Cryopump Frequency Converter
Contents
1. II STATIC CHARGE 250 PSIG He RETURN SUPPLY GAS GAS REPLACE HELIUN FILTER CARTRIDGE AT RECOMMENDED INTERVAL dad Y PRESSURE FOR SERVICE CALL 1 800 FOR GUTS O O GAS CHARGE 387 4687 Oo li J IN BOARD POWER O T E A 8200 Compressor Figure 3 6 8200 Three Phase Compressor with Cryo Torr Cryopumps Brooks Automation 8040520 Revision AA 8040520 3 12 8510 Compressor with On Board Cryopumps This procedure involves the following components 8510 Low Voltage Compressor CTI CRYOGENICS P N 8031315 Frequency Converter CTI CRYOGENICS P N 8043202G002 8124106G002 or 8124114G002 which includes On Board Power Cable CTI CRYOGENICS P N 8112463G050 On Board Cryopumps NOTE NOTE If installing a new 8510 Compressor along with the Frequency Converter refer to the 8510 Compressor Installation Operation and Service manual CTI CRYOGENICS P N 8040232 for information on setting the control module to the proper operating voltage range before installing the Frequency Converter Carefully place the Frequency Converter on top of the 8510 Compressor as shown in Figure 2 7 Connect the three On Board power cables to the ON BOARD POWER OUT outputs 1 2 and 3 on the Frequency Converter NOTE Make sure the On Board Cryopump Power cable is conn2. Brooks Frequency Converter Installation Instructions 8040520 Revision AA Frequency Converter Installation Instructions Information provided within this document is subject to change without notice and although believed to be accurate Brooks Automation assumes no responsibility for any errors omissions or inaccuracies AcuLigner AquaTran Assure AutoTeach AXM Basic Blue BiSymmetrik CenterSmart Cool Solutions Crate to Operate e RMA e Spares FastRegen FIXLOAD FrogLeg Fusion InLigner In Sight InCooler Interface Jet Jet Engine M2 Nano PASIV PowerPak Perfor manceBlue PowerPak PowerTools QuadraFly Radius Razor Reliance Reliance ATR RetroEase SCARA SmartPM SPOTLevel Synetics The New Pathway to Productivity Time Optimal Trajectory Time Optimized Path TopCooler TopLigner Ultimate Blue AC 407 Vacu Tran and Vision are trademarks of Brooks Automation AcuTran AeroLoader AcuTrap Brooks Brooks Automation Conductron Convectron Cryodyne Cryotiger E VOLUTION GOLDLink Granville Phillips Guardian GUTS Hercules In Sight Leap frog Ma naTran MapTrak Marathon Marathon Express Micro lon MiniConvectron MultiTran On Board Polycold Stabil lon TrueBlue TurboPlus We Deliver Productivity and
3. CAUTION A signal word that indicates a situa tion or unsafe practice which if not avoided may result in equipment damage A CAUTION is highlighted in yellow CAUTION A signal word accompanied by a safety shape that indicates a poten tially hazardous situation or unsafe practice If not avoided the action may result in minor or moderate personal injury or equipment damage A CAUTION is highlighted in yellow WARNING A signal word accompanied by a safety shape that indicates indicates a potentially hazardous situation If not avoided the action may result in serious injury or death AWARNING is highlighted in orange Brooks Automation 8040520 Revision AA Safety Shape Descriptions All cautions and warnings contain safety shapes which have specific safety mean ings The following table shows some of the safety shapes used in this document and their meanings Table 2 2 Safety Shapes Example Term Shape Definition Indicates a general hazard Details General Warning about this hazard appear in the safety notice explanation High Voltage Indicates a high voltage hazard Indicates a surface is hot enough to Hot Surface cause discomfort or a burn References For more information about safety standards see the following documents ISO 7010 2003 E Graphic symbols Safety colours and safety signs Safety signs used in workplaces and publi
