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Service Manual

1. to front isolato Figure 2 Air hose connections under the workchamber Page 2 of 4 Revision B 3 97 Vibration Isolator Balance 08 02 Part 1 Powering Down the System Before performing the tasks described in this procedure you should power down the high volt ages to the column see Service Procedure 01 02 WARNING Dangerously high voltages are present in the process module while the FIB column is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Part 2 Turning On the Isolator Air On the Fluid Regulator turn on the Isolator switch See Figure 3 VALVE AIR A soaron f DN VENT ai Mit ul e ON ON e ON Figure 3 Fluid Regulator Switches 2 1 Set the Isolator gauge to 60 psi Revision B 3 97 Page 3 of 4 08 02 Vibration Isolator Balance Part 3 Balancing the Vibration Isolators Balance is achieved when the three isolators show the following characteristics A 1 4 to 3 8 6 7 mm to 9 5 mm gap exists between the pad and the collar of each piston e The lever arms on the isolator air valves are level Work with one vibration isolator at a time Set the 3 8 9 5 mm gap then level the lever arm Every time you change the position of a lever arm you mus
2. Figure 1 Aperture Plate Held by Three Screws NOTICE BE CAREFUL WITH HEX DRIVER Be careful when inserting the hex driver not to damage the wires or scratch the lens elements and not to mar any of the ceramic insulators Revision B 3 97 05 07 Page 3 of 8 05 07 3 3 Aperture Replacement Clean tools before using them to be sure they are free of oils greases or other contami nants Refer to Fig 2 while performing the following steps a Usealong 3 32 ball hex driver to remove the two 4 40 screws that hold the aperture mechanism to the mounting block on the column drift tube These screws are retained in the assembly Do not remove the screws from the assembly b Carefully remove the aperture mechanism and place it in the prepared clean area c Place the blanking plate on the column to minimize particulate contamination Unhook spring Step 4 1 4 7 TUS Dowel Pin Aperture Blade 00004 Step 4 6 5 4 Dowel Pin 4 40 Mounting Screws Step 3 3a Screw block 4 40 Mounting Screws i Step 3 3a Step 4 5 Two screws Pa Flathead screw Step 4 8 Upgrade version Alignment pin hidden Step 4 4 Two screws Step 4 2
3. Filament Lead either Ground Not Continuous Filament Lead either Grid Lead Not Continuous Terminal 1 Ground Not Continuous Terminal 2 Ground Not Continuous Terminal 3 Terminals 1 amp 2 Not Continuous Case Ground Not Continuous Page 12 of 22 Revision B 3 97 05 04 10 Flood Gun Installation and Test Part 4 Install the Replacement Flood Gun 4 1 Fasten the flood gun assembly to the Workchamber Lid with the mounting screws see Figures 10 and 11 4 2 Flood gun adjustment be careful not to damage the MCP screen during the adjustment a Toadjust a flood gun without a snout loosen the height adjustment screw and slide the flood gun up until the lower portion of the flood gun assembly contacts is flush against the lower column cover see Figures 1 2 and 10 Make sure that the flood gun is aligned with points directly at the center bore of the MCP see Figure 1 If necessary loosen the lateral positioning screws and adjust the lateral position of the flood gun to obtain a good fit against the lower column cover b To adjust a flood gun with a snout loosen the height adjustment screw and slide the flood gun up until the end of the flood gun snout contacts the MCP as shown in Fig ures 3 4 5 and 11 Be careful not to damage the MCP screen Make sure that the flood gun snout is aligned with points directly at the center bore of the MCP see Figures 1 and 2 If necessary loosen the lateral
4. 2m D AU m AN Figure 1 Drift Test Graphical User Interface Table 1 defines the areas of the graphical user interface Table 1 Definition of GUI Shown in Fig 1 Area Name Description A USER DEFINED Shows setup for current drift test at the top of this area lists statistics for current drift test at bottom B SCATTER PLOT Shows the drift as a scatter plot example shown in Fig 1 illustrates drift in Figs 3 4 and 5 C DEVIATION IN X X drift in the scatter plot shown in detail D DEVIATION IN Y Y drift in the scatter plot shown in detail E CONTROL PANEL Allows for control of current plot F STATUS BAR Shows status of current drift test once the drift test 1s finished the status bar becomes a control bar you can scan through all the time segments of the test and see the deviations replayed in C amp D G RAW DATA PLOTS One plot for each end of the cross Page 2 of 6 Revision B 3 97 Drift Test 05 14 Part 1 Running the Drift Test 1 1 1 2 1 3 1 4 1 5 1 6 In Microsurgery image the working area several times to clear the chrome Set FOV to 20 um In an xterm window type drifttest To edit or create a configuration file select Edit Configuration Enter the beam and the dose parameters in the Drift Test Conditions Sample parameters are a Beam Step Size 5 2 nm b Beam Dwell Time 10 sec c Cross Width 0 5 um d Cross Dose 1 0 nC um
5. Hours Logged on Heating Time Source 0 499 19 seconds 500 649 15 18 seconds 650 879 12 seconds 880 999 10 12 seconds 1000 10 12 seconds 4 12 Finally power down as described in Part 2 and replace the low resistance cables 160 6445 with the resistive cables 160 6444 NOTICE Each time cables are removed from the high voltage connectors the ends must be cleaned with a cloth dampened with isopropyl all metal particles and other contaminants must be eliminated Allow the cable ends to dry before reinserting Page 4 of 4 Revision B 3 97 ZA Micrion Service Procedure No 05 12 05 Service Procedure Title Column and Lens Curing 5 nm Column Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service After Pumpdown following venting or HV Shutdown Introduction The curing procedure conditions the column for high voltage operation The procedure consists of three parts preparation curing the column and curing the lenses Depending upon the condition of the column it may be necessary to repeat the entire curing pro cess several times to obtain satisfactory results Table 1 shows the conditions for curing and the estimated curing times Notice If the column is not properly cured there is a risk of irreversible damage during operation The general curing technique is to increase the electrical potentials on the various column elec Table 1 Conditions for Curin
6. Figure 1 Dual Pump Vacuum System Revision B 3 97 Page 3 of 6 04 06 Part 4 Foreline Trap Element Replacement Remove and Replace the Old Trap 4 1 Remove the enclosure panels from the system You may only have to remove the front rear and left side panels as viewed from the front of the process module or some combi nation of these to gain access to the foreline trap WARNING Wear nitrile chemical resistant gloves and protective splash resistant safety goggles while performing the fol lowing tasks Exercise extreme caution and perform this procedure in a well ventilated area Do not breath in the oil vapors directly Abide by all safety regulations for handling contaminated waste oil 4 2 To provide free access to the trap be sure that the area around the foreline trap is clean and uncluttered Gain access to the trap either from the front or the rear of the process module whichever is easier If necessary vacuum underneath the system to prevent contamination of the vacuum sys tem while the lines are disconnected 4 3 With the rough pump off disconnect the trap cover The trap cover is connected to the loadlock vacuum line Use Figure 2 to locate the assemblies referenced in the following steps a b C gt i Unfasten the KF clamp at the bottom of the bellows assembly Unfasten the latch on the clamp that secures the trap cover Carefully remove the trap cover and place it on a clean lint
7. In Microsurgery select Beam Control from the Tasks pulldown menu Bring up the Beam Control popup by clicking the left botton with the mouse cursor within the image area On the Beam Control popup select Tasks and click Beam Maintenance off On the Beam Screen set Accel voltage to 0 kV On the Beam Control popup set Suppression voltage to 0 kV On the Beam Control popup increase the Extractor voltage until the Extractor current is between 2 WA and 5 uA The Extractor voltage should not exceed 8 kV If there is no Extractor current keep the Extractor voltage at 8 kV and go to the next step On the Jon Source popup quickly bring the Filament current to 4900 uA Note Extractor current typically rises slowly to between 50 uA and 80 uA and then increases rapidly to its maximum When the Extractor current increases rapidly to between 100 uA and 300 uA without exceeding the time shown in Table 1 immediately reduce the Filament current to 0 Revision B 3 97 Page 3 of 4 05 11 Gallium Source Heating Note If the Extractor current does not reach 125 WA before the allowed time has expired reduce the Filament current and verify the Filament readback If the readbacks are work ing call Micrion Product Support 4 11 On the Beam Control popup bring the Extractor voltage down until the Extractor current is about 10 uA Allow the source to emit for about five minutes Table 1 Source Heating Time per Hours Used
8. lon Pump Port Aperture Drive Plate Table 1 Column Connections Signal Name 1 High Voltage L1 Lens 1 High Voltage L2 Lens 2 High Voltage F2 Filament E Extractor High Voltage High Voltage S Suppressor Low Voltage J1901 Bbaper octopoles High Voltage F1 Filament c Oo a A WY N Low Voltage Blanking Signals Figure 8 Top View lon Beam Column with Power Connections Page 10 of 14 Revision B 3 97 Remove Replace lon Beam Column 05 09 10 Part 3 Remove the Column Cap lon Gun 3 1 Disconnect the ion pump vacuum bellows from the column 3 2 To minimize contamination cover the input port of the ion pump with clean aluminum foil 3 3 Cover the ion pump port on the column with clean aluminum foil Double check to see that the high voltage power supply is off then remove all high and low volt age cables see Figure 8 Alignment Screws 4 Lans only two adjacent screws Figure 9 Location of Alignment Screws for the Column Cap Assembly 3 4 Loosen only two adjacent alignment screws on the column cap ion gun assembly this is done so that the ion gun alignment is minimally affected see Figure 9 CAUTION Use care when lifting and moving the column cap and col umn housing assembl
9. 1810 Board Board number and revision level are stamped on the ejector NOIHOINF P6 eeeoeeoe eeeeeeee Any pin on this side can be P4 tested for an interrupt signal oO T o o Qo P5 Page 2 of 4 Figure 1 1810 Knob Panel Interface Revision B 3 97 1810 Board 12 05B Part 1 Power Down Before Disconnecting P3 or P4 Before removing the connectors at P3 or P4 of the Knob Panel board follow the power down pro cedure in Service Procedure 01 02 Note P3 and P4 inputs must not be interchanged WARNING Dangerously high voltages are present while the FIB sys tem is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and auto procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Part 2 Testing for Interrupt Generation and Clearance 2 1 With the SysCon powered down put the Knob Panel board on the extender board 2 2 Unplug P3 and P4 2 3 With an ohmmeter test F1 for 1 ohm 2 4 Clip the oscilloscope probe on any input pin on the interrupt block shown in Fig 1 2 5 Power up the SysCon module 2 6 In an xterm window type the mbus reset command mbus reset 2 7 Start the Microsurgery application 2 8 The signal from the interrupt block should be high until there is an interrupt To generate an interrupt turn any knob
10. 2 16 2 17 2 18 2 19 2 20 2 21 2 22 2 23 2 24 2 25 While monitoring the column behavior slowly bring the Extractor voltage down to 0 V and then bring it back up to 5000 V Sparking is likely to occur as you bring the Extractor voltage down toward 0 volts Repeat steps 2 7 and 2 8 in 5kV increments until you have done so with the Accelerator voltage at 40 kV then continue with the next step Increase the Accelerator voltage from 40 kV to 45 kV then immediately reduce it to 40 kV While monitoring the column behavior slowly bring the Extractor voltage to 0 V and back to up 5 kV Increase the Accelerator voltage to 45 kV Monitor the column behavior While monitoring the column behavior slowly bring the Extractor voltage down to 0 V and back up to 5 kV Increase the Accelerator voltage to 50 kV then immediately lower it to 40 kV Leave the Accelerator voltage at 40 kV While monitoring the column behavior slowly bring the Extractor voltage down to 0 V and back to 5 kV Increase the Accelerator voltage to 45 kV While monitoring the column behavior slowly bring the Extractor voltage down to 0 V and back to 5 kV Increase the Accelerator voltage to 50 kV Monitor the column behavior While monitoring the column behavior bring the Extractor voltage to 0 V Slowly increase the Suppressor voltage to 2 kV while monitoring the column behavior Maintain for five minutes Increase the lens 1 volta
11. BiWeekly Mux Shift Calibration 07 07 Monthly Archive Restore Data Files i486 and RS6000 Systems S P 09 01 Lens 2 L2 Curing S P 05 12 Specimen Holder Inspection and Cleaning S P 06 01 Workchamber Inspection and Cleaning S P 06 03 Bimonthly Aperture Drive Mechanism Inspection and Lubrication S P 05 06 Deposition Assembly Lubrication S P 10 01 Rough Pump Oil Change Procedure Check Oil level ONLY S P 04 04 Stage Accuracy S P 03 04 Transport Carriage Lubrication S P 06 04 Turbo Pump Oil Change Procedure Check Oil ONLY S P 04 05 Semiannually Clamp Actuator Inspection 03 07 Rough Pump Oil Change Non GAE systems non Fomblin S P 04 04 Stage Hardware Inspection and Lubrication S P 03 02 Stage Travel Limit Switch Inspection S P 03 01 Turbo Pump Removal Oil Change Procedure Oil Change S P 04 05 Annually Aperture Mechanism Limit Switch Inspection and Cleaning S P 05 05 Deposition Alignment and Adjustment S P 10 03 Foreline Trap Replacement S P 04 06 Rough Pump Oil Change Procedure Chem Series w Fomblin S P 04 04 System Drift Test S P 05 14 Stage Flatness Calibration 03 06 Every year and a half Turbo Pump Removal Turbos w Ceramic Bearing S P 04 05 Page vii of viii As Needed Aperture Replacement S P 05 07 Aperture Shield Replacement S P 05 15 Blanking Aperture Replacement S P 05 16 Cleaning Column Elements S P 05 02 Column Ali
12. Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Part 2 Remove the Column Cap lon Gun Double check to see that the high voltage power supply is off then remove all high and low volt age cables see Figure 1 Page 2 of 6 Revision B 3 97 Aperture Shield Replacement 05 15 10 Aperture Drive Plate lon Pump Port Table 1 Column Connections Signal Name 1 High Voltage L1 Lens 1 2 High Voltage L2 Lens 2 3 High Voltage F2 Filament 4 High Voltage E Extractor 5 High Voltage S Suppressor 6 Low Voltage J1901 Bbaper octopoles 7 High Voltage F1 Filament 8 Low Voltage Blanking Signals Figure 1 Top View lon Beam Column with Power Connections Revision B 3 97 Page 3 of 6 05 15 10 Aperture Shield Replacement WEAR GLOVES DO NOT HANDLE SOLVENTS When working inside the chamber or when handling any components that will be exposed to vacuum wear gloves rated for Class 100 environments or better Due to disinte gration of such gloves by solvents do not handle solvents or parts that are wet with solv
13. Do not undertake this procedure without prior training and authorization by Micrion Corporation Do not use this document as a substitute for that training Normally only Micrion service person nel perform this procedure This document has four parts 1 preparations 2 a general outline of the procedure 3 the pro cedure itself and 4 the Material Safety Data Sheet for bromine Br in Section 2 Materials Required Chemical resistant gloves Safety glasses VCR plug for old cannister normally in the bottom of the GAE cabinet Two new VCR gaskets Lint free wipes and lint free swabs Disposal bag for contaminated waste used wipes gaskets etc 3 4 open end wrench 5 8 open end wrench e 5 32 hex key NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 3 task Specifically Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules Revision B 3 97 Page 1 of 10 11 03 Bromine Cylinder Replacement Part 1 Preparations 1 1 1 2 1 3 Secure the help of another person two people should be present during this procedure Review the Material Safety Data Sheet for Bromine Br2 in Section 2 Review the procedures provided by the site Chemical Safety Officer governing tasks of this nature and presc
14. TP 15V TP VPS 15V TPYFOC MICRION Board number and revision level are stamped on the ejector asy aCe EU C4 NEN C5 100V TPCATH e i TP 250V P5 TP GND e 5s TPGRID 9 TPSKIM P7 12 TPXDFL Page 2 of 4 Figure 1 1130 Flood Gun Supply Board Revision B 3 97 Flood Gun Supply Board 12 12 150 1190 J33 _ 160 3330 J3 Syscon 150 1130 n 160 3210 J2215 Flood gun J7 mem 160 3192 Syscon J2215 160 3422 160 3651 a gt Flood gun Chamber Figure 2 8000 Syscon to Flood Gun Block Diagram Part 1 Listen for High frequency Audible Noise At power up if you hear a high frequency whine it usually means that the board is having diffi culty generating the high voltages Part 2 Examine the Board for Burned Resistors 2 1 Use the power down procedure see Service Procedure 01 02 then remove the board WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies ELECTROSTATIC DISCHARGE This board is sensitive to electrostatic discharge Handle the board as follows 1 Touch your hand to the metal frame of the chassis to discharge static or w
15. d Ifthe reading with V6 closed is higher than when V6 is open the loadlock door would be a likely source of the leak 1 4 Locate the turbo pump leak check port on the turbo pump foreline 1 5 Connect the leak check port on the turbo pump forelinel to the leak detector test port Do not open the manual valve for the leak check port at this time 1 6 Open all of the valves except V1 V5 and CA 1 7 Turn off the ion pump using vacchat to maximize the chances of detecting a leak in the area of the column 1 8 After you set up the leak detector open the manual valve for the leak check port See the instructions inside the door to the leak detector Part 2 Leak Checking from the Top Down Since He is lighter than air always begin leak testing a system from the top down If you do not a vacuum leak above the area you are testing may activate the leak detector 2 1 Begin with the leak detector at moderate sensitivity If no leaks are discovered recheck the system with the leak detector at the most sensitive scale At a sensitivity of 1 x 10 cc sec the He detector can detect vacuum leaks caused by a fiber caught between an o ring gasket and mating surface 2 2 Starting at top of the column slowly expose the entire system to the He flow Expose potential leak areas such as flanges surfaces with gaskets and electrical and mechanical connectors 1 Another leak check port is located near TC1 on the roughing line thi
16. state Power Down and Vent the System Before performing the tasks described in this procedure you must power down and vent the sys tem see Service Procedure 01 02 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Open the Workchamber Before opening the workchamber clean the exterior panels Remove the front panels to gain access to the workchamber door Clean the workchamber and the loadlock exterior as described in Service Procedure 06 05 Once the system is completely vented open the workchamber door by removing the 1 2 socket head cap screws Page 2 of 14 Revision B 3 97 Remove Replace lon Beam Column 05 09 05 Part 2 Lower the Flood Gun Remove the MCP Connectors WEAR GLOVES DO NOT HANDLE SOLVENTS When working inside the chamber or when handling any components that will be exposed to vacuum wear gloves rated for Class 100 environments or better Due to disinte gration of such gloves by solvents do not handle solvents or parts that are wet with solvent 2 1 After the system has vented open the workchamber Two types of flood gun MCP config urations are installed in FIB systems with 5 nm columns a flood gun without
17. Install the inlet screen on the replacement pump Install the turbo pump bellows on the bottom of the workchamber Use a double claw clamp to secure the adapter flange to the turbo pump bellows See Fig 2 Slide the replacement pump along the base plate until it is positioned below the adapter flange and bellows Use a double claw clamp to secure the replacement turbo pump to the adapter flange Connect the water lines using hose clamps Connect the circular power connector to the turbo pump Switch on the N supply Connect the roughing line to the turbo pump roughing port Switch on the circuit breakers shown in Figure 1 and turn on the power at the turbo pump controller on the bottom right of the electronics console Replace the enclosure panels Turn on the turbo pump water supply Part 4 Controller Configuration The following steps describe how to configure the V550 turbo pump through the control box 4 1 4 2 4 3 4 4 4 5 Ensure that the system is totally vented Remove the 9 pin D connector P1 from the rear of the turbo pump controller P1 is the top connector to the left of the fan P1 pins 1 6 and 3 8 are jumpered to create the interlock needed to physically run the pump Switch off the foreline pump circuit breaker see Figure 1 to cut power to the pump Remove the VTI pneumatic line connection and pinch the end closed with a tie wrap In vacchat switch on the pump in software with the following t
18. Material Safety Data Sheet MSDS for Styrene Emergency contact Chemtrec 800 424 9300 General comments The fire explosion and reactivity data given herein are derived from sources that address the hazards incurred in storing and handling large quantities of styrene whereas a relatively small amount 30 ml is used in this application Substance Identification Generic name styreneChemical class hydrocarbon Trade names amp synonyms vinylbenzene styrene monomer phenylethylene HC1 Chemical formula CGH5CH CH Activity 100 Physical Data Physical description Colorless to light yellow oily liquid Detectable at low concentrations by a sweet possibly pleasant odor Odor may be pungent and unpleasant at high concentrations Odor is detectable at 0 15 ppm in air fatigue may raise this threshold in some individuals Percent volatiles by weight 100 Boiling point 293 F 145 C Melting point 23 F 31 C Vapor pressure 20 X mmHg 5 6 torr Specific gravity 0 909 20 CSolubility in water Insoluble Fire and Explosion Hazard Data Flash point 88 F 31 C Autoignition point 914 F 490 C Flammability limits in air 1 1 6 1 by volume Extinguishing agents Use carbon dioxide foam chemical extinguishing agents sand or dolomite Water may be ineffective Fire fighting procedures Wear NIOSH MSHA approved self contained breathing apparatus flame and chemical resistant clothing hats boots and gl
19. N A Auto Ignition Temperature N A LEL N A UEL N A Extinguishing Media Copious quantities of water for fires with oxygen as the oxidizer Electrical Classification Nonhazardous Special Fire Fighting Procedures If possible stop the flow of oxygen which is supporting the fire Unusual Fire and Explosion Hazards Vigorously accelerates combustion Reactivity Data Hazardous Mixtures of Other Liquids Solids or Gases Oxygen vigorously accelerates combustion Contact with all flammable materials should be avoided Some materials which are not flammable in air will burn in pure oxygen or oxygen enriched atmospheres Stability Stable Incompatibility Materials to Avoid All flammable materials Hazardous Decomposition Products None Hazardous Polymerization Will not occur Conditions to Avoid Page 2 of 4 Revision B 3 97 Spill or Leak Procedures Steps to Be Taken in Case Material Is Released or Spilled Evacuate all personnel from affected area Use appropriate protective equipment If leak is in user s equipment be certain to purge piping with an inert gas prior to attempting repairs If leak is in container or container valve contact CHEMTREC for emergency assistance or your closest Airco location Waste Disposal Method Do not attempt to dispose of waste or unused quantities Return in the shipping container properly labeled with any valve outlet plugs or caps secured and valve protection cap in pl
20. Page 4 of 8 Revision B 3 97 Dual Nozzle Fine Alignment 10 03 Part 3 Fine Alignment in X and Y With the nozzle s extended over Step 2 of the diagnostic block the goal is to align the Tungsten nozzle within 350 500 um of the beam center and the XeFl nozzle within 500 700 um of the beam center 500 700 um 4 B SD 350 500 um Figure 3 Tri Nozzle Configuration at FOV 1350 The X axis travel commands JE and JW jog east and jog west will move the nozzle s 158 um on each repetition of a command The Y axis travel commands JF and JB jog forward and jog back will also move the nozzle s 158 um on each repetition of a command After each repetition use the measurement tool to determine how far from center you are 3 1 If in the screen image the nozzles are misaligned move the limit switch alignment brack ets as listed in Table 2 and shown in Table 2 Adjusting the alignment brackets Nozzle Problem Limit Switch Bracket Alen Too far right east X Plim To the right Too far left west X Home To the left Too far to the rear Y Home Toward back of chamber Too far to the front Y Plim Toward front of chamber 3 2 Save your final setting as follows a Type the vacchat commmand that reports the old setting dpu b Select the nozzle you are working with 1 or 2 c To save settings press the Enter key This will save the new settings for X and Y Revi
21. Power S2 Flood Gun Enable Flood Gun When this switch is off the LED DS1 on the S3 Flood Gun Interface board is off disabling P6 on the Flood Gun Supply board Voltages are still alive on the Flood Gun Supply board Coax Connectors Function Video Video signal from Signal Acquisition board assuming JP1is set J2236 on Signal Acquisition board Test Video input to Signal Acquisition board for factory test J2237 a Turning off S3 does not turn off high voltages on the flood gun board itself however turning off S3 does disable high voltages on the P6 output connector of the flood gun board Deflection J2217 MCP J2221 Main Flood Gun J2215 Figure 3 Schematic SysCon Front Chassis Switches Page 4 of 6 Revision B 3 97 P S CBs Switches 03 04 iki e e Elex Consol lon Pro Fore Rough Turbo Mod Mod Line Pump Pump Emergency 5 nm power supply Computer J B High voltage Turbo Pump Controller 02 06A mc Figure 4 Electronics Module Switches and Modules Part 4 To Power Down the SysCon 4 1 See Service Procedure 01 02 Switch off the following switches on the SysCon module described in Table 3 CB1 S1 S2 and S3 Revision B 3 97 Page 5 of 6 03 04 P S CBs Switches Page 6 of 6 Revision B 3 97 ZA Micrion Service Procedure No 12 03 Service Procedure Title Ad
22. ZA Micrion Service Procedure No 05 15 10 Service Procedure Title Aperture Shield Removal Inspection amp Replacement 10 nm Column Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service Annually or As Needed Introduction The spray aperture shield is constructed of solid tungsten During normal operation the aperture shield is sputtered by the ion beam tungsten is used because the atoms that are back sputtered from the tungsten onto the source do not degrade the source performance in fact they enhance source performance Over time however the beam will sputter through the tungsten When these atoms are back sputtered onto the ion source they cause source instability and eventual source failure This procedure describes the process of removing inspecting and replacing the aperture shield in a FIB System This procedure should be performed if the aperture shield has been in use for one year or sooner if the source is not stable In the case of source instability try heating the source Service Proce dure 05 11 before replacing the shield Materials Required This procedure requires the use of the following materials Clean standard field service tool kit Lint free wipes Clean room gloves Laboratory grade isopropyl alcohol NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 3 task Specifically Equipm
23. cac 1 9 Check the vacuum level by querying the status of the ion gauge sthc or stcc 1 10 Give the command to read the status of the clamp actuator stca The message should read clamped and banked 1 11 Type the vacchat command that retracts the transport carrier re Page 2 of 6 Revision B 3 97 Clamp Actuator Inspection 1 12 Check the vacuum level by querying the status of the ion gauge sthc or stcc 1 13 To remove the transport carrier and check the status of the clamping actuator type ex cau re Cac 03 07 Part 2 Securing the Chemicals Venting and Opening the Chamber Configuring the Chemical Sources in Safe Mode Before performing the tasks described in this procedure you must put the chemical sources in a safe mode see Service Procedure 02 01 WARNING Do not proceed until the chemical sources are secure The chemical reservoirs in FIB systems contain hazardous materi als Labels affixed to the exterior of a chemical cabinet identify the chemical s contained inside If a chemical source is not in its safest state as described in Service Procedure 02 01 it is possible for a combination of component failures to release the chemical s through a cabinet s delivery line a roughing line a purging line or from a chemical reservoir into the work chamber Do not open the workchamber or disassemble any part of the vacuum pumping system or detach any gas line from any chemical cabin
24. full charge Pneu Valve Shutdown PushButton Switch i l PROCESS GAS SHUTOFF Liquid or Solid Etchant e g XeF Powder 11 001 VALVE Figure 1 GAE Cabinet Layout with Clo Revision B 3 97 Page 3 of 12 11 01 Chlorine Cylinder Replacement Gas Control Popup SetPoint T ON opens valve and akValve downloads setpoint OFF closes valve and down loads a setpoint of 0 00 Set B T Value Qt Downloads edited setpoint value Purge Check Valve i On Off XeF2 Cz ni mus Oo TC1 Rough via Pump Read 3 back iis RPI rci ooioT E M VACUUM CHAMBER a po E Brel ag isolation wiz nciG 2 70E 05 T XeF2 871 1 049 T Gas Assists J tching 11 005 tif Click on valve icon to get setpoint dialog box g Edit text field or use up dn Selects arrows tg enter new setpoint Increment by which up dn arrows gae v17 pop popup E change setpoint Figure 2 Gas Control Popup Dialog Boxes TC1 updates only while RP1 rough pump is activated the system updates HCIG and BT1 readouts at all times Page 4 of 12 Revision B 3 97 Chlorine Cylinder Replacement 11 01 Part 2 Outline This section is only an overview The actual procedure is given in Part 3 Do not use this overview in place of the actual procedure 2 1 2 2 2 3 2 4 2 5 2 6 Pump and purge the GAE syste
25. Carbon Cylinder Replacement 11 04 3 12 3 13 3 14 3 15 3 16 On the carbon cabinet door press the pushbutton switch to deactivate the pneumatic valves the lime green indicator light on the switch should go dark Put on the rubber gloves and safety glasses and remove the old cylinder assembly from the cylinder bay as follows NOTICE To avoid applying torque that may damage fittings and or disturb other gas line connections when making or breaking the coupling always use two wrenches one to immobilize the upper part of the coupling and one to tighten or loosen the nut on the lower side of the coupling a Loosen the coupling above the manual valve see figure 1 by holding the upper part of the coupling immobile with the 5 8 open end wrench and turning the nut with the 3 4 open end wrench It may be necessary to open the access door on the carbon box s main bay and work through the opening between the two bays Finish disconnecting the coupling by hand b Loosen and remove the two bottle clamp mounting screws nearest the outer edges of the bottle clamp see figure 1 Remove the clamp and place it aside being careful not to damage the wiring to the temperature sensor secured to the clamp c Loosen and remove the two cylinder assembly mounting screws see figure 1 and remove the assembly from the cabinet d Install a new VCR gasket on the old reservoir assembly e Remove the plastic protective ca
26. Figure 1 lon Gun Housing Top and Side Views Page 4 of 12 Revision B 3 97 lon Source Change 4 2 05 10 Remove the ion gun assembly Unscrew back out the four captive socket head screws until they protrude from the ion gun assembly the screws will act as legs to stabilize the ion gun assembly see Figure 2 Place the ion gun assembly upside down on a work sur face as shown in Figure 2 Do not scrape or mar the ceramic insulator or touch it with bare hands Hold Suppressor Cap Firmly Against Holder when Source Needle Protrudes Replacing Should Not See Light through Suppressor Cap Between the Two Surfaces Lu e e 4 Suppressor Holder Loosen Three 3 2 56 Screws in the Suppressor Holder Copper Contact Pads 3x Has thin film of Braycote 803 Alignment Pins 2 4 insulator MUN Captive Socket pe ud Head Screws 4 Top Flange Interlock Connector 05 002A 4 3 4 4 Revision B 3 97 Figure 2 The lon Gun Assembly Clean the ion gun assembly with lint free wipes and dry nitrogen Inspect the O ring and mating surface to make sure that they are clean and free of scratches Clean them if necessary Page 5 of 12 05 10 lon Source Change Part 5 Remove the Spent Source Suppressor Assembly 5 1 Use a 0 035 Allen wrench to loosen the three 2 56 socket head screws in the side of the suppressor holder see Figure 2 Car
27. Inspecting and Cleaning the Loadlock 2 1 2 2 2 3 Using a high intensity light inspect the loadlock inside and out for particulate contamina tion To see particles clearly shine the light over the surfaces at a low angle Use the vacuum cleaner and N5 blowgun to remove debris from interior and exterior areas surrounding the loadlock Do not disturb the wiring inside the loadlock If necessary use a clean room wiper dampened with isopropyl alcohol to wipe the interior of the loadlock and the underside of the loadlock door Inspect the O ring and the corresponding vacuum seal area of the door for scratches that could cause leaks If the O ring is seriously scratched or nicked it should be replaced If the vacuum seal area of the loadlock door is damaged contact Micrion Product Support a With gloved hands open the loadlock door and carefully remove the O ring from its groove in the loadlock housing You can use the long narrow end of a plastic tie wrap but do not use a sharp metal object to pry the O ring out of its groove but be extremely careful not to scratch or otherwise damage the O ring the groove or the surrounding vacuum surface of the loadlock housing Page 2 of 4 Revision B 3 97 06 02 Loadlock Inspection and Cleaning b Clean the O ring of old grease and debris by holding a clean room wiper around the O ring with one hand and gently pulling the O ring through the wiper 2 5 Inspect the following cable c
28. Lift the L2 assembly Beam blanking straight up until it OA assembly with clears the beam details shown blanking assembly 7Z T Figure 8 Removal of L2 Assembly Revision B 3 97 Page 8 of 12 Blanking Aperture Replacement 05 16 25 5 3 To avoid damaging the beam blanking assembly lift the L2 assembly straight up until it clears the beam blanking assembly Carefully balance the assembly on the lower column flange place a clean wipe under the assembly to avoid scratching the L2 and flange sur faces see Figure 9 Make sure that the wires are not strained if necessary use tie wraps or some other means to secure the L2 assembly so that the wires are not damaged Place a clean room wipe under the L2 assembly to avoid scratching surfaces Figure 9 L2 Assembly Removed and Placed on Column Part 6 Replace the Blanking Aperture 6 1 Use cotton applicators and acetone to remove the silver paint on the outside diameter of the blanking aperture see Figure 10 Revision B 3 97 Page 9 of 12 05 16 25 Blanking Aperture Replacement 6 3 6 4 6 5 6 6 Top view of blanking aperture bonded with silver paint N N Figure 10 Side and Top Views of Beam Blanking Aperture Insert a probe into the center bore of the blanking aperture and gently pry the blanking aperture loose NOTICE DO NOT CONTAMINATE THE COLUMN When removing the silver paint from the area of the blanking aperture do not
29. Marks Here Figure 4 Image Area Large Intersection of Silicon Grid c Select 100 um FOV Using the Stage popup or the joystick make a relative stage move of 100 um in x Be careful not to move the joystick in the y direction d Zoom in to 1 um FOV for a few seconds to make the second mark e Zoom out to view the reference marks Focus the image f Stopimaging in Fast Scan mode 2 2 Use the Point Crosshairs to align the x and y axis a Tum on the Point Crosshairs feature by selecting Misc options Point Crosshairs from the menu bar at the top of the application program screen b To display the cross hairs click the left mouse button on the sign in the array of X Y Stage Motion Control stage arrows DO NOT click any mouse buttons while the cross hairs are displayed Doing so causes the stage to move c Place the cross hairs on the first reference mark as shown in Figure 5 2 3 Select Fast Scan Start While imaging adjust R116 in the example shown in Fig 5 turn counterclockwise until the second reference mark lines up with the horizontal cross hair Figure 6 shows the two reference marks on the x axis 2 4 Use the Measure Tool in the FIB application program to verify that the x axis offset angle of the two reference marks is as close to zero as possible Page 4 of 6 Revision B 3 97 Scan Rotation Calibration 07 02 Reference
30. Screws 4 Lower Column Figure 1 Flood Gun Lowered and MCP Disconnected Side View 2 5 Note the rotational position of the lower shield The lower shield must be reinstalled in its original position for proper MCP alignment Remove the lower shield by loosening the three Phillips head screws see Figure 2 Remove 3 Phillips head screws to remove shield 2 shown e Figure 2 Side and Bottom Views of Lower Shield with Mounting Screws Page 4 of 12 Revision B 3 97 Blanking Aperture Replacement 05 16 25 WEAR GLOVES DO NOT HANDLE SOLVENTS When working inside the chamber or when handling any components that will be exposed to vacuum wear gloves rated for Class 100 environments or better Due to disinte gration of such gloves by solvents do not handle solvents or parts that are wet with solvent NOTICE LOWER COLUMN ELEMENTS ARE FRAGILE Handle the lower column and its elements with great care Any scratches will ruin the lower column Lens 2 elements Also any metal tracks left on ceramic surfaces cause serious problems with the column operation Part 3 Loosen the L2 HV High Voltage Cap Screws Loosen the L2 high voltage cap until there is enough play to remove the high voltage feed tube See Figure 3 Ground Electrode S RCD N E INI Beam Blanking Assembly outline Cap Screws 5 2 shown Figure 3 Side Cross sectional View of Column on Bench with Lower Sh
31. Service Procedure Title Column and Lens Curing 10 nm Column Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service After Pumpdown following venting or HV Shutdown Introduction This procedure describes how to cure the lower lens L2 in the Micrion 10 nm ion beam column Curing refers to the process of conditioning the lens by slowly increasing L2 voltage Use this procedure after the workchamber has been vented when installing a new column or after you have performed preventive maintenance or repairs on an existing column You can eliminate particulate contamination by following Service Procedure 05 02 10 Cleaning the Lower Column Lens 2 Elements 10 nm Column Required Materials This procedure requires the following materials e Standard field service toolkit Voltmeter NOTICE If L2 is not cured properly there is risk of severe damage to the column Part1 Preparation 1 1 Make sure that the system pressure is less than 1 5 x 10 torr and that the pumps and valves are in the proper states 1 2 To detect pressure bursts with greater sensitivity and shorter response time than are pro vided by the LEDs on the MiniVac controller panel connect a multimeter to the BNC con nector labelled V mA on the MiniVac controller panel Normal high vacuum is in the range of 100 to 150 millivolts Revision B 3 97 Page 1 of 6 05 12 10 Column and Lens Curing 1 3 1 4 1 5 1 6
32. SysCon power 15VDC 3 TP8 Imaging problems bbaper Using the Brightness knob you should be able ionf elecf video electronics to adjust from 0 5V to 2 5V gain See Part 1 Input to video A D TP9 SysCon power 15VDC 4 3 TP10 Imaging problems bbaper 5VDC 5 power for 8 bit flash ADC ionf elecf ripple lt 50mV p p TP11 SysCon power 5VDC 3 TP12 Pixels Imaging problems When making column sense measurements bbaper ionf elecf measure pixel clock is a pulse train of 4k pulses 24 ment usec period 100 msec burst TP13 Quad anode offset DAC 2V 5 reference for quad anode offset 8000 only quad calibration DAC U44 pin 26 Imaging problems bbaper 2VDC 4 596 reference for 8 bit flash ADC ionf elecf ripple lt 50mV p p Revision B 3 97 Page 3 of 8 12 10 1381 Board Part 1 Video Electronics Gain Test 1 1 Power down as described in Service Procedure 01 02 so you have safe access to both the MCP power supply and the SysCon boards WARNING Dangerously high voltages are present while the FIB sys tem is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and auto procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies To verify the gain and bandwidth characteristics of the video electronics chain proceed as fol lows 1 2 Setu
33. This procedure requires the use of the following materials and equipment Standard field service engineer s tool set Clean room gloves Lint free wipes Braycote 602 black vacuum grease Braycote 803 white vacuum grease NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 3 task Specifically Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules Revision B 3 97 Page 1 of 6 03 02 Stage Lead Screw Lube Part 1 System Preparation Configure the Chemical Sources in Safe Mode Before performing the tasks described in this procedure you must put the chemical sources in a safe mode see Service Procedure 02 01 WARNING Do not proceed until the chemical sources are secure The chemical reservoirs in FIB systems contain hazard ous materials Labels affixed to the exterior of a chemical cabinet identify the chemical s contained inside If a chemical source is not in its safest state as described in Service Procedure 02 01 it is possible for a combination of component failures to release the chemical s through a cabinet s delivery line a roughing line a purging line or from a chemical reservoir into the workchamber Do not open the workchamber or disassemble any part of the vacuum pumping system or detach any
34. V15 and V16 closed reactivate valve V17 as follows a In the Gas Control Popup click on the valve V17 icon to obtain the setpoint dialog box and make sure that the LeakValve togglebutton reads OFF At the control panel for the MKS 244 pressure flow controller locate the valve mode selector switch on the right hand end of the controller see 4 rotate the switch clock wise to the EXT position and move the toggle switch to its middle position 2 If there is more than one MKS controller the controller for V17 may be identified by a strip of yellow cable marker tape Page 8 of 10 Revision B 3 97 Bromine Cylinder Replacement 11 03 Part 7 Reinstitute the Br 7 1 7 2 7 3 7 4 7 5 7 6 7 7 7 8 7 9 7 10 Open the manual valve on the Br cannister assembly by turning the unlabeled manual valve 1 4 turn counterclockwise The Br is shipped in 1 atmosphere 760 torr of N which must be removed before GAE operations can be performed Remove the N as follows a Check that the rough pump is on and that TC1 lt 0 01 torr b Open V19 then close V19 c Open V16 V17 and V15 are closed d Pump until TC1 lt 0 1 torr then close V16 e Repeat steps b d five times f Open V19 open V16 for 5 seconds close V19 g Pump until TC1 lt 0 01 torr then close V16 h Open V19 In the setpoint dialog box for V17 type in a setpoint of 7 00 and then click on the Leak Valve toggle button s
35. adjust the socket head screws with a 1 16 Allen wrench 2 4 Adjacent to the silicon grid is the focusing target It must be coplanar to even with at the same height as the reference block 2 5 Move the gauging head back to the silicon grid block The next part of the procedure is rough alignment Rough alignment begins with the gauging head at the value determined in step 2 2 The setting that you use for the height of the silicon grid block becomes the constant value i e the reference point for the five other checkpoints Part 3 Check for Stage Flatness and Adjust In this part you move the stage checkpoints one at a time under the gauging head The five check points are shown in Figure 6 e Silicon grid reference block e MicroMill HT Each of the three spacers 8000 and 9800 quartz flatness plate at three points on Faraday cup e Electron Faraday cup Each of the checkpoints can be raised or lowered Page 6 of 10 Revision B 3 97 Stage Height amp Carrier Flatness 03 06 The first iteration is for rough alignment of all checkpoints the next three iterations are for increasingly fine adjustment of the quartz flatness plate in relation to the silicon grid the final iteration checks the height of all checkpoints again ES ir OU Si grid block ee 1 s rJ T F Electron faraday cup MES Platelocation to y IO i Figure 6 Checkpoints for Stage Flatness Spacers used on MicroM
36. and 20 Joules Power Down the System Before performing the tasks described in this procedure you must power down the system f you are performing this procedure as part of routine weekly preventive maintenance use the application software to place the system in standby mode If you are performing this procedure prior to opening the workchamber power down and vent the system as described in Service Procedure 01 02 Shine the high intensity light on the surfaces at a low angle to properly highlight dust and dirt Revision B 8 96 Page 1 of 2 06 05 Process Module External Cleaning Part 1 Clean the External Surfaces of the Enclosure 1 1 Vacuum the surfaces of the top and side enclosure panels 1 2 Use a lint free wipe and clean room compatible solvent to clean the surfaces of the top and side enclosure panels 1 3 Remove the enclosure panels Part 2 Clean the External Surfaces of the Process Module 2 1 Vacuum the process module surfaces including the top of the workchamber the column the loadlock area the sides of the workchamber and the mounting plate 2 2 With the N blowgun blow off any areas that unreachable with the vacuum cleaner 2 3 Use a lint free wipe and clean room compatible solvent to clean the process module sur faces 2 4 Vacuum the system base plate and the floor around the system Part 3 Gaining Access to the Loadlock If you are inspecting and cleaning the loadlock and do
37. below is dependent upon the cleanliness of the column 3 13 Tighten the workchamber lid bolts Note this concludes the manual pump down of the workchamber The remainder of this section describes the manual pump down of the loadlock and assumes that the workcham ber has been pumped down the fore and turbo pumps are running and that the high volt age is enabled 3 14 Close the loadlock door 3 15 Start the rough pump by typing rpy 3 16 Open V1 with the following vacchat command opvl 3 17 Open V3 by typing opv3 2 Some FIB systems have CCIGs rather than HCIGs the commands ccpu or hcpu will work on either type Page 8 of 10 Revision B 3 97 Pump Down 04 03 3 19 3 20 3 21 3 22 3 23 3 24 3 25 3 26 Opening V3 begins the evacuation of the loadlock through a small diameter vacuum line and at a relatively low flow rate this reduces the amount of particulate contamination gen erated by the evacuation of the loadlock Open V4 by typing the following vacchat command opv4 Opening V4 continues the evacuation of the loadlock through a large diameter vacuum line Close V3 with the following vacchat command clv3 Check the status of TC2 by typing stt2 Wait until TC2 lt 0 065 torr Close V1 by typing clvi Turn off the rough pump by typing rpn Open VTP with the command opvtp Open V2 with the command opv2 When V2 is opened there is a burst of rough vacuum from
38. housing Rotate it as needed for proper alignment Tighten the two alignment screws that were initially loosened Making sure that the pin is centered connect the circular connector to the Deflection input Connect all high voltage cables and signal cables to the column see Figure 8 NOTICE AVOID BENDING PINS Be careful when reconnecting the 3 pin and 20 pin connectors The pins are easily bent Connect the vacuum bellows from the ion pump to the column Reattach the MCP connectors inside the chamber see Figures 6 and 7 Loosen the flood gun height positioning screw and slide the flood gun up until the lower portion of the flood gun assembly contacts is flush against the lower column see Figure 2 If necessary loosen the lateral positioning screws and adjust the lateral position of the flood gun to obtain a good fit against the lower column Make sure that the flood gun is aligned with points directly at the center bore of the MCP see Figures 1 2 3 4 and 5 Tighten the height and if used the lateral positioning screw s Close the workchamber and pump down the system see Service Procedure 04 03 Enable the high voltage power supplies Cure the column see Service Procedure 05 12 05 Heat the ion source see Service Procedure 05 11 Calibrate the deflection control system as described in Section 7 of this manual Revision B 3 97 Page 13 of 14 05 09 05 Remove Replace lon Beam Column Page 14 of 14 Re
39. lachrymator highly toxic Other precautions Do not store near nor allow contact with clothing and other combustibles Control Measures Respiratory protection required NIOSH MSHA approved respirator Ventilation should be handled only in a fume hood or glove box Protective gloves chemical resistant rubber or neoprene Eye protection 8 inch faceshield minimum Other protective clothing or equipment as required by your company Work hygienic practices wash thoroughly after handling Page 2 of 2 Revision B 3 97 Material Safety Data Sheet MSDS Perfluorinated Polyethers Fomblin Emergency contact 201 292 6250 General comments Fomblin oil is used as pump lubricant in Varian chemical series mechanical pumps such as the SD450 used as the fore and roughing pumps on Micrion 9000 and 8000 series FIB systems This MSDS is provided for general information only For information about the manufacturer of a particular chemical contact the environmental health and safety coordinator at Micrion Corpora tion 508 531 6464 Manufacturer Montefluos S P A Importer Distributor Ausimont 44 Whippany Road Morristown NJ 07960 Substance Identification Substance Perfluorinated PolyethersCAS 69991 67 9 Trade names and synonyms Fomblin Y 25 6 LVACChemical Family Fluorocarbons Molecular formula CF O CF3 CF gt O CF gt O CF3 CF3 Hazardous Ingredients None Physical Data Solubility in H20 insolubleA
40. or Triangular if serpentine 10V to 10V signal amplitude freq dwell time x pixels line x lines frame XDEF No scan but has signal on Same frequency and shape as XDAC but amplitude XDAC changes as MAG is increased may see some tilt YDEF No scan but has signal on Same frequency and shape as YDAC but amplitude YDAC changes as MAG is increased may see some tilt XLO1 2 No rotation no signal but Same frequency and shape as XDEF 9 twice the has scan at XDEF amplitude rotates when Rotate is selected YLO No rotation no signal but Same frequency and shape as YDEF 9 twice the has scan at YDEF amplitude rotates when Rotate is selected XUP No rotation no signal but Same frequency and shape as XDEF 9 twice the has scan at XLO amplitude rotates when Rotate is selected YUP No rotation no signal but Same frequency and shape as YDEF 9 twice the has scan at YLO amplitude rotates when Rotate is selected P4 Stigmation quad balance When quad balance is zeroed and X and Y stig problem knobs are swept across range voltage sweep is 7 5V to 7 5V Pin 1 Stig5 Pin 3 Stig6 Pin 5 Stig3 Pin 72 Stig4 Pin 9 Stig1 Pin 11 Stig2 Pin 13 Stig7 Pin 15 Stig8 P4 Lens shift problem panning When quad balance is zeroed and X and Y pan function knobs are swept across range voltage sweep is 10V to 10V Pin 532XUP Pin 55 XLO Pin 57 YUP Pin 59 YLO R103 and R116 R103 skews the X
41. state NOTICE CLEAN THE SURROUNDING AREA Before you vent the system clean the exterior of the process module and surrounding area The column is very sensitive to contamination Power Down and Vent the System Before performing the tasks described in this procedure you must power down and vent the sys tem see Service Procedure 01 02 Page 2 of 6 Revision B 3 97 Cleaning Column Elements 05 02 10 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Part 2 Remove the Column 2 1 Remove the column as described in Parts 1 2 3 and 4 of Service Procedure 05 09 10 Column Removal and Replacement 10 nm Column Bring the column to the work area immediately Cover any openings in the workchamber with aluminum foil CAUTION Use care when lifting and moving the column cap and col umn housing assemblies The column gun assembly weighs approximately 25 pounds 11 kg The column housing weighs approximately 50 pounds 28 kg If nec essary to avoid personal injury secure the help of another person 2 2 Place the column assembly upside down on the work surface 2 3 Note the rotational position of the lower shield The lower shield must be r
42. 1 of 24 Flood Gun Installation and Test 05 04 05 Part 1 System Preparation Configure the Chemical Sources in Safe Mode Before performing the tasks described in this procedure you must put the chemical sources in a safe mode see Service Procedure 02 01 WARNING Do not proceed until the chemical sources are secure The chemical reservoirs in FIB systems contain hazard ous materials Labels affixed to the exterior of a chemical cabinet identify the chemical s contained inside If a chemical source is not in its safest state as described in Service Procedure 02 01 it is possible for a combination of component failures to release the chemical s through a cabinet s delivery line a roughing line a purging line or from a chemical reservoir into the workchamber Do not open the workchamber or disassemble any part of the vacuum pumping system or detach any gas line from any chemical cabinet until you are sure that every chemical source attached to the FIB system is in its safest state Power Down and Vent the System Before performing the tasks described in this procedure you must power down and vent the sys tem see Service Procedure 01 02 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do no
43. 2 Secure the help of another person two people should be present during this procedure 1 3 Review the procedures provided by the site s Chemical Safety Officer governing tasks of this nature If no such procedures have been provided alert the site s Chemical Safety Officer that you will be performing this task If the site does not have a designated Chem ical Safety Officer alert site management personnel as well as any personnel present in the general area surrounding the FIB system that you will be performing this task 1 4 Identify exits safety shower eye wash station etc If the site does not provide an eye wash station a portable eye wash station should be procured 1 5 Assemble the tools and materials 1 6 Review the layout of the cylinder bay in the carbon cabinet see figure 1 1 7 At the FIB system workstation with the application software program running pull down the Gas menu and click on Carbon Control to obtain the Gas Control Popup dialog box for the carbon delivery system see figure 1 Part 2 Outline This part describes the overall strategy for changing the reservoir 2 1 Disable the reservoir cooler by disconnecting the electrical cable to the cooler 2 2 Close the manual shutoff valve on the old carbon cylinder assembly and rough pump the gas lines leading back to it 2 3 Remove the old carbon cylinder install the VCR plug and tag the cylinder 2 4 Install the new carbon cyli
44. 3 4 Turn on the rough pump Wait until TC1 reads lt 0 01 torr then open V43 3 5 Wait for BT1 to read base pressure 0 00 T 3 6 Close V53 turn off the rough pump 3 7 To switch off power to the solenoid valves press the push button switch labeled Pneu Valve Shutdown on the SiO cabinet so that the green light is off Before continuing be certain that the valves listed in the table below are in the specified state Table 3 Valve State V41 Closed V42 Closed V43 Closed V44 Closed V45 Closed Off V46 Closed V19 Closed Page 4 of 6 Revision B 3 97 Securing Chemical Sources 02 01 Part 4 Secure the Oxygen Cabinet Configure the O cabinet in the safe mode as follows 4 1 4 2 4 3 4 4 4 5 4 6 4 7 Access the Oxygen popup dialogue box and proceed Close the manual 1 4 turn valve on the O bottle assembly Close valves V51 through V56 Turn on the rough pump Wait until TC1 reads lt 0 01 torr then open V53 Wait for BT1 to read base pressure 0 00 T Close V53 turn off the rough pump To switch off power to the solenoid valves press the push button switch labeled Pneu Valve Shutdown on the O cabinet so that the green light is off Before continuing be cer tain that the valves listed in the table below are in the specified state Table 4 Valve State V51 Closed V52 Closed V53 Closed Off V54 Closed V55 Closed V56
45. 3 97 P S CBs Switches 12 02 Part 2 Checking Voltages on the Power Supply Terminal Blocks On the floor of Power Supply module are the terminal blocks shown in Figure 2 These terminal blocks can be checked for the voltages listed in Table 2 With a voltmeter test for specific voltages at the taps listed in Table 2 VN 1 8 1 8 1 8 02 04 Figure 2 Terminal Blocks on Floor of SysCon Power Supply Module Top View Table 2 Terminal Block Voltage Taps Voltage Terminal Block Test Taps Wire Colors 5 3 TB4 1 2 Red Black 15 3 5 6 Orange Black 15 4 3 7 8 Black Yellow dc 150 3 TB3 1 2 Blue Black 150 3 3 4 Violet Black 24 3 TB2 1 2 Blue Black dc Revision B 3 97 Also check the chassis ground lugs for secure connection Page 3 of 6 12 02 P S CBs Switches Part 3 Front Chassis Switches and Coax Connectors The SysCon front chassis switches are shown in schematic in Figure 3 and in physical location in Figure 4 they are described along with the coax connectors in Table 3 Table 3 SysCon Front Chassis Switches and Connectors Switches Function Main Power Power to all SysCon boards and to CB1 the Deflection Power MCP Power and Flood Gun switches Deflection Power S1 150V and 15V to column electronics MicroChannel Power to MCP power supply box preamp Plate MCP
46. 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service Every 18 months Introduction This procedure describes how to remove and replace the Varian Turbo V550 pump Materials Required This procedure requires the use of the following materials e Standard field service engineer s tool kit e V550 Turbo Pump Replacement Kit Micrion part number 100 012720 e V550 adapter flange Micrion part number 340 00330 NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 3 task Specifically Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules Revision B 3 97 Page 1 of 8 04 05 Turbo Pump V550 Power Down and Vent the System Before performing the tasks described in this procedure you must power down and vent the sys tem see Service Procedure 01 02 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Part 1 Prepare for Pump Removal 1 1 Switch off the circuit breakers shown in Figure 1 and switch off the power at the turbo pump controller on the
47. CHEMICAL SAFETY 02 01 SECURING CHEMICAL SOURCES IN THE SAFE MODE STAGE 03 01A CHECKING THE STAGE TRAVEL LIMIT SWITCHES 03 01B ADJUSTING THE STAGE LIMIT SWITCHES 03 02 STAGE LEAD SCREW INSPECTION amp LUBRICATION 03 04 Mic_STAGE PROGRAM FOR STAGE ACCURACY 03 05 LASER ALIGNMENT 03 06 STAGE HEIGHT AND CARRIER FLATNESS MEASUREMENT 03 07 CLAMP ACTUATOR INSPECTION VACUUM SYSTEM 04 01 VACUUM SYSTEM CHECKS 04 02 PROCESS MODULE VACUUM LEAK CHECK 04 03 PuMP DOWN AUTOMATIC AND MANUAL 04 04 ROUGHING FORE PUMP INSPECTION AND OIL CHANGE 04 05 TURBO PUMP REPLACEMENT 04 06 FORELINE TRAP ELEMENT REPLACEMENT 04 07A EPROM UPGRADE AND THERMOCOUPLE CALIBRATION 04 07B THERMOCOUPLE CALIBRATION COLUMN 05 01 COLUMN PARAMETER LOG 05 02 05 CLEANING THE LOWER COLUMN LENS 2 ELEMENTS 5 NM COLUMN 05 02 10 CLEANING THE LOWER COLUMN LENS 2 ELEMENTS 10 NM COLUMN 05 02 25 CLEANING THE LOWER COLUMN LENS 2 ELEMENTS 25 NM COLUMN 05 03 05 MCP REMOVAL AND REPLACEMENT 5 NM COLUMN 05 03 10 MCP REMOVAL AND REPLACEMENT 10 NM COLUMN 05 03 25 MCP REMOVAL AND REPLACEMENT 25 NM COLUMN 05 04 05 FLOOD GUN REMOVAL AND REPLACEMENT 5 NM COLUMN 05 04 10 FLOOD GUN REMOVAL AND REPLACEMENT 10 NM COLUMN 05 04 25 FLOOD GUN REMOVAL AND REPLACEMENT 25 NM COLUMN 05 05 APERTURE MECHANISM LIMIT SWITCH INSPECTION 05 06 EXTERNAL APERTURE INSPECTION LUBRICATION 05 07 APERTURE REMOVAL AND REPLACEMENT 05 09 05 COLUMN REMOVAL AND REPLACEMENT 5 NM COLUMN 05 09 10 COLUMN R
48. Carriage Drawing A Transport carriage F Hard stop B Alignment pins G Transport drive C 1 72 screws 2 H Roller bearing D Retract switch Rail E Retract switch adjustment screws J 3 32 socket head screw To ensure the cleanliness of the sample holder perform Service Procedure 06 01 Tighten the two 1 72 screws holding the tape to the transport carriage Figure 1 C Test the retract switch With a small screwdriver or other tool move the contact Figure 1 D towards the switch After about 1 16 of movement you will feel the switch being thrown The retract switch cuts off the DMTS signal Part 2 Alignment of the Rails 2 1 2 2 2 3 2 4 Begin with the transport carriage in the loadlock Use the vacchat command re to retract it if necessary Since the stage height is fixed start the alignment from the stage and move toward the platehold guide bridge and then to the loadlock See Figure 2 2 Aligning the Stage with the Loadlock Place a straight edge across the rails from the stage to the bridge Align both the tops and the sides of the bridge rails with the straight edge Use the straight edge to verify a continuous plane along the top and sides of the brass rails between the bridge and the loadlock Align the rails by lifting the loadlock up or down Revision B 3 97 Page 3 of 4 06 04 Transport Carriage Inspect amp Align within the bolt
49. Close the loadlock door 2 15 To begin manual pump down of the loadlock close VTP with the following vacchat com mand clvtp 2 16 Type the following vacchat command to close VTI clvti Be sure that VTI is closed before proceeding with the loadlock pumpdown If VTI is not closed before loadlock pumpdown begins the vacuum in the turbo pump line will suck contaminants from the roughing and possibly the exhaust line into the turbo pump and the workchamber 2 17 Open VI with the following vacchat command opvl 2 18 Open V3 by typing opv3 Opening V3 begins the evacuation of the loadlock through a small diameter vacuum line and at a relatively low flow rate this reduces the amount of particulate contamination gen erated by the evacuation of the loadlock 2 19 Open V4 by typing the following vacchat command opv4 Opening V4 continues the evacuation of the loadlock through a large diameter vacuum line 2 20 Close V3 with the following vacchat command clv3 2 21 Check the status of TC2 by typing stt2 Wait until TC2 lt 0 250 torr 2 22 Open VTI with the command opvti Note when TC2 lt 0 250 torr it is safe to open VTI It is recommended that VTI remain closed for as short a time as possible Page 4 of 10 Revision B 3 97 Pump Down 04 03 2 23 Check the status of TC2 by typing stt2 Wait until TC2 lt 0 065 torr 2 24 Close V1 by typing clvi 2 25 Open VTP with the command opvtp 2 26 Open V2
50. Continuous Filament Lead 1 Filament Lead 2 Continuous Filament Lead either Ground Not Continuous Filament Lead either Grid Lead Not Continuous Terminal 1 Ground Not Continuous Terminal 2 Ground Not Continuous Case Ground Not Continuous Page 12 of 24 Revision B 3 97 05 04 05 Terminal 3 Focus Lens Terminal 1 Deflection Nx Plates Deflection Plates Side View Flood Gun Installation and Test Bracket Ground Grid Lead socket Filament Leads pins Figure 10 Flood Gun With Snout Continuity Test Points Table 2 Flood Gun With Snout Continuity Tests From To Continuity Filament Lead 1 Filament Lead 2 Continuous Filament Lead either Ground Not Continuous Filament Lead either Grid Lead Not Continuous Terminal 1 Ground Not Continuous Terminal 2 Ground Not Continuous Terminal 3 Terminals 1 amp 2 Not Continuous Case Ground Not Continuous Revision B 3 97 Page 13 of 24 Flood Gun Installation and Test 05 04 05 Part 4 Install the Replacement Flood Gun 4 1 4 2 4 3 4 4 4 5 Fasten the flood gun assembly to the Workchamber Lid with the mounting screws see Figures 10 and 11 Flood gun adjustment be careful not to damage the MCP screen during the adjustment a To adjust a flood gun without a snout loosen the height adjustment screw and slide the flood gun up until the lower portion of the fl
51. Curve Action Diagram 2 1 2 2 2 3 2 4 2 6 2 T 2 8 Image the area at the FOV at which you will make your repairs From the Defect Control area of the main Control Panel menu select an existing ABB repair type for example ABB In the image field click the right mouse button to produce the Accelerator pull down menu select the Draw Box feature In the image window draw a box over a typical boundary area so the box contains roughly equal amounts of the two contrasting materials Click on the Start Repair button in the main menu The Box Repair Progress pie chart appears An inverted ABB image appears in the upper left corner of the display an image intensity histogram appears in the ABB window From the Misc pulldown menu select Curve Data Base The Curve Data Base Manager window appears In the Curve Data Base Manager select the New button The current image intensity histogram in the Adaptive Beam Blanking window is placed in the Curve Data Base Manager window with the default name Temp Curve In the Curve Data Base Manager window proceed as follows a Click on the Curve Name box b Type the name of the curve profile for example RST and press Enter c Click on Save The messages appear Saving Changes in Database and Done Revision B 3 97 Page 3 of 6 07 08 Reference Curve Calibration Part 3 Assign an Edge Lock Curve to An Expansion File In the following steps ex
52. Cylinder Replacement 11 04 Carbon Cylinder Replacement 11 05 Oxygen Cylinder Replacment 11 06 Siloxane TMCTS Cylinder Replacement 11 07 Siloxane TEOS Cylinder Replacement Revision B 3 97 Page 1 of 2 Page 2 of 2 Revision B 3 97 ZA Micrion Service Procedure No 11 01 Service Procedure Title Chlorine Cylinder Replacement Applicable Systems All Systems w Cl Frequency of Service As Needed Introduction Do not undertake this procedure without prior training and authorization by Micrion Corporation Do not use this document as a substitute for training Normally only Micrion service personnel perform this procedure This document has four parts 1 preparations 2 an outline of the pro cedure 3 the procedure and 4 the Material Safety Data sheet for chlorine Cl5 in Section 2 NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 3 task Specifically Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules Materials Required New recharged Cl cylinder procured from chemical supplier New Teflon gasket for the CGA 660 coupling normally comes with Cl cylinder e SNOOP liquid leak detector Protective CGA 660 cap for the old Cl cylinder Chemical resistant gloves Safety glasses L
53. Enter the Time Segment parameter three time segments should do the job You can change beam blanking and stage compensation in each time segment to help you deter mine whether it is the beam or the stage that is drifting a Time Segment Index 3 Three time segments are recommended they are incremented automatically b Reregistration Interval 60 sec The frequency with which the program returns to the original cross Segment Test Time 5 min d Beam Blanking Enabled Disabled e Stage Compensation Enabled Disabled 8000 only with laser interferometer f Threshold Value in Percent 50 The system calculates the distance from the surface of the sample to the depth of the milled etch and takes as a threshold value a user defined percentage of that depth 50 is the default The system calculates the width of the etch from the threshold points and finds the center of the etch With the Condition and Time Segment parameters edited select Save Configuration g With a file selected click on Etch Cross This initial cross is used as a reregistration reference see step 1 6b In the lower right corner of the window there are four Raw Data images of the scan pro file Adjust the contrast and brightness for high contrast During the test and after check the Drift Statistics for deviation current min and max Revision B 3 97 Page 3 of 6 05 14 Drift Test Fig 2 shows the milled cross The arrows point to the Y axis ends
54. Flood Gun Supply Board for connectors 7 3 Remove the 150 001130 board from its slot place it on an extender card and put the extender in the slot 7 4 Switch on the System Controller Chassis See Service Procedure 01 01 7 5 Referring to Service Procedure 12 12 verify that all the proper supply voltages are present on the board 7 6 Switch off the System Controller Chassis and return the 150 001130 board to its slot 7 7 Repeat steps 7 2 through 7 6 for the 150 001090 board See Service Procedure 12 11 Flood Gun Interface Board 7 8 Reconnect all external connections to the 150 001130 and 150 001090 boards 7 9 Switch on the System Controller Chassis 7 10 Switch on the Computer and wait for the bootstrap to complete 7 11 When prompted log in as micrion Revision B 3 97 Page 9 of 16 Flood Gun Installation and Test 05 04 25 Part 8 E Gun Resistance Checks 8 1 8 3 In the Flood Gun Control popup a Click on the filament graphic to obtain the filament control popup and manually slide the filament control to any value and then back to ZERO b Setthe remaining sliders to the following values Grid 0 Focus 0 Cathode 0 Deflection 0 Screen 0 Remove the cable from connector J1801 on the E Gun feedthrough port Connector J1801 and the E Gun feedthrough port are located on the right side looking from the front of the system of the workchamber lid The harness number on the label should
55. Functions No Board Name Board Function 125B Bit3 Computer to SysCon interface 841 Knob Panel Interface Knob panel interface keyboard separate 891 Stage Motor Drives Motor drivers X Y including 6 servo and 2 stepper channels 892 Aperture Motor Motor drivers aperture positioning including 6 Drives servo and 2 stepper channels 1082 Analog Drive Digital scan data downloaded from the Raster Gen 1110 board is converted to an analog signal Gen erates x and y scans plus stigmation lens shift and rotation 1110 Raster Generation Provides digital scan deflection data to Analog Drive board synchronizes imaging parameters to the Sig Acq 1381 Signal Acquisition Imaging signal acquisition 8 bit ADC column sense signals interface to Univision imaging board 1850 Frame Processor Randomly averages out the digital video noise 1090 Flood Gun Interface Computer to 1130 interface allowing control of all flood gun supply voltages readback of supply volt ages 1130 Flood Gun Supply Flood gun power and detector screen voltage FIL 1 CathB Grid Focus Deflection and Screen Page 2 of 6 Revision B 3 97 SysCon Overview 12 01 1082 1110 1381 1090 1130 Ext HH Figure 1 SysCon Boards Factory Configuration Revision B 3 97 Page 3 of 6 12 01 SysCon Overview Figure 2 is a block diagram of the SysCon boards and their relationship to the whole
56. How calculated y1 49878 um Pan knob ccw all the way y2 49811 um Pan knob cw all the way y displayed delta 67 um 49878 49811 67 Ys 70 um Measured distance y1 to y2 Rotate the Y Pan knob counterclockwise and burn a hole Record the Y position in your notebook as yl Rotate the Y Pan knob clockwise and burn a hole Record the current Y position in your notebook as y2 The difference between y1 and y2 is y displayed delta i e the difference between the dis played coordinates for y1 and y2 Zoom out to a FOV adequate to image both reference marks Using the Measure Tool measure the distance between the holes as shown in Figure 4 Refer to this value as Y This is the real distance from y1 to y2 To make y displayed delta as close as possible to the measured value of y calculate a new value for Column pan cal index 1 the y axis variable as follows Y xColumn pan cal index 1 new value ystage delta For example 70 E x Column pan cal index 1 new value Given a column pan cal value of 24 then a x 24 25 07 67 Revision B 3 97 Page 5 of 6 07 04 2 10 2 13 Pan Gain Calibration Using the Micrion Constants Editor edit the file usr micrion fib data Col umn M to change the Column pan cal variable to the value calculated in step 2 9 Column pan call new value To save the new value of Column pan cal index 1 exit the application program and th
57. Introduction The aperture drive gears located on the external drive plate require periodic inspection and if nec essary lubrication Materials Required This procedure requires the use of the following materials and equipment e Standard field service engineer s tool set Clean room gloves Lint free wipes Fluorinated solvent Braycote 803 white vacuum grease WARNING Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 3 task Specifically Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules Before powering down the system clean the exterior as described in Service Procedure 06 05 Revision B 3 97 Page 1 of 4 05 06 Aperture Mechanism Inspection Lubrica Part 1 System Preparation Power Down the System Before performing the tasks described in this procedure you must power down the system see Part 1 of Service Procedure 01 02 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Part 2 Inspect and Lubricate the Aperture Drives The a
58. Marks and Cross Hairs Figure 5 Reference Marks and Cross Hairs exaggerated for demonstration Note The angle of the grid is insignificant Most important is the angle between the ref marks EH Line up 2 Marks in X by Adjusting R116 o Figure 6 Adjust R116 for X Axis Alignment 2 5 To realign the bottom of the silicon grid with the x axis proceed as follows a Onthe Knob Panel turn on Scan Rotation Enable b Adjust Scan Rotation until the Si grid x axis aligns with the horizontal cross hair as shown in Figure 7 Measure Angle of Si Grid X le Axis after Adjusting R116 Figure 7 Align Si Grid X Axis to Cross Hair Revision B 3 97 Page 5 of 6 07 02 Scan Rotation Calibration Part 3 Y Axis Calibration 3 1 Align the y axis of the silicon grid with the vertical cross hair Place the y cross hair close to the edge of a column of silicon grid boxes as shown in Figure 8 Figure 8 Line up Vertical Cross Hair and Si Grid 3 2 Adjust R103 upper pot in Figure 3 until the y axis of the silicon grid aligns with the ver tical cross hair In the example in Figure 8 adjust R103 clockwise Figure 9 represents the result Adjust R103 Until Si Grid Y Axis Aligns with Vertical Cross Hair Figure 9 Adjust R103 for Y Axis A
59. NOTICE The system updates TC1 only while RP1 is activated the system updates cathode ion gauge and BT1 readouts continually Revision B 3 97 Page 5 of 10 11 02 Xenon Difluoride Cylinder Replacement Part 3 Pump and Purge GAE System Lines 3 1 3 3 3 5 3 6 Make sure that the GAE cabinet exhaust system is operating correctly Because the GAE cabinet door will be open the greater the exhaust flow the better If the flow is limited by a gate valve in the exhaust duct note the position of the gate valve so that you can restore it later and then open it fully 2 If the system has the cabinet door safety interlock shut off switch bypass it during this procedure Opening the cabinet door has the same effect as shutting off the Pneu Valve Shutdown it shuts off the dc power controlling the pneumatic valves To bypass the switch with the cabinet door open press the back of the switch actuator toward you until it clicks into the extended bypass position Make sure that the process module vacuum pump exhaust connections are secure and that the pump exhaust system is operating correctly Make sure that the pushbutton switch labeled Pneu Valve Shutdown on the GAE cabinet is illuminated dc power for controlling the pneumatic valves must be enabled at this time CAUTION When the Pneu Valve Shutdown switch is on there is a 24 volt 5 ampere dc potential present on the exposed connectors on the bank of solenoid operated
60. Name box to the Expansion File box in the Create Repair Types window e To change an edge definition on an Edge Lock curve click the Change button move the pointer to the position and click the left mouse button to add a yellow line at the new bound ary the middle button deletes the yellow line The following action diagrams are shorthand expressions of the individual procedures Revision B 3 97 Page 1 of 6 07 08 Reference Curve Calibration Part 1 Add a New Edge Lock Curve to the Data Base Perpendicular to the line where chrome meets quartz a raster is performed in 10 different places along that line The 10 samples are averaged to give a curve that shows the rate of change from black to white Add a new Edge Lock curve to the Data Base Select Edge Lock from the Accelerator menu Define a box along the boundary of the two materials L Select Curve Data Base from Misc pull down menu Click on the New button Type the name of the curve profile in the Curve Name box Click on the Save button Adding Edge Lock Action Diagram 1 1 In the image field click the right mouse button to produce the Accelerator pull down menu then select Edge Lock An Edge Lock Profile window appears the window is empty of any edge lock histograms 1 2 Define the Edge Lock box as follows a Center the cursor cross hair on the reference edge b Click the left mouse button drag the mouse to form the edge lock li
61. O V just the same b Increase L2 voltage again and record the voltage before the onset of noise Repeat this step once or twice to reach an L2 voltage of 40 42 kV without significant noise Once you have done so the procedure is complete If you cannot increase L2 voltage to 40 42 kV without incurring noise proceed to step 2 7 2 7 If step 2 6 does not eliminate noise below 30 kV proceed as follows a Locate the focus power supply in the electronic module rack Turn it off b Set the L2 control to 45 kV 1 The noise referred to is the arcing white flashes visible in the imaging screen while under continuous imaging The three indicators of sparking are Very short duration snowy or white streaks in the SIM image with the imaging conditions set up as described in Part 1 Short to medium duration snowy or white streaks or banding on a mostly snowy background suc cess depends upon technique and skill Total background snow with occasional streaks that is linear with lens voltage usually there is lit tle reaction as sharp pressure bursts from the ion pump current in this mode if this condition exists STOP IMMEDIATELY and consult a column guru i e one who is certified by the Micrion Optics Dept Revision B 3 97 Page 3 of 4 05 12 25 Column and Lens Curing c Turn on the focus power supply for 2 seconds and turn it off d Reduce the L2 control to 0 V and turn on the focus power supply e Increase L2 and
62. Power Down the System Before replacing the high voltage Filament cables power down the high voltage and turn off the power supply see Part 1 of Service Procedure 01 02 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Part 3 Centering the Source 3 1 Todisplay the Beam Screen select Beam Control on the Tasks menu 3 2 On the Beam Control popup turn Beam Maintenance off and Upper Scan off 3 3 Use the four ion gun housing adjustment knobs shown in Figure 1 to center the ion gun housing Use the sight gap the gap visible between the ion gun housing and the column to center the ion gun housing as accurately as possible with your eyes lon Gun lon Gun Housing t Adjustment Knobs v e Column assembly Figure 1 lon Gun Housing Side View NOTE Use care to maintain emission when adjusting the ion gun position so that the beam does not shut down 3 4 Click the Aperture icon on the Beam Screen and select Home on the popup Page 2 of 4 Revision B 3 97 Gallium Source Heating 05 11 3 5 3 6 3 7 3 8 3 9 3 10 Select a 13
63. Removal and Replacement 10 nm Column 05 09 25 Column Removal and Replacement 25 nm Column 05 10 Ion Source Change 05 11 Gallium Source Heating 05 12 05 Column and Lens Curing 05 12 10 Column and Lens Curing 05 12 25 Column and Lens Curing 05 13 Column Alignment 05 14 Drift Test 05 15 05 Aperture Shield Removal Inspection and Replacement 5 nm Column 05 15 10 Aperture Shield Removal Inspection and Replacement 10 nm Column 05 15 25 Aperture Shield Removal Inspection and Replacement 25 nm Column 05 16 05 Blanking Aperture Replacement 5 nm Column 05 16 10 Blanking Aperture Replacement 10 nm Column 05 16 25 Blanking Aperture Replacement 25 nm Column Revision B 3 97 Page 1 of 2 Page 2 of 2 Revision B 3 97 ZA Micrion Service Procedure No 05 01 Service Procedure Title Column Parameter Log Applicable Systems All Frequency of Service Daily Introduction To increase your ability to plan maintenance procedures and diagnose system failures record the column parameters daily in Table 1 Column and System Parameters on page 2 This record reveals performance trends that help you to maintain and service the machine The procedure begins with the beam up Part 1 Procedure 1 1 1 2 1 3 1 5 1 6 1 7 1 8 On the Microsurgery screen Mask Repair screen for 8000 select the Beam Control screen from the Tasks menu In the Beam Control screen turn on Readback Upd
64. Supressor voltage until the Extractor current is 20 WA Using the adjustment knobs adjust the position of the ion gun to minimize the extraction current reading in one axis repeat for the other axis and go back and forth adjusting the two axes When the extraction current is at its minimum reading the source is centered over the extractor aperture as much as possible see Fig 3 Click on the Source Icon Turn on Upper Scan and center the image in the window using the adjustment knobs Once you have centered the source reduce the extraction current to approximately 5uA using the appropriate voltage controls for the suppressor and extractor in the Beam Con trol popup If the source is new run it at approximately 5 WA for 30 to 60 minutes Figure 3 is a block diagram of the column filament extractor and suppressor currents Filament Accel i T B Suppressor h AEN LF MOR Extractor 04 d NN Figure 3 Block Diagram Suppressor Extractor and Filament Current With the apertures homed align the source through L1 as follows 1 12 1 13 1 14 Set the Field of View to 400 um using the arrows in the Microsurgery program or using the Magnification knob on the knob panel to decrease the field of view Move the stage to a focusing target such as the ion faraday grid Focus Lens 2 using the Focus knob or the L2 slider Re
65. The Create Repair Type window appears In the Create Repair Type window click on the repair name ABB in the menu The name is highlighted and appears in the Name box Click on the Params button The Raster Parameters popup appears In the Curve Data Base Manager window select histogram RST RST is highlighted in the menu and appears in the Curve Name box To assign RST to the parameters of the Repair Type in the Curve Data Base Manager win dow click the Assign button In the Raster Parameters popup the name of the image intensity histogram is placed in the Standard Curve File box To save the ABB parameters of the repair type in the Create Repair Type window click on the Save button and then click the Close button To save the current RT setup in the Create Repair Types window click on the Save button Revision B 3 97 Page 5 of 6 07 08 Reference Curve Calibration Page 6 of 6 Revision B 3 97 Section 8 Fluids Regulation 08 01 Fluids Regulator Pressure Check 08 02 Vibration Isolator Balance Adjustment Revision B 3 97 Page 1 of 2 Page 2 of 2 Revision B 3 97 ZA Micrion Service Procedure No 08 01 Service Procedure Title Fluids Regulator Pressure Check Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service Monthly Introduction This procedure describes how to measure the air pressure supplied to the isolation columns and the pneumatically operated valves It also descr
66. With the system up and imaging go to the electron faraday and center it in the field of view Open the Electron Flood Gun Control popup Misc menu Try optimizing the flood gun by using the automatic calibration function click on the Calibrate button in the Electron Flood Gun Control popup Note any anomalies so you know where to proceed next If you have a picoammeter connect it to the EFAR BNC on the work chamber If you only have a voltmeter hook it up to the EFAR BNC on the work chamber using the dual banana to BNC and a coax cable Set the voltmeter to the mV scale With a 10 Mohm input impedance you will see 10 mV nA in the cup Use this as a real time current monitor Revision B 3 97 Page 21 of 22 Flood Gun Installation and Test 05 04 10 Symptom Unstable Output Manually sweep the deflection voltage slowly using the small arrows in the popup A 0 1 V change on the deflection can have a big effect Watch the meter to see if the electron faraday cup current changes significantly If you see that the faraday cup current gets larger but then decreases steadily over a period of minutes or oscillates slowly something may be charging and either deflecting or suppressing the E gun output If the decrease is steady and does not return to the original value try varying the screen or deflec tion voltages If changing these potentials brings the beam back the beam is being deflected Pos sible causes of this are Deposits on th
