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1. PHOIBOS 150MCD SN20 02 5 7dia 2 open 5 7dia 2 open 8 7dia 2 open 8 7dia 2 open 8 7dia 2 open 8 7dia 2 open EF 4 0 18 meV FAWHM 0 1203 28 eV T D a Intensity 10 Cps 5 0 05 0 Binding Energy e Figure 7 5 Fermi Edge operation 1 01 0 027972 12 259 1 7275 21 218 8 9596 22 946 1 01 0027972 12147 1 8674 21 218 9 0715 23 086 1 02 00033817 0 21868 0 18036 21 218 21 21 399 1 0 2 0 0033817 0 21832 0 18072 21 218 21 21 399 1 01 010032954 0 21968 0 17907 21 218 20 999 21 397 1 0 2 0 006989 0 22045 017792 21 218 20 998 21 396 Region Edit Name OOOO o o aO SE jov range Femi PHoIBOS HS43500 150 65708703 15 06 00 Method Entrance and Exit Slit Lens Mode Analysis Mode furs E74 Eopen Mediumares z FixednalyzerTranemission Eexc Energy Start Epass I Ubias av 2182 6 218683 E so Ekin Epass Energy Step Energy End Values Scans Dwell Time 6 32478 6 033817 9180357 firs fi 2 Comment Default Values for Bad a Save Previous Next NEW Validate Aoguire Clear The operation is applied to the visible selected regions and within the visible x axis range in the Data window Fermi Edge Settings x Feak Annotation JEF Edge s mev IFW Hk lt F Kon Cancel Figure 7 6 Fermi Edge Settings For the parameter context menu please see page 85 Parameter context menu e g for FW
2. SpecsLab2 113 SpecsSpy 11 1 User Interface The user interface consists of four blocks Each block displays information from one of the SpecsLab2 services The first block is reserved for the ObjectServer the other three blocks can be assigned to any running SpecsLab2 service by the user This is done by two combo boxes at the left side of each block In the first combo box the service you want to connect to e g analyzer detector is chosen in the second one you select one of the existing services if there are more then one e g CCD or PCU300 detector service The right side of the block is a text window displaying the current status and some version and release information of all connected services The first block connects automatically to an existing Object Server on the local machine after the program starts If one needs to connect to an ObjectServer running on another computer in the network one has to enter the object in a special edit file located on the right side above the output field and then press update The communication between SpecsSpy and any services is event driven so to minimize communication overhead The status of the services changes when the matching Update button on the left side is pressed or the UpdateAll button at the top of the dialog To change the debug level of a service you have to connect to the service select the desired debug level in the De
3. Figure 1 11 Connection of EC10 without network stand alone You can use any IP address as long as you are not connected to a network As in case of the standard installation make sure that the LNK LED of the EC10 and of the network card flash when the EC10 is powered on This will indicate that the cabling is correct 1 7 2 2 Configuring the EC10 e Obtain an IP Address for the EC10 from the network administrator If the PC not yet is configured for TCP IP obtain an IP Address for the PC as well e Activate and configure the TCP IP protocol on the PC e Install the Specs software from the SpecsLab CD 12 SpecsLab2 EtherCAN with EC10 e Connect the EC10 to the HUB switch using the twisted pair cable network cable that came with the EC10 Make sure that the PC is connected to the network as well figure 1 10 on page 12 e Connect the CAN Bus devices HSA3500 PCU300 etc to the EC10 using the CAN Bus cables provided by Specs See the PHOIBOS Hemispherical Energy Analyzer User Manual for correct cabling e Run the EC10 configuration tool EC10Config on the PC section 1 7 2 3 on page 13 This tool will configure the EC10 with the IP Address obtained from the network administrator The usage of EC10Config is described below 1 7 2 3 Running Configuration Tool After obtaining an IP Address for the EC10 the EC10 must be configured to use this address for communication This configuration has to be done
4. 112 SpecsLab2 Chapter 1 1 SpecsSpy SpecsSpy is a monitoring tool included in the SpecsLab software package One can connect it to all kind of services from the SpecsLab software and it displays information about the services It can control the service debug level an internal variable and can determine the amount and detail of status and error messages written to the internal Windows system log To see the internal Windows system log you need a Windows system debugging tool We advice the freeware program DbgView available from the URL http www sysinternals com ntw2k freeware debugview shtml Figure 11 1 SpecsSpy user interface Current Server Pile Es DebugLevel C wamm Notice Ink C All ObjectServer IP Address localhost 8472 0bjectServer D Program Files Specs SpecsLab2 bin O bjectS erver exe SpecsLab Version 2 20 T Debug Server Version 2 12 from 2003 12 12 14 52 59 DeviceNetServel DeviceNetServer exe SpecsLab Version 2 20 Debug Server Version 1 20 from 2003 12 17 17 08 13 Source not found I Debug Analyzer Hsa35004nalyzer 2 20 exe SpecsLab Version 2 20 IV Debug Server Version 1 20 from 2004 04 19 15 46 47 Detector CCD Detector exe SpecsLab Version 2 20 M Debug Server Version 0 8 from 2004 04 28 17 16 59 Remote not found Debug Calibration not found T Debug Operations not found I Debug
5. Analyzer Detector Mode standard Dwell Time 0 01 5 T Lock Settings Figure 10 5 HSA3500 Juggler Detector tab 10 Below the detector display window are the controls to modify the display parameters The Mode pull down list offers different display modes The Offset field shifts the channels up or down 200 corresponds to full display height The Scale pull down list defines the sensitivity of the detector channel display 11 To exit the HSA3500 Juggler switch off both the Analyzer and the Detector by clicking in the corresponding Off radio buttons Exit the program by closing the application window 10 2 Program Description 10 2 1 General The HSA3500 Juggler gives full control over the Universal Power Unit HSA3500 as well as detector units connected to the system The HSA3500 Juggler connects to two software modules that control the hardware the analyzer module and the detector module If several HSA3500 power supplies or several detectors are installed in a system the program allows you to choose to which of them it will be connected After the connections are established the HSA3500 Juggler will display a list of all logical voltages that are defined in the configuration file for the HSA3500 that has been chosen Also the HSA3500 Juggler will display a detector data window that is appropriate for the type of detector that is connected to the system Typically this would be a multi channel 104
6. No selection creates a new file and a new group with default parameters The Files and Regions window shows also the actual status of the region e means no data inside e A black arrow shows that the regions are validated e A black solid arrow indicate that the regions are validated and in progress for measurement Within the Acquisition window the currently performed and the waiting regions can be checked and changed e A red solid arrow indicates that the measurement is in progress e No extra sign at the region label indicates a region with data Files ojx 3 Filet Group Ri Region Figure 4 3 File structure with empty region and default names SpecsLab2 39 File and View Menu Region Operations 4 2 3 Open Save Save As Save All Close With these operations files can be loaded saved or closed The i a a gt gt Ld keyboard shortcut or the Toolbar icon for this operation allow quicker access Use the above shown Toolbar icons to Load Save Save All data or simply use the File menu item Open CTRL O to load files Save CTRL S or Save As CTRL A to save the measured data region in a file or Save All CTRL L to save the complete file structure shown in the Files window The Close operation will close the selected file after confirmation for save when data are changed Select the SpecsLab data format for the load and save operation in the standard window file select box
7. Description Input range of WASCO ADC adapter possible values are 10Vunipolar 10Vbipolar 5Vbipolar Key SOFTWARE Specs Sources Monochromator MonochromatorO Serial Entry COM Value 0 Description connected serial port COM1 0 COM2 1 Entry Settings Value baud 9600 parity N data 8 stop 1 to off xon off odsr off octs off dtr off rts off idsr off Description serial port parameter string SpecsLab2 75 Basic Concepts of Operation Figure 6 17 AMC MonochromatorRemote Server Remote Settings x ADC channel 0 active m channel 0 name flens curret channel 0 input scaling ADC channel 1 active a channel I name MD O channel 1 input scaling Po ADC channel 2 active m channel 2 name mirror current channel 2 input scaling M4 ADC channel 3 active E channel 3 name D channel 3 input scaling ADC channel 4 active m channel d name alet channel 4 input scaling ADC channel 5 active 1 channel 5 name Po channel 5 input scaling Po ADC channel 6 active m channel b name ae channel 6 input scaling NF ADC channel active m channel name falueS channel input scaling Logfile Je Temp AMC log Apply Cancel 6 1 3 3 Delay Server The Delay Server is an additional Remote Server which adds the possibility to tag certain measured regions with timestamps To install the Delay Server simply select in the SpecsLab2 Installer under Remote Control After starting SpecsLab2 and connecting th
8. Figure 1 6 Permission for Specs SpecsLab2 IP Protocol Requirements Registry Editor i Registry Edit Tree View Security Options Window Help HE Ghostqum all 21x x You are preventing any inheritable permissions from propagating to this object 7 What do you wantto do To copy previously inherited permissions to this object click Copy To Remove the inherited permissions and keep only the permissions explicitly specified on this object click Remove To abortthis operation click Cancel Remove Cancel Read oO Full Control oO oO Advanced F Allow inheritable permissions from parent to propagate to this object OK Cancel Figure 1 7 Inheritable permission confirm with Copy 1 6 IP Protocol Requirements The EC10 as well as SpecsLab2 requires the TCP IP protocol to be activated on the PC If the PC is already connected to the network this will usually be the case Verify the installation by starting the Network applet in the system s Control Panel under Start Settings Select Protocols and examine the list of installed network protocols If it does not contain TCP IP please add the protocol by clicking on the Add button and selecting it from the network protocol list The figure 1 8 and figure 1 9 shows how to activate and configure TCP IP Select Network Protocol El Click the Network Protocol that you want to install then click OK If you
9. Style on page 54 SpecsLab2 125 Navigation in the SpecsLab2 window 126 SpecsLab2
10. Tite XAxis YAxis Sizes Font Colors Styles M Ekin descending I Show Grid l Ebin descending M Autoscale M Show Z Axis Cens mv Figure 5 9 Styles property sheet With the check boxes of the Styles property sheet the X axis direction the visibility of the Z Axis and the Grid as well as the Autoscale function see also the icons in Data View on page 50 can be changed 5 3 Toolbars You use the toolbars to select several menu items very quickly to perform file or region operations to control a measurement or to apply properties to the data curves If you leave the mouse pointer over an icon for a few seconds a tooltip will appear providing information about that icon s function 5 3 1 Main Tool bar Bea sche Won k hee The left half of the icons can be used to perform some of the File menu commands The right side includes some functions to edit a region as well as copy and paste commands New File creates a new file for data acquisition and ie New Group creates a new group within the selected file New File New Group on page 39 New Region adds a new region with the parameters of the selected active region to R the current group New Region on page 39 SpecsLab2 49 Viewing the Data E co Open Save and Save All gives access to the file handling operations described in Open Save Save As Save All Close on page 40 Print performs the stan
11. SpecsLab2 Manual Version 2 9 About SpecsLab x Software Version 2 25 Revision 1 24 Date 20041 2 07 15 3322 Analyzer not connected Hardware Type unknown ML Sernalzer 1 3 Copyright C 2001 Specs ambr About SpecsLab2 All rights reserved No part of this manual may be reproduced without the prior permission of SPECS GmbH User s Manual for SpecsLab2 Software Manual Version 2 9 printed 20 10 08 SPECS GmbH Surface Analysis and Computer Technology Voltastrasse 5 13355 Berlin GERMANY PHONE 49 0 30 46 78 24 0 FAX 49 0 30 4 64 20 83 support specs de SpecsLab2 Chapter Table of Contents 1 Installation 1 1 1 Roadmap SPECS installation cece ccc eee eens 2 1 2 EtherCan ETH with EC10 short summary 3 1 3 System Requirements cece eee eee e cece surih 3 1 4 Interface O DUO MNS a russian 3 1 5 Installing Sspecslaop 2X ee 4 1 5 1 Installation programs Example cccce cece eee 5 1 542 Windows Installer eiria ia 6 L523 SpecsLab2 Install tion an aan 6 1 5 4 The Windows NT 2000 XP Registry ccceee eens 7 1 5 5 Running SpecsLab2 on Windows 2000 and Windows XP with non administrator accounts 8 1 6 IP Protocol Requirements un 9 1 Ethere AN WITH ECTO ei 11 1 7 1 Comments regarding the EC10 c cece eee eee 11 1 722 Setup TO EC TO eu 11 1 7 2 1 Ethernet Connection ernennen 12 1 97 22 C
12. SpecsLab2 Program Description detector and the display would have an oscilloscope style But this may vary with the detector type The following description of the functionality refers to a HSA3500 that is configured as a Spin detector power supply but the features that are described are very similar with any other HSA3500 power supply The detector described in the following is a four channel Spin detector but the description can be applied to other multi channel detectors as well MCD5 or MCD9 10 2 2 Starting the Program The HSA3500 Juggler is started as any other windows application Upon start up the following window will be displayed D r 2 standas m a Analyzer lene Zeitungs FF Hamp Ti mE J Stan m ulana Hz Figure 10 6 HSA3500 Juggler start window In the centre there is a switch tab that chooses either the Analyzer module or the Detector module Above is the Connect button A connection to the HSA3500 is established when the Analyzer tab is active a connection to the detector is established when the Detector tab is active Before the connection is established a pull down menu will let you choose to which hardware on the system the connection should be established there could be several hardware types installed The Analyzer Detector tab toggles between analyzer specific or detector specific settings These would typically be lens modes for the analyzer and a dwell t
13. H IR igh Magnification H f Medium Magnification SRG un RE Figure 5 1 Visible data In figure 5 1 the region E 30 is visible in the Data window Because one region in this group is set to visible the icon of the visible region as well as the group icon Medium Area is enabled whereas all other group icons are disabled 5 1 1 Style and Color With the context menu or the shown icons in the Tool bar below the color and style of each measured region can be set This allows for easy comparison and handling of region data SpecsLab2 45 Viewing the Data Note the SELECTION RULES on page 37 Fee OES Solid Line Dashed Line Dotted Line Dashdotted Line Dots v Circles Filled Circles Squares Filled Squares Crosses x Crosses Figure 5 2 Color and Style Toolbar and Context menu The possible styles are shown in the Toolbar box above Sizes of the different marks can be set between 1 and 9 mm The color table is the common Windows color table with basic and user defined colors 5 2 View Menu Toobers i he l Binding Energy Dannes v Analyzer Counts per second v Channels ZAxis v Styles Grid v Status Bar Cross Cursor v Autoscale Preserve Zero Rescale Diagram Settings Figure 5 3 View Menu The appearance of the View menu is shown in figure 5 3 Several possibilities to set the Data window style and parameter exist beside the selection of the visible Toolbars This conten
14. Specs SpecsLab2 config raw into Specs SpecsLab2 tools bin exe into SPECS SpecsLab2 bin pdf into SPECS SpecsLab2 doc if desired The pdf files are for your information and can include the newest versions of the manuals The printed manuals maybe created from an earlier version Mostly only small improvements are made which do not influence the normal usage of the printed manuals Configure the interface to the analyzer supply EC10 Ethernet Can Bus adapter or PCI ISA CAN Bus card 1 5 2 Windows Installer The Windows Installer service introduces a faster more reliable method of application installation Standardized application installation enhanced management and easy customizing of applications are some of the many benefits Windows Installer provides Another important function of Windows Installer is its ability to diagnose and repair configuration problems when the application is opened On demand installation allows the seamless activation of an advertised feature or product without requiring the user to exit from the current program in order to run a separate setup program a process which often necessitates restarting the computer 1 5 3 SpecsLab2 Installation After Windows Installer is checked or installed the install shield will guide you through the SpecsLab2 installation All SpecsLab2 executable programs and dynamic link libraries will be installed on the PC You can choose between a typical defa
15. e The SpecsLab2 tool IgControl must be switched off de activated or local SpecsLab2 69 Basic Concepts of Operation 1 Acquisition Walid Regions Waiting for Acquisition Ea gt Currently Acquiring SSS Consecutive Cyclic C Overwrite Suspend Besume Figure 6 13 Acquisition Mode for the Depth Profile feature must be Cyclic The depth profile remote server will suspend the acquistion after the number of scans given in Scans per Cycle is completed After the defined sputter time is subsided the cycle number is increased and SpecsLab2 will resume the acquistion Depth Profile Cycle Definition XRaySource Server Each single depth profile cycle consists per definition of an ion sputtering e g by IQE 12 38 with PU IQE or PS IQE followed by the data acquisition of the scheduled regions In case the XRaySource server was selected the data acquisition occurs together with simultaneous operation of the designated excitation source e g x ray source XRC 1000 or XR 20 Depth Profling with XRayDummy For applying the XRayDummy the exciting x ray source should be set manually into a stable operation before the Depth Profile starts Under this circumstance the x ray source operates permanently during both time periods the data acquisitions and the ion bombardments conducted by the Depth Profile feature Typical Example For example to measure a depth profile with 2 sca
16. 0 603 Ep0 Ox0090 INFO HsaPhoibosCtrl 1 variables Ekin 10 000000 Ep 3 00 0 0090 NOTICE HsaPhoibosCtrl 1 GroundPlate 7 000000 0 0090 INFO HsaPhoibosCtrl 1 30 10 01 formula amp Ekin SEp SUF Ox0090 INFO HsaPhoibosCtrl 1 variables Ekin 10 000000 Ep 3 00 0 0090 NOTICE HsaPhoibosCtrl 1 InnerHemisphere 4 999000 0x0090 INFO HsaPhoibosCtrl 1 30 10 02 formula amp Ekin SWF 1 667 SEpI Ox0090 INFO HsaPhoibosCtrl 1 variables Ekin 10 000000 Ep 3 00 0 0090 NOTICE HsaPhoibosCtrl 1 OuterHemispherePlate 8 191000 0x0090 INFO HsaPhoibosCtrl 1 30 11 00 formula amp Ekin SWF 0 603 SEpo Ox0090 INFO HsaPhoibosCtr1l 1 variables Ekin 10 000000 Ep 3 00 0 0090 NOTICE HsaPhoibosCtrl 1 InnerHemispherePlate 4 999000 0x0090 INFO HsaPhoibosCtrl 1 30 11 01 formula amp Ekin SWF 1 667 SEpI Ox0090 INFO HsaPhoibosCtr1l 1 variables Ekin 10 000000 Ep 3 00 0 0090 NOTICE HsaPhoibosCtrl 1 ConversionYoltage 7 000000 Ox0090 INFO HsaPhoibosCtrl 1 30 09 00 formula Ekin Uconv Ep WF 0 0090 INFO HsaPhoibosCtrl 1 variables Ekin 10 000000 Ep 3 00 0 0090 NOTICE HsaPhoibosCtrl 1 DetectorVoltage 0 000000 0 0090 INFO HsaPhoibosCtrl 1 30 04 00 formula Udet Ox0090 INFO HsaPhoibosCtrl 1 variables Ekin 10 000000 Ep 3 00 0 0090 NOTICE HsaPhoibosCtrl 1 ScreenVoltage 0 000000 Ox0090 INFO HsaPhoibo
17. 2 7x20 2 open 1253 6 399 88 1400 2550 4 4 Specification 06 14 02 14 38 05 XPS 2 7x20 2 open 0 027959 371 94 364 62 1253 6 891 66 888 98 9 2200 Specification 06 14 02 11 49 51 XPS 2 7x20 2 open 0 027959 371 93 364 49 12536 891 67 889 11 18 2200 Specification 06 14 02 11 51 30 XPS 2 7x20 2 open 0 027959 371 94 364 61 1253 6 881 66 888 99 6 2200 Specification Overview 06 14 02 12 43 44 XPS 2 782052 0pen 1 1103 6 241 4 1253 6 150 1495 15 2200 Specification 1st scan XPS 2 7x20 2 open I 1 1103 6 241 4 1253 6 150 1495 15 SpecsLab2 Intensity 1 0 Counts Name Group Analyzer Ist scan Specification PHOIBOS HSA3500 150 I Method Entrance and Exit Slit Lens Mode is Mode XPS E 7x20 2 open Mediundres z ixed nalpzerTransmission F Eexc Ekin Start Epass I Ubias I Udet T wt 1253 6 frags fis jo 2200 fas Ekin Epass Ekin Step Ekin End Values Scans Dwell Time 37 fi 241 4 fi 346 1 Joa Comment Default Values sad T T T a Save 08 0 6 04 fen A 3 Previous Next New Validate Acquire Clear B ind Ing Energy 1 0 eV Mstar G Exploring DASIL work ir By Exploring D HOME sw Q Exploring D SI2 work di SR Exceed Prana sodhi specslab inbo Adobe FrameMaker SGML BE ObjectServer exe softw SpecsLab E Adobe Photoshop Unii ee 11 13 Figure 2 2 SpecsLab window The normal start up of the program is shown figure 2 2 Besi
