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4 Start up Controller

1. PIMikroMove R x Connections C 843 Board 1 Tools Help a gt gt ii flenter help search here O R GE 15 000000 M 605 2DD k lt 100 0000 gt OL 0 1000 100 0000 EEE wrveterenced 25 000000 M 511 PD ie w 56 0000 gt 1 0000 56 0000 ERM on target 62 500000 M 110 1DG w lt 0 000000 0 010000 0 000000 SARM on target 1 000000 Fig 5 PIMikroMove main window The main window consists of several parts m Menu bar Toolbar m Pane with tab cards for o Axes o Macros not shown appears only if supported by one or more connected controllers o Host Macros Some other windows can be shown either as separate windows or docked into the main window WWwW pi wSs PIMikroMove SM 148E Release 1 0 0 Page 6 Main Window Piezo Nano Positioning PIMikroMove R Connections C 843 Board 1 Tools Help PI amp gt e Ri pa lenterhe search here O P R G Fa Axes Host macros State on target Postion 7 739746 wJ 4 oof gt Target 7 739938 7 739746 SAREE on target 15 000000 M 605 2DD k Ea 100 0003 ET 0 1000 100 0003 EEE wrveterenced 25 000000 M 511 PD lt 699291 5 5i 1 0000 69 9290 EE on target M 110 1DG k lt 0 000000 gt ot 0 010000 0 000000 SARE on target 1 000000 62 500000 Ej A 2 24 Step size 10 1 Tal i L i E A
2. Nano Positioning PI Start up Controller CAUTION lf you define the absolute position manually be sure to choose the correct value This will be the base of all future calculations and range checks If the value specified is wrong you can easily crash the stage CAUTION If you choose to enable relative moves only no more range checks are performed You can easily crash the stage For more information see Why do need to reference an axis and My stage has limit switches so why do have to worry about crashing it WWwW pi wSs PIMikroMove SM 148E Release 1 0 0 Page 46 Piezo Nano Positioning PI Tutorials Frequently Asked Questions 5 Tutorials Frequently Asked Questions This chapter contains some general information useful in understanding the background of PIMikroMove and answers some frequently asked questions It also has a collection of short recipes for accomplishing common tasks Why do I need to reference an axis To move a stage to an absolute position the motion controller needs to know the current position Many stages however have only relative sensors encoders that are used to determine the current position Somehow the controller must find out where the stage is This can be done by moving to a known fixed position P MikroMove uses a limit or reference switch to define such a known point The reference position is the point where the reference signal ch
3. This document is available as PDF file on the Motion CD Updated releases are available via FTP or email contact your Physik Instrumente sales engineer or write info pi ws Conventions The notes and symbols used in this manual have the following meanings Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in injury or death CAUTION Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in damage to equipment NOTE Provides additional information or application hints Related Documents The motion controller card and the software tools which might be delivered with M 5x1 Linear Positioning Stages are described in their own manuals All documents are available as PDF files on the Motion CD or special product CD Updated releases are available via FTP or email contact your Physik Instrumente sales engineer or write info pi ws WWW DpI WwS Contents General Design of M 5x1 Series Linear Stages 11 Safety PRECAUTIONS s orriren sia i A tenes nares WZ SNPMEN COMENS aorin A a lo Model SUNE o ltia ie ctees ht oi oueaiuietiatees 14 General Mechanical Data ccccccccccececeseeseeeceeeeeeeeseeeeaes 15 AEISCUICAl Data entia acee becaetaadeieaducitataweetes 1 5 1 Type DD Stages with Linear Scales and Direct Drives 152 Type PD Stages with Rotary Encoders and Direct DIVOS sra
4. O to 1 200 LIM IERR 2000 LIM IERR 2000 LIM IERR 2000 lai CPN Bian Nira 0 to 3 000 O to 3 000 0 to 1 500 Acceleration ACC 1800000 ACC 1000000 ACC 2000000 100 000 500000 500 000 to 3 500 000 to 2500000 to 3 000 000 VEL 300000 MVEL 180000 MVEL 120000 1 to 500 000 1 to 270 000 1 to 200 000 5 2 5 Using Mercury Motor Controllers with M 5x1 stages The Windows operating program for the Mercury controller allows choice of M 5x1 stages as a start option for operation Mercury always has the PWM mode enabled without any extra command Ensure that the brake is set off by issuing the BF command prior commanding any moves M e rcu ry Parameter Settings for M 5x1 Stages O PD o DD 30 to 60 80 to 300 150 to 300 O to 20 O to 50 0 to 50 Limit 0 to 500 0 to 400 0 to 1200 DL2000 Acceleration SA2000000 SA1000000 SA2000000 100 000 500 000 500 000 to 3 000 000 to 2 500 000 to 3 000 000 SV300000 SV180000 SV120000 1 to 500 000 1 to 270 000 1 to 200 000 Wwww pi ws M 5x1 Series MP 33E Release 4 1 2 Page 17 Piezo Nano Positioning PI Operating M 5x1 Stages 5 2 6 Stepper Motor Controller Setup Controller setup and multi axis networking for the stepper motor versions is fully described in the controller documentation All PI stepper motor devices can be networked together and up to 9 axes controlled off of single RS 232 port of a host PC WW
5. www pi ws I O Connector 33 All Axes MC2140 IO MC2140 CP PCI Bridge Se Motors 3 and 4 C 843 41 only Fig 3 C 843 Board layout C 843 MS77E Release 2 5 0 Page 18 Piezo Nano Positioning PI System Description 2 4 2 Motor Connector Pinouts Connectors for Connectors for Function Motors 3 amp 4 Motors 1 amp 2 only on C 843 41 on bracket IDC16 header Sub D 15f 10 GND 11 SIGN Output 5 V Negative limit Positive limit REFS GND 12 14 Encoder A For the C 843 41 an adapter mounting bracket is provided with two sub D 15 connectors to allow standard connector access for motors 3 and 4 O71 B amp B PO WWwW pi ws C 843 MS77E Release 2 5 0 Page 19 System Description Piezo Nano Positioning PI 3 4 3 Digital I O Connector WWwW pi ws Eight input and eight output lines are available on the C 843 for user specific purposes for example for reading external signals These lines have no direct connection to the motion processor For accessing to them via the registers on the C 843 see the Low Level Information section on p 29 The I O lines can be brought out using the included adapter bracket with a sub D 25 connector The adapter ribbon cable connects to the 26 pin IDC connector J5 on the C 843 see Fig 3 on p 18 Connector on Connector on Function Board Bracket IDC26 header Sub D 25 Pin Q Z O Inpu
6. DAC l n Step size physical units 5 event Bo 0 2 Add Stage Save Stage Run loop Single step Stop Move Rel Load factory settings Load default settings Autotune Physik Instrumente C 843 21400023 1 2 3 27 h Fig 26 PITuning Tool window with servo loop parameters The PI Tuning Tool available on the controller menu of supporting controllers is designed to determine reasonable servo control parameters for the different axes on the controller While the stage moves stepwise real time positions are recorded and displayed After a step the stage is automatically moved back to the starting position m Parameter tune Servo loop Profile generator Velocity 1 00 0 1 00 Acceleration 30 00 0 J Deceleration 30 00 oe J Load factory settings Load default settings Autotune Fig 27 Additional tuning parameters The additional tuning parameters are passed to the Profile Generator if supported as constraints for the profiles it generates PIMikroMove SM 148E Release 1 0 0 Page 36 Additional Windows Piezo Nano Positioning PI 3 3 1 Stage Setup Pane Select your stage type from the list Use DEFAULT_STAGE or DEFAULT STAGE P the same except that Motor mode is set to PWM for stages not listed or if you do not want to be subject to any restraints like limits reference positions etc CAUTION lt is not necessary to reference the stage but you are
7. lt lt S S lt value gt is the value to be used on the right side of the comparison For example MEX DIO A 0 will exit the macro if the digital input Ais 0 2 4 0 MAC NISTART lt name gt With MAC START you can call another macro lt name gt specifies the filename of the text file with the macro content With MAC NSTART you can specify how many times the called macro should be run Thus you can implement loops by placing the commands of the loop inside a separate macro file and calling it with MAC NSTART see sample below 2 4 4 Example Wait and Trigger WWwW pi wSs Example of how to send a trigger signal after the motion of an axis has finished Put the logic of waiting and triggering in a macro named WAITTRIG and call it after each MOV or MVR command Macro waittrig txt WAC ONT A 1 DIO Al DEL 100 DIO AO PIMikroMove SM 148E Release 1 0 0 Page 24 Main Window Piezo Nano Positioning PI You can use this in other macros MOV A10 MAC START WAITTRIG MOV AO MAC START WAITTRIG 2 4 5 Example X Y Scan Example of loops implemented with MAC NSTART All three macros together will perform a 10 x10 mm scan At each target point during the scan one of the digital outputs is set high for 100 ms to trigger an external device Macro scanxy txt This macro will move the two axes A and B to their home positions and wait for both axes to stop Then the macro scanrow txt is c
8. occurs set the motor off MF and modify the parameter settings If the motor brake option is installed the operators and or programmers should take measures to ensure that no platform motion occurs or is commanded while the motor brake is clamped ON state 5 1 Mechanical Handling 5 1 1 Mounting M 5x1 series stages can be mounted in any orientation horizontally or vertically To achieve the specified guiding accuracy the stages have to be mounted on a flat surface to avoid torsion of the basic profile 5 1 2 Operating Environment M 5x1 series stages should be operated in clean environments Although the bearings and ballscrew are covered to protect against dust and liquids falling vertically the aluminum case is not hermetically sealed Make sure that metal dust and liquid spray do not enter the case via the gap between the cover and the aluminum body 5 1 3 Maintenance WWW pi WwsS When operated in a clean environment no maintenance is required If the stages are operated in extremely dusty environments we recommend cleaning and greasing the ballscrew and linear bearings from time to time The time interval depends of the degree of contamination and can vary from 100 to 800 operating hours Recommended lubricant for ball screws KLUBER Staburags Type NBU 8EP or Beacom 325 M 5x1 Series MP 33E Release 4 1 2 Page 14 Piezo Nano Positioning PI Operating M 5x1 Stages 5 2 Motor Controller Setup 5 2 1
9. or controller DLL To do so enter a followed by the decimal value of the ASCII character For example 24 will send the byte with value 24 X which is interoreted by most controllers to stop all axes and macros If you need to send as a character itself type or 35 PIMikroMove SM 148E Release 1 0 0 Page 28 Main Window WWwW pi wSs Piezo Nano Positioning PI Position Pad Window x at at rate HOES ee a Avis 2 M 605 20D on C 843 on 0 843 Board 1 0 000000 Position 25 000000 Target 25 000000 Velocity 25 000000 fas Asis 4 4 1016 on C 843 on 0 843 Board 1 gt Position 3000002 Target 3 000002 Velocity 1 000000 20 000000 5 000000 0 000000 Fig 20 Position Pad With the position pad you can control and visualize the position of two axes The black cross marks the target position and the blue cross the current position In Target control mode you can click or drag the target position with the mouse or you can move it with the joystick The left side of the window shows the toolbar and the position grid On the right side you can choose which two axes to control and see their position target and velocity settings To change the velocity use the corresponding single axis windows or the Axes Tab Card The Position Pad can be docked to the bottom border of the main window see Fig 6 PIMikroMove SM 148E Release 1 0 0 Pag
10. you connect controllers to PiMikroMove 5 PIMikroMove R H O x Connections Tools Help z gt e fi flenter help search here O R ernn Axes Start up controller C 843 DC Motor Controller Card 1 Connect controller PCI Board UH PCI Board fh re bl b 2 Select connected stages 3 Start up axes Version Info Connect Help Cancel Fig 2 Start up controller window at Step 1 Connecting controllers PIMikroMove SM 148E Release 1 0 0 Page 3 Piezo Nano Positioning PI Introduction Only one controller may be selected at a time but the dialog can be reopened from the Connections menu See Section 4 1 for more information After connecting a controller the window reopens at Step 2 Here you are given the opportunity to specify the stage types for the controller s one or more axes Do not forget to click Assign to copy the selection from the stage list to the axis list Start up controller connected C 843 on C 843 Board 1 X Available axes on controller Known stage types n Stage NOS TAGE M UbAPD oo d M 605 2D0 1A Uae z HOSTAGE M 1T10 10G NEW 4 NOSTAGE lt gt Assign M110 1DG NEW P lt Ho Stage M 117 1D6 M 117 10G NEW M 177 10G NEW P M 117 106 P iM M 111 2D6 M 117 206 P WiM M 117 B0004 M111 Add Pt fia Heset F il 3 Start up anes Help Cancel Fig 3 Start Up Controller Ste
11. 20000 50 1 24 0 96 Al C 600 C 630 M 061 M0 continuous 90 1 1 36 Al M 061 PD continuous 17 5 0 001 17 5 50 200 90 550 2 4 90 1 30 O to 24 1 88 Al M 061 DG M 061 2S continuous continuous 1 2 6 9 x 10 6 50 200 550 2 2000 28 12 1 29 6 1 90 1 3 O to 12 1 88 Al C 842 C 843 C 844 C 848 C 862 3 5 0 0002 10 5 50 200 20 550 3 20000 90 1 24 1 90 Al C 600 C 630 M 062 M0 continuous 110 1 2 24 Al M 062 PD M 062 DG M 062 2S continuous continuous continuous 15 0 0008 15 60 240 90 650 3 110 1 30 O to 24 2 76 Al 0 96 5 5x10 5 60 240 7 3 650 3 3 2000 28 12 1 29 6 1 110 1 3 0 to 12 2 76 Al C 842 C 843 C 844 C 848 C 862 ActiveDrive integrated PWM servo amplifier 2 9 0 00016 9 60 240 16 650 20000 110 1 24 2 78 Al C 600 C 630 User Manual MP 47E Units degrees urad deg urad urad urad deg s N Nm Nm Nm counts rev counts rev kg Release 1 3 3 PI M 060 M 061 amp M 062 Rotation Stages 6 1 Dimensions User Manual MP 47E Dimensions in millimeters decimal places separated by commas in drawings 6 1 1 M 06x M0 Release 1 3 3 A o 10 160 8s a z o s s 6 Ee es s 75 70 E E K _20 o f o o o tt 38 20 0 8 p
12. 843 MS77E Release 2 5 0 Page 21 Piezo Nano Positioning PI System Description 3 5 Configuration Settings for Multiple Cards lf you want to use more than one C 843 card up to 8 cards are possible in one PC the cards must be given different board ID settings The mechanism used is comparable to setting jumpers on an ISA card but instead of a jumper a serial EEPROM on the card is used By default all cards ordered from PI are configured with ID of 1 so Card 1 need not be reprogrammed If you wish to have PI set your card before shipment please let us know Otherwise to reset the EEPROM the following steps must be performed WARNING The C 843 Motor Controller Card is an ESD sensitive electrostatic discharge sensitive device Observe all precautions against static charge buildup before touching this device Avoid touching circuit components pins and PCB traces Discharge any static charge you may have on your body by briefly touching a conductive grounded object before you touch any electronic assembly Pose PCBs only on conductive surfaces such as ESD safe transport containers envelopes foam Electronic subassemblies must always be kept and transported shipped in conductive packaging Make sure that no conductive particles of any kind metallic dust or shavings broken pencil leads loose screws get on the card or into the PC Make sure that no electrical contact between the various add on cards in the PC i
13. Piezo Nano Positioning PI General Design of M 5x1 Series Linear Stages 1 3 Model Survey M 5x1 series stages are available with travel ranges of 102 204 and 306 mm Depending on the application integrated drives using DC motors with or without gearheads and 2 phase or 5 phase stepper motors are offered All direct driven stages DD can be equipped with an electrical motor brake option model numbers DDB Travel Range Gearhead Ratio Design Resolution Translation Ratio Repeatability uni directional Max Velocity Motor Power mm um count counts um um mm s W a a om fos a O S E B CA A a M 511 2S 2 phase SM 4 9 con e Ga e aa eo a a A 5 phase SM pests Translation Ratio is the value used by WinMove operating program t Exact gearhead reduction ratio is 28 12 4 1 29 641975309 1 Encoder 2048 c rev WWW Ppi ws M 5x1 Series MP 33E Release 4 1 2 Page 5 General Design of M 5x1 Series Linear Stages Piezo Nano Positioning PI 1 4 General Mechanical Data Straightness Flatness Origin Repeatability Max Load capacity Max push pull force Max lateral force Ballscrew pitch Material 1 5 Electrical Data 1 5 1 Type DD Stages with Direct Drives Motor Type Motor Power Motor Voltage PWM amplifier Encoder type Linear resolution Signals Encoder transmission Brake Signal Power supply Internal current draw 1 um per 1
14. Start Fig 2 C 843 41 installed with power connector at lower right 2 3 Begin Operation CAUTION DO NOT EXCEED MAXIMUM CURRENTS Keep in mind that the total current for the C 843 is supplied from the PC power supply only Extreme power peaks will occur when m Motors accelerate or decelerate very fast E Motors are reversed at high speed Motors stall m Stages are driven into the hard stop WWwW pi ws C 843 MS77E Release 2 5 0 Page 12 Quick Start WWwW pi ws Piezo Nano Positioning PI The total current may exceed the current capability of the PC power supply Voltage drops may occur with the risk of PC malfunction or damage to other devices such as hard disks drives The C 843 has factory set output current limitation Nevertheless the user has to ensure that the total current does not exceed the capability of the PC power supply 1 Restart the host PC 2 When the New Hardware Wizard appears do the following m 1 window click Next 2 window Win XP only Do not connect to Windows Update to search for software m Next window Do not search but choose the option that will display a list of drivers and click Next m Next window in the Model list pane C843 Device Driver should be highlighted Otherwise click Have Disk and select the CD ROM drive with the C 843 CD and the path Driver Win your operating system c843 inf then click Next m Next window click Next m Nex
15. and PCB traces Discharge any static charge you may have on your body by briefly touching a conductive grounded object before you touch any electronic assembly Pose PCBs only on conductive surfaces such as ESD safe transport containers envelopes foam Electronic subassemblies must always be kept and transported shipped in conductive packaging Make sure that no conductive particles of any kind metallic dust or shavings broken pencil leads loose screws get on the card or into the PC Make sure that no electrical contact between the various add on cards in the PC is possible All motion of the connected motors and mechanical stages is software controlled and software may fail Be aware that some motorized stages can generate large forces which can cause personal injury or other damage if not properly handled CAUTION DO NOT EXCEED MAXIMUM CURRENTS Keep in mind that the total current for the C 843 is supplied from the PC power supply only Extreme power peaks will occur when Motors accelerate or decelerate very fast E Motors are reversed at high speed Motors stall m Stages are driven into the hard stop www pi ws C 843 MS77E Release 2 5 0 Page 5 Piezo Nano Positioning PI Introduction The total current may exceed the current capability of the PC power supply Voltage drops may occur with the risk of PC malfunction or damage to other devices such as hard disks drives The C 843 has factory se
