ANT130-5-V Stage User`s Manual
Contents
1. 4 9 0 0000000 16 3 5 Basic 22222222 4 4 495 4 17 3 6 Limit Switches 19 3 6 1 Limit Switch 2 4 4 4240 2 2 2 000 19 3 7 Standard Stage Wiring teen 20 3 8 Vacuum 20 2 2 2 2 2 20 02 22 2 2 23 3 8 1 Special 4 23 Chapter 4 Maintenance 25 4 1 Service and Inspection Schedule 25 4 2 Cleaning and Lubrication ccc n RR RR RR Rr rrr 26 4 2 1 Recommended Cleaning 26 4 2 2 Important Notes on 0 0 0202 220222 26 4 2 3 Lubrication and Cleaning 2 41 26 Appendix A Warranty and Field 27 Appendix B Technical 29 gt D ML t eee A Ln 31 Reader s Commen s eee 33 www aerotech com lii Table of Contents ANT130 5 V Series Stage User s Manual www aerotech com ANT130 5 V Series Stage User2. 130 5 442 4 17 Table 3 3 Motor Specifications aeee 18 Table 3 4 Motor and Feedback Wiring Pinout 2 44 4 4 2 22 Table B 1 Current Changes 1 01 00 0 ana 29 Table B 2 Archived 1 1 1 7 1 0 30 www aerotech com vii List of Tables ANT130 5 V Series Stage User s Manual viii www aerotech com ANT130 5 V Series Stage User s Manual Overview Chapter 1 Overview This manual describes Aerotech s ANT130 5 V series positioning stage Figure 1 1 shows a typical ANT130 5 V vertical lift stage This chapter introduces standard and optional features of the ANT130 5 V explains the model numbering sys tem and gives general safety precautions Figure 1 1 ANT130 5 V Vertical Lift Stage N OTE Aerotech continually improves its product offerings and listed options may be superseded at any time Refer to the most recent edition of the Aerotech Motion Control Product Guide for the most current product information at www aerotech com www aerotech com Chapter 1 1 Overview ANT130 5 V Series Stage User s Manual 1 1 Standard Features The ANT lift stages incorporate linear cross roller bearings a linear motor a non contact linear encoder and constraint flexures into a compact three piece wedge design The combination of t
3. 967 6870 101 Zeta Drive Pittsburgh PA 15238 U S A service aerotech com
4. BLMC 142 17 model 9 brushless linear 2 Motor 17 C Multi axis 26 14 E 26 operating conditions 16 D Optional 2 Declaration of Incorporation 8 1 4 P E Preparing the Mounting Surface 11 Electrical 14 S electrical 16 safety 6 Encoder Resolution 16 i Securing the Stage to the Mounting Surface 12 ENCOdENS Loria sene 20 service 25 Environmental 15 Specifications 17 Standard Features 2 16 I temperature 16 inspection
5. and have adequate stiffness in order to achieve the maximum performance from the ANT130 5 V When an ANT130 5 V stage is mounted to a warped surface the stage can be distorted as the mounting screws are tightened see Figure 2 2 Any distortion will decrease the over all accuracy of the stage Adjustments to the mounting surface must be done before the stage is secured AEROTECH AEROTECH 1305 gt ANT130 5 V 2 Mounting to a Curved Surface Exaggerated Mounting to a Flat Surface AEROTECH ANT130 5 V AEROTECH ANT130 5 V Figure 2 2 Mounting to a Flat Surface NOTE Tomaintain accuracy the mounting surface should be flat within 5 um over the entire stage foot print NOTE The stage base is precision machined and verified for flatness prior to stage assembly at the fac tory If machining is required to achieve the desired flatness it should be performed on the mounting sur face rather than the stage base Shimming should be avoided if possible If shimming is required it should be minimized to improve the rigidity of the system www aerotech com Chapter 2 11 Installation ANT130 5 V Series Stage User s Manual 2 4 Securing the Stage to the Mounting Surface The ANT130 5 V is designed to be mounted using four M6 X 10 mm or 1 4 20 X 1 2 in socket head cap screws Using the specified screw length will guarantee a minimum of 1 5x diameter thread engagement Torque the mounting screws to 5
6. e s eic oes ESSE 2 1 1 2 Model 4244 22 2 2 3 12 DIMENSIONS ss ca co een Ce Rad ne Da do 4 1 3 Safety Procedures and Warnings sees ennen eee 6 1 4 EC Declaration 22 1 4 1 7 8 Chapter 2 Installation 9 2 1 Unpacking and Handling the 22222222 2 2 2 2 42 9 2 2 Shipping 2 22222222 22 2 2 2 2 4 02 222 2 22222 10 2 3 Preparing the Mounting 4 11 2 4 Securing the Stage to the Mounting 12 2 5 Attaching the Payload to the Stage 13 2 6 Electrical 2 2 2 2 2 4 14 Chapter 3 Operating 15 3 1 Environmental 444 15 3 2 Accuracy and Temperature 224 16 3 3 Encoder Resolution 16 3 4 Flexure
7. for further information regarding stages that are otherwise configured Aerotech motion control systems are adjusted at the factory for optimum performance When the ANT130 5 V series stage is part of a complete Aerotech motion control system setup involves connecting a stage and motor combination to the appropriate drive chassis with the cables provided Connect the provided cables to the motor and encoder connectors on the stage the number and location of the connectors can vary depend ing on the options purchased Labels on the drive indicate the appropriate connections Refer to your drive manuals and documentation for additional installation and operation information In some cases if the sys tem is uniquely configured a drawing showing system interconnects is supplied An integral linear motor comes mounted to all ANT130 5 V stages The electrical wiring from the motor and encoder are integrated into two main connectors at the factory Refer to Section 3 7 for standard motor wir ing and connector pin outputs Never connect or disconnect any electrical component or connecting cable while power is applied or serious damage may result WARNING The stage s protective ground is integrated into the motor and encoder connector If you are using cables other than those provided by Aerotech you must connect the pin listed as the ground in Section 3 7 to a ground connection WARNING 14 Chapter 2 www aerotech com ANT130 5 V Se
