Enable to shut off the output when the Model 8010 lid is opened To activate Output Enable refer to the Model 2651A Reference Manual Output Enable can be activated using the front panel or by remote control Figure 5 Model 8010 to Model 2651A wiring diagram RS 232 LISTED SourceMeter 4ZA4 123456789 DIGITAL I O IEEE 488 LAN LINE FUSE SLOWBLOW LINE RATING 5 0A 250V 100 240VAC 50 60Hz 550VA MAX NO INTERNAL OPERATOR SERVICEABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY REPLACE FUSE WITH SAME TYPE AND RATING WARNING G G G S HI G S LO CHANNEL A 40V 20A DC 50A PULSE MAX LO HI OUTPUT SENSE GUARD AMP AMP MADE IN U S A TSP Link R 1 2 3 26XXA INTERLOCK 4200 INTERLOCK 123456789 SH HI LO SL 2600A 2 210V 1 5A DC 10A PULSE MAX LO SL SH HI 2600A 1 210V 1 5A DC 10A PULSE MAX PULSE 1 DUTY CYCLE SH HI LO SL 2657A 3280V 120mA DC MAX SH HI 4200 SMU 210V 1 5A DC MAX LO 4200 GND UNIT SL CAUTION 15A DC or 100A PULSE MAX PULSE 1 DUTY CYCLE 2651A 2 40V 15A DC 50A PULSE MAX 2651A 1 40V 15A DC 50A PULSE MAX G G G G S HI G S LO LO HI INPUT SENSE GUARD G G S HI G S LO LO HI INPUT SENSE GUARD NO INTERNAL OPERATOR SERVICEABLE PA
61. damage that may have occurred during transit Report any damage to the shipping agent immediately Save the original packing carton for possible future shipment Accessories See the Model 8010 High Power Device Test Fixture Interconnection Reference Guide for detail on provided accessories 1 2 8010 900 01 Rev A February 2012 Model 8010 High Power Device Test Fixture User s Manual Section 1 Welcome 8010 900 01 Rev A February 2012 1 3 Characteristics For indoor use only Maximum signal voltage signal or guard to any signal Three lug high voltage triaxial connector 3280 V Three lug standard triaxial connector 210 V Eight pin screw terminal connector 40 V Two pin high current screw terminal connector 40 V Maximum signal current Three lug high voltage triaxial connector 120 mA DC Three lug standard triaxial connector 1 5 A DC Eight pin screw terminal block 1 A DC Two pin high current screw terminal connector 15 A DC 50 A pulsed with one SMU 100 with two SMUs Maximum combined DC current 15 A DC Maximum pulse current 100 A at 1 duty cycle for Model 2651A High Power SourceMeter Instrument path 10 A at 1 duty cycle for Series 2600A and Model 4200 paths Altitude Maximum 2000 m above sea level Operating environment 0 C to 50 C 70 relative humidity up to 35 C Derate 3 relative humidity C 35 C to 50 C Storage 25 C to 65 C Safety Listed to UL61010 1 2004 Conforms to E
62. easDelay Measurement delay measRange Current measurement range for the drain current measurements iLimit Current limit compliance for the drain current numNPLC Integration time in the number of power line cycles Example Usage Idss 0 10 1760 500 0 05 100e 9 500e 6 1 8010 900 01 Rev A February 2012 4 9 Section 4 Off state characterization of a power MOSFET Model 8010 High Power Device Test Fixture User s Manual function Idss gateV startV stopV numSteps measDelay measRange iLimit numNPLC Initialize SMU reset errorqueue clear status reset Configure reading buffers smua nvbuffer1 clear smua nvbuffer1 appendmode 1 smua nvbuffer1 collecttimestamps 1 smua nvbuffer2 clear smua nvbuffer2 appendmode 1 smua nvbuffer2 collecttimestamps 1 Configure source parameters for the gate SMU node 2 smua source func node 2 smua OUTPUT_DCVOLTS node 2 smua source levelv gateV node 2 smua source limiti 0 001 Configure source parameters for the drain SMU smua source func smua OUTPUT_DCVOLTS smua source levelv 0 smua source limiti iLimit if math abs startV gt math abs stopV then smua source rangev startV else smua source rangev stopV end Configure measurement parameters for the drain SMU smua measure rangei measRange smua measure nplc numNPLC smua measure delay measDelay step stopV startV numSteps 1 voltage startV smua source levelv voltage
63. el 8010 High Power Device Test Fixture User s Manual Timer 1 controls the pulse period by triggering the pulse to begin trigger timer 1 count dsteps 1 trigger timer 1 delay pulsePeriod trigger timer 1 passthrough true trigger timer 1 stimulus smua trigger ARMED_EVENT_ID trigger timer 1 clear Timer 2 controls the pulse width trigger timer 2 count 1 trigger timer 2 delay pulseWidth 3e 6 trigger timer 2 passthrough false trigger timer 2 stimulus smua trigger SOURCE_COMPLETE_EVENT_ID trigger timer 2 clear Configure SMU Trigger Model for Sweep Each unit will source half the current so divide the start and stop values by 2 smua trigger source lineari dstart 2 dstop 2 dsteps smua trigger source limitv pulseLimit pulseLimit 0 1 Again keep the limit SMU 1 lower than the limit of SMU 2 to prevent parallel V sources smua trigger measure iv smua nvbuffer1 smua nvbuffer2 smua trigger measure action smua ENABLE Return to the bias level at the end of the pulse sweep smua trigger endpulse action smua SOURCE_IDLE smua trigger endsweep action smua SOURCE_IDLE smua trigger count dsteps smua trigger arm stimulus 0 smua trigger source stimulus trigger timer 1 EVENT_ID smua trigger measure stimulus 0 smua trigger endpulse stimulus trigger timer 2 EVENT_ID smua trigger source action smua ENABLE Configure 2651A 2 Drain SMU 2 n
64. ement Category I and Measurement Category II as described in the International Electrotechnical Commission IEC Standard IEC 60664 Most measurement control and data I O signals are Measurement Category I and must not be directly connected to mains voltage or to voltage sources with high transient overvoltages Measurement Category II connections require protection for high transient overvoltages often associated with local AC mains connections Assume all measurement control and data I O connections are for connection to Category I sources unless otherwise marked or described in the user documentation Exercise extreme caution when a shock hazard is present Lethal voltage may be present on cable connector jacks or test fixtures The American National Standards Institute ANSI states that a shock hazard exists when voltage levels greater than 30 V RMS 42 4 V peak or 60 VDC are present A good safety practice is to expect that hazardous voltage is present in any unknown circuit before measuring Operators of this product must be protected from electric shock at all times The responsible body must ensure that operators are prevented access and or insulated from every connection point In some cases connections must be exposed to potential human contact Product operators in these circumstances must be trained to protect themselves from the risk of electric shock If the circuit is capable of operating at or above 1000 V no conductive part of the ci
