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1. PDU ic o I PM2 PM3 PM4 8 ELECTRONICS ELECTRONICS ELECTRONICS ELECTRONICS CTC RACK CHILLER RACK RACK RACK RACK I 2 9 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 2 PM3 4 CHILLER CHILLER CHILLER CHILLER 1 1 1 1 7 1 1 1 1 wt 1 1 1 1 1 1 1 1 o D e o e gt 2 I O 1 o Y N e S Figure 3 1 Power Cabling Overview CPX With Four Process Modules Where a PDU is not used three phase power is fed directly into the process module s electronics rack CORE CHILLER P M CHILLER CUSTOMER SUPPLIED POWER CABLE Leda ERN CONTROL CABLES ____ ELECTRONICS 1 RACK Figure 3 2 Power Cabling Overview VPX With One Process Module Service Manual 2 38 Version 2 4 S DP TS Control System and Power System Distribution AN SPP COMPANY 2 3 1 Power Distribution Unit If Fitted The PDU is used to route power to each process module s electronics rack and also provide power to the following systems e EMO Safety Cir
2. 29 Figure 1 26 Example Healet OChlllGf sisse rebus Ten iussu 30 Figure 1 27 System Pneumatics enne nnne nnne nnn nnns 31 Figure 1 28 Gasbox Valve Island eiii eran tentent roe antec ee Se ea eve Sehen 32 Figure 1 29 Chamber Valve Island sees 33 Figure 1 30 Chamber Pneumatic Schematic 34 Figure 1 31 Vacuum 35 Figure 1 32 HH 36 Version 2 4 1 5 Service Manual Introduction SPTS AN SPP COMPANY 1 1 Introduction This manual is intended to provide service and operator information to qualified STS trained service personnel TO PREVENT RISK OF INJURY ALL MAINTENANCE AND REPAIR PROCEDURES MUST BE UNDERTAKEN BY TECHNICALLY QUALIFIED PERSONNEL WHO ARE FULLY AWARE OF ALL RELEVANT SAFETY PRECAUTIONS ASSOCIATED WITH PROCESSING OPERATING AND MAINTAINING THE EQUIPMENT IN ADDITION SUCH PERSONS MUST BE CAPABLE OF OPERATING SURFACE TECHNOLOGY SYSTEMS STS SOFTWARE This manual has been prepared to provide service engineers and maintenance personnel with the following e system introduction e Control system overview and manual control system operation Description of the mechanical assemblies e Maintenance procedures Pa c Thy p 2 l
3. 26 P15 6 Gas Lines Toxic and 26 P16 Hazardous 50051 28 P16 1 Working with Hazardous 28 P16 2 Spillage of Hazardous Substances 28 P16 3 Additional Safety nnne nnn nnns 28 P16 4 System Cleaning tni Rada n 29 P16 5 Unintended and Intended 29 P17 Disposal of SPTS 2 eu oa aie oan te mao tru nena cuo nnn n ea Uc annis uS E nima Ens 30 P17 1 Decommissioning and Disposal Process 30 P17 1 1 Hazardous Contamination 30 P17 1 2 Areas of 30 DEDOS 31 dre eelj mm 32 Version 1 4 P 3 Preliminary SPTS Figures P 1 Hazardous Re Exe 13 Preliminary P 4 Version 1 4 SPIS AN SPP COMPANY P1 Version 1 4 Preface
4. 15 Figure 1 8 Gasbox Door Switch sess 15 Figure 1 9 Gasbox Extract Sensor sss nennen nnns 16 Figure 1 10 Electronics Rack Typical 17 Figure 1 11 PDU Typical 18 Figure 1 12 Control System nennen nnn nnns 19 Figure 1 13 Operator Station nnne 20 Figure 1 14 Example Control Screen ccccccssseeccceceeeeeeeeeeeeeeeeeceeeeeeeeeeeeeaeaeeeeeeseaas 20 Figure 1 15 Sides dutce E 21 Figure 1 16 ICP Node Layout 22 Figure 1 17 Example Bus 24 Figure 1 18 BUS UN e 24 Figure 1 19 Example 25 Figure 1 20 SMC Valve cem 26 Figure 1 21 Norgren Valve Island 26 Figure 1 22 MPX Pumping Schematic ccccccceeceseeeeeeeeeeeeeeeeeeeseeeeeeeesueeeeeeeeseaas 27 Figure 1 23 CPX VPX Pumping Schematic 27 Figure 1 24 Typical Backing PUMP aissein Soria eats ca a qvod 28 Figure 1 25 System Coolant
5. 59 Figure 3 64 Typical TMC Substrate Options 59 Figure 3 65 Typical TMC Passthrough Enabled 60 Figure 3 66 TMC Screen 7 nnne nnn nnns 61 Figure 3 67 Transport Module Controller TMC ICON 61 Figure 3 68 BueNotoei 0cE 62 Figure 3 69 TMC States Screen ssesssssssssssseeeeen nennen nennen nnn nnns 62 Figure 3 70 Options 63 Figure 3 71 TMG Trace 64 Figure 3 72 TMC Config SCIreenn cc cccccecccsecececeseceecsceeeececsseeeeccenseeseceaeeessaeeneessees 64 Figure 3 73 TMG IO SON SC m e 65 Figure 3 74 Enable Drives 65 Figure 3 75 Nene e 66 Figure 3 76 Scheduler Controller TMC ICON 66 Figure 3 77 Typical Scheduler Screen 67 Figure 3 78 Typical Scheduler Log Screen 67 Figure 3 79 Typical Scheduler Mimic 68 Figure 3 80 Scheduler Mimic 69 Figure 3 8
6. 43 Typical TMC Control enn 43 Typical Overall Tab sese 44 Typical Overall Control Log 46 Typical TMC Robot cccccccscecceeeseseeeeseeeeeeseeeceeesseeeeessaaeeeesaaeees 46 Typical TMC Cassette Tab 50 Typical TMC Core pumping 52 Typical TMC Core pumping Tab eese 53 Typical TMC Commands States 54 3 5 Service Manual Manual Control and Software Utilities SPTS AN SPP COMPANY Figure 3 56 Typical TMC Cassette pumping 54 Figure 3 57 Typical Commands States Tab 55 Figure 3 58 Typical TMC Chamber Tab eese 56 Figure 3 59 Typical Chamber Commands 57 Figure 3 60 Typical TMC Substrate Map Editor Tab 57 Figure 3 61 Typical TMC Create Substrate Options 58 Figure 3 62 Typical TMC Delete Substrate 58 Figure 3 63 Typical TMC Substrate Options
7. 9 Figure 1 12 Control System Layout Version 2 4 1 19 Service Manual Introduction P lt SPP COMPANY 1 4 1 Operator Station Interface The operator station interface consists of a monitor keyboard and mouse located on the CTC cabinet CPX VPX or a stand alone table MPX LPX An optional touchscreen interface can be mounted in the cleanroom wall COCOA R 4 Operator Interface CPX VPX Operator Interface MPX Operator Interface Cleanroom Panel Typical Figure 1 13 Operator Station Interface The interface operates a Windows 2000 or XP environment via an RS Logix software interface Information is displayed on the screen in accordance with the SEMI E95 standard for Human Interface Design An example screen is shown below CP0999 STS Demo LJ LJ Abort unning Checking handoff p Remaining at base pressure for user specified time Remain atbasetme 0s sccm 0 scom 0 scom 13 56MHz 13 56MH2 Platen Dias 0v Vpp Last Leak Check 31 5 Figure 1 14 Example Control Screen If two control stations are fitted the system can be controlled from either of the operator stati
8. yun uo Buryoeq Bulyoeq uo Buroeg 490 20 S499490 Od DopuojeM uonounJ 7 1 J I 20 JJ91U VI YIN IOO Joquueuo Nd 3810S je Joquueuo UinnoeA oo 191u seo JOSH ebund DurJoeq 20 491U ses Jes Figure 2 3 Gas RF Interlock Matrix Service Manual 2 45 Version 2 4 This Page is Intentionally Blank Chapter 3 Manual Control and Software Utilities This Page is Intentionally Blank SPTS AN SPP COMPANY Version 2 4 3 1 3 2 3 3 3 4 Manual Control and Software Utilities Table of Contents BE OCOD MR Rt 7 rete 8 3 2 1 Recipe Setpoints 9 3 22 Manual Control enint 10 3 2 3 Clamping Manual 12 3 2 4 Electromagnetic Generator Manual 14 3 2 5 Heater Manual Control 16 3 2 5 1 Heater Zone
9. 61 3 4 2 1 Accessing the TMC Manual Control Software 61 94 2 2 TMG LOG SCEE esiin aaia seda donee te 61 3 4 2 3 States 62 3 4 2 4 Options SCree Nn cccccccecccecsseceeeceeeeeeeseeeeeeeeeeeeessaaeeeeesaees 63 3 4 2 5 Trace 63 3 4 2 6 Config 64 3 4 2 7 TMC IO Screen 64 3 4 2 8 TMC Misc SCIOen ccccccccceececcsteeeseeneeceesecccseesnesecnscneeecceneesceees 65 SA3 SCS 66 949 1 Solegduler LOG 67 3 4 3 2 Scheduler 68 3 4 3 3 Scheduler NERE 70 3 3 Service Manual Manual Control and Software Utilities lt TS AN SPP COMPANY 3 4 3 4 Scheduler Options 70 3 4 3 5 Scheduler Manual Control 73 3 4 4 Recipe Downloader sess nnne nnn nnns 79 94 COMMGUIATION 82 Service Manual 3 4 Version 2 4 SPTS AN SPP COMPANY Version 2 4 Figure 3 1 Figure 3 2 Figure 3 3 Figure 3 4 Figure 3 5 Figure 3
10. 27 Typical RF Relay Manual Control 28 Typical Pump Manual Control Screen 29 Typical Valve Manual Control 30 Typical Backside Cooling Manual Control Screen 31 Typical RF Backside Cooling Gas Tolerances Screen 32 Typical Watchdog Manual Control 33 State Model cccccccecceeseseeceeeeeeeeesaeeeeeeseeeeeeesaeeseeeaaaeeeessaeees 34 Typical ARAMS Screen 35 Transport Module Controller TMC Icon 35 PAP DMR OS RERUM 36 MOE 37 Typical OBEM aerae 37 Transport Module Controller TMC Icon 37 PNE T 38 Typical Summary nennen nnns 39 Typical Manual view s Trace 41 Typical Pen 41 Statistical nnns 42 Transport Module Controller TMC Icon
11. 41 2 4 System InterlOCKS snie E REENER 42 24 1 Gas InterlockS ee eee eee 42 242 RF CERNERET UCM 43 2 3 Service Manual Control System and Power System Distribution Table of Contents Control System and Power System Distribution Service Manual Figure 2 1 Figure 2 2 Figure 2 3 Figure 2 4 Figure 2 5 Figure 2 6 Figure 2 7 Figure 2 8 Figure 2 9 Figure 2 10 Figure 2 11 Figure 2 12 Figure 2 13 Figure 2 14 Figure 2 15 Figure 2 16 Figure 2 17 Figure 2 18 Figure 2 19 Figure 2 20 Figure 2 21 Figure 2 22 Figure 2 23 Figure 2 24 Figure 2 25 Figure 2 26 Figure 2 27 Figure 3 1 Figure 3 2 Figure 3 3 Figure 2 1 Figure 2 2 Figure 2 3 SPTS AN SPP COMPANY Figures Software 5 CPX VPX Control System 6 MPX Control System 7 KL1114 KL1194 Digital Input 24V seseeeeeeeeeeeennnn 8 KL1124 Digital Input 5V ae 9 1 1418 Digital Input 24V 9 KL3064 Analogue Input 0 10 10 KL3204 PT100 Input RTD essen 10 KL3002 Analogue Input 10V to 10V 11 KL3312 2 Channel Thermocouple Input esses 11 KL2114 K
12. E Sa Fem Jj Gemma X Lj LENT Doane Ga H E Geha E E Deest Patet HE 30H Sy Figure 3 98 Typical Configuration Editor Screen Note Settings marked with the amp symbol can not be changed 3 82 Version 2 4 Chapter 4 Maintenance This Page is Intentionally Blank S P T S Maintenance AN SPP COMPANY Table of Contents A O UCO 6 7 4 2 1 X Ensuring the Tool is in a Safe State for Maintenance 7 4 2 2 ease estes ese oL sas a NE EUM 7 SEC 7 Mor MB 7 425 SOU CS TAMING 7 AS 8 4 3 1 Standard SPTS Tool 8 4 4 Start up and Shut Down Procedures enne nnn 9 4 4 1 Start Up 9 4 4 2 Shutdown nennen nennt nnns 10 4 5 Emergency aca 11 4 5 1 Start up after an Emergency 12 4 5 1 1 Electrical and Mechanical 12 4 5 1 2 System Initiali
13. acceiiparh names aperariontype keys PC Pi3nb dmin amp Pu sp noperartionType 16 values valid Trug lazrerrore gt Akmis op rat bes 1 PREA hA dsln SPU lege aL dicent valuas vallde Trua lait rr rs f accessparh names Tolerance Linker keys PHC Pu sp nTolinsrance 16 values valides True lasterrore p acceiipath n amas DperationType keys PMC PRIJOhAdmIn pp noperatianType 17 values valides True lagtarrare gt accesspat names perationinsr kmye PRO Pha3pbAnmin Zhu sp n perartioninsrance 17 values 0 valide True lasterrors gt acceiipath leranee Linker kinys PMC zPu ip rnTolrInitance 17 values valida Trua lagterr re f accesspath names perationType keys PC sp noperationType 18 value 0 valide True Vasterrore j acceiipath kaye PMC PRIOhAdsIn ciem ac v aluas lait rr fy accesspath names Tnierance Linker keys PHE PR3pDbAnmin sfu sp nTolinsrance 18 values 0 valide True lasrerrore gt acceiipathe Ci names operationTypa kaye PHC PRIJOhAd in SPU pp nOoperationType 19 values valide Trua lagterrare accessparhes names pe
14. 14 57 30 Recipe A C00003 12 delta 00 00 10 025 9 66 StepName Standard material process 00 00 27 233 19 77 StepName Standard material process Delta Information Standard Deviation C4F8 Flow Measured Parameter Name Process Step Figure 3 46 Statistical Information Measurements within the graph can be made by clicking at any point inside the graph then moving the cursor to the desired end point Delta information about the measurement is shown at the top of the display Double clicking clears the value Service Manual 3 42 Version 2 4 S P TS Manual Control and Software Utilities AN SPP COMPANY 3 4 Software Utilities The following utilities are available to the user e TMC Manual Control Software e Scheduler e Recipe Downloader Configuration Editor Note The TMC software will differ between CPX VPX and MPX systems Section 3 4 1 details the CPX version and section 3 4 2 details the MPX version 3 4 1 TMC Manual Control Software CPX VPX Only The TMC program controls the cassette and transport modules Within the TMC program there is an option to manually control the components of the transport system and monitor the system commands and responses To access the manual control software 1 From the Task Bar double click the Transport Module Controller TMC icon TMC Icon Figure 3 47 Transport Module Controller TMC Icon 2 From the TMC select the Control tab Password Field Figure 3
15. 43 PVG IVINS SC e TTE 47 Electrode Assembly ccccccseecceceeeseeeeeeeeeeeseeeeeeeeeeeeesaeaeeeeseaeeeesseeeeeens 48 Electrode Lift Bellows 49 Chamber Base Plate Assembly 50 Electrode Lift Assembly 52 Cylinder Swivel Mount 53 Bypass Pumping Line 54 Turbo Pump 57 Turbo Foleline Assembly 58 Gate Valve ASSOMDIY cccceeecccceceseeeeeeeeeeeseeeeeeeeeeeeceeesaeeeeeeeesseaaeseeees 59 61 ICP Ceramic Ring 62 Chamber Mimic ccccccsseccccceeseeeeeeeeeeeeeeceeeseeeeeeeeesseeeeeeeessaaaeees 64 Removing the Wiring from the I O 73 MCE ENNO AS ERR UNE 74 Fitting the Slice 74 Replacing the 75 Bus Coupler Power Connections ccccccceccsseseeeeeeeaeeeeeeeeeseeeseeeeeeeaas 75 Devicenet Connection cccccccccsesseeceeceeeeeeeeeeeeaeeeeeeeeeeeseeeeeesseeseeeeeeeaas 76 Bus Coupler Secondary Address Switch 76 R
16. spent cartridges must be correctly disposed to minimise environmental impact P15 4 Contamination of Components Fluorocarbons will produce HF by products and components in the gas train will become contaminated The exact nature of by products will depend on the gases used substrates and processes All parts of the system will have contamination including the pumps and pump oil P15 5 Flammable Gases Where flammable gases are used the exhaust must be non flammable there is dilution of the exhaust gases which is controlled and monitored by the system s No pump purge panel P15 6 Gas Lines Toxic and Non toxic WHEN A CHAMBER HAS BEEN PROCESSING WITH TOXIC GASES OR HAS TOXIC GASES CONNECTED THE FOLLOWING SAFETY MEASURES SHOULD BE CARRIED OUT BEFORE THE CHAMBER IS VENTED TO ATMOSPHERE 1 ENSURE THE CHAMBER IS IN A SAFE STATE TO BE VENTED IF TOXIC GASES ARE PRESENT AFTER VENTING BREATHING APPARATUS MUST BE WORN BEFORE OPENING THE CHAMBER 2 ENSURE THE GAS LINES HAVE BEEN PUMP PURGED AND BACK FILLED WITH N2 BEFORE VENTING see Chapter 3 for further information on purging the gas lines 3 PROPER PURGING AND VENTING PROCEDURES MUST BE FOLLOWED PRIOR TO OPENING THE CHAMBER TO ENSURE THAT ANY RESIDUE FROM TOXIC PROCESS GASES AND THEIR BY PRODUCTS HAVE BEEN REMOVED DUE TO THE HIGHLY TOXIC NATURE OF THESE RESIDUES BREATHING APPARATUS SHOULD ALWAYS BE WORN WHEN OPENING THE CHAMBER UNLESS CHEMICAL SAMPLING IS CONDUCTED TO S
17. 4 29 Service Manual Maintenance P T AN SPP COMPANY 2 Fit the new or clean top platen shield E c E o Y 4 EL EN EE o rR TD ESC with top platen shield fitted 4 e E diss Carefully clean the platen Assemble the source by following the procedure detailed in 4 9 2 Assemble the top viewport by following the procedure detailed in 4 8 4 Perform a pump to base operation Y Perform a chamber leak up test After 30 minutes it should be in the order of 1mT Min Service Manual 4 30 Version 2 4 S P T S Maintenance AN SPP COMPANY 4 8 3 Lower Chamber Viewport Overhaul Issue 1 0 Date April 2007 There are two viewports located on opposite sides of the lower chamber block System State Shutdown and vented Equipment and Materials Standard tool kit Isopropyl alcohol Copper slip Parts Required Viewport O ring Viewport gasket Viewport glass Associated Procedures Safety section in the preliminary To overhaul the lower chamber block viewports 1 Refer to Figure 4 8 2 Remove three M6 x 20 screws 1 and viewport flange 2 3 Hemove and discard gasket 3 4 Remove and discard viewport glass 4 Note An additional viewport glass may be fitted between the O ring and carrier 6 amp 5 and the viewport glass 4 When reassembling the viewport ensure that the glass marked UV is always fitted outermost 5 Remove ring 6 and carrier 5 6
18. Delay Time Delay Time end 00 00 00 Delay Position Delay Position end BE s Delay Pressure Delay Pressure end Boost Mode 510124890 90198 a2Bl el Delay Mode Main Mode Main Pressure Main Pressure end mTorr mTorr Main Position Main Position end p E Figure 3 3 Typical APC Recipe Setpoints Version 2 4 3 9 Service Manual Manual Control and Software Utilities lt lt AN SPP COMPANY 3 2 2 APC Manual Control This option allows the user to manually set the position of the APC valve 90 sogas yenueyy ka Pressure Position Control Control Pressure mTorr ages Position 2A Interlocks Figure 3 4 Typical APC Manual Control Screen To allow the APC valve to be operated manually 1 From the Manual view select the Process Module tab From the mimic screen select the APC valve From the control panel select the Manual Setpoints tab Select the manual mode button Select whether interlocks are to be enabled or disabled Select whether gauge 1 or gauge 2 is to be used to measure the pressure LU p eS d Set the required valve position or pressure using the relevant text box The following options are activated using the buttons on the command panel Button Name Position Control Sets the APC to a pre defined pressure Pressure Sets the APC to a pre defined pressure Control Fully opens the APC
19. 16 3 2 5 2 Manually Setting Heater Zone Contactors 18 3 2 5 3 Chiller Manual 19 3 2 6 Gauge Manual 20 3 2 7 Mass Flow Controller MFC Manual 21 3 2 8 Matching Unit Manual 22 3 2 9 Platen and Substrate Lift Manual 25 3 2 10 RF Generator Manual 26 3 2 11 RF Switching Manual Control ccccccccceceecseeeeeseeeeeeseeeeeeesseeeeeesaeeeeseseees 28 3 2 12 Pump Manual Control ccccccccccccseeeeeecseeeeeesaeeeeeeseeeeeesseeeeeesaeaeeeessaeeeeesaees 29 3 2 13 Valve Manual 30 3 2 14 Backside Gas Cooling Manual 31 3 2 15 Watchdog Manual Control eese 33 Service Information 34 3 3 1 Automated Reliability Availability and Maintainability ARAMS 34 3 3 1 1 Transport Module Controller ARAMS states 35 3 3 2 Object Based Equipment Module 36 3 3 2 1 Transport
20. 5 2 1 4 Transport Module Controller 5 2 2 SUC reece de 6 2 2 1 Process Module Nodes cccccccsseececceeeeeceeaeeeeesaeeeececsueueeeeseeeeessaeeeeesaaeeees 7 222 SX 8 2 2 21 KL1114 KL1194 Digital Input 24 8 2 2 2 2 1124 Digital Input 5 9 2 2 2 3 KL1418 Digital Input 24V 9 2 2 2 4 KL3064 Analogue Input 0 10 9 2 2 2 5 KL3204 PT100 Input RTD eeeseeeeeeneeeeeen 10 2 2 2 6 KL3002 Analogue Input 10V to 10V 10 2 2 2 7 KL8312 2 Channel Thermocouple Input 11 2 2 2 8 KL2114 KL2184 Digital Output 24V 11 2 2 2 9 KL2408 KL2488 Digital Output 24V 12 2 2 2 10 KL2612 2 Channel Relay Output 24 12 2 2 2 11 KL2502 2 Channel PWM Output 24 V 3020 Version 5V 13 2 2 2 12 KL4004 Analogue Output 0 10V 13 2 2 3 Allen Bradley PLC Node 00 15 228 1 OUD DIY 15 2 2 3 2 Control logix 5555
21. Figure 2 10 KL3312 2 Channel Thermocouple Input 2 2 2 8 KL2114 KL2184 Digital Output 24V The KL2114 and KL2184 digital output terminals connect the binary control signals from the automation unit on to the actuators at the process level with electrical isolation The load current output of the KL2114 version is protected against overload and short circuit The Version 2 4 2 11 Service Manual Control System and Power System Distribution lt P TS AN SPP COMPANY KL2134 is protected against reverse polarity connection The bus terminals contain four channels that indicate their signal state by means of light emitting diodes KL2114 4 CHANNEL DIGITAL OUTPUT 24V KL2184 4 CHANNEL DIGITAL OUTPUT 24V WITH OUTPUTS SWITCHING TO OV C LEDI 102 B D 03 9 OW LEDA OUTI 097 OUT2 24V 24V io 0V 0 OUT3 OUT4 uw Figure 2 11 KL2114 KL2184 4 Channel Digital Output 24V 2 2 2 9 KL2408 KL2488 Digital Output 24V The KL2408 variant is protected against reverse polarity connection It handles load currents with outputs that are protected against overload and short circuit The bus terminal contains eight channels which indicate their signal state by means of light emitting diodes The power contacts are loo
22. Loadlock PC 24V DC PSU including carousel e PC monitor e Cleanroom panel interface e Cleanroom panel adderlink including KVM switch ALWAYS REFER TO THE POWER WIRING DIAGRAM FOR THE LOADLOCK SUPPLIED IN THE DRAWING PACKAGE BEFORE PERFORMING ANY MAINTENANCE WORK ON THE LOADLOCK P14 5 Electro Magnetic Radiation To ensure that compliance with the electro magnetic compatibility EMC directive is maintained all covers should remain correctly fitted and secured at all times except when their removal is required for maintenance purposes When refitting covers ensure that they are secured with a full complement of the fixing items i e screws clips wire locking etc with which they were originally secured Ensure that all earth leads are connected and all hardware interlocks are operating correctly Non ionising radiation is located in the source and upper amp lower electrodes and has the following properties 380KHz Upto 1KW 788 9m Preliminary P 22 Version 1 4 SPTS P14 6 Laser Devices The system makes use of laser devices to map substrates THE LASERS USED ARE CLASS 2 DEVICES THIS CLASS IS SAFE FOR ACCIDENTAL VIEWING UNDER ALL OPERATING CONDITIONS HOWEVER THIS CLASS IS CONSIDERED HAZARDOUS IF A PERSON STARES DIRECTLY INTO THE LASER BEAM The following table provides details of the laser devices fitted to each handling system Handling System Laser Details CPX VPX Each VCE contains a laser for cass
23. The chamber manual control tab allows the user to monitor the status of the selected chamber and change the chamber state To access the manual control cassette pumping tab 1 Access the manual control software as detailed in 3 4 1 TMC Manual Control Software CPX VPX Only 3 55 Service Manual Manual Control and Software Utilities S P T S AN SPP COMPANY 2 From the TMC control screen select the required chamber tab Figure 3 58 Typical TMC Chamber Tab 3 The following buttons are located on the right hand side of the screen UM Startup Starts the system to allow manual control to be used Resets the system in the event of a system failure Out Service Takes the selected system out of service for example if maintenance work is required to be carried out Returns the selected system to an in service mode Aborts the current operation Pause Pauses the current operation This option is dynamic and the Pause button will change to a resume button to resume the operation if the pause function is activated Note Once the required buttons have been selected the system state can be viewed in the ARAMS indicators Service Manual 3 56 Version 2 4 S P T S Manual Control and Software Utilities AN SPP COMPANY 4 The PLC communications to the chamber be monitored from the window located at the bottom of the screen Chamber ready for transfer delav ms 500 I Value Fi
24. for 10 minutes Boiling water should not be used Note If de ionised water is not available facilities water can be used but the O rings should be thoroughly cleaned using IPA before use as salt can build up on the surface of the material 2 Remove the ring using suitable tongs and allow to cool on a cleanroom wipe Wipe the O ring down with de ionised water and refit 4 If the O ring has not recovered sufficiently this process can be repeated Option 2 1 Place the ring in a clean air oven at 120 140 C Leave for 30 minutes 2 Wipe the O ring down with de ionised water and refit 3 If the O ring has not recovered sufficiently this process can be repeated Service Manual 4 60 Version 2 4 S P T S Maintenance AN SPP COMPANY 4 9 4 9 1 Version 2 4 Process Chamber Disassembly and Reassembly Instructions This section details the procedure for disassembling and reassembling the process chamber assemblies This section has been divided into the following subsections e Source e Magnetic Confinement Chamber e Viewport Lower Electrode Assembly Disassembling the Source Body In order to disassemble the Source the following equipment is required e 1x set of metric Allen keys Disassemble the Source as follows OPENING THE PROCESS CHAMBER CAN EXPOSE PERSONNEL TO POTENTIALLY HAZARDOUS TOXIC SUBSTANCES THE PRECAUTIONS USED TO ENSURE THIS MUST BE SUITABLE FOR THE APPLICATION AND MUST ADHERE TO AL
25. 14 P9 Specific Physical Hazards wcveccccccnssecensncesscannsesscscncssessnscseesnsesecesussreensnsesscnnsseseeansesss 15 P9 1 Viton Synthetic Rubber and Fluoroelastomer Products 15 d 1 15 P10 M ChaMmiCal Safety E 17 PTI riri 18 P12 COMPIESSCG po eem RN 19 P12 1 Pneumatic Isolation esente 19 PTS Vacuum PUMPS RTT 20 eee ee E USENET 21 P14 1 Radio Frequency RF nennen 21 P142 EVE WOK Goierri Ai 21 P14 3 Uninterruptible Power Supply 22 P14 4 Electro Magnetic Radiation 22 P14 5 Laser CVC SS Em 23 P146 LOCK Off PIOGGOUfG 24 P14 6 1 Mains lsolation 24 14 6 2 PDU Electronics Rack Isolation 24 E 25 25 P15 2 Discovering a Gas 25 P15 3 Treatment of Exhaust 25 P15 4 Contamination of enne 26 P155 Flammable Gaseg
26. 3 Select the manual mode control button 4 Select whether interlocks are to be enabled or disabled The command panel displays the number of times the selected backing or turbo pump has been started the number of pump faults that have occurred and the total run hours Note The pump counter reset buttons are located in the Accumulator Log Viewer displayed by clicking on the Datalog button See the Operator s Guide for further information on the Datalog The following options are activated using the buttons on the command panel Resets the device in the event of a device failure 5 Selecting the Statistical Data tab displays statistical data about the selected device turbo pump only 3 29 Service Manual Manual Control and Software Utilities SPTS AN SPP COMPANY 3 2 13 Valve Manual Control This option allows the user to manually operate selected valves on the system 0 g Enable Interlocks Figure 3 31 Typical Valve Manual Control Screen To allow the valve to be operated manually 1 From the Manual view select the Process Module tab 2 From the mimic screen select the required valve 3 Select the manual mode control button 4 Select whether interlocks are to be enabled or disabled The following options are activated using the buttons on the command panel ButtonName Opens the selected valve Closes the selected valve Rese
27. Coll Matching Device Name Mode Device Status Interlocks Figure 3 2 Typical I O Control 3 8 Version 2 4 S PTS Manual Control and Software Utilities AN SPP COMPANY The manual control options available to the user will depend on the device selected Device Details Displays the device name e g Line 4 Output Valve Device Status Displays the current status of the device e g Stopped Device Control Displays the current control mode either Manual or Automatic Mode Interlocks Displays whether the interlocks are enabled or disabled The device is controlled via the system The device is controlled by the operator Resets the device Software Interlocks are Enabled Software Interlocks are Disabled 3 2 1 Recipe Setpoints Certain devices have a Recipe Setpoint tab located on the Command Panel These setpoints allow the recipe to be modified whilst it is running The actual setpoints displayed are dependant upon the device selected and show the actual values as specified during the recipe s creation Any modification made to the set points will only be effective for the current recipe run and will not be stored This section does not describe the setpoint fields because they are detailed under recipe creation Phase 1 SetPoints aseg 0 Boost Time Boost Time end 00 00 00 0 00 00 Boost Position Boost Position end Boost Pressure Boost Pres end
28. In the interests of safety various software and hardware interlocks are used on the system to protect against hazards inherant in the operation of the equipment The software interlocks will prevent processing should certain monitored parameters not be met When either a software or hardware interlock failure occurs the CTC will display an interlock error message detailing the exact interlock failure There are two mechanical interlock circuits on the system e Gas interlocks Disables the system gas lines in the event of a fault or if the interlock chain is not complete e RF interlocks Disables the RF generators in the event of a fault or if the interlock chain is not complete In the event of a failure within one of these circuits the operator will be made aware of the failure via the CTC Gas Interlocks Note In order for the RF interlock chain to be energised all of the gas interlock switches must be made to allow relay 4 to be energised Therefore if the gas interlock chain is not energised the operator will not be able to run HF Watchdog Timer The watchdog timer is an electronic timer located in the electronics rack PLC drawer The timer monitors the state of the PLC by sensing a pulse sent by the PLC to the timer If the timer does not receive a signal within a preset time the internal switch within the timer opens disabling the gas interlock chain Backing Pump is Running Backing Pump Purge OK The backing pump interlock
29. screwdriver into the square hole above the cables and releasing the wire grip by levering the screwdriver towards the socket containing the wiring Figure 4 31 Removing the Wiring from the I O Slice Version 2 4 4 73 Service Manual Maintenance SPIS AN SPP COMPANY 3 Remove the damaged slice by gripping the orange tab between the thumb and forefinger and gently lifting the slice out of the I O block c cm gt 888 m Joe OO wo e me me 9 um mm Slice Lifting Tabs 4 gt 22 66 amp amp 66 T an mm mm mm mm mm 5 Figure 4 32 Slice Lifting Tabs 4 Fit the new slice by gently pushing the slice down until it clicks securely into position Figure 4 33 Fitting the Slice 5 Using a terminal screwdriver replace the wiring to the slice by inserting the screwdriver into the square hole above the cables and releasing the wire grip by levering the Service Manual 4 74 Version 2 4 SPTS AN SPP COMPANY 4 10 4 Version 2 4 e E 199 3 rt Aj tr dO Qu 1 58 SE Pa gt a T QEY i 1i yi Figure 4 34 Replacing the Wiring Replacing a Damaged Bus Coupler Maintenance screwdriver towards the socket containing the wiring In
30. 0 valids Trua FE pRQJaOhAdsin sPu i noperartlanlrnitanes 12 wal Tolerance Linker keys PC PR3Dh ndmin sPu sp nTolinsrance 12 values valides True lasterrore OperationType keys PMC PRIOhAdmIn SPU noperatianType 11 values valids Trua lagtarr re gt names perationinsr keys PRO Pha3pbAnmin sp n perationinsrance 13 valug 0 valide True lasterrore gt names Tolerance Linker keys PMC PRIOhAdmIn sPu p nTolrnitance 11 values valide Trua lagterrare f gt names aperationType keys PROC sp noperationType 14 value 0 valides True Vasterrore j n mas DparationInit kaye PMC PRIOhAdeIn noperatianrnitance 14 values valide Trua lagterrare gt names Tolerance Linker keys PMC PR3ODhAdmin Pu sp nTolinzrance 14 values valide True lasterrore fp operatiunTypa keys PMC PRJOhAdain noperationType 1 1 values O valide Trua lagterrare gt perationinsr key PMc Ph3pbAndmin sp noperarioninsrance 1 5 value 0 valide True lasterrore j n ames TOlerance Linker kaeys PMC PRIOhAdmIn sPu p nTo lrnitance 1 3 values O valide Trua lagterrare gt Tag accezzpathms accesspath acceiipathe accesspath acceiipakh Tag accesspath acceiipakh Tag accesspath
31. 24 DC PSU INCLUDING CAROUSEL PCMONITOR CLEANROOM PANEL INTERFACE CLEANROOM PANEL ADDERLINK INCLUDING KVM SWITCH ALWAYS REFER TO THE POWER WIRING DIAGRAM FOR THE LOADLOCK SUPPLIED IN THE DRAWING PACKAGE BEFORE PERFORMING ANY MAINTENANCE WORK ON THE LOADLOCK Interlocks After performing any maintenance a thorough check of each hardware interlock must be made before placing the tool back into service see 4 7 9 Gasbox After performing maintenance in the gasbox ensure that each manual purge valve is closed before placing the tool back into service Viewports After performing any maintenance ensure that each viewport is fitted with a UV filter except for those fitted with an EPD Source Hinge After lifting the source to its open position ensure the retaining pin is fully engaged to prevent the source from closing accidentally 4 7 Service Manual Maintenance SPTS AN SPP COMPANY 4 3 Equipment The various checks and procedures explained in this section will require the use of a standard tool kit listed below Any special tool or equipment requirements will be detailed at the start of the relevant procedure 4 3 1 Standard SPTS Tool Kit The standard SPTS tool kit is comprised of Service Manual ocrewdrivers flat blade 4 x 1 4 in 6 x 1 4 in 8 x 5 16 in and 10 x 3 8 in Screwdriver cross head Philips 6 in No 1 Screwdriver cross head Philips 6 in No 2 Screwdriver set jeweller s f
32. 38 Power Cabling Overview VPX With One Process Module 38 PDU Typical 39 Power Distribution 40 Gas and ONERE 44 Gas HF Interlock Matrix sese 45 2 4 Version 2 4 SPTS Control System and Power System Distribution AN SPP COMPANY 2 1 Version 2 4 Software Architecture The software architecture consists of the following main components which interact together as follows Industrial PC Recipe Downloader Cluster Tool Controller Scheduler Process Module s CTC Transport Module Controller System Pumping TMC Figure 2 1 Software Architecture Cluster Tool Controller CTC The CTC provides the user interface for the system Through the CTC information is sent to the other components in order to issue commands to the PLC Recipe Downloader The recipe downloader sends a pre configured recipe to the PLC when a recipe is required to be run Scheduler The scheduler controls the sequence in which operations are run on the system including calculating the most efficient way substrates are transferred through the system Transport Module Controller TMC The TMC controls the handling and pumping for the system 2 5 Service Manual Control System and Power System Distribution P TS AN SPP COMPANY 2 2 Cont
33. Core Pumping Cassette iPumping Cassette 2Pumping PMC2 v Enable Interface 0 Enable Passthrough Mode t Command Robot Background Continue To Poll False lnitialisati D Out Service CO Log Comms Traffic Station Slot T Arm 16 Station Overrides E TURO Arm Speed Fast v Station lv 200mm iv Override O Wafer Sensors Enabled Execution Delay s Default Alignment 0G Optimise Aligns Static align Execute Max Align Retries lt Fiducial NOTCH 0 Aligner Substrate Detect O Allow map updates Edge Limit 2 000 Figure 3 51 Typical TMC Robot Tab p Post Position Log Level gg Service Manual 3 46 Version 2 4 S TS Manual Control and Software Utilities AN SPP COMPANY 3 The following buttons are located on the right hand side of the screen Button Name Startup Starts the system to allow manual control to be used Reset Resets the Resets the system the event of a system failure in the event of a system failure cc ANN REED the selected system out of service for example if maintenance work is required to be carried out Returns the selected system to an in service mode Aborts the current operation Pauses the current operation This option is dynamic and the Pause button will change to a resume button to resume the
34. Delivers a substrate to the station as detailed in the remaining Actions options Home Homes the robot Park Positions the robot facing cassette 1 Scan Not available Align Aligns the substrate on the robot arm Test Aligner This option works in the same way as Align but enables the number of alignment cycles to be defined Align Extend Use the check boxes to select the following post operation options PON Note The Align option is only available for the Pick and Place commands The Extend and Down options are only available for the Move command Align Aligns the substrate after a pick or before a place operation Extend Leaves the robot arm in an extended position after the operation has been carried out Down Lowers the robot arm after the operation has been carried out Select the station to perform the operation to from Select the required slot if available Arm Select which robot arm is to be used for the transfer Only used on systems with bisymmetrical arms Substrate Size Select the required substrate size from the drop down list Execution Enter a delay time before the operation is carried out This allows the user Delays to return to the transport module to watch the operation if the control station is located any distance from the transport module 10 Thelogging level can be selected using the log level text field Service Manual 3 48 Version 2 4 Manual Control and Software Utilitie
35. Each year perform the six monthly schedule and in addition perform the following Checks Insert heater check see 4 7 8 Temperature zone test see 4 7 11 e PDU main power breaker check see 4 7 2 Electronics rack main rotary isolator check see 4 7 6 e Interlock check see 4 7 9 Procedures e Gas inlet ring see 4 8 5 Top viewport overhaul see 4 8 4 e SCIF ring EMI shielding and ring see 4 8 6 Lower chamber viewport overhaul see 4 8 3 4 16 Version 2 4 S P T S Maintenance AN SPP COMPANY Version 2 4 HiVac gauge O rings see 4 8 7 Process pressure gauge O rings see 4 8 8 Roughing gauge O ring see 4 8 9 Atmosphere switch O ring see 4 8 10 Vacuum switch O ring see 4 8 11 ESC electrode O ring option see 4 8 12 Weighted Clamp Electrode O Rings option see 4 8 13 Cylinder swivel mount washer see 4 8 14 Bypass pumping O rings see 4 8 15 Turbo pump overhaul see 4 8 16 Turbo foreline O rings see 4 8 17 Gate valve overhaul see 4 8 18 APC seal rings refer to OEM documentation Turbo pump internal and O rings refer to OEM documentation 4 17 Service Manual Maintenance lt T lt AN SPP COMPANY 4 7 Tests and Checks The following section details the common tests and checks that are required by the maintenance schedule specified in section 4 6 4 7 1 EMO Circuit Test On CPX VPX systems EMO buttons are located in the following areas e Hear of process
36. Figure 3 52 Typical Cassette Tab The following buttons are located on the right hand side of the screen Button Name Starts the system to allow manual control to be used Takes the selected system out of service for example if maintenance work is required to be carried out Pause Pauses the current operation This option is dynamic and the Pause button will change to a resume button to resume the operation if the pause function is activated Note Once the required buttons have been selected the system state can be viewed in the ARAMS indicators Select whether the cassette communications are to be logged The current state of the selected cassette and map information can be seen in the Cassette Status tab below the OBEM indicators To manually operate the cassette use the action and setup dropdown boxes and check boxes located on the right hand side of the screen Select the Actions tab located on the right hand side of the screen 3 50 Version 2 4 S TS Manual Control and Software Utilities AN SPP COMPANY The following options are available Command The following options are available Map Maps the selected cassette Move Moves the cassette to a defined slot transfer plane Pick Not available for current build Place Not available for current build Open Door Opens the cassette door Close Door Closes the cassette door Platform In Not available for current build Platform Out Not ava
37. Fit the replacement component and secure using the recovered fixings Ensure the component is correctly positioned without stress and not in contact with any other component Reconnect the connectors and cables as appropriate Switch on Retest the system Replacing Pneumatic Components 1 B m e X xD e Lock out and isolate the pneumatics Identify the solenoid to be replaced Vent the section compressed air Disconnect the electrical wires taking note of the wire colour code and destination Ease off the air pipes and if more than one pipe fitted take note of the pipe code and destination Remove the solenoid Check that replacement solenoid is of the correct type and fit in position Reconnect the electrical wires and the air pipes Turn on the compressed air Reset the system 4 85 Service Manual Maintenance S T lt 4 10 10 4 10 10 1 4 10 10 2 Service Manual AN SPP COMPANY Configuring the Magnatran7 After Changing the Substrate Size When the substrate size is changed the Magnatran7 robot arm may fault after picking up the substrate and generate the following alarm code Substrate not detected after pickup This happens when the arm does not position itself currently beneath the Transport Module substrate detectors for the current substrate size This is rectified by configuring the MagnaTran 7 s radial motion detect sensors for the new substrate size In order to perform this
38. Hemove and discard the O ring from the carrier then clean the carrier with IPA 7 Fit new O ring to carrier then reassemble the viewport using copper slip on screws 1 COT Figure 4 8 Lower Chamber Block Viewport Version 2 4 4 31 Service Manual Maintenance lt P T S AN SPP COMPANY 4 8 4 Top Viewport Overhaul Issue 1 0 Date October 2007 There are two viewports are located in the top of the ICP lid Equipment and Materials Standard tool kit Isopropyl alcohol Parts Required Associated Procedures Safety section in the preliminary To overhaul the top viewports 1 Refer to Figure 4 10 Remove three M4 x 10 screws 1 and viewport heat shield 2 Remove three M6 x 16 screws 3 and viewport flange 4 Hemove and discard gasket 5 Remove and discard viewport glass 6 Remove ring 7 and carrier 8 Hemove and discard the O ring from the carrier then clean the carrier with IPA gt OD CH ceee SS T9 Fit new O ring to carrier then reassemble the viewport yA 2 S ES x 2997 Figure 4 9 Top Viewport Service Manual 4 32 Version 2 4 S P T S Maintenance AN SPP COMPANY 4 8 5 Version 2 4 Gas Inlet O Ring Issue 1 0 Date October 2007 The gas inlet kit is located on top of the ICP lid System State Shutdown and vented Equipment and Materials Standard tool kit Isopropyl alcohol Parts Required Gas inlet O ring
39. Input For Power Contacts Address Selector Power Contacts mm gs Configuration Interface Figure 1 18 Bus Coupler The bus coupler provides the interface between the Logix PLC and the bus terminal controlling the actuators and monitoring the sensors The bus coupler provides power for all the I O slices and feeds the data to and from the PLC via the K Bus connection The unit also incorporates an address selector which allows the secondary address and the BAUD rate to be selected Version 2 4 Service Manual SPTS Introduction AN SPP COMPANY 1 4 5 2 I O Slices Each node or bus terminal has a number of I O slices located within it An example is as shown below 1 Signal LED 1 Signal LED 2 Mr Figure 1 19 Example I O Slice Each bus terminal consists of a number of I O slices including analogue in and out digital in and out and relays Each 1 0 slice has indicator LEDs as shown in Figure 1 19 These LEDs are used to indicate how the slice is operating Analogue I O LEDs are constantly illuminated whereas the relay and digital LEDs are illuminated when the required signal is being sent or received Each of the I O slices are hot swappable i e a damaged card can be replaced without power being removed from the bus terminal The cards consist of either a digital in digital out analogue in analogue out or relay card Each bus terminal will have an en