18. 35 File and View Menu Region Operations 37 4 1 FILES AVINOOW sera nn 37 4 2 Menu File Region Operation cece cece eee eens 39 4 2 1 New File New GrouDP ccc cece cece eee e eee EA 39 4 2 2 NeW Region sr ns Mena 39 4 2 3 Open Save Save As Save All Close 40 4 2 4 Print Print Previews 40 4 2 5 COU U ee ee a ee ee esse derer 40 4 2 6 SETEINGS EEE IRRE Lade 41 4 2 6 1 SpecsLab2XY Data File Settings cceececeeeeee eee eee nn 41 SpecsLab2 2 4 2 6 2 RESCUE Serlalizers ti er ee Beanie toe 41 4 2 6 3 POUT OS AVC aa nen nee 42 4 2 7 Restore AULOSAV CG mirri are 42 4 2 8 Recent Files Exit cc ccc ccc ccc ccc ccc e cee eeeesenaeenaenas 42 4 3 Data SUCUT O rannen rear 42 4 3 1 VANDA S carat nase a a ae ee want ee teats eae eae Ate 43 4 3 2 SPECSLADIXKY ers es ran een ee 43 4 4 EG MO cok eb es A eig 44 5 Viewing the Data 45 5 1 VISI Dle Data cee cet er set tera seth oe Be ete ie 45 5 1 1 StYIEAaNa COlOM reinen 45 5 2 Vew Ment seinen eine 46 5 2 1 Diagrami Settings a a sero is erea 47 5 3 TOOLD A Sn en een ene 49 5 3 1 Main Tool Dar 2xossecetaccteemacivsicctenuacank woe aeodewwaracst 49 5362 Data VIEW ihe ete ee ee elas 50 5 3 3 Analyzer Toolbar an i EEEE EE EARST 52 5 3 4 Channels arree a a aae e a en ase 54 5 3 5 OE A E ie EAE lato ee ates cee 54 5 3 6 Slat US bal ee euon abet seann ee een 54 5 4 Context Menu of the Files Regions Windows 54 6 Basic Concepts of Op
19. 57 Viewing the Data 58 SpecsLab2 Chapter Basic Concepts of Operation The basic structure of SpecsLab2 is described in Architecture and Functionality of SpecsLab on page 27 In the following section shows the basic concept of the SpecsLab2 operation Preparations All supplies set Start program Add a File Group Region Validate the regions Load Data Files Modify the sequence Visibility Stop Pause Layout Check the results Edit Save Operation Export Background Print Preview Print Peak Location Exit Smooth Figure 6 1 Acquisition process diagram The flow chart shows the common process sequence for the SpecsLab2 program handling The detailed actions to set the region parameter and for the data handling are described in the corresponding sections For data acquisition the necessary supplies and source should be set and the SpecsLab2 program should started Choose the Analyzer the Source and the Remote type if installed in the Analyzer Settings window Analyzer Settings on page 60 SpecsLab2 59 Basic Concepts of Operation Create or modify if loaded the regions which do you want to measure Region Edit Window on page 77 and start the acquisition in the menu Analyzer or via the Analyzer Tool bar The acquisition sequence shown in the Acquisition window give the estimated acquisition time and allow to modify the current started measurement After acquisition the data can be modified
20. ATL813947 B C78130 FO Fast Ethernet Adapter C Obtain an IP address from a DHCP server Specify an IP address IP Address 1952 168 236 15 Subnet Mask 255 255 255 0 Default Gateway Advanced cae am Figure 1 18 TCP IP Properties menu Please reinstall the Service Pack 6 now from your Windows NT install CD or check the SPECS installation CD for service pack updates e g WinNT4 0 sp6a 18 SpecsLab2 Installation of SpecsLab 1 x 1 8 Installation of SpecsLab 1 x If not updating from a previous SpecsLab installation and are wanting to use SpecsLab1 as a data processing tool some more components have to be installed These components are located in the folder SpecsLab_1 x on the installation CD Read the SpecsLab 1 x manual for further instructions Additionally either a TCP IP network adapter for access to local network must be installed or you have to install at least a MS Loopback protocol to use SpecsLab1 Es Control Panel File Edit View Help a ControiPanet A GS BSB XS IE El amp Accessibility Options 1 Add Remove Programs WS Console Network 2x 4 Date Time BO Devices Identification Services Protocols Adapters Bindings z Display Network Adapters 44 Fonts F HCL Inetd B 1 3Com EtherLink 10 100 PCI NIC 3C905B TX 6 ndexerstellung Saf Internetoptionen feet Keyboard 1 Mail S Matrox Bildschirmeige E Modems x Mou
21. C fF Jt analyzer Leiestar hc l sten dard 3 Es Tina n 5 ik Bir a oS F wo gt moone d m ad hell cH Olle a Sag Pulsar wei Een finnk Sole Anolvezer Detector Atuc oaget ACO orze Ved Po e mHC fi e aa Eo i he cup E C Urup vf 0 M Lupe es ni IE C Ucupz f i Tima De eS ravni vp nf Figure 10 2 HSA3500 Juggler Detector tab 7 Click on the Info button This will display a list of available detector data Double clicking on a channel deactivates activates the channel De eco Dati Info Chanel He LFannel 3 Channel tH Aeprrreinc stiofd Cracinel 1 CFasnel 2 Figure 10 3 Juggler Detector Data Info window 8 Activate the Analyzer tab Here different modes defined in the configuration file can be chosen E g a lens mode and a Range Pass energy combination for SpecsLab2 103 HSA 3500 Juggler the Spin detector HSA3500 After changing the lens mode or the Range Pass energy click on Start to switch on the voltages Analyzer Dete ctor Lens Mode MediumArea Range Ep akv ev _ lons T Lock Settings Figure 10 4 HSA3500 Juggler Analyzer tab 9 Click the Detector tab Here parameters associated with the active detector can be set This would typically be the Dwell Time of a multi channel counter This dwell time will affect the speed of the oscilloscope style display if applicable
22. Data window with a detector scan 62 SpecsLab2 Analyzer Settings 6 1 2 Source Method Server The sources section of the window serves to choose an excitation source for the different available methods This could be an x ray gun with a certain anode material a synchrotron monochromator or other sources Figure 6 6 Analyzer Settings Phoibas Hsa3500 PHOIBOS HSA3500 150 RE H Type settings Load Settings save Settings Detector fa ste v Settings Napping Sources Method IxFS Server xRaySource Y ectranGunDummy lonGunDummy Dummy amp RayDumm Name Remote server DepthProfile Name Depth Frofile Settings Load Settings Save Settings Selection of Source Methods Each of these sources have characteristic parameters that can be defined or even remote controlled in the sources section For each source there exists a software server that provides the remote control capability If there is no remote control possible there are dummy server that permits to type in and protocol key parameters like power or photon energy e g XRayDummy ElectronGunDummy see figure 6 6 SpecsLab2 63 Basic Concepts of Operation Server settings representing the designated parameter of the different sources can be stored by Save Settings Stored settings can be reloaded by Load Settings 6 1 2 1 XRayDummy server Source Settings Anode M
23. HSA3500 Juggler start window 105 Figure 10 7 Juggler PHOIBOS HSA3500 100R5 106 Figure 10 8 Juggler Voltage Display 107 Figure 10 9 Juggler Ramp Time and Pull Back 107 Figure 10 10Juggler Mode selector 110 Figure 11 1 SpecsSpy user interface 113 Figure 11 2 Debug View 115 SpecsLab2 121 List of Figures 122 SpecsLab2 Chapter Index A D Abort 54 Data Structure 42 Install Shield Wizard 22 Acquire 53 Data window 35 Installing 28 Acquisition Mode 53 Detector Scan 62 Installing SpecsLab 1 x 19 Acquisition process 59 Diagram Settings 47 Installing SpecsLab 2 x 4 Acquisition window 81 Interface options 3 Analyzer Controls 105 Introduction 1 27 Analyzer Settings 60 EB sj 1P protocol requirements 9 Appearance 30 IP Addresses 10 17 l EC10 11 Architecture 2 Edit Menu 44 Autosave 42 J Aut 5 Eexc 79 er Ethernet connection 12 Juggler 101 Export 40 B M mes er F MCD Calibration 97 ALRI Calculation Fermi Edge 88 MCD Info 56 method 86 Fil 37 oe Basie Concept zo Files Monitoring 73 Functionality 27 Monochromator 65 66 FWHM 90 C N Color 45 G l New File 39 Configuring the EC10 12 Groups 38 New Group 39 Consecutive 53 Mave ae 39 Context Menu 54 H ea cps 51 O Cross Curso 52 Help 29 Cyclic 53 ObjectServer 20 Operations 83 SpecsLab2 123 Index Overwrite 53 Suspend 54 Syntax 84 P System Requirements 3 Peak Location 92 T Preserve Zero 52 Preview 99 Tool Bars 49 Print 99 Tools 97 Print Info 4
24. HUB switch is a pure 100 MBit device and it can not be configured to 10 MBit If one or more of the above reasons apply you will have to use a separate network card The card as well as the crossover network cable are included in delivery of the Specs system The section 1 7 3 on page 15 shows how to install EC10 using a second network card in the PC for the communication with EC10 1 7 2 Setup for EC10 This section describes the steps to be taken for standard installation of EC10 no second network card SpecsLab2 11 Installation 1 7 2 1 Ethernet connection Like other peripherals e g printers scanners etc the EC10 can be integrated into the network environment of the PC The figure 1 10 shows how the EC10 is connected to the PC Terminator network cable CAN Bus EtherNet card rest of network Ense HUB switch PCU 300 Terminator Figure 1 10 Standard connection of the EC10 via HUB switch The EC10 has to be attached to the same HUB or switch that the PC is connected to The EC10 is a 10 MBit device Therefore the HUB switch either must be autosensing between 10 and 100 MBit or the port where the EC10 is attached has to be manually configured to 10 MBit If the device is a 10MBit device no action is necessary Please refer to the manual of the HUB switch for further details CAN cross over cable CAN EtherNet card
25. a source corrected curve If no parameter data exists no change will be performed Transmission performs the correction of the data by the given analyzer transmission function Background substracts the calculated background The background is shown in a separate region subordinated to the selected regions if the background curve has been calculated before see Background in section 7 2 on page 86 Eg toggles the x axis of the Data window between binding energy and kinetic energy if source information exists for example the excitation energy of a X ray source The axis is calculated by Eg Excitation x The released icon button shows the x axis in the measured units cps toggles the y axis display of the Data window between counts and counts per second The released icon button shows counts as y axis unit Z Axis uses a z axis to display data curves with additional 3rd parameter in a 3D diagram The parameter depends on server settings and could be for example a depth information SpecsLab2 51 Viewing the Data Data 1 olx Intensity 10 Counts 870 875 880 885 890 Kinetic Energy eV Figure 5 10 3D display in the Data window Grid shows a grid in the Data window at each axis tick Cross Cursor shows a cross cursor in the Data window The position is set with a right mouse click The x y position of the cursor is given in the Status tool bar Status Bar on page 54 If Autoscale is activated
26. anyhow the servers to none before trying a restart SpecsLab2 73 Basic Concepts of Operation Depth Profile Diagram and Data Evaluation In figure 6 16 the result of a typical depth profile with two acquired regions is demonstrated Apply the SpecsLab2 tools to present a quasi 3dimensional picture For data processing one can transfer the data to CasaXPS lel Es SpecsLab File Edit View BEE Tools Operations Window Help eat re ty Ey Euer u m x E Aeuuite E Ee Suspend Acquisti Iofs Beste Scguistiaon Consecutive Mode Cyclic Mode Overwrite Mode Settings Intensity 10 Counts 1 05 1 1 Kinetic Energy 10 e Lens Slit Mode Scans Dwell Step Ebin Eexc Ekin Epass Ubias Ud WMA 1 0 2x201 0 25x20 FAT 140 0 1 1 370 0 324 8 1253 6 8674 8 920 6 10 ap 180 WMA 1 0 2x20 1 0 25x20 FAT 140 0 1 1 117 39 71 388 1253 6 1136 2 11082 2 10 40 180 T gt Figure 6 16 SpecsLab2 Data Window 6 1 3 2 AMC Monochromator Specs AMC Monochromator Control is an additional remote server for the Specs data acquisition and processing software It implements the Asynchronous Monochromator Control AMC protocol defined by BESSY Opional intensity scaling is possible by measuring the probe current in two different ways 1 with a Keithley voltagemeter and a WASCO ADC adapter ADIODA PCI12_LCV or 2 with a Specs Picoampmeter and a WASCO ADC adapte
27. compare the energy position of each channel Also compare the peak position for different pass energies Large differences suggest this lens slit combination needs a recalibration The procedure to do this MCD calibration is described below SpecsLab2 97 Tools MCD Calibration x Group Pass Energies Spezifikation 30 01 2002 v 8 8 13 20 Apply to Lens Apply to Slit Ek Shift Ep C Largesrea O 1 0 5x2041 1x20 f 0 10506 0 0004 amp Medium rea U11 0 5x20 2 0pen S rhe pees C HighMagnification DI 2 7 2041 1 20 n 7 is 0 02422 D 0004E C MediumMagnification 2 7x20 2 open 0 00258 0 0005 C HighPointTransmiss 2 7 2043 1 dia 0 02774 0 0004 C MediumPointT rans O 33x2041 1x20 0 05348 0 0004 5 Pel a Ww er oon oon T MEY nna 4 gt 4 gt Resulting Peak Position 995 414 0 011 Close Apply f Figure 8 1 MCD Calibration 1 2 Om amp U Identify a single high intensity peak in your data and set up a region that only measures this peak Open a separate group and create a number of identical regions within that group Use the same parameters above but different pass energies e g for regions with 5 10 20 50 eV pass energies aries O E P Spezifikation Phoibos 2001 40 Eu Medium Area oof Ep5 slit Z open iR Epil slit Z open iR Epzl slit Z open PR Ep l slit Z open Apply Peak Location on page
28. have an installation disk for this component click Have Disk Network Protocol NetBEUI Protocol Y NWLink IPSF Compatible Transport Point To Point Tunneling Protocol Streams Environment ET CRIP Protocol Have Disk OF Cancel Figure 1 8 Select Network Protocol menu SpecsLab2 9 Installation Microsoft TCP IP Properties IP Address DNS WINS Address Routing An F address can be automatically assigned to this network card by a DHCF server four network does not have a DHCP server ask your network administrator for an address and then type it in the space below Adapter 1 3Com EtherLink 10 100 PCI NIC SC905C Ts Obtain an IP address from a DHCP server Specify an IP address IF Address 192 168 235 15 Subnet Mask 255 256 255 O Default Gateway Example Ask your network administrator Advanced me Figure 1 9 Network menu Like any other network device the EC10 must be assigned a unique IP Address This IP Address must be within the same subnet as the PC s IP Address Please ask the network administrator for an IP Address for the EC10 and for an IP Address for the PC if TCP IP not yet had been configured on the PC The examples throughout of this document will assume that the following IP addresses for EC10 and PC were obtained PC s IP Address 192 168 236 15 EC10 s IP Address 192 168 236 16 section 1 7 2 2 on page 12 Subnet ma
29. only once If the IP Addresses in the network requires changing it may be necessary to also rerun the configuration program e Power on the HSA3500 The HSA3500 will provide power supply for EC10 Check the correct network connection of the EC10 the LED LNK at the front side of the EC10 must flash e Start the program EC10Config exe from Start gt Programs gt Specs e Enter the IP Address of the EC10 into the field IP Address e Click on the RUN button The EC10Config window should look like figure 1 12 below PAANI configuration tool 1 2 Specs GmbH 2002 P Address 192 168 236 16 Configuration tool running for IP Address 192 168 236 16 Please push EC10 s CFG switch now Figure 1 12 EC10 configuration tool running e Now press and hold the CFG button at the rear side of the EC10 for at least 2 seconds use a ball pen or another pointed object to do this The EC10 will indicate the configuration process by shortly flashing the LEDs PWR SER CAN and ONL two times SpecsLab2 13 Installation If the configuration succeeded the EC10Config window should look like this EC10 configuration tool 1 2 Specs GmbH 2002 IP Address 192 168 236 16 Device with ethernet address 00 60 56 60 cc 02 configured successfully Version information ec10 1 4 9 94 Od 00 07 42 932 Please close the window now Figure 1 13 EC10 configuration tool successful The EC10 is now config
30. or Save All CTRL L to save the complete file structure shown in the Files window Select the SpecsLab data format for this operation in the standard window file select box The default SpecsLab format is set to xml SpecsLab2XMLDataFile 34 SpecsLab2 Data Window 3 3 Data Window Data 1 OF x ample spectra oO oO oO Co wo m a 0 4 0 5 0 6 0 7 Kinetic Energy 10 eV Figure 3 4 Data window Inside the data window it is possible to zoom the area of interest Simply use the drag function of the mouse to zoom into the desired intensity and energy range Use the Data window Tool bar icons to go forward backward within the zoom steps or rescale the window as well as select the cursor option and set the autoscale function Please use the mouse and hold a few seconds on the icon to find out the functions E2E3 eT yb b AAEE A nE For the data window layout please use the Diagram Settings page 47 in the View menu SpecsLab2 35 Quick Start 36 SpecsLab2 Chapter File and View Menu Region Operations 4 1 Files Window The logical data file structure of SpecsLab is shown in the Files window select the item Files in the menu Window to display this window a H vacos experiment calib3 xml ff Medium Area Ep10 Ep20 R Ep30 Ep40 Ep50 H Large Area its High Magnification HASA Medium Magnification Figure 4 1 File
31. structure in the Files window Complete files groups or a single region can be manipulated just as in other standard windows applications For example move a Region or Group via drag and drop to the desired location within the file tree in the File window These commands are very helpful when organising your file structure SELECTION RULES Select several REGIONS inthe Regions window SHIFT and left mouse click for regions in a row CTRL and left mouse click to mark several single regions or select one REGION in the File window You cannot manipulate regions that are currently being used for acquisition SpecsLab2 37 File and View Menu Region Operations SpecsLab can handle several files of data file name with path Each File experiment is structured in Groups and Regions The regions can be easily sorted into different groups using drag and drop into groups or the common Edit operations as well as the context menu operation Groups are mainly used to structure a large amount of spectra Using groups may help in cases where more than one set of regions have separated from experimental or logical structure With different files complete experiments are easy to compare and easy to handle The File menu gives access to all necessary file operation as well as the icons in the Main Tool bar Edit View Analyzer Th New File Ctrl New Group Ctrl t New Region Ctrl F Open Ctrl 0 Close Del Sa
32. target of 1000 volts The Stop button is pressed at an Actual value of 600V with a Pull Back value of 50 Then the actual SpecsLab2 107 HSA 3500 Juggler voltage will be reduced to 100 600 100 50 350V and the ramp will be stopped This function allows you to prevent damage to your equipment if you discover that something went wrong during a ramp of a voltage 10 2 6 Detector Controls Voltages that are logically associated with the detector are displayed in the right half of the window These voltages behave exactly like the voltages described above in the analyzer voltages section including the Ramp Time and Pull Back functions Above the voltages display is an oscilloscope style display with parameter fields if a single or multi channel detector is connected This window displays the current count rate in the channels In the case of the Spin detector it displays two additional virtual channels called Asymmetric Ratio Channels that are calculated from the four signals Formulas Asymmetric Ratio Channel 1 Ch1 Ch3 Ch1 Ch3 Asymmetric Ratio Channel 2 Ch2 Ch4 Ch2 Ch4 10 2 6 1 Info Window The Info button opens a new window that allows you to activate or deactivate selected channels by double clicking on them This window also serves as a legend for the channel colours Hide this window by pressing the Hide button which is the former Info button 10 2 6 2 Display Mode The Mode field wi
33. that all selected regions will be measured consecutively i e all scans within the region will be finished before start of the next region in the Waiting for Acquisition list Acquisition window means that after a scan the next region in the Waiting for Acquisition list will be active for acquisition If all waiting regions are measured once the next scan will start This procedure will be stopped for each region if the desired scan value is reached and all regions are measured means that all selected regions will be measured continuously i e first region one scan next region one scan up to the end After this the measurement will start again beginning with the first selected region and the data will be overwritten This measurement does not stop automatically SpecsLab2 81 Basic Concepts of Operation 82 SpecsLab2 Chapter Data Operations The operations menu contains the following items Background on page 86 Linear Operations on page 90 Peak FWHM on page 90 Peak Location on page 92 Savitzky Golay Smooth on page 94 A Settings sub menu for the above listed operations and in addition a Reset Operations item In the event that the server process operation exe hangs it must be killed with the system task manager The server process can be restarted by selecting the Reset Operation item Operations Background Fermi Edge Linear Ope
34. the display in the Data window is automatically rescaled during measurement and region operations to the maximum and minimum of all visible data points Pressing Preserve Zero will always show the zero base line in the Data window automatically during measurement and region operations Rescale checks the maximum and minimum of all visible data points and rescale the display in the Data window to these values Preserve zero will set the minimum to zero Zoom Back Forward allows to go step by step through the used zoom levels 5 3 3 Analyzer Toolbar p Consecutive i 2 This toolbar as well as the items in the menu Analyzer itself allow you to handle the measurement conditions 52 SpecsLab2 Toolbars Please note In the Files window you can only select a single region to apply the analyzer operations In the Regions window several regions or whole groups can be selected shift left mouse button or CTRL left mouse 4 Validate is active if no validation of the region was done The is also seen in the Files window for the empty and not validated regions see also Wew Region on page 39 b Acquire is active if the selected regions are validated The use of this button starts the acquisition The Files window shows also the current status of the region H WVACOSSEXPERIMENT calib3 xml a Ee coe Status indicator Ep GEE e means no data inside Validate button is released e A bla
