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User Manual PZ138E - Physik Instrumente

1. 32 10 11 12 Start Up and Operation 6 1 General Notes on Start Up and Operation eee eee eee 6 2 Determining the Operating Parameters eee eee eee eee 6 2 1 Overview of Limiting Factors ss sese eee ee 6 2 2 Calculating the Effective Mass sse eee eee 6 2 3 Calculating the Maximum Operating Frequency of the Loaded PlezO Actuator colas un a auqa asqa sauna aa na 6 2 4 Calculating the Forces that Occur During Dynamic Operation 6 2 5 Calculating the Power Requirement for Sinusoidal Operation 6 3 CN A 6 4 Discharging the P OXX uuu cnn nnnnn cnn nn n nana rra rra 6 5 Short Circuiting the P 0xx T Maintenance 7 1 General Notes on Maintenance eee eee eee 7 2 Cleaning the 1 2 1 05 ia Troubleshooting Customer Service Technical Data TOM SPSCHICALONS seccatid tada 10 1 1 Data Table iio sa u S qa uuu 10 1 2 Maximum Ratings icon narra 10 1 3 Compressive Tensile Stress Capacity and Preload 10 1 4 Ambient Conditions and Classifications 10 2 DIMENSIONS cis a dire Old Equipment Disposal EC Declaration of Conformity PIEZO TECHNOLOGY WWW PICERAMIC COM 1 About this Document 1 About this Document In this Chapter Goal and Target Audience of this User Manual sese 1 Symbols and Typographic Conventions ee eee eee eee 1 PIQUIOS ace
2. Destruction of the piezo actuator by mechanical overload D Torques bending forces and lateral forces can destroy the piezo actuator gt gt Avoid torques bending forces and lateral forces on the piezo actuator Make sure that the center of load of the moving system is on the motion axis of the piezo actuator Avoid an uneven load distribution by using suitable structures or guide elements e g ball tips or flexure guides Establish contact over as large an area as possible on the end surfaces of the piezo actuator and select opposing surfaces with an evenness of only a few micrometers Minor unevenness can be compensated by full surface gluing for example NOTICE The shrink tubing on the piezo actuator prevents contamination and serves as a gD Damage from removing the shrink tubing from the piezo actuator strain relief for the stranded wires Contamination of the piezo ceramics and or inadmissible forces on the stranded wires can damage the piezo actuator gt gt Remove the shrink tubing only if necessary and only if the piezo actuator is installed in the location where it is to be operated If the shrink tubing has to be removed ensure that the surface of the piezo actuator does not become scratched in the process If the shrink tubing has been removed gt gt Do not touch the outer surface or the contact strips of the piezo actuator Avoid tensile stress on the stranded wires of the piezo
3. gt To order contact our customer service department p 53 16 Version 1 2 0 PZ138E P 0xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 3 Product Description 3 7 Technical Features PICA piezo actuators P Oxx are PICA high load piezo actuators for static and dynamic applications They provide a micro second response and sub nanometer resolution PICA high load piezo actuators are manufactured from piezo ceramic disks in a stack construction The high load capacity makes them ideal for applications such as precision manufacturing and active vibration damping P Oxx Piezo Actuator PZ138E Version 1 2 0 17 PIEZO TECHNOLOGY WWW PICERAMIC COM 4 Unpacking 4 Unpacking Destruction of the piezo actuator by impurities Impurities on the surface of the P Oxx can result in the piezo actuator being destroyed by electric flashovers during operation gt When handling the piezo actuator wear powder free nitrile or latex gloves and suitable protective goggles gt Prevent the ceramic insulation or polymer insulation from coming into contact with conductive liquids e g finger sweat and conductive materials e g metal dust gt Ifthe piezo actuator has been accidentally contaminated clean it in accordance with the instructions in Cleaning the P Oxx p 49 1 Unpack the P Oxx with care 2 Compare the contents against the items covered by the contract and against the packing list 3 Insp
4. 2 Safety E I 2 2 General Safety Instructions The P 0xx is built according to state of the art technology and recognized safety standards Improper use can result in personal injury and or damage to the P 0xx gt Only use the P 0xx for its intended purpose and only use it if it is in a good working order Read the user manual Immediately eliminate any faults and malfunctions that are likely to affect safety The operator is responsible for the correct installation and operation of the P Oxx Temperature changes and compressive stresses can induce charges in the P Oxx piezo actuator After being disconnected from the electronics the piezo actuator can stay charged for several hours Touching the live parts of the P Oxx can result in serious injury or death from electric shock gt Do not touch the P Oxx unless it is discharged p 45 gt When handling the piezo actuator wear powder free nitrile or latex gloves and suitable protective goggles gt Keep the piezo actuator short circuited p 47 when it is not connected to the electronics gt Do not disassemble the piezo actuator The system into which the P Oxx is integrated e g case or surrounding mechanical system must be connected to a protective earth conductor If the protective earth conductor is missing or not properly connected dangerous touch voltages can occur on the overall system in case of malfunction or failure of the system If touch voltages exi
5. 58 Version 1 2 0 PZ138E P 0xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 10 Technical Data Piezo Maximum Maximum Operating Frequency without Load Maximum Power Actuator Operating A B Consumption Voltage Range Without Considering Considering Thermal Considering Thermal Aspects Aspects Thermal Aspects AA A A 0Vto1000V_ TTS 27Hz 2W P 025 10 P 025 20 P 025 40 P 025 80 8 KHz P 025 90 2 kHz P 025 150 P 025 200 P 035 10 P 016 90 N P 035 20 P 035 40 P 035 80 1 8 kHz P 035 90 1 2 kHz P 045 20 5 3 kHz P 045 40 3 2 kHz P 045 80 1 7 kHz P 045 90 P 050 20 P 050 40 3 2 kHz P 050 80 P 050 90 P 056 20 5 3 kHz P 056 40 P 056 80 P 056 90 1 2 kHz P 010 00P P 010 10P P 010 20P 6 2 kHz P 010 40P P 010 80P P 016 10P 10 7 kHz P 016 20P P 016 40P P 016 80P 1 7 kHz P 016 90P P 025 10P P 025 20P 5 8 kHz P 025 40P P 025 80P P 025 90P 1 2 kHz P 035 10P P 035 20P P 035 40P 3 2 kHz P 035 80P P 035 90P P 045 20P 5 3 kHz P 045 40P P 045 80P P 045 90P 1 P 056 20P Sola 2jSialo aS o gt 2 8 N o re fod e S Fla Ea ee e S s s s S S SISI ISIS S ZZ ZZ ZZ EEE P Oxx Piezo Actuator PZ138E Version 1 2 0 59 10 Technical Data P I Piezo Maximum Maximum Operating Frequency without Load Maximum Power Actuator Operating A B Consumption Voltage Range Without Considering Considering Thermal Considering Thermal Aspects Thermal Aspects A A
6. P 056 40P _ 0 V to 1000 V 3kHz _ i0Hz P 056 80P 0 V to 1000 V 1 P 056 90P _ 0 V to 1000 V P 010 00H 0V to 1000 V 3 9 W 10 1 3 Compressive Tensile Stress Capacity and Preload 60 Piezo ceramic withstands a pressure of up to 250 MPa but starts to depolarize at significantly lower compressive loads Since in addition stacked piezo actuators are manufactured from different materials e g piezo ceramic metallic electrodes epoxide the mechanical load capacity does not depend solely on the strength of the ceramic material Consideration must be given to additional parameters such as slenderness ratio bending tilt and homogeneity of the force application The tensile stress capacity of piezo actuators is just 5 to 10 of the compressive load capacity It is therefore recommended to mechanically preload the actuators The preload should be chosen only as high as necessary Compressive tensile stress capacity and preload of the P 0xx Type of Mechanical Stress P 0xx Maximum compressive load capacity 30 MPa Maximum tensile stress capacity without preload 2 MPa Recommended preload for dynamic operation 15 MPa Maximum preload for constant force 30 MPa 1 MPa corresponds to a pressure of 1 N per square millimeter of the base area of the piezo actuator For actuator diameters see the data table p 55 Depends on the strength of the glued connections p 26 Version 1 2 0 PZ138E P 0xx Piezo Actuator PIEZO
7. 0xx to the black wire of the P 202 xx connection cable c Insulate the soldered cable connections in a suitable manner 4 Connect the cable shield on the actuator side A to the actuator case and insulate it If there is no actuator case cut the shield on the actuator side and insulate it 5 Connect the connector of the P Oxx to the corresponding connection on the electronics 5 6 Connecting the Temperature Sensor to the Electronics The P 010 xxP P 056 xxP models have a PT 1000 temperature sensor which can be connected to the E 481 and E 482 electronics by means of a suitable LEMO connector available on request LEMO Figure 12 PT1000 temperature sensor to LEMO connector PT 1000 PT1000 temperature sensor LEMO LEMO connector soldering side Pin 1 and Pin 2 are bridged 1 Output Temp_SA 2 Output Temp_S 3 GND Ground A Cable shield actuator side Cable shield connector side 32 Version 1 2 0 PZ138E P 0xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 5 Installation Prerequisite Y Y Y You have read and understood the general notes on installation p 21 The P 0xx is discharged p 45 and short circuited p 47 The electronics is switched off Tools and accessories Suitable connector LEMO FFA 0S 303 CLA available on request Shielded 2 wire cable not included in scope of delivery Suitable soldering iron Suitable solder Suitable cable tools Con