8. schedule 25 U L Unpacking and Handling the Stage 9 limit 19 Linear Cross Roller Bearings 2 EC vacuum 2 lubricants vacuum preparation 23 26 vacuum 23 www aerotech com Index 31 ANT130 5 V Series Stage User s Manual Index 8 6 WINING 19 32 Index www aerotech com Reader s Comments ANT130 5 V Series Stage Manual P N EDS154 November 5 2010 Revision 1 01 00 Please answer the questions below and add any suggestions for improving this doc ument AEROTECH Is the manual Adequate to the subject Do Well organized E i Clearly presented Well illustrated FS RA How do you use this document in your job Does it meet your needs What improvements if any would you like to see Please be specific or cite examples DO T SmwPeWbes Nmep o me seria erp Name Aerotech Subsidiary Email Order Mailyourcommentsto Farto Aerotech Inc 412
9. stage should be retained for the lifetime of the stage A DANGER gt DANGER gt DANGER gt DANGER WARNING WARNING WARNING To minimize the possibility of electrical shock and bodily injury or death disconnect all elec trical power prior to making any electrical connections To minimize the possibility of electrical shock and bodily injury or death when any electrical circuit is in use ensure that no person comes in contact with the circuitry when the stage is connected to a power source To minimize the possibility of bodily injury or death disconnect all electrical power prior to making any mechanical adjustments Moving parts of the stage can cause crushing or shearing injuries All personnel must remain clear of any moving parts Improper use of the stage can cause damage shock injury or death Read and understand this manual before operating the stage If the stage is used in a manner not specified by the manufacturer the protection provided by the stage can be impaired Stage cables can pose a tripping hazard Securely mount and position all stage cables to avoid potential hazards Chapter 1 www aerotech com ANT130 5 V Series Stage User s Manual Overview Do not expose the stage to environments or conditions outside the specified range of oper ating environments Operation in conditions other than those specified can cause damage to the equipment The stage must be m
10. the temperature listed on the accuracy plot included with the stage the accuracy of the stage will change by 0 75 ppm C from the center of travel For calibrated PLUS stages Aerotech con trollers can adjust the calibration based on the temperature of the environment Contact Aerotech for more details 3 3 Encoder Resolution The encoder in the ANT 130 5 V has 20 um fundamental resolution The encoder reads the horizontal drive wedge motion not the vertical tabletop motion This increases the fundamental resolution seen at the table top The angle of the drive wedge is 12 93 which results in a fundamental encoder resolution of 4 59 um The fundamental resolution is not the same as the electrical resolution The encoder signal is multiplied inside Aerotech s controller to yield a much smaller resolution Consult the system documentation included with the stage to determine this value The mechanical resolution which is listed in the stage specification table in Section 3 5 is distinct from the electrical and fundamental resolution It is the smallest motion increment Aerotech can consistently meas ure using an external measurement device such as a laser or a capacitance probe The mechanical res olution can never be smaller than the electrical resolution of the stage 3 4 Flexure Handling The ANT 130 5 V stage uses flexures to laterally constrain the tabletop so it will move vertically as the drive wedge moves horizontally The f
11. 3 6 Limit Switches ANT130 5 V stages have integral EOT end of travel limit switches The limit switches signal when the stage has reached its maximum useable travel distance in both directions 3 6 1 Limit Switch Wiring Limit switches are open collector TTL compatible devices that change output states when the stage approaches its maximum travel distance Since they are open collector devices they may be interfaced to 24 Volt logic inputs 4Du 25Du Connectors al it Single 25Du Connector 24 VIO 5 VDC Common 24 GRN ANT130 5 V 24 WHT CW Limit N C Switch Controller N C Switch 24 GRY CCW Limit Figure 3 1 ANT130 5 V Limit Switch Wiring The input to the controller is seen as a logic 0 typical 0 4V when no limit condition is present When the limit switch is activated a 5V source through a pull up resistor on the controller causes a logic 1 typically 4 8 5 V to be seen by the controller input See Figure 3 1 for a diagram of limit switch wiring www aerotech com Chapter 3 19 Operating Specifications ANT130 5 V Series Stage User s Manual 3 7 Standard Stage Wiring Stages fitted with standard motors and encoders come from the factory completely wired and assembled For reference connector pin outputs and general wiring information is given in 3 7 and the following figures Pin outputs are defined in Table 3 4 N OTE Refer to the other documentation accompanyi
