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Mass Flow Controllers Series FC-77X / 77XX, Series FC

1. CN1 R99 lt 1 NMV CLOSE SIGNAL VALVE CLOSE OPEN a2 ts e O COMMON VALVE CLOSE 15 v VALVE OPEN PN vec Rove 68 K Ano 5 V ee OPEN SIGNAL NAW VISA COMMON 0 V 2663 VCC 144V Figure 4 9 Honda 20 pin normally open internal circuitry for purge function CN1 R99 CLOSE SIGNAL VALVE OPEN CLOSE 6 2K 0 V VALVE CLOSE 15 V VALVE OPEN R93 Z es K bp Res A OPEN SIGNAL 177 COMMON 0 V R94 2664 VCC 14 4 V Figure 4 10 Honda 20 pin normally closed internal circuitry for purge function SUBMINIATURE D PURGE FUNCTION SIGNAL For the 9 pin subminiature D connector Figure 4 11 shows the purge function connection This connector is only available on normally closed MFCs Figure 4 12 shows the internal circuitry for this connection 5700512 C I O Connections and Communication 4 11 Advanced Energy Connection terminal o COMMON or 15 Vdc open VALVE OPEN CLOSE Pin No 1 o 15 Vdc close COMMON terminal should be common with the MFC 2661 MFC To disengage this function disconnect the MFC terminal Figure 4 11 9 pin subminiature D purge function connection RosSe8 K 777 COMMON 0 V CN1 R99 lt n VALVE CLOSE OPEN 6 4 K __ OPEN SIGNAL COMMON VALVE OPEN 15 V VALVE CLOSE Roa Sa7 K VDD 5 V gt gt __ CLOSE SIGNAL O NEC VEE 2662 14 4 V 11V
2. Specifications for Model FC 785T B MFCs The following table lists specifications for the FC 785T B MFCs Table 6 11 Specifications for FC 785T B series MFCs Specification Full scale range N equivalent FC 785T B FC 785CT B 10 sccm to 5000 sccm Valve type Normally open Normally closed Response time Maximum 2 of full scale within 1 s AccuracyN0t 1 Maximum 1 of full scale Linearity Maximum 0 5 of full scale Repeatability Maximum at 0 2 of full scale External leak rate Maximum 1 x 10 1 Pam3 sec He Flow rate control range 2 to 100 Operating pressure range 69 to 275 kPa D 10 to 40 psi D Proof pressureNote2 981 kPa G 142 psi G Operating temperature 5 C to 45 C 41 F to 113 F Flow rate setting and output signal 0 VDC to 5 0 VDC Supply power Minimum 15 VDC 2 25 mA Minimum 15 VDC 2 180 mA Power consumption Maximum 3 1 W Gas wetted surface material SUS316 SUS316L PTFE Ni KM 45 Mounting position Any direction Weight 1 3 kg 2 9 Ib Options Current output 0 mA to 2 5 mA error detection function TC surface treatment Note 1 Accuracy ensures that the calibration gas equivalent flow is 1 of full scale when 22 3 C in temperature is obtained for the primary reference in the specified operating pressure range If the ser vice gas and calibration gas are the same the
3. 4 92 1 26 0 71 2 72 FC 7810 7810C 151 5 94 19 128 38 28 46 0 75 5 04 1 50 1 10 1 81 FC 7810CD 7810CU 124 4 88 12 7 131 38 18 3 69 0 50 5 16 1 50 0 72 2 72 FC 7820 7820C 1 4 VCR fitting 15 152 38 25 5 90 183 8 7 24 0 59 5 98 1 50 1 00 3 54 3 8 VCR fitting 192 3 7 6 5700512 C Specifications and Reference Information 6 35 Advanced Energy Table 6 33 Dimensions for standard models in mm and inches Continued Model L S H W L1 L2 FC 785 785C 106 4 17 12 7 123 8 36 16 29 0 50 4 87 1 42 0 63 1 14 FC 786 786C 106 4 17 12 7 123 8 36 16 29 0 50 4 87 1 42 0 63 1 14 6 36 Specifications and Reference Information 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs Dimensions For Block Type MFC Models Figure 6 2 and Table 6 34 provide physical dimensions for block type MFC model numbers 2666 g Figure 6 2 Dimensions of block type MFC models Table 6 34 Dimensions for block type models in mm and inches Model a b c d e f FC 7850Y B FC 785Y B FC 785CY B FC 786Y B FC 786CY B FC 785T B FC 785CT B FC 786T B FC 786CT B FC 795T B FC 795CT B FC 7850CY B 63 6 2 50 180 7 09 40 1 57 99 5 6 5 38 15 maximum maximum 3 92 0 26 1 50 0 59 39 9 1 57 FC 785X B FC 7
4. Figure 4 12 9 pin subminiature D internal circuitry for purge function 5700512 C 4 12 I O Connections and Communication Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs H apter 5 Troubleshooting and Global Customer Support TROUBLESHOOTING The following sections provide information on troubleshooting the MFC as well as AE Global Services contact information A WARNING Hazardous voltages exist inside the mass flow controller MFC Do not remove the MFC cover Alarm Signals Some MFCs provide alarm output under certain operating conditions For more information see Alarm Output Error Detection Signals on page 4 7 Troubleshooting the Gas Flow This section provides information on responding to the following flow related problems e No Gas Is Being Supplied on page 5 2 Set Point and Flow Output Do Not Match on page 5 3 e Unstable Flow or Insufficient Output Exists on page 5 4 5700512 C Troubleshooting and Global Customer Support 5 1 Advanced Energy NO GAS IS BEING SUPPLIED Use the following flow chart to troubleshoot if no gas is being supplied If these procedures do not resolve the problem contact AE Global Services see AE Global Services on page 5 6 C DEDE IE ices Replace the cylinder or on the cylinder or Not OK Pp y f v adjust the pressure actory piping OK Adjust to specified input C
5. Gas wetted surface material 3 SUS316 SUS316L PTFE Ni KM 45 Viton Chloroprene rubber Standard fitting 1 4 VCR 1 4 VCR Equivalent to 1 4 VCR 1 4 SW Mounting position Any direction Weight 1 5 kg 3 3 Ib Note 1 Accuracy ensures that the calibration gas equivalent flow is 1 of full scale when 22 3 C in temperature is obtained for the primary reference in the specified operating pressure range If the service gas and calibration gas are the same the measured gas is ensured to be 1 of full scale in the specified operat ing pressure range as to our primary reference Note 2 The proof pressure specification does not ensure operation or accuracy Note 3 Use of Viton or Chloroprene rubber may be required depending on the intended flow rate range 6 30 Specifications and Reference Information 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs Specifications for Model FC 7820 MFCs The following table lists specifications for the FC 7820 MFCs Table 6 30 Specifications for FC 7820 series MFCs Specification Full scale range N equivalent FC 7820 FC 7820C 35 slm to 150 slm Valve type Normally open Normally closed Response time Maximum 2 of full scale within 4 s Accuracy Maximum 2 of full scale Linearity Maximum 1 of full scale Repeatability Maximum at 0 2 of full scale Ext
6. Making the Electrical Connection Connect the system to the MFC using an appropriate mating connector and cable For electrical connector pin and signal information see Chapter 4 I O Connections and Communication Note If possible securely fasten the connector with jack post screws to the MFC to prevent the connector from vibrating loose Signals at this I O port can be sensitive to electrical noise Take standard preventative measures against electromagnetic interference EMI including using shielded cable POWER SUPPLY REQUIREMENTS For specific power supply requirements see the specifications for your MFC model in Model Specifications on page 6 1 Note The power supply used with the MFC must be sufficient to handle the larger current demand during operation Additionally the ripple voltage of the power supply should be less than 20 mV If needed Aera recommends using the following Aera power supplies for use with Aera MFCs e PS94UA For use with up to 4 MFCs e PS76DA For use with up to 6 MFCs e PS74DA For use with up to 4 MFCs GROUND CONNECTIONS The MFC employs both signal and power commons Proper grounding of these common leads is essential for the MFC to operate accurately and safely Improper grounding practices may result in inaccurate actual and indicated flow Follow all appropriate industry and local practices and standards in making these connections Note For electrical connector pin and si
7. Maximum 2 of full scale within 1 s Accuracy Maximum 1 of full scale Linearity Maximum 0 5 of full scale Repeatability Maximum at 0 2 of full scale External leak rate Maximum 1 x 10 Pa m3 sec He Flow rate control range 2 to 100 Operating pressure range 49 to 275 kPa D 7 to 40 psi D Proof pressure 981 kPa G 142 psi G Operating temperature 5 C to 45 C 41 F to 113 F Flow rate setting and output signal 0 VDC to 5 0 VDC Supply power Minimum 15 VDC 2 25 mA Minimum 15 VDC 2 180 mA Power consumption Maximum 3 1 W Gas wetted surface material SUS316 SUS316L PTFE Ni KM 45 Standard fitting Equivalent to 1 4 VCR Mounting position Any direction Weight 1 0 kg 2 2 1b Options Current output 0 mA to 2 5 mA error detection function electropolishing Note 1 Accuracy ensures that the calibration gas equivalent flow is 1 of full scale when 22 3 C in temperature is obtained for the primary reference in the specified operating pressure range If the ser vice gas and calibration gas are the same the measured gas is ensured to be 1 of full scale in the specified operating pressure range as to our primary reference Note 2 The proof pressure specification does not ensure operation or accuracy 5700512 C Specifications and Reference Information 6 11 Advanced Energy
8. Standard fitting 1 4 VCR 1 4 VCR Equivalent to 1 4 VCR 1 4 SW Mounting position Any direction Weight 1 5 kg 3 3 Ib Note 1 Accuracy ensures that the calibration gas equivalent flow is 1 of full scale when 22 3 C in temperature is obtained for the primary reference in the specified operating pressure range If the service gas and calibration gas are the same the measured gas is ensured to be 1 of full scale in the specified operat ing pressure range as to our primary reference Note 2 The proof pressure specification does not ensure operation or accuracy Note 3 Use of Viton or Chloroprene rubber may be required depending on the intended flow rate range 5700512 C Specifications and Reference Information 6 27 Advanced Energy Specifications for Model FC 7820 MFCs The following table lists specifications for the FC 7820 MFCs Table 6 27 Specifications for FC 7820 series MFCs Specification Full scale range N equivalent FC 7820 FC 7820C 35 slm to 150 slm Valve type Normally open Normally closed Response time Maximum 2 of full scale within 4 s AccuracyNote 1 Maximum 2 of full scale Linearity Maximum 1 of full scale Repeatability Maximum at 0 2 of full scale External leak rate Maximum 1 x 107 Pa m3 sec He Flow rate control range 2 to 100 Operating pressure range 147 to 275 k
9. Table 4 1 20 pin connector signal descriptions Continued Pin Signal Name Signal Description A card edge SET POINT Analog flow control set point signal The INPUT signal range is 0 VDC to 5 VDC 11 Honda 0 VDC 0 e 5 VDC 100 of full scale flow card edge SIGNAL Return for control signals COMMON 12 Honda Note POWER COMMON pin 2 and SIGNAL COMMON pins B and C for the card edge connector pins 12 and 13 for the Honda connector must be connected at the power supply C card edge SIGNAL See pin B 12 COMMON 13 Honda D card edge VALVE OPEN This signal controls the position of the control CLOSE valve and allows you to use the purge function 14 Honda on the MEC The controls for this function vary with connector and MFC type For more information see Control Valve Purge Function Signals on page 4 8 E card edge UNASSIGNED This pin is unassigned and should not be connected 15 Honda F card edge 15 VDC For specifications on this signal see the supply power section of the specifications 16 Honda table for the specific MFC model see Model Specifications on page 6 1 Key card KEY The key is a slot in the card edge connector edge or that ensures the connector can not be 17 Honda UNASSIGNED connected backwards For Honda connectors this pin is unassigned and should not be connected J card edge UNASSIGNED This pin is unassigned and should not be
10. 50 C to 80 C 122 C to 176 F PCB unit 5 C to 50 C 41 F to 122 F Flow rate setting and output signal 0 VDC to 5 0 VDC Supply power Minimum 15 VDC 2 25 mA Minimum 15 VDC 2 180 mA Power consumption Maximum 3 1 W Gas wetted surface material Note 3 SUS316 SUS316L PTFE Ni KM 45 Standard fitting 1 4 VCR 1 4 SW Mounting position Any direction Weight 1 3 kg 2 9 Ib Options Fither current output O mA to 2 5 mA or error detection function 1 4 MCG fitting Note 1 Accuracy ensures that the calibration gas equivalent flow is 1 of full scale when 22 3 C in temperature is obtained for the primary reference in the specified operating pressure range If the ser vice gas and calibration gas are the same the measured gas is ensured to be 1 of full scale in the specified operating pressure range as to our primary reference Note 2 The proof pressure specification does not ensure operation or accuracy Note 3 The range or response times may vary depending on the vapor or gas properties 5700512 C Specifications and Reference Information 6 5 Advanced Energy Specifications for Model FC 780 MFCs The following table lists specifications for the FC 780 MFCs Table 6 5 Specifications for FC 780 series MFCs Specification Full scale range N equivalent FC 780 FC 780C 10 sccm to 5000 sccm Valve type Nor
11. Flow and temperature sensor Bypass e Electronics e Control valve PC board Control Valve Sensor Gas outlet Gas inlet Figure 2 1 MFC cutaway view 5700512 C Product Overview 2 1 Advanced Energy When gas flows through the MFC it is split into two streams A larger stream is routed through the bypass assembly and a smaller stream that is proportional to the larger stream is routed through the flow sensor The MFC is designed so that the ratio between these two streams remains constant over the entire measurable flow range of the instrument The flow sensor measures the flow of the smaller stream which represents the total gas flow through the MFC The flow sensor consists of a small stainless steel capillary tube with two thermal resistors wound around the outside Current passes through the thermal resistors that function as heaters to warm the sensor tube The thermal resistors form part of a bridge circuit that senses the resistors resistance balance When gas is flowing heat is transferred from the upstream to the downstream thermal resistor The degree of imbalance is proportional to the rate of the gas flow The control valve adjusts gas flow through the MFC based on the flow sensor reading and the set point to ensure a stable gas flow from the MFC For more detailed information regarding the components in the MFC see MFC Compon
12. 3 5 product certification 1 7 purge signal 4 8 R reference information calibration references 6 39 flow indication 6 39 MFC label 6 40 repair returning MFCs for 5 10 requirements power supply 3 5 return authorization number 5 11 returns authorized 5 11 returning MFCs for repair 5 10 warranty statement 5 11 S safety conditions of use 1 7 guidelines 1 6 requirements for installation 3 1 service contact information 5 6 service customer 5 6 set point troubleshooting 5 3 shipping container 3 3 shipping the MFC 5 10 signal descriptions 20 pin connector 4 2 9 pin connector 4 5 size 6 33 specifications 6 1 subminiature D connector 4 5 support customer 5 6 symbols in user manual 1 5 on unit 1 5 T terminal descriptions 20 pin connector 4 2 9 pin connector 4 5 test leak 3 6 theory of operation 2 1 troubleshooting alarm error signal 5 1 no gas 5 2 overview 5 1 procedures 5 1 Index 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs set point and flow 5 3 unstable or insufficient flow 5 4 U unit icons and symbols used 1 5 unit see MFC unpacking the MFC 3 3 user manual interpreting 1 4 models covered by 1 1 symbols and icons used 1 5 type conventions 1 4 V valve assembly 2 4 W Warranty 5 11 warranty authorized returns 5 11 filing a claim 5 11 returning MFCs 5 11 statement 5 12 web site AE 5 6 Z zeroing the MFC 3 9 5700512 C Index Adva
13. 3610C DP 455C and LC OUT NC 2653 Figure 3 2 Connection to peripheral equipment using a dedicated power supply 5700512 C Installation and Operation 3 7 Advanced Energy MFC 1 e e e H MFC 1 output red F bal Output COMMON 5 p black J 8 OV Gray g KA l white green Adjuster 1 Adjuster 2 Adjuster 3 Adjuster 4 Merea PS 74DA C MFC 1 100 Vac H MFC 2 output white control o red white 5 B MFC 2 control white black gg MFC 3 O 2 MFC 3 control yellow black E sa MFC 4 control brown white Adjuster 3610 is used MFC 1 green black H MFC 3 output yellow ein blue white For VALVE positive open close MFC 4 pas MFC 3 green white fa MFC 4 blue black 2 L O black red o 0 V green blue 5 ONG V whitared COMMON a 5 V purple ALARM H brown black ALARM L black green For MFC 1 error detection ALARM OFF green red H MFC 4 output brown ALARM H yellow blue lt ALARM L brown red For MFC 2 error detection 5 L ALARM OFF yellow white 8 5 ALARM H brown green NS li ALARM L white blue For MFC 3 error detection ALARM OFF yellow red f ALARM H red blue Indicator DP 455 is used ALARM L red green For MFC 4 error detection ALARM OFF yellow green 15 Vdc pink 1 Ground and spiral colors are applied in the codes C E N green 2 Treat
