User Manual MP136E - Physik Instrumente
Contents
1. 2004 108 EC EMC Directive 2011 65 EU RoHS Directive The applied standards certifying the conformity are listed below Safety Low Voltage Directive EN 61010 1 2010 EMC EN 61326 1 2013 RoHS EN 50581 2012 i U 651 Rotation Stage MP136E Version 1 0 0 512. Unpacking INFORMATION When handling the vacuum version of the rotation stage attention must be paid to appropriate cleanliness At PI all parts are cleaned before assembly During assembly and measurement powder free gloves are worn In addition the rotation stage is wipe cleaned afterwards and then shrink wrapped twice in vacuum compatible film gt Only touch the rotation stage with powder free gloves gt If necessary wipe the rotation stage clean after unpacking 1 Unpack the U 651 with care 2 Compare the contents with the items listed in the contract and the packing list 3 Inspect the contents for signs of damage If parts are missing or you notice signs of damage contact PI immediately 4 Keep all packaging materials in case the product needs to be returned U 651 Rotation Stage MP136E Version 1 0 0 15 PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 Installation In this Chapter General Notes on Installation cccoooncccccooncnnconnnnncnoncnncnnnnnnnonanonnnnononnnnnarnnnonanonnos 17 Connecting the U 651 to the Protective Earth Conductor 19 Mounting the U 651 on a Surface cccccccccccocncccnnnccncnnonnncnnnnnonononannnnnnnnnnnonnnannnnnnnnnnnnnnans 21 Affixing the Load to the U 651 oocccccccconcnoccccconcnoncnonancnnnnnonancnnnnnonannnnnnnonancnnnnnonanenss 23 Connecting the Vacuum Version to the Controller
3. and according to regulations v The U 651 is not connected to the controller Tools and accessories Mounting accessories in the scope of delivery p 12 4M6 screws Allen wrench Alternative not in the scope of delivery 4 M4 screws of suitable length Suitable screwdriver Mounting the U 651 on a Surface 1 Align the U 651 on the surface so that the selected holes in the U 651 see arrows in the figure overlap with the the corresponding holes in the surface 2 Insert four suitable screws into the selected holes in the base body of the U 651 3 Tighten each of the four screws with the following torque M6 screws 7 1 Nm M4 screws 2 1 Nm 4 Check that the U 651 is affixed firmly to the surface 22 Version 1 0 0 MP136E U 651 Rotation Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 4 Affixing the Load to the U 651 NOTICE Impermissibly high forces and torques Impermissibly high forces and torques that are applied to the moving platform can damage the U 651 gt For affixing type and mass of the load observe the maximum permissible forces according to the specifications p 39 gt Avoid tilting torques gt 0 5 Nm on the moving platform NOTICE Screws that are too long The U 651 can be damaged by screws that are too long Note the depth of the mounting holes in the moving platform p 47 gt Only use screws of the correct length for the respect
4. sees 24 5 1 General Notes on Installation A Dangerous voltage and residual charge on piezo actuators Piezomotors are driven by piezo actuators After disconnection from the electronics piezo actuators can remain electrically charged for several hours Temperature changes can also induce charges in piezo actuators Touching or short circuiting the contacts in the connector of the U 651 can lead to minor injuries from electric shock gt Do not touch the contacts in the connector of the U 651 NOTICE Lubricants dirt condensation Dirt oil lubricants and condensation will render the motor drive inoperable gt Ensure that the piezomotors of the U 651 do not come into contact with lubricants gt Keep the U 651 free from dirt and condensation NOTICE Heating up of the U 651 during operation The heat produced during operation of the U 651 can affect your application gt Install the U 651 so that your application is not affected by the dissipating heat U 651 Rotation Stage MP136E Version 1 0 0 17 5 Installation I NOTICE Unsuitable cables Unsuitable cables can cause damage to the controller and affect the performance of the U 651 gt Only use genuine PI parts to connect the U 651 to the controller gt Ifyou need longer cables use extension cables from PI p 13 NOTICE Unintentional changes in position with vertical mounting If the load exceeds the maximum torque of the driv
5. the parameter is set to the maximum permissible value The following table shows the relationship between the operating voltage and the motor power of the U 651 The operating voltage is output by the controller and depends on the actual control value The polarity sign of the control value determines the direction of motion Motor Power Operating Voltage Corresponding Control Value on the Rounded Controller om ove CIO 100 96 71 Ver max 32767 or 32767 Generated in closed loop operation via the control algorithm or set in open loop operation via the SMO command For further information see the user manual of the controller p 3 used to operate the U 651 U 651 Rotation Stage MP136E Version 1 0 0 43 10 Technical Data gt I 10 3 2 Velocity and Torque The following figure can be used to estimate the velocity and torque of the U 651 with different motor powers Motion is possible starting at a motor power of approx 30 96 Motor Power 100 96 Q 50 96 O O e I 00 Y E 360 oO o 9 0 1 0 15 Torque in Nm Figure 9 Relationship between velocity and torque of the U 651 with different motor power levels 44 Version 1 0 0 MP136E U 651 Rotation Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 3 3 Motor Power and Lifetime Motor power duty cycle and ambient temperature influence the lifetime of the rotation stage In order to prevent overheating and high wear
