MicrovisionIP User Manual
Contents
1. Item Description Dimensions in mm Part Number 1 Ceramic Washer 1 0L 400010202 2 Screw M1 6x8 200901608 Plain Washer for above screw 270316000 3 Ceramic Tube 5 1L 400020051 4 Repeller Plate Assembly LM504 063PL 5 Source Plate Assembly LM504 066PL 6 Ceramic Washer 0 5L 400010207 7 Ceramic Restrictor 400010206 8 Extract Plate Assembly LM504 064PL 9 Mounting Ring 305040233 41 MicrovisionlP SP101006 104 7 July 2009 MKS Instruments Spectra Products 8 6 Source Alignment J ig common Note the orientation of the source assembly when inserted into the jig Align the extract plate s barrel connector with the alignment indicator on the jig Remove the source by pushing it out from the bottom of the jig do not pull out the source Item Description Dimensions in mm Part Number 1 Source Alignment J ig 842 029 42 MicrovisionI P SP101006 104 7 July 2009 MKS Instruments Spectra Products 9 Communications Troubleshooting a a The following flowchart should help you through any connection problems you may encounter Note that this assumes you are connecting directly from the host PC to the instrument If the instrument is to become part of a network then assistance should also be sought from your IT staff No communication Check mains NO gt supply and fuse Replace patch heck network link status NCP nea Pag2. 0 250 Help Subnet mask 255 255 255 0 Note The IP address of this compufer is 10 10 54 43 Browse to the instrument when this dialog closes Cancel In this example the host PC will not be able to communicate with the instrument while the two IP addresses are in different ranges There are two options Change the IP address of the host PC or change the IP address of the instrument To change the IP address of the instrument overtype the current address with the new one Note If the host PC is part of your network then changing its IP address is not recommended without seeking advice from your IT staff Likewise assigning a new IP address to the instrument must be done under advice or network conflicts could occur MicrovisionI P SP101006 104 7 July 2009 MKS Instruments Spectra Products PC and I nstrument on the same IP ranges You can see in the dialog below that the IP address of the instrument and the IP address of the host computer are in the same IP range IP Configuration for LM92 00101005 New Control Unit Settings C Assign an IP address automatically using DHCP Use the following fixed settings IPaddreBs 192 168 0 250 Help Subnet mask 255 255 255 0 Note The IP address of this compuler 192 168 0 10 l Browse to the instrument when this dialog closes Cancel In the above case communication between the host PC and the instrument is possible though Device
3. SEM MUST NOT be operated at temperatures above 50 C With dual faraday and electron multiplier detector instruments serious damage will occur to the electron multiplier if operated at temperatures above 50 C In this case only the Faraday detector should be used NOT the multiplier The multiplier will not be damaged by high temperatures providing it is not switched on 24 MicrovisionI P SP101006 104 7 July 2009 MKS Instruments Spectra Products 25 7 Analyser Maintenance PVD and Open Source 7 1 Overview The quadrupole analyser is the front end of your mass spectrometer it produces electrical signals which when presented to your electronics display the contents of your vacuum chamber in a meaningful fashion The analyser can be broken down into four separate areas by virtue of their function 1 The ion source or ioniser This is located at the top furthest from the flange of your analyser and its function is to take a representative sample of molecules and atoms from your vacuum chamber convert them into ions and present them to the quadrupole filter 2 The quadrupole filter This is the centre section of your analyser Its function is to take the ion beam generated in the source and separate the various ions by their mass to charge ratio m e and present the single selected m e to the collector 3 The detector This area of your quadrupole analyser is hidden inside the flanged housing Its functio
4. The Digital I O connector is a 25 way D Type socket It is used to connect accessories such as a Remote Vacuum Controller The Digital I O connector can also be used to provide alarm output signals and process trip signals The Digital I O port provides Two 8 bit bi directional ports One interrupt strobe input 5V fused at 100mA 15V fused at 100mA Pin Description Notes H1 interrupt strobe 10 OV Digital ES 11 OV Analogue gt gt 12 15V fused OOOO 13 i5Vfused 14 Pao i G y TEA 16 Pa o e II 18 19 21 22 5Vfused i gt 23 Not Connected 24 NotComected 25 NotConnected SS Note The total power consumption on each rail 5V and 15V for both the Analog and Digital I O ports must not exceed 100mA 16 MicrovisionI P SP101006 104 7 July 2009 MKS Instruments Spectra Products 17 3 11 Power Connector This 15 way D Type socket is used to connect the low voltage power supply unit The pin connections are as follows 1 2 3 joined together 24 volts DC 9 10 11 joined together 0 volts 24 volt return Connector Shell functional earth The power input is 24 volts DC 10 2 Amps max The current drawn depends on the mass range and whether a filament is on or off The primary power circuit is galvanically isolated from the system ground The maximum common mode voltage is 60V DC or Peak AC current limited to 2mA 3 12 Audio Socket T
5. b The control unit and signal ports are designed for connection to MKS Spectra accessories via MKS Spectra supplied cables There are no accessible hazardous voltages or currents on these ports MKS Spectra must be consulted before any non MKS Spectra supplied cables or accessories are connected to these ports 1 7 Ventilation Openings in the front top and bottom panels must not be obstructed Allow a minimum clearance of 50mm all round Do not exceed the maximum operating ambient temperature Microvision P SP101006 104 7 July 2009 MKS Instruments Spectra Products 2 Introduction The Microvision p is a complete quadrupole residual gas analyser RGA comprising of a quadrupole analyser a Microvision P control unit a low voltage power supply and the necessary interconnecting cables incorporating all of the electronics normally found in a separate control unit and RF power supply into one compact unit which fits directly onto the quadrupole analyser The Microvision P is designed to be operated in several ways From a host computer which will normally be an IBM compatible PC running the MKS Spectra EasyView or Process Eye Professional software package By browsing to the MicrovisionlP using a J ava enabled web browser By integrating the Microvision P control into current systems through the use of the ASCII protocol command set A complete RGA system comprises of a Microvision P connected to a single computer or
