マルチループコントローラ (CPXA・CPXC)用 プログラミングローダ
Contents
1. R D R ST6OT_ MI_ sn ER ST641 ST65 llsis lf SIB8l_ ST69 yl 0 ST74 1 SA I ST79T ST80 ST81 SI ST84 ST85 ol lsil ilcY 0 ST89 ST90 ST91 ST92 ST93 ST94 cl ST96 ST97 ST98 ST 99 D F F MMMlWllllllllMlllllMll MM MM T 2 4 4 U2. 2 3 5 ee 2 3 6 OT ER 2 3 7 2 4 1 DE EE Rt 2 4 2 T T 2 4 3 Sie ee 2 4 4 2 4 5 OM a RD 2 4 6 2 8 Om COPX 2 6 SR RGS 0 CPX 2 7
3. 10 IX WAIT READY COMMIUHIGATION PC CPX es CPX Water Loader I 3 A 33 2 6 CPX U GPX Loader tatinn Ho 1 ED ME IMDGO 1 LOOF 1 79a4 ET 1 0 0 WW 1 INFUT IrAe1 nn1 Fila INFUT IrAe1 002 n 1nonn Tl 2 oPENcLogE FER LOADER TI tp 1 HE 3 E CPKA2 u
4. CPXA CPXC CPXA CPXC 1 3 CD ROM 1 1 4 Microsoft Windows98 2000 XP ee Windows95 Me 25MB 64MB RAM RS2 3 2C COM 1 CPXZL1 0 1 5 1 2 3 4 5 6 7 6 CPXA CPXC I NE A WAEFER LOADER CD ROM
5. FER LOADER TI tp 1 HE 3 E CPKA2 uo 9 A 30 Te AOxh 22Wsh oPENMCLOBE LOOP1 Waier Loader I 2 U IOK COMMIUNMIGATION PE PA CPX 3 7 2 8 CrP Lnarder tatinn Ho E a Gtr tr Tn Cr EE Ctrl P ma
6. CPX CPX CPX Station No 1 WAFER LOADER TI WAFER LOADER I 1 GPXA27PCRG2 rl Water Lnader I CPNA2 FC GPC2 WAFER LOADER TI CFP 5 CPX Fuji Electric Co Ltd 2 1 Version 3 2 1 Statinon No 1 CPX Ju Version 3 2 1 MLC Not Found ECPX Loader Statinn No 1 FE C oO
7. 98 2000 XP Setup exe WAFER LOADER 2 4 0 0 U 0 CPX CPX 0 CPX SYSTEM SETTING FRONT BAUD RATE 9600 PARITY NONE STOP BIT 1 C Q
8. Fage Padge Pade3 Pang4 Pang5 Pageb Pager Fages YY LOOP1 2nd rTILOOP21st Loop2 2nd LOOP31st ILooPs 2nd LOOP4 1st Loopa4 2nd 1i4 Page 214 Pade 3i4 Page 4i4 Page ILooPt 1st Loop2 1st Loops 1st Loopa 1st Loop1 2nd Loorz2 2 Loors 2nd Loora 2nd 1 Pade 2J2 PanB ILooPt 1st ylLoops1s Loop 2nd Loors 2nd Loop2 1st Loopa 1st Loop2 2nd Loora 2nd lt 7 Ohj 1 Ohi 2 Ohi 3 Ohbi 4 Ohi 5 Ohbi 6 Ohi 7 Ohbi 8 Loop1 1st Loor 2nd Loop2 1st lt llLoor2 2nd Loop3 1st Loors 2nd Loopa 1st Loora 2nd LOOP DSP PAGE EE LOOP DSP TYPE 1LooPDSP lg gt page LOOP DSP TYPE a421Looptype gt 2LOOP DSP F hade LOOP DSP INIT a Loop 4LOOP DSP 2 hade CPXC 1 LOOP DSP TYPE LOOP DSP INIT 1 LOOP CPX
9. CPX 1 7 RS8232C 1 RS232C COM 2 RS232C USB 1 Program Files WAFER LOADER Com Set ini 2 COM 38 2 USB RS232C USB COM No 1 WAFER LOADER F CE Ors LAD ED E Program Files WAFER LOADER MI 2 GC jp P2000 CommanFiles 1
