CHAPTER 1
Contents
1. DIRECTION OF MOTON ei X GND PAN SCREW TE 41 7 REF M3x0 5 9 2 al C E ca ma A M N N ca N qo 40 3 14 a FRONT COVER FRONTCOVER PONER T ART m BACKWARD _ _ BACKWARD kk41 1 0 6 0 2 FRONTCOVER FRO NS RDS 406404 FORWARD TYPx2 5 NOM N SI NOTES EB ee 1 PRELOAD RELEASE ECCENTRICS SHOULD 4 THREADS REMAIN ACCESABLE AFTER MOUNTING I 4 FOR MOUNTING 2 ALLDIMENSIONS REFER TO A MOTOR CORRECTLY ala A MOUNTED AGAINSTALUMINA STRIP oN CES 3 ALL DIMENSIONS ARE IN MM ge A gt 4 GENERAL TOLERANCE 0 1 a 41 9 FOR HIGH VACUUM MOTOR S p 40 5 FOR HIGH VACUUM MOTOR 41 3 FOR HIGH VACUUM MOTOR Ut N O HH E PRELOAD S 932 RELEASE ue a TYPx2 FING ER EC CENTRIC S copy of layout drawings MSP8 M 30 L20 20 and SP8V M 10 L00 00 TIPS 3 05 Figure 3 5 Dimensions for Standard and High Vacuum Motors HR8 Motor User Manual 3 6 Chapter 3 Specifications 3 3 2 Dimensions for Ultra High Vacuum Motors DIRECTION OF De 21 40 2 M3x0 5 2 THREADS FOR GROUND LEO aus ras co HDi 4 14 3 0 2 x g 40 5 14 TYPx4 FRONTCOVER FRONT COVER oN 26 6 fon BACKWARD _ _ BACKWARD i 41 3 0 6 0 2 FRONTC OVER FRONT COVER 40 6 FORWARD FORWARD 41 9 REF 4 THREADS NOTES o FOR MOUNTING 1 PRELOAD RELEASE ECCENTRICS SHOULD NE REMAIN ACCESIBLE2. 250 mm sec 30 to 36 N 28 N reference value 3 3 to 3 8 N u 144 N 4 to 8 N Volt driver amp command dependant 120 to 144 N sec m 1 to 2 V driver dependant Better than 100nm see application notes 20 000 hours under nominal operating conditions 270Vrms 39 6KHz sine wave 600 mA rms 30W 0 50 C 20 C 70 C 0 80 non condensing 107 Torr guaranteed only after baking 10 Torr guaranteed only after baking 120 C 140 C for ultra high vacuum motor 41 9mm 46 6mm 23 8mm 120 170 gr high amp ultra high vacuum motors standard motor HR8 Motor User manual 3 3 Chapter 3 Specifications 3 2 5 Performance Envelope The following graph illustrates motor velocity as a function of the applied driver command voltage Allowing up to 30 mm sec variations use it as a reference and as a guideline for expected motor performance 300 0 250 0 200 0 150 0 100 0 50 0 0 0 Velocity mm sec Motors velocity VS command 1 2 3 4 5 6 7 8 9 10 Command V Figure 3 3 Motor Velocity vs Command 1 The motor operates horizontally at room temperature and low duty cycle lt 10 It interfaces an Ceramic Strip according to Nanomotion Specifications and a cross roller high quality slide HR8 Motor User manual 3 4 Chapter 3 Specifications The following graph and table are designed to help the user det
3. oy A NANOMOTION cro HR8 Ultrasonic Motor User Manual P N MSP8 M00 M00 40 Nanomotion Ltd POB 223 Yokneam 20692 Israel Tel 972 4 959 0862 Fax 972 4959 0995 Web Site www nanomotion net E mail nano nanomotion com Preface HR8 Motor User Manual A CE Compliance Copyright The LN 2000 family drivers and motors complies to the following directive Safety IEC 61010 1 1990 EMC 89 336 EEC as amended by 92 31 EEC and 93 68 EEC Harmonized Standards to which conformity is declared EN 50081 2 1993 EN 55011 1991 Generic Emission Standards Class A for radiated emission and Class B for conducted emission EN 50082 2 1995 Generic Immunity Standard NOTE UHV motors are designed for convenient interface to the UHV setup The motors are therefore supplied with three open electrical leads Whereas standard motors comply with CE regulations and the UHV motors have the same internal design as standard motors the UHV motors are supplied as components and CE conformity in both EMI and Safety must be implemented as part of the UHV system design April 2000 This document contains proprietary information of Nanomotion Ltd and may not be reproduced in any form without prior written consent from Nanomotion Ltd HR8 Motor User Manual A Preface Warranty Patents Preface This Installation Manual is designed to help the reader install and operate the various types of Nanomotion s HR8 Piezoceramic Motors Thi