4. On Board and Cryo Torr Cryopumps Frequency Converter Applications The Frequency Converter supports various configurations of CTI CRYOGENICS compressors and cryopumps Refer to Section 2 Installation for information on installing the Frequency Converter for your particular compressor and cryopump application Specifications Table 1 1 Frequency Converter General Specifications Weight 50 Ibs 22 67 kg Ambient Temperature 50 100 F 10 38 C Brooks Automation 8040520 8040520 Revision AA 1 1 CTI CRYOGENICS HELIX TECHNOLOGY CORPORATION Front Panel View RS RERORORSRORSRGRSRORSRORORORSRORORSRSRORORORCRORSRORSRORSRORORORORO RON O O OO O0 O0O0OO0OOOOOOOO0 OO OO O0 OO OO OO OO O OO O LTI COMPRESSOR CRYO TORR CRYO TORR POWER OUT REMOTE POWER IN 1 3 CUSTOMER ON BOARD ON BOARD POWER OUT REMOTE POWER IN Rear Panel View Figure 1 1 Frequency Converter Chassis Front and Rear Views 8040520 Brooks Automation 1 2 1 00 MIN Ka 13 38MAX 25 40MM 339 85MM 5 EE EE EE EE 5 SOMAX 139 ZOMM 35MAX 8 89MM 18 OOMAX 457
5. Zaris are registered trademarks of Brooks Automation All other trademarks are properties of their respective owners Brooks Automation 2012 All Rights Reserved The information included in this manual is Brooks Proprietary Information and is provided for the use of Brooks customers only and cannot be used for distribution reproduc tion or sale without the express written permission of Brooks Automation This information may be incorpo rated into the user s documentation however any changes made by the user to this information is the responsibility of the user Brooks For Technical Support Location GUTS Contact Number Nan America 1 800 FOR GUTS 1 800 367 4887 1 978 262 2900 Europe 49 1804 CALL GUTS 49 1804 2255 4887 Japan 81 45 477 5980 China 86 21 5131 7066 Taiwan 886 3 5525225 Korea 82 31 288 2500 Singapore 65 6464 1481 Visit us online www brooks com May 23 2012 Part Num 8040520 Revision AA Oct 14 2008 Part Num 8040520 Revision 103 This technology is subject to United States export Administration Regulations and authorized to the destination only diversion contrary to U S law is prohibited Printed in the U S A Brooks Automation 8040520 Revision AA Contents Introduction Fl m 1 1 Frequency Converter Applications e serr s sa hr db ERR PER ERES ER REESE ENS 1 1 DPR lvo i MaTNOMPIMRNMCITTC C IA EAE E E
6. and the CRYOPUMPS 1 OUT connector on the 8011 Controller 6 Turn on SYSTEM POWER at the compressor Brooks Automation 8040520 8040520 Revision AA 3 19 CAUTION Allow a 1 0 inch minimum space above the top of the Frequency Converter for adequate ventilation Frequency Converter CTI CRYOGENICS P N 8043202G002 P N 8124106G002 gt or P N 8124114G002 Input Power Cable On Board Cryopump Power Cables CTI CRYOGENICS P N 8112463GXXX On Board 8011 coypnesson Controller On Board Power Cable CTI CRYOGENICS P N 8112463G050 On Board Cryopump Power Cable Hard wired to 1020R Compressor 1020R Compressor Ep c Power Cabe 1 Figure 3 10 1020R Compressor with On Board Cryopumps 8040520 3 20 Brooks Automation 8040520 Revision AA 1020R Compressor with Cryo Torr Cryopumps This procedure involves the following components 1020R Compressor CTI CRYOGENICS P N 8031023G001 and G002 Frequency Converter CTI CRYOGENICS P N 8043202G001 8124106G001 or 8124114G001 which includes the Frequency Converter Cable Kit CTI CRYO GENICS P N 8080005K012 Cryo Torr Cryopumps NOTE NOTE If installing a new 1020R Compressor along with the Frequency Con verter refer to the 1020R Compressor Installation Operation and Service manual CTI CRYOGENICS P N 8040274 for information on setting the control module to the prope
