User Manual PZ150E - Physik Instrumente
Contents
1. ONT ONT Fig 5 Solder bridges SJ1 and SJ2 Solder bridges SJ1 and SJ2 on the back of the board will not normally need to be changed If SJ2 is closed as when the E 802 is installed in an E 621 E 625 or E 665 then the on target signal is available on J2 pin 2 Release 1 4 0 www pi ws Page 7 2 8 E 802 55 Servo Control Submodule User Manual PZ 150E Test Points Test point TP1 Slew Rate Servo ON and OFF for location see figure on p 4 set required rise time using P1 watch PZT voltage and sensor values Typical curve at positive input step U TP1 Fig 6 After the rise time the input voltage must be reached For fast applications remove jumper X1 Note This stage inverts the input signal Test point TP2 comparison point servo ON only After settling this voltage must be zero Note A permanent voltage indicates that somewhere in the servo loop there is an undesirable limitation amplifier PZT sensor or controller Typical curve at positive input signal step U TP2 OV Fig 7 Release 1 4 0 www pi ws Page 8 E 802 55 Servo Control Submodule User Manual PZ 150E Test point TP4 Notch Servo ON only Time response at input step depends on setting example U TP4 Fig 8 Test Criterion Final value equals input signal Release 1 4 0 WWW pi ws Page 9 E 802 55 Servo Control Submodule User Manual PZ 150E 2 9 Pinouts The connectors J1 and J2 of all E 802 versions are pin compati2. and suppresses resonance overshoot and oscillation see section Dynamic Adjustment beginning on page 13 Dynamic performance of the PZT system is determined by the maximum output current of the amplifier and by the mechanical properties of the PZT mechanics like moving mass damping and resonant frequencies In order to match the circuitry and the mechanical characteristics to achieve the desired performance the system has to be adjusted for both static and dynamic operations The full calibration and adjustment procedure includes adjustment of the zero point sensor gain slew rate and step response All these basic adjustments are done in our lab before shipment If PI has sufficient information about your application your PZT system will be shipped ready for operation Only the zero point will have to be realigned from time to time to compensate for temperature changes Further adjustments are not required as long as system components are not replaced or modified Since open loop sensor zero and range adjustment does not involve the servo control module it is described in detail in the other manuals accompanying this system During the calibration the PZT actuator has to be connected to the device with which it is to be operated later both devices then belong together Replacement of a device requires new calibration run to get the specified system accuracy 3 1 Equipment Needed for Calibration For adjustment of th
3. drift compensation potentiometer for location see figure on p 4 curve shapes A B and C can be attained If the overshoot can not be eliminated by using P5 the loop gain P term has to be reduced The result may be different at rising and falling edges so a compromise has to be found By default P5 is preset to its mid position In open loop mode the gain may vary by a value in the range of 3 to 6 depending on the setting of P5 Release 1 4 0 www pi ws Page 14 E 802 55 Servo Control Submodule User Manual PZ 150E So Release 1 4 0 www pi ws Page 15
4. 1 1 2 3 4 5 6 7 8 come LLLI Range 9 E 1 79 elo 9 l fd 1 70 210 10 1 11111 111 44 148 11 1 11 110 1 1 111 39 130 12 111 1 1 1 1 1 1 27 89 Special order with C24 C28 82nF P5 Pa SI P P3 P2 P1 XI T Fig 4 Locations of S2 range DIPs P4 frequency and S1 damping 2 4 3 Damping The damping is set with S1 use small screwdriver S1 Setting circle gt T 1 etting circle IS 2 20 dB g 25 dB Release 1 4 0 www pi ws Page 6 E 802 55 Servo Control Submodule User Manual PZ 150E 2 5 Voltage Ranges and Over Voltage Recognition Nominal Voltage Actual Voltage R10 R11 Range V Range V HI 1000 to 0 1120 to 3 4 02 KQ 11 3 KQ 14 7 KQ Table 1 E 802 55 component substitution chart for voltage ranges and over voltage recognition More precise adjustments are not possible here as the reference voltage is derived from the operating voltage which can vary by about 196 from the nominal value The same tolerance has to be taken into account regarding over voltage recognition 2 6 On Target Detection The on target signal is available on J2 pin 2 if SJ2 is closed see Solder Bridges below for details The on target signal is TTL active low and switches when the distance between the current position and the target is within 0 19 of the travel range The width of this tolerance band cannot be adjusted 2 7 Solder Bridges 15 SERVO 16 gt 2 a 841 Siz SERVO