8. TECHNOLOGY WWW PICERAMIC COM 10 Technical Data 10 1 4 Ambient Conditions and Classifications The following ambient conditions and classifications must be observed for the P Oxx Area of application Air pressure Relative humidity Storage temperature Transport temperature Overvoltage category Degree of pollution For indoor use only gt 500 hPa or lt 1 hPa Maximum relative humidity 50 Continuous operation with high static voltage in humid environments significantly reduces piezo actuator lifetime gt Observe the information on lifetime in General Notes on Start Up and Operation p 35 Operating temperature Models P 007 P 056 and models P 010 xxH P 025 xxH 20 C to 85 C Models P 010 xxP P 056 xxP 20 C to 150 C 20 C to 80 C 20 C to 80 C The P Oxx is intended for installation in devices that fulfil the following classifications Protection class Degree of protection according to IEC 60529 P Oxx Piezo Actuator IP20 PZ138E Version 1 2 0 61 10 Technical Data P I 10 2 Dimensions Dimensions in mm D2 1 0 05V 0 3 lt OD 0 4 lt OD 5 bol D2 1 0 05V 0 3 lt OD 0 4 lt OD 0 4 Figure 16 P 010 xxH P 025 xxH PICA Thru L ID OD see data table 62 Version 1 2 0 PZ138E P 0xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 11 Old Equipment Disposal 11 Old Equipment Disposal In accordan
9. actuator NOTICE Damage due to scratches on the surface of the piezo actuator a The surface of the piezo actuator is scratch sensitive Scratches on the surface can cause damage to the piezo actuator gt gt Do not use metal tools to install the piezo actuator Install the piezo actuator so that no scratches can occur on the ceramic or polymer insulation or on the end surfaces of the piezo actuator during installation and operation P Oxx Piezo Actuator PZ138E Version 1 2 0 23 5 Installation P I NOTICE Heating up of the P 0xx during operation The heat produced during operation of the P Oxx can affect your application gt Install the P Oxx so that your application is not affected by the dissipating heat INFORMATION Ground loops can occur when the shield of the connection cable of the P Oxx is connected to an actuator case that is additionally grounded via a separate protective earth conductor gt lfa ground loop occurs contact our customer service department p 53 Piezo actuators may only be loaded axially Moreover piezo actuators should be preloaded p 27 in order to avoid tensile stresses The following figures are to help you avoid mounting errors Figure 3 Prevention of lateral forces and torques Figure 4 Prevention of torques 24 Version 1 2 0 PZ138E P 0xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 5 Installation Figure 5 P
10. in the connection diagram a Solder the red stranded wire of the P 0xx to the wire of the connection cable that is connected to the female contact of the LEMO connector b Solder the black stranded wire of the P Oxx to the wire of the connection cable that is connected to the male contact of the LEMO connector c Insulate the soldered cable connections in a suitable manner Connect the cable shield on the actuator side A to the actuator case and insulate it If there is no actuator case cut the shield on the actuator side and insulate it Connect the connector of the P Oxx to the corresponding connection on the electronics Connecting the P 0xx to the electronics by means of a P 202 xx connection cable 1 2 P Oxx Piezo Actuator Make the stranded wires of the P Oxx accessible If the P Oxx is short circuited separate the short circuited stranded wires of the P Oxx from each other If ashorting clamp p 15 or a discharge resistor is connected remove this component from the stranded wires If necessary shorten the wires and the cable shield of the P 202 xx connection cable to the correct length PZ138E Version 1 2 0 31 5 Installation P I 3 Solder the stranded wires of the P 0xx to the wires of the P 202 xx connection cable as shown in the connection diagram a Solder the red stranded wire of the P 0xx to the red wire of the P 202 xx connection cable b Solder the black stranded wire of the P
11. maximum permissible stress and load capacities according to the specifications p 55 2 3 Organizational Measures User gt P 0xx Piezo Actuator manual Always keep this user manual available by the P 0xx The latest versions of the user manuals are available for download p 3 on our website Add all information given by the manufacturer to the user manual for example supplements or Technical Notes If you pass the P 0xx on to other users also turn over this user manual as well as all other relevant information provided by the manufacturer Only use the device on the basis of the complete user manual If your user manual is incomplete and is therefore missing important information serious or fatal injury as well as property damage can result Only install and operate the P 0xx after having read and understood this user manual PZ138E Version 1 2 0 7 2 Safety P I Personnel qualification Only authorized and qualified personnel must install operate maintain and clean the P 0xx 8 Version 1 2 0 PZ138E P 0xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 3 Product Description 3 Product Description In this Chapter Model OVe VieW uuu u u n u uui A a a aaa ia 9 Product VieWesiiaia iaa caidas 13 Product Babel nguy u u a asas ida diria 14 SCOPE Of D eliVery sisinio nianna iaeaea aeaa Aa AaS TO aaa Raa aaa anaE 15 Suitable ElSCtrOniGs dun eat A acid 15 AACCOSSOMCS ii iodo daa eta 16 Technical Featur
12. on our website PIEZO TECHNOLOGY WWW PICERAMIC COM Contents 1 About this Document 1 1 1 Goal and Target Audience of this User Manual 1 1 2 Validity for Custom Products no nn nnnn cnn nc cra nana 1 1 3 Symbols and Typographic Conventions esse eee eee eee eee eee eee eee eee eee 1 1 4 EU iii diia 2 1 5 Other Applicable Documents sss see eee eee eee eee eee eee 3 1 6 Downloading Manele assar cssg vrsta zcstay2azrs bsc ezc aras assr ation rc 3 2 Safety 5 2 1 INTENDED USES vicario aiii 5 2 2 General Safety Instructions I n na 6 2 3 Organizational Measures I n 7 3 Product Description 9 3 1 Model e vid W eraiten niana oth coclear Sia ceeasdaseeasduth Wea aadeanadiaceeseinten 9 3 2 Prod 6L VIEW scat incierta data 13 3 3 Product Ee cereiro nenea EREEREER EEUE REETA 14 3 4 Scope of Delivery sees eee eee eee eee eee 15 3 5 Suitable Electronics eee eee eee eee 15 3 6 ACCOSSOMOS arica aida 16 3 7 Technical Features eee eee 17 4 Unpacking 19 5 Installation 21 5 1 General Notes on installation sese eee eee eee 21 5 2 Mounting the e 0 siii manent ad tie bs 26 5 3 Applying a Frola viciosa dada 27 5 4 Applying the 3 Ree nn aaa EE AR ANEA 28 5 5 Connecting the P 0xx to the Electronics sese eee eee eee eee eee 29 5 6 Connecting the Temperature Sensor to the Electronics
13. operating voltage is properly connected see Connecting the P Oxx to the Electronics p 29 NOTICE Destruction of the piezo actuator by overheating Overheating can destroy the piezo actuator gt Cool the piezo actuator gt Monitor the temperature of the piezo actuator with a temperature sensor gt Adjust the operating voltage operating frequency and or operating time so that the maximum operating temperature of the piezo actuator is not exceeded see Ambient Conditions and Classifications p 61 Maximum Ratings p 58 and Determining the Operating Parameters p 40 P Oxx Piezo Actuator PZ138E Version 1 2 0 39 6 Start Up and Operation E I NOTICE D Destruction of the piezo actuator by cooling too quickly If the cooling is too fast the resulting thermomechanical load can destroy the piezo actuator gt Ensure that the piezo actuator cools down slowly to room temperature gt Connect additional cooling systems only when the piezo actuator has cooled down to room temperature NOTICE Uncontrolled oscillation D Oscillations can cause irreparable damage to the piezo actuator Oscillations are indicated by a humming and can result from the following causes Achange in the load and or dynamics requires the servo control parameters to be adjusted The piezo actuator is operated near its resonant frequency If you notice oscillations gt In closed loop operation