16. approximately 90 clockwise from the positive limit switch Release 1 3 3 WWW DI ws Page 5 PI M 060 M 061 amp M 062 Rotation Stages User Manual MP 47E 4 DC Motor Controller Setup Individual setting of motion control parameters is required for smooth and optimized movement of the DC motor versions Incorrect parameter settings may cause severe vibration If this occurs set the motor off and modify the parameter settings The recommended parameter settings see the tables below are to regard as starting points for further optimization 4 1 Using C 842 Motor Controllers with M 06x Stages The C 842 is an add on card which is installed in an ISA slot of a PC 2 axis and 4 axis versions are available and multiple cards can be installed in the same PC DLL COM Server and LabView software interfaces are provided as well a graphical user interface WinMove in versions for Windows9x and NT WinMove allows configuration of the M 06x stages by a configuration file and automatically handles amplifier mode setting as a function of the stage model number selected The amplifier mode can also be set by command PWM mode is enabled by the SOP command while analog mode is enabled by the SOH command Use PWM mode with the ActiveDrive stages PD models All axes connected to a given card must be in the same mode Mixing PWM and non PWM stages on the same card is possible using a PWM converter box order number C 842 AP1 with ana
17. available in the P MikroMove online help system In addition the response to the HLP command consists of a listing of all commands and their arguments The Command entry screen gives you complete control over anything that is sent to the controller and shows all the controller s responses PIMikroMove SM 148E Release 1 0 0 Page 27 Main Window WWwW pi wSs Piezo Nano Positioning PI For this reason all other controls are disabled as long as the Command entry window is open See Why is everything disabled when Command entry is active p 47 The left pane shows the history of all commands sent When the cursor is placed in the Send text field the contents of that field will be replaced by commands in the history list if you press the or W arrow keys pressing any other key returns you to the Send text where you can edit the command before sending Four frequently used commands or command sequences are accessable with the 5 Fel F7 and F8 keys or buttons To edit a sequence hold down the control key while pressing the key or clicking the button The contents of the clipboard can be sent as is with Send clipboard To change the font and color of sent and received messages use the Configure style button It also allows you to switch off the display of the strings sent so only received messages are shown It is also possible to send single bytes directly through to the controller controller network
18. been replaced by PiMikroMove and is no longer supported More information on all included programs is provided in the table on p 27 PiMikroMove is now the general operating program It covers the range from basic motion to macros joystick operation simple user profiles and stage tuning Pl provides customized LabView Virtual Instruments drivers but the LabView GUI itself must be obtained from National Instruments Because the PI Vis use the DLLs only PC LabView can be used C 843 MS77E Release 2 5 0 Page 26 PI Software Overview Piezo Nano Positioning 4 2 Tools to Use Software Purpose Recommended for Tool PIMikroMove PiMikroMove permits you to start your motion system controller and stage s immediately without the need to write Users who want to test the equipment operating customized software Its command input facility represents an easy way to experiment with various commands Simple without programming an application software automation is also possible with its macro facility LabVIEW LabVIEW is a software environment available from National Instruments for data acquisition and process control Users who want to use LabVIEW for drivers The LabVIEW software consists of a collection of virtual instrument VI drivers PI provides a set of LabView VIs programming their application interfacing to the C 843 using the PI General Command Set GCS DLL For programming customized applications we recommend use
19. encoders one signal per revolution PI software does not use this configuration 5 1 6 All axis Connector WWwW pi ws This connector 16 pin IDC on the card see Fig 3 on p 18 makes other digital I O lines for all axes available Axis In AIN pins and Axis Out AOUT pins They offer direct access to the motion processor and can be programmed for solving multiple axis triggering tasks See the Motion Processor User s Guide p 46 ff for details ett C 843 MS77E Release 2 5 0 Page 30 Piezo Nano Positioning PI MP 47E User Manual M O0O60 Series Rotation Stages Release 1 3 3 Date 2004 06 22 This document describes the following product s E M 060 M0O M 060 PD M 060 DG M 060 2S Rotation Stages dia 60 mm E M 061 M0 M 061 PD M 061 DG M 061 2S Rotation Stages dia 100 mm E M 062 M0 M 062 PD M 062 DG M 062 2S Rotation Stages dia 120 mm Physik Instrumente PI GmbH amp Co KG Auf der Romerstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299 Moving the NanoWorld www pi ws info pi ws www pi ws M 060 M 061 amp M 062 Rotation Stages User Manual MP 47E Table of Contents Manufacturer Declarations cccscceseseeeeeeeeeeeeeeeeeees 2 0 1 Declaration Of COntOnmnnty eresi ince case weedsuedaatddeadl a cesesetonteliecccans 2 0 2 safety PRCCAUTONS sere 2 NTrOdUCHON ic cance 3 1 1 M 060 Series Features uiiiciiei il he
20. ieee 3 1 2 Model SUNN CY acct treet ectet ea atte coaat le ath olen erate eee eee 3 QUICK Starf ospr a AEE EE 4 2 1 Mounting GUIG SITS S assiso a EANA 4 2 2 Operating Motorized Versions cccccecccseeeceeeeeeeceeseeeeeeaeeesaues 4 Operational Considerations cccccseeeeeeeeeeeeeeeeeeeenes 5 Oe ls Recommended Motor Controllers ccccccccseceeeeeceeeeseeeeeeeeaes 5 3 2 PWM AMDIIETS seringi ceeds accede eee tes een edesecace 5 3 9 EMMI SO WILCING Sotes Arete aatetehl lca Cetabohatoitendhesusreced 5 3 4 Position Reference Signal Sensors cccccccseceeeeeeeeeeeeeeeeeeeaes 5 DC Motor Controller Setup cceccseeeeeeeeeeeeeeeeeeeneees 6 4 1 Using C 842 Motor Controllers with M 06x Stages 005 6 4 2 Using C 843 Motor Controllers with M 06x Stages 08 6 4 3 Using C 844 Motor Controllers with M 06x Stages 06 T 4 4 Using C 848 Motor Controllers with M 06x Stages 8 f 4 5 Using Mercury Motor Controllers with M 06x stages 8 Stepper Motor Controller Setup c cscceeeseeseeeeeeees 8 TEECHAICAL Dala scu aaa AAAA 9 6 1 DIMENSIONS oasa sass A E AEE EAE 10 6 1 1 VEOG X MO ise aneren T T nee heen nae ere ee nee 10 6 1 2 MOX P Desenin a a E 11 6 1 3 M 00X D Goesman a aa 12 6 1 4 VEOOX Gocco Sienna tone ncn a a 13 6 2 Connectors and Pin ASSIQNMENIS cccccceeeceeeeeeeeeeseee
21. installed by the C 843 Setup exe That driver can read and write the PCI function registers in response to software that wishes to communicate with the device At intermediate levels communications with a C 843 are C 843 MS77E Release 2 5 0 Page 24 Software Overview Piezo Nano Positioning PI handled by DLL functions which refer to the card as a standard Windows PCI device These functions are described in the corresponding DLL manuals The DLLs depend upon proper installation of the hardware driver and or other DLLs At the application level LabView P MikroMove etc commands are usually input via the mouse and keyboard In the Command Entry window of PIMikroMove for example GCS commands can be entered as ASCII strings The applications including the pseudo terminal program PITerminal do not communicate with the card or its motion processor directly but use the DLLs 4 1 3 Command Sets WWwW pi ws At the lowest level is the QMC command set of the DSP chipset the MC2140 or MC2120 motion control processor The chipset programmers reference and user manuals are included on the C 843 CD Note that the terminology and axis numbering often differs from that used elsewhere Because of their complexity successful use of these commands requires extensive experience At the next level is the MC DLL based on the QFL command set QFL commands are very close to the QMC commands of the motion control chip The MC DLL i
22. locations see Fig 1 3 Optional to make the digital I O lines of the C 843 available see section 3 4 3 on p 20 you must connect the ribbon cable of the included sub D 25 bracket adapter to the 26 pin Digital I O header on the C 843 board for component locations see Fig 1 C 843 MS77E Release 2 5 0 Page 10 Quick Start Piezo Nano Positioning PI 4 Remove the slot covers from the positions in the PC which you plan to use 5 For multiple card installations make sure the card numbers are properly configured in EEPROM see p 20 before continuing 6 Install the C 843 card in a free PCI slot install any adapter brackets you connected in steps 2 and 3 in suitable neighboring positions 7 Screw down the card and any adapter brackets Otherwise the card may creep out of its connector or the adapters will slip and may cause a short circuit 8 Connect the C 843 to the PC internal power supply see Fig 2 lf there is no free cable of sufficient length from the power supply use the Y cable which comes with the card as a Splitter or as an extension 9 Close the PC case Axis 3 amp 4 Digital lO header connector connectors and ribbon cable Axis 3 amp 4 p connectors N Digital IO and ribbon DE ANA header cables BS N UD N p Motor Cable from PC power supply or Y connector Fig 1 C 843 and connectors www pi ws C 843 MS77E Release 2 5 0 Page 11 Piezo Nano Positioning PI Quick
23. more control over what is sent to and received from the controller My stage has limit switches so why do I have to worry about crashing it To avoid sacrificing valuable travel range limit switches are sometimes installed very close to the hard stop If run into the limit switch at maximum speed especially with a load on the platform the momentum can cause the stage to crash into the hard stop even if the motor shuts down immediately How do I connect another controller to PIMikroMove To connect another controller or controller network to PiMikroMove you do not need to close any existing connections You can connect as many controllers as you have connected to your PC Simply call the Start up controller dialog with the Connections gt New menu sequence or the New connection button on the toolbar How can deactivate a connected stage To deactivate an axis choose Select connected stages from the corresponding controller menu p 8 In the window that opens select the axes to be deactivated or disconnected and press the NOSTAGE button The axis will disappear from the axes table and if open the corresponding axis window will be closed The effect of deactivating an axis in motion or an axis executing a controller macro may vary How do I add a controller to a controller network Certain types of controllers can be networked together and all controlled off one interface on the host PC e g C 862 C 170 C 662 Pi
24. motor brake is available for the DC Motor Direct Drive versions M 511 DDB to secure the stage position when power is off This brake option is recommended for vertical stage orientation with loads over 1 kg 10 N Fig 1 M 511 DD WWW DpI WwSs M 5x1 Series MP 33E Release 4 1 2 Page 3 Piezo Nano Positioning PI General Design of M 5x1 Series Linear Stages 1 1 Safety Precautions To avoid damage or injury do not put anything in the gap between the moving platform and the motor cabin Never put your finger anywhere where the moving platform or any connected object could possibly trap it CAUTION M 5x1 stages are powered by powerful electric motors and can accelerate to high speeds Be aware that automatic limit switch halt may not be supported by or activated at the motor control electronics Be aware that failure of the motor controller may drive the stage into a hard stop at high speeds When the stage is first connected to the motor controller be aware that the stage could start an undesired move 1 2 Shipment Contents M 5x1 series stages are delivered with m 4 metric screws M6x30 w hex wrench purpose mounting the stage onto a flat plane and mounting objects onto the moving platform m 4 metric screws M4x30 w hex wrench purpose mounting two stages as an XY combination m Connecting cable type C 815 38 m This MP 33E User Manual WWW DpI WwSs M 5x1 Series MP 33E Release 4 1 2 Page 4
25. set the motor into the MOTOR OFF state before pushing the platform back into the current allowed area Limit Switch Sensor Specifications Type magnetic Hall effect sensors Power supply 5 V GND supplied by the motor controller through the motor connector Voltage output TTL level Sink Source capab 48 mA Logic active high normal motor operation low Limit switch reached high Wwww pi ws M 5x1 Series MP 33E Release 4 1 2 Page 11 Position Sensors Piezo Nano Positioning PI DIRECTION negative positive negative side positive side manual spindle access cw positive direction ccw negative direction negative limit positive limit Reference i O o C Q o C a T o O a Reference signal 5V j OV Fig 2 Location of magnetic limit switch and reference position sensors Distances to selected points in mm NOTE All values given may differ by a few percent from stage to stage nominal operating range RN N1 7 mm 10 000 counts 4 2 Position Reference Signal Sensors WWW DpI WwSs Position Reference Sensors are located approximately in the middle of the operating range and can be used to reference the absolute position of the stage within 0 5 um accuracy Always approach the reference sensor from the same side to reach the M 5x1 Series MP 33E Release 4 1 2 Page 12 Piezo Nano Positioning PI Position Sensors same position The diffe
26. 00 1 180 000 1000 1 000 000 1 100 000 350 000 1000 450 000 Letters are ASCII commands see the C 862 Mercury Controller User Manual MS67E for more details 5 Stepper Motor Controller Setup Controller setup and multi axis networking for the stepper motor versions is fully described in the controller documentation Release 1 3 3 WWW DI ws Page 8 6 Technical Data Models Rotation range Design resolution Min incremental motion Unidirectional repeatability Backlash Max velocity Maximum axial force Max output torque 0z CW amp CCW M 060 M0 continuous 500 Max torque on platform 024 CW amp CCW Maximum off axis torque 6 Ox Oy Encoder resolution Motor resolution Gear ratio Worm gear ratio Nominal motor power Motor voltage range Weight Body material Recommended motor controller 2 phase stepper 24 V chopper voltage max 0 8 A phase 20 000 microsteps with C 600 or C 630 controller Exceeding this value will cause permanent damage be careful when tightening loosening attachment screws 50 1 0 42 Al M 060 PD continuous 32 0 0018 32 50 200 90 500 1 3 50 1 30 O to 24 0 94 Al M 060 DG M 060 2S continuous continuous 2 1 0 00012 6 3 50 200 16 500 1 5 2000 28 12 1 29 6 1 50 1 3 0 to 12 0 94 Al C 842 C 843 C 844 C 848 C 862 6 3 0 00036 19 50 200 36 500 2
27. 00 mm 1 um 100 kg 80 80 N 200 N 2 mm Aluminum Linear Scales and DC 3557 S024 30 W 24 VDC LMD 18201 24 5 kHz optical linear scale integrated in stage 0 020 um A A B B RS 422 Active low normal high 12 V output external line power power supply order M 500 PS 149 mA supplied by external P S WWW pi WwsS M 5x1 Series MP 33E Release 4 1 2 Page 6 General Design of M 5x1 Series Linear Stages Piezo Nano Positioning PI 1 5 2 Type PD Stages with Rotary Encoders and Direct Drives Wwww pi ws Motor Type Motor Power Motor Voltage PWM amplifier Encoder type Encoder resolution Linear resolution Signals Transmission Brake Signal Power supply Power consumption M 5x1 Series MP 33E Release 4 1 2 DC 355 7K024CS 30 W 24 VDC LMD 18201 24 5 kHz rotary encoder HEDM5500B 4000 counts motor revolution 0 5 um count A A B B RS 422 Active low normal high 12 V output external line power power supply order M 500 PS Motor power plus 130 mA supplied by external P S Page 7 General Design of M 5x1 Series Linear Stages Piezo Nano Positioning PI 1 5 3 Type DG Stages with Gearhead Drives Motor Type Motor Power Motor Voltage Encoder Type Encoder resolution Signals Encoder transmission Gearhead type Gearhead ratio Translation Ratio to be used with QMove Power supply Internal current draw
28. 29 for details PIMikroMove SM 148E Release 1 0 0 Page 11 Main Window Piezo Nano Positioning PI Show Command Entry Designed to give complete control of what is sent to the controller for non GCS controllers to the controller GCS DLL Here commands can be entered and responses seen Because the software cannot allow itself periodic status or position checks in the background other windows are not updated while the Command entry window is open See Section 2 5 p 27 for details Show Single Axis Window Opens a window in which data about a single axis is displayed and can be modified The controller is interrogated at regular intervals unless Command entry is open to update the display See Section 2 7 p 31 for details Show Digital I O Window Shows a window in which the state of the digital input lines can be monitored and that of the digital output lines changed The controller is interrogated at regular intervals unless Command entry is open to update the display Show Analog Input Window Shows a window in which the state of the analog input lines can be monitored The controller is interrogated at regular intervals unless Command entry is open to update the display Preferences Control the behavior of the software user interface Some settings can not be undone the way they were made such as turning off future appearances of confirmation dialogs These settings can always be changed in the Prefere
29. 5 36 We recommend that you make your first trials with the C 843 using the PiMikroMove software package This is the quickest way to verify that your system is connected and operating properly You can even run simple automation tasks with the PiMikroMove macro facility All information about PiMikroMove is found in a separate manual which is included both in printed form and on the C 843 CD WWwW pi ws C 843 MS77E Release 2 5 0 Page 8 Quick Start Piezo Nano Positioning PI e Quick Start With a motion system that meets the requirements listed above carry out the following steps to put it into operation 1 Install the drivers and software on host PC see p 9 2 Install the card with the PC powered completely down see p 10 3 Begin operation see p 12 If C 843 or C 843PM host software is already installed it must be uninstalled before the new version can be installed To uninstall follow the instructions on p 14 1 Install the Software on Host PG For a short description of the available host software see Section 4 2 on p 27 1 Be sure to log in with administrator privileges and insert the C 843 CD in the host PC 2 Ifthe Setup Wizard does not start automatically start it 3 Follow the on screen instructions You can choose between typical and custom installation Typical components are hardware driver LabView drivers DLLs and PiMikroMove Typical is recommended 4 Shut down t
30. EYPB2 ixt This macro will exit if digital input B keyPB 2 is not active otherwise a relative move of 1 mm Is made for axis A The short delay prevents this macro being called to rapidly when the button is pressed MEX DIO B 0 MVR A 1 DEL 100 Macro KEYPB3 txt This macro will exit if digital input C keyPB 3 is not active otherwise the velocity is set to 0 5 The short delay prevents this macro being called too rapidly when the button is pressed MEX DIO C 0 VEL AO 5 DEL 100 WWwW pi wSs PIMikroMove SM 148E Release 1 0 0 Page 26 Main Window Piezo Nano Positioning PI Macro KEYPB4 txt This macro will exit if digital input D keyPB 4 is not active otherwise the velocity is set to 1 5 The short delay prevents this macro being called too rapidly when the button is pressed MEX DIO D 0 VEL A1 5 DEL 100 2 5 Command Entry Window WWwW pi wSs Command entry 4 x Select controller E on C 843 Board 1 History Clear History i aE Fay Wee en ae Clear Print Configure Style ic Lc AA Pd DS Conia Se Fig 19 Command entry window Here you can address GCS commands directly to a controller or controller network without any background processing done by PlMikroMove for non GCS controllers commands are translated in a software DLL layer outside of P MikroMove For detailed descripitions of the commands see the GCS Commands Software Manual These descriptions are also
