Varian Turbo-V150HT Pump - Ideal Vacuum Products, LLC
Contents
1. The assembled kit must be screwed into the suit able holes of the pump body with a recommended closing torque of 5 Nm 29 TECHNICAL INFORMA TION The metallic model is assembled as shown in the figure Two 6 mm 1 4 internal diameter rubber or plastic hoses from the water supply must be fitted to the two nozzles NOTE These hoses must be held on the respective noz zles using hose clips to avoid that the tube s gets loose or disconnected during operation The plastic model must be screwed into the suit able holes of the pump Cooling may be carried out either through an open circuit with eventual discharge of the water or us ing a closed circuit cooling system The water temperature must be between 10 C and 30 C with an inlet pressure between 3 and 5 bar This allows a flow of about 200 I h NOTE The water electrical conductance must be x 500 When the conductance is higher in closed water circuit the use of up to 2096 of Ethyl Glycole 5 suggested The overall dimensions of the pump when equipped with the water cooling kit mounted are shown in the following figure dimensions are in inches mm 87 900 891 01 C TECHNICAL INFORMA TION WATER COOLING 1 8 G2. Connection B MAINS SUPPLY Turbo V controller Vent valve Vacuum pump shut off valve optional oystem vent valve optional Vacuum chamber lonisation gauge Fore vacuum pump connecting flange Oil mist eliminator pos duro Oe ae en 9i ee Fore vacuum pump with internal one way valve 10 Fore vacuum pump control relay 11 Connection for water cooling 12 Roughing line with valve optional 13 Turbopump 14 Flexible connection 87 900 891 01 C Connection A HIGH VACUUM FLANGE To connect the Turbo pump to the ISO inlet flange remove the outer ring and position the centering ring as shown in the figure ER RING Then fix the two flanges with the clamps or claws as shown in the figure Connection configurations WITH ISO CLAMP WITH CLOW CLAMP ISO 100 ISQ 100
3. CFF 6 A 102 2 4 02 The inlet screen is fitted in the upper part of the CFF 4 5 A 70 0 2 76 pump as shown in the figure Dimensions mm inches ISO 63 A 70 0 2 76 B 9 0 0 35 ISO 100 A 102 2 4 02 B 12 0 47 The screen can be mounted on each pump model and is supplied with a small tab for easy removal see figure 28 87 900 891 01 C WATER COOLING INSTALLATION Two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient The two model part numbers are 969 9337 metal lic model and 969 9347 plastic model Hu H Model 969 9337 Model 969 9347 IS CAUTION The items of the plastic model kit must be assem bled as shown in the following figure
4. WATER COOLING 1 8 C 1 5 38 0 AIR COOLING KIT INSTALLATION A fan kit model 969 9314 is available for air cooling the pump Fan specification air flow 59 l s 120 input voltage 120 Vac 50 60 Hz maximum power 17 W dimensions 127 x 127 mm 5 x 5 inches Position the fan on the pump ensuring that the holes in the plate line up with those in the pump base Insert the respective washers and screws and tighten with a screwdriver Connect the fan to the controller 30 GAS PURGE VALVE INSTALLATION A gas purge valve is available to protect the pump bearings against particulate and corrosive gases that could move into the pump To install the gas purge valve it is necessary to un screw the purge port cover as shown in the follow ing figure 87 900 891 01 C and then screw the gas purge valve with a torque of 2 5 Nm as shown in the following figure VENT VALVE INSTALLATION ONINSVA V The vent valve mod 969 9833 allows to avoid un desired venting of the pump during a temporary power failure 5 sec maximum and enables an automatic vent operation Unscrew the threaded plug see figure below TECHNICAL INFORMA TION ocrew the vent valve into the p
5. pownloadey O Tacat vacuum products 505 872 0037 PLEASE NOTE We do sell the related products within this literature but we are not connected in any way with the manufacture of your product We provide this literature for the products we sell and service They are intended to provide users with the manufactures instructions to operate the equipment in a safe manner www idealvac com Turbo V 150HT Pumps Model 969 9369 Model 969 9370 Model 969 9371 Model 969 9372 87 900 891 01 C APRIL 2002 VARIAN gt ap AS vacuum technologies MANUALE DI ISTRUZIONI BEDIENUNGSHANDBUCH NOTICE DE MODE D EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRUCOES BEDRUFSHANDLEIDING INSTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEKASIKIRJA OAHI TE Z INSTRUCTION MANUAL Turbo V 150HT ap VARIAN gt lt vacuum technologies Dear Customer Thank you for purchasing a VARIAN vacuum product At VARIAN Vacuum Technologies we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our product On the back side you find a Corrective Action Request form that you may fill out in the first part and return 10 us This form is intended to supplement normal lines of communic
