水晶発振式成膜コントローラ用センサ CRTSシリーズ Crystal Oscillation
Contents
1. U BE CRTM 12 Sensor Connection Features Crystal 12 Dieces mountable Since 5MHz AT cut crystal can be mountable in 12pieces it is safe In a long time continuous evaporation Simple replacement of crystal The replacement of crystal is detachable together with the crystal holder Take the workability within the vacuum chamber into account we have arranged that the desorption of the crystal holder could be easily High reliability Having adopted a high reliable vacuum stepping motor in the drive section this is2. Evaporation sensor Sputtering sensor Sensor with no water cooling tube Bakeable sensor CRTS 4 CRTS 6 CRTS 0 CRTS 0 CRTS 80 CRTS 4U CRTS 6U Model CRTS 84 CRTS 86 CRTS 80 CRTS 84U CRTS 86U 3 9 1N 2 a 100 290 OR 80 300 i El NN MK 6 Evaporation at 100C Evaporation at 80C Evaporation at 300C 0 0 Re Application AFleas Evaporation and sputtering ea AF lees Evaporation at 100C or less Evaporation at 200C or less at 200C or less using ultra high vacuum using ultra high vacuum Max Baking temperature maX 150 300 IM4NM Niw SlyS 31X19 34x19 28X19 45X30 31X20 34X20 mm Maximum sensor head dimensions dia 31X19 dia 34 X19 dia 28 X19 dia 45 X30 dia 31 20 dia 34 X20 EE 9 Cooling water tube length 100 800 100 800 mm Cooling water tube diameter UM 9 a Cooling water capacity cc min 200 400 400 200 400 TEED TE VIALE RT EI Cooling water tube connection A A YA XT YA XT 1 4 YA Synflex tube 3 8inch joint
3. This catalog is subject to change without notice to reflect performance Improvements etC WW 100 PRINTED WITH Sovink lt NE1894 1 2006103000UYO
4. SDuttering sensor CRTS 6 Sensor with no water cooling DiDe CRTS 0 Water cooled jacket Multi sensor CRTS 12NS ULVAC SOLUTI Ns S9J9S SIHO 0SU8S 9IIOJIU0O UOHIS0d8 adA UOHBII9S0 IISA9 lt S1HO CRTS CrVstal 0Scillation type Deposition Controller Ssensor CRTS series CRTS CRTS Servies Selection Guide CRTM Sensor Connection Diagram Temperature during measurement YES will Baking be done Temperature during measurement NO CRT CRT Series Selection CRTM 6000 9000 External cable standard ee Oscillater Control cable optional H Oscillator Water cooling connections 150 mm Auxiliary cable 150 mm CRTM 1 CRTM 100C 200C 80C 100C
5. 12 EdUIDDed crystal number 12 pieces 29UN 2 5MHz AT Capacity of Crystal 5MHz AT cut crystal 1 4 Heat resistance temperature 350 A 1 4 VCO Water cooled pipes dia 1 4 VCO joint Cooling water volume 1L min 2k Weight 9 mm Dimension mm 104mm XS59mm Controller section 2 Indication sensor number LED Internal status indication LED BUSY ERROR RETRYEND i INIT CNT STOP INTER L SENSOR NO BUSY ERROR RETRY END i DC24V 3 0A MO 2kg mm Dimension mm 100 W 250 D X99 H 2 0 80C 150 gt Values Indicated here are surrounding temperatures measured by thermocouples In the vacuum The sensor head temperature shoud be kept within the range of 0C to 80C during measurement 2 W Width D De
6. 3 standard accessories Max i ns6mn 5 or OSM Oscillator internal cable max 900mm auxiliary cable 150mm crystal 5pcs silver or gold 0SM COnnector Max 900mm 150mm 5 or Oscillator internal cable max 900mm auxiliary cable 150mm crystal 5pcs Silver or gold 5 or UFC 070 0scillator crystal 5Dcs Silver or gold flange UFC 070 Flange 0ption 30 UFC 070 CONFLAT Dia 30mm boss type company standard UFC 070 company standard CONFLAT compatible other flange 1 0 80C 150C Values i
7. 200C 300C 350C 2 CRTS 100C or less 200C or less 80C orless 100C or less 200C or less 300C or less 350C or less 9 CRTM CRTM 6000 9000 CRTS 80 CRTS 4U CRTS 6U CRTS 0 CRTS 4 CRTS 6 CRTS 0 Multi EE The following 3 items are required to install and use the CRTM unit CRTS 84U CRTS 86U CRTS 80 CRTS 84 CRTS 86 CRTS 80 ie 1 CRTM a ayy 2 CRTS sensor UFC070 UFC070 3 Vacuum feedthrough With UFCO70 With UFCO70 VacUum Ma 0 Cooling 12 crystal efer to he CRTM series section for details regarding sensors Vacuum Vacuum feedthrough feedthrough feedthrough Waterjacket Multi sensor When using CRTS 80 series units with the CRTM 6000 9000 a feedthrough feedthrough Sold Separately Sold Separately Sold Separately control cable sold separately is required Specificasions Single sensor Synflex tube 1 4inch joint Synflex tube 3 8inch joint Synflex tube 3 8inch joint Synflex tube 1 4inch joint
