真空 - 放射光科学研究施設 フォトンファクトリー
Contents
1. 250 p 10 cm 2 8 a Pa 11 8x3 14x5 P 926 ls P2. 1 1 Adsorption Absorption A
3. 1 4 2 Fig 27 2
4. KEKB Hig 24 1 BA gauge etc Valve Vacuum Chamber Pirani gauge etc Hig 24 1 1
5. 41 4 2 Fig 12 C Hig 12 z CR a 3 Cc P EE 2 M P pz a 0 C Erri o C 5S C gt gt 1 C MM
6. 1 8 KK AP CE AP 7 1x10 mfsec ATH2 1 He 10 mrsec 2
7. PV X 2 1 z P gt Pj gt a D 4 1_ DD val 1 C 2 10 o 2 10 Fig 4
8. NISS 3 4 7 9
9. Ar Ar Ta Fig 21 KEKB whccepo7_coe_HtoRESsu Argon Instabihty 3 10 2 10 8 g 1 10 0 1 12 19 2002 12 29 2002 1 8 2003 1 18 2003 0 0000 0 0000 0 0000 0 0000 Fig 21 Tig 22
10. KEKB S dt Ss od V Sl le 0 V S
11. 1 OHO 87 2 OHO 91 3 OHO 93 4 OHO 94 5 T OHO 01 6 OHO 04 7 E H Kennard Kinetic Theory of Gases with an Introduction to Statistical McGraw Hill New York 1938 Mechanics 8 Sir J Jeans The Dynamical Theory of Gases Original 4the ed Cambridge UP 1925 Dover 1954 9 W Heitler The Quantum Theory of Radiation Oxford University Press London 1954 10 204 7 1961 11 FE O Goodman and H Y Wachman Dynamics of Gas Surface Scattering Academic Press NY 1976 12
12. Regeneration 0 Cryotrapping Thermal transpiration
13. e 2 PE F 3 2 39 40 41
14. 2 1 1 Y 4 z gag dn V Ag al n T v 4 dt 6 1 do __ dt
15. 5 6 15 mbar N2 792 0 212 Ar 9 47 CO 0 31 Ne 1 9X10 3 He 5 3 X103 CH4 2X1073 Kr 1 1X 10 3 NsO 5X104 Hz2 5X104 Xe 9X10 5 Os 7X1075 20 C 50 HsO 11 7 9
16. a 7 5 Ex V 7 H H M 2 0 11 jp YM 24 28 1 O 8 1 2 2 1 Sniffer Method
17. 2 1 9I 24 1 Q
18. Q 1 10 cm 10 js 0 01 m s 5 mm 10 Pa A 4 10 O 1x10 x0 1x0 1x6 05 1 2x10 Pa m s Q 1 2x10 P 8 0 01 1 2x10 Pa Q 5 cm 5 mm 1mm 10 Pa A 10 og 2x3 14x0 05x0 001 Q 1x10 x 6 3x10 Pa m s 6 3x10 mbar 7 s 10 mbar 7 s 1 4 Na oO 1 4 1
19. 9 es Ho 2 9 47 Maxwell Maxwell 0 20 C 4 118 msec 11 8 7 sec cm M 29 11 67 sec cm fdov dv 80 v dodv 2 8 2
20. 2 005
21. number of desorbed molecules number of incident photons YIELD n molecules photon 10 ET jn 8 10 3 0 102 1 22 23 24 ACCUMULATED PHOTONS m Figure 3 Comparison of desorption yjelds for baked aluminum A 1 pre baked stainless SS 1 and pre baked Cu plated stainless Cu 1 Fig 27 38 1 5 X
22. 9 Hydrogen is ee le 7 Sample Sample 1 Sample 6 OX Sample 5 Sample 3 Sample 4 AR 0 chamber Fig 32 Fig 33 7 j net PV SI Pa m s m Torr 7 s cm 1 Pam s lm 7 5x10 Torr s cm 1 NR
23. 107Pa 10 3 102 1 s Inverted Magnetron Gauge Fig 16 to system port envelope cathode magnet anode guard electrode ceramic support cathode current feedthru to electrometer high voltage feedthru to onode 4 kV Fig 16 Inverted Magnetron Gauge 22 1 6