65. ent IDUT DUT current IL Leakage current HI LO SourceMeter I meter V source IM IDUT IL Safety shield Connect to protective earth safety ground using 18 AWG wire or larger Figure 16 Guarded measurements IDUT DUT Metal mounting plate RL1 Insulator IN OUT HI IN OUT LO x1 Guard 0 V SourceMeter Connect to protective earth safety ground using 18 AWG wire or larger Cable shield Safety shield I meter V source IM IDUT RL2 Section 4 Off state characterization of a power MOSFET In this section Introduction 4 1 Equipment needed 4 2 Set up communication 4 2 Device connections 4 3 Install the device and make connections 4 6 BVdss measurement 4 6 Idss measurement 4 9 Introduction This example characterizes the drain to source off state performance of a power MOSFET in a TO 247 package in the high voltage side of the Model 8010 It demonstrates how to program the Models 2657A and Series 2600A
66. es internal protection circuitry for the Models 2611A 2612A 2635A 2636A 4200 and 4210 SMUs The protection circuitry is automatically connected whenever you make connections between the Model 8010 and these SMUs CAUTION Do not convert triaxial cables to BNC cables Using BNC cables will remove protection from SourceMeter Instrument voltages and may result in instrument damage You must use triaxial cables Using the access port on the Model 8010 The rear panel of the lid of the Model 8010 contains an access port This port can be used to bring in connections for external instrumentation For example you could route oscilloscope probes through the access port to the device under test or to the guard terminal of the instruments connected to the Model 8010 WARNING Before removing the access port cover plate make sure you remove all power sources to the test fixture Failure to disconnect power may result in personal injury or death due to electric shock WARNING Removal of the access port cover plate may expose the user to hazardous live voltages Always replace the access port cover plate after use Failure to do so could expose the user to hazardous voltages that could result in personal injury or death To use the access port 1 Remove the access port cover plate 2 Route external connections through the access port 3 After testing is complete replace the access port cover plate CAUTION If you use the access port t
67. esentative for details Organization of manual sections The first part of this user manual provides general information that helps you set up install and make connections to the test fixture The sections after the general sections provide information that helps you use the Model 8010 with specific SourceMeter Instruments This information includes applications that can help you set up your tests The last part of the user manual provides maintenance and troubleshooting information It also provides references to additional resources Bookmarks for each section of this manual are provided in the PDF The manual sections are also listed in the Table of Contents located at the beginning of the manual For more information about bookmarks see Adobe Acrobat or Reader help General information Contact information If you have any questions after you review the information in this documentation please contact your local Keithley Instruments representative or call Keithley Instruments corporate headquarters toll free inside the U S and Canada only at 1 888 KEITHLEY 1 888 534 8453 or from outside the U S at 1 440 248 0400 For worldwide contact numbers visit the Keithley Instruments website http www keithley com Unpacking and inspection Each Model 8010 was carefully inspected electrically and mechanically before shipment After you unpack all items from the shipping carton check for any obvious signs of physical
68. eters without rewriting or re running the script To run the test call the BVdss function passing in the appropriate values for test parameters BVdss parameters Parameter Units Description gateV volts Gate voltage to apply with Series 2600A System SourceMeter Instrument drainI amps Drain current forced by Model 2657A measDelay seconds Measurement delay after applying drain current and before measuring BVdss igLimit amps Current limit for the Series 2600A SourceMeter Instrument connected to the MOSFET gate terminal vdLimit volts Voltage limit compliance for the Model 2657A connected to the MOSFET drain terminal should be greater than or equal to the expected BVdss value numNPLC not applicable Integration time specified as the number of power line cycles An example of how to call this function is shown here BVdss 0 0 001 0 01 0 01 2000 1 This call applies 0 V to the FET gate terminal and programs the Model 2657A to force 1 mA into the drain terminal After 10 ms the drain voltage is measured up to 2000 V max The measurement is made at 1 PLC The actual drain current is also measured The measurement results are automatically printed at the completion of the test An example of the measurements results is Test current 9 99856e 04 Measured voltage 1 76940e 03 4 8 8010 900 01 Rev A February 2012 Model 8010 High Power Device Test Fixture User s Manual Section 4 Off state characteri
69. haracterization of a power MOSFET Device connections Connect instruments to the Model 8010 Refer to the appropriate figures below to connect your SourceMeter instrument to the Model 8010 WARNING The ground wires must be attached to a known protective earth safety ground before powering on instruments Failure to attach the ground wires to a known protective earth safety ground may result in electric shock Figure 18 Model 8010 to Model 2611A or 2612A rear panel connections for MOSFET application example LINE FUSE SLOWBLOW LINE RATING 3 15A 250V 100 240VAC 50 60Hz 250VA MAX TSP Link RS 232 R SERIAL NO DIGITAL I O IEEE 488 LISTED SourceMeter 4ZA4 LAN NO AUTO MDIX CAUTION FOR CONTINUED PROTECTION AGAINST FIRE HAZARD REPLACE FUSE WITH SAME TYPE AND RATING WARNING NO INTERNAL OPERATOR SERVICEABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY AMP AMP S HI HI G S LO LO G G G CAT LO G G G S HI HI G S LO CHANNEL A CAT MADE IN U S A CHANNEL B 1 2 3 26XXA INTERLOCK 4200 INTERLOCK 123456789 MODELS 2657A 2600A AND 4200 SMU CONNECTIONS LO GUARD SENSE HI HI 30V MAX SENSE LO 30V MAX SH HI LO SL 2600A 2 210V 1 5A DC 10A PULSE MAX LO SL SH HI 2600A 1 210V 1 5A DC 10A PULSE MAX PULSE 1 DUTY CYCLE SH HI LO SL 2657A 3280V 120mA DC MAX SH HI 4200 SMU 210V 1 5A DC MAX LO