6. not user replaceable Insulation Class to 1EC536 1 3 Environmental Temperature range 0 to 40 C 80 RH non condensing operating and storage Pollution degree 2 to EN61010 Enclosure IP20 to EN60529 Microvision P SP101006 104 7 July 2009 MKS Instruments Spectra Products 1 4 Safety 1P20 to EN60529 The protective earth conductor of the power cord must be connected to the power source protective earth terminal There are no operator replaceable parts within the 24VDC power supply unit or the Microvision P unit 1 5 Connectors The connectors for external circuits are for use only with MKS Spectra equipment or equipment which has no accessible hazardous live parts The external circuits must comply with the requirements of EN61010 1 section 6 6 1 Ports for connection of accessories do not carry hazardous potentials Do not position the 24VDC power supply so that it is difficult to unplug the supply power cord Installation Category comprises mains powered local level appliances 1 6 Warning labels On the front panel refers to a Accessible hazardous voltages on analyser connector when not mated to the analyser which may result in a non hazardous electric stock if touched b Tuning adjustment holes which are not for operator use 10 MicrovisionI P SP101006 104 7 July 2009 MKS Instruments Spectra Products 11 On the rear panel refers to a Read all instructions carefully before use
7. down the analyser into the flange assembly as this will seriously damage the multiplier Check the condition of the ion source A second or third wash may be required Note The ultra sonic bath may loosen some of the screws in the ion source take care not to throw these away when discarding the alcohol Microvision P SP101006 104 7 July 2009 MKS Instruments Spectra Products The analyser must be dried of cleaning solution before it can be used We recommend the use of a clean oven for this purpose The oven should be set at 80 deg C and the analyser baked for at least two hours Note Check the documentation on your cleaning solution for guidelines on handling the substance and any fire or explosion risks involved After the bake period check all the screws in the ion source are tight and re fit the analyser to the vacuum chamber A further bake under vacuum will be required to drive off any remaining residue 7 6 Cleaning or replacing the ion source The analyser design permits the removal of the ion source as one complete assembly which can be replaced or dismantled for cleaning The ion source automatically aligns on the main analyser assembly allowing easy replacement without the need for special jigs Below is a list of the tools and equipment you will require We recommend that you assemble the following items before you start Remember that the instrument is supplied with a tool kit that contained some of the thin
8. locking ring on the stainless steel analyser connector so that the slot lines up with the keyway on the connector tube Hold the MicrovisionIP unit so that the keyway lines up with the locating key on the analyser flange Gently slide the Microvision P unit on to the analyser Take great care the pins on the vacuum feedthrough are easily damaged DO NOT force the Microvision P unit on to the analyser When all of the pins are engaged push the MicrovisionIP firmly onto the analyser to ensure electrical continuity The last 3mm 1 8 is important When correctly fitted the front face of the stainless steel RF analyser connector should butt up against the analyser flange Finally rotate the locking ring to lock the MicrovisionIP in place You will not be able to do this if the MicrovisionIP is not pushed fully onto the analyser 5 2 Electrical connections Insert the 15 way D Type socket on the output lead of the power supply unit into the 15 way D Type connector labeled POWER on the rear panel of the MicrovisionIP Attach the line cord to the power supply The power supply will automatically set itself to operate with the local line voltage When power is applied the LED on the rear of the MicrovisionIP will illuminate In the case of an Ethernet connection connect a cat5 patch lead to the socket marked ETHERNET If a direct connection to the host PC is required use a crossover cable If connecting via a network hub a
9. network using the Ethernet RJ 45 connector A complete RGA system comprises of a Microvision P connected to a single computer via RS232 serial communications This manual focuses on MicrovisionI P hardware and should be used in conjunction with the relevant user interface manual during installation Any comms cards should be installed and configured prior to installing the MicrovisionIP or RGA software 12 Microvision P SP101006 104 7 July 2009 MKS Instruments Spectra Products 13 3 Connections 3 1 The rear panel The layout of the rear panel connectors and indicators is as shown in the diagram A detailed description of each component is given in the following pages FIL 10 FIL 20 SEMO UN POWER COMMS O O STATUS O PR ANALOG 1 0 98990006 DIGITAL 1 0 8 CTE POWER N CE ao O 24V DC 2A AE MicrovisionI P SP101006 104 7 July 2009 MKS Instruments Spectra Products 3 2 Filament I ndicator An indicator Fill or Fil2 is lit to show the currently active filament 3 3 SEM Indicator The indicator is lit when the SEM detector is active 3 4 Power I ndicator The indicator is lit when power is supplied to the Microvision P unit 3 5 Comms Indicator This indicator will flash to show a comms event to the Microvision P unit If there are no active communications
10. of the Analyser Open ion source shown 36 8 3 Filament Plate Open ion source erneer 37 8 4 Source Assembly Open iON SOUMCE eccerre 38 8 5 Extract Plate Open iON SOULCE oooooccccnnncccnnnnonononononononononos 39 8 6 Filament Plate PVD ioN SOUICe ooocccocccncccnccnnccnnncnnconanonnns 40 8 6 Source Assembly PVD ion source occccococccccnnoccncnnnonononononos 41 8 6 Source Alignment Jig COMMON 0oooccccnncccccnnnnconnnnnnnoninnnonos 42 9 Communications Troubleshooting vrs 43 10 Returning Your Unit for Service oommmmncoconooncecconanncorensancorosnnos 50 Microvision P SP101006 104 7 July 2009 MKS Instruments Spectra Products Support Contact NUMDESS ccccccsssesceceeseeeeeeaseeeeseseeseesessaeees 50 10 FTP MO cooocccconononoronnanoronarornanoranarorarornanaranaroraanarararorzanarazanos OD 8 Microvision P SP101006 104 7 July 2009 MKS Instruments Spectra Products 1 Specification 1 1 Mechanical Microvision P Size 127mm wide x 127mm deep x 235mm deep plus 34mm over analyser connector Weight 1 8 kg 24VDC Power Supply Size 75mm wide x 45mm high x 170mm deep plus 30mm over strain relief Weight 0 6 kg Analyser 4 inch single mass filter 1 100amu 1 200amu Faraday and SEM detector Max Operating pressure 7 6x10 1x10 mbar 1 2 Electrical Power Inlet 100 to 120 200 to 240 VAC rms 47 63Hz 2 1A rms Installation category over voltage category II to 1EC664 Fuses Internal
11. the analyser into the vacuum chamber ensuring that you do not allow the leads to touch the walls of the vacuum chamber Make sure the gasket does not slip part way out of its slot as you push the two flanges together Rotate the flange until the locating key on the feedthrough housing tube is as close to 11 o clock as the bolt holes will allow This will ensure that the MicrovisionIP is in its preferred position although it can be mounted in any orientation Bolt the feedthrough flange to the vacuum chamber flange using the torque appropriate for the gasket material used Do not discard the plastic shipping envelope or the two piece foam packing surrounding it If in the future you need to return the analyser for service it should be retumed in its original packaging to avoid expensive damage Microvision P SP101006 104 7 July 2009 MKS Instruments Spectra Products 5 Microvision P Installation Unless prevented by other considerations it is desirable to position the MicrovisionIP Control Electronics package horizontally with the lettering on the side panels right side up This facilitates cooling of the electronics as well as being cosmetically optimized and affords the best thermal stability during operation However it is permissible to operate the unit in any orientation and the user should consider easy access to the vacuum chamber as more important in the mounting of the Microvision P 5 1 Installation Rotate the