6. 3 m U 600 A05 Extension cable for PlLine amp 15 pin Sub D 5 m Other cable lengths available on request gt To order contact our customer service department p 37 3 Technical Features 3 7 1 Rotary Encoder The U 651 is equipped with an optical rotary encoder For the encoder resolution refer to the table in the Specifications section p 39 Optical rotary encoders measure the actual position directly direct metrology Therefore errors occurring in the drivetrain such as nonlinearity backlash or elastic deformation cannot influence the measurement of the position 3 7 2 Reference Point Switch The U 651 has an optical reference point switch see Reference Switch opecifications p 41 See the controller user manual and or associated software manuals for the commands which make use of the reference point signal After a reference move of the U 651 the red dot on the moving platform is above the 0 mark in the base body 3 7 3 ID Chip The connector of the U 651 stages contains an ID chip Information on the stage e g type serial number date of manufacture version of the hardware is stored in parameters on the ID chip When switched on or rebooted controllers from PI read the data from the ID chip For more information on the ID chip recognition see the manual of the controller used U 651 Rotation Stage MP136E Version 1 0 0 13 4 Unpacking PIEZO NANO POSITIONING WWW PI WS 4
7. Sub D connector s U 651 04V Rotation stage with low profile and PlLine ultrasonic motors gt 360 rotation range 0 3 Nm torque Direct position measurement with incremental encoder 4 urad resolution Sub D connector s vacuum compatible to 10 hPa U 651 Rotation Stage MP136E Version 1 0 0 9 3 Product Description i 3 2 Product View Figure 1 U 651 product view 0 mark in the base body Moving platform Base body 0 mark of the moving platform Cable exit The arrow in the figure shows the positive direction of motion NA O N a 0 mark After a reference move of the U 651 the 0 mark of the moving platform is at the 0 mark in the base body 10 Version 1 0 0 MP136E U 651 Rotation Stage 3 Product Description PIEZO NANO POSITIONING WWW PI WS 3 3 Product Labeling A Figure 2 U 651 Position of the product labeling example view Manufacturer s logo AO Warning sign Observe manual U 651 03 Product name example the characters following the period refer to the model 115064246 Serial number example individual for each U 651 Meaning of the places counting from left 1 internal information 2 and 3 year of manufacture 4 to 9 consecutive numbers ide WWW PI WS Manufacturer s address website Data matrix code example contains the serial number A Country of origin Country of origin Germany Symbol for the protective earth conductor marks the protective e
8. conductor is 0 1 O at 25 A 20 Version 1 0 0 MP136E U 651 Rotation Stage 5 Installation PIEZO NANO POSITIONING WWW PI WS 5 3 Mounting the U 651 on a Surface NOTICE Warping of the base body Incorrect mounting can warp the base body Warping of the base body will increase wear and reduce accuracy gt Mount the U 651 on an even surface The recommended evenness of the surface is 10 um gt For applications with large temperature changes Only fasten the U 651 to surfaces that have the same or similar thermal expansion properties as the U 651 e g surfaces made of aluminum INFORMATION The positive direction of motion of the U 651 is shown in the product view p 10 Figure 6 U 651 Holes in the base body white arrows 4 x M6 black arrows 4 x M4 U 651 Rotation Stage MP136E Version 1 0 0 21 5 Installation gt I Prerequisites v You have read and understood the general notes on installation p 17 v You have provided a suitable surface for the required position of the holes for accommodating the screws see Dimensions p 47 Four M6 or M4 holes with a thread depth of at least 13 mm are present The evenness of the surface is lt 10 um For applications with large temperature changes The surface should have the same thermal expansion properties as the U 651 e g surface made of aluminum v You have accounted for the space required to route cables without bending
9. failure of the system If touch voltages exist touching the U 651 can result in minor injuries from electric shock gt gt gt Connect the U 651 to a protective earth conductor p 19 before start up Do not remove the protective earth conductor during operation If the protective earth conductor has to be removed temporarily e g in the case of modifications reconnect the U 651 to the protective earth conductor before starting it up again Mechanical forces can damage or misalign the U 651 gt gt gt Avoid impacts that affect the U 651 Do not drop the U 651 Do not exceed the maximum permissible stress and load capacities according to the specifications p 39 6 Version 1 0 0 MP136E U 651 Rotation Stage PIEZO NANO POSITIONING WWW PI WS 2 Safety 2 3 Organizational Measures User manual gt Always keep this user manual available with the U 651 The latest versions of the user manuals are available for download p 3 on our website Add all information from the manufacturer to the user manual for example supplements or Technical Notes If you give the U 651 on to other users also include this user manual as well as other relevant information provided by the manufacturer Only use the device on the basis of the complete user manual Missing information due to an incomplete user manual can result in minor injury and damage to equipment Only install and operate the U 651 after you hav
10. info pi ws gt If you have questions concerning your system have the following information ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or the software if present Operating system on the PC if present gt If possible Take photographs or make videos of your system that can be sent to our customer service department if requested The latest versions of the user manuals are available for download p 3 on our website U 651 Rotation Stage MP136E Version 1 0 0 37 PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 Technical Data In this Chapter BI CHING Mea ER ee ROTER 39 Ambient Conditions and Classifications 2424424424RR RR nnnannannannannennenne nenne nenn 42 MOLON POWER SS 43 DIMENSIONS ataca ato Zn ana tn ernennen ind ran Deinen een 47 PIN PAS SIN tati incita 48 10 1 Specifications 10 1 1 Data Table U 651 03 U 651 04 Unit Tolerance Active axes 07 07 Motion and Positioning Rotation range gt 360 gt 360 Integrated sensor Incremental Incremental encoder encoder Design resolution 9 4 urad Min incremental motion 27 12 urad typ Bidirectional 54 24 urad repeatability Velocity 720 720 s max Mechanical Properties Load capacity axial 20 20 N max force Holding torque 0 3 0 3 Nm max Torque cw ccw 07 0 3 0 3 Nm max U 651 Rotation Stage MP136E Version 1