67. XeF2 Add label Copy label Rename label Delete label S Quit Select Deposition Nozzle position label option n When you enter 2 or 3 the x y and z extended positions are displayed in hexadecimal microns and mils You are prompted as follows Active Deposition Nozzle 1 Z 2 22 10 02 In the examples above n will be the number of the nozzle that was most recently selected X Y and Z Directions From the front of workchamber here are the directions of movement Table 1 Depo Nozzles X Y and Z Directions Axis Direction Limit X Right East Positive X Left West Negative Home Y Forward toward rear Positive Y Back toward front Negative Home Z Up Positive Z Down Negative Home NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 5 task Specifically Equipment is energized Measurements and adjustments require physical entry into the equipment Revision B 3 97 Page 3 of 12 10 02 Dual Nozzle Replacement Part 1 Checking the Replacement Nozzles Inspect the nozzles for proper shape and bend radius the Z axis bend must be 90 deg or greater for each nozzle NC Nozzle Faraday Figure 2 Side View Correct Nozzle Bend Greater than 90 deg Part 2 Recording the Position of the Existing Nozzles Beginning with the work
68. again and record the voltage before the onset of noise Repeat this step once or twice to reach an L2 voltage of 30 kV without noise Once you have done so the procedure is complete If you cannot increase L2 voltage to 30 kV without incurring noise proceed to step 3 6 which is illustrated in Figure 2 Page 6 of 8 Revision B 3 97 Column and Lens Curing 05 12 05 Maximum L2 voltage without noise 30kV Onset of noise 24 kV 2 L2 Voltage in kV Figure 2 L2 Curing Procedure II 3 6 If step 3 5 does not eliminate noise below 30 kV proceed as follows a b 0 BO Locate the focus power supply in the electronic module rack Turn it off Set the L2 control to 30 kV Turn on the focus power supply for 2 seconds and turn it off Reduce the L2 control to 0 V and turn on the focus power supply Increase L2 and observe any gain in L2 voltage before noise is produced If necessary perform steps 3 3 and 3 5 again If there is still no gain in L2 voltage before noise is produced repeat this step with L2 set to 30 kV The procedure is complete If you are unable to bring L2 to 50 kV without noise after following this procedure please call the Micrion Optics Dept If you are unable to cure the column without great difficulty please call the Micrion Optics Dept Revision B 3 97 Page 7 of 8 05 12 05 Column and Lens Curing Page 8 of 8 Revision B 3 97 ZA Micrion Service Procedure No 05 12 10
69. and Database Update Applicable Systems 8000 Micrion 9800 FlipChip Frequency of Service As needed Introduction The reference curve data base is a collection of histograms and edge profiles it is one of the Misc options Due to the differences in masks there should be a reference curve profile entered in the database for each type of mask Reference curves also called model curves are used in edge placement during repair There are two types of reference curves Edge Lock and ABB Edge Leck quartz chrome ABB Figure 1 Reference Curves Edge Lock and Adaptive Beam Blanking In this procedure immediately after creating a new reference curve you assign it to either an expansion file Edge Lock or to a repair type ABB A standard curve may be assigned to more than one repair type or more than one expansion file For example a standard edgelock curve for a certain mask may be assigned to two different expansion files one of the expansion files used for opaque repairs on that mask and the other expansion file used for clear repairs Graphic User Interface Conventions e Press the Return or Enter key when changing names in boxes Clicking on the Save button saves all current information from the displayed window Closing any window without saving means all changes are lost Clicking the Assign button in the Create Expansion Factors window assigns the highlighted file in the Expansion
70. and gas exposure With the system up and imaging go to the electron faraday and center it in the field of view Open the Electron Flood Gun Control popup Misc menu Try optimizing the flood gun by using the automatic calibration function click on the Calibrate button in the Electron Flood Gun Control popup Note any anomalies so you know where to proceed next If you have a picoammeter connect it to the EFAR BNC on the work chamber If you only have a voltmeter hook it up to the EFAR BNC on the work chamber using the dual banana to BNC and a coax cable Set the voltmeter to the mV scale With a 10 Mohm input impedance you will see 10 mV nA in the cup Use this as a real time current monitor Page 14 of 16 Revision B 3 97 05 04 25 Flood Gun Installation and Test Symptom Unstable Output Manually sweep the deflection voltage slowly using the small arrows in the popup A 0 1 V change on the deflection can have a big effect Watch the meter to see if the electron faraday cup current changes significantly If you see that the faraday cup current gets larger but then decreases steadily over a period of minutes or oscillates slowly something may be charging and either deflecting or suppressing the E gun output If the decrease is steady and does not return to the original value try varying the screen or deflec tion voltages If changing these potentials brings the beam back the beam is being deflected Pos sible causes of this ar
71. as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supply At the rear and right side of the process module are the fluids regulator panel the isolation system primary pressure gauge and the pressure gauge for the front isolator See Figure 1 1 2 Read the right hand gauge labeled DN Vent on the fluids regulator panel see Figure 2 and record the pressure in the system logbook OQ A Fluids Reguator Front Figure 1 Location of Fluids Regulator Panel Top View The DN dry nitrogen pressure gauge on the fluids regulator panel should read between 3 and 5 psi when the system is under vacuum V3 closed Page 2 of 4 Revision B 3 97 Fluids Regulator Pressure Check 08 01 A VALVE AIR soaron f DN VENT MU S uk ON e ON e ON Figure 2 Fluid Regulator Switches Side View The need to make an adjustment to the DN supply pressure indicates a change that you should investigate Consider the following The facility s nitrogen supply pressure should be between 15 and 40 psi The lower the pressure the longer it takes to vent the FIB system Leaks in the nitrogen lines or faults in the fluids regulator can affect the gauge pressure and the venting time On the fluids regulator panel read the Valve Air gauge and record the pressure in the sys tem logbook see Service Procedure 05 01 for logging If the pressure
72. as follows Make sure that the loadlock door is shut av Revision B 3 97 Open a vacchat window see Service Procedure 09 03 At the vacchat prompt type the autovent command to vent the system Page 5 of 12 01 02 3 2 Power Down Vent and Reset To manually vent a single fore rough pump system proceed as follows see Figure 2 for valve locations Make sure that the loadlock door is shut Open a vacchat window see Service Procedure 09 03 At the vacchat prompt check the status of the valves by typing SV The system will display the status of the valves VIC V2C V3C V4C V5C V6C VIO VTIO VTPO The valves should be in the states shown above V1 through V6 should be closed and VTP and VTI should be open If any of the valves V1 through V6 is open close each valve by typing the vacchat close command For example V1 is closed with the following command clvi To begin manual pump down of the loadlock close VTP and VTI with the following vacchat commands clvtp CLVt1L Be sure that VTI is closed before proceeding with the loadlock pumpdown If VTI is not closed before loadlock pumpdown begins the vacuum in the turbo pump line will suck contaminants from the roughing and possibly the exhaust line into the turbo pump and the workchamber Open V1 and V3 with the following vacchat commands opvi opv3 Wait approximately 5 seconds then open V4 by typing opv4 Opening V
73. bring the Gain to 500 V and wait 5 seconds b Slowly bring the Gain to 1000 V and wait 5 seconds c Slowly bring the Gain to 1350 V d With no voltages applied to the column adjust the Gain to display sparse white speck les single electrons on the screen It may be helpful to darken the room Close the MCP Control popup Part 2 Curing Lens 1 This part of the procedure is to be used on systems in which the column is operated with a nega tive potential on Lens 1 the Lens 1 Voltage slider shows 15 kV to 20 kV possible The Accel erator voltage should be at O volts at this time 2 1 2 3 2 4 2 5 2 6 2 T While monitoring the column behavior slowly increase the lens 1 voltage until you observe noise then proceed based on the type of noise as described in the Introduction under three indicators of sparking Slowly bring the lens 1 voltage back down to 0 V and wait until the voltage readback catches up In the Jon Source popup set the Accelerator voltage to 0 V Set the Accelerator voltage to 5 kV Monitor the column behavior Set the Accelerator voltage to 10 kV Monitor the column behavior Using the Extractor Voltage slider slowly increase the Extractor voltage to 5000 V while monitoring the column behavior Increase the Accelerator voltage by 5 kV Monitor the column behavior Revision B 3 97 Page 3 of 8 05 12 05 Column and Lens Curing 2 8 2 10 2 11 2 12 2 13 2 14 2 15
74. chamber or when handling any components that will be exposed to vacuum wear gloves rated for Class 100 environments or better Due to disinte gration of such gloves by solvents do not handle solvents or parts that are wet with solvent Revision B 3 97 Page 3 of 4 10 04 Funnel Replacement Part 2 Removing a Funnel 2 1 Using pair of needle nose pliers gently remove each gas tube where it meets its connector on the funnel bracket 2 2 Locate the two screws at the top of the funnel bracket Loosen the two screws until the bracket slips free Bracket Screws af r Figure 2 Three Tubes and Two Bracket Screws on Funnel Part 3 Replacing a Funnel Perform Part 2 in reverse 3 1 Attach the funnel bracket with the two screws 3 2 Replace the gas tubes onto their proper barb fittings Clear tube GAE White tube O and Black tube TMCTS 3 3 On the left side of the outside of the workchamber connect circular connector J1402 Part 4 Setting the Temperatures on the Heater Board See Service Procedure 10 07 Page 4 of 4 Revision B 3 97 ZA Micrion Service Procedure No 10 05 Service Procedure Title Funnel Alignment Applicable Systems 8000 Frequency of Service After Lateral Axis Alignment or Source Change Overview of the Alignment Procedures Alignment of the funnel includes four main steps e Coarse adjustment Power up and pump down Fine adjustment Fine alignment In this procedure
75. column pressure is normal between 1 0 and 2 0 x 106 torr the pump current scale the LED stack on the front panel of the Varian MiniVac controller for the ion pump shows no appreciable pump current no LED lighted A pressure burst may result in a pump current burst of several milliamperes If the current fails to return to 10 6 torr after five seconds or if it appears to be increasing you must quickly restore the potential that you are manipulating to a level that allows the pressure to recover To detect pressure bursts with greater sensitivity and shorter response time than are provided by the LEDs on the MiniVac controller panel connect a multimeter to the BNC connector labelled V mA on the MiniVac controller panel Normal high vacuum would reg ister as something in the range of 100 to 150 millivolts Curing is normally done by increasing the potential applied to an electrode In the remainder of this procedure the statement monitor the column behavior means watch the image for signs of sparking in the column and watch the ion pump current indicator In all cases curing should be done as described in step 3 4 Part 1 Preparation 1 1 Make sure that both the system pressure and the column pressure are less than 1 5 x 10 6 torr and that the pumps and valves are in the proper states 1 2 To detect pressure bursts with greater sensitivity and shorter response time than are pro vided by the LEDs on the MiniVac controller panel
76. command to bring the nozzle subassembly to the home position which in the Y direction is contacting the forward Y limit switch hy To find the Y positive limit switch type ypl To Verify the Nozzle Position To verify that the retract and extend positions have been detected by the limit switches type the following three commands to get confirmation or denial by the system that the limit switches have been contacted sdzp sdxp sdyp Page 2 of 2 Revision B 3 97 ZA Micrion Service Procedure No Service Procedure Title Applicable Systems Frequency of Service 10 07 Making Heater and Cooler Board Settings Micrion 9800 FlipChip 8000 As Needed Part 1 Setting the Temperatures on the Heater Board In this part you make software settings on board 1583 and test the new subassembly The follow ing procedure assumes that the reservoir under discussion is VR2 the one on the right If the nozzle subassembly is actually the one on the left then substitute VR for VR2 in all commands 1 1 1 2 With the vacchat command retract the nozzle subassembly jr Set potentiometers R8 R76 and R100 to their lowest settings see Fig 1 Table 1 Temperature potentiometers and how to adjust them Potentio Senses Vacchat To Raise To lower Test point meter command Temp Temp 50mV C R76 valve shimt turn ccw turn cw TP1 R100 nozzle shint TP2 R8 reservoir shirt turn cw turn ccw TP3 s
77. connect a multimeter to the BNC con nector labelled V mA on the MiniVac controller panel Normal high vacuum is in the range of 100 to 150 millivolts 1 3 Make sure that the normal resistive cables p n 160 6444 are connecting the filament to its power supply F and F on the rear of the high voltage power supply 1 4 Display the Beam Screen select Beam Control on the Tasks menu 1 5 On the Beam Screen click on the image area with the left mouse button to display the Beam Control popup Throughout this procedure you will use the sliders in the Beam Control popup to control most of the column voltages 1 6 In an xterm window type hvshell Page 2 of 8 Revision B 3 97 Column and Lens Curing 05 12 05 1 9 1 10 1 11 In the hvshell type the command that enables high voltage hvenbl 1 Allow the hvshell to continue running in the background NOTICE Do not use the lon Source popup to enable high voltage because this automatically places Lens 1 and Lens 2 at a voltage level that is potentially damaging to the column On the Beam Screen lower right select electron imaging mode select the 256 pixel image size and start continuous imaging at the fast rate Turn the Brightness knob on the control panel until the image changes from gray to black On the Beam Screen click on the MCP graphic to display the MCP Control popup With the Bias slider set at 400 set the Gain slider as follows a Slowly
78. contaminate the column with silver paint particles acetone silver paint residue or other contaminants Use cotton applicators and acetone to clean any remaining silver paint residue from the end of the beam blanking assembly Place the new blanking aperture in the shallow 0 004 deep counterbore on the end of the beam blanking assembly The blanking aperture must be seated in the counterbore to ensure proper alignment Shake the silver paint to mix it thoroughly NOTICE DO NOT CONTAMINATE THE COLUMN When applying silver paint to the outside diameter of the blanking aperture do not contaminate the column with silver paint Use cotton applicators and acetone to remove any spilled paint Use a sharp wooden pick to apply a thin bead of silver paint around the outside diameter of the blanking aperture see Figure 10 Let the paint dry for approximately 15 minutes Page 10 of 12 Revision B 3 97 Blanking Aperture Replacement 05 16 25 6 7 Reinstall the lower column Lens 2 assembly Part 7 Clean the Lower Column 7 1 7 2 Examine the lower column for contaminants under high intensity light Figure 3 shows the lower column elements Use the lens brush cotton tipped applicators and nitrogen to gently clean off any contam inants you find use the nitrogen to remove contaminants from areas that you are not able to reach with the brush or cotton tipped applicators Ground element surfaces are espe cially susceptible t
79. dc power controlling the pneumatic valves is shut off Bypassing the switch restores dc power to the pneumatic valves Close the manual valve on the Carbon cylinder assembly by turning it 1 4 turn clockwise Gain access to the Carbon Gas Control Popup dialogue box Close valves V31 through V36 To close valve V35 click on the valve icon to obtain the setpoint dialog box then click on the LeakValve toggle button so that it reads OFF Click on the RP FP for single pump systems icon to turn on the roughing pump Wait until TC1 reads lt 0 01 torr then open valves V31 V32 and V33 Wait for BT1 to read base pressure 0 00 T Close valves V31 V32 and V33 then turn off the roughing pump Revision B 3 97 Page 3 of 6 02 01 Securing Chemical Sources 2 8 To switch off power to the solenoid valves press the push button switch labeled Pneu Valve Shutdown on the Carbon cabinet so that the green light is off Before continuing be certain that the valves listed in the table below are in the specified state Table 2 Valve State V31 Closed V32 Closed V33 Closed V34 Closed V35 Closed Off V36 Closed Part 3 Secure the Siloxane Cabinet Configure the SiO cabinet in the safe mode as follows 3 1 Access the Siloxane popup from the Misc menu and proceed 3 2 Close the manual 1 4 turn valve on the SiO bottle assembly 3 3 Using the Gas Control popup close valves V41 through V46
80. direction of the raster R116 skews the Y direction of the raster See Service Procedure 07 02 for complete instructions on Scan Rotation Calibration Using the XY display mode on the oscilloscope observe X and Y signals simultaneously set Vertical Sensitiv ity to 5V div on each channel The resulting image is a box This is the preferred way to look at signals 2T using Rotated Scan X and Y are summed the signal is difficult to read unless in XY mode Page 2 of 4 Revision B 3 97 Analog Drive Board 12 07 Part 1 Analog Drive Test Points Before placing the board on an extender power down according to Service Procedure 01 02 WARNING Dangerously high voltages are present while the FIB sys tem is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Ser vice Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Revision B 3 97 Page 3 of 4 12 07 Analog Drive Board Page 4 of 4 Revision B 3 97 ZA Micrion Service Procedure No 12 09 Service Procedure Title Raster Generator Board 1110 Applicable Systems All Frequency of Service As needed Introduction The Raster Generator board generates digital raster data via the P2 bus to the Analog Drive board where the digital values are converted to analog voltages for beam control and positioning The Raster Generator board also supp
81. for example np1600 Terminate root status exit a Test the installation by entering cd usr micrion fib data tiff l tiff print filename J where ilename is the name of a TIFF file to be printed Part 2 Configuring for Direct Connection 2 1 Create the tiff print file Acopyofatiff print file is included in the application software release It is named tiff print new to prevent the installation of software releases from overwriting an existing copy of the file When installing the network printer for the first time make a renamed copy of this file as follows cd usr micrion fib bin 4 cp tiff print new tiff print d Thetiff print file is the script or command for sending files to the printer and it includes the printer s host name The default host name is cnp You can use this default name in which case it is unnecessary to edit the file Create the ftp macro file Use the cat command to create the tp macro file as follows Note that you will not get a prompt while the cat function is operating and that the cat function must be ter minated by pressing the ctrl d key combination Enter cd usr micrion J cat gt ftp macro J binary 4 put tmp tiff J quit 4 crl d Revision B 3 97 Page 3 of 4 09 06 Network Printer 2 3 Create the net rc file Use the cat command to create the net rc file and then use the chmod command to set its access permissions cat
82. gas line from any chemical cabinet until you are sure that every chemical source attached to the FIB system is in its safest state Power Down and Vent the System Before performing the tasks described in this procedure you must power down the high voltages and vent the system see Service Procedure 01 02 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Open the Workchamber Remove the front panels to gain access to the workchamber cover When the system is completely vented remove the 1 2 socket head cap screws and open the workchamber Page 2 of 6 Revision B 3 97 Stage Lead Screw Lube 03 02 WEAR GLOVES DO NOT HANDLE SOLVENTS When working inside the chamber or when handling any components that will be exposed to vacuum wear gloves rated for Class 100 environments or better Due to disinte gration of such gloves by solvents do not handle solvents or parts that are wet with solvent Part 2 Lubricate the X Axis Lead Screw Whenever possible move the stage by means of the Motorshell program or by using the stage icons in the application program It is also possible to move the stage manually by rotating the x axis lead screw from
83. gloves Reapply a small amount of lubricant onto the gear teeth and work it in by driving the appropriate axis Apply more lubricant if necessary Do not over lubricate the mechanism A minimal amount of lubricant is required to adequately lubricate the worm gears X Aperture Drive Apply Lubricant Braycote 803 to worm gears if nec Y Aperture Drive Figure 2 External Drive Plate for Aperture Mechanism with Lubrication Points Revision B 3 97 Page 3 of 4 05 06 Aperture Mechanism Inspection Lubrica Page 4 of 4 Revision B 3 97 ZA Micrion Service Procedure No 05 07 Service Procedure Title Aperture Removal and Replacement Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service As Needed Introduction Normal system operation causes apertures to wear When the wear is excessive replace the aper ture Apertures may be changed individually or as a set You may choose to replace the whole mechanism Column and workchamber preventive maintenance procedures including aperture replacement are significant sources of column contamination While performing this procedure take the time to thoroughly clean the column workchamber and the area surrounding the machine Required Materials This procedure requires the following materials Cleanroom preferably with a class 100 airflow hood Dental pick or similar tool Sharp wooden pick e g a toothpick Stereo microscop
84. gt netre J machine cnp login micrion password 2 dJ cErlI d chmod 600 netre 4 Note the assumption that the default host name cnp is being used 2 4 Get the IP address for the printer The etc hosts file on the FIB system computer contains lines that associate IP addresses with alphanumeric host names Normally one of the default entries is 204 176 154 253 cnp Make sure that entry exists by entering grep cnp etc hosts 4 The response should be exactly as shown above If it is and if the default host name cnp is being used you do not have to make any change to the host s file If the entry does not exist in the hosts file open the file with the vi editor and add the entry line given above In either case you will have to install 204 176 154 253 as the IP address in the printer through the printer s control panel according to the instructions given in the operation manual supplied by the printer manufacturer 2 5 Check the hosts equiv file The contents of the etc hosts equiv file is a list of host names and the host name for the printer must be included If the default host name cnp is being used verify that it is listed by entering grep cnp etc hosts equiv 4 If the response is not cnp the entry is not in the file open the file with the vi editor and add the entry line 2 6 Test the installation You can test the installation by entering cd usr micrion fib data tiff d tiff print filenam
85. holes of the loadlock backing plate 2 5 Finish the alignment with the transport carriage in the loadlock and check the travel of the transport carriage as follows NOTE Load position can also be changed if adjustment in the X axis is required 2 6 With no sample holder loaded onto the transport carriage check for smooth travel of the carriage between the loadlock and the stage a Lower the velocity of the transport carriage so that any binding of the carriage will be obvious The default velocity setting is 60 hexadecimal In an xterm window running the vacchat program reduce the velocity to 20 hex by typing tv20 b Type the following vacchat command to extend the carriage into the chamber ex Check that the transport proceeds with no binding d Type the vacchat command to retract the carriage into the loadlock re e Check that the transport retracts with no binding 2 7 Ifthe transport does not move it may not be due to binding but to a lack of sufficient volt age Therefore increase the tv setting by increments of 4 hex to make sure there is enough voltage to move the transport a As soon as the transport moves cycle the sample holder back and forth to check for binding b When the procedure is finished set the transport velocity back to its normal setting tv60 NOTE Correct alignment can also be verified by disconnecting the carriage from the tape By hand shuttle the carriage from the load chamber ac
86. in Fig 1 Table 1 Adjusting X and Y Limit Switches IF THEN loosen the closest switch breaker screws and Xplim greater than 150000 2000 um Move the switch breaker to the left Xplim less than 150000 2000 um Move the switch breaker to the right Xnlim greater than 0 2000 um Move the switch breaker to the left Xnlim less than 0 2000 um Move the switch breaker to the right Yplim greater than 150000 2000 um Move the switch breaker down Yplim less than 150000 2000 um Move the switch breaker up Ynlim greater than 0 2000 um Move the switch breaker down Ynlim less than 0 2000 um Move the switch breaker up Page 4 of 4 Revision B 3 97 ZA Micrion Service Procedure No 03 02 Service Procedure Title Stage Lead Screw Inspection amp Lubrication Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service Every Six Months Introduction The stage assembly consists of plates that move at right angles to each other by means of lead screws Proper lubrication of the lead screws ensures reliable operation of the stage This proce dure should be done only as needed Too much lubricant can interfere with proper performance of the stage This procedure provides details on The components of the stage that require lubrication The type of lubrication required Where and how to apply the lubrication Materials Required
87. in the Create Expansion Factors Expansion Name box is the same as in the Create Repair Types Expansion File box To assign the curve to the Expansion File click on XYZ in the Curve Database window On the Curve Data Base Manager menu select the Assign button The message appears Saving Curve XYZ to Expansion Type ABC The curve name XYZ appears in the Standard Curve File box To assign Expansion File ABC to Repair Type PDQ select the Assign button in the Create Expansion Factors window To save the Expansion File to the Repair Type in the Create Expansion Factors window click on the Save button To save the current RT setup in the Create Repair Types window click the Save button Page 4 of 6 Revision B 3 97 Reference Curve Calibration 07 08 Part 4 Assign an ABB Curve to Parameters and to a Repair Type In this procedure you assign an ABB curve to a set of Raster Parameters and to a Repair Type Lr To assign an ABB curve to Parameters and to a Repair Type Select the Create Repair Type window from main icon menu Click on the repair name Click on the Params button Select profile name from Curve Data Base Manager window Click on the Assign button Click on the Save button Click on the Close button In the Create Repair Types window click on the Save button Assigning ABB Action Diagram 4 4 4 5 4 6 4 7 Call up the Create Repair Type window by clicking on RT in the main icon menu
88. inter locked However any such safeguards can fail There fore do not touch any of the wiring in the process module while the FIB system is powered up Revision B 3 97 Page 1 of 4 Loadlock Inspection and Cleaning 06 02 Part 1 Gaining Access to the Loadlock 1 1 1 2 To inspect the loadlock without venting the system follow one of these steps Using the Load Unload icon in the application program unload the carrier from the workchamber This not only retrieves the carrier and transport carriage but also vents the loadlock Remove the carrier from the transport mechanism to continue with the procedure Using the Vacchat program vent the loadlock manually while leaving the specimen holder in the workchamber under vacuum with the following commands clv6 Close the gate valve to the loadlock clvl1d Close the valve to the rough pump clv2J4 Close the bleed valve to the workchamber opv54 Open the nitrogen supply valve opv34 Allow the loadlock to vent When the loadlock is vented open the loadlock door When the loadlock is vented close V5 with the vacchat command c1v5 then open the loadlock door NOTICE WEAR GLOVES DO NOT HANDLE SOLVENTS When working inside the chamber or when handling any components that will be exposed to vacuum wear gloves rated for Class 100 environments or better Due to disinte gration of such gloves by solvents do not handle solvents or parts that are wet with solvent Part 2
89. is powered up All high voltage wiring is heavily insulated and connections are inter locked However any such safeguards can fail Do not touch any of the wiring in the process module while the FIB system is powered up Revision B 3 97 Page 1 of 4 06 04 Transport Carriage Inspect amp Align Part 1 Inspection of the Transport Carriage 1 1 If a sample holder is in the workchamber retrieve the sample holder by selecting the Unload button on the Load Unload window on the Microsurgery menu bar NOTICE WEAR GLOVES DO NOT HANDLE SOLVENTS When working inside the chamber or when handling any components that will be exposed to vacuum wear gloves rated for Class 100 environments or better Due to disinte gration of such gloves by solvents do not handle solvents or parts that are wet with solvent 1 2 Vent the loadlock to atmospheric pressure see Service Procedure 01 02 Part 3 1 3 Open the loadlock door releasing the sample holder from the transport carriage 1 4 Tolift the sample holder from the transport carriage Figure 1 A slide the sample holder toward the rear of the loadlock and lift it clear of the alignment pins Figure 1 B Figure 1 Transport Carriage and Transport Tape Drive Top View Page 2 of 4 Revision B 3 97 Transport Carriage Inspect amp Align 06 04 1 5 1 6 1 7 Table 1 Call outs in Transport
90. it is mounted by one removable screw A and by one alignment pin B that engages the slot C at the end of the aperture blade 5 1 Inspect the end of the aperture blade for an alignment pin and slot the alignment pin and slot indicate that this aperture blade can be removed in three steps 5 2 Unhook the spring from the aperture blade see Fig 2 5 3 Loosen and remove the flathead countersunk screw A in Figs 2 and 3 5 4 Pull the aperture blade out Revision B 3 97 Page 5 of 8 05 07 Aperture Replacement Part 6 Replacing or Cleaning Individual Apertures If you are replacing the entire aperture blade go to Part 5 If you are replacing the entire aperture mechanism go to Part 8 6 1 Place the aperture mechanism under a microscope Locate the aperture s you want to replace 6 2 Remove the aperture s by carefully scraping away the silver paint with a dental pick 6 3 With the aperture s removed clean the counterbores on the aperture blade by scraping away any remaining silver paint with a sharp wooden pick Do not scratch the aperture counter bores Also while removing the silver paint be careful not to contaminate any other portions of the aperture blade with paint residue Blow away loose particles with dry nitrogen 6 4 Shake the silver paint to mix it thoroughly 6 5 Under the microscope insert the new aperture s in the correct position s on the aperture blade and bond it them in place with sil
91. not in its safest state as described in Service Procedure 02 01 it is possible for a combination of component failures to release the chemical s through a cabinet s delivery line a roughing line a purging line or from the tungsten reservoir into the workchamber Do not open the workchamber or disassemble any part of the vacuum pumping system or detach any gas line from any chemical cabinet until you are sure that every chemical source attached to the FIB system is in its safest state Power Down and Vent the System Before performing the tasks described in this procedure you must power down and vent the sys tem see Service Procedure 01 02 Part 3 Changing the hardware 3 1 Before proceeding see Service Procedure 01 02 Power Down Reset and Vent Page 2 of 4 Revision B 3 97 Upgrading to RS6000 Computer 09 05 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and auto procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies 3 2 Disconnect and remove the existing Bit 3 board and cable from the SysCon 3 3 If the SysCon is equipped with a Multiscan Board 150 000293 remove this board and replace it with the Raster Generator board 150 001110 3 4 Verify that the Signal Acquisition board 15
92. observe any gain in L2 voltage before noise is produced f If necessary perform steps 2 3 and 2 6 again 2 8 Ifthere is still no gain in L2 voltage before noise is produced finally with great caution repeat this step with L2 set to 30 kV The procedure is complete If you are unable to bring L2 to 40 42 kV without noise after following this procedure please call the Micrion Optics Dept Page 4 of 4 Revision B 3 97 ZA Micrion Service Procedure No 05 13 Service Procedure Title Column Alignment Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service After installing new source apertures or column Introduction This procedure describes how to align the ion beam column after performing maintenance proce dures such as installing a new source changing the aperture s or installing a new column This procedure includes two parts 1 Source alignment 2 Aperture alignment The approach is iterative and gradual first move the source a little then move the aperture a little gradually eliminating wobble until the wobble is gone Prerequisites This procedure assumes that you have properly installed the column the system is under vacuum and that you have conditioned the column if necessary The following Service Procedures are completed before alignment Column and Lens Curing and Source Heating WARNING While the FIB system is powered up dangerously high volt ages are present in t
93. of 6 05 13 Column Alignment Part 3 Aligning the Remaining Apertures Follow the procedures outlined in Part 2 Any significant x and or y offset in aligning the aperture will probably carry through to the other apertures Align all remaining apertures to the source using the aperture adjustment arrows do not move the source If you move the source after aligning any aperture you must begin the procedure again Page 6 of 6 Revision B 3 97 ZA Micrion Service Procedure No 05 14 Service Procedure Title Drift Test Applicable Systems 8000 Micrion 9800 FlipChip Frequency of Service As needed Introduction The drift test program first mills a user defined cross on a blank chrome plate In a defined num ber of iterations the program then scans the four ends of the cross and reports the deviation or drift of the centers of the two axes If there is a drift of either the stage or the beam it will be seen in the output illustrated in Fig 1 This procedure assumes the following e Chrome blank plate is in the workchamber e System is pumped down and operational e Xterm window is open If the drift is less than 0 25 um in ten minutes the drift is acceptable Materials Required Clean unscratched chrome blank plate Revision B 3 97 Page 1 of 6 05 14 Drift Test The graphical user interface for the drift test program is shown in Fig 1
94. of the chamber and place it upside down on a clean working surface Note The top surface of the column housing serves as a registration and a sealing surface and is susceptible to nicks and scratches Cover the open column port on the process module with the appropriate cover Using a high intensity light vacuum and clean the interior of the workchamber the ion pump tube and the loadlock Part 5 Column Installation 5 1 Move all cable assemblies and vacuum bellows clear of the column port on the process module allowing free access to the port CAUTION Use care when lifting and moving the column cap and col umn housing assemblies The column cap assembly weighs approximately 25 pounds 11 kg The column housing weighs approximately 50 pounds 28 kg If nec essary to avoid personal injury secure the help of another person NOTICE DO NOT DAMAGE THE MCP DURING COLUMN INSTALLATION To avoid damage to the MCP the column must be lowered straight down into the workchamber port this is especially important if the flat rather than angled style of MCP is installed on the column Ideally someone should guide the lower column and MCP down into the workchamber port while the column is being lowered Page 12 of 14 Revision B 3 97 Remove Replace lon Beam Column 05 09 10 5 2 5 3 5 4 5 5 5 6 5 T 5 8 5 9 5 10 5 11 5 12 5 13 5 14 5 15 5 16 5 17 5 18 5 19 Place the column housi
95. of the cross which are shown in detail in Figs 3 4 and 5 Figure 2 The Milled Cross with Y axis Ends Called Out Fig 3 shows an artist s rendition of the first scan The program calculates the threshold and deter mines from the threshold the width of the mill and the center of the mill Center of cross shown on scatter plot of Fig 1 as a Eight scans per end Depth Threshold Center of Y axis lt Width on 1st iteration Figure 3 First Iteration of Scans on Upper and Lower Ends of Y Axis Page 4 of 6 Revision B 3 97 Drift Test 05 14 Center of cross shown on scatter plot in Fig 1 as b Center of Y axis Total deviation on 2 iteration Figure 4 2 teration of Scans on Upper and Lower Ends of Cross Compare the center of the cross in Fig 3 with the center of the cross in Fig 4 As you can see by the relative distance of the Y axis from the shaded portion of the drawing there is a drift along the X axis Center of cross shown on scatter plot of Fig 1 as c Center of Y axis on n iteration Figure 5 N Iteration of Scans on Upper and Lower Ends of Cross Fig 5 shows iteration n of the drift test with the drift continuing in the positive x direction Revision B 3 97 Page 5 of 6 05 14 Drift Test Part 2 Evaluating the Drift Test If the drift is greater than 0 25 um in te
96. only on the software Power Down func tion Disable the voltages using both manual and automatic procedures Make sure that the low resistive cables p n 160 6444 rather than the normal resistive cables are connecting the filament to its power supply F and F on the rear of the high voltage power supply Display the Beam Screen select Beam Control on the Tasks menu On the Beam Screen click on the image area with the left mouse button to display the Beam Control popup Throughout this procedure you will use the sliders in the Beam Control popup to control most of the column voltages In an xterm window type hvshell In the hvshell type the command that enables high voltage hvenbl 1 Allow the hvshell to continue running in the background NOTICE Do not use the lon Source popup to enable high voltage because this automatically places Lens 1 and Lens 2 at a voltage level that is potentially damaging to the column On the Beam Screen lower right select electron imaging mode select the 256 pixel image size and start continuous imaging at the fast rate Turn the Brightness knob on the control panel until the image changes from gray to black On the Beam Screen click on the MCP graphic to display the MCP Control popup With the Bias slider set at 400 set the Gain slider as follows Slowly bring the Gain to 500 V and wait 5 seconds Slowly bring the Gain to 1000 V and wait 5 seconds Slowly bring the Gain to 135
97. operating speed the system will report Turbo pump is not ready When the turbo pump has reached its operating speed the system will report Turbo pump is ready Revision B 3 97 Page 7 of 10 04 03 Pump Down 3 8 When the turbo pump is ready bring up the hot cathode ionization gauge HCIG power by typing hcpu 3 9 After minimal exposure to atmosphere such as a source change it should take an hour for the pressure in the workchamber to get below 5 00 x 10 6 torr If the workchamber has been exposed to atmosphere for a prolonged period it will probably take several hours for the pressure to get below 5 00 x 10 6 torr To check the workchamber pressure type sthc 3 10 When the workchamber pressure has reached 5 00 x 10 torr start the ion pump with the following command ipy The ion pump housing should be cool to the touch If the housing is hot turn off the ion pump and check for problems in the vacuum system 3 11 To check the ion pump pressure type spip The ion pump pressure sensor will not read pressures above 5 00 x 10 6 torr it will dis play a reading of 5 00 x 10 6 torr until the ion pump pressure is below 5 00 x 10 6 torr 3 12 When the workchamber pressure has reached 3 00 x 10 6 torr close VI with the following command clvi The system will not enable high voltage until the ion pump pressure is below 3 75 x 10 E torr The amount of time it takes to pump down to pressures of 3 75 x 10 torr and
98. outside the workchamber with a 3 8 box wrench Be sure to wear clean room gloves and to rotate the lead screw as close to the stage housing as possible 2 1 In an xterm window start the Motorshell program by typing motorshell 2 2 Prepare to move the stage in the x axis by typing the command xstage 2 3 To move the stage to the right as shown in Figures 1 and 2 type move See Figures 1 and 2 for the location of the x axis lead screw in relation to the stage x axis lead screw y f ZA FRONT Figure 1 Top View of the Stage for the 8000 or the 9800 FlipChip Revision B 3 97 Page 3 of 6 03 02 2 4 2 5 2 6 Stage Lead Screw Lube If there are deposits of old lubricant on the x axis drive shaft use lint free wipes to remove the old lubricant Lubricate the x axis lead screw with a small amount of Braycote 602 black vacuum grease DO SO VERY GENTLY Make sure that stage movement is not impeded by any hardware or maintenance materials Work the lubricant in by moving the stage back and forth in the x direction with the fol lowing motorshell commands move move Apply additional lubricant a bead at a time and work it in as necessary Remove the excess lubricant in the area where the lead screw meets the housing beneath the stage x axis lead sc
99. per form a mill or a deposition If the mill or deposition is offset from the repair box you move the defined box till it overlays the mill or the depo Note the new coordinates and edit the Imagemode M file accordingly When Needed Mux shift should be calibrated when the source is stable before doing edge locks and after the following e Aperture blade replacement Flood gun calibration in ion or mux mode Power Up e MCP change e Funnel height change e Funnel re dag Materials and Tools Required None Revision B 3 97 Page 1 of 2 07 07 Mux Shift Calibration Part 1 Mux Shift Calibration Sample Repair Perform one sample repair as follows 1 1 Over a chrome area of the mask define an image at FOV 10 um and 1024 pixel resolution 1 2 Using the Box Modify tool draw a repair box at the top of the image screen Define the box as x 0 and y 4 with a 1 um height and 1 um width Note the box coordinates 1 3 Take an image of the repair box When the scan has covered the repair box terminate it 1 4 Select Default mill from the mill types 1 5 Begin the repair When the repair is finished immediately start a scan terminate the scan when it has covered the repair box and the mill 1 6 See if the mill is made inside the repair box If the repair area is not within the repair box move the repair box to overlay the repair area In moving the repair box to the repair area the x y location of the repair box is sh
100. pins N v X Figure 4 Flood Gun With Snout and Large MCP in 9800 System Interior View Revision B 3 97 Page 7 of 24 Flood Gun Installation and Test 05 04 05 Workchamber Flood Gun Height Positioning Screw Lower Column MCP Mounting Screws 4 Figure 5 Flood Gun With Snout and Large MCP Side View Page 8 of 24 Revision B 3 97 05 04 05 Flood Gun Installation and Test Lower Column 1 Loosen flood gun height adjustment screw behind the connector 2 Loosen gun mounting bracket screw BE a Z 3 Unplug ITI connector and remove flood gun Figure 6 Low Profile Flood Gun with Removal Procedure Side View Part 3 Inspect and Test the Replacement Flood Gun NOTICE THE FLOOD GUN AND ITS COMPONENTS ARE FRAGILE Handle the flood gun with care The flood gun leads are somewhat brittle and will break if they are bent back and forth excessively 3 1 Remove the shipping screw 3 2 Loosen the height adjustment screw Slide the upper bracket as far away from the lower flood gun as the height adjustment screw allows then tighten the height adjustment screw Revision B 3 97 Page 9 of 24 Flood Gun Installation and Test 05 04 05 Loosen height adjustment screw and slide upper BR Teea bracket in this direction behind the connector Flood Gun Height Adjustment Screw Behind the Connector Side View Flood Gun Late
101. s through a cabinet s delivery line a roughing line a purging line or from a chemical reservoir into the workchamber Do not open the workchamber or disassemble any part of the vacuum pumping system or detach any gas line from any chemical cabinet until you are sure that every chemical source attached to the FIB system is in its safest state Power Down and Vent the System Before performing the tasks described in this procedure you must power down and vent the sys tem see Service Procedure 01 02 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Clean off the exterior of the system as well as the floor see Service Procedure 06 05 Open the Workchamber Remove the front panels to gain access to the workchamber door Once the system is completely vented open the workchamber door by removing the 1 2 socket head cap screws Page 2 of 8 Revision B 3 97 Remove Install MCP 05 03 25 WEAR GLOVES DO NOT HANDLE SOLVENTS When working inside the chamber or when handling any components that will be exposed to vacuum wear gloves rated for Class 100 environments or better Due to disinte gration of such gloves by solvents do not handle
102. several seconds stop imaging 1 11 Zoom out to a FOV adequate to image the two reference marks They should look similar to Fig 2 with some offset angle 0 possible in x Page 2 of 6 Revision B 3 97 Pan Rotation Ortho Calibration 07 05 1 14 1 15 0 Figure 2 X Pan Offset Reference Marks Use the Measure Tool to measure the offset angle 0 from left to right between the two ref erence marks Record the value for 0 in your notebook Using the Micrion Constants Editor open the ib data Column M file Read the current value for Column square and record it in your notebook Use 0 to calculate the new value for Column square as follows Column square old value 0 Column square new value For example if the old value of column square is 64 and Theta 8 is 74 then 64 74 10 which is the new value for Column square Type the newly calculated value of Column square in the Column M file Exit the application program and the X window system by clicking the Quit amp Exit button in the Process Watcher Atthe shell prompt restart the X window system and the application program by typing xinit Repeat steps 1 3 through 1 12 to verify that the new value for Column square is cali brated so that the angle 0 is as close to 0 as possible for x Reset xpan and ypan to 0 in adshell If your application software is version 1 1 or ear lier do not continue wit
103. should still be on if it is not switch it on and wait at least 30 seconds for TC1 to register lt 0 01 torr In the GAE cabinet slowly open the manual valve labeled Purge see Fig 1 to admit nitrogen When the gauges on the pressure regulator approach 30 psi close the Purge valve Do not exceed 30 psi or you will risk damaging the gauge on the left hand side of the regulator Slowly open the manual valve labeled Vacuum Both gauges on the pressure regulator should go to 30 Hg Wait at least 30 seconds for TC1 to register lt 0 01 torr Open V15 When BTI indicates base roughing pressure 0 001 T close V15 and the manual valve labelled Vacuum one purge cycle is complete 3 10 Repeat step number 3 9 four times for a total of 5 purge cycles End with V15 closed and the roughing pump switched off Revision B 3 97 Page 7 of 12 11 01 Chlorine Cylinder Replacement Part 4 Remove Plug and Tag the Old Cylinder 4 1 Inthe GAE cabinet see Fig 1 Close the manual Vacuum valve Close the manual Process Gas valve Close the unlabeled valve between the pressure regulator and V14 Close the pressure regulator by turning the control knob fully counterclockwise 4 2 Put on rubber gloves and safety glasses and remove the old cylinder as follows Using the 1 1 4 open end wrench loosen the CGA 660 coupling b Using the appropriate hex key loosen and remove the front outer part of the anti torque clamp and pla
104. slider slowly through its range Verify that the proper voltages are present and that the system readbacks track the voltmeter Disconnect the Flood Gun Board Test Circuit Page 18 of 22 Revision B 3 97 05 04 10 Flood Gun Installation and Test Load resistor 1ohm 10W Chassis Ground EGun Cable Pins Point 1 to Point 2 Filament Current I E R which calculates to what is on the slider Point 2 to Ground Cathode Voltage CATV CATC readback on the beam control screen should equal CATV 1 Mohm If no 10W resistor is available you can use a 1W resistor if current is brief Figure 12 Flood Gun Board Test Circuit 9 4 Check the grid voltage control as follows a Switch the flood gun power switch S3 on the System Controller OFF b Connect the voltmeter between pins T Grid and P Ground c Switch the flood gun power switch S3 on the System Controller ON d Sweep the grid slider slowly through its range and verify that the voltages are from 0 V to 100 V and that the system readbacks track the voltmeter If the readback differs from the voltmeter by more than 0 5 V the readback should be corrected as described in part 10 9 5 Check the cathode voltage control as follows a Switch the flood gun power switch S3 on the System Controller OFF b Connect the voltmeter to pins E or F Cathode Voltage and P Ground c Switch the flood gun power switch S3 on the System Controller ON d Swee
105. solvents or parts that are wet with solvent Part 2 Removing the MCP 2 1 2 2 2 3 After the system has vented open the workchamber Figures 1 2 and 3 show the location of the flood gun and the MCP Note that the position of the flood gun is different in a 9800 series system as shown in Figure 2 the flood gun is rotated 90 to accommodate the installation of an optical microscope Wearing clean room gloves loosen the flood gun height positioning screw see Figures 3 and 4 and slide the flood gun assembly down to provide access to the MCP Remove the MCP electrical connector see Figures 3 and 4 NOTICE DO NOT DROP MOUNTING SCREWS Before removing and replacing the MCP place a clean lint free wipe below the MCP to prevent the mounting screws from falling into the turbo pump or the stage hardware If a screw or spacer is dropped into the workchamber be sure to retrieve it before proceeding Remove the MCP from the bottom of the column by removing the four socket head mounting screws see Figures 1 2 3 and 4 Be careful not to damage the MCP screen Close the workchamber door Note to eliminate the risk of dropped hardware remove the column as described in Ser vice Procedure 05 09 25 replace the MCP and then reinstall the column Revision B 3 97 Page 3 of 8 05 03 25 Remove Install MCP MCP mounting screws 4 Lower Column 4 Flood Gun Figure 1 Interior View of Flood Gun and MCP 25 n
106. stage to bring one of the reference pads under the gauging head Set the dial indicator to 0 or to any chosen value this will be the value that must be matched by the other two reference pads 4 3 Move the stage to bring a second reference pad beneath the gauging head See Figure 7 for the three reference pads Check the dial indicator Is it within 0 0001 1 28 um of the first reference pad If so proceed to check the third reference pad If not return the carrier to Micrion Product Support for recalibration m Figure 7 Reference Pads on the MicroMill HT Carrier 4 4 Move the stage to bring the third reference pad beneath the gauging head Check the dial indicator Is it within 0 0001 of the reference point If so the carrier is flat If not return the carrier to Micrion Product Support for recalibration Revision B 3 97 Page 9 of 10 03 06 Stage Height amp Carrier Flatness Page 10 of 10 Revision B 3 97 ZA Micrion Service Procedure No 03 07 Service Procedure Title Clamp Actuator Inspection Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service Semiannually Introduction On the worktable inside the workchamber there are three spring loaded tapered dowel pins called plungers When lowered the plungers allow a carrier to be positioned on the worktable w
107. system Knob Knob Panel IF Panel Computer Bit 9 Note 1 J3 TiltZ P2233 Motor J4 Tilt X Y P2230 Drive J5 Rot SmZ x OLOML P2227 E 891 J6 P2225 Motor J3 Aperture X P2234 a Drive e J4 Aperture Y P2231 892 Analo i RENI bius J3 Lower Deflection J2218 1082 J4 Upper Deflection po2og Raster P3 IBeam Blank J2201 __ Generator J4 4440 Bl emen CR1 Light Link CEM m J5 Video Analog J2236 gt Signal P7 Col Sense J2202 x Acquisition P6 Test J2237 1381 J4 L Video Frame Processed Video J2228 amp Processor Note 1 Knob Panel IF PN CR Pulse CEM 841 g 1850 e J4 MCP Ctrl J3 to Knob1 P2229 gt High Ea esed J4 to Knob2 P2232 e Volt IF MCP Switch Note2 J5HVIF HVIinterlk J2210 1810 1102 J3 HVPS Ctrl J2216 J3 to P2235 J5 to P2235 Flood j4 FI Gun Switch Gun IF J6 to P2228 1090 HVInterlk J2211 Note 2 HV IF i MCP HV IF 1102 used with FI Gun x ICM roe 10 nm and 25 nm P S Supply J6 FI Gun Assy J2215 notwithSnmP S L E 1130 J5 Filament Figure 2 SysCon Block Diagram Page 4 of 6 Revision B 3 97 SysCon Overview 12 01 Table 2 SysCon Rear Panel Connec
108. task Specifically Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules Revision B 3 97 Page 1 of 10 03 06 Stage Height amp Carrier Flatness Configure the Chemical Sources in Safe Mode Before performing the tasks described in this procedure you must put the chemical sources in a safe mode see Service Procedure 02 01 WARNING Do not proceed until the chemical sources are secure The chemical reservoirs in FIB systems contain hazard ous materials Labels affixed to the exterior of a chemical cabinet identify the chemical s contained inside If a chemical source is not in its safest state as described in Service Procedure 02 01 it is possible for a combination of component failures to release the chemical s through a cabinet s delivery line a roughing line a purging line or from a chemical reservoir into the workchamber Do not open the workchamber or disassemble any part of the vacuum pumping system or detach any gas line from any chemical cabinet until you are sure that every chemical source attached to the FIB system is in its safest state Power Down and Vent the System Before performing the tasks described in this procedure you must power down the high voltages and vent the system see Service Procedure 01 02 WARNING Dangerously high voltages are present in the p
109. the lower column Figure 5 Lower Column Electrical Connectors Page 6 of 12 Revision B 3 97 Blanking Aperture Replacement 05 16 05 Part 4 Remove the Lower Column Lens 2 Assembl 4 1 Remove the three screws at the base of the lower column Lens 2 assembly see A in Fig 5 4 2 Carefully lift the lower column Lens 2 assembly straight up and out of the column to expose the end of the beam blanking assembly Place the assembly on a clean work sur face Disconnect the lower column electrical connectors Cut off the kinked end of the high voltage wire Figure 6 Disconnect the Lower Column Electrical Connectors Part 5 Replace the Blanking Aperture MicroMill HT FIB Systems This method is only used in MicroMill HT systems For all other systems with 5 nm col umns proceed to Part 6 Originally silver paint was used to bond the blanking aperture to the end of the beam blanking assembly in MicroMill HT systems that method is no longer used The new method employs a clip and screw to hold a thicker blanking aperture in place the upgrade kit is Micrion part number 100 14130 5 1 Inspect the end of the beam blanking assembly If the blanking aperture is held in place with a clip and screw see Figure 7 remove the screw clip and blanking aperture then proceed to step 5 5 Revision B 3 97 Page 7 of 12 05 16 05 Blanking Aperture Replacement Remove the 3 screws 2 shown and remove the lower colum
110. the FIB system that you will perform this task and obtain instructions concerning the proper disposition of the old Cl cylinder Identify exits safety shower eye wash station etc If the site does not provide an eye wash station a portable eye wash station should be procured Review the layout of the GAE cabinet see Fig 1 Note that pushing the illuminated Pneu Valve Shutdown push button switch light goes off closes all pneumatic valves in the GAE cabinet The motorized valve V17 is not affected by this switch Notice in Fig 1 the difference between the Process Gas valve see 1 in Fig 1 and the Process Gas Shutoff valve see 2 in Fig 1 At the FIB system workstation with the application software program running select GAE Control from the Misc menu to display the Gas Control Popup dialog box see Fig 2 Make sure that the output pressure of the nitrogen supply cylinder for the GAE cabinet is set for about 30 psig If it is significantly higher reduce it to 30 psig now see step 6 2 and return to Part 2 Page 2 of 12 Revision B 3 97 Chlorine Cylinder Replacement 11 01 CAUTION Do not touch exposed NS ON connectors a 24 volts dc present Venue on solenoid bank while Pneu Oylinder Valve Shutdown switch is on Shutoff ee wae MEENE output cylinder pressure pressure u NNLLA E x cm Chlorine Gas Cylinder size 7 10 grams 80 psig
111. the GAE cabinet 5 5 Inspect the CGA fitting on the cylinder and if necessary clean it with a dry swab 5 6 Place the contaminated cleaning materials including the used gasket in a plastic bag for Page 8 of 12 Revision B 3 97 Chlorine Cylinder Replacement 11 01 5 T 5 8 5 9 5 10 5 12 5 13 disposal in accordance with local procedures Install the new cylinder in the GAE cabinet The CGA 660 coupling with gasket should screw together easily by hand if it does not adjust the alignment of the cylinder with the gas line assembly Hand tighten the coupling but do not tighten it with the wrench Reinstall and tighten the anti torque clamp Using the torque wrench with the crowfoot adapter tighten the CGA fitting to approxi mately 50 ft Ibs of torque Do not open the chlorine cylinder valve at this time At the workstation click on the RP1 icon to switch on the roughing pump Wait 30 sec onds until TC1 reads lt 0 01 torr At the GAE cabinet open the manual Vacuum and Process Gas valves to rough pump the gas lines After at least 30 seconds when TC1 reads lt 0 01 torr open V15 When the BT1 indicates base pressure close V15 and the manual Vacuum valve and switch the roughing pump off WARNING The chlorine cylinder is pressurized to approximately 80 psig Do not open the chlorine cylinder valve until you are certain that the CGA 660 coupling does not leak Part 6 Leak check
112. the column Reconnect the wires removed in step 3 1 d Fasten the motor plate to the column housing using the three 8 32 socket head screws see Fig 1 8 3 If you have removed the column to perform this procedure clean the column elements 8 4 If you have removed the column to perform this procedure install it as described in Part 4 of Service Procedure 05 09 8 5 Clean the workchamber the ion pump tube and the loadlock 8 6 Close up the system and pump down in the normal manner Allow the system to reach working vacuum levels and then power up in the normal manner Part 9 Cure and Calibrate the Apertures 9 1 Cure the column and lenses see Service Procedure 05 12 9 2 Align the column apertures see Service Procedure 05 13 9 3 Perform the deflection system calibrations as described in Section 7 of this manual Revision B 3 97 Page 7 of 8 05 07 Aperture Replacement Page 8 of 8 Revision B 3 97 ZA Micrion Service Procedure No 05 09 05 Service Procedure Title Column Removal and Replacement 5 nm Column Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service As needed Introduction This procedure describes the process of removing and replacing the ion beam column in the FIB system Materials Required This procedure requires the use of the following materials Clean standard field service tool kit Lint free wipes Clean room gloves Laboratory grade isopro
113. the following two commands sthc lor stcc l The workchamber pressure should be between 1 5 and 6 x 10 7 torr Record the reading in the system s logbook Revision B 3 97 Page 1 of 6 04 01 Vacuum System Checks 1 3 Take anion pump reading of the column pressure by entering the command Spip The ion pump pressure should be approximately 6 x 10 7 torr Record the result in the Sys tem s logbook Part 2 Degassing the HCIG Note this is not applicable to systems with CCIGs NOTE All automated programs no longer work in vacserver This includes autovent autopump down and calabrate functions This is a temporary situation and will be changed back in the next release of software One cause of high workchamber pressure readings is a contaminated HCIG tube The degassing function in vacserver removes contamination from the HCIG Use this function as follows NOTE All automated programs no longer work in vacserver This includes autovent autopump down and calabrate functions This is a temporary situation and will be changed back in the next release of software 2 1 Degass the HCIG by entering the following vacserver command hcdg 2 2 Wait 5 minutes and then stop the degassing by typing hcnd 2 3 Take another HCIG reading as described in step 1 2 If the pressure readings show improvement to acceptable levels then a dirty HCIG probably caused the high readings If there is no improvement in the pressure rea
114. the manual valve labeled Process Gas Shutoff on the outside of the GAE cabinet see Fig 1 Page 6 of 12 Revision B 3 97 Chlorine Cylinder Replacement 11 01 3 8 In the GAE cabinet make sure that the chlorine cylinder valve is closed and not leaking as follows a Turn the pressure regulator control knob see Fig 1 fully clockwise to open the pres sure regulator fully Open the manual valve labeled Process Gas Open the manual valve labeled Vacuum to pump out the chlorine delivery line as far as V14 The unlabeled manual valve between the pressure regulator and V14 should remain open Pump for five minutes Close the manual valve labeled Vacuum Observe both pressure gauges on the pressure regulator for at least 30 seconds If the needles remain fully counterclockwise at 30 Hg proceed to step 3 9 If they do not the cylinder valve may not be fully closed or may be leaking Make sure that the valve is fully closed and go back to substep c above WARNING If the chlorine cylinder valve is not fully closed or is leak ing you will be exposed to potentially lethal chlorine gas if you disconnect the cylinder coupling Do not proceed until you are certain that the cylinder valve is not leaking If the valve leaks even though you believe it is fully closed con tact Micrion Product Support for further advice 3 9 Purge the chlorine delivery lines as follows a Make sure that V15 is closed The roughing pump
115. the negative Y direction toward the front of the chamber NOTICE Y Axis LEAD SCREW Is EASILY DAMAGED To rotate the y axis lead screw use the coupling see Figure 4 in the front of the stage or else rotate the lead screw as close to the stage housing as possible in the rear of the stage When manually rotating the Y axis lead screw try to rotate the coupling on the front of the lead screw see Figure 4 Any rough movement can warp the lead screw especially if moved from the rear If rotating from the rear of the stage grip the lead screw as close to the stage housing as pos sible Figure 4 Y axis Lead Screw MicroMill HT Shown Revision B 3 97 Page 5 of 10 03 06 Stage Height amp Carrier Flatness Part2 Verify Silicon Grid Flatness With the height transfer gauge in place check the silicon grid wafer for coplanarity with the sili con grid block the silicon grid block is used as the reference point for all other measurements in this procedure 2 1 Move the stage bringing the edge of the grid block under the gauging head See Figure 5 Figure 5 Silicon Grid Wafer and Grid Block 2 2 Turn the indicator dial to set the dial reading to 1 or to any value as long as it remains constant throughout the procedure 2 3 By rotating the y motor shaft move the gauging head across the grid block and across the wafer The height of the block and wafer should be the same within 0 0002 total devia tion If it is not
116. the next release of software 3 1 3 2 3 3 3 4 3 5 3 6 3 8 In an xterm window start the vacserver program by typing vacserver Turn off the turbo pump with the command hpn Turn off the roughing fore pump by typing fpn Unplug the roughing fore pump from its outlet in the power strip in the electronics mod ule Plug the circuit tester into the outlet the circuit tester is yellow slightly larger than a standard AC plug and has indicator lights on the end opposite its AC plug Turn on the roughing fore pump with the vacserver command fpy The two yellow lights on the circuit tester should turn on Turn off the roughing fore pump with the vacserver command fpn The two yellow lights on the circuit tester should turn off Unplug the circuit tester from the roughing fore pump outlet in the electronics module power strip and plug the roughing fore pump back into the power strip Power up the system as described in Service Procedure 01 01 Revision B 3 97 Page 3 of 6 04 01 Vacuum System Checks 3 9 Pump down the system as described in Service Procedure 04 03 Part4 Checking Roughing Fore Pump Power Dual Wet Pump Systems NOTE this test is to be performed at installation or as needed it need not be done on a regular basis NOTE All automated programs no longer work in vacserver This includes autovent autopump down and calabrate functions This is a temporary situation and will be c
117. the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and auto procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Part 3 Prepare a Clean Work Surface Column assembly components are very sensitive to particulate contamination You must have a very clean area to perform this procedure The ideal location is under a laminar flow hood Clear a flat surface large enough to perform this procedure Use a clean room vacuum cleaner to remove dust and other particulates Clean off the system and the column as described in Service Procedure 06 05 Part 4 Remove the lon Gun Assembly After you have shut off all high voltages and vented the system begin removing the old ion Source Revision B 3 97 Page 3 of 12 05 10 lon Source Change WEAR GLOVES DO NOT HANDLE SOLVENTS When working inside the chamber or when handling any components that will be exposed to vacuum wear gloves rated for Class 100 environments or better Due to disinte gration of such gloves by solvents do not handle solvents or parts that are wet with solvent 4 1 With a 3 32 Allen wrench loosen the four captive socket head screws on the top of the column cap assembly as shown in Figure 1 lon Gun EN Top Side lon Gun Housing Adjustment Knobs b uc Column assembly
118. the two mounting screws as shown in Figures 3 and 4 Be careful not to damage the MCP screen 1 There are two configurations of the flood gun with a snout and large MCP combination see Figures 3 and 4 In a 9800 series system as shown in Figure 4 the flood gun is rotated 90 to accommodate the installation of an optical microscope Revision B 3 97 Page 3 of 24 Flood Gun Installation and Test 05 04 05 h Workchamber Lid AAR y Filament f O cem pins S Grid Lead AN nO socket Ww A Front of Workchamber a BN B ip WC LB Flood Gun al Lower Column Figure 1 Flood Gun Without Snout and Small MCP Interior View Page 4 of 24 Revision B 3 97 05 04 05 Flood Gun Installation and Test Lower Column Flood Gun Mounting Screws 2 Workchamber Lid Flood Gun Height Behind the Connector Flood Gun Lateral Positioning Screws 2 Flood Gun Figure 2 Flood Gun Without Snout and Small MCP s Side View Revision B 3 97 Page 5 of 24 Flood Gun Installation and Test 05 04 05 Lower Column Dues Gun Snout XN S P NU 4 Pin Keyed Filament Y Connector Leads pins A Figure 3 Flood Gun With Snout and Large MOP Interior View Page 6 of 24 Revision B 3 97 05 04 05 Lower column Flood Gun uf Snout Flood Gun Flood Gun Installation and Test 4 Pin Keyed Connector Y ie yw N a Grid Lead socket MD Filament E P A Leads
119. vacuum Starting Vacchat The vacchat program can be started in two different ways e By selecting the Vacchat entry from the Process Watcher menu or e By starting vacchat in an xterm window by typing vacchat 4 A screen similar to that shown in Figure 1 is displayed while vacchat initializes woes eoe esee es soe e oo e oe e eoe e esee e soe e soe e soe e soe esee esso Fibs6 lt micrion 1 vacchat Initializing Enter help topicl or topicl for help micvacd Connecting to localhost 8088 CPU Vacuum Controller new style installed Machine tuper 5000 EX Deposition sustemiz Tunasten Sending Thermocouple iTEC calibrations to VacCon Disabling idle mode resuming normal task processing Ok Enabling Automatic Error Correction Actions Ok Disabling Super User and Service Terminal modes yacchat gt M Figure 1 Vacchat Start up Screen Revision B 3 97 Page 1 of 2 09 03 Using the Vacchat Program Obtaining Vacchat Help While you are in the vacchat shell display the vacchat Help session by typing help Or 2 You can also display help on specific topics by typing help topic where topic is the name of the command or process you are requesting help for topic must be spelled correctly and have the correct case upper or lower If the program cannot match the specific topic you requested it will run the general help session The vacchat help session is displayed as shown i
120. vacuum wear gloves rated for Class 100 environments or better Due to disinte gration of such gloves by solvents do not handle solvents or parts that are wet with solvent 2 1 Remove the column as described in Parts 1 2 3 and 4 of Service Procedure 05 09 10 Column Removal and Replacement 10 nm Column Bring the column to the clean room Cover any openings in the workchamber with aluminum foil CAUTION Use care when lifting and moving the column cap and col umn housing assemblies The column cap assembly weighs approximately 25 pounds 11 kg The column housing weighs approximately 50 pounds 28 kg If nec essary to avoid personal injury secure the help of another person 2 2 Place the column assembly upside down on the work surface Note two types of MCP small and large are installed in FIB systems with 10 nm columns see Figures 1 and 2 2 3 Remove the MCP from the lower shield which is now facing up by removing the mount ing screws and the spacers if applicable as shown in Figures 1 and 2 Be careful not to damage the MCP screen Place the MCP on a clean work surface Revision B 3 97 Page 3 of 10 05 16 10 Blanking Aperture Replacement MCP Mounting vac Screws 2 lt q Spacers 2 Shield Figure 1 Removing a Small MCP Mounting Screws 4 Figure 2 Removing a Large MCP Page 4 of 10 Revision B 3 97 Blanking Aperture Replacement 05 16 10 Note the rotational position of the lowe
121. values that are read from the hardware registers on the flood gun controller The conversion is normally based upon the assumption that the full range of values for each of these particular registers represents a voltage range of 100 to 100 This assumption is dictated by the values for the parameters Rlowvalue and Rhighvalue in the Immersion grid voltage and Cathode voltage sections of the Reg isters Mfile These parameter values are normally 100 to 100 as is shown by the following segment from a Registers M file Immersion grid voltage Wnumbits 0x00030500 12 Wlowvalue 0x00030500 0 0 Whighvalue 0x00030500 100 0 Wsoftlow 0x00030500 0 0 Wsofthigh 0x00030500 100 0 Rnumbits 0x00030500 8 Rlowvalue 0x00030500 100 0 Rhighvalue 0x00030500 100 0 To introduce the offset edit the Registers w file using the vi editor to change the range speci fied by these parameter values If you make the range specification smaller for example 99 to 99 the effective value of the LSB in the hardware register decreases which translates to a numer ically lower readback for a given voltage With the Electron Flood Gun control popup displayed the system in ion imaging mode and the flood gun unblanked proceed as follows WARNING Electrical potentials as high as 500 volts may be present at the J1801 connector when the flood gun power switch S3 on the System Controller is in the ON position When making the voltag
122. voltage is present in the process mod ule and the System Controller module while the FIB sys tem is powered up All high voltage wiring is heavily insulated and connections are interlocked However any such safeguards can fail Therefore do not touch any of the wiring in or on the process module or the System Con trol module while the FIB system is powered up NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment 82 93 this procedure is a Type 4 task Specifically Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are greater than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules Revision B 3 97 Page 1 of 6 12 02 P S CBs Switches Part 1 Checking Circuit Breakers to Power Supplies The six circuit breakers in the SysCon circuit are listed in Table 1 They are located at the rear of the electronics module as shown in Figure 1 Table 1 SysCon Circuit Breakers Fuse Circuit 150V Deflection Power 24V Fans 5V Logic FLGN Flood Gun NOT USED RSYNC Raster 120 Vac 15V Analog electronics If a circuit breaker pops out check for a short circuit press the circuit breaker back in to reset Circuit Breakers see Table 1 Syscon Power Supplies See Figure 2 02 001 Figure 1 SysCon Section of the Electronics Module Rear Page 2 of 6 Revision B
123. when handling any components that will be exposed to vacuum wear gloves rated for Class 100 environments or better Due to disinte gration of such gloves by solvents do not handle solvents or parts that are wet with solvent Remove the column as described in Parts 1 2 3 and 4 of Service Procedure 05 09 05 Column Removal and Replacement 5 nm Column Bring the column to the clean room Cover any openings in the workchamber with aluminum foil CAUTION Use care when lifting and moving the column cap and col umn housing assemblies The column cap assembly weighs approximately 25 pounds 11 kg The column housing weighs approximately 50 pounds 28 kg If nec essary to avoid personal injury secure the help of another person Place the column assembly upside down on the work surface Note two types of MCP small and large are installed in FIB systems with 5 nm columns see Figures 1 and 2 Remove the MCP from the lower shield which is now facing up by removing the mount ing screws and the spacers if applicable as shown in Figures 1 and 2 Be careful not to damage the MCP screen Place the MCP on a clean work surface Page 3 of 12 05 16 05 05 16 05 Blanking Aperture Replacement MCP Mounting vac Screws 2 lt q Spacers 2 Shield Figure 1 Removing a Small MCP Mounting Screws 4 Figure 2 Removing a Large MCP Page 4 of 12 Revision B 3 97 Blanking Aperture Replacement 05 16 05 2 4 Note t
124. window move the stage until the lower left corner of the patterned die reticle appears in the field of view This corner is the test origin 1 4 Inthe Micrion Stage Accuracy window fill in the fields in the Reticle subwindow DieSize X Y mm As specified for the reticle DieArray Col Row As specified for the reticle DieOrigin X Y mm Click the Read button MaskRotation deg See Part2 1 5 Carefully adjust the stage so that the lower left corner is located exactly in the center of the field of view Use the Center function 1 6 Click the Apply button Part 2 Calculating Mask Wafer Rotation There are three ways to measure the rotation value of the mask or wafer 1 Use the Lock Window feature to lock the reticle origin point and a second point on the same horizontal line The Lock Window feature will show you the rotation value See the Opera tor s manual for Coordinate Lock Popup details 2 Move the reticle origin point to the screen center Use a relative move to move the stage to a point that has coordinates X Y where X 10 times the die size in uum and Y 0 00 Measure the value of the y offset which is the distance between the reticle edge to the screen center Use the arctan function to calculate the rotation value MaskRotation deg arctan y offset X 3 Use the MTMR button in the Reticle subwindow MTMR means Measure The Mask Rota tion Follow directions in Help for proper us
125. with the command opv2 When V2 is opened there is a burst of rough vacuum from the loadlock into the work chamber because the workchamber is at a lower pressure than the loadlock This burst will raise the pressure in the workchamber In some cases the system will as a safety fea ture shut down the high voltage beam the ion pump and the HCIG when this burst occurs To avoid this problem use the automatic pump down described in Part 1 of this procedure Shut down is avoided during an automatic pump down because safety checking is temporarily and automatically suspended when V2 is opened 2 27 Check the workchamber pressure by typing sthc 2 28 When the workchamber pressure has reached 3 00 x 10 torr type the following vacchat commands clv2 Opv6 Revision B 3 97 Page 5 of 10 Pump Down 04 03 8000 9800 MicroMill HT Vacuum System Schematic Single Pump Cabinet see note 4 D aP mer GY lly 7 a i Pump FP ZN Leak Check Valve tes 1 Several seconds after the turbo pump is powered down the vent valve opens automatically to vent the pump with nitrogen 2 VTI turbo isolation valve normally kept open is closed to isolate the pump during loadlock cycles 3 CA clamps the specimen holder to the stage 4 The MicroMill HT is not equipped with the GAE and Carbon cabinets Figure 1 Single Pump Vacuum System Revision B 3 97 Page 6 of 10 Pump Down 04 03 Part 3 Manua
126. 0 WEAR GLOVES DO NOT HANDLE SOLVENTS When working inside the chamber or when handling any components that will be exposed to vacuum wear gloves rated for Class 100 environments or better Due to disinte gration of such gloves by solvents do not handle solvents or parts that are wet with solvent Part 2 Removing the MCP 2 1 2 3 2 4 After the system has vented open the workchamber Two types of flood gun MCP config urations are installed in FIB systems with 10 nm columns a flood gun without a snout combined with a small MCP as shown in Figures 1 and 2 and a flood gun with a snout paired with a large MCP as shown in Figures 3 4 and 5 Wearing clean room gloves loosen the flood gun height positioning screw see Figures 6 and 7 and slide the flood gun assembly down to provide access to the MCP Remove the MOP electrical connectors see Figures 6 and 7 NOTICE DO NOT DROP MOUNTING SCREWS OR SPACERS Before removing and replacing the MOP place a clean lint free wipe below the MCP to prevent the mounting screws and spacers if applicable from falling into the turbo pump or the stage hardware If a screw or spacer is dropped into the workchamber be sure to retrieve it before proceeding Remove the MCP from the bottom of the column by removing the mounting screws and spacers if applicable See Figures 6 and 7 Be careful not to damage the MCP screen Note to eliminate the risk of dropped hardware remo
127. 0 00 T record the reading d Close V13 V15 and V16 1 If the duct has a high low flow sensor increasing the air flow may cause an alarm condition triggering the GAE interlock circuit If necessary bypass jumper the flow sensor The interlock resets after clearing the alarm by a push button on the rear of the vaccon unit or a remote customer provided push button Page 2 of 6 Revision B 3 97 Securing Chemical Sources 02 01 e Manually close the Process Gas Shutoff valve on the outside of the GAE cabinet f Turn off the roughing pump g To switch off power to the solenoid valves press the push button switch labeled Pneu Valve Shutdown on the GAE cabinet so that the green light is off Before continuing be certain that the valves listed in the table below are in the specified state Table 1 Valve State V12 Closed V13 Closed V14 Closed V15 Closed V16 Closed V17 Closed Off V20 Closed Part 2 Secure the Carbon Cabinet Configure the Carbon cabinet in the safe mode as follows 2 1 2 2 2 3 2 4 2 6 2 T Open the Carbon cabinet door and bypass the safety interlock shut off switch on the door opening of the Carbon cabinet Bypass the switch with the cabinet door open by pulling the switch actuator toward you until it clicks into the extended by pass position Opening the cabinet door has the same effect as shutting off the Pneu Valve Shutdown switch the
128. 0 001381 is at least Rev C 3 5 Remove the cable from P1109 on the rear of the VacCon module 3 6 Install adaptor cable no 235090 at rear of Risc station 3 7 Remove the video cable 3 8 Remove the cable from connector J2220 on rear of SysCon 3 9 Remove the Knob Panel Interface Board 150 000841 You must change the interrupt jumper located on the lower left corner of the PC board from INT2 to INTS 3 10 Refer to Fig 1 and install the new parts as shown CRT rear E SysCon front Lo e c o S 235 000053 E co 4 e oO ja 15 LO aia 2 5 e oleis 2 mov d 2 RISC34Hrear 1 2 3 4 LY SysCon rear 1 2 O 235 000059 E 1 Adaptor cable 235090 VacCon rear 160 004510 Cd P1109 Figure 1 RS6000 Upgrade Block Diagram Revision B 3 97 Page 3 of 4 09 05 Upgrading to RS6000 Computer 3 11 Reconnect P1109 on the rear of the VacCon reconnect the video cable and reconnect J2220 on the rear of the SysCon 3 12 Restore power to the Syscon 3 13 Restore power to the computer and wait for the bootstrap to complete Before using the system for normal operation you must restore the data files saved from the 486 Part 4 Restoring Data Files 4 1 Restore usr micrion fib data as described in Service Procedure 09 01 4 2 Restore tiff files each tiff file will be on a s
129. 0 V With no voltages applied to the column adjust the Gain to display sparse white speck les single electrons on the screen It may be helpful to darken the room enge 1 10 Close the MCP Control popup Page 2 of 4 Revision B 3 97 Column and Lens Curing 05 12 25 Part 2 Procedure 2 1 Click on the Lens 2 schematic symbol in the Beam Control popup screen with the left mouse button to display the slider voltage control for Lens 2 2 2 Set L2 to 0 V then enable the L2 power supply 2 3 Using the slider control gradually raise the L2 voltage towards 30 kV 2 4 At the first sign of noise or pressure bursts in the ion pump before 25 kV remove the column and clean it 2 5 Atthe first sign of noise or pressure bursts in the ion pump after 25 kV a Increase L2 voltage by 3 kV above the point where the noise began b Quickly decrease L2 by at least 2 kV the noise should stop It is important that the noise does not continue when you decrease the voltage level decrease the voltage until the noise stops Repeat this step until you can set L2 to 40 42 kV without producing noise Once you have done so the procedure is complete If you cannot increase L2 to 40 42 kV without produc ing noise proceed to step 2 6 2 6 Increase L2 voltage to 5 kV above the level where noise begins a Immediately lower L2 to 0 V and wait for the noise to stop The noise may stop and the pressure may drop before 0 V but bring it to
130. 0 volt amps and 20 Joules Revision B 3 97 Page 1 of 10 05 09 25 Remove Replace lon Beam Column Parti System Preparation Configure the Chemical Sources in Safe Mode Before performing the tasks described in this procedure you must put the chemical sources in a safe mode see Service Procedure 02 01 WARNING Do not proceed until the chemical sources are secure The chemical reservoirs in FIB systems contain hazard ous materials Labels affixed to the exterior of a chemical cabinet identify the chemical s contained inside If a chemical source is not in its safest state as described in Service Procedure 02 01 it is possible for a combination of component failures to release the chemical s through a cabinet s delivery line a roughing line a purging line or from a chemical reservoir into the workchamber Do not open the workchamber or disassemble any part of the vacuum pumping system or detach any gas line from any chemical cabinet until you are sure that every chemical source attached to the FIB system is in its safest state Power Down and Vent the System Before performing the tasks described in this procedure you must power down and vent the sys tem see Service Procedure 01 02 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedur
