マニュアル MPG400_MPG401 和文 TIMA48j1
Contents
1. tima4gj1 1 2010 01 HR2. 1 2 3 CP CF tina48e1 a
3. e C 4 73 23 EEC 89 336 EEC
4. 10 mbar 1 107 mbar 20 5 x 10 mbar 2 lt 1 x 10 mbar 102 mbar 10 mbar 1
5. 1 bar
6. INFICON AG LI 9496 Balzers V ace PN MPG400 FPM 351 010 DN 25 ISO KF 351 011 DN 40 ISO KF 351 012 DN 40 CF F MPG401 351 020 DN 25 ISO KF 351 021 DN 40 ISO KF 351 022 DN 40 CF F PN 351 010 mm MPG400 MPG401 5 x 10 1000 mbar OHA INFICON
7. e e e e AiG air No 5 x 109 1000 mbar No 30 1 x 108 100 mbar 5 1 x 108 100 mbar 0 gt 10 5V 1 82 8 6V 0 6V lt 0 5 V gt 9 5V 2x10
8. tima48j1 1 2010 01 TINFICON e e KS
9. 1 VGC401 2 VGC402 3 VGC403 ON i Skilled personnel
10. 5 Aft 1 1 Copyright 1991 by MaschinenbauVerlag GmbH Lyoner Stra e 18 6000 Frankfurt M 71 FAX 1 Order No 2121 tima48j1 1 2010 01 11 INFICON http www inficon jp 222 0033 2 2 8 NARA E II 5 BR 222 0033 2 2 3 1 1 TEL 045 471 3328 TEL 045 471 3326 FAX
11. tima48j1 1 2010 01 INFICON E CF tina48e1 BFR WS R AF 1 5 HV gt ATM gt TR 1 8 1 15 30 VDC 2 3
12. 10 kQ 50 V 10V INFICON MPG400 FPM 75 MPG401 Ag Cu Sn Ag Mo Ni Au W 20 cm lt 10 bar 5 55 150 C 120 C 40 65 C lt 80 31 C 40 C 50 2000 m IP 40 2 3 MPG401
13. p 104 mbar 10 4 INFICON 623mm 1 5 mm HV gt 4 20 V 5 x 104 mbar 1 3 6 10 N tima48j1 1 2010 01 INFICON 15mm lt ATM gt 1 x 103 mbar 8 60 V 9 ET
14. INFICON MPG400 MPG401 351 010 351 011 351 012 351 020 351 021 351 022 e EN 61000 6 2 e EN 61000 6 3 s EN 61010 AG Balzers 2005 6 8 Markus Baffy 2005 6 8 Dr Georg Sele tima48j1 1 2010 01 INFICON 10 tima48j1 1 2010 01 INFICON
15. 10 kQ p gt 10 mbar lt 10 ms p 10 mbar 1000 ms 85 kQ 6 p gt 10 mbar Low 0V p 10 mbar 9 Low 0V p 10 mbar High 15 30 VDC LED melt ON LED tima4gj1 1 2010 01 EN 61010 SELV E 15 30 VDC 1 V 2W Baan 21 AT 16 30 VDC 1Vep HV gt 104 mbar ATM gt FCC68 8 8 50 m 8 x 0 14mm lt 3 3 KV lt 500 uA
16. 1 2 3 4 koo kogo oO OoOO O OoOO kogo 4 O oO O 5 O OoOO
17. 150 C tima48j1 1 2010 01 TINFICON 92 A 18 _ DN 25 ISO KF pb 1E 04 D 101 667U d 1E 02 1E 00 1E 02 1E 04 1E 06 1E 08 0 0 5 15 25 35 45 55 65 7 5 85 9 5 10 5 UM p 101 667xU d U c 0 6 logiop 351 010 700g 351 011 720 g 351 012 980g mbar Pa Torr d 11 33 9 33 11 46 c 6 8 5 6 6 875 5x 10 mbar lt p lt 1000 mbar 3 8 x 10 Torr lt p lt 750 Torr 5x 107Pa p 1x105Pa p mbar 19 H He Ne Air 6 02 4 co 2 N2 CO 101 Ar 12 2 4 gt 10 mbar Kr 2 Xe 109 6 4 2 107 8 6 4 gt 102 1032 4610 2 461072 4610 2 4610 2 46 10 Pes mbar tima4gj1 1 2010 01 p mbar 19 6 re 10 101 mbar 102 Ar On OPQ N ADODO N AOOO N FOOD N A t O O NZ N a x o 6 106 2 4610 2 4610
18. 4 5 6 7 8 8 FCC 68 2 3 5 10 ON e 1 x 10 mbar tima48j1 1 2010 01 dry air Oz CO HEU No
19. INFICON Inverted Magnetron Pirani Gauge MPG400 MPG401 tima48j1 1 2010 01 TINFICON mee sot 1 1 1 1 1 6 97 LCCN 1 2205 8 xbas 2G2865bdwad oh nie tabas DOR Leadea ees beads 1 RE ER bees 2 2 POU Ses dare hee Ou a oe eee Se REE ee nee eae 2 Gs Se he oo oe enw deo aeke Gee eed ee eek ees 4 Pasae ge eda ediaisorti esseaseetiaessaensanbhosst 4 HI 5 ee re eck hae a Ae ae ease ne et eee 5 6 6 wo sag a ea ee ea een ae eanscesuuadtaiaiee 7 ee erases Oe nae ewan aa ees ee ee 7 ane pean OE Ae ea iE Vad E ee REE ere e 7 ADEA a pees E E E ay teria a E E E re ete EE 8 a 8 Abn nne tose Sine cudnet and eiedes eee apileecledes 8 EOE ee eudinaed 42 E ute aXe E ene aaa A eae 9 ri 9 9 acknecegesedaodetawhs Pedeesan gd eewatebteanera 11 tima48j1 1 2010 01
20. 045 471 3327 FAX 045 471 3327 Document tima48j1 1 2010 01
21. 2 461032 4e1022 46 101 Per mbar 10 mbar Pett K x Air Xe Kr Ar Ho Ne He HAM CO No 3 C 1 0 XE 0 4 0 5 0 8 2 4 4 1 5 9 D TNFICON 2 5 bar O KF O EN 61010 e CF e KF
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