10. CPXA CPXC CPXZP111 INP TN5A1422 1N Readme txt
11. 2 TAG TNPUT WW TAG TNPUT ITAG1 002 oPENicLosE gt opENicLosE gt LOOP1 CPX 2 6 CPX 2 7 2 3 1 TAG TAG ILOOP1l ITAG T TAG er E 0 DO 7s2m GU gt PEPST ii TAG gO 1 9 7 FM TDI TMS INPU Nm WINDOW 1 LOOP 1 k EE EE TIE I EE E15 ECPX Loader Station No 1 FE GG av O U 9 D HE WINDO 1 LOOP 1 0 EE Ta Rh
12. o gt ENTER ENTER 4 2 3 5 10 11 LOOP1 G we E ET LOOPT TaG 1 th 2 Ta 1NFU 0 Nm WINDOW 1 LOOP 1 3 M 2 ah FO EE EE CPX Loader Station No 1 EF E OO 0 UO 9 D 1 C 22 WO WO En XNo PNo INo sec No lsec D1 0 00 PO SUUU U I 3U0U 0 Dol 0 0 100 00 PO2 3000 0 IO2 3000 0 DO2
13. 2 5 1 RUN STOP 2 5 2 00 2 RUN STOP CPX RUN STOP 2 5 3 FIX CPX FIX 2 5 4 2 2 WAFER LOADER WAFER LOADERI 4 Wcrd32 9 Adobe llustrator BIJ Microsott Word VY Microsaft PowerPoint Viewer 97 Br Microsaft Word NISN Explorer Outlook Express Windaws Media Player Windows Messenger ge DiskX Zip WAFER LOADER 9 2 Corp WinNT Acrobat Reader 5 0 py0 De tP OK
14. SW H SW L P H P Lj MW H gl il ea Me MWY L Dv H DPH DMH HH ACT REVERSE 9r 2 TAG 9 Pj Dj DTj TF TaAGl D02 GAP ENL KCUT WF 1 B1 F 2 B2 F SV SVPR MI NVPR lllllddd CPXC gt ECPX Loader Station No 1 FE GG au O 0 U D Nm WINDOW 1 LOOP 1 EE EE PE IID TAG TAG1 00 lt M SV H P SV L I PV Hj Dj PV Lj DTj M H 8 TF My L BaP
15. IIR Fr Ma 1 T TA 5 kl T1 CHTI TF EF TE SP E MP TIWG TST1 DOI nn RT TT Eh TT 1 Bmn FTF nn rT rint 3 WE TSFH kT 1 TMG 1 2 3 3 2 2 LOOP1 2 0O GFK LnadEr tatinn Mn 1 rT hi TL pg I a II Ta Lg k Mi LOQP3 nHk2O 3 17X LOOP4 iL UD 7 TG INPUT 5 6 Nm WINDOW 1 LOOP 1 T 1 CPXA gt CPX Loader Station No 1 EF EE OO U NB WINDOWW 1 LOOP 1 t 8 PID
16. OF OK 9 FUNCTION NO EL OK NO CANCEL NO OK NO CANCEL 1OK CANCEL ECPX Loader Station No 1 3
17. 1 XXXX LOOP1 0 XXXX ie LOOP8 2 LOOP4 3 a LOOP2 1 LOOP3 2 LOOP43 0000 03FF 8 lt WNo 00 8S WNo 15 S T LINK WNO 00 15 lt SMAN1 4 SMAN REQ1 4 R ACK 1 LOOP 1 R ACK R ACK 2 R ACK ISINGLE SINGLE PID CASCADE RATIO SINGLRE CASCADE RATTO ER LOADER I A Na1 48
18. TAG INPUT tae 1 lm WINDOW 1 LOOP 1 4 PeW TA C 2 PL T CPX Loader Station No 1 FE CG au O 0 U DY NB INDO 1 LOOP 1 7009 4 1 WW wssh ET 8 2 PID TG Tal 0 1 2 1 SY H P SW L PY H D PW L DTj MW Hj EUT MW Lj J TFj DW Hj GAP KNL DPH SV SVPR MM NVPR DMH ACT REVERSE 1 ENTER ENTER