70. ied alligator clip Figure 14 Four wire remote sense with gate resistor 3 3 6 6 2 2 1 4 3 3 3 6 6 6 2 2 1 1 1 4 4 5 3 3 3 6 6 6 2 2 1 1 1 4 4 5 4 HIGH CURRENT 2651A GUARD SLO LO HI GUARD SLO LO HI SHI SLO LO 4200 2600A 1 HIGH VOLTAGE 2657A GUARD SLO LO HI SHI GUARD SLO LO HI SHI 4200 GNDU 2600A 2 TO 247 G D S G D S CA 560 0 stacked at terminal 3 CA 560 2 stack up banana cable CA 562 2 high current banana cable CA 562 0 high current banana cable CA 563 BNC to banana cable 8010 900 01 Rev A February 2012 3 7 Section 3 Working with devices and instruments Model 8010 High Power Device Test Fixture User s Manual Using the guard terminal WARNING Never connect the guard terminal from any instrument to the LO terminal of any instrument in the Model 8010 or to the chassis Connecting guard to LO can disable the high voltage protection that is installed across the Model 4200 or Model 2600A SourceMeter Instrument connections This may result in hazardous live voltages being present at the HI SHI SLO or LO terminals The guard terminal is useful for maintaining low leakage measurements if you are using the customized test board or if you are monitoring the test through the access port on the rear of the lid
71. igh current or lower power SMUs 7 2 Can I operate the test fixture with the lid open 7 2 Maintenance 8 1 Replacing the boards 8 1 How to clean the Model 8010 Test Fixture 8 1 Connector and socket cleaning 8 2 Adjusting the lid hinges 8 2 ii 8010 900 01 Rev A February 2012 Model 8010 High Power Device Test Fixture User s Manual Table of Contents 8010 900 01 Rev A February 2012 iii Next steps 9 1 Additional information 9 1 Index I 1 Section 1 Welcome In this section Welcome
72. low liquids to enter or spill on the instrument Products that consist of a circuit board with no case or chassis e g a data acquisition board for installation into a computer should never require cleaning if handled according to instructions If the board becomes contaminated and operation is affected the board should be returned to the factory for proper cleaning servicing Table of Contents Welcome 1 1 Welcome 1 1 Extended warranty 1 2 Organization of manual sections 1 2 General information 1 2 Contact information 1 2 Unpacking and inspection 1 2 Accessories
73. ltage waveforms This would be visible using an oscilloscope or the high speed ADC of the Model 2651A when monitoring the drain waveform Some manufacturers recommend adding a resistor in series with the gate terminal to suppress these oscillations The manufacturer may recommend a specific resistance value for this use or you may determine an appropriate resistance value by trial and error Resistors are not supplied with the Model 8010 but customer supplied leaded resistors may be easily installed in the Model 8010 To add a series gate resistor in the Model 8010 1 Loosen the binding post that is connected to pin 4 of the device test board 2 Insert one end of the resistor into the opening at the base of the binding post 3 Tighten the binding post to hold the resistor in place 4 Remove the CA 563 cables that connect the Series 2600A HI and SHI terminals to pins 1 and 4 of the device test board 5 Connect an alligator clip customer supplied to the banana plug at the end of the SHI cable 6 Connect the alligator clip to the other terminal of the axial resistor 7 Stack the HI banana plug onto the SHI banana plug Figure 31 Three terminal DUT with a Model 2651A in remote with gate resistor installed 1 4 4 3 3 3 6 6 6 2 2 1 1 1 4 4 5 3 3 3 6 6 6 2 2 1 1 1 4 4 5 4 HIGH CURRENT 2651A GUARD SLO LO SHI GUARD SLO LO HI S
74. o output pulses and capture both the current and the voltage of the pulse using the fast ADC of the Model 2651A High Power System SourceMeter instrument Equipment Needed 1x 2651A Name CapturePulseV pulseLevel pulseWidth pulseLimit numPulses Description This function outputs voltage pulses with a 1 duty cycle and performs measurements using the fast ADC to capture each pulse in its entirety At the conclusion of the pulse train the data is returned to the instrument console in a Microsoft Excel compatible format Parameters pulseLevel The voltage level of the pulse in volts pulseWidth The width of the pulse in seconds 100e 6 lt pulseWidth lt 4e 3 pulseLimit The current limit of the pulse in amps numPulses The number of pulses to output Example Usage CapturePulseV 5 300e 6 50 5 5 4 8010 900 01 Rev A February 2012 Model 8010 High Power Device Test Fixture User s Manual Section 5 Axial lead device high current test function CapturePulseV pulseLevel pulseWidth pulseLimit numPulses if numPulses nil then numPulses 1 end Configure the SMU reset smua reset smua source func smua OUTPUT_DCVOLTS smua sense smua SENSE_REMOTE smua source rangev pulseLevel smua source levelv 0 The bias level smua source limiti 5 The DC limit Use a measure range that is as large as the biggest possible pulse smua measure rangei pulseLimit smua measure rangev pulseLevel Selec
75. o route an oscilloscope probe be sure to use a probe that is rated for the maximum current or voltage expected in your test setup Failure to do so can result in equipment damage Quick Tip If you wish to use the oscilloscope voltage probe to monitor the instrument output connect the probe to the Guard terminal to avoid loading the device under test Section 3 Working with devices and instruments In this section Safety information 3 1 About the device test boards 3 1 Installing a device in the axial posts 3 2 Installing a device in the TO socket 3 3 Using the insulating plug 3 3 Measurement considerations 3 4 Using the guard terminal 3 8 Safety information WARNING Verify that all wiring is to the inside of the cross hatched area of the test fixture Ensure that wires do not protrude beyond the fixture lid and that the lid will close securely Exposed wire may result in electric shock causing death or serious injury Hazardous voltages may be present on the output and guard terminals To prevent electrical shock that could cause injury or death never make or
