Oxford Instruments Austin, Inc.
Contents
1. ae 200 me Figure 3 1f Dimensional Drawing of a 6 ISO160 In Situ Cryogenic Water Pump with ISO Inlet Flanges MK 50 Equivalent LiP H Issue 01 2013 Oxford Instruments Austin Inc All rights reserved Cryogenic Water Pump Original Instructions User Manual Issue 01 November 2013 Cryogenic Water Pump Cryogenic Water Pump Figure 3 1g Dimensional Drawing of a 10 In Line Cryogenic Water Pump with ISO Inlet Flanges 3 88 12 38 18 69 1 44 Figure 3 1h Dimensional Drawing of a 10 In Line Cryogenic Water Pump with CF amp ISO Inlet Flange Issue 01 2013 Oxford Instruments Austin Inc All rights reserved Cryogenic Water Pump Original Instructions User Manual Issue 01 November 2013 Cryogenic Water Pump Cryogenic Water Pump 3 3 Ordering Information Call 1 512 441 6893 or 1 800 611 8871 or email to cryo sales oxinst com for ordering of cryogenic water pump and other OI AUSTIN products 3 3 1 Standard Equipment and Accessories Table 3 2 contains the ordering information for the cryogenic water pumps Table 3 2 Cryogenic Water Pump Ordering Information Pump Type2. C y Roughing Pump ne Flange 4 5 Cryogenic Water Pump Operations To start a cryogenic water pump operation 1 For an in line or appendage cryogenic water pump make sure the chamber gate valve is closed 2 Turn on the mechanical roughing pump and rough to 10E 3 torr or better pressure level within the pump vessel 3 For an in situ cryogenic water pump that has its sail located inside the vacuum chamber make sure the chamber pressure reaches 10E 3 torr or better 3 Turn on the compressor that runs the cryogenic water pump and start the cool down process 4 When the pump is operating properly it usually takes about 15 30 minutes to reach between 104K to 108K 5 Make sure the pressure level within the pump vessel reaches at least the crossover of the vacuum chamber before opening the gate valve Issue 01 2013 Oxford Instruments Austin Inc All rights reserved Cryogenic Water Pump Original Instructions User Manual Issue 01 November 2013 Cryogenic Water Pump Cryogenic Water Pump To stop a cryogenic water pump operation 1 For an in line or appendage cryogenic water pump that is separated from the main vacuum chamber through a gate valve close the gate valve 2 Turn off the compressor that runs the cryogenic water pump 3 The pump will then be warmed up to ambient temperature Issue 01 2013 Oxford Instruments Austin Inc All rights reserved Cryogenic Water Pump Original Instructions Us
3. ROTATED IN 90 INCREMENTS ALLOWNG FOR IMPROVED FITMENT MUST BE DONE AT THE FACTORY NOT FIELD ADJUSTABLE Issue 01 2013 Oxford Instruments Austin Inc All rights reserved Cryogenic Water Pump Original Instructions Issue 01 November 2013 Cryogenic Water Pump User Manual Cryogenic Water Pump Figure 3 1b Dimensional Drawing of an 8 In Line Cryogenic Water Pump with Rotatable CF Inlet Flanges both Standard and UHV versions with a Custom RGA Port fs me e 7 41 cci 13 25 Figure 3 1c Dimensional Drawing of a 4 In Line Cryogenic Water Pump with Rotatable CF Inlet Flanges both Standard and UHV versions Issue 01 2013 Oxford Instruments Austin Inc All rights reserved Cryogenic Water Pump Original Instructions User Manual Issue 01 November 2013 Cryogenic Water Pump Cryogenic Water Pump Figure 3 1e Dimensional Drawing of a 16 In Line Cryogenic Water Pump with ISO Inlet Flanges Bay
4. of the chamber for maintenance etc When using this configuration to upgrade a chamber that has installed TMP or DP pumping system it has no impact on the pumping speeds of other process gases if the pump is mounted on its own port 2 In line Configuration When a chamber has no spare port to mount a cryogenic water pump independently the in line configuration can be used to take advantage of the benefit of a cryogenic water pump without significant change to the existing chamber equipment design and setup In this configuration a cryogenic water pump is inserted in between the existing TMP or DP and the mounting port as shown in Fig 2 The cylindrical cryo panel of the pump is situated inside the pump vessel that connects the inlet of the TMP or DP to the vacuum chamber port and does not protrude into the chamber itself The addition of the cryogenic water pump in front of the existing TMP or DP will somewhat impact the pumping speed of the later The change can be described as V Sop 1Siq t1 Cyp With S being the TMP or DP pumping speed of a particular gas at the mounting port without the cryogenic water pump and C being the water pump conductance of the same gas S pis then the effective TMP or DP pumping speed of this particular gas with the in line cryogenic water pump installed Generally this could result in reduction of the TMP or DP pumping speed Issue 01 2013 Oxford Instruments Austin Inc All rights reserved Cr