6. ISO ROT FLANGE CUSTOM MADE amp WITH ISO CLAMP WITH CLOW CLAMP SO 1 j ISO ROT FLANGE l 1 WITH BOLT M8 H ISO G3 U ISO ROT FLANGE CUSTOM MADE 50 63 HT ISO ROT FLANGE CUSTOM MADE 33 TECHNICAL INFORMATION For ConFlat flange connections we recommend using Varian hardware To facilitate assembly and dismantling apply Fel pro C 100 high temperature lubricant to the screw threads protruding from the flange and between the nuts and flange Attach the units and tighten each one in turn Re peat the sequential tightening until the flange faces meet IS CAUTION Exercise care when tightening nuts and bolts to avoid creating dents in the envelope as this may cause the pump rotor to lock WITH BOLT M8 PLATE WITH S PED HOLE SCREW LENGT 1 1 4 MAX Jle WITH BOLT M8 BASEPLATE WITH TAPPED HOLE CFF 471 2 OD CFF 41 2 OD y 87 900 891 01 C Connection B FORE VACUUM PUMP A
7. leak L Vacuum leak High voltage problem C Solenoid failure Damaged flange _ Error code on display L Other Damaged sealing area Other Customer application Customer application LEAK DETECTORS INSTRUMENTS Cannot calibrate No zero high backround _ Gauge tube not working _ Display problem L Vacuum system unstable _ Cannot reach test mode L Communication failure Degas not working Failed to start Other L Error code on display Other Customer application Customer application PRIMARY PUMPS DIFFUSION PUMPS L Pump doesn t start L Noisy pump describe Heater failure Electrical problem L Doesn t reach vacuum Over temperature L Doesn t reach vacuum L Cooling coil damage _ Pump seized Other Vacuum leak Other Customer application Customer application FAILURE DESCRIPTION Please describe in detail the nature of the malfunction to assist us in performing failure analysis NOTA Su richiesta questo documento disponibile anche in Tedesco Italiano e Francese REMARQUE Sur demande ce document est galement disponible en allemand italien et francais HINWEIS Auf Aufrage ist diese Unterlage auch auf Deutsch Italienisch und Franz sisch erh ltlich Argentina Varian Argentina Ltd Sucursal Argentina Av Ricardo Balbin 2316 1428 Buenos Aires Argentina Tel 54 1 783 5306 Fax 54 1 786 5172 Australia Varian Australia Pty Ltd 67
8. the following envi ronmental requirements should not be exceeded temperature from 20 to 70 C relative humidity 0 95 non condensing If the storage time is long start the pump using the SOFT START mode see control unit manual PREPARATION FOR INSTALLATION The pump is supplied in a special protective packing If this shows signs of damage which may have occurred during tran sport contact your local sales office When unpacking the pump be sure not to drop it and avoid any kind of sudden impact or shock vibration to it Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 85 399 ES CAUTION In order to prevent outgassing problems do not use bare hands to handle components which will be exposed to vacuum Always use gloves or other appropriate protection NOTE Normal exposure to the environment cannot damage the pump Nevertheless it is advisable to keep it closed until it is installed in the system thus preventing any form of pollution by dust 23 INSTRUCTION MANUAL INSTALLATION Do not install or use the pump in an environment exposed to atmospheric agents rain snow ice dust aggressive gases or in explosive environments or those with a high fire risk Dur ing operation the following environmental conditions must be respected maximum pressure 2 bar above atmospheric pressure temperature fro
9. 01 C N EN Para evitar lesiones a la persona no introducir nunca por ning n motivo los dedos u objetos en la boca de entrada de la turbobomba Se aconseja utilizar la redecilla de pro tecci n opcional Si se utiliza un amortiguador de vibra ciones o un fuelle met lico flexible en la boca de entrada fijar siempre la turbobomba a la base La turbobomba se puede instalar en cualquier posici n Fijar la turbobomba en posici n estable acoplando la brida de entrada de la turbobomba a una falsa brida fija que pueda soportar un par de 221 Nm alrededor de su eje La turbobomba con brida de entrada ISO ha de fijarse a la c mara de vac o mediante mordazas dobles o sencillas La tabla siguiente describe para cualquier dimensi n de la brida y tipo de mordaza el n mero de mordazas necesarias y a que par de apriete apretarlas womoza MORDAZA APRIETE con roscado M10 con roscado M8 con roscado M10 mue P M con roscado M8 La turbobomba con brida de entrada ConFiat ha de fijarse a la c mara de vac o mediante accesorios mec nicos Varian Para m s detalles v ase el ap ndice Technical Information Para fijar la bomba mediante su base es necesario utilizar tres tornillos M6 fijados en los orificios correspondientes que se encuentran en la base de la bomba Los tornillos utilizados han de tener una carga de deformaci n el stica de 500 N mm y han de fijarse a un par de 3 1 Nm Para l