35. the dot product of depth profile cycles e g 5 and scan numbers per region e g 2 into the Scans dialog box of Region Edit71 Monitoring Depth Profiling in Acquisition window 73 120 SpecsLab2 Figure 6 16 SpecsLab2 Data Window 74 Figure 6 17 AMC MonochromatorRemote Server 76 Figure 6 18 Settings menu of the Delay Server 77 Figure 6 19 Region Edit window 79 Figure 6 20 Regions window 80 Figure 6 21 Acquisition 81 Figure 7 1 Operations menu region structure 83 Figure 7 2 Parameter context menu e g for FWHM 85 Figure 7 3 Operation syntax example 86 Figure 7 4 Background settings menu 86 Figure 7 5 Fermi Edge operation 89 Figure 7 6 Fermi Edge Settings 89 Figure 7 7 Linear Operations Settings 90 Figure 7 8 Result of Linear Operations 90 Figure 7 9 Peak FWHM Settings 91 Figure 7 10 FWHM Operation 91 Figure 7 11 Peak Location Settings 92 Figure 7 12 Peak Location 92 Figure 7 13 Parameter window for Peak Location 93 Figure 7 14 Savitzky Golay Smooth Settings example 95 Figure 7 15 Savitzky Golay Smooth and Derivation 96 Figure 8 1 MCD Calibration 98 Figure 9 1 Printer configuration 99 Figure 9 2 Print Preview window 100 Figure 9 3 Size settings for print 100 Figure 10 1 HSA3500 Juggler start up 102 Figure 10 2 HSA3500 Juggler Detector tab 103 Figure 10 3 Juggler Detector Data Info window 103 Figure 10 4 HSA3500 Juggler Analyzer tab 104 Figure 10 5 HSA3500 Juggler Detector tab 104 Figure 10 6
36. the user may specify the format of the annotations The expression form is similar to the printfcommand of the C language Macro format lt x m 7 na al g gt Terms X Parameter name corresponds to the Parameters entry of the context menu for the resulting operation name see figure 7 2 on page 85 Default format see explanation below m value error f Scale factor useful if kcps instead of cps etc n Field width number of digits note width digits sign separator sign g Fixed point arithmetic Meta signs Optional Alternative exclusive Literals lt gt Delimit the begin and end of a macro Used in combination with the term f Starts a format term M Wm Separate the terms n and g 84 SpecsLab2 Syntax for the Operation Parameters Available parameter names ccc Peak FWHM 719 ae Styl Backgrou te Background Method Linear Rename Savitzkp Dee FW HM 2 2341 742 fE Parameters Counts 261 9 5393 30 51 6173 Count BG i 717 6759 42 806548 Rate BG 3435 3518 PkiLeft x 1778043 PkiRight x zame y 751 386 Asymmetry 019055074 pzas Style feline gt 95 613036 fi 61 7028 r r r Rate 5237 6786 61 022358 y y r Figure 7 2 Parameter context menu e g for FWHM If the default format is specified the value is scaled to lie between 1 and 1000 exclusive and the prefix used to form decimal multiples and submultiples of t
37. the x values usually energy the sign in the 1 a term is either positive x lt center or negative for x gt center Intensity x intensity at x Intensity center intensity at centers center the peak maxima value of x Slope sloping background value Background constant background intensity FWHM Full Width Half Maxima a asymmetric factor SpecsLab2 93 Data Operations We emphasize that in fitting peaks for energy scale calibration no sloping background should be used in the fits in order to avoid the systematic error discussed in the article of C J Powell To locate the position of peaks in spectra that have multiple components e g for the identification of chemical states fits should be made with the inclusion of an appropriate background and with appropriate functions to obtain satisfactory results 7 7 Savitzky Golay Smooth The idea behind data smoothing is that SpecsLab2 measures a signal that is both slowly varying and also corrupted by noise Sometimes it can be useful to replace each data point by a local average of surrounding data points Since nearby points measure very nearly the same underlying signal averaging can reduce the level of noise without significant change the signal and the containing information obtained In this section we discuss a particular type of low pass filter well adapted for data smoothing named Savitzky Golay Savitzky Golay filters were initially and are still often
38. used to render visible the relative widths and heights of spectral lines in noisy spectrometric data A digital filter is applied to a series of equally spaced data values f f t where amp i A for some constant sample spacing Aandi 2 1 0 1 2 The simplest type of digital filter replaces each data value f4 by a linear combination g of itself and some number of nearby neighbors nR 87 gt Cn Sitn n nL Digital Filter EQ 7 4 Here nL is the number of points used to the left of a data point i i e before it while nR is the number used to the right i e after As a starting point for understanding Savitzky Golay filters consider the simplest possible averaging procedure For some fixed nL nR compute each g as the average of the data points from f _ to fi p This is sometimes called moving window averaging and corresponds to equation 14 8 1 with constant c 1 nL nR 7 If the underlying 1 C J Powell Surf Interface Anal 23 121 1995 2 A Savitzky and M J E Golay Smoothing and differentiation of data by simplified least square procedures Anal Chem 36 8 1627 1639 1964 94 SpecsLab2 Savitzky Golay Smooth function is constant or is changing linearly with time increasing or decreasing then no bias is introduced into the result If the underlying function is constant or is changing linearly with time increasing or decreasing then no bias is introduced into
39. with reduced sense Operate modes of PU IQE 12 38 or PS IQE 12 38 Because for gas ionization sources by design the stabilization of the emission currents needs a few seconds the emission current will not be switched off between data acquisition cycles to avoid time losses and unstable sputter onset resulting in non continuous sputter rates This point of view is especially evident and essential for very short sputter periods Between the acquisition cycles therefore the non sputter state of the PU IQE12 38 or PS IQE12 38 is defined by the following properties e High voltage is switched off e The PU IQE 12 38 or PS IQE 12 38 remains in Operate mode e The emission current remains at the pre setted value After the depth profile was finished by server the PU IQE 12 38 or PS IQE 12 38 will remain within the break state described above To leave the break state the Depth Profile server should be switched to none The PU IQE 12 38 or PS IQE 12 38 turns to local and standby Monitoring the Depth Profiling The Depth Profiling is monitored in the Acquisition window in the line Current Acquiring 72 SpecsLab2 Analyzer Settings ie Acquisition Valid Regions woting for Acquisition A a Lure nth Acquiring Region Groupi Cycle 4 Scan 6 10 8739 95 e estimoatec time left 01m 343 re Eanserulse Stat Suspend e Cyclic Figure 6 15 Monitoring Depth Profiling in Acquisi
40. 1 1253 6 399 88 1400 Specification MAI 06 14 02 14 38 05 2 7x2042 open i 0 027959 371 94 364 1253 6 881 66 888 98 2200 Specification MA18 06 14 02 11 49 51 2 7x20 2 open i 0 027959 371 93 364 1253 6 881 67 889 11 2200 Specification LAG 06 14 02 11 51 30 2 7420 2 open 0 027959 371 94 364 1253 6 881 66 888 99 2200 Specification Overview 06 14 02 12 43 44 2 7x2042 open 1103 6 241 1253 6 150 1495 2200 0 2 open 23 253 Specification element Specification element2 CTRL left mouse Figure 6 20 Regions window Inside the Regions window all parameters described in Region Edit Window on page 77 can be seen 80 SpecsLab2 Acquisition Window 6 4 Acquisition Window Within the Acquisition window the status of regions which have been validated can be changed to waiting for acquisition or vice versa Figure 6 21 Valid Regions Consecutive i Cyclic Ovenwite Acquisition Waiting for Acquisition Currently Acquiring Skart Suspend Abart Fesume If only a part of the whole acquisition task is to be changed please use the Acquisition window to manipulate the process arrows The acquisition sequence shown in the Acquisition window provides the estimated acquisition time and allows you to modify the measurement in progress Acquisition Mode allows you to choose the desired acquisition mode for the e Consecutive e Cyclic e Overwrite means
41. 1 Get Installed Version Number To check the installed version of SpecsLab2 please start SoecsLab2 and open the About SpecsLab dialog in the Help menu entry 1 12 Backup of Registry Settings Start the registry editor regedit select Start Run Open regedit Select the key HKEY_LOCAL_MACHINE Software Specs and save the current registry settings via the menu entry Registry Export Registry File see figure 1 21 on page 22 1 13 Close allrunning Specs Applications All open Specs applications must be closed first To make sure that SpecsLab2 and all related applications are definitely stopped you may want to reboot the system The Specs ObjectServer running in background must be stopped via the Task Manager Open the Task Manager Ctrl Alt Del find the ObjectServer exe task and apply End Process 1 14 Uninstalling SpecsLab2 Depending on the installed version of SpecsLab2 the deinstallation must be done differently To check the installed version of SpecsLab2 please start SpecsLab2 and open the About SpecsLab dialog in the Help menu entry 1 14 1 Uninstalling versions prior to software version 2 14 Click Start Settings Control Panel and start the Add Remove Programs application Select SpecsLab2 and start removing this software package 1 14 2 Uninstalling version 2 14 and higher Click Start Settings Control Panel and start the Add Remove Programs application Select SpecsLab2 and start removing this software p
42. 3 Background computation after Tougaard and Sigmund A physical model of the background is based upon the elastic and inelastic loss processes in the solid Tougaard and Sigmund showed that if is the measured flux of emitted electrons at energy Zfrom a homogenous solid the primary excitation spectrum A is given by co F E j E B Et h E dE C 2 E E Tougaard and Sigmund Background EQ 7 2 7 3 Fermi Edge The operation computes a fit of the fermi edge and can be use for energy scale calibration as well as for the estimation of the FWHM of the fermi edge for certain puposes Please refer to figure 7 5 Fermi Edge operation page 89 The figure shown there illustrates the handling of the Fermi Edge operation 1 5 Tougaard and I Sigmund Phys Rev B 25 4452 1982 88 SpecsLab2 Fermi Edge File Pd specstab Mi x 743 77 amp So aroun 1 ree o ogct X fromm 18 Eaa 21 3 4 si ezila Be P Speaifikation Phoibos 21 tj Name Date Scans Dwell Step Ebin Eexc Ekin MA2 7mm open 04 25 02 12 11 48 MA CAR7 mm open 04 25 02 12 12 59 i 40V range 05 08 03 15 06 00 i 400 range 05 08 03 15 24 49 i 1500Y range 05 08 03 15 31 28 i 3500Y range 05 08 03 15 35 58 R MA2 7mm open R MA CRR 7mm P Spezifikation Phoibos 2003028 05c 15 Fermi k 40V range Fermi Edge 21 2 R 400V range Fermi Edge 21 2 R 1500 range Ry 3500 range
43. 4dia 1 6x20 0 0033798 0 16422 0 22784 21 218 21 054 21 446 E Fermi WF 4 48 40eV 0 offset Fermi WF 4 48 40eV O offset 1500V range 06 26 02 09 43 50 3 4dia 1 6x20 0 0032961 0 17036 0 22847 21 218 21 048 21 447 1 1 RM 40V range R Fermi WF 4 48 40eV O offset 3500V range 06 26 02 09 45 43 4dia 1 6x20 0 0069926 0 20082 0 19077 21 218 21 017 21 409 Re O n S Wi n d OW O n a e 80 400V range R UPS MA2 6mm 06 26 02 09 48 31 26dia 1 6x20 0 02797 12186 1 7711 21 218 9 0322 22 989 cae PS MA CAR7 6mm 06 26 02 09 53 12 2 6dia 1 6x20 002797 12 074 1 9109 21 218 9 144 23 129 3500 range R MA2Emm Nj tl D t 1 5 MA CRR7 6mm SpecsLab2 Acq uisition Window on page 81 1 Region Edit Window on page 77 Group Region S B 177 11 78 kcps FWHM 0 8629 eV BR SHEY mrX GRAA Consecutive Cyclic Dverwite Intensity 10 Counts 4 Main Tool bar on page 49 Data View on page 50 Analysis Mode Medium rea FixedAnalyzerTransmission Epass I Ubias I Udet F we Ekin Epass Ekin Step Ekin End Values Scans Dwell Time 97 4732 0 0279586 364 616 23 1 0 1 Comment Default Values 300W 15KV 220nA Load T T T 2 Save 370 369 368 Previous Next New ieee Beau Clear Binding Energy eV Sc T i bo t BAA 1 Analyzer Toolbar on page 52 Status Bar on page 54 Illl la s 1 Channels on page 54 0e0a x m JE
44. 7 Tougaard 88 Print setup 99 Transmission 51 Pull Back 107 U Q Update 20 Quick Start 33 V R Validate 53 Ramp Time 107 VAMAS 43 Raw data 51 View 45 Recent files 42 Visible Data 45 RegEdit 21 Voltage Display 106 Region Edit 78 Region Operation 39 X Regions 38 Regions Window 80 oai s Registry 7 ae 43 Remote 67 aa Reset Serializer 41 Z Restore Autosave 42 Resume 54 Z Axis 51 Roadmap SpecsLab2 2 5 Save All 38 Savitzky Golay 94 Scaling 51 second network card 15 Server 63 Settings 4 Shirley Background 87 shortcuts 29 Smooth 94 Source Info 57 Source Method 63 SpecsLab1 43 Style 45 124 SpecsLab2 Chapter Navigation tn the SpecsLab2 window PA SpecsLab MAE Ele Edt View Analyzer Tools Operations Window Help Tels ieg ok X Gk lt 18 A 5 1lz2 3lalslslzlels DV Consecutive 3 i i wee OC O m X fromm AGS fox a a Se ae Date Method Lens Sit Mode Scans Dwell Step Ebin Eexc Ekin 1 1 DI Groupl 06 14 02 14 38 05 2 7420 2 open 1 0027959 371 94 364 62 1253 6 881 66 888 98 SR ME Peak FWHM 885 R Group Region 2 7x20 2open 0 027959 371 94 364 62 12536 881 66 888 98 B Region2 Fermi WF 4 48 40eV 0 offset 40V range 06 26 02 09 38 58 3 4dia 1 6x20 0 0033805 0 2182 0 18069 21 218 21 21 399 PASpezifikation Phoibos 20024036 04 100MCD5 Morgne Fermi WF 4 48 40eV O offset 400V range 06 26 02 09 42 04 3
45. 92 from the menu Data Operations in order to ensure that the software can identify these peaks Measure the regions Run the MCD Calibration Tool in the Tool menu Calculate the Ek shift Ep by pressing the Calculate button Check to see if the differences and the peak position are reasonable If the calculation failed check that the peak position can be calculated for all regions Mostly regions with low count rates low pass energies fail Move this region into another group and try again Drag and drop of the region via mouse in the Files window If you want to check which region is causing problems test that each single channel for the region is able to perform the calculation switch off noisy wrong channels of the region and check if the peak location with Tools Peak Location work if work also MCD calibration will work Pressing the Apply button will apply the calculated shifts to all chosen slit combinations The default values registry entries will be overwritten For more detailed information please contact SPECS support support specs de 98 SpecsLab2 Chapter Printing 9 1 Print setup The SpecsLab2 print setup is controlled by the standard windows printer setting Select Printers in the Settings menu of the windows Start button and save the desired printer configuration landscape portrait color for the used printer TER El a Edit V
46. AN Adapter PCI ISA on page 137 in 13 2 must be installed Hardware PHOIBOS 100 MCD 5 S N 031 5 Power supply HSA 3500 S N 27 Hardware Type 7 means EC10 Ethernet Detection electronics PCU 300 S N 43 adapter is used CAN Bus adapter EC10 S N 01 53 and delivered Figure 1 2 CAN Bus adapter type Test Report page Please ask the network administrator for an IP Address for the EC10 and for an IP Address for the PC if TCP IP not yet had been configured on the PC Configure your TCP IP protocol see section 1 6 on page 9 For a PCI CAN Bus card you need no additional IP Address Either your computer is already linked to a network and has an IP Address or ask your network administrator for an IP Address for the PC if TCP IP not yet had been configured on the PC and you want to install the data evaluation program SpecsLab1 too 1 5 Installing SpecsLab 2 x Make sure to be logged in as Administrator Insert the installation CD Autorun will start with a section menu If Autorun is not working please use the file manager and run CD_Explore exe Several installations exist on the CD provided You have to start the desired installation separately The actual description for the installation programs start in front of the selection menu and is located in software install read me txt on CD or will be shown if you select the Readme first item The SpecsLab2 installation will checks if your Windows platform requires the new W
47. Figure Figure Figure Figure Figure Figure Figure Figure Figure Figure Figure Figure Figure Figure Figure Figure Figure Figure 3 3 3 4 4 1 4 2 4 3 4 4 4 5 4 6 4 7 5 1 5 2 5 3 5 4 5 5 5 6 5 7 5 8 5 9 5 10 5 11 5 12 6 1 6 2 6 3 6 4 6 5 6 6 6 7 6 8 6 9 6 10 6 11 6 12 6 13 6 14 6 15 Quick Start Example Region Edit Data window File structure in the Files window File menu and Main Tool bar icons File structure with empty region and default names Export window File Settings SpecsLab2XY Data File Settings Autosave options Visible data Color and Style Toolbar and Context menu View Menu Title property sheet X Axis property sheet Y Axis property sheet Sizes property sheet Font colors property sheet Styles property sheet 3D display in the Data window Context Menu Group Context Menu Region Acquisition process diagram Analyzer Settings Analyzer Settings sub menu Region Edit window for a detector scan Data window with a detector scan Selection of Source Methods XRayDummy server dialog box XRaySource server dialog box Monochromator server Monochromator Analyzer Settings Depth Profile Remote Server dialog box Remote settings for PU IQE 12 38 or PS IQE 12 38 Acquisition Mode for the Depth Profile feature must be Cyclic 70 33 35 37 38 39 40 41 41 42 45 46 46 47 47 48 48 48 49 52 55 55 59 60 61 62 62 63 64 65 65 66 68 68 Type
48. HM on SpecsLab2 89 Data Operations 7 4 Linear Operations With this operation data can be manipulated to shift energy and or intensity as well as to scale with a factor gain for either axis Linear Operations Settings Energie Offset Energie Scaling Lountfrate Offset Count rate Scaling Figure 7 7 Linear Operations Settings lB 37 nn 4e 4250 5 Figure 7 8 Result of Linear Operations The operation is applied to the visible selected regions and within the visible x axis range in the Data window 7 5 Peak FWHM The Full Width at Half Maximum determination is done by using a smoothing spline calculation The leftward and rightward points for fitting the background line need not be specified by the user The operation computes a Full Width at Half Maximum for the data in the active visible regions of the data window The FWHM Settings window can be opened in the Operations Settings submenu figure 7 1 0n page 83 This window is used to define the background method the use of the asymmetric factor and the FWHM Annotation for the FWHM operation The background methods are given in a drop down listbox The most recent background method for the active and visible regions can be selected A defined background 90 SpecsLab2 Peak FWHM Background on page 86 is computed by SpecsLab2 and need not specified by the user This computation makes sense on
49. HSA3500 Juggler To start the HSA3500 Juggler SpecsLab2 must not be running Start the HSA3500 Juggler just as any other windows application To start do one of the following e Choose Start gt Programs gt Specs gt HSA3500 Juggler e Double click on the HSA3500 Juggler icon on the desktop Quick Start 1 Switch on all required power supplies for the excitation sources and the HSA3500 power supply as well as the detector power supplies if available e g for Spin detector 2 Set the desired excitation condition on the sources 3 Start the HSA3500 Juggler hi i j On c Steno standig CO tt J oy C Analyzer Detector z lore Seinge M fem line H Star daame Hz Figure 10 1 HSA3500 Juggler start up 4 Activate the left tab by clicking on the Analyzer tab Click on the Connect button and select a HSA3500 power supply from the pull down list e g Phoibos Hsa3500 5 Activate the right tab by clicking on the Detector tab Click on the Connect button and select a detector from the pull down list e g Pcu300 Spin 6 Check one or more boxes of the voltages that should be modified Type in a target voltage in the Target fields of those voltages Click on the Start 102 SpecsLab2 Introduction button The voltages will be ramped up to the desired value within the time given in the Ramp Time field FA 1503500 Juggler Feuer Gp nd fe On In IC Sandbr Powest Stonsby
50. P address local network address space Figure 1 14 Registry entry for Ethernet ETH CAN Bus SpecsLab2 EtherCAN with EC10 1 7 3 Setup with second network card 1 7 3 1 Cabling the EC10 with a second network card The figure 1 15 shows the cabling of the EC10 with a second network card CAN PC cross over cable CAN 1 EtherNet card 2 EtherNet card Figure 1 15 Connecting of the EC10 directly to the PC Please note The network card and the EC10 have to be connected using the special network crossover cable which is included in delivery of the Specs components As in case of the standard installation make sure that the LNK LED of the EC10 and of the network card flash when the EC10 is powered on This will indicate that the cabling IS correct 1 7 3 2 Installing a second network card in the PC The following installation instructions apply for the adapter delivered by SPECS If another kind of network card shall be used read the respective installation instructions Shut down the PC and disconnect it from the line voltage Open the PC find a free PCI Bus slot and insert the card from the box Advanced Network Adapter Close the PC reconnect it to the line voltage and boot Insert the CD that came along with the card into the CD ROM drive It may be possible that the Internet Browser is launched after the CD is inserted It will show some information about the network c