12. 4 N m 4 ft lb There are two counterbored mounting patterns available 50 X 125 mm and 90 X 120 mm When the stage is centered the wedge will block access to the mounting holes Drive the stage to either end of travel to expose the mounting holes Alternately if the stage has not been powered up yet access the holes by pushing down on the table top and pulling up on an M6 screw threaded into the table top There is a gap between the through holes in the cover and the mounting holes which can make inserting the mounting screws challenging You can remove the cover of the stage to more easily access the mounting holes Replace the cover immediately afterwards to prevent damage to the stage Take special care not to touch or mark the flexures in any way Any bends dings or scratches could cause them to fail prematurely The stage must be mounted securely Improper mounting can result in injury and damage to the equipment WARNING If you remove the cover of the stage high magnetic fields at the ends of the magnet tracks will be exposed Keep metal objects away from the ends of the magnet tracks DANGER NOTE Donot attempt to manually move the stage if it is connected to a power source G O a Tabletop Down Figure 2 3 Mounting Hole Locations 12 Chapter 2 www aerotech com ANT130 5 V Series Stage User s Manual Installation 2 5 Attaching the Payload to the Stage To prevent damage to the stage or parts test th
13. ANT130 5 V Stage User s Manual P N EDS 154 Revision 1 01 00 Dedicated to the Science of Motion Aerotech Inc 101 Zeta Drive Pittsburgh PA 15238 Phone 412 963 7470 Fax 412 963 7459 www aerotech com AEROTECH Product Registration Technical Support Revision History Register online at http www aerotech com prodreg cfm United States Headquarters Phone 412 967 6440 Fax 412 967 6870 Email service aerotech com United Kingdom Phone 44 118 940 9400 Fax 44 118 940 9401 Email service aerotech co uk Germany Phone 49 911 967 9370 Fax 49 911 967 93720 Email service aerotechgmbh de Japan Phone 81 0 47 489 1741 Sales Phone 81 0 47 489 1742 Service Fax 81 0 47 489 1743 Email service aerotechkk com jp China Phone 852 3793 3488 Email saleschina aerotech com Revision 1 01 00 November 5 2010 Revision 1 00 00 April 12 2010 Product names mentioned herein are used for identification purposes only and may be trademarks of their respective companies Aerotech Inc 2010 ANT130 5 V Series Stage User s Manual Table of Contents Table of Contents Tableor Contenis 22 es acne since iii LiStiOf Figures ERR EE V Eist or Tables cessa ere o LRL vii Chapter 1 Overview 1 1 1 Standard 2 2 4 44 44 1 2 LA Optional Features eile ec od SEMI
14. The optimal operating humidity is 50 percent RH Indoor use only Do not expose the stage to environments or conditions outside the specified range of oper ating environments Operation in conditions other than those specified can cause damage to the equipment WARNING www aerotech com Chapter 3 15 Operating Specifications ANT130 5 V Series Stage User s Manual 3 2 Accuracy and Temperature Effects The accuracy specification of ANT130 5 V stages is measured at the center of travel 25 mm above the table top with the stage in a horizontal position The stage is assumed to be fully supported by a mounting surface meeting or exceeding the specification in Section 2 3 Extreme temperature changes could cause a decrease in performance or permanent damage to the stage Aerotech stages are designed for and built in a 20 C 68 F environment Any deviation from standard oper ating temperature will affect stage accuracy The severity of temperature effects on all stage specifications depends on many different environmental conditions including how the stage is mounted Contact the fac tory for more details The ANT130 5 V encoder scale is mounted on glass and measures the linear travel of the wedge The ther mal expansion coefficient of the glass is 3 25 ppm C Translated through the wedge angle of 12 93 it becomes an effective thermal expansion coefficient of 0 75 ppm C As the temperature of the operating environment changes from
15. ades standard accuracy and high accuracy PLUS The high accuracy grade offers a dramatic improvement for more demanding applications See Section 3 5 Basic Specifications for more details ANT130 5 V stages come standard with a single 25 pin D connector however there is the option to have a 4 pin hi power D and 25 pin D connector for applications that require bus voltages greater than 80 V For vacuum applications two preparation options are available one for low vacuum environments down to 10 torr and the other for high vacuum 1073 to 10 torr A mounting plate is also available for customers who wish to mount the ANT130 5 V to a standard grid pat terned surface The mounting plate will accommodate a 25 mm or 1 in grid pattern 2 Chapter 1 www aerotech com ANT130 5 V Series Stage User s Manual Overview 1 1 2 Model Numbers Stage model number example ANT 130 5 V PLUS 25DU NONE The tables below list the available options in the order they appear in the example above Aerotech con tinually improves its product offerings and listed options may be superseded at any time Refer to the most recent edition of the Aerotech Motion Control Product Guide for the most current product information at www aerotech com Table 1 1 Model Numbering System for ANT130 5 V Stages ANT130 5 V Series Vertical Lift Stage ANT130 5 V 5 mm travel stage with linear motor and limits ANT130 5 V PLUS 5 mm travel stage with linear motor and limits an