10. 1 iaa 01D A DVn KO MM 5 INSTRUCCIONES DEV SO ara A RETE T INSTRU ES PARA OUSO eran a a a a a eT 9 GEBRUIKSAANWEZINGEN serpiente tordo dedo 11 BRUGSANVISNING inr dietistas 13 BRUKSANVISNING nena 15 BRUKERVEILEDNING socios cross cliads 17 REO OOO E 19 DDNHEIBS PEE as 21 INSTRUCTIONS FOR USE DRIN DH DNI DI olaa 23 TESHNIE AE IN RV TION unius uus o aoe dee ette 25 DESCRIPTION OF THE TURBOPUMP 25 TECHNICAL SPEGIFIGA THON 2 5 5 0 03 622 enue IET Rv a cessa das 26 INEE T SCREEN INSTAEBATIGODN uda esas du ava dide n tua aeu talo ew xov acento oni dou 28 WATER COOLING 29 AIR COOLING KIT INSTALLATION cient aiid iia ai iacu 30 GAS PURGE VALVE TNSTAELDA TON iom iiic inia Mont ewan Coa a gu em UON 30 VENT VALVE INSTALLATION ereun dias 31 VENT DEVICE INSTALLATION A A rto etur die Eoo 32 VIBRATION ISOLATOR INSTALLATION ene RII IRI MIHI RRIMReMHRtmmMteteterei 32 FYPICAELCAYOUTDIAGRAM ze 0220 deme A at da La entre 32 Connecuonm s HIGH VACUUM FLANGE isaac AR 33 Connection COMMGUI ANIONS NORTE 33 Connection B FORE VAGUUIND PUMP uro SE b ade teet 34 Connection E TRIGA ust cree a e
11. 100 high vacuum flange Model 969 9370 with ISO 63 external diameter high vacuum flange Model 969 9371 with ConFlat 6 external di ameter high vacuum flange Model 969 9372 with ConFlat 4 5 external di ameter high vacuum flange eb mnm B CODE EI o A Model 969 9371 Model 969 9372 The Turbo V150HT pump consists of a high fre quency motor driving a turbine fitted with 7 bladed stages and 6 Macrotorr stages The turbine rotates in an anticlockwise direction when viewed from the high vacuum flange end The turbine is made of high strength aluminium al loy machined from a single block Proceeding from the high vacuum to the for vac uum region the turbine stages sequence is TECHNICAL INFORMA TION 1 stage with a blade angle of 42 1 stage with a blade angle of 28 3 stages with a blade angle of 20 and 3 final stages with a blade angle of 10 The Macrotorr stages are in the form of six discs The turbine rotor is supported by permanently lu bricated high precision ceramic ball bearings in stalled on the forevacuum side of the pump The static blades of the stator are made of stainless steel These are supported and accu rately positioned by spacer rings The Macrotorr stators are in the form of self positioning machined discs with pumping channels and an opening restricted by the corresponding ro tor discs These are made of aluminium alloy During norma
12. 34 PUMP USED WITH CORROSIVE GASES otoee ttti Ai 34 PUMP USED IN PRESENCE OF MAGNETIC 35 ACCESSORIES uu euin cate eigen a Gu gases pun ete tou bande E anes UL UE EM LEUR 35 INFORMACION GENERAL Este equipo se ha concebido para un uso profesional El usuario deber leer atentamente el presente manual de instrucciones y cualquier otra informaci n suplementaria facilitada por Varian antes de utilizar el equipo Varian se considera libre de cualquier responsabilidad debida al incumplimiento total o parcial de las instrucciones al uso poco apropiado por parte de personal sin adiestrar a las intervenciones no autorizadas o al uso que no cumpla con las normas nacionales espec ficas Las bombas de la serie Turbo V150HT son bombas turbomoleculares para aplicaciones de vac o alto y ultra alto que pueden bombear cualquier tipo de gas o de compuesto gaseoso No son apropiadas para bombear l quidos o part culas s lidas El efecto de bombeo se obtiene a trav s de una turbina que gira a gran velocidad 62000 r p m m x movida por un motor el ctrico trif sico de grandes prestaciones En las bombas Turbo V150HT no hay agentes contaminantes y por lo tanto son apropiadas incluso para las aplicaciones que necesitan un vac o limpio En los p rrafos siguientes se indica toda la informaci n necesaria para garantizar la seguridad del operador durante el uso del equipo Una info
13. 9 701 Springvale Road Mulgrave Victoria ZZ 3170 Australia Tel 61 395607133 Fax 61 395607950 Benelux Varian Vacuum Technologies Rijksstraatweg 269 H 3956 CP Leersum The Netherlands Tel 31 343 469910 Fax 31 343 469961 Brazil Varian Industria e Comercio Ltda Avenida Dr Cardoso de Mello 1644 Vila Olimpia Sao Paulo 04548 005 Brazil Tel 55 11 3845 0444 Fax 55 11 3845 9350 Canada Central coordination through Varian Vacuum Technologies 121 Hartwell Avenue Lexington MA 02421 USA Tel 781 861 7200 Fax 781 860 5437 Toll Free 800 882 7426 China Varian Technologies Beijing Room 1201 Jinyu Mansion No 129A Xuanwumen Xidajie Xicheng District Beijing 1000031 P R China Tel 86 10 6608 1530 Fax 86 10 6608 1534 France and Wallonie Varian s a 7 avenue des Tropiques Z A de Courtaboeuf 12 Les Ulis cedex Orsay 91941 France Tel 33 1 69 86 38 13 Fax 33 1 69 28 23 08 11 01 Sales and Service Offices Germany and Austria Varian Deutschland GmbH Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel 49 6151 703 353 Fax 49 6151 703 302 India Varian India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997
