取扱説明書 WHISPERマスフローメーター
Contents
1. gt Certificate of Registration Maraqement Certific aon el North Amenca This rinde rac epi Quality Management system of Alicat Scientific 1 N Business Park boi des rc 88749 has been assessed and found complying wilh the requirements of ISO 9001 2008 Approval is hereby granted for registralion providing the Certification rules and condilions are observed at all limes Certification Scopo Design and manufacture of precision instrumentation for the measurement and control of pressure and the flow of gas and or liquid Certificato Numbor 0410009 Issue Dato 17 Nov 2010 Audit Date 10 Nov 2010 Original Registration Date 10 Feb 2005 Expiration Date 16 Nov 2013 E AN L2 Ma D On Bahat of gt Management Certification NA dead edunt mae an q Cet f aic A As aci Tomy ea i Manty rr Cantemen The alunas TR ae 1 0 2Mpa 2 15PSID 103 4kPa2. GND GND 1 1 RS 232C RS 485 P 14 4 3 2 RS232C COM P 17 15 2 7 8 P 15 14 3 3 MISCELLANEOUS PRESS AVG FLOW AVG 7 9 0 P 15 4 3 3 MISCELLANEOUS ZERO BAND 29 8 8 1 WHISPER MW 0 2 FS 0 5 100 FS 200 1 EE ya RS STP 2 20 C 1Atm 101 325kPa 1
3. MENU je MENU RS 232C RS 485 e MAIN 4 2 MAIN ON PSIH 4 2 1 PSIA PSIA PSIA gs A PSIG PSIA 0 000 4 2 2 C CCH SCCM MENU C
4. gt 227 C02 ERKEK 90 10 98 2 75 25 75 25 90 7 5 2 5 PraXair Helistare A1025 Star29 90 8 2 PraXair Stargon CS 95 5 13 4 3 2 RS232C COM 19 24h OO RS232 COMM RS485 COMM zh 2 v mie SHIA LS Unit ID ID ID ID Baud de BACK MAIN
5. Mass Flow Rate 20 14 696psia SCCM SLPM Le gt 4 2 6 MENU MENU 11 4 2 1 ESA MOV VOV
6. 3 4 5 6 7 8 9 10 NIST 2 ERA m 8 DIN VEA RET 3 RE 3 1 DIN8 100mA 7 30VDC
7. Volume Flow Mass Flow ds Nes A 014 70 025 00 02 0004 02 0004 Air A 014 70 025 00 02 0004 02 0004 Air ID Volume Flow Mass Flow SU 6 7 ID Volume Flow Mass Flow MOV VOV TOV POV 18 5 5 0 0 5 5 1 UN V lt CR gt Lay TFI sayy k TDS S VR B V lt CR gt D B 5 6
8. bI S DIN DIN 8 5 12V 2 RS 232C RS 485 GND 1 6 I 1I0 DIN 6 1 C RS 232C RS 485 a A Ex Ey RS 232C RS 485 gn GND L4 L_ 6 A 3 2 3 2 1 Tare 4 8 Tare 3 2 2 RS 232C RS 485 RS 232C RS 485
9. 4 2 3 TARE V 0 TARE V 0 1 4 2 4 CCM LPM Volumetric Flow Rate CCM LPM 4 2 5 SCCM SLPM Mass Flow Rate
10. ELAPSED TIME 4 MT 2 2 6553 5 OFF ELAPSED TIME RESET 0 0 ARBITRAL RIA 3 TER ca UY PEA Nal RES DS TR fl A T lt CR gt ID A lt gt OFF 0 90 11 MWB MMS2Ua 90M 9V 8 9V
11. 1ID ID lt ID gt A Z Bl x A lt CR gt TID A lt gt 1 1 17 9 4 9 4 1 A RU zd ll s SA RI genes DAS CR ID ID A lt CR gt ID A 5 4 2 2 Lees 014 70 025 00 02 0004 02 0004 Air 014 70 025 00 02 0004 02 0004 Air Volume Flow Mass Flow 5 6