11. release The latest release is available for download p 3 on our website PIEZO NANO POSITIONING WWW PI WS Contents 1 About this Document 1 1 1 Objective and Target Audience of this User Manual sssssss 1 1 2 Symbols and Typographic Conventions ccooocccncccccnncnncccnonncononononnnononononcnnncnonanenos 1 1 3 Bro ee A en ae ne Eee a ee 2 1 4 x9 Seen e Taler E O USO O Ie 3 1 5 Other Applicable DOCUMENTS ccccccccccocnnccnnnncconononnccnnnononononannnnnnnnnnnnnnnnnennnnnnnnnnnans 3 1 6 Downloading Manuals ccccseeeeccceesececeeeeeeeneeeeeeseaseeesseeeeeseauseeesseeeessaneeeenaaeees 3 2 Safety 5 2 1 ii A MM H 5 2 2 General Safety Instructions cccccccocnccnncccooncnnncononnnnnnnononnnnnnononannnnnononnnnnnnnnnanonos 5 2 3 Organizational Measures cccconncncoconcnnccconnnconononcononcnnononnnnnnnnnnnnonannnnononnnnonennnnnnnos 7 3 Product Description 9 3 1 POS Ty OI ee ee een 9 3 2 gieolemil e 10 3 3 Product LaDelNg ee ee ne 11 3 4 SCOPE OL DENVENY nennen 12 3 5 Suitable SONO AA ee 12 3 6 PIO CSS ONGS ee Pe 13 8 Technical Features uses seen ee A 13 3 7 1 ROV ENCON nenne ee 13 3 7 2 Reference Point SWIICH u innen 13 3 7 3 DIE ii Eo i UE O EE 13 4 Unpacking 15 5 Installation 17 5 1 General Notes on Installation ooccccccconcnnoconcnncoconnnnnnoncnnononnnnnnnanoncnnonons 17 5 2 Connecting the U
12. the motor power and the duty cycle should not exceed the limits given in the following graph A load cycle corresponds to a positioning run and includes the acceleration motion deceleration as well as downtime break The motor should only sporadically be operated at peak power the peak power serves as a control reserve INFORMATION In a vacuum there is no heat dissipation via convection gt Operate the vacuum version of the U 651 with a 20 lower motor power than given in the graph or reduce the duty cycle 100 75 x lt S gt 50 a o o 25 0 0 10 20 30 40 Ambient temperature in C Figure 10 U 651 Recommended duty cycle and motor power depending on the ambient temperature U 651 Rotation Stage MP136E Version 1 0 0 45 46 10 Technical Data 10 3 4 Influence of Downtimes on the Torque 2 E c 3 D lm o 12 16 Downtime inh Figure 11 Torque of the U 651 depending on the downtime of the motor Version 1 0 0 MP136E PI U 651 Rotation Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 4 Dimensions Dimensions in mm Note that the decimal places are separated by a comma in the drawings Figure 12 U 651 Dimensions and position of the O mark 1 after the reference point definition U 651 Rotation Stage MP136E Version 1 0 0 47 10 Technical Data 10 5 Pin Assignment 48 Connector Sub D 15 m f P NN eeee3e3ei gt 194
13. 0 0 39 10 Technical Data LE I U 651 03 U 651 04 Unit Tolerance Drive Properties Motor Type PlLine ultrasonic PlLine amp ultrasonic piezomotor piezomotor performance performance class 2 class 2 Reference point Optical Optical switches Miscellaneous Operating temperature O to 40 O to 40 C range Material Al black anodized Al black anodized Mass 500 500 g 5 96 Cable length not 1 5 1 5 m typ vacuum versions Cable length only 1 1 m typ vacuum versions Connector Sub D connector Sub D connector 15 pin m 15 pin m Recommended C 867 1U C 867 1U controller driver 1 channel 1 channel C 867 2U C 867 2U 2 channels 2 channels C 877 2U12 C 877 2U12 2 channels 2 channels affordable bench affordable bench top top The specifications for vacuum versions p 9 can differ Ask about custom designs 40 Version 1 0 0 MP136E U 651 Rotation Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 1 2 Reference Point Switch Specifications Supply voltage 5 V GND supply via the motor connector Signal output TTL level 10 1 3 Maximum Ratings The U 651 rotation stages are designed for the following operating data Maximum Operating Operating Frequency Maximum Power Voltage Consumption 200 Vip or 71 Va 152 to 165 kHz 10 1 4 Specifications for Vacuum Compatible Versions The following vacuum compatible components are used for the vacuum version of the U 651 Component Mechanical parts Alu
14. 000000 9 15 J Figure 13 Front view of the Sub D 15 connector USM P1 Input Piezo 71 VAC RMS USM_P2 Input Piezo 71 VAC RMS PI Output Encoder channel A inverted RS 422 Output Encoder channel B inverted RS 422 USM_P1 Input Piezo 71 VAC RMS 11 USM P3 Input Piezo 71 VAC RMS E E E E Version 1 0 0 MP136E U 651 Rotation Stage PIEZO NANO POSITIONING WWW PI WS 11 Old Equipment Disposal 11 Old Equipment Disposal In accordance with EU law electrical and electronic equipment may not be disposed of in EU member states via the municipal residual waste Dispose of your old equipment according to international national and local rules and regulations In order to fulfil its responsibility as the product manufacturer Physik Instrumente Pl GmbH amp Co KG undertakes environmentally correct disposal of all old Pl equipment made available on the market after 13 August 2005 without charge Any old Pl equipment can be sent free of charge to the following address Physik Instrumente Pl GmbH amp Co KG Auf der Roemerstr 1 D 76228 Karlsruhe Germany U 651 Rotation Stage MP136E Version 1 0 0 49 12 EC Declaration of Conformity PIEZO NANO POSITIONING WWW PI WS 12 EC Declaration of Conformity For the U 651 an EC Declaration of Conformity has been issued in accordance with the following European directives 2006 95 EC Low Voltage Directive