31. G2224R012S 3 W 12 V IE2 512 rotary type 2048 counts motor revolution A A B B RS 422 backlash free 29 641975309 1 30 3533827 counts um via motor controllers 92 mA 1 5 4 Type xS Stages with Stepper Motor See M 5x1 Stages with Stepper Motors Section on page 20 1 6 Recommended Motor Controllers M 5x1 series stages with DC motor drives can be used with C 842 C 843 C 844 C 848 C 862 Mercury The M 5x1 2S 2 phase stepper motor versions can be used with C 600 or C 630 stepper motor controllers WWW pi WwsS M 5x1 Series MP 33E Release 4 1 2 Page 8 Linear Scale Position Encoder Piezo Nano Positioning E I e Linear Scale Position Encoder Wwww pi ws An optical linear encoder is mounted in the M 5x1 series stages It features 0 1 um linear resolution and can be used at velocities up to 50 mm s The optical encoder is mounted in the center of the stage close to the ballscrew drive to prevent possible cosine error The linear encoder measures the actual position of the moving carriage directly thus eliminating drivetrain errors such as non linearity backlash or elastic deformations The encoder is based on an optical grating and a noncontacting read head with integrated signal conditioner and interpolator M 5x1 Series MP 33E Release 4 1 2 Page 9 PWM Amplifiers Piezo Nano Positioning PI 3 PWM Amplifiers Stages with a direct DC motor drive M 5x1 DD and M 5x1 PD have the revo
32. Increase K until any disturbance causes a sustained oscillation WWwW pi wSs PIMikroMove SM 148E Release 1 0 0 Page 52 Appendix WWwW pi wSs Piezo Nano Positioning PI Graph As z Curso 1 32 0000 v 2204113 Cursor 2 x 9430000 Y 2204100 gong 13 2481 71 1075 4 oi 66 8262 a4 6858 102 545 Time in milliseconds Fig 37 Sustained oscillation Hint Place first cursor on first rising edge and second cursor on fifth rising edge of the oscillation curve Adjust second cursor such the horizontal cursor lines cover each other This ensures phase equality The smallest controller gain that causes such an oscillation is called the ultimate gain K The appropriate tuning parameters can be computed as follows K K 0 75 K C K 0 1 K P i 0 625 P P PIMikroMove SM 148E Release 1 0 0 Page 53 Piezo Nano Positioning PI MS77E User Manual C 3 ZI 3 Motor Controller Card Release 2 5 0 Date 2006 03 21 This document describes the following product s E C 843 21 Motor Controller Card PCI 2 motor axes E C 843 41 Motor Controller Card PCI 4 motor axes SS ae ETTER ae amp I m jassi Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299 Moving the NanoWorld www pi ws info pi ws www pi ws Declaration of Conformity according to ISO IEC Guid
33. It reads out motion processor status registers velocity acceleration position and position error motor mode and operation of the card while it is being motion errors for all axes on all C 843 cards which are installed in the PC controlled with other software PIStageEditor Using this GUI tool you can easily add remove and edit stages parameter sets in the customized stage parameter Users who want to configure their www pi ws files DAT files used by the GCS DLL C 843 MS77E Release 2 5 0 own stages Page 27 Technical Data 5 Technical WWwW pi ws Model Function Axes Servo characteristics Profile Modes Output power Resolution Current limitation Encoder input Stall detection Limit switches Reference switches Digital I O Motor connectors Interface Communication Command set Dimensions Weight C 843 MS77E Release 2 5 0 PI Piezo Nano Positioning Data C 843 21 C 843 41 PC plug in Servo Motor Controller Board 32 bit plug and play PCl bus supported by main boards with 3 3 V and 5 V PCI bus connectors universal card 2 4 Programmable PID V ff filter supports on the fly parameter changes Trapezoidal S curve user defined 5 watts channel analog mode 12 bit D A converters PWM 10 bit 24 5 kHz 1 A per channel short circuit proof AB quadrature differential TTL signal max 5 x 10 counts s Servo off triggered by programmable position error 4 8 TTL pr
34. K 2 20 23 G H WWW DI ws Page 10 PI M 060 M 061 amp M 062 Rotation Stages User Manual MP 47E 6 1 2 M 06x PD 39 80 8 i 57 5 19 25 15 3 67 6 M 060 PD M 061 PD M 062 PD be oe o f wo 50 a ee a E m 20 E Release 1 3 3 Www pi ws Page 11 PI M 060 M 061 amp M 062 Rotation Stages User Manual MP 47E 6 1 3 M 06x DG Trl occ ccace NA w DA ETRE AZ a f o T o o o es 2 a R 35 al o Release 1 3 3 WWwW pi ws Page 12 PI M 060 M 061 amp M 062 Rotation Stages User Manual MP 47E 6 1 4 M 06x 2S 57 5 Dimensions M 060 2S M 061 2S M 062 2S A C F G H J K Release 1 3 3 WWW DI ws Page 13 PI M 060 M 061 amp M 062 Rotation Stages 6 2 Connectors and Pin Assignments User Manual MP 47E Motor driven M 06x series stages are equipped with sub D15 m sockets for connecting the motor controller The PD versions have a separate motor power connector 6 2 1 M 06x DG Connector from controller Type 15 pin sub D m Reference No AMP 9 215594 1 P
35. MikroMove typically treats such controller networks as a single multi axis controller See the controllers User Manuals for instructions on configuring such a network PIMikroMove SM 148E Release 1 0 0 Page 48 Tutorials Frequently Asked Questions WWwW pi wSs Piezo Nano Positioning PI How to use a stage that is not known to PIMikroMove All PI stages with their parameters are stored in the PIStages database If your PI stage is not in the list please contact PI to get an update lf you want to connect a stage that is not from PI select DEFAULT STAGE or DEFAULT _STAGE P from the list This choice corresponds to a stage with the following characteristics m Nolimit switches m No reference switch m Axis unit of 1 encoder count Motor output is set to analog mode DEFAULT STAGE or PWM mode DEFAULT _STAGE P Note that you can start the axis only by entering the absolute position or by choosing to allow relative moves only usually in the Start up axes dialog The units for all moves positions and accelerations will have encoder counts If you have changed all settings and can work with your stage you can save the settings as a new stage type to the user section of the stages database To add a new stage to the user section of the stages database see Add Edit User Stage Type or use the PlStageEditor called by the Edit User Stages Data menu entry see also User Stages in the P StageEditor software m
36. Piezo Nano Positioning PI SM 148E Software Manual PIMikroMove Release 1 0 0 Date 2005 11 28 PI This document describes software for use Piezo Nano Positioning PI MikraMove TY with most PI motion controllers Moving the NanoWorid www piws Physik Instrumente Pl GmbH amp Co KG a bam a J asar imite a a s jani be e a ae l aa rear PI E a s zi Aalst slat rien aa PI MiknoMove vv en Physik Instrumente PI GmbH amp Co KG Auf der Romerstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299 Moving the NanoWorld www pi ws info pi ws www pi ws Physik Instrumente PI GmbH amp Co KG is the owner of the following company names and trademarks PlLine PI PIMikroMove The following designations are protected company names or registered trademarks of third parties Microsoft Windows LabView Copyright 1999 2006 by Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual enjoy copyright protection With regard thereto Physik Instrumente PI GmbH amp Co KG reserves all rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source First printing 2005 11 28 Document Number SM 148E Release 1 0 0 PIMikroMoveUserManual doc This manual has been provided for information on
37. Positioning PI Pin Assignments o Pin Assignments M 5x1 series stages are equipped with male DB15 sockets for connecting the motor controller and one 3 pin round connector for the power supply 8 1 M 5x1 DD M 5x1 PD J2 SIGNALS J1 POWER 9199000000 o ooo CO OF Connector J1 Power Supply Type 3 pin round socket Reference No Switchcraft Tini Q G Signal GND Voltage input n C WWW DpI WwSs M 5x1 Series MP 33E Release 4 1 2 Page 24 Pin Assignments Piezo Nano Positioning PI Connector J2 Signals Controller connection Type 15 pin Sub D connector Reference No AMP 9 215594 1 1 Control input for optional motor brake TTL 9 5 PLIMIT Limit signal of positive side REFS origin signal GND Limit 8 2 M 5x1 DG WWW pi WwsS J2 SIGNALS J1 POWER Connector J1 Power Supply Not installed Connector J2 Signals Controller connection Type 15 pin Sub D connector Reference No AMP 9 215594 1 M 5x1 Series MP 33E Release 4 1 2 Page 25 Piezo Nano Positioning PI Pin Assignments 1 Control input for motor brake TTL at V max er Power GND not used 11 not used 5 V input 7 A 15 B CO U 7 WWW pi ws M 5x1 Series MP 33E Release 4 1 2 Page 26
38. Using C 843 Motor Controllers with M 5x1 Stages The C 843 is an add on card to be installed in a PCI slot of a PC 2 and 4 axis versions are available and more than one card can be installed in the same PC PWM and analog stages can be run off the same card without using a converter box See the C 843 user and software manuals for information on this controller and its software interfaces Suitable control settings are provided in the controller software 5 2 2 Using C 848 Motor Controllers with M 5x1 Stages The C 848 is a benchtop rackmount unit It is actually an industrial PC with C 842 cards installed See the C 842 section below and the C 848 manuals for more information Settings suitable for the M 5x1 are included in the stage database integrated with the C 848Control software 5 2 3 Using C 842 Motor Controllers with M 5x1 Stages If stages are equipped with the motor brake option M 5x1 DDB or M 5x1 PDB C 842 xx controllers should be used These controllers offer the appropriate signals for motor brakes controllable via the digital output channels 7 and 8 WinMove and WinMoveNT are the standard operating programs for C 842 Motor Controllers being operated from Windows platforms WinMove allows configuration of the M 5x1 stages by a configuration file WinMove software automatically handles amplifier mode setting as a function of the stage model number selected The amplifier mode can also be set by command PWM mod
39. W pi WwsS M 5x1 Series MP 33E Release 4 1 2 Page 18 M 51 1 M 521 M 531 Dimensions Piezo Nano Positioning 6 M 511 M 521 M 531 Dimensions Wwww pi ws decimal places separated by commas in drawings camel pak oO Er a cc oO uo oo i Ww _ lI Ssa DI Ww Fl tandard hole pattern Fig 3 M 511 M 521 M 531 Dimensions L A B M 511 xx 400 250 186 5 M 521 xx 500 350 236 5 M 531 xx 600 450 286 5 M 5x1 Series MP 33E Release 4 1 2 PI 283 383 483 Page 19 Piezo Nano Positioning PI M 5x1 Stages with Stepper Motors 7 M 5x1 Stages with Stepper Motors 7 1 M 5x1 2S Cusing 2 phase stepper motors M 511 2S M 521 2S M 531 2S are equipped with 2 phase stepper motors performing 20 000 steps per revolution in microstepping mode using a C 600 or C 630 Stepper Motor Controller Motor Manufacturer Nanotec Type 4H4009 L03 B Current per phase 0 8 A Phase resistance 3 3 Ohm Torque 21 Necm Connector at stage DB25 m Cable type C 815 37 EPN at M 5x1 25 Limit Sensor Layout g of Sv limit signal positive limit signal negative 70 SMD Fig 4 M 5x1 2S Limit Sensor Layout decimal places separated by commas in drawing Wwww pi ws M 5x1 Series MP 33E Release 4 1 2 Page 20 Piezo Nano Positioning PI M 5x1 Stages with Stepper Motors 1 Phase 1a 14 Phase 1b 2 Phase 2a 15 Phase 2b 6 5 V Supply from Controller Positive End Limit Signal Refe
40. alled 10 times GOH AB WAC ONT A 1 WAC ONT B 1 MAC NSTART SCANROW 10 Macro scanrow ixt This macro will move axis A 1 mm and wait for it to stop Then the macro scanstep ixt is called 10 times At the end axis B is moved back to its home position MVR Al WAC ONT A 1 MAC NSTART SCANSTEP 10 GOH B WAC ONT B 1 Macro scanstep txt This macro will move axis B 1 mm wait for it to stop and set the digital output A to 1 for 100 milliseconds MVR B1 WAC ONT B 1 DIO Al DEL 100 DIO AO WWwW pi wSs PIMikroMove SM 148E Release 1 0 0 Page 25 Main Window Piezo Nano Positioning PI 2 4 6 Example Pushbutton Control If you have connected four push buttons to 4 digital inputs you can implement pushbutton control of five different macros using the MEX command The following example illustrates a small program you can move axis A 1 mm forward or backward with button 1 and 2 and you can switch between two velocities with buttons 3 and 4 Macro KEYPBLOOP txt This macro will call the macros for the individual buttons and then call itself MAC START KEYPB1 MAC START KEYPB2 MAC START KEYPB3 MAC START KEYPB4 MAC START KEYPBLOOP Macro KEYPB1 ixt This macro will exit if digital input A keyPB 1 is not active otherwise a relative move of 1 mm is made for axis A The short delay prevents this macro being called too rapidly when the button is pressed MEX DIO A 0 MVR Al DEL 100 Macro K
41. anges polarity If a stage has no limit switch or reference signal or the stage cannot move to any of these positions without damaging the system you can either enter the current absolute position directly or if the current application does not need it you can operate using relative moves only i e without absolute positions To reference an axis by moving to a known point to enter the current absolute position or to start the axis in relative move mode use the Start up axes dialog Why is everything disabled when Command entry is active When the Command entry tab card is on top all other controls containing data regarding the selected controller are disabled Single axis windows Position pad This is done to avoid confusion between the commands entered in the terminal and background processing done by PIMikroMove PiMikroMove must continuously check the state of the axes and the controller WWwW pi wSs PIMikroMove SM 148E Release 1 0 0 Page 47 Tutorials Frequently Asked Questions WWwW pi wSs Piezo Nano Positioning PI For example if you want to find out how a specific command works and your entered command contains a typo or invalid data then the controller does nothing To find out what went wrong you can check the error state with ERR If background activity had been taking place however the error state would have been cleared in the meantime The Command entry pane is designed to give you
42. anual How can I modify settings of a stage type in the PI stages database If you want to modify the parameters of an existing stage type and use the modified settings with other PI software outside PiMikroMove you can add a new stage type to the user section of the stages database Thereafter you can select the newly defined stage in other PI software as well Simply call Add Edit User Stage Type for the corresponding axis cannot find parameter xyz in the GUI If you want to view or modify a certain parameter of the axes or you are missing a function it maybe only hidden from display If you want to change the set of displayed parameters and functions see Select Columns to be Displayed PIMikroMove SM 148E Release 1 0 0 Page 49 Piezo Nano Positioning PI Appendix 6 Appendix 6 1 Servo Algorithm and PID Tuning The PID closed loop control technique compares the actual position measured by the position sensor with the desired target and adjusts the output to the drive accordingly On PI motor controllers this technique is implemented by the following algorithm i mdVe K out Output K E K E Ep n DE x sot Ky Saa Ky CmdAccel x 8 x PEPE Bias J where e K is again factor which is multiplied by the error signal the difference between actual and desired position for proportional control It acts as an adjustable amplifier and is responsible for process stability If K is inc
43. are on the C 843 CD it can control any combination of DC Motors and PI Voice Coil Stages The board is available in a 2 axis and a 4 axis version m C 843 21 Motor Controller for 2 axes m C 843 41 Motor Controller for 4 axes C 843 features at a glance m PCl bus compatible PC board m Analog amplifiers for 5 W motors m Selectable PWM output 10 bit resolution 24 5 kHz m Full P Il D motion control m Multiple trajectory profile generation m Profile modes trapezoidal S curve user specified m Incremental encoder input differential Limit switch control Motor brake support for each axis m High level command language 8 TTL inputand 8 TTL output channels m Software DLL for C C Visual Basic m 64 kword on board RAM for high precision user specified trajectory profile control Control of PlLine Piezomotors requires special software as provided and described on the separate C 843PM CD www pi ws C 843 MS77E Release 2 5 0 Page 3 Introduction Piezo Nano Positioning PI 1 1 Purpose of the 0 843 The C 843 with the included hardware and software drivers is designed to drive DC motors and PI Voice Coil Drives in any combination up to a total power consumption of about 20 watts Five watt motors can be driven directly from the integrated amplifiers More powerful motors need external amplifiers All C 843s can also control compatible PILine piezomotors but special software is required that software i
44. are optionally available with two magnetic limit sensors Hall effect sensors with TTL drivers On stepper motor versions limit switch outputs are active low on other versions active high The distance between the limit switches must be specified with the order and must be between 0 and 268 implementation is to 2 3 4 Position Reference Signal Sensors The position reference sensor can be used to reference the absolute position of the stage with an accuracy of 20 urad for the M 060 and 10 urad for the M 061 M 062 Always approach the reference sensor from the same side to reach the same position The difference in the reference points when approached from the positive side and from the negative side is about 7 5 to 15 mrad with the M 060 and 4 to 8 mrad with the M 061 M 062 Note Location of Position Reference Sensor The position reference sensor is mounted on the adjustable scale ring on the outer edge of the turntable which is graduated in 2 degree increments Adjusting the scale ring therefore affects referencing the absolute position of the stage The reference sensor provides a static signal level which depends on the platform position If the platform position is less than 180 clockwise from zero the reference signal is 5 V while if the platform is less than 180 counter clockwise from zero the signal level is O V 1 If the stage is equipped with optional limit switches the position reference sensor is located
45. aun E ees 45 Tutorials Frequently Asked Questions 47 Why do I need to reference an axis cccceeeeeeeeeeeeeeeeeeeeeeeeeeeeeeaes 47 Why is everything disabled when Command entry is active 47 My stage has limit switches so why do I have to worry about Cra NINOI Aeara a satemestbesseawtotcexsaceenceadeten 48 How do I connect another controller to PIMikroMove c sceeeeeee 48 How can deactivate a Connected Stage ccccccsseeeeeeeeeeeeseeeeeens 48 How do add a controller to a controller network cccccccsseeeeees 48 How to use a stage that is not known to PIMikroMove eeeeeeeees 49 How can modify settings of a stage type in the PI stages database nienean an eee teciccn sa seoenibe oe cutis since aioe e aN 49 cannot find parameter xyz in the GUL cccceeeceeseeeeeeeeeeeeeeeeeeeees 49 Appendix 50 6 1 Servo Algorithm and PID TUNING ccceeeeeeeeeeeeeeeeeeeeeeesnees 50 Introduction 1 1 1 WWwW pi ws Piezo Nano Positioning PI Introduction Piezo Nano Positioning PI PI MikraMove Y f Physik Instrumente PI GmbH amp Co KG Moving the NanoWorld www piws I Fig 1 PIMikroMove PiMikroMove is a general purpose graphical user interface for PI motion controllers Getting Started When PiMikroMove starts the Start up Controller dialog is displayed at the first step Connect Controller Here is where