14. piezo actuator kg Me Effective mass Mer additional load M kg See also Calculating the Effective Mass p 42 Calculate the maximum operating frequency of the loaded unilaterally clamped piezo actuator using the following formula fax fo 3 fmax Maximum operating frequency of the loaded piezo actuator Hz fo Resonant frequency of the loaded piezo actuator Hz 6 2 4 Calculating the Forces that Occur During Dynamic Operation P Oxx Piezo Actuator gt Calculate the dynamic forces acting on the unilaterally clamped piezo actuator during sinusoidal operation at the frequency f using the following formula AL 2 Fyn ar mALS 2 Fayn Dynamic force N Me Effective mass Mer approx 1 3 of the mass of the piezo actuator additional load M kg see also Calculating the Effective Mass p 42 AL Displacement in the application peak to peak m f Frequency Hz Example The dynamic forces at 1000 Hz 2 um displacement peak to peak and 1 kg effective mass are approximately 40 N PZ138E Version 1 2 0 43 6 Start Up and Operation E I 6 2 5 Calculating the Power Requirement for Sinusoidal Operation gt Calculate the average current requirement for sinusoidal operation with the following formula la f C E Up p gt Calculate the peak current requirement for sinusoidal operation with the following formula H I Required average current of the It is essential for the power amplifier
15. side for clamping the stranded wires left and rear side of the clamp right 3 3 Product Labeling A label containing the following information is affixed to the black stranded wire of the P 0xx Description Data matrix code example contains the serial number Product name example the places after the point refer to the model 214003005 Serial number example individual for each P 0xx Meaning of the places counting from left 1 internal information 2 and 3 manufacturing year 4 to 9 consecutive numbers Country of origin Germany Country of origin WWW PICERAMIC COM Manufacturer s address website Manufacturer s logo 14 Version 1 2 0 PZ138E P 0xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 3 Product Description 3 4 Scope of Delivery Description Piezo actuator according to order p 9 INYY 0005 Shorting clamp 2 5 mm for the stranded wires of the piezo actuator Short instructions for piezo actuators without case 3 5 Suitable Electronics To operate a P Oxx you need electronics The device is selected depending on the type of application The table below lists the suitable products u wp E 421 00 High power piezo amplifier module without case 1100 V voltage range 550 W integrated power supply E 470 20 High power piezo amplifier 1100 V voltage range 550 W bench top device E 471 20 High power piezo amplifier 1100 V voltage range 550 W prepared for servo control
16. source sink A supply to supply enough current Required peak current of the amplifier source sink A Operating frequency Hz Details on the operating frequency see Overview of Limiting Factors p 41 Capacitance of the piezo actuator F See Data Table p 55 for the As V small signal capacitance of the piezo actuator For large signal conditions a safety factor of 70 should be added to the small signal capacitance Operating voltage peak to peak V Po 44 Version 1 2 0 PZ138E P 0xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 6 Start Up and Operation 6 3 Operating the P 0xx Prerequisite v You have read and understood the general notes on start up and operation p 35 You have determined the operating parameters for your application p 40 You have installed p 21 the P Oxx correctly and connected it to the electronics p 29 Y You have provided suitable electronics that can supply the required currents p 44 v You have read and understood the user manual of the electronics used Operating the P 0xx gt For starting up and operating the P 0xx follow the instructions in the manual of the electronics p 15 used 6 4 Discharging the P 0xx The P 0xx must be discharged in the following cases When the P Oxx is not in use but the electronics remains switched on to ensure temperature stability When the stranded wires of the P 0xx are to be short ci
17. will result in damage to the equipment gt Actions to take to avoid the situation INFORMATION Information for easier handling tricks tips etc Symbol Meaning 1 Action consisting of several steps whose sequential 2 order must be observed gt Action consisting of one or several steps whose sequential order is irrelevant n List item p 5 Cross reference to page 5 RS 232 Labeling of an operating element on the product example socket of the RS 232 interface 1 4 Figures For better understandability the colors proportions and degree of detail in illustrations can deviate from the actual circumstances Photographic illustrations may also differ and must not be seen as guaranteed properties 2 Version 1 2 0 PZ138E P 0xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 1 About this Document 1 5 Other Applicable Documents The devices and software tools which are mentioned in this documentation are described in their own manuals The latest versions of the user manuals are available for download p 3 on our website EA ee E 471 20 high power piezo amplifier E 472 20 high power piezo amplifier 2 channels E 462 00 HVPZT piezo amplifier E 464 00 HVPZT piezo amplifier 3 channels PZ176E User Manual E 481 00 high power piezo amplifier controller PZ170E User Manual E 482 00 PICA high power piezo amplifier PZ236E User Manual controller E 500 modular piezo controller PZ62E User Manual
18. 0 30 10 30 2100 71 130 35 P 010 40 60 10 56 2200 38 260 20 P 010 80 120 10 107 2400 20 510 10 P 016 10 15 16 17 4600 320 180 59 P 016 20 30 16 29 5500 190 340 36 P 016 40 60 16 54 6000 100 680 20 P 016 80 120 16 101 6500 54 1300 11 P 016 90 180 16 150 6500 36 2000 Y P 025 10 15 25 18 11000 740 400 56 P 025 20 30 25 30 13000 440 820 35 P 025 40 60 25 53 15000 250 1700 21 P 025 80 120 25 101 16000 130 3400 11 P 025 90 180 25 149 16000 89 5100 7 P 025 150 250 25 204 16000 65 7100 5 P 025 200 300 25 244 16000 54 8500 5 P 035 10 15 35 20 20000 1300 700 51 P 035 20 30 35 32 24000 810 1600 33 P 035 40 60 35 57 28000 460 3300 19 P 035 80 120 35 104 30000 250 6700 11 P 035 90 180 35 153 31000 170 10000 7 P 045 20 30 45 33 39000 1300 2800 32 P 045 40 60 45 58 44000 740 5700 19 P 045 80 120 45 105 49000 410 11000 10 P 045 90 180 45 154 50000 280 17000 7 P 050 20 30 50 33 48000 1600 3400 32 P 050 40 60 50 58 55000 910 7000 19 P 050 80 120 50 105 60000 500 14000 10 P 050 90 180 50 154 61000 340 22000 7 P 0xx Piezo Actuator PZ138E Version 1 2 0 55 10 Technical Data 56 P 056 20 P 056 40 P 056 80 P 056 90 Displace ment 30 60 120 180 Diameter OD 56 56 56 56 Length L 33 58 105 154 Travel range At 0 to 1000 V tolerance 10 20 Length L Tolerance 0 5 mm Blocking force At 0 to 1000 V Electrical capacitance Tolerance 20 measured at 1 Vpp 1 kHz RT Resonant frequency at 1 Von unloaded unclamped
19. 00 34 2500 19 5200 10 7800 7 2100 32 4300 18 8800 10 13000 7 3300 32 6700 18 14000 10 21000 7 P 0xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 10 Technical Data Travel range At 0 to 1000 V tolerance 10 20 Length L Tolerance 0 5 mm Blocking force At 0 to 1000 V Electrical capacitance Tolerance 20 measured at 1 Vpp 1 kHz RT Resonant frequency at 1 Vpp unloaded unclamped The value is halved for unilateral clamping Piezo ceramic type PIC255 Standard connections FEP insulated wire leads 100 mm AWG 24 1 15 mm Operating voltage 0 to 1000 V Operating temperature range 20 to 150 C Standard mechanical interfaces Steel plates 0 5 to 2 mm thick depends on model Outer surface FEP transparent shrink sleeving Recommended preload for dynamic operation 15 MPa Maximum preload for constant force 30 MPa Temperature sensor PT 1000 Custom designs or different specifications on request PICA Thru ring actuators Displace Diameter Diameter Length Blocking Stiff Electrical Resonant ment OD ID L Force ness Capacitance Frequency um mm mm mm N Num nF kHz P 010 00H 5 10 5 7 1200 230 15 144 P 010 10H 15 10 5 15 1700 110 40 67 P 010 20H 30 10 5 27 1800 59 82 39 P 010 40H 60 10 5 54 1800 29 180 21 P 016 00H 5 16 8 7 2900 580 42 144 P 016 10H 15 16 8 15 4100 270 120 67 P 016 20H 30 16 8 27 4500 150 230 39 P 016 40H 60 16 8 52 4700 78 490 21 P 025 10H 15 25 16 16 7400 490
20. 220 63 P 025 20H 30 25 16 27 8700 290 430 39 P 025 40H 60 25 16 51 9000 150 920 22 P 025 50H 80 25 16 66 9600 120 1200 17 Travel range At 0 to 1000 V tolerance 10 20 Length L Tolerance 0 5 mm Blocking force At 0 to 1000 V Electrical capacitance Tolerance 20 measured at 1 Vpp 1 kHz RT Resonant frequency at 1 Vpp unloaded unclamped The value is halved for unilateral clamping Piezo ceramic type PIC151 Standard connections FEP insulated wire leads 100 mm AWG 24 1 15 mm Operating voltage 0 to 1000 V Operating temperature range 20 to 85 C Standard mechanical interfaces Ceramic rings passive PZT Outer surface Polyolefin shrink sleeving black outside epoxy resin inside Recommended preload for dynamic operation 15 MPa Maximum preload for constant force 30 MPa Custom designs or different specifications on request P Oxx Piezo Actuator PZ138E Version 1 2 0 57 10 Technical Data 10 1 2 Maximum PI Ratings P Oxx piezo actuators are designed for the operating data given in the table below Additional information on the maximum ratings table Piezo Actuator Maximum operating frequency without load without considering thermal aspects column A The values apply to unilaterally clamped piezo actuators and are calculated as follows A third of the resonant frequency of the unloaded piezo actuator operation when not clamped on both sides divided by two For further rest