76. ode 2 smua reset node 2 smua source func node 2 smua OUTPUT_DCAMPS node 2 smua sense node 2 smua SENSE_REMOTE node 2 smua source offmode node 2 smua OUTPUT_NORMAL node 2 smua source offfunc node 2 smua OUTPUT_DCAMPS node 2 smua source offlimitv 10 Set off limit SMU is a 0 A current source with 10 V limit when output is turned off node 2 smua source rangei math max math abs dstart 2 math abs dstop 2 node 2 smua source leveli 0 Sets the DC bias level node 2 smua source limitv 10 Sets the DC bias limit node 2 smua measure nplc 0 005 node 2 smua measure rangev pulseLimit node 2 smua measure autozero node 2 smua AUTOZERO_ONCE node 2 smua measure delay pulseWidth 1 node 2 linefreq node 2 smua measure nplc 20e 6 Set the delay so that the measurement is near the end of the pulse 6 12 8010 900 01 Rev A February 2012 Model 8010 High Power Device Test Fixture User s Manual Section 6 On state characterization of a power MOSFET Prepare the reading buffers node 2 smua nvbuffer1 clear node 2 smua nvbuffer1 collecttimestamps 1 node 2 smua nvbuffer1 collectsourcevalues 1 node 2 smua nvbuffer1 fillmode node 2 smua FILL_ONCE node 2 smua nvbuffer2 clear node 2 smua nvbuffer2 collecttimestamps 1 node 2 smua nvbuffer2 collectsourcevalues 1 node 2 smua nvbuffer2 fillmode node 2 smua FILL_ONCE Configure TSP Link Trigger 1 node 2 tsplink trigge
77. ows DualSmuRdson 10 1 100 100 500e 6 50e 3 10 This call will set the gate source measure unit SMU output to 10 V and then sweep the drain of the device from 1 A to 100 A in 100 points The points of this sweep will be gathered using pulsed measurements with a pulse width of 500 s and a pulse period of 50 ms for a 1 percent duty cycle These pulses will be limited to a maximum of 10 V At the end of the sweep all SMU outputs will be turned off The resulting data from this test will be returned in a Microsoft Excel compatible format you can cut and paste the output from the console that can be used for graphing and analysis The data can be plotted to show drain current versus Rds on for the DUT The following graphic is an example of this plot Figure 33 Example Rds on curves for a power MOSFET device 0 01 0 10 20 30 40 50 60 70 80 90 100 0 011 0 012 0 013 0 014 0 015 0 016 0 017 0 018 0 019 0 02 Ids amperes Rds on Vgs 10 V Vgs 6 V Section 7 Troubleshooting FAQs In this section Noisy low current measurements 7 1 Interlock error message 7 1 Can high current SMUs be used separately inside the fixture 7 1 The device is oscillating How do I correct this 7 2 Can I use local sense for high current or lower power SMUs 7 2 Can I oper
78. parameters of the CapturePulseV function are described in the following table CapturePulseV parameters Parameter Units Description pulseLevel Volts The voltage level of the pulse pulseWidth Seconds The width of the pulse pulseLimit Amperes The current limit of the pulses to output numPulses Not applicable The number of pulses to output An example call to this function is as follows CapturePulseV 10 300e 6 50 5 This call will output five 10 V pulses with a 300 s pulse width The pulses will be limited to 50 A and have a 1 percent duty cycle At the completion of the pulsed outputs the source measure unit SMU output is turned off The resulting data from this test will be returned in a Microsoft Excel compatible format you can cut and paste the output from the console that can be used for graphing and analysis The parameters of the CapturePulseI function are contained in the following table CapturePulseI parameters Parameter Units Description pulseLevel Amperes The current level of the pulse pulseWidth Seconds The width of the pulse pulseLimit Volts The voltage limit of the pulses to output numPulses Not applicable The number of pulses to output An example call to this function is as follows CapturePulseI 50 300e 6 10 5 This call will output five 50 A pulses with a 300 s pulse width The pulses will be limited to 10 V and have a 1 duty cycle At the completion
79. r 1 clear node 2 tsplink trigger 1 mode node 2 tsplink TRIG_FALLING Timer 1 controls the pulse width node 2 trigger timer 1 count 1 node 2 trigger timer 1 delay pulseWidth 3e 6 node 2 trigger timer 1 passthrough false node 2 trigger timer 1 stimulus node 2 smua trigger SOURCE_COMPLETE_EVENT_ID node 2 trigger timer 1 clear Configure SMU Trigger Model for Sweep node 2 smua trigger source lineari dstart 2 dstop 2 dsteps node 2 smua trigger source limitv pulseLimit node 2 smua trigger measure iv node 2 smua nvbuffer1 node 2 smua nvbuffer2 node 2 smua trigger measure action node 2 smua ENABLE Return the output to the bias level at the end of the pulse sweep node 2 smua trigger endpulse action node 2 smua SOURCE_IDLE node 2 smua trigger endsweep action node 2 smua SOURCE_IDLE node 2 smua trigger count dsteps node 2 smua trigger arm stimulus 0 node 2 smua trigger source stimulus node 2 tsplink trigger 1 EVENT_ID node 2 smua trigger measure stimulus 0 node 2 smua trigger endpulse stimulus node 2 trigger timer 1 EVENT_ID node 2 smua trigger source action node 2 smua ENABLE Configure the 26xxA Gate SMU node 3 smua reset node 3 smua source func node 3 smua OUTPUT_DCVOLTS node 3 smua sense node 3 smua SENSE_REMOTE node 3 smua source levelv gateLevel node 3 smua source highc node 3 smua ENABLE If you find your
80. r panel of the Model 8010 WARNING The ground wires must be attached to a known protective earth safety ground before powering on instruments Failure to attach the ground wires to a known protective earth may result in electric shock The input output terminals of the Model 8010 High Power Device Test Fixture are rated for connection to circuits rated Installation Category I only with transients rated less than 1500 V peak above the rated input Do not connect the Model 8010 terminals to CAT II CAT III or CAT IV circuits Connection of the Model 8010 terminals to circuits higher than CAT I can cause damage to the equipment or expose the operator to hazardous voltage 8010 900 01 Rev A February 2012 2 5 Section 2 Connecting instruments to the Model 8010 Model 8010 High Power Device Test Fixture User s Manual Model 2611A and Model 2612A connections The Model 8010 includes internal protection circuitry for the Model 2611A and 2612A SMUs If there is a device under test DUT failure this circuitry protects the SMUs from high voltage from the Model 2657A NOTE The LO terminal is connected to chassis ground if you connect the Model 2611A or 2612A to the Model 8010 through the Model 2600 TRIAX CAUTION Do not convert triaxial cables to BNC cables Using BNC cables will remove protection from SourceMeter Instrument voltages and may result in instrument damage You must use triaxial cables Figure 3 Model 8010 to Model 261