24. P 0 SoP 1 6 e
25. 2 2 Diffusion Pump 50 30000 s 2 39 Turbomolecular Pump 3 4
26. 2 8 Region 2 Region 2 6 14 6 16 6 24 dg 9g9 99 dn dt dt 9 7 dt RY 8 3 oo V 2 6 25 In 4 gg O d V on CI on V 2 ldg clz InAdQ co pdt od OoVn cln cAl cA a gt gt gt 08 V V V Region 2 ldn al lt 7 V Region 2 Region 2
27. Fig 6 Da F P Da 5 2 12 Fig 6 4 4a Sv Hv x 2 13 8 d 2 Alcos Ac a 2 14 7 301 34 2 14 Hig 7 dn cos 0 cdac dac 9 a a HA 13 2 14
28. 1 18 2 7 10eV 1 3 3 1 4g 1 ce an m8 1 20 p 1 21 ota Zr 1 hm 6 z9 min nin
29. a 8 62x108 J n 35x10 sec 4 61x10 m c 1 10 10 wu 10 Gs L C uj 40 7 NN 10 TL 0 10 40 1 10 10 10 TIME hour Fig 31 Fig 31 6 41 0
30. 20C N PP n m V WT P 1 2 1 38x10 x 273 15 20 2 47 x10 P Pal n lcm_ Q P Torr A 7 cm 3 29x10 Torr 1 3 x 247x10 m Pa 2 47x10 10 cm 7 52 x 10 Torr 329x10 cm Torr PV N 2 47 x10 G Pa m 3 29x10 G Torr 2 5
31. 1 3 z MiG E Sk T T70e QD 7 210 sec 20 C z
32. 1977 13 11 6 1977 14 N F Mott and H S W Massey The Theory of Atomic Collisions OUP New York 1987 15 Vacuum Technology its Foundations and Tables Leybold AG 1987 16 1990 17 1991 18 A H Sullivan 4 Guide To Radiation And Radioactivity Levels Near High Energy Particle Accelerators Nuclear Technology Publishing Ashford 1992 19 ULVAC 1992 20 1994 21
33. 9 3 4 1 4 2x10 477 I18 1 22 3 5 Fig 1 1 9 8X1073 4p p 0 02 GeV HD Cross Section on N atom 10 10 25 gt
34. Varian Lybold BOC Edwards Pfeiffer 2 1 Oil sealed Rotary Pump 1 Hig 18 1 1500 m hr 17 25000 min 1000 10 mbar E1M18 ONE STAGE E2M18 TWO STAGE 20 5 mh 12 1 fmin 342 1 min Fig 18 BOC Edwards Fore pump Fore iine trap
35. EdE 6 3 0 E AE 0 lt c lt 1 1 0 g EAE ln cE T 6 4 O j Ar E AE E AE TEEDAE 0 6 6 _ Og E AE T 99 dt O T 8 6 3 do rg p 6 7 6 7 g
36. g 6 29 dao Gdn 9o 4 gT 7 dt on dt on LV V g A 00 V on _al n 9 3 6 30 V 2 gqg ar 6 14 dn _ g1 7 dt A 9o 6 31 1 V 7 gw c4T V ar 6 30 6 31 do 0 dn 2 dt dt Region 2 6 81 rR
37. Rutherford 9 4 26 27 28l 29 gt mm Z RE 0 2 13x103 A Q min 1 13 p de Boglie 2x a Thomas Fermi g Bohr Z2 4 9
38. 199 22 J M Lafferty ed Foundations of Vacuum Science and Technology John Wiley amp Sons New York 1998 23 1999 24 A W Chao and M Tigner Handbook of Accelerator Physics and Engineering World Scientific Publishing Singapore 1999 25 2001 26 E J Wilhams Proc Roy Soc London A 169 531 1939 27 N M Blachman and E D Courant Phys Rev 74 140 1948 28 J M Greenberg and T H Berlin Rev Sci Instrum 22 293 1951 29 E Fisher CERN Report ISR VAC 67 16 1967 30 M v Smoluchowski Ann Physik 338 1559 1910 31 M Knudsen Ann Physik 28 75 1909 32 S Dushman Production and Measurement of High Vacuum p 32 Schenectady 1922 Int Crit Tabl Vol 1 p 91 New York 1926 J Franklin Inst 211 689 1931 33 P Clausing Anmn Physik 12 961 1932 English translation J Vac Soc Technol 8 636 1971 34 35 K Ka