12. the front of the control unit and check that none of the gold sockets are pushed out of place 7 4 Changing filaments The analyser is fitted with dual filaments mounted on a single plate Changing filaments is the most common maintenance event with quadrupole analysers For this reason the MKS Spectra analyser has been designed to make this task as quick and easy as possible Below is a list of the tools and equipment you will require We recommend that you assemble the following items before you start Remember that the instrument is supplied with a tool kit that contained some of the things you will need small jewelers screwdriver 2mm pair of tweezers small pair of smooth jawed needle nosed pliers pair of clean cotton gloves clean bench on which to work Ohmmeter clean container in which to put small parts replacement filament a method of holding the analyser securely in an upright position a small bench vice is ideal pen and paper on which to make notes and sketches Refer to the exploded views of the Filament Plate shown on Page 37 open or 40 PVD 7 4 1 Removing the filaments 1 Remove the analyser from the vacuum system making sure that you do not touch the exposed internal surfaces and place it on the bench in an upright position 2 The filaments are located on the very top of the analyser and are retained by two M2 x 4 pan head screws Item 3 The electrical connections are made via three barrel connector
13. with the Microvision P this indicator will pulse at approximately 2Hz depending on the RGA software version used 3 6 Ethernet Connector This is an RJ 45 style connector used to connect the MicrovisionIP to the host computer Use standard Cat5 patch cables as follows If connecting directly to a PC use a crossover or cross wired Cat5 Patch cable If connecting to a network use a standard Cat5 Patch cable 3 7 Status I ndicator Indicates the current state of the instrument The indicator is lit while the unit is booting or when in FTP mode otherwise it is off 3 8 Preset Button This is used to enter the FTP mode when downloading new software to the instrument See Section 10 for details 14 MicrovisionI P SP101006 104 7 July 2009 MKS Instruments Spectra Products 15 3 9 Analog I O Connector The Analog I O connector is a 15 way D Type socket It consists of One analog output 0 to 10V Four quasi differential analog inputs 0 to 10V with a maximum voltage on the return of 0 5V 15V power outputs both fused at 100mA fuses are self resetting Analog Connector pin assignment Pin Function 4 Analog input 2 return 8 analog 9 i5Vfused o A PS Note The total power consumption on each rail 5V and 15V for both the Analog and Digital I O ports must not exceed 100mA Microvision P SP101006 104 7 July 2009 MKS Instruments Spectra Products 3 10 Digital I O Connector
14. 09 MKS Instruments Spectra Products 45 Check the I P Address of the Host Computer Open Windows Control Panel and select the NETWORK CONNECTIONS icon Choose the network connection you are using for the link with the instrument right click and choose PROPERTIES Highlight the INTERNET PROTOCOL TCP IP entry from the list and click on the PROPERTIES button The following displays a computer configured for automatic IP addressing DHCP If you are not part of a DNCP network or intend to directly connect to the instrument you will need to assign a static IP address Internet Protocol TCP IP Properties General Altemate Configuration You can get IP settings assigned automatically if your network supports this capability Otherwise you need to ask your network administrator for the appropriate IP settings Obtain an IP address automatically Use the following IP address Obtain DNS server address automatically Use the following DNS server addresses Microvision P SP101006 104 7 July 2009 MKS Instruments Spectra Products Assign a Static I P Address Open Windows Control Panel and select the NETWORK CONNECTIONS icon Choose the network connection you are using for the link with the instrument right click and choose PROPERTIES Highlight the INTERNET PROTOCOL TCP IP entry from the list and click on the PROPERTIES button The default IP address of the instrument is 192
15. 168 0 250 the host PC address needs to be in the same range but not the same number As you can see below this host s IP address ends in 10 but could have been any number up to 255 excluding 250 Use the Subnet shown Internet Protocol TCP IP Properties C O General You can get IP settings assigned automatically if your network supports this capability Otherwise you need to ask your network administrator for the appropriate IP settings Obtain an IP address automatically Use the following IP address IP address 192 168 o 10 Subnet mask 255 255 255 0 Default gateway Jbtain DNS server address automatica Use the following DNS server addresses Preferred DNS server Alternate DNS server 46 MicrovisionI P SP101006 104 7 July 2009 MKS Instruments Spectra Products 47 PC and I nstrument on different I P ranges You can use Process Eye s Device Manager to check on the current IP address status of both the host PC and the instrument Start DEVICE MANGER highlight the instrument click the CONFIGURE button and choose CHANGE THE IP ADDRESS from the list You can see in the dialog below that the IP address of the instrument differs from the IP address of the host computer IP Configuration for LM92 00101005 New Control Unit Settings C Assign an IP address automatically using DHCP Use the following fixed settings IP addres 192 168
16. Externa licita 18 4 Analyser Installation oommmoccccocancccconannccccncan coronan rca nr eran rcnnos 19 4 1 Unpacking ruin een 19 4 2 Inspecting the analyser oo eee cece eee e ete te eeeeeeeeeeaeae 19 4 3 Installing the analyser 20 6 Microvision P SP101006 104 7 July 2009 MKS Instruments Spectra Products 4 4 Checking the system pressure scere 20 4 5 Mounting the analyser an 21 5 Microvision P InstallatiON coommnccccomoncecconannecccnaancoresnrerrnsanrennos 22 SL tNStallation eio ena ranere e EER T EEA EA 22 5 2 Electrical Connections seeren 22 MPAA OS ds 23 5 4 Re setting the IP address 23 6 BAKING coccccocorccccarcccii rr 24 7 Analyser Maintenance PVD and Open Source ooooccocooonnoooos 25 A airon en a anaE A E a a A 25 7 2 Ohmmeter analyser CHECKS eee 27 7 3 Checking Hammett iris 28 7 4 Changing filaments eeren 29 7 4 1 Removing the filaments cece ee eee sees esse aaa eeeeees 29 7 4 2 Fitting new filaments eect eect e tree nin aaa eeeeees 30 7 5 lon Source CIEANING eect eee eee cece eee nano nn corno rnr teeta aaaaeeeeees 31 7 6 Cleaning or replacing the ion SOUICE ccecce 32 7 6 1 Removing the ion SOUFCe cee cece cece eeeeee tena aa teeeeeees 33 7 6 2 Dismantling the source assembly 33 7 6 3 Source Re assembly 0 0 2 cece conocia ronca nano nnnnnnins 34 8 Exploded ViCWS coocccocoooococacanccccnccn rca rre nr rra eran 35 8 1 Analyser Flange p N OUtS 35 8 2 Exploded view