4. as illustrated in the following diagram Figure 3 1 Block Diagram of the Motor and Driver Where Vin Command to the driver 10 to 10 V Kf Force constant N V Offset Starting voltage V Kfv Velocity damping factor similar to back EMF N x sec m Vel Motor velocity m Sec M Moving mass kg S Laplace variable 1 sec HR4 Motor User Manual Chapter 3 Specifications A block diagram of a typical HR8 Driver Motor Sub system is shown below A command voltage of 10V is applied to the driver The driver then generates a 39 6Khz sine wave V motor whose amplitude is a function of command voltage The sine wave drives the HR8 motor D Figure 3 2 Block Diagram of a typical HR8 Driver Motor Sub system Velocity Force gt V Command V Motor HR8 Motor User manual 3 2 Chapter 3 Specifications 3 2 Specification Parameters 3 2 1 Performance Maximum Allowable Velocity Dynamic Stall Force Static Holding Force Non Energized Stiffness Nominal Preload on Stage Kf Kfv Offset Attainable Resolution Nominal Lifetime 3 2 2 Electrical Maximal Voltage Maximal Current consumption Maximal Power Consumption 3 2 3 Environmental Ambient Temperature Storage Humidity Vacuum level high vacuum motors Vacuum level ultra high vacuum motors Maximum Baking Temperature for vacuum motors 3 2 4 Physical Dimensions Length Width Height Weight
5. AFTER MOUNTING 2 ALL DIMENSIONS REFER TO A MOTOR CORRECTLY MOUNTED AGAINST ALUMINA SIRIP 3 ALL DIMENSIONS ARE IN MM 4 GENERAL TOLERANCE 0 1 N oO I S T 3 FINGER TYPx2 TIPS D 3 05 RAD copy of layout drawing SP8U M 10 LO0 30 ECCENTRICS Figure 3 6 Dimensions for Ultra High Vacuum Motor HR8 Motor User Manual 3 7 Chapter 3 Specifications 3 3 3 Mounting Base Dimensions STAGE 4 CARRIAGE 2 75 REF A CERAMIC PLATE MOTOR MOUNTING SURFACE SHOULD BE FIXED En TO STAGE BASE n 10 7 0 1 25 8 0 1 TYPx2 if TYPx2 Figure 3 7 Base Layout HR8 Motor User Manual 3 8
6. U motor case to ground it must be grounded by means of connection to the network ground Please refer to section 2 2 3 in the manual for detailed instructions 2 2 4 2 System Electrical Configuration The Motor is to be operated by one of Nanomotion s drivers Following is the two possible configurations Nanomotion s Driver LC l wo Without an Integrated Box LC circuit Nanomotion s Driver With an Integrated Internal LC circuit Figure 2 10 Connection to a Driver with internal LC circuit HR8 Motor User Manual 2 11 2 2 5 Motor Run In Chapter 2 Preparation and Installation Run in of the motor is important to reduce wear rate of the system and to increase its lifetime The required run in conditions are as follows e velocity 50 mm sec e Duty cycle 50 e Duration 4 hours When the run in is completed carefully clean the ceramic strip with a Q Tip soaked with IPA without dismounting the motor General remarks 1 The procedure should be repeated if the motor is disconnected and then reinstalled 2 Do not perform run in in a vacuum environment HR8 Motor User Manual 2 12 3 3 1 Chapter 3 Specifications Specifications General These specifications apply to the standard motor driven by the AB1 Driver Box The motor features a linear voltage response The motor and driver can be modeled as a DC motor with friction driven by a voltage amplifier
7. ces of the plate and the stage carriage but does not flow over the Ceramic plate front surface Ceramic Plate Figure 2 4 Securing the Ceramic Driving Plate to the Stage 5 Allow the required time period for curing according to the Epoxy manufacturer specifications 6 Mount the motor according to the following section HR8 Motor User Manual 2 6 Chapter 2 Preparation and Installation 2 2 2 Mounting the Motor 1 Preload the motor using a 3mm flat screwdriver turn both of the two preload setting screws counter clockwise until the turn is completed and the slot is in the position illustrated below NOTE the motor is usually supplied with the preload screws already at the preloaded position If so please continue to step 2 Preloaded position Figure 2 5 Non preloaded Position Continued on the following page HR8 Motor User Manual 2 7 Chapter 2 Preparation and Installation Stage Carriage Mounting Base Stage Base Ceramic Driving Plate Figure 2 6 Mounting the Motor 2 While making sure not to exert any force on the fingers place the motor on the mounting base and loosely secure it using four M4 screws and spring washers inserted from the underside of the mounting base Do not tighten yet 3 Gently press the motor against the ceramic driving plate until it just contacts it and tighten the four screws of Step 2 at a torque of 0 5 0 7 Nm HR8 Motor User Manual 2 8 Chapter 2 Prepa