39. H 1000 km 10 10 mbar 103 Pa Table 1 i 0 lem 3l Cm Pl Nz 5 cy 5 e 5 GeV GeV 105 2 47X1019 61 nm 20 2 um 76 7 m 664 m Rough Vacuum 9 102 2 47X1016 61 um 20 2 mm 76 7 km 664 km Medium vacuum Rg 101 2 47 1013 61mm 20 2 m 7 67X104 km 6 64X108 km High Vacuum HV ae 105 2 47X109 610m 202 km 7 67X108 km 6 64X109 km Ultrahigh Vacuum UHV 6 64X1013 109 2 47x105 6100km 2 02X106 km 7 67 x1012 km 3 m Extreme high Vacuum XHV 2
40. 3 3 2 C 1 s 2sinh C 2 x fcosh k x C12 q u du P x 2 29 Q Q 2 gs 0 3 3 1 3 4 g 7 g 7 7 d P dx Da PO FD F O P 0 S dx 7 1 1 1 Ra n a Pas 9 23 0
41. A KU e e
42. dqd dt 0 _ lt cI nr io A 025 6 el zz 1 a 0 oT ET g E dE 6 10 0 on T 6 11 s Freundlich 8 ooee 0 lt gk7 lt lt 1 8 s n no Oo Ny 40 1 Freundlich a 8 62x108 J o 4 61x10 ty 5x10 2 1 500 6 no
43. IH 1 3 4 VACSEAL Space Environment Laboratories VACSEAL Torr Seal Varian
44. dP OS RN So P P SP 5 P P p p So
45. 4c Vn Van dt 0 Region 2 Region 3 Region 3 4c Vn Region 2 gz Ag 4c Vn Region 2 Region 2 7 Region 2 4 lt 7 lt 4 7 Log Vn Region 2 7 7 Ac Fig 29 4 Vz 4c Vn Region 2 6 41 4c Vm Region 2 Region 2 4c Vn Region 2
46. Vacuum Method Vacuum Method foreline forehne THig 36 Fig 36 2 2 Fig 37 Main Flow Method Counter Flow Method
47. gz 7 7 7 T T T 1 QC 7 7 2 2 g 0 2 0 98 1 11 Y 1 7 ea T T 1 aMT 1 T a 7 c 0 5 10 C 10 0 5 10 0 01 C
48. 7 Maxwell EE 1 5 2m h gl 15 3 il 20 C 1 6 Pa Q Ai 1 6 10x10 2 PPa 9 3 87x10 m 3
49. D dia cosedac a 2 15 a Knudsen 31 e 4 _g CTr 3 2 16 2 15 7I 22 Pca Fig 7 5 20 C 29 Q 7 A A A 2 2 1
50. 1 0 Fig 33 ln ei 44
51. 4 gt gt g 2 1 1 39 E AE g E AE s OO gE dE o 62 0 E E AE 6s E AE 0 lt 9 lt 1 1 g EAE
52. fore line 4 1 Partial Flow Method Direct Counter Flow Partial Flow Method Method Method Fig 37 2 3 1
53. 5 6 N
54. TOF Time of Flight 777 IaSS Am _ separable mass diffrence Am FWHM 50 51 50 Velocity focusing Aston 1919 m Am 130 Directional focusing Dempster 1918 Double Velocity Directional focusing m Am gt 10 4 50 500 FT ICR Spectroscopy 106 TOE 200 CH4 CHs
55. SRG re 2 HI SN SR IN Oe 4 1 8 2 4 3 F P P SI m s js5 O P
56. a aln 6 20 dt 1 0 6 21 dt 6 17 a 1l o a A gt gt g 49g dt 2 4c WW 2 4cV 4c W Hig 28 gL7 6 22 Region 1 Region 2 Region 3 Region 1 Log Vn Region 3 Tig 28 4 V Region 2
