ペニング真空計 GI-PA/GI-PARY
Contents
1. e O M t OUTPUT one ite s gt k ite A L M5 screw holes x 4 ue g Panel cutout Cle Ii ite Ad al dia 15 GI PARY N g o See Lob p GAUGE CONTROL Sp T POWER 10 lt p SET POINT x 8 e b He u LT 224 amp L 250 L 240 d BRASH TILI YI BRB ULVAC Inc Components Division RAAB TEL 06 6397 2286 WA TEL 022 358 7755 ULVAC RAAB TEL 03 5218 5708 A Overseas TEL 0467 89 2261 Suaheli USA ULVAC Technologies Inc TEL 1 978 686 7550 KOREA ULVAC KOREA Ltd TEL 82 31 683 2922 TAIWAN ULVAC TAIWAN Inc TEL 886 2 8866 1700 CHINA Shanghai Office TEL 86 21 64725879 fe SINGAPORE ULVAC SINGAPORE PTELTD TEL 65 6542 2700 Te SE GERMANY ULVACG m b H TEL 49 89 960909 0 A LXN YP KYLA http www ulvac co jp O 4AZOINAMAZR SHER LSEOBAICEY PRGLCBETSCEPHWET This catalog is subject to change without notice to reflect performance improvements etc A PRINTED WITH K isovink CORSOIAB AEA CAL TOST NE1891 2003126000UYO2. ULVAC W R 2 E Model GI PA GI PARY AEEA 3 Pressure measurement range 1 3X10 1 3Pa AEE Lobe TIS Measurement accuracy Scale factor of 2 or less ARM POJK Pressure indication analog indication asia a Recorder arta DCO 10V By PRAY A GZRF T amp L 288 AC100V 0 5A Set points contact point capacity None 2 points AC 100V 0 5A ER 40 App ieii temperature range USA BA AC100V 10 50 60Hz Power 20VA 21VA Yy bO Controller weight ASIEI E NETA External dimensions WXDXH 240 X 253 X 99 mm AEF WI PA 128 Sensor head WI PA type x 1 WMEFT JIL 4m X 178 toa Sensor head cable Sensor head cable 4mx1 Accessories IRRE 138 Operation manual WETEA TEL DDK 24P 141 Relay output connector None DDK 24P X1 EPSE AEFI JIL 10 15 20 25 30 50m Options Sensor head cables 10 15 20 25 30 50m ETA W Width D Depth H Height 5 HEAR 1 Pa 7 5X10 Torr External dimensions W Width D Depth H Height Reference Pressure conversion 1 Pa 7 5x10 Torr win ye _ Nie TARY Dimension D Gr mm unit mm H Controller E Gauge head 2 22 69 210 C j4
3. ULVAC A YITREit GI PA GI PARY Penning Gauge GI PA GI PARY HRA COMBIRR AERA L WMBBRICKO 103 1PaDENn TRZEJ SERPE EKSE Pressure measurement for sputtering equipment vacuum evaporation equipment plasma test equipment and other equipment These are cold cathode type ionization vacuum gauges that measure pressure in the 103 1 Pa range using the emission current generated by the emission phenomenon occurring in an even magnetic field BR O42 NEE LELIOT WTR SARE Doboka OHEFODOXYTFYZD EAA C HETISERADDOORT Co KI Y he 2 esti GI PARY BAe OA WIULY BERIBISCORR EE FOUCADETTH KkSR2EARBOLACLY Os SST HRA YI OyI a E Features Handling is very easy since the sensor heads do not have filaments Contaminated sensor heads can be reused immediately after simple cleaning Compatible sensor heads 2 set point output available in GI PAPY with a meter relay E Applications Pressure measurement for sputtering equipment vacuum evaporation equipment plasma test equipment and other equipment Pressure monitoring for usual high vacuum pumping systems For Interlocks in various high vacuum pumping equipment ULVAC SOLUT NS A PPS AYVd 19 Wd 19 e6ney Huluusd AYWd 19 Yd es NY 72st GI PA GI PARY Penning Gauge GI PA GI PARY E tt Specifications
Download Pdf Manuals
Related Search