17. Filament Screen on the source plate mounting posts 2 Using tweezers carefully offer the filament plate onto the mounting posts Be careful not to touch the source cage with either filament There is no orientation of the filament plate required except that the mounting holes line up with the mounting posts 3 Re fit the two M2 x 4 pan head screws through the filament plate and filament screen and tighten securely Do not over tighten 4 Re fit each barrel connector in the same orientation as removed sliding each barrel connector over the connecting lead and filament post and while holding the barrel connector firmly with pliers tighten all screws 5 Before re fitting the analyser to your vacuum chamber carry out Section 7 2 to check for any short circuits 6 Replace the analyser into your vacuum housing and again check for shorts or grounding to the outer vacuum housing You are now ready to pump down and continue the operation of your quadrupole 30 Microvision P SP101006 104 7 July 2009 MKS Instruments Spectra Products 31 7 5 lon Source cleaning Sometimes it is possible to clean the ion source without removing it from the analyser For the user who has the necessary equipment available including a means to suitably dry the analyser it is usually worth trying this method before removing or replacing the ion source However it is likely only to be successful where the source is contaminated with loose or alcohol solub
18. Manager will recommend you change the instruments IP address to another not ending in 250 This is to avoid potential problems when installing more than one instrument RGA Device Manager SPECO40055 spectra com Multiple Network Cards The list shows the control units that are connected to network and serial ports of this computer Double click an item to view more details Serial Number Name Address Type Access Status A Details v T LM92 00101005 Friendly Name 192 168 0 250 Fixed No preconnection Requires Configure Y P Mi si gt Additional registered connections There are no additional registered connections Help F1 elp Is there an unlisted instrument that you expected to find Click Troubleshoot to launch the Hardware Troubleshoot 5 4 3 Connection Troubleshooting Wizard 48 MicrovisionlP SP101006 104 7 July 2009 MKS Instruments Spectra Products 49 Resetting the Default I P Address To reset the instrument to its default IP address of 192 168 0 250 carry out the following procedure Power on the unit Press the RESET button and immediately press and hold the PRESET button for 20 seconds Important If the instrument has been configured for DHCP keep the PRESET button pressed for 90 seconds or a reset will not occur Microvision P SP101006 104 7 July 2009 MKS Instruments Spectra Products 10 Returning Your Unit for Service If you wish to return the instrument for service
19. ROVISION PLUS LM77 VISION 1000P LM78 VAC CHECK LM79 VISION 10001 LM80 MINILAB LM89 VISION 1000B LM90 VISION 1000 C E LM92 MICROVISION IP LM98 e Vision LM99 Cirrus LM100 300mm Resistorr LM102 e Vision ARE IN CONFORMITY WITH THE FOLLOWING EUROPEAN DIRECTIVES 2004 108 EEC ELECTROMAGNETIC COMPATIBILITY DIRECTIVE 2006 95 EC LOW VOLTAGE DIRECTIVE THE APPLICABLE STANDARDS ARE EN 61326 1998 ELECTRICAL EQUIPMENT FOR MEASUREMENT CONTROL amp LABORATORY USE EN 61010 1 1993 SAFETY REQUIREMENTS FOR ELECTRICAL EQUIPMENT FOR MEASUREMENT CONTROL amp LABORATRY USE SIGNED J M Higgins GENERAL MANAGER DATE 7 July 2009 Microvision P SP101006 104 7 July 2009 MKS Instruments Spectra Products Additional Installation Maintenance and Operating Instructions In order to comply with European regulations the following procedures must be followed A INSTALLATION 1 The installation procedures given in the operating and technical manuals must be followed in addition to these instructions 2 The mains power cable must conform to local regulations and must have a protective earth PE conductor securely connected to the power plug protective earth contact 3 The short earthing braid supplied with some products must be fitted between the terminal on the RF head and one of the CF40 vacuum flange bolts 4 Only cables supplied with the equipment may be used for interconnections If extension cables are requ
20. Screw M1 6 x 4 3 off 200901604 MicrovisionlP SP101006 104 7 July 2009 MKS Instruments Spectra Products 8 4 Source Assembly open ion source Item Description Dimensions in mm Part Number 1 Plain Washer SS M1 6 27031600 2 Screw M1 6 x 8 200901608 3 Ceramic Tube 2 8D x 3 5L 400020035 4 Ceramic Washer 4 7D x 1L 400010203 5 Repeller Plate Assembly LM508 018PL 6 Source Plate Assembly LM508 017PL 38 MicrovisionI P SP101006 104 7 July 2009 MKS Instruments Spectra Products 8 5 Extract Plate open ion source ATA Ear Ci Ed Item Description Dimensions in mm Part Number 1 Plain Washer SS M1 6 27031600 2 Screw M1 6 x 6 200901606 3 Ceramic Tube 2 8D x 2L 400020020 4 Ceramic Washer 4 7D x 1L 400010203 5 Extract Plate Assembly LM508 016PL 6 Source Mounting Ring 305080603 MicrovisionlP SP101006 104 7 July 2009 MKS Instruments Spectra Products 8 6 Filament Plate PVD ion source Item Description Dimensions in Part Number mm 1 Screw M1 6x3 200901603 2 Barrel Connector 305040434 3 Screw M2x4 200902004 4 Filament Plate Tungsten Fils 842 060 4 Filament Plate Thoria Fils 842 002 40 MicrovisionI P SP101006 104 7 July 2009 MKS Instruments Spectra Products 8 6 Source Assembly PVD ion source A E gt pn a E E CY o
21. d safety critical and must not be substituted Replacement parts are available from MKS Instruments Spectra Products Ltd 4 Equipment enclosures embody certain special fastenings and bonding devices that affect EMC and safety performance These must be correctly re fitted after servicing Microvision P SP101006 104 7 July 2009 MKS Instruments Spectra Products 1 SpecifiCati0N vennusscnenuccnsneenncnsneennesseneenenseneenessanenessueesnessnneenessnnens 9 A es Aara aaa sa Ceuta ve aa a ai 9 1 2 Electrical sau ceeses see cents da 9 LENTO Melania acc 9 1 4 Satet yin E ean tue iene eee eet SAN 10 110 CONNeclO Sesa tl iia 10 1 6 WaringlaDels iia 10 LINO ad 11 o 0 A A en 12 3 CONNECTIONS ociiaisvriceisiecasenaaveddvvaansiscudereddvruiebisticeevaxcdvesiieciseres 13 3 1 The rear elduVuciio ki E a 13 3 2 Filament iNdiCator id cds 14 3 3 SEM Indicato riviera des 14 3 4 Power Indicato inira aaa ania aa o uE Nia 14 3 5 COMMS NOIA Obi as ena ii dol 14 3 6 Ethernet Conector ia dedo reader l 14 3 7 Status INdICAtOT ococcoccnccnncnncnnnnna nono nrnnr ronca AES 14 3 09 Preset BUON a a ads 14 3 9 Analog lO CONNECtOF oocococoocccccocccconinnnnnonannnnnnnnnononnnnnnnnnnnn 15 3 10 Digital lO Connector ooooooocococociccncnnnnnnnnnoncnnnnnnononnnncnnnnnnn 16 3 11 PoWer CONNMECIOR uti bes 17 3 T2 AUCIO SOC incas ita ed 17 3 13 RS232 Cone C O ccc ececc ese ce cee a A Ea LIAS ia 17 3 14 RES E BUON o ds 17 3 15 Volume Control iii ios 17 3 10
22. e 62 Repl NIC Assign an IP pes Be address adaptor Configure Access and run Process Eye Carry out reset to default IP address STILL NG y Use the Troubleshoot Page feature in Device 65 Manager 43 MicrovisionlP SP101006 104 7 July 2009 MKS Instruments Spectra Products Enabling the Network Connection Notification To aid in troubleshooting the network status notification should be enabled The following paragraph explains the procedure Open Windows Control Panel and select the NETWORK CONNECTIONS icon Choose the network connection you are using for the link with the instrument right click and choose PROPERTIES 4 New LAN Properties General Authentication Advanced Connect using E D Link DFE 530TX PCI Fast Ethernet This connection uses the following items TE Client for Microsoft Networks A File and Printer Sharing for Microsoft Networks Y Saos Packet Scheduler V 3 Intemet Protocol TCP IP Description Allows your computer to access resources on a Microsoft network Show icon in notification area when connected Notify me when this connection has limited or no connectivity Check the options shown above Your network connection status is now displayed in the task bar near the clock Mouse over the icon to check the status of the connection 44 MicrovisionI P SP101006 104 7 July 20