5. E REN Rer UU EEUU DRE RCM WAR eee 10 Servo Loop Calibration 11 3 1 Equipment Needed for Calibration sessssse 11 3 2 PIA ATION ics iier decur TEATA duo ders edens ier en dads 12 3 3 Zero Point Adjustment cie cerent terreno dns 12 3 4 Static Gain Ad Ustiment uude o dri oie ice des 12 Dynamic Adjustment esses eee 13 4 1 Finding Resonant Frequency and Setting Notch Filter 13 4 2 Step Response Optimization ceeeeeeeeeeeeeeess 13 4 2 1 Standard TUNNO esse dni tenet aed rid brbud eR ei S ie E EE 13 4 2 2 Fine T PHTICI esit dedcuxe dep in taba dee nad cubes ic desidera cute cudos pia idd don 14 Copyright 2013 by Physik Instrumente PI GmbH amp Co KG Release 1 4 0 File E 802UserPZ150E140 in arbeit doc 657408 Bytes Release 1 4 0 www pi ws Page 1 E 802 55 Servo Control Submodule User Manual PZ 150E 0 Safety Precautions CAUTION E 802 submodule boards are ESD sensitive electrostatic discharge sensitive devices Observe all precautions against static charge buildup before handling these devices Avoid touching circuit components pins and PCB traces Discharge any static charge you may have on your body by briefly touching a conductive grounded object before you touch any electronic assembly Pose PCBs only on conductive surfaces such as ESD safe transport contai
6. Piezo Nano Positioning PI PZ 150E User Manual E 802 Servo Controller Submodule Release 1 4 0 Date 2013 11 08 This document describes the following Product s B E 802 55 Servo Controller Submodule Revision ADC or higher Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 1019 Moving the NanoWorld www pi ws info pi ws www pi ws E 802 55 Servo Control Submodule User Manual PZ 150E Table of Contents DAletly PRECAUTIONS as icicesasssavenescondnenveessnnencanecsavesenensawar 2 IntFOdU CHOR iius aaa aanraai aa aa A mma nexus osa pe 3 1 1 Functionally aora tact Lada odo ruat f avoit tid diea 3 1 2 Mod l SUMMA y sasteota asma EU beat esas ede eU zo pru bs Clas Dee anon tadi pado dr aaan 3 E 9802 55 Details iiiaae ainainen DE 4 2 1 E 802 55 Component Locations 1 22 o ooooto pietati paa to epar nente robes 4 2 2 E 802 55 Adjustment Controls seseeessss 4 2 9 E 802 55 BlocK DIA Gran eoi seed aea reete aa aaa aana iode 5 2 4 Notch Filter Settings ce cette reto tee ez re a Eze ERE epe ur E Fern aP AE ReEaR 6 2 4 1 POG UCI MTM 6 2 4 2 PANO PEE EU EE EUER 6 2 4 3 Dampling 6 eei eei nee euenit ice deese Sateen TT 6 2 5 Voltage Ranges and Over Voltage Recognition 7 2 6 On Target Detection eco era retener eraat endete 7 2 7 Solder s pis o ce ME 7 2 8 POSE eic 8 2 9 PUNO AG E
7. ble except as noted Connector J1 Pin SFP OONDOABRWN 0 Signal LED K LED A GND GND VC EC VC EC Actual value Actual value VEE VEE Connector J2 Pin 1 S gt OONDOAAW Signal CTRL_OUT ONT COMMAND OFL VCC VCC VEE VEE GND GND Meaning Overflow LED cathode normally 0 V overflow Overflow LED anode normally always 5 V OV OV Set servo OFF ON Set servo OFF ON Current position 0 10 V Current position 0 10 V 15V 15V Output to amplifier If solder bridge SJ2 is closed e g for E 621 E 625 E 665 On target difference between current and target position is within 0 19 of travel range TTL active low Target 0 10 V Overflow TTL active low 15V 15V 15V 15 V OV OV Release 1 4 0 www pi ws Page 10 E 802 55 Servo Control Submodule User Manual PZ 150E 3 Servo Loop Calibration Static servo loop calibration makes it possible to accurately drive the PZT system to absolute positions in closed loop mode with an external analog control signal ranging from 0 to 10 volts This signal can either be input directly or it can be generated by computer control electronics in the system e g E 816 Computer Interface and Command Interpreter Static servo calibration establishes the relationship between a sensor input of 10 V and the voltage necessary to drive the PZT to its nominal expansion Dynamic servo loop calibration optimizes step response
8. d in the table on page 6 4 2 Step Response Optimization 4 2 1 Standard Tuning For dynamic operation the step response of the mechanical system is important The amount of damping and overshoot can be optimized by tuning the differential and integral term of the servo controller Procedure 1 Mount the PZT exactly as it will be operated 2 Set Servo ON 3 Usea square wave function generator and supply the control input with a square wave of 5 Vpp if bipolar set DC offset to 2 5 V and a frequency of 5 to 10 Hz 4 Connect an oscilloscope to the monitor output 5 Adjust P2 until resonant frequency becomes apparant 6 Adjust P4 notch filter frequency until the oscillation amplitude becomes a minimum 7 Adjust P2 and P3 alternating to optimize step response Release 1 4 0 www pi ws Page 13 E 802 55 Servo Control Submodule User Manual PZ 150E The settling curve seen on the scope could look like one of the following Case 1 Large overshoot unstable Case 2 Optimal Case 3 Settling time too long Sensor Monitor Signal Fig 9 PZT response 4 2 2 Fine Tuning Target Sgnal MANU Fig 10 Step response The objective of the drift fine tuning is to obtain a curve similar to curve B of the diagram Because the curve is exaggerated a high resolution oscilloscope 12 14 bits is required as well as a precise voltage generator First adjust the step response without overshoot Using P5
