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User`s Manual - Stanford Research Systems

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1. Main Help UGA1 UGA2 UGA3 UGA4 UGAS Status 5 9 2014 10 20 15 AM UGA Instrument is ON Syetes Error ae GR Sleep Sto Bake O System Warnin gt as EE did 5 6 2014 11 56 23 AM BypassValveNode is CLOSED a 1 C 5 6 2014 11 57 16 AM BypassValveNode is OPEN AR OET 9 5 6 2014 11 57 31 AM SampleValveNode is OPEN System Bake Curent Mode READY 5 6 2014 11 59 14 AM ERROR BV malfunction 5 6 2014 11 59 16 AM SampleValveNode is CLOSED X Elapsed 89 43 18 i Components Reading and Operation Pressure Graph Te ture Graph Sample Valve o i p gt Jape ph E Display Bypass Valve o E Pressure BypassLine 10 4 Torr Bypass Pump o RoughingLine 0 0936 Torr Chamber 2 6E 08 Torr JN Roughing Pump G Turbo Pump TP Speed 90 12 kRPM Turbo Pump TP Current 800 mA Temperature RGA Turbo Pump T 64 C Elbow T 32 Ion Gauge AN Chamber T 35 C 8 Sample Line T 25 C f Capillary T N C MN Launch RGA E Components Options Sample Valve CLOSED Bypass Valve CLOSED Multiple Inlet Bypass Pump OFF Vent Valve e Roughing Pump IDLE Turbo Pump ON i Sample Heat o RGA ON lon Gauge ON Auto Vent IG Fit Auto Sample Valve E Options Multiple Inlet 1 Vent Valve OFF Sample Heat OFF H AutoVent ON Auto Sample Valve ON Fig 2 16 Section indications of the window of UGA control soft ware for UGAPM The name for each numbered section is written in the next pag
2. Fig 2 3 Screenshot of the initial window of UGA control software The initial screen shows a general UGA screen This will be changed to UGAPM screen after the proper connection 2 3 2 Installation of Software The RGA software will be discussed separately in the last section of this chapter The programs are shipped on a CD A user can also download the programs from the SRS website at www thinksrs com Make sure to install the software with administrator ac count privileges Installation of UGA amp RGA control software 1 Insert the provided CD into the CD driver The setup program for UGA control software will be launched automatically If not explore the CD and double click the file UGASetup exe UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com 2 21 Guide to Operation 2 Follow the prompts to install UGA control software The default directory for the installation is C Program files SRS UGA You may change the installation directory during this process but SRS recommends using the default directory 3 At the end of the installation of UGA control software the installer will ask to continue RGA software installation Click YES to continue 4 Select UGA icon or double click UGAControlApp exe You should see the screen in the previous page Fig 2 3 If the window is blank click Main and select New UGA Refer to th
3. Example ZPSM 255 255 255 0 Sets the IP subnet mask to 255 255 255 0 Errors and Warnings The command is ignored if the following error is issued after the command input ZPSM iii Warning 16 Bad parameter IP default Gateway The ZPGW i i i i command sets the Internet Protocol IP default Gateway of the instrument The ZPGW query returns the current IP default Gateway setting Example ZPGW 192 168 1 1 Sets the IP default Gateway to 192 168 1 1 Errors and Warnings The command is ignored if the following error is issued after the command input ZPGW i i ii Warning 16 Bad parameter TCP IP login name The ZPNM ABC command sets the login name of the instrument to ABC for the TCP IP connection The ZPNM query returns the current login name The command accepts only alphanumeric characters a z A Z and 0 9 The login name should be 15 characters or less The default is SRSUGA Examples ZPNM SRSUGA Sets the login name to SRSUGA UGAPM Series Universal Gas Analyzers for Process Monitor Remote Programming ZPPW Os ZPDU i UGAPM Series ZPNM Clears the login name With blank login name and password a user can login to the instru ment by typing carriage returns only Errors and Warnings The command is ignored if the following error is issued after the command input ZPNM s Warning 16 Bad parameter TCP IP password The ZPPW ABC command sets the password of the instrum
4. Figure 1 1 UGAPM Schematic The UGAPM systems can be considered as two main subsystems the sample delivery system and the analyzer The analyzer is the quadrupole mass spectrometer which can only operate in high vacuum Therefore pumps are required to draw the gas out of the instrument and maintain the vacuum A turbomolecular pump TP is commonly used to generate the high vacuum region lt 10 Torr required to operate the ionizer and quadrupole of RGA The Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com UGAPM Basics class of quadrupole mass spectrometer employed belongs to a class referred to as residual gas analyzers RGA These spectrometers specialize in large dynamic range measurements of small gases The sample delivery system consists of a capillary and a valve sin gle line sample valve in a basic system and the 8 channel multiple inlet valve with an on off valve multi line sample valve as an op tion which delivers the sample gas to the analyzer See figure 1 1 In UGAPM systems a pressure reduced gas sample is drawn by the TP through a capillary after the sample valve is open A capillary of 1 8 OD and 2 mm ID is used for the lowest pressure range of 0 25 mbar and below For other higher pressure ranges of 15 mbar to 0 05 mbar capillaries of 1 6 OD are used All capillaries are made of 316 SS material The detailed specification is listed below Sample Pressure SS Capi
5. Sample Valve item in the operation window After clicking on the item you will see a drop down control list Select OPEN and then click Apply See the figure below Roughing Pump 9 Reading and Operation Turbo Pump E Display E Pressure RGA o RoughingLine 0 116 Torr Chamber 1 4E 08 Torr Ion Gauge Fill Ext CM 5 82 Torr Turbo Pump TP Speed 89 88 kRPM TP Current 700 mA Temperature Launch RGA Turbo Pump T 58 C Elbow T 29 C 5 Chamber T 26 C Options Sample Line T 26 C Multiple Inlet 1 Capillary T N C Multiline sy Q MSV open safety Components Vent Valve o Sample Valve CLOSED v Sample Heat o Roughing Pump ID ANENE Turbo Pump ON OPEN RGA OFF Ext CM 10 lon Gauge ON Es IG Fit Options Multiple Inlet 1 f SRS Stanford Research Systems UGAPM Series Universal Gas Analyzers for Process Monitor Quick Start UGAPM Series xU In order to avoid severe pressure shocks to vacuum pumps of UGAPM and or the tested chamber the sample valve will be open only when the ion gauge is on and it will perform the safety check ing process during the valve is open In the safety checking pro cess UGAPM will open the sample valve for 0 1 second and close clicking and check the pumping behavior The system repeats this clicking maximum 5 times till the initial chamber pressure at the clicking falls into the pressur
6. 6 If still IG reading is above 1 5 x 10 Torr after 5 trials then SSV or MSV remains closed and UGAPM gives an error SRS Stanford Research Systems UGAPM Series Universal Gas Analyzers for Process Monitor Guide to Operation 2 16 With this process UGAPM can open SSV or MSV safely and avoid severe pressure shock to vacuum pumps from mistakenly handled situations Sometimes UGAPM opens SSV fully since IG reading is low enough at the step 2 of the above process but soon after the system closes SSV and gives the error of TP too high or SSV too high This happens when you are trying to open not evacuated capillary be cause the gas flow conductance through a capillary is so small that the initial opening will take only small amount of gas After the valve is open fully however the chamber pressure IG reading or roughing pressure PG reading goes above the limit of the UGAPM interlocks explained in the section of 2 2 4 4 of this manual Usually the smaller ID capillaries show these kinds of behaviors In this case just try to open SSV again after related parts are reset Some times you should repeat this reopening several times because you are pumping the gas in the dead volume through a capillary 2 2 4 3 Safety check for Channel change of Multiple Inlet valve When UGAPM receives the command of changing a channel of the multiple inlet valve the same safety checking process will be ap plied This is a default sett
7. _ Es Disconnect Y Scan for UGA every time this dialog is being opened Settings Connector Instrument ID Status Bind to G fp 172 25 128 13 No_instrument Unknown Not able to access G 172 25 128 14 UGALT SRS_UGA_LT100 S N 91052 V 1 003 Disconnected gt 172 25 128 15 UGA SRS_UGA S N 1 V 1 013 Disconnected EE is Ca Fig 2 10 Screenshot of UGA control software after selecting Connect icon in the Main menu The available TCP IP connectors are shown If the resources are not shown immediately click Update several times e Choose the TCP IP connector by clicking on the connector column Then click Connect Or just double click the TCP IP connector to be connected The connector icon will change to indicate a connection status Y 2 Comecodiaog m Connect V Scan for UGA every time this dialog is being opened Settings Connector Instrument 1D Status Bind to 172 25 128 13 No _instrument Unknown Not able to access 172 25 128 14 UGALT SRS_UGA_LT100 S N 91052 V 1 003 Disconnected Gi 172 25 128 15 Cd 172 25 128 11 UGA PM SRS_UGA_PM S N 0 V 1 008 UGA Instrument is ON UGA1 Fig 2 11 Screenshot of the ConnectorDialog window after the proper connection Close the ConnectorDialog window The UGA control program title shows the current status of connection UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Moni
8. External CM Gauge 9 a des 2 13 2 2 Guide to Operation Advanced Operation 0 unos 2 14 Capillary pumping using UGAPM 2 14 Safety check for Sample Valve SSV or MSV opening 2 15 Safety check for Channel change of Multiple Inlet valve 2 16 Interlocks win eo eee Ra dica 2 17 User Interlock Input ss 4s 2 18 Diaphragm Pump Tuning 2 18 Auto Vent Valve 2 18 2 3 Remote Opera 6 64 ae aa 4 a 4 2 19 Es ae a ose oo ok a naa Ea 2 19 Installation of Software 2 20 Connection toa PO 0 aX 2 21 TCP IP Connection s se 4 4 4 2 21 RS232 Serial Connection 2 28 Menus and Displays 2 31 Launching RGA Software 2 41 Options and Accessories 2 45 Multiple Inlet Valve control 2 45 Vent Valve control lt a ma 4 max 2 46 Sample Heaters setting 2 47 External CM Gauge control 2 47 UGAPM Series SRS Stanford Research Systems Universal Gas Analyzers for Process Monitor Guide to Operation 2 3 2 1 Introduction The UGAPM can be in one of five modes states OFF READY IDLE INDIVIDUAL and BAKE Each state can be reached from the other state with some restrictions For example BAKE state can be reached from READY IDLE INDI VIDUAL or OFF state During BAKE state however UGAPM can be changed to only OFF state not to any other states The UGAPM can be stopped from any condition The stop command is handled on a
9. N A Index 2 external CM gauge reading in Torr Index 3 IG reading in pTorr If the corresponding gauge is not on the reading is meaningless UGAPM Series Universal Gas Analyzers for Process Monitor Remote Programming ZQHZ ZQCU ZOTT ZOTA ZOTB ZQTC ZOTD ZQBR UGAPM Series Example ZQAD 0 If the command returns 100000 it means the the Pirani gauge reading is 0 1 Torr ZQAD 3 If the command returns 100000 it means the ion gauge reading is 1 0E 7 Torr Turbo pump speed The ZQHZ query returns TP speed in revolutions per second Turbo pump current The ZOCU query retuns TP current in mA Turbo pump temperature The ZQTT query returns TP Temperature in degrees Celsius Elbow temperature The ZQTA query returns the elbow temperature in degrees Celsius Chamber temperature The ZQTB query returns the chamber temperature in degrees Celsius Sample inlet temperature The ZQTC query returns the sample inlet line temperature in degrees Celsius Capillary temperature The ZQTD query returns the capillary temperature in degrees Celsius Remaining bake time The ZOBR query returns baking time remaining in minutes Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com 3 18 Remote Programming 3 2 5 Error query commands ZERR Error query The ZERR queries Error code Whenever ZBST Bit 15 is set use ZERR to read errors Latest Errors up t
10. UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com SRS Stanford Research Systems Remote Programming which is processed by UGAPM main controller and the other is the RGA command set which is processed by RGA controller A com mand starting with a Z is handled by the UGAPM main controller and a command starting with other characters is handled the RGA controller A command in the UGAPM command set consists of a four character command mnemonic arguments if necessary and a command terminator The command arguments and terminator may be separated by spaces No command processing occurs until a lt CR gt terminator is received Commands may require one or more parameters Multiple param eters are separated by commas The present value of a particular parameter may be determined by querying the UGAPM for its value A query is formed by append ing a question mark to the command mnemonic and omitting the desired parameter from the command Values returned by the UGAPM are sent as a string of ASCII characters terminated by a carriage return lt CR gt 3 1 4 Command Syntax The four letter mnemonic shown in CAPS in each command se quence specifies the command The rest of the sequence consists of parameters Parameters shown in are not always required Gen erally parameters in are required to set a value in the UGAPM Multiple parameters are separated by commas
11. densation The first approach can be very simple place screens or metal plates before the inlet to provide sacrificial surfaces for condensation The sacrificial surfaces should have good thermal connections to the outer walls so that they stay at room tempera ture These surfaces will act like a trap and prevent the unwanted materials from passing into the UGAPM The second approach in volves operating the entire UGAPM inlet above the condensation temperature of the condensable material This may be feasible if the operating temperature is below 100 C All the tubing compo nents in the inlet can be heated to 100 C or more The electron ics and pumps cannot operate at elevated temperatures This ap proach keeping the tubing hot and electronics cool is a difficult task and therefore is not recommended 5 3 Pressure Reducing Inlet UGAPM Series The gas handling subsystem is designed to achieve several goals reduce the pressure of the sample gas to the operating range of the mass spectrometer lt 10 mbar provide a quick response time to changes of sample composition at the inlet allow for easy connection to system being measured use conventional materials Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com 5 22 Calibration and Input Design Because the chamber tested is already in vacuum a single stage pressure reduction is suitable For example about 1m capillary of 250 um
12. temperatures etc using the menu system there fore we refer to a selected display when discussing the menu sys tem below You can also cycle through the info displays Pressure Temperature Turbo Pump via the Up or Down button Level up button This button will bring the user to the main menu from the informa tion display mode and vice versa In the menu tree this button will move the user up one level Up Down buttons Arrow keys In the menu this button will move the cursor or change a param eter value In the display this will cycle information of pressures temperatures or TP Phone 408 744 9040 2 6 Guide to Operation Enter button In the menu this button confirms the selection of a state a param eter or a sub menu item System Error LED This red LED will be lit when the system has a fatal error An ac companying error message is shown on the display A fatal error refers to an error condition that is preventing the UGAPM from continuing to operate Operation cannot continue until the error is corrected Warning LED This yellow LED will blink when the system has a warning error and the error message is shown on the display for 4 seconds The warning error means the unit can not process a command due to the restrictions of the process a command syntax error or no com ponent installed Because the warning does not affect the perfor mance of the UGAPM there is no error correction
13. to miscommunication between the main control board and the auxiliary control board No Sample Heater Both thermocouple sensors on the sample line and the capillary are open 68 72 Reserved 73 74 75 SRS Stanford Research Systems No IG detected The ion gauge control board is not detected IG unexpected off The ion gauge was turned off without reporting an error to the UGAPM Reserved UGAPM Series Universal Gas Analyzers for Process Monitor UGAPM Error Messages 76 77 78 79 80 81 82 IG voltage 1 No power on the ion gauge controller board 2 The selected IG filament is burnt 3 The ion gauge failed to maintain the grid voltage This condition turns off the ion gauge IG emission The ion gauge failed to maintain the emission current This condition turns off the ion gauge IG off failed The ion gauge is not turned off in time probably due to miscommunication between the main control board and the auxiliary control board Reserved RGA off failed The RGA is not turned off in time probably due to miscommunication between the main control board and the auxiliary control board No Mux detected Multi inlet valve controller is not detected Mux malfunction The multi inlet valve channel reported from the controller does not match with that of the main control board probably due to miscommunication between the
14. 0 On 1 in the leak test mode 2 turning on 3 or 4 or turning off 6 or 7 Example ZCRG 1 Turns the RGA On ZCRG Returns the state of the RGA Errors and warnings The command is ignored if any of these conditions are true ACRG 0 Error 80 RGA off failed ZCRG 1 Warning 42 Turbo not ready Warning 48 System Bake On Ion gauge Off On Degas The ZCIG i command change the ion gauge state to Off i 0 On i 1 or Degas i 2 The ZCIG query returns the current ion gauge state Examples ZCIG 2 Degasses the ion gauge for 3 minutes and returns the gauge state to the previous state depending whether it was on or off Errors and Warnings The command is ignored if any of these conditions are met Error 73 No IG detected ZCIG 0 Error 78 IG off failed ZCIG 1 Warning 42 Turbo not ready Error 74 IG unexpected off Error 76 IG voltage Error 77 IG emission Error 105 IG too high ZCIG 2 Warning 42 Turbo not ready Phone 408 744 9040 www thinkSRS com SRS Stanford Research Systems Remote Programming ZCVV i Vent valve Off On ZCPC 1 The ZCVV i command turns the vent valve Off i 0 or On i 1 The ZCVV query returns the current vent valve state ZCVV 1 command opens the vent valve for 1 second closes it for the next 40 seconds opens again for the next 60 seconds if Option 3 is installed this will be 300 seconds and final
15. Graph Serial TCP IP Bake Heaters Units Misc Add Address User Password 172 25 128 12 SASUGA d Enable TCP IP e Click OK button e Click on the Main tab and select Connect The following Con nectorDialog window will appear If no instrument name or ID is visible under the connector immediately hit Update button sev eral times to see the available resource ConnectorDialog cx Disconnect Y Scan for UGA every time this dialog is being opened Settings Connector Instrument ID Status Bind to GD 1722512013 No_instrument Unknown Not able to access G 172 25 128 14 UGA LT SRS_UGA_LT100 S N 91052 V 1 003 Disconnected gt 172 25 128 15 UGA SRS_UGA S N 1 V 1 013 Disconnected LE d 172 25 128 11 UGA PM SRS_UGA_PM S N 0 V 1 008 e The software will now show available resource s Select the appropriate Ethernet port and click the Connect button In the example screenshot above the UGAPM is found on the IP of 172 25 128 11 e After the proper port changes status to Connected the icon turns green close the ConnectorDialog window The title bar of the software indicates the present connection See the screenshot in the next page SRS Stanford Research Systems DEAT Series Universal Gas Analyzers for Process Monitor Quick Start SRS_UGA_PM S N 0 V 1 008 Active control UGA1 connected to 172 25 128 11 xiii Main Help UGAT UGA2 UGA3 UGA UGAS
16. Multichannel configuration And also this configuration can be applied for various pressure ranges Multi range configuration Phone 408 744 9040 1 6 UGAPM Basics Some ultra high vacuum and ultra clean chambers cannot tolerate venting with ambient air because of the water vapor present An optional valve allows venting with dried nitrogen or other gas sup ply The entire system is under microprocessor control to ensure ideal operation of all pumps and valves Two heaters built in surround the chamber and the connection to the TP Bakeouts up to 120 C can be performed easily and safely all the heaters are under microprocessor control Optional heaters can be provided for heating the capillary and the sample line up to 100 C Windows software controls the UGAPM and the RGA graphically displays the data and provides analysis An external capacitor manometer on a tested chamber can be connected and checked the sample pressure as an accessory for UGAPM This can be used to integrate the sample valve opening or selecting a proper channel of the optional multiple inlet valve A The UGAPM is designed to be compact All the components a diaphragm pump one turbo molecular pump the RGA chamber the RGA two gauges a solenoid valve heaters and the insulating cabinets power supplies and even the multiple cap illary inlet valve amp related on off vlave fit inside an enclosure of 12 W X 11 H X 25 L Th
17. This factor is provided to resolve the problem with the mass spectrum just discussed The user can use this factor to tell the software how to correct for each peak To determine the correct scaling factor to use you must know or as sume what species is causing each peak and choose masses that are not complicated by other species Choosing the correct peaks is complicated and requires understanding of the mass spectrum For instance in a 50 50 mixture of nitrogen and carbon dioxide you cannot use mass 28 to measure the nitrogen With this mixture about 10 of the peak at 28 would be caused by a fragment A bet ter choice would be to use the peak at 14 to measure nitrogen Once you have chosen a mass that is representative of each species of in terest you then refer to published fragmentation factors see refer ences to determine how to correct back to the parent peak Even if the instrument was calibrated for nitrogen it was likely calibrated on the peak at 28 The peak at 14 will not be correct it will be about 7 of the correct value Entering 14 2 1 0 07 as a scaling value in the table parameters allows the software to correct the partial pres sure reading Similar scaling factors are entered for each species being measured A calibration gas of known composition makes process of determining factors easy First make a measurement of the standard with all the factors set to 1 From this measurement a correction for each species can be
18. UGA Instrument is ON ExtCMNode is ON Components Single Line SV o Roughing Pump o Turbo Pump RGA o Ion Gauge An Launch RGA Options Multiple Inlet 1 MutilineSV MSV open safety 3 20 2014 10 33 49 AM TurboPumpNode is ON lonGaugeNode is ON AutoVentNode is ON Status 3 20 2014 10 35 21 AM System Error 0 5 Start Sleep Bake On System Warning ar abe 1 Manual Control System Bake Curent Mode Q MANUAL CONTROL sa Elapsed 00 01 31 Reading and Operation E Display Ey Pressure RoughingLine 0 112 Torr Chamber 1 55E 08 Torr Ext CM 5 9 Torr Ey Turbo Pump TP Speed 89 88 kRPM TP Current 800 m4 Ey Temperature Turbo Pump T 55 C Elbow T 28 C Chamber T 25 C Sample Line T 25 C Capillary T N C E E Components Vent Valve o Sample Valve CLOSED Sample Heat fe Roughing Pump IDLE Auto Vent Turbo Pump ON sen Toa O IG Fal E E Options Multiple Inlet 1 MutilineSV OFF Vent Valve OFF Sample Heat OFF AutoVent ON Ext CM ON e In the UGA control software click the green Start button Top right window to start UGAPM and wait until the current status becomes the ready state Current Mode indicator becomes solid green and the word of Ready will be shown It will take about 8 minutes to reach this state When ready your screen should look similar to the one illustr
19. Vent Valve Close Close the vent valve amp go to the selected display Open Open the vent valve amp go to the selected display Select a state Off On amp one level up Select a state Off On amp go to the selected display lon Gauge Off Turn off IG amp go to the selected display On Turn on IG amp go to the selected display Degas Start degassing IG amp go to the selected display IG Fil Select Select a parameter Fil 1 Fil 2 amp one level up UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com Top level Controls cont Auto Appendix 2nd level 3rd level 4th level 5th level 6th level Heaters Off Turn off all the heaters amp go to the selected display Bake Turn on Baking heaters amp go to the selected display Heat Sample Turn on Sample heaters if installed amp go to the selected display Bake Elbow Input data 105 Off 40 120 amp Temperature one level up Chamber Input data 105 Off 40 120 amp one level up Elbow Input data Off 40 120 z one level up Chamber Input data Off 40 120 z one level up Sample Line Input data 80 Off 40 100 amp one level up Capillary Input data 80 Off 40 100 amp one level up Multiple Inlet Channel Selection Not Installed for no Option 1 present Channel for Option 1 amp go to the selected display Safety Option Select a state Off On amp one leve
20. View after selecting some items from the left box the related data graph will be shown in the Reading amp Operation sub window 8 on Fig 2 16 As shown there are two taps Pressure Graph tap amp Temperature Graph tap If not those will be shown in the separate popup windows The graphs will display related data with the setting interval time The selected data will be recorded in the data log file if enabled at the Logging tab o Settings Logging Graph Bake Heaters Units Misc w Pressure Graph Al Pressure Graph BypassLine Pressure RoughingLine Pressur Chamber Pressure Plot every E ve Temperature Graph 2 TurboPump Temperatur C Dock View Capillary Temperatur 4 Chamber Temperature Sample Line Temperat v gt Temperature Graph Plot every 5 C Dock View Cancel Fig 2 20 Screenshot of the Instrument Settings dialog box showing the Graph tab The Bake tab contains the parameter settings for the System Bake System bake time and Baking temperatures of Elbow and Cham ber The baking time can be 2 to 100 hours Each temperature can be set from 0 to 120 C Setting 0 C means the system will not turn on heaters even heater on command is selected In this way a user can control each heater separately The lowest baking temperature is 40 C The default values are 8 hours for the system bake time 105 C for both Elbow and Chamber tempera