14. 780X x x Card edge FC 780XC x x Card edge FC 790 x x Honda 20 pin FC 790C x x Honda 20 pin FC 791 x x Honda 20 pin FC 791C x x Honda 20 pin FC 795 x x Honda 20 pin FC 795C x x Honda 20 pin FC 796 x x Honda 20 pin FC 796C x x Honda 20 pin FC 7700 x x Card edge FC 7700C x x Card edge FC 7700CD x x Subminiature D FC 7700CU x x Card edge FC 7710 x x Card edge FC 7710C x x Card edge FC 7710CD x x Subminiature D FC 7710CU x x Card edge FC 7720 x x Card edge FC 7720C x x Card edge FC 7720CD x x Subminiature D FC 7800 x x Card edge FC 7800C x x Card edge FC 7800CD x x Subminiature D Safety and Product Compliance Guidelines 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs Table 1 1 Standard MFC model numbers Continued Model Control Valve External Seal Connector Number Type Normally Normally Metal Rubber closed Open FC 7800CU x x Card edge FC 7810 x x Card edge FC 7810C x x Card edge FC 7810CD x Subminiature D FC 7810CU x x Card edge FC 7820 x x Card edge FC 7820C x x Card edge FC 785 x x Honda 20 pin FC 785C x x Honda 20 pin FC 786 x x Honda 20 pin FC 786C x x Honda 20 pin Table 1 2 Block type MFC model numbers Model Number FC 7850Y B FC 7850CY B Control Valve Connector Position Normally closed Normally Open X Vertical Lateral FC 785Y B FC 785CY B FC 786Y
15. 8 Specifications for FC 781 series MFCs Specification Full scale range N equivalent FC 781 6 slm to 20 slm FC 781C 6 slm to 50 slm Valve type Normally open Normally closed Response time Maximum 2 of full scale Maximum 2 of full scale within 1 s within 2 s AccuracyN l Under 20 slm maximum 1 of full scale over 20 slm maximum 2 of full scale Linearity Under 20 slm maximum 0 5 of full scale over 20 slm maximum 1 of full scale Repeatability Maximum at 0 2 of full scale External leak rate Maximum 1 x 10 11 Pa m sec He Flow rate control range 2 to 100 Operating pressure range 69 to 275 kPa D 10 to 69 to 294 kPa D 10 to 40 psi D 43 psi D gt 20 slm 98 to 294 kPa D 14 to 43 psi D Proof pressureNote2 981 kPa G 142 psi G Operating temperature 5 C to 45 C 41 F to 113 F Flow rate setting and output signal Supply power 0 VDC to 5 0 VDC Minimum 15 VDC 2 25 mA Minimum 15 VDC 2 180 mA Power consumption Maximum 3 1 W Gas wetted surface material 3 SUS316 SUS316L PTFE Ni KM 45 Standard fitting 1 4 VCR Mounting position Any direction Weight 1 5 kg 3 3 Ib Options Current output 0 mA to 2 5 mA error detection function TC surface treatment Note 1 Accuracy ensures that the calibration gas equivalent flow is 1 of full scale when 22 3 C in
16. Aera 5 12 Troubleshooting and Global Customer Support 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs a apter 6 Specifications and Reference Information This chapter contains information on the specifications of models covered by this manual the dimensions of each model and reference information including information about calibration and labeling MODEL SPECIFICATIONS The following sections list the specifications for the MFC models covered in this manual 5700512 C Specifications and Reference Information 6 1 Advanced Energy Specifications for Model FC 770 MFCs The following table lists specifications for the FC 770 MFCs Table 6 1 Specifications for FC 770 series MFCs Specification Full scale range N equivalent FC 770A FC 770AC 10 sccm to 5000 sccm Valve type Normally open Normally closed Response time Maximum 2 of full scale within 2 seconds AccuracyNo 1 Maximum 1 of full scale Linearity Maximum 0 5 of full scale Repeatability Maximum at 0 2 of full scale External leak rate Maximum 1 x 107 Pam3 sec He Flow rate control range 2 to 100 Operating pressure range 49 to 275 kPa D 7 to 40 psi D Proof pressureNote2 981 kPa G 142 psi G Operating temperature 5 C to 45 C 41 F to 113 F Flow rate setting and output signal 0 VDC to 5 0 VDC Supply power
17. B FC 786CY B a gt lt e J gt a J gt lt FC 785X B FC 785XC B FC 785T B FC 785CT B FC 786T B FC 786CT B FC 795T B K ad 5700512 C Safety and Product Compliance Guidelines 1 3 Advanced Energy Table 1 2 Block type MFC model numbers Continued Model Control Valve Connector Position Number F Normally Normally Vertical Lateral closed Open FC 795CT B x x Note All of these models use a Honda 20 pin connector have metal external seals and have a connection with a flange fitting Table 1 3 High temperature MFC model numbers Model Control Valve External Seal Connector Number Type Normally Normally Metal Rubber closed Open FC 780HT x x Card edge FC 780CHT x x Card edge FC 781HT x x Card edge FC 781CHT x x Card edge INTERPRETING THE MANUAL The following sections explain the document type conventions and the danger warning and caution boxes that provide information about the specific levels of hazard seriousness Type Conventions Please note the following type conventions Pin and signal names appear in capitalized italics POWER_ON New terms appear in italicized text Unit labels switches indicators and so on appear in boldface text MODIFY Commands stx appear in boldface lowercase text Safety and Product Compliance Guidelines 5700512 C
18. C to 176 F PCB unit 5 C to 50 C 41 F to 122 F Flow rate setting and output signal 0 VDC to 5 0 VDC Supply power Minimum 15 VDC 296 25 mA Minimum 15 VDC 2 180 mA Power consumption Maximum 3 1 W Gas wetted surface material 4 SUS316 SUS316L PTFE Ni KM 45 Viton Chloroprene rubber Standard fitting 1 4 VCR SW 3 8 VCR Mounting position Any direction Weight 1 8 kg 4 0 Ib Options Either current output 0 mA to 2 5 mA or error detection function 1 4 MCG fitting Note 1 Accuracy ensures that the calibration gas equivalent flow is 1 of full scale when 22 3 C in temperature is obtained for the primary reference in the specified operating pressure range If the ser vice gas and calibration gas are the same the measured gas is ensured to be 1 of full scale in the specified operating pressure range as to our primary reference Note 2 The proof pressure specification does not ensure operation or accuracy Note 3 The range or response times may vary depending on the vapor or gas properties Note 4 Use of Viton or Chloroprene rubber may be required depending on the intended flow rate range 6 8 Specifications and Reference Information 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs Specifications for Model FC 781 MFCs The following table lists specifications for the FC 781 MFCs Table 6
19. Contents vii Advanced Energy Maintenance aaa eater a tees eee dies He A ered ADA tite ee 3 11 Storage atc cate AA ora ee Acura A ends ae LA Bra tere Sita a ae ets ad eee NA 3 11 Chapter 4 I O Connections and Communication 20 Pin Card Edge Connector and 20 Pin Honda Connector 4 1 Card Edge Connector kk kK KK KK KK KK KK es 4 1 Fonda ConneGtOf lt A s4 4 sa Qa a t a n el an A 0 Ea dak dn 4 2 20 Pin Connector Signal Descriptions KK KK KK KK eee 4 2 9 Pin Subminiature D Connector KK KK KK KK KK KK KK eee 4 5 CONNECION cy ea ete BUWANG kA Bik kan An M weka WNN ie i Hale Der G1 TE al 4 5 Pin and Signal Descriptions kK KK KK KK KK KK eee 4 5 Special Function Signal Descriptions KK KK KK KK KK ee 4 7 Alarm Output Error Detection Signals KK KK KK eee 4 7 Control Valve Purge Function Signals 000 eee 4 8 Card Edge Purge Function Signals 000 eee eee eee 4 9 Honda 20 pin Purge Function Signals 0 00 KK 4 10 Subminiature D Purge Function Signal 2 00000 4 11 Chapter 5 Troubleshooting and Global Customer Support Troubleshooting zi Uma sk Seiten teens Fi l r ek b Gey n D XW BA 23 5004 5 1 Alarm Signals ca ate RANG Peep es k na sew DA wade ee eee halk div le 5 1 Troubleshooting the Gas Flow KK KK KK KK KK KK
20. Continued Pin Signal Name QUTPUT Signal Description Flow output terminal Flow is represented by a signal scaled between 0 VDC and 5 VDC 0 VDC 0 5 VDC 100 of full scale flow 15 VDC For specifications on this signal see the supply power section of the specifications table for the specific MFC model see Model Specifications on page 6 1 UNASSIGNED This pin is unassigned and should not be connected VALVE TEST POINT Terminal for monitoring the voltage of the valve drive The scale is 0 VDC to 13 VDC maximum valve voltage Key card edge 7 Honda KEY or UNASSIGNED The key is a slot in the card edge connector that ensures the connector can not be connected backwards For Honda connectors this pin is unassigned and should not be connected ALARM H This pin provides an alarm output which does not need to be connected For more information see Alarm Output Error Detection Signals on page 4 7 ALARM L This pin provides an alarm output which does not need to be connected For more information see Alarm Output Error Detection Signals on page 4 7 10 ALARM OFF This pin resets the alarm signal on pins 8 and 9 It does not need to be connected For more information see Alarm Output Error Detection Signals on page 4 7 5700512 C I O Connections and Communication 4 3 Advanced Energy
21. FC 7700C FC 7700CD FC 7700CU Full scale range N equivalent 10 sccm to 5000 sccm Valve type Normally Normally closed open Response time Maximum 2 of full scale within 2 seconds AccuracyNote 1 Maximum 1 of full scale Linearity Maximum 0 5 of full scale Repeatability Maximum at 0 2 of full scale External leak rate Maximum 1 x 107 Pa m sec He Flow rate control range 5 to 100 2 to 100 Operating pressure range 49 to 275 kPa D 7 to 40 psi D Proof pressureN te2 981 kPa G 142 psi G Operating temperature 5 C to 45 C 41 F to 113 F Flow rate setting and output signal 0 VDC to 5 0 VDC Supply power Minimum 15 VDC 296 25 mA Minimum 15 VDC 2 180 mA Power consumption Maximum 3 1 W Gas wetted surface material Standard fitting SUS316 SUS316L KM 45 Viton or Chloroprene rubber 1 4 VCR 1 4 SW 1 4 VCO Mounting position Any direction Weight 0 9 kg 2 0 1b Options 1 4 MCG fitting Note 1 Accuracy ensures that the calibration gas equivalent flow is 1 of full scale when 22 3 C in temperature is obtained for the primary reference in the specified operating pressure range If the service gas and calibration gas are the same the measured gas is ensured to be 1 of full scale in the specified operating pressure range as to our primary reference Note 2 The proof pressure specifica
22. FC 772 series MFCs kk kk kK KK KK RR RR KK RR KK 6 4 Table 6 4 Specifications for FC 780HT series MFCs kK kK KERR KK RR 6 5 Table 6 5 Specifications for FC 780 series MFCs kk kK KK RR KK RR RR KS 6 6 Table 6 6 Specifications for FC 780X series MFCs kk KK KEK eee eee 6 7 Table 6 7 Specifications for FC 781HT series MFCs 0 0a 6 8 Table 6 8 Specifications for FC 781 series MFCs aaa 6 9 Table 6 9 Specifications for FC 782 series MFCs 000 cece eee eee 6 10 Table 6 10 Specifications for FC 785 series MFCs kk kK KK cece ee eens 6 11 Table 6 11 Specifications for FC 785T B series MFCs 6 12 Table 6 12 Specifications for model FC 785X B MFC kK KK RR RR KK KS 6 13 Table 6 13 Specifications for FC 785Y B series MFCs 6 14 Table 6 14 Specifications for FC 786 series MFCs kk 6 15 Table 6 15 Specifications for FC 786T B series MFCs 6 16 Table 6 16 Specifications for FC 786Y B series MFCs 6 17 Table 6 17 Specifications for FC 790 series MFCs 0 cece ee eee 6 18 Table 6 18 Specifications for FC 791 series MFCs 6 19 Table 6 19 Specifications for FC 795 series MFCs kk KK KERR RR 6 20 Table 6 20 Specifications for FC 795T B series MFCs 6 21 Table 6 21 Specifications for FC 796 series MFCs kk KK cece eee eee 6 22 Table 6 22 Specifications for FC 7700 series
23. Guidelines IMPORTANT SAFETY INFORMATION To ensure safe installation and operation of the Advanced Energy MEC read and understand this manual before attempting to install and operate this unit At a minimum read and follow the safety instructions and practices documented under Safety Guidelines on page 1 6 MODEL NUMBERS FOR THIS MANUAL This manual applies to the MFC model numbers shown in the following tables Table 1 1 on page 1 1 shows standard MFC model numbers covered by this manual Table 1 2 on page 1 3 shows block type MFC model numbers covered by this manual Table 1 3 on page 1 4 shows high temperature MFCs covered by this manual Table 1 1 Standard MFC model numbers Model Control Valve External Seal Connector Number Type Normally Normally Metal Rubber closed Open FC 770A x x Card edge FC 770AC x x Card edge FC 771A x x Card edge FC 771AC x x Card edge 5700512 C Safety and Product Compliance Guidelines 1 1 Advanced Energy Table 1 1 Standard MFC model numbers Continued Model Control Valve External Seal Connector Number Type Normally Normally Metal Rubber closed Open FC 772 x x Card edge FC 772C x x Card edge FC 780 x x Card edge FC 780C x x Card edge FC 781 x x Card edge FC 781C x x Card edge FC 782 x x Card edge FC 782C x x Card edge FC
24. KK KIR KK IK 5 1 No Gas Is Being Supplied kK KK KK KK KK KK RR ees 5 2 Set Point and Flow Output Do Not Match naaa KK SJ 5 3 Unstable Flow or Insufficient Output Exists 5 4 AE World Wide Web Site a SA kk kk kK KK kK KK KK KK sees KK KI KK KK KK KK KK IK 5 6 AE Global Services ad maa kk kk kk kK kK KK os KK KK KK KK KK KK KK KK kK KK KK Memes 5 6 USA Support Locations 2524525 kk kk kK KK KK KK KK KK KK KK KK KK KK KK KK NAA 5 6 European Sales and Service Contacts kk kk KK KK KK KK RR eee 5 7 Middle East Sales and Service Contacts KK KRA 5 8 Asian Sales and Service Contacts KK KK KK KK KK eee 5 9 Returning MFCs for Repair kk kk KK KK KK KK KK KK ee 5 10 Packing an MFC for Shipping ic ovsereee tee KK KK KK KK KEK KK KK KK 5 10 NAGUGULAT 5 11 Authorized ACWING ss lal 4 rossins epte 4 0 NG KARA KAG NANG aT KB 5 11 Warranty Statement Dang Ka KK KK KK KK KK KK KK KK K KK KK KK KANA 5 12 Chapter 6 Specifications and Reference Information Model Specifications kk kk kK kK KK KK KK KK KK KK KK KK KK KK KK KK KK tes 6 1 Specifications for Model FC 770 MFCs 2 0 2 6 2 Specifications for Model FC 771 MFCs KK KK KK KK KK RR RR KA KK A ee 6 3 viii Table of Contents 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs Specifications for Model FC 772 MFCs VR KK KK KK KK KK KK 6 4 Specifications
25. MFCs 6 23 Table 6 23 Specifications for FC 7710 series MFCs 6 24 Table 6 24 Specifications for FC 7720 series MFCs 6 25 Table 6 25 Specifications for FC 7800 series MFCs 6 26 Table 6 26 Specifications for FC 7810 series MFCs 6 27 Table 6 27 Specifications for FC 7820 series MFCs 6 28 Table 6 28 Specifications for FC 7850Y B series MFCs 6 29 Table 6 29 Specifications for FC 7810 series MFCs 6 30 Table 6 30 Specifications for FC 7820 series MFCs 6 31 Table 6 31 Specifications for FC 7850Y B series MFCs 6 32 Table 6 32 Specifications for FC 785Y B series MFCs 6 33 5700512 C List of Tables xiii Advanced Energy Table 6 33 Dimensions for standard models in mm and inches 6 34 Table 6 34 Dimensions for block type models in mm and inches 6 37 Table 6 35 Dimensions of high temperature MFC units in mm and inches 6 38 Table 6 36 Dimensions of high temperature PCB units in mm and inches 6 38 Table 6 37 Calibration references kk KK KK KK KK eee 6 39 xiv List of Tables 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs N apter 1 Safety and Product Compliance
26. Minimum 15 VDC 2 25 mA Minimum 15 VDC 2 180 mA Power consumption Maximum 3 1 W Gas wetted surface material SUS316 SUS316L KM 45 Viton or Chloroprene rubber Standard fitting 1 4 VCR 1 4 SW 1 4 VCO Mounting position Any direction Weight 0 9 kg 2 0 1b Options Current output 0 mA to 2 5 mA 1 4 MCG fitting Standard equipment Error detection function Note 1 Accuracy ensures that the calibration gas equivalent flow is 1 of full scale when 22 3 C in temperature is obtained for the primary reference in the specified operating pressure range If the service gas and calibration gas are the same the measured gas is ensured to be 1 of full scale in the specified operating pressure range as to our primary reference Note 2 The proof pressure specification does not ensure operation or accuracy 6 2 Specifications and Reference Information 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs Specifications for Model FC 771 MFCs The following table lists specifications for the FC 771 MFCs Table 6 2 Specifications for FC 771 series MFCs Specification Full scale range N equivalent FC 771A 6 slm to 20 slm FC 771AC 6 slm to 50 slm Valve type Normally open Normally closed Response time Maximum 2 of full scale within 2 seconds AccuracyNote l Under 20 slm maxi
