Phoenix™ Manual Gen.2
Contents
1. 1 BNC Coaxial Cable to Position Phoenix Spin cable in place using cable EN o shaft until resistance is felt C Sen Twisting cable shaft past point of 2 VQ PS N resistance may damage cable Roll gt II fingertip over connector to tighten Chapter 4 Hardware amp Connections 17 2 Connect Phoenix to Eon LT TM Connect BNC extension cable to SMA which then connects to the BNC adapter cable using the provided BNC union Then connect the other end of the BNC extension cable to the Eon LT IM did coaxial input either sensor 1 or 2 3 Connect Phoenix TC Connector to TC Extension Cable Connect Phoenix TC cable to TC extension cable Wide blade fits into wide slot on female thermocouple socket Narrow blade fits into narrow socket 4 Male TC Adapter to Eon LT TC Female Socket Plug thermocouple extension AK ai ipo cable connector into the Eon LT IM let TC socket with the wide blade corresponding to the upper slot and narrow blade fitting into lower slot WARNING Length between the Phoenix crystal compartment and the Eon LT should NOT exceed 30 inches 76 cm to avoid erratic noise levels in oscillation reading Chapter 4 Hardware amp Connections 18 Electronics Connections Connecting Phoenix to Eon LT 1 BNC Coaxial Cable to Eon LT Slide coaxial connector onto BNC Sensor Input 2 2 Poi K T In2. 11 240mm 0 44in Parallel Orientation 1 Perpendicular 2 Parallel Appendix D Tooling Factor 30 Index B BNC Coaxial Cable 17 19 31 Chamber Installation 16 31 Compressed Air 31 ConFlat 23 31 Connections 13 14 15 16 17 18 19 20 21 31 Connector 5 12 18 31 Connect Power 21 Contact Colnatec 28 31 Controls 5 Cooling Lines 31 Copper gasket 16 17 31 Copper Gasket 31 Crystal 5 13 14 15 22 23 24 27 31 32 Crystal Frequency 23 31 D DB 15 Connector 31 Dimensions 23 30 31 E Eon LT 4 5 6 7 8 9 10 11 12 13 18 19 20 21 22 23 25 26 27 28 29 31 Eon Software 20 21 31 F Flange 17 19 20 23 31 G Getting Started 31 H Hardware 13 14 15 16 17 18 23 31 Index 31 Initial Setup 27 31 Inputs amp Outputs 10 11 12 31 M Mock Crystal 13 P PC 8 10 20 32 Phoenix 4 5 6 10 13 17 18 19 22 27 30 Power supply 8 R Retainer ring 13 15 RS 232 cable 8 20 S Subcomponents 5 32 Support 22 26 27 28 32 System Configuration 25 32 T Tooling Factor 29 30 32 Troubleshooting 22 32 U USB Adapter 20 32 W Warranty Label 26 32 Index 32 Copyright 2014 Colnatec All information contained within this technical manual and accompanying pages are copyright of Colnatec All rights reserved Itis a breach of copyright if this technical manual is copied distributed or reproduced in who
3. Male to female serial cable gt ZN eA Pe Eq aa E E USB to RS 232 adapter Connects RS 232 cable and PC Chapter 2 Eon LTTM System Components External oscillator Replaces the Eon LT internal oscillator Phoenix Eon LT quick reference guide Instructs user in quickly assembling and integrating Eon LT into existing system CEDE ES PHOZENI lt QUICK REFERENCE GUIDE e game _A Sensor Head inspection HE lt cias Vr Ramah Pall man re pan Sens s le En AP SES er em T ak oe mess 4 da Base Ex Deer N i 3 Er o ts und nr t Den X nm ct cusneet oyan m er nn 3 Pa Pa Nate nn nun ns p t eme nn IX rn svane ee wow on ome ICTU O9 m Software CD Contains Eon software suite manuals quick reference guides and other helpful resources CACOLNATES Chapter 2 Eon LTTM System Components Eon LT Inputs amp Outputs This guide describes Eon LT controller with temperature control 3rd generation Eon LT Connectors Eon LT Front Heater and RTD Input Output Controls Phoenix sensor head Type K The
4. PHOENIX temperature monitoring OCM user guide 2nd generation CACOLNA 10 10 12 12 13 13 16 17 19 19 20 22 22 23 23 24 Contents Chapter 1 Phoenix Sensor at a Glance Phoenix Subcomponents Phoenix Base Subcomponents Chapter 2 Eon LT System Components Eon LT IM and Accessories Chapter 3 Eon LT Inputs amp Outputs Eon LTTM Connectors Eon LT Inputs Eon LTTM Outputs Chapter 4 Hardware Connections Preparing Phoenix for Chamber Chamber Installation Connecting to Phoenix Chapter 5 Electronics Connections Connecting Phoenix and Eon LT Connecting Eon LT to PC Chapter 6 Troubleshooting Troubleshooting Chapter 7 Specifications Hardware Electronics Contents 25 25 26 27 27 27 29 30 31 Contents Contents Appendix A Phoenix Eon LT System Phoenix Eon LT TM System Configuration Appendix B Safety Handling amp Support About Phoenix Inspection amp Initial Setup Warranty Appendix C Tooling Factor Appendix D Phoenix Dimensions Index Phoenix at a Glance This guide discusses assembly and proper care and handling of Phoenix 2nd generation sensor with temperature control D INSPECT PRODUCT CONDITION ON ARRIVAL Examine Phoenix for any signs of physical damage that may have occured during shipping Make sure that the tamper evident labels are intact Before shipping Phoenix was calibrated and te
