8200 Compressor Installation, Operation and Service Instructions
Contents
1. OPT S07 CIR 2H 09 AOTT osz elc ET TE 2H 09 ASOT ZIz 861 HR TIZ S 07 SU IZI 7H 0s AOTT Occ tlc ZH 0 SET 661 661780 ASOC TIC OSI Hs SLIOA TOWINOD SLIOA HD 78 Is SITOA ANIT AONANOAUA NOLLOTTIS 3OV L1OA 1 SALON p o E r al ai THAZHAY THM ql B 1 i I Ly r E i az HHOI OAN2 a e 1 ABOT z UM Vio 0 ER zo Ei q ona c vola P c I 3 q d oc al i d Is 7 AOTZ z 0 nag El r E y TIA d d TIN Tr OINIHM EJ MAHN z NO Nua dg IHM sal VSIA g NNO LHA 3a NWOJUHA d A A oi OIAJHA 9 9 CLAN Tit NATAAN c d 6 l 057 NH oj vi E s ls TA NHELIHA dd THA ait z B p 5 A 3 i ft vi el wr g 3 E 9 o OIADEISULHAN E 5 E YOLIANNOD I VOR NO s s Na gz E d toot NAAM or J e le ENS R NIO ifa vao i al dc day t ia y Nu mu z z ma Di aa q z pa LI 4 oir ld ur AWAN 2 q OTE LHM d tle OMBI el e TAIN 7 i t t vl OIAM VADHAM g OIA b a lt H 1 THA IHM s sl IHM E NUOMHA y 110S td of 9 ORALE zm NWSAHN c si NMUB LHA OST Nua o q Nue2. Brooks 8200 Compressor Installation Operation and Service Instructions 8040353 Revision AA 8200 Compressor Installation Operation and Service Manual Information provided within this document is subject to change without notice and although believed to be accurate Brooks Automation assumes no responsibility for any errors omissions or inaccuracies AcuLigner Align AquaTran AutoTeach ATR AXM Basic Blue BiSymmetrik CenterSmart Cool Solutions Crate to Operate e RMA e Spares e Volution FastRegen FIXLOAD FrogLeg InLigner InCooler Interface Jet Engine LowProfile M2 Nano Mini lon PASIV PowerPak PerformanceBlue PowerPak PowerTools QuadraFly Radius Radient Radient Express Reliance Reliance ATR RetroEase SCARA SmartPM SPOTLevel Synetics The New Pathway to Productivity Time Optimized Trajectory Time Optimal Trajectory Time Optimized Path TopCooler TopLigner Ultimate Blue VAC 407 VacuTran Vacuum Quality Monitor VQM Vacuum Quality Index VQI and the Brooks logo are trademarks of Brooks Automation Inc AcuTran AquaTrap Conductron Convectron the Cool Solutions logo Cryodyne Cryotiger Cryo Torr Fusion GOLDLink Granville Phillips Guardian GUTS Helix Jet Leapfrog MagnaTran MapTrak Maratho
3. Signal Word Descriptions All cautions and warnings contain signal words which call attention to safety mes sages and designate the degree of hazard seriousness The following table shows the signal words and their meanings that may be used in this document Table 2 1 Safety Signal Words Term Example Definition CAUTION A signal word that indicates a situa tion or unsafe practice which if not avoided may result in equipment damage A CAUTION is highlighted in yellow CAUTION A signal word accompanied by a safety shape that indicates a poten tially hazardous situation or unsafe practice If not avoided the action may result in minor or moderate personal injury or equipment damage A CAUTION is highlighted in yellow WARNING Brooks Automation Revision AA A signal word accompanied by a safety shape that indicates indicates a potentially hazardous situation If not avoided the action may result in serious injury or death AWARNING is highlighted in orange 8040353 2 3 Safety 8200 Compressor Safety Shape Descriptions Installation Operation and Service Instructions Safety Shape Descriptions All cautions and warnings contain safety shapes which have specific safety mean ings The following table shows some of the safety shapes used in this document and their meanings Table 2 2 Safety Shapes Example Term Shape Definition Indicates a general hazard
4. ma 381MM a EN Ce AY l JE A gt 3 4 43 1 06 11MM e 1 96 27MM 50MM he 12 00 19 62 Ste 2 00 305MM 498MM 305MM MINIMUM CLEARANCE CLEARANCE NOT TO SCALE NOT TO SCALE Air Cooled Le 19 85 MAX sl 504MM F Bis T G8 he 22 15 gt 563MM E puse ue unge A OY o Hi 4 48 AN E mal tee Re Okt mwa i f i fr O O rin j Ez 18 75 425MM le H i pi oo ot sm ay 14 20 E bud 361MM 5 18 i 32MM JE gt j FS la Tes w 57 43 EN 9 17MM rT 1298 ce 18 88 gt n bie 7 cds Water Cooled Figure 1 1 Air and Water Cooled 8200 Compressor Dimensions Brooks Automation Revision AA 8040353 1 3 Introduction Installation Operation and Servicing InstructionsInstallation Operation and Service In 8200 Compressor 142 h PETT callo o A o ps ol D PRES yu SIE chu Heus O O CHARGE i o Rear View Air Cooled Rear View Water Cooled 13 14 15 5 MLIX TECHNOLOGY CORPORATION aj j ld 2 ji P D D gt Front View Air and Water Coo
5. 6 15 8040353 Brooks Automation IV Revision AA 8200 Compressor Figures Installation Operation and Service Instructions Figures 1 1 Air and Water Cooled 8200 Compressor Dimensions 1 3 Pc Component Li ad ba o 4d d ERA e e C bo eden 1 4 4 1 Electrical Terminal Enclosure with Cover in Place 4 4 4 2 Assembly of Conductors to Terminal Block 4 4 4 3 8200 Compressor Cooling Water Flow and Pressure Requirements 4 7 4 4 8200 Compressor Water Cooling Reguirements 4 7 4 5 Typical 8200 Compressor Installation 4 10 5 1 Adjusting the Selt Sealmp Connectors 5 3 5 2 Disconnecting Connecting the Adsorber Self Sealing Coupling 5 3 5 3 Removing the Adsorber from the Compressor 5 4 6 1 8200 Compressor Electrical Schematic part number 8032563P001 6 8 6 2 8200 Compressor Electrical Schematic part number 8032564P001 6 9 6 3 Components in the Electrical Control Chassis of the 8200 Compressor Three Phase Scott T Configuration 6 10 6 4 Components in the Electrical Control Chassis of the 8200 Compressor Single Phase RC CON SANA aad ed 4 bad Ear bs 6 11 6 5 Flow Diagram of the 8200 Air Cooled Compressor 6 13 6 6 Flow Diagram of the 8200 Water Cooled Compressor 6 14 Brooks Automation 8040353 R
6. 8040353 6 12 Brooks Automation Revision AA 8200 Compressor Appendices Installation Operation and Service Instructions Appendix E Flow Diagrams for 8200 Appendix E Flow Diagrams for 8200 Air Cooled and Water Cooled Com pressors Refer to Figure 6 5 on page 6 14 or Figure 6 6 on page 6 15 while reviewing this sub section Helium returning from the cold head enters the compressor and a small quantity of oil is injected into the gas stream thereby overcoming helium low specific head and inability to carry heat produced during compression Helium is then compressed and passed through a heat exchanger for removal of compression caused heat The helium flows through a bulk oil separator oil mist separator and helium filter cartridge where oil and contaminants are removed A differential pressure relief valve in the compressor limits the operating pressure dif ferential between the helium supply and return lines thereby allowing compressor operating without cold head operation When cold head operation reaches a steady state condition further pressure regulation is unnecessary Brooks Automation 8040353 Revision AA 6 13 Appendices 8200 Compressor Appendix E Flow Diagrams for 8200 Air Cooled and Water Cooled CompressorsInstalla KEY GAS FLOW OIL FLOW E SELF SEALING COUPLING rm PRESSURE cauce 4 SYSTEM HELIUM SUPPLY LINE y CHARGING eri A TO THE COLO HEAD 35