27. Model Specifications on page 6 1 POWER COMMON Common line that carries the majority of the MFC operating current Note POWER COMMON pin 4 and SIGNAL COMMON pins 7 and 8 must be connected at the power supply 15 VDC For specifications on this signal see the supply power section of the specifications table for the specific MFC model see Model Specifications on page 6 1 SET POINT Analog flow control signal The signal range is 0 VDC to 5 VDC 0 VDC 0 e 5 VDC 100 of full scale flow SIGNAL COMMON Return for control signals Note POWER COMMON pin 4 and SIGNAL COMMON pins 7 and 8 must be connected at the power supply 4 6 I O Connections and Communication 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs Table 4 2 9 pin connector signal descriptions Pin Signal Signal Description Name 8 SIGNAL See pin 7 COMMON 9 VALVE Test point signal indicating the position of the TEST POINT control valve e Open 13 VDC e Closed 0 VDC SPECIAL FUNCTION SIGNAL DESCRIPTIONS The following sections provide detailed signal information for signals that are dedicated to specific functions Alarm Output Error Detection Signals Not all MFC models provide these signals To see if your model provides alarm output signals see the specifications for the MFC model in question see Model Specificatio
28. RR RR KK 6 27 Specifications for Model FC 7820 MFCs kk KK KK KK RR RR RR RR KK 6 28 Specifications for Model FC 7850Y B MFCs 44K KK KK RR RR RR KK 6 29 Specifications for Model FC 7810 MFCs YKY 6 30 Specifications for Model FC 7820 MFCs KK KK KK KK KK eee KAK 6 31 Specifications for Model FC 7850Y B MFCs 000 RR KK 6 32 Specifications for Model FC 785Y B MFCs KK KK KK RRA 6 33 MPG DIM NSIONS va A a sina kan d Ena d de Ak din dk A EE SRS eR EV MI 0 48nd di 6 33 Dimensions for Standard MFC Models XW KK KK KK KK KIRR RR eee 6 34 Dimensions For Block Type MFC Models XL KK KK KK RR KK KK 6 37 Dimensions for High Temperature MFC Models 6 38 Reference Information kk kk KK KK KK KK KK KK KK KK K KK KK KK KK RR KK 6 39 Calibration References i kk kk kk kk kk KK KK KK KK KK KK KK KK KK KK KK 6 39 Flow Indication lk kk kk kk kK kK KK KK KK KK KK K K KK K KK KK KK RR KK 6 39 Product Label oise asa a aha kk kay naka kl a kal es a es 6 40 5700512 C Table of Contents ix Advanced Energy x Table of Contents 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs List of Figures Figure 2 1 MFC cutaway VIEW ap aga kk kk kk kK KK KK KK KK KK KK KK KK KK KK KK KK kk 2 1 Figure 2 2 MFC functional block diagram kk kK KK KK KK KK KK KK KK 2 3 Figure 3 1 Connection to peripheral equipment using a RO Box power supply 3 6 Fig
29. Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs Danger Warning and Caution Boxes or associated equipment Advanced Energy includes this symbol in Danger This symbol represents important notes concerning potential harm to people this unit Warning and Caution boxes to identify specific levels of hazard seriousness DANGER DANGER indicates an imminently hazardous situation that if not avoided will result in death or serious injury DANGER is limited to the most extreme situations A WARNING WARNING indicates a potentially hazardous situation that if not avoided could result in death or serious injury and or property damage AN CAUTION CAUTION indicates a potentially hazardous situation that if not avoided could result in minor or moderate injury and or damage to property CAUTION is also used for property damage only accidents Interpreting Product Labels The following labels may appear on your unit CE label 1020 Refer to manual for more information 5700512 C Safety and Product Compliance Guidelines 1 5 Advanced Energy SAFETY GUIDELINES Review the following information before attempting to install and operate the product WARNING Do not attempt to install or operate this equipment if you have not first reviewed this manual WARNING Hazardous voltages exist inside the mass flow controller MFC Do not remove the MFC cover Do not install s
30. Specifications for FC 7850Y B series MFCs Specification Full scale range N equivalent FC 7850Y B FC 7850CY B 10 sccm to 5000 sccm Valve type Normally open Normally closed Response time Maximum 2 of full scale within 2 s Accuracy Maximum 1 of full scale Linearity Maximum 0 5 of full scale Repeatability Maximum at 0 2 of full scale External leak rate Maximum 1 x 10 Pa m3 sec He Flow rate control range 5 to 100 Operating pressure range 49 to 275 kPa D 7 to 40 psi D Proof pressure 981 kPa G 142 psi G Operating temperature 5 C to 45 C 41 F to 113 F Flow rate setting and output signal 0 VDC to 5 0 VDC Supply power Minimum 15 VDC 2 25 mA Minimum 15 VDC 2 180 mA Power consumption Maximum 3 1 W Gas wetted surface material SUS316 SUS316L PTFE KM 45 Mounting position Any direction Weight 1 3 kg 2 9 Ib Options TC surface treatment Note 1 Accuracy ensures that the calibration gas equivalent flow is 1 of full scale when 22 3 C in temperature is obtained for the primary reference in the specified operating pressure range If the ser vice gas and calibration gas are the same the measured gas is ensured to be 1 of full scale in the specified operating pressure range as to our primary reference Note 2 The proof pressure specification does not ensure operatio
31. connected 18 Honda K card edge UNASSIGNED This pin is unassigned and should not be connected 19 Honda L card edge UNASSIGNED This pin is unassigned and should not be connected 20 Honda 4 4 I O Connections and Communication 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs 9 PIN SUBMINIATURE D CONNECTOR Connector Figure 4 3 shows the pin numbers on the 9 pin subminiature D connector Pin 1 1017 Figure 4 3 9 pin subminiature D connector Pin and Signal Descriptions Table 4 2 provides the pin and signal descriptions for the 9 pin subminiature D connector 5700512 C I O Connections and Communication 4 5 Advanced Energy Table 4 2 9 pin connector signal descriptions Pin Signal Name VALVE OPEN CLOSED Signal Description This signal controls the position of the control valve and allows you to use the purge function on the MFC Open Common or 15 VDC e Closed 15 VDC e Normal Floating For more information see Control Valve Purge Function Signals on page 4 8 Note Complete shut off of a gas cannot be achieved by the control valve of an MFC OUTPUT Analog flow output signal The signal range is 0 VDC to 5 VDC 0 VDC 0 e 5 VDC 100 of full scale flow 15 VDC For specifications on this signal see the supply power section of the specifications table for the specific MFC model see
32. in the specified operating pressure range as to our primary reference Note 2 The proof pressure specification does not ensure operation or accuracy 6 6 Specifications and Reference Information 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs Specifications for Model FC 780X MFCs The following table lists specifications for the FC 780X MFCs Table 6 6 Specifications for FC 780X series MFCs Specification Full scale range N equivalent FC 780X FC 780XC 10 sccm to 5000 sccm Valve type Normally open Normally closed Response time Maximum 2 of full scale within 1 s AccuracyNote Maximum 1 of full scale Linearity Maximum 0 5 of full scale Repeatability Maximum at 0 2 of full scale External leak rate Maximum 1 x 10 Pa m3 sec He Flow rate control range 2 to 100 Operating pressure range 49 to 275 kPa D 7 to 29 4 to 294 kPa D 4 to 40 psi D 43 psi D Proof pressureNote 2 981 kPa G 142 psi G Operating temperature 5 C to 45 C 41 F to 113 F Flow rate setting and output signal 0 VDC to 5 0 VDC Supply power Minimum 15 VDC 296 25 mA Minimum 15 VDC 2 180 mA Power consumption Maximum 3 1 W Gas wetted surface material SUS316 SUS316L PTFE KM 45 Standard fitting 1 4 VCR 1 4 SW Mounting position Any direction Weight 1 2
33. kk kK KK kK KK KK KK KK KK KK kk KK kK kk kk k 2 4 Chapter 3 Installation and Operation Preparing to Install the Unit A kk kk KK KK KK KK KK KK es 3 1 Installation Requirements kk kK KK KK KK KK KK ee 3 1 Installing the Unit 44 4 saa KARERANG kk kk KK KK KK KK GMA SEES IK KK KK K KK KK KK kK 3 2 Overview of Unit Installation KK KK KK KK KK KK KK RR KK KK KK gt 3 2 Confirming the MFC Model a kK KK KK KK KK KK KK KK KK KK KK KK KK 3 3 Preparing the Installation Site 2 0 2 kk KK KK KK KK KK KK KK RR KK KK 3 3 Unpacking the MFC kk kk kk kk kk KK KK KK KK KK KK KK KK KK KK KK KK kK es 3 3 Positioning the MFC wa paaa mag kk kk kk KK KK KK KK KK KK KK KK KK KK KK KK KK kk 3 3 Mounting the MFC kk kk kk kK kK KK KK KK KK KK tee 3 4 Making the Mechanical Connections KK KK KK 3 4 Making the Electrical Connection 00000 KK eee 3 5 Power Supply Requirements KK KK KK KK KK KK KK KK ee 3 5 Ground Connections kk kk KK KK KK KK KK KK KK KK KK KK KK kK 3 5 Testing the System for Leaks kK KK KK KK KK KK KK KE KK KK 3 6 Connecting the MFC to Peripheral Equipment 0 RR KK KK 3 6 Operating the Unit kk kk kk kK KK KK KK KK KK GRR KLANG KK KK KK KK KK KK K 3 8 First Time Operation kk kk kk KK KK KK KK KK KK KK KK KK KK KK KK KK 3 9 Zeroing the MPG vk ss s da Ain aa ka s MAR AMAN dk ka d HORE dk REE ORS 3 9 5700512 C Table of
34. measured gas is ensured to be 1 of full scale in the specified operating pressure range as to our primary reference Note 2 The proof pressure specification does not ensure operation or accuracy 6 12 Specifications and Reference Information 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs Specifications for Model FC 785X B MFC The following table lists specifications for the FC 785X B MFC Table 6 12 Specifications for model FC 785X B MFC Specification Full scale range N equivalent FC 785XC B 10 sccm to 5000 sccm Valve type Normally closed Response time Maximum 2 of full scale within 1 s Accuracy 1 Maximum 1 of full scale Linearity Maximum 0 5 of full scale Repeatability Maximum at 0 2 of full scale External leak rate Maximum 1 x 10 11 Pa m sec He Flow rate control range 2 to 100 Operating pressure range 49 to 275 kPa D 7 to 40 psi D Proof pressureNote2 981 kPa G 142 psi G Operating temperature 5C to 45 C 41 F to 113 F Flow rate setting and output signal 0 VDC to 5 0 VDC Supply power Minimum 15 VDC 2 25 mA Minimum 15 VDC 2 180 mA Power consumption Maximum 3 1 W Gas wetted surface material SUS316 SUS316L PTFE KM 45 Mounting position Any direction Weight 1 0 kg 2 2 1b Options Current output 0 mA to 2 5 mA err
35. operation or accuracy 5700512 C Specifications and Reference Information Advanced Energy Specifications for Model FC 772 MFCs The following table lists specifications for the FC 772 MFCs Table 6 3 Specifications for FC 772 series MFCs Specification Full scale range N equivalent FC 772 FC 772C 35 slm to 150 slm Valve type Normally open Normally closed Response time Within 3 s typical 2 at 50 to 100 and 100 to 50 AccuracyN0t 1 Maximum 2 of full scale Linearity Maximum 1 of full scale Repeatability Maximum at 0 2 of full scale External leak rate Maximum 1 x 107 Pam3 sec He Flow rate control range 2 to 100 Operating pressure range 147 to 275 kPa D 21 to 40 psi D Proof pressure 981 kPa G 142 psi G Operating temperature 5C to 45 C 41 F to 113 F Flow rate setting and output signal 0 VDC to 5 0 VDC Supply power Minimum 15 VDC 2 25 mA Minimum 15 VDC 2 220 mA Power consumption Maximum 3 7 W Gas wetted surface material 3 SUS316 SUS316L PTFE KM 45 Viton or Chloroprene rubber Standard fitting 1 4 VCR 3 8 VCR 1 4 SW 3 8 SW Mounting position Any direction Weight 2 6 kg 5 7 Ib Options Current output 0 mA to 2 5 mA error detection function 1 4 VCO fitting 3 8 VCO fitting TC surface treatment Note 1 Accu
36. output 0 mA to 2 5 mA error detection function TC surface treatment Note 1 Accuracy ensures that the calibration gas equivalent flow is 1 of full scale when 22 3 C in temperature is obtained for the primary reference in the specified operating pressure range If the service gas and calibration gas are the same the measured gas is ensured to be 1 of full scale in the specified operat ing pressure range as to our primary reference Note 2 The proof pressure specification does not ensure operation or accuracy Note 3 Use of Viton or Chloroprene rubber may be required depending on the intended flow rate range 6 16 Specifications and Reference Information 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs Specifications for Model FC 786Y B MFCs The following table lists specifications for the FC 786Y B MFCs Table 6 16 Specifications for FC 786Y B series MFCs Specification Full scale range N equivalent FC 786Y B 6 slm to 30 slm FC 786CY B 6 slm to 50 slm Valve type Normally open Normally closed Response time Maximum 2 of full scale within 1 s AccuracyNote j Under 20 slm maximum 1 of full scale over 20 slm maximum 2 of full scale Linearity Under 20 slm maximum 0 5 of full scale over 20 slm maximum 1 of full scale Repeatability Maximum at 0 2 of full scale External leak rate Maximum 1 x 10 11 Pa m
37. position Any direction Weight 0 9 kg 2 0 1b Note 1 Accuracy ensures that the calibration gas equivalent flow is 1 of full scale when 22 3 C in temperature is obtained for the primary reference in the specified operating pressure range If the service gas and calibration gas are the same the measured gas is ensured to be 1 of full scale in the specified operating pressure range as to our primary reference Note 2 The proof pressure specification does not ensure operation or accuracy 6 24 Specifications and Reference Information 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs Specifications for Model FC 7720 MFCs The following table lists specifications for the FC 7720 MFCs Table 6 24 Specifications for FC 7720 series MFCs Specification Full scale range N equivalent FC 7720 FC 7720C FC 7720CD 35 slm to 150 slm Valve type Normally open Normally closed Response time Maximum 2 of full scale within 4 s Accuracy Maximum 2 of full scale Linearity Maximum 1 of full scale Repeatability Maximum at 0 2 of full scale External leak rate Maximum 1 x 107 Pam 3 sec He Flow rate control range 2 to 100 Operating pressure range 147 to 275 kPa D 21 to 40 psi D Proof pressureNote 2 981 kPa G 142 psi G Operating temperature 5C to 45 C 41 F to 113 F Flow rate
38. read back and alarm indications 20 PIN CARD EDGE CONNECTOR AND 20 PIN HONDA CONNECTOR Card Edge Connector Figure 4 1 shows the pin names on the card edge connector s OO 9 7 9 O1 BI wo N o TPA OC 7 ay ms oy oO oa gt Figure 4 1 20 pin card edge connector 5700512 C I O Connections and Communication 4 1 Advanced Energy Honda Connector Figure 4 2 shows the pin numbers on the 20 pin Honda connector 9 o N T 9 a wo N N o a o Figure 4 2 20 pin Honda connector 20 Pin Connector Signal Descriptions Table 4 1 provides the pin and signal descriptions for the 20 pin card edge connector and the 20 pin Honda connector Table 4 1 20 pin connector signal descriptions Pin Signal Name Signal Description 1 CASE GND Case ground terminal This terminal is connected to the base of the MFC All other terminals must be insulated from this terminal 2 POWER Common line that carries the majority of the COMMON MFC operating current Note POWER COMMON pin 2 and SIGNAL COMMON pins B and C for the card edge connector pins 12 and 13 for the Honda connector must be connected at the power supply 4 2 I O Connections and Communication 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs Table 4 1 20 pin connector signal descriptions
39. shown in Figure 3 4 Counterclockwise decrease in output Clockwise increase in output Zero point adjustment hole lt 2656 Figure 3 4 MFC zero point adjustment 3 10 Installation and Operation 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs MAINTENANCE Recalibration and repair should be performed by Advanced Energy See AE Global Services on page 5 6 for contact information Note Removal of an MFC should be done only after adequate purging with a nonreactive gas such as nitrogen gas N5 You should follow your company procedures for removing gas line components Reactive gas calibrated MFCs may receive severe contamination or corrosion from exposure to air or moisture Check plumbing for leaks and purge thoroughly with dry nitrogen before operating or disconnecting from the system STORAGE Observe the following requirements when placing an MFC in storage Temperature between 5 C 41 F and 45 C 113 F e Relative humidity less than 60 Additionally prevent any mechanical impact or corrosion 5700512 C Installation and Operation 3 11 Advanced Energy 3 12 Installation and Operation 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs aa apter 4 O Connections and Communication The following sections provide information on the MFC s electrical connectors and communication interfaces for MFC control