81. r real world applications For connection overviews see the Interconnection Reference Guide It provides a quick reference for typical test connections It also shows you how to install and set up the instrument The Interconnection Reference Guide is provided with the test fixture and is also available as a PDF on the CD ROMs that came with the test fixture For more detailed information about the SourceMeter instruments refer to the SourceMeter instrument reference manuals The CD ROMs that are included with your test fixture contain the following Model 8010 product document in PDF The Interconnection Reference Guide This User s Manual Information for the TO 247 Device Test Board 8010 DTB 8010 CTB Customizable Test Board 8010 CTB and TO 220 or TO 247 Device Test Board 8010 DTB 220 The data sheet The product specifications For additional support information see http www keithley com support http www keithley com Index A access port 2 12 accessories available 1 2 applications axial lead device high current test 5 1 fast ADC 5 1 MOSFET characterization 4 1 power MOSFET characterize Rds on 6 1 axial lead device high current test 5 1 B board replacement 8 1 C characteristics 1 3 cleaning connectors and sockets 8 2 test fixture 8 1 connection 3 2 3 3 rear panel 2 1 2 5 contact information 1 2 E error mes
82. rcuit may be exposed Do not connect switching cards directly to unlimited power circuits They are intended to be used with impedance limited sources NEVER connect switching cards directly to AC mains When connecting sources to switching cards install protective devices to limit fault current and voltage to the card Before operating an instrument ensure that the line cord is connected to a properly grounded power receptacle Inspect the connecting cables test leads and jumpers for possible wear cracks or breaks before each use When installing equipment where access to the main power cord is restricted such as rack mounting a separate main input power disconnect device must be provided in close proximity to the equipment and within easy reach of the operator For maximum safety do not touch the product test cables or any other instruments while power is applied to the circuit under test ALWAYS remove power from the entire test system and discharge any capacitors before connecting or disconnecting cables or jumpers installing or removing switching cards or making internal changes such as installing or removing jumpers Do not touch any object that could provide a current path to the common side of the circuit under test or power line earth ground Always make measurements with dry hands while standing on a dry insulated surface capable of withstanding the voltage being measured The instrument and accessories must be used in a
83. ree pin socket on the device test boards inherently shorts the force and sense pins together When you are using the axial terminal posts in 4 wire mode this can cause measurement errors You should insert the insulating plug into the three pin socket when testing devices with axial leads in 4 wire sense mode where a short between force and sense will cause measurement errors Do not use the insulating plug when testing devices with higher resistance greater than 1 M Using the plug for these tests may cause leakage measurement errors 8010 900 01 Rev A February 2012 3 3 Section 3 Working with devices and instruments Model 8010 High Power Device Test Fixture User s Manual Measurement considerations The following topics describe some considerations you should be aware of when taking measurements With the Model 8010 you can make measurements using either 2 wire local or 4 wire remote sensing Examples of each are shown in the Model 8010 Interconnection Reference Guide The 2 wire sensing method requires only two test leads However as shown in the following figure test lead resistance can seriously affect the accuracy of 2 wire resistance measurements particularly when measuring lower resistance values Figure 11 2 wire resistance sensing I HI VR Test current I Resistance under test Lead resistances Rs I Current sourced Voltage measured Voltage across resistor LO RLEAD
84. s found is generated during the TSP Link reset ensure that each SourceMeter instrument has a unique TSP Link node number Example program code NOTE The example code is designed to be run from Test Script Builder or TSB Embedded It can also be run from other programming environments such as Microsoft Visual Studio or National Instruments LabVIEWTM However you may need to make changes to the example code to use other programming environments The following script contains all the code necessary to perform an Rds on sweep up to 100 A using two Model 2651A High Power System SourceMeters and a Series 2600A System SourceMeter Instrument This script Initializes the TSP Link connection Configures the source measure units SMUs Configures the trigger models of the two Model 2651A instruments Prepares the reading buffers Executes the test Returns the collected data in a format that can be copied from the instrument console and pasted into a Microsoft Excel spreadsheet The script is written using Test Script Processor TSP functions rather than as a single block of inline code TSP functions are similar to functions in other programming languages such as Microsoft Visual C or Visual Basic They must be called before the code in them is executed Because of this running the script alone will not execute the test To execute the test you need to run the script to load the functions into te
85. sages interlock 7 1 examples Combining SMUs for 100 A current sweep 6 9 6 16 fast sampling ADC examples 5 4 F FAQs 7 1 G guard 3 7 H hinge adjustment 8 2 I installation device axial posts 3 2 device TO socket 3 3 insulating plug 3 3 interlock 2 5 7 1 L low current measurements improve 7 1 M maintenance 8 1 measurement considerations 3 3 MOSFET characterization 4 1 O oscillation suppress 3 6 7 2 oscilloscope probe 2 12 P poor low current performance 7 1 port access 2 12 protection circuitry 2 12 R rear panel access port 2 12 connection details 2 5 Model 2611A 2 6 Model 2612A 2 6 Model 2635A 2 7 Model 2636A 2 7 Model 2651A 2 8 Model 2657A 2 9 Model 4200 2 10 2 11 Model 4210 SMU 2 10 2 11 summary 2 1 S safety information 3 1 scripts Examples 5 4 5 9 6 9 6 16 T test board about 1 2 3 1 install device 3 2 3 3 installation 2 3 troubleshooting FAQs 7 1 Index Model 8010 High Power Device Test Fixture User s Manual 2 8010 900 01 Rev A February 2012 interlock error message 7 1 W Warranty 1 2