7. or 1500 Watts With a 1 0 GPM water flow this translates to an approximate water temperature rise of 10 F 5 6 C Brooks Automation 8040353 Revision AA 4 7 Installation 8200 Compressor Final Preparation of Compressor Installation Operation and Service Instructions Final Preparation of Compressor 1 Using a voltmeter measure the phase to phase voltage from the power source Compare this voltage to Table 4 1 and position the voltage range selector switch to the 208V or 220V position as required Also set the frequency selector switch to the 50 Hz or 60 Hz position as appropriate See Figure 1 2 on page 1 4 for location of selector switches Table 4 1 Voltage Specifications Operating Voltage Range misa 60 Hz 50 Hz us Switch S1 Position 198 212 180 212 208V 213 250 213 220 220V 2 Ensure that water is turned on for the water cooled compressor 3 Set the compressor ON OFF switch 3 to OFF Connect the input power cable to the power source Refer to Table 1 1 on page 1 5 for electrical power reguire ments 4 Turn the compressor switch to the ON position and allow the compressor to run for 15 minutes to stabilize the oil circuit Make sure that the compressor fan operates freely in the air cooled compressor 5 Switch off the compressor and disconnect the input power cable 6 Install the compressor in its permanent location on a level surface Air cooled units must have a minimum cl
8. ANO AF7009 VALVA E ele TEA THA 5L LHM 9dit an Lait i ISI Ed er 8 E v k a 4 E ON 2 ON L ng 8 Z ve ve p o Wd E E El ZSL C S w I z D D ram TIG el CEN vna JELG HAND N Panes Anse s PI NAA PENYE 9 E zr EY z i a da s H l 1 y ane zo n m VI vs vel P 0 NVA ong ed zal lal E aller ON ON 182 e E sr s q D gi 8E MIA KINO 3100 AIV e 71 n TFITTAINSO and z A x 18L NI YAMOd ude OVA 0 7 807 TSLONV ISI 3SN 47002 WALVA AOI LVISONYIHL LV ISONYIHL ADV LIOA DNINOONI DO TH TVNIWYAL YAWUOASNVUAL HANAOASNVAL CIONTIOS HOLIMS HOLOITAS ADNAN MIA HOLIMS OLOR THS 3V L IOA WRLLIAT T INAANO YOISISIN 13978 YOLSISTA MINI VIZIWI WHO YOLIANNOD WOL OAYD SIOLOHNNOO HIVOE NO YO LINON 3S VHd AINO 1311000 HIV 0 10IN NVA SOLON dnd AVTDIIOLORTTIS 3DV L 10A AVTAY dL IIA LVAAdNALAJAO DIOLOSNNOO YIWAOASNVAL YOLOANNOD YAWYOASNVUL HOLIANNOD HHIASIOHSN VALL YOLOANNOD UIWUOSSNVAL HIOLOHNNOO NYA HOLIINNO GIONTTOS YOLOANNOD LV LSOWWAHL SIOLOHNNOO dd DIOLOSNNOO AVIHATOD av VTA walawi AVI DIVIS HOLOIN VE YSAVANA LINDO VE IV LIND UINVAUE LINDUD NIVIN nett OLID VO LAVIS anse YOLIDVdVO NNA Wa TN D 64r Sait Lait 9d st i mua ro 82 z499 182 8040353 Brooks Automation Revision AA 6 9 Appendices 8200 Compressor Appendix C Electrical Schematics for 8200 Compressor Installation Oper
9. Details General Warning about this hazard appear in the safety notice explanation High Voltage Indicates a high voltage hazard Indicates a surface is hot enough to f A Hot Surface cause discomfort or a burn References For more information about safety standards see the following documents ISO 7010 2003 E Graphic symbols Safety colours and safety signs Safety signs used in workplaces and public areas ISO 3864 1 2002 E Graphic symbols Safety colours and safety signs Part 1 Design principles for safety signs in workplaces and public areas 8040353 Brooks Automation 2 4 Revision AA 8200 Compressor Installation Operation and Service Instructions 3 Inspection Overview This chapter details unpacking the compressor A High Vacuum Pump or Refrigerator System is packaged in separate cartons for each major component An Installation Operation and Servicing Manual is included in the carton for the component packaged in that carton Chapter Contents Ko 186 0 07 0 c EE A EEA A rcr 3 2 Brooks Automation 8040353 Revision AA 3 1 Inspection 8200 Compressor The Compressor Installation Operation and Service Instructions The Compressor On receipt remove the 8200 Compressor from its shipping carton and inspect the compressor for evidence of damage as described in this Section 1 Unpack and remove the compressor from its shipping carton 2 Check the carton contents It sho
10. THIS TIME Purge the regulator and charging lines as instructed in steps a through e below Do not use helium gas that is less than 99 999 pure a Open the regulator a small amount by turning the adjusting knob clock wise until it contacts the diaphragm then turn approximately 1 8 to 1 4 turn more so that the regulator is barely open b Slowly open the bottle valve and purge the regulator for 10 to 15 sec onds Turn the regulator knob counterclockwise until the helium stops flowing C Connect the charge line to the helium pressure regulator d Remove the flare cap of the gas charge fitting on the rear of the compres sor Loosely connect the charge line to the charge fitting e Set the helium pressure regulator to 10 to 25 psig 70 125 kPa Allow helium gas to flow through the charging line and around the loosened flare fitting for 30 seconds to purge the charging line of air Then tighten the flare nut at the end of the charge line This procedure is required to ensure that both the regulator and the charging line will be purged of air and that the air trapped in the regulator will not dif fuse back into the helium bottle For best results BROOKS suggests a dedi cated helium bottle regulator and line which are never separated for adding helium 2 Set the helium pressure regulator to 300 psig 2070 kPa Depending on the compressor operating state add helium gas a If the compressor is running approximately 2 hours
11. helium supply pressure is indicated by the supply pressure gauge 3f High temperature of the compressed helium in the dis charge line from the compres sor pump has tripped the thermal protective switch 3g Mechanical seizure Corrective Action 3a Confirm that cooling water to the compressor is flowing Confirm that proper cooling water flow rate and pressure exist by referring to Figure 4 3 on page 4 7 3b Turn on the compressor and allow it to run until it has stopped several times allow ing the oil temperature to rise and the compressor to operate continuously for one hour minimum 3c Recheck for proper cooling water temperature per Cool ing Water Requirements Water Cooled Compressors Only 3d Provide a free flow of air to the compressor Confirm a 12 inch 30 cm clearance at the front and back of the compres sor Confirm unobstructed and clean heat exchanger surfaces 3e Add helium per Unsched uled Maintenance on page 5 6 3f Confirm that oil is visible in the compressor sight glass air compressor only 3g Contact the Product Ser vice Department Brooks Automation Revision AA 8200 Compressor Installation Operation and Service Instructions Appendices Appendix B Troubleshooting Proce Table 6 1 Compressor Troubleshooting Procedures Problem 4 Compressor pump stops after several minutes of operating and then switches ON and OFF at short inter va
