HEB Series サーモ恒温槽
Contents
1. 50mm 5 gt JRA GL 02 19942. 3 164 8 8 EB Series 30 T T T T T 65 TF T T 25 25C 60 Fluorinert FC 3283 180mm 25 20 25 55 ng 3L min 1 50 10 8 5 0 GALDEN HT200 GALDENe HT200 as 25C 5 180mm 25 10 30 25C 15 FluorinertrM FC 3283 25 3L min 6 2 0 20 40 60 80 100 120 140 160 180 0 10 20 30 40 50 eo 70 gol
3. P N 459 a NE ha 5 a fe w kk ll ll 162 8 8 HEB series HEBC002 W 002 140W WT ks HEBC002 HW10 Cp cl 140 1 002 14ow 10 L Rc1 4 N NPT1 4
4. AN 168 G 8L min 35L min
5. 3L min 0 5MPa EEPROM 10 SMC HEB series 1 2 5 FW 1
6. 4 pH at 25C 6 0 8 0 OC 25C LuS cm 100 lt 300 1O CI mg L 50 SO42 mg L 50 at pH4 8 mg L 50 mg L 70 CaCOs mg L 50 SiO2 mg L 30 Fe mg L 0 3 Oro Cu mg L 0 1 S mg L NH4 mg L 0 1 CI mog L 0 3 CO2 mog L 4 0 MO cm 0 003 0 01
7. BR 0 70 60 a amp 50 N 40 R30 20 10 Cz 0 0 1 2 3 4 5 6 7 8 L min RUN LED TROUBLE LED Qa tu DC gt RUN LED TROUBLELED SMC 0 Q HEB Series 200 207 1 RG TAW A A Wl CJ 1 69 SIGNAL a DC Y T EE Fo g b ee 204 15 DC Rc174 NPT1 4 6 NPT1 4 g147 RUN LED 1D 130 TROUB
8. 10 g130xH180 A RS 485 B RS 232C Wl Ks HEBC002 C L Rc1 4 N NPT1 4 10 2130xH180 A RS 485 RS 232C Q 8 163 B ED HEB series HEBC002 WA10 HEBC002 WB10 PID 10 35 3580 RH FluorinertTM FC 3283 GALDEN HT135 HT200 5 15 0 60 0C 60 140W 2 300W 3 0 01C 3 0 02
9. CDA 15P NJC 245 PM UL CSA M2 6 fee IEC60320 C 13 AWG14 1 AC100 240V L 2 _AC100 240V N PE DC t NJC 245 RF UL CSA CDA 15S M2 6 MG CDE 9P M2 6 CDE 9S No 1 OPEN 2 3 4 5 OPEN 6 7 9 2 3 4 D sub 9 CDE 9S M2 6 CDE 9P
10. HEB Series CC 6 0 0 1 0 02 e e e e HEC HRW HRZD pkZ HRS HRG W250XH180XD340 FluorinertrM GALDEN MOCVD 161 LE MOCVD
11. No HEBC002 WA10 HEBC002 WB10 1 RS 485 T R A 2 RS 485 T R B RS 232C_RX 3 RS 232C TX 4 5 RS 232C SG 6 9 3 2 0 9 81 6 7 D sub 9 3 5 5 10 DC 5 10 Q SMC 167 HRW HRZD HRZ HRS HRG HEC HEB
12. g130X 188mm 10 35C 0 5MPa 3 5L min IN OUT Rc1 4 SUS303 SUS304 FEP AG063 AC100240V 50 60Hz 10A 4A AC100V 2A AC240V je 2 3 RS 485 RS 232C 8 5kg 6 5kg 2m DC 3m CE UL NRTL 1 FluorinertTWM 3M GALDENW 2 25C 25C 3L min 25C 4 3 5L min 8L min 5
13. HEB series 1 2 5 EI 1 2 i F
14. 1 a b C d e f 169 HRW HRZD HRZ HRS HRG HEC HEB
15. LE LED I oo F g g79 LOW 35 1 8 g TROUBLE LED 37 _ 68 EE 6 DC RUN LED 96 19 5 _ BR 166 Series DC CDA 15P IEC60320 C 14 NJC 245 RM UL CSA M2 6 DC CDA 15S NJC 245 PF UL CSA M2 6 ele RI Ei
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