86. st script memory You then call the functions Refer to the documentation for Test Script Builder or TSB Embedded for directions on how to run scripts and enter commands using the instrument console The script contains comments The comments describe what is being performed by the lines of code They also document the functions in the script Lines starting with node 2 are commands that are being sent to the Model 2651A on node 2 through the TSP Link interface Lines starting with node 3 are commands that are being sent to the Series 2600A through the TSP Link interface All other commands are executed on the master Model 2651A on node 1 8010 900 01 Rev A February 2012 6 9 Section 6 On state characterization of a power MOSFET Model 8010 High Power Device Test Fixture User s Manual Title Combining SMUs for 100A Example Description This script is designed to perform an Rds on sweep on a power MOSFET device It combines two 2651A SMUs in parallel to perform a current sweep up to 100A Data collected from the sweep is then returned in a Microsoft Excel compatible format for plotting and analysis Equipment needed 2x 2651A 1x 26xxA 2x TSP Link Cable TSP Link Configuration Unit Node 2651A 1 1 2651A 2 2 26xxA 3 Master Node PC Interface Node 1 Name DualSmuRdson gateLevel dstart dstop dsteps pulseWidth pulsePeriod pulseLimit Description This function uses two 2651
87. sults in a lower resistance path This is particularly important for high current applications When testing axial lead devices note that posts 1 and 3 put the sense leads closer to the device under test This reduces measurement error due to lead resistance Figure 9 Force and sense binding posts 3 3 3 6 6 6 2 2 1 1 1 4 4 5 4 Force binding posts Sense binding posts Two 8010 DTB high power socket module test boards are installed in the Model 8010 The Model 8010 is also shipped with an 8010 CTB Customizable Test Board which allows you to add your own connections In addition you can purchase the 8010 DTB 220 Device Test Board for use with three terminal TO 220 or TO 247 devices You can also purchase replacement 8010 DTB and 8010 CTB boards Installing a device in the axial posts This section discusses how to install devices in the axial terminal posts on the 8010 DTB or 8010 DTB 220 Device Test Board To install a device in the axial posts 1 Insert the device in the axial posts 2 Insert the insulating plug in the TO socket terminals if needed See Using the insulating plug on page 3 3 for detail See Axial lead device high current test on page 5 1 for an example Figure 10 Model 8010 DTB and DTB 220 axial leads and TO socket 3 3 3 6 6 6 2 2 1 1 1 4 4 5 4 Axial terminal posts Three pin TO socket Axial terminal posts
88. t One power MOSFET in a TO 247 package Cables to connect the two Model 2651A instruments to the Model 8010 Two Model 2651A KIT 1 and two Model CA 557 1 cable assemblies Cables to connect the Series 2600A to the Model 8010 Three Model 7078 TRX cable assemblies Adapter to connect the Series 2600A to the Model 8010 One Model 2600 TRIAX adapter for Models 2611A and 2612A Cables to connect instruments to the device in the Model 8010 One Model CA 562 2 one Model CA 562 0 three Model CA 560 0 one Model CA 560 2 and two Model 563 cables One CA 558 2 interlock cable One GPIB cable or Ethernet cable Two TSP Link cables Connect instruments to the Model 8010 Make connections between the Model 8010 and the SourceMeter Instruments as shown in the graphics below Use the following graphic that is appropriate for your instrument WARNING The ground wires must be attached to a known protective earth safety ground before powering on instruments Failure to attach the ground wires to a known protective earth safety ground may result in electric shock 6 2 8010 900 01 Rev A February 2012 Model 8010 High Power Device Test Fixture User s Manual Section 6 On state characterization of a power MOSFET Figure 27 Model 8010 to Model 2611A or 2612A rear panel connections for MOSFET application example LINE FUSE SLOWBLOW LINE RATING 3 15A 250V 100 240VAC 50 60Hz 250VA MAX TSP Link RS 2
89. t the Series 2600A to the Model 8010 Three Model 7078 TRX cable assemblies One CA 558 2 interlock cable Model 2611A or 2612A only Adapter to connect the SMU to the Model 8010 One Model 2600 TRIAX triaxial adapter Cables to connect instruments to the device in the Model 8010 Two Model CA 563 and two Model CA 560 0 cables One GPIB cable or Ethernet cable One TSP Link cable Set up communication The communication setup is illustrated in the following diagram GPIB is used as an example but this application can be run using any of the supported communication interfaces for the instruments Figure 17 GPIB and TSP Link communications setup CURSOR SRC MEAS LIMIT MODE POWER AUTO O U T P U T O N O F F 2657A HIGH POWER SYSTEM SourceMeter 1 2 3 4 DISPLAY CONFIG 5 6 7 8 9 0 0000 SPEED DIGITS FILTER REL RECALL STORE MENU TRIG ENTER LOCAL EXIT RUN LOAD P U S H T O E D I T E N T E R P U S H T O E D I T E N T E R CONFIG NF 0 01000nA ARM SrcA 3 00000kV LimA 1 00000mA Model 2611A Model 2612A Model 2635A or Model 2636A TSP Link Node 2 TSP Link Model 2657A TSP Link Node 1 GPIB 4 2 8010 900 01 Rev A February 2012 Model 8010 High Power Device Test Fixture User s Manual Section 4 Off state c
90. t the fast ADC for measurements smua measure adc smua ADC_FAST Set the measure count to be 1 25 times the width of the pulse to ensure we capture the entire pulse plus falling edge smua measure interval 1e 6 smua measure count pulseWidth smua measure interval 1 25 Prepare the reading buffers smua nvbuffer1 clear smua nvbuffer1 collecttimestamps 1 smua nvbuffer1 collectsourcevalues 0 smua nvbuffer1 fillmode smua FILL_ONCE smua nvbuffer2 clear smua nvbuffer2 collecttimestamps 1 smua nvbuffer2 collectsourcevalues 0 smua nvbuffer2 fillmode smua FILL_ONCE Cannot use source values with async measurements Configure the Pulsed Sweep setup Timer 1 controls the pulse period trigger timer 1 count numPulses 1 1 Duty Cycle trigger timer 1 delay pulseWidth 0 01 trigger timer 1 passthrough true trigger timer 1 stimulus smua trigger ARMED_EVENT_ID Timer 2 controls the pulse width trigger timer 2 count 1 trigger timer 2 delay pulseWidth 3e 6 trigger timer 2 passthrough false trigger timer 2 stimulus smua trigger SOURCE_COMPLETE_EVENT_ID 8010 900 01 Rev A February 2012 5 5 Section 5 Axial lead device high current test Model 8010 High Power Device Test Fixture User s Manual Configure SMU Trigger Model for Sweep Pulse Output Pulses will all be the same level so set start