21. amp one level up Bake Temperature Input data 105 Off 120 amp one level up Input data 105 Off 120 amp one level up Communication RS232 Baud rate Select a parameter 28800 38400 amp one level up IP Address Input data 0 0 0 0 amp one level up Subnet Mask Input data 255 255 255 0 amp one level up Gateway Input data 0 0 0 0 amp one level up Login Name Input data SRSUGA amp one level up Password Input data SRSUGA amp one level up Display Pressure Select a unit Torr Pascal mbar bar amp go to Pressure Display default during the operation Turbo Pump Go to Trubo Pump Display Temperature Go to Temperature Display System Bake Go to System Bake Display About UGA Go to Introduction Display default for the Off state Controls Roughing Pump Off Turn off RP amp go to the selected display On Turn on RP amp go to the selected display Idle Set RP idle amp go to the selected display Input data 60 30 100 amp one level up Tune Idle Power Input data 45 30 100 amp one level up Vent Valve Close Close the vent valve amp go to the selected display Open Open the vent valve amp go to the selected display Select a state Off On amp one level up Turbo Pump Select a state Off On Idle amp go to the selected display Multiline SV Select a state Close Open amp go to the selected display Singleline SV Select a state Close Open amp go to the selected display
22. calculated and entered into the tables The references listed at the end of this manual contain dis cussions about how to interpret mass spectra from RGA s 5 2 6 Operation with Condensable Gases The UGAPM is designed to sample gases that are nominally at room temperature Under these conditions any species that is a gas at the capillary inlet can be expected to travel through the in strument without condensing Without a heat input a gas will cool as it expands through a capillary In the UGAPM system the ab UGAPM Series Universal Gas Analyzers for Process Monitor Calibration and Input Design solute pressure difference across the capillary is small and the flow rate is small under these circumstances the interior metal surfaces can provide sufficient heat to the expanding gas to keep it from condensing If problems due to condensation are suspected the capillary with the heater can be used O100HC The goal of heat ing the capillary is to increase the heat transfer rate to the sample gas When the gas being measured is significantly hotter than the UGAPM system condensation is likely and presents a problem If the species at the inlet are gases only at temperatures above room temperature they can condense when they reach the UGAPM The condensed material will continually build up in the UGAPM and cover the valve seats and aperture Two approaches can prevent this problem control the location of condensation or prevent con
23. closed since the ZBCT query was last issued ZBTT Components in transition The ZBTT query returns the component transition bits If a bit is set it indicates the corresponding component is in transition either from Off to On or from On to Off and also either from Closed to Open or from Open to Closed Once the transition is over the bit value returns to zero UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com Remote Programming 3 2 4 Query commands ZOID ZOFV ZOSN ZOMC ZOAD i SRS Stanford Research Systems Identification The ZQID query returns UGAPM ID string the serial number and the firmware version Example ZQID If the command returns SRS_UGAPM S N 91000 V 1 000 it means the unit is a UGAPM the serial number is 91000 and the firmware version is 1 000 Firmware version The ZQFN query returns the firmware version of the unit Example ZOFV Returns the firmware version e g 1 000 Serial number The ZQSN query returns the serial number of the unit Example ZOSN Returns the serial number e g 91000 MAC address The ZQMC query returns the Ethernet media access control MAC address of the unit The numbers are 6 bytes in the hexadecimal format Example ZOMC Return the MAC address Pressures The ZQAD i query returns a pressure reading corresponding to the following index Index 0 Pirani gauge reading in uTorr Index 1
24. display correct partial pressure for all the species in a table if the ratios between the partial pres sure sensitivities of the different components are known and only principal mass peaks are used to monitor them The scaling factors can also be adjusted to correct against the mass discrimination of the electron multiplier s gain Important Following current industry standards the partial pres sure sensitivity factor stored at the factory corresponds to N2 mea sured at 28 amu with Am 1 amu default ionizer settings and Faraday Cup Detection 10 5 1 4 Single gas measurement example Monitoring the concentrations of one or few components in a sys tem is easy in the absence of severe spectral interference Suppose a system where argon is measured at 40 amu principal mass in the absence of any other gases that contribute a signal at that mass value The sensitivity to argon was previously measured at S 10 amps Torr and the electron multiplier is biased and its gain at mass 40 was previously measured at 8 11 1 02x10 relative to the FC signal The partial pressure of argon P is easily calculated measuring the intensity i e peak height of the ion current at mass 40 L Pa Lad Seong Sa its of Torr 4 Ar UGAPM Series Universal Gas Analyzers for Process Monitor Calibration and Input Design 5 1 5 Calibration UGAPM Series The peak value I can be extracted from a spectral scan or mea sured directly
25. ends without opening the vent valve System bake time The ZPBT command sets and queries the system bake time in hours It can be set between 2 and 100 hours The system bake mode will be on for this system bake time and then will be turned off When the system bake mode is on the time remaining can be que ried with the ZOBR command Example ZPBT 10 Sets the system bake mode to 10 hours ZPBT Returns the system bake time Bake temperature The ZPTB command sets the bake temperature of a heater when Bake mode is on The parameter p selects the elbow heater 0 or the chamber heater 1 The parameter i is a set temperature in Celsius for the heater p and ranges from 0 to 120 The default value for the parameter i is 105 If a set value for a heater is 0 the heater stays off during the bake mode and it is not tested for its faulty conditions Example ZPTB 1 105 Sets the bake mode set temperature of the chamber heater to 105 C ZPTB 1 Returns the bake mode set temperature of the chamber heater Errors and Warnings The command is ignored if this condition is met Error 66 Temp Set Failed Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com SRS Stanford Research Systems ZPTH p Li ZPDF Remote Programming Sample temperature The ZPTH command sets the Sample temperature of a heater when the sample mode is on The parameter p selects the elbow heater 0 the chamber
26. gas line connector installed Vent line tube installed UGAPM Series Universal Gas Analyzers for Process Monitor Materials List SRS receives many requests for information about corrosion compatibility It is our policy not to state the compatibility of our system with various corrosive environments We simply cannot test the myriad combinations of environments that our customers use We do provide a list of all the materials exposed to the gas being introduced into the system Our expectation is that users who need to measure corrosive environments already have some type of system that creates handles and contains the corrosive gases Given that they have designed and operate said system they are the best people to decide the compatibility of the materials in our system with the specific corrosive environment The UGAPM system contains the following materials Body 304 stainless steel high vacuum tube 316 stainless steel quarter inch tube and fittings sample capillary molybdenum electrical feedthrough ceramic electrical feedthrough AgCuln braze material on feedthroughs alumina contained in the RGA aluminum body of diaphragm pump Replaceable Components glass if an electron multiplier is installed in the RGA chromium surface of the electron multiplier IrO ThO filament of RGA Seals copper seals in the CF high vacuum flanges 316585 major component of VCR seals s
27. heater 1 the sample line heater 2 or the capillary heater 3 The parameter i is a set temperature in Celsius for the heater p For for the elbow heater and the chamber heater range is from 0 to 120 and the default value is 105 For sample line heater and capil lary heater the range is from 0 to 100 and the default value is 80 If a set value for a heater is 0 the heater stays off during the sample mode and it is not tested for its faulty conditions Example ZPTH 2 80 Sets the sample mode set temperature of the sample line heater to 80 C ZPTH 2 Returns the sample mode set temperature of the sample line heater Errors and Warnings The command is ignored if this condition is met Error 66 Temp Set Failed Factory default The ZPDF command resets all the parameter saved in EEPROM to the factory default values It is useful to set the UGAPM to the known initial state when the user experiences problems due to corrupted parameters After load ing Factory default values the user has to re enter all the network parameters IP address Subnet mask and default Gateway to ac cess to Ethernet interface again UGAPM Series Universal Gas Analyzers for Process Monitor Chapter 4 UGAPM Error Messages In This Chapter This chapter lists and explains all the error messag es displayed on the UGAPM 4 1 Introduction sr 4 2 4 2 Error messages ca A 4 3 Communication errors messages 4 3 Warning error mes
28. is also provided If Option 2 is included a port for the vent gas for the RGA chamber is also available Fig 1 5 Figure 1 5 Rear Panels 1 2 3 Top Front Components In Fig 1 6a the main chamber is shown It consists of a sample line set a cubic chamber an RGA analyzer a chamber heater CHA and a thermocouple The sample line set is composed of SS re ducer 1 8 1 4 not shown in the figure single line sample valve SRS Stanford Research Systems UGAPM Series Universal Gas Analyzers for Process Monitor UGAPM Basics 1 9 SSV and an adapter The sample line set the RGA analyzer and the chamber heater are attached to a 2 75 cubic chamber as shown in Fig 1 6a These components are covered by the heat insulating box for the shipping assembly Fig 1 6c If Option 1 is ordered a multiple inlet valve and its controller are installed here The outlet of a multiple inlet valve is connected to a multi line sample valve MSV with a proper coupling adapter Fig 1 6a If O100HC is ordered a sample line heater SAM a sample line heating jacket set and an SSV inlet connection set heater and insulator will be assembled as shown in Fig 1 6b Multiple inlet valve MI SSV gt CHA amp Thermocouple Multiple inlet valve controller Figure 1 6a Top Front Components UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com 1 10 UGAPM Basics SSV inlet
29. is in Torr unit Then click the Apply button In a couple of minutes all the proper display will be set When Ext CM is set to be OFF at the option the above setting process has no effect at all B E Components Single Line SV CLOSED 9 Roughing Pump IDLE 9 Turbo Pump ON 9 RGA ON lon Gauge ON IG Fal E E Options Multiple Inlet 3 MultLineSV OFF Vent Valve OFF 5 Sample Heat OFF E AutoVent_ ON Ex CM ON ho Ciy eana Fig 2 34 Screenshot of the Ext CM item on the UGA software Vent Valve rr Sample Heat Q Auto Vent UGAPM Series Universal Gas Analyzers for Process Monitor Phone 408 744 9040 www thinkSRS com Chapter 3 Remote Programming In This Chapter This chapter describes remote prgramming of the UGAPM 3 1 Introduction inst 3 3 Comuunication via RS232 3 3 Communication via ethernet 3 3 Command format 4 are h 3 3 3 Command syntax ida e eek 53 3 4 3 2 Commands 3 5 Mode setting commands 3 5 INS e Eee Ge rae awe Go ES 3 5 DVIS ate oo gee ir hg He Ge we Dede Ae 3 6 A A Gee fee acne BS 3 6 ZMBK 2 fi Rin As ARNA 3 6 ZMOD eB an a as a a 3 7 Components control commands 3 8 ZCRP P Doc da es 3 8 ZCTP 2 fi gnc ce ee ee ee eee 3 8 ZON VAN od chek de Gee ews 3 10 ZOBV O ibn ox e icg le bow no s Ga ab ks 3 10 ZORG 2 fess oop wo d ole due oo ws Ei ZCIG li 6211 ZCVV J fese arado ca
30. needed Start Wake When the green button is pushed the green LED beside the but ton will blink The UGAPM will perform an automated pump ing down procedure to reach the Ready state At the end of the sequence this LED will stop flashing and remain lit Sleep Pushing this button will put the system in an idle state This state consumes less power and prolongs the useful life of the pumps This button works only TP is in full speed Stop Pushing this button will cause the UGAPM to automatically turn off all components as quickly as possible Universal Gas Analyzers for Process Monitor SRS Stanford Research Systems UGAPM Series Guide to Operation 2 7 2 2 2 Front Panel Menu System 2 2 2 1 Entering the Menu System You can toggle between the menu system and the selected display using the Level up button To enter the menu system push the Level up button on the control keypad To leave the menu sys tem push the Level up button again from the top menu Whenever the user makes a change from the control menu the dis play changes from the menu system to the selected display From non control menus the user must hit the Level up button repeat edly to return to the selected display as shown in the following drawing Top Level The selected m Contr Is m selected O The t n etc splay Off On Di Auto Setup Menu Communication Vacuum controls a The selected gt Sa
31. of gas molecule Mul tiple ionization molecular fragmentation and changes in the isoto pic composition of the molecule are responsible for the effect All ions formed contribute to the mass spectrum of the molecule and define its fragmentation pattern The identification and interpreta tion of mass spectra must begin with a knowledge and understand ing of the standard fragment patterns of atoms and molecules that may exist in the system The standard fragment patterns of most molecules commonly encountered in residual gas analysis are well established and listed in the general RGA Literature A very com plete library can also be accessed through the Library Search Util ity of the RGA Windows software The Gas Library has a standard text file format and can easily be read extended or modified by the user to fit his individual needs 5 1 2 Partial Pressure Measurement UGAPM Series Once the different components of a mixture have been identified it is possible to use the RGA to obtain quantitative values for the vari ous partial pressures This section describes the basic steps needed to perform quantitative measurements with the instrument The Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com SRS Stanford Research Systems Calibration and Input Design formalism presented assumes multiple gas analysis but is equally valid for single gas measurements Please consult the suggested references for d
32. port in this example it is COM3 Click the Connect button and close the dialog box You can now start gas analysis 2 3 6 Options and Accessories 2 3 6 1 Multiple inlet valve control The UGA control software shows the present valve position in the state indication area and also the Reading and Operation sub win dow Clicking the entry for the Multiple inlet valve on the Option section of the Reading and Operation sub window will display the channel selection menu See Fig 2 32 in the next page Select the desired channel number then apply it When UGAPM receives the command of changing a channel the system will perform three way Refer to the section of 2 2 4 1 1 When the Multi line SV MSV open safety has been set to be on and MSV was open the system will close MSV and the valve will move to the specified channel then the system will try to open MSV at the specified channel with the opening safety function 2 When the MSV open safety has been set to be off then the valve will rotate to the specified channel without any precautions 3 The valve will rotate to a new channel immediately when MSV is closed regardless the MSV open safety has been set to be on or off Before the valve is used plug the unused channels with the provid ed plugs A user can use any length of capillary as long as the al lowed operating pressures are obtained Please note however that the response time will be affected by the len
33. safe operation Control of the UGAPM is governed by a built in microprocessor This CPU handles all the data flow between the Auxiliary PCB Ion gauge control PCB TP driver and RGA to itself and also to a PC Applicable Pressure Ranges with Capillaries 0 01C Multi 0 1C Multi 1C Multi 4 gt 10C Multi 0 01C Direct lie 0 1C Direct 1C Direct 10C Direct 6 0E 7 7 0 7 Torr 10 1 0 1 0 01 0 001 Sample Pressure Torr Fig 1 2 Typical operating pressure chamber pressure data depending on selected capillaries and sample pressures Dotted lines are for multiple inlet valve cases and solid lines are for direct input cases UGAPM Series Universal Gas Analyzers for Process Monitor www thinkSRS com The RGA chamber is a six way cross with 2 3 4 conflat flanges One port is assigned for a user to use the built in capillary pressure reduction system to designed sample pressures Two extra ports are available for direct connection to various high vacuum ranges from 10 Torr to 10 Torr using a proper connection or to vari ous sampling methods for example a direct sampling using a leak valve For high vacuum application less than 10 torr 1 5 inch OD tubing with 3 feet long can be attached to the port with 2 75 inch CF flange directly The system may be configured with a multiple inlet valve allow ing a user to monitor up to 8 capillaries at various locations in their system or in several systems
34. see photo above e Unscrew the Swagelok fitting 1 8 OD tube adapter with two 7 16 wrenches and remove the pin set see photo in the next page UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com Quick Start e Keep the pin set at a safe place to use later e Connect the end of your capillary with the 1 8 Swagelok fitting into the sample valve and tighten firmly enough for vacuum SRS provides 4 kinds of capillaries for the range of the sample chamber pressure from 20 torr 15 mbar to 1 mtorr 8 x10 mbar Refer to the following table to confirm the proper selection of the capillary Table Specifications of Capillary for sample pressures Sample Pressure Range mbar 15 45 5 0 0 5 0 9 0 05 0 25 0 0008 e Replace the panel e You may use the capillary as it is shipped for this procedure The other end of the capillary is plugged with the vacuum tight fittings UGAPM Series Stanford R rch Systems SRS MAn Seren Universal Gas Analyzers for Process Monitor Quick Start xi UGAPM control through a remote PC e Insert the UGA RGA software CD into your PC and follow the prompts to install the UGA and RGA control software Please note You must install the software with administrator account privileges This is critical for Vista Windows7 or higher This program needs the full privilege of writing data e Power up the UGAPM if it is off e Setup Et
35. software controls the whole UGAPM system and provides many data acquisition modes which should fulfill the needs of most users This user manual discusses those aspects of the instru ment that are relevant to controls of UGAPM and data acquisition from the RGA A full featured application software included with the instrument provides an intuitive graphical user interface to the controls See figure 2 3 All pumps valves and heaters can be controlled from within the software Every operation that takes place valve open or close pumps turned on or off heaters activated etc is logged as a time stamped event by the software The event log can be stored as a file on the PC hard drive This log can be very useful for troubleshooting if a user finds the UGAPM s interlocks activated while he was away the event log will show what gauge registered an overpressure and when This allows the user to track exactly where a problem began instead of guessing what went wrong This can save hours of time in debugging a vacuum process In order to obtain RGA data the UGAPM needs to be connected to a PC This means that even though the system can be operated from the front panel RGA software will be used to analyze the gas sample SRS provides both UGA control software for UGAPM and RGA software to operate the system and also to handle the analysis By installing these applications a user can control the experiment remotely Generally the softw
36. the process of changing state the LED will blink while the UGAPM microprocessor verifies it is safe to actuate the component Note that the status keypad has several grey rectangular buttons associated with the components in the UGAPM These buttons are shortcuts to menus that will be shown on the display of the control keypad which is beside the status keypad You can navigate the menu system on the control keypad or use the shortcuts on the sta tus keypad for quick access Fig 2 1 The Status Keypad 2 2 1 2 Control Keypad The right hand pad on the front lower panel of the instrument has a display and buttons to display the status or to control the instru ment We will refer to this keypad as the control keypad Any change to the state of the UGAPM must be made using this keypad No changes will occur until the user pushes the enter key or auto control buttons on the control keypad The control keypad has sev eral components each is briefly defined below SRS Stanford Research Systems UGAPM Series Universal Gas Analyzers for Process Monitor G uide to Operation UGAPM Series Universal Gas Analyzers for Process Monitor www thinkSRS com SLEEP lt A Fig 2 2 The Control Keypad Display device The display serves two functions It presents system information and allows the user to enter menu driven commands The default function is the information display You can select a different dis play pressures
37. to turn on the ion gauge IG 12 Push the Ion Gauge button on the status keypad 13 Turn on the IG with the control keypad 14 At this point it is safe to put the roughing pump in idle mode This prolongs the pump life Push the Roughing Pump RP button on the status keypad 15 Change RP to the idle state with the control keypad At the step 5 sometimes UGAPM gives the error 102 RP too high when the system is turned on for the first time or turned on after a long turning off period This happens usually in humid environ ment In this case the longer BP RP pumping period at the start is required In the control menu go to Pressure Interlock menu Make this off And repeat the procedure up to the step 10 and wait till RP goes down to below 1 torr or for a couple of hours If this doesn t happen in an hour the error is real Please check the leak At the step 13 sometimes UGAPM gives the error 105 IG too high when the system is turned on for the first time or turned on after a long turning off period Do the same things written above If this does not solve the problem the error is real Please check the leak or TP performance 2 2 2 5 Base Pressures Once the system is pumped down these approximate base pres sures should be realized under the given conditions Note that if lower base pressures are required baking may be necessary RP idle General Ready state RP lt 1 0 Torr TP full spee
38. turned on manually by push ing RP button and selecting the vent valve VV there Refer to the pages 2 14 amp 2 16 of this chapter If VV is not installed wait until the TP stops completely to open the chamber 2 2 2 7 Manual Sleeping Procedure Note that this procedure can be accomplished automatically simply by pushing the yellow Sleep button on the control keypad This procedure assumes the UGAPM is currently sampling designed pressures 1 On Status keypad push Single line Sample Valve SSV button for a normal operation while push Multi line Sample Valve MSV for the multiple inlet valve operation 2 Close the sample vale with Control keypad Push the RGA button on Status keypad 4 Turn off the RGA with Control keypad If the stability of RGA is concerned the user can let the filament of RGA on during idling The user may skip these RGA steps 5 Push the Ion Gauge IG button on the status keypad Turn off the IG with the control keypad s Push the Turbo Pump TP button on the status keypad w D SRS Stanford Research Systems UGAPM Series Universal Gas Analyzers for Process Monitor Guide to Operation 2 11 8 Set idle for the TP with the control keypad Wait till the TP spins down to the idle speed 10 Push the Roughing Pump RP button on the status keypad to check the status 11 If the RP status is not in the idle state set the RP idle with the control keyp
39. using the single mass measurement mode of the RGA For example a 10 amp peak value corresponds to 9 8 x 10 Torr of Ar Note that equation 4 is a particular case of equation 3 and that the fragmentation factor for the principal peak of Ar is one by definition The UGAPM has been calibrated at the factory to measure the par tial pressure of nitrogen correctly For many purposes this will be suitable Overtime the calibration can change or operating condi tions may change There are many factors involved in calibrating the UGAPM and interpreting the mass spectra To make accurate measurements the following conditions need to be met The total pressure needs to be known The main sensitivity factor needs to be calibrated Sensitivity factors change as a factor of time due to aging and periodic recalibration is necessary For careful quantitative analysis it is important that the sensitivity of the RGA be determined for every gas which may be a component of the system Each gas component in the sample will fragment differently and will have slightly different sensitivities Correct calibration of the mass scale is essential during qualitative analysis for the correct assignment of mass numbers to the different peaks The mass scale will affect the peak height if it is more than 0 3 amu out of calibration The mass resolution of the quadrupole mass filter Am must be kept at or under 1 amu to avoid overlap between
40. well as 0 or 17 if it has an error condition Errors and warnings The command is ignored if any of these conditions are true Error 81 No Mux detected Speaker volume The ZCVL i command set the speaker volume to Off i 0 Low i 1 Medium i 2 or High i 3 The ZCVL query returns the current speaker volume Example ZCWL 1 Sets the speaker volume to Low UGAPM Series Universal Gas Analyzers for Process Monitor Remote Programming 3 15 3 2 3 State Query commands ZBST Component states The ZBST query returns the component current state bits It returns an integer that contains the following bit information Bit Name Bit Number Bit set on STATE_BIT_ERROR BIT15 Any error condition STATE_BIT_POWER BIT14 Power up STATE_BIT_AUTO BIT13 Automatic mode is entered Reserved BIT12 Reserved STATE_BIT_BAKE BIT11 Bake mode is entered STATE_BIT_HEAT BIT10 A heater is active STATE_BIT_VENT BIT9 The vent valve open STATE_BIT_IG BIT8 IG active STATE_BIT_RGA BIT7 RGA active STATE_BIT_SSV BIT6 SSV open STATE_BIT_MSV BIT5 MSV open STATE_BIT_TPIDLE BIT4 TP goes idle STATE_BIT_TP BIT3 TP is on STATE_BIT_RPIDLE BIT2 RP goes idle STATE_BIT_RP BIT1 RP is on Reserved BITO Reserved ZBCT Components changed The ZBCT query returns the component change state bits This returns only the bits defined above in the ZBST command that have changed either from Off to On or from On to Off and also either from Closed to Open or from Open to