7. following components 1020R Compressor CTI CRYOGENICS P N 8031023G001 and G002 On Board 8011 Controller Frequency Converter CTI CRYOGENICS P N 8043202G002 8124106G002 or 8124114G002 which includes On Board Power Cable CTI CRYOGENICS P N 8112463G050 On Board Cryopumps NOTE Ifinstalling a new 1020R Compressor along with the Frequency Converter refer to the 1020R Compressor Installation Operation and Service manual CTI CRYOGENICS P N 8040274 for information on setting the control module to the proper operating voltage range before installing the Frequency Converter NOTE If installing a new 8011 Controller along with the Frequency Converter refer to the 8011 Controller and 8011 Control Module manual CTI CRYOGENICS P N 8040309 for proper setup information before installing the Frequency Converter 1 Carefully place the On Board 8011 Controller on top of the 1020R Compressor as shown in Figure 2 10 2 Carefully place the Frequency Converter on top of the 8011 Controller as shown in Figure 2 10 3 Connect the three On Board cryopump power cables CTI CRYOGENICS P N 81122463GXXX into the ON BOARD POWER OUT connectors 1 2 and 3 on the Frequency Converter as shown in Figure 2 10 4 Connect the cryopump power cable hard wired to the compressor to the COLD HEADS1 IN connector on the 8011 Controller 5 Connect the On Board power cable CTI CRYOGENICS P N 8112463G050 supplied to the On Board POWER IN input on the converter
8. 20 8040520 Revision AA 3 15 CAUTION Allow a 1 0 inch minimum space above the top of the Frequency Converter for adequate ventilation Frequency Converter CTI CRYOGENICS P N 8043202G002 P N 8124106G002 or P N 8124114G002 On Board 8011 Controller On Board Cryopump ar J Power Cables m CTI CRYOGENICS A P N 8112463GXXX On Board Cryopump Power Cables CTI CRYOGENICS P N 8112463G050 Input Power Cable 8500 Compressor Power Cable Cryopump Cable CTI CRYOGENICS P N 8043054P050 8500 Compressor Figure 3 8 8500 Compressor with an On Board Cryopump 8040520 Brooks Automation 3 16 8040520 Revision AA 8500 Compressor with Cryo Torr Cryopumps This procedure involves the following components 8500 Compressor CTI CRYOGENICS P N 8031348G001 or G002 Frequency Converter CTI CRYOGENICS P N 8043202G001 8124106G001 or 8124114G001 which includes Frequency Converter Cable Kit CTI CRYOGEN ICS P N 8080005K012 which can be used with an optional remote Cryo Torr Cryopumps NOTE Ifinstalling a new 8500 Compressor along with the Frequency Converter refer to the 8500 Compressor Installation Operation and Service manual CTI CRYOGENICS P N 8040324 for information on setting the control module to the proper operating voltage range before installing the Frequency Converter Carefully place the Frequency Converter on top of the 8500 C
9. 20MM Figure 1 2 Frequency Converter Dimensions Brooks Automation 8040520 8040520 Revision AA 1 3 8040520 Brooks Automation 1 4 2 Safety Overview This chapter describes safety conventions for the Brooks Automation Product All personnel involved in the operation or maintenance of the product must be familiar with the safety precautions outlined here NOTE These safety recommendations are basic guidelines If the facility where the Prod uct is installed has additional safety guidelines they should be followed as well along with the applicable national and international safety codes Introduction Follow all safety precautions during installation normal operation and when servic ing CTI Cryogenics products This chapter explains the safety conventions used throughout this manual CTI Cryo genics uses a specific format for cautions and warnings which includes standard sig nal words and safety shapes See also the Customer Support appendix or call your local Customer Support Center for assistance Signal Word Descriptions All cautions and warnings contain signal words which call attention to safety mes sages and designate the degree of hazard seriousness The following table shows the signal words and their meanings that may be used in this document Brooks Automation 8040520 8040520 Revision AA 2 1 8040520 Table 2 1 Safety Signal Words Term Example Definition