21. Connect a suitable shorting plug with integrated discharge resistor to the voltage connector of the P 0xx for at least a few seconds 46 Version 1 2 0 PZ138E P 0xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 6 Start Up and Operation 6 5 Short Circuiting the P Oxx The P 0xx must be discharged p 45 and short circuited before demounting e g before cleaning and transportation of the P Oxx as well as for modifications Prerequisite v You have read and understood the general notes on installation p 21 v You have discharged p 45 the P 0xx and disconnected it from the electronics Tools and accessories Only for P 0xx without connector condition as supplied Supplied shorting clamp p 15 Only for P Oxx with connector p 29 Suitable shorting plug available on request Short circuiting the P 0xx If the P Oxx does not have a connector gt Short circuit the stranded wires of the discharged P 0xx using the supplied shorting clamp If the P Oxx has a connector p 29 gt Connect a suitable shorting plug with integrated discharge resistor to the voltage connector of the P Oxx P Oxx Piezo Actuator PZ138E Version 1 2 0 47 PIEZO TECHNOLOGY WWW PICERAMIC COM 7 Maintenance 7 Maintenance In this Chapter General Notes on Maintenance nono nannnnnnnn nono nonna nana ncnnnnnnnns 49 Cleaning the r uuu cia nd little 49 7 1 General Notes on Main
22. E 462 0E1 HVPZT piezo amplifier module 10 to PZ210E User Manual 1000 V OEM version 1 6 Downloading Manuals INFORMATION If a manual is missing or problems occur with downloading gt Contact our customer service department p 53 P Oxx Piezo Actuator PZ138E Version 1 2 0 3 1 About this Document P I INFORMATION For some products e g Hexapod systems and electronics that are delivered with a CD access to the manuals is password protected The password is stored on the CD Availability of the manuals Password protected manuals FTP download directory Freely available manuals Pl website gt Follow the corresponding instructions for downloading Download freely accessible manuals 1 2 3 4 Open the website http www pi portal ws Click Downloads Click the corresponding product category Go to the corresponding product code The available manuals are displayed Click the desired manual and save it on the hard disk of your PC or on a data storage medium Download password protected manuals 1 2 3 Insert the product CD in the PC drive Switch to the Manuals directory on the CD In the Manuals directory open the Release News file including releasenews in the file name Find the user name and the password in the section User login for software download in the Release News Open the FTP download directory ftp pi ftp ws Windows operating systems Open the FTP download direct
23. ICA Power piezo actuator 60 um travel range OD 25 mm x L 60 mm PICA Power piezo actuator 120 um travel range OD 25 mm x L 113 mm PICA Power piezo actuator 180 um travel range OD 25 mm x L 165 mm PICA Power piezo actuator 15 um travel range OD 35 mm x L 21 mm PICA Power piezo actuator 30 um travel range OD 35 mm x L 34 mm PICA Power piezo actuator 60 um travel range OD 35 mm x L 61 mm PICA Power piezo actuator 120 um travel range OD 35 mm x L 114 mm PICA Power piezo actuator 180 um travel range OD 35 mm x L 166 mm PICA Power piezo actuator 30 um travel range OD 45 mm x L 36 mm PICA Power piezo actuator 60 um travel range OD 45 mm x L 63 mm PICA Power piezo actuator 120 um travel range OD 45 mm x L 116 mm PICA Power piezo actuator 180 um travel range OD 45 mm x L 169 mm PICA Power piezo actuator 30 um travel range OD 56 mm x L 36 mm PICA Power piezo actuator 60 um travel range OD 56 mm x L 63 mm PICA Power piezo actuator 120 um travel range OD 56 mm x L 116 mm PICA Power piezo actuator 180 um travel range OD 56 mm x L 169 mm PZ138E Version 1 2 0 11 3 Product Description E PICA Thru ring actuators Description P 010 00H PICA Thru piezo actuator 5 um travel range OD 10 mm x ID 5 mm x L 7mm PICA Thru piezo actuator 15 um travel range OD 10 mm x ID 5 mm x L 15 mm PICA Thru piezo actuator 30 um travel range OD 10 mm x ID 5 mm x L 27 mm PICA Thru piezo actuator 60 um travel range OD 10 mm
24. PI PZ138E P 0xx Piezo Actuator User Manual Version 1 2 0 Date 10 12 2014 This document describes the following products P P 007 P 056 PICA Stack piezo actuators travel range to 300 um P 010 xxP P 056 xxP PICA Power piezo actuators travel range to 180 um P 010 xxH P 025 xxH PICA Thru ring actuators travel range to 80 um x stands for the different models This document also applies to custom products of the following product lines PICA Stack PICA Power PICA Thru product line see delivery note PI Ceramic GmbH Lindenstrasse 07589 Lederhose Germany Phone 49 36604 882 0 Fax 49 36604 882 4109 E mail info piceramic com PIEZO TECHNOLOGY WWW PICERAMIC COM PI Physik Instrumente Pl GmbH 8 Co KG is the owner of the following trademarks PIO PICO PICMA PiLine PIFOC PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation Picoactuator Pilnano 2014 PI Ceramic GmbH Lederhose Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Pl Ceramic GmbH retains all the rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source Original instructions First printing 10 12 2014 Document number PZ138E CBo Version 1 2 0 Subject to change without notice This manual is superseded by any new release The latest release is available for download p 3
25. The value is halved for unilateral clamping Piezo ceramic type PIC151 Standard connections FEP insulated wire leads 100 mm AWG 24 Y 1 15 mm Operating voltage 0 to 1000 V Operating temperature range 20 to 85 C Standard mechanical interfaces Steel plates 0 5 to 2 mm thick depends on model Outer surface Polyolefin shrink sleeving black Recommended preload for dynamic operation 15 MPa Maximum preload for constant force 30 MPa Custom designs or different specifications on request PICA Power piezo actuators Displace ment um P 010 00P 5 P 010 10P 15 P 010 20P 30 P 010 40P 60 P 010 80P 120 P 016 10P 15 P 016 20P 30 P 016 40P 60 P 016 80P 120 P 016 90P 180 P 025 10P 15 P 025 20P 30 P 025 40P 60 P 025 80P 120 P 025 90P 180 P 035 10P 15 P 035 20P 30 P 035 40P 60 P 035 80P 120 P 035 90P 180 P 045 20P 30 P 045 40P 60 P 045 80P 120 P 045 90P 180 P 056 20P 30 P 056 40P 60 P 056 80P 120 P 056 90P 180 Version 1 2 0 Diameter OD mm 10 10 10 Length L Blocking Stiffness PZ138E Blocking Force 60000 66000 76000 78000 Force N 1200 1800 2100 2200 2300 4500 Stiffness 2000 1100 630 430 Num 240 120 PI Electrical Resonant Capacitance Frequency 4300 32 8900 19 18000 10 27000 7 Electrical Resonant Capacitance Frequency nF kHz 17 129 46 64 90 37 180 20 370 10 130 64 250 37 510 20 1000 10 1600 7 320 58 630 35 1300 19 2600 10 4000 7 530 55 12
26. ce with applicable EU law electrical and electronic equipment must not be disposed of in the member states of the EU with other wastes When disposing of your old equipment observe the international national and local rules and regulations To meet the manufacturer s product responsibility with regard to this product Pl Ceramic GmbH ensures environmentally correct disposal of old Pl equipment that was first put into circulation after 13 August 2005 free of charge If you have old Pl equipment you can send it postage free to the following address PI Ceramic GmbH Lindenstrasse D 07589 Lederhose P Oxx Piezo Actuator PZ138E Version 1 2 0 63 PIEZO TECHNOLOGY WWW PICERAMIC COM 12 EC Declaration of Conformity 12 EC Declaration of Conformity For the P Oxx an EC Declaration of Conformity has been issued in accordance with the following European directives 2011 65 EU RoHS Directive The applied standards certifying the conformity are listed below RoHS EN 50581 2012 If an electrical operating device is designed to be integrated in another electrical operating device The operator is responsible for a standards compliant integration of the electrical device into the overall system P Oxx Piezo Actuator PZ138E Version 1 2 0 65
27. d the preload and the operating frequency of the piezo actuator must be selected so that the dynamic forces occurring during operation do not exceed the maximum tensile compressive stress capacity of the piezo actuator See Calculating the Forces that Occur During Dynamic Operation p 43 Maximum permissible operating temperature of the piezo actuator p 61 The greater the operating frequency the operating voltage peak to peak and the capacitance of the piezo actuator the greater the thermal power generated in the piezo actuator The operating frequency operating voltage and operating time must be selected so that the maximum permissible operating temperature of the piezo actuator is not exceeded For the maximum permissible operating frequency without cooling see column B of the table in Maximum Ratings p 58 When cooling measures are used the limit values for the operating frequency operating voltage and operating time increase The use of a temperature sensor p 16 can prevent the piezo actuator from overheating Peak and average output current of the electronics p 15 used The electronics must be selected so that it can supply the required currents See Calculating the Power Requirement for Sinusoidal Operation p 44 PZ138E Version 1 2 0 41 6 Start Up and Operation E I 6 2 2 Calculating the Effective Mass Z Vf Meff gt m s merr gt m s M Figure 13 Calculation of the effective mass of a u