14. 9111 Fax 39 011 997 9350 Japan Varian Vacuum Technologies Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1263 Korea Varian Technologies Korea Ltd Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Mexico Varian S A Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Taiwan Varian Technologies Asia Ltd 18F 13 No 79 Hsin Tai Wu Road Sec 1 Hsi Chih Taipei Hsien Taiwan R O C Tel 886 2 2698 9555 Fax 886 2 2698 9678 UK and Ireland Varian Ltd 28 Manor Road Walton On Thames Surrey KT 12 2QF England Tel 44 1932 89 8000 Fax 44 1932 22 8769 United States Varian Vacuum Technologies 121 Hartwell Avenue Lexington MA 02421 USA Tel 781 861 7200 Fax 781 860 5437 Toll Free 800 882 7426 Other Countries Varian Vacuum Technologies Via F lli Varian 54 10040 Leini Torino ltaly Tel 39 011 997 9111 Fax 39 011 997 9350 Internet Users Customer Service amp Technical Support vit customer service varianinc com Worldwide Web Site www varianinc com vacuum Order On line www evarian com Representatives in most countries ap lt a VARIAN
15. CION Para evitar la degasificaci n no tocar con las manos sin guantes los componentes destinados a someterse al vac o Utilizar siempre los guantes u otra protecci n apropiada INSTRUCCIONES DE USO NOTA La bomba no se puede dariar s lo por quedar expuesta a la atm sfera De todas formas se aconseja mantenerla cerrada hasta el momento de la instalaci n en el sistema para evitar una posible contaminaci n debida al polvo INSTALACION No instalar ni utilizar la bomba en ambientes expuestos a agentes atmosf ricos lluvia hielo nieve polvos gases agresivos en ambientes explosivos o con alto riesgo de incendio Durante el funcionamiento es preciso que se respeten las condiciones ambientales siguientes presi n m xima 2 bar por encima de la presi n atmosf rica temperatura de 5 C a 35 C humedad relativa 0 95 no condensadora Cuando hay campos electromagn ticos la bomba ha de protegerse mediante pantallas oportunas V ase el ap ndice Technical Information para m s detalles Las bombas turbomoleculares de la serie V150HT se deber n utilizar s lo con uno de los controladores apropiados Varian serie 969 9405 969 9505 969 9423 969 9523 y se deber n acoplar a una bomba primaria v ase esquema en Technical Information 87 ATENCION Eliminar el adhesivo y quitar el tap n de protecci n s lo en el momento en que se conecte la turbobomba al sistema 87 900 891
16. CONNECTOR 23 7 95 0 4 4 113 5 VIEW FROM A 22 8 72 6 93 1 8010 ISO 100 24 5 116 0 04 4 113 0 FORELINE KF 16 4 3 109 0 L 5 1 128 7 ISO 100 VIEW FROM B 25 9 151 6 AG 5 1 130 0 1 L 24 5 115 0 24 4 113 0 I WATER COOLING 1 8 G 1 5 38 0 STRAIGHT ELECT CO Pumping speed ISO 100 ISO 63 130 1 5 100 1 5 120 1 5 105 1 5 H2 110 l s 100 1 5 No 3 x 108 minimum flow 30 Wh 0 13 GPM He 8 x 10 temperature 10 C to 30 C H2 8 x 10 pressure 3 to 4 bar Compression ratio Base pressure with minimum recommended 120 C max at inlet flange CF flange mechanical pump 80 C max at inlet flange ISO flange 10 10 Me i T Tor 0 01 um at inlet flange with minimum recommended diaphragm pump 2x10 mbar 1 5 x 10 torr 120 Vac three phase 1050 Hz Inlet flange ISO 100 ISO 63 CFF 6 CFF 4 5 permanent lubrication Foreline flange 16 NW 20 to 70 C Rotational speed 62000 rpm CFF 5 6 12 3 Startup time 50 3 8 r9 Recommended Mechanical Varian SD 40 forepump Diaphragm MD12 Accord
17. Flat inlet flange must be fixed to the vacuum chamber by means of the appropriate Varian hard ware See the appendix Technical Information for a detailed description To fix the pump by means of its base it is necessary to use three M6 screws fixed to the foreseen holes of the pump base The used screws must have a minimum strength point of 500 N mm and must be fixed with a torque of 3 1 Nm For installation of optional accessories see Technical Infor mation USE All the instructions for the correct use of the turbopump are contained in the control unit manual Read the manual carefully before using the pump In order to achieve a better lower base pressure the pump casing may be heated using the optional heater While heating the pump the temperature of its inlet flange must not exceed 120 24 INSTRUCTION MANUAL Always use the water cooling system during the heating opera tions AN ZU Do not touch the turbopump or any of its accessories during the heating process The high temperatures may cause burns ES CAUTION Use air or inert gas free from dust or particles for venting the pump The pressure at the vent port must be less than 2 bar above atmospheric pressure ES CAUTION Avoid impacts oscillations or harsh movements of the pump when in operation The bearings may become damaged ES CAUTION For pumping aggressive gases these pumps are fitted with a special port to allow a steady fl