40. T RUN LED4 TOUTI 4 OO 0072 GND GND 0073 O 0074 GND GND Figure 2 15 KL4004 Analogue Output 0 10V 2 2 2 12 1 KL5111 Incremental Decoder The KL5111 terminal is an interface for the direct connection of 24V incremental encoders A 16 bit counter with a quadrature decoder and a 16 bit latch for the zero pulse can be read set or enabled The state of the counter is transmitted quickly and securely to the PLC over the fieldbus KESIT 1 CHANNEL INCREMENTAL ENCODER 1 D LL SIG LED LED SIG LED 9 uU p B 24V 24V 05 OV K9X8 1 SHIELD H Figure 2 16 KL5111 Incremental Decoder Service Manual 2 14 Version 2 4 S DP TS Control System and Power System Distribution AN SPP COMPANY 22 3 PLC Node 00 The Allen Bradley Control Logix 5555 PLC is located in the PLC drawer in the electronics rack The PLC itself has the following associated equipment Power Supply e Ethernet Card Devicenet C
41. The manual control buttons are located at the top of the screen as shown below scheduler 1 scheduler 2 PEGS PEGS Cassette 1 Cassette 2 Arm T X Scheduler Rescue Reset Figure 3 85 Scheduler Manual Control Buttons 4 The manual control buttons perform the following operations Button Name v Description Scheduler Selects a tool recipe to be run When the scheduler button is selected the following dialogue is displayed From the drop down menu select the required tool recipe to be run Select the OK button to begin the tool recipe Pause Pauses the current tool recipe return all the substrates to their sources prior to the sequence being run Finish Completes the current step of the tool recipe and then stops the tool recipe o Abort Aborts the current tool recipe immediately Note An aborted tool recipe can not be resumed Resets the scheduler in the event of a failure or an alarm being raised 3 4 3 5 2 Cassette Tab Manual Control To access the cassette manual control option 1 Access the cassette manual control as described in 3 4 3 5 Scheduler Manual Control Version 2 4 3 75 Service Manual Manual Control and Software Utilities S p T S AN SPP COMPANY 2 A screen similar to the one shown below is displayed STS Pro Scheduler v6 5 0 scheduler 1 scheduler2 PEG2 PEG3 Cassette 1 Cassette 2 Arm ga ga x Unload Map Pump Vent Open Door Close Door Abort OBEM State Serv
42. Welcome to the service manual The manual is organised into chapters as follows Chapter 1 Introduction This chapter introduces the system discusses its major components and summarises the main features Chapter 2 Control System and Power Distribution This chapter details the control systems that govern all process operations as well as detailing the components that provide AC and DC power Chapter 3 Manual Control and Software Utilities This chapter describes how to manually control individual system devices e g valves MFCs pumps etc and how to use the software utilities that enable troubleshooting of the system Chapter 4 Maintenance This chapter describes the periodic maintenance procedures as well as replacement procedures and assembly instructions for common equipment items P 5 Preliminary 2 Preliminary SPTS About this Manual This manual is protected by copyright and may not in whole or part be stored in a retrieval system or transmitted in any form or by any means copied photocopied translated or reduced to any machine readable form without prior consent in writing from SPP Process Technology Systems UK Limited Owing in most part to SPTS equipment being used by purchasers for their unique applications NO liability can be accepted for any inaccuracies or omissions in this publication although every possible care has been taken to make it as complete and accurate as possible SPP
43. c 6 T2 SV SION OV EI VIG soriano e E E E 7 1 2 1 Substrate Processing 9 Process Ol f 10 A9 11 L3 1 1 SOURCE EncloSUl e 11 1 3 1 2 Coil Matching 11 3 2 Lower 11 3 3 Electrode 11 tomm 12 1 3 3 AME Rus c 12 1 3 4 External 13 1 3 4 1 Combined APC HiVac 13 13 4 2 HIV36 13 1 3 4 3 Process Pressure 13 1 3 4 4 Roughing 13 1 3 4 5 Over Pressure Switch 13 1 3 4 6 X Atmosphere Switch 13 1 3 4 7 Over Pressure Check 13 1 3 4 8 Process Module Wall 14 1 3 4 9 Anti condensation 14 1 3 4 10 End Point Detection 14 14 06 LC cc 14 1 3
44. used to make isolations at the PDU electronics rack Place the isolator in the OFF position Insert the lock out and secure with a padlock Hemove the key and retain it With the lock out in place test the lockout to ensure that it prevents the isolator from being moved to the ON position If a lock out clasp is already in place another lockout MUST be added to the clasp The lock out clasp should have the facility for at least two padlocks to be fixed to it Use a test lamp or DVM to ensure that the equipment is isolated After maintenance has been completed ensure that all guards and interlocks have been replaced before removing the lockout P 24 Version 1 4 SPTS AN SPP COMPANY P15 P15 1 P15 2 P15 3 Version 1 4 Gas Safety TO PREVENT INJURY ALL MAINTENANCE AND REPAIR PROCEDURES MUST BE UNDERTAKEN BY TECHNICALLY QUALIFIED PERSONNEL WHO ARE FULLY AWARE OF ALL RELEVANT SAFETY PRECAUTIONS ASSOCIATED WITH PROCESSING OPERATING AND MAINTAINING THE EQUIPMENT IN ADDITION SUCH PERSONS MUST BE CAPABLE OF OPERATING SPTS SOFTWARE Surface Technology Systems plc recommend that customers contact their local gas supplier for all information about safety precautions and first aid treatment relating to the specific gases used on their systems before connection General 1 Know the following 1 1 Thelocation of the nearest manual gas leak alarm call point 1 2 sound and sight of the gas leak alarm 1 3 The
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46. 10 Fit new EMI shielding to the lower chamber block and snip off any excess 11 Refit the SCIF ring to the lower chamber block 12 Fit new EMI shielding to the SCIF ring and snip off any excess Service Manual 4 34 Version 2 4 S P T S Maintenance AN SPP COMPANY 13 HReassemble the source as described in 4 9 2 Figure 4 11 SCIF Ring EMI Shielding and O Ring Version 2 4 4 35 Service Manual Maintenance lt T lt AN SPP COMPANY 4 8 7 HiVac Gauge O Rings Issue 1 0 Date April 2007 The HiVac gauge assembly contains two O rings Equipment and Materials Standard tool kit Parts Required HiVac gauge O rings Associated Procedures Safety section in the preliminary To change the O rings 1 Refer to Figure 4 12 2 Hemove three M6 x 20 screws 1 and washers 2 and remove the HiVac gauge assembly Dismantle the assembly and remove O rings 3 amp 5 and carriers 4 amp 6 Remove and discard the rings from the carriers then clean the carriers using IPA Fit new O rings to the carriers then reassemble the HiVac gauge assembly Qr Ou O9 Refit the assembly to the chamber using screws 1 and washers 2 Figure 4 12 HiVac Gauge Assembly Service Manual 4 36 Version 2 4 S P T S Maintenance AN SPP COMPANY 4 8 8 Process Pressure Gauge O Rings Issue 1 0 Date April 2007 The process pressure gauge assembly contains two O rings Equipment and Materials Standa
47. 10 Amp Handler VPX With No PDU 10 Amp 10 Amp 24V DC PSU Service Manual 2 40 Version 2 4 SPTS Control System and Power System Distribution AN SPP COMPANY 2 3 4 2 3 4 1 2 3 4 2 Version 2 4 Mce 200V System 400V System Fumcion _ One Onion loade Pume Gm oA CB11 10 Amp 10 Amp Platen RF PSU 1 HF CB12 10 Amp 10 Amp Platen RF PSU 2 LF Optional CB13 30 Amp 20 Amp Platen Chiller CB14 30 Amp 20 Amp Source Coil RF PSU CB15 10 Amp 10 Amp Source Chiller Optional DC Distribution 240V AC is supplied from the electronics rack AC front panel directly to the 24V PSU in the PLC drawer The PSU then provides 24V DC to the DC control panel and to the gasbox PLC Drawer The PLC I O drawer is located underneath the operator station in the electronics rack 24V DC is Supplied frrm the 24V power supply to the following equipment through circuit breakers located within the drawer Circuit Breaker Description Lm Chamber DC Control Panel The chamber DC control panel is located on the side of the chamber 24V DC is supplied from CB1 in the PLC I O drawer located in the electronics rack Circuit Breaker Description Fast Matching Unit APC 24V Supply 2 Devicenet Beckhoff I O Beckhoff I O Power I F PCB 24V 2 41 Service Manual Control System and Power System Distribution P TS 2 4 2 4 1 Service Manual AN SPP COMPANY System Interlocks
48. 4 Replacing a Damaged Bus 75 4 10 5 Replacing the MLC 9000 Heater Controller 77 4 10 6 Replacing the Spectrum 81 4 10 7 Replacing the Norgren Valve 51 84 4 10 8 Replacing Electrical Components cccceeeeeeceeeeeeeeeeeseeesaeeeeeeeeeeeesaaaeeees 85 4 10 9 Replacing Pneumatic renee 85 4 10 10 Configuring the Magnatran7 After Changing the Substrate Size 86 4 10 10 1 Opening the Terminal Communications Session 86 4 10 10 2 Setting Up Tool Level Motion Sensing Parameters 86 4 10 10 3 Setting Up Station Level Motion Sensing Parameters 87 4 4 Version 2 4 SPTS AN SPP COMPANY Version 2 4 Figure 4 1 Figure 4 2 Figure 4 3 Figure 4 4 Figure 4 5 Figure 4 6 Figure 3 7 Figure 4 8 Figure 4 9 Figure 4 10 Figure 4 11 Figure 4 12 Figure 4 13 Figure 4 14 Figure 4 15 Figure 4 16 Figure 4 17 Figure 4 18 Figure 4 19 Figure 4 20 Figure 4 21 Figure 4 22 Figure 4 23 Figure 4 24 Figure 4 25 Figure 4 26 Figure 4 27 Figure 4 28 Figure 4 29 Figure 4 30 Figure 4 31 Figure 4 32 Figure 4 33 Figure 4 34 Figure 4 35 Fig
49. 6 Figure 3 7 Figure 3 8 Figure 3 9 Figure 3 10 Figure 3 11 Figure 3 12 Figure 3 13 Figure 3 14 Figure 3 15 Figure 3 16 Figure 3 17 Figure 3 18 Figure 3 19 Figure 3 20 Figure 3 21 Figure 3 22 Figure 3 23 Figure 3 24 Figure 3 25 Figure 3 26 Figure 3 27 Figure 3 28 Figure 3 29 Figure 3 30 Figure 3 31 Figure 3 32 Figure 3 33 Figure 3 34 Figure 3 35 Figure 3 36 Figure 3 37 Figure 3 38 Figure 3 39 Figure 3 40 Figure 3 41 Figure 3 42 Figure 3 43 Figure 3 44 Figure 3 45 Figure 3 46 Figure 3 47 Figure 3 48 Figure 3 49 Figure 3 50 Figure 3 51 Figure 3 52 Figure 3 53 Figure 3 54 Figure 3 55 Manual Control and Software Utilities Figures 000 m 8 WY Scereuiusm 8 Typical APC Recipe 9 Typical APC Manual Control Screen 10 Typical APC Pressure Tolerances 11 Typical APC Position Tolerances Screen 11 Typical Statistical Data Screen 12 Typical Clamping Manual Control 12 Typical APC Position Tolerances Screen 13 Typical Electromagnetic Generator Manual Control Screen 14 Typical Electromagnetic Generator Current Tolerances Screen 15
50. 6 1 Source 14 1 3 6 2 Platen RF 14 15 1 3 7 1 Gasbox Door Interlock 15 1 3 7 2 Gasbox Extract Sensor seien sanis 16 WSC OMICS TIE Tm 17 1 3 9 Power uoce eoe 18 UE MEI UE g MN 19 1 4 1 Operator Station Interface nennen 20 21 1 4 8 Control Logic Programmable Logic Controller PLC 21 1 4 3 1 555 Logix Controller cene phone uoc 21 jm MEZ 21 1 4 3 3 DeviceNet 21 1 4 4 System Nodes 22 1 4 4 1 Optional Nodes nnne 23 1445 WO BUS nk emiten 24 f 24 erc 25 146 Valve dns 25 1 4 6 1 SMC Valve Island eese nennen 26 1 4 6 2 Norgren Valve Island essere 26 1 9 PUMPING VSIOITI erucce scczimusun pes cnauunuuskuEersuu scissa sax RE Edd addu ssuui mesi AE 27 28 15 2 Backing PUMPS Mem Mr
51. Adjustable spanner Ensure CB2 is on and that all EMO buttons are pulled out Rotate CB1 until the breaker is in the On position Press the grey Test button Ensure that CB1 trips to the Off position Rotate CB1 until the breaker is in the On position Press the grey button marked T on the RC221 unit Ensure that CB1 trips to the Off position e dX 0 UL S9 Ensure that the tripped indicator on the RC221 unit shows red Gate Valve Seal This test is to check the integrity of the gate valve seal 1 Perform a chamber leak up rate test see 4 10 2 1 and record the value 2 Using the manual functional mode vent the handler Perform chamber leak up rate test again and compare the results If there is an excessive rise in the leak up rate then the gate valve seal needs to be replaced 4 21 Service Manual Maintenance P T lt AN SPP COMPANY 4 7 8 Insert Heaters This test is to ensure that he insert heaters are working correctly System State Shutdown and vented Equipment and Materials Digital multimeter Disconnect the insert heater 2 Using a digital multimeter check the resistance across the heater and ensure the value is approximately 70 Ohms 10 3 Reconnect the heater 4 7 9 Interlocks This test ensures that the gas and HF interlocks are functioning correctly Each of the testing methods requires an action to be performed and then an interlock to be ch
52. Decommissioning and Commissioning The following procedures refer to the gas line between the process chamber and the customer supplied gas line isolation valve Each gas line hazardous and non hazardous is fitted with a normally closed pneumatic bellows sealed valve called Gas Out Hazardous gas lines have an additional normally closed pneumatic bellows sealed valve called Gas In and also incorporate a nitrogen purge valve Each of these valves is operated by a remote electrically activated solenoid valve comprising an override facility Hazardous Gas Out Valve Hazardous Gas In Valve Osccm MFC Purge Valve Manifold Valve MFC G as Out Valve uu C4FB l nsccm B 10082 A scm 0 009 m av O4 Ty E 0 009 G DV Bek E gp 0 0099 ES 50 z 3 BarmT DA i SE 4 M DV EE ft 3 bemrarr 2 Y amy o 3 68mTaorr Figure 4 30 Chamber Mimic Page 4 10 1 1 Decommissioning This procedure is used when decommissioning gas lines for maintenance purposes After completion the level of hazardous gas in the gas supply line will be reduced to a safe limit Service Manual 4 64 Version 2 4 S P T S Maintenance AN SPP COMPANY CAUTION This procedure is included as a guide ONLY It must be reviewed by customers facilities engineers for suitability to their particular applications TO PREVENT RISK OF I
53. Drop Down Box To log the signals received from the CTC change the drop down box option to true State Machine Drop Down Box To log information not directly related to the State above options change the drop down box option to true Tool Job Server Drop Down To log the states of the sequence such as Events process finishing change the drop down box option to true Mail Options send Mail Drop Down Box To send an email to a recipient when the sequence has finished change the drop down box option to true Text Field Enter the recipient s email address SMTP Host Text Field Enter the server which the recipients email address resides SMTP Port Text Field Enter the port number from which the email client is accessed Scheduler Options Service Manual 3 72 Version 2 4 S TS Manual Control and Software Utilities AN SPP COMPANY 3 4 3 5 Version 2 4 Align Drop Down Box From the drop down box select the aligning options Never Will never send the substrate to the aligner during a transfer operation If required Will send the substrate to the aligner if the system detects the substrate has not previously been aligned Always Will always align the substrate irrespective of whether the substrate has been aligned previously Allow Pre Drop Down Box From the drop down box select true to allow Alignment the substrates t
54. ENGINEER SEEK GUIDANCE ON THE APPROPRIATE CHAMBER CLEANING PROCESS TO RUN BEFORE UNDERTAKING AIR SAMPLING CHECKS FULL PROTECTIVE CLOTHING MUST BE WORN INCLUDING A RESPIRATOR THE IMMEDIATE AREA MUST BE WELL VENTILATED ALL NON ESSENTIAL PERSONNEL MUST BE EVACUATED TO A SAFE AREA AND AIR SAMPLING WARNING NOTICES MUST BE DISPLAYED IN THE IMMEDIATE VICINITY WHEN UNDERTAKING AIR SAMPLING TESTS CHECKS MUST BE MADE TO ASCERTAIN THE CONCENTRATION OF RESIDUAL GASES AND HAZARDOUS BY PRODUCT GASES SUCH AS HCL AND HF P 27 Preliminary 16 P16 1 P16 2 P16 3 Preliminary SPTS AN SPP COMPANY Hazardous Substances Working with Hazardous Substances All work with any hazardous substance must be in accordance with the manufacturer s instructions material safety data sheet MSDS and local regulations concerning the control of substances hazardous to health The substance s MSDS must be consulted prior to the start of any work if the user is not familiar with the hazardous material Special care must be exercised with substances provided by the customer It is the responsibility of the customer to ensure that any substance provided is suitable for its intended purpose and is safe to use in that context MSDSs must always be consulted for health and safety information for any substance with which the service engineer is not completely familiar Spillage of Hazardous Substances If a spillage occurs The manager of the area togethe
55. Gas inlet gasket Associated Procedures Safety section in the preliminary To change the gas inlet O ring 2 3 4 5 Refer to Figure 4 10 Uncouple the gas inlet line from the gas inlet kit Remove three M4 x 12 screws 1 Hemove and discard O ring 2 then clean the O ring groove with IPA Fit new O ring to groove then reassemble the gas inlet kit using new VCR gasket 3 Figure 4 10 Gas Inlet Assembly 4 33 Service Manual Maintenance lt P T S AN SPP COMPANY 4 8 6 SCIF Ring EMI Shielding and O Ring Issue 1 0 Date October 2007 The SCIF ring EMI shielding and O ring forms the seal between the lower chamber block and the SCIF ring System State Shutdown and vented Equipment and Materials Standard tool kit Isopropyl alcohol Parts Required SCIF O ring SCIF EMI shielding Associated Procedures Safety section in the preliminary To change the EMI shielding and O ring 1 Refer to Figure 4 11 2 Disassemble the source body as described in 4 9 3 Remove and discard the EMI shielding 1 from the top of the SCIF ring 4 Remove the twelve M6 x 16 screws 2 spring washers 3 and washers 4 5 Remove the SCIF ring 5 6 Remove and discard O ring 6 and EMI shielding 7 T Clean the O ring and EMI shielding grooves on the SCIF ring with IPA 8 Clean the O ring and EMI shielding grooves on the lower chamber block with IPA 9 Fit new O ring to the lower chamber block
56. Guide for a Safe Way To Work 1 Start Plan the Task Review environmental Consider all the Consider the Risks conditions and appropriate Safety Think about the Hazards Precautions Dangers Familiarise yourself with all the relevant COSHH MSDS and RAs Any local procedures related to this must be followed associated with the task lt 2 Preparation Ensure the Work area Ensure appropriate undertake work on the is Free of all Safety Clothing is equipment from your extraneous material Worn supervisor Ensure that all relevant WARNING and CAUTION safety notices are clearly Assemble all necessary gt tools and spare parts to undertake the task Review the procedures associated with the task lt displayed 3 Undertake the task Work in a logical sequence 4 Completion When the work is On completion of the completed inform the Remove All safety notices from the equipment task test the system for serviceability supervisor Complete the required paperwork Ensure the machine gt and work area is free of lt all extraneous material Preliminary SPIS AN SPP COMPANY P7 General S
57. Lower Chamber Control RTD 1 Lower Chamber 2 2 6 1 Chamber Heater Control Chamber heater control is achieved by using an MLC 9000 temperature controller to compare software set temperature parameters with resistive temperature detector RTD inputs When the chamber temperature falls below the parameter value the MLC 9000 closes the solid state relay SSR thereby allowing power to the chamber heaters Should the safety RTDs detect a temperature above the safety conditions then the Beckhoff DC Control I O will open the contactors thereby removing power to the SSRs Lower Chamber Service Manual 2 26 Version 2 4 SPTS Control System and Power System Distribution AN SPP COMPANY 2 2 6 1 1 2 2 6 1 2 Version 2 4 A schematic of the heater control system is shown below Heater Controllers MLC9000 DC Control I O Beckhoff Circuit Breaker Safety RTDs Figure 2 24 Heater Control Schematic MLC Controller The MLC 9000 controls the following heating circuits Description Lower Chamber Block Control RTD Magnetic Confinement Control RTD Not ICP Insert Lid Plenum Control RTD Pegasus Inner Control RTD Pegasus Only For further details of the operation of the controllers please refer to the manufacturer s literature Contactors The contactors are operated by the DC control I O when the safety RTD conditions are met The contactors allow power to be supplied to the sol
58. Maintenance AN SPP COMPANY 4 7 2 Version 2 4 Depress fully one of the EMO buttons Ensure that all power to the system has been removed by checking that the main incomer in the PDU has tripped off 5 Re start the system by following the Electrical and Mechanical Start up procedure detailed in 4 5 1 1 6 Repeat steps 5 to 7 for all remaining EMO buttons CPX VPX PDU Main Power Breaker Test This test ensures that the mains power circuit breaker on the ABB PDU if fitted is operating correctly Equipment and Materials Adjustable spanner 1 Ensure CB11 is off not in the tripped zone 2 Remove the six screws and washers that hold the front panel in place CAUTION Ensure the earth cable on the rear of the front panel is not damaged Carefully remove the front panel and place to one side Ensure CB12 is on and that all EMO buttons are pulled out Using an adjustable spanner rotate the shaft of CB11 until the breaker is in the On position 6 Press the grey Test button located directly adjacent to the shaft of CB11 re Ensure that CB11 trips to the Off position 8 Using an adjustable spanner rotate the shaft of CB11 until the breaker is in the On position 9 Press the grey button marked T on the RC222 unit 10 Ensure that CB11 trips to the Off position 11 Ensure that the tripped indicator on the RC222 unit shows red 12 Replace the PDU front cover 4 19 Service Manu
59. Manual 3 14 Version 2 4 Manual Control and Software Utilities AN SPP COMPANY 6 From the control panel select the Current Tolerances tab the following screen is displayed Current Demand Above setpoint alarm Above setpoint warning Below setpoint warning Below setpoint alarm dA avel J WAYS 19110 oY 0 QE Figure 3 11 Typical Electromagnetic Generator Current Tolerances Screen 7 Enter the above and below setpoint warning and alarm current thresholds 8 Select the show graph button if required to graphically show the current measured over time in relation to the selected warning and alarm limits Note An alarm will stop the operation in progress warning will allow the current operation to continue but will alert the operator to the fact the system has encountered an error 9 From the control panel select the Voltage Tolerances tab the following screen is displayed Voltage High alarm V High warning avel suoyouedg W3 1eino EE oc oo tw E x Figure 3 12 Typical Electromagnet Voltage Tolerances Screen 10 Enter the above setpoint warning and alarm voltage thresholds expressed as a percentage Version 2 4 3 15 Service Manual Manual Control and Software Utilities lt PTS AN SPP COMPANY Note An alarm will stop the operation in progress warning will allow the current operation to contin
60. Manual 3 16 Version 2 4 Manual Control and Software Utilities AN SPP COMPANY Adaptive Control of the heat cool zones is to be handled automatically with the Temperature system remembering previous instructions and adapting these to the Control current process 5 From the control panel select the Tolerances tab the following screen is displayed Temperature Tolerance Above setpoint alarm C Above setpoint warning Below setpoint warning y Below setpoint alarm 9 o D m g Figure 3 14 Typical Heater Zone Tolerances Screen 6 Enter the above and below setpoint warning and alarm temperature thresholds T Select the show graph button if required to graphically show the temperature measured over time in relation to the selected warning and alarm limits Note An alarm will stop the operation in progress warning will allow the current operation to continue but will alert the operator to the fact the system has encountered an error 8 From the control panel select the Interlock Overrides tab the following screen is displayed Y au can disable individual interlocks for this device by placing a tick in the appropriate checkbox Override suome1iad E Temperature above safe limit Bj Temperature below safe limit aged Temp above controller overrange below controller unrlerrannie E Sensor break detected mi Interlocke
61. Process Technology Systems UK Limited reserves the right to make changes and alter specifications without prior notice and without incurring an obligation to make changes to products manufactured previously You are advised to contact your nearest SPTS office for the latest information on product improvements incorporated after this publication All information contained in this manual is based on the latest product information available at the time of publication Graphics and illustrations in this publication are intended for reference use only and may not depict actual machine configuration or component parts All rights reserved 2009 SPP Process Technology Systems UK Limited P 6 Version 1 4 SPTS AN SPP COMPANY P3 Assumptions This manual has been produced to assist operators and system engineers to perform their tasks safely and competently SPP Process Technology Systems UK Limited has assumed that personnel operating this equipment are fully conversant with all appropriate safety issues familiar with the technology the system represents and are competent users of Windows based computer operating systems Version 1 4 P 7 Preliminary SPTS AN SPP COMPANY P4 Acknowledgements All product names mentioned are acknowledged as the trademarks or registered trade marks of their respective owners Preliminary P 8 Version 1 4 SPTS AN SPP COMPANY P5 Version 1 4 Warnings Cautions and Notes Warnings Caution
62. Refer to Figure 4 18 Remove six M4 x 10 screws 4 and platen 5 d SoS gt Y Refer to Figure 4 19 e Hemove shims 4 amp 5 Hemove and discard ring 6 Shut all valves and drain all coolant from the electrode assembly em Remove the following connections from the base of the electrode assembly e HF braid e Platen coolant e Substrate lift e Anti condensation e Differential pumping e Helium CAUTION The electrode assembly is extremely fragile take great care when removing the assembly CAUTION Ensure the pin guides do not fall out when removing the electrode assembly 14 Carefully lift out the electrode assembly through the process chamber and place it on a clean flat surface Service Manual 4 44 Version 2 4 S P T S Maintenance AN SPP COMPANY Version 2 4 15 16 17 18 19 20 21 Remove and discard O ring 7 Remove ceramic insulator 8 Remove and discard O ring 9 Remove eight M3 x 12 screws 10 securing the coolant pipes to the underside of the electrode Remove and discard the two O rings 11 Clean the O ring grooves with IPA fit new O rings and replace the eight M3 x 12 screws 10 Remove one M3 x 12 screw 12 securing the tripod assembly 13 to the electrode CAUTION Ensure the pins are not bent when removing the tripod assembly 22 23 24 25 26 27 28 29 30 31 32 Remove the
63. Resize 3 4 2 TMC Manual Control Software Multiplex Systems This details the manual control software for the handling system within a multiplex system 3 4 2 1 Accessing the TMC Manual Control Software To access the TMC manual control 1 From the Task Bar double click the Transport Module Controller icon as shown below TMC Icon Figure 3 67 Transport Module Controller TMC Icon 3 4 2 2 TMC Log Screen The TMC log screen allows the user to view the actions carried out by the transport system after the last time the system was powered up To access the TMC Log screen 1 From the Task Bar double click the Transport Module Controller TMC icon Version 2 4 3 61 Service Manual Manual Control and Software Utilities lt P T S AN SPP COMPANY 2 Select the Log tab from the TMC software as shown below Log States Options Trace Config 1 0 Misc 12 Sep 2008 11 51 57 Figure 3 68 TMC Log Screen 3 4 2 3 TMC States Screen The TMC states screen allows the user to view the status of the components and the control commands of the transport system To access the TMC Status screen 1 From the Task Bar double click the Transport Module Controller icon 2 Select the Status tab from the software as shown below TMC v8 0 16 0 State Machines Subsystem status Name State Status State Transfer 0 Inactive Idle Wafer Test Pump State Pump Vent Load Carousel Unload
64. TS AN SPP COMPANY Recipe Files Text Field Amend the location where the recipe files are stored on the system PC by entering the path in the text field Logging Options Days To Log Text Field Amend the number of days the log fields are kept before being overwritten Free Path Checks Drop Down Box To log the system s algorithm which determines if a substrate s path through the system to its destination is clear change the drop down box option to true Job Server Events Drop Down Box To log the individual actions occurring within a sequence such as transfer commands change the drop down box option to true Job Server States Drop Down Box To log the states of the components during a sequence such as idle or transferring change the drop down box option to true Job Timers Drop Down Box To log the individual job timers change the drop down box option to true OPC Client Tags Drop Down Box To log the process value changes during a sequence such as substrate create values change the drop down box option to true OPC Server Tags Drop Down To log the internal value changes change the drop down box option to true OPC Updates Drop Down Box To log both the OPC Client and Server tags change the drop down box value to true Scheduler Progress Drop Down Box To log the scheduler progress change the drop down box value to true Server Job Creation
65. Tolerances tab the following screen is displayed Forward Power Show Graph Above setpoint alarm 1000 9 Above setpoint warning 1000 Below setpoint warning 1000 Below setpoint alarm 1000 J HFSS Figure 3 27 Typical RF Generator Forward Tolerances Screen fs Enter the high and low setpoint warning and alarm generator power thresholds in Watts 8 Select the show graph button if required to graphically show the generator power measured over time in relation to the selected warning and alarm limits Note An alarm will stop the operation in progress warning will allow the current operation to continue but will alert the operator to the fact the system has encountered an error From the control panel select the Reflected Tolerances tab the following screen is displayed Reflected Power High alarm W High warning W suomeiadQ aged oD 0 gt m w Figure 3 28 Typical RF Generator Unit Load Tolerances Screen 10 Enter the high setpoint warning and alarm generator power thresholds in Watts Version 2 4 3 27 Service Manual Manual Control and Software Utilities lt S AN SPP COMPANY 11 Select the show graph button if required to graphically show the generator power measured over time in relation to the selected warning and alarm limits 12 Selecting the Statistical Data ta
66. Typical Electromagnet Voltage Tolerances Screen 15 Typical Heater Manual Control 16 Typical Heater Zone Tolerances Screen 17 Typical Heater Zone Interlocks Override Screen 17 Typical Heater Contactor Manual Control Screen 18 Typical Chiller Manual Control 19 Typical Chiller Tolerances Screen 20 Typical Gauge Manual Control Screen 20 Typical MFC Manual Control Screen 21 Typical MFC Tolerances 22 Typical matching Unit Manual Control 22 Typical Matching Unit Load Tolerances Screen 23 Typical Matching Unit Tune Tolerances Screen 24 Typical Lift Manual Control Screen 25 Typical RF Generator Manual Control 26 Typical RF Generator Forward Tolerances Screen 27 Typical RF Generator Unit Load Tolerances Screen
67. above procedure Figure 4 22 Electrode Lift Assembly Service Manual 4 52 Version 2 4 S P T S Maintenance AN SPP COMPANY Figure 4 23 Cylinder Swivel Mount Assembly Version 2 4 4 53 Service Manual Maintenance lt P T S AN SPP COMPANY 4 8 15 Bypass Pumping O Rings Issue 1 0 Date April 2007 The bypass pumping line contains five O rings which are used to seal the bypass pumping line foreline isolation valve and foreline gauge System State Shutdown and vented Equipment and Materials Standard tool kit Parts Required Bypass pumping line O rings Associated Procedures Safety section in the preliminary To change the O rings 1 Refer to Figure 4 24 Undo clamp 1 to release the foreline from the bypass pumping assembly Remove three M6 x 20 screws 2 and washers 3 and remove the bypass assembly Dismantle the bypass assembly and remove O rings 4 amp 6 and carriers 5 amp 7 Remove and discard the rings from the carriers then clean the carriers using IPA Fit new O rings to the carriers then reassemble the bypass pumping assembly Refit the assembly to the chamber using screws 2 and washers 3 eS s w qe Reconnect the foreline using clamp 1 Figure 4 24 Bypass Pumping Line Assembly Service Manual 4 54 Version 2 4 lt P T S Maintenance AN SPP COMPANY 4 8 16 Turbo Pump Overhaul Issue 1 0 Date April 2007 The turbo pump overhaul procedure should
68. all valves and drain all coolant from the electrode assembly Remove the following connections from the base of the electrode assembly e Coolant e Substrate lift 4 Hemove the compressed air connections from the platen lift cylinder 1 and substrate lift cylinder 2 5 Remove the reed switches from the platen lift cylinder 1 Hemove four M5 x 25 screws 3 securing the substrate lift cylinder 2 to the tri lift plate 4 7 Using two suitable spanners hold the cylinder link rod or stretch coupling stationary whilst rotating the substrate lift piston rod until the link rod stretch coupling is free 8 Remove six M3 x 12 screws securing the support tube base 6 to the cylinder support tube assembly 7 9 Carefully lower the electrode lift assembly until the reed switches and pneumatic connections can be removed from the substrate lift cylinder 2 Then remove the electrode lift assembly from the RF enclosure and place it on a clean flat surface covered with cleanroom wipes 10 Using a suitable spanner hold the platen lift piston rod stationary whilst rotating the cylinder swivel mount 8 and substrate lift cylinder 2 until free 11 Refer to Figure 4 23 12 Remove four M3 x 12 screws 9 and capping plate 10 13 Remove and discard PTFE washers 11 14 Clean the washer seats with IPA then fit new washers 4 51 Service Manual Maintenance lt P T AN SPP COMPANY 15 HReassembly is the reverse of the
69. axis compensation was required during step 3 enter the command SET STNSENSOR stn TYPE R MT ACT sensors active state SEN sensor I O bit number POS R radial position worked out earlier If theta axis compensation was required during step 3 enter the command SET STNSENSOR stn TYPE R MT ACT sensors active state SEN sensor I O bit number POS radial position worked out earlier POS T Offset from stations Theta position to detector position in microns Test getting and putting substrates from that station correctly detects the presence absence of a substrate If no theta axis compensation was required during step 3 store the sensor parameters by using the command STORE STNSENSOR stn TYPE ACT SEN POS If theta axis compensation was required during step 3 store the sensor parameters by using the command STORE STNSENSOR stn TYPE ACT SEN POS POS T 4 87 Service Manual This Page is Intentionally Blank
70. be performed at the same time as the turbo foreline O ring change procedure System State Shutdown and vented Equipment and Materials Standard tool kit Parts Required Turbo pump O rings Associated Procedures Safety section in the preliminary Turbo foreline O ring change procedure To overhaul the turbo pump 1 Refer to Figure 4 25 2 Remove the following gauges and switches e HiVac gauge Process pressure gauge e Roughing gauge e Atmosphere switch e Vacuum switch Remove turbo covers Remove the rear turbo panel and carefully disconnect the EMO switch Isolate the No supply to the turbo pump and disconnect from rear of turbo Isolate the house water supply behind the service panel and drain system Remove the water connections from rear of the turbo pump Remove three electrical connectors from rear of turbo pump po der Se Remove four electrical connections earth cable heater cable and compressed air connections from rear of APC valve 10 If fitted remove heater jackets and heater connections 11 Remove insulation from turbo foreline then remove clamp 1 12 Remove O ring 2 and carrier 3 13 Remove O ring from carrier and discard Clean carrier with IPA and fit new O ring 14 Loosen twelve M10 nuts 4 nuts that secure the turbo pump 5 to the APC valve 6 and undo them until they reach the end of their studs 7 15 Remove eight M10 x 40 screws 8 washers 9 amp 10 and
71. chamber for pressures outside the gauge s range e g during venting etc The actual gauge fitted will vary for different process pressure requirements Roughing Gauge The roughing gauge is used to measure chamber pressures up to 10 Torr Output from this gauge is used by the software to control the APC HIVAC valve thereby protecting the turbo from over pressure conditions Over Pressure Switch An over pressure switch is used as a safety interlock in the 24V DC supply to the gasbox solenoid If the pressure exceeds 3 7 Torr the pressure switch operates cutting off the process gas supply to the process module It operates in a fail safe mode Atmosphere Switch The atmosphere pressure switch is used by the control system to terminate the vent to atmosphere sequence It also acts to prevent electrostatic clamping if fitted when the process chamber is at atmosphere Over Pressure Check Valve An over pressure check valve is used to protect the process module against over pressure during venting It is rated at 5 psig The extract is fed into the gasbox extract for safety 1 13 Service Manual Introduction 1 3 4 8 1 3 4 9 1 3 4 10 1 3 5 1 3 6 1 3 6 1 1 3 6 2 Service Manual SPTS AN SPP COMPANY Process Module Wall Heaters Heaters are located in the magnetic confinement chamber the lower chamber and the upper section of the source so as to keep plasma facing surfaces at temperatures suited to the requi
72. configuration a terminal communications session must be opened to the Magnatran 7 Robot by using the Enable PassThrough mode of the Pro TMC Opening the Terminal Communications Session 1 Access the manual control option within the TMC by following the procedure in Chapter 3 and enable Passthrough Mode 2 Click on the Robot tab then on Passthrough Mode Pro TMC v1 1 1 19845 Overal Robot Cassette 1 SMIF 1 Cassette 2 SMIFZ Core Pumping Cassette 1 Pumping Cassette 2 Pumping v Enable Interface Enable Passthrough Mode In Service O Align Extend Station Down mae ctive Service Cum m is Substrate Size v 01 Safety 1 Last Error None v 02 Safety 2 Parked Position i 1 Cusen Line Command T Send Direction Message Figure 4 53 TMC Robot Tab 3i Use the command line to enter the commands detailed in 4 10 10 2 and 4 10 10 3 Setting Up Tool Level Motion Sensing Parameters 1 Enter the command RQ R MT SENSE ALL to request the current settings of the radial motion sensor sensing parameters 2 Make note of the SIZE substrate size in microns OUTER length of the sensing window in microns and INNER length from the edge of the substrate to the start of the substrate sensing window in microns parameters Normal default parameter for the INNER is 10000 and OUTER is 20000 3 If needed reset the paramete
73. disposal of the potential by products are complied with where there are specific chemicals and by products identified No work should take place until a complete plan for decommissioning and disposal is completed including the identification of specialist contractors who may be required to ensure that there is no exposure risk to site workers P 30 Version 1 4 SPIS AN SPP COMPANY P17 1 2 P17 1 3 Version 1 4 Areas of Contamination DI Water and Town Water The SPTS tool does not contaminate the cooling water during use Disposal of any fluids left in the tool should be in line with local practice Chiller Fluids excluding DI water MSDS for these fluids Syltherm XLT Galden DI ethanol mixtures etc are provided with the tool The disposal instructions contained in the MSDS should be followed when these products are drained from the tool Chillers should then be disposed of in line with local regulations as recommended in the OEM manuals Process Chamber The process chamber is likely to have significant contamination following processes that may be of a hazardous nature The full decommissioning process should include 30 minute etchback process or whatever duration is required by process flow to achieve a clean chamber Full chamber clean e Isolation and pump out of gas lines To include a minimum of five pump purge cycles followed by a minimum pump out period of 24Hrs see Chapter 3 Power down of
74. etc Preliminary P 18 Version 1 4 SPTS P12 Compressed Air Many devices on the system are operated pneumatically EYE PROTECTION SHOULD BE WORN WHEN WORKING ON PNEUMATIC SYSTEMS AS A LOOSE PIPE WHICH IS PRESSURISED MAY CAUSE EYE DAMAGE ALWAYS DIRECT COMPRESSED AIR AWAY FROM EYES AND SKIN Compressed air is safe when used correctly However open ended pipes must never be brought into close contact with bare skin since air may penetrate the skin and may form embolisms in the bloodstream If compressed air is used for blowing away dust or swarf or for cooling purposes then appropriate eye protection must be worn to prevent particles of foreign matter from being blown into the eyes Hoses fittings regulators and valves should be inspected periodically for leaks damage and other defects P12 1 Pneumatic Isolation Pneumatic isolation valves are located in the following areas e CPX VPX systems On the air preparation assembly located in the lower enclosure below the handler e MPX systems On the air preparation assembly located between the carousel and the process module e LPX systems On the air preparation assembly located directly below the loadlock Version 1 4 P 19 Preliminary SPTS P13 Vacuum Pumps Refer to the manufacturer s instructions for all information on the safe operation of the pumping equipment ENSURE THAT THE MANUFACTURER S RECOMMENDATIONS FOR NITROGEN PURGES ARE FOLLOWED BEFORE PERFOR
75. gases are introduced to the chamber under vacuum conditions A plasma is then struck and maintained at 13 56MHz RF whilst the processing occurs The coil matching unit maintains maximum power transfer to maintain optimum process conditions Temperature controlled heaters are used within the source assembly to maintain process stability Source Enclosure Coil Matching Unit Figure 1 6 Source Assembly Source Enclosure The source enclosure forms the upper half of the source assembly and contains the ceramics HF generating coils and solenoids It also houses a cable heater and has a view port located on the top End point detection systems can be attached to the top of the source enclosure to make use of the view port Coil Matching Unit The coil matching unit CMU is used to impedance match the RF source with that of the process chamber The unit contains three stepper motor driven capacitors that are rapidly tuned to maintain optimal power transfer Temperature control of the CMU is regulated by internal electrical fans Lower Chamber The lower chamber which is manufactured from a single block of aluminium contains two openings are located on opposite sides near the top of the chamber One provides access to the substrate platen for the transport module The other is a port connecting to a combined automatic pressure control valve HiVac valve and a vacuum pumping system Electrode Assembly The electrode asse