40. specification does not ensure operation or accuracy 6 32 Specifications and Reference Information 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs Specifications for Model FC 785Y B MFCs The following table lists specifications for the FC 785Y B MFCs Table 6 32 Specifications for FC 785Y B series MFCs Specification Full scale range N equivalent FC 785Y B FC 785CY B 10 sccm to 5000 sccm Valve type Normally open Normally closed Response time Maximum 2 of full scale within 1 s Accuracy Maximum 1 of full scale Linearity Maximum 0 5 of full scale Repeatability Maximum at 0 2 of full scale External leak rate Maximum 1 x 10 Pa m3 sec He Flow rate control range 2 to 100 Operating pressure range 49 to 275 kPa D 7 to 40 psi D Proof pressure 981 kPa G 142 psi G Operating temperature 5 C to 45 C 41 F to 113 F Flow rate setting and output signal 0 VDC to 5 0 VDC Supply power Minimum 15 VDC 2 25 mA Minimum 15 VDC 2 180 mA Power consumption Maximum 3 1 W Gas wetted surface material SUS316 SUS316L PTFE Ni KM 45 Mounting position Any direction Weight 1 3 kg 2 9 Ib Options Current output 0 mA to 2 5 mA error detection TC surface treatment Note 1 Accuracy ensures that the calibration gas equivalent flow is 1 of fu
41. temperature is obtained for the primary reference in the specified operating pressure range If the service gas and calibration gas are the same the measured gas is ensured to be 1 of full scale in the specified operat ing pressure range as to our primary reference Note 2 The proof pressure specification does not ensure operation or accuracy Note 3 Use of Viton or Chloroprene rubber may be required depending on the intended flow rate range 5700512 C Specifications and Reference Information 6 9 Advanced Energy Specifications for Model FC 782 MFCs The following table lists specifications for the FC 782 MFCs Table 6 9 Specifications for FC 782 series MFCs Specification Full scale range N equivalent FC 782 FC 782C 35 slm to 150 slm Valve type Normally open Normally closed Response time Within 3 s typical 2 AccuracyNote 1 Maximum 2 of full scale Linearity Maximum 1 of full scale Repeatability Maximum at 0 2 of full scale External leak rate Maximum 1 x 10 11 Pa m sec He Flow rate control range 2 to 100 Operating pressure range 147 to 275 kPa D 21 to 40 psi D Proof pressureNote2 981 kPa G 142 psi G Operating temperature 5 C to 45 C 41 F to 113 F Flow rate setting and output signal 0 VDC to 5 0 VDC Supply power Minimum 15 VDC 2 25 mA Minimum 15 VDC 2 220 mA Power consumption M
42. 0Y B MFCs The following table lists specifications for the FC 7850Y B MFCs Table 6 31 Specifications for FC 7850Y B series MFCs Specification FC 7850Y B FC 7850CY B Full scale range N equivalent 10 sccm to 5000 sccm Valve type Normally open Normally closed Response time Maximum 2 of full scale within 2 s AccuracyN0t 1 Maximum 1 of full scale Linearity Maximum 0 5 of full scale Repeatability Maximum at 0 2 of full scale External leak rate Maximum 1 x 10 1 Pam3 sec He Flow rate control range 5 to 100 Operating pressure range 49 to 275 kPa D 7 to 40 psi D Proof pressure 2 981 kPa G 142 psi G Operating temperature 5 C to 45 C 41 F to 113 F Flow rate setting and output signal 0 VDC to 5 0 VDC Supply power Minimum 15 VDC 2 25 mA Minimum 15 VDC 2 180 mA Power consumption Maximum 3 1 W Gas wetted surface material SUS316 SUS316L PTFE KM 45 Mounting position Any direction Weight 1 3 kg 2 9 Ib Options TC surface treatment Note 1 Accuracy ensures that the calibration gas equivalent flow is 1 of full scale when 22 3 C in temperature is obtained for the primary reference in the specified operating pressure range If the ser vice gas and calibration gas are the same the measured gas is ensured to be 1 of full scale in the specified operating pressure range as to our primary reference Note 2 The proof pressure
43. 50 4 80 1 26 0 71 2 72 6 34 Specifications and Reference Information 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs Table 6 33 Dimensions for standard models in mm and inches Continued Model L S H W L1 L2 FC 790 790C 124 4 88 12 7 125 38 18 6 38 2 second numbers 0 50 4 92 1 50 0 73 1 50 under L1 and L2 refer 18 69 to additional mount ing holes 0 71 2 72 FC 791 791C 124 4 88 12 7 131 6 38 18 6 38 2 second numbers 0 50 5 18 1 50 0 73 1 50 under L1 and L2 refer 18 69 to additional mount ing holes 0 71 2 72 FC 795 795C 106 4 17 12 7 125 38 16 29 0 50 4 92 1 50 0 63 1 14 FC 796 796C 106 4 17 12 7 131 6 38 16 29 0 50 5 18 1 50 0 63 1 14 FC 7700 7700C 124 4 88 12 7 127 32 22 66 0 50 5 00 1 26 0 87 2 60 FC 7700CD 7700CU 124 4 88 12 7 125 32 18 3 69 0 50 4 92 1 26 0 72 2 72 FC 7710 7710C 124 4 88 15 127 32 22 66 0 59 5 00 1 26 0 87 2 60 FC 7710CD 7710CU 124 4 88 12 7 125 32 18 3 69 0 50 4 92 1 26 0 72 2 72 FC 7720 7720C 1 4 VCR fitting 15 152 6 37 5 25 5 101 5 7720CD 183 8 7 24 0 59 6 01 1 48 1 00 4 00 3 8 VCR fitting 192 3 7 6 FC 7800 7800C 124 4 88 12 7 122 32 18 69 0 50 4 80 1 26 0 71 2 72 FC 7800CD 7800CU 124 4 88 12 7 125 32 18 69 0 50
44. 516 9305 Troubleshooting and Global Customer Support 5 9 Advanced Energy RETURNING MFCS FOR REPAIR Before returning any product for repair and or adjustment first follow all troubleshooting procedures If after following these procedures you still have a problem or if the procedure instructs you to contact AE Global Services and discuss the problem with a representative Be prepared to give the model number and serial number of the MFC as well as the reason for the proposed return This consultation call allows Global Services to determine whether the problem can be corrected in the field or if the MFC needs to be returned Such technical consultation is always free of charge If you return an MFC without first getting authorization from Global Services and that MFC is found to be functional you will be charged a re test and calibration fee plus shipping charges If you have received authorization for return see Packing an MFC for Shipping on page 5 10 for more information on packing the MFC for shipping To ensure years of dependable service Advanced Energy products are thoroughly tested and designed to be among the most reliable and highest quality systems available worldwide Packing an MFC for Shipping Prior to shipping an MFC back to AE for repair or return you must receive authorization from AE Global Services For more information see Returning MFCs for Repair on page 5 10 Obser
45. 700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs Specifications for Model FC 795T B MFCs The following table lists specifications for the FC 795T B MFCs Table 6 20 Specifications for FC 795T B series MFCs Specification Full scale range N equivalent FC 795T B FC 795CT B 10 sccm to 5000 sccm Valve type Normally open Normally closed Response time Maximum 2 of full scale within 1 s Accuracy Maximum 1 of full scale Linearity Maximum 0 5 of full scale Repeatability Maximum at 0 2 of full scale External leak rate Maximum 1 x 10 1 Pa m sec He Flow rate control range 2 to 100 Operating pressure In 49 to 275 kPa G 7 to 40 psi G tange Out Atmosphere to vacuum 0 kPa G 0 kPa A Proof pressureN te2 981 kPa G 142 psi G Operating temperature 5 C to 45 C 41 F to 113 F Flow rate setting and output signal 0 VDC to 5 0 VDC Supply power Minimum 15 VDC 2 25 mA Minimum 15 VDC 2 180 mA Power consumption Maximum 3 1 W Gas wetted surface material SUS316 SUS316L PCTFE PTFE Mounting position Any direction Weight 1 2 kg 2 6 Ib Options Current output 0 mA to 2 5 mA error detection function TC surface treatment Note 1 Accuracy ensures that the calibration gas equivalent flow is 1 of full scale when 22 3 C in temperature is obtained fo
46. 85XC B 68 2 68 180 7 09 40 1 57 99 5 6 5 38 15 maximum maximum 3 92 0 26 1 50 0 59 39 9 1 57 5700512 C Specifications and Reference Information 6 37 Advanced Energy Dimensions for High Temperature MFC Models Figure 6 3 Table 6 35 and Table 6 36 provide physical dimensions for the high temperature MFC model numbers for both the MFC unit and the PCB unit H1 H S L3 L j 15 m2 2667 Figure 6 3 Dimensions for high temperature MFC models Table 6 35 Dimensions of high temperature MFC units in mm and inches Model L S H W L1 L2 FC 780HT 780CHT 124 12 7 107 32 18 69 4 88 0 50 4 21 1 26 0 71 2 72 FC 781HT 781CHT 151 19 113 38 28 46 5 94 0 75 4 45 1 50 1 10 1 81 Table 6 36 Dimensions of high temperature PCB units in mm and inches Model L3 H1 W1 L4 L5 FC 780HT 780CHT 102 84 32 22 92 4 02 3 31 1 26 0 87 3 62 FC 781HT 781CHT 102 84 32 22 92 4 02 3 31 1 26 0 87 3 62 6 38 Specifications and Reference Information 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs REFERENCE INFORMATION The following sections contain calibration references as well as MFC label and model code information for the MFC Calibration References In order to ensure MFC cleanliness AE
47. 9130 Petah Tikva Contact Information Phone 972 3 922 83 15 FAX 972 3 922 84 04 Troubleshooting and Global Customer Support 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs Asian Sales and Service Contacts Table 5 5 Pacific Rim sales and service offices Pacific Rim Offices Contact Information AE China Phone 86 21 58579011 469 Huaxia Dong Road FAX 86 21 58579003 Zhang Jiang Town Shanghai China 201203 AE Japan K K Phone 81 426 45 8125 2971 8 Ishikawa cho Hachioji Tokyo 192 0032 Japan FAX 81 426 44 0779 AE Korea Ltd sales office 613 Amigo Tower 358 2 Yatop dong Bundang ku Sungam Si Kyunggi 463 070 Korea AE Korea Ltd service office Gongduk Building 4th floor 272 6 Seohyun Dong Bundang Gu Sungam Si Kyunggi 463 050 Korea Phone 82 0 31 622 0555 FAX 82 0 31 622 0556 Phone 82 0 31 705 2100 FAX 82 0 31 705 2766 Malaysia Penang and Kuching service office APP Systems Services Pte Ltd 1048 Jalan Dato Ismail Hashim Sungei Ara 11900 Bayan Lepas Penang West Malaysia Phone 604 6467758 Singapore sales and service office APP Systems Services Pte Ltd 11 Toh Guan Road East 03 01 APP Enterprise Building Singapore 608603 Phone 65 64256611 FAX 65 65606616 AE Taiwan Ltd Hsin Chu Branch 5F 12 No 81 Shui Li Road Hsin Chu Taiwan Phone 886 0 3 516 9301 FAX 886 0 3
48. C 79X MFCs Specifications for Model FC 7810 MFCs The following table lists specifications for the FC 7810 MFCs Table 6 26 Specifications for FC 7810 series MFCs Specification Full scale range N equivalent FC 7810 FC 7810C FC 7810CD FC 7810CU 6 slm to 30 slm 6 slm to 50 slm 6 slm to 30 slm Valve type Normally open Normally closed Response time Maximum 2 of full scale within 2 seconds AccuracyNote Under 20 slm maximum 1 of full scale over 20 slm maximum of 2 of full scale Linearity Under 20 slm maximum 0 5 of full scale over 20 slm maximum of 1 of full scale Repeatability Maximum at 0 2 of full scale External leak rate Maximum 1 x 10 1 Pa m sec He Flow rate control range 5 to 100 Operating pressure range 69 to 69 to 69 to 275 kPa D 10 to 40 275 kPa D 10 275 kPa D 10 psi D to 40 psi D to 40 psi D gt 20 slm 98 to 275 kPa D 14 gt 20 sim 147 to 275 kPa D 21to gt 20 slm 98 to 294 kPa D 14 to 40 psi D 40 psi D to 43 psi D Proof pressure 981 kPa G 142 psi G Operating temperature 5C to 45 C 41 F to 113 F Flow rate setting and output signal 0 VDC to 5 0 VDC Supply power Minimum 15 VDC 2 25 mA Minimum 15 VDC 2 180 mA Power consumption Maximum 3 1 W Gas wetted surface material 3 SUS316 SUS316L PTFE Ni KM 45 Viton Chloroprene rubber
49. INE ADVANCED ENERGY Mass Flow Controllers Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X June 2006 5700512 C AERA PRODUCTS OU User Manual User Manual Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs ADV ADVAN ED 5700512 C Advanced Energy COPYRIGHT This manual and the information contained herein is the proprietary property of Advanced Energy Industries Inc No part of this manual may be reproduced or copied without the express written permission of Advanced Energy Industries Inc Any unauthorized use of this manual or its contents is strictly prohibited Copyright 2006 Advanced Energy Industries Inc All Rights Reserved DISCLAIMER AND LIMITATION OF LIABILITY The information contained in this manual is subject to change by Advanced Energy Industries Inc without prior notice Advanced Energy Industries Inc makes no warranty of any kind whatsoever either expressed or implied with respect to the information contained herein Advanced Energy Industries Inc shall not be liable in damages of whatever kind as a result of the reliance on or use of the information contained herein PRODUCT USAGE STATEMENT A WARNING Read this entire manual and all other publications pertaining to the work to be performed before you install operate or maintain this equipment Practice all plant and product safety instructions and precautions Failure to follow instructions can
50. Pa D 21 to 40 psi D Proof pressureNote2 981 kPa G 142 psi G Operating temperature 5C to 45 C 41 F to 113 F Flow rate setting and output signal 0 VDC to 5 0 VDC Supply power Minimum 15 VDC 296 25 mA Minimum 15 VDC 2 220 mA Power consumption Maximum 3 7 W Gas wetted surface material Note 3 SUS316 SUS316L PTFE KM 45 Standard fitting N0 4 1 4 VCR 3 8 VCR Mounting position Any direction Weight 2 8 kg 6 2 Ib range N equivalent Note 1 Accuracy ensures that the calibration gas equivalent flow is 1 of full scale when 22 3 C in temperature is obtained for the primary reference in the specified operating pressure range If the service gas and calibration gas are the same the measured gas is ensured to be 1 of full scale in the specified operating pressure range as to our primary reference Note 2 The proof pressure specification does not ensure operation or accuracy Note 3 PTFE Viton or chloroprene rubber may be required depending on the intended flow rate range Note 4 3 8 VCR fitting or 3 8 UJR fitting is required if 100 slm or more is derived from full scale 6 28 Specifications and Reference Information 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs Specifications for Model FC 7850Y B MFCs The following table lists specifications for the FC 7850Y B MFCs Table 6 28
51. U central processing unit The CPU compares the set point signal to the sensor reading to generate a signal to drive the control valve Valve Assembly The valve assembly consists of a normally closed or normally open solenoid control valve 2 4 Product Overview 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs ar apter 3 Installation and Operation PREPARING TO INSTALL THE UNIT The following sections provide information that you need to understand before installing the MFC Installation Requirements Install the MFC according to the following requirements A WARNING Operating and maintenance personnel must receive proper training before installing troubleshooting or maintaining this equipment Do not use this product for medical or life support purposes Use the appropriate tube size for the MFC fitting The MFC does not come with mounting screws and gaskets The selection and preparation of appropriate screws and gaskets is your responsibility Note For product and attachment dimensions see MFC Dimensions on page 6 33 e Connect the MFC with the gas flowing in line with the arrow marked on the front of the MFC Make the electrical connection according to the instructions in Making the Electrical Connection on page 3 5 Use optional functions such as error detection and the purge function according to the relevant instructions e Perform the g
52. WIDE WEB SITE For additional product information consult Advanced Energy s World Wide Web Site e http www advanced energy com AE GLOBAL SERVICES Please contact one of the following offices if you have questions Note When calling AE Global Services make sure to have the unit serial number and part number These numbers are available on unit labels USA Support Locations Table 5 1 AE Global Services locations USA USA Offices Contact Information AE World Headquarters Phone 24 hrs day 7 days week 800 446 9167 or 1625 Sharp Point Drive 970 221 0108 Fort Collins CO 80525 USA FAX M F 7 00 am 5 30 pm MST Note For returns and repairs please 970 407 5981 call Global Services to get the E Email technical support aei com correct shipping address We will respond to email by the next business day Note For customers outside the US please contact your local AE office Austin Texas Phone 8601 Cross Park Dr Suite 100 800 MFC AERA Austin TX 78754 512 339 7100 FAX 512 339 8889 5 6 Troubleshooting and Global Customer Support 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs Table 5 1 AE Global Services locations USA Continued USA Offices Dallas Texas 13490 Floyd Rd 108 Dallas TX 75243 Contact Information Phone 972 231 9333 FAX 972 231 9446 San Jose California 6389 San Ignacio Avenue S