23. eased until the value of emission current is reached If however the control electronics reaches the limit of its filament current supply capability and the emission current has still not reached 1mA a filament fail condition will exist In the vast majority of cases this will be due to a blown filament more correctly described as an open circuit filament There are other conditions such as a heavily contaminated ion source which will result in a filament fail condition when the filament is not open circuit If you suspect a blown filament carry out the following test before removing the analyser from the vacuum system Connect meter lead one to analyser feedthrough pin 8 which is the common connection to both the filaments Connect the second meter lead to pin 4 Filament 1 You should read a short circuit Now connect the second meter lead to pin 10 Filament 2 again your meter should indicate a short circuit If either or both filaments are blown the meter will indicate an open circuit and the filaments will need to be replaced If the meter reading suggests that the filament is good but the control unit shows a filament fail the most likely cause would be a break down in electrical continuity Ensure that the face of the analyser connector housing on the control unit butts up to the analyser flange 28 Microvision P SP101006 104 7 July 2009 MKS Instruments Spectra Products 29 Examine the RF analyser connector on
24. gs you will need Small jeweler s screwdriver 2mm Pair of tweezers Small pair of smooth jawed needle nosed pliers Pair of clean cotton gloves Clean bench on which to work Source alignment jig 4 Pieces of straight clean wire NOT tinned or insulated 1mm x 25mm Ohmmeter Clean container in which to put small parts Replacement filaments Replacement source parts if necessary Set of replacement ceramics is highly desirable if none are cracked and essential if any are broken Some method of holding the analyser securely in an upright position a small bench vice is ideal Pen and paper on which to make notes and sketches Refer to the exploded views of the Analyser shown on Page 36 32 Microvision P SP101006 104 7 July 2009 MKS Instruments Spectra Products 7 6 1 Removing the ion source 1 Remove the analyser from the vacuum system place it on the bench in an upright position holding the analyser in a small bench vice is recommended and remove the filaments as described in Section 7 4 1 2 Loosen the three M2 x 4 that secure the three insulated wires that run from the analyser flange assembly to the Source Repeller and extractor plates and slightly bend the wires out of the way 3 Remove the four M2 x 4 screws Item 2 that hold the source assembly to the filter assembly and carefully withdraw the source assembly from the filter 7 6 2 Dismantling the source assembly Before proceeding with this section please ens
25. his is a 3 5mm J ack socket mounted on the rear panel It is used to connect headphones wireless headsets or an external speaker so that audio tones generated in some of the modes can be heard E g Leak checking tone and audio alarms The minimum load impedance should be 8 ohms and the power handling is 2 watts max 3 13 RS232 Connector Note By default RS232 communication is disabled This is a 9 way D Type connector It is used to connect the Microvision P to the host computer if the need arises to temporarily bypass the default TCP protocols RS232 pin assignment Pin 1 7 9 Not Connected Pin 2 TXD transmit data Pin 3 RXD receive data Pin 4 6 8 Commoned and connected to fused 15V Pin 5 0 volts 3 14 Reset Button Used to reset the instrument should a fault occur or when requested to do so after carrying out a software update 3 15 Volume Control Controls the volume of the internal or external speaker when in Leak Check mode MicrovisionlP SP101006 104 7 July 2009 MKS Instruments Spectra Products 3 16 External trip The external trip connector is a 3 5mm J ack socket The external trip feature is used to protect the filaments and electron multiplier from exposure to high pressures It allows an independent total pressure gauge or signal from a vacuum control system to be connected to the Microvision P It is the most effective of the trips available and we would always recommend its use The external tri
26. ions with an Ohmmeter before returning the analyser back to the vacuum chamber 34 Microvision P SP101006 104 7 July 2009 MKS Instruments Spectra Products 8 Exploded Views ee 8 1 Analyser Flange pin outs Pin Connection Earth Source plate Electron Multiplier Filament 1 Extraction plate Suppressor plate RF 1 Repeller plate filament common No connection Filament 2 RF 2 Collector 0 YOU Y UNA MicrovisionlP SP101006 104 7 July 2009 MKS Instruments Spectra Products 8 2 Exploded view of the Analyser Open ion source shown DETECTOR FLANGE ASSEMBLY a M2 x 4mm LG CH HD SCREWS WITH LOCKWASHERS gt a w Y a lt a ul t a M2 x 4mm LG CH HD SCREWS NITH LOCKWASHERS e a 7 oT Y 02 o a Item Description Dimensions in mm Part Number 1 Source Assembly Tungsten Fils 842 021 1 Source Assembly Thoria Fils 842 022 1 PVD Source Assembly Tungsten Fils 842 045 1 PVD Source Assembly Thoria Fils 842 047 2 3 Screw M2 x 4 200902004 36 MicrovisionI P SP101006 104 7 July 2009 MKS Instruments Spectra Products 8 3 Filament Plate open ion source Item Description Dimensions in Part Number mm 1 Screw M1 6 x 3 3 off 200901603 2 Barrel Connector 305040214 3 Screw M2 x 4 200902004 4 Filament Plate Tungsten Fils LM508 015PL 4 Filament Plate Thoria Fils LM508 020PL 5 Filament Screen 305080594 6
27. ired to obtain a greater separation between control unit and RF head or if longer serial communications cables are required they must be supplied by MKS Instruments Ltd 5 Cables attached to all other ancillary signal and control ports must have a length of less than 3 metres If greater length is required MKS Instruments Ltd must be contacted for technical guidance on possible EMC and safety issues 6 The vacuum system on which the analyser RF head is mounted must be earthed to a protective earth preferably to the same protective earth as the control unit B OPERATION 1 The equipment is not authorised for use as a critical component in a life support or safety critical system without the express written approval of MKS Instruments Ltd 2 All instructions given in the operating manual must be followed 3 Adjustments are strictly limited to those accessible from the control panel and computer keyboard and only when running software supplied by MKS Instruments Ltd 4 MicrovisionI P SP101006 104 7 July 2009 MKS Instruments Spectra Products C MAINTENANCE WARNING DANGEROUS VOLTAGES EXIST INSIDE THE EQUIPMENT 1 Maintenance functions must only be carried out by competent persons 2 During the warranty period faulty equipment must be returned to MKS Instruments Spectra Products Ltd unless special arrangements are made 3 There are no user serviceable parts in the electronic equipment Certain components are EMC an