51. The default SpecsLab format is set to xml SpecsLab2XMLDataFile 4 2 4 Print Print Preview This file menu works the same as for all standard windows applications Print pops up the default printer box whereas the desired printer and its parameters can be choosen depending on your computer configuration The Print Preview item allows to check the print layout in front of your printing See also Printing on page 99 4 2 5 Export The Export function allows you to save the data in non SpecsLab2 format The possible formats are shown in the export window using the pull down selection box for the export type Export EE Swen amn ae TJ Cache File name fle structure vms Save as type vamas Data File ym Cancel SpecsLab xr Data File x Figure 4 4 Export window 40 SpecsLab2 Menu File Region Operation Please refer to Data Structure on page 42 4 2 6 Settings The menu allows to set the SpecsLab2XY format convention as well as Autosave options and allows to perform a reset of the Serializer operation Edt View Analyzer Tools Operations Window Help New File Cirle mn New Group Ctrl G z af New Region Ctrl F Open Ctrl O0 Diose DEI Save ries Save ee Birke Export Save All Settings SpecsLab2 sr Data File Restore Sutosare Reset Seralizers Print Ctrl F Autosawe Print Preview Figure 4 5 File Settings 4 2 6 1 SpecsL
52. ab2 Comments 2 4 Comments SpecsLab2 is developed to run under Windows operating system and therefore the most common window functions context menu Tool bar handling shortcuts print windows which you know from other programs are available SpecsLab2 provides the following types of command shortcuts e Keyboard shortcuts e The context shortcut menu whose commands depend on the location of the pointer e The Tool bars which contains commonly used commands for the different SpecsLab2 windows The context shortcut menu contains commonly used commands for the item under the pointer You can display context menus when the pointer is in the window To display a context menu Right click With the item Toolbars of the View menu you can select the visible Tool bars for each SpecsLab2 sub window EREE Fie Edit BUGIS Analyzer Tools Operations Window Help 2 e 2 Sr v Data View 2 Co Binding Energy ee ma Counts per second anay Channels Group Name Ger Oa v Styles AMEI v Status Bar Group Region Z Axis Grid Cross Cursor v Autoscale Preserve Zero Rescale Diagram Settings 3 You can keep the Toolbars open in the work area and click commands as you need them as well as being able to move the Toolbars to the place of your choice on screen The Keyboard shortcuts to activate menu items are shown in the menu pop up For example CTRL O to o
53. ab2XY Data File Settings GpecsLab XY Data File Settings Comment Prefix H Counts Per Second r Separate Scan Data E Separate Channel Data M Apply Cancel Figure 4 6 SpecsLab2XY Data File Settings This options allows to modify the structure separate scan and channel output yes or no and syntax prefix for the export of the intensity and energy data to a x y ASCII file using the export function Export on page 40 Note that the options influence the value for the intensity 4 2 6 2 Reset Serializers This item resets the Serializer program Load Save Export If the process of write or read is terminated the Serializer program will be canceled and then restarted SpecsLab2 41 File and View Menu Region Operations The Serializer is a stand alone executable which converts the complex SpecsLab2 data for the file operations Load Save and Export If any trouble with file handling arises please use this function to get a fresh Serializer status 4 2 6 3 Autosave The Autosave option allows to set how often the autosave function will occur Autosave Enable Autosave after each scan Minimum Interval s0 get cancel Figure 4 7 Autosave options Autosave will be performed if the Minimum time Interval has been reached 4 2 7 Restore Autosave This function allows you to restore the last saved data structure i e all files including groups and regions that were open when Spec
54. ace OK Cancel Browse A Start 2 Adobe Acrobat S SpecsLab2 SL2 Nel Locate the HKEY_LOCAL_MACHINE SOFTWARE Specs tree Help Data value not set CorbaServers DeviceNetServer Hsa35004nalyzer 9 Phoibos Hsa3500 Phoibos Hsa3500 5S pin Hsa35004nalyzer_2 20 Hsa3500Ced4nalyzer Peu300Detector_2 20 J Pcu300 J Pcu300 Spin SpecsLab2 9 2 14 0000 2 18 0000 C Pointinterface MLS erializer CI Transformations Check your existing analyzer type Select the folder Phoibos Hsa3500 inside the SPECS folder of the registry and note the strings Model and Workfunction e g 150R5c and 4 5 This values should be the same after the update if not replace the new values Export File Export the registry folder of your analyzer model which is located inside this Phoibos Hsa3500 registry folder into a file e g 150 R6 regold yymmdd backup See figure 1 21 Export analyzer adjustments page 22 This file include all calibration shifts and transmission settings which may be modified during a MCD calibration or other adjustments If you did not perform any MCD calibration by yourself before you can skip this procedure SpecsLab2 21 Installation gi Registry Editor ati Edit View Help Import Registry File Export Registry File Connect Network Registry Disconnect Network Hedistty Print Exit 9 CCDDetector H A CorbaS
55. ackage Use Remove in the Install Shield Wizard to remove the SpecsLab2 program 24 SpecsLab2 Uninstalling SpecsLab2 1 14 3 Uninstalling by hand If you need to remove SpecsLab2 completely by hand may be in case of corrupted registry entries caused by operating system errors use the following instructions gt STEP 1 gt STEP 2 gt STEP 3 gt STEP 4 gt STEP 5 Open TaskManager Ctrl Alt Del find the ObjectServer exe task and kill it Start RegEdit application e g by Run via Start menu locate the HKEY_LOCAL_MACHINE SOFTWARE Specs tree delete it you can also do an export for backup purposes first Locate the SpecsLab2 installation directory e g C Program Files Specs delete the directory and all subdirectories if you can t delete retry after the next reboot but do the following steps first Open a Windows Explorer e g by right mouse click on Start menu locate all lt windows installation directory gt Profiles lt user gt StartMenu Programs Startup e g C WINNT Profiles All Users Start Menu Programs Startup and delete the ObjectServer link Delete the lt windows installation directory gt Profiles lt user gt StartMenu Programs Specs e g C WINNT Profiles All Users Start Menu Programs Specs directory also SpecsLab2 25 Installation 26 SpecsLab2 Chapter Introduction 2 1 Overview SpecsLab2 is an interactive program designed to su
56. and end value of the scan parameter are marked in the field heading as Start Step and End additionally to the scan parameter name Region Edit Bil Ea Name Group Analyzer Acquisition Date Method Entrance and Exit Slit Lens Mode Analysis Mode XPS 27x20 2 open MediumAres Fiked nalpzerTransmission Eexc Ekin Start Epas l Ubias T Udet Tw Ekin Epass Ekin Step Ekin End Values Scans Dwell Time Comment Default Values Load E Save Eear Aquine Previous Next New Validate Figure 6 19 Region Edit window Note Depending on the selected Analysis Mode the field headings can be modified The following fields contain energy values or voltages The unit for the values is eV or Volts respectively Eexc If the source Analyzer Settings on page 60 gives information about the excitation energy this value will be stored with region data Ekin Start End the desired energy values Epass Pass energy Ubias The so called Bias Voltage for ions or electrons between ground plate and detector entrance is set default figure 6 3 on page 61 Enable the field with the check box above The entry allows to modify the value for this region only Udet Check the recommended detector voltage Ud see specification report of your analyzer and analyzer manual SpecsLab2 79 Basic Concepts of Operation Wf Work Function see section 6 1 1 on page 60 and the analyzer manual Enable the field wit
57. ange from 20 to 20 V The focus voltage is simply added to all other voltages making up the lens voltage Ulens5 Ekin 8 Epass Work Function Suction Voltage Focus Voltage The definition of Lens5 should be made in the first lens mode such that it is inherited to all other modes if inheritance is used LogicalVoltageList LogicalVoltages list of all logical voltages LogicalVoltage Kinetic Energy LogicalVoltage Pass Energy LogicalVoltage Detector Voltage LogicalVoltage Conversion Voltage LogicalVoltage Screen Voltage LogicalVoltage Suction Voltage LogicalVoltage Work Function LogicalVoltage Focus Voltage LogicalVoltageDef Focus Voltage ShortName FV Unit V AdjustOnly false AnalyzerOnly true MinValue 20 0 MaxValue 20 0 PolarityFlip true DacVoltage Lens5 Dacid 5 0 OperationMode 0 110 SpecsLab2 Adjusting lens voltages in customised hardware StandbyValue 0 0 Formula Sum x0 Argument x0 Factor 1 0 electron polarity LogicalVoltage Kinetic Energy Argument x1 Factor 8 0 electron polarity LogicalVoltage Pass Energy Argument x2 Factor 1 0 electron polarity LogicalVoltage Work Function Argument x3 Factor 1 0 electron polarity LogicalVoltage Suction Voltage Argument x4 Factor 1 0 electron polarity LogicalVoltage Focus Voltage SpecsLab2 111 HSA 3500 Juggler
58. ard The information is of no further interest and the window can be closed If running Windows 2000 the operating system will announce that it has found newly installed hardware and will ask for a driver CD Install the driver from the CD Under Windows NT 2000 XP go to Start gt Settings gt Control Panel gt Network Click on Adapters and then on Add Click on Have Disk One will be asked to enter the path to the driver If the CD ROM drive had the drive letter R the path to enter would be R drivers kf 310 winnt40 SpecsLab2 15 Installation 1 7 3 3 Configuring the EC10 with a second network card The rest of the configuration is the same as in the standard case and is described in Running Configuration Tool on page 13 Hetwork ix Identification Services Protocols Adapters Bindings Network Adapters BY 1 3Com EtherLink 10 100 PCI NIC 3C905C T l 2 Realtek ATLE1 39 4 6 061 30 F Fast Ethernet Ad Add Remove Properties Update Item Motes Realtek ATL139 4 B7 C78130 PC Fast Ethernet Adapter a Figure 1 16 Network menu Now click on OK to install the driver Choose duplex mode see figure 1 17 on page 16 and press OK Duplex mode Es ATLE139 Duplex Mode Uk Choose the proper Duplex Mode from the list Cancel Fle Figure 1 17 Duplex mode menu 16 SpecsLab2 EtherCAN with EC10 Assign an IP Address for the new ca
59. ble for some SpecsLab2 users e VAMAS Data File vms conforms to the ISO Surface Chemical Analysis Data Transfer Format ISO 14976 see section 4 3 1 VAMAS on page 43 e SpecsLab2 XY Data File xy export the data in x y ASCII files see section 4 3 2 SpecsLab2XY on page 43 e SpecsLab1 Data Files exp use the SpecsLab 1 data file format see SpecsLab1 manual 4 3 1 VAMAS The VAMAS format allows data from any system to be read by any compatible software to allow Quantitative Surface analysis The VAMAS format is very general in order to accommodate elemental maps depth profiles and data sequences arising from the compatible methods AES EDX FABMS ISS SIMS SNMS UPS XPS XRF In 1988 the Surface Chemical Analysis Standard Data Transfer Format was developed by various users and manufacturers in the VAMAS community For the VAMAS format convention VAMAS Surface Chemical Analysis Standard Data Transfer Format 1988 May 4 please refer to VAMAS http www vamas org 4 3 2 SpecsLab2XY Choosing the SpecsLab2XY format export will convert the data to x y type for further processing Please note the possible settings in the File Settings menu Settings on page 41 X Y format structure Group Group Region MA9 Anylsis Method XPS Analyzer PHOIBOS HSA3500 150 R5 MCD 9 Analyzer Lens MediumArea Analyzer Slit 2 7x20 2 open SpecsLab2 43 File and View Menu Region Operati
60. bugLevel field at the top of the dialog Warning Notice Info All and check the corresponding check box below the selection combo boxes of this block then press update 11 2 Example 1 Start SpecsLab2 or Hsa3500Juggler or CCDAcquire 2 Start the system log view program e g DbgView 3 Start SpecsSpy 4 Check if the first block URL ObjectServer displays some version information about the ObjectServer If not there is a problem It could be that the ObjectServer is not running on this computer or the object key is wrong 5 Go to the second block just below the ObjectServer block 6 Select Analyzer SpecsLab2 or Analyzer Juggler in the first combo box 7 Select Phoibos HSA3500 or CCD Phoibos HSA3500 in the second combo box Now one must see some version information about the analyzer displayed on the right side If not there is a problem could be that the incorrect analyzer model has been selected or the SpecsLab2 application has not been started 8 Check the Debug check box below the combo boxes used before 9 Check the Notice selection box at the top of the SpecsSpy dialog 10 Press the Update button below the combo boxes used before 11 Perform some action from your SpecsLab2 application 114 SpecsLab2 Example 12 One should see internal information about voltage calculation in the system log view program One can copy this information by cut amp paste 13 Don t forget to reset t
61. by several operations Background Smooth All measured data points will be saved each channel each scan for each x Axis value if used the standard SpecsLab2 data format xml bin Using the Export function or any other possible data format xy format SpecsLab 1 format can result in a loss of data scans will be saved as sum or some other experiment informations source analyzer 6 1 Analyzer Settings Analyzer Settings PHOIBOS HS43500 MCCS Settings Detector Jal Settings Method IX PS Server none Mame Selten Remote Server none Mame Settings Figure 6 2 Analyzer Settings Open the Settings window in the Analyzer menu allow to modify the used analyzer source or other remote device 6 1 1 Analyzer Server Standard environments usually define one analyzer server i e PHOIBOS HSA3500 MCD9 means analyzer type analyzer power supply type analyzer detector type 60 SpecsLab2 Analyzer Settings Open the Settings window for the Analyzer press Settings button allow to set special analyzer parameter for example the detector voltage The single rows are named and have standard settings Do not change any value without the knowledge of its meaning Analyzer Settings EI PS Voltage Range MW Range 1500 UPS Voltage Range w Range 40 AES Voltage Range v Range S500 ISS Voltage Range W Range 3500 W Default Bias Vo
62. choose Remove to remove the program first otherwise the SpecsLab2 installation will start InstallShield Wizard Welcome Modify repair or remove the program Welcome to the SpecsLab2 Setup Maintenance program This program lets you modify the current installation Click one of the options below C Modify A Select new program features to add or select currently installed features to remove stall Shield Wizard 22 SpecsLab2 SpecsLab2 Update Instructions gt STEP 11 gt STEP 12 gt STEP 13 gt STEP 14 Figure 1 23 gt STEP 15 gt STEP 16 gt STEP 17 gt STEP 18 Select Remove or uninstall as described in section 1 14 on page 24 It may be useful to reboot the computer after uninstalling Run the Upgrade CD again Autorun or open CD_Explore exe and start the SpecsLab2 installation Select the already installed CAN type of your analyzer EtherCAN with EC10 see 1 7 PCI CAN Bus card see 13 2 2 ISA CAN Bus card see 13 2 3 InstallShield Wizard E x Setup Type zZ E Choose the setup type that best suits your needs ke Click the type of Setup you prefer Description installation for a Ec10 CAN Ethernet adapter InstallShield lt Back Cancel The actual layout may differ Please select your communication and power supply type standard ETH HSA3500 CAN installation type Mostly it is faster easier and first of all alway
63. ck If the Ramp Time box is checked the actual voltage is swept towards the target voltage within the time given in the Ramp Time field This allows to set critical voltages slowly and safely During such a sweep all voltages in the HSA3500 that depend on the logical voltage that is swept will be changed as well according to the analytical definitions given in the configuration file An example would be a ramp time for the kinetic energy while the kinetic energy in the analyzer is swept all lens voltages are adjusted according to the definitions in the configuration file Thus a slow ramp in kinetic energy mimics a fixed analyzer transmission FAT mode spectrum scan with the analyzer This can be helpful in some cases While the voltages are being set the Start button changes into a Stop button When the Stop button is pressed the voltages will be fixed to their current values or will be slightly reduced depending on the setting of the Pull Back value If the Pull Back check box is unchecked the voltages will simply be fixed on their current values The target value will not be reached and the target and actual value will differ from each other The voltage setting procedure can be resumed by pressing Start again If the Pull Back check box is checked the voltages will be reduced by the given percentage of the start value minus the actual value Example Say a voltage has been on 100V and a ramp has been started with a
64. ck arrow shows that the regions are validated Acquire button is released e A black solid arrow indicate that the regions are validated and waiting for measurement Within the Acquisition window the currently performed and the waiting regions could be checked and changed e A red solid arrow indicate that the measurement is in progress Abort and Suspend button is released e No extra sign at the region label indicates a measured region Acquisition Mode allows you to choose the desired acquisition mode e Consecutive means that all selected regions will be measured consecutively i e all scans within the region will be Consecutive finished before starting the next region in the Waiting for Acquisition list Acquisition window e Cyclic means that after a scan the next region in the Waiting for Acquisition list will be active for acquisition If all waiting regions are measured once the next scan will start This procedure will stop for each region if the desired scan value is reached and all regions are measured e Overwrite means that all selected regions will be measured continuously i e first region one scan next region one scan up to the end After this the measurement starts again beginning with the first selected region and the data will be overwritten This measurement does not SpecsLab2 53 Viewing the Data X ll I gt stop automatically and will continue until the user intervene
65. d while ion sputtering 69 Table 4 Etch time definition strings 71 SpecsLab2 117 118 SpecsLab2 Chapter LF List of Figures About SpecsLab2 2 Figure 1 1 Road map for SpecsLab2 installation 2 Figure 1 2 CAN Bus adapter type Test Report page 4 Figure 1 3 Installation CD menu CD_Explore exe 5 Figure 1 4 Subtrees of the Windows NT 2000 XP registry 7 Figure 1 5 Regedit exe window 7 Figure 1 6 Permission for Specs 8 Figure 1 7 Inheritable permission confirm with Copy 9 Figure 1 8 Select Network Protocol menu 9 Figure 1 9 Network menu 10 Figure 1 10 Standard connection of the EC10 via HUB switch 12 Figure 1 11 Connection of EC10 without network stand alone 12 Figure 1 12 EC10 configuration tool running 13 Figure 1 13 EC10 configuration tool successful 14 Figure 1 14 Registry entry for Ethernet ETH CAN Bus 14 Figure 1 15 Connecting of the EC10 directly to the PC 15 Figure 1 16 Network menu 16 Figure 1 17 Duplex mode menu 16 Figure 1 18 TCP IP Properties menu 18 Figure 1 19 MS Loopback adaptor for SpecsLab1 19 Figure 1 20 Task Manager 20 Figure 1 21 Export analyzer adjustments 22 Figure 1 22 Install Shield Wizard 22 Figure 1 23 CAN installation type 23 Figure 2 1 Architecture and Functionality of SpecsLab 28 Figure 2 2 SpecsLab window 30 SpecsLab2 119 List of Figures Figure Figure Figure Figure Figure Figure Figure Figure Figure Figure Figure Figure Figure Figure Figure Figure Figure Figure
66. dard Windows print algorithm Print Print Preview on page 40 Edit opens or activates the Region Edit window Rename allows you to rename the selected region or group Clear removes all measured data of the selected region group or file after a separate confirmation but the structure and parameters are still available The cleared regions behave like new Delete remove all data of the selected region group or file after a separate confirmation Copy Plot helps to bring the Data window display to common Windows programs using the Windows clipboard Copy allows to copy regions as well as groups or files to the clipboard Paste inserts the stored data from the clipboard to the insertion point in the Regions or Files window 5 3 2 Data View gt 3 T B p BIA A A m ol This tool bar contains commands to set the layout and parameter of the Data window like channel display or zoom steps forward and backward Check the Tool tips if you place the mouse pointer to the icon 50 SpecsLab2 Toolbars 7 y oF O Tr By cps Data displays the energy corrected sum of all channels in one curve in the Data window Channels displays each energy corrected curve of the channels in the Data window Raw data displays each data point of the selected channels at the measured x y position in the Data window Scaling will use the Source server parameter in the menu Analyzer Settings to calculate
67. de the Data window Data Window on page 35 where the acquisition data will be displayed the Regions window shows the complete region list Regions Window on page 80 Inside the Region Edit window parameters of a single or multiple regions can be set Region Edit Window on page 77 30 SpecsLab2 Comments The complete actual structure of the loaded and created data files is shown in the Files window Files Window on page 37 This window is used to select a region groups or complete files for further manipulation Within the Acquisition window the status of regions which have been validated can be changed to waiting for acquisition or vice versa Acquisition Window on page 81 In the Window menu you can select the visible SpecsLab2 windows described above Before the program is terminated the current window layout will be saved SpecsLab2 31 Introduction 32 SpecsLab2 Chapter Quick Start 3 1 Getting Started e Switch on all required power supplies for your sources and the analyzer supply e Set the desired excitation conditions e Start SpecsLab2 and open the item Settings in the menu Analyzer and select the installed analyzer type e Open the windows in the Windows menu e Files e Regions e Regions Edit e New Data Window e Do one of the following press the New Region icon R or choose the item New Region in the File menu or press CTRL R thi