18. Toxic Corrosive Reactive Flammable J Explosive Biological Radioactive List all toxic or hazardous materials Include product name chemical name and chemical symbol or formula AA sedora getan ER DP DUM Customer Authorized Signature eese Si A Date s Lc EA NOTE If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Do not write below this line Notification RAJH Customer ID Equipment al y Request for Return VARIAN gt lt quest j 019001 FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Does not start Noise Vertical Power Rotational Speed L Does not spin freely Vibrations Horizontal Current Inlet Pressure Does not reach full speed Leak L Upside down Temp 1 Foreline Pressure L Mechanical Contact Overtemperature Other Temp 2 Purge flow Cooling defective OPERATION TIME TURBOCONTROLLER ERROR MESSAGE ION PUMPS CONTROLLERS VALVES COMPONENTS _ Bad feedthrough Poor vacuum Main seal leak Bellows
19. a instalaci n de los opcionales v ase Technical Information UTILIZACION Todas las instrucciones para el funcionamiento correcto de la turbobomba se encuentran en el manual de la unidad de control Leer atentamente dicho manual antes de utilizarla Para obtener mejores presiones l mite se puede calentar la envoltura de la bomba utilizando el calentador opcional Durante el posible calentamiento de la c mara de vac o la temperatura de la brida de entrada no deber superar 120 C INSTRUCCIONES DE USO Utilizar siempre la refrigeraci n por agua durante las operaciones de calentamiento AN No tocar la turbobomba y sus posibles accesorios durante las operaciones de calentamiento La alta temperatura puede provocar lesiones a las personas TS ATENCION Para el env o de aire de la bomba utilizar aire o gas inerte sin polvo o part culas La presi n de entrada a trav s de la puerta apropiada deber ser inferior a 2 bar por encima de la presi n atmosf rica TS ATENCION Ev tense golpes oscilaciones o bruscos desplazamientos de la turbobomba durante su funcionamiento Los cojinetes podr an dafiarse TS ATENCION Para bombear gases agresivos estas bombas est n dotadas de una puerta espec fica mediante la cual es necesario suministrar a la bomba un caudal de gas inerte Nitr geno o Arg n para proteger los rodamientos v ase el ap ndice Technical Information N Cuando la bomb
20. a se utiliza para bombear gases t xicos inflamables radioactivos seguir los procedimientos apropiados t picos de cada gas No usar la bomba cuando haya gases explosivos MANTENIMIENTO Las bombas de la serie Turbo V150HT no necesitan ning n mantenimiento Cualquier intervenci n deber ser realizada por personal autorizado A ENS Antes de realizar cualquier intervenci n en la turbobomba desempalmar el conector de alimentaci n enviar aire a la bomba abriendo la v lvula apropiada y esperar hasta que el rotor se pare completamente y esperar a que la bomba est por debajo de 50 C En caso de aver a se podr utilizar el servicio de reparaci n Varian o el Varian advanced exchange service que permite obtener una bomba regenerada para sustituir la averiada NOTA Antes de enviar al fabricante una bomba para su reparaci n o advanced exchange service es imprescindible cumplimentar y remitir a la oficina de Ventas m s cercana la ficha de seguridad y Salud adjunta presente manual de instrucciones Una copia de la misma se deber introducir en el embalaje de la bomba antes de enviarla En caso de que la bomba se tenga que desguazar efectuar su eliminaci n respetando las normas nacionales espec ficas 87 900 891 01 C GENERAL INFORMATION This equipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Varian before operat
21. ater cooling kit 969 9337 PART NUMBER Plastic water cooling kit 969 9347 Air cooling kit 969 9314 Vent flange NW 10 KF M8 969 9108 Vent valve with fixed delay 969 9833 time Vent device with adjustable de 969 9831 lay time Forepump SD 40 with 1 ph universal motor P1111 307 969 9239 969 9240 For a complete overview of Varian s extensive product lines please refer to the Varian catalog Diaphragm pump Vibration damper ISO 100 Vibration damper CFF 6 Vibration damper ISO 63 Purge valves 10 SCCM 87 900 891 01 C al VARIAN e Request for Return ROJ 9001 1 A Return Authorization Number WILL NOT be issued until this Request for Return is completely filled out signed and returned to Varian Customer Service 2 Return shipments shall be made in compliance with local and international Shipping Regulations IATA DOT UN 3 The customer is expected to take the following actions to ensure the Safety of workers at Varian a Drain any oils or other liquids b Purge or flush all gasses c Wipe off any excess residues in or on the equipment d Package the equipment to prevent shipping damage for Advance Exchanges please use packing material from replacement unit 4 Make sure the shipping documents clearly show the RA and then return the package to the Varian location nearest you North and South America Europe and Middle East Asia and ROW Varian Vacuum Technologies Varian SpA Varian Vacuum Tech