12. 0 PSIG o AOSORBER OIL MIST DIFFERENTIAL SEPARATOR PRESSURE E L ORIFICE RELIEF VALV Lat poda 193PS1 4 Sm 7 SOLENOIDO CONTROLLED VALVE ee CLOSED WHEN COMPRESSOR 519 i 1S IN OPERATION A OIL RETURN LINE HELIUM RETURN LINE FROM THE COLO HEAD COMPRESSOR PUMP Ist GAS DISCHARGE ULK OIL SERARATOR 2ad GAS DISCHARGE COMPRESSOR COOLING OIL oo o 1 ey UU I pere 1 th qe H CL Qu l 1 HEAT l de dE Li LL T d EXCHANGER d y aS l J wetereo ot LO PPI ORIFICE INJECTOR T FILTER t tst GAS RETURN Figure 6 5 Flow Diagram of the 8200 Air Cooled Compressor 8040353 6 14 Brooks Automation Revision AA 8200 Compressor Installation Operation and Service Instructions Appendices Appendix E Flow Diagrams for 8200 PRESSURE GAUGE Q HELIUM SUPPLY LINE TO THE COLD HEAD A ADSORBER DIFFERENTIAL PRESSURE RELIEF VALVE 193 PSL 7 SOLENOID CONTROLLED VALVE CLOSED WHEN COMPRESSOR oly 1S IN OPERATION x HELIUM RETURN LINE FROM THE COLD HEAD V A SYSTEM 7 CHARGING w RELIEF A VALVE A VALVE 350 PSIG OIL MIST SEPARATOR ORIFICE o T 4 4 OIL RETURN FILTER 1 OIL RETURN COMPRESSOR PUMP ROTARY VANE 3 COMPRESSOR l 1 GAS DISCHARGE ol HEAT o Ol BuLK OIL x Bee o SEPARATOR 9 COMPRESSOR ooooooo 1g COOLING OIL De 0000000 1 F erui 00000000
13. 600V neoprene jacket and 14 gauge wire Install per Appendix C Electrical Schematics for 8200 Compressor on page 6 8 Electrical Schematic diagram ensuring compliance with all national state and local standards Helium pressure Static 245 255 psig 1688 1757 kPa at 70 to 80 F 21 to 27 C Supply nominal operation 270 290 psig 1860 2000 kPa at operating temperature Ambient operating temperature range Brooks Automation Revision AA 50 to 100 F 10 to 38 C 8040353 Introduction Installation Operation and Servicing InstructionsInstallation Operation and Service In 8200 Compressor Table 1 2 General Specifications Continued Specification Description Interface Cold head power receptacle Mates with plug on cold head power cable On Board power receptacle Mates with plug on cold head power cable Compressor input power terminal block enclosure Mates with input power cable fabricated by customer or avail able from BROOKS Cryogenics Gas supply connector 1 2 inch self sealing coupling Gas return connector 1 2 inch self sealing coupling Adsorber service schedule Replace every 12 months 8040353 1 6 Cooling water require ments water cooled only 100 F 38 C maximum discharge temperature Refer to Table 1 1 on page 1 5 Figure 1 1 on page 1 3 and Figure 1 2 on page 1 4 for parameters Brooks Automation Revision AA 8200
14. AA 8200 Compressor Contents Installation Operation and Service Instructions Contents Introduction DA ence E E A A hers 1 2 Installation Operation and Servicing Instructions 1 3 Safety aias AAA AE AEE E AAE E E 2 2 SIRA Word E o MAA 2 3 Salety Shape ER 441 0 MAA 2 4 o MA Un Fee ee es 2 4 Inspection AA eons tesa MAMAA eee es 3 2 Installation Compressor AO peas d Red he eda Pda ed we A AR 4 2 Preparing the Compressor Input Power Cable 4 2 Final Preparation of CLompresBOf qus caesar A RARE EK dX ERRR4d Adie 4 8 Connecting the Compressor to the Cold Head 4 9 Maintenance Procedures scheduled MABA cena area 5 2 Brooks Automation 8040353 Revision AA ili Contents 8200 Compressor Installation Operation and Service Instructions Luschecubel VEDO P643 4x94 EXE PP Hidde Hop REEF P Edw a 5 6 Hellum Circuit Decontaminalo sie o kesrce a ye sc deneri ERI ERE 5 9 Appendices Appendix A Customer Brooks Automation Technical Support Information 6 2 Appendix B Troubleshooting Procedures 6 3 Appendix C Electrical Schematics for 8200 Compressor 6 7 Appendix D Components in the Electrical Control Module of the 8200 Compressor 6 10 Appendix E Flow Diagrams for 8200 Air Cooled and Water Cooled Compressors6 12 Appendix F Additional Cooling Water Quality Parameters
15. Compressor Installation Operation and Service Instructions 2 Safety Overview This section describes safety conventions for the Brooks Automation Product All personnel involved in the operation or maintenance of the product must be familiar with the safety precautions outlined in this section NOTE These safety recommendations are basic guidelines If the facility where the Prod uct is installed has additional safety guidelines they should be followed as well along with the applicable national and international safety codes Chapter Contents is AI oe CDI oe Or cC ld 2 2 Signal Word Cee Lr dab E ec AAA c AMA RARA 2 3 SUE oba pe DESIDIA a AAA AA AAA 2 4 o ee ee ea earner ee rea EA CUM S ORE ee ee eee ee d d a 2 4 Brooks Automation 8040353 Revision AA 2 1 Safety 8200 Compressor Introduction Installation Operation and Service Instructions Introduction 8040353 2 2 Follow all safety precautions during installation normal operation and when servic ing BROOKS Cryogenics products This chapter explains the safety conventions used throughout this manual BROOKS Cryogenics uses a specific format for cautions and warnings which includes standard signal words and safety shapes See also the Customer Support appendix or call your local Customer Support Center for assistance Brooks Automation Revision AA 8200 Compressor Installation Operation and Service Instructions Safety Signal Word Descriptions
16. apter Components in the Electrical Control Chassis of the 8200 Compressor Three Phase Scott T Configuration this page Components in the Electrical Control Chassis of the 8200 Compressor Sin gle Phase RC Configuration 1 Overtemperature ResistorR1 9 Circuit Breaker 3ACB3 2 Run Capacitor 35 ufC1 10 Voltage Selector SwitchS1 3 Start Capacitor 119 ufC2 11 Frequency Selector SwitchS2 4 TransformerT2 12 Overtemperature Trip RelayK1 5 Phase MonitorPM 13 TransformerT1 6 Voltage Selector RelayK2 14 Motor Start RelayCR1 T Main Circuit BreakerCB1 15 Meter Elapsed TimeETM 8 Circuit Breaker 3ACB2 Figure 6 3 Components in the Electrical Control Chassis of the 8200 Compressor Three Phase Scott T Configuration Brooks Automation 8040353 Revision AA 6 11 Appendices 8200 Compressor Appendix D Components in the Electrical Control Module of the 8200 Compressor Coldhead Phase Shifting ResistorR3 R1 C1 Circuit Breaker 3A Circuit Breaker 3ACB3 Voltage Selector SwitchS1 Frequency Selector SwitchS2 Relay Trip RelayK1 TransformerT 1 Motor Start RelayCR1 Meter Elapsed TimeETM Figure 6 4 Components in the Electrical Control Chassis of the 8200 Compressor Single Phase RC Configuration 2 Overtemperature Resistor 3 Run Capacitor 35 uf 4 Start Capacitor 119 uf C2 5 Transformer T2 6 Run Capacitor 2 uf C4 7 Run Capacitor 6 uf C3 8 Main Circuit BreakerCB 1