19. A 2 6 CPX 2 7 3 ENTER ENTER PalEtte WAFO 001 Hare ar Shace af E Q 2 4 3 T CPX ECPX Loader Station No 1 G OO UU DD NB INDO 1 1 T R T H D
20. II L EWINDO RUN STOP CPX Wafer Loader I RUN ZSTOP TY OK LOOP BTATUG STOP RUN CPX LOOP 1 CANCEL MEL RUN STOP GOMMIUNIGATIGON CPKX PE CPX PC i Water Loader I 4 A 3 2 5 4 FIX 6 FIX pFP Lnader tatinn No J RUHN STOP Ny FIX GPX Wafer Loader I a Fx FIX READY WAIT IOK CPX CANCEL CANCEL FIX
21. 3 0 CO SE CN i 3 XX 39 a 141 0032 11 2 http www fujielectric co jp TEL 03 5435 7041 TEL 052 746 1014 TEL 06 6455 6790 http www fujielectric co p products 1instruments
22. 0 1 2 4 2 Hm WH LOOF 1 hi FL 1 PID PID INT RE al sa SW Hi gm L UPi Hl Fi L MI Lk Pr Hi fi VhW fE TF ElW HMEhG 1 LDLF 1 1 WPDDFG 1 Ti RATIO a rs 1rat L Fw HI rFWrLi rEFH 1HEJD 1 LDP 1 Fh PROG ON S3 5 IiFI nn 3 EE EE EE 5 Bt BS BE BT rE a PUB Fr Fa 1 RWTIO 13m mm rE FI mn mmm mmn mm mam mn mm mm nnn mnnx mmn mm WM WT es nm Haum WP 1pr
23. Windows Microsoft Corporation EN OPXA 7 PXO Lo ee 1 NO bis 1 2 CPXA CPXC ON i ii Ci 1 SC OE i ci i 1 HE RN Sh 1 CPXACPXC 2 i GCG 2 CC A an 3 i 4 Ea ch 4 NS ee i i 5 UO Rh 0 2 CTE Nic 8 92 AE i cc 10 EE 12 NE CL ii 14 0 15 OE igi 16 17 I Ci i 21 DE NII 22 DE EE EE ai A 23 SO 25 EAE i 26 2 5 2 NII 28 2 4 6 6 Gi 29 SN Gc 30 if i 30 TI RN SO RC Cc bd 31 DE RUNS SO Nc 32 GL NR RN i 33 OT EN NN i GG kk 34 CN NN Nb 36 SE CC ei i 38 1 1 CPXA CPXC 1 2 CPXA CPXC CPXA CPXC
24. 2 6 CPX 2 7 2 4 6 L ECPX Loader Station No 1 EF G DD sW WINDO 1 osEc FILL 2 UNO lolNT Terminal code 1 8 CPX 2 6 CPX 2 7 ENTER ENTER 2 5 CE E 0 OUD 9 6 IE RUN STOP
25. Gr LW2H EE GtrhBH WT 1 _ lrAe1 n1 Tl oPENicLogE la 1NFUT A ET EET ET 2 N TAG1 002 loPENiCLOBE gt LOOP 1 1 O OO S A 39 P 2 27 0 N 0 2 0 2007 NIL
26. CPX Loader Station No 1 FE CE a 0 0 UD D lm INDOWW 1 UNITO1 UNITO6 UNIT02 UNITO UNIT03 UNIT0S UNITO4 UNITOS UNITOS UNIT10 CPX 2 6 COPX 2 7 halette acre Hark Share ear Ok CE Q 7 2 4 5 LL CPX Loader Station No 1 FE GE a 0 U D INDO 1