53. Z77 COMMON 0 V 2663 VCC 14 4 V Figure 4 6 Card edge normally open internal circuitry for purge function 5700512 C I O Connections and Communication 4 9 Advanced Energy RosS 68 K 777 COMMON 0 V CN1 R99 Hm an a n VALVE CLOSEJOPEN et K OPEN SIGNAL COMMON VALVE OPEN O Roa Sa7 K 15 V VALVE CLOSE VDD 5V CLOSE SIGNAL O VCC VEE 2662 14 4 V 11 V Figure 4 7 Card edge normally closed internal circuitry for purge function HONDA 20 PIN PURGE FUNCTION SIGNALS For the Honda 20 pin connector normally open and normally closed valves use the same connection However the internal MFC circuitry is different for normally open and normally closed MFCs Figure 4 8 shows the connection for the purge function Figure 4 9 and Figure 4 10 show the internal circuitry for normally open and normally closed MFCs respectively To check whether an MFC is normally closed or normally open see Model Numbers for this Manual on page 1 1 Connection terminal o 15 Vdc open VALVE OPEN CLOSE 14 o COMMON close COMMON terminal should be common with the MFC M F C 2660 To disengage this function disconnect the MFC terminal Figure 4 8 Honda 20 pin purge function connection 4 10 I O Connections and Communication 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs
54. ale over 20 slm maximum 1 of full scale Repeatability Maximum at 0 2 of full scale External leak rate Maximum 1 x 10 11 Pa m sec He Flow rate control range 2 to 100 Operating pressure range 69 to 275 kPa D 10 to 69 to 275 kPa D 10 to 40 psi D 40 psi D gt 20 slm 147 to 275 kPa D 21 220 slm 98 to 275 kPa D 14 to to 40 psi D 40 psi D Proof pressureNote2 981 kPa G 142 psi G Operating temperature 5 C to 45 C 41 F to 113 F Flow rate setting and output signal Supply power 0 VDC to 5 0 VDC Minimum 15 VDC 2 25 mA Minimum 15 VDC 2 180 mA Power consumption Maximum 3 1 W Gas wetted surface material Note 3 SUS316 SUS316L PTFE Ni KM 45 Standard fitting Equivalent to 1 4 VCR Mounting position Any direction Weight 1 0 kg 2 2 1b Options Current output O mA to 2 5 mA error detection function electropolishing Note 1 Accuracy ensures that the calibration gas equivalent flow is 1 of full scale when 22 3 C in temperature is obtained for the primary reference in the specified operating pressure range If the service gas and calibration gas are the same the measured gas is ensured to be 1 of full scale in the specified operat ing pressure range as to our primary reference Note 2 The proof pressure specification does not ensure operation or accuracy Note 3 Use of Viton or Chloroprene rub
55. an Jose CA 95119 Phone 408 281 7772 FAX 408 281 7797 European Sales and Service Contacts Table 5 2 European sales and service offices European Offices AE GmbH Raiffeisenstrasse 32 70794 Filderstadt Bonlanden Germany Contact Information Phone 49 711 779270 FAX 49 711 7778700 Dressler HF Technik GmbH Munsterau 168 52224 Stolberg Vicht Germany Phone 49 2402 98810 FAX 49 2402 98811 AE United Kingdom Unit 5 Minton Place Market Court Victoria Road Bicester Oxon OX26 6QB UK Phone 44 1869 320022 FAX 44 1869 325004 5700512 C Troubleshooting and Global Customer Support 5 7 Advanced Energy Table 5 3 European sales representative contacts European Offices France Omicron Technologies ZA de Font Ratel 30 rue de l Europe F 38640 Contact Information Phone 33 0 476 99 22 60 FAX 33 0 476 99 22 66 Ireland Valley Products and Service Ltd Italy Phone 353 0 6 60 3504 FAX 353 0 6 68 9657 Phone FAX 39 039 322351 MCU s r l Sweden Phone 46 0 40 41 1023 Air Vac FAX 46 0 40 41 1318 Poland Phone 48 0 22 720 4511 Vak Pol FAX 48 0 22 720 3965 Slovakia Phone FAX 42 0 7 396609 Labway spol s r o Middle East Sales and Service Contacts Table 5 4 Middle East sales and service contacts Middle Eastern Offices Israel Scientific Products amp Technology Ltd PO Box 3629 4
56. as connector leak test with a helium leak detector Note For models with a normally closed control perform the leak test with the valve open by providing a set point voltage to the MFC After power on warm up the MFC for at least 15 minutes before supplying gas 5700512 C Installation and Operation 3 1 Advanced Energy The MFC can be mounted in any position but the zero point may shift if the MFC is in a nonvertical position Adjust the zero point in the intended mounting position see Zeroing the MFC on page 3 9 for more information AErecommends that you use a filter on the MFC primary side A clogged MFC can result in inaccurate control and measurement and subsequent process failures e AE recommends that you use a dedicated regulator on the MFC primary side Excessive service pressure can cause control errors and MFC failure Unstable pressure or multiple MFCs below a single regulator can cause unstable output INSTALLING THE UNIT The following sections explain how to install the unit WARNING Hazardous voltages exist inside the mass flow controller MFC Do not remove the MFC cover Overview of Unit Installation To install the MFC do the following 1 Confirming the MFC Model on page 3 3 2 Preparing the Installation Site on page 3 3 3 Unpacking the MFC on page 3 3 4 Positioning the MFC on page 3 3 5 Mounting the MFC on page 3 4 6 Making t
57. aximum 3 7 W Gas wetted surface material 3 SUS316 SUS316L PTFE KM 45 Standard fitting N0 4 1 4 VCR 3 8 VCR 1 4 UJR 3 8 UJR Mounting position Any direction Weight 2 8 kg 6 2 Ib Options Current output 0 mA to 2 5 mA error detection function Note 1 Accuracy ensures that the calibration gas equivalent flow is 1 of full scale when 22 3 C in temperature is obtained for the primary reference in the specified operating pressure range If the service gas and calibration gas are the same the measured gas is ensured to be 1 of full scale in the specified operat ing pressure range as to our primary reference Note 2 The proof pressure specification does not ensure operation or accuracy Note 3 Use of PTFE Viton or Chloroprene rubber may be required depending on the intended flow rate range Note 4 3 8 VCR or 3 8 UJR fitting is required if 100 slm or more is derived from full scale range N equivalent 6 10 Specifications and Reference Information 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs Specifications for Model FC 785 MFCs The following table lists specifications for the FC 785 MFCs Table 6 10 Specifications for FC 785 series MFCs Specification Full scale range N equivalent FC 785 FC 785C 10 sccm to 5000 sccm Valve type Normally open Normally closed Response time
58. ber may be required depending on the intended flow rate range 5700512 C Specifications and Reference Information 6 15 Advanced Energy Specifications for Model FC 786T B MFCs The following table lists specifications for the FC 786T B MFCs Table 6 15 Specifications for FC 786T B series MFCs Specification Full scale range N equivalent FC 786T B 6 slm to 30 slm FC 786CT B 6 slm to 50 slm Valve type Normally open Normally closed Response time Maximum 2 of full scale within 1 s AccuracyNote j Under 20 slm maximum 1 of full scale over 20 slm maximum 2 of full scale Linearity Under 20 slm maximum 0 5 of full scale over 20 slm maximum 1 of full scale Repeatability Maximum at 0 2 of full scale External leak rate Maximum 1 x 10 11 Pa m sec He Flow rate control range 2 to 100 Operating pressure range 69 to 275 kPa D 10 to 40 psi D gt 20 slm 147 to 275 kPa D 21 to 40 psi D Proof pressureNote2 981 kPa G 142 psi G Operating temperature 5 C to 45 C 41 F to 113 F Flow rate setting and output signal 0 VDC to 5 0 VDC Supply power Minimum 15 VDC 2 25 mA Minimum 15 VDC 2 180 mA Power consumption Maximum 3 1 W Gas wetted surface material 3 SUS316 SUS316L PTFE Ni KM 45 Mounting position Any direction Weight 1 3 kg 2 9 1b Options Current
59. cause personal injury and or property damage If the equipment is used in a manner not specified by the manufacturer the protection provided by the equipment may be impaired All personnel who work with or who are exposed to this equipment must take precautions to protect themselves against serious or possibly fatal bodily injury Advanced Energy industries Inc AE provides information on its products and associated hazards but it assumes no responsibility for the after sale operation of the equipment or the safety practices of the owner or user This equipment produces or uses potentially lethal high voltage high current radio frequency RF energy NEVER DEFEAT INTERLOCKS OR GROUNDS iv 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs TRADEMARKS NE ADVANCED is a registered trademark of Advanced Energy Industries IC ENERGY Inc Advanced Energy is a registered trademark of Advanced Energy Industries Inc AE is a registered trademark of Advanced Energy Industries Inc Aera is a registered trademark of Advanced Energy Industries Inc CUSTOMER FEEDBACK Advanced Energy s technical writing staff has carefully developed this manual using research based document design principles However improvement is ongoing and the writing staff welcomes and appreciates customer feedback Please send any comments on the content organization or format of this user manual to e tech
60. d surface material Maximum 3 1 W SUS316 SUS316L PCTFE Standard fitting Equivalent to 1 4 VCR Mounting position Any direction Weight 1 kg 2 2 Ib Options Current output 0 mA to 2 5 mA error detection function TC surface treatment Note 1 Accuracy ensures that the calibration gas equivalent flow is 1 of full scale when 22 3 C in temperature is obtained for the primary reference in the specified operating pressure range If the service gas and calibration gas are the same the measured gas is ensured to be 1 of full scale in the specified operating pressure range as to our primary reference Note 2 The proof pressure specification does not ensure operation or accuracy Note 3 98 to 275 kPa G 14 to 40 psi G when the full scale N equivalent is over 10 slm and less than 30 sim 147 to 275 kPa G 21 to 40 psi G when the full scale N equivalent is 30 slm Note 4 98 to 275 kPa G 14 to 40 psi G when the full scale N equivalent is over 10 slm and less than 30 sim 147 kPa G to 275 kPa G when the full scale N equivalent is from 30 sim to 50 sim 6 22 Specifications and Reference Information 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs Specifications for Model FC 7700 MFCs The following table lists specifications for the FC 7700 MFCs Table 6 22 Specifications for FC 7700 series MFCs Specification FC 7700
61. drawings of the MFC as well as the specifications of the MFC mounting footprint Making the Mechanical Connections To make the mechanical connections for the MFC connect the inlet and outlet fittings of the MFC to the gas supply line Depending on the fitting type use one of the following procedures to connect the MFC Note See Model Specifications on page 6 1 for more information about your fitting type To Make VCR Fitting Connections 1 Verify the MFC is correctly mounted see Mounting the MFC on page 3 4 2 Inspect the tubing ferrules and fittings for dirt dust contamination or damage If necessary replace damaged components and clean the tubing ferrules and fittings in accordance with your company s procedures 3 Insert associated tubing until it rests flush against the shoulder of the fitting 4 Tighten nut to finger tight and then 1 8 of a turn past finger tight To Make IGS Connections 1 Inspect the mounting blocks for dirt dust contamination or damage If necessary replace damaged components and fittings in accordance with your company s procedures 2 Insert appropriate metal seals for your seal type Note Metal seals are not included with the MFC 3 4 Installation and Operation 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs 3 Mount the MFC and tighten screws according to IGS torque specifications see Mounting the MFC on page 3 4
62. e Include the product serial number and a full description of the circumstances giving rise to the claim Have been assigned an RMA return material authorization number see below by AE Global Services All warranty work will be performed at an authorized AE service center see list of contacts at the beginning of this chapter You are responsible for obtaining authorization see details below to return any defective MFCs prepaying the freight costs and ensuring that the MFCs are returned to an authorized AE service center AE will return the repaired MFC freight prepaid to you by second day air shipment or ground carrier for local returns repair parts and labor will be provided free of charge Whoever ships the MFC either you or AE is responsible for properly packaging and adequately insuring the MFC See Packing an MFC for Shipping on page 5 10 for more information on packing the MFC for shipping Authorized Returns Before returning any product for repair and or adjustment call AE Global Services and discuss the problem with them Be prepared to give them the model number and serial number of the MFC as well as the reason for the proposed return This consultation call will allow Global Services to determine if the MFC must actually be returned for the problem to be corrected Such technical consultation is always available at no charge MEFCs that are returned without authorization from AE Global Services and that are fou
63. eam resistance wires changes causing an imbalance The imbalance of the upstream and downstream temperatures results in a resistance differential that is detectable by the bridge circuit as an electronic signal The electronic signal represents the mass gas flow 5700512 C Product Overview 2 3 Advanced Energy As a result of the techniques of thermal mass flow measurement gas flow can be measured independently of factors which affect volume and density such as temperature and pressure Bypass Assembly The bypass assembly diverts a small stream of incoming gas through the flow sensor and channels the rest through the bypass and toward the valve assembly of the MFC The bypass assembly design ensures a constant flow ratio between the flow sensor and the larger flow passing through the instrument making the output signal of the flow sensor proportional to the total or mass gas flow A comparator circuit in the electronics assembly compares the output signal from the flow sensor and the flow set point The signal created from this comparison drives the control valve until the difference between the set point and the sensor output signal decreases to zero Electronics Assembly The electronics assembly consists of a bridge circuit a high resolution analog converter a valve drive circuit and an analog I O The signal generated by the bridge circuit is amplified and fed into the analog converter which outputs this signal into the CP
64. ensured to be 1 of full scale in the specified operating pressure range as to our primary reference Note 2 The proof pressure specification does not ensure operation or accuracy 6 18 Specifications and Reference Information 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs Specifications for Model FC 791 MFCs The following table lists specifications for the FC 791 MFCs Table 6 18 Specifications for FC 791 series MFCs Specification Full scale range N equivalent FC 791 6 slm to 30 slm FC 791C 6 slm to 50 slm Valve type Normally open Normally closed Response time Maximum 2 of full scale within 1 s Accuracy Maximum 1 of full scale Linearity Maximum 0 5 of full scale Repeatability Maximum at 0 2 of full scale External leak rate Maximum 1 x 107 Pa m sec He Flow rate control range 2 to 100 Operating pressure In 69 to 275 kPa G 10 to 69 to 275 kPa G 10 to range 40 psi G Ne 3 40 psi G Note 4 Out Atmosphere to vacuum 0 kPa G 0 kPa A Proof pressure 981 kPa G 142 psi G Operating temperature 5 C to 45 C 41 F to 113 F Flow rate setting and output signal 0 VDC to 5 0 VDC Supply power Minimum 15 VDC 2 25 mA Minimum 15 VDC 2 180 mA Power consumption Gas wetted surface material Maximum 3 1 W SUS316 SUS316L PCTFE Standard fitting Equiva
65. ents on page 2 2 MFC COMPONENTS The main components of the MFC are the flow sensor bypass electronics bridge amplifier and comparator circuits and valve assemblies Figure 2 2 illustrates these major components 2 2 Product Overview 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs Input Power Output Indication Command Signal ADC Bridge Circuit KE Control Valve 2702 Figure 2 2 MFC functional block diagram Flow Sensor Assembly The flow sensor consists of a capillary tube wound by two self heating resistance wires through which electrical current is passed The resistance wires heat the sensor tube and when gas flows through the flow sensor a temperature differential is produced between the upstream and downstream wires The temperature change causes a change in resistance which is detected as an electronic signal by the bridge circuit of the electronics assembly The MFC uses the mass gas flow measurement because the heat exchange between the gas and the self heating resistance wire depends on the mass flow When gas is not flowing heat is distributed evenly over the upstream and downstream wires therefore the resistance of upstream and downstream wires is equal and the bridge circuit outputs zero When gas flows heat is exchanged between the gas and the self heating resistance wires The temperature distribution between the upstream and downstr