41. 4 6444 1 11 Bottom components since 244 1 11 COVETS ae e 5 bee ee eae a d a a 1 12 Miscellaneous parts 1 13 1 3 Options amp Accessories 4 44 24 1 13 Multiple inlet valve option 1 14 Vent valve option 1 15 Sample heater accessory 1 15 External Capacitor Manometer ACCESSOTY 5 6 a eee oa ewe ee 1 18 1 1 Introduction UGAPM Basics The Universal Gas Analyzer series for Process Monitor UGAPM instruments are modern mass spectrometers designed for the anal ysis of small gases The three systems 100 200 and 300 differ only in the mass range they can detect A quadrupole mass spectrom eter also called a residual gas analyzer or RGA performs the task of analyzing the gas UGAPM system allows the RGA to analyze gases in vacuum systems that operate in the mid vacuum range 10 mbar to 15 mbar The inlet continuously samples gases at low flow rates about 5x10 mbar L sec making the instrument ideal for on line analysis Not only is data acquired continuously as opposed to batch sampling employed by gas chromatographs but also very quickly The system allows data to be collected quickly a complete spectrum can be acquired in under one minute and individual masses can be measured at rates up to 25 ms per point To accommodate mid vacuum sampling a pressure reduction scheme is required since the spectrometer operates at high vacuum lt 10 Torr In order to achieve this performance
42. 4 and SS316 insulators alumina ceramic seals Viton buna N and nitrile butyl rubber misc aluminum Tygon UGAPM Series Universal Gas Analyzers for Process Monitor vii General Startup time 8 minutes from full stop Max Ambient Operating 35 C Temperature Power requirement either 110 V 60 Hz or 220 V 50 Hz not field selectable less than 600 W total Dimensions 28 cm H x 30cm W x 65cm D 11inHx12inWx 26 in D without Handles 33 cm H x 35 cm W x 67 5 cm D 13 in Hx 14 in Wx 27 in D with Handles Weight 34 kg 75 lb UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com viii UGAPM Series SRS Stanford Research Systems Universal Gas Analyzers for Process Monitor Quick Start ix Quick Start This section will describe a quick start procedure for operating the UGAPM and getting the analysis data of the air gas in the capillary from a remote PC through Ethernet connection For this procedure no test chamber is necessary If you find any damage to the UGAPM do not proceed and call SRS at the number below For detailed control procedures please refer to Chapter 2 Front Panel Operation of UGAPM Capillary connection For UGAPM systems with O100HC Sample Heater Accessory see the section of Options and Sample Heater Accessory in the Chapter 1 of this manual e Pop off the front upper panel by grasping both sides of the panel and pulling up
43. C connector on the rear lower panel allows a user defined interlock It behaves as an emergency shut down switch when it receives a TTL low signal In any state of the UGAPM it stops the system completely By using this BNC connection with a user s external equipment the UGAPM can be safely shut down if an emergency occurs 2 2 4 6 Diaphragm Pump Tuning SRS has already set default values for the power consumed by the diaphragm pump This level is a good overall compromise be tween conserving pump life and maintaining good vacuum Ad vanced users may wish to change the level of power consumed by the pump To tune the power level used by the pump navigate to the pump tuning menu select the level with the arrow keys and press the enter key This function work whether the pump in on idle or off 2 2 4 7 Auto Vent Valve If the Auto vent valve option is set to be on the TP vent valve will open whenever the RP stops This happens automatically as part UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com 2 19 Guide to Operation of the stopping procedure Sometimes users do not want this auto matic behavior and would like to handle the vent valve manually In this case the Auto vent valve option should be set to be off The RP button has a shortcut to the vent valve control The default is on The UGA control software also controls this option 2 3 Remote Operation 2 3 1 Overview The
44. Connection Settings dialog box TCP IP connection setting is established here Click the Add button Another dialog box User Info will pop up See Fig 2 8 in the next page e Type in the proper IP Address User ID and password the same ones set in the UGAPM UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com 2 25 Guide to Operation E Connection Settings User Info Address 172 Login SRSUGA Password eeeeee Apply Fig 2 8 Screenshot of the User Info box for TCP IP connection Connection Settings Serial TCP IP Log Dir Then click Apply The connection settings dialog box should have the information typed in as shown below Remove Address 172 25 128 14 10 0 1 26 172 25 128 15 User Password A Xxxxxx XxXxX Enable TCP IP Cancel Fig 2 9 Screenshot of the Connection Settings dialog box after the data typed in at the User Info box SRS Stanford Research Systems UGAPM Series Universal Gas Analyzers for Process Monitor Guide to Operation 2 26 Make sure the TCP IP connection is enabled and the proper IP is marked Click the OK button This will close the Settings dialog box In the Main menu select Connect The following ConnectorDialog window will appear ConnectorDialog
45. GA or UGALT or UGAPM series This control software can handle up to 5 instruments with one control software as shown in Fig 2 17 in the next page UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com 2 33 Guide to Operation 2 Multi UGA controller Active control UGA2 Main Help UGA2 UGA3 UGA4 UGAS Status No instrument connected System Error System Warning Manual Control System Bake Currer El Fig 2 17 Screenshot of Multi UGA control panel Close UGA closes the opened control panel Quit sub menu closes the program Instrument Settings sub menu will open a following pop up dialog box Fig 2 18 called Settings In this box there are six sub menus Logging Graph Bake Heaters Units and Misc After changing values in this window click the OK button to save the data 14 Settings Logging Graph Bake Heaters Units Misc Message Logging Data Logging C Enable C Enable log everys sec FileName Format Filename Format UGAX_mes_timestamp UGAR_data_timestamp Fig 2 18 Screenshot of the Settings dialog box showing the Logging tab SRS Stanford Research Systems UGAPM Series Universal Gas Analyzers for Process Monitor Guide to Operation 2 34 The Logging tab contains all the logging conditions for UGAPM control as shown above enabling mes
46. GAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com SRS Stanford Research Systems 5 3 6 Extensions INLET capillary Calibration and Input Design As discussed in the previous section the capillary can be designed to any length necessary by choosing an appropriate bore diameter The cost of material might warrant the use of an extension of an other material e g common flexible SS tubing This can be accom plished as long as the extension is added to the vacuum side of the capillary CORRECT 3 mm ID x4mL UGA INCORRECT Fig 5 6 Good and bad methods of adding an extension of vinyl tubing to the capillary The incorrect approach above will destroy the response time of the instrument At 25 ul per minute it would take 33 minute for gas to travel from the inlet to the UGAPM The correct approach would take less than 2 seconds The decrease in pressure causes the volu metric flowrate to increase 1000 times as the gas travels through the capillary The flow in the extension is viscous which implies that only diffusion will cause mixing in the axial direction Sud den changes in composition at the inlet will be detected as sudden changes at the UGAPM The response is simply delayed by the amount of time it takes to traverse the extension Only very long extensions should show any mixing For extensions the general rule is to get the beginning of the capillary as close to the sa
47. GAPM error mes sages please refer to the chapter 4 Interlocks PG reading RP display above 5 Torr TP off PG reading RP display above 2 Torr TP temperature reading above 60 C IG reading above 2 0x10 Torr IG or PG reading above the threshold SRS Stanford Research Systems UGAPM Series Universal Gas Analyzers for Process Monitor Guide to Operation 2 18 There are several other operational restrictions for control of the components For example the RGA will not be on when TP is not at full speed or in the idle state during the auto controls When the status of a component is set to change the UGAPM checks the pres ent conditions to determine whether the action would be allowed If an action is disallowed a warning message is generated and the warning LED will blink for 4 seconds Detailed explanations of all the warnings are listed in the chapter 4 of this manual The pressure interlocks listed above are in place to maintain safe operation of the UGAPM Under certain conditions users may de sire to defeat the pressure interlocks In this case Enter the UGAPM main menu tree and navigate to Controls gt Pressure Interlock Se lect Off and press the enter key Only manual control is possible while the pressure interlocks are defeated Running the UGAPM with its interlocks defeated can damage the UGAPM Only experts should attempt to run with the interlocks defeated 2 2 4 5 User Interlock input A BN
48. ID would perform the required pressure reduction for 10 Torr sample In a single stage design all the gas that enters the capillary is delivered to the spec trometer chamber For RGA chamber pressure of 5x10 mbar with a 80 ls pump the flowrate at the capillary inlet is 400 mbar uL s Therefore the velocity of the gas near the capillary inlet is about 0 4 uL s To demonstrate the figure at the right shows the end of a 1 16 OD capillary and a hemi spherical boundary of the same diameter The time it would take to drain the volume inside the boundary about 1 uL is a measure of the response For the selected volu metric flowrate in this example it would take about 2 5 seconds to drain the tiny volume This speed implies that the capillary relies on semi molecular flow to respond to concentration changes This result is somewhat different from the real sample of 10 mabr or 0 1 torr At 10 mbar sample it is about 10 seconds while it is about 1 5 second at 0 1 mbar This means the flow rate at the different sample pressure differs from the atmospheric sample 5 3 1 Flow Calculations The pressure and flowrates of the sampled gas can be calculated with simple formulas The calculations here assume that gases be have ideally which is a reasonable approximation at the tempera tures and pressures involved Actual system performance com pares well with these simple calculations The pressure drop across a length of tube is related to th
49. Messages 30 31 32 33 34 35 36 37 38 Reserved Reserved Reserved Multiline SV OPEN The multi line sample valve MSV is already open when the single line sample valve SSV open command is received Singleline SV OPEN The single line sample valve SSV is already open when the multiline sample valve MSV open command is received Reserved Roughing pump OFF The turbo pump is not allowed to turn on or idle when the roughing pump is not on or idle Roughing pump ON The vent valve is not allowed to turn on when the roughing pump is on Rough pressure HIGH The roughing pump is not allowed to turn idle when the roughing pressure is higher than 2 Torr 39 40 Reserved 41 UGAPM Series Turbo pump running The roughing pump is not allowed to turn off when the turbo pump is not off Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com 42 43 44 45 46 47 48 49 50 SRS Stanford Research Systems UGAPM Error Messages Turbo not ready The RGA the ion gauge or the bake heater is not allowed to turn on when the turbo pump is not on nor idle RGA ON The turbo pump is not allowed to turn off when the RGA is on RGA OFF The leak test mode is not allowed to start when the RGA is off Reserved IG ON The turbo pump is not allowed to turn off when the
50. Operation Using the similar procedure two advanced operations can be set here Auto Sample Valve and Auto Vent Valve These items are shown under the Options head 9 Auto control buttons These buttons have the same functionality as the buttons on the front panel with an additional Bake On Off button Only the ap plicable mode buttons are activated depending on the status of the UGAPM The others will be grayed out and will be disabled at that time 10 Time information and current mode indicator board A user can turn on off the information by selecting the items in the Misc tab of Settings dialog box 11 Functional indicator board This panel indicates the errors warnings the status of system bak ing and the status of manual control 2 3 5 Launching RGA Software After a user brings the UGAPM to the ready state the unit is ready for using the RGA to analyze gas mixtures In order to obtain RGA data the UGAPM needs to be connected to a PC running the RGA software In this section we describe launching the RGA software For the detailed reference of the RGA software please refer the RGA manual or Help of the RGA software A user can connect to the RGA in two ways within UGA control software or directly with the RGA control software A Launching RGA software from within UGA control software Check that the connection is established e Check that the RGA is on If not turn it on by clicking th
51. Operation Manual and Programming Reference Universal Gas Analyzers for Process Monitor UGAPM UGAPM100 UGAPM200 UGAPM300 S RS Stanford Research Systems Revision 1 1 May 2014 Certification Stanford Research Systems certifies that this product met its published specifications at the time of shipment Warranty This Stanford Research Systems product is warranted against defects in materials and workman ship for a period of one 1 year from the date of shipment Service For warranty service or repair this product must be returned to a Stanford Research Systems authorized service facility Some components may be serviceable directly from the supplier Con tact Stanford Research Systems or an authorized representative before returning this product for repair Trademarks Ultra Torr and VCR are registered trademarks of Swagelok Co Tygon is a registered trademark of Norton Co All other brand and product names mentioned herein are used for identification purposes only and are trademarks or registered trademarks of the respective holders Contact Information Stanford Research Systems Inc 1290 D Reamwood Avenue Sunnyvale CA 94089 USA Phone 408 744 9040 Fax 408 744 9049 www thinkSRS com info thinkSRS com Information in this document is subject to change without notice Copyright Stanford Research Systems Inc 2014 All rights reserved Printed in U S A UGAPM Series SRS stanford R
52. PEN Warning 34 Sample valve OPEN Error 102 RP too high ZCRPZ Warning 33 Bypass valve OPEN Warning 34 Sample valve OPEN Warning 38 Rough pressure HIGH Turbo pump Off On Idle The ZCTP i command turns the turbo pump Off i 0 On i 1 or Idle i 2 The ZCTP query returns whether the turbo pump is Off 0 On 1 Idle 2 turning on 3 4 or 5 turning off 6 or 7 or turning idle 8 9 or 10 or in Error state 12 Example ZCTP 1 Turns the turbo pump On ZCTP Returns the state of the turbo pump UGAPM Series Universal Gas Analyzers for Process Monitor Remote Programming UGAPM Series Errors and warnings The command is ignored if any of these conditions are true ZCTPO Warning 43 RGA ON Warning 46 IG ON Warning 48 System Bake ON Error 110 TP stop failed With Error 110 the ZCTP query returns Error state 12 until the turbo pump is turned off ZCTP 1 Warning 36 Roughing pump OFF Error 104 TP too high Error 111 120 Error conditions detected by the turbo pump controller Once one of these errors occurs the UGAPM has to be turned off and turned on again to clear the error With Error 104 the ZCTP query returns Error state 12 until the turbo pump is turned off ZCTP 2 Warning 36 Roughing pump OFF Warning 48 System Bake ON Error 104 TP too high Error 111 120 Error conditions detected by the turbo pu
53. The present value of a parameter may be determined by sending a query command e Commands that MAY be queried show a question mark in parentheses after the mnemonic e Commands that are ONLY queries have a after the mnemonic with no parentheses e Commands that MAY NOT be queried have no A query is formed by including the question mark after the com mand mnemonic and omitting the queried parameter from the command The query parameters shown in are NOT sent with a query The query returns the value of these parameters Values are returned as a string of ASCII characters unless otherwise noted UGAPM Series Universal Gas Analyzers for Process Monitor Remote Programming 3 2 Commands Do NOT send or as part of the command For example the command sequence ZPTB i j is used as follows ZPTB1 105 Set the bake temperature for the chamber heat 1 to 105 C ZPTB 1 Query the bake temperature for the chamber heater 1 Variables are defined as follows i p integers i i i i Dotted decimal format for IP address Subnet mask and default Gateway address s text string for login name and password Commands to set values which may be different for each channel require the p parameter These values must be queried separately for each channel All numeric variables should be expressed in integer i e 5 nei ther floating point 5 0 nor exponential formats 0 5E1 Strings are sen
54. ad so In order to get the ready state from the idle state WAKE sim ply turn on the TP as stated in the manual pump down procedure above and turn on the RGA and the IG 2 2 2 8 System Bake When the bake command is issued the heaters for the RGA cham ber the cube and the elbow adapter between the cube and TP are on and heat up the chamber and the elbow to the specified tem peratures This command can be accessed by pushing the Sample Heat button or in the main menu tree 1 Push the Level up button to enter the main menu of UGAPM 2 Select System Bake 3 Select Bake Time 4 Set the baking time in hours 2 100 and press the enter key 5 Select Bake Temperature 6 Select Elbow de Use the arrow keys to set the elbow bake out temperature 40 120 C and press the enter key 8 Select Chamber 9 Use the arrow keys to set the chamber bake out temperature 40 120 C and press the enter key 10 Select On and press the enter key to start the bake out The display will show the time remaining on the bake the tempera ture of the elbow and chamber Note that because the user can enter the system bake from any state except leak test the UGAPM will automatically configure itself for a system bake During this process the system bake LED will blink and the sample heat LED is off After the UGAPM reaches the proper setting the sample heat LED will be lit and the sys
55. adjacent peaks Changes in Am during the measurements caused by aging severe contamination and large temperature changes will cause variations in the sensitivity of the instrument and the shapes of the fragmentation patterns of the molecules affecting all quan titative measurements The gain of the electron multiplier is mass dependent and needs to be determined prior to performing measurements with the device The gain characteristics of the multiplier change with time and periodic recalibrations are very im portant Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com Calibration and Input Design The following sections of this chapter describe several procedures designed to assure that all the calibration conditions described above are satisfied prior to a set of partial pressure measurements All tuning procedures can be executed from RGA Windows soft ware Users writing their own programs can implement the pro cedures themselves using the RGA Command Set and the instruc tions in the RGA manual All the tuning procedures require the ability to introduce pure gas es or a mixture of gases of known composition into the system and a reference pressure gauge All pressures are absolute it is possible to make measurements in gauge pressure Important Tuning should only be attempted after the unit has been warmed up with the filament on and under typical operating con ditions for at least o
56. alibration and Input Design 5 27 5 3 5 Materials and Fittings Users will find vendors of gas chromatography supplies a good source for capillaries and fittings Capillaries are available in many materials No material is ideal for all applications The following table list features of several materials material min bore advantages disadvantages diameter stainless 0 005in rugged e difficult to cut e high temperature without clogging e durable the bore connections e marginal flexibility PEEK 0 005in e highly flexible e weaker e can be cut by user connections e smallest bore e cost e not flexible e low temperature Three conventional methods are available for making connections to the capillaries metal compression fittings graphite seals and O ring seals Metal compression fittings are suitable for stainless steel tube The steel is capable of deforming to make the seal The out side diameter of plastic capillaries is not round enough to make a good seal to metal ferrule Graphite ferrules in a metal fitting are a better choice The graphite will conform to any irregularities in the surface of the capillary In addition the graphite ferrule does not permanently deform the capillary as a steel ferrule would O ring seals e g Ultra Torr make good seals They only lack in the ability to operate at high temperature SRS has chosen SS material for capillaries to make a leak tight con nection for high vacuum U
57. ample Valve SSV or MSV opening UGAPM system uses 4 different capillaries to cover the pressure range of a user s process chamber from 20 Torr to 1 mTorr as shown in the following table Sample Pressure range Capillary Specifications ID OD Length Volume 20 6 15 4 5 1 16 1 0 025 l 0 010 i 0 50 7 0 0 7 5 0 0 5 0 020 1 16 0 100 1 2 0 07 0 9 0 05 yon 1 16 0 520 0 046 0 3 0 001 0 25 0 0008 an 1 16 1 570 0 080 Each capillary should have specific volume and this volume should be evacuated before the sample valve is open for the analysis of a user s process chamber However sometimes a user would forget pumping out the volume of a capillary Or it happens to be replace the capillary in the middle of the measurement Or accidentally a user would open the sample valve without connecting the capil lary to the sample chamber In any cases UGAPM is designed to protect vacuum pumps for opening either sample valves SSV or MSV When UGAPM receives the SSV or MSV open command The fol lowing process will be performed 1 Open SSV or MSV for 0 1 second and close it 2 Check IG reading whether it is below 1 5 x 10 Torr 3 If IG reading is higher than 1 5 X 10 Torr then wait till IG reads below 2 0 x 10 Torr 4 Repeat steps 1 to 3 for maximum 5 times 5 If IG reading is below 1 5 x 10 Torr at Step 2 then wait till IG reads below 2 0 x 10 Torr and open SSV or MSV fully
58. ange the value Then hit the confirmation button The next number will be blinking Repeat as above to set the proper value After keying in all four numbers the display will move up to the Ethernet menu Choose Subnet Mask and set the parameters Follow the same procedure for the Gateway item Push the Level up button several times to escape the menu tree and enter the display mode From the RS232 connection After UGA control software is connected through the RS232 serial port Refer to the next section 2 3 3 2 the TCP IP parameters IP address Subnet mask Gateway User ID and Password can be typed in from the software using the Wizard menu in the UGA control software The Wizard menu can be used only when the serial port connection is activated Check the connection through the serial port In the Main menu select Wizard The following screen will appear Status General Network Security Options This wizard helps to setup the QUES coronas aas amar cn UGA instrument remotely using serial connection UGA S N 54321 Fig 2 4 Screenshot of the Wizard dialog box in the Main menu UGAPM Series of UGA control software Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com 2 23 Guide to Operation Click the Network tab to type in IP address Subnet mask and Gateway W WizardDialog MOR General Network Sec
59. arameter is out of range Bad parameter A parameter is misformatted such as an IP address a Subnet mask a Gateway address a login name or a password Missing comma Command string does not have a comma after the first parameter Reserved Not a number A Parameter is not a number Reserved Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com 22 23 24 25 26 27 28 29 SRS Stanford Research Systems UGAPM Error Messages RGA on network When TCP IP connection is open the Serial communication cannot talk to RGA Command buffer full The UGAPM received too many commands to process before time critical operations occur Some of the commands are rejected RGA buffer full The RGA received too many commands to process in time Some of the commands are rejected RGA unavailable RGA is not available to communicate when transitioning between power on and off or transitioning into and out of leak test mode String too long The login name and password should be 15 characters or less Illegal character The login name and password changing commands ZPNM and ZPPW accept alphanumeric characters 0 9 A Z a z only RGA OFF Communication to RGA is not allowed when the RGA is off Reserved UGAPM Series Universal Gas Analyzers for Process Monitor UGAPM Error Messages 4 2 2 Warning Error
60. are mimics the front panel controls there are auto control and individual control modes It also dis plays system status The UGA RGA control software is a Windows based application which runs on a PC running at least Windows XP as the OS with 256M bytes system memory The UGA control soft ware supports both RS 232 and Ethernet remote interfaces In this section software installation communication and operation will be explained in detail SRS Stanford Research Systems UGAPM Series Universal Gas Analyzers for Process Monitor Guide to Operation 2 20 Active control UG O Main Help UGAT uGa2 UGAS uGas UGAS Status System Warning 5 5 2014 3 08 40 PM No _instrument connected Manual Control System Bake Current Mode 3 OFF Elapsed Components Sample Valve 7 Bypass Valve o Reading and Operation Display Bypass Pump o z PES Bypass Line PORE Ta o Roughing Line i Chamber Turbo Pump o E Turbo Pump LTP Speed pas o TP Current E Temperature Ion Gauge num Oo G e T Sample Line T Elbow T i Turbo Pump T Options E Components E Sample Valve CLOSED MED waite o Bypass Valve CLOSED Vent Valve o Bypass Pump OFF Roughing Pump OFF Sample Heat o Turbo Pump OFF Auto Vent REMOTE o lon Gauge OFF Auto Sample Valve o IG Fat E Options Multiple Inlet NOT INSTALLED Vent Valve OFF Sample Heat OFF AutoVent OFF Auto Sample Valve OFF