27. EE 0 UU G b EE a LOOF2 hh 1 M LooP3 ya M2O LOOP4 2 TAG INPUT WW TAG INPUT ITAG1 002 oPEwicLosE lt oPEwicLosE lt LOOP 1 N N4 8 ECPX Loader Station Ho 1 ayO DD HE INDO 1 1 2 CPXA2412AARYT 20 x10msec WORD JHH 3 JH JHH i PI Di3 4 FTLS 27 1 H Di5 6 19200 Di7 8 no lmsec F pulse nm Al Chd aAl C
28. 0 D LU D NE INDO 1 LOOP 1 Ei 10 0 TE sr EE ET tg TAG INFUT ITAe1 001 TAG INFUT AA oPENicLosE lt oPENicLosE gt 2 1 CPX CPX CPX lt 4 gt 2 3 LOOP LOOP LOOP1 4 LOOP1 ILOOP1 CPX Loader Station No 1 EE 0 CU D EME Y oP a LM LOOP3 M ta L2 O 2 LOOP4 bp gt
29. jc PSSEI 2 5 1 LJ CPX Wafer Loader I CP a LOAD JH LOP 1 LnP LOOP 3 LOP 4 FulIElgctrlr Eo Ltd CPX CPX LOAD LOOP1 LOOP4 OK INONE 30 2 5 2 RUNSTOP CPX LOOP IRUN STOPI RUN STOP PI afEr Lnader II RU STOP LU T amp TUS 31 2 5 3 RUN STOP CPX LOOP RUN STOPI pF Lnarder tatinn Mn 1
30. DV H RR CUT FOX 9 CFS P0 POMT DPH 6 DMH ACT REVERSE RE RR SW t SVPR 2 ENTER ENTER 3 2 3 4 91 92 93 94 0A 0B 07 ILOOP1 L er f CE O PA EI TG 1 th Pa i NB WWINDOW 1 LOOP 1 72 2658 T 1 ECPX Loader Station No 1 EF G 0 2m WU 9 D NB I
31. ED ComPlus Applics Internet Explorer _N co V2 2 Messenger XLS microsaft frontp 484 KB Movie Maker MSN MSN Gaming Zo J 74 Netleeting ComSet GE 9600 N 8 17 17 ComSet F CE 0Q H 9600 N 8 17 7 2 2 1 WP 2 8 NSR 3 2 RE E Ner CPXA CPXC No 2 2 RC 1 Yes TAG 2 3 1 1 1 2 3 2 2 2 2 3 3 2 3 4
32. 2 4 2 C ECPX Loader Station No 1 G ayO D Nm INDO 1 TAG INPUT 2 3297 wyAFER1 WAFO 001 10000 WAFER 2 WAFO 1 VVAFER3 WAFH 10nnn VAFER4 WAFD mm4 pu 10000 VyAFERS WIAFO 005 10000 WyAFERG WIAFD el 10000 II WVAFER7 WAF ag nu WAFERS Waro 008 008 10000 2 WY MY my nm 1st IoFf Jpr or rw 2nd oFF oFF pheL oFF 1 st orr oFF gt PheL oFF rw i sllr lm lr oFF gt PheL orr rw LOOP NoRwAL 2 nH oFF pheL oFF PheL oFF ro LOOP4 NoRMAL vr 2 nd lorf lorF lt lphmr oFF 4 4 TT 4 1 r r 4 4
33. 2 TAG INPUT TAG1 001 TO INPUT ITAG1 002 opEwicLosE gt opEwcLosE gt TAG ENTER ENTER Falette TAG1 001 Hare ar arB Baf F Q 2 3 2 1 1 LOOP1 1 M GPX Lnader 5tatinn NMn 1 2752007 972 DD Pen OUD 57 aT EP 1 Loan _ Ta TT LooPps mV LOOP4 gt
