FMS User manual
Contents
1. ob z p en E 91 Zt 9 001SINd gt 9 pc Hid30 1 T Oeae VHddSINd DE 5 CD ddSIN 8 NE 393S4W MH9S ONIXIA HOS on gt S310H SS199V v I I Oo TO A Gr 06 x HGe 06 6 1 HOS NO GZ G6 Z HOS NO A GHL 9 S310H t GHL 9 S310H t om 6E A lt HL gt Experience Solutions QAD Newport FMS Series Precision Linear Stages 90 Maintenance 9 1 9 2 EDH0267En1030 10 15 RECOMMENDATION It is recommended to contact our After Sales Service which will know to define the appropriate maintenance for your application Maintenance The FMS stage requires no particular maintenance Nevertheless this is a precision mechanical device that must be kept and operated with caution PRECAUTIONS The FMS stage must be used or stocked in a clean environment without dust humidity solvents or other substances RECOMMENDATION It is recommended to return your FMS stage to Newport s After Sales Service after every 2000 hours of use for lubrication If your stage is mounted on a workstation and cannot be easily removed please contact Newport s After Sales Service for further instructions Repair CAUTION Never attempt to disassemble a component of the stage that has not been covered in this manual2. SUB D25M SUB D25F CONNECTOR CONNECTOR 9 x 0 50 mm Red AWG20 Red E 9 0 50 mm Black AWG20 Black 11 11 1 Ex 0 34 mm White AWG22 White D 1 9 l 0 34 mm Brown AWG22 Brown 2 3 0 34 mm Green AWG22 Green 3 0 34 mm Yellow AWG 22 Yellow 4 4 6 6 5 fu y 0 34 mm White AWG22 White a 5 6 I 0 34 mm Brown AWG22 Brown 6 7 i I 0 34 mm Green AWG 22 Green 7 8 l _ 0 34 mm Yellow AWG22 Yellow 8 Y m Y 14 rain Drain 14 1 1 16 a 0 14 mm White AWG26 White 7 16 13 x X 0 14 mm2 Green AWG26 Green i x x 13 19 I 1 0 14 mm Blue AWG26 Blue 19 23 X x 0 14 mm2 Gray AWG26 Gray X X 23 20 0 14 mm Brown AWG26 Brown 20 24 x X __ 0 14 mm Natural AWG26 Natural X x 24 15 i 0 14 mm Red AWG26 Red 15 25 X Xr 0 14 mm Black AWG26 Black pone 25 17 a _ 0 14 mm Yellow AWG 26 Yellow I a 17 18 X X i l 0 14 mm Purple AWG26 Purple i X X 18 21 0 14 mm Orange AWG26 Orange 21 X X 0 14 mm White Black AWG26 White Black X X 22 A 0 te Black 1 A 22 v Y y v Connected i o Connected to the cap to the cap 5 9 MSCABLE 3 Cable This cable is supplied with FMSPP and FMSCC stages SUB D25M SUB D15F CONNECTOR CONNECTOR 1 ay 0 25 mm White AWG23 White A 1 3 0 25 mm2 Brown AWG23 Brown l 9 5 0
3. 5 1 UE34PP Motor Characteristics Angle by Step RMS Current per Resistance Inductance Newport Motor ee C Phase A Q mH Utilization UE34PP 1 8 0 71 L 2 8 Micro Step 5 2 Command Signals for the Stepper Motors Phase 1 Direction Phase 2 L Direction Motion w Direction 5 3 UE34CC Motor Characteristics Motor Nominal Max RMS Max Peak Resistance Inductance Voltage V Current A Current A Q mH UE34CC 48 0 9 1 6 2 52 0 51 5 4 Command Signals for the DC Motor Motor va Motor v Motor v Motor v Displacement gt Direction Direction Displacement Direction In the above drawings Motor signal is referred to Motor signal When the stage moves in Direction the Motor voltage is higher than Motor voltage When the stage moves in Direction the Motor voltage is lower than Motor voltage GND Newport EDH0267En1030 10 15 6 Experience Solutions FMS Series Precision Linear Stages 5 5 Sensor Position 0 5 mm 05mm gt
4. Encoder Phase B Direction mmm Motion Direction On FMSCC stages the incremental sensor operates following the photoelectric measurement principle with a disk including slides GND Newport Experience Solutions 7 EDH0267En1030 1 0 15 FMS Series Precision Linear Stages When the sensor shaft turns the sensor generates square signals in quadrature sent to pins 19 20 23 and 24 of the 25 pin Sub D connector Newport User Stage Encoder Phase A Pin 19 Encoder Phase A Pin 23 Encoder Phase B Pin 20 Encoder Phase B j Pin 24 i Output Signals Index Pulse Phase Pin 15 Index Pulse Phase Pin 25 om 5 V 5 Encoders f Q OV Power Supply Encoder and Index Pulse are differential pair type RS 422 type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 26LS31 or MC3487 Reception circuits to use are 26LS32 or MC3486 5 7 Pinouts The SUB D connection for FMS Series translation stages is given in the following table FMSPP FMSPPHA FMSCC UF34PP UE34PP UE34CC 1 Phase 1 1 Phase 1 1 N C 2 Phase 2 2 Phase 1 2 Motor 3 Mechanical Zero 3 Phase 1 3 Mechanical Zero 4 End of Run 4 Phase 1 4 End of Run SUB D15M 5 Ground 5 Phase 2 5 Ground 6 N C 6 Phase 2 6 Encoder Phase A 9