9. e zero point a voltmeter is required Static displacement calibration requires an external expansion gauge with 0 1 um resolution and a precision voltmeter A special extension adapter may be required if your installation does not allow access to the potentiometers that need to be adjusted while the unit is in operation Dynamic calibration procedures require an oscilloscope a digital storage oscilloscope is recommended and a frequency generator to output square and sine functions from 1 Hz to 1 kHz Depending on the installation a 32 pin extension adapter board will also be necessary to allow access to the trim potentiometers while the board is in operation If the system is set up for computer control it may be possible to use the internal wave generator and the internal D to A and A to D converters instead of the equipment mentioned above Release 1 4 0 www pi ws Page 11 E 802 55 Servo Control Submodule User Manual PZ 150E 3 2 Preparations Mount the PZT actuator in exactly the same way and with the same load as during normal operations in the application 3 3 Zero Point Adjustment Correct zero point adjustment allows the PZT to be used within the full displacement range without reaching the output voltage limits of the amplifier A proper zero point calibration ensures that in closed loop operation the full output voltage swing of the amplifier can be used and prevents overflow conditions Procedure 1 Adjust the sen
10. h Filter Damping S2 Notch Filter Range Release 1 4 0 www pi ws Page 4 E 802 55 Servo Control Submodule User Manual PZ 150E 2 3 E 802 55 Block Diagram P1 Slew Servo P4 P5 Time X1 OFF S1 Target S2 PAN i o o pimer tenet oll 7 BELL epe Cb Ampifien Si Fat Lm ma ON Notch Drift see Filter Compens note P2 P3 Time Overflow Detection LZ Sensor P6 Value Lo Ts I Gain Fine Adjust On Target Detection Note The servo ON OFF switch is controlled by electrical signals from the board on which the submodule is installed Fig 3 E 802 55 Block diagram Release 1 4 0 www pi ws Page 5 E 802 55 Servo Control Submodule User Manual PZ 150E 2 4 Notch Filter Settings 2 4 1 Frequency The notch filter frequency can be set within the currently set frequency range with potentiometer P4 Fig 4 2 4 2 Range The frequency range is set with the mini DIP switches on block S2 as shown in the table below Range No Switch Positions Min Max 1 ON up Frequency Frequency 1 2 3 4 5 6 7 8 1 f f fe fe fp 2900 9400 2 15 11 11 1 1 1 940 3100 3 111 1 11 330 1100 4 151 1 1 270 900 5 i 1 1 140 470 6 1 41 1 1 130 430 7 1 1 1 1 100 330 8 111 1 1 1 1 94 31
11. n sensor signal to generate the power amplifier input control signal An analog proportional integral P I algorithm is used Slew rate limitation insures that the output signal slope does not exceed the following capability of the power amplifier The notch filter is used to damp out oscillation at the resonant frequency of the mechanics In summary e Slew rate limitation of output signals can be set within the range of 0 1 V ms up to 1000 V ms Note that these values are only valid for the slew rate limitation circuit The values for the complete system are lower due to limitations given by amplifier notchfilter etc e P I control performance with individual setting of P and l terms e Optional notch filter allows suppression of mechanical resonances The filter frequency and quality can be adjusted by trim potentiometers e Servo function can be enabled disabled via TTL signals low servo ON high servo OFF Excellent long term stability is accomplished by using exclusively low tolerance low drift components Residual errors in the range of 0 0596 can be compensated with additional trimming components The location of the E 802 on the electronics in which it is installed is indicated in the User Manual for that device e g the E 621 This manual describes those functions and procedures specific to the E 802 1 2 Model Summary Only the E 802 55 revision ADC or higher is in production but several earlier pin compatible
12. ners envelopes foam Electronic subassemblies must always be kept and transported shipped in conductive packaging Make sure that no conductive particles of any kind metallic dust or shavings broken pencil leads loose screws get on the card CAUTION Calibration of the controller the E 802 is a part of is done prior to delivery by the manufacturer Do not adjust potentiometers unnecessarily Only the zero point will have to be realigned from time to time to compensate for temperature changes Further adjustments are not required as long as system components are not replaced or modified Any calibration procedures are to be carried out by qualified authorized personnel only CAUTION Some adjustment elements on the main board of the controller and on E 802 submodules are covered with sealing lacquer Damage to the seal will void the warranty except in consultation with PI Release 1 4 0 www pi ws Page 2 E 802 55 Servo Control Submodule User Manual PZ 150E 1 Introduction The E 802 55 is a small add on printed circuit board PCB that processes the control signal for the power amplifier driving piezoelectric translators Slew rate limitation notch filter and servo control loop are all implemented on the E 802 55 H i vri M SETTE TN XUI b 3 r e 1 HALT TET cee BR ie x 5 F s Fig 1 E 802 55 servo control submodule 1 1 Functionality The servo loop logic compares the control voltage input and the positio