22. ations and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve mera 00 f Sergio PIRAS Vice President and General Manager VARIAN Vacuum Technologies Note Fax or mail the Customer Request for Action see backside page to VARIAN Vacuum Technologies Torino Quality Assurance or to your nearest VARIAN representative for onward transmission lo the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO VARIAN VACUUM TECHNOLOGIES TORINO QUALITY ASSURANCE FAX XXXX 011 9979350 ADDRESS VARIAN S p A F lli Varian 54 10040 Lein Torino Italy E MAIL marco marzio varianinc com COMPANY FUNCTION ADDRESS TELE N E MAIL PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc by VARIAN VTT XXXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc 4 VARIAN 2 lt STRUZAON FER EUS a M Xr
23. flange KF 10 NW is available to connect the Tur bopump to the fore vacuum pump A hose or vac uum approved pipe can be used If a rigid pipe is used any vibration generated by the mechanical pump must be eliminated through the use of bel lows NOTE The Turbo pump is characterised by its high com pression ratio also for oil vapours When using a mechanical oil sealed pump it is advisable to in stall a suitable trap between the turbopump and the fore vacuum pump in order to prevent oil back streaming Connection C ELECTRICAL The turbopump is connected to the controller through an 6 pin connector Pins B C and D are the 3 phase supply to the motor pins A and F are connected to the temperature sensor NTC type 30 resistance at 20 C and pin E is connected to the pump ground If the temperature sensor is disconnected the pump will not start To prevent damage to the pump when the temperature exceeds 60 C the sensor automatically cuts out the power supply PUMP USED WITH CORROSIVE GASES To prevent damage to the bearings an inert gas must flow into the pump body around the upper bearing towards the forevacuum line To supply the inert purge gas e g nitrogen to the pump through the purge port connect a gas purge valve between the pressure regulator and the pump see the fol lowing figure Adju
24. g pump should be left operating Purge gas line Pressure regulator Gas purge valve Gas purge port Forevacuum pump Turbopump Vent valve 87 900 891 01 C PUMP USED IN PRESENCE OF MAGNETIC FIELDS Magnetic fields induce eddy currents in the rotor of a turbomolecular pump that tend to oppose to its rotation The result is increased electrical power consump tion by the motor most of which is dissipated in the rotor Since the rotor is not in contact with the stator the above power can leave the rotor mainly by radia tion and hence the rotor may be overheated while static parts of the pump remain cool This effect is strongly dependant from the intensity time function and distribution of the magnetic field In general therefore an increase in pump current can be expected If this increase is lower than 50 of the current value drawn by the motor in high vacuum opera tion no particular problem should be expected However if the effect is grater than the case should be carefully reviewed by Varian s specialist As a matter of fact in case of high magnetic fields also important forces might be generated and ap plied to the rotor TECHNICAL INFORMA TION ACCESSORIES DESCRIPTION Inlet screen ISO 100 969 9302 Inlet screen ISO 63 969 9300 W
25. ing the equipment Varian will not be held responsible for any events occurring due to non compliance even partial with these instructions im proper use by untrained persons non authorised interference with the equipment or any action contrary to that provided for by specific national standards The Turbo V 150HT series pumps are turbo molecular pumps for high and ultra high vacuum applications and can pump any type of gas or gas compound They are not suitable for pump ing liquids or solid particles The pumping action is obtained through a high speed turbine max 62000 rpm driven by a high performance 3 phase electric motor The Turbo V 150HT pumps are free of contaminating agents and therefore are suitable for applications requiring a clean vacuum The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the equip ment Detailed information is supplied in the appendix Techni cal Information This manual uses the following standard protocol N ETSI The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not fol lowed correctly could lead to serious injury ES CAUTION The caution messages are displayed before procedures which if not followed could cause damage to the equipment NOTE The notes contain important information taken from the text STORAGE When transporting and storing the pumps