5. 7 N C 7 Phase 2 7 Encoder Phase B 8 N C 8 Phase 2 8 Index Pulse I O 9 Phase 1 9 N C 9 N C si o 10 Phase 2 10 N C 10 Motor 11 End of Run 11 N C 11 End of Run 12 5 V 12 N C 12 5 V SUB D25M 13 N C 13 Mechanical Zero 13 Encoder Phase A 14 N C 14 Ground 14 Encoder Phase B i 15 N C 15 Index Pulse I 15 Index Pulse I G 16 Ground 17 End of Run O 18 End of Run 19 Encoder Phase A x O 20 Encoder Phase B 5 O5 13 21 5 V 22 Ground 23 Encoder Phase A 24 Encoder Phase B 25 Index Pulse I GND Newport EDH0267En1030 10 15 8 Experience Solutions FMS Series Precision Linear Stages 5 8 MCAB 3 Cable This cable is supplied with FMSPPHA stages
6. To disassemble a non specified component can cause a malfunction of the stage If you observe a malfunction in your stage please contact us immediately to arrange for a repair CAUTION Any attempt to disassemble or repair a stage without prior authorization will void your warranty Calibration CAUTION It is recommended to return your FMS stage to Newport once a year for recalibration to its original specifications GND Newport 1 6 Experience Solutions Service Form Your Local Representative Tel Fax Name Return authorization Please obtain prior to return of item Company Address Date Country Phone Number P O Number Fax Number Item s Being Returned Model Serial Description Reasons of return of goods please list any specific problems GND Newport Experience Solutions 1 7 EDH0267En1030 10 15 Newport Experience Solutions Visit Newport Online at www newport c om North America amp Asia Newport Corporation 1791 Deere Ave Irvine CA 92606 USA Sales Tel 800 222 6440 e mail sales newport com Technical Support Tel 800 222 6440 e mail tech newport com Service RMAs amp Returns Tel 800 222 6440 e mail service newport com Europe MICRO CONTROLE Spectra Physics S A S 9 rue du Bois Sauvage 91055 Evry CEDEX France Sales
7. Precision Linear Stages RE NID USER S MANUAL Newport Experience Solutions Precision Motion Guaranteed FMS Series Precision Linear Stages Warranty A CAUTION Please return equipment in the original or equivalent packing You will be responsible for damage incurred from inadequate packaging if the original packaging is not used EDH0267En1030 10 15 Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s discretion To exercise this warranty write or call your local Newport representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the instrument transportation prepaid to the indicated service facility Repairs will be made and the instrument returned transportation prepaid Repaired products are warranted for the balance of the original warranty period or at least 90 days Limitation of Warranty This warranty does not apply to defects resulting from modification or misuse of any product or part CAUTION Warranty does not apply to damages resulting from e Incorrect usage Load on the stage greater than maximum specified load Carriage speed higher than specified speed Improper gr
8. 5 6 V If the Mechanical Zero output is not used a 1 kQ 0 25 W resistor must be connected RN EN between pins 13 and 21 Encoder and Index Pulse are differential pair type RS 422 type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 26LS31 or MC3487 Reception circuits to use are 26LS32 or MC3486 GND Newport EDH0267En1030 10 15 14 Experience Solutions Linear Stages ISIon Prec OG 0G2 L6 L 86 ODES A OG OGL 6 L L6 S 00ZSINA gt LL h 2 q3u08 3 9 9 97 9 S310H t DOESN ANY 00 SINd Su313WITIIW ANY S3H2NI NI SNOISNIWIG JIOOESIN NMOHS 1300 09 L6 L YOS NO LL t 2 q3u08 3 9 9 978 S310H GLG OZ OOESINH SLY 9L OOZSINH GLE ZL OOLSINH NGcA ans VHddSIAd NSL0 ANS IISI 8 ddS A p 6LL 69 10 15 EDH0267En1030 15 YOLOANNOOD FIV 97 GEOL 008SINd ELT 6 8 00ZSINd FMS Series