57. Hig 19 35 25000 s 10 10 Pa fore hne pressure Compression Hz 1X 102 1X105 He 5X102 1 X107 Ns 5 106 1X1010 IL TL TA 1 High vacuum connection flange 10 Upper touchdown bearing 2 Pump casing 11 Rotor 3 Motor shaft 12 Stator pack 4 Venting connection flange 5 Forevacuum connection flange 13 Permanent magnetic center bearing 14 Purge gas connection flange 6 Stabilizer 15 DC motor 7 Coolin
58. say 1 1 1 7 DC 4 2 32 4 1 3 3 2 81
59. 2 1 1 Through put p py C To Pump Fig 34 Through put Re 3 Fig 34 0 yh 7 1 2 1 2 45 P C1 To Pump S Fig 35 Through put 1 2 Hig 35 1 1
60. Torr 1 atm 760 mmHg 1atm 760 Torr 101325 Pa 10 Pa 1013 25 mbar 1013 23 hPa 1 tH 2 4
61. t Pi Oo Oi gt gt 0 3 Op i NR Through put 3 1 5 1 7 4 Q C P E Py 2 N gt etc O 5 E Ee C nl E M TE N gt N gt MM
62. 1 B 8316 1 2 B 8316 2 1 B 8317 1 2 B 8317 2 B 8323 B 8365 B 8385 Z 3268 1 Z 8126 1 2 Z 8126 2 3 Z 8126 3 Z 8207 Z 8750 Z 8751 Z 8752 Z 8753
63. Co Ci 10 NN 2 4 2 4 1 Hig 8 F CE P C P P F F P Ph Cc 2 20 P Pg C CG Fig 8 2 4 2 Fig 9 f C P P F C P P F F F C C P P 2 21 C P P Cj C C Fig 9 2 4 3 FP Fig 10 Fig 10 F C P P 5P Cs C sS
64. 0 lt V ar dg 6 26 6 26 1 dn cAT 7 6 27 n dt V 6 26 do 9 og 6 28 dt dt 6 26 Region 2 6 28
65. 1 2 RY 10mbar 1 20mbar 2000Pa 1 8 e e Mcleod 0 16Pa at 20 C 105mm 105mbar 103 Pa 1 4 NT e Marcello Pirani 1880 196
66. 1 0 4 1 14 C 9 Rutherford cr mc 1 1 15 ct 4 07x10 0 2g2Z23 n az 1 16 ge 3 2 1 1
67. Im qs Fig 2 0 lt lt 2 dvdw dt Svcos7 Fig 2 gd Fig 3 dS w PV d dsdt P dSv cos 7 f jgdov dv T P cos fv dv half 0 2 8 Pa m sec 4 Pa m m sec ds
68. 2 4 2 2 4 1 6 25 99 _96 dn dt on dt O O 29 a dn gl A OO 6 34 on dt V V on on CO A NR a A 0 99 1 XE on X 1 a 6 35 X E Nl CT Oo 6 35 X 1 X g 1 E kTin MTin 0 2 4 2
69. Region 2 2 6 40 4c Vn Region 2 Region 1 49g 0 Region 2 Rig 30 Region 3 Region Regior Very close to the boundary between Region and 1 Region Pressure log scals Pressure Time log scals Fig 30 2 6 6 41 H Tig 31 coq Freundlich 18 4 0 26 m g 2 83x10 m 295 K 420K
70. 20C Ai kT a 20 mn 3 14x M x1 66 x10 y 47lms M 28 N 587 ms M 18 H O 1250ms M 4 He 1 5 7 7 4V A 2 6 4aL 4a long tube HL 2a Y 4 2 7 Q 20cm 20 C A WV _4g _2a A 6g 3 7 _ 7 3x02 20 sec 471 1 6
71. O 1 x 0 Py ot x 1 7e 2k 2 3 1
72. 6 30 v A0 4 V on uy Vn 1 gt gt 1 1 aln Oo 1 A V on V on aln 6 37 4 Agqgsal n Q SP 6 38 JEZ4R BOD 2 5 2 5 1 RE
73. KEKB 1 20 KEB 83 km 2000 2
74. 1 24 1 4 Maxwell Boltzmann Maxwell Boltzmann f 37 27AT 1 2 r1 3 3 mw Be Fpd 0 2 v fued mn Arithmetical Average Velocity Arithmetical average velocity y Q Q