61. as the al lowed operating pressures are obtained Please note however that the response time will be affected by the length of the capillary 2 2 3 2 Vent Valve On the front panel click the Roughing Pump button to enter the RP control menu tree The last item is the vent valve Choose Close or Open as desired When Open is selected initially the UGAPM opens the valve for 1 second then closes the valve After 40 seconds the UGAPM will SRS Stanford Research Systems UGAPM Series Universal Gas Analyzers tor Process Monitor Guide to Operation 2 13 open it again for 5 minutes to vent the system After the five min utes period the valve closes again This sequence allows TP to stop smoothly without a pressure shock It helps the system to stop safely in several minutes and to protect the RGA chamber from contamination 2 2 3 3 Sample Heaters In the sample heaters accessory two heaters the capillary heater and the sample line heater will be added to the UGAPM system The heating temperatures can be set from 40 C to the maximum of 100 C This temperature limit is important for the valves Sample valve performance On the front panel click the Sample Heat button to enter the heater control menu tree Here the users can set the temperatures of the sample heaters the capillary heater and the sample line heater in cluding other two heaters the chamber heater and the elbow heat er and turn on the sample
62. ass spectrum Universal Gas Analyzers for Process Monitor SRS Stanford Research Systems DEA Series Calibration and Input Design The background spectrum is correctly measured with the sample valve closed The software can only subtract two spectra when they cover the same mass range Set the software to acquire the spec trum either histogram of analog at the speed range and schedule you require To obtain a background subtracted spectrum follow these steps 1 Measure one complete analog or histogram mode spectrum with the sample valve closed If the software was set to scan on a continuous schedule you can select Stop at End from the Scan menu to stop when the current scan in progress is complete The data displayed must be a complete scan and be measured with the same parameters as the scans to follow 2 Under the Utilities menu select Background and select Scan Data Background from the dialog box Check the box next to Enable and select OK to close the dialog box This makes the current spectrum the background and all spectra displayed subsequently will have this spectrum subtracted from it 3 Open the sample flow valve and start the scan with the GO button The newly acquired spectra are the background corrected result The ability to subtract background is limited by signal proportion al noise which is typically present at between 1 10 of the signal magnitude Because th
63. ate is 38400 Push the Level up button to enter the UGAPM menu Choose Communication to move to the next menu tree Choose RS232 Baud Rate Choose the desired baud rate at the menu Hit the confirmation button to select the desired baud rate Push the Level up button several times to escape the menu 4 Click the Main menu of the UGA software and select Connection Settings The following dialog box will appear as shown in Fig 2 13 5 In the Connection Settings dialog box choose the Serial tab Verify that the serial resource is enabled as shown above Match the baud rate with UGAPM settings Then click OK UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com 2 29 Guide to Operation 2 Connection Settings Serial TCPAP Log Dir Enable Connector Baud Rate COM1 Enable Serial Fig 2 13 Screenshot of Serial selection in the Connection Settings dialog box 6 Click on the Main menu and select Connect If the resources are not shown immediately click Update several times ConnectorDialog Scan for UGA every time this dialog is being opened Settings Connector Instrument 1D Status Bind to COM1 UGA PM SRS_UGA_PM S N 0 1 008 Connected UGA1 Fig 2 14 Screenshot of UGA control software after selecting Connect in the Main menu The available Ser
64. ated below In Reading amp Operation panel at the right bottom sub window you can see all kinds of UGAPM running data Pressure TP Tem perature and the statuses of all the items If the system fails to reach at the Ready state please refer to the sec tion of 2 2 2 4 of this manual UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com xiv Quick Start Start Analog Scan e When the Current Mode indicator shows the ready state launch RGA software by clicking the Launch RGA button The RGA soft ware automatically connects to RGA through UGAPM e From the RGA software click the filament button on the toolbar to activate the ionizer See the figure below Click the GO button on the tool bar and an analog scan will start with the default scan range from 1 to 65 amu The mass spectrum will show a rough background spectrum aph Head Utilities Window Help w lu Hee Ome lao jaa M S lt 6 ole e Stop the scan e If you plan to sample a gas be sure you followed the directions under the previous section Capillary Connection and the sample pressure in chamber tested is in the proper range for the capillary used Or for the test run only the other end of the capillary can be blocked with a vacuum sealed valve and proceed next e Next return to the UGA control software and prepare for sam pling In order to open the sample valve click on the
65. ce of the system requires that the outlet of the capillary introduces the sample gas amount to result in between 1x10 to 5x10 mbar at RGA The later section of this manual discusses in greater detail the design of capillaries 5 1 8 Total Pressure and Composition The RGA measures partial pressure of the components in a gas stream For ideal gases the partial pressure is related to composi tion by P x P where P is the partial pressure of the i th component x is the mole fraction of the i th component and P is the total pressure It is evi dent from this equation that a measurement of P cannot determine both x and P To determine the composition x a value for P must be known In many applications total pressure is constant and therefore partial pressure is proportional to mole fraction When total pressure is not constant a method of determining its value must be employed to allow composition to be determined In theory the sum of the partial pressures determines the total pres sure i e P Pp In practice this summation requires care For example when us ing the P vs t mode to acquire data make sure to record all the major components of the gas being analyzed Beware of overlap ping peaks these complicate the analysis For example consider a 50 50 mixture of nitrogen and carbon dioxide The parent peaks UGAPM Series Universal Gas Analyzers for Process Monitor Calibration and Input Design for th
66. conditions The Pressure Reduction Factor is stored in the RGA files When using the UGAPM with various operating conditions one RGA file can be made for each set of conditions Each of these files will contain a different pressure reduction factor The procedure to de termine the pressure reduction factor is the same as used in the Initial Calibration section above Briefly disable the pressure re duction factor compare the measured value with a reference and calculate a new pressure reduction factor When determining the pressure reduction factor for each set of conditions make sure that the RGA sensitivity factor has not been changed To use the UGAPM at one of the multiple conditions simply open the appropriate RGA file and connect the window to the ECU if Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com 5 2 5 Corrections Calibration and Input Design the ECU is already connected to another window disconnect from that window first The software will now be ready to make mea surements It is worth restating that the pressure reduction factor is only ac curate when used with the matching RGA sensitivity factor The value in the RGA electronics can be changed by other users so the RGA sensitivity factor should be recorded or locked using the secu rity feature of the software 5 2 4 Calibration with Fixed Reservoir Air is a convenient calibrant gas for the UGAPM with a small res
67. connection set Sample heating jacket Sample line heater Figure 1 6b Picture of the sample line heating assembly Lai I E i LS a e E A E gt al a A a PE e a3 gt e Figure 1 6c Top Front Area after the heat insulating box is installed SRS Stanford Research Systems UGAPM Series Universal Gas Analyzers tor Process Monitor UGAPM Basics 1 11 1 2 4 Top Rear Components This area contains all the power supply related components RGA ECU a main power supply an auxiliary power supply and a pow er distribution PCB Fig 1 7 Power Distribution PCB po ys To io Meese aes AA Main PS Aux PS Figure 1 7 Components configuration at top rear RGA ECU 1 2 5 Bottom Components This volume houses vacuum control and system control consisting of TP connection elbow with its heater ELB TP Diaphragm pump of TP backing RP Pirani gauge PG Ion gauge IG roughing line Main control PCB Auxiliary control PCB Ion gauge control PCB TP controller a speaker and a TP cooling fan On the elbow a heater for system baking is attached Fig 1 8a The elbow area is surrounded with an insulating box for the shipping assembly PVC tubes are used to connect exhaust line and the system venting line UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com 1 12 UGAPM Basics IG ELB Figure 1 8a Bottom view of UGAPM component config
68. ctions Errors and Warnings The command is ignored if any of these conditions are met ZCMC 0 Warning 48 System Bake ON Warning 49 AUTO sequence ON Heaters Off Bake Heaters On Sample Heaters On The ZCHT i command turns heaters Off i 0 the bake heater s On i 1 or the sample heater s On i 2 The ZCHT query return the current heater state If the mode is 1 the heater temperature is controlled to the bake temperatures set by ZPTB command If the mode is 2 the heater temperature is controlled to the sample heat temperatures set by ZPTH command Errors and Warnings Th command is ignored if any of these conditions are met Error 61 Heater initialize ZCHT 0 Warning 48 System Bake ON ZCHT 1 Warning 42 Turbo not ready Error 62 Elbow Heater T C Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com SRS Stanford Research Systems ZCMI i ZCVL 1 Remote Programming Multiple inlet channel The ZCMI i command changes the multiple inlet valve channel to i The valid values for the channel number are from 1 to 8 The ZCMI query returns the current channel number if it is installed If not it returns 0 If the channel number reported from the multiple inlet valve controller is different from the channel number set by the main controller it returns 17 Example ZCMI 6 Changes the channel number to 6 ZCMI Returns the current channel number as
69. ctors can be modeled the overall response of the UGAPM to total pressure is best characterized experimentally A short experiment with the specific gas of interest equipment and operating conditions will yield a curve describing how the pressure at the RGA varies with Pos m 5 1 7 Operating Off the Design Pressure UGAPM Series Each system is specified for one inlet pressure the design point which is the designed sample pressure for each capillary The cap illary accomplishes the pressure reduction from the chosen design point to about 5x10 mbar at the RGA Each capillary is designed for the specific inlet pressure mainly by choosing length and bore diameter The inlet pressure to the capillary can be applied up to 15 mbar The inlet pressure for each capillary in the UGAPM can go as high as turbo pump could hold the proper pressure set by the fac tory below 2x10 mbar without the pressure checking safety or be low 2x10 mbar with the pressure checking safety Operating the inlet at high pressures would cause two unacceptable effects First the turbo pump exhaust pressure would be excessive and slow the pump The high pressure would increase the work load and cause excessive heating of the pump bearings In the UGAPM these fault conditions are prevented The turbo pump contains athermocouple which monitors the bearing temperature and shuts down the pump before it overheats Also the system microcontroller will shutoff the turbo p
70. ctral analysis since they depend on many instrumen tal parameters including electron energy emission current ion izer design mass filter settings detector type multiplier gain etc The principal mass peak of a fragmentation pattern is simply the most intense peak of the spectrum and the intensity of all the other peaks in the pattern are normalized to its height for the calculation of fragmentation factors Note that by our definition the o value for the principal mass peak of any gas is equal to one Principal mass peaks are used in the calculation of the sensitivity of the RGA to different gases as shown below Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com 5 6 Calibration and Input Design 5 1 3 Partial Pressure Sensitivity Factors The partial pressure sensitivity of the RGA to a gas g S is defined as the ratio of the change H H in principal mass peak height to the corresponding change P P in total pressure due to a change in partial pressure of the particular gas species H and P are back ground values S H H P P The units of S are of ion current per unit pressure amp Torr for example The sensitivity of the RGA varies with different gases changes with time due to aging of the head and is a strong function of the op erating conditions of the instrument Careful quantitative analysis requires that the sensitivity factor S be determined for every gas wh
71. d IG lt 1 0 x 10 Torr IG on RGA on RP idle Sample gas intake RP lt 1 0 Torr TP full speed IG 1 0x 10 IG on 1 5 x 10 Torr RGA on SV open 1m SS capillary Depending on test setup this value would be lower UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com 2 10 Guide to Operation 2 2 2 6 Manual Venting Procedure Note that this procedure can be accomplished automatically simply by pushing the red Stop button on the control keypad This pro cedure assumes the UGAPM is currently sampling designed pres sures 1 On Status keypad push Single line Sample Valve SSV button for a normal operation while push Multi line Sample Valve MSV for the multiple inlet valve operation 2 Close the sample valve with Control keypad 3 Push the RGA button on Status keypad 4 Turn off the RGA with Control keypad 5 Push the Ion Gauge IG button on Status keypad 6 Turn off the IG with Control keypad 7 Push the Turbo Pump TP button on Status keypad 8 Turn off the TP with Control keypad 9 Wait for two minutes to allow the TP to spin down 10 Push the Roughing Pump RP button on Status keypad 11 Turn off the RP with Control keypad If the vent valve option is installed and the Auto Vent is set to be on the vent valve will be open when the RP is off If the Auto Vent is set to be off the vent valve can be
72. d separately The CM gauge should be attached to a user s vacuum chamber and be connected to UGAPM through the provided DB9 adapter cord When UGAPM is powered up with this accessory CM will start to read the pressure of the vacuum chamber after several seconds lat er which is in vacuum or not For details of CM operation please refer to the section of 2 2 3 4 of this manual and the manufacture operating instructions s ta gt Capillary Heater External CM UGA_PM Option Fig 1 13 DB9 connector for External CM at UGAPM SRS Stanford Research Systems UGAPM Series Universal Gas Analyzers for Process Monitor Chapter 2 Guide to Operation In This Chapter This chapter gives users the detailed information on controlling Universal Gas Analyzer for Process Monitor UGAPM Series 2 1 Introduction act ww os a whe eS 2 3 22 Front Panel Operations cats 2 3 Keypads y xao sio 2 3 Status Keypad erario 23 Control Keypad ss ss da de es 2 4 Front Panel Menu System 2 7 Entering Menu System 2 7 Menu Navigation 2 7 Automatic versus Manual 2 8 Manual Pump Down Procedure 2 8 Base pressures 2 su 200 2 oS eH a 2 9 Manual Venting Procedure 2 10 Manual Sleeping Procedure 2 10 System Bake co cirrosis 2 11 Options and Accessories 2 12 Multiple Inlet valve 2 64 9 5 dls 2 12 Vent Valves 4 4 lt 4 44 3 4 rojas 2 12 sample Heaters x ars 6h ee 2 13
73. d turns off the bypass pump Reserved Reserved UGAPM Series Universal Gas Analyzers for Process Monitor UGAPM Error Messages 99 100 101 102 103 104 105 MSV too high 1 Safety checking fails after the five trials 2 IG reads over 2 0E 5 Torr for 8 seconds or PG reading is over 2 Torr for 2 seconds right after MSV is open MSV closes with this error SSV too high 1 Safety checking fails after the five trials 2 IG reads over 2 0E 5 Torr for 8 seconds or PG reading is over 2 Torr for 2 seconds right after SSV is open SSV closes with this error Reserved RP too high The chamber pressure did not reach 5 Torr in 2 minutes Reserved TP too high 1 Turbo pump did not reach the full speed in 10 minutes 2 PG reads over 2 Torr for more than 10 seconds IG too high The ion gauge reading is over 2 0E 5 Torr for 8 seconds 106 108 Reserved 109 110 UGAPM Series No TP controller The turbo pump controller is not detected TP stop failed The turbo pump is not turned off in time probably due to probably due to miscommunication between the main control board and the auxiliary control board Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com UGAPM Error Messages Error 111 120 These error conditions are detected by the turbo pump controller Once one of these errors occurs the UGAPM must b
74. e RGA item in the UGA operation window SRS Stanford Research Systems UGAPM Series Universal Gas Analyzers for Process Monitor Guide to Operation 2 42 E SRS_UGA_PM S N 0 V 1 008 Active control UGA1 connected to 172 25 128 11 a 2 Main Help UGAT UGA2 UGA3 UGA4 UGAS Status 3 20 2014 2 13 16 PM UGA Instrument is ON System Error y e Sleep Stop Bake On System Warning eae 3 20 2014 11 56 29 AM TurboPumpNode is ON Manual Control RGANode is ON lonGaugeNode is ON AutoVentNode System Bake Current Mode READY is ON ExtCMNode is ON Elapsed 02 16 47 Components Single Line SV o Roughing Pump Reading and Operation Pressure Graph Temperature Graph Turbo Pump Display E Pressure RGA RoughingLine 0 114 Torr Chamber 2 35E 08 Torr Ion Gauge An Ext CM 6 06 Torr E Turbo Pump TP Speed 89 88 kRPM TP Current 900 mA Temperature Launch RGA Turbo Pump T 58 C Elbow T 36 C A hamber T 34 C Options i 33 C Multiple Inlet 1 MS Mutilinesv MSV open safety B E Components Sample Valve CLOSED 4 Roughing Pump IDLE Turbo Pump ON E RGA ON lon Gauge ON IG Fat B Options Multiple Inlet 1 MultLineSV OFF Vent Valve OFF Sample Heat OFF E AutoVent ON Ex CM ON Vent Valve o Sample Heat o Auto Vent Ex CM 10 Check
75. e f SRS Stanford Research Systems UGAPM Series Universal Gas Analyzers for Process Monitor Guide to Operation 2 32 Main title bar Menu bar UGA instrument number tap Message board Log board RGA software launch button State indicators for components and options Reading and Operation sub window Auto control buttons 10 Time information and current mode board 11 Functional indicator board WO ONDE WNH 1 Main title bar This bar has the same functions as a normal windows application such as Title on the left window control icons on the right The title also indicates connection status 2 Menu bar There are two menus on the bar Main and Help Help menu gives the current software version In the Main menu there are seven sub menus Connect Connection Settings Instrument Set tings Wizard New UGA Close UGA and Quit Connect sub menu connects UGAPM to a PC through the as signed connection TCP IP Ethernet or RS232 Serial Connection Settings provides the selection of the connector the connector setting parameters and the log file directory Instrument Settings provides all the setting parameters for the UGAPM which will be described in detail below Wizard sub menu provides tools to type in the TCP IP parameters only when the UGAPM is connected through RS232 serial port New UGA opens additional control panel for another UGA in strument U
76. e Inlet 1 Capillary T N C Multilinesy Q MSV open safety B E Components Vent Valve o Sample Valve CLOSED Sample Heat o Roughing Pump IDLE Auto Vert Turbo Pump ON RGA OFF lon Gauge ON G IG F1 Options Multiple Inlet 1 MultilineSY OFF Vent Valve OFF Sample Heat OFF AutoVent ON Est CM ON Ext CM 10 Fig 2 15 Screenshot of UGA control software after the proper serial connection In the title bar the connection status is shown 10 A user can explore the program by clicking each item on the graph Refer to the next section Menus and Displays for detailed information 11 For operation of UGAPM refer to the section of Front Panel Operation Section 2 2 This program mimics the functions of the front panel UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com 2 31 Guide to Operation 2 3 4 Menus and Displays The UGA control program for UGAPM is Windows based software written in the Cf language using NET framework The main user interface window is composed of several areas Title bar Menu bar Message sub window Log sub window etc as seen in Fig 2 16 In this section the menus and displays of the program are de scribed in detail 1 11 9 trol UGA1 connected to 172 25 128 13 Fo n z A 1 gt gt E ses UGAS N99146 V 1 015 Active
77. e Quick Start of this manual 2 3 3 Connection to a PC In order to use this program at least one UGAPM must be connect ed to the PC There are two ways to connect the UGAPM to a PC TCP IP Ethernet or an RS232 Serial connection In this section we provide step by step instructions for setting up communication 2 3 3 1 TCP IP Ethernet Connection In order to use this connection the user should know the network environment for the UGAPM and the PC The UGAPM firmware and software both need proper TCP IP parameters 1 First determine the IP address Subnet Mask and Gateway for communication The followings are default values Refer to your network administrator for appropriate values for your network IP address 0 0 0 0 Subnet Mask 255 255 255 0 Gateway 0 0 0 0 2 Once you obtain these parameters enter them through the front panel with the following procedure Alternatively a user may type in these parameters through RS232 serial communication Refer to the next section From the front panel e Power up the UGAPM Push the Level up button to enter MENU at the front panel SRS Stanford Research Systems UGAPM Series Universal Gas Analyzers tor Process Monitor Guide to Operation 2 22 Select Communication and hit the confirmation button ea Ethernet items are now shown on the display Choose IP Address The display shows the default IP address Using the Up or Down button ch
78. e RGA control software start scan again by clicking the GO button e The spectrum of the sample chamber gas will be displayed If you run just a test with the air the spectrum can be compared to the example in the next page Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com xvi Quick Start Rga 3 0 air_scan rga e File Edit View Mode Scan Graph Head Utilities window Help y DOGS Oh dee altos A aR m 2 air_scan rga lt GEP OIL E Heep Torr O OS NN 5 a a a RE ER SE RE ES RS SE EE IN ins rapes A TR 1 0x10 5 ae es 1 010 AAA A aeapbonrl pocceceececececeeeeeeceeeeepeeseteeeeetssetetttasaeey oaos ll ONM ll KENNI iit Ni i 10 13 16 19 22 25 28 31 34 37 40 43 46 49 52 55 58 6 For Help press F1 e In order to connect the capillary to your chamber you should take out the plug fittings Those can be removed by hand easily Keep the plug fittings in the safe place for the future uses SRS Stanford Research Systems UGAPM Series Universal Gas Analyzers for Process Monitor Chapter 1 UGAPM Basics In This Chapter This chapter gives the fundamental information on using the Universal Gas Analyzer series for Process Monitor UGAPM LE Introquelon marcadas eE 1 2 1 2 Configuration 2er jos e ss A 1 7 Front panel 0 sobe l 7 Rear panel ocou em oa ias kn 1 8 Top front components 1 8 Top rear components 4
79. e flowrate and dimensions by Q C Pin Por C AP 1 where Q is the throughput C is the conductivity and AP is the pressure drop Throughput is a measure of mass flowrate com monly used in vacuum systems Typical units for Q are mbar liter s which unless stated otherwise implies a standard temperature At STP 273 15 K and 1013 25 mbar 1 mbar liter s is equal to 1 013 cm s sometimes abbreviated sccs The conductivity of various geometries is calculated with the standard formulas available in texts discussing vacuum see References UGAPM Series Stanford R h Syst PRS Stanford Research Systeme Universal Gas Analyzers for Process Monitor Calibration and Input Design 5 23 The pressures and flow at every point in the system is determined by applying equation 1 to each section of tube A simplified flow schematic of the UGAPM is shown below Roughing diaphragm pump Fig 5 1 Schematic of key components of system For this example there are three points at which the pressure is un known P Py and P Applying equation 1 between each pair of points will yield a set of equations to solve First all the sampled gas flows through the capillary oe z Cip P P Cop P 2 Because P_ gt gt P the approximation can be made And the turbo pump is an active component that is characterized by P Osample S 3 where S is the speed of the pump and has the same units as con ductivity liter s For th
80. e limit 1 5 x 10 Torr Then next time the sample valve will be open fully This way UGAPM will protect vacuum pumps from severe pressure shocks when atmo spheric pressure gas sample may be trapped inside a capillary or when the capillary is open to the air Refer to the section of 2 2 4 2 of this manual for the detailed information on this function e The UGAPM will open the sample valve in sequence Sometimes UGAPM opens the sample valve fully since IG reading is low enough at the safety checking step but soon after the sys tem closes the valve and gives the error of TP too high or IG too high or SSV too high This happens when you are trying to open a capillary which is not evacuated because the gas flow conductance through a capillary is so small that the initial opening will take only small amount of gas After the valve is open fully however the chamber pressure IG reading or roughing pressure PG reading goes above the limit of the UGAPM interlocks as ex plained in the section of 2 2 4 4 of this manual Usually the smaller ID capillaries show this kind of behaviors In this case just try to open the sample valve again after related parts are reset Some times you should repeat this reopening several times because you are pumping the gas in the dead volume through a capillary e The system should read less than 1 5 X 10 torr for the mass spec trometer chamber if you use the provided capillary e In th
