FSM-300 or FSM-320 Fast Steering Mirror & FSM
Contents
1. Command _ J2 o NM mec E E L SODE X axis OL Command L DRIVER Pd X axis S p Command ecu p a 3 o A axis gt Y axis OL Command A gt Command SY wo axis x mi o actuator drive A VO a Sis Command gt gt gt gt om Naw Ud M IA Control me E ji 1 2 REDE CI LCS i A axis X axis EN i H 1 Position Ext Optical ZS eal X axis axis position eedbac i gt m th Ww D Position Position i B axis Position e Internal External INTEXT s Feedback A axis Position pe Se ee ee ee ee x DRIVER B 222 Y axis 7 Command UH A joe 0 Sk Corn gt gt gt o A B axis w actuator drive Y axis ra Y axis p EL Control Tm i o t lt Position RS d 1 Ec Wt X axis Y axis B axis Ext Optical 7 Position Position B axis position Ii lt Feedback A 15VDC RED 5 4 c OVERTEMPERATURE2. Figure 8 X and Y axes corresponding to FSM input commands and position outputs 24 System Components E 962 1038 379 0098 1 5X 09 32 74mm 641 HOLES FOR 1 4 M6 MOUNTING SCREWS 6 39 10mm X 08 2mm 573 MIRROR gt 15 PIN CONNECTOR 4X 4 40 SCREWS ATTACHED BASE TO FSM Figure 9 Detailed Drawing of FSM 300 Mirror Head Housing System Components 25 FSM 320 Series 573 15 PIN CONNECTOR 2 26 CLEAR APERTURE el 4 244 7 4 40 SCREWS ATTACHE BASE TO FSM Figure 10 Detailed Drawing of FSM 320 Mirror Head Housing 26 System Components 5 2 FSM CD300B Controller Driver The FSM CD300B controller driver establishes the feedback interface between the angle position sensors and the drivers providing current to the voice coils that tip and tilt the mirror assembly It also provides an interface between the user and mirror allowing control voltages to be applied and mirror positions to be ascertained The FSM CD300B is equipped with a universal power supply that handles 100 240 V 50 60 Hz A standard power cord interface IEC 950 facilitates power plugs that are suitable for most European North American and Pacific Rim Countries a 0 5 xe 1 dude Figure 11 Removal of Fuse Block A fuse block is located above the power connector and utilizes two 5 x 20 mm slow blow glass fuses rate
3. Figure 16 15 pin interface cable from controller to mirror head 6 3 Command Inputs ffi COMMAND M io 3 X fmm INTERFACE VO MINER FSM S lt _ lt _ ecc Figure 17 Front panel I O connections Control voltages called Command Inputs are used to direct the mirror to specified angular positions around two orthogonal axes These voltages are normally applied to the two BNC connectors labeled COMMAND INPUTS X and Y on the front panel but can also be applied to the 25 pin INTER FACE I O connector on the front panel Please see Figure 17 Scaling is set so that 10V DC offsets correspond to the full scale motion of 1 5 26 mrad mechanical angular range on each axis A command voltage of zero will bring the mirror to the powered on null position for that axis The X and Y inputs are differential Neither lead of the BNC connector is grounded Certain FSM system output results overshoot settling time and point to point travel path are dependant upon the input waveform amplitude and frequency of the signal Due to the many possibilities customers are encouraged to experiment with their particular drive signal parameters when System Components 33 optimizing their application As a practical guide a well defined smooth sinewave input will generate the best output results Self heating of the mirror drive coils is proportional to command signal ampl
4. Analog ground B axis temperature sensor return Analog Ground 12 _ Analog input B axis temperature sensor signal 13 Analog input A axis position sensor positive 10V 14 14 _ _ Analog ground A axis temperature sensor return Analog Ground 15 5 A TEMP Analog input A axis temperature sensor signal Table 1 FSM pinout descriptions of 15 pin interface cable 15 PIN 15 FEMALE MALE 15V 1 15V GND 1 9 GND 15V 1 0 2 15 B 7 PR B KO 24 AWG KO B 2 ial 3 B B TEMP KTN 2 ES 1 B TEMP RTN B RIN a Ne 4 B_RTN B_TEMP 3 2 B TEMP B OUT 3 5 B OUT At 9 24 AWE 2 KO 24 AWG KO E u A pies 24 AWG A TEMP 4 4 A_TEMP_RTN A_RTN 0 A RIN _ 9 5 TEMP A OUT 5 BORNE B A OUT Ref Figure 14 FSM pinout diagram of 15 pin interface cable 30 System Components 5 5 Interface I O Pin Connections A 25 pin D connector on the front of the FSM CD300B controller driver provides access to key diagnostic and control parameters from the control board Pin Name Type Description 1 Y CMD Analog Input Y Axis Command Signal 10V differential 2 Y CMD Analog Input Y Axis Command Signal 10V differential 3 X CMD Analog Input X Axis Command Signal 10V differential 4 X CMD Analog Input X A
5. FSM 300 or FSM 320 Fast Steering Minor amp FSM CD300B C ontoller Driver User s Manual GO Newport EU Declaration of Conformity EU Declaration of Conformity We declare that the accompanying product identified with the mark complies with requirements of the Electromagnetic Compatibility Directive 89 336 EEC and the Low Voltage Directive 73 23 EEC Model Number FSM 300 or FSM 320 amp FSM CD300B Year C mark affixed 2003 Type of Equipment Electrical equipment for measurement control and laboratory use Standards Applied Compliance was demonstrated to the following standards to the extent applicable BS EN61326 1 1997 A1 A2 Electrical equipment for measurement control and laboratory use EMC requirements This equipment meets the CISPR 11 Class A Group 1 radiated and conducted emission limits This equipment passed performance criteria B for RF immunity tests per BS EN 61000 4 3 BS EN 61000 3 2 2001 Harmonic current emissions Class A BS EN 61000 3 3 2002 Voltage fluctuations and flicker BS EN 61010 1 1993 1 2 Safety requirements for electrical equipment for measurement control and laboratory use Alain Danielo Dan Dunahay VP European Operations Director of Quality Systems Zone Industrielle 1791 Deere Avenue 45340 Beaune la Rolande France Irvine CA USA Warranty 4 Warranty Newport Corporation warrants that this product will be free from defects in m