5. e Eon LT TM software CD FOCOLNATEC WARNING If drivers are already installed simply update the drivers when installing software Use only the provided USB cable Ensure that the software has been fully installed before connecting the USB drivers Fully reboot the computer after the software installation to prevent drivers issues Chapter 5 Electronics Connections 21 Troubleshooting Broken Crystals Crystal not seated properly Make sure that the crystal is seated properly in the cap and retainer to avoid mechanical stress on the crystal when temperature rise Weak Crystal Reading Contact spring may have become bent If the crystal contact spring has become bent it may no longer apply even pressure against the crystal Assuring the conical spring is concentric with the body may resolve this issue Software Issues Various possible causes See Eon LT TM Controller manual for software troubleshooting guide Because it is a scientific instrument the Phoenix sensor head should be treated with care In the event of any difficulties please contact Colnatec s Customer Support Excessive tinkering or fiddling may result in greater damage to the unit If you cannot resolve an issue please contact support colnatec com or call 480 634 1449 WARNING Do not attempt to repair electrical problems Tampering with the Phoenix electrical systems may result in electrical fire increased i
6. e Eon LT TM film thickness monitor or controller both temperature and frequency are automatically graphed alongside the corresponding rate and thickness values on a personal computer allowing for real time correction and accuracy up to 001 Hz Inspection and Initial Setup Examine Phoenix for any signs of physical damage Also make sure that the tamper evident labels are intact In order to ensure safe correct operation of your Phoenix please follow the step by step instructions presented in the Phoenix Quick Start guide included with your product Warranty Phoenix is warranted to the original purchaser to be free of any manufacturing related defects for one year from the date of purchase Colnatec reserves the right to repair or replace the unit after inspection Appendix 8 Safety Handling amp Support 27 Contact Colnatec Support 511 W Guadalupe Road Suite 23 Gilbert AZ 85233 480 634 1449 support colnatec com www colnatec com Appendix B Safety Handling amp Support 28 Tooling Factor Appendix Tooling de 100 ds 2 re ds COS Source Appendix C Tooling Factor 29 Appendix E TM EH Phoenix Dimensions 29 845mm 1 18in 12 319mm 0 49in 31 623mm 1 25in Flange li CRM 2 CF338 3 KF40 Flange to Crystal 4 Distance FCD 6 24 Tube Diameter 1 3 16 1 11 240mm W CT 0 44in Sd Ec nr CO as Go
7. for any injury resulting from product misuse modification or disassembly WARRANTY LABEL f the warranty label has been tampered with VOID will appear where the warranty label was originally placed If this is visible at the time of arrival it is important that you contact Colnatec immediately after receiving the product Appendix B Safety Handling amp Support 26 EXAMINE YOUR NEW PHOENIX FOR ANY SIGNS OF PHYSICAL DAMAGE Before shipping your Phoenix was calibrated and tested by Colnatec to meet the highest quality standards Itis important that you take a few minutes to inspect the product to ensure that your equipment was not damaged or otherwise tampered with during transit About Phoenix Temperature fluctuation is the most significant cause of frequency drift in crystals Traditional sensor heads address this with water cooling While many manufacturers advise that crystal temperature be kept around 20 C their sensors have no means of measuring temperature Real world application has shown that a standard water cooled sensor can experience a 20 C discrepancy within as little as 10 minutes during high rate deposition In an industry of nanometer measurements this level of variance will easily result in significant inaccuracy within thickness reading The Phoenix was designed to address this flaw by employing an embedded thermocouple that may be read with a simple thermocouple meter When integrated with th