13. or output to exactly 10 000 V use the P6 GAIN Fine Adjust potentiometer on the E 802 55 servo submodule 8 To adjust the expansion without changing the sensor monitor output servo control is on use the gain adjustment potentiometer on the E 801 x sensor module Repeat the last steps several times until stable results are achieved In some cases e g with the E 651 controller amplifier for closed loop bender actuators the PZT operating voltage has to be 0 V if the control input voltage is 5 V With bender actuators a non contact measurement method must be applied Release 1 4 0 www pi ws Page 12 E 802 55 Servo Control Submodule User Manual PZ 150E Dynamic Adjustment A summary of the equipment needed for adjustment can be found in section 3 1 on page 11 4 1 Finding Resonant Frequency and Setting Notch Filter Identify the resonant frequency of the actuator while installed at the operation site For this purpose a square wave is applied to the control input with servo control set to OFF 10 Hz 1 Vpp use DC offset 0 5 V if bipolar Connect the sensor monitor output with one channel of the oscilloscope and watch the step response The resonant frequency of the system can be estimated by the induced oscillations If for example the period of the oscillation is 3 ms then the resonant frequency is 1 period length or 1 3 ms 0 33 kHz or 330 Hz Based on this frequency the dimensioning of the notch filter can be foun
14. sor zero point while servo mode is OFF as described in the manual for the controller desktop unit module or OEM board on which the E 802 55 is installed 2 Set servo mode to SERVO ON and make sure that the control input voltage is set to the value target position which is to correspond to 0 V PZT operating voltage Normally this control input voltage value is 0 V 3 Connect a voltmeter to the output socket for the PZT operating voltage Readjust the PZT operating voltage to 0 V using the ZERO potentiometer 3 4 Static Gain Adjustment The objective of the static servo loop adjustment is to ensure that the PZT actuator expands to its nominal expansion when the control signal input is 10 V Preparations An adjustable voltage source from 0 to 10 0000 V anda displacement gauge with 0 1 um resolution is needed Procedure 1 Make sure that any DC offset is set to zero or disabled see main board manual Set SERVO ON mode Check whether the PZT oscillates If it does you can t miss hearing it and dynamic gain adjustments have to be done prior to continuing with static gain adjustment 4 Apply 0 V to the CONTROL INPUT 5 Adjust the external position probe and set the expansion reading to zero 6 Command a position equal to the nominal expansion i e apply 10 V to the CONTROL INPUT The external gauge should show the PZT at nominal expansion and the sensor monitor output should be 10 V 7 To adjust the sensor monit
15. versions may still be in circulation See the User Manual PZ 113E for information on older versions Note that in contrast to earlier versions E 802 55s leave notch filter and slew rate functions turned on when servo control is turned off They also have a mini DIP switch for selection of notch filter frequency ranges so that component replacement is not necessary Release 1 4 0 www pi ws Page 3 E 802 55 Servo Control Submodule User Manual PZ 150E 2 E 802 55 Details The 802 55 is currently replacing the earlier versions With the E 802 55 the notch filter and slew rate limiter are also active even when the servo mode TTL input line is at the servo OF F level open loop operation Note In open loop mode the gain may vary by a value in the range of 3 to 6 depending on the setting of P5 drift compensation potentiometer see figure below By default P5 is preset to its mid position 2 1 E 802 55 Component Locations ge P5 P4 SI P6 P3 P2 PI XI E TL L TT pro Solder bridges SJ1 and SJ2 on back for On Target signal Fig 2 For pinouts see p 10 For element description see P1 to P6 S1 S2 X1 see below R9 to R11 on p 7 TP1 TP2 and TP4 on p 8 SJ1 and SJ2 p 7 2 2 E 802 55 Adjustment Controls P1 Slew Rate Limitation P2 Loop Gain P Term P3 Integration Time Constant I Term P4 Notch Frequency P5 Drift Compensation PG Sensor Gain Fine Adjust X1 Slew Rate Range S1 Notc
Download Pdf Manuals
Related Search