9. x x 0 14 mm2 Natural AWG26 Natural X 24 N atura 7 15 Ll 0 14 mm Red AWG 26 Red 15 95 0 14 mm Black AWG26 Black i 8 Connected ____ 3 Ss eDeS XssY sls r CLCLL C l O Connected to the cap to the cap QD Newport 9 EDH0267En1030 10 15 FMS Series Precision Linear Stages 6 0 Connection to Newport Controllers 6 1 EDH0267En1030 10 15 NOTE Visit www newport com for compatible Newport controllers Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury Read the controller user s manual carefully before operating the instrument and pay attention to all written warnings and cautions WARNING Disconnect the power plug under the following circumstances If the power cord or any attached cables are frayed or damaged in any way If the power plug is damaged in any way e If the unit is exposed to rain excessive moisture or liquids are spilled on the unit If the unit has been dropped or the case is damaged e If you suspect service or repair is required e Whenever you clean the electronics unit CAUTION To protect the unit from damage be sure to e Keep all air vents free of dirt and dust e Keep all liquids away from the unit e Do not expose the unit to excessive moisture 85 humidity e Read this manual before using the unit
10. 13 GND Newport Experience Solutions iii EDH0267En1030 10 15 FMS Series Precision Linear Stages EDH0267En1030 10 15 7 0 Connection to Non Newport Electronics 14 dl ConeelOUS UU u uuu L u uuu Du wass tukay 14 8 0 Dimensions 15 9 0 Maintenance nnee 16 NT AS a su sxs 16 En 16 93 Calibrali n u uu uyu u a au se nsc ee Re ne eee cs ee 16 OVC OL te ae ne anne Re ee 17 ND Newport iv Experience Solutions FMS Series Precision Linear Stages EC Declaration of Conformity NOOR OOO OLN SHI PRS g FMS Series EC Declaration of Conformity following Annex I 1A of Directive 2006 42 EC on machinery The manufacturer MICRO CONTROLE Spectra Physics 9 rue du Bois Sauvage 91055 Evry CEDEX FRANCE Hereby declares that the machinery Description FMS e Function PRECISION LINEAR STAGES e Models FMS100 200 300 CC PP PPHA the technical file of which was compiled by Mr Dominique DEVIDAL Quality Director MICRO CONTROLE Spectra Physics Zone Industrielle B P 29 F 45340 Beaune La Rolande France complies with all the relevant provisions of the Directive 2006 42 EC on machinery complies with all the relevant provisions of the Directive 2014 30 EU relating to electro magnetic compatibility was designed and built in accordance with the following harmonised standards e NF EN 61326 1 2013 lt Electrical equipment for measure
11. 3 4 Load Characteristics and Stiffness 4 GO PEACE Welplilsu errant es dns dore a SGQkasqasi 5 LO DENG L ULU n aquta 5 4 1 Stepper Drive Versions 5 4 2 DC Servo Drive Version cccccccssssessscccnssscccccsssesssssssscesssecessesssesseees 5 5 0 CO O ener 6 51 UES4PP Motor Characteristies hrs 6 5 2 Command Signals for the Stepper Motors 6 5 3 UE34CC Motor Characteristics 6 5 4 Command Signals for the DC Motor 6 DD Sensor POSSIO en ee er een eee annee D i 5 6 Feedback Signal Position 7 D PINO PPI sss sss sa 8 58 MCAB Cale ae 0 9 59 MSCABLE 3 Cable 9 5 10 MSCABLE 10 Cable 9 60 Connection to Newport Controllers 10 6 1 Warnings on Controllers 10 62 OIC HO Qu usu wa ee ee ae 11 CS ee ee en ar eee 11 64 MSCABLE 3 Cable 12 605 MCAB CaDle a A
12. Home Position Origin near the end of run EOR Limit FMSCC 2mm lt 1mm k FMSPPHA 25 mm EOR Limit en Mechanical _ I Zero li mace LATEN EN Except FMSPP Index Pulse lt Negative Software Limit Positive Software Limit lt Stage Travel Range gt Motion wJ Direction NOTES End of Run and Mechanical Zero are 5 V open collector type e Use of the Index Pulse provides a repeatable Home Position at 1 step e There is no index pulse on the FMSPP e On the FMSCC there is one index pulse every 2 mm and homing will use the first pulse to the right of the Mechanical Zero It is adjusted to about 1 mm e There is one index pulse every 25 mm on FMSPPHA Homing will use the first pulse to the right of the Mechanical Zero and is adjusted to about 1 mm CAUTION End of Run and Mechanical Zero are active signals and should not be connected to any other source 5 6 Feedback Signal Position Encoder Phase A Encoder PhaseA Direction Encoder Phase B