8. chanical rigidity and stiffness Stage Carriage Alumina Driving Plate location Stage Base Mounting Base 4x holes Figure 2 1 Motor Mounting Base The mounting base dimensions diagram refers to the front surface of the Ceramic driving plate For driving plate dimensions please refer to the price list The four screws securing the motor to the mounting surface will be inserted from its underside Any protrusion of the screws might interfere with motion on another axis HR8 Motor User Manual 2 2 Chapter 2 Preparation and Installation 2 1 2 Limiting Stage Motion The provided ceramic driving plate should not exceed the stage It must be supported by a solid even backing along all its length in order to avoid breaking when motor is pressed against it The Ceramic driving plate should also be at least 20 mm longer than the stage travel length otherwise the motor finger tips might be damaged If the above requirements are not met limit the stage travel distance using end stops HR8 Motor User Manual 2 3 Chapter 2 Preparation and Installation 2 2 Motor Installation The installation procedure consists of Bonding the Ceramic Driving plate to the stage Mounting the motor Grounding the motor Connecting the motor to its driver 2 2 1 Bonding the Driving Plate to the Stage The Driving Ceramic Plate interfaces between the motor finger tips and the stage and provides the requ
9. ermine the correct performance envelope of operation so as to not overheat and damage the motor Force Vs Velocity at various work regimes O Force N D O 7 0 100 200 300 Velocity mm sec c max continuous max continuous max continuous uve Duty Cycle operation time Duty Cycle operation time Duty Cycle operation time 87 seconds 62 seconds 56 seconds Figure 3 4 Performance envelope at various work regimes How to define a performance envelope An example for using the graph and table A vacuum application requires 10N at a velocity of 100mm sec The graph shows that this point of operation corresponds to the curve a The table shows that curve d and a vacuum environment require that a duty cycle of 17 will not be exeeded while maintaining a maximum continuous operation time of 72 seconds Vacuum application note Heat dissipation mechanism is by radiation to the motor case and by conduction through the fingers Hence the motor and the ceramic drive strip bases must both be thermaly designed to dissipate 2W each per motor with a temperature rise of 15 C maximum Also the temperature of all parts in contact with the motor and with the ceramic drive strip should not exeed 40 C HR8 Motor User manual 3 5 Chapter 3 Specifications 3 3 Schematics 3 3 1 Dimensions for Standard and High Vacuum Motors
10. ired friction Bond the driving plate to the stage surface interfacing with the motor finger tips according to the instructions given in this section Stage Ceramic Driving Plate Figure 2 2 Bonding the Ceramic Driving Plate HR8 Motor User Manual 2 4 Chapter 2 Preparation and Installation 1 Clean the bonding region on the stage using a suitable agent such as Acetone or Methanol 2 Peel off the self adhesive backing paper on the Ceramic driving plate The self adhesive tape is compatible with high vacuum applications 3 Referring to the figure below place the plate in position verifying that There is a maximum of 3 5mm between the lower edge of the Ceramic driving plate and the motor mounting surface There is a minimum of 21mm between the upper edge of the Ceramic driving plate and the motor mounting surface Ceramic driving plate Mounting Surface Figure 2 3 Ceramic Driving Plate Position Continued on the following page HR8 Motor User Manual 2 5 Chapter 2 Preparation and Installation 4 Referring to the figure below apply two drops of epoxy adhesive on the center of the Ceramic driving plate upper surface about 2cm apart The Epoxy must bond between the plate and the stage Recommended adhesive Emerson amp Cuming ecobond 24 for vacuum applications 3M 2216 epoxy or CIBA GEIGEY Arldite Radite for non vacuum applications NOTE Be sure the epoxy contacts the upper surfa