10. Cable CAC CTI CRYOGENICS it P N 8112463GXXX COLD HEAD ON BOAR POWER POWE RE ETURN SUPPLY S GAS REPLACE HELIUM FILTER CARTRIDGE AT RECOMENED INTERVAL om ie D O PRESSURE e FOR SERVICE CALL 800 FOR GUTS o o GAS CHARGE 357 4887 O i 8200 Compressor Figure 3 3 8200 Single Phase Compressor with an On Board Cryopump 8040520 3 6 Brooks Automation 8040520 Revision AA 8200 Single Phase Compressor with Cryo Torr Cryopumps This procedure involves the following components 8200 Single Phase Water or Air Cooled Compressor Frequency Converter CTI CRYOGENICS P N 8043202G008 8124106G003 or 8124114G003 which includes power cable CTI CRYOGENICS P N 8043072G050 Cryo Torr Cryopumps NOTE If installing a new 8200 Compressor along with the Frequency Converter refer to the 8200 Compressor Installation Operation and Service manual CTI CRYOGENICS P N 8040353 for information on setting the control module to the proper operating voltage range before installing the Frequency Converter Carefully place the Frequency Converter on top of the 8200 Compressor as shown in Figure 2 4 Connect the Cryo Torr Cryopump power cable CTI CRYOGENICS P N 8032222GXXX between one of the CRYO TORR POWER OUT connectors on the rear panel of the Frequency Conv
11. E EE E 1 1 Safety Lig QOT G E ku RR ROC E RO RE 2 1 Signal Word Descrip ON 5y san E PRG a ENEE 2 1 Salety Shape RCN ON Lea 2d abd Yd copo d de i ee o bebo 2 eee 2 3 REG atri e 2 3 Installation Madia ai 3 1 9600 Compressor with On Board Cryopumps 46 05 6004 k kk a 3 1 9600 Compressor with Cryo Torr Cryopumps sees 3 3 8200 Single Phase Compressor with an On Board Cryopump 3 5 8510 Compressor with On Board Cryopumps sciiti kes 3 13 8500 Compressor with Cryo Torr Cryopumps kk KK KK k 3 17 1020R Compressor with On Board Cryopumps KK kk 3 19 1020R Compressor with Cryo Torr Cryopumps kk kk a 3 21 Brooks Automation 8040520 8040520 Revision AA 1 Appendices Mori o Arm 4 1 Appendix A Customer Support Information 4 2 Customer Support Center LocatioOhS8 IRON senders k alya ala PT 4 2 Guaranteed Up Time Support GUTS LL 4 2 Product oe hn nn 4 453 kwa EE tbe e 4 2 jjj jjj 4 2 8040520 Brooks Automation 2 8040520 Revision AA 1 Introduction Purpose The Frequency Converter P N 8043202G001 G005 8124106G001 G005 and 8124114G001 G005 allows CTI CRYOGENICS equipment to operate efficiently when connected to a supply voltage with a line frequency of 50Hz The Frequency Converter shown in Figure 1 1 is designed for use with CTI CRYO GENICS 9600 8200 8510 8500 and 1020R compressors and
12. ability NOTE If installing a new 8200 Compressor along with the Frequency Converter refer to the 8200 Compressor Installation Operation and Service manual CTI CRYOGENICS P N 8040353 for information on setting the control module to the proper operating voltage range before installing the Frequency Converter Carefully place the Frequency Converter on top of the 8200 Compressor as shown in Figure 2 6 Connect the Cryo Torr Cryopump power cable CTI CRYOGENICS P N 8032222GXXX between one of the CRYO TORR POWER OUT connectors on the rear panel of the Frequency Converter and the connector on the Cryo Torr Cryopump as shown in Figure 2 6 Connect the power cable CTI CRYOGENICS P N 8043054G050 between the CRYO TORR POWER IN connector on the rear panel of the Frequency Con verter and the COLD HEAD POWER connector on the rear panel of the 8200 compressor as shown in Figure 2 6 Set the Power Switch on the front panel of the 8200 compressor to the ON posi tion Brooks Automation 8040520 8040520 Revision AA 3 11 CAUTION Allow a 1 0 inch minimum space above the top of the Frequency Converter for adequate ventilation Power Cable CTI CRYOGENICS Power Cable 43054 P N 8043054G050 CTI CRYOGENICS P N 8032222GXXX zu d To Cryo Torr V oe Cryopump Frequency Converter CTI CRYOGENICS P N 8043202G001 P N 8124106G001 or P N 8124114G001 4 N ON BOARD FOHER QUT 2 z CON fr m VET UN N