8. hould remain as short as possible to avoid noise The advisable maximum acceptable length for this is one 1 foot or 30 cm TC Connection Eon LT uses a thermocouple probe to measure the temperature of the sensor head Eon LT Outputs The Eon LT utilizes one 1 output Make sure the correct hardware is used with this output DB9 Connector Connects the two SPST relays and two source outputs Chapter3 Eon LT Inputs amp Outputs 12 Hardware Connections Preparing Phoenix for Chamber Removing Mock Crystal 1 Tum cap COUNTER CLOCKWISE to loosen and remove a 2 Flip cap over to access crystal retainer ring Turn retainer ring COUNTER CLOCKWISE until loose 3 Remove retainer ring to access mock crystal Chapter 4 Hardware amp Connections 13 4 Remove mock crystal from sensor head cap NET x LT ee WEZ Adding New Crystal 1 Rotate crystal carousel until the round opening appears above an LATS available crystal he PAIN 2 Place rear of sensor head against the opening LR D SONNE t er LOLLY 3 Flip crystal carousel and allow I crystal to drop into sensor cap KIT housing Se Chapter 4 Hardware amp Connections 14 4 Use a plastic prod to adjust crystal position until crystal rests snugly in the crystal seat 5 Place the threaded side of the retainer ring onto the corresponding threads of the sensorcap Tighten the retainter ring by tu
9. le or part using any means whatsoever without the prior written approval of Colnatec Colnatec gives no condition or warranty expressed or implied about the fitness of this technical manual or accompanying hardware product Colnatec reserves the right to make changes to this technical manual or accompanying hardware or design without notice to any person or company Colnatec shall not be liable for any indirect special consequential or incidental damages resulting from the use of this technical manual or the accompanying hardware or design whether caused through Colnatec s negligence or otherwise Copyright Info September 2014 2nd generation 33
10. m thickness monitoring TUE EN N fy D Co N O n m WS SENSOR TC2 ICI YO 2 em M7 ar While Eon LT Monitor is compatible with industry standard crystal sensors it was also specifically created to be paired with Colnatec s Phoenix in combination with AT or RC 6 MHz crystals to accomplish a degree of precision never before imagined in the world of thin film Chapter 2 Eon LTTM System Components 6 INSPECT PRODUCT CONDITION ON ARRIVAL Examine Eon LT for O any signs of physical damage that may have occured during shipping Make sure that the tamper evident labels are intact Before shipping Eon LT was calibrated and tested by Colnatec to meet the highest quality standards It is important that you take a few minutes to inspect the product to ensure that your equipment was not damaged or otherwise tampered with during transit WARRANTY LABEL If the warranty label has been tampered with aD VOID will appear where the warranty label was originally placed If this is visible at the time of arrival it is important that you contact Colnatec immediately after receiving the product Chapter 2 Eon LT System Components Power supply and cable Input 100 200 VAC 50 60Hz 2 A Output 24V 3 75 A 90W Max DU AU PUN F M j L 7 x y he Vs P xm RS 232 extension cable
11. nterference in crystal measurement and damaged ceramic insulators Chapter 6 Troubleshooting Specifications Chapter 7 Specifications Hardware KF40 KF 50 CF275 180 Concentric designed to specification 3 16 Diameter Sensor Body 304 SS nickel alloy contact springs 304 SS screws Type K Thermocouple 304 SS Sheath 125 Crystal Cable Stainless steel covered high temp wire nickel plated copper wire conductor Crystal Cable Stainless steel covered high temp wire nickel plated copper wire conductor Length 4 to 24 depending on customer requirements Cross Section Able to be passed through a 2 75 ConFlat port 40 500 C 1x10 5 Torr AIS304 SS CNT TMP 2000 Rev 3 1 B 23 Chapter 7 Specifications Electronics 0 500 C Standard 14 mm SMA Coaxial 24 Phoenix Eon LT System Phoenix Eon LT System Configuration Rendering illustrates basic connections of Phoenix IEon LT system Eon software installed on your PC QCM Appendix Phoenix IEon LT System Eon LT Monitor o TC cable 9 R substrate 71 source shutter emote oscillator Appendix 25 Safety Handling amp Support Appendix WARNING All electrical components are to be considered extremely dangerous if tampered with in any way Colnatec is not liable
12. order to avoid erratic noise levels in oscillation reading length between the Phoenix crystal compartment and the Eon LT SHOULD NOT exceed 30 inches 76 2 cm D WARNING The cable between Eon LT and the crystal should remain as short as possible to avoid noise If using the internal oscillator alone the advisable maximum acceptable length for the cable is one 1 foot 30 cm WARNING DO NOT allow operating temperature to exceed 500 C A Equipment damage will likely result Chapter 5 Electronics Connections 19 Connecting Eon LT to PC 1 Install Eon LT Software onto PC Insert the accompanying Eon LT M software CD into disc drive Follow prompts to install software onto PC 2 RS 232 to Eon LT TM Plug RS 232 connector into female serial port on rear panel Tighten integrated screws 3 RS 232 cable to USB Adapter Plug the other end of the RS 232 pr i cable into the USB to RS 232 a ARE adapter Tighten integrated C Screws 4 Plug USB to RS 232 Adapter CESSE EIER Plug USB end of the USB to NE NEN RS 232 adapter into PC Chapter 5 Electronics Connections 5 Connect Power to Eon LT TM Plug Eon LT power adapter into AC outlet Then plug DC connector into the Eon LT 6 Start Eon LT Software Start Eon LT software and Loading follow the First Start setup EON Software procedure described in the Eon LT User Manual 3 available on th