13. amp Technical Support Tel 33 0 1 60 91 68 68 e mail france newport com Service amp Returns Tel 33 0 2 38 40 51 55
14. 25 mm Yellow AWG23 Yellow 2 l 0 25 mm Green AWG23 Green En 7 10 0 14 mm Rose AWG26 Rose 21 12 2 0 14 mm Gray AWG26 Gray 5 13 0 05 mm Brown AWG30 Brown 3 17 _ 0 05 mm Yellow AWG30 Yellow 11 18 0 05 mm Green AWG30 Green 4 19 0 05 mm Red AWG30 Red 13 23 0 05 mm Blue AWG30 Blue l 6 20 _ 0 05 mm Rose AWG30 Rose 14 A 0 05 mm Gray AWG30 Gray 7 15 0 05 mm Black AWG30 Black 15 5 1 0 05 mm White AWG30 White l 8 Connected ae Connected to the cap to the cap 5 10 MSCABLE 10 Cable Optional 10 meter cable for FMSPP or FMSCC stages SUB D25M SUB D15F CONNECTOR CONNECTOR S S 0 34 mm White AWG22 White A 0 34 mm Brown AWG22 Brown s 1 3 i I 0 34 mm Green AWG22 Green 9 4 i 0 34 mm2 Yellow AWG22 Yellow i yy I I 5 1 0 34 mm White AWG22 White l 2 6 0 34 mm Brown AWG22 Brown 1I 0 34 mm2 Green AWG22 Green 0 34 mm Yellow AWG22 Yellow 10 I I 14 cae 0 14 mm White AWG26 White l 13 X x 0 14 mm Green AWG26 Green x 3 21 I 0 14 mm2 Orange AWG26 Orange 12 22 X X 0 14 mm White Black AWG26 White Black _ x 5 17 0 14 mm Yellow AWG 26 Yellow I 11 18 o 0 14 mm Purple AWG26 Purple 4 19 0 14 mm Blue AWG 26 Blue 13 23 X B X 0 14 mm Gray AWG26 Gray x 6 20 _ 0 14 mm Brown AWG 26 Brown 14
15. ear Stages 6 5 MCAB 3 Cable lt 2 28 58 DISCONNECTED LOCKING KNOBS 77 L STAGE SUB D25 CONNECTOR SHOWN DIMENSIONS IN INCHES AND MILLIMETERS BENDING STATIC CABLE 21 50 38 CABLE IN MOTION gt 3 78 96 WARNING This cable is shielded correctly For a correct operation make sure to lock connectors ground continuity provided by the cable For applications where the standard 3 meter cable MCAB 3 included with your stage is not adequate Newport offers longer length cables designed to ensure the integrity of your positioning application These cables are specially shielded and terminated with Newport s standard SUB D25 connectors They are available in 5 m MCAB 5 7 m MCAB 7 or 10 m MCAB 10 lengths WARNING Keep the motor cables at a safe distance from other electrical cables in your environment to avoid potential cross talk QD Newport Experience Solutions 13 EDH0267En1030 a 10 15 FMS Series Precision Linear Stages 70 Connection to Non Newport Electronics 7 1 Connections WARNING Newport is not responsible for malfunction or damage to a FMS stage when it is used with non Newport controllers WARNING Newport guarantees compliance of the FMS stage only if they are used with Newport cables and controllers Newport Newport Stage Mechanical Zero Stage End of Run lin Max 10 mA lin max 16 mA V max 30 V V max
16. finition of typical specifications which are about 2X better than the guaranteed values visit www newport com for the Motion Control Metrology Primer 3 To obtain arcsec units divide urad value by 4 8 CAUTION To reach the specifications stated stages must be fixed on a plane with a flatness better than the stage flatness guaranteed value or fixed using the 4 washers 16 mm and thickness 0 1 mm delivered with the stage The M6 screws torque to fix the stage must be 5 mn Load Specification Definitions Normal Load Capacity Cz Maximum load a stage can move while maintaining specifications This value is given with speed and acceleration specified for each stage and with a load perpendicular to bearings FMSPP PPHA FMSCC Specified Speed mm s 20 50 100 Specified Acceleration mm s 80 200 400 Axial Load Capacity Cx Maximum load along the direction of the drive train Off Centered Load Q Maximum cantilever load a stage can move Load Characteristics and Stiffness Cz Normal center load capacity on bearings 150 N Cx Axial load capacity lt 30 NU kax Compliance in roll 3 urad Nm kay Compliance in pitch 2 urad Nm kaz Compliance in yaw 2 urad Nm Q Off center load Q lt Cz 1 D 80 with D Cantilever distance mm 1 Note Reversible drive chain Not recommended for vertical use unless counterweighed GND Newport 4 Experience Solutions FMS Series Precision Linear Stages 3 9 Stage Wei
