4.96MB - 高知工科大学
Contents
1. 2 2 2 2 OBIC VDD DOB OUTPUT GND DOB INPUT He Ne 632 8nm DOB2. 43 1 1I 1998 2 IOptical Beam Induced Current 2007 3 1990 24 10 1996 4 LSI 5 OBIC LSI 2006 6 L2007 7 ESD 2009 8 http WWw Jpo gO D shiryou s_sonota hyou un_g1Jutsu sem1con_vacuum_tec h 1 8 1 htm PDF TOSHIBA TC4069UBP UBF UBFT PQ10478JJ02V0TN 44
3. ESD 0Q 300V 500V ESD 1kV 10kV 20 4 7 ESD 4 6 ESD 4 8 ESD LSI
4. Visual BASIC PC mm 3 12 3 12 SUM1 VDD SUM2 LSI 3 13 3 13 15 3 13 LSI LSI 3 13 VDD GND 8 14 SUMI SI _ SUM2 GND 3 14 3 15 VDD GND QDD VDD 8V Vin 0 83V
5. i in 70 ii1i LSI 8335 iv 3 6 3 5 3 6 3 7 LSI I 3 7 10 3 8 LSI
6. QB 42 6 Nch Pch OBIC Nch Pch 1350 cm v s 480 cW v s ESD VDD 0 28IV vonage Oy VDD 0 5IV
7. CF4 SF6 CHF3 02 N2 Ar 3 CF4 02 3 1 180m Torr lt CF4 1 Osccm 30sccm 5000A min 0 3 1 CF4 02 1 8 7 12 3 10 3 10 3 9 RIE RIE 3 10 Pch
8. ee Pch Ne OBIC Tr ON OFF PN OBIC OBIC
9. 1 3 2 OBIC 3 RIE 4 5 OBIC 6 2 OBIC OBIC 2 1 OBIC OBIC Optical Beam Induced Current Optical Beam Induced Current 2 2 Cu NS NVY a MA es 3 NX 3 aan i a J IN _ 2 1 OBIC JDLM 6602E OBIC OBIC
10. 3 4 4 OBIC 5 6 5 7 1 2 Pch Pch 5 8 OS Ei 4 7 4 5 i 4 1 1 ll e PD 0 iu OF 1 4 4 5 8 92
11. 3HNO FC LSI 1 LSI LSI 83 3 gd SN RE a 5 0 3 4
12. 4 1 50 5 4 4 4 5 OBIC 5 5 5 4 OBIC C4 a 4 mn a 5 5 5 6 1 2 5 7 8 4 S1 5 6 1 2 OBIC 5 7 3 4 0BIC 5 3
13. ESD ESD Electro Static Discharge ESD ESD ESD ESD ESD ESD ESD R C 8 G ESD 2kV 5kV
14. 3 8 3 3 RIE RIE 1 RIE RIE Reactive Ion Etching 0 11 3 9 RIE 3 9 RIE
15. DOB10 40pA 20mA 6 EWS SUNIPC ie JDLM 6602E lf 2 2 3 3 2 3 0BIC PN PN 2 3 hy hv gt Eg ee Eg
16. 4 11 YAG YAG 532nm 1nm 23 ll I La we sk ao YAG 1 4 12 4 12 YAG 6 5 EN 8 8 CN WW 3 co PN 4 13 1 24 4 14 4 12 2 Pch PN WW Ed xD WEEE EE DDI 1 e gt 4 14 2 Ci
17. OBIC LSI 1110161 23 2 8 LO i 2 1 2 OMRON PP 2 1 8 2 OBICISS Cj 3 2 1 OBIC 3 2 2 i ii AAAAA l d l ls AN A A A A 3 29 96 KK 5 2 0 NRN 6 3 kc A 8 SU 5 uP 0 00 02 020 2 8 11 8 SR i 11 15 4 18 4 1 kk 18 4 2 ESD kk 20 4 3 YAG 23 5 5 ME PP PF 29 5 10 30 520 ESD 2G GA 34 5 3 YAG 35 5 4 YAG 2 39 6 kk 43 43 EN ol 43 UE 820 43 44 1 1 1
18. PN OBIC 4h EE rs _ ie 0 iat 1 1 1 Lt Au 4 lt rE ee ch 5 19 Nch OBIC OC 9 7 5 20 0 5 V 5 20 1 VDD 0 5 V 5 14 OBIC 4 2 5 5 4 YAG 2 i 2 _ ae ae
