1. 2L min C 400C FY OFF OPFF NO AC100 V 100 V 200 V AC100 V HE 1 2 2. OFF 25 LEL 50 LEL 50 ppm OFF ON 250C 3. 500 220C 2 L min 500 mlmin 250C XAFS XAFS 2010 10 PHS 4942 E mail yasuhiro ntwa keK D 4. OFF MFC sccm sccm 100 106 7 200 208 4 500 491 5 1000 928 9 x 1500 1305 x 2000 1810 x ON MFC sccm sccm 200 207 8 500 501 8 1000 966 ON MFC sccm sccm 200 235 8 x 1000 1113 x 1500 1553 2000 1950 1000 1007 1 4 1500 1449 MFC 5. ON 3 ON 250C 250C 4 ON 300 ml min Da OFF Bl 6 mm 174 inch 3mm 178 inch