26. ing to standard DIN 28 428 the base Operating ambient 5 C to 35 C pressure is that measured in a leak free test dome temperature 48 hours after the completion of test dome bake out with a Turbopump fitted with a ConFlat flange and using the recommended pre vacuum pump 26 87 900 891 01 C TECHNICAL INFORMA TION Pumping speed 5 Inlet pressure mbar Inlet pressure mbar Pump fed by standard controller Pump fed by controller model 969 9436 969 9536 Helium Compression ratio Compression ratio Foreline pressure mbar Pump fed by standard controller Pump fed by controller model 969 9436 969 9536 Graph of compression ratio vs foreline pressure Throughput mbar I s 10 Inlet pressure mbar Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump 27 87 900 891 01 C TECHNICAL INFORMA TION INLET SCREEN INSTALLATION The following figures show the overall flange di mensions with the protection screen fitted on pump with ISO flange and pump with CFF flange The inlet screens mod 969 9300 and 969 9302 prevent the blades of the pump from being dam f aged by debris greater than 2 mm diameter A Dimensions mm inches The inlet screen however will reduce the pumping speed by about 10
27. l operation the motor is fed with a voltage of 120 Vac three phase at 1050 Hz To re duce losses during start up to a minimum the fre quency increases according to a ramp with a higher initial voltage frequency ratio The external body of the pump is shaped so that the pump can function with natural convection air cooling Kits are available for water cooling or forced air cooling to cool the pump in the cases where it is used under heavy load or when natural convection is insufficient for cooling purposes A thermistor sensor is mounted near the upper bearing to prevent the pump from overheating The thermistor sensor the motor stator windings and the earth are connected to a Turbo V controller through a 6 pin socket on the side of the pump The pump is balanced after assembly with a resid ual vibration amplitude less than 0 01 um The pump can operate in any position and can be supported on the high vacuum flange or on its base The connection of the forevacuum on the side of the pump is a KF 16 NW flange Inlet port Inlet flange Upper bearing Vent port Purge port Thermistor amm E Cm h d Forevacuum uu e c Controller e P i A port dy connection Motor rotor i 3 Motor stator Lower bearing 87 900 891 01 C TECHNICAL INFORMA TION TECHNICAL SPECIFICATION The following figure shows the Turbo V 150HT outline drawing Dimensions are in inches mm ELBOW 90 ELECT
28. m 5 C to 35 C relative humidity 0 95 non condensing In the presence of magnetic fields the pump must be pretected using a ferromagnetic shiled See the appendix Technical In formation for detailed informations The Turbo V 150HT series pumps must only be used with one of the special Varian controllers series 969 9405 969 9505 969 9423 969 9523 and must be connected to a primary pump see Technical Information ES CAUTION Do not remove the adhesive and protective cap before con necting the turbopump to the system 87 900 891 01 C To avoid injury never put fingers or any objects whatso ever in the inlet port of the turbopump The use of the pro tective screen is strongly advised optional extra If a vibration damper or flexible metallic bellows are used on the inlet port make sure that the pump is fixed to the base The turbopump can be installed in any position Fix the tur bopump in a stable position connecting the inlet flange of the turbopump to a fixed counter flange capable of withstanding a torque of 221 Nm around its axis The turbopump with ISO inlet flange must be fixed to the vac uum chamber by means of clamps or claws The following ta ble shows for each flange and fixing device the necessary number of clamps or claws and the relevant fixing torque FLANGE FIXING FIXING TORQUE DEVICE ISO 63 M10 clamps ISO 100 M10 clamps 8 X 11Nm The turbopump with Con
29. nologies 121 Hartwell Ave Via Flli Varian 54 Local Office Lexington MA 02421 10040 Leini TO ITALY Phone 1 781 8617200 Phone 439 011 9979111 Fax 1 781 8609252 Fax 39 011 9979330 CUSTOMER INFORMATION SONY VAN on nup MPs Satu acon ios canes Contact person Name seso n od tea ji q tne loo aE NEE EA EE TE EAEE Smp Meiho Shipping Collect o ooomocccommmmo ey eee ree ee rere errr Europe only VAT reg Number cccce cece ence ence eens USA only Taxable _ Non taxable Customer Bill PRODUCT IDENTIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit L Shipping Error Evaluation Return Calibration Other HEALTH and SAFETY CERTIFICATION Varian Vacuum Technologies CAN NOT ACCEPT any equipment which contains BIOLOGICAL HAZARDS or RADIOACTIVITY Call Varian Customer Service to discuss alternatives if this requirement presents a problem The equipment listed above check one HAS NOT been exposed to any toxic or hazardous materials OR HAS been exposed to any toxic or hazardous materials In case of this selection check boxes for any materials that equipment was exposed to check all categories that apply C