15. 2 Velocity and TOrque cccccsssceccessseeeceeseeeseenseesseees 10 3 3 Motor Power and Lifetime 10 3 4 Influence of Downtimes on the Torque 194 Bimensions u ici 195 _PINASSIONMEN nennen Old Equipment Disposal EC Declaration of Conformity PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 About this Document In this Chapter Objective and Target Audience of this User Manual cccccoocncnnccccconcnncnononnconononanenos 1 Symbols and Typographic Conventions ccccccccccccoonnccnnncccnonononcnnnnnnnnononanncnnnononononanennnos 1 A 9 race sess m 2 ze Tm 3 Other Applicable DOCUMENHS cccccceeceseeeeeeceeeeeeeueeeeeeeeeeeessaeeeeeeeeeeeesssaeeeeeeeeeeeeeaas 3 Downloading Manuals MN m Um 3 1 1 Objective and Target Audience of this User Manual This manual contains information on the intended use of the U 651 It assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual Dangerous situation If not avoided the dangerous situation will result i
16. 2011087542B3 DE102011087542B3 DE102011087801B4 DE102011108175 DE102012201863B3 DE19522072C1 DE19938954A1 Europe EP0789937B1EP1210759B1 EP1267425B1 EP1581992B1 EP1656705B1 EP1747594B1 EP1812975B1 EP1861740B1 EP1915787B2 EP1938397B1 EP2095441B1 EP2130236B1 EP2153476B1 EP2164120B1 EP2258004B1 EP2608286A2 USA US2010 0013353A1 US5872418A US6765335B2 US6806620B1 US6806620B1 US7218031B2 US7598656B2 US7737605B2 US7795782B2 US7834518B2 US7973451B2 US8253304B2 US8344592B2 US8482185B2 Japan JP2011514131 JP2011522506 JP3804973B2 JP4377956 JP4435695 JP4477069 JP4598128 JP4617359 JP46201 15 JP4648391 JP4860862 JP4914895 JP2013539346 China ZL200380108542 0 ZL200580015994 3 ZL200580029560 9 ZL200580036995 6 ZL200680007223 4 ZL200680030007 1 ZL200680042853 5 International patent applications WO2009059939A2 WO20101215944A1 WO2012048691 A2 WO2012113394A1 WO2012155903A1 WO2013034146A3 WO2013117189A2 2015 Physik Instrumente Pl GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH amp Co KG retains all the rights The use of any text images and drawings Is permitted only in part and only when indicating the Source Original instructions First printing 21 08 2015 Document number MP136E CBo Version 1 0 0 Subject to change without notice This manual is superseded by any new
17. 651 to the Protective Earth Conductor 19 5 9 Mounting the U 651 on a Surface cccccccconccnncccnnnnconcconnnnconnnonnnncnnnnonnnnrnnnnnnnanennnnss 21 5 4 Affixing the Load to the U 651 0 0 ccccccceeceeeeeeeeeeeaeeeeeeeseaeeeeeeessaeeeeeesssaaeeeees 23 5 5 Connecting the Vacuum Version to the Controller esussss 24 6 Start Up and Operation 27 6 1 General Notes on Start Up and Operation ooccccccononncnncccnnnccnncnononccnnenonanccanononans 27 6 2 Starting up the U 651 uusssnsssnnneennnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnennnnnnnnnennnnnnnnnn 31 10 11 12 Maintenance 7 1 General Notes on Maintenance cccccconcccccccconncnnncoconnnnnnnononononnnos 7 2 Performing a Maintenance RUN cccccseseeecseeeeeseeeeeeeeeseeeeaees 7 3 Cleaning the U 651 ooocccoconccnncccnnncconncononnnonnnonnnncnnnnononnnnnnonnnanennnnos Troubleshooting Customer Service Technical Data 10 1 SCC INC AUC INS TTE 10 1 1 Data Table unse een 10 1 2 Reference Point Switch Specifications 10 1 3 Maximum Ratings sees 10 1 4 Specifications for Vacuum Compatible Versions 10 2 Ambient Conditions and Classifications 10 3 Motor Power uensusuessnsssnensennennennnnnennnnnennnnnonnnnnnnennnnnnnnennnnnennnnnenn 10 3 1 Motor Power and Operating Voltage 10 3
18. ATION gt Observe the applicable standards for mounting the protective earth conductor On the U 651 there is an M4 hole next to the cable exit for connecting the protective earth conductor In the following figure this hole is marked with the symbol for the protective earth conductor Figure 4 M4 threaded hole for connecting the protective earth conductor U 651 Rotation Stage MP136E Version 1 0 0 19 5 Installation I Figure 5 Mounting of the protective earth conductor profile view 1 Base body of the U 651 2 Flat washer 3 Safety washer 4 Screw 5 Cable lug 6 Protective earth conductor Prerequisites v You have read and understood the general notes on installation p 17 Y The U 651 is not connected to the controller Tools and accessories Suitable protective earth conductor Cross sectional area of the cable 20 75 mm Supplied M4 screw set for protective earth p 12 for mounting a protective earth conductor Suitable screwdriver Connecting the U 651 to the protective earth conductor 1 If necessary fasten a suitable cable lug to the protective earth conductor 2 Fasten the cable lug of the protective earth conductor using the M4 screw on the protective earth connection of the U 651 as shown in the profile view 3 Tighten the M4 screw with a torque of 1 2 Nm to 1 5 Nm 4 Make sure that the contact resistance at all connection points relevant for mounting the protective earth
19. Note for the C 815 VF vacuum feedthrough 24 Version 1 0 0 MP136E U 651 Rotation Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation Tools and accessories C 815 VF vacuum feedthrough Sub D 15 p 13 PlLine extension cable U 600 A0x p 13 Sub D 15 1 m to 5 m air side Suitable tools for installing the vacuum feedthrough Installing the vacuum feedthrough 1 Find the dimensions of the vacuum feedthrough in the C815T0003 Technical Note see shell size 2 2 Provide a suitable opening for the vacuum chamber 3 Install the vacuum feedthrough so that the Sub D 15 f socket is in the vacuum chamber Connecting the vacuum version to the controller gt Connect the U 651 stage vacuum feedthrough and controller as shown in the connection diagram below Observe the assignment that is given by the labeling on the sockets connectors and cables C 815 VF Vacuum feedthrough PlLine cable Controller i Vacuum Air Figure 8 Connection of the vacuum version to the controller U 651 Rotation Stage MP136E Version 1 0 0 25 6 Start Up and Operation PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation In this Chapter General Notes on Start Up and Operation cccccccccccnncccconccnnnoconnnonnnononnnnnnnononncnnnnnnnos 27 Slanina Up TG dico MORIR o A 31 6 1 General Notes on Start Up and Operation A Risk of electric shock if the protective earth conductor is not c