8. designed to focus on reliability and durability in top priority including precisely controlling the stop position of the crystal too Automatic switches to crystal In case the life of crystal abnormal oscillation is detected during forming a film it is automatically switched to crystal by the signal from the controller CRTM Deposition can be continued as it is until all 12 pieces crystals end its life Vacuum external motor cable Controller for sensor DC24V Oscillator CRTM AC100V Oscillator control cable Vacuum external cable Auxliary cable Cooling water introduced flange Signal introduced flange RS Hermetic terminal A Sensor head fixed bracket Cooling water tube Standard components Vacuum internal motor cable 2 Vacuum Internal cable Sensor head OSM OSM connector 1 4VCO 1 4VCO joint CRTS 12NS Specificasions Multi sensor Sensor head section
9. CRTS 4U 1 4 CRTS 84U 1 4 inch NN CRTS 6U 34 6 3 8 CRTS 86U 378 inch H H H 0 Le Compatible water cooling tube sizes 5 mm CRTS 12NS Multi sensor CRTS 12NS OR Multi sensor Head 62 4 40 2 1 4VCO o CO 29 for sensor 107 3 head attachment 37 5 50 4 dia 4 5 6 D sub 9 pin female Multi sensor Controller a 3 ULVAC MULTISENSOR CRTS 12 1 RETRY END O BUSY L a OERROR 8 CO POWER INT CNT STOP 1A 9 0 Terminal for be 5 power supply 100 2 250 9 D sub 15 pin female M A CC ULVAC Inc Components Division TEL 03 5218 5708 TEL 06 6397 2286 TEL 022 358 7755 Overseas Sales in Japan TEL 0467 89 2261 USA ULVAC Technologies Inc TEL 1 978 686 7550 KOREA ULVAC KOREA Ltd TEL 82 31 680 9034 TAIWAN ULVAC TAIWAN Inc TEL 886 2 8866 1700 CHINA Shanghai Office TEL 86 21 64725879 SINGAPORE ULVAC SINGAPORE PTE LTD TEL 65 6542 2700 GERMANY ULVAC GmbH TEL 49 89 960909 0 http www ulvac co jp
10. ON For the cooling Dipe the vacuum internal length can be designated until 50 to 800mm Dimension WAY A Single sensor CRTS 0 CRT 4 84 CRTS 0 sensor with no water cooling piping CRT 6 86 CRT 4 84 evaporation sensor and CRT 6 86 sputtering sensor eR G G Water cooling jacket 2 W dia d NNN gt 0 Evaporation sensor 4 9 8 CRTS 4U 84U CRTS 6U 86U CRTS 4U 84U CRTS 6U 86U bakeable sensors di a Sputtering sensor 34 6 A CRTS 6 dia 6 mm unit mm d CRTS 4 31 gja 4 CRTS 84 CRTS 86 CO UFC070 og S SR CONFLAT G G EE gt UFC070 rotating flange dE 5 CONFLAT compatible Ts d BNC bakeable sensors W da d UM AN Synflex tube fixture
11. ULMAC Evaporation Sensor CRTS 4 CRTS Crystal Oscillation type Deposition Controller sensor CRTS series CRTS 5MHz AT CRTS CRTS 80 12 CRTS 12NS SD CRTS 12NS The CRTS series sensor used in ULVAC crystal oscillation type deposition controllers all use 5MHz AT cut crystal ULVAC offers several sensors on measurement environment and primarily temperature The CRTS 80 series sensor using long life span oscillators and 12 pilieces crystals mountable rotary type multi sensor CRTS 12NS js also available CRTS 12NS can be used In Such as a high rate evaporation and continuous multi layer evaporation with safe Bakable sensor CRTS 4U
12. ndicated here are surrounding temperatures measured by thermocouples In the vacuum The sensor head temperature shoud be kept within the range of 0C to 80C during measurement The temperature limitation for the internal cable is 150 C If the temperature is higher than this limitation should use water cooling tube to wind around the cable and use aluminum film to protect it 2 100 800mm Cooling water tube length are selectable from 100mm to 800mm 3 Max 900mm CRTS 0 OSM CRTS 80 OSC 12D Internal cable length varies with the length of cooling water tube Max 900mm Not include 0SM connector for CRTS 0 series sensors option CRTS 80 series sensors use long life span oscillators it IS necessary to use optional 0scillator contorol cable WAY A CRTS 12NS 12 5MHz AT 12
13. pth H Height Standard configurations Sensor head Controller OSC 12D 0scillator 0SC 12D 0 9m Vacuum internal motor drive cable 0 9m 0 9m Vacuum internal oscillation cable 0 9m 0 15m Vacuum external auxiliary cable 0 15m 5m Vacuum external motor cable 5m 4m Oscillator control cable 4m OSM 0SM connector 8 pin hermetic terminal DD 15 Dsub15 pin connector 5MHz 2 5MHz crystal 12 pcs Instruction Manual 8m 12m 16m 8m 12m 16m is optional 0ption UFC070 1 OSM 1 50 800mm Introduced flange UFCO70 set Electrode Introduced flange 1 Cooling water introduced flange x 1 CAUTI
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