5. Instruments Austin at 1 512 441 6893 or 1 800 611 8871 Issue 01 2013 Oxford Instruments Austin Inc All rights reserved Cryogenic Water Pump Original Instructions User Manual Issue 01 November 2013 Cryogenic Water Pump Cryogenic Water Pump Installation amp Operation 4 4 1 Safety Warnings Review the safety warnings found in Chapter 2 before starting any installation activities 4 2 Inspect Equipment before Installing Remove the cryopump from the box and inspect for any damage during shipping Notify the shipping company and Oxford Instruments Austin immediately if any damage was found Take photographs of the damages when possible 4 3 Tools Needed for Installation The Installation Kit for is offered as an optional accessory that can be ordered from Oxford Instruments Austin Refer to Chapter 3 Section 3 3 for the part number and ordering information 4 4 Installing the Cryogenic Water Pump Cryopump Follow these steps to install a cryogenic water pump 1 Clean all sealing surfaces install inlet flange gasket s or o ring s Before installing an o ring lightly apply a thin film of vacuum grease to it 2 To mount the cryogenic water pump e For an appendage or in line cryogenic water pump mount and secure the pump to the chamber gate valve e For an in line cryogenic water pump mount the original TMP DP CP to the other flange of the pump e For an in situ cryogenic water pump mount and secure th
6. User Manual Oxford Instruments Austin Inc Cryogenic Water Pump Issue 01 November 2013 Original Instructions OXFORD l www oxford instruments com INSTRUMENTS The Business of Science User Manual Issue 01 November 2013 Cryogenic Water Pump Cryogenic Water Pump Oxford Instruments Austin Inc is a wholly owned subsidiary of Oxford Instruments For information about Oxford Instruments visit the Oxford Instruments Web site at http Awww oxford instruments com How to Contact Oxford Instruments Austin Inc Support support oxinst com For contact information and a complete listing of Direct Sales Distributor and Sales Representative contacts visit the Oxford Instruments Austin Inc Web site at http www oxford instruments com businesses industrial products austin Oxford Instruments Austin Inc has made its best effort to ensure that the information contained in this document is accurate and reliable However the information is subject to change without notice and is provided AS IS without warranty of any kind express or implied Before placing orders customers are advised to obtain the latest version of relevant information to verify that information being relied upon is current and complete All products are sold subject to the terms and conditions of sale supplied at the time of order acknowledgment including those pertaining to warranty patent infringement and limitation of liability N
7. an be found at http www oxford instruments com businesses industrial products austin Oxford Instruments Austin Inc 1340 Airport Commerce Dr Bldg 1 Suite 175 Austin Texas 78741 USA TEL 1 512 441 6893 FAX 1 512 443 6665 Email cryo sales oxinst com Copyright 2014 by Oxford Instruments All rights reserved Issue 01 2013 Oxford Instruments Austin Inc All rights reserved Cryogenic Water Pump Original Instructions User Manual Issue 01 November 2013 Cryogenic Water Pump Cryogenic Water Pump Contents 1 Preface 1 1 About Oxford Instruments Austin 1 2 Other Services from Oxford Instruments Austin Inc 1 3 About this Manual 1 4 Compatibility 2 Safety Warnings 2 1 Safety Warnings 2 1 1 Standards for the Use of Warnings and Cautions 2 1 2 Warnings Applicable to All Aspects of the Operation of Cryogenic Water Pump 2 1 3 Operator Instructions 3 Introduction 3 1 General Information about the Cryogenic Water Pump Cryopump 3 1 1 Cryogenic Water Pump Features 3 2 Specifications 3 3 Ordering Information 3 3 1 Standard Equipment and Accessories 3 3 2 Optional Accessories and Replacement Parts 4 Installation 4 1 Safety Warnings 4 2 Inspect Equipment before Installing 4 3 Tools Needed for Installation 4 4 Installing amp Operating a Cryogenic Water Pump 5 Troubleshooting 5 1 Troubleshooting Figures 3 1a 3 1b 3 1c 4 1 Connection Diagram Tables 3 1 Cryogenic Water Pump Physical Characteris