91. tage Combined Current rdson combinedVoltage combinedCurrent Print a row of data print string format g t g t g t g t g t g t g t g t g smua nvbuffer1 timestamps i sourceLevel smua nvbuffer2 i smua nvbuffer1 i node 2 smua nvbuffer2 i node 2 smua nvbuffer1 i combinedVoltage combinedCurrent rdson end end 8010 900 01 Rev A February 2012 6 15 Section 6 On state characterization of a power MOSFET Model 8010 High Power Device Test Fixture User s Manual 6 16 8010 900 01 Rev A February 2012 Example program usage The functions in this script allow the sweep parameters of the test to be adjusted without having to rewrite and rerun the script A test can be executed by calling the function DualSmuRdson gateLevel dstart dstop dsteps pulseWidth pulsePeriod pulseLimit with the appropriate values passed to it in its parameters DualSmuRdson parameters Parameter Units Description gateLevel Volts The voltage level to hold the gate dstart Amperes The level of the first step in the drain sweep dstop Amperes The level of the last step in the drain sweep dsteps Not applicable The number of steps in the drain sweep pulseWidth Seconds The width of the pulse in the drain sweep pulsePeriod Seconds The time between the start of consecutive pulses in the drain sweep pulseLimit Volts The voltage limit of the pulses in the drain sweep An example call to this function is as foll
92. test board is installed Refer to Installing the test boards on page 2 3 for information on installing the device test boards 2 Remove the insulating plug if installed 3 Install the device in the socket so that the gate terminal is connected to pins 1 and 4 of the device test board 4 Make the connections as shown in the graphic below Figure 30 Three terminal DUT with one or two Model 2651A instruments and Series 2600A instrument connected remote sense 3 6 2 2 1 1 4 4 3 3 3 6 6 6 2 2 1 1 1 4 4 5 3 3 3 6 6 6 2 2 1 1 1 4 4 5 4 HIGH CURRENT 2651A GUARD SLO LO HI SHI GUARD SLO LO HI SHI SLO LO 4200 2600A 1 HIGH VOLTAGE 2657A GUARD SLO LO HI SHI GUARD SLO LO HI SHI 4200 GNDU 2600A 2 TO 247 G D S G D S CA 560 0 stacked at terminal 3 CA 560 2 stack up banana cable CA 562 2 high current banana cable CA 562 0 high current banana cable CA 563 BNC to banana cable 6 6 8010 900 01 Rev A February 2012 Model 8010 High Power Device Test Fixture User s Manual Section 6 On state characterization of a power MOSFET Suppressing device oscillations optional Power transistors are prone to self oscillation under forward bias conditions In such cases there may be oscillations or ringing in the gate or drain vo
93. th async measurements Configure the Pulsed Sweep setup Timer 1 controls the pulse period trigger timer 1 count numPulses 1 1 Duty Cycle trigger timer 1 delay pulseWidth 0 01 trigger timer 1 passthrough true trigger timer 1 stimulus smua trigger ARMED_EVENT_ID Timer 2 controls the pulse width trigger timer 2 count 1 trigger timer 2 delay pulseWidth 3e 6 trigger timer 2 passthrough false trigger timer 2 stimulus smua trigger SOURCE_COMPLETE_EVENT_ID 8010 900 01 Rev A February 2012 5 7 Section 5 Axial lead device high current test Model 8010 High Power Device Test Fixture User s Manual Configure SMU Trigger Model for Sweep Pulse Output Pulses will all be the same level so set start and stop to the same value and the number of points in the sweep to 2 smua trigger source lineari pulseLevel pulseLevel 2 smua trigger source limitv pulseLimit smua trigger measure action smua ASYNC We want to start the measurements before the source action takes place so we must configure the ADC to operate asynchronously of the rest of the SMU trigger model actions Measure I and V during the pulse smua trigger measure iv smua nvbuffer1 smua nvbuffer2 Return the output to the bias level at the end of the pulse smua trigger endpulse action smua SOURCE_IDLE smua trigger endsweep action smua S
94. ts Description gateV volts Gate voltage to apply with Series 2600A System SourceMeter Instrument startV volts Start voltage for the drain voltage sweep stopV volts Final voltage for the drain voltage sweep numSteps not applicable Number of voltage steps to perform in the voltage sweep measDelay seconds Measurement delay after applying drain voltage and before measuring drain leakage current measRange amps Fixed current measurement range used to measure drain leakage current iLimit amps Current limit compliance for the Model 2657A connected to the MOSFET drain terminal numNPLC not applicable Integration time specified as the number of power line cycles An example of how to call this function is shown here Idss 0 10 1760 500 0 05 100e 9 500e 6 1 This call applies 0 V to the MOSFET gate terminal and programs the Model 2657A to generate a 500 point voltage sweep from 0 V to 1760 V at the drain terminal After each voltage step a 50 ms delay occurs before the current is measured The measurement is made at 1 PLC The measurements are stored in the instrument s reading buffers and are output from the communication interface immediately after the test is run Example output data is shown in the following graphic Figure 22 Example output data Section 5 Axial lead device high current test In this section Introduction
95. uropean Union Low Voltage Directive Section 2 Connecting instruments to the Model 8010 In this section Rear panel overview 2 1 Installing the test boards 2 3 Using the interlock 2 5 Connections to the rear panel 2 5 Using the access port on the Model 8010 2 12 Rear panel overview Instrument connections are made to the rear panel of the Model 8010 The rear panel of Model 8010 is shown below Descriptions of the rear panel connections are provided after the graphic Figure 1 Model 8010 rear panel 26XXA INTERLOCK 1234567890 SH HI LO SL 2657A 3280V 120mA DC MAX SH HI LO SL 2600A 2 210V 1 5A DC 10A PULSE MAX CAUTION 15A DC or 100A PULSE MAX PULSE 1 DUTY CYCLE SH LO HI 4200 SMU 210V 1 5A DC MAX LO SL SH HI 2600A 1 210V 1 5A DC 10A PULSE MAX 2651A 2 40V 15A DC 50A PULSE MAX 2651A 1 40V 15A DC 50A PULSE MAX MADE IN U S A 4200 GND UNIT G G G G S HI G S LO LO HI INPUT SENSE GUARD G G S HI G S LO LO HI INPUT SENSE GUARD SL PULSE 1 DUTY CYCLE 4200 INTERLOCK NO INTERNAL OPERATOR SERVICEABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY WARNIN