66. er Minimum 15 VDC 2 25 mA Minimum 15 VDC 2 180 mA Power consumption Maximum 3 1 W Gas wetted surface material SUS316 SUS316L PTFE Ni KM 45 Mounting position Any direction Weight 1 3 kg 2 9 Ib Options Current output 0 mA to 2 5 mA error detection TC surface treatment Note 1 Accuracy ensures that the calibration gas equivalent flow is 1 of full scale when 22 3 C in temperature is obtained for the primary reference in the specified operating pressure range If the ser vice gas and calibration gas are the same the measured gas is ensured to be 1 of full scale in the specified operating pressure range as to our primary reference Note 2 The proof pressure specification does not ensure operation or accuracy 6 14 Specifications and Reference Information 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs Specifications for Model FC 786 MFCs The following table lists specifications for the FC 786 MFCs Table 6 14 Specifications for FC 786 series MFCs Specification Full scale range N equivalent FC 786C 6 slm to 50 slm FC 786 6 slm to 30 slm Valve type Normally open Normally closed Response time Maximum 2 of full scale within 1 s AccuracyNote l Under 20 slm maximum 1 of full scale over 20 slm maximum 2 of full scale Linearity Under 20 slm maximum 0 5 of full sc
67. ernal leak rate Maximum 1 x 107 Pam3 sec He Flow rate control range 2 to 100 Operating pressure range 147 to 275 kPa D 21 to 40 psi D Proof pressureNote 2 981 kPa G 142 psi G Operating temperature 5C to 45 C 41 F to 113 F Flow rate setting and output signal 0 VDC to 5 0 VDC Supply power Minimum 15 VDC 296 25 mA Minimum 15 VDC 2 220 mA Power consumption Maximum 3 7 W Gas wetted surface material Note 3 SUS316 SUS316L PTFE KM 45 Standard fittingN 4 1 4 VCR 3 8 VCR Mounting position Any direction Weight 2 8 kg 6 2 Ib Note 1 Accuracy ensures that the calibration gas equivalent flow is 1 of full scale when 22 3 C in temperature is obtained for the primary reference in the specified operating pressure range If the service gas and calibration gas are the same the measured gas is ensured to be 1 of full scale in the specified operating pressure range as to our primary reference Note 2 The proof pressure specification does not ensure operation or accuracy Note 3 PTFE Viton or chloroprene rubber may be required depending on the intended flow rate range Note 4 3 8 VCR fitting or 3 8 UJR fitting is required if 100 slm or more is derived from full scale range N equivalent 5700512 C Specifications and Reference Information 6 31 Advanced Energy Specifications for Model FC 785
68. for Model FC 780HT MFCs 2 2 KEK 6 5 Specifications for Model FC 780 MFCs 2 KK KK KK KK KK KK KK 6 6 Specifications for Model FC 780X MFCs kk kK KK KK KE KK KRE RR KK 6 7 Specifications for Model FC 781HT MFCs XVE KK KK 6 8 Specifications for Model FC 781 MFCs WW KK KK KK KK RR RR KK 6 9 Specifications for Model FC 782 MFCs YKY 6 10 Specifications for Model FC 785 MFCS kk kk KK KK KK KER RR RR SK KK 6 11 Specifications for Model FC 785T B MFCs kk KK KK RR RR RR KK 6 12 Specifications for Model FC 785X B MFC KK KK KK RRA 6 13 Specifications for Model FC 785Y B MFCs 4k KK KK RR RR RR KK 6 14 Specifications for Model FC 786 MFCs KK KK KK KK KK RR RR KAK 6 15 Specifications for Model FC 786T B MFCs SK KK KK RR KAK 6 16 Specifications for Model FC 786Y B MFCs kK KK KK RR RR RR KK 6 17 Specifications for Model FC 790 MFCs KK KK KK eee ee eee 6 18 Specifications for Model FC 791 MFCs KK 0 KK KK eee KK 6 19 Specifications for Model FC 795 MFCs kk kk kK 00 KK RR eee ee eens 6 20 Specifications for Model FC 795T B MFCs 0000 RR RR eens 6 21 Specifications for Model FC 796 MFCs kk kk KK KK cee eee eee eee 6 22 Specifications for Model FC 7700 MFCs kk KK KK KK cece eee eee 6 23 Specifications for Model FC 7710 MFCs_ kk KK KK KK cece RR RR eee 6 24 Specifications for Model FC 7720 MFCs kk kk kk KK KK cee RR RR KK 6 25 Specifications for Model FC 7800 MFCs kk KK KK KK RR RR RR RR KK 6 26 Specifications for Model FC 7810MFCs kk KK KK KK RR RR
69. function valve open close signal to make sure it is not active Not OK Disengage the purge function valve open close signal see Electrical Connectors in Chapter 4 for more information on this signal OK y Supply gas and make sure that the MFC responds to voltage from the controller Not OK gt May indicate a problem with the MFC Contact AE Global Customer Support OK Y Check the output voltage and the readout indicator Not OK Flow rate indicator may be incorrectly calibrated or may have failed Figure 5 2 Set Point and Flow Output Do Not Match troubleshooting flow chart 5700512 C Troubleshooting and Global Customer Support 5 3 Advanced Energy UNSTABLE FLOW OR INSUFFICIENT OUTPUT EXISTS Use the following procedure to troubleshoot unstable flow or insufficient output If these procedures do not resolve the problem contact AE Global Services see AE Global Services on page 5 6 5 4 Troubleshooting and Global Customer Support 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs Check for stable pressure on both the inlet and outlet sides of the MFC Not OK OK y Ensure that pressure is stable on inlet and outlet sides Check that the pressure differential between the inlet and outlet sides of the MFC is correc
70. gnal information see Chapter 4 I O Connections and Communication 5700512 C Installation and Operation 3 5 Advanced Energy Testing the System for Leaks A CAUTION Do not use liquid leak detectors to leak test connections They may damage the MFC After installing the MFC in your system you should test the leak integrity of the gas connections with a helium leak detector Note MFCs equipped with a normally closed control valve should be leak tested with the valve open by providing a set point voltage to the MFC For more information about setting the set point voltage see Chapter 4 I O Connections and Communication CONNECTING THE MFC TO PERIPHERAL EQUIPMENT The following illustrations provide guidance for connecting a MFC to peripheral equipment The illustrations list Aera part numbers for equipment When RO Box is used RO 100 RO 51D RO 52D Dedicated cable RO 52D 2 RO Monitor Flow rate indicator is to be added RO 53D RO 52D 53D 54D RO 54D 100 Vac RO 100 requires use of LC MFC xxN Figure 3 1 Connection to peripheral equipment using a RO Box power supply 3 6 Installation and Operation 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs LC MFC xxN LC OUT N LC OUT NC a ae rate adjuster 3610C Flow rate setting indicator cC PS 71DA RO 40 Flow rate indicator PS 74DA DP 455 PS 76DA DP 455C 100 Vac Connector is assigned to
71. he FC 790 MFCs Table 6 17 Specifications for FC 790 series MFCs Specification Full scale range N equivalent FC 790 FC 790C 10 sccm to 5000 sccm Valve type Normally open Normally closed Response time Maximum 2 of full scale within 1 s AccuracyNo 1 Maximum 1 of full scale Linearity Maximum 0 5 of full scale Repeatability Maximum at 0 2 of full scale External leak rate Maximum 1 x 10 1 Pa m sec He Flow rate control range 2 to 100 Operating pressure In 49 to 275 kPa G 7 to 40 psi G trange Out Atmosphere to vacuum 0 kPa G 0 kPa A Proof pressureN te2 981 kPa G 142 psi G Operating temperature 5 C to 45 C 41 F to 113 F Flow rate setting and output signal 0 VDC to 5 0 VDC Supply power Minimum 15 VDC 2 25 mA Minimum 15 VDC 2 180 mA Power consumption Maximum 3 1 W Gas wetted surface material SUS316 SUS316L PCTFE Standard fitting Equivalent to 1 4 VCR Mounting position Any direction Weight 1 1 kg 2 4 1b Options Current output 0 mA to 2 5 mA error detection function TC surface treatment Note 1 Accuracy ensures that the calibration gas equivalent flow is 1 of full scale when 22 3 C in temperature is obtained for the primary reference in the specified operating pressure range If the service gas and calibration gas are the same the measured gas is
72. he Mechanical Connections on page 3 4 7 Making the Electrical Connection on page 3 5 8 Testing the System for Leaks on page 3 6 3 2 Installation and Operation 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs Confirming the MFC Model Before you install the MFC ensure that you have the correct model for your system requirements The part number serial number calibration gas and full scale flow are listed on the label of the MFC See Product Label on page 6 40 for an example MEC label Preparing the Installation Site Before installing the MFC thoroughly clean dry and purge all piping associated with the entire flow control system in accordance with your company s procedures The MFC control valve is not capable of completely shutting off gas flow You must install another shut off valve downstream of the MFC to completely stop gas flow Unpacking the MFC Configuration Note The MFC is manufactured in a cleanroom environment and delivered in contamination free packages Unpack MFC products in a cleanroom Unpack and inspect the MFC carefully looking for obvious physical damage If no damage is apparent locate and save all documentation and then proceed with the installation procedures If you do see signs of shipping damage contact Aera an Advanced Energy company and the carrier immediately see AE Global Services on page 5 6 for contact informati
73. heck gas input Not OK Pressure or to maintain a pressure proper pressure differential for MFC operation OK Check the gas Check control valves for the passage tothe Not OK gas supply MFC and MFC chamber OK Y Check the pressure on the pneumatic Not OK control valve The pneumatic control valve will not open without the specified pressure Adjust to specifications OK Perform an overall leak check on the system and Not Oke Repair any leaks MFC Figure 5 1 No Gas Is Being Supplied troubleshooting flow chart 5 2 Troubleshooting and Global Customer Support 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs SET POINT AND FLOW OUTPUT DO NOT MATCH Use the following procedure to troubleshoot if the set point and the flow output do not match If these procedures do not resolve the problem contact AE Global Services see AE Global Services on page 5 6 Check the power supply voltages 15 VDC Not OK Gas pressure is not needed for these three checks OK y Check for faulty wiring or power failure Check the set point voltage Not OK OK y Check the wiring to the controller and between the controller and the MFC Check for power failures in the 5 VDC system Check the purge
74. kg 2 6 Ib Options Current output 0 mA to 2 5 mA error detection function TC surface treatment Note 1 Accuracy ensures that the calibration gas equivalent flow is 1 of full scale when 22 3 C in temperature is obtained for the primary reference in the specified operating pressure range If the ser vice gas and calibration gas are the same the measured gas is ensured to be 1 of full scale in the specified operating pressure range as to our primary reference Note 2 The proof pressure specification does not ensure operation or accuracy 5700512 C Specifications and Reference Information Advanced Energy Specifications for Model FC 781HT MFCs The following table lists specifications for the FC 781HT MFCs Table 6 7 Specifications for FC 781HT series MFCs Specification Full scale range N equivalent FC 781HT 6 slm to 30 slm FC 781CHT 6 slm to 20 slm Valve type Normally open Normally closed Response timeN 3 Maximum 2 of full scale within 2 s AccuracyNote Maximum 1 of full scale Linearity Maximum 0 5 of full scale Repeatability Maximum at 0 2 of full scale External leak rate Maximum 1 x 10 Pam3 sec He Flow rate control range 2 to 100 Operating pressure range 69 to 275 kPa D 10 to 40 psi D Proof pressureNote2 981 kPa G 142 psi G Operating temperature MEC unit 50 C to 80 C 122
75. lent to 1 4 VCR Mounting position Any direction Weight 1 2 kg 2 4 Ib Options Current output 0 mA to 2 5 mA error detection function TC surface treatment Note 1 Accuracy ensures that the calibration gas equivalent flow is 1 of full scale when 22 3 C in temperature is obtained for the primary reference in the specified operating pressure range If the service gas and calibration gas are the same the measured gas is ensured to be 1 of full scale in the specified operating pressure range as to our primary reference Note 2 The proof pressure specification does not ensure operation or accuracy Note 3 98 to 275 kPa G 14 to 40 psi G when full scale N equivalent is over 20 slm and less than 30 slm 147 to 275 kPa G 21 to 40 psi G when full scale N equivalent is 30 sim Note 4 98 to 275 kPa G 14 to 40 psi G when full scale N equivalent is over 20 slm and less than 30 sim 147 to 275 kPa G 21 to 40 psi G when full scale N equivalent is from 30 slm to 50 sim 5700512 C Specifications and Reference Information 6 19 Advanced Energy Specifications for Model FC 795 MFCs The following table lists specifications for the FC 795 MFCs Table 6 19 Specifications for FC 795 series MFCs Specification Full scale range N equivalent FC 795 FC 795C 10 sccm to 5000 sccm Valve type Normally open Normally closed Response time Maximu
76. ll scale when 22 3 C in temperature is obtained for the primary reference in the specified operating pressure range If the ser vice gas and calibration gas are the same the measured gas is ensured to be 1 of full scale in the specified operating pressure range as to our primary reference Note 2 The proof pressure specification does not ensure operation or accuracy MFC DIMENSIONS 5700512 C Specifications and Reference Information 6 33 Advanced Energy Dimensions for Standard MFC Models Figure 6 1 and Table 6 33 provide physical dimensions for standard MFC model numbers Figure 6 1 Dimensions for standard MFC models with 1 4 VCR fitting Table 6 33 Dimensions for standard models in mm and inches Model L S H W L1 L2 FC 770A 770AC 124 4 88 12 7 127 32 22 66 0 50 5 00 1 26 0 87 2 60 FC 771A 771AC 124 4 88 15 127 32 22 66 0 59 5 00 1 26 0 87 2 60 FC 772 772C 1 4 VCR fitting 15 152 6 37 5 25 5 101 5 183 8 7 24 0 59 6 01 1 48 1 00 4 00 3 8 VCR fitting 192 3 7 6 FC 780 780C 124 4 88 12 7 122 32 18 69 0 50 4 80 1 26 0 71 2 72 FC 781 781C 151 5 94 19 128 38 28 46 0 75 5 04 1 50 1 10 1 81 FC 782 782C 1 4 VCR fitting 15 152 38 25 5 90 183 8 7 24 0 59 5 98 1 50 1 00 3 54 3 8 VCR fitting 192 3 7 6 FC 780X 780XC 124 4 88 12 7 122 32 18 69 0
77. low chart 5 5 Figure 6 1 Dimensions for standard MFC models with 1 4 VCR fitting 6 34 Figure 6 2 Dimensions of block type MFC models WW KK RR RR KK 6 37 Figure 6 3 Dimensions for high temperature MFC models 6 38 Figure 6 4 MFC label example kk kk kk kK eee 6 40 5700512 C List of Figures xi Advanced Energy xii List of Figures 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs List of Tables Table 1 1 Standard MFC model numbers 4 kk kk kk kk KK KK KK K KI eee teens 1 1 Table 1 2 Block type MFC model numbers WW kK KK KK KK KK KK KK KK KK IK 1 3 Table 1 3 High temperature MFC model numbers 0 1 4 Table 4 1 20 pin connector signal descriptions 0 00 0 KK KK 4 2 Table 4 2 9 pin connector signal descriptions 00 000 eee 4 6 Table 5 1 AE Global Services locations USA KK KK KEKE KK KK KK 5 6 Table 5 2 European sales and service offices Sk kk KK KK KK RE KERR KK KK 5 7 Table 5 3 European sales representative contacts 0 KK KK KK 5 8 Table 5 4 Middle East sales and service contacts 000 cee eee ees 5 8 Table 5 5 Pacific Rim sales and service offices kK KK KK cece eee ees 5 9 Table 6 1 Specifications for FC 770 series MFCs kk KK KK cece eee KK KK 6 2 Table 6 2 Specifications for FC 771 series MFCs KEK RR RR KS 6 3 Table 6 3 Specifications for
78. ly closed open Response time Maximum 2 of full scale within 1 s AccuracyNo 1 Maximum 1 of full scale Linearity Maximum 0 5 of full scale Repeatability Maximum at 0 2 of full scale External leak rate Maximum 1 x 10 Pa m sec He Flow rate control range 5 to 100 Operating pressure range 49 to 275 kPa D 7 to 40 psi D Proof pressureNote 2 981 kPa G 142 psi G Operating temperature 5 C to 45 C 41 F to 113 F Flow rate setting and output signal 0 VDC to 5 0 VDC Supply power Minimum 15 VDC 2 25 mA Minimum 15 VDC 2 180 mA Power consumption Maximum 3 1 W Gas wetted surface material SUS316 SUS316L PTFE Ni KM 45 Standard fitting 1 4 VCR 1 4 SW 1 4 VCR Mounting position Any direction Weight 1 2 kg 2 6 Ib Note 1 Accuracy ensures that the calibration gas equivalent flow is 1 of full scale when 22 3 C in temperature is obtained for the primary reference in the specified operating pressure range If the service gas and calibration gas are the same the measured gas is ensured to be 1 of full scale in the specified operating pressure range as to our primary reference Note 2 The proof pressure specification does not ensure operation or accuracy 6 26 Specifications and Reference Information 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series F