13. c areas ISO 3864 1 2002 E Graphic symbols Safety colours and safety signs Part 1 Design principles for safety signs in workplaces and public areas Brooks Automation 8040520 8040520 Revision AA 2 3 8040520 Brooks Automation 2 4 8040520 Revision AA Installation Introduction This chapter provides all the information needed to connect the Frequency Converter to the 9600 8200 8510 8500 and 1020R Compressors which in turn are connected to On Board or Cryo Torr Cryopumps 9600 Compressor with On Board Cryopumps This procedure involves the following components 9600 Low Voltage Compressor CTI CRYOGENICS P N 8135900G001 Frequency Converter CTI CRYOGENICS P N 8043202G002 8124106G002 or 8124114G002 which includes On Board Power Cable CTI CRYOGENICS P N 8112463G050 On Board Cryopumps NOTE If installing a new 9600 Compressor along with the Frequency Converter refer to the 9600 Compressor Installation Operation and Service Instructions man ual CTI CRYOGENICS P N 8040444 1 Carefully place the Frequency Converter on top of the 9600 Compressor as shown in Figure 2 1 2 Connect the three On Board power cables to the ON BOARD POWER OUT outputs 1 2 and 3 on the Frequency Converter 3 Connect the On Board Cryopump power cable P N 8112463G050 supplied between the ON BOARD POWER IN input on the Frequency Converter and the cryopump electrical outlet on the 9600 compressor 4 Set the control cir
14. cuit breaker on the rear panel of the 9600 compressor to the ON position Brooks Automation 8040520 8040520 Revision AA 3 1 CAUTION Allow a 1 0 inch minimum space above the top of the Frequency Converter for adequate ventilation Frequency Converter CTI CRYOGENICS P N 8043202G002 P N 8124106G002 or CUSTOMER ON BOARD ON BOARDPPOWER CUT REMOTE POWER IN 1 2 2 P N 8124114G002 On Board Cryopump Power Cables CTI CRYOGENICS P N 8112463GXXX Figure 3 1 9600 LV Compressor with On Board Cryopumps 8040520 3 2 Brooks Automation 8040520 Revision AA 9600 Compressor with Cryo Torr Cryopumps This procedure involves the following components 9600 Low Voltage Compressor CTI CRYOGENICS P N 8135900G001 Frequency Converter CTI CRYOGENICS P N 8043202G005 8124106G005 or 8124114G005 which includes a cryopump power cable CTI CRYOGENICS P N 8043209G050 Cryo Torr Cryopumps NOTE If installing a new 9600 Compressor along with the Frequency Converter refer to the 9600 Compressor Installation Operation and Service Instructions man ual CTI CRYOGENICS P N 8040444 1 Carefully place the Frequency Converter on top of the 9600 Compressor as shown in Figure 2 2 2 Connect the three cryopump power cables to the CRYO TORR POWER OUT out
15. ected to COLD HEAD 3 output on the compressor in step 3 The CUSTOMER REMOTE capability will not function if connected to output 1 or 2 3 Connect the On Board Cryopump power cable P N 8112463G050 supplied between the ON BOARD POWER IN input on the converter and the COLD HEAD 3 output on the compressor 4 Set the Power Switch on the front panel of the 8510 compressor to the ON posi tion Brooks Automation 8040520 8040520 Revision AA 3 13 CAUTION Allow a 1 0 inch minimum space above the top of the Frequency Converter for adequate ventilation Frequency Converter CTI CRYOGENICS P N 8043202G002 P N 8124106G002 or P N 8124114G002 On Board Cryopump Power Cables CTI CRYOGENICS P N 8112463GXXX Frequency Converter Power Cable CTI CRYOGENICS P N 8112463G050 NOTE Must be connected to COLD HEAD 3 connector to Support remote option 8510 Compressor Figure 3 7 8510 Compressor witl On Board Cryopumps 8040520 Brooks Automation 3 14 8040520 Revision AA 8500 Compressor with On Board Cryopumps This procedure involves the following components 8500 Compressor CTI CRYOGENICS P N 8031348G001 or G002 e Frequency Converter CTI CRYOGENICS P N 8043202G002 8124106G002 or 8124114G002 which includes Frequency Converter Cable Kit CTI CRYOGEN ICS P N 8080005K012 8011 Compressor Controller On Board Cryopumps NOTE NOTE If installing a new 8500 Compressor along with the Frequ