68. e analyzer select the Delay Server from the Remote server list and open the settings menu This setting dialog is shown in figure 6 18 Now one can adjust the scans_per_cycle_value and the delay time Each time scans_per_cycle is reached the delay time is being waited This results in customizable breaks between two scans_per_cycle 76 SpecsLab2 Region Edit Window For each measured region a timestamp before acquiring the region and _after_ sleeping in seconds relative to the acquisition start is generated and can be outputted with the XY Serializer or the VAMAS Serializer It works both for consecutive and cyclic mode Refer to section 5 3 3 on page 52 for the defintion of cyclic and consecutive Figure 6 18 Settings menu of the Delay Server Remote Settings Eg Eu Scans per cycle i Delay time after each cycle s Moo Cancel ve Due to hardware timing issues the timestamps are accurate in the region of 1 to 10 seconds 6 2 Region Edit Window The Region Edit window activated open in the menu Window allows the definition of measurement parameter region for data acquisition and allows one to validate start the acquisition Before starting a measurement it is necessary to set the scan boundaries to set analyzer parameters to obtain the desired resolution and to choose Step width Scan number and Dwell time as well All these parameters are shown in one line in the Regions window na
69. e selected channels in the Data window displays each energy corrected curve of the channels in the Data window display the raw data points of the channels scales each data point with source intensity applies the analyzer transmission function Background subtract a calculated background Style defines the style of the data points Color defines the color of the data points Validate allows you to validate the region data Acquire start the measurement of the selected region section 5 3 3 on page 52 Edit opens the Region Edit window to edit this region Rename allows to rename the region Clear clears the data of this region Delete removes the region Copy moves all region data to the clipboard Paste either overwrites or inserts a new region with the clipboard data MCD Info shows the shift and gain information for each channel in this region 1 3 4 z G Fi E g 0 103274 0 076159 0 049166 0 023651 0 002722 0 023245 0 054436 0 073953 0 103843 _ t _ et SpecsLab2 Context Menu of the Files Regions Windows e Source Info displays the source information from when the region was measured AayDummy Anode Power 44 Voltage kv Angle deg e Compact SpecsLab Compacting region data is an irreversible operation All separate scan and channel information will be lost No more data can be acquired for the regions SpecsLab2
70. e usually wants m 4 or larger 1 A Savitzky and M J E Golay Smoothing and differentiation of data by simplified least square procedures Anal Chem 36 8 1627 1639 1964 SpecsLab2 95 Data Operations F Data 1 a e Figure 7 15 olx Data points ____ Derivation Order 0 Smooth Derivation Order 1 _ __ Derivation Order 2 Energy Savitzky Golay Smooth and Derivation 96 SpecsLab2 Chapter Tools 8 1 MCD Calibration SpecsLab2 software supports a calibration procedure called MCD Calibration in the Tools menu The procedure should be used for the calibration of a single channel detection analyzer too Because of the energy shift between the single channels for a given kinetic energy and the dependence of the transmitted energy range of the entrance angle a 2 lt u O 1 oe Energy shift EQ 8 1 pass AE S 0 entrance slit S4 exit plane Sp mean radius Ro where S S 5 2 the detector shifts are different for each lens slit combination The present values defined by SPECS in the acquisition software will be applied automatically and give a good approximation Nevertheless for the most combinations the lens slit combinations that are predominantly used should be calibrated by the customer again to prevent a loss in the analyzer performance You can easily check if the values are correct if you display the single channels and
71. egion was started Method Click the arrow and choose the desired analysis method from the menu The choice of the method for the region determines the use of the corresponding source and the scan range of the power supply that will be used Entrance and Exit Slit Click the arrow and choose the desired slit from the menu The slit information influences the measurement concerning the energy shift for the single channels MCD Calibration on page 97 and will be stored with region data When changing the slit a confirmation dialog pops up For detailed information about the slit combinations please check the analyzer manual Lens Mode Click the arrow and choose the desired lens mode from the menu The Lens information influences the measurement because of different voltage settings for the analyzer lens stages Together with the analyzer type information software installation will set ask for the used analyzer type the power supply configuration file Hsa3500Config dat for the desired lens configuration will be selected for detailed description of the lens modes please check the analyzer manual Analysis Mode Click the arrow and choose the desired analysis mode from the menu For example for a PHOIBOS analyzer the following modes are available e Constant Initial State This mode is used on a synchrotron radiation light source with a monochromator see section 5 1 2 The monochromator is scanned between Eexc start and Eexc end w
72. er set T elect the parameter set stored in the PU IQ the recalled parameter set 0 to 5 kV lonGun emission current Set the PU IQE emission current in addition to the recalled parameter set 0 to 10 mA or set the emission current for the PS IQE 12 38 lonGun etch time Set the sputter time regarding the etch time EEE etintion string convention setae Scans per cycle Set the scans per cycle i e scans per every of the regions defined in the Region Editor see section 6 2 Each acquired region needs to festure the same number of scans To set an arrow in the dialog box Switch excitation source state activates an opportunity to define the condition of the x ray source while ion bombardment is proceeded The following three states for a x ray source power supply e g XRC 1000 or XR 20 are available during the ion bombardments Table 3 x ray source Remote Settings scheduled while ion sputtering O HV off Emission Off Water On Standby HV on Emission Off Water On Operate FV on Emission On Water On Restrictions for the Depth Profile Feature The Depth Profile Feature generally works only with the following restrictions e To measure a depth profile with more than one region the analyzer mode needs to be Cyclic see figure 6 13 and section 6 4 e Each region definied in Region Editor should have the same scan number e For that reason the measurement time can be only controlled due the dwell time
73. eration 59 6 1 Analyzer Settings sn ee ka 60 6 1 1 Analyzer Server esusesssensnenenenenenenenenenenennnenennnn 60 6 1 1 1 Detector Scans ee ee 62 6 1 2 Source Method Server ec cece cece ccc eee eee nennen nenn 63 6 1 2 1 ARaVDUMM Y SETVE sites 64 6 1 2 2 KRAYSOUTCE SEVO Tineidae Yas teense E a 64 6 1 2 3 monoXRaySource Server asssssssssssssarnnsserrnrerarnrerernnenes 65 6 1 2 4 Beam line Monochromator Server ccccee cece eeeeeeeeeeeees 65 6 1 2 5 Change Server Options and Error Handling 66 6 1 3 Remote CoN Oleineae iaa aeea aa eeee es 67 6 1 3 1 Deptn Prolller us er 67 6 1 3 2 AMC Monochromalor ara seen 74 6 1 3 3 Delay Se Ver et serie 76 6 2 Regiom Edit WiINnGOWessec ae 77 SpecsLab2 3 6 2 1 Region Edit window fields cece cece cece eee eee 78 6 3 REG10n5 WINOOW 2 2 80 6 4 ACQUISITION WING OW wann 8 1 7 Data Operations 83 7 1 Syntax for the Operation Parameters 84 7 2 BACcKgrO UN G siscncntoisaeinadeilad siaewd EENT 86 7 2 1 Mathematical Details of Background Calculation 87 7 2 1 1 Linear Background css 87 7 2 1 2 Shirley Background une 87 7 2 1 3 Background computation after Tougaard and Sigmund 88 7 3 Fermi EGOG ets ee ne ee pe 88 7 4 LIWeal OBReTr alone 90 ID Peak FWA M sn Eee nase 90 7 6 Peak LOCATION aan einen ie 92 7 6 1 Mathematical Details for Peak Location 93 7 7 SavitzKy GoOlay SMOOTH ac a St
74. ergy and the minimum step size increment for changing the energy Wavelength set timeout time in milliseconds that SpecsLab2 will wait for a feedback of the monochromator after having sent a command After the time out an error message will appear A typical value is 10 000 ms Wavelength set delay time in milliseconds that SpecsLab2 waits after the monochromator has reached the target wavelength This is evident for older monochromator models A typical value is 100 ms Default excitation energy This energy is used as a default value if a new region is created In addition this field enables the user to set directly the monochromator to a desired energy If a value is entered in this field and Apply or OK is pressed the monochromator will drive to this energy This source information will be stored together with the region parameter in the SpecsLab2 data file Analyzer Settings Ed Analyzer Name PHOIBOS HSA43500 150 R5c Hi Typ Settings Detector fall sto settings Sources Kdethod XPS Sener AMC Monachromator Mame AMC Monochromator Settings Remote Serer AMC Remote Mame Amc Remote Settings Figure 6 10 Monochromator Analyzer Settings 6 1 2 5 Change Server Options and Error Handling For switching between different remote controlled servers it is required to select in a first step none followed by the next step to choose the designated new server For e
75. ervers E DeviceNetServer 2 9 Hsa35004nalyzer H 100 R3 SPIN 100R4 100 R4MOD 100 R5 100 R5a ai 100 A523 100 R5b 100R5c a 100 R5INA H E 150 R4 H E 150 R5 9 150 R5 G45 150 R5a 150 A533 a Slitin a Slitin H A Slitin a Slitin a Slit in HD Slitin 9 SCD SpecsLab2 H Q XMLSerializer 9 Specs old Exports all or part of the registry to a text file Phoibos Hsa3500 E ScanModes Phoibos Hsa3500 Spin Hsa35004nalyzer_2 20 Hsa3500Ced4nalyzer Pcu300Detector_2 20 Data ab Default value not set ab Detectoryoltage 2100 Re EnableHiddenMod 000000000 0 Rs MaxCountRate 0x005b8d80 6000000 Example for analyzer model 150R5c and include MCD calibration Transmission values which perhaps modified during calibration procedures after installation 3 4 5 6 7 8 Figure 1 21 gt STEP 8 gt STEP 9 gt STEP 10 Figure 1 22 In Export analyzer adjustments Export the complete SPECS registry folder into a file for example to SPECS regold ddmmyy backup This file include all old registry entries and maybe helpful for diagnostic purpose see figure 1 21 on page 22 select SPECS tree instead Insert the installation update CD and select SpecsLab2 installation See Uninstalling SpecsLab2 on page 24 in 1 14 If the SpecsLab2 was installed with the Windows Installer you have to
76. evie 94 7 7 1 Deriva tO Waist canec eats este 95 8 Tools 97 8 1 MCD Calibration ss enge 97 9 Printing 99 9 1 PEATSE TUD SS ee ea ee 99 9 2 PRINT PREVIEW sure een 99 10 HSA 3500 Juggler 101 10 1 INtroaucetion znssseatesanessilasg 101 10 1 1 OMELVIEW ss bernd eg 101 10 1 2 Getting Started wenn 101 10 1 2 1 Installing the HSA3500 Juggler nesese 101 10 1 2 2 Starting the HSA3500 Juggler cccceeeeeee eee seen eee ees 102 10 2 Program Description ans ead ede eens 104 10 2 1 General ser see 104 SpecsLab2 4 11 12 13 14 10 2 2 Starting the Program cccc cece cece ee ee ness 10 2 3 Analyzer Controls ass 10 2 4 Voltage Display aka a ortsa 10 2 5 Ramp Time and Pull Back 005 10 2 6 Detector Controls ensani ena 10 2 6 1 Into WIM GOW asien 10 2 6 2 Display Mode nee 10 2 6 3 OHseb and Scale cite 10 2 6 4 Display Style and Speed cescenssenseeneenennn 10 2 7 Advanced Functions 222e sennnannennennnnn 10 2 8 Quitting the HSA3500 Juggler 10 3 Adjusting lens voltages in customised hardware SpecsSpy Vial USErIntertsce innere 11 2 ECV ONC oltre coc os ree eet ee S List of Figures Index Navigation in the SpecsLab2 window 110 113 114 114 119 123 125 SpecsLab2 SpecsLab2 Chapter Installation Specs Data Acquisition and Processing Software consists of several components that have to be installed sepa
77. exe 26 00 0 00 01 276K ddhelp exe 188 00 0 00 00 28 K exceed exe 209 00 0 00 11 744K Explorer exe 161 00 0 03 27 4524 K FrameMaker SGML 329 00 0 00 28 46392 K inetd32 exe 50 00 0 00 00 28K loadwe exe 312 00 0 00 00 24K lsass exe 44 D0 0 00 00 740K mgactrl exe 98 O00 0 00 00 24K MGAQDESK EXE 185 00 0 00 00 24K 79 0 00 00 OK 130 00 0 00 00 632 K 305 00 0 00 00 40K 178 00 0 04 10 18960 K 123 00 0 00 02 508 K 159 00 0 00 00 2124K 194 00 0 07 05 12228 K pstores exe 127 00 0 00 00 OK qttask exe 276 00 0 00 00 OK RpcSs exe 96 00 0 00 00 572K x End Process Processes 34 CPU Usage 0 Figure 1 20 Task Manager gt STEP 3 Copy the Program Files SpecsLab2 folder onto your hard disk to a SpecsLab2 original folder 20 SpecsLab2 SpecsLab2 Update Instructions gt STEP 4 gt STEP 5 g Registry Editor Registry Edit View 7 amp a a a PA a gt STEP 6 gt STEP 7 C CCDDetector Specs old Specs older My Computer HKEY_LOCAL_MACHINE SOFTWARE Specs Start RegEdit application e g by Run via Start menu and see see section 1 5 4 The Windows NT 2000 XP Registry on page 7 AE Run Type the name of a program folder or document and Windows will open it for you Open IV Bun in Separate Memory Sp
78. finition strings 1 0 2 45 First depth cycle without sputtering Second ptn cycle without sputtering Secono depth aie and all following with 45s etch time 1 10 2 25 10 40 1 10 2 25 10 40 First depth cycle starts with 10s etch time and subsequent data acquisition Depth cycle 2 to 9 with 45s etch time Depth cycle 10 and all following with 40s etch time SpecsLab2 71 Basic Concepts of Operation Table 4 Etch time definition strings depth cycle with 10s etch time Depth cycle 2 to 9 with 25s etch time Depth cycle 10 to 14 with 60s etch time Depth cycle 15 and all following with 40s etch time 1 0 3 45 First and second depth cycle without sputtering Third depth cycle and all following with 45s etch time Preparations before Depth Profiling starts Before acquiring a depth profile with SpecsLab2 it is advised to prepare the sputter source in front of the measurement Be sure that the beam position is correctly adjusted by the scan parameter selected and the entire source is working proper All sample and system preparations and set ups should be completed namely the sample is advised to be positioned ideally to the analyzer acceptance The detector should be operative and the excitation source be started XRayDummy server or be in standby with cooling water on XRaySource or XRC20Source server lon Source Operation while Depth Profiling The ion source can start from the off standby or
79. g Power WW lo Voltage kW lo Angle deg 45 Apply Cancel Figure 6 7 XRayDummy server dialog box For example the XRayDummy server permits to choose an anode material apower an acceleration voltage and an incidence angle The photon energy according to the anode material e g 1253 6 eV for Mg K alpha is used in SpecsLab2 from there on for example to calculate the binding energy axis in a spectrum see figure 6 7 6 1 2 2 XRaySource Server The XRaySource server shows a similiar dialog box see figure 6 8 but now with real parameter setting for anode material power and acceleration voltage as well as additional inputs for the final condition of the x ray source after the end of the data acquisition job The x ray source power supply is remote controlled via CAN Bus XRC 1000 or XRC 1000 M or HPIB Bus by a USB HPIB Adapter XR 20 The PHOIBOS HSA 3500 and PCU 300 spectrometer electronics are linked via CAN Bus to the EC 10 which manages the connetion the the PC Source Settings Anode Al Power vv 150 Voltage kW fi 0 Angle deg E End of acquisition Operate Ott Standby Operate 64 SpecsLab2 Analyzer Settings Figure 6 8 XRaySource server dialog box The following three states for a x ray source power supply e g XRC 1000 or XR 20 are available finally at the end of data acquisition Table 1 x ray source End of Acquisition Settings O HV off Emission Off Water On Sta
80. gistry branch Besides REGEDIT Windows NT 2000 XP has a tool called REGEDT32 This tool is similar to REGEDIT although perhaps more difficult to use The most important difference between REGEDIT and REGEDT32 is that REGEDT32 allows setting of permissions on arbitrary registry branches e Login as Administrator e Start Run and type regedt32 e Choose HKEY_LOCAL_ MACHINE chart and go to SOFTWARE Specs e Open the menu Security and select Permission e Select the desired user which will work with SpecsLab2 program figure 1 6 page 8 e Do not allow inheritable permissions from parent to propagate to this object This will pop up a Security dialog box shown in figure 1 7 page 9 e Select Copy in this dialog box e Change the permission to Administrator for this Specs registries i e select the Read and Full Control square figure 1 6 page 8 e Confirm the changes with OK e Login as desired user and test SpecsLab2 alxl Security Name i Add Administrators VPOISSON2 Administrators ff CREATOR OWNER Remove ff Power Users VPOISSON2 Power Users f2 SYSTEM ef Users VPOISSON2 Users q possible SpecsLab user Permissions Allow Deny Read 45 Read and Full Control Full Control uM e should show a mark but not in grey squares Not allow will pop up a window Security Advanced see next figure a Allow inheritable permissions from parentto propagate to this object Censi am
81. h the checkbox above The entry allows you to modify the value for this region only Ekin Epass Retarding ratio enable e g for FixedRetardingRatio measurements Step the step width limits depends on selected voltage range of the selected method in the analyzer settings see figure 6 3 on page 61 Values the number of data points Scan the number of scan performed by the desired acquisition mode see 7oo bars on page 49 and Acquisition Window on page 81 Dwell Time the desired dwell time per data point Comment Text field to leave a comment experiment parameter about the region Load Save You can store and load the complete window data Previous Next New Validate Acquisition Clear please refer to the description in Analyzer Too bar on page 52 6 3 Regions Window All region parameters are shown in one line in the Regions window named simply Region Please select the region in the Regions window with the left mouse button Within the Regions window shift left mouse allows you to select more than one region as a block and CTRL left mouse allows you to select several regions standard window selection Regions Group Name Date Method Lens Slit Eexc Ekin Epass Ubias Udet Detector Detector 2 4 my 06 14 02 09 46 14 2 782052 0pen i 1253 6 399 88 1400 Detector Region3 06 14 02 11 47 55 2 7x20 2 open i 1253 6 399 88 1400 Detector Region4 06 14 02 13 59 40 2 7220 2 0pen
82. he debug level before exiting SpecsSpy Figure 11 2 Debug View DebugYiew on LAMBERT local OF Xx File Edit Capture Options Computer Help sul it 2 a B P A 2 Tine Debug Print 0 0090 INFO HsaPhoibosCtrl 1 variables Ekin 10 000000 Ep 3 00 0x0090 NOTICE HsaPhoibosCtrl 1 NonLinearLensl 36 163331 0 0090 INFO HsaPhoibosCtrl 1 30 02 00 formula SEkin SWF SEp spline_ 0 0090 INFO HsaPhoibosCtrl 1 variables Ekin 10 000000 Ep 3 00 0x0090 NOTICE HsaPhoibosCtrl 1 NonLinearLens2 0 664344 Ox0090 INFO HsaPhoibosCtrl 1 30 00 00 formula SEkin SWF SEp spline_ 0 0090 INFO HsaPhoibosCtrl 1 variables Ekin 10 000000 Ep 3 00 0x0090 NOTICE HsaPhoibosCtrl 1 Lens3 20 310158 Ox0090 INFO HsaPhoibosCtrl 1 30 01 00 formula SEkin SWF SEp spline_ Ox0090 INFO HsaPhoibosCtrl 1 variables Ekin 10 000000 Ep 3 00 0x0090 NOTICE HsaPhoibosCtrl 1 Lens4 2 159939 Ox0090 INFO HsaPhoibosCtrl 1 30 03 00 formula SEkin SWF SEp spline_ 0 0090 INFO HsaPhoibosCtrl 1 variables Ekin 10 000000 Ep 3 00 0x0090 NOTICE HsaPhoibosCtrl 1 LensS 7 372683 Ox0090 INFO HsaPhoibosCtrl 1 30 05 00 formula SEkin SWF SEp spline_ Ox0090 INFO HsaPhoibosCtrl 1 variables Ekin 10 000000 Ep 3 00 0 0090 NOTICE HsaPhoibosCtrl 1 OuterHemisphere 8 191000 0x0090 INFO HsaPhoibosCtrl 1 30 10 00 formula amp Ekin SWF
83. he unit is set accordingly Additionally the standard deviation appears in parenthesis in a standard abbreviated form This is the rounded two digit integer value of the standard deviation after normalization by the magnitude of the parameter value s last digit Examples for the default format 3435 3518 85 613096 cps is abbreviated to 3 435 86 kcps 881 62159 0 00087205 eV is abbreviated to 881 62159 87 eV 11403390 1 5130 74971 cps is abbreviated to 11 4034 51 Mcps 2 668437 0 00006868 eV is abbreviated to 2 668437 69 eV SpecsLab2 85 Data Operations S B lt Rate BG value 7 5 gt lt Rate BG error 6 4 gt cps nFWHM lt FWHM gt eV S B 3435 4 85 61 cps FWHM 2 234 eV new line DEFAULT S B lt Rate BG gt cps nFWHM lt FWHM gt eV S B 3435 86 kcps FWHM 2 234 eV Figure 7 3 Operation syntax example 7 2 Background The Background Settings window can be opened in the Operations Settings submenu figure 7 1 on page 83 This window is used to define the background calculation method The methods are given in a drop down listbox The most recently used background calculation method for the active and visible regions can be selected Background Settings x Method Shirley Optimize Range M Optimize Range Apply Cancel Figure 7 4 Background settings menu If the result of the background calculation is not satisfactory the background se