76. in Figure 4 42 then click Next The file will begin to download to the MLC 9000 controller ee Download Configuration x Download configuration to a connected device Downloading Loop Module 1 Configuration 1111111 Overall Progress Cancel Previous Figure 4 43 Download Configuration in Progress Screen 8 Once the download is complete click Finish Download configuration to a connected device Download Complete Overall Progress Figure 4 44 Configuration Download Finished Close the MLC 9000 Workshop application using File gt Exit The following screen is displayed MLC 9000 Workshop The current configuration has changed Do vou wish En save it Cancel Figure 4 45 Configuration Changed Screen 10 Click No and the application will close Service Manual 4 80 Version 2 4 Maintenance SPIS AN SPP COMPANY 11 After downloading the file to the MLC 9000 controller the mimic page will show series of heater alarms Clear these alarms using the system software STS lu Shs PHA OSom Oxcm Osccm Oeccm 10 NH3 Me Q 07sccm Osccm 0 29 497 HF Generate 77 OW 49 5 mTorr LF Generator a E G036mTorr 2 Devices out of Tolerance Foreiro Heater Lower Electrode Outer Last Leak Check 1 77 3 mTorr min Process Module CVD1 Figure 4 46 Clearing the Alarms 12 MLC9000 controller is now
77. is required e MLC9000 communications cable Configuration recipe file To replace the heater controller follow the procedure detailed below 1 Replace the unserviceable controller by lifting it from the DIN rail and replace with a new one 2 Connect the MLC9000 comms cable from comm 1 on the operator station PC to the RJ11 connector on the MLC9000 controller If a cable is not available a new one must be assembled with the following connections Pin 5 Black Pin 4 Black signal Data Pin 2 Green Pin2 Green Pin 3 Yellow Pin 1 Yellow Transmit Data Link on 9 Way D Type 4 77 Service Manual Maintenance lt P T S AN SPP COMPANY 3 Within Windows select Start gt Programs gt MLC 9000 Plus gt MLC 9000 Plus workshop gt MLC 9000 Plus workshop The following screen should be displayed 2 CHT ending ere 1 Fir View Settings Hen z za HLT din 9000 Workshop Lined cunisguralin Hala Canale a new iilo conlega alors Lead an eniro giem conhgurnon from Fre ree glad sitem on s connecied dece Me Ced Figure 4 39 Load System Data Screen 4 Click the Load an existing system configuration from the disk radio button then click Start Navigate to the directory that contains the file then highlight
78. line for a leak Click on the gas line s Gas Out valve and click Close Click on the gas line s MFC and click Flow Off Click on the Return To Automatic button Perform a system gas line leak check procedure Note If the leak up rates do not meet permitted parameters investigate before proceeding If the leak up rates are within permitted parameters open the wall cylinder isolation valve one quarter of one turn to flow the non hazardous gas After a maximum period of 3 seconds CLOSE the valve CAUTION Ensure the wall isolation valve IS NOT opened for more than 3 seconds 13 14 15 This action will prevent back diffusion of residual contaminants in the non hazardous gas supply line Hepeat the procedure detailed in step 12 an additional four 4 times giving a total of five cycles minimum Slowly open fully the non hazardous gas wall source isolation valve Hepeat steps 3 to 14 for the remaining non hazardous gas lines Hazardous Gas Lines 1 2 Review the Guide to a Safe Way To Work Before starting the commissioning procedures ensure that All tools and equipment for completing gas line commissioning are close to hand Each gas line wall bottle source isolation valve is OFF Gas lines are connected to the gasbox Gas lines are connected to the customer s supply Perform a system Pump to Base procedure Using the chamber mimic page click on the Manifold Valve and choose Manual Mode Click o
79. mimic 1 Access the scheduler as described in 3 4 3 Scheduler 2 Select the mimic tab located at the bottom of the screen 3 A screen similar to the one shown below is displayed Carrier i nete 2 Fae Pape sic Falsa Figure 3 79 Typical Scheduler Mimic Screen Service Manual 3 68 Version 2 4 S P TS Manual Control and Software Utilities AN SPP COMPANY 4 The mimic shows the following information Device Name and Status Substrate Name Position and Status 105 74 R 000 05 CarrierID Cassette 1 Present False Mapyalid False CarrierID Zassette 2 Present false Cassette Door and Transfer Gate Status Last Valid Cassette Map Figure 3 80 Scheduler Mimic Information 5 The following options are available for the device name and status Service The device is functioning correctly in its current active or idle state Out Of Service The device is not functioning correctly in its current active or idle state Behaviour Active The device is currently performing a command Stopping The user has requested a stop command and the tool is processing this command A stop command finishes the current operation but does not carry out any further operations within the process Aborting The user has requested an abort command and the tool is processing this command An abort command does not finish the current operation but halts immediately and does not carry o
80. module Front of cleanroom panel or loadlock Front of electronics rack not for CVD process module On MPX LPX systems EMO buttons located in the following areas e Hear of process module e Front of cleanroom panel or loadlock 4 7 1 1 CPX VPX EMO Circuit Test This Test is to ensure that the EMO circuit is functioning correctly CAUTION Ensure that all turbo pumps are off before continuing Power on All turbo pumps off Chamber vented Associated Procedures Start up after an emergency stop For non CVD process modules using the manual functional area select the turbo and turn it off Repeat step 1 for all non CVD process modules Using the manual functional area set all heaters to 21 Wait until the set temperature is reached Depress fully one of the EMO buttons QN 9r e c Ensure that all power to the system has been removed by checking that CB12 in the PDU has tripped off T Re start the system by following the Electrical and Mechanical Start up procedure detailed in 4 5 1 1 8 Repeat steps 5 to 7 for all remaining EMO buttons 4 7 1 2 MPX EMO Circuit Test This test is to ensure that the EMO circuit is functioning correctly System State Power on Chamber vented Associated Procedures Start up after an emergency stop 1 Using the manual functional area set all heaters to 21 C 2 Wait until the set temperature is reached Service Manual 4 18 Version 2 4 S P T S
81. out the pause command and is waiting for a resume command The tool is operating correctly and is waiting for the next command Not Active Service Manual 3 38 Version 2 4 S TS Manual Control and Software Utilities AN SPP COMPANY 3 3 3 3 3 4 Version 2 4 Idle with Alarms The tool is idle but cannot accept a further command as there are active alarms Stopped The tool has carried out a stop command and is awaiting further commands Aborted The tool has carried out an abort command and is awaiting further commands Recipe Editor Summary Note The options available vary according to the configuration of the system and the parameters set on the General tab This tab provides a graphical representation of the process Dee ILLI Figure 3 43 Typical Summary Tab To access the recipe summary tab 1 From the Recipe view select the required Process Recipe 2 Select the Standard Material Process step Select the Summary tab 4 Select the check boxes from the left hand side of the screen to display the parameters within the graph The graph displays set point against time over the period of the step Using the above utility provides the user with information on the following parameters within the process e Gas flows e RF generator power and time settings Pressure information e Electromagnet settings e Temperature information Data Mode The data logger runs as a stand alone backg
82. ready for use 4 10 6 Replacing the Spectrum Generator This procedure should be followed to replace a damaged spectrum generator In order to replace the Spectrum RF generator the following equipment is required e Laptop computer running Spectrumeter e RS232 cable Phillips head screwdriver To replace the generator follow the procedure detailed below 1 Switch off the power and lock out the tool Remove the existing generator from the tool and replace with the new generator Switch on the power and power up the tool de qM From the operator station run a known recipe to ensure the generator is operating correctly Note The spectrum generator should be supplied pre configured If after installation the generator is not functioning correctly follow the procedure detailed below to configure the generator Note Ensure the laptop has Spectrumeter v 28 installed before attempting this configuration change Version 2 4 4 81 Service Manual Maintenance SPTS AN SPP COMPANY CAUTION Using the Advanced Options menu will give you access to the spectrum calibration and configuration files Only make the changes as described below Any other changes made without the prior permission of MKS Instruments UK Ltd could cause significant damage to the unit CAUTION The password contained within this procedure must not be passed to third 1 2 4 Service Manual parties Connect a suitable RS232 cable between t
83. removed or the chamber is open the hinge coil enclosure alarm will be raised on the CTC Platen MU RF Enclosure Consists of two switches located on the removable covers of the RF enclosure and the platen matching unit If the RF enclosure or matching unit are open the an RF enclosure alarm will be raised on the CTC Coil Matching Unit A switch located on the removable cover of the matching unit If the matching unit is open a Coil Matching Unit alarm will be raised on the CTC Version 2 4 2 43 Service Manual Control System and Power System Distribution lt P TS AN SPP COMPANY PLC DRAWER IN 24V IN 24V IN ELECTRONICS RACK ov G1 WATCHDOG Q v iN de 24V IN Eh se uem RUNNING 24V IN O PUMP PURGE IS OK O OQa z IN 24V IN 24V IN G4 USER go IS SOURCE RF OK RL5 INTERLOCKS OK PLATEN RF 1 OK PLATEN RF 2 OK DC PANEL IN PROCESS MODULE IN 24V IN R1 HINGE COIL G5 CHAMBER ENCLOSURE VACUUM SWITCHES 0 SWITCH IS OK 6 60 24V IN 4 24V IN IN 24 IN R2 COIL MATCHING UNIT SWITCH so Th 9 IN G6 TRANSFER GATE IS CLOSED xu IN 9 5 24V IN R3 PLATEN RL4 GAS MATCHING INTERLOCKS UNIT SWITCH OK OV 24V IN IN 6 N R4 PLATEN O ENCLOSURE SWITCHED 24V TO GAS BOX GAS INTERLOCKS OK GAS AND RF INTERLOCK CIRCUIT INTERLOCKS OK Figure 2
84. the front of the process module below the substrate lift Process gas and purge connections are made directly to the gas box at the rear of the chamber 1 9 1 Service Panel Details of the connections to the service panel and manifold are as shown below DI Water Facilities Water 7 oe N2 CDA He ONG Figure 1 32 Service Panel Fitting Type Description Nitrogen Supply In 1 4 Push Fit ed supply for purging and venting the loadlock Helium Backside Cooling 1 4 VCR Helium supply to the helium backside Supply cooling system Facilities Water 1 2 Twin House water cooling for Ferrule e ICP Heated lid and turbo pump e APS Turbo pump e HRM Pegasus Turbo pump and electromagnet DI Water Not ICP 3 8 Twin Cooling flow and return from the chiller Ferrule providing cooling to the upper electrode antenna and matching unit Compressed Air Supply 8mm Push In Compressed air supply to the chamber and gas box Service Manual 1 36 Version 2 4 Chapter 2 Control System Power System Distribution This Page is Intentionally Blank SPTS AN SPP COMPANY Version 2 4 2 1 Software AFChItecllillB siens ase usine nexkau casas nnmnnn nnmnnn 5 2 1 1 Cluster Tool Controller 5 2 1 2 Recipe Downloader sees nnne nnns 5 m RM
85. to pump out the gas line to the wall Source isolation valve 9 Wait until the gas line s MFC reads 0 SCCM and the chamber reaches base pressure 10 Click on the gas line s Gas Out valve and click Close 11 Click on the gas line s Purge valve and choose Manual Mode Click on Disable Interlocks then click Open Wait for 30 seconds then click Close 12 Click on the gas line s Gas Out valve and click Open 13 Wait until the gas line s MFC reads 0 SCCM and the chamber reaches base pressure 14 Repeat steps 11 to 13 a further nine 9 times giving a total of ten cycles minimum 15 After the final cycle leave the line pumping for 30 minutes or as given in local regulations 16 Using the chamber mimic page close all the gas line s valves 17 Click on the gas line s MFC and click Flow Off 18 Click on the Return To Automatic button 19 Repeat steps 2 to 18 for the remaining hazardous gas lines 20 lfitis required to disconnect the hazardous gas line from the SPTS gasbox proceed as follows 20 1 Ensure the hazardous gas line wall source isolation valve has remained SHUT and locked 20 2 Disconnect the hazardous gas line from customer connection point to the SPTS gasbox 20 3 Cap the disconnected hazardous gas line complete with 0 25 VCR plain gasket 4 10 1 2 Commissioning This procedure replaces air in the gas supply lines purge hazardous and non hazardous to the machine with high purity purge and proce
86. tripod assembly 13 and pin guides 14 Remove three M3 x 35 screws 15 and remove slice lift adaptor 16 Hemove and discard O rings 17 and 18 Hemove three M2 x 8 screws 19 and separate helium tube 20 Remove and discard ring 21 Clean the O ring groove with IPA fit new O ring and replace the three M2 x 8 screws 19 Reassemble the electrode assembly ensuring that all ring grooves are cleaned with IPA and new O rings are fitted throughout 6 7 9 17 and 18 Note Reassembly is the reverse of the above procedure however when fitting the six M4 x 10 screws removed at step 8 the following procedure must be followed 1 2 28 1 Tighten the bolts in the order shown above to 0 4Nm 28 2 Repeat step 28 1 increasing by 0 2Nm increments until the torque reaches 0 8Nm 28 3 Thoroughly clean the top face of the electrode with IPA and lint free wipes 28 4 Wipe dry the electrode using clean dry lint free wipes 28 5 Use No to completely dry the electrode and remove any fibres Refer to Figure 4 20 Remove three M4 x 12 screws 5 Remove split ring 6 from electrode base stem 7 Remove eight M5 x 25 screws 1 4 45 Service Manual Maintenance SPTS AN SPP COMPANY CAUTION The electrode lift bellows assembly is extremely fragile take great care 33 34 35 36 37 38 39 40 41 42 43 44 45 46 when removing the assembly Carefully lift out the electrode lift b
87. will alert the operator to the fact the system has encountered an error 12 Selecting the Statistical Data tab displays statistical data about the selected device Service Manual 3 24 Version 2 4 S PTS Manual Control and Software Utilities AN SPP COMPANY 3 2 9 Version 2 4 Platen and Substrate Lift Manual Control This option allows the user to manually operate the platen lift Substrate Lift asego Huissaaol4 8591 suonqadg yr Disable Interlocks Figure 3 25 Typical Lift Manual Control Screen To allow the platen or substrate lift to be operated manually 1 From the Manual view select the Process Module tab 2 From the mimic screen select the platen lift 3 Select the manual mode control button 4 Select whether interlocks are to be enabled or disabled The following options are activated using the buttons on the command panel ButtonName Function _ Raises the platen substrate lift mechanism Lowers the platen substrate lift mechanism Resets the device in the event of a device failure 3 25 Service Manual Manual Control and Software Utilities lt PTS AN SPP COMPANY 3 2 10 RF Generator Manual Control This option allows the user to manually operate the selected RF generator SUO Was enuey Generator Generator Off Power 8591 2 99 EL run hours Interlocks Figure 3 26 Typica
88. 1 Typical Scheduler Options 71 Figure 3 82 Scheduler OPTIONS cccccsseccccceeececccssneecceeaececceeceesceeeeecsceeeeessceeseeses 71 Figure 3 83 Typical Scheduler Screen 74 Figure 3 84 Typical Scheduler Manual Control 74 Figure 3 85 Scheduler Manual Control Buttons 75 Figure 3 86 Typical TMC Manual Control Screen 76 Figure 3 87 TMC Manual Control eene 76 Figure 3 88 Typical Chamber Manual Control Screen 77 Figure 3 89 Chamber Manual Control 77 Figure 3 90 Typical Scheduler Manual Control 78 Figure 3 91 Scheduler Manual Control Buttons 78 Figure 3 92 Recipe Downloader enn 79 Figure 3 93 Typical Recipe Downloader 80 Figure 3 94 Recipe Not Valid 80 Figure 3 95 NE P AVUNNeruinmeTT M 81 Figure 3 96 FAG SPAN Me 81 Figure 3 97 Example Tag XML oM 82 Figure 3 98 Typic
89. 13 468 Failed to validate recipe a parameter is invalid in the recipe 09 34 13 468 Download Tags Validation error reported 8 34 13 484 Active State Recipe Download Complete 09 34 13 464 Active State Exiting 8 34 13 484 Idle State Entry 8 34 13 484 Idle State Initializing 05 34 13 500 Download Recipe Ending download of recipe 09 34 13 546 Chamber OPC Recipe Downloaded tag changed System Boolean F Figure 3 94 Recipe Not Valid Screen 6 The A symbol indicates that one or more parameters within the recipe are not valid re To define which parameters are not valid the user can re check the selected recipe through the recipe editor or alternatively the invalid parameter can be found as follows Service Manual 3 80 Version 2 4 Manual Control and Software Utilities AN SPP COMPANY 8 Open the C STS Pro Debug Logfiles directory Debug Logliles Bla Men Pyter Qe Q i sent rates Y Ela EF teste LJ beatles LJ CH E CZ Documents 9 ripar 31 JE ru Fee ac Pra Configuration Generator 22 Pocos eligere logis Sam Lore Desk 011 Ub E LC Documents and Settings Prot P khe kx t3 C E C3 iriran Piles r C3 preva Sasha don vi EC 575 gt ES fra X iL Applications 7 ation 3 L7 Dacsbames L Debug bog
90. 16 2 2 3 3 Devicenet Card 17 2294 Ethernel m 19 2 2 3 5 MVI Card MPX only or where is fitted 19 2 2 4 Pumping and Platen RF Generator I O Node 01 21 2 2 5 Coil RF Spectrum Generator Node 02 23 2 2 6 Chamber Heater Control Node 03 25 2 2 6 1 Chamber Heater 26 2 2 Chamber Gauges Interlocks and Status Monitoring Node 04 29 2 2 8 WAT Valve Control Node 05 34 2 2 9 Gasbox MFC Control Node 07 35 2 2 10 Valve Island Gasbox Control Node 08 36 2 2 11 Platen Chiller Node 09 37 2 5 Power Me 38 2 3 1 Power Distribution Unit If Fitted 39 2 3 2 Electronics Rack Power System 40 2939 MEE XP de Dio 40 204 DGIDISIFIDULOF teo 41 2341 SECUN MMRTR 41 2 3 4 2 Chamber DC Control
91. 2 4 External Components The process chamber external components consist of the following e Combined APC HiVac valve e HiVac gauge Process pressure gauge e Vacuum switch e Atmosphere switch Burst pressure kit Process module wall heaters e Anti condensation measures optional e End point detection system optional Combined APC HiVac Valve The combined automatic pressure controller high vacuum APC HiVac valve is located at the back of the process chamber It sits directly between the process chamber and turbo pump The valve acts in two ways As an on off isolation valve isolating the turbo from the process chamber and as a throttle valve varying its opening to maintain the required process pressure The APC valve can operate in either manual or automatic mode depending on the selection made in the recipe editor manual mode a percentage valve open from 100 to 0 corresponding to an angle of opening between 0 1 and 90 degrees can be selected In automatic mode the angle is pressure dependent The valve opens and closed automatically to maintain the pressure set in the recipe editor under the control of a pressure controller HiVac Gauge An active inverted magnatron AIM gauge is used to measure the process module base pressure It generally operates in the range 1x10 to 1x10 Torr Process Pressure Gauge A capacitance manometer is used to measure the process pressure This gauge is isolated from the process
92. 2 Gas and RF Interlocks Service Manual 2 44 Version 2 4 Control System and Power System Distribution AN SPP COMPANY UJ9 s S GOOW OW3 1eseH 100 01 4 ON SSoooJd 0 Aejay 0 9 qe ION 7 1 eel JOON uo SSoo0Jd SS9o9o0Jd SSsoooJd oj SSoooJd oj SSoo0Jd JOS 9 9S0 2 0 JON S 28 uOO JO 19 ANS juiod 19 doJup eunsseJg SS9o0Jd 3 Ge JON ysn pe 990 4 Jeujojsn2 0 1ON 990 4 SS900 d 9 42 JON SS900 d JOSEY 9 qe POU 3ese 7 1 uoneAnoy 7 1 JOO 10 29 jsnfpy 10d S9A es nd Jou 39S 7 1 921Aed 3 JOON 100 0 JO 89OIN Spel e e BAOUJO9J J9AOO ejnsodxe JH 1u8A 9SJg J9AO 2U3 J9AOO BAOUJO9J J9AOO JH gue zou LUOJ Jequieuo JUSASJq p7 uedo 3 eBuiH 4 1 Wd JoJsueJ Jequueuo UO USMS
93. 28 i d Figure 4 14 Roughing Gauge Assembly Service Manual 4 38 Version 2 4 S P T S Maintenance AN SPP COMPANY 4 8 10 Atmosphere Switch O Ring Issue 1 0 Date April 2007 The atmosphere switch assembly contains one O ring Equipment and Materials Standard tool kit Parts Required Atmosphere switch O ring Associated Procedures Safety section in the preliminary To change the O ring 1 Refer to Figure 4 15 2 Remove three M6 x 20 screws 1 and washers 2 and remove the atmosphere switch assembly Dismantle the assembly and remove O ring 4 and carrier 3 Remove and discard the ring from the carrier then clean the carrier using IPA Fit new O ring to the carrier then reassemble the pressure switch assembly Me d 9 Refit the assembly to the chamber using screws 1 and washers 2 Figure 4 15 Atmosphere Switch Assembly Version 2 4 4 39 Service Manual Maintenance lt P T S AN SPP COMPANY 4 8 11 Vacuum Switch O Ring Issue 1 0 Date April 2007 The vacuum switch assembly contains one O ring Equipment and Materials Standard tool kit Parts Required Vacuum switch O ring Associated Procedures Safety section in the preliminary To change the O ring 1 Refer to Figure 4 16 2 Remove three M6 x 20 screws 1 and washers 2 and remove the vacuum switch assembly Dismantle the assembly and remove O ring 4 and carrier 3 Remov
94. 28 1 5 9 Pumping Proced re 28 1 6 Cooling and Heating Systems 29 1 6 1 Cooling System eee 29 30 1 6 2 Heating i e 30 t7 e 31 Version 2 4 1 3 Service Manual Introduction S P T lt AN SPP COMPANY 1 7 1 Gasbox Valve 15 NETT 32 1 7 2 Chamber Valve 1 33 1 7 3 Chamber Pneumatic esee 34 1 9 Vacuum 35 1 9 Service Connection Overview 36 1 9 1 Rma kt iae 36 Service Manual 1 4 Version 2 4 SPTS Introduction AN SPP COMPANY Figures Figure 1 1 System OvervieW 6 Figure 1 2 CPX System Layout 7 Figure 1 3 VPX System Layout 8 Figure 1 4 MPX System Layout Example 8 Figure 1 5 Process Module 10 Figure 1 6 Source Assembly M TO 11 Figure 1 7 Gasbox Valve
95. 4 S P T S Maintenance AN SPP COMPANY 4 10 2 1 4 10 2 2 4 10 2 3 Version 2 4 Leak up Rate Check Procedure 1 Using the chamber mimic page select the Leak up option to initiate a Leak up rate check Note Ensure that the MFC displays a flow rate and that the flow rate starts to fall This will prove that the MFC is connected and is allowing gas to flow 2 When the check is complete the result is displayed 3 To achieve an accurate leak up rate indication the process chamber capacitance manometer Capman gauge must be checked to ensure the gauge is NOT measuring negative pressure Note When a leak up rate check is undertaken following a process chamber mechanical clean and the same process chamber components have been re fitted without first being treated baked in an appropriate oven high leak up rates are likely to occur In these circumstances a high leak up rate is probably because of the out gassing caused by water in the process chamber components If a high leak up rate is experienced pump the system down for an additional 5 min utes and monitor the process chamber pressure Ensure the leak up rate decreases Repeat the procedure until the leak up rate is within limits Leak Down Check The purpose of this procedure is to check the vacuum integrity of the HiVac seal 1 Perform a pump to base operation 2 Using the chamber mimic page click on the APC valve and choose Close 3 Using the chamber m
96. 48 Typical TMC Control Screen 3 To allow access to the manual control function enter STS Plasma The password is case sensitive in the password field and press enter Note The manual contro buttons located on the right hand side of the panel will now become active Version 2 4 3 43 Service Manual Manual Control and Software Utilities SPTS AN SPP COMPANY 3 4 1 1 TMC Manual Control Overall Tab The overall tab allows the user to manually control transfers between the components of the tool To access the manual control overall tab 1 Access the manual control software as detailed in 3 4 1 Manual Control Software CPX VPX Only 2 From the TMC control screen select the Overall tab Overall Cassette 2 Cassette Pumping Cassette 2 Pumping PMC2 PMC3 Substrate Map Editor v Enable Interface Current Command None OutjService Power Down Initialisation Operational In Service Out Of Service Equipment Select Align Inactive Idle With Alarms If Required Source Station Source Slot E Substrate ID Align Swap Transfer Destn Station L Destn Slot System Code Error Arm Cycles Aligner Map Buffer Map v 01 Safety 1 Execute Log Level 1 p Figure 3 49 Typical TMC Overall Tab 3 select the Startup button to activate the system if required 4 The following buttons are located on the right hand side of the s
97. AGES WILL BE PRESENT IN THE EQUIPMENT OBSERVE ALL CURRENT SAFETY PRECAUTIONS 9 Turn on all circuit breakers except for those labelled Not Used For each Process Module s Electrical Rack 10 On the Electrical Rack ensure that CB2 Safety Supply is on 11 Ensure that Safety Supply lamp is lit 12 Ensure that the main isolator is on If the main isolator fails to stay in the On position re check to ensure that all EMO buttons are pulled out 13 Repeat steps 10 to 12 for all Process Modules 14 Switch on the control PC and wait for it to load the system software 15 Perform a system Pump To Base operation This will automatically turn on the backing and turbo pumps 4 9 Service Manual Maintenance lt P T S 4 4 2 Service Manual AN SPP COMPANY Shutdown Procedure Whenever possible the system should be left switched on Vacuum pumps should be left running with the process chamber under vacuum ENSURE THAT ALL PROCESSING HAS CEASED AND THAT THERE ARE NO SUBSTRATES LOCATED ANYWHERE IN THE SYSTEM BEFORE PERFORMING A SYSTEM SHUTDOWN IF THE SYSTEM IS TO BE PLACED INTO A DECOMMISSIONED STATE OR LEFT IDLE FOR A TIME PERIOD LONGER THAN THAT SPECIFIED BY LOCAL REGULATIONS THEN THE PROCESS GASLINES MUST BE PURGED BACK TO THE ISOLATION VALVES AND ISOLATED AT SOURCE USE THE MANUAL FUNCTIONAL AREA TO ACHIEVE THIS Use the following procedure to switch the system off Note A user with a Service Engineer pro
98. CURRENT LOCAL SAFETY STANDARDS OR MINIMALLY TO BS EN 166 AND OR ANSI 287 1 P 14 Version 1 4 SPTS AN SPP COMPANY P9 P9 1 P9 2 Version 1 4 Specific Physical Hazards This section details the specific physical hazards that arise from materials used commonly in all system applications Other hazardous materials may also be present for example hazardous gases may be used for particular process requirements Always refer to the manufacturer s MSDS information for each of these hazardous materials before performing any maintenance or repair procedures Viton Synthetic Rubber and Fluoroelastomer Products SEVERE BURNS CAN RESULT FROM THE HANDLING OF VITON O RINGS WHICH HAVE BEEN EXPOSED TO EXCESSIVELY HIGH TEMPERATURES HOWEVER SERVICE ENGINEERS ARE ASSURED THAT WHEN USED UNDER THEIR DESIGN CONDITIONS THEY ARE SAFE Viton is a fluoroelastomer which is a synthetic rubber like material containing fluorine If this material is exposed to temperatures in the region of 400 C or higher the material decomposes and one of the products formed is hydrofluoric acid This is an extremely corrosive substance and is almost impossible to remove once it contaminates the skin and first aid assistance must be sought If it is required to inspect equipment which has been exposed to very high temperatures e g if it has been involved in a fire examine closely to ascertain if any seals have suffered decomposition in which case they will appe
99. Carousel Cmd Load Chamber Wafer Unload Chamber Wafer Pump Purge Close Gate Vent Chamber Cmd Pump Chamber Crd C Sel Map Orient C Sel Lock Reset C Sel Swap Pump And Orient Vent And Orient Inactive Fault Pump active Idle Fault Uninitialised Inactive Uninitialised Inactive i Fault Inactive Uninitialised Inactive Inactive Inactive Inactive Inactive Inactive Inactive Inactive Inactive Inactive Inactive Inactive cO ocococoocoococoocococoococcocc crnrnsgcoc Log States ptions Trace 12 Sep 2008 11 51 10 Figure 3 69 TMC States Screen Note The state number indicates the operation that the system is currently performing with a description of that operation in the status column Service Manual 3 62 Version 2 4 S TS Manual Control and Software Utilities AN SPP COMPANY 3 4 2 4 TMC Options Screen The TMC options screen allows the user to select which commands on the transport system are logged and allows the user to emulate certain system sensors To access the TMC Options screen 1 From the Task Bar double click the Transport Module Controller TMC icon 2 Select the Options tab from the TMC software as shown below TMC v8 0 16 0 Logging Exchange comms MDB comms Robot comms Debug comms Log States Options Trace Config 1 0 Misc 12 Sep 2008 11 50 30 Figure 3 70 TMC Options Screen N
100. D ESC is extremely fragile take great care not to damage the surface when removing the assembly 7 Carefully lift out the TD ESC through the process chamber and place it on a clean flat surface Remove lower platen isolator 5 Remove and discard O ring 6 10 Remove six M5 x 20 screws 7 securing the bellows 8 and electrode support 9 to the electrode lift plate AD319844 item 63 11 Remove eight M5 x 20 screws 10 securing bellows surround 11 to chamber base plate 12 12 Carefully lift the remainder of the assembly out of the process chamber and place it on a clean flat surface 13 Remove and discard O rings 13 and 14 14 Remove six M5 x 12 screws 15 securing bellows 8 to bellows surround 11 15 Remove and discard O rings 16 and 17 16 Clean all O ring grooves with IPA 17 Fit new O rings throughout 4 6 17 16 14 amp 13 4 41 Service Manual Maintenance lt P T S AN SPP COMPANY Note Reassembly is the reverse of the above procedure however when re fitting screws 1 the following procedure must be followed 1 6 3 4 5 2 1 Place the long side of the hexagonal wrench into the bolt head Lightly finger tighten each bolt in the order shown above until slight resistance is felt 3 Keeping the long side of the hexagonal wrench in the bolt head tighten the bolts in the order shown above by rotating the wrench 1 4 of a turn 4 Tighten the bolts in the order shown above
101. EXPLOSIVE FLAMMABLE TOXIC OXIDISING AGENT Version 1 4 P 1 Hazardous Locations P 13 Preliminary P8 P8 1 Preliminary SPTS AN SPP COMPANY Personal Safety Before undertaking any maintenance or repair of the equipment review the guide to a safe way to work Personal Protective Equipment Provided the system is process contaminant free routine maintenance can be undertaken wearing a face mask double gloved nitrile gloves and chemically resistant goggles that comply with BS EN 166 and or ANSI Z87 1 WHEN THE SYSTEM CANNOT BE VENTED THERE ARE STRICT PROCEDURES THAT MUST BE FOLLOWED AND FULL PPE SUITABLE FOR DEALING WITH HAZARDOUS GASES AND THEIR BY PRODUCTS MUST BE WORN PLEASE REFER TO THE MSDS FOR DETAILS ON THE PPE AND CONTACT SPTS AS SOON AS PRACTICABLE FOR INSTRUCTION ALL PPE MUST BE USED IN ACCORDANCE WITH THE MANUFACTURER S INSTRUCTIONS OR LOCAL PPE REQUIREMENTS BEFORE BREAKING SEALS AND UNDERTAKING AIR SAMPLING CHECKS FULL PERSONAL PROTECTIVE EQUIPMENT MUST BE WORN INCLUDING A RESPIRATOR THE IMMEDIATE AREA MUST BE WELL VENTILATED ALL NON ESSENTIAL PERSONNEL MUST BE EVACUATED TO A SAFE AREA AND AIR SAMPLING WARNING NOTICES MUST BE DISPLAYED IN THE IMMEDIATE VICINITY WHEN UNDERTAKING AIR SAMPLING TESTS CHECKS MUST BE MADE TO ASCERTAIN THE CONCENTRATION OF RESIDUAL GASES AND HAZARDOUS BY PRODUCT GASES IT IS RECOMMENDED THAT MAINTENANCE PERSONNEL WEAR SAFETY GOGGLES THAT CONFORM TO THE
102. G 14 57 30 Recipe 00003 12 della 00 00 00 0100 StegHarnesStarelard material process 0001208 1006 GhepMame Clandand matenal peces Back Bus Bunge Waker Tahe 16 Coen L ie Paten vie vive 1e Open lo Pracie Pew Marinad i R55 Pressure Controller Prepare Exa Supply Yave Veke Is Open i CMG Pon Meemuned CaS Our Valve Valve Ds Open E CFS Praten L Chamber Fast vert aive tave Is Open Heater ia De Heater Mode Heater Control Mode Setpa Heater Coi Pme Heater Tene id id d B iJ an i id d d a a Es Figure 3 45 Typical Pen Selector 4 Select the parameters to be shown on the graph 5 For each parameter chosen select whether or not to show its statistical data Version 2 4 3 41 Service Manual Manual Control and Software Utilities SPTS AN SPP COMPANY The following buttons are available on the Data screen command panel Refreshes the screen to show any changes on the log One Graph Displays the information selected on one graph 3 3 4 4 1 Statistical Data otatistical data for each parameter can be displayed on the graph The statistics available are Minimum maximum average and standard deviation Process Module Time Recipe and Substrate ID Cursor Position and Step Name Viewer 1
103. HAT COULD CAUSE INJURY TO PERSONNEL OR A FAILURE OF THE SYSTEM IF IN DOUBT USE THE EMERGENCY STOP PROCEDURE DO NOT INVESTIGATE SUSPECTED FAULTS WHILE THE SYSTEM IS OPERATING THE ROBOT ARM WILL RETRACT BACK INTO THE LOADLOCK OR TRANSPORT MODULE AFTER AN EMO EVENT Emergency Stop EMO buttons are located in the following areas e Front of cleanroom panel if fitted e Front of loadlock if fitted e Hear of process module Electronics rack if fitted Note An additional customer requested EMO button may also be fitted Please refer to the drawing pack for details of its location If an emergency condition is suspected proceed as follows 1 Depress fully one of the red Emergency Stop EMO buttons located on the system Note When an EMO button is depressed the main isolator is switched off and all power to the system is removed by the safety circuit becoming open circuit CAUTION The EMO button should only be used in an emergency as the operation of the EMO could result in damage to the turbo pump To shut the system down in a non emergency situation see 4 4 2 RED STOP BUTTONS FITTED TO OEM EQUIPMENT WILL ONLY SHUTDOWN THE OEM UNIT Immediately after pressing the EMO button you must complete the following procedure 1 Isolate at source any services associated with the suspected fault 2 Isolate the gas supplies at source until the fault is found 3 Initiate maintenance action relevant to the suspected fault N
104. HOW THE ABSENCE OF ANY HAZARDOUS GASES AT CONCENTRATIONS ABOVE THE OCCUPATIONAL EXPOSURE LIMIT OEL 4 CHILLERS MUST BE SET AT AMBIENT TEMPERATURE BEFORE THE CHAMBER IS OPENED TO AVOID THE OPERATOR BEING EXPOSED TO HOT OR COLD SURFACES Preliminary P 26 Version 1 4 SPTS AN SPP COMPANY gt gt PP o Version 1 4 EVACUATE HAZARDOUS GAS FROM THE GAS LINE AND BACK FILL THE GAS LINE WITH N2 BEFORE COMMENCING A PROCESS CHAMBER CLEAN PROCEDURE DECOMMISSION GAS LINES HAZARDOUS AND NON HAZARDOUS BEFORE CARRYING OUT MAINTENANCE ON GAS LINES BETWEEN THE CUSTOMER SUPPLIED GAS SOURCE ISOLATION VALVE AND THE GAS OUTLET VALVE TO THE PROCESS CHAMBER WHEN UNDERTAKING MAINTENANCE ON HAZARDOUS AND NON HAZARDOUS GAS LINES WARNING NOTICES MUST BE DISPLAYED TO IDENTIFY THE STATUS OF SPECIFIC GAS LINE VALVES AND ASSOCIATED SOLENOID VALVES WHEN INDIVIDUAL GAS LINE VALVES ARE SHUT THEY MUST BE LOCKED SHUT TO PREVENT INADVERTENT OPERATION TO PREVENT AN UNCONTROLLED HAZARDOUS GAS FLOW TO THE PROCESS CHAMBER WHICH COULD RESULT IN PERSONAL INJURY DO NOT OPEN THE BY PASS VALVE WHEN FLOWING A HAZARDOUS GAS TO PREVENT RISK OF PERSONNEL INJURY THE HELIUM LEAK CHECK MUST BE UNDERTAKEN BY SUITABLY QUALIFIED PERSONNEL WHO ARE FULLY AWARE OF ALL RELEVANT SAFETY PRECAUTIONS ASSOCIATED WITH PROCESSING OPERATING AND MAINTAINING THE EQUIPMENT BEFORE UNDERTAKING HELIUM LEAK CHECK CHECK THE STATUS OF THE CHAMBER WITH THE SYSTEM S PROCESS
105. High voltages are present within the E Rack PLC drawer Source Matching Units High RF voltages are present within the source matching units High RF Voltage Bias Decoupling Unit High RF voltages are present within the bias decoupling unit Foreline Hot surfaces are present on the heated foreline Lower RF Enclosure Hot surfaces are present within the lower RF enclosure Hot Surface Hot surfaces are present within Loadlock the loadlock LPX only Cold Surface Lower RF Enclosure Cold surfaces are present within the lower RF enclosure Crush Hazard Lower RF Enclosure A crush hazard is present within the lower RF enclosure Non lonising Radiation Lower RF Enclosure Non lonising radiation is present within the lower RF enclosure Strong Magnetic Source Enclosure Strong magnetic fields are present within the source covers Persons with a Field pacemaker or similar implant must not come inte close proximity e this equipment A class laser is present within Laser Loadlock the loadlock MPX and MACS only Note The gasbox will contain gases that are specific to each process requirement The actual hazard labels used will be dependant upon the gases present Corrosive Explosive Flammable Oxidising Toxic Gases Gasbox Corrosive explosive flammable oxidising toxic gases are present within the equipment located inside the gasbox CORROSIVE
106. ICP Service Manual The information contained in this manual is applicable to the following system Handling System CPX VPX and MPX LPX Process Module ICP Software Release Release 2009 Vol 1 Build 1 Version 2 4 SP TS AN SPP COMPANY SPP Process Technology Systems UK Limited Imperial Park Newport NP10 8UJ UK This Page is Intentionally Blank Preliminary This Page is Intentionally Blank AN SPP COMPANY Table of Contents xu c 5 PZ MES IUEQICA CIL m 6 P3 ec 7 AcknowledgeimelnlS uices conia en 8 P5 Warnings Cautions and 9 PO Safety netiis 10 P6 1 Responsibilities RTT 10 P6 2 Guide for a Safe Way To Work 11 Pr General Sale ae ern ne E E RE 12 P7 1 Actions in the Event of Fire or other 12 P7 2 Hazardous Conditions ccccccccccescccsescceceeeceeeecesauseeeseeeesaeeeessueeesseeeeeeaes 12 P73 Hazardous Locations sissien eai 13 PS Personal SAN m 14 P8 1 Personal Protective
107. L LOCAL LAWS AND WORKING PROCEDURES ENSURE THAT THE PROCESS CHAMBER IS AT AMBIENT TEMPERATURE BEFORE OPENING 1 Using the tool software vent the process chamber 2 Uncouple the cooling water from the Swagelok fittings on top of the lid 3 Uncouple the gas inlet kit Figure 428 ICP Lid 4 61 Service Manual Maintenance S P T S AN SPP COMPANY Refer to Figure 4 28 Remove the eight M5 x 16 screws 1 that fix the lid to the RF enclosure and remove the lid Hemove and discard the O ring 2 from the underside of the lid Remove the four M4 x 12 screws 4 that fix the gas distributor plate 3 to the lid and remove the plate 8 Place a protective cover over the platen Figure 4 29 ICP Ceramic and O Ring THE CERAMIC IS HEAVY TAKE GREAT CARE WHEN HANDLING THE CERAMIC TO ENSURE THAT FINGERS AND LIMBS ARE NOT TRAPPED CAUTION The ceramic is heavy and fragile Take great care when removing it Service Manual 4 62 Version 2 4 SPTS AN SPP COMPANY 4 9 2 Version 2 4 9 Refer to Figure 4 29 10 Remove the ceramic 1 from the chamber 11 Remove and discard the O Ring 2 Assembling the Source Body Assembly of the source body is the reverse of disassembly 4 63 Maintenance Service Manual Maintenance lt T lt 5 4 10 General Setup and Service Procedures This section details common setup and service procedures for the system 4 10 1 Gas Line
108. L2184 4 Channel Digital Output 24 12 KL2408 KL2488 Digital Output 24 12 KL2612 2 Channel Relay Output 24 13 KL2502 2 Channel PWM Output 24 V 3020 Version 5V 13 KL4004 Analogue Output 0 10V 14 KL5111 Incremental Decoder 14 PLC and Associated Equipment 15 Control Logix 5555 PLC front 16 Devicenet Front 17 Ethernet Card Front Panel ccccccccsseceesseeeceeceseeeeeeseeseseeeeeseeeessaes 19 Node 01 Pumping and Generator 1 21 Node 02 Coil RF Spectrum 23 Node 03 Chamber Heater Control esses 25 Heater Control 27 Node 04 Chamber Gauges Interlocks and Status Monitoring 29 Node 07 Gasbox MFC Control 35 Node 08 Norgren Valve Island Gasbox Control 36 Power Cabling Overview CPX With Four Process Modules
109. LECTRICIAN AT WORK MUST BE DISPLAYED Mains Isolation Where practicable always isolate the power supply to the machine equipment at its mains isolator 1 gt de w yN Identify the mains isolator Hefer to the Service Manual to ensure the correct isolator is identified Place the isolator in the OFF position Insert the lock out and secure with a padlock Hemove the key and retain it With the lock out in place test the lockout to ensure that it prevents the isolator from being moved to the ON position If a lock out clasp is already in place another lockout MUST be added to the clasp The lock out clasp should have the facility for at least two padlocks to be fixed to it Use a test lamp or DVM to ensure that the equipment is isolated After maintenance has been completed ensure that all guards and interlocks have been replaced before removing the lockout PDU Electronics Rack Isolation If the power supply cannot be isolated at the mains isolator then the following procedure must be followed 1 2 p Dp amp Identify the PDU electronics rack that serves the tool The PDU electronics rack is fitted with a main circuit breaker and individual sub circuit breakers Where practicable the main circuit breaker should be locked out Only when power is necessary on another part of the tool e g to keep pumps running etc should a sub circuit breaker isolation be made Appropriate lock out toggles MUST be
110. LED Indicates data is being transmitted to the operator station PC OK Steady Green LED Indicates the Ethernet card is operating correctly 2 2 3 5 MVI Card MPX only or where an EPD is fitted On MPX systems the MVI card is used to allow the PLC to communicate with the PC located in the loadlock controlling the handling system Where an EPD id fitted it is used to allow the PLC to communicate with the EPD system Version 2 4 2 19 Service Manual Control System and Power System Distribution lt P TS AN SPP COMPANY The following indicators are located on the front Suus peser a CFG Steady LED Console Displays MVI status if connected to a monitor Steady Green LED Communication channel to the loadlock PC TMC Control P2 Steady Green LED EPD communication if fitted x Steady Green LED Indicates the application is functioning correctly Steady Green LED Indicates communication between the System and the loadlock will normally be blinking as commands are relayed BATT Steady Red LED When lit indicates the internal battery has failed OK Steady Green LED Indicates the MVI card is functioning correctly Service Manual 2 20 Version 2 4 Control System and Power System Distribution SPTS AN SPP COMPANY 2 2 4 Pumping and Platen RF Generator I O Node 01 Node 01 consists of a bus terminal containing Beckhoff for controlling the pumping system and platen RF gener