12. Unit ID ID UP DN ID ID TID A Z gt ID 238 TID BACK ID RESET A ID A SET ID ID ID Caos ARALAR NETO E DN UP J amp LUCA ES mn x53 id 38400 19200 9600 2400baud 19200baud d BACK SET gt 14 4 3 3 MISCELLAN
13. 4 3 SELECT MENU RS 232C RS 485 JL IE RLICRT SCIEHTIFIC PH 520 290 6068 Fax 520 298 2089 Manufacturer Data Mh Co mmunications Select Miscellaneous EHF EH DH 221 5 C2H6 Ethare Gr 2 m i Heliwr Hitrogen as wo Hikrous Oxide B gag B BBB SELA Select Menu Gas Select La 4 3 1 GAS SELECT GAS SELECT LN UP LN DN MODE LN UP LN DN MODE LN UP LN DN PG UP PG DN HE Ethane LN UP LN DN H2 Hydrogen PG UP PG DN He Heliurn N2 Nitrogen LN UP LN DN i Nitrous Oxide CANCEL Heon SET
14. gt To Y Y Fon d X LI Iu eo o l RS 232C RS 485 NO 9 RS 232C RS 485 NE FE m Nds 8 Pin MiniDIN Connector A UE i RS 232C RS 485 Vd RS 232C RS 485 Serial Cable End PC Serial Port 3 3 3 3 1 RS 232C RS 485 7 RS 232C RS 485 3 3 2 0 5VDC M 0 5VDC 0 0 01VDC 5 0VDC 3 3 3 0 10VDC 0 10VDC 0 0 01VDC 10 0VDC 3 3 4 4 20mA 4 20mA
15. CLEAR 0 SET LCD CONTRASNT LCD CONTRASNT UP DOWN 0 30 TF 0 30 CANCEL RESET 10 SET 15 4 3 4 MFC DATA MFG DATA NUDEL INFO ALICAT SCIENTIFIC Ph 528 290 6868 Fax 528 298 8189 MODEL M IBSLPM D SERIAL HO 540843 DATE MFG 184742812 DATE CAL 107972012 CAL BY DL SU REV 2162 MODEL INFO amp BACK MAIN s MODEL SERIAL NO DATE MFG DATE CAL CAL BY SW REV t ORO f
16. 5 6 1 lt gt lt CR gt del CN psu LET EZ DOS CURSO 1 A 11 lt CR gt ID A 02 112 C OXCR gt ID C Air 3 c im xes 4 CO2 SF6 19 5 7 214 P 30 P 30 LU e b dm cu i po Bv e ES Ee v ev lt CR gt lt gt lt CR gt lt ID gt lt CR gt lt ID gt lt gt lt CR gt SEDA R lt gt lt CR gt V lt CR gt lt gt lt CR gt T lt CR gt lt gt lt CR gt cl DEC lt
17. 19 5 19 DAC a a EE E EA E E A E E EA E A E E E 20 bs hs E o I 21 UNE S I T EN a a ae a a 23 Cola ARIS a ane EET 23 12 ARO E IAS A DO O I arriba 23 7 3 MOV VOV POV TOV 23 Til TADA AET VIRA BS RO Esas CAD AMEN A eb t e ers rs 23 EE A 23 NE RUE dU o s o E 23 RR MAS MN 23 uo d DC 23 23 CE 24 NN CS i E 24 A dn nt A 25 26 9 1 MW 0 5SCCM MW 20SCCM 26 O E A ooo 26 E A A TON 21 27 2 5 O A ECOL TET TFT NR 28 9 6 MW bOSLPM MUDO Pida thee tee Ei 28 CENE EEUU DR E TET TU TT 29 30 I NIME a qo pe2 c r duc MI 30 HL MB MIST DATES 7 pA USUS ES id todo eh tet 31 1 m mn IS09001 2008 ALICAT NIST UE
18. 0 4mA 20mA 15VDC 3 3 5 2 2 1 6 8 2 2 8 0 5VDC 0 10VDC 4 20mA 4 4 1 Main PSIA D 13 68 21 58 0 000 B ngg B BB8 CEM SCCH MENU ELHPSED MH55 TIME TOTAL d4400 206 08 HHLK RESET MENU LHS SELELI TARE Y PSIA COR CCM SCCM TARE V 0 MENU