16. ating Specifications ANT130 5 V Series Stage User s Manual Table 3 3 Motor Specifications Performance Specifications 1 5 Continuous Force No cooling 2 N Ib 23 0 5 2 Continuous Force 1 4 bar 20 psi 2 N Ib 40 5 9 1 Peak Force N Ib 161 9 36 4 Electrical Specifications Winding Designation BEMF Constant Line Line Max Vim s Vlin s 9 00 0 23 Continuous Current No cooling 2 94 2 08 Continuous Current 1 4 bar 20 psi 2 5 17 3 66 Peak Current Stall 3 20 68 14 62 Force Constant Sine Drive 96 7 83 1 76 1107 249 Motor Constant 2 4 3 35 0 75 Resistance 25 C Line Line Inductance Line Line 0 70 Do 1 Thermal Resistance No cooling 2 12 in s mH C W Maximum Bus Voltage 160 Mechanical Specifications Air Flow 20 psi m s SCFM 1 5x103 3 2 Magnetic Pole Pitch 16 00 0 63 1 Performance is dependant upon heat sink configuration system cooling conditions and ambient temperature 2 Values shown 100 C rise above a 25 C ambient temperature 3 Peak force assumes correct rms current consult Aerotech 4 Force constant and motor constant specified at stall 5 All performance and electrical specifications 10 6 All Aerotech amplifiers are rated Apk use torque constant in N m Apk when sizing 18 Chapter 3 www aerotech com ANT130 5 V Series Stage User s Manual Operating Specifications
17. ct s must be accompanied by a return authorization number The return authorization number may be obtained by calling an Aerotech service center Products must be returned prepaid to an Aerotech service center no C O D or Collect Freight accepted The status of any product returned later than 30 days after the issuance of a return authorization number will be subject to review After Aerotech s examination warranty or out of warranty status will be deter Returned Product War mined If upon Aerotech s examination a warranted defect exists then the prod ranty Determination uct s will be repaired at no charge and shipped prepaid back to the buyer If the buyer desires an airfreight return the product s will be shipped collect Warranty repairs do not extend the original warranty period After Aerotech s examination the buyer shall be notified of the repair cost At such Returned Product time the buyer must issue a valid purchase order to cover the cost of the repair and Non warranty Deter freight or authorize the product s to be shipped back as is at the buyer s mination expense Failure to obtain a purchase order number or approval within 30 days of notification will result in the product s being returned as is at the buyer s expense Repair work is warranted for 90 days from date of shipment Replacement com ponents are warranted for one year from date of shipment At times the buyer may desire to expedite a re
18. d high accuracy cal ibration Output Cable Connectors 25DU Single 25 pin D connector standard 4DU 25DU 4 pin HPD and 25 pin D connectors Mounting Plate NONE No mounting plate MP ANT 130 5 V Breadboard mounting plate Note 25DU single 25 pin connector option not valid for systems using bus voltages greater than 80 V www aerotech com Chapter 1 3 Overview ANT130 5 V Series Stage User s Manual 1 2 Dimensions CABLE EXIT APPROX 1 M LONG 25 9X M6X1 0 Y 9 0 70 5 1 2 MECHANICAL TRAVEL 1 2 ELECTRICAL WEDGE DIRECTION AVEL 70 2 TRAVE 70 1 2 NOMINAL TRAVEL 67 5 CENTER OF TRAVEL 25 2TYP 26 3 MOUNTING HOLES 50 50 MM X 125 MM PATTERN 266 THRU ALL 90 MOUNTING HOLES 1266 90 MM X 120 MM PATTERN 06 6 THRU ALL DIMENSIONS MILLIMETERS Figure 1 2 ANT130 5 V Dimensions Chapter 1 www aerotech com ANT130 5 V Series Stage User s Manual Overview 7 C BORE STAGE MOUNTING M6 x 1 0 THRU BREADBOARD MOUNTING M6 OR 1 4 20 BOLT C BORE SLOT DIMENSIONS MILLIMETERS Figure 1 3 MP ANT 130 5 V Dimensions www aerotech com Chapter 1 5 Overview ANT130 5 V Series Stage User s Manual 1 3 Safety Procedures and Warnings The following statements apply throughout this manual Failure to observe these precautions could result in serious injury to those performing the procedures and damage to the equipment This manual and any additional instructions included with the
19. e operation of the stage before any payload is mounted to the stage tabletop Proceed with the electrical installation and test the motion control system in accordance with the system documentation Document all results for future reference If Aerotech specifically adjusted the servo loop gains to the payload weight prior to shipment the payload might be required to ensure proper servo operation The ANT130 5 V is designed to carry no more than 3 kg The mating surface of the payload must be flat to approximately 10 um to prevent distortion of the stage which would invalidate the specified accuracy For information on electrical connections refer to the Electrical Installation section later in this chapter the documentation of the motion control system delivered with the stage and the wiring drawings in Chapter 3 Operating Specifications NOTE For valid accuracies the mounting interface should be flat within 10 um NOTE Donot attach a payload to the stage table with screws that are too long Mounting screws should not project more than 7 mm 276 into the stage table top www aerotech com Chapter 2 13 Installation ANT130 5 V Series Stage User s Manual 2 6 Electrical Installation Electrical installation requirements will vary depending on stage options Installation instructions in this sec tion are for stages equipped with standard Aerotech linear motors intended for use with an Aerotech motion control system Contact Aerotech