6. 95 non condensing Operating altitude lt 3 000 m 10 000 ft Power 100 240 Vac 10 47 63 Hz Current consumption typical 0 40 A 100 Vac 0 25 A 240 Vac Fuses 2 ea slo blo T 5 x 20 mm rated 2 5 A 250 Vac Weight 5 5 Ibs 2 5 kg Case Dimensions excluding connectors 3 9 x 9 0 x 10 0 h x w x d 100 x 229 x 254 mm 18 Unpacking the FSM 3 4 Bode Plots Figure 3 Typical gain response Bode plot for small angle excitation Amplitude 0 262 mrad Unpacking the FSM 19 Phase Lag degrees Command Amplitude mrad 100 in HLL WNL pen ERR E RR 140 HU 150 160 170 180 Shai Pel 1 10 100 1000 10000 Frequency Hz Figure 4 Typical phase angle Bode plot for small angle angle excitation Amplitude 0 262 mrad 3 5 Safe Operating Area 100 200 300 400 500 600 700 800 900 1000 Frequency Hz Figure 5 Typical shut down curve as a function of amplitude and frequency at 20 Continuous operation is safe below the line Derate for higher ambient temperatures 20 Unpacking the FSM FSM operation is limited to an envelope of mirror deflection amplitude versus frequency For the FSM 300 amplitude is mechanically limited to 26 mrad up to 40 Hz Above 40 Hz long term continuous operation i
7. Controller Driver eene 17 34 Bode Plots ecd eunt 18 3 5 Safe Operating oe e da ox deese ue 19 4 Unpacking the FSM cecinere nan ananas 21 Ad Packing 21 4 2 Freeing the Mirror itn 21 4 3 Storing and Shipping the Mirror 22 4 4 Replacing the Mirror oid secret i Yea ene btt ene 22 5 System 23 5 1 FSM Mirror Head Assembly essere 23 5 2 FSM CD300B Controller Driver eene 26 2 9 TSNEBIGCUDDIIQS etus eee ome orte hes d ero ob das 27 5 4 FSM CD300B Controller Driver Cable Pin Connections 28 5 5 Interface I O Pin Connections ssseeeeereee 30 6 System OperallOnh erc ences tian toten tcu cuan antiguas ana Cu rn aa au annua 31 6 1 Installation Location amp Ventilation esses 31 6 2 tBleutrical ConneetlOnga dA 31 6 3 Command Inputs ise e uet iet ro tec rete err ice tei dtes 32 GA Position OUI Su uode rn etta e ponent a 33 6 5 Fault Indicatii xoa actenus toes etre Sure a 33 6 6 External Sensor Feedback Control 34 6 7 Open Loop Control Mode eie erento 35 6 8 Maintenance
8. Internal Control In the illustration in Figure 19 a Logic Unit supplied by the user provides the TTL level signal for locking the FSM onto the quad cells The sum of the outputs from the quad cell determines whether sufficient light is on the detector If light is sufficient the Logic Unit switches the FSM s to External Feedback Control and cancels out the tilt errors If light is insufficient the System Components 35 Logic Unit keeps the FSM s on Internal Control and flags an error to the operator The external feedback signals should be scaled so that 10V yields 26 mrad of mechanical rotation Care needs to be taken to align the external sensors so that X and Y rotation axes of the FSM correspond to the correct X and Y outputs of the quad lateral effect cell amplifier Reference position voltages can be applied to the Command Inputs so that if the INT EXT selector switch voltage input returns to Internal Control mode the FSM will move to a defined position Otherwise the mirror will return to the powered on null position Stabilized Output LASER BEAM gt STABILIZATION MODULE FSM Controller Tilt Displacement Error Input UNSTABLE OPTICAL SYSTEM Figure 19 FSM configured with external feedback sensor for laser beam stabilization 6 7 Open Loop Control Mode The Model FSM CD300B controller driver can be used in Open Loop mode which does not make use of External or Internal feedback signals T
9. Mirror does not respond to command inputs Green PWR indicator light is on 5V is applied to the INT EXT selector switch input Pin 17 causing the system to expect External Feedback inputs Pins 11 2 15 16 Or 5V is applied to Open Loop selector switch inputs Pins 9 or 10 causing the system to expect Open Loop inputs Pins 22 24 Remove the 5 source or supply control voltages on the required pins Yellow CURR indicator LED is on The drive signals to the mirror are clipped The attempt is made to apply to much RMS current to the FSM drive coils which would create a potential over temperature condition Decrease amplitude and or frequency of drive signal Red TEMP indicator LED is on Mirror does not respond at all Thermistors have detected an over temperature condition of the drive coils because these are being driven too hard Decrease amplitude and or frequency of drive signal Also check for pos sible inverse polarity of an External feedback signal System will automatically resume normal operation once coils have cooled Mirror moves in opposite direction of intended Polarity is reversed at X and Y Command Inputs or X and Y External Feedback Inputs To remedy reverse your electrical connections since the above four inputs are differential without a fixed ground 38 Appendices 7 2 7 3 Appendix B Abbreviations FSM Fast Steering Mirror D A Digital to Analog IR Inf
10. an oval hinged metal cover as illustrated in Figure 6 To free the mirror loosen the two diagonally opposed retaining screws so that the protective cover can be pivoted for easy removal The appropriate Allen wrench is supplied with the mirror head Once the cover is removed gently pull off the lens tape Store the lens tape inside a clean polyethylene bag for possible later use Unpacking the FSM 4 3 Storing and Shipping the Mirror Head When the mirror head is not in use replace the oval protective cover so that it covers and protects the mirror If you ever have to ship the mirror head also reposition the lens tape 4 4 Replacing the Mirror The FSM 15 designed so that the user can replace the mirror assembly in the event that the original mirror has been damaged or different spectral characteristics are required FSM mirrors bonded to a metal carrier are available from Newport as subassemblies Hex wrenches are required tools for mirror removal and reinstallation The FSM 300 requires 0 050 hex wrenches The FSM 320 requires 1 16 and 5 64 hex wrenches Use of Loctite 222 thread locker on mounting screws is recommended lt Figure 7 Replacement of FSM 300 mirror carrier To remove the mirror carrier first remove the front protective cover plate To do so remove the four retaining socket head cap screws using the appropriate hex wrench Then remove the mirror carrier To do so remove the four retaining s
