Mass Flow Controller Replacement - Air
Contents
1. i E D i ARAO alf Vac eng CUT DRS24C Series Mass Flow Controller Replacement Section 4 0 Replacing your mass flow controller ANTY SAN T S CHECKLIST The following items will be needed in this section ja BEFORE YOU START Read instructions thoroughly before beginning _ M4 Allen wrench _ 3 32 Allen wrench ELECTRICAL WARNING POWER DOWN DRS24 AND DISCONNECT FROM POWER SOURCE _ 1 8 Allen wrench _ 8 Adjustable crescent wrench L_ Slotted screw driver _ Needle nose pliers __ Mass flow controller part no 9001 14 007 For technical problems please contact the Air Vac technical service department at Air Vac Engineering Company Inc 30 Progress Avenue Seymour CT 06483 Phone 203 888 9900 Fax 203 888 1145 e mail solder tech air vac eng com www air vac eng com 03 26 01 DRS24 Technical Service Manual Section 4 0 Mass Flow Controller Replacement 4 0 Mass Flow Controller Replacement A important VERIFY DRS24 IS DISCONNECTED FROM THE POWER SOURCE A iwportant WHEN DISCONNECTING A HOSE OR WIRE BE SURE TO MAKE NOTE OF ITS LOCATION FOR EASY RECONNECTION A steps 1 The mass flow controller is part of the pneumatics assembly located in the left side of the DRS module A fig 1 2 Remove the 10 32 button head screw B fig 1 and swing open left box C Fig 1 r es LAS NOTE pa The remaining steps2. ler Replacement 2 On the mass flow controller R fig 6 disconnect main wire harness S nozzle air hose T and the 2 air inputs U and V The black air hose from the nitrogen regulators go to the fitting marked R on the NOTE t nitrogen air valve W 3 Remove two 2 3 32 allen head screws Q that hold the mass flow controller to the panel R and remove Reverse these steps to re install the new mass flow controller After installation of the mass flow controller is complete you will need run the system NOTE Fear software profile Nozzle Flow Sensor Only to calibrate the nozzle flow and complete the installation S Wire List Flow Switch 250 white red n O 79 white red com Fig 6 Wire List Pressure Switch yellow com middle open brown n C Nitrogen
3. will be performed assuming you are located behind the DRS24 3 Loosen screw D and swing open computer plate sub assembly E fig 2 Fig 2 DRS24 Technical Service Manual Section 4 0 Mass Flow Controller Replacement A REMINDER MARK ALL LOCATIONS WHERE DISCONNECTIONS HAVE BEEN MADE NOTE pea To remove hoses you must push in on ring F fig 3 and then pull out tubing Fig 3 F 4 Disconnect air G fig 4 and nitrogen H hook ups from regulators Disconnect blue diffuser hoses I and mark for left and right 6 Disconnect blue nozzle hose J from calibration port loosen strain relief K and pull hose through plate wall from inside of module and disconnect nozzle vacuum tube L inside box from filter NOTE pa Remove site clean M probe N and pcool O vacuum tubes if attached Fig 4 DRS24 Technical Service Manual Section 4 0 Mass Flow Controller Replacement A CAUTION Fig 5 Bete e amp BA Disconnect main wire harness at nut Disconnect ground wire P fig 5 from DRS24 chassis With two people tilt machine on its side From bottom remove cover plate 8 3 32 allen head screws from under panel From bottom of DRS24 remove the 4 M4 allen head screws that hold the pneumatics panel in and remove panel Q USE EXTREME CAUTION WHEN REMOVING SCREWS a Ag Ws cK Q V7 A DRS24 Technical Service Manual Section 4 0 Mass Flow Control
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