28. l hold the ceramic parts in place while the source assembly is rebuilt 3 Slide one ceramic tube Item 3 down each of the wires and then a ceramic washer Item 4 4 Orientate the source plate so that the largest circular cutout is above the extract plate s barrel connector and carefully slide it down the wires and over the ceramic tubes 5 Place one ceramic washer over each of the exposed ceramic tubes 6 Orientate the repeller plate so the circular cutouts align with the two visible barrel connectors and slide it down the wires over the ceramic tubes and onto the ceramic washers 7 Place one ceramic washer over each of the exposed ceramic tubes 8 Carefully remove one of the wires and replace with a M1 6 pan head screw Item 2 and the M1 6 stainless steel washer Item 1 which should be screwed down but not tightened repeat this for the remaining three wires 9 Check that all the plates and ceramics are seated properly before tightening the screws fully Be careful not to over tighten as this will damage the ceramic spacers 10 Push out the completed source assembly from the jig and place it on a clean non conducting surface Using an Ohmmeter check that there are no short circuits present between any of the three plates or the source mounting ring If any shorts are discovered correct them before continuing 11 The filament plate can now be re fitted and the remaining connection made Once again check all connect
29. le and anything outside these ranges as being a definite fail Any readings less than 1 ohm we can take as a short and any reading above 5 Meg Ohm 5x10 ohms as being open circuit The following assumes that the analyser is still on the vacuum system and goes through all the possible tests Tools required Ohmmeter with leads Please refer to Page 35 for analyser pin numbers 1 Attach a meter lead to pin 1 of the analyser feedthrough 2 Connect the other lead to the analyser flange you should read a short circuit If not you have either a serious problem or more likely a faulty meter meter leads If after checking your meter an open circuit still exists contact your nearest MKS Spectra service center for advice 3 Move the lead from the flange and connect to pins 2 to 12 on the analyser feedthrough in turn Each one should give an open circuit If not you have a short to earth There are two types of short to earth an internal short between one part of the analyser and an earthed part of the analyser or more commonly a short between part of the analyser and the vacuum chamber In either case remove the analyser from the vacuum chamber and repeat the test If the result is the same then you have an internal short and should contact your local MKS Spectra facility for advice Otherwise you have a short to the vacuum chamber check the dimensions of the vacuum chamber around the quadrupole analyser or try refitting the anal
30. le deposits Below is a list of the tools and equipment you will require We recommend that you assemble the following items before you start Remember that the instrument is supplied with a tool kit that contained some of the things you will need Small jeweller s screwdriver 2mm Pair of tweezers Small pair of smooth jawed needle nosed pliers Pair of clean cotton gloves Clean bench on which to work Ohmmeter Clean container in which to put small parts Ultra sonic bath Measuring cylinder Iso propyl alcohol Some method of holding the analyser securely in an upright position a small bench vice is ideal Remove the analyser from the vacuum chamber and place it on the bench in an upright position the use of a small bench vice is recommended remove the filaments as described in Section 7 4 1 Insert the analyser into the measuring cylinder so that the knife edge side of the flange rests on the lip of the cylinder Note the level which the ion source comes to on the measuring cylinder before removing the analyser and filling the measuring cylinder with sufficient iso propyl alcohol to cover the ion source Note the measuring cylinder should be of a diameter and length to accommodate the analyser Put the measuring cylinder into the ultra sonic bath for 10 to 15 minutes Remove the analyser and allow any excess alcohol to drain off Keep the analyser inverted feedthrough upper most until it is dry Do not let_any alcohol run
31. n is simply to convert the filtered ion beam presented by the quadrupole filter into a small electrical current which can be passed to the electronics for amplification and subsequent display to the outside world 4 The flanged housing This is the only part of your analyser that you will see under normal operating conditions Comprising of an industry standard 2 75 Conflat flange with an electrical feedthrough which carries the various supplies and signals to and from the quadrupole analyser All quadrupole analysers require periodic maintenance the regularity of which is determined by its use The cleanliness of the vacuum hours of operation and the type of sample being analysed all have an effect on the analyser s performance Apart from these considerations there are times when the analyser will require maintenance and these are when accidents happen i e the vacuum is vented with the filaments on or someone forgets to turn on the water cooling for the oil diffusion pump Microvision P SP101006 104 7 July 2009 MKS Instruments Spectra Products Routinely there is only one area of the analyser that requires any maintenance this is the ion source The ion source contains two filaments only one of which will be in use at any one time The filament is heated to approximately 2000 deg K at which temperature it emits electrons which are used to produce the ions required by the quadrupole filter At this high temperature there are
32. p input can be driven in three ways 1 Uncommitted relay contact This is a low voltage 5V 1mA contact The contact should be closed for normal operation open to trip the filaments or if the protective equipment is switched off 2 Open collector TTL drive The output transistor should be on for normal operation off for trip or if the protective equipment is turned off 3 Totem pole TTL drive The signal should be low for normal operation high for a trip condition or if the protective equipment is switched off The external trip circuitry is galvanically isolated from the system ground The maximum common mode voltage is 60V DC or peak AC current limited to 2mA 18 Microvision P SP101006 104 7 July 2009 MKS Instruments Spectra Products 19 4 Analyser Installation This section deals with getting the equipment you have just bought out of its box and installing it on your system If you have any questions or experience any difficulties contact your local MKS Spectra representative who will be able to help you 4 1 Unpacking When you receive the Microvision P carefully check each item before removing the foam packaging and plastic wrapping to ensure that no physical damage has occurred during shipment Also make sure all items have been received correctly by checking each item against the enclosed packing slip If there has been obvious damage during shipment or if there are items listed on the packing slip as ship
