コンパクトプロセスガスモニタQulee CGM シリーズ
Contents
1. O XAZOINOUMHMAR SHAE LS OBAVICEY PRCLICBETSCEPHNET This catalog is subject to change without notice to reflect performance improvements etc NE1828 1 2010016000UYO2. Maximum Sensor Operating Temperature F Ja ARE CYyY1ZY ES 250C Maximum Bakeout Temperature electronics removed Aim 80 Operating Temperature Range 10 40T A 80K Operating Humidity Range 15 80 B LARRETA 15 80 not condensing IP Rae IP IP30 2 4 2 b IP30 Sensor Unit RIKI Y Power Connector MSTBV2 5 3 GF 5 08 VU gate Serial Communication Type RS232C RS485 77X 3 HAR RS232C RS485 with Option AMBAWAIARIY External Input Output Connector D sub15EY M2 65 D sub15pin M2 6 Screw YUP IRIY Serial Communication Connector 646 HEY IAS IRIY RJ 11 6 Pole 6 Wire Modular Connector RJ 11 ARAM TES External Input Output Signal PHOZAJ 0 10V x2 WEBTV IY Oy PATI Ata X 1 LS W71 x1 FIL SEM RF S88 DEY KRAY Hx 2 EF BS SH Ry KRY Nx Analog Input 0 to 10V X2 External Interlock Input Pressure Protection X1 Partial Pressure Setpoint Output x2 Fault Alarm Total Pressure Setpoint Output x1 YI PIIF Software Qulee QCS Ver2 4 Windows XP Vista Qulee QCS Ver2 later Windows XP Vista ENE Standard Accessories BRIRIY RS232C7 JIb 8m VIRILITY AYAZ ILCD WIRI E 2 U4 168 Power Connector RS232C Communication Cable 3m long Software Install CD Instruction Manual Clean Paper AA ZEA Optional Accessories QIP
3. Quick Install Package System ttk APY a VAVOIER RS232C7 JIb 5 10 15mM ACP STS RS232C 485 2488 RS485 DIL IRI IRORI TIL ABDIJ QIP Auto measuring package spec Cf optional catalogue RS232C Communication Cable 5m 10m 15m long AC Power Adapter RS232C 485 Converter RS485 Branch Connector and Junction Cable Input Outpu Connector CEY Y72 CE Marking wi Compliance M2 EY Dimensions BiG mm unit mm 90 220 76 79 X CGM 051 QIP CGM 052 QIPl44 FY a v n078 Cf optional catalogue ULVAC RASHID BRB ULVAC Inc Components Division RAAB TEL 03 5218 5708 RAAB TEL 06 6397 2286 WEZE TEL 022 358 7755 Overseas Sales in Japan TEL 81 467 89 2261 USA ULVAC Technologies Inc TEL 1 978 686 7550 GERMANY ULVAC G m b H TEL 49 89 960909 0 bMUSbelt RUSSIA O00 ULVAG TEL 7 495 6518747 CHINA ULVAC SHANGHAI Trading Co Ltd TEL 86 21 6127 6618 TAIWAN ULVAC TAIWAN Inc TEL 886 3 579 5688 KOREA ULVAC KOREA Ltd TEL 82 2 3473 2920 SINGAPORE ULVAC SINGAPORE PTE LTD THAILAND ULVAC THAILAND LTD MALAYSIA ULVAC MALAYSIA SDN BHD INDIA ULVAG Inc India Branch A LN YP KYLA http www ulvac co jp TEL 65 6542 2700 TEL 66 2 3124447 TEL 60 3 5121 4700 TEL 91 40 27007006
4. ULVAC fQulee AVYNIbIDLAFAAERZ Qulee CGM YY Z Compact process gas monitor Qulee CGM series SEP PaF COmtaR A DREZ PMY TILE CB LYPT AE CE BIC LICULVACD Mave IAD JORRA EJTI HEEE YORE ROADE ZK LEORA ELIOMAYYI FOSETS ANyIUYVIREOFJOLABE Bt SAROI cms CT BRE ORTE AE Oaxat PCL A TERIER HHH E One Click ak NIC CH i EER EIS ARE TOPAELSUY ACA CEPA AE PaM RIESE BAS AIESIAE U TFAbBAEORE SHRED AE Qulee QCSY 7 LU LY DEERE QIP Quick Install Package System DXI APY avnAgoOTFEe R BAe OAE FPD FEACCORBRERE QAWwySUY FRE OPOLAELIUYS OA IU VIRENDRA OA WW IUYIREO MEY H20 BET SEREREOU ITANC PV FPD Semi Ead E a Qulee pronounced as KLEE is ULVAC s latest model for residual gas analysis and gas monitoring during a process Feedback from facility engineers in various production lines are reflected in the new product design offering utmost simplicity The Qulee maintains high accuracy and resolution even at high pressure 1Pa or less E Features Display integrated design Simple operation One Click function No differential pumping system required at 1Pa lower Various leak tests are available Total pressure measurement Qulee QCS Software is included Auto measuring package Cf optional catalogue E A
5. pplications Process monitoring for PV FPD and Semiconductor system Residual gas analysis in PVD system For the downtime reduction of PVD system For leaktesting ULVAC SOLUTIONS AYE Y4AO0LN GMAC s H s WIND 33O JoyUOW seb ssedo0id joRdWOD xL IND 99IND ULVAC IYNIRFOPAHAEZY Qulee CGM YU Zz Compact Process E tt Specifications Gas Monitor Qulee CGM series Bust Model No CGM 051 CGM 052 SSI Mass Filter Type POs RE Ss Tat Quadrupole Sean Mass Range 1 50 amu SBE Resolution M AM 1M 10 P H RIE Sensitivity 0 1uA Pa 0 1mA Pa Naa oibie Partial Pressure IRON RA 1x10 1Pa BA 2 FAEZI Maximum Operating Pressure 2Pa 2Pa FC 1x10 2Pa SEM U PrUF 4 Linearity 1Pa Ras Detector Type J27 Y2 Faraday Cup REFS 775S7 DAyT EM Tube Faraday Cup D4DXY h Filament Ir Y203 4 AACEBE lonizing Voltage 40eV Teyys eri Emission Current 0 1mA 0 4mA DEGAS Degas BTE 300V 5mA Electron Bombard Type 300V 5mA SERES Total Pressure Function D capable One Click RE One Click function aD He H20 N2 O2 Any Gas Capable He H20 N2 O2 Any Gas TETEE TA cols Stas capable SREE Power Input DC24V 10 50W FE Si R TA A 2 1Kg 0 44Kg 2 2Kg 0 44Kg AHYI ZY DIS y MER 4200
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