油回転真空ポンプ VS650A/VS750A
Contents
1. TEL 03 5218 6011 TEL 06 6397 2281 Www ulvac co jp TEL 81 467 89 2261 gt 1174N 1 2015026000SP2. HE A _1SO MBP SI SI 8 0Pa 6X107Torr 1 0 8Pa 2 26C VS650A V VS Z50A W 3 L min 5 L min 5 L min 3 L min 5 L min 5 L min JIS 400 50000Pa GP 1 GP 2 4 5 6
3. Max30L gt ULVAC SOLUTIONS VS650A VS750Aj gt VS650A A VS750A A 0 mm G1 a i a DN 100 IS0 K 615 88 7 Se i Rc1 VS650A W VS750A W mm DN 100 IS0 K mm 229 5 15 7
4. VS650A VS750Aj VS650A VS750A 1 VS650A A gt 1 650m3 h 750m3 h 2 gt gt gt
5. DN 100 IS0 K JIS VG200 DDNIIIGGMIS0 EE MBP PMB2400D 2 lt eA el EQ ML TD al 1 5 AO 26 S0 Rc1 ULVAC SOLUTIONS PMB2400D VS650A W VS750A W mm Hg 0 OF IO es Q MS 18 H DN 100 IS0 K JIS VG200 DN 160 IS0 K 64 NL a Ih Le 9 1O 1O Fs 0 VS650A60Hz2 9
6. 24 11 kg h 50Hz 26 15 34 19 26 15 34 19 GP2 60Hz 34 19 34 19 kw Poles 22 4 MBP 7 5 2 RP 22 4 1 Hz 8 11 9 12 Mj ee 11 12 0 50Hz 200 240 380 415 200 240 380 415 200 240 380 415 200 240 380 415 1 60Hz 200 240 380 460 200 240 380 460 4 ULVOIL R 7 1 MBP ULVOIL R 4 TRP ULVOIL R 7 mam 1 II 47 7 MPa 0 0 5 0 5 gt 0 5 MPa es01 a 0 0 mn 30 30 SO 2 1 a 5 30 5 30 200G Ee DN 100 ISO K VG200 DN 160 ISO K DN 100 ISO K DN 100 ISO K kg 806 800 802 2796 1076 1070 1072 1066 WxDxH mm 1490X905X705 1490X841X705 1490X905X705 1490X841X705 1490X905X1260 i1490X841X1260j1490X905x1260i1490X841x1260 CE cTUVUs CE cTUVUs 1 1 1 1
7. 4 2 5 1 VS750A 50Hz 60Hz 2 DC24V 3 VS650A VSZ750A ULVAC SOLUTIONS VS650AA VS650AW VS750AA VSZ50AW eG Ye Gy 50Hz 650 10833 750 12500 2500 41667 3100 51667 NR 750 12500 3100 51662 GP 8 lt 0 8 pa 1GP1 lt 50 lt 5 GP2 lt 60 lt 6 Ee ON _ 4500 2500 5500 2500 1200 750 1600 700 2 60Hz 5500 2500 1600 700 Pa 0 3800 Z500 4000 2500 1200 2800 1200 60Hz 7500 4000 2800 1200 i 50Hz 17 11 24 13 16 10 24 11 GP1 SFP a 2 60Hz 24 13
8. 700 W6750A 50Hz Water Cooling WS650A50H OD Air Cooling 0 2 500 C C E 500 MR Re 8 a 8 2000 400 4 i 2 1 500 a i NH PWB2400D 1000 VS650A 60HZ 200 Gas Ballast Closed NN VS750A 50Hz Gas Ballast Valve 1 Opened 500 pMB24000 100 U6650A 50Hz 0 1 0 1 10 102 103 104 105 10 10 102 103 104 105 Pressure Pa Pressure Pa gt VS650A W 02222 192211131 0 50Hz Z50m h 60Hz ISO K 1 BBBO EGG DE OD DOD DO BQ WY 6 1 1 1 A AN 2 2 3 3 2 2 3 4 1 A gt 3 9 0 FKIV i ISO K a EE 0 1 a 2 2 0 6 3 SN
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