79. m 2 of full scale within 1 s AccuracyNo 1 Maximum 1 of full scale Linearity Maximum 0 5 of full scale Repeatability Maximum at 0 2 of full scale External leak rate Maximum 1 x 10 1 Pa m sec He Flow rate control range 2 to 100 Operating pressure In 49 to 275 kPa G 7 to 40 psi G trange Out Atmosphere to vacuum 0 kPa G 0 kPa A Proof pressureN te2 981 kPa G 142 psi G Operating temperature 5 C to 45 C 41 F to 113 F Flow rate setting and output signal 0 VDC to 5 0 VDC Supply power Minimum 15 VDC 2 25 mA Minimum 15 VDC 2 180 mA Power consumption Maximum 3 1 W Gas wetted surface material SUS316 SUS316L PCTFE Standard fitting Equivalent to 1 4 VCR Mounting position Any direction Weight 0 9 kg 2 0 1b Options Current output 0 mA to 2 5 mA error detection function TC surface treatment Note 1 Accuracy ensures that the calibration gas equivalent flow is 1 of full scale when 22 3 C in temperature is obtained for the primary reference in the specified operating pressure range If the service gas and calibration gas are the same the measured gas is ensured to be 1 of full scale in the specified operating pressure range as to our primary reference Note 2 The proof pressure specification does not ensure operation or accuracy 6 20 Specifications and Reference Information 5
80. mally open Normally closed Response time Maximum 2 of full scale within 1 s AccuracyNote 1 Maximum 1 of full scale Linearity Maximum 0 5 of full scale Repeatability Maximum at 0 2 of full scale External leak rate Maximum 1 x 10 1 Pam3 sec He Flow rate control range 2 to 100 Operating pressure range 49 to 275 kPa D 7 to 29 4 to 294 kPa D 4 to 40 psi D 43 psi D Proof pressureNote2 981 kPa G 142 psi G Operating temperature 5 C to 45 C 41 F to 113 F Flow rate setting and output signal 0 VDC to 5 0 VDC Supply power Minimum 15 VDC 2 25 mA Minimum 15 VDC 2 180 mA Power consumption Maximum 3 1 W Gas wetted surface material SUS316 SUS316L PTFE Ni KM 45 Standard fitting 1 4 VCR 1 4 SW 1 4 VCR 1 4 SW 1 4 MCG 1 4 S JSK Mounting position Any direction Weight 1 2 kg 2 6 Ib Options Current output 0 mA to 2 5 mA error detection 2 5 mA error detection function TC surface function TC surface treatment treatment 1 4 VCO fitting Current output 0 mA to Note 1 Accuracy ensures that the calibration gas equivalent flow is 1 of full scale when 22 3 C in temperature is obtained for the primary reference in the specified operating pressure range If the ser vice gas and calibration gas are the same the measured gas is ensured to be 1 of full scale
81. may use a surrogate calibration gas rather than the gas indicated on the label The calibration ambient temperature is 22 C If the MFC requires a different ambient calibration temperature that temperature is indicated on the MFC label Note The calibration gas and its conversion factors are subject to change due to technological innovation or changes in environmental regulations Table 6 37 Calibration references Description Specification Calibration method Primary secondary or rate of rise of N or other surrogate gas Reference conditions 0 C 760 Torr per SEMI E12 96 Traceablity All calibrations are traceable to Japan standards and or United States standards NIST FLOW INDICATION Flow rate is indicated by standard cubic centimeters per minute sccm cubic centimeters per minute ccm standard liters per minute slm and liters per minute Im as follows e For sccm and slm gas flow rates at 0 C 101 3 kPa e For ccm and lm gas flow rate at customer defined temperature 101 3 kPa Note Unless otherwise noted sccm and slm are used for calibration 5700512 C Specifications and Reference Information 6 39 Advanced Energy Product Label The MFC product label displays the following model number serial number calibration gas surface treatment and full scale flow Figure 6 4 is an example of a MFC single gas model label Surface treatment designation M
82. mum 1 of full scale over 20 slm maximum 2 of full scale Linearity Under 20 slm maximum 0 5 of full scale over 20 slm maximum 1 of full scale Repeatability Maximum at 0 2 of full scale External leak rate Maximum 1 x 107 Pa m sec He Flow rate control range Operating pressure range 69 to 275 kPa D 10 to 40 psi D at gt 20 slm 98 to 275 kPa D 14 to 40 psi D Proof pressureN te2 981 kPa G 142 psi G Operating temperature 5C to 45 C 41 F to 113 F Flow rate setting and output signal 0 VDC to 5 0 VDC Supply power Minimum 15 VDC 2 25 mA Minimum 15 VDC 2 180 mA Power consumption Maximum 3 1 W Gas wetted surface material SUS316 SUS316L KM 45 Viton or Chloroprene rubber Standard fitting 1 4 VCR 1 4 SW 1 4 VCO 3 8 VCR 3 8 SW 3 8 VCO Mounting position Weight Options Current output 0 mA to 2 5 mA 1 4 MCG fitting Standard equipment Error detection function Note 1 Accuracy ensures that the calibration gas equivalent flow is 1 of full scale when 22 3 C in temperature is obtained for the primary reference in the specified operating pressure range If the service gas and calibration gas are the same the measured gas is ensured to be 1 of full scale in the specified operating pressure range as to our primary reference Note 2 The proof pressure specification does not ensure
83. n or accuracy 5700512 C Specifications and Reference Information 6 29 Advanced Energy Specifications for Model FC 7810 MFCs The following table lists specifications for the FC 7810 MFCs Table 6 29 Specifications for FC 7810 series MFCs Specification Full scale range N equivalent FC 7810 FC 7810C FC 7810CD FC 7810CU 6 slm to 30 slm 6 slm to 50 slm 6 slm to 30 slm Valve type Normally open Normally closed Response time Maximum 2 of full scale within 2 seconds AccuracyNote Under 20 slm maximum 1 of full scale over 20 slm maximum of 2 of full scale Linearity Under 20 slm maximum 0 5 of full scale over 20 slm maximum of 1 of full scale Repeatability Maximum at 0 2 of full scale External leak rate Maximum 1 x 10 1 Pa m sec He Flow rate control range 5 to 100 Operating pressure range 69 to 69 to 69 to 275 kPa D 10 to 40 275 kPa D 10 275 kPa D 10 psi D to 40 psi D to 40 psi D gt 20 slm 98 to 275 kPa D 14 gt 20 slm 147 to 275 kPa D 21to gt 20 slm 98 to 294 kPa D 14 to 40 psi D 40 psi D to 43 psi D Proof pressureN 981 kPa G 142 psi G Operating temperature 5C to 45 C 41 F to 113 F Flow rate setting and output signal 0 VDC to 5 0 VDC Supply power Minimum 15 VDC 2 25 mA Minimum 15 VDC 2 180 mA Power consumption Maximum 3 1 W
84. nced Energy iv Index 5700512 C
85. nd to be functional will not be covered under the warranty see warranty statement below That is you will have to pay a retest and calibration fee and all shipping charges 5700512 C Troubleshooting and Global Customer Support 5 11 Advanced Energy Warranty Statement Attention All MFC warranties are void if the seal on the MFC cover is broken or removed Aera warrants that for a period of one year after shipment products manufactured by Aera shall be free from defects in material and workmanship when installed serviced and operated with the specifications for which they were designed Aera will replace or repair any equipment or parts returned provided that factory inspection shows that such defect developed under normal and proper use by the original user Aera s liability under this warranty is limited to such replacement or repair and they shall not be held in any form of action for any incidental or consequential damages to property or person The foregoing is in lieu of all other warranties expressed or implied including the warranties of merchantability and fitness for particular purpose Representations and warranties by any person including dealers and representatives of seller which are inconsistent or in conflict with the terms of this warranty including but not limited to limitations of liability as set forth above shall not be binding unless produced in writing and approved by an authorized representative of
86. ns on page 6 1 For signal descriptions see Chapter 4 I O Connections and Communication FC 77X and FC 77XX MFCs provide error detection as a standard feature The function is an option on some other models For MFCs with the error detection feature the MFC provides alarm output if it detects a difference between the flow rate set point and the actual flow rate for longer than eight seconds 5700512 C I O Connections and Communication 4 7 Advanced Energy As shown in Figure 4 4 ALARM H and ALARM L are connection terminals for the open collector that is isolated with the photocoupler To use the terminals apply appropriate power as shown in the illustration Use the ALARM ON OFF signal to reset the signal Note If no gas is being supplied but the MFC has a nonzero set point the MFC will report an error because the flow rate does not match the set point Output terminal Connection terminal ALARM H Power max 25 Vdc 5 mA ALARM L o 0 V ALARM ON OFF 10 o COMMON ALARM H and ALARM L signals are to be canceled if terminal No 10 is connected with COMMON terminal MFC 2651 Figure 4 4 Alarm connection Control Valve Purge Function Signals The control valve purge function allows you to completely open the control valve and purge gas at many times the MFC full scale flow rate This function is particularly useful for purging gas when using MFCs with a low full scale fl
87. o prevent system explosion if system pressure rises Do not allow contaminants of any kind to enter the MFC before or during use Contamination such as dust dirt lint glass chips metal chips or any other particles may permanently damage the MFC Product Certification Certain options of this product are certified by e CE Marking Self declaration assessed by AE Corporate Compliance For more information refer to the Certificate or Letter of Conformity US or Declaration of Conformity EU accompanying the product Conditions of Use To comply with the stated directives and standards you must meet the following conditions of use e Install and operate this device only in accordance with the listed safety guidelines and all other applicable directives and standards specific to your process and application Dispose of this product as directed by applicable laws and regulations 5700512 C Safety and Product Compliance Guidelines 1 7 Advanced Energy 1 8 Safety and Product Compliance Guidelines 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs a apter 2 Product Overview PRODUCT DESCRIPTION AND THEORY OF OPERATION The MFC provides analog control an array of possible mechanical and electrical connections and a wide variety of flow ranges As shown in Figure 2 1 the MFC mass flow controller is composed of a PC board that is integrated with the following sections
88. odel number Serial number TC FC 780 C 79GN006 500 sccm N2 Full scale flow Calibration gas Figure 6 4 MFC label example 6 40 Specifications and Reference Information 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs A AE customer support 5 6 AE web site 5 6 alarm output signal 4 7 authorization return number 5 11 authorized returns 5 11 C calibration information 6 39 card edge connector 4 1 CE marking 1 7 certification 1 7 communication 20 pin connector 4 1 9 pin connector 4 5 alarm output signal 4 7 connections 4 1 control valve purge signal 4 8 components of MFC 2 2 conditions of use 1 7 connecting see installation connections 20 pin card edge 4 1 20 pin Honda 4 1 communication 4 1 electrical 3 5 4 1 ground 3 5 mechanical 3 4 peripheral equipment 3 6 contact information AE Global Support 5 6 sales and service 5 6 control valve signal 4 8 customer support 5 6 customer support contact 5 6 D description bypass 2 4 electronics 2 4 flow sensor 2 3 general 2 1 valve 2 4 dimensions 6 33 DSub connector 4 5 Index E electrical connections 3 5 4 1 electrical connector 9 pin subminiature D 4 5 alarm output signal 4 7 control valve purge signal 4 8 signal descriptions 4 2 4 5 electronics assembly 2 4 overview 2 4 error alarm output signal 4 7 F first time operation 3 9 flow no gas troubleshooting 5 2 reference information 6 39 unstable or insufficient tr
89. on Save the shipping container for submitting necessary claims to the carrier Save any undamaged shipping materials in the event you must ship the MFC in the future For more information on shipping an MFC see Packing an MFC for Shipping on page 5 10 Positioning the MFC Position the MFC so the gas flow is in the direction of the arrow stamped on the MFC base The MFC can be mounted in any position but the zero point may shift if the MFC is mounted in a non vertical position Adjust the zero point in the intended mounting position before running the MFC see Zeroing the MFC on page 3 9 for more information 5700512 C Installation and Operation 3 3 Advanced Energy Mounting the MFC Look to the following information to correctly mount the MFC Note If you are using an MFC with IGS connections you must make the mechanical connections before mounting the MFC See Making the Mechanical Connections on page 3 4 for more information Note The MFC may be retrofitted into any system because it has been manufactured for drop in replacement for all existing MFCs and is backward compatibility with all older analog MFCs To Mount the MFC 1 Match the mounting holes on the bottom of the MFC with those on the mounting surface 2 Using two 8 32 UNC 2B screws mount the MFC Ensure it is securely attached and will resist vibration from external sources See MFC Dimensions on page 6 33 for dimensional
90. or detection function TC surface treatment Note 1 Accuracy ensures that the calibration gas equivalent flow is 1 of full scale when 22 3 C in temperature is obtained for the primary reference in the specified operating pressure range If the service gas and calibration gas are the same the measured gas is ensured to be 1 of full scale in the specified operating pressure range as to our primary reference Note 2 The proof pressure specification does not ensure operation or accuracy 5700512 C Specifications and Reference Information 6 13 Advanced Energy Specifications for Model FC 785Y B MFCs The following table lists specifications for the FC 785Y B MFCs Table 6 13 Specifications for FC 785Y B series MFCs Specification Full scale range N equivalent FC 785Y B 10 sccm to FC 785CY B 5000 sccm Valve type Normally open Normally closed Response time Maximum 2 of full scale within 1 s AccuracyN0t 1 Maximum 1 of full scale Linearity Maximum 0 5 of full scale Repeatability Maximum at 0 2 of full scale External leak rate Maximum 1 x 10 1 Pam3 sec He Flow rate control range 2 to 10090 Operating pressure range 49 to 275 kPa D 7 to 40 psi D Proof pressure 2 981 kPa G 142 psi G Operating temperature 5 C to 45 C 41 F to 113 F Flow rate setting and output signal 0 VDC to 5 0 VDC Supply pow
91. oubleshooting 5 4 flow sensor description 2 3 G gas flow troubleshooting 5 2 general description 2 1 global customer support 5 6 ground connections 3 5 guidelines safety 1 6 H Honda connector 4 1 l icons in user manual 1 5 on unit 1 5 initial operation 3 9 installation confirm MFC model 3 3 connecting to peripheral equipment 3 6 ground connections 3 5 leak test 3 6 making mechanical connection 3 4 mounting the MFC 3 4 positioning the MFC 3 3 5700512 C Index i Advanced Energy preparing to install 3 1 safety requirements 3 1 site preparation 3 3 unpack MFC 3 3 L label MFC label 6 40 labels on unit 1 5 leak test 3 6 M maintenance 3 11 manual see user manual marking CE 1 7 mechanical connections 3 4 MFC bypass assembly 2 4 calibration references 6 39 components of 2 2 dimensions 6 33 electronics assembly 2 4 flow sensor assembly 2 3 general description 2 1 label 6 40 models covered by manual 1 1 packing to ship 5 10 reference information 6 39 specifications 6 1 theory of operation 2 1 valve assembly 2 4 zeroing 3 9 model numbers 1 1 model specifications 6 1 mounting the MFC 3 4 O operation first time operation 3 9 zeroing the MFC 3 9 P packing the MFC to ship 5 10 part number on label 6 40 peripheral equipment connecting 3 6 physical dimensions 6 33 pin descriptions 20 pin connector 4 2 9 pin connector 4 5 positioning the MFC 3 3 power supply requirements
