Ion Chamber Replacement for VS Series Leak Detector
Contents
1. For clarity some items have been omitted from views Rear Cover Screws Rear Cover Screws A fm UA Heh Tn Figure 1 Rear Screws 1 Turn off the power switch located on the back of the unit and unplug 2 Wait 30 seconds for the high voltage to dissipate 3 Using an extended length M5 Allen wrench remove the four screws holding the rear plastic cover Figure 1 Rear Screws 4 Detach the rear plastic cover from the unit lon Chamber Replacement for VS Series Leak Detector Page 4 of 11 Document No Revision 699910016 A ap VARIAN lt Fan Assembly Figure 2 Fan Assembly 5 Disconnect the fan cable and remove the fan assembly by unfastening two wing nuts and one M4 socket head cap screw Figure 2 Fan Assembly Pre amp Signal Spectrometer Se Cable Location cover a a Ton Source Cable Location Ground Stud Location Figure 3 Cable Locations CAUTION Static sensitive device ensure that personnel are properly grounded before proceeding 6 Disconnect the spectrometer ground cable the preamp signal cable and the ion source cable from the spectrometer Figure 3 Cable Locations NOTE Cables not shown for clarity 7 Using an M3 Phillips screw driver remove the spectrometer cover lon Chamber Replacement for VS Series Leak Detector Page 5 of 11 Document No Revision 699910016 A ap VARIAN lt Spectrometer Header Spectrometer Body Figure 4 Spectromet2. lon Chamber Replacement for VS Series Leak Detector Page 7 of 11 Document No Revision 699910016 A ap VARIAN lt 13 Gently remove the ion assembly from the spectrometer header Figure 7 Partial Pressure Plate Collimator wire Remove two screws Figure 7 Partial Pressure Plate 14 Loosen the two screws on the rear and slide the ion chamber out 15 Slide in the new ion chamber aligning the ceramic spacer with the chamber Tighten the two screws CAUTION Ensure that no damage is done to the filaments 16 Position the ion support assembly onto the spectrometer header and align 17 Secure to the spectrometer header using two M4 support screws 18 Connect the collimator wire to the collimator plate using an M1 5 screw Figure 7 Partial Pressure Plate 19 Insert the chamber and extractor wires into the ion support assembly Figure 8 Extractor Plate CAUTION Do not cut the wires by over tightening Ensure that wires are contacting the assembly where required and that no short circuit exists Extractor Plate Ion chamber Figure 8 Extractor Plate lon Chamber Replacement for VS Series Leak Detector Page 8 of 11 Document No Revision 699910016 A ap VARIAN lt 20 Clean the mating surfaces of the spectrometer body and header with Isopropyl alcohol and a clean lint free wipe NOTE Varian recommends that you use the Vac u solv spectrometer cleaning kit PN 670029096 21 Center replacement metal
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5. NOTICE This document contains references to Varian Please note that Varian Inc is now part of Agilent Technologies For more information go to www agilent com chem ae Agilent Technologies FIELD INSTALLATION lon Chamber INSTRUCTIONS Replacement for VS Series Leak Detector Part Number 699910016 Rev A December 2008 Varian Field Instruction Sheet lon Chamber Replacement for VS Series Leak Detector Preface Documentation Standards This manual uses the following documentation standards NOTE Notes contain important information CAUTION Cautions appear before instructions which if not followed could cause damage to the equipment or data loss WARNING Warnings appear for a particular procedure or practice which if not followed correctly could lead to serious injury or death Hazard and Safety Information The common international symbols used in this manual and on the equipment are defined below O OFF Supply Power Earth Ground Terminal ON Supply Power Caution Hot Surface AC Alternating Current Caution Risk of Electrical Prf AN Shock Protective Conductor Terminal lon Chamber Replacement for VS Series Leak Detector Page 1 of 11 Warning Risk of danger Frame or chassis Terminal EE Document No Revision 699910016 ap VARIAN 2N Operators and service personnel must be aware of all hazards associated with this equipment They must know how to recognize hazardous and potential
6. ctube Pressure Wait message progresses to Stabilization Wait and System Ready within ten minutes Refer to the user manual if the system fails to reach the System Ready mode The filament emission current normally operates at 0 8mA 37 Use the display menus MENUS SET UP MANUAL TUNING EMISSION to set the emission to 8 mA NOTE Varian recommends that you wait a minimum of 30 minutes for the vacuum system to clean up to obtain optimum calibration 38 Calibrate the system per the user manual For proper operation the system must be calibrated after opening the spectrometer or changing a filament 39 If the system fails calibration adjust the filament emission current as follows e If gain is too low there is too much signal reduce emission current by 0 1 0 2mA then calibrate again e If gain is too high there is too little signal increase emission then calibrate again The permitted emission current range is from 0 5 to 1 5 mA When calibration is successful filament replacement is complete lon Chamber Replacement for VS Series Leak Detector Page 11 of 11 Document No Revision 699910016 A ap VARIAN lt Canada Central coordination through Varian Inc 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Toll Free 1 800 882 7426 Fax 1 781 860 5437 China Varian Technologies China Ltd Room 1648 Central Tower South Wing Beijing Junefield Plaza No 10 XuanWuMenWai Street Beijing 10