20. guidelines outlined earlier in this manual Do not remove the stage from the sealed bag until it is ready for use 2 Always handle the stage in a clean environment and use powder free polyethylene gloves to prevent any contaminants from adhering to the surface of the stage 3 During installation use cleaned vented stainless steel fasteners when securing the stage Reduced air pressure eliminates significant convective heat transfer This coupled with the viscous vac uum compatible lubricants could result in excessive motor operating temperatures Because of this consider all continuous torque ratings to be 40 to 60 lower than the value specified for operation in nor mal atmospheric environment Reduce motor usage accordingly 5 Forvacuum applications the recommended lubricant is a small quantity of Braycote9 602EF grease or a substitute of equal quality Baking vacuum components between 100 and 125 C for 24 to 48 hours significantly reduces outgassing at initial pump down to vacuum pressure and evaporates water vapor that impregnates porous surfaces on alu minum parts and Teflon cables Aerotech recommends that customers bake out vacuum systems when first installing them in the vacuum chamber www aerotech com Chapter 3 23 Operating Specifications ANT130 5 V Series Stage User s Manual 24 Chapter 3 www aerotech com ANT130 5 V Series Stage User s Manual Maintenance Chapter 4 Maintenance This chapter will cover informa
21. hat it is not allowed to put the equipment into service until the machinery into which it is to be incorporated or of which it is to be a component has been found and declared to be in conformity with the provisions of the Directive 2006 42 EC and with national implementing legislation i e as a whole including the equipment referred to in this Declaration Authorized Representative Manfred Besold Address Name Position Location Date AEROTECH GmbH S d West Park 90 D 90449 N mberg Alex Weibel bs Engineer Verifying Compliance Pittsburgh PA November 5 2010 Chapter 1 www aerotech com ANT130 5 V Series Stage User s Manual Installation Chapter 2 Installation This chapter describes the installation procedure for the ANT130 5 V stage including handling the stage prop erly preparing the mounting surface to accept the stage securing the stage to the mounting surface attach ing the payload and making the electrical connections Installation must follow the instructions in this chapter Failure to follow these instructions could result in injury and damage to the equipment WARNING 2 1 Unpacking and Handling the Stage Carefully remove the stage from the protective shipping container Use compressed nitrogen or clean dry air to remove any dust or debris that has collected during shipping Visually inspect the stage for damage If any damage has occurred during shipping report it immediately Set
22. heir features and size make the ANT lift stages unlike any other lift stage on the market No other stage matches their accuracy repeatability resolution speed and smoothness of motion in such a small package size The linear cross roller bearings combined with the wedge style design offer excellent stiffness with minimal friction for smooth movement The cross roller bearings also incorporate a system to prevent cage creep and keep the rollers centered in the bearing rails The ANT130 5 V is driven by a linear motor The brushless linear motor uses an ironless forcer which means there is zero cogging and there are no attractive forces resulting in unsurpassed smoothness of motion A moving magnet track design eliminates the need for cable management improving long term relia bility A high accuracy non contact linear encoder allows the ANT130 5 V series stages to have an incremental step size of 2 nm when coupled with Aerotech drives and controls This is especially useful in alignment applications where outstanding step to step resolution is critical The unique flexure constraint allows smooth and extremely repeatable motion that takes full advantage of the drive wedge style design without the extra vertically oriented bearing set used in competing designs For multi axis applications the ANT130 5 V can mount directly to any standard ANT130 L or ANT130 XY stage 1 1 1 Optional Features The ANT130 5 V stages have two accuracy gr
23. iod Aerotech makes no warranty that its products are fit for the use or purpose to which they may be put by the buyer where or not such use or purpose has been disclosed to Aerotech in specifications or drawings previously or sub sequently provided or whether or not Aerotech s products are specifically designed and or manufactured for buyer s use or purpose Aerotech s liability or any claim for loss or damage arising out of the sale resale or use of any of its prod ucts shall in no event exceed the selling price of the unit Aerotech Inc warrants its laser products to the original purchaser for a minimum Laser Products period of one year from date of shipment This warranty covers defects in work manship and material and is voided for all laser power supplies plasma tubes and laser systems subject to electrical or physical abuse tampering such as opening the housing or removal of the serial tag or improper operation as determined by Aerotech This warranty is also voided for failure to comply with Aerotech s return procedures Claims for shipment damage evident or concealed must be filed with the carrier Return Procedure by the buyer Aerotech must be notified within 30 days of shipment of incorrect materials No product may be returned whether in warranty or out of warranty with out first obtaining approval from Aerotech No credit will be given nor repairs made for products returned without such approval Any returned produ
