JEOL JSM-IC25S Scanning Electron Microscope STANDARD
Contents
1. powder free latex gloves for handling the sample holder and samples The sample holder can be unscrewed from the mounting lever long loading arm and can be taken out to ease sample mounting Two stainless steel flat surfaced cylindrical plates should be found in the holder The sample can be mounted onto these plates using double sided carbon tape which is electrically conductive This tape will serve as an adhesive and will also provide a drainage path for the scanning electron current If a packaged micro electronic device needs to be imaged the grounding pin should be in conductive contact with the sample holder Several hand made cylinders are available allowing mounting of the sample at a non normal angle It is very convenient if several samples can be loaded simultaneously to avoid repeated timely sample exchange procedures Alternatively an entire round wafer of size up to 4 in diameter may be placed in the 4 wafer holder Carefully screw the sample holder onto loading lever arm in the load lock and close door It is important to be gentle on the loading arm threads Keep the load lock door closed and open valve labeled V5 this engages the roughing pump RP2 on the load lock Close valve V5 when the load lock is evacuated and is tightly shut will take less than 30 seconds Next load the sample into the SEM imaging chamber Open the load lock CAM valve The CAM valve is opened by twisting the knob _ turn ccw a2. FILAMENT knob Fully counterclockwise _ ACCEL VOLTAGE OFF button Press SEI BEI switch Center position CONDENSER knob 12 o clock position AUTO FOCUS AFD button Release BRIGHTNESS knob 3 o clock position CONTRAST knob 7 0 MAGNIFICATION 45X switch Up DYNAMIC FOCUS DFC button Release FOCUS COARSE knob 5 0 IMAGE SHIFT _ _ knobs 12 o clock position SCAN SPEED H L switch H SCAN MODE LSP button Press LSP SCAN MODE REDUCE button Release POSITION _ _ knobs 12 o clock position Figure 2 Initial Control Settings from user s manual When all the above control settings on the main panel are set as given in Figure 2 proceed with the following steps Push the acceleration voltage 25kV button Select SEI or BEI detector For the majority of imaging situations use the SEI detector the BEI detector is available for high magnification resolution microscopy Turn magnification to 100 This will make the next step easier Slowly turn up the filament knob Be careful not to increase it to high this will burn out the filament use the following procedure Make sure that the SEM is in LSP mode A horizontal line should be visible across the CRT display Slowly increase the filament knob until a portion of the line begins to deflect vertically The filament light indicator next to the knob should be on at this time Stop at 10 the maximum vertical line deflection For more
3. SUMMARY Equipment JEOL JSM IC25S Scanning Electron Microscope Picture i La Specification Load locked sample chamber that accepts standard microscopy pucks or special wafer carriers Will handle up to a 4 inch diameter wafer Full X Y Z theta phi goniometer movement Has optical spotting microscope for coarse sample positioning Materials Only conductive or conductive coated inorganic substrates or samples Location EE CSE BO29 EE MicroFabrication Laboratory EE MFL UoW Contact Access Prof Bruce Darling Dept of Electrical Engineering 206 543 4703 bdarling ee washington edu Technical Mr Kevin Kerkof EE MFL 206 616 6981 kkerkof u washington edu Emergency Mr Kevin Kerkof EE MFL 206 616 6981 kkerkof u washington edu This Document Date Rev Authors 1998 06 08 0 Ivan Lalovic Mohammed Azadeh Brian Warneke Tao Shu Hang Tian 1999 03 16 1 Bruce Darling Karl Bohringer 2 INTRODUCTION This Standard Operating Procedure SOP provides information on the operation of the JEOL JSM IC25S scanning electron microscope SEM This equipment has undergone several modifications which have rendered inoperable several auto setup features and functions provided in the original design The available user s manual for this equipment discusses in detail a number of issues involved in scanning electron microscopy and is very useful as a primary reference The user
4. lock CAM valve insert the loading lever arm into chamber and carefully screw into sample holder Follow this procedure through the view port Once the sample holder is secured withdraw the loading lever arm completely Close the load lock CAM valve Open leak valve LV2 to vent the load lock with nitrogen gas Close LV2 when the door to the load lock can be easily opened Remove the sample carefully from the sample holder Please use powder free latex rubber gloves After replacing the sample holder close the load lock door Keep the load lock door closed and open valve V5 Wait one minute for the load lock to be evacuated 11 Close valves V4 V1 V2 and V5 in that order The light display panel should illuminate the valves that are open Shut off the roughing pumps RP switch OFF This will automatically shut off the turbo molecular pump TMP Turn the TMP power switch on the HP power supply OFF On the HP power supply you should see the TMP blade speed rapidly decrease to zero Turn vacuum gauge off Shut of water cooling system off two switches and close the nitrogen gas bottle Turn off power on the main control panel this switch must be first pulled out and then switched off Turn power off on the vacuum switch control panel With this step the SEM should be powered down Check that there is no power to the screen or other controls If possible return all settings on the main pane