131. 00 MicroMill HT Vacuum System Schematic Single Pump Cabinet see note 4 Ky Lf mu A ZN TC2 Za f ym V6 la N Pump FP tes 1 Several seconds after the turbo pump is powered down the vent valve opens automatically to vent the pump with nitrogen 2 VTI turbo isolation valve normally kept open is closed to isolate the pump during loadlock cycles 3 CA clamps the specimen holder to the stage 4 The MicroMill HT is not equipped with the GAE and Carbon cabinets Figure 2 Single Pump Vacuum System 3 3 To manually vent a dual fore and rough pump system proceed as follows see Figure 3 for valve locations a b C Make sure that the loadlock door is shut Open a vacchat window see Service Procedure 09 03 At the vacchat prompt check the status of the valves by typing SV The system will display the status of the valves VIC V2C V3C V4C V5C V6C VIO Page 8 of 12 Revision B 3 97 Power Down Vent and Reset 01 02 The valves should be in the states shown above V1 through V6 should be closed and VI should be open If any of the valves V1 through V6 is open close each valve by typing the vacchat close command For example V1 is closed with the following command clvi d Turn on the rough pump by typing rpy e Open V1 and V3 with the following vacchat commands opvi opv3 Wait approximately 5 seconds then open V4 by typing opv4 Opening V3 begins the evacuation of t
132. 000 Micrion 9800 FlipChip MicroMill HT Frequency of Service As needed Introduction The electron flood gun also called the E Gun provides charge neutralization of the sample The flood gun voltage is supplied by the flood gun supply board 150 001130 and is controlled by the flood gun interface board 150 001090 Materials and Tools Required Tie wrap a k a Spot tie Voltmeter with at least 10 Megohm input impedance Picoammeter Optional BNC Dual Banana Adapter Clip leads 6 foot coax cable E Gun Board Test Circuit e Schematic 163 00342X E Gun Harness Clean standard field service tool kit This procedure uses diagnostic methods published in Tech Note 002 Flood Gun Diagnostics NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 5 task Specifically Equipment is energized and measurements and adjustments require physical entry into the equipment or equipment configuration will not allow the use of clamp on probes Installation Pre Check Prior to the installation visually check that the flood gun and the snout bore are free from contam ination Also perform the continuity checks to ensure that the filament is not open and none of the snout elements are shorted Revision B 3 97 Page 1 of 22 Flood Gun Installation and Test 05 04 10 Part 1 System Preparation Configure the Chemical Sources in Safe Mode B
133. 05 16 25 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Part 2 Remove the Column 2 1 Remove the column as described in Parts 1 2 3 and 4 of Service Procedure 05 09 25 Column Removal and Replacement 25 nm Column Bring the column to the clean room Cover any openings in the workchamber with aluminum foil CAUTION Use care when lifting and moving the column cap and col umn housing assemblies The column cap assembly weighs approximately 25 pounds 11 kg The column housing weighs approximately 50 pounds 28 kg If nec essary to avoid personal injury secure the help of another person 2 2 Place the column assembly upside down on the work surface 2 3 Remove the MCP from the lower shield which is now facing up by removing the four socket head mounting screws see Figure 1 Be careful not to damage the MCP screen Place the MCP on a clean work surface 2 4 Remove the MCP from the bottom of the column by removing the four socket head mounting screws see Figures 1 2 3 and 4 Be careful not to damage the MCP screen Close the workchamber door Revision B 3 97 Page 3 of 12 05 16 25 Blanking Aperture Replacement MCP Mounting
134. 1 2 3 and 4 of Service Procedure 05 09 05 Column Removal and Replacement 5 nm Column Bring the column to the work area immediately Cover any openings in the workchamber with aluminum foil CAUTION Use care when lifting and moving the column cap and col umn housing assemblies The column gun assembly in weighs approximately 25 pounds 11 kg The column housing weighs approximately 50 pounds 28 kg If nec essary to avoid personal injury get help 2 2 Place the column assembly upside down on the work surface 2 3 Note the rotational position of the lower shield The lower shield must be reinstalled in its original position for proper MCP alignment Remove the lower shield by loosening the three Phillips head screws see Figure 1 Remove 3 Phillips head screws to remove shield 2 shown e e Figure 1 Side and Bottom Views of Lower Shield with Mounting Screws Revision B 3 97 Page 3 of 6 05 02 05 Cleaning Column Elements WEAR GLOVES DO NOT HANDLE SOLVENTS When working inside the chamber or when handling any components that will be exposed to vacuum wear gloves rated for Class 100 environments or better Due to disinte gration of such gloves by solvents and the possibility of contaminating parts do not handle solvents or parts that are wet with solvent NOTICE LOWER COLUMN ELEMENTS ARE FRAGILE Handle the lower column and its elements with great care Any scratches will ruin t
135. 1 8 1 9 1 10 WARNING Dangerously high voltages are present in the process module the electronics module and the column while the FIB system is powered up Make sure that all high voltage is disabled before changing the cables connecting the fila ment to its power supply Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures Make sure that the low resistive cables p n 160 6444 rather than the normal resistive cables are connecting the filament to its power supply F and F on the rear of the high voltage power supply Display the Beam Screen select Beam Control on the Tasks menu On the Beam Screen click on the image area with the left mouse button to display the Beam Control popup Throughout this procedure you will use the sliders in the Beam Control popup to control most of the column voltages In an xterm window type hvshell In the hvshell type the command that enables high voltage hvenbl 1 Allow the hvshell to continue running in the background NOTICE Do not use the lon Source popup to enable high voltage because this automatically places Lens 1 and Lens 2 at a voltage level that is potentially damaging to the column On the Beam Screen lower right select electron imaging mode select the 256 pixel image size and start continuous imaging at the fast rate Turn the Brightness knob on the control panel until the image changes f
136. 1 of 6 05 05 Aperture Limit Switch Inspection Part 1 System Preparation Power Down and Vent the System Before performing the tasks described in this procedure you must power down and vent the sys tem see Service Procedure 01 02 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies 1 1 Remove the external aperture drive mechanism as described in Parts 1 2 and 3 of Service Procedure 05 07 Page 2 of 6 Revision B 3 97 Aperture Limit Switch Inspection 05 05 Part 2 Limit Switch Inspection There are 3 limit travel switches in the aperture drive mechanism as shown in Figure 1 y axis positive limit switch left pivot limit y axis negative limit switch right pivot limit home x axis switch home Y nlimit Switch the Brown Wire for home switch Y nlimit Switch y petra le Y Travel Q OI fo o eoo X X WLLL ca O indi Yo a X Travel O o 0 jette O the m Y plimit Switch X limit Switch white Gray Wire for Y plimit Switch S Grange wiles Figure 1 Apert
137. 2 Push the green ON button next to the EMO Revision B 3 97 Page 3 of 4 01 01 Power Up Part 3 Creating a Vacuum and a Beam Once the system is connected to a power source use the following steps to create a beam 3 1 3 2 3 3 3 4 3 5 3 6 3 7 3 8 3 9 Turn on water air and nitrogen Switch on all circuit breakers in the PDU Switch on the computer Wait for the bootstrap Log in as micrion To create a vacuum in a vacchat window type the automatic pump down command ap see Service Procedure 04 03 To cure the column follow Service Procedure 05 12 The length of the cure depends upon the length of time the chamber was vented To heat the source follow Service Procedure 05 11 From the application program screen select Powerup Powerup performs an orderly restart of the ion beam including stage movement to the ion faraday and electron faraday cups Page 4 of 4 Revision B 3 97 ZA Micrion Service Procedure No 01 02 Service Procedure Title Power Down Vent and Reset Applicable Systems All Frequency of Service As Needed Introduction You should power down when you want to get into some part of the hardware system such as the SysCon module or the chamber or when you want to disconnect cables from the column etc There are automatic as well as manual procedures for powering down resetting and venting Vent Using the autovent command or a series of manual vent commands you
138. 2 Remove the pump module enclosure a Remove two screws from each side of the enclosure see Figure 1 b Carefully lift the enclosure to expose the rough pump and the fore pump The rough pump has a tan rubberized canvas hose connected to its input A metallic mesh hose connects the fore pump to the output of the turbo pump Top view Remove two Right side screws on each side Figure 1 Pump Enclosure Part 3 Making a Visual Inspection The condition and level of the rough pump synthetic oil Fomblin must be inspected weekly To obtain an accurate reading check the oil level while the pump is hot and turned off Oil consump tion depends upon frequency of pump shutdown and operating pressure Cil Color For chemical series mechanical pumps with Fomblin a visual inspection of the oil helps deter mine the degree of oil contamination 3 1 With the pump off use a flashlight to examine the oil through the sight glass The level should be in the center of the glass and the oil should be a clear amber color If the oil is cloudy or brown in color it is contaminated with condensable vapors and should be changed See Figure 2 for location of pump reference points Fomblin perfluoride polyether does not discolor due to contamination or age as readily as the oil in standard series mechanical pumps Because the sight window becomes coated with the Fomblin after a period of time the oil may appear to be
139. 3 4 and 5 8 open end wrenches tighten it exactly 1 8 turn Tag the old cannister assembly to properly identify its contents Include the serial num ber of the FIB system from which it was removed and the date Put it temporarily in a secure place for disposition in accordance with local procedures At V19 in the GAE cabinet clean the male end of the VCR fitting with a clean dry wiper Part5 Inspect and Install New Cylinder 5 1 5 3 5 4 5 5 On the new cannister assembly make sure that the manual valve is in the OFF position WARNING If you remove the VCR plug from the cannister assem bly while the manual valve is open you will be exposed to Bromine vapor Do not proceed until you make sure that the valve is closed Perform this step under a vented hood or in the vented GAE cabinet as follows Using the 3 4 and 5 8 open end wrenches loosen and remove the VCR plug from the female nut at the top of the new cannister assembly Place the plastic protective cap on the VCR plug and store the plug in the bottom of the GAE cabinet Place anew VCR gasket on the new Br cannister assembly Using the two socket head cap screws and the 5 32 hex key mount the new cannister assembly Do not tighten the cap screws yet Make up the VCR coupling by hand adjusting the position of the cannister assembly as necessary Snug the coupling finger tight Using the 3 4 open end wrench tighten the female VCR n
140. 3 8 box wrench but it is recommended that you use the motorshell program to move the stage See Figure 4 for the location of the laser system components c y axis drive motor Bender 3 T Receivers 1 Stage Mirrors x axis mil SLO PER interferometer p drive motor Photo collector Laser y axis interferometer RE Laser E aperture Dashed lines x Photo knob represent laser E collector o i beam path i 7 ge xe f IUE I oo Nees Stee eh tet es gear Bender C9 Splitter Bender 1 Figure 4 Top View of the Workchamber and Laser IF System Lid Open 4 2 Turn on the laser system power Revision B 3 97 Page 7 of 12 03 05 Laser Alignment 4 3 Remove the laser tube shrouds and interferometer covers Reference reference Mirror Bender 3 mirror Adjustment FRONT Receivers 1 x ax
141. 3 begins the evacuation of the loadlock through a small diameter vacuum line and at a relatively low flow rate this reduces the amount of particulate contami nation generated by the evacuation of the loadlock Opening V4 continues the evacua tion of the loadlock through a large diameter vacuum line Close V3 with the following vacchat command clv3 Check the status of TC2 by typing stt2 Page 6 of 12 Revision B 3 97 Power Down Vent and Reset 01 02 h When TC2 0 065 torr close V1 by typing clvi i Atthe vacchat prompt type the following command opv2 j Shut off the ion pump the HCIG the turbo pump and the fore pump with the follow ing commands ipn hepd hpn fpn k Wait a minimum of two minutes for the turbo pump to stop spinning l Open the vent valve with the following command opv5 m It will take up to 20 minutes for the workchamber and loadlock to reach atmospheric pressure Check pressure in the loadlock and workchamber by typing the following vacchat command stlp The system will respond with either The loadlock is under vacuum or The loadlock is at atmosphere Because V2 and V4 are open the workchamber and the loadlock are at the same pres sure n When the system reports that the loadlock and workchamber is at atmosphere type the following commands clv2 clv4 clv5 Revision B 3 97 Page 7 of 12 01 02 Power Down Vent and Reset 8000 98
142. 42 2 volts peak 240 volt amps and 20 Joules Revision B 3 97 Page 1 of 12 03 05 Laser Alignment Part 1 System Preparation Configure the Chemical Sources in Safe Mode Before performing the tasks described in this procedure you must put the chemical sources in a safe mode see Service Procedure 02 01 WARNING Do not proceed until the chemical sources are secure The chemical reservoirs in FIB systems contain hazard ous materials Labels affixed to the exterior of a chemical cabinet identify the chemical s contained inside If a chemical source is not in its safest state as described in Service Procedure 02 01 it is possible for a combination of component failures to release the chemical s through a cabinet s delivery line a roughing line a purging line or from a chemical reservoir into the workchamber Do not open the workchamber or disassemble any part of the vacuum pumping system or detach any gas line from any chemical cabinet until you are sure that every chemical source attached to the FIB system is in its safest state Power Down and Vent the System Before performing the tasks described in this procedure you must power down and vent the sys tem see Service Procedure 01 02 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic proce
143. 5 09 10 Part 2 10 nm Lower the Flood Gun Remove the MCP Connectors WEAR GLOVES DO NOT HANDLE SOLVENTS When working inside the chamber or when handling any components that will be exposed to vacuum wear gloves rated for Class 100 environments or better Due to disinte gration of such gloves by solvents do not handle solvents or parts that are wet with solvent 2 1 After the system has vented open the workchamber Two types of flood gun MCP config urations are installed in FIB systems with 10 nm columns a flood gun without a snout combined with a small MCP as shown in Figures 1 and 2 and a flood gun with a snout paired with a large MCP as shown in Figures 3 4 and 5 2 2 Wearing clean room gloves loosen the flood gun height positioning screw see Figures 6 and 7 and slide the flood gun assembly down to provide access to the MCP 2 3 Remove the MCP electrical connectors see Figures 6 and 7 1 There are two styles of small MCP flat and angled see Figure 2 Both styles have the same fasteners and electrical connectors 2 There are two configurations of the flood gun with a snout and large MCP combination see Figures 3 and 4 In a 9800 series system as shown in Figure 4 the flood gun is rotated 90 to accommodate the installation of an optical microscope Revision B 3 97 Page 3 of 14 05 09 10 Remove Replace lon Beam Column Flood Gun zc WI TL Figure 1 Flood Gun Without Snout and Smal
144. 5 minutes Fire and Explosion Hazard Data Flash point does not flashFlammable limits not applicable Extinguishing media noncombustible Special fire fighting procedures A self contained breathing apparatus and full protective clothing should be worn when fighting fires Prevent contact with skin and eyes Unusual fire and explosion hazards strong oxidizing agent Contact with other material may cause fire Container explosion may occur under fire conditions Reactivity Data Stability unstable Conditions to avoid Contact with other material Incompatibility materials to avoid reducing agents alkali metals finely powdered metals alu minum corrodes steel stainless steel galvanized iron copper copper alloys organic materials Hazardous decomposition or by products nature of decomposition products not known Precautions for Safe Handling and Use If material is released or spilled Evacuate area Wear self contained breathing apparatus and full protective equipment such as a butyl rubber chemical proof air suit with breathing air supplied Cover with dry lime sand or soda ash Place in covered containers Wash the spill site after com pleting material pickup For handling and storing Store in a cool dry place away from heat and direct sunlight Keep con tainer closed tightly Avoid breathing vapors Do not breathe vapor do not get in eyes on skin or on clothing Avoid prolonged exposure Harmful vapor corrosive
145. 50 nsec Time base 1 usec dwell time Specie rn Imagemode M Pin 20 Figure 5 PIXCLK typically 1 16 useconds Pin 2 zi dwell time x no of pixels Time base 50 usec lt gt lt gt retrace specified in Imagemode M Pin 21 Figure 6 HSYNC typically hundreds of useconds Pin 3 Time base 50 msec a Y mat i dwell time x no of pixels retrace x no of lines vertical retrace in Imagemode M Figure 7 VSYNC typically hundreds of mseconds 3 6 Adjust the Brightness to full white 3 7 Disconnect the 37 pin Univision connector 3 8 With an oscilloscope check pins 8 15 They should be at logical 1 2 5V min 3 9 With an oscilloscope check pins 26 33 They should be at logical 0 0 8V max Revision B 3 97 Page 7 of 8 12 10 1381 Board Page 8 of 8 Revision B 3 97 ZA Micrion Service Procedure No 12 11 Service Procedure Title Flood Gun Interface 1090 Applicable Systems All Frequency of Service As needed Introduction The Flood Gun Interface FGI board is the digital controller for the Flood Gun Supply board 1130 The FGI board performs digital to analog conversions to the supply voltages on the Flood Gun Supply board via a ribbon cable to P3 see Figure 1 The FGI also provides a readback from the Flood Gun Supply board converting analog values to digi
146. 50 um field of view Open the Suppressor Voltage popup by clicking on the Suppressor Voltage icon Bring down the Suppressor voltage until the Extractor current is 20 uA Click on the Source Icon Turn on Upper Scan and center the image in the window using the adjustment knobs Using the adjustment knobs adjust the position of the ion gun to minimize the extraction current reading in one axis repeat for the other axis and go back and forth adjusting the two axes When the extraction current is at its minimum reading the source is roughly centered over the extractor aperture Part 4 Heating the Source If you are heating a 10 nm or a 25 nm column there is no need to replace the Filament cables since the change to low resistance is done through the relay box in these systems 4 1 4 2 4 3 4 4 4 5 4 6 4 7 4 8 4 9 4 10 Switch off the high voltages as described in Service Procedure 01 02 To heat the source replace the resistive cables 160 6444 with low resistance Filament cables 160 6445 After heating replace the low resistance cables with the resistive Fila ment cables being sure NOTICE Each time cables are removed from the high voltage connectors the ends must be cleaned with a cloth dampened with isopropyl all metal particles and other contaminants must be eliminated Allow the cable ends to dry before reinserting Once the cables are swapped power up as described in Service Procedure 01 01
147. 7 Page 17 of 22 Flood Gun Installation and Test 05 04 10 a no Fpp Switch the flood gun power switch S3 on the System Controller OFF Connect the voltmeter between pins G Ydef and P Ground Switch the flood gun power switch S3 on the System Controller ON Sweep the deflection slider slowly through its range and verify that the positive volt age is the same magnitude as the negative voltage 0 V to 10 V and that the read backs track the voltmeter Check the negative deflection voltage control as follows Switch the flood gun power switch S3 on the System Controller OFF Connect the voltmeter between pins H Ydef and P Ground NOTE This will be opposite in polarity to pin G above Switch the flood gun power switch S3 on the System Controller ON Sweep the deflection slider slowly through its range and verify that the negative volt age is the same magnitude as the positive voltage 0 V to 10 V and that the read backs track the voltmeter Check the filament voltage control as follows a Make sure that the system is in ion imaging mode and that the flood gun is unblanked Switch the flood gun power switch S3 on the System Controller OFF Connect the Flood Gun Board Test Circuit to pins E and F Filament supply of the cable connector and connect point 3 to chassis ground with a clip lead see Fig 6 Switch the flood gun power switch S3 on the System Controller ON Sweep the filament
148. As Needed Overview of the Limit Switches After installation of a reservoir test the limit switches for proper signals See Fig 1 The home switch is the switch contacted by the nozzle subassembly in the retracted position which is also known as the Nlimit or negative limit switch The Plim or positive limit switch is the switch contacted by the nozzle subassembly in the extended position In the following procedure if a switch is not contacted you will see an error message If the switch is contacted there is no message Y Home D D ZHome Z2Home ee Y Plimls F q X Home im Figure 1 Location of Depo Limit Switches Revision B 3 97 Page 1 of 2 10 06 Verifying Depo Limit Switch Settings Part 1 Verifying Limit Switch Values Checking the Z Limit Switches In vacchat enter the following command to bring the nozzle subassembly to the home position which in the X direction is contacting the leftmost limit switch in Figure 1 hz To find the lower limit switch type zpl Checking the X Limit Switches In vacchat enter the following command to bring the nozzle subassembly to the home position which in the X direction is contacting the upper limit switch hx To find the positive limit switch type xpl Checking the Y Limit Switches In vacchat enter the following
149. B 3 97 Vacuum System Checks 04 01 4 10 Turn off the fore pump with the vacserver command fpn The two yellow lights on the circuit tester should turn off 4 11 Unplug the circuit tester from the fore pump outlet in the electronics module power strip and plug the fore pump back into the power strip 4 12 Power up the system as described in Service Procedure 01 01 4 13 Pump down the system as described in Service Procedure 04 03 Revision B 3 97 Page 5 of 6 04 01 Vacuum System Checks Page 6 of 6 Revision B 3 97 ZA Micrion Service Procedure No 04 02 Service Procedure Title Process Module Vacuum Leak Check Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service As needed Introduction This procedure describes checking the process module for a vacuum leak This procedure does not provide specific operating procedures for using a helium He leak detec tor It assumes that you are able to use the leak detector and its documentation available at the facility or that site personnel can provide you with that service Materials Required The following materials are required to perform the vacuum leak check Varian 959 50 or 938 41 leak detector or equivalent Pressurized He source with length of hose equipped with a directional nozzle e Standard field service engineer s tool kit NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this
150. CE AVOID BENDING PINS Be careful when reconnecting the 3 pin and 20 pin connectors The pins are easily bent Connect the vacuum bellows from the ion pump to the column Reattach the MCP connectors inside the chamber see Figures 1 2 and 3 Loosen the height adjustment screw and slide the flood gun up until the end of the flood gun snout contacts the MCP as shown in Figures 1 2 and 3 Be careful not to damage the MCP screen Make sure that the flood gun snout is aligned with points directly at the center bore of the MCP see Figures 1 and 2 If necessary loosen the lateral positioning screws and adjust the lateral position of the flood gun to obtain the proper orientation against the MCP Tighten the height and if used the lateral adjustment screw s Close the workchamber and pump down the system see Service Procedure 04 03 Enable the high voltage power supplies Cure the column see Service Procedure 05 12 25 Heat the ion source see Service Procedure 05 11 Calibrate the deflection control system as described in Section 7 of this manual Page 10 of 10 Revision B 3 97 ZA Micrion Service Procedure No 05 10 Has thin film of Braycote 803 Service Procedure Title lon Source Change Applicable Systems All Frequency of Service As Needed Introduction Lifetime of a liquid metal gallium source p n 110 000740 is determined by two factors e Extraction current Frequency and length of source heating
151. Closed Revision B 3 97 Page 5 of 6 02 01 Securing Chemical Sources Page 6 of 6 Revision B 3 97 Material Safety Data Sheet MSDS Apiezon A Oil Varian Turbo Pump T A Oil Emergency contact N A General comments This oil is used in Varian V 1000 turbo pumps without ceramic bearings This MSDS is provided for general information only For information about the manufacturer of a particular chemical contact the environmental health and safety coordinator at Micrion Corpora tion 508 531 6464 Manufacturer Micanite and Insulators Co LTD Distributor Biddle Instruments 510 Township Line Road Blue Bell PA 19422 Telephone 215 646 9200 Varian Part No 969 9901 2 Substance Identification Substance Apiezon A OilCAS 64742 65 0 Trade names and synonyms Varian Turbo T A Oil Physical Data Boiling point 760 mm Hg gt 350 CSpecific gravity 20 C 0 865 Vapor pressure 3 x 10 mm Hg 30 C Evaporation Rate Negligible Solubility in H2O insolubleAppearance and Odor pale amber liquid no odor Fire and Explosion Data Flash point 210 C IP 34 Extinguishing agents Use carbon dioxide dry powder or dry sand Special Fire fighting procedures NoneUnusual fire and explosion hazards None Health Hazard Data Health Hazards None knownCarcinogenicity Not regulated Signs and Symptoms of Exposure None likely Emergency first aid procedures In case of accidental eye contact flush with clean water If inges
152. Depo Nozzle and from the pulldown menu select Retract 5 3 Using pair of needle nose pliers gently remove each gas tube where it meets its connector on the nozzle subassembly 5 4 Locate the two screws on the heat sink braid clamp Loosen the screws until the braid slips free 5 5 Disconnect the power cable to the reservoir heater 5 6 Loosen and remove the three nylon screws that hold the reservoir and its heat sink to the mounting base Revision B 3 97 Page 5 of 12 10 02 5 T 5 8 5 9 5 10 Dual Nozzle Replacement Lift the reservoir heat sink combination out of the subassembly and turn it upsidedown With a flat head screwdriver remove the four nylon screws going up into the reservoir Being careful not to dislodge the four nylon washers between the reservoir and heat sink turn the reservoir heat sink combination rightsideup Remove the reservoir and dispose according to site regulations Part 6 Replacing a Reservoir Perform Part 5 in reverse using the same heat sink as follows 6 1 6 2 6 4 6 5 6 6 6 7 6 8 Check that the four nylon washers are in place before replacing the reservoir NOTICE Nylon screws if tightened with too much pressure often break Snug tighten the nylon screws with care With the heat sink upsidedown place the reservoir inside replace and snug tighten the four nylon flat head screws Turn the reservoir heat sink combination rightsideup and place
153. EMOVAL AND REPLACEMENT 10 NM COLUMN 05 09 25 COLUMN REMOVAL AND REPLACEMENT 25 NM COLUMN 05 10 ION SOURCE CHANGE 05 11 GALLIUM SOURCE HEATING 05 12 05 COLUMN AND LENS CURING 5 NM COLUMN 05 12 10 COLUMN AND LENS CURING 10 NM COLUMN Revision B 3 97 Page iii of vi 05 12 25 COLUMN AND LENS CURING 25 NM COLUMN 05 13 COLUMN ALIGNMENT 05 14 DRiFT TEST 05 15 05 APERTURE SHIELD REMOVAL INSPECTION amp REPLACEMENT 5 NM COLUMN 05 15 10 APERTURE SHIELD REMOVAL INSPECTION amp REPLACEMENT 10 NM COLUMN 05 15 25 APERTURE SHIELD REMOVAL INSPECTION amp REPLACEMENT 25 NM COLUMN 05 16 05 BLANKING APERTURE REPLACEMENT 5 NM COLUMN 05 16 10 BLANKING APERTURE REPLACEMENT 10 NM COLUMN 05 16 25 BLANKING APERTURE REPLACEMENT 25 NM COLUMN LOADLOCK WORKCHAMBER 06 01 SAMPLE HOLDER INSPECTION AND CLEANING 06 02 LOADLOCK INSPECTION AND CLEANING 06 03 WORKCHAMBER INSPECTION AND CLEANING 06 04 TRANSPORT CARRIAGE INSPECTION AND ALIGNMENT 06 05 PROCESS MODULE EXTERNAL CLEANING DEFLECTION SYSTEM 07 02 SCAN ROTATION CALIBRATION 07 03 SCAN GAIN CALIBRATION 07 04 PAN GAIN CALIBRATION 07 05 PAN ROTATION ORTHO CALIBRATION 07 06 CHECK THE CENTER OF ROTATION 07 07 Mux SHIFT CALIBRATION 07 08 REFERENCE CURVE CALIBRATION AND DATABASE UPDATE FLUIDS REGULATION 08 01 FLUIDS REGULATOR PRESSURE CHECK 08 02 VIBRATION ISOLATOR BALANCE ADJUSTMENT COMPUTER SOFTWARE 09 01 ARCHIVING RESTORING FILES USING ARCTOOL 09 02 SETTING TIME AND DATE ON IBM
154. FIB system is in its safest state Power Down and Vent the System Before performing the tasks described in this procedure you must power down the high voltages and vent the system see Service Procedure 01 02 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Open the Workchamber Remove the front panels to gain access to the workchamber cover When the system is completely vented remove the 1 2 socket head cap screws and open the workchamber Page 2 of 4 Revision B 3 97 Funnel Alignment 10 05 Part 2 Coarse Adjustment 2 1 By eye see that the funnel is over the electron faraday 2 2 If necessary adjust the X and Y knobs see Fig 1 to align the funnel When you adjust the funnel in X or Y Z will also be affected Part 3 Power Up and Pump Down 3 1 Close the workchamber door and secure the socket head cap screws 3 2 Use the power up procedure Service Procedure 01 01 3 3 Follow Service Procedure 04 03 to pump down the system to vacuum 3 4 Initiate the Mask Repair program and power up the column Part 4 Fine Adjustment 4 1 Set acceleration to 30 kV 4 2 Set the field of view to 1350 um the resolution to 1024 an
155. IG and BT1 readouts at all times NOTICE PURGE CHLORINE LINE FIRST If a Chlorine cannister is present in the gas cabinet be sure to purge the chlorine gas line as described in Service Procedure 11 03 before purging the XeF line Page 4 of 10 Revision B 3 97 Bromine Cylinder Replacement 11 03 Part 2 Overview This section is an overview of this maintenance task This procedural overview does not include safety warnings Do not use this overview in place of the actual procedures 2 1 Pump and purge the GAE system lines Close the manual shutoff valve on the old Br cannister assembly and rough pump the gas lines leading back to it 2 2 Remove plug and tag the old Br cannister dispose of the cannister per site policy 2 3 Inspect and install the new Br cannister assembly 2 4 Pump the gas lines leading back to the new Br cannister 2 5 Reinstitute Br gas flow to the FIB system workchamber WARNING Both the old and new cannisters contain Br2 a strong irritant that may otherwise be harmful if inhaled ingested or absorbed through the skin The GAE cabinet may also contain a cylinder of chlorine gas which is highly toxic To minimize the risk of exposure to these chemicals you must follow this procedure exactly Part 3 Pump and Purge GAE System Lines 3 1 Make sure that the GAE cabinet exhaust system is operating correctly Because the GAE cabinet door is open during
156. ING Both the old and new cannisters contain xenon difluo ride a strong irritant that may be harmful if inhaled ingested or absorbed through the skin The GAE cabinet may also contain a cylinder of chlorine gas which is highly toxic To minimize the risk of exposure to these chemicals you must follow this procedure exactly Revision B 3 97 Page 3 of 10 11 02 Xenon Difluoride Cylinder Replacement Caution Do not touch exposed connections 24 VDC present on solenoid bank while Pneu Valve Shutdown Switch is on Chlorine Manual Shutoff Valve Shown Closed N Q Q XeF Cannister Assembly Figure 2 GAE Cabinet Layout with XeF Page 4 of 10 Chlorine Gas Cylinder If Installed Pneu Valve Shutdown PushButton Switch Process Gas Shutoff Manual Valve 11 006 Revision B 3 97 Xenon Difluoride Cylinder Replacement 11 02 Check Valve On Off XeF2 Cl T od TC1 Rough vid Pump Read i back parts RPI rci oorr ome VACUUM CHAMBER eed VI2 ndG z70E 05 T Click on valve icon to get setpoint dialog Box Edit text field or use up dn Selects arrows to enter setpoint increment by which up dn arrows change gae_v17_pop_popu the set point ON opens valve and downloads setpoint OFF closes valve and down loads a setpoint of 0 00 Downloads setpoint value Figure 3 Gas Control Popup Dialog Boxes
157. Micrion 8000 Series Focused lon Beam System Service Procedures Manual Including Procedures for the Micrion 9800 FlipChip and the MicroMill HT Systems Part No 800 000049 Revision B 3 97 A Micrion Notice This document is protected by copyright Micrion Corporation hereby conveys to pur chasers of the FIB equipment described herein the right to reproduce all or any part of this document for their own internal use Otherwise no part may be reproduced in any form without the written consent of Micrion Corporation Micrion Corporation reserves the right to make changes to the materials contained in this document and shall not be responsible for any damages caused by reliance upon the materials presented herein The following trademarks are mentioned in this document Univision is a trademark of Univision Technologies Inc Braycote is a registered trademark of Castrol Specialty Products Kimwipe is a registered trademark of Kimberly Clark VCR is a registered trademark of Cajun Technologies SNOOP is a registered trademark of NUPRO Co Micrion 8000 Series Focused lon Beam System Service Procedures Manual copyright 1997 Micrion Corporation One Corporation Way Peabody MA 01960 7990 All rights reserved Printed in U S A Part number 800 000049 Revision history 8 96 Rev A 3 97 Rev B Page 2 of 2 Revision B 3 97 CONTENTS PREVENTIVE MAINTENANCE PowER UP DOWN 01 01 POWER UP 01 02 POWER DOWN VENT AND RESET
158. Power SysCon Boards 1 S2 S3 CB1 VacCon Boards Vacuum Control Servo Boards Motors Servo Control Workchamber HV Power Supply s Focus P S CB1 S1 S2 S3 Turbo Pump HV Power Supply s Focus P S CB1 1 S2 S3 Fore Rough and Turbo CBs MCP module S2 2 4 To vent the system go to Part 3 When all necessary manual switches have been switched off you can safely perform your task Revision B 3 97 Page 3 of 12 01 02 Power Down Vent and Reset rri e Consol Ion Fore Rough Turbo Mod Line Pump Pump Emergency juo SysCon BH HSCS O Computer Laser Computer B High voltage Turbo Pump Controller elec_cab2 Figure 1 Circuit Breakers and Power Switches Front of Electronics Module Page 4 of 12 Revision B 3 97 Power Down Vent and Reset 01 02 Table 2 shows the order in which the system may be powered down all the way You do not have to power down all the way for most of your repair and maintenance procedures Table 2 System Shutdown X Windows ion PERS electrical to go to system Application vacuum amp Process computer fluids column AIX power next lower state program status Watcher status status status status state program owered select 8 P i running at vacuum running running on on enabled Powerdown p function powered r s select Quit 7 running at vacuum running running
159. Procedure Title Bit3 MicroChannel Multibus Adapter 125B Applicable Systems All Frequency of Service As needed Introduction The Bit3 board pair one in the computer and one in the first slot of the SysCon module adapts the computer s Microchannel bus to the Multibus of the SysCon The computer board enables the computer to see the SysCon as a virtual memory mapped I O ELECTROSTATIC DISCHARGE This board is sensitive to electrostatic discharge Handle the board as follows 1 Touch your hand to the metal frame of the chassis to discharge static or wear a grounding strap 2 Hold the board by the ejector tabs 3 If you must lay the board down lay it component side down Part 1 Checking the LEDs on the Bit3 Board As shown in Figure 1 the two LEDs on the front of the board are active The lower LED is on continuously after you initialize the computer The upper LED flashes on during data transfer Part 2 Resetting the Bit3 Board The Bit3 board should automatically reset when the system is powered up If not use the system command mbus reset Revision B 3 97 Page 1 of 2 12 04 Bit3 Board Normally off flashes during data transfer Normally on after initialization by computer NOlLVHOdHOO HALNdNOD Lid Figure 1 125B Bit3 MicroChannel Multibus Adapter Page 2 of 2 Revision B 3 97 ZA Micrion Service Procedure No 12 05A Service Procedure Title Knob Panel Interface Board 841 Applica
160. Procedure Title Foreline Trap Element Replacement Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service Annually or as Needed Introduction Two types of foreline roughing pump systems are installed on FIB systems e A single foreline roughing pump system that does not include a foreline trap A dual pump system with separate foreline and roughing pumps A foreline trap is connected to the roughing pump in this system the trap helps prevent rough pump oil from streaming back into the loadlock The element in the trap must be replaced on an annual basis Although the trap is connected in line with the rough pump it is called the foreline trap for historical reasons Tools and Materials Required This procedure requires the use of the following materials e Standard field service engineer s tool kit Flashlight Lint free cloths Chemical resistant nitrile gloves Splash resistant safety goggles e Sargent Welch trap replacement element Micrion part no 300 000036 Container for disposal of used element NOTE All automated programs no longer work in vacserver This includes autovent autopump down and calabrate functions This is a temporary situation and will be changed back in the next release of software vacserver program NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 3 task Specifically Equipment is en
161. RS6000 COMPUTERS 09 03 USING THE VACSERVER PROGRAM 09 04 USING THE MICRION CONSTANTS EDITOR 09 05 UPGRADING TO RS6000 COMPUTER 09 06 CONFIGURING AIX FOR A NETWORK PRINTER DEPOSITION SYSTEM 10 01 LUBRICATING THE DUAL NOZZLE LEAD SCREWS 10 02 DUAL NOZZLE REPLACEMENT amp COARSE ALIGNMENT 10 03 DUAL NOZZLE FINE ALIGNMENT 10 04 FUNNEL REPLACEMENT 10 05 FUNNEL ALIGNMENT 10 06 VERIFYING DEPO LIMIT SWITCH SETTINGS 10 07 MAKING HEATER AND COOLER BOARD SETTINGS GAS CYLINDER REPLACEMENT 11 01 CHLORINE CYLINDER REPLACEMENT 11 02 XENON DIFLUORIDE CYLINDER REPLACEMENT 11 03 BROMINE BR2 CYLINDER REPLACEMENT 11 04 CARBON CYLINDER REPLACEMENT Page iv of vi Revision B 3 97 SYSTEM CONTROLLER 12 01 SYSCON OVERVIEW 12 02 SYSCON POWER SUPPLIES CIRCUIT BREAKERS amp SWITCHES 12 03 ADDING AN EXTENDER BOARD 12 04 BiT3 MICROCHANNEL MULTIBUS ADAPTER 125B 12 05A KNOB PANEL INTERFACE BOARD 841 12 05B KNOB PANEL INTERFACE 1810 12 06 STAGE APERTURE MOTOR DRIVES 893 12 07 ANALOG DRIVE BOARD 1081 12 09 RASTER GENERATOR BOARD 1110 12 10 SIGNAL ACQUISITION BOARD 1381 12 11 FLOOD GUN INTERFACE 1090 12 12 FLOOD GUN SUPPLY 1130 Revision B 3 97 Page v of vi Page vi of vi Revision B 3 97 Preventive Maintenance Schedule Revision B 3 97 Daily Weekly Column Parameter Log Service Procedure 05 01 Fluids Regulator Pressure Check S P 08 01 Loadlock Inspection and Cleaning S P 06 02 Vacuum System Check S P 04 01
162. Service Procedure 06 05 Power Down and Vent the System Before performing the tasks described in this procedure you must power down and vent the sys tem see Service Procedure 01 02 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Part 2 Remove the Column Cap lon Gun Double check to see that the high voltage power supply is off then remove all high and low volt age cables see Figure 1 Page 2 of 6 Revision B 3 97 Aperture Shield Replacement 05 15 05 ow Aperture Drive Plate lon Pump Port BD Table 1 Column Connections Signal Name 1 High Voltage L1 Lens 1 L2 Lens 2 High Voltage High Voltage S Suppressor E Extractor High Voltage High Voltage F1 Filament Low Voltage J1901 Bbaper octopoles High Voltage F2 Filament co NI a A WY P alal alal alal al an Low Voltage Blanking Signals Revision B 3 97 Figure 1 Top View lon Beam Column with Power Connections Page 3 of 6 05 15 05 Aperture Shield Replacement WEAR GLOVES DO NOT HANDLE SOL
163. Step 4 5 Collar coupling lee Step 4 3 1 8 Set Screws Step 8 1c Figure 2 Top View of Aperture Mechanism Page 4 of 8 Revision B 3 97 Aperture Replacement 05 07 Part 4 Removing a Standard Aperture Blade In the following procedure a standard aperture blade means one that is held in place with two flathead countersunk screws an upgrade aperture blade means one that is held in place with one flathead countersunk screw and one alignment pin If you are replacing a standard aperture blade with an upgrade aperture blade proceed as follows 4 1 Unhook the spring from the aperture blade see Fig 2 4 2 Remove two 5 16 socket head cap screws Alignment is critical when reassembling 4 3 Rotate the collar coupling counterclockwise until the slide screw unthreads from the screw block 4 4 Remove two screws holding the screw block in place Alignment is critical when reassem bling 4 5 Liftthe screw block out of the way and screw in an alignment pin where shown B in Figs 2 and 3 4 6 Remove the two 4 mm scoket head cap screws and lift the aperture blade free Figure 3 Upgrade Aperture Blade detail Part 5 Removing an Upgrade Aperture Blade If you are replacing an upgrade aperture blade with another upgrade version proceed as follows The upgrade version of the aperture blade is shown in Fig 2 A and B and in detail in Fig 3
164. This procedure describes how to determine the number of hours a source has been used how to change a source and how to register that new source in the log NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 3 task Specifically Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules Revision B 3 97 Page 1 of 12 05 10 lon Source Change Required Materials This procedure requires the following materials Gallium liquid metal ion source Micrion part no 110 000740 Spare suppressor cap supplied with every system which can be pre loaded with a source to reduce the time that the system is vented Standard field service toolkit Column service kit Micrion part no 100 007380 shipped with system Clean room with laminar flow hood Source of filtered dry nitrogen or filtered dry pressurized air Lint free clean room wipes 6 inch cotton tipped applicators Clean room gloves Laboratory grade detergent Laboratory grade isopropyl alcohol or equivalent solvent e Small beaker Ultrasonic cleaner High intensity light Part 1 Determine the Hours of Service on a Source Using the log main program determine the number of hours on the current source To gain access to this program press the right mouse button and s
165. VENTS When working inside the chamber or when handling any components that will be exposed to vacuum wear gloves rated for Class 100 environments or better Due to disinte gration of such gloves by solvents do not handle solvents or parts that are wet with solvent Note it is not necessary to open the workchamber to perform this procedure Alignment Screws 4 Lans only two adjacent screws bs Figure 2 Location of Alignment Screws for the Column Cap Assembly 2 1 Loosen only two adjacent alignment screws on the column cap ion gun assembly this is done so that the ion gun alignment is minimally affected see Figure 2 CAUTION Use care when lifting and moving the column cap assem bly The column cap assembly weighs approximately 25 pounds 11 kg If necessary to avoid personal injury secure the help of another person 2 2 Forthe best leverage in removing the column cap assembly stand behind the process module Lift the column cap assembly straight up off the column and gently place it top side up on a clean work surface Note The bottom surface of the column cap assembly serves as both a registration and an O ring surface and is susceptible to damage from nicks and scratches Page 4 of 6 Revision B 3 97 Aperture Shield Replacement 05 15 05 Part 3 Remove the Extractor Cap and the Aperture Shield 3 1 Rotate the extractor cap approximately 1 3 turn and pull it past the ball detents in th
166. View of Flood Gun With Snout and Large MCP Page 8 of 22 Revision B 3 97 05 04 10 Flood Gun Installation and Test Part 3 Inspect and Test the Replacement Flood Gun NOTICE THE FLOOD GUN AND ITS COMPONENTS ARE FRAGILE Handle the flood gun with care The flood gun leads are somewhat brittle and will break if they are bent back and forth excessively 3 1 Remove the shipping screw see Figures 6 and 7 3 2 Loosen the height adjustment screw Slide the upper bracket as far away from the lower flood gun as the height adjustment screw allows then tighten the height adjustment screw see Figures 6 and 7 Loosen height adjustment screw and slide upper bracket in this direction Remove flood gun shipping screw behind the connector Flood Gun Height 20 Adjustment Screw Side View Behind the Connector Flood Gun Lateral Position Screws 2 Figure 6 Replacement Flood Gun Without Snout Side and Top Views Revision B 3 97 Page 9 of 22 Flood Gun Installation and Test 05 04 10 screw and slide upper FINNS oos GUT bracket in this direction Loosen height adjustment shipping screw Flood Gun Height Adjustment Screw behind the connector Flood Gun Side View Lateral Position Screws 2 Top View Figure 7 Replacement Flood Gun With Snout Side and Top Views 3 3 Continuity Tests a To test a flood gun without a snout use an ohmmeter to perform the continuity tests listed in Tab
167. Without Snout Revision B 3 97 Page 15 of 24 Flood Gun Installation and Test 05 04 05 Lower Column Fasten flood gun to workchamber lid with mounting screws 2 Workchamber Loosen height adjustment screw and slide flood gun up until end of snout contacts MCP Flood Gun Lateral Positioning Screws 2 er o y ko Nm Flood Gun Snout Flood Gun Figure 12 Installation of Replacement Flood Gun With Snout Part 5 Power Up and Beam Up Follow Service Procedure 01 01 to power up and bring the beam up Page 16 of 24 Revision B 3 97 05 04 05 Flood Gun Installation and Test Part6 Flood Gun Control Calibration The Electron Flood Gun popup provides access to an automated calibration function and allows manual control of the potentials applied to the flood gun elements This popup is accessible either through the Microsurgery program s Misc menu select E Gun Control or through the Beam Screen click on the flood gun graphic located to the immediate right of the image area An automatic calibration function is available through the Electron Flood Gun popup To use it make sure that the system is in ion imaging mode and then click on the Calibrate button in the popup The calibration function brings the electron faraday under the column sweeps the various flood gun control potentials to obtain optimum current in the faraday and then returns the stage to its former position To obtain popups for manually ch
168. a regis tration and an O ring surface and is susceptible to damage from nicks and scratches Revision B 3 97 Page 11 of 14 05 09 05 Remove Replace lon Beam Column Part 4 Remove the Column Housing 4 1 4 2 4 3 4 4 Remove the four bolts securing the column housing to the chamber Note which holes you are removing the bolts from so that you may use the same holes when reinstalling the col umn not all the holes have bolts NOTICE DO NOT DAMAGE THE MCP WHEN REMOVING THE COLUMN To avoid damage to the MCP the column must be lifted straight out of the workchamber this is especially important if the flat rather than angled style of MCP is installed on the column Ideally someone should guide the lower column and MCP out of the workchamber while the column is being lifted assuming that the workchamber lid is propped open slightly Remove the column housing by lifting it straight out of the chamber and place it upside down on a clean working surface Note The top surface of the column housing serves as a registration and a sealing surface and is susceptible to nicks and scratches Cover the open column port on the process module with the appropriate cover Using a high intensity light vacuum and clean the interior of the workchamber the ion pump tube and the loadlock Part 5 Column Installation 5 1 Move all cable assemblies and vacuum bellows clear of the column port on the process module allowing fre
169. a snout com bined with a small MCP as shown in Figures 1 and 2 and a flood gun with a snout paired with a large MCP as shown in Figures 3 4 and 5 2 2 Wearing clean room gloves loosen the flood gun height positioning screw see Figures 6 and 7 and slide the flood gun assembly down to provide access to the MCP 2 3 Remove the MCP electrical connectors see Figures 6 and 7 1 There are two styles of small MCP flat and angled see Figure 2 Both styles have the same fasteners and electrical connectors 2 There are two configurations of the flood gun with a snout and large MCP combination see Figures 3 and 4 In a 9800 series system as shown in Figure 4 the flood gun is rotated 90 to accommodate the installation of an optical microscope Revision B 3 97 Page 3 of 14 05 09 05 Remove Replace lon Beam Column Flood Gun zc WI TL Figure 1 Flood Gun Without Snout and Small MCP Interior View Page 4 of 14 Revision B 3 97 Remove Replace lon Beam Column 05 09 05 Lower Column Workchamber Lid Flood Gun Height Behind the Connector Flood Gun Lateral Positioning Screws 2 lt Flood Gun Side View of Flat Version of MCP pP Figure 2 Side View of Flood Gun Without Snout and Small MCP s Revision B 3 97 Page 5 of 14 05 09 05 Remove Replace lon Beam Column Lower Column MCP mounting screws 3 one hidden 4 Flood Gun Figure 3 Flood Gun With Snout
170. a strong solution of laboratory grade detergent and distilled water a Dip a cotton swab into the solution and wipe the cap inside and out to remove as much of the polishing compound residue as possible Discard the swab b Gently immerse the cap not face down in a beaker half full of the detergent solution and place the beaker in an ultrasonic cleaner for five minutes c Grasp the cap with tweezers by its mounting rim and carefully remove it from the ultrasonic cleaner d Rinse the cap thoroughly with clean water e Blow it dry with nitrogen or filtered pressurized air Do not mar the polished surface or the inside of the aperture 9 7 Ina 100 solution of isopropyl alcohol gently immerse the cap not face down and place the beaker in an ultrasonic cleaner for five minutes 9 8 For the Extractor Cap to remove and clean it and re install it in the extractor cap holder as follows 9 9 Turn the cap 1 3 turn and pull it past the ball detents in the extractor cap holder Page 10 of 12 Revision B 3 97 lon Source Change 05 10 9 10 9 11 9 12 The detents are spring loaded ball plungers Follow steps 9 5 through 9 7 To install the extractor cap line up the slots with the detents on the extractor cap holder and push the cap in Part 10 Pre Loading an lon Source into a Suppressor Cap 10 1 10 2 10 3 10 4 10 5 10 6 Find the base for the suppressor cap in the replacement kit Place the suppr
171. abinet open the manual Process Gas Shutoff valve In the GAE cabinet open the unlabeled manual valve between the chlorine pressure regu lator and V14 Wait for BT1 to indicate base pressure 0 001 T Do not open the chlo rine pressure regulator at this time In the Gas Control Popup close valves V14 V15 and V16 Close the unlabeled manual valve between V14 and the Cl pressure regulator Page 10 of 12 Revision B 3 97 Chlorine Cylinder Replacement 11 01 Part 8 Reinstitute the Chlorine Gas Flow 8 1 8 2 8 4 8 5 8 6 8 7 8 8 8 9 8 10 8 11 Using the 3 8 open end wrench at least 10 12 long open the chlorine cylinder valve located on the top of the cylinder one half turn counterclockwise Considerable torque is required to open the cylinder valve initially Anchor the cylinder with your free hand as best you can to minimize the torque load placed on the CGA 660 fitting Thereafter the valve tool provided with the GAE cabinet can be used for opening and closing the valve DANGER If an accident should occur that results in the release of chlorine close the GAE cabinet door as quickly as possi ble Do not continue with this procedure Evacuate all per sonnel from the area and notify the site s Chemical Safety Officer or other responsible management personnel immediately In the GAE cabinet open the manual Process Gas valve and observe the input pressure gauge on the right hand side of the p
172. ace to Airco for proper disposal Special Protection Information Respiratory Protection N A Ventilation To prevent accumulation above 25 molar percent Local Exhaust To prevent accumulation of high concentrations so as to reduce the oxygen level in the air to less than 18 molar percent Special Mechanical Gen Other Protective Gloves Any material Eye Protection Safety goggles or glasses Other Protective Equipment Safety shoes safety shower Special Precautions Special Labeling Information DOT Shipping Name Oxygen or Oxygen compressed DOT Shipping Label Oxidizer DOT Hazard Class Nonflammable Gas I D No UN 1072 Special Handling Recommendations Use only in well ventilated areas Valve protection caps must remain in place unless container is secured with valve outlet piped to use point Do not drag slide or roll cylinders Use a suitable band truck for cylinder movement Use a pressure reducing regulator when connecting cylinder to lower pressure 3000 psig piping or systems Do not heat cylinder by any means to increase the discharge rate of product from the cylinder Use a check valve or trap in the discharge line to pre vent hazardous back flow into the cylinder For additional handling recommendations consult Compressed Gas Association Pamphlets P 1 P 14 and G 4 NFPA 551 1984 OSHA 1910 Subparts H amp Q Revision B 3 97 Page 3 of 4 Special Storage Recommendations Protect cylin
173. afety goggles while performing these steps Minimize direct exposure to the chemicals trapped in the pump oil Revision B 3 97 Page 5 of 8 04 04 4 4 4 5 4 6 4 7 Roughing Pump Oil Change CAUTION Perform this procedure in a well ventilated area The con taminated waste oil is hot and may contain toxic materials including xenon difluoride styrene siloxane chlorine and bromine Do not breath in the oil vapors directly Abide by all safety regulations set forth by the facility for handling and disposing of contaminated waste oil The following instructions provide a step by step procedure for changing the oil in Varian chemical series mechanical pumps You do not have to vent the system to change the rough pump oil Use the vacchat program to close V1 also close V2 V3 V4 and V6 as a precaution Allow the pump to run for one hour to bring the oil to the proper temperature Turn off the rough pump through vacchat rpn after the oil is at temperature Remove the clamp and seal assembly from the intake port Remove any bolts securing the pump to the base CAUTION Use care when lifting and moving the pump The rough pump weighs approximately 60 pounds 28 kg To avoid personal injury secure the help of another person Remove and place the pump on an elevated stand Place a bottle and a funnel beneath the drain plug remove the plug and allow the oil to drain Remove the fill plug to allow the oil to drain m
174. al s contained inside If a chemical source is not in its safest state as described in Service Procedure 02 01 it is possible for a combination of component failures to release the chemical s through a cabinet s delivery line a roughing line a purging line or from a chemical reservoir into the workchamber Do not open the workchamber or disassemble any part of the vacuum pumping system or detach any gas line from any chemical cabinet until you are sure that every chemical source attached to the FIB system is in its safest state Power Down and Vent the System Before performing the tasks described in this procedure you must power down and vent the sys tem see Service Procedure 01 02 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Open the Workchamber Before opening the workchamber clean the exterior panels Remove the front panels to gain access to the workchamber door Clean the workchamber and the loadlock exterior as described in Service Procedure 06 05 Once the system is completely vented open the workchamber door by removing the 1 2 socket head cap screws Page 2 of 14 Revision B 3 97 Remove Replace lon Beam Column 0
175. al times before identifying the exact area of the leak To end a leak test shut the valve and bring down the leak detector Allow it to spin for 30 seconds before switching it off Revision B 3 97 Page 3 of 4 04 02 Vacuum Leak Checks 8000 9800 MicroMill HT Vacuum System Schematic Dual Pump System Ion Pump IP PX TC2 Wi A TL i a Loadlock er Ma edok __ A arbo abine v44 eo cel i ji y f Ionization Gauge 7 HCIG CCIG Ly To Exhaust ote onds after the turbo pump is P wered down the opens automatically to vent the pump with nitrogen 2 CA amps ac specimen holder to the 3 The MicroMill HT is e equi sipped vi ie GAEa nd Carbon cab 4 Some dual pump syst uipped with TC4 ai nd VTL Figure 2 Dual Pump Vacuum System Page 4 of 4 Revision B 3 97 ZA Micrion Service Procedure No 04 03 Service Procedure Title Pump Down Automatic and Manual Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service As Needed Introduction Pump down is the process of creating a vacuum of between 1 0 x 10 torr and 9 0 x 107 torr in the workchamber Several hours after pump down the workchamber vacuum is typically between 9 0 x 107 torr and 3 0 x 10 torr Automatic Pumpdown is the procedure to use if you want to include nitrogen purging of the workchamber and loadlock Manual Pumpdown is the procedure to use if you do not need to purge with nitrogen As often as possib
176. als Required Vacchat Software VacCon Computer board Micrion part no 100 009290 Upgrade EPROM Part 1 Swapping EPROMs from the VacCon Computer Board The VacCon Computer board is normally in the second or third slot from the left end of the Vac Con module You can identify it by the part number 100 009290 on the white sticker on the ejec tor tab Be sure to power down the VacCon before handling the board 1 1 Switch off the VacCon module See Service Procedure 01 02 1 2 Disconnect the two connectors from the VacCon Computer board 1 3 Remove the VacCon Computer board from the VacCon module 1 4 Remove the EPROM U11 it is a 32 pin IC located on the upper left quadrant of the board 1 5 Insert the new EPROM in the socket at U11 1 6 Replace the VacCon Computer board and reconnect the two connectors 1 7 Switch on the VacCon Module Revision A 2 97 Page 1 of 2 04 07A EPROM Upgrade and TC Calibration Part 2 Setting the TC Defaults in the Vacuum M File You must now specify the default values for the thermocouple calibration constant to be read by the new EPROM 2 1 Inthe Vacuum M file set the default value FF for each of the four thermocouples Ecl ee 0 FE tc2 cc 0 SEE CECS OG 0 FFE tc4 cc 0 FE 2 2 Save the file Part 3 Preparing for Thermocouple Calibration To prepare for the calibration of the thermocouples pump down the system and start Microsur gery 3 1 Pump Down t
177. and Large MCP Interior View Page 6 of 14 Revision B 3 97 Remove Replace lon Beam Column 05 09 05 Lower column MCP mounting screws 3 one hidden Figure 4 Flood Gun With Snout and Large MCP in 9800 System Interior View Revision B 3 97 Page 7 of 14 05 09 05 Remove Replace lon Beam Column Workchamber Flood Gun Height Positioning Screw Lower Column MCP Mounting Screws 4 Figure 5 Side View of Flood Gun With Snout and Large MCP Page 8 of 14 Revision B 3 97 Remove Replace lon Beam Column 05 09 05 Figure 6 Side View of Flood Gun Without Snout and Small MCP Flood Gun Lowered and MCP Disconnected Flood Gun Height Positioning Screw Lower Column MCP Mounting Screws 4 Figure 7 Side View of Flood Gun Without Snout and Small MCP Flood Gun Lowered and MCP Disconnected Revision B 3 97 Page 9 of 14 05 09 05 Remove Replace lon Beam Column lon Pump Port Aperture Drive Plate Table 1 Column Connections Signal Name 1 High Voltage L1 Lens 1 L2 Lens 2 High Voltage High Voltage S Suppressor E Extractor High Voltage F1 Filament Low Voltage J1901 Bbaper octopoles High Voltage F2 Filament c Oo a 2 C INv High Voltage Low Voltage Blanking Signals Page 10 of 14 Fi
178. and adjust if necessary Adjust beam bender 3 so that the output of bender 3 is centered on the reference port of the x axis interferometer see Figure 6 Use a small Phillips head screwdriver to loosen the x axis photo collector mounting screw Remove the photo collector from the measurement port of the x axis interferome ter Place a piece of white paper or Scotch tape over the x axis interferometer measurement port see Figure 6 Adjust beam bender 3 so that the beam reflected off the stage mirror is centered on the measurement port and is as bright as possible If no red glow is visible at the measurement port it may be necessary to adjust the x axis reference mirror see Figure 5 Adjust beam bender 3 and the x axis reference mirror so that the beam is reflected back into the measurement port them do a more precise adjustment by maximizing the bright ness of the red glow at the measurement port Another technique is to slide a strip of glossy thermal printer paper into the slit in the side of the interferometer so that it covers the reference beam this will diffuse the beam Scotch tape must be used at the measure ment port to detect the reflected glow paper will obscure it Then adjust the position of bender 3 and the x axis reference mirror to maximize the brightness of the red glow at the measurement port Revision B 3 97 Page 9 of 12 03 05 Laser Alignment M S Interferometer o o Reference 4 Measu
179. ange Part9 Inspect and Clean the Used Suppressor and Extractor Caps If the suppressor cap is very dirty heavily stained or burn marks are present from arcing it must be polished In the case of arcing clean the extractor cap as well Being extremely careful not to drop or scratch it clean the suppressor cap as follows In the Case of Mild Stains 9 1 Wipe away as much of the gallium as possible using clean dry cotton tipped swabs Dis card the swabs Remove all fibers and dust from the cap 9 2 Wipe the inside of the suppressor cap with a clean cotton tipped swab Discard the swab 9 3 Once the cap is clean prepare to load it with the new replacement ion source In the Case of Burn Marks or Heavy Stains 9 4 For the Suppressor Cap apply a small amount of the metal polish supplied with the col umn service kit to a fresh swab Polish the front and back openings of the aperture in the suppressor cap Spin the swab stem between your thumb and forefinger Discard the swab 9 5 Apply a thin coat of the metal polish to a lint free wiper in an area about 2 by 4 a To polish the face of the cap place the suppressor cap face down on the polish and move it in a figure eight pattern while applying light and even pressure a Rotate the cap frequently to ensure uniform polishing b Continue until all stains are removed c Check for deep scratches or dents which render the cap unusable 9 6 In a small clean beaker mix
180. anging the potentials applied to the flood gun elements click on the graphical representations of the elements in the Electron Flood Gun popup For manual inter vention you must disable the flood gun maintenance software function with the Maintenance button in the Electron Flood Gun popup which monitors and adjusts the filament current to maintain constant emission cathode current Part 7 Checking the Flood Gun Boards 150 001130 150 001090 7 1 Ifthe system is currently up perform an Auto power down and switch off the System Controller Chassis as explained in Service Procedure 01 02 7 2 Remove all external connections from the 150 001130 board See Service Procedure 12 11 Flood Gun Supply Board for connectors 7 3 Remove the 150 001130 board from its slot place it on an extender card and put the extender in the slot 7 4 Switch on the System Controller Chassis See Service Procedure 01 01 7 5 Referring to Service Procedure 12 12 verify that all the proper supply voltages are present on the board 7 6 Switch off the System Controller Chassis and return the 150 001130 board to its slot 7 7 Repeat steps 7 2 through 7 6 for the 150 001090 board See Service Procedure 12 11 Flood Gun Interface Board 7 8 Reconnect all external connections to the 150 001130 and 150 001090 boards 7 9 Switch on the System Controller Chassis 7 10 Switch on the Computer and wait for the bootstrap to complete 7 11 When p
181. aperture drive outputs 12 06 Fuse 1 Ch0 X Aperture 8 V while servo motor is in motion Fuse 2 Ch1 Y Aperture 8 V while servo motor is in motion Fuse 3 Ch2 X Stage 8 V while servo motor is in motion Fuse 4 Ch3 Y Stage 8 V while servo motor is in motion Fuse 5 Ch4 spare Fuse 6 Ch5 spare Ch6 stepper motor Ch7 stepper motor a Nominal voltage is 8V voltages depend upon speed 8V for clockwise motion 8V for ccw Table 2 lists the aperture drive output test points for the stepper clock Table 2 Testing for aperture drive stepper clock outputs TP6 clock Ch6 E beam X Aperture Slow 25 Hz sq wave Fast 120 Hz sq wave TP7 clock Ch7 E beam Y Aperture Slow 25 Hz sq wave Fast 120 Hz sq wave NOTICE Do not short TP7 to U9 This will damage U19 U20 Revision B 3 97 Page 3 of 4 12 06 Motor Drive Board Table 3 lists the jumper settings for the 893 board Table 3 Jumper settings 893 JF1 11 12 JF3 5 6 9 10 11 12 JF3 None Page 4 of 4 Revision B 3 97 ZA Micrion Service Procedure No 12 07 Service Procedure Title Analog Drive Board 1081 Applicable Systems All Frequency of Service As needed Introduction The Analog Drive board converts digital raster data generated by the raster generator board to analog voltages that are sent to the column electronics module for beam deflection Figure 1 shows the A
182. aperture mechanism 2 1 Using the Aperture popup home the apertures 2 1 f you choose to remove the column remove the column as described in Service Proce dure 05 09 05 for 5 nm 05 09 10 for 10 nm or 05 09 25 for 25 nm If you leave the column on the process module remove the column cap ion source assembly from the column as described in the column removal service procedure CAUTION The column assembly weighs approximately 50 lbs Use proper care when lifting it to avoid injuring yourself or damaging the column Remove the ion gun assembly from the column and then move the column Obtain the help of another person Part 3 Remove Aperture Drive Plate and Mechanism You must wear clean room gloves while performing these steps 3 1 Remove the three socket head screws holding the aperture drive motor plate to the column housing see Figure 1 a Carefully pull the aperture drive motor plate away from the column housing until the internal wire harness is visible b Note the color sequence of the wires use Table 1 for wiring color sequence 3 2 Disconnect the wires and place the motor plate in a clean area Page 2 of 8 Revision B 3 97 Aperture Replacement Table 1 Aperture Drive Wire Colors Pin Color Signal 8 Orange X Home Switch 7 Blue Jumper to pin 3 4 Gray Y Limit left pivot 3 Blue Jumper to pin 7 2 Brown Y Home right pivot 1 White Forward Aperture Home
183. ard i e toward the column and the JB command to drive the dual nozzle assembly slowly back i e toward the front of the chamber until the y lead screw is covered by a thin film of lubricant Revision B 3 97 Page 3 of 4 10 01 Lubricating the Dual Nozzle Lead Screws Part 4 Z Lead Screws Each nozzle subassembly has a z lead screw and z motor Fig 2 shows the location of the z lead screw on the two nozzle subassemblies You can clean and lubricate each of the two z lead screws at the same time But the nozzle subassemblies can only be driven on the z axis one at a time Z2 lead screw beneath motor Figure 2 Z Axis Lead Screw for Nozzle Subassembly 2 The procedure begins with the cleaning and lubrication of both lead screws and ends by driving the left nozzle subassembly Z1 and then the right nozzle Z2 subassembly up and down See Figure 2 for the location of the two z lead screws For each of the two nozzle subassemblies proceed as follows 4 1 Using the dpu command in vacchat select the nozzle menu 4 2 Select the number of the nozzle 4 3 Using the JD command drive the nozzle subassembly down to its lower limit 4 4 From the lead screw remove old or excess grease with a wipe DO SO VERY GENTLY 4 5 Squeeze a small amount of lubricant to the tip of applicator syringe Extend the syringe tip to just above the brass nut shown in Fig 2 and apply the lubricant 4 6 Drive the nozzle down slowly and t
184. arily Make sure the connector is plugged in Page 4 of 6 Revision B 3 97 Aperture Limit Switch Inspection 05 05 Table 1 lists the signal names matching wire colors with the switch wiring Table 1 Wire Colors per Switch Pin Number Color Signal Name 8 Orange X home switch rear aperture home 7 Blue Jumper to pin 3 4 Gray Y axis limit left pivot limit 3 Blue Jumper to pin 7 2 Brown Y home right pivot limit 1 White X home switch forward aperture home 2 2 Inspect the limit switch shorting leafs Make sure they are not bent caught up or broken Part 3 Software Interface The motorshell program provides an interface to the drive motors and travel limit switches in the FIB system Use motorshell to get readback information about the aperture motors and travel limit switches Do not operate the aperture motors without the limit switches electrically connected otherwise the mechanism may be damaged In an xterm window enter the motorshell program by typing motorshell J For help at any time while in the motorshell program type a question mark followed by a return Revision B 3 97 Page 5 of 6 05 05 Aperture Limit Switch Inspection Page 6 of 6 Revision B 3 97 ZA Micrion Service Procedure No 05 06 Service Procedure Title External Aperture Inspection Lubrication Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service Every 6 Months
185. arm If this situation exists bypass jumper the flow sensor The interlock resets after you clear the alarm condition by using the push button adjacent to J1104 on the rear panel of the vacuum control unit or by using a remote push button provided by the customer Page 6 of 10 Revision B 3 97 Xenon Difluoride Cylinder Replacement 11 02 3 7 3 8 3 9 LeakValve toggle button so that it reads OFF see Fig 3 Click on the RP icon to start the roughing pump a Wait until TCI reads lt 0 01 torr then open valves V15 and V16 b Wait for BT1 to read base pressure 0 00 torr c When BTI reads base pressure record the reading for future reference d Close V15 and the manual valve labeled Process Gas Shutoff on the outside of the GAE cabinet see Fig 2 In the GAE cabinet close the manual valve on the old Br cannister assembly by turning it 1 4 turn clockwise see Fig 1 In the Gas Control Popup with valves V15 and V16 still open open valve V19 and wait for BT1 to indicate base pressure 3 10 Close valves V19 V15 and V16 and switch off the roughing pump Part 4 Remove Plug and Tag the Old Cylinder 4 1 4 2 4 3 4 4 4 5 4 6 Put on the rubber gloves and safety glasses and remove the old XeF cannister assembly as follows see Fig 1 Using the 3 4 and 5 8 open end wrenches loosen the female VCR nut between valve V13 and the 1 4 turn manual valve Finish unscrewing
186. as root Bring up the SMIT program by entering the smit command In the SMIT main window select the System Environments option In the System Environments window select Change Show Date Time and Time Zone SMIT asks if your time zone is in Daylight Saving Time Answer yes or no From the list of time zones click the correct time zone for your location Edit the date time and other parameters in the fields displayed and click on the Do button SMIT displays a message Now exit SMIT and log out and then log back in so that any changes to date time and time zone will be reflected in your current session Click the Done button and then select Exit Revision B 3 97 Page 1 of 2 Setting Time and Date 09 02 9 You must quit the FIB application program and log out of the system for the changes you have made to take effect Quit the application b Click on Quit amp Exit in the Process Watcher popup c Atthe command prompt restart the X windows program by typing xinit Page 2 of 2 Revision B 3 97 ZA Micrion Service Procedure No 09 03 Service Procedure Title Using the Vacchat Program Applicable Systems All Frequency of Service As Needed Introduction The vacchat program provides a control interface to the vacuum control system You may use vacchat to obtain information on the status of valves pumps and vacuum level readings You can open and close valves turn pumps on and off vent to atmosphere and pump down to
187. assembly should be concentric centrally aligned 3 5 Clean the workchamber as described in Service Procedure 06 03 and the ion pump con nector tube 3 6 Reinstall the column as described in Part 5 of Service Procedure 05 09 25 Column Removal and Replacement 25 nm Column Revision B 3 97 Page 5 of 6 05 02 25 Cleaning Column Elements Page 6 of 6 Revision B 3 97 ZA Micrion Service Procedure No 05 03 05 Service Procedure Title MCP Removal and Replacement 5 nm Column Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service As needed Introduction This procedure describes the removal of the microchannel plate MCP from the column of the FIB system and the installation of a replacement MCP Materials Required This procedure requires the use of the following materials Clean standard field service kit Lint free wipes Clean room gloves Laboratory grade isopropyl alcohol NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 5 task Specifically Equipment is energized and measurements and adjustments require physical entry into the equipment or equipment configuration will not allow the use of clamp on probes Revision B 3 97 Page 1 of 10 05 03 05 Remove nstall MCP Part 1 System Preparation Configure the Chemical Sources in Safe Mode Before performing the tasks described in this proce
188. asured metered and system read back voltages vary Make sure that changes are smooth and linear over the entire slider range If there are large jumps or other erratic behavior a DAC ADC or power supply may be failing Please note the following hazard warning and take the safety precautions prescribed 9 1 WARNING Electrical potentials as high as 500 volts may be present at the J1801 connector when the flood gun power switch S3 on the System Controller is in the ON position When taking the voltage measurements described below be sure to switch the flood gun power switch OFF before connecting or disconnecting the voltmeter probes Check the positive deflection voltage control as follows Page 18 of 24 Revision B 3 97 05 04 05 poo oF s Flood Gun Installation and Test Switch the flood gun power switch S3 on the System Controller OFF Connect the voltmeter between pins G Ydef and P Ground Switch the flood gun power switch S3 on the System Controller ON Sweep the deflection slider slowly through its range and verify that the positive volt age is the same magnitude as the negative voltage 0 V to 10 V and that the read backs track the voltmeter Check the negative deflection voltage control as follows Switch the flood gun power switch S3 on the System Controller OFF Connect the voltmeter between pins H Ydef and P Ground NOTE This will be opposite in polarity to pin G above Switch the fl
189. at prompt check the status of the valves by typing SV The system will display the status of the valves VIC V2C V3C V4C V5C V6C VIO VTIO VTPC The valves should be in the states shown above V1 through V6 and VTP should be closed and VI and VTI should be open see Figure 1 for valve locations If any of the valves V1 through V6 or VTP is open close each valve by typing the vac chat close command For example V1 is closed with the following command clvi If VI or VTI is closed open each valve by typing opvi or opvti Page 2 of 10 Revision B 3 97 Pump Down 04 03 2 5 2 6 2 T 2 8 2 10 2 11 2 12 Start the fore pump by typing fpy Start the turbo pump by typing hpy Wait until the turbo pump reaches its operating speed 42 krpm before proceeding this will take approximately 5 minutes Check the status of the turbo pump by typing sphp The system will display the status of the turbo pump If the turbo pump has not reached its operating speed the system will report Turbo pump is not ready When the turbo pump has reached its operating speed the system will report Turbo pump is ready When the turbo pump is ready bring up the hot cathode ionization gauge HCIG power by typing hcpu After minimal exposure to atmosphere such as a source change it should take an hour for the pressure in the workchamber to get below 5 00 x 10 6 torr If the workchamber has been exposed to
190. ate From the screen display record the following parameters in Table 1 Column and System Parameters on page 2 acceleration voltage extractor voltage extractor current in the blue box beside the extractor voltage suppressor voltage Open the Stage Control dialog box by clicking the blue box in the Control window to the right of the Image window In the Control window set the imaging Mode to Ion Open the Electron Flood Gun Control popup by clicking the flood gun graphic outside the upper right corner of the image window shaped like an L bracket To see the column diagram drag the dialog box to the right On the column diagram click on the beam limiting aperture graphic to open the Beam Limiting Aperture Control popup drag it so that you can view all the open popups You will need to use the Size button to change apertures as you continue 1 The Microsurgery program is provided for access to certain maintenance functions To start it type sur gery in an xterm window Revision B 3 97 Page 1 of 2 05 01 1 9 Record the following parameters for all apertures in Table 1 blanking aperture current reading MCP detector gain voltage Ion Faraday and Electron Faraday current Electron Flood Gun filament and cathode current Daily Parameter Log Table 1 Column and System Parameters Date By Parameter Value Unit Acceleration Voltage
191. ation and Test 05 04 25 Part 4 Install the Replacement Flood Gun 4 1 4 2 4 3 Fasten the flood gun assembly to the Workchamber Lid with the mounting screws see Figure 6 Loosen the height adjustment screw and slide the flood gun up until the end of the flood gun snout contacts the MCP as shown in Figures 1 2 and 3 Be careful not to damage the MCP screen Make sure that the flood gun snout is aligned with points directly at the center bore of the MCP see Figures 1 and 2 If necessary loosen the lateral positioning screws and adjust the lateral position of the flood gun to obtain the proper orientation against the MCP see Figure 6 Tighten the height and if used the lateral adjustment screw s Reattach the flood gun electrical connections as shown in Figures 1 and 2 Clean the interior of the system as described in Service Procedure 06 03 Lower Column Fasten flood gun to workchamber lid with mounting screws 2 Workchamber Lid Loosen height adjustment screw and slide flood gun up until end of snout contacts MCP Flood Gun Lateral Positioning Screws 2 NM b ull Flood Gun Snout Flood Gun Figure 6 Replacement Flood Gun Installation Page 8 of 16 Revision B 3 97 05 04 25 Flood Gun Installation and Test Part 5 Power Up and Beam Up Follow Service Procedure 01 01 to power up and bring the beam up Part6 Flood Gun Control Calibration The Electron Flood Gun popup provides acce
192. atmosphere for a prolonged period it will probably take several hours for the pressure to get below 5 00 x 10 6 torr To check the workchamber pressure type sthc When the workchamber pressure has reached 5 00 x 10 6 torr start the ion pump with the following command ipy The ion pump housing should be cool to the touch If the housing is hot turn off the ion pump and check for problems in the vacuum system To check the ion pump pressure type Spip The ion pump pressure sensor will not read pressures above 5 00 x 10 6 torr it will dis play a reading of 5 00 x 10 6 torr until the ion pump pressure is below 5 00 x 10 torr When the workchamber pressure has reached 3 00 x 10 6 torr close VI with the following command clvi The system will not enable high voltage until the ion pump pressure is below 3 75 x 10 torr The amount of time it takes to pump down to pressures of 3 75 x 10 torr and below is dependent upon the cleanliness of the column 1 Some FIB systems have CCIGs rather than HCIGs the commands ccpu or hcpu will work on either type Revision B 3 97 Page 3 of 10 04 03 Pump Down 2 13 Tighten the workchamber lid bolts Note this concludes the manual pump down of the workchamber The remainder of this section describes the manual pump down of the loadlock and assumes that the workcham ber has been pumped down the fore and turbo pumps are running and that the high volt age is enabled 2 14
193. ave to be removed and possibly disassembled to retrieve this hardware Use a small slotted screwdriver to remove the two aperture shield screws see Figure 3 Remove the aperture shield Part 4 Inspect the Aperture Shield 4 1 If there are holes sputtered through the aperture shield other than the central hole for the ion beam it must be replaced Even if there are no obvious holes in the aperture shield inspect both sides of the shield for shallow depressions depressions indicate that the Tungsten has been eroded sputtered and that the aperture shield should be replaced When in doubt replace the aperture shield especially if it has been in an operational col umn for an extended period 6 to 12 months Extractor Cap Y Column Housing TTI Aperture Shield Screws 2 Extractor Cap Ball Plunger Aami o Figure 3 Cross Section of Extractor Cap and Aperture Shield Revision B 3 97 Page 5 of 6 05 15 10 Aperture Shield Replacement Part 5 Replace the Aperture Shield and the Extractor Cap 5 1 5 2 Fasten the replacement aperture shield to the bottom of the extractor cap holder with the two aperture shield screws see Figure 3 The center bores of the aperture shield and the aperture must be concentric centrally aligned otherwise the extractor cap will not seat properly Align the slots on the extractor cap with the detents on the extractor cap holder and press the extractor cap into place Part 6 Re
194. be 160 003422 Check the connector pins on the feedthrough port the wire harness between the feedthrough and the flood gun not the harness between the System Controller and the feedthrough as follows a Check between pins E F filament you should have continuity If not the E gun fila ment or internal harness is open b Check between pins U G and H Focus lens to Deflection plates They should be open Check between pins T and E or F Filament and Grid elements They should be open d Check E F G H T and U to ground They should all be open Part 9 E Gun Assembly Voltage Checks For the following steps use the control sliders in the popups for the focus and deflection ele ments Change the slider settings and watch how both the measured metered and system read back voltages vary Make sure that changes are smooth and linear over the entire slider range If there are large jumps or other erratic behavior a DAC ADC or power supply may be failing Please note the following hazard warning and take the safety precautions prescribed 9 1 WARNING Electrical potentials as high as 500 volts may be present at the J1801 connector when the flood gun power switch S3 on the System Controller is in the ON position When taking the voltage measurements described below be sure to switch the flood gun power switch OFF before connecting or disconnecting the voltmeter probes Check the positive deflection voltage control a
195. ble Systems All Frequency of Service As needed Introduction The knob panel connects directly to the knob panel interface board via P3 and P4 The interface board notifies the computer of knob joystick and switch events as they occur Tools and Materials Required Oscilloscope Ohmmeter ELECTROSTATIC DISCHARGE This board is sensitive to electrostatic discharge Handle the board as follows 1 Touch your hand to the metal frame of the chassis to discharge static or wear a grounding strap 2 Hold the board by the ejector tabs 3 If you must lay the board down lay it component side down NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 5 task Specifically Equipment is energized Measurements and adjustments require physical entry into the equipment Revision B 3 97 Page 1 of 4 12 05 841 Board Board number and revision level are stamped on the ejector Any pin on this side can be tested for an interrupt signal ali P4 S o D O Z 08000 094 GND Figure 1 841 Knob Panel Interface Page 2 of 4 Revision B 3 97 841 Board 12 05 Part 1 Power Down Before Disconnecting P3 or P4 Before removing the connectors at P3 or P4 of the Knob Panel board follow the power down pro cedure in Service Procedure 01 02 Note P3 and P4 inputs must not be interchanged WARNING Dangerously high v