30. ow of inert gas like N2 Ar for pump bearing protection see the appendix Technical Informa tion N ZU When employing the pump for pumping toxic flammable or radioactive gases please follow the required procedures for each gas disposal Do not use the pump in presence of explosive gases MAINTENANCE The Turbo V 150HT series pump does not require any mainte nance Any work performed on the pump must be carried out by authorized personnel AN ETSI Before carrying out any work on the turbopump disconnect it from the supply vent the pump by opening the appropriate val ve wait until the rotor has stopped turning and wait until the surface temperature of the pump falls below 50 In the case of breakdown contact your local Varian service center who can supply a reconditioned pump to replace that broken down NOTE Before returning the pump to the constructor for repairs or re placement with a reconditioned unit the Health and Safety sheet attached to this instruction manual must be filled in and sent to the local sales office A copy of the sheet must be in serted in the pump package before shipping If a pump is to be scrapped it must be disposed of in accor dance with the specific national standards 87 900 891 01 C DESCRIPTION OF THE TURBOPUMP The Turbo V150HT pump is available in four mod els The four models which differ only in the high vacuum flange are Model 969 9369 with ISO
31. rmaci n m s detallada se facilita en el Suplemento Technical Information Este manual utiliza los s mbolos convencionales siguientes N Los mensajes de peligro atraen la atenci n del operador sobre un procedimiento o una operaci n espec fica que al no realizarse correctamente podr a provocar graves lesiones personales TS ATENCION Los mensajes de atenci n se visualizan antes de procedimientos que al no respetarse podr an provocar da os al equipo NOTA Las notas contienen informaci n importante extra da del texto ALMACENAMIENTO Durante el transporte y el almacenamiento de las bombas se deber cumplir con las condiciones ambientales siguientes temperatura de 20 C a 70 humedad relativa 0 9595 no condensadora Si el periodo de almacenamiento es muy largo poner en marcha la bomba en modalidad SOFT START v ase el manual de la unidad de control PREPARACION PARA LA INSTALACION La bomba se suministra en un embalaje de protecci n dimensional si se observan se ales de da os que podr an haberse producido durante el transporte ponerse en contacto con la oficina de venta m s cercana Durante la operaci n de desembalaje prestar una atenci n especial a no dejar caer la bomba ni someterla a golpes No dispersar el embalaje en el medio ambiente El material es totalmente reciclable y se ajusta a la directiva CEE 399 para la preservaci n del medio ambiente TS ATEN
32. st the pressure regulator in or der to obtain the necessary gas purge flow rate according to the application 34 TECHNICAL INFORMA TION IS CAUTION To prevent bearing damage Varian suggests the following purge gas flow rates 10 sccm 0 17 mbar l s for a mild purge process or 15 psig 1 bar l s for an heavy process Please contact Varian for specific applications The purge gas throughput with the recommended forepump of 2 m h 1 4 CFM allows to achieve a high vacuum pressure in the 10 mbar range The recommended gas flow maintains a pressure into the pump body higher than the forevacuum pressure The recommended procedure to vent the system and the pump avoiding the contact between the pump bearings and the corrosive gas is described in the following points 1 Close the corrosive gas flow into the system 2 Leaving the Turbo V pump and the backing pump running and the purge gas flowing wait for enough time to evacuate the corrosive gas from the system 3 Open the Turbo V vent port slowly until to reach atmospheric pressure in the system 4 Turn off the Turbopump 5 When the Turbo V pump and the backing pump are stopped and the system is at at mospheric pressure for a better bearing pro tection it is advisable to leave the purge gas flowing into the Turbo V pump with the chamber or the Turbo V vent valve opened to avoid system overpressures If the vent valve can t be kept opened the backin
33. ump without using the supplied adapter Tighten the valve using a 16 mm hexagonal span ner with a torque of 2 5 Nm IS CAUTION Do not overtighten the valve as this may damage the thread on the pump 87 900 891 01 C VENT DEVICE INSTALLATION The vent device mod 969 9831 allows to avoid undesired venting of the pump during a temporary power failure adjustable time up to 36 min and enables an automatic vent operation Unscrew and remove the threaded plug see figure below ocrew the flange mod 969 9108 on the pump tak ing care of the o ring right position Assemble the seal ring and lock the vent device in position using the KF klamp Flange Seal ring KF klamp TECHNICAL INFORMA TION VIBRATION ISOLATOR INSTALLATION Two vibration isolators for ISO and CFF inlet flange version pumps are available as accessories The two model part numbers are the following model 969 9332 for CFF 6 flange model 969 9342 for ISO 100 flange They typically reduce the vibration transmitted from the Turbo V 150HT pump to the system by a factor of 20 Please refer to the relevant instruction manual TYPICAL LAYOUT DIAGRAM Connection A MAINS TURBO V SUPPLY CONTROLLER
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