5. s manual also covers the basic principles of operation equipment design technical information about its key components as well as control panel settings It is suggested that the user become familiar with both documents However this standard operating procedure SOP should be used as the primary source for the steps involved in operating the scanning electron microscope SEM under its current modifications In addition this SOP also discusses use of the SEMICAPS 1000 image capture and processing system and tif format image file storage The operation of a scanning electron microscope SEM is based on scanning or rastering an electron beam across the sample and detecting electrons ejected from the surface The incident electrons are back scattered from an atomic surface species or are scatter diffused into the sample material Due to the excitation of the atomic surface species x rays auger and secondary electrons are ejected from the sample surface Since in the SEM the electron detectors are positioned on the same side of the sample as the incident beam only the back scattered and surface emitted electrons are imaged In transmission electron microscopy TEM electrons transmitted through the sample are detected In fact the JEOL JSM IC25S SEM has two Faraday Cup like detectors a back scattered electron BEI and a secondary electron SEI detector The detectors are optimized to differentiate between the electrons back scatte
6. the selected number of averages Once the image is snapped the user will be prompted to enter the SEM magnification Automatically this command will save a copy of the image to the hard drive Note even though the file name extension is tif this is not the standard tagged image file format The procedure to export the image file to an MS Word readable tif file is discussed in the next section Once an image is captured on the desktop the user can use the Process image processing Measure or Edit utilities The image processing allows adjustments of the contrast brightness and other image parameters and even allows the introduction of pseudo color to the acquired image The measure sub program allows scaled measurement of distances and angles on imaged features of interest The Edit utility allows incorporating text with the image It must be pointed out that after exporting the file the image information under the additional measurements and text will be lost It can only be recovered in semicaps if the original file is recalled Procedure 6 File Storage tif format Once a satisfactory image is obtained or read in from disk the file can be exported to a MS Word readable tif tagged image file format file This is done the following way In the main menu of the semicaps software go to System and click on Export Image Select Micron data ON or OFF Symbol ON or OFF Meas
7. JEOL JSM IC25S Scanning Electron Microscope STANDARD OPERATING PROCEDURE TABLE OF CONTENTS EE OND GEN Y SEE OE EE Ee EE EE otos sess 2 Zi INTRODUETION ese SG ese Rene ees ne ge ee sd Ve oe vele id dee des oe 3 3 LOCATION OF EQUIPMENT ACCESSORIES TOOLS AND SUPPLIES 4 4 PERSONAL SAFETY EOUIPMENI esse eras tees sd erens de ed eds geed ede de oe ee ee eg ee dode die 4 5 MATERIAL OMPATIBILITIE SeSe N ed de es es ee Ne ee be eke ie dese ee de es ee 4 6 PRIMARY HAZARDS AND WARNINGS ee seese sesse see ese see see sesse ee Ge Ee Se Bee ee EG Ge Ge ee ee 5 7 OPERATIONAL PROCEDURE CHECKLISTS sesesesesesessesssesososesosososossesesosososossssssssososose 5 Procedure 1 Power Up and Chamber Evacuation esssssessseesesesessesessesessesresestertseeseseeseesesseseesesee 6 Procedure 2 Sample Loading Sample Exchange sesse esse ese ee ee ee ee AA ee ee ee Re ee 8 Procedure 3 Control Panel Setup and SEM Imaging sesse esse esse ees se ese ee ese ee ee ee ee ee ee ge ee ee 9 Procedure 4 Shut dOWiL eise ESE END De Bi ede ee bee es oe se a ee ek ee pad sade inked 11 Procedure 2 SEM Image GADE see ese ee eo esse ees oe ed De ee oto ae ge ke 12 Procedure 6 File Storage tif format uiers ies Ses deeg ee Moos Ed gee ER ese ee 13 8 HELPFUL HINTS COMMON QUIRKS AND TROUBLESHOOTING c0csee0e 13 9 ENVIRONMENTAL HEALTH AND SAFETY ISSUES eseseesesesescssesosoesesescscosososossesesssee 14 1