17. for the first time WARNING All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized Contact your electrician to check your receptacles WARNING This product is equipped with a 3 wire grounding type plug Any interruption of the grounding connection can create an electric shock hazard If you are unable to insert the plug into your wall plug receptacle contact your electrician to perform the necessary alterations to ensure that the green green yellow wire is attached to earth ground GY Newport 1 0 Experience Solutions FMS Series Precision Linear Stages WARNING This product operates with voltages that can be lethal Pushing objects of any kind into cabinet slots or holes or spilling any liquid on the product may touch hazardous voltage points or short out parts 6 2 Connection On each stage is represented a label which indicates its name and its serial number WARNING Always turn the controller s power OFF before connecting to a stage Stages may be connected to the rear panel motor connectors any time prior to power up with the supplied cable assemblies NOTE These stages are ESP compatible Enhanced System Performance is Newport s exclusive technology that enables Newport ESP motion controllers to recognize the connected Newport ESP stage and upload the stage parameters This ensures that the user can operate the motion system quic
18. ghts Weights indicated into the below table are average values for stages with a typical drive unit installed The stage weight below does not include the cable Weight Ib kg FMS100 14 3 6 5 FMS200 17 0 7 7 FMS300 19 6 8 9 3 meter MSCABLE 3 Cable 0 66 0 3 The weight difference between drive units is not significant 4 0 Drive 4 1 Stepper Drive Versions FMSPP This version is not equipped with an encoder The micro step is equivalent to 1 100 of the full step FMSPPHA This version is equipped with a steel scale encoder For these stages the micro step is equivalent to 1 200 of the full step Stepper Motor Performance Specifications Resolution Speed Mot otor um mm s FMSPP 0 1 20 E34PP FMSPPHA 0 05 50 x 4 2 DC Servo Drive Version One DC motor configurations is available FMSCC This version is equipped with a 4000 cts rev rotary encoder located directly on the screw DC Motor Performance Specifications Resolution Speed Mot otor um mm s FMSCC 0 5 100 UE34CC GND Newport Experience Solutions 5 EDH0267En1030 1 0 15 FMS Series Precision Linear Stages 50 Motor
19. kly and safely P COMPATIBLE 6 3 Cables Our FMS stages are delivered with a MCAB 3 or MSCABLE 3 3 meter cable according to the stage you bought This cable is equipped with a SUB D25M connector so it can be directly connected to our controllers drivers The cable supplied with your FMS stage is given in the following table Stages Supplied Cable FMSPP MSCABLE 3 FMSPPHA MCAB 3 FMSCC MSCABLE 3 QD Newport Experience Solutions 1 1 EDH0267En1030 10 15 FMS Series Precision Linear Stages 6 4 MSCABLE 3 Cable 2 24 57 gt DISCONNECTED LOCKING gt KNOBS STAGE SUB D15 CONNECTOR SHOWN DIMENSIONS IN INCHES AND MILLIMETERS BENDING STATIC CABLE gt 94 24 CABLE IN MOTION 2 76 70 WARNING This cable is shielded correctly For a correct operation make sure to lock connectors ground continuity provided by the cable For applications where the standard 3 meter cable MSCABLE 3 included with your stage is not adequate Newport offers a 10 m longer length cable MSCABLE 10 designed to ensure the integrity of your positioning application These cables are specially shielded and terminated with Newport s standard SUB D15 and SUB D25 connectors WARNING Keep the motor cables at a safe distance from other electrical cables in your environment to avoid potential cross talk GND Newport EDH0267En1030 10 15 12 Experience Solutions FMS Series Precision Lin