11. l network ground according to the following instructions before operating the motor CAUTIONS Arrows on motor indicate direction of motion Align accordingly Do not set power on unless motor is mounted and preloaded Do not immerse the motor in any liquid or cleaning agent Use only a clean cloth to wipe the motor Be sure that the motor and specifically the finger tips are not subjected to mechanical shocks Be sure that the distance of the motor to the plate enables the motor finger tip to contact the driving plate otherwise the motor might be damaged during operation The mounting base and the method used for mounting should be designed for maximum mechanical rigidity and stiffness Reducing the length of the supplied motor cable may damage the motor Do not attempt to shorten the cable without prior confirmation from Nanomotion 7 Extending the motor cable will not damage the motor however it will affect its performance HR8 Motor User Manual C Preface Table of Contents HR8 Motor User Manual D 1 1 1 1 2 Introduction About the Motor The HR8 motors are high precision ceramic motors belonging to the Nanomotion LN2000 product line Designed and manufactured by Nanomotion Ltd the HR8 motors combine unlimited stroke with high resolution in compact dimensions Among its applications are microscopy precision motion robotics etc The mot
12. ors provide a linear response to the input voltage The operation of the motor and driver resembles that of a DC motor driven by a voltage amplifier The specifications described in this chapter apply only to the motor driven by the AC 1 Driver Card and the AB 1 driver box Minor differences may result if NCD Controller Driver DC 12 Driver Card or DB 121 122 Driver Box are used Vacuum Motors Applications of the Nanomotion motors for vacuum and high vacuum environments include wafer inspection and metrology scanning stages and lithography The HR8 V and HR8 U motors are constructed of materials that have been selected and designed for high vacuum compatibility HR8 Motor User Manual 1 1 1 3 1 4 1 5 Introduction HR8 System Parts Handling A complete set for a single axis will comprise of the following a HR8 Motor b Ceramic Driving Plate for linear applications or Ceramic Driving Ring Disk for rotary applications See section 2 2 1 c LC Box Tank Circuit One of the following drivers AC 1 Driver Card AB1 DC 12 Driver Card 7 DB 121 or 122 Driver Box NCD Driver Controller Box 2 NOTE For the first 4 driver options use a standard off the shelf DC Controller with a servo rate of 10KHz or more You may consult Nanomotion for the recommended controller The option for NCD Driver Controller Box consists of a driver and an integrated controller CAUTIONS Do not set power on unle
13. ration and Installation 4 Release the preload setting screws using again the 3mm flat screwdriver turn both screws clockwise until the turn is completed and the slot is in the position illustrated below The motor is now preloaded against the ceramic drive plate Released position Figure 2 7 Released Position 5 Ground the motor according to the following section 2 2 3 Motor Grounding A Warning Be sure to ground the motor to the electrical network ground according to the following instructions before operating the motor 1 Prepare a grounding wire and terminal connection with the following specifications Terminal diameter for an M3 screw Wire diameter minimum 18 AWG Wire length maximum of 2 meter 2 Open the motor ground screw figures 3 5 amp 3 6 and connect the Ground connection prepared in step 1 Secure the terminal between the two lock washers 4 Connect the other end of this cable to the electrical network ground 5 Connect the motor to its driver according to the instructions given in the following section HR8 Motor User Manual 2 9 Chapter 2 Preparation and Installation 2 2 4 Motor Connections This section describes the motor connector pinout and the connections to each of the available drivers Make sure the driver is set to operate with the HR8 motor series CAUTIONS Reducing the length of the supplied motor cable may damage