8. e different ways to maximize their effects Each configuration has its own distinct advantages and in the case of upgrading a vacuum chamber they may be selected based on characteristics of the chamber and its existing TMP DP pumping system designs The followings are brief descriptions of these three configurations 1 In Situ Configuration In this configuration the cryo panel or the so called sail of a cryogenic water pump is located inside the vacuum chamber while the coldhead and its drive motor are mounted on a vacuum chamber port Figs 1a and 1b present two variants of such a configuration The picture on the cover of this manual shows an in situ cryogenic water pump without its sail Issue 01 2013 Oxford Instruments Austin Inc All rights reserved Cryogenic Water Pump Original Instructions User Manual Issue 01 November 2013 Cryogenic Water Pump Cryogenic Water Pump Vacuum Chamber Vacuum Chamber Cryogenic Water Pump Cryogenic Water Pump Figs 1a amp 1b Cryogenic water pump mounted in situ on a vacuum chamber The main advantage of this configuration is that the sail of the pump can be custom designed to fit the geometry inside the chamber with largest achievable cryo pumping surface area hence highest achievable water pumping speed However this configuration does need sufficient clearance within the chamber and access to the inside
9. e pump to a chamber port no gate valve 3 For an in situ cryogenic water pump install the sail to the coldhead from the chamber side 4 Remove dust plugs from any Aeroquip self sealing couplings and inspect gasket seals 5 Connect helium flexible lines in the following order e Use one helium flex line to connect the Return ports on both the cryogenic water pump and the compressor e Use another flex line to connect the Supply ports on both the cryogenic water pump and the compressor 6 Check gas pressure gauge per compressor specifications Charge or discharge compressor if necessary 7 Connect cold head drive cable from compressor to the pump drive unit 8 Connect diode cable s between the pump diode connector s and a temperature monitor controller such as an E1000 controller if applicable 9 Connect main power cable per compressor specifications Issue 01 2013 Oxford Instruments Austin Inc All rights reserved Cryogenic Water Pump Original Instructions User Manual Issue 01 November 2013 Cryogenic Water Pump Cryogenic Water Pump Figure 4 1 shows a typical installation diagram when making connections Figure 4 1 A Typical Cryogenic Water Pump In Line Configuration Connection Diagram Purge Gaz Heater Optiona oe i Purge Gas Wakwe Optional Vacuum Cold Head Drive C able Gauge Cold Head Roughing Wahe Compressor Lo Adsorber E Foreline Trap i E LI Input Fower Cryopump
10. er Manual Cryogenic Water Pump Issue 01 November 2013 Cryogenic Water Pump Troubleshooting 5 5 1 Troubleshooting Table 5 1 describes some problems that users might encounter while operating a cryogenic water pump and provides solutions to those problems Table 5 1 Troubleshooting Procedures Problem Possible Cause Corrective Action Temperature of cryogenic water pump does not reach required operating temperature The sail is loose thereby preventing good thermal contact with its cold station on the cold head Excessive thermal load Decrease in water pump cold head performance Warm the waterpump to ambient temperature and retighten the sail to about 15 to 20 in pounds Reduce the thermal radiation load by 1 shielding the pump or 2 lowering the temperature of the radiating surface If the helium pressure gauge reads well above or below the normal operating pressure release or add helium gas as described in the compressor manual Warm up and then re cool down the water pump If the temperature remains high the problem may be within the cold head Contact Oxford Instruments Austin Pump fails to cool down to the required operating temperature or takes too long to reach temperature Incorrect helium supply pressure Vacuum leak in vacuum system or cryogenic water pump Compressor problem Add or release helium gas as described in the compressor manual a Check vacuum sy