81. e power cycled to clear the error 111 112 113 114 115 116 117 118 119 120 TP current Turbo pump controller output current exceeded 15 A No TP connected No turbo pump is connected to the controller TP overload Turbo pump controller output current exceeded 1 5 A longer than 15 seconds TP bearing hot Turbo pump bearing temperature is higher than 60 C TP hot Turbo pump heat exchange temperature is higher than 60 C TP start Turbo pump did not reach the full speed at run up time TP input voltage TP controller input voltage is lower than 16 V for 5 seconds TP op voltage TP controller operating voltage is lower than 10 V for 5 seconds TP low voltage TP controller Vp is 8V lower than nominal for 5 seconds TP soft start Soft start ramp has not ended within the expected time 121 125 Reserved 126 SRS Stanford Research Systems Too many Errors More than 10 errors have occurred since errors were read with the ZERR command The subsequent errors are discarded This error will not be displayed on the front panel at all UGAPM Series Universal Gas Analyzers for Process Monitor Chapter 5 Calibration and Input Design In This Chapter This chapter discusses procedures to help the user make accurate measurements with the UGAPM Several sections are devoted to calibration and cor recting p
82. e pump in the UGAPM the speed is a constant at 80 liter s except for He and H UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com 5 24 Calibration and Input Design Equations 2 and 3 completely describe the system Solution of the entire set would determine all the unknowns except that there are more unknowns than equations Typically the inlet pressure is known and the desired pressure at the spectrometer is known leav ing 3 unknowns To simplify the calculations Q is chosen to be same as Q total sample These equations demonstrate some important characteristics of the UGAPM The pressure in the spectrometer chamber is directly proportional to the pressure at the inlet of the capillary The pressure at the exit of the capillary is dominated by the speed curve of the diaphragm pump and the mass flowrate through the capillary 5 3 2 Turbo Pump The pump attached to the spectrometer chamber is hybrid turbo molecular drag pump The hybrid design of this pump allows it to exhaust at high pressure relative to conventional turbomolecu lar pumps The pumping speed is constant at the nominal value of 80 1 s over a large range of exhaust pressures As the exhaust pressure approaches the maximum value the speed begins to drop Fig 5 3 shows a representative turbo pump speed curve overlaid speed pressure Fig 5 3 Representative speed curves for two
83. e pumps The sensitivity fac tor is a function of the precise dimensions of quadruple and ion optics the state of the detector the ionizer filament and the four parameters which control the filter electron energy focus volt age ionizer current and ion energy In the equation above the two factors are unknown During calibration only the standard partial pressure and measured ion current are known Therefore both factors cannot be determined only the overall factor can be determined Both factors can be determined if a second reference pressure gauge is introduced into the RGA chamber While this approach would yield another reference pressure and allow both factors to be accurately determined it has no practical benefit Because only the ratio of the two factors is relevant strictly speak ing one of the factors could be chosen to be any number An obvi ous choice is to make one of the factors equal to one and use only the other Because the sensitivity factor is stored in the RGA this choice causes practical problems The RGA firmware limits the sensitivity factor to reasonable values The sensitivity factor must be on the order of 10 to 10 A Torrt which are typical values The pressure reduction factor is stored by the software in each RGA file With the two values stored in different locations there are ben efits for using each to account for various components of the overall calibration factor Both factors cannot be det
84. e system is designed to run in ei ther horizontal or vertical orientation See figure 1 3 left This flexibility in the operating orientation means it can fit almost anywhere even in space constrained labs For the vertical orientation a right angle power cord is recommended which is not supplied from SRS A user should buy the cord ex Digi Key AE9887 ND Figure 1 3 UGAPM operating orientation SRS Stanford Research Systems UGAPM Series Universal Gas Analyzers for Process Monitor UGAPM Basics 1 7 1 2 Configuration 1 2 1 Front Panel There are two front panels on the UGAPM the upper panel and the lower panel The upper panel has two holes one for capillary con nection and another for D9 connectors one of which connects the capillary heating control cables heater power and thermocouple cables in a basic model and the other is for the external capacitor manometer Ext CM as an accessory The lower panel holds two control pads along with one RJ45 Ethernet connector and an RS232 serial connector Fig 1 4 Figure 1 4 Front Panels UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com 1 8 UGAPM Basics 1 2 2 Rear Panel On the rear panel also in two parts there are a main power AC socket an electrical ground knob and a fan for the power distribu tion PCB on the rear upper panel There are one BNC connector a user interlock An exhaust port for the Roughing pump
85. e work The following sections will introduce some basic con cepts of Spectral Analysis emphasizing the main aspects of Residual Gas Analysis For additional information on the subject of Residual Gas Analysis refer to J Drinkwine and D Lichtman Partial Pressure Analyzers and Analysis AVS Monograph Series published by the Education Com mittee of the American Vacuum Society Basford et al J Vac Sci Technol A 11 3 1993 A22 40 Recom mended Practice for the Calibration of Mass Spectrometers for Par tial Pressure Analysis Update to AVS Standard 2 3 For information on multiple linear regression analysis consult William H Press et al 1992 Numerical Recipes in C The Art of Scientific Computing Second Edition Cambridge Univ Press sec tion 15 4 page 671 Bevington P R 1969 Data Reduction and Error Analysis for the Physical Sciences New York McGraw Hill Chapters 8 9 5 1 1 How Mass Spectra are Interpreted A mass spectrum taken in a real system will almost always con tain signals from a mixture of various gases Careful and complete interpretation of the spectrum i e a complete spectral analysis should reveal the identity as well as the concentrations of the vari ous components which have produced the spectrum The first step in the spectral analysis process is to correctly identify the mass to charge ratio of all the peaks in the mass spectrum A well calibrated mass scale is essential to thi
86. ed the logs will be recorded in the message log file 6 RGA software launch button If RGA software is installed clicking this button will start the pro gram Ifthe RGA is turned on this process will automatically con nect to the RGA Once launched the following screen in the next page appears UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com 2 39 Guide to Operation Riga 3 0 gt rgat Fie Eat Modo Sc Gah Hrd Utilities Window Hip OSADO PALAU lO M 2 26 Fig 2 25 Screenshot of RGA software de State indicators for components and options The present states of all the components and options are indicated by LED graphics If it is lit the item is on or open If off the item is off or closed If blinking the item is in transition The number beside the Ion Gauge text indicates which filament the ion gauge is using now There are two filaments in an ion gauge The filament can be selected from the UGAPM front panel or from the operation window of UGA control software If the LED for Multiple Inlet is green it means the valve is installed If itis white there is no valve in the unit The same for Vent Valve Sample heaters The Multiple Inlet valve option has two related components Multi Line SW and MSV open safety These two are working only when the Multiple Inlet is installed The state of MSV open safety is indicated here only This will help to c
87. ent to ABC for the TCP IP connection The ZPPW query returns the current password The command accepts only alphanumeric characters a z A Z and 0 9 The password should be 15 characters or less The default is SRSUGA Examples ZPPW SRSUGA Sets the password to SRSUGA ZPPW Clears the password With blank login name and password a user can log into the instru ment by typing carriage returns only Errors and Warnings The command is ignored if the following error is issued after the command input ZPPW s Warning 16 Bad parameter Ethernet Half Duplex Full Duplex The ZPDU i command sets the Ethernet half duplex i 0 or full duplex i 1 The default value is full duplex The ZPDU queries whether the Ethernet is full duplex or half duplex Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com Remote Programming ZPSP i ZPTO i ZPFL it ZPPU i ZPCR 1 Ethernet Speed Auto 10 Mbps 100 Mbps The ZPSP i command sets Ethernet speed Auto negotiation i 0 10 Mbps i 1 or 100 Mbps i 2 The default value is 100 Mbps TCP IP connection timeout The ZPTO i command sets the TCP IP connection time out between 3 to 1800 seconds The ZPTO query returns the value If TCP IP communication is inactive for the time out period the connection will be closed The default value is 2 minutes The power reset is needed to activate the changed value Ion
88. er can select the units Torr bar mbar Pascal or atm for the pressure in the reading section one of the 8 sub windows or in the graph from the list box in the Unit tab The default setting is Torr Logging Graph Bake Heaters Units Misc Display Pressure in Pascal bar mbar atm Fig 2 23 Screenshot of the Settings dialog box showing the Unit tab In the Misc tab a couple of display items can be selected See the figure in the next page Show current time will show the pres ent time read from the PC Elapsed Time shows the period of a UGAPM state When the state is changed it starts a new period SRS Stanford Research Systems UGAPM Series Universal Gas Analyzers for Process Monitor Guide to Operation 2 38 Settings Logging Graph Bake Heaters Units Misc Show current time Show Elapsed Time Cancel Fig 2 24 Screenshot of the Settings dialog box showing the Misc tab 3 UGAPM instrument number tap The UGA control software can control up to 5 UGA s or UGALT s or UGAPM s units at the same time Each control panel is indexed by number eg UGA1 UGA2 UGA3 UGA4 and UGAS 4 Message board In the Message board all error and warning messages are shown If enabled the messages will be recorded in the message log file 5 Log board In the Log board every event will be written with the time stamp If enabl
89. er change is immediately effective all the time even the roughing pump is idle The dault setting is 45 i 45 RS232 baud rate The ZPBA i command sets the RS232 baud rate to 28800 i 0 or 38400 i 1 The ZPBA query returns the current RS232 baud rate setting The parameter change is immediately effective all the time This means if it is changed the current serial communication will stop Users should be careful to change this parameter when they are us ing the serial communication IP address The ZPIP i i i i command sets the Internet Protocol IP address of the instrument The ZPIP query returns the current IP address setting The parameter change is immediately effective all the time This means if it is changed the current Ethernet communication will stop Users should be careful to change this parameter when they are using the Ethernet communication Example ZPIP 192 168 1 12 Sets the IP address to 192 168 1 12 Errors and Warnings The command is ignored if the following error is issued after the command input ZPIP 11 11 Warning 16 Bad parameter Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com SRS Stanford Research Systems ZPSM 1 1 1 1 ZPGW 1 1 1 1 ZP NM Os Remote Programming IP Subnet mask The ZPSM 1 1 1 1 command sets the Internet Protocol IP Subnet mask of the instrument The ZPSM query returns the current IP Subnet mask setting
90. eration Turbo Pump E Display Pressure RGA RoughingLine 0 111 Torr Chamber 4 43E 08 Torr Ion Gauge Al Ext CM 8 52 Torr E Turbo Pump TP Speed 89 88 kRPM TP Current 700 mA E Temperature Launch RGA Turbo Pump T 57 C Elbow T VLE 2 Chamber T 24 C Options Sample Line T 23 C Multiple Inlet 3 Capillary T N C Multiline SV o MSV open safety AS B E Components Vent Valve o Single Line SV CLOSED KED Apply Cancel Sample Heat o Roughing Pump IDLE CLOSED Aas Turbo Pump ON OPEN RGA ON I Edt cM 10 lon Gauge ON 16 Fil B E Options Multiple Inlet 3 Mul lineSV OFF E Vent Valve OFF Sample Heat OFF AutoVent ON Ex CM ON Fig 2 26 Screenshot of UGA control software window for various window tabs and operations In the Reading and Operations there is a component list at the lower area of the window The components are listed under the Compo nents and Options head The status of present state is also written beside each component The list of IG Fil indicates the current fila ment used By clicking the component name a control bar will ap pear as shown in the example above Single Line SV here After selecting the desired state the user should confirm it by clicking the Apply button By double clicking the component name the action will be locked as shown for MultiLineSV Phone 408 744 9040 www thinkSRS com 2 41 Guide to
91. ermined therefore each time the instru ment is calibrated one of the factors will be assumed to be correct and the other will be adjusted to make the measured and reference values agree The strategies for using each value are discussed in the following sections starting with the basic technique that was performed at the factory UGAPM Series Universal Gas Analyzers for Process Monitor Calibration and Input Design 5 15 5 2 1 Initial Calibration Initially a default value is stored in the RGA forits sensitivity factor This factor is displayed by selecting the Head Get Head Info menu item in the software This value was determined at the fac tory using a reference ion pressure gauge Users can resort to this default value when they wish to completely recalibrate the instru ment The pressure reduction factor is calibrated using the partial pressure of nitrogen present in air using the following steps 1 Determine the barometric pressure which is typically reported in in Hg Example on a typical clear day the pressure is 29 95 in Hg or 761 Torr 1 in Hg 25 4 Torr 2 Nitrogen is naturally present at 78 1 of total pressure Multiply by this factor to yield the partial pressure Exam ple on that day nitrogen is present at 594 Torr 3 Gases break into molecular fragments in the ionizer For common gases fragmentation factors exist that indicate what fraction of the molecules remain intact For nitrogen 92 6
92. ervoir and a dry pump but only provides nitrogen as a useful ref erence The other major components e g oxygen water and car bon dioxide are not present at reliable concentrations For more precise calibrations a reservoir and pressure gauge can be used as a calibrant When using this method be aware that the UGAPM continuously draws 1 5 milliliter per minute of gas depending on the capillary The reservoir should be large or the total pressure will change quickly 5 2 5 1 Correcting for the Chamber Background Even with the sample flow valve closed their will be a noticeable background in the mass spectrum This background in the ana lyzer chamber is caused by outgassing from the chamber surfaces and gas production from the ionizer of the RGA These two pro cesses account for the ever present background of hydrogen water nitrogen oxygen and carbon dioxide seen in high vacuum The outgassing of water can be minimized by extensive pumping with the sample valve closed typically the system can achieve water partial pressures around 1 x 10 mbar The other process ionizer is fundamental and cannot be reduced The ultimate vacuum of the turbo pump causes nitrogen to be present at no lower than 2 x 10 mbar and oxygen at 1 4 of that level Carbon dioxide from the ion izer will be present at levels from 10 to 10 mbar The software contains a background subtraction feature that allows the chamber background to be removed from the m
93. ery effectively when you open a sample valve Sin gle line SV or Multi line SV for a capillary of high pressure gas trapped Before you perform these steps make sure the other end of the capillary is connected firmly and isolated from the process chamber tested This procedure only works when the capillary is isolated e Power up the UGAPM if it is off If UGAPM is already pumped down then skip the following whole procedure Or stop UGAPM and continue the followings e Push Roughing Pump button and select ON in the menu display using the down arrow button BA below the display And click Enter button IPJ to turn on RP e After RP is on wait till PG reads below 1 Torr e Go to Controls menu using the level up button 8Y e In Controls menu select Pressure Interlock item using the down arrow button and set this OFF e Push Single line SV SSV button and select ON in the menu display And click Enter button to open SSV e Wait till SSV is fully open If the system closes SSV with SSV too high error then try again and again till SSV is open fully If SSV is open fully PG will read below 1 Torr Wait at least 5 minutes more to pump down the capillary enough e Set Pressure Interlock to be ON and close SSV UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com 15 Guide to Operation 2 2 4 2 Safety check for S
94. ese gasses are at 44 and 28 Referring to the library in the software shows that nitrogen produces a peak at masses 28 and 14 that are 93 and 6 of the partial pressure and that carbon dioxide produces peaks at masses 44 amp 28 that are 78 amp 9 of the par tial pressure For a 1000 mbar total pressure the spectrum would show peaks at 28 amp 44 with heights of 510 and 390 mbar An er ror can be demonstrated by using these peak heights and revers ing the calculation while ignoring the interference The carbon dioxide partial pressure would be correctly calculated as 500 mbar 390 0 78 but the nitrogen would be erroneously calculated as 548 mbar 510 0 93 mixture The mixture appears to be present at a total pressure of 1048 mbar and a composition of 52 48 The correct calculation would first subtract the component of the peak at mass 28 which was caused by carbon dioxide before calculating the nitrogen partial pressure More discussion of the quantitative analysis of complex mixtures can be found in the texts listed in the Reference section 5 2 Calibration of Partial Pressure UGAPM Series All quantitative calculations performed with the RGA rely on the assumption that there is a linear relation between the partial pres sure and the corresponding RGA signals of the gases Each gas ion izes differently and its ions make it through the mass filter with different efficiencies As a result the proportionality constant relat ing
95. esearch ie Universal Gas Analyzers for Process Monitor Contents Safely AI 11 Symbols s e ta we wR MH a 111 Checklist vou a ae yw ee oe iv Materials List 5 0 aah a dd v Specifications gi oe ee 2 ba vi Quick Start amp aoe eek ee a ix Chapter 1 UGAPM Basics Introduction 4 34 24 Gwe amp amp 1 2 Configuration e ab sor wee e 2 1 7 Options and Accessories 1 13 Chapter 2 Guide to Operation Introduction 4e RA 2 3 Front Panel Operation 2 3 Remote Operation 2 19 Chapter 3 Remote Programming Introduction gt amp 6 3 3 Commands 1 xy dy aaa 3 5 Chapter 4 UGAPM Error Messages Introduction 3 y 2 ete ew dr ws 4 2 Error Messages 2 1 0 64 4 4 3 Chapter5 Calibration and Input Design Mass Spectrometry Basics 5 2 Calibration of Partial Pressure 5 13 Pressure Reducing Inlet 5 21 References vo o eae oe 5 29 Appendices Appendix A UGAPM Menu Table A 1 Appendix B UGAPM State Diagram A 3 Appendix C Calibration Log A 4 ii Safety SRS Stanford Research Systems Warning Hazardous voltages capable of causing injury or death are present in this instrument Use extreme caution whenever the top back and the bottom covers of the instrument are removed Always unplug the unit while removing those covers Ventilation The UGAPM system requires forced air cooling to operate at a rea sonable temperature Do not block the air inlet or exhaust on the bac
96. etails and examples of these procedures The entire mathematical formalism used to derive the partial pres sures of a mixture based on a single mass spectrum is based on one assumption The total spectrum is a linear combination of the spectra of the different species that are present in the mixture In other words the total spectrum is equal to the sum of the individual peaks that would be observed if each constituent were alone in the system In mathematical terms the assumption stated above can be written as the following linear equation Lo 1 where g is an integer variable that represents the gases present i e assign an integer to each gas starting with one M is an integer variable that represents the mass numbers for the entire mass range of the spectrum H total peak height amps of the spectrum at mass number M hug peak height contribution amps from gas g at mass M h is related to the fragmentation pattern the RGA s sensitivity M and the partial pressure of gas g by the equation h a S P 2 Mg Mg 8 8g where g Fragmentation factor of gas g at mass M Ratio of ion signal at mass M to the ion signal at the principal mass peak for gas g S RGA s partial pressure sensitivity factor for gas g in amp Torr see Partial Pressure Sensitivity Factor below P Partial pressure of gas g in the system UGAPM Series Universal Gas Analyzers for Process Monitor Calibration and Input Des
97. ey may be neglected The sensitivity factors calculated can only be applied to situations where the RGA is used with the same operating parameters See the Sensitivity Tuning section in the RGA Tuning chapter of this manual for more details on this calibration procedure A total pressure sensitivity factor is also needed by the RGA to convert the ion currents obtained during total pressure measure ments into total pressures Total pressure sensitivity factors vary with different gases and share many of the properties of the partial pressure factors They are determined by a procedure identical to the one described above but with the partial pressure measure ments replaced by total pressure measurements The underlying assumption when using sensitivity factors in quan titative calculations is that there is a linear relation between the partial pressure and the corresponding RGA signals of the gases Deviations from linearity are to be expected above 10 Torr due to space charge effects in the ionizer and ion neutral scattering inter actions in the filter A more thorough check of the RGA s sensitivity involves measuring the RGA signals over several orders of magni tude of partial pressure to determine the range over which a linear relationship exists The sensitivity factor for the gas is calculated as the slope of the signal vs partial pressure response over the linear range RGA Windows uses two sensitivity factors stored in the n
98. g box as seen in Fig 2 30 will appear with Ethernet port information Connector list for rgal Update RGA List every tina this dalog is being opened Settings Connecter Instrum D Sass Bind to oy eed RGA SRRGATIOVERDLASNTIT connected ide nal Qf i72 25 10 37 818 moine None urinon mee Q Pue RGA SRERGAZOVERO 24ISNIS7OS deconmrected hen lt gt Fig 2 30 Screenshot of RGA connection dialog box for Ethernet Select the proper Ethernet address in this example it is 172 25 128 14 Click the Connect button and close the dialog box You can now start gas analysis hs RS232 connection On Front panel confirm Baud rate is set to be 28800 If not set it Check RGA status from the front panel If RGA is not on bring UGAPM to ready state Establish RS232 serial connection between UGAPM and the PC Start RGA exe man Click the connection button _ eb the toolbar The following dialog box will appear Connector list for rgal Connector Instrument 1D status Activity Bind to Nolnstrument None disconnected None SRSRGAZ00VERO 245N00666 connected G SOFTO SRSRGAZOOVIRTUAL disconnected Update RGA List IV Scan for RGA every time this dialog is being opened Fig 2 31 Screenshot of RGA connection dialog box UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com 2 45 Guide to Operation Select the proper com
99. g various internal conditions or trying to carry out a com mand or a menu selection The front panel displays the error mes sage with error beeps until a button on the front panel is pressed or all the errors in the error stack are read up by sending ZERR commands until it returns 0 The range of the critical errors is from 61 to 120 ZERR Returns only an error code To get a string describing the error code use the ZEDS error number Query For example ZEDS 42 returns Turbo not ready Following is the list of errors that UGAPM reports The first column shows the error code and the second column shows error messages showing on the display followed by a description of each error UGAPM Series Stanford Research Systems SRS Universal Gas Analyzers for Process Monitor UGAPM Error Messages 4 2 Error Messages 4 2 1 Communication Error Messages 1 8 9 10 11 12 13 14 15 16 17 18 19 20 21 UGAPM Series Reserved Invalid Command The command string does not start with a valid command name Incomplete Command The command string ends without a or a parameter Illegal Command Either a set only command was issued as a query or a query only command was issued as a set Reserved Missing Parameter A second parameter in a set command is missing Extra Parameter Extra character s follow a valid command Out of range A p
100. gauge filament The ZPFL i command selects either of the filament 1 i 0 or the filament 2 i 1 which is used when the ions gauge turns on or degasses The ZPFL returns the selected filament 0 or 1 Pressure unit The ZPPU i command sets the pressure unit used for the front panel display Torr i 0 Pa i 1 mbar i 2 or bar i 3 The ZPPU query returns the current pressure unit for the display This unit selection has NO effect on the unit used by the ZQAD command External CM gauge pressure range The ZPCR i command sets the maximum pressure range of the optional external CM gauge used for checking the pressure of the user s process chamber The unit for the value is Torr The ZPCR query returns the current setting value in Torr unit For the proper value refer to the manufacture data of the external CM Example ZPCR 10 Sets the maximum pressure limit of the external CM to 10 Torr ZPCR Returns the maximum pressure limit in Torr SRS Stanford Research Systems UGAPM Series Universal Gas Analyzers for Process Monitor Remote Programming ZPAV i ZPBT i ZPTB p i UGAPM Series Automatic vent valve The ZPAV i command turns the automatic vent valve option Off i 0 or On i 1 The ZPAV query returns the current value of the option If this option is on the vent valve will be opened at the end of the au tomatic STOP sequence right after the roughing pump is stopped If not the STOP sequence