34. 0 0 NE INDO 1 LOOP 1 _ 03 100 00 PO3S 3000 0 103 3000 0 DOS 0 0 X04 100 00 PO4 3000 0 IO04 3000 0 DO4 0 0 X05 100 00 PO5 3000 0 IO5 sO00 0 DO5 0 0 _ 06 100 00 PO6 3000 0 IO6 sO000 0 DOO 0 0 _ 07 100 00 PO7 3000 0 IO7 S000 0 DO7 0 0 _ 08 100 00 PO8 3000 0 IO8 3000 0 DOS 0 0O ENTER ENTER 5 2 3 6 LOOP1 C i JnP 1 TAG Tp 1 BE iL NE WINDOW 1 LOOP 1 ie Aa4 2 2 Os4 2 NE INDO 1 LOOP 1 144 274 3 4 4 4 CUN1 0 00 CONTS 0 00 CUN25 0 00 CONS7 0 00 CON14 0 0O CON26 0 00 CONSS 0 00O CON15 0 0O CON27 0 OO CON39 0 00 CON16 0 OO CON28 0 00 CO
35. DE RATIO mcees 7 coE Oooo mWl mm ooon C ooon no ooon ENTER Do08 000 Do05 _ 000Oj Do 10 PH1 INH 0000 PL1 INH 0 D PH1 INH 0000 D PL1 INH DH1 INH_ 0000 DL1 INH ENTER 7 FUNCTION CPX Loader Station No 1 EF G Pau O 0 D Nm INDOW 1 LOOP 1 T SINGLE PID CASCADE RATIO colololo SII on Do D1CPO Do 2 PH Do D4 Do OE Do 07 Do 08 Do D9 olololo EE wlm pt 0038 PVD2 0039 0000 PL1 INH Doon 000O D PL1 INH A 0000j DHi INH N nnmm DLl INH LOOP 1 3 ol nmioio o o
36. N4O CON17 0 00 CON29 0 00 CON41 CON1S 0 00 CON3SO 0 00 CON42 0 00 CONS1 0 00 CON43 CON2O 0 00 CON32 0 00 CON44 0 00 0 00 0 00 0 00 0 00 0 00 0 00 0 OO 0 00 0 00 0 00 0 00 0 00 _ CON7 0 00 CONI9 0 00 0 00 0 00 0 00 0 00 ENTER ENTER 0 2 3 7 ILOOP1I W a GPX Lnader 5tatinn Ho OE 1 TAG 1 WM 2 1 ET TAG NPG ei mm IE IMNDO 1 LOOP 1 9 zh CA ECPX Loader Station No 1 G OO 0 m WU 9 D NE INDO 1 LOOP 1 Ve Ps 2As 0 rd a FUNCTION SINGLE PID CASCA
37. NDO 1 LOOP 1 rh ET SD gzxwsh 7 3 M2 MM gt lt n lt lt lt lt lt Le Le lt lt Ol F IF OO OO DD Lam bo oe b F IF OO DD Can bo om t EE ICOITH OS oro lt SI ml ec nn 1 71 1 gt gt hk VALUE gt o gt _
38. h5 7 ON INoNE mp MENU 273 nnnn ByCi ts YE5 MENU 3 3 nnnn PY Ch2 E as Al Ch1 LFL 3 oFF SCC 2 AFLT 9f Al Ch2 DAI Ch1 SCC IoFF 180 sec AA Ch3 DAICh2 0 MY R Bck CH1 CH2 AOCH1 AOCH2 AOCH3 AOCH4 AOCH5 ON OFF RTD RTD rb 1 5v 1 5v 1 5v gt 1 5v gt 1 5v Loop1 Loop2 rt mml nml nl onl no sec RCJ oFF lt loFF gt br 1oOnm 1omnm tnmnm 1onnm 10000 Innpm4 PyCH1 PvCH2 ACH AlCH2 ACH3 AlCH4 AcCH5 9 h sy li sy li sy li sy li sy li sy li sy nl 0 00 nl 0 00 0 00 0 00 nn Mh oan oan toon tonnml 1onnml tnnml 100 00 2 COPX 6 2 6 CPX 2 7 ENTER ENTER
39. o 9 A 34 Te AOxh 22Wsh oPENMCLOBE LOOP1 Waier Loader I IOK COMMIUNIGATIGNN CPX 35 2 7 CPX 0 7 GPX Loader tatinn Ho 1 ED ME IMDGO 1 LOOF 1 79a4 ET 1 0 0 WW 1 INFUT IrAe1 nn1 Fila INFUT IrAe1 002 n 1nonn Tl 2 oPENcLogE
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