196. ble lubricants Equipment to contain oxygen must be cleaned for oxygen service See Compressed Gas Association Pamphlet G 4 Compressed gas cylinders should not be refilled except by qualified producers of compressed gases Shipments of a com pressed gas cylinder which has not been filled by the owner or with his written consent is a vio lation of Federal Law 49CFR Page 4 of 4 Revision B 3 97 Material Safety Data Sheet MSDS Platinum Il hexafluoroacetylacetonate Emergency contact Chemtrec 800 424 9300 General comments The fire explosion and reactivity data given herein are derived from sources that address the hazards incurred in storing and handling large quantities whereas a relatively small amount is used in this application Substance Identification Generic name platinum IT hexafluoroacetylacetonateCAS Registry Number 65353 51 7 Chemical formula P CF4COCHCOCF 3 Molecular Wt 609 22 Physical Data Physical description orange xtl Percent volatiles by weight no dataBoiling point subl 65 0 1mm Melting point 143 145 dec Vapor pressure 20 X mmHg no data Specific gravity no dataSolubility in water Insoluble Fire and Explosion Hazard Data Flash point no data Extinguishing agents carbon dioxide or dry powder Fire fighting procedures Leave area unless fitted with NIOSH MSHA approved self contained breathing apparatus flame and chemical resistant clothing hats boots and gloves U
197. bottom right of the electronics console PE Elex Consol lon Pro Fore Rough Turbo Mod A Rum Circuit Breakers For the Rough Fore and Turbo Pumps 04 012A Figure 1 Power Distribution Panel Top Right of Electronics Module 1 2 While the turbo pump is spinning down perform the following tasks a Turn off the water supply to the turbo pump b Remove the enclosure panels from the system c Remove the front bottom kick plate 1 3 Disconnect the circular power connector from the turbo pump see Figure 2 1 4 Disconnect the turbo pump exhaust line the line between the turbo pump and the rough ing fore pump at the turbo pump exhaust port leaving the roughing bellows attached to the bulkhead plate see Figure 2 Page 2 of 8 Revision B 3 97 Turbo Pump V550 04 05 Isolation Bellows Hard bellows Bellows Clamp 4 Adapter flange Bearing and Vent N2 Connections ia Fittings for H2O Lines Turbo Pump Power Exhaust to and Ground L Fore Pump Connections 08 002B a Figure 2 Turbo V550 Pump Revision B 3 97 Page 3 of 8 04 05 Turbo Pump V550 1 5 Remove the double claw clamps from the turbo pump inlet 8 ISO flange and the turbo pump isolation bellows 1 6 Switch off the N supply Remove the N venting device 1 7 Disconnect the water lines from the inside of the systems bulkhead by removing the hose clamps It may be necessary to
198. burn or burns with difficulty Do not use water or halogenated agents to extinguish a surrounding fire Fire fighting procedures Leave area unless fitted with NIOSH MSHA approved self contained breathing apparatus flame and chemical resistant clothing hats boots and gloves Unusual fire amp explosion hazards None Health Hazard Data Hazardous exposure levels no data Effects of overexposure no data Emergency amp first aid procedures Eye contact Flush eyes including under eyelids with large amounts of water for at least 15 minutes and seek medical attention Skin Contact Flood skin with large amounts of water may cause dermatitis if irritation persists seek medical attention Inhalation Seek medical attention Ingestion Seek medical attention may cause gastrointestinal disturbances Reactivity Data Stability air and moisture stable Conditions to avoid reaction with alkalies which evolves hydrogen and may ignite in contact with chlorine or bromine Contact with aluminum causes embrillement Revision B 3 97 Page 1 of 2 Incompatible materials strong oxidizing agents strong acids strong bases halogens and active metals Hazardous decomposition products carbon monoxide carbon dioxide hydrogen fluoride organic fumes and platinum salts Hazardous Polymerization none Spill or Leak Procedures If material is released or spilled wearing full protective equipment cover with dry sad or vermiculite and sw
199. can disable the vacuum pumps and bring the pressure in the chamber to atmosphere Some systems are equipped with a single fore rough pump and other systems have dual fore and rough pumps The autovent com mand will automatically vent either type of system Manual venting procedures are different for single versus dual pump systems and are described in Part 3 Reset Reset refers to the reset of the computer and the SysCon module Reset after emergency shutdown is also included in this procedure Requirements e vacchat window open see Service Procedure 09 03 e FIB application running e Access to the switches shown in Figure 1 NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 3 task Specifically Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules Revision B 3 97 Page 1 of 12 01 02 Power Down Vent and Reset Part 1 System Preparation Configure the Chemical Sources in Safe Mode Before performing the tasks described in this procedure you must put the chemical sources in a safe mode see Service Procedure 02 01 WARNING Do not proceed until the chemical sources are secure The chemical reservoirs in FIB systems contain hazard ous materials Labels affixed to the exterior of a chemical cabinet identify the c
200. ce it in the bottom of the GAE cabinet c Using the appropriate hex key loosen the two set screws in the rear inner part of the anti torque clamp and slide the clamp to the left so that the nut on the CGA coupling can be fully loosened d Unscrew the CGA 660 coupling nut completely and carefully remove the cylinder e Screw the protective CGA cap onto the fitting on the old cylinder and tighten it securely with the 1 1 4 open end wrench f Place the old cylinder temporarily in a secure place for eventual disposition in accordance with local procedures Be sure that the cylinder is tagged In Use Part 5 Inspect and Install the New Cylinder 5 1 In the GAE cabinet clean the male end of the CGA 660 fitting with a clean dry wipe 5 2 Place a new Teflon gasket on the male end of the CGA 660 fitting in the GAE cabinet 5 3 Use the 1 1 4 open end wrench to make sure that the valve on the new cylinder is closed DANGER If the valve has been opened since the cylinder was charged a potentially lethal amount of chlorine will escape when you remove the CGA cap If you suspect that the valve has been opened do not proceed further Contact the site Chemical Safety Officer and or Micrion Product Support for further instructions 5 4 Perform this step under a vented hood or in the vented GAE cabinet Using the 1 1 4 open end wrench remove the CGA cap from the new cylinder and store the cap in the bottom of
201. cedure 02 01 WARNING Do not proceed until the chemical sources are secure The chemical reservoirs in FIB systems contain hazard ous materials Labels affixed to the exterior of a chemical cabinet identify the chemical s contained inside If a chemical source is not in its safest state as described in Service Procedure 02 01 it is possible for a combination of component failures to release the chemical s through a cabinet s delivery line a roughing line a purging line or from the tungsten reservoir into the workchamber Do not open the workchamber or disassemble any part of the vacuum pumping system or detach any gas line from any chemical cabinet until you are sure that every chemical source attached to the FIB system is in its safest state Power Down and Vent the System Before performing the tasks described in this procedure you must power down and vent the sys tem see Service Procedure 01 02 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and auto procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Open the Workchamber Remove the front panels to access the workchamber door Once the system is completely vented open the workchamber door by removing the socket head cap screws and releasi
202. ceeding Remove the MCP from the bottom of the column by removing the mounting screws and spacers if applicable See Figures 6 and 7 Be careful not to damage the MCP screen Note to eliminate the risk of dropped hardware remove the column as described in Ser vice Procedure 05 09 05 replace the MCP and then reinstall the column 1 There are two styles of small MCP flat and angled see Figure 2 Both styles have the same fasteners and electrical connectors 2 There are two configurations of the flood gun with a snout and large MCP combination see Figures 3 and 4 In a 9800 series system as shown in Figure 4 the flood gun is rotated 90 to accommodate the installation of an optical microscope Revision B 3 97 Page 3 of 10 05 03 05 Remove nstall MCP WI in Flood Gun Figure 1 Flood Gun Without Snout and Small MCP Interior View Page 4 of 10 Revision B 3 97 Remove install MCP 05 03 05 Lower Column Workchamber Lid Flood Gun Height Behind the Connector Flood Gun Lateral Positioning Screws 2 MCP d Flood Gun Mounting Screws 2 Side View of Flat Version of MCP Figure 2 Side View of Flood Gun Without Snout and Small MCP s Revision B 3 97 Page 5 of 10 05 03 05 Remove nstall MCP Lower Column MCP mounting screws 3 one hidden 4 Flood Gun Figure 3 Flood Gun With Snout and Large MCP Interior View Page 6 of 10 Revision B 3 97 Remove
203. chamber under vacuum proceed as follows 2 1 From the Stage Control window in Microsurgery select Electron Faraday and GoToLa bel 2 2 From the main Microsurgery screen select Depo Nozzle and from the pulldown menu select the name of the nozzle subassembly you plan to replace Automatically the nozzle is extended 2 3 As you view the position of the nozzle s record the image via the screen printer to com pare with the image taken later when the replacement is complete Part 3 System Preparation Configuring the Chemical Sources in Safe Mode Before performing the tasks described in this procedure you must put the chemical sources in a safe mode see Service Procedure 02 01 Page 4 of 12 WARNING Do not proceed until the chemical sources are secure The chemical reservoirs in FIB systems contain hazardous materi als Labels affixed to the exterior of a chemical cabinet identify the chemical s contained inside If a chemical source is not in its safest state as described in Service Procedure 02 01 it is possible for a combination of component failures to release the chemical s through a cabinet s delivery line a roughing line a purging line or from a chemical reservoir into the work chamber Do not open the workchamber or disassemble any part of the vacuum pumping system or detach any gas line from any chemical cabinet until you are sure that every chemi cal source attached to the FIB syst
204. combination Enter cd usr micrion J cat ftp macro binary 4 put tmp tiff d quit 4 crl d 1 3 Create the net rc file Use the cat command to create the net rc file cat gt netre H machine printer name login micrion password 2 J ctrl d where printer name is the printer s host name It must be the host name that you changed cnp to for example np1600 1 4 Use the chmod command to set the access permissions for the net rc file su H enter the root password chmod 600 netre J 1 5 Edit the hosts file The etc hosts file on the FIB system computer contains lines that associate IP addresses with alphanumeric host names Open the file with the vi editor and add a line of the form ip address printer name where ip address is the IP address assigned to the printer by the local network administration personnel and printer name is the printer host name that you sub stituted for cnp inthe tiff print file You must also install that IP address in the printer through the printer s control panel according to the instructions given in the oper ation manual supplied by the printer manufacturer Page 2 of 4 Revision B 3 97 Network Printer 09 06 1 6 Edit the hosts equiv file The etc hosts equiv file is a list of host names and the host name for the printer must be included Open the file with the vi editor and add a line with the host name for the printer
205. commodate the installation of an optical microscope Revision B 3 97 Page 3 of 22 Flood Gun Installation and Test 05 04 10 h Workchamber Lid AAR y Filament f O cem pins S Grid Lead AN nO socket Ww A Front of Workchamber a BN B ip WC LB Flood Gun al Lower Column Figure 1 Flood Gun Without Snout and Small MCP Interior View Page 4 of 22 Revision B 3 97 05 04 10 Flood Gun Installation and Test Lower Column Flood Gun Mounting Screws 2 Workchamber Lid Flood Gun Height Behind the Connector Flood Gun Lateral Positioning Screws 2 Flood Gun Figure 2 Side View of Flood Gun Without Snout and Small MCP s Revision B 3 97 Page 5 of 22 Flood Gun Installation and Test 05 04 10 Lower Column Dues Gun Snout XN S P NU 4 Pin Keyed Filament Y Connector Leads pins A Figure 3 Flood Gun With Snout and Large MOP Interior View Page 6 of 22 Revision B 3 97 05 04 10 Lower column Flood Gun uf Snout Flood Gun Flood Gun Installation and Test 4 Pin Keyed Connector Y ie yw N a Grid Lead socket MD Filament E P A Leads pins N v X Figure 4 Flood Gun With Snout and Large MCP in 9800 System Interior View Revision B 3 97 Page 7 of 22 Flood Gun Installation and Test 05 04 10 Workchamber Flood Gun Height Positioning Screw Lower Column MCP Mounting Screws 4 Figure 5 Side
206. connector pins on the feedthrough port the wire harness between the feedthrough and the flood gun not the harness between the System Controller and the feedthrough as follows a Check between pins E F filament you should have continuity If not the E gun fila ment or internal harness is open b Check between pins U G and H Focus lens to Deflection plates They should be open Check between pins T and E or F Filament and Grid elements They should be open d Check E F G H T and U to ground They should all be open Part 9 E Gun Assembly Voltage Checks For the following steps use the control sliders in the popups for the focus and deflection ele ments Change the slider settings and watch how both the measured metered and system read back voltages vary Make sure that changes are smooth and linear over the entire slider range If there are large jumps or other erratic behavior a DAC ADC or power supply may be failing Please note the following hazard warning and take the safety precautions prescribed 9 1 WARNING Electrical potentials as high as 500 volts may be present at the J1801 connector when the flood gun power switch S3 on the System Controller is in the ON position When taking the voltage measurements described below be sure to switch the flood gun power switch OFF before connecting or disconnecting the voltmeter probes Check the positive deflection voltage control as follows Revision B 3 9
207. connectors 7 3 Remove the 150 001130 board from its slot place it on an extender card and put the extender in the slot 7 4 Switch on the System Controller Chassis See Service Procedure 01 01 7 5 Referring to Service Procedure 12 12 verify that all the proper supply voltages are present on the board 7 6 Switch off the System Controller Chassis and return the 150 001130 board to its slot 7 7 Repeat steps 7 2 through 7 6 for the 150 001090 board See Service Procedure 12 11 Flood Gun Interface Board 7 8 Reconnect all external connections to the 150 001130 and 150 001090 boards 7 9 Switch on the System Controller Chassis 7 10 Switch on the Computer and wait for the bootstrap to complete 7 11 When prompted log in as micrion Page 16 of 22 Revision B 3 97 05 04 10 Flood Gun Installation and Test Part 8 E Gun Resistance Checks 8 1 8 3 In the flood gun control popup a Click on the filament graphic to obtain the filament control popup and manually slide the filament control to any value and then back to ZERO b Setthe remaining sliders to the following values Grid 0 Focus 0 Cathode 0 Deflection 0 Screen 0 Remove the cable from connector J1801 on the E Gun feedthrough port Connector J1801 and the E Gun feedthrough port are located on the right side looking from the front of the system of the workchamber lid The harness number on the label should be 160 003422 Check the
208. crewdriver NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 3 task Specifically Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules Order of Deflection Procedures Scan Rotation Calibration Scan Gain Calibration Pan Gain Calibration Pan Rotation Ortho Calibration Revision B 3 97 Page 1 of 6 07 02 Scan Rotation Calibration Part 1 System Preparation 1 1 Locate the Analog Drive board in the SysCon section of the electronics module See Fig ure 1 for the location of the SysCon section and Figure 2 for the factory configuration of the SysCon boards Electronics Module Syscon Section Remove or Open Door Locate Analog Drive Board Part No 150 00108x 04 013 Figure 1 Electronics Module with SysCon Location 1 2 If you need to put the Analog Drive board on an extender board see Service Procedure 12 03 You will have to shut off power to the SysCon see Service Procedure 01 02 Figure 3 shows potentiometers R103 and R116 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do n
209. cturing Equipment 82 93 this procedure is a Type 3 task Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules Revision B 3 97 Page 1 of 6 05 02 10 Cleaning Column Elements NOTICE TRAINING IS REQUIRED FOR THIS PROCEDURE Do not attempt to perform this procedure unless you have been properly trained Only qualified personnel should perform this procedure Parti System Preparation Configure the Chemical Sources in Safe Mode Before performing the tasks described in this procedure you must put the chemical sources in a safe mode see Service Procedure 02 01 WARNING Do not proceed until the chemical sources are secure The chemical reservoirs in FIB systems contain hazard ous materials Labels affixed to the exterior of a chemical cabinet identify the chemical s contained inside If a chemical source is not in its safest state as described in Service Procedure 02 01 it is possible for a combination of component failures to release the chemical s through a cabinet s delivery line a roughing line a purging line or from a chemical reservoir into the workchamber Do not open the workchamber or disassemble any part of the vacuum pumping system or detach any gas line from any chemical cabinet until you are sure that every chemical source attached to the FIB system is in its safest
210. d Tools Required Fully operational stage and column under vacuum Order of Procedures In This Series Lateral Axis Calibration Scan Rotation Calibration Scan Gain Calibration Pan Gain Calibration Pan Rotation Ortho Calibration Locate Center of Rotation Part1 Finding the Center of Rotation The object is to bring the center of the stage under the ion beam column 1 1 Switch off Scan Rotation Enable on the control knob panel 1 2 Goto the current ROT CENTER 1 3 Click on the Stage icon to get the Stage Control popup 1 4 Select the ROT CENTER label 1 5 Click on Go To Label 1 6 Check the Coordinate Display to make sure that the stage is close to center within about 1000 microns of 100 000 in x and 100 000 in y Revision B 3 97 Page 1 of 2 07 06 Locate Center of Rotation Part 2 Re labeling the Center of Rotation With the stage positioned as described above in the Stage Control popup select the ROT CENTER label 2 1 Click on the Delete Label button 2 2 Click on the Add Label button Page 2 of 2 Revision B 3 97 ZA Micrion Service Procedure No 07 07 Service Procedure Title Mux Shift Calibration Applicable Systems 8000 Micrion 9800 FlipChip Frequency of Service Every two weeks see also When Needed below Introduction This is an eyeball calibration and should be done during milling You perform one sample repair note the coordinates for the screen location of the box and
211. d setup as needed Introduction Three vibration isolators dampen the vibrations traveling from the floor through the process mod ule to the stage Moving the system can cause the vibration isolators to become unbalanced as can the natural wear of the foam pads The following procedure is used in the factory for balanc ing the vibration isolators Materials and Tools Required These procedures require the use of the following tools e 3 8 9 5 mm spacer You can use the box end of a 5 8 box wrench as a 3 8 spacer Level 6 9 long WARNING Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 3 task Specifically Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules Revision B 3 97 Page 1 of 4 08 02 Vibration Isolator Balance As shown in Fig 1 three vibration isolators share the weight of the workchamber Left rear isolator Right rear isolator Fluids Regulator Panel Front Isolator Figure 1 Top View Process Module with Vibration Isolators A vibration isolator consists of the following e An air source e An air gauge and associated parts Figure 2 illustrates the air hose connections under the process module o right rear isolator
212. d the aperture to 100 um 4 3 Ifthe stage is not already at the Electron Faraday from the Stage Control window in Microsurgery select Electron Faraday and GoToLabel 4 4 Make a print of the screen and compare it with the print taken of the old nozzle before you replaced it see Service Procedure 10 04 step 1 2 Part 5 Fine Alignment in X Y and Z The X and Y adjustment knobs see Fig 1 are on the outside of the workchamber to the right of the loadlock as you face the machine Figure 1 Adjustment Knobs Y left and X right Revision B 3 97 Page 3 of 4 10 05 5 1 5 2 5 4 Funnel Alignment To view the funnel just inside the image screen reduce the voltage to 20 kV To center the funnel within the image screen turn the X and Y knobs as needed Any alignment in X will slightly change the alignment in Y and vice versa To adjust in the Z axis type the vacchat command dpu When the current Z position is shown in hexadecimal in microns and in mils type in a new hexadecimal number as needed As a rule there are 12 16 microns per least signifi cant hexadecimal position Once the Z position is set readjust the X and Y settings as needed then type the dpu command in vacchat to verify the Z setting Page 4 of 4 Revision B 3 97 ZA Micrion Service Procedure No 10 06 Service Procedure Title Verifying Depo Limit Switch Settings Applicable Systems Micrion 9800 FlipChip Frequency of Service
213. ders from physical damage Store in cool dry well ventilated area away from heavily trafficked areas and emergency exits Do not allow the temperature where cylinders are stored to exceed I3OF 54C Cylinders should be stored upright and firmly secured to prevent falling or being knocked over Full and empty cylinders should be segregated Use a first in first out inventory system to prevent full cylinders being stored for excessive periods of time Post No Smoking or Open Flames signs in the storage or use area There should be no sources of ignition in the storage or use area For additional recommendations consult Compressed Gas Association Pamphlets P 1 P 14 and G 4 NFPA 51 1984 OSHA 1910 Subparts H amp Q Special Packaging Recommendations Carbon steels and low alloy steels are acceptable for use at lower pressures For high pressure applications use stainless steels copper and its alloys nickel and its alloys brass bronze silicon alloys Monel Incone or beryllium lead and silver or lead and tin alloys are good gasketing materials Teflon and Kel F are the preferred nonmetal gaskets Special Note It should be recognized that the ignition temperature of metals and nonmetals in pure oxygen service decreases with increasing oxygen pressure Other Recommendations or Precautions Oxygen should not be used as a substitute for compressed air in pneumatic equipment since this type generally contains flamma
214. ding an Extender Board Applicable Systems All Frequency of Service As needed Introduction This procedure covers the installation of a Multibus extender board in the SysCon module Tools and Materials Required Multibus Extender Board NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 5 task Specifically Equipment is energized Measurements and adjustments require physical entry into the equipment Part 1 Extender Board Procedure 1 1 1 2 1 3 1 4 1 5 1 6 Follow the steps in Service Procedure 01 02 to power down On the printed circuit board you want to test disconnect the connectors remove the board Insert the Multibus extender board in the same slot Add the board to the extender board and reconnect the board connectors Restart the Syscon by turning on the main circuit breaker then turn on S1 S2 and S3 You have to re zero the stage once the system has come back up Revision B 3 97 Page 1 of 2 12 03 Adding an Extender Board Part 2 Be Alert for Sprung Pins Check the extender board for sprung pin s shown in Fig ure 1 Sprung pins must be re soldered Extender board WS Board under test Pin has sprung off the extender board and must be re soldered Page 2 of 2 Figure 1 Top View Extender Board with Sprung Pin Revision B 3 97 ZA Micrion Service Procedure No 12 04 Service
215. dings there could be sev eral causes of a higher pressure reading such as a contaminated workchamber If you have ruled out a contaminated HCIG excessive sample outgassing and a dirty workchamber as the source of the high pressure readings refer to Service procedure 04 02 Leak checking the Vacuum System Part 3 Checking Roughing Fore Pump Power Single Wet Pump Systems Note this test is to be performed at installation or as needed it need not be done on a regular basis Power Down the System Before performing the tasks described in this procedure you must power down the system see Service Procedure 01 02 Page 2 of 6 Revision B 3 97 Vacuum System Checks 04 01 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies NOTICE Per paragraph 11 1 of Safety Guidelines for Semicon ductor Manufacturing Equipment S2 93 this proce dure is a Type 5 task Specifically Equipment is energized Measurements and adjustments require physical entry into the equipment NOTE All automated programs no longer work in vacserver This includes autovent autopump down and calabrate functions This is a temporary situation and will be changed back in
216. discolored or opaque when it is not Revision B 3 97 Page 3 of 8 04 04 Roughing Pump Oil Change If the pump oil is amber in color but is below the center of the sight glass add syn thetic oil Fomblin through the pump fill plug Use Fomblin perfluoride poly ether Micrion part no 320 00104 Page 4 of 8 Intake Port Pump Motor y Exhaust Port Fill PI A s Nitrogen Purge Fitting ug Sight Glass Drain Plug 08 007 Figure 2 Mechanical Rough Pump Top and Front Views Revision B 3 97 Roughing Pump Oil Change 04 04 Figure 3 shows the dual pump vacuum system and the rough pump 8000 9800 MicroMill HT Vacuum System Schematic Dual Pump System irr I P 7 le mmol Tonle To Exhaust ote P ae EP n snis v Notes 1 Several seconds after the turbo pump is po wered down the valve opens automatically to vent the pump with nitrogen 2 CA clamps the spe ceumen Bolder ta the 3 The MicroMill HT is ids equ ippo v wi ith a GAE a nd Carbon cabinets 4 Some dual pump syst uipped with TC4 ai nd VTL Figure 3 Dual Pump Vacuum System Part 4 Changing Oil Chemical Series Mechanical Pumps CAUTION Wear chemical resistant nitrile gloves and splash resistant s
217. dit a parameter value proceed as follows 1 Scroll through the file until you see the name of the parameter whose value you want to change 2 Double click the parameter name with the left mouse button to highlight it If the Constant Name field in the popup is not empty click its Clear button to clear it 4 Move the mouse pointer into the Constant Name entry field and click the middle mouse but ton The selected parameter name then becomes copied to the field 5 Press the Enter key J on the keyboard to complete the entry this is required The Index field then automatically defaults to 0 and the current value for the parameter name and index 0 appears in the Value field 6 Click the left or right arrow button in the ndex field to select the index for the particular com bination of parameter name and index whose value you want to change raid Click the New Value field to select it Use the Clear button if the field is not already clear and then type the new value with the keyboard Press the Enter key on the keyboard to complete the entry When the following warning appears Warning FILE WILL BE CHANGED click OK or Cancel as appropriate To be certain that any changes you make take effect you must exit the application program Quit the X Window interface and then restart Click the Quit amp Exit button in the Micrion Process Watcher to exit the FIB application program and the X window system Af
218. duct has a high low flow sensor increasing the air flow may cause an alarm condition which triggers the 24V GAE interlock circuit disabling valve solenoid power and may also trigger an audible or visible alarm If this situation exists bypass jumper the flow sensor The interlock resets after you clear the alarm condition by using the push button adjacent to J1104 on the rear panel of the vacuum control unit or by using a remote push button provided by the customer Revision B 3 97 Page 5 of 12 11 01 3 2 3 3 3 4 3 5 3 6 3 7 Chlorine Cylinder Replacement Make sure that the process module vacuum pump exhaust connections are secure and that the pump exhaust system is operating correctly Make sure that the yellow green push button switch labeled Pneu Valve Shutdown on the GAE cabinet is illuminated dc power for controlling the pneumatic valves must be enabled CAUTION When the Pneu Valve Shutdown switch is on there is a 24 volt 5 ampere dc potential present on the exposed connectors on the bank of solenoid operated valves in the upper left hand cor ner of the GAE cabinet Do not touch these connectors See Fig 1 Although this presents a relatively minor electric shock hazard a short circuit caused by introducing a conductive metal object such as a tool or a finger ring could generate enough heat energy to cause burns before the power supply automatically switches off Do not wear finger rings or other j
219. dure you must put the chemical sources in a safe mode see Service Procedure 02 01 WARNING Do not proceed until the chemical sources are secure The chemical reservoirs in FIB systems contain hazard ous materials Labels affixed to the exterior of a chemical cabinet identify the chemical s contained inside If a chemical source is not in its safest state as described in Service Procedure 02 01 it is possible for a combination of component failures to release the chemical s through a cabinet s delivery line a roughing line a purging line or from a chemical reservoir into the workchamber Do not open the workchamber or disassemble any part of the vacuum pumping system or detach any gas line from any chemical cabinet until you are sure that every chemical source attached to the FIB system is in its safest state Power Down and Vent the System Before performing the tasks described in this procedure you must power down and vent the sys tem see Service Procedure 01 02 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Clean off the exterior of the system as well as the floor see Service Procedure 06 05 Open the Workchamber Re
220. dures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Open the Workchamber Remove the front panels to gain access to the workchamber door When the system is completely vented open the workchamber lid by removing the 1 2 socket head cap screws Page 2 of 12 Revision B 3 97 Laser Alignment 03 05 WEAR GLOVES DO NOT HANDLE SOLVENTS When working inside the chamber or when handling any components that will be exposed to vacuum wear gloves rated for Class 100 environments or better Due to disinte gration of such gloves by solvents do not handle solvents or parts that are wet with solvent CAUTION The laser incorporated in the FIB System is a Class 2 low power laser Eye damage can result if you look directly into the beam or into a specular mirror like reflection of it Do not stare into the beam or into a specular reflection of it Remove the Column You must remove the column in order to gain access to the reference mirror adjustment screwsl see service procedure 05 09 05 for a 5 nm column 05 09 10 for a 10 nm column or 05 09 25 for a 25 nm column 1 If you are reasonably certain that the positions of the reference mirrors have not been altered it may not be necessary to remove the column and adjust the reference mirrors in order to perform a successful alignment Revision B 3 97 Page 3 of 12 03 05 Laser Alignment Part 2 Stage M
221. e Deposits on the electron faraday aperture which should be cleaned about every month or whenever the gun is changed MCP E Gun aperture or deflectors Contamination in the gun Symptom Decreased Output E Gun aging Sometimes the gun life can be extended by increasing the grid voltage and readjusting the deflec tion Increase or decrease the grid voltage if the gun seems to be running out of electrons If you find a non standard setting that works well change Egun M to include this setting Revision B 3 97 Page 15 of 16 Flood Gun Installation and Test 05 04 25 Page 16 of 16 Revision B 3 97 ZA Micrion Service Procedure No 05 05 Service Procedure Title Aperture Mechanism Limit Switch Inspection Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service As needed Introduction This procedure describes how to inspect the travel limit switches in the aperture mechanism Micrion part no 105 006700 Materials Required This procedure requires the use of the following materials and equipment Standard clean field service engineer s tool set Clean room gloves Lint free wipes Laboratory grade isopropyl alcohol NOTICE To operate properly the aperture motor limit switches must be electrically connected otherwise the mechanism may be damaged Before powering down and venting the system clean the exterior as described in Service Proce dure 06 05 Revision B 3 97 Page
222. e J where filename is the name of a TIFF file Page 4 of 4 Revision B 3 97 Section 10 Deposition System 10 01 Lubricating the Dual Nozzle Lead Screws 10 02 Dual Nozzle Replacement and Coarse Alignment 10 03 Dual Nozzle Fine Alignment 10 04 Funnel Replacement e 10 05 Funnel Alignment 10 06 Verifying Depo Limit Switch Settings 10 07 Making Heater and Cooler Board Settings Revision B 3 97 Page 1 of 2 Page 2 of 2 Revision B 3 97 ZA Micrion Service Procedure No 10 01 Service Procedure Title Lubricating the Dual Nozzle Lead Screws Applicable Systems Micrion 9800 FlipChip Frequency of Service Semiannually Overview of the Lubrication Procedure In the dual nozzle assembly there are four lead screws that require lubrication every six months X lead screw Y lead screw Two Z lead screws one on each nozzle subassembly the left nozzle subassembly is Z1 and the right nozzle subassembly is Z2 Tools and Materials Required Vacchat program Clean room gloves Braycote white grease 803 Micrion p n 790 000006 Lint free wipe Kimwipe EX L or equivalent NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 3 task Specifically Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules Revi
223. e an adjustable 10x to 70x or a fixed 30x Silver paint to adhere the new apertures to the aperture blade Clean standard field service tool kit Laboratory grade isopropyl alcohol Lint free wipes Clean room gloves Aperture drive port blanking plate for column Clean room vacuum cleaner WARNING Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 3 task Specifically Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules Revision B 3 97 Page 1 of 8 05 07 Aperture Replacement Part 1 System Preparation Power Down and Vent the System Before powering down and venting the system clean the exterior as described in Service Proce dure 06 05 Then power down and vent the system see Service Procedure 01 02 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Part 2 Remove or Loosen the Column The aperture drive mechanism containing the beam limiting apertures is located on the column You might choose to remove the column to gain access to the
224. e extractor cap holder the ball detents are spring loaded ball plungers Lift the cap out of the holder see Figure 3 NOTICE Take care not to drop the extractor cap aperture shield or the aperture shield screws into the column The column would have to be removed and possibly disassembled to retrieve this hardware 3 2 Use a small slotted screwdriver to remove the two aperture shield screws see Figure 3 Remove the aperture shield Part 4 Inspect the Aperture Shield 4 1 If there are holes sputtered through the aperture shield other than the central hole for the ion beam it must be replaced Even if there are no obvious holes in the aperture shield inspect both sides of the shield for shallow depressions depressions indicate that the Tungsten has been eroded sputtered and that the aperture shield should be replaced When in doubt replace the aperture shield especially if it has been in an operational col umn for an extended period 6 to 12 months Column Housing Cw Extractor Cap 4 Aperture Shield Extractor Cap Screws 2 Ball Plunger s Pal se Figure 3 Cross Section of Extractor Cap and Aperture Shield Revision B 3 97 Page 5 of 6 05 15 05 Aperture Shield Replacement Part 5 Replace the Aperture Shield and the Extractor Cap 5 1 5 2 Fasten the replacement aperture shield to the bottom of the extractor cap holder with the two aperture shield screws see Figure 3 The center bores of the ap
225. e 8 of 10 Revision B 3 97 Remove Replace lon Beam Column 05 09 25 Part 4 Remove the Column Housing 4 1 4 2 4 3 4 4 Remove the four bolts securing the column housing to the chamber Note which holes you are removing the bolts from so that you may use the same holes when reinstalling the col umn not all the holes have bolts NOTICE DO NOT DAMAGE THE MCP WHEN REMOVING THE COLUMN To avoid damage to the MCP the column must be lifted straight out of the workchamber Ideally someone should guide the lower column and MCP out of the workchamber while the column is being lifted assuming that the workchamber lid is propped open slightly Remove the column housing by lifting it straight out of the chamber and place it upside down on a clean working surface Note The top surface of the column housing serves as a registration and a sealing surface and is susceptible to nicks and scratches Cover the open column port on the process module with the appropriate cover Using a high intensity light vacuum and clean the interior of the workchamber the ion pump tube and the loadlock Part 5 Column Installation 5 1 5 2 Move all cable assemblies and vacuum bellows clear of the column port on the process module allowing free access to the port CAUTION Use care when lifting and moving the column cap and col umn housing assemblies The column cap assembly weighs approximately 25 pounds 11 kg The column hous
226. e FIB system is in its safest state Power Down and Vent the System Before performing the tasks described in this procedure you must power down and vent the sys tem see Service Procedure 01 02 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Page 2 of 4 Revision B 3 97 Workchamber Inspection and Cleaning 06 03 Part 2 Vacuum and Clean the Workchamber 2 1 2 2 2 3 2 4 2 5 2 6 2 8 2 9 2 10 Remove the socket head cap screws and open the workchamber cover or door NOTICE WORKCHAMBER EQUIPMENT IS FRAGILE With the workchamber door open several pieces of delicate equipment are exposed Take great care not to disturb the electron flood gun and the microchan nel plate MCP which are located at or near the bot tom of the ion beam column Do not damage the gas delivery and deposition funnel system components located at the front of the workchamber v Using the application software move the stage to the Stage Zero position which is in the right rear corner of the workchamber as you face the front of the system NOTICE WEAR GLOVES DO NOT HANDLE SOLVENTS When working inside the chamber or when handli
227. e X window system with the Quit amp Exit button in the Process Watcher Restart the X window system and the application program To make sure the application software is reading the new value for Column pan cal index 1 type the following command at the shell prompt xinit Repeat Part 2 until the measured value Y is within 0 5 um of y1 y2 Figure 4 Examine Reference Marks with Measuring Tool Page 6 of 6 Revision B 3 97 ZA Micrion Service Procedure No 07 05 Service Procedure Title Pan Rotation Ortho Calibration Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service After Pan Gain Calibration Introduction Due to tolerances in the stage the chamber and the column there is always a slight inherent mis alignment of the stage vs the pan deflection axis The system software and column electronics compensate for this misalignment Pan rotation Ortho calibration aligns the ion beam Pan X Y deflection axis with the X Y stage travel axis Calibrating the Pan Rotation involves calculating and setting two variables in the usr micrion fib data Column M file Column square Aligns Pan x axis with stage x axis Column ortho Sets Pan y axis perpendicular to the Pan x axis The variable with index 0 calibrates the x axis while index 1 calibrates the y axis In setting xpan steps 1 6 and 1 8 and ypan steps 2 5 and 2 7 the int
228. e access to the port CAUTION Use care when lifting and moving the column cap and col umn housing assemblies The column cap assembly weighs approximately 25 pounds 11 kg The column housing weighs approximately 50 pounds 28 kg If nec essary to avoid personal injury secure the help of another person NOTICE DO NOT DAMAGE THE MCP DURING COLUMN INSTALLATION To avoid damage to the MCP the column must be lowered straight down into the workchamber port this is especially important if the flat rather than angled style of MCP is installed on the column Ideally someone should guide the lower column and MCP down into the workchamber port while the column is being lowered Page 12 of 14 Revision B 3 97 Remove Replace lon Beam Column 05 09 05 5 2 5 3 5 4 5 5 5 6 5 T 5 8 5 9 5 10 5 11 5 12 5 13 5 14 5 15 5 16 5 17 5 18 5 19 Place the column housing over the port on the workchamber in the correct orientation Gently lower the column housing straight down into the port Rotate the column housing as necessary for proper alignment of the bolt holes on the col umn housing and the process module Replace the four mounting bolts in their original holes on the mounting flange Check the O ring and adjacent surfaces on the top of the column housing and the bottom of the ion gun assembly for cleanliness Position the column cap assembly over the column and gently place it on the column
229. e are a photo of the funnel and its gas tubes and a photo of the two socket head screws that attach the funnel bracket to the mezzanine Tools and Materials This procedure requires the use of the following materials e Standard field service engineer s tool kit e 3 32 Allen wrench Needle nose pliers Clean room gloves NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment 82 93 this procedure is a Type 5 task Specifically Equipment is energized Measurements and adjustments require physical entry into the equipment Revision B 3 97 Page 1 of 4 10 04 Funnel Replacement Figure 1 Deposition Funnel Configure the Chemical Sources in Safe Mode Before performing the tasks described in this procedure you must put the chemical sources in a safe mode see Service Procedure 02 01 WARNING Do not proceed until the chemical sources are secure The chemical reservoirs in FIB systems contain hazard ous materials Labels affixed to the exterior of a chemical cabinet identify the chemical s contained inside If a chemical source is not in its safest state as described in Service Procedure 02 01 it is possible for a combination of component failures to release the chemical s through a cabinet s delivery line a roughing line a purging line or from a chemical reservoir into the workchamber Do not open the workchamber or disassemble any part of the vacuum pumping s
230. e electron faraday aperture which should be cleaned about every month or whenever the gun is changed MCP E Gun aperture or deflectors Contamination in the gun Symptom Decreased Output E Gun aging Sometimes the gun life can be extended by increasing the grid voltage and readjusting the deflec tion Increase or decrease the grid voltage if the gun seems to be running out of electrons If you find a non standard setting that works well change Egun M to include this setting Page 22 of 22 Revision B 3 97 ZA Micrion Service Procedure No 05 04 25 Service Procedure Title Flood Gun Removal and Replacement 25 nm Column Applicable Systems 8000 Micrion 9800 FlipChip Frequency of Service As needed Introduction The electron flood gun also called the E Gun provides charge neutralization of the sample The flood gun voltage is supplied by the flood gun supply board 150 001130 and is controlled by the flood gun interface board 150 001090 Materials and Tools Required Tie wrap a k a Spot tie Voltmeter with at least 10 Megohm input impedance Picoammeter Optional BNC Dual Banana Adapter Clip leads 6 foot coax cable E Gun Board Test Circuit e Schematic 163 00342X E Gun Harness Clean standard field service tool kit This procedure uses diagnostic methods published in Tech Note 002 Flood Gun Diagnostics NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufactu
231. e in a setpoint of 7 00 and then click on the Leak Valve toggle button so that it reads ON 6 12 Open valve V12 to begin admitting gas to the workchamber Observe the BT1 readback it should continually register 1 torr indicating that the gas flow is being properly regulated 6 13 Close valves V12 V13 and V17 6 14 Remove XeF from the common delivery lines using the following steps a Switch on the roughing pump and wait 30 seconds until TC1 reads lt 0 01 torr b Open valves V15 and V16 c Wait until BTI registers base pressure d Close V15 and V16 e Switch off the roughing pump 6 15 If chlorine and or bromine are installed open the manual valve between V 14 and the pres sure regulator for the chlorine and the V19 and the manual valve for the bromine 6 16 Restore GAE cabinet ventilation to the normal flow rate by adjusting the gate valve I 6 17 Remove the bypass for the shut off safety interlock switch on the GAE cabinet door 6 18 Close the GAE cabinet 4 If you jumpered the high low flow sensor be sure to remove the jumper after the correct flow is restored 5 Whether or not the GAE cabinet should be locked and who shall have custody of keys may be governed by site safety policy Page 10 of 10 Revision B 3 97 ZA Micrion Service Procedure No 11 03 Service Procedure Title Bromine Bry Cylinder Replacement Applicable Systems All Systems w Bro Frequency of Service As Needed Introduction
232. e measurements described below be sure to switch the flood gun power switch OFF before connecting or disconnecting the voltmeter probes 10 1 Calibrate the grid voltage readback as follows Switch the flood gun power switch S3 on the System Controller OFF b With J1801 unplugged from the feedthrough connector as in part 9 above connect the voltmeter between pins T Grid and P Ground c Switch the SysCon flood gun power switch S3 ON and note the voltmeter reading Revision B 3 97 Page 21 of 24 Flood Gun Installation and Test 05 04 05 d Use vi to adjust the values for Rlowvalue and Rhighvalue in the grid voltage section of the Registers Mfile by one volt For example if the readback reads high which is often the case with the grid voltage readback reduce the values to 99 0 and 99 respectively e Restart the Microsurgery program to cause the change to be recognized f Compare the readback with the voltmeter reading and repeat substeps d and e as nec essary until the readback is within 0 5V of the meter 10 2 Calibrate the cathode voltage readback as follows Switch the flood gun power switch S3 on the System Controller OFF b Connect the voltmeter between pins E or F Cathode Voltage and P Ground c Switch the flood gun power switch S3 on the System Controller ON and note the voltmeter reading d Use vi to adjust the values for Rlowvalue and Rhighvalue in the cathode voltage sec tion of the Regi
233. e metal frame of the chassis to discharge static or wear a grounding strap 2 Hold the board by the ejector tabs 3 If you must lay the board down lay it component side down NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 5 task Specifically Equipment is energized Measurements and adjustments require physical entry into the equipment Revision B 3 97 Page 1 of 4 12 06 Motor Drive Board Board number and revision level are stamped on the ejector 150 000890 JP1O TPINT JP2 O TPGND JF3 JF1 CHO Servo X aperture CH1 Servo Y aperture CH2 Servo Stage x limit sw CH3 Servo Stage y limit sw P4 Figure 1 893 Stage Aperture Drives Page 2 of 4 Revision B 3 97 Motor Drive Board 893 Stage Aperture Drives Before using an extender board power down according to Service Procedure 01 02 See the Tables below for the test points shown in Figure 1 WARNING Dangerously high voltages are present while the FIB system is powered up Do not rely only on the software Power Down function Disable the volt ages using both manual and automatic proce dures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Table 1 lists the on board fuses and the channels they control Table 1 Testing for stage drive and
234. e of this section Page 2 of 4 Revision B 3 97 Mic Stage Program 03 04 Part 4 Generating an Offset for Each Selected Point If the die patterned reticle is a 10 row by 10 column mask or wafer for the best calibration you need to test 10 x 10 100 separate points You can always test fewer points to get a general idea of the stage accuracy For each selected point do as follows 4 1 4 2 4 3 4 4 4 5 4 7 4 8 In the Die Grid subwindow click on the lower left corner of the reticle This is the origin of the test Each die cell origin is at the lower left corner of its die cell In the CurrentPoint subwindow the following data about the point is displayed Col Row The current point you have selected above X Y Location The theoretical stage address of current point You can edit the mic_stage_config file to correct any of these specifications In the lower part of the Mask Repair window click the button that raises the funnel In the CurrentPoint subwindow click the GoTo button The stage will move to the theo retical location of the current point In the lower part of the Mask Repair window click the button to lower the funnel In Mask Repair or Microsurgery image the current point after stage has moved into posi tion There may be a X Y offset between image real position of the current point and the screen center theoretical position of the current point Move stage until the current point i
235. e two ju commands in vacchat to move the nozzle jogs up to a position approximately 64 um above step 2 and a total of 364 um above the mask or wafer If you want the nozzles farther from the mask of wafer type the ju command which raises nozzles 32 um per command When the position is acceptable save your Z setting 4 5 Type the vacchat commmand that reports the old setting dpu 4 6 Select the nozzle you are working with 1 or 2 4 7 To save settings press the Enter key 4 8 Type the jr command to retract the nozzle The nozzle will be prevented from retracting if it is still in contact with step 2 Part 5 Verifying Deposition e Conduct a series of depositions at 1 2 nC um Ensure that the gas is not in depletion mode the dac dwell and refresh are within spec e Inspect the depositions for coverage and for 1000 um long deposition Revision B 3 97 Page 7 of 8 10 03 Dual Nozzle Fine Alignment Page 8 of 8 Revision B 3 97 ZA Micrion Service Procedure No 10 04 Service Procedure Title Funnel Replacement Applicable Systems 8000 Frequency of Service As Needed Overview of the Replacement Procedure Replacement of the funnel includes five main operations e Imaging the existing funnel e Powering down and venting putting chemicals in the safe mode e Removing the existing funnel Putting the new funnel in its place e Setting the temperatures on the heater board and the cooler board In this procedur
236. e variable with index 0 calibrates the x axis while index 1 calibrates the y axis Materials and Tools Required Fully operational stage and column under vacuum e Micrion Constants Editor or comparable text editor e Notebook Order of the Procedures Scan Rotation Calibration Scan Gain Calibration Pan Gain Calibration Pan Rotation Ortho Calibration Revision B 3 97 Page 1 of 6 07 04 Pan Gain Calibration Part 1 X Axis Pan Gain Calibration 1 1 With the power up turn off Scan Rotation Enable on the Knob Panel 1 2 Set the image mode to Electron Imaging is done without the flood gun for two reasons 1 charge neutralization does not work well on the silicon grid and 2 the electron flood causes staining on the grid 1 3 Locate one of the large boundary areas on the silicon grid shown in Figure 1 1 4 Using the 100 um aperture focus on the silicon grid under the following conditions 1 2 um field of view FOV On the Tasks pulldown menu Readback is on 1 5 Rotate the X Pan knob counterclockwise as far as possible and burn a reference mark From the coordinate readout on the screen record the current X position in your notebook as x1 As shown in Table 1 an example value for x1 is 180602 um 1 6 Rotate the X Pan knob clockwise as far as possible and burn a reference mark From the coordinate readout on the screen record the current X position in your notebook as x2 As shown in Table 1 an
237. ear a grounding strap 2 Hold the board by the ejector tabs 3 If you must lay the board down lay it component side down 2 2 Visually inspect the board for scorched parts If you see scorched or burned parts return the board to Micrion and order a replacement Revision B 3 97 Page 3 of 4 12 12 Flood Gun Supply Board Part 3 Use an Extender Board 3 1 If the parts appear to be unscorched place the board on a Multibus extender board Part 4 Check the 100V 250V and 250V Test Points 4 1 Before testing any of the following points be aware of the high voltage warning WARNING HIGH VOLTAGE Whenever the chassis main power switch CB1 is turned on the Flood Gun Supply generates high volt ages on the board Use extreme caution NOTICE SHORTING TEST POINTS IS EASY If you short any of these high voltages this board will be damaged Be extremely careful when handling this board especially versions that do not have an insulated back cover Check for 100V 4 2 Use the TPGND test point as chassis ground 4 3 Probe the 100V test point for the following see ejector tab for rev no REV C1 and earlier 100V between 95V and 105V REV C2 and later 115V between 112V and 118V Check for 250V 4 4 Use the TPGND test point as chassis ground 4 5 Probe the 250V test point for the following see ejector tab for rev no REV Cl and earlier 250V between 238V and 262V REV C2 and later 225V betw
238. ear the Column In Service Procedure 10 2 you checked that the nozzles do not touch the stage rails or the mirror Now in the second of the Z coarse adjustments you check that the nozzles do not touch the col umn actually the MCP on the column To align along the Z axis use the upper limit switches The lower limit switches are not accessible 2 1 Set acceleration to 30 kV 2 2 Set the field of view to 1350 um the resolution to 1024 and the aperture to 100 um 2 3 Make a print of the screen when the nozzle is fully extended over step 2 of the diagnostic block and compare it with the print taken of the old nozzle before you replaced it see Ser vice Procedure 10 02 step 2 3 Revision B 3 97 Page 3 of 8 10 03 Dual Nozzle Fine Alignment 2 1 From the Stage Control window select Step2 and Go To Label 2 2 In vacchat type a jx command to extend the nozzle 2 3 If vacchat sends you the IN CONTACT with surface message raise the upper limit switch as shown in Fig If vacchat sends you the IN CONTACT with surface mes sage raise the upper limit switch as shown in Figs 1 and 2 2 4 Repeat steps 2 2 and 2 3 X Home Limit Switch Y Home Z2 alignment Y alignment bracket Ce a bracket Z Home Z2 Home Y Plimis P X Home X Plim alignment bracket Figure 2 Location of Depo Limit Switches
239. ed connectors on the bank of solenoid operated valves in the upper left hand cor ner of the GAE cabinet Do not touch these connectors See Fig 1 Although this presents a relatively minor electric shock hazard a short circuit caused by introducing a conductive metal object such as a tool or a finger ring could generate enough heat energy to cause burns before the power supply automatically switches off Do not wear finger rings or other jewelry while working in the GAE cabinet Exercise care when using conductive metal tools 3 4 Purge the chlorine line before continuing see Service Procedure 11 01 3 5 Close the manual valve on all other chemical reservoirs installed in the GAE cabinet 3 6 Make sure that all valves V12 through V17 and V19 are closed To open or close any of the pneumatic valves V12 through V16 simply click on the valve s icon in the Gas Control Popup see 3 Valves V13 XeF reservoir V19 Br res ervoir and V14 Cl reservoir are interlocked only one can be open at a time To close valve V17 click on the valve icon to obtain the setpoint dialog box then click on the LeakValve toggle button so that it reads OFF see 3 3 7 Click on the RPI icon to start the roughing pump a Wait until TC1 reads lt 0 01 torr then open valves V15 and V16 b Wait for BT1 to read base pressure 0 001 torr c When BTI reads base pressure record the reading for future reference d Close the valve labeled Process Gas S
240. ed in this procedure you must put the chemical sources in a safe mode see Service Procedure 02 01 WARNING Do not proceed until the chemical sources are secure The chemical reservoirs in FIB systems contain hazard ous materials Labels affixed to the exterior of a chemical cabinet identify the chemical s contained inside If a chemical source is not in its safest state as described in Service Procedure 02 01 it is possible for a combination of component failures to release the chemical s through a cabinet s delivery line a roughing line a purging line or from a chemical reservoir into the workchamber Do not open the workchamber or disassemble any part of the vacuum pumping system or detach any gas line from any chemical cabinet until you are sure that every chemical source attached to the FIB system is in its safest state NOTICE CLEAN THE SURROUNDING AREA Before you vent the system clean the exterior of the process module and surrounding area The column is very sensitive to contamination Power Down and Vent the System Before performing the tasks described in this procedure you must power down and vent the sys tem see Service Procedure 01 02 Page 2 of 6 Revision B 3 97 Cleaning Column Elements 05 02 25 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both man
241. ee Figure 4 Revision B 3 97 Page 3 of 10 05 09 25 Remove Replace lon Beam Column MCP connector Lower Column 4 Flood Gun Figure 1 Interior View of Flood Gun and MCP 25 nm Column in 8000 System Page 4 of 10 Revision B 3 97 Remove Replace lon Beam Column 05 09 25 MCP connector Figure 2 Interior View of Flood Gun and MCP 25 nm Column in 9800 System Revision B 3 97 Page 5 of 10 05 09 25 Remove Replace lon Beam Column Lower Column Workchamber Flood Gun Height Lid Positioning Screw Flood Gun Lateral Positioning Screws 2 MCP connector Lower Column Flood Gun Height Positioning Screw Flood Gun Lateral Positioning Screws 2 MCP connector Flood Gun 9 n Figure 4 Flood Gun Lowered and MCP Disconnected Side View Page 6 of 10 Revision B 3 97 Remove Replace lon Beam Column 05 09 25 Aperture Drive Plate lon Pump Port Table 1 Column Connections Signal Name 1 High Voltage L1 Lens 1 2 High Voltage L2 Lens 2 3 High Voltage F2 Filament 4 High Voltage E Extractor 5 High Voltage S Suppressor 6 Low Voltage J1901 Bbaper octopoles 7 High Voltage F1 Filament 8 Low Voltage Blanking Signals Figure 5 Top View lon Beam Column with Power Connections Revision B 3 97 Page 7 of 10 05 09 25 Remove Replace lon Beam C
242. een xstage move 150000 2000 um 1 stop move 0 um 1 stop ystage move 150000 2000 um 1 stop move 0 um 1 stop Revision B 3 97 Page 3 of 4 03 01A Stage Travel Limit Switch Inspection Page 4 of 4 Revision B 3 97 ZA Micrion Service Procedure No 03 01B Service Procedure Title Adjusting the Stage Limit Switches Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service As necessary Introduction This procedure explains how to adjust or replace a limit switch that proved faulty during Service Procedure 03 01A These switches include e X and Y Materials Required These procedures require the use of the following materials and equipment Standard field service engineer s tool set Clean room gloves This procedure refers to Service Procedure 09 03 Using Vacchat Notice Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 3 task Specifically Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules Revision B 3 97 Page 1 of 4 03 01B Adjusting the Stage Limit Switches Part 1 System Preparation Configure the Chemical Sources in Safe Mode Before performing the tasks described in this procedure you must put the chemical sources in a safe mode see Service Pro
243. een 214V and 236V Check for 250V 4 6 Use the TPGND test point as chassis ground 4 7 Probe the 250V test point for between 238V and 262V all REVs Checking Test Points 4 8 TPXFOC Depending upon user input voltage swings from OV to 200V 4 9 TPXDFL Depending upon user input voltage swings from 100V to 97V 4 10 TPSCRN Depending upon user input voltage swings from 200V to 100V Page 4 of 4 Revision B 3 97
244. eep up Waste disposal method Follow federal state and local regulations Special Protection Information Respiratory Protection NIOSH MSHA approved mask with organic vapor cartridge for emergency use NIOSH MSHA approved self contained breathing apparatus Ventilation High efficiency particle respirator laboratory fume hood provide adequate local exhaust and general ventilation Protective gloves Yes Eye protection chemical safety goggles or face shield Other protective equipment none special Page 2 of 2 Revision B 3 97 Material Safety Data Sheet MSDS Oxygen Emergency contact Chemtrec 800 424 9300 This MSDS is provided for general information only For information about the manufacturer of a particular chemical contact the environmental health and safety coordinator at Micrion Corpora tion 508 531 6464 Substance Identification Substance OxygenChemical Family Oxidizer Trade names and synonyms NoneChemical Formula 05 DOT Hazard Class Nonflammable gasDOT Identification Number UN 1072 CAS Number 7782 44 7 Health Hazard Data Time Weighted Average Exposure Limit None established Oxygen is the vital element in the atmosphere in which we live and breathe approximately 21 molar of the atmosphere Symptoms Of Exposure Breathing high concentrations greater that 75 molar percent causes symptoms of hyperoxia which included cramps nausea dizziness hypothermia ambylopia respiratory di
245. efore performing the tasks described in this procedure you must put the chemical sources in a safe mode see Service Procedure 02 01 WARNING Do not proceed until the chemical sources are secure The chemical reservoirs in FIB systems contain hazard ous materials Labels affixed to the exterior of a chemical cabinet identify the chemical s contained inside If a chemical source is not in its safest state as described in Service Procedure 02 01 it is possible for a combination of component failures to release the chemical s through a cabinet s delivery line a roughing line a purging line or from a chemical reservoir into the workchamber Do not open the workchamber or disassemble any part of the vacuum pumping system or detach any gas line from any chemical cabinet until you are sure that every chemical source attached to the FIB system is in its safest state Power Down and Vent the System Before performing the tasks described in this procedure you must power down and vent the sys tem see Service Procedure 01 02 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Clean off the exterior of the system as well as the floor see Se
246. efully remove the suppressor cap Hold the suppres sor cap steady with thumb and forefinger while loosening the screws 5 2 Use a screwdriver and tweezers to loosen the two screws holding the source clamps see Figure 3 Axis Along Source Source Clamps and Screws 2 ea Detent on Outside Edge of Suppressor Cap Must Align with the Source Electrical Sockets 05 005 Figure 3 Alignment of Suppressor Cap and Source 5 3 Release the source clamps from the source by rotating them out to the side 5 4 Use tweezers to remove the ion source from the suppressor cap 5 5 After it is removed from the FIB system the spent source should be returned to Micrion if necessary for analysis otherwise it should be packaged for proper disposal according to local state and federal EPA regulations Page 6 of 12 Revision B 3 97 lon Source Change 05 10 Part6 Install a Pre Loaded Source Suppressor Assembly 6 1 6 2 6 4 CAUTION The FIB ion source is a coating of liquid gallium on a fine wire filament The tip of the wire filament is extremely sharp and if mishandled can puncture the skin and introduce gallium subcutaneously Place the pre loaded source suppressor assembly on the ion gun Align the suppressor cap with the suppressor holder so that the source electrical connector pins are correctly aligned with the sockets of the suppressor holder See Figure 3 Install the suppressor cap so that the elect
247. eger may be as low as 7 or as high as 10 Materials and Tools Required Fully operational stage and column under vacuum e Micrion Constants Editor or comparable text editor Order of the Procedures Scan Rotation Calibration Scan Gain Calibration Pan Gain Calibration Pan Rotation Ortho Calibration Locate Center of Rotation Revision B 3 97 Page 1 of 6 07 05 Pan Rotation Ortho Calibration Part 1 Pan Rotation Calibration Xpan 1 1 Make sure that the Scan Rotation Enable switch on the Knob Panel is not enabled 1 2 Set the Image mode to Electron 1 3 Focus the beam over the Silicon Grid using a 100 um aperture at the Depo working dis tance and 0 tilt 1 4 Open the adshell in an xterm window by typing adshell Set xpan and ypan equal to 0 Xpan and ypan set the lower octopole offset xpan 0 ypan 0 1 5 Locate one of the large border areas on the silicon grid similar to that shown in Fig 1 Make Reference Marks Here Figure 1 Image Area Large Intersection of Silicon Grid 1 6 Set xpan equal to 10 in adshell xpan 10 1 7 Start imaging and zoom in to a 1 um FOV Continue imaging for several seconds to cre ate a reference mark and then stop imaging 1 8 Set xpan equal to 10 in adshell xpan 10 If adshell message says Don t Understand try again 1 9 Start imaging to create a second reference mark that is offset by 10 um in x 1 10 After
248. einstalled in its original position for proper MCP alignment Remove the lower shield by loosening the three Phillips head screws see Figure 1 Remove 3 Phillips he ad screws to remove shield 2 shown e e Figure 1 Side and Bottom Views of Lower Shield with Mounting Screws Revision B 3 97 Page 3 of 6 05 02 10 Cleaning Column Elements WEAR GLOVES DO NOT HANDLE SOLVENTS When working inside the chamber or when handling any components that will be exposed to vacuum wear gloves rated for Class 100 environments or better Due to disinte gration of such gloves by solvents and the possibility of contaminating parts do not handle solvents or parts that are wet with solvent NOTICE LOWER COLUMN ELEMENTS ARE FRAGILE Handle the lower column and its elements with great care Any scratches will ruin the lower column Lens 2 elements Also any metal tracks left on ceramic surfaces cause serious problems with the column operation Part 3 Column Cleaning 3 1 Under high intensity light examine the column for contaminants NOTE The high intensity light must shine across the surface of interest at a shallow angle Otherwise you will illuminate everything evenly making particle detection diffi cult The exposed lower column Lens 2 will be upside down on the workbench Figure 2 shows the lower column elements 3 2 Use the lens brush cotton tipped applicators and nitrogen to gently clean off a
249. elect 1og main from the menu or type log main at the prompt in any xterm window In the log main window select Ion Source from the choices in the Device menu button to display information about the source Part 2 System Preparation Configure the Chemical Sources in Safe Mode Before performing the tasks described in this procedure you must put the chemical sources in a safe mode see Service Procedure 02 01 Page 2 of 12 Revision B 3 97 lon Source Change WARNING Do not proceed until the chemical sources are secure The chemical reservoirs in FIB systems contain hazard ous materials Labels affixed to the exterior of a chemical cabinet identify the chemical s contained inside If a chemical source is not in its safest state as described in Service Procedure 02 01 it is possible for a combination of component failures to release the chemical s through a cabinet s delivery line a roughing line a purging line or from the tungsten reservoir into the workchamber Do not open the workchamber or disassemble any part of the vacuum pumping system or detach any gas line from any chemical cabinet until you are sure that every chemical source attached to the FIB system is in its safest state Power Down and Vent the System 05 10 Before performing the tasks described in this procedure you must power down and vent the sys tem see Service Procedure 01 02 WARNING Dangerously high voltages are present in
250. em is in its safest state Revision B 3 97 Dual Nozzle Replacement 10 02 Power Down and Vent the System Before performing the tasks described in this procedure you must power down the high voltages and vent the system see Service Procedure 01 02 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Part 4 Cooling Off the Reservoir 4 1 On the left side of the outside of the workchamber disconnect circular connector J1402 4 2 Allow ten minutes for the reservoir to cool WEAR GLOVES DO NOT HANDLE SOLVENTS When working inside the chamber or when handling any components that will be exposed to vacuum wear gloves rated for Class 100 environments or better Due to disinte gration of such gloves by solvents do not handle solvents or parts that are wet with solvent Part 5 Removing a Reservoir Subassembly Removing a reservoir means removing the reservoir and the heat sink at the same time Once the reservoir heat sink combination is removed the reservoir can be separated and replaced 5 1 Once the system is completely vented remove the socket head cap screws and open the workchamber 5 2 From the main Microsurgery screen select
251. embly loosely to the rear wall of the cabinet with the two cylinder assembly mounting screws see figure 1 Do not tighten these screws yet h Make up the VCR coupling by hand adjusting the position of the cylinder assembly as necessary Snug the coupling finger tight i Holding the upper part of the coupling immobile with the 5 8 open end wrench tighten the VCR nut exactly 1 8 turn with the 3 4 open end wrench j Replace the bottle clamp and secure it with the two bottle clamp mounting screws k Tighten the cylinder assembly mounting screws to secure the assembly to the cabinet wall Do not open the manual valve on the cylinder assembly yet 3 20 Reconnect and secure the cylinder cooler electrical cable at the top rear corner of the cyl inder bay This initiates cooling of the new cylinder 3 21 Set the cylinder cooler to maintain the cylinder temperature at 5 below ambient tempera ture as follows a Start the vacchat program if ui is running you can select it from the menu that appears when you press the right hand mouse button while the screen pointer is in the background screen b With the screen pointer in the vacchat window enter the command sc1sp to query the controller for the setpoint the desired temperature difference between cylinder and ambient The response should be 5 degrees C If it is not adjust potentiometer R8 near the top of the cooler control board 150 1501 or 150 15 81 in the vacuum con
252. ent Note it is not necessary to open the workchamber to perform this procedure Alignment Screws 4 Lans only two adjacent screws bs Figure 2 Location of Alignment Screws for the Column Cap Assembly 2 1 Loosen only two adjacent alignment screws on the column cap ion gun assembly this is done so that the ion gun alignment is minimally affected see Figure 2 CAUTION Use care when lifting and moving the column cap assem bly The column cap assembly weighs approximately 25 pounds 11 kg If necessary to avoid personal injury secure the help of another person 2 2 Forthe best leverage in removing the column cap assembly stand behind the process module Lift the column cap assembly straight up off the column and gently place it top side up on a clean work surface Note The bottom surface of the column cap assembly serves as both a registration and an O ring surface and is susceptible to damage from nicks and scratches Page 4 of 6 Revision B 3 97 Aperture Shield Replacement 05 15 10 Part 3 Remove the Extractor Cap and the Aperture Shield 3 1 3 2 Rotate the extractor cap approximately 1 3 turn and pull it past the ball detents in the extractor cap holder the ball detents are spring loaded ball plungers Lift the cap out of the holder see Figure 3 NOTICE Take care not to drop the extractor cap aperture shield or the aperture shield screws into the column The column would h
253. ent 25 nm Column Applicable Systems 8000 Micrion 9800 FlipChip Frequency of Service As needed Introduction This procedure describes the removal of the microchannel plate MCP from the column of the FIB system and the installation of a replacement MCP Materials Required This procedure requires the use of the following materials Clean standard field service kit Lint free wipes Clean room gloves Laboratory grade isopropyl alcohol NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 5 task Specifically Equipment is energized and measurements and adjustments require physical entry into the equipment or equipment configuration will not allow the use of clamp on probes Revision B 3 97 Page 1 of 8 05 03 25 Remove nstall MCP Part1 System Preparation Configure the Chemical Sources in Safe Mode Before performing the tasks described in this procedure you must put the chemical sources in a safe mode see Service Procedure 02 01 WARNING Do not proceed until the chemical sources are secure The chemical reservoirs in FIB systems contain hazard ous materials Labels affixed to the exterior of a chemical cabinet identify the chemical s contained inside If a chemical source is not in its safest state as described in Service Procedure 02 01 it is possible for a combination of component failures to release the chemical
254. ent is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules Revision B 3 97 Page 1 of 6 05 15 10 Aperture Shield Replacement Parti System Preparation Configure the Chemical Sources in Safe Mode Before performing the tasks described in this procedure you must put the chemical sources in a safe mode see Service Procedure 02 01 WARNING Do not proceed until the chemical sources are secure The chemical reservoirs in FIB systems contain hazard ous materials Labels affixed to the exterior of a chemical cabinet identify the chemical s contained inside If a chemical source is not in its safest state as described in Service Procedure 02 01 it is possible for a combination of component failures to release the chemical s through a cabinet s delivery line a roughing line a purging line or from a chemical reservoir into the workchamber Do not open the workchamber or disassemble any part of the vacuum pumping system or detach any gas line from any chemical cabinet until you are sure that every chemical source attached to the FIB system is in its safest state Clean the exterior of the system as described in Service Procedure 06 05 Power Down and Vent the System Before performing the tasks described in this procedure you must power down and vent the sys tem see Service Procedure 01 02 WARNING
255. ents or parts that are wet with solvents 1 3 Inspect the sample holders one at a time for nicks or scratches in the nickel plating The nickel plating is between 0 2 mils 0 0002 and 0 5 mils 0 0005 thick Deep scratches or nicks that expose the underlying metal may allow outgassing that degrades the sample holder s vacuum characteristics If you find such defects and pumpdown times for the load sequence are noticeably longer than normal contact Micrion Product Support for advice NOTICE If users are contaminating the sample holders please bring it to their attention Part 2 Cleaning Procedure 2 1 Remove the gloves handle the sample holder with lint free wipes See Figure 1 2 2 Wipe the sample holder with a lint free wipe dipped in isopropyl alcohol Avoid getting cloth fibers caught on the corners of the sample holder When the entire sample holder has been wiped blow it dry with nitrogen Page 2 of 4 Revision B 3 97 Sample Holder Inspection amp Cleaning 06 01 Figure 1 Sample Holder 8000 Series 2 3 Thoroughly clean the top and bottom surfaces of the sample holder with isopropyl alcohol and blow these surfaces dry with nitrogen 2 4 Puton clean room gloves and examine the results of the cleaning If possible inspect the sample holder under ultraviolet light in a slightly darkened room and then repeat this inspection under high intensity white light The light sources il
256. eparate 1 44Mb diskette cd usr micrion fib data flopoff filename Repeat the flopoff command for each diskette 4 3 Atthis point the system should be operational If for some reason the software that was preloaded on the upgrade computer was an earlier revision than what you were running on the 1486 system contact Micrion Product Support Page 4 of 4 Revision B 3 97 ZA Micrion Service Procedure No 09 06 Service Procedure Title Configuring AIX for a Network Printer Applicable Systems All Frequency of Service As Needed Introduction This procedure explains how to configure the AIX operating system on the system computer to allow TIFF files to be sent to the optional Codonix network printer Use part 1 of this procedure if the system computer and the printer are connected through the cus tomer s Ethernet local area network LAN You will have to obtain the Internet Protocol IP address to be assigned to the printer from the site s network administrator Use part 2 of this procedure if the printer is connected directly to the system computer in effect creating a two host network In both cases it is assumed that the electrical connections have already been made This procedure consists of creating or modifying the following five files on the system computer usr micrion fib bin tiff print usr micrion ftp macro usr micrion netrc etc hosts etc hosts equiv You will also have to refer
257. er ON Sweep the filament slider slowly through its range Verify that the proper voltages are present and that the system readbacks track the voltmeter Disconnect the Flood Gun Board Test Circuit Revision B 3 97 Page 11 of 16 Flood Gun Installation and Test 05 04 25 9 4 1ohm 10 W Chassis pe Ground EGun Cable Pins Point 1 to Point 2 Filament Current I E R which calculates to what is on the slider Point 2 to Ground Cathode Voltage CATV CATC readback on the beam control screen should equal CATV 1 Mohm If no 10W resistor is available you can use a 1W resistor if current is brief Figure 7 Flood Gun Board Test Circuit Check the grid voltage control as follows a b Pe Switch the flood gun power switch S3 on the System Controller OFF Connect the voltmeter between pins T Grid and P Ground Switch the flood gun power switch S3 on the System Controller ON Sweep the grid slider slowly through its range and verify that the voltages are from 0 V to 100 V and that the system readbacks track the voltmeter If the readback differs from the voltmeter by more than 0 5 V the readback should be corrected as described in part 10 Check the cathode voltage control as follows a b poe Switch the flood gun power switch S3 on the System Controller OFF Connect the voltmeter to pins E or F Cathode Voltage and P Ground Switch the flood gun power switch S3 on the System Con
258. ergized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts Revision B 3 97 Page 1 of 6 04 06 Foreline Trap Element Replacement peak 240 volt amps and 20 Joules Part 1 System Preparation Configure the Chemical Sources in Safe Mode Before performing the tasks described in this procedure you must put the chemical sources in a safe mode see Service Procedure 02 01 WARNING Do not proceed until the chemical sources are secure The chemical reservoirs in FIB systems contain hazard ous materials Labels affixed to the exterior of a chemical cabinet identify the chemical s contained inside If a chemical source is not in its safest state as described in Service Procedure 02 01 it is possible for a combination of component failures to release the chemical s through a cabinet s delivery line a roughing line a purging line or from a chemical reservoir into the workchamber Do not open the workchamber or disassemble any part of the vacuum pumping system or detach any gas line from any chemical cabinet until you are sure that every chemical source attached to the FIB system is in its safest state Power Down the System Before performing the tasks described in this procedure you must power down the system see Part 2 of Service Procedure 01 02 WARNING Dangerously high voltages are present in the process module while the FIB system
259. erture shield and the aperture must be concentric centrally aligned otherwise the extractor cap will not seat properly Align the slots on the extractor cap with the detents on the extractor cap holder and press the extractor cap into place Part 6 Replace the Column Cap 6 2 6 3 6 4 CAUTION Use care when lifting and moving the column cap assem bly The column cap assembly weighs approximately 25 pounds 11 kg If necessary to avoid personal injury secure the help of another person Position the column cap assembly over the column and gently place it on the column housing Rotate the column cap as needed for proper alignment Tighten the two alignment screws that were initially loosened Making sure that the pin is centered connect the circular connector to the Deflection input After cleaning the cable ends with isoproyl and allowing them to dry connect all high voltage cables and signal cables to the column see Figure 1 NOTICE AVOID BENDING PINS Be careful when reconnecting the 3 pin and 20 pin connectors The pins are easily bent Close the workchamber and pump down the system see Service Procedure 04 03 Enable the high voltage power supplies Cure the column see Service Procedure 05 12 05 Heat the ion source see Service Procedure 05 11 Calibrate the deflection control system as described in Section 7 of this manual begin ning with Service Procedure 07 02 Page 6 of 6 Revision B 3 97
260. es Laboratory grade isopropyl alcohol NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 3 task Specifically Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules Revision B 3 97 Page 1 of 6 05 15 05 Aperture Shield Replacement Parti System Preparation Configure the Chemical Sources in Safe Mode Before performing the tasks described in this procedure you must put the chemical sources in a safe mode see Service Procedure 02 01 WARNING Do not proceed until the chemical sources are secure The chemical reservoirs in FIB systems contain hazard ous materials Labels affixed to the exterior of a chemical cabinet identify the chemical s contained inside If a chemical source is not in its safest state as described in Service Procedure 02 01 it is possible for a combination of component failures to release the chemical s through a cabinet s delivery line a roughing line a purging line or from a chemical reservoir into the workchamber Do not open the workchamber or disassemble any part of the vacuum pumping system or detach any gas line from any chemical cabinet until you are sure that every chemical source attached to the FIB system is in its safest state Clean the exterior of the system as described in
261. es as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Open the Workchamber Before opening the workchamber clean the exterior panels Remove the front panels to gain access to the workchamber door Clean the workchamber and the loadlock exterior as described in Service Procedure 06 05 Once the system is completely vented open the workchamber door by removing the 1 2 socket head cap screws Page 2 of 10 Revision B 3 97 Remove Replace lon Beam Column 05 09 25 Part 2 Lower the Flood Gun Remove the MCP Connector 2 1 After the system has vented open the workchamber Figures 1 2 and 3 show the location of the flood gun and the MCP Note that the position of the flood gun is different in a 9800 series system as shown in Figure 2 the flood gun is rotated 90 to accommodate the installation of an optical microscope WEAR GLOVES DO NOT HANDLE SOLVENTS When working inside the chamber or when handling any components that will be exposed to vacuum wear gloves rated for Class 100 environments or better Due to disinte gration of such gloves by solvents do not handle solvents or parts that are wet with solvent 2 2 Wearing clean room gloves loosen the flood gun height positioning screw see Figures 3 and 4 Slide the flood gun assembly down as far as it will go then tighten the flood gun height positioning screw 2 3 Remove the MCP electrical connector s