19. 1 4 P 11 4 2 3 TARE V 7 5 P 15 14 3 3 MISCELLANEOUS D FLOW AVG 7 6
20. 307 40 LED LED ON OFF OFF AC DC AC DC D 4 2 3
21. ID gt lt gt lt CR gt ES IDA AR SORA lt ID gt lt gt lt CR gt HEY h ID gt V lt CR gt lt ID gt lt gt lt CR gt lt ID gt T lt CR gt lt ID gt lt gt lt CR gt lt CR gt 2 3 gt RS 232C 15m EJ E 9600bps UE SS 20 6 Viscosity Density Compressibility Long Form 25 deg C 25 deg C 25 deg C 14 696 PSIA 14 696 PSIA 14 6965 PSIA 225509 16889 0 9994 1 111 852 0 6569 0 9982 ans Kr kyen 251342 aaora 09994 1 xe eon 975 535 0947
22. 9 1 MM 0 5SCCM MW 20SCCM WHISPER MW 0 0 5 sccm 1 sccm O 2 sccm 0 5 sccm 0 10 sccm O 20 sccm 98 984 13 335 M5X0 8 10 32 UNF Both Sides 2X 8 32 UNC y 4 445 MW 0 5 sccm to 20 sccm approximate shipping weight 362 87g mm 9 2 MW 50SCCM MW 5SLPM WHISPER MW 0 50 sccm O 100 sccm O 200 sccm 0 500 sccm 0 1 slpm 0 2 slpm 0 5 slpm 8 89 13 335 Labs L 60 325 _ Both Sides 2X 8 32 UNC 8 89 MW 50 sccm to 5 slpm approximate shipping weight 453 59g mm 26 9 3 MW 10SLPM WHISPER MW O 10 slpm 1 4 NPT Both Sides 2X 8 32 UNC y 8 89 MW 10 slpm approximate shipping weight 635g mm 9 4 MW 20SLPM WHISPER MW 0 20 slpm 1 4 NPT Both sides 4X 8 32UNC y 9 525 MW 20 slpm approximate shipping weight 1 09kg mm 9 5 MW 40SLPM WHISPER MW O 40 slpm 126 162 20 32 1 2 NPT Both Sides 4X 8 32 UNC 19 525 MW 40 slpm approximate shipping weight 1 45kg mm 9 6 MM 50SLPM MW 250SLPM WHISPER MW O 50 slpm 0 100 slpm O 250 slpm 126 162 20 32 1 2 NPT Both Sides 4X 8 32 UNC y 9 525 MW 50 slpm to 250 slpm approximate shipping weight 1 59kg mm 20 9 7 MM 500SLPM WHISPER MW O 500 slpm L 132 08 63 5 3 4 MPT Both Sides MES 36 83 R
23. 20 c25 75 Argon 25 CO2 30 Argon 10 CO2 75 Argon 25 Helium 90 Helium 7 5 Argon 21 A1025 2 0 CO2 214 640 Praxair Helistar 41025 90 Argon 8 CO2 20 2 Oxygen 218 817 1 5410 0 9992 Praxair Stargont CS 359 Argon 5 Methane 223 483 1 5850 0 9993 in micropoise 1 Poise gram cm sec Grams Liter NIST REFPROP 7 database GO2 CamonDexde 1493 1800 09949 c2H6 He Heium 198457 016359 tooo5 EN Gama A C C Carbon Monoxide 176 473 1 1453 0 9997 C C2 29540 12385 0 9924 H Hydrogen 89 153 0 08235 1 0006 H N O E C C ir Ar H4 O 02 HG gt E 12 20 2 Kr E Red 38 1 EE NF gei Gas Viscosities Densities and Compressibilities at 25 C 21 Viscosity Density Compressibility Gas N rber Long Form O deg C 0 deg C deg c 14 696 PSIA 14 696 PSIA 14 696 PSIA 0 A Ar 1258 12927 0994 2 cd Memane 103657 0705 09976 4 CO2 Carbon Dioxide 6 H2 Hydrogen 83970 008988 10007 16 tcaHio isoButane 68759 26899 09627 Sulfur Hexafluoride 75 CO2 1 25 Argon 75 Argon 25 Helium 909 Helium 7 5 Argon 2 5 CO2 Praxair Helistare A1025 ES 90 Argon 8 CO2 ome 28 Star29 25 Oxygen 203 139 1 7918 Praxair Stargoni amp C3 P 5 9596 Argon 5 Methane in micropoise 1 Poise gram