14. s manual assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures The manual describes the physical dimensions as well as the mechanical and electrical installation procedures for these motors The motors are covered by warranty for a period of twelve months from the date of invoice The following voids the warranty Misuse or incorrect mounting incorrect electrical connections removal of motor cover or of serial number modification of parts and any other use that is not according to the cautions and warnings provided in this guide Liability for replacement will be determined after inspection of any defective item by Nanomotion or an approved agent Aspects of the HR8 motors and relevant applications are protected by the following patent and patent applications e US 5453653 e US 5714833 e US 5696421 e US 5616980 e US 5682076 HR8 Motor User Manual B Preface Definition of Terms Warnings and Cautions NOTE Additonal usefull information CAUTION Identifies conditions or practices that could result in damage to this product or other property A WARNING Identifies conditions or practices that could result in personal injury damage to the product or other property A WARNINGS Do not remove the cover of the motor or disassemble its connector High voltage inside Be sure to ground the motor to the electrica
15. ss the motor is mounted and preloaded Do not immerse the motor in any solvent or cleaning agent Use only a clean cloth to wipe the motor Be sure that the motor and specifically the finger tips are not subjected to mechanical shocks Installation and Servicing It is recommended to follow the installation instructions in this guide when mounting and installing the motor The HR8 does not contain any user serviceable parts HR8 Motor User Manual 1 2 2 Preparation and installation 2 1 Preparation For optimal motor performance it is recommended to use the Ceramic driving plate provided by Nanomotion These driving plates have been specifically designed to work with Nanomotion motors Substituting this plate with any other material might reduce motor performance or damage the motor NOTE The instructions given in this section refer to the standard ceramic driving plates provided by Nanomotion Nanomotion can not guarantee performance attained by plates purchased from other sources HR8 Motor User Manual 2 1 Chapter 2 Preparation and Installation 2 1 1 Mounting Base Prepare the base as described in Section 3 3 3 Mounting Base Dimensions The base should be positioned perpendicular to the Ceramic driving plate that is bonded to the stage If necessary refer to the schematic for motor dimensions CAUTION The mounting base and the method used for mounting should be designed for maximum me
16. the motor Do not attempt to shorten the cable without prior confirmation by Nanomotion Extending the motor cable will not damage the motor however it will affect its performance Motor Connector Pinout A WARNING Do not remove the cover of the motor or disassemble its connector High voltage inside CAUTION Do not set power on unless the motor is mounted and preloaded The motor driver connection is a standard 9 contacts D type female connector whose pinout is given below Motor Connector Pinout 5 9 Direction 1 4 Common 8 Direction 2 3 Screen 7 2 6 1 Figure 2 8 Motor Connector NOTE Pins 6 and 1 on the motor connector are shorted This is done for safety reasons driver voltage is disabled unless pins 1 amp 6 are shorted when motor is connected HR8 Motor User Manual 2 10 Chapter 2 Preparation and Installation For Ultra High Vacuum motor The HR8 1 U motor does not have an outlet cable or a connector Instead there are 3 TFE jacketed wires extending outside the motor 1 black wire 1 red and 1 white wire The red and white wires are direction 1 and 2 respectively and the black wire is the common Also the safety shorting between pins 1 and 6 is not implemented and should be preformed by the user A WARNING Since there is no cable shielding the HR8 1
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