20. PI MP136E U 651 Rotation Stage User Manual Version 1 0 0 Date 21 08 2015 This document describes the following products U 651 03 PlLine rotation stage 0 3 Nm torque incremental encoder 9 urad resolution Sub D connector U 651 03V PlLine rotation stage 0 3 Nm torque incremental encoder 9 urad resolution Sub D connector vacuum compatible to 10 hPa U 651 04 PlLine rotation stage 0 3 Nm torque incremental encoder 4 urad resolution Sub D connector U 651 04V PlLine rotation stage 0 3 Nm torque incremental encoder 4 urad resolution Sub D connector vacuum compatible to 10 hPa Physik Instrumente Pl GmbH amp Co KG Auf der Roemerstr 1 76228 Karlsruhe Germany Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws PIEZO NANO POSITIONING WWW PI WS PI Physik Instrumente Pl GmbH amp Co KG is the owner of the following trademarks PIO PICO PICMA PlLine PIFOC PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation Picoactuator Plnano PIMag Pl owns the following patents or patent applications for the technology field Ultrasonic Piezo Motors PlLine Germany DE102004024656A1 DE102004044184B4 DE102004059429B4 DE102005010073A1 DE102005039357B4 DE102005039358A1 DE102006041017B4 DE102008012992A1 DE102008023478A1 DE102008058484A1 DE102010022812A1 DE102010047280A1 DE102010055848 DE102011075985A1 DE102011082200A1 DE10
21. When the U 651 is being connected to the controller it can carry out unintentional motions Defective software or wrong operation of the software can also result in unintentional motions gt Do not place any objects in areas where they can be caught by moving parts Before connecting the U 651 check whether a macro is defined as the start up macro in the controller and cancel the selection of the start up macro if necessary NOTICE Damage from collisions Collisions can damage the rotation stage the load to be moved and the environment gt Make sure that no collisions are possible between the rotation stage the load to be moved and the environment in the motion range of the rotation stage gt Do not place any objects in areas where they can be caught by moving parts Y Stop the motion immediately if a controller malfunction occurs gt f possible adapt the travel range limits of your mechanical system in the software that you use for commanding the motion 28 Version 1 0 0 MP136E U 651 Rotation Stage 6 Start Up and Operation PIEZO NANO POSITIONING WWW PI WS NOTICE Uncontrolled oscillation Your application can be damaged by uncontrolled oscillation of the U 651 If you encounter noise during operation gt Immediately switch off the servo control system of the affected axes gt Check the settings of the servo control parameters NOTICE Overheating during continuous
22. arth connection of the U 651 p 19 U 651 Rotation Stage MP136E Version 1 0 0 11 3 Product Description E Figure 3 U 651 Hesidual voltage warning sign on connector Warning sign Residual voltage Notice of risk of electric shock p 5 3 4 Scope of Delivery U 651 Rotation stage according to order p 9 000036450 1 M4 screw set for protective earth consisting of 1 M4x8 flat head screw with cross recess ISO 7045 2 safety washers 2flat washers 000055390 1 ocrew set for mounting the U 651 consisting of 5 socket head cap screws M6x20 ISO 4762 1 Allen wrench AF 5 0 MP121EK Short instructions for the PlLine amp stage 3 5 Suitable Controllers Order Number Number Description 000000000 867 1U controller driver eater 1 channel for PlLine systems with Sub D connector s C 867 2U Piezomotor controller with drive electronics oibus 2 channels for PlLine amp systems with Sub D connector s C 877 2U12 Compact piezomotor controller with drive electronics 2 channels for PlLine amp systems gt To order contact our customer service department p 37 12 Version 1 0 0 MP136E U 651 Rotation Stage PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 6 Accessories C 815 VF Vacuum version Sub D 15 pin including C815T0003 technical note U 600 A01 Extension cable for PlLine amp 15 pin Sub D 1 m U 600 A03 Extension cable for PlLine amp 15 pin Sub D
23. derstandability the colors proportions and degree of detail in illustrations can deviate from the actual circumstances Photographic illustrations may also differ and must not be seen as guaranteed properties 1 5 Other Applicable Documents The devices and software tools which are mentioned in this documentation are described in their own manuals Desar otor Document C 867 1U PILine controller MS223E user manual C 867 2U PILine controller MS231E user manual C 877 2U12 PlLine controller MS233E user manual PIMikroMove SM148E software manual PlLine stage MP121EK short instructions 1 6 Downloading Manuals INFORMATION If a manual is missing or problems occur with downloading Contact our customer service department p 37 INFORMATION For products that are supplied with software CD in the scope of delivery access to the manuals is protected by a password Protected manuals are only displayed on the website after entering the password The password is included on the CD of the product U 651 Rotation Stage MP136E Version 1 0 0 3 1 About this Document gt I For products with CD Identify the password 1 2 3 Insert the product CD into the PC drive Switch to the Manuals directory on the CD In the Manuals directory open the Release News file including releasenews in the file name Find the user name and the password in the section User login for software download in the Release News Down
24. details Enlarge the settling window by changing the parameter values for the settling window limits on the controller See the controller user manual p 3 for details Mount the U 651 on an even surface The recommended evenness of the surface is 10 um For applications with large temperature changes Only mount the U 651 on surfaces that have the same or similar thermal expansion properties as the U 651 e g surfaces made of aluminum Version 1 0 0 35 8 Troubleshooting PI No or limited motion Excessive load The default parameter values are not suitable for operating with high loads The default parameter values are not suitable for cables longer than 3m gt gt Reduce the load see Data Table p 39 When the rotation stage is mounted vertically make sure that the installed load is lower than the maximum torque of the drive p 39 Adjust the operating parameters according to the description in Starting up the U 651 Adjust the operating parameters according to the description in etarting up the U 651 If the problem that occurred with your system is not listed in the table above or cannot be solved as described contact our customer service department p 37 36 Version 1 0 0 MP136E U 651 Rotation Stage PIEZO NANO POSITIONING WWW PI WS 9 Customer Service 9 Customer Service For inquiries and orders contact your PI sales engineer or send us an e mail