11. use only the specified fuse s with the correct type number voltage and current ratings Only qualified personnel should replace fuses Qualified service personnel should perform a safety check after any service To prevent damage to the equipment read the instructions in this manual for selection of the proper input voltage If the Fast Steering Mirror is used with lasers avoid looking into the laser beam and take precaution not to aim the laser beam at the eyes of others 1 2 General Cautions Observe these cautions when operating or servicing this equipment Handle equipment with care like other delicate electronic equipment To prevent damage to equipment when replacing fuses locate and correct the problem that caused the fuse to blow before re applying power 10 Safety Precautions Use only specified replacement parts e Follow precautions for static sensitive devices when handling electronic circuits e This product should only be powered as described in this manual e If this equipment is used in a manner not specified within this manual the protection provided by the equipment may be impaired e Do not position this equipment in a location that would make it difficult to turn off power to the equipment or disconnect the AC power cord WARNING AC power line voltages are present inside the controller driver unit To avoid possibility of electrical shock refer all service to qualified personnel WARN
12. ING If the Fast Steering Mirror is used with lasers avoid looking into the laser beam and take precaution not to aim the laser at the eyes of others CAUTION Static sensitive electronic equipment Wear grounding strap when handling electronic circuit boards and components found inside the controller driver unit FRAME amp CHASSIS TERMINAL This symbol identifies the terminal used for connecting a ground to the chassis The power cord properly grounded will normally ground the chassis Fast Steering Mirror Technology 11 Fast Steering Mirror Technology Originally conceived for military aerospace applications such as high speed target tracking and secure satellite to satellite communication fast steering mirror technology has been developed to the point where it is economically viable for widespread commercial use in dynamic mirror alignment applica tions This technology can be used to stabilize laser beams Figure 1 track work pieces for precision laser micro machining scan laser beams for real time confocal microscopy track optical receivers for laser free space com munication and increase sharpness in sophisticated imaging systems Output Beam Is Stable And Aligned To The Optical Axis Defined By Quads A amp B Feedback Circuit Centers on Quad Optical Distributed Vibration Sources Create Input Tilt Errors Output Residual Error Images FSM B On Quad A 4
13. Optical Beam Delivery Input Tilt Error System Frequency PSD Beam Stabilization Module Feedback Circuit Centers on Quad 4 Figure 1 Two fast steering mirrors used to compensate for input tilt errors Frequency A practical fast steering mirror head is shown in Figure 2 There are eight basic head components voice coil actuators mirror mirror carrier flexure suspension frame housing internal position sensors and position sensor electronics These components work with the controller to produce the precision rotation and speed characteristic of these devices 12 Fast Steering Mirror Technology Figure 2 FSM mirror head showing the eight basic components The voice coil actuators provide the torque necessary to tilt the mirror sub strate Four actuators are mounted behind the mirror one in each quadrant Voice coils are connected in pairs along the diameter of the mirror and operate in a push pull manner rotating the mirror about the axis that bisects them Two actuator pairs four coils plus a coordinate transformation are used to produce two orthogonal rotations and about the X and Y axes The high force generated by four distributed actuators rotates large mirrors more effectively than the one actuator used in galvanometer scanners The distributed force combined with thick optics enables the FSM mirror head to preserve static and dynamic surface flatness excellent positional resolution large angular
14. Pwr Supply FAULT DETECTION 120 220 VAC po glove 60 50 Hz OVERCURRENT Figure 13 Functional Block diagram of FSM CD300B controller driver FSM CD300B Controller Driver Cable Pin Connections The electrical connection between the mirror head and the controller driver is via a 15 pin D connector terminated cable This cable attaches between the connector located on the back of the mirror head and the connector labeled FSM on the front of the FSM CD300B controller driver The position sen sors and voice coils are located on A and B axes at 45 to the X and Y axes A coordinate transform is done in the controller driver to produce X and Y axis rotations System Components 29 Pin Pin Type Inh Controller FSM Head Name Controller Description 1 15VA FSM positive 15V power 2 n 15 FSM negative 15V power 3 2 e Analog input B axis position sensor negative 10V 4 B RTN Analog output B axis actuator drive return 5 B OUT Analog output B axis actuator drive output 6 Analog input A axis position sensor negative 10V 7 0 Analog output A axis actuator drive return 8 15 A_OUT Analog output A axis actuator drive output 9 1 Analog ground FSM ground reference and power return 10 Analog input B axis position sensor positive 10V 11 12 _ _