84. ical voltages associated with the detector are displayed in the right part A logical voltage is a voltage that is defined as a logical voltage in the configuration file of the HSA3500 in use e g Hsa3500config11 hsa See the manual for the use of HSA configuration files for further information Each voltage display consists of three parts a check box on the left hand side an Actual value and a Target value Voltages will only be changed when hitting the Start button if the according check box is checked Voltages with an unchecked box will not be changed even if Target and Actual values differ from one another 106 SpecsLab2 Program Description Analyzer u n ACU Al Target 7 Ekin 200 ewf 200 Figure 10 8 Juggler Voltage Display To change a voltage type in the desired value into the Target field The value can also be adjusted using the up down arrows The arrows can be configured by a right mouse click into the target field for voltages with unchecked check box Once target values for one or more voltages have been defined the actual voltages are set to the target values when the Start button is pressed 10 2 5 Ramp Time and Pull Back There are two ways the target values can be approached If the Ramp Time check box is unchecked the voltage will be set immediately to the target value when Start is pressed lM Ramp Time 5 M PullBack 100 Figure 10 9 Juggler Ramp Time and Pull Ba
85. iew Help B Neues Office Dokument Open Office Dokument ffnen Pause Printing w Set s Default Document Defaults ns 5 a unview exe fm Programe gt Sharing 3 Pomeni Purge Print Documents i Control Panel Pe aS fi Settings Server Properties i Taskbar Create Shortcut Delete Rename Properties Windows NT Workstation Close Figure 9 1 Printer configuration Note that the Print Preview will also work with this configuration 9 2 Print Preview The file menu and the print icon works in the common way as known for the E standard window applications SpecsLab2 99 Printing Print pops up the default printer dialog where the desired printer and its parameters can be chosen depending on your computer configuration Print setup on page 99 The Print Preview item allows you to check the layout of your print job before it is printed SpecsLab2 allows to preview the print out via GS view program Ghostview should be installed see SpecsLab2 installation The program has to be started once separately before using the preview option Program GS Tools GSview exe SpecsLab2 T ce gt o gt 7 3 S 5 B 177 11 78 kcps FWHM 0 8629 eV SPECS LAB Wednesday June 26 2002 17 37 15 This comment can be used for common information T T T T ra T 882 883 884 885 886 887 Kinetic Energy eV H Wwaco
86. il to support specs de SpecsLab2 1 Installation 1 1 Roadmap SPECS installation SpecsLab2 acquisition program typical ETH ETHER CAN connect EC10 box activate the CAN Bus Switch on HSA3500 see Ethernet connections Install TCP IP Install second network adapter network for access to adapter local network with private see section TCP IP IP protocol network requirements see Second network card Install SoecsLab 2 from CD Configure EC10 Configure EC10 with IP address with IP address from local from private network network CasaXPS or SpecsLab1 or evaluation program Figure 1 1 Road map for SpecsLab2 installation See Non Ethernet CAN Adapter PCI ISA on page 137 in 13 2 SpecsLab2 EtherCan ETH with EC10 short summary 1 2 EtherCan ETH with EC10 short summary This chapter is a short summary for a standard EtherCan installation Following steps should be done for a standard ETH installation ETHernet i e with an EC10 Ethernet Can Bus adapter gt STEP 1 gt STEP 2 gt STEP 3 gt STEP 4 gt STEP 5 gt STEP 6 gt STEP 7 Check System Requirements on page 3 Check Interface options on page 3 standard EC10 Follow the procedure Setup for EC10 on page 11 i e Ethernet connection on page 12 IP Protocol Requirements on page 9 Check the section SpecsLab2 Installat
87. ime for a counter in the detector 10 2 3 Analyzer Controls Once the connection to the HSA3500 and to the detector has been established the window will display voltages and detector specific parameters SpecsLab2 105 HSA 3500 Juggler Fal H542500 Juggler FHOBOS H343300 100 3 f On BE ir C Standky connect Staadky C C Ont Bii C Aralyzer Delertar Lens Mode IMesiumarsa Rangs Cp aone lens C block Setirgs M Ramp Tire J PP wrap nd IE bauch Offsel Srale Zuls Clear Full Back 100 Fa scan re a fo 110k Hold 2 rT Detectcr 5 AT arget ACtLal Taget Antal veEkm 200 ef 2m0 H Lee fi y 7 Bin no wy is D Leon ae iene vues fo vf af T Uape fo Fr a C ap fo ovo oo E C Uetpa fo v 8 O Agwe f s 8 H Caie Pov r Figure 10 7 Juggler PHOIBOS HSA3500 100R5 It is not necessary to establish a connection to both HSA3500 and the detector You can also control either one of them alone But since the detector voltages are typically generated in the HSA3500 a connection to both hardware parts is recommended Even though all voltages are typically generated in the HSA3500 some of those are logically associated with the detector and some are associated with the analyzer This correspondence is defined in a windows registry entry 10 2 4 Voltage Display All logical voltages associated with the analyzer are displayed in the left part of the window all log
88. indows Installer service If necessary the service will be installed before the Windows Installer setups will run 4 SpecsLab2 Installing SpecsLab 2 x 1 5 1 Installation programs Example SpecsLab2 installation CD ROM content CasaXPS copy to hard disk Start Regedit IXXAT PC I 03 CAN Bus card iPC I 320 PCI CAN Bus card Readme FIRST Documentation pdf Exit Figure 1 3 Installation CD menu CD_Explore exe Typical installation Description SpecsLab2 will install SpecsLab2 and EC10 interface software CasaXPS please copy the folder content onto your hard disc license update code necessary see specification report Non standard specials if not viewed in the selectable items please use CD content to find the location of the corresponding programs Vci214 CAN Bus PCI card only if you use a PCI CAN Bus card IXXAT PC I 03 CAN Bus card only if you use a ISA CAN Bus card EgControl only for special electron gun hardware IgControl only for special ion gun hardware The SpecsLab2 installation will checks if your Windows platform requires the new Windows Installer service If necessary the service will be installed before the Windows Installer setups will run Please complete the installation in the following way Check the content of the Update folder and copy all files into the corresponding folder important and necessary SpecsLab2 5 Installation For example hsa into
89. information about the user who s currently logged onto the computer This subtree actually points to the user s root key that resides in the Users subtree e LOCAL MACHINE This subtree contains both hardware and software configuration information for the system Beneath the SOFTWARE root key one will see subkeys listed for the different software packages loaded on the computer Microsoft provides the regedit tool to allow direct access to the registry Once one have opened the regedit exe program one will notice that it has a very similar look and feel to Windows Explorer as shown in figure 1 5 One navigate through the folders trees and keys in the left panel and one work with items values in the right panel Registry Editor Registy Edit View Help My Computer H HKEY_CLASSES_ROOT HKEY_CURRENT_USER a HKEY_LOCAL_MACHINE H E HARDWARE H A SAM 9 SECURITY SOFT WARE H SYSTEM H HKEY_USERS H HKEY_CURRENT_CONFIG HKEY_DYN_DATA Name Data ab Default iii ER Very 000000000 0 My Computer HKEY_LOCAL_MACHINE SOFTWARE y Figure 1 5 Regedit exe window has a very similar interface to that of Windows Explorer SpecsLab2 7 Installation 1 5 5 Running SpecsLab2 on Windows 2000 and Windows XP with non administrator accounts To run SpecsLab2 on Windows 2000 and Windows XP with non administrator accounts It is necessary to set the permission to Administrator for the Specs re
90. ion on page 6 Insert Specs Installation CD The install shield will start automatically Select Typical ETH in the Install Shield Wizard for a standard installation Please refer to the analyzer manual PHOIBOS section 5 Operation to start acquisition Check the section Configuring the EC10 on page 12 Running Configuration Tool on page 13 Choose the desired installation for the evaluation program e g the Setup exe for SpecsLab1 on the installation CD folder for SpecsLab1 or any other data processing tool if not already installed 1 3 System Requirements e Pentium PC or better at least 128 MB RAM 256 MB recommended 512MB for CCD detector e Windows NT 2000 XP NT4 0 Service Pack 6 or higher e TCP IP installed SpecsLab requires TCP IP to be installed on the PC This is usually the case for all PCs connected to a network or a modem see IP Protocol Requirements on page 9 for installation e Upto 50 MB of free hard disk space e Ethernet connection or a free PCI slot for a CAN Bus controller card 1 4 Interface options Please check at the Test Report figure 1 2 of the PHOIBOS analyzer which CAN Bus adapter has been delivered and then either e Ethernet adapter EC10 See EtherCAN with EC10 on page 11 in 1 7 or e PCI CAN Bus card See Non Ethernet CAN Adapter PCI ISA on page 137 in 13 2 or SpecsLab2 Installation e ISA CAN Bus card See Non Ethernet C
91. is enabled the extremes are deduced as to achieve the lowest resonable background This kind of background makes no physical background 7 2 1 2 Shirley Background An alternative to the linear method is that of Shirley in which the background intensity at a point is determined by an iterative analysis The background at a given kinetic energy E i is proportional to the intensity area above the background between the given energy and the maximum energy boundary N The shirley background calculation is performed using the formula 1 D Briggs and M P Seah Practical Surface Analysis 2nd edition Volume 1 233 1990 2 D A Shirley Phys Rev B 5 5 4709 1972 SpecsLab2 87 Data Operations N b k gt P j itl Shirley Background EQ 7 1 iteratively In the first iteration the background is set zero In the th channel the signal s is the sum of the background b and the peak intensity p The calculation is repeated until the change in results is below the desired error k is determined to fit the background at the high kinetic energy side The method assumes that the energy loss function for electron scattering is constant As in the case of the linear background the extremes correspond to the visible region or to the value determined through range optimization The boundary comditions for the calculations are determined in the same manner as the extreme points for the linear background calculation 7 2 1
92. ith steps of size Eexc step At the first point in photon energy a snapshot with all channeltrons is acquired with the centre channeltron at energy Ekin For the next points in photon energy Ekin is shifted by Eexc step such that in the next snapshot the analyzer measures always at the same binding energy and thus at the same initial state At each point the single channels are added without any shift to form the sum channel e Constant Final State This mode is used on a synchrotron radiation light source with a monochromator see section 5 1 2 The monochromator is scanned between Eexc start and Eexc end with steps of size Eexc step At each point in photon energy a snapshot with all channeltrons is acquired with the centre channeltron at energy Ekin start The detector stays on that energy while the monochromator is scanned Thus the analyzer always measures the same final state At each point the single channels are added without any shift to form the sum channel e Fixed Analyzer Transmission pass energy is fixed kinetic energy scan 78 SpecsLab2 Region Edit Window e Fixed Retarding Ratio ratio kinetic energy pass energy fixed e Pass Energy Scan e Detector Voltage Scan e Fixed Energies all voltages kept constant editable number of data points Depending on your choice mode of acquisition different voltages will be scanned The editable entries corresponding to the analysis mode Start step width
93. itrary synchronous remote actions during data acquisition e Data acquisition in general SpecsLab2 27 Introduction One of the advantages of using the new architecture is that the process of implementing a given interface and making the implementation available to SpecsLab2 is nearly identical for all aspects described above The following figure gives an overview of SpecsLab2 s software components and how they relate to each other Dashed lines denote CORBA service startup The solid lines indicate SpecsLab2 s access to the services through the CORBA interfaces All components except SpecsLab2 itself are located and started by a central component the ObjectServer which must be active before SpecsLab2 is started by the user The Objectserver integrates the various services operation serializer and makes them available to SpecsLab2 Figure 2 1 Architecture and Functionality of SpecsLab Through this architecture it is possible to reconfigure or retrofit services while SpecsLab is in operation 2 3 Software Installation 2 3 1 Installing SpecsLab2 You must install the application from the SPECS CD onto your hard disk you cannot run the program from CD Installation instructions are available in the Install file on the CD 2 3 2 Starting SpecsLab2 You start SpecsLab2 just as you would any other application To start do one of the following e Choose Start gt Programs gt Specs gt SpecsLab2 28 SpecsL
94. les Regions Windows In particular the Style and Color parameter are important to distinguish between different regions and groups For each region MCD information as well as the excitation source information are available Select a File allows you to create new groups within this file beside the commands Copy Paste Close Save and Save As At the top of the context menu the visibility of the whole file data can be chosen double click to the file name does the same see section 5 1 on page 45 The visibility of groups and regions is stored and is still active if the file is made visible again Selecting a Group shows the context menu below w Visible Edt Rename Delete Copy Paste New Region Compact Data Figure 5 11 Context Menu Group The Region data context menu shows same additional entries Selecting a single region in the Files window pops up the following context menu visible Data Scaling Channels Transmission Background Style Color validate cgue Edt Rename Clear Delete Copy Paste MCD Info Source Inha Compact Data Figure 5 12 Context Menu Region e Visible make the region visible or invisible SpecsLab2 55 Viewing the Data View e Data e Channels e Raw Data Scaling Transmission allows you to select the display mode in the Data window section 5 3 2 on page 50 displays the energy corrected sum of all intensities in th
95. ll present a pull down list from which offers different display modes of the oscilloscope window scan abs the channel information will be displayed as absolute values scan rel The channels will be stacked over each other to improve readability on the oscilloscope level mean For each channel a rate meter will be displayed which shows a marker on the mean value level max For each channel a rate meter will be displayed which shows a marker on the maximum value scan sum The sum of all hardware channels will be displayed 10 2 6 3 Offset and Scale All channels will be shifted by the value entered in the Offset field A value of 200 shifts the channels by the full display height Negative values are allowed The y range of the oscilloscope display is defined with the pull down menu in the Scale field It is given in Counts Thus the displayed value will depend on the dwell time that has been chosen in the Detector tab 108 SpecsLab2 Program Description 10 2 6 4 Display Style and Speed The display speed is defined by the dwell time to which the detector is set This is a detector specific parameter and it can be set in the Detector tab The slider below the oscilloscope display mimics a brightness knob It affects the length of the tail of the fluorescent dots If the Wrap check box is checked channels that leave the top of the display will enter it from the bottom wrap around mode Clear era
96. ltage Electrons W 30 Default Bias Voltage lons M 2000 Default Detector Yoltage 4 2200 Analyzer Workfunction W 40 Y Range Offset 40 Y Range Gain 400 W Range Offset 400 W Range Gain 1 5 bY Range Offset 1 5 bY Range Gain 2 0 kY Range Offset 2 0 kY Range Gain 3 5 kY Range Offset 3 5 kW Range Gain Recalibrate DACs Precision INI Maximum Count Aate keps Suction Yoltage i Figure 6 3 Analyzer Settings sub menu Change the Voltage ranges for the desired methods either if you want to measure at higher maximum voltages or to achieve the optimal step width for the chosen energy range The Default Bias Voltage of about 90V for electron detection and 2000V for ions are optimized for the analyzer type and should normally not be changed Please contact support specs de for more information The Default Detector Voltage is normally given in the specification protocol of the analyzer and should be changed carefully A detector scan gives the actual status of the detector unit see Detector Scan on page 62 Note Please choose a moderate end value of the detector voltage scan to prevent a rapid detector aging The Default Workfunction is used to calibrate binding energy axis for every new measurement The work function leads to a constant shift in the spectrum SpecsLab2 61 Basic Concepts of Operation Measure the peak position for a well known element and set the desired value The next measuremen
97. ly if there is a single peak of the current region within the actual display The results of this operation overwrite previously calculated FWHW data The operation is applied to the visible selected regions and within the visible x axis range in the Data window Peak FufHM Settings Background Method Shirley 3 Asymmetric Peak E Pu HM Annotatior 5 2 lt Asate BG gt cps nF HH Apply Cancel Figure 7 9 Peak FWHM Settings paan OOOO O ME SpecsLab2 S B 3 420 86 kcps FWHM 2 227 eV Intensity 10 Counts 540 535 530 525 Binding Energy eV Figure 7 10 FWHM Operation For the parameter context menu please see Parameter context menu e g for FWHM on page 85 SpecsLab2 91 Data Operations 7 6 Peak Location SpecsLab2 fits a quadratic function to the topmost region of the peak for calibration purposes peak location following the procedure of Anthony and Seah Peak Location Settings Left Data Points jo Right Data Points ja Asymmetric Peak m Background Slope MT Peak 4nnotation Peak x value gt eV Apply Cancel Figure 7 11 Peak Location Settings Select the Settings window and choose your desired parameter Zero in the Left and or Right Data Points field will perform and data point selection due to SpecsLab2 top 5 of the peak and at least enough points for fit To change the Peak Annotation please refer to Syntax for the Operatio
98. med simply Region It is also possible to look at the definition of region boundaries and parameter from experiments loaded from disk and to delete regions or clear its data for a repeated acquisition Please select the region in the File or Regions window with left mouse button Within the Regions window shift left mouse allow to select more than one region as a block and CTRL left mouse allow to select several regions standard window marking operation Inside the Region Edit window figure 6 19 on page 79 the editable entries can be selected The possible selections depend on the chosen mode of acquisition pull down menu in field Analysis Mode Note Depending on the analyzer and analyzer power supply capabilities values outside the possible boundaries will be corrected automatically to prevent any damage Please check the region parameter after validation carefully to avoid useless measurements SpecsLab2 77 Basic Concepts of Operation 6 2 1 Region Edit window fields Name In the Region Edit window the standard region names Region1 Region2 etc will be used if no new region name is given Renaming is possible Group simply show the group where the region is placed Analyzer This field shows the type of analyzer either the type which will be used for measurement after validation or the used analyzer for regions with data Acquisition Date is the date time stamp when the acquisition in this r
99. n Parameters on page 84 Select the Peak Location item in the menu Operations apply the operation to the selected region s F Data 1 ojx SpecsLab2 Intensity 10 Counts 540 535 530 525 Binding Energy eV Figure 7 12 Peak Location 1 C J Powell Surf and Interface Anal 25 777 787 1997 2 M T Anthony and M P Seah Surf Interface Anal 6 95 1984 M P Seah J Vac Sci Technol A3 1330 1985 92 SpecsLab2 Peak Location Peak Location 719 i ee Left Data Points Background Style 3 Savitzky Gola Flename Right Data Points ER a Delete Peak Location We lE0 0 Peak Fi o odda 7 0 023463766 Feak y 2823 J68 3 bf 0414 Asymmetry fa f Background Slope fa Style dash Jine Apply parcel Figure 7 13 Parameter window for Peak Location Using the right mouse at the location region in the File window and select the item Parameter in the context menu This show the Parameter window for the Peak Location of the region The operation is applied to the visible selected regions and within the visible x axis range in the Data window To apply the operation to more than one region multiple regions can be selected in the Regions window 7 6 1 Mathematical Details for Peak Location The peak location fit is performed by B 2 x center Slope x center Background Intensity x Intensity center exp 41n2 SHED Peak Location EQ 7 3 Depending on
100. ndby HV on Emission Off Water On Operate HV on Emission On Water On Leaving the XRaySource server window with ok or Apply will switch the x ray source power supply to remote 6 1 2 3 monoXRaySource Server The monoXRaySource server is showing a very similiar window after pop up As anode materials Al 1486 6 eV for Al K alpha and Ag 2984 3 eV for Ag alpha are selectable All the other features are identical 6 1 2 4 Beam line Monochromator Server Source Settings Excitation range min max step fi 0 0 10000 0 0 000001 Wavelength set timeout ms f2o000 Wavelength set delay ms 100 Default excitation energy Energy correction slope Energy correction intercept scaling Figure 6 9 Monochromator server One slightly more complex server is applied to operate monochromators at synchrotron radiation sources The standard SpecsLab2 installation provides a server that communicates via the AMC asynchronous monochromator control protocol The Monochromator control computer is connected via a serial port with the PC which runs SpecsLab2 for Spectrometer control SpecsLab2 sends the appropriate commands to control the monochromator via this link to the AMC program running on the monochromator control computer The source server permits to set several monochromator parameters SpecsLab2 65 Basic Concepts of Operation Excitation range min max step minimum and maximum available photon en