101. gth of the capillary SRS Stanford Research Systems UGAPM Series Universal Gas Analyzers for Process Monitor Guide to Operation 2 46 Main Help UGA1 UGA2 UGA3 UGA4 UGAS UGA Instrument is ON 4 29 2014 6 57 45 PM TurboPumpNode is ON is ON ExtCMNode is ON 4 30 2014 8 28 04 AM ExatCMNode is ON Components Single Line SV o Roughing Pump o Turbo Pump RGA Ion Gauge AN Launch RGA Options Multiple Inlet 3 Mutilinesv MSV open safety Vent Valve Sample Heat Auto Vent Et CM 0 RGANode is ON lonGaugeNode is ON AutoVentNode Status 4 30 2014 9 18 58 AM System Error 7 E als Sleep Bake On System Warning va Manual Control System Bake Curent Mode READY ss Elapsed 14 21 13 Reading and Operation d Display E Pressure Roughingline 0 11 Torr Chamber 2 77E 08 Torr La Ext CM 6 77 Torr Ey Turbo Pump TP Speed 89 88 kRPM o TP Current 800 mA E Temperature i Turbo Pump T 57 C Elbow T 28 C Chamber T 24 C Sample Line T 22 C Capillary T N C B E Components Roughing Pump IDLE E Turbo Pump ON RGA ON lon Gauge ON 6 IG Fal Options oe Single Line SV CLOSED Muhiple Inlet 3 E MulilineSV OFFF Vent Valve OFF 2 Sample Heat OF AuroVent ON Ex CM ON Apply cancel ONO Hh Scree
102. heaters 2 2 3 4 External CM gauge With provided parts CM gauge and a cord or a user s parts UGAPM can read the pressure of a user s process chamber In or der to read the pressure correctly with a CM gauge a user should set the value of its full range pressure properly Provided CM gauge from SRS has 20 Torr max for the full range pressure This pressure reading will also help a user to control the threshold pres sure of sample valve opening from user s program In the Con trols menu there are Ext CM setup submenu In this submenu there are two items Ext CM range CM full scale range and Zeroing CM gauge reading zeroing In Ext CM range a user can use Up or Down button to set the proper range of the CM full scale in Torr unit With the value of OFF the system indicates there is no external CM gauge option for the system In Zeroing function a user can set zero reading correction when the signal out put of CM gauge is below 5 mV UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com Guide to Operation 2 14 2 2 4 Advanced Operation 2 2 4 1 Capillary pumping using UGAPM If you want to pump out the trapped gas in a connected capillary using UGAPM you could follow the procedure below at this point Or you may skip this section if you treat trapped gas in the capil lary already This procedure will reduce the pressure shock to TP in UGAPM v
103. heck the setting during experiments The setting of MSV open safety can be done from the front panel or from the remote command Refer to the section of 2 2 4 2 If External CM is installed then LED will be green and the number is shown beside LED This number indicates the full scale range of the installed CM gauge This number should be matched with SRS Stanford Research Systems UGAPM Series Universal Gas Analyzers for Process Monitor Guide to Operation 2 40 UGAPM Series Universal Gas Analyzers for Process Monitor the spec of the CM gauge to get a proper reading of the pressure If External CM is not installed NOT INSTALLED description will be shown here and no reading will be available and no setting will be effective 8 Reading and Operation sub window This area is for individual controls and data displays Graphs of pressure and or temperature data will be docked here if selected All windows are tabbed as shown below a P EE SRS_UGA_PM200 S N 99052 V 1 008 Active control UGA2 connected to 172 25 128 11 Se Main Help uGAi UGA2 uca3 usas ucas Status 5 9 2014 11 30 40 AM UGA Instrument is ON EEEO io 3 Sleep Stop Bake On System Warning gt Ti a 5 9 2014 11 23 42 AM TurboPumpNode is ON AE Ena RGANode is ON lonGaugeNode is ON System Bake Current Mode READY st Elapsed 00 06 57 Components Single Line SV o Roughing Pump o Reading and Op
104. hen the capillary will be a part of it The capillary will be evacuated and filled up with the process gases After opening the sample valve in UGAPM immediately the analyzer will detect SRS Stanford Research Systems UGAPM Series Universal Gas Analyzers tor Process Monitor UGAPM Basics UGAPM Series gases of the chamber The response time in this case is less than 0 2 second If something changes in the process chamber during the measurement a change in composition at the inlet can be detected in lt 2 second at 0 1 mbar sampling or in lt 10 seconds at 10 mbar sampling In addition this low dead volume helps to apply UGAPM systems for the analysis of very small volume samples For example if there is a 0 1 mL gas sample of atmospheric pressure it would become a 100 mL gas sample of 0 76 Torr UGAPM system can be easily ap plied to such a low pressure sample without any problem The length of the capillary separates the analyzer from the tested chamber This makes it possible to build the analyzer in compact form and facilitates auto handling Therefore this configuration not only helps to get rid of unwanted dead volumes to improve analytical performance but also provides some flexibility in the connection between the sample chamber and the analyzer SAMPLE DELIVERY REGION SIHGL ELIHE MULTILINE MULTIPLE SAM sv sv INLET VALVE 000 y A RGA VACUUM 10H TURBO PIRAHI ROUGHING PORT GAUGE PUMP GAUGE PUMP ANALYZER REGION
105. here Fig 2 27 Check the RGA status in the UGA control software Click Launch RGA this will connect a PC to RGA automatically Now you can start gas analysis B Launching RGA software as a stand alone application from the Windows Through Ethernet connection or RS232 Serial connection Through Ethernet connection Check the Ethernet setting parameters Check the Ethernet cable connection in UGAPM and PC Start RGA exe Click the connection setting button KA de UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com 2 43 Guide to Operation e Select TCP IP tab The following dialog will appear Settings Serial TCP IP virtual Com Enable TCP IP Connections TCPAP Connector Fig 2 28 Screenshot of RGA connection setting dialog for Ethernet e Click Add button then new data input dialog box will appear Fig 2 29 Settings Serial TCP IP Virtual Com User SRSUGA Password si n Fig 2 29 Screenshot of Ethernet data input dialog in RGA exe Type in the same network settings as the settings in UGAPM and click OK The port value should be 818 for the UGAPM e Click OK again to confirm the Ethernet settings SRS Stanford Research Systems UGAPM Series Universal Gas Analyzers for Process Monitor Guide to Operation 2 44 e Click the connection button b The dialo
106. hernet parameters IP address Subnet Mask Gateway Username and Password properly at UGAPM Please refer to the section 2 3 3 1 of this manual for detailed information e Connect the provided Ethernet cable between the UGAPM and a switch or a router which your PC is connected If your PC is not connected to Ethernet then use Serial connection instead refer to the section 2 3 3 2 of this manual e Start the UGA software The startup window depends on the operating system of the PC If the software starts with the blank window as shown below click Main menu and select New UGA item See picture below Then the UGAT window will appear Without the UGAT window you cannot connect to the system Gj Multi UGA Controller Help Connect Connection Settings Instrument Settings Wizard Close UGA Quit e Click on the Main tab and select Connection Settings The Connection Settings dialog box will pop up See the next page In the Connection Settings dialog box choose the TCP IP tab Be sure that Enable TCP IP should be marked Verify that the proper IP resource is checked as shown below After the Ethernet param eters are set properly the resource should be shown in the list UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com xii Quick Start Settings Logging
107. ial connector is shown de The software will show the available resources Select the appropriate COM port and click the Connect button In the example screenshot above the UGAPM is found on COM1 Note if you are using a USB to a serial adapter you must know what COM port the USB driver has allocated Use the Windows device manager to find the USB to serial COM port SRS Stanford Research Systems UGAPM Series Universal Gas Analyzers for Process Monitor Guide to Operation 2 30 8 After the proper port changes to the connection the icon indicates connected status with green color close the ConnectorDialog window 9 The following screen will appear at the UGA control program See below ve Main Help UGAT UGA2 UGA UGAS UGAS Status 3 19 2014 4 17 42 PM UGA Instrument is ON System Error 0 Bake On System Warning GER Sleep al 3 19 2014 4 15 41 PM TurboPumpNode is ON Manual Control lonGaugeNode is ON AutoVentNode is ON System Bake o Current Mode Q MANUAL CONTROL Elapsed 00 02 02 Components Single Line SY o Roughing Pump 8 Reading and Operation Turbo Pump a Display Pressure RGA o RoughingLine 0 116 Torr Chamber 1 38E 08 Torr Ion Gauge Fill Ext CM 5 82 Torr Turbo Pump TP Speed 89 88 kRPM TP Current 900 mA Temperature Launch RGA Turbo Pump T 58 C Elbow T 29 C M Chamber T 26 C Options Sample Line T 26 C Multipl
108. ich may be a component gas in the system being analyzed The sensitivity factors must be obtained under the same operating con ditions that will be used during general partial pressure analysis since they depend on many instrumental parameters including ionization energy emission current mass filter setting type of de tector etc In order to separate the gain of the electron multiplier from the intrinsic sensitivity of the RGA head the sensitivity factors of the RGA are defined for Faraday Cup detection A separate Electron Multiplier Gain Factor is used to correct the ion signals when the electron multiplier is turned on See the Sensitivity and Electron Multiplier Tuning sections of the RGA Tuning Chapter for details The basic procedure for determining the sensitivity of a particular gas in the RGA is the following Introduce the pure gas into the vacuum system at a known or calculable pressure typically around 10 Torr Measure the output signal from the RGA for the principal mass peak of that gas using the Faraday cup detector The ratio of this output signal to the pressure of the gas is the sensitivity factor S UGAPM Series f Stanford R h Syst DIS Stanford Research Systeme Universal Gas Analyzers for Process Monitor Calibration and Input Design UGAPM Series During these measurements it is very important to insure that the partial pressures of all other gases in the system are small enough so that th
109. ign UGAPM Series Equations 1 and 2 are combined to obtain the system of equa tions Hy 6 Ga E 3 M Since all gases have more than one peak in their fragmentation pat tern the number of peaks M in a real spectrum is generally larger than the number of gases g As a result the system of equation 3 usually has more equations than unknowns This situation is some times simplified eliminating some of the extra equations however the best results are obtained using all the equations and a multiple linear regression procedure to calculate the best possible fit to the data Obviously accurate results can only be obtained if the constants Oy and S are well known for the RGA being used M Note The Analyze Utility of RGA Windows uses a multiple linear regression algorithm as mentioned above to automatically cal culate the composition of a typical residual gas environment at the end of any 1 65 amu spectral scan Please see the RGA On Line Help files for details Standard fragmentation patterns for example the fragmentation patterns included in the RGA Library of RGA Windows can be used as a source of Q values in moderately quantitative deter minations However when very precise numbers are desired one should obtain the appropriate fragment patterns by introducing pure gas into the RGA being used The fragment patterns must be obtained under the same conditions that will be used during regular spe
110. ilver a thin layer on the VCR and the ferrule seals to prevent gauling Viton o ring seal in the KF flange buna N seal in the high conductivity valve neoprene diaphragms in diaphragm pump nitrile butyl rubber NBR diaphragm pump valves backing line Tygon connections to diaphragm pump can be substituted UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com Vi Specifications Inlet Type Flowrate Response time Pressure Mass Spectrometer Type Detector Range Resolution Detection limit Operating pressure Connections Inlet Exhaust Computer Power System Pumps Materials SRS Stanford Research Systems SS capillary 10 to 10 Torr L sec at application pressures lt 1 5 sec response time at 0 1 Torr sample pressure selectable from 1 X 10 mbar to 15 mbar quadrupole Faraday cup FC amp Electron multiplier CDEM 1 to 300 atomic mass units amu lt 0 5 amu at 10 of peak height lt 10 ppm with Faraday cup detector lt 1 ppm with electron multiplier 10 mbar for FC 10 mbar for CDEM 1 16 or 1 8 inch Swagelok fitting 1 4 inch Tygon tube adapter Ethernet or RS 232C DB9 connector 3 pin grounded cable hybrid turbomolecular drag pump 81 liter s ultimate pressure 2 x 10 mbar diaphragm pump with ultimate pressure less than 1 mbar protection class IP44 see full materials list for details construction SS30
111. ing in UGAPM When the system tries to move to other channel from one channel a new capillary will be used The system needs to confirm whether the capillary is ready for the proper gas sampling For this UGAPM performs the fol lowing steps 1 Close MSV Change to a designated channel Open MSV for 0 1 second and close it Check IG reading whether it is below 1 5 x 10 Torr If IG reading is higher than 1 5 X 10 Torr then wait till IG reads below 2 0 x 10 Torr Repeat steps 3 to 5 for maximum 5 times 7 If IG reading is below 1 5 x 10 Torr at Step 4 then wait till IG reads below 2 0 x 10 Torr and open MSV fully 8 If still IG reading is above 2 0 x 10 Torr after trials then MSV remains closed and UGAPM gives an error g PON D In this way UGAPM can change to a new capillary position safely and avoid severe pressure shocks to vacuum pumps from mistak enly handled situations UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com 2 17 Guide to Operation Sometimes UGAPM opens MSV fully since IG reading is low enough at the step 4 of the above process but soon after the sys tem closes MSV and gives the error of TP too high or MSV too high This happens when you are trying to open not evacuated capillary because the gas flow conductance through a capillary is so small that the initial opening will take only small amount of gas After the valve is open ful
112. ion 2 Two major accessories are a sample heater and an external CM gauge Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com 1 14 UGAPM Basics 1 3 1 Option 1 Multiple inlet valve option Using this option two configurations are possible One is the mul tichannel configuration which may be applied for one specific sample pressure at various places The other is the multi range con figuration which may be applied for various ranges of the sample pressure A user can select any combination of the sample pressure range with the proper capillaries using this multi range configura tion This configuration can cover continuously from 20 Torr to 1 mTorr the whole range of UGAPM Parts 8 channel Multiple inlet valve system MI Valve base Valve controller Valve controller holder Control cord Power cord for the controller RS232 communication line for the controller Channel plug 1pkg Internal reducer 1 8 1 16 1 pkg Multiline sample valve MSV on off and outlet line assembly Self control accessory box Specified SS capillary 1 m long unheated with a connector and a plug fitting 1 set Top front cover for this option Extra capillaries for the multichannel or the multi range configuration should be ordered as accessories the plug fitting should be removed before using a capillary The multiple inlet valve system is installed on the UGAPM setup plate along
113. ion gauge is on Reserved System Bake ON When the system bake is on the following actions are not allowed 1 Start and sleep automatic sequences are not allowed to start 2 The leak test is not allowed to start 3 The bypass pump bypass valve and sample valve are not allowed to open 4 The turbo pump is not allowed to turn idle or off 5 The RGA is not allowed to turn on 6 The heater is not allowed to turn off 7 Pressure Interlock Option may not be disabled AUTO sequence ON Pressure Interlock Option is not allowed to change during one of the automatic sequences start sleep and stop Interlock triggered The user interlock on the back panel is triggered to stop the system UGAPM Series Universal Gas Analyzers for Process Monitor UGAPM Error Messages UGAPM Series 51 52 53 54 55 Pressure Interlock off START sequence and the system bake are not allowed to initiate with Pressure Interlock off Leak test timeout Communication time out occurred during Leak Test It may happen once in a while If it happens every 10 second or so the communication between the main control board and the RGA is down If so turn RGA off and on again to recover Fac Default Loaded 1 With turning UGAPM on with the STOP button pressed Factory default setting is loaded instead of the saved parameter setting It is used to reset the instrument to a kn
114. is noise originates in the ionizer of the RGA subtraction cannot remove much more than 90 of the background This limits the ability to see small changes of less than 1 at the same mass as peaks present in the background 5 2 5 2 Correcting for Multiple Species UGAPM Series As discussed above the UGAPM is calibrated at one mass num ber Because every gas behaves differently analog scans can only show peak heights that are correct at the one mass number It is not possible to correct the analog and histograms at every mass number The RGA would have to know what species was causing the ion current at each mass As an example ion current at a m z of 16 is caused by a fragment of H O 0 a fragment of O O or O or CH Many of the peaks in a mass spectrum may have Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com SRS Stanford Research Systems Calibration and Input Design multiple sources To demonstrate this to yourself use the library search on almost any single mass number Except for a few values the search will retrieve multiple species for almost all the low mass peaks Without knowledge of what species is causing what peak the correction cannot be made automatically Practically this is not a problem the histogram and analog modes are intended to show qualitative composition The table modes table P vs t and annunciator contain a scal ing factor for each species
115. k of the unit Components will fail without this cooling Lifting The UGAPM system is heavy use care when lifting Two people are recommended for lifting the system The handles provided are used for lifting Do not move when system is running Line Voltage The UGAPM system is specified for line power of either 110 V 60 Hz or 220 V 50 Hz All the components inside the instrument will only be operated on 24 VDC Operating at other voltages will damage the components Two 3 A fuses must be used in the power entry module Exhaust As shipped the UGAPM system exhausts to the atmosphere If the system is analyzing hazardous gases the user must make provi sions to handle the exhaust from the system A standard 1 4 inch ID Tygon tube connection is provided for this purpose Elastomer Seals Silicone has been reported to react adversely and irreversibly with the glass contained in an electron multiplier Since the UGAPM contains an electron multiplier do not use silicone greases or oils on seals use only hydrocarbon based materials UGAPM Series Universal Gas Analyzers for Process Monitor iii Symbols on SRS products Symbol Description Protective bonding terminal Alternating current Caution risk of electric shock Frame or chassis terminal Caution refer to accompanying documents Earth ground terminal UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com iv Check
116. l up Ext CM gauge Full Scale Range Input data No CM pressure in Torr amp one level up Zeroing Perform zero reading correction Pressure Interlock Select a state Off On amp one level up Start Perform the Start sequence amp go to the selected display Set Temperatures Sample Temperature Sleep Perform the Sleep sequence amp go to the selected display Stop Perform the Stop sequence amp go to the selected display SRS Stanford Research Systems UGAPM Series Universal Gas Analyzers for Process Monitor Appendix Appendix B UGAPM State Diagram The state diagram is shown below Each arrow means a state can be reached from the state which an arrow starts For example BAKE state 12 can be reached from READY IDLE INDIVIDUAL and OFF And IDLE state cannot be reached from OFF or BAKE state but from any other states At IDLE state however the system can go to STOP As can be seen below all fundamental modes can be reached from another The UGAPM can be stopped from any condition The stop command is handled on an emergency basis i READY 6 Le 8 ly eee 4 OFF 1 Changesto READY state whenthe mode ends ooo ChangetolDLE from INDIVIDUAL only when TP is at full speed 3 Starting Preparing for Ready state 4 Stopping 7 Sleeping 11 Going to the Bake state Refer to Chapter 3 for the other state numbers UGAPM Series Phone 408 744 9040 Unive
117. list Standard System Option 1 Multiple Inlet Valve Option 2 System Vent Valve SRS Stanford Research Systems Open the box es and inspect all components of the UGAPM system Report any damage to Stanford Research Systems immediately Compare the contents of the shipping boxes against your original order and the checklist below Report any discrepancies to Stan ford Research Systems immediately UGAPM base unit Power cord 15 Ethernet cable SS capillary for related application pressure 1m long unheated with the connector z the plug fitting UGAPM manual RGA manual 1 CD software and electronic manuals one or more of 4 kinds 0 25 mm ID w 1 16 OD HSC 0 50 mm ID w 1 16 OD MSC 1 15 mm ID w 1 16 OD LSC or 2 00 mm ID w 1 8 OD ULSC the plug fittings should be removed before using 8 port Valve installed Valve base installed Valve controller installed Valve controller holder installed Control cord installed Power cord for the controller installed RS232 communication line for the controller installed Chamnel plug 1 pkg partially used Internal reducer 1 8 1 16 1 pkg Multiline sample valve amp outlet line assembly installed Accessory box SS capillary for related application pressure 1 m long unheated with the connector amp the plug fitting 1 set Top front cover for this option installed See above See above Vent valve installed Purging
118. llary specifications Torr ID OD Length Mark mbar mm inch inch m in Fig 1 2 20 6 15 4 5 0 25 0 010 1 16 7 0 0 7 5 0 0 5 0 50 0 020 1 16 1 2 0 07 12 09 Trona an 0 3 0 001 0 25 0 0008 2 00 0 080 0 01C Proper ID selection of the capillary is necessary to ensure a low enough operating pressure at the mass spectrometer These capil laries are carefully selected to obtain a mass spectrometer operating pressure of about 10 Torr after the pressure reduction at designed sample pressures In the next page the typical operating pressure data are shown depending on selected capillaries and sample pres sures Data are shown with both direct connection single line configuration and multiple inlet connection multi line configura tion UGAPM systems are also simple to operate and maintain All the components can be controlled from both front panel and a remote computer A user can directly control all the pumps valves and heaters from the front panel A convenient display allows menu driven operation A Pirani gauge and an ion gauge monitor the status of the system continuously and this data is available on the front panel These gauges allows the system to automate the pump down procedure and to implement interlocks for unattended SRS Stanford Research Systems UGAPM Series Universal Gas Analyzers tor Process Monitor UGAPM Basics Chamber Pressure Torr 3 00E 05 3 00E 06 3 00E 07 fail
119. ly however the chamber pressure IG reading or roughing pressure PG reading goes above the limit of the UGAPM interlocks explained in the next section Usually the smaller ID capillaries show these kinds of behaviors In this case just try to open MSV again after related parts are reset Sometimes you should repeat this reopening several times because you are pumping the gas in the dead volume through a capillary If a user surely evacuate all the capillaries at channels to be used and is certain to use them safely he she can bypass the above safety option by setting the safety check disabled Please refer to the chap ter 3 of this manual for the details of using the bypassing command ZCMC 0 A user can set this command from the front panel Con trol menu or sending it directly from a remote PC 2 2 4 4 Interlocks The UGAPM has several interlocks to protect the instrument These interlocks are tied to pressure and temperature For example the TP cannot be turned on until the roughing line pressure is low enough If the TP temperature reading is above 60 C the UGAPM shuts down the turbo pump and other components to reach a safe state The following table summaries the interlocks used As can be seen in the table PG and IG readings RP and IG display respectively are critical for UGAPM operation If PG gauge is mal functioning the UGAPM is not operable If an interlock activates an error message is produced For a list of all U
120. ly closes it This command goes in the cycles not to vent the chamber too fast while the turbo pump is running in full speed ZCVV returns 1 through the whole cycles and return 0 after the final closure Errors and Warnings The command is ignored if any of these conditions are met ZCVV 1 Warning 37 Roughing pump ON Error 85 No Vent valve Pressure interlock Off On The ZCPC i command sets Pressure Interlock state to Off i 0 or On i 1 The ZCPC query returns the current value of Pressure Interlock state If the state is 1 UGAPM keeps monitoring pressures from PG to protect itself from any pressure changes If 0 it disables protection based on PG readings It should be used only by very advanced users or for trouble shooting Errors and Warnings The command is ignored if any of these conditions are met ZCPC 0 Warning 48 System Bake ON Warning 49 AUTO sequence ON UGAPM Series Universal Gas Analyzers for Process Monitor Remote Programming ZCMC i MSV safety interlock Off On ZCHT i UGAPM Series The ZCPC i command sets MSV Safety Interlock state to Off i 0 or On i 1 The ZCMC query returns the current value of Pressure Interlock state If the state is 1 UGAPM keeps functioning the safety checking dur ing the channel change of the multiple inlet valve If 0 it disables the safety check It should be used only by very advanced users or for well prepared capillary conne