15. amp Service 36 Table of Contents 7 Ti Appendices enirn iae Ert ck nk ra ro ko rw vicini Rr 37 7 1 Appendix A Troubleshooting the FSM System 37 7 2 Appendix B 38 43 dd 38 TA Serviced REM ueteres tg tete e teint 39 7 5 Appendix C Return Material Authorization Request 40 Safety Precautions 9 1 Safety Precautions 1 1 General Safety Warnings Observe these general warnings when operating or servicing this system Heed all warnings on the unit and in the operating instructions Do not use this equipment in or near liquids Do not operate this equipment in an explosive atmosphere Only plug the controller driver unit into a grounded power outlet Route power cords and cables where they are not likely to be damaged Disconnect power before cleaning the controller driver unit Do not use liquid or aerosol cleaners Only qualified service personnel should open the case of the controller driver There are no user serviceable components inside unit Dangerous voltages associated with the 100 120 V AC power supply are present inside controller driver unit To avoid injury do not touch exposed connections or components while power is on Do not wear rings or wristwatches when troubleshooting electrical circuits To avoid fire hazard
16. aterial and workmanship and will comply with Newport s published speci fications at the time of sale for a period of one year from date of shipment If found to be defective during the warranty period then product will either be repaired or replaced at Newport s option To exercise this warranty write or call your local Newport office or repre sentative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the product freight prepaid to the indicated service facility Repairs will be made and the instrument returned freight prepaid Repaired products are warranted for the remainder of the original warranty period or 90 days whichever first occurs Limitation of Warranty The above warranties do not apply to products which have been repaired or modified without Newport s written approval or products subjected to unusual physical thermal or electrical stress improper installation misuse abuse accident or negligence in use storage transportation or handling This warranty also does not apply to fuses batteries or damage from battery leakage THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES EXPRESSED OR IMPLIED INCLUDING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE NEWPORT CORPORATION SHALL NOT BE LIABLE FOR ANY INDIRECT SPECIAL OR CONSEQUENTIAL DAMAGES RESULTING FROM THE PURCHASE OR USE OF ITS PRODUCTS First printing 2003 Copyri
17. d 2 5 A 250 Vac To remove the fuse block first unplug the power cord compress the two plastic tabs on the right and left sides of the fuse block and pull out the fuse block No tools are needed When reinserting the fuse block make sure that the alignment tab is at the bottom WARNING Dangerous voltages are present inside the FSM CD300B controller driver when connected to AC line power To avoid the possibility of electrical shock always unplug the unit from AC line power when checking or changing fuses System Components 27 3 45 87 631 3 97 100 79 Figure 12 Dimensioned exterior drawings of FSM CD300B controller driver 5 3 FSM Electronics The FSM electronics are housed in two locations 1 The FSM Mirror Head containing the voice coil actuators the angle position sensors and the position sensor electronics 2 The FSM CD300B Controller Driver containing the control circuits PIDs calibration factors current drivers power supply user interface and interlocks The mirror head is connected to the controller driver by a 3 meter long 15 pin cable The controller has a universal power supply that can be plugged 28 System Components directly into most wall outlets The appropriate power cord for the destination country should be included with your controller If the correct cord is not present please contact your local Newport representative for assistance
18. e at 45 angle of gt 14 4 gt 28 8 mm incidence Surface Flatness after coating lt A 10 at 632 8 nm over clear x A 2 at 632 8 nm over clear and bonding aperture aperture Surface Quality 15 5 scratch dig 40 20 scratch dig Reflectivity Standard Coatings ER 1 Coating Enhanced gt 93 450 700 nm gt 93 450 700 nm Aluminum ER 4 Coating Protected Gold gt 96 650 1700 nm gt 98 Please contact Newport from 1 7 2 0 um Additional coating options Please contact Newport Please contact Newport FOOTNOTES 1 Optical angular range is equal to twice the mechanical angular range 2 Measured under position output control Optical closed loop performance is also determined by external feedback electronics 3 Optical parameters apply to central 80 of mirror aperture NOTES 4 Performance data is based upon well defined smooth D A sine wave inputs Alternate inputs square waves triangle waves low resolution D A sine waves are addressed in section 6 3 Unpacking the FSM 3 3 FSM CD300B Controller Driver Command Input and Position Output Analog 10 V 26 2 mrad Peak Operating Power to Mirror 30 W Continuous Max Operating Power to Mirror 15 W Thermal Protection 60 C at mirror coil Operating Temperature 0 to 35 C 32 to 95 F Storage Temperature 20 to 55 C 4 to 131 F Use Location Indoor use only Relative humidity lt