46. controllers designation of positive and negative directionality may depend on mathematical conventions software firmware parameters scale factor sign gearbox handedness and may be different from that inferable from the scale printed on the stage s turntable Release 1 3 3 WWW DI ws Page 4 PI M 060 M 061 amp M 062 Rotation Stages User Manual MP 47E 3 Operational Considerations 3 1 Recommended Motor Controllers M 06x PD and DG stages can be used with C 842 C 843 C 844 C 848 and Mercury C 860 C 862 controllers the M 06x S2 with the C 600 and C 630 stepper motor controllers 3 2 PWM Amplifiers The M 06x PD stages with the ActiveDrive direct DC motor drive have the revolving platform connected directly to the 1 7 watt DC motor by a flexible coupling For maximum dynamic performance the DC servo motors are driven by high efficiency PWM power amplifiers integrated into the stages An external line power power supply order number M 500 PS is provided to supply the built in amplifiers directly This architecture allows high torque and high velocities while loading the motor controller with control signals only The actual power is provided by the external supply The PWM stages can be driven from a controller in PWM mode Note If C 842 C 844 or C 848 are in PWM mode a converter box C 842 AP1 is required for every axis on the controller that is to be driven in analog mode 3 3 Limit Switches M 06x stages
47. data sets a cubic spline interpolation is possible Axis Assignment When the Profile generator item on the controller menu is selected the Profile axes dialog box appears Profile Axes x Select two different axes for User Profile Mode SIS 1 M 235 5D0 ARIE 3 M 511 PD Fig 24 Axis assignment for User Profile Mode In it you specify two axes to be used in User Profile Mode and how to display the resulting profiles in the X Y plane on the next screen Only referenced axes with servo on will be available in the lists for the Profile generator PIMikroMove SM 148E Release 1 0 0 Page 33 Piezo Nano Positioning PI Additional Windows 3 2 8 Profile Definitions for 2 Axes User profile definition l X Circle Parameters OOOO 50 000000 i Steps 360 12 107 GC0GGG Stark angle 180 Travel angle 150 Wiap around A Radius a liie L Lissajous fT Ler Lissajous 7 fT Stretch 3 1 23 Stretch r 0 9 Speed Factor 9 x241 217 Accel Factor 05 24 2 121 Decel Factor 05 242 12 FAHRER Cancel 0 0 ok Fig 25 User profile definition window for circular type motion In the User profile definition window sinewave motion profiles for two axes are defined When run synchronously and visualized on an X Y plane the resulting motion forms a circle ellipse or Lissajoux figure depending on the user specified parameters The graph at t
48. drive stages with higher power consumption in PWM mode See section 3 2 on p 17 Each analog power amplifier can be enabled or disabled independently from the others See Analog Amplifier and Brake Control p 29 for the hardware details WWwW pi ws C 843 MS77E Release 2 5 0 Page 16 System Description Piezo Nano Positioning PI 3 2 Motor Output Modes www pi ws The motor output mode and thus the amplifier mode can be set by command for each axis separately Possible modes are 16 bit DAC analog mode and Sign Magnitude PWM see the Motion Processor Users Guide p 53 ff for more information The 50 50 PWM mode of the motion processor chip is not presently supported by PI stages and thus not recommended Nor is driving stepper motor stages currently possible with the C 843 Use the SPA command GCS command set to set the output mode see the GCS Command Manual for the command description Note When working with the operating software provided on the product CD the correct motor output mode for the selected stage is automatically set based on information in the internal stage database Axes connected to a given C 843 card may be in different modes so that PWM and analog stages can be run off the same card When PWM mode is used the stages are driven by external amplifiers instead of the C 843 on board amplifiers thus allowing higher power stages PWM mode is required with PI ActiveDrive sta
49. e is enabled by the SOP command while analog mode is enabled by the SOH command Wwww pi ws M 5x1 Series MP 33E Release 4 1 2 Page 15 Operating M 5x1 Stages Piezo Nano Positioning PI Example of Configuration File for Use by WinMove File WINMOVE CFG WinMove Configuration File for C 842 BOARDMODE 9 LIMITMODEF autodetect STAGE1 M 511 DD STAGE2 M 521 DD STAGE3 M 511 DD STAGE4 M 405 PG C 842 Parameter Settings for M 5x1 Stages Stage Type Parameter DP35 DP120 DP250 80 to 300 150 to 300 O to 20 0 to 50 FO 30 to 60 O to 50 DL2000 DL2000 DL2000 D DFO DFO 0 to 3 000 0to 3 000 0 to 1 500 Acceleratio SA800 SA400 SA800 i 40 to 1 500 20to 1 000 20 to 1 200 SV300000 SV180000 SV120000 1 to 500 000 1 to 270 000 1 to 200 000 DD200 DD150 DD800 0 to 500 0 to 400 0 to 1 200 5 2 4 Using C 844 Motor Controllers with M 5x1 Stages Wwww pi ws DCMove is the standard C 844 operating program This program uses a configuration file to define the motion control parameters First use the parameter menu to set these values PWM mode is enabled by the OUTP SIGN PWM command while analog mode is enabled by the OUTP SIGN DAC command M 5x1 Series MP 33E Release 4 1 2 Page 16 Operating M 5x1 Stages Piezo Nano Positioning PI C 844 Parameter Settings for M 5x1 Stages p 80 to 300 p 150 to 300 I O to 50 i O to 50 i d O to 400 d
50. e motor output Maximum allowed velocity Maximum allowed acceleration Maximum allowed deceleration Maximum allowed Jerk Numerator of the counts per physical unit factor Denominator of the counts per physical unit factor Output mode Invert the direction Scale factor Piezo Nano Positioning PI Comments Move toward the reference point until reference signal changes state if state went from high to low the process is repeated can be used to reference an axis Move in positive direction until positive limit switch trips then backs off limit can be used to reference an axis Servo algorithm proportional term Servo algorithm integral term Servo algorithm differential term Limit on contribution of the l term Entry as fraction makes it easier to specify certain values like those from gearboxes Can be either PWM or DAC analog Can be used to command the axis in non metric units e g for inches set to 25 4 WWwW pi ws PIMikroMove SM 148E Release 1 0 0 Page 19 Piezo Nano Positioning Header Rotary stage Stage has a reference Maximum travel range in positive direction Value at reference position Distance from the negative limit to the reference position Axis limit mode Stage type Stage has brake Profile mode P Term 2 l Term 2 D Term 2 l Limit 2 Kvff 2 Velocity feed forward Kaff 2 Acceleration feed forward Se
51. e or condition which if not correctly performed or adhered to could result in damage to equipment NOTE Provides additional information or application hints Related Documents The stage motor and the software tools which might be delivered with the C 843 Motor Controller Card are described in their own manuals All documents are available as PDF files on the Motion CD or special product CD Note that here is no special manual available for the GCS_COM library Refer to the GCS_DLL Manual MS 112E for function descriptions Updated releases are available via FTP or email contact your Physik Instrumente sales engineer or write info pi ws Contents Introduction 3 1 1 Purpose Of the C 843 ood ac ceacacd cseteesounddeeuiaedbtauendsadeddmcsvauseusiee 4 12 Salety PrecaullOn c ctesihccisnccchaaiiont ie esi deen dedieniendoteatel 4 to UNPACKING 2 clei cuiedhiciensircun hance dasa uaticetulieanieeaval miosis iaiecerannnis 6 14 Additional Components cccccccceeeeeecseeeeeeseeeeeeeseeaeeeeeeeeeeeeeas 7 1 5 System Requirements ccccccccsseseeeceeeeeeeseeeeeeeseeeeeeseeeeeeeeas 8 Quick Start 9 2 1 Install the Software on Host PC 1 0 0 ceccccseceeeeeeeeeeeeseeeeeaaees 9 22 Install the Card in Host PC ceccececeeceseeceseeeeeeeeeeseeseneetens 10 23 DECOM OOS rallOMN ca3eiahesietet se hecteios ea tees ealceivience tt edeetalaas 12 24 Uninstalling and Updating ccceccccsseeeeeeeeeeeseeeeeseeeeesaeeee
52. e 22 and EN 45014 Manufacturer Physik Instrumente PI GmbH amp Co KG C Manufacturer s Auf der Romerstrasse 1 Address D 76228 Karlsruhe Germany The manufacturer hereby declares that the product Product Name Motor Controller Card Model Numbers C 843 Product Options all conforms to the following EMC Standards and normative documents Electromagnetic Emission EN 61000 6 3 EN 55011 Electromagnetic Immunity EN 61000 6 1 Safety Low Voltage Directive EN 61010 1 Electrical equipment which is intended to be integrated in other electrical equipment only conforms to the cited EMC Standards and normative documents if the user ensures a compliant connection when implementing the total system Possible necessary measures are installation of the component ina suitable shielded enclosure and usage of suitable connectors March 14 2005 Karlsruhe Germany Vl eee Dr Karl Spanner President Physik Instrumente PI GmbH amp Co KG is the owner of the following company names and trademarks PI ActiveDrive The following designations are protected company names or registered trademarks of third parties Windows LabView Copyright 1999 2006 by Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual enjoy copyright protection With regard thereto Physik Instrumente PI GmbH amp Co KG reserves all rights Use of said text photographs and drawi
53. e 29 Main Window Piezo Nano Positioning PI 2 6 1 Position Pad Toolbar Origin and directions Joystick control ar AY ati B E ERR 2 Top left Swap X Y Bottom left Pseudo vector move Help Top right Velocity control Bottom right Target control Fig 21 Position pad toolbar m The first four buttons are mutually exclusive and specify the orientation of the coordinate system m When Pseudo vector moves is activated the velocities are set so that both axes arrive at the target at approximately the same m With Swap X and Y axes you can interchange the display position of the both axes m When Target control is activated you can set a target by clicking with the mouse You can move the target before or after the axes have reached it either by dragging it with the mouse or by using the joystick m When Velocity control is activated you use the joystick to set the current speed and direction The maximum velocity components are the limits that were in force when Velocity control was activated It is not possible to set targets with the mouse in this mode WWwW pi wSs PIMikroMove SM 148E Release 1 0 0 Page 30 Piezo Nano Positioning PI Main Window 2 7 Single Axis Window 2 M 605 2DD m AMIZ 2 M 605 200 onl Chae on target Position 245 i OOOO KIRI Home gt HALT Target 25 ogoi a 4 H TE d Step size 0 1 Ei Velocity 25 J 4 H Fig 22 Single a
54. e left 2 Click on Download in the navigation bar across the top no login or password is required 3 Click on the General Software category 4 Click on PI Stages 5 Click the download button below PiStages dat 6 Inthe download window switch to the Pl Gcs Translator directory The location of the PI directory is that specified upon installation usually in Program files or Programme may differ in other language Windows versions 7 If desired rename any existing P Stages dat so as to preserve a copy for safety reasons 8 Download the file from the server as P lStages dat 3 6 2 Updating User DAT Files WWwW pi wSs Use the PlStageEditor to view and edit entries in User DAT files To simply store the current active parameters under a new stage name in a user DAT file consider using Edit User Stages Data choice on the controller menu as a simpler alternative to the stage editor see p 8 PIMikroMove SM 148E Release 1 0 0 Page 40 Start up Controller Piezo Nano Positioning PI a Start up Controller This section explains how to connect a controller or set of networked controllers to P MikroMove and how to start up the connected stages The following dialog is shown at start of PiMikroMove and appears after a number of different menu sequences You can show this dialog later with New connection on the toolbar or with the menu sequence Connections New The startup procedure typically contains three steps 1 C
55. e version info at a later time use the Connections Search for controller software menu sequence 4 2 Select Connected Stages Start up controller connected C 843 on C 843 Board 1 2 Available axes on controller Known stage types Erk Ais M 062 DG PWM i 1 NUSTAGE it 2 M 605 2D0 MONG 1 Connect controller oo TIN DG Nea 4 NOSTAGE Assign M 110 1DG NEW P M 110 106 PwiM M 110 2D6 M 110 206 PiM M 117 1D6 M 117 10G NEW M 117 1DG NEW P M 117 106 P iM M 111 2D6 M 111 206 P WiM M 117 B0004 M111 RONAAPT lt Ho Stage Heset il m i j wl Help Cancel Fig 32 Startup Controller window with Select connected stages Step 2 selected With this dialog you can select the types of the connected stages for the various axes It shows two lists WWwW pi wSs PIMikroMove SM 148E Release 1 0 0 Page 42 Piezo Nano Positioning PI Start up Controller m The list of connected axes with stage types left The list of all stage types known to the controller right If you cannot find the entry for a PI stage in this list download the latest version of PIStages dat from the PI Website see p 40 lf you want to connect a non PI stage see How to use a stage that is not known to The following actions can be performed in this window m Disconnect a stage from an axis single click highlight it and press the No stage button m Replace a stage type with an
56. eeeeees 14 6 2 1 M06 DOG origena orice toesrin a ten ae ren ton eee Sere 14 6 2 2 M O06x PD ActiveDrive PWM cccccccccesceceeeeeseeeseeeeeeees 15 6 2 3 M O6x 2S Stepper Motor ccccccccccssceceeeeeeeeeeeeeeeeseeeeseeees 15 Release 1 3 3 WWW DI ws Page 1 PI M 060 M 061 amp M 062 Rotation Stages User Manual MP 47E 0 Manufacturer Declarations 0 1 Declaration of Conformity The manufacturer Physik Instrumente PI GmbH amp Co KG Auf der Roemerstrasse 1 76228 Karlsruhe Germany declares that the products M 06x xx comply with these specifications EMC EN55022 1991 Group1 Class B EN50082 1 1992 IEC 801 2 1991 4 kV Contact Discharge 8 kV Air Discharge EN50082 1 1992 IEC 801 3 1984 3V m EN50082 1 1992 IEC 801 4 1988 1 kV power lines 0 5 kV Signal lines Safety IEC 1010 1 1990 A1 EN61010 1 1993 Low Voltage Directive The product complies with the requirements of the EMC Directive 89 336 EEC and CE markings have been affixed on the devices 0 2 Safety Precautions Warning Torque Limit Be careful not to exceed the platform s maximum torque specifications of 4 6 or 8 newton meter 3 0 4 5 6 0 foot pounds for the M 060 M 061 and M 062 respectively Special attention is necessary when tightning or loosening the attachment screws Permanent damage to the device will otherwise result Note Location of Position Reference Sensor The position reference sens
57. eer 2 2 Operating Motorized Versions Rotation stages of the M O60 series can be connected to the same multi axis controllers as other PI micropositioning stages with the following restrictions gt Stepper motor devices must all be connected to networked with other stepper motor devices gt If PWM and DC motor devices are connected to the same C 842 2 or 4 axis controller card or to the same C 844 or C 848 controller a PWM converter box is required part number C 842 AP1 for each analog DC device gt PWM and DC motor devices can be mixed on C 843 controllers Operating a motorized stage proceed as follows 1 Setup the controller following the instructions in the controller manual If you are going to connect a host computer to the controller for computer controlled operation install the host software in the host computer This procedure is also be described in the controller manual or manuals 2 Connect the rotary stage to the controller using the connecting cable part number C 815 38 which comes with the stage With multi axis controllers be sure to note the axis designation of the connection selected 3 M 06x PD ActiveDrive PWM versions only Connect the stage to the power supply part number M 500 PS which comes with the stage 4 Command a few test moves to make sure everything is working properly If your controller comes with a graphic user interface software use it for such testing Note that the
58. elease 1 0 0 Page 43 Piezo Nano Positioning PI Start up Controller wwwWw pi ws Start up controller connected C 643 on C 843 Board 1 x Select all Select unreferenced Select axes with stored state Rel switch M 235 50D 10 ye unreterenced ia 1 Connect controller unreferenced M 605 DD a M 517 PD Ves VES unreferenced 4 M 110 1DG n ES unreferenced O 3 Start up axes Advanced Restore Reference selected axes by moving to Heg limit Beh switch Pos limit Automatic Fig 33 Startup Controller window with Start up axes Step 3 selected Neg limit Pos limit and Ref switch buttons are for a reference move of the selected highlighted axis or axes If any of the selected axes does not support a given type of referencing e g has no reference switch the respective button will be dimmed Restore is available if the state is Unreferenced and positions were saved on the host PC the last time the connection to the controller was closed CAUTION When using Restore be sure that the affected axes have not moved in any way since the positions were saved The saved position will be used as the current absolute position and will be the base of all future calculations and range checks If the stage has moved in between and the value is no longer correct you can easily crash the stage For more information see Why d
59. equired controller specific DLL is not present this menu item will not appear With motion profiles it is possible to specify in more detail what happens while one or more axes move from their current position to a new one When a special mode of the motion controller is used a much finer time resolution is possible than by sending discrete move commands over an interface With GCS commands are also available that give more complete access to User Profile Mode Using them specification of the desired trajectories is tedious and must be done with great care but profiles can be freely defined for all axes PIMikroMove SM 148E Release 1 0 0 Page 32 Additional Windows Piezo Nano Positioning 3 2 1 WWwW pi wSs PI multi axis systems this also provides an easy way to specify motion along a specific trajectory A simple type of motion profile for a single axis can be defined by a set of time and position value pairs In that definition the axis takes the amount of time specified in the first pair to move from the first position to the position in the next pair etc To make the motion smoother velocity specifications can be added expanding the pairs to sets of 3 values Profiles with up to 5 specified values in each set are supported time position velocity acceleration and jerk the rate of change of acceleration Interpolation between the specified values is performed by the motion control chip With five value
60. ference No AMP 9 215594 1 Pin Function 1 Phase 1a brown 9 Phase 1b orange 2 Phase 2a red 10 Phase 2b yellow 3 n C 11 n C 4 n C 12 n C i 13 es Limit switches are 6 5 V supply from controller optional models without 14 Positive limit signal limit switches output a TTL 7 GND high on these lines 15 Reference Signal 8 Negative limit signal _ Release 1 3 3 WWW pI ws Page 15 Piezo Nano Positioning PI MP 33E User Manual M 5x1 Series Linear Positioning Stages Release 4 1 2 Date 2004 09 20 This document describes the following product s E M 5x1 DG Linear Positioning Stages DC Motor gearhead E M 5x1 DD Linear Positioning Stages DC Motor Direct Drive Linear Encoder E M 5x1 PD Linear Positioning Stages DC Motor Direct Drive Rotary Encoder E M 5x1 2S Linear Positioning Stages with 2 Phase stepper motor E M 5x1 5S Linear Positioning Stages with 5 Phase stepper motor Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299 Moving the NanoWorld www pi ws info pi ws www pi ws Declaration of Conformity according to ISO IEC Guide 22 and EN 45014 Manufacturer Physik Instrumente PI GmbH amp Co KG Manufacturers Auf der Romerstrasse 1 Address D 76228 Karlsruhe Germany The manufacturer hereby declares that the product Product Name Precision Linear Stage Mode