121. main control board and the auxiliary control board 83 84 Reserved 85 No Vent valve No vent valve was detected 86 88 Reserved UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com 89 90 91 92 93 94 95 96 97 98 SRS Stanford Research Systems UGAPM Error Messages AUX comm error Communication between the main control board and the auxiliary control board did not work properly at least for a second Main board reset When the main control board powers up the auxiliary control board reports that the turbo pump is on It indicates the main control board is reset while the auxiliary control board is on Reserved No PG detected Pirani gauge is not detected No PG filament The detected current through the Pirani gauge is too small this probably means the PG filament is damaged PG short circuited Too much current flows through the Pirani gauge PG malfunction The roughing line pressure reading of the Pirani Gauge is lower than 10 mTorr or higher than 1100 Torr for 10 seconds This condition initiates the STOP sequence CM malfunction The sample line pressure reading from the capacitance manometer is lower than 10 mTorr for 10 seconds It indicates the capacitance manometer is disconnected or not working properly This condition closes the sample valve and the bypass valve an
122. most commer cially available systems employ an aperture as a sample inlet to reduce the pressure several decades to a level suitable for the RGA Even though this method works very well for the desired pressure reduction there is one drawback in this architecture The drawback is the dead volume for the analysis process In most analytical in struments some parts tube valve flanges etc are needed around this aperture to introduce sample gases from the user s chamber to an RGA chamber These parts produce unwanted volumes for the analysis several tens of mL to several hundreds of mL These kinds of volumes should be flushed out before starting the measurement or should be filled up to see the changes in the sample chamber This costs measuring times and quite extra sample amounts In UGAPM systems an SS capillary of 1 16 or 1 8 OD and 1 m length is adopted to achieve a pressure reduction depending on the user s chamber operating pressure Only a vacuum sealed on off valve is placed in front of the analyzer followed by the capillary See figure 1 1 The other end of the capillary will be connected to the user s chamber directly In this way only the capillary volume needs to be handled between the user s chamber and the analyzer This means at most the volume of several hundreds uL is needed to pump down to start the measurement or to fill up to detect the changes If the capillary is connected to a user s chamber without any valve t
123. mp controller Once one of these errors occurs the UGAPM has to be turned off and turned on again to clear the error With Error 104 the ZCTP query returns Error state 12 until the turbo pump is turned off Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com SRS Stanford Research Systems ZCSV 1 ZCBV i Remote Programming Single line Sample valve SSV Off On The ZCSV i command turn only SSV Closed i 0 or Open i 1 Example ZCSV 1 Opens SSV ZCSV Returns the state of SSV Errors and warnings The command is ignored if any of these conditions are true ZCSV 1 Warning 48 System Bake On Error 100 SSV too high Multil ine Sample valve MSV Off On The ZCBV i command turns MSV Closed i 0 or Open i 1 The ZCBV query returns whether MSV is Closed 0 Open 1 turning open 3 or 4 turning closed 6 or 7 Example ZCBV 1 Opens MSV ZCBV Returns the state of MSV Errors and warnings The command is ignored if any of these conditions are true ZCBV 0 Warning 34 SSV OPEN ZCBV 1 Warning 48 System Bake On Warning 30 id Error 99 MSV too high UGAPM Series Universal Gas Analyzers for Process Monitor Remote Programming UGAPM Series Universal Gas Analyzers for Process Monitor ZCRG i RGA Off On ZCIG i The ZCRG i command turns the RGA Off i 0 or On i 1 The ZCRG query returns whether the RGA is Off
124. mpling point as possible UGAPM Series Universal Gas Analyzers for Process Monitor Calibration and Input Design 5 4 References UGAPM Series General RGA information Dawson Quadrupole Mass Spectrometery and Its Applications AIP Press NY 1995 Drinkwine and D Lichtman Partial Pressure Analyzers and Anal ysis AVS Monograph Series published by the Education Commit tee of the American Vacuum Society Basford et al J Vac Sci Technol A 11 3 1993 A22 40 Recom mended Practice for the Calibration of Mass Spectrometers for Par tial Pressure Analysis Update to AVS Standard 2 3 Batey Vacuum 37 1987 659 668 Quadrupole Gas Analyzers Fu Ming Mao et al Vacuum 37 1987 669 675 The quadrupole mass spectrometer in practical operation Dawson Mass Spectrometry Reviews 5 1986 1 37 Quadrupole mass analyzers Performance design and some recent applica tions Vacuum Diagnosis Studt R amp D Magazine October 1991 p 104 Design Away Those Tough Vacuum System Riddles Applications of RGAs to process control O Hanlon J Vac Sci Technol A 12 4 Jul Aug 1994 Ultrahigh vacuum in the semiconductor industry Vic Comello R amp D Magazine September 1993 p 65 Process Mon itoring with Smart RGAs Waits et al Semiconductor International May 1994 p 79 Con trolling your Vacumm Process Effective Use of a QMA Rosenberg Semiconductor I
125. n emergency basis When the system is at vacuum sufficient to support RGA operation we refer to the state of the system as the READY state Careful control of the UGAPM is required to get to the Ready state safely This is achieved with proper vacuum control After the system is in the Ready state it can perform the function of analyzing gas running the RGA and collecting data The UGAPM allows auto matic control and individual control Automatic control means that the UGAPM will perform the pre designed sequences to reach the requested state Ready state by pushing START WAKE but ton Idle state by pushing SLEEP button Off state by pushing STOP button Individual control means that each component of the UGAPM can be controlled individually by pushing a compo nent button These two control modes are easily interchangeable For the detailed operational schematics refer to Appendix B the state diagram 2 2 Front Panel Operation 2 2 1 Keypads 2 2 1 1 Status Keypad UGAPM Series Universal Gas Analyzers for Process Monitor www thinkSRS com The left hand keypad on the front lower panel of the instrument indicates the status of the instrument It is a flow diagram showing which components are active at any given time We will refer to this keypad as the status keypad Phone 408 744 9040 2 4 Guide to Operation This keypad shows the status of components by illuminating LED s When a component is in
126. ne hour 5 1 6 Effect of Total Pressure Increasing the total pressure at the inlet of the capillary will in crease the flow through the capillary The higher flowrate in turn will increase the pressure at the RGA This effect is not linear and in applications where the inlet pressure varies the user needs to understand the flow at the inlet The flowrate or throughput of the capillary is characterized by Q SUP P out where Q is the throughput a mass flowrate C is the conductivity of the capillary and P amp P are the pressures at the inlet and the outlet of the capillary The inlet pressure is much larger than the outlet pressure which allows P to be approximated as zero The conductivity is a function of the capillary dimensions the viscosity of the gas and the pressure drop across the capillary This results in the throughput Q being proportional to the square of the inlet pressure In UGAPM the turbomolecular pump dictates the pres sure at the outlet of the capillary according to Universal Gas Analyzers for Process Monitor SRS Stanford Research Systems UGAPM Series Calibration and Input Design where Spp is the speed of the pump The speed of the turbomo lecular pump varies with throughput according to its characteristic curve referred to as a speed curve The speed curve is not linear Because the pump has an ultimate vacuum it can achieve the in tercept of the curve is not even zero Although all the fa
127. nshot of Multiple inlet valve control The present position is displayed in the component state section and also the operation sub window 2 3 6 2 UGAPM Series Vent valve control In the UGA control software the appropriate action menu lected the UGAPM will first click the vent valve Fig 2 33 Choose item OFF or ON When ON is se open the valve for 1 second Then it will wait for 40 seconds to open it again for 5 minutes After this the valve will be closed By doing this the TP will stop smoothly without a pressure shock This function will help the system stop safely in several minutes and protect the RGA chamber from con tamination Universal Gas Analyzers for Process Monitor Phone 408 744 9040 www thinkSRS com 2 47 Guide to Operation B E Components Sample Valve CLOSED 4 Roughing Pump IDLE Turbo Pump ON J RGA ON lon Gauge ON IG Fal B E Options 9 Multiple Inlet 1 MultlineSV OFF Vent Valve OFF Wag LC Apply Cancel Sample Heat OFF Es AutoVent ON ON Ext CM ON Fig 2 33 Screenshot of the Vent valve control on the UGA software 2 3 6 3 Sample heaters setting Go to the Setup menu followed by the Heaters sub menu In this sub menu choose Sample Temperature item Type in the desired temperature settings The heating temperatures can be set from 40 C to the maximum of 100 C for Sample line and Capilla
128. nternational October 1995 p 149 The Advantages of Continuous On line RGA Monitoring Lakeman Semiconductor International October 1995 p 127 In crease overall Equipment Effectiveness with In Situ Mass Spec trometery Quantitative measurements Bley Vacuum 38 1988 103 109 Quantitative measurements with quadrupole mass spectrometers important specifications for reli able measurements Cowen et al J Vac Sci Technol A 12 1 Jan Feb 1994 Non linearities in sensitivity of quadrupole partial pressure analyzers operating at higher pressures Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com 5 30 Calibration and Input Design Multiple linear regression analysis algorithms William H Press et al 1992 Numerical Recipes in C The Art of Scientific Computing Second Edition Cambridge Univ Press sec tion 15 4 page 671 Bevington P R 1969 Data Reduction and Error Analysis for the Physical Sciences New York McGraw Hill Chapters 8 9 UGAPM Series Stanford R h Syst DIES Stanford Research Systems Universal Gas Analyzers for Process Monitor Appendix A 1 Appendix A UGAPM Menu Table The bold value is the factory default value Top level 6th level System Bake Off Stop System baking amp go to the selected display On Start System baking amp go to the System Bake display Bake Time Input data 8 hr 2 100
129. nting gas input flow The main controller board controls the function of this valve The purge gas line should be connected at the rear lower panel before the vent valve is used 1 3 3 O100HC Sample heater accessory UGAPM Series Parts Capillary with heater Washer thermocouple 6 Sample line heater Extra line heat jacket Pinhole heat jacket Sample line heat jacket Sample line heater holder Sample inlet connector heater Sample inlet insulator Related hardware The parts related with this accessory are shown in the following pictures Fig 1 10 amp 1 11 The full assembly of the O100HC parts is presented in Fig 1 6b Power for the capillary heater is controlled from the auxiliary control board The thermocouples for the capil lary and the sample line are also connected to the auxiliary control board To conserve heat from the tip of the capillary to the sample inlet adapter custom designed heating jackets and an insulating block are used Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com fs RS Stanford Research Systems UGAPM Basics La Fig 1 10 Capillary with heater The connector for heater power and TC is also shown Figure 1 11 Components for sample line heating in O100HC UGAPM Series Universal Gas Analyzers tor Process Monitor UGAPM Basics In order to change or connect the capillary for this accessory follow the procedure below Disconnect the heater powe
130. o 10 will be stored into the error stack If there are more than 10 errors occur the last error will replaced with TOO_ MANY_ERRORS 126 ZERR returns the latest error first To clear ZBST bit 15 you must issue ZERR until you get 0 For the complete error list refer to the Chapter 4 of this manual ZEDS i Error message The ZEDS i queries the error message corresponding to an error number 9 to 126 returned with ZERR This query returns a verbose string corresponding to the given error code 3 2 6 Parameter setting commands Parameters changed with the following commands are saved in EEPROM preserved even after power off and loaded into system when UGAPM start again next time ZPRO i Roughing pump on power The ZPRO i command sets the roughing pump on power to a value from 30 i 30 to 100 i 100 The ZPRO query returns the current on power setting for the roughing pump The parameter change is immediately effective all the time even the roughing pump is running The default setting is 60 i 60 UGAPM Series Stanford R h Syst DIES Stanford Research systems Universal Gas Analyzers for Process Monitor Remote Programming ZPRI i ZPBA i ZPIP i i i i UGAPM Series Roughing pump idle power The ZPRI i command sets the roughing pump idle power to a value from 30 i 30 to 100 i 100 The ZPRI query returns the current idle power setting for the roughing pump The paramet
131. ocedure can be accomplished automatically simply by pressing the green Start Wake button on the control keypad 1 Enter the UGAPM menu system push the Level up button on the control keypad Enter the Display menu and select Pressure Push the Roughing Pump button on the status keypad Turn on the Roughing Pump RP with the control keypad Wait till the roughing line pressure read from a Pirani gauge is below 5 Torr Note if this condition is not achieved within 5 minutes the error LED is lit an error message appears and the system is turned off This indicates a leak in the system or not long enough to pump down under the interlock limit 6 Push the Turbo Pump button on the status keypad e Turn on the Tubormolecular Pump TP with the control keypad The TP speed can be checked in the TP display Push the up or down arrow button to see the TP information during the pressure display 8 Watch the turbo pump speed on the TP display Wait until the TP reaches full speed 90 kKRPM Note if this condition is not met in 10 minutes the error LED is lit an error message appears and the system is turned off This indicates a leak in the system or a bad TP 9 Push the RGA button on the status keypad PSN SRS Stanford Research Systems UGAPM Series Universal Gas Analyzers for Process Monitor Guide to Operation 2 9 10 Turn on the RGA with the control keypad T1 Wait for 4 minutes or longer
132. of the molecules will remain intact and will be mea sured at mass 28 Multiply the partial pressure by this fraction to determine the reference value Example the reference value would be 550 Torr 4 With the pressure reduction factor disabled or set to 1 measure the peak at mass 28 Example the system indicates 1 3 x 10 Torr at mass 28 5 The pressure reduction factor is the reference value divided by the measured value Example the factor is cal culated to be 4 2 x 10 for this instrument 6 Enter this number in the pressure reduction factor dialog box and check the enable box This completes the calibration All modes of the software will now report partial pressure at the inlet to the capillary Be sure to record these values as they can be used to diagnose system performance The pressure reduction factor is saved in the RGA file make sure to select File Save to record the new pressure reduction factor UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com 5 16 Calibration and Input Design 5 2 2 Basic Recalibration Some situations will require recalibration of the instrument For example aging of the pumps and ionizer filament changes in the total pressure at the capillary inlet e small dimensional changes to capillary For users of one capillary and one input stream an easy method of making small changes to the calibration values is available with the Sensitivi
133. on vola tile memory of the RGA Head The sensitivity factors one for to tal pressure and one for partial pressure are used as conversion factors between the ion currents received from the head and the pressure units selected by the user The sensitivity factors are mea sured with the Faraday Cup FC detector and can be updated or changed very easily by using the Sensitivity Tuning command in the Head menu A separate Electron Multiplier Gain Factor stored in the non volatile memory of the RGA Head is used to correct the ion signals for the gain of the electron multiplier The gain of the electron multiplier is highly mass dependent and defined relative to the corresponding FC signal An automatic Electron Multiplier Gain Adjustment command built into the program can adjust the CDEM voltage for any gain between 10 and 10 Consult the RGA Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com SRS Stanford Research Systems Calibration and Input Design On Line Help Files for details on the automated tuning procedures built into the RGA Windows program Also see the Sensitivity and Electron Multiplier Tuning sections of the RGA Tuning Chapter for more general information The Table mode of RGA Windows offers scaling factors for all of its channels eliminating the limitations imposed by the single sensitiv ity factor on multiple partial pressure calculations For example the scaling factors can be used to
134. own setting 2 Factory default setting is loaded during the power up due to EEPROM setting corruption IG is off When Single line Sample Valve SSV or Multi line Sample Valve MSV is open check IG is on or not If IG is not on UGAPM gives this error message MSV changing When the command for the channel change of the multiple inlet valve is received check whether MSV is open or closed If MSV is closing or opening UGAPM gives this error message 56 60 Reserved Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com UGAPM Error Messages 4 2 3 Critical Error messages 61 62 63 64 65 66 67 Heater initialize Heater temperature settings are not initialized in time probably due to miscommunication between the main control board and the auxiliary control board Elbow Heater T C The thermocouple sensor attached on the elbow is an open circuit The temperature cannot be read Chamber Heater T C The thermocouple sensor attached on the main chamber is an open circuit The temperature cannot be read Sample Heater T C The thermocouple sensor attached on the sample line is an open circuit The temperature cannot be read Capillary Heater T C The thermocouple sensor attached on the capillary is an open circuit The temperature cannot be read Temp Set Failed Temperature setting was not updated in time probably due
135. pt button to store the newly calculated value into the RGA or the Undo button to restore the previous button UGAPM Series Stanford R h Syst PRS Stanford Research Systems Universal Gas Analyzers for Process Monitor Calibration and Input Design The instrument is now recalibrated Note that the new sensitivity factor is only correct when used with RGA files that contain the matching pressure reduction factor This procedure can be repeat ed frequently to make minor adjustments to the overall sensitivity factor Because the range of the RGA sensitivity factor is limited by firmware this procedure cannot be used to account for large changes in the overall sensitivity factor 5 2 3 Calibration for Multiple Operating Conditions UGAPM Series The UGAPM capable of being used over a variety of operating con ditions which in turn require different overall sensitivity factors Examples are e one UGAPM system used with multiple capillaries measurements of gas streams at different total pressure temperature or composition measurements at multiple ionizer conditions The RGA sensitivity factor is not meant to be directly adjusted by the user The software only allows this value to be changed via the Sensitivity Tuning dialog box using a reference gauge reading Us ers cannot type a new value into the Sensitivity Factor text box In stead the Pressure Reduction Factor feature is provided to account for widely varying operating
136. pumps The speed values have been scaled to show both pumps on the same graph The pressure is the ex haust of turbo and the inlet of the diaphragm pump UGAPM Series f Stanford R h Syst PRS Stanford Research Systems Universal Gas Analyzers for Process Monitor Calibration and Input Design 5 25 with the speed curve of the diaphragm pump The two curves over lap for a small region of pressures which determine the operating range of the system In the case the UGAPM the overlapping region is 1 5 mbar As the turbo pump exhaust pressure increases approaches 5 mbar the work it performs will increase Reading the current value at the TP monitor display on the front panel is a good indicator of the power consumed by the pump Running the pump near its limit mainly causes the bearing temperature to increase The turbo pump con troller will detect if the bearings are overheating and avoid damage by shutting down the pump Long term operation near the tem perature limit mainly will age the bearings more quickly The only advantage to operating the turbo pump at higher exhaust pressures is an increase in the flow rate through the capillary The higher flowrate can help response time but given the cost of a turbo pump rebuild response time is better addressed through capillary de sign 5 3 3 Capillary Design The inlet uses a single pressure reduction configuration because the sampling pressure is low enough to get semi molecular flow The
137. r 2 of this manual for how to get connected 3 1 1 Communication v a RS 232 The UGAPM uses a DB9 connector for serial communications The female DB9 connector on the bottom front of the UGAPM is con figured as a DCE transmit on pin 2 receive on pin 3 device and supports CTS RTS hardware handshaking The RTS signal pins 8 is an output indicating that the UGAPM is ready while the CTS signal pin 7 is an input that is used to control the UGAPM s data transmission Ground is pin 5 The UGAPM uses hardware hand shaking one stop bit no parity baud rate either 28800 or 38400 3 1 2 Communication v a Ethernet A user may connect the UGAPM either directly to the host com puter with a cross over cable or to a hub or switch with a straight through CAT5 or above cable To connect UGAPM to internet you will need a static IP Internet Protocol address Subnet mask and Gateway address See your network administrator to obtain ad dresses appropriate for your network environment 3 1 3 Command Format Communications with the UGAPM uses ASCII characters Because the UGAPM is case insensitive all commands may be in either UPPER or lower case A command starts from a character after a termination character and ends with a termination character The UGAPM uses carriage return lt CR gt as the termination character The UGAPM has two separate sets of commands that are handled by separate microprocessors One is the UGAPM command set
138. r and TC cable from the connector if a heated capillary was connected Pop off the front upper panel Using a long Philips driver unscrew the sample inlet insulator and move off the insulator The driver passes through the hole on the line connector bracket See Fig 1 12 below Unscrew the Swagelok fitting and remove the capillary if the capillary was connected Take out the sample inlet insulator and the front panel from the removed capillary if the capillary was connected Pull out the capillary through the capillary heater if the capillary was connected Put a new capillary into the heater and pass the capillary connector through the front upper panel and the sample inlet insulator Plug into Swagelok fitting and tighten up the fitting Screw back the sample inlet insulator Pop in the front upper panel Connect the heater power and TC cable to the connector Figure 1 12 Ultra Torr insulator releasing for O100HC capillary change or connection UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com 1 18 UGAPM Basics 1 3 4 O100CM External Capacitor Manometer accessory Parts Capacitor Manometer CM gauge 20 Torr max CM power amp signal cord 25 long DB9 adapter with an internal cord DB9 bracket The parts of DB9 adapter with an internal cord and DB9 bracket will be installed inside of the unit upon the order See Fig 1 13 The other parts will be shippe
139. rocedures The last sections discuss spe cific design for the pressure reduction 5 1 Mass Spectrometry Basics How Mass Spectra are Interpreted Partial Pressure Measurement Partial Pressure Sensitivity Factors Single Gas Measurement Example Calibration ic a wee a ee Se ee Gok a Effect of Total Pressure 4 4 aiii we oe od 3 Operating off the Design Pressure Total Pressure and Composition 5 2 Calibration of Partial Pressure Initial Calibration s s e Basic Recalibration sida ira e ww a Calibration for Multiple Operating Conditions Calibration with Fixed Reservoir E o AE eo Ae oe Be Correcting for the chamber background Correcting for multiple Species cu Operation with Condensable Gases 5 3 Pressure Reducing Inlet 4 25 ees es 4 Flow Calculations 2642540224 08844 Turbo POMpie lt c amp vo 8 eR SEES EEE GS Capillary Design a4 68 3 4 44 84 4 ew 3 Length amp Bore s sosea be ina ae Materials and Fittings idad ade oh oe Extensi hS s dea a e SS EE A 5 4 References 0 a 5 2 Calibration and Input Design 5 1 Mass Spectrometry Basics The RGA can perform both qualitative and quantitative analysis of the gases in a vacuum system Obtaining spectra with the RGA is very simple Interpreting the spectra that is understanding what the spectra is trying to tell you about your vacuum system requires som
140. rsal Gas Analyzers for Process Monitor www thinkSRS com A 4 Appendix Appendix C Calibration Log for RGA SRS serial number In the table below are the results of the calibration of the inlet and capillary The factor is entered in the pressure reduction factor dialog box under the Utilities menu in the RGA software Al though the RGA software will store the value for you a written record is recommended performed by capillary ID P high side UGAPM Series Stanford Research Systems SRS Universal Gas Analyzers for Process Monitor