24. ith amplified sine wave type encoder Over Temperature sensor Signal indicating maximum travel produced by positive stage direction Active high signal indicating stage maximum travel produced by negative stage direction 22 Chapter 3 www aerotech com ANT130 5 V Series Stage User s Manual Operating Specifications 3 8 Vacuum Operation Aerotech can specially prepare the ANT130 5 V stage for operation in vacuum environments Aerotech offers two vacuum preparation options one for low vacuum for use in atmospheric pressures to 103 torr and one for high vacuum preparation for environments from 1073 to 10 torr As part of this preparation attention to detail during modification cleaning and assembly results in stages with optimal performance in vacuum appli cations Preparation techniques for stages that will operate in a vacuum include e Lubrication with vacuum compatible lubricants e Useof materials fasteners and coatings with vacuum outgas performance compatible with the level of vacuum specified e Forhigh vacuum stages elimination of situations that may allow gases to become temporarily trapped during pump down e Extensive cleaning prior to assembly in a clean environment and packaging in a special polyethylene bag 3 8 1 Special Guidelines To ensure that the stage will continue to perform well in the vacuum environment follow the guidelines listed below in addition to standard handling installation and lubrication
25. lexures are engineered to provide smooth repeatable motion for the entire life of the stage They are made of thin steel however and can fail if they are mishandled Do not remove the cover from the stage unless it is absolutely necessary When the cover is off take care not to bend nick ding or mar the flexures in any way Never handle the stage by the flexures or flexure mounting supports If a flexure appears damaged contact Aerotech support 16 Chapter 3 www aerotech com ANT130 5 V Series Stage User s Manual Operating Specifications 3 5 Basic Specifications Basic ANT130 5 V series positioning stage specifications are shown in Table 3 2 Resolution is dependent on encoder resolution and controller interpolation Specifications for the standard BLMUC 95 A motor are given in Table 3 3 Table 3 2 130 5 Specifications Mechanical Specifications ANT130 5 V ANT130 5 V PLUS Travel Om NN MTBF Mean Time Between Fail 30 000 Hours ure 1 Certified with each stage 2 Measured perpendicular or parallel to wedge direction 3 In Position Stability listing is a 3 sigma value 4 Assumes loading along axis of travel 5 Specifications are for single axis systems measured 25 mm above the tabletop Performance of multi axis systems is payload and workpoint dependent Consult factory for multi axis or non standard applications 6 PLUS requires the use of an Aerotech controller www aerotech com Chapter 3 17 Oper
26. ng and Lubrication 4 2 1 Recommended Cleaning Solvents For standard linear roller bearings Kluberplex BEM 34 132 grease is recommended For high speed applications i e near max speed at a duty cycle of 50 frequent maintenance with stand ard lubricants is required If a solvent is necessary for cleaning the stage use isopropyl alcohol 4 2 2 Important Notes on Lubrication When cleaning and or lubricating components of the ANT130 5 V stages Be sure to use a clean dry soft lint free cloth for cleaning 2 Take the opportunity during the lubrication procedure to inspect the linear motion guides for any damage or signs of wear 3 Inapplications that have multiple stages bolted together to form multi axis systems the orthogonality may be lost if the stage tables of the support stages are loosened Precision aligned stages should not be loosened or disassembled 4 Because proper assembly and calibration can only be done at the factory do not further disassemble the stage If the stage is disassembled then reassembled a laser interferometer is required for post assembly verification to maintain warranties 4 2 3 Lubrication and Cleaning Process The lubrication and cleaning process is outlined in the steps that follow Before beginning lubrication see Section 4 2 1 for recommended lubricants To minimize the possibility of bodily injury confirm that all electrical power is disconnected prior to making any mechanical adjus
27. ng your Aerotech equipment Call your Aerotech rep resentative if there are any questions on system configuration N OTE If you are using your own cables to connect the stage ensure that motor and ground wires can handle current higher than the continuous motor current listed in Table 3 3 The voltage rating of the wire insulation must be greater than the maximum drive output voltage listed in Table 3 3 SIGNAL g vL eo L 8l 6 00000 000 S ec Sc EL MTR B 25 MTR C PIN B 8 25 O Figure 3 2 Feedback and Motor Pin Assignments for 25DU Cable Option 20 Chapter 3 www aerotech com ANT130 5 V Series Stage User s Manual Operating Specifications MTR MTR SHLD 22 a El 224 18 GNEL EZ FRM GND 7 G Z Z 2 ange 18 WHT G 2 2 2 2 2 2 2 2 NER B 418 RED G 2 2 2 qe BLK G G G Figure 3 3 Motor Wiring Connector for Optional 4 pin Hi Power D Connector L vL 8l 9 6 SHIELD Sc EL Figure 3 4 25 pin Encoder Connector with Optional 4 pin Hi Power D Connector www aerotech com Chapter 3 21 Operating Specifications ANT130 5 V Series Stage User s Manual Table 3 4 Motor and Feedback Wiring Pinout Descriptions Pin Output erence cycle Incremental encoder output either the compliment of Marker with a line driven TTL type encoder or 2 5 V DC bias level w