262. essor cap in the base Holding the sleeve of the source tool with the larger opening facing down place the sleeve over the suppressor cap Break the seals on the source box and place it upside down on a flat surface The top sec tion the smaller of the two sections should be on the bottom Carefully lift away the larger section The source is now exposed needle tip facing up Remove it with the small tweezers grasping it by the black disk body Lift it straight up DO NOT let the tip come in contact with anything any contact can permanently damage the source So that the source is held firmly when the cylinder is turned over adjust the nylon tipped retaining screws in the cylinder The pushrod must be able to release the source easily from the cylinder and the source must not fall out when the cylinder is inverted The source may be damaged if subjected to shock If necessary perform this adjustment with the old source Plug the source connector pins into the bottom of the source maintenance tool cylinder as shown in Figure 5 Seat the source properly in the cylinder by pushing down on the center of the source body with the tip of the tweezers Be careful of the fragile wire and tip when doing so mare Electrical Pins Tungsten Needle NN 05 006B Figure 5 Inserting the Source into the Source Maintenance Cylinder Place the cylinder in the sleeve with the source tip pointing downward as shown in F
263. et until you are sure that every chemi cal source attached to the FIB system is in its safest state Powering Down and Venting the System Before performing the tasks described in Part 3 of this procedure you must power down and vent the system see Service Procedure 01 02 Revision B 3 97 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Page 3 of 6 03 07 Clamp Actuator Inspection Opening the Workchamber Remove the front panels to gain access to the workchamber cover When the system is completely vented remove the socket head cap screws and lift the cover WEAR GLOVES DO NOT HANDLE SOLVENTS When working inside the chamber or when handling any components that will be exposed to vacuum wear gloves rated for Class 100 environments or better Due to disinte gration of such gloves by solvents do not handle solvents or parts that are wet with solvent Part 3 Checking the Height of the Plungers Long scratches on the bottom of the transport carrier indicate that the plungers are too high In this procedure you check that the plungers shown in Figure 1 are below the level of the white rails The cam position is a function of the stage
264. eter covers Revision B 3 97 Page 11 of 12 03 05 Laser Alignment Page 12 of 12 Revision B 3 97 ZA Micrion Service Procedure No 03 06 Service Procedure Title Stage Height and Carrier Flatness Measurement Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service Annually and as needed Introduction This procedure sets the registration height for the carrier sometimes referred to as a holder or a cassette and checks carrier flatness The checking and adjusting of the quartz flatness plate requires about 1 hour Differences Among the Three Models The MicroMill HT requires three spacers to bring the quartz flatness plate to the same height as the silicon grid on the 8000 and the 9800 the quartz flatness plate is already at the same height the silicon grid The illustrations in this procedure show the three spacers Materials Required This procedure requires the use of the following materials and equipment Clean room gloves Allen wrenches 3 8 5 64 and 1 16 Quartz flatness plate 180 00540 Three 0 391 spacers MicroMill HT only Height transfer gauge Starrett 232 or equivalent Height transfer gauge adapter stand 180 00430 e Dial indicator resolution to 0 0001 2 5 um or better 3 8 box wrench to drive X axis lead screw Locktite 222 NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 3
265. etpoint shisp Revision B 3 97 Page 1 of 6 10 07 Heater and Cooler Board Settings 150 001580 Z xx 3 16 2UILI5 1ee4 R8 R100 DS1 DS2 DS3 4 M CRION OQO TP1 TP2 I a R76 lo 1 6 Figure 1 First Heater Board 2 1583 Rev C With the heater harness plugged into the reservoir type the following vacchat commands and record the results shimt This gives the valve temperature which can also be seen at TP1 50 mV C DS1 on the heater board should NOT be lighted shirt This gives the reservoir temperature which can also be seen at TP2 50 mV C DS2 on the heater board should NOT be lighted shint This gives the nozzle temperature which can also be seen at TPN 50 mV C DS3 on the heater board should NOT be lighted Open the reservoir valve for five minutes opvr2 To verify that power is going to the heater valve and that the valve is letting air into the reservoir record the increased valve temperature shimt Pump down the chamber as described in Service Procedure 04 02 Page 2 of 6 Revision B 3 97 Heater and Cooler Board Settings 10 07 Part 2 Checking Temperatures under Vacuum With the chamber under vacuum proceed as follows 2 1 2 2 2 3 2 4 2 5 2 6 2 T 2 8 2 9 Record the valve temperature with the following command shlmt To ve
266. ewelry while working in the GAE cabinet Exercise care when using conductive metal tools At the top of the GAE cabinet there is a valve shutoff tool inserted into the hole labeled Cylinder Shutoff Close the cylinder valve on the old cylinder by turning the valve shut off tool fully clockwise see Fig 1 Be sure that the valve is firmly closed If you use the tool provided there is no danger of exerting too much torque After closing the valve withdraw the valve tool upward the rubber gasket should retain it so as to be well clear of the cylinder Close the manual valves on all other chemical reservoirs installed in the GAE cabinet Make sure that valves V12 through V17 are closed To open or close any of the pneumatic valves V12 through V16 simply click on the valve s icon in the Gas Control Popup see Fig 2 The icon s color and appearance change to show the new state Valves V13 XeF reservoir V19 Br reservoir and V14 Cl reservoir are interlocked such that only one can be open at a time Close V17 by clicking on its valve icon to display the setpoint dialog box then click on the LeakValve toggle button so that it reads OFF see Fig 2 Click on the RPI icon in the Gas Control Popup to start the roughing pump a Wait until TC1 shows lt 0 01 torr then open V15 and wait for BT1 to read base pres sure 0 001 T b When BTI reads base pressure record the reading for future reference c Close V15 and close
267. example value for x2 is 180498 um Silicon Grid o x displayed delta e uw a Reference Marks a gt x1 x2 Figure 1 Image Area for X Axis Reference Marks Table 1 Examples of values of X Displayed Delta and X Measured Variables Example Values How calculated x1 180602 um Pan knob counterclockwise x2 180498 um Pan knob clockwise x displayed delta 104 um 180602 180498 104 Xm 100 um Measured distance x1 to x2 Page 2 of 6 Revision B 3 97 Pan Gain Calibration 07 04 1 7 The difference between x1 and x2 is x displayed delta i e the difference between the displayed coordinates for x1 and x2 1 8 Zoom out to a FOV adequate to see both reference marks 1 9 Using the Measure Tool measure the distance between the reference marks as shown in Figure 2 Refer to this value as X This is the real distance from x1 to x2 In the example in Table 1 X is 100 jum Figure 2 Measure Distance with Measuring Tool 1 10 To make x displayed delta as close as possible to the measured value of y calculate a new value for Column pan cal index 0 the x axis variable as follows X xColumn pan cal index 0 new value xstage delta For example 100 E x Column_pan_cal index 0 new value Given a column pan cal value of 30 then at x 30 28 84 104 Revisio
268. f image wobble then set the new coordinates in memory Select Settings in the Aperture Control popup to display the Aperture Settings Popup b Note the original x and y settings displayed in the popup versus the new settings shown in the aperture positioning screen Make note of the amount of offset in each direction x and y because it is likely that the offset will carry through for each of the remaining apertures c Click the Save button next to the coordinates on the Position line shown in Figure 4 0 00 0 00 Save 3538 Save 28952 ave 28952 Save 0 0 ufi Save 0 00 0 01 Save aprtdet1 xwd Figure 4 Aperture Setting Popup 2 8 Click on the ion source schematic symbol to display the Ion Source Popup Turn on L Wobble Look for up down or side to side movement of the grid intersection For 10 nm and 25 nm columns the wobble function varies the L1 voltage by 500 V NOTE The wobble function causes the image to go in and out of focus however any side to side or up and down motion indicates that the beam is not passing through the cen ter of L1 Eliminate the wobble in the image using the column adjustment screws 2 9 Repeat steps 2 7 and 2 8 as many times as necessary to eliminate all wobble in the image 3 MicroMill HT systems do not have the wobble function you must turn the lens 2 knob on the knob panel back and forth to go in and out of focus Revision B 3 97 Page 5
269. f the readback reads high which is often the case with the grid voltage readback reduce the values to 99 0 and 99 respectively e Restart the Microsurgery program to cause the change to be recognized f Compare the readback with the voltmeter reading and repeat substeps d and e as nec essary until the readback is within 0 5V of the meter 10 2 Calibrate the cathode voltage readback as follows Switch the flood gun power switch S3 on the System Controller OFF b Connect the voltmeter between pins E or F Cathode Voltage and P Ground c Switch the flood gun power switch S3 on the System Controller ON and note the voltmeter reading d Use vi to adjust the values for Rlowvalue and Rhighvalue in the cathode voltage sec tion of the Registers M file by one volt For example if the readback reads low which is often the case with the cathode readback increase the values to 2101 0 and 101 respectively e Restart the Microsurgery program to cause the change to be recognized f Compare the readback with the voltmeter reading and repeat substeps d and e as nec essary until the readback is within 0 5V of the meter Part 11 Problem Diagnosis General The following section may help with diagnosing some of the more common flood gun problems Listed below are typical operating parameters Cathode V 85 Grid V 83 Deflection V 1 to 5 5 would be worst case Filament I 1 3 to 1 6 A depending on gun type age
270. fficult administer oxygen get medical help Reactivity Data Stability Stable in storage below 90 F Polymerization may occur if heated above 150 F Conditions to avoid Avoid exposure to heat spark flames and incompatible materials Incompatible materials Reacts readily with oxidizing agents peroxides strong acids aluminum chloride catalysts for vinyl polymers Hazardous decomposition products Toxic gases and vapors given off when partially oxidized Hazardous Polymerization May polymerize if heated above 150 F or exposed to metal salts peroxides or strong acids Polymerization not considered hazardous in this application due to small quantity involved Spill or Leak Procedures If material is released or spilled Wearing full protective clothing and respiratory protection eliminate all sources of ignition Cover spill with dry sand or dry vermiculite mix well and carefully transfer to a well marked container Close container tightly Submit or retain for disposal Waste disposal method Follow federal state and local regulations Special Protection Information Respiratory Protection NIOSH MSHA approved mask with organic vapor cartridge for emergency use NIOSH MSHA approved self contained breathing apparatus Ventilation Provide adequate local exhaust and general ventilation to meet the 50 ppm TLV requirements Protective gloves Impervious rubber Eye protection chemical safety goggles or face shield Ot
271. fficulties bradycardia fainting spells and convulsions capable of leading to death For additional informa tion on hyperoxia see Compressed Gas Association s Pamphlet P 14 Toxicological Properties The property is that of hyperoxia which leads to pneumonia Concentrations between 25 and 75 molar percent present a risk of inflammation of organic matter in the body First aid procedures PROMPT MEDICAL ATTENTION IS MANDATORY IN ALL CASES OF OVEREXPOSURE TO OXYGEN RESCUE PERSONNEL SHOULD BE COGNIZANT OF FIRE HAZARD ASSOCIATED WITH OXYGEN RICH ATMOSPHERES Conscious persons should be assisted to an uncontaminated area and breathe fresh air They should be kept warm and quiet The physician should be informed that the victim is experiencing has experienced hyperoxia Unconscious persons should be moved to an uncontaminated area and given assisted respiration when breathing has been restored treatment should be as above Continued treatment should be symptomatic and supportive Revision B 3 97 Page 1 of 4 Physical Data Boiling Point 297 3 F 182 90 C Liquid Density Boiling Point 71 23 Ib ft 1141 kg m Vapor Pressure 700F 21 10C Above the critical temperature of 181 10F 118 40C Specific Gravity 700F 1 atm air 1 1 11 Solubility in Water Slightly soluble Freezing Point 361 80F 218 80C Appearance and Odor Colorless odorless gas Fire Explosion Hazards Data Flash Point Method Used
272. free cloth Reach into the trap and remove the oily copper mesh element Place the element in a plastic bag immediately Do not contaminate any other surfaces with the oily residue Insert the new element Micrion part no 300 000036 into the trap Inspect the cover to make sure the gasket and mating surface are clean and properly seated Replace the trap cover and close the clamp that secures it Inspect the gasket and mating surface at the KF clamp on the bellows assembly for nicks and scratches Reconnect the bellows assembly to the cover and secure the KF clamp 4 4 After all the vacuum lines are reconnected make sure that there are no leaks and return the system to its normal state Page 4 of 6 Revision B 3 97 Foreline Trap Element Replacement 04 06 To the Load Lock KF Clamps Trap Cover Clamp and Latch Ea To the Rough Pump 08 009 Figure 2 The Foreline Trap Revision B 3 97 Page 5 of 6 04 06 Foreline Trap Element Replacement Page 6 of 6 Revision B 3 97 ZA Micrion Service Procedure No 04 07A Service Procedure Title EPROM Upgrade and Thermocouple Calibration Applicable Systems All Frequency of Service As needed Introduction This procedure concerns the swapping of EPROMs on the VacCon Computer board and the set ting of thermocouple defaults in the Vacuum M file Also included are details on preparing for the thermocouple calibration Tools and Materi
273. g and Cure Time Column Condition Est Time Column has been newly installed 2 hrs Chamber has been vented 2 hrs High voltage has been off for 12 hours or more 1 2 hr in which case this procedure need be done only once trodes slowly so as to induce relatively minor high voltage breakdowns sparks in a manner in which they can be controlled Thus you increase a potential gradually until sparking just begins to occur whereupon you briefly stop and wait for the sparking to subside If the sparking does not subside quickly you must back off the potential and try again Revision B 3 97 Page 1 of 8 05 12 05 Column and Lens Curing The three indicators of sparking are e Very short duration snowy or white streaksin the SIM image with the imaging conditions set up as described in Part 1 Short to medium duration snowy or white streaks or banding on a mostly snowy background success depends upon technique and skill e Total background snow with occasional streaks that is linear with lens voltage usually there is little reaction as sharp pressure bursts from the ion pump current in this mode if this condi tion exists STOP IMMEDIATELY and consult a column guru i e one who is certified by the Micrion Optics Dept Pressure bursts momentary rises in gas pressure which result in corresponding bursts of ion pump current may accompany the sparking These pressure bursts determine the status When the
274. ge from 0 V to 20 kV while monitoring the Extractor voltage readback The Extractor voltage should be less than 200V If the Extractor voltage is greater than 200V clean the column as described in Service Procedure 05 02 Slowly bring the Suppressor voltage down to 0 V Slowly step the Accelerator voltage down from 50 kV to 0 V in 5 KV steps In the hvshell type the command that disables high voltage hvenbl 0 While monitoring the column behavior slowly increase the lens 2 voltage until you observe noise then proceed based on the type of noise as described in the Introduction under three indicators of sparking Slowly bring the lens 1 voltage back down to 0 V If sparking occurs at about 3 kV wait for 10 seconds and then continue Page 4 of 8 Revision B 3 97 Column and Lens Curing 05 12 05 Part 3 Curing Lens 2 3 1 Click on the Lens 2 schematic symbol in the Beam Control popup screen to display the slider voltage control for Lens 2 3 2 Set L2 to 0 V then enable the L2 power Supply 3 3 Using the slider control gradually raise the L2 voltage towards 35 kV 3 4 At the first sign of noise or pressure bursts in the ion pump usually 25 kV to 30 kV a Increase L2 voltage by 3 kV above the point where the noise began b Quickly decrease L2 by at least 2 kV the noise should stop It is important that the noise does not continue when you decrease the voltage level decrease the voltage until the noise stops Repeat t
275. gnment S P 05 13 Configuring AIX for a Network Printer S P 09 06 Deflection Calibration S P 07 xx Deposition Subassembly Removal and Replacement S P 10 02 Flood Gun Installation and Test S P 05 04 GAE Cylinder Replacement S P 11 xx Gallium Source Heating S P 05 11 Laser Alignment S P 03 05 MCP Removal and Replacement S P 05 03 Power Up S P 01 01 Power Down Vent and Reset S P 01 02 Pump Down S P 04 03 Reference Curve Calibration 07 08 Removal Installation of the lon Beam Column S P 05 09 Securing Chemical Sources in the Safe Mode S P 02 01 Source Change S P 05 10 SysCon Board Replacement S P 12 xx Thermocouple Calibration S P 04 07 Upgrading to RS6000 Computer S P 09 05 Using the Micrion Constants Editor S P 09 04 Vacuum Leak Check of Process Module S P 04 02 Vibration Isolator Balance S P 08 02 Page viii of viii Revision B 3 97 Section 1 Power Up Down 01 01 Power Up 01 02 Power Down Vent and Reset Revision B 3 97 Page 1 of 2 Page 2 of 2 Revision B 3 97 ZA Micrion Service Procedure No 01 01 Service Procedure Title Power Up Applicable Systems All Frequency of Service As needed Introduction This procedure begins with the power connections for the system and its subsystems at installa tion most field maintenance work begins with Part 2 or Part 3 Tools and Materials Required Circuit tester Part 1 Power Cords 1 1 Thi
276. gure 8 Top View lon Beam Column with Power Connections Revision B 3 97 Remove Replace lon Beam Column 05 09 05 Part 3 Remove the Column Cap lon Gun 3 1 Disconnect the ion pump vacuum bellows from the column 3 2 To minimize contamination cover the input port of the ion pump with clean aluminum foil 3 3 Cover the ion pump port on the column with clean aluminum foil Double check to see that the high voltage power supply is off then remove all high and low volt age cables see Figure 8 Alignment Screws 4 Lans only two adjacent screws Figure 9 Location of Alignment Screws for the Column Cap Assembly 3 4 Loosen only two adjacent alignment screws on the column cap ion gun assembly this is done so that the ion gun alignment is minimally affected see Figure 9 CAUTION Use care when lifting and moving the column cap and col umn housing assemblies The column cap assembly weighs approximately 25 pounds 11 kg The column housing weighs approximately 50 pounds 28 kg If nec essary to avoid personal injury secure the help of another person 3 5 Forthe best leverage in removing the column cap assembly stand behind the process module Lift the column cap assembly straight up off the column and gently place it top side up on a clean work surface Immediately cover the exposed column with a clean plastic bag Note The bottom surface of the column cap assembly serves as both
277. h this procedure If the application software is version 1 2 or later go on to the next section Part 2 Pan Ortho Calibration Ypan 2 1 2 2 2 3 Set the Image mode to Electron Focus the beam over the Silicon Grid using a 100 um aperture at the Depo working dis tance and O tilt Locate one of the large boundary areas on the grid similar to Fig 3 Revision B 3 97 Page 3 of 6 07 05 2 4 2 T 2 8 2 9 2 10 Pan Rotation Ortho Calibration Silicon Grid p EN E pal Make Reference Marks Here Figure 3 Image area for Y Axis Reference Mark Open the adshell in an xterm window by typing adshell Set xpan and ypan equal to 0 Xpan and ypan set the lower octopole offset xpan 0 ypan O0 In adshell set ypan equal to 10 ypan 10 Start imaging and zoom in to a 1 um FOV Continue imaging for several seconds to cre ate a reference mark and then stop imaging Set ypan equal to 10 ypan 10 Make a second 1 um reference mark on the Si grid offset by 25 um in the y pan axis Zoom out to a FOV adequate to image the two reference marks They should look similar to the image in Fig 4 with offset angle p rho in the y pan axis Use the Measure Tool to measure angle p from bottom to top between the two reference marks as in Fig 4 Record the value for p in your notebook Open the fib data Column M file Read the current value for the Column ortho and reco
278. hange Oil Every 6 Months Introduction Two types of foreline roughing pump systems are installed on FIB systems e A single foreline roughing pump system that does not require periodic maintenance A dual pump system with separate foreline and roughing pumps The roughing pump in this system a Varian chemical series mechanical vacuum pump Micrion part no 310 040 requires an inspection every week and an oil change every 6 months Materials Required This procedure requires the use of the following materials e Standard field service engineer s tool kit Flashlight Lint free wipes Nitrile rubber gloves chemical resistant Splash resistant safety goggles Container for waste oil funnel and sealable vessel for disposal liter of Fomblin perfluoride polyether Micrion part no 320 00104 for chemical series mechanical pumps only Revision B 3 97 Page 1 of 8 04 04 Roughing Pump Oil Change Part 1 System Preparation Configure the Chemical Sources in Safe Mode Before performing the tasks described in this procedure you must put the chemical sources in a safe mode see Service Procedure 02 01 WARNING Do not proceed until the chemical sources are secure The chemical reservoirs in FIB systems contain hazard ous materials Labels affixed to the exterior of a chemical cabinet identify the chemical s contained inside If a chemical source is not in its safest state as described in Serv
279. hanged back in the next release of software Power Down the System Before performing the tasks described in this procedure you must power down the system see Service Procedure 01 02 4 1 In an xterm window start the vacserver program by typing vacserver 4 2 Turn off the turbo pump with the command hpn 4 3 Turn off the roughing and fore pumps with the commands rpn fpn 4 4 Unplug the roughing pump from its outlet in the power strip in the electronics module Plug the circuit tester into the outlet the circuit tester is yellow slightly larger than a stan dard AC plug and has indicator lights on the end opposite its AC plug 4 5 Turn on the roughing pump with the vacserver command rpy The two yellow lights on the circuit tester should turn on 4 6 Turn off the roughing pump with the vacserver command rpn The two yellow lights on the circuit tester should turn off 4 7 Unplug the circuit tester from the roughing pump outlet in the electronics module power strip and plug the roughing pump back into the power strip 4 8 Unplug the fore pump from its outlet in the power strip in the electronics module Plug the circuit tester into the outlet the circuit tester is yellow slightly larger than a standard AC plug and has indicator lights on the end opposite its AC plug 4 9 Turn on the fore pump with the vacserver command fpy The two yellow lights on the circuit tester should turn on Page 4 of 6 Revision
280. hat the dial indicator will make contact with the area of the x axis stage mirror below the scribe line See Figure 2 NOTICE KEEP THE DIAL INDICATOR BELOW THE SCRIBE LINE The area of the stage mirror above the scribe line must not be scratched or damaged in any way Avoid contacting this area keep the dial indicator below the scribe line 2 4 Carefully move the dial indicator against the x axis stage mirror until its dial begins to move Zero the dial indicator by moving it so that its dial is aligned with one of the divi sions lines on the dial indicator s gauge 2 5 Move the stage back and forth in the y direction using the motorshell program or by turn ing the end of the y axis drive motor shaft while observing the dial indicator s gauge The dial indicator reading should not vary by more than 0 00005 1 28 um over the entire length at the level of the scribe line of the x axis stage mirror 2 6 Ifthe dial indicator reading varies by more than 0 00005 use the stage mirror adjustment screws shown in Figure 2 to adjust the position of the x axis stage mirror Begin with minimal rotation less than one turn of the stage mirror adjustment screws even a small adjustment may result in a significant change in stage mirror alignment Repeat step 2 5 Repeat the x axis stage adjustment until the dial indicator reading is within specification 2 7 Repeat the alignment procedure for the y axis stage mirror Page 4 of 12 Re
281. have switched off the applicable power supplies Part 2 Remove the Column Cap lon Gun Double check to see that the high voltage power supply is off then remove all high and low volt age cables see Figure 1 Page 2 of 6 Revision B 3 97 Aperture Shield Replacement 05 15 25 Aperture Drive Plate lon Pump Port Table 1 Column Connections Signal Name 1 High Voltage L1 Lens 1 2 High Voltage L2 Lens 2 3 High Voltage F2 Filament 4 High Voltage E Extractor 5 High Voltage S Suppressor 6 Low Voltage J1901 Bbaper octopoles 7 High Voltage F1 Filament 8 Low Voltage Blanking Signals Figure 1 Top View lon Beam Column with Power Connections Revision B 3 97 Page 3 of 6 05 15 25 Aperture Shield Replacement WEAR GLOVES DO NOT HANDLE SOLVENTS When working inside the chamber or when handling any components that will be exposed to vacuum wear gloves rated for Class 100 environments or better Due to disinte gration of such gloves by solvents do not handle solvents or parts that are wet with solvent Note it is not necessary to open the workchamber to perform this procedure Alignment Screws 4 Lans only two adjacent screws bs Figure 2 Location of Alignment Screws for the Column Cap Assembly 2 1 Loosen only two adjacent alignment screws on
282. hazard ous materials Labels affixed to the exterior of a chemical cabinet identify the chemical s contained inside If a chemical source is not in its safest state as described in Service Procedure 02 01 it is possible for a combination of component failures to release the chemical s through a cabinet s delivery line a roughing line a purging line or from a chemical reservoir into the workchamber Do not open the workchamber or disassemble any part of the vacuum pumping system or detach any gas line from any chemical cabinet until you are sure that every chemical source attached to the FIB system is in its safest state NOTICE CLEAN THE SURROUNDING AREA Before you vent the system clean the exterior of the process module and surrounding area The column is very sensitive to contamination Power Down and Vent the System Before performing the tasks described in this procedure you must power down and vent the sys tem see Service Procedure 01 02 Page 2 of 6 Revision B 3 97 Cleaning Column Elements 05 02 05 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Part 2 Remove the Column 2 1 Remove the column as described in Parts
283. he Knob Panel Interface the Stage Aperture Drive boards the Flood Gun Interface and Flood Gun Supply boards the Frame Processor board and the Bit3 Interface board The SysCon power supplies SysCon circuit breakers and SysCon switches are described in Ser vice Procedure 12 02 If you need a MultiBus Extender Board see Service Procedure 12 03 Tools and Materials Required Oscilloscope or Voltmeter Trademarks e Univision is a registered trademark of Univision Technologies Inc Returning Faulty Boards to Micrion To return faulty boards or other defective hardware except for consumables to Micrion obtain a Return Material Authorization RMA by calling or faxing Micrion Customer Support Logistics Voice 508 531 6464 or Fax 508 531 5481 An RMA will be issued according to your current system status and contract If applicable you may request a Repair Purchase Order at this time Revision B 3 97 Page 1 of 6 12 01 SysCon Overview ELECTROSTATIC DISCHARGE Printed circuit boards are sensitive to electrostatic discharge Handle boards as follows 1 Touch your hand to the chassis s metal frame to discharge static or wear a static grounding strap 2 Hold the board by the ejector tabs 3 If you must lay the board down lay it component side down Table 1 is an introduction to the SysCon boards Figure 1 shows the factory configuration of the boards in the SysCon module Table 1 SysCon Boards Numbers Names and
284. he counterbore to ensure proper alignment Shake the silver paint to mix it thoroughly NOTICE DO NOT CONTAMINATE THE COLUMN When applying silver paint to the outside diameter of the blanking aperture do not contaminate the column with silver paint Use cotton applicators and acetone to remove any spilled paint Use a sharp wooden pick to apply a few beads of silver paint first on four or five spots around the outside diameter of the blanking aperture Let the paint dry for approximately 15 minutes Check that the aperture is still in the counterbore if it slips out you will not be able to align the column Then apply apply a thin bead of paint around the outside diameter and allow to dry Reinstall the lower column Lens 2 assembly see figure 6 Insert the high voltage wire into the hole in the HV spacer and tighten the hex head screw on the HV spacer see Figures 3 4 and 5 Reconnect the lower column electrical connectors the wires are color coded Tuck the connectors and wires back into the slot in the back of the lower column see Figure 4 Page 10 of 12 Revision B 3 97 Blanking Aperture Replacement 05 16 05 Part 7 Clean the Lower Column 7 2 NOTICE LOWER COLUMN ELEMENTS ARE FRAGILE Any scratches will ruin the lower column Lens 2 elements Also any metal tracks left on ceramic surfaces cause serious problems with the column operation Examine the lower column for contaminants under high intensity ligh
285. he electron flood causes staining on the grid 1 3 Move the stage to the silicon grid 1 4 Fine tune a beam with the 50 um aperture Display four silicon grid lines on the full screen as shown in Figure 1 If necessary turn on Scan Rotation Enable on the Knob Panel and adjust the image to 0 rotation Figure 1 Full Screen Image of a Silicon Grid Box 1 5 Using the Measure Tool measure from the edge of one silicon grid line to the same edge of the next line as shown in Figure 2 Record the measured values in your notebook Figure 2 Measure a Silicon Grid Box in X and Y Axes Page 2 of 4 Revision B 3 97 Scan Gain Calibration 07 03 1 6 Calculate new values for the Column xcalgn and Column ycalgn variables and insert them in the usr micrion fib data Column M file Do this as follows a Open the Column M file using the Micrion Constants Editor Read the current values for the Column xcalgn and Column yvycalgn variables and record them in your notebook The Si grid lines are on 35 um centers Use this number shown in the formula in Fig ure 3 to calculate new more precise values for Column xcalgn and Column ycalgn variables To calculate the new value for Column xcalgn x value measured y value measured X Column xcalgn current value New Column xcalgn value 35 To calculate the new value for Column ycalgn J X Column ycalgn current value New Co
286. he gauging head on the center of the electron faraday grid shown in Figure 6 On the electron faraday cup one set screw is a horizontal set screw and one is a vertical set screw on the bottom on the electron faraday block To adjust the elec tron faraday cup you must remove it completely from the stage Do not do this unless the electron faraday cup is not within 0 001 0 002 below the gauging head Fine Adjustment 3 6 Move the stage to place the grid block under the gauging head Check that the setting on the dial indicator is unchanged from the rough alignment 3 7 Ifthe setting on the dial indicator has changed start over from the rough adjustment 3 8 Move the stage to place the gauging head on the three plate locations stopping at each location to adjust the respective set screw The resulting height reading on the dial indica tor should be the same as that for the reference point 3 9 Repeat steps 3 6 through 3 8 twice more Final Check 3 10 Move the stage to place the grid block under the gauging head and check that the dial indicator shows the same value for the reference point as it had during fine adjustment 3 11 Move the stage to bring plate location 1 under the gauging head and check that the dial indicator shows the same value as for the reference point within 0 0001 3 12 Move the stage to bring plate location 2 under the gauging head and check that the dial indicator shows the same value as for the refe
287. he laser Insert an alignment aid tool HP 10706 60202 into the slit in the side of the x axis interferometer so that the clear plastic end of the tool covers the output of the reference beam This should produce an autoreflection of the beam CAUTION The laser incorporated in the FIB System is a Class 2 low power laser Eye damage can result if you look directly into the beam or into a specular mirror like reflection of it Do not stare into the beam or into a specular reflection of it Look indirectly into the output of the laser A very faint almost transparent disk should be visible within the laser output port If the disk isn t visible move the plastic end of the alignment aid tool so that it alternately covers and uncovers the reference beam output the disappearance and reappearance of the autoreflection disk can aid in its detection Repeat the alignment procedure for the y axis After the x axis and y axis beams have been aligned rotate the laser output aperture to the large aperture Ensure that the beam output is centered within the large aperture the sides of the aperture opening should not interfere with the beam Connect a multimeter to the pin on the back of the x axis receiver Use a small slotted screwdriver to rotate the potentiometer on the side of the receiver counterclockwise until the output voltage is approximately 1 0 V Repeat for the y axis receiver Install the laser tube shrouds and interferom
288. he lift rod See Figure 1 While pushing the lift rod in slide the quartz flatness plate smooth finish side up to the rear of the stage Figure 1 Lift Rod at Stage Front Revision B 3 97 Page 3 of 10 03 06 Stage Height amp Carrier Flatness d Release the lift rod allowing the quartz flatness plate to be clamped into position 1 2 MicroMill HT only Place spacers as close to the set screws as possible See Figure 2 Figure 2 Quartz Plate and Spacers Spacers used on MicroMill HT only 1 3 Attach the adapter block to the height transfer gauge 1 4 With one socket head cap screw install the height transfer gauge on the edge of the work chamber as shown in Figure 3 Figure 3 Height Transfer Gauge on the Edge of the Workchamber Once in place the height transfer gauging head should not be moved If you bump or otherwise move the gauging head during the flatness procedure you must start over from step 2 1 Page 4 of 10 Revision B 3 97 Stage Height amp Carrier Flatness 03 06 Manually Rotating the Lead Screws The X axis lead screw can be rotated by means of a 3 8 box end wrench on the motor shaft the motor is outside the workchamber to the right of the workchamber as you face it Clockwise rota tion moves the stage in the positive X direction to the right of the chamber To move the stage on the Y axis manually rotate the lead screw by hand inside the workchamber Clockwise rotation moves the stage in
289. he loadlock through a small diameter vacuum line and at a relatively low flow rate this reduces the amount of particulate contami nation generated by the evacuation of the loadlock Opening V4 continues the evacua tion of the loadlock through a large diameter vacuum line f Close V3 with the following vacchat command clv3 g Check the status of TC2 by typing stt2 h When TC2 lt 0 065 torr close V1 by typing clvi i Turn off the rough pump with the following vacchat command rpn j At the vacchat prompt type the following command opv2 k Shut off the ion pump the HCIG the turbo pump and the fore pump with the follow ing commands ipn hepd hpn fpn l Wait a minimum of two minutes for the turbo pump to stop spinning Revision B 3 97 Page 9 of 12 01 02 Power Down Vent and Reset m Open the vent valve with the following command opv5 n It will take up to 20 minutes for the workchamber and loadlock to reach atmospheric pressure Check pressure in the loadlock and workchamber by typing the following vacchat command stlp The system will respond with either The loadlock is under vacuum Or The loadlock is at atmosphere Because V2 and V4 are open the workchamber and the loadlock are at the same pres sure o When the system reports that the loadlock and workchamber is at atmosphere type the following commands clv2 clv4 clv5 Page 10 of 12 Revision B 3 97 Power Down Vent and Rese
290. he lower column Lens 2 elements Also any metal tracks left on ceramic surfaces cause serious problems with the column operation Part 3 Column Cleaning 3 1 Under high intensity light examine the column for contaminants NOTE The high intensity light must shine across the surface of interest at a shallow angle Otherwise you will illuminate everything evenly making particle detection diffi cult The exposed lower column Lens 2 will be upside down on the workbench Figure 2 shows the lower column elements 3 2 Use the lens brush cotton tipped applicators and nitrogen to gently clean off any contam inants you find Clean the rest of the column throughly including the ion gun 3 3 Clean the interior of the lower shield Page 4 of 6 Revision B 3 97 Cleaning Column Elements 05 02 05 GROUND CONE ELECTRODE 1 HV2 CONE DO NOT LOOSE ELECTRODE 1 OR REMOVE THESE FOUR SCREWS INSULATING ROD HV SPACER 1 30 ALUM 3 DO NOT ALLOW ANY METAL TO TOUCH GROUND ELECTRODE SPACER 4 UPPER COLUMN Figure 2 Lower Column Lens 2 Without Shield 3 4 Reinstall the lower shield in its original rotational position The center bores of the lower shield and the Lens 2 assembly should be concentric centrally aligned 3 5 Clean the workchamber as described in Service Procedure 06 03 and the ion pump con nector tube 3 6 Reinstall the column as described in Part 5 of Service Procedure 05 09 05 Colum
291. he process module the electronics mod ule the column and the high voltage cables connected to the the ion gun and the column Do not touch the column and ion gun high voltage cables or connectors unless you are certain that all high voltage is disabled Do not rely only on the software Power Down function Disable the high voltages using both manual and automatic procedures Revision B 3 97 Page 1 of 6 05 13 Column Alignment Part 1 Aligning the Source 1 1 To display the Beam Screen select Beam Control on the Tasks menu 1 2 On the Beam Control popup turn Beam Maintenance off and Upper Scan off 1 3 Use the four knurled ion gun housing adjustment knobs shown in Fig 1 to center the ion gun housing by eye lon Gun lon Gun Housing c Adjustment Knobs wo Figure 1 lon Gun Housing Side View Column assembly NOTE Use care when adjusting the ion gun position so that the beam does not shut down 1 4 Click the Aperture icon on the Beam Screen and select Home on the popup see Fig 2 fiperture X Y filignment Lens 2 Hobble o off aprtcont1 xwd Figure 2 Aperture Control Popup 1 5 Select a 1350 um field of view 1 6 Call the Suppressor Voltage popup by clicking on the Suppressor Voltage icon Page 2 of 6 Revision B 3 97 Column Alignment 05 13 1 7 1 8 1 9 1 10 1 11 Bring down the
292. he rotational position of the lower shield The lower shield must be reinstalled in its original position for proper MCP alignment Remove the lower shield by loosening the three Phillips head screws see Figure 3 Remove 3 Phillips head screws to remove shield 2 shown e e Figure 3 Side and Bottom Views of Lower Shield with Mounting Screws NOTICE LOWER COLUMN ELEMENTS ARE FRAGILE Handle the lower column and its elements with great care Any scratches will ruin the lower column Lens 2 elements Also any metal tracks left on ceramic surfaces cause serious problems with the column operation Part 3 Remove the Lower Column Electrical Connectors 3 1 Pull the lower column electrical connectors out of the slot in the back of the lower column there are eight pin socket connections The wires are color coded See Figure 4 3 2 Loosen the hex head screw on the HV spacer and remove the high voltage wire from the HV spacer See Figures 4 and 5 Cut off the kinked end of the high voltage wire see Fig ure 5 Revision B 3 97 Page 5 of 12 05 16 05 Blanking Aperture Replacement GROUND CONE ELECTRODE 1 HV2 CONE ELECTRODE 1 HV SPACER 1 INSULATING ROD 30 ALUM 3 HY WIRE GROUND ELECTRODE SPACER 4 Figure 4 Lower Column Lens 2 Without Shield 3 3 Disconnect the eight lower column electrical connectors See Figure 5 Pull the connectors out from the slot in the back of
293. height adjustment screw Slide the upper bracket as far away from the lower 3 2 flood gun as the height adjustment screw allows then tighten the height adjustment screw see Figure 4 screw and slide upper Evo Teed gun bracket in this direction Loosen height adjustment shipping screw Flood Gun Height Adjustment Screw behind the connector Flood Gun Side View Lateral Position Screws 2 Top View Figure 4 Side and Top Views of Replacement Flood Gun 3 3 Use an ohmmeter to perform the continuity tests listed in Table 1 The test measurement points are shown in Figure 5 If the measurements do not match those in Table 1 contact Micrion Customer Support Page 6 of 16 Revision B 3 97 05 04 25 Terminal 3 Focus Lens Terminal 1 Deflection Nx Plates Terminal a Deflection Plates Side View Flood Gun Installation and Test Bracket Ground Grid Lead socket Filament Leads pins Figure 5 Flood Gun Continuity Test Points Table 1 Flood Gun Continuity Tests From To Continuity Filament Lead 1 Filament Lead 2 Continuous Filament Lead either Ground Not Continuous Filament Lead either Grid Lead Not Continuous Terminal 1 Ground Not Continuous Terminal 2 Ground Not Continuous Terminal 3 Terminals 1 amp 2 Not Continuous Case Ground Not Continuous Revision B 3 97 Page 7 of 16 Flood Gun Install
294. hemical s contained inside If a chemical source is not in its safest state as described in Service Procedure 02 01 it is possible for a combination of component failures to release the chemical s through a cabinet s delivery line a roughing line a purging line or from a chemical reservoir into the workchamber Do not open the workchamber or disassemble any part of the vacuum pumping system or detach any gas line from any chemical cabinet until you are sure that every chemical source attached to the FIB system is in its safest state NOTICE CLEAN THE SURROUNDING AREA Before you vent the system clean the exterior of the process module and the surrounding area The column is very sensitive to contamination Power Down and Vent the System Before performing the tasks described in this procedure you must power down and vent the sys tem see Service Procedure 01 02 Page 2 of 10 Revision B 3 97 Blanking Aperture Replacement 05 16 10 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Part 2 Remove the Column WEAR GLOVES DO NOT HANDLE SOLVENTS When working inside the chamber or when handling any components that will be exposed to
295. hemical s contained inside If a chemical source is not in its safest state as described in Service Procedure 02 01 it is possible for a combination of component failures to release the chemical s through a cabinet s delivery line a roughing line a purging line or from a chemical reservoir into the workchamber Do not open the workchamber or disassemble any part of the vacuum pumping system or detach any gas line from any chemical cabinet until you are sure that every chemical source attached to the FIB system is in its safest state Part 2 Power Down This procedure begins with the FIB application program running The first task is to bring down the high voltage 2 1 Power down the column through the application program WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures 2 2 On the SysCon module switch OFF the Deflection MCP and Flood Gun power swtiches S1 S2 and S3 2 3 Select the task you are going to perform and switch off the specified switches that are listed in Table 1 and shown in Figure 1 Page 2 of 12 Revision B 3 97 Power Down Vent and Reset 01 02 Table 1 Subsystems and Which Circuits to Switch Off To work on Switch OFF lon Beam Column HV Power Supply s Focus Power Supply High Voltage
296. hen raised again the plungers clamp the carrier in place The chain of events starts with the VacCon telling the fluids regulator to send a 5V forward sig nal to the air cylinder underneath the workchamber This brings 24V to the air cylinder piston that moves a rack and pinion Inside the workchamber beneath the loadlock backing plate is a cam shaft and cam When the rack and pinion are activated the cam shaft turns 270 degrees The rotation of the cam shaft causes its cam to push the lift rod which is on the bottom of the worktable The inward movement of the rod lowers the plungers After the cassette closes the limit switch the air cylinder receives the 5V back signal from the fluids regulator As a result the piston pulls back rotating the cam shaft back to its original posi tion The actuator springs forward again lifting the plungers into the the bottom of the carrier and clamping it into position The clamped and unclamped state of the clamp actuator are sensed by the position sensors on the piston itself Materials Required This procedure requires the use of the following materials and equipment e Clean room gloves Vacchat program e Clean straight edge ruler NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 3 task Specifically Equipment is energized Live circuits are exposed and accidental contact is possible Potential expos
297. hen open valves V15 and V16 to remove chlorine from the common delivery lines When BT1 reg isters base pressure 0 001 T close V15 and V16 and switch off the roughing pump 8 13 Remove the bypass for the shut off safety interlock switch on the GAE cabinet door 8 14 Restore GAE cabinet ventilation to the normal flow rate by adjusting the gate valve 4 8 15 Open the manual valves on the other chemical reservoirs installed in the GAE cabinet 4 If you jumpered the high low flow sensor be sure to remove the jumper after the correct flow is restored Page 12 of 12 Revision B 3 97 ZA Micrion Service Procedure No 11 02 Service Procedure Title Xenon Difluoride Cylinder Replacement Applicable Systems All Systems w XeF5 Frequency of Service As Needed Introduction Do not undertake this procedure without prior training and authorization by Micrion Corporation Do not use this document as a substitute for that training Normally only Micrion service person nel perform this procedure This document has four parts 1 preparations 2 a general outline of the procedure 3 the pro cedure itself and 4 the Material Safety Data Sheet for xenon difluoride XeF gt in Section 2 Tools and Materials Required The new XeF gt cannister assembly part number 100 009040 see Fig 1 e 2 new VCRU gaskets including a solid plug for the old cannister Rubber gloves and safety glasses Dry wipes and lint f
298. hen up again slowly as follows JD JU Page 4 of 4 Revision B 3 97 ZA Micrion Service Procedure No 10 02 Service Procedure Title Dual Nozzle Replacement amp Coarse Alignment Applicable Systems Micrion 9800 FlipChip Frequency of Service As Needed Overview of the Replacement Procedure This service procedure describes the removal and replacement of the tri quad and beehive noz zles It also includes procedures for coarse alignment of the nozzles prior to pump down This procedure refers to the two sets of nozzles as Nozzle 1 on the left as you look from the front of the system and Nozzle 2 on the right The dual nozzle assembly moves both nozzles along the X and Y axis but in the Z axis only one nozzle subassembly can move at a time The order of the procedures is as follows Part 1 Checking the Replacement Nozzles Part 2 Recording the Position of the Existing Nozzles Part 3 System Preparation Part 4 Cooling Off the Reservoir Part 5 Removing a Reservoir Subassembly Part 6 Replacing a Reservoir Part 7 Adjusting Limit Switches During Coarse Alignment Part 8 Coarse Alignment in Z Nozzles do not Contact the Stage Part 9 Coarse Alignment in X and Y Part 10 Removing a GAE Nozzle Subassembly Part 11 Replacing a GAE Nozzle Subassembly with a Reservoir Tools and Materials This procedure requires the use of the following materials e Standard field service engineer s to
299. her person Position the column cap assembly over the column and gently place it on the column housing Rotate it as needed for proper alignment Tighten the two alignment screws that were initially loosened Making sure that the pin is centered connect the circular connector to the Deflection input After cleaning the cable ends with isoproyl and allowing them to dry connect all high voltage cables and signal cables to the column see Figure 1 NOTICE AVOID BENDING PINS Be careful when reconnecting the 3 pin and 20 pin connectors The pins are easily bent Close the workchamber and pump down the system see Service Procedure 04 03 Enable the high voltage power supplies Cure the column see Service Procedure 05 12 25 Heat the ion source see Service Procedure 05 11 Calibrate the deflection control system as described in Section 7 of this manual begin ning with Service Procedure 07 02 Page 6 of 6 Revision B 3 97 ZA Micrion Service Procedure No 05 16 05 Service Procedure Title Blanking Aperture Replacement 5 nm Column Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service As Needed Introduction During normal operation the blanking aperture is sputtered by the ion beam Over time the beam will erode the blanking aperture This procedure describes the process of removing and replacing the blanking aperture in a FIB system Required Materials This procedure requires the follow
300. her protective equipment Lab coat amp apron flame amp chemical resistant coveralls eyewash capable of sustained flushing safety drench shower amp hygienic washing facility Page 2 of 2 Revision B 3 97 Material Safety Data Sheet MSDS Tetraethoxysiloxane Emergency contact Chemtrec 800 424 9300 This MSDS is provided for general information only For information about the manufacturer of a particular chemical contact the environmental health and safety coordinator at Micrion Corporation 508 531 6464 Substance Identification Chemical name Tetraethoxysiloxane Chemical family Organosilane Formula CH3 CH5O 4SiMolecular weight 208 331 CAS 75 10 4 Physical Data Clear colorless liquid alcohol like odor volatile by volume 100 Boiling point 169 CEvaporation rate gt 1 Vapor pressure 20 C n aMelting point 85 C Vapor density air 1 I Specific gravity 0 9335 Solubility in water insoluble reacts slowly Health Hazard Data Routes of entry inhalation skin absorption ingestion Emergency and first aid procedures Inhalation remove victim to fresh air if breathing is difficult get immediate medical attention Ingestion get Immediate medial attention Eye Contact flush with plenty of water for at least 15 minutes get medical attention Skin Contact remove contam inated clothing immediately flush with water for at least 15 minutes get medical attention Fire and Explosion Hazard Data Fla
301. high which is often the case with the grid voltage readback reduce the values to 99 0 and 99 respectively e Restart the Microsurgery program to cause the change to be recognized f Compare the readback with the voltmeter reading and repeat substeps d and e as nec essary until the readback is within 0 5V of the meter 10 2 Calibrate the cathode voltage readback as follows Switch the flood gun power switch S3 on the System Controller OFF b Connect the voltmeter between pins E or F Cathode Voltage and P Ground c Switch the flood gun power switch S3 on the System Controller ON and note the voltmeter reading d Use vi to adjust the values for Rlowvalue and Rhighvalue in the cathode voltage sec tion of the Registers M file by one volt For example if the readback reads low which is often the case with the cathode readback increase the values to 101 0 and 101 respectively e Restart the Microsurgery program to cause the change to be recognized f Compare the readback with the voltmeter reading and repeat substeps d and e as nec essary until the readback is within 0 5V of the meter Part 11 Problem Diagnosis General The following section may help with diagnosing some of the more common flood gun problems Listed below are typical operating parameters Cathode V 85 Grid V 83 Deflection V 1 to 5 5 would be worst case Filament I 1 3 to 1 6 A depending on gun type age and gas exposure
302. his document as a substitute for that training Normally only Micrion service personnel perform this procedure This document comprises three parts 1 preparations 2 a general outline of the procedure 3 the procedure itself and 4 the Material Safety Data Sheet for styrene Notice Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 2 task Specifically Equipment is energized Live circuits are covered or insulated Work is performed at a remote location to preclude accidental shock Tools and Materials the new carbon cylinder assembly part no 100 010040 charged with 30 ml of sty rene at the Micrion factory pumped down to the 5 to 7 torr range the vapor pressure of styrene at room temperature with the manual valve on the assembly closed the VCR plug for the old cylinder assembly normally in bottom of cabinet two new VCR gaskets part no 355 000027 rubber gloves and safety glasses dry wipes and swabs for cleaning a disposal bag for contaminated waste used wipes gaskets etc e a 3 4 open end wrench e a 5 8 open end wrench a hex key set heat sink compound part no 700 000026 1 VCR is a registered trade mark of the Cajun Company Macedonia Ohio Revision B 3 97 Page 1 of 8 11 04 Carbon Cylinder Replacement Part 1 Preparations 1 1 Review the Material Safety Data Sheet for styrene in Section 2 1
303. his procedure requires the use of the following materials e Standard field service engineer s tool kit Long shaft slotted screwdriver Needle nose pliers e 3 32 Allen wrench Software Definitions The locations of Ion Faraday and Electron Faraday defined Trademarks Loctite Revision B 3 97 Page 1 of 8 10 03 Dual Nozzle Fine Alignment To Name and Define the Nozzles In the usr micrion fib data depo labels directory are two files defining in hexa decimal the extended position of each of the nozzle subassemblies The names of the nozzles can be changed and the x y z and z id values can be changed The template file defines the left sub assembly as Z1 and the right subassembly as Z2 x ll D N e o lt oO e e o T N ll N 0400 z_id x 7000 y 0000 z 0500 z_id 1 To Select a Nozzle You can select a nozzle in either the Microsurgery screen menu or in vacchat To select a nozzle in Microsurgery In the screen main menu select Depo Nozzle On the deposition pull down menu are the names of the nozzles as defined in the depo 1abel files along with the Ret ract selection When you select one of the two names that nozzle automatically is extended To select a nozzle in vacchat Type the command dpu The following menu appears 1 Extended 2 Tungsten 3 XeF2 Add label Copy label Rename label Delete label Quit X XJ s a Select Deposition Nozzle posit
304. his step until you can set L2 to 30 kV without producing noise Once you have done so the procedure is complete Figure 1 is a graphical representation of this step If you cannot increase L2 to 30 kV without producing noise proceed to step 3 5 1 The noise referred to is the arcing white flashes visible in the imaging screen while under continuous imaging The three indicators of sparking are Very short duration snowy or white streaks in the SIM image with the imaging conditions set up as described in Part 1 Short to medium duration snowy or white streaks or banding on a mostly snowy background suc cess depends upon technique and skill Total background snow with occasional streaks that is linear with lens voltage usually there is lit tle reaction as sharp pressure bursts from the ion pump current in this mode if this condition exists STOP IMMEDIATELY and consult a column guru i e one who is certified by the Micrion Optics Dept Revision B 3 97 Page 5 of 8 05 12 05 Column and Lens Curing 3 5 Increase L2 voltage to 5 kV above the level where noise begins Maximum L2 voltage without noise 30kV Increase L2 3 kV quickly decrease Dy 2 kV Onset of noise 25 kV L2 Voltage in kV Figure 1 L2 Curing Procedure a Immediately lower L2 to 0 V and wait for the noise to stop The noise may stop and the pressure may drop before 0 V but bring it to O V just the same b Increase L2 voltage
305. hows logfiles in directory associated with selected device type Deletes selected logfile 05 10 log main ie Log Records List Shows the current last created logfile for Device lon Source w the selected device Cur Log sourcel log 1 3 5 7 9 11 13 15 17 19 21 23 25 27 29 31 EN L5 cs e type The name shown here is the name of the default file installed with the software this would be replaced by a new file whose name was the serial number for the device Click on View lusr micrion fil to see the log data in the Micrion logfile Log File Utility selected from V10 1993 the file list defaults to AMicrion current logfile Revision B 3 97 When creating a logfile for a new device make sure the correct device type is selected then enter the new device s serial number as the logfile name Today 11 19 1993 Click on Today to enter hea OK Cancel current date automatically Click on OK to create the new logfile and to make it the current logfile for the selected device type NOTICE software must be restarted for beammonto recognize the new logfile X NewLog popup Create New Log File Serial Number Ue Msza Install Date mm dd yy Figure 4 Log File Utility Popups Page 9 of 12 05 10 lon Source Ch
306. hutoff outside the GAE cabinet see 2 3 8 In the GAE cabinet close the manual valve on the old Br cannister assembly by turning it clockwise see 1 3 9 In the Gas Control Popup with valves V15 and V 16 still open open valve V13 and wait for BT1 to indicate base pressure 3 10 Switch off the roughing pump 3 11 Purge and vent the system three times in a row using the nitrogen that is now in the chlo rine line see step 3 4 a Open the DN valve until BT1 9 970 b Close DN and switch on the roughing pump e When BTI base pressure switch off the roughing pump gt Repeat a c twice more Page 6 of 10 Revision B 3 97 Bromine Cylinder Replacement 11 03 Part 4 Remove Plug and Tag Old Cylinder 4 1 4 2 4 3 4 4 4 5 4 7 Put on the rubber gloves and safety glasses and remove the old Br cannister assembly Using the 3 4 open end wrench loosen the female VCR nut between valve V19 and the manual 1 4 turn valve Finish unscrewing the nut by hand Using the hex key loosen and remove the two socket head cap screws holding the cannis ter assembly against the mounting plate and remove the assembly from the GAE cabinet Install a new VCR gasket on the old reservoir assembly Remove the plastic protective cap from the old VCR plug and screw the plug into the female VCR nut on the top of the old cannister assembly Snug it finger tight and then using the
307. ibes how to measure the nitrogen gas pressure used for venting the system to atmosphere These pressures are indicated on gauges on the fluids regulator panel shown in Figures 1 and 2 The DN dry nitrogen pressure gauge on the fluids regulator panel should read between 3 and 5 psi when the system is under vacuum V3 closed The air pressure gauge on the fluids regulator panel should read 70 psi The gate valve V6 may not operate properly at pressures below 70 psi The isolation system air pressure should read 10 psi higher than the front isolator s gauge on the same side with the chamber floating 3 8 above the process module table see Service Procedure 08 02 NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 3 task Specifically Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules Revision B 3 97 Page 1 of 4 08 01 Fluids Regulator Pressure Check Part 1 Procedure 1 1 Before checking the nitrogen pressure make sure the Nitrogen valve V5 is closed by entering the vacchat command GE lives WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures
308. ice Procedure 02 01 it is possible for a combination of component failures to release the chemical s through a cabinet s delivery line a roughing line a purging line or from a chemical reservoir into the workchamber Do not open the workchamber or disassemble any part of the vacuum pumping system or detach any gas line from any chemical cabinet until you are sure that every chemical source attached to the FIB system is in its safest state WARNING Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 3 task Specifically Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are greater than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules Power Down the System Before performing the tasks described in this procedure you must power down the system see Part 2 of Service Procedure 01 02 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Page 2 of 8 Revision B 3 97 Roughing Pump Oil Change 04 04 Part 2 Prepare the Pumps 2 1 Locate the roughing fore pump module typically located behind the process module 2
309. ice Procedure No 12 12 Service Procedure Title Flood Gun Supply 1130 Applicable Systems All Frequency of Service As needed Introduction The outputs of the Flood Gun Supply board are enabled and disabled by the Flood Gun Interface board see Service Procedure 12 11 The Flood Gun Supply board receives commands on P3 via the ribbon cable from the Flood Gun Interface board see Figure 1 The Flood Gun Supply board generates high voltages on the board as soon as the SysCon chassis main power switch CB 1 is turned on When the Flood Gun switch S3 on the SysCon module is on high voltages will be sent to the flood gun Testing the Flood Gun supply board is difficult Many of the test points are close together and any shorting of test points will destroy the board Follow the simple procedure of looking for noise looking for burn marks and testing the three voltages noted in Part 4 Tools and Materials Required e Voltmeter with clip leads any other leads can slip and cause short circuits e Multibus extender board Also see Service Procedure 05 04 Flood Gun Installation and Test NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 5 task Specifically Equipment is energized Measurements and adjustments require physical entry into the equipment Revision B 3 97 Page 1 of 4 12 12 Flood Gun Supply Board e 150 001130 TP 15V
310. icrion 25 nm ion beam col umn Curing refers to the process of conditioning the lens by slowly increasing L2 voltage Use this procedure after the workchamber has been vented when installing a new column or after you have performed preventive maintenance or repairs on an existing column You can eliminate particulate contamination by following Service Procedure 05 02 25 Cleaning the Lower Column Lens2 Elements 25 nm Column Required Materials This procedure requires the following materials e Standard field service toolkit Voltmeter NOTICE If L2 is not cured properly there is risk of severe damage to the column Part1 Preparation 1 1 Make sure that the system pressure is less than 1 5 x 10 torr and that the pumps and valves are in the proper states 1 2 To detect pressure bursts with greater sensitivity and shorter response time than are pro vided by the LEDs on the MiniVac controller panel connect a multimeter to the BNC con nector labelled V mA on the MiniVac controller panel Normal high vacuum is in the range of 100 to 150 millivolts Revision B 3 97 Page 1 of 4 05 12 25 Column and Lens Curing 1 4 1 5 1 7 1 8 1 9 WARNING Dangerously high voltages are present in the process module the electronics module and the column while the FIB system is powered up Make sure that all high voltage is disabled before changing the cables connecting the filament to its power supply Do not rely
311. ield Removed Revision B 3 97 Page 5 of 12 05 16 25 Blanking Aperture Replacement Part 4 Remove the L2 High Voltage Feed Tube Remove the L2 high voltage feed tube See Figures 4 5 and 6 Yj T d BEA RKK IN Figure 5 HV Cap Screw Loosened L2 End of HV Tube Removed from L2 Electrode 4 1 Clean the L2 high voltage feed tube and place it on a clean work surface Page 6 of 12 Revision B 3 97 Blanking Aperture Replacement 05 16 25 N NNNSN Figure 6 Removal of HV Tube Part 5 Remove the Lower Column Lens 2 Assembl NOTICE DO NOT DAMAGE THE L2 WIRES Do not strain the L2 wires when removing the L2 assembly provide adequate strain relief so that the wires are not damaged 5 1 Use a bent allen wrench to remove the three screws at the base of the lower column Lens 2 assembly see Figure 7 Recover any dropped screws before proceeding 5 2 Carefully lift the Lens 2 L2 assembly out of the column to expose the end of the beam blanking assembly see Figure 8 Revision B 3 97 Page 7 of 12 Blanking Aperture Replacement 05 16 25 Do not damage the deflection octopole wires when removing the L2 assembly Use a bent Allen wrench to remove the L2 mounting screws 3 If a screw falls in this one shown area you may have to remove the HV cap in order to recover the screw LZ N N Loy NS CS oir the deflection octopole wires when removing the L2 assembly LIZZ
312. ies The column cap assembly weighs approximately 25 pounds 11 kg The column housing weighs approximately 50 pounds 28 kg If nec essary to avoid personal injury secure the help of another person 3 5 Forthe best leverage in removing the column cap assembly stand behind the process module Lift the column cap assembly straight up off the column and gently place it top side up on a clean work surface Immediately cover the exposed column with a clean plastic bag Note The bottom surface of the column cap assembly serves as both a regis tration and an O ring surface and is susceptible to damage from nicks and scratches Revision B 3 97 Page 11 of 14 05 09 10 Remove Replace lon Beam Column Part 4 Remove the Column Housing 4 1 4 2 4 3 4 4 Remove the four bolts securing the column housing to the chamber Note which holes you are removing the bolts from so that you may use the same holes when reinstalling the col umn not all the holes have bolts NOTICE DO NOT DAMAGE THE MCP WHEN REMOVING THE COLUMN To avoid damage to the MCP the column must be lifted straight out of the workchamber this is especially important if the flat rather than angled style of MCP is installed on the column Ideally someone should guide the lower column and MCP out of the workchamber while the column is being lifted assuming that the workchamber lid is propped open slightly Remove the column housing by lifting it straight out
313. ifted By calling up the Box Modify popup you can see how much the repair box has been offset in X and or Y Edit the magemode M file In the Micrion Process Watcher popup open the Micrion Constants Editor In the magemode M file edit the settings to shift X and Y according to the offset you saw in step 1 7 In Image mode M the settings for the two lines in the 0 index are the only ones to change At end of mage mode M is a section headed The following are the Mux shifts In this section are important listings Image shiftx Image shifty Let s say that the settings are as follows Image shiftx 0 0 05 Image shifty O 0 00 1 7 Edit the settings following these four rules elf the repair area is shifted to the left of the repair box make Image shiftx more positive elf the repair area is shifted to the right make Image_shiftx more negative If the repair area is shifted down make mage shifty more positive elf the repair area is shifted up make Jmage_shifty more negative For example assuming a 0 03 offset in X edit the mage shiftx line as follows Image shiftx 0 0 08 1 8 Save the setting and perform another mill 1 9 Define a new repair box over another chrome area and define it as X 2 Y 4 Perform a mill and see if there is some offset If so change Imagemode M again Page 2 of 2 Revision B 3 97 ZA Micrion Service Procedure No 07 08 Service Procedure Title Reference Curve Calibration
314. igure 6 Gently lower the cylinder into the sleeve until the source is resting in the suppressor cap Revision B 3 97 Page 11 of 12 05 10 lon Source Change Pushrod g Suppressor Cap 4 Installed in Bottom to Receive Source 05 007 Figure 6 Inserting the Source and Cylinder into the Source Maintenance Sleeve 10 7 Press down on the push rod to gently eject the source part way Hold down the end of the pushrod while pulling upward on the cylinder in order to unplug the source from the cylin der fully and deposit it in the suppressor cap Remove the cylinder and sleeve and return them to the column service tool kit 10 8 Align the source so that the two electrical pins align with the detent reference mark in the suppressor cap shown in Figure 3 Use the tweezers to rotate the source being careful to avoid contact with the source pins and needle 10 9 Align the two source clamps screwing them in tightly enough to hold the source in place while allowing it to be moved slightly from side to side for alignment Be sure that the source does not move when the suppressor is tilted on its side and the source clamps are not near the electrical pins 10 10 Align the source needle in the center of the hole in the suppressor cap Move the source from side to side to align it by grasping the electrical pins DO NOT ROTATE the source 10 11 Place the loaded suppressor into the storage container provided Page 12
315. ill HT only Rough Adjustment Using the set screws adjust each plate location to within 0 0002 of the constant value It is a rough adjustment because due to mechanical shifting the adjustments made at the beginning of the procedure will be affected by the adjustments made at the end of the procedure In the following procedure the spacers are required for the MicroMill HT only For 8000 and 9800 systems the quartz flatness plate is checked near each of the three set screws 3 1 Move the stage in Y to place the gauging head on any point at plate location 1 shown in Figure 6 Adjust the set screw with the 5 64 Allen wrench to be within 0 0002 of the ref erence point 3 2 Move the stage in Y to place the gauging head on any point at plate location 2 shown in Figure 6 Adjust the set screw with the 5 64 Allen wrench to be within 0 0002 of the ref erence point 3 3 Move the stage in Y and X to place the gauging head on any point at plate location 3 shown in Figure 6 With the 5 64 Allen wrench adjust the set screw to place the ion fara day cup within 0 0002 of the reference point 3 4 Move the stage in Y to place the gauging head on the center of the ion faraday grid shown in Figure 6 With the 1 16 Allen wrench adjust the two horizontal set screws to bring the ion faraday cup below the reference point Revision B 3 97 Page 7 of 10 03 06 Stage Height amp Carrier Flatness 3 5 Move the stage in X to place t
316. in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Open the Workchamber Remove the front panels to gain access to the workchamber cover When the system is completely vented remove the 1 2 socket head cap screws and open the workchamber Page 2 of 4 Revision B 3 97 Lubricating the Dual Nozzle Lead Screws 10 01 Part 2 X Lead Screw The x drive lead screw drives the entire dual assembly left to right and right to left The lead screw is lubricated at the factory It should be cleaned and re lubed every six months 2 1 Remove old and or excess grease with a lint free wipe DO SO VERY GENTLY 2 2 Apply a syringe tip of fresh grease where shown in Fig 1 2 3 In vacchat type the JE command to drive the dual nozzle assembly slowly to the east i e to the right and the JW command to drive the dual nozzle assembly slowly west i e to the left until the x lead screw is covered by a thin film of lubricant X Lead Screw 7 Figure 1 X Lead Screw on the Micrion 9800 FlipChip Mezzanine Part 3 Y Lead Screw The y drive lead screw drives the entire dual assembly forward and back The lead screw is lubri cated at the factory It should be cleaned and re lubed every six months 3 1 Remove old and or excess grease with a lint free wipe DO SO VERY GENTLY 3 2 Apply a syringe tip of fresh grease 3 3 In vacchat type the JF command to drive the dual nozzle assembly slowly forw
317. increase L2 to 30 kV without producing noise proceed to step 2 5 1 The noise referred to is the arcing white flashes visible in the imaging screen while under continuous imaging The three indicators of sparking are Very short duration snowy or white streaks in the SIM image with the imaging conditions set up as described in Part 1 Short to medium duration snowy or white streaks or banding on a mostly snowy background suc cess depends upon technique and skill Total background snow with occasional streaks that is linear with lens voltage usually there is lit tle reaction as sharp pressure bursts from the ion pump current in this mode if this condition exists STOP IMMEDIATELY and consult a column guru i e one who is certified by the Micrion Optics Dept Revision B 3 97 Page 3 of 6 05 12 10 Column and Lens Curing 2 5 Increase L2 voltage to 5 kV above the level where noise begins Maximum L2 voltage without noise 30kV Increase L2 3 kV quickly decrease Dy 2 kV Onset of noise 25 kV L2 Voltage in KV Figure 1 L2 Curing Procedure a Immediately lower L2 to 0 V and wait for the noise to stop The noise may stop and the pressure may drop before 0 V but bring it to O V just the same b Increase L2 voltage again and record the voltage before the onset of noise Repeat this step once or twice to reach an L2 voltage of 30 kV without noise Once you have done so the procedure is comple
318. inet identify the chemical s contained inside If a chemical source is not in its safest state as described in Service Procedure 02 01 it is possible for a combination of component failures to release the chemical s through a cabinet s delivery line a roughing line a purging line or from a chemical reservoir into the workchamber Do not open the workchamber or disassemble any part of the vacuum pumping system or detach any gas line from any chemical cabinet until you are sure that every chemical source attached to the FIB system is in its safest state NOTICE CLEAN THE SURROUNDING AREA Before you vent the system clean the exterior of the process module and the surrounding area The column is very sensitive to contamination Power Down and Vent the System Before performing the tasks described in this procedure you must power down and vent the sys tem see Service Procedure 01 02 Page 2 of 12 Revision B 3 97 Blanking Aperture Replacement WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Part 2 Remove the Column 2 1 2 2 2 3 Revision B 3 97 WEAR GLOVES DO NOT HANDLE SOLVENTS When working inside the chamber or
319. ing materials Clean room preferably with a class 100 airflow hood Clean standard field service tools completely free of oil and grease Lint free wipes Clean room gloves High intensity light source Aluminum foil Clean lens brush e Clean filtered dry nitrogen an ionizing N gun with 20 psi pressure is preferred Cotton tipped applicators Acetone MicroMill HT only blanking aperture upgrade kit Micrion part number 100 14130 Silver paint NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment 82 93 this procedure is a Type 3 task Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules Revision B 3 97 Page 1 of 12 05 16 05 Blanking Aperture Replacement NOTICE TRAINING IS REQUIRED FOR THIS PROCEDURE Do not attempt to perform this procedure unless you have been properly trained Only qualified personnel should perform this procedure Parti System Preparation Configure the Chemical Sources in Safe Mode Before performing the tasks described in this procedure you must put the chemical sources in a safe mode see Service Procedure 02 01 WARNING Do not proceed until the chemical sources are secure The chemical reservoirs in FIB systems contain hazard ous materials Labels affixed to the exterior of a chemical cab
320. ing weighs approximately 50 pounds 28 kg If nec essary to avoid personal injury secure the help of another person Place the column housing over the port on the workchamber in the correct orientation NOTICE DO NOT DAMAGE THE MCP DURING COLUMN INSTALLATION To avoid damage to the MCP the column must be lowered straight down into the workchamber port Ideally someone should guide the lower column and MCP down into the workchamber port while the column is being lowered Revision B 3 97 Page 9 of 10 05 09 25 Remove Replace lon Beam Column 5 3 5 4 5 5 5 6 5 T 5 8 5 9 5 10 5 11 5 12 5 13 5 14 5 15 5 16 5 17 5 18 5 19 Gently lower the column housing straight down into the port Rotate the column housing as necessary for proper alignment of the bolt holes on the col umn housing and the process module Replace the four mounting bolts in their original holes on the mounting flange Check the O ring and adjacent surfaces on the top of the column housing and the bottom of the ion gun assembly for cleanliness Position the column cap assembly over the column and gently place it on the column housing Rotate it as needed for proper alignment Tighten the two alignment screws that were initially loosened Making sure that the pin is centered connect the circular connector to the Deflection input Connect all high voltage cables and signal cables to the column see Figure 5 NOTI
321. install MCP 05 03 05 Lower column MCP mounting screws 3 one hidden Figure 4 Flood Gun With Snout and Large MCP in 9800 System Interior View Revision B 3 97 Page 7 of 10 05 03 05 Remove nstall MCP Workchamber Flood Gun Height Positioning Screw Lower Column MCP Mounting Screws 4 Figure 5 Side View of Flood Gun With Snout and Large MCP Page 8 of 10 Revision B 3 97 Remove Install MCP 05 03 05 an ou ee e SS MA o D 2 Mounting Screw 2 Figure 6 Side View of Flood Gun Without Snout and Small MCP Flood Gun Lowered and MCP Disconnected Revision B 3 97 Page 9 of 10 05 03 05 Remove nstall MCP Workchamber Flood Gun Height Positioning Screw Lower Column N 4 lt mcp Mounting Screws 4 Figure 7 Side View of Flood Gun With Snout and Large MCP Flood Gun Lowered and MCP Disconnected Part 3 Replacing the MCP 3 1 Fasten the replacement MCP to the bottom of the column with the MCP mounting screws see Figures 6 and 7 3 2 Reattach the MCP electrical connectors 3 3 Slide the flood gun subassembly up until it contacts the lower column Make sure that the flood gun is aligned with points directly at the center bore of the MCP see Figures 1 2 3 4 and 5 Tighten the flood gun height positioning screw see Figures 2 and 5 3 4 Clean the workchamber see Service Procedure 06 03 then close the workchamber door 3 5 Power up the s
322. int free wipes and lint free swabs Disposal bag for contaminated waste used wipes gaskets etc 1 1 4 open end wrench for loosening the CGA 660 coupling 3 8 open end wrench for loosening the cylinder valve on the new cylinder this wrench must be 10 to 12 long as much as 100 ft Ibs of torque may be required Torque wrench Micrion part 780 114 with crowfoot wrench attachment Micrion part 780 113 for tightening the CGA 660 coupling Hex key set ratchet or screwdriver type recommended for removing and reinstalling the anti torque bracket 1 SNOOP is a registered trade mark of the NUPRO Company Willoughby Ohio Revision B 3 97 Page 1 of 12 11 01 Chlorine Cylinder Replacement Part 1 Preparations 1 1 1 2 1 3 1 6 Secure the help of another person two people must be present during this procedure Review the Material Safety Data Sheet for chlorine in Section 2 noting in particular its high toxicity corrosiveness and explosive reactivity Review the procedures provided by the site Chemical Safety Officer governing tasks of this nature and prescribing the proper disposition of the old Cl cylinder If no such pro cedures have been provided alert the site Chemical Safety Officer that you will be per forming this task If the site does not have a designated Chemical Safety Officer alert site management personnel as well as any personnel present in the general area surrounding
323. inutes from the time that you noted earlier step 3 21 substep c for the cylinder to cool Use the vacchat program to query the controller the sc1at command obtains ambient temperature sc1ct obtains cylinder control temperature You must wait until the cylinder temperature is 5 below the ambient temperature You can then ter minate the vacchat program Close V31 if it is not already closed open the manual valve on the cylinder assembly briefly and then close it again Open V31 and note the BT3 readback Ideally the pressure will be stable in the range of 5 to 7 torr In any case f Switch on the roughing pump wait 30 seconds then open V32 and V33 g Slowly open the manual valve on the cylinder assembly turn and rough pump the cylinder for 5 to 30 seconds h Close V32 and V33 and note the rate of rise indicated by BT3 If the pressure remains stable in the 5 7 torr range proceed to step number 3 27 If the pressure rises rapidly the indication is that the cylinder assembly has leaked in which case contact Micrion Product Support for advice you may have to procure another new cylinder assem bly and begin again At this point the manual valve should be fully open V35 should be fully open manually through the pressure flow controller V31 should be open and V32 V33 V34 and V36 should be closed BT3 should be indicating pressure in the 5 to 7 torr range The roughing pump is on Close V31 Reinsta
324. ion label option n When you enter 2 or 3 the x y and z extended positions are displayed in hexadecimal microns and mils You are prompted as follows Active Deposition Nozzle 1 Z 2 Z2 n In all cases n will be the number of the nozzle that was most recently selected Page 2 of 8 Revision B 3 97 Dual Nozzle Fine Alignment 10 03 X Y and Z Directions From the front of workchamber here are the directions of movement Table 1 Depo Nozzles X Y and Z Directions Axis Direction Limit X Right East Positive X Left West Negative Home Y Forward away from front Positive Y Back Negative Home Z Up Positive Z Down Negative Home At its retracted or Home position nozzles are at the middle of X lead screw Y back and Z up NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 3 task Specifically Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules Part 1 Power Up the System and Place the Chamber Under Vacuum Before performing the tasks described in this procedure you must power up the ion beam as described in Service Procedure 01 02 Then place the chamber under vacuum as described in Ser vice Procedure 04 03 Part 2 Coarse Alignment in Z Nozzles Cl
325. irror Alignment Note An indication of stage mirror alignment can be obtained by using a multimeter to check the voltage at the pins on the back of the receiver s while moving the stage to its positive and nega tive limits in x and y A lack of change in output voltage indicates that the stage mirrors are fairly well aligned 2 1 Using the motorshell program move the stage to its positive x limit Service Procedure 03 01 Stage Travel Limit Switch Inspection describes how to use the motorshell program to move the stage It is also possible to move the stage by turning the ends of the x and y drive motor shafts outside of the workchamber by hand or with a 3 8 box wrench but it is recommended that you use the motorshell program to move the stage 2 2 Figure shows the position of the x axis stage mirror within the workchamber Figure 2 shows the side view of the x axis stage mirror Note that there is a scribe line near the bot tom of the mirror The laser beams make contact with the area of the mirror above the scribe line this surface must not be scratched or damaged in any way The area below the scribe line is not contacted by the laser beams this is the area of the mirror that will be used with the dial indicator to check the stage mirror alignment 2 3 Use the adjustable dial indicator stand to position the dial indicator near the side of the x axis stage mirror see Figure 1 Adjust the height of the dial indicator stand so t