8. N OF EQUIPMENT ACCESSORIES TOOLS AND SUPPLIES The JEOL JSM IC25S scanning electron microscope is located in room B029 of the EE MicroFabrication Laboratory EE MFL in the Electrical Engineering Computer Science and Engineering EE CSE building at University of Washington It is located against the West wall between the laboratory counters and a laminar flow wet bench A PowerPro 486 25 MHz personal computer with SEMICAPS 1000 image capture and processing system is interfaced and is located on the end of the lab counters There are three main parts of the JEOL JSM IC25S SEM system the electron beam gun sample chamber and vacuum components two roughing pumps one turbo molecular pump TMP TMP water chiller pneumatic and cam valves and nitrogen tank The user interface components are a CRT display vacuum gauge optical microscope and light source for rough sample positioning and control panels The accessories include a Polaroid camera operational status unknown and a PC for image capture as well as varied sample holders one 4 wafer sample holder several raised and a few angled sample holder pads and carbon tape These smaller components and accessories can be found in the cabinets above the PC The Ted Pella Corporation is an excellent source for SEM parts and components In addition the user s manual is found in a large yellow binder labeled JEOL MANUAL A SEM use logbook is also present near the main cont
9. Power Up and Chamber Evacuation 1 Initialization The sample can be successfully loaded only if the sample positioning stage is in the correct initial position Check that the sample stage is at the starting parameters stage rotation 0 tilt angle 0 x position 500 y position 500 The SEM will only be calibrated if the working distance WD distance between sample and electron beam gun is either at 10 or 48 mm WD can be adjusted using the big knob above the x y stage position knobs Check that WD 48 Generally there is no need to do any aperture adjustment and filament centering The SEM should be in calibration and aperture and filament adjustments should only be performed by those who fully understand this procedure The pneumatic valve switches should all be closed as pictured in Figure 1 Check that all the valve switches are in the desired positions Note that the system should be in valve lock not auto mode The load lock valve big CAM valve on top of chamber should be closed pushed in entirely and the chamber CAM valve smaller CAM valve between the electron source and chamber should be open pulled out The CAM valves are operated by turning _ turn counter clock wise to free pushing or pulling to close or open respectively and again turning _ turn clock wise to lock the valve Note that opening or closing the CAM valves may require some force 2 Power up Supplemental Equipment x x T
10. e format In the main menu of the semicaps software click on the SEM button This button will be in the top right corner of the screen Note that when this button is depressed the image on the SEM CRT monitor will no longer be displayed It is therefore important to do majority of the image adjustment on the scanning microscope while not in semicaps SEM mode and that a satisfactory image is obtained The following four options will be available in the SEM sub program select area image size big small tiny continuos continuos scan with averaging snap single image capture with averaging and final single image capture w avg 12 To obtain the image from the SEM CRT monitor click on continuous and set number of averages to 1 Since the brightness on the SEM and the image capturing system is not the same it will be necessary to decrease the brightness knob on the SEM main control panel The continuous mode will draw an image across the screen updating each time the previous rendering is complete This allows room for fine adjustments on the SEM to improve the image quality Increasing the number of averages will improve the image granularity but will significantly reduce the rendering time Once a satisfactory resolution has been obtained click on the quit button which will return the user to the SEM menu Selecting Snap will do a single image rendering at
11. e incident electronic charge which will interfere with consequent electron beam scanning These charging effects can adversely effect the contrast across the image and may dramatically deteriorate image quality If applicable deposition of a metal layer such as by sputtering or evaporation can in numerous cases dramatically improve imaging of insulating materials This is not possible in situations where device function will be lost following metal deposition In most cases however for microelectronic device imaging little sample preparation is needed The main concern is providing a conductive path between the imaged material surface and the sample holder which is internally electrically grounded to avoid the effects of sample charging This will provide a drainage path for the excess absorbed electrons Sample mounting is discussed later in section 7 The SEM is used mainly for topographical characterization of material surfaces or micro device circuit layouts The sample can be displaced in the x y plane and can also be tilted up to 60 and rotated The tilt angle allows stereoscopic imaging for investigation of trench and side wall profiles SEM imaging is based on detection of back scattered or secondary electrons from the imaged material surface secondary and back scattered electron intensities as well as their respective SEM contrasts for a variety of materials are given in the manufacturer s manual yellow binder 3 LOCATIO