24. cm sec Grams Liter NIST REFPROP 7 database Gas Viscosities Densities and Compressibilities at 0 C LA 1 1 1 LCD P 15 4 3 3 MISCELLANEOUS LCD CONTRASNT GND P 24 8 dE o CU 1 2 0 10PSID 68 94kPa 1 3 MOV VOV POV TOV P 12 14 2 7
25. 4 5 4 o We mdi 13 49 422 73 Sc ABBA Sm 45 082 235 808 Unlume Pass Mein For all Battery units add 54 13 to overall height Mu TU 88S Approximate weight 112g al
26. 0 50 Ke 10 50C 0 100 0 02 RS C Am 0 02 RS C Atm 128 FS FAMA ELA ASS XP HGB 0 5VDC 0 10VDC 1 5VDC 420mADC 2 22 JC Up y ac 0 5VDC 0 10VDC 1 5VDC 4 20mADC SDN 6P 215 UGG RUE 303 302 2 Viton RTV W 2 7F7 D TFTRD CD 5SCCM 500SLPM 2 0 1Atm 101 325kPa 3 4 20mADC 15VDC 24 8 2 nu o ms 0 5SCCMC20SCCM M 5 1 8 NPT 9 MW
27. EF E 66 04 REF MW 500 slpm approximate shipping weight 2 04kg mm 4X 8 32 UNC Y 8 382 Z9 10 10 1 TOT TOTAL MASS TOTAL 6 Hz BACK RESET MENU 0 0
28. EOUS MISC MISCELLANEOUS ZERO BAND 0 0 UP DOWN 0 0 3 2 SELET 1 CANCEL CLEAR 0 SET EE ZERO BAND PRESS AVG FLOW AVG UP DOWN 1 256 1 SELET 1 CANCEL
29. SIMIO 7 7 TA MEE WHISPER HIOCO D NL EL EE r kirn A uud ti zi RIIDED OD Fr lb EIT HEAT ES Japan Star Techno Co Ltd T 105 0013 2 2 11 3 TEL 03 6432 4006 FAX 03 6432 4010 E mail support j startechno com http www j startechno com Rev 21 13 2014 11 04 o Ce S E EEA EE E SU EEE I E S e EEE PEE 5 PME QU M e e m 6 daa o iaa 7 SS Os a A OTRO 7 O RRA 8 P MM A AA 8 id RS ISO RSS A ATAN AA 8 A EEEE EEA E EE E E A EA EE EA E EE A A EA A E 9 o ul MS O RS s A EN cc 9 0 9 OE OMOEA 9 ORO E 0 CN 9 NONCH E 2 AVUNCULUS 9 A A EA A A 7 10 DN PEEL plu o LECKER r os 10 A CN DU RR o o EEES EE E E ET 11 IN O 1 2 M T 11 oW E A A EE NEE E E 11 H IT 11 4 2 5 SCCM SLPM Mass Flow Rate 11 A E A aA 11 OR CS a A 12 4 3 SELECT MENU its 12 Ad e A A O 13 A SR AR a NN 14 ae DES OE DU US AA OR 15 9 16 17 DOENE cT b DRACO BEC TT EU E E DT DUE TENUTI TERES 17 A A A A EET 17 panos RO xem m xe eius 17 Je NEN Lc IUE EMT ili D ME A SS a a a a 18 MEME AER PEU ca 2 a PR c 18 5 18 da AER qn A a a r a a A a raa 19 ode EO A 19 0
30. uac rue e ur BACK MAIN 16 5 RS 232C RS 485 9 1 9 2 2400 9600 19200 38400 EE 5 3 5 3 1 RS 232C t1 1 1060 2 RS 485 5 3 2 lt CR gt lt CR gt ASCII 0Dh RI DEG ND OE ee TDD OR
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