61. ges PD and DD models lf you want to drive an analog stage whose power consumption might exceed the output current limitation see Section 3 1 on p 16 a PWM converter box C 842 AP1 can be used The output mode of the appropriate axis must then be set to Sign Magnitude PWM or the stage with the PWM name suffix must be selected from the appropriate stage database In analog mode commanding the motor to run in positive direction puts a higher voltage on the MOT output than on the MOT output Commanding the motor to run in negative direction puts a lower voltage on the MOT output than on the MOT output The maximum differential is 12 V and no particular relationship to ground is guaranteed C 843 MS77E Release 2 5 0 Page 17 System Description Piezo Nano Positioning PI 3 3 On Board Memory The motion processor chipset has what its documentation calls external memory on the card which is accessable in real time by the motion processor This fact is exploited in User Profile Mode making it possible to define and trace highly precise multi axis motion profiles without transmission delay uncertainties In addition it is possible to access this memory independent of the trace function thereby allowing it to be used for storage of information like product configuration The C 843 is equipped with 64 kB of memory for this purpose 3 4 Gonnectors and Pinouts 3 4 1 Connector Locations
62. he PC WWwW pi ws C 843 MS77E Release 2 5 0 Page 9 Quick Start Piezo Nano Positioning PI 2 2 Install the Gard in Host PG WWwW pi ws WARNING The C 843 Motor Controller Card is an ESD sensitive electrostatic discharge sensitive device Observe all precautions against static charge buildup before touching this device Avoid touching circuit components pins and PCB traces Discharge any static charge you may have on your body by briefly touching a conductive grounded object before you touch any electronic assembly Pose PCBs only on conductive surfaces such as ESD safe transport containers envelopes foam Electronic subassemblies must always be kept and transported shipped in conductive packaging Make sure that no conductive particles of any kind metallic dust or shavings broken pencil leads loose screws get on the card or into the PC Make sure that no electrical contact between the various add on cards in the PC is possible DANGER Before opening the host PC remove the line voltage connection Heed any warnings provided by the manufacturer of the PC or of other add on cards it may contain 1 Turn off the host PC and unplug the line cord Then open the PC housing 2 With C 843 41 only to use motor axes 3 and 4 of the C 843 41 you must connect the two ribbon cables of the included 2 connector bracket adapter to the corresponding 16 pin header connectors on the C 843 41 board for component
63. he left of the window is made from the time and position values in the profiles generated for the two axes In the display the positions are shown connected by straight lines but the motion controller does a cubic spline interpolation between them WWwW pi wSs PIMikroMove SM 148E Release 1 0 0 Page 34 Additional Windows Piezo Nano Positioning PI The user parameters to be entered have the following meanings m Steps 360 m Start angle m Travel angle m Wrap around m Radius for a true circle the number of points in time per each 360 degrees of motion for which the profiles contain explicit values for axis position velocity acceleration and jerk Interpolation is used for the motion between the specified positions for a true circle the angular coordinate of the starting point for a true circle the difference between the angular coordinate of the last position specified and the first position specified if activated motion continues from the last to the first position specified a linear scale factor applied on top of Stretch X amp Y m Lissajous X Y if both equal then an ellipse or circle is m Stretch X Y m Speed factor Accel factor m Decel factor m OK m Cancel generated otherwise a Lissajous figure with the corresponding frequency ratio relative scaling in the X and Y directions must be equal for a circle is multiplied times the maximum velocity of the slo
64. hipset s integrated 64 k word trace memory allows online tracing of up to four independent system variables positions velocities internal register contents etc at whole number multiples of the servo loop time To offer maximum flexibility software interfaces at a number of different levels are provided and documented In most cases higher level interfaces also provide pass through functions for lower level commands See Software Overview p 24 for more details WWwW pi ws C 843 MS77E Release 2 5 0 Page 15 Piezo Nano Positioning PI System Description 3 1 Output Current Limitation CAUTION DO NOT EXCEED MAXIMUM CURRENTS Keep in mind that the total current for the C 843 is supplied from the PC power supply only Extreme power peaks will occur when E Motors accelerate or decelerate very fast Motors are reversed at high speed E Motors stall mStages are driven into the hard stop The total current may exceed the current capability of the PC power supply Voltage drops may occur with the risk of PC malfunction or damage to other devices such as hard disks drives The C 843 has _ factory set output current limitation Nevertheless the user has to ensure that the total current does not exceed the capability of the PC power supply All output channels have separate current limiting The factory default output current limit for each channel is 1 A sufficient to drive a 5 W motor It is possible to
65. i R X axis H Axis 1 M 235 5DD_on C 843 on C 843 Boar Velocity 15 0 000000 50 000000 B T rl Position 7 739746 ix Target 7 739938 Q Q Q Q Q bh Oo Axis 3 M 511 PD oF Velocity i 5 000000 State on target Position 69 9290 SP in 3 M 511 PD on C 843 on C 843 B oard 1 a Homd gt Position 89 929000 ity 62 500000 Target 69 9291 Velocity S 4 S o Step size 1 4 S ep size T Velocity 62 5 n a Ai Fig 6 Two Single axis windows and the Position pad all docked inside the main window with the Axes tab card displayed e a Menu Bar Connections C 843 Board 1 Tools Help Fig 7 Menu bar 2_ 1 1 Connections Menu WWwW pi wSs Connections on ew Close H Close All Search For Controller software Exit Fig 8 Connections menu PIMikroMove SM 148E Release 1 0 0 Page 7 Main Window Piezo Nano Positioning PI New Opens the Start up Controller dialog see p 41 to connect another controller or controller network Close Contains a submenu with entries for each connected controller network By selecting one of the menu entries the connection to that controller can be closed Note that the associated controller menu bar item will disappear Close all Closes connections to all connected controllers All controller menu bar items
66. ided and documented In many cases higher level interfaces also provide pass through functions for lower level commands For a complete list of all software packages on the C 843 CD see Section 4 2 on p 27 Most of the individual programs command sets and driver libraries are described in separate manuals 4 1 General 4 1 1 Architecture The control signals for the attached axes are generated by the MC2140 or MC2120 motion control processor on the C 843 board The following sections describe the communication paths to and around that processor the command sets used at the different interfaces and the database that holds information on available positioners so that motion parameters can be loaded automatically Information you would need to actually access the device directly is contained in the Low Level Information section on page 29 and in the motion chip manufacturer s manuals on the product CD 4 1 2 Communication WWwW pi ws The DSP motor controller chip on the card provides the output signals for the motors Its I O address space is mapped to the card s PCl bus function registers making it addressable from the PC In addition the lines on the All Axes connector on the board connect directly to the DSP The digital I O lines on the connector on the card are also available to the PC over the PCI function registers but not to the DSP directly At the next level the C 843 is controlled as a PCI card by a driver
67. in Signal 1 nc 2 input Motor 3 internal use 4 input 5V Encoder and logic supply 5 output Limit Switch positive 6 GND 7 output Encoder A inverted 8 output Encoder B inverted 9 input Motor 10 GND power 11 internal use 12 output Limit Switch negative 13 output Reference signal 14 output Encoder A standard 15 output Encoder B standard Limit switches are optional models without limit switches output a TTL low on these lines Release 1 3 3 WWW DI ws Page 14 PI M 060 M 061 amp M 062 Rotation Stages 6 2 2 M 06x PD ActiveDrive PWM Connector motor power User Manual MP 47E Type 3 pin round socket Reference No Switchcraft Tini Q G PIN Function 1 GND 2 Power input 3 n C Connector from controller Type 15 pin Sub _D Reference No AMP 9 215594 1 Pin Signal 1 input 5 to 12 V enable PWM amplifier 2 input Motor 3 input PWM magnitude 4 input 5 V Encoder and logic supply 5 output Limit signal positive 6 GND 7 output Encoder A inverted 8 output Encoder B inverted 9 input Motor 10 GND power 11 input PWM sign A 12 output Limit signal negative 13 output position reference signal 14 output Encoder A standard 15 output Encoder B standard Limit switches are optional models without limit switches output a TTL Ilow on these lines 6 2 3 M 06x 2S Stepper Motor Connector from controller Type 15 pin Re
68. it switch and reference signals are inverted by the hardware on the C 843 board before they are connected to the motion chipset This is important to know if the actual signal status is read with the GET_SIGNAL_ STATUS command The value read is also combined with the signal sense register SET SIGNAL SENSE command and then returned to the user For each bit in the signal sense register that is set to 1 the corresponding bit in the GET_SIGNAL_ STATUS command will be inverted so that a low signal is read as 1 and a high signal will be read as 0 5 1 4 Encoder Signals Standard quadrature encoder signals can be used with the C 843 The phase of ENCA signals is ENCB 90 Both inputs have 10 k pull up resistors WWwW pi ws C 843 MS77E Release 2 5 0 Page 29 Technical Data Piezo Nano Positioning PI 5 1 5 Index and Home Reference Signals The motion control processor can capture separate home and index signals although both inputs are connected to the same line REFS Capturing home can be activated by the SetCaptureSource A 1 command Set Capture Source for axis ato 1 Home position recognition requires any transition from high to low or vice versa at the REFS input The level of the REFS input can be read on bit 3 of the signal status register The command for index pulse capture is SetCaptureSource A 0 Set Capture Source to 0 Index pulses are clock synchronised signals like those that are emitted by special rotary
69. l Numbers M 5x1 xx Product Options all conforms to the following EMC Standards and normative documents Electromagnetic Emission EN 61000 6 3 Electromagnetic Immunity EN 61000 6 1 Safety Low Voltage Directive EN 61010 1 Safety of Machinery EN 12100 August 24 2004 Karlsruhe Germany W Bitterwolf Quality Management Copyright 1999 2004 by Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The texts photographs and drawings in this manual enjoy copyright protection With regard thereto Physik Instrumente PI GmbH amp Co KG reserves all rights Use of said texts photographs and drawings is permitted only in parts and only upon citation of the source First printing 2004 06 24 Document Number MP 33E Release 4 1 2 M 5x1_User_ MP33E412 doc This manual has been provided for information only and product specifications are subject to change without notice Any change will be reflected in future printings About this Document Users of this Manual This manual is designed to help the reader to install and operate M 5x1 Linear Positioning Stages It assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures The manual describes the physical specifications and dimensions of the M 5x1 Linear Positioning Stages as well as the motion control parameter settings which are required to put the associated motion system into operation
70. log stages while the card is in PWM mode Using C 842 Controllers with Selected M 060 DG M 060 PD M 061 PD M 061 DG M 062 PD Stages al eee ee eee ener ee eee ee eal ool ee E a aa Velocity SV 90 90 Ss 90 90 OS 90 90 S ae Acceleration 70 s 300 eee 300 70 200 sae SA Notes Gear Ratio 29 6 1 See the C 842 Controller User Manual MS 42E for more details 4 2 Using C 843 Motor Controllers with M 06x Stages The C 843 is an add on card to be installed in a PCI slot of a PC Two and 4 axis versions are available and more than one card can be installed in the same PC PWM and analog stages can be run off the same card without using a converter box See the C 843 user and software manuals for information on this controller and its software interfaces Release 1 3 3 WWW DI ws Page 6 PI M 060 M 061 amp M 062 Rotation Stages User Manual MP 47E Using C 843 Motor Controllers with M 06x DG M 06x PD gearhead drive integrated amplifier 4 3 Using C 844 Motor Controllers with M 06x Stages The C 844 is a benchtop rackmount unit DCMove is the standard C 844 operating program This program uses a configuration file to define the motion control parameters First use the parameter menu to set these values Use PWM mode with the M 06x PD models PWM mode is enabled by the OUTP SIGN PWM command while analog mode is enabled by the OUTP SIGN DAC command All axes connected to a given C 844 must be i
71. lving spindle ball connected directly to the 30 watt DC motor by a flexible coupling For maximum dynamic performance the DC servo motors are driven by high efficiency PWM power amplifiers integrated into the stages An external line power power supply order number M 500 PS is provided to supply the built in amplifiers directly This architecture allows high torque and high velocities while loading the motor controller with control signals only The actual power is provided by the external supply WWW pi WwsS M 5x1 Series MP 33E Release 4 1 2 Page 10 Piezo Nano Positioning PI Position Sensors 4 Position Sensors 4 1 Limit Switches M 5x1 series stages are protected against running into the hard stop by double level magnetic limit sensors Hall effect sensors with TTL drivers at each end of travel The inner limit sensors N1 at the negative travel end and P1 at the positive travel end work with the controller s limit sense input lines The TTL output signal is active high The outer limit sensors N2 at the negative and P2 at the positive end work locally opening a relay that cuts the motor current The second level limit switches provide for fail safe operation in case the controller fails to stop the motor when the first level limit sensor is reached If the second level limit switch is reached the stage can not be operated by the controller until the platform is pushed back manually Disconnect the motor cable or
72. ly and product specifications are subject to change without notice This manual is superseded by any new release The newest release is available for download at www pi ws About this Document Users of this Manual This manual is designed to help the reader to install and operate the P MikroMove GUI software It assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures This document is available as PDF file on the product CD Updated releases are available via FTP or email contact your Physik Instrumente Sales Engineer or write info pi ws Conventions The notes and symbols used in this manual have the following meanings WARNING Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in injury or death CAUTION Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in damage to equipment NOTE Provides additional information or application hints Related Documents The motion system hardware and other software tools which might be delivered with PiMikroMove are described in their own manuals All documents are available as PDF files on the Motion CD or special product CD Updated releases are available via FTP or email contact your Physik Instrumente Sales Engineer or write info pi ws Contents Introductio
73. mmended The PI Tuning Tool facilitates use of a live trial method in conjunction with the Ziegler Nichols tuning method CAUTION Foresee and mitigate any risks that may be caused by variations in operation from tuning experiments Live trial method Enter an initial set of tuning parameters from experience Press Run loop Watch the step responses in the graph pane and dynamically adjust the PID terms in increments of about 5 Cursor 2 x 48 79000 Y 22 03063 Dit Cusa 11 3804 25 9744 40 5634 54 1824 69 7564 Time in milliseconds Fig 35 Live trial method Ziegler Nichols open loop tuning method set K and Kato zero and decrease K until you get a motion error The controller is now in manual mode i e without feedback Press Single step PIMikroMove SM 148E Release 1 0 0 Page 51 Piezo Nano Positioning PI Appendix m Cursor 1 x 6 56000 Y 21 93825 Cursor 2 x 66 83000 Y 22 03938 m Diff Cursor x 60 27000 21 9282 0 205531 14 3885 28 9825 43 5765 58 1705 72 7645 Time in milliseconds Fig 36 Ziegler Nichols Ziegler and Nichols determined that the best settings for the tuning parameters could be computed from T d and Kas follows 7 LT K Kd 25d K 0 4 K d Ziegler Nichols closed loop tuning method Set K and Kato zero to shut off the integral and derivative corrections Press Run loop
74. n 3 Li CASHING Stan Osee te Geel tee ead oder Go acta ence eereat se 3 Main Window 6 BN ANSI Al a a ance tenaceceeneaneaint 7 21 1 CONNECTIONS MONU ccccccccececcececcececcecsccececceseccusecaucecseceees 7 212 COO WCU a a 8 Pe A Ea o EAN E E E A A T EE AE AAE ek 11 214 TACO Mentse a E E 13 DO WOOO aeaa scoters nd cect 14 2383 Axes Tab Car ive coecskrtestredivediacedscandodan teatacusoet medal veaitidedeseaddeniedss 16 23 1 Select Columns to be Displayed cccccccceeesesssseeeeeeeeeeeaes 17 292 1 SOM POW S ee nancecc cost saccndazvnsGeacguoernndesteaGceantaauc ateatooa e 17 239 Fields DISDIAY CO sossen 18 234 AS Meena A e aN 21 24 Host Macros Tab Card ccccccccecececcecccccecececececececacaeaeacaeeess 22 241 WAC lt command gt lt operator gt lt valUe gt sssssrerrssereeessrreen 23 242 MEX lt command gt lt operator gt lt ValUe gt cccccecseeeeeeeeeeeeeeees 24 243 MAC NISTART lt names cccccccccsssseceeecseseeeeeecseseseeessaneeeess 24 244 Example Wait and TriQQer cccccccsssseccsseseeeseeeeesseeeeesseeees 24 PAS Example X Y SCANS wees tovene twa onto shales each tence 25 246 Example Pushbutton Control ccccccececccceeeeesesesseeeeeeeeeaes 26 25 Command Entry WindOW rirse a tet 27 2 6 Position Pad WINKOW cccccccceccccccececececccecececececeacauavanenas 29 261 Position Pad Toolbar c c0cc ccccccceccececcesecccesseusescccscue