17. ar panels remain in place Use the two wrenches supplied to avoid loosening the body of the coupling from its adapter Unscrew the two self sealing coupling halves quickly to minimize gas leakage as shown in Figure 5 2 on page 5 3 Disconnect the adsorber inlet self sealing coupling as shown in Figure 5 2 on page 5 3 Remove the bolts nuts and washers that secure the adsorber to the base of the compressor Save all nuts bolts and washers for installing the replacement adsorber Carefully lift the adsorber inward until the outlet self sealing coupling clears the rear panel and remove the adsorber as shown in Figure 5 3 on page 5 4 Remove the adsorber from the compressor as shown in Figure 5 2 on page 5 3 Brooks Automation Revision AA 8200 Compressor Maintenance Procedures Installation Operation and Service Instructions Scheduled Maintenance TO TIGHTEN TURN WITH 1 3 16 INCH WRENCH HOLD WITH 1 1 8 INCH WRENCH Xr HOLD WITH 1 1 8 INCH WRENCH TURN WITH 1 3 16 INCH WRENCH TO LOOSEN Figure 5 1 Adjusting the Self Sealing Connectors Compressor Rear Panel N N N YA Na This 1 1 8 in This 1 3 16 in wrench is This 1 1 8 in This 1 3 16 in wrench is wrench holds the used to loosen the self wrench holds the used to tighten the self coupling in a sealing coupling connector coupling in a sealing coupling stationary position Note the direction of the stationary position connec
18. ation and Ser ODOLETI 3 gr cu Hh d 5 i vU Mo OS 5 d S E Ha amp e 5 5 Y Q 2 Pp of 2 Ga o n o v Q WN WN Y d a i E 5 o e i N u j T T oo d oa W w pb ee E N Es a l a w p v 5 FL mi I 5 Im is 1 In z Im E 4 5 B I 5 E r c E 4 4 E ESE ui n E A E E In Lo x E a t uod p y S u uU Y u x E W D op 2 BER i E g T g n 3 1 Qo ul Eod E uou g E 4 ir T E 1 B E 5 Bs Fe Bg a E E 7 a b B 55 6 amp amp 2 Oe Bou fa E Epp X g n Son 2 a 24 t Of E g E E E io E x i mg 8 Pep Ff i 4 4 8 5 a E Sek wi b e B i 5 t or uoc rod Z E T i 5 A FA ze a ze e eG 6 4 4 4 4 o d q ug 4 3 a y You E L LCS u m Etc BB EF o a IN i x EPERE 8040353 Brooks Automation 6 10 Revision AA 8200 Compressor Appendices Installation Operation and Service Instructions Appendix D Components in the Electri Appendix D Components in the Electrical Control Module of the 8200 Com pressor The following illustrations are shown in this ch
19. ch FPT input and 1 2 inch FPT output connections DO NOT OVERTIGHTEN 3 Connect flerible hoses to the fittings and secure with hose clamps If hard piping is desired install the water lines directly onto the compressor 1 2 inch FPT input and output connections DO NOT OVERTIGHTEN A Equipment Damage To avoid damaging adjacent equipment check water connections for leaks Cooling Water General Considerations Cooling water must meet flow and pressure requirements See Cooling Water Flow and Pressure Requirements on page 4 6 To conserve water the shut off the cooling water when the compressor is not running NOTE If cooling water below 45 F 7 C runs through the compressor while the compres sor is not operating the compressor oil will change viscosity and thicken causing the compressorto overheat and shut off at startup In this event repeatedly restart the compressor allowing it to run until it has shut off several times The oil tem perature will rise and then the compressor will run continuously Drain and purge water from the compressor before shipping it back to the fac tory or subjecting it to freezing conditions Purge water from the compressor by blowing compressed air regulated between 30 to 40 psig 200 to 275 kPa into the compressor output connection and allow water to exit from the water input connection Brooks Automation 8040353 Revision AA 4 5 Installation 8200 Compressor Pre
20. e mail address and telephone number of the person to contact List any error codes received during the failure Prepare a detailed description of the events relating to the error Time that the equipment has been in operation Work that was done on the equipment prior to the error Functions that the equipment was performing when the error occurred Actions taken after the error and the results of those actions Other information that may assist the Specialist Contact Brooks Automation Technical Support at these numbers Brook L Md WA GUTS Contact Number North 1 800 FOR GUTS 1 800 367 4887 US Canada America 1 978 262 2900 Europe 49 1804 CALL GUTS 49 1804 2255 4887 Japan 81 45 477 5980 China 86 21 5131 7066 Taiwan 886 3 552 5225 Korea 82 31 288 2500 Singapore 65 6464 1481 For additional contact information please go to the Brooks Automation web site at www brooks com or send an E mail to techsupport brooks com Brooks Automation 8040353 Revision AA 6 3 Appendices Appendix B Troubleshooting Procedures 8200 Compressor Installation Operation and Service Instruc Appendix B Troubleshooting Procedures Read these safety notices before you perform any troubleshooting procedures LN High Voltage High voltage electric shock could cause severe injury or loss of life Always disconnect the compressor from all sources of electrical power befo
21. e service equipment or supplied by a separately derived system at the supply transformer or generator Proceed as follows High Voltage AM High voltage electric shock could cause severe injury or loss of life Do not connect the compressor to the power source at this time Complete the preparation and panel reinstallation before electrically connecting the compressor 1 Prepare the input power cable by terminating each of the four conductors with a 10 ring terminal Follow the terminal manufacturer s instructions to insure proper crimping 2 Disassemble the electrical terminal enclosure cover mounted on the compres sor rear panel as shown in Figure 4 1 on page 4 4 Remove the two screws securing the cover and lift it off 3 If necessary back off strain relief screws Brooks Automation Revision AA 8200 Compressor Installation Installation Operation and Service Instructions Preparing the Compressor Input Power 4 Thread input power cable end up through the strain relief into the enclosure 5 Attach the power conductors onto the appropriate terminals of the terminal block a For three phase hookups attach the three power leads to terminals K Y and Z b For single phase hookups attach the two power leads to terminals X and Y DO NOT USE TERMINAL Z 6 Tighten all terminals to 18 22 in Ibs torque 7 Tighten down screws on strain relief Equipment Damage To avoid damaging the power cable