13. rmocouple inputs nn nsor Inputs Connects to senso via external Measures temperature head via externa using thermocouples oscillator 0 5 VDC amp Relay Output Connects the 0 5 VDC output for the deposition source the 24 VDC Mirage and the relay control Eon LT Back Power Input RS 232 Connects to Connects Eon LT to 24 VDC PC Always use the power input provided USB to RS232 cable LED Indicator Displays status Chapter 3 Eon LT Inputs amp Outputs 10 A WARNING Make sure the correct hardware is used with Eon LT inputs and outputs See proper setup procedures in this manual and in the Phoenix Eon LT quick reference guide WARNING Only the provided power supply should be used with Eon LT Using an alternative power supply may damage product and void warranty Chapter 3 Eon LT Inputs amp Outputs 11 Eon LT Inputs The Eon LT utilizes four 4 inputs Make sure the correct hardware is used with these inputs Power Only the provided power supply should be used with Eon LT TM Not doing so will cause hardware damage to Eon LT that will not be covered by warranty Ensure that the power supply has a 24 VDC ComPort Connect an RS232 cable to this port Always use the provided USB to RS232 cable BNC Sensor Inputs Eon LT has a built in oscillator Colnatec also offers an external oscillator for purchase The cable between Eon LT M and the crystal s
14. rning the ring CLOCKWISE 6 Place cap onto corresponding threads of crystal compartment Tum CLOCKWISE until secure Chapter 4 Hardware amp Connections Chamber Installation 1 Remove copper gasket from packaging and thread onto sensor head 2 Fit gasket into circular groove on AN Conflat 3 Hold copper gasket in place while inserting sensor head into chamber feedthrough SEAN wr i ET Eid a E A n i t 4 Press sensor head and feedthrough SI flanges together Align bolt holes Ne Apply bolts and plate nuts Tightening bolts compresses copper gasket between a sharp edge and a tapered groove thus gt im creating a strong seal gt ITS Chapter 4 Hardware amp Connections 16 5 Apply bolts and plate nuts Tightening bolts compresses copper gasket between a sharp edge and a tapered groove thus creating a near perfect seal 6 Access to Base Connections Once the bolt ring has been tightened into place user will have open access to all of the base connections on the Phoenix See Page 5 for a complete list of all base connections and their purpose WARNING Hand tighten flange bolts before using wrench N alternating among bolts and using a sequential torque pattern Over tightening flange bolts may cause microfractures to develop in copper gasket Seal may become weakened resulting in chamber leakage Connecting to Phoenix
15. sted by Colnatec to meet the highest quality standards It is important that you take a few minutes to inspect the product to ensure that your equipment was not damaged or otherwise tampered with during transit Chapter 1 Phoenix at a Glance 4 Phoenix Subcomponents The sensor head features many sub components The usage of these components will be detailed in later sections 1 Sensor Head 3 Flange 4 Thermocouple Houses quartz crystal Acts as nearly air Connector tight barrier sealing Measures sensor head in temperature around 2 Crystal Control Cables chamber sensor head Transmits control and monitoring data between 5 Cooling Tubes sensor head and controller For cooling sensor head Phoenix Base Subcomponents The sensor head features many base sub components The usage of these components will be detailed in later sections 1 SMA Coaxial Connection For crystal frequency measurement 2 Cooling Tubes For cooling the sensor head 3 Thermocouple Measures temperature around sensor head Chapter 1 Phoenix at a Glance Eon LT System Components 2 Eon LT and Accessories Phoenix Eon LT TM ships with a variety of accessories Eon LT A temperature measuring film thickness monitor that surpasses conventional monitors that are blind to thermal changes of the crystal The combination of frequency and temperature measurement allows unprecedented accuracy in real time rate and fil
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