28. e P 202 xx connection cable are color coded Red Voltage connection Black Ground Figure 10 Piezo actuator P Oxx left to LEMO connector right when using a connection cable soldered on both sides A Cable shield actuator side B Cable shield connector side LEMO LEMO connector On the piezo actuator left Red stranded wire for voltage connection On the LEMO connector right Female contact for voltage connection _ On the piezo actuator left Black stranded wire for ground On the LEMO connector right Male contact for ground P 0xx Piezo Actuator PZ138E Version 1 2 0 29 5 Installation Figure 11 Piezo actuator P Oxx left to LEMO connector right when using the P 202 xx connection cable A Cable shield actuator side P 202 xx Cable for connecting the P Oxx to the electronics LEMO LEMO connector On the piezo actuator left Red stranded wire for voltage connection On the LEMO connector right Female contact for voltage connection connected to the red wire of the P 202 xx connection cable _ On the piezo actuator left Black stranded wire for ground On the LEMO connector right Male contact for ground connected to the black wire of the P 202 xx connection cable Prerequisite Y Y Y Y You have read and understood the general notes on installation p 21 You have read and understood the user manual of the electronics used If the P Oxx is not short circui
29. ect the contents for signs of damage If there is any sign of damage or missing parts contact Pl Ceramic immediately 4 Keep all packaging materials in case the product needs to be returned P Oxx Piezo Actuator PZ138E Version 1 2 0 19 PIEZO TECHNOLOGY WWW PICERAMIC COM 5 Installation 5 Installation In this Chapter General Notes on Installation eee eee eee 21 Mounting the P O uuu u a Rd dis 26 Applying a Proload uuu aissar nann AARE AA EAEAN 27 Applying Ls 5 Re o oleo A A 28 Connecting the P Oxx to the Electronics eee eee 29 Connecting the Temperature Sensor to the Electronics 5 1 General Notes on Installation DANGER A Dangerous voltage and residual charge on piezo actuators Temperature changes and compressive stresses can induce charges in the P 0xx piezo actuator After being disconnected from the electronics the piezo actuator can stay charged for several hours Touching the live parts of the P 0xx can result in serious injury or death from electric shock gt Do not touch the P Oxx unless it is discharged p 45 gt When handling the piezo actuator wear powder free nitrile or latex gloves and suitable protective goggles gt Keep the piezo actuator short circuited p 47 when it is not connected to the electronics gt Do not disassemble the piezo actuator P 0xx Piezo Actuator PZ138E Version 1 2 0 21 5 Installation P NOTICE D D
30. es viu ii 17 3 1 Model Overview PICA Stack piezo actuators east eee P 0xx Piezo Actuator PZ138E Version 1 2 0 9 3 Product Description E mag eee o 10 Version 1 2 0 PZ138E P 0xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 3 Product Description PICA Power piezo actuators Model P 010 00P P 010 10P P 010 20P P 010 40P P 010 80P P 016 10P P 016 20P P 016 40P P 016 80P P 016 90P P 025 10P P 025 20P P 025 40P P 025 80P P 025 90P P 035 10P P 035 20P P 035 40P P 035 80P P 035 90P P 045 20P P 045 40P P 045 80P P 045 90P P 056 20P P 056 40P P 056 80P P 056 90P P 0xx Piezo Actuator Description PICA Power piezo actuator 5 um travel range OD 10 mm x L 9 mm PICA Power piezo actuator 15 um travel range OD 10 mm x L 18 mm PICA Power piezo actuator 30 um travel range OD 10 mm x L31 mm PICA Power piezo actuator 60 um travel range OD 10 mm x L 58 mm PICA Power piezo actuator 120 um travel range OD 10 mm x L 111 mm PICA Power piezo actuator 15 um travel range OD 16 mm x L 18 mm PICA Power piezo actuator 30 um travel range OD 16 mm x L31 mm PICA Power piezo actuator 60 um travel range OD 16 mm x L 58 mm PICA Power piezo actuator 120 um travel range OD 16 mm x L 111 mm PICA Power piezo actuator 180 um travel range OD 16 mm x L 163 mm PICA Power piezo actuator 15 um travel range OD 25 mm x L 20 mm PICA Power piezo actuator 30 um travel range OD 25 mm x L 33 mm P
31. estruction of the piezo actuator by discharging too quickly If the P Oxx is not connected to the electronics the stranded wires must be short circuited in order to prevent the piezo actuator from charging during temperature changes and compressive stresses Unsuitable short circuiting leads to an abrupt contraction of the piezo actuator due to excessively fast discharging Abrupt contraction can destroy the piezo actuator gt Remove the supplied shorting clamp p 15 from the stranded wires only if this is required for installation or operation gt If the shorting clamp has been removed Ensure adequate protection against touching live parts Short circuit the stranded wires of the P 0xx using a 10 KQ discharge resistor or discharge the piezo actuator p 45 in a suitable manner before reconnecting the shorting clamp NOTICE Destruction of the piezo actuator by loads that are too high Excessive loads can destroy the P 0xx gt Do not exceed the maximum compressive tensile stress capacity p 60 NOTICE a Damage to the piezo actuator from excessive preloads Excessive preload can mechanically depolarize the piezo actuator Depolarization damages the piezo actuator gt Only apply preloads that are just as high as necessary gt Do not exceed the maximum preload p 60 22 Version 1 2 0 PZ138E P 0xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 5 Installation NOTICE
32. he protective earth conductor before starting it up again Burning from hot surface A The surface of the P 0xx and its vicinity can heat up during operation Touching the P 0xx and surrounding parts can result in minor injuries from burning gt gt Cool the P 0xx so that the temperature of its surface and surrounding parts does not exceed 65 C If sufficient cooling is not possible Make sure that the hot P 0xx and its surrounding parts cannot be touched If sufficient cooling and protection against contact are not possible Mark the danger zone in accordance with the legal regulations Version 1 2 0 PZ138E P 0xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 6 Start Up and Operation NOTICE Destruction of the piezo actuator by electric flashovers D The use of the P 0xx in environments that increase the electrical conductivity can lead to the destruction of the piezo actuator by electric flashovers Electric flashovers can be caused by moisture high humidity liquids and conductive materials such as metal dust In addition electric flashovers can also occur in certain air pressure ranges due to the increased conductivity of the air gt Avoid operating the P 0xx in environments that can increase the electrical conductivity gt Only operate the P 0xx within the permissible ambient conditions and classifications p 61 gt Prevent the piezo actuator from coming into contact with liqu
33. ids If liquid cooling is to be used contact our customer service department p 53 gt Protect the piezo actuator from moisture by means of hermetic sealing or the supply of dry air gt Inthe air pressure range between 1 hPa and 500 hPa Do not operate the P 0xx or operate it only at reduced voltage max 200 V gt For operation in vacuum below 0 1 hPa Do not operate the P Oxx during evacuation gt If the P Oxx is to be operated in a special gas atmosphere contact our customer service department p 53 NOTICE Destruction of the piezo actuator by dynamic forces During dynamic operation dynamic forces can occur that cancel the preload of the piezo actuator Operation without a preload can destroy the actuator gt Do not exceed the maximum compressive tensile stress capacity p 60 gt Observe the notes in Determining the Operating Parameters p 40 P Oxx Piezo Actuator PZ138E Version 1 2 0 37 6 Start Up and Operation E I NOTICE Destruction of the piezo actuator by operating frequencies that are too high D An excessive operating frequency can cause thermal and mechanical overload thereby destroying the piezo actuator gt Select the operating frequency so that the following conditions are met The operating frequency of the piezo actuator does not exceed one third of the resonant frequency The resonant frequencies given in the data tables p 55 apply to operation of the piezo ac