92. ow rate or for leak checking The settings for opening closing the control valve vary with the connector type and in some cases with whether the MFC is normally open or normally closed For most applications this signal is not connected The following illustrations show the connection and the internal MFC wiring for the purge function signals on all connectors I O Connections and Communication 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs CARD EDGE PURGE FUNCTION SIGNALS For the card edge connector MFCs with normally open and normally closed valves require inverse connections Be sure to connect the signal properly To check whether an MFC is normally closed or normally open see Model Numbers for this Manual on page 1 1 Figure 4 5 shows the connections Figure 4 6 and Figure 4 7 show the internal circuitry for normally open and normally closed MFCs respectively Normally closed valve o COMMON open VALVE OPEN CLOSE D o 15 Vdc close M F C 2658 To disengage this function disconnect the MFC terminal Normally opened valve o 15 Vdc open VALVE OPEN CLOSE D o COMMON close 2659 MFC Figure 4 5 Card edge purge function signals lt 1 NMV CLOSE SIGNAL VALVE CLOSE OPEN 6 2K 2 COMMON VALVE CLOSE 15 v VALVE OPEN r vec Rove 68 K pa 5 V ESR OPEN SIGNAL O NW ns
93. r MFC has a zero point adjustment hole To identify this hole see Figure 3 4 on page 3 10 If your model does not have this hole you can not adjust the zero point In this situation contact AE Global Services see AE Global Services on page 5 6 The MFC can be mounted in any position However if the MFC is in a vertical position thermal siphoning can occur with a gas that has a molecular weight that is 140 or less which may cause the zero point to shift Make sure to adjust the zero point in the intended mounting position and with pressured service gas e Adjust the zero point at the service operating temperature Temperature deviations even within the specified range of operating temperatures may cause the zero point to shift 5700512 C Installation and Operation 3 9 Advanced Energy To Adjust the MEC Zero Point L 2 Make sure that the MFC has reached ambient temperature Energize the MFC then wait at least 15 minutes During this time make sure that the ambient temperature remains constant and that the output stabilizes Close the shut off valves upstream and downstream of the MFC to ensure that there is no gas flow For normally closed MFCs set the set point signal to 0 V For normally open MECs set the set point signal to 5 V For more information on the set point command see Chapter 4 I O Connections and Communication Use a small flat head screw driver to make the zero point adjustment as
94. r the primary reference in the specified operating pressure range If the service gas and calibration gas are the same the measured gas is ensured to be 1 of full scale in the specified operating pressure range as to our primary reference Note 2 The proof pressure specification does not ensure operation or accuracy 5700512 C Specifications and Reference Information 6 21 Advanced Energy Specifications for Model FC 796 MFCs The following table lists specifications for the FC 796 MFCs Table 6 21 Specifications for FC 796 series MFCs Specification Full scale range N equivalent FC 796 6 slm to 30 slm FC 796C 6 slm to 50 slm Valve type Normally open Normally closed Response time Maximum 2 of full scale within 1 s Accuracy Maximum 1 of full scale Linearity Maximum 0 5 of full scale Repeatability Maximum at 0 2 of full scale External leak rate Maximum 1 x 107 Pa m sec He Flow rate control range 2 to 100 Operating pressure In 69 to 275 kPa G 10 to 69 to 275 kPa G 10 to range 40 psi G No9te 3 40 psi G Note 4 Out Atmosphere to vacuum 0 kPa G 0 kPa A Proof pressureN te2 981 kPa G 142 psi G Operating temperature 5 C to 45 C 41 F to 113 F Flow rate setting and output signal 0 VDC to 5 0 VDC Supply power Minimum 15 VDC 2 25 mA Minimum 15 VDC 2 180 mA Power consumption Gas wette
95. racy ensures that the calibration gas equivalent flow is 1 of full scale when 22 3 C in temperature is obtained for the primary reference in the specified operating pressure range If the service gas and calibration gas are the same the measured gas is ensured to be 1 of full scale in the specified operating pressure range as to our primary reference Note 2 The proof pressure specification does not ensure operation or accuracy Note 3 PTFE may be required depending on your intended flow rate range 6 4 Specifications and Reference Information 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs Specifications for Model FC 780HT MFCs The following table lists specifications for the FC 780HT MFCs Table 6 4 Specifications for FC 780HT series MFCs Specification Full scale range N equivalent FC 780HT 10 sccm to FC 780CHT 5000 sccm Valve type Normally open Normally closed Response timeNote 4 Maximum 2 of full scale Maximum 2 of full scale within 2 s within 1 s Accuracy Maximum 1 of full scale Linearity Maximum 0 5 of full scale Repeatability Maximum at 0 2 of full scale External leak rate Maximum 1 x 107 Pam3 sec He Flow rate control range 2 to 10090 Operating pressure range 49 to 275 kPa D 7 to 40 psi D Proof pressure 981 kPa G 142 psi G Operating temperature MEC unit
96. sec He Flow rate control range 2 to 100 Operating pressure range 69 to 275 kPa D 10 to 40 psi D gt 20 slm 147 to 275 kPa D 21 to 40 psi D Proof pressureNote2 981 kPa G 142 psi G Operating temperature 5 C to 45 C 41 F to 113 F Flow rate setting and output signal 0 VDC to 5 0 VDC Supply power Minimum 15 VDC 2 25 mA Minimum 15 VDC 2 180 mA Power consumption Maximum 3 1 W Gas wetted surface material 3 SUS316 SUS316L PTFE Ni KM 45 Viton Chloroprene rubber Mounting position Any direction Weight 1 3 kg 2 9 Ib Options Current output 0 mA to 2 5 mA error detection function TC surface treatment Note 1 Accuracy ensures that the calibration gas equivalent flow is 1 of full scale when 22 3 C in temperature is obtained for the primary reference in the specified operating pressure range If the service gas and calibration gas are the same the measured gas is ensured to be 1 of full scale in the specified operat ing pressure range as to our primary reference Note 2 The proof pressure specification does not ensure operation or accuracy Note 3 Use of Viton or Chloroprene rubber may be required depending on the intended flow rate range 5700512 C Specifications and Reference Information 6 17 Advanced Energy Specifications for Model FC 790 MFCs The following table lists specifications for t
97. setting and output signal 0 VDC to 5 0 VDC Supply power Minimum 15 VDC 296 25 mA Minimum 15 VDC 2 220 mA Power consumption Maximum 3 7 W Gas wetted surface material Note 3 SUS316 SUS316L PTFE KM 45 Viton or Chloroprene rubber Standard fittingN 4 1 4 VCR 1 4 SW 3 8 VCR 3 8 SW Mounting position Any direction Weight 2 3 kg 5 1 Ib Note 1 Accuracy ensures that the calibration gas equivalent flow is 1 of full scale when 22 3 C in temperature is obtained for the primary reference in the specified operating pressure range If the service gas and calibration gas are the same the measured gas is ensured to be 1 of full scale in the specified operating pressure range as to our primary reference Note 2 The proof pressure specification does not ensure operation or accuracy Note 3 PTFE may be required depending on the intended flow rate range Note 4 3 8 VCR fitting or 3 8 UJR fitting is required if 100 slm or more is derived from full scale range N equivalent 5700512 C Specifications and Reference Information 6 25 Advanced Energy Specifications for Model FC 7800 MFCs The following table lists specifications for the FC 7800 MFCs Table 6 25 Specifications for FC 7800 series MFCs Specification FC 7800 FC 7800C FC 7800CD FC 7800CU Full scale range N equivalent 10 sccm to 5000 sccm Valve type Normally Normal
98. t M Not OK OK Y Adjust pressure to meet pressure differential specifications See the Specifications section in Chapter 6 Check whether MFC is being used with specified gas Not OK OK Y Using a gas other than the one specified for the MFC may cause hunting Reducing the pressure differential across the MFC may eliminate this problem Check for interference with the pressure regulator Not OK OK Y Check the operation timing and piping design Also check the constants used with the pressure regulator Check for interference between the pressure regulator and other MFCs Not OK OK Check the operation timing and piping for all related MFCs Check whether a temperature gradient may be causing vapor condensation in the piping Not OK OK Y Vapor condensation may cause output fluctuations To prevent condensation check the temperature control on the piping and or shorten the piping Perform an overall leak check on the system and MFC Not OK chart Leaks from the piping may cause output fluctuation See the Leak Check section in Chapter 3 Figure 5 3 Unstable Flow or Insufficient Output Exists troubleshooting flow 5700512 C Troubleshooting and Global Customer Support Advanced Energy AE WORLD
99. the unused terminal of line code LC OUT N 2654 with care not to establish a short Figure 3 3 Example of connections using dedicated line code LC OUT N OPERATING THE UNIT The following sections explain how to operate the unit 3 8 Installation and Operation 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs WARNING Hazardous voltages exist inside the mass flow controller MFC Do not remove the MFC cover First Time Operation The first time you operate the MFC 1 Ensure that you have installed the MFC properly by following the procedures in Installing the Unit on page 3 2 2 After energizing the MFC turning on power through the appropriate communications interface allow the MFC to warm up for at least 15 minutes before supplying gas to the MFC If you observe deviation in the zero output perform a zero point adjustment see Zeroing the MFC on page 3 9 3 When using the MFC with vapors at room temperature set the supply pressure at the minimum value capable of securing the full scale flow rate to avoid liquid recondensation in the pipes Be sure to maintain stable temperature for all pipes Zeroing the MFC Look to the following information to adjust the MFC to the zero point Note Contamination can negatively affect proper flow rate control and measurement despite zero point adjustment Before Zeroing the MFC Review the Following e Make sure that you
100. tion does not ensure operation or accuracy 5700512 C Specifications and Reference Information 6 23 Advanced Energy Specifications for Model FC 7710 MFCs The following table lists specifications for the FC 7710 MFCs Table 6 23 Specifications for FC 7710 series MFCs Specification FC 7710 FC 7710C FC 7710CD FC 7710CU Full scale range N equivalent 6 slm to 6 slm to 6 slm to 30 slm 20 sim 50 slm Valve type Normally Normally closed open Response time Maximum 2 of full scale within 2 seconds AccuracyNote Under 20 slm maximum 1 of full scale over 20 slm maxi mum of 2 of full scale Linearity Under 20 slm maximum 0 5 of full scale over 20 slm maxi mum of 1 of full scale Repeatability Maximum at 0 2 of full scale External leak rate Maximum 1 x 10 7 Pa m sec He Flow rate control range 5 to 100 2 to 100 Operating pressure range 69 to 275 kPa D 10 to 40 psi D Proof pressureNote 2 981 kPa G 142 psi G Operating temperature 5 C to 45 C 41 F to 113 F Flow rate setting and output signal 0 VDC to 5 0 VDC Supply power Power consumption Minimum 15 VDC 2 25 mA Minimum 15 VDC 2 180 mA Maximum 3 1 W Gas wetted surface material SUS316 SUS316L KM 45 Viton or Chloroprene rubber Standard fitting 1 4 VCR 1 4 SW Equivalent to 1 4 VCR 1 4 SW Mounting
101. ubstitute parts or perform any unauthorized modification to the MFC Service and repair the MFC only at authorized service centers to ensure that all safety features are maintained Do not remove MFC covers Component replacement and internal adjustments must be made by qualified service personnel only Ifhazardous materials are used observe the proper safety precautions completely purge the MFC when necessary and ensure that the material used is compatible with sealing materials After installing the MFC or before its removal from a system purge the MFC completely with a clean dry gas to eliminate all traces of the previously used flow material This MFC should be purged by qualified personnel following standard company procedures Do not operate this product in an explosive environment e Ensure that all MFC fittings are consistent with MFC specification and compatible with the intended use of the MFC Before proceeding with the MFC setup carefully check all plumbing connections to ensure leak tight installation Never operate this MFC at pressures higher than the rated maximum pressure Refer to Model Specifications on page 6 1 for maximum allowable pressure specifications Safety and Product Compliance Guidelines 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs When operating from a pressurized gas source install a suitable burst disc in the vacuum system t
102. ure 3 2 Connection to peripheral equipment using a dedicated power supply 3 7 Figure 3 3 Example of connections using dedicated line code LC OUT N 3 8 Figure 3 4 MFC zero point adjustment KK KK KK eee 3 10 Figure 4 1 20 pin card edge connector 0 0c cece KK KK KK KK k 4 1 Figure 4 2 20 pin Honda connector 00 00 es 4 2 Figure 4 3 9 pin subminiature D connector asaan eenaa ee 4 5 Figure 4 4 Alarm connection 2cc sce mka kn teed sede eee web wey eee KI KIR K ee ei eee ds 4 8 Figure 4 5 Card edge purge function signals 0 KK KK KK eee 4 9 Figure 4 6 Card edge normally open internal circuitry for purge function 4 9 Figure 4 7 Card edge normally closed internal circuitry for purge function 4 10 Figure 4 8 Honda 20 pin purge function connection aa 4 10 Figure 4 9 Honda 20 pin normally open internal circuitry for purge function 4 11 Figure 4 10 Honda 20 pin normally closed internal circuitry for purge function 4 11 Figure 4 11 9 pin subminiature D purge function connection 4 12 Figure 4 12 9 pin subminiature D internal circuitry for purge function 4 12 Figure 5 1 No Gas Is Being Supplied troubleshooting flow chart 5 2 Figure 5 2 Set Point and Flow Output Do Not Match troubleshooting flow chart 5 3 Figure 5 3 Unstable Flow or Insufficient Output Exists troubleshooting f
103. ve the following requirements when packing an MFC for shipment e Obtain a return authorization number from Global Services e Include the appropriate material safety data sheet MSDS information Without this information AE will return the MFC to you without repair Follow your company procedures for purging and removal of an MFC e Seal the MFC end fittings for shipping e Place the MFC in two plastic bags double bag packaging for shipment Be sure to vacuum seal each bag Pack the MFC with sufficient shock absorbent material to prevent damage to MFC s plastic bag from vibration or impact during shipment 5 10 Troubleshooting and Global Customer Support 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs WARRANTY All MFC warranties are void if the seal on the MFC cover is broken or removed Advanced Energy AE products are warranted to be free from failures due to defects in material and workmanship for 12 months after they are shipped from the factory please see warranty statement below for details In order to claim shipping or handling damage you must inspect the delivered goods and report such damage to AE within 30 days of your receipt of the goods Please note that failing to report any damage within this period is the same as acknowledging that the goods were received undamaged For a warranty claim to be valid it must Be made within the applicable warranty period
104. writing aei com To order a manual please contact Technical Support e technical support aei com 5700512 C V Advanced Energy vi 5700512 C Series FC 77X 77XX Series FC 78X 78XX and Series FC 79X MFCs Table of Contents Chapter 1 Safety and Product Compliance Guidelines Important Safety Information naasna kk kk KK KK KK KK KK KK KK KI KK LAGE 1 1 Model Numbers for this Manual kk kk kK KK KK KK KK es 1 1 Interpreting the Manual kk kk kk kk kK KK KK KK K KK es 1 4 TUPE Conventions nakak sk sekn eddies ABAD NG TA pang beens EIERN 1 4 Danger Warning and Caution Boxes aa 1 5 Interpreting Product Labels wo pna kk kk kK KA KK KI KK KK K K eet weeei eet 1 5 Safety Guidelines nna kk kk kk kk kK KK KK KK KK KK KK KK KK KK KK KK KK KK ens 1 6 Product CertlifiG liOll lt s4 5 a xn nanan d bar kan l ea Sa k a y na 1 7 Conditions of Use kk kk kk as KK KK KK KK KK KK KK KK KK oe KK KK KK KK k 1 7 Chapter 2 Product Overview Product Description and Theory of Operation KK KK KK KK KK 2 1 MFC Components A kk kK kK KK KK KK KK KK KK KK KK KK KK KK KK KK KK KK KK PE 2 2 Flow Sensor Assembly kk kk kK kK KK KK KK KK KK KK KK KK KK KK KK 2 3 Bypass Assembly kk kk kk kk kk kK KK KK KK KK KK KK KK KK KK KK KK KK IK K 2 4 Electronics Assembly naaa KK KK KK KK KI KK KK KK een ae shaw 2 4 Valve Assembly kk kk kk kk kk

Mass Flow Controllers Series FC-77X / 77XX, Series FC

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