75. n Current position iy 1 M 235 5D0 0 000000 50 000000 10 646973 M 2 M 605 200 0 000000 50 000000 A0 7193 i 4 M 110 1DG 0 000000 5 000000 40 9347 Stark JY Random moves within range Close Fig 30 Demonstration motion window The controls are self explanatory Note that the white bar in the Current position field for each axis serves as a graphic representation of the axis position While this window is active the Stop buttons in other windows are ineffective You can switch between two different motion modes m Random moves within the given range m Full range moves in alternating directions i e back and forth between the specified minimum and maximum positions PIMikroMove SM 148E Release 1 0 0 Page 39 Additional Windows Piezo Nano Positioning PI 3 6 Stage Editor 3 6 1 Opens the P StageEditor a tool that permits examining the stage names and parameters values in the PlStages data files Two types of DAT files are recognized by PiMikroMove and the PIStageEditor protected read only DAT files with data from PI about all available stages and User DAT files containing special parameter sets created or customized by the user See the P StageEditor software manual for detailed information Updating PiStages dat To install the latest version of P Stages dat from the PI Website proceed as follows 1 Onthe www pi ws front page click on Download Support in the Service section on th
76. n the same mode Mixing PWM and non PWM stages on the same controller is possible using a PWM converter box order number C 842 AP1 with analog stages while the card is in PWM mode Using C 844 Motor Controllers with Selected M 060 DG M 060 PD M 061 PD M 062 PD Stages pam OF erm Tiem 00 4 4 Using C 848 Motor Controllers with M 06x Stages The C 848 is a benchtop rackmount unit Use PWM mode with the ActiveDrive stages PD models All axes connected to a given C 848 must be in the same mode Mixing PWM and non PWM stages on the same controller is possible using a PWM converter box order number C 842 AP1 with analog stages while the card is in PWM mode Using C 848 Motor Controllers with Selected M 060 DG M 060 PD M 061 PD M 062 PD Stages pam OF erm sem 09 Release 1 3 3 WWW pI ws Page 7 PI M 060 M 061 amp M 062 Rotation Stages User Manual MP 47E 4 5 Using Mercury Motor Controllers with M 06x stages The Windows operating program for the Mercury controller allows choice of M 06x stages as a Start option for operation Mercury always has the PWM mode enabled without any extra command Using C 862 Mercury Controllers with M 060 DG gearhead drive Parameter p term DP i term DI d term DD i Limit DL Velocity SV Acceleration SA M 061 PD integrated amplifier Recommende Operating d Value Recommende d Value Operating 2000 100 000 500 0
77. nces window WWwW pi wSs PIMikroMove SM 148E Release 1 0 0 Page 12 Main Window Piezo Nano Positioning PI x Some user choices cannot be reversed in the way they were made those choices can be reversed here Show confirmation dialog before closing all connections Show confirmation dialog before closing single connection Show confirmation dialog before restoring position values Start referencing immediately after dialog appearance Show confirmation dialog before stopping all axes at exit Show confirmation dialog before selecting Relative moves only Show warning When velocity i set to 0 0 Show warming first time Command entry window i shown Show warning when DEFAULT STAGE iz selected Show warming before user profile mode motion i started RRKRRERER ARR OF Cancel Fig 11 Preferences dialog Page Setup Allows setting parameters which would be used for printing from the Command entry and Macro windows 2 1 4 Help Menu PiMikroMove has a comprehensive help system Help Opens a standard help system with help relating to PIMikroMove FAQ Tutorials Task oriented help for PiMikroMove About PIMikroMove version information WWwW pi wSs PIMikroMove SM 148E Release 1 0 0 Page 13 Main Window Piezo Nano Positioning PI 2 2 Toolbar pri G S i flenter help search here T K STOR Command entry Position pad Search help Enter term to search Help on Ne
78. ngs is permitted only in part and only upon citation of the source First printing 2006 03 21 Document Number MS77E Release 2 5 0 C 843 User _MS77E doc This manual has been provided for information only and product specifications are subject to change without notice About this Document Users of this Manual This manual is designed to help the reader to install and operate the C 843 Motor Controller Card It assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures The manual describes the physical specifications and dimensions of the C 843 Motor Controller Card as well as the software and hardware installation procedures which are required to put the associated motion system into operation This document is available as PDF file on the product CD Updated releases are available via FTP or email contact your Physik Instrumente sales engineer or write info pi ws Conventions The notes and symbols used in this manual have the following meanings WARNING D Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in injury or death DANGER Indicates the presence of high voltage gt 50 V Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in injury or death CAUTION Calls attention to a procedure practic
79. nna ota ee ence ce eae nee eet ae eqns dene cata eeces 153 Type DG Stages with Gearhead Drives cccceeeeee 154 Type XS Stages with Stepper Motor cccccceeeeeeeeeees 16 Recommended Motor Controllers cccccccceeeeeeeeeeeees Linear Scale Position Encoder PWM Amplifiers Position Sensors A FE a1 eS 11101 9 e een nee ere ee eee ee ee ere 42 Position Reference Signal SENSOMS ccccccccseeeeeeeeeeeeees Operating M 5x1 Stages 5 1 Mechanical Handling sieccetercticcieenctcceer eit lita centousteean dence SiMe AMOUNTING a asec cnants haa eauatenisa ts tons soiawadnia eset 5 12 Operating Environment cccccsssceecssseeeseeseeeseeseeeeseeseeees Did WEI LOM AIIGC Ssces dagtanctes nc e E sea og adecaas Xe 5 2 Motor Controller Setup cece cece sseeseeeeeeeeeesseeeseeeneeaees 52 1 Using C 843 Motor Controllers with M 5x1 Stages 522 Using C 848 Motor Controllers with M 5x1 Stages 523 Using C 842 Motor Controllers with M 5x1 Stages 524 Using C 844 Motor Controllers with M 5x1 Stages 525 Using Mercury Motor Controllers with M 5x1 stages 526 Stepper Motor Controller Setup ccccceeceesseeceeeeeeeeeaees M 511 M 521 M 531 Dimensions M 5x1 Stages with Stepper Motors 7 14 M 5x1 2S using 2 phase stepper motors c ccceeeees 72 M 5x1 5S using 5 phase stepper motor
80. ns use direct drive microstepped 2 phase stepper motors with 20 000 counts revolution Manual versions are driven with a thumbwheel through a worm gear drive with the same gear ratio as used in the motorized versions 1 2 Model Survey The available models are listed in the following table Platform diam Drive M 060 MO M 061 MO M 062 MO ActiveDrive DC M 060 PD M 061 PD M 062 PD motor PWM DC motor gearhead M 060 DG M 061 DG M 062 DG Stepper motor M 060 2S M 061 2S M 062 2S Special order options Limit switches open loop closed loop Release 1 3 3 WWW DI ws Page 3 PI M 060 M 061 amp M 062 Rotation Stages User Manual MP 47E 2 Quick Start 2 1 Mounting Guidelines Warning Torque Limit Be careful not to exceed the platform s maximum torque specifications of 4 6 or 8 newton meter 3 0 4 5 6 0 foot pounds for the M 060 M 061 and M 062 respectively Special attention is necessary when tightening or loosening the attachment screws Permanent damage to the device will otherwise result For mounting the stage on a flat plane or another stage use the three metric screws M O60 screw size M4x12 M 061 and M 062 screw size M4x16 which are delivered with the stage Several adapter plates and mounting brackets are available for mounting M O60 series stages on other PI stages in the horizontal or vertical plane See the PI catalog at www pi ws for more information or contact your PI sales engin
81. nsensscvcneveeds 30 2 7 Single Axis WINGOW ccccccccccsececceeseeceeeeecseeeessaeeeeseeeessaaeess 31 Additional Windows 32 3 1 MOVE Multiple AX6S sisi cccrtiinsiescGeniniini eta 32 32 Profile GENEratOr c cccccccccececececececcccecececececececacececavaecenerers 32 321 AXIS ASSIG MUNIN way aiid icin stetete bestia a eed boaein 33 3 22 Profile Definitions for 2 AX S c ccceceececeececeececeececeeeeceeaeeeeess 34 33 PITUNA OOM siucaseas ses catcanersiched sedis ee NS 36 3 3 1 Stage Setup Pane ccccccccssesssececeeeeeeeeeseeeeeeeesseeseeeeeeeeeseaas 37 3 32 Measurement Pane cccccccccccccecccececececececececececenenenenenenenens 37 3 3 3 Parameter TUNG Pane ccccccccccececececececececececececececeneueneneners 37 3 34 Toolbar amp MenUS cccccccccccecececcccececcccccececscucecceaesecscauauaeneces 38 399 Aute OOM ean ns Societe e E A 38 3 4 PreferenceS aasunnsnnnnnnnnnnnnnnnnnunnnnnnnnnnnnrnnnrnnnrnnrrnnnrnnrrnnrrnurrnnrne 38 OD Demo Molon eeann a a e eck adeiaventes 39 OO Stage OIL ON aniei e cac aha ected S 40 Contents 361 Updating PIStages dal arien este wanes 40 362 Updating User DAT FileSsceseicdsctcicsdicuitendaeracctatiaindatstaeddanewees 40 Start up Controller 41 Ad Connect Controlle esie cies eu nanetiavnctevenuaeunees 41 42 Select Connected StageS ccccccccccsssccccessesceeeeeeeeeesseeeeeeseaees 42 AS Stant UD AXES oae naon a a N on 43 43i Advanced SIUD a
82. o need to reference an axis p 47 If you need more control or you cannot move the stage to one of the known positions call the Advanced startup dialog by pressing Advanced You can return to this window by selecting Start up axes in the controller menu of the corresponding controller PIMikroMove SM 148E Release 1 0 0 Page 44 Start up Controller Piezo Nano Positioning PI 4 3 1 Advanced Startup Advanced startup dialog X Start up selected stages M 235 5D0 1 z M 605 200 C Neg limt Reference Pos limit Automatic Define absolute position New absolute position 0 0 Relative moves only no range checks Start Help Cancel Fig 34 Advanced startup of selected stages This dialog gives you more control about the startup of the stages In this example Move to Reference is dimmed because some of the selected stages do not have a reference switch You have the following options not available on the previous screen Define absolute position Inform PlMikroMove and thus the motion controller manually where the axes currently are This makes absolute positioning possible and the status will be set to on target Note that the numeric value entered is interpreted as axis working units m Relative moves only abandon absolute positioning When this is done all range checks are switched off WWwW pi wSs PIMikroMove SM 148E Release 1 0 0 Page 45 Piezo
83. of the GCS DLL since all PI controllers understand this For user programmers who want to Windows command set and your applications are thus portable between them use a DLL for programming their Dynamic Link applications Library Needed by the LabVIEW driver set GCS COM For programming customized applications when using COM Server same functionality as C 843 DLL Note that here is User programmers who want to use a no special manual available for the GCS_COM library Refer to the GCS_ DLL Manual MS 112E for function COM server e g want to work with descriptions or to the QuickRun manual Visual Basic or Delphi for their application MC DLL The MC DLL based on the QFL command set which is close to that of the motion controller is provided only for User programmers who want to use a Windows compatibility and historical reasons DLL for lower level access to the Dynamic Link motor controller card Library QuickRun QuickRun is a graphic user interface to the GCS DLL Visual Basic sample program It can be used to gain familiarity Users who want to test the equipment with the controller using the PI General Command Set In addition it can be used to configure the servo loop before programming an application parameters of a stage and who want to optimize the servo loop parameters State Viewer This online reading tool is recommended for testing the correct card installation and for debugging purposes Users who want to observe the
84. ogrammable as active high or low 2 4 TTL programmable as active high or low 8 TTL inputs 8 TTL outputs 15 pin f sub D one per channel for C 843 41 2 on card 2 on adapter bracket see Fig 1 PC PCI bus Choice of PI General Command Set GCS or C 842 compatible QFL commands Standard PCI card length 20 cm 230 g 10 Page 28 Piezo Nano Positioning PI Technical Data 5 1 Low Level Information With the comprehensive software support supplied you will probably not need the information in this section Programmers who have sufficient knowledge and wish to bypass some or all of the higher level software provided will need and understand the information in this section The motion chip command set is described in the Motion Processor Programmers Reference and User Manual included on the C 843 CD 5 1 1 Digital I O Lines The digital output and input lines of the digital I O connector are available on the 8 bit registers at I O address 0 This address space can be accessed via the WritelO output lines and ReadlO input lines motor controller chip command 5 1 2 Analog Amplifier and Brake Control The hardware connection to the analog amplifier enable disable function and brake actuation signals is via the Write O command with address 1 The four lower bits control the analog amplifiers the four upper bits the brake signals motor axes 1 4 5 1 3 Sense of Limit Switch and Reference Signals The lim
85. onnect Controller see p 41 2 Select Connected Stages see p 42 3 Start Up Axes see p 43 4 1 Connect Controller This section contains a detailed description of the windows introduced in the Getting Started section PIMikroMove R Ioj x Connections Tools Help onn ae gt e Bi e A Ilenterhelp search here WR GE C 843 DC Motor Controller Card 1 Connect controller SS PCI Board C 843 yoy PCI Board ff uy ine Fig 31 Startup Controller window with Connect Controller Step 1 selected WWwW pi wSs PIMikroMove SM 148E Release 1 0 0 Page 41 Piezo Nano Positioning PI Start up Controller The list box in the middle of the window shows symbols for all controllers known to the host system Select the first controller you want to use and choose the correct interface settings baud rate COM port IP address and click Connect PIMikroMove tries to establish a connection to the controller as specified If this is successful the Select connected stages dialog is shown automatically Please note that not all of the interfaces shown may be physically present on your system With Version info you can show the versions of the software components found by P MikroMove This information can be helpful in diagnosing problems with P MikroMove PIMikroMove searches once at startup for controller software lf you want to search again or show th
86. or details Search Help Searches for terms in P MikroMove s comprehensive help system which includes all of this manual Open Help Opens a standard help system with help relating to PIMikroMove Context Help Answers the question What s this about the program element in question Stop all axes Sends an immediate stop command ASCII 24 to all axes connected to PiMikroMove The resulting motion profile is hardware dependent and not necessarily repeatable WWwW pi wSs PIMikroMove SM 148E Release 1 0 0 Page 15 Main Window Piezo Nano Positioning PI 2 2 Axes Tab Card WWwW pi wSs PIMikroMove R loj x Connections C 843 Board 1 Tools Help Prs gt gt ai flenter help search here O R fron 15 000000 2 pM6052DD k lt 100 0000 gt gt i 0 1000 100 0000 EAEE wreterenced 25 000000 M 511 PD k KI 56 0000 El 1 0000 56 0000 SARE on target 62 500000 M 110 1DG w lt 0 000000 gt gt t 0 010000 0 000000 on target 1 000000 Fig 13 Main window showing the Axes table Each axis of each connected stage is displayed in the axes table of the main window You can specify the columns to be displayed and change the order of the rows axes You can also type new values into the white fields If the target is changed the system will move Changed settings are not stored after P MikroMove closes Stand alone controllers will keep the changed setting
87. or is mounted on the adjustable scale ring on the outer edge of the turntable which is graduated in 2 degree increments Adjusting the scale ring therefore affects referencing the absolute position of the stage Copyright 2004 by Physik Instrumente PI GmbH amp Co KG Release 1 3 3 File M O060_User_MP47E133 doc 270848 Bytes Release 1 3 3 WWW DI ws Page 2 PI M 060 M 061 amp M 062 Rotation Stages User Manual MP 47E 1 Introduction 1 1 M 060 Series Features The M 060 to M 062 family of rotary stages all feature high precision preloaded worm gear drives that allow unlimited rotation in either direction In addition all motorized versions have a non contact Hall effect reference switch and are available with optional limit switch outputs with some limitation on travel range if used The models differ in turntable size and drive type The ActiveDrive and DC motor gearhead versions are equipped with optical encoders whereas the stepper motor and manual versions are designed to operate in open loop The ActiveDrive versions feature a direct coupled motor encoder with a high efficiency PWM pulse width modulation servo amplifier mounted side by side with the motor This design provides the highest performance in dynamic applications The DC motor gearhead versions are equipped with shaft mounted encoders The gear ratio of 29 6 to 1 provides higher resolution than the direct drive motors The stepper motor versio
88. other highlight its line in the left list and double click the new stage type in the list at the right or highlight it and click the Assign button m Accept the list of connected axes stages and store the corresponding parameter values on the controller press the Apply or OK button OK also closes the window and displays the Start up axes window Return the left list to the initial or last accepted state press Reset or Cancel Cancel also closes the window Manipulate the list of stage types on the right right click in the list and call up the PI Stage Editor It is needed if you want to add a stage to the list of Known stages for example a new stage from PI or a non PI stage See the Stage Editor User Manual for more information You can return to the Select stages window with the Select Stages item on the controller menu of the corresponding controller or controller network 4 3 Start Up Axes Almost all systems require that the axes be initialized before normal use For systems with incremental position sensors this includes determining the absolute position of each axis referencing Referencing is usually done by driving the motor slowly until a reference or limit switch with a known position is reached or if the absolute current position is known not to have changed since having been saved on the host it can be restored or if it is otherwise known it can be entered manually WWwW pi wSs PIMikroMove SM 148E R
89. p 2 shown just before clicking Assign to copy selected stage type M 110 1DG to selected axis slot axis 4 See Section 4 2 for more information When finished click OK If the connected controller does not allow changing the connected stages this step is skipped and window moves to Start up axes Step 3 WWwW pi wSs PIMikroMove SM 148E Release 1 0 0 Page 4 Introduction WWwW pi wSs Piezo Nano Positioning PI i Start up controller connected C 843 on C 643 Board 1 x Bo Es a Select all Select unreferenced Select axes with stored state t 4 eE bt i lt a E om W 1 Connect controller M 235 50D Lerner M n na A hi BD5 200 3 unreferenced M 517 PD WES VES eenei M 110 1DG Fo ES unreferenced Bj i a Reference selected axes by moving to E ee i Nea lirit Bet switch Pos lirit Automatic 3 Start up axes r Advanced Restore Help Close Fig 4 Start up controller Step 3 Start up axes shown before referencing The window will reopen at the 3rd step Start up axes where you are given an opportunity to reference the axes connected See Section 4 3 for more information When this window is closed Single axis windows will open for the available axes You may need to resize or move them to see the main window PIMikroMove SM 148E Release 1 0 0 Page 5 Piezo Nano Positioning PI Main Window d Main Window