11. ervices e Repair and refurbishment services Whatever brand of cryo components you have we offer fully warranted refurbishment often with off the shelf availability e Exchanges We offer our own quality products as well as most makes of cryopumps and helium compressors which are refurbished and fully warranted e Technical Support Our support engineers will help determine if your cryopump system is operating correctly so that you can get your system back to optimum efficiency as soon as possible To contact Oxford Instruments Austin Inc Technical Support Email support oxinst com e Telephone 1 512 441 6893 or Toll Free 1 800 404 1055 e Installation On site installation services are available to guarantee performance and save you time e Training We offer on site training to help you and your staff to know more about your cryopump and compressor systems Our training will give you confidence and the ability to maintain a highest possible uptime for your system 1 3 About this Manual The purpose of this manual is to provide our customers using the Cryogenic Water Pump with information needed to safely and efficiently operate the cryogenic water pump when operating as part of a cryogenic refrigeration system Such a system is often comprised of the following equipment e Helium compressor unit such as the Model 600 compressor from Oxford Instruments Austin e Coldhead cryopump cryogenic water pump e Connecting helium line
12. es highly customer configurable automatic control of the water pumps For more detailed information of these products please contact Oxford Instruments Austin at 1 512 441 6893 or 1 800 611 8871 Issue 01 2013 Oxford Instruments Austin Inc All rights reserved Cryogenic Water Pump Original Instructions User Manual Issue 01 November 2013 Cryogenic Water Pump Cryogenic Water Pump 3 2 Specifications This section describes the specifications for the Cryogenic Water Pump cryopumps Table 3 1 Pumping Speed of Cryogenic Water Pumps Pump Size 4 6 8 10 16 Water Vapor Pumping Speed 1 100 2 500 4 000 7 000 16 000 liter sec Conductance 450 1 000 1 800 2 800 7 800 No in line configuration For in line configuration only Note Cryogenic water pumps can operate safely in any mounting orientation Figures 3 1a through 3 1f shows main dimensions of several configurations of Oxford Instrument Austin cryogenic water pump Figure 3 1a Dimensional Drawing of a 6 In Line Cryogenic Water Pump with Rotatable CF Inlet Flanges both Standard and UHV versions with a Custom RGA Port MALE 50 AEROQUIP FITINGS 1D 2 75 OD ROTATABLE CONFLAT FLANGE STD 8 OD ROTATABLE CONFLAT FLANGE 11 06 STD DIODE CONNECTOR i MOUNTED ON 1 32 MINI CONFLAT FLANGE DRIVE UNIT ORENTATION CAN BE
13. ipe must be connected to the cryopump relief valve and vented to a safe location Warning Do not install a hot filament vacuum gauge on the cryopump side of the hi vac gate valve as this could be a source of ignition Warning Helium gas can cause rapid asphyxiation and death if released in a confined area Warning Use a pressure reducing regulator when withdrawing helium gas from a high pressure cylinder Warning Detaching the helium flex lines with the compressor load coldhead cryopump etc at low temperature can cause the pressure rise in the system beyond the permissible level therefore creating a safety hazard 2 1 3 Operator Instructions Follow standard Cryogenic Water Pump operating procedures as described in this manual If after reading this manual you still have questions regarding the safe operation of the equipment please contact Oxford Instruments Austin Inc Technical Support using the contact information found in Chapter 1 Section 1 2 Issue 01 2013 Oxford Instruments Austin Inc All rights reserved Cryogenic Water Pump Original Instructions User Manual Issue 01 November 2013 Cryogenic Water Pump Cryogenic Water Pump Introduction 3 3 1 General Information about the Cryogenic Water Pump Oxford Instruments Austin Inc provides both custom and industry standard cryogenic solutions at highly competitive prices Cryogenic vacuum pumps providing clean oil free high vacuum with high pumping speed