25. e read and understood this user manual Personnel qualification The U 651 may only be installed started up operated maintained and cleaned by authorized and appropriately qualified personnel U 651 Rotation Stage MP136E Version 1 0 0 7 3 Product Description PIEZO NANO POSITIONING WWW PI WS 3 Product Description In this Chapter Model Overview ssssssesseseem emere nemen nenne nennen petierit terere tri rere rerit re re rri re nn 9 PIOQUEL VIEW NTTERRRRNTRENREKTK 10 Prode Nie ge NR RETE 11 SCORE OF DCU nn 12 Suitable Controllers esses mm mme mem nennen met rete trt ret re rre rrt rer rni 12 ACTESSOMOS ee ee 13 Technical Features atan nee einen een 13 3 1 Model Overview The U 651 is available in the following versions LN AENNNEEENEEEENMNNMNMNMMNMN Rotation stage with low profile and PlLine ultrasonic motors gt 360 rotation range 0 3 Nm torque Direct position measurement with incremental encoder 9 urad resolution Sub D connector s U 651 03V Rotation stage with low profile and PlLine ultrasonic motors gt 360 rotation range 0 3 Nm torque Direct position measurement with incremental encoder 9 urad resolution Sub D connector s vacuum compatible to 10 hPa U 651 04 Rotation stage with low profile and PlLine ultrasonic motors gt 360 rotation range 0 3 Nm torque Direct position measurement with incremental encoder 4 urad resolution
26. e when the rotation stage is mounted vertically unintentional changes in the position of the moving platform occur Unintentional changes in position of the moving platform can damage the drive the load or the environment When arotation stage is mounted vertically make sure that the installed load is lower than the maximum torque of the drive p 39 INFORMATION For optimum repeatability all components must be firmly affixed to each other INFORMATION When manually displacing the moving platform in a de energized state differences in the holding force may be noticeable across the travel range There are mechanical reasons for fluctuations in the holding force and they have no influence on the function of the stage gt If possible simulate the rotation stage motions with a mounted load or make Suitable calculations in order to identify collisions or unfavorable center of gravity constellations gt f necessary take suitable constructive measures to avoid collisions and instabilities in the overall system 18 Version 1 0 0 MP136E U 651 Rotation Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation Avoid or mark danger zones that result from the installation of the rotation stage and the application in accordance with the legal regulations For more information on operating conditions refer to the Motor Power section p 43 5 2 Connecting the U 651 to the Protective Earth Conductor INFORM
27. ia convection gt Operate the vacuum version of the U 651 with 20 lower motor power than specified in Motor power and lifetime p 45 or reduce the duty cycle For more information on operating conditions refer to the Motor Power section p 43 30 Version 1 0 0 MP136E U 651 Rotation Stage PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation 6 2 Starting up the U 651 NOTICE Incorrect parameter settings If you use the software which is included in the scope of delivery of the controller p 12 the operating parameters of the U 651 can be loaded from a stage database The PlStages2 dat stage database contains the default parameter values of your rotation stage for performing initial test motions during start up Depending on the application using the default parameter values e g for P term term D term acceleration and velocity can cause damage to the rotation stage especially when operated with heavy loads gt If possible Perform the first start up without a load gt Always install the latest version of the P Stages2 dat stage database onto your PC For start up with a load Before start up make sure that the U 651 has been properly installed p 17 gt For optimum performance of the moving axis adjust the operating parameters of the controller e g P term term D term acceleration velocity see controller manual gt Save the new parameter values to a stage databa
28. ive mounting holes Figure 7 U 651 M3 holes for affixing the load U 651 Rotation Stage MP136E Version 1 0 0 23 5 Installation gt I Prerequisites v You have read and understood the general notes on installation p 17 v You have properly attached the U 651 to a surface p 21 v The U 651 is not connected to the controller Y You have prepared the load so that it can be affixed to the mounting holes on the moving platform The distance between the center of gravity of the load and the center of the moving platform is as small as possible in all directions Atleast three points are provided for affixing the load on the moving platform Tools and accessories Atleast three M3 screws of suitable length p 47 Suitable tools for tightening the screws Affixing the Load 1 Align the load on the U 651 so that the mounting holes in the load and the holes in the moving platform overlap 2 Affix the load with at least three screws 3 Check that the load is affixed firmly to the moving platform of the U 651 5 5 Connecting the Vacuum Version to the Controller For the vacuum version of the U 651 it is necessary to install a vacuum feedthrough p 13 Prerequisites v You have read and understood the general notes on installation p 17 v The controller is switched off v You have connected the U 651 to the protective earth conductor p 19 v You have read and understood the C815T0003 Technical