75. oo edac a i ad lt 0 z 2 ll Cr ll wl ol by 2 3 2 14 1 1 1 C Co 32 C CoW 2 18 W Clausing 331 W W C C 2 19
76. oz c 1 z 4ZVWz 42gg V7 ul 4cV 4c Vn 0 3 4 _ dt 6 17 6 19 o nT 0 6 19
77. 6 14 NE 6 2 6 29 6 29 2 ee dt on dt 7 dt 3 9o 7 9 oT dt V on a O gq V on 6 40 oq gq 2 SP 6 40 6 14 O
78. 15 M EQN2 EM He 6 9 Ne 4 35 Ar 0 83 Kr 0 59 Xe 0 33 Hg 0 303 H gt 2 4 CO 0 92 CO gt 0 69 CHL 0 8 A Ps SR A H2 2 4 Q P Pp A 1 E p Ph Ex Ex Ex X X
79. 2 34 Gauss Li HL a AB AC ave div ea 4C Y Y div Ca 5 a 5 Lc 2 2 34 1 Le 5 dV 4 A 7 3 2 1 1 1 Bourdon Bourdon 100Pa
80. 2Ax s x 0 2Ax P x t i oP x t oF x t ot ox s x P x 0 9 P a Da sP 2 24 2 3 2 1 0 0 x 0 t 0 Go UE X gt 0 OR Op 0 P x0 5 x 0 _ Oo 1 e 4pr 2 25 Q PC Q PadV 4 Pdx G x L 2 LL _ al _ VV _ 2 2aDIL 2C G IT 0 484 a 7e V Ne V D 3 2 1 7 1 r 35x10 m L 10 m y
81. 4 61x10 Mo cTz 1x S87 4 xSx10 6 28x10 m gt 2 54x108 Pa 2 1 8 7 1 cnl 8 6 12 7 oo 6 6 z 9 clz 6 13 dt oy e eq 9 V 9 Ag al n 6 14 dt 9 ci 6 15 dt oO gg d 0 6 16 __clnr o cnr o l do _ c 4 o E dE dt 6 17 1 c4 A dt 0 a Ao al n 6 18 2 2 n o 6 14 6 16 oc
82. 1 1 E 3 2 kT 38 meV gt 7 4 48x10 sec E 0 leV gt 7 35 22x10 sec E leV gt 7 1 50x10 sec 1 2
83. Lo 1 1 A h RS C C2 1 1 3 7 0 0 _ VI 7 3 A dt 0 2 Qo i RW Oi 0 Os 5 6 O 9 QO
84. Meller a EE 9 A 2 1 Oo 7 Ap 1 17 2 CO 14 c 2 2 CZ mC E Bb 1 18 mr mac YB Cy 1 n 2 c 0 13 TE E 14 53 eV C 0 1g Meller
85. XX 2 Positive X ray Effect Negative X ray Effect X Lybold Inficon Inc 37 1 5 2 CCG 103mbar
86. 1 co 7 dl 7 1 9 2 1 1 9 v g 1 Ta 1 10 7 jo g 1 _ 1 _ a a 6 7 jo Y a a a 1 11 1 a 77 Oi 1 12 3 3 1 Rutherford EO
87. Rt 2 S C S CO e P 2 23 3 3 1 z P g lt s F x t g FY a 2Ax Ar Ax Pr Ac
88. 1 5 1 HCG 103Pa 1012Pa 10 3 101Pa 861 BA R T Bayard D Alpert Westinghouse Research laboratory Fig 15 BA I
89. 3 6 1
90. SRG 10 2Pa 10 5Pa 2 2 M Q 4 Fourier Transform Ion Cycrotron Resonance FT ICR Spectroscopy
91. 20 1000 s nn Vaclon Plus 500 Fig 20 Sputter lon Pump Varian Diode Anode Cathode Tridode
92. 7 7 ns Y Ni 1 1 7v 7 nsV T v 7 7 v 7 JT 2 6 Sputter 1on Pump 10 Torr
93. mu 2 2 JIS Z8126 1 2 3 I EN 1 mm mmHg Torr Evangelista Torricelh 1628 1707 1 Torr 1 mmHsg 1 36 gf cm SI Pa Blaise Pascal 1623 1662 1Pa 1Nm 0 0102 gf cm Torr 1 mbar 1 hPa 100 Pa 11orr 133Pa 1 33 mbar 1Pa 10 mbar 7 52x10 Torr mbar hPa Torr
94. 10cm 926 7s 250 7s 78 2
95. 2 Region 2 Region 2 oe a dt dn V lt aln dt 6 23 4cVz Fig 28 Fig 28 Region 2 Region 2 Region 2 Region 2 Region 2 Region 2 4o Wz Region 2 1 1 1 VWgT