111. MING ANY SERVICE PROCEDURE ON THE PUMPING EQUIPENT THE SYSTEM S HELIUM SUPPLY MUST BE ISOLATED BEFORE STOPPING THE LOCAL EXHAUST VENTILATION LEV SYSTEM Preliminary P 20 Version 1 4 SPTS AN SPP COMPANY P14 Electrical Safety TO PREVENT RISK OF INJURY ALL MAINTENANCE AND REPAIR PROCEDURES MUST BE UNDERTAKEN BY TECHNICALLY QUALIFIED PERSONNEL WHO ARE FULLY AWARE OF ALL RELEVANT SAFETY PRECAUTIONS ASSOCIATED WITH PROCESSING OPERATING AND MAINTAINING THE EQUIPMENT IN ADDITION SUCH PERSONS MUST BE CAPABLE OF OPERATING SPTS SOFTWARE POTENTIALLY LETHAL VOLTAGES IN EXCESS OF 30 VOLTS AC AND 50 VOLTS DC ARE PRESENT ON THE EQUIPMENT TO PREVENT INJURY ENSURE THE SYSTEM CIRCUIT OR COMPONENT IS ISOLATED AND LOCKED OFF FROM ITS SOURCE OF SUPPLY PRIOR TO UNDERTAKING ANY MAINTENANCE OR REPAIR OF THE EQUIPMENT DO NOT RELY ON CONTROL SYSTEM INTERLOCKS OR VDU DISPLAYS AS AN INDICATION THAT IT IS SAFE TO WORK ON POTENTIALLY HAZARDOUS ITEMS gt gt gt WHEN UNDERTAKING ELECTRICAL MAINTENANCE AND REPAIR PROCEDURES NEVER WORK ALONE P14 1 Radio Frequency RF Power The system uses HF power during processing All enclosures inside which RF power is present are clearly marked and the covers are fitted with electrical interlocks Anyone requiring access to the source must be fully aware of the hazards of RF power The relevant parts of the system must be electrically isolated before any work is carried out inside these enclo
112. Module Controller OBEM States 37 3 3 3 Recipe Editor Summary 39 3934 Data INO MMRERETERRRC 39 3 3 4 1 Logging Recipes 40 De Tend Dala 40 3 3 4 3 ARAMS Utility 40 3 3 4 4 Using the Data Viewer nnn 40 ropa EIE UUO mem ed 43 3 4 1 TMC Manual Control Software CPX VPX 43 3 4 1 1 TMC Manual Control Overall Tab 44 3 4 1 2 Manual Control Robot 46 3 4 1 3 TMC Manual Control Cassettes 50 3 4 1 4 Manual Controlled SMIF 52 3 4 1 5 Manual Control Core Pumping 52 3 4 1 6 Manual Control Cassette Pumping Tab 54 3 4 1 7 Chamber Manual Control 55 3 4 1 8 Substrate Map Editor 57 3 4 1 9 Passthrough Mode cccccccsseseceeeeeeeeeseeeseeeeeeeeeeesaeeseeeeeseeeesaees 60 3 4 2 Manual Control Software Multiplex Systems
113. N REMOVED AND A FULL MODULE CLEAN HAS BEEN COMPLETED 4 13 Service Manual Maintenance SPTS AN SPP COMPANY Before substrate handling can be verified the virtual safety wafer must be deleted 11 12 Enter the Substrate Map Editor and click on the safety wafer Delete the safety wafer by deselecting it in the Command Panel ensure that the tickbox next to Present is clear Click Update Mapping The substrate handling between the VCE Loadlock and the robot arm must now be verified 13 14 15 16 17 18 19 20 21 22 Service Manual Note Steps 13 and 14 are only for CPX VPX tools Using the Manual Functional area transfer a substrate from the VCE Loadlock to the Transport Module and back again Visually ensure that substrate handling occurs correctly Repeat step 13 for the second VCE if fitted Select the process module and perform a Chamber Leak Up Test see Chapter 3 System Operation and ensure that the leak rate is within tolerance Once complete pump the process module to base Repeat step 15 for each process module if additional process modules are fitted Enter the Substrate Map Editor and ensure there is a virtual safety substrate in the Process Chamber 17 1 lfthere is no substrate present add one by clicking in the tickbox in the Command Panel ensure that there is a tick next to Present Delete the safety substrate by following the procedure in step 11 Chec
114. NJURY THIS PROCEDURE MUST ONLY BE UNDERTAKEN BY TECHNICALLY QUALIFIED PERSONNEL WHO ARE FULLY AWARE OF ALL RELEVANT SAFETY PRECAUTIONS ASSOCIATED WITH PROCESSING OPERATING AND MAINTAINING THE EQUIPMENT IN ADDITION SUCH PERSONS MUST BE CAPABLE OF OPERATING AND PROGRAMMING SPTS SOFTWARE Non hazardous Gas Lines 1 Review the Guide to a Safe Way To Work CAUTION To prevent cross contamination of gas lines always decommission gas O Spe Ie 11 12 13 lines individually Perform a system Pump to Base procedure Shut the non hazardous gas line wall source isolation valve Using the chamber mimic page click on the gas line s MFC and choose Manual Mode then click on Disable Interlocks Click Flow On and set the flow rate to 100 of the MFC maximum Click on the gas line s Gas Out valve and choose Manual Mode Click on Disable Interlocks then click Open Note Ensure that the MFC displays a flow rate and that the flow rate starts to fall This will prove that the MFC is connected and is allowing gas to flow The system will now start to pump out the gas line to the wall source isolation valve Wait until the gas line s MFC reads 0 SCCM and the chamber reaches base pressure Leave to pump for 30 minutes or as given in local regulations Click on the gas line s Gas Out valve and click Close Click on the gas line s MFC and click Flow Off Click on the Return To Automatic button Hepeat steps 3 to 11 for the remaining
115. Note The pre installation guide specifies that a foreline manual isolation valve is fitted between the backing pump and the HiVAC valve 1 Perform a chamber leak up rate operation and record the value 2 Close the foreline isolation valve and record the chamber pressure 3 Wait 5 minutes and record the chamber pressure again 4 Compare the two readings and ensure that the leak up rate is within specification Version 2 4 4 23 Service Manual Maintenance SPIS AN SPP COMPANY 4 7 11 Temperature Zone Test This test ensures that each temperature zone is being controlled correctly System State Pumped to base 1 Set all temperature zones to 21 C and wait until these temperatures are reached 5E Temperature Zones mus lz 4Torr gag orr 7 nu 5 ac B TEMRE Temperature Control Temperature Fixed Power Output Safety Temperature safety Temperature Output Power oo OWwer Figure 4 5 Temperature Zones 2 For zone 1 set the temperature to 50 C and ensure that the mimic shows the control and safety temperature values rising together 3 Ensure that the set temperature 50 C does not reach 65 C during the temperature overshoot 4 Ensure that the output power reduces under PID control to maintain 50 C 5 Repeat for all temperature zones Service Manual 4 24 Version 2 4 S P T S Maintenance AN SPP COMPANY 4 8 Maintenance Procedures The following section d
116. O IN4 Figure 2 4 KL1114 KL1194 Digital Input 24V 2 8 Version 2 4 Control System and Power System Distribution SPTS AN SPP COMPANY 2 2 2 2 KL1124 Digital Input 5V The bus terminal contains four channels that indicate its signal state by means of light emitting diodes KL1124 4 CHANNEL DIGITAL INPUT 5V es LED gt LED2 B LED3 70 97 0 N1 0O IN2 45V 5V 0 IN3 Figure 2 5 KL1124 Digital Input 5V 2 2 2 3 KL1418 Digital Input 24V The digital input terminal KL1418 positive switching contains eight channels which indicate their signal state by means of light emitting diodes KL1418 8 CHANNEL DIGITAL INPUT 24V Figure 2 6 KL1418 Digital Input 24V 2 2 2 4 KL3064 Analogue Input 0 10V The KL3064 analog input terminal handles signals in the range from 0 to 10V The voltage is digitised to a resolution of 12 bits The input channels of a bus terminal have a common ground Version 2 4 2 9 Service Manual Control System and Power System Distribution P TS AN SPP COMPANY pote
117. OEMs and other components that are contacted by cooling fluids represent no hazard and require no special precautions Disposal should be in line with local regulations P 31 Preliminary 17 2 Preliminary SPTS Electrical Items SPTS tools are exempt from the RoHS directive However all Pro tools manufactured after December 2006 use ROHS compliant components and many OEM components used on the tool before this date were already compliant If there is any doubt the OEM manufacturer should be consulted Before selling on any electrical equipment it is the responsibility of the user to ensure that these products are safe and in an appropriate condition for resale SPTS accepts no liability for the forward sale of components used on its tools or warranty on them Recycling SPTS equipment is comprised of the following materials Panelling Mild Steel Painted Chamber Components Aluminium 6082 5083 Stainless Steel 316L 304 FKM FFKM Nickel Chamber Block Aluminium 6082 Recycling can only apply to those assemblies and components that have not been contaminated or have been cleaned in accordance with local laws A specialist contractor should be consulted to ensure that any contaminated materials have been cleaned sufficiently for recycling purposes P 32 Version 1 4 Chapter 1 Introduction This Page is Intentionally Blank SPTS Introduction AN SPP COMPANY Table of Contents MOUCHO
118. PURGED AND BACK FILLED WITH N2 BEFORE VENTING see Chapter 4 for further information on purging the gas lines PA ENSURE ALL APPROPRIATE ANALYTICAL AND SAFETY EQUIPMENT IS AVAILABLE AND IS USED AS NECESSARY 3 ENSURE THE CHAMBER IS IN A SAFE STATE TO BE VENTED IF TOXIC GASES ARE PRESENT AFTER VENTING BREATHING APPARATUS MUST BE WORN BEFORE OPENING THE CHAMBER IF A CLEANING RECIPE CANNOT BE RUN OR IF TOXIC GASES HAVE BEEN USED IN THE PROCESS CHAMBER THEN PPE MUST BE WORN BEFORE OPENING THE CHAMBER SEE P8 THE GASBOX CONTAINS EQUIPMENT THAT MAY CONTAIN HAZARDOUS GASES ONLY SPTS APPROVED TECHNICALLY QUALIFIED PERSONNEL WHO ARE FULLY AWARE OF ALL RELEVANT SAFETY PRECAUTIONS MAY OPEN THE GASBOX ENSURE THAT THE GASBOX EXTRACT IS RUNNING BEFORE OPENING THE GASBOX DOOR ENSURE THE GASBOX DOOR IS CLOSED AND LOCKED DURING PROCESSING gt gt gt gt Version 1 4 P 17 Preliminary SPTS P11 Manual Handling All operations involving manual handling must be in accordance with the local manual handling operations regulations e In particular all mechanical handling aids provided must be used e Handling without mechanical aids must be a last resort and is in any case forbidden for any single person handling of any component weighing 25 kg or more Care must be taken with any component awkwardly located or with any component which has any other potentially hazardous characteristics such as high or low temperature sharp edges
119. Pumping O RINS 54 4 8 16 Turbo Pump nnns 55 4 8 17 Turbo Foreline 58 4 8 18 Gate Valve Overhaul Procedure 59 4 8 19 FFKM Ring Recovery 60 4 9 Process Chamber Disassembly and Reassembly Instructions 61 4 9 1 Disassembling the Source Body 61 4 9 2 Assembling the Source Body 63 4 10 General Setup and Service rere 64 4 10 1 Gas Line Decommissioning and Commissioning 64 4 10 1 1 64 4 10 1 2 Commissioning ccisisecanccnes iectiecdanieapagantasieeudaneresscdnnewsccanicnersesctidecstt 66 4 10 2 Leak up Rate 70 4 10 2 1 Leak up Rate Check 71 4 10 2 2 Leak Down nnne nnns 71 4 10 2 3 Capacitance Manometer Capman Gauge Check 71 4 10 2 4 Helium Leak 72 4 10 3 Replacing a Damaged I O 73 4 10
120. S lt AN SPP COMPANY 1 3 9 Power Distribution Unit Certain system configurations require the use of a power distribution unit PDU To route power to each process module s electronics rack The following table details the various system configurations and shows where a PDU is used Ex hea Oe wk ms Figure 1 11 PDU Typical Arrangement See Chapter 2 for further information on the PDU Service Manual 1 18 Version 2 4 SPTS Introduction AN SPP COMPANY 1 4 Tool Control The tool control system consists of an operator interface with an optional touch screen an industrial computer a control logix PLC and a series of bus terminals Operational commands are issued via the operator interface to the PC This in turn controls the PLC which commands each node of the DeviceNet network Cleanroom Panel Workstation Workstation Optional KVM Switch Optional Industrial PC Ethernet 20 So Aiddns J8MOd 19412433 lt e PLC in Electronics Cabinet PLC Drawer DeviceMet Nodes 2 3 5 7 8 9 10 also 16 amp 17 optional f TE nine 1 24 H 212411 5 Beckhoff Bus Terminal I O Modes 1 4 amp 7 TT I PP eee BE ERB EN T
121. S Indicators Productive Indicates the tool is in a productive mode i e is processing or transferring substrates Standby Indicates the tool is currently idle but has the ability to perform commands Engineering Indicates the tool is being worked upon and cannot carry out any production work Scheduled Indicates the tool is currently unservicable due to a pre scheduled activity Downtime e g preventative maintenance work Unscheduled Indicates the tool is currently unservicable due to an alarm condition Downtime Non Scheduled Indicates downtime outside of the tool production time e g time before the Downtime tool was in service due to testing etc Engineering 00 00 00 Object Based Equipment Module OBEM The CTC is responsible for maintaining a tool wide OBEM state model in accordance to SEMI standard E98 The operational service state model is used to enable and disable the tool as whole via the HMI interface on the CTC itself or via a remote factory host using SECS GEM Version 2 4 S TS Manual Control and Software Utilities AN SPP COMPANY interface The operational behavioural state model is used to reflect the state of the scheduler whether it is idle active active but paused active but aborting or inactive SERVICE MATERIAL CAPACITY IN SERVICE USER SELECT EQUIPMENT SELECT Operational State Model Figure 3 39 Model 3 3 2 1 Transport Module Controller OBEM
122. Scheduler Screen 3 Using the Opacity options located in the lower left hand side of the screen allows the user to make the scheduler screen transparent so other screens behind the scheduler can be viewed 3 4 3 1 Scheduler Log The log displays the operations carried out by the system including tool and process recipes run and transfer operations To view the scheduler log 1 Access the scheduler as described in 3 4 3 Scheduler 2 A screen similar to the one shown below is displayed x Best aie 14 47 11 1129200 Tool Faris Parameter Te H IM 11 DHzEO 74 Tesi ru 1204 00 219 ol 11 909239 Teal xm 100 1 08 00 23 ul 11 0HzLOS Tic 1 04 00 228 11H EH ped 1 DH DOL SH lt Sab 11 14 TM cm 11 0HzLOS 27 Sab 11 04 iW aite baring Actes Server 1199 ae 11 04 Ie C TRE 11 04 AS ai 11 04 10 37 Toke 11 0 An abi F 119 Jon lend ob LoadJob 1 Caserta 1 7 11 58 10 25 ibat Lime lob acto 119 Mig 4 11 EH 11 985 C um Charged Sale JISHA 279 15 3 Recipe 1 08 45 2 3 ips elected 11 09 95 3 Ent 11 0H 45 90 Pobre Quum 11 04 x 1 CO 11 04 45 801 Funes ik 11 H z45 PIRCZ Suet s Jobber 19 45 51 Fig
123. Slot 4 Execution D elay s Unproc Log Direction Message Figure 3 65 Typical TMC Passthrough Enabled Tab 3 Select the enable passthrough mode check box Note The command and log options now become available at the bottom of the screen 4 Enter the required command in the command field and select the Send button 5 The sent command and the response are now shown in the log field Note For a comprehensive list of the system commands and setup procedures refer to the manufacturers literature supplied with the system Note Previously entered commands can be repeated by selecting the drop down box in the command field and selecting the required command 6 If you wish to resize the passthrough mode options 6 1 Move the mouse cursor to just above the Command text and it will turn into a horizontal bar with an up and down arrow attached to it 6 2 Press and hold the left mouse button and a larger horizontal line should appear Move the line up with the mouse to increase the passthrough mode options area drag it down to decrease Service Manual 3 60 Version 2 4 S TS Manual Control and Software Utilities AN SPP COMPANY 6 3 Release the Left mouse button to finish the resize operation STS Pro TMC 6 5 0 Enable Interface Enable Passthrough Mode Current Command None Execution Delay s Inactive Idle With Alarms Out OF Service Send Log Level Figure 3 66 TMC Screen
124. States The OBEM screen is accessed as detailed below Figure 3 40 Typical OBEM Screen 1 From the Task Bar double click the Transport Module Controller TMC icon TMC Icon Figure 3 41 Transport Module Controller TMC Icon 2 From the TMC select the Control tab 3 Select the required device tab Version 2 4 3 37 Service Manual Manual Control and Software Utilities lt S AN SPP COMPANY The following indicators are located on the control area Out OF Service em 2 Figure 3 42 OBEM Indicators In Service The tool is functioning correctly in its current active or idle state Out Of Service The tool is not functioning correctly in its current active or idle state Not Empty A substrate is present within the tool Empty There are no substrates present within the tool Behaviour Active Active Service tool is currently performing a command Stopping The user has requested a stop command and the tool is processing this command A stop command finishes the current operation but does not carry out any further operations within the process Aborting The user has requested an abort command and the tool is processing this command An abort command does not finish the current operation but halts immediately and does not carry out any further operations within the process Pausing The user has requested a pause command and the tool is processing this command Paused The tool has carried
125. Status Scheduler Run Time Progress ETA Status ToolJobAdmin Idle ToolJobAdmin2 Idle Opacity Process Abort 4 The manual control buttons perform the following operations Button Name v Description Process Recipe Abort Aborts the process recipe 3 4 3 5 4 Arm Tab Manual Control Version 2 4 To access the arm manual control option 3 77 Service Manual Manual Control and Software Utilities lt P T S AN SPP COMPANY 1 Access the arm manual control as described in 3 4 3 5 Scheduler Manual Control 2 A screen similar to the one shown below is displayed STS Pro Scheduler v6 5 0 scheduler 1 scheduler 2 2 PEG3 Cassette Cassette Arm tft E x x f Transfer Pump Vent Map Update Map Clear Alarms Abort Station OBEM State Service State Behaviour State Machine State Last Event Client State Job Flags ToolJobID Idle InService InitialisingBehaviour Cassette1 TRJobS 1 Idle InService InitialisingBehaviour Idle InService InitialisingBehaviour Idle InService InitialisingBehaviour Idle InService InitialisingBehaviour Idle InService InitialisingBehaviour ToolJobAdmin2 Log Mimic Options Alarms Tool Status scheduler 1 Status scheduler 2 Status Scheduler Run Time Progress ETA Status ToolJobAdmin Idle ToolJobAdmin2 Idle Opacity Figure 3 90 Typical Scheduler Manual Control Screen 3 The manual control buttons are located at the top of the screen as shown below scheduler 1 scheduler2 PEG2 PEGS Casse
126. This is achieved by keeping cumulative data on how long the machine is in the following states Production Standby Engineering Scheduled downtime Unscheduled downtime The above states and time spent in them is logged for the machine as a whole and for each process module Using the Data Viewer The data viewer provides users with a means of extracting analysing and viewing logged data according to user specified filters These filters are established by selecting logical combinations of any of the following categories substrate ID date time range process module transport module lot ID recipe name alarm fault etc Information is presented in a hierarchical fashion The user is initially presented with the lowest level of detail in the form of a summary On selection of particular items from the summary the user can drill down to gradually increasing level of detail To monitor device readings 3 40 Version 2 4 Manual Control and Software Utilities AN SPP COMPANY 1 From the Main view click the Datalog button then select on the Process Data View tab A window similar to the one shown in Figure 3 44 is displayed CP 088 STS Demo dE Process Runs Figure 3 44 Typical Manual view s Trace window 2 From the list on the right of the screen select the required parameters by date to display 9 To select the parameters to be displayed within the graph select the Pen Selection tab Viewer 1 PEG
127. a system Pump to Base procedure Using the chamber mimic page click on the Manifold Valve and choose Manual Mode Click on Disable Interlocks then click Open Click on the gas line s MFC and choose Manual Mode then click on Disable Interlocks Click Flow On and set the flow rate to 10096 of the MFC maximum Click on the gas line s Gas In valve and choose Manual Mode Click on Disable Interlocks then click Open Click on the gas line s Purge valve and choose Manual Mode Click on Disable Interlocks then click Open Wait for 30 seconds then click Close Click on the gas line s Gas Out valve and choose Manual Mode Click on Disable Interlocks then click Open Wait until the gas line s MFC reads 0 SCCM and the chamber reaches base pressure Click on the gas line s Gas Out valve and click Close Hepeat steps 18 to 21 a further four 4 times giving a total of five cycles minimum Using the chamber mimic page close all the gas line s valves Click on the gas line s MFC and click Flow Off Click on the Return To Automatic button Slowly open fully the hazardous gas wall source isolation valve Hepeat steps 3 to 26 for the remaining hazardous gas lines Leak up Rate Checks The purpose of the leak up rate checks is to confirm the vacuum integrity of the following Process chamber up to the HiVac valve Gas lines between the gasbox and the process chamber Gasbox manifold Gas line s Helium leak up rate 4 70 Version 2
128. afety P7 1 Actions in the Event of Fire or other Emergency e Service engineers operators must familiarise themselves with local procedures for raising and reacting to fire gas and any other alarms n particular location of alarm call points emergency exits and assembly points various alarm sounds and roll call procedures must be known Procedures for obtaining first aid assistance must be known All of the above apply to procedures during and out of normal working hours P7 2 Hazardous Conditions e Service engineers operators must be aware of and act accordingly to local conditions of high magnetic fields RF radiation laser radiation high or low temperature or humidity e Service engineers operators must be aware that substrate samples may be at elevated temperatures after processing e Service engineers operators must be aware that substrate samples may contain substances hazardous to health Preliminary P 12 Version 1 4 AN SPP COMPANY P7 3 Hazardous Locations oervice engineers operators must be aware of the following specific hazardous locations Description Hazard Label High voltages are present within the AC enclosure High voltages are present within the DC enclosure Hazard Location Inside AC Enclosure Inside DC Enclosure High Voltage Electronics Rack AC Distribution Panel High voltages are present within the electronic rack AC distribution panel Electronics Rack PLC Drawer
129. al Maintenance lt T lt AN SPP COMPANY 4 7 3 CPX VPX PDU Surge Arrester Check This check ensures that the surge arrester on the CPX VPX PDU if fitted is operating correctly 1 Visually check the surge arrester and replace as follows ourge arrester operative No replacement necessary ourge arrester on reserve Arrester must be replaced as soon as possible Surge arrester disconnected Arrester must be replaced immediately Figure 4 1 CPX VPX Surge Arrester Replacement Indicator 4 7 4 MPX LPX RCD Device Test This test ensures that the RCD device on the MPX LPX PDU if fitted is operating correctly Power on Chamber vented None None None Figure 4 2 MPX LPXRCD Device 2 Reset the RCD Service Manual 4 20 Version 2 4 lt P T S Maintenance AN SPP COMPANY 4 7 5 4 7 6 4 7 7 Version 2 4 MPX LPX PDU Surge Arrester Check This check ensures that the surge arresters on the MPX LPX PDU if fitted are operating correctly 1 Check the visual indicator and ensure that it is green If the indicator is red the device must be replaced immediately TRAB VALVETRAB E 350 ST VAL 350 6T VAL 350 Visual Indicator 9815 2859815 285981 Figure 4 3 MPX LPX Surge Arrester Electronics Rack Main Rotary Isolator This test ensures that the main rotary isolator on the electronics rack is operating correctly System State Shutdown and vented Equipment and Materials
130. al Configuration Editor 82 Service Manual 3 6 Version 2 4 Manual Control and Software Utilities SPTS AN SPP COMPANY 3 1 Introduction This chapter describes how to manually control individual system devices e g valves MFCs pumps etc and how to use the software utilities that enable troubleshooting of the system This chapter has been divided into the following sections Level Control e Service Information Utilities e Software Utilities Version 2 4 3 7 Service Manual Manual Control and Software Utilities lt S 3 2 Service Manual AN SPP COMPANY I O Level Control This option allows individual system devices to be operated manually System devices that can be operated from the manual mode include valves MFCs generators and pumps THE MANUAL I O MODE ALLOWS INTERLOCKS TO BE OVERIDDEN OPERATION BY UNTRAINED OR UNQUALIFIED PERSONNEL MAY LEAD TO INJURY AND DAMAGE TO THE EQUIPMENT To allow devices to be operated manually 1 From the Manual view select the Process Module tab 2 Select a device to be operated by selecting the device in the navigation panel 2009 1 863 0 CP0999 STS Demo crc w Navigation Panel Command Panel s Pump To Base 05 Dc eg Vee Last Leak Check ov 31 5 mTorr mn Reape Figure 3 1 Typical I O Options 3 A new tab appears on the command panel detailing the device being controlled
131. anifold in the gasbox Note Ensure that the leak checker and pipe does not introduce contamination 6 Turn on the leak checker When at vacuum manually turn on the backing pump keeping the HiVac valve closed to prevent back streaming 7 When the pump is at speed open the HiVac valve 8 Run the helium leak check When the leak check is completed turn off the pump remove the leak checker and return the system to its original state 4 72 Version 2 4 S P T S Maintenance AN SPP COMPANY 4 10 3 Replacing a Damaged l O Slice This procedure should be followed to replace an identified unserviceable I O Details of the location and wiring of individual slices can be found in Chapter 2 of this manual THIS PROCEDURE CAN LEAD TO DAMAGE TO EQUIPMENT AND POSSIBLE INJURY TO PERSONNEL IF NOT CARRIED OUT CORRECTLY THIS PROCEDURE MUST ONLY BE CARRIED OUT BY SPTS SERVICE PERSONNEL IF IN ANY DOUBT ABOUT THIS PROCEDURE CONTACT SPTS FOR ADVICE ENSURE THE EQUIPMENT IS POWERED DOWN BEFORE CARRYING OUT THIS PROCEDURE REMOVING A SLICE WITH THE SYSTEM POWERED UP WILL CAUSE THE CONTROL SYSTEM TO FAIL RESULTING IN POSSIBLE SYSTEM DAMAGE AND OR INJURY TO PERSONNEL In order to replace a damaged slice the following equipment is required e Terminal screwdriver 1 Identify the I O slice to be replaced and ensure that a replacement slice is readily available 2 Using a terminal screwdriver remove the wiring from the slice by inserting the
132. applications this procedure is included as a guide ONLY and must be reviewed by each customer s process engineers for suitability to their particular applications The purpose of this procedure is to check the vacuum integrity of the system e Hazardous gas lines from the gasbox gas out valve to the process chamber e Process chamber s e Associated vacuum pumping lines to the fore line valves TO PREVENT RISK OF INJURY THE HELIUM LEAK CHECK MUST BE UNDERTAKEN BY TECHNICALLY QUALIFIED PERSONNEL WHO ARE FULLY AWARE OF ALL RELEVANT SAFETY PRECAUTIONS ASSOCIATED WITH PROCESSING OPERATING AND MAINTAINING THE EQUIPMENT IN ADDITION SUCH PERSONS MUST BE CAPABLE OF OPERATING AND PROGRAMMING SPTS SOFTWARE TO PREVENT LEAKAGE OF POTENTIALLY HAZARDOUS GASES AND SUBJECT TO GUIDANCE FROM THE SYSTEM PROCESS ENGINEER STEPS 1 AND 2 OF HELIUM LEAK CHECK MUST BE UNDERTAKEN PRIOR TO BREAKING INTO ANY PART OF THE VACUUM SYSTEM 1 Review the Guide to a Safe Way To Work BEFORE PERFORMING A HELIUM LEAK CHECK VERIFY THE STATUS OF THE CHAMBER WITH THE SYSTEM S PROCESS ENGINEER SEEK GUIDANCE ON THE APPROPRIATE CHAMBER CLEANING PROCESS TO RUN 2 Run an appropriate chemical clean process 3 To flush any remaining helium from the system purge the system with 100 sccm of nitrogen or argon for 15 minutes by writing a recipe that flows gas for this time with no plasma Vent the chamber Attach a leak checker to the leak check port on the mixed gas m
133. ar charred If such indications are visible do not touch the seals or the installation Report the incident to your safety officer who should arrange to decontaminate the area DO NOT TOUCH ANYTHING IN THE VICINITY OF THE DECOMPOSED MATERIAL UNTIL IT HAS BEEN DECONTAMINATED Note There is no such hazard for natural rubber Nitrile seals IPA IPA Isopropyl Alcohol is used for cleaning purposes oafe handling data applicable to Isopropyl Alcohol is as follows Manufacturer Microchem Systems Ltd Physical Data Boiling point 82 83 Specific gravity 0 785 0 786 H2O 1 Vapour pressure 4100 Pa Solubility in water Completely miscible in water at 20 Evaporation rate 1 5 Fire And Explosive Hazard Data Highly Flammable Flash point 12 Extinguishing medium Alcohol resistant foam water spray or fog Dry chemical powder carbon dioxide sand or earth may be used for small fires only Do NOT use water in jet opecial fire fighting procedures Keep adjacent containers cool by spraying with water P 15 Preliminary Preliminary SPIS AN SPP COMPANY Unusual fire and explosive hazards Hazardous combustion products may include carbon monoxide The vapour is heavier than air spreads along the ground and distant ignition is possible Health Hazard Data okin Wash skin with water using soap if available If persistent irritation occurs obtain medical attention Eyes Flush eye with water Obtain i
134. ard Logix Controller Devicenet Power Supply 555 Logix Controller Ethernet Card Figure 2 17 PLC and Associated Equipment The Control Logix 5555 PLC communicates with the cards located in the chassis via a backplane which allows fast communication between the modules With multiple communication interface modules on the backplane a message can be sent across the link into a port on one module and be routed from there across the backplane out from another module s port and across another link to its ultimate destination Further information relating to the PLC can be found in the manufacturer s literature 2 2 3 1 Power Supply Provides1 2V 3 3V 5V and 24V DC power directly to the chassis backplane Incoming power to the unit is supplied from CB 3 on the 24V distribution board located in the same drawer as the PLC Version 2 4 2 15 Service Manual Control System and Power System Distribution SPIS AN SPP COMPANY 2 2 3 2 Control logix 5555 Processor The control Logix controller provides the logic control for the system The following indicators and controls are located on the front panel Logix 5555 RUN n FoRcE L Rs232 RUM PROG Figure 2 18 Control Logix 5555 PLC front Panel Steady Green LED Processor is operating correctly Steady Green LED is operating correctly Green LED Flashing IO fault Devices within the chassis do not match those ide
135. are parameter and is DeviceNet controlled using node 9 The flow rate is monitored by means of a flow switch located within the RF enclosure The controls and indicators differ depending on the type of manufacturer For full details please refer to the OEM documentation Note The chiller is water cooled and are therefore connected to the house water supply Figure 1 26 Example Heater Chiller Heating System Electrical heaters in the form of insert cartridges and or cable heaters are located in the lower chamber and the heated lid to keep plasma facing surfaces at predefined temperatures typically gt 100 C but lt 130 C The heaters are controlled by the MLC9000 temperature controller via the DeviceNet control loop Service Manual 1 30 Version 2 4 SPTS Introduction AN SPP COMPANY 1 7 System Pneumatics Compressed air is supplied at approximately 6 bar to the system via the rear service panel The compressed air is supplied to the compressed air backup unit which supplies the gasbox APC valve and chamber A schematic of the system is as shown below COMPRESSED AIR IN NON RETURN VALVE GASBOX APC CHAMBER GASBOX VALVE CHAMBER VALVE ISLAND ISLAND ELECTRODE LIFT FORELINE ISOLATION PROCESS GASES CAPMAN ISOLATION VENT GAS BYPASS PUMPING SUBSTRATE LIFT HBC PLATEN Figure 1 27 System Pneumatics Version 2 4 1 31 Service Manual Introduction S lt AN SPP COMPANY 1 7 1 Gasbox Val
136. are connected to the gasbox Gas lines are connected to the customer s supply Perform a system Pump to Base procedure Using the chamber mimic page click on the Manifold Valve and choose Manual Mode Click on Disable Interlocks then click Open Click on the hazardous gas line s Gas Out valve and choose Manual Mode Click on Disable Interlocks then click Open Click on the hazardous gas line s MFC and choose Manual Mode then click on Disable Interlocks Click Flow On and set the flow rate to 10096 of the MFC maximum Click on the Purge valve and choose Manual Mode Click on Disable Interlocks then click Open Note Ensure that the MFC displays a flow rate and that the flow rate starts to fall This will prove that the MFC is connected and is allowing gas to flow The system will now start to pump out the purge gas line to the wall source isolation valve Wait until the hazardous gas line s MFC reads 0 SCCM and the chamber reaches base pressure Note If the chamber has not reached base pressure after 30 minutes investigate the gas line for a leak Click on the Purge valve and click Close Slowly open fully the nitrogen purge gas wall source isolation valve Leave the valve open for 30 seconds then close it Click on the Purge valve and click Open The system will now start to pump out the purge gas line to the wall source isolation valve Wait until the gas line s MFC reads 0 SCCM and the chamber reaches base pre
137. ated on the system depending on the configuration Fast Matching Unit The fast matching unit is an optional system addition which allows faster matching times and aids in allowing faster switching times Not ICP Platen RF Generator Control of the platen RF generator for systems using high DC bias Signal Tower oignal tower used to indicate the system s state MPX LPX only 17 Twin ENI systems only This section details the nodes individually and their components More detailed information including Devicenet and buffer addresses can be found within the drawings supplied with the system The following nodes use Beckhoff I O Terminals Node 01 e Node 04 e Node 07 I O Types Details of the currently used Beckhoff I O and their connection details are as follows KL1114 KL1194 Digital Input 24V The KL1194 KL1114 digital input terminals acquire the binary control signals from the process level and transmit them in an electrically isolated form to the higher level automation unit The bus terminals contain four channels that indicate their signal state by means of light emitting diodes KL1114 4 CHANNEL DIGITAL INPUT 24V KL1194 4 CHANNEL DIGITAL INPUT 24V WTH SENSORS SWITCHING TO OV LED in LED3 OLED 1 1 2 24V 24V ov O 0V IN3 O
138. ators The node is located in the same drawer as the PLC underneath the electronics rack operator station Figure 2 21 Node 01 Pumping and Generator The following I O is located within the bus terminal 1 Digital Out KL2114 1 Watchdog Output Scrubber if fitted NENNEN EPD Etch Step if fitted 2 Digital In KL1194 HF Interlock is OK Pump Not in Warning Pump Not in Alarm Endpoint if fitted 3 Digital In KL1114 Watchdog Timer is OK 2 Backing Pump is Running 3 Pump Purge is OK 4 User Gas Interlock 4 Digital Out Relay KL2612 1 Backing Pump is On PT ee 5 Digital Out Relay KL2612 1 Platen RF1 RF ON Beso roneor Version 2 4 2 21 Service Manual Control System and Power System Distribution Service Manual Slice I O Type Card Type SPTS AN SPP COMPANY Description ne Out Relay KL2612 Platen RF2 RF a Platen RF2 Pulse ON Digital Out Relay KL2612 Digital In KL1124 2 4 i Analogue Out KL4004 Analogue In KL3064 i Analogue In KL3064 Digital Out Pulse KL2502 width aedibus CO Electromagnet Power Supply 1 Shutdown Electromagnet Power Supply 2 Shutdown Electromagnet Power Supply 1 CC Status Electromagnet Power Supply 2 CC Status opare opare Platen RF1 Demand Platen RF2 Demand Electromagnet Power Supply 1 Current Demand Electromagnet Power Supply 2 Current Demand Platen RF1 Forward Power Platen RF1 Reflected Power Plate
139. available a red LED becomes visible Steady Green LED Indicates the Devicenet Card is communicating correctly with the system Nodes OK Steady Green LED Indicates the Devicenet card is operating correctly Note one or all of the Modnet IO or OK LEDs is red then a fault condition has occurred The LED display will indicate the particular fault that has occurred During a fault condition the LED indicator will display a fault code indicating the location of the fault by node number and a fault code A list of possible fault codes is given below if you are in any doubt of the meaning of the fault please contact SPTS immediately Normal operation The Normal operation no action required indicator displays the modules node address on the Devicenet network 70 Module failed duplicate Change the node address node address check Version 2 4 2 17 Service Manual Control System and Power System Distribution Service Manual Illegal data in scan list Reconfigure the scan list table and table remove the illegal data Slave device has stopped communicating The node number also flashes Device s identity does not match electronic key in scan list table entry The node number also flashes Data overrun at port detected No direct network traffic for module detected Data size expected by the device does not match scan list size The node number also flashes Slave device in scan list table does not exist The node n
140. b displays statistical data about the selected device 3 2 11 RF Switching Manual Control This option allows the user to manually select the RF switching modes between high and low frequency platen only suomne1ad enuey Platen HF Platen LF 4 e a Disable Interlocks Figure 3 29 Typical RF Relay Manual Control Screen To allow the RF switching to be operated manually 1 From the Manual view select the Process Module tab 2 From the mimic screen select the RF relay i 5 Select the manual mode control button 4 Select whether interlocks are to be enabled or disabled The following options are activated using the buttons on the command panel Button Name Platen LF Allows the low frequency RF generator to supply power to the lower electrode Platen HF Allows high low frequency RF generator to supply power to the lower electrode Service Manual 3 28 Version 2 4 S PTS Manual Control and Software Utilities AN SPP COMPANY 3 2 12 Version 2 4 Pump Manual Control This option allows the user to manually operate the selected pump eseg Pump Starts SUELE Pump Run Hours BIUBUSIUIEIA Pump Faults suonesado Boel J gt U Figure 3 30 Typical Pump Manual Control Screen To allow the pump to be operated manually 1 From the Manual view select the Process Module tab 2 From the mimic screen select the required pump CD
141. boundaries of the gas risk area 2 On hearing the gas leak alarm if you are in the gas risk area leave the gas risk area by the nearest exit Remain out of the gas risk area until it is safe to return After a gas leak alarm be ready to carry out a full building evacuation if the fire alarm is subsequently activated In this event follow normal fire procedures Discovering a Gas Leak 1 If the alarm has not already been activated by an automatic gas leak detection system sound the gas alarm Leave the gas risk area by the nearest exit Go to the designated assembly point and provide the incident personnel with as much information as you can regarding the location and type of leak Treatment of Exhaust Gases It is the customer s responsibility to ensure exhaust gases from the backing pump abated in a manner that conforms to national and or local environmental and safety regulations The following information is for guidance only There are three techniques for the treatment of harmful gases Where more than one option is available the choice of technique should be that which minimises overall environmental impact 1 Incineration Oxidation Most flammable gases can be readily oxidised either by passing them into a separately fuelled flame or in some instances by passing them into a suitable oxidising chemical reagent solid or liquid The properties of the resultant oxidised material which may be gaseous liquid or s
142. c MUN heater control Valve Island Platen Chiller Chamber gauges Interlocks venting and status monitoring 05 VAT Valve Control Combined APC gate valve control Gasbox pneumatic control Lower electrode chiller control 0 Source Chiller Upper electrode chiller control 1 22 Version 2 4 SPTS Introduction AN SPP COMPANY 1 4 4 1 Optional Nodes The following nodes may be located on the system depending on the configuration Node Description Number Fast Matching Unit The fast matching unit is an optional system addition which allows faster matching times and aids in allowing faster switching times Version 2 4 1 23 Service Manual Introduction AN SPP COMPANY 1 4 5 I O Bus Terminals Each of the system nodes consists of an I O pod a valve island or a Beckhoff fieldbus DeviceNet interfaced bus terminal Each bus terminal consists of the following Bus Coupler O Slices End Terminal Terminator we ms 21 EE 18 ECC Mi EN if E i i m c8 marinus aa no CES mo Pix j b Ra nisi Tz A VM oki T m it NI a m A X 1 1 t E T 7 4 A N D Figure 1 17 Example Bus Terminal 1 4 5 1 Bus Coupler Each bus terminal or node contains a bus coupler as shown below Power LEDs Fieldbus Connection Bus Coupler Supply
143. ce MVI card may be fitted to provide a serial interface between the PLC and an EPD system and or the handling system MPX only Version 2 4 1 21 Service Manual Introduction 1 4 4 Service Manual System Nodes AN SPP COMPANY The control PLC controls I O located in a number of nodes situated around the system linked by a DeviceNet connection The location and description of the nodes is as shown below PRO2 ELECTRONICS RACK REF ED320057 EF ED320055 NOTE TERMINATING RESISTOR IS FITTED INTERNALLY NODE 0 PLC NODE 1 E RACK 1 0 SOURCE RF PSU D NET CABLED Y d DEVICENET Figure 1 16 22 CL320950 in REF Ens REF MINI ED320565 MAXI ED320615 105 0CL320950 G 0 DEVICENET D NET CABLED Y NODE 7 GASBOX 1 0 NODE 8 GASBOX VLV ISLAND DEVICENET VALVE 104 CL320951 DEVICENET 58 CL320912 DEVICENET 106 CL320950 REF ED320065 D NET TEE OUT D NET TERMINATING RESISTOR NODE 3 HEATER CTRL NODE 4 CHAMBER 1 0 NODE 16 FAST M U ICP Node Layout Schematic PLATEN CHILLER 1 L Node Description Number Lo RUN and lower electrode generator control 02 Source Generator Generator electrode RF generator electrode RF generator M 1 Heater Controller io
144. ch to the same settings as the removed bus coupler Secondary Address Switch Figure 4 37 Bus Coupler Secondary Address Switch Replace the Devicenet connection Using a terminal screwdriver replace the power connections to the bus coupler by inserting the screwdriver into the square hole above the cables and releasing the wire grip by levering the screwdriver towards the socket containing the wiring Insert the 4 76 Version 2 4 S P T S Maintenance AN SPP COMPANY 4 10 5 Version 2 4 wires and release the wire grip Gently pull the wires to ensure the wire grip is holding them firmly in position i om n AA AS a E 1 zi AIA AM AIA AA Figure 4 38 Replacing the Power Connections Replacing the MLC 9000 Heater Controller This procedure should be followed to replace a damaged MLC 9000 heater controller THIS PROCEDURE CAN LEAD TO DAMAGE TO EQUIPMENT AND POSSIBLE INJURY TO PERSONNEL IF NOT CARRIED OUT CORRECTLY THIS PROCEDURE MUST ONLY BE CARRIED OUT BY SPTS SERVICE PERSONNEL IF IN ANY DOUBT ABOUT THIS PROCEDURE CONTACT SPTS DIRECT FOR ADVICE Each system uses a heater configuration recipe file that is pre installed during system build When changing the MLC9000 controller a replacement file is required Please contact SPTS for further information In order to replace the heater controller the following equipment and software