19. er off susceptibility must be taken into consideration when designing the mirror into an integrated system Proper turn on and turn off procedures should be followed to ensure that light is only applied to the mirror when it is powered and under the control of either internal or external position feedback A position transducer is included in the FSM mirror head to provide position feedback with reference to the support frame This transducer senses the angle of the mirror carrier and transfers this information to the position sensor electronics board located within the mirror head This board processes the position information and outputs a differential voltage A B This signal is sent to the FSM CD300B controller driver to provide the appropriate feedback current to the voice coils Fast Steering Mirror Technology Two significant advantages of FSM technology are derived from the flexure suspension 1 FSM flexure suspension eliminates bearing surfaces often used with galvanometer scanners and eliminates their associated stiction and wear With bearing surfaces stiction interrupts the smooth motion of the actuator and limits its accuracy smallest incremental motion Wear sets a device lifetime based on the number of commanded cycles On the other hand properly designed flexure suspensions have infinite cycle lifetimes 2 FSM flexure suspension delivers motion about two axes intersecting at a common pivot point When the pivot point i
20. f Warranty Repair or Replace complete this section Date of your original purchase C Original Newport sales Order number begins with C Your Original Purchase Order number VES NO Has this product been used YES JNO Would you like a refurbished replacement if available YES NO Is this product being returned for Credit only Credit only is not an option for Newport Warehousing Divisions JYES 0 If Non Warranty Repair or Replace complete this section Purchase Order number approval required before invoicing YES NO Detector Calibration will include functional check of power meter YES Power Meter Calibration What Company name should be on the Calibration Certification YES NO Would you like to be quoted a refurbished replacement if available PRODUCTS BEING RETURNED LIST VALID NEWPORT PART NUMBERS Part Number Description S N Qty Declared value BA gc Totals Reason for Return and detailed explanation of problem
21. flectivity from the near IR to the far IR Average reflectivity is gt 96 from 650 1700 nm and gt 98 from 1 7 2 0 um The FSM 320 System comes with a 2 50 8 mm diameter 1 2 Fused Silica mirror which is available with a choice of reflective coatings for different wavelengths The mirror is bonded to a stainless steel carrier which is replaceable in the event that wavelength requirements are changed or the mirror surface has been damaged The enhanced aluminum coating described above comes standard with the FSM 320 system Typical Specifications 3 3 1 FSM System Typical Specifications FSM 300 FSM 320 Number of Axes 2 tip tilt 2 tip tilt Angular Range from x10 V 26 2 mrad 1 5 mechanical 26 2 mrad 1 5 mechanical Resolution lt 1 urad rms mechanical lt 1 urad rms mechanical Repeatability lt 3 urad rms mechanical lt 3 urad rms mechanical Accuracy From 26 2 mrad 20 lt 0 262 mrad 0 015 mechanical lt 0 262 mrad 0 015 mechanical Linearity From 26 2 mrad 20 lt 1 0 lt 1 0 Closed Loop Amplitude Bandwidth 3 dB gt 800 Hz at 10 mV gt 350 Hz at 10 mV Closed Loop Phase Bandwidth 60 lag gt 400 Hz gt 325 Hz Response Flatness Peaking lt 3 dB Peaking lt 3 dB Noise Equivalent Angle 1 Hz to 10 kHz lt 3 urad rms lt 3 urad rm
22. ght 2003 by Newport Corporation Irvine CA rights reserved No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation This manual has been provided for information only and product specifica tions are subject to change without notice Any change will be reflected in future printings 2003 Newport Corporation 1791 Deere Ave Irvine CA 92606 949 863 3144 P N 40342 01 Rev C Confidentiality amp Proprietary Rights Confidentiality amp Proprietary Rights Reservation of Title The Newport Programs and all materials furnished or produced in connection with them Related Materials contain trade secrets of Newport and are for use only in the manner expressly permitted Newport claims and reserves all rights and benefits afforded under law in the Programs provided by Newport Corporation Newport shall retain full ownership of Intellectual Property Rights in and to all development process align or assembly technologies developed and other derivative work that may be developed by Newport Customer shall not challenge or cause any third party to challenge the rights of Newport Preservation of Secrecy and Confidentiality and Restrictions to Access Customer shall protect the Newport Programs and Related Materials as trade secrets of Newport and shall devote its best efforts to ensure that all its personnel protect the Newport Programs as trade secrets of Newport C
23. he Open Loop mode is selected by applying a high TTL level signal X OL SW selector switch for X Pin 9 and or Y OL SW selector switch for Y Pin 10 The Open Loop command signals are applied to the X OL CMD input for X Pin 22 and or Y OL CMD input for Y Pin 24 These input are single ended Ground pins are adjacent on Pins 23 and 25 36 System Components The Open Loop mode allow users to develop their own control systems In this mode the FSM CD300B controller driver is only used as an amplifier driver which converts voltage signals to current to drive the coils Maintenance amp Service Clanging sounds from the mirror head are normal when the unit is first turned on when a high step function is applied or when the mirror is unpowered and is shaken by hand Such sounds are normal and occur when the mirror hits its hard stops They are not a sign of malfunction The FSM system does not require periodic maintenance or calibration There is no reason for a user to ever open the FSM CD300B Controller Driver unit Opening the unit would break a label and void the warranty The only reason for a user to open the FSM Mirror Head would be to replace the mirror Any repairs if necessary are to be done by Newport Corporation To clean the FSM CD300B Controller Driver unit first unplug the unit Then wipe the exterior using a damp soft cloth Do not use solvents or detergents The best way to maintain cleanliness of the mirror is