12. ge off Set WD 48 Return the sample stage to initial settings as given in procedure 3 Open load lock CAM valve Insert loading lever arm and screw the arm into sample holder Pull sample holder away from receiving dovetail piece and completely out into load lock Close load lock CAM valve Open leak valve labeled LV 2 to flow pure nitrogen gas into load lock This will bring the load lock to atmospheric pressure after which the door will be able to be opened the sample withdrawn Procedure 3 Control Panel Setup and SEM Imaging Once the sample is positioned into the SEM chamber the stage position can be adjusted and the optical microscope used to roughly position the sample The optical microscope is engaged by turning the knob which lowers an optical prism to image the sample The working distance must be at 48 in order to engage the optical microscope Also the light output for the optical microscope should be increased It is found near the SEM chamber vacuum gauge Unfortunately the optical microscope can often be difficult to focus and sometimes of little use Check the vacuum gauge the SEM chamber pressure should be approx 10 mbar Set up the initial settings on the main control panel according to Figure 2 taken from section 5 2 1 on page 5 6 of the user s manual in the yellow binder Section 5 2 1 Initial Control Setting Page 5 6 in JEOL MANUAL Set the panel controls as follows _ Control Panel
13. immovable object Mishandling of a pressurized gas bottle can cause severe damage and or injury Few hazardous situations should arise using this equipment Some possible issues and suggestions if long term use is expected are presented in section 9 Other guidelines and operating procedures are outlined in detail in the following sections 7 OPERATIONAL PROCEDURE CHECKLISTS The operation of the scanning electron microscopy equipment is described in detail in the JEOL JSM IC25S user s manual found in a yellow binder However several modifications made by previous users warrant special caution since the equipment operation differs slightly from its original design Some commands functions and options included in the user s manual may not be available to the user at the present time Additional hardware may have been installed and incorporated in the operation of the SEM therefore this paper Standard Operating Procedure SOP and especially this chapter give the most up to date detailed operation steps It is best if the user becomes familiar with both the manufacturer s manual in the yellow binder and this standard operating procedure paper prior to operating the SEM This chapter is organized into three sections which discuss the SEM operation steps power up and shutdown vacuum system and sample loading It is important that the user is familiar with the location of the equipment and all of its key components Procedure 1
14. information this procedure is described in detail on page 5 16 of the JEOL MANUAL in the yellow binder Press the picture SCAN MODE button on the main panel On the CRT monitor adjust increase the brightness and contrast knobs as well as the brightness knob on the main panel An SEM image should be visible the following step gives suggestions to improve the contrast quality Adjust focus coarse and fine The brightness and contrast knob as well as the condenser knobs can significantly improve the image quality The magnification knob allows selection of this parameter and the sample can be positioned using the sample stage positioners x y rotation and tilt angle For a discussion of the function of each setting on the main control panel please refer to the JEOL MANUAL Follow the steps in procedure 2 Sample Exchange for loading a different sample Procedure 4 Shut down The following steps give the shut down procedure It is very important to follow this procedure precisely for proper system venting and allowing ease of start up for the future use Return the sample stage to initialization position stage rotation 0 tilt angle 0 X position 500 y position 500 Return to working distance WD 48 mm position Go to LSP SCAN MODE and return the magnification to 45 Turn the detector off SEI BEI switch to middle position Turn the filament knob down and acceleration voltage OFF Open load
15. k the valve status light indicators on the right of the CRT They should indicate which valves are ON or OFF Wait one minute following RP power up Open valves labeled V2 V1 and V4 in that order This applies RP into imaging chamber Wait one minute following this step Turn the turbo molecular pump TMP on this is done by pressing the power switch on the HP power supply If this switch is already on do not turn it off this will shut down the entire system If the TMP is on prior to this step leave it on it will slowly start to accelerate when the RP1 is applied on the backing line switch V2 Check that the TMP has accelerated the rotation indicator gauge on the HP TMP power supply Open valve labeled LV2 This brings the load lock to atmospheric pressure and allows opening of the sample chamber in approx 15 seconds Once the sample chamber is open the valve LV2 should be closed this stops the flow of nitrogen gas Electron Beam Chamber CAM valve Imaging Chamber CLOSE CLOSE CLOSE CLOSE VALVE LOCK Pure Nitrogen Gas Load lock V5 Lv2 OPEN OPEN RP2 P AUTO z Load lock CAM valve Figure 1 Vacuum Valve Panel Procedure 2 Sample Loading Sample Exchange 1 Sample Loading At this point the sample chamber load lock should be open and it can be pulled out to access the sample holder and mounting lever Please use caution and be gentle to these parts Use