326. is Screws pus x axis interferometer Photo collector pi reference i mirror Laser y axis a interferometer Photo collector Dashed lines represent laser beam path k clim eren a E AT O a a A E a a 23 he J Bender Bender 1 Splitter 4 4 4 5 4 6 4 7 Page Figure 5 Top View of the Workchamber and Laser IF System Lid Closed Use a small slotted screwdriver to rotate the potentiometers on the sides of the receivers fully clockwise to maximize gain Use a multimeter to check the voltage at the pins on the back of the receiver An output voltage of 1 5 V minimum is an indication that the laser system is fairly well aligned but the system may still require alignment Rotate the aperture knob on the laser to the small aperture position Hold a piece of plastic or paper in front of the beam Rotate the aperture knob slightly until the spot on the paper or plastic is as bright and as round as possible Do not rely on the line s on the aperture knob for output alignment they should only be used as a rough indication of aperture position Hold an HP laser target over the input to beam bender 1 Loosen the laser mounting bolts 8 of 12 Revision B 3 97 Laser Alignment 03 05 4 8 4 9 4 12 4 13 and adjust the laser position un
327. is a photo of the X and Y alignment knobs Tools and Materials This procedure requires the use of the following materials Vacchat program NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 3 task Specifically Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules Revision B 3 97 Page 1 of 4 10 05 Funnel Alignment Part 1 System Preparation Configure the Chemical Sources in Safe Mode Before performing the tasks described in this procedure you must put the chemical sources in a safe mode see Service Procedure 02 01 WARNING Do not proceed until the chemical sources are secure The chemical reservoirs in FIB systems contain hazard ous materials Labels affixed to the exterior of a chemical cabinet identify the chemical s contained inside If a chemical source is not in its safest state as described in Service Procedure 02 01 it is possible for a combination of component failures to release the chemical s through a cabinet s delivery line a roughing line a purging line or from a chemical reservoir into the workchamber Do not open the workchamber or disassemble any part of the vacuum pumping system or detach any gas line from any chemical cabinet until you are sure that every chemical source attached to the
328. is not at 70 psi or there is improper pneumatic valve operation that you can attribute to low air pressure you may be able to adjust the pressure using the pressure reg ulator control on the fluids regulator panel The air pressure gauge on the fluids regulator panel should read 70 psi The gate valve V6 may not operate properly at pressures below 70 psi As in the case of the nitrogen pressure the need to make an adjustment indicates a change that you should investigate Consider the following The facility compressed air input pressure should be 80 to 100 psi A pneumatic component regulator pneumatic line or connection valve etc may have failed or is beginning to fail The gauge labeled solator Air is in the middle of the fluids regulator panel The isolation system air pressure should read 10 psi higher than the front isolator s gauge on the same side with the chamber floating 3 8 above the process module table see Service Procedure 08 02 Record the primary gauge pressure reading in the system logbook If the gauge pressure is less than 70 psi go to Service Procedure 08 02 for Vibration Isolator balance Revision B 3 97 Page 3 of 4 08 01 Fluids Regulator Pressure Check Page 4 of 4 Revision B 3 97 ZA Micrion Service Procedure No 08 02 Service Procedure Title Vibration Isolator Balance Adjustment Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service At installation an
329. is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Part 2 Locate the Trap When looking at the module from the front the foreline trap is located underneath the process module slightly to the left and rear It is connected in series between the loadlock and the rough pump Page 2 of 6 Revision B 3 97 Foreline Trap Element Replacement 04 06 Part 3 Isolate the Loadlock NOTE All automated programs no longer work in vacserver This includes autovent autopump down and calabrate functions This is a temporary situation and will be changed back in the next release of software 3 1 Use the vacserver program to close V1 also close V2 V3 V4 and V6 as a precaution See Figure 1 3 2 Turn off the rough pump using vacserver command rpn 8000 9800 MicroMill HT Vacuum System Schematic Dual Pump System Ion Pump ZN TC2 Yi Ga 277 7 Ky 77 V6 p Ly 7 6 TES Ionization Gauge HCIG CCIG To Exhaust Notes 1 Several seconds after the turbo pump is powered down the vent valve opens automatically to vent the pump with nitrogen 2 CA clamps the specimen holder to the stage 3 The MicroMill HT is not equipped with the GAE and Carbon cabinets 4 Some dual pump systems are not equipped with TC4 and VTI
330. ision B 3 97 ZA Micrion Service Procedure No 05 04 05 Service Procedure Title Flood Gun Removal and Replacement 5 nm Column Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service As needed Introduction The electron flood gun also called the E Gun provides charge neutralization of the sample The flood gun voltage is supplied by the flood gun supply board 150 001130 and is controlled by the flood gun interface board 150 001090 Materials and Tools Required Tie wrap Voltmeter with at least 10 Megohm input impedance Picoammeter Optional BNC Dual Banana Adapter Clip leads Coax cable 6 feet E Gun Board Test Circuit e Schematic 163 00342X E Gun Harness Clean standard field service tool kit This procedure uses diagnostic methods published in Tech Note 002 Flood Gun Diagnostics NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 5 task Specifically Equipment is energized and measurements and adjustments require physical entry into the equipment or equipment configuration will not allow the use of clamp on probes Installation Pre Check Prior to the installation visually check that the flood gun and the snout bore are free from contam ination Also perform the continuity checks to ensure that the filament is not open and none of the snout elements are shorted Revision B 3 97 Page
331. it on the mounting base Replace and snug tighten the three nylon screws that hold the reservoir heat sink combi nation to the mounting base Connect the power cable to the reservoir heater Insert the heat sink braid into the clamp and tighten the two screws Replace the gas tubes onto their proper fittings Clear tube GAE White tube O and Black tube TMCTS On the left side of the outside of the workchamber connect circular connector J1402 Page 6 of 12 Revision B 3 97 Dual Nozzle Replacement 10 02 Figure 3 Heat sink braid being installed Adjusting Limit Switches During Coarse Alignment Find the switches shown in Fig 4 l Y Home Z2 adjustment Y adjustment bracket bracket Z Home 70 Wome ee eta Y Plima D X Home X Plim adjustment bracket Figure 4 Dual mezzanine limit switches In Parts 7 and 8 you make coarse alignments in Z X and Y It may be necessary to adjust the limit switches for one or more of these axes Revision B 3 97 Page 7 of 12 10 02 Dual Nozzle Replacement Part 7 Coarse Alignment in Z Nozzles do not Contact the Stage With the chamber still vented exercise the replaced reservoir nozzle subassembly as follows 7 1 From the Microsurgery main menu select Depo Nozzle 7 2 From the pulldown menu select Retract 7 3 After the nozzle subassemb
332. itch S3 on the System Controller OFF Connect the voltmeter between pins T Grid and P Ground Switch the flood gun power switch S3 on the System Controller ON Sweep the grid slider slowly through its range and verify that the voltages are from 0 V to 100 V and that the system readbacks track the voltmeter If the readback differs from the voltmeter by more than 0 5 V the readback should be corrected as described in part 10 Check the cathode voltage control as follows a b poe Switch the flood gun power switch S3 on the System Controller OFF Connect the voltmeter to pins E or F Cathode Voltage and P Ground Switch the flood gun power switch S3 on the System Controller ON Sweep the cathode voltage slider slowly through its range and verify that the voltages are 0 V to 100 V and that the system readbacks track the voltmeter If the readback differs from the voltmeter by more than 0 5 V the readback should be corrected as described in part 10 Page 20 of 24 Revision B 3 97 05 04 05 Flood Gun Installation and Test Part 10 Grid and Cathode Voltage Readback Calibration NOTE If you replace the 1090 or 1130 board recheck the calibrations as described below This procedure is a means of compensating the grid and cathode readback process so that the readbacks accurately reflect the potentials being applied to the flood gun The technique is to introduce a numerical offset to the conversion of the 8 bit digital
333. itch is on hlorine Gas Cylinder If Installed Pneu Valve Shutdown Push Button Switch a 3 1 LH Hi Process Gas Shutoff Manual Valve 11 010 Figure 2 GAE Cabinet Layout with Br Pushing the illuminated Pneu Valve Shutdown push button switch light turns off closes all pneumatic valves in the GAE cabinet by removing the 24 volt dc power from the sole noid bank The motorized valve V17 is not affected by this switch Revision B 3 97 Page 3 of 10 11 03 Bromine Cylinder Replacement 1 7 Atthe FIB system workstation with the application software program running select GAE Control from the Misc pull down menu to display the Gas Control Popup dialog box see 3 Purge Check Valve On Off XeF2 Cl Br2 S Hug TC1 Rough via Pump Read back a RPI rci ooi0r le VACUUM CHAMBER vel zn i Isolation wiz E vis Shut off HCIG 2 70E 05 T Gas Assist Etching Click on V17 valve icon to get ale EE Edit text field or use up dn Select arrows to enter setpoint increment that up dn arrows change the set point by gae_v17_pop_popup ON opens valve and downloads setpoint OFF closes valve and down loads a setpoint of 0 00 SetPoint T LeakValve Downloads setpoint value Figure 3 Gas Control Popup Dialog Boxes Note The system updates TC1 only while RP1 is activated the system updates HC
334. ive clothing or equipment as required by your company Work hygienic practices handle in a fume hood wash after handling keep exposures below TLV PEL Page 2 of 2 Revision B 3 97 Material Safety Data Sheet MSDS Tetramethylcyclotetrasiloxane Emergency contact Chemtrec 800 424 9300 This MSDS is provided for general information only For information about the manufacturer of a particular chemical contact the environmental health and safety coordinator at Micrion Corporation 508 531 6464 Substance Identification Chemical name 2 4 6 8 Tetramethylcyclotetrasiloxane Chemical family Silicones Formula C4HgO4Si4Molecular weight 240 51 CAS 2370 88 09 Physical Data Clear colorless liquid ether like odor volatile by volume 100 Boiling point 135 CEvaporation rate 1 Vapor pressure 20 C 7 torrFreezing point 65 C Vapor density air 1 gt 8Specific gravity 0 991 Solubility in water insoluble Health Hazard Data Routes of entry inhalation skin absorption ingestion Health hazards acute and chronic irritated skin lungs and eyes Medical conditions generally aggravated by exposure Emergency and first aid procedures Inhalation remove victim to fresh air if breathing is difficult administer oxygen administer arti ficial repsiration if not breathing get immediate medical attention Ingestion If conscious rinse mouth with water induce vomiting get immediate medial attention Eye Con
335. ized for signal to nal Acquisition 1381 board tim be present ing signals are present without raster in progress TP4 TP5 TP6 Timing signals to the Analog Drive board timing signals are present only when raster is in progress P4 No signal to Sig Acq HSYNC VSYNC ADCLK PIXCLK board If these signals are present go to the Analog Drive 1082 board and test for presence of XDAC and YDAC Page 4 of 4 Revision B 3 97 ZA Micrion Service Procedure No 12 10 Service Procedure Title Signal Acquisition Board 1381 Applicable Systems All Frequency of Service As needed Introduction The Signal Acquisition board receives an analog imaging signal from the MCP and converts it to digital form The digital signals are passed to the Univision board in the computer module Tools and Materials Required Oscilloscope Function Generator or Test Box Micrion p n 100 14040 ELECTROSTATIC DISCHARGE This board is sensitive to electrostatic discharge Handle the board as follows 1 Touch your hand to the metal frame of the chassis to discharge static or wear a grounding strap 2 Hold the board by the ejector tabs 3 If you must lay the board down lay it component side down NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 5 task Specifically Equipment is energized Measurements and adjustments require physical entry into the equipme
336. just the brightness to black 2 2 Disconnect the 37 pin Univision connector 2 3 While scanning in Electron mode at Fast scan compare your signals with the waveforms shown in Figures 5 6 and 7 Table 2 Univision Board Scan Signals Video Data NEG VD0 VD7 Signal 37 Pin Connector to Univision Board See Fig 4 Pixel clock POS PIXCLK Pin 1 Pixel clock NEG PIXCLK Pin 20 Horizontal Sync POS HSYNC Pin 2 Horizontal Sync NEG HSYNC Pin 21 Vertical Sync POS VSYNC Pin 3 Vertical Sync NEG VSYNC Pin 22 Video Data POS VD0 VD7 Pins 8 15 Pins 26 33 Revision B 3 97 Page 5 of 8 12 10 1381 Board Part 3 Observing Video Data Bits on the Univision Connector 3 1 While scanning turn the Brightness knob to full black 3 2 Disconnect the 37 pin Univision connector and test the signals coming from J2220 of the rear of the SysCon module see Fig 4 3 3 With an oscilloscope check pins 8 15 They should be at logical 0 0 8V max 3 4 With an oscilloscope check pins 26 33 They should be at logical 1 2 5V min 3 5 Reconnect the 37 pin Unvision connector Rear of U Computer i To Univision board in Computer 20 UU UM 22 y From J2228 on rear of SysCon Figure 4 37 Pin Univision Connector at Rear of Computer Module Page 6 of 8 Revision B 3 97 1381 Board 12 10 Pin 1
337. keV Extractor Voltage V Extractor Current uA The blue box next to the Extraction Voltage readout Suppressor Voltage V Blanking Aperture Current uA On the column diagram click the Blanking Aperture read back numbers MCP Gain Voltage V Refer to the column diagram lon Faraday Current uA Click the on Faraday push button below the image win dow Electron Faraday Current uA Click the Elec Faraday push button below the image win dow Flood Gun Filament Current uA See the Electron Flood Gun Control popup Flood Gun Cathode Current uA See the Electron Flood Gun Control popup Beam Current Brightness for EX systems nA Fluid Valve Air psi Fluid Isolator Air psi Fluid DN2 psi Page 2 of 2 Revision B 3 97 ZA Micrion Service Procedure No 05 02 05 Service Procedure Title Cleaning the Lower Column Lens 2 Elements 5 nm Column Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Systems Frequency of Service As Needed Introduction When the workchamber is vented the column elements may become contaminated For the system to maintain optimal performance the column elements must be free of contaminants Be careful not to damage any part of the column during the cleaning procedure any scratches will ruin the lower column Lens 2 elements and any metal tracks left on ceramic surfaces cause serious problems with the column operation Clean the column elements only if you a
338. l MCP Interior View Page 4 of 14 Revision B 3 97 Remove Replace lon Beam Column 05 09 10 Lower Column Workchamber Lid Flood Gun Height Behind the Connector Flood Gun Lateral Positioning Screws 2 lt Flood Gun Side View of Flat Version of MCP pP Figure 2 Side View of Flood Gun Without Snout and Small MCP s Revision B 3 97 Page 5 of 14 05 09 10 Remove Replace lon Beam Column Lower Column MCP mounting screws 3 one hidden 4 Flood Gun Figure 3 Flood Gun With Snout and Large MCP Interior View Page 6 of 14 Revision B 3 97 Remove Replace lon Beam Column 05 09 10 Lower column MCP mounting screws 3 one hidden Figure 4 Flood Gun With Snout and Large MCP in 9800 System Interior View Revision B 3 97 Page 7 of 14 05 09 10 Remove Replace lon Beam Column Workchamber Flood Gun Height Positioning Screw Lower Column MCP Mounting Screws 4 Figure 5 Side View of Flood Gun With Snout and Large MCP Page 8 of 14 Revision B 3 97 Remove Replace lon Beam Column 05 09 10 Figure 6 Side View of Flood Gun Without Snout and Small MCP Flood Gun Lowered and MCP Disconnected Flood Gun Height Positioning Screw Lower Column MCP Mounting Screws 4 Figure 7 Side View of Flood Gun Without Snout and Small MCP Flood Gun Lowered and MCP Disconnected Revision B 3 97 Page 9 of 14 05 09 10 Remove Replace lon Beam Column
339. l Pump Down Dual fore and rough Pump Systems 3 1 3 2 3 3 3 4 3 5 3 6 3 7 Shut the workchamber lid and tighten the T screw on the front of the lid so that the switch block on the lid actuates the switch on the top right of the workchamber Make sure that the turbo pump controller is on and correctly configured If the controller has not been configured perform the configuration procedure described in section 4 of Service Procedure 04 05 Turbo Pump Replacement In an xterm window start the vacchat program by typing vacchat At the vacchat prompt check the status of the valves by typing SV The system will display the status of the valves ViC V2C V3C V4C V5C V6C VIO The valves should be in the states shown above V1 through V6 and should be closed and VI should be open see Figure 2 for valve locations If any of the valves V1 through V6 is open close each valve by typing the vacchat close command For example V1 is closed with the following command clvi If VI is closed open it by typing the following vacchat command opvi Start the fore pump by typing fpy Start the turbo pump by typing hpy Wait until the turbo pump reaches its operating speed 42 krpm before proceeding this will take approximately 5 minutes Check the status of the turbo pump by typing the fol lowing vacchat command sphp The system will display the status of the turbo pump If the turbo pump has not reached its
340. lation and Test Symptom Unstable Output Manually sweep the deflection voltage slowly using the small arrows in the popup A 0 1 V change on the deflection can have a big effect Watch the meter to see if the electron faraday cup current changes significantly If you see that the faraday cup current gets larger but then decreases steadily over a period of minutes or oscillates slowly something may be charging and either deflecting or suppressing the E gun output If the decrease is steady and does not return to the original value try varying the screen or deflec tion voltages If changing these potentials brings the beam back the beam is being deflected Pos sible causes of this are Deposits on the electron faraday aperture which should be cleaned about every month or whenever the gun is changed MCP E Gun aperture or deflectors Contamination in the gun Symptom Decreased Output E Gun aging Sometimes the gun life can be extended by increasing the grid voltage and readjusting the deflec tion Increase or decrease the grid voltage if the gun seems to be running out of electrons If you find a non standard setting that works well change Egun M to include this setting Revision B 3 97 Page 23 of 24 Flood Gun Installation and Test 05 04 05 Page 24 of 24 Revision B 3 97 ZA Micrion Service Procedure No 05 04 10 Service Procedure Title Flood Gun Removal and Replacement 10 nm Column Applicable Systems 8
341. le use a vacuum cleaner to clean the chamber before pumping down Tools and Materials Required vacchat software Revision B 3 97 Page 1 of 10 04 03 Pump Down Part 1 Automatic Pumpdown 1 1 Shut the workchamber lid and tighten the T screw on the front of the lid so that the switch block on the lid actuates the switch on the top right of the workchamber 1 2 Make sure that the turbo pump controller is on and correctly configured If the controller has not been configured perform the configuration procedure described in section 4 of Service Procedure 04 05 Turbo Pump Replacement 1 3 Make sure that the loadlock door is shut 1 4 In an xterm window start the vacchat program by typing vacchat 1 5 To pump down the system automatically type the autopump command ap 1 6 Allow the vacuum to draw the door tight then install and tighten the workchamber lid bolts Part 2 Manual Pump Down Single fore rough Pump Systems 2 1 Shut the workchamber lid and tighten the T screw on the front of the lid so that the switch block on the lid actuates the switch on the top right of the workchamber 2 2 Make sure that the turbo pump controller is on and correctly configured If the controller has not been configured perform the configuration procedure described in section 4 of Service Procedure 04 05 Turbo Pump Replacement 2 3 In an xterm window start the vacchat program by typing vacchat 2 4 At the vacch
342. le 1 The test measurement points are shown in Figure 8 If the measure ments do not match those in Table 1 contact Micrion Customer Support b Totesta flood gun with a snout use an ohmmeter to perform the continuity tests listed in Table 2 The test measurement points are shown in Figure 9 If the measurements do not match those in Table 2 contact Micrion Customer Support Page 10 of 22 Revision B 3 97 05 04 10 Flood Gun Installation and Test Grid Lead socket Terminal 1 Deflection Plates l m Leads pins b Saat Goma ED eu f Terminal 2 Deflection Plates Figure 8 Flood Gun Without Snout Continuity Test Points Table 1 Flood Gun Without Snout Continuity Tests From To Continuity Point A Point B Not Continuous Filament Lead 1 Filament Lead 2 Continuous Filament Lead either Ground Not Continuous Filament Lead either Grid Lead Not Continuous Terminal 1 Ground Not Continuous Terminal 2 Ground Not Continuous Case Ground Not Continuous Revision B 3 97 Page 11 of 22 Flood Gun Installation and Test Terminal 3 Focus Lens Terminal 1 Deflection Nx Deflection Plates Side View Bracket Ground Grid Lead socket Filament Leads pins Figure 9 Flood Gun With Snout Continuity Test Points Table 2 Flood Gun With Snout Continuity Tests From To Continuity Filament Lead 1 Filament Lead 2 Continuous
343. le switch to the OPEN position Figure 4 Valve Mode Switch MKS 244 Pressure Flow Controller When BT1 indicates base pressure close V15 and V16 Be sure to leave V13 open Watch BT1 for a rise in pressure which indicates a leak If a leak is indicated by a rise in BT1 close valve V13 and then disconnect the VCR coupling clean it and clean or replace the gasket Do not proceed until you have a leak free connection Open the manual Process Gas Shutoff valve on the outside of the GAE cabinet Open V15 and V 16 for final pumpdown to base pressure 3 If there is more than one MKS controller the controller for V17 may be identified by a strip of yellow cable marker tape Revision B 3 97 Page 9 of 10 11 02 Xenon Difluoride Cylinder Replacement 6 8 With valves V12 V13 V15 and V16 closed reactivate valve V17 as follows a In the Gas Control Popup click on the valve V17 icon to obtain the setpoint dialog box and make sure that the LeakValve toggle button reads OFF b Atthe control panel for the MKS 244 pressure flow controller locate the valve mode selector switch on the right hand end of the controller see Fig 4 c Rotate the switch clockwise to the EXT position and move the toggle switch to its middle position 6 9 Open the manual valve on the XeF cannister assembly by turning the unlabeled manual valve 1 4 turn counterclockwise 6 10 Open valve V13 6 11 In the setpoint dialog box for V17 typ
344. les 1486 and RS6000 Systems e 3 5 or 5 25 Diskettes Latest EPROM NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 3 task Specifically Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules 1 Only necessary on systems that are not currently equipped with a Raster Gen 150 001110 and a Signal Acquire 150 001381 REV C Revision B 3 97 Page 1 of 4 09 05 Upgrading to RS6000 Computer Part 1 Backing Up Data Files 1 1 Back up the usr micrion fib data directory as described in Service Procedure 09 01 It will be necessary for you to restore these files later on the new computer 1 2 Saving tiff files requires a 1 44Mb diskette for each file To save the tiff files on 486 type the command cd usr micrion fib data tiff flopon t tar filename Part 2 System Preparation Configure the Chemical Sources in Safe Mode Before performing the tasks described in this procedure you must put the chemical sources in a safe mode see Service Procedure 02 01 WARNING Do not proceed until the chemical sources are secure The chemical reservoirs in FIB systems contain hazard ous materials Labels affixed to the exterior of a chemical cabinet identify the chemical s contained inside If a chemical source is
345. lies synch signals via ribbon cable P4 to the Signal Acquisition board 1381 to synchronize A D conversion of the imaging data If there is no scan occurring test the Raster Generator board shown in Figure 1 then test the Ana log Drive board Service Procedure 12 07 Tools and Materials Required Oscilloscope ELECTROSTATIC DISCHARGE This board is sensitive to electrostatic discharge Handle the board as follows 1 Touch your hand to the metal frame of the chassis to discharge static or wear a grounding strap 2 Hold the board by the ejector tabs 3 If you must lay the board down lay it component side down NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 5 task Specifically Equipment is energized Measurements and adjustments require physical entry into the equipment Revision B 3 97 Page 1 of 4 12 09 Raster Generator Board Board number and revision level are stamped on the ejector o o 8 P4 o TP2 9 6 Te J3 TP3 P6 O 3 O Z Figure 1 Raster Generator Board 1110 Page 2 of 4 Revision B 3 97 Raster Generator Board 12 09 Part 1 Reloading the Raster Definition Data Using the rgshell program you can reload the raster definition data 1 1 Change directories to usr micrion fib data 1 2 In an xterm window type the following rgshell commands gt rgshell g
346. lignment 3 3 Use the Measure Tool in the FIB application program to verify that the y axis offset angle is as close to zero as possible Page 6 of 6 Revision B 3 97 ZA Micrion Service Procedure No 07 03 Service Procedure Title Scan Gain Calibration Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service After Scan Rotation Calibration Introduction Scan gain calibration calibrates the ion beam x y deflection distance using the silicon grid as a ref erence Errors in the deflection distance occur due to tolerances in the column the chamber the stage and other subsystems There are two variables in the ib data Column M file used to calibrate the deflection gain Column xcalgn and Column ycalgn Materials and Tools Required Fully operational stage and column e Micrion Constants Editor or comparable text editor Requirements and Order of the Procedure This procedure should be performed in conjunction with these Micrion Service Procedures and in this order Scan Rotation Calibration Scan Gain Calibration Pan Gain Calibration Pan Rotation Ortho Calibration Revision B 3 97 Page 1 of 4 07 03 Scan Gain Calibration Part 1 Procedure 1 1 With the power up turn off Scan Rotation Enable on the Knob Panel 1 2 Set the image mode to Electron Imaging is done without the flood gun for two reasons 1 charge neutralization does not work well on the silicon grid and 2 t
347. ll the carbon cabinet access panel on the cylinder bay and close the main bay door Open V32 and V33 and rough pump the delivery lines until BT3 reads lt 0 01 torr then close V32 and V33 and switch off the roughing pump Reactivate and close valve V35 as follows a Click on the valve V35 icon to obtain the setpoint dialog box If the LeakValve toggle button reads ON click on it so that it reads OFF 3 Whether or not the cabinet should be locked and who shall have custody of keys may be governed by site safety policy Revision B 3 97 Page 7 of 8 11 04 3 32 3 33 3 34 3 35 Carbon Cylinder Replacement b Atthe control panel for the MKS 244 pressure flow controller rotate the valve mode selector switch on the right hand end of the controller see figure 2 clockwise to the EXT position and move the toggle switch to its middle position Open valve V31 In the setpoint dialog box for V35 enter a setpoint of 40 and then click on the Leak Valve toggle button so that it reads ON Wait until BT3 stabilizes before proceeding Open V36 to admit styrene vapor to the workchamber The HCIG readback should indi caue a sharp initial rise in workchamber pressure but it should then stabilize at about 8 x 10 torr To place the carbon delivery system in an idle state Close valves V31 V35 and V36 b Switch on the roughing pump wait at least 30 seconds and then open valves V32 and V33 When BT3 reads ba
348. lock Interrupts unseen See step 2 8 by computer F1 F2 F3 FA 1A Micrion p n 540 000018 Switches LEDs not 1 ohm working but key board is all right Part 3 Interrupt Jumper Check the interrupt jumper which is set according to the type of computer in use Table 2 Jumpers Intel 486 INT 2 IBM 370 INT 5 Page 4 of 4 Revision B 3 97 ZA Micrion Service Procedure No 12 05B Service Procedure Title Knob Panel Interface 1810 Applicable Systems All Frequency of Service As needed Introduction The knob panel connects directly to the knob panel interface board via P3 and P4 The interface board notifies the computer of knob joystick and switch events as they occur The 1810 controls the keyboard as well as the knob panel Tools and Materials Required Oscilloscope Ohmmeter ELECTROSTATIC DISCHARGE This board is sensitive to electrostatic discharge Handle the board as follows 1 Touch your hand to the metal frame of the chassis to discharge static or wear a grounding strap 2 Hold the board by the ejector tabs 3 If you must lay the board down lay it component side down NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 5 task Specifically Equipment is energized Measurements and adjustments require physical entry into the equipment Revision B 3 97 Page 1 of 4 12 05B
349. loosen the bulkhead plate to gain access to the connectors See Figure 3 Disconnect the water lines from the barb fittings on the turbo pump by cutting the water line tubing as close to the barb fittings as possible 08 004B Figure 3 Turbo Pump Bulkhead The pump is now disconnected from the system Part 2 Pump Removal 2 1 Depending on system configuration there may be some cable harnesses that need to be lifted over the pump 2 2 Remove the cross piece that is horizontal to the floor connecting the front two legs CAUTION Use care when lifting and moving the pump which weighs approximately 85 Ibs 38 5 kg To avoid personal injury secure the help of another person 2 3 Loosen and remove the hose clamp securing the red vibration damping collar 2 4 Loosen the four bellows clamps see Figure 2 Page 4 of 8 Revision B 3 97 Turbo Pump V550 04 05 2 5 2 6 2 T Remove the pump from the adapter flange Slide the pump along the base plate towards the front of the system Be careful to clear the pump inlet screen You may have to adjust increase the air pressure to the isolators see Service Procedure 08 02 to gain an extra 0 5 maximum clearance Package the replaced pump for shipping as specified by the manufacturer or Micrion Product Support Return the pump to Micrion Part 3 Turbo Pump Replacement 3 1 3 2 3 3 3 4 3 5 3 6 3 7 3 8 3 9 3 10 3 11 3 12
350. lorine pressure regulator reads 30 Hg close the manual Vacuum valve e At the nitrogen cylinder open the output valve on the nitrogen pressure regulator f Slowly open the nitrogen pressure regulator turn the knob clockwise until the output pressure gauge reads 30 psig g Inthe GAE cabinet observe that the right hand gauge on the chlorine pressure regula tor reads 25 to 30 psig Close the manual Purge valve Part 7 Purge the Chlorine Delivery Lines 7 1 7 2 7 3 7 4 7 5 At the GAE cabinet purge the chlorine delivery lines as follows a The roughing pump should still be on if it is not switch it on and wait at least 30 sec onds for TCI to register 0 01 torr The manual valve Vacuum should be closed b In the GAE cabinet slowly open the manual valves labeled Purge and Process Gas to admit nitrogen When the right hand gauge on the chlorine pressure regulator approaches 30 psi close the Purge valve Slowly open the manual valve labeled Vacuum d Wait at least 30 seconds for TC1 to register 0 01 torr and then open V15 e When BT1 indicates base pressure 0 001 T close V15 and the manual valves labeled Process Gas and Vacuum One purge cycle is complete Repeat step 3 287 four times for a total of 5 purge cycles End with V15 closed the man ual Vacuum and Process Gas valves closed and the roughing pump on In the Gas Control Popup open valves V14 V15 and V16 On the outside of the GAE c
351. ls This procedure requires the following materials Clean room preferably with a class 100 airflow hood Clean standard field service tools completely free of oil and grease Lint free wipes Clean room gloves High intensity light source Aluminum foil Clean lens brush e Clean filtered dry nitrogen an ionizing N gun is preferred with sufficient pressure to blow off particles Cotton tipped applicators Acetone Silver paint NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment 82 93 this procedure is a Type 3 task Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules Revision B 3 97 Page 1 of 10 05 16 10 Blanking Aperture Replacement NOTICE TRAINING IS REQUIRED FOR THIS PROCEDURE Do not attempt to perform this procedure unless you have been properly trained Only qualified personnel should perform this procedure Parti System Preparation Configure the Chemical Sources in Safe Mode Before performing the tasks described in this procedure you must put the chemical sources in a safe mode see Service Procedure 02 01 WARNING Do not proceed until the chemical sources are secure The chemical reservoirs in FIB systems contain hazard ous materials Labels affixed to the exterior of a chemical cabinet identify the c
352. luminate particulates not visible in ambient light Rotate each sample holder to view its entire surface Use the nitrogen jet to remove any foreign matter If necessary repeat the cleaning procedure steps 2 1 through 2 3 Note no lubrication is necessary 2 5 Return the sample holder to its storage cabinet Revision B 3 97 Page 3 of 4 06 01 Sample Holder Inspection amp Cleaning Page 4 of 4 Revision B 3 97 ZA Micrion Service Procedure No 06 02 Service Procedure Title Loadlock Inspection and Cleaning Applicable Systems All Frequency of Service Monthly or prior to venting the system Introduction Because of exposure to air borne contamination during use the loadlock vacuum seal may deteri orate and develop leaks causing extended pumpdown time it is also a route of entry for contami nation into the system and column This procedure describes how to inspect and clean the loadlock and the loadlock vacuum seal Materials Required This procedure requires the use of the following materials Clean room vacuum cleaner Low lint wipes Laboratory grade isopropyl alcohol Braycote 803 vacuum grease Micrion part no 790 000006 or equivalent Clean room gloves High intensity light e High pressure N blowgun with 30 psi pressure or more WARNING Dangerously high voltage is present in the process mod ule while the FIB system is powered up All high voltage wiring is heavily insulated and connections are
353. lumn ycalgn value C Figure 3 Formula for More Precise Values of Column scalgn and Column ycalgn Using the Micrion Constants Editor insert the new values for Column xcalgn and Column ycalgninthe fib data Column M file For the changes in Columns M to take effect exit the X windows interface and the FIB application program by clicking the Quit amp Exit button in the Process Watcher At the shell prompt after exiting restart the X window system and the application program by typing xinit 1 7 Repeat steps 1 1 through 1 6 until the measured x and y values of the silicon grid lines are 35 0 05 um You can usually achieve a measurement of 35 0 02 um Revision B 3 97 Page 3 of 4 07 03 Scan Gain Calibration Page 4 of 4 Revision B 3 97 ZA Micrion Service Procedure No 07 04 Service Procedure Title Pan Gain Calibration Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service After Scan Gain Calibration Introduction Pan gain calibration measures the pan range and calibrates the coordinate display for panning It calibrates the ion beam pan deflection distance The pan circuitry must be calibrated so that the actual beam scanning distance is equal to the expected scanning distance Calibration involves calculating and setting two 2 variables in the usr micrion fib data Column M file VariableIndex Value Column pan cal0 value Column pan call1 value Th
354. ly is retracted from the same menu select Extend 7 4 Ifthe nozzles touch the stage you will see the vacchat message IN CONTACT with surface If the nozzles touch metal the depo motor driver stops If the nozzles touch non metal e g the mirror shown in Fig 5 the depo motor will not stop and no message will be reported In such a case the nozzles will continue to move even though in contact and they can be damaged In either case the Z upper limit switch must be adjusted so the nozzles clear the stage rails and the mirror by 2 mm or less but cannot touch SiGrid ElectronFaraday onFaraday oot Stage rail Mirror P d Stage rail Figure 5 Stage rails and mirror Note If the nozzles are adjusted higher than 2 mm they will touch the MCP on the column when the chamber is under vacuum 7 5 Ifthe nozzle is in contact with the stage raise the upper Home limit switch 7 6 Repeat steps 7 3 through 7 5 Page 8 of 12 Revision B 3 97 Dual Nozzle Replacement 10 02 Z Limit Switch Bracket Maimai E Bracket p X Limit Switch t Bracket eee Figure 6 Home Limit Switches 7 7 To retract the nozzle type the following vacchat command jr 7 8 Extend again and check that the nozzle subassembly follows the same path In Service Procedure 10 03 with the chamber under vacuum finer alignment is made Part 8 Coar
355. m Column Page 10 of 10 Revision B 3 97 ZA Micrion Service Procedure No 05 16 25 Service Procedure Title Blanking Aperture Replacement 25 nm Column Applicable Systems 8000 Micrion 9800 FlipChip Frequency of Service As Needed Introduction During normal operation the blanking aperture is sputtered by the ion beam Over time the beam will erode the blanking aperture This procedure describes the process of removing and replacing the blanking aperture in a FIB system Required Materials This procedure requires the following materials Clean room preferably with a class 100 airflow hood Clean standard field service tools completely free of oil and grease Lint free wipes Clean room gloves High intensity light source Aluminum foil Clean lens brush e Clean filtered dry nitrogen an ionizing N gun is preferred with sufficient pressure to blow off particles Cotton tipped applicators Acetone Silver paint NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment 82 93 this procedure is a Type 3 task Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules Revision B 3 97 Page 1 of 12 05 16 25 Blanking Aperture Replacement NOTICE TRAINING IS REQUIRED FOR THIS PROCEDURE Do not attempt to perform this procedure unless you ha
356. m Column in 8000 System Page 4 of 8 Revision B 3 97 Remove install MCP 05 03 25 MCP mounting screws 4 Figure 2 Interior View of Flood Gun and MCP 25 nm Column in 9800 System Revision B 3 97 Page 5 of 8 05 03 25 Remove nstall MCP Lower Column Workchamber Flood Gun Height Lid Positioning Screw Flood Gun Lateral Positioning Screws 2 MCP connector MCP Mounting Screws 4 Figure 3 Side View of Flood Gun and MCP Page 6 of 8 Revision B 3 97 Remove install MCP 05 03 25 Workchamber Lid Flood Gun Height Positioning Screw Lower Column N Wi TN J 4 MCP Mounting Screws 4 Figure 4 Flood Gun Lowered and MCP Disconnected Side View Part 3 Replacing the MCP 3 1 Fasten the replacement MCP to the bottom of the column with the four MCP mounting screws see Figure 4 3 2 Reattach the MCP electrical connector see Figures 1 2 and 3 3 3 Slide the flood gun subassembly up until it contacts the MCP as shown in Figures 1 2 and 3 Make sure that the flood gun is aligned with points directly at the center bore of the MCP Tighten the flood gun height positioning screw 3 4 Clean the workchamber see Service Procedure 06 03 then close the workchamber door 3 5 Power up the system as described in Service Procedure 01 01 and pump down the system as described in Service Procedure 04 03 Revision B 3 97 Page 7 of 8 05 03 25 Remove nstall MCP Page 8 of 8 Rev
357. m lines Close the valve on the top of the old cylinder first Remove plug and tag the old cylinder post removal disposition per site policy Inspect and install the new cylinder Leak check the coupling with 100 psig nitrogen and liquid leak detector Pump and purge the gas lines leading back to the new cylinder Reinstitute chlorine gas flow to the FIB system workchamber WARNING Both the old and new cylinders contain pressurized chlorine gas which is highly toxic and corrosive To mini mize the risk of potentially fatal exposure you must follow this procedure exactly Part 3 Pump and Purge the GAE System Lines 3 1 Make sure that the GAE cabinet exhaust system is operating correctly Because the GAE cabinet door will be open the greater the exhaust flow the better If the flow is limited by a gate valve in the exhaust duct note the position of the gate valve so that you can restore it later and then open it fully 2 Note Bypass the safety interlock shut off switch on the door of the GAE cabinet during this procedure For systems with this switch opening the cabinet door with this switch has the same effect as shutting off the Pneu Valve shutoff The switch shuts off the dc power controlling the pneumatic valves To bypass the switch with the cabinet door open press the back of the switch actuator toward you until it clicks into the extended bypass position 2 If the
358. mage is located in the screen center In the Micrion Stage Accuracy window click the Read button At this point the X Y Off set between theoretical and real current point values is displayed When you click the Set button the system calculates the X Y offset a yellow circle is dis played at that point in the Die Grid if the offset is 5 0 um or a red circle is displayed if the offset is gt 5 0 um Part 5 Generating a Report of All Offsets 5 1 After testing all points click the Report button in the Others subwindow This saves all offset data to the test_results dat file 1 In the Others subwindow the LoadData button reads the data stored in the test_results data file The 3D Report button generates a 3D graphic in the Die Grid subwindow in which the tested points are displayed Revision B 3 97 Page 3 of 4 03 04 Mic Stage Program Part 6 Loading Data from the mic stage config File You can load data from the mic stage config file Contents of mic stage config are as follows Table 1 Field Format Description DIESIZE Floating point xsize Real size of the die on the test reticle um and ysize um DIECOLROW Col integer and Number of columns and rows on the test Row integer reticle DIEPIXEL DiePix integer Size of the die in the graphics Die Grid subwindow ERRORPIXEL ErrPix integer Controls conversion for error radius displayed units are pixel um ERRORLIMIT ErrLim integer C
359. mical Materials Required This procedure requires the use of the following materials e Standard field service tools Nitrile rubber gloves Cylinder shutoff tool WARNING The chemical cabinets attached to FIB systems normally contain hazardous materials Labels affixed to the exterior of a chemical cabinet identify the chemical s contained inside If a chemical cabinet is not in its safest state as defined below it is possible for a combination of compo nent failures to release the chemical s through the cabi net s delivery line its roughing line or its purging line Do not open the workchamber disassemble any part of the vacuum pumping system or detach any gas line from any chemical cabinet until you are sure that every chemical cabinet attached to the FIB system is in its safest state Revision B 3 97 Page 1 of 6 02 01 Securing Chemical Sources Part 1 Secure the GAE Cabinet Configure the GAE cabinet in the safe mode as follows 1 1 Make sure that the GAE cabinet exhaust system is operating correctly Note the position of the exhaust gate valve so that you can restore it later Open the exhaust gate valve fully before opening the GAE cabinet door 1 2 Open the GAE cabinet door and by pass the safety interlock shut off switch as follows By pass the switch with the cabinet door open by pulling the switch actuator toward you until it clicks into the extended by pass position Opening the cabinet d
360. mmand to check that the motor speed is equal to or greater than the speed threshold 42 krpm sphp Page 6 of 8 Revision B 3 97 Turbo Pump V550 04 05 Press simultaneously to reach edit mode High Loadi Cycle Number Pump Current Cycle Time 4g 4 emperature Pump Life Power Start Low Speed Stop Reset lon pump panel Turbo pump panel Figure 4 Turbo V550 Controller Interface Part 5 Vibration Damping It may be necessary to tune or adjust the turbo pump bellows clamp once the system is back in operation Perform this operation using a beam image at high magnification as a diagnostic tool The system must be at the beam up operating level to perform the following steps 5 1 Zoom in on a recognizable stage feature such as the silicon grid Make note of any vibra tion present in the image 5 2 To eliminate or minimize any vibration due to the turbo pump you must adjust the damp ing material a lead and foam collar that surrounds the turbo pump bellows Adjust the bel lows as follows to eliminate or minimize any vibration in the image It may be necessary to repeat these steps several times a Adjust the location of the collar on the bellows b Adjust the tightness of the hose clamp securing the collar Revision B 3 97 Page 7 of 8 04 05 Turbo Pump V550 Page 8 of 8 Revision B 3 97 ZA Micrion Service Procedure No 04 06 Service
361. mocouples Each of them must be calibrated separately Part 2 Pumping Down to the Base Pressure One at a time for each thermocouple pump down its specific area until you are sure from experi ence that the base pressure has been reached For example for TC3 run the turbo pump until you are sure that the pressure is 0 001 torr or below Then you can confidently assume that the reading from TC3 should be 0 001 torr Revision B 3 97 Page 1 of 2 04 07B Thermocouple Calibration Part 3 Reading the Value of a Thermocouple 3 1 In a vacchat window type the follow commands su and password idy wrb0 01 rdb where is the number of the thermocouple idn 3 2 Record the hexadecimal value of the readout from the rdb command 3 3 With the following command send this hexadecimal value known as the calibration con stant to the computer cct nn where nn is the calibration constant from step 3 2 Part 4 Editing the Vacuum M File 4 1 Inthe Vacuum M file change the calibration constant on the following line tct cc 0 nn where nn is the calibra tion constant 4 2 Save the file and restart vacchat The computer calculates the correct ratio from this point until the next calibration the TC readout will then be accurate Shown in Fig 1 is a graph comparing readout and pressure for an ideal TC solid line with the readout and pressure for a typical TC dashed line On the horizontal scale the readout of the thermocouples i
362. more spaces Parameter name leftmost field a character string describing the parameter entry Index middle field distinguishes among two or more instances of the same parameter name For example in the Aperture M constants file the Aperture size parameter appears once for each limiting aperture For the first or only instance of a parameter the index field is set to 0 Parameter value rightmost field the only part of the parameter entry that you can change using the Constants Editor Start the Editor The Constants Editor is accessible through the Micrion Process Watcher popup dialog box or by typing the command cs edit in an xterm window Select a File for Editing Click the File button in the Constants Editor popup to get the pulldown menu shown in Figure 1 On the pulldown menu click the Constants Files selection to get the Open File popup The only file names that appear in the Open File popup are those that fit the general pathname in the Filter field By default this pathname is usr micrion fib data M All constants file names end with V as in Apertures M User M etc When you select a file the Constants Editor popup shows the file name and the contents of the file in the display area at the bottom of the popup To select a file for editing double click the file name in the Files list or click its name and then click the Open button Revision B 3 97 Page 1 of 4 09 04 Micrion Constants Edito
363. move the front panels to gain access to the workchamber door Once the system is completely vented open the workchamber door by removing the 1 2 socket head cap screws Page 2 of 10 Revision B 3 97 Remove Install MCP 05 03 05 WEAR GLOVES DO NOT HANDLE SOLVENTS When working inside the chamber or when handling any components that will be exposed to vacuum wear gloves rated for Class 100 environments or better Due to disinte gration of such gloves by solvents do not handle solvents or parts that are wet with solvent Part 2 Removing the MCP 2 1 2 3 2 4 After the system has vented open the workchamber Two types of flood gun MCP config urations are installed in FIB systems with 5 nm columns a flood gun without a snout com bined with a small MCP as shown in Figures 1 and 2 and a flood gun with a snout paired with a large MCP as shown in Figures 3 4 and 5 Wearing clean room gloves loosen the flood gun height positioning screw see Figures 6 and 7 and slide the flood gun assembly down to provide access to the MCP Remove the MOP electrical connectors see Figures 6 and 7 NOTICE DO NOT DROP MOUNTING SCREWS OR SPACERS Before removing and replacing the MOP place a clean lint free wipe below the MCP to prevent the mounting screws and spacers if applicable from falling into the turbo pump or the stage hardware If a screw or spacer is dropped into the workchamber be sure to retrieve it before pro
364. mp and tighten the two screws 10 5 Replace the gas tube into its proper receptacle 10 6 Connect the grounding wire 10 7 On the left side of the outside of the workchamber connect circular connector J1402 10 8 Follow the procedures in Parts 7 and 8 to coarsely align the nozzles in X Y and Z Revision B 3 97 Page 11 of 12 10 02 Dual Nozzle Replacement Page 12 of 12 Revision B 3 97 ZA Micrion Service Procedure No 10 03 Service Procedure Title Dual Nozzle Fine Alignment Applicable Systems Micrion 9800 FlipChip Frequency of Service After Nozzle Replacement Lateral Axis Alignment or Source Change Overview of the Alignment Procedures Alignment is the process of bringing a nozzle subassembly into the beam path close enough to the mask or wafer to enable milling or deposition The objective of this procedure is to minimize travel in all directions while achieving the necessary positions Care must be taken in wire routing to allow free travel on all axes In the alignment in X Y and Z axes it may be necessary to pump down and vent the chamber a number of times This procedure is organized to minimize the number of times you have to go through the pump and vent cycle Part 1 Power Up the System and Place the Chamber Under Vacuum Part 2 Coarse Alignment in Z Nozzles Clear the Column Part 3 Fine Alignment in X and Y Part 4 Fine Alignment in Z Part 5 Verifying Deposition Tools and Materials T
365. mple into workchamber These holders require monthly cleaning and inspection for mechanical damage The holders should be stored in a cabinet or container that protects them from mechanical shock contamination and moisture A desiccating cabinet with a constant flow of dry nitrogen is ideal Materials Required This procedure requires the following materials Clean room gloves Laboratory grade isopropyl alcohol Lint free wipes Dry nitrogen hose gun In addition the following is recommended High intensity lamp This procedure refers to Service Procedure 06 04 Transport Carriage Inspection NOTICE Follow the cleaning and de greasing procedures specified for your clean room The procedure that follows here calls for isopropyl alcohol This may NOT be appropriate for your clean room Revision B 3 97 Page 1 of 4 06 01 Sample Holder Inspection amp Cleaning Part 1 Inspection Procedure 1 1 Clear a work surface of any objects that might damage the holder s 1 2 Normally the holders are stored in a desiccating cabinet when not in use Wear gloves when removing a sample holder from the FIB transport carriage Place the sample holder on the work surface NOTICE WEAR GLOVES DO NOT HANDLE SOLVENTS When working inside the chamber or when handling any components that will be exposed to vacuum wear gloves rated for Class 100 environments or better Due to disinte gration of such gloves by solvents do not handle solv
366. n Removal and Replacement 5 nm Column Revision B 3 97 Page 5 of 6 05 02 05 Cleaning Column Elements Page 6 of 6 Revision B 3 97 ZA Micrion Service Procedure No 05 02 10 Service Procedure Title Cleaning the Lower Column Lens 2 Elements 10 nm Column Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Systems Frequency of Service As Needed Introduction When the workchamber is vented the column elements may become contaminated For the system to maintain optimal performance the column elements must be free of contaminants Be careful not to damage any part of the column during the cleaning procedure any scratches will ruin the lower column Lens 2 elements and any metal tracks left on ceramic surfaces cause serious problems with the column operation Clean the column elements only if you are reasonably cer tain that they have become contaminated Required Materials This procedure requires the following materials Clean room preferably with a class 100 airflow hood however a properly cleaned and prepared work area will be sufficient Clean standard field service tools completely free of oil and grease Lint free wipes Clean room gloves High intensity light source Aluminum foil Clean lens brush e Clean filtered dry nitrogen an ionizing N gun with at least 20 psi is preferred Cotton tipped applicators NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufa
367. n assembly 5 2 5 3 5 4 5 5 Figure 7 Remove the Lower Lens L2 Assembly If there is no clip on the end of the beam blanking assembly use cotton applicators and acetone to remove the silver paint on the outside diameter of the blanking aperture Insert a probe into the center bore of the blanking aperture and gently pry the blanking aperture loose NOTICE DO NOT CONTAMINATE THE COLUMN When removing the silver paint from the area of the blanking aperture do not contaminate the column with silver paint particles acetone silver paint residue or other contaminants Use cotton applicators and acetone to clean any remaining silver paint residue from the end of the beam blanking assembly Place the new blanking aperture in the shallow 0 004 deep counterbore on the end of the beam blanking assembly The blanking aperture must be seated in the counterbore to ensure proper alignment Place the blanking aperture clip over the blanking aperture and fasten it in place with the with the 0 80 pan head screw see Figure 8 Page 8 of 12 Revision B 3 97 Blanking Aperture Replacement 05 16 05 Blanking Aperture Beam Blanking Assembly Position in Column Top View of x Blanking Aperture Top View of Blanking ae ee Aperture Secured with Be si Clip New Method used M th d di only in MicroMill HT 1 ug cens systems with 5 nm columns Clip MicroMill HT only Screw holds Silver Paint used in clip in place all
368. n B 3 97 Page 3 of 6 07 04 Pan Gain Calibration 1 11 Using the Micrion Constants Editor edit the file usr micrion fib data Col umn M to change the Column pan cal variable to the value calculated in step 1 10 Column pan cal0 new value 1 12 To save the new value of Column pan cal index 0 exit the application program and the X window system with the Quit amp Exit button in the Process Watcher 1 13 To ensure that the application software is reading the new value for Column pan cal index 0 restart the X window system and the application program by typing the follow ing command at the shell prompt xinit 1 14 Repeat Part 1 until the measured value X is within 0 5 um of x1 x2 Part 2 Y Axis Pan Gain Calibration 2 1 Locate one of the large boundary areas on the silicon grid as shown in Figure 3 2 2 Using the 100 um aperture focus on the silicon grid under the following conditions 1 2 um field of view On the Tasks pulldown menu Readback is on lt Silicon Grid p y displayed delta lt N Reference Marks Figure 3 Image area for Y Axis Reference Marks Page 4 of 6 Revision B 3 97 Pan Gain Calibration 07 04 2 3 2 4 2 5 2 T 2 8 2 9 Be sure that on the Tasks pulldown menu Readback is on Table 2 Examples of values of Y Displayed Delta and Y Measured Variables Example Values
369. n Figure 2 wacchat VACUUM CONTROL HELP SESSION for neu stule Vacuum Controllers While in help these keys are useful return space d or f t to scroll forward b t to scroll backward Sgearch string t to search forward for string h t for more information on useful keys q or cntrl c t to leave help before all information has been displayed Notations SOQWC Square Markchamber Series 300072000 RIMC Round Workchamber Series 8000 9800 ooo eoe esso eoo e soe eese je soe oe e soe e soo e soe esee je Figure 2 Vacchat Help Session Instruction Screen The help session provides you with all the commands and their functions available in vacchat Page 2 of 2 Revision B 3 97 ZA Micrion Service Procedure No 09 04 Service Procedure Title Using the Micrion Constants Editor Applicable Systems All Frequency of Service As needed Introduction The Micrion Constants Editor is used for editing parameters stored in program constants files The Constants Editor changes only the value of parameters in a constants file It cannot be used for adding or deleting the parameters themselves nor can it be used for creating or deleting con stants files A constants file consists of a series of lines of ASCII text Lines beginning with the asterisk sym bol are comments ignored by the FIB application software Each non comment line is a param eter entry consisting of three fields separated by one or
370. n Supply board Table 1 DS1 As Indicator of Flood Gun Supply Flood Gun Supply voltages on the Flood Gun in DS1 Workchamber ON YES OFF NO except for 25V Part 2 Test Points for the Flood Gun Interface 2 1 Toreach the test points listed in Table 2 first power down as described in Service Proce dure 01 02 WARNING Dangerously high voltages are present while the FIB sys tem is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Ser vice Procedure 01 02 Do not proceed until you have switched off the applicable power supplies 2 2 Placethe Flood Gun Interface board on the Multibus extender board and plug the extender into the same slot 2 3 Putthe oscilloscope probe on TP2 and power the SysCon back up See Table 2 for signal characteristics Revision B 3 97 Page 3 of 4 12 11 2 4 Continue checking the test points in Table 2 Flood Gun Interface Board Table 2 Test Points for the Flood Gun Interface Test Point Function Signal Characteristics TP2 A D Clock 1 25 MHz square wave TP4 50 Hz square wave TRS Reference for DACs 10V TP7 Reference for DACs 10V U13 pin 14 Reference for DACs 5V Potentiometers R13 and R18 Do not adjust potentiometers R13 and R18 They cannot be accurately adjusted in the field Page 4 of 4 Revision B 3 97 ZA Micrion Serv
371. n function and allows manual control of the potentials applied to the flood gun elements This popup is accessible either through the Microsurgery program s Misc menu select E Gun Control or through the Beam Screen click on the flood gun graphic located to the immediate right of the image area An automatic calibration function is available through the Electron Flood Gun popup To use it make sure that the system is in ion imaging mode and then click on the Calibrate button in the popup The calibration function brings the electron faraday under the column sweeps the various flood gun control potentials to obtain optimum current in the faraday and then returns the stage to its former position To obtain popups for manually changing the potentials applied to the flood gun elements click on the graphical representations of the elements in the Electron Flood Gun popup For manual inter vention you must disable the flood gun maintenance software function with the Maintenance button in the Electron Flood Gun popup which monitors and adjusts the filament current to maintain constant emission cathode current Part 7 Checking the Flood Gun Boards 150 001130 150 001090 7 1 Ifthe system is currently up perform an Auto power down and switch off the System Controller Chassis as explained in Service Procedure 01 02 7 2 Remove all external connections from the 150 001130 board See Service Procedure 12 11 Flood Gun Supply Board for
372. n image of the ion faraday or by the ion faraday current reading 2 2 Adjust the focus to a 30 um field of view or smaller 2 3 Zero the stigmations 2 4 Focus the image with Lens 2 and stigmate the beam 2 5 Turn on the Lens 2 Wobble function For 10 nm and 25 nm columns this function varies the L2 voltage by 1000 V causing the image to go in and out of focus Any side to side or up and down motion however indicates that the aperture is not directly in line with the source and ion beam This type of motion must be eliminated 2 6 Eliminate most of the wobble using the aperture adjustment arrows in the Aperture Con trol popup The small arrows on the right and upper side 1 MicroMill HT systems do not have the wobble function you must turn the lens 2 knob on the knob panel back and forth to go in and out of focus by several hundred volts 2 Always approach alignment of the aperture using the small arrows if you overshoot move the aperture back the other way Page 4 of 6 Revision B 3 97 Column Alignment 05 13 NOTE Use the small arrows in the positive x and y directions to fine tune the aperture location If you go past an optimal position using the small arrows re track the aperture past the optimal location in the opposite direction using the large control arrow and then use the small arrow to fine tune the aperture location again 2 7 Findthe best location for the aperture based on the elimination o
373. n minutes then you should survey the site for the following sources of vibration Vibrations transferred from the floor Acoustic vibrations Electro magnetic interference Page 6 of 6 Revision B 3 97 ZA Micrion Service Procedure No 05 15 05 Service Procedure Title Aperture Shield Removal Inspection amp Replacement 5 nm Column Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service As Needed Introduction The spray aperture shield is constructed of solid tungsten During normal operation the aperture shield is sputtered by the ion beam tungsten is used because the atoms that are back sputtered from the tungsten onto the source do not degrade the source performance in fact they enhance source performance Over time however the beam will sputter through the tungsten When these atoms are back sputtered onto the ion source they cause source instability and eventual source failure This procedure describes the process of removing inspecting and replacing the aperture shield in a FIB System This procedure should be performed if the aperture shield has been in use for one year or sooner if the source is not stable In the case of source instability try heating the source Service Proce dure 05 11 before replacing the shield Materials Required This procedure requires the use of the following materials Clean standard field service tool kit Lint free wipes Clean room glov
374. n the bolts until the workchamber door makes contact with the O ring Revision B 3 97 Page 3 of 4 06 03 Workchamber Inspection and Cleaning 2 11 Pump down as described in Service Procedure 04 03 then tighten the door bolts Page 4 of 4 Revision B 3 97 ZA Micrion Service Procedure No 06 04 Service Procedure Title Transport Carriage Inspection and Alignment Applicable Systems 8000 Micrion 9800 Flip Chip MicroMill HT Frequency of Service Every Six Months Introduction An interlocking latch mechanism secures the transport carriage and the sample holder together during transportation of the sample holder in and out of the workchamber This procedure assumes that the drive tape is connected to the transport carriage Materials Required This procedure requires the following materials and equipment e Standard field service engineer s tool set Clean room gloves Lint free wipes Laboratory grade isopropyl alcohol This procedure refers to Service Procedure 06 01 Sample Holder Inspection and Cleaning NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 3 task Specifically Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules WARNING Dangerously high voltage is present in the process mod ule while the FIB system
375. nalog Drive Board and its test points and Table 1 lists the signal characteris tics of the test points Tools and Materials Required Oscilloscope ELECTROSTATIC DISCHARGE This board is sensitive to electrostatic discharge Handle the board as follows 1 Touch your hand to the metal frame of the chassis to discharge static or wear a grounding strap 2 Hold the board by the ejector tabs 3 If you must lay the board down lay it component side down NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 5 task Specifically Equipment is energized Measurements and adjustments require physical entry into the equipment Revision B 3 97 Page 1 of 4 12 07 Analog Drive Board Table 1 Analog Drive AD Board Test Points and Signal Characteristics Point Problem Signal Characteristics If Correct BSEL Analog drive is dead 200 500 nsec low going pulse when communicating with the board e g turning MAG knob continu ously XDAC No scan see Raster Gen In XY display mode you will see a filled square board first test AD see if Sawtooth if line scan or Triangular if serpentine raster definition data has 10V to 10V signal amplitude been loaded freq scan size x dwell time retrace YDAC 2 No scan see Raster Gen In XY display mode you will see a filled square Service Procedure 12 09 Sawtooth if line scan
376. nder assembly 2 5 Enable the reservoir cooler 2 6 Pump the gas lines leading back to the new cylinder assembly and leak check the instal lation 2 7 Wait for the reservoir to cool 2 8 Reinstitute gas flow to the FIB system workchamber Page 2 of 8 Revision B 3 97 Carbon Cylinder Replacement 11 04 Click on valve icon to get setpoint dialog box Edit text field or use up dn Selects arrows to enter new setpoint increment by which ON opens valve and up dn downloads setpoint OFF arrows closes valve and down change loads a setpoint of 0 00 setpoint Downloads setpoint value Figure 1 Gas Control Popup Dialog Boxes CAUTION Both the old and new cylinders contain styrene which is flammable carcinogenic may irritate eyes and nose and may otherwise be harmful if inhaled ingested or absorbed through the skin To minimize the risks of exposure and fire you must follow this procedure exactly Revision B 3 97 Page 3 of 8 11 04 Carbon Cylinder Replacement Part 3 Procedure 3 1 At the top left hand top corner of the outside rear of the cylinder bay on the carbon box loosen the screws that secure the electrical connector for the reservoir cooler and discon nect it 3 2 Make sure that the carbon cabinet exhaust system is operating correctly Note that the pushbutton switch near the door handle on the cabinet s main bay door should be illumi nated lime green dc po
377. ne at the boundary c Click the left mouse button to close the boundary of the box In the Edge Lock Profile window the edge lock curve profile of the material is shown The program scans the profile calculates the intensity of the image and converts it to a histogram 1 3 In the Misc pull down menu select Curve Data Base 1 4 From the Curve Data Base Manager window select the New button The current edge lock profile in the Edge Lock Profile window is placed in the Curve Data Base Manager window with the default name Temp Curve 1 5 In the Curve Data Base Manager perform the following a Click on the Curve Name box b Type the name of the profile for example XYZ and press Enter c Click on Save Two messages appear Saving changes in database and Done Page 2 of 6 Revision B 3 97 Reference Curve Calibration 07 08 Part 2 Add a New ABB Curve to the Data Base Adaptive Beam Blanking curves can be resized As the operator chooses the line that marks the boundary between black and white areas can be moved Add a new ABB curve to the Data Base Select an ABB repair type from Main Control Panel menu Select Draw Box from the Accelerator pulldown Define a box along the boundary of the two materials Click on Start Repair _ Select Curve Data Base from Misc pull down menu Select the New button Type the name of the curve profile in the Curve Name box Click on the Save button Adding ABB
378. ng any com ponents that will be exposed to vacuum wear gloves rated for Class 100 environments or better Due to disintegration of such uw gloves by solvents and the possibility of contaminating parts do not handle solvents or parts that are wet with solvent Using a high intensity light examine the inside of the workchamber Look for particulate contamination To see particles clearly shine the light over the surfaces at a low angle Using the clean room vacuum cleaner and the N blowgun clean the inside of the work chamber including the walls and interior door surface Be sure to clean out the gate valve V6 between the loadlock and the workchamber where dust from samples accumulates At completion of this task no dust should be visible in high intensity light Move the stage to the left rear corner in the workchamber and vacuum the right rear corner of the workchamber Using a high intensity light examine the inside of the workchamber Look for particulate contamination To see the particles easily direct the light on the surfaces at a low angle Vacuum the workchamber using the DN gun to dislodge particles from areas that are inaccessible to the vacuum cleaner Use lint free wipes if necessary Use lint free wipes to remove any surface contaminants Clean the stage being careful not to move the grids mirrors or lead screws After thoroughly cleaning and vacuuming all areas of the workchamber close the door and tighte
379. ng over the port on the workchamber in the correct orientation Gently lower the column housing straight down into the port Rotate the column housing as necessary for proper alignment of the bolt holes on the col umn housing and the process module Replace the four mounting bolts in their original holes on the mounting flange Check the O ring and adjacent surfaces on the top of the column housing and the bottom of the ion gun assembly for cleanliness Position the column cap assembly over the column and gently place it on the column housing Rotate it as needed for proper alignment Tighten the two alignment screws that were initially loosened Making sure that the pin is centered connect the circular connector to the Deflection input Connect all high voltage cables and signal cables to the column see Figure 8 NOTICE AVOID BENDING PINS Be careful when reconnecting the 3 pin and 20 pin connectors The pins are easily bent Connect the vacuum bellows from the ion pump to the column Reattach the MCP connectors inside the chamber see Figures 6 and 7 Loosen the flood gun height positioning screw and slide the flood gun up until the lower portion of the flood gun assembly contacts is flush against the lower column see Figure 2 If necessary loosen the lateral positioning screws and adjust the lateral position of the flood gun to obtain a good fit against the lower column Make sure that the flood gun is aligned with poi
380. ng the KF clamp connecting the roughing line to the loadlock Page 2 of 4 Revision B 3 97 Adjusting the Stage Limit Switches 03 01B FRAGILE v With the workchamber door open several pieces of deli cate equipment are exposed Take great care not to dis turb the gas delivery systems and deposition nozzles the electron flood gun and the microchannel plate MCP all of which are located at or near the bottom of the ion beam column Switch breaker Switch breaker Switch breaker for xplim crews for xnlim aN s3 E C MMC UD D eiiis ru M EH r Switch breaker S6 ynlim for ynlim E LU Switch breaker o 00 41 screws Switch breaker for yplim o o Stage Front S9 x yplim Limit switches J1401 Pins 1 Xplim to J1401 pin V 3 Xnlim to J1401 pin U S6 Ynlim to J1401 pin B S9 Yplim to J1401 pin H 11 YLoad to J1401 pin D Figure 1 Stage Travel Limit Switches Revision B 3 97 Page 3 of 4 03 01B Adjusting the Stage Limit Switches Part 2 Adjusting X and Y Limit Switches If in comparison with Table 1 in Service Procedure 3 1A the x or y limit positions change more than 2000 um adjust the appropriate limit switch See Fig 1 Directions given in Table 1 are as shown
381. ng the cleaning procedure any scratches will ruin the lower column Lens 2 elements and any metal tracks left on ceramic surfaces cause serious problems with the column operation Clean the column elements only if you are reasonably cer tain that they have become contaminated Required Materials This procedure requires the following materials Clean room preferably with a class 100 airflow hood however a properly cleaned and prepared work area will be sufficient Clean standard field service tools completely free of oil and grease Lint free wipes Clean room gloves High intensity light source Aluminum foil Clean lens brush e Clean filtered dry nitrogen an ionizing N gun with at least 20 psi is preferred Cotton tipped applicators NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment 82 93 this procedure is a Type 3 task Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules Revision B 3 97 Page 1 of 6 05 02 25 Cleaning Column Elements NOTICE TRAINING IS REQUIRED FOR THIS PROCEDURE Do not attempt to perform this procedure unless you have been properly trained Only qualified personnel should perform this procedure Parti System Preparation Configure the Chemical Sources in Safe Mode Before performing the tasks describ
382. not wish to vent the workchamber see Ser vice Procedure 06 02 Page 2 of 2 Revision B 8 96 Section 7 Deflection System 07 01 Lateral Axis Alignment Not included not applicable 07 02 Scan Rotation Calibration 07 03 Scan Gain Calibration 07 04 Pan Gain Calibration 07 05 Pan Rotation Ortho Calibration 07 06 Center of Rotation Calibration 07 07 Mux Shift Calibration 07 08 Reference Curve Calibration and Database Update Revision B 3 97 Page 1 of 2 Page 2 of 2 Revision B 3 97 ZA Micrion Service Procedure No 07 02 Service Procedure Title Scan Rotation Calibration Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service After Column Alignment or Replacement Introduction This procedure aligns the x scan axis with the x stage axis then aligns the y scan axis so that it is orthogonal to the x scan axis Misalignment can be caused by mechanical tolerances in the col umn the chamber the stage and other subsystems The outline of the procedure is as follows Determine current x axis misalignment in degrees e Adjust x axis alignment using R116 on Analog Drive board Measure new default x axis offset angle Determine current y axis misalignment in degrees e Adjust y axis alignment using R103 on Analog Drive board Materials and Tools Required This procedure requires the following equipment Fully operational stage and column under vacuum e Small slotted s
383. ns For packaging and transport use either bottles of drums of glass or polyethylene do not store near flammable or explosive materials Other precautions Keep away from fire heat sources or hot surfaces no smoking is compulsory in working areas Avoid contamination of tobacco products Spill or Leak Procedures Eliminate free flames from the area stop the leak and absorb the liquid with sand and send to dis posal Waste disposal methods Landfill according to local state or federal regulations or neutralize using high temperature pyrolysis in special equipment asking producer for advice Page 2 of 2 Revision B 3 97 Material Safety Data Sheet MSDS Gallium Ingot Emergency contact Chemtrec 800 424 9300 General comments The fire explosion and reactivity data given herein are derived from sources that address the hazards incurred in storing and handling large quantities whereas a relatively small amount is used in this application Substance Identification Generic name Gallium ingotCAS Registry Number 7440 55 3 Chemical Formula Ga Active 100 Physical Data Physical description Odorless grey metal or silvery liquid Percent volatiles by weight OBoiling point subl 2403 C Melting point 29 78 C Vapor pressure 20 X mmHg essentially 0 Specific gravity 5 907 6 09 liquid Solubility in water Insoluble Fire and Explosion Hazard Data Flash point not applicable Extinguishing agents material does not
384. nt Revision B 3 97 Page 1 of 8 12 10 1381 Board TP13 08 100 0S1 NOIWODIIN Board number and revision level are stamped on the ejector TP1 TP2 9 TP3 TP4 9 TP5 TP6 9 BEP j BP Jc EN 7 I J8 TP AGN e TP9 TP7 TP10 TPs 9 Figure 1 1381 Signal Acquisition Page 2 of 8 Revision B 3 97 1381 Board 1381 Signal Acquisition 12 10 First try TPs 1 2 7 8 11 and 12 For the remaining test points use an extender board Table 1 1381 Test Points Test Point Problem Signal Characteristics if Correct TP1 Imaging video electronics With HV enabled and the scan at Stop the gain See Part 1 DC voltage at TP1 should be 1V to 2V With scan at Start TP1 has a video signal summed with the dc level in electron mode 200mV to 300mV p p TP1 The amplifier on the signal acquisition board can be checked as follows Disconnect the light link cable cover the light receiving diode 100 mVoff set max TP2 Brightness control video 5VDC to 5VDC can be adjusted across full electronics gain See Part 1 range by means of the brightness knob TP3 TP6 Multiplex imaging quad With HV enabled and the scan at Stop and Q4 Q1 anode MCP video amplifi after calibration using pulldown menu DC ers video electr gain see voltage at all test points TP2 within 10 Part 1 mV TP7
385. nts directly at the center bore of the MCP see Figures 1 2 3 4 and 5 Tighten the height and if used the lateral positioning screw s Close the workchamber and pump down the system see Service Procedure 04 03 Enable the high voltage power supplies Cure the column see Service Procedure 05 12 10 Heat the ion source see Service Procedure 05 11 Calibrate the deflection control system as described in Section 7 of this manual Revision B 3 97 Page 13 of 14 05 09 10 Remove Replace lon Beam Column Page 14 of 14 Revision B 3 97 ZA Micrion Service Procedure No 05 09 25 Service Procedure Title Column Removal and Replacement 25 nm Column Applicable Systems 8000 Micrion 9800 FlipChip Frequency of Service As needed Introduction This procedure describes the process of removing and replacing the ion beam column in the FIB system Materials Required This procedure requires the use of the following materials Clean standard field service tool kit Lint free wipes Clean room gloves Laboratory grade isopropyl alcohol Port blanking plates for the ion pump column port and process module column port NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 3 task Specifically Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 24
386. number of diskettes you need 1 diskette 1 4 If more than one diskette is required label the diskettes with the date of the backup the machine you are backing up and the numbering sequence of the diskettes for example of 10 2 of 10 etc Page 2 of 4 Revision B 3 97 Archiving Restoring Files using arctool 09 01 Part 2 Gaining Access to arctool 2 1 Ina terminal window type arctool The Micrion Archive Tool window appears Part 3 Formatting Diskettes 3 1 To format diskettes select Format in the Micrion Archive Tool window Part 4 Archiving Restoring Files To see a full explanation of the tools and the procedure used to archive and to restore files select Hints from the bottom of the Micrion Archive Tool window Revision B 3 97 Page 3 of 4 09 01 Archiving Restoring Files using arctool Page 4 of 4 Revision B 3 97 ZA Micrion Service Procedure No 09 02 Service Procedure Title Setting Time and Date on IBM RS6000 Computers Applicable Systems All Frequency of Service As Needed Introduction This procedure describes how to set the system date time and time zone on an RS6000 based workstation using the System Management Interface Tool SMIT You must know the root pass word for the system that you are working on Part 1 Set Date and Time 1 ON OAR WD In an xterm window change to super user and type the root password when prompted su H root s Password You are now logged in
387. nusual fire amp explosion hazards None Health Hazard Data Hazardous exposure levels no data Effects of overexposure no data Emergency amp first aid procedures Eye contact Flush with running water for 15 minutes get medical attention immediately Skin Contact Remove any contaminated clothing wash exposed areas thoroughly with soap and water for at least five minutes Inhalation Remove the victim to fresh air and seek medical attention if coughing shortness of breath or irritation persists Ingestion Give the victim plenty of water and seek medical assistance Reactivity Data Stability air and moisture stable Conditions to avoid none Incompatible materials oxidizing agents and active metals Hazardous decomposition products carbon monoxide carbon dioxide hydrogen fluoride Revision B 3 97 Page 1 of 2 organic fumes and platinum salts Hazardous Polymerization none Spill or Leak Procedures If material is released or spilled sweep up Waste disposal method Follow federal state and local regulations Special Protection Information Respiratory Protection NIOSH MSHA approved mask with organic vapor cartridge for emergency use NIOSH MSHA approved self contained breathing apparatus Ventilation Provide adequate local exhaust and general ventilation Protective gloves Yes Eye protection chemical safety goggles or face shield Other protective equipment none special Page 2 of 2 Revision B 3 97
388. ny contam inants you find Clean the rest of the column throughly including the ion gun 3 3 Clean the interior of the lower shield Page 4 of 6 Revision B 3 97 Cleaning Column Elements 05 02 10 GROUND CONE ELECTRODE 1 HV2 CONE ELECTRODE 1 DO NOT LOOSEN OR REMOVE THESE FOUR SCREWS INSULATING ROD HV SPACER 1 30 ALUM 3 DO NOT ALLOW ANY METAL TO TOUCH GROUND ELECTRODE SPACER 4 LOWER COLUMN Figure 2 Lower Column Lens 2 Without Shield 3 4 Reinstall the lower shield in its original rotational position The center bores of the lower shield and the Lens 2 assembly should be concentric centrally aligned 3 5 Clean the workchamber as described in Service Procedure 06 03 and the ion pump con nector tube 3 6 Reinstall the column as described in Part 5 of Service Procedure 05 09 10 Column Removal and Replacement 10 nm Column Revision B 3 97 Page 5 of 6 05 02 10 Cleaning Column Elements Page 6 of 6 Revision B 3 97 ZA Micrion Service Procedure No 05 02 25 Service Procedure Title Cleaning the Lower Column Lens 2 Elements 25 nm Column Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Systems Frequency of Service As Needed Introduction When the workchamber is vented the column elements may become contaminated For the system to maintain optimal performance the column elements must be free of contaminants Be careful not to damage any part of the column duri
389. o MNT d for yplim E Front NS S11 yplim Limit switches J1401 Pins 1 Xplim to J1401 pin V S3 Xnlim to J1401 pin U S6 Ynlim to J1401 pin B S9 Yplim to J1401 pin H 11 YLoad to J1401 pin D Figure 1 Stage Travel Limit Switches 1 5 In an xterm window begin the motorshell program Page 2 of 4 Revision B 3 97 Stage Travel Limit Switch Inspection 03 01A 1 6 1 7 1 8 In the motorshell program type gt xstage At the xstage prompt type gt read_nlimit The following message indicates that the plimit switch has been actuated hex 1 dec 1 If not 1 this may indicate a problem with the limit switch Repeat steps 1 6 and 1 7 by typing the name of another axis and reading the nlimit switch status Part 2 Checking Any Limit Switch To check the x and y limit switches you can exercise the stage motors The following numbered procedure is to be used along with Table 1 2 1 In an xterm window begin the motorshell program 2 2 Type the name of the axis whose limit switches you want to check 2 3 Type the move command to move the stage in the positive direction 2 4 When the stage stops moving check the Stage popup 2 5 In motorshell type the read_plimit command The following message indicates that the plimit switch has been actuated hex 1 dec 1 Table 1 Checking the Limit Switch Readbacks with Motorshell Gommarid Stage Position Axis on Microsurgery Read nlimit Read plimit Sequence Scr
390. o an operating vacuum level See Service Procedure 04 03 3 2 Start Microsurgery Refer to Service Procedure 04 07B Page 2 of 2 Revision A 3 97 ZA Micrion Service Procedure No 04 07B Service Procedure Title Thermocouple Calibration Applicable Systems All Frequency of Service Semiannually and at the installation of a new system or a new TC Introduction The readout from a thermocouple TC may vary due to manufacturing tolerances or to chemical contamination As a result for example a pressure of 0 001 torr may be reported by a TC as 0 020 torr This procedure describes the manual method for calibrating a thermocouple The way to calibrate a thermocouple is to measure its error and then enter it in the Vacuum M file The computer then calculates the ratio of the error to the base pressure i e the lowest possible pressure from that portion of the vacuum system and uses this ratio to determine the correct readout The steps in the procedure are as follows Determining the number of thermocouples installed Pumping down the system to an assumed base pressure e g for TC3 0 001 torr e Reading the value of each thermocouple Editing the Vacuum M file with the new value Tools and Materials Required Vacchat Software Part 1 Determining the Number of Thermocouples 1 1 In an xterm window running the vacchat program type the thermocouple status com mand st The screen displays all ther