22. earance of 12 inches at the front and back for adequate airflow 8040353 Brooks Automation 4 8 Revision AA 8200 Compressor Installation Installation Operation and Service Instructions Connecting the Compressor to the Cold Connecting the Compressor to the Cold Head Make the connections between the cryopump and compressor See Figure 4 5 on page 4 10 1 Remove dust plugs and caps from the supply fittings and return lines com pressor and cold head Check all fittings Connect the helium gas return line from the gas return connector on the rear of the compressor to the gas return connector on the cold head Connect the helium gas supply line from the gas supply connector on the rear of the compressor to the gas supply connector on the cold head Attach the supply and return line identification decals BROOKS Cryogenics supplied to their respective connecting piping ends Verify proper helium supply static pressure by confirming that the helium pressure gauge reads 245 250 psig 1690 1725 kPa in an ambient temperature range of 60 to 100 F 16 to 38 C NOTE To ensure the compressor continues to perform optimally do not run it unless it is connected to a cryopump or waterpump If the indicated pressure is higher than 250 psig 1725 kPa reduce the pressure as follows a Remove the flare cap from the gas charge fitting located on the rear of the compressor b Open the gas charge valve very slowly Allow a sl
23. ensure that strain relief is tightened down on the outer insulation of the input power cable and that the cable does not slide 8 Remount the terminal enclosure cover and secure with two screws 9 Refer to Final Preparation of Compressor on page 4 8 for correct phasing checkout procedure AM High Voltage High voltage electric shock could cause severe injury or loss of life Ensure that the ground wire is grounded and uninterrupted Brooks Automation 8040353 Revision AA 4 3 Installation 8200 Compressor Preparing the Compressor Input Power Cable Installation Operation and Service In Cover Screws Figure 4 1 Electrical Terminal Enclosure with Cover in Place Z not used for single phase D Go D Ground Screw amp Power Cable Figure 4 2 Assembly of Conductors to Terminal Block Cooling Water Requirements Water Cooled Compressors Only If flexible water hose connections are used install the barbed fittings supplied with the compressor on the input and output connections 1 Apply a light coating of standard plumbing thread sealant on the barbed fitting threads 8040353 Brooks Automation 4 4 Revision AA 8200 Compressor Installation Installation Operation and Service Instructions Preparing the Compressor Input Power 2 Tighten fittings on 1 2 in
24. evision AA v Figures 8200 Compressor Installation Operation and Service Instructions This Page Intentionally Left Blank 8040353 Brooks Automation vi Revision AA 8200 Compressor Tables Installation Operation and Service Instructions Tables 1 1 Power Requirements Steady State Conditions 1 5 1 2 General SC a garde Cera Eo E ERE ER o AA ARA 1 5 2 1 Batety Bienal VOTOS ooa on do hr R SER REEF AAA AAA 2 3 Du Mt ODER i ida re Cd Pb dis dans A di d Gau IA 2 4 4 1 Cooling Water Specifications 4444464440094 eben er e ac a d 4 6 6 1 Compressor Troubleshooting Procedures 6 3 6 2 Additional Cooling Water Quality Parameters 6 15 Brooks Automation 8040353 Revision AA VII Tables 8200 Compressor Installation Operation and Service Instructions This Page Intentionally Left Blank 8040353 Brooks Automation vili Revision AA 8200 Compressor Installation Operation and Service Instructions 1 Introduction Overview This chapter describes this manual and the compressor including specifications Chapter Contents e o M rere 1 2 Installation Operation and Servicing Instructions 1 3 Brooks Automation 8040353 Revision AA 1 1 Introduction 8200 Compressor General Installation Operation and Service Instructions General The manual provides instructions for installing o
25. ight amount of helium gas to escape until the helium pressure gauge reads 250 psig 1725 kPa c Close the gas charge valve and reinstall the flare cap If the indicated pressure is lower than 245 psig 1690 kPa add helium gas as described in Helium Circuit Decontamination on page 5 9 Brooks Automation 8040353 Revision AA Installation 8200 Compressor Connecting the Compressor to the Cold HeadInstallation Operation and Service Instruc High Voltage High voltage electric shock could cause severe injury or loss of life Before you make any electrical connections turn off the compressor with the ON OFF power switch on the front of the compressor 6 Make the following electrical connections a Connect the cold head power cable to the rear panel of the compressor and the other end to the electrical power connector on the high vacuum pump cold head b Connect the compressor input power cable to the power source c Turn on compressor d Your system is now ready for operation User s Vacuum Chamber ma a ma On Board Cryopump o o DEDOS Bl aga o dy Helium Supply Line Helium Return Line On Board Power Cable gt Roughing Pum O gt gt Air Pressure 60 80 psi one o Nitrogen 40 80 psi Figure 4 5 Typical 8200 Compre
26. itting part num ber 7021002P001 Installation and Scheduled Maintenance Tool Kit part number 8032040G004 Available from stock consult the factory or your sales representative Adding Helium Gas Use only 99 999 pure helium gas A Equipment Damage To avoid damaging the cold head and other parts through contamination maintain pressure in the cold head If the compressor helium pressure gauge reads 0 decontamination is required Refer to the Helium Circuit Decontamination on page 5 9 or contact the Product Service Department 1 8040353 5 6 A user supplied helium charging line terminating in a 1 4 inch female flare fit ting and a two stage pressure regulator rated at 0 3000 0 400 psig is required for this operation If you need to add helium more than once every several months check for leaks caused by improperly connected self sealing connections or any mechan ical joint within the compressor Brooks Automation Revision AA 8200 Compressor Maintenance Procedures Installation Operation and Service Instructions Unscheduled Maintenance There are two conditions that require the addition of helium gas 1 Compressor not operating helium pressure gauge reads 245 psig or below 2 Compressor operating helium pressure reads 270 psig or below To add helium gas 1 Attach a pressure regulator 0 3000 0 400 psig and charging line to a helium gas 99 999 pure bottle DO NOT OPEN THE BOTTLE AT