101. ns per cycle i e 2 scans per every defined region typed in the Remote Settings dialog box see figure 6 12 and prospected 5 depth profile cycles of ion sputtering and data acquisition one has to type in 10 scans for each scheduled region in the Region Edit window see figure 6 14 70 SpecsLab2 Analyzer Settings i Region Edit Name Group Acquisition Date Region Group Method Analyzer Analysis Mode PS PHOIBOS HSA3500 150 R6 Hi Typ e FixedAnalyzerlransmission Entrance Slit Exit Slit Lens Mode open HighMagnification Eexc Energy Start Epass M Ubias M Udet i486 61 1113 fan fao 2150 ma Br EkinfEpass Energy Step Energy End Values Scans Dwell Tine 27 70825 0 05 122 f 81 f 0 0 05 Comment Default Values Er j al d l Save N a ke RRE Fer er Figure 6 14 Type the dot product of depth profile cycles e g 5 and scan numbers per region e g 2 into the Scans dialog box of Region Edit Etch Time Definition Strings The etch time definition string see figure 6 12 has to be written as a list of single etch time entries whereas each entry consists of a depth cycle number and an etch time value in seconds separated by a colon The list entries have to be separated by a comma A special definition string can contain only one single etch time value and will be interpreted as etch time to be used starting with the second depth cycle first line of table 4 Table 4 Etch time de
102. ol the HSA3500 Universal Power Unit and the detector electronics It gives direct access to all logical voltages defined in the configuration file of the HSA3500 At the same time it gives access to all logical voltages associated with the detector and displays the output of the detector in an appropriate format typically in an oscilloscope style window The main purpose of the HSA3500 Juggler program is to help adjusting voltages in the analyzer or the detector This is not necessary for standard PHOIBOS packages but it is very helpful for customised PHOIBOS or HSA3500 versions that control special equipment e g Spin detector or customised high pressure lenses As opposed to SpecsLab2 the HSA 3500 Juggler is not intended for measuring spectra It sets the logical voltages to given values and displays the detector response directly All functionality that is defined in the configuration file of the HSA3500 e g Hsa3500config11 hsa is available to the HSA3500 Juggler This includes all lens modes The HSA3500 Juggler cannot be used at the same time as SpecsLab2 To start one of the two programs the other one has to be closed 10 1 2 Getting Started 10 1 2 1 Installing the HSA3500 Juggler Install the application from the SPECS CD onto the hard disk the program cannot run from CD Installation instructions are available in the file Documentation install pdf on the CD SpecsLab2 101 HSA 3500 Juggler 10 1 2 2 Starting the
103. ons FH FF FF HHH HHH H Scan Mode FixedAnalyzerTransmission Number of Scans 1 Curves Scan 1 Values Curve 263 Dwell Time 0 1 Excitation Energy 1253 6 Kinetic Energy 881 659 Pass Energy 9 Bias Voltage 90 Detector Voltage 2200 Eff Workfunction 4 4 Source XRayDummy Cycle 0 Curve 0 881 65923 33720 881 68719 32870 881 71515 33190 4 4 Edit Menu The Edit menu does not differ from the common edit operations in many windows applications The parameter of the selected file group or region will be Copy to the clipboard The Paste operation allow to place the clipboard data to a selected place within the file structure Copy Diagram copies the active Data window to the clipboard for further processing in standard windows applications Please use if desired the common keyboard shortcuts as well as the standard icons for these operations 44 SpecsLab2 Chapter Viewing the Data 5 1 Visible Data In the Files or Regions window the selection for visible groups regions shown in the Data window will be done by double clicking on the data icon or selecting the Visible item in the context menu section 5 4 on page 54 The visible groups regions in the Data window are marked with a colored data mark depending on the chosen data style for this region here a solid red line H vacos experiment calib3 xml Medium Area R Ep10 Ro Ep20 R Ep30 Ro Ep40 R Ep50 Large Area
104. ontouring the ED Harte 12 1 7 2 3 Running Configuration Tool 2essesseeneeeneeeenen nenn 13 1 7 3 Setup with second network Card ccc cece eee 15 1 7 3 1 Cabling the EC10 with a second network card 15 1 7 3 2 Installing a second network card in the PC 15 1 7 3 3 Configuring the EC10 with a second network card 16 1 8 Installation of SpecsLab 1 x cece ccc e cece cece eens 19 1 9 Installation Of CaSaxPS urn 19 SpecsLab2 1 1 10 SpecsLab2 Update Instructions ccc cece eee 20 1 11 Get Installed Version Number cceceeeeees 24 1 12 Backup of Registry SettingS ccccc cece eee neces 24 1 13 Close all running Specs Applications 24 1 14 Uninstalling SpecsLab2 ccc cece cece eee eee eeees 24 1 14 1 Uninstalling versions prior to software version 2 14 24 1 14 2 Uninstalling version 2 14 and higher 24 1 14 3 Uninstalling by hand Asse 25 Introduction 27 2 1 DVeErVIeEWy HE een 27 2 2 Architecture and Functionality of SpecsLab 27 2 3 Software Installation u ae 28 2 3 1 Installing SpecsL3p2 nase 28 2 3 2 Starting SpecsL b2 anne al 28 2 4 COMMEN Sere ee tetra E 29 2 4 1 Help TOF SPECS LAD 2 an Er 29 2 4 2 SpecsLab2 APPearance ccccccc cece cece AO 30 Quick Start 33 3 1 GETTIN Gj Started crrr ett or un 33 3 2 FILE Operation seele uses 34 343 Data WINGOW eu
105. oscilloscope This way it is possible to display the hardware channel on the same oscilloscope range as the asymmetry channels 10 2 8 Quitting the HSA3500 Juggler The hardware can be disconnected from the HSA3500 Juggler by activating the Off radio buttons The program is terminated by closing the program window SpecsLab2 109 HSA 3500 Juggler On On i C Standby Connect Standby C Of Off C Figure 10 10 Juggler Mode selector 10 3 Adjusting lens voltages in customised hardware This chapter serves as an example of how to use the HSA3500 Juggler as an adjustment tool Adjusting voltages is not necessary in the standard PHOIBOS installation Only special customised analyzer versions are equipped with lens elements that may need to be adjusted e g the PHOIBOS high pressure version The ability to adjust voltages is implemented in the HSA3500 configuration file e g Hsa3500config10 hsa The idea is to define an additional logical voltage named e g Focus Voltage and to add this voltage to the lens element that is to be adjusted Since all logical voltages appear in the HSA3500 Juggler the Focus voltage can be adjusted there The code below shows the sections in the configuration file that include entries for the adjustment voltage this is not a complete configuration file only the sections affected by the focus voltage are shown In this example Lens5 is made adjustable with a Focus Voltage that can r
106. pen a file or CTRL S to save 2 4 1 Help for SpecsLab2 Under the Help menu of SpecsLab2 you can find out particular details of the program under the About Specslab menu option This is useful for knowing what version of the software you are using in the event you require support from SPECS support specs de There is also a shortcut to this manual from within the program under Online Manual Here all typical search functions are available SpecsLab CD includes the complete documentation as a pdf file as well as in the online Help including all of the information in this user guide SpecsLab2 29 Introduction You start SpecsLab online Help in the following way e Choose Help gt Online Manual 2 4 2 SpecsLab2 Appearance Following windows are available in the SpecsLab2 User Interface e Files e several Data windows e Regions e Region Edit e Acquisition 4 Eee _ eo x File Edit View Analyzer Tools Operations Window Help f CEEE se T 89 Es os t m EB mja 9 fo a 1 z a a s s 7 s 9 Jeena o ot x fiom IM p Consecutive z5 ll D Group ame te e in ir Epass Ubias Udet Detector Detector 4 3m 06 10 02 10 05 41 XPS 2 7x20 2 open 1253 6 399 88 1400 2800 4 41 Detector Detector 2 4 mV 06 14 02 09 46 14 XPS 2 7x20 2 open 1253 6 399 88 1400 2800 4 4 Detector Region3 06 14 02 11 47 55 XPS 2 7x20 2 open 1253 6 399 88 1400 2800 4 4 Detector egion 06 14 02 13 59 40 XPS
107. pport data acquisition and data processing for energy dispersive measurements The interface to the data acquisition equipment known to SpecsLab2 provides access to a number of different acquisition methods The access to the measurement equipment is separated from the SpecsLab2 tool thus a wide range of analyzers can be controlled This way an easy adoption to different measurement equipment is possible without changing the data acquisition tool SpecsLab2 currently runs on the Microsoft Windows NT 2000 XP NT with at least Service Pack 5 operating system and needs 200 MB free disk space For different acquisition methods specialized data processing functions are provided i e satellite subtraction for XPS spectra specialized background subtraction methods and data base lookups based on the selected method 2 2 Architecture and Functionality of SpecsLab In 2000 the company undertook a new software project called SpecsLab2 which combines the advantages of a new software architecture with the rich data processing facilities of SpecsLab1 The functionality of SpecsLab2 is extensible under a number of public CORBA Common Object Request Broker Architecture interfaces These interfaces can be implemented for special user purposes i g controlling a special excitation source This extensibility covers the following aspects File I O additional file formats o Numerical operations on region data e Additional excitation sources Arb
108. r ADIODA PCI12_LCV Installation of WASCO ADC adapter optionally 74 SpecsLab2 Analyzer Settings Install the Wasco ADC adapter ADIODA PCI12_LCV in a free PCI slot of your PC and restart the PC Make sure to be logged in as Administrator Run Setup exe in the Wasco folder of the Specs CD Please follow exactly the installation instructions in Install pdf in the Wasco subdirectory See the registry entry discription below for configuration The AMC Monochromator_Keithley uses input channel 0 Wasco ADC adapter connector pin 1 Installation of the AMC serial connection After installation of the software and drivers the AMC monochromator has to be connected to the PC This is done by connecting a serial port of the PC see Registry entries to the serial port of the PC that controls the AMC monochromator On the monochromator PC the AMC program has to be started When the hardware connection is established the monochromator can be selected as a Source Device in Specslab 2 0 The Soecs AMC Monochromator Control uses one of the system serial ports to communicate with the monochromator See the registry entry description below for configuration Registry entries SpecsLab Setup exe creates default registry entries for AMC Monochromator Control By editing these registry entries you can configure Monochromator Control for your needs Key SOFTWARE Specs Sources Monochromator MonochromatorO Entry InputRange Value 10Vunipolar
109. rately on the PC Which components to install mainly depends on the way one intends to use the software and if one is performing a full installation or an update to the latest software version The Data Acquisition software SpecsLab was redesigned from scratch and now comes as a new application SpecsLab 2 x entirely built on Windows NT 2000 XP To distinguish the old and new versions 1 x and 2 x they will be referred to as Specslab1 and SpecsLab2 throughout this document and the installation procedure Since SpecsLab2 does not yet cover the data processing functionality of SpecsLab1 the latter is provided in this installation to perform analysis tasks such as quantification and fitting One might as well use any other data processing tool e g CasaXPS which would make the installation of SoecsLab1 unnecessary or choose to install these evaluation programs on a different PC SpecsLab2 acquisition program e g CasaXPS SpecsLab1 evaluation program evaluation program Please note and or All installations must be performed with an administrator login It is necessary to have the operating system CD at hand and ask the network administrator for an IP address if the TCP IP protocol is not already installed on the PC Different operating systems may cause some differences in windows layout and applications Please contact your computer specialist If any problems occur with the installation please call 49 30 4678240 or send E ma
110. rations Noise Peak FuHh Peak Location Savitzky Golay Smooth BE 3 ne operations performed Linear Operations to reg ION a2 Moise Peak FWHM Peak Location Savitzky Golay Smooth Reset Operations Figure 7 1 Operations menu region structure The Operations menu provides access to the data manipulation procedures The sub menu Settings pops up a dialog for each operation Each settings window is described in the operation sections below SpecsLab2 83 Data Operations Once an operation is performed an additional row named according to its operation appears in the Files window as a sub entry under the processed region Note that the original data remains unchanged A data processing operation is initiated by selecting its item from the Operations menu The operation is then applied to the visible selected regions and within the visible x axis range in the Data window Within the File window a single region only can be selected Multiple regions can be selected inthe Regions window SHIFT and left mouse click for selecting contiguous regions CTRL and left mouse click to select disjointed regions Most of the region processing Files Window on page 37 as well as style and view options Viewing the Data on page 45 can be performed on the resulting data 7 1 Syntax for the Operation Parameters For those operations which include annotations in their output
111. rd and for the EC10 freely but some restrictions must be observed e The second network card must not have the same IP Address and must not be in the same subnet as the first network card e The PC and the EC10 must have different addresses but must be within the same subnet e Do not use IP Addresses that will be accessed through the first network card We recommend to use the following IP Addresses PC s IP Address 192 168 236 15 EC10 s IP Address 192 168 236 16 Subnet mask 255 255 255 0 If not sure which IP Addresses to use please ask the network administrator Click on the Bindings file card to make the new driver available for the protocol configuration Click on the file card Protocols select the TCP IP protocol and click on Properties see figure 1 18 on page 18 Select the new card and specify an IP address and a subnet mask The default gateway field can be left empty Press OK and close the menu to finish the installation After finishing the installation and configuration of the second network adapter reboot the PC to activate the new card SpecsLab2 17 Installation Microsoft TCPAIP Properties Ei ES IP Address DNS WINS Address Routing An IF address can be automatically assigned to this network card by a DHLF server IF your network does not have a DHCP server ask your network administrator for an address and then type it in the space below Adapter E Realtek
112. re updating your SpecsLab2 installation In case of updating from an earlier version of SpecsLab2 please uninstall this software package first before installing the new version Please note that personal settings for SpecsLab2 like detector shifts or IP addresses for an ec10 CAN adaptor may be lost so a registry backup rename of that data is highly recommended Additionally installed software e g drivers for CAN bus Adapter or CCD camera should be updated if newer software versions are delivered with the new SpecsLab2 installation disk For all installation tasks make sure to be logged in as Administrator If you have any problems with updating your SpecsLab2 installation please call 49 30 4678240 or send an email to support specs de Update with CDROM please note the comments in the paragraphs after this summary as well gt STEP 1 Close all SPECS programs See Close all running Specs Applications on page 24 in 1 13 gt STEP 2 Open Task Manager Ctrl Alt Del find the ObjectServer exe task and kill this task End Process Windows NT Task Manager OF x File Options View Help Applications Processes Performance Image Name Fip cru CPU Time MemUsage l 00 Acrobat exe 249 0 01 20 1428 K AcroTray exe 230 00 0 00 00 24K AOM exe 267 00 0 00 00 1380 K aypcc exe 5 00 0 00 01 252 K avpec exe 114 00 0 00 05 528 K avpm exe 146 00 0 00 05 405 K CD_Explore exe 341 00 0 00 01 1008 K csiss
113. remote control a SPECS PU IQE 12 38 with Firmware V4 10 or higher via a serial line or a SPECS PS IQE 12 38 via HPIB Bus Following the Source server section the Remote server section is arranged see figure 6 11 SpecsLab2 67 Basic Concepts of Operation Analyzer Settings x Analyzer Server Phoib o5 H333500 Name PHOIBOS HSA3500 150 R6 HYYT ype Settings Load Settings Save Settings Detector all ste Settings Mapping Sources Method XPS tsi Server xRaySource Name XRaySouce Settings Load Settings Save Settings Remote Server none Name onen Settings Load Settings fave Setings Close Figure 6 11 Depth Profile Remote Server dialog box Remote Settings The following parameters should be entered by the Remote Settings dialog box see figure 6 12 Remote Settings x h Parameter set 1 9 3 Energy v fi 000 Emmision current mA fi 0 Etch time s f 0 2 30 3 60 Scans per cycle fi Switch excitation source state m Excitation source state while sputtering Off x Figure 6 12 Remote settings for PU IQE 12 38 or PS IQE 12 38 In the table 2 the settings within the first five lines in figure 6 12 are described 68 SpecsLab2 Analyzer Settings Table 2 lon Source power supply e g PU IQE 12 38 or PS IQE 12 38 Remote Setting Parameter Parameter Description onGun paramet
114. s see buttons below Abort is active if the acquisition is underway The complete acquisition task will be canceled If only a part of the whole acquisition task should be changed please use the Acquisition window to manipulate the process Suspend is active if the acquisition was started The complete acquisition task will be suspended Resume is active if the acquisition was suspended The complete acquisition task will be restarted 5 3 4 Channels II1l213 15 If the measurement was done by multi channel detection each single channel can be switched on and off The result is immediately seen in the Data window 5 3 5 Style So Please refer to Style and Co or on page 45 5 3 6 Status Bar Ready X 876 32 N The Status bar shows on the left side the momentarily active status of a measurement see Analyzer Too bar on page 52 At the right side the Cross Cursor position is shown depending on axis status see Cross Cursor handling in Data View on page 50 5 4 Context Menu of the Files Regions Windows The context shortcut menu contains commonly used commands for the item under the pointer You can display context menus when the pointer is in the margin To display a context menu Right click The context menu for the Files as well as for the Regions window depends on the chosen type file group region of data where the pointer is set 54 SpecsLab2 Context Menu of the Fi
115. s a good idea to repeat the calibration for the usually slit lens combination again If you did not perform any MCD calibration by yourself before you can skip this procedure Import the saved registry file for your analyzer model to reinstall the modified MCD or transmission values Compare the path of the exported registry folder of your analyzer model gt STEP 7 page 21 to the new path of registry folder of your analyzer model Older analyzers maybe have not the same path like the new installation Import by double click will not work Please contact SPECS if you want to use your former MCD shifts Check the Model name of the analyzer in the new registry path select Phoibos Hsa3500 and control the Model string should be the same as before Replace the Workfunction string to the old values if necessary Copy Paste the CasaXPS folder if you need an upgrade for the evaluation program Re enter the License in the CasaXSP Help menu About CasaXPS Check if there are new files in the Update folder ofthe CD Copy Paste all files to the location of the original file which are the SpecsLab2 23 Installation older versions you note this by an older date or a different file name Note If you get trouble with IP addresses MCD shifts or any other problem please mail the renamed original registry file and the new one to SPECS and we will modify for you export both SPECS registry trees into a file 1 1
116. s experiment file structure xml Group Region Method nee Mode Scans Dwell Delta Group MAS xPs MA 2 7x20 2 open FAT I 0 1 0 027959 Epas Ubias User Comment 9 90 2200 300w 15kV 220nA Figure 9 2 Please read the tips for print layouts given in Diagram Settings on page 47 Data View on page 50 and Sty e on page 54 With Diagram Settings all necessary options are available to set the data area as well Print Preview window as the region list below the spectra Tip Please use a narrow font Position on Paper Z axis x y 882 883 oes 885 886 887 Kinetic Energy eV Y size H wacos expenmentVile struct ure xmi Group Region Method Lens Siit Group MAS XPS MA 2 7x202 0penFAT 1 Figure 9 3 Mode Scans Owell Delta le ic je U U n Comment 0 1 0 027959 1253 6 881 66 88 98 19 90 12200 300W 15kV 220nA Size settings for print SPECS LAB Thursday June 27 2002 113223 This comment can be used for common information Minimum Screen Size mm Size on Paper mm a Position on Paper mm Z Axis Cancel Diagram Settings x Title x Axis VY Axis Sizes Font Colors Styles xf nf xfo vhs fo fe Ct TE Restore Defaults 4 100 SpecsLab2 Chapter 1 0 HSA 3500 Juggler 10 1 Introduction 10 1 1 Overview The HSA3500 Juggler serves to contr