90. pe is fulfilled The condition involves comparing a specified value with the result of a command that returns one value on one line lt command gt is the command in its full syntax The command must be one that provides a response consisting of one single value on one line lt operator gt is the comparison operator supported are ae lt lt gt gt lt value gt is the value to be used on the right side of the comparison For example with WAC ONT 1 1 you can wait for axis 1 to be on target WAC DIO A 1 waits for the digital input A to be high WAC POS B gt 4 waits for axis B to reach a position greater than 4 PIMikroMove SM 148E Release 1 0 0 Page 23 Main Window Piezo Nano Positioning PI 2 4 2 MEX lt command gt lt operator gt lt value gt Stop macro execution when a condition of the following type is fulfilled The condition involves comparing a specified value with the result of a command that returns one value on one line When the macro interpreter accesses this command for execution the condition is checked If it is true the macro is stopped otherwise the macro execution continues with the next line Later fulfillment of the condition will not in itself trigger any action lt command gt is the command in its full syntax The command must be one that provides a response consisting of one single value on one line lt operator gt is the comparison operator supported are nas
91. reased the error is more quickly corrected However if K becomes too large the mechanical system will begin to overshoot and at some point it may begin to oscillate becoming unstable if it has insufficient damping Proportional gain affects all frequencies e Kiis again factor which is multiplied by the sum of the error signal accumulated over the time for integral control K is allows to eliminate steady state errors but large values or usage without proper damping could cause severe system oscillations Integral action increases gain as frequency decreases e Kais again factor which is multiplied by the rate of change of the following error signal Ky is responsible for system response and may be thought of as electronic damping Increasing the value of Kg increases the stability of the system The steady state error however is unaffected since the derivative of the steady state error is zero Derivative action increases gain as frequency increases and thus amplifies any noise in the error signal WWwW pi wSs PIMikroMove SM 148E Release 1 0 0 Page 50 Appendix WWwW pi wSs Piezo Nano Positioning PI There are many methods to identify the combination of the K K and Ka gain factors which achieves the desired closed loop performance e g elementary methods informal methods quarter wave decay minimum overshoot maximum disturbance rejection and mathematical methods IAE ISE ITAE ITSE Further reading is reco
92. rectories 3 Install the new C 843 host software version by running the Setup Wizard from your update CD 4 f desired move back any configuration files you saved in step 1 WWwW pi ws C 843 MS77E Release 2 5 0 Page 14 Piezo Nano Positioning PI System Description 3 System Description The C 843 Motor Controller is designed for high performance motion control based on the MC2140 MC2120 Advanced Multi Axis Motion Control chipset for detailed descriptions see the Motion Processor manuals on the C 843 CD The board is designed as a 32 bit plug and play PCl bus card compatible with main boards with 3 3 V and 5 V PCI bus slots universal card Read Write operations are controlled via the PCI bus and memory mapped PCI bridge providing fast data transfer for complex motion control The C 8483 provides closed loop digital servo control for a large variety of servo motors It uses incremental encoder position feedback signals Sophisticated trajectory profile and digital servo capabilities are provided for each axis resulting in very low position and velocity tracking errors Axes can be programmed either independently or synchronously to allow advanced multi axis motion such as tracing circular and other complex path profiles For motor amplifier output the C 843 has one on board linear amplifier per motor axis each amplifier is capable of driving a 5 W motor PWM outputs for external amplifiers are also available The c
93. rence Signal Negative End Limit Signal 3 n c 16 n C n c 17 n C 5 n c 18 n C 19 re are T GND 20 8 21 nc nc 7 2 M 5x1 5S Cusing 5 phase stepper motors Motor type 5 Phase stepper motor Type RDM 545 LHA 1 A phase current w o second shaft Connector type at stage Sub D25 m Cable type order C 815 37 SubD25 f to DB15 m Wwww pi ws M 5x1 Series MP 33E Release 4 1 2 Page 21 M 5x1 Stages with Stepper Motors Wwww pi ws Piezo Nano Positioning PI Pin Assignment Phase 1a 14 Phase 1b 2 Phase 2a 5 Phase 5a 18 Phase 5b 6 5 V Supply from Controller 19 Positive End Limit Signal 7 GND 20 Reference Signal 8 Negative End Limit Signal 9 nc 22 nc 10 nc blue yellow E red violet orange brown A Ws Fig 5 Phase wiring diagramm M 5x1 Series MP 33E Release 4 1 2 Page 22 Piezo Nano Positioning PI M 5x1 Stages with Stepper Motors Limit and Position Reference Sensors All sensors used are magnetic field triggered Hall effect sensors usable with bipolar or CMOS circuitry Sensor Specs Supply Voltage Range 4 5 to 24 volts Supply Current 4 5 mA Sink Capability 25 MA Mi2Z655001 Fig 6 M 5x1 5S Limit Sensor Layout decimal places separated by commas in drawing Signal Levels active low Inside allowed travel range 5V Outside allowed travel range GND Wwww pi ws M 5x1 Series MP 33E Release 4 1 2 Page 23 Piezo Nano
94. rence in the reference points when approached from the positive side and from the negative side is about 0 2 mm to 0 4 mm The reference sensor in M 5x1 series stages provides a static signal level which depends on the platform position If the platform is on the positive side the reference signal is 5 V while if the platform is on the negative side the signal level is OV The C 844 DC motor controller offers the option of starting a search run for the reference point using the current reference sensor signal to determine the appropriate direction see MS 52E user manual command reference for the TARGET FIND REF AUTO command C 842 Motor Controllers offer only the FEP and FEN commands to start a search run for the reference signal If the Stage is initially on the positive side the FEN find edge in negative direction command must be used whereas when the stage is in the negative side the FEP command must be used to start the search run in the right direction i e toward the reference point Wwww pi ws M 5x1 Series MP 33E Release 4 1 2 Page 13 Operating M 5x1 Stages Piezo Nano Positioning PI 5 Operating M 5x1 Stages M 5x1 DD series stages have internal linear scales PWM amplifiers and optional motor brakes Individual setting of motion control parameters is required for smooth and optimized movement Incorrect parameter setting may cause severe spindle vibration for details see section 5 2 on page 15 If this
95. responsible for not driving the stage into its limits Add Save adds a new entry to the list of stage types or refreshes an existing entry Note The entries are saved automatically in the controller specific Userstages dat file which is located in the GCSTranslator directory It is not possible to modify parameters stored in the Plstages dat file which contains the factory defined stage settings 3 3 2 Measurement Pane Check the box to end recording automatically the specified amount of time after the motion has finished When unchecked you can set the total time of recording If you are working with the DEFAULT STAGE the step size is in counts otherwise it is in physical units e g millimeter A minus sign in the Step size line reverses the direction of motion Adjust the value according to your specific application With the Move Rel button you can move the stage by the Step size value without recording any data Sample rate defines how many motion processor cycles are skipped until another data point is stored in the controllers internal memory and displayed in the graphics pane afterwards Set to zero except for long recording times 3 3 3 Parameter Tune Pane WWwW pi wSs Moving the sliders changes the P and D parameters Once a slider is activated click on it and you will see a dashed border around it use the right left keys for fine adjustment Use the number fields to the right to define the slider ranges Alternatively
96. rvo 2 Window Maximum travel range in negative direction Invert the reference Has limit switches Motor offset pos Motor offset neg Settle Window PIMikroMove SM 148E Release 1 0 0 PI Comments Limit switches active high active low Indicates the current profile mode Trapozoid S curve or User Profile Mode Servo algorithm 2nd proportional term Servo algorithm 2nd integral term Servo algorithm 2nd differential term Limit on contribution of the 2nd I term Limit switches present absent Page 20 Main Window Piezo Nano Positioning PI Header Comments Settle l Limit Settle time Kvff 3 Window Kvff 3 Velocity feed forward Kaff Acceleration feed forward 2 32 4 Axis Menu Show Single Axis Window Define Home Position Move To Home Position Initialize Axis Clear Error Fig 17 Axis menu The Axis menu can be displayed by clicking the triangle in the first column of the axes grid by right clicking anywhere in the corresponding row or by right clicking on any free area in the Single Axis Window m Show Hide Single axis window This will toggle display of the corresponding Single axis window m Define home position Makes the current physical position the home position of the axis The current position is set to 0 m Move to home position Moves the corresponding axis to its home position by setting the target to 0 m nitialize axis Initialize the corre
97. s cccccceeeeees M 5x1 Series MP 33E Release 4 1 2 Page 1 WWW DpI WwS Contents Pin Assignments 24 Oa IWeESX 1D WIEOX TAD anana arene eee 24 OZ MODO oraa toad sewer odeed eteatvenduaat socnuietsand eaadeatemtantaatiens 25 M 5x1 Series MP 33E Release 4 1 2 Page 2 General Design of M 5x1 Series Linear Stages 29 gt Nano Positioning PI 1 General Design of M 5x 17 Series Linear Stages M 5x1 series linear stages are low profile high accuracy linear translation devices for industrial use and laboratory applications Used in the fields of semiconductor quality control metrology test equipment disk drive test setups and general R amp D tasks the M 5x1 series stages are designed to meet demanding positioning requirements The stages combine a functional flat design to allow multi axis combinations and feature a precision machined base from high density stress relieved aluminum for exceptional stability and minimum weight Precision ground recirculating ballscrews with better accuracy than rolled ballscrews and preloaded nuts guarantee low friction backlash free positioning Versions with integrated linear scale encoder provide 0 1 um minimum incremental motion and 1 um full travel accuracy High precision linear guiding rails with recirculating ball bearings guarantee 1 um 100 mm straightness and flatness All versions are equipped with non contact Hall effect origin sensors and limit switches An optional
98. s 14 System Description 15 Sa Output Current PIMITAON reiret n a a 16 32 Motor Outout ModE Sdan cereale 17 33 On Board MOMOLY srsrrsiga rE a E RTE 18 3 4 Connectors and PINouUtS ccccceeeeeeeeeeceseeteneeteneeseeneeseeetens 18 34 1 Connector LOCATIONS seesi a a 18 942 Motor Connector PINUS erroan 19 340 Digtal VO CONNCCION rendon a a Aa ee 20 S44 AlleaxiS GOMMCCION ensa A 21 3 5 Configuration Settings for Multiple Cards cccccceeeceeeeeees 22 Software Overview 24 AA GENEA prene 24 AVA ACNES G ai naa a N 24 ANZ COMMMMIGCAUON arasin a N 24 ANS Command SES eiaa a T dunn 25 414 PlStages Database ccccccccccccsssseeeecceeseeeeeseeseeeeeeseeeessaes 26 ATS GUN AD BICAUOMS resco esi ease A as 26 42 ToOtSiE adenenastuaeeue marae a nonietaueale 27 Technical Data 28 51 E w LevellnformatON snieni 29 Sd DICE VOLNE S aain Si sexeacen Seats Ret Geeta cuca cecate cae 29 5 12 Analog Amplifier and Brake Control cccccccssseseseeeeeeeeeees 29 5 1 3 Sense of Limit Switch and Reference Signals cc008 29 514 Encoder Signals asic aes eesti Aeron aah eae 29 Contents 5 1 5 Index and Home Reference Signals ccccccsseseeeeseeeseeeees 516 All axis Connector Piezo Nano Positioning PI Introduction 1 Introduction The C 843 is a 2 or 4 channel Motor Controller designed as a PCI plug in board that can be used in any PC with a free PCI slot With the softw
99. s being documented primarily for compatibility and historical reasons The MC DLL also has functions for sending QMC chipset commands directly through to the motion chip The software interfaces recommended for users who program their own applications are the C 843 GCS DLL Windows Dynamic Link Library and the C 843 COM Server for interfacing with VB and Delphi Both have the same structure containing functions methods based on the PI General Command Set GCS The GCS DLL or COM Server handles communications and relieves the user programmer of the details of tasks like referencing the connected stages calculating encoder to physical unit ratios or limit checking The GCS command set itself is independent of the specific hardware the motor controller card or attached stages The GCS commands are described in their own manual SM149E as are the functions of the GCS DLL MS 112E The COM Server does not currently have a dedicated manual it uses the DLL to implement its methods See the VB samples on the CD UP_X_COM_Test UP_XTest vbp and C843_GCS_COM_FirstSteps DemoAppC843 vbp C 843 MS77E Release 2 5 0 Page 25 Software Overview Piezo Nano Positioning PI Because the chipset commands for the DSP can be sent via the GCS DLL as well its complete functionality is available to the programmer 4 1 4 PiStages Database Like most motion controllers the C 843 needs information about the connected stages in order to con
100. s included with the C 843 PM versions which come with different manuals and a different product CD The C 843 is based on a fast DSP processor providing high performance PID motion control with many options for trajectory generation and filter setting The motors can be controlled as to position velocity acceleration and many other motion relevant parameters Incremental rotary encoders or linear scales are used for position feedback To operate the C 843 it must be part of a motion system consisting of a host PC and at least one motorized axis stage The card itself and the appropriate software must be installed in a PC with Windows operating system Win 98 ME NT 2000 XP and a free PCI slot 1 2 Safety Precautions WWwW pi ws NOTE The C 843 Motor Controller Card does not contain any user serviceable parts of adjustment elements DANGER Failure to heed warnings in this manual can result in bodily injury or material damage DANGER Before opening the host PC remove the line voltage connection Heed any warnings provided by the manufacturer of the PC or of other add on cards it may contain C 843 MS77E Release 2 5 0 Page 4 Piezo Nano Positioning PI Introduction T WARNING The C 843 Motor Controller Card is an ESD sensitive electrostatic discharge sensitive device Observe all precautions against static charge buildup before touching this device Avoid touching circuit components pins
101. s possible DANGER Before opening the host PC remove the line voltage connection Heed any warnings provided by the manufacturer of the PC or of other add on cards it may contain WWwW pi ws C 843 MS77E Release 2 5 0 Page 22 System Description Piezo Nano Positioning PI Place the file EPROM exe from the C843 EPROM_ Tool directory of the C 843 distribution CD on a bootable MS DOS diskette Power down the PC and disconnect it from the AC power Remove any other C 843 cards currently in the PC and install the card to be reprogrammed For programming only one C 843 at a time may be in the PC Boot the PC from the diskette It may be necessary to change settings in the BIOS Setup in order to do this Start EPROM exe and press a key from 1 to 8 to program the corresponding number as the card number in the EEPROM on the card The card now has the specified identification number If you want to program another card disconnect the PC from the AC power and repeat steps 3 to 6 After programming all the cards whose seitings need to be changed disconnect the PC from the AC power and install all the cards WWwW pi ws C 843 MS77E Release 2 5 0 Page 23 Software Overview Piezo Nano Positioning PI 4 Software Overview With the C 843 Motor Controller card all motion of the connected stage is software controlled To offer maximum flexibility software interfaces at a number of different levels are prov
102. s until the next power on off cycle If you want to store the changed settings see Add Edit User Stage Type On the right side there is a small toolbar with the following functions to show and hide columns re sort the rows and otherwise configure the displayed values Select columns to display Reorder rows displayed Help for Axes tab card Fig 14 Axes tab card vertical tool bar JEE PIMikroMove SM 148E Release 1 0 0 Page 16 Piezo Nano Positioning PI Main Window 2 3 1 Select Columns to be Displayed Select Columns i x Displayed Columns Hidden Columns Add Fos limit Remove gt Ref switch Neg lint Find neg lir Find reference Dis d e La OF Cancel Fig 15 Select columns Here you can select which axis related fields are to be displayed You also can change the order of the displayed columns with the arrow buttons top is left bottom is right Fields depending on axis motion are updated when the window is active 2 23 2 Sort rows The Sort rows window allows FR x hanging the order of th oe ee M 236 50D on 643 on C843 Board 1 BIS pie eGo ws olny METE 200 on EEN on EET Board controller will sort the axes 3 M 511 PD on 0 843 on 0 843 Board 1 first by controller and then 4 M T10 10G on 0 843 on 0 645 Board 1 alphabetically by name The arrow buttons allow moving the selected axis up or down in the list LG Soter corate KJ Sort by Con
103. sponding axis and can sometimes move it off limit a switch WWwW pi wSs PIMikroMove SM 148E Release 1 0 0 Page 21 Main Window Piezo Nano Positioning PI 2 4 WWwW pi wSs m Clear error Shows current error code with explanation and if possible returns the axis or axes to a non error state Host Macros Tab Card PIMikroMove R _ O x Connections C 843 Board 1 Tools Help aly il flenter help search here O F K g xes Host macros Select controller C 843 on C 843 Board 1 Macro NEWMAC Cee S iamo Start Repeat fi zl Delay ms ja Open host macro files NHEWMAC not saved Close all lose selected Fig 18 Host macro tab card with no macros open Host macros allow you to store a sequence of commands in a text file for later execution by a connected controller The left side of the panel has a list with the currently open host macro files the right pane is a text field where the commands can be composed and changed Toolbar buttons are available for creating opening and saving the macro command sequences You can also specify that the macro command sequence will be executed repeatedly a certain number of times when the macro is run Repeat A fixed execution delay can also be specified between the command lines in the Delay ms field PiMikroMove will then wait that amount of time between sending each line Note On Windows systems the time resolu