24. he coils the red light will go off and the system will automatically resume normal operation In the event that the red warning light comes on during continuous system operation decrease the amplitude and or frequency of the drive signal Also check for possible inverse polarity of an External Feedback signal 34 System Components 6 6 Fast Seeing viro Controlie Diver Modal FSV CTXNXIB Figure 18 Model FSM CD300B controller driver front and rear panels External Sensor Feedback Control Mode The Model FSM CD300B controller driver can be used in an External Sensor Feedback Control mode with position feedback from an external sensor such as a quad cell or lateral effect cell This allows the FSM to lock a laser beam onto a target such as the center of a quad cell The default alternative is the Internal Control mode which utilizes a quad cell sensor built into the mirror head and feeds the error signal back to the controller driver via the system s 15 pin 3 foot interface cable A beam stabilization system with external position feedback sensing is shown in Figure 19 To switch system operation to External Feedback Control from the Internal Control a high TTL level signal must be applied to the INT EXT selector switch Pin 17 of the 25 pin INTERFACE I O connector External Feedback inputs can then be applied to Pins 11 12 15 and 16 Returning the signal on Pin 17 to a low state will switch the FSM back to
25. ion in an ambient temperature of 0 to 35 C 32 to 95 F Component cooling is provided by a fan which aspirates air through slots in both sides of the unit and ejects air through the back To assure adequate airflow provide a minimum clearance of 25 mm 1 on both sides of the unit and 2 50 mm in back of the unit Also adequate spacing behind the fan provides quieter operation 6 2 Electrical Connections The FSM mirror head is interfaced to the FSM CD300B controller driver by the system s 15 pin connector cable The controller driver is powered from an AC wall outlet It is equipped with a universal power supply that accommodates 100 240 Vac 50 60 Hz No switch or fuse needs to be changed when going from 100 to 120 or 240 Vac power Prior to applying AC power verify that the protective cover and protective packing material have been removed from the FSM mirror head Prior to applying AC power connect the system s15 pin connector cable to the FSM mirror head and FSM CD300B controller driver If you later need to remove the 15 pin connector cable first remove AC power Connecting and disconnecting the 15 pin connector cable in the absence of power will avoid making or breaking powered signal connections 32 System Components Once connected to the mirror head and to the wall outlet the FSM CD300B controller driver may be turned on using the POWER switch located on the left side of the front panel see Figure 17
26. itude and to the square of frequency Consult Figure 5 in the specifica tion section of this manual for the Safe Operating Area before driving your FSM system near its frequency versus amplitude maxima The gain and phase response as a function of frequency for typical FSM systems are shown in Figures 3 amp 4 6 4 Position Outputs If confirmation of mirror position is desired the position angle sensors can be monitored at the Position Output pins pins 18 and 20 of the 25 pin INTERFACE I O connector on the front panel A full scale deflection of 1 5 on either axis corresponds to a 10 V output swing Zero volts output corresponds to a powered on null or 0 6 5 Fault Indication Two LED fault indicator lights on the front panel labeled CURR and TEMP are used to indicate overheating of the drive coils as measured separately by thermistors for the X and Y axes e The yellow CURR warning indicator light comes when the temperature of the drive coils has reached a warning threshold as a result of applying too high an RMS drive current In the event that the yellow light comes on during continuous system operation decrease the amplitude and or frequency of the drive signal e The red TEMP shut off light comes on when thermistors have reached the shut off temperature threshold above which the over temperature condition would damage the coils While the red light is on the mirror will be in the unpowered state Upon cooling of t
27. m beyond the procedures outlined in this manual Any problem that cannot be resolved should be referred to Newport s Service amp Returns Department and any failed product should be returned to that depart ment for service Return Materials Authorization RMA number must be obtained in advance and should be stated on the outside of the shipping box To obtain an RMA number please fill out and fax back the Return Material Authorization Request form included at the end of this manual Packaging for Returns Any FSM Fast Steering Mirror Head or FSM CD300B Controller Driver being returned under an RMA must be securely packaged for shipment The RMA number must be stated on the outside of the shipping box If possible reuse the original factory packaging The mirror must be secured for ship ment Please contact Newport s Service amp Returns Department if you no longer have the original shipping restraints for the mirror 40 Appendices 7 5 Appendix C Return Material Authorization Request Newport Corporation Returns Department 1791 Deere Avenue Irvine CA 92606 Tel 800 222 6440 FAX 949 253 1479 Email rma service 9 newport com Web www newport com Newport RMA ff R assigned by Newport Corporation Name Date Telephone Fax Email Company Name Ship to Address Line 1 Ship to Address Line 2 Ship to City Ship to Country State Zip Code vES I