16. l to initial settings given in Figure 2 Log SEM use in logbook found next to the equipment Procedure 5 SEM Image Capture The SEMICAPS image capturing module allows capturing averaging image processing measurement and file storage of a video output screen of the JEOL JSM IC25S scanning electron microscope SEM The PowerPro 486 25 MHz personal computer PC is interfaced with the video output of the SEM and has a copy of the semicaps software installed The PC starts up in MS DOS mode and the following commands will call up the program gt cd semicaps lt enter gt gt sem lt enter gt A previous SEM image may be displayed when the program is first started up In the main menu on the right side of the screen several program sub modules will be available SEM Camera Measure Process Edit System and Exit For example the Camera sub module allows image capture from video PAL or NTSC standard formats the Measure menu allows the addition of scaled feature measurements on the captured image System provides file utilities and Exit quits the program and returns to MS DOS The Read and Write commands allow recalling a file from disk or saving a file from the workspace Note that Write will produce an image readable only in semicaps The following two sections discuss the basic highlights of the software package image capture and image export to the TIF tagged image fil
17. nd pulling it out This may require some force It is locked in place by turning _ turn cw Once this valve is open one can see into the chamber through the view port The loading lever arm should be gently pushed in following its path through the view port and secured to fit snugly onto the receiving dovetail piece It is very important that the sample stage is in the initialization positions as described in section III I 1 Once this connection is made the loading lever arm can be unscrewed to release the sample into the SEM chamber The loading lever arm can then be retracted completely outside the SEM imaging chamber use the view port When the loading arm is pulled out the load lock CAM valve should be closed _ turn ccw push valve in then _ turn cw to lock Set the working distance WD 10 mm Check that the light indicator WD10 on the main control panel turns on This will ensure that the SEM images are calibrated Skip to procedure 3 Control Panel Setup and SEM Imaging 2 Sample Exchange This part discusses the vacuum procedure to exchange a sample in the SEM imaging chamber This is a very common procedure when multiple samples need to be imaged one after another This section assumes that the previous sample has been loaded according to procedure in the sections above Go to LSP mode Turn down the filament knob Turn off SEI BEI detectors switch in middle position Turn the electron acceleration volta
18. ns The following are potential hazards associated with pressurized gas bottles which may cause health and safety issues The nitrogen or helium gases used for venting the load lock can cause asphyxiation in a poorly ventilated area if a significant leak is left undetected over a period of time The gas bottle is under pressure and should be firmly secured to a large immovable object Mishandling of a pressurized gas bottle can cause severe damage 14
19. ples that will safely fit onto a sample holder and into the chamber should be imaged round wafers should be no larger than the 4 wafer holder The movable sample stage will allow positioning the sample to image the area of a 5 square sample 6 PRIMARY HAZARDS AND WARNINGS In general no hazardous situations should arise from typical operation of this equipment Hence this section is intended to remind the user of important steps to ensure proper operation of the equipment This is a list of scanning electron microscopy do s and don ts general guidelines 1 Do not introduce unnecessary contaminants into the SEM chamber Always wear latex rubber powder free gloves when handling any parts which will be placed inside the SEM chamber or load lock 2 When adjusting the filament knob follow carefully the instructions in section 7 so not to burn out the filament 3 Exhibit care when mounting the sample holder pad onto the loading lever The screw threads can be damaged easily 4 Devices with high current sensitivity should not be imaged using the SEM 5 It is important that the turbo molecular pump TMP and the roughing pump RP should never simultaneously pump on the same chamber 6 The nitrogen gas used for venting the load lock can cause asphyxiation in a poorly ventilated area if a significant leak is left undetected over a period of time 7 The gas bottle is under pressure and should be firmly secured to a large