14. o responsibility is assumed by Oxford Instruments Austin Inc for the use of this information including use of this information as the basis for manufacture or sale of any items nor for infringements of patents or other rights of third parties This document is the property of Oxford Instruments Austin Inc and by furnishing this information Oxford Instruments Austin Inc grants no license expressed or implied under any patents copyrights trademarks trade secrets or other intellectual property rights of Oxford Instruments Austin Oxford Instruments Austin copyright owner of the information contained herein gives consent for copies to be made of the information only for use within the customer s organization as related to the use of Oxford Instruments Austin Inc products The same consent is given for similar information contained on any Oxford Instruments Austin Inc Web site or disk used to distribute information to a customer Oxford Instruments Austin Inc does give consent to the copying or reproduction by any means of the information contained herein for general distribution advertising or promotional purposes or for creating any work for resale The names of products of Oxford Instruments Austin Inc or other vendors and suppliers appearing in this document may be trademarks or service marks of their respective owners that may be registered in some jurisdictions A list of Oxford Instruments Austin Inc trademarks and service marks c
15. pump oe Inlet Flange Type Part number In Line 4 CF Rotatable x 2 92 00700 000 In Line 6 CF Rotatable x 2 92 00100 000 In Line 6 CF Rotatable x 2 Full UHV 92 00300 000 In Line 8 CF Rotatable x 2 92 00200 000 In Line 8 CF Rotatable x 2 Full UHV 92 00400 000 Appendage 6 IS0160 ISO 92 00008 000 In Line 10 CF Rotatable amp ISO 92 00600 000 In Line 10 ISO LFB x 2 92 00600 001 In Line 10 ISO x 2 92 00600 002 In Line 16 ISO x 2 92 00800 000 CTI MK 50 water pump equivalent 3 3 2 Optional Accessories and Replacement Parts The customer can order the optional accessories and replacement parts listed in Table 3 3 Table 3 3 Optional Accessories and Replacement Parts Accessories Replacement Parts Part Number E1000 Remote Temperature Controller Controller Only 81 00040 000 Kit E1000 Remote Temperature Controller 10ft Compressor Input Cable 99 00079 000 Kit E1000 Remote Temperature Controller 15ft Compressor Input Cable 99 00079 015 Kit E1000 Remote Temperature Controller 20ft Compressor Input Cable 99 00079 020 Cable Diode Dual Pump 10ft 81 00038 010 Cable Diode Dual Pump 20ft 81 00038 020 Cable Diode Dual Pump 25ft 81 00038 025 Coldhead Drive Unit Power Cable 10 ft 10144 10 Helium Line 0 5 ID 10ft 10418 10 Single Pump Installation Kit 10251 Custom length cables helium lines are available please contact Oxford
16. s This manual describes the design operation and maintenance of a cryogenic water pump unit Issue 01 2013 Oxford Instruments Austin Inc All rights reserved Cryogenic Water Pump Original Instructions User Manual Issue 01 November 2013 Cryogenic Water Pump Cryogenic Water Pump 1 4 Compatibility The Cryogenic Water Pumps described in this manual are designed for use with Oxford Instruments Austin Inc helium compressors M125 M400 M600 and M700 etc Issue 01 2013 Oxford Instruments Austin Inc All rights reserved Cryogenic Water Pump Original Instructions User Manual Issue 01 November 2013 Cryogenic Water Pump Cryogenic Water Pump Safety Warnings 2 2 1 Safety Warnings 2 1 1 Standards for the Use of Warnings and Cautions Warnings are noted when there is a possibility of injury or death to persons operating the equipment or performing specific tasks or procedures noted in this manual Cautions are noted when there is a possibility of damage to equipment if the caution is ignored 2 1 2 Warnings Applicable to All Aspects of the Operation of Cryogenic Water Pump Cryopumps Warning If a Cryogenic Water Pump has been used to pump any toxic or dangerous materials such information must be listed on shipping container and associated paperwork before the equipment is returned to Oxford Instruments Austin Inc for service Warning When pumping any toxic corrosive or flammable gases a vent p