27. l a 06000000 r q OIL Letot totototo HEAT SIGHT OIL E 4 EXCHANGER A FILLET GLASS 1 kad SUMP gt i OIL l l L J METERING INJECTOR LL 1 COOLING OIL ORIFICE FILTER 1 o A red 3 GAS FLOW gt OIL FLOW E SELF SEALING COUPLING Figure 6 6 Flow Diagram of the 8200 Water Cooled Compressor Brooks Automation Revision AA 8040353 6 15 Appendices 8200 Compressor Appendix F Additional Cooling Water Quality Parameters Installation Operation and Appendix F Additional Cooling Water Quality Parameters Table 6 2 Additional Cooling Water Quality Parameters Water Constituent Unit cu Saturation Index SI delta pH value 0 2 lt 0 lt 0 2 Total hardness dH 6 15 Conductivity mg l 10 500 Filtered substances mg l 30 Chlorides mg l 500 Free chlorine mg l 0 5 Hydrogen sulphide mg l 0 05 Ammonia mg l 2 Sulphates mg l 100 Hydrogen carbonate mg l 300 Hydrogen carbonate sulphates mg l 21 0 Sulphide mg l 1 Nitrate mg l 100 Nitrite mg l 0 1 Iron mg l 0 2 Manganese mg l lt 0 1 Free agressive carbonic acid mg l lt 20 8040353 Brooks Automation 6 16 Revision AA
28. led LEGEND 1 Compressor Input Power Block 10 Cooling Water Output 2 Cold Head Power Receptacle 11 Cooling Water Input 3 On Board Power Receptacle 12 Rear Plate 4 Helium Gas Fitting and Charge Valve 13 50 60 Hz Frequency Selector Switch 5 Helium Supply Pressure Gauge 14 208 220 Voltage Range Selector Switch 6 Helium Gas Return Connector 15 Resettable Circuit Breakers Figure 1 2 Component Locations 8040353 Brooks Automation 1 4 Revision AA 8200 Compressor Introduction Installation Operation and Service InstructionsInstallation Operation and Servicing In Table 1 1 Power Requirements Steady State Conditions Operating Nominal Rated Full Part Number Cooling Phase Hz Voltage Operating Load Locked Range Current Current Air 3 50 180 220 10A 8032549G001 Air 3 60 198 250 10A 12 30A Air 1 50 180 220 10A 8032549G002 Ar 1 60 198 250 10A 12 30A Water 3 50 180 220 8 5A Reo ee Water 3 60 198 250 8 5A VERUS Water 1 50 180 220 8 5A 8092590002 water 1 60 198 250 85A Tees See the nameplate on the back of the compressor for more details Table 1 2 General Specifications Specification Description Weight 150 Ibs 68 kg max Weight 155 Ibs 70 kg max shipping Power 2 0 kw nominal operating water 2 1 kw nominal operat consumption ing air Compressor input power cable customer supplied Recommended type SO 4 conductor
29. lf sealing connector flat rubber gasket to make sure that it is clean and properly positioned Equipment Damage To avoid damaging equipment ensure you hold the left coupling nut while tightening the right coupling nut as shown in Figure 5 2 on page 5 3 and Figure 5 1 on page 5 3 b Make the first turns by hand and then firmly seal the connection using the two wrenches until the fittings bottom Refer to Figure 5 2 on page 5 3 and Figure 5 1 on page 5 3 for proper coupling of the self sealing connection 3 Replace the cover and the front and rear grilles and secure them 4 Ensure that the pressure gauge reads 245 250 psig 1690 1725 kPa If addi tional gas pressure is reguired follow the instructions in Adding Helium Gas on page 5 6 5 Reconnect the return and supply flex lines to the compressor 6 Connect the compressor input power cable to the electrical power source Brooks Automation 8040353 Revision AA 5 5 Maintenance Procedures 8200 Compressor Unscheduled Maintenance Installation Operation and Service Instructions Unscheduled Maintenance Suggested Unscheduled Maintenance Equipment It is advisable to keep on hand the unscheduled maintenance equipment and dispos able supplies listed below 1 2 5 Helium 99 999 pure Pressure regulator 0 3000 0 400 psig Maintenance manifold part number 8080250K003 Helium charging line terminating in a 1 4 inch female flare f
30. ls Possible Cause 4a Intermittent power source voltage Corrective Action 4a Confirm power source voltage between 198 250V 60 Hz or 180 220V 50 Hz and restore if necessary 5 Compressor oper ates but cold head motor does not run 5a Loose or defective cable 5a Check cold head cable 6 Cooling water leav ing the compressor exceeds 100 F Brooks Automation Revision AA 6a The water coming into the compressor is too warm 6b The water is becoming too warm within the compressor due to a problem with the compressor 6a Ensure the water coming into the compressor is between 50 F 32 C and 90 F 10 C 6b Contact the Product Ser vice Department 8040353 6 7 Appendices 8200 Compressor Appendix C Electrical Schematics for 8200 Compressor Installation Operation and Ser Appendix C Electrical Schematics for 8200 Compressor The following electrical schematics for the 8200 Compressor are in this appendix 8200 Compressor Electrical Schematic part number 8032563P001 8200 Compressor Electrical Schematic part number 8032564P001 8040353 Brooks Automation 6 8 Revision AA 8200 Compressor Appendices Electrical Schematics for Appendix C Installation Operation and Service Instructions LOOdE9SZEOS 42quinu javd o1umayos 7091139213 40ss24dw10 0078 T 9 AANSIT
31. n Marathon ya Marathon Express Micro lon MiniConvectron On Board Polycold Razor Simplicity Solutions the Simplicity Solutions logo Stabil lon TrueBlue TurboPlus Vision Zaris and the Brooks Automation logo are registered U S trademarks of Brooks Automation Inc All other trademarks are properties of their respective owners 2013 Brooks Automation Inc All Rights Reserved The information included in this manual is Proprietary Information of Brooks Automation and is provided for the use of Brooks Automation customers only and cannot be used for distribution reproduction or sale without the express written permission of Brooks Automation This information may be incorporated into the user s documentation however any changes made by the user to this information is the responsibility of the user Brooks For Technical Support Location GUTS Contact Number North America oe 1 800 367 4887 Europe 49 1804 CALL GUTS 49 1804 2255 4887 Japan 81 45 477 5980 China 86 21 5131 7066 Taiwan 886 3 5525225 Korea 82 31 288 2500 Singapore 65 6464 1481 Visit us online www brooks com January 11 2013 Part Num 8040353 Revision AA This technology is subject to United States export Administration Regulations and authorized to the destination only diversion contrary to U S law is prohibited Printed in the U S A Brooks Automation 8040353 Revision