96. with the test fixture lid open may expose the user to electrical burn and projectile hazards Section 8 Maintenance In this section Replacing the boards 8 1 How to clean the Model 8010 Test Fixture 8 1 Connector and socket cleaning 8 2 Adjusting the lid hinges 8 2 Replacing the boards The Model 8010 is shipped with two 8010 DTB Device Test Boards installed The boards include connections for TO 247 and axial lead devices The Model 8010 is also shipped with an 8010 CTB Customizable Test Board which allows you to add your own connections In addition you can purchase the 8010 DTB 220 Device Test Board for use with three terminal TO 220 or TO 247 devices This board is limited to 1000 V You can also purchase replacement 8010 DTB boards and 8010 CTB boards You can replace any of these boards as needed For replacement instructions see Installing the test boards on page 2 3 How to clean the Model 8010 Test Fixture To prevent contamination that may degrade performance use care when handling or servicing the test fixture To avoid damage to the test fixture do not use any abrasive or chemical cleaning agents To clean the Model 8010 1 Remove power from all instruments that are connected to the test fixture
97. wo wire and four wire sensing If you are using remote sense connections in the Model 8010 you must enable remote sense on the instrument 8010 900 01 Rev A February 2012 3 5 Section 3 Working with devices and instruments Model 8010 High Power Device Test Fixture User s Manual Suppressing device oscillations During on state characterization of MOSFET and IGBT devices high current pulses that travel through the channel of the device may cause the gate of the device to oscillate The instability of the gate voltage will result in unstable measurements through the device channel To dampen these oscillations and stabilize the gate you can insert a resistor between the gate of the device and the SourceMeter Instrument SMU connected to the gate See How to insert a resistor on a device terminal on page 3 6 for detail The appropriate gate resistor value is device dependent However typical gate resistor values range from tens to hundreds of ohms If the gate remains unstable after inserting a dampening resistor enable the high capacitance mode if available on the SMU connected to the gate How to insert a resistor on a device terminal The Model 8010 is equipped to connect a standard resistor with axial leads to any device terminal To connect a resistor to the Model 8010 1 Loosen the screw down clamp of the terminal post you wish to connect to 2 Insert one lead of the resistor into the hole below the screw down clamp
98. www keithley com E C N E D I F N O C F O E R U S A E M R E T A E R G A Model 8010 High Power Device Test Fixture User s Manual 8010 900 01 Rev A February 2012 Model 8010 High Power Device Test Fixture User s Manual 2012 Keithley Instruments Inc Cleveland Ohio U S A All rights reserved Any unauthorized reproduction photocopy or use the information herein in whole or in part without the prior written approval of Keithley Instruments Inc is strictly prohibited All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments Inc Other brand names are trademarks or registered trademarks of their respective holders The Lua 5 0 software and associated documentation files are copyright 1994 2008 Tecgraf PUC Rio Terms of license for the Lua software and associated documentation can be accessed at the Lua licensing site http www lua org license html Document number 8010 900 01 Rev A February 2012 Safety Precautions The following safety precautions should be observed before using this product and any associated instrumentation Although some instruments and accessories would normally be used with nonhazardous voltages there are situations where hazardous conditions may be present This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required to
99. y 2012 Model 8010 High Power Device Test Fixture User s Manual Section 2 Connecting instruments to the Model 8010 Model 4200 and Model 4210 SMU with preamplifier connections The Model 8010 includes internal protection circuitry for the Models 4200 and 4210 SMU In the case of a device under test DUT failure this circuitry protects the SMUs from high voltage from the Model 2657A NOTE The LO terminal is connected to chassis ground once you connect the Model 4200 or 4210 SMU to the Model 8010 CAUTION Do not convert triaxial cables to BNC cables Using BNC cables will remove protection from SourceMeter Instrument voltages and may result in instrument damage You must use triaxial cables Figure 8 Model 8010 to Model 4200 or Model 4210 SMU with preamplifier rear panel connections LINE RATING 50 60 HZ 1 KVA MAX AC ONLY LINE FUSE SLOW BLOW 15A 250V MC 1012 COM1 LPT1 28775 AURORA RD CLEVELAND OH 44139 MADE IN U S A GNDU INSTRUMENT CONNECTIONS SMU ONLY SMU AND GNDU SENSE GUARD COMMON FORCE COMMON SENSE LO SENSE LO GUARD CE SENS E FORCE C O M M ON SMU 9 SMU 5 SMU 6 SMU 7 SMU 8 SMU 4 SMU 1 SMU 2 SMU 3 4200 SMU SENSE LO 4200 SMU SENSE LO SENSE FORCE SENSE FORCE PA CNTRL PA CNTRL 4200 TM INTLK IN OUT 1 2 3 26XXA INTERLOCK 4200 INTERLOCK 123456789 MODELS 2657A 2
100. zation of a power MOSFET Idss measurement This example Performs the Idss measurement where the drain to source voltage Vds is swept and leakage current measurements are made while the FET is in the off state Monitors the current measurement to see if the current limit has been reached When the current limit has been reached the voltage sweep is aborted With this method a second System SourceMeter is used to apply a voltage from gate to source Vgs This example uses a TSP script to perform the measurement The script includes two separate functions for configuring the System SourceMeter Instruments and returning the raw current and voltage readings from the reading buffer Example program code Title FET Drain to Source Leakage Current Measurement Sweep Description This script measures the drain current while the drain voltage is sweeping linearly and under a 0 V gate bias Idss gateV startV stopV numSteps measDelay measRange iLimit numNPLC Description This function uses the Model 2657A to sweep the voltage across the drain up to the drain source breakdown voltage and measure the drain current A second SourceMeter instrument is used to bias the gate For enhancement mode power MOSFETs a typical gate bias is 0 V Parameters gateV Applied gate voltage bias Vgs startV Starting drain voltage Vds stopV Final drain voltage Vds numSteps Number of points in the drain voltage sweep m

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