20. ment control and laboratory use EMC requirements Part 1 General requirements gt e NF EN 55011 2010 A1 2011 Class A was designed and built in accordance with the following other standards NF EN 61000 4 2 e NF EN 61000 4 3 e NF EN 61000 4 4 e NF EN 61000 4 5 e NF EN 61000 4 6 ORIGINAL DECLARATION Done in Beaune La Rolande on 26 June 2015 Dominique DEVIDAL Quality Director V EDH0267En1030 10 15 FMS Series Precision Linear Stages Definitions and Symbols The following terms and symbols are used in this documentation and also appear on the product where safety related issues occur General Warning or Caution A The exclamation symbol may appear in warning and caution tables in this document This symbol designates an area where personal injury or damage to the equipment is possible The following are definitions of the Warnings Cautions and Notes that may be used in this manual to call attention to important information regardins personal safety safety and preservation of the equipment or important tips WARNING Warning indicates a potentially dangerous situation which can result in bodily harm or death CAUTION Caution indicates a potentially hazardous situation which can result in damage to product or equipment NOTE Note indicates additional information that must be considered by the user or operator European Union CE Mark C The presence of the CE Mark on Newpo
21. n the FMS come standard with an anti creep feature that ensures high reliability by eliminating bearing cage migration and the need for re centering the bearings Moreover this enables optimum bearing contact that results in superior repeatability of straightness flatness pitch and yaw over the life of the FMS The FMS stages have a nominal speed of up to 100 mm s easily improving throughput compared to other products in the market Controlling with Newport integrated motion controllers and drivers like the SMC100 and ESP301 CC and PP versions or the XPS all versions adds more flexibility in gathering metrology data The FMS linear stages are exceptional solutions for applications in surface metrology surface profilometry and tribology 2 1 Design Details Base Material Stainless Steel Bearings Crossed Roller Bearings Drive Mechanism 8 mm precision ground ball screw Drive Screw Pitch mm 2 Feedback DC Screw mounted rotary encoder 4000 cts rev index pulse PP No feedback PPHA Steel scale 50 nm Origin PP optical located 9 5 mm from negative software limit CC amp PPHA Optical located 10 5 mm from negative software limit Drive Type DC Servo Stepper Cable m 3 included NOTE RoHS This product complies with the RoHS directive Restriction of Hazardous Substances Compliant GND Newport EDH0267En1030 10 15 2 Experience Solutions FMS Series Precision Linear Stages 3 0 Characteristics 3 1 Defi
22. nitions Specifications of our products are established in reference to ISO 230 standard part II Determination of accuracy and repeatability of positioning numerically controlled axes This standard gives the definition of position uncertainty which depends on the 3 following parameters Absolute Accuracy Difference between ideal position and real position On Axis Accuracy Difference between ideal position and real position after the compensation of linear errors Linear errors include cosine errors inaccuracy of screw or linear scale pitch angular deviation at the measuring point Abbe error and thermal expansion effects All Newport motion electronics can compensate for linear errors The relation between absolute accuracy and on axis accuracy is as follows Absolute Accuracy On Axis Accuracy Correction Factor x Travel Repeatability Ability of a system to achieve a commanded position over many attempts Reversal Value Hysteresis Difference between actual position values obtained for a given target position when approached from opposite directions Minimum Incremental Motion MIM or Sensitivity The smallest increment of motion a device is capable of delivering consistently and reliably Resolution The smallest increment that a motion device can theoretically move and or detect Resolution is not achievable whereas MIM is the real output of a motion system Yaw Pitch Rotation of ca