32. operating time under normal operating conditions slowly open the helium charge valve on the rear of the compressor When the helium pressure gauge rises to 270 290 psig 1860 2000 kPa tightly close the charge valve Brooks Automation 8040353 Revision AA 8200 Compressor Maintenance Procedures Installation Operation and Service Instructions Unscheduled Maintenance b If the compressor is not running slowly open the helium charge valve When the helium pressure gauge rises to 245 255 psig 1688 1757 kPa tightly close the charge valve A Equipment Damage To avoid discharging the relief valve add helium gas slowly less than 50 psi per second 3 Ensure that the helium charge valve on the compressor is tightly closed Shut off the helium pressure regulator on the helium bottle and remove the charging line from the male flare fitting Shut off the helium gas bottle valve Reinstall the flare cap 8040353 Brooks Automation 5 8 Revision AA 8200 Compressor Maintenance Procedures Installation Operation and Service Instructions Helium Circuit Decontamination Helium Circuit Decontamination Refer to Section 4 Maintenance of the appropriate On Board Cryopump Installation Operation and Maintenance manual for information on helium circuit decontamina tion Brooks Automation 8040353 Revision AA 5 9 Maintenance Procedures 8200 Compressor Helium Circuit Decontamination Installation Opera
33. paring the Compressor Input Power Cable Installation Operation and Service In Table 4 1 Cooling Water Specifications Parameter Value Maximum Inlet Temperature 90 F 32 C Minimum Inlet Temperature 50 F 10 C Flow Rate 1 0 0 5 gpm 3 8 1 9 lpm Pressure Drop inlet to outlet approximately 3 5 psig differential Min max Inlet Presure 5 to 100 psi 6 9 bars Alkalinity 7 0 8 7 pH Calcium Carbonate lt 75 ppm Resistivity lt 100k Ohm cm NOTE Water conditioning may be required for applications not meeting these requirements Additional parameters appear in Appendix F Additional Cooling Water Quality Parameters on page 6 16 Cooling Water Flow and Pressure Requirements Use Figure 4 1 on page 4 4 and Figure 4 4 on page 4 7 to determine the minimum acceptable cooling water supply pressure at different flow rates and temperatures 8040353 Brooks Automation 4 6 Revision AA 8200 Compressor Installation Installation Operation and Service Instructions Preparing the Compressor Input Power 60 5C 4c_ 3c Allowable Operating Range at min water flowrate 2c_ MrimumHesdgLired weber Pressure PAG Allowa ble Operating 0 25 0 50 0 75 1 00 1 50 1 75 2 00 Water Flowrate GPM Figure 4 4 8200 Compressor Water Cooling Requirements Cooling Water Heat Load and Temperature Rise Heat load to facility water is approximately 5000 Btu hr
34. perating and servicing the 8200 Compressor This compressor is available in two versions air cooled part number 8032549G001 G002 and water cooled part number 803255G001 G002 If you are installing or operating a Cryo Torr or On Board System you should also have available the appropriate cryopump or refrigerator When you purchase a system you will receive two manuals necessary for system installation 8040353 Brooks Automation 1 2 Revision AA 8200 Compressor Introduction Installation Operation and Service InstructionsInstallation Operation and Servicing In Installation Operation and Servicing Instructions Installation Operation and Servicing Instructions for your 8200 Compressor provide easily accessible information All personnel with installation operation and servicing responsibilities should become familiar with the contents of these instructions to ensure high quality safe reliable performance a 19 85 MAX sj 504MM Le 12 50 ele eb 3 00 SiBMM 76MM fee 22 15 563MM I j Sa ae E AH NH a m pa 44 00 mar m Ci 14mm A QM p l ll z re Oum T LOW 16 75 425MM 14 20
35. re performing any maintenance or troubleshooting procedures Burn Hazard To avoid being burned wait for the pump to cool down so that it is cool to the touch after operating before working on the inside of the compressor Table 6 1 Compressor Troubleshooting Procedures Problem 1 System power ON OFF switch CB1 and compressor switch S1 remains in the ON position when switched on but the compressor will not run Refer to Figure 6 1 on page 6 9 for identification of all electrical components 8040353 Possible Cause 1a The thermal protective switch TS1 is closed activat ing the relay trip coil in the ON OFF switch SW1 1b Incorrect phasing at input power 1c Excessive current drain has activated the series trip in the compressor ON OFF switch Corrective Action 1a Test switch TS1 on air cooled compressor test TS1 and TS2 on water cooled compressor If continuity is found in any switch contact the Product Service Depart ment 1b Correct phase sequence at input power cable 1c Measure and record the current and contact the Prod uct Service Department Brooks Automation Revision AA 8200 Compressor Installation Operation and Service Instructions Appendices Appendix B Troubleshooting Proce Table 6 1 Compressor Troubleshooting Procedures Problem 2 System power ON OFF switch CB1 remains in the ON position but
36. ssor Installation 8040353 Brooks Automation 4 10 Revision AA 8200 Compressor Installation Operation and Service Instructions 5 Maintenance Procedures Overview This chapter provides complete maintenance procedures for the Brooks Automation Product Chapter Contents Scheduled Maintenance 5 2 Unscheduled Maintenance 5 6 Helium Circuit Decontamination 5 9 Brooks Automation 8040353 Revision AA 5 1 Maintenance Procedures 8200 Compressor Scheduled Maintenance Installation Operation and Service Instructions Scheduled Maintenance The only scheduled maintenance required on the 8200 Compressor is replacement of the compressor adsorber part number 8080255K001 every 12 months High Voltage High voltage electric shock could cause severe injury or loss of life Always disconnect the compressor from all sources of electrical power before performing any maintenance procedures Removing the Compressor Adsorber 8040353 5 2 1 2 10 Shut down the compressor Disconnect the compressor input power cable from its electrical power source Disconnect the flex lines from the gas return and gas supply connectors at the rear of the compressor Remove the screws holding the compressor rear grille rear panel front panel and cover Figure 1 2 on page 1 4 Front and re