391. o not handle solvents or parts that are wet with solvent NOTICE LOWER COLUMN ELEMENTS ARE FRAGILE Handle the lower column and its elements with great care Any scratches will ruin the lower column Lens 2 elements Also any metal tracks left on ceramic surfaces cause serious problems with the column operation Part 3 Column Cleaning 3 1 3 2 Under high intensity light examine the column for contaminants NOTE The high intensity light must shine across the surface of interest at a shallow angle Otherwise you will illuminate everything evenly making particle detection diffi cult The exposed lower column Lens 2 will be upside down on the workbench Figure 2 shows the lower column elements Use the lens brush cotton tipped applicators and nitrogen to gently clean off any contam inants you find Negative element surfaces are especially susceptible to particulate con tamination Clean the rest of the column throughly including the ion gun Clean the interior of the lower shield Page 4 of 6 Revision B 3 97 Cleaning Column Elements 05 02 25 Inspect these surfaces under high intensity Contamination or damage to tube or ball is the likeliest problem HV Tube HV Ball Beam Blanking Assembly outline Cap Screws 5 2 shown Figure 2 Lower Column Lens 2 Without Shield 3 4 Reinstall the lower shield in its original rotational position The center bores of the lower shield and the Lens 2
392. o particulate contaminants Clean the interior of the lower shield NOTICE LOWER COLUMN ELEMENTS ARE FRAGILE Any scratches will ruin the lower column Lens 2 elements Also any metal tracks left on ceramic surfaces cause serious problems with the column operation Part 8 Reassemble and Reinstall the Column 8 1 8 2 8 3 Reinstall the lower shield and MCP in their original rotational positions The center bores of the lower shield and the Lens 2 assembly should be concentric centrally aligned Clean the workchamber as described in Service Procedure 06 03 and the ion pump con nector tube Reinstall the column as described in Part 5 of Service Procedure 05 09 25 Column Removal and Replacement 25 nm Column Revision B 3 97 Page 11 of 12 05 16 25 Blanking Aperture Replacement Page 12 of 12 Revision B 3 97 Section 6 Loadlock Workchamber 06 01 Sample Holder Inspection and Cleaning 06 02 Loadlock Inspection and Cleaning 06 03 Workchamber Inspection and Cleaning 06 04 Transport Carriage Inspection and Alignment Revision B 3 97 Page 1 of 2 Page 2 of 2 Revision B 3 97 ZA Micrion Service Procedure No 06 01 Service Procedure Title Sample Holder Inspection and Cleaning Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service Monthly Introduction The FIB system is equipped with sample holders mask or wafer holders or head array carriers that carry the sa
393. o recover pro ceed as follows 5 1 5 1 5 2 5 3 5 4 Switch the computer off Release the Emergency button above the SysCon section from its detented position Press the green ON button next to the Emergency button Switch the computer on Log back in to the computer the application restarts automatically see Service Procedure 01 01 Page 12 of 12 Revision B 3 97 Section 2 Chemical Safety 02 01 Securing Chemical Sources in Safe Mode MSDS Apiezon A Oil MSDS Perfluorinated pPolyethers Fomblin MSDS Gallium Ingot MSDS Oxygen MSDS Platinum II hexafluoroacetylacetonate MSDS Styrene MSDS TEOS Tetraethoxysiloxane MSDS TMCTS Tetramethylcyclotetrasiloxane MSDS Tungsten carbonyl MSDS Xenon difluoride Revision B 3 97 Page 1 of 2 Page 2 of 2 Revision B 3 97 ZA Micrion Service Procedure No 02 01 Service Procedure Title Securing Chemical Sources in the Safe Mode Applicable Systems All Frequency of Service As needed Introduction This procedure describes the process of securing the chemicals in the system so that maintenance and repair procedures can be carried out safely To reduce the risk of accidental exposure to toxic chemicals while working on the FIB system place the chemical subsystems in the safe mode as specified in this section Before venting and opening the FIB process module let the system run under high vacuum for 12 24 hours after using any che
394. o that it reads ON Open valve V12 to begin admitting gas to the workchamber Observe the BT1 readback it should continually register 1 torr indicating that the gas flow is being properly regulated Close valves V12 V19 and V17 Pump Br from the common delivery lines a Switch on the roughing pump and wait 30 seconds until TC1 reads lt 0 01 torr b Open valves V15 and V16 c Wait until BTI registers base pressure d Close V15 and V16 e Switch off the roughing pump If Cl and XeF are installed open the manual valve between V14 and the Cl pressure regulator and the manual valve between V13 and the XeF cannister Restore GAE cabinet ventilation to the normal flow rate by adjusting the gate valve Remove the bypass for the shut off safety interlock switch on the GAE cabinet door Close the GAE cabinet 3 If you jumpered the high low flow sensor be sure to remove the jumper after the correct flow is restored 4 Whether or not the GAE cabinet should be locked and who shall have custody of keys may be governed by site safety policy Revision B 3 97 Page 9 of 10 11 03 Bromine Cylinder Replacement Page 10 of 10 Revision B 3 97 ZA Micrion Service Procedure No 11 04 Service Procedure Title Carbon Cylinder Replacement Applicable Systems 8000 Frequency of Service As Needed Do not undertake the procedure described herein without prior training and authorization by Micrion Corporation Do not use t
395. of 12 Revision B 3 97 ZA Micrion Service Procedure No 05 11 Service Procedure Title Gallium Source Heating Applicable Systems 8000 Micrion 9800 FlipChip Frequency of Service After curing the column Introduction The source must be heated following installation or system pumpdown even if the source turns on prior to heating The column should be cured before the source is heated This procedure describes the following Determining the hours logged for a source Powering down to swap high voltage Filament cables Heating procedure for source Part 1 Determining the Hours Logged for a Source Micrion systems run the Log File Utility program in the background to log the hours of operation of the ion source To start this utility program type 1og main at the prompt in an xterm window 1 1 In the Log File Utility popup select Ion Source with the Device button 1 2 Tosee the total hours logged on the source choose the most recent log file and select View This assumes that the source was listed in the log file when it was installed NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 5 task Specifically Equipment is energized and measurements and adjustments require physical entry into the equipment or equipment configuration will not allow the use of clamp on probes Revision B 3 97 Page 1 of 4 05 11 Gallium Source Heating Part 2
396. of exposure coughing difficulty breathing burning eyes and nose Medical conditions generally aggravated by exposure no data available Emergency and first aid procedures Inhalation remove victim to fresh air if breathing is difficult administer oxygen consult a physi cian Ingestion Give milk get Immediate medial attention Eye Contact flush with water for at least 15 minutes obtain medical attention Skin Contact wash with soap flush with water for at least 15 minutes Revision B 3 97 Page 1 of 2 Fire and Explosion Hazard Data Flash point does not flashFlammable limits not applicable Extinguishing media not applicable Special fire fighting procedures A self contained breathing apparatus and full protective clothing should be worn when fighting fires Unusual fire and explosion hazards potent oxidizing agent Warning Raman spectroscopy of this material indicates that races of xenon tetrafluoride are present When exposed to moisture xenon tetrafluoride may form xenon trioxide a potentially dangerous explosive Reactivity Data Stability unstable Conditions to avoid exposure to air Incompatibility materials to avoid air moisture most organics Hazardous decomposition or by products fluorine fluoride Hazardous polymerization will not occur Precautions for Safe Handling and Use If material is released or spilled Evacuate area Wear self contained breathing apparatus and full protective equipmen
397. ol kit Long shaft slotted screwdriver Needle nose pliers Clean room gloves Revision B 3 97 Page 1 of 12 10 02 Dual Nozzle Replacement Figure 1 Tri Nozzles To Name and Define the Nozzles In the usr micrion fib data depo labels directory are two template files defining in hexadecimal the extended position of each of the nozzle subassemblies You can edit the two files to change the names of the nozzle subassemblies and the x y z and z id values The tem plate file defines the left subassembly as 1 and the right subassembly as 2 The following example shows the names and definitions as included in the template files The template files name a Tungsten reservoir as Nozzle 2 and a GAE XeF2 as Nozzle 1 The following is what you see in the depo labels file x 0200 y 0000 z 0400 z_id 2 x 7000 y 0000 z 0500 z_id 1 To Select a Nozzle You can select a nozzle in either the Microsurgery screen menu or in vacchat To select a nozzle in Microsurgery In the screen main menu select Deposition On the deposition pulldown menu are the names of the nozzles and the Ret ract selection In the template the names are Tungsten and XeF2 When you select one of the two names that nozzle automatically is extended Page 2 of 12 Revision B 3 97 Dual Nozzle Replacement To select a nozzle in vacchat Type the command dpu The following menu appears Ta 2r 34 O Gow ge Extended Tungsten
398. oltages are present while the FIB sys tem is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and auto procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Part 2 Testing for Interrupt Generation and Clearance 2 1 With the SysCon module powered down put the Knob Panel board on the extender board 2 2 Unplug P3 and P4 2 3 With an ohmmeter test F1 F2 F3 and F4 for 1 ohm 2 4 Clip the oscilloscope probe on any input pin on the interrupt block shown in Fig 1 2 5 Power up the SysCon module 2 6 In an xterm window run the mbus reset command mbus reset 2 7 Start the Microsurgery application 2 8 The signal from the interrupt block should be high until there is an interrupt To generate an interrupt turn any knob on the knob panel The signal should go low The computer should process the interrupt and clear it sending it high after 10 milliseconds If the sig nal is always high no interrupt is being generated from the knob panel If the signal is always low a continuous interrupt is asserted on the interrupt bus This is a TTL compati ble signal Table 1 summarizes the test points Revision B 3 97 Page 3 of 4 12 05 841 Board Table 1 Knob Panel Interface Test Points Signal Characteristics Point Problem If Correct U12 pin 20 No power 5V 100 mV noise Interrupt B
399. olubility in water 3 6 gm per 100 ml 20 CAppearance Dark red liquid Health Hazard Data Hazardous components bromine 99 100 OSHA PEL 8H TWA 0 7 mg m NIOSH REL bromine air 1OHACGIH TLV 2 5 mg m TWA 0 1 PPMSTEL 0 3 PPM Routes of entry inhalation skin absorption ingestion Health hazards acute and chronic May be fatal if inhaled swallowed or absorbed through skin Causes burns Material is extremely destructive to tissue of the mucous membranes and upper res piratory tract eyes and skin Inhalation may be fatal as a result of spasm inflammation and edema of the larynx and bronchi chemical pneumonitis and pulmonary edema Signs and symptoms of exposure severe burns coughing wheezing laryngitis shortness of breath headache nausea and vomiting Medical conditions generally aggravated by exposure no data available Emergency and first aid procedures Revision B 3 97 Page 1 of 2 Inhalation remove victim to fresh air if breathing is difficult administer oxygen if not breathing give artificial respiration consult a physician Ingestion wash out mouth with water if victim is conscious get Immediate medial attention dis card contaminated clothing and shoes Eye Contact flush with water for at least 15 minutes while removing contaminated clothing and shoes assure adequate flushing by separating eyelids with fingers obtain medical attention Skin Contact wash with soap flush with water for 1
400. olumn Part 3 Remove the Column Cap lon Gun 3 1 3 2 3 3 3 4 3 5 3 6 Disconnect the ion pump vacuum bellows from the column To minimize contamination cover the input port of the ion pump with clean aluminum foil Cover the ion pump port on the column with clean aluminum foil Double check to see that the high voltage power supply is off then remove all high and low voltage cables see Figure 5 Alignment Screws 4 Lans only two adjacent screws X Figure 6 Location of Alignment Screws for the Column Cap Assembly Loosen only two adjacent alignment screws on the column cap ion gun assembly this is done so that the ion gun alignment is minimally affected see Figure 6 CAUTION Use care when lifting and moving the column cap and col umn housing assemblies The column cap assembly weighs approximately 25 pounds 11 kg The column housing weighs approximately 50 pounds 28 kg If nec essary to avoid personal injury secure the help of another person For the best leverage in removing the column cap assembly stand behind the process module Lift the column cap assembly straight up off the column and gently place it top side up on a clean work surface Immediately cover the exposed column with a clean plastic bag Note The bottom surface of the column cap assembly serves as both a regis tration and an O ring surface and is susceptible to damage from nicks and scratches Pag
401. on on enabled down function enter av powered 6 notrunning at vacuum running running on on enabled command down m vacchat owered at click on 5 p not running running running on on enabled Quit amp Exit down atmosphere Watcher enter powered at shutdown 4 not running notrunning running on on enabled down atmosphere command AIX powered A at not switch com 3 not running not running on on enabled down atmosphere running puter off Switch powered at not 2 not running not running off on enabled main down atmosphere running breaker off owered at not Saucon 1 p not running not running E off off enabled water air amp down atmosphere running i nitrogen 0 powered not running al not running not off off disabled down atmosphere running a Start the vacchat program through the Process Watcher program s window Wait for venting to complete before proceeding b You must log out and log in again as root password required to execute the shutdown command Part 3 Automatic and Manual Venting To extend the life of the floodgun allow 15 to 30 minutes for the flood gun to cool down before venting the system There are two ways to vent a system automatically and manually Each of these procedures assumes that the workchamber has been pumped down and that the fore fore and rough pumps for systems with dual wet pumps and turbo pumps are running 3 1 To automatically vent the system proceed
402. on the knob panel The signal should go low The computer should process the interrupt and clear it sending it high after 10 milliseconds If the sig nal is always high no interrupt is being generated from the knob panel If the signal is always low a continuous interrupt is asserted on the interrupt bus This is a TTL compat ible signal Table 1 summarizes the test points Revision B 3 97 Page 3 of 4 12 05B 1810 Board Table 1 Knob Panel Interface Test Points Signal Characteristics Point Problem If Correct U12 pin 20 No power 5V 100 mV noise Interrupt Block Interrupts unseen by com See step 2 8 puter F1 2A Micrion p n 540 13 Switches LEDs not work 1 ohm ing but keyboard is all right Part 3 Interrupt Jumper Check the interrupt jumper which is set according to the type of computer in use Page 4 of 4 Table 2 Jumpers Computer Jumper Intel 486 INT 2 IBM 370 INT 5 Revision B 3 97 ZA Micrion Service Procedure No 12 06 Service Procedure Title Stage Aperture Motor Drives 893 Applicable Systems All Frequency of Service As needed Introduction The stage aperture motor drive boards enable the computer to control the stage and aperture motors Tools and Materials Required Oscilloscope Ohmmeter ELECTROSTATIC DISCHARGE This board is sensitive to electrostatic discharge Handle the board as follows 1 Touch your hand to th
403. onnections underneath the loadlock Transport motor 10 pin ribbon cable connector Pressure sense switch 2 pin cable connector e P Trans switch BNC connectors 2 2 6 Lubricate the O ring with the Braycote 803 vacuum grease as follows a Place a small bead of the grease on the tips of your gloved index finger and thumb b Gently rub those two fingers together to obtain a uniform coating c Pull the O ring through the fingers to apply a uniformly thin coating of grease d Carefully inspect both the O ring and the O ring groove and remove any fibers or other debris that could cause vacuum leaks 2 7 Beginning at the rear of the loadlock place the O ring in its groove and work toward the front You can lower the loadlock door slightly to help press the O ring into the groove at the rear but be careful not to pinch it 2 8 Inspect all loadlock cable connections motor power cables encoder ribbon cable and BNC connectors to make sure that they are secure Revision B 3 97 Page 3 of 4 Loadlock Inspection and Cleaning 06 02 Page 4 of 4 Revision B 3 97 ZA Micrion Service Procedure No 06 03 Service Procedure Title Workchamber Inspection and Cleaning Applicable Systems All Frequency of Service Monthly or whenever venting the system Introduction This procedure describes how to inspect and clean the interior of the workchamber Materials Required Clean room gloves Lint free wipes Laboratory grade isopr
404. ontrols the size vs color of error circle drawn units are um DUMPFILE test results dat Controls the name of the file in which the test results are saved Page 4 of 4 Revision B 3 97 ZA Micrion Service Procedure No 03 05 Service Procedure Title Laser Alignment Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service As Needed Introduction Some FIB systems are equipped with Laser IF stage location systems This procedure describes how to align the laser system so that it indicates stage motion accurately Materials Required This procedure requires the use of the following materials and equipment Standard field service engineer s tool set Clean room gloves Lint free wipes Laboratory grade isopropyl alcohol Dial indicator Federal Corp LT 150 or equivalent accurate to 0 00005 1 28 um Adjustable dial indicator stand A second person to help with the alignment HP laser target s HP laser alignment aid tool This procedure refers to Service Procedure 06 03 Workchamber Inspection and Cleaning 03 01 Stage Travel Limit Switch Inspection and 01 02 Power Down Vent and Reset NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 3 task Specifically Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS
405. ood gun assembly contacts is flush against the lower column cover see Figures 1 2 and 10 Make sure that the flood gun is aligned with points directly at the center bore of the MCP see Figure 1 If necessary loosen the lateral positioning screws and adjust the lateral position of the flood gun to obtain a good fit against the lower column cover To adjust a flood gun with a snout loosen the height adjustment screw and slide the flood gun up until the end of the flood gun snout contacts the MCP as shown in Fig ures 3 4 5 and 11 Be careful not to damage the MCP screen Make sure that the flood gun snout is aligned with points directly at the center bore of the MCP see Figures 1 and 2 If necessary loosen the lateral positioning screws and adjust the lat eral position of the flood gun to obtain the proper orientation against the MCP see Figure 6 Tighten the height and if used the lateral adjustment screw s Reattach the flood gun electrical connections as shown in Figures 1 3 and 4 Clean the interior of the system as described in Service Procedure 06 03 Page 14 of 24 Revision B 3 97 05 04 05 Flood Gun Installation and Test Lower Column Fasten flood gun to workchamber lid with mounting screws 2 Workchamber Lid Loosen height adjustment screw and slide flood gun up against lower column Flood Gun Lateral Positioning Screws 2 Flood Gun Figure 11 Installation of Replacement Flood Gun
406. ood gun power switch S3 on the System Controller ON Sweep the deflection slider slowly through its range and verify that the negative volt age is the same magnitude as the positive voltage 0 V to 10 V and that the read backs track the voltmeter Check the filament voltage control as follows a Make sure that the system is in ion imaging mode and that the flood gun is unblanked Switch the flood gun power switch S3 on the System Controller OFF Connect the Flood Gun Board Test Circuit to pins E and F Filament supply of the cable connector and connect point 3 to chassis ground with a clip lead see Fig 6 Switch the flood gun power switch S3 on the System Controller ON Sweep the filament slider slowly through its range Verify that the proper voltages are present and that the system readbacks track the voltmeter Disconnect the Flood Gun Board Test Circuit Revision B 3 97 Page 19 of 24 Flood Gun Installation and Test 05 04 05 9 4 1ohm 10 W Chassis pe Ground EGun Cable Pins Point 1 to Point 2 Filament Current I E R which calculates to what is on the slider Point 2 to Ground Cathode Voltage CATV CATC readback on the beam control screen should equal CATV 1 Mohm If no 10W resistor is available you can use a 1W resistor if current is brief Figure 13 Flood Gun Board Test Circuit Check the grid voltage control as follows a b Pe Switch the flood gun power sw
407. oor has the same effect as shutting off the Pneu Valve Shutdown switch It shuts off the dc power controlling the pneumatic valves By passing the switch restores dc power to the pneumatic valves 1 3 With dc power for controlling the pneumatic valves enabled make sure that the push but ton switch labeled Pneu Valve Shutdown on the GAE cabinet is illuminated green 1 4 Close the manual valve on the Xenon Difluouride XeF gt cylinder assembly by turning it 1 4 turn clockwise 1 5 Use the Gas Control popup in the Misc menu to make sure that valves V12 through V17 and V20 are closed To close valve V17 click on the valve icon to obtain the setpoint dialog box then click on the LeakValve toggle button so that it reads OFF WARNING Do not touch the connectors exposed on the bank of sole noid operated valves in the upper left hand corner of the GAE cabinet When the Pneu Valve Shutdown switch is on there is a 24 volt 5 ampere dc potential present on the connectors A short circuit caused by introducing a conductive metal object such as a tool or a finger ring could generate enough heat energy to cause burns before the power supply automatically switches off 1 6 Pump out the chemical delivery lines in the GAE cabinet up to V12 a Start the roughing pump by clicking on the RP FP for single pump systems icon in the Gas Control Popup b When TCI reads lt 0 01 torr open V13 V15 and V16 When BT1 reads base pressure
408. opyl alcohol High intensity light Clean room vacuum cleaner e Dry nitrogen N2 gun with at least 30 psi pressure NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 3 task Specifically Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules Revision B 3 97 Page 1 of 4 06 03 Workchamber Inspection and Cleaning Part 1 System Preparation Configure the Chemical Sources in Safe Mode Before performing the tasks described in this procedure you must put the chemical sources in a safe mode see Service Procedure 02 01 WARNING Do not proceed until the chemical sources are secure The chemical reservoirs in FIB systems contain haz ardous materials Labels affixed to the exterior of a chemical cabinet identify the chemical s contained inside If a chemical source is not in its safest state as described in Service Procedure 02 01 it is possi ble for a combination of component failures to release the chemical s through a cabinet s delivery line a roughing line a purging line or from a chemi cal reservoir into the workchamber Do not open the workchamber or disassemble any part of the vacuum pumping system or detach any gas line from any chemical cabinet until you are sure that every chemi cal source attached to th
409. ore quickly See Figure 4 With the oil still draining run the pump for 10 to 15 seconds to expel any oil remaining inside the pump stages Replace the drain plug NOTICE OIL DISPOSAL Dispose of the old oil in accordance with the customer s specified procedure If there is no procedure in effect ask the chemical safety officer or facility manager If these options are not available contact Micrion Product Support for further instructions Page 6 of 8 Revision B 3 97 Roughing Pump Oil Change 04 04 Y 08 008 Figure 4 Draining Rough Pump Oil 4 8 Refill the pump by pouring approximately 0 8 liter 0 85 quart of new oil through the fill hole on the top of the pump Use Fomblin perfluoride polyether Micrion part no 320 00104 For a proper fill the oil level should reach the center of the sight glass 4 9 Replace the filler cap return the pump to the pump enclosure 4 10 Check the clamp and seal assembly to make sure it is clean reattach it to the intake port 4 11 Return the system to operation After determining that there are no vacuum or oil leaks replace the pump enclosure Revision B 3 97 Page 7 of 8 04 04 Roughing Pump Oil Change Page 8 of 8 Revision B 3 97 ZA Micrion Service Procedure No 04 05 Service Procedure Title Turbo Pump Replacement Applicable Systems
410. osion Hazard Data Flash point no data Extinguishing agents carbon dioxide or dry powder Fire fighting procedures Leave area unless wearing NIOSH MSHA approved self contained breathing apparatus flame and chemical resistant clothing hats boots and gloves Unusual fire amp explosion hazards None Health Hazard Data Hazardous exposure levels no data Effects of overexposure no data Emergency amp first aid procedures Eye contact Flush with running water for 15 minutes get medical attention immediately Skin Contact Remove any contaminated clothing wash exposed areas thoroughly with soap and water for at least five minutes Inhalation Remove the victim to fresh air and seek medical attention if coughing shortness of breath or irritation persists Ingestion Give the victim plenty of water and seek medical assistance Revision B 3 97 Page 1 of 2 Reactivity Data Stability air and moisture stable Conditions to avoid none Incompatible materials oxidizing agents and halogens Hazardous decomposition products carbon monoxide Hazardous Polymerization none Spill or Leak Procedures If material is released or spilled sweep up Waste disposal method Follow federal state and local regulations Special Protection Information Respiratory Protection NIOSH MSHA approved mask with organic vapor cartridge for emergency use NIOSH MSHA approved self contained breathing apparatus Ventilation Provide adeq
411. ot proceed until you have switched off the applicable power supplies Page 2 of 6 Revision B 3 97 Scan Rotation Calibration 07 02 1 3 1 4 1 5 1 6 1 7 92 1082 1110 8 Analog Drive Figure 2 SysCon Boards Factory Configuration 4 Slides into SysCon o R103 Y Axis Vw XUP test point R116 X Axi v YDEF test point o Figure 3 Analog Drive Board Potentiometers With the power up turn off Scan Rotation Enable on the Knob Panel Set the image mode to Electron Imaging is done without the flood gun for two reasons 1 charge neutralization does not work well on the silicon grid and 2 the electron flood causes staining on the grid In the FIB application program go to the silicon grid Locate one of the large boundary areas on the grid shown in Figure 4 Fine tune a small aperture beam 25 50 um on the grid Revision B 3 97 Page 3 of 6 07 02 Scan Rotation Calibration Part 2 X Axis Calibration 2 1 By focusing on a spot with a 1 um field of view for a few seconds make two reference marks on the silicon grid 100 um apart as follows Start a fast scan using the smallest screen image size b Selecta 1 um field of view FOV in the thick boundary area of the silicon grid as shown in Figure 4 The spot or mark must be visible once you zoom back out to a larger FOV Silicon Grid o m Place Reference
412. other systems C with 5 nm columns Side View of Beam P ou Blanking Assembly Figure 8 Blanking Aperture Location and Fastening Methods 5 nm Columns 5 6 Reinstall the lower column Lens 2 assembly see figure 6 5 7 Insert the high voltage wire into the hole in the HV spacer and tighten the hex head screw on the HV spacer see Figures 3 4 and 5 5 8 Reconnect the lower column electrical connectors the wires are color coded Tuck the connectors and wires back into the slot in the back of the lower column see Figure 4 Part 6 Replace the Blanking Aperture Systems with 5 nm Columns 6 1 Use cotton applicators and acetone to remove the silver paint on the outside diameter of the blanking aperture see Figure 7 6 2 Insert a probe into the center bore of the blanking aperture and gently pry the blanking aperture loose Revision B 3 97 Page 9 of 12 05 16 05 Blanking Aperture Replacement 6 3 6 5 6 7 6 8 NOTICE DO NOT CONTAMINATE THE COLUMN When removing the silver paint from the area of the blanking aperture do not contaminate the column with silver paint particles acetone silver paint residue or other contaminants Use cotton applicators and acetone to clean any remaining silver paint residue from the end of the beam blanking assembly Place the new blanking aperture in the shallow 0 004 deep counterbore on the end of the beam blanking assembly The blanking aperture must be seated in t
413. oves If without risk remove material from fire area Cool container with water from maximum distance Unusual fire amp explosion hazards Gives off acrid fumes when heated Reacts violently with oxidizers catalysts for vinyl polymers peroxides strong acids aluminum chloride Health Hazard Data Threshold limit value 50 ppm Hazardous exposure levels Breathing the vapor in a concentration of 10 000 ppm for 30 minutes has resulted in human fatality A dose of 5 000 mg per kg of body weight given orally has been fatal to 50 of laboratory rats tested A dose of 90 mg per kg of body weight given by intravenous injection has been fatal to 50 of laboratory mice tested ref NIOSH RTECS 1981 82 Has been determined to be carcinogenic in experimental mice Effects of overexposure Can cause irritation violent itching and watering of the eyes and severe Revision B 3 97 Page 1 of 2 human eye injury Acute overexposure results in possible drowsiness or narcosis Emergency amp first aid procedures Eye contact Flush with running water for 15 minutes get medical attention immediately Skin Contact Remove any contaminated clothing wash exposed areas thoroughly with soap and water get medical attention if irritation persists or if exposure is extensive Ingestion Do not induce vomiting Get medical help immediately Inhalation Remove to fresh air keep warm and at rest if not breathing administer artificial respiration if breathing di
414. p from the old VCR plug and screw the plug into the female VCR nut on the top of the old cylinder assembly Snug it finger tight and then using the two open end wrenches tighten it exactly 1 8 turn f Tagthe old cylinder assembly so as to properly identify its contents Include the serial number of the FIB system and the date of removal In the carbon cabinet clean the male end of the VCR fitting with a clean dry wiper Apply silicone heat sink compound to the insides of the bottle bracket and clamp On the new cylinder assembly make sure that the manual valve is in the OFF position CAUTION 1 21 2730Ve the VCR plug from the cannister assembly while the alve is open you may be exposed to styrene vapor and to styrene liquid Do not proceed unless the manual valve and is now closed If the manual valve was inadvertently lo not proceed Contact Micrion Corporation for further miou uvuvhNS Revision B 3 97 Page 5 of 8 11 04 Carbon Cylinder Replacement 3 17 If possible perform this step under a vented hood Using the two open end wrenches loosen and remove the VCR plug from the female nut at the top of the new cylinder assembly Place the plastic protective cap on the VCR plug and store the plug in the bot tom of the carbon cabinet 3 18 Inspect the VCR fitting on the top of the new cylinder assembly Install a new gasket 3 19 Install the new cylinder as follows g Secure the ass
415. p the cathode voltage slider slowly through its range and verify that the voltages are 0 V to 100 V and that the system readbacks track the voltmeter If the readback differs from the voltmeter by more than 0 5 V the readback should be corrected as described in part 10 Revision B 3 97 Page 19 of 22 Flood Gun Installation and Test 05 04 10 Part 10 Grid and Cathode Voltage Readback Calibration NOTE If you replace the 1090 or 1130 board recheck the calibrations as described below This procedure is a means of compensating the grid and cathode readback process so that the readbacks accurately reflect the potentials being applied to the flood gun The technique is to introduce a numerical offset to the conversion of the 8 bit digital values that are read from the hardware registers on the flood gun controller The conversion is normally based upon the assumption that the full range of values for each of these particular registers represents a voltage range of 100 to 100 This assumption is dictated by the values for the parameters Rlowvalue and Rhighvalue inthe Immersion grid voltage and Cathode voltage sections of the Reg isters Mfile These parameter values are normally 100 to 100 as is shown by the following segment from a Registers M file Immersion grid voltage Wnumbits 0x00030500 12 Wlowvalue 0x00030500 0 0 Whighvalue 0x00030500 100 0 Wsoftlow 0x00030500 0 0 Wsofthigh 0x00030500 100 0 Rnumbits 0x00030500 8 Rlowval
416. p the function generator for 10 kHz 60mV square wave or use the test box 1 3 Switch off the MCP power switch above the SysCon module 1 4 Open the MCP power supply box aka CEM box 1 5 Attach the function generator GND to one of the screws inside the MCP box 1 6 Attach the function generator output to TP1 on the Preamp board see Fig 2 1 7 Switch on the MCP power switch above the SysCon module Test Point o o TP1 o o TP2 Figure 2 Location of TP1 on Preamp board 1 8 At TPI of the Signal Acquisition board the voltage should be between 150 mV and 300mV peak to peak on 1V 2V DC level 1 9 Use the Brightness knob to center the 10 kHz square wave the voltage at TP8 of the Sig nal Acquisition board should be between 1 7V and 2 0V peak to peak As you start imaging the image should appear as in Fig 3 Page 4 of 8 Revision B 3 97 1381 Board Figure 3 Test Image at 10 kHz Part 2 Checking Scan Signals to the Univision Board In this procedure you check the Univision connector for the signals listed in Table 2 The Univision connector is at slot 2 at the back of the computer see Fig 4 12 10 The correct waveforms for the signals in Table 2 are shown in Figures 5 6 and 7 To check the functionality of the Univision board you can view a TIFF file If the image is correct the board is functioning 2 1 To see the positive voltages ad
417. pansion file ABC is assigned to repair type PDQ then edge lock curve XYZ is assigned to expansion file ABC To assign an EL curve to an Expansion File and a Repair Type r Select the Create Repair Type window from main icon menu Click on the repair name m Click on the Expansion button Click on the file name Select the profile name from the Curve Data Base Manager window Click on the Assign button Click the Assign button in the Create Expansion Factors window Click on the Save button In Create Repair Types window click on the Save button Click on the Close button Edge Lock Assigning Action Diagram 3 1 3 2 3 3 3 4 3 5 3 7 3 8 3 9 Call up the Create Repair Type window by clicking on RT in the main icon menu In the Create Repair Type window click on a repair name for example PDQ the name appears in the Repair Name box This is the repair type that the expansion factors file will be related to You can assign an expansion file to more than one repair type Click on the Expansion button The Create Expansion Factors window appears The next step is to relate an expansion factors file to repair type PDQ In the Create Expansion Factors window select a file name for example ABC The selected name ABC appears in the Expansion Name box This is the expansion type to which the new curve XYZ will be assigned The name
418. perture external drive plate is located on the left side of the column as viewed from the top see Fig 1 The x and y drive motors are accessible from the exterior of the system You do not have to vent the system or remove the column to gain access to the external aperture drive plate Aperture a Drive Plate lon Pump Port Front Figure 1 Location of Aperture Drive Plate on Column Top View 2 1 Visually inspect the worm gears for the x and y drive mechanisms They are located on the drive plate as shown in Fig 2 Look for excessive wear evidenced by metallic deposits in the lubricant residue If there is excessive wear call Micrion Product Support 2 2 Determine if the lubricant residue is excessively dirty and needs cleaning If the worm gear needs cleaning clean it with a lint free wipe dipped in a fluorinated solvent Page 2 of 4 Revision B 3 97 Aperture Mechanism Inspection Lubrication 05 06 WEAR GLOVES DO NOT HANDLE SOLVENTS When working inside the chamber or when handling any components that will be exposed to vacuum wear gloves rated for Class 100 environments or better Due to disinte gration of such gloves by solvents do not handle solvents or parts that are wet with solvent 2 3 Clean the lubricant from the gear and surrounding area using lint free wipes Use a small amount of solvent to clean left over residue Avoid getting solvent on
419. place the Column Cap 6 2 6 3 6 4 CAUTION Use care when lifting and moving the column cap assem bly The column cap assembly weighs approximately 25 pounds 11 kg If necessary to avoid personal injury secure the help of another person Position the column cap assembly over the column and gently place it on the column housing Rotate it as needed for proper alignment Tighten the two alignment screws that were initially loosened Making sure that the pin is centered connect the circular connector to the Deflection input After cleaning the cable ends with isoproyl and allowing them to dry connect all high voltage cables and signal cables to the column see Figure 1 NOTICE AVOID BENDING PINS Be careful when reconnecting the 3 pin and 20 pin connectors The pins are easily bent Close the workchamber and pump down the system see Service Procedure 04 03 Enable the high voltage power supplies Cure the column see Service Procedure 05 12 10 Heat the ion source see Service Procedure 05 11 Calibrate the deflection control system as described in Section 7 of this manual begin ning with Service Procedure 07 02 Page 6 of 6 Revision B 3 97 ZA Micrion Service Procedure No 05 15 25 Service Procedure Title Aperture Shield Removal Inspection amp Replacement 25 nm Column Applicable Systems 8000 Micrion 9800 FlipChip Frequency of Service Annually or As Needed Introduction The spray ape
420. pliers gently remove the gas tube where it meets its connector on the nozzle subassembly 9 3 Disconnect the grounding wire 9 4 Loosen and remove the three nylon screws that hold the nozzle subassembly and its insu lator to the mounting base of the subassembly Page 10 of 12 Revision B 3 97 Dual Nozzle Replacement 10 02 9 5 Liftthe nozzle subassembly and the insulator out of the subassembly The insulator can be separated by hand This insulator can be re used if the GAE nozzle subassembly is being replaced If a reservoir subassembly is being installed the old insulator is not needed 9 6 If nolonger needed return the nozzle subassembly to Micrion Customer Service Part 10 Replacing a GAE Nozzle Subassembly with a Reservoir To replace a GAE nozzle subassembly with a Tungsten reservoir nozzle subassembly the follow ing parts are required e Copper cooling braid with clamp and two screws e Heater board and harness connector e Reservoir heat sink combination already fastened by four nylon screws and washers NOTICE Nylon screws if tightened with too much pressure often break Snug tighten the nylon screws with care 10 1 Place the reservoir heat sink combination on the mounting base 10 2 Insert and snug tighten the three nylon screw that hold the reservoir heat sink combination to the mounting base 10 3 Connect the power cable to the reservoir heater connector 10 4 Insert the copper braid into the cla
421. position 3 1 In the Stage popup send the stage to the Stage Load position 3 2 To lower the plungers give the command to unclamp the actuator cau You should see the lift rod moving and the plungers moving down 3 3 Use a clean straight edge ruler to determine if the plungers are below the level of the white rails If the plungers are too high follow steps 3 4 through 3 7 3 4 Give the cac command to clamp the actuator 3 5 In the motorshell ystage program move the stage forward with the move command 3 6 In the Stage popup change the label for Stage Load to the current position 3 7 Unclamp the actuator and check the height again as in steps 3 2 and 3 3 Page 4 of 6 Revision B 3 97 Clamp Actuator Inspection 03 07 Plunger Plungers Lift Rod Figure 1 Stage showing Lift Rod and Plungers Revision B 3 97 Page 5 of 6 03 07 Clamp Actuator Inspection Page 6 of 6 Revision B 3 97 Section 4 Vacuum System 04 0 Vacuum System Checks 04 02 Process Module Vacuum Leak Checks 04 03 Pump Down Automatic and Manual 04 04 Roughing Fore Pump Oil Change 04 05 Turbo Pump Replacement 04 06 Foreline Trap Element Replacement 04 07 Thermocouple Calibration Revision B 3 97 Page 1 of 2 Page 2 of 2 Revision B 3 97 ZA Micrion Service Procedure No 04 01 Service Procedure Title Vacuum System Checks Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service Daily In
422. positioning screws and adjust the lat eral position of the flood gun to obtain the proper orientation against the MCP see Figure 6 4 3 Tighten the height and if used the lateral adjustment screw s 4 4 Reattach the flood gun electrical connections as shown in Figures 1 3 and 4 4 5 Clean the interior of the system as described in Service Procedure 06 03 Revision B 3 97 Page 13 of 22 Flood Gun Installation and Test 05 04 10 Lower Column Fasten flood gun to workchamber lid with mounting screws 2 Workchamber Lid Loosen height adjustment screw and slide flood gun up against lower column Flood Gun Lateral Positioning Screws 2 Flood Gun Figure 10 Installation of Replacement Flood Gun Without Snout Page 14 of 22 Revision B 3 97 05 04 10 Flood Gun Installation and Test Fasten flood gun to Lower Column u Workchamber Fasten flood gur with mounting screws 2 Loosen height adjustment screw and slide flood gun up until end of snout contacts MCP Flood Gun Lateral Positioning Screws 2 E gt o h oe Flood Gun Snout Flood Gun Figure 11 Installation of Replacement Flood Gun With Snout Revision B 3 97 Page 15 of 22 Flood Gun Installation and Test 05 04 10 Part 5 Power Up and Beam Up Follow Service Procedure 01 01 to power up and bring the beam up Part6 Flood Gun Control Calibration The Electron Flood Gun popup provides access to an automated calibratio
423. ppearance and odor colorless and odorless Distillation Range 10 90 0 5 torr 190 290 CSpecific gravity 1 9 Vapor Pressure lt 5 x 106 mmHg 20 C Fire and Explosion Data Flash point none Fire fighting procedures Keep containers cool by spraying with water when exposed to fire if flames have reached product causing a possible decomposition yielding toxic compounds use self contained breathing apparatus Unusual fire and explosion hazards None Health Hazard Data Threshold limit value NoneSymptoms of overexposure No evidence chronic or acute Carcinogenicity None Revision B 3 97 Page 1 of 2 First Aid Procedures Inhalation n a Eyes Clean and wash with water Skin Clean with water and soap Ingestion Induce vomiting Reactivity Data Conditions to avoid avoid heating above 290 C Incompatibility Strong or non aqueous alkali and Lewis acids above 100 C Hazardous decomposition products HF and COF as the main components from thermal decom position in air both are Toxic HF Hydrogen Fluoride has a TLV TWA 2 5 mg m COF Carbonyl Fluoride has TLV TWA 5 3 mg m Hazardous Polymerization None Special Protection Information Respiratory protection None required Ventilation None required Protective gloves Suggested not requiredEye protection none required Other protective equipment clothing Not required follow internal area requirements Special Precautions Handling amp storage precautio
424. procedure is a Type 3 task Specifically Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules WARNING Dangerously high voltage is present in the process mod ule while the FIB system is powered up All high voltage wiring is heavily insulated and connections are inter locked However any such safeguards can fail There fore do not touch any of the wiring in the process module while the FIB system is powered up Revision B 3 97 Page 1 of 4 04 02 Vacuum Leak Checks Part 1 System Preparation 1 1 Make sure that the fore and turbo pumps are running and the entire system including the loadlock is under vacuum 1 2 From the Process Watcher start the vacchat program 1 3 Check the operation and service records for clues as to the cause of the vacuum problem For example if the process module workchamber was recently serviced it would be rea sonable to suspect that the workchamber door gasket may be damaged or incorrectly seated The loadlock door is sometimes a source of vacuum leaks Before using the leak detector check the loadlock as follows Using vacchat close V6 and V2 to isolate the loadlock See Figures 1 and 2 b Read the vacuum level c Open V6 and read the vacuum level again contaminants such as grease in the load lock will eventually finish outgassing like a virtual leak
425. pyl alcohol Port blanking plates for the ion pump column port and process module column port NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 3 task Specifically Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules Revision B 3 97 Page 1 of 14 05 09 05 Remove Replace lon Beam Column Parti System Preparation Configure the Chemical Sources in Safe Mode Before performing the tasks described in this procedure you must put the chemical sources in a safe mode see Service Procedure 02 01 WARNING Do not proceed until the chemical sources are secure The chemical reservoirs in FIB systems contain hazard ous materials Labels affixed to the exterior of a chemical cabinet identify the chemical s contained inside If a chemical source is not in its safest state as described in Service Procedure 02 01 it is possible for a combination of component failures to release the chemical s through a cabinet s delivery line a roughing line a purging line or from a chemical reservoir into the workchamber Do not open the workchamber or disassemble any part of the vacuum pumping system or detach any gas line from any chemical cabinet until you are sure that every chemical source attached to the FIB system is in its safest
426. r Click the File button to get menu Then select Constants Files to get the Open File popup x Open File Filter Zusrznicr ion f ib data x H Directories Files fperture H Selection Zusrznicr ion f ib data fiperture Hf File Search Show File Hane EX Micrion Constants Editor Ba EI Constant Nane fe Sl Click the file name to highlight it and then click the Open button or just double click the file name x Micrion Constants Editor File Search Show File Mane Aperture 1 stuff Aperture_nun Aperture_size Aperture_text Aperture_xpos Aperture_ypos Aperture_leniv fiperkure len2u Aperture_xstig Aperture_ystig Aperture_ion_detg Aperture_ele_detg Aperture_nux_detg Aperture_cati Aperture_est_ionf Aperture_est_bbap Aperture_ionf Aperture_bbap x Rperture 2 stuFF X fiperture size Rperture text 1 500 1 11421 296296 175 370843 5372 854200 25195 696956 0 136996 0 410989 1252 747253 898 656699 1100 6 666667 12 123 1800 0 1800 0 Figure 1 File Selection with the Constants File Editor Page 2 of 4 Revision B 3 97 Micrion Constants Editor 09 04 Edit a File The Constants Editor popup has two parts the lower part is a window listing the contents of the selected file the upper part contains the editing controls To e
427. r Flood Gun Height Positioning Screw Lower Column MCP Mounting Screws 4 Figure 5 Side View of Flood Gun With Snout and Large MCP Page 8 of 10 Revision B 3 97 Remove Install MCP 05 03 10 an ou ee e SS MA o D 2 Mounting Screw 2 Figure 6 Side View of Flood Gun Without Snout and Small MCP Flood Gun Lowered and MCP Disconnected Revision B 3 97 Page 9 of 10 05 03 10 Remove nstall MCP Workchamber Flood Gun Height Positioning Screw Lower Column N MCP Mounting Screws 4 Figure 7 Side View of Flood Gun With Snout and Large MCP Flood Gun Lowered and MCP Disconnected Part 3 Replacing the MCP 3 1 Fasten the replacement MCP to the bottom of the column with the MCP mounting screws see Figures 6 and 7 3 2 Reattach the MCP electrical connectors 3 3 Slide the flood gun subassembly up until it contacts the lower column Make sure that the flood gun is aligned with points directly at the center bore of the MCP see Figures 1 2 3 4 and 5 Tighten the flood gun height positioning screw see Figures 2 and 5 3 4 Clean the workchamber see Service Procedure 06 03 then close the workchamber door 3 5 Power up the system as described in Service Procedure 01 01 and pump down the system as described in Service Procedure 04 03 Page 10 of 10 Revision B 3 97 ZA Micrion Service Procedure No 05 03 25 Service Procedure Title MCP Removal and Replacem
428. r handling and storing Store in cool dry well ventilated area keep container sealed use appropriate PPE avoid skin contact and avoid breathing vapors Control Measures Respiratory protection required NIOSH OSHA approved respirator Ventilation use process enclosures local exhaust ventilation or other engineering controls to reduce airborne concentrations Protective gloves rubber or neoprene Skin protection when chemical contact is possible wear impervious gloves splash apron work uniform and shoes or coverlets Eye protection safety glasses or chemical splash goggles Other protective clothing or equipment as required by your company Work hygienic practices wash after handling Page 2 of 2 Revision B 3 97 Material Safety Data Sheet MSDS Tungsten Carbonyl Emergency contact Chemtrec 800 424 9300 General comments The fire explosion and reactivity data given herein are derived from sources that address the hazards incurred in storing and handling large quantities whereas a relatively small amount is used in this application Substance Identification Generic name tungsten carbonylCAS Registry Number 14040 11 0 Chemical formula W CO gMolecular Wt 351 92 Physical Data Physical description white xtl Percent volatiles by weight no dataBoiling point no data Melting point 169 170 dec Vapor pressure 20 X mmHg no data Specific gravity no dataSolubility in water Insoluble Fire and Expl
429. r shield The lower shield must be reinstalled in its orig inal position for proper MCP alignment Remove the lower shield by loosening the three Phil lips head screws see Figure 3 Remove 3 Phillips head screws to remove shield t 2 shown e e Figure 3 Side and Bottom Views of Lower Shield with Mounting Screws Part 3 Remove the Lower Column Electrical Connectors 3 1 Pull the lower column electrical connectors out of the slot in the back of the lower column there are eight pin socket connections The wires are color coded See Figure 4 3 2 Loosen the hex head screw on the HV spacer and remove the high voltage wire from the HV spacer See Figures 4 and 5 Cut off the kinked end of the high voltage wire see Fig ure 5 NOTICE LOWER COLUMN ELEMENTS ARE FRAGILE Handle the lower column and its elements with great care Any scratches will ruin the lower column Lens 2 elements Also any metal tracks left on ceramic surfaces cause serious problems with the column operation 3 3 Disconnect the eight lower column electrical connectors See Figure 5 Revision B 3 97 Page 5 of 10 05 16 10 GROUND CONE ELECTRODE 1 INSULATING ROD 30 ALUM 3 GROUND ELECTRODE SPACER 4 Blanking Aperture Replacement HV2 CONE ELECTRODE 1 HV SPACER 1 HV WIRE Figure 4 Lower Column Lens 2 Without Shield Pull the connectors out from the slot in the back of the lower col
430. ral Position Screws 2 ama Figure 7 Replacement Flood Gun Without Snout Side and Top Views Page 10 of 24 Revision B 3 97 05 04 05 Flood Gun Installation and Test screw and slide upper MEMOS IOS Gu bracket in this direction Loosen height adjustment shipping screw Flood Gun Height Adjustment Screw behind the connector Flood Gun Side View Lateral Position Screws 2 Top View Figure 8 Replacement Flood Gun With Snout Side and Top Views 3 3 Continuity Tests a Totest a flood gun without a snout use an ohmmeter to perform the continuity tests listed in Table 1 The test measurement points are shown in Figure 8 If the measure ments do not match those in Table 1 contact Micrion Customer Support b Totesta flood gun with a snout use an ohmmeter to perform the continuity tests listed in Table 2 The test measurement points are shown in Figure 9 If the measurements do not match those in Table 2 contact Micrion Customer Support Revision B 3 97 Page 11 of 24 Flood Gun Installation and Test 05 04 05 Grid Lead socket Terminal 1 Deflection Plates el Oe al ee To LITE b ET m I Leads pins EET siad Bl REN Jao Bracket Sn Ho gt OO Terminal 2 Deflection Plates Figure 9 Flood Gun Without Snout Continuity Test Points Table 1 Flood Gun Without Snout Continuity Tests From To Continuity Point A Point B Not
431. rd it in your notebook Page 4 of 6 Revision B 3 97 Pan Rotation Ortho Calibration 07 05 2 11 2 12 2 13 2 14 2 15 B E B wd Figure 4 Y Pan Offset Reference Marks Use p to calculate the new value for the variable Column ortho as follows Column ortho old value 90 p Column ortho new value For example if the old value of column ortho is 1 14 and Rho p is 90 99 then 1 14 90 90 99 2 13 Type the newly calculated value for Column ortho in the Column M file To save the new value of Column ortho exit the application program and the X win dow system by clicking the Quit amp Exit button in the Process Watcher At the shell prompt restart the X window system and the application program by typing xinit Repeat steps 2 2 through 2 10 to verify that the new value for Column ortho is cali brated so that the angle p for a y pan mill is as close to 90 as possible Revision B 3 97 Page 5 of 6 07 05 Pan Rotation Ortho Calibration Page 6 of 6 Revision B 3 97 ZA Micrion Service Procedure No 07 06 Service Procedure Title Check the Center of Rotation Applicable Systems 8000 MicroMill HT Micrion 9800 FlipChip Frequency of Service After Pan Rotation Ortho Calibration Introduction This procedure checks the ROT CENTER center of rotation stage label which is the stage address that locates as closely as possible the center of the stage Materials an
432. re reasonably cer tain that they have become contaminated Required Materials This procedure requires the following materials Clean room preferably with a class 100 airflow hood however a properly cleaned and prepared work area will be sufficient Clean standard field service tools completely free of oil and grease Lint free wipes Clean room gloves High intensity light source Aluminum foil Clean lens brush e Clean filtered dry nitrogen an ionizing N gun with at least 20 psi is preferred Cotton tipped applicators NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment 82 93 this procedure is a Type 3 task Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules Revision B 3 97 Page 1 of 6 05 02 05 Cleaning Column Elements NOTICE TRAINING IS REQUIRED FOR THIS PROCEDURE Do not attempt to perform this procedure unless you have been properly trained Only qualified personnel should perform this procedure Parti System Preparation Configure the Chemical Sources in Safe Mode Before performing the tasks described in this procedure you must put the chemical sources in a safe mode see Service Procedure 02 01 WARNING Do not proceed until the chemical sources are secure The chemical reservoirs in FIB systems contain
433. ree swabs for cleaning Disposal bag for contaminated waste used wipes gaskets etc 3 4 open end wrench 5 8 open end wrench e 5 32 hex key NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 3 task Specifically Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules NOTICE When opened the valve handle points down toward the cannister 1 VCR is a registered trade mark of the Cajun Company Macedonia Ohio Revision B 3 97 Page 1 of 10 11 02 Xenon Difluoride Cylinder Replacement AN VCR Plug WARNING Do Not Open Valve Until Directed By Procedure Manual Shutoff Valve Shown Closed Mounting Bracket AN WARNING Do Not Disturb This Coupling XeF Cannister Figure 1 Xenon Difluoride Cannister Assembly part no 100 009040 Page 2 of 10 Revision B 3 97 Xenon Difluoride Cylinder Replacement 11 02 Part 1 Preparations 1 1 Secure the help of another person two people should be present during this procedure 1 2 Review the Material Safety Data Sheet for xenon difluoride in Section 2 1 3 Review the procedures provided by the site Chemical Safety Officer governing tasks of this nature If no such procedures are provided alert the site Chemical Safety Officer that you will be perfo
434. rement Port Port E O Beam m 7S Bender ag ea LE Photo collector Top View of Beam Bender Lateral Adjustment Screws Fiber optic Cable hr Rotational Adjustment Screws Figure 6 Interferometer Photo collector and Beam Bender 4 14 When the measurement output glow has been optimally adjusted put the photo collector back in place at the measurement port Check the green LED on the side of the x axis receiver it should be illuminated If the LED is not on try to align bender 3 and the x axis reference mirror again repeat steps 3 9 through 3 12 If the LED is on use a multi meter to check the voltage at the pins on the back of the receiver the output voltage should be 1 5 V minimum If the output voltage is not 1 5 V minimum try to align bender 3 and the x axis reference mirror again Page 10 of 12 Revision B 3 97 Laser Alignment 03 05 4 15 4 16 4 17 4 18 4 19 4 20 Note wires cables fingers etc can block the beam pathway If you lose the signal com pletely check for beam path obstructions before starting realignment It is also possible to lose the signal if the interferometer fiber optic cable is pinched by a cable tie etc When bender 3 is aligned so that the green LED on the side of the x axis receiver is on and the receiver output voltage is 1 5 V minimum check to see that the beam is reflect ing back to t
435. remove the VCR plug from the female nut at the top of the new cannister assembly Place the plastic protective cap on the VCR plug and store the plug in the bottom of the GAE cabinet Place a new VCR gasket on the new XeF cannister assembly Using the two socket head cap screws and the 5 32 hex key mount the new cannister assembly Do not tighten the cap screws yet Make up the VCR coupling by hand adjusting the position of the cannister assembly as necessary Snug the coupling finger tight Using the 3 4 and 5 8 open end wrenches tighten the female VCR nut exactly 1 8 turn Lightly tighten the socket head cap screws Do not open the manual valve on the XeF cannister assembly yet Page 8 of 10 Revision B 3 97 Xenon Difluoride Cylinder Replacement 11 02 Part 6 Pump Down the Gas Lines 6 1 6 2 6 3 6 4 6 5 6 6 6 7 Pump down the gas line between the 1 4 turn manual valve on the XeF cannister and valve V13 Leak check the VCR coupling as follows Switch on the roughing pump wait at least 30 seconds until TC1 reads lt 0 01 torr then open valves V13 V15 and V16 Open V17 as follows go to the electronics module and at the control panel for the MKS 244 pressure flow controller for V17 P Locate the valve mode selector switch see Fig 4 on the right hand end of the controller rotate the switch counterclockwise from the EXT position to the manual control position and lift the adjacent togg
436. rence point within 0 0001 3 13 Move the stage to bring plate location 3 under the gauging head and check that the dial indicator shows the same value as for the reference point within 0 0001 3 14 Move the stage to bring the ion faraday cup under the gauging head and check that it is below the reference point 3 15 Move the stage to bring the electron faraday cup under the gauging head and check that it is below the reference point 3 16 Apply one drop of Locktite 222 to each of the three stage set screws shown in Figure 6 Page 8 of 10 Revision B 3 97 Stage Height amp Carrier Flatness 03 06 Part 4 Carrier Flatness This procedure assumes a height transfer gauge is in place as described in step 1 4 Check any carrier for flatness after the stage has been verified as flat The reference pads shown in Figure 7 serve as checkpoints If all three reference pads are within 0 0001 on the dial indicator the stage is within tolerance for flatness If not return the carrier to Micrion Product Support Note in measuring the height of the reference pads if the second reference pad is within 0 0001 of the first reference pad then the third reference pad must also be within 40 0001 of the first reference pad Or if the second reference pad is within 0 0001 of the first reference pad then the third reference pad must also be within 0 0001 of the first reference pad 4 1 Install a carrier onto the stage 4 2 Move the
437. ressure regulator It should read approximately 80 psi Slowly turn the control knob on the pressure regulator clockwise until the output pressure gauge on the left hand side of the regulator reads about 20 Hg Open the unlabeled manual valve between V14 and the pressure regulator and readjust the pressure regulator as necessary to obtain 20 Hg Close the chlorine cylinder valve with the valve tool provided with the GAE cabinet Close the manual Process Gas valve Close the GAE cabinet In the Gas Control Popup open valve V14 In the Gas Control Popup set up V17 as follows a Click on the V17 icon to obtain the setpoint dialog box b Enter a setpoint value of 1 0 T c Click on the LeakValve toggle button so that it reads on V17 valve open d Wait for BTI to settle at about 1 torr Open valve V12 to admit chlorine to the workchamber Observe the BT1 readback to make sure that it continues to register 1 torr indicating that the chlorine flow is properly regulated Close valves V17 and V14 To close V17 click on the valve icon to obtain the setpoint dialog box then click on the LeakValve toggle button so that it reads OFF 3 Whether or not the GAE cabinet should be locked and who shall have custody of keys may be governed by site safety policy Revision B 3 97 Page 11 of 12 11 01 Chlorine Cylinder Replacement 8 12 Switch on the roughing pump for at least 30 seconds until TC1 reads lt 0 01 torr t
438. rew y axis motor FRONT Figure 2 Top View of the MicroMill HTStage Page 4 of 6 Revision B 3 97 Stage Lead Screw Lube 03 02 Part 3 Lubricate the Y Axis Lead Screw Whenever possible move the stage by means of the Motorshell program or by using the stage icons in the application program However it is also possible to move the stage manually by rotat ing the x axis lead screw from outside the workchamber with a 3 8 box wrench Be sure to wear clean room gloves and to rotate the lead screw as close to the stage housing as possible NOTICE Lead Screws are easily damaged Manually rotate the lead screws as close to the stage housing as possible 3 1 With the motorshell program running in an xterm window see step 2 1 prepare to move the stage in the y axis with the motorshell command ystage 3 2 To move the stage to the front as shown in Figures 1 and 2 type move 3 3 If there are deposits of old lubricant on the y axis drive lead screws use lint free wipes to remove the old lubricant DO SO VERY GENTLY 3 4 Lubricate the y axis drive shaft with a small amount of Braycote 602 black vacuum grease 3 5 Make sure that stage movement is not impeded by any hardware or maintenance materials Work the lubricant in by moving the stage back and forth in the y direction with
439. ribing the proper disposition of the old Br cannister assembly If no such procedures have been provided alert the site Chemical Safety Officer that you will be performing this task If the site does not have a designated Chemical Safety Officer alert site management personnel as well as any personnel present in the general area surrounding the FIB system that you will perform this task and obtain instructions concerning the proper disposition of the old Br cannister assembly Identify exits safety shower eye wash station etc If the site does not provide an eye wash station a portable eye wash station should be procured Assemble the required materials listed on page 1 along with the new Br cannister assembly part no 100 010130 see 1 VCR VCR Plug Female Nut EON 4 Manual Shutoff Valve Shown Closed WARNING Do Not Open Valve Until Directed By Procedure wounting Bracket Br NS Le Cannister WARNING Do Not Disturb This Coupling 800 33 007 Figure 1 Bro Cannister Assembly When opened valve direction of flow points towards the cannister Page 2 of 10 Revision B 3 97 Bromine Cylinder Replacement 11 03 1 6 Review the layout of the GAE cabinet see 2 CAUTION Do not touch exposed Chlorine Manual Shutoff Valve connectors Shown Closed 24 volts dc present on solenoid bank while Pneu Valve Shutdown sw
440. rical connector pins become inserted in the sock ets in the suppressor holder Firmly hold the cap flush against the holder while tightening the three 2 56 screws These two surfaces are designed to a flatness specification When installed properly there should be no light seen between the cap and the holder See Figure 2 Part 7 Reinstall the lon Gun Assembly Pump Down the System 7 1 7 2 NOTICE ALIGNMENT PINS MUST MATCH MATING HOLES The contact springs attached to the copper contact pads on the insulator see Figure 2 can be bent if the ion gun is rotated while being inserted Line up the alignment pins with the mating holes on the column before inserting the ion gun The pins must be aligned before the ion gun is inserted half way It is critical not to rotate the gun during the last 1 inch of insertion Make sure that you properly align the pins in the flange of the ion gun assembly with the receptacles in the ion source head Figure 2 shows the location of the alignment pins Place the ion gun assembly on the column Fasten the ion gun to the column with the four captive socket head screws as shown in Figure 1 Pump down the system as described in Service Procedure 04 03 Revision B 3 97 Page 7 of 12 05 10 lon Source Change Part 8 Register the New Source in log main Power Up the System Register the new source in the log main program so that its usage will be recorded The ion source is considered in use
441. rify that the reservoir valve is opening under vacuum when the HCIG approxi mately 3 5 x 10 6 torr open VR or VR2 and observe a pressure pulse due to residual air in the reservoir opvr2 Pump for five minutes with VR2 open Record the increase in the valve temperature which should be approximately 2 C shimt Close VR2 By trimming R100 and R76 bring the nozzle heater and the valve heater to approximately 55 C Wait 1 2 hour to an hour or until the valve and nozzle temperatures stabilize and record both temperatures shimt shint Set the reservoir setpoint to 62 C by tweaking potentiometer R8 clockwise and typing the vacchat command shlsp In one hour record the reservoir valve and nozzle temperatures which should each be 62 C or above Valve temperature can be as high as 70 C and nozzle temperatures can be as high as 75 C shirt shimt shint Check for contact with the substrate Open VR2 for one hour and observe the cathode ion gauge hot or cold as a function of time Record the three sensor temperatures as in step 2 7 After one hour close VR2 Record the return to base pressure as a function of time Revision B 3 97 Page 3 of 6 10 07 Heater and Cooler Board Settings Part 3 Setting the Temperature on the Cooler Board TMCTS In this part you make software settings on board 1582 and test the new subassembly This sets the temperature for the cooler that is next to the re
442. ring Equipment S2 93 this procedure is a Type 5 task Specifically Equipment is energized and measurements and adjustments require physical entry into the equipment or equipment configuration will not allow the use of clamp on probes Installation Pre Check Prior to the installation visually check that the flood gun and the snout bore are free from contam ination Also perform the continuity checks to ensure that the filament is not open and none of the snout elements are shorted Revision B 3 97 Page 1 of 16 Flood Gun Installation and Test 05 04 25 Part 1 System Preparation Configure the Chemical Sources in Safe Mode Before performing the tasks described in this procedure you must put the chemical sources in a safe mode see Service Procedure 02 01 WARNING Do not proceed until the chemical sources are secure The chemical reservoirs in FIB systems contain hazard ous materials Labels affixed to the exterior of a chemical cabinet identify the chemical s contained inside If a chemical source is not in its safest state as described in Service Procedure 02 01 it is possible for a combination of component failures to release the chemical s through a cabinet s delivery line a roughing line a purging line or from a chemical reservoir into the workchamber Do not open the workchamber or disassemble any part of the vacuum pumping system or detach any gas line from any chemical cabinet until you are sure
443. rming this task If the site does not have a designated Chemical Safety Officer alert site management personnel as well as any personnel present in the general area surrounding the FIB system that you will be performing this task 1 4 Identify exits safety shower eye wash station etc If the site does not provide an eye wash station a portable eye wash station should be procured 1 5 Assemble the materials 1 6 Review the layout of the GAE cabinet see Fig 2 Pushing the illuminated Pneu Valve Shutdown push button switch light goes off closes all pneumatic valves in the GAE cabinet by removing the 24 volt dc power from the sole noid bank The motorized valve V17 is not affected by this switch 1 7 At the FIB system workstation with the application software program running pull down the Gas menu and click on GAE Control to obtain the Gas Control Popup dialog box see Fig 3 Part 2 Overview This section is only an overview Do not use this overview in place of the actual procedures 2 1 Pump and purge GAE system lines Close the manual shutoff valve on the old XeF cannister assembly and rough pump the gas lines leading back to it 2 2 Remove plug and tag the old cannister to be sent back to Micrion 2 3 Inspect and install the new XeF cannister assembly 2 4 Pump the gas lines leading back to the new XeF cannister 2 5 Reinstitute XeF gas flow to the FIB system workchamber WARN
444. rns the size of all the files and subdirectories under the dat a direc tory in kbytes and also returns the total size of the data directory structure in the last line as shown in Figurel Revision B 3 97 Page 1 of 4 09 01 Archiving Restoring Files using arctool lFibisimicrion 10 gt du k data n data sus labels lata labels lata help lata tiff lata asm jata repair_types rel const lata repair tupes saveconst lata repair tupes ata MDIL lata lenstab ata log MDDL ata log egun lata log mcp lata log source lata log lata lenstab 25nm lata lenstabold lata stage maps lata laocks lata wafer maps lata mif mif lata mif mifout lata mif class lata mif res lata mif sem lata mif kla lata mif tnc lata mif njs lata mif a a a a a a a a a a a a a a a a a a a a a a a a a a a a 32 data libi3tmicrion 11 i Figure 1 Output of the du k data Command 1 3 If you are using 3 5 1 44 MBytes diskettes to back up the files divide the size of the directory in kBytes by the capacity of the diskette 1 440 KB to determine the number of 3 5 diskettes you need If the size is 1816 kB divide by 1440 kB to find the number of 3 5 diskettes required 1816kbq _ 1440kb disk 1 26disks or 2 diskettes If you are using 3 5 diskettes with 2 88 MB capacity to back up the files divide the size of the directory in kB by the capacity of the diskette 2 880 kB to determine the
445. rocess module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Open the Workchamber Remove the front panels to gain access to the workchamber cover When the system is completely vented open the workchamber cover by removing the socket head cap screws and lifting the cover all the way back Page 2 of 10 Revision B 3 97 Stage Height amp Carrier Flatness 03 06 WEAR GLOVES DO NOT HANDLE SOLVENTS When working inside the chamber or when handling any components that will be exposed to vacuum wear gloves rated for Class 100 environments or better Due to disinte gration of such gloves by solvents do not handle solvents or parts that are wet with solvent Part 1 Install the Quartz Flatness Plate Spacers amp Height Transfer Gauge Install the quartz flatness plate three spacers MicroMill HT only and the height transfer gauge 1 1 Load the quartz flatness plate onto the stage a Inspect the dull finish side of the quartz flatness plate for worn spots Avoid using any old spots on the quartz flatness plate where the plungers have worn the surface b Move the stage manually or via the Stage icon in the Microsurgery program to the back of the workchamber c With open end of a 3 8 wrench push in t
446. rom gray to black On the Beam Screen click on the MCP graphic to display the MCP Control popup With the Bias slider set at 400 set the Gain slider as follows Slowly bring the Gain to 500 V and wait 5 seconds Slowly bring the Gain to 1000 V and wait 5 seconds Slowly bring the Gain to 1350 V Adjust the Gain to display sparse white speckles single electrons on the screen It may be helpful to darken the room You want to display the white speckles on the screen under continuous imaging with L2 set at 0 V Close the MCP Control popup ao FP Page 2 of 6 Revision B 3 97 Column and Lens Curing 05 12 10 Part 2 Curing the Column 2 1 Click on the Lens 2 schematic symbol in the Beam Control popup screen to display the slider voltage control for Lens 2 2 2 Set L2 to 0 V then enable the L2 power supply 2 3 Using the slider control gradually raise the L2 voltage towards 30 kV 2 4 At the first sign of noise or pressure bursts in the ion pump usually 25 kV to 30 kV a Increase L2 voltage by 3 kV above the point where the noise began b Quickly decrease L2 by at least 2 kV the noise should stop It is important that the noise does not continue when you decrease the voltage level decrease the voltage until the noise stops Repeat this step until you can set L2 to 30 kV without producing noise Once you have done so the procedure is complete Figure 1 is a graphical representation of this step If you cannot
447. rompted log in as micrion Revision B 3 97 Page 17 of 24 Flood Gun Installation and Test 05 04 05 Part 8 E Gun Resistance Checks 8 1 8 3 In the flood gun control popup a Click on the filament graphic to obtain the filament control popup and manually slide the filament control to any value and then back to ZERO b Setthe remaining sliders to the following values Grid 0 Focus 0 Cathode 0 Deflection 0 Screen 0 Remove the cable from connector J1801 on the E Gun feedthrough port Connector J1801 and the E Gun feedthrough port are located on the right side looking from the front of the system of the workchamber lid The harness number on the label should be 160 003422 Check the connector pins on the feedthrough port the wire harness between the feedthrough and the flood gun not the harness between the System Controller and the feedthrough as follows a Check between pins E F filament you should have continuity If not the E gun fila ment or internal harness is open b Check between pins U G and H Focus lens to Deflection plates They should be open Check between pins T and E or F Filament and Grid elements They should be open d Check E F G H T and U to ground They should all be open Part 9 E Gun Assembly Voltage Checks For the following steps use the control sliders in the popups for the focus and deflection ele ments Change the slider settings and watch how both the me
448. ross the bridge and onto the worktable This will reveal any misalignment Some bumps or tight spots may be detected BUT do not always indicate poor or incorrect alignment Correct Alignment is subjective to the feel of the Engineer 2 8 When correct alignment is achieved witness marks should be added to the top and side of the lock valve body The marks are perpendicular to the mating surfaces of the two components load chamber valve body and can be made with a small sharp cold chisel A scribe line can be used if the above cannot be achieved The load lock can now be removed and replaced with minimal to no alignment of the rails Page 4 of 4 Revision B 3 97 ZA Micrion Service Procedure No 06 05 Service Procedure Title Process Module External Cleaning Applicable Systems All Frequency of Service Weekly or prior to opening the system Introduction This procedure describes how to clean the exterior of the process module Materials Required Clean room gloves Lint free wipes Laboratory grade isopropyl alcohol Clean room vacuum cleaner N5 blowgun with 30 psi pressure or greater High intensity light NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 3 task Specifically Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 240 volt amps
449. rture shield other than the central hole for the ion beam it must be replaced Even if there are no obvious holes in the aperture shield inspect both sides of the shield for shallow depressions depressions indicate that the Tungsten has been eroded sputtered and that the aperture shield should be replaced When in doubt replace the aperture shield especially if it has been in an operational col umn for an extended period 6 to 12 months Extractor Cap gt AME XSGS ST__R SSS a Column Housing Aperture Shield Screws 2 Extractor Cap Ball Plunger Aperture Shield VL Ltt Figure 3 Cross Section of Extractor Cap and Aperture Shield Revision B 3 97 Page 5 of 6 05 15 25 Aperture Shield Replacement Part 5 Replace the Aperture Shield and the Extractor Cap 5 1 5 2 Fasten the replacement aperture shield to the bottom of the extractor cap holder with the two aperture shield screws see Figure 3 The center bores of the aperture shield and the aperture must be concentric centrally aligned otherwise the extractor cap will not seat properly Align the slots on the extractor cap with the detents on the extractor cap holder and press the extractor cap into place Part 6 Replace the Column Cap 6 2 6 3 6 4 CAUTION Use care when lifting and moving the column cap assem bly The column cap assembly weighs approximately 25 pounds 11 kg If necessary to avoid personal injury secure the help of anot
450. rture shield is constructed of solid tungsten During normal operation the aperture shield is sputtered by the ion beam tungsten is used because the atoms that are back sputtered from the tungsten onto the source do not degrade the source performance in fact they enhance source performance Over time however the beam will sputter through the tungsten When these atoms are back sputtered onto the ion source they cause source instability and eventual source failure This procedure describes the process of removing inspecting and replacing the aperture shield in a FIB System This procedure should be performed if the aperture shield has been in use for one year or sooner if the source is not stable In the case of source instability try heating the source Service Proce dure 05 11 before replacing the shield Materials Required This procedure requires the use of the following materials Clean standard field service tool kit Lint free wipes Clean room gloves Laboratory grade isopropyl alcohol NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 3 task Specifically Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules Revision B 3 97 Page 1 of 6 05 15 25 Aperture Shield Replacement Parti System Preparation Configure
451. rvice Procedure 06 05 Open the Workchamber Remove the front panels to gain access to the workchamber door Once the system is completely vented open the workchamber door by removing the 1 2 socket head cap screws Page 2 of 22 Revision B 3 97 05 04 10 Flood Gun Installation and Test Part 2 Remove the Flood Gun 2 1 2 2 After the system has vented open the workchamber Two types of flood gun MCP config urations are installed in FIB systems with 10 nm columns a flood gun without a snout combined with a small MCP as shown in Figures 1 and 2 and a flood gun with a snout paired with a large MCP as shown in Figures 3 4 and 5 Remove the flood gun electrical connectors disconnect the grid lead the two filament leads and the 4 pin keyed connector see Figures 1 3 and 4 NOTICE DO NOT DROP MOUNTING SCREWS Before removing and replacing the flood gun place a clean lint free wipe below the flood gun to prevent the mounting screws from falling into the turbo pump or the stage hardware If a screw is dropped into the workchamber be sure to retrieve it before proceeding Remove the flood gun from the workchamber lid by removing the two mounting screws as shown in Figures 3 and 4 Be careful not to damage the MCP screen 1 There are two configurations of the flood gun with a snout and large MCP combination see Figures 3 and 4 In a 9800 series system as shown in Figure 4 the flood gun is rotated 90 to ac
452. s 0x00030500 8 Rlowvalue 0x00030500 100 0 Rhighvalue 0x00030500 100 0 To introduce the offset edit the Registers w file using the vi editor to change the range speci fied by these parameter values If you make the range specification smaller for example 99 to 99 the effective value of the LSB in the hardware register decreases which translates to a numer ically lower readback for a given voltage With the Electron Flood Gun control popup displayed the system in ion imaging mode and the flood gun unblanked proceed as follows WARNING Electrical potentials as high as 500 volts may be present at the J1801 connector when the flood gun power switch S3 on the System Controller is in the ON position When making the voltage measurements described below be sure to switch the flood gun power switch OFF before connecting or disconnecting the voltmeter probes 10 1 Calibrate the grid voltage readback as follows Switch the flood gun power switch S3 on the System Controller OFF b With J1801 unplugged from the feedthrough connector as in part 9 above connect the voltmeter between pins T Grid and P Ground c Switch the SysCon flood gun power switch S3 ON and note the voltmeter reading Revision B 3 97 Page 13 of 16 Flood Gun Installation and Test 05 04 25 d Use vi to adjust the values for Rlowvalue and Rhighvalue in the grid voltage section of the Registers Mfile by one volt For example i
453. s associated with the stage These switches include X and Y axis This checking procedure may be performed while the system is under vacuum and while the beam is powered up In the event that you need to adjust or replace any limit switch see Service Procedure 03 01B This procedure refers to Service Procedure 09 03 Using vacchat Revision B 3 97 Page 1 of 4 03 01A Stage Travel Limit Switch Inspection Part 1 Zeroing the Stage to Test the Negative Limit Switches Zero the stage to test the negative limit nlimit switches in the x and y axes and to verify the encoder readback See Fig 1 for the location of the x and y axes limit switches and the load limit switch 1 1 To make sure the Readback function is turned on toggle the Readback button on the Tasks pulldown 1 2 Toaccess the Stage Control popup click on the Stage icon 1 3 Click on the Zero Stage button to zero the stage 1 4 Check the screen interface to see if the encoder verifies the stage is at 0 0 Switch breaker Switch breaker Switch breaker for xplim crews for xnlim zm T j S3 xnlim i j H L cy Oo c3 co Oo a3 xplim eet ee Switch breaker i S6 ynlim for ynlim ES Switch breaker O OO screws il Switch breaker