7. ematic If there is continuity short circuit at any of the points remove the header and inspect for shorting a he we ny Ea mrs A ia J EX th lt OUT Aidil In LLL atl pa il rn E 4 a Go ue 4 42 Ion Source Header Pins Figure 11 lon Source Header Pin Schematic 28 Place the spectrometer cover over the header and align the holes Figure 12 lon Source Header Pin Locations Ion Source Header Pins Location Item5 46 Figure 12 lon Source Header Pin Locations 29 I nstall screws and washers items 5 amp 6 then tighten using a M3 Phillips screw driver Figure 12 lon Source Header Pin Locations lon Chamber Replacement for VS Series Leak Detector Page 10 of 11 Document No Revision 699910016 A ap VARIAN lt 30 Connect the spectrometer ground cable the preamp signal cable and the ion source cable to the spectrometer cover 31 Ensure that the vent valve on the turbo molecular pump if installed is tightened Figure 13 Vent Valve NOTE The vent valve is not installed on most turbo pumps Figure 13 Vent Valve 32 Attach the fan assembly Figure 2 Fan Assembly by fastening two wing nuts and one M4 socket head cap screw Then connect the fan cable to the unit 33 Leak check the spectrometer to ensure a leak free joint 34 Attach the rear cover and secure to the unit using existing hardware 35 Power up the unit 36 Watch the Home screen to verify that the Spe
8. er Exploded View CAUTION Wear non powdered ESD safe Nitride or equivalent gloves not included in kit to prevent skin oils from getting on vacuum surfaces Ensure that personnel are properly grounded before proceeding 8 Use an M5 allen wrench to loosen screws item 1 and carefully remove the spectrometer header from the body The vacuum system vents to atmosphere as the screws are loosened Retain the socket head cap screws item 1 and the Belleville washers item 2 See line item 21 for correct orientation of the Belleville washers Figure 10 Direction of Cone 9 Remove the metal gasket item 3 and discard Do not scratch the mating surface when removing the gasket Do not attempt to reuse the gasket Figure 4 Spectrometer Exploded View 10 Examine the spectrometer cavity for discolored areas If present refer to the service manual for cleaning instruction CAUTION This is a static sensitive device ensure that personnel are properly grounded before proceeding lon Chamber Replacement for VS Series Leak Detector Page 6 of 11 Document No Revision 699910016 A ap VARIAN lt 11 Use an M1 5 Allen wrench to unscrew the six coupler screws and the collimator screw Figure 5 lon Support Assembly Callinatoar screw MA support screws Extractor and chamber wires Figure 5 lon Support Assembly 12 Remove the two M4 support screws Figure 6 M4 Screws M4 support screws fk Figure 6 M4 Screws
9. g or replacing O rings keep in mind the following NOTE Varian recommends replacing all O rings during routine maintenance or during any maintenance procedure requiring that O rings be removed CAUTION Remove O rings carefully with your fingers Do not use metal tools for this task this prevents scratching of any sealing surfaces e Wipe all O rings clean with a lint free cloth before installation to ensure that no foreign matter is present to impair the seal e Do not use grease or any other substance on O rings that will come in contact with the vacuum surfaces e Do not use alcohol methanol or other solvents on O rings Doing so causes deterioration and reduces their ability to hold a vacuum e Varian does not recommend the use of vacuum grease If applicable apply a small amount of Apiezon L grease and wipe the O rings shiny dry Metal Seal Care CAUTION Metal Seals must be replaced any time a spectrometer is opened All fasteners must be installed and torqued per assembly procedure specifications Remove Metal Seals carefully with your fingers or a soft tool Metal tools scratch sealing surfaces e Metal Seals are supplied in pre cleaned condition No cleaning is required If necessary Metal Seals can be cleaned using the recommended solvents Wipe Metal Seals clean with a lint free cloth before installation to ensure that no for eign matter impairs the seal e Do not use grease or any other substance on Metal Seals that w
