フローセンサ
Contents
1. CE2. 3 PFMV5 series 3 1 M 03 3
3. 2 AN PFMV505 510 530 1 00 1 00 PFMV505F 510F 530F 3 00 AJ VJ 1 1 00 0 2V
4. JIS 83701 3 1 2 3
5. 3 1 8 5 5 series 12 207 1 M 03 3 EI
6. 1 2 3 4 2
7. 5 2 3 2 N 20839 0 32 0 02N m 1 1 5N m 4
8. 3 4 OFF A 3 3 A
9. g0 3 60kPa 24FS 5ms i PFMV5 Series PFMMV Series RoHS 44 22 Series 22 5100 67 6 0 7 5 10V 0 01V lt 22 PFMV3 series
10. 6 49N RS YS 5 series 51153 55 381862 1 03 3 A 8 lt N Z 7 1 O 1 S
11. Q k EE 1 OFF
12. 3 2 MSDS 5 2
13. JIS B 8392 1 1 1 2 1 6 2 2003 1508573 1 1 1 2 1 6 2 2001 116 4 Q PFMV5 series 1 M 03 3 3 min 1 min 0 52min 0 min 0 5wmin 1 3 min PFMV505 PFMV510 mm mel ml 5 5
14. 2 series 2 51153 55 38186 1 03 3 4 EE 1
15. gt 6 2 5 N UL 1 UL508 2 30Vrms 42 4V 8A
16. N U 1 UL508 2 8 30Vrms 42 4V 8A V 09 20 VI 50 100 2UL1310 2 UL1585 2 30Vrms 42 4V 2 2 Q P 5
17. 2 A 226 a etc 4
18. 4 s OUT2 OUT2 ON SET 1 PEP OUT1 EEC OUT1 ON ON OFF ON OFF Q SMC 10 series XM3X0 5 4 1 5V A 8 75 Tx 11 GSNC PFMV5 7V 3 Series 2 n J 1 LU_
19. OFF OFF OFF S 7 PFMV3 series 1 03 3
20. PFMV30 0 PFMV5D P 1 0 NPN2 1 5V M3x82 PFMV3 PFMV5 2m M3x82 ZS 28 B ZS 28 C 1 ZS 27 C M3x 8 ZS 27 D M3x 8 2 2 PFMV5 7V 3 Series PFMV505 F PFMV510 F PFMV530 F 0 70 5 10V 0 7V LLL 5 10V HHH DC12 24V 10 1 FZ lJ 2 NPN PNP 2
21. VE 0 20 V 100 20 V 30 V 2 UL1310 2 UL1585 2 30Vrms 42 4V 2 6 Q A EEPROM 106 20 490m S2
22. 3 4 1 ISO 4414 Pneumatic fluid power General rules relating to systems 2 JIS B 8370 3 4
23. N ZS 36 A1 1 L 2 M3X15L 2 ZS 36 A2 2 L 2 M3x25L 2 ZS 36 A3 L 2 M3x35L 2 ZS 36 A4 L 2 M3x45L 2 ZS 36 A5 5 L 2 M3x55L 2 SMC 5 series 82182854 N2 JIS 8392 1 1 1 2 1 6 2 2003 SR UMS OSeO li 1 2min 2 min 2 2 min 2 2 min 2 29 6F S 3 mi 2 F S 0 300kPa na asr 5 F S 70 OkPa 2 F S 15 35 5008 500 60055006 1T 5V Sms F 90 589 DC12 24V 10 p p 10 F TSmAD 5
24. 8 5 Q Q M 03 3 31 URL http www Smcworld com TEL 03 5207 8260 TEL 052 461 3400 TEL 06 6459 5160 8 2 2 340 8659 6 19 1 TEL 0489 35 5707 300 2593 6133 TEL 0297 24 5600 2 J 24 tJ s 0120 837 838 9 0017 00 D 036 DN LS LS 300DN 2
25. N7 5 PFMV5 series lt gt gt 00 42 227 127223 IDF AF AR AMD PFMV IDU IR AFD KQ2 KJ KG2HO4 M5 M5x0 8 KQ2S04 M5 sn cress M5x0 8 KJS04 M5 M5 KJLO4 M5 M5 2104 5 5 C3604 3 505316 4 PPS 5 GE4F 6 Si Au Ru Rd Ra MEMS 3 Rh
26. Ru Rd b Ru ON u Biri Rd _Ra Ru Rd Ra b 5 5 series PFMV505 1 V IV o massa 2111 111 r masma r L 1 0 5 0 00 0 05 0 10 0 15 0 20 0 25 0 30 0 35 0 40 0 45 0 50 Zmin 22111411114 0 5 405 04 0 3 02 0100 01 02 03 04 05 Zmin PFMV505 F 1 kPa 300kPa 00 0 0 1 0 2 0 3 0 4 min PFMV510 1 V V j munan ana 121111 2 sasa 5 2 2