141. ry 120 C for Elbow and RGA chamber This temperature limit is important for the valves Sample valve amp Bypass valve performance The de fault values are 0 C for ELB 0 C for CHA 80 C for SMP 80 C for CAP In the UGA control software a user can set the temperature limits at the Heaters tap in the Settings dialog box Fig 2 22 shows the details After the heating temperatures are set press Sample heater on from the front panel or from the UGA control software This will heat up the capillary the pinhole holder and the sample line till right after the bypass valve 2 3 6 4 External CM gauge control If no an external CM Ext CM is installed the state indicator LED will be lit white Ext CM option will be set to be off at the option and Ext CM is not installed message will be shown in the reading display SRS Stanford Research Systems UGAPM Series Universal Gas Analyzers for Process Monitor Guide to Operation 2 48 If Ext CM accessory is purchased and connected into UGAPM a user should set the full scale range of the CM properly to read the proper pressure from it This can be done from the front panel Refer to the section of 2 2 3 4 and also from the UGA control soft ware Click the Ext CM item at the Options window As shown in Fig 2 34 below the setting box of the full scale range will be popped up Type in or scroll up and down the number of the prop er value which
142. s task See the RGA Tun ing Chapter in the RGA manual for a detailed description of the mass scale calibration procedure UGAPM Series Stanford R h Syst PRS Stanford Research Systems Universal Gas Analyzers for Process Monitor Calibration and Input Design Once all the peaks have been labeled the next step is to identify the residual gases that have produced the spectrum A knowledge of the recent history of your system may provide very valuable clues as to the possible gases that may be residuals in the vacuum chamber A familiarity with the standard spectra of commonly expected gases will generally help to determine the major and minor components in the system Any peak in the spectrum may consist of contribu tions from molecular ions and or fragment ions or multiply ion ized species The qualitative spectral analysis is completed when all the peaks in the spectrum have been uniquely assigned to the components of a gas mixture in complete agreement with the known fragmentation patterns of the components In cases where only the major components are of interest some of the minor peaks of the spectrum will remain unassigned If only a few species are being monitored only the peaks corresponding to the substances of interest need to be assigned and monitored Notes on Fragmentation Patterns The electron impact type of ion izer used in modern RGAs almost always causes more than one kind of ion to be produced from a single type
143. s the conductivity inls d and L are in cm and the pres sures are in mbar More general formulas including temperature and viscosity are contained in the texts listed in the references This formula also assumes laminar flow There are many approximations used in equation 4 and users may be concerned about its accuracy The formula shows that the con ductivity is a strong function of diameter As a practical conse quence this strong dependence means the standard manufactur ing tolerances on bore diameters will cause more uncertainty than the formula itself A typical 0 005 inch bore capillary might have a 10 tolerance While it is reasonable that the bore could vary from 0 0045 to 0 0055 inch this uncertainty causes the conductivity to vary by about 40 Use the standard formulas as a guide but cut the capillary long to begin with Measure the actual perfor mance and trim as necessary The chromatography industry uses a large variety of capillaries from which we can select capillaries for the UGAPM The figure below shows the conductivity for several commonly available bore diameters The application dictates which bore diameter is ap propriate SRS has tested several kinds of capillaries with various lengths and ID s carefully And 4 specific capillaries are chosen for the system depending on the application pressures UGAPM Series f Stanford R h Syst PRS Stanford Research Systems Universal Gas Analyzers for Process Monitor C
144. sage log and data log data log time interval The Message log contains all the events of compo nent controls with time stamp which are shown in 45 the log board of Fig 2 16 In the data log there are 8 data 3 pressures roughing line RGA chamber and external CM 5 temperatures elbow RGA chamber sample line capillary and TP with time stamp All these log data will be saved in the directory defined in the con nection settings The factory default directory is set at Application Data SRS UGA log directory in the user directory of C docu ments and settings file folder See Fig 2 19 below A user can make their own log directory by typing in a name or selecting an existing one at Log Dir If several UGAPM s are connected and log ging at the same time each file name is automatically assigned with the combination of the instrument control panel number and date as shown the above picture o 4 Connection Settings Serial TCP IP Log Dir Set path to the common log directory Settings hsunimApplication Data SRS UGA 10g To enable disable logging use Instrument Settings Fig 2 19 Screenshot of the Connection Settings dialog box showing the Log Dir tab UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com 2 35 Guide to Operation The Graph tab controls the options for displaying pressure and temperature data If a user checks Dock
145. sages 45 Critical error messages 4 8 4 2 UGAPM Error Messages 4 1 Introduction The UGAPM reports various errors as they are detected When an error is detected a message is shown on the front panel display and the error is logged for retrieval over the remote interface Users must also check for RGA head errors The RGA has its own micro processor and its own error reporting commands The RGA error status is monitored with the error query command ER For details refer to RGA manual chapters 7 and 9 UGAPM error messages are divided into three groups communi cation errors warning errors and critical errors Communication errors are those related to miscommunication with a host computer When a communication error is detected UGAPM flashes the warning LED once without changing display It stores the error number corresponding to the error into the error stack The error numbers for communication errors range from 9 to 29 Warnings are issued when UGAPM is not able to carry out a com mand sent over the remote interface or a menu selection chosen from the front panel With a warning the warning LED flashes for 4 seconds a warning sound beeps and the warning message is dis played After several seconds the warning is no longer shown and the display returns to the previously active display The range of the warnings is from 30 to 60 Critical errors are issued when the UGAPM detects problems while monitorin
146. t as a sequence of ASCII characters 3 2 1 Mode setting commands ZMST UGAPM Series Start The ZMST command initiates START mode It turns on all the components according to the automated START sequence and brings the instruments to the READY state Example ZMST begins START mode Errors and warnings The command will be ignored if any of these conditions are true ZMST may cause these errors Warning 48 System Bake ON Warning 51 Pressure Check off Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com SRS Stanford Research Systems ZMSP ZMSL ZMBK i Remote Programming Stop The ZMSP command initiates STOP mode Turn off all the components according to the automated STOP sequence Example ZMSP begins STOP mode Errors and warnings No errors or warnings for ZMSP It should work in any condition Sleep The ZMSL command initiates SLEEP mode It puts the UGAPM to IDLE state from READY or INDIVIDUAL state If the turbopump is off the ZMSL command will fail with the warning 42 Example ZMSL begins SLEEP mode Errors and warnings The command is ignored if any of these conditions are true Warning 42 Turbo not ready Warning 48 System Bake ON System Bake mode The ZMBK i command turns the system bake mode Off i 0 or On i 1 The ZMBK command returns whether the system bake mode is On or Off Example ZMBK 1 starts the system bake ZMBK re
147. tem bake LED will remain lit At the end of the bake the UGAPM will turn off the heaters and will return to the ready state by turning on the RGA and the IG UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com 2 12 Guide to Operation 2 2 3 Options and Accessories 2 2 3 1 Multiple inlet Valve When the button for Multiple inlet valve on the front panel is pushed the present channel will be displayed and blinking You can change channel number using the Up or the Down buttons It will rotate from 1 to 8 continuously with the shortest distance fashion After the confirmation button is pushed the system will behave in three ways Refer to the section of 2 2 4 2 1 When the Multi line SV MSV open safety has been set to be on and MSV was open the system will close MSV and the valve will move to the specified channel then the system will try to open MSV at the specified channel with the opening safety function 2 When the MSV open safety has been set to be off then the valve will rotate to the specified channel without any precautions 3 The valve will rotate to a new channel immediately when MSV is closed regardless the MSV open safety has been set to be on or off After the valve rotates to the new position the display returns to the pre selected display Before the valve is used plug the unused channels with the provid ed plugs A user can use any length of capillary as long
148. the ion current of a gas to its partial pressure is dependent on the specific gas Two calibration factors are used in the UGAPM system the RGA sensitivity and the pressure reduction factor The RGA sensitivity is the factor which converts the ion current that is measured by the electrometer to partial pressure at the ionizer The pressure reduc tion factor accounts for the large pressure reduction performed by the capillary inlet Determination of these factors requires compar ing the system with a known accurate pressure gauge and calcu lating the factor that makes the UGAPM agree with the standard Calibration is not necessary on a frequent interval but is required whenever operating conditions change The RGA intrinsically measures an ion current which is propor tional to the partial pressure at its ionizer While the software can Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com P SRS Stanford Research Systems pressure reduction factor Calibration and Input Design be set to report ion currents most users will need to measure par tial pressure at the inlet of the capillary To convert between the two the partial pressure reported by the software is calculated by the formula ion current A x on current A x overall factor Torr A sensitivity factor A Torr The pressure reduction factor is a function of the capillary dimen sions and the performance curve of th
149. tor www thinkSRS com 2 27 Guide to Operation j SRS_UGA_PM S N 0 V 1 008 Active control UGA1 connected to 172 25 128 11 ea Main Help UGA1 UGA2 UGA3 UGA4 UGAS Status 3 20 2014 10 35 21 AM USA Icstrament is 100 System Error 0 ee System Warning Start Sleep Stop gt 3 20 2014 10 33 49 AM TurboPumpNode is ON j Manual Control l lonGaugeNode is ON AutoVentNode is ON System Bake O Current Mode Q MANUAL CONTROL ExtCMNode is ON 7 Elapsed 00 01 31 Components Single Line SV Roughing Pump o Reading and Operation Turbo Pump E Display E Pressure RGA o RoughingLine 0 112 Torr Chamber 1 55E 08 Torr Ion Gauge Al Ext CM 5 9 Torr Ey Turbo Pump TP Speed 89 88 kRPM TP Current 800 m4 Ey Temperature Launch RGA Turbo Pump T 55 C Elbow T 28 C Ps Chamber T 25 9C Options Sample Line T 25 C Multiple Inlet 1 Capillary T N C MultiLine SV o MSV open safety B E Components Vent Valve o Sample Valve CLOSED Sample Heat o Roughing Pump IDLE Auto Vent Turbo Pump ON RGA OFF HEEL 10 lon Gauge ON G Fat B E Options Multiple Inlet 1 MultilineSV OFF Vent Valve OFF Sample Heat OFF AutoVent ON Ex CM ON Fig 2 12 Screenshot of UGA control software for UGAPM after the proper TCP IP Ethernet connection On the title bar the connection status is shown The program sho
150. ture Universal Gas Analyzers for Process Monitor f SRS Stanford Research Systems UGAPM Series Guide to Operation 2 36 Settings Logging Graph Bake Heaters Units Misc System bake time hour s Set Baking Temperatures Elbow temperature 0 Celsius Chamber temperature Celsius Fig 2 21 Screen shot of the Settings dialog box showing the Bake tab Settings Logging Graph Bake Heaters Units Misc Set Sample Temperatures Elbow 0 Celsius Chamber Celsius Sample Line Celsius Capillary Celsius Fig 2 22 Screen shot of the Settings dialog box showing the Heaters tab UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com 2 37 Guide to Operation If O100HC is ordered the system has two more heaters sample line heater and capillary heater in addition to the baking heaters elbow and chamber heaters For heated gas sampling the capillary and the sample line of UGAPM need to be heated In some cases the RGA chamber needs to be heated also In the Heaters tab all four temperatures can be set individually See the Fig 2 22 in the previous page The default values are 0 C for Elbow and RGA chamber and 80 C for Sample line and Capillary The heating temperatures can be set upto 100 C for Sample line and Capillary upto 120 C for Elbow and RGA Chamber A us
151. turns the state of the Bake mode On 1 or Off 0 Errors and warnings The command is ignored if any of these conditions are true Warning 51 Pressure Check off UGAPM Series Universal Gas Analyzers tor Process Monitor Remote Programming 3 7 ZMOD System mode query The ZMOD Query returns the current UGAPM mode described below Off 1 all components are OFF START 3 Automatic START sequence in prog ress STOP 4 Automatic STOP sequence in prog ress READY 6 RGA is on SLEEP 7 Automatic SLEEP sequence in prog ress IDLE 8 TP and RP are idle all other compo nents are off SYSTEM BAKE 12 System Bake is ON MANUAL 13 Manually changed of the state of a component from a pre defined state UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com Remote Programming 3 2 2 Components control commands ZCRP i ZCTP 1 SRS Stanford Research Systems Roughing pump Off On Idle The ZCRP i command turns the roughing pump Off i 0 On i 1 or Idle i 2 The ZCRP query returns whether the roughing pump is Off 0 On 1 Idle 2 turning on 3 or 4 turning off 6 or 7 or turning idle 8 or 9 Example ZCRP 1 Turns the roughing pump On ZCRP Returns the state of the roughing pump Errors and warnings The command is ignored if any of these conditions are true ZCRPO Warning 41 Turbo pump running ZCRP 1 Warning 33 Bypass valve O
152. ty Tuning feature of the software Under this method we assume that the pressure reduction factor is correct and change the RGA sensitivity factor Nitrogen is the most common recalibration gas and in this exam ple we assume that the partial pressure of nitrogen in air is used as a reference While air is convenient the recalibration can be per formed with any test gas as a reference Follow these steps to reca librate the UGAPM 1 Make sure that the pressure reduction factor is enabled and correct in the dialog box that appears under the Utilities Pressure Reduction menu item 2 Setup the UGAPM to sample the reference gas 3 Choose the Head Sensitivity Tuning menu item to make the Sensitivity Tuning dialog box appear Make sure the Measurement Mode is set to Partial Pressure and that the Mass Selection is set to the parent peak of the reference gas 4 Enter a value in the Reference Pressure Reading edit box that is the expected value for the pressure at the capillary inlet This value should be adjusted for the fragmentation factor as done above 92 6 for peak 28 from nitrogen As in the example in the previous section the reference reading is 550 Torr for nitrogen in air at a barometric pressure of 29 95 in Hg 5 Observe the value in the Sensitivity Factor text box and then press the Measure button A new value will be displayed in the text box which should be close to the old value 6 Press the Acce
153. typical capillary used is selected to get the operating pressure Of RGA chamber around 5x10 mbar at each designed sample pres sure Any number of combinations of length and bore diameter can achieve the same flowrate and pressure drop SS capillaries are chosen among several materials The factors affecting the choice of capillary are inlet pressure required response time distance to sample point material restrictions cost The possibilities for capillary choice are numerous and SRS offers only a few types The standard capillary shipped with the UGAPM is mainly provided to test the system and provide a reference The following sections contain some guidelines to designing a capillary suited to the users application UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com 5 26 Calibration and Input Design 5 3 4 Length 8 Bore To choose the dimensions of the capillary three parameters must be fixed the inlet pressure exit pressure and flowrate These three values allow the conductivity to be determined equation 1 A typical design point is an exit pressure of 1x10 to 1x10 mbar and a corresponding flow rate of 10 to 50 microliter min The inlet pressure is determined by the users application The capillary con ductivity is a function of the geometry pressure temperature and gas properties A common formula for air flowing through a tube at 20 C is 4 ee h 4 L 2 where C i
154. ump and will give the error message The second effect is excessive pressure at the RGA which can degrade the filament if it occurs for long periods This fault condition is also prevented by two means The RGA will shut off the filament when it senses the pressure is high and the system microcontroller will close the sample valve These operating limits restrict the dynamic range of the UGAPM with respect to increasing the inlet pressure above the design point The instrument has little head room and the capil lary should be designed for the maximum expected pressure Below the design point the UGAPM can tolerate large decreases in the inlet pressure The conductivity of each capillary limits the low est pressure at the outlet of the capillary typically to 2x10 mbar Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com SRS Stanford Research Systems Calibration and Input Design This pressure is the only operating limit below it gas would flow out of the RGA With respect to measurements operating the out let of the capillary near the conductivity limit flow is inadvisable At the ultimate flow the flow through the pump is effectively zero Operating the UGAPM with zero flow obliterates the fast response time of the instrument While there are no physically harmful ef fects to operating below the design point the ability to make mea surements is lost at very low inlet pressures Best performan
155. uration The Picture shows without Elbow insulating box If Option 2 is ordered a venting valve is shown connected to the Roughing line near the RP See figure 1 8b Figure 1 8b Detailed view of the TP vent valve configuration 1 2 6 Covers There are 3 covers Top front cover Top back cover and Bottom cover Fig 1 9 If Option 41 is ordered a different Top front cover will be used This optional cover has an open space for multi capil laries connection See Fig 1 9b SRS Stanford Research Systems UGAPM Series Universal Gas Analyzers for Process Monitor UGAPM Basics Figure 1 9a Top front cover Figure 1 9b Option 1 Top front cover Figure 1 9c Top rear cover Figure 1 9d Bottom cover 1 2 7 Miscellaneous parts A 1m long capillary of 1 8 OD or 1 16 OD with a capillary plug set is provided depending on sampling pressure A 15 long CAT 5e Ethernet cable a power cord one dowel pin with 1 8 Swagelok connector for sample inlet plugging UGAPM manual RGA manu al and the control software CD are also included 1 3 Options amp Accessories UGAPM Series There are two system options and two major accessories for the UGAPM The options can be ordered separately and installed by the user SRS strongly recommends to order options when UGAPM is purchased Multiple inlet valve option Option 1 Multichannel configuration or Multi range configuration Vacuum purging vent valve option Opt
156. urty Options IP address 172 2 Subnet mask 255 255 Default gateway 172 25 Done Cancel Fig 2 5 Screenshot of the Network tab in the Wizard dialog box Click the Security tab type in User ID and Password E WizardDialog DER General Network Security Options A J I Login SASUGA Password l i Fig 2 6 Screenshot of the Security tab in the Wizard dialog box When finished click the Done Button Check the TCP IP parameters in the Communication menu of the front panel The parameters should be saved in the UGAPM f SRS Stanford Research Systems UGAPM Series Universal Gas Analyzers for Process Monitor Guide to Operation 2 24 3 Now the UGAPM is ready to connect through TCP IP Ethernet connection Launch UGA control program Make sure the provided Ethernet cable is connected between the UGAPM and the switch or the router which a PC is connected If the connection is active the yellow LED will be lit on the RJ45 connector In the Main menuof UGA control software select Connection Settings The Connection Settings dialog box will pop up as shown in Fig 2 7 e In the setting dialog box choose the TCP IP tab EE Connection Settings Serial TCPAP Address User Password C Enable TCP IP Fig 2 7 Screenshot of TCP IP selection in the
157. ve values gt h Pressure Unit Display Heaters Tune Pump Power 2 2 2 2 Menu Navigation The UGAPM menus are navigated by moving a diamond shaped cursor with the arrow keys on the control keypad The UGAPM menu system indicates you are at the bottom of a menu by putting the cursor at the last visible menu item Likewise the top of a menu is indicated by locating the cursor at the first visible menu item Use the control pad arrow keys to scroll through menu items UGAPM Series Phone 408 744 9040 Universal Gas Analyzers for Process Monitor www thinkSRS com 2 8 Guide to Operation The end branch of each control menu tree is a state change menu The UGAPM indicates a state change menu by showing the current state with an asterisk To change the state move the cursor to the desired state and push the Enter button The detailed menu tree is summarized in Appendix A 2 2 2 3 Automatic versus Manual For most day to day operations use of the automatic pump down and venting functions is adequate For times in which an automat ed procedure is not desirable a manual procedure is given below along with the key presses required for quick operation Note that any automatic procedure will stop if you make a change to the sys tem while the procedure is running Also note that you can start or re start an automatic procedure at any time except during system bake 2 2 2 4 Manual Pump Down Procedure Note that this pr
158. with its special holders See Fig 1 6a Power cord and communication line are connected A 1 8 OD 15 cm long 2 0 mm ID tube is used for the main outlet This tube is connected to MSV using 1 8 1 4 reducer and a 1 4 OD flexible SS tube Then MSV is connected to the sample inlet adapter Only one specified SS cap illary is provided with the connector and the other end is plugged with a Teflon cap Qty 10 of channel plugs and qty 10 of internal reducers are also provided for this option The self control acces sory box contains a hand controller and various connection cables for the controller This unit can control the multiple inlet valve by itself without the UGAPM SRS Stanford Research Systems UGAPM Series Universal Gas Analyzers for Process Monitor UGAPM Basics For the multi range configuration to a single chamber a user may use the multi capillary adapter accessory O100MCA This acces sory connects multi capillaries to a single port In this way all used capillaries act like a single capillary A user just selects a proper channel in the multiple inlet valve for the proper gas sampling de pending on the sample pressure 1 3 2 Option 2 Vacuum purging vent valve option Parts Vent valve Purge gas line connector Vent line tube 150 um pinhole tube amp valve adapter The vent valve is installed at the roughing line and a 150 um pin hole tube is in the way before the valve to control the amount of a ve
159. ws the complete present state Fig 2 12 above shows that the Multiple inlet is installed in this unit and positioned at 1 channel The unit is in Manual Control state etc 4 Now a user can explore the program by clicking each item on the graph Refer to the next section Menus and Displays for detailed information 5 For operation of UGAPM refer to the previous section Front Panel Operation As mentioned before the program mimics the functions of the front panel SRS Stanford Research Systems UGAPM Series Universal Gas Analyzers for Process Monitor Guide to Operation 2 28 2 3 3 2 RS232 Serial Connection If a PC does not have a serial port then a USB Serial adapter is needed to establish the serial communication SRS strongly rec ommend the model of UC232R 10 from FTDI Chip Technology This one supports hardware hand shaking and huge data transfer ring successfully The communication between UGAPM and a PC through RS232 Se rial connection is possible with two different baud rates 28800 and 38400 The baud rate of 38400 is for a general COM port communi cation between UGAPM and a PC The 28800 baud rate is used for direct communication between the RGA in UGAPM and the PC A user can select either baud rate from the front panel 1 Connect between UGAPM and a PC using the straight RS232 DB 9 Serial cable 2 Power up the UGAPM if not on 3 From the front panel choose the baud rate as follows The default r
160. y ZCPC 2 fi oc ee ee ee ee ee es S12 ZCMC lili or Gece bites ard ae Bs e168 ZCHT 4B ew o cuck ge one tekari 3218 ZOMIG ls cad da dl we Aw 3 14 ZOVL e a ea 3 14 Status query commands 3 15 ABSI ar PA a 3 15 WBC ie oe aha sea pre AA 3 15 Ad Bere ee eg abad e 3 15 Query commands exis 3 16 ACIDO ok oe ay te A a a He 3 16 AQ 200 AR teh ae A i 3 16 ASNS ba ERAS 3 16 LOMO 252 2A ERA A a 3 16 ZQAD Te rose ys de de ea ee A 3 16 UQE 400 AAA ES 3 17 LOQUE 9 ae ee ee ed a 3 17 AQUA ssn A Ce BH 3 17 ZOTTA s di 0 ER A A A 3 17 ZOID 40000 ws we Ga giclee A ae A 3 17 ZOIC s 2 an a e d a e Gea y 3 17 ZOID z iaa a A a 3 17 DOBROS 6 Kc ee CE a G ee a 3 17 Error query commands 3 18 PERKS s epai aog 6 5 0 amp ode amp gH 6 3 18 ZEDS I 4 6 ARG o Be R Bod ee GOA 3 18 Parameter setting commands 3 18 ZPRO Mi 3 18 ZPRI i ee 3 19 ZPBA 2 i ee 3 19 ZPIP O fii 3 19 ZPSM 2 iii ee 3 20 ZPGW iid ee ee 50 ZPNM s 0 0 000 ee ee 3 90 ZPPW 2 s o oma ZPDU 2 fi ee Ji ZPSP io 30 ZPTO Dl J ZPFL i o oaa 829 ZPPU i cc ce eee eee anes 320 ZPCR 2 fi co ce esta ee 3 ZPAV fi oo ee 55 PEO ec oak ada a bbe a 3 23 PIB llos curtidos 3 23 FETE PA tows era ala Gee ss 3 24 A A IA 3 24 Remote Programming 3 3 3 1 Introduction The UGAPM may be controlled via either Ethernet interface or RS 232 interface remotely See the chapte

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