454. s follows Page 10 of 16 Revision B 3 97 05 04 25 poo oF s Flood Gun Installation and Test Switch the flood gun power switch S3 on the System Controller OFF Connect the voltmeter between pins G Ydef and P Ground Switch the flood gun power switch S3 on the System Controller ON Sweep the deflection slider slowly through its range and verify that the positive volt age is the same magnitude as the negative voltage 0 V to 10 V and that the read backs track the voltmeter Check the negative deflection voltage control as follows Switch the flood gun power switch S3 on the System Controller OFF Connect the voltmeter between pins H Ydef and P Ground NOTE This will be opposite in polarity to pin G above Switch the flood gun power switch S3 on the System Controller ON Sweep the deflection slider slowly through its range and verify that the negative volt age is the same magnitude as the positive voltage 0 V to 10 V and that the read backs track the voltmeter Check the filament voltage control as follows a Make sure that the system is in ion imaging mode and that the flood gun is unblanked Switch the flood gun power switch S3 on the System Controller OFF Connect the Flood Gun Board Test Circuit to pins E and F Filament supply of the cable connector and connect point 3 to chassis ground with a clip lead see Fig 6 Switch the flood gun power switch S3 on the System Controll
455. s port allows you to isolate by closing V6 and V2 and leak test the loadlock and roughing line separately Most leak testing is done via the port at the turbo pump foreline Page 2 of 4 Revision B 3 97 Vacuum Leak Checks 04 02 2 3 2 4 2 5 8000 9800 MicroMill HT Vacuum System Schematic Single Pump Ion Pump Cabinet see note 4 IP TC2 pmi n oN V6 7 2A i T f A EN Ionization M eoo Ms ees Valve LN x TC4 To Exhaust VTI VY Bie see VA note 2 Foreline Roughi oreiine ikoughing Pump FP SZ ZN Leak Check Valve Notes 1 Several seconds after the turbo pump is powered down the vent valve opens automatically to vent the pump with nitrogen 2 VTI turbo isolation valve normally kept open is closed to isolate the pump during loadlock cycles 3 CA clamps the specimen holder to the stage 4 The MicroMill HT is not equipped with the GAE and Carbon cabinets Figure 1 Single Pump Vacuum System Be sure to check all vacuum lines and plumbing in a top to bottom sequence When the leak detector emits a whining sound to indicate a leak proceed as follows Take note of the area you are testing Remove the He nozzle from area and allow the leak detector to return to normal Reduce the flow of the He slightly to better pinpoint the leak Recheck the area in greater detail and further pinpoint the area of the leak aoe iay have to repeat this process sever
456. s procedure begins with the system AC power disconnected and all circuit breakers in the Power Distribution Unit PDU switched off See Figure 1 Revision B 3 97 Page 1 of 4 01 01 Power Up O iiu eee Pro Fore Rough Turbo Mot Line Pump Pump Emergency SysCon ERN Computer Laser Computer B High voltage Ion Turbo Pump Pump Contr Controller elec cab2 Figure 1 Circuit Breakers and Power Switches Front of Electronics Module 1 2 Plug in the main power line as shown in Figure 2 1 3 Switch on all circuit breakers in the PDU 1 4 Use a circuit tester to test the power strips that are shown in Figure 2 Page 2 of 4 Revision B 3 97 Power Up 01 01 VacCon Computer Laser Computer Turbo pump Rough pump Power strips HV Power Supply Turbo lon Pump au ere Dedicated outlet Figure 2 Power Cords and Power Strips Rear of Electronics Module 1 5 Switch off all circuit breakers in the PDU 1 6 Plug the VacCon Servo and SysCon module power cords and the Ion Pump power cord into the power strips NOTE The ion pump has its own dedicated outlet on the left power strip as shown in Figure 2 Part 2 If the Emergency Stop Switch is Pushed In If the emergency stop switch is pushed in proceed as follows 2 1 Release the emergency switch from its detented position 2
457. s seen as an eight bit A D con verter on the vertical scale is a range of torr from 2 50 torr to 0 001 torr The hypothetical ratio shown in the figure can be used by the computer to adjust the readout 0 001 torr At 230 a typical TC may say that the pressure is 0 001 In that case the ratio of 255 230 1 11 is calculated and can be used anywhere along the slope of the dashed line to find the accurate reading by multiplying the Typical TC readout by 1 11 Pressure 2 50 torr 0 Readout 230 255 Figure 1 Example of the ratio of an ideal TC reading and a typical reading Page 2 of 2 Revision B 3 97 Section 5 Column 05 01 Column Parameter Log 05 02 05 Cleaning Column Lens 2 Elements 5 nm Column 05 02 10 Cleaning Column Lens 2 Elements 10 nm Column 05 02 25 Cleaning Column Lens 2 Elements 25 nm Column 05 03 05 MCP Removal and Replacement 5 nm Column 05 03 10 MCP Removal and Replacement 10 nm Column 05 03 25 MCP Removal and Replacement 25 nm Column 05 04 05 Flood Gun Removal and Replacement 5 nm Column 05 04 10 Flood Gun Removal and Replacement 10 nm Column 05 04 25 Flood Gun Removal and Replacement 25 nm Column 05 05 Aperture Limit Switch Inspection 05 06 External Aperture Inspection and Lubrication 05 07 Aperture Replacement 05 08 Aperture Milling Table Test N A not included 05 09 05 Column Removal and Replacement 5 nm Column 05 09 10 Column
458. se Alignment in X and Y With the chamber still vented and the nozzles extended use the following procedures to align the nozzles along the X and Y axes 8 1 By eye see that the nozzles are within 1 to 2 mm of either side of the faraday cup as shown in Fig 7 i2 mm Figure 7 Top view Tri nozzles 1 2 mm to either side of faraday cup Revision B 3 97 Page 9 of 12 10 02 Dual Nozzle Replacement 8 2 The Y plim switch should make contact before the nozzle goes past the faraday cup As you can see in Fig 8 if the nozzle is bent backward i e at less than 90 deg the nozzle will contact the MCP If the nozzle is too far forward in Y this portion can touch the mcp M Menem a b Figure 8 Side view A correct bend a and an incorrect bend b In Service Procedure 10 03 with the chamber under vacuum finer alignment is made Part 9 Removing a GAE Nozzle Subassembl A beehive GAE nozzle is a single nozzle delivering gas for etching One such nozzle is shown in Fig 9 A GAE nozzle subassembly is removed only when it is broken or is to be replaced with a reservoir nozzle subassembly Removing a GAE nozzle subassembly means removing the noz zle and the insulator at the same time pus P Figure 9 GAE Beehive Nozzle 9 1 From the main Microsurgery screen select Depo Nozzle and from the pull down menu select Retract 9 2 Using pair of needle nose
459. se pressure close V32 and V33 and switch off the roughing pump d Press the pushbutton switch on the carbon cabinet door to deactivate the pneumatic valves the green indicator light on the switch should go dark Page 8 of 8 Revision B 3 97 Section 12 System Controller e 12 01 SysCon Overview e 12 02 SysCon Power Supplies Circuit Breakers and Switches 12 03 Using a MultiBus Extender Board 12 04 Bit3 Board 125B e 12 05A Knob Panel Interface Board 841 e 12 05B Knob Panel Interface Board 1810 12 06 Stage Aperture Drive Boards 891 892 893 12 07 Analog Drive Board 1082 12 08 High Voltage Interface Board 1102 Not included 12 09 Raster Generator Board 1110 12 10 Signal Acquisition Board 1381 12 11 Flood Gun Interface Board 1090 12 12 Flood Gun Supply Board 1130 Revision B 3 97 Page 1 of 2 Page 2 of 2 Revision B 3 97 ZA Micrion Service Procedure No 12 01 Service Procedure Title SysCon Overview Applicable Systems All Frequency of Service As needed Introduction The Raster Generator the Analog Drive and the Signal Acquisition boards are the heart of the SysCon imaging system The combination of the Raster Generator and Analog Drive boards gen erates the scan capability while the Signal Acquisition board converts analog signals from the MCP into digital form The digital signals are passed to the Univision board which is in the com puter module The remaining boards include t
460. sembly Position in Column Top View of Blanking Due id Aperture bonded with silver paint Silver Paint Side View of Beam m in Blanking Assembly Figure 8 Blanking Aperture Location Part 6 Clean the Lower Column 6 1 6 2 Examine the lower column for contaminants under high intensity light Figure 3 shows the lower column elements Use the lens brush cotton tipped applicators and nitrogen to gently clean off any contam inants you find use the nitrogen to remove contaminants from areas that you are not able to reach with the brush or cotton tipped applicators Ground element surfaces are espe cially susceptible to particulate contaminants Clean the interior of the lower shield the gun and the column Revision B 3 97 Page 9 of 10 05 16 10 Blanking Aperture Replacement NOTICE LOWER COLUMN ELEMENTS ARE FRAGILE Any scratches will ruin the lower column Lens 2 elements Also any metal tracks left on ceramic surfaces cause serious problems with the column operation Part 7 Reassemble and Reinstall the Column 7 1 Reinstall the lower shield and MCP in their original rotational positions The center bores of the lower shield and the Lens 2 assembly should be concentric centrally aligned 7 2 Clean the workchamber as described in Service Procedure 06 03 and the ion pump con nector tube 7 3 Reinstall the column as described in Part 5 of Service Procedure 05 09 10 Column Removal and Replacement 10 n
461. servoir in the TMCTS gas cabinet 3 1 On board 1582 set R8 to its lowest setting fully counterclockwise See Fig 2 150 001580 Z T NU OD DS2 O TPN ZMICRION Q TP1 TP2 Figure 2 Cooler Board 1582 Rev C 3 2 With the cooler harness plugged into the reservoir type the following vacchat command and record the results sc2at Sc2at gives the ambient temperature sc2ct Sc2ct gives the reservoir control temperature which can be seen at TP2 50 mV C See Fig 4 The control temperature is the difference between the ambient and the set point DS2 on the heater board should NOT be lighted sc2sp Sc2sp gives the temperature set point Page 4 of 6 Revision B 3 97 Heater and Cooler Board Settings 10 07 Part 4 Checking Reservoir Temperature under Vacuum Pump down the chamber as described in Service Procedure 04 02 and proceed as follows 4 1 Set the reservoir setpoint to 62 C by tweaking potentiometer R8 clockwise and checking the temperature by typing sc2sp 4 2 In one hour record the reservoir temperatures Sc2ct The temperatures should each be 62 C or above Revision B 3 97 Page 5 of 6 10 07 Heater and Cooler Board Settings Page 6 of 6 Revision B 3 97 Section 11 Gas Cylinder Replacement 11 01 Chlorine Cylinder Replacement 11 02 Xenon Difuoride Cylinder Replacement 11 03 Bromine
462. sh point 116 FFlammable limits not established Extinguishing media dry chemical carbon dioxide foam or sand Special fire fighting procedures A self contained breathing apparatus and full protective clothing should be worn when fighting fires Reactivity Data Stability stable Conditions to avoid exposure to moisture Incompatibility materials to avoid water acids bases oxidizers Hazardous decomposition or by products carbon monoxide carbon dioxide silicon dioxide Revision B 3 97 Page 1 of 2 Hazardous polymerization will not occur Precautions for Safe Handling and Use If material is released or spilled Evacuate the area eiliminate ignition sources keep unprotected personnel out of area use self contained breathing apparatus and appropriate PPE cover spill with sand vermiculite or other dry absorbent place in disposable containers ventilate area before re entering Disposal Incinerate in accordance with regulations For handling and storing Store in cool dry well ventilated area keep container sealed use appropriate PPE avoid skin contact and avoid breathing vapors Control Measures Respiratory protection required NIOSH OSHA approved organic vapor respirator Ventilation use process enclosures local exhaust ventilation or other engineering controls to reduce airborne concentrations Protective gloves rubber or neoprene Eye protection safety glasses or chemical splash goggles Other protect
463. sion B 3 97 Page 1 of 4 10 01 Lubricating the Dual Nozzle Lead Screws Part 1 System Preparation Configure the Chemical Sources in Safe Mode Before performing the tasks described in this procedure you must put the chemical sources in a safe mode see Service Procedure 02 01 WARNING Do not proceed until the chemical sources are secure The chemical reservoirs in FIB systems contain hazard ous materials Labels affixed to the exterior of a chemical cabinet identify the chemical s contained inside If a chemical source is not in its safest state as described in Service Procedure 02 01 it is possible for a combination of component failures to release the chemical s through a cabinet s delivery line a roughing line a purging line or from a chemical reservoir into the workchamber Do not open the workchamber or disassemble any part of the vacuum pumping system or detach any gas line from any chemical cabinet until you are sure that every chemical source attached to the FIB system is in its safest state Power Down and Vent the System Before performing the tasks described in this procedure you must power down the high voltages and vent the system see Service Procedure 01 02 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described
464. sion B 3 97 Page 5 of 8 10 03 Dual Nozzle Fine Alignment Part 4 Fine Alignment in Z With the selected nozzle s extended over Step 2 of the diagnostic block the goal is to align the nozzle s within 350 500 um of the beam center The Z axis travel commands JU and JD jog up and jog down will move the nozzle s 32 um on each repetition of the command After each repetition use the measurement tool to determine how far from center you are To reach the ideal distance which is shown in Fig 3 you can change the Z value Begin by making contact with the nozzle s on step 2 of the diagnostic block Basic Units e 350 750 microns above the sample is the ideal nozzle position e 25 4 microns per mil Table 3 Distance in microns moved per vacchat nozzle command wacena 2000 8000 9000 9800 commands Z ju jd 20 um 32 um 16 um 32 um X je jw 158 um n a 100 um 158 um XS ys JD 1 10 deg n a n a 158 um pese 400 um Step 3 300um Step 2 gt 350 um 200 um Step 1 Figure 4 Diagnostic Block Nozzle Distance in the Z Direction 4 1 Extend the nozzles with the jx command 4 2 Type an sddc command to see if you get the message IN CONTACT with surface Page 6 of 8 Revision B 3 97 Dual Nozzle Fine Alignment 10 03 4 3 If the nozzles are not in contact type the jd command until you come into contact 4 4 When the nozzles are finally in contact with step 2 typ
465. ss to an automated calibration function and allows manual control of the potentials applied to the flood gun elements This popup is accessible either through the Microsurgery program s Misc menu select E Gun Control or through the Beam Screen click on the flood gun graphic located to the immediate right of the image area An automatic calibration function is available through the Electron Flood Gun popup To use it make sure that the system is in ion imaging mode and then click on the Calibrate button in the popup The calibration function brings the electron faraday under the column sweeps the various flood gun control potentials to obtain optimum current in the faraday and then returns the stage to its former position To obtain popups for manually changing the potentials applied to the flood gun elements click on the graphical representations of the elements in the Electron Flood Gun popup For manual inter vention you must disable the flood gun maintenance software function with the Maintenance button in the Electron Flood Gun popup which monitors and adjusts the filament current to maintain constant emission cathode current Part 7 Checking the Flood Gun Boards 150 001130 150 001090 7 1 Ifthe system is currently up perform an Auto power down and switch off the System Controller Chassis as explained in Service Procedure 01 02 7 2 Remove all external connections from the 150 001130 board See Service Procedure 12 11
466. sters M file by one volt For example if the readback reads low which is often the case with the cathode readback increase the values to 2101 0 and 101 respectively e Restart the Microsurgery program to cause the change to be recognized f Compare the readback with the voltmeter reading and repeat substeps d and e as nec essary until the readback is within 0 5V of the meter Part 11 Problem Diagnosis General The following section may help with diagnosing some of the more common flood gun problems Listed below are typical operating parameters Cathode V 85 Grid V 83 Deflection V 1 to 5 5 would be worst case Filament I 1 3 to 1 6 A depending on gun type age and gas exposure With the system up and imaging go to the electron faraday and center it in the field of view Open the Electron Flood Gun Control popup Misc menu Try optimizing the flood gun by using the automatic calibration function click on the Calibrate button in the Electron Flood Gun Control popup Note any anomalies so you know where to proceed next If you have a picoammeter connect it to the EFAR BNC on the work chamber If you only have a voltmeter hook it up to the EFAR BNC on the work chamber using the dual banana to BNC and a coax cable Set the voltmeter to the mV scale With a 10 Mohm input impedance you will see 10 mV nA in the cup Use this as a real time current monitor Page 22 of 24 Revision B 3 97 05 04 05 Flood Gun Instal
467. t Cautiously neutralize with caustic and water Cover with lime Add absor bent material and put into a disposal container For handling and storing Store under an inert atmosphere Keep container closed tightly Avoid breathing vapors Avoid all skin contact Other precautions Keep away from moisture Do not store with organics or reducing agents Control Measures Respiratory protection required OSHA approved respirator Ventilation should be handled only in a fume hood or glove box Protective gloves rubber or neoprene Eye protection safety glasses or chemical splash goggles Other protective clothing or equipment as required by your company Work hygienic practices wash after handling Page 2 of 2 Revision B 3 97 Section 3 Stage 03 01A Checking the Stage Travel Limit Switches 03 01B Adjusting the Stage Travel Limit Switches 03 02 Stage Lead Screw Inspection and Lubrication 03 03 Stage Mapping Not included e 03 04 Mic Stage Program Stage Accuracy 03 05 Laser Beam Alignment 03 06 Stage Height and Carrier Flatness Measurement 03 07 Clamp Actuator Inspection Revision B 3 97 Page 1 of 2 Page 2 of 2 Revision B 3 97 ZA Micrion Service Procedure No 03 01A Service Procedure Title Checking the Stage Travel Limit Switches Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service Annually Introduction This procedure describes how to check the travel limit switche
468. t Figure 3 shows the lower column elements Use the lens brush cotton tipped applicators and nitrogen to gently clean off any contam inants you find use the nitrogen to remove contaminants from areas that you are not able to reach with the brush or cotton tipped applicators Ground element surfaces are espe cially susceptible to particulate contaminants Clean the interior of the lower shield the gun and the column Part 8 Reassemble and Reinstall the Column 8 1 8 2 8 3 Reinstall the lower shield and MCP in their original rotational positions The center bores of the lower shield and the Lens 2 assembly should be concentric centrally aligned Clean the workchamber as described in Service Procedure 06 03 and the ion pump con nector tube Reinstall the column as described in Part 5 of Service Procedure 05 09 05 Column Removal and Replacement 5 nm Column Revision B 3 97 Page 11 of 12 05 16 05 Blanking Aperture Replacement Page 12 of 12 Revision B 3 97 ZA Micrion Service Procedure No 05 16 10 Service Procedure Title Blanking Aperture Replacement 10 nm Column Applicable Systems 8000 Micrion 9800 FlipChip Frequency of Service As Needed Introduction During normal operation the blanking aperture is sputtered by the ion beam Over time the beam will erode the blanking aperture This procedure describes the process of removing and replacing the blanking aperture in a FIB system Required Materia
469. t again if necessary Introduction Mic stage is a Micrion program for testing stage accuracy This test should be run once before shipment of the product and again if there is a question about the accuracy of the stage The testing procedure involves locating die points on a known grid and saving their X and Y offsets to a file If you observe a large X Y offset gt 5 um for most of the the points check the following Die Size Rotation Value The most critical element is the rotation value of the mask or wafer To calculate rotation value see Part 2 Materials Required This procedure requires the following items Reticle a die grid on the mask or wafer with known specifications e Mic stage program in the tmp directory configuration file mic stage config System calibrated for deflection see Pan Rotation Ortho Calibration in Service Proce dure 07 05 Revision B 3 97 Page 1 of 4 03 04 Mic Stage Program Part 1 Loading and Specifying a Known Reticle Mask or Wafer Using the Mask Repair or Microsurgery program load a reticle into system 1 1 Open anew xterm window and type mic stage A small popup window with two buttons will appear at the top left corner of the screen 1 2 Click on the top button StageTest The main window Micrion Stage Accuracy appears This window contains four subwin dows a Reticle b CurrentPoint c Others d The die grid 1 3 In the Mask Repair or Microsurgery
470. t dspenable 0 initializes the routine for the definition algorithm gt dspenable 1 initializes the routine for the definition algorithm gt loadalg usr micrion fib data asm rasta loads the algorithm WARNING Dangerously high voltages are present while the FIB sys tem is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Ser vice Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Part 2 Checking Test Points See Table 1 for the signal characteristics of the following test points 2 1 Bring the power down in the SysCon as shown in Service Procedure 01 02 2 2 Place the oscilloscope probe on the jacket of J3 and power up the SysCon as shown in Service Procedure 01 01 2 3 Place the oscilloscope probe on TP2 2 4 Place the oscilloscope probe on TP4 TP5 and TP6 Revision B 3 97 Page 3 of 4 12 09 Raster Generator Board Table 1 Raster Generator Board Test Points and Signal Characteristics Point Problem Signal Characteristics If Correct J3 metal jacket RS422 SMA con nector No scan is in progress A pulse indicates that a beam blanking signal is present and the raster gen board is generating scan data pulse is present only when raster is in progress TP2 No signal SysCon must Timing signals via P4 to the Sig be initial
471. t 01 02 8000 9800 MicroMill HT Vacuum System Schematic Dual Pump System 77 4 um 7 A 7 le mmol Tonle To Exhaust ote ae FP Pi snis SPI Notes 1 Several seconds after the turbo pump is po wered down the valve opens automatically to vent the pump with nitrogen 2 CA clamps the spe ceumen Bolder ta the 3 The MicroMill HT is ee equ ippo v wi ith a GAE a nd Carbon cabinets 4 Some dual pump syst uipped with TC4 ai nd VTL Figure 3 Dual Pump Vacuum System Revision B 3 97 Page 11 of 12 01 02 Power Down Vent and Reset Part 4 Shutdown 4 1 4 1 4 2 4 3 Quit the FIB application and click the Quit amp Exit button on the Process Watcher At the shell prompt not in an xterm window log out of the system Log in as root and enter the password As the root user enter the command shutdown now This command shuts down the operating system in an orderly and safe manner NOTICE DO NOT PRESS THE RESET BUTTON If an application hangs no mouse response DO NOT use the computer Reset button to reboot Use of the Reset button crashes the operating system To clear the hang press the three keys CTRL ALT BACKSPACE this will terminate X Windows without crashing the operating system Then type xinit atthe shell prompt to start the user interface X Windows Part 5 Resetting After an Emergency Shutdown An emergency shutdown is one in which someone pressed the red EMO button T
472. t check the 3 8 9 5 mm gap You can proceed with the vibration isolators in any order In this procedure we start with the iso lator at the right rear 3 1 Ata rear isolator such as shown in Figure 4 turn the pressurizing screw clockwise until the gauge reads 35 psi Repeat for the other rear isolator Within 30 seconds the process module table will stabilize EHE CO NN oam pad Securing nut Pressurizing screw Adjustment screw INN Intake port Leverarm PW Aa a Air source Air to isolator Figure 4 Side View Vibration Isolator 3 2 Try the spacer between the pad and the piston collar Turn the pressurizing screw at the secondary air regulator to increase or decrease the air pressure until the spacer can fit snugly 3 3 Once the gap has been established check the lever arm to see if it is level If necessary turn the adjustment screw to level the lever arm 3 4 Next adjust the pressurizing screw to regain the spacing Check the lever arm again When the gap is correct and the lever arm is level lightly tighten the securing nut 3 5 Repeat steps 3 1 through 3 4 at the other two isolators 3 6 When the gaps are set note the highest air pressure at the valve gauges 3 7 Toachieve the optimum damping control adjust the air pressure in the Fluid Regulator to 10 psi more than the value noted in the previous step 2 7 Page 4 of 4 Re
473. t proceed until you have switched off the applicable power supplies Clean off the exterior of the system as well as the floor see Service Procedure 06 05 Open the Workchamber Remove the front panels to gain access to the workchamber door Once the system is completely vented open the workchamber door by removing the 1 2 socket head cap screws Page 2 of 24 Revision B 3 97 05 04 05 Flood Gun Installation and Test Part 2 Remove the Flood Gun 2 1 After the system has vented open the workchamber Three types of flood gun MCP con figurations are installed in FIB systems with 5 nm columns a flood gun without a snout combined with a small MCP as shown in Figures 1 and 2 aflood gun with a snout paired with a large MCP as shown in Figures 3 4 and 5 alow profile flood gun without a snout used on MicroMill HT models as shown in Figure 6 which has its own procedure for removal included in Figure 6 2 2 Remove the flood gun electrical connectors disconnect the grid lead the two filament leads and the 4 pin keyed connector see Figures 1 3 and 4 NOTICE DO NOT DROP MOUNTING SCREWS Before removing and replacing the flood gun place a clean lint free wipe below the flood gun to prevent the mounting screws from falling into the turbo pump or the stage hardware If a screw is dropped into the workchamber be sure to retrieve it before proceeding 2 3 Remove the flood gun from the workchamber lid by removing
474. tact flush with plenty of water for at least 15 minutes get medical attention Skin Contact remove contaminated clothing immediately flush with water for at least 15 min utes get medical attention Revision B 3 97 Page 1 of 2 Fire and Explosion Hazard Data Flash point 24 CFlammable limits not established Extinguishing media dry chemical carbon dioxide foam or sand for large fires flood area with water Special fire fighting procedures A self contained breathing apparatus and full protective clothing should be worn when fighting fires Unusual fire and explosion hazards flammable liquid contained vapors may create a hazard for fire or explosion may emit toxic or irritating gases upon combustion Reactivity Data Stability stable Conditions to avoid exposure to moisture Incompatibility materials to avoid water alcohols silanols or other hydroxyl containing com pounds in the presence of a catalyst e g acids bases polar salts heavy metals Hazardous decomposition or by products Silica carbon monoxide carbon dioxide organic pyrolysis products hydrogen gas Hazardous polymerization will not occur Precautions for Safe Handling and Use If material is released or spilled Isolate hazardous area eiliminate moisture and ignition sources keep unprotected personnel out of area use self contained breathing apparatus and appropriate PPE cover spill with sand vermiculite or other dry absorbent Fo
475. tal and sending them on to the com puter Tools and Materials Required Voltmeter Oscilloscope See Service Procedure 05 04 Flood Gun Installation and Test ELECTROSTATIC DISCHARGE This board is sensitive to electrostatic discharge Handle the board as follows 1 Touch your hand to the metal frame of the chassis to discharge static or wear a grounding strap 2 Hold the board by the ejector tabs 3 If you must lay the board down lay it component side down NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment 82 93 this procedure is a Type 5 task Specifically Equipment is energized Measurements and adjustments require physical entry into the equipment Revision B 3 97 Page 1 of 4 12 11 Flood Gun Interface Board jJ 150 001090 TP3 TPe TP4 Eus MICRION 9 PIN 1 Board number and revision level are stamped on the ejector TP2 P4 D ps TP GND e e e TP2 TPI P3 TP7 Page 2 of 4 Figure 1 1090 Flood Gun Interface Revision B 3 97 Flood Gun Interface Board 12 11 Part 1 DS1 As Indicator of Flood Gun Supply As shown in Table 1 if the LED DS1 in Figure 1 is illuminated the Flood Gun Supply board is sending high voltages to the Flood Gun If DS1 is off no voltages are available to the Flood Gun except for 25V as shown in Table 1 When DS1 is off the high voltages still exist on the Flood Gu
476. te If you cannot increase L2 voltage to 30 kV without incurring noise proceed to step 2 6 which is illustrated in Figure 2 Page 4 of 6 Revision B 3 97 Column and Lens Curing 05 12 10 Maximum L2 voltage without noise 30kV Onset of noise 24 kV 2 L2 Voltage in kV Figure 2 L2 Curing Procedure II 2 6 If step 2 5 does not eliminate noise below 30 kV proceed as follows a b 0 BO Locate the focus power supply in the electronic module rack Turn it off Set the L2 control to 30 kV Turn on the focus power supply for 2 seconds and turn it off Reduce the L2 control to 0 V and turn on the focus power supply Increase L2 and observe any gain in L2 voltage before noise is produced If necessary perform steps 2 3 and 2 5 again If there is still no gain in L2 voltage before noise is produced repeat this step with L2 set to 30 kV The procedure is complete If you are unable to bring L2 to 30 kV without noise after following this procedure please call the Micrion Optics Dept Revision B 3 97 Page 5 of 6 05 12 10 Column and Lens Curing Page 6 of 6 Revision B 3 97 ZA Micrion Service Procedure No 05 12 25 Service Procedure Title Column and Lens Curing 25 nm Column Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service After Pumpdown following venting or HV Shutdown Introduction This procedure describes how to cure the second lens L2 in the M
477. ted do not induce vomiting obtain medical attention Reactivity Data Stable Hazardous polymerization will not occur Revision B 3 97 Page 1 of 2 Spill or Leak Procedures Wipe up or absorb with sand earth or sawdust Do not wash directly into any public water or sewer system Waste Disposal Method Dispose of according to local regulations for mineral oils Special Protection Information Respiratory protection None required Ventilation Not required Protective gloves Not required Eye protection Not required Other protective clothing or equipment Coverall recommended Washing hygienic practices Wash skin after contact and generally observe good standards of hygiene Special Precautions Handling amp storage precautions None Page 2 of 2 Revision B 3 97 Material Safety Data Sheet MSDS Bromine Emergency contact Chemtrec 800 424 9300 This MSDS is provided for general information only For information about the manufacturer of a particular chemical contact the environmental health and safety coordinator at Micrion Corporation 508 531 6464 Substance Identification Chemical name BromineChemical family halogen Formula Br Molecular weight 159 81 CAS 7726 95 6 Physical Data Dark red liquid Boiling point 59 5 CEvaporation rate not available Vapor pressure mmHg 175mm 20 CMelting point 7 25 C 671mm 55 C Vapor density air 1 7 14Specific gravity 3 102 S
478. tem will not reset Bit3 Board seated incorrectly 12 04 Invalid readbacks Cables not locked in place Erratic operation of the 1810 Jumpers 12 05 knob panel Fuses Motor s dead 891 Jumpers 12 06 Fuses Drive outputs Motor s dead 892 Jumpers 12 06 Fuses Drive outputs No scan or noisy image 1082 DACs 12 07 No stigmation wobble No rotation Super imposed image No scan or noisy image 1110 Scan sigs missing from 1082 Ana 12 09 Drive No image sync to 1381 Sig Acq No scan or noisy image 1381 Video electronics gain 12 10 Multiple images Column sense amp chain Image breakup during scan Bbaper lonFara day ElecFaraday Flood gun system par 1090 DAC to 1130 FI Gun Supply 12 11 tially working or not at all Readbacks from 1130 Flood gun system par 1130 Outputs 12 12 tially working or not at all HV missing or loaded down Resistors burned Page 6 of 6 Revision B 3 97 ZA Micrion Service Procedure No 12 02 Service Procedure Title SysCon Power Supplies Circuit Breakers amp Switches Applicable Systems All Frequency of Service As needed Introduction This procedure describes the power supplies fuses and switches for the System Controller sub system and contains the following subsections e Checking Circuit Breakers Checking Power Supplies on the Terminal Blocks e Using Front Chassis Switches and Coax Connectors Tools and Materials Required Voltmeter WARNING Dangerously high
479. ten the screws see Figure 3 ee ee Workchamber Interferometer e Interferometer Mounting Slot Beam Bender NA Interferometer Assembly Top View of Interferometer Alignment Interferometer aligned correctly Interferometer Misaligned to the left Side View of Interferometer Mounting Bracket Countersunk holes 4 screws are recessed Mounting screws 4 F 97 Interferometer Misaligned to the right Interferometer Oo Interferometer 4 mounting slot Note beam bender and photo collector not shown 9 Oo Figure 3 Top and Side Views of Interferometer Page 6 of 12 Revision B 3 97 Laser Alignment 03 05 Part 4 Laser Alignment Close the Workchamber The workchamber must be closed in order to perform the laser alignment procedure close the workchamber lid and tighten the T screw on the front of the lid so that the switch block on the lid actuates the switch on the top right of the workchamber 4 1 Using the motorshell program move the stage to the left front corner of the workchamber as viewed from the front of the workchamber Service Procedure 03 01 Stage Travel Limit Switch Inspection describes how to use the motorshell program to move the stage It is also possible to move the stage by turning the ends of the x and y drive motor shafts outside of the workchamber by hand or with a
480. ter exiting restart the X window system and Microsurgery by typing xinit 4 Search Show The Search Show button in the Constants Editor popup provides the following selections Next Constant highlights the next sequential instance of the parameter name that has been entered in the Constant Name field Peu All highlights all instances of the parameter name entered in the Constant Name leld Clear All clears any highlighting Quitting the Editor To exit from the Constants Editor click the File cascade button in the upper left corner of the popup to get the pulldown menu and click on the Quit Editor selection Revision B 3 97 Page 3 of 4 09 04 Micrion Constants Editor Page 4 of 4 Revision B 3 97 ZA Micrion Service Procedure No 09 05 Service Procedure Title Upgrading to RS6000 Computer Applicable Systems All Frequency of Service As needed Introduction This procedure applies to all upgrades from 1486 to IBM RS6000 computer The new RISC com puter should come pre loaded with the operating system and the latest Micrion software release It will be necessary to transfer certain data files from the current computer to the new one Materials Required e Adaptor cable 235090 25 pin to 9 pin BM RS6000 Computer 100 006762 Model 34H or 100 006763 Model 370 e Bit 3 444 202 Multibus Card 240 000125B e Raster Generator Upgrade 100 010750 H Service Procedure 09 01 Archive Restore Data Fi
481. terbore on the end of the beam blanking assembly The blanking aperture must be seated in the counterbore to ensure proper alignment and column operation Remove the 3 screws 2 shown and remove the lower column assembly 5 5 5 6 5 T 5 8 5 9 Figure 7 Remove the Lower Lens L2 Assembly Shake the silver paint to mix it thoroughly NOTICE DO NOT CONTAMINATE THE COLUMN When applying silver paint to the outside diameter of the blanking aperture do not contaminate the column with silver paint Use cotton applicators and acetone to remove any spilled paint Use a sharp wooden pick to apply a few beads of silver paint first on four or five spots around the outside diameter of the blanking aperture Let the paint dry for approximately 15 minutes Check that the aperture is still in the counterbore if it slips out you will not be able to align the column Then apply apply a thin bead of paint around the outside diameter and allow to dry Reinstall the lower column Lens 2 assembly see figure 6 Insert the high voltage wire into the hole in the HV spacer and tighten the hex head screw on the HV spacer see Figures 3 4 and 5 Reconnect the lower column electrical connectors the wires are color coded Tuck the Page 8 of 10 Revision B 3 97 Blanking Aperture Replacement 05 16 10 connectors and wires back into the slot in the back of the lower column see Figure 4 Blanking Aperture Beam Blanking As
482. that every chemical source attached to the FIB system is in its safest state Power Down and Vent the System Before performing the tasks described in this procedure you must power down and vent the sys tem see Service Procedure 01 02 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Clean off the exterior of the system as well as the floor see Service Procedure 06 05 Open the Workchamber Remove the front panels to gain access to the workchamber door Once the system is completely vented open the workchamber door by removing the 1 2 socket head cap screws Page 2 of 16 Revision B 3 97 05 04 25 Flood Gun Installation and Test Part 2 Remove the Flood Gun 2 1 Remove the flood gun electrical connectors disconnect the grid lead the two filament leads and the 4 pin keyed connector see Figures 1 and 2 Lower Column ED Gun Snout Filament Leads pins 9 9 d 5 a Yo Figure 1 Interior View of Flood Gun Connections 25 nm Column in 8000 System Revision B 3 97 Page 3 of 16 Flood Gun Installation and Test 05 04 25 Note that the position of the flood gun is different in a 9800 series system as sho
483. the CGA 660 Coupling 6 1 Perform the leak check as follows a Atthe nitrogen supply tank increase the output pressure to 90 to 100 psig b Atthe GAE cabinet open the manual Purge valve The Process Gas valve should still be open at this time The cylinder pressure gauge on the right hand side of the chlorine pressure regulator should read 85 to 95 psig c Apply a small amount of the liquid leak detector to the CGA coupling and check for bubbles If a leak is indicated by the presence of bubbles close the Purge valve and the Process Gas valve disconnect the CGA coupling and clean or replace the gasket Then resume this procedure at step number 5 7 Do not proceed until you have a leak free connection Revision B 3 97 Page 9 of 12 11 01 6 2 Chlorine Cylinder Replacement After establishing that there is a leak free connection with the nitrogen supply at 90 to 100 psig restore the output pressure at the nitrogen supply cylinder to 30 psig as follows a Atthe nitrogen supply cylinder turn the nitrogen pressure regulator knob fully coun terclockwise turn the regulator fully off and then close the output valve on the nitro gen pressure regulator b At the workstation switch on the roughing pump for at least 30 seconds until TC1 reads lt 0 01 torr c Inthe GAE cabinet open the manual Vacuum valve very slowly to bleed the pressur ized nitrogen through the roughing pump d When the right hand gauge on the ch
484. the Chemical Sources in Safe Mode Before performing the tasks described in this procedure you must put the chemical sources in a safe mode see Service Procedure 02 01 WARNING Do not proceed until the chemical sources are secure The chemical reservoirs in FIB systems contain hazard ous materials Labels affixed to the exterior of a chemical cabinet identify the chemical s contained inside If a chemical source is not in its safest state as described in Service Procedure 02 01 it is possible for a combination of component failures to release the chemical s through a cabinet s delivery line a roughing line a purging line or from a chemical reservoir into the workchamber Do not open the workchamber or disassemble any part of the vacuum pumping system or detach any gas line from any chemical cabinet until you are sure that every chemical source attached to the FIB system is in its safest state Clean the exterior of the system as described in Service Procedure 06 05 Power Down and Vent the System Before performing the tasks described in this procedure you must power down and vent the sys tem see Service Procedure 01 02 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do not proceed until you
485. the column cap ion gun assembly this is done so that the ion gun alignment is minimally affected see Figure 2 CAUTION Use care when lifting and moving the column cap assem bly The column cap assembly weighs approximately 25 pounds 11 kg If necessary to avoid personal injury secure the help of another person 2 2 Forthe best leverage in removing the column cap assembly stand behind the process module Lift the column cap assembly straight up off the column and gently place it top side up on a clean work surface Note The bottom surface of the column cap assembly serves as both a registration and an O ring surface and is susceptible to damage from nicks and scratches Page 4 of 6 Revision B 3 97 Aperture Shield Replacement 05 15 25 Part 3 Remove the Extractor Cap and the Aperture Shield 3 1 3 2 Rotate the extractor cap approximately 1 3 turn and pull it past the ball detents in the extractor cap holder the ball detents are spring loaded ball plungers Lift the cap out of the holder see Figure 3 NOTICE Take care not to drop the extractor cap aperture shield or the aperture shield screws into the column The column would have to be removed and possibly disassembled to retrieve this hardware Use a small slotted screwdriver to remove the two aperture shield screws see Figure 3 Remove the aperture shield Part 4 Inspect the Aperture Shield 4 1 If there are holes sputtered through the ape
486. the fol lowing motorshell commands MOVES move Apply additional lubricant a bead at a time and work it in as necessary 3 6 Remove the excess lubricant in the area where the lead screw meets the housing beneath the stage Revision B 3 97 Page 5 of 6 03 02 Stage Lead Screw Lube Part 4 Lubricate the Clamp Actuator Gears The clamp actuator gears described in Service Procedure 03 07 are underneath the workcham ber just behind the vibration isolator in the front of the process module see Figure 3 One of the gears is at the end of the horizontal air cylinder and the other gear is at the end of the vertical cam shaft Figure 3 Clamp Actuator Gears Beneath Workchamber 4 1 Remove any old grease from the gears with a lint free wipe dabbed with alcohol 4 2 Apply fresh Braycote 803 white vacuum grease all the way around each gear NOTE All automated programs no longer work in vacserver This includes autovent autopump down and calabrate functions This is a temporary situation and will be changed back in the next release of software 4 3 To distribute the grease over the gears turn the gears with the vacserver commands cac and cau to clamp and unclamp the work sample on the stage Page 6 of 6 Revision B 3 97 ZA Micrion Service Procedure No 03 04 Service Procedure Title Mic Stage Program for Stage Accuracy Applicable Systems 8000 Micrion 9800 FlipChip Frequency of Service Once before shipmen
487. the loadlock into the work chamber because the workchamber is at a lower pressure than the loadlock This burst will raise the pressure in the workchamber In some cases the system will as a safety fea ture shut down the high voltage beam the ion pump and the HCIG when this burst occurs To avoid this problem use the automatic pump down described in Part 1 of this procedure Shut down is avoided during an automatic pump down because safety checking is temporarily and automatically suspended when V2 is opened Check the workchamber pressure by typing sthc When the workchamber pressure has reached 3 00 x 10 torr type the following vacchat commands clv2 opv6 Revision B 3 97 Page 9 of 10 04 03 Pump Down 8000 9800 MicroMill HT Vacuum System Schematic Dual Pump System Ion Pump IP VT s 77 WD Ly f Ionization Gauge 7 HCIG CCIG To Exhaust ote onds after the turbo pump is P wered down the opens automatically to vent the pump with nitrogen 2 CA amps ac specimen holder to the 3 The MicroMill HT is e equi sipped vi ie GAEa nd Carbon cab 4 Some dual pump syst uipped with TC4 ai nd VTL Figure 2 Dual Pump Vacuum System Page 10 of 10 Revision B 3 97 ZA Micrion Service Procedure No 04 04 Service Procedure Title Roughing Fore Pump Inspection and Oil Change Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service Inspect Oil Level and Condition Weekly C
488. the nut by hand Using the hex key loosen and remove the two socket head cap screws holding the cannis ter assembly against the mounting plate and remove the assembly from the cabinet Install the solid no hole VCR gasket on the old reservoir assembly Remove the plastic protective cap from the old VCR plug and screw the plug into the female VCR nut on the top of the old cannister assembly Snug it finger tight and then using the 3 4 and 5 8 open end wrenches tighten it exactly 1 8 turn Tag the old cannister assembly to properly identify its contents Include the serial num ber of the FIB system from which it was removed and the date Put it temporarily in a secure place for disposition in accordance with local procedures At V13 in the GAE cabinet clean the male end of the VCR fitting with a clean dry wiper Revision B 3 97 Page 7 of 10 11 02 Xenon Difluoride Cylinder Replacement Part5 Install and Inspect the New Cylinder 5 1 5 2 5 3 5 4 5 5 5 6 5 T On the new cannister assembly make sure that the manual valve is in the OFF position WARNING If you remove the VCR plug from the cannister assembly while the manual valve is open you will be exposed to xenon difluoride vapor Do not proceed until you make sure that the valve is closed Perform this step under a vented hood or in the vented GAE cabinet Using both the 3 4 and 5 8 open end wrenches loosen and
489. the procedure the greater the exhaust flow the better If the flow is limited by a gate valve in the exhaust duct note the position of the gate valve so that you can restore it later and then open it fully Bypass the safety interlock shut off switch on the door of the GAE cabinet during this pro cedure For systems with this switch opening the cabinet door has the same effect as shut ting off dc power controlling the pneumatic valves To bypass the switch with the cabinet door open press the back of the switch actuator toward you until it clicks into position 3 2 Make sure that the process module vacuum pump exhaust connections are secure and that the pump exhaust system is operating correctly 3 3 Make sure that the push button switch labeled Pneu Valve Shutdown on the GAE cabinet is illuminated dc power for controlling the pneumatic valves must be enabled 1 If the duct has a high low flow sensor increasing the air flow may cause an alarm condition which triggers the 24V GAE interlock circuit disabling valve solenoid power and may also trigger an audible or visible alarm If this situation exists bypass jumper the flow sensor The interlock resets after you push the button adjacent to J1104 on the rear panel of the vacuum control unit Revision B 3 97 Page 5 of 10 11 03 Bromine Cylinder Replacement CAUTION When the Pneu Valve Shutdown switch is on there is a 24 volt 5 ampere dc potential present on the expos
490. til the beam is centered on the laser target and therefore the input to beam bender 1 If necessary loosen the two socket head screws on bender 1 s mounting plate to adjust the lateral position of bender 1 so that the beam is centered on the input to bender 1 then tighten them again Figure 6 provides detail on the location of the beam bender lateral and rotational adjustment screws Tighten the laser mounting bolts Check the beam alignment again to make sure that nothing has moved Adjust beam bender 1 using a laser target so that the beam output from bender 1 is centered on the input to bender 2 Figure 4 shows the location of the beam benders It may be necessary to adjust the rotational and lateral position of bender 1 in order to cen ter the beam on the input to bender 2 If this is the case check the beam alignment at the input to bender 1 and adjust if necessary Note the goal is to get the beam centered on each bender without changing the alignment of previously aligned benders Previous alignments are less likely to be affected if you only have to adjust the beam bender s rotational position Adjust beam bender 2 using a laser target so that the beam output from bender 2 is centered on the input to bender 3 It may be necessary to adjust the rotational and lateral position of bender 2 in order to center the beam on the input to bender 3 If this is the case check the beam alignment at the input to bender 2
491. to the operation manual provided by the printer manufacturer for infor mation about how to enter the printer s Internet Protocol IP address through the printer s control panel You should be logged into the FIB system computer as micrion Part 1 Configuring for the Site s LAN 1 1 Create and edit the ci print file Acopyofatiff print file is included in the application software release It is named tiff print new to prevent the installation of software releases from overwriting an existing copy of the file When installing the network printer for the first time make a renamed copy of this file as follows cd usr micrion fib bin cp tiff print new tiff print l Revision B 3 97 Page 1 of 4 09 06 Network Printer The tiff print fileis the script or command for sending files to the printer and it includes the printer s network host name The default host name is cnp We suggest that you change the name to np1600 or to whatever name the local network administration personnel prefer To do this open the file with the vi editor find the line that looks like PRINTER NAME cnp and change cnp to the new host name for the printer Thus for example PRINTER NAME np1600 1 2 Create the t p macro file Use the cat command to create the ft p_macro file as follows Note that you will not get a prompt while the cat function is operating and that the cat function is terminated by pressing the ctrl d key
492. tors From top left of the rear chassis to lower right Revision B 3 97 Connector To From IBLANK J2201 I Blanking amp 150 434 1110 COL SEN J2202 Col Sense amp 150 813 1381 SCREEN J2203 MCP screen 1130 HV INTLK P2210 High voltage power supply VACHV INTLK J2211 Pwr dist unit ion pump p s flu ids reg back door column conns HV WARN P2212 FAN1 J2213 FAN2 J2214 FGUN CONT J2215 Flood Gun 1130 HVPS CONT J2216 Bertan 1 amp 2 Focus2 1102 DEF PWR J2217 Column electronics Def Pwr switch on chassis front and rear chassis power supplies PHOTO J2218 J2220 MCP CONT J2221 MCP power supply box 1102 DEFLECTION P2226 Column elect recvr bds 1082 ROT SM Z P2227 Stage 891 P2225 KNOB1 P2229 Knob panel 841 TILT X Y P2230 Servo 891 SIGNAL ACQ P2228 Computer Univision Bd Video KNOB2 2232 Knob panel 841 APER P2231 Aperture Y 89xJ4 SOURCE P2234 Aperture X 89xJ3 TILT Z P2233 Servo 891 Page 5 of 6 12 01 SysCon Overview Typical SysCon System and Board Problems Table 3 lists the typical problems that you might encounter that are due to a faulty SysCon board See the individual corrective procedures 12 04 through 12 11 Table 3 Typical SysCon System and Board Problems Symptom Board Problem Proc Sys
493. troduction During normal operation no unusual outgassing from the sample the workchamber turbo pump and the column ion pump should maintain a gas pressure between 1 5 x 107 torr and 6 0 x 107 torr in their respective chambers This is referred to as the base pressure This procedure describes how to obtain base pressure readings and suggests what to do if they are too high These readings should be recorded daily in the system log Material and Tools Required NOTE All automated programs no longer work in vacserver This includes autovent autopump down and calabrate functions This is a temporary situation and will be changed back in the next release of software yacserver program Circuit tester Part 1 Checking Workchamber Pressure NOTE All automated programs no longer work in vacserver This includes autovent autopump down and calabrate functions This is a temporary situation and will be changed back in the next release of software Wait at least 10 30 minutes after loading or unloading a sample or after finishing a deposition for the vacuum to stabilize before you read the base pressure Use the vacserver program for this pro cedure 1 1 Ifvacserver is not currently running bring any unused xterm window to the front or dis play a new xterm window and enter the following command vacserver l 1 2 Take a hot or cold cathode ionization gauge reading of the workchamber pressure in vac server by entering one of
494. trol unit as necessary so that you obtain the correct response when you query the con troller with vacchat c Note the time before proceeding it will take at least 30 minutes for the cooler to cool the cylinder Do not terminate the vacchat program yet 3 22 On the carbon cabinet s main bay door press the pushbutton switch so as to activate the pneumatic valves the lime green indicator light on the switch should light 3 23 Pump down the gas line between the manual valve on the cylinder and valve V31 and leak check the VCR coupling above the manual valve as follows a Switch on the roughing pump and wait at least 30 seconds b Open valves V31 V32 and V33 c When BT3 indicates base pressure close V32 and V33 and switch off the roughing 2 The 1501 and 1581 controller boards are identical Page 6 of 8 Revision B 3 97 Carbon Cylinder Replacement 11 04 3 24 3 25 3 26 3 27 3 28 3 29 3 30 3 31 pump Be sure to leave V31 open d Open V35 by moving the toggle switch on the MKS pressure flow controller to the OPEN position e Monitor BT3 and compare the pressure rise with the characterization that you estab lished earlier in step number 3 8 Watch for a rapid rise in pressure which would indi cate a leak If a leak 1s indicated close valve V31 and then disconnect the VCR coupling clean it and replace the gasket Do not proceed until you have a leak free connection Wait at least 30 m
495. troller ON Sweep the cathode voltage slider slowly through its range and verify that the voltages are 0 V to 100 V and that the system readbacks track the voltmeter If the readback differs from the voltmeter by more than 0 5 V the readback should be corrected as described in part 10 Page 12 of 16 Revision B 3 97 05 04 25 Flood Gun Installation and Test Part 10 Grid and Cathode Voltage Readback Calibration NOTE If you replace the 1090 or 1130 board recheck the calibrations as described below This procedure is a means of compensating the grid and cathode readback process so that the readbacks accurately reflect the potentials being applied to the flood gun The technique is to introduce a numerical offset to the conversion of the 8 bit digital values that are read from the hardware registers on the flood gun controller The conversion is normally based upon the assumption that the full range of values for each of these particular registers represents a voltage range of 100 to 100 This assumption is dictated by the values for the parameters Rlowvalue and Rhighvalue in the Immersion grid voltage and Cathode voltage sections of the Reg isters Mfile These parameter values are normally 100 to 100 as is shown by the following segment from a Registers M file Immersion grid voltage Wnumbits 0x00030500 12 Wlowvalue 0x00030500 0 0 Whighvalue 0x00030500 100 0 Wsoftlow 0x00030500 0 0 Wsofthigh 0x00030500 100 0 Rnumbit
496. ual and automatic procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Part 2 Remove the Column 2 1 Remove the column as described in Parts 1 2 3 and 4 of Service Procedure 05 09 25 Column Removal and Replacement 25 nm Column Bring the column to the work area immediately Cover any openings in the workchamber with aluminum foil CAUTION Use care when lifting and moving the column cap and col umn housing assemblies The column cap assembly weighs approximately 25 pounds 11 kg The column housing weighs approximately 50 pounds 28 kg If nec essary to avoid personal injury secure the help of another person 2 2 Place the column assembly upside down on the work surface 2 3 Note the rotational position of the lower shield The lower shield must be reinstalled in its original position for proper MCP alignment Remove the lower shield by loosening the three Phillips head screws see Figure 1 Remove 3 Phillips head screws to remove shield 2 shown e e Figure 1 Side and Bottom Views of Lower Shield with Mounting Screws Revision B 3 97 Page 3 of 6 05 02 25 Cleaning Column Elements WEAR GLOVES DO NOT HANDLE SOLVENTS When working inside the chamber or when handling any components that will be exposed to vacuum wear gloves rated for Class 100 environments or better Due to disinte gration of such gloves by solvents d
497. uate local exhaust and general ventilation Protective gloves Yes Eye protection chemical safety goggles or face shield Other protective equipment none special Page 2 of 2 Revision B 3 97 Material Safety Data Sheet MSDS Xenon Difluoride Emergency contact Chemtrec 800 424 9300 This MSDS is provided for general information only For information about the manufacturer of a particular chemical contact the environmental health and safety coordinator at Micrion Corporation 508 531 6464 Substance Identification Chemical name xenon difluorideChemical family inorganic fluoride Formula XeF Molecular weight 169 3 CAS 13709 36 9 Physical Data White solid bleach smell Boiling point not availableEvaporation rate not available Vapor pressure mmHg 3 8Melting point 140 C Vapor density air 1 gt 1Specific gravity not available Solubility in water decomposes Health Hazard Data Hazardous components xenon difluoride 99 100 xenon tetrafluoride 0 1 OSHA PEL 2 5 mg m ACGIH TLV 2 5 mg m Regulated under SARA 313 No Routes of entry inhalation skin absorption ingestion Health hazards acute and chronic To the best of our knowledge the toxicity of this material has not been determined May be harmful if inhaled ingested or absorbed by skin Will cause severe irritation to skin eyes and mucous membranes of the upper respiratory system Not known to be carcinogenic Signs and symptoms
498. ue 0x00030500 100 0 Rhighvalue 0x00030500 100 0 To introduce the offset edit the Registers file using the vi editor to change the range speci fied by these parameter values If you make the range specification smaller for example 99 to 99 the effective value of the LSB in the hardware register decreases which translates to a numer ically lower readback for a given voltage With the Electron Flood Gun control popup displayed the system in ion imaging mode and the flood gun unblanked proceed as follows WARNING Electrical potentials as high as 500 volts may be present at the J1801 connector when the flood gun power switch S3 on the System Controller is in the ON position When making the voltage measurements described below be sure to switch the flood gun power switch OFF before connecting or disconnecting the voltmeter probes 10 1 Calibrate the grid voltage readback as follows Switch the flood gun power switch S3 on the System Controller OFF b With J1801 unplugged from the feedthrough connector as in part 9 above connect the voltmeter between pins T Grid and P Ground c Switch the SysCon flood gun power switch S3 ON and note the voltmeter reading Page 20 of 22 Revision B 3 97 05 04 10 Flood Gun Installation and Test d Use vi to adjust the values for Rlowvalue and Rhighvalue in the grid voltage section of the Registers Mfile by one volt For example if the readback reads
499. umn Figure 5 Lower Column Electrical Connectors Page 6 of 10 Revision B 3 97 Blanking Aperture Replacement 05 16 10 Part 4 Remove the Lower Column Lens 2 Assembl 4 1 4 2 Remove the three screws at the base of the lower column Lens 2 assembly see Fig 5 Carefully lift the lower column Lens 2 assembly straight up and out of the column to expose the end of the beam blanking assembly Place it on a clean work surface Disconnect the lower column electrical connectors Cut off the kinked end of the high voltage wire Figure 6 Disconnect the Lower Column Electrical Connectors Part 5 Replace the Blanking Aperture 5 1 5 2 5 3 Use cotton applicators and acetone to remove the silver paint on the outside diameter of the blanking aperture see Figure 7 Insert a probe into the center bore of the blanking aperture and gently pry the blanking aperture loose NOTICE DO NOT CONTAMINATE THE COLUMN When removing the silver paint from the area of the blanking aperture do not contaminate the column with silver paint particles acetone silver paint residue or other contaminants Use cotton applicators and acetone to clean any silver paint residue from the end of the beam blanking assembly Do not allow particles to fall into the blanking assembly Revision B 3 97 Page 7 of 10 05 16 10 Blanking Aperture Replacement 5 4 Place the new blanking aperture in the shallow 0 004 deep coun
500. ure Mechanism and Travel Limit Switches The y travel limit switches 2 are composed of three parts as shown in Figure 2 e Contact at ground potential mounts to the aperture chassis does not move Pivot contact and insulator metal strip insulated on one side with Kapton moves with the aperture block Mounting screw mounts the pivot contact onto the nylon block Movement of the aperture mechanism to its limit in the positive or negative y axis causes the y travel limit switch circuits to close Once the switch closes power to the y aperture motor is cut off Revision B 3 97 Page 3 of 6 05 05 Aperture Limit Switch Inspection Pivot Contact and Insulator Contact at Gnd Potential travels w Aperture Blade Mounting Screw mounts to Nylon block electrically iso lated until switch is made Signal Wire soldered to Shorting Leaf Figure 2 Y Limit Switch Expanded Top View The x travel limit switch is made up of two components as shown in Figure 3 x rear contact leaf x forward contact leaf Aperture Arm X Forward Contact Leaf actuates Switch NN X Rear Contact Leaf White Wire Orange Wire Figure 3 X Limit Switch Expanded Top View 2 1 Make sure that the wires to the switch shorting leaf elements are securely soldered mak ing good electrical contact Make sure the wires are not snagged frayed or otherwise in disrepair Do not move wires unnecess
501. ures are less than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules Revision B 3 97 Page 1 of 6 03 07 Clamp Actuator Inspection Part 1 Checking the Air Cylinder Using the vacchat program check that the air cylinder is turning the cam shaft gear This proce dure begins with no cassette in the chamber Throughout the procedure check the ion gauge status If the vacuum decreases during any action it is likely that you will have to go to Service Procedure 04 09 Cleaning the Rotary Shaft Vacuum Feedthroughs A decrease in vacuum level means an increase of two in the most significant digit for instance if the base pressure is 3 x 107 but after a command it falls to 7 x 10 the rotary shaft vacuum feedthrough s should be cleaned See Service Procedure 04 09 for details 1 1 Check the vacuum level by querying the status of the ion gauge sthc or stcc 1 2 Give the command to unclamp the clamp actuator cau 1 3 Check the vacuum level by querying the status of the ion gauge sthc or stcc 1 4 Give the command to read the status of the clamp actuator stca The message should read unclamped not banked 1 5 Type the command to extend the transport carriage into the chamber ex 1 6 Check the vacuum level by querying the status of the ion gauge sthc or stcc 1 7 Give the command to read the status of the clamp actuator stca The message should read unclamped and banked 1 8 Give the command to clamp the clamp actuator
502. ut exactly 1 8 turn Lightly tighten the socket head cap screws Do not open the manual valve on the cannister assembly yet Revision B 3 97 Page 7 of 10 11 03 Part 6 Bromine Cylinder Replacement Pump Down the Gas Llnes 6 1 Pump down the gas line between the manual 1 4 turn valve on the cannister and valve V19 and leak check the VCR coupling as follows a e f Switch on the roughing pump wait at least 30 seconds until TC1 reads lt 0 01 torr then open valves V13 V15 and V16 Open V17 as follows go to the electronics module and at the control panel for the MKS 244 pressure flow controller for V17 71 locate the valve mode selector switch on the right hand end of the controller and rotate the switch counterclockwise from the EXT position to the manual control position then lift the adjacent toggle switch to the OPEN position see 4 Figure 4 Valve Mode Switch MKS 244 Pressure Flow Controller When BT reads base pressure close V15 and V16 Be sure to leave V19 open Watch BT1 for a rise in pressure which indicates a leak If this happens close V19 and disconnect the VCR coupling clean it and clean or replace the gasket When you have a leak free connection proceed to the next step Do not proceed until you have a leak free connection Open the manual Process Gas Shutoff valve on the outside of the GAE cabinet Open V15 and V 16 for final pumpdown to base pressure 6 2 With valves V12 V19
503. valves in the upper left hand cor ner of the GAE cabinet Do not touch these connectors See Fig 1 Although this presents a relatively minor electric shock hazard a short circuit caused by introducing a conductive metal object such as a tool or a finger ring could generate enough heat energy to cause burns before the power supply automatically switches off Do not wear finger rings or other jewelry while working in the GAE cabinet Exercise care when using conductive metal tools If the GAE cabinet has chlorine installed close the unlabeled manual valve between the Cl pressure regulator and valve V14 by turning it 1 4 turn clockwise as shown in Fig 2 Close the manual valves on all other chemical reservoirs installed in the cabinet Make sure that all valves V12 through V 17 are closed To open or close any of the pneumatic valves V12 through V16 simply click on the valve s icon in the Gas Control Popup see Fig 3 The icon s color and its appearance change to show the new state open or closed Valves V13 XeF reservoir V19 Br res ervoir and V14 Cl reservoir are interlocked so that only one can be open at a time To close V17 click on the valve icon to obtain the setpoint dialog box then click on the 2 If the duct has a high low flow sensor increasing the air flow may cause an alarm condition which triggers the 24V GAE interlock circuit disabling valve solenoid power and may also trigger an audible or visible al
504. ve been properly trained Only qualified personnel should perform this procedure Parti System Preparation Configure the Chemical Sources in Safe Mode Before performing the tasks described in this procedure you must put the chemical sources in a safe mode see Service Procedure 02 01 WARNING Do not proceed until the chemical sources are secure The chemical reservoirs in FIB systems contain hazard ous materials Labels affixed to the exterior of a chemical cabinet identify the chemical s contained inside If a chemical source is not in its safest state as described in Service Procedure 02 01 it is possible for a combination of component failures to release the chemical s through a cabinet s delivery line a roughing line a purging line or from a chemical reservoir into the workchamber Do not open the workchamber or disassemble any part of the vacuum pumping system or detach any gas line from any chemical cabinet until you are sure that every chemical source attached to the FIB system is in its safest state NOTICE CLEAN THE SURROUNDING AREA Before you vent the system clean the exterior of the process module and the surrounding area The column is very sensitive to contamination Power Down and Vent the System Before performing the tasks described in this procedure you must power down and vent the sys tem see Service Procedure 01 02 Page 2 of 12 Revision B 3 97 Blanking Aperture Replacement
505. ve the column as described in Ser vice Procedure 05 09 10 replace the MCP and then reinstall the column 1 There are two styles of small MCP flat and angled see Figure 2 Both styles have the same fasteners and electrical connectors 2 There are two configurations of the flood gun with a snout and large MCP combination see Figures 3 and 4 In a 9800 series system as shown in Figure 4 the flood gun is rotated 90 to accommodate the installation of an optical microscope Revision B 3 97 Page 3 of 10 05 03 10 Remove Install MCP WI in Flood Gun Figure 1 Flood Gun Without Snout and Small MCP Interior View Page 4 of 10 Revision B 3 97 Remove install MCP 05 03 10 Lower Column Workchamber Lid Flood Gun Height Behind the Connector Flood Gun Lateral Positioning Screws 2 MCP d Flood Gun Mounting Screws 2 Side View of Flat Version of MCP Figure 2 Side View of Flood Gun Without Snout and Small MCP s Revision B 3 97 Page 5 of 10 05 03 10 Remove Install MCP Lower Column MCP mounting screws 3 one hidden 4 Flood Gun Figure 3 Flood Gun With Snout and Large MCP Interior View Page 6 of 10 Revision B 3 97 Remove install MCP 05 03 10 Lower column MCP mounting screws 3 one hidden Figure 4 Flood Gun With Snout and Large MCP in 9800 System Interior View Revision B 3 97 Page 7 of 10 05 03 10 Remove nstall MCP Workchambe
506. ver paint Do not get any paint inside the new aperture bore Make sure that any counter bores in the aperture face away from the source Part 7 Installing an Upgrade Aperture Blade The installation of an upgrade aperture blade takes three steps 7 1 Wearing clean room gloves insert the aperture blade until the slot meets the alignment pin 7 2 Align the travel of the apertures bores to be parallel with the travel of the blade 7 3 Insert and tighten the flathead countersunk screw A in Fig 3 Part8 Install the Aperture Mechanism and Drive Plate 8 1 Return the aperture mechanism to the column housing a Insert the two alignment pins on the aperture mechanism into the mounting block holes inside the column b Ifthe set screws are not touching snug tighten the two 4 40 screws that hold the aper ture mechanism to the mounting block on the column drift tube c Very lightly tighten the two 1 8 set screws until they just start to bear against the inside of the column housing The set screws stabilize the slide mechanism when aper tures are selected or adjusted Do not overtighten these screws Page 6 of 8 Revision B 3 97 Aperture Replacement 05 07 8 2 Replace the aperture drive motor plate a Inspect the o ring and adjacent seal surfaces on the motor plate for lint or hair Clean if necessary b Line up the drive couplings You may have to align the drive couplings so they engage when reinstalling the drive on
507. vision B 3 97 Laser Alignment 03 05 y axis drive motor x axis drive Dial indicator stage C motor and stand R mirror B Z c y axis ll stage mirror T CARY m 5 Eri Figure 1 Top View of the Workchamber and Stage Mirrors Lid Open AVOID CONTACT WITH THE AREA OF THE MIRROR ABOVE THE SCRIBE LINE Scribe line z Dial Indicator Contact Area pcr Stage Mirror Adjustment Screws Figure 2 Side View of Stage Mirror Revision B 3 97 Page 5 of 12 03 05 Part 3 Interferometer Alignment Laser Alignment Each interferometer should be flush against the workchamber and centered within its mounting slot see Figure 3 3 1 3 2 Inspect each interferometer see Figure 4 for the location of the x and y interferometers If an interferometer is not properly aligned loosen its mounting screws adjust the position of the interferometer so that it is flush against the workchamber and centered within its mounting slot then retigh
508. vision B 3 97 Section 9 Computer Software 09 01 Archiving Restoring Micrion Data Files 09 02 Setting Time and Date on IBM RS6000 Computers 09 03 Using the Vacchat Program 09 04 Using the Micrion Constants Editor 09 05 Upgrading to RS6000 Computer 09 06 Configuring AIX for a Network Printer Revision B 3 97 Page 1 of 2 Page 2 of 2 Revision B 3 97 ZA Micrion Service Procedure No 09 01 Service Procedure Title Archiving Restoring Files using arctool Applicable Systems All Frequency of Service Monthly Introduction One of the most important preventive maintenance procedures is backing up or archiving the files in the user micrion fib data directory A program called arctool is available on the system to automatically archive and restore critical files including Constants MDDL Labels Lens Tables Locks Logs Mif Files Repair Types Stage Maps Wafer Maps and Tiff Files In addition you can define your own category of files to archive and or restore You can be in any directory and use arctool to archive or restore a file of the types listed above Materials Required e 3 5 diskettes arctool program Part 1 Determining the Number of Backup Diskettes 1 1 Log in as micrion 1 2 Determine the number of archive diskettes required as follows Go to the directory you are backing up cd usr micrion fib Determine the size of this directory structure du k data This command retu
509. vision B 3 97 ZA Micrion Service Procedure No 05 09 10 Service Procedure Title Column Removal and Replacement 10 nm Column Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service As needed Introduction This procedure describes the process of removing and replacing the ion beam column in the FIB system Materials Required This procedure requires the use of the following materials Clean standard field service tool kit Lint free wipes Clean room gloves Laboratory grade isopropyl alcohol Port blanking plates for the ion pump column port and process module column port NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 3 task Specifically Equipment is energized Live circuits are exposed and accidental contact is possible Potential exposures are less than 30 volts RMS 42 2 volts peak 240 volt amps and 20 Joules Revision B 3 97 Page 1 of 14 05 09 10 Remove Replace lon Beam Column Parti System Preparation Configure the Chemical Sources in Safe Mode Before performing the tasks described in this procedure you must put the chemical sources in a safe mode see Service Procedure 02 01 WARNING Do not proceed until the chemical sources are secure The chemical reservoirs in FIB systems contain hazard ous materials Labels affixed to the exterior of a chemical cabinet identify the chemic
510. vision B 3 97 Page 3 of 6 05 13 Column Alignment 1 15 Set the imaging resolution to 256 in the Imaging Control Box in the Beam Control main screen resolve the field of view to 50 um and observe a single grid intersection 1 16 Inthe Aperture Control popup select the smallest aperture note the L1 voltage then rese lect Home Set L1 to the noted voltage 1 17 Click on the ion source schematic symbol to display the Ion Source Popup 1 18 Turn on LZ Wobblel Look for up down or side to side movement of the grid intersec tion For 10 nm and 25 nm columns the wobble function varies L1 voltage by 500V NOTE The wobble function causes the image to go in and out of focus however any side to side or up and down motion indicates that the beam is not passing through the center of L1 Part 2 Aligning the First Aperture The alignment process is iterative between the gun and the small aperture until the wobble is eliminated from L1 and L2 Never align in single adjustments of each or a divergent alignment will result For each aperture L1 should be adjusted for correct beam current L2 should be adjusted for focus The lens tables will save L1 L2 and stig settings automatically for each aperture See Fig ure 4 for the Settings popup 2 1 Inthe Aperture Control popup Figure 4 select one of the smaller diameter apertures i e 25 um or 50 um Make sure that the beam is passing through the aperture as evidenced by a
511. wer to control the pneumatic valves must be enabled at this time 3 3 Remove the six screws that secure the access plate to the cylinder bay on the left hand side of the carbon cabinet and remove the access plate 3 4 Close the manual valve on the old cylinder assembly by turning it 4 turn clockwise 3 5 In the Gas Control Popup close valves V31 through V36 To close valve V35 click on the valve icon to obtain the setpoint dialog box see figure 2 then click on the LeakValve tog glebutton so that it reads OFF 3 6 Click on the RP1 icon to switch the roughing pump on Wait at least 30 seconds 3 7 Open valves V31 V32 and V33 and wait for BT3 to indicate base pressure 0 00 This may take 15 minutes or longer 3 8 When BT3 reads base pressure close valves V32 and V33 3 9 At the control panel for the MKS 244 pressure flow controller which is mounted in the electronics module open V35 fully by rotating the valve mode selector switch on the right hand end of the controller counterclockwise from the EXT position to the manual control position and lifting the adjacent toggle switch to the OPEN position See figure 2 Figure 2 Valve Mode Switch MKS 244 Pressure Flow Controller 3 10 Record the BT3 reading as a function of time to characterize the rate of outgassing 3 11 Close V31 close V35 by moving the toggle switch on the MKS pressure flow controller to the CLOSE position Page 4 of 8 Revision B 3 97
512. when the acceleration voltage is enabled and there is at least 0 25 mA of extraction current 8 1 8 2 8 3 8 4 8 6 8 7 8 8 Type 1og main in an xterm window to open the log file utility window Figure 4 Select Source on the Device option button to display information about the source Click on the New button to display the Newlog popup window as shown in Figure 4 In the Newlog popup enter the serial number of the new source and click on the Today button to set the current day as the installation date for the source Click on OK in the Newlog popup and click on Quit in the LogFile Utility popup NOTICE The logging function will not log the new source unless you restart the software as described below after creating a new log file To activate the registration of the new source click the Quit amp Exit button in the Process Watcher popup At the command shell prompt enter xinit 4 to restart the X window system Power up the system as described in Service Procedure 01 01 Cure the column see Service Procedure 05 12 05 Heat the ion source see Service Procedure 05 11 Calibrate the deflection control system as described in Section 7 of this manual Page 8 of 12 Revision B 3 97 lon Source Change Selects the device type Shows the serial number logfile name and data summary for the logfile selected from the file list Bar chart shows daily usage for selected month year File list s
513. wn in Figure 2 the flood gun is rotated 90 to accommodate the installation of an optical micro scope Lower column Flood Gun EA Snout 4 Pin Keyed Connector Flood Gun I I WD mu E g y u wx N a Grid Lead socket A Filament fw Leads pins i N v X Figure 2 Interior View of Flood Gun Connections 25 nm Column in 9800 System Page 4 of 16 Revision B 3 97 05 04 25 Flood Gun Installation and Test NOTICE DO NOT DROP MOUNTING SCREWS Before removing and replacing the flood gun place a clean lint free wipe below the flood gun to prevent the mounting screws from falling into the turbo pump or the stage hardware If a screw is dropped into the workchamber be sure to retrieve it before proceeding 2 2 Remove the flood gun from the workchamber lid by removing the two mounting screws as shown in Figure 3 Be careful not to damage the MCP screen Lower Column Flood Gun Mounting Screws 2 Flood Gun Height Adjustment Screw Flood Gun Lateral Positioning Screws 2 Figure 3 Side View of Flood Gun and MCP Part 3 Inspect and Test the Replacement Flood Gun NOTICE THE FLOOD GUN AND ITS COMPONENTS ARE FRAGILE Handle the flood gun with care The flood gun leads are somewhat brittle and will break if they are bent back and forth excessively 3 1 Remove the shipping screw see Figure 4 Revision B 3 97 Page 5 of 16 Flood Gun Installation and Test 05 04 25 Loosen the
514. wo commands fpy hpy Revision B 3 97 Page 5 of 8 04 05 Turbo Pump V550 4 6 Put the turbo pump controller in edit mode by pressing the two top buttons on the turbo pump panel simultaneously See Figure 4 Also see Varian s Turbo V550 Controller Instruction Manual 4 7 Press the top right button Pump Current to scroll through the edit menu selections 4 8 Use the top left button Cycle Number to change toggle each setting to match the speci fications in Table 1 Table 1 V550 Operating Specifications Menu Selection Response Soft start NO Water cooling YES Front Remote 232 Front RS232 Baud Rate 9600 RS232 Host Print Host Speed Threshold 42 krom Run Up Time 00h 08m 00s Delay even after threshold YES Pump life reset YES a Select 4 by pressing Cycle Number and pressing Pump Cur rent until the number 4 appears Do the same for the second num ber 2 Speed threshold must be equal to or less than the speed adjustment setting for normal operation Adjust the speed by pressing the two buttons for at least five seconds you may need to reset the controller first by initiating hpn and fpn in vacchat 4 9 With P1 still disconnected give the commands hpn fpn 4 10 Now reconnect D connector P1 4 11 Reconnect the VTI pneumatic line 4 12 Turn on the foreline circuit breaker at the top right front of the electronics module 4 13 In vacchat enter the following co
515. xed to the exterior of a chemical cabinet identify the chemical s contained inside If a chemical source is not in its safest state as described in Service Procedure 02 01 it is possible for a combination of component failures to release the chemical s through a cabinet s delivery line a roughing line a purging line or from a chemical reservoir into the workchamber Do not open the workchamber or disassemble any part of the vacuum pumping system or detach any gas line from any chemical cabinet until you are sure that every chemical source attached to the FIB system is in its safest state Power Down and Vent the System Before performing the tasks described in this procedure you must power down and vent the sys tem see Service Procedure 01 02 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies Clean off the exterior of the system as well as the floor see Service Procedure 06 05 Open the Workchamber Remove the front panels to gain access to the workchamber door Once the system is completely vented open the workchamber door by removing the 1 2 socket head cap screws Page 2 of 10 Revision B 3 97 Remove Install MCP 05 03 1
516. ystem or detach any gas line from any chemical cabinet until you are sure that every chemical source attached to the FIB system is in its safest state Page 2 of 4 Revision B 3 97 Funnel Replacement 10 04 Part 1 Recording the Position of the Existing Funnel Beginning with the workchamber under vacuum proceed as follows 1 1 From the Stage Control window in Microsurgery select Electron Faraday and GoToLa bel 1 2 Set the field of view to 1350 um the resolution to 1024 and the aperture to 100 um 1 3 As you view the position of the funnel record the image via the screen printer to compare with the image taken later when the replacement is complete Power Down and Vent the System Before performing the tasks described in this procedure you must power down the high voltages and vent the system see Service Procedure 01 02 WARNING Dangerously high voltages are present in the process module while the FIB system is powered up Do not rely only on the software Power Down function Disable the voltages using both manual and automatic procedures as described in Service Procedure 01 02 Do not proceed until you have switched off the applicable power supplies 1 4 On the left side of the outside of the workchamber disconnect circular connector J1402 1 5 Once the system is completely vented remove the socket head cap screws and open the workchamber WEAR GLOVES DO NOT HANDLE SOLVENTS When working inside the
517. ystem as described in Service Procedure 01 01 and pump down the system as described in Service Procedure 04 03 Page 10 of 10 Revision B 3 97 ZA Micrion Service Procedure No 05 03 10 Service Procedure Title MCP Removal and Replacement 10 nm Column Applicable Systems 8000 Micrion 9800 FlipChip MicroMill HT Frequency of Service As needed Introduction This procedure describes the removal of the microchannel plate MCP from the column of the FIB system and the installation of a replacement MCP Materials Required This procedure requires the use of the following materials Clean standard field service kit Lint free wipes Clean room gloves Laboratory grade isopropyl alcohol NOTICE Per paragraph 11 1 of Safety Guidelines for Semiconductor Manufacturing Equipment S2 93 this procedure is a Type 5 task Specifically Equipment is energized and measurements and adjustments require physical entry into the equipment or equipment configuration will not allow the use of clamp on probes Revision B 3 97 Page 1 of 10 05 03 10 Remove nstall MCP Part1 System Preparation Configure the Chemical Sources in Safe Mode Before performing the tasks described in this procedure you must put the chemical sources in a safe mode see Service Procedure 02 01 WARNING Do not proceed until the chemical sources are secure The chemical reservoirs in FIB systems contain hazard ous materials Labels affi

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