29. l otart up involves the following steps Selecting the stage type Defining the reference point of the axis Commanding initial motions in closed loop operation for testing and for run in of the mechanical system The controller manual describes start up using the PIMikroMove program 32 Version 1 0 0 MP136E U 651 Rotation Stage 7 Maintenance PIEZO NANO POSITIONING WWW PI WS 7 Maintenance In this Chapter General Notes on Maintenance eessesseen meme nnne nenn nenn rne rne 33 Performing a Maintenance Run cccccssccccsssececceeseecceeseeccseeeecsauecesseseeessaseesssaeees 33 deanna A o qn A 34 7 1 General Notes on Maintenance NOTICE Damage due to improper maintenance Improper maintenance can result in the failure of the U 651 gt Only loosen screws according to the instructions in this manual Ensure that the piezomotors of the U 651 do not come into contact with lubricants 7 2 Performing a Maintenance Run Depending on the operating conditions and the period of use of the U 651 a maintenance run may be required The maintenance run is performed to redistribute the existing lubricant in the bearing of the U 651 The stage must rotate by at least one full revolution during the maintenance run gt To evenly distribute the existing lubricant in the stage bearing perform a maintenance run after 500 hours of operation or after 1 year at the latest gt If you mo
30. loading Manuals 1 2 ne XT ae Open the website http www pi ws Click Info If you have a user name and password a Click Login b Login with the user name and password Click Product Downloads In the Product Files area click the corresponding product category On the right hand side of the page select the corresponding sub category Navigate to the product code on the page The following manuals are displayed Freely accessible manuals Manuals that are protected by a password Click the desired manual and save it to the hard disk of your PC or to a data storage medium 4 Version 1 0 0 MP136E U 651 Rotation Stage 2 Safety PIEZO NANO POSITIONING WWW PI WS 2 Safety In this Chapter Mendod USG nee 5 General Safety Instructions ccccccccccoconnnccnnnncnonnnonnncnnnononononannnnnnnnnononannnennnnnononnnannennns 5 Organizational MeasuresS oooccccnnccccccononccnnonononononnnnnnnnnonononanennnnnonnnnnnnnnnnnnnnnnnnnnnnnnnnnnnns 7 2 1 Intended Use The U 651 is a laboratory device as defined by DIN EN 61010 1 It is intended for indoor use and use in an environment that is free of dirt oil and lubricants In accordance with its design and realization the U 651 is intended for single axis positioning adjusting and rotation of loads in at different velocities in interval operation The U 651 is not intended for applicati
31. minum blank aluminum anodized black matt steel ceramic PIC181 Al203 PEEK PTFE FEP ribbon cable FFC from Axon Kabel GmbH Shrink tubing PVDF Kynar Comes Sub D 15m Insulation KU THE 150 Lubricant Molykote HP 300 Sealant Scotch Weld Adhesives Epoxy resin based adhesive Bakeout temperature 80 C 176 F Bakeout time 3 hours U 651 Rotation Stage MP136E Version 1 0 0 41 10 Technical Data p I 10 2 Ambient Conditions and Classifications The following ambient conditions and classifications must be observed for the U 651 Area of application For indoor use only Maximum altitude 2000 m Air pressure 1100 hPa to 0 1 hPa corresponds to roughly 825 torr to 0 075 torr Relative humidity Highest relative humidity 80 96 for temperatures up to 31 C Decreasing linearly to 50 96 relative humidity at 40 C Operating temperature 0 C to 40 C Storage temperature 20 C to 75 C Transport temperature 20 C to 75 C Overvoltage category Protection class Degree of pollution Degree of protection according to IEC 60529 42 Version 1 0 0 MP136E U 651 Rotation Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 3 Motor Power 10 3 1 Motor Power and Operating Voltage INFORMATION The operating voltage is limited by the controller using the Maximum Motor Output V ID Ox7c parameter If you load the operating parameters of the U 651 from the PlStages2 dat stage database
32. n minor injury Actions to take to avoid the situation NOTICE Dangerous situation If not avoided the dangerous situation will result in damage to the equipment Actions to take to avoid the situation U 651 Rotation Stage MP136E Version 1 0 0 1 1 About this Document INFORMATION PI Information for easier handling tricks tips etc Symbol Label 1 2 gt p 5 RS 232 AA 1 3 Definition Load capacity Rotary encoder 2 Version 1 0 0 Meaning Action consisting of several steps whose sequential order must be observed Action consisting of one or several steps whose sequential order is irrelevant List item Cross reference to page 5 Labeling of an operating element on the product example socket of the RS 232 interface Warning signs affixed to the product that refer to detailed information in this manual Maximum load capacity in the vertical direction when the rotation stage is mounted horizontally The contact point of the load is in the center of the platform The rotary encoder is an incremental sensor for capturing changes in position Signals from the sensor are used for axis position feedback After switching on the controller a reference point definition must be performed before absolute target positions can be commanded and reached MP136E U 651 Rotation Stage 1 About this Document PIEZO NANO POSITIONING WWW PI WS 1 4 Figures For better un
33. onnected If a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the U 651 in the case of malfunction or failure of the system If touch voltages exist touching the U 651 can result in minor injuries from electric shock Connect the U 651 to a protective earth conductor p 19 before start up gt Do not remove the protective earth conductor during operation gt Ifthe protective earth conductor has to be removed temporarily e g in the case of modifications reconnect the U 651 to the protective earth conductor before starting it up again NOTICE Damage if an incorrect controller is connected Connecting a rotation stage to an unsuitable controller can cause damage to the rotation stage or controller gt Only connect the rotation stage with PlLine amp ultrasonic piezomotors to PlLine amp controllers p 12 U 651 Rotation Stage MP136E Version 1 0 0 27 6 Start Up and Operation E I NOTICE Operating voltage too high or incorrectly connected Operating voltages that are too high or incorrectly connected can cause damage to the U 651 gt Only operate the U 651 with controllers drivers and original accessories from PI gt Do not exceed the operating voltage range p 41 for which the U 651 is specified gt Only operate the U 651 when the operating voltage is properly connected see Pin Assignment p 48 NOTICE Unintentional motions