34. immediately switch off the servo mode gt In open loop operation immediately stop the piezo actuator INFORMATION The positive direction of motion p 13 corresponds to the expansion direction of the piezo actuator when a positive voltage is applied 6 2 Determining the Operating Parameters INFORMATION For the determination of the operating parameters it is assumed that the piezo actuator is clamped on one side gt If you require operating parameters for the two sided free operation of the piezo actuator contact our customer service department p 53 40 Version 1 2 0 PZ138E P 0xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 6 Start Up and Operation 6 2 1 Overview of Limiting Factors Limiting factors for the operation of the piezo actuator P Oxx Piezo Actuator Resonant frequency The resonant frequency of the piezo actuator serves as a basis for calculating the operating frequency which must not exceed one third of the resonant frequency The resonant frequencies given in the data tables p 55 apply to operation of the piezo actuator when it is unloaded and not clamped on both sides In an arrangement with unilateral clamping the value has to be divided in half For loaded piezo actuators that are clamped on one side see Calculating the Maximum Operating Frequency of the Loaded Piezo Actuator p 42 Maximum compressive tensile stress capacity p 60 The mass of the load to be move
35. ler and display PC interface 19 E 472 20 2 channel high power piezo amplifier 1100 V voltage range 550 W 19 E 462 00 HVPZT piezo amplifier 10 to 1000 V bench top device E 462 OE1 HVPZT piezo amplifier module 10 to 1000 V OEM version E 464 00 HVPZT piezo amplifier 3 channels 1100 V voltage range bench top device E 481 00 High power piezo amplifier controller with energy recovery 1100 V voltage range 2000 W 19 E 482 00 PICA high power piezo amplifier controller with energy recovery 1050 V 6A 19 P Oxx Piezo Actuator PZ138E Version 1 2 0 15 3 Product Description E EA a si Modular piezo amplifier configuration example High voltage piezo amplifier for PICA HVPZT 3 channels with PC interface and display consisting of 1 x E 500 00 19 case for modular piezo controller system 1 to 3 channels 3 x E 508 00 HVPZT piezo amplifier module 3 to 1100 V 1 channel 1 x E 517 i3 Interface display module 24 bit D A TCP IP USB RS 232 IEEE488 3 channels gt To order contact our customer service department p 53 gt Before selecting electronics calculate the power requirements of your application p 44 3 6 Accessories The P 202 xx cable is for connecting the P 0xx to the electronics wn ee _ UU P 202 13 PICA HVPZT cable LEMO open end 3 m P 202 15 PICA HVPZT cable LEMO open end 5 m Connector LEMO FGG 0B 701 CJA 1173 Cable PUR cable 2 wire shielded
36. necting the temperature sensor to the electronics 1 P Oxx Piezo Actuator If necessary shorten the wires and the cable shield of the connection cable to the correct length Solder the LEMO connector to the wires of the connection cable as shown in the connection diagram Connect the cable shield on the connector side B to the connector shell Solder the stranded wires of the temperature sensor to the wires of the connection cable as shown in the connection diagram The polarity of the stranded wires on the temperature sensor is not relevant Connect the cable shield on the actuator side A to the actuator case and insulate it If there is no actuator case cut the shield on the actuator side and insulate it Connect the connector of the temperature sensor to the corresponding connection on the electronics PZ138E Version 1 2 0 33 PIEZO TECHNOLOGY WWW PICERAMIC COM 6 Start Up and Operation 6 Start Up and Operation In this Chapter General Notes on Start Up and Operatlion U e 35 Determining the Operating Parameters I 40 Operating the T uu u ua a ati doin 45 Discharging the P OXX soisissa iia ica 45 Short Gircuiting the PD ui aia aa aa aa aaan a ett aia 47 6 1 General Notes on Start Up and Operation DANGER A Dangerous voltage on piezo actuators during operation During operation the P Oxx carries voltages of up to 1000 V The shrink tubing of
37. nilaterally clamped piezo stack actuator without load left and with additional load right 1 Determine the mass m of your piezo actuator 2 Determine the additional load M 3 Calculate the effective mass m of the unloaded piezo actuator and marr of the loaded piezo actuator using the formulas in the figure above 6 2 3 Calculating the Maximum Operating Frequency of the Loaded Piezo Actuator INFORMATION In the following calculation the maximum permissible operating temperature of the piezo actuator is not taken into account During operation without cooling the maximum operating temperature may already be exceeded when the operating frequency is still below the limit value calculated in the following gt For the maximum permissible operating frequency without cooling see column B of the table in Maximum Ratings p 58 42 Version 1 2 0 PZ138E P 0xx Piezo Actuator PIEZO TECHNOLOGY WWW PIGERAMIC COM 6 Start Up and Operation Calculate the resonant frequency of the loaded unilaterally clamped piezo actuator using the following formula Mor fo f a eff fo Resonant frequency of the loaded piezo actuator Hz fo Resonant frequency of the unloaded piezo actuator Hz The resonant frequencies given in the data tables p 55 apply for the two sided free operation In an arrangement with unilateral clamping the value has to be divided in half Met Effective mass approx 1 3 of the mass of the
38. on either externally in the mechanical structure or internally in a case Prerequisite v You have read and understood the general notes on installation p 21 v The P Oxx is discharged p 45 and short circuited p 47 Tools and accessories When installing in a case Suitable case Suitable guide elements When creating the preload with a spring Suitable preload spring with the following characteristics The stiffness of the preload spring does not exceed 10 of the stiffness p 55 of the piezo actuator This is to minimize the displacement loss If the stiffness of the preload spring is equal to that of the actuator the free displacement drops by half With highly dynamic applications The resonant frequency of the preload spring exceeds that of the piezo actuator Applying a preload gt Apply the preload near the axis within the core cross section of the piezo actuator P Oxx Piezo Actuator PZ138E Version 1 2 0 27 5 Installation P I 5 4 Applying the Load The P 0xx can be coupled to a load in various ways depending on the application Gluing the piezo actuator p 26 into the mechanical system to be moved or into a flexure joint Using a ball tip Gluing a hardened ball tip with point contact to an even counter face Gluing a hardened ball tip with ring contact to a spherical calotte INFORMATION Diagrams showing how to couple the P Oxx to a load can be found in General Note
39. onics during operation If the connection cable of the piezo actuator is accidentally pulled out of the electronics during operation gt Switch off the electronics before you reconnect the piezo actuator 38 Version 1 2 0 PZ138E P 0xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 6 Start Up and Operation NOTICE Reduced lifetime due to permanently high voltage and high air humidity The permanent application of a high static voltage to piezo actuators leads to a considerable reduction in the lifetime of the piezo ceramic of the actuator This applies in particular to operation in a humid environment gt When the P Oxx is not in use but the electronics remains switched on to ensure temperature stability discharge the P Oxx p 45 gt If possible Limit the maximum operating voltage to 750 V during continuous operation Reduce offset voltages to a minimum v v Protect the piezo actuator from moisture by means of hermetic sealing or the supply of dry air gt Make sure that the air humidity in the vicinity of the P 0xx does not exceed the relative humidity given in Ambient Conditions and Classifications p 61 NOTICE Operating voltage too high or incorrectly connected Operating voltages that are too high or incorrectly connected can cause damage to the P 0xx gt Do not exceed the operating voltage range p 58 for which the P 0xx is specified gt Operate the P Oxx only when the
40. ontracts as the piezo actuator department p 53 voltage rises If the problem that occurred with your system is not listed in the table above or cannot be solved as described contact our customer service department p 53 52 Version 1 2 0 PZ138E P 0xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 9 Customer Service 9 Customer Service For inquiries and orders call PI Ceramic or send us an e mail info piceramic de If you have questions concerning your system have the following information ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or the software if present Operating system on the PC if present The latest versions of the user manuals are available for download p 3 on our website P Oxx Piezo Actuator PZ138E Version 1 2 0 53 PIEZO TECHNOLOGY WWW PICERAMIC COM 10 Technical Data 10 Technical Data In this Chapter SPECITICAONS cita ti ii Aa aia INARA calidad 55 Dimensions ii iia EA 62 10 1 Specifications 10 1 1 Data Table PICA Stack piezo actuators Displace Diameter LengthL Blocking Stiffness Electrical Resonant ment OD Force Capacitance Frequency um mm mm N N um nF kHz P 007 00 5 7 8 650 130 11 126 P 007 10 15 7 17 850 59 33 59 P 007 20 30 7 29 1000 35 64 36 P 007 40 60 7 54 1150 19 130 20 P 010 00 5 10 8 1400 270 21 126 P 010 10 15 10 17 1800 120 64 59 P 010 2