96. 2 33 5 34 Hig 13 A B B A A A Fig 13 5 aQ L sf 0 ras 7 0 ddsg 5g 0 0 AZ 2 34 Ls
97. AE Saturation Effect 2 z S PRESSURE mbar Fig 22 Varian NO Hig 23 5 18 8SUS8 Al Cr Cu Be Cu 1 0 JIS e ConFlat CF O e KF ISO KF 0 know how O 4 5
98. Q S 200 Imin V 107 WS 1 2 1 t 17t THig 25 10 Pa M Q 18 Total Pressure 10 Pa 110 8 10 610 Arb Unit 410 2 109 oh x 0 10 20 30 40 50 MO Fig 25 10 Pa 180 C Fig 26 HHHHHHUHHH 60EFO0 Ha mlnn Mj Oe mn 115 17 19 21 23 25 27 29 31 33 35 37 nnnn 39 41 43 45 47 49 nH Fig 26
99. 103 CO Nz Fig 17 KEKB 4 Q Fig 17 Spectrum 1 8x10 12 1 2x10 12 6 0x10 13 Fig 17 103 Pa Ionization Gauge 3 1 1 2 1 USA National Institute of Standards and Technology NIST Germany 5 W Physikalisch Technische Bundesanstalt PTB Englan
100. UL 9 Se Filament Collector insulator shield TT Closed grid cage Ceramic insulators Fig 15 BA 22 2 7 P i Ci P 107pg7 18 g F E Ci_ p p G 1
101. A 9o V on 1 dn _ kl 6 32 dt on Q Freundlich ekT gs0 n no 6 32 A 7 1 7 1 Mr CD akT 1 no Ny 2 7 ok7c4 7Z g7 lt lt 1 fh lt lt t m gt gt n 1 o7 7 a 7 ny akTcA 7 7 2 Q ga Inz
102. a jar 2 CeaE 68 0 0 3 A 2 1 6 E AE Os E AE rlE T 6 5 E T E T Tye 7 2 2 II 2 1 2 o n
103. 3 NS TRISTAN AR PF AR A6063 H C 0 42 48 Rd ERDA El astic Recoil Detection Analysis 50 MeV 200nm
104. CH2 CH C 4 TOF M Q 28 CO Ng C O NT CO N Q CO Ns A m C 12 011 0 15 9994 N 14 00674 C 0 28 0104 N N 28 03348
105. 10 7 Cross Section m i Jonization Los 10 0 01 0 1 SS RS _ romalRutnertond seartering T otal Rutherford Scattering e Total Ionization p 1 Rutherford Scattenng Loss p Nuclear Colhsion Loss ei 1 Kinetic Energy Ge V Fig 1 Radiative Loss e p 4 S HII 0 1 104 cm3 HI 103 106 cm 3 20 cm3 1
106. 1250 m s _ 3x100 4x5x10 x1250 2 7 Sx10 m Sx10 m y 1250 m s _ 3x2 Sx10 4x5x107 x1250 1 20 sec 0 03 sec 1 Fig 11 0 5 0 4 lt 0 3 0 2 0 1 0 0 0 5 1 5 2 25 3 Time sec Hig 11 3 2 2 x 72 _ Gr i 29 ox x L 2 Dr Da 7 7 6 7 0 93 Oo r 4 C Go OoAr Ar 7 az 0 3 2 3 sy EP a Da Por G2 a Dt 3 3 2 s 9 9 2 p Or s mm 3 3 1 P x eoa 2 2 28 f Da Q Q 2 gs
107. Apwp 2 Typical half Vertical aperture Typical value of the Vertcal beta function 1 Ap a bucket height 1 8 SE i I AE Z
108. 1 kg cm1 20 30 70 100 100 150 100 150 100 150 100 150 100 150 40 63 100 160 Fig 23 13 Viton Viton e 0 Viton 2 e Cu OFHC C1011 A1 A1050 e O Garlock CF Table 2 Table 2 SUS BeCu CrCu Ti 1G G B B SUS SUS BeCu G CrCu B SUS Ti G B 150 C 200 C Ag
109. 1 1 2 6 2 2 1 Boltzmann Constant 1 38x10 J K Absolute Temperature 7 K 273 15 7 C Specific weight of Hg 13 6 gcm at 0 C Acceleration of free fall g 9 81 ms Atomic mass unit m 1 66 x10 kg Elementary charge e 1 60 x 10 C
