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1. 10 SN wwewe memer eo Fig 10 XPS Spectrum of InSe Er Valence band INTENSITY a u ES CA XPS
2. 2 2 1 Au Fig 8 XPS Mgko 3 10 9Torr 0 01eV sec 6 eV 5 d 3eV 6 s 2 2 InSe In4d au Valence band 8 Fig 9 9 gt W 2 InSe In 4 d 23 1 9 17 15 BINDING ENERGY ev BINDING ENERGY eV Fig 8 XPS Spectrum of Au Fig 9 XPS Spectrum of InSe Im 4 d 52 2 1 2 3 InSe 2
3. HP 85 SN MELCOM70 10 HP 85 1 1 1 1 1 1 _ Fig 1 Model 548SH EXT 0 10V 0 10V 0
4. HP 83 85 ROM P 34 1983 14 1 1980 2 HEWLETT PACKARD HP82941A BCD Imstallation and Theory of Operating Manu al P 33 1980 3 VOAC707 A P 15 1799 4 TR6141 P 3 11 1979 5 MELCOM70 B6721 P 9 Automization of ESCA measurement with Personal Computer HP 85 lzumi Miyake Toyokazu Tanbo Chiei Tatsuyama The improvement of the S N ratio of the XPS spectrum has been studied by using a micro computer HP 85 The D C voltage froma programable voltage generator contr olled by HP 85 is applied on a double pass CMA for the measurement of the binding ene rgy The signal fromthe CMAis read into HP 85 through a digital voltmeter Repeating the measurement and the averaging the data in the same spectral region the S N ratio is improved dramatically We can measure the valence band spectrum of a semiconductor which has not been observed without this system This system alsoenables us to analy ze the data easily ESCA
5. HP 85 TR 6141 MELCOM70 10 VOAC 707 HP 85 3 HP 85 TR 6141 MELCOM70 10 1 1 2 HP 85 TR 6141 MELCOM 70 10 HP 85 CTL 50msec IC LOAD TR614 TR 6141 LOAD HP 85 TR 6141 FLAG TR 6141 50msec TR 04
6. HP 85 XPS S N HP 85 CMA CMA HP 85 S N 1982 10 20
7. Ss 1 2 Fig 7 1 2 1 SETTING 2 START 3 PLOT 4 MELCOM 5 LOAD 6 RESULT 1 2 3 4 MELCOM 70 10 5 6 PLOT MELCOM START 3 SETTING START 3 Fig 7 a Flow Chart Fig 7 b Flow Chart ESCA
8. 15 sec HP 85 CTL FLAG TR 6141 VOAC707 MELCOM70 10 Fig 4 5 1 1 3 Fig 6 HP 85 2 0 0 9 BCD 2 10 BCD HB IB GP IB RS 232C CEGL 2 0 08
9. SN 74LS 05 MELCOM 70 10 DATA Old Data Set up New Data New Data Valid Fig 2 Input Timing of HP 85 Fig 3 Output Timing of HP 85 DATA Xx Data Valid LOAD Fig 4 lnput Timing of TR6141 DATA Old Data Next Data PRINT COMMAND_ ee Fig 5 Output Timing of VOAC707 zese o CHANNEL B EE Fig 6 lnterface Circuit 34 1983 SN 75452B VOAC 707 HP 85 VOAC 707 TTL HP 85 VOAC 707 HP 85 VOAC 707 PRINT COMMAND FLAG PRINT CO MMAND 5 sec HP 85 FLAG 15 sec IC 15 sec HP 85 CTL IC 5 V 3
10. 10V TR6141 ee RE 0 HP 85 0 10 V X Micro Box PHI Model Me omen Y 9 9 VOAC707 HP 85 MEL 6OM70 10 XY Fig 1 Block Diagram of System 1 1 2 HP 85 es88 TR 6141 VOA C707 MELCOM70 10 Fig 2 3 HP 85 lt ES C A HP 85 CTL FLAG HP 85 FLAG FLAG
11. 3 LC rr a oRepo fi a rv a Er te ei et NM TT RR YE aRepository 3 J 4 aa IVE BSCA Author s Reme WW http utomir lib u toyama ac jp dspace ESCA mll MELCOM70 10 ESCA AES RSCA XPS lt SN

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