28. ounted securely Improper mounting can result in injury and damage to the equipment Use care when moving the stage Manually lifting or transporting stages can result in injury Only trained personnel should operate inspect and maintain the stage This stage is intended for light industrial manufacturing or laboratory use Use of the stage for unintended applications can result in injury and damage to the equipment Before using this stage perform an operator risk assessment to determine the needed safety requirements A A A A A A 2 2 2 2 2 2 Z Z 2 2 2 Q Q Q Q Q Q www aerotech com Chapter 1 7 Overview ANT130 5 V Series Stage User s Manual 1 4 EC Declaration of Incorporation Manufactorer Aerotech Inc 101 Zeta Drive Pittsburgh PA 15238 USA AEROTECH xv herewith declares that the product Aerotech Inc ANT130 5 V Stage is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006 42 EC as amended does therefore not in every respect comply with the provisions of this directive and that the following harmonized European standards have been applied EN ISO 12100 1 2 2003 A1 2009 Safety of machinery Basic concepts general principles for design ISO 14121 1 2007 Safety of machinery Risk assessment Par 1 Principles EN 60204 1 2005 Safety of machinery Electrical equipment of machines Part 1 General requirements and further more declares t
29. pair Regardless of warranty orout Rush Service of warranty status the buyer must issue a valid purchase order to cover the added rush service cost Rush service is subject to Aerotech s approval www aerotech com Appendix A 27 Warranty and Field Service ANT130 5 V Series Stage User s Manual On site Warranty Repair On site Non warranty 28 Repair Company Address If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts and cannot be returned to the Aerotech service center for repair and if Aerotech determines the problem could be warranty related then the following policy applies Aerotech will provide an on site field service representative in a reasonable amount of time provided that the customer issues a valid purchase order to Aerotech cov ering all transportation and subsistence costs For warranty field repairs the cus tomer will not be charged for the cost of labor and material If service is rendered at times other than normal work periods then special service rates apply If during the on site repair itis determined the problem is not warranty related then the terms and conditions stated in the following On Site Non Warranty Repair section apply If any Aerotech product cannot be made functional by telephone assistance or pur chased replacement parts and cannot be returned to the Aerotech service center for repair then the follo
30. ries Stage User s Manual Operating Specifications Chapter 3 Operating Specifications The surrounding environment and operating conditions can affect the performance and service life of the stage This chapter provides information on ideal environmental and operating conditions 3 1 Environmental Specifications The environmental specifications for the ANT130 5 V are listed in the following table Table 3 1 Environmental Specifications Ambient Operating 10 to 35 C 50 to 95 F Temperature The optimal operating temperature is 20 C 2 68 4 F If at any time the operating tem perature deviates from 20 C degradation in performance could occur Contact Aerotech for information regarding your specific application and environment Storage 0 to 40 C 32 to 104 F in original shipping packaging Storage 30 percent to 60 percent RH non condensing in original packaging Altitude Operating 0 to 2 000 m 0 to 6 562 ft above sea level Contact Aerotech if your specific application involves use above 2 000 m or below sea level Use the system in a low vibration environment Excessive floor or acoustical vibration can affect stage and system performance Contact Aerotech for information regarding your specific appli cation Dust Expo The ANT130 5 V stages are not suited for dusty or wet environments This equates to an sure ingress protection rating of IPOO Humidity Operating 40 percent to 50 percent RH
31. s Manual List Of Figures List of Figures Figure 1 1 Figure 1 2 Figure 1 3 Figure 2 1 Figure 2 2 Figure 2 3 Figure 3 1 Figure 3 2 Figure 3 3 Figure 3 4 ANT130 5 V Vertical Lift 0 0 0 0 000001 21 1 130 5 Dimensions 2 20 0 4 MP ANT 130 5 V 2 050 00 5 Shipping Bracket Used on 130 5 4 0 00 70 2 10 Mounting to a Flat 11 Mounting Hole 1 00 0 6 12 ANT130 5 V Limit Switch 4 12 42 2 19 Feedback and Motor Pin Assignments for 25DU Cable 20 Motor Wiring Connector for Optional 4 Hi Power D 21 25 pin Encoder Connector with Optional 4 pin Hi Power D Connector 21 www aerotech com V List of Figures vi ANT130 5 V Series Stage User s Manual www aerotech com ANT130 5 V Series Stage User s Manual List of Tables List of Tables Table 1 1 Model Numbering System for ANT130 5 V 3 Table 3 1 Environmental 4 4 0 15 Table 3 2