16. ency Converter refer to the 8500 Compressor Installation Operation and Service manual CTI CRYOGENICS P N 8040324 for information on setting the control module to the proper operating voltage range before installing the Frequency Converter NOTE Ifinstalling a new 8011 Controller along with the Frequency Converter refer to the 8011 Controller and 8011 Control Module manual CTI CRYOGENICS P N 8040309 for proper setup before installing the Frequency Converter 1 Carefully place the 8011 Controller on top of the 8500 compressor as shown in Figure 2 8 2 Carefully place the Frequency Converter on top of the 8011 Controller as shown in Figure 2 8 NOTE NOTE Make sure the cryopump cable is connected to COLD HEAD 3 output on the compressor The CUSTOMER REMOTE capability will not function if con nected to output 1 or 2 3 Connect the cryopump cable CTI CRYOGENICS P N 8043054P050 between COLD HEAD 3 connector on the 8500 Compressor and 1 IN connector on the 8011 Controller 4 Connect the On Board power cable CTI CRYOGENICS P N 8112463G050 between the 1 OUT connector on the 8011 Controller and the ON BOARD POWER IN connector on the Frequency Converter 5 Connect the On Board Cryopump power cables CTI CRYOGENICS P N 8112463GXXX between the ON BOARD POWER OUT connectors on the Frequency Converter and the On Board Cryopumps 6 Set the Power Switch on the front panel of the 8500 compressor to the ON position Brooks Automation 80405
17. erter and the connector on the Cryo Torr Cryopump as shown in Figure 2 4 Connect the power cable CTI CRYOGENICS P N 8043072G050 between the CRYO TORR POWER IN connector on the rear panel of the Frequency Con verter and the COLD HEAD POWER connector on the rear panel of the 8200 compressor as shown in Figure 2 4 NOTE Make sure the Frequency Selector Switch is set to the 60Hz position Failure to do so will result in improper system operation 4 Set the Frequency Selector Switch on the front panel of the 8200 compressor to the 60Hz position 5 Set the Power Switch on the front panel of the 8200 compressor to the ON posi tion Brooks Automation 8040520 8040520 Revision AA 3 7 CAUTION Allow a 1 0 inch minimum space above the top of the Frequency Converter for adequate ventilation Power Cable CTI CRYOGENICS P N 8043072G050 Frequency Converter CTI CRYOGENICS P N 8043202G003 P N 8124106G003 or Power Cable CTI CRYOGENICS P N 8032222GXXX P N 8124114G003 SS CN BOARDPPOWER OUT 1 2 3 To Cryo Torr Cryopump STATIC CHARGE POWER 250 PSIG He RETURN SUPPLY BAS GAS REPLACE HELIUM FILTER CARTRIDGE Lp C AT RECOMENED INTERVAL ff YN 7 D PRESSURE en FOR SERVICE CALL 1 800 FDR BUTS O O GAS CHARGE 367 4897 o o c N _______ oF o
18. ime Support GUTS cece eens 4 2 Product AACE ss 2 k daa a za Gua d OCA Ex dla b Eb ipe WA 4 2 i sayan en S pa FRE ER ee eee do PACEM d dU ICE Oe CR Edo d 4 2 Brooks Automation 8040520 8040520 Revision AA 4 1 Appendix A Customer Support Information Customer Support Center Locations To locate a Customer Support Center near you please visit our website www brooks com on the world wide web and select CONTACT on the home page Guaranteed Up Time Support GUTS For 24 hour 7 day per week Guaranteed Up Time Support GUTS dial 1 800 367 4887 Inside the United States of America 1 508 337 5599 Outside the United States of America Product Information Please have the following information available when calling so that we may assist you e Product Part Number e Product Serial Number Product Application Specific Problem Area Hours of Operation Equipment Type e Vacuum System Brand Model Date of Manufacture E mail For your convenience you may also e mail us at techsupport brooks com 8040520 Brooks Automation 4 2 8040520 Revision AA