37. the com pressor will not run Brooks Automation Revision AA Possible Cause 2a No power coming from the power source 2b Incorrect or disconnected wiring within the compressor Corrective Action 2a Check service fuses circuit breakers and wiring associ ated with power source and repair as needed 2b Check the compressor against its electrical sche matic Figure 6 1 on page 6 9 8040353 6 5 Appendices Appendix B Troubleshooting Procedures 8200 Compressor Installation Operation and Service Instruc Table 6 1 Compressor Troubleshooting Procedures Problem 3 Compressor stops after several minutes of operation and remains off 8040353 6 6 Possible Cause 3a High temperature of the compressor is caused by insufficient cooling water resulting in the opening of thermal protective switch water cooled compressor only 3b After turn off very cold cooling water was left run ning through the compressor The resulting low oil tempera ture has caused a restriction of oil flow through the meter ing orifice during startup 3c Very cold cooling water is circulating through the com pressor The resulting low oil temperature causes a restric tion of oil flow through the metering orifice during startup 3d Ambient temperature is unusually high resulting in the opening of the thermal protective switch air cooled compressor only 3e Insufficient
38. tion and Service Instructions This Page Intentionally Left Blank 8040353 Brooks Automation 5 10 Revision AA 8200 Compressor Installation Operation and Service Instructions 6 Appendices Overview The following appendices are included to provide the user with a single location for specific information related to the Brooks Automation Product Contents Appendix A Customer Brooks Automation Technical Support Information 6 3 Appendix B Troubleshooting PIO Liu ru ek eder ht eet debe on 6 4 Appendix C Electrical Schematics for 8200 Compressor 6 8 Appendix D Components in the Electrical Control Module of the 8200 Compressor 6 11 Appendix E Flow Diagrams for 8200 Air Cooled and Water Cooled Compressors6 13 Appendix F Additional Cooling Water Quality Parameters 6 16 Brooks Automation 8040353 Revision AA 6 1 Appendices 8200 Compressor Installation Operation and Service Instructions 8040353 Brooks Automation 6 2 Revision AA 8200 Compressor Appendices Installation Operation and Service Instructions Appendix A Customer Brooks Automa Appendix A Customer Brooks Automation Technical Support Information When contacting Brooks Automation for Technical Support please have the follow ing information available 1 2 3 4 5 Record the part number and serial number from the eguipment Provide the installed location of the eguipment Provide name
39. tor Note the large arrow direction of the large arrow To Disconnect The Coupling To Connect The Coupling Figure 5 2 Disconnecting Connecting the Adsorber Self Sealing Coupling Brooks Automation 8040353 Revision AA 5 3 Maintenance Procedures 8200 Compressor Scheduled Maintenance Installation Operation and Service Instructions Explosive Pressure High pressure explosions could cause severe injury and equipment damage Appropriately depressurize the adsorber before disposing of it To depressurize the adsorber attach the depressurization fitting included in the Installation and Scheduled Maintenance Tool Kit to the coupling half at either end of the adsorber and tighten it slowly Compressor Base Figure 5 3 Removing the Adsorber from the Compressor Installing the Compressor Adsorber 1 Install the replacement adsorber as follows a Remove the dust caps from the self sealing coupling halves at each end of the replacement adsorber b Write installation date on the adsorber decal c Install the replacement adsorber following the steps for compressor adsorber removal in reverse order Use the hardware saved in Step 5 on Page 5 2 2 Connect the adsorber to the compressor internal piping Refer to Figure 5 2 on page 5 3 8040353 Brooks Automation 5 4 Revision AA 8200 Compressor Maintenance Procedures Installation Operation and Service Instructions Scheduled Maintenance a Check the se
40. uirements 4 6 Cooling Water Heat Load and Temperature Rise 4 7 Final Preparation of Lounpressor iuecosek ose thra ER REPRE RE CRT RE tkis Ei 4 8 Connecting the Compressor to the Cold Head 4 9 Brooks Automation 8040353 Revision AA 4 1 Installation 8200 Compressor Compressor Installation Installation Operation and Service Instructions Compressor Installation Installation of your compressor requires no special tools other than those supplied in the Installation and Scheduled Maintenance Tool Kit Preparing the Compressor Input Power Cable 8040353 4 2 To supply input power to the 8200 compressor requires the fabrication of a 600 volt power cable that has an SO 4 conductor 600 volt rating neoprene jacket and 14 gauge or 2 3 mm wire Unit must be wired by an authorized electrician in accordance with the national Elec trical Code ANSI NFPA 70 1987 as well as the local codes This shall include instal lation of a readily accessible disconnect device into the fixed wiring supplying power An insulated earthing conductor that is identical in size insulation material and thick ness to the earth and unearth branch circuit supply conductors except that it is green with or without one or more yellow stripes is to be installed as part of the branch cir cuit which supplies the unit or system The earthing conductor described is to be con nected to the earth at th
41. uld contain a 8200 Compressor air cooled or water cooled b Compressor Manual part number 8040353 3 After unpacking inspect the compressor for evidence of damage as follows e Inspect the compressor overall exterior for damage d Report damage to the shipper at once e Retain shipping cartons for storage or return shipment When installing your system BROOKS recommends that as you unpack a component you perform an inspection and the necessary tasks for system installation for the component according to the manual included with the com ponent Final system installation and operation will be performed following procedures in the high vacuum pump or refrigerator manual 4 Check the helium pressure gauge The gauge should indicate 250 psig 1725 kPa minimum at 70 F If additional gas pressure is required follow the instructions in Helium Circuit Decontamination on page 5 9 8040353 Brooks Automation 3 2 Revision AA 8200 Compressor Installation Operation and Service Instructions 4 Installation Overview This chapter provides complete installation procedures for the Brooks Automation Product Chapter Contents Compressor Das ba Pei aede ae oO TEE p IJ M E EP ARE iaa 4 2 Preparing the Compressor Input Power Cable 4 2 Cooling Water Requirements Water Cooled Compressors Only 4 4 Cooling Water General Considerations 4 5 Cooling Water Flow and Pressure Req
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