41. ory in Windows Explorer Log in with the user name and the password from the Release News In the directory of the corresponding product go to the Manuals sub directory Copy the desired manual to the hard disk of your PC or to a data storage medium 4 Version 1 2 0 PZ138E P 0xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 2 Safety 2 Safety In this Chapter tended USE excita 5 General Safety INStruCtIONS ooonononninnnnnccnnnccnnnconnccnnnccc cnc crac cnn 6 Organizational MeasurBS oncccnnncinnnnnnncccconcccnncnnn nn cnn cnn aaaea aaa nan 7 2 1 Intended Use The P Oxx is intended to be used in an environment which is free of dirt oil and lubricants In accordance with its design the P Oxx is intended for integration into a mechanical system and for the following applications Positioning of loads Dynamic positioning Vibration damping Force generation The operator is responsible for a standards compliant integration of the P Oxx into the overall system The motion of the P Oxx takes place in one axis When mounting the actuator without applying a preload observe the maximum tensile stress capacity p 60 For operation of the P 0xx suitable electronics that provides the required operating voltages is required The electronics is not included in the scope of delivery of the P Oxx We recommend the use of suitable electronics p 15 from PI P Oxx Piezo Actuator PZ138E Version 1 2 0 5
42. rcan a assay EEA aasan T 2 Other Applicable DOCUMENTS oooooncccconcccnoncconocinoncnnnanoccnnrcnn anna cnn 3 Downloading Manuals uu uuu iss A dd 3 1 1 Goal and Target Audience of this User Manual This user manual contains the necessary information for the intended use of the P Oxx x stands for the different models p 9 Basic knowledge of drive technologies and suitable safety measures is assumed The latest versions of the user manuals are available for download p 3 on our website 1 2 Validity for Custom Products This user manual also applies to custom products of the PICA Stack PICA Power and PICA Thru product lines except where superseded by the accompanying documentation of these products The product line is stated on the delivery note of the custom product The properties of custom products may differ from those stated in this manual 1 3 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual DANGER Imminently hazardous situation If not avoided the hazardous situation will result in death or serious injury gt Actions to take to avoid the situation P Oxx Piezo Actuator PZ138E Version 1 2 0 1 1 About this Document P AN Dangerous situation If not avoided the dangerous situation will result in minor injury gt Actions to take to avoid the situation NOTICE Dangerous situation If not avoided the dangerous situation
43. rcuited without a discharge resistor e g with the shorting clamp p 47 supplied If the connection cable of the P Oxx is accidentally pulled out of the electronics during operation Prerequisite v You have read and understood the general notes on installation p 21 v You have read and understood the general notes on start up and operation p 35 P Oxx Piezo Actuator PZ138E Version 1 2 0 45 6 Start Up and Operation E I Tools and accessories If the P 0xx is not connected to the electronics Only for P 0xx without connector condition as supplied 10 kQ discharge resistor not included in scope of delivery the touchable parts of which are adequately insulated for the actuator s operating voltage range p 58 Only for P Oxx with connector p 29 Electronics p 15 from PI or suitable shorting plug available on request Discharging a P 0xx connected to the electronics gt Set the piezo voltage to 0 V on the electronics Discharging a P Oxx that is not connected to the electronics If the P Oxx does not have a connector 1 Ensure adequate protection against touching live parts 2 Short circuit the stranded wires of the P Oxx for at least a few seconds using a 10 kQ discharge resistor If the P Oxx has a connector p 29 gt Connect the voltage connector of the P Oxx to the switched off Pl electronics which has an internal discharge resistor for at least a few seconds gt Alternative
44. revention of tensile stresses by means of a mechanical preload EELEE Figure 6 Prevention of an irregular load application 1 Tensile stresses Figure 7 Full area contact of the piezo actuator 2I Figure 8 Proper dimensioning of the end pieces in the case of point contact 1 Tensile stresses P 0xx Piezo Actuator PZ138E Version 1 2 0 25 5 Installation P I Figure 9 Mechanical or thermal loads electrically charge the piezo actuator Mounting only when short circuited 5 2 Mounting the P 0xx P Oxx piezo actuators are glued to metal or ceramic surfaces Prerequisite v You have read and understood the general notes on installation p 21 v The P Oxx is discharged p 45 and short circuited p 47 Tools and accessories Grease free and even surface Suitable adhesive e g cold hardening epoxy resin adhesive Mounting the P 0xx gt Glue the piezo actuator to the surface Apply the thinnest possible layer of adhesive During the hardening process maintain the operating temperature range p 61 specified for the piezo actuator Observe the temperature expansion coefficients of the materials involved 26 Version 1 2 0 PZ138E P 0xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 5 Installation 5 3 Applying a Preload The tensile stress capacity of the piezo actuator is relatively low It is therefore recommended to mechanically preload the piezo actuators in the applicati
45. rictions see Overview of Limiting Factors p 41 Maximum operating frequency without load considering thermal aspects column B In order to prevent the maximum permissible operating temperature from being exceeded the operating frequency of the unloaded uncooled piezo actuator must not exceed the given frequency when the operating voltage is 1000 V peak to peak In the case of smaller amplitudes of the operating voltage and or the use of cooling measures higher operating frequencies are possible For further restrictions see Overview of Limiting Factors p 41 Maximum power consumption Power consumption of the unloaded uncooled piezo actuator that is operated at an operating voltage of 1000 V peak to peak with the operating frequency from column B of this table Maximum Maximum Operating Frequency without Load Maximum Power Operating A B Consumption Voltage Range Without Considering Considering Thermal Considering Thermal Aspects Aspects Thermal Aspects AA A A P 007 00 OVto1000V 21kHz 112 Hz 1 6 W P 007 10 OVtot000V_ 9 8 kHz P 007 20 _ 0 V to 1000 V P 007 40 OVto1000V__ 3 3 kHz 24W P 010 00 oVioto00V 21 kHz 86 Hz T24w P 010 10 oVtoto00V_ 9 8kHz P 010 40 oVtoto00V_ 3 3kHz saw P 010 80 0 Vto1000V___ 1 7kHz AHS T32W P 016 20 _ 0 V to 1000 V 11 17 P 016 10 OVtoi000V_ 9 8kHz WwW P 016 40 OVto1000V_ 3 3 kHz P 016 80 0Vto1000V _ 18kHz P 010 20 OVtot000V_ 5 8kHz
46. s on Installation p 21 Prerequisite v You have read and understood the general notes on installation p 21 v The P Oxx is discharged p 45 and short circuited p 47 Tools and accessories Suitable adhesive e g cold hardening epoxy resin adhesive When using a ball tip Suitable ball tip When using a flexure joint Suitable flexure joint Applying the load gt Apply the load evenly If the piezo actuator is coupled in a milling pocket gt Ensure that there is full area contact at the end surface of the piezo actuator For this purpose choose the dimensions of the milling pocket correspondingly or make free cuts in the milling pocket If a point load is applied to the end piece of the piezo actuator gt Dimension the end piece so that its thickness corresponds to half the cross sectional dimension in order to prevent tensile stresses on the piezo actuator 28 Version 1 2 0 PZ138E P 0xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 5 Installation 5 5 Connecting the P 0xx to the Electronics The piezo actuator P 0xx can be connected to the electronics as follows Using a suitable connection cable not included in scope of delivery and a suitable LEMO connector available on request Alternative Using the P 202 xx connection cable see Accessories p 16 which is equipped with the LEMO FGG 0B 701 CJA 1173 connector INFORMATION The stranded wires of the P Oxx and the wires of th
47. st touching the overall system can result in serious injury or death from electric shock gt Before start up connect the overall system to a protective earth conductor in accordance with the applicable standards Do not remove the protective earth conductor during operation If the protective earth conductor has to be temporarily removed e g for modifications reconnect the overall system to the protective earth conductor before starting it up again 6 Version 1 2 0 PZ138E P 0xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 2 Safety During operation the P Oxx carries voltages of up to 1000 V The shrink tubing of the piezo actuator and protective polymer layer beneath do not provide contact protection against electric shock Touching the live parts of the P Oxx can result in serious injury or death from electric shock gt gt Do not touch the piezo actuator during operation Electrically insulate the piezo actuator from the surrounding mechanical system to prevent direct or indirect contact with live parts Observe the clearances and creepage distances required for the operating voltage and observe the standards applicable to your application Mechanical forces can damage or misalign the P Oxx gt Y Vv V Y Avoid impacts that affect the P 0xx Do not drop the P 0xx Avoid torques bending forces and lateral forces on the P 0xx Do not use metal tools during installation Do not exceed the