145. creen Bullen Name _ _ Startup Starts the system to allow manual control to be used Resets the system in the event of a system failure Out Service Takes the selected system out of service for example if maintenance work is required to be carried out Returns the selected system to an in service mode Aborts the current operation Pause Pauses the current operation This option is dynamic and the Pause button will change to a resume button to resume the operation if the pause function is activated Note Once the required buttons have been selected the system state can be viewed in the ARAMS indicators 5 The Transfer tab located on the right of the screen allows substrates to be moved through the system Service Manual 3 44 Version 2 4 S TS Manual Control and Software Utilities AN SPP COMPANY The following options are available Align Selects the aligning options Never Will never send the substrate to the aligner during a transfer operation If required Will send the substrate to the aligner if the system detects the substrate has not previously been aligned Always Will always align the substrate irrespective of whether the substrate has been aligned previously Source Station Select the destination from which the substrate is to be collected from for example cassette 1 Source Slot select the slot from which the substrate is to be collected from if available For example a cassett
146. cuit e Handling System e Handling System Pumping e CTC Cabinet e Core Chiller e Process Module Backing Pump optional Tr TP Zr Figure 3 3 PDU Typical Arrangement Mee 200V System 400V System Funcion _ Version 2 4 2 39 Service Manual Control System and Power System Distribution lt P TS AN SPP COMPANY CB13 16 Amp 10 Amp Core Pump 1 CB14 16 Amp 10 Amp Core Pump 2 CB15 20 Amp 20 Amp Transport Module Power CB16 10 Amp 10 Amp CTC Cabinet Power 2 3 2 Electronics Rack Power Distribution System Three phase AC power is supplied to the electronics rack either directly or via a PDU Power distribution to the process module is via a distribution panel located on the electronics rack front panel as shown below SAFETY SUPPL CHO MUST BE CS Il Bb 5 Q Eg es iv 1 H 4 Psu gt PFZ U POWER STREP 8 J 5 ADLOCK 2 5 FUME 9 3 1 5 p CM Th S 5 gt Figure 2 1 Electronics Rack Power Distribution Panel 2 3 3 AC Distribution Three phase power is fed directly to the system components and converted into single phase and 24V as required by the individual components of the system The following table provides details of the power distribution system including components and their function 80 Amp 56 80 Amp Machine Mains Rotary Isolator 10 Amp
147. d 9NIHOf1OH ONIIGNVH OL TANVd JOYIS MU 991 ONIHSf1OS SH38INVHO g 9H NOIL V IOSI JNIT3HOJ O N P 3oufnd ZN WAN NI XL lt NINOOHV 9 1 hk 93W X Z seo 4 93W o zN gt X E MET H Hx Q zN gt X A a KY OAW Lx LOVYLXA XO8SV9 1 S SASVS Q3xXIIN HJTIOHINOO JHnssad WaN DK ow N2 ANTI CONDENSATION PURGE WALSAS ONIIONVH ALVS H3JSNVMHL SX JYAHdSOWLY OL JNIT3HOJ PINE JH SOTON3 OVAH 2dV S 390415313 YSAENVHO 3 04 O N HOLIMS WANODYA HOLIMS AYAHdSOWLV 33r 138 380SS38d H3AO OVAH O N NVINdVO SSdO0O0Hd ASNVS ONIHSNOY Vacuum Schematic Figure 1 31 Service Manual 1 35 Version 2 4 Introduction S lt AN SPP COMPANY 1 9 Service Connection Overview The following services are fed to the system through the rear services panel located at the front of the process module below the substrate lift e Compressed air in Nitrogen supply in e Helium backside cooling supply in House water and DI water optional are supplied through the four channel flow manifold located at
148. d terminal located on it which identifies the end of the bus terminal to the PLC 1 4 6 Valve Islands There are two PLC controlled valve islands located on the system used to operate the various pneumatic valves on the system They are SMC SV1000 valve island is located below the process module and is used to control the process module pneumatically actuated valves e Norgren L5L valve island is located in the gasbox and is used to control the gasbox pneumatically actuated valves Version 2 4 1 25 Service Manual Introduction S D T S AN SPP COMPANY 1 4 6 1 SMC Valve Island The SMC SV1000 valve island is operated via a parallel cable connected to the chamber I O block located in the DC enclosure www Bene 1 Figure 1 20 SMC Valve Island The SMC valve island controls the following devices e Platen Lift e Substrate Lift e Roughing Bypass Valve e Foreline Isolation Valve e Capacitance Manometer Isolation Valve e Helium Backside Cooling Isolation Valve 1 4 6 2 Norgren Valve Island The Norgren L5L valve island is connected directly to DeviceNet through a DeviceNet CDN127 cable i 3 Figure 1 21 Norgren Valve Island The actual configuration of the devices that the Norgren valve island controls is dependant upon the process module fitted therefore reference must be made to the system specific gas schematics for precise details A general list of controlled functions is sho
149. d with Coolant Flow Switch 1 Interlocked with Loolant Flow Switch 2 Interlocked with Electromagnet Hinne Cnnlant Flaw pasulj Interlocked with coolant Flow Switch 4 Interlocked with MU Antenna Gnnlant Flaw interlocked with Flaten Loolant Interlocked with coolant Flow Switch 7 Interlocked with coolant Flow Switch Figure 3 15 Typical Heater Zone Interlocks Override Screen Version 2 4 3 17 Service Manual Manual Control and Software Utilities lt PTS 3 2 5 2 Service Manual AN SPP COMPANY 9 Select which interlocks are to be overridden using the checkboxes Note Selecting the enable all interlocks button will deselect all the check boxes The following interlocks can be overridden using the check boxes on the command panel Checkbox Name Temperature Allows the heaters to drive the temperature above the limit as defined within above safe limit the configuration editor without raising an interlock Temperature Allows the temperature to drop below the limit as defined within the below safe limit configuration editor without rasing an interlock Temperature Allows the heaters to be run when the temperature controller detects the above controller heaters are overange as defined by the flags set within the heater overange controller Temperature Allows the heaters to be run when the temperature controller detects the below con
150. displayed in this chapter MUST be read and understood prior to operating maintaining or repairing the equipment Owing in most part to SPP Process Technology Systems UK Limited equipment being used by customers for their own unique applications the information contained in this section is included as a guide ONLY lt is recommended that ALL subsequent information contained in this chapter be used in conjunction with the customers national local and in house safety procedures and policies NO liability can be accepted for any inaccuracies or omissions in this publication although every possible care has been taken to make it as complete and accurate as possible and represent the minimum safety precautions to be taken This chapter also contains guidance about additional health and safety procedures applicable to the equipment and its uses SPP Process Technology Systems UK Limited does not accept liability for any by products resulting from the customer s application Responsibilities It is the responsibility of the service engineer operator to be aware of e his document Their responsibilities and that they are provided with adequate resources to carry out their job whilst complying with all health and safety requirements It is the responsibility of the service engineer operator to comply with these procedures and with all local health and safety legislation P 10 Version 1 4 SPIS AN SPP COMPANY P6 2 Version 1 4
151. down the turbo pump typically for 1 or 2 seconds before commencing chamber roughing Service Manual 1 28 Version 2 4 SPTS Introduction AN SPP COMPANY 1 6 Cooling and Heating Systems Three heating cooling systems are present within the system as shown below House Water Cooling for the heated lid turbo pump and coil HF generator DI Water HTF Cooling for the lower electrode fed from a chiller Cartridge Cable Heaters Heating for the chamber block and heated lid Heating is provided by a number of cartridge insert and or cable heaters 1 6 1 Cooling System House water is supplied through the service panel located at the front of the process module below the lift House water for the coil HF spectrum generator is fed directly to the generator in the electronics rack DI water heat transfer fluid HTF is fed directly to the lower electrode located beneath the source assembly A schematic of the system is as shown below HEATED LID LOWER ELECTRODE CHANNEL 1 CHANNEL 3 1 4 3 4 I RF ENCLOSURE DI WATER HTF FROM CHILLER HOUSE WATER Figure 1 25 System Coolant Schematic Version 2 4 1 29 Service Manual Introduction 1 6 1 1 1 6 2 SPTS AN SPP COMPANY Chillers Lower electrode temperature control is achieved by a stand alone chiller operating in a closed loop system feeding directly to the RF enclosure The temperature is set as a softw
152. duler 1 Status scheduler 2 Status Scheduler Run Time Progress ETA Figure 3 83 Typical Scheduler Screen d The manual control options are accessed by using the scheduler TMC and chamber tabs located at the top of the screen 3 4 3 5 1 Scheduler Tab Manual Control To access the scheduler manual control option 1 Access the scheduler manual control as described in 3 4 3 5 Scheduler Manual Control 2 A screen similar to the one shown below is displayed STS Pro Scheduler v6 5 0 scheduler 1 scheduler 2 PEG2 PEG3 Cassette Cassette2 Rescue Finist Abort Reset Scheduler Station OBEM State Service State Behaviour State Machine State Last Event Client State Job Flags ToolJobID Idle Inservice InitialisingBehaviour Cassette1 TRJobs InService InitialisingBehaviour Cassette2 TRJobs Cassette 1 InService InitialisingBehaviour RobotArm TRJobS Cassette 2 InService InitialisingBehaviour i PMC2 PRJobAdmin InService InitialisingBehaviour PMC3 PRJobAdmin InService InitialisingBehaviour ToolJobAdmin ToolJobAdmin2 Log Mimic Options Alarms Tool Status scheduler 1 Status scheduler 2 Status Scheduler Run Time Progress ETA ToolJobAdmin ToolJobAdmin2 Opacity Figure 3 84 Typical Scheduler Manual Control Screen Service Manual 3 74 Version 2 4 S TS Manual Control and Software Utilities AN SPP COMPANY 3
153. e 0 valide Trua Vasterror n amas oparationInit kaye PMC PRIOhAdeIn zPu ip noperatianrnitance 4 values valids True lagtarr re f names Tolerance Linker keys PMC PR3DbAndmin ZPu sp nTolinstance 5 values 0 valide True lasterrore gt accesspath accezzpathe n mas DperationType keys PRIJOhAdmIn noperationType 6 valuss valide Truae lagterrore names perationinsr keys PR Pha3pbAnmin sp noperarioninsrance 6 values 0 valide True lasterrore f names Tolerance Linker keys PMC PRIJOhAdmIn sPu p nTo lrnitance 6 values valides True laitarr re f names aperationType keys PROC iu sp noperationtype values valides True Vasterrore j keys PMC PRIObAdmvin FPU pp noperarioninitance 7 valuss valide Trua lagterraore gt acceszparhe names Tolerance Linker keys PMC PR3DbAndmin SPu sp nTolinstance z values 0 valide True lasterrore accaiipathe 2 n mas operationTypa keys PMC PRIJOhAdmin SPU ip noperationType H values valide Trua lagterrare accesspathw names aperationinzt keys PM PR3DbAndmin n perartioninstance B value 0 valid True lazterror PMC PRIJ hAdzin sPu p rnTOllhitance H
154. e but that a defective unit is exchanged for a new one and the defective unit returned to SPTS for repair SPTS provides extensive and comprehensive on going support to every customer world wide both during and beyond the warranty period Full details of how we can help with your service requirements please contact the SPTS Service Department 4 6 Version 2 4 lt P T S Maintenance AN SPP COMPANY 4 2 4 2 1 4 2 2 4 2 3 4 2 4 4 2 5 Version 2 4 Safety Before any maintenance procedure takes place it is imperative that the service engineer read and understand the Preliminary section of this manual Ensuring the Tool is in a Safe State for Maintenance It is particularly important to remove as far as possible traces of hazardous gases from the system prior to physically dismantling any part of the machine in which such gases are present This is achieved by ensuring the system is thoroughly pumped out by following the gas line decommissioning procedure detailed in 4 10 1 1 Ensure that the system is at a safe temperature to work on by setting all heaters to 209C and waiting until this temperature is reached before system shutdown Before undertaking any electrical maintenance ensure that the electrical lock off procedure detailed in the preliminary section is followed ON MPX MACS SYSTEMS A UPS DEVICE WILL CONTINUE TO SUPPLY POWER TO THE FOLLOWING AREAS EVEN AFTER THE MAIN BREAKER IS OFF LOADLOCK PC
155. e a cassette is loaded and a map is carried out as described in 3 4 1 3 TMC Manual Control Cassettes Tabs Select Current Details Populate All Clear All Present O Aligned Substrate Size 2mm Substrate State Unprocessed X Apply Location Figure 3 63 Typical TMC Substrate Options 1 Select the Populate All button 3 4 1 8 4 Deleting All Substrates From All Locations This option allows the user to delete all the substrates from the available slots in all locations Select Current Details Populate All Clear All Present Aligned Substrate Size 2 rmm m Location Substrate State Unprocessed Apply Figure 3 64 Typical TMC Substrate Options 1 Select the Clear All button Version 2 4 3 59 Service Manual Manual Control and Software Utilities lt TS AN SPP COMPANY 3 4 1 9 Passthrough Mode The passthrough mode allows the user to send commands directly to the robot arm cassettes and the SMIFs if fitted for trouble shooting and maintenance procedures To enable the passthrough mode 1 Access the manual control software as detailed in 3 4 1 Manual Control Software CPX VPX Only 2 From the TMC control screen select the required cassette SMIF or robot tab STS Pro TMC v6 5 0 Overall Robot Cassette 1 Cassette 2 Core Pumping v Enable Interface Enable Passthrough Mode O Log Comms Traffic Out OF Command Service
156. e and discard the O ring from the carrier then clean the carrier using IPA Fit new O ring to the carrier then reassemble the chamber pressure switch assembly 9r X s C9 Refit the assembly to the chamber using screws 1 and washers 2 Figure 4 16 Vacuum Switch Assembly Service Manual 4 40 Version 2 4 lt P T S Maintenance AN SPP COMPANY 4 8 12 Version 2 4 ESC Electrode O Ring Option Issue 1 0 Date April 2007 The ESC electrode assembly contains six O rings used to seal in various locations within the assembly The O rings fitted may be made from either Viton amp or FFKM This procedure assumes that Viton rings have been fitted however where FFKM O rings are used then only O ring 13 needs to be replaced as all other O rings are deemed change on fail parts System State Shutdown and vented Equipment and Materials Standard tool kit Parts Required ESC electrode O rings Associated Procedures Safety section in the preliminary Chamber leak up rate To change the O rings 1 Refer to Figure 4 17 2 Shut all valves and drain all coolant from the electrode assembly 9 Remove the following connections from the base of the electrode assembly e HF e Platen coolant e Substrate lift e Anti condensation e TD ESC high voltage Hemove six M5 x 60 screws 1 then remove platen shield 2 Remove platen upper isolator 3 6 Remove and discard O ring 4 CAUTION The T
157. e will have a slot range of 1 25 where the robot arm will only have one slot or position Substrate ID Enter the substrate id if required Destn Station Select the destination to which the substrate is to be delivered to for example cassette 1 Destn Slot Select the slot from which the substrate is to be delivered to if available For example a cassette will have a slot range of 1 25 where the robot arm will only have one slot or position Arm oelect which robot arm is to be used for the transfer NI rrr operations are normally used for handling trials 6 Select the Execute button to begin the transfer T The Swap tab located on the right of the screen allows substrates to be moved through the system Note Only used on systems with bisymmetrical arms The following options are available Select the station in which the swap will occur for example cassette 1 Pick from Slot Select the slot from which the substrate is to be collected For example a cassette will have a slot range of 1 25 whereas the robot arm will only have one slot or position Using Arm Select which robot arm is to be used for the pick operation and which is to be used for the place operation Place to Slot oelect the slot to which the substrate is to be delivered For example a cassette will have a slot range of 1 25 whereas the robot arm will only have one slot or position 8 select the Execute button to begin the swap Versio
158. ecked For each test click on the relevant interlock symbol RF or Gas and check that the appropriate warning message appears in the command panel Gas Interlock HF Interlock Figure 4 4 RF and Gas Interlocks Watchdog Timer is OK Remove input one from node one slice three and check the RF and gas interlocks Backing Pump Purge OK Close the backing pump purge valve and check the gas interlock Backing Pump is Running owitch off the backing pump and check the gas interlock Service Manual 4 22 Version 2 4 S P T S Maintenance AN SPP COMPANY User Gas Interlock Remove the shorting plug or operate the user interlock e g on the scrubber and check the gas interlock Over pressure Vacuum switch Remove the D type connector from the overpressure switch and check the gas interlock Transfer Gate Open Manually open the loadlock transfer gate and check the gas interlock Hinge Coil Enclosure ICP Only Remove the source enclosure and check the RF interlock Replace the cover and deactivate the hinge switch then check the RF interlock Coil Matching Unit Remove the cover of the matching unit and check the RF interlock Platen Matching Unit Remove the platen matching unit cover and the lower RF enclosure cover and check the RF interlock RF Enclosure Hemove the matching unit cover and check the RF interlock 4 7 10 Foreline Leak up Rate Test This test checks the foreline leak up rate System State Pumped to base
159. ed to process height and the substrate is clamped to the substrate platen by electrostatic attraction weighted clamp The helium backside cooling HBC circuit then applies helium to the rear of the substrate at a pre defined pressure before the flow of process gases is started After a user defined period for gas stabilisation the R F comes on to start substrate processing Processing continues until either the pre set R F excitation time is reached or the end point detection EPD system detects a finishing point The flow of process gases stops the helium backside cooling is switched off and pumped out and the clamping is removed The substrate platen is lowered and the process chamber is pumped down to base pressure Version 2 4 1 9 Service Manual Introduction S P T S AN SPP COMPANY 1 3 Process Module The process module assembly is shown in Figure 1 5 Its principal functional components are e Source Assembly e Gasbox Lower Chamber e Electrode Assembly e External Components not shown Gasbox Source Assembly gt Lower Chamber ll cmo mM di Electrode Assembly Figure 1 5 Process Module Assembly Service Manual 1 10 Version 2 4 SPTS Introduction AN SPP COMPANY 1 3 1 1 3 1 1 1 3 1 2 1 3 2 1 3 3 Version 2 4 Source Assembly The source assembly consists of a plasma source enclosure and a coil matching unit Under PLC control process
160. ellows assembly through the process chamber and place it on a clean flat surface The chamber base plate assembly is now exposed inside the chamber Refer to Figure 4 21 Remove and discard ring 1 from the chamber base plate assembly Clean the O ring groove with IPA and fit new O ring Refer to Figure 4 20 Hemove six M4 x 10 screws 2 securing the bellows 3 to the bottom plate adaptor 4 Separate the bottom plate adaptor and remove and discard O rings 8 9 and 10 x 2 Hemove six 4 x 10 screws 11 that secure the bellows 3 to the electrode base stem 7 Remove and discard ring 12 Clean groove with IPA and fit new ring Replace the six M4 x 10 screws 11 securing the bellows to the electrode base stem Clean O ring grooves with IPA and re fit O rings 10 x 2 using ample vacuum grease Clean O ring grooves with IPA and re fit O rings 8 and 9 Fit split ring 6 to electrode base stem 7 CAUTION The electrode lift bellows assembly is extremely fragile take great care 47 48 49 when fitting the assembly Carefully fit the electrode lift bellows assembly to the chamber base plate assembly using eight M5 x 25 screws 1 Refit three M4 x 12 screws 5 Refer to Figure 4 19 CAUTION The electrode assembly is extremely fragile take great care when fitting the assembly CAUTION Ensure the pin guides do not fall out when fitting the electrode assembly 50 51 52 53 S
161. ener rr 25 4 8 1 Pressure Gauge Calibration cccccceccccccsseeeeeceeeeeeseeeeeeeeeeeseeessaeeeessaeeeeeeas 26 4 8 2 Quick Clean Procedure i Ru 27 4 8 2 1 Quick Clean 29 4 8 2 2 Quick Clean Optional Cleaning 29 4 8 2 3 Quick Clean 29 4 8 3 Lower Chamber Viewport Overhaul 31 4 8 4 Top Viewport 32 4 8 5 Gas Met O RNO 33 4 8 6 SCIF Ring EMI Shielding and Ring 34 4 8 7 HiVac Gauge O lucc 36 4 8 8 Process Pressure Gauge O Rings 37 4 8 9 Roughing Gauge 38 4 8 10 Atmosphere Switch 39 4 8 11 Vacuum Switch 40 4 8 12 ESC Electrode Ring 41 4 8 13 Weighted Clamp Electrode Rings 44 4 8 14 Cylinder Swivel Mount Washer ccccscccecsseeeeseseeeeeeeeeseeeeesaeeeseeeeessaeeess 51 Version 2 4 4 3 Service Manual Maintenance lt T lt Service Manual AN SPP COMPANY 4 8 15 Bypass
162. environmental amp safety manager when the spillage has been dealt with so a report can be created When it is safe to re enter the area inform this fact to the Manager of the area Additional Safety Notes To maintain cleanliness within the vacuum system and to prevent contamination corrosion and reduce particulate levels consideration must be given to preventing air from coming into contact with gases or process by products in the vacuum system This can be achieved by means of nitrogen purging oxygen plasma cleans etc P 28 Version 1 4 SPIS AN SPP COMPANY P16 4 System Cleaning The actual cleaning procedure to follow is entirely process dependant Please contact SPTS for details on how to perform the mechanical clean e An etchback process must be run before any system cleaning takes place This will minimise the manual cleaning required During the cleaning procedures contaminated particulate material will created appropriate safety precautions must be observed for this kind of hazard Ensure that contaminated material is disposed of in accordance with appropriate site policy and procedures e Cleanroom wipes and abrasives will become contaminated during cleaning procedures Ensure that contaminated wipes and abrasives are placed inside a clearly labelled bag and disposed of in accordance with appropriate site policy and procedures P16 5 Unintended and Intended Releases The system is designed to operate at negative pr
163. eplacing the Power 77 Load System Data Screen 78 Load the Configuration File Screen 78 System Configuration Screen cccccccseecccceeceeeeeeeeeeeeeeeeeeeeeeeeeeeeeesaaaees 79 Download Configuration Screen 79 Download Configuration in Progress Screen 80 Configuration Download 80 Configuration Changed SCreen cccccceccccceecseeeeceeeeeeeseeeeeeeeeeeeeesseaeeees 80 Clearing the Alarms EET ETT 81 Spectrumeter Main Screen nnns 82 Spectrumeter Error nennen 82 Password nennen nennen nnn nnns 82 Full Configuration and Calibration Screen 83 Valve Island Connections cccccseececeeeceeeeseeceeeeeceeeeeceeeeseaeeesaeeeesanees 84 Valve Island Node 84 Robot Tab eese nennen nennen nnn nnn nnns 86 4 5 Service Manual Maintenance lt P T S 4 1 Service Manual AN SPP COMPANY Introduction This chapter provides details of the preventive and general maintenance relating to the process module gas li
164. equire the tool to stop processing for example topping up a fluid reservoir Procedures are more complex courses of action that would normally require the tool to be placed in a safe state for maintenance purposes The three monthly schedule should be carried out after three months or 750 RF hours whichever is sooner Six monthly schedules should be carried out when every alternate three monthly schedule is due Likewise the yearly schedule should be carried out when every alternate six monthly schedule is due The exact timing of the schedules will therefore depend on machine usage Daily Schedule Each day perform the following Checks e General Inspection Visually inspect the system looking for any potential problems including trapped frayed worn or exposed cables dented panels etc Check for thermal or corrosive damage Ensure that all covers are in place and that all earthing and bonding cables are correct and present e Fluid Reservoirs Visually inspect the fluid reservoirs if fitted on the ancillary equipment pumps chillers etc Top up each reservoir as required Refer to the ancillary equipment manufacturer s documentation for more detailed maintenance information e Water Connections Visually inspect the water connections facilities and de ionised for leaks e CPX VPX PDU if fitted surge arrester check see 4 7 3 e MPX LPX PDU if fitted surge arrester check see 4 7 5 Procedures There are no procedures
165. erated manually Service Manual 3 22 Version 2 4 S PTS Manual Control and Software Utilities AN SPP COMPANY 1 From the Manual view select the Process Module tab From the mimic screen select the required matching unit E Select the manual mode control button Select whether interlocks are to be enabled or disabled Qr ge Enter the capacitor load and tune positions as a percentage of their full scale deflection The following options are activated using the buttons on the command panel Burton Name Activates the matching unit allowing it to drive to the set position Stops the matching unit driving Resets the device in the event of a device failure Manual Both the load and tune capacitors are controlled manually by entering the Matching required position in the text fields Auto Load The load capacitor is controlled automatically whilst the tune capacitor Fixed Tune remains in a fixed position entered in the tune text field Auto Tune The tune capacitor is controlled automatically whilst the load capacitor Fixed load remains in a fixed position entered in the load text field Full Auto Both the load and tune capacitors are controlled automatically 6 From the control panel select the Load Tolerances tab the following screen is displayed Load m Show Graph Above setpoint alarm gt Above setpoint warning Below setpoint warning Below setpoint alarm suome1adQ avel y
166. ervice Manual Carefully place the electrode assembly into the chamber on top of the ceramic insulator Fit the electrode clamp ring 3 using eight M5 x 25 screws 2 Replace the weighted clamp basket Replace the electrode shields 4 46 Version 2 4 S P T S Maintenance AN SPP COMPANY Assembled View Figure 4 18 Platen Assembly Version 2 4 4 47 Service Manual AN SPP COMPANY Maintenance Assembled View Figure 4 19 Electrode Assembly Version 2 4 4 48 Service Manual S P T S Maintenance AN SPP COMPANY 10 e 9 1 _ 2257 SF Assembled View Figure 4 20 Electrode Lift Bellows Assembly Version 2 4 4 49 Service Manual Maintenance lt P T AN SPP COMPANY i Assembled View lt lt Figure 4 24 Chamber Base Plate Assembly Service Manual 4 50 Version 2 4 S P T S Maintenance AN SPP COMPANY 4 8 14 Version 2 4 Cylinder Swivel Mount Washer Issue 1 0 Date April 2007 The cylinder swivel mount contains two PTFE washers This procedure should performed in conjunction with the ESC electrode O ring change procedure see 4 8 12 System State Shutdown and vented Equipment and Materials Standard tool kit Parts Required Swivel mount washers Associated Procedures Safety section in the preliminary ESC electrode O ring change procedure Chamber leak up rate To change the washers 1 Refer to Figure 4 22 2 Shut
167. ervice Manual Introduction lt P T S AN SPP COMPANY 1 5 1 Turbo Pump Vacuum pumping of the process chamber is achieved by a turbo pump backed by a rotary pump The turbo pump is mounted on an additional frame located at the rear of the process chamber A combined APC HiVac valve is used to maintain process pressure and isolate the turbo from the process chamber during venting Nitrogen gas purging of the turbo pump is controlled from the pump purge panel 1 5 2 Backing Pumps The backing pump assists the turbo pump in pumping down the process chamber to process pressure Figure 1 24 Typical Backing Pump Note The loadlock MPX or VCE Transport Module CPX is pumped down independently by a dedicated rotary pump 1 5 3 Pumping Procedure After a chamber vent or complete restart the process module is pumped down roughed by the backing pump remote rotary pump via the bypass pumping system Once the process module s pressure falls to a pre defined level the roughing valve is shut and the APC HiVac valve opens The turbo pump then pumps the system to a base pressure and maintains that pressure Various gauges are used to measure the different pressures within the process module Roughing pressure in the chamber is measured by the roughing gauge The APC HiVac valve will not open until roughing pressure is reached Note After a complete restart i e after the turbo has been turned off the rotary pump will first pump
168. essures consequently any leaks will usually in to not out of the system These ingresses will therefore be pumped away by the pumping system to the customer s local exhaust ventilation LEV system Should an over pressure condition occur in the process module an over pressure relief valve rated at 5psig will release gas through the gasbox to the customer s local exhaust ventilation LEV system The system does not produce intentional releases After processing all waste products are pumped away by the pumping system to the customer s local exhaust ventilation LEV system Version 1 4 P 29 Preliminary 17 17 1 P17 1 1 Preliminary SPTS AN SPP COMPANY Disposal of SPTS Equipment SPTS tools may make use of hazardous substances gases and liquids during the processing of semiconductor substrates Also the residues that may be produced during processing can be hazardous The exact chemistry of the hazards will depend on Process chemicals e Wafer type and composition Process conditions SPTS is not responsible for the decommissioning and disposal of its products Furthermore SPTS is not a specialist in the disposal of hazardous chemicals and their by products used on or created by its goods It is the user s responsibility to make certain that appropriate licensed disposal authorities and or contractors are consulted to ensure that the disposal of the tool is in line with local safety and environmenta
169. etails the common maintenance procedures that are required by the maintenance schedule specified in section 4 6 Version 2 4 4 25 Service Manual Maintenance SPTS AN SPP COMPANY 4 8 1 Pressure Gauge Calibration Issue 1 0 Date July 2007 The process is used to recalibrate the process pressure gauges System State Pumped to base and at processing temperature Equipment and Materials Break in cable Associated Procedures Pump to base operation Perform a system Pump to Base operation and ensure that process module is at processing temperature 2 Plug a break in cable in between the process gauge and the process gauge cable Using a DVM measure the voltage output of the pressure gauge across pins 2 and 12 of the break in cable 4 Adjust the voltage adjustment potentiometer on the pressure gauge until the DVM reads zero volts 5 Using the manual function of the software press the Zero Gauge button Cc Slo as B Position Figure 4 6 Zero Gauge Button Note The actual parts required for a quick clean are entirely process dependant This procedure details the standard quick clean kit required for an ASE process For heavy etch processes e g air bearing etches then the items listed as being part of the yearly PM procedures may need to be swapped as part of the quick clean procedure For further information please contact the SPTS service department Service Man
170. ette mapping Please refer to the handler OEM documentation for details on the laser device MACS A laser is located behind the carousel in front of the chamber gate and is used to map the carousel and verify a substrate s presence or absence during handling The laser data sheet is as follows Manufacturer Omron equipment model number E3C LD1 1 Wavelength 650nm Power 2 5mW max FDA Class Il JIS Class 2 A laser is also located on the robot situated directly adjacent to the carousel and is used to map the cassettes Please refer to the robot OEM documentation for details on the laser device A laser is located behind the carousel in front of the chamber gate The laser data sheet is as follows Manufacturer Omron equipment model number ESC LD1 1 Wavelength 650nm Power 2 5mW max FDA Class Il JIS Class 2 The LPX system does not make use of laser devices In addition to this lasers may be used for optional EPD purposes In such cases please refer to the EPD OEM documentation for details on the laser devices Version 1 4 P 23 Preliminary P14 7 P14 7 1 P14 7 2 Preliminary SPTS AN SPP COMPANY Lock Off Procedure ELECTRICAL SUPPLIES AT VOLTAGES ABOVE 30 VOLTS AC AND 50 VOLTS DC CAN KILL BEFORE WORKING ON ANY OF THE SYSTEM S ELECTRICAL EQUIPMENT ALWAYS SWITCH OFF THE SUPPLY AT THE CIRCUIT BREAKER AND ENSURE IT IS LOCKED OFF TO PREVENT ANYONE FROM RE CONNECTING THE SUPPLY A SIGN DANGER E
171. file is required when shutting down the system 1 Enter the Manual Functional area and close the APC HiVac valve from within the Process Module tab Using the Command panel stop the turbo pump Watch the turbo pump controller panel and wait until the turbo pump speed has reached zero Note The turbo pump controller panel screen is located at the rear of the process module Using the Command panel stop the rotary backing pump Turn off all the heaters Set the platen temperature to 20 C and wait until it is reached Select Shutdown from the menu option and confirm to exit the system software Close all Windows applications shutdown and turn the computer off CS is For systems with a Power Distribution Unit PDU Turn the PDU main isolator handle to Off 10 For systems without a Power Distribution Unit PDU owitch off the Electronic Rack s main isolator Repeat for each Process Module The System is now shut down If the system is to be left idle for a time period longer than that specified by local regulations the following steps must be completed 1 Turn off all process gasses 2 Turn off the compressed air supply 3 Turn off the nitrogen and helium supplies 4 Turn off the water supply to the system 4 10 Version 2 4 S P T S Maintenance AN SPP COMPANY 4 5 Version 2 4 Emergency Stop Procedure USE THE EMERGENCY STOP PROCEDURE TO IMMEDIATLY SHUTDOWN THE SYSTEM IF A FAULT IS SUSPECTED T
172. ft Down Platen Lift Up Platen Lift Down Turbo Pump is On Foreline Valve is Open Roughing Valve is Closed Chamber is at Atmosphere Platen Flowswitch Hinge Flowswitch MU and Antenna Flowswitch Spare Spare Spare Coil MU Fan Sense Platen MU Fan Sense Chamber is at Vacuum Transfer Gate is Closed Spare Interlock Gas Interlock OK Hinge Coil Enclosure Interlock OK Coil MU Interlock OK Platen MU Interlock Ok Spare Interlock Service Manual Control System and Power System Distribution lt P TS AN SPP COMPANY In KL1418 Robot is not extended Transport Module is at Vacuum Transport Module is at Atmosphere Gasbox Extract Flow is OK Foreline Overtemp opare opare opare Digital Out mall a Out ml Turbo Purge Off In KL3064 1 Vpp DC Bias HBC Pressure HBC Gas Flow Analogue In KL3064 AIM Gauge Pressure 5 Analogue In KL3064 RTD 6 Analogue In KL3204 NE Source Inner Safety RTD 7 Analogue Out KL4004 Platen MU Load Set Platen MU Tune Set HBC Pressure Demand DC Injection Control Service Manual 2 32 Version 2 4 N O OF O Roughing Gauge Pressure Foreline Gauge Pressure Plasma Detect Platen MU Load Position Platen MU Tune Position Coil MU Load Position Coil MU Tune Position Chamber Block Safety RTD Magnetic Confinement Chamber Safety RTD Insert and Plenum Safety SPTS Control System and Power S
173. g centre flange 23 and clean with IPA 28 Remove sixteen M10 x 25 screws 24 and washers 25 securing the quad 250 ISO 250 adaptor 20 to the chamber frame 29 Remove and discard O ring 26 Clean the O ring grooves with IPA and fit new O ring 4 56 Version 2 4 Maintenance AN SPP COMPANY Assembly is the reverse of the above procedure with screws 4 8 18 amp 24 requiring torque settings of 50Nm 30 Figure 4 25 Turbo Pump Assembly Service Manual 4 57 Version 2 4 Maintenance SPTS AN SPP COMPANY 4 8 17 Turbo Foreline O Rings Issue 1 0 Date April 2007 The turbo foreline O ring change procedure should be performed at the same time as the turbo pump overhaul procedure System State Shutdown and vented Equipment and Materials Standard tool kit Parts Required Turbo foreline O rings Associated Procedures Safety section in the preliminary Turbo pump overhaul procedure To change the turbo foreline O rings 1 coe ge Service Manual Refer to Figure 4 26 Hemove clamp 1 securing 40 nipple 2 to foreline isolation valve 3 Remove ring 4 and carrier 5 Remove O ring from carrier and discard Clean carrier with IPA and fit new O ring Remove clamp 6 securing the foreline isolation valve 3 to turbo foreline adaptor 7 Remove ring 8 and carrier 9 Remove O ring from carrier and discard Clean carrier with IPA and fit ne
174. gt Tag accesspat 111 d lt Taq accesspath PMC2 name operationType key z PMC PRJobAdmin sPu sp noperationType 2 va lues o valides True Jasterror Figure 3 97 Example Tag XML Error 14 The above line within the Tag XML file shows the pumpdown timeout value was entered as 8 seconds where the minimum value is 30 seconds Configuration Editor CAUTION These parameters are factory set before shipment and should ONLY be changed after consultation with SPTS Amending these parameters could cause the system to malfunction The configuration editor allows the user to change settings timeouts measured values etc used within the system To access the configuration editor 1 From the operator station select the Setup button 2 From the Setup screen select the Configuration Editor tab A screen similar to the following is displayed 5 baid 4 2 Configuration Editor i n z Pup D pesme Foma Pure atin wann s T Backing Pury ru pus apse Ruso E pesmi Moma Baca s Mac to ved 13 ba 5 eremi F Pet Pure Nain lans 2 E Feia vaa Dupuis E ReughngVae 2 later Pump nDemand F Present tape to sored zd TabePuspPuge bing a Prise Pump on of areca 1 3 co RENS EE Pump purge econcancer times EL aS H E Cher A
175. guration Slave device may be in another master s scan list Reboot slave device None required The code will remove itself when the module initialises the slave devices on the network Configure the device for a smaller data size Check device configuration and slave node status User has disabled Check module command register for communication port disable bit set Version 2 4 SPTS Control System and Power System Distribution AN SPP COMPANY Bus off detected at com Check devicenet connections and media port integrity check system for failed slave devices or other possible sources of network interference No network power Provide network power Ensure that detected on comm port module drop cable is providing network power to module com port Application FLASH No action required Do not disconnect the update in progress module while the update is in progress You will lose any existing data in the modules memory 97 Module operation halted Check module command register for halt by user command bit set 2 2 3 4 Ethernet Card The ethernet card allows the processor to communicate with the operator station PC running the operator station software The following indicators are located on the front panel ETHERMET RAD TD OK Figure 2 20 Ethernet Card Front Panel Status Description Dd c NN Green LED ed data is being received from the operator station PC TX Blinking Green
176. gure 3 59 Typical Chamber Commands screen 3 4 1 8 Substrate Map Editor Tab The substrate editor allows the user to manually create or delete substrates as required To access the substrate map editor tab 1 Access the manual control software as detailed in 3 4 1 TMC Manual Control Software CPX VPX Only 2 From the TMC control screen select the substrate map editor tab m Figure 3 60 Typical TMC Substrate Map Editor Tab 3 The logging level can be selected using the log level text field Note The log level defaults to a value of 1 lowest level The level can be set to a higher level if required by either entering the logging level or using the up and down arrows Version 2 4 3 57 Service Manual Manual Control and Software Utilities lt TS AN SPP COMPANY 3 4 1 8 1 To Create a Substrate Current Details eo Present Aligned Select Populate All Clear All Location Substrate Size 2mm E Substrate State Unprocessed Apply Figure 3 61 Typical TMC Create Substrate Options Note In order to create substrates within the cassette module the cassette must be present and the map must be valid Before creating substrates within a cassette ensure a cassette is loaded and a map is carried out as described in 3 4 1 3 TMC Manual Control Cassettes Tabs 1 Access the substrate map editor as described in 3 4 1 8 Substrate Map Editor Tab Select the l
177. he high and low setpoint warning and alarm backside cooling gas pressure thresholds 8 Select the show graph button if required to graphically show the pressure measured over time in relation to the selected warning and alarm limits Note An alarm will stop the operation in progress a warning will allow the current operation to continue but will alert the operator to the fact the system has encountered an error Selecting the Statistical Data tab displays statistical data about the selected device Service Manual 3 32 Version 2 4 S P TS Manual Control and Software Utilities AN SPP COMPANY 3 2 15 Watchdog Manual Control This option allows the user to manually start and stop the watchdog Watchdog 91215 Buisse201d Manual Mode eseg o dung aoe suoijeJad Figure 3 34 Typical Watchdog Manual Control Screen To allow the watchdog to be operated manually 1 From the Manual view select the Process Module tab 2 From the mimic screen select the watchdog icon 3 Select the manual mode control button Version 2 4 3 33 Service Manual Manual Control and Software Utilities lt TS 3 3 3 3 1 Service Manual AN SPP COMPANY Service Information Utilities The following functions are located within the software to allow the user to identify the current state of the system and to provide historical data These functions are as follows e Automated Reliability Availabil
