（日本語版）
Contents
1. RF RF OFF ON ETCH 5x10 2Pa LL ETCH2. ON RUN PUMP 2 Manual Meintenance Maintenance Cool Cool TMP Cool TMP Start TMP NOREMAL TMP TMP RESET ENTER STOP ENTER TMP TMP Alarms Reset TMP Manual Pumping Load Window Etch Pumping Etch 5x10 2Pa
3. 26 AUTO N2 Reset 1 Reset Interlock 2 2 AUTO MANUAL LL ETCH 2 Manual Meintenance Maintenance
4. Wafer LL Position LL Vent LL AUOT Jobs Auto Pause STOP LL 5 ON TPOWER _ON ON TMP TMP 6
5. LL Vent LL LL LL AUTO AUTO LL LL Pumping 4 AUTO MKISS0GI2 N2 AT rR Recipe No No Recipe List Auto Select Auto Select Recipe No
6. Start AUTO AUTO AUTO OK Auto Bz OFF OK AUTO LL AUTO N2 gt AUOT JOBS MANUAL Etch CH Monitor AUTO LL AUTO Manual Pumping Load Window LL Pumping LL Wafer LL Position Wafer LL Position
7. LL TMP Start TMP TMP Cool TMP PUMP RUN OFF OFF AIR N2 N2 AUTO 3 LL AUTO N2 9 Manual Manual Manual Pumping Load Window
8. LL Pumping LL TCG Maintenance Load Window Load Mainte GV Load Mainte GV Arm Mainte ARM MAINTE ORG JOG ORG SENSOR ORG ORG 21 Maintenance Load Window 22 Load Mainte ETCH Drive ETCH 23 LL Drive 24 LL GV Load Mainte 25 ETCH
9. L 201D CCP 32 427 215 2006 12 8 1 ON AIR ON POWER ON TMP Alarms Reset 2 TMP 7
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