20. red from the surface atomic species and the electrons emitted from the sample surface following absorption emission transitions also called secondary electrons The secondary electrons undergo an interaction that involves excitation of a surface atom by electron absorption followed by electron emission from material surface The JEOL SEM allows selection between both types of imaging detection The back scattered electron BEI detector is very useful for higher degrees of magnification while the secondary electron SEI detector is more versatile In both cases the image contrast is obtained from the difference in electron counts from different planes depths edges and material interfaces Imaging depth contours surface planes and edges allows topographical and stereoscopic characterization of materials or devices It should be noted that the SEM technique is somewhat invasive Although most samples will be unaltered charge flow current through the sample and strong excitation of the surface atomic layer may affect some devices The JOEL JSM IC25S is a scanning electron microscope Its use is intended primarily for characterization of electrically conducting or semi conducting materials surfaces and devices under a high degree of magnification up to 32 000x or approximately 1000A resolution Insulating materials or combined conductive insulating structures can be imaged with varied success In the SEM insulating materials will accumulate th
21. rol panel All users of the SEM must log in their usage in the logbook which must include the date the time the person operating the SEM the materials that were imaged and any anomalies in the operation of the instrument Recording all suspicious or unusual behavior as it happens greatly assists in troubleshooting and maintenance of the instrument 4 PERSONAL SAFETY EQUIPMENT No personal protective equipment is needed for the routine operation of this instrument Powder free latex or PVC gloves are required for handling the sample holders and internal parts of the load lock to keep finger print oils off of the internal surfaces 5 MATERIAL COMPATIBILITIES In general material compatibility issues for the SEM are not very complex Most conductive or semiconductive microstructures will yield very satisfying images The JEOL JSM IC25S SEM is intended for characterization of microelectronic devices and materials which may be very sensitive to particulate contamination No biological matter is to be imaged using this system Since the SEM involves a vacuum system approx 10 torr contamination of the chamber and load lock should be avoided Always use powder free gloves when handling any samples or parts which will be placed into the SEM Devices or circuits that may be sensitive to large currents from the electron beam should not be imaged using SEM The JEOL JSM IC25S SEM is designed to accept a limited range of sample sizes Only the sam
22. urement ON or OFF and click on OK These options write to the tif file or omit writing the applied magnification data edited text and measurement as previewed on the screen Select the file name and directory to which the file should be written and click on the Write button The file utilities in the System menu allow preview of any images captured by semicaps as well as the typical file utility options 8 HELPFUL HINTS COMMON QUIRKS AND TROUBLESHOOTING The best source for detailed coverage of SEM procedures and components is the user s manual JEOL MANUAL in the yellow binder The manual has a large section on image contrast depth of focus and use of astigmatism control which can yield significant improvements in 13 image quality This SEM has had numerous years of use and does have its own quirks Research faculty graduate students and other staff which have experience using this equipment will likely be a great troubleshooting resource 9 ENVIRONMENTAL HEALTH AND SAFETY ISSUES There are no significant known environmental health and safety issues associated with the operation and use of this equipment Although x ray generation is expected from the incident electron atom interactions the dose is predicted to be small If continuos use of the SEM equipment is expected thoroughly familiarize yourself with the equipment and safety issues Common sense can prevent most hazardous situatio
23. urn on water re circulation chiller two switches for the turbo molecular pump TMP Crack open the very pure nitrogen bottle the pressure regulator should be set to 40 psi This bottle is used to vent the load lock Turn on vacuum gauge to monitor the chamber pressure This is a black box next to the SEM display CRT 3 SEM Power up x On the vacuum pneumatic valve panel Figure 1 turn the power switch on This activates the pneumatic valve switches Turn the main panel power switch on This switch has a safety it must first be pulled and then switched Push the momentary start button The CRT display and valve check light panel should turn on 4 Pump down On the following page in Figure 1 is a vacuum line diagram which can be found on the vacuum control panel Itis intended to aid the user in the SEM pump down In the diagram observe the vacuum connections between the two roughing pumps RP1 RP2 the turbo molecular pump TMP which has replaced the diffusion pump DP on the diagram and the SEM chamber and load lock Note the DP switch is inoperable since the DP has been replaced The vacuum lines are intercepted with a number of pneumatic valves controlled by the indicated toggle switches which allow manipulations of the vacuum The step by step pump down procedure follows ok Turn on roughing pumps toggle switch RP on the valve control panel The roughing pumps should noticeably turn on Chec
Download Pdf Manuals
Related Search