33. ped which are not in the box immediately contact your local MKS Spectra sales service representative 4 2 Inspecting the analyser CAUTION The analyser is both fragile and very easily contaminated by the slightest touch from your fingers or undesirable surfaces Once you have inspected the analyser return it to the protective envelope until you are ready for installation The analyser is supplied vacuum sealed inside a vac formed plastic envelope for protection Carefully unfold the envelope to allow access to the analyser Do not discard this packaging Hold the analyser ONLY at the vacuum flange Hold the analyser at the flange with the quadrupole and ioniser structure vertically up Carefully inspect all the observable insulators for damage Look at each lead from the flange to its termination point to ensure that it does not touch any other element of the analyser Microvision P SP101006 104 7 July 2009 MKS Instruments Spectra Products 4 3 Installing the analyser The vacuum chamber in which you intend to mount the analyser must have a 2 75 inch UHV Conflat flange fitted with a tube of 35 0mm 1 378 minimum ID inclusive of a good welded joint The distance from the end of the analyser to its mounting flange depends on the type of system Refer to the table below 100 200 amu single filter 200 amu double filter 300 amu double filter 300 amu triple filter There must be at least the distance given abo
34. please follow these simple guidelines Contact your local MKS Spectra service facility to obtain a Returns Material Authorisation RMA number We will require some instrument details such as the serial numbers date of purchase and a detailed fault description Fill in the relevant sections of the Health and Safety Returns Form on pages 51 and 52 of this manual or we can provide you with a copy This form MUST accompany the instrument when returned delays in providing this completed form will lead to delays in the servicing of the instrument Securely package all items to be returned using the original packaging where possible and send to the address provided by the relevant service department Support Contact Numbers Europe UK 44 0 1270 250150 USA 01 408 750 0347 50 Microvision P SP101006 104 7 July 2009 MKS Instruments Spectra Products RETURNS FORM Please complete the form and fax or send by first class post to the appropriate MKS Spectra facility Fax numbers and addresses can be found on the inside front page of this manual Please ensure that we have this information before we receive the equipment A copy should also be given to the carrier FAILURE TO COMPLETE THIS FORM OR COMPLY WITH THE PROCEDURE WILL LEAD TO DELAYS IN SERVICING THE EQUIPMENT Please Complete The Following Our RMA number Customer P O No Customer Bill to Address Company Department Address City Zip Postal Code Customer Return
35. rol unit ready to receive the packaged files Using a ball point pen or a similar pointed but not sharp object 1 Press and hold the control unit Reset button for 2 seconds then release it 2 Press and hold the Preset button and watch the Status LED 3 When the Status LED has tumed OFF and tumed ON release the Preset button 4 Wait until the Status LED tums OFF one more time and remains OFF It is important you follow these instructions exactly When each stage has been completed successfully check the box and then the lt Next gt button to begin the update Do not power down the unit during this process unless told to do so MicrovisionI P SP101006 104 7 July 2009 MKS Instruments Spectra Products
36. s Item 2 one to each filament and one to filament common 3 Hold one of the barrel connectors firmly with your pliers and slacken the outermost screws Items 1 and 6 until the barrel connector can be removed from the filament plate and the connecting lead Microvision P SP101006 104 7 July 2009 MKS Instruments Spectra Products 4 Repeat the above for the other two barrel connectors 5 Remove the two M2 x 4 pan head screws that hold the filament plate in place and remove the filament plate assembly Carry out this step carefully so as not to damage the Source Cage 6 Remove the Filament Screen Item 5 It is worthwhile at this stage to see if the source requires any attention especially if the filament s have broken because of an over pressure situation in your vacuum system With the filaments removed you have a clear view of the source cage The signs to look for are powdery deposits these will vary in colour but may be brown blue canary yellow or white depending upon the precise circumstances which led to their formation If these oxides are present it is recommended that you refer to the section on source removal and cleaning before proceeding see Section 7 5 7 4 2 Fitting new filaments The fitting of new filaments is simply the reversal of the procedure for removing them Care should be taken at all stages to ensure that no shorts are introduced and that the analyser is kept clean 1 Place and align the new
37. smks Technology for Productivity Spectra Products MicrovisioniP User Manual SP101006 104 7 July 2009 As part of our continuous product improvement policy we are always pleased to receive your comments and suggestions about how we should develop our product range We believe that the manual is an important part of the product and would welcome your feedback particularly relating to any omissions or inaccuracies you may discover You can send your comments to MKS Instruments Spectra Products Cowley Way Weston Road Crewe Cheshire CW1 6AG U K 44 0 1270 250150 Tel International 44 0 1270 251939 Fax International Email manual_info mksinst com Microvision P is a registered trademark of MKS Instruments Spectra Products Conflat is a registered trademark of Varian Associates Viton is a registered trademark of E l DuPont de Nemours amp Co Inc Windows is a trademark of the Microsoft Corporation All other brand or product names are trademarks or registered trademarks of their respective companies and as such are fully recognised 2 Microvision P SP101006 104 7 July 2009 MKS Instruments Spectra Products Declaration of Conformity Spectra SensorTech Ltd Cowley Way Crewe Cheshire CW1 6AG United Kingdom DECLARES THAT THE FOLLOWING PRODUCTS LM62 LM10 VACSCAN 100 LM63 LM10 LM4 VACSCAN PLUS 100 200 LM61 LM10 LM4 LM9 SATELLITE 100 200 300 LM56 MICROVISION LM70 LM76 MIC
38. standard patch lead may be used 22 Microvision P SP101006 104 7 July 2009 MKS Instruments Spectra Products 23 If required connect your X Trip signal cable to the socket marked X TRI P For signal options see Section 3 5 Care should be taken in routing and securing all cables Avoid running any of the signal cables next to mains power cables or sources of electrical noise 5 3 IP Address The default IP address of the MicrovisionIP is 192 168 0 250 Details on how to change this IP address can be found in the manual supplied with your RGA operating software 5 4 Re setting the P address To re set the unit back to its default IP address carry out the following procedure 1 Push the reset button 2 Immediately push and hold the preset button until the unit emits a bleep The IP address has now been re set Further details on using and assigning an IP address can be accessed from the built in help files contained in the Process Eye EasyView software or in the Troubleshooting section of this manual Microvision P SP101006 104 7 July 2009 MKS Instruments Spectra Products 6 Baking The control electronics Microvision P must not be exposed to temperatures above 40 C and should be removed from the analyser during baking The analyser may be baked up to 250 C but care should be taken to avoid exposing the ceramic feedthrough to sudden changes in temperature CAUTION The Electron Multiplier