27. GO0mA DC30V NPN 1V 80mA 2ms 10ms 50ms 0 5s 1s 2 20 156 0 25 2727 2 0398 52208 DC1 5V 1kQ DC4 20mA 6000 DC24V 500 1 F S 0 1s 90 3 1 2 7 2 10 1sec OUT1 ON OUT2 ON 3 LOW 5msec LOW 0 4V 0 50 10 60 35 85 R H AC1000V 1 50MO DC500V 10 150 2 1 5mm 98m sSsS
28. ION OFF ON OFF OUT1 ON OFF 0 50 0 5V 0 50 0 5V ON CY ON ON OFF
29. X Y Z 2 100 52 X Y Z 3 TE 5P 4P P 12 z BT 30d 6500 203 43 1 2 0 100 90 3 DC1 5V 4 20 27 27 V 0 25 1 0 I I 0 1 00 5 00 0 1 00 5 00 8 5 series PFMV300 NPN 2 Max 30V 80mA 1V J 277315 1kQ DC12 24V PFMV301 NPN 2 Max 30V 80mA 1V
30. min PFMV505 PFMV510 PFMV530 PFMV510F 5 series mm 7 1 5 2 452 25 e lt OK L 34 5 7 CAT S100 63B min CR PM RRS 022 I 2222 220 01222522 PPFM750 F 00 2 3 Ll RENoll ee CO2
31. 4 20mA 3000 DC12V 6000 DC24V 500 DC PFMV302 NPN 2 Max 30V 80mA 1V Q PFMV303 PNP 2 Max 80mA 1V JJ L12523 351 1kO DC DC12 1213 0 1799 OUT2 2 ie PFMV304 PNP 2 Max 80mA 1V 4 20mA 3000 DC12V 6000 DC24V 500 DC gt DC12 PFMV305 PNP 2 Max 80mA 1V DC DC12 lt 24V 1OUT2 6 4 51 0 1 te H PFMV5 7V 3 Series LCD
32. 2 5 PFMV P2 P1 28 Ill P2 kPa P2 kPa WEB RO ge0 3 P1 0 kPa g0 3 P1 0 kPa P2 60 kPa P2 20 kPa 0 7 0 8 min 0 7 0 8 Le min PFMV510 1 PFMV510 1 W ws sss pumas di 5 PFMVS series PFMV5 05 1 05 0 0 0 5 min 10 0 0 1 04min 30 0 0 3 04min 05F 0 5 0 5 10F 1 0 1 0 min 30F 3 0 3 0wmin M ll 1 5V L 2 2
33. 0 5 0 5 ON u 2 13 72 30 OFF
34. B m umummma G 0 5 0 0 0 1 0 2 0 3 0 4 0 5 0 6 0 0 8 0 9 1 0 min 7 maaa 11 111 0 5 10 06 06 04 0200 02 04 06 08 10 wmin PFMV510 F 1 kPa PFMV530 1 V V E HH 2 12 12 12 12 masa G 1 111111 1 5 1 8 2 1 2 4 2 7 3 0 min G 1 1 SEE 1 171111 1 11 111 1111 munana E Gamma 0 5 3 0 2 4 1 8 1 2 0 6 00 06 12 18 24 30 min ee PFMV530 F 1 kPa PFMV5 series 5 1 1 1 PFMV5LILIF 1 XMSX0 8 10xn 24 n 1 5 10xn 14 n 1 5 34 K L 20 20 PFMV5 1 PFMV5 L 1 5 JK CG d GSNC 6 PFMV5 CC Series s 1101 N 27 A
35. series 51153 55 381865 1 M 03 3 3 EH
36. 98m s2 490m s2 CE 6
37. 275 7 a 1 31 84 3112 2 n 24 31 04 31 Xn 3 5X m 1 R R2 ZS 28 A DC 5 OUT1 4 OUT2 3 B 2 DC 1 N7 04 1 SMC Series IS BE B ant 21 205071 u z F zl V 0 0 1V 0 70V LLL 5 1V HHH 6
38. 3 00 0 2V Er4 PFM505 3 00V series ISO 44141 JIS B 8370 2
39. 0 50 4504 78186 10 60C 35 48596 760 35 48596 42020 AC1000V 1 50MO DC500V 10 150Hz 1 5mm 98m s XYZ 2 980 52 XY Z 3 M5x0 8 1 1 5N m PPS Si Au SUS316 C3604 3 ge2 6 0 15mm2 2m 10g 1 20C 101 3kPa 65 RH ANR 12 0 3V IN OUT 5V OUT IN 1V 3 F S 4V 1 5V 4 OkPa DC12 24V
40. 007 SMC Corporation All Rights Reserved
41. N etc 4 Q k EE
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