178. he laptop and the RS232 port on the rear of the power supply Start Spectrumeter Technology for Productivity ENFProducts SpectruNMieter Bat ioe Decorated Figure 4 47 Spectrumeter Main Screen In the Communications drop down menu select Activate This will open communications between Spectrumeter and the power supply If communications cannot be established check the connection between the PC and power supply Ensure the power supply is switched ON at the breaker on the rear Jes Ay The unit could nat be found Please check the port settings and make sure the unit is plugged into the port Figure 4 48 Spectrumeter Error Screen Once established in the Help drop down menu select Open Advanced Options When prompted for a password enter 1123581321 X Please enter the password OK Cancel Figure 4 49 Password Dialogue 4 82 Version 2 4 lt P T S Maintenance AN SPP COMPANY Version 2 4 5 10 11 12 13 14 15 16 17 18 19 20 The Tools drop down menu appears after entering the software From the Tools drop down menu select Full Configuration and Calibration ation and Ca Product ID pn Unit SerialNumber P Change Time Date P Set Code Revision diGurrent Configuration Store ConfigRev Erase Config TDS IE This Product ID is unknown or there was an error communicating with the unit The calibration
179. he recipe downloader is used for diagnostic purposes and should ONLY be used after consultation with SPTS Using the downloader can corrupt those recipes already on the system The recipe downloader is used to download a recipe to the PLC when requested by the operator station Recipes can be manually downloaded if required and are automatically checked to ensure that all the parameters within the recipe are valid To manually download a recipe 1 From the Task Bar double click the Recipe Downloader icon Recipe Downloader Icon Figure 3 92 Recipe Downloader Icon Version 2 4 3 79 Service Manual Manual Control and Software Utilities lt S AN SPP COMPANY 2 A screen similar to the one shown below is displayed RecipeDownloader 5 0 2232 26809 Download 08 14 32 406 Stack Trace 08 14 32406 atSustem lD Error inl Errar Int32 enmorlode String str at System l0 FileStream ct 08 14 32 458 Downloading configuration fram database 8 14 32 4568 Systemnfo 08 14 32 579 Downloading configuration for chamber 1 PM C2 05 14 32 718 Tolerances 08 14 32 921 GasLines 08 14 32 937 Download of configuration complete Figure 3 93 Typical Recipe Downloader Screen Select a recipe from the drop down list 4 Select the Download button to download the recipe to the PLC 5 If the recipe contains parameters that are not valid the following is displayed RecipeDownloader v5 0 2232 25809 09 34
180. ice State Behaviour State Machine Last Event Client State Job Flags ToolJobID InService InitialisingBehaviour Cassette1 TRJob5 Idle InService InitialisingBehaviour Cassette2 TRJobS InService InitialisingBehaviour RobotA rm TRJobS Ic 1 1 InService InitialisimgBehaviour PMC2 PRJobAdmin 1 InService InitialisimgBehaviour PMC3 PRJobAdmin dle 1 1 1 InService InitialisimgBehaviour ToolJobAdmin ToolJobAdmin2 Log Mimic Options Alarms Tool Status scheduler 1 Status scheduler 2 Status Scheduler Run Time Progress ETA Status ToolJobAdmin Idle ToolJobAdmin2 Idle Opacity Figure 3 86 Typical TMC Manual Control Screen 3 The manual control buttons are located at the top of the screen as shown below _ scheduler i scheduler Z PEG PEG3 Cassette 1 Cassette Armo O Ww X Load Unload Pump vent Open Door Close Door Abort Figure 3 87 TMC Manual Control Buttons 4 The manual control buttons perform the following operations Load Selects a cassette to be loaded When the load button is selected the following dialogue is displayed Load Cassette Cancel Enter the cassette ID if required Select the OK button to begin loading the cassette Aborts the current operation Service Manual 3 76 Version 2 4 SPP COMPANY Manual Control and Software Utilities 1 Access the chamber manual control as described in 3 4 3 5 Scheduler Manual State Machine Cassette1 TRJ
181. id state relays Further information on the DC control I O can be found in Chamber Gauges Interlocks and Status Monitoring Node 04 on page 29 Each contactor relates to a heating circuit as shown below Chamber Heaters 2 27 Service Manual Control System and Power System Distribution lt P TS AN SPP COMPANY Magnetic Confinement Chamber Heater 1 2a Not ICP 2 Magnetic Confinement Chamber Heater 2 2b Not ICP Upper Source Heater Pegasus Source Heater Pegasus Only 2 2 6 1 3 Circuit Breakers The supply to the heaters is isolated by the following circuit breakers 2 1 Magnetic Confinement Chamber Heater 1 Magnetic Confinement Chamber Heater 2 Upper Source Heater 5 100 Internal and External Foreline Heaters 6 10A Turbo Controller 2 2 6 1 4 Solid State Relays The solid state relays allow the heaters to drive when closed Each relay relates to one of the chamber heating systems as shown below GSE Oeo Chamber Heaters Magnetic Confinement Chamber Heater 1 Not ICP 25 0 Magnetic Confinement Chamber Heater 2 Not ICP Upper Source Heater o Pegasus Source Heater Pegasus Only Service Manual 2 28 Version 2 4 S DP TS Control System and Power System Distribution AN SPP COMPANY 2 2 7 Chamber Gauges Interlocks and Status Monitoring Node 04 Node 04 consists of a bus terminal containing Beckhoff I O for monitoring the chamber gauges interlocks and general status mon
182. idle state after the operation is completed The purpose of the delay is to stop errors being raised when the OEM software reports a busy state when the system is in fact idle This value should only be changed to eliminate the cause when the above mentioned error is being experienced 10 logging level can be selected using the log level text field Note The log level default is 1 lowest level Higher levels will log further information The logging level should only be changed under direct instruction from SPTS Version 2 4 3 51 Service Manual Manual Control and Software Utilities lt TS AN SPP COMPANY 3 4 1 4 TMC Manual Controlled SMIF Tabs The SMIF tabs allow the user to manually control the loading and unloading of cassettes to and from the SMIF units To access the manual control core pumping tab 1 Access the manual control software as detailed in 3 4 1 Manual Control Software CPX VPX Only 2 From the TMC control screen select the SMIF tab v Enable Interface J Enable Passthrough Mode Current Command None Initialisation Out OF Service Equipment Last Error None O Pod Present t O Homed Curren EIUS Pod Open O Cassette Gripped Figure 3 53 Typical TMC Core pumping Tab 3 The following buttons are located on the right hand side of the screen Button Name Load Takes a SMIF pod from the Smif unit unlocks it and places the cassette within the VCE Takes a cassette f
183. ie E Harak C O Volume nirman E 5 WINDOWS gh Duro in i Je contrat Panel Seed 781 Sy show s Figure 3 95 Tags XML Location 9 Start the Notepad application from the Start menu 10 Drag the chamber name Tags XML file e g PEG1Tags xml into the Notepad window 11 A screen similar to the following is displayed werzinne 1 0 7 c aml gtylezhest fypes taxt zil hrafes Tagi xil s Tags logging keys PMC PRIOhAdwin APU p0 ALOQID DATA P IO values valids True lagterrore names perationType eye PSC PRODhAdmin ZPu zp n perationType 1 valu 1 valide True lasterror aceceiiparh accezzpath acceiiparh accezzpath aceeiiparh acceiipakh accezzpath acceiipathe accesspath acceiipathe accesspath acceisipathe accesspath n amas opearationinit kays PMC PRIOhAdeIn SPU pp noperatianrnitance 1 values 1 valids True lagtarr nate Tolerance Linker keys PRC PE3DbAnmin sPu sp nTolinsrance l1 values valide True lazterrora 2 Aes Dade Pr iiura k Riera eee je md e
184. ilable for current build Move to Unload Moves the cassette platform to the unload position Home Homes the cassette Acquire Load Prepares the cassette for processing Release Unload Prepares the cassette ready for removal Jog Up Moves the cassette one slot up Jog Down Moves the cassette one slot down Find Bias Calculates the offset between the slot transfer plane and the detected substrate map position Select the required slot Execution Enter a delay time before the operation is carried out This allows the user Delays to return to the transport module to watch the operation if the control station is located any distance from the transport module 8 Select the Setup tab located on the right hand side of the screen The following options are available Wafer Slip and When selected activates the following interlocks Door Lock e Wafer Slip Prevents the robot arm from picking a substrate when the Interlocks sensor detects a substrate has slipped to the front edge of the cassette e Door Lock Interlocks Prevents the platform moving up or down when the door is open Enter the number of slots in the cassette Pitch Enter the pitch in 0 0001 inch units Enter the offset in 0 0001 inch units Change the find bias if required in 0 0001 inch units 9 Enter the intercommand delay if required Note The intercommand delay is a preset delay set at 200 milliseconds before the system returns to an
185. imic page click on the Os line s and choose Manual Mode then click on Disable Interlocks Click Flow On and set the flow rate to 1096 of the MFC maximum Note If the chamber pressure rises too quickly reduce the percentage accordingly 4 Wait until the chamber pressure rises to between 1 5 and 1 9 Torr then stop the Os flow 5 Monitor the chamber pressure over a five minute period If the pressure falls the HiVac seal needs replacing Capacitance Manometer Capman Gauge Check To check the Capman gauge the following equipment is required Digital voltmeter DVM e Instrument screwdriver Procedure The Capman gauge check must be undertaken when the system is at base pressure END OF STANDBY process 1 Locate the 9 way D type chassis test socket situated on the top panel of the process chamber EMC enclosure 2 Connect a digital voltmeter to the 9 way D type chassis test socket as detailed below Digital Voltmeter Lead DVM 9 Way D Type Test Socket Pin Identification Positive RED Lead Pin 1 Manometer Negative BLACK Lead Pin 9 Manometer OV 4 71 Service Manual Maintenance lt T lt 4 10 2 4 Service Manual AN SPP COMPANY 3 Ensure the Capman gauge is indicating 1 milli Volt mV or higher If the indication is 41 mV adjust the potentiometer on the Capman gauge until the DVM shows a value of 1 mV Helium Leak Check CAUTION Owing to clients unique process
186. ing will be prevented rrj LIT Door Switch Figure 1 8 Gasbox Door Switch Version 2 4 1 15 Service Manual Introduction P T S AN SPP COMPANY 1 3 7 2 Gasbox Extract Sensor A differential pressure sensor is used to ensure that gasbox extraction is present Gasbox pressure is measured near the sensor display at the bottom of the gasbox and also at the extract point Should the pressure differential between these two points fall below a preset value the gasbox extract software interlock will be broken and processing will be prevented Extract Point Sensor Display Figure 1 9 Gasbox Extract Sensor Service Manual 1 16 Version 2 4 SPTS Introduction AN SPP COMPANY 1 3 8 Electronics Rack The electronics rack houses the following equipment Power Distribution see Chapter 2 e PLC Drawer e Electromagnet Power supply e LF amp HF Platen Generators see 1 3 6 Source HF Generator see 1 3 6 End Point Detector PC option EPD PC Optional o e User PC LPX Only Power Distribution s5 mie PLC Drawer Electromagnet Power Supply LF amp HF Platen Generators g Source HF Generator Figure 1 10 Electronics Rack Typical Arrangement Version 2 4 1 17 Service Manual Introduction
187. ire SOI etching This generator is coupled at 380KHz RF and is applied in pulses defined by a pulse generator The pulse generator is a Beckhoff slice within the chamber I O inside the DC panel 1 14 Version 2 4 SPTS Introduction AN SPP COMPANY 1 3 7 Gasbox The gasbox receives the process and purge gases and distributes them to the process chamber Flow rates for the process gases are controlled by dedicated mass flow controllers MFCs which are in turn controlled via the I O bus terminal located at the back of the gasbox GASBOX FILTER GAS 6 en MFC 2 Q PURGE GAS M F C FILTER i GAS 5 65 M j j PURGE ae FILTER 3 J i 3 w Gt OM MFC a gp PROCESS NS 4 w GAS2 6 CHAMBER i i o i 5 e m 81 gy E 4 go pe ER LEAK CHECK VENT REGULATOR PSIG SET 5 PSIG MASS FLOW METER FILTER Note TURBO J 3 YANO Turbo purge line is only for PURGE REGULATOR PSIG those systems with a turbo pump Figure 1 7 Gasbox Valve Arrangement 1 3 7 1 Gasbox Door Interlock The gasbox contains a mechanical door switch located at the lower right hand side of the enclosure This switch forms part of the software gasbox interlock and detects when the gasbox door is open When the door is open the gasbox door software interlock is broken and process
188. it Form B 3013Config serial number Rev25 Close this file Re enter Spectrumeter and enter the Full Configuration and Calibration page as above oelect Download Configuration Select the revised configuration saved above Once down loaded select OK at the Configuration Saved Successfully prompt Currently the revised configuration is only stored in volatile memory Press the Store tab in the Full Configuration and Calibration window Once stored select OK at the prompt You are now asked to reboot the power supply oelect Yes at the prompt The power supply will be rebooted To confirm that the revised configuration is present on the power supply in the Full Configuration and Calibrations page upload the configuration file from the power supply once again as above At the save to file prompt save this file as e g B 3013ConfigCheck serial number Rev25 Once uploaded the configuration will be displayed in Spectrumeter Check that the Interlock Fault Auto Clear parameter is 1 4 83 Service Manual Maintenance lt P T S AN SPP COMPANY 21 Close the configuration window and close Spectrumeter This completes the update process 4 10 7 Replacing the Norgren Valve Island This procedure should be followed to replace a damaged valve island In order to replace the valve island the following equipment is required Phillips head screwdriver Terminal screwdriver To replace the valve island follow the procedure detailed be
189. itoring The node is located in the DC panel located on the side of the process chamber ir ced orm nom Figure 2 25 Node 04 Chamber Gauges Interlocks and Status Monitoring Version 2 4 2 29 Service Manual Control System and Power System Distribution P TS AN SPP COMPANY The following I O is located within the bus terminal I O Type Card Type Channel 1 Digital Out KL2408 Valve 1a Platen Down Valve 1b Platen Up Digital Out KL2408 Valve 3b Foreline Isolation Valve 4a Gauge Isolation Valve 4b HBC Platen HBC Inlet Valve Open opare Anticon Solenoid Transfer Gate Open Enable Hobot Extend Enable PM Lid is Closed Coil Fans Off Coil MU Gain Select CT1 Enable CT2 Enable CT3 Enable 4 Enable Valve 2a Substrate Lift Down Digital Out KL2114 Digital Out KL21 14 Valve 2b Substrate Lift Up Digital Out KL2488 Valve 3a Roughing Valve Grip Substrate Service Manual 2 30 Version 2 4 AIM Gauge Enable Platen MU Select RF is ON DC Injection Platen MU Load Manual Platen MU Tune Manual Coil MU Load Manual Coil MU Tune Manual SPTS Control System and Power System Distribution AN SPP COMPANY Digital In KL1194 Digital In KL1418 A c N O W N Digital In KL1418 2 Digital In KL1418 6 7 Version 2 4 2 31 N Oo A o A C N Substrate Lift Up TMC Platen Lift Up TMC Substrate is Sensed Substrate is Gripped Substrate Lift Up Substrate Li
190. ity and Maintainability ARAMS Object Based Equipment Module OBEM e Recipe Editor Summary e Data Mode Automated Reliability Availability and Maintainability ARAMS ARAMS is a SEMI standard that is used to monitor the reliability availability and maintainability of a semiconductor process tool The principle element of the standard is a state model that characterises the operation of the tool into a number of different states see diagram below Total Time Manufacturing Time Engineering Productive Unscheduled downtime Standby Scheduled V p downtime Figure 3 35 ARAMS State Model 3 94 Version 2 4 S PTS Manual Control and Software Utilities AN SPP COMPANY 3 3 1 1 Transport Module Controller ARAMS states The ARAMS screen is accessed as detailed below Figure 3 36 Typical ARAMS Screen 1 From the Task Bar double click the Transport Module Controller TMC icon TMC Icon Figure 3 37 Transport Module Controller TMC Icon 2 From the TMC select the ARAMS tab Version 2 4 3 35 Service Manual Manual Control and Software Utilities lt PTS 3 3 2 Service Manual 3 36 AN SPP COMPANY The following indicators are located on the ARAMS screen control area Operations Time 00 00 00 Manufacturing 00 00 00 Unscheduled Downtime Scheduled Downtime 00 00 00 00 00 00 Nonscheduled Time 00 02 48 Figure 3 38 ARAM
191. k that wafer handling occurs correctly between the VCE Loadlock and the process module ensure that the substrate is collected form the VCE Loadlock and delivered to the process module safely Perform the Clamp Substrate step see Chapter 3 System Operation Perform a Backside Gas Leak Up Test see Chapter 3 System Operation and ensure that the leak rate is within tolerance Return the test substrate to the VCE Loadlock 4 14 Version 2 4 S P T S Maintenance AN SPP COMPANY 4 6 4 6 1 Version 2 4 Maintenance Schedules Maintenance schedules are divided into quick clean and routine procedures The quick clean procedure will typically be the most frequent procedure to complete and consists of swapping contaminated parts assemblies for new or clean replacements The frequency at which the quick clean procedure will need to be performed is process dependant but will normally need to be done more often than the three monthly routine procedure Routine preventive maintenance is mainly confined to the tool s components and mechanical assemblies The electronic control system and power supplies require only periodic calibration checks and adjustments The routine maintenance schedules are divided into the following categories 1 Daily 2 Weekly 3 Monthly 4 Three Monthly 5 Six Monthly 6 Annual Each schedule is divided into a series of checks and procedures Checks are physical inspections and would normally not r
192. l RF Generator Manual Control Screen To allow the RF generator to be operated manually 1 From the Manual view select the Process Module tab From the mimic screen select the required RF generator e 2 3 Select the manual mode control button 4 Select whether interlocks are to be enabled or disabled 5 Enter the required generator power in Watts The following options are activated using the buttons on the command panel Button Name Activates the generator Generator Off Deactivates the generator Pulsing On Off Enables disables generator pulsing uf applicable Note The pulse definition is made during recipe creation See the Operator s Guide for further information on recipe creation 10 Range Restricts the generator s output to 10 of its maximum This option is used if applicable to give a more sensitive output when running the generator at less than 1096 of its maximum 10096 Range Hemoves the 1096 generator restriction see above if applicable The RF Run Hours value displays the total time this generator has been running since this counter was last reset Note The RF Hours counter reset button is located in the Accumulator Log Viewer displayed by clicking on the Datalog button See the Operator s Guide for further information on the Datalog Service Manual 3 26 Version 2 4 S PTS Manual Control and Software Utilities AN SPP COMPANY 6 From the control panel select the Forward
193. l laws When decommissioning the system particular attention should be paid to those areas of the tool that may contain hazardous materials or by products These are typically going to be Gas delivery system Process chamber Pumping system Decommissioning and Disposal Process SPTS is not responsible for making any recommendation for the decommissioning or disposal of the facilities to the tool These are wholly the user s responsibility Hazardous Contamination List When planning the decommissioning and disposal of an SPTS plasma processing tool a consideration must be made of all the process gases liquids and their associated by products that have been used and or created during the tool s lifetime SPTS recommends creating and maintaining a list of the following All the process gases and fluids used during processing e All the possible by products that may have formed and passed through the pumping line An example of such a table for a typical etch chamber is shown below Typical Inputs Typical Contaminates Fom For GaAs etching As GaCl3 B203 AsCls CN GaBrs As Solid Gas BCl Clo HBr SPs ASBrs For InP etching HCI P InCls PCls SiCl4 InBr P Solid Gas For GaN etching GaCls SiCl4 Gas For Si etching HF variants SO SO CO oolid Gas The site health amp safety advisor s input should be sought to ensure that local and national regulations relating to the
194. l remain inactive TMC Misc Screen The TMC Misc screen allows the user to view the system miscellaneous information including Interlock information and the map information for the system To access the TMC Misc screen 3 65 Service Manual Manual Control and Software Utilities SPTS AN SPP COMPANY 1 From the Task Bar double click the Transport Module Controller TMC icon 2 Select the Misc tab from the TMC software as shown below TMC v8 0 16 0 Miscellaneous Purges N MACS Arm in lock Interlock false Table Index Pressure OVER Map Info Carousel Invalid Rabat Invalid Cassette 1 Cassette 2 Invalid Invalid Log States Options Trace Config 1 0 Misc 12 Sep 2008 10 47 31 Figure 3 75 TMC Misc Screen 3 4 3 Scheduler The scheduler controls the running of recipes and sequences within the system The user can use the scheduler to provide a level of manual control of the system and define which parameters are to be logged To access the scheduler 1 From the Task Bar double click the Scheduler icon 58 Scheduler Icon Figure 3 76 Scheduler Controller TMC Icon Service Manual 3 66 Version 2 4 SPP COMPANY 2 A screen similar to the one shown below is displayed ETE Fra Schedaler 58 ll AIR ra FEFEFEZEFE Manual Control and Software Utilities Last went Cimi Sate ll Tomijs 1 eg Mass pier zu Figure 3 77 Typical
195. lat blade Screwdrivers flared tip 4 x 75 mm 6 5 x 40 mm and 8 x 150 mm Screwdrivers parallel tip 3 x 100 mm 4 x 100 mm and 5 5 x 100 mm Square drives posidrives No s 0 x 60 1 x 75 2 x 100 and 1 x 30 stubby Spanners combination imperial 1 4 7 8 in opanners combination small imperial 5 32 11 32 in Spanners combination metric A F 6 19 mm Spanners combination small metric 4 9 mm opanners adjustable 4 in 8 in and 10 in Keys combination hexagonal head and ball ended e g Allen keys imperial and metric Ball drivers 1 5 10 mm O ring extraction tools Wire cutters Pliers snipe nose flat nose and combination Combination digital voltmeter and frequency meter with accessories test clip set Scalpel and blades Set of Torx keys De solder tool Tweezers Needle file set A sharp knife e g Stanley knife Insulating tape 20 mm black Digital thermometer Anti static adjustable wrist strap with coiled lead stud clip Flexible ruler 300 mm Pocket torch Interchangeable circlip pliers Insertion extraction tool D type for inserting removing pins on electrical connectors Torque wrench with socket converter and adapter 4 8 Version 2 4 S P T S Maintenance AN SPP COMPANY 4 4 4 4 1 Version 2 4 Start up and Shut Down Procedures The system should only be switched on at the first instance after a successful installation by fully qualified SPTS se
196. lated from the K bus The mark space ratio is prescribed by a 16 bit value from the automation unit The output stage is protected against overload and short circuit The bus terminal contains two channels that indicate its signal state by means of light emitting diodes The LEDs are driven in time with the outputs and show the mark space ratio by their brightness KL2502 5020 2 CHANNEL PWM OUTPUT 5 KL2502 2 CHANNEL PWM OUTPUT 24V SIG LED1 c4 SIG LED2 D Oh 1 OUT2 24V 24V 0V 6 0V PE i Figure 2 14 KL2502 2 Channel PWM Output 24 V 3020 Version 5V 2 2 2 12 KL4004 Analogue Output 0 10V The KL4004 analog output terminal generates signals in the range from 0 V to 10 V respectively The voltage is supplied to the process level with a resolution of 12 bits and is Version 2 4 2 13 Service Manual Control System and Power System Distribution lt P TS AN SPP COMPANY electrically isolated The output channels of a bus terminal have a common ground potential The RUN LEDs give an indication of the data exchange with the Bus Coupler KL4004 4 CHANNEL ANALOGUE OUTPUT 0 10V ME L RUN LED1 cy RUN LED2 B 20 RUN LED3
197. low ENSURE THE EQUIPMENT IS POWERED DOWN BEFORE CARRYING OUT THIS PROCEDURE REMOVING THE VALVE ISLAND WITH THE SYSTEM POWERED UP WILL CAUSE THE CONTROL SYSTEM TO FAIL RESULTING IN POSSIBLE SYSTEM DAMAGE AND OR INJURY TO PERSONNEL 1 Remove the compressed air power and Devicenet connections from the valve island 5 A A al Devicenet Connection T rr rm 1 2 Ta 4 s eir 2 Figure 4 51 Valve Island Connections Hemove the valve island by removing the four screws securing it Fit the new valve island and replace the compressed air power and Devicenet connections 4 Set the node number to match that of the replaced valve island as shown below Tens For example to set node 9 Select 0 on the tens and select 9 on the units Figure 4 52 Valve Island Node Number Service Manual 4 84 Version 2 4 lt P T S Maintenance AN SPP COMPANY 4 10 8 4 10 9 Version 2 4 Replacing Electrical Components 1 P 3 owitch off the power and lock out the tool Isolate electrical power Locate the component to be replaced Disconnect the cables and connectors as necessary taking note of their identity or their destination as appropriate Hemove the component fixings taking note of the position orientation and the arrangement of the fixings On the replacement component check the issue number etc and prepare the component as necessary
198. manually control the system components the enable manual checkbox must be selected To access the TMC IO screen 1 2 From the Task Bar double click the Transport Module Controller TMC icon Select the IO tab from the TMC software as shown below TMC v8 0 16 0 Device Input 1 Value Input 2 Value Output 1 Value Output 2 Value Comp Air Failed Slice Lift Not Up Not Down Lift Down Clamp Not Clamped Not Unclamped Unclamp Chamber Gate Not Opened Not Closed Close MACS Gate Not Opened Not Closed Not Open Not Close N2 Bleed Soft Pump Full Pump Soft Vent Full Vent Lid Shut Lock At Atmosphere Chamber At Atmosphere Pump Is On 5535 20 000 Ea ES Log States Options Trace Config 1 0 12 Sep 2008 10 49 44 Figure 3 73 IO Screen To enable manual control 1 2 3 Select the Enable Manual checkbox Select the device to be controlled Once selected the following will be displayed Enable Manual MACS Gat Drive Drive Disable Interlacks Figure 3 74 Enable Drives Dialogue Select the Disable Interlocks checkbox to disable any applicable software interlocks Select the Drive checkbox to operate the input for the selected device Note Depending on the device to be controlled there will be either one or two drive inputs but the system will always show two drive inputs In the case of devices with only one drive input select Drive 1 to operate the device Drive 2 wil
199. mbly is housed within the lower chamber and is comprised of the platen and lift assemblies 1 11 Service Manual Introduction S lt AN SPP COMPANY 1 3 3 1 Platen The platen consists of the electrode block which is connected to RF power fluid cooling and helium back cooling supplies If an electrostatic clamping system is fitted a high voltage DC supply is connected through the electrode to the electrostatic chuck The substrate platen is supported on a stainless steel bellows and is connected to the electrode lift assembly which is used to raise it to the process level The flexible bellows which is differentially pumped sits on an adapter which is secured to the process module base plate 1 3 3 2 Lift Assemblies There are two lifts located in the RF chamber below the process module The substrate lift is used to raise lower the substrate from to the robot arm during loading and unloading The platen lift is used to raise the platen to processing height Each of the lift assemblies are comprised of an air cylinder and piston arrangement The electrode lift assemblies are partly contained in the bottom RF enclosure with their air cylinders beneath this in the frame The platen lift height is controlled by stops and is dependant on process height requirements Service Manual 1 12 Version 2 4 SPTS Introduction AN SPP COMPANY 1 3 4 1 3 4 1 1 3 4 2 1 3 4 3 1 3 4 4 1 3 4 5 1 3 4 6 1 3 4 7 Version
200. mmediate medical attention Inhalation Remove to fresh air If rapid recovery does not occur obtain medical attention Ingestion Do not induce vomiting If rapid recovery does not occur obtain medical attention Give water to drink providing patient is conscious Incompatibility Reacts with strong oxidising agents Reacts with strong acids Spill Or Leak Procedures Waste Disposal Prevent contamination of soil and water Prevent from spreading or entering into drains ditches or rivers by using sand earth or other appropriate barriers Risk of explosion Inform the emergency services if liquid enters surface water drains Vapour may form an explosive mixture with air Special Protection Special Precautions Avoid contact with eyes Avoid prolonged or repeated contact with skin Extinguish any naked flames Remove ignition sources Avoid sparks Do not smoke Do not empty into drains Earth all equipment used for product transfer P 16 Version 1 4 SPTS AN SPP COMPANY P10 Mechanical Safety MAINTENANCE AND REPAIR PROCEDURES MAY ONLY BE UNDERTAKEN BY SPTS APPROVED TECHNICALLY QUALIFIED PERSONNEL WHO ARE FULLY AWARE OF ALL RELEVANT SAFETY PRECAUTIONS ENSURE THE CHAMBER IS AT AMBIENT TEMPERATURE BEFORE OPENING WHEN A CHAMBER HAS BEEN PROCESSING WITH TOXIC GASES OR HAS TOXIC GASES CONNECTED THE FOLLOWING SAFETY MEASURES SHOULD BE CARRIED OUT BEFORE THE CHAMBER IS VENTED TO ATMOSPHERE 1 ENSURE THE GAS LINES HAVE BEEN PUMP
201. n 2 4 3 45 Service Manual Manual Control and Software Utilities lt TS AN SPP COMPANY 9 The Align tab located on the right of the screen allows substrates to be moved through the system The following options are available Using Arm oelect which robot arm is to be used for the alignment Note Only used on systems with bisymmetrical arms 10 Select the Execute button to begin the Alignment 11 A log of the system operations can be viewed in the text field located below the ARAMS window Cassette 1 None Unknown Cassette 2 None Unknown Cluster Chambe attempt to use a chamber that is not fitted to the cluster has been detected Figure 3 50 Typical Overall Control Log Window 12 logging level can be selected using the log level text field Note The log level defaults to a value of 1 lowest level The level can be set to a higher level if required by either entering the logging level or using the up and down arrows SPTS recommends that the log level remain at 1 as this will allow the user to identify faults more easily 3 4 1 2 TMC Manual Control Robot Tab The robot tab allows the user to manually control the robot functions To access the manual control robot tab 1 Access the manual control software as detailed in 3 4 1 Manual Control Software CPX VPX Only 2 From the TMC control screen select the robot tab Robot Cassette 1 Cassette 2
202. n Disable Interlocks then click Open Click on the gas line s Gas Out valve and choose Manual Mode Click on Disable Interlocks then click Open Click on the gas line s MFC and choose Manual Mode then click on Disable Interlocks Click Flow On and set the flow rate to 10096 of the MFC maximum 4 69 Service Manual Maintenance 4 10 2 Service Manual 7 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 SPTS AN SPP COMPANY Click on the gas line s Gas In valve and choose Manual Mode Click on Disable Interlocks then click Open Note Ensure that the MFC displays a flow rate and that the flow rate starts to fall This will prove that the MFC is connected and is allowing gas to flow The system will now start to pump out the gas line to the wall source isolation valve Wait until the gas line s MFC reads 0 SCCM and the chamber reaches base pressure After base pressure has been reached leave the system pumping for at least eight 8 hours or preferably overnight Note the chamber has not reached base pressure after 30 minutes investigate the gas line for a leak Using the chamber mimic page close all the gas line s valves Click on the gas line s MFC and click Flow Off Click on the Return To Automatic button Perform a system gas line Leak Check procedure Note If the leak up rates do not meet permitted parameters investigate before proceeding Perform
203. n RF2 Forward Power Platen RF2 Reflected Power Electromagnet Power Supply 1 Current Monitor Electromagnet Power Supply 1 Voltage Monitor Electromagnet Power Supply 2 Current Monitor Electromagnet Power Supply 2 Voltage Monitor Platen LF Pulse Generator Process Data Input Platen LF Pulse Generator Process Data Output 2 22 Version 2 4 P TS Control System and Power System Distribution AN SPP COMPANY 2 2 5 Coil RF Spectrum Generator Node 02 Node 02 consists of an I O pod located on the side of the electronics rack providing the I O for the spectrum generator Further details can be found in the manufacturer s literature E E A 2 5 E Figure 2 22 Node 02 Coil RF Spectrum Generator The pod contains the following I O I O Type Point Description Analogue Out Power Setpoint High d Power Setpoint Low Pulse Time High Pulse Time Low Power Ramp Rate High Digital Out 1 HF Power On Off Remote Enable Levelling Mode Pulsing Enable Microsecond Millisecond Fault Clear Spare N O OF A C PD Spare Analogue In Forward Power Reverse Power Version 2 4 2 23 Service Manual Control System and Power System Distribution SPTS AN SPP COMPANY Digital In HF On off Setpoint Reached Not Reached Temp Status Remote Enabled Disabled Interlock Status Fault Present Spare Spare Service Manual 2 24 Version 2 4 S DP TS Control System and Power System Di
204. n the text field Flow Off Closes the MFC to stop the flow Resets the device in the event of a device failure 3 21 Service Manual Manual Control and Software Utilities SPTS AN SPP COMPANY 6 From the control panel select the Tolerances tab the following screen is displayed Flow Tolerance Above setpoint alarm BEES Above setpoint warning ME sccm Below setpoint warning EE sccm Below setpoint alarm Cr RE a BEES suomne1iad arel o e E e Figure 3 21 Typical MFC Tolerances Screen 7 Enter the above and below setpoint warning and alarm gas flow thresholds 8 Select the show graph button if required to graphically show the gas flow measured over time in relation to the selected warning and alarm limits Note An alarm will stop the operation in progress warning will allow the current operation to continue but will alert the operator to the fact the system has encountered an error 9 Selecting the Statistical Data tab displays statistical data about the selected device 3 2 8 Matching Unit Manual Control This option allows the user to manually operate the matching unit 9 enuey ESES Manual Auto Load Matchin Fixed Tun Fixed mes SE Load Position avel Tune Position 4 Lo Interlocks Figure 3 22 Typical matching Unit Manual Control Screen To allow the matching unit to be op
205. nbi C True 11 0H 45 PIC her xri Dead 1 Cs Tei True 1 SOIT Cen SE t Pro Job Th True 11 08 46 18 nian 1 04 50 0 5 PMCS PRACT PE nf 11 68 55 i PA C e te 1204 50000 L FracerTob Test Tru Er r TESS Pere 1 Pa PE ob ent Frocest dob Tesi TrusT Pee d pid 0 11205 heuer Clearing Actes Seren Dc Tuch 1120851 1 pote de T3 PO 11 02 08 39 TMC TBAT su nfo e d 11 05 07 488 1 Changed Srane 66 guit futher vas gmon M opk ana rumes dep wies Task spate rues eed ciuibus DUO 14 47 107 gt eee ranas eae Test gt cpu rere pes adi Figure 3 78 Typical Scheduler Log Screen 3 Select the log tab at the bottom of the screen Note The log screen remains the same irrespective of whether the scheduler TMC or chamber tabs are selected from the options at the top of the screen Note To change the logging options refer to 3 4 3 4 Scheduler Options Version 2 4 3 67 Service Manual Manual Control and Software Utilities TS AN SPP COMPANY 3 4 3 2 Scheduler Mimic The scheduler mimic displays the position and status of substrates within the system the status of the transfer gates and cassette module doors and a map of the cassettes To view the scheduler
206. ncluding the operation of the gas Nupro valves and is located in the bottom of the gasbox The node consists of a valve island manufactured by Norgren Further details of the valve island can be found in the manufacturers literature Figure 2 27 Node 08 Norgren Valve Island Gasbox Control The following is located within the valve island I O Type Point Description Digital Out The actual configuration of each customer s gasbox pneumatics will be entirely dependant upon the processes to be run Please refer to the system specific gas schematic drawing supplied in the drawings folder for precise details on the gasbox pneumatic arrangement ON O N 10 V O fF W N Service Manual 2 36 Version 2 4 S DP TS Control System and Power System Distribution AN SPP COMPANY 2 2 11 Platen Chiller Node 09 The platen chiller is connected directly into the device net loop Further details of the chiller can be found in the manufacturers literature Version 2 4 2 37 Service Manual Control System and Power System Distribution lt gt TS AN SPP COMPANY 2 3 Power Distribution Certain system configurations require the use of a power distribution unit PDU To route power to each process module s electronics rack CUSTOMER SUPPLIED POWER CABLE
207. ned to the cassettes between process steps if no buffer holding station is available Scheduler Manual Control The scheduler allows the user to manually control the following components of the system e Scheduler to run tool process jobs Cassette to perform common cassette operations manually Chambers to run individual processes manually Arm to perform transfer operations and run common transport module operations 3 73 Service Manual Manual Control and Software Utilities lt P T S AN SPP COMPANY To access the scheduler manual control options 1 Access the scheduler as described in 3 4 3 Scheduler 2 A screen similar to the one shown below is displayed STS Pro Scheduler 6 5 0 scheduler 1 scheduler2 PEG2 PEG3 Cassette Cassette2 0 Q x Xx Rescue Reset Scheduler Station OBEM State Service State Behaviour State Machine State Last Event Client State Job Flags ToolJobID PEG2 Idle InService InitialisingBehaviour Cassette1 TRJobs PEGS Idle InService InitialisingBehaviour Cassette2 TRJobs Cassette 1 Idle InService InitialisingBehaviour RobotArm TR Jobs Cassette 2 Idle InService InitialisingBehaviour PMC2 PRJobAdmin Arm Idle InService InitialisingBehaviour PMC3 PR JobAdmin Aligner Idle InService InitialisingBehaviour ToolJob dmin ToolJobAdmin2 Log Mimic Options Alarms Tool Status sche
208. nes chiller and associated pumping lines No attempt has been made to detail overhaul procedures relating to original equipment manufacturers OEM proprietary items e g vacuum pumps chillers etc Reference should be made to the manufacturer s documentation for full details of the maintenance requirements for such items It is assumed that maintenance personnel are conversant with good engineering practices and are familiar with basic mechanical electrical and electronic principles It is also recognised that experienced personnel will evolve their own methods and working practices and that the instructions given here will be used as general guidelines only CAUTION The fitting of components not supplied by SPTS other than OEM Original Equipment Manufacturers approved parts or the unauthorised modification of any part of this equipment may invalidate the warranty TO PREVENT RISK OF INJURY ALL MAINTENANCE AND REPAIR PROCEDURES MUST BE UNDERTAKEN BY TECHNICALLY QUALIFIED PERSONNEL WHO ARE FULLY AWARE OF ALL RELEVANT SAFETY PRECAUTIONS ASSOCIATED WITH PROCESSING OPERATING AND MAINTAINING THE EQUIPMENT IN ADDITION SUCH PERSONS MUST BE CAPABLE OF OPERATING SPTS SOFTWARE The user is strongly advised not to attempt repair procedures on complex mechanical or electrical units e g matching unit printed circuit boards unless the procedure is detailed in this manual It is proposed that disassembly of such units is not carried out on sit
209. ng the buttons on the command panel Button Name Function Activates the electrostatic clamping system Deactivates the electrostatic clamping system Resets the device in the event of a device failure 5 From the control panel select the Manual Setpoints tab the following screen is displayed em Decamp ingre x Figure 3 9 Typical APC Position Tolerances Screen 6 Enter the clamp voltage and clamp ramp time values 7 Selecting the Statistical Data tab displays statistical data about the selected device Version 2 4 3 13 Service Manual Manual Control and Software Utilities lt PTS AN SPP COMPANY 3 2 4 Electromagnetic Generator Manual Control This option allows the user to manually operate the electromagnet Outer EM Coil ua 74 Siopping Figure 3 10 Typical Electromagnetic Generator Manual Control Screen To allow the generator to be operated manually 1 2 3 4 5 From the Manual view select the Process Module tab From the mimic screen select the electromagnetic generator Select the manual mode control button Select whether interlocks are to be enabled or disabled Enter the required generator current in the text box The following options are activated using the buttons on the command panel Button Name Switches the generator on Generator Off Switches the generator off Resets the device in the event of a device failure Service
210. nia eal valu s valide Tru lait rr rs f description keys PR PTB ZPu l au value Pump to Base valide True Vasterror J Timeout keys PR PTH 5Pu 1 fPTUTIm valuss H valid Falge lagterrore H iz below minimus value of BO gt main at Base Time keys PR SPu 1 fEemaln tBaseTime z value 5 valides True lasterrora 7 eratiunTypa PRIJOhAdwin pp noperationType z values valides Trua lagtarra re perarioninsr keys Pe PRinbh ndmin amp Pu sp n perarioninsrance z value 0 valides True lasterror leranee Linker kaye PRJ hAdsln sPu i nT llnitancas 2 valuss valides Trua perationType keys PC PR3DhAdmin Pu sp noperariontype s value 0 valides True lasterrore Operatinnrnit PRIJOhAd in zPu ip noperattionrinitance I values valide Trua lagterr Tolerance Linker key PHC PRinhAdmin Pu sp nTolinztance 3 value O valide True lasterrore operatiunTypa PRIJOhAdain noperationType 4 values valids Trua lagtarra re perationinzr keys buc Ph3pDhAnmin sp n perarioninsrance 4 waluss 0 valides True lasterror Tolerance Linker kaeys PMC PRIOhAdmIn sPu p nTo lrnitancs 4 values valides True laitarra re Jh perationType keys buc 1 n perationType 5 valu