10. gasket inside the bolt pattern and outside of the body cavity To prevent scratching of any sealing surface do not use metal tools for this task 22 Guide the spectrometer header into pocket with the detector housing closest to the inlet Figure 9 Spectrometer Alignment Metal Gasket Detector housing Figure 9 Spectrometer Alignment 23 Insert a screw with three Belleville washers into each hole and finger tighten Figure 10 Direction of Cone NOTE The cones of the Belleville washers should all point to the head of the screw 5 3 5 LZ _ Direction of cone Figure 10 Direction of Cone lon Chamber Replacement for VS Series Leak Detector Page 9 of 11 Document No Revision 699910016 A ap VARIAN lt 24 Following the pattern shown in Figure 10 Direction of Cone torque screws to 45 in lbs 5 0 N m 25 Re torque screws to 90 in lbs 10 2 N m following the same pattern Go through the entire torque pattern twice to ensure the metal gasket is firmly compressed 26 Wait a minimum of five minutes then torque the screws shown in pattern Figure 10 Direction of Cone to 90 in lbs 10 2 N m 27 On the PCB use the resistance meter to verify an open circuit between any two of the six ion source header pins except FIL 1 to FIL 1 and FIL 2 to FIL 2 which should be 0 3 Ohms or less Also verify an open circuit between the body of the spectrometer and any of the ion source header pins Figure 11 lon Source Header Pin Sch
11. ill come in con tact with the spectrometer Spectrometer CAUTION Store the lon Source Preamplifier sub assembly in a cool dry area in a tightly sealed ESD protected container Wear non powdered ESD safe Nitride or equivalent gloves when handling the spectrometer Wash hands thoroughly after handling the spectrometer filaments and especially before smoking or eating The spectrometer and PCB s are static sensitive devices Wear a grounding strap when performing any maintenance on these units and especially when performing maintenance of static sensitive parts CAUTION The spectrometer operates at a very high vacuum produced by the high vacuum turbomolecular pump Service of the spectrometer requires that this vacuum be vented to the atmosphere lon Chamber Replacement for VS Series Leak Detector Page 3 of 11 Document No Revision 699910016 A ap VARIAN lt Equipment Required e Extended Length M5 Allen Wrench e Metric Allen Wrench Set Range 1 5 mm to 10 mm e Needle nose pliers or tweezer e M3 Phillips Head Screw Driver e 1 5 mm Hex Driver e 5 mm Hex Driver e Torque Wrench must be adjustable to 45 in lbs 5 0 N m and 90 in lbs 10 2 N m e Digital Multimeter Fluke 187 or equivalent Installation Procedure NOTE Inspect the new ion source kit for deformation damage and filament coating flaking prior to installation Do not install if damaged Touching the filament under any condition will cause damage
12. ing Kit Part Number 670029096 used in accordance with the kit instructions is recommended for cleaning spectrometer components The kit can also be used for fine cleaning of other parts in the leak detector s vacuum system such as valves and fittings No rinsing steps or high temperature drying is required following cleaning with VacuSolv Although appropriate precautions are advised VacuSolv is compatible with most materials and does not contain toxic chemicals or CFCs chlorofluorocarbons Other acceptable solvents are isopropyl alcohol IPA or Dow Corning OS 20 To clean the leak detector plastic enclosure the LCD display and Front Panel buttons use only a soft cloth slightly dampened with water or a mild soap Do NOT use excess water or cleaning solvents of any kind Avoid splashing any cleaning solvents into the unit through the ventilation openings or Front Panel buttons Wipe the surface with a dry lint free cloth Vacuum Equipment and Cleanliness Cleanliness is vital when servicing the leak detector or any vacuum equipment There are some techniques that are more important in leak detector servicing than in general vacuum work CAUTION Wear non powdered ESD safe Nitride or equivalent gloves to prevent skin oils from getting on spectrometer internal components lon Chamber Replacement for VS Series Leak Detector Page 2 of 11 Document No Revision 699910016 A ap VARIAN lt O ring Care When removing checkin
13. ly hazardous conditions and know how to avoid them The consequences of unskilled improper or careless operation of the equipment can be serious Every operator or service person must read and thoroughly understand operation maintenance manuals and any additional information provided by Varian All warning and cautions must be read carefully and strictly observed Consult local state and national agencies regarding specific requirements and regulations Address any safety operation and or maintenance questions to your nearest Varian office Solvents WARNING The mechanical components of leak detectors may be cleaned with one of the recommended solvents When heated sprayed or exposed to high temperature equipment these solvents become flammable and explosive causing serious injury or death Do not use these solvents near a high temperature source Ventilate the working area with a blower and work in a large well ventilated room Solvents are irritants narcotics depressants and or carcinogens Their inhalation and or ingestion may produce serious side effects Prolonged or continued contact with the skin results in absorption through the skin and moderate toxicity Always ensure that cleaning operations are carried out in large well ventilated rooms and wear eye shields gloves and protective clothing Due to the effective cleaning nature of VacuSolv solvent and its residue free properties Varian Component and Spectrometer Clean
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