19. o S 7 A T E 8200 Compressor Figure 3 4 8200 for Single Phase Compressor with Cryo Torr Cryopumps 8040520 3 8 Brooks Automation 8040520 Revision AA 8200 Three Phase Compressor with an On Board Cryopump This procedure involves the following components 8200 Three Phase Compressor Frequency Converter CTI CRYOGENICS P N 8043202G002 8124106G002 or 8124114G002 which includes On Board Cryopump power cable CTI CRYO GENICS P N 8112463G050 One On Board Cryopump NOTE If installing a new 8200 Compressor along with the Frequency Converter refer to the 8200 Compressor Installation Operation and Service manual CTI CRYOGENICS P N 8040353 for information on setting the control module to the proper operating voltage range before installing the Frequency Converter Carefully place the Frequency Converter on top of the 8200 Compressor as shown in Figure 2 5 Connect the On Board Cryopump power cable CTI CRYOGENICS P N 8112463GXXX between one of the ON BOARD POWER OUT connectors on the rear panel of the Frequency Converter and the POWER IN connector on the On Board Cryopump Module as shown in Figure 2 5 Connect the power cable CTI CRYOGENICS P N 8112463G050 supplied between the ON BOARD POWER IN connector on the rear panel of the Fre quency Converter and the ON BOARD POWER connector on the rear panel of the 8200 compressor as shown in Figure 2 5 Set the Power Switch on the front panel of the 8200 compressor to the ON po
20. ompressor as shown in Figure 2 9 Connect the cables to the corresponding CRYO TORR POWER outputs 1 2 and 3 on the Frequency Converter Connect the standard remote cable between the COMPRESSOR REMOTE input on the converter and the REMOTE input on the compressor optional Connect the Power Cable between the CRYO TORR POWER IN input on the converter and the COLD HEAD 3 output on the compressor NOTE Make sure the cryopump cable is connected to COLD HEAD 3 output on the com pressor The CUSTOMER REMOTE capability will not function if connected to output 1 or 2 5 Set the Power Switch on the front panel of the 8500 compressor to the ON posi tion Brooks Automation 8040520 8040520 Revision AA 3 17 CAUTION Allow a 1 0 inch minimum space above the top of the Frequency Converter for adequate ventilation Frequency Converter CTI CRYOGENICS P N 8043202G001 P N 8124106G001 or Cryo Torr Cryopump P N 8124114G001 Power Cables CTI CRYOGENICS P N 8032222GXXX Standard Remote Cable CTI CRYOGENICS P N 8043042P050 optional Frequency Converter Power Cable CTI CRYOGENICS P N 8043054G050 NOTE Must be connected to COLD HEAD 3 connector to support remote option 8500 Compressor Figure 3 9 8500 Compressor with Cryo Torr Cryopumps 8040520 Brooks Automation 3 18 8040520 Revision AA 1020R Compressor with On Board Cryopumps This procedure involves the
21. puts 1 2 and 3 on the Frequency Converter 3 Connect the cryopump power cable P N 8043209G050 supplied between the CRYO TORR POWER IN input on the Frequency Converter and the cryopump electrical outlet on the 9600 compressor 4 Set the control circuit breaker on the rear panel of the 9600 compressor to the ON position Brooks Automation 8040520 8040520 Revision AA 3 3 CAUTION Allow a 1 0 inch minimum space above the top of the Frequency Converter for adequate ventilation Frequency Converter CTI CRYOGENICS P N 8043202G005 P N 8124106G005 or P N 8124114G005 O Power Cable CTI CRYOGENICS P N 8032222GXXX To Cryo Torr Cryopumps 9600 to Frequency Converter Power Cable CTI CRYOGENICS P N 8043209G050 Figure 3 2 9600 LV Compressor with an Cryo Torr Cryopumps 8040520 3 4 Brooks Automation 8040520 Revision AA 8200 Single Phase Compressor with an On Board Cryopump This procedure involves the following components 8200 Single Phase Water or Air Cooled Compressor Frequency Converter CTI CRYOGENICS P N 8043202G004 8124106G004 or 8124114G004 which includes power cable CTI CRYOGENICS P N 8132646G050 One On Board Cryopump NOTE If installing a new 8200 Compressor along with the Frequency Converter refer