34. ons in areas in which a failure would present severe risks to human beings or the environment The intended use of the U 651 is only possible when completely mounted and connected The U 651 uses PILine ultrasonic piezomotors as a drive and must be operated with a suitable controller p 12 The controller is not included in the scope of delivery of the U 651 2 2 General Safety Instructions The U 651 is built according to state of the art technology and recognized safety standards Improper use can result in personal injury and or damage to the U 651 gt Only use the U 651 for its intended purpose and only use it if it is in a good working order Head the user manual Immediately eliminate any faults and malfunctions that are likely to affect safety The operator is responsible for the correct installation and operation of the U 651 U 651 Rotation Stage MP136E Version 1 0 0 5 2 Safety PI Piezomotors are driven by piezo actuators After disconnection from the electronics piezo actuators can remain electrically charged for several hours Temperature changes can also induce charges in piezo actuators Touching charged parts of the U 651 can cause slight injuries from electric shock gt gt Do not open the U 651 Do not touch the contacts in the connector of the U 651 If a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the U 651 in the case of malfunction or
35. operation The highest torque or holding force is reached at maximum motor power however the U 651 may overheat during continuous operation Observe the recommended motor power depending on the duty cycle and the ambient temperature p 45 NOTICE an Damage or considerable wear from high accelerations High accelerations can cause damage to or considerable wear on the mechanical system gt Stop the motion immediately if a controller malfunction occurs gt Determine the maximum velocity for your application gt Observe the information in the Motor Power section p 48 INFORMATION Although in theory the U 651 operates quietly noise levels of up to 50 dB A are possible during operation The ultrasonic drive of the U 651 can also generate higher noise levels at frequencies between 100 and 500 kHz INFORMATION The positive direction of motion of the U 651 is shown in the product view p 10 U 651 Rotation Stage MP136E Version 1 0 0 29 6 Start Up and Operation i I INFORMATION For maximum force generation a run in procedure is necessary during the start up of the U 651 and after longer downtimes see also Influence of Downtimes on the Torque p 46 The U 651 reaches its maximum torque after the run in procedure gt For run in command a few motion cycles at low velocity The motion cycles should comprise full revolutions if possible INFORMATION In a vacuum there is no heat dissipation v
36. se on the PC or to the nonvolatile memory of the controller for future use see controller manual and PIMikroMove manual U 651 Rotation Stage MP136E Version 1 0 0 31 6 Start Up and Operation i I INFORMATION If the total cable length between the stage and the controller is more than 3 m it is necessary to adjust the parameter values in the controller for optimum motor power The default parameter values in the P Stages2 dat stage database are suitable for a total cable length of 3 m Total cable length of 3 m to 6 5 m 1 Adjust the value of the Frequency Shift parameter ID 0x64 in the controller Possible values 20 15 10 5 0 5 10 15 20 2 Repeat step 1 until the U 651 has reached optimum motor power 3 Save the new parameter values to a stage database on the PC or the nonvolatile memory of the controller for future use see controller manual and PIMikroMove manual Total cable length 26 5 m Contact our customer service department p 37 Prerequisites v You have read and understood the general notes on start up and operation p 27 You have read and understood the user manual of the controller p 3 In the case of start up with a load The U 651 has been properly installed p 17 v The controller p 12 and the required software have been installed All connections on the controller have been set up see controller manual Starting up the U 651 Start up the axis see controller manua
37. ve your U 651 over a small working range lt 20 in continuous industrial operation perform a maintenance run after every 5000 motion cycles U 651 Rotation Stage MP136E Version 1 0 0 33 7 Maintenance r I 7 3 Cleaning the U 651 Prerequisites v You have disconnected the rotation stage from the controller Cleaning the rotation stage Only when the rotation stage is not used in vacuum gt f necessary clean the surfaces of the rotation stage with a cloth that is lightly dampened with a mild cleanser or disinfectant Only when the rotation stage is used in vacuum gt Only touch the rotation stage with powder free gloves gt f necessary wipe the rotation stage clean 34 Version 1 0 0 MP136E U 651 Rotation Stage PIEZO NANO POSITIONING WWW PI WS 8 Troubleshooting 8 Troubleshooting Noise during Uncontrolled operation oscillation of the U 651 Rotation stage Settling window positions around the target inaccurately position is too large Reaching the target Settling window position takes too around the target long position is too small Increased wear Warped base body Reduced accuracy U 651 Rotation Stage MP136E Immediately switch off the servo control system of the affected axes Check the settings of the servo control parameters Reduce the settling window by changing the parameter values for the settling window limits on the controller See the controller user manual p 3 for
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