28. ocket head cap screws using the appropriate hex wrench Reverse the process to install the new mirror carrier Application of Loctite 222 thread locker to each of the mounting screws is recommended CAUTION The mirror surface is extremely delicate Wear latex gloves to minimize the possibility of fingerprints Be extremely careful not to scratch the mirror surface with the wrench or cap screws System Components 23 System Components 5 1 FSM Mirror Head Assembly Envelope and Mounting Interface The FSM head assembly conforms to both 1 inch and 25 mm on center hole patterns and is configured for mounting at 0 and 45 angles on a standard optical table or breadboard The optical axis height is 1 50 when mounted The FSM 300 and FSM 320 head dimensions and mechanical interface are shown in Figure 9 and Figure 10 Rotation Axes The X and Y rotation axes are shown in Figure 8 Note that X rotation is about the X axis The definition of these axes should be considered in the mechanical layout and the coordinate frame definitions in the optical layout The polarity of the mirror rotation complies with the right hand rule 1 positive voltage applied at the command input creates positive clockwise rotation as viewed looking along the axis If an external quad cell or lateral effect detector is used as the angle sensor the sensor axes of the detector must be aligned to the rotation axes of the FSM mirror head
29. orporation Customer shall not at any time disclose Newport s trade secrets to any other person firm organization or employee that does not need consistent with Customer s right of use hereunder to obtain access to the Newport Programs and Related Materials These restrictions shall not apply to information 1 generally known to the public or obtainable from public sources 2 readily apparent from the keyboard operations visual display or output reports of the Programs 3 previously in the possession of Customer or subsequently developed or acquired without reliance on the Newport Programs or 4 approved by Newport for release without restriction Table of Contents 6 Table of Contents EU Declaration of eo RES t truc ee neta 3 bier ns NE PR P TT E E 4 Confidentiality amp Proprietary Rights seen Table of Contents be eder qu a a 6 1 Safety nnmnnn 9 1 1 General Safety Warnings iiie tentari se nere ntn Po eni diea 9 1 2 AP Cautions ese cation i a M kes Saleh beide bise 9 2 Fast Steering Mirror Technology 11 3 Typical 15 UT ESM a eed tet reap i tre quas do dde ante od OS Dese pbi Rudd 15 3 2 Standard Mirror Options sssssssesseeeeeenes 16 3 3 FSM CD300B
30. range and rapid motion The coil portion of the actuators is placed within the support structure and contacted to a heat sink such that heat produced in the actuator is dissipated far from the mirror surface thus minimizing thermal distortions A flexure suspension system is used to support the mirror carrier that holds the mirror This system allows free rotation about orthogonal X and Y axes while constraining side to side motion rotation about the normal Z axis and pogo motion along the Z axis Different types of flexure systems are used for different FSM applications Some flexure systems are stiff large spring constant and offer a relatively stable and repeatable power off mirror 1 Historically voice coils were first used in loudspeakers from which they derive their name A linear voice coil consists of a tubular coil of wire situated within the radially oriented magnetic field of a permanent magnet When current flows through the coil a force is generated that causes axial linear motion This linear motion is then used to move the mirror Fast Steering Mirror Technology 13 position One downside to stiff flexures is the increased current necessary to move the mirror The FSM series of mirror heads is designed around a small spring constant to keep the current and the consequential heating to a minimum expected the FSM in power off status is greatly affected by external effects such as gravity and vibrations This pow
31. rared NIR Near Infrared Technical Support North America amp Asia Newport Technical Support Department 1791 Deere Ave Irvine CA 92606 USA Tel 949 863 3144 800 222 6440 Fax 949 253 1680 Email tech newport com Europe Newport Micro Controle S A 11 rue du Bois Sauvage 91055 Evry Cedex France Tel 01 60 91 68 68 Fax 01 60 91 68 69 Email france newport fr com Technical Support Information When calling Newport Technical Support with a technical issue or problem please be prepared to provide the following information Your contact information System serial number or original order number Description of problem Environment in which the system is used State of the system right before the problem Can you identify anything that may have caused the problem Can the system continue to operate or is it non operational Frequency and repeatability of problem Appendices 39 7 4 Service amp Returns North America amp Asia Newport Service amp Returns Department 1791 Deere Ave Irvine CA 92606 USA Tel 949 253 1694 800 222 6440 ext 31694 Fax 949 253 1479 Email istd service newport com Europe Newport Micro Controle S A 11 rue du Bois Sauvage 91055 Evry Cedex France Tel 01 60 91 68 68 Fax 01 60 91 68 69 Email france newport fr com Service amp RMA Information The user should not attempt any maintenance or service of the FSM Fast Steering Mirror Syste
32. s Resolution of Local Position Sensor lt 0 5 urad lt 0 5 urad Quiescent Power at FSM Assembly lt 5 W at any angle 26 2 mrad lt 5 W at any angle 26 2 mrad Operating Temperature Range 0 to 35 C 32 to 95 F 0 to 35 C 32 to 95 F Storage Temperature Range 20 to 55 C 4 to 131 F 20 to 55 C 4 to 131 F Warm up Time for Mirror Stability at 20 C lt 10 minutes lt 10 minutes Mirror Thermal Drift 2 lt 5 urad C mechanical 1 lt 5 urad C mechanical 1 Optical Axis Location 1 5 in 38 1 mm high centered left to right 1 5 in 38 1 mm high centered left to right Mirror Head Weight with Base 15 3 oz 434 g 15 3 oz 434 g Interconnect Cable Length 9 8 ft 3 m 9 8 ft 3 m 16 Unpacking the FSM 3 2 Standard Mirror Options FSM 300 FSM 320 Mirror Substrate Material Pyrex Fused Silica Mirror Retaining Mechanism Mirror bonded to aluminum Mirror bonded to stainless steel carrier user replaceable carrier replaceable Mirror Pivot Point centered on Gimbaled 12 19 mm behind Gimbaled 9 15 mm behind mirror mirror mirror surface surface Mirror Diameter 25 4 mm 50 8 mm Mirror Thickness 6 0 mm 3 0 mm Mirror Wedge lt 5 arc min 5 arc min Clear Aperture at 0 angle of gt 20 3 gt 40 6 incidence Clear Apertur