19. 4 1 BLACK EAGLE 10 V 442 4 2 18 Ei C ea PP 4 1 lt 1 SA 4 3 4 4 4 3 444 4 6 1 1 19 4 2 ESD
20. PN OBIC PN OBIC OBIC PN N P NR i RR OBIC A RCN PN OBIC hy hv hv a tL eg rr
21. PN 1 3 1 Pch 5 26 1 4 41 PN 5 27 0 5 V 5 27 VDD 0 5 V 2 1 A
22. PN i ER 2 4 20 4 18 2 Pch PN _ 4 21 4 18 3 II 9 PN mm sts A 4 21 3 27 4 22 4 18 4 Nch PN 4 23 4 18 5 PN 4 23 5 YAG 7 2 1 10 2 7 28 5 OBIC 4 OBIC 3
23. 2 6 2 4 2 5 OBIC 2 7 2 8 OBIC 3 3 1 IC TC4069UBP 3 1 TC4069UBP 6 8 1 3 2 VDD VSS8 OBIC 14 7 VDD 6 VSS8 OBIC 14 Vpp 12 06 15 10 05 4 O4 13 16 I2 3 3 5 Vss 7 01 O2 3 1 TC4069UBP 3 2 3 2 LSI
24. 4 OBIC 5 1 90 5 2 5 1 860 5 1 5 2 5 1 5 2 Pch A Nch 29 B 5 OBIC Pch Nch 5 1 53 OBIC 360 OBIC 1 OBIC OBIC
25. 2 4 Eg 1 17leV OBIC A 632 8Inml E hc AA h 6 63X10 34 s c c 3 0X10 8 m s A 632 8Inml RE J 6 24 10 8 eV R 1 96leV E gt Eg OBIC He Ne 2 4 N P eon OBIC DOB P N 2 5
26. T ll 1 1 G OBIC Gi 5 14 5 14G G 90 OBIC YAG a 5 15 1 5 15 OBIC SO 5 16 2 5 17 Pch PN OBIC Nch 5 17 Nch PN HS6 re or il a 5 18 4 5 18 Nch
27. TDD Idd uA IDD uA Idd uA 2 3 15 Vin IDD 16 3 15 25950 25940 25930 25920 25910 25900 25890 25880 25870 25860 25850 IDD uA Idd uA ldd 2 5 3 3 5 1 5 2 V 3 16 Vin IDD 3 16 ESD Vin IDD IDD 17 4 4 4 1 4 1
28. LSI 1C 3 4 ESD 4 7 LSI 21 8000V 4 8 4 9 ESD RIE ESD 4 9 ESD 4 10 8 4 ESD 00 7 CN 4 3 YAG YAG
29. 2 nC be H a G OBIC 5 21 5 21G 90 OBIC 1 2 5 22 1 5 22 PN 1 1 OBIC Nch 29 a a _ ur PF 5 23 5 23 Pch PN 1 2 OBIC IN 5 24 3 5 24 9 PN OBIC 40 po Ess Ss 5 25 4 5 25 Nch
30. 4 gt me lt _ gt 3 U pt 4 re Sh 2 lt N SE _ 1 4 15 4 12 3 Nch PN A EN 4 16 4 12 4 PN iil I U 4 16 4 25 ri 3 4 4 17 4 12 5 Nch 4 17 5 1 2 YAG PS gt A 4 18 YAG 2 26 t ty Y 4 19 4 18 1
31. Nch 3 2 180mTorr CF4 SU0sccm 15sccm 02 1000A min 3 2 5 13 3 11 3 11 38 10 3 8 TOC4069UBP RIE 2 14 3 4 RIE LSI RIE 3 12 TDD SUM
32. LSI LSI OBIC PN 1 2 SEM X OBIC OBIC OBIC
33. Tw 5 10 5 9 5 10 HS3 5 2 ESD ESD 3 4 OBIC 83 4 5 11 ESD 5 12 ESD OIV 5 13 ESD 0 28 V 5 11 ESD OBIC 90 ESD 8 4 5 12 VDD MV 519 028V 5978 54 5 3 YAG 1 im me ee ra i 1 NE ll ll 5 mm ll ll gH N pe 1 aa eh mm UL EEL 3 go ia rs i am re lh e 5
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