22. r operating voltage range before installing the Frequency Con verter 1 Carefully place the Frequency Converter on top of the 1020R Compressor as shown in Figure 2 11 Zi Connect the three Cryo Torr cryopump power cables CTI CRYOGENICS P N 8032222GXXX into the CRYO TORR POWER OUT connectors 1 2 and 3 on the Frequency Converter as shown in Figure 2 11 3 Connect the Cryo Torr Cryopump Power Cable to the CRYO TORR POWER IN connector on the Frequency Converter 4 Turn on SYSTEM POWER at the compressor Brooks Automation 8040520 8040520 Revision AA 3 21 CAUTION Allow a 1 0 inch minimum space above the top of the Frequency Converter for adequate ventilation Frequency Converter CTI CRYOGENICS P N 8043202G001 P N 8124106G001 or P N 8124114G001 Cryo Torr Cryopump Power Cables CTI CRYOGENICS P N 8032222GXXX Cryo Torr Cryopump Power Cable Hard wired to 1020R Compressor Figure 3 11 1020R Compressor with Cryo Torr Cryopumps 8040520 3 22 Brooks Automation 8040520 Revision AA 4 Appendices Overview The following appendices are included to provide the user with a single location for specific information related to the Brooks Automation Product Contents A PROCREARE BX ggg2 4 1 Appendix A Customer Support Information 4 2 Customer Support Center Locati nS Ss sa sa e rk EEN NES 4 2 Guaranteed Up T
23. si tion Brooks Automation 8040520 8040520 Revision AA 3 9 CAUTION Allow a 1 0 inch minimum space above the top of the Frequency Converter for adequate ventilation Power Cable CTI CRYOGENICS P N 8112463G050 Frequency Converter CTI CRYOGENICS P N 8043202G002 P N 8124106G002 pe aloe or a UN KCN A Ne Av P N 8124114G002 xs A N T COLD HEAD ON BOAR STATIC CHARGE POWER PONE 250 PSIG He RETURN ra GAS GAS REPLACE HELIUN FILTER CARTRIDGE QD O AT RECOMENDED INTERVAL 9 d as AZ Sei CH PRESSURE FOR SERVICE CALL 800 FOR o o GAS CHARGE SCT PUTS o IV II ZI aU 9 Jo q E c a Zj A SS 8200 Compressor Figure 3 5 8200 Three Phase Compressor with an On Board Cryopump Brooks Automation 8040520 Revision AA CTI CRYOGENICS P N 8112463GXXX To On Board 8200 Three Phase Compressor with Cryo Torr Cryopumps This procedure involves the following components 8200 Three Phase Water Cooled Compressor Frequency Converter CTI CRYOGENICS P N 8043202G001 8124106G001 8124114G001 which includes Frequency Converter Cable Kit CTI CRYO GENICS P N 8080005K012 Cryo Torr Cryopumps NOTE NOTE An 8200 Three Phase Compressor does not support Cryo Torr Cryopump Remote ON OFF cap
24. to the 8200 Compressor Installation Operation and Service manual CTI CRYOGENICS P N 8040353 for information on setting the control module to the proper operating voltage range before installing the Frequency Converter Carefully place the Frequency Converter on top of the 8200 Compressor as shown in Figure 2 3 Connect the On Board Cryopump power cable CTI CRYOGENICS P N 8112463GXXX between one of the ON BOARD POWER OUT connectors on the rear panel of the Frequency Converter and the POWER IN connector on the On Board Cryopump Module Connect the power cable CTI CRYOGENICS P N 8132646G050 between the ON BOARD POWER IN connector on the rear panel of the Frequency Con verter and the ON BOARD POWER connector on the rear panel of the 8200 compressor as shown in Figure 2 3 NOTE Make sure the Frequency Selector Switch is set to the 60Hz position Failure to do so will result in improper system operation 4 Set the Frequency Selector Switch on the front panel of the 8200 compressor to the 60Hz position 5 Set the Power Switch on the front panel of the 8200 compressor to the ON posi tion Brooks Automation 8040520 8040520 Revision AA 3 5 CAUTION Allow a 1 0 inch minimum space above the top of the Frequency Converter for adequate ventilation Power Cable CTI CRYOGENICS P N 8132646G050 Frequency Converter 3 CTI CRYOGENICS P N 8043202G004 P N 8124106G004 e or P N 8124114G004 EX gt Power
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