33. s limited by the allowed thermal loading of the drive coils The latter is approximately proportional to signal amplitude times frequency squared This means that above 40 Hz the maximum allowed amplitude is inversely proportional to the square of frequency For the FSM 320 amplitude is mechanically limited to 26 mrad up to 30 Hz If the coils reach a temperature warning threshold as measured by thermis tors a yellow warning light labeled CURR comes on however the system continues to operate as before If the coils reach an upper temperature shut off threshold a red warning light labeled TEMP comes on and the mirror reverts to the unpowered state Upon cooling of the coils the red light will go off and the system will automatically resume normal operation If the yellow warning light comes on during normal continuous operation consider decreasing the drive signal frequency and or amplitude to prevent overheating of the drive coils and avoid a possible thermal shutdown Unpacking the FSM 21 4 Unpacking the FSM 4 1 Packing List Included with each FSM System are the following items FSM 300 or FSM 320 Mirror Head FSM CD300B controller driver FSM CD300B controller driver interconnect cable 3 m Allen wrench for protective cover of Mirror Head Instruction manual 4 2 Freeing the Mirror Head Figure 6 Protective lens tape and metal cover for mirror For shipment the FSM mirror is secured by adhesive lens tape plus
34. s placed at the surface of the mirror the design is called gimbaled The advantage is that a mirror centered optical beam does not experience a change in path length with angular rotation The FSM is such a gimbaled design On the other hand the two galvanometers and two mirrors used in dual axis galvano meter based designs make it impossible for the axes to intersect with no common pivot point and no gimbaled motion Relay optics can solve the problem by imaging the first galvo mirror onto the second but at substantially increased complexity and cost The lack of a common pivot point complicates post objective and pre objective scanning applications requiring a compromised optical design to accommodate the separate rotation axes The FSM 300 System comes with a 1 25 4 mm diameter 1 10 Pyrex mirror which is available with a choice of reflective coatings for different wavelengths The mirror is bonded to an aluminum carrier which is user replaceable in the event that wavelength requirements are changed or the mirror surface has been damaged Two standard mirrors can be specified at the time of order e 10D20ER 1 Enhanced Aluminum Coating Multi layer dielectric stack deposited over an aluminum film for improved performance in the visible and enhanced durability of the coating Average reflectivity is gt 93 from 450 700 nm e 10D20ER 4 Protected Gold Coating Multi layer dielectric stack deposited over a gold film for excellent re
35. to protect it from dirt in the first place If the Mirror Head Assembly is to be stored always install the protective metal cover as described in the section Unpacking the FSM Also store the Mirror Head Assembly in a hermetically sealed zipped bag The mirror surface is delicate and scratches easily A qualified optics professional should do any mirror cleaning To remove loose dust gently blow across the optical surface using a can of optical grade compressed air You may also gently brush the surface with a clean optical grade dust brush In case of heavy contamination that would interfere with the operation of the FSM system a qualified optics professional may remove the front cover and attempt to use some of the techniques described in the section Care amp Cleaning of Optics in Newport s product catalog the Newport Resource In case of any mechanical contact with the optical surface some scratches are unavoidable Appendices 37 T Appendices 7 1 POWERD i COMMAND INPUTS Y e EEE INTERFACE O EE FSM Simmi Appendix A Troubleshooting the FSM System S ESS p s Problem Possible Cause amp Solution Mirror does not respond to command inputs Green PWR indicator light is off Controller does not receive power Assure that power plug is live that power switch is ON and that fuses located above power connector are good
36. xis Command Signal 10V differential 5 Y ERR Analog Output Y Axis Error Voltage Output 6 GND Ground Ground 7 X ERR Analog Output X Axis Error Voltage Output 8 GND Ground Ground und CD RDUM M w 11 Y Analog Input Y Axis External Feedback Input 10V differential 12 Y EXTFB Analog Input Y Axis External Feedback Input 10V differential 13 NC No Connection No Connection 14 NC No Connection No Connection 15 X EXTFB Analog Input X Axis External Feedback Input 10V differential 16 X EXTFB Analog Input X Axis External Feedback Input 10V differential 17 INT EXT SW Digital Input Input 18 Y_POS_OUT Analog Output Y Axis Position Output 19 GND Ground Ground 20 X_POS_OUT Analog Output X Axis Position Output 21 GND Ground Ground 22 Y_OL_CMD Analog Input Y Axis Open Loop Command Voltage 10V Single Ended 23 GND Ground Ground 24 X_OL_CMD Analog Input X Axis Command Voltage 10V Single Ended 25 GND Ground Ground Table 2 Front Panel Interface I O Connector Pinout System Components 31 System Operation GO Newport Fast Steering Mirror Controller Driver Model FSM CD3008 POWER N 1 OMMAND INPU X Y INTERFACE I FSM mmm umm FF A lt pu L Figure 15 FSM CD300B controller driver 6 1 Installation Location amp Ventilation The FSM CD300B controller driver is designed for indoor operat
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