23. ounding Connectors must be properly secured When the load on the stage represents an electrical risk it must be connected to ground Excessive or improper cantilever loads e Modification of the stage or any part thereof This warranty is in lieu of all other warranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or consequential damages No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation This manual has been provided for information only and product specifications are subject to change without notice Any changes will be reflected in future printings GS Newport ii Experience Solutions FMS Series Precision Linear Stages Table of Contents NV IL IN acces u 2 uu A AA u Sos li EC Declaration of Conilormity V Delinitons and Symbols ane nee D vi Warnings stemmende vii BED ae eens viii 1 0 Introduction 1 20 Descriptio u L a andermans 2 2 1 DESSIN Details se ste nr ee nt 2 3 0 Characteristics 3 oek DEUNOS RS E EE ne de 3 3 2 Mechanical Specifications sus 4 3 3 Load Specification Delinitions 4
24. rriage around the Z axis Yaw or Y axis Pitch when it moves The testing of on axis accuracy repeatability and reversal error are made systematically with test equipment in an air conditioned room 20 C A linear cycle with 21 data points on the travel and 4 cycles in each direction gives a total of 164 points Guaranteed Specifications Guaranteed maximum performance values are verified per Newport s A167 metrology test procedure For more information please consult the metrology tutorial section in the Newport catalog or at www newport com GND Newport Experience Solutions 3 EDH0267En1030 1 0 15 FMS Series Precision Linear Stages 3 2 3 3 3 4 EDH0267En1030 10 15 Mechanical Specifications CC PP PPHA Travel Range mn 100 200 300 Minimum Incremental Motion um 0 5 0 1 0 1 Uni directional Repeatability um LS 125 0 2 Bi directional Repeatability um 3 0r 1 5 4 5 or 22 25 0 5 or 0 25 Maximum Speed mm s 100 20 50 FMS100 FMS200 FMS300 On Axis Accuracy CC and PP um 6 or 3 0 10 or 5 0 13 or 46 5 On Axis Accuracy PPHA um 1 or 0 5 2 or 1 0 3 or 1 5 Straightness Flatness um 1 5 or 0 75 3 or 1 5 6 or 3 0 Pitch 216 urad 80 or 40 100 or 50 120 or 60 Yaw 26 urad 20 or 10 30 or 15 40 or 20 0 1 um with XPS 0 5 um with SMC100PP and ESP301 2 Shown are peak to peak guaranteed specifications or half the value as sometimes shown For the de
25. rt Corporation equipment means that it has been designed tested and certified as complying with all applicable European Union CE regulations and recommendations Warnings and Cautions ATTENTION This stage is a Class A device In a residential environment this device can cause electromagnetic interference In this case suitable measures must be taken by the user GND Newport EDH0267En1030 10 15 vi Experience Solutions FMS Series Precision Linear Stages Warnings WARNING The motion of objects of all types carries potential risks for operators Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved WARNING Do not use this stage when its motor is emitting smoke or is unusually hot to the touch or is emitting any unusual odor or noise or is in any other abnormal state Stop using the stage immediately switch off the motor power and then disconnect the electronics power supply After checking that smoke is no longer being emitted contact your Newport service facility and request repairs Never attempt to repair the stage yourself as this can be dangerous WARNING Make sure that this stage is not exposed to moisture and that liquid does not get into the stage Nevertheless if any liquid has entered the stage switch off the motor power and then disconnect the electronics from power supply Contact your Newport