117. s will add a new file group region entry in the Files window and allow you to set your parameter in the Region Edit window e Select the Region Edit window e set the desired parameter for acquisition For example Region Edit olx Name Group Analyzer Acquisition Date fi st scar Specification Method Entrance and Exit Slit Lens Mode Analysis Mode xPs a 27 20 Y 2 open Medium rea Fixed4nalyzerT ransmission Eexc Ekin Start Epass Ubias Udet T we 1253 6 150 fis 30 2200 45 Ekin Epass Ekin Step Ekin End Values Scans Dwell Time 37 fi 1495 1346 f o1 Comment Default Values a Load a Save Previous Next New Validate AGGuitt Clear Figure 3 3 Quick Start Example Region Edit SpecsLab2 33 Quick Start e Check the recommended detector voltage Udet see specification of your analyzer e Validate the parameter set e Start Acquire This starts the data acquisition The spectrum will now build up in the Data Window For detailed description of all functions and parameter settings please check the corresponding chapters in this manual For quick access to your first measurement a short introduction about the File operation and Data window handling follow 3 2 File Operation ei Use the above shown menu icons to Load Save Save All data or simply use the File menu item Open CTRL O to load files Save CTRL S or Save As CTRL A to save the measured data region in a file
118. sCtrl 1 30 06 00 formula Uscr Ox0090 INFO HsaPhoibosCtrl 1 variables Ekin 10 000000 Ep 3 00 Ox0090 EXCEPTION HSA3500Analyzer CCD Phoibos Hsa3500 CORBA SystemException COR Ox00bf NOTICE CCDDetector bj CCDDetector CCDDetector Free nalyzer done 0 0098 CRITICAL CORBAServer HSA3500Analyzer WM_QUIT received 0x0098 NOTICE CORBAServer HSA3500Analyzer run terminated Ox0098 WARNING CORBAServer HSA3500Analyzer deincarnate all objects init Ox0098 NOTICE CORBAObject CurrExitPlane HSA3500Analyzer object deaktivated Ox0098 NOTICE CORBAObject CurrExitPlane HSA3500Analyzer deleting init Ox0098 NOTICE CORBAObject CurrExitPlane HSA3500Analyzer CORBAObject destructe Ox0098 NOTICE HSA3500Analyzer CCD Phoibos Hsa3500 HSA3500Analyzer deincarnation 0x0098 NOTICE HSA3500Analyzer CCD Phoibos Hsa3500 HSA3500Analyzer ShutdownHSA35 Ox0098 NOTICE HsaPhoibosCtrl 1 free DeviceNet ee rrems arans om x rr m Bund mar 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 3 3 3 3 4 4 4 4 4 4 4 Inn DD oooowqrnmoo000000000000000000000000000000000000000 SpecsLab2 115 SpecsSpy 116 SpecsLab2 Chapter LT LIST of Table Table 1 x ray source End of Acquisition Settings 65 Table 2 lon Source power supply e g PU IQE 12 38 or PS IQE 12 38 Remote Setting Parameter 69 Table 3 x ray source Remote Settings schedule
119. sLab2 was previously closed figure 4 7 Autosave options page 42 4 2 8 Recent Files Exit The recent files are sorted below the Print Setup item within the File menu The most recently used files can be simply loaded into SpecsLab2 Exit closes the SpecsLab program If you have changed data or have an acquisition running you will receive a confirmation window to cancel abort or save to this data 4 3 Data Structure P For file operations select the SpecsLab data format in the standard file dialog box e The default SpecsLab2 format is set to SpecsLab2 XML Data File format xml though other supported formats are listed following this one Extensible Markup Language XML is intended for data exchange and publishing on the World Wide Web Like HTML XML uses elements and structure XML differs from HTML in that it is extensible users may define a 42 SpecsLab2 Data Structure custom set of element tags XML provides users with more powerful capabilities than HTML XML defines an extremely simple dialect of SGML SGML is the Standard Generalized Markup Language ISO 8879 198 the international standard for defining descriptions of the structure of different types of electronic documents e The SpecsLab2BinaryDataFile format bin is used to compress file size and the following file formats which may result in a loss of information when read back into SpecsLab2 but may be more convenient and or porta
120. se Wh Multimedia BS Network I RSA Nutcracker 4 ODBC Datenquellen PC Card PCMCIA gF Ports Printers gt QuickTime Regional Settings SCSI Adapters eS Server ub Services E Sounds System Add Remove Properties Update Item Notes 3Com EtherLink 10 100 PCI TX NIC 3C905B Tx Select Network Adapter Click the Network Adapter that matches your hardware and then click OK If you have an installation disk for this component click Have Disk Network Adapter BY MicroGate SyncLink Internet Adapter BY NCR StarLAN 16 4 Token Ring Adapter BY Network Peripherals FDDI AT2 pon BY Network Peripherals FDDI AT3 BEB EUPA RTEA SA PPPE PEPP EA 1 PA ard DCLENMI x OK Cancel Figure 1 19 MS Loopback adaptor for SpecsLab1 1 9 Installation of CasaXPS If not updating from a previous installation and use CasaXPS program as a data processing tool some more components have to be installed These components are located in the folder CasaXPS on the installation CD Simply unzip the CasaXPS zip file Copy the unzipped folder from CD to your hard disk and run may cause errors because of incorrect folder permissions for CasaXPS Create a shortcut to your desktop and start menu if desired Read the CasaXPS manual doc folder for further instructions SpecsLab2 19 Installation 1 10 SpecsLab2 Update Instructions Please read these instructions carefully befo
121. ses the screen and restarts the acquisition from the left side The Hold Free toggle switch temporarily freezes the image The data is still acquired in the background and will be displayed upon pressing the Free button 10 2 7 Advanced Functions The Settings button in the centre of the screen opens a window that displays preset values for HSA3500 or detector specific parameters The HSA3500 settings are accessible if the Analyzer tab is active the detector settings are accessible when the Detector tab is active In the HSA3500 setting offset and gain for the logical voltages can be set In the detector settings window the following parameters can be set Channel Gain each channel is multiplied by the given factor before it is processed further This function can be used to eliminate asymmetries in the Spin detector setup Channel Threshold this parameter sets the threshold level in mV for the discriminators in the detector preamplifier Channel Deadtime each counter has a programmable dead time in nanoseconds After an event the counter will be unresponsive for the given time This function is helpful if spurious counts occur due to echoes in the signal lines Dwell Time this determines the minimum and maximum available dwell times in the detector Asymmetric Scale a Spin detector specific parameter The two virtual channels the asymmetry functions are multiplied by this value before they are displayed on the
122. sk 255 255 255 0 If not sure which IP Addresses to use please ask the network administrator 10 SpecsLab2 EtherCAN with EC10 1 7 EtherCAN with EC10 1 7 1 Comments regarding the EC10 The EC10 is an external CAN Bus adapter for the PC It is connected to the PC via an ethernet network The PC s access to CAN Bus controlled devices like Specs HSA3500 or Specs PCU300 etc is provided by the EC10 For detailed information about the EC10 including technical data see the PHOIBOS Hemispherical Energy Analyzer User Manual Communication between the PC and EC10 is handled by the standard TCP IP network protocol The section 1 7 2 on page 11 describes the steps to be taken for standard installation of EC10 In most cases it will be sufficient to read this section to make the EC10 ready for operation Possible reasons for using a second network card e If the number of available IP Addresses in the network is very limited the network administrator may refuse to leave an IP Address for the EC10 So a private network address range can be used e If the traffic on the network is extremely high the performance of the EC10 may degrade or the additional traffic of the EC10 may impede the communication on the network e If the network is directly connected to the internet without a firewall a separate network will increase the security against unauthorized access of the EC10 However the EC10 is password protected e If the
123. ss Energy Index Index Restore Defaults oa m Figure 5 5 X Axis property sheet In this sheet the long name of the X axis labels can be edited Which axis label appears in the Data Window depends on the scanned parameter for the region SpecsLab2 47 Viewing the Data Diagram Settings x Tite XAxis YAxis Sizes Font Colors Styles Intensity intensity Unit Counts Units Cps Restore Defaults ou am Figure 5 6 Y Axis property sheet This sheet allows you to edit the name of the Y axis labels Which axis label appears in the Data Window can be selected via the cps counts button in Data View on page 50 Diagram Settings x Tile XAxis YAxis Sizes Font Colors Styles Minimum Screen Size mm x fel ooo Y fo Size on Paper mm x feo Y FI Position on Paper mm x fo vd fo Z Axis xfo ft Restore Defaults Figure 5 7 Sizes property sheet The property sheet sets the Minimum Screen Size the Size and Position on Paper as well as the Z Axis percentage Use the Print Preview to check out the correct values for the positioning on paper Diagram Settings x Tile XAxis YAxis Sizes Font Colors Styles Foreground Sample Background Restore Defaults OK Cancel Apply Figure 5 8 Font colors property sheet The common properties for Font Foreground and Background styles can be edited 48 SpecsLab2 Toolbars Diagram Settings x
124. t of the View menu conforms to the Tool bar Data View see section 5 3 2 on page 50 except the Diagram Settings item The Diagram Settings is explained in paragraph section 5 2 1 and the other View menu items are described in the corresponding Toolbar sections in section 5 3 Toolbars on page 49 46 SpecsLab2 View Menu 5 2 1 Diagram Settings The Diagram Settings item within the View menu shows a property window with several property sheets for your Data Windows Choose the desired sheet from the window via the named Tabs to edit the default parameter Some sheets can be restored to their default settings by pressing the Restore Defaults button Title x Axis YAxis Sizes Font Colors Styles Title SPECS PHOIBOS 150 MCD 5 PrintInfo The sample was sputtered with Ar 3keV 10uA cancel am Figure 5 4 Title property sheet Use the Title sheet to set your desired title in the top of the Data Window as well as for the print The Print Info field allows to write a comment for your experiment The size of the Print Info should adapt to your chosen printer setting Landscape Portrait You can also check the Print Preview in the File menu before printing See Printing on page 99 Diagram Settings x Tite Axis Y Axis Sizes Font Colors Styles Ebin Binding Energy Ubias Bias Voltage Eexc Excitation Energy Udet Detector Voltage Ekin Kinetic Energy WF Effective Workfunction Epass Pa
125. t shows the peak position measured with this default value Changes in the Region Edit window via the Work Function field will only applied to this special modified region Region Edit window fields on page 78 The single voltage modules are calibrated Possible Gain or Offset corrections can apply in the Analyzer Settings window for the named voltage modules Close the window by the ok button will store the changed values within the analyzer supply 6 1 1 1 Detector Scan Even though the detector is described in each analyzer manual please find an example in this software section Note that the detector scan is important to set the proper detector voltage and dangerous for the channeltrons The detector check should be done monthly choose kinetic energy of 400eV Region Edit Name Group Analyzer Acquisition Date Detector 4 Sri Detector FHOIBOS H543500 150 oe 0 02 10 05 41 Method Entrance and Exit Slit Lens Mode Analysis Mode Ps 27x20 Espen Medium res zj DetectorVvaltageScan zj Eec Ekin Epas T Ubias T Udet Start Tw 1253 6 399 88 fi 30 1400 aan Ekin E pass Udet Step Udet End Yalues Scans Dwell Time Comment Default Values 100 wW 10 KM 70 nA sad E Save Frewiaus Next New validate Acguire Clear Figure 6 4 Region Edit window for a detector scan SpecsLab2 a54 a A 74 2 sd a A oJ 14 1 6 1 8 2 2 2 24 2 6 2 8 Detector Voltage 10 V Figure 6 5
126. the result Higher points at one end of the averaging interval are on the average balanced by lower points at the other end A bias is introduced however if the underlying function has a nonzero second derivative At a local maximum for example moving window averaging always reduces the function value In the spectrometric application a narrow peak has its height reduced and its width increased Since these parameter are themselves of physical interest the bias introduced is distinctly undesirable The idea of Savitzky Golay filtering is to find filter coefficients c that preserve higher moments SpecsLab2 fit a polynomial of degree M ini to the values f _ z fi 4ng For more detailed description please read the literature Select the settings for the Savitzky Golay Smooth in the Operations menu and choose your desired parameter for the Savitzky Golay Smooth in the settings window The settings below shows a usual parameter set for a common spectra Savitzky Golay Smooth Settings Left Data Points Right Data Points Polyrom Order Dernyvation Order Figure 7 14 Savitzky Golay Smooth Settings example and result in a smoothed spectra solid line as shown in figure 7 15 7 7 1 Derivation For another purpose namely the computation of numerical derivatives the useful choice is Derivation Order 1 The filtered first derivative is the convolution equation EQ 7 4 page 94 divided by the step size For derivatives on
127. tion window Abort Depth Profiling and Error Handling In case of operator aborted Depth Profiles the ion sputtering the data acquisition and the excitation source activities are stopped immediately and the excitation source is adopting the end conditions presetted in the dialog box see table 1 The ion source will attain the break state defined The power supplies of the excitation and the ion sources remain in remote or enable local modes Therefore a subsequent depth profile could be re started quickly In case of error messages time outs of analyzer and source power supplies as well as other obvious malfunctions the situation should be diagnosed Because the main SpecsLab program will not get reverse information about the source s states the data acquisition could remain Stop the data acquisition and save the partly failed results Switch Source server and Depth Profile server to none Check the modes of the power supplies whether they are local enable local or remote Analyze the situation and put the power supplies into standby mode or re initialize all devices to regain the start position for a further depth profile To start IgControl the Depth Profile server should be set to none otherwise an error message would occur about serial port opening failure In the event the sources must be switched manually from remote to local or cutted off from mains e g in emergency situations set
128. ttings may be redefined and the operation repeated When the Optimize Range button is selected the range is adjusted within the visibile region to achieve the lowest reasonable background 86 SpecsLab2 Background The operation is applied to the visible selected regions and within the visible x axis range in the Data window Within the File window only a single region can be selected Multiple regions can be selected in the Regions window Several background types may be selected e None e Linear e Tougaard e Shirley To start with a defined background select the Background item in the Operations menu After pressing the Background item the background changes in the region visible in the Data window 7 2 1 Mathematical Details of Background Calculation Peaks appear on a background The measurement of the peak area for quantification involves decisions about the precise background to use In literature a range of methods have been used to define the background In SpecsLab either a background method of Linear Shirley Tougaard or None can be chosen 7 2 1 1 Linear Background The most popular method is the straight line drawn between two suitable points named here Linear The endpoints are calculated selecting several points from the extrems within the visible regions along the energy axis and performing a linear least square fit to those points Where range optimization
129. ult compact or customized installation SPECS recommends the typical installation For customized installation please contact SPECS service call 49 30 467824 0 or send email to support specs de When the installation has finished and the PC has rebooted start data acquisition provided all electronics are properly connected to the PC SpecsLab2 saves per user program configuration data Therefore one would usually not run the program as Administrator but prefer to use the own user account or one especially created for using SpecsLab2 For Windows 2000 or XP please run SpecsLab2 always as Administrator or with administrator rights for the SPECS program see Running SpecsLab2 on Windows 2000 and Windows XP with non administrator accounts on page 8 6 SpecsLab2 Installing SpecsLab 2 x 1 5 4 The Windows NT 2000 XP Registry The registry is a database that contains information pertaining to the hardware user and application settings of the computer The registry is divided up into different sections that are referred to as subtrees Each subtree contains information that pertains to different aspects of your server E E hy Computer Gg HKEY_CLASSES_RDOT lg HKEY_CURRENT_USER H E HKEY_LOCAL_MACHINE fq HKEY_USERS Gg HKEY_CURRENT_CONFIG La E HKEY_DYN_DATA Figure 1 4 Subtrees of the Windows NT 2000 XP registry The SpecsLab2 Software uses two subtrees of the registry e CURRENT_USER This subtree contains
130. ured and ready to use with the Specs software If the configuration fails the program will give an error message The most common error messages and causes for failure are e ERROR No Response from Device The IP Address to which the EC10 shall be configured is not reachable by the PC Please check that the IP Address has been entered correctly and retry the configuration It is very important that the IP Address of the PC and of the EC10 belong to the same subnet of the network e ERROR WSAStartup failed Please make sure that the TCP IP protocol on the PC is activated and configured correctly e ERROR bind failed There may be another program running on the PC that occupies the port number UDP 1962 that the configuration program will use Please try to terminate all processes on the PC that are not absolute necessary then retry the configuration process If the configuration tool gives no message at all and looks like figure 1 12 after pressing the CFG button the network connection between PC and EC10 may be not working correctly Please check the network cables between PC and HUB switch and between HUB switch and EC10 Final check gt STEP 1 Start Run and type regedit gt STEP 2 HKEY_LOCAL_MACHINE SOFTWARE Specs DeviceNetServer gt STEP 3 Check the parameters as shown in the figure below ab Default u lab DLL EtherCan dll lab DLLParams 192 168 236 16 lt i IP address of the EC10 I
131. ve Ctrl 5 Save Ag Ctrl Export Save Al Settings H Bestoe Autosare Print Ctrl P Print Preview 1 calib3 sml Exit Ctrl Figure 4 2 File menu and Main Tool bar icons Use above shown menu icons to e Open CTRL O files e Save CTRL S or Save As CTRL A to save the measured data regions in a file or e Save All CTRL L to save the complete file structure shown in the Files window all files Please note If no file is selected the items Save and Save As as well as Close are disabled 38 SpecsLab2 Menu File Region Operation 4 2 Menu File Region Operation 4 2 1 New File New Group New File creates a new file as a root for groups and regions Single Files can be saved separately with Save or Save As in the file menu New Groups add a new group to the selected File or create a group in a new lig file if no file was selected 4 2 2 New Region For a new experiment simply add a region menu File New Region The new R region appears in the Files window as well as in the Regions and Region Edit window inside the selected file and group Note The energy values chosen in the Data window display zoom function or other regions displayed will be used as the start and end values for the new region If a region has already been selected all region parameters except start and end see above of this selected region will be used to create a new region Lens Mode Slit
132. xample the switching between dual XR 50 XRC 1000 to monochromator x ray Source XR50M FOCUS500 finish the XRaySource server operation by none and select the monoXRaySource server as new choice At the end of the data acquisition and source 66 SpecsLab2 Analyzer Settings operation please select finally none The XRC1000 XR1000M or XR20 will return to local The same procedure as described above i e to switch to none is advised in case of error messages poped up by the SpecsLab2 program or incorrect reactions by the Source power supplies 6 1 3 Remote Control Beside the analyzer and source interface control discussed in the sections above the SpecsLab2 program includes other optional possibilities to perform and control the measurement After installation of the designated software feature the Remote section of the Analyzer Settings window can be activated for this purpose IRemote is a SpecsLab s interface for controlling remote servers e g sputter devices manipulators or digital voltmeters The connected remote server will be triggered at certain states in the measuring process These states are enumerated as RemoteFrequency Never PerRegion PerScan PerValue AfterRegion AfterScan AfterValue 6 1 3 1 Depth Profile SpecsLab2 allows to proceed depth profiles in combination with a remote controlled ion source For example the SpecsLab2 DepthProfile server can be selected in SpecsLab2 to

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