211. non hazardous gas lines If it is required to disconnect the non hazardous gas line from the SPTS gasbox proceed as follows 13 1 Ensure the non hazardous gas line wall source isolation valve has remained SHUT and locked 13 2 Disconnect the non hazardous gas line from customer connection point to the SPTS gasbox 13 3 Cap the disconnected non hazardous gas line complete with 0 25 VCR plain gasket Hazardous Gas Lines 1 Version 2 4 Review the Guide to a Safe Way To Work 4 65 Service Manual Maintenance lt T lt AN SPP COMPANY CAUTION To prevent cross contamination of gas lines always decommission gas lines individually Perform a system Pump to Base procedure Shut the hazardous gas line wall source isolation valve 4 Using the chamber mimic page click on the Manifold Valve and choose Manual Mode Click on Disable Interlocks then click Open 5 Click on the gas line s Gas Out valve and choose Manual Mode Click on Disable Interlocks then click Open 6 Click on the gas line s MFC and choose Manual Mode then click on Disable Interlocks Click Flow On and set the flow rate to 10096 of the MFC maximum 7 Click on the gas line s Gas In valve and choose Manual Mode Click on Disable Interlocks then click Open Note Ensure that the MFC displays a flow rate and that the flow rate starts to fall This will prove that the MFC is connected and is allowing gas to flow 8 The system will now start
212. ntial The KL3064 version combines 4 channels in one housing The run LEDs give an indication of the data exchange with the bus coupler KL35064 4 CHANNEL ANALOGUE INPUT 0 10V E RUN LED 5 5 RUN LED2 B 20 RUN LED3 LED4 N2 IN3 OO IN4 GND GND SHIELD SHIELD iu Figure 2 7 KL3064 Analogue Input 0 10V 2 2 2 5 KL3204 PT100 Input RTD The KL3204 analog input terminal allows resistance sensors to be connected directly The bus terminal s standard settings are Resolution 0 1 C in the temperature range of PT100 sensors The error LEDs indicate sensor faults e g a broken wire The KL3204 version combines 4 channels in one housing KL5204 4 CHANNEL PT100 INPUT RTD Ho L ERROR LEDI ERROR LED2 leon ERROR LED3 7 PP ERROR LED4 TRI OOP R2 81 00 R2 Figure 2 8 KL3204 PT100 Input RTD 2 2 2 6 KL3002 Analogue Input 10V to 10V The KL3002 analog input terminal handles signals in the range from 10 V to 10 V The voltage is digitised to a resolution of 12 bits The input channels of the bus terminal have differential inputs and p
213. ntified within the processor program Steady Green LED Force override is in operation for example overriding interlocks Flashing Green LED Processor is communicating with the System nodes Steady Red LED Processor Internal Battery has failed and needs replacing Steady Green LED Processor is operating correctly Keyswitch In RUN Position Processor is controlling system This is the normal operating position and the key can be removed In REM Position Processor is being run from a remote station allowing data to be up and down loaded to a remote workstation In PROG Position Processor is not running the system and is being programmed by an external workstation Service Manual 2 16 Version 2 4 SPTS Control System and Power System Distribution AN SPP COMPANY 2 2 3 3 Devicenet Card The device net card allows the Control Logix processor to communicate with the system nodes The following indicators are located on the front panel DEVICEMET LED DISPLAY MODMET 10 E Figure 2 19 Devicenet Front Panel Indicator Description LED Display Messages Displayed The LED display informs the operator of the status of the Devicenet card During normal operation the display will indicate RUN but should a fault condition occur the display will indicate a fault code Details of these fault codes can be found within this section Modnet Steady Green LED Monitors the state of the nodes If a node becomes un
214. o be taken from the cassette aligned and returned if no process module is available to accept the substrates reducing throughput time when the process chambers become available Cassette ID Text Field Change the separator value if required between Separator the cassette name and substrate name as shown below cassette name gt lt seperator gt lt substrate name gt Note The default value is Disable Alignment Drop Down Box From the drop down box select true to disable Before VCE Entry aligning of substrates before entry to the VCE during sequence execution Only enabled when Alignment is set to Always Disable Alignment Drop Down Box From the drop down box select true to disable Between PMCs aligning of substrates between PMs during sequence execution Only enabled when Alignment is set to Always Enable Swaps Drop Down Box From the drop down box select true to enable the Scheduler to perform swapping operations Note Only used on systems with bisymmetrical arms Optimise Carousel Down Box From the drop down box select true to enable Unloads the Scheduler to remove any unnecessary carousel unloads Optimise Chamber Drop Down Box From the drop down box select true to enable Reloads the Scheduler to remove any unnecessary chamber unloads Use Cassettes as Drop Down Box From the drop down box select true to allow Buffer Stations the substrates to be retur
215. obS Ic Cassette2 TRIJobS RobotArm TRIJobS PMC2 PRJobAdmin PMC3 PRJobAdmin Last Event Entry Entry Entry Entry Entry Entry Client State JobFlags ToolJobID 1 ToolJobAdmin2 Entry Figure 3 88 Typical Chamber Manual Control Screen 3 The manual control buttons are located at the top of the screen as shown below scheduler scheduler 2 PEG2 PEG3 Cassette 1 Cassette 2 Figure 3 89 Chamber Manual Control Buttons Selects a process recipe to be run in the selected process chamber When the process button is selected the following dialogue is displayed Jl A Cancel From the drop down menu select the required process recipe to be run Select the OK button to begin the process recipe Pause Pauses the process recipe Resume Resumes the process recipe Note An aborted tool recipe can not be resumed 3 4 3 5 3 Chamber Tab Manual Control To access the chamber manual control option Control 2 A screen similar to the one shown below is displayed STS Pro Scheduler v6 5 0 scheduler 1 scheduler 2 PEG3 Cassette 1 Cassette2 Arm x Process OBEM State Service State Behaviour InService InitialisimgBehaviour InService InitialisimgBehaviour InService InitialisingBehaviour InService InitialisimgBehaviour InService InitialisingBehaviour InService InitialisinqBehaviour ToolJobAdmin Log Mimic Options Alarms Tool Status scheduler 1 Status scheduler 2
216. ocation where the substrate is to be created d Select the slot number in which the substrate is to be created the aligner robot arm and chamber only have an option of 1 for the slot number 4 Enter the substrate ID if required 5 Select the present check box 6 Select the aligned check box if the substrate has been pre aligned 7 From the drop down lists select the substrate size and process state 8 Select the Apply button 3 4 1 8 2 To Delete a Substrate Select Current Details Populate All Clear All lv Present O Aligned Substrate Size 2mm Location Substrate State Unprocessed i Apply Figure 3 62 Typical TMC Delete Substrate Options 1 Access the substrate map editor as described in 3 4 1 8 Substrate Map Editor Tab 2 Select the location where the substrate is to be deleted Service Manual 3 58 Version 2 4 S TS Manual Control and Software Utilities AN SPP COMPANY 3 Select the slot number in which the substrate is to be deleted the aligner robot arm and chamber only have an option of 1 for the slot number 4 Deselect the present check box 5 Select the Apply button 3 4 1 8 3 Fully Populating All Locations This option allows the user to create substrates in all the available slots in all locations Note In order to create substrates within the cassette module the cassette must be present and the map must be valid Before creating substrates within a cassette ensur
217. olid should be considered with a view to establishing further treatment for environmentally appropriate disposal Liquid and solid wastes may need to be referred to specialist disposal contractors Where the incineration process results in the formation of particulate matter further treatment in the form of filtration water spray or other techniques for removing particles from gas should be used before discharge of the gas to atmosphere or if the gas remains an environmental hazard the next treatment process P 25 Preliminary SPTS 2 Chemical scrubbing Some reactive gases can be absorbed by a suitable liquid or solid state chemical scrubber Designs can include scrubber liquid baths into which the waste gas is bubbled pumped scrubber liquor systems involving packed columns and or spray nozzles to improve gas liquor contact and packed solid reagent beds into which the waste gas is passed The chemical reagents used in all such equipment shall be closely monitored to ensure continued efficiency The spent scrubber liquid or solid will require disposal in an environmentally acceptable manner 3 Absorption Some waste gases can be absorbed onto suitable materials such as charcoal molecular sieve and chemically impregnated absorbent These are often appropriate for localised equipment or gas cabinet exhaust treatment but usually still exhaust into a main duct leading to a main scrubber to ensure absolute risk minimisation Again
218. ons selected by means of a KVM switch but not from both simultaneously Control of the Service Manual 1 20 Version 2 4 SPTS Introduction AN SPP COMPANY system is achieved by setting the desired operator station as the master with the other station automatically defaulting to slave Note If the system is currently performing an operation e g a substrate transfer the system will wait until the operation is completed until an exchange of control is allowed 1 4 2 Industrial PC Operator input from the operator station is fed to an industrial PC located within the CTC cabinet CPX VPX or loadlock MPX running the RS Logix Software 1 4 3 Control Logic Programmable Logic Controller PLC The Control logic PLC is located in a drawer in the electronics rack The PLC consists of the following components Power Supply 555 Logix Controller e Ethernet Card e DeviceNet Card DeviceNet Power Supply wale 555 Logix Controller Ethernet Card Figure 1 15 Control Logix PLC The control system is explained in greater detail later in this manual 1 4 3 1 555 Logix Controller The Logix controller provides the central control for the system The unit controls I O located on nodes throughout the system 1 4 3 2 Ethernet Card The ethernet card allows the PLC to communicate with the industrial PC 1 4 3 3 DeviceNet Card The DeviceNet card allows the PLC to communicate with the system nodes Note A Multi Vendor Interfa
219. operation if the pause function is activated Note Once the required buttons have been selected the system state can be viewed in the ARAMS indicators 4 Select whether the robot communications are to be logged e The State tab displays information on the current state of the robot 6 Enter the intercommand delay if required Note The intercommand delay is a preset delay set at 200 milliseconds before the system returns to an idle state after the operation is completed The purpose of the delay is to stop errors being raised when the OEM software reports a busy state when the system is in fact idle This value should only be changed to eliminate a cause when the above mentioned error is being experienced 7 Select the Setup tab located below the indicators 8 The following options are displayed General Block Arm Speed Enter the speed of the robot arm Fast Medium or Slow The default is Fast Note This setting should only be changed under instruction from SPTS Wafer Sensors Select whether the substrate sensors are to be enabled using the check Enabled box CAUTION Disabling the sensors can cause damage to the substrates Station Overrides Block Enter the station to which the override will apply When ticked the named station is overridden Post Position Enter the angle of the post position Aligner Substrate Detect Allow Map When ticked the aligner substrate map will be updated with
220. ossess a common internal ground potential The KL3002 version Service Manual 2 10 Version 2 4 Control System and Power System Distribution SPTS AN SPP COMPANY combines two channels in one housing The light emitting diodes give an indication of the data exchange with the Bus Coupler KL5002 2 CHANNEL ANALOGUE INPUT 10V 10V ACs RUN LED1 5 RUN LED2 H O IN2 N1 O IN2 GND GND SHIELD SHIELD H Figure 2 9 KL3002 Analogue Input 10V to 10V 2 2 2 7 KL3312 2 Channel Thermocouple Input The KL3312 analog input terminal allows thermocouples to be connected directly The bus terminal s circuit can operate thermocouple sensors using the 2 wire technique The error LEDs indicate a broken wire Compensation for the cold junction is made through an internal temperature measurement at the terminals The KL3312 can also be used for mV measurement 99127 2 CHANNEL THERMOCOUPLE INPUT Ir C E RUN LED 6 Cg RUN LED2 ERROR LEDI 2 gt gt ERROR LED2 HTC1 OO TC2 TC1 TC2 SHIELD SHIELD uO
221. ote Maintenance work should only be carried out after consulting the safety procedures that are applicable to the work needed to be done on the system to rectify the fault 4 11 Service Manual Maintenance lt T lt 4 5 1 4 5 1 1 Service Manual AN SPP COMPANY Start up after an Emergency Stop There are two procedures that must be completed following an EMO event Electrical and Mechanical start up System Initialisation Electrical and Mechanical Start up AN EMO EVENT CAN RESULT IN TRAPPED PROCESS GASES THESE MUST BE PUMPED CLEAR BEFORE ATTEMPTING TO VENT THE PROCESS MODULE BEFORE RESTART ENSURE THE CAUSE OF THE EMO HAS BEEN RECTIFIED AND THAT SUBSTRATES AND OR TRANSFER ARMS ARE NOT GOING TO BE TRAPPED IN THE TRANSFER GATES ON STARTUP IF THERE IS ANY DOUBT ON HOW TO PROCEED CONTACT SPTS DIRECTLY FOR ASSISTANCE 1 Reset the Emergency Stop EMO button Note Steps 2 to 5 are only for systems supplied with a Power Distribution Unit PDU 2 On the PDU ensure that CB12 Safety Circuit is on and that all EMO buttons are pulled out also check the visual indicators on SPD1 surge protection If any of the indicators are red then that device must be replaced Turn the main isolation handle CB11 to ON The isolator handle should now lock into the ON position If it does not 4 1 Turn the isolator handle to the yellow Tripped zone and hold it there 4 2 Check that lamp XL 1 is lit If XL1 i
222. ote The emulation and debugging options do not appear unless the TMC is running in emulator mode 3 4 2 5 TMC Trace Screen The TMC Trace screen allows the user to view a graph of the pumping and venting of the transport module This function also allows the user to change the parameters of the display To access the TMC Trace screen 1 From the Task Bar double click the Transport Module Controller icon Version 2 4 3 63 Service Manual Manual Control and Software Utilities SPTS AN SPP COMPANY 2 Select the Trace tab from the TMC software as shown below TMC v8 0 16 0 Save Graph Enable Graph Continue Auto 0 750 Torr 0 20 Torr 0 1 Torr Log States Options Trace Config 1 0 Misc 12 Sep 2008 10 55 06 Figure 3 71 Trace Screen 3 4 2 6 TMC Config Screen The TMC Config screen allows the user to view the current configuration of the system To access the TMC Config screen 1 From the Task Bar double click the Transport Module Controller TMC icon 2 Select the Config tab from the software as shown below Name Value States Options Trace Config 12 Sep 2008 10 54 01 Figure 3 72 TMC Config Screen 3 4 2 7 TMC IO Screen The TMC IO screen allows the user to view the current state of the system and also to manually operate system components Service Manual 3 64 Version 2 4 SPTS AN SPP COMPANY 3 4 2 8 Version 2 4 Manual Control and Software Utilities Note To
223. ped through In the KL2408 model the outputs are supplied by the 24 V power contact KL2408 8 CHANNEL DIGITAL OUTPUT 24V KL2488 8 CHANNEL DIGITAL OUTPUT 24V WITH OUTPUTS SWITCHING TO OV Figure 2 12 KL2408 KL2488 Digital Output 24V 2 2 2 10 KL2612 2 Channel Relay Output 24V The KL2602 output terminal has two relays each of which has a single contact The relay contact is connected to the power contacts which are suitable for use at up to 230 V AC and can be generally used for switching devices requiring mains power The bus terminal indicates Service Manual 2 12 Version 2 4 Control System and Power System Distribution SPTS AN SPP COMPANY its signal state by means of a light emitting diode The KL2612 and KL2622 bus terminals have potential free contacts The power contacts are not looped through KL2612 2 CHANNEL RELAY OUTPUT 24V WITH CHANGE OVER CONTACTS Figure 2 13 KL2612 2 Channel Relay Output 24V 2 2 2 11 KL2502 2 Channel PWM Output 24 V 3020 Version 5V The KL2502 output terminal modulates the pulse width of a binary signal and outputs it electrically iso
224. process with a dummy substrate on the electrode OPENING THE PROCESS CHAMBER CAN EXPOSE PERSONNEL TO POTENTIALLY HAZARDOUS TOXIC SUBSTANCES THE PRECAUTIONS YOU USE MUST BE SUITABLE FOR THE APPLICATION AND MUST ADHERE TO YOUR LOCAL LAWS AND WORKING PROCEDURES Vent up the process chamber Disassemble the source by following the procedure detailed in 4 9 1 If fitted remove the aperture and tripod kit Remove the platen shields Remove the electrode clamp um r Sq 9 Weighted clamp removal TD ESC clamp removal 6 1 If weighted clamp remove the six M4 screws and remove the electrode clamp 6 2 If TD ESC remove the six M5 screws and remove the electrode clamp This completes the disassembly procedure Quick Clean Optional Cleaning 1 4 If necessary clean the lower chamber block Note Contact SPTS for the actual cleaning procedure to follow If necessary replace the lower chamber body viewports with clean or new parts see 4 8 3 If necessary using IPA and cleanroom wipes perform an electrode clean Note and cleanroom wipes do not remove all of the deposit contact SPTS for further information on cleaning the electrode Clean all O ring seal faces Quick Clean Reassembly Before reassembly replace all used O rings fixings and grub screws with new or clean versions i Fit the new or clean electrode clamp and secure it using six M4 weighted clamp or six M5 TD ESC screws
225. r with the environmental amp safety manager must be informed immediately and the area cleared of personnel depending on the liquid released PPE may be required Collect the spillage kit and immediately surround the spillage with the absorbent cloths pillows etc until the spillage has been contained Obtain the MSDS and read the section which relates to emergency release measures The MSDS will also give you the relevant information on the chemical make up of the liquid Clean up the spillage as quickly as possibly by following the instructions on the MSDS Further information can be obtained by speaking with the environmental amp safety manager The MSDS will also inform you of what disposal methods may be required Some liquids do not mix with water and by adding water to dilute the spillage the following may occur fumes or an acidic liquid NEVER add water to a liquid spillage unless you have consulted the MSDS first Using the correct PPE As stated on the MSDS clean up the contaminated absorbent and place into the empty Spillage Kit Label the spillage kit stating that the kit has been used for a liquid spillage Together with this place a copy of the MSDS onto the outside of the container Inform site services as soon as the clean up procedure has been completed so they can arrange for collection of the spillage kit into the designated holding area Hemember to inform site services of the location of this used spillage kit Inform the
226. rarioninst keys PC Pe obAdmin_ Zhu sp lontnstanca 1a values valides True lasterrors j accaiipathe PMC2 names Tolerance Linker kinys PRMZ PRJ hAdmln SPU tp nTallnitance 19 valuas valide Tru lait rr rs f i Tags Figure 3 96 Tags XML File 12 The information for the individual tags is defined as follows Tag Access The device to which the particular variable is applicable for example Path 2 the process module controller program for process module number 2 Key Key The command line for that tag The value within the process recipe for that variable Valid Indicates whether the value within the recipe is within acceptable limits where the value is false an error will be generated Lasterror A description of the error when the valid value is false Version 2 4 3 81 Service Manual Manual Control and Software Utilities lt S 3 4 5 Service Manual AN SPP COMPANY 13 An example of an error is as follows Tag accesspath PMC2 name Tolerance Linker key PMC PRJobAdmin sPu sp nTolInstance 1 value 0 valid True lasterrorz rag ate ld name Base Pressure keys PR PTB SPu 1 fBasePressure P value Q valid True gt th PMc2 name prions 8 PR _ 5 1 au astepName Pump HELM valid True Jasterror Cy ath 2 R il S 8 fa as 5 below minimum value of 30 gt
227. rd tool kit Parts Required Process pressure gauge O rings Associated Procedures Safety section in the preliminary To change the O rings 1 Refer to Figure 4 13 2 Hemove three M6 x 20 screws 1 and washers 2 and remove the process pressure gauge assembly Dismantle the assembly and remove O rings 3 amp 5 and carriers 4 amp 6 Remove and discard the rings from the carriers then clean the carriers using Fit new O rings to the carriers then reassemble the process pressure gauge assembly Ur d Refit the assembly to the chamber using screws 1 and washers 2 Figure 4 13 Process Pressure Gauge Assembly Version 2 4 4 37 Service Manual Maintenance lt P T S AN SPP COMPANY 4 8 9 Roughing Gauge O Ring Issue 1 0 Date April 2007 The roughing gauge assembly contains one O ring Equipment and Materials Standard tool kit Parts Required roughing gauge O ring Associated Procedures Safety section in the preliminary To change the O ring 1 Refer to Figure 4 14 2 Remove three M6 x 20 screws 1 and washers 2 and remove the roughing gauge assembly Dismantle the assembly and remove O ring 4 and carrier 3 Remove and discard the O ring from the carrier then clean the carrier using IPA Fit new O ring to the carrier then reassemble the roughing gauge assembly 9r X s C9 Refit the assembly to the chamber using screws 1 and washers 2 9
228. rdware S Motor Drive Board Optional KVM Switch MM Robot Digital Devices Gates Valves etc Pressure Gauge Digital Loadlock Analogue Industrial PC M Externd EPD Optional a ie Process Module Nodes wt A PMC PLC IAW Electronics Rack PLC Drawer Serial lt lt gt DeviceNet Ethernet Figure 2 3 MPX LPX Control System Overview 2 2 1 Process Module Nodes A description of each node and its function is given below Node Number o Description Allen Bradley PLC LEE LN Electronics Rack I O Pumping electromagnet and generator control Top electrode 3kW RF generator Heater Controller Chamber heater control Chamber I O Chamber gauges interlocks pumping venting and status monitoring 05 VAT Valve Control Combined APC Gate valve control Gasbox control Version 2 4 2 7 Service Manual Control System and Power System Distribution lt P TS 2 2 2 2 2 2 1 Service Manual AN SPP COMPANY 08 Valve Island Gasbox pneumatic control 09 Platen Chiller Chiller Lower electrode chiller control electrode chiller control a Chiller n MEME electrode chiller control MPX Only Not ICP The following nodes may be loc
229. red process Anti condensation Measures Nitrogen is supplied to the lower electrode RF enclosure to prevent condensation damage When the chiller temperature drops below 10 an electrically operated solenoid releases into the lower electrode RF enclosure The flow of Ns continues until the chiller temperature rises above 209C End Point Detection The process module can accommodate various types of end point detection systems including e Single Frequency Optical Emission Spectroscopy OES Scanning OES Laser Interferometry Frame The frame is used to support the process chamber and enclose the electrode lift air cylinders The frame design complies with SEMI MESC and E25 standards RF Generators The RF generators are used in conjunction with the process gases to produce a plasma that is inductively coupled at 13 56 MHz via a matching unit and coil assembly located outside the process module This provides a high density plasma capable of operating in a very wide process range Two RF generators are used one for the source and one for the platen bias Source RF Generator The source RF generator s controls and indicators are described in the manufacturer s literature Platen RF Generator The platen RF generator s output is adjustable and its controls and indicators are described in the manufacturer s literature Note There is an optional low frequency RF bias generator available for processes that requ
230. rol System The control system consists of a PLC which controls equipment via a series of nodes located around the system The actual control system differs between a CPX VPX System and a LPX MPX System This chapter details the function of each process module node individually with a description of the hardware contained within each node For details of the Transport Module nodes refer to the manufacturer s literature An overview of the CPX VPX control system is shown below TMC Handling CTC Cabinet VCE s Workstation Robot Control Box ur t Cleanroom Panel Workstation Optional Aligner Nec KVM Switch gt Optional Ethernet Hub S Transport Module DeviceNet Nodes 9 TMCPLC 5 z 1 Industrial PC CTC Cabinet Process Module DeviceNet Nodes y A PMC PLC 5 2 m Electronics Rack PLC Drawer lt lt Serial lt lt gt DeviceNet lt Ethernet Figure 2 2 CPX VPX Control System Overview Service Manual 2 6 Version 2 4 Control System and Power System Distribution SPTS AN SPP COMPANY An overview of the MPX LPX control system is shown below CTC Cabinet Workstation Cleanroom Panel Workstation Optional Loadlock Ha
231. rom the Transport Module VCEs Loadlock are closed 4 Enter the Manual Functional area in the software and click on the Process Module button then click Pump to Base Ensure that the base pressure for the PM is reached 5 Repeat step 4 for each process module if additional process modules are fitted 6 Physically inspect the Transport Module if fitted and VCEs Loadlock to ensure that the gate valves between the VCEs Loadlock and Transport Module if fitted are closed ra oet the heaters to normal processing temperatures 8 Enter the Manual Functional area in the software and click on the Transport Module if fitted button then click Pump to Base Ensure that the base pressure for the TM is reached 9 Enter Transport Module Operations if fitted and click Pump Cassette Loadlock Ensure that the VCE Loadlock reaches base pressure 10 Repeat step 8 for the second VCE if fitted BEFORE VERIFICATION OF SUBSTRATE HANDLING REMOVE ANY PROCESS SUBSTRATES AND REPLACE WITH A CASSETTE CONTAINING AT LEAST ONE TEST SUBSTRATE BEFORE CONTINUING THIS PROCEDURE A VISUAL CHECK MUST BE MADE OF EACH PROCESS MODULE TRANSPORT MODULE IF FITTED AND INLIGNER TO ENSURE THAT NO SUBSTRATES ARE PRESENT ANYWHERE IN THE SYSTEM IF SUBSTRATES ARE PRESENT MANUALLY REMOVE THEM USING THE MANUAL FUNCTION OF THE SOFTWARE SHOULD ANY AREA OF THE SYSTEM CONTAIN BROKEN SUBSTRATES THEN THE RESTART PROCEDURE MUST NOT BE PERFORMED UNTIL ALL DEBRIS HAS BEE
232. rom the VCE and places it inside a SMIF pod Locks the SMIF pod to the top of the SMIF unit Reverses the Lock operation 3 4 1 5 TMC Manual Control Core Pumping Tab The manual core pumping tab allows the user to manually control the transport module pumping system The cassette tab allows the user to manually control the transport module pumping functions To access the manual control core pumping tab 1 Access the manual control software as detailed in 3 4 1 TMC Manual Control Software CPX VPX Only Service Manual 3 52 Version 2 4 S TS Manual Control and Software Utilities AN SPP COMPANY Version 2 4 2 From the TMC control screen select the core pumping tab Enable malac Enable Mode Cumeni Command More Carceme 1 Presse 1000000 Doct Gerne Cassette 2 Pirae 1000 000 Figure 3 54 Typical TMC Core pumping Tab d The following buttons are located on the right hand side of the screen Poron Name Startup Starts the system to allow manual control to be used Resets the system in the event of a system failure Out Service Takes the selected system out of service for example if maintenance work is required to be carried out Returns the selected system to an in service mode Aborts the current operation Pause Pauses the current operation This option is dynamic and the Pause button will change to a resume button to resume the operation if the pau
233. round task The application logs two principle categories of information which will be referred to as Events and Data An event is any discrete action on the tool Examples of this are opening or closing of control valves substrate actions the issue of a warning or error pump to base start process etc Maintenance activities are logged as events Data refers to any continuous variable whose value is sampled on a time 3 39 Service Manual Manual Control and Software Utilities lt TS 3 3 4 1 3 3 4 2 3 3 4 3 3 3 4 4 Service Manual AN SPP COMPANY basis Generally these will be parameters associated with the process modules Events may also have data associated with them which should be logged with the event For example a pump to base event should record how long it took to achieve base pressure Each and every variable to be logged has its logging parameters specified individually This should is achieved by means of a logging recipe The application provides a means of creating the logging recipes and storing them in a database Logging Recipes A logging recipe specifies a complete set of all variables which are to be logged For each of these variables the logging recipe will specify the logging parameters according to one of the following schemes e The variable is logged on change The change value should be between 0 01 and 100 of full scale To avoid too much or too little data for variables which change rapidl
234. rs using the command SET R_MT SENSE LIMITS INNER inner value OUTER outer value WAFER SIZE wafer size 4 86 Version 2 4 SPTS AN SPP COMPANY 4 10 10 3 Version 2 4 4 Maintenance For example SET R MT SENSE LIMITS INNER 10000 OUTER 20000 WAFER SIZE 150000 configures a window of 20mm 10mm in from the edge of the substrate for 150mm substrates Save the current settings using the command STORE R MT SENSE ALL Setting Up Station Level Motion Sensing Parameters 1 Enter the command RQ STNSENSOR stn ALL to receive the current settings of the substrate detect system for the station specified by the stn parameter Make note of the ACT sensors active state and SEN sensor I O bit number to which the sensor is connected parameters With a substrate on the end effector move the robot arm to face the station being configured Ensure the gate for that station is open otherwise an interlock will prevent extension of the robot arm Extend the robot arm slowly until the substrate just breaks the beam of the sensor in question This position should NOT foul any of the gate valves in the system Make note of the radial co ordinates of the arm at this point Note On CPX systems tested 150mm substrates were detected successfully at H 250 000 Normally theta axis modification is not required at this point however if it is make note of the theta location Retract the arm to a safe position If no theta
235. rvice and installation engineers Subsequent system starts should only be made after a thorough inspection of the system to ensure that it is safe to do so Start Up Procedure Use the following procedure to switch the system on 1 owitch on the water supply and check for leaks 2 owitch on the compressed air supply at the isolation tap and check that the correct pressure is set 3 owitch on the nitrogen and helium supplies BEFORE SWITCHING ON THE GAS LINES FOR THE FIRST TIME OR AFTER ANY SERVICE WORK HAS TAKEN PLACE IN CONNECTION WITH THE GAS LINES CHECK THE GAS LINES OPERATION IF YOU ARE IN ANY DOUBT ABOUT HOW TO PROCEED CONTACT SPTS FOR HELP 4 Ensure that the process gas isolation valves are turned on 5 owitch on the customer power supply Note Steps 6 to 9 are only for systems supplied with a Power Distribution Unit PDU 6 On the PDU ensure that CB12 Safety Circuit is on and that all EMO buttons are pulled out Turn the main isolation handle CB11 to ON The isolator handle should now lock into the ON position If it does not 8 1 Turn the isolator handle to the yellow Tripped zone and hold it there 8 2 Check that lamp XL 1 is lit If XL1 is not lit then re check that the customer power supply is switched on If XL1 is lit re check to ensure that all EMO buttons are pulled out AFTER CARRYING OUT THE TASKS IN THE NEXT STEP STEP 9 ELECTRICAL POWER WILL BE RESTORED TO THE SYSTEM AND LETHAL VOLT
236. s SPTS AN SPP COMPANY Note The log level defaults to a value of 1 lowest level The level can be set to a higher level if required by either entering the logging level or using the up and down arrows SPTS recommends that the log level remain at 1 as this will allow the user to identify faults more easily Version 2 4 3 49 Service Manual Manual Control and Software Utilities lt TS 3 4 1 3 Service Manual AN SPP COMPANY TMC Manual Control Cassettes Tabs The cassette tab allows the user to manually control the cassette functions To access the manual control cassette tab 1 3 Access the manual control software as detailed in 3 4 1 TMC Manual Control Software CPX VPX Only From the TMC control screen select the cassette tab Cassette 1 Cassette 2 Core Pumping Cassette 1 Pumping Cassette 2 Pumping PMCS Substrate Map Edtor v Enable Interface J Enable Passthrough Mode Current Command None Power Down Initialisation ILICE Out Service perational In Service Iesus Log Comms Traffic Idle with Alarms 2 ool Command Cassette Status E S lv Substrate Slip Door Blocked O Cassette Present C ATM Robot Extended 2 Slot v Platform In O At Unload Position C Map Valid Vacuum Robot Extended LES Door is Closed Execution Delay s Slot 99 Z 84500 R 0 oF Execute Last Error Intercommand Delay ms 100 EJ Log Level 1 00
237. s and Notes are used throughout this manual Warnings are highlighted by use of an international hazard symbol The following definitions of these notices are shown in the way that they are presented in the manual WARNINGS A warning is given to alert the user of possible hazards which may cause loss of life physical injury or ill health in any form An example warning is shown below POTENTIALLY LETHAL VOLTAGES ARE PRESENT IN THIS EQUIPMENT SWITCH OFF AND ISOLATE ALL ELECTRICAL SUPPLIES BEFORE REMOVING ANY COVERS TAKE PRECAUTIONS AGAINST ELECTRIC SHOCK WHEN WORKING ON LIVE EQUIPMENT WITH THE COVERS REMOVED Warnings can be considered to fall into two categories those due to hazardous materials and those due to hazardous operations Where appropriate a second international hazard symbol is used for specific hazards CAUTIONS A caution is given to alert of possible hazards which may cause damage to equipment An example caution is shown below CAUTION Consult the safety procedures and carry out those that are necessary for switching off the system NOTES A Note is used to convey or draw attention to information that is extraneous to the immediate subject of the text An example note is shown below Note The screens shown in this manual represent a typical machine and may NOT reflect the machine configuration exactly P 9 Preliminary P6 P6 1 Preliminary SPTS Safety Introduction All the Safety precautions
238. s documentation for details on how to overhaul the actuator body using the gate valve seal kit 8 Reassembly is the reverse of the above procedure Figure 4 27 Gate Valve Assembly Version 2 4 4 59 Service Manual Maintenance lt T lt AN SPP COMPANY 4 8 19 FFKM O Ring Recovery Procedure Issue 1 0 Date April 2007 Perflouroelastomer FFKM O rings can suffer from significant compression set during service This can result in a loss of sealing over time especially where they are exposed to significant thermal cycling and or where the seal is often broken for example where they are used to seal a hinged lid The compression set can usually be recovered by the application of heat Whilst recovery is not 10096 it is typically better than 9596 and in nearly all cases the degradation is not cumulative if the O ring is reused CAUTION This procedure should only carried out on O rings that have been examined for serviceability i e for wear and tear O rings that are deemed to have suffered significant damage should always be replaced System State Equipment and Materials De ionised water Clean air oven option Isopropyl alcohol option Associated Procedures Safety section in the preliminary There are two methods that can be used to perform the O ring recovery procedure however option 1 is usually the most effective Option 1 1 Place the rings in hot de ionised water at approximately 80 90
239. s for this unit are not known You may choose to use one of the calibration sets below Cal Set 1 Calibrations included m 1 Bulk Voltage Use This Cal Set 2 Forward Power ET 3 Reverse Power Calibration Options 4 Mod Vail Perform Calibration 2 Se 7 Upload to File 8 Mod Setpoint load fi Fil 9 Gamma Phase Dowload nema Fie 10 watts to Volts _ 11 Controller 078 Level Calibration Close Figure 4 50 Full Configuration and Calibration Screen In the window that now opens check the unit serial number and note this Then select Upload Current Configuration There will be a pause of approx 20 seconds as the configuration is uploaded After this time select a directory to which to save the configuration to Once saved select OK at the message The configuration was saved successfully The configuration will now be displayed Select Close This process has now uploaded the original instrument Configuration in case of loss or corruption during the configuration update The uploaded file is a MS Word file and the file name is of the form B 3013Config serial number Rev25 doc Rename the file by adding Orig between Config and the serial number to provide a backup of the original file for reference o restore Open this file Locate the parameter Interlock Fault Auto Clear Change this parameter to 1 Save the revised configuration as the same name as that uploaded from the un
240. s not lit then re check that the customer power supply is switched on If XL1 is lit re check to ensure that all EMO buttons are pulled out AFTER CARRYING OUT THE TASKS IN THE NEXT STEP 5 ELECTRICAL POWER WILL BE RESTORED TO THE SYSTEM AND LETHAL VOLTAGES WILL BE PRESENT IN THE EQUIPMENT OBSERVE ALL SAFETY PRECAUTIONS Turn on all circuit breakers except for those labelled Not Used On the electronics rack ensure that CB2 Safety Supply is on Ensure that Safety Supply lamp is lit e we pr Id Ensure that the main isolator is on If the main isolator fails to stay in the On position re check to ensure that all EMO buttons are pulled out 9 Repeat steps 6 to 8 for all process modules 10 Switch on the control PC and wait for it to load the system software 4 12 Version 2 4 S P T S Maintenance AN SPP COMPANY 4 5 1 2 Version 2 4 The system is now powered up BEFORE YOU CAN COMMENCE PROCESSING YOU MUST FOLLOW THE SYSTEM INITIALISATION PROCEDURE System Initialisation There are a number of physical checks and software checks that need to be made on the system after an EMO event 1 Log on to the system and start the CTC application Note A user with a Service Engineer profile is required when re starting the system 2 Click the Alarms button and clear the list of fault exceptions that appear Physically inspect the system and ensure that the gate valves used to isolate the Process Chamber s f
241. sation 13 4 6 Maintenance Schedules 15 4 6 1 Dally Schedule 15 4 6 2 Weekly 16 4 6 3 Monthly 16 4 6 4 Three Monthly Schedule 16 4 65 Six Monthly 16 4 6 6 Yearly Schedule 16 aA CTI T 18 4 7 1 18 ATA CIRCUIT ia 18 471 2 MPX LPX EMO Circuit Test 18 4 7 2 CPX VPX PDU Main Power Breaker 19 4 7 3 CPX VPX PDU Surge Arrester 20 4 7 4 MPX LPX RCD Device 20 4 7 5 MPX LPX PDU Surge Arrester CNeck cccccccceeeeeeeeeeeeeecaeeeeeeeeeeeesenaees 21 4 7 6 Electronics Rack Main Rotary 50 21 4 7 7 Gate Valve 21 4 7 8 Insert Heaters 22 MMO GK CNN 22 4 7 10 Foreline Leak up Rate 23 4 7 11 Temperature Zone 24 4 8 Maintenance Procedures Leere c crecer
242. se function is activated Note Once the required buttons have been selected the system state can be viewed in the ARAMS indicators 4 Select whether the core pumping communications are to be logged The following options are available Command The following options are available Pump Pumps the transport module to a pre defined base pressure Vent Vents the transport module to atmosphere Open Gate Opens the gate to the selected station Close Gate Closes the gate to the selected station Leak Check Performs a leak check on the transport module Purge Purges the transport chamber Reset PLC Resets the transport module control PLC Startup Starts up the transport module Select the robot arm as the station for all operations with the exception of the open and close gate operations where the required transfer gate should be selected 3 53 Service Manual Manual Control and Software Utilities lt PTS AN SPP COMPANY Select the execute button to perform the operation 6 Select the Misc States tab to show the gate positions on the system Select the command states tab to show the system commands and status Command States Name Cmd Flag Display State Other Active Alarm al TMO1STAu Nothing Nothing Ide Jar Nothing Figure 3 55 Typical TMC Commands States Tab 3 4 1 6 TMC Manual Control Cassette Pumping Tab The manual cassette pumping tab allows the user to manually control the cassette p
243. sert the wires and release the wire grip Gently pull the wires to ensure the wire grip is holding them firmly in position The following procedure should be followed to replace a damaged bus coupler Details of the location and function of the bus couplers can be found in Chapter 2 of this manual THIS PROCEDURE CAN LEAD TO DAMAGE TO EQUIPMENT AND POSSIBLE INJURY TO PERSONNEL IF NOT CARRIED OUT CORRECTLY THIS PROCEDURE MUST ONLY BE CARRIED OUT BY SPTS SERVICE PERSONNEL IF IN ANY DOUBT ABOUT THIS PROCEDURE CONTACT SPTS DIRECT FOR ADVICE In order to replace a damaged bus coupler the following equipment is required Terminal screwdriver To replace the unserviceable bus coupler follow the procedure detailed below 1 Figure 4 35 Bus Coupler Power Connections 4 75 Power Connections Using a terminal screwdriver remove the power and devicenet connections from the bus coupler by inserting the screwdriver into the square hole above the cables and releasing the wire grip by levering the screwdriver towards the socket containing the Service Manual Maintenance Service Manual 2 GUN diee EM SPIS AN SPP COMPANY Remove the Devicenet connection from the bus coupler Devicenet Connection Figure 4 36 Devicenet Connection Slide the bus coupler and the I O slices off the DIN rail Lift the I O slices off the bus coupler Refit the bus coupler and slices to the DIN rail Set the secondary address swit