26. service facility and request repairs WARNING Do not insert or drop objects into this stage this may cause an electric shock or lock the drive Do not use this stage if any foreign objects have entered the stage Switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility for repairs WARNING Do not place this stage in unstable locations such as on a wobbly table or sloping surface where it may fall or tip over and cause injury If this stage has been dropped or the case has been damaged switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility and request repairs WARNING Do not attempt to modify this stage this may cause an electric shock or downgrade its performance WARNING Do not exceed the usable depth indicated on the mounting holes see section Dimensions Longer screws can damage the mechanics or cause a short circuit GND Newport Experience Solutions Vii EDH0267En1030 10 15 FMS Series Precision Linear Stages Cautions CAUTION Do not place this stage in a hostile environment such as X Rays hard UV or in any vacuum environment CAUTION Do not place this stage in a location affected by dust oil fumes steam or high humidity This may cause an electric shock CAUTION Do not leave this stage in places subject to extremely high temperatures or low temperat
27. ures This may cause an electric shock e Operating temperature 10 to 35 C e Storage temperature 10 to 40 C in its original packaging CAUTION Do not move this stage if its motor power is on Make sure that the cable to the electronics is disconnected before moving the stage Failure to do so may damage the cable and cause an electrical shock CAUTION Be careful that the stage is not bumped when it is being carried This may cause it to malfunction CAUTION When handling this stage always unplug the equipment from the power source for safety CAUTION When the carriage is in its end of run position it is strongly recommended not to go beyond this point as this may damage the stage mechanism CAUTION Contact your Newport service facility to request cleaning and specification control every year GND Newport EDH0267En1030 10 15 viii Experience Solutions FMS Series Precision Linear Stages Precision Linear Stages FMS Series 10 Introduction This manual provides operating instructions for the stage that you have purchased in the FMS Series e FSMPP e FSMCC e FSMPPHA 3 travel ranges of FMS stages RECOMMENDATION We recommend you read carefully the chapter Connection to electronics before using the FMS stage QAD Newport Experience Solutions 1 EDH0267En1030 10 15 FMS Series Precision Linear Stages 20 Description The FMS series of precision linear stages is Ne
28. wport s latest innovation in high precision motion control technology It addresses the unique needs of surface metrology applications for smooth motion low noise high straightness and flatness The FMS linear stages run highly flat and straight and combined with steel construction enable higher accuracy performance Travel options include 100 mm 200 mm and 300 mm and can be ordered with either a DC or stepper motor As with all Newport motorized stages there is a wide choice of integrated controller driver products ranging from the single axis SMC100 to the 3 axis ESP301 and high performance 8 axis XPS Universal Controller Featuring steel construction the FMS linear stages have a very distinct advantage over other stages made with aluminum It is well known that steel expands less than aluminum when subjected to temperature fluctuations in the operating environment In addition a combination of steel and aluminum in the construction of a stage introduces a phenomenon called bi metallic bending caused by the different thermal expansion coefficients of metals Both these reasons led to the use of steel exclusively in the base and other components of the FMS stages Since all FMS components are made from steel all these components are expected to expand at the same rate when the operating temperature fluctuates thereby eliminating bi metallic bending and the associated inaccuracies and non flat behavior The cross roller bearings i
Download Pdf Manuals
Related Search