32. the stage on a smooth flat and clean sur face This is a simple yet very important step in maintaining the integrity of the stage Each stage has a label listing the system part number and serial number These numbers contain information necessary for maintaining or updating system hardware and software Locate this label and record the infor mation for later reference Improper stage handling could adversely affect the stage s performance Therefore use care when moving the stage Manually lifting or transporting stages can result in injury WARNING Lift the stage only by the base WARNING www aerotech com Chapter 2 9 Installation ANT130 5 V Series Stage User s Manual 2 2 Shipping Bracket Aerotech provides a shipping bracket to prevent unwanted stage motion and potential damage from occur ring during transport The bracket is red anodized aluminum and it must be removed from the stage before it can operate Figure 2 1 depicts the shipping bracket as it is used to constrain an ANT130 5 V stage Figure 2 1 Shipping Bracket Used on ANT130 5 V NOTE After removing the shipping bracket you should retain it for future use In the event the stage reguires service at the factory the shipping bracket should be reattached to ensure the stage ships safely 10 Chapter 2 www aerotech com ANT130 5 V Series Stage User s Manual Installation 2 3 Preparing the Mounting Surface The mounting surface should be flat to 5 um
33. tion about intervals between lubrications detail the lubrication and inspection process and cover which lubricants are recommended for use NOTE The bearing area must be kept free of foreign matter and moisture otherwise the performance and life expectancy of the stage will be reduced Always operate the stage with the hard cover in place to help keep dirt out To minimize the possibility of bodily injury confirm that all electrical power is disconnected prior to making any mechanical adjustments DANGER 4 1 Service and Inspection Schedule Lubricant inspection and replenishment in ANT130 5 V stages depends on conditions such as duty cycle speed and the environment Inspect the stage once per month until a trend develops for the application Longer or shorter intervals may be required to maintain the film of lubricant on the bearing surfaces In gen eral lubricate stages operating in a clean environment annually or every 500 km whichever comes first For stages operating under conditions involving excessive debris lubrication every six months is recommended If the application process uses only a small portion of travel for most of the duty cycle it is recommended that the stage be periodically driven through full travel to redistribute the lubrication in the bearings The motor is completely non contact and requires no lubrication www aerotech com Chapter 4 25 Maintenance ANT130 5 V Series Stage User s Manual 4 2 Cleani
34. tments DANGER Remove power to the stage Remove any accumulated dust or debris from the inside of the assembly Remove any dirty or dried lubricant from the v channels of the linear bearing rails Use a clean lint free cloth with a side to side motion You can use a swab soaked in Isopropyl Alcohol to remove stubbom debris 4 Apply athin continuous film of lubricant to the exposed v channels of the bearing rails on both ends of the stage A good quality natural bristle artist s brush makes an excellent applicator Do not use any applicator that could scratch or otherwise damage the v channels 5 Manually move the stage to the opposite end of travel This will work the grease into the linear bearing guides The stage table should move freely with little resistance Repeat steps 2 through 4 for any areas covered by the original table position Restore power to the stage drive the stage table back to its original position to redistribute lubricants 26 Chapter 4 www aerotech com ANT130 5 V Series Stage User s Manual Warranty and Field Service Appendix A Warranty and Field Service Aerotech Inc warrants its products to be free from defects caused by faulty mate rials or poor workmanship for a minimum period of one year from date of shipment from Aerotech Aerotech s liability is limited to replacing repairing or issuing credit at its option for any products that are returned by the original purchaser during the warranty per
35. wing field service policy applies Aerotech will provide an on site field service representative in a reasonable amount of time provided that the customer issues a valid purchase order to Aerotech cov ering all transportation and subsistence costs and the prevailing labor cost includ ing travel time necessary to complete the repair Aerotech Inc Phone 412 963 7470 101 Zeta Drive Pittsburgh PA Fax 412 963 7459 15238 2897 Appendix A www aerotech com ANT130 5 V Series Stage User s Manual Technical Changes Appendix B Technical Changes Table B 1 Current Changes 1 01 00 Section s Affected General Information Section 1 4 Added section Section 3 1 Added section Chapter 2 Installation Section 2 1 Sec Added safety information and warnings tion 2 4 Section 2 6 and Section 1 3 Section 3 7 Added note about current requirements of motor and ground wires www aerotech com Appendix B 29 Technical Changes ANT130 5 V Series Stage User s Manual Table B 2 Archived Changes Section s Affected General Information 30 Appendix B www aerotech com Index ANT130 5 V Series Stage User s Manual Index 26 lubrication and cleaning process 26 A lubrication schedule 25 Attaching the 13 M B mechanical 16
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