110. 2 2 da Fig 5 1 gt gt i x xr x 2 x Fig 5 x Ft P L I2 ha gt Prth 2 ha dP x 2 dx 7 n ro FO Da 6 2 11 27
111. 8 Berlin a Fig 14 22 103 10mbar 10 3mbar 1013mbar T 9 1 5
112. d National Physical Laboratory NPL AIST 2 1 1 kPa 100kPa Quartz Bourdon spiral manometer 0 1 Pa 1kPa Capacitance diaphram gauges CD Baratron 103 Pa 1 Pa Spinning Roter Gauge SRG 258VS 1 JIS Z 8750 0 27 Pa 8 0 18 Pa 8 KEKB 2 SRG SRG
113. g waler connection 16 Lower touchdown bearing 8 Aidl sensor 17 Stabilizer connection 9 Splinter guard 18 Aial sensor connection Fig 19 Lybold 2 4 2 4 1 TSP Titanium Sublimation Getter Pumps i CH4 CH4 1 cm 3 9 5 2 4 2 NEG QNon Evaporable Getter SAES Getters St101 Zr Al alloy St707 Zr V Fe alloy Phenomena on an active NEG particle sorption bulk diffusion Hz Diffuse rapidly into the bulk A given concentration of hydrogen inside Dissociatio
114. n surface the getter alloy corresponds to an equihbrium pressure of hydrogen CO CO2 Os Ns Chemisorbed irreversibly The chemical bonds of the gas molecule are first broken Then oxides nitrides carbides are formed At high temperature no desorption but diffusion into the bulk Water and Hydrocarbon Crack into H C and O and interact as above Sorption effic1ency of hydrocarbons is very small e Activation The heat treatment which makes diffuse thin protective layer formed on the surface by air exposure during manufacturing Pressure must be kept less than 10 4 Torr Re activation This makes hydrogen evaporate and other species diffuse into matter Gas during re activation Mainly Hz and physisorbed CO COs HsO CH4 etc TSP CH4 St707 1 cm 0 1 0 3 fs ny gt 2 5 Adsorption Isotherm
115. nazawa J Vac Sci Technol A6 3002 1988 30 658 1987 36 G J Schulz and A V Phelps Rev Sci Instrum 28 1051 1957 37 F Watanabe J Vac Sci Technol AS 242 1987 38 H J Halama and C L Foerster Vacuum 42 185 1991 391G Horikoshi J Vac Sci Technol AS 2501 1987 40 K Kanazawa J Vac Sci Technol A7 3361 1989 JIS 41 33 467 1990 N 42 K Kanazawa M Yanokura M Aratani and H Akiyama Vacuum 44 7 1993 43 38 388 1995 44 O Grobner A G Mathewson and P C Marin J Vac Technol A12 846 1994 45 C W Oatley Brit J Appl Phys 5 358 1954 46 http wwwsoc nii ac jp vsj 47 http www jvia gr jp B 2290
116. oan A a KE 97 dt 6 41 dt 4 9o 1 V on 2 5 2 4ZV 4cVWz Hig 29 4cV 2 Region 2 4c Van Region 2 Region 2 Region 2 6 142 Ag glz 42 42
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