17. s are the pump of choice for sputtering electron beam evaporation accelerator beam lines and many aerospace and coating applications Cryogenic Water Pump are available in various standard inlet flange configurations ANSI ISO CF and complete UHV with temperature sensors either in diode or hydrogen vapor bulb HVB configurations 3 1 1 Cryogenic Water Pump Features Cryogenic water pumps as seen in Figure 3 1 are typically used in the following applications e Sputtering tools e lon implanters R amp D bell jar systems e Surface analysis e Accelerators e Beam lines e Any vacuum system or process where water vapor could cause degradation in system vacuum level and or product qualities The pump down time to achieve proper base vacuum level in a vacuum chamber is a critical cost element in a production environment This is especially true for a large vacuum chamber which will require significant amount of pumping time to reach its desired base vacuum before production can begin At 10E 3 torr or better vacuum level about 97 of the residual particles in the chamber are water vapors Using cryogenic water pumps would therefore significantly reduce the overall vacuum pump down time and improve the productivity of the process equipment It is also a cost effective way of upgrading existing vacuum chambers that are equipped with turbo molecular pumps TMPs or diffusion pumps DPs Cryogenic water pumps can generally be configured in thre
18. stem for leaks b Check cryogenic water pump for leaks Contact Oxford Instruments Austin Cryogenic water pump has intermittent noise during operation a ratcheting or thumping sound Helium contamination Contact Oxford Instruments Austin Call 1 512 441 9258 or 1 800 404 1055 or email to support oxinst com for Technical Support of any Oxford Instruments Austin products END OF DOCUMENT Issue 01 2013 Oxford Instruments Austin Inc All rights reserved Cryogenic Water Pump Original Instructions
19. tics 3 2 Cryogenic Water Pump Ordering Information 3 3 Optional Accessories and Replacement Parts 6 1 Troubleshooting Procedures Issue 01 2013 Oxford Instruments Austin Inc All rights reserved Cryogenic Water Pump Original Instructions User Manual Issue 01 November 2013 Cryogenic Water Pump Cryogenic Water Pump Revision History Date Version Reason December 2013 1 0 Initial Release Issue 01 2013 Oxford Instruments Austin Inc All rights reserved Cryogenic Water Pump Original Instructions User Manual Issue 01 November 2013 Cryogenic Water Pump Cryogenic Water Pump Preface 1 1 1 About Oxford Instruments Austin Oxford Instruments Austin Inc a wholly owned subsidiary of Oxford Instruments specializes in the manufacture and repair of cryogenic vacuum pumps cryocoolers refrigerators and helium compressors for semiconductor optical coating linear accelerators medical equipment and R amp D applications You can find just what you need from our range of products and support services e New equipment cryopumps such as the cryogenic water pumps described in this manual compressors cryocoolers and cryopump controllers e Comprehensive range of accessories for the installation of whole systems and a complete range of spare parts to repair cryopumps and compressors 1 2 Other Services from Oxford Instruments Austin Oxford Instruments Austin Inc offers a broad range of additional s
20. yogenic Water Pump Original Instructions User Manual Issue 01 November 2013 Cryogenic Water Pump Cryogenic Water Pump Vacuum Chamber Cryogenic Water Pump Turbo Pump Or Diffusion Pump Fig 2 In line series connection of a cryogenic water pump used in conjunction with a turbo or diffusion pump 3 Appendage Configuration Fig 3 illustrates a so called Appendage configuration of a cryogenic water pump For a vacuum chamber that has extra ports available this configuration will allow adding significant water vapor pumping capability to the chamber without interfering with the existing vacuum equipment setup and performance Vacuum Chamber Cryogenic Water Pump Fig 3 Appendage configuration of a cryogenic water pump on a vacuum chamber This configuration does not affect the pumping speed of the existing TMPs or DPs Oxford Instruments Austin designs and manufactures cryogenic water pumps of all three configurations at sizes of 4 6 8 10 and 16 and with different type of flanges CF ISO ANSI etc Oxford Instruments Austin can also design and manufacture custom configuration of cryogenic water pumps Table 1 lists the water pumping speed and other info of the ASC cryogenic water pump product line In addition Oxford Instruments Austin has an automatic cryogenic water pump controller Model E1000 that provid
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