39. to Address if different from above Company Department Address City Zip Postal Code User s Name Phone No Equipment Shipped ltem 1 Serial No ltem 2 Serial No ltem 3 Serial No Microvision P SP101006 104 7 July 2009 MKS Instruments Spectra Products Please describe the system fault in detail Details of all substances pumped or coming into contact with the returned equipment Chemical names Precautions to be taken in handling these substances Action to be taken in the event of human contact or spillage hereby confirm that the only toxic or hazardous substances that the equipment specified above has been in contact with are named above that the information given is correct and that the following actions have been taken 1 The equipment has been securely packaged and labelled 2 The carrier has been informed of the hazardous nature of the consignment Signed Title Date Phone No 52 Microvision P SP101006 104 7 July 2009 MKS Instruments Spectra Products 53 10 FTP Mode Software updates for the MicrovisionlP are supplied as a self executing file When the file is launched the following dialog is displayed providing instructions on how to configure the MicrovisionIP for file transfer Network Instrument Download Wizard Prepare the Control Unit Follow the instructions to prepare the control unit to upload or download files Please follow the following steps to make the cont
40. two deleterious effects The filament material slowly evaporates and condenses upon the surrounding surfaces This effect is extremely slow but would require from time to time the cleaning of the surrounding source plates and ceramics and the replacement of the filaments The second effect is similar to the first except that the vacuum under which the source is operating has either a high oxygen or water content Then instead of metal being deposited upon the surrounding source plates layers of metal oxides are deposited Being insulators these have a far more noticeable effect upon the performance of the source and therefore a more frequent cleaning program should be adopted CAUTION THE QUADRUPOLE S FILTER I S ACCURATELY ALIGNED BY SKI LLED PERSONNEL USING SPECI ALI ST TOOLS AND JIGS UNDER NO Cl RCUMSTANCES SHOULD THE FILTER ASSEMBLY BE DISMANTLED IF YOU ARE IN ANY DOUBT WHEN SERVI CI NG YOUR ANALYSER PLEASE CONTACT YOUR LOCAL SERVI CE CENTRE 26 MicrovisionI P SP101006 104 7 July 2009 MKS Instruments Spectra Products 27 7 2 Ohmmeter analyser checks There are a number of circumstances when carrying out some simple checks with an ohmmeter can be worthwhile If you suspect a failed filament or want to check for shorts following some maintenance performing some simple checks can save a great deal of time In carrying out these checks we can legitimately accept two ranges of meter readings as possibly acceptab
41. ure that you have the correct Source Alignment J ig and spare ceramics and screws available Refer to the exploded views of the Source Assembly shown on Page 38 Open or 40 PVD 1 Carefully unscrew the four M1 6 x 8 screws Item 1 and withdraw them from the assembly 2 Using tweezers remove the four ceramic washers Item 3 if undamaged keep in a safe clean place ready for the re assembly 3 The Repeller Plate Item 4 can now be removed from the mounting ring 4 Using tweezers remove the four ceramic washers Item 3 and the four ceramic tubes ltem2 if undamaged keep safe as before 5 The Source Plate Item 5 can now be removed from the mounting ring This is normally as much as you will need to dismantle for cleaning or replacing source components The Extract plate does not usually require service as it is furthest away from potential contamination However if you wish to remove the Extract Plate see the exploded view on Page 38 Microvision P SP101006 104 7 July 2009 MKS Instruments Spectra Products 7 6 3 Source Re assembly Refer to the exploded views of the Alignment J ig shown on Page 41 and the Source Assembly shown on Page 38 open or 40 PVD 1 Place the source alignment jig flat on the bench and slide in the source mounting ring aligning the extract plate s barrel connector with the alignment mark on the jig 2 Insert each of the four lengths of wire into the four castellations which wil
42. ve free of obstructions inside the vacuum chamber If your chamber does not meet the above criteria you should use a specially designed adapter so that the analyser may be mounted outside the chamber Please contact your local MKS Spectra representative for assistance 4 4 Checking the system pressure Quadrupole analysers cannot be operated at pressures higher than 5 x 10 Torr and in the case of dual detector analysers faraday and electron multiplier detectors the multiplier should not be used at pressures above 7 6 x 10 Torr Operation above these limits will cause irreversible damage to the filaments and possibly the ion source Permanent damage to the multiplier will be caused if it is used outside the above ranges Make use of the X Trip interlock to prevent accidental damage to the analyser 20 MicrovisionI P SP101006 104 7 July 2009 MKS Instruments Spectra Products 21 4 5 Mounting the analyser The standard 2 34 Conflat flange on the analyser can be sealed to the vacuum chamber with either a copper gasket or a Viton gasket with a square cross section Which one you choose depends on the ultimate pressure you expect in your system and whether you intend to bake the system If it is not already clean then clean the gasket with suitable solvent and dry it Remove the analyser from its shipping envelope slip the gasket over the quadrupole structure and set it in the grooves of the flange surface Carefully insert
43. yser in a Slightly different orientation Repeat the ohmmeter test before pumping down the vacuum chamber Remember that the ion source gets very hot during operation and the stainless steel components will expand slightly Sometimes a short will only develop when the analyser has been run for a while and is up to temperature Microvision P SP101006 104 7 July 2009 MKS Instruments Spectra Products 4 Move the meter lead from pin 1 and attach it to pin 2 of the analyser feedthrough Connect the other lead to pins 3 to 12 on the analyser feedthrough in turn Each one should give an open circuit Now move the meter lead from pin 2 to pin 3 and check to pins 4 to 12 Proceed around the feedthrough until all possible connections have been checked All the pins should show an open circuit to all other pins EXCEPT pin 4 to pin 8 and pin 8 to pin 10 which should show short circuit as these are the filament connections If any of the pins read short circuit to another pin contact your local MKS Spectra service center with the results of your tests and they will advise you how to proceed 7 3 Checking filaments Filament status is constantly monitored by the control unit and the operating software This is achieved by measuring the flow of electrons emitted by the hot filament referred to as the emission current flowing to the ion source cage This is normally maintained at a fixed value of 1mA The current flow through the filament is incr
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