48. ted The P Oxx is discharged p 45 The electronics is switched off Tools and accessories When using a connection cable soldered on both ends Suitable LEMO connector available on request Shielded 2 wire cable not included in scope of delivery which complies with the voltage and current specifications of the electronics p 15 to be connected and meets the applicable standards with regard to the conditions of use When using the P 202 xx connection cable P 202 xx connection cable see Accessories p 16 Suitable soldering iron Suitable solder Suitable cable tools 30 Version 1 2 0 PZ138E P 0xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 5 Installation Connecting the P 0xx to the electronics by means of a connection cable to be soldered on both sides 1 If necessary shorten the wires and the cable shield of the connection cable to the correct length Solder the LEMO connector to the wires of the connection cable as shown in the connection diagram Connect the cable shield on the connector side B to the connector shell Make the stranded wires of the P Oxx accessible If the P Oxx is short circuited separate the short circuited stranded wires of the P Oxx from each other If ashorting clamp p 15 or a discharge resistor is connected remove this component from the stranded wires Solder the stranded wires of the P Oxx to the wires of the connection cable as shown
49. ted gt Check the cable connections motion correctly Excessive load gt Do not exceed the maximum compressive tensile stress capacity p 60 The E 481 or E 482 If the piezo actuator is equipped with a electronics from Pl has PT 1000 temperature sensor the E 481 deactivated the voltage and E 482 electronics evaluate the output due to signal from the temperature sensor overheating of the piezo 1 Switch off the electronics actuator Wait a few minutes until the piezo actuator has sufficiently cooled down Switch the electronics on again Preventive measures gt Reduce the operating voltage operating frequency and or operating time gt Cool the piezo actuator The E 481 or E 482 If the piezo actuator is equipped with a electronics from Pl has PT 1000 temperature sensor deactivated the voltage gt Connect the PT 1000 temperature output because no sensor to the electronics p 32 temperature sensor is connected If there is no temperature sensor gt Connect the dummy connector supplied with the electronics to the temperature sensor socket of the electronics in order to activate the voltage output on the electronics Piezo actuator is Contact our customer service depolarized due to department p 53 overheating or reverse polarity P Oxx Piezo Actuator PZ138E Version 1 2 0 51 8 Troubleshooting P I Possible Causes Piezo actuator Reverse polarity of the gt Contact our customer service c
50. tenance The P Oxx is maintenance free 7 2 Cleaning the P 0xx NOTICE Destruction of the piezo actuator by electric flashovers If it comes into contact with liquids the piezo actuator can be destroyed by electric flashovers Before cleaning the P Oxx gt Ensure that the P Oxx is discharged p 45 and short circuited p 47 After cleaning the P Oxx gt Dry the P Oxx completely in a drying cabinet recommended duration 30 minutes at 40 C Prerequisites v The P Oxx is discharged p 45 and short circuited p 47 v The P 0xx is disconnected from the electronics P Oxx Piezo Actuator PZ138E Version 1 2 0 49 7 Maintenance PI Cleaning the P 0xx gt gt gt Touch the piezo actuator only with powder free nitrile or latex gloves Do not use acetone When necessary clean the surfaces of the P Oxx with a cloth that is slightly dampened with a mild cleanser e g ethanol or isopropanol When cleaning in an ultrasonic bath Reduce the energy input to the necessary minimum Do not use any liquids other than isopropanol for cleaning Make sure that the cleaning time in the ultrasonic bath does not exceed two minutes After cleaning dry the P Oxx completely in a drying cabinet recommended duration 30 minutes at 40 C 50 Version 1 2 0 PZ138E P 0xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 8 Troubleshooting 8 Troubleshooting No or limited Cable is not connec
51. the piezo actuator and protective polymer layer beneath do not provide contact protection against electric shock Touching the live parts of the P Oxx can result in serious injury or death from electric shock gt Do not touch the piezo actuator during operation gt Electrically insulate the piezo actuator from the surrounding mechanical system to prevent direct or indirect contact with live parts Observe the clearances and creepage distances required for the operating voltage and observe the standards applicable to your application P Oxx Piezo Actuator PZ138E Version 1 2 0 35 6 Start Up and Operation E I DANGER Risk of electric shock if the protective earth conductor is not connected A The system into which the P 0xx is integrated e g case or surrounding mechanical system must be connected to a protective earth conductor If the protective earth conductor is missing or not properly connected dangerous touch voltages can occur on the overall system in case of malfunction or failure of the system If touch voltages exist touching the overall system can result in serious injury or death from electric shock gt gt Before start up connect the overall system to a protective earth conductor in accordance with the applicable standards Do not remove the protective earth conductor during operation If the protective earth conductor has to be temporarily removed e g for modifications reconnect the overall system to t
52. tuator when it is unloaded and not clamped on both sides In an arrangement with unilateral clamping the value has to be divided in half For loaded piezo actuators that are clamped on one side see Calculating the Maximum Operating Frequency of the Loaded Piezo Actuator p 42 The dynamic forces occurring during operation do not exceed the maximum tensile compressive stress capacity of the piezo actuator see Calculating the Forces that Occur During Dynamic Operation p 43 and Compressive Tensile Stress Capacity and Preload p 60 gt If your application involves the operation of a piezo actuator which is not clamped on both sides contact our customer service department p 53 NOTICE Damage due to steep edges in the control signal If the actuator does not have a preload steep edges in the control signal can trigger strong dynamic forces which damage the piezo actuator Steep edges can occur for example when digital wave generators are switched on gt Avoid steep edges in the control signal on actuators with low preload NOTICE Damage from reconnecting a charged piezo actuator The piezo actuator can remain charged if its connection cable is pulled out of the electronics during operation Reconnecting a charged piezo actuator to electronics that is still running can cause a mechanical impulse which damages the piezo actuator gt Do not pull out the connection cable of the piezo actuator from the electr
53. x ID 5 mm x L 54 mm PICA Thru piezo actuator 5 um travel range OD 16 mm x ID 8 mm x L 7 mm PICA Thru piezo actuator 15 um travel range OD 16 mm x ID 8 mm x L 15 mm PICA Thru piezo actuator 30 um travel range OD 16 mm x ID 8 mm x L 27 mm PICA Thru piezo actuator 60 um travel range OD 16 mm x ID 8 mm x L 52 mm PICA Thru piezo actuator 15 um travel range OD 25 mm x ID 16 mm x L 16 mm PICA Thru piezo actuator 30 um travel range OD 25 mm x ID 16 mm x L 27 mm PICA Thru piezo actuator 60 um travel range OD 25 mm x ID 16 mm x L 51 mm PICA Thru piezo actuator 80 um travel range OD 25 mm x ID 16 mm x L 66 mm 12 Version 1 2 0 PZ138E P 0xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 3 Product Description 3 2 Product View The figure serves as an example and can differ from your model Figure 1 Example of product view 1 Stranded wires 2 Outer lateral surface model dependent PICA Stack and PICA Thru Shrink tubing polyolefin black PICA Power Shrink tubing FEP transparent 3 End piece model dependent PICA Stack and PICA Power Steel disk PICA Thru Ceramic ring passive PZT 4 Inner lateral surface Protective polymer layer Contact strip The arrows in the figure indicate the expansion direction of the piezo actuator when a positive voltage is applied P Oxx Piezo Actuator PZ138E Version 1 2 0 13 3 Product Description E Figure 2 INYY 0005 shorting clamp Front

User Manual PZ138E - Physik Instrumente

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