244. ss gases It is assumed that the gas lines purge hazardous and non hazardous have been commissioned up to the customer isolation valve Service Manual 4 66 Version 2 4 S P T S Maintenance AN SPP COMPANY CAUTION The procedure is included as a guide ONLY It must be reviewed by customers facilities engineers for suitability to their particular applications TO PREVENT RISK OF INJURY THIS PROCEDURE MUST ONLY BE UNDERTAKEN BY TECHNICALLY QUALIFIED PERSONNEL WHO ARE FULLY AWARE OF ALL RELEVANT SAFETY PRECAUTIONS ASSOCIATED WITH PROCESSING OPERATING AND MAINTAINING THE EQUIPMENT IN ADDITION SUCH PERSONS MUST BE CAPABLE OF OPERATING SPTS SOFTWARE BEFORE UNDERTAKING THE FOLLOWING PROCEDURE ENSURE THE SYSTEM IS IN A SAFE CONDITION TO USE THE HAZARDOUS AND NON HAZARDOUS GAS IN PARTICULAR CHECK THAT INTERLOCKS HAVE BEEN RESTORED Version 2 4 4 67 Service Manual Maintenance Service Manual SPTS AN SPP COMPANY Purge Gas Lines Each hazardous gas line will incorporate a nitrogen purge line When this procedures specifies the hazardous gas line it means the hazardous gas line with which this purge line will be used 1 2 10 11 12 13 14 15 16 Review the Guide to a Safe Way To Work Before starting the commissioning procedures ensure that All tools and equipment for completing gas line commissioning are close to hand The purge gas line wall bottle source isolation valve is OFF Gas lines
245. ssure Click on the Purge valve and click Close Slowly open fully the nitrogen purge gas wall source isolation valve Non hazardous Gas Lines 1 2 3 Review the Guide to a Safe Way To Work Before starting the commissioning procedures ensure that All tools and equipment for completing gas line commissioning are close to hand Each gas line wall bottle source isolation valve is OFF Gas lines are connected to the gasbox Gas lines are connected to the customer s supply Perform a system Pump to Base procedure 4 68 Version 2 4 S P T S Maintenance AN SPP COMPANY Version 2 4 10 11 12 Using the chamber mimic page click on the gas line s MFC and choose Manual Mode then click on Disable Interlocks Click Flow On and set the flow rate to 100 of the MFC maximum Click on the gas line s Gas Out valve and choose Manual Mode Click on Disable Interlocks then click Open Note Ensure that the MFC displays a flow rate and that the flow rate starts to fall This will prove that the MFC is connected and is allowing gas to flow The system will now start to pump out the gas line to the wall source isolation valve Wait until the gas line s MFC reads 0 SCCM and the chamber reaches base pressure After base pressure has been reached leave the system pumping for at least eight 8 hours or preferably overnight Note the chamber has not reached base pressure after 30 minutes investigate the gas
246. stribution AN SPP COMPANY 2 2 6 Chamber Heater Control Node 03 Node 03 controls the chamber heaters and is located in the DC Panel located on the side of the chamber lo On an crois ca gt A X 4 i MET F 7 4 d i Advi Figure 2 23 Node 03 Chamber Heater Control The MLC 9000 contains the following connections Bus Controller Devicenet Connection CAN_L SHIELD Version 2 4 2 25 Service Manual Control System and Power System Distribution lt P TS AN SPP COMPANY Loop Controller Out 1 SSH 1 Lower Chamber Heater Out 1 SSH 1 Lower Chamber Heater S Out 2 SSR 2 Magnetic Confinement Chamber Not ICP Mo Out 2 SSR 2 Magnetic Confinement Chamber Not ICP Out 3 SSR 3 Insert Lid Plenum Heater OW3SSHG senUdPenmWexo Out 4 SSR 4 Pegasus Inner Heater Pegasus Only Tout 4 SSR Pegasus Inner Heater Pegasus _ 2 Cootant Sotenoid OV Lid Coolant Solenoid 24V ICP Only Not Used Not Used 6 Control RTD 4 Pegasus Inner Heater Pegasus Only Control RTD 4 Pegasus Inner Heater Pegasus Only Control 4 Pegasus Inner Heater Pegasus Only 18 GomwRTOS WseWUdPenum Oooo O QewoRTDSC WeeWUdPenm OOOO 22 Comm RTD 2 Magneti Confinement Chamber Not ICP a Comro RTD Magnetic Confinement Chamber Control RTD 1 Control RTD 1
247. substrate Updates present when a substrate is detected Edge Limit Enter the number of CCD pixels to set as the edge limit When the detected value is above this value a substrate is present below this value there is no substrate present Default Alignment Block Version 2 4 3 47 Service Manual Manual Control and Software Utilities lt TS AN SPP COMPANY Optimise Aligns When ticked the robot arm will remain beneath the aligner to allow for faster aligning Note This may hamper the alignment process because the arm can partially eclipse the CCD array when extended otatic Align When ticked static alignment is used instead of optical alignment only for systems with mechanical alignment option Max Align Enter the number of alignment retries to be performed before an alignment Retries failure error is generated Select the type of fiducial on the substrate Flat Notch or None Post Position Enter the angle of the post position 180 is the default angle 9 Select the Actions tab located on the right hand side of the screen The following options are available Command The following options are available Map Uses the substrate detect sensors located in the transport module enclosure to detect if there is a substrate on the arm Move Moves to the station as detailed in the remaining Actions options Pick Collects a substrate from the station as detailed in the remaining Actions options Place
248. sures Apart from the risk of electrical shock severe burns are possible if live conductors are touched All securing fasteners on RF panels should be refitted before using the system P14 2 Magnetic Fields The source contains strong magnetic fields Strong magnetic fields may cause pacemakers to malfunction Damage to magnetic sensitive devices bank credit cards watches etc may also result Magnetic field strength is negligible at distances over 30cm from the source P14 3 Live Works Whenever work is being carried out on live conductors suitable warning notices should be posted close to the machine to alert other people of the hazard The machine should never be left unattended Live electrical work should never be carried out by a lone worker If electrical equipment is to be isolated using a breaker tripped to a DVM must be used to ensure that the equipment is no longer energised Version 1 4 P 21 Preliminary SPTS P14 4 Uninterruptible Power Supply UPS On MPX and MACS systems an uninterruptible power supply UPS will continue to provide power to specific areas of the loadlock after an emergency off EMO and or after the main breaker is off The UPS is located in the enclosure underneath the loadlock The power is used to enable a current wafer transfer operation to complete and for the gate valve to close thereby isolating the loadlock from the process module The areas that the UPS supplies power to are
249. switches are fed from the rotary backing pump The location and control of the switches is dependant on the pump manufacturer If either of these switches is open the gas interlock chain is broken User Gas Interlock The user gas interlock has been provided to allow the customer to provide his own interlock for the gas interlock chain for example linked to a scrubber system When the interlock is not used the plug is shorted out on the rear of the PLC drawer Gate Shut A micro switch located on the loadlock to process chamber gate dealer to process chamber gate to ensure the gate is closed before gases are allowed to flow If the gate is open the gate open alarm will be displayed on the CTC Overpressure Vacuum Switch The overpressure switch located on the rear of the chamber will close once the pressure within the chamber is below 3 7 Torr If the chamber is above 3 7 Torr the overpressure alarm will be displayed on the CTC 2 42 Version 2 4 Control System and Power System Distribution SPTS AN SPP COMPANY 2 4 2 RF Interlocks The RF interlock consists of the following sensors and if any of the sensors are activated the HF generators are disabled and the process will not be allowed to continue Hinge Coil Enclosure There are switches located on the source cover to indicate when the cover is removed and a switch is sited between the magnetic confinement chamber and the source to show when the chamber is open If the cover is
250. te the chillers suomeiadQ sjulodjas enuey Uff Temperature aell Figure 3 17 Typical Chiller Manual Control Screen To manually operate the chillers 1 From the Manual view select the Process Module tab From the mimic screen select the required chiller 2 3 Select the manual mode control button 4 Select whether interlocks are to be enabled or disabled 5 Enter the required chiller temperature The following options are activated using the buttons on the command panel Button Name Switch On Switches the chiller on Switch Off Switches the chiller off Resets the device in the event of a device failure 3 19 Service Manual Manual Control and Software Utilities SPTS AN SPP COMPANY 6 From the control panel select the Tolerances tab the following screen is displayed Temperature Tolerance Above setpoint alarm Above setpoint warning js Below setpoint warning us Below setpoint alarm suone1iad 4 l o e E o D Figure 3 18 Typical Chiller Tolerances Screen 7 Enter the above and below setpoint warning and alarm temperature thresholds 8 Select the show graph button if required to graphically show the temperature measured over time in relation to the selected warning and alarm limits Note An alarm will stop the operation in progress warning will allow the current operation to continue but will alert the operator to
251. that are logged allow a sequence complete email to be sent and set substrate handling options To view the scheduler options 1 Access the scheduler as described in 3 4 3 Scheduler 2 Select the options tab located at the bottom of the screen Service Manual 3 70 Version 2 4 S P T S Manual Control and Software Utilities AN SPP COMPANY 3 A screen similar to the one shown below is displayed eredi Erase Tearing of Schedule Cranpletion Poel o Figure 3 81 Typical Scheduler Options Screen 4 The scheduler options can be modified by entering text into the fields or using the drop down boxes The options are as follows File Paths C STS Pro Debug Logfiles Recipe Files 15 51 Logging Options False False Job Server States True False False False False False False Tool Job server events False Mail Options Send Fase rj SMTP Host 127 0 0 1 SMTP Port 25 Scheduler Options align False Cassette ID Separator Use Cassettes as BufferStations False Send Mail Enable Sending of Schedule Completion E Mails Figure 3 82 Scheduler Options Change Description Method Log Files Text Field Amend the location where the debugging log files are stored on the system PC by entering the path in the text field Version 2 4 3 71 Service Manual Manual Control and Software Utilities lt
252. the fact the system has encountered an error 9 Selecting the Statistical Data tab displays statistical data about the selected device 3 2 6 Gauge Manual Control This option allows the user to manually reset a pressure gauge Process Pressure Gauge re E a Pace Figure 3 19 Typical Gauge Manual Control Screen To allow the gauge to be reset Service Manual 3 20 Version 2 4 S PTS Manual Control and Software Utilities AN SPP COMPANY 3 2 7 Version 2 4 1 From the Manual view select the Process Module tab 2 From the mimic screen select the required gauge The following options are activated using the buttons the command panel Button Name Function Resets the device in the event of a device failure Mass Flow Controller MFC Manual Control This option allows the user to manually operate the MFCs suoyqadg sjulodjas yenueyy ee Flow 899 sccm Enable Interlocks Figure 3 20 Typical MFC Manual Control Screen To manually operate the chillers From the Manual view select the Process Module tab From the mimic screen select the required MFC Select the manual mode control button Select whether interlocks are to be enabled or disabled pr ge c m Enter the required gas flow The following options are activated using the buttons on the command panel Button Name Opens the MFC to flow the required gas as entered i
253. the file itself Load The Configuration File Ei Look in E Heater config EJ STS CYD MLC9O00 cenfig mlc I T m Y Desktop cep Mu Documents Compute QUEE File name STS CVD MLCSO00 contig mle Files of type Configuration Files mlc Cancel 2 Network Figure 4 40 Load the Configuration File Screen Service Manual 4 78 Version 2 4 S P T S Maintenance AN SPP COMPANY 5 Click Open and the following screen is displayed 3 MLC 9000 System Configuration STS CYD MLC9000 config mlc File View Settings Help El Sg Installed Drivers E Available Bus Modules Loop Module 1 24660 be bmz3 co D Module be bmz3 dn on x Module be N bmz4 pb on x Mo Module be a bmz50_ei on x Module pees mb Sree om x Module BF e Available Loop Modules s D Module BOO i E x Ma Module Figure 4 41 System Configuration Screen 6 Click the Download Configuration button and the following screen is displayed Download Configuration Download configuration to a connected device tamm Port Baud Rate Parity Address Help Cancel Previous Figure 4 42 Download Configuration Screen Version 2 4 4 79 Service Manual Maintenance P T lt SPP COMPANY T Ensure the communication settings are as shown
254. the operation if the pause function is activated Note Once the required buttons have been selected the system state can be viewed in the ARAMS indicators 4 Select whether the cassette pumping communications are to be logged The following options are available Command The following options are available Pump Pumps the transport module to a pre defined base pressure Vent Vents the transport module to atmosphere Open Gate Opens the gate to the selected station Close Gate Closes the gate to the selected station Leak Check Performs a leak check on the transport module Purge Purges the transport chamber Reset PLC Resets the transport module control PLC Startup Starts up the transport module Select the cassette as the station for all operations with the exception of the open and close gate operations where the required transfer gate should be selected Don t Optimise If checked forces the Open Gate and Close Gate commands to request the selected gate to open or close even if it is already in the requested state 5 Select the execute button to perform the operation Select the Misc States tab to show the gate positions on the system 7 Select the command states tab to show the system commands and status Command States Flag Display State Other Active Alarm TMO1STAu Nothing Nothing Ide 1365 Nothing Figure 3 57 Typical TMC Commands States Tab Chamber Manual Control Tab
255. the tool Disposal Gas supply system Following decommissioning the gas lines should not contain residues that will cause exposure over the TLV However a specialist contractor should be consulted to ensure that the decommissioning procedure used will meet the minimum requirements for disposal of the pipework and valves Process chambers Following decommissioning the process chamber should not contain residues that will cause exposure over the TLV However a specialist contractor should be consulted to ensure that the decommissioning procedure used will meet the minimum requirements for the chamber s disposal Pumping system The turbo molecular pump if fitted APC HiVac foreline and backing pump may contain a build up of process residues that may be toxic or corrosive and therefore represent a contact or vapour hazard Some residues may react when exposed to atmospheric moisture Local procedures or those of a specialist contractor should be consulted before creating the decommissioning and disposal plan Some residues will require disposal within a time limit after breaking vacuum or immediate sealing in appropriate containers for later decontamination and disposal Pumps should be decontaminated and disposed of as described in the manufacturer s recommendations and in line with local practice as directed by local policy OEM Equipment All valves that are contacted by process chemicals should be dealt with as directed above All
256. to 0 5Nm 5 Repeat step 4 increasing by 0 5Nm increments until the torque reaches 2 5Nm 6 Thoroughly clean the top face of the electrode with IPA and lint free wipes 7 Wipe dry the electrode using clean dry lint free wipes 8 Use No to completely dry the electrode and remove any fibres Service Manual 4 42 Version 2 4 S P T S Maintenance AN SPP COMPANY Figure 4 17 Electrode Bellows and Stem Assembly Version 2 4 4 43 Service Manual Maintenance lt T lt AN SPP COMPANY 4 8 13 Weighted Clamp Electrode O Rings Option Issue 1 0 Date February 2010 The weighted clamp electrode and associated assemblies contain fourteen O rings used to seal various locations within the assembly System State Shutdown and vented Equipment and Materials Standard tool kit Parts Required Weighted clamp electrode O rings Associated Procedures Safety section in the preliminary Chamber leak up rate Note All the ceramics detailed in this procedure including the ceramic fingers must be cleaned before re fitting Please contact SPTS for details on the actual cleaning procedure to be used To change the O rings 1 Refer to Figure 4 18 Remove the weighted clamp basket and place it on a clean flat surface Remove centre shield 1 electrode shield 2 and outer ring 3 if fitted Refer to Figure 4 19 Remove the ceramic uniformity shield s 1 Remove six M4 x 20 screws 2 and electrode clamp ring 3
257. to be performed for the daily schedule 4 15 Service Manual Maintenance lt P T S 4 6 2 4 6 3 4 6 4 4 6 5 4 6 6 Service Manual AN SPP COMPANY Weekly Schedule Each week perform the daily schedule and in addition perform the following Checks e Verify that all gas supply pressures process gases He Ar and N5 and compressed air are within the limits detailed in the facilities interface specification e Leak up rate test see 4 10 2 Procedures There are no additional procedures to be performed for the weekly schedule Monthly Schedule Each month perform the weekly schedule and in addition perform the following Checks EMO circuit test see 4 7 1 Gate valve seal test see 4 7 7 Foreline leak up rate test see 4 7 10 Procedures Pressure gauge calibration see 4 8 1 Three Monthly Schedule Every three months perform the monthly schedule and in addition perform the following Checks There are no additional checks to be performed for the three monthly schedule Procedures There are no additional procedures to be performed for the three monthly schedule Six Monthly Schedule Every six months perform the three monthly schedule and in addition perform the following Checks There are no additional checks to be performed for the six monthly schedule Procedures e MPX LPX PDU if fitted RCD device test see 4 7 4 e CPX VPX PDU if fitted main power breaker test see 4 7 2 Yearly Schedule
258. tpoint warning and alarm position thresholds expressed as a percentage Version 2 4 3 11 Service Manual Manual Control and Software Utilities SPTS AN SPP COMPANY Note An alarm will stop the operation in progress warning will allow the current operation to continue but will alert the operator to the fact the system has encountered an error 13 Select the show graph button if required to graphically show the APC position measured over time in relation to the selected warning and alarm limits 14 81215 aggg al sue endo aei mag 2211610215 Selecting the Statistical Data tab displays statistical data about the selected device Pressure mTorr Min 432 Side 172 Avent Position Min Sid Dew Average Figure 3 7 Typical Statistical Data Screen 3 2 3 Clamping Manual Control This option allows the user to manually operate the electrostatic clamping system aseg dung Buissa2014 suomneiado Figure 3 8 Typical Clamping Manual Control Screen To allow the APC valve to be operated manually Service Manual Version 2 4 S PTS Manual Control and Software Utilities AN SPP COMPANY 1 From the Manual view select the Process Module tab 2 From the mimic screen select the ESC clamping B 3 Select the manual mode button 4 Select whether interlocks are to be enabled or disabled The following options are activated usi
259. troller heaters are under range as defined by the flags set within the heater overange controller Allows the heaters to be run if a thermocouple readout is not detected detected Interlocked with Allows the heaters to be run if no feedback from a flow detector such as a coolant flow Proteus flow switch is detected switch 10 Selecting the Statistical Data tab displays statistical data about the selected device Manually Setting Heater Zone Contactors This option allows the user to manually operate the system s heater zone contactors suomneiad avel uw C m T D T C Qr Disable Interlocks Figure 3 16 Typical Heater Contactor Manual Control Screen To manually operate the heater zone contactors 1 From the Manual view select the Process Module tab 2 From the mimic screen select the required heater zone contactor t 3 18 Version 2 4 S PTS Manual Control and Software Utilities AN SPP COMPANY 3 2 5 3 Version 2 4 3 Select the manual mode control button 4 Select whether interlocks are to be enabled or disabled The following options are activated using the buttons on the command panel Barton Name _ Switch On Closes the contactor allowing the heaters to drive Switch Off Opens the contactor switching off the heater Resets the device in the event of a device failure Chiller Manual Control This option allows the user to manually opera
260. ts the device in the event of a device failure Service Manual 3 30 Version 2 4 S PTS Manual Control and Software Utilities AN SPP COMPANY 3 2 14 Version 2 4 Backside Gas Cooling Manual Control This option allows the user to manually operate the backside cooling on the system 9 sodas jenug 891 EX Gao a8 m m wm E m Figure 3 32 Typical Backside Cooling Manual Control Screen To allow the backside gas cooling to be operated manually 1 From the Manual view select the Process Module tab 2 From the mimic screen select the backside cooling gas icon g 3 Select the manual mode control button 4 Select whether interlocks are to be enabled or disabled B Enter the backside cooling gas pressure The following options are activated using the buttons on the command panel Button Name Function Resets the device in the event of a device failure 3 31 Service Manual Manual Control and Software Utilities SPTS AN SPP COMPANY 6 From the control panel select the Tolerances tab the following screen is displayed Pressure Tolerance m Show Graph Above setpoint alarm mTorr Above setpoint warning 9 mTorr Below setpoint warning avel mTorr Below setpoint alarm mTorr ma FA uU m wo m C m Figure 3 33 Typical RF Backside Cooling Gas Tolerances Screen T Enter t
261. tte 1 Cassette E x x Transfer Pump vent Update Map Alarms Abort Figure 3 91 Scheduler Manual Control Buttons 4 The manual control buttons perform the following operations Button Name Description Transfer Selects a substrate to be transferred through the system When the transfer button is selected the following dialogue is displayed Manual Transfer From 5 1 Slat OK Cancel Select the location to transfer from and to Select the OK button to begin the transfer Pumps the transport module to transfer pressure Vents the transport module to atmosphere Maps the robot arm Service Manual 3 78 Version 2 4 S TS Manual Control and Software Utilities AN SPP COMPANY Update Map Manually allows the user to update the map of a location and add and delete substrates as required When the update map button is selected the following dialogue is displayed Update Map Location Slot Present Processed r Cancel Select the location to be edited Enter the slot number if applicable Use the check box to indicate if the substrate is present Enter the substrate ID if required From the drop down box select the substrate s process state Select the OK button to update the location map Clear Alarms Clears all the alarm errors for the selected arm Aborts the current operation 3 4 4 Recipe Downloader CAUTION T
262. two spreader plates 11 securing the turbo support plate 12 to the frame CAUTION When sliding the turbo support plate ensure that no cables or pipes foul against the frame assembly 16 Carefully slide the turbo support plate out until the loosened nuts 4 stop against front support plate 13 17 Remove twelve M10 nuts 4 that secure the turbo pump 5 to the APC valve 6 18 Slide the turbo support plate outwards until it stops Version 2 4 4 55 Service Manual Maintenance lt P T S Service Manual AN SPP COMPANY 19 Ifthe front support plate 13 is fouling against studs 7 loosen off six M10 x 20 screws 14 securing the front support plate to the turbo support plate 12 20 Remove ring 15 and carrier 16 21 Remove O ring from carrier and discard Clean carrier with IPA and fit new O ring 22 Remove O ring centre flange 17 and clean with IPA THE APC VALVE IS HEAVY APPROX 29KG SUITABLE LIFTING EQUIPMENT MUST BE USED WHEN REMOVING THE VALVE 23 Remove twelve M10 x 35 screws 18 and washers 19 securing the APC valve to the quad 250 ISO 250 adaptor 20 24 Remove the APC valve 6 and place it on a clean flat surface covered with cleanroom wipes Note Refer to the manufacturer s instructions for details on how to overhaul the APC valve 25 Remove O ring 21 and carrier 22 26 Remove O ring from carrier and discard Clean carrier with IPA and fit new ring 27 Remove rin
263. u Bu yare 197 sa2ubiajo peo Figure 3 23 Typical Matching Unit Load Tolerances Screen 7 Enter the above and below setpoint warning and alarm capacitor position thresholds expressed as a percentage of full scale 8 Select the show graph button if required to graphically show the capacitor measured over time in relation to the selected warning and alarm limits Note An alarm will stop the operation in progress warning will allow the current operation to continue but will alert the operator to the fact the system has encountered an error Version 2 4 3 23 Service Manual Manual Control and Software Utilities SPTS AN SPP COMPANY 9 From the control panel select the Tune Tolerances tab the following screen is displayed Tune Show Graph Above setpoint alarm EE gt Above setpoint warning gt Below setpoint warning 51 Below setpoint alarm 0 avea C i Figure 3 24 Typical Matching Unit Tune Tolerances Screen 10 Enter the above and below setpoint warning and alarm capacitor position thresholds expressed as a percentage of full scale 11 Select the show graph button if required to graphically show the capacitor measured over time in relation to the selected warning and alarm limits Note An alarm will stop the operation in progress warning will allow the current operation to continue but
264. ual 4 26 Version 2 4 S P T S Maintenance AN SPP COMPANY 4 8 2 Quick Clean Procedure Issue 1 0 Date August 2006 The chamber quick clean procedure involves swapping contaminated process assemblies for new or clean versions thereby minimising machine downtime To perform a chamber quick clean the ICP chamber quick clean kit is needed Note The actual parts required for a quick clean are entirely process dependant This procedure details the standard quick clean kit required for an ASE process For heavy etch processes e g air bearing etches then the items listed as being part of the yearly PM may need to be swapped as part of the quick clean procedure For further information please contact the SPTS service department The major items to be swapped are Ceramic Platen shield Platen lip seal e Associated rings CAUTION Always use a suitable protective cover placed over the electrode when working in the process chamber to avoid the possibility of dropping items onto and or placing items directly on it Version 2 4 4 27 Service Manual Maintenance lt P T S AN SPP COMPANY No peser Note Parts not shown Platen Lip seal Platen Shield Figure 3 7 ICP Chamber Quick Clean Parts Service Manual 4 28 Version 2 4 S P T S Maintenance AN SPP COMPANY 4 8 2 1 4 8 2 2 4 8 2 3 Version 2 4 Quick Clean Disassembly 1 pr gd Sh Run the SPTS standard 30 minute O clean
265. ue but will alert the operator to the fact the system has encountered an error 11 Select the show graph button if required to graphically show the voltage measured over time in relation to the selected upper warning and alarm limits 12 Selecting the Statistical Data tab displays statistical data about the selected device only for systems with an electrostatic chuck ESC 3 2 5 Heater Manual Control This option allows the user to manually control the heater zones and contactors 3 2 5 1 Heater Zone Control This option allows the user to manually operate the system s heater zones 9 sjulodjas enuey Fixed Output Power Norma Adaptive Temperature Fixed Power Output aged 1883H uasu Safety Temperature Output Power Figure 3 13 Typical Heater Manual Control Screen To manually operate the heater zones 1 From the Manual view select the Process Module tab 2 From the mimic screen select the required heater zone Gi 3 Select the manual mode control button 4 Select whether interlocks are to be enabled or disabled The following options are activated using the buttons on the command panel Button Name Fixed Output Sets the power output of the heater as a percentage of its full scale power Power Deactivates the heater zone Resets the device in the event of a device failure Normal Control of the heat cool zones is to be handled automatically Temperature Control Service
266. umber also flashes error detected in sequence of fragmented I O messages from device The node number also flashes Slave device is returning error responses when module attempts to communicate with it The node number also flashes Module is initialising the Devicenet network 71 72 73 74 19 76 17 78 79 81 82 83 84 5 8 Data size larger than 255 bytes The node number also flashes Device is producing zero length data while module is in RUN mode SPTS AN SPP COMPANY Inspect the node connections Verify the correct device is at this node number Make sure the device at the node address matches the desired electronic key Check configuration and change if necessary Check network communication traffic No scan list is active Enter a scan list None required The module hears other network traffic Reconfigure the module for the correct data sizes Add that device to the list or delete the scan list entry for that list Module has failed to Make sure module is connected to transmit a message network Check connections Module is in IDLE mode Put controller in RUN mode Enable RUN bit in module command register Module is in FAULT mode Check module command register for fault bit set Check scan list entry for slave device to make sure that input and output data lengths are correct Check slave device configuration Check accuracy of scan list table entry Check slave device confi
267. umping system The cassette tab allows the user to manually control the cassette pumping functions To access the manual control cassette pumping tab 1 Access the manual control software as detailed in 3 4 1 TMC Manual Control Software CPX VPX Only 2 From the TMC control screen select the cassette pumping tab v Enable Interface C Enable Passthrough Mode Current Command None Startup Reset Er Abort Pause In Service O Log Comms Traffic Comman d Station Dealer Pressure 1000 000 mT orr Cassette 1 Pressure 1000 000 mTorr Don t Optimise Cassette 2 Pressure 1000 000 mTorr Execute Figure 3 56 Typical TMC Cassette pumping Tab 3 The following buttons are located on the right hand side of the screen Button Name Startup Starts the system to allow manual control to be used Reset Resets the Resets the system in the event of a system failure in the event of a system failure io MN Takes the selected system out of service for REED if maintenance work is required to be carried out In In Service Returns the selected Returns the selected system to an in service mode to an in service mode the current operation Service Manual 3 54 Version 2 4 S TS Manual Control and Software Utilities AN SPP COMPANY 3 4 1 7 Version 2 4 Pauses the current operation This option is dynamic and the Pause button will change to a resume button to resume
268. ure 4 36 Figure 4 37 Figure 4 38 Figure 4 39 Figure 4 40 Figure 4 41 Figure 4 42 Figure 4 43 Figure 4 44 Figure 4 45 Figure 4 46 Figure 4 47 Figure 4 48 Figure 4 49 Figure 4 50 Figure 4 51 Figure 4 52 Figure 4 53 Maintenance Figures CPX VPX Surge Arrester Replacement Indicator 20 I LPXRCOD tena 20 MPX LPX Surge nnn 21 RF Gas girz d ore Satie dicate RT 22 Temperature Zones c 24 Zero Gauge Button 26 ICP Chamber Quick Clean Parts 28 Lower Chamber Block 31 Top Viewport ssesssseseeeeeee nennen nennen nnne nnns nnns nn nnns 32 Gas Inlet 1 33 SCIF Ring EMI Shielding and 35 HiVac Gauge Assembly enne 36 Process Pressure Gauge Assembly 37 Roughing Gauge 0 enne nenne 38 Atmosphere Switch Assembly 39 Vacuum Switch ASSOMDIY ccccccccccesececcececeeseeeceseeecesseeseueeessaneensaaees 40 Electrode Bellows and Stem Assembly
269. ut any further operations within the process Pausing The user has requested a pause command and the tool is processing this command Paused The tool has carried out the pause command and is waiting for a resume command Version 2 4 3 69 Service Manual Manual Control and Software Utilities lt TS AN SPP COMPANY Idle The tool is operating correctly and is waiting for the next command NotActive 00 Active os with Alarms The tool is idle but cannot accept a further command as there are active alarms otopped The tool has carried out a stop command and is awaiting further commands Aborted The tool has carried out an abort command and is awaiting further commands The substrate status displays the following information based on the displayed colour of the substrate Substrate Description Colour White Unprocessed EL M Part processed Processed without fault Processed with fault Invalid state T The transfer gate and cassette door status displays the following information based on the displayed colour of the door gate Transfer Gate Description Door Colour White Open 3 4 3 3 Scheduler Status The status screen shows the OBEM service and behaviour state of the various devices that the scheduler controls 3 4 3 4 Scheduler Options The options screen allows the user to define where recipe and log files are stored change the parameters
270. valve Fully closes the APC valve Sets the selected gauge to read zero pressure Start Learn Starts the learn process For further information on the learn procedure refer to the manufacturer s literature Service Manual 3 10 Version 2 4 Manual Control and Software Utilities AN SPP COMPANY 8 From the control panel select the Pressure Tolerances tab the following screen is displayed APC Pressure Show Graph Above setpoint alarm 800 Above setpoint warning 300 Below setpoint warning 300 ir Below setpoint alarm 800 cens Uu cy D od as o wo Figure 3 5 Typical APC Pressure Tolerances Screen 9 Enter the above and below setpoint warning and alarm pressure thresholds 10 Select the show graph button if required to graphically show the pressure measured over time in relation to the selected warning and alarm limits Note An alarm will stop the operation in progress warning will allow the current operation to continue but will alert the operator to the fact the system has encountered an error 11 From the control panel select the Position Tolerances tab the following screen is displayed APC Position u Show Graph Above setpoint alarm ENS Above setpoint warning 20 Below setpoint warning 20 7 Below setpoint alarm o 2 ie o a e Figure 3 6 Typical APC Position Tolerances Screen 12 Enter the above and below se
271. ve Island Figure 1 28 Gasbox Valve Island The actual configuration of each customer s gasbox pneumatics will be entirely dependant upon the processes to be run Please refer to the system specific gas schematic drawing supplied in the drawings folder for precise details on the gasbox pneumatic arrangement Service Manual 1 32 Version 2 4 SPTS Introduction AN SPP COMPANY 1 7 2 Chamber Valve Island Figure 1 29 Chamber Valve Island The outputs from the chamber valve island are as follows Description Electrode Down Electrode Up Substrate Lift Down Substrate Lift Up V3B Foreline Isolation Capacitance manometer Gauge Isolation V4B HBC Platen V3A Bypass Pumping Version 2 4 1 33 Service Manual Introduction S P T S AN SPP COMPANY 1 7 3 Chamber Pneumatic Schematic T X08SV9 YU lt IMIYA 2VAIH 2dV 20 c Qa gt m co ox QF gt rn c zu C 1 LIFT DOWN TUBE LENGTH 1 5M NI Adds 2 LIFT UP TUBE LENGTH 1 5M PLATEN LIFT ELECTRODE 3 LIFT DOWN TUBE LENGTH 1 5M SUBSTRATE LIFT SLICE ROUGHING PUMPING BYPASS PUMPING FORELINE ISOLATION GUAGE ISOLATION CAPMAN HBC PLATEN SMC SV1000 VALVE ISLAND 4 x 3 2 amp 2 x 5 2 SOLENOID VALVES Figure 1 30 Chamber Pneumatic Schematic Service Manual 1 34 Version 2 4 Introduction AN SPP COMPANY Vacuum System 1 8 NI NHOOMSLIN ONIHSNOY ISnVHX3 0 dNN
272. w O ring Remove clamp 10 securing turbo foreline adaptor 7 to NW16 flex pipeline 11 Remove ring 12 and carrier 13 Remove ring from carrier and discard Clean carrier with IPA and fit new O ring Reassembly is the reverse of the above procedure Figure 4 26 Turbo Foreline Assembly 4 58 Version 2 4 S P T S Maintenance AN SPP COMPANY 4 8 18 Gate Valve Overhaul Procedure Issue 1 0 Date April 2007 The gate valve is comprised of two main parts the gate valve interface and actuator body with a bonnet O ring providing the vacuum seal between them The actuator body should be overhauled at the same time as the valve using the gate valve seal kit System State Shutdown and vented Equipment and Materials Standard tool kit Parts Required Gate valve bonnet O ring Gate valve seal kit Associated Procedures Safety section in the preliminary To overhaul the gate valve 1 Refer to Figure 4 27 2 Remove electrical and pneumatic connectors from the base of the gate valve 3 From beneath the valve remove two 8 claw grip clamps 1 securing the gate valve to the chamber 4 Remove the eight screws 2 securing the actuator body 3 to the gate valve interface 4 9 Remove the actuator and place it on a clean flat surface covered with cleanroom wipes 6 Remove and discard the bonnet ring Clean the ring groove and refit new O ring T Refer to the valve manufacturer
273. wn below e Chamber Vent Valve e Gasbox Gas Valves e Mixed Gas Manifold Valve Service Manual 1 26 Version 2 4 SPTS Introduction AN SPP COMPANY 1 5 Pumping System The pumping system consists of the following components Chamber Turbo Pump Chamber Backing Rotary Pump e Handling System Rotary Pump A schematic of the pumping system is as shown below Pirani Atmospheric Pressure Switch V WV C G Loadlock apman Gauge Roughing Gauge Main Pumping Valve Combined Valve Combined Valve Turbo Pump NW40 Connection Foreline Isolation Valve Foreline Gauge Rotary Pump NW40 to ISO 63 Connection Rotary Pump Figure 1 22 MPX Pumping Schematic High Atmospheric gt C Convectron Convectron lt Vacuum 2 Atmosphere Pressure Switch Y WY Gauge WY Gauge Y cx Y Switch Y Switch Gate Gate Vacuum Valve Valve gt lt lt L Capman Gauge Cassette gt lt Process Module E 3 Elevator Roughing Gauge Main Soft Soft Pumping Pumping Pumping Pumping Give Valve Valve Combined Valve Combined Combined Gate Valve Valve By pass Valve Pumping Valve Turbo Pump NW40 Connection Foreline Isolation Valve N Foreline Gauge Rotary or Pump Q NW40 to ISO 63 Connection Rotary Pump Figure 1 23 CPX VPX Pumping Schematic Version 2 4 1 27 S
274. y 1 d t 1 ji LAW aie WT uc eu M 4 I l Am d ur E x 1 E Yl ear c ee BEES A rem IF ed E im rA X lm Gh E B bo 4 E Bw E Figure 1 1 System Overview Service Manual 1 6 Version 2 4 SPTS Introduction AN SPP COMPANY 1 2 System Overview The system consists of the following components PLC Control System Process Chamber Electronics Rack Including the Power Distribution System e Pumping System Compressed Air Distribution System e Gas Supply System Heaters Chillers e HF Supplies e Handling Transport System Examples of possible system components and related equipment are shown below LLLLLLLLLLLLL LL LL LL EL ELL LELEL LL Bde Figure 1 2 CPX System Layout Example Version 2 4 1 7 Service Manual Introduction Figure 1 3 VPX System Layout Example KEYBOARD MONITOR MOUSE Figure 1 4 MPX System Layout Service Manual 1 8 Example SPP COMPANY Version 2 4 SPTS Introduction AN SPP COMPANY 1 2 1 Substrate Processing Once a substrate has been loaded the substrate platen is rais
275. y or are constant there are minimum and maximum logging periods These periods are configurable between 0 1s and 3600s The default settings for these configuration parameters are 0 196 of full scale 1s minimum period and 60s maximum period e The variable will be logged at a specified frequency with a sampling period in the range 0 1s to 3600s The default setting for this mode is be 1s The variable is not required to be logged Within each tool or process module recipe the data logging mode is set by referring to a specific data logging recipe If no logging recipe is specified in the tool or process module recipe the data logging application will use the default recipe There is a master logging recipe which will be used when the data management application is initialised This recipe lists all possible variables for the tool and specifies the logging mode for each of these as the default mode case Trend Data Events may have data associated with them which changes with time This data is useful in analysing the function of devices on the tool and could be used to detect degradation of performance e g when a pump to base pressure event takes place the following data is logged The pressure at start of pump to base The time to achieve base pressure e Ifthe pump down sequence was for a specified time the base pressure at the end of the pump down cycle ARAMS Utility The Logger maintains a log on how productive the tool is
276. ystem Distribution AN SPP COMPANY See E Out KL4004 Coil MU Load Set Coil MU Tune Set Spare Spare Version 2 4 2 33 Service Manual Control System and Power System Distribution SPTS AN SPP COMPANY 2 2 8 VAT Valve Control Node 05 Node 05 controls the VAT combined APC HIVAC valve and is integral to the valve body located at the rear of the chamber Further details of the valve can be found in the manufacturers literature Service Manual 2 34 Version 2 4 S TS Control System and Power System Distribution AN SPP COMPANY 2 2 9 Gasbox MFC Control Node 07 Node 07 controls the MFCs located in the gasbox and is situated in the bottom of the gasbox The node consists of a bus terminal containing Beckhoff I O Figure 2 26 Node 07 Gasbox MFC Control The sino I O is located within the bus terminal te Out KL4004 Gasbox MFC Channel 1 Gasbox MFC Channel 2 Gasbox MFC Channel 3 Gasbox MFC Channel 4 Analogue Out KL4004 Analogue In KL3064 Analogue In KL3064 Analogue In KL3064 A W A Gasbox MFC Channel 1 Gasbox MFC Channel 2 Gasbox MFC Channel 3 Gasbox MFC Channel 4 2 3 4 1 A Co Turbo Purge Flow Spare Spare 6 End Terminal KL9010 Version 2 4 2 35 Service Manual Control System and Power System Distribution lt gt TS AN SPP COMPANY 2 2 10 Valve Island Gasbox Control Node 08 Node 08 controls the pneumatic operation of the gasbox i

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