104. t 0 Input 1 Input 2 GND Input 3 Input 4 Input 5 GND Input 6 Input 7 Go Po N h D NIOJ gt ee h O gt 00 O O1 10 11 OD _s N s co 2 z N Q Z U h D NO Output 0 Output 1 Output 2 GND Output 3 Output 4 Output 5 GND Output 6 Output 7 i i CO N O1 CO CO NO NO N l O O PO TPO TP TR RD KILO M oO l l N _ k NO NO O1 Q No O1 z Q Z U NO OD no connection C 843 MS77E Release 2 5 0 Page 20 System Description Piezo Nano Positioning PI 2 4 4 All axis Connector WWwW pi ws This connector 16 pin IDC on the card see Fig 3 on p 18 makes other digital I O lines for all axes available Axis In AIN pins and Axis Out AOUT pins They offer direct access to the motion processor and can be programmed for solving multiple axis triggering tasks See the Motion Processor User s Guide p 46 ff for details By default these lines are not brought out on a bracket If you need an appropriate connector and or bracket contact your PI sales engineer or write info pi ws AIl Axis Connector Function on Board Axis In amp Axis Out IDC16 header pins Pin AOUT1 GND AOUT2 GND AOUT3 GND ji AOUT4 GND 00 AIN1 G Z O o_o o_o AIN2 ND G Z O Q3 AIN3 p Q Z 0 Ol AIN4 GND O C
105. t output current limitation Nevertheless the user has to ensure that the total current does not exceed the capability of the PC power supply 1 3 Unpacking WARNING The C 843 Motor Controller Card is an ESD sensitive electrostatic discharge sensitive device Observe all precautions against static charge buildup before touching this device Avoid touching circuit components pins and PCB traces Discharge any static charge you may have on your body by briefly touching a conductive grounded object before you touch any electronic assembly Pose PCBs only on conductive surfaces such as ESD safe transport containers envelopes foam Electronic subassemblies must always be kept and transported shipped in conductive packaging Unpack the C 843 Motor Controller Card with care Compare the contents against the sales contract and packing slip The following components should be included m C 843 x1 Motor Controller Card m Separate mounting bracket with sub D 25 connector for the digital I O lines m 5 25 inch style 4 wire power Y connector m With C 843 41 cards only separate mounting bracket with two 15 conductor sub D connectors for motors 3 and 4 m C 8483 distribution CD containing host software hardware driver and all manuals as PDF files for an overview over the host software see p 24 WWwW pi ws C 843 MS77E Release 2 5 0 Page 6 Piezo Nano Positioning PI Introduction m Standard version of the C 843 User Man
106. t version of PlStages dat from www pi ws see p 40 Version info Displays version info of the software used for the associated controller Close connection Closes the connection to the associated controller or network The associated controller menu which will disappear completely from the menu bar can be restored using the Connection New menu sequence PIMikroMove SM 148E Release 1 0 0 Page 10 Main Window Piezo Nano Positioning PI 2 1 3 Tools Menu wwwWw pi ws Tools Ee Move multiple axes CTRL M lt Demo Motion CTRL D w Stage Editor CTRL 5 Show Position Pad CTRL P Show command entry CTRL C Show Single Axis Window Show Digital IO Window Show Analog Input winda Preferences Page Setup Fig 10 Tools menu Move multiple axes Opens dialog for initiating a synchronous move of more than one axis Note the convenient shortcut to open reopen this window M See Section 3 1 p 32 for details Demo Motion Opens the Demo Motion window See Section 3 5 p 39 for details Stage Editor Starts the P StageEditor From here you can inspect the parameters of all PI stages in the database as well as define and store special parameter sets for new or non standard stages See the P StageEditor Manual for details Show Position Pad Displays the Position Pad window in which it is possible to control two axes using the mouse and or joystick See Section 2 6 p
107. t window click Finish Note that this procedure is required even though the hardware driver was already installed with the setup procedure in Section 2 1 3 Connect the stages to the sub D15 connectors in the mounting bracket s Be sure to note the channel designations the labels on the brackets correspond to the axis or motor numbers used in P MikroMove Other software may count starting from 0 instead of 1 4 If you have chosen the corresponding option PIMikroMove will now start as soon as the C 843 Device Driver is running If not you can start it manually and use its buttons and menus to command the connected axes See the PiMikroMove software manual for details C 843 MS77E Release 2 5 0 Page 13 Quick Start Piezo Nano Positioning PI 2 4 Uninstalling and Updating NOTE Software that is no longer supported e g P Smart may be removed by the uninstall procedure and cannot be reinstalled from the new CD To uninstall the C 843 host software use the Start gt Settings gt Control Panel gt Add Remove Programs Software menu sequence and follow the on screen instructions To update the C 843 host software proceed as follows 1 If you want to keep any existing configuration files save them under new names or in a new directory 2 Uninstall the old C 843 host software version using the Start gt Settings gt Control Panel gt Add Remove Programs Software menu sequence This also removes unneeded di
108. th this tool you can easily determine well suited parameters for P I D servo controllers See Section 3 3 p 36 for more information Profile Generator Present if supported by the controller and required DLL found Opens a series of dialogs for defining and executing certain types of user defined motion profiles on two axes Because the profiles are stored and executed on the controller side of the interface the time resolution is much finer than when setting targets one at a time by command or host macro See Section 3 2 p 32 for details WWwW pi wSs PIMikroMove SM 148E Release 1 0 0 Page 9 Main Window WWwW pi wSs Piezo Nano Positioning PI Edit user stages data Opens the P lStageEditor with the UserStages dat file for the associated controller If you wish to examine entries in the read only PlStages dat open the PIStageEditor from the Tools menu See the PlStageEditor Software Manual for details Note that after leaving the Stage Editor any new or changed entries must be connected to PiMikroMove in order to take effect Add Edit User Stage Type Here the current settings of a stage can be stored as a new stage type in the UserStages dat file without the intricacies of the P StageEditor f the stage type already exists in the user section its settings will be overwritten when the new ones are saved You cannot change parameters for stages in the PI section but you can download and install the lates
109. tion is about 10 ms so you will notice no difference between a delay of 5 and 10 ms PIMikroMove SM 148E Release 1 0 0 Page 22 Main Window 2 4 1 WWwW pi wSs Piezo Nano Positioning PI The individual lines of the macro are sent as is with no syntax checking before being sent on except for the four special commands that are interpreted by P MikroMove directly m WAC ONT lt command gt lt operator gt lt value gt waits until the specified axis condition occurs see 2 4 1 m MEX lt command gt lt operator gt lt value gt stops macro execution when a given condition is fulfilled see 2 4 2 m DEL lt delay in milliseconds gt waits for the specified time m MAC START lt name gt calls another host macro MAC NSTART lt name gt lt rp_val gt calls another host macro and runs it ro_val times see 2 4 3 When a command starts a longer process on the controller e g a move to the reference switch the execution of the macro Is paused as long as this takes place You do not need to use WAC to wait for such a process to finish In this version of P MikroMove all commands in a given host macro must address the same controller or controller network It is not currently possible to address controllers on different interfaces inside one macro even if the connections are open and the axis identifiers unique WAG lt command gt lt operator gt lt value gt WAit until a given Condition of the following ty
110. totune Simulation time m 400 Kotor limit E K000 For additional manual tuning methods and a description of the servo algorithm used see the Appendix p 50 ff Preferences Controls the behavior of the software user interface In particular the requirement for confirmation of various actions can be turned on or off Note that the confirmation dialog boxes themselves have a checkbox to turn off future appearances of the dialog but the Preferences window is the only place to turn them back on PIMikroMove SM 148E Release 1 0 0 Page 38 Additional Windows Piezo Nano Positioning PI 3 5 wwwWw pi ws xi Some user choices cannot be reversed in the way they were made those choices can be reversed here Show confirmation dialog before closing all connections Show confirmation dialog before closing single connection Show confirmation dialog before restoring position values Start referencing immediately after dialog appearance Show confirmation dialog before stopping all ases at exit Show confirmation dialog before selecting Relative moves only Show warning when velocity is set to 0 0 Show warming first tine Command entry window i shown Show warning when DOEFAULT STAGE ts selected Show warning before user profile mode motion is started ESIKVKAESEA KN EAKA OF Cancel Fig 29 Preferences window Demo Motion Opens the Demo Motion window xi Min position Max positio
111. trol them correctly To keep you from having to enter all these values whenever a new stage is connected most PI host software reads them from data files Two types of DAT files are recognized protected read only DAT files with data provided by PI and User DAT files containing special parameter sets created or customized by the user See the P MikroMove and P iStageEditor software manuals for more information The most important protected DAT file is P Stages dat It contains all PI standard stages and installs automatically with the host software If the PI standard stage you want to use is not available in your P Stages dat version download the latest PlStages dat from the PI website for detailed instructions see the PiMikroMove manual In case you want to operate a stage with other parameters than stated in the P Stages dat or if you have a customized stage use the controllerJSERSTAGES DAT file Add your stage to this DAT file which is also installed with the host software but is initially empty See the P MikroMove manual for details 4 1 5 GUI Applications WWwW pi ws Use of a number of Graphic User Interface applications is supported for the communication between the user or operator and the system They are PiMikroMove LabView QuickRun as well as the specialized tools such as the State Viewer and the P StageEditor All these GUIs communicate with the hardware using the GCS DLL The P Smart operating program has
112. troller Ok Cancel Fig 16 Sort Rows WWwW pi wSs PIMikroMove SM 148E Release 1 0 0 Page 17 Main Window 2 3 35 Fields Displayed WWwW pi wSs Header Name Stage Controller Target lt lt Step size gt gt Position Stop State Min position Max position Velocity Max velocity Servo Pos limit Ref switch Neg limit Find neg lim PIMikroMove SM 148E Release 1 0 0 Piezo Nano Positioning PI Comments Axis designator Stage type Controller or controller network to which the axis is connected Current target position Move to minimum position Perform relative step in negative direction Size used for relative steps Perform relative step in positive direction Move to maximum position Current position Click to stop axis State of axis Minimum position Maximum position Velocity to use during moves Limit for velocity Servo state Indicates whether positive limit signal is active Indicates whether current position is above or below reference point Indicates whether negative limit signal is active Move in negative direction until negative limit switch trips then back off limit can be used to reference an axis Page 18 Main Window Header Find reference Find pos lim P Term l Term D Term Limit Kvff Velocity feed forward Kout output scale factor Bias motor bias Maximum position error Maximum value for th
113. ual this document in printed form m User Manual for P MikroMove software in printed form Inspect the contents for signs of damage If parts are missing or you notice signs of damage contact PI immediately Save all packing materials in the event the product needs to be reshipped 1 4 Additional Components Depending on your application you might need the following unincluded items for use with the C 843 Controller Card m C 843 JS option for use with LabView VIs and PiMikroMove operating software joystick and sound card with game port m C 842 AP1 PWM to analog adapter box for driving analog stages with high power consumption using an external PWM amplifier Contact your PI sales engineer or write info pi ws if you need additional components WWwW pi ws C 843 MS77E Release 2 5 0 Page 7 Introduction Piezo Nano Positioning PI 1 5 System Requirements To start working with the C 843 Motor Controller card your motion system needs to meet the following conditions m APCwith a free PCI slot to install the C 843 m Windows operating system Win 98 ME NT 2000 XP m One or more motorized positioners with incremental encoders e g a linear rotary or voice coil stage or a DC Mike controlling a PlLine piezo motor requires special software drivers included and described on the piezomotor version of the product CD C 843PM CD m Cables to connect stage and controller PI cable order numbers C 815 35 or C 81
114. w connection Fig 12 Main window tool bar New Connection Show the Start up Controller dialog to connect another controller or controller network to P MikroMove See Section 4 p 41 ff for details Move multiple axes Opens a dialog where targets and velocities for all on target axes can be entered and the move of all desired axes started at the same time See Section 3 1 p 32 for details Demo Motion Opens a dialog where ranges can be entered and random moves in that range started for demonstration purposes See Section 3 5 p 39 for details PIStageEditor Opens the P StageEditor where the stage parameters for all PI stages in the PlStages dat and in the UserStages dat data files can be examined User stage parameters can also be edited See the P StageEditor Manual for details WWwW pi wSs PIMikroMove SM 148E Release 1 0 0 Page 14 Main Window Piezo Nano Positioning PI Position Pad Displays the Position Pad window in which it is possible to control two axes using the mouse pointer to specify the target positions and or the joystick to vary the velocities See Section 2 6 p 29 for details Show command entry Opens the Command entry window where GCS ASCII commands can be typed in directly While this window is open PiMikroMove performs no other communication with the controller giving the user complete control As a result other windows are inactive and not refreshed See Section 2 5 p 27 f
115. wer axis to give the speed at which to trace the figure after start up and before slow down Cannot be gt 1 factor by which the maximum acceleration is further reduced Cannot be gt 1 factor by which the maximum deceleration is further reduced Cannot be gt 1 close the window and after optional confirmation start the motion PIMikroMove will send the appropriate GCS commands to the controller the window is closed without any motion being performed In the general case the angular position is the phase angle of the corresponding point on one of the single axis sinewave components divided by that axis Lissajoux factor www pi ws PIMikroMove SM 148E Release 1 0 0 Page 35 Additional Windows Piezo Nano Positioning PI 3 3 PI Tuning Tool wwwWw pi ws EHI Tuning Tool Axis 4 ioj x Axes olola i Cursor 1 0 554904 x 0 00000 Y 0 00030 0 433768 Cursor 2 x 0 00000 Z IEA Y 0 00030 8 m Diff Cursor ay SS 5 0 191496 0 00000 Y 0 00000 0 0703604 0 0507754 0 108 158 216 316 324 474 432 632 540 79 Time in milliseconds r Stage setup Measurement Parameter tune Stage type I Record until end of movement Servo loop Profile generator M 110 1DG Time after end of move sec fo PTem 30 0 j 10 5 p otor mode Sample rate cycles jo l Tem 50 0 c m
116. will disappear Search for controller software Re scan the local computer for PI software This can be done after you have installed new controller software while PiMikroMove is running Exit Close all connections and exit P MikroMove 2 1 2 Controller Menu For each connected controller or network of controllers there will be one controller entry in the menu bar The text will indicate the class of controller and the items on the associated menu will depend on the controller class For a C 843 controller the menu appears as shown Note that some entries may be grayed out if the Command entry window iS open WWwW pi wSs PIMikroMove SM 148E Release 1 0 0 Page 8 Main Window Piezo Nano Positioning PI 7 843 Board 14 Select connected stages Start up axes Tune sages Profile Generator Edit user stages data dd fEdit user stagetype version info Close connection Fig 9 Controller menu for a C 843 controller Select connected stages Opens the Controller startup window at the Select stages step Here you can tell the controller and the software what stages are connected With most controllers one entry is required for each motion axis See Section 4 2 for more information Start up axes Opens the Controller startup window at the Start up axes step See Section 4 3 p 43 for more information Tune stages Opens the P TuningTool for the associated controller Wi
117. xis window The Single axis windows show a single axis and allow to control target velocity and step size If you right click on any free area in the window you can access the Axis Menu for the axis displayed in the window The Single axis windows can be docked to the left or right border of the main window see Fig 6 WWwW pi wSs PIMikroMove SM 148E Release 1 0 0 Page 31 Additional Windows Piezo Nano Positioning PI at Additional Windows 3 1 3 2 wwwWw pi ws Note that windows which are in any way controller specific are accessible from the corresponding controller menu rather than from the Tools menu Some can also be opened with a key combination or toolbar button Move Multiple Axes x Anis Target position Velocity 2 M 605 200 38 i EE M 4 M 110 1DG s fi coe Fig 23 Move multiple axes The Move multiple axes window allows starting a move of several axes by clicking a single button You can configure which axes will be moved their targets and velocities The start of the moves will not be synchronized if they are connected to different controllers Axes connected to the same controller will be synchronized to the extent the controller Supports synchronous moves Profile Generator The Profile Generator menu item is on the controller menu of supporting controllers e g C 843 It gives access to some of the complex motion profile functions of Supporting controllers if the r
118. you can enter values directly in the left handed number fields A value is not adopted until you press Enter If the value is outside of the slider range the range limit will be set to this new value Load factory settings retrieves the stage specific values from the pistages dat file Load default settings calls the parameters used for the DEFAULT STAGE PIMikroMove SM 148E Release 1 0 0 Page 37 Additional Windows Piezo Nano Positioning PI 3 3 4 Toolbar S Menus Use the buttons from the toolbar to show hide the cursors and the cursor information pane and to choose the tool used within the graphics pane respectively A short description will be displayed if the mouse cursor hovers over a button In the cursor information window the absolute values of the difference are displayed You cannot move the cursors to negative time values With the Axes menu you can change the current axis and arrange the windows for the individual axes It is recommended to not move several axes at the same time 3 3 5 Autotune Option 3 4 WWwW pi wSs Automatic tuning is available as a password protected option which can be purchased before or after initial delivery To use it to calculate P and D values automatically click the Autotune button in the lower right and enter your password Autotuning will of course move the axis Result P Tenm